| 123456789101112131415161718192021222324252627282930313233343536373839404142434445464748495051525354555657585960616263646566676869707172737475767778798081828384858687888990919293949596979899100101102103104 | <?xml version="1.0" encoding="utf-8"?><Aitex>	<TableParameterFormat ChamberType="TempPID" Version="1.0"  TableNumber="10">      <!--###########################################-->    <Catalog DisplayName="ParameterInfo">      <Group DisplayName="Parameter Information">        <Step ModuleName="" DeviceType="" DisplayName="No." ControlName="TableNo" InputType="ReadOnly" />        <Step ModuleName="" DeviceType="" DisplayName="Name" ControlName="Name" InputType="TextInput" />        <Step ModuleName="" DeviceType="" DisplayName="Use Temp" ControlName="UseTemp" InputType="NumInput" InputMode="" Min="0" Max="700"  />      </Group>    </Catalog>    <!--###########################################-->    <Catalog DisplayName="Table">      <Group DisplayName="HT.U" ControlName="HTU">        <Step ModuleName="" DeviceType="" DisplayName="P(%)" DefaultValue="0.5" ControlName="P" InputType="DoubleInput" InputMode=""  Min="0.1" Max="2000"/>        <Step ModuleName="" DeviceType="" DisplayName="I(min)" DefaultValue="10" ControlName="I" InputType="DoubleInput" InputMode=""  Min="0" Max="2000"/>        <Step ModuleName="" DeviceType="" DisplayName="D(min)" DefaultValue="0" ControlName="D" InputType="DoubleInput" InputMode=""  Min="0" Max="2000"/>      </Group>	 <Group DisplayName="HTCU" ControlName="HTCU">        <Step ModuleName="" DeviceType="" DisplayName="P(%)" DefaultValue="0.5" ControlName="P" InputType="DoubleInput" InputMode=""  Min="0.1" Max="2000"/>        <Step ModuleName="" DeviceType="" DisplayName="I(min)" DefaultValue="10" ControlName="I" InputType="DoubleInput" InputMode=""  Min="0" Max="2000"/>        <Step ModuleName="" DeviceType="" DisplayName="D(min)" DefaultValue="0" ControlName="D" InputType="DoubleInput" InputMode=""  Min="0" Max="2000"/>      </Group>	 <Group DisplayName="HT.C" ControlName="HTC">        <Step ModuleName="" DeviceType="" DisplayName="P(%)" DefaultValue="0.5" ControlName="P" InputType="DoubleInput" InputMode=""  Min="0.1" Max="2000"/>        <Step ModuleName="" DeviceType="" DisplayName="I(min)" DefaultValue="10" ControlName="I" InputType="DoubleInput" InputMode=""  Min="0" Max="2000"/>        <Step ModuleName="" DeviceType="" DisplayName="D(min)" DefaultValue="0" ControlName="D" InputType="DoubleInput" InputMode=""  Min="0" Max="2000"/>      </Group>	 <Group DisplayName="HTCL" ControlName="HTCL">         <Step ModuleName="" DeviceType="" DisplayName="P(%)" DefaultValue="0.5" ControlName="P" InputType="DoubleInput" InputMode=""  Min="0.1" Max="2000"/>        <Step ModuleName="" DeviceType="" DisplayName="I(min)" DefaultValue="10" ControlName="I" InputType="DoubleInput" InputMode=""  Min="0" Max="2000"/>        <Step ModuleName="" DeviceType="" DisplayName="D(min)" DefaultValue="0" ControlName="D" InputType="DoubleInput" InputMode=""  Min="0" Max="2000"/>      </Group>	<Group DisplayName="HT.L" ControlName="HTL">         <Step ModuleName="" DeviceType="" DisplayName="P(%)" DefaultValue="0.5" ControlName="P" InputType="DoubleInput" InputMode=""  Min="0.1" Max="2000"/>        <Step ModuleName="" DeviceType="" DisplayName="I(min)" DefaultValue="10" ControlName="I" InputType="DoubleInput" InputMode=""  Min="0" Max="2000"/>        <Step ModuleName="" DeviceType="" DisplayName="D(min)" DefaultValue="0" ControlName="D" InputType="DoubleInput" InputMode=""  Min="0" Max="2000"/>      </Group>	<Group DisplayName="PR.U" ControlName="PRU">         <Step ModuleName="" DeviceType="" DisplayName="P(%)" DefaultValue="0.5" ControlName="P" InputType="DoubleInput" InputMode=""  Min="0.1" Max="2000"/>        <Step ModuleName="" DeviceType="" DisplayName="I(min)" DefaultValue="10" ControlName="I" InputType="DoubleInput" InputMode=""  Min="0" Max="2000"/>        <Step ModuleName="" DeviceType="" DisplayName="D(min)" DefaultValue="0" ControlName="D" InputType="DoubleInput" InputMode=""  Min="0" Max="2000"/>      </Group>	<Group DisplayName="PRCU" ControlName="PRCU">         <Step ModuleName="" DeviceType="" DisplayName="P(%)" DefaultValue="0.5" ControlName="P" InputType="DoubleInput" InputMode=""  Min="0.1" Max="2000"/>        <Step ModuleName="" DeviceType="" DisplayName="I(min)" DefaultValue="10" ControlName="I" InputType="DoubleInput" InputMode=""  Min="0" Max="2000"/>        <Step ModuleName="" DeviceType="" DisplayName="D(min)" DefaultValue="0" ControlName="D" InputType="DoubleInput" InputMode=""  Min="0" Max="2000"/>      </Group>	<Group DisplayName="PR.C" ControlName="PRC">         <Step ModuleName="" DeviceType="" DisplayName="P(%)" DefaultValue="0.5" ControlName="P" InputType="DoubleInput" InputMode=""  Min="0.1" Max="2000"/>        <Step ModuleName="" DeviceType="" DisplayName="I(min)" DefaultValue="10" ControlName="I" InputType="DoubleInput" InputMode=""  Min="0" Max="2000"/>        <Step ModuleName="" DeviceType="" DisplayName="D(min)" DefaultValue="0" ControlName="D" InputType="DoubleInput" InputMode=""  Min="0" Max="2000"/>      </Group>	<Group DisplayName="PRCL" ControlName="PRCL">         <Step ModuleName="" DeviceType="" DisplayName="P(%)" DefaultValue="0.5" ControlName="P" InputType="DoubleInput" InputMode=""  Min="0.1" Max="2000"/>        <Step ModuleName="" DeviceType="" DisplayName="I(min)" DefaultValue="10" ControlName="I" InputType="DoubleInput" InputMode=""  Min="0" Max="2000"/>        <Step ModuleName="" DeviceType="" DisplayName="D(min)" DefaultValue="0" ControlName="D" InputType="DoubleInput" InputMode=""  Min="0" Max="2000"/>      </Group>	<Group DisplayName="PR.L" ControlName="PRL">         <Step ModuleName="" DeviceType="" DisplayName="P(%)" DefaultValue="0.5" ControlName="P" InputType="DoubleInput" InputMode=""  Min="0.1" Max="2000"/>        <Step ModuleName="" DeviceType="" DisplayName="I(min)" DefaultValue="10" ControlName="I" InputType="DoubleInput" InputMode=""  Min="0" Max="2000"/>        <Step ModuleName="" DeviceType="" DisplayName="D(min)" DefaultValue="0" ControlName="D" InputType="DoubleInput" InputMode=""  Min="0" Max="2000"/>      </Group>    </Catalog>  </TableParameterFormat>	<TableParameterSchema>    <xs:schema attributeFormDefault="unqualified" elementFormDefault="qualified" xmlns:xs="http://www.w3.org/2001/XMLSchema">      <xs:simpleType name="booleanType">        <xs:restriction base="xs:string">          <xs:enumeration value="0" />          <xs:enumeration value="1" />          <xs:enumeration value="False" />          <xs:enumeration value="True" />          <xs:enumeration value="false" />          <xs:enumeration value="true" />        </xs:restriction>      </xs:simpleType>      <xs:element name="TableParameterData">        <xs:complexType>          <xs:sequence>            <xs:element maxOccurs="unbounded" name="Step">              <xs:complexType>                <xs:attribute name="TableNo" type="xs:string" use="required" />                <xs:attribute name="Name" type="xs:string" use="required" />                <xs:attribute name="Type" type="xs:string" use="required" />                <xs:attribute name="UseTemp" type="xs:decimal" use="required" />              </xs:complexType>            </xs:element>          </xs:sequence>          <xs:attribute name="ParameterChamberType" type="xs:string" fixed="Parameter" use="required" />          <xs:attribute name="ParameterType" type="xs:string" use="required" />          <xs:attribute name="ParameterVersion" type="xs:string" fixed="1.0" use="required" />          <xs:attribute name="CreatedBy" type="xs:string" use="required" />          <xs:attribute name="CreationTime" type="xs:dateTime" use="required" />          <xs:attribute name="LastRevisedBy" type="xs:string" use="required" />          <xs:attribute name="LastRevisionTime" type="xs:dateTime" use="required" />          <xs:attribute name="Description" type="xs:string" use="required" />        </xs:complexType>      </xs:element>    </xs:schema>  </TableParameterSchema></Aitex>
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