123456789101112131415161718192021222324252627282930313233343536373839404142434445464748495051525354555657585960616263646566676869707172737475767778798081828384858687888990919293949596979899100101102103104105106107108109110111112113114115116117118119120121122123124125126127128129130131132133134135136137138139140141142143144145146147148149150151152153154155156157158159160161162163164165166167168169170171172173174175176177178179180181182183184185186187188189190191192193194195196197198199200201202203204205206207208209210211212213214215216217218219220221222223224225226227228229230231232233234235236237238239240241242243244245246247248249250251252253254255256257258259260261262263264265266267268269270271272273274275276277278279280281282283284285286287288289290291292293294295296297298299300301302303304305306307308309310311312313314315316317318319320321322323324325326327328329330331332333334335336337338339340341342343344345346347348349350351352353354355356357358359360361362363364365366367368369370371372373374375376377378379380381382383384385386387388389390391392393394395396397398399400401402403404405406407408409410411412413414415416417418419420421422423424425426427428429430 |
- using Aitex.Core.RT.Routine;
- using MECF.Framework.Common.Equipment;
- using System;
- using Aitex.Core.RT.SCCore;
- using FurnaceRT.Equipments.PMs.Routines;
- using System.Collections.Generic;
- using FurnaceRT.Equipments.Systems;
- using Aitex.Core.Util;
- using MECF.Framework.Common.SubstrateTrackings;
- using System.Linq;
- using Aitex.Core.Common;
- using MECF.Framework.Common.CommonData.EnumData;
- using MECF.Framework.Common.DataCenter;
- using MECF.Framework.Common.Utilities;
- using Aitex.Core.RT.Log;
- namespace FurnaceRT.Equipments.PMs.RecipeExecutions
- {
- public class PreProcess : PMBaseRoutine, IRoutine
- {
- public enum Routine
- {
- ToReadyProcessState,
- Pump,
- PinDown,
- }
- private string _recipeName;
- private int _liftTimeout;
- private bool _isProcessRecipe;
- public PreProcess(ModuleName module, PMModule pm) : base(module, pm)
- {
- Module = module.ToString();
- Name = "PreProcess";
- }
- public void Init(string recipeName, bool isProcessRecipe = true)
- {
- _recipeName = recipeName;
- _isProcessRecipe = isProcessRecipe;
- }
- public override Result Start(params object[] objs)
- {
- RecipeHead recipeHead;
- List<RecipeStep> recipeSteps;
- Dictionary<int, List<RecipeStep>> abortRecipe;
- Dictionary<int, string> abortRecipeName;
- Dictionary<int, List<RecipeStep>> subRecipe;
- Dictionary<int, string> subRecipeName;
- string reason = string.Empty;
- if (_isProcessRecipe)
- {
- if (!RecipeParser.Parse(_recipeName, Module, out recipeHead, out recipeSteps, out reason, "Process"))
- {
- PMModule.PreprocessStartFailedWarning.Set($"Load process recipe {_recipeName} failed, {reason}");
- return Result.FAIL;
- }
- #region MyRegion
- var isScheduleMaintenance = SC.ContainsItem("System.EnableScheduleMaintenance") && SC.GetValue<bool>("System.EnableScheduleMaintenance");
- if (isScheduleMaintenance)
- {
- var pm = (Singleton<EquipmentManager>.Instance.Modules[ModuleName.PM1] as PMModule);
- pm.GetAllDBRecord();
- var wafers = WaferManager.Instance.GetWafers(ModuleName.PM1);
- if (wafers != null && wafers.Count() > 0)
- {
- foreach (var wafer in wafers)
- {
- if (wafer == null || wafer.IsEmpty || (wafer.WaferType != WaferType.SD && wafer.WaferType != WaferType.ED))
- continue;
- #region New
- if (isScheduleMaintenance)
- {
- #region SD Dummy 时间/次数/膜厚限制
- if (wafer.WaferType == WaferType.SD)
- {
- var maintenanceItemCarrierUseFreq = ScheduleMaintenanceDataManager.Instance.GetItem(MaintenanceItemEnum.SDCarrierUseFreq.ToString());
- var maintenanceItemWaferThickness = ScheduleMaintenanceDataManager.Instance.GetItem(MaintenanceItemEnum.SDWaferThickness.ToString());
- var maintenanceItemWaferUserTime = ScheduleMaintenanceDataManager.Instance.GetItem(MaintenanceItemEnum.SDWaferUserTime.ToString());
- if (maintenanceItemCarrierUseFreq.StartValue > 0 && wafer.UseCount > maintenanceItemCarrierUseFreq.StartValue && wafer.UseCount < maintenanceItemCarrierUseFreq.LimitValue)
- {
- if (maintenanceItemCarrierUseFreq.MaintenanceProcessing == MaintenanceProcessingCommandEnum.AlarmReport.ToString() ||
- maintenanceItemCarrierUseFreq.MaintenanceProcessing == MaintenanceProcessingCommandEnum.JobAutoStart.ToString())
- {
- var msg = pm.GetAlarmWarningMsg(maintenanceItemCarrierUseFreq, false, wafer.UseCount.ToString(), maintenanceItemCarrierUseFreq.StartValue.ToString(), maintenanceItemCarrierUseFreq.LimitValue.ToString());
- Singleton<EquipmentManager>.Instance.SDWaferTypeUseCountWarning.Set(msg);
- }
- }
- if (maintenanceItemWaferUserTime.StartValue > 0 && wafer.UseTime > maintenanceItemWaferUserTime.StartValue && wafer.UseTime < maintenanceItemWaferUserTime.LimitValue)
- {
- if (maintenanceItemWaferUserTime.MaintenanceProcessing == MaintenanceProcessingCommandEnum.AlarmReport.ToString() ||
- maintenanceItemWaferUserTime.MaintenanceProcessing == MaintenanceProcessingCommandEnum.JobAutoStart.ToString())
- {
- var currentValue = DateTimeUtil.SecondToHHmmss(maintenanceItemWaferUserTime.CurrentValue.ToString());
- var minValue = DateTimeUtil.SecondToHHmmss(maintenanceItemWaferUserTime.StartValue.ToString());
- var maxValue = DateTimeUtil.SecondToHHmmss(maintenanceItemWaferUserTime.LimitValue.ToString());
- var msg = pm.GetAlarmWarningMsg(maintenanceItemWaferUserTime, true, currentValue, minValue, maxValue);
- Singleton<EquipmentManager>.Instance.SDWaferTypeUseTimeWarning.Set(msg);
- }
- }
- if (maintenanceItemWaferThickness.StartValue > 0 && wafer.UseThick > maintenanceItemWaferThickness.StartValue && wafer.UseThick < maintenanceItemWaferThickness.LimitValue)
- {
- if (maintenanceItemWaferThickness.MaintenanceProcessing == MaintenanceProcessingCommandEnum.AlarmReport.ToString() ||
- maintenanceItemWaferThickness.MaintenanceProcessing == MaintenanceProcessingCommandEnum.JobAutoStart.ToString())
- {
- var msg = pm.GetAlarmWarningMsg(maintenanceItemWaferThickness, false, wafer.UseThick.ToString(), maintenanceItemWaferThickness.StartValue.ToString(), maintenanceItemWaferThickness.LimitValue.ToString());
- Singleton<EquipmentManager>.Instance.SDWaferTypeThicknessWarning.Set(msg);
- }
- }
- if (maintenanceItemCarrierUseFreq.StartValue > 0 && wafer.UseCount >= maintenanceItemCarrierUseFreq.LimitValue)
- {
- if (maintenanceItemCarrierUseFreq.MaintenanceProcessing == MaintenanceProcessingCommandEnum.AlarmReport.ToString())
- {
- var msg = pm.GetAlarmWarningMsg(maintenanceItemCarrierUseFreq, false, wafer.UseCount.ToString(), maintenanceItemCarrierUseFreq.StartValue.ToString(), maintenanceItemCarrierUseFreq.LimitValue.ToString());
- Singleton<EquipmentManager>.Instance.SDWaferTypeUseCountAlarm.Set(msg);
- return Result.FAIL;
- }
- else if (maintenanceItemCarrierUseFreq.MaintenanceProcessing == MaintenanceProcessingCommandEnum.JobAutoStart.ToString())
- {
- var msg = pm.GetAlarmWarningMsg(maintenanceItemCarrierUseFreq, true);
- if (string.IsNullOrEmpty(maintenanceItemCarrierUseFreq.AssociationProcessRecipeName))
- {
- Singleton<EquipmentManager>.Instance.SDWaferTypeUseCountAlarm.Set(msg);
- return Result.FAIL;
- }
- Singleton<EquipmentManager>.Instance.SDWaferTypeUseCountAlarm.Set(msg);
- pm.TriggerJobAutoStart(maintenanceItemCarrierUseFreq.AssociationProcessRecipeName, RecipeExecEntryEnum.SDWaferRangeTrigger);
- LOG.Info($"{msg} Trigger {maintenanceItemCarrierUseFreq.AssociationProcessRecipeName}");
- return Result.FAIL;
- }
- }
- if (maintenanceItemWaferUserTime.StartValue > 0 && wafer.UseTime >= maintenanceItemWaferUserTime.LimitValue)
- {
- var currentValue = DateTimeUtil.SecondToHHmmss(maintenanceItemWaferUserTime.CurrentValue.ToString());
- var minValue = DateTimeUtil.SecondToHHmmss(maintenanceItemWaferUserTime.StartValue.ToString());
- var maxValue = DateTimeUtil.SecondToHHmmss(maintenanceItemWaferUserTime.LimitValue.ToString());
- var msg = pm.GetAlarmWarningMsg(maintenanceItemWaferUserTime, true, currentValue, minValue, maxValue);
- if (maintenanceItemWaferUserTime.MaintenanceProcessing == MaintenanceProcessingCommandEnum.AlarmReport.ToString())
- {
- Singleton<EquipmentManager>.Instance.SDWaferTypeUseTimeAlarm.Set(msg);
- return Result.FAIL;
- }
- else if (maintenanceItemWaferUserTime.MaintenanceProcessing == MaintenanceProcessingCommandEnum.JobAutoStart.ToString())
- {
- if (string.IsNullOrEmpty(maintenanceItemWaferUserTime.AssociationProcessRecipeName))
- {
- Singleton<EquipmentManager>.Instance.SDWaferTypeUseTimeAlarm.Set(msg);
- return Result.FAIL;
- }
- Singleton<EquipmentManager>.Instance.SDWaferTypeUseTimeAlarm.Set(msg);
- pm.TriggerJobAutoStart(maintenanceItemWaferUserTime.AssociationProcessRecipeName, RecipeExecEntryEnum.SDWaferRangeTrigger);
- LOG.Info($"{msg} Trigger {maintenanceItemWaferUserTime.AssociationProcessRecipeName}");
- return Result.FAIL;
- }
- }
- if (maintenanceItemWaferThickness.StartValue > 0 && wafer.UseThick >= maintenanceItemWaferThickness.LimitValue)
- {
- if (maintenanceItemWaferThickness.MaintenanceProcessing == MaintenanceProcessingCommandEnum.AlarmReport.ToString())
- {
- var msg = pm.GetAlarmWarningMsg(maintenanceItemWaferThickness, false, wafer.UseThick.ToString(), maintenanceItemWaferThickness.StartValue.ToString(), maintenanceItemWaferThickness.LimitValue.ToString());
- Singleton<EquipmentManager>.Instance.SDWaferTypeThicknessAlarm.Set(msg);
- return Result.FAIL;
- }
- else if (maintenanceItemWaferThickness.MaintenanceProcessing == MaintenanceProcessingCommandEnum.JobAutoStart.ToString())
- {
- var msg = pm.GetAlarmWarningMsg(maintenanceItemWaferThickness, true);
- if (string.IsNullOrEmpty(maintenanceItemWaferThickness.AssociationProcessRecipeName))
- {
- Singleton<EquipmentManager>.Instance.SDWaferTypeThicknessAlarm.Set(msg);
- return Result.FAIL;
- }
- Singleton<EquipmentManager>.Instance.SDWaferTypeThicknessAlarm.Set(msg);
- pm.TriggerJobAutoStart(maintenanceItemWaferThickness.AssociationProcessRecipeName, RecipeExecEntryEnum.SDWaferRangeTrigger);
- LOG.Info($"{msg} Trigger {maintenanceItemWaferThickness.AssociationProcessRecipeName}");
- return Result.FAIL;
- }
- }
- }
- #endregion
- #region ED
- if (wafer.WaferType == WaferType.ED)
- {
- var maintenanceItemCarrierUseFreq = ScheduleMaintenanceDataManager.Instance.GetItem(MaintenanceItemEnum.FDCarrierUseFreq.ToString());
- var maintenanceItemWaferThickness = ScheduleMaintenanceDataManager.Instance.GetItem(MaintenanceItemEnum.FDWaferThickness.ToString());
- var maintenanceItemWaferUserTime = ScheduleMaintenanceDataManager.Instance.GetItem(MaintenanceItemEnum.FDWaferUserTime.ToString());
- if (maintenanceItemCarrierUseFreq.StartValue > 0 && wafer.UseCount > maintenanceItemCarrierUseFreq.StartValue && wafer.UseCount < maintenanceItemCarrierUseFreq.LimitValue)
- {
- if (maintenanceItemCarrierUseFreq.MaintenanceProcessing == MaintenanceProcessingCommandEnum.AlarmReport.ToString() ||
- maintenanceItemCarrierUseFreq.MaintenanceProcessing == MaintenanceProcessingCommandEnum.JobAutoStart.ToString())
- {
- var msg = pm.GetAlarmWarningMsg(maintenanceItemCarrierUseFreq, false, wafer.UseCount.ToString(), maintenanceItemCarrierUseFreq.StartValue.ToString(), maintenanceItemCarrierUseFreq.LimitValue.ToString());
- Singleton<EquipmentManager>.Instance.FDWaferTypeUseCountWarning.Set(msg);
- }
- }
- if (maintenanceItemWaferUserTime.StartValue > 0 && wafer.UseTime > maintenanceItemWaferUserTime.StartValue && wafer.UseTime < maintenanceItemWaferUserTime.LimitValue)
- {
- if (maintenanceItemWaferUserTime.MaintenanceProcessing == MaintenanceProcessingCommandEnum.AlarmReport.ToString() ||
- maintenanceItemWaferUserTime.MaintenanceProcessing == MaintenanceProcessingCommandEnum.JobAutoStart.ToString())
- {
- var currentValue = DateTimeUtil.SecondToHHmmss(maintenanceItemWaferUserTime.CurrentValue.ToString());
- var minValue = DateTimeUtil.SecondToHHmmss(maintenanceItemWaferUserTime.StartValue.ToString());
- var maxValue = DateTimeUtil.SecondToHHmmss(maintenanceItemWaferUserTime.LimitValue.ToString());
- var msg = pm.GetAlarmWarningMsg(maintenanceItemWaferUserTime, true, currentValue, minValue, maxValue);
- Singleton<EquipmentManager>.Instance.FDWaferTypeUseTimeWarning.Set(msg);
- }
- }
- if (maintenanceItemWaferThickness.StartValue > 0 && wafer.UseThick > maintenanceItemWaferThickness.StartValue && wafer.UseThick < maintenanceItemWaferThickness.LimitValue)
- {
- if (maintenanceItemWaferThickness.MaintenanceProcessing == MaintenanceProcessingCommandEnum.AlarmReport.ToString() ||
- maintenanceItemWaferThickness.MaintenanceProcessing == MaintenanceProcessingCommandEnum.JobAutoStart.ToString())
- {
- var msg = pm.GetAlarmWarningMsg(maintenanceItemWaferThickness, false, wafer.UseThick.ToString(), maintenanceItemWaferThickness.StartValue.ToString(), maintenanceItemWaferThickness.LimitValue.ToString());
- Singleton<EquipmentManager>.Instance.FDWaferTypeThicknessWarning.Set(msg);
- }
- }
- if (maintenanceItemCarrierUseFreq.StartValue > 0 && wafer.UseCount >= maintenanceItemCarrierUseFreq.LimitValue)
- {
- if (maintenanceItemCarrierUseFreq.MaintenanceProcessing == MaintenanceProcessingCommandEnum.AlarmReport.ToString())
- {
- var msg = pm.GetAlarmWarningMsg(maintenanceItemCarrierUseFreq, false, wafer.UseCount.ToString(), maintenanceItemCarrierUseFreq.StartValue.ToString(), maintenanceItemCarrierUseFreq.LimitValue.ToString());
- Singleton<EquipmentManager>.Instance.FDWaferTypeUseCountAlarm.Set(msg);
- return Result.FAIL;
- }
- else if (maintenanceItemCarrierUseFreq.MaintenanceProcessing == MaintenanceProcessingCommandEnum.JobAutoStart.ToString())
- {
- var msg = pm.GetAlarmWarningMsg(maintenanceItemCarrierUseFreq);
- if (string.IsNullOrEmpty(maintenanceItemCarrierUseFreq.AssociationProcessRecipeName))
- {
- Singleton<EquipmentManager>.Instance.FDWaferTypeUseCountAlarm.Set(msg);
- return Result.FAIL;
- }
- Singleton<EquipmentManager>.Instance.FDWaferTypeUseCountAlarm.Set(msg);
- pm.TriggerJobAutoStart(maintenanceItemCarrierUseFreq.AssociationProcessRecipeName, RecipeExecEntryEnum.EDWaferRangeTrigger);
- LOG.Info($"{msg} Trigger {maintenanceItemCarrierUseFreq.AssociationProcessRecipeName}");
- return Result.FAIL;
- }
- }
- if (maintenanceItemWaferUserTime.StartValue > 0 && wafer.UseTime >= maintenanceItemWaferUserTime.LimitValue)
- {
- var currentValue = DateTimeUtil.SecondToHHmmss(maintenanceItemWaferUserTime.CurrentValue.ToString());
- var minValue = DateTimeUtil.SecondToHHmmss(maintenanceItemWaferUserTime.StartValue.ToString());
- var maxValue = DateTimeUtil.SecondToHHmmss(maintenanceItemWaferUserTime.LimitValue.ToString());
- var msg = pm.GetAlarmWarningMsg(maintenanceItemWaferUserTime, true, currentValue, minValue, maxValue);
- if (maintenanceItemWaferUserTime.MaintenanceProcessing == MaintenanceProcessingCommandEnum.AlarmReport.ToString())
- {
- Singleton<EquipmentManager>.Instance.FDWaferTypeUseTimeAlarm.Set(msg);
- return Result.FAIL;
- }
- else if (maintenanceItemWaferUserTime.MaintenanceProcessing == MaintenanceProcessingCommandEnum.JobAutoStart.ToString())
- {
- if (string.IsNullOrEmpty(maintenanceItemWaferUserTime.AssociationProcessRecipeName))
- {
- Singleton<EquipmentManager>.Instance.FDWaferTypeUseTimeAlarm.Set(msg);
- return Result.FAIL;
- }
- Singleton<EquipmentManager>.Instance.FDWaferTypeUseTimeAlarm.Set(msg);
- pm.TriggerJobAutoStart(maintenanceItemWaferUserTime.AssociationProcessRecipeName, RecipeExecEntryEnum.EDWaferRangeTrigger);
- LOG.Info($"{msg} Trigger {maintenanceItemWaferUserTime.AssociationProcessRecipeName}");
- return Result.FAIL;
- }
- }
- if (maintenanceItemWaferThickness.StartValue > 0 && wafer.UseThick >= maintenanceItemWaferThickness.LimitValue)
- {
- if (maintenanceItemWaferThickness.MaintenanceProcessing == MaintenanceProcessingCommandEnum.AlarmReport.ToString())
- {
- var msg = pm.GetAlarmWarningMsg(maintenanceItemWaferThickness, false, wafer.UseThick.ToString(), maintenanceItemWaferThickness.StartValue.ToString(), maintenanceItemWaferThickness.LimitValue.ToString());
- Singleton<EquipmentManager>.Instance.FDWaferTypeThicknessAlarm.Set(msg);
- return Result.FAIL;
- }
- else if (maintenanceItemWaferThickness.MaintenanceProcessing == MaintenanceProcessingCommandEnum.JobAutoStart.ToString())
- {
- var msg = pm.GetAlarmWarningMsg(maintenanceItemWaferThickness, true);
- if (string.IsNullOrEmpty(maintenanceItemWaferThickness.AssociationProcessRecipeName))
- {
- Singleton<EquipmentManager>.Instance.FDWaferTypeThicknessAlarm.Set(msg);
- return Result.FAIL;
- }
- Singleton<EquipmentManager>.Instance.FDWaferTypeThicknessAlarm.Set(msg);
- pm.TriggerJobAutoStart(maintenanceItemWaferThickness.AssociationProcessRecipeName, RecipeExecEntryEnum.EDWaferRangeTrigger);
- LOG.Info($"{msg} Trigger {maintenanceItemWaferThickness.AssociationProcessRecipeName}");
- return Result.FAIL;
- }
- }
- }
- #endregion
- }
- #endregion
- }
- }
- pm.CheckBoatRecipeThicknessMoreThan( out var boatRecipeThicknessIsPause);
- if (boatRecipeThicknessIsPause)
- return Result.FAIL;
- pm.CheckRecipeThicknessMoreThan(_recipeName, out var isPause);
- if (isPause)
- return Result.FAIL;
- pm.CheckRecipeExecuteFreqMoreThan(_recipeName, out var isPause1);
- if (isPause1)
- return Result.FAIL;
- foreach (var item in recipeSteps)
- {
- pm.CheckRecipeStepFreqMoreThan(item.StepName, out var isPause2);
- if (isPause2)
- return Result.FAIL;
- pm.CheckRecipeStepTimeMoreThan(item.StepName, out var isPause3);
- if (isPause3)
- return Result.FAIL;
- pm.CheckRecipeStepGroupThicknessMoreThan(item.StepName, out var isPause4);
- if (isPause4)
- return Result.FAIL;
- }
- }
- #endregion
- PMModule.RecipeRunningInfo.MainRecipeName = _recipeName;
- PMModule.RecipeRunningInfo.Head = recipeHead;
- PMModule.RecipeRunningInfo.RecipeStepList = recipeSteps;
- PMModule.RecipeRunningInfo.ExecRecipeType = recipeSteps.Count > 0 ? recipeSteps[0].RecipeType : string.Empty;
- }
- Reset();
- Notify($"Start");
- return Result.RUN;
- }
- public override Result Monitor()
- {
- try
- {
- //ToReadyProcessState((int)Routine.ToReadyProcessState, PMModule, _liftTimeout);
- //ExecuteRoutine((int)Routine.Pump, _pumpRoutine);
- //MovePinDown((int)Routine.PinDown, PMModule, _liftTimeout);
- }
- catch (RoutineBreakException)
- {
- return Result.RUN;
- }
- catch (RoutineFaildException)
- {
- return Result.FAIL;
- }
- return Result.DONE;
- }
- public override void Abort()
- {
- }
- }
- }
|