FurnaceELK/Furnace/FurnaceRT/Config/IO/ELK/DeviceModelPM.xml

<?xml version="1.0" encoding="utf-8"?>
<DeviceModelDefine type="Furnace" xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance"  >
	<IoLPs classType="FurnaceRT.Devices.IoLP" assembly="FurnaceRT">
		<IoLP id="LP1" display="LP1" schematicId="LP1" unit=""
					diLeftClamp="DI_LP1FOUPLeftClamp"
					diRightClamp="DI_LP1FOUPRightClamp"
					diLeftRelease="DI_LP1FOUPLeftRelease"
					diRightRelease="DI_LP1FOUPRightRelease"
					diInPosition1="DI_LP1FOUPInPosition1"
					diInPosition2="DI_LP1FOUPInPosition2"
					diInPosition3="DI_LP1FOUPInPosition3"
					diDetect="DI_LP1FOUPDetect"
			  
					doClamp="DO_LP1FOUPClamp"
					doRelease=""
					doPresence="DO_LP1FOUPPresence"
					doPlacement="DO_LP1FOUPPlacement"
					doLoad="DO_LP1FOUPLoad"
					doUnload="DO_LP1FOUPUnload"
					doManual="DO_LP1FOUPManual"
          
					scRootPath="LoadPort"
				/>
		<IoLP id="LP2" display="LP2" schematicId="LP2" unit=""
					diLeftClamp="DI_LP2FOUPLeftClamp"
					diRightClamp="DI_LP2FOUPRightClamp"
					diLeftRelease="DI_LP2FOUPLeftRelease"
					diRightRelease="DI_LP2FOUPRightRelease"
					diInPosition1="DI_LP2FOUPInPosition1"
					diInPosition2="DI_LP2FOUPInPosition2"
					diInPosition3="DI_LP2FOUPInPosition3"
					diDetect="DI_LP2FOUPDetect"
			  
					doClamp="DO_LP2FOUPClamp"
					doRelease=""
					doPresence="DO_LP2FOUPPresence"
					doPlacement="DO_LP2FOUPPlacement"
					doLoad="DO_LP2FOUPLoad"
					doUnload="DO_LP2FOUPUnload"
					doManual="DO_LP2FOUPManual"
          
					scRootPath="LoadPort"
				/>

		<IoLP id="LP3" display="LP3" schematicId="LP3" unit=""
					diLeftClamp=""
					diRightClamp=""
					diLeftRelease=""
					diRightRelease=""
					diInPosition1="DI_LP3FOUPInPosition1"
					diInPosition2="DI_LP3FOUPInPosition2"
					diInPosition3="DI_LP3FOUPInPosition3"
					diDetect="DI_LP3FOUPDetect"
			  
					doClamp=""
					doRelease=""
					doPresence=""
					doPlacement=""
					doLoad=""
					doUnload=""
					doManual=""
 
					diE84Valid="DI_Loadport1E84Valid"
					diE84CS0="DI_Loadport1E84CS0"
					diE84CS1="DI_Loadport1E84CS1"
					diE84TREQ="DI_Loadport1E84TRREQ"
					diE84Busy="DI_Loadport1E84busy"
					diE84COMPT="DI_Loadport1E84COMPT"
					diE84CONT="DI_Loadport1E84CONT"
					  
					doE84REQ="DO_loadport1E84REQ"
					doE84UREQ="DO_loadport1E84UREQ"
					doE84Ready="DO_loadport1E84Ready"
					doE84HOAVBL="DO_loadport1E84HOAVBL"
					doE84ES="DO_loadport1E84ES"
			  
			  
			scRootPath="LoadPort"
			/>

		<IoLP id="LP4" display="LP4" schematicId="LP4" unit=""
				diLeftClamp=""
				diRightClamp=""
				diLeftRelease=""
				diRightRelease=""
				diInPosition1="DI_LP4FOUPInPosition1"
				diInPosition2="DI_LP4FOUPInPosition2"
				diInPosition3="DI_LP4FOUPInPosition3"
				diDetect="DI_LP4FOUPDetect"
			  
				doClamp=""
				doRelease=""
				doPresence=""
				doPlacement=""
				doLoad=""
				doUnload=""
				doManual=""
				diE84Valid="DI_Loadport2E84Valid"
				diE84CS0="DI_Loadport2E84CS0"
				diE84CS1="DI_Loadport2E84CS1"
				diE84TREQ="DI_Loadport2E84TRREQ"
				diE84Busy="DI_Loadport2E84busy"
				diE84COMPT="DI_Loadport2E84COMPT"
				diE84CONT="DI_Loadport2E84CONT"
				  
				  		  
				doE84REQ="DO_loadport2E84REQ"
				doE84UREQ="DO_loadport2E84UREQ"
				doE84Ready="DO_loadport2E84Ready"
				doE84HOAVBL="DO_loadport2E84HOAVBL"
				doE84ES="DO_loadport2E84ES"
			  
				scRootPath="LoadPort"
				/>

	</IoLPs>
	<E84Passivers  classType="FurnaceRT.Devices.E84Passiver" assembly="FurnaceRT">
		<E84Passiver module="LP3" id ="Loadport3E84" display="Loadport3 E84" schematicId=""
						   VALID  ="DI_Loadport1E84Valid"
						   CS0   ="DI_Loadport1E84CS0"
						   CS1   ="DI_Loadport1E84CS1"
						   AMAVBL=""
						   TRREQ ="DI_Loadport1E84TRREQ"
						   BUSY   ="DI_Loadport1E84busy"
						   COMPT  ="DI_Loadport1E84COMPT"
						   CONT   ="DI_Loadport1E84CONT"
						   LightCurtain   =""
						   Present1   ="DI_LP3FOUPInPosition1"
						   Present2   ="DI_LP3FOUPInPosition2"
						   Present3   ="DI_LP3FOUPInPosition3"
						   Seat   ="DI_LP3FOUPDetect"
                   
						   LREQ  ="DO_loadport1E84REQ"
						   UREQ  ="DO_loadport1E84UREQ"
						   READY  ="DO_loadport1E84Ready"
						   HOAVBL="DO_loadport1E84HOAVBL"
						   ES     ="DO_loadport1E84ES"
                   />

		<E84Passiver module="LP4" id ="Loadport4E84" display="Loadport4 E84" schematicId=""
						 VALID  ="DI_Loadport2E84Valid"
						 CS0   ="DI_Loadport2E84CS0"
						 CS1   ="DI_Loadport2E84CS1"
						 AMAVBL=""
						 TRREQ ="DI_Loadport2E84TRREQ"
						 BUSY   ="DI_Loadport2E84busy"
						 COMPT  ="DI_Loadport2E84COMPT"
						 CONT   ="DI_Loadport2E84CONT"
						 LightCurtain   =""
						 Present1   ="DI_LP4FOUPInPosition1"
						 Present2   ="DI_LP4FOUPInPosition2"
						 Present3   ="DI_LP4FOUPInPosition3"
						 Seat   ="DI_LP4FOUPDetect"
                   
						 LREQ  ="DO_loadport2E84REQ"
						 UREQ  ="DO_loadport2E84UREQ"
						 READY  ="DO_loadport2E84Ready"
						 HOAVBL="DO_loadport2E84HOAVBL"
						 ES     ="DO_loadport2E84ES"
                   />

	</E84Passivers>

	<IoFIMSs classType="FurnaceRT.Devices.IoFIMS" assembly="FurnaceRT">
		<IoFIMS id="FIMS1" display="FIMS1" schematicId="FIMS1" unit=""
					diLoadComplete="DI_FIMS1LoadComplete"
					diUnloadComplete="DI_FIMS1UnloadComplete"
					diHomeComplete="DI_FIMS1HomeComplete"
					diRunning="DI_FIMS1Running"
					diAutoManual="DI_FIMS1AutoManualMode"
					diDock="DI_POD1FOUPExtend"
					diUndock="DI_POD1FOUPRetract"
					diExist="DI_POD1FOUPInPosition"
					diSeal="DI_POD1XForward"
					diRelease="DI_POD1XBackward"
					diDoorOpen="DI_POD1YForward"
					diDoorClose="DI_POD1YBackward"
					diLatchOn="DI_POD1FOUPLocked"
					diLatchOff="DI_POD1FOUPUnlocked"
					diCollisionAvoidanceDown="DI_POD1CollisionAvoidanceBackward"
					diCollisionAvoidanceUp="DI_POD1CollisionAvoidanceForward"
					diN2PurgeValveClosed="DI_POD1N2PurgeAV63Closed"
					diN2PurgeValveOpened="DI_POD1N2PurgeAV63Opened"
					diFOUPVacuumSuckingOK="DI_POD1FOUPVacuumSuckingOK"
					diFOUPVacuumSuckingNotOK="DI_POD1FOUPVacuumSuckingAlarm"
		
					diWaferOnRobot="DI_POD1WaferOnRobot"
					diWaferRobotEX1AxisHomePosition="DI_WaferRobotEX1AxisHomePosition"
					diWaferRobotEX2AxisHomePosition="DI_WaferRobotEX2AxisHomePosition"
				
					doLoad="DO_FIMS1LoadCommand"
					doUnload="DO_FIMS1UnloadCommand"
					doHome="DO_FIMS1HomeCommand"
					doAlarmReset="DO_FIMS1AlarmReset"
				
					doDock="DO_FIMS1Dock"
					doUndock="DO_FIMS1Undock"
					doSeal="DO_FIMS1Seal"
					doRelease="DO_FIMS1Release"
					doDoorOpen="DO_FIMS1DoorOpen"
					doDoorClose="DO_FIMS1DoorClose"
					doLatch1On="DO_FIMS1Latch1On"
					doLatch2On="DO_FIMS1Latch2On"
					doLatch1Off="DO_FIMS1Latch1Off"
					doLatch2Off="DO_FIMS1Latch2Off"
					doCollisionAvoidanceDown="DO_FIMS1CollisionAvoidanceDown"
					doCollisionAvoidanceUp="DO_FIMS1CollisionAvoidanceUp"
					doN2PurgeValveOpen="DO_FIMS1N2PurgeValveOpen"
					doN2PurgeValveClose="DO_FIMS1N2PurgeValveClose"
					doVaccumValveOpen="DO_FIMS1VaccumValveOpen"
					doVaccumValveClose="DO_FIMS1VaccumValveClose"
				
					scRootPath="FIMS"
				/>
		<IoFIMS id="FIMS2" display="FIMS2" schematicId="FIMS2" unit=""
					diLoadComplete="DI_FIMS2LoadComplete"
					diUnloadComplete="DI_FIMS2UnloadComplete"
					diHomeComplete="DI_FIMS2HomeComplete"
					diRunning="DI_FIMS2Running"
					diAutoManual="DI_FIMS2AutoManualMode"
					diDock="DI_POD2FOUPExtend"
					diUndock="DI_POD2FOUPRetract"
					diExist="DI_POD2FOUPInPosition"
					diSeal="DI_POD2XForward"
					diRelease="DI_POD2XBackward"
					diDoorOpen="DI_POD2YForward"
					diDoorClose="DI_POD2YBackward"
					diLatchOn="DI_POD2FOUPLocked"
					diLatchOff="DI_POD2FOUPUnlocked"
					diCollisionAvoidanceDown="DI_POD2CollisionAvoidanceBackward"
					diCollisionAvoidanceUp="DI_POD2CollisionAvoidanceForward"
					diN2PurgeValveClosed="DI_POD2N2PurgeAV63Closed"
					diN2PurgeValveOpened="DI_POD2N2PurgeAV63Opened"
					diFOUPVacuumSuckingOK="DI_POD2FOUPVacuumSuckingOK"
					diFOUPVacuumSuckingNotOK="DI_POD2FOUPVacuumSuckingAlarm"
		
					diWaferOnRobot="DI_POD2WaferOnRobot"
					diWaferRobotEX1AxisHomePosition="DI_WaferRobotEX1AxisHomePosition"
					diWaferRobotEX2AxisHomePosition="DI_WaferRobotEX2AxisHomePosition"
				
					doLoad="DO_FIMS2LoadCommand"
					doUnload="DO_FIMS2UnloadCommand"
					doHome="DO_FIMS2HomeCommand"
					doAlarmReset="DO_FIMS2AlarmReset"
					doDock="DO_FIMS2Dock"
					doUndock="DO_FIMS2Undock"
					doSeal="DO_FIMS2Seal"
					doRelease="DO_FIMS2Release"
					doDoorOpen="DO_FIMS2DoorOpen"
					doDoorClose="DO_FIMS2DoorClose"
					doLatch1On="DO_FIMS2Latch1On"
					doLatch2On="DO_FIMS2Latch2On"
					doLatch1Off="DO_FIMS2Latch1Off"
					doLatch2Off="DO_FIMS2Latch2Off"
					doCollisionAvoidanceDown="DO_FIMS2CollisionAvoidanceDown"
					doCollisionAvoidanceUp="DO_FIMS2CollisionAvoidanceUp"
					doN2PurgeValveOpen="DO_FIMS2N2PurgeValveOpen"
					doN2PurgeValveClose="DO_FIMS2N2PurgeValveClose"
					doVaccumValveOpen="DO_FIMS2VaccumValveOpen"
					doVaccumValveClose="DO_FIMS2VaccumValveClose"
				
					scRootPath="FIMS"
				/>
	</IoFIMSs>
	<IoDoors classType="FurnaceRT.Devices.IoDoor" assembly="FurnaceRT">
		<IoDoor id="AGVDoor" display="AGVDoor" schematicId="AGVDoor" unit=""
					diOpen="DI_AGVDoorOpened"
					diClose="DI_AGVDoorClosed"
					         
					doOpen="DO_AGVDoorSwitchOpen"
					doClose="DO_AGVDoorSwitchClose"
					
					scRootPath=""
	    />
	</IoDoors>
	<IoShutters classType="FurnaceRT.Devices.IoShutter" assembly="FurnaceRT">
		<IoShutter id="Shutter" display="Shutter" schematicId="Shutter" unit=""
					diOpen="DI_FurnaceShutterOpened"
					diClose="DI_FurnaceShutterClosed"
					         
					doOpen="DO_ShutterOpen"
					doClose="DO_ShutterClose"
					scRootPath=""
		/>
	</IoShutters>
	<IoBufferMotors assembly="FurnaceRT" classType="FurnaceRT.Devices.IoBufferMotor">
		<IoBufferMotor id="BufferServo" display="" schematicId="" unit="" module=""
						diMoving="DI_MvAbsBusyBufferAxis"
						diSensor1=""
						diSensor2=""
						diSensor3=""
						diSensor4=""
						diSensor5=""
						diSensor6=""
						diSensor7=""
						diSensor8=""
						diWarning="DI_BufferWarningBufferAxis"
						diAlarm="DI_BufferFaultBufferAxis"
						diPositionA1="DI_BufferInPositionA1"
						diPositionB1="DI_BufferInPositionB1"
						diPositionC1="DI_BufferInPositionC1"
						diPositionD1="DI_BufferInPositionD1"
						diPositionA2="DI_BufferInPositionA2"
						diPositionB2="DI_BufferInPositionB2"
						diPositionC2="DI_BufferInPositionC2"
						diPositionD2="DI_BufferInPositionD2"
						diPositionA3="DI_BufferInPositionA3"
						diPositionB3="DI_BufferInPositionB3"
						diPositionC3="DI_BufferInPositionC3"
						diPositionD3="DI_BufferInPositionD3"
						diPositionA4="DI_BufferInPositionA4"
						diPositionB4="DI_BufferInPositionB4"
						diPositionC4="DI_BufferInPositionC4"
						diPositionD4="DI_BufferInPositionD4"
					   
					
					    diBufferStockA1="DI_BufferStock1A"
					    diBufferStockB1="DI_BufferStock1B"
					    diBufferStockC1="DI_BufferStock1C"
					    diBufferStockD1="DI_BufferStock1D"
					    diBufferStockA2="DI_BufferStock2A"
					    diBufferStockB2="DI_BufferStock2B"
					    diBufferStockC2="DI_BufferStock2C"
					    diBufferStockD2="DI_BufferStock2D"
					    diBufferStockA3="DI_BufferStock3A"
					    diBufferStockB3="DI_BufferStock3B"
					    diBufferStockC3="DI_BufferStock3C"
					    diBufferStockD3="DI_BufferStock3D"
					    diBufferStockA4="DI_BufferStock4A"
					    diBufferStockB4="DI_BufferStock4B"
					    diBufferStockC4="DI_BufferStock4C"
					    diBufferStockD4="DI_BufferStock4D"
					   
					    diBufferEX1="DI_LAFrontFOUPBuffer1InPosition"
					    diBufferEX2="DI_LAFrontFOUPBuffer2InPosition"
						
					   diServoOn="DI_BufferPowerOn"
		
						diNegativeLimit="DI_NegLmtAlmBufferAxis"
						diPositiveLimit="DI_PotLmtAlmbBufferAxis"
				   
						doServoOn="DO_ServoOnBufferAxis"
						doStop="DO_StopBufferAxis"
						doMove="DO_MoveCommandBufferAxis"
						doReset="DO_ResetBufferAxis"
						
						aiRealPosition="AI_BufferMotorPositionFb"
						aiRealSpeed="AI_BufferMotorSpeedFb"
						aiRealTorque="AI_BufferMotorTorqueFb"
						aiTargetPosFb="AI_BufferTargetPosFb"
						aiDriverErrorCode="AI_BufferDriverErrCode"
						aiMotionErrorCode="AI_BufferMotionErrID"
					 
						aoTargetPosition="AO_TargetPositionBufferAxis"
						aoSpeed="AO_BufferRotationSpeed"
						aoAcc=""
						aoDec=""
						scRootPath="BufferServo"
						aioType="float"
					   
				 />
	</IoBufferMotors>
	<IoFurnaceMotors assembly="FurnaceRT" classType="FurnaceRT.Devices.IoFurnaceMotor">
		<IoFurnaceMotor id="BoatElevatorServo" display="" schematicId="" unit="" module=""
						diVAC1="DI_VAC1"
						diVAC2="DI_VAC2"
						diVAC3="DI_VAC3"
						diBoatUnloadInterlock="DI_BoatUnloadInterlock"
						
						diMove=""
						diServoOn="DI_PwrBusyBoatZAxis"
						diPowerOnError=""
						diStop=""
						diStopError=""
						diHomeDone=""
						diAlignDone=""
						diHoming=""
						diHomeError=""
						diMoving="DI_MvAbsBusyBoatZAxis"
						diMoveError=""
						diHomePosition="DI_HmPosBoatZAxis"
						diNegativeLimit="DI_NegLmtPosBoatZAxis"
						diPositiveLimit="DI_PotLmtPosBoatZAxis"
						diConveyRelaxAlarm=""
						diReadyToSwitchOn=""
						diSwitchOn=""
						diWarning=""
						diAlarm="DI_BoatFaultBoatZAxis"
						diPosition1="DI_MiddlePos1BoatZAxis"
						diPosition2="DI_MiddlePos2BoatZAxis"
						diPosition3="DI_MiddlePos3BoatZAxis"
				    
						diUpPosition=""
						diDownPosition="DI_BoatLiftMotorDownPosition"
             
						doStop="DO_StopBoatZAxis"
						doHome=""
						doMove="DO_MoveEnableBoatZAxis"
						doReset="DO_ResetBoatZAxis"
						doServoOn="DO_ServoOnBoatZAxis"
						doInTransfer=""
						doTransferComplete=""
						doStepperDriverStart=""
						doStepperDriverAllWindingsOff=""
						doStepperDriverDataSelectionM0=""
						doStepperDriverDataSelectionM1=""
						doStepperDriverDataSelectionM2=""
						doStepperDriverDataSelectionM3=""
						doStepperDriverDataSelectionM4=""
						doStepperDriverDataSelectionM5=""
						doStepperDriverHomeOrPosPrerst=""
						doCW=""
						doCCW=""
						aiRealPosition="AI_BoatMotorPositionFeedback"
						aiRealSpeed="AI_BoatMotorSpeedFb"
						aiTargetPosFb="AI_BoatTargetPosFb"
						aiDriverErrorCode="AI_BoatDriverErrCode"
						aiMotionErrorCode="AI_BoatMotioErrID"
					 
						aoTargetPosition="AO_BoatPosition"
						aoTargetSpeed="AO_BoatZAxisSpeed"
						
						aioType="float"
						
						scRootPath="Boat.BoatElevatorServo"
				 />
		<IoFurnaceMotor id="BoatRotationServo" display="" schematicId="" unit="" module=""
						aiRealPosition=""
						aiRealSpeed=""
						aiPowerErrorCode=""
						aiStopErrorCode=""
						aiHomeErrorCode=""
						aiMoveAbsErrorCode=""
						aiJogErrorCode=""
						aiResetErrorCode=""
						aiDriverErrorCode=""
						aiErrorCode=""
					 
						aoTargetSpeed=""
					 
						diMotorAlarm=""
						diMove=""
						diPowerOn=""
						diPowerOnError=""
						diStop=""
						diDirection="DI_Direction"
						diM0="DI_BoatRAxisM0"
						diM1="DI_BoatRAxisM1"
						diM2="DI_BoatRAxisM2"
						diM3="DI_BoatRAxisM3"
						diM4="DI_BoatRAxisM4"
						diM5="DI_BoatRAxisM5"
						diStopError=""
						diHoming="DI_BoatRAxisHomeBusy"
						diInitializing=""
						diHomeDone="DI_BoatRAxisHomeDone"
						diInitDone=""
						diMoving="DI_BoatRAxisRotationBusy"
						diMoveError=""
						diHomePosition="DI_BoatRAxisInHomePosition"
						diNegativeLimit=""
						diPositiveLimit=""
						diConveyRelaxAlarm=""
						diReadyToSwitchOn=""
						diSwitchOn=""
						diWarning=""
						diAlarm="DI_BoatRAxisAlarm"
						diPosition1=""
				    
						diStepperMotorInWorkPosition=""
						diStepperMotorMoving=""
						diStepperMotorAlarm=""
						diStepperMotorInArea=""
						diStepperMotorInReady=""
						diStepperMotorInHomePosition=""
				    
						diUpPosition=""
						diDownPosition=""
             
						doStop="DO_BoatRAxisStop"
						doHome="DO_BoatRAxisHomeCmd"
						doInit=""
						doMove="DO_BoatRAxisRotationCmd"
						doReset="DO_BoatRAxisResetCmd"
						doM0="DO_BoatRAxisM0"
						doM1="DO_BoatRAxisM1"
						doM2="DO_BoatRAxisM2"
						doM3="DO_BoatRAxisM3"
						doM4="DO_BoatRAxisM4"
						doM5="DO_BoatRAxisM5"
						doCW="DO_BoatRAxisRotationForward"
						doCCW="DO_BoatRAxisRotationReverse"
						
						aioType="float"
						
						scRootPath="Boat.BoatRotationServo"
				 />
	</IoFurnaceMotors>
	<IoWaferRobots classType="FurnaceRT.Devices.IoWaferRobot" assembly="FurnaceRT">
		<IoWaferRobot id="IoWaferRobot" display="IoWaferRobot" schematicId="IoWaferRobot" unit=""
					diInFIMS1="DI_WaferRobotAtPOD1Area"
					diInFIMS2="DI_WaferRobotAtPOD2Area"
					diInBoatRotate="DI_WaferRobotAtBoatRotaryArea"
					diInBoatBottom="DI_WaferRobotAtBoatBottomArea"
					diFIMS1WaferOnRobot="DI_POD1WaferOnRobot"
					diFIMS2WaferOnRobot="DI_POD2WaferOnRobot"
					diTPEmo="DI_WaferRobotTPEMOButtonStatus"
					diServoOn="DI_WaferRobotTPServoOn"
					diTPStatus="DI_WaferRobotIsHostStatus"
					diRobotPowerOn="DI_WaferRobotPowerOn"
					diAlarm="DI_WaferRobotAlarm"
					diBlade1WaferPresent="DI_WaferRobotWafer1Checked"
					diBlade2WaferPresent="DI_WaferRobotWafer2Checked"
					diBlade3WaferPresent="DI_WaferRobotWafer3Checked"
					diBlade4WaferPresent="DI_WaferRobotWafer4Checked"
					diBlade5WaferPresent="DI_WaferRobotWafer5Checked"
					
					diZAxisHomePosition="DI_WaferRobotZAxisHomePosition"
					diYAxisHomePosition="DI_WaferRobotYAxisHomePosition"
					diVAxisHomePosition="DI_WaferRobotPAxisHomePosition"
					diRunning="DI_WaferRobotRunning"
					         
					doAlarmReset="DO_WaferRobotAlarmReset"
					doActionHold="DO_WaferRobotActionHold"
					doTPEnable="DO_WaferRobotTPEnable"
					doFIMS1Interlock="DO_WaferRobotFIMS1Interlock"
					doFIMS2Interlock="DO_WaferRobotFIMS2Interlock"
					doBoatRotateInterlock="DO_WaferRobotBoatRotaryInterlock"
					doBoatBottomInterlock="DO_WaferRobotBoatBottomInterlock"
			        aoRobotActionCommand="AO_WaferRobotActionCommand"
			        aiRobotActionCommand="AI_WaferRobotActionCommand"
			scRootPath=""
			/>
	</IoWaferRobots>
	<IoCarrierRobots classType="FurnaceRT.Devices.IoCarrierRobot" assembly="FurnaceRT">
		<IoCarrierRobot id="IoCarrierRobot" display="IoCarrierRobot" schematicId="IoCarrierRobot" unit=""
					diInFIMS1="DI_FOUPRobotWithinFIMS1Area"
					diInFIMS2="DI_FOUPRobotWithinFIMS2Area"
					diInStockerLayer1="DI_FOUPRobotWithinBufferLayer1Area"
					diInStockerLayer2="DI_FOUPRobotWithinBufferLayer2Area"
					diInStockerLayer3="DI_FOUPRobotWithinBufferLayer3Area"
					diInStockerLayer4="DI_FOUPRobotWithinBufferLayer4Area"
					diTPEmo="DI_FOUPRobotTPEMOButton"
					diServoOn="DI_FOUPRobotTPServoOn"
					diTPStatus="DI_FOUPRobotIsTPStatus"
					diRobotPowerOn="DI_FOUPRobotFoupOnRobotCheck"
					diAlarm="DI_FOUPRobotAlarmSignal"
					diBlade1WaferPresent="DI_FOUPRobotEachHandWaferStatus"
					diZAxisHomePosition="DI_FOUPRobotAxisZHomePosition"
					diYAxisHomePosition="DI_FOUPRobotAxisYHomePosition"
					diRAxisHomePosition="DI_FOUPRobotAxisRHomePosition"
					diRunning="DI_FOUPRobotRunning"
					doAlarmReset="DO_FOUPRobotAlarmReset"
					doActionHold="DO_FOUPRobotActionHold"
					doTPEnable="DO_FOUPRobotTPEnable"
					doFIMS1Interlock="DO_FOUPRobotFIMS1Interlock"
					doFIMS2Interlock="DO_FOUPRobotFIMS2Interlock"
					doStockerInterlock="DO_FOUPRobotBufferInterlock"
				    aoRobotActionCommand="AO_FOUPRobotActionCommand"
				    aiRobotActionCommand="AI_FOUPRobotActionCommand"
						
				   diRobotHome1CZ="DI_FTRHomeCZ"
				   diRobotHome2CS="DI_FTRHomeCS"
				   diRobotHome3CX="DI_FTRHomeCX"

			scRootPath=""
			/>
	</IoCarrierRobots>

	<IoStockers classType="FurnaceRT.Devices.IoStocker" assembly="FurnaceRT">
		<IoStocker id="Stocker17"  display="EX1" schematicId="Stocker17" unit=""		  doValExtend=""		  doValBack=""			  doFlowOpen=""   diBackDetect=""		  diExtendedDetect=""		  diFlowDetect1=""		  diFlowDetect2=""		  diInPosition1="DI_LAFrontFOUPBuffer1InPosition"	  aioType="float"/>
		<IoStocker id="Stocker18"  display="EX2" schematicId="Stocker18" unit=""		  doValExtend=""		  doValBack=""		      doFlowOpen=""  diBackDetect=""	  diExtendedDetect=""		  diFlowDetect1=""	  diFlowDetect2=""	  diInPosition1="DI_LAFrontFOUPBuffer2InPosition"	  aioType="float"/>
	</IoStockers>
	<!--<IoRFs classType="FurnaceRT.Devices.IoRF" assembly="FurnaceRT">
		<IoRF id="RF" display="RF" schematicId="RF" unit=""
					aiRelfectionPower="AI_RFGeneratorRelfectionPower"
					aiForwardPower="AI_RFGeneratorForwardPower"
					diPowerReached="DI_RFSetPowerReached"
					diAlarm="DI_RFAlarm"
					diRFOnStatus="DI_RFOnStatus"
					doReset="DO_RFReset"
					doOnOff="DO_RFOnOff"
					doManualAnalog="DO_RFManualAnalog"
				
					aoPower="AO_RFPowerSet"
          
					scRootPath=""
				/>
	</IoRFs>-->
	<!--<IoRFMatchs classType="FurnaceRT.Devices.IoRFMatch" assembly="FurnaceRT">
		<IoRFMatch id="RFMatch" display="RFMatch" schematicId="RFMatch" unit=""
					aiVpp="AI_MatchingUnitVppMonitor"
					aiVdc="AI_MatchingUnitVdcMonitor"
					aiLoadPosition="AI_MatchingUnitLoadPosition"
					aiPhase="AI_MatchingUnitPhasePosition"
			  
					doPresetMemory="DO_MatchingUnitPresetMemory"
					doPresetStart="DO_MatchingUnitPresetStart"
					doPresetCH0="DO_MatchingUnitPresetCH0"
					doPresetCH1="DO_MatchingUnitPresetCH1"
					doPresetCH2="DO_MatchingUnitPresetCH2"
					doPresetCH3="DO_MatchingUnitPresetCH3"
					doSafty="DO_MatchingUnitSafty"
				
					aoLoadPosition="AO_MatchingUnitLoadPositionSet"
					aoPhase="AO_MatchingUnitPhaseSet"
          
					scRootPath=""
				/>
	</IoRFMatchs>-->
	<IoAPCs classType="FurnaceRT.Devices.IoAPC" assembly="FurnaceRT">
		<IoAPC id="APC" display="APC" schematicId="APC" unit=""
					aiValueSensorInput1="AI_APCValueSensorInput1"
					aiValueSensorInput2="AI_APCValueSensorInput2"
					aiSelectController="AI_APCSelectController"
					aiPositionActualValue="AI_APCPositionActualValue"
					aiControlModeStatus="AI_APCControlModeStatus"
					aiHomeStatus="AI_APCHomeStatus"
					aiWarningStatus1="AI_APCWarningStatus1"
					aiWarningStatus2="AI_APCWarningStatus2"
					aiWarningStatus3="AI_APCWarningStatus3"
					aiWarningStatus4="AI_APCWarningStatus4"
					aiWarningStatus5="AI_APCWarningStatus5"
					aiWarningStatus6="AI_APCWarningStatus6"
					aiErrorStatus1="AI_APCErrorStatus1"
					aiErrorStatus2="AI_APCErrorStatus2"
					aiErrorStatus3="AI_APCErrorStatus3"
					aiErrorStatus4="AI_APCErrorStatus4"
					aiValveStatusThreshold="AI_APCValveStatusThreshold"
					aiSlowVacuumModeSetting="AI_APCSlowVacuumModeSetting"
					aiInterlock1="AI_APCInterlock1"
					aiInterlock2="AI_APCInterlock2"
					aiInterlock3="AI_APCInterlock3"
					aiInterlockConstantOfInterlock3="AI_APCInterlockConstantOfInterlock3"
					aiP1SensorOffsetSetting="AI_APCP1SensorOffsetSetting"
					aiPosMonOffsetSetting="AI_APCPosMonOffsetSetting"
			  
					diP1ZeroOffsetOutRangeAlm="DI_P1ZeroOffsetOutRangeAlm"
					diP1ZeroAdjOutRangeAlm="DI_P1ZeroAdjOutRangeAlm"
					diP1SpanAdjOutRangeAlm="DI_P1SpanAdjOutRangeAlm"
					diP2ZeroOffsetOutRangeAlm="DI_P2ZeroOffsetOutRangeAlm"
					diP2ZeroAdjOutRangeAlm="DI_P2ZeroAdjOutRangeAlm"
					diP2SpanAdjOutRangeAlm="DI_P2SpanAdjOutRangeAlm"
					diP1PressCtrlInterlockAlm="DI_P1PressCtrlInterlockAlm"
					diP2PressCtrlInterlockAlm="DI_P2PressCtrlInterlockAlm"
					diValveOpenCtrlInterlockAlm="DI_ValveOpenCtrlInterlockAlm"
					diValveHoldCtrlInterlockAlm="DI_ValveHoldCtrlInterlockAlm"
					diValveCloseInterlockAlm="DI_ValveCloseInterlockAlm"
					diAutoTeachingInterlockAlm="DI_AutoTeachingInterlockAlm"
					diP1DisconnectionAlm="DI_P1DisconnectionAlm"
					diP2DisconnectionAlm="DI_P2DisconnectionAlm"
					diPumpStopInterlockAlm="DI_PumpStopInterlockAlm"
					diAutoTeachingErr1Alm="DI_AutoTeachingErr1Alm"
					diAutoTeachingErr2Alm="DI_AutoTeachingErr2Alm"
			    
					doValve="DO_ValveAV71"
			   
					doVGUnit="DO_VGUnitConversion"
					doAoDataReadSysConfig="DO_APCAoDataReadSysConfig"
					doAoDataWriteSysConfig="DO_APCAoDataWriteSysConfig"
					doAoDataReadCusConfig="DO_APCAoDataReadCusConfig"
					doAoDataWriteCusConfig="DO_APCAoDataWriteCusConfig"
				
					aoZeroResetP1=""
					aoZeroAdjustP1="AO_APCZeroAdjustP1"
					aoSpanAdjustP1=""
					aoZeroResetP2=""
					aoZeroAdjustP2="AO_APCZeroAdjustP2"
					aoSpanAdjustP2=""
					aoSlowVacuumTargetPressure="AO_APCSlowVacuumTargetPressure"
					aoValveStatusThreshold="AO_APCValveStatusThreshold"
					aoForbidInterlockOutbreak="AO_APCForbidInterlockOutbreak"
					aoSlowVacuumModeSetting="AO_APCSlowVacuumModeSetting"
					aoInterlock1="AO_APCInterlock1"
					aoInterlock2="AO_APCInterlock2"
					aoInterlock3="AO_APCInterlock3"
					aoInterlockConstantOfInterlock3="AO_APCInterlockConstantOfInterlock3"
					aoP1SensorOffsetSetting="AO_APCP1SensorOffsetSetting"
					aoPosMonOffsetSetting="AO_APCPosMonOffsetSetting"
					aoSensorAdjustReset="AO_APCSensorAdjustReset"
					aoSlowVacuumRate="AO_APCSlowVacuumRate"
					aoSlowVacuumP="AO_APCSlowVacuumP"
					aoSlowVacuumI="AO_APCSlowVacuumI"
					aoSlowVacuumD="AO_APCSlowVacuumD"
					aoSlowVacuumA="AO_APCSlowVacuumA"
			   
			   		aiSlowVacuumP="AI_APCSlowVacuumP"
					aiSlowVacuumI="AI_APCSlowVacuumI"
					aiSlowVacuumD="AI_APCSlowVacuumD"
					aiSlowVacuumA="AI_APCSlowVacuumA"
			   
					aoControllerModeSelect="AO_APCControllerModeSelect"
					aoSpecifyTargetVacuumPressureControl="AO_APCSpecifyTargetVacuumPressureControl"
					aoSpecifyTargetOpeningForValveOpeningControl="AO_APCSpecifyTargetOpeningForValveOpeningControl"
					aoSpecifyControlMode="AO_APCSpecifyControlMode"
					aoRangeUpperLimitSensorInput="AO_APCRangeUpperLimitSensorInput"
					aoController1="AO_APCController1"
					aoController1P="AO_APCController1P"
					aoController1I="AO_APCController1I"
					aoController1D="AO_APCController1D"
					aoController1A="AO_APCController1A"
					aoController1CH="AO_APCController1CH"
					aoController1CL="AO_APCController1CL"
					aoController1Offset="AO_APCController1Offset"
					aoController2P="AO_APCController2P"
					aoController2I="AO_APCController2I"
					aoController2D="AO_APCController2D"
					aoController2A="AO_APCController2A"
					aoController2CH="AO_APCController2CH"
					aoController2CL="AO_APCController2CL"
					aoController2Offset="AO_APCController2Offset"
					aoController3P="AO_APCController3P"
					aoController3I="AO_APCController3I"
					aoController3D="AO_APCController3D"
					aoController3A="AO_APCController3A"
					aoController3CH="AO_APCController3CH"
					aoController3CL="AO_APCController3CL"
					aoController3Offset="AO_APCController3Offset"
					aoController4P="AO_APCController4P"
					aoController4I="AO_APCController4I"
					aoController4D="AO_APCController4D"
					aoController4A="AO_APCController4A"
					aoController4CH="AO_APCController4CH"
					aoController4CL="AO_APCController4CL"
					aoController4Offset="AO_APCController4Offset"
					aoController5P="AO_APCController5P"
					aoController5I="AO_APCController5I"
					aoController5D="AO_APCController5D"
					aoController5A="AO_APCController5A"
					aoController5CH="AO_APCController5CH"
					aoController5CL="AO_APCController5CL"
					aoController5Offset="AO_APCController5Offset"
					aoController6P="AO_APCController6P"
					aoController6I="AO_APCController6I"
					aoController6D="AO_APCController6D"
					aoController6A="AO_APCController6A"
					aoController6CH="AO_APCController6CH"
					aoController6CL="AO_APCController6CL"
					aoController6Offset="AO_APCController6Offset"
					aoController7P="AO_APCController7P"
					aoController7I="AO_APCController7I"
					aoController7D="AO_APCController7D"
					aoController7A="AO_APCController7A"
					aoController7CH="AO_APCController7CH"
					aoController7CL="AO_APCController7CL"
					aoController7Offset="AO_APCController7Offset"
					aoController8P="AO_APCController8P"
					aoController8I="AO_APCController8I"
					aoController8D="AO_APCController8D"
					aoController8A="AO_APCController8A"
					aoController8CH="AO_APCController8CH"
					aoController8CL="AO_APCController8CL"
					aoController8Offset="AO_APCController8Offset"
					aoController9P="AO_APCController9P"
					aoController9I="AO_APCController9I"
					aoController9D="AO_APCController9D"
					aoController9A="AO_APCController9A"
					aoController9CH="AO_APCController9CH"
					aoController9CL="AO_APCController9CL"
					aoController9Offset="AO_APCController9Offset"
					aoController10P="AO_APCController10P"
					aoController10I="AO_APCController10I"
					aoController10D="AO_APCController10D"
					aoController10A="AO_APCController10A"
					aoController10CH="AO_APCController10CH"
					aoController10CL="AO_APCController10CL"
					aoController10Offset="AO_APCController10Offset"
          
				aiController1P="AI_APCController1P"
				aiController1I="AI_APCController1I"
				aiController1D="AI_APCController1D"
				aiController1A="AI_APCController1A"
				aiController1CH="AI_APCController1CH"
				aiController1CL="AI_APCController1CL"
				aiController1Offset="AI_APCController1Offset"
				aiController2P="AI_APCController2P"
				aiController2I="AI_APCController2I"
				aiController2D="AI_APCController2D"
				aiController2A="AI_APCController2A"
				aiController2CH="AI_APCController2CH"
				aiController2CL="AI_APCController2CL"
				aiController2Offset="AI_APCController2Offset"
				aiController3P="AI_APCController3P"
				aiController3I="AI_APCController3I"
				aiController3D="AI_APCController3D"
				aiController3A="AI_APCController3A"
				aiController3CH="AI_APCController3CH"
				aiController3CL="AI_APCController3CL"
				aiController3Offset="AI_APCController3Offset"
				aiController4P="AI_APCController4P"
				aiController4I="AI_APCController4I"
				aiController4D="AI_APCController4D"
				aiController4A="AI_APCController4A"
				aiController4CH="AI_APCController4CH"
				aiController4CL="AI_APCController4CL"
				aiController4Offset="AI_APCController4Offset"
				aiController5P="AI_APCController5P"
				aiController5I="AI_APCController5I"
				aiController5D="AI_APCController5D"
				aiController5A="AI_APCController5A"
				aiController5CH="AI_APCController5CH"
				aiController5CL="AI_APCController5CL"
				aiController5Offset="AI_APCController5Offset"
				aiController6P="AI_APCController6P"
				aiController6I="AI_APCController6I"
				aiController6D="AI_APCController6D"
				aiController6A="AI_APCController6A"
				aiController6CH="AI_APCController6CH"
				aiController6CL="AI_APCController6CL"
				aiController6Offset="AI_APCController6Offset"
				aiController7P="AI_APCController7P"
				aiController7I="AI_APCController7I"
				aiController7D="AI_APCController7D"
				aiController7A="AI_APCController7A"
				aiController7CH="AI_APCController7CH"
				aiController7CL="AI_APCController7CL"
				aiController7Offset="AI_APCController7Offset"
				aiController8P="AI_APCController8P"
				aiController8I="AI_APCController8I"
				aiController8D="AI_APCController8D"
				aiController8A="AI_APCController8A"
				aiController8CH="AI_APCController8CH"
				aiController8CL="AI_APCController8CL"
				aiController8Offset="AI_APCController8Offset"
				aiController9P="AI_APCController9P"
				aiController9I="AI_APCController9I"
				aiController9D="AI_APCController9D"
				aiController9A="AI_APCController9A"
				aiController9CH="AI_APCController9CH"
				aiController9CL="AI_APCController9CL"
				aiController9Offset="AI_APCController9Offset"
				aiController10P="AI_APCController10P"
				aiController10I="AI_APCController10I"
				aiController10D="AI_APCController10D"
				aiController10A="AI_APCController10A"
				aiController10CH="AI_APCController10CH"
				aiController10CL="AI_APCController10CL"
				aiController10Offset="AI_APCController10Offset"
          
					scRootPath=""
					aioType="float"
				/>
	</IoAPCs>
	<IoPressureMeters classType="FurnaceRT.Devices.IoPressureMeter" assembly="FurnaceRT">

		<IoPressureMeter id="DG1AnalogValue" display="DG1AnalogValue"  schematicId="DG1AnalogValue" unit="pa " aiFeedback="AI_DG1Pressure"  physical="0,15000" scale="-500,500" aioType="float"/>
		<!--压力表-->
		<IoPressureMeter id="VG11" display="VG11"  schematicId="VG11" unit="Torr" aiFeedback="AI_VG11Pressure"  physical="0,15000" scale="0,1000" aioType="float" unSigned="True"/>
		<IoPressureMeter id="VG21" display="VG21"  schematicId="VG21" unit="Torr" aiFeedback="AI_VG21Pressure"  physical="0,15000" scale="0,1000" aioType="float"/>
		<IoPressureMeter id="VG13" display="VG13"  schematicId="VG13" unit="Torr" aiFeedback="AI_VG13Pressure"  physical="0,15000" scale="0,1000" aioType="float" unSigned="True"/>
		<IoPressureMeter id="VG33" display="VG33"  schematicId="VG33" unit="Torr" aiFeedback="AI_VG33Pressure"  physical="0,15000" scale="0,1000" aioType="float"/>
		<IoPressureMeter id="VG32" display="VG32"  schematicId="VG32" unit="Torr" aiFeedback="AI_VG32Pressure"  physical="0,15000" scale="0,1000" aioType="float"/>

		<IoPressureMeter id="PG1" display="PG1"  schematicId="PG1" unit="MPa" aiFeedback="AI_PG1Pressure"  physical="0,15000" scale="0,1000" aioType="float"/>
		<IoPressureMeter id="PG2" display="PG2"  schematicId="PG2" unit="MPa" aiFeedback="AI_PG2Pressure"  physical="0,15000" scale="0,1000" aioType="float"/>
		<IoPressureMeter id="PG3" display="PG/PS3"  schematicId="PG3" unit="MPa" aiFeedback="AI_PG3Pressure"  physical="0,15000" scale="0,1000" aioType="float"/>
		<IoPressureMeter id="PG4" display="PG/PS4"  schematicId="PG4" unit="MPa" aiFeedback="AI_PG4Pressure"  physical="0,15000" scale="0,1000" aioType="float"/>
		<IoPressureMeter id="PG5" display="PG/PS5"  schematicId="PG5" unit="MPa" aiFeedback="AI_PG5Pressure"  physical="0,15000" scale="0,1000" aioType="float"/>
		<IoPressureMeter id="PG6" display="PG/PS6"  schematicId="PG6" unit="MPa" aiFeedback="AI_PG6Pressure"  physical="0,15000" scale="0,1000" aioType="float"/>
		<IoPressureMeter id="PG7" display="PG7"  schematicId="PG7" unit="MPa" aiFeedback="AI_PG7Pressure"  physical="0,15000" scale="0,1000" aioType="float"/>
		<IoPressureMeter id="PG8" display="PG8"  schematicId="PG8" unit="MPa" aiFeedback="AI_PG8Pressure"  physical="0,15000" scale="0,1000" aioType="float"/>
		<IoPressureMeter id="PG12" display="PG/PS12"  schematicId="PG12" unit="psig" aiFeedback="AI_PG12Pressure"  physical="0,15000" scale="0,100" aioType="float"/>
		<IoPressureMeter id="PG13" display="PG/PS13"  schematicId="PG13" unit="psig" aiFeedback="AI_PG13Pressure"  physical="0,15000" scale="0,100" aioType="float"/>
		<IoPressureMeter id="PG15" display="PG/PS15"  schematicId="PG15" unit="psig" aiFeedback="AI_PG15Pressure"  physical="0,15000" scale="0,1000" aioType="float"/>
		<IoPressureMeter id="PG16" display="PG/PS16"  schematicId="PG16" unit="psig" aiFeedback="AI_PG16Pressure"  physical="0,15000" scale="0,1000" aioType="float"/>
		<IoPressureMeter id="PG70" display="PG/PS70"  schematicId="PG70" unit="psig" aiFeedback="AI_PG70Pressure"  physical="0,15000" scale="0,1000" aioType="float"/>
		<IoPressureMeter id="N24PurgePressure" display="PG14"  schematicId="N24PurgePressure" unit="psig" aiFeedback="AI_N24PurgePressure"  physical="0,15000" scale="0,150" aioType="float"/>
		<IoPressureMeter id="PS11" display="MP/PS11"  schematicId="PS11" unit="MPa" aiFeedback="AI_PS11Value"  physical="1500,7500" scale="0,1" aioType="float"/>
		<IoPressureMeter id="PS14AnalogValue" display="PS14AnalogValue"  schematicId="PS14AnalogValue" unit="kPa" aiFeedback="AI_PS14Pressure"  physical="1500,7500" scale="-99.9,99.9" aioType="float"/>
		<IoPressureMeter id="PS17" display="PS17"  schematicId="PS17" unit="MPa" aiFeedback="AI_PS17Value"  physical="900,7500" scale="-0.1,1" aioType="float"/>

		<!--氧气分析仪-->
		<IoPressureMeter id="ConcentrationO2" display="O2Concentration"  schematicId="O2Concentration" unit="ppm" aiFeedback="AI_O2Concentration"  scale="0,10" physical="0,15000" aioType="float"/>


		<IoPressureMeter id="HeatingExhaustMS1" display="HeatingExhaustMS1"  schematicId="HeatingExhaustMS1" unit="Pa" aiFeedback="AI_HeatingExhaustMS1"  physical="0,15000" scale="0,200" aioType="float"/>
		<IoPressureMeter id="GasBoxExhaustMS2" display="GasBoxExhaustMS2"  schematicId="GasBoxExhaustMS2" unit="Pa" aiFeedback="AI_GasBoxExhaustMS2"  physical="0,15000" scale="0,200" aioType="float"/>
		<IoPressureMeter id="ScavengerExhaustMS3" display="ScavengerExhaustMS3"  schematicId="ScavengerExhaustMS3" unit="Pa" aiFeedback="AI_ScavengerExhaustMS3"  physical="0,15000" scale="0,200" aioType="float"/>
		<IoPressureMeter id="LoadingAreaExhaustMS5" display="LoadingAreaExhaustMS5"  schematicId="LoadingAreaExhaustMS5" unit="Pa" aiFeedback="AI_LoadingAreaExhaustMS5"  physical="0,15000" scale="0,200" aioType="float"/>
		<IoPressureMeter id="RHCExhaustMS8" display="RHCExhaustMS8"  schematicId="RHCExhaustMS8" unit="kPa" aiFeedback="AI_LSCUpExhaustMS8"  physical="0,15000" scale="0,2" aioType="float"/>
		<IoPressureMeter id="LoadingAreaExhaustMS321" display="LoadingAreaExhaustMS321"  schematicId="LoadingAreaExhaustMS321" unit="Pa" aiFeedback="AI_LoadingAreaExhaustMS321"  physical="1500,7500" scale="0,1" aioType="float" />

		<!--水流量表-->
		<IoPressureMeter id="RHCFlowFL901" display="RHCFlowFL901(FS105)"  schematicId="RHCFlowFL901" unit="L/min" aiFeedback="AI_RHCFlowFL901"  physical="0,30000" scale="0,40" aioType="float"/>
		<IoPressureMeter id="CoolingWaterFlowOfFurnaceFL902" display="CoolingWaterFlowOfFurnaceFL902(FS106)"  schematicId="CoolingWaterFlowOfFurnaceFL902" unit="L/min" aiFeedback="AI_CoolingWaterFlowOfFurnaceFL902"  physical="0,30000" scale="0,16" aioType="float"/>
		<IoPressureMeter id="CoolingWateFlowOfShuttleFL903" display="CoolingWateFlowOfShuttleFL903(FS104)"  schematicId="CoolingWateFlowOfShuttleFL903" unit="L/min" aiFeedback="AI_CoolingWateFlowOfShuttleFL903"  physical="0,30000" scale="0,4" aioType="float"/>
		<IoPressureMeter id="CoolingWaterFlowOfBoatRotationFL904" display="CoolingWaterFlowOfBoatRotationFL904(FS111)"  schematicId="CoolingWaterFlowOfBoatRotationFL904" unit="L/min" aiFeedback="AI_CoolingWaterFlowOfBoatRotationFL904"  physical="0,30000" scale="0,4" aioType="float"/>
		<IoPressureMeter id="CoolingWaterFlowOfFlangeFL905" display="CoolingWaterFlowOfFlangeFL905(FS102)"  schematicId="CoolingWaterFlowOfFlangeFL905" unit="L/min" aiFeedback="AI_CoolingWaterFlowOfFlangeFL905"  physical="0,30000" scale="0,4" aioType="float"/>
		<IoPressureMeter id="CoolingWaterFlowOfLoadingAreaFL906" display="CoolingWaterFlowOfLoadingAreaFL906(FS116)"  schematicId="CoolingWaterFlowOfLoadingAreaFL906" unit="L/min" aiFeedback="AI_CoolingWaterFlowOfLoadingAreaFL906"  physical="0,30000" scale="0,16" aioType="float"/>



		<IoPressureMeter id="Tank1Pressure" display="Tank1Pressure(PS132)"  schematicId="Tank1Pressure" unit="kPa" aiFeedback="AI_Tank1Pressure"  physical="1500,7500" scale="0,1" aioType="float"/>
		<IoPressureMeter id="Tank2Pressure" display="Tank2Pressure(PS135)"  schematicId="Tank2Pressure" unit="kPa" aiFeedback="AI_Tank2Pressure"  physical="1500,7500" scale="0,1" aioType="float"/>

		<IoPressureMeter id="MS6" display="MS6(MS6)"  schematicId="MS6" unit="kpa" aiFeedback="AI_MS6"  physical="1500,7500" scale="0,1" aioType="float"/>
		<IoPressureMeter id="VG14" display="VG14"  schematicId="VG14" unit="pa" aiFeedback="AI_VG14Value"  physical="1500,7500" scale="0,1" aioType="float"/>
		<IoPressureMeter id="VG15" display="VG15"  schematicId="VG15" unit="pa" aiFeedback="AI_VG15Value"  physical="1500,7500" scale="0,1" aioType="float"/>




	</IoPressureMeters>


	<IoAlarmSignals classType="Aitex.Core.RT.Device.Unit.IoAlarmSignal" assembly="MECF.Framework.RT.EquipmentLibrary">
		<IoAlarmSignal id="AlarmSignalEMO01001powerboxEMO" diSignalsplay="safe module:EMO01001 power box EMO" diSignal="DI_EMO01001powerboxEMO" alarmTrigValue="true" />
		<IoAlarmSignal id="AlarmSignalPowerboxfiredetector" diSignalsplay="safe module:Power box fire detector" diSignal="DI_Powerboxfiredetector" alarmTrigValue="true" />
		<IoAlarmSignal id="AlarmSignalSMK01001detectoroperator" diSignalsplay="safe module:SMK01001 detector operator" diSignal="DI_SMK01001detectoroperator" alarmTrigValue="true" />
		<IoAlarmSignal id="AlarmSignalSMK01001detectorfault" diSignalsplay="safe module:SMK01001 detector fault" diSignal="DI_SMK01001detectorfault" alarmTrigValue="true" />
		<IoAlarmSignal id="AlarmSignalEMO02001gasboxEMO" diSignalsplay="safe module:EMO02001 gas box EMO" diSignal="DI_EMO02001gasboxEMO" alarmTrigValue="true" />
		<IoAlarmSignal id="AlarmSignalEMO04001frontbodyEMO" diSignalsplay="safe module:EMO04001 frontbody EMO" diSignal="DI_EMO04001frontbodyEMO" alarmTrigValue="true" />
		<IoAlarmSignal id="AlarmSignalLD02001LSCleakalarm" diSignalsplay="safe module:LD02001 LSC leak alarm" diSignal="DI_LD02001LSCleakalarm" alarmTrigValue="true" />
		<IoAlarmSignal id="AlarmSignalLD05001Magneticfluidleak" diSignalsplay="safe module:LD05001 Magnetic fluid leak" diSignal="DI_LD05001Magneticfluidleak" alarmTrigValue="true" />
		<IoAlarmSignal id="AlarmSignalLD05002Coolingwaterleak" diSignalsplay="safe module:LD05002 Cooling water leak" diSignal="DI_LD05002Coolingwaterleak" alarmTrigValue="true" />
		<IoAlarmSignal id="AlarmSignalLD05003RHCleak" diSignalsplay="safe module:LD05003 RHC leak" diSignal="DI_LD05003RHCleak" alarmTrigValue="true" />
		<IoAlarmSignal id="AlarmSignalLD03001exhaustboxwaterleakupside" diSignalsplay="safe module:LD03001 exhaust box water leak (up-side)" diSignal="DI_LD03001exhaustboxwaterleakupside" alarmTrigValue="true" />
		<IoAlarmSignal id="AlarmSignalLD03002waterleakdownside" diSignalsplay="safe module:LD03002 water leak (down-side)" diSignal="DI_LD03002waterleakdownside" alarmTrigValue="true" />
		<IoAlarmSignal id="AlarmSignalExternalEMO" diSignalsplay="safe module:External EMO" diSignal="DI_ExternalEMO" alarmTrigValue="true" />
		<IoAlarmSignal id="AlarmSignalFurnacetransformertempsw" diSignalsplay="safe module:Furnace transformer temp sw" diSignal="DI_Furnacetransformertempsw" alarmTrigValue="true" />
		<IoAlarmSignal id="AlarmSignalAC100Vtransformertempsw" diSignalsplay="safe module:AC100V transformer temp sw" diSignal="DI_AC100Vtransformertempsw" alarmTrigValue="true" />
		<IoAlarmSignal id="AlarmSignalFurnacepoweronswitch" diSignalsplay="safe module:Furnace power on switch" diSignal="DI_Furnacepoweronswitch" alarmTrigValue="true" />
		<IoAlarmSignal id="AlarmSignalAC100Vtransformerpowerswitch" diSignalsplay="safe module:AC100V transformer power switch" diSignal="DI_AC100Vtransformerpowerswitch" alarmTrigValue="true" />
		<IoAlarmSignal id="AlarmSignalPowerboxinterlockresetbutton" diSignalsplay="safe module:Power box interlock reset button" diSignal="DI_Powerboxinterlockresetbutton" alarmTrigValue="true" />
		<IoAlarmSignal id="AlarmSignalVFD01001EDM" diSignalsplay="safe module:VFD01001 EDM" diSignal="DI_VFD01001EDM" alarmTrigValue="true" />
		<IoAlarmSignal id="AlarmSignalGasboxinterlockresetbutton" diSignalsplay="safe module:Gas box interlock reset button" diSignal="DI_Gasboxinterlockresetbutton" alarmTrigValue="true" />
		<IoAlarmSignal id="AlarmSignalSCRONOFFSWITCH" diSignalsplay="safe module:SCR ON/OFF SWITCH" diSignal="DI_SCRONOFFSWITCH" alarmTrigValue="true" />
		<IoAlarmSignal id="AlarmSignalGasboxexhaustpressurealarm1st" diSignalsplay="safe module:Gas box exhaust pressure alarm 1st" diSignal="DI_Gasboxexhaustpressurealarm1st" alarmTrigValue="true" />
		<IoAlarmSignal id="AlarmSignalGasboxexhaustpressurealarm2nd" diSignalsplay="safe module:Gas box exhaust pressure alarm 2nd" diSignal="DI_Gasboxexhaustpressurealarm2nd" alarmTrigValue="true" />
		<IoAlarmSignal id="AlarmSignalFS101waterflowalarm" diSignalsplay="safe module:FS101 water flow alarm" diSignal="DI_FS101waterflowalarm" alarmTrigValue="true" />
		<IoAlarmSignal id="AlarmSignalLightcurtainOSSD1" diSignalsplay="safe module:Light curtain OSSD1" diSignal="DI_LightcurtainOSSD1" alarmTrigValue="true" />
		<IoAlarmSignal id="AlarmSignalLightcurtainOSSD2" diSignalsplay="safe module:Light curtain OSSD2" diSignal="DI_LightcurtainOSSD2" alarmTrigValue="true" />
		<IoAlarmSignal id="AlarmSignalLightcurtainfault" diSignalsplay="safe module:Light curtain fault" diSignal="DI_Lightcurtainfault" alarmTrigValue="true" />
		<IoAlarmSignal id="AlarmSignalFrontbodydoorswitch" diSignalsplay="safe module:Front body door switch" diSignal="DI_Frontbodydoorswitch" alarmTrigValue="true" />
		<IoAlarmSignal id="AlarmSignalFrontbodyIOshuttersw" diSignalsplay="safe module:Front body I/O shutter sw" diSignal="DI_FrontbodyIOshuttersw" alarmTrigValue="true" />
		<IoAlarmSignal id="AlarmSignalFouprobotEMS" diSignalsplay="safe module:Foup robot EMS" diSignal="DI_FouprobotEMS" alarmTrigValue="true" />
		<IoAlarmSignal id="AlarmSignalWaferrobotEMS" diSignalsplay="safe module:Wafer robot EMS" diSignal="DI_WaferrobotEMS" alarmTrigValue="true" />
		<IoAlarmSignal id="AlarmSignalAxisCRmotorEDM" diSignalsplay="safe module:Axis-CR motor EDM" diSignal="DI_AxisCRmotorEDM" alarmTrigValue="true" />
		<IoAlarmSignal id="AlarmSignalAxisEmotorEDM" diSignalsplay="safe module:Axis-E motor EDM" diSignal="DI_AxisEmotorEDM" alarmTrigValue="true" />
		<IoAlarmSignal id="AlarmSignalTS05001FFUtempsw" diSignalsplay="safe module:TS05001 FFU temp sw" diSignal="DI_TS05001FFUtempsw" alarmTrigValue="true" />
		<IoAlarmSignal id="AlarmSignalTS05002Capinsidetempsw" diSignalsplay="safe module:TS05002 Cap inside temp sw" diSignal="DI_TS05002Capinsidetempsw" alarmTrigValue="true" />
		<IoAlarmSignal id="AlarmSignalTS05003Capoutsidetempsw" diSignalsplay="safe module:TS05003 Cap outside temp sw" diSignal="DI_TS05003Capoutsidetempsw" alarmTrigValue="true" />
		<IoAlarmSignal id="AlarmSignalTS05004Raxisrotationtempsw" diSignalsplay="safe module:TS05004 R axis rotation temp sw" diSignal="DI_TS05004Raxisrotationtempsw" alarmTrigValue="true" />
		<IoAlarmSignal id="AlarmSignalTS05005RHCtempsw" diSignalsplay="safe module:TS05005 RHC temp sw" diSignal="DI_TS05005RHCtempsw" alarmTrigValue="true" />
		<IoAlarmSignal id="AlarmSignalTS05006furnacetempsw" diSignalsplay="safe module:TS05006 furnace temp sw" diSignal="DI_TS05006furnacetempsw" alarmTrigValue="true" />
		<IoAlarmSignal id="AlarmSignalLoadingareaEMS" diSignalsplay="safe module:Loading area EMS" diSignal="DI_LoadingareaEMS" alarmTrigValue="true" />
		<IoAlarmSignal id="AlarmSignalGD02001HCL1gasleak1stalarm" diSignalsplay="safe module:GD02001 HCL-1 gas leak 1st alarm" diSignal="DI_GD02001HCL1gasleak1stalarm" alarmTrigValue="true" />
		<IoAlarmSignal id="AlarmSignalGD02001HCL1gasleak2ndalarm" diSignalsplay="safe module:GD02001 HCL-1 gas leak 2nd alarm" diSignal="DI_GD02001HCL1gasleak2ndalarm" alarmTrigValue="true" />
		<IoAlarmSignal id="AlarmSignalGD02001fault" diSignalsplay="safe module:GD02001 fault" diSignal="DI_GD02001fault" alarmTrigValue="true" />
		<IoAlarmSignal id="AlarmSignalGD02002HCL2gasleak1stalarm" diSignalsplay="safe module:GD02002 HCL-2 gas leak 1st alarm" diSignal="DI_GD02002HCL2gasleak1stalarm" alarmTrigValue="true" />
		<IoAlarmSignal id="AlarmSignalGD02002HCL2gasleak2ndalarm" diSignalsplay="safe module:GD02002 HCL-2 gas leak 2nd alarm" diSignal="DI_GD02002HCL2gasleak2ndalarm" alarmTrigValue="true" />
		<IoAlarmSignal id="AlarmSignalGD02002fault" diSignalsplay="safe module:GD02002 fault" diSignal="DI_GD02002fault" alarmTrigValue="true" />
		<IoAlarmSignal id="AlarmSignalGD02003NH31gasleak1stalarm" diSignalsplay="safe module:GD02003 NH3-1 gas leak 1st alarm" diSignal="DI_GD02003NH31gasleak1stalarm" alarmTrigValue="true" />
		<IoAlarmSignal id="AlarmSignalGD02003NH31gasleak2ndalarm" diSignalsplay="safe module:GD02003 NH3-1 gas leak 2nd alarm" diSignal="DI_GD02003NH31gasleak2ndalarm" alarmTrigValue="true" />
		<IoAlarmSignal id="AlarmSignalGD02003fault" diSignalsplay="safe module:GD02003 fault" diSignal="DI_GD02003fault" alarmTrigValue="true" />
		<IoAlarmSignal id="AlarmSignalGD02004NH32gasleak1stalarm" diSignalsplay="safe module:GD02004 NH3-2 gas leak 1st alarm" diSignal="DI_GD02004NH32gasleak1stalarm" alarmTrigValue="true" />
		<IoAlarmSignal id="AlarmSignalGD02004NH32gasleak2ndalarm" diSignalsplay="safe module:GD02004 NH3-2 gas leak 2nd alarm" diSignal="DI_GD02004NH32gasleak2ndalarm" alarmTrigValue="true" />
		<IoAlarmSignal id="AlarmSignalGD02004fault" diSignalsplay="safe module:GD02004 fault" diSignal="DI_GD02004fault" alarmTrigValue="true" />
		<IoAlarmSignal id="AlarmSignalGD02005F21gasleak1stalarm" diSignalsplay="safe module:GD02005 F2-1 gas leak 1st alarm" diSignal="DI_GD02005F21gasleak1stalarm" alarmTrigValue="true" />
		<IoAlarmSignal id="AlarmSignalGD02005F21gasleak2ndalarm" diSignalsplay="safe module:GD02005 F2-1 gas leak 2nd alarm" diSignal="DI_GD02005F21gasleak2ndalarm" alarmTrigValue="true" />
		<IoAlarmSignal id="AlarmSignalGD02005fault" diSignalsplay="safe module:GD02005 fault" diSignal="DI_GD02005fault" alarmTrigValue="true" />
		<IoAlarmSignal id="AlarmSignalGD02006F22gasleak1stalarm" diSignalsplay="safe module:GD02006 F2-2 gas leak 1st alarm" diSignal="DI_GD02006F22gasleak1stalarm" alarmTrigValue="true" />
		<IoAlarmSignal id="AlarmSignalGD02006F22gasleak2ndalarm" diSignalsplay="safe module:GD02006 F2-2 gas leak 2nd alarm" diSignal="DI_GD02006F22gasleak2ndalarm" alarmTrigValue="true" />
		<IoAlarmSignal id="AlarmSignalGD02006fault" diSignalsplay="safe module:GD02006 fault" diSignal="DI_GD02006fault" alarmTrigValue="true" />
		<IoAlarmSignal id="AlarmSignalGD02007NO1gasleak1stalarm" diSignalsplay="safe module:GD02007 NO-1 gas leak 1st alarm" diSignal="DI_GD02007NO1gasleak1stalarm" alarmTrigValue="true" />
		<IoAlarmSignal id="AlarmSignalGD02007NO1gasleak2ndalarm" diSignalsplay="safe module:GD02007 NO-1 gas leak 2nd alarm" diSignal="DI_GD02007NO1gasleak2ndalarm" alarmTrigValue="true" />
		<IoAlarmSignal id="AlarmSignalGD02007fault" diSignalsplay="safe module:GD02007 fault" diSignal="DI_GD02007fault" alarmTrigValue="true" />
		<IoAlarmSignal id="AlarmSignalGD02008NO2gasleak1stalarm" diSignalsplay="safe module:GD02008 NO-2 gas leak 1st alarm" diSignal="DI_GD02008NO2gasleak1stalarm" alarmTrigValue="true" />
		<IoAlarmSignal id="AlarmSignalGD02008NO2gasleak2ndalarm" diSignalsplay="safe module:GD02008 NO-2 gas leak 2nd alarm" diSignal="DI_GD02008NO2gasleak2ndalarm" alarmTrigValue="true" />
		<IoAlarmSignal id="AlarmSignalGD02008fault" diSignalsplay="safe module:GD02008 fault" diSignal="DI_GD02008fault" alarmTrigValue="true" />
		<IoAlarmSignal id="AlarmSignalGD02009C3H61gasleak1stalarm" diSignalsplay="safe module:GD02009 C3H6-1 gas leak 1st alarm" diSignal="DI_GD02009C3H61gasleak1stalarm" alarmTrigValue="true" />
		<IoAlarmSignal id="AlarmSignalGD02009C3H61gasleak2ndalarm" diSignalsplay="safe module:GD02009 C3H6-1 gas leak 2nd alarm" diSignal="DI_GD02009C3H61gasleak2ndalarm" alarmTrigValue="true" />
		<IoAlarmSignal id="AlarmSignalGD02009fault" diSignalsplay="safe module:GD02009 fault" diSignal="DI_GD02009fault" alarmTrigValue="true" />
		<IoAlarmSignal id="AlarmSignalGD02010C3H62gasleak1stalarm" diSignalsplay="safe module:GD02010 C3H6-2 gas leak 1st alarm" diSignal="DI_GD02010C3H62gasleak1stalarm" alarmTrigValue="true" />
		<IoAlarmSignal id="AlarmSignalGD02010C3H62gasleak2ndalarm" diSignalsplay="safe module:GD02010 C3H6-2 gas leak 2nd alarm" diSignal="DI_GD02010C3H62gasleak2ndalarm" alarmTrigValue="true" />
		<IoAlarmSignal id="AlarmSignalGD02010fault" diSignalsplay="safe module:GD02010 fault" diSignal="DI_GD02010fault" alarmTrigValue="true" />
		<IoAlarmSignal id="AlarmSignalGD02011DMA1gasleak1stalarm" diSignalsplay="safe module:GD02011 DMA-1 gas leak 1st alarm" diSignal="DI_GD02011DMA1gasleak1stalarm" alarmTrigValue="true" />
		<IoAlarmSignal id="AlarmSignalGD02011DMA1gasleak2ndalarm" diSignalsplay="safe module:GD02011 DMA-1 gas leak 2nd alarm" diSignal="DI_GD02011DMA1gasleak2ndalarm" alarmTrigValue="true" />
		<IoAlarmSignal id="AlarmSignalGD02011fault" diSignalsplay="safe module:GD02011 fault" diSignal="DI_GD02011fault" alarmTrigValue="true" />
		<IoAlarmSignal id="AlarmSignalGD02012DMA2gasleak1stalarm" diSignalsplay="safe module:GD02012 DMA-2 gas leak 1st alarm" diSignal="DI_GD02012DMA2gasleak1stalarm" alarmTrigValue="true" />
		<IoAlarmSignal id="AlarmSignalGD02012DMA2gasleak2ndalarm" diSignalsplay="safe module:GD02012 DMA-2 gas leak 2nd alarm" diSignal="DI_GD02012DMA2gasleak2ndalarm" alarmTrigValue="true" />
		<IoAlarmSignal id="AlarmSignalGD02012fault" diSignalsplay="safe module:GD02012 fault" diSignal="DI_GD02012fault" alarmTrigValue="true" />
		<IoAlarmSignal id="AlarmSignalSL02001gasboxdoorsw11" diSignalsplay="safe module:SL02001 gas box door sw1-1" diSignal="DI_SL02001gasboxdoorsw11" alarmTrigValue="true" />
		<IoAlarmSignal id="AlarmSignalSL02001gasboxdoorsw12" diSignalsplay="safe module:SL02001 gas box door sw1-2" diSignal="DI_SL02001gasboxdoorsw12" alarmTrigValue="true" />
		<IoAlarmSignal id="AlarmSignalSL02002gasboxdoorsw11" diSignalsplay="safe module:SL02002 gas box door sw1-1" diSignal="DI_SL02002gasboxdoorsw11" alarmTrigValue="true" />
		<IoAlarmSignal id="AlarmSignalSL02002gasboxdoorsw12" diSignalsplay="safe module:SL02002 gas box door sw1-2" diSignal="DI_SL02002gasboxdoorsw12" alarmTrigValue="true" />
		<IoAlarmSignal id="AlarmSignalSL05002LAdoorsw2" diSignalsplay="safe module:SL05002 LA door sw2" diSignal="DI_SL05002LAdoorsw2" alarmTrigValue="true" />
		<IoAlarmSignal id="AlarmSignalSL05004LAfurnacedoorsw" diSignalsplay="safe module:SL05004 LA furnace door sw" diSignal="DI_SL05004LAfurnacedoorsw" alarmTrigValue="true" />
		<IoAlarmSignal id="AlarmSignalFurnacepoweronoff" diSignalsplay="safe module:Furnace power on/off" diSignal="DI_Furnacepoweronoff" alarmTrigValue="true" />
		<IoAlarmSignal id="AlarmSignalBlowerpoweronoff" diSignalsplay="safe module:Blower power on/off" diSignal="DI_Blowerpoweronoff" alarmTrigValue="true" />
		<IoAlarmSignal id="AlarmSignal100Vtransformerpoweron" diSignalsplay="safe module:100V transformer power on" diSignal="DI_100Vtransformerpoweron" alarmTrigValue="true" />
		<IoAlarmSignal id="AlarmSignalVFDenable" diSignalsplay="safe module:VFD enable" diSignal="DI_VFDenable" alarmTrigValue="true" />
		<IoAlarmSignal id="AlarmSignalHPMvalvepoweronoff" diSignalsplay="safe module:HPM valve power on/off" diSignal="DI_HPMvalvepoweronoff" alarmTrigValue="true" />
		<IoAlarmSignal id="AlarmSignalAxisCRmotorenable1" diSignalsplay="safe module:Axis-CR motor enable1" diSignal="DI_AxisCRmotorenable1" alarmTrigValue="true" />
		<IoAlarmSignal id="AlarmSignalAxisCRmotorenable2" diSignalsplay="safe module:Axis-CR motor enable2" diSignal="DI_AxisCRmotorenable2" alarmTrigValue="true" />
		<IoAlarmSignal id="AlarmSignalAxisEmotorenable1" diSignalsplay="safe module:Axis-E motor enable1" diSignal="DI_AxisEmotorenable1" alarmTrigValue="true" />
		<IoAlarmSignal id="AlarmSignalAxisEmotorenable2" diSignalsplay="safe module:Axis-E motor enable2" diSignal="DI_AxisEmotorenable2" alarmTrigValue="true" />
		<IoAlarmSignal id="AlarmSignalFTRenable1" diSignalsplay="safe module:FTR enable1" diSignal="DI_FTRenable1" alarmTrigValue="true" />
		<IoAlarmSignal id="AlarmSignalFTRenable2" diSignalsplay="safe module:FTR enable2" diSignal="DI_FTRenable2" alarmTrigValue="true" />
		<IoAlarmSignal id="AlarmSignalFTRinterlockreset" diSignalsplay="safe module:FTR interlock reset" diSignal="DI_FTRinterlockreset" alarmTrigValue="true" />
		<IoAlarmSignal id="AlarmSignalWTRenable1" diSignalsplay="safe module:WTR enable1" diSignal="DI_WTRenable1" alarmTrigValue="true" />
		<IoAlarmSignal id="AlarmSignalWTRenable2" diSignalsplay="safe module:WTR enable2" diSignal="DI_WTRenable2" alarmTrigValue="true" />
		<IoAlarmSignal id="AlarmSignalCapheaterenable" diSignalsplay="safe module:Cap heater enable" diSignal="DI_Capheaterenable" alarmTrigValue="true" />
		<IoAlarmSignal id="AlarmSignalLightcurtainidel" diSignalsplay="safe module:Light curtain idel" diSignal="DI_Lightcurtainidel" alarmTrigValue="true" />
		<!--<IoAlarmSignal id="AlarmSignalPowerboxinterlockbuttonled" diSignalsplay="safe module:Power box interlock button led" diSignal="DI_Powerboxinterlockbuttonled" alarmTrigValue="true" />
		<IoAlarmSignal id="AlarmSignalGasboxinterlockbuttonled" diSignalsplay="safe module:Gas box interlock button led" diSignal="DI_Gasboxinterlockbuttonled" alarmTrigValue="true" />
		<IoAlarmSignal id="AlarmSignalFrontbodyinterlockbuttonled" diSignalsplay="safe module:Frontbody interlock button led" diSignal="DI_Frontbodyinterlockbuttonled" alarmTrigValue="true" />-->


		<IoAlarmSignal id="AlarmSignalFIMS1LoadRunningError" diSignalsplay="E0000）FIMS1 Load Running Error" diSignal="DI_FIMS1LoadRunningError" alarmTrigValue="true" />
		<IoAlarmSignal id="AlarmSignalFIMS1UnloadRunningError" diSignalsplay="E0001）FIMS1 Unload Running Error" diSignal="DI_FIMS1UnloadRunningError" alarmTrigValue="true" />
		<IoAlarmSignal id="AlarmSignalFIMS1InitRunningError" diSignalsplay="E0002）FIMS1 Init Running Error" diSignal="DI_FIMS1InitRunningError" alarmTrigValue="true" />
		<IoAlarmSignal id="AlarmSignalFIMS2LoadRunningError" diSignalsplay="E0003）FIMS2 Load Running Error" diSignal="DI_FIMS2LoadRunningError" alarmTrigValue="true" />
		<IoAlarmSignal id="AlarmSignalFIMS2UnloadRunningError" diSignalsplay="E0004）FIMS2 Unload Running Error" diSignal="DI_FIMS2UnloadRunningError" alarmTrigValue="true" />
		<IoAlarmSignal id="AlarmSignalFIMS2InitRunningError" diSignalsplay="E0005）FIMS2 Init Running Error" diSignal="DI_FIMS2InitRunningError" alarmTrigValue="true" />
		<IoAlarmSignal id="AlarmSignalFIMS1UndockRunningError" diSignalsplay="E0006）FIMS1 Undock Running Error" diSignal="DI_FIMS1UndockRunningError" alarmTrigValue="true" />
		<IoAlarmSignal id="AlarmSignalFIMS1DockRunningError" diSignalsplay="E0007）FIMS1 Dock Running Error" diSignal="DI_FIMS1DockRunningError" alarmTrigValue="true" />
		<IoAlarmSignal id="AlarmSignalFIMS1VacuumOffRunningError" diSignalsplay="E0008）FIMS1 Vacuum Off Running Error" diSignal="DI_FIMS1VacuumOffRunningError" alarmTrigValue="true" />
		<IoAlarmSignal id="AlarmSignalFIMS1VacuumOnRunningError" diSignalsplay="E0009）FIMS1 Vacuum On Running Error" diSignal="DI_FIMS1VacuumOnRunningError" alarmTrigValue="true" />
		<IoAlarmSignal id="AlarmSignalFIMS1N2Closed" diSignalsplay="E0010）FIMS1 N2 Closed" diSignal="DI_FIMS1N2Closed" alarmTrigValue="true" />
		<IoAlarmSignal id="AlarmSignalFIMS1N2Opened" diSignalsplay="E0011）FIMS1 N2 Opened" diSignal="DI_FIMS1N2Opened" alarmTrigValue="true" />
		<IoAlarmSignal id="AlarmSignalFIMS1ReleaseRunningError" diSignalsplay="E0012）FIMS1 Release Running Error" diSignal="DI_FIMS1ReleaseRunningError" alarmTrigValue="true" />
		<IoAlarmSignal id="AlarmSignalFIMS1SealRunningError" diSignalsplay="E0013）FIMS1 Seal Running Error" diSignal="DI_FIMS1SealRunningError" alarmTrigValue="true" />
		<IoAlarmSignal id="AlarmSignalFIMS1SlideCloseRunningError" diSignalsplay="E0014）FIMS1 Slide Close Running Error" diSignal="DI_FIMS1SlideCloseRunningError" alarmTrigValue="true" />
		<IoAlarmSignal id="AlarmSignalFIMS1SlideOpenRunningError" diSignalsplay="E0015）FIMS1 Slide Open Running Error" diSignal="DI_FIMS1SlideOpenRunningError" alarmTrigValue="true" />
		<IoAlarmSignal id="AlarmSignalFIMS1LatchKeyOnRunningError" diSignalsplay="E0016）FIMS1 Latch Key On Running Error" diSignal="DI_FIMS1LatchKeyOnRunningError" alarmTrigValue="true" />
		<IoAlarmSignal id="AlarmSignalFIMS1LatchKeyOffRunningError" diSignalsplay="E0017）FIMS1 Latch Key Off Running Error" diSignal="DI_FIMS1LatchKeyOffRunningError" alarmTrigValue="true" />
		<IoAlarmSignal id="AlarmSignalFIMS1N2ReleaseRunningError" diSignalsplay="E0018）FIMS1 N2 Release Running Error" diSignal="DI_FIMS1N2ReleaseRunningError" alarmTrigValue="true" />
		<IoAlarmSignal id="AlarmSignalFIMS1N2SealRunningError" diSignalsplay="E0019）FIMS1 N2 Seal Running Error" diSignal="DI_FIMS1N2SealRunningError" alarmTrigValue="true" />
		<IoAlarmSignal id="AlarmSignalFIMS2UnDockRunningError" diSignalsplay="E0020）FIMS2 UnDock Running Error" diSignal="DI_FIMS2UnDockRunningError" alarmTrigValue="true" />
		<IoAlarmSignal id="AlarmSignalFIMS2DockRunningError" diSignalsplay="E0021）FIMS2 Dock Running Error" diSignal="DI_FIMS2DockRunningError" alarmTrigValue="true" />
		<IoAlarmSignal id="AlarmSignalFIMS2VacuumOffRunningError" diSignalsplay="E0022）FIMS2 Vacuum Off Running Error" diSignal="DI_FIMS2VacuumOffRunningError" alarmTrigValue="true" />
		<IoAlarmSignal id="AlarmSignalFIMS2VacuumOnRunningError" diSignalsplay="E0023）FIMS2 Vacuum On Running Error" diSignal="DI_FIMS2VacuumOnRunningError" alarmTrigValue="true" />
		<IoAlarmSignal id="AlarmSignalFIMS2N2Closed" diSignalsplay="E0024）FIMS2 N2 Closed" diSignal="DI_FIMS2N2Closed" alarmTrigValue="true" />
		<IoAlarmSignal id="AlarmSignalFIMS2N2Opened" diSignalsplay="E0025）FIMS2 N2 Opened" diSignal="DI_FIMS2N2Opened" alarmTrigValue="true" />
		<IoAlarmSignal id="AlarmSignalFIMS2SealRunningError" diSignalsplay="E0026）FIMS2 Seal Running Error" diSignal="DI_FIMS2SealRunningError" alarmTrigValue="true" />
		<IoAlarmSignal id="AlarmSignalFIMS2ReleaseRunningError" diSignalsplay="E0027）FIMS2 Release Running Error" diSignal="DI_FIMS2ReleaseRunningError" alarmTrigValue="true" />
		<IoAlarmSignal id="AlarmSignalFIMS2SlideCloseRunningError" diSignalsplay="E0028）FIMS2 Slide Close Running Error" diSignal="DI_FIMS2SlideCloseRunningError" alarmTrigValue="true" />
		<IoAlarmSignal id="AlarmSignalFIMS2SlideOpenRunningError" diSignalsplay="E0029）FIMS2 Slide Open Running Error" diSignal="DI_FIMS2SlideOpenRunningError" alarmTrigValue="true" />
		<IoAlarmSignal id="AlarmSignalFIMS2LatchKeyOnRunningError" diSignalsplay="E0030）FIMS2 Latch Key On Running Error" diSignal="DI_FIMS2LatchKeyOnRunningError" alarmTrigValue="true" />
		<IoAlarmSignal id="AlarmSignalFIMS2LatchKeyOffRunningError" diSignalsplay="E0031）FIMS2 Latch Key Off Running Error" diSignal="DI_FIMS2LatchKeyOffRunningError" alarmTrigValue="true" />
		<IoAlarmSignal id="AlarmSignalFIMS2N2ReleaseRunningError" diSignalsplay="E0032）FIMS2 N2 Release Running Error" diSignal="DI_FIMS2N2ReleaseRunningError" alarmTrigValue="true" />
		<IoAlarmSignal id="AlarmSignalFIMS2N2SealRunningError" diSignalsplay="E0033）FIMS2 N2 Seal Running Error" diSignal="DI_FIMS2N2SealRunningError" alarmTrigValue="true" />

		<IoAlarmSignal id="AlarmSignalBufferA1N2LowPressureError" diSignalsplay="Buffer A1 N2 Low Pressure Error" diSignal="DI_BufferA1N2LowPressureError" alarmTrigValue="true" />
		<IoAlarmSignal id="AlarmSignalBufferB1N2LowPressureError" diSignalsplay="Buffer B1 N2 Low Pressure Error" diSignal="DI_BufferB1N2LowPressureError" alarmTrigValue="true" />
		<IoAlarmSignal id="AlarmSignalBufferC1N2LowPressureError" diSignalsplay="Buffer C1 N2 Low Pressure Error" diSignal="DI_BufferC1N2LowPressureError" alarmTrigValue="true" />
		<IoAlarmSignal id="AlarmSignalBufferD1N2LowPressureError" diSignalsplay="Buffer D1 N2 Low Pressure Error" diSignal="DI_BufferD1N2LowPressureError" alarmTrigValue="true" />
		<IoAlarmSignal id="AlarmSignalBufferA2N2LowPressureError" diSignalsplay="Buffer A2 N2 Low Pressure Error" diSignal="DI_BufferA2N2LowPressureError" alarmTrigValue="true" />
		<IoAlarmSignal id="AlarmSignalBufferB2N2LowPressureError" diSignalsplay="Buffer B2 N2 Low Pressure Error" diSignal="DI_BufferB2N2LowPressureError" alarmTrigValue="true" />
		<IoAlarmSignal id="AlarmSignalBufferC2N2LowPressureError" diSignalsplay="Buffer C2 N2 Low Pressure Error" diSignal="DI_BufferC2N2LowPressureError" alarmTrigValue="true" />
		<IoAlarmSignal id="AlarmSignalBufferD2N2LowPressureError" diSignalsplay="Buffer D2 N2 Low Pressure Error" diSignal="DI_BufferD2N2LowPressureError" alarmTrigValue="true" />
		<IoAlarmSignal id="AlarmSignalBufferA3N2LowPressureError" diSignalsplay="Buffer A3 N2 Low Pressure Error" diSignal="DI_BufferA3N2LowPressureError" alarmTrigValue="true" />
		<IoAlarmSignal id="AlarmSignalBufferB3N2LowPressureError" diSignalsplay="Buffer B3 N2 Low Pressure Error" diSignal="DI_BufferB3N2LowPressureError" alarmTrigValue="true" />
		<IoAlarmSignal id="AlarmSignalBufferC3N2LowPressureError" diSignalsplay="Buffer C3 N2 Low Pressure Error" diSignal="DI_BufferC3N2LowPressureError" alarmTrigValue="true" />
		<IoAlarmSignal id="AlarmSignalBufferD3N2LowPressureError" diSignalsplay="Buffer D3 N2 Low Pressure Error" diSignal="DI_BufferD3N2LowPressureError" alarmTrigValue="true" />
		<IoAlarmSignal id="AlarmSignalBufferA4N2LowPressureError" diSignalsplay="Buffer A4 N2 Low Pressure Error" diSignal="DI_BufferA4N2LowPressureError" alarmTrigValue="true" />
		<IoAlarmSignal id="AlarmSignalBufferB4N2LowPressureError" diSignalsplay="Buffer B4 N2 Low Pressure Error" diSignal="DI_BufferB4N2LowPressureError" alarmTrigValue="true" />
		<IoAlarmSignal id="AlarmSignalBufferC4N2LowPressureError" diSignalsplay="Buffer C4 N2 Low Pressure Error" diSignal="DI_BufferC4N2LowPressureError" alarmTrigValue="true" />
		<IoAlarmSignal id="AlarmSignalBufferD4N2LowPressureError" diSignalsplay="Buffer D4 N2 Low Pressure Error" diSignal="DI_BufferD4N2LowPressureError" alarmTrigValue="true" />

		<IoAlarmSignal id="AlarmSignalFBFrontDoorSwitch"		diSignalsplay="FBFrontDoorSwitch"			diSignal="DI_Frontbodydoorswitch"		alarmTrigValue="true"/>
		<IoAlarmSignal id="AlarmSignalGLBoxPG1CNT1Alarm"		diSignalsplay="GLBoxPG1CNT1Alarm"			diSignal="DI_GLBoxPG1CNT1Alarm"		alarmTrigValue="true"/>
		<IoAlarmSignal id="AlarmSignalGLBoxPG1CNT2Alarm"		diSignalsplay="GLBoxPG1CNT2Alarm"			diSignal="DI_GLBoxPG1CNT2Alarm"		alarmTrigValue="true"/>
		<IoAlarmSignal id="AlarmSignalGLBoxPG2CNT1Alarm"		diSignalsplay="GLBoxPG2CNT1Alarm"			diSignal="DI_GLBoxPG2CNT1Alarm"		alarmTrigValue="true"/>
		<IoAlarmSignal id="AlarmSignalGLBoxPG2CNT2Alarm"		diSignalsplay="GLBoxPG2CNT2Alarm"			diSignal="DI_GLBoxPG2CNT2Alarm"		alarmTrigValue="true"/>
		<IoAlarmSignal id="AlarmSignalGLBoxPG3CNT1Alarm"		diSignalsplay="GLBoxPG3CNT1Alarm"			diSignal="DI_GLBoxPG3CNT1Alarm"		alarmTrigValue="true"/>
		<IoAlarmSignal id="AlarmSignalGLBoxPG3CNT2Alarm"		diSignalsplay="GLBoxPG3CNT2Alarm"			diSignal="DI_GLBoxPG3CNT2Alarm"		alarmTrigValue="true"/>
		<IoAlarmSignal id="AlarmSignalGLBoxPG4CNT1Alarm"		diSignalsplay="GLBoxPG4CNT1Alarm"			diSignal="DI_GLBoxPG4CNT1Alarm"		alarmTrigValue="true"/>
		<IoAlarmSignal id="AlarmSignalGLBoxPG4CNT2Alarm"		diSignalsplay="GLBoxPG4CNT2Alarm"			diSignal="DI_GLBoxPG4CNT2Alarm"		alarmTrigValue="true"/>
		<IoAlarmSignal id="AlarmSignalGLBoxPG5CNT1Alarm"		diSignalsplay="GLBoxPG5CNT1Alarm"			diSignal="DI_GLBoxPG5CNT1Alarm"		alarmTrigValue="true"/>
		<IoAlarmSignal id="AlarmSignalGLBoxPG5CNT2Alarm"		diSignalsplay="GLBoxPG5CNT2Alarm"			diSignal="DI_GLBoxPG5CNT2Alarm"		alarmTrigValue="true"/>
		<IoAlarmSignal id="AlarmSignalGLBoxPG6CNT1Alarm"		diSignalsplay="GLBoxPG6CNT1Alarm"			diSignal="DI_GLBoxPG6CNT1Alarm"		alarmTrigValue="true"/>
		<IoAlarmSignal id="AlarmSignalGLBoxPG6CNT2Alarm"		diSignalsplay="GLBoxPG6CNT2Alarm"			diSignal="DI_GLBoxPG6CNT2Alarm"		alarmTrigValue="true"/>

		<IoAlarmSignal id="AlarmSignalGLBoxVG32Output1"		diSignalsplay="GLBoxVG32Output1"			diSignal="DI_GLBoxVG32Output1"		alarmTrigValue="true"/>
		<IoAlarmSignal id="AlarmSignalGLBoxVG32Output2"		diSignalsplay="GLBoxVG32Output2"			diSignal="DI_GLBoxVG32Output2"		alarmTrigValue="true"/>
		<IoAlarmSignal id="AlarmSignalGLBoxVG33Output1"		diSignalsplay="GLBoxVG33Output1"			diSignal="DI_GLBoxVG33Output1"		alarmTrigValue="true"/>
		<IoAlarmSignal id="AlarmSignalGLBoxVG33Output2"		diSignalsplay="GLBoxVG33Output2"			diSignal="DI_GLBoxVG33Output2"		alarmTrigValue="true"/>

		<IoAlarmSignal id="AlarmSignalHeatingExhaust1stAlarmMS1"		diSignalsplay="HeatingExhaust1stAlarmMS1"			diSignal="DI_HeatingExhaust1stAlarmMS1"		alarmTrigValue="true"/>
		<IoAlarmSignal id="AlarmSignalHeatingExhaust2ndAlarmMS1"		diSignalsplay="HeatingExhaust2ndAlarmMS1"			diSignal="DI_HeatingExhaust2ndAlarmMS1"		alarmTrigValue="true"/>

		<IoAlarmSignal id="AlarmSignalScavengeExhaust1stAlarmMS3"		diSignalsplay="ScavengeExhaust1stAlarmMS3"			diSignal="DI_ScavengeExhaust1stAlarmMS3"		alarmTrigValue="true"/>
		<IoAlarmSignal id="AlarmSignalScavengeExhaust2ndAlarmMS3"		diSignalsplay="ScavengeExhaust2ndAlarmMS3"			diSignal="DI_ScavengeExhaust2ndAlarmMS3"		alarmTrigValue="true"/>
		<IoAlarmSignal id="AlarmSignalValveBoxExhaust1stAlarmMS4"		diSignalsplay="ValveBoxExhaust1stAlarmMS4"			diSignal="DI_ValveBoxExhaust1stAlarmMS4"		alarmTrigValue="true"/>
		<IoAlarmSignal id="AlarmSignalValveBoxExhaust2ndAlarmMS4"		diSignalsplay="ValveBoxExhaust2ndAlarmMS4"			diSignal="DI_ValveBoxExhaust2ndAlarmMS4"		alarmTrigValue="true"/>
		<IoAlarmSignal id="AlarmSignalLoadingAreaExhaust1stAlarmMS5"		diSignalsplay="LoadingAreaExhaust1stAlarmMS5"			diSignal="DI_LoadingAreaExhaust1stAlarmMS5"		alarmTrigValue="true"/>
		<IoAlarmSignal id="AlarmSignalLoadingAreaExhaust2ndAlarmMS5"		diSignalsplay="LoadingAreaExhaust2ndAlarmMS5"			diSignal="DI_LoadingAreaExhaust2ndAlarmMS5"		alarmTrigValue="true"/>

		<IoAlarmSignal id="AlarmSignalLAExhaust1stAlarmMS7"		diSignalsplay="LAExhaust1stAlarmMS321"			diSignal="DI_LAExhaust1stAlarmMS321"		alarmTrigValue="true"/>
		<IoAlarmSignal id="AlarmSignalLAExhaust2ndAlarmMS7"		diSignalsplay="LAExhaust2ndAlarmMS321"			diSignal="DI_LAExhaust2ndAlarmMS321"		alarmTrigValue="true"/>
		<IoAlarmSignal id="AlarmSignalRHC1stAlarmMS8"		diSignalsplay="RHC1stAlarmMS8"			diSignal="DI_RHC1stAlarmMS8"		alarmTrigValue="true"/>
		<IoAlarmSignal id="AlarmSignalRHC2ndAlarmMS8"		diSignalsplay="RHC2ndAlarmMS8"			diSignal="DI_RHC2ndAlarmMS8"		alarmTrigValue="true"/>
		<IoAlarmSignal id="AlarmSignalREV1stAlarmMS9"		diSignalsplay="REV1stAlarmMS9"			diSignal="DI_REV1stAlarmMS9"		alarmTrigValue="true"/>
		<IoAlarmSignal id="AlarmSignalREV2ndAlarmMS9"		diSignalsplay="REV2ndAlarmMS9"			diSignal="DI_REV2ndAlarmMS9"		alarmTrigValue="true"/>
		<IoAlarmSignal id="AlarmSignalREV1stAlarmMS10"		diSignalsplay="REV1stAlarmMS10"			diSignal="DI_REV1stAlarmMS10"		alarmTrigValue="true"/>
		<IoAlarmSignal id="AlarmSignalREV2ndAlarmMS10"		diSignalsplay="REV2ndAlarmMS10"			diSignal="DI_REV2ndAlarmMS10"		alarmTrigValue="true"/>
		<IoAlarmSignal id="AlarmSignalOPBoxPS11Out1"		diSignalsplay="OPBoxPS11Out1"			diSignal="DI_OPBoxPS11Out1"		alarmTrigValue="true"/>
		<IoAlarmSignal id="AlarmSignalRHCFlowAlarmFL901"		diSignalsplay="RHCFlowAlarmFL901"			diSignal="DI_RHCFlowAlarmFL901"		alarmTrigValue="true"/>
		<IoAlarmSignal id="AlarmSignalCoolingWaterFlowAlarmOfFurnaceFL902"		diSignalsplay="CoolingWaterFlowAlarmOfFurnaceFL902"			diSignal="DI_CoolingWaterFlowAlarmOfFurnaceFL902"		alarmTrigValue="true"/>
		<IoAlarmSignal id="AlarmSignalCoolingWaterFlowAlarmOfShuttleFL903"		diSignalsplay="CoolingWaterFlowAlarmOfShuttleFL903"			diSignal="DI_CoolingWaterFlowAlarmOfShuttleFL903"		alarmTrigValue="true"/>
		<IoAlarmSignal id="AlarmSignalCoolingWaterFlowAlarmOfBoatRotationFL904"		diSignalsplay="CoolingWaterFlowAlarmOfBoatRotationFL904"			diSignal="DI_CoolingWaterFlowAlarmOfBoatRotationFL904"		alarmTrigValue="true"/>
		<IoAlarmSignal id="AlarmSignalCoolingWaterFlowAlarmOfFlangeFL905"		diSignalsplay="CoolingWaterFlowAlarmOfFlangeFL905"			diSignal="DI_CoolingWaterFlowAlarmOfFlangeFL905"		alarmTrigValue="true"/>
		<IoAlarmSignal id="AlarmSignalCoolingWaterFlowAlarmOfLoadingAreaFL906"		diSignalsplay="CoolingWaterFlowAlarmOfLoadingAreaFL906"			diSignal="DI_CoolingWaterFlowAlarmOfLoadingAreaFL906"		alarmTrigValue="true"/>
		<IoAlarmSignal id="AlarmSignalVG11LowAlarm"		diSignalsplay="VG11LowAlarm"			diSignal="DI_VG11LowAlarm"		alarmTrigValue="true"/>
		<IoAlarmSignal id="AlarmSignalVG11HighAlarm"		diSignalsplay="VG11HighAlarm"			diSignal="DI_VG11HighAlarm"		alarmTrigValue="true"/>
		<IoAlarmSignal id="AlarmSignalVG12LowAlarm"		diSignalsplay="VG12LowAlarm"			diSignal="DI_VG12LowAlarm"		alarmTrigValue="true"/>
		<IoAlarmSignal id="AlarmSignalVG12HighAlarm"		diSignalsplay="VG12HighAlarm"			diSignal="DI_VG12HighAlarm"		alarmTrigValue="true"/>
		<IoAlarmSignal id="AlarmSignalVG13LowAlarm"		diSignalsplay="VG13LowAlarm"			diSignal="DI_VG13LowAlarm"		alarmTrigValue="true"/>
		<IoAlarmSignal id="AlarmSignalVG13HighAlarm"		diSignalsplay="VG13HighAlarm"			diSignal="DI_VG13HighAlarm"		alarmTrigValue="true"/>


		<IoAlarmSignal id="AlarmSignalPS14OUT2"		diSignalsplay="PS14OUT2"			diSignal="DI_PS14OUT2"		alarmTrigValue="true"/>

		<IoAlarmSignal id="AlarmSignalCoolingWaterPressureOut1"		diSignalsplay="CoolingWaterPressureOut1"			diSignal="DI_CoolingWaterPressureOut1"		alarmTrigValue="true"/>
		<IoAlarmSignal id="AlarmSignalCoolingWaterPressureOut2"		diSignalsplay="CoolingWaterPressureOut2"			diSignal="DI_CoolingWaterPressureOut2"		alarmTrigValue="true"/>

		<IoAlarmSignal id="AlarmSignalWaterFlowFL61"		diSignalsplay="WaterFlowFL61"			diSignal="DI_WaterFlowFL61"		alarmTrigValue="true"/>
		<IoAlarmSignal id="AlarmSignalWaterFlowFL62"		diSignalsplay="WaterFlowFL62"			diSignal="DI_WaterFlowFL62"		alarmTrigValue="true"/>
		<IoAlarmSignal id="AlarmSignalUPSFault"		diSignalsplay="UPSFault"			diSignal="DI_UPSFault"		alarmTrigValue="true"/>
		<IoAlarmSignal id="AlarmSignalK141UPSAlarm"		diSignalsplay="UPSAlarm"			diSignal="DI_K141UPSAlarm"		alarmTrigValue="true"/>
		<IoAlarmSignal id="AlarmSignalN2PurgeBOXPG14CNT1"		diSignalsplay="N2PurgeBOXPG14CNT1"			diSignal="DI_N2PurgeBOXPG14CNT1"		alarmTrigValue="true"/>
		<IoAlarmSignal id="AlarmSignalN2PurgeBOXPG14CNT2"		diSignalsplay="N2PurgeBOXPG14CNT2"			diSignal="DI_N2PurgeBOXPG14CNT2"		alarmTrigValue="true"/>
		<IoAlarmSignal id="AlarmSignalN2PurgeBOXPG15CNT1"		diSignalsplay="N2PurgeBOXPG15CNT1"			diSignal="DI_N2PurgeBOXPG15CNT1"		alarmTrigValue="true"/>
		<IoAlarmSignal id="AlarmSignalN2PurgeBOXPG15CNT2"		diSignalsplay="N2PurgeBOXPG15CNT2"			diSignal="DI_N2PurgeBOXPG15CNT2"		alarmTrigValue="true"/>
		<IoAlarmSignal id="AlarmSignalN2PurgeBOXPG16CNT1"		diSignalsplay="N2PurgeBOXPG16CNT1"			diSignal="DI_N2PurgeBOXPG16CNT1"		alarmTrigValue="true"/>
		<IoAlarmSignal id="AlarmSignalN2PurgeBOXPG16CNT2"		diSignalsplay="N2PurgeBOXPG16CNT2"			diSignal="DI_N2PurgeBOXPG16CNT2"		alarmTrigValue="true"/>
		<IoAlarmSignal id="AlarmSignalN2PurgeBOXPG70CNT1"		diSignalsplay="N2PurgeBOXPG70CNT1"			diSignal="DI_N2PurgeBOXPG70CNT1"		alarmTrigValue="true"/>
		<IoAlarmSignal id="AlarmSignalN2PurgeBOXPG70CNT2"		diSignalsplay="N2PurgeBOXPG70CNT2"			diSignal="DI_N2PurgeBOXPG70CNT2"		alarmTrigValue="true"/>
		<IoAlarmSignal id="AlarmSignalPS17ValueLowLimitAlarm"		diSignalsplay="PS17ValueLowLimitAlarm"			diSignal="DI_PS17ValueLowLimitAlarm"		alarmTrigValue="true"/>
		<IoAlarmSignal id="AlarmSignalPS17ValueLowLimitAlarm2"		diSignalsplay="PS17ValueLowLimitAlarm2"			diSignal="DI_PS17ValueLowLimitAlarm2"		alarmTrigValue="true"/>



		<IoAlarmSignal id="AlarmSignalForelineHeaterJacketLightAlarm"		diSignalsplay="ForelineHeaterJacketLightAlarm"			diSignal="DI_ForelineHeaterJacketLightAlarm"		alarmTrigValue="true"/>
		<IoAlarmSignal id="AlarmSignalForelineHeaterJacketHeavyAlarm"		diSignalsplay="ForelineHeaterJacketHeavyAlarm"			diSignal="DI_ForelineHeaterJacketHeavyAlarm"		alarmTrigValue="true"/>
		<IoAlarmSignal id="AlarmSignalScrubberWarning"		diSignalsplay="ScrubberWarning"			diSignal="DI_ScrubberWarning"		alarmTrigValue="true"/>
		<IoAlarmSignal id="AlarmSignalScrubberAlarm"		diSignalsplay="ScrubberAlarm"			diSignal="DI_ScrubberAlarm"		alarmTrigValue="true"/>
		<IoAlarmSignal id="AlarmSignalNegLmtPosBoatZAxis"		diSignalsplay="NegLmtPosBoatZAxis"			diSignal="DI_NegLmtPosBoatZAxis"		alarmTrigValue="true"/>
		<IoAlarmSignal id="AlarmSignalPotLmtPosBoatZAxis"		diSignalsplay="PotLmtPosBoatZAxis"			diSignal="DI_PotLmtPosBoatZAxis"		alarmTrigValue="true"/>
		<IoAlarmSignal id="AlarmSignalLAFFUCommAlarm"		diSignalsplay="LAFFUCommAlarm"			diSignal="DI_LAFFUCommAlarm"		alarmTrigValue="true"/>
		<IoAlarmSignal id="AlarmSignalMINI8CommAlarm"		diSignalsplay="MINI8CommAlarm"			diSignal="DI_MINI8CommAlarm"		alarmTrigValue="true"/>
		<IoAlarmSignal id="AlarmSignaMainWaterFlowAlarm"		diSignalsplay="MainWaterFlowAlarm"			diSignal="DI_MainWaterFlowAlarm"		alarmTrigValue="true"/>
		<IoAlarmSignal id="AlarmSignaBufferRemoteIOAlarm"		diSignalsplay="BufferRemoteIOAlarm"			diSignal="DI_BufferRemoteIOAlarm"		alarmTrigValue="true"/>
		<IoAlarmSignal id="AlarmSignaAPCCommAlarm"		diSignalsplay="APCCommAlarm"			diSignal="DI_APCCommAlarm"		alarmTrigValue="true"/>
		<IoAlarmSignal id="AlarmSignaBoatRAxisAlarm"		diSignalsplay="BoatRAxisAlarm"			diSignal="DI_BoatRAxisAlarm"		alarmTrigValue="true"/>
		<IoAlarmSignal id="AlarmSignaBoatRAxisWarning"		diSignalsplay="BoatRAxisWarning"			diSignal="DI_BoatRAxisWarning"		alarmTrigValue="true"/>
		<IoAlarmSignal id="AlarmSignaBoatZAxisWarning"		diSignalsplay="BoatZAxisWarning"			diSignal="DI_BoatWarningBoatZAxis"		alarmTrigValue="true"/>
		<IoAlarmSignal id="AlarmSignaBoatZAxisAlarm"		diSignalsplay="BoatZAxisAlarm"			diSignal="DI_BoatFaultBoatZAxis"		alarmTrigValue="true"/>

		<IoAlarmSignal id="AlarmSignaWaferRobotAlarm"		diSignalsplay="WaferRobotAlarm"			diSignal="DI_WaferRobotAlarm"		alarmTrigValue="true"/>
		<IoAlarmSignal id="AlarmSignaFOUPRobotAlarm"		diSignalsplay="FOUP RobotAlarm"			diSignal="DI_FOUPRobotAlarmSignal"		alarmTrigValue="true"/>

		<IoAlarmSignal id="AlarmSignaFOUPRobotTPStatusWarning"		diSignalsplay="FOUPRobotTPStatusWarning"			diSignal="DI_FOUPRobotIsTPStatus"		alarmTrigValue="false"/>
		<IoAlarmSignal id="AlarmSignaWaferRobotTPStatusWarning"		diSignalsplay="WaferRobotTPStatusWarning"			diSignal="DI_WaferRobotIsHostStatus"		alarmTrigValue="false"/>

		<IoAlarmSignal id="AlarmSignalGLBoxPG7CNT1Alarm"		diSignalsplay="Gas box PG7 CNT1 alarm"			diSignal="DI_GLBoxPG7CNT1Alarm"		alarmTrigValue="true"/>
		<IoAlarmSignal id="AlarmSignalGLBoxPG7CNT2Alarm"		diSignalsplay="Gas box PG7 CNT2 alarm"			diSignal="DI_GLBoxPG7CNT2Alarm"		alarmTrigValue="true"/>
		<IoAlarmSignal id="AlarmSignalGLBoxPG8CNT2Alarm"		diSignalsplay="Gas box PG8 CNT1 alarm"			diSignal="DI_GLBoxPG8CNT2Alarm"		alarmTrigValue="true"/>
		<IoAlarmSignal id="AlarmSignalGLBoxPG9CNT2Alarm"		diSignalsplay="Gas box PG8 CNT2 alarm"			diSignal="DI_GLBoxPG9CNT2Alarm"		alarmTrigValue="true"/>
		<IoAlarmSignal id="AlarmSignalHEXOverTemperatureAlarm"		diSignalsplay="H-EX over temperature alarm"			diSignal="DI_HEXOverTemperatureAlarm"		alarmTrigValue="true"/>
		<IoAlarmSignal id="AlarmSignalGLBoxPG21CNT1Alarm"		diSignalsplay="GL box PG21 CNT1 alarm"			diSignal="DI_GLBoxPG21CNT1Alarm"		alarmTrigValue="true"/>
		<IoAlarmSignal id="AlarmSignalGLBoxPG21CNT2Alarm"		diSignalsplay="GL box PG21 CNT2 alarm"			diSignal="DI_GLBoxPG21CNT2Alarm"		alarmTrigValue="true"/>
		<IoAlarmSignal id="AlarmSignalGLBoxPG22CNT1Alarm"		diSignalsplay="GL box PG22 CNT1 alarm"			diSignal="DI_GLBoxPG22CNT1Alarm"		alarmTrigValue="true"/>
		<IoAlarmSignal id="AlarmSignalGLBoxPG22CNT2Alarm"		diSignalsplay="GL box PG22 CNT2 alarm"			diSignal="DI_GLBoxPG22CNT2Alarm"		alarmTrigValue="true"/>
		<IoAlarmSignal id="AlarmSignalGLBoxPG23CNT1Alarm"		diSignalsplay="GL box PG23 CNT1 alarm"			diSignal="DI_GLBoxPG23CNT1Alarm"		alarmTrigValue="true"/>
		<IoAlarmSignal id="AlarmSignalGLBoxPG23CNT2Alarm"		diSignalsplay="GL box PG23 CNT2 alarm"			diSignal="DI_GLBoxPG23CNT2Alarm"		alarmTrigValue="true"/>
		<IoAlarmSignal id="AlarmSignalGLBoxPG24CNT1Alarm"		diSignalsplay="GL box PG24 CNT1 alarm"			diSignal="DI_GLBoxPG24CNT1Alarm"		alarmTrigValue="true"/>
		<IoAlarmSignal id="AlarmSignalGLBoxPG24CNT2Alarm"		diSignalsplay="GL box PG24 CNT2 alarm"			diSignal="DI_GLBoxPG24CNT2Alarm"		alarmTrigValue="true"/>
		<IoAlarmSignal id="AlarmSignalGLBoxPG25CNT1Alarm"		diSignalsplay="GL box PG25 CNT1 alarm"			diSignal="DI_GLBoxPG25CNT1Alarm"		alarmTrigValue="true"/>
		<IoAlarmSignal id="AlarmSignalGLBoxPG25CNT2Alarm"		diSignalsplay="GL box PG25 CNT2 alarm"			diSignal="DI_GLBoxPG25CNT2Alarm"		alarmTrigValue="true"/>
		<IoAlarmSignal id="AlarmSignalGLBoxPG31CNT1Alarm"		diSignalsplay="GL box PG31 CNT1 alarm"			diSignal="DI_GLBoxPG31CNT1Alarm"		alarmTrigValue="true"/>
		<IoAlarmSignal id="AlarmSignalGLBoxPG31CNT2Alarm"		diSignalsplay="GL box PG31 CNT2 alarm"			diSignal="DI_GLBoxPG31CNT2Alarm"		alarmTrigValue="true"/>
		<IoAlarmSignal id="AlarmSignalGLBoxPG32CNT1Alarm"		diSignalsplay="GL box PG32 CNT1 alarm"			diSignal="DI_GLBoxPG32CNT1Alarm"		alarmTrigValue="true"/>
		<IoAlarmSignal id="AlarmSignalGLBoxPG32CNT2Alarm"		diSignalsplay="GL box PG32 CNT2 alarm"			diSignal="DI_GLBoxPG32CNT2Alarm"		alarmTrigValue="true"/>
		<IoAlarmSignal id="AlarmSignalPG12CNT1Alarm"		diSignalsplay="PG12 CNT1 alarm"			diSignal="DI_PG12CNT1Alarm"		alarmTrigValue="true"/>
		<IoAlarmSignal id="AlarmSignalPG12CNT2Alarm"		diSignalsplay="PG12 CNT2 alarm"			diSignal="DI_PG12CNT2Alarm"		alarmTrigValue="true"/>
		<IoAlarmSignal id="AlarmSignalPG13CNT1Alarm"		diSignalsplay="PG13 CNT1 alarm"			diSignal="DI_PG13CNT1Alarm"		alarmTrigValue="true"/>
		<IoAlarmSignal id="AlarmSignalPG13CNT2Alarm"		diSignalsplay="PG13 CNT2 alarm"			diSignal="DI_PG13CNT2Alarm"		alarmTrigValue="true"/>
		<IoAlarmSignal id="AlarmSignalVaccum1PumpWarning"		diSignalsplay="Vaccum1 Pump Warning"			diSignal="DI_Vaccum1PumpWarning"		alarmTrigValue="true"/>
		<IoAlarmSignal id="AlarmSignalVaccum1PumpAlarm"		diSignalsplay="Vaccum1 Pump Alarm"			diSignal="DI_Vaccum1PumpAlarm"		alarmTrigValue="true"/>
		<IoAlarmSignal id="AlarmSignalVaccum2PumpWarning"		diSignalsplay="Vaccum2 Pump Warning"			diSignal="DI_Vaccum2PumpWarning"		alarmTrigValue="true"/>
		<IoAlarmSignal id="AlarmSignalVaccum2PumpAlarm"		diSignalsplay="Vaccum2 Pump Alarm"			diSignal="DI_Vaccum2PumpAlarm"		alarmTrigValue="true"/>

		<IoAlarmSignal id="AlarmSignalLDS1MajorAlarm"		diSignalsplay="LDS1 major alarm"			diSignal="DI_LDS1MajorAlarm"		alarmTrigValue="true"/>
		<IoAlarmSignal id="AlarmSignalLDS1MinorWarning"		diSignalsplay="LDS1 minor warning"			diSignal="DI_LDS1MinorWarning"		alarmTrigValue="true"/>
		<IoAlarmSignal id="AlarmSignalLDS1liquidLowWarning"		diSignalsplay="LDS1 liquid low warning"			diSignal="DI_LDS1liquidLowWarning"		alarmTrigValue="true"/>
		<IoAlarmSignal id="AlarmSignalLDS1TankBlankAlarm"		diSignalsplay="LDS1 tank blank alarm"			diSignal="DI_LDS1TankBlankAlarm"		alarmTrigValue="true"/>
		<IoAlarmSignal id="AlarmSignalLDS2MajorAlarm"		diSignalsplay="LDS2 major alarm"			diSignal="DI_LDS2MajorAlarm"		alarmTrigValue="true"/>
		<IoAlarmSignal id="AlarmSignalLDS2MinorWarning"		diSignalsplay="LDS2 minor warning"			diSignal="DI_LDS2MinorWarning"		alarmTrigValue="true"/>
		<IoAlarmSignal id="AlarmSignalLDS2LiquidLowWarning"		diSignalsplay="LDS2 liquid low warning"			diSignal="DI_LDS2LiquidLowWarning"		alarmTrigValue="true"/>
		<IoAlarmSignal id="AlarmSignalLDS2TankBlankAlarm"		diSignalsplay="LDS2 tank blank alarm"			diSignal="DI_LDS2TankBlankAlarm"		alarmTrigValue="true"/>

		<IoAlarmSignal id="AlarmSignalSL05001LAdoorsw1" diSignalsplay="safe module:SL05001 LA door sw1" diSignal="DI_SL05001LAdoorsw1" alarmTrigValue="false" />
		
		<IoAlarmSignal id="AlarmSignalMS6" diSignalsplay="MS6 alarm" diSignal="DI_MS6" alarmTrigValue="true" />


	</IoAlarmSignals>
	<IoSensors classType="Aitex.Core.RT.Device.Unit.IoSensor" assembly="MECF.Framework.RT.EquipmentLibrary">

		<IoSensor id="SensorN2_8" display="Air/N2-8 Pressure(N2_8)(20706)" di="DI_N2_8" SensorCategory="10"   />
		<IoSensor id="SensorN2_1" display="N2-1 Pressure(N2_1)(20707)" di="DI_N2_1" SensorCategory="10"   />
		<IoSensor id="SensorH2" display="H2 Pressure(H2)(20708)" di="DI_H2" SensorCategory="10"   />
		<IoSensor id="SensorNH3" display="NH3 Pressure(NH3)(20709)" di="DI_NH3" SensorCategory="10"   />
		<IoSensor id="SensorNO" display="NO Pressure(NO)(20710)" di="DI_NO" SensorCategory="10"   />
		<IoSensor id="SensorN2_2" display="N2-2 Pressure(N2_2)(20711)" di="DI_N2_2" SensorCategory="10"   />
		<IoSensor id="SensorO2" display="O2 Pressure(O2)(20712)" di="DI_O2" SensorCategory="10"   />
		<IoSensor id="SensorC3H6" display="C3H6 Pressure(C3H6)(20713)" di="DI_C3H6" SensorCategory="10"   />
		<IoSensor id="SensorF2" display="F2 Pressure(F2)(20714)" di="DI_F2" SensorCategory="10"   />
		<IoSensor id="SensorN2_10" display="N2-10 Pressure(N2_10)(20715)" di="DI_N2_10" SensorCategory="10"   />
		<IoSensor id="SensorN2_11" display="N2-11 Pressure(N2_11)(20716)" di="DI_N2_11" SensorCategory="10"   />
		<IoSensor id="SensorN2_9" display="N2-9 Pressure(N2_9)(20717)" di="DI_N2_9" SensorCategory="10"   />
		<IoSensor id="SensorN2_7" display="N2-7 pressure(N2_7)(20721)" di="DI_N2_7" SensorCategory="10"   />
		<IoSensor id="SensorAIR1" display="Air/N2-1 pressure(AIR1)(20722)" di="DI_AIR1" SensorCategory="10"   />
		<IoSensor id="SensorN2_4" display="N2-4 pressure(N2_4)(20723)" di="DI_N2_4" SensorCategory="10"   />
		<IoSensor id="SensorN2_5" display="N2-5 pressure(N2_5)(20724)" di="DI_N2_5" SensorCategory="10"   />
		<IoSensor id="SensorN2_6" display="N2-6 (PS16) pressure(N2_6)(20725)" di="DI_N2_6" SensorCategory="10"   />
		<IoSensor id="SensorH_EXH" display="Too low heater Exhaust press(H_EXH)(20726)" di="DI_H_EXH" SensorCategory="10"   />
		<IoSensor id="SensorG_EXH" display="Too low gas box Exhaust press(G_EXH)(20727)" di="DI_G_EXH" SensorCategory="10"   />
		<IoSensor id="SensorS_EXH" display="Too low scavenger Exhaust press(S_EXH)(20728)" di="DI_S_EXH" SensorCategory="10"   />
		<IoSensor id="SensorL_EXH" display="Too low L/A Exhaust press(L_EXH)(20729)" di="DI_L_EXH" SensorCategory="10"   />
		<IoSensor id="SensorR_EXH" display="Too low RHC Exhaust press(R_EXH)(20730)" di="DI_R_EXH" SensorCategory="10"   />
		<IoSensor id="SensorV_EXH" display="Too low Exhaust Box Exhaust press(V_EXH)(20731)" di="DI_V_EXH" SensorCategory="10"   />
		<IoSensor id="SensorO_HT" display="Abnormal Heater Overheat(O_HT)(20736)" di="DI_O_HT" SensorCategory="10"   />
		<IoSensor id="SensorTEMP1HTR" display="Abnormal heater Room temperature(TEMP1HTR)(20737)" di="DI_TEMP1HTR" SensorCategory="10"   />
		<IoSensor id="SensorTEMP2SCR" display="Abnormal SCR Temperature(TEMP2SCR)(20738)" di="DI_TEMP2SCR" SensorCategory="10"   />
		<IoSensor id="SensorTEMP3HTR1" display="Abnormal temp Transformer(heater)(TEMP3HTR1)(20739)" di="DI_TEMP3HTR1" SensorCategory="10"   />
		<IoSensor id="SensorTEMP4HTR2" display="Abnormal temp Transformer(cont.)(TEMP4HTR2)(20740)" di="DI_TEMP4HTR2" SensorCategory="10"   />
		<IoSensor id="SensorTEMP5HTR3" display="Abnormal temp transformer(C.UT,P.Heater)(TEMP5HTR3)(20741)" di="DI_TEMP5HTR3" SensorCategory="10"   />
		<IoSensor id="SensorW_LEAK1" display="Abnormal transfer Room water leak(W_LEAK1)(20743)" di="DI_W_LEAK1" SensorCategory="10"   />
		<IoSensor id="SensorW_LEAK2" display="Abnormal Water Box water leak(W_LEAK2)(20744)" di="DI_W_LEAK2" SensorCategory="10"   />
		<IoSensor id="SensorLSC_LEAK" display="Abnormal LSC Liquid source leak(LSC_LEAK)(20745)" di="DI_LSC_LEAK" SensorCategory="10"   />
		<IoSensor id="SensorPWR_DOWN" display="Power down monitor(PWR_DOWN)(20746)" di="DI_PWR_DOWN" SensorCategory="10"   />
		<IoSensor id="SensorF_PNL" display="Abnormal panel position for front door(F_PNL)(20747)" di="DI_F_PNL" SensorCategory="10"   />
		<IoSensor id="SensorT_PNL" display="Abnormal panelposition for transfer room(T_PNL)(20748)" di="DI_T_PNL" SensorCategory="10"   />
		<IoSensor id="SensorH_PNL" display="Abnormal panel position for heater room(H_PNL)(20749)" di="DI_H_PNL" SensorCategory="10"   />
		<IoSensor id="SensorPU1_DOWN" display="Pump1 down(Pump Stop)(PU1_DOWN)(20752)" di="DI_PU1_DOWN" SensorCategory="10"   />
		<IoSensor id="SensorPU1_ALARM" display="Pump1 fail pump off(Pump stop)(PU1_ALARM)(20753)" di="DI_PU1_ALARM" SensorCategory="10"   />
		<IoSensor id="SensorPU1_WARNIN" display="Pump1 alarm(PU1_WARNIN)(20754)" di="DI_PU1_WARNIN" SensorCategory="10"   />
		<IoSensor id="SensorPU2_DOWN" display="Pump2 down(Pump Stop)(PU2_DOWN)(20755)" di="DI_PU2_DOWN" SensorCategory="10"   />
		<IoSensor id="SensorPU2_ALARM" display="Pump2 fail pump off(Pump stop)(PU2_ALARM)(20756)" di="DI_PU2_ALARM" SensorCategory="10"   />
		<IoSensor id="SensorPU2_WARNIN" display="Pump2 alarm(PU2_WARNIN)(20757)" di="DI_PU2_WARNIN" SensorCategory="10"   />
		<IoSensor id="SensorR_VG11" display="Abnormal diaphragm sensor reading value(R_VG11)(20759)" di="DI_R_VG11" SensorCategory="10"   />
		<IoSensor id="SensorR_VG13" display="Abnormal diaphragm sensor reading value(R_VG13)(20760)" di="DI_R_VG13" SensorCategory="10"   />
		<IoSensor id="SensorR_VG21" display="Abnormal diaphragm sensor reading value(R_VG21)(20761)" di="DI_R_VG21" SensorCategory="10"   />
		<IoSensor id="SensorAPC" display="APC alarm(APC)(20762)" di="DI_APC" SensorCategory="10"   />
		<IoSensor id="SensorO_PRS" display="Too high furnace press(O_PRS)(20763)" di="DI_O_PRS" SensorCategory="10"   />
		<IoSensor id="SensorCK_PRS" display="Atmospheric pressure in Furnace Press(CK_PRS)(20764)" di="DI_CK_PRS" SensorCategory="10"   />
		<IoSensor id="SensorG_PNL" display="G_PNL(G_PNL)(20765)" di="DI_G_PNL" SensorCategory="10"   />
		<IoSensor id="SensorMAIN_WAT1" display="Abnormal cooling water flow for Main cooling water and heater jacket(MAIN_WAT1)(20767)" di="DI_MAIN_WAT1" SensorCategory="10"   />
		<IoSensor id="SensorSUB_WAT2" display="SUB_WAT2(SUB_WAT2)(20768)" di="DI_SUB_WAT2" SensorCategory="10"   />
		<IoSensor id="SensorC_UTA313" display="Abnormal Clean Unit(C_UTA313)(20770)" di="DI_C_UTA313" SensorCategory="10"   />
		<IoSensor id="SensorC_UTA311" display="Abnormal Clean Unit(C_UTA311)(20771)" di="DI_C_UTA311" SensorCategory="10"   />
		<IoSensor id="SensorC_UTMS5" display="Clean Unit Air Balance(C_UTMS5)(20772)" di="DI_C_UTMS5" SensorCategory="10"   />
		<IoSensor id="SensorC_UTTEMP" display="Clean Unit Over Temp(C_UTTEMP)(20773)" di="DI_C_UTTEMP" SensorCategory="10"   />
		<IoSensor id="SensorP_CNTILK" display="Deferential Pressure NG(P_CNTILK)(20774)" di="DI_P_CNTILK" SensorCategory="10"   />
		<IoSensor id="SensorRHC_FAIL" display="RHC_FAIL(RHC_FAIL)(20775)" di="DI_RHC_FAIL" SensorCategory="10"   />
		<IoSensor id="SensorRHC_DMR" display="Abnormal damper position(RHC_DMR)(20776)" di="DI_RHC_DMR" SensorCategory="10"   />
		<IoSensor id="SensorRHC_BWR" display="Blower overload(RHC_BWR)(20777)" di="DI_RHC_BWR" SensorCategory="10"   />
		<IoSensor id="SensorNDIR_ERROR" display="Abnormal Gas Monitor(NDIR)(NDIR_ERROR)(20780)" di="DI_NDIR_ERROR" SensorCategory="10"   />
		<IoSensor id="SensorNDIR_TEMP" display="Abnormal Gas Monitor heater temp (NDIR)(NDIR_TEMP)(20781)" di="DI_NDIR_TEMP" SensorCategory="10"   />
		<IoSensor id="SensorNDIR_LO" display="Low Gas Monitor density (NDIR)(NDIR_LO)(20782)" di="DI_NDIR_LO" SensorCategory="10"   />
		<IoSensor id="SensorNDIR_HI" display="Hi Gas Monitor density (NDIR)(NDIR_HI)(20783)" di="DI_NDIR_HI" SensorCategory="10"   />
		<IoSensor id="SensorNDIR_FAN" display="Air Cooling Fan Stop for NDIR(NDIR_FAN)(20784)" di="DI_NDIR_FAN" SensorCategory="10"   />
		<IoSensor id="SensorR_VG32" display="Abnormal diaphragm sensor reading value(R_VG32)(20787)" di="DI_R_VG32" SensorCategory="10"   />
		<IoSensor id="SensorR_VG33" display="Abnormal diaphragm sensor reading value(R_VG33)(20788)" di="DI_R_VG33" SensorCategory="10"   />
		<IoSensor id="SensorAR1_SYS_NG" display="Auto refiller-1 Material supply not possible(AR1_SYS_NG)(20790)" di="DI_AR1_SYS_NG" SensorCategory="10"   />
		<IoSensor id="SensorAR1_ALARM" display="Auto refiller-1 critical failure(AR1_ALARM)(20791)" di="DI_AR1_ALARM" SensorCategory="10"   />
		<IoSensor id="SensorAR1_WARN" display="Auto refiller-1 minor failure(AR1_WARN)(20792)" di="DI_AR1_WARN" SensorCategory="10"   />
		<IoSensor id="SensorHCD_HH" display="Abnormal liquid level in HCD tank(HH)(HCD_HH)(20793)" di="DI_HCD_HH" SensorCategory="10"   />
		<IoSensor id="SensorHCD_HI" display="Abnormal liquid level in HCD tank(HI)(HCD_HI)(20794)" di="DI_HCD_HI" SensorCategory="10"   />
		<IoSensor id="SensorHCD_LO" display="Abnormal liquid level in HCD tank(LO)(HCD_LO)(20795)" di="DI_HCD_LO" SensorCategory="10"   />
		<IoSensor id="SensorLSC1_Z_P" display="Too low LSC Box-1(HCD)Z-Purge Pressure(LSC1_Z_P)(20796)" di="DI_LSC1_Z_P" SensorCategory="10"   />
		<IoSensor id="SensorHCD_FLOAT" display="Abnormal Float SW Position in HCD tank(HCD_FLOAT)(20797)" di="DI_HCD_FLOAT" SensorCategory="10"   />
		<IoSensor id="SensorRENA_HH" display="Abnormal liquid level in RENA tank(HH)(RENA_HH)(20798)" di="DI_RENA_HH" SensorCategory="10"   />
		<IoSensor id="SensorRENA_HI" display="Abnormal liquid level in RENA tank(HI)(RENA_HI)(20799)" di="DI_RENA_HI" SensorCategory="10"   />
		<IoSensor id="SensorRENA_LO" display="Abnormal liquid level in RENA tank(LO)(RENA_LO)(20800)" di="DI_RENA_LO" SensorCategory="10"   />
		<IoSensor id="SensorLSC2_Z_P" display="Too low LSC Box-2(RENA)Z-Purge Pressure(LSC2_Z_P)(20801)" di="DI_LSC2_Z_P" SensorCategory="10"   />
		<IoSensor id="SensorRENA_FLOAT" display="Abnormal Float SW Position in RENA tank(RENA_FLOAT)(20802)" di="DI_RENA_FLOAT" SensorCategory="10"   />
		<IoSensor id="SensorSMOKE_SYS2" display="Power Box smoke detector fault(SMOKE_SYS2)(20803)" di="DI_SMOKE_SYS2" SensorCategory="10"   />
		<IoSensor id="SensorSMOKE_ALM2" display="Power Box Smoke Alarm(SMOKE_ALM2)(20804)" di="DI_SMOKE_ALM2" SensorCategory="10"   />
		<IoSensor id="SensorGAS_TEMP" display="Gas Line Heater Temp. alarm(GAS_TEMP)(20805)" di="DI_GAS_TEMP" SensorCategory="10"   />
		<IoSensor id="SensorEXH_TEMP" display="Exhaust Line Heater Temp. alarm(EXH_TEMP)(20806)" di="DI_EXH_TEMP" SensorCategory="10"   />
		<IoSensor id="SensorHTR_A" display="Abnormal diaphragm sensor controller(HTR_A)(20807)" di="DI_HTR_A" SensorCategory="10"   />
		<IoSensor id="SensorCAP_TEMP" display="Abnormal seal cap heater temp(CAP_TEMP)(20808)" di="DI_CAP_TEMP" SensorCategory="10"   />
		<IoSensor id="SensorCLN_TEMP" display="Abnormal furnace and exhaust line heater temp.(CLN_TEMP)(20810)" di="DI_CLN_TEMP" SensorCategory="10"   />
		<IoSensor id="SensorHCL_LEAK1" display="Gas Box HCL Gas Leak Alarm 1st Alarm(HCL_LEAK1)(20812)" di="DI_HCL_LEAK1" SensorCategory="10"   />
		<IoSensor id="SensorNH3_LEAK1" display="Gas Box NH3 Gas Leak Alarm 1s Alarm(NH3_LEAK1)(20813)" di="DI_NH3_LEAK1" SensorCategory="10"   />
		<IoSensor id="SensorF2_LEAK1" display="Gas Box F2 Gas Leak Alarm 1st Alarm(F2_LEAK1)(20814)" di="DI_F2_LEAK1" SensorCategory="10"   />
		<IoSensor id="SensorDET_ALM2" display="Gas Box Gas leak alarm, TROUBLE(DET_ALM2)(20815)" di="DI_DET_ALM2" SensorCategory="10"   />
		<IoSensor id="SensorSMOKE_SYS" display="Smoke detector fault(SMOKE_SYS)(20817)" di="DI_SMOKE_SYS" SensorCategory="10"   />
		<IoSensor id="SensorSMOKE_ALM" display="GAS Box Smoke alarm(SMOKE_ALM)(20818)" di="DI_SMOKE_ALM" SensorCategory="10"   />
		<IoSensor id="SensorC3H6_LEAK1" display="Gas Box C3H6 Gas Leak Alarm 1st Alarm(C3H6_LEAK1)(20819)" di="DI_C3H6_LEAK1" SensorCategory="10"   />
		<IoSensor id="SensorNO_LEAK1" display="Gas Box NO Gas Leak Alarm 1st Alarm(NO_LEAK1)(20820)" di="DI_NO_LEAK1" SensorCategory="10"   />
		<IoSensor id="SensorDMA_LEAK1" display="Gas Box and Scavenger DMA Gas Leak Alarm 1st Alarm(DMA_LEAK1)(20821)" di="DI_DMA_LEAK1" SensorCategory="10"   />
		<IoSensor id="SensorUPS_ALARM" display="Abnormal UPS alarm(UPS_ALARM)(20822)" di="DI_UPS_ALARM" SensorCategory="10"   />
		<IoSensor id="SensorHOT_N2ALM" display="HOT N2 alarm(HOT_N2ALM)(20823)" di="DI_HOT_N2ALM" SensorCategory="10"   />
		<IoSensor id="SensorF_EXH_TEMP" display="Fore line Exhaust Heater Temp. alarm(F_EXH_TEMP)(20824)" di="DI_F_EXH_TEMP" SensorCategory="10"   />
		<IoSensor id="SensorS1_SYS_NG" display="Abnormal scrubber-1 system.(S1_SYS_NG)(20825)" di="DI_S1_SYS_NG" SensorCategory="10"   />
		<IoSensor id="SensorSCR1_WARN" display="Scrubber-1 warning(SCR1_WARN)(20826)" di="DI_SCR1_WARN" SensorCategory="10"   />
		<IoSensor id="SensorSCR1_ALARM" display="Scrubber-1 alarm(SCR1_ALARM)(20827)" di="DI_SCR1_ALARM" SensorCategory="10"   />
		<IoSensor id="SensorAR2_SYS_NG" display="Auto refiller-2 Material supply not possible(AR2_SYS_NG)(20828)" di="DI_AR2_SYS_NG" SensorCategory="10"   />
		<IoSensor id="SensorAR2_ALARM" display="Auto refiller-2 critical failure(AR2_ALARM)(20829)" di="DI_AR2_ALARM" SensorCategory="10"   />
		<IoSensor id="SensorAR2_WARN" display="Auto refiller-2 minor failure(AR2_WARN)(20830)" di="DI_AR2_WARN" SensorCategory="10"   />

		<IoSensor id="SensorEMOReset" display="" di="DI_EMOReset"/>
		<IoSensor id="SensorFurnacePowerOnButton" display="" di="DI_FurnacePowerOnButton"/>
		<IoSensor id="SensorGasLineHeaterPowerOnButton" display="" di="DI_GasLineHeaterPowerOnButton"/>
		<IoSensor id="SensorExhaustHeaterPowerOnButton" display="" di="DI_ExhaustHeaterPowerOnButton"/>
		<IoSensor id="SensorFrontbodyPowerOnButton" display="" di="DI_FrontbodyPowerOnButton"/>
		<IoSensor id="SensorBlowerMotorPowerOnButton" display="" di="DI_BlowerMotorPowerOnButton"/>
		<IoSensor id="SensorFFUPowerOnButton" display="" di="DI_FFUPowerOnButton"/>
		<IoSensor id="SensorT102PowerOnButton" display="" di="DI_T102PowerOnButton"/>
		<IoSensor id="SensorT103PowerOnButton" display="" di="DI_T103PowerOnButton"/>
		<IoSensor id="SensorStartButton" display="" di="DI_StartButton"/>
		<IoSensor id="SensorStopButton" display="" di="DI_StopButton"/>
		<IoSensor id="SensorResetButton" display="" di="DI_ResetButton"/>
		<IoSensor id="SensorMechaStopButton" display="" di="DI_MechaStopButton"/>
		<IoSensor id="SensorAutoOrmanualKnob" display="" di="DI_AutoOrmanualKnob"/>
		<IoSensor id="SensorNormalOrMaintainKnob" display="" di="DI_NormalOrMaintainKnob"/>
		<IoSensor id="SensorHeaterPowerOnOffKnob" display="" di="DI_HeaterPowerOnOffKnob"/>
		<IoSensor id="SensorREVReset" display="" di="DI_REVReset"/>
		<IoSensor id="SensorMachineStop" display="" di="DI_MachineStop"/>
		<IoSensor id="SensorMachinePause" display="" di="DI_MachinePause"/>
		<IoSensor id="SensorOperatorAccessHandOffLeft" display="" di="DI_OperatorAccessHandOffLeft"/>
		<IoSensor id="SensorOperatorAccessHandOffRight" display="" di="DI_OperatorAccessHandOffRight"/>


		<IoSensor id="SensorVG11Status" display="" di="DI_VG11Status"/>
		<IoSensor id="SensorVG12Status" display="" di="DI_VG12Status"/>
		<IoSensor id="SensorVG13Status" display="" di="DI_VG13Status"/>

		<IoSensor id="SensorUPSBypassStatus" display="" di="DI_UPSBypassStatus"/>
		<IoSensor id="SensorUPSBatteryVoltageLow" display="" di="DI_UPSBatteryVoltageLow"/>
		<IoSensor id="SensorUPSStart" display="" di="DI_UPSStart"/>
		<IoSensor id="SensorUPSACInputCutOff" display="" di="DI_UPSACInputCutOff"/>

		<IoSensor id="SensorBlowerPowerStatusFeedback" display="" di="DI_BlowerPowerStatusFeedback"/>
		<IoSensor id="SensorVaccumPumpBothOn" display="" di="DI_VaccumPumpBothOn"/>

		<IoSensor id="SensorStocker1" display="" di="DI_BufferStock1A"/>
		<IoSensor id="SensorStocker2" display="" di="DI_BufferStock1B"/>
		<IoSensor id="SensorStocker3" display="" di="DI_BufferStock1C"/>
		<IoSensor id="SensorStocker4" display="" di="DI_BufferStock1D"/>
		<IoSensor id="SensorStocker5" display="" di="DI_BufferStock2A"/>
		<IoSensor id="SensorStocker6" display="" di="DI_BufferStock2B"/>
		<IoSensor id="SensorStocker7" display="" di="DI_BufferStock2C"/>
		<IoSensor id="SensorStocker8" display="" di="DI_BufferStock2D"/>
		<IoSensor id="SensorStocker9" display="" di="DI_BufferStock3A"/>
		<IoSensor id="SensorStocker10" display="" di="DI_BufferStock3B"/>
		<IoSensor id="SensorStocker11" display="" di="DI_BufferStock3C"/>
		<IoSensor id="SensorStocker12" display="" di="DI_BufferStock3D"/>
		<IoSensor id="SensorStocker13" display="" di="DI_BufferStock4A"/>
		<IoSensor id="SensorStocker14" display="" di="DI_BufferStock4B"/>
		<IoSensor id="SensorStocker15" display="" di="DI_BufferStock4C"/>
		<IoSensor id="SensorStocker16" display="" di="DI_BufferStock4D"/>
		<IoSensor id="SensorStocker17" display="" di="DI_LAFrontFOUPBuffer1InPosition"/>
		<IoSensor id="SensorStocker18" display="" di="DI_LAFrontFOUPBuffer2InPosition"/>

		<IoSensor id="SensorFurnaceMainCircuitBreakerStatusMonitor" display="" di="DI_FurnaceMainCircuitBreakerStatusMonitor"/>
		<IoSensor id="SensorZone1CircuitBreakerStatusMonitor" display="" di="DI_Zone1CircuitBreakerStatusMonitor"/>
		<IoSensor id="SensorZone2CircuitBreakerStatusMonitor" display="" di="DI_Zone2CircuitBreakerStatusMonitor"/>
		<IoSensor id="SensorZone3CircuitBreakerStatusMonitor" display="" di="DI_Zone3CircuitBreakerStatusMonitor"/>
		<IoSensor id="SensorZone4CircuitBreakerStatusMonitor" display="" di="DI_Zone4CircuitBreakerStatusMonitor"/>
		<IoSensor id="SensorZone5CircuitBreakerStatusMonitor" display="" di="DI_Zone5CircuitBreakerStatusMonitor"/>

		<IoSensor id="SensorWaferRobotEX1AxisHomePosition" display="" di="DI_WaferRobotEX1AxisHomePosition"/>
		<IoSensor id="SensorWaferRobotEX2AxisHomePosition" display="" di="DI_WaferRobotEX2AxisHomePosition"/>

		<IoSensor id="SensorVAC1" display="" di="DI_VAC1"/>
		<IoSensor id="SensorVAC2" display="" di="DI_VAC2"/>
		<IoSensor id="SensorVAC3" display="" di="DI_VAC3"/>
		<IoSensor id="SensorVAC4" display="" di="DI_VAC4"/>
		<IoSensor id="SensorVAC5" display="" di="DI_VAC5"/>
		<IoSensor id="SensorVAC6" display="" di="DI_VAC6"/>
		<IoSensor id="SensorVAC7" display="" di="DI_VAC7"/>
		<IoSensor id="SensorVAC8" display="" di="DI_VAC8"/>

		<IoSensor id="SensorPS13LStatus" display="" di="DI_PS13LStatus"/>
		<IoSensor id="SensorBoatUnloadInterlock" display="" di="DI_BoatUnloadInterlock"/>
		<IoSensor id="SensorAVGSwitchStatus" display="" di="DI_AVGSwitchStatus"/>

		<IoSensor id="SensorHCDTANKHH" display="" di="DI_HCDTANKHH"/>
		<IoSensor id="SensorHCDTANKH" display="" di="DI_HCDTANKH"/>
		<IoSensor id="SensorHCDTANKM" display="" di="DI_HCDTANKM"/>
		<IoSensor id="SensorHCDTANKL" display="" di="DI_HCDTANKL"/>
		<IoSensor id="SensorCSOURCETANKHH" display="" di="DI_CSOURCETANKHH"/>
		<IoSensor id="SensorCSOURCETANKH" display="" di="DI_CSOURCETANKH"/>
		<IoSensor id="SensorCSOURCETANKM" display="" di="DI_CSOURCETANKM"/>
		<IoSensor id="SensorCSOURCETANKL" display="" di="DI_CSOURCETANKL"/>
		<IoSensor id="SensorLDS1SystemReady" display="" di="DI_LDS1SystemReady"/>
		<IoSensor id="SensorLDS2SystemReady" display="" di="DI_LDS2SystemReady"/>

		<IoSensor id="SensorDEPOOKILK" display="" di="DI_DEPOOKILK"/>
		<IoSensor id="SensorCLNOKILK" display="" di="DI_CLNOKILK"/>
		<IoSensor id="SensorNVAC" display="" di="DI_NVAC"/>

		<IoSensor id="SensorHREFILK" display="" di="DI_HREFILK"/>
		<IoSensor id="SensorCREFILK" display="" di="DI_CREFILK"/>

		<IoSensor id="SensorO2DetectSideLA" display="LA N2" di="DI_O2_Detect_Side_LA"/>
		<IoSensor id="SensorO2DetectSideFIMS1" display="Transfer Room FIMS1" di="DI_O2_Detect_Side_FIMS1"/>
		<IoSensor id="SensorO2DetectSideFIMS2" display="Transfer Room FIMS2" di="DI_O2_Detect_Side_FIMS2"/>

		<IoSensor id="SensorLADoorSw1" display="LA door sw1" di="DI_SL05001LAdoorsw1"/>

		<IoSensor id="SensorSL02001gasboxdoorsw11" display="SensorSL02001gasboxdoorsw11" di="DI_SL02001gasboxdoorsw11"/>
		<IoSensor id="SensorSL02001gasboxdoorsw12" display="SensorSL02001gasboxdoorsw12" di="DI_SL02001gasboxdoorsw12"/>
		<IoSensor id="SensorSL02002gasboxdoorsw11" display="SensorSL02002gasboxdoorsw11" di="DI_SL02002gasboxdoorsw11"/>
		<IoSensor id="SensorSL02002gasboxdoorsw12" display="SensorSL02002gasboxdoorsw12" di="DI_SL02002gasboxdoorsw12"/>

		<IoSensor id="SensorSL05002LAdoorsw2" display="SL05002LAdoorsw2" di="DI_SL05002LAdoorsw2"/>
		<IoSensor id="SensorSL05004LAfurnacedoorsw" display="SL05004LAfurnacedoorsw" di="DI_SL05004LAfurnacedoorsw"/>

		<IoSensor id="SensorPLCHeartBeatPC" display="PLCHeartBeatPC" di="DI_PLCHeartBeatPC"/>
		<IoSensor id="SensorFTRHomeCX" display="FTRHomeCX" di="DI_FTRHomeCX"/>


		<IoSensor id="SensorPowerboxinterlockbuttonled" display="Powerboxinterlockbuttonled" di="DI_Powerboxinterlockbuttonled"/>
		<IoSensor id="SensorGasboxinterlockbuttonled" display="Gasboxinterlockbuttonled" di="DI_Gasboxinterlockbuttonled"/>
		<IoSensor id="SensorFrontbodyinterlockbuttonled" display="Frontbodyinterlockbuttonled" di="DI_Frontbodyinterlockbuttonled"/>
		<IoSensor id="SensorFrontbodyinterlockresetbutton" display="Frontbodyinterlockresetbutton" di="DI_Frontbodyinterlockresetbutton"/>

		<IoSensor id="SensorWTRinterlockreset" display="WTRinterlockreset" di="DI_WTRinterlockreset"/>
		<IoSensor id="SensorFTRinterlockreset" display="FTRinterlockreset" di="DI_FTRinterlockreset"/>
		<IoSensor id="SensorPS14OUT1" display="PS14OUT1" di="DI_PS14OUT1"/>


	</IoSensors>

	<IoTriggers >



		<IoTrigger id="TrigFFULSPEED" display="" schematicId="" unit="" aoTrigger="AO_FFU_LSPEED" />
		<IoTrigger id="TrigFFUHSPEED" display="" schematicId="" unit="" aoTrigger="AO_FFU_HSPEED" />
		<IoTrigger id="TrigHPMValve" display="" schematicId="" unit="" doTrigger="DO_HPMValveOnOff"/>
		<IoTrigger id="TrigGaslineHeaterPowerOn" display="" schematicId="" unit="" doTrigger="DO_GaslineHeaterPowerOn"/>
		<IoTrigger id="TrigExhaustHeaterPowerOn" display="" schematicId="" unit="" doTrigger="DO_ExhaustHeaterPowerOn"/>
		<IoTrigger id="TrigFrontBodyPowerOn" display="" schematicId="" unit="" doTrigger="DO_FrontBodyPowerOn"/>
		<IoTrigger id="TrigBlowerMotorPowerOn" display="" schematicId="" unit="" doTrigger="DO_BlowerMotorPowerOn"/>
		<IoTrigger id="TrigFFUPowerOn" display="" schematicId="" unit="" doTrigger="DO_FFUPowerOn"/>
		<IoTrigger id="TrigT102PowerOn" display="" schematicId="" unit="" doTrigger="DO_T102PowerOn"/>
		<IoTrigger id="TrigT103PowerOff" display="" schematicId="" unit="" doTrigger="DO_HExPowerOn"/>
		<IoTrigger id="TrigBufferMotorHardwareInterlockOk1" display="" schematicId="" unit="" doTrigger="DO_BufferMotorHardwareInterlockOk1"/>
		<IoTrigger id="TrigBufferMotorHardwareInterlockOk2" display="" schematicId="" unit="" doTrigger="DO_BufferMotorHardwareInterlockOk2"/>
		<IoTrigger id="TrigBoatLiftMotorHardwareInterlockOk1" display="" schematicId="" unit="" doTrigger="DO_BoatLiftMotorHardwareInterlockOk1"/>
		<IoTrigger id="TrigBoatLiftMotorHardwareInterlockOk2" display="" schematicId="" unit="" doTrigger="DO_BoatLiftMotorHardwareInterlockOk2"/>
		<IoTrigger id="TrigWaferRobotEnable" display="" schematicId="" unit="" doTrigger="DO_WaferRobotEnable"/>
		<IoTrigger id="TrigFOUPRobotEnable" display="" schematicId="" unit="" doTrigger="DO_FOUPRobotEnable"/>

		<IoTrigger id="TrigStartButton" display="" schematicId="" unit="" doTrigger="DO_StartButton"/>
		<IoTrigger id="TrigStopButton" display="" schematicId="" unit="" doTrigger="DO_StopButton"/>
		<IoTrigger id="TrigResetButton" display="" schematicId="" unit="" doTrigger="DO_ResetButton"/>
		<IoTrigger id="TrigMechaStopButton" display="" schematicId="" unit="" doTrigger="DO_MechaStopButton"/>
		<IoTrigger id="TrigAutoOrManualKnob" display="" schematicId="" unit="" doTrigger="DO_AutoOrManualKnob"/>
		<IoTrigger id="TrigNormalOrMaintainKnob" display="" schematicId="" unit="" doTrigger="DO_NormalOrMaintainKnob"/>
		<IoTrigger id="TrigHeaterPowerOnOffKnob" display="" schematicId="" unit="" doTrigger="DO_HeaterPowerOnOffKnob"/>
		<IoTrigger id="TrigVaccumPumpBothOn" display="" schematicId="" unit="" doTrigger="DO_VaccumPumpBothOn"/>
		<IoTrigger id="TrigVaccumPumpAGVOpen" display="" schematicId="" unit="" doTrigger="DO_VaccumPumpAGVOpen"/>
		<IoTrigger id="TrigVaccum2PumpAGVOpen" display="" schematicId="" unit="" doTrigger="DO_Vaccum2PumpAGVOpen"/>
		<IoTrigger id="TrigDEPOSW" display="" schematicId="" unit="" doTrigger="DO_DEPOSW"/>
		<IoTrigger id="TrigFurnaceLZoneHeatingEnable" display="" schematicId="" unit="" doTrigger="DO_FurnaceLZoneHeatingEnable"/>
		<IoTrigger id="TrigFurnaceCLZoneHeatingEnable" display="" schematicId="" unit="" doTrigger="DO_FurnaceCLZoneHeatingEnable"/>
		<IoTrigger id="TrigFurnaceCZoneHeatingEnable" display="" schematicId="" unit="" doTrigger="DO_FurnaceCZoneHeatingEnable"/>
		<IoTrigger id="TrigFurnaceCUZoneHeatingEnable" display="" schematicId="" unit="" doTrigger="DO_FurnaceCUZoneHeatingEnable"/>
		<IoTrigger id="TrigFurnaceUZoneHeatingEnable" display="" schematicId="" unit="" doTrigger="DO_FurnaceUZoneHeatingEnable"/>
		<IoTrigger id="TrigExhaustOmmanBoxFanPowerOn" display="" schematicId="" unit="" doTrigger="DO_ExhaustOmmanBoxFanPowerOn"/>
		<IoTrigger id="TrigHPMValveOutStatus" display="" schematicId="" unit="" doTrigger="DO_HPMValveOutStatus"/>
		<IoTrigger id="TrigForlineHeaterOn" display="" schematicId="" unit="" doTrigger="DO_ForlineHeaterOn"/>

		<IoTrigger id="TrigCapHeaterPowerOnEnable" display="" schematicId="" unit="" doTrigger="DO_CapHeaterPowerOnEnable"/>
		<IoTrigger id="TrigMechaStopRed" display="" schematicId="" unit="" doTrigger="DO_MechaStopRed"/>
		<IoTrigger id="TrigMechaPause" display="" schematicId="" unit="" doTrigger="DO_MechaPause"/>
		<IoTrigger id="TrigHandOffLeft" display="" schematicId="" unit="" doTrigger="DO_HandOffLeft"/>
		<IoTrigger id="TrigHandOffRight" display="" schematicId="" unit="" doTrigger="DO_HandOffRight"/>
		<IoTrigger id="TrigLP1FoupPresence" display="" schematicId="" unit="" doTrigger="DO_LP1FOUPPresence"/>
		<IoTrigger id="TrigLP1FoupPlacement" display="" schematicId="" unit="" doTrigger="DO_LP1FOUPPlacement"/>
		<IoTrigger id="TrigLP1FoupLoad" display="" schematicId="" unit="" doTrigger="DO_LP1FOUPLoad"/>
		<IoTrigger id="TrigLP1FoupUnload" display="" schematicId="" unit="" doTrigger="DO_LP1FOUPUnload"/>
		<IoTrigger id="TrigLP1FoupManual" display="" schematicId="" unit="" doTrigger="DO_LP1FOUPManual"/>
		<IoTrigger id="TrigLP2FoupPresence" display="" schematicId="" unit="" doTrigger="DO_LP2FOUPPresence"/>
		<IoTrigger id="TrigLP2FoupPlacement" display="" schematicId="" unit="" doTrigger="DO_LP2FOUPPlacement"/>
		<IoTrigger id="TrigLP2FoupLoad" display="" schematicId="" unit="" doTrigger="DO_LP2FOUPLoad"/>
		<IoTrigger id="TrigLP2FoupUnload" display="" schematicId="" unit="" doTrigger="DO_LP2FOUPUnload"/>
		<IoTrigger id="TrigLP2FoupManual" display="" schematicId="" unit="" doTrigger="DO_LP2FOUPManual"/>

		<IoTrigger id="TrigTransferRoomLedLightBar" display="" schematicId="" unit="" doTrigger="DO_TransferRoomLedLightBar"/>
		<IoTrigger id="TrigBoatRAxisAlarmReset" display="" schematicId="" unit="" doTrigger="DO_BoatRAxisAlarmReset"/>
		<IoTrigger id="TrigWaferRobotAlarmReset" display="" schematicId="" unit="" doTrigger="DO_WaferRobotAlarmReset"/>
		<IoTrigger id="TrigFOUPRobotAlarmReset" display="" schematicId="" unit="" doTrigger="DO_FOUPRobotAlarmReset"/>

		<IoTrigger id="TrigVGUnitConversion" display="" schematicId="" unit="" doTrigger="DO_VGUnitConversion"/>
		<IoTrigger id="TrigHeaterAllEnable" display="" schematicId="" unit="" aoTrigger="AO_HeaterAllEnable"/>

		<IoTrigger id="TrigStockerPurgeStocker13" display="" schematicId="" unit="" doTrigger="DO_BufferN2Purage4AOpen"/>
		<IoTrigger id="TrigStockerPurgeStocker14" display="" schematicId="" unit="" doTrigger="DO_BufferN2Purage4BOpen"/>
		<IoTrigger id="TrigStockerPurgeStocker15" display="" schematicId="" unit="" doTrigger="DO_BufferN2Purage4COpen"/>
		<IoTrigger id="TrigStockerPurgeStocker16" display="" schematicId="" unit="" doTrigger="DO_BufferN2Purage4DOpen"/>
		<IoTrigger id="TrigStockerPurgeStocker9" display="" schematicId="" unit="" doTrigger="DO_BufferN2Purage3AOpen"/>
		<IoTrigger id="TrigStockerPurgeStocker10" display="" schematicId="" unit="" doTrigger="DO_BufferN2Purage3BOpen"/>
		<IoTrigger id="TrigStockerPurgeStocker11" display="" schematicId="" unit="" doTrigger="DO_BufferN2Purage3COpen"/>
		<IoTrigger id="TrigStockerPurgeStocker12" display="" schematicId="" unit=""  doTrigger="DO_BufferN2Purage3DOpen"/>
		<IoTrigger id="TrigStockerPurgeStocker5" display="" schematicId="" unit=""  doTrigger="DO_BufferN2Purage2AOpen"/>
		<IoTrigger id="TrigStockerPurgeStocker6" display="" schematicId="" unit=""  doTrigger="DO_BufferN2Purage2BOpen"/>
		<IoTrigger id="TrigStockerPurgeStocker7" display="" schematicId="" unit=""  doTrigger="DO_BufferN2Purage2COpen"/>
		<IoTrigger id="TrigStockerPurgeStocker8" display="" schematicId="" unit=""  doTrigger="DO_BufferN2Purage2DOpen"/>
		<IoTrigger id="TrigStockerPurgeStocker1" display="" schematicId="" unit=""  doTrigger="DO_BufferN2Purage1AOpen"/>
		<IoTrigger id="TrigStockerPurgeStocker2" display="" schematicId="" unit=""  doTrigger="DO_BufferN2Purage1BOpen"/>
		<IoTrigger id="TrigStockerPurgeStocker3" display="" schematicId="" unit=""  doTrigger="DO_BufferN2Purage1COpen"/>
		<IoTrigger id="TrigStockerPurgeStocker4" display="" schematicId="" unit=""  doTrigger="DO_BufferN2Purage1DOpen"/>
		<IoTrigger id="TrigCREFON" display="" schematicId="" unit="" doTrigger="DO_CREF"/>
		<IoTrigger id="TrigSIREFON" display="" schematicId="" unit="" doTrigger="DO_HREF"/>
		<IoTrigger id="TrigHTR1SWON" display="" schematicId="" unit="" doTrigger="DO_HTR1"/>
		<IoTrigger id="TrigHTR2SWON" display="" schematicId="" unit="" doTrigger="DO_HTR2"/>
		<IoTrigger id="TrigHTR3SWON" display="" schematicId="" unit="" doTrigger="DO_HTR3"/>
		<IoTrigger id="TrigF2CleanSwitchB" display="" schematicId="" unit="" doTrigger="DO_CleanSwitch"/>
		<IoTrigger id="TrigFOUPRobotActionCommand" display="" schematicId="" unit="" aoTrigger="AO_FOUPRobotActionCommand" aiFeedback="AI_FOUPRobotActionCommand"/>
		<IoTrigger id="TrigWaferRobotActionCommand" display="" schematicId="" unit="" aoTrigger="AO_WaferRobotActionCommand" aiFeedback="AI_WaferRobotActionCommand"/>
		<IoTrigger id="TrigVFD" display="" schematicId="" unit="" aoTrigger="AO_VFDSetValue" aiFeedback="AI_VFDCurrentSpeed"/>

		<IoTrigger id="TrigMS501" display="" schematicId="" unit="" doTrigger="DO_MS501"/>
		<IoTrigger id="TrigMS520" display="" schematicId="" unit="" doTrigger="DO_MS520"/>
		<IoTrigger id="TrigMS521" display="" schematicId="" unit="" doTrigger="DO_MS521"/>
		<IoTrigger id="TrigMS522" display="" schematicId="" unit="" doTrigger="DO_MS522"/>

		<IoTrigger id="TrigBufferN2PurageEN" display="" schematicId="" unit="" doTrigger="DO_BufferN2PurageEN"/>
		<IoTrigger id="TrigBufferPurgeTime" display="" schematicId="" unit="" aoTrigger="AO_BufferPurgeTimeSV" />



		<IoTrigger id="TrigN2PurgeLAO2CheckFirstEnable" display="" schematicId="" unit="" doTrigger="DO_LAO2CheckFirstEN"/>
		<IoTrigger id="TrigN2PurgeFIMS1O2CheckEnable" display="" schematicId="" unit="" doTrigger="DO_FIMS1O2CheckEN"/>
		<IoTrigger id="TrigN2PurgeFIMS2O2CheckEnable" display="" schematicId="" unit="" doTrigger="DO_FIMS2O2CheckEN"/>
		<IoTrigger id="TrigN2PurgeProcess" display="" schematicId="" unit="" doTrigger="DO_N2PURGEPROCESS"/>
		<IoTrigger id="TrigN2PurgeLAO2OverTime" display="" schematicId="" unit="" aoTrigger="AO_LAO2OverTime"/>
		<IoTrigger id="TrigN2PurgeLAO2CheckTime" display="" schematicId="" unit="" aoTrigger="AO_LAO2CheckTime"/>
		<IoTrigger id="TrigN2PurgeFOUPO2OverTime" display="" schematicId="" unit="" aoTrigger="AO_FOUPO2OverTime"/>
		<IoTrigger id="TrigN2PurgeFOUPO2CheckTime" display="" schematicId="" unit="" aoTrigger="AO_FOUPO2CheckTime"/>
		<IoTrigger id="TrigN2PurgeExchangeLATOFOUPWaitTime" display="" schematicId="" unit="" aoTrigger="AO_ExchangeLATOFOUPWaitTime"/>
		<IoTrigger id="TrigN2PurgeExchangeFOUPTOLAWaitTime" display="" schematicId="" unit="" aoTrigger="AO_ExchangeFOUPTOLAWaitTime"/>
		<IoTrigger id="TrigN2PurgeExchangeFOUPTOFOUPWaitTime" display="" schematicId="" unit="" aoTrigger="AO_ExchangeFOUPTOFOUPWaitTime"/>
		<IoTrigger id="TrigN2PurgeLAO2CheckSV" display="" schematicId="" unit="" aoTrigger="AO_LAO2CheckSV"/>
		<IoTrigger id="TrigN2PurgeFOUPO2CheckSV" display="" schematicId="" unit="" aoTrigger="AO_FOUPO2CheckSV"/>

		<IoTrigger id="TrigDPRON" display="" schematicId="" unit="" doTrigger="DO_DPR"/>
		<IoTrigger id="TrigCEXHON" display="" schematicId="" unit="" doTrigger="DO_CEXH"/>
		<IoTrigger id="TrigBWR" display="" schematicId="" unit="" doTrigger="DO_BlowerPowerOn"/>




	</IoTriggers>


	<!--<IoTriggers classType="FurnaceRT.Devices.IoTrigger4" assembly="FurnaceRT">
		<IoTrigger4 id="TrigCapHeaterTemp" display="" aiFeedback="AI_CH15PV"  schematicId="" unit="" aoTrigger="AO_CapHeaterTemp"/>
		<IoTrigger4 id="TrigRAXIS" display="" aiFeedback="AI_CH16PV"  schematicId="" unit="" aoTrigger="AO_RAXIS"/>
	</IoTriggers>-->
	<IoSignalTowers  assembly="FurnaceRT" classType="FurnaceRT.Equipments.Systems.FurnaceSignalTower">
		<IoSignalTower module="System" id ="SignalTower" display="Signal Tower" schematicId=""
						   doRed="DO_TowerRed" doYellow="DO_TowerOrange" doGreen="DO_TowerGreen" doBlue="DO_TowerBlue"
						   doBuzzer1="DO_TowerBuzzle"/>
	</IoSignalTowers>

	<IoMFCs  classType="FurnaceRT.Equipments.PMs.Devices.IoMFC" assembly="FurnaceRT">
		<IoMFC id="MFC1" display="MFC1" schematicId="MFC1" unit="sccm"				aiFlow="AI_MFC1AirFlowPV"				aoFlow="AO_MFC1AirFlowSV"				aoRamp="AO_MFC1RampTime"				aioType="float"				scBasePath="PM1.MFC"/>
		<IoMFC id="MFC2" display="MFC2" schematicId="MFC2" unit="sccm"				aiFlow="AI_MFC2AirFlowPV"				aoFlow="AO_MFC2AirFlowSV"			    aoRamp="AO_MFC2RampTime"			    aioType="float"				scBasePath="PM1.MFC"/>
		<IoMFC id="MFC3" display="MFC3" schematicId="MFC3" unit="sccm"				aiFlow="AI_MFC3AirFlowPV"			    aoFlow="AO_MFC3AirFlowSV"		        aoRamp="AO_MFC3RampTime"				aioType="float"				scBasePath="PM1.MFC"/>
		<IoMFC id="MFC4" display="MFC4" schematicId="MFC4" unit="sccm"				aiFlow="AI_MFC4AirFlowPV"				aoFlow="AO_MFC4AirFlowSV"			    aoRamp="AO_MFC4RampTime"				aioType="float"				scBasePath="PM1.MFC"/>
		<IoMFC id="MFC5" display="MFC5" schematicId="MFC5" unit="sccm"				aiFlow="AI_MFC5AirFlowPV"			    aoFlow="AO_MFC5AirFlowSV"		        aoRamp="AO_MFC5RampTime"				aioType="float"				scBasePath="PM1.MFC"/>
		<IoMFC id="MFC6" display="MFC6" schematicId="MFC6" unit="sccm"				aiFlow="AI_MFC6AirFlowPV"				aoFlow="AO_MFC6AirFlowSV"			    aoRamp="AO_MFC6RampTime"				aioType="float"				scBasePath="PM1.MFC"/>
		<IoMFC id="MFC7" display="MFC7" schematicId="MFC7" unit="sccm"				aiFlow="AI_MFC7AirFlowPV"				aoFlow="AO_MFC7AirFlowSV"			    aoRamp="AO_MFC7RampTime"				aioType="float"				scBasePath="PM1.MFC"/>
		<IoMFC id="MFC8" display="MFC8" schematicId="MFC8" unit="sccm"				aiFlow="AI_MFC8AirFlowPV"				aoFlow="AO_MFC8AirFlowSV"			    aoRamp="AO_MFC8RampTime"				aioType="float"				scBasePath="PM1.MFC"/>
		<IoMFC id="MFC9" display="MFC9" schematicId="MFC9" unit="sccm"				aiFlow="AI_MFC9AirFlowPV"				aoFlow="AO_MFC9AirFlowSV"			    aoRamp="AO_MFC9RampTime"				aioType="float"				scBasePath="PM1.MFC"/>
		<IoMFC id="MFC10" display="MFC10" schematicId="MFC10" unit="sccm"				aiFlow="AI_MFC10AirFlowPV"				aoFlow="AO_MFC10AirFlowSV"			    aoRamp="AO_MFC10RampTime"				aioType="float"				scBasePath="PM1.MFC"/>
		<IoMFC id="MFC11" display="MFC11" schematicId="MFC11" unit="sccm"				aiFlow="AI_MFC11AirFlowPV"				aoFlow="AO_MFC11AirFlowSV"			    aoRamp="AO_MFC11RampTime"				aioType="float"				scBasePath="PM1.MFC"/>
		<IoMFC id="MFC12" display="MFC12" schematicId="MFC12" unit="sccm"				aiFlow="AI_MFC12AirFlowPV"				aoFlow="AO_MFC12AirFlowSV"			    aoRamp="AO_MFC12RampTime"				aioType="float"				scBasePath="PM1.MFC"/>
		<IoMFC id="MFC13" display="MFC13" schematicId="MFC13" unit="sccm"				aiFlow="AI_MFC13AirFlowPV"				aoFlow="AO_MFC13AirFlowSV"			    aoRamp="AO_MFC13RampTime"				aioType="float"				scBasePath="PM1.MFC"/>
		<IoMFC id="MFC16" display="MFC16" schematicId="MFC16" unit="sccm"				aiFlow="AI_MFC16AirFlowPV"				aoFlow="AO_MFC16AirFlowSV"			    aoRamp="AO_MFC16RampTime"				aioType="float"				scBasePath="PM1.MFC"/>
		<IoMFC id="MFC17" display="MFC17" schematicId="MFC17" unit="sccm"				aiFlow="AI_MFC17AirFlowPV"				aoFlow="AO_MFC17AirFlowSV"			    aoRamp="AO_MFC17RampTime"				aioType="float"				scBasePath="PM1.MFC"/>
		<IoMFC id="MFC31" display="MFC31" schematicId="MFC31" unit="sccm"				aiFlow="AI_MFC31AirFlowPV"				aoFlow="AO_MFC31AirFlowSV"			    aoRamp="AO_MFC31RampTime"				aioType="float"				scBasePath="PM1.MFC"/>
		<IoMFC id="MFC32" display="MFC32" schematicId="MFC32" unit="sccm"				aiFlow="AI_MFC32AirFlowPV"				aoFlow="AO_MFC32AirFlowSV"			    aoRamp="AO_MFC32RampTime"				aioType="float"				scBasePath="PM1.MFC"/>
		<IoMFC id="MFC51" display="MFC51" schematicId="MFC51" unit="sccm"				aiFlow="AI_MFC51AirFlowPV"				aoFlow="AO_MFC51AirFlowSV"			    aoRamp="AO_MFC51RampTime"				aioType="float"				scBasePath="PM1.MFC"/>
	</IoMFCs>
	<IoMFMs classType="FurnaceRT.Equipments.PMs.Devices.IoMFM" assembly="FurnaceRT">

		<IoMFM id="MFM6" display="MFM6" schematicId="MFM6" unit="sccm"				aiFlow="AI_MFM6AirFlowPV"				aioType="float"				scBasePath="PM1.MFM"/>
		<IoMFM id="MFM7" display="MFM7" schematicId="MFM7" unit="sccm"				aiFlow="AI_MFM7AirFlowPV"				aioType="float"				scBasePath="PM1.MFM"/>
		<IoMFM id="MFM8" display="MFM8" schematicId="MFM8" unit="sccm"				aiFlow="AI_MFM8AirFlowPV"				aioType="float"				scBasePath="PM1.MFM"/>
		<IoMFM id="MFM9" display="MFM9" schematicId="MFM9" unit="sccm"				aiFlow="AI_MFM9AirFlowPV"				aioType="float"				scBasePath="PM1.MFM"/>
		<IoMFM id="MFM11" display="MFM11" schematicId="MFM11" unit="sccm"				aiFlow="AI_MFM11AirFlowPV"				aioType="float"				scBasePath="PM1.MFM"/>
		<IoMFM id="MFM12" display="MFM12" schematicId="MFM12" unit="sccm"				aiFlow="AI_MFM12AirFlowPV"				aioType="float"				scBasePath="PM1.MFM"/>
		<IoMFM id="MFM13" display="MFM13" schematicId="MFM13" unit="sccm"				aiFlow="AI_MFM13AirFlowPV"				aioType="float"				scBasePath="PM1.MFM"/>
		<IoMFM id="MFM16" display="MFM16" schematicId="MFM16" unit="sccm"				aiFlow="AI_MFM16AirFlowPV"				aioType="float"				scBasePath="PM1.MFM"/>
		<IoMFM id="MFM57" display="MFM57" schematicId="MFM57" unit="sccm"				aiFlow="AI_MFM57AirFlowPV"				aioType="float"				scBasePath="PM1.MFM"/>



	</IoMFMs>
	<IoFFUs classType="FurnaceRT.Devices.IoFFU" assembly="FurnaceRT">
		<IoFFU id="FFU1" display="FFU_1" schematicId="FFU1" unit=""
					diDataWriteDone=""
					diDataWriteError=""
					diDataReadError=""
					aiGroupNumber=""
					aiAddressNumber=""
					aiSwitch=""
					aiSetSpeed=""
					aiMaxSpeed=""
					aiReset=""
					aiErrorTimer=""
					aiCurrentSpeed="AI_FFU1CurrentSpeed"
					aiVoltage=""
					aiCurrent=""
					aiStatus="AI_FFU1Status"
			   
					aoSwitch=""
					aoSetSpeed="AO_FFU1SetSpeed"
					aoReset=""
				
					doEnable=""
					doWriteCommand=""
					scRootPath="FFU"
					aioType="float"
				/>
		<IoFFU id="FFU2" display="FFU_2" schematicId="FFU2" unit=""
				diDataWriteDone=""
				diDataWriteError=""
				diDataReadError=""
				aiGroupNumber=""
				aiAddressNumber=""
				aiSwitch=""
				aiSetSpeed=""
				aiMaxSpeed=""
				aiReset=""
				aiErrorTimer=""
				aiCurrentSpeed="AI_FFU2CurrentSpeed"
				aiVoltage=""
				aiCurrent=""
				aiStatus="AI_FFU2Status"
	   
				aoSwitch=""
				aoSetSpeed="AO_FFU2SetSpeed"
				aoReset=""
		
				doEnable=""
				doWriteCommand=""
   scRootPath="FFU"
				aioType="float"
		/>
		<IoFFU id="FFU3" display="FFU_3" schematicId="FFU3" unit=""
				diDataWriteDone=""
				diDataWriteError=""
				diDataReadError=""
				aiGroupNumber=""
				aiAddressNumber=""
				aiSwitch=""
				aiSetSpeed=""
				aiMaxSpeed=""
				aiReset=""
				aiErrorTimer=""
				aiCurrentSpeed="AI_FFU3CurrentSpeed"
				aiVoltage=""
				aiCurrent=""
				aiStatus="AI_FFU3Status"
	   
				aoSwitch=""
				aoSetSpeed="AO_FFU3SetSpeed"
				aoReset=""
		
				doEnable=""
				doWriteCommand=""
   scRootPath="FFU"
				aioType="float"
		/>
		<IoFFU id="FFU4" display="FFU_4" schematicId="FFU4" unit=""
				diDataWriteDone=""
				diDataWriteError=""
				diDataReadError=""
				aiGroupNumber=""
				aiAddressNumber=""
				aiSwitch=""
				aiSetSpeed=""
				aiMaxSpeed=""
				aiReset=""
				aiErrorTimer=""
				aiCurrentSpeed="AI_FFU4CurrentSpeed"
				aiVoltage=""
				aiCurrent=""
				aiStatus="AI_FFU4Status"
	   
				aoSwitch=""
				aoSetSpeed="AO_FFU4SetSpeed"
				aoReset=""
		
				doEnable=""
				doWriteCommand=""
   scRootPath="FFU"
				aioType="float"
		/>
		<IoFFU id="BufferFFU1" display="BufferFFU1" schematicId="BufferFFU1" unit=""
				diDataWriteDone=""
				diDataWriteError=""
				diDataReadError=""
				aiGroupNumber=""
				aiAddressNumber=""
				aiSwitch="AI_BufferFFU1Status"
				aiSetSpeed=""
				aiMaxSpeed=""
				aiReset=""
				aiErrorTimer=""
				aiCurrentSpeed="AI_BufferFFU1CurrentSpeed"
				aiVoltage=""
				aiCurrent=""
				aiStatus=""
	   
				aoSwitch="AO_BufferFFU1Switch"
				aoSetSpeed="AO_BufferFFU1SV"
				aoReset=""
		
				doEnable=""
				doWriteCommand=""
				scRootPath="FFU"
				aioType="float"
		/>
		<IoFFU id="BufferFFU2" display="BufferFFU2" schematicId="BufferFFU2" unit=""
			diDataWriteDone=""
			diDataWriteError=""
			diDataReadError=""
			aiGroupNumber=""
			aiAddressNumber=""
			aiSwitch="AI_BufferFFU2Status"
			aiSetSpeed=""
			aiMaxSpeed=""
			aiReset=""
			aiErrorTimer=""
			aiCurrentSpeed="AI_BufferFFU2CurrentSpeed"
			aiVoltage=""
			aiCurrent=""
			aiStatus=""
	   
			aoSwitch="AO_BufferFFU2Switch"
			aoSetSpeed="AO_BufferFFU2SV"
			aoReset=""
		
			doEnable=""
			doWriteCommand=""
		    scRootPath="FFU"
			aioType="float"
		/>

		<IoFFU id="BufferFFU3" display="BufferFFU3" schematicId="BufferFFU3" unit=""
			diDataWriteDone=""
			diDataWriteError=""
			diDataReadError=""
			aiGroupNumber=""
			aiAddressNumber=""
			aiSwitch="AI_BufferFFU3Status"
			aiSetSpeed=""
			aiMaxSpeed=""
			aiReset=""
			aiErrorTimer=""
			aiCurrentSpeed="AI_BufferFFU3CurrentSpeed"
			aiVoltage=""
			aiCurrent=""
			aiStatus=""
	   
			aoSwitch="AO_BufferFFU3Switch"
			aoSetSpeed="AO_BufferFFU3SV"
			aoReset=""
		
			doEnable=""
			doWriteCommand=""
		    scRootPath="FFU"
			aioType="float"
		/>
		<IoFFU id="BufferFFU4" display="BufferFFU4" schematicId="BufferFFU4" unit=""
			diDataWriteDone=""
			diDataWriteError=""
			diDataReadError=""
			aiGroupNumber=""
			aiAddressNumber=""
			aiSwitch="AI_BufferFFU4Status"
			aiSetSpeed=""
			aiMaxSpeed=""
			aiReset=""
			aiErrorTimer=""
			aiCurrentSpeed="AI_BufferFFU4CurrentSpeed"
			aiVoltage=""
			aiCurrent=""
			aiStatus=""
	   
			aoSwitch="AO_BufferFFU4Switch"
			aoSetSpeed="AO_BufferFFU4SV"
			aoReset=""
		
			doEnable=""
			doWriteCommand=""
		    scRootPath="FFU"
			aioType="float"
		/>
		<IoFFU id="BufferFFU5" display="BufferFFU5" schematicId="BufferFFU5" unit=""
			diDataWriteDone=""
			diDataWriteError=""
			diDataReadError=""
			aiGroupNumber=""
			aiAddressNumber=""
			aiSwitch="AI_BufferFFU5Status"
			aiSetSpeed=""
			aiMaxSpeed=""
			aiReset=""
			aiErrorTimer=""
			aiCurrentSpeed="AI_BufferFFU5CurrentSpeed"
			aiVoltage=""
			aiCurrent=""
			aiStatus=""
	   
			aoSwitch="AO_BufferFFU5Switch"
			aoSetSpeed="AO_BufferFFU5SV"
			aoReset=""
		
			doEnable=""
			doWriteCommand=""
		    scRootPath="FFU"
			aioType="float"
		/>
		<IoFFU id="BufferFFU6" display="BufferFFU6" schematicId="BufferFFU6" unit=""
			diDataWriteDone=""
			diDataWriteError=""
			diDataReadError=""
			aiGroupNumber=""
			aiAddressNumber=""
			aiSwitch="AI_BufferFFU6Status"
			aiSetSpeed=""
			aiMaxSpeed=""
			aiReset=""
			aiErrorTimer=""
			aiCurrentSpeed="AI_BufferFFU6CurrentSpeed"
			aiVoltage=""
			aiCurrent=""
			aiStatus=""
	   
			aoSwitch="AO_BufferFFU6Switch"
			aoSetSpeed="AO_BufferFFU6SV"
			aoReset=""
		
			doEnable=""
			doWriteCommand=""
		    scRootPath="FFU"
			aioType="float"
		/>
	</IoFFUs>
	<IoValves>
		<IoValve id="ValveAV1" diOpen="" doOpen="DO_ValveAV1" display="ValveAV1" schematicId="" isNc="true" ILKDi="DI_AV1ILK" isDefaultOpen="false"/>
		<IoValve id="ValveAV2" diOpen="" doOpen="DO_ValveAV2" display="ValveAV2" schematicId="" isNc="true" ILKDi="DI_AV2ILK"  isDefaultOpen="false"/>
		<IoValve id="ValveAV3" diOpen="" doOpen="DO_ValveAV3" display="ValveAV3" schematicId="" isNc="true" ILKDi="DI_AV3ILK"  isDefaultOpen="false"/>
		<IoValve id="ValveAV4" diOpen="" doOpen="DO_ValveAV4" display="ValveAV4" schematicId="" isNc="true" ILKDi="DI_AV4ILK"  isDefaultOpen="false"/>
		<IoValve id="ValveAV5" diOpen="" doOpen="DO_ValveAV5" display="ValveAV5" schematicId="" isNc="true" ILKDi="DI_AV5ILK"  isDefaultOpen="false"/>
		<IoValve id="ValveAV6" diOpen="" doOpen="DO_ValveAV6" display="ValveAV6" schematicId="" isNc="true" ILKDi="DI_AV6ILK"  isDefaultOpen="false"/>
		<IoValve id="ValveAV7" diOpen="" doOpen="DO_ValveAV7" display="ValveAV7" schematicId="" isNc="true" ILKDi="DI_AV7ILK"  isDefaultOpen="false"/>
		<IoValve id="ValveAV8" diOpen="" doOpen="DO_ValveAV8" display="ValveAV8" schematicId="" isNc="true" ILKDi="DI_AV8ILK"  isDefaultOpen="false"/>
		<IoValve id="ValveAV9" diOpen="" doOpen="DO_ValveAV9" display="ValveAV9" schematicId="" isNc="true" ILKDi="DI_AV9ILK"  isDefaultOpen="false"/>

		<IoValve id="ValveAV10" diOpen="" doOpen="DO_ValveAV10" display="ValveAV10" schematicId="" ILKDi="DI_AV10ILK" isNc="true" isDefaultOpen="false"/>
		<IoValve id="ValveAV11" diOpen="" doOpen="DO_ValveAV11" display="ValveAV11" schematicId="" ILKDi="DI_AV11ILK" isNc="true" isDefaultOpen="false"/>
		<IoValve id="ValveAV12" diOpen="" doOpen="DO_ValveAV12" display="ValveAV12" schematicId="" ILKDi="DI_AV12ILK" isNc="true" isDefaultOpen="false"/>
		<IoValve id="ValveAV13" diOpen="" doOpen="DO_ValveAV13" display="ValveAV13" schematicId="" ILKDi="DI_AV13ILK" isNc="true" isDefaultOpen="false"/>
		<IoValve id="ValveAV14" diOpen="" doOpen="DO_ValveAV14" display="ValveAV14" schematicId="" ILKDi="DI_AV14ILK" isNc="true" isDefaultOpen="false"/>
		<IoValve id="ValveAV15" diOpen="" doOpen="DO_ValveAV15" display="ValveAV15" schematicId="" ILKDi="DI_AV15ILK" isNc="true" isDefaultOpen="false"/>
		<IoValve id="ValveAV16" diOpen="" doOpen="DO_ValveAV16" display="ValveAV16" schematicId="" ILKDi="DI_AV16ILK" isNc="true" isDefaultOpen="false"/>
		<IoValve id="ValveAV17" diOpen="" doOpen="DO_ValveAV17" display="ValveAV17" schematicId="" ILKDi="DI_AV17ILK" isNc="true" isDefaultOpen="false"/>
		<IoValve id="ValveAV18" diOpen="" doOpen="DO_ValveAV18" display="ValveAV18" schematicId="" ILKDi="DI_AV18ILK" isNc="true" isDefaultOpen="false"/>
		<IoValve id="ValveAV19" diOpen="" doOpen="DO_ValveAV19" display="ValveAV19" schematicId="" ILKDi="DI_AV19ILK" isNc="true" isDefaultOpen="false"/>

		<IoValve id="ValveAV20" diOpen="" doOpen="DO_ValveAV20" display="ValveAV20" schematicId="" ILKDi="DI_AV20ILK"  isNc="true" isDefaultOpen="false"/>
		<IoValve id="ValveAV21" diOpen="" doOpen="DO_ValveAV21" display="ValveAV21" schematicId="" ILKDi="DI_AV21ILK"  isNc="true" isDefaultOpen="false"/>
		<IoValve id="ValveAV22" diOpen="" doOpen="DO_ValveAV22" display="ValveAV22" schematicId="" ILKDi="DI_AV22ILK"  isNc="true" isDefaultOpen="false"/>
		<IoValve id="ValveAV23" diOpen="" doOpen="DO_ValveAV23" display="ValveAV23" schematicId="" ILKDi="DI_AV23ILK"  isNc="true" isDefaultOpen="false"/>
		<IoValve id="ValveAV24" diOpen="" doOpen="DO_ValveAV24" display="ValveAV24" schematicId="" ILKDi="DI_AV24ILK"  isNc="true" isDefaultOpen="false"/>
		<IoValve id="ValveAV25" diOpen="" doOpen="DO_ValveAV25" display="ValveAV25" schematicId="" ILKDi="DI_AV25ILK"  isNc="true" isDefaultOpen="false"/>
		<IoValve id="ValveAV26" diOpen="" doOpen="DO_ValveAV26" display="ValveAV26" schematicId="" ILKDi="DI_AV26ILK"  isNc="true" isDefaultOpen="false"/>
		<IoValve id="ValveAV27" diOpen="" doOpen="DO_ValveAV27" display="ValveAV27" schematicId="" ILKDi="DI_AV27ILK"  isNc="true" isDefaultOpen="false"/>
		<IoValve id="ValveAV28" diOpen="" doOpen="DO_ValveAV28" display="ValveAV28" schematicId="" ILKDi="DI_AV28ILK"  isNc="true" isDefaultOpen="false"/>
		<IoValve id="ValveAV29" diOpen="" doOpen="DO_ValveAV29" display="ValveAV29" schematicId="" ILKDi="DI_AV29ILK"  isNc="true" isDefaultOpen="false"/>

		<IoValve id="ValveAV30" diOpen="" doOpen="DO_ValveAV30" display="ValveAV30" schematicId="" ILKDi="DI_AV30ILK" isNc="true" isDefaultOpen="false"/>
		<IoValve id="ValveAV31" diOpen="" doOpen="DO_ValveAV31" display="ValveAV31" schematicId="" ILKDi="DI_AV31ILK" isNc="true" isDefaultOpen="false"/>
		<IoValve id="ValveAV32" diOpen="" doOpen="DO_ValveAV32" display="ValveAV32" schematicId="" ILKDi="DI_AV32ILK" isNc="true" isDefaultOpen="false"/>
		<IoValve id="ValveAV33" diOpen="" doOpen="DO_ValveAV33" display="ValveAV33" schematicId="" ILKDi="DI_AV33ILK" isNc="true" isDefaultOpen="false"/>
		<IoValve id="ValveAV34" diOpen="" doOpen="DO_ValveAV34" display="ValveAV34" schematicId="" ILKDi="DI_AV34ILK" isNc="true" isDefaultOpen="false"/>
		<IoValve id="ValveAV35" diOpen="" doOpen="DO_ValveAV35" display="ValveAV35" schematicId="" ILKDi="DI_AV35ILK" isNc="true" isDefaultOpen="false"/>
		<IoValve id="ValveAV36" diOpen="" doOpen="DO_ValveAV36" display="ValveAV36" schematicId="" ILKDi="DI_AV36ILK" isNc="true" isDefaultOpen="false"/>
		<IoValve id="ValveAV37" diOpen="" doOpen="DO_ValveAV37" display="ValveAV37" schematicId="" ILKDi="DI_AV37ILK" isNc="true" isDefaultOpen="false"/>
		<IoValve id="ValveAV38" diOpen="" doOpen="DO_ValveAV38" display="ValveAV38" schematicId="" ILKDi="DI_AV38ILK" isNc="true" isDefaultOpen="false"/>
		<IoValve id="ValveAV39" diOpen="" doOpen="DO_ValveAV39" display="ValveAV39" schematicId="" ILKDi="DI_AV39ILK" isNc="true" isDefaultOpen="false"/>

		<IoValve id="ValveAV40" diOpen="" doOpen="DO_ValveAV40" display="ValveAV40" schematicId="" ILKDi="DI_AV40ILK" isNc="true" isDefaultOpen="false"/>
		<IoValve id="ValveAV41" diOpen="" doOpen="DO_ValveAV41" display="ValveAV41" schematicId="" ILKDi="DI_AV41ILK" isNc="true" isDefaultOpen="false"/>
		<IoValve id="ValveAV42" diOpen="" doOpen="DO_ValveAV42" display="ValveAV42" schematicId="" ILKDi="DI_AV42ILK" isNc="true" isDefaultOpen="false"/>
		<IoValve id="ValveAV43" diOpen="" doOpen="DO_ValveAV43" display="ValveAV43" schematicId="" ILKDi="DI_AV43ILK" isNc="true" isDefaultOpen="false"/>
		<IoValve id="ValveAV44" diOpen="" doOpen="DO_ValveAV44" display="ValveAV44" schematicId="" ILKDi="DI_AV44ILK" isNc="true" isDefaultOpen="false"/>
		<IoValve id="ValveAV45" diOpen="" doOpen="DO_ValveAV45" display="ValveAV45" schematicId="" ILKDi="DI_AV45ILK" isNc="true" isDefaultOpen="false"/>
		<IoValve id="ValveAV46" diOpen="" doOpen="DO_ValveAV46" display="ValveAV46" schematicId="" ILKDi="DI_AV46ILK" isNc="true" isDefaultOpen="false"/>
		<IoValve id="ValveAV47" diOpen="" doOpen="DO_ValveAV47" display="ValveAV47" schematicId="" ILKDi="DI_AV47ILK" isNc="true" isDefaultOpen="false"/>
		<IoValve id="ValveAV48" diOpen="" doOpen="DO_ValveAV48" display="ValveAV48" schematicId="" ILKDi="DI_AV48ILK" isNc="true" isDefaultOpen="false"/>
		<IoValve id="ValveAV49" diOpen="" doOpen="DO_ValveAV49" display="ValveAV49" schematicId="" ILKDi="DI_AV49ILK" isNc="true" isDefaultOpen="false"/>

		<IoValve id="ValveAV50" diOpen="" doOpen="DO_ValveAV50" display="ValveAV50" schematicId="" ILKDi="DI_AV50ILK" isNc="true" isDefaultOpen="false"/>
		<IoValve id="ValveAV51" diOpen="" doOpen="DO_ValveAV51" display="ValveAV51" schematicId="" ILKDi="DI_AV51ILK" isNc="true" isDefaultOpen="false"/>
		<IoValve id="ValveAV52" diOpen="" doOpen="DO_ValveAV52" display="ValveAV52" schematicId="" ILKDi="DI_AV52ILK" isNc="true" isDefaultOpen="false"/>
		<IoValve id="ValveAV53" diOpen="" doOpen="DO_ValveAV53" display="ValveAV53" schematicId="" ILKDi="DI_AV53ILK" isNc="true" isDefaultOpen="false"/>
		<IoValve id="ValveAV54" diOpen="" doOpen="DO_ValveAV54" display="ValveAV54" schematicId="" ILKDi="DI_AV54ILK" isNc="true" isDefaultOpen="false"/>
		<IoValve id="ValveAV55" diOpen="" doOpen="DO_ValveAV55" display="ValveAV55" schematicId="" ILKDi="DI_AV55ILK" isNc="true" isDefaultOpen="false"/>
		<IoValve id="ValveAV56" diOpen="" doOpen="DO_ValveAV56" display="ValveAV56" schematicId="" ILKDi="DI_AV56ILK" isNc="true" isDefaultOpen="false"/>
		<IoValve id="ValveAV57" diOpen="" doOpen="DO_ValveAV57" display="ValveAV57" schematicId="" ILKDi="DI_AV57ILK" isNc="true" isDefaultOpen="false"/>
		<IoValve id="ValveAV58" diOpen="DI_AV58Status" doOpen="DO_ValveAV58" display="ValveAV58" schematicId="" ILKDi="DI_AV58ILK" isNc="true" isDefaultOpen="false"/>
		<IoValve id="ValveAV59" diOpen="DI_AV59Status" doOpen="DO_ValveAV59" display="ValveAV59" schematicId="" ILKDi="DI_AV59ILK" isNc="true" isDefaultOpen="false"/>

		<IoValve id="ValveAV60" diOpen="DI_AV60ILK" doOpen="" display="ValveAV60" schematicId="" ILKDi="DI_AV60ILK" isNc="true" diCloseSensor="" isDefaultOpen="false"/>
		<IoValve id="ValveAV61" diOpen="" doOpen="DO_ValveAV61" display="ValveAV61" schematicId="" ILKDi="DI_AV61ILK" isNc="true" isDefaultOpen="false"/>
		<IoValve id="ValveAV62" diOpen="" doOpen="DO_ValveAV62" display="ValveAV62" schematicId="" ILKDi="DI_AV62ILK" isNc="true" isDefaultOpen="false"/>

		<IoValve id="ValveAV63"  doOpen="DO_FIMS1N2PurgeValveOpen" doClose="DO_FIMS1N2PurgeValveClose" ILKDi="DI_AV63ILK" display="ValveAV63" schematicId="" isNc="true" isDefaultOpen="false"/>
		<IoValve id="ValveAV64"  doOpen="DO_FIMS2N2PurgeValveOpen" doClose="DO_FIMS2N2PurgeValveClose" ILKDi="DI_AV63ILK" display="ValveAV64" schematicId="" isNc="true" isDefaultOpen="false"/>

		<IoValve id="ValveAV65" doOpen="DO_FFUAirInValveOpen" doClose="DO_FFUAirInValveClose"  display="ValveAV65" schematicId="" ILKDi="DI_AV65ILK"  isNc="true" isDefaultOpen="false"/>
		<IoValve id="ValveAV66"  doOpen="DO_LAExhaustValveOpen" doClose="DO_LAExhaustValveClose" display="ValveAV66" ILKDi="DI_AV66ILK" schematicId="" isNc="true" isDefaultOpen="false"/>
		<IoValve id="ValveAV67" diOpen="" doOpen="DO_ValveAV67" display="ValveAV67" schematicId="" ILKDi="DI_AV67ILK" isNc="true" isDefaultOpen="false"/>
		<IoValve id="ValveAV68" diOpen="" doOpen="DO_ValveAV68" display="ValveAV68" schematicId="" ILKDi="DI_AV68ILK" isNc="true" isDefaultOpen="false"/>
		<IoValve id="ValveAV69" diOpen="" doOpen="DO_ValveAV69" display="ValveAV69" schematicId="" ILKDi="DI_AV69ILK" isNc="true" isDefaultOpen="false"/>

		<IoValve id="ValveAV70" diOpen="" doOpen="DO_ValveAV70" display="ValveAV70" schematicId="" ILKDi="DI_AV70ILK" isNc="true" isDefaultOpen="false"/>
		<IoValve id="ValveAV71" diOpen="" doOpen="DO_ValveAV71" display="ValveAV71" schematicId="" ILKDi="DI_AV71ILK" isNc="true" isDefaultOpen="false" IsILKNot="true"/>
		<IoValve id="ValveAV72" diOpen="" doOpen="DO_ValveAV72" display="ValveAV72" schematicId="" ILKDi="DI_AV72ILK" isNc="true" isDefaultOpen="false"/>
		<IoValve id="ValveAV73" diOpen="" doOpen="DO_ValveAV73" display="ValveAV73" schematicId="" ILKDi="DI_AV73ILK" isNc="true" isDefaultOpen="false"/>
		<IoValve id="ValveAV74" diOpen="DI_AV74ILK"   doOpen="" display="ValveAV74" schematicId="" ILKDi="DI_AV74ILK" isNc="true"   isDefaultOpen="false"/>
		<IoValve id="ValveAV75" diOpen="" doOpen="DO_ValveAV75" display="ValveAV75" schematicId="" ILKDi="DI_AV75ILK" isNc="true" isDefaultOpen="false"/>
		<IoValve id="ValveAV76" diOpen="" doOpen="DO_ValveAV76" display="ValveAV76" schematicId="" ILKDi="DI_AV76ILK" isNc="true" isDefaultOpen="false"/>
		<IoValve id="ValveAV77" diOpen="" doOpen="DO_ValveAV77" display="ValveAV77" schematicId="" ILKDi="DI_AV77ILK" isNc="true"   isDefaultOpen="false"/>
		<IoValve id="ValveAV78" diOpen="" doOpen="DO_ValveAV78" display="ValveAV78" schematicId="" ILKDi="DI_AV78ILK" isNc="true" isDefaultOpen="false"/>
		<IoValve id="ValveAV79" diOpen="" doOpen="DO_ValveAV79" display="ValveAV79" schematicId="" ILKDi="DI_AV79ILK" isNc="true" isDefaultOpen="false"/>

		<IoValve id="ValveAV80" diOpen="DI_AV80ILK" doOpen="" display="ValveAV80" schematicId="" ILKDi="DI_AV80ILK" isNc="true" isDefaultOpen="false"/>
		<IoValve id="ValveAV81" diOpen="DI_AV81ILK" doOpen="" display="ValveAV81" schematicId="" ILKDi="DI_AV81ILK" isNc="true" isDefaultOpen="false"/>
		<IoValve id="ValveAV82" diOpen="" doOpen="DO_ValveAV82" display="ValveAV82" schematicId="" ILKDi="DI_AV82ILK" isNc="true" isDefaultOpen="false"/>
		<IoValve id="ValveAV83" diOpen="" doOpen="DO_ValveAV83" display="ValveAV83" schematicId="" ILKDi="DI_AV83ILK" isNc="true" isDefaultOpen="false"/>
		<IoValve id="ValveAV84" diOpen="" doOpen="DO_ValveAV84" display="ValveAV84" schematicId="" ILKDi="DI_AV84ILK" isNc="true" isDefaultOpen="false"/>
		<IoValve id="ValveAV85" diOpen="" doOpen="DO_ValveAV85" display="ValveAV85" schematicId="" ILKDi="DI_AV85ILK" isNc="true" isDefaultOpen="false"/>
		<IoValve id="ValveAV86" diOpen="" doOpen="DO_ValveAV86" display="ValveAV86" schematicId="" ILKDi="DI_AV86ILK" isNc="true" isDefaultOpen="false"/>
		<IoValve id="ValveAV87" diOpen="" doOpen="DO_ValveAV87" display="ValveAV87" schematicId="" ILKDi="DI_AV87ILK" isNc="true" isDefaultOpen="false"/>
		<IoValve id="ValveAV88" diOpen="" doOpen="DO_ValveAV88" display="ValveAV88" schematicId="" ILKDi="DI_AV88ILK" isNc="true" isDefaultOpen="false"/>
		<IoValve id="ValveAV89" diOpen="" doOpen="DO_ValveAV89" display="ValveAV89" schematicId="" ILKDi="DI_AV89ILK" isNc="true" isDefaultOpen="false"/>

		<IoValve id="ValveAV90" diOpen="" doOpen="DO_ValveAV90" display="ValveAV90" schematicId="" ILKDi="DI_AV90ILK" isNc="true" isDefaultOpen="false"/>
		<IoValve id="ValveAV91" diOpen="" doOpen="DO_ValveAV91" display="ValveAV91" schematicId="" ILKDi="DI_AV91ILK" isNc="true" isDefaultOpen="false"/>
		<IoValve id="ValveAV92" diOpen="" doOpen="DO_ValveAV92" display="ValveAV92" schematicId="" ILKDi="DI_AV92ILK" isNc="true" isDefaultOpen="false"/>
		<IoValve id="ValveAV93" diOpen="" doOpen="DO_ValveAV93" display="ValveAV93" schematicId="" ILKDi="DI_AV93ILK" isNc="true" isDefaultOpen="false"/>
		<IoValve id="ValveAV94" diOpen="" doOpen="DO_ValveAV94" display="ValveAV94" schematicId="" ILKDi="DI_AV94ILK" isNc="true" isDefaultOpen="false"/>
		<IoValve id="ValveAV95" diOpen="" doOpen="DO_ValveAV95" display="ValveAV95" schematicId="" ILKDi="DI_AV95ILK" isNc="true" isDefaultOpen="false"/>
		<IoValve id="ValveAV96" diOpen="" doOpen="DO_ValveAV96" display="ValveAV96" schematicId="" ILKDi="DI_AV96ILK" isNc="true" isDefaultOpen="false"/>
		<IoValve id="ValveAV97" diOpen="" doOpen="DO_ValveAV97" display="ValveAV97" schematicId="" ILKDi="DI_AV97ILK" isNc="true" isDefaultOpen="false"/>
		<IoValve id="ValveAV98" diOpen="" doOpen="DO_ValveAV98" display="ValveAV98" schematicId="" ILKDi="DI_AV98ILK" isNc="true" isDefaultOpen="false"/>
		<IoValve id="ValveAV99" diOpen="" doOpen="DO_ValveAV99" display="ValveAV99" schematicId="" ILKDi="DI_AV99ILK" isNc="true" isDefaultOpen="false"/>

		<IoValve id="ValveAV100" diOpen="" doOpen="DO_ValveAV100" display="ValveAV100" schematicId="" ILKDi="DI_AV100ILK" isNc="true" isDefaultOpen="false"/>
		<IoValve id="ValveAV101" diOpen="" doOpen="DO_ValveAV101" display="ValveAV101" schematicId="" ILKDi="DI_AV101ILK" isNc="true" isDefaultOpen="false"/>
		<IoValve id="ValveAV102" diOpen="" doOpen="DO_ValveAV102" display="ValveAV102" schematicId="" ILKDi="DI_AV102ILK" isNc="true" isDefaultOpen="false"/>
		<IoValve id="ValveAV103" diOpen="" doOpen="DO_ValveAV103" display="ValveAV103" schematicId="" ILKDi="DI_AV103ILK" isNc="true" isDefaultOpen="false"/>
		<IoValve id="ValveAV104" diOpen="" doOpen="DO_ValveAV104" display="ValveAV104" schematicId="" ILKDi="DI_AV104ILK" isNc="true" isDefaultOpen="false"/>
		<IoValve id="ValveAV105" diOpen="" doOpen="DO_ValveAV105" display="ValveAV105" schematicId="" ILKDi="DI_AV105ILK" isNc="true" isDefaultOpen="false"/>
		<IoValve id="ValveAV106" diOpen="" doOpen="DO_ValveAV106" display="ValveAV106" schematicId="" ILKDi="DI_AV106ILK" isNc="true" isDefaultOpen="false"/>
		<IoValve id="ValveAV107" diOpen="" doOpen="DO_ValveAV107" display="ValveAV107" schematicId="" ILKDi="DI_AV107ILK" isNc="true" isDefaultOpen="false"/>
		<IoValve id="ValveAV108" diOpen="" doOpen="DO_ValveAV108" display="ValveAV108" schematicId="" ILKDi="DI_AV108ILK" isNc="true" isDefaultOpen="false"/>
		<IoValve id="ValveAV109" diOpen="" doOpen="DO_ValveAV109" display="ValveAV109" schematicId="" ILKDi="DI_AV109ILK" isNc="true" isDefaultOpen="false"/>

		<IoValve id="ValveAV110" diOpen="" doOpen="DO_ValveAV110" display="ValveAV110" schematicId="" ILKDi="DI_AV110ILK" isNc="true" isDefaultOpen="false"/>
		<IoValve id="ValveAV111" diOpen="" doOpen="DO_ValveAV111" display="ValveAV111" schematicId="" ILKDi="DI_AV111ILK" isNc="true" isDefaultOpen="false"/>
		<IoValve id="ValveAV112" diOpen="" doOpen="DO_ValveAV112" display="ValveAV112" schematicId="" ILKDi="DI_AV112ILK" isNc="true" isDefaultOpen="false"/>
		<IoValve id="ValveAV113" diOpen="" doOpen="DO_ValveAV113" display="ValveAV113" schematicId="" ILKDi="DI_AV113ILK" isNc="true" isDefaultOpen="false"/>
		<IoValve id="ValveAV114" diOpen="" doOpen="DO_ValveAV114" display="ValveAV114" schematicId="" ILKDi="DI_AV114ILK" isNc="true" isDefaultOpen="false"/>
		<IoValve id="ValveAV115" diOpen="" doOpen="DO_ValveAV115" display="ValveAV115" schematicId="" ILKDi="DI_AV115ILK" isNc="true" isDefaultOpen="false"/>
		<IoValve id="ValveAV116" diOpen="" doOpen="DO_ValveAV116" display="ValveAV116" schematicId="" ILKDi="DI_AV116ILK" isNc="true" isDefaultOpen="false"/>
		<IoValve id="ValveAV117" diOpen="" doOpen="DO_ValveAV117" display="ValveAV117" schematicId="" ILKDi="DI_AV117ILK" isNc="true" isDefaultOpen="false"/>
		<IoValve id="ValveAV118" diOpen="" doOpen="DO_ValveAV118" display="ValveAV118" schematicId="" ILKDi="DI_AV118ILK" isNc="true" isDefaultOpen="false"/>
		<IoValve id="ValveAV119" diOpen="" doOpen="DO_ValveAV119" display="ValveAV119" schematicId="" ILKDi="DI_AV119ILK" isNc="true" isDefaultOpen="false"/>

		<IoValve id="ValveAV120" diOpen="" doOpen="DO_ValveAV120" display="ValveAV120" schematicId="" ILKDi="DI_AV120ILK" isNc="true" isDefaultOpen="false"/>
		<IoValve id="ValveAV121" diOpen="" doOpen="DO_ValveAV121" display="ValveAV121" schematicId="" ILKDi="DI_AV121ILK" isNc="true" isDefaultOpen="false"/>
		<IoValve id="ValveAV122" diOpen="" doOpen="DO_ValveAV122" display="ValveAV122" schematicId="" ILKDi="DI_AV122ILK" isNc="true" isDefaultOpen="false"/>
		<IoValve id="ValveAV123" diOpen="" doOpen="DO_ValveAV123" display="ValveAV123" schematicId="" ILKDi="DI_AV123ILK" isNc="true" isDefaultOpen="false"/>
		<IoValve id="ValveAV124" diOpen="" doOpen="DO_ValveAV124" display="ValveAV124" schematicId="" ILKDi="DI_AV124ILK" isNc="true" isDefaultOpen="false"/>
		<IoValve id="ValveAV125" diOpen="" doOpen="DO_ValveAV125" display="ValveAV125" schematicId="" ILKDi="DI_AV125ILK" isNc="true" isDefaultOpen="false"/>
		<IoValve id="ValveAV126" diOpen="" doOpen="DO_ValveAV126" display="ValveAV126" schematicId="" ILKDi="DI_AV126ILK" isNc="true" isDefaultOpen="false"/>
		<IoValve id="ValveAV127" diOpen="" doOpen="DO_ValveAV127" display="ValveAV127" schematicId="" ILKDi="DI_AV127ILK" isNc="true" isDefaultOpen="false"/>
		<IoValve id="ValveAV128" diOpen="" doOpen="DO_ValveAV128" display="ValveAV128" schematicId="" ILKDi="DI_AV128ILK" isNc="true" isDefaultOpen="false"/>
		<IoValve id="ValveAV129" diOpen="" doOpen="DO_ValveAV129" display="ValveAV129" schematicId="" ILKDi="DI_AV129ILK" isNc="true" isDefaultOpen="false"/>

		<IoValve id="ValveAV130" diOpen="" doOpen="DO_ValveAV130" display="ValveAV130" schematicId="" ILKDi="DI_AV130ILK" isNc="true" isDefaultOpen="false"/>
		<IoValve id="ValveAV131" diOpen="DI_AV131ILK" doOpen="" display="ValveAV131" schematicId="" ILKDi="DI_AV131ILK" isNc="true" isDefaultOpen="false"/>
		<IoValve id="ValveAV132" diOpen="" doOpen="DO_ValveAV132" display="ValveAV132" schematicId="" ILKDi="DI_AV132ILK" isNc="true" isDefaultOpen="false"/>
		<IoValve id="ValveAV133" diOpen="" doOpen="DO_ValveAV133" display="ValveAV133" schematicId="" ILKDi="DI_AV133ILK" isNc="true" isDefaultOpen="false"/>
		<IoValve id="ValveAV134" diOpen="DI_AV134ILK" doOpen="" display="ValveAV134" schematicId="" ILKDi="DI_AV134ILK" isNc="true" isDefaultOpen="false"/>
		<IoValve id="ValveAV135" diOpen="" doOpen="DO_ValveAV135" display="ValveAV135" schematicId="" ILKDi="DI_AV135ILK" isNc="true" isDefaultOpen="false"/>
		<IoValve id="ValveAV136" diOpen="" doOpen="DO_ValveAV136" display="ValveAV136" schematicId="" ILKDi="DI_AV136ILK" isNc="true" isDefaultOpen="false"/>


		<IoValve id="ValveAV201" doOpen="DO_CommonBoxPressureRegulatingCylinderValveOpen" doClose="DO_CommonBoxPressureRegulatingCylinderValveClose" display="AV201" schematicId="" isNc="true" isDefaultOpen="false"/>
		<IoValve id="ValveAV202" doOpen="DO_LABacksideDoorCylinderControlValveOpen" doClose="DO_LABacksideDoorCylinderControlValveClose" display="AV202" schematicId="" isNc="true" isDefaultOpen="false"/>
		<IoValve id="ValveLAExhaustDamper" doOpen="DO_LAExhaustValveOpen" doClose="DO_LAExhaustValveClose" display="" schematicId="" isNc="true" isDefaultOpen="false"/>

		<IoValve id="ValveFIMS1N2Purge"  diOpen="DI_AV63Status" doOpen="DO_FIMS1N2PurgeValveOpen" doClose="DO_FIMS1N2PurgeValveClose" display="ValveAV63" schematicId="" isNc="true" isDefaultOpen="false"/>
		<IoValve id="ValveFIMS2N2Purge"  diOpen="DI_AV64Status" doOpen="DO_FIMS2N2PurgeValveOpen" doClose="DO_FIMS2N2PurgeValveClose" display="ValveAV64" schematicId="" isNc="true" isDefaultOpen="false"/>
		<IoValve id="ValveSV61" doOpen="DO_SV61Open" doClose="" display="" schematicId="" isNc="true" isDefaultOpen="false"/>
		<IoValve id="ValveSV62" doOpen="DO_SV62Open" doClose="" display="" schematicId="" isNc="true" isDefaultOpen="false"/>
		<IoValve id="ValveSV63" doOpen="DO_SV63Open" doClose="" display="" schematicId="" isNc="true" isDefaultOpen="false"/>
		<IoValve id="ValveSV64" doOpen="DO_SV64Open" doClose="" display="" schematicId="" isNc="true" isDefaultOpen="false"/>

		<IoValve id="ValveSV227" doOpen="DO_circulationfanisturnedopen" doClose="DO_circulationfanisturnedClose" display="" schematicId="" isNc="true" isDefaultOpen="false"/>


		<IoValve id="ValveBlowerPowerOn" doOpen="DO_BlowerPowerOn" doClose="" display="Blower Power On" schematicId="" isNc="true" isDefaultOpen="false"/>




		<IoValve id="AUCPump" doOpen="DO_VaccumPumpAUCOn" doClose="" display="AUCPump" schematicId="" isNc="true" isDefaultOpen="false"/>
		<IoValve id="BothPump1" doOpen="DO_VaccumPumpBothOn"  diOpenSensor="DI_VaccumPumpBothOn" doClose="" display="BothPump1" schematicId="" isNc="true" isDefaultOpen="false"/>
		<IoValve id="BothPump2" doOpen="DO_Vaccum2PumpBothOn"  diOpenSensor="DI_Vaccum2PumpBothOn" doClose="" display="BothPump2" schematicId="" isNc="true" isDefaultOpen="false"/>
		<IoValve id="AGVPump" doOpen="DO_VaccumPumpAGVOpen" doClose="" display="AGVPump" schematicId="" isNc="true" isDefaultOpen="false"/>
		<IoValve id="AGV2Pump" doOpen="DO_Vaccum2PumpAGVOpen" doClose="" display="AGV2Pump" schematicId="" isNc="true" isDefaultOpen="false"/>
		<IoValve id="HMNT" doOpen="DO_HMNT" doClose="" display="HMNT" schematicId="" isNc="true" isDefaultOpen="false"/>
		<IoValve id="CMNT" doOpen="DO_CMNT" doClose="" display="CMNT" schematicId="" isNc="true" isDefaultOpen="false"/>
		<IoValve id="HREF" doOpen="DO_HREF" doClose="" display="HREF" schematicId="" isNc="true" isDefaultOpen="false"/>
		<IoValve id="CREF" doOpen="DO_CREF" doClose="" display="CREF" schematicId="" isNc="true" isDefaultOpen="false"/>
		<IoValve id="HZERO" doOpen="DO_HZERO" doClose="" display="HZERO" schematicId="" isNc="true" isDefaultOpen="false"/>
		<IoValve id="CZERO" doOpen="DO_CZERO" doClose="" display="CZERO" schematicId="" isNc="true" isDefaultOpen="false"/>
	</IoValves>

	<IoResets>
		<IoReset id="MINI8AlarmReset" display="" doReset="DO_MINI8AlarmReset" resetTime="1000" />
		<IoReset id="PLCCPUReset" display="" doReset="DO_PLCCPUReset" resetTime="1000" />
	</IoResets>

	<!--<IoPump3s classType="FurnaceRT.Devices.IoPump3" assembly="FurnaceRT">
		<IoPump3 id="AUCPump" display="" doPowerOn="DO_VaccumPumpAUCOn"  diPowerOn="DI_VaccumPumpBothOn" />
		<IoPump3 id="BothPump" display="" doPowerOn="DO_VaccumPumpBothOn" diPowerOn="DI_VaccumPumpBothOn" />
		<IoPump3 id="AGVPump" display="" doPowerOn="DO_VaccumPumpAGVOpen" diPowerOn="DI_VaccumPumpBothOn" />
		
	</IoPump3s>-->


</DeviceModelDefine>