PreProcess.cs 27 KB

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  1. using Aitex.Core.RT.Routine;
  2. using MECF.Framework.Common.Equipment;
  3. using System;
  4. using Aitex.Core.RT.SCCore;
  5. using FurnaceRT.Equipments.PMs.Routines;
  6. using System.Collections.Generic;
  7. using FurnaceRT.Equipments.Systems;
  8. using Aitex.Core.Util;
  9. using MECF.Framework.Common.SubstrateTrackings;
  10. using System.Linq;
  11. using Aitex.Core.Common;
  12. using MECF.Framework.Common.CommonData.EnumData;
  13. using MECF.Framework.Common.DataCenter;
  14. using MECF.Framework.Common.Utilities;
  15. using Aitex.Core.RT.Log;
  16. namespace FurnaceRT.Equipments.PMs.RecipeExecutions
  17. {
  18. public class PreProcess : PMBaseRoutine, IRoutine
  19. {
  20. public enum Routine
  21. {
  22. ToReadyProcessState,
  23. Pump,
  24. PinDown,
  25. }
  26. private string _recipeName;
  27. private int _liftTimeout;
  28. private bool _isProcessRecipe;
  29. public PreProcess(ModuleName module, PMModule pm) : base(module, pm)
  30. {
  31. Module = module.ToString();
  32. Name = "PreProcess";
  33. }
  34. public void Init(string recipeName, bool isProcessRecipe = true)
  35. {
  36. _recipeName = recipeName;
  37. _isProcessRecipe = isProcessRecipe;
  38. }
  39. public override Result Start(params object[] objs)
  40. {
  41. RecipeHead recipeHead;
  42. List<RecipeStep> recipeSteps;
  43. Dictionary<int, List<RecipeStep>> abortRecipe;
  44. Dictionary<int, string> abortRecipeName;
  45. Dictionary<int, List<RecipeStep>> subRecipe;
  46. Dictionary<int, string> subRecipeName;
  47. string reason = string.Empty;
  48. if (_isProcessRecipe)
  49. {
  50. if (!RecipeParser.Parse(_recipeName, Module, out recipeHead, out recipeSteps, out reason, "Process"))
  51. {
  52. PMModule.PreprocessStartFailedWarning.Set($"Load process recipe {_recipeName} failed, {reason}");
  53. return Result.FAIL;
  54. }
  55. #region MyRegion
  56. var isScheduleMaintenance = SC.ContainsItem("System.EnableScheduleMaintenance") && SC.GetValue<bool>("System.EnableScheduleMaintenance");
  57. if (isScheduleMaintenance)
  58. {
  59. var pm = (Singleton<EquipmentManager>.Instance.Modules[ModuleName.PM1] as PMModule);
  60. pm.GetAllDBRecord();
  61. var wafers = WaferManager.Instance.GetWafers(ModuleName.PM1);
  62. if (wafers != null && wafers.Count() > 0)
  63. {
  64. foreach (var wafer in wafers)
  65. {
  66. if (wafer == null || wafer.IsEmpty || (wafer.WaferType != WaferType.SD && wafer.WaferType != WaferType.ED))
  67. continue;
  68. #region New
  69. if (isScheduleMaintenance)
  70. {
  71. #region SD Dummy 时间/次数/膜厚限制
  72. if (wafer.WaferType == WaferType.SD)
  73. {
  74. var maintenanceItemCarrierUseFreq = ScheduleMaintenanceDataManager.Instance.GetItem(MaintenanceItemEnum.SDCarrierUseFreq.ToString());
  75. var maintenanceItemWaferThickness = ScheduleMaintenanceDataManager.Instance.GetItem(MaintenanceItemEnum.SDWaferThickness.ToString());
  76. var maintenanceItemWaferUserTime = ScheduleMaintenanceDataManager.Instance.GetItem(MaintenanceItemEnum.SDWaferUserTime.ToString());
  77. if (maintenanceItemCarrierUseFreq.StartValue > 0 && wafer.UseCount > maintenanceItemCarrierUseFreq.StartValue && wafer.UseCount < maintenanceItemCarrierUseFreq.LimitValue)
  78. {
  79. if (maintenanceItemCarrierUseFreq.MaintenanceProcessing == MaintenanceProcessingCommandEnum.AlarmReport.ToString() ||
  80. maintenanceItemCarrierUseFreq.MaintenanceProcessing == MaintenanceProcessingCommandEnum.JobAutoStart.ToString())
  81. {
  82. var msg = pm.GetAlarmWarningMsg(maintenanceItemCarrierUseFreq, false, wafer.UseCount.ToString(), maintenanceItemCarrierUseFreq.StartValue.ToString(), maintenanceItemCarrierUseFreq.LimitValue.ToString());
  83. Singleton<EquipmentManager>.Instance.SDWaferTypeUseCountWarning.Set(msg);
  84. }
  85. }
  86. if (maintenanceItemWaferUserTime.StartValue > 0 && wafer.UseTime > maintenanceItemWaferUserTime.StartValue && wafer.UseTime < maintenanceItemWaferUserTime.LimitValue)
  87. {
  88. if (maintenanceItemWaferUserTime.MaintenanceProcessing == MaintenanceProcessingCommandEnum.AlarmReport.ToString() ||
  89. maintenanceItemWaferUserTime.MaintenanceProcessing == MaintenanceProcessingCommandEnum.JobAutoStart.ToString())
  90. {
  91. var currentValue = DateTimeUtil.SecondToHHmmss(maintenanceItemWaferUserTime.CurrentValue.ToString());
  92. var minValue = DateTimeUtil.SecondToHHmmss(maintenanceItemWaferUserTime.StartValue.ToString());
  93. var maxValue = DateTimeUtil.SecondToHHmmss(maintenanceItemWaferUserTime.LimitValue.ToString());
  94. var msg = pm.GetAlarmWarningMsg(maintenanceItemWaferUserTime, true, currentValue, minValue, maxValue);
  95. Singleton<EquipmentManager>.Instance.SDWaferTypeUseTimeWarning.Set(msg);
  96. }
  97. }
  98. if (maintenanceItemWaferThickness.StartValue > 0 && wafer.UseThick > maintenanceItemWaferThickness.StartValue && wafer.UseThick < maintenanceItemWaferThickness.LimitValue)
  99. {
  100. if (maintenanceItemWaferThickness.MaintenanceProcessing == MaintenanceProcessingCommandEnum.AlarmReport.ToString() ||
  101. maintenanceItemWaferThickness.MaintenanceProcessing == MaintenanceProcessingCommandEnum.JobAutoStart.ToString())
  102. {
  103. var msg = pm.GetAlarmWarningMsg(maintenanceItemWaferThickness, false, wafer.UseThick.ToString(), maintenanceItemWaferThickness.StartValue.ToString(), maintenanceItemWaferThickness.LimitValue.ToString());
  104. Singleton<EquipmentManager>.Instance.SDWaferTypeThicknessWarning.Set(msg);
  105. }
  106. }
  107. if (maintenanceItemCarrierUseFreq.StartValue > 0 && wafer.UseCount >= maintenanceItemCarrierUseFreq.LimitValue)
  108. {
  109. if (maintenanceItemCarrierUseFreq.MaintenanceProcessing == MaintenanceProcessingCommandEnum.AlarmReport.ToString())
  110. {
  111. var msg = pm.GetAlarmWarningMsg(maintenanceItemCarrierUseFreq, false, wafer.UseCount.ToString(), maintenanceItemCarrierUseFreq.StartValue.ToString(), maintenanceItemCarrierUseFreq.LimitValue.ToString());
  112. Singleton<EquipmentManager>.Instance.SDWaferTypeUseCountAlarm.Set(msg);
  113. return Result.FAIL;
  114. }
  115. else if (maintenanceItemCarrierUseFreq.MaintenanceProcessing == MaintenanceProcessingCommandEnum.JobAutoStart.ToString())
  116. {
  117. var msg = pm.GetAlarmWarningMsg(maintenanceItemCarrierUseFreq, true);
  118. if (string.IsNullOrEmpty(maintenanceItemCarrierUseFreq.AssociationProcessRecipeName))
  119. {
  120. Singleton<EquipmentManager>.Instance.SDWaferTypeUseCountAlarm.Set(msg);
  121. return Result.FAIL;
  122. }
  123. Singleton<EquipmentManager>.Instance.SDWaferTypeUseCountAlarm.Set(msg);
  124. pm.TriggerJobAutoStart(maintenanceItemCarrierUseFreq.AssociationProcessRecipeName, RecipeExecEntryEnum.SDWaferRangeTrigger);
  125. LOG.Info($"{msg} Trigger {maintenanceItemCarrierUseFreq.AssociationProcessRecipeName}");
  126. return Result.FAIL;
  127. }
  128. }
  129. if (maintenanceItemWaferUserTime.StartValue > 0 && wafer.UseTime >= maintenanceItemWaferUserTime.LimitValue)
  130. {
  131. var currentValue = DateTimeUtil.SecondToHHmmss(maintenanceItemWaferUserTime.CurrentValue.ToString());
  132. var minValue = DateTimeUtil.SecondToHHmmss(maintenanceItemWaferUserTime.StartValue.ToString());
  133. var maxValue = DateTimeUtil.SecondToHHmmss(maintenanceItemWaferUserTime.LimitValue.ToString());
  134. var msg = pm.GetAlarmWarningMsg(maintenanceItemWaferUserTime, true, currentValue, minValue, maxValue);
  135. if (maintenanceItemWaferUserTime.MaintenanceProcessing == MaintenanceProcessingCommandEnum.AlarmReport.ToString())
  136. {
  137. Singleton<EquipmentManager>.Instance.SDWaferTypeUseTimeAlarm.Set(msg);
  138. return Result.FAIL;
  139. }
  140. else if (maintenanceItemWaferUserTime.MaintenanceProcessing == MaintenanceProcessingCommandEnum.JobAutoStart.ToString())
  141. {
  142. if (string.IsNullOrEmpty(maintenanceItemWaferUserTime.AssociationProcessRecipeName))
  143. {
  144. Singleton<EquipmentManager>.Instance.SDWaferTypeUseTimeAlarm.Set(msg);
  145. return Result.FAIL;
  146. }
  147. Singleton<EquipmentManager>.Instance.SDWaferTypeUseTimeAlarm.Set(msg);
  148. pm.TriggerJobAutoStart(maintenanceItemWaferUserTime.AssociationProcessRecipeName, RecipeExecEntryEnum.SDWaferRangeTrigger);
  149. LOG.Info($"{msg} Trigger {maintenanceItemWaferUserTime.AssociationProcessRecipeName}");
  150. return Result.FAIL;
  151. }
  152. }
  153. if (maintenanceItemWaferThickness.StartValue > 0 && wafer.UseThick >= maintenanceItemWaferThickness.LimitValue)
  154. {
  155. if (maintenanceItemWaferThickness.MaintenanceProcessing == MaintenanceProcessingCommandEnum.AlarmReport.ToString())
  156. {
  157. var msg = pm.GetAlarmWarningMsg(maintenanceItemWaferThickness, false, wafer.UseThick.ToString(), maintenanceItemWaferThickness.StartValue.ToString(), maintenanceItemWaferThickness.LimitValue.ToString());
  158. Singleton<EquipmentManager>.Instance.SDWaferTypeThicknessAlarm.Set(msg);
  159. return Result.FAIL;
  160. }
  161. else if (maintenanceItemWaferThickness.MaintenanceProcessing == MaintenanceProcessingCommandEnum.JobAutoStart.ToString())
  162. {
  163. var msg = pm.GetAlarmWarningMsg(maintenanceItemWaferThickness, true);
  164. if (string.IsNullOrEmpty(maintenanceItemWaferThickness.AssociationProcessRecipeName))
  165. {
  166. Singleton<EquipmentManager>.Instance.SDWaferTypeThicknessAlarm.Set(msg);
  167. return Result.FAIL;
  168. }
  169. Singleton<EquipmentManager>.Instance.SDWaferTypeThicknessAlarm.Set(msg);
  170. pm.TriggerJobAutoStart(maintenanceItemWaferThickness.AssociationProcessRecipeName, RecipeExecEntryEnum.SDWaferRangeTrigger);
  171. LOG.Info($"{msg} Trigger {maintenanceItemWaferThickness.AssociationProcessRecipeName}");
  172. return Result.FAIL;
  173. }
  174. }
  175. }
  176. #endregion
  177. #region ED
  178. if (wafer.WaferType == WaferType.ED)
  179. {
  180. var maintenanceItemCarrierUseFreq = ScheduleMaintenanceDataManager.Instance.GetItem(MaintenanceItemEnum.FDCarrierUseFreq.ToString());
  181. var maintenanceItemWaferThickness = ScheduleMaintenanceDataManager.Instance.GetItem(MaintenanceItemEnum.FDWaferThickness.ToString());
  182. var maintenanceItemWaferUserTime = ScheduleMaintenanceDataManager.Instance.GetItem(MaintenanceItemEnum.FDWaferUserTime.ToString());
  183. if (maintenanceItemCarrierUseFreq.StartValue > 0 && wafer.UseCount > maintenanceItemCarrierUseFreq.StartValue && wafer.UseCount < maintenanceItemCarrierUseFreq.LimitValue)
  184. {
  185. if (maintenanceItemCarrierUseFreq.MaintenanceProcessing == MaintenanceProcessingCommandEnum.AlarmReport.ToString() ||
  186. maintenanceItemCarrierUseFreq.MaintenanceProcessing == MaintenanceProcessingCommandEnum.JobAutoStart.ToString())
  187. {
  188. var msg = pm.GetAlarmWarningMsg(maintenanceItemCarrierUseFreq, false, wafer.UseCount.ToString(), maintenanceItemCarrierUseFreq.StartValue.ToString(), maintenanceItemCarrierUseFreq.LimitValue.ToString());
  189. Singleton<EquipmentManager>.Instance.FDWaferTypeUseCountWarning.Set(msg);
  190. }
  191. }
  192. if (maintenanceItemWaferUserTime.StartValue > 0 && wafer.UseTime > maintenanceItemWaferUserTime.StartValue && wafer.UseTime < maintenanceItemWaferUserTime.LimitValue)
  193. {
  194. if (maintenanceItemWaferUserTime.MaintenanceProcessing == MaintenanceProcessingCommandEnum.AlarmReport.ToString() ||
  195. maintenanceItemWaferUserTime.MaintenanceProcessing == MaintenanceProcessingCommandEnum.JobAutoStart.ToString())
  196. {
  197. var currentValue = DateTimeUtil.SecondToHHmmss(maintenanceItemWaferUserTime.CurrentValue.ToString());
  198. var minValue = DateTimeUtil.SecondToHHmmss(maintenanceItemWaferUserTime.StartValue.ToString());
  199. var maxValue = DateTimeUtil.SecondToHHmmss(maintenanceItemWaferUserTime.LimitValue.ToString());
  200. var msg = pm.GetAlarmWarningMsg(maintenanceItemWaferUserTime, true, currentValue, minValue, maxValue);
  201. Singleton<EquipmentManager>.Instance.FDWaferTypeUseTimeWarning.Set(msg);
  202. }
  203. }
  204. if (maintenanceItemWaferThickness.StartValue > 0 && wafer.UseThick > maintenanceItemWaferThickness.StartValue && wafer.UseThick < maintenanceItemWaferThickness.LimitValue)
  205. {
  206. if (maintenanceItemWaferThickness.MaintenanceProcessing == MaintenanceProcessingCommandEnum.AlarmReport.ToString() ||
  207. maintenanceItemWaferThickness.MaintenanceProcessing == MaintenanceProcessingCommandEnum.JobAutoStart.ToString())
  208. {
  209. var msg = pm.GetAlarmWarningMsg(maintenanceItemWaferThickness, false, wafer.UseThick.ToString(), maintenanceItemWaferThickness.StartValue.ToString(), maintenanceItemWaferThickness.LimitValue.ToString());
  210. Singleton<EquipmentManager>.Instance.FDWaferTypeThicknessWarning.Set(msg);
  211. }
  212. }
  213. if (maintenanceItemCarrierUseFreq.StartValue > 0 && wafer.UseCount >= maintenanceItemCarrierUseFreq.LimitValue)
  214. {
  215. if (maintenanceItemCarrierUseFreq.MaintenanceProcessing == MaintenanceProcessingCommandEnum.AlarmReport.ToString())
  216. {
  217. var msg = pm.GetAlarmWarningMsg(maintenanceItemCarrierUseFreq, false, wafer.UseCount.ToString(), maintenanceItemCarrierUseFreq.StartValue.ToString(), maintenanceItemCarrierUseFreq.LimitValue.ToString());
  218. Singleton<EquipmentManager>.Instance.FDWaferTypeUseCountAlarm.Set(msg);
  219. return Result.FAIL;
  220. }
  221. else if (maintenanceItemCarrierUseFreq.MaintenanceProcessing == MaintenanceProcessingCommandEnum.JobAutoStart.ToString())
  222. {
  223. var msg = pm.GetAlarmWarningMsg(maintenanceItemCarrierUseFreq);
  224. if (string.IsNullOrEmpty(maintenanceItemCarrierUseFreq.AssociationProcessRecipeName))
  225. {
  226. Singleton<EquipmentManager>.Instance.FDWaferTypeUseCountAlarm.Set(msg);
  227. return Result.FAIL;
  228. }
  229. Singleton<EquipmentManager>.Instance.FDWaferTypeUseCountAlarm.Set(msg);
  230. pm.TriggerJobAutoStart(maintenanceItemCarrierUseFreq.AssociationProcessRecipeName, RecipeExecEntryEnum.EDWaferRangeTrigger);
  231. LOG.Info($"{msg} Trigger {maintenanceItemCarrierUseFreq.AssociationProcessRecipeName}");
  232. return Result.FAIL;
  233. }
  234. }
  235. if (maintenanceItemWaferUserTime.StartValue > 0 && wafer.UseTime >= maintenanceItemWaferUserTime.LimitValue)
  236. {
  237. var currentValue = DateTimeUtil.SecondToHHmmss(maintenanceItemWaferUserTime.CurrentValue.ToString());
  238. var minValue = DateTimeUtil.SecondToHHmmss(maintenanceItemWaferUserTime.StartValue.ToString());
  239. var maxValue = DateTimeUtil.SecondToHHmmss(maintenanceItemWaferUserTime.LimitValue.ToString());
  240. var msg = pm.GetAlarmWarningMsg(maintenanceItemWaferUserTime, true, currentValue, minValue, maxValue);
  241. if (maintenanceItemWaferUserTime.MaintenanceProcessing == MaintenanceProcessingCommandEnum.AlarmReport.ToString())
  242. {
  243. Singleton<EquipmentManager>.Instance.FDWaferTypeUseTimeAlarm.Set(msg);
  244. return Result.FAIL;
  245. }
  246. else if (maintenanceItemWaferUserTime.MaintenanceProcessing == MaintenanceProcessingCommandEnum.JobAutoStart.ToString())
  247. {
  248. if (string.IsNullOrEmpty(maintenanceItemWaferUserTime.AssociationProcessRecipeName))
  249. {
  250. Singleton<EquipmentManager>.Instance.FDWaferTypeUseTimeAlarm.Set(msg);
  251. return Result.FAIL;
  252. }
  253. Singleton<EquipmentManager>.Instance.FDWaferTypeUseTimeAlarm.Set(msg);
  254. pm.TriggerJobAutoStart(maintenanceItemWaferUserTime.AssociationProcessRecipeName, RecipeExecEntryEnum.EDWaferRangeTrigger);
  255. LOG.Info($"{msg} Trigger {maintenanceItemWaferUserTime.AssociationProcessRecipeName}");
  256. return Result.FAIL;
  257. }
  258. }
  259. if (maintenanceItemWaferThickness.StartValue > 0 && wafer.UseThick >= maintenanceItemWaferThickness.LimitValue)
  260. {
  261. if (maintenanceItemWaferThickness.MaintenanceProcessing == MaintenanceProcessingCommandEnum.AlarmReport.ToString())
  262. {
  263. var msg = pm.GetAlarmWarningMsg(maintenanceItemWaferThickness, false, wafer.UseThick.ToString(), maintenanceItemWaferThickness.StartValue.ToString(), maintenanceItemWaferThickness.LimitValue.ToString());
  264. Singleton<EquipmentManager>.Instance.FDWaferTypeThicknessAlarm.Set(msg);
  265. return Result.FAIL;
  266. }
  267. else if (maintenanceItemWaferThickness.MaintenanceProcessing == MaintenanceProcessingCommandEnum.JobAutoStart.ToString())
  268. {
  269. var msg = pm.GetAlarmWarningMsg(maintenanceItemWaferThickness, true);
  270. if (string.IsNullOrEmpty(maintenanceItemWaferThickness.AssociationProcessRecipeName))
  271. {
  272. Singleton<EquipmentManager>.Instance.FDWaferTypeThicknessAlarm.Set(msg);
  273. return Result.FAIL;
  274. }
  275. Singleton<EquipmentManager>.Instance.FDWaferTypeThicknessAlarm.Set(msg);
  276. pm.TriggerJobAutoStart(maintenanceItemWaferThickness.AssociationProcessRecipeName, RecipeExecEntryEnum.EDWaferRangeTrigger);
  277. LOG.Info($"{msg} Trigger {maintenanceItemWaferThickness.AssociationProcessRecipeName}");
  278. return Result.FAIL;
  279. }
  280. }
  281. }
  282. #endregion
  283. }
  284. #endregion
  285. }
  286. }
  287. pm.CheckBoatRecipeThicknessMoreThan( out var boatRecipeThicknessIsPause);
  288. if (boatRecipeThicknessIsPause)
  289. return Result.FAIL;
  290. pm.CheckRecipeThicknessMoreThan(_recipeName, out var isPause);
  291. if (isPause)
  292. return Result.FAIL;
  293. pm.CheckRecipeExecuteFreqMoreThan(_recipeName, out var isPause1);
  294. if (isPause1)
  295. return Result.FAIL;
  296. foreach (var item in recipeSteps)
  297. {
  298. pm.CheckRecipeStepFreqMoreThan(item.StepName, out var isPause2);
  299. if (isPause2)
  300. return Result.FAIL;
  301. pm.CheckRecipeStepTimeMoreThan(item.StepName, out var isPause3);
  302. if (isPause3)
  303. return Result.FAIL;
  304. pm.CheckRecipeStepGroupThicknessMoreThan(item.StepName, out var isPause4);
  305. if (isPause4)
  306. return Result.FAIL;
  307. }
  308. }
  309. #endregion
  310. PMModule.RecipeRunningInfo.MainRecipeName = _recipeName;
  311. PMModule.RecipeRunningInfo.Head = recipeHead;
  312. PMModule.RecipeRunningInfo.RecipeStepList = recipeSteps;
  313. PMModule.RecipeRunningInfo.ExecRecipeType = recipeSteps.Count > 0 ? recipeSteps[0].RecipeType : string.Empty;
  314. }
  315. Reset();
  316. Notify($"Start");
  317. return Result.RUN;
  318. }
  319. public override Result Monitor()
  320. {
  321. try
  322. {
  323. //ToReadyProcessState((int)Routine.ToReadyProcessState, PMModule, _liftTimeout);
  324. //ExecuteRoutine((int)Routine.Pump, _pumpRoutine);
  325. //MovePinDown((int)Routine.PinDown, PMModule, _liftTimeout);
  326. }
  327. catch (RoutineBreakException)
  328. {
  329. return Result.RUN;
  330. }
  331. catch (RoutineFaildException)
  332. {
  333. return Result.FAIL;
  334. }
  335. return Result.DONE;
  336. }
  337. public override void Abort()
  338. {
  339. }
  340. }
  341. }