PMModuleDevice.cs 122 KB

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  1. using Aitex.Core.Common.DeviceData;
  2. using Aitex.Core.RT.Device;
  3. using Aitex.Core.RT.Device.Unit;
  4. using Aitex.Core.RT.Event;
  5. using Aitex.Core.Util;
  6. using Aitex.Core.Utilities;
  7. using MECF.Framework.Common.Event;
  8. using System;
  9. using System.Collections.Generic;
  10. using System.Linq;
  11. using System.Reflection;
  12. using MECF.Framework.Common.SubstrateTrackings;
  13. using Aitex.Core.Common;
  14. using FurnaceRT.Equipments.Systems;
  15. using Aitex.Core.RT.IOCore;
  16. using MECF.Framework.Common.Equipment;
  17. using MECF.Framework.RT.Core.IoProviders;
  18. using MECF.Framework.Common.Device.Bases;
  19. using FurnaceRT.Equipments.Boats;
  20. using IoHeater = FurnaceRT.Devices.IoHeater;
  21. using IoPressureMeter = FurnaceRT.Devices.IoPressureMeter;
  22. using FurnaceRT.Devices;
  23. using Aitex.Core.RT.Log;
  24. using FurnaceRT.Equipments.PMs.Devices;
  25. using Aitex.Core.RT.SCCore;
  26. using static Aitex.Core.RT.Device.Unit.IoBoat;
  27. using MECF.Framework.Common.CommonData.SorterDefines;
  28. using System.Windows;
  29. using FurnaceRT.Extraction;
  30. namespace FurnaceRT.Equipments.PMs
  31. {
  32. public partial class PMModule
  33. {
  34. // -------------------------------------------------------------------------
  35. #region
  36. [Tag("AlarmSignalEMO01001powerboxEMO")]
  37. public IoAlarmSignal AlarmSignalEMO01001powerboxEMO { get; set; }
  38. [Tag("AlarmSignalPowerboxfiredetector")]
  39. public IoAlarmSignal AlarmSignalPowerboxfiredetector { get; set; }
  40. [Tag("AlarmSignalSMK01001detectoroperator")]
  41. public IoAlarmSignal AlarmSignalSMK01001detectoroperator { get; set; }
  42. [Tag("AlarmSignalSMK01001detectorfault")]
  43. public IoAlarmSignal AlarmSignalSMK01001detectorfault { get; set; }
  44. [Tag("AlarmSignalEMO02001gasboxEMO")]
  45. public IoAlarmSignal AlarmSignalEMO02001gasboxEMO { get; set; }
  46. [Tag("AlarmSignalEMO04001frontbodyEMO")]
  47. public IoAlarmSignal AlarmSignalEMO04001frontbodyEMO { get; set; }
  48. [Tag("AlarmSignalLD02001LSCleakalarm")]
  49. public IoAlarmSignal AlarmSignalLD02001LSCleakalarm { get; set; }
  50. [Tag("AlarmSignalLD05001Magneticfluidleak")]
  51. public IoAlarmSignal AlarmSignalLD05001Magneticfluidleak { get; set; }
  52. [Tag("AlarmSignalLD05002Coolingwaterleak")]
  53. public IoAlarmSignal AlarmSignalLD05002Coolingwaterleak { get; set; }
  54. [Tag("AlarmSignalLD05003RHCleak")]
  55. public IoAlarmSignal AlarmSignalLD05003RHCleak { get; set; }
  56. [Tag("AlarmSignalLD03001exhaustboxwaterleakupside")]
  57. public IoAlarmSignal AlarmSignalLD03001exhaustboxwaterleakupside { get; set; }
  58. [Tag("AlarmSignalLD03002waterleakdownside")]
  59. public IoAlarmSignal AlarmSignalLD03002waterleakdownside { get; set; }
  60. [Tag("AlarmSignalExternalEMO")]
  61. public IoAlarmSignal AlarmSignalExternalEMO { get; set; }
  62. [Tag("AlarmSignalFurnacetransformertempsw")]
  63. public IoAlarmSignal AlarmSignalFurnacetransformertempsw { get; set; }
  64. [Tag("AlarmSignalAC100Vtransformertempsw")]
  65. public IoAlarmSignal AlarmSignalAC100Vtransformertempsw { get; set; }
  66. [Tag("AlarmSignalFurnacepoweronswitch")]
  67. public IoAlarmSignal AlarmSignalFurnacepoweronswitch { get; set; }
  68. [Tag("AlarmSignalAC100Vtransformerpowerswitch")]
  69. public IoAlarmSignal AlarmSignalAC100Vtransformerpowerswitch { get; set; }
  70. [Tag("AlarmSignalPowerboxinterlockresetbutton")]
  71. public IoAlarmSignal AlarmSignalPowerboxinterlockresetbutton { get; set; }
  72. [Tag("AlarmSignalVFD01001EDM")]
  73. public IoAlarmSignal AlarmSignalVFD01001EDM { get; set; }
  74. [Tag("AlarmSignalGasboxinterlockresetbutton")]
  75. public IoAlarmSignal AlarmSignalGasboxinterlockresetbutton { get; set; }
  76. [Tag("AlarmSignalSCRONOFFSWITCH")]
  77. public IoAlarmSignal AlarmSignalSCRONOFFSWITCH { get; set; }
  78. [Tag("AlarmSignalGasboxexhaustpressurealarm1st")]
  79. public IoAlarmSignal AlarmSignalGasboxexhaustpressurealarm1st { get; set; }
  80. [Tag("AlarmSignalGasboxexhaustpressurealarm2nd")]
  81. public IoAlarmSignal AlarmSignalGasboxexhaustpressurealarm2nd { get; set; }
  82. [Tag("AlarmSignalFS101waterflowalarm")]
  83. public IoAlarmSignal AlarmSignalFS101waterflowalarm { get; set; }
  84. [Tag("AlarmSignalFrontbodyinterlockresetbutton")]
  85. public IoAlarmSignal AlarmSignalFrontbodyinterlockresetbutton { get; set; }
  86. [Tag("AlarmSignalLightcurtainOSSD1")]
  87. public IoAlarmSignal AlarmSignalLightcurtainOSSD1 { get; set; }
  88. [Tag("AlarmSignalLightcurtainOSSD2")]
  89. public IoAlarmSignal AlarmSignalLightcurtainOSSD2 { get; set; }
  90. [Tag("AlarmSignalLightcurtainfault")]
  91. public IoAlarmSignal AlarmSignalLightcurtainfault { get; set; }
  92. [Tag("AlarmSignalFrontbodydoorswitch")]
  93. public IoAlarmSignal AlarmSignalFrontbodydoorswitch { get; set; }
  94. [Tag("AlarmSignalFrontbodyIOshuttersw")]
  95. public IoAlarmSignal AlarmSignalFrontbodyIOshuttersw { get; set; }
  96. [Tag("AlarmSignalFouprobotEMS")]
  97. public IoAlarmSignal AlarmSignalFouprobotEMS { get; set; }
  98. [Tag("AlarmSignalWaferrobotEMS")]
  99. public IoAlarmSignal AlarmSignalWaferrobotEMS { get; set; }
  100. [Tag("AlarmSignalAxisCRmotorEDM")]
  101. public IoAlarmSignal AlarmSignalAxisCRmotorEDM { get; set; }
  102. [Tag("AlarmSignalAxisEmotorEDM")]
  103. public IoAlarmSignal AlarmSignalAxisEmotorEDM { get; set; }
  104. [Tag("AlarmSignalTS05001FFUtempsw")]
  105. public IoAlarmSignal AlarmSignalTS05001FFUtempsw { get; set; }
  106. [Tag("AlarmSignalTS05002Capinsidetempsw")]
  107. public IoAlarmSignal AlarmSignalTS05002Capinsidetempsw { get; set; }
  108. [Tag("AlarmSignalTS05003Capoutsidetempsw")]
  109. public IoAlarmSignal AlarmSignalTS05003Capoutsidetempsw { get; set; }
  110. [Tag("AlarmSignalTS05004Raxisrotationtempsw")]
  111. public IoAlarmSignal AlarmSignalTS05004Raxisrotationtempsw { get; set; }
  112. [Tag("AlarmSignalTS05005RHCtempsw")]
  113. public IoAlarmSignal AlarmSignalTS05005RHCtempsw { get; set; }
  114. [Tag("AlarmSignalTS05006furnacetempsw")]
  115. public IoAlarmSignal AlarmSignalTS05006furnacetempsw { get; set; }
  116. [Tag("AlarmSignalLoadingareaEMS")]
  117. public IoAlarmSignal AlarmSignalLoadingareaEMS { get; set; }
  118. [Tag("AlarmSignalGD02001HCL1gasleak1stalarm")]
  119. public IoAlarmSignal AlarmSignalGD02001HCL1gasleak1stalarm { get; set; }
  120. [Tag("AlarmSignalGD02001HCL1gasleak2ndalarm")]
  121. public IoAlarmSignal AlarmSignalGD02001HCL1gasleak2ndalarm { get; set; }
  122. [Tag("AlarmSignalGD02001fault")]
  123. public IoAlarmSignal AlarmSignalGD02001fault { get; set; }
  124. [Tag("AlarmSignalGD02002HCL2gasleak1stalarm")]
  125. public IoAlarmSignal AlarmSignalGD02002HCL2gasleak1stalarm { get; set; }
  126. [Tag("AlarmSignalGD02002HCL2gasleak2ndalarm")]
  127. public IoAlarmSignal AlarmSignalGD02002HCL2gasleak2ndalarm { get; set; }
  128. [Tag("AlarmSignalGD02002fault")]
  129. public IoAlarmSignal AlarmSignalGD02002fault { get; set; }
  130. [Tag("AlarmSignalGD02003NH31gasleak1stalarm")]
  131. public IoAlarmSignal AlarmSignalGD02003NH31gasleak1stalarm { get; set; }
  132. [Tag("AlarmSignalGD02003NH31gasleak2ndalarm")]
  133. public IoAlarmSignal AlarmSignalGD02003NH31gasleak2ndalarm { get; set; }
  134. [Tag("AlarmSignalGD02003fault")]
  135. public IoAlarmSignal AlarmSignalGD02003fault { get; set; }
  136. [Tag("AlarmSignalGD02004NH32gasleak1stalarm")]
  137. public IoAlarmSignal AlarmSignalGD02004NH32gasleak1stalarm { get; set; }
  138. [Tag("AlarmSignalGD02004NH32gasleak2ndalarm")]
  139. public IoAlarmSignal AlarmSignalGD02004NH32gasleak2ndalarm { get; set; }
  140. [Tag("AlarmSignalGD02004fault")]
  141. public IoAlarmSignal AlarmSignalGD02004fault { get; set; }
  142. [Tag("AlarmSignalGD02005F21gasleak1stalarm")]
  143. public IoAlarmSignal AlarmSignalGD02005F21gasleak1stalarm { get; set; }
  144. [Tag("AlarmSignalGD02005F21gasleak2ndalarm")]
  145. public IoAlarmSignal AlarmSignalGD02005F21gasleak2ndalarm { get; set; }
  146. [Tag("AlarmSignalGD02005fault")]
  147. public IoAlarmSignal AlarmSignalGD02005fault { get; set; }
  148. [Tag("AlarmSignalGD02006F22gasleak1stalarm")]
  149. public IoAlarmSignal AlarmSignalGD02006F22gasleak1stalarm { get; set; }
  150. [Tag("AlarmSignalGD02006F22gasleak2ndalarm")]
  151. public IoAlarmSignal AlarmSignalGD02006F22gasleak2ndalarm { get; set; }
  152. [Tag("AlarmSignalGD02006fault")]
  153. public IoAlarmSignal AlarmSignalGD02006fault { get; set; }
  154. [Tag("AlarmSignalGD02007NO1gasleak1stalarm")]
  155. public IoAlarmSignal AlarmSignalGD02007NO1gasleak1stalarm { get; set; }
  156. [Tag("AlarmSignalGD02007NO1gasleak2ndalarm")]
  157. public IoAlarmSignal AlarmSignalGD02007NO1gasleak2ndalarm { get; set; }
  158. [Tag("AlarmSignalGD02007fault")]
  159. public IoAlarmSignal AlarmSignalGD02007fault { get; set; }
  160. [Tag("AlarmSignalGD02008NO2gasleak1stalarm")]
  161. public IoAlarmSignal AlarmSignalGD02008NO2gasleak1stalarm { get; set; }
  162. [Tag("AlarmSignalGD02008NO2gasleak2ndalarm")]
  163. public IoAlarmSignal AlarmSignalGD02008NO2gasleak2ndalarm { get; set; }
  164. [Tag("AlarmSignalGD02008fault")]
  165. public IoAlarmSignal AlarmSignalGD02008fault { get; set; }
  166. [Tag("AlarmSignalGD02009C3H61gasleak1stalarm")]
  167. public IoAlarmSignal AlarmSignalGD02009C3H61gasleak1stalarm { get; set; }
  168. [Tag("AlarmSignalGD02009C3H61gasleak2ndalarm")]
  169. public IoAlarmSignal AlarmSignalGD02009C3H61gasleak2ndalarm { get; set; }
  170. [Tag("AlarmSignalGD02009fault")]
  171. public IoAlarmSignal AlarmSignalGD02009fault { get; set; }
  172. [Tag("AlarmSignalGD02010C3H62gasleak1stalarm")]
  173. public IoAlarmSignal AlarmSignalGD02010C3H62gasleak1stalarm { get; set; }
  174. [Tag("AlarmSignalGD02010C3H62gasleak2ndalarm")]
  175. public IoAlarmSignal AlarmSignalGD02010C3H62gasleak2ndalarm { get; set; }
  176. [Tag("AlarmSignalGD02010fault")]
  177. public IoAlarmSignal AlarmSignalGD02010fault { get; set; }
  178. [Tag("AlarmSignalGD02011DMA1gasleak1stalarm")]
  179. public IoAlarmSignal AlarmSignalGD02011DMA1gasleak1stalarm { get; set; }
  180. [Tag("AlarmSignalGD02011DMA1gasleak2ndalarm")]
  181. public IoAlarmSignal AlarmSignalGD02011DMA1gasleak2ndalarm { get; set; }
  182. [Tag("AlarmSignalGD02011fault")]
  183. public IoAlarmSignal AlarmSignalGD02011fault { get; set; }
  184. [Tag("AlarmSignalGD02012DMA2gasleak1stalarm")]
  185. public IoAlarmSignal AlarmSignalGD02012DMA2gasleak1stalarm { get; set; }
  186. [Tag("AlarmSignalGD02012DMA2gasleak2ndalarm")]
  187. public IoAlarmSignal AlarmSignalGD02012DMA2gasleak2ndalarm { get; set; }
  188. [Tag("AlarmSignalGD02012fault")]
  189. public IoAlarmSignal AlarmSignalGD02012fault { get; set; }
  190. [Tag("AlarmSignalSL02001gasboxdoorsw11")]
  191. public IoAlarmSignal AlarmSignalSL02001gasboxdoorsw11 { get; set; }
  192. [Tag("AlarmSignalSL02001gasboxdoorsw12")]
  193. public IoAlarmSignal AlarmSignalSL02001gasboxdoorsw12 { get; set; }
  194. [Tag("AlarmSignalSL02002gasboxdoorsw11")]
  195. public IoAlarmSignal AlarmSignalSL02002gasboxdoorsw11 { get; set; }
  196. [Tag("AlarmSignalSL02002gasboxdoorsw12")]
  197. public IoAlarmSignal AlarmSignalSL02002gasboxdoorsw12 { get; set; }
  198. [Tag("AlarmSignalSL05001LAdoorsw1")]
  199. public IoAlarmSignal AlarmSignalSL05001LAdoorsw1 { get; set; }
  200. [Tag("AlarmSignalSL05002LAdoorsw2")]
  201. public IoAlarmSignal AlarmSignalSL05002LAdoorsw2 { get; set; }
  202. [Tag("AlarmSignalSL05004LAfurnacedoorsw")]
  203. public IoAlarmSignal AlarmSignalSL05004LAfurnacedoorsw { get; set; }
  204. [Tag("AlarmSignalFurnacepoweronoff")]
  205. public IoAlarmSignal AlarmSignalFurnacepoweronoff { get; set; }
  206. [Tag("AlarmSignalBlowerpoweronoff")]
  207. public IoAlarmSignal AlarmSignalBlowerpoweronoff { get; set; }
  208. [Tag("AlarmSignal100Vtransformerpoweron")]
  209. public IoAlarmSignal AlarmSignal100Vtransformerpoweron { get; set; }
  210. [Tag("AlarmSignalVFDenable")]
  211. public IoAlarmSignal AlarmSignalVFDenable { get; set; }
  212. [Tag("AlarmSignalHPMvalvepoweronoff")]
  213. public IoAlarmSignal AlarmSignalHPMvalvepoweronoff { get; set; }
  214. [Tag("AlarmSignalAxisCRmotorenable1")]
  215. public IoAlarmSignal AlarmSignalAxisCRmotorenable1 { get; set; }
  216. [Tag("AlarmSignalAxisCRmotorenable2")]
  217. public IoAlarmSignal AlarmSignalAxisCRmotorenable2 { get; set; }
  218. [Tag("AlarmSignalAxisEmotorenable1")]
  219. public IoAlarmSignal AlarmSignalAxisEmotorenable1 { get; set; }
  220. [Tag("AlarmSignalAxisEmotorenable2")]
  221. public IoAlarmSignal AlarmSignalAxisEmotorenable2 { get; set; }
  222. [Tag("AlarmSignalFTRenable1")]
  223. public IoAlarmSignal AlarmSignalFTRenable1 { get; set; }
  224. [Tag("AlarmSignalFTRenable2")]
  225. public IoAlarmSignal AlarmSignalFTRenable2 { get; set; }
  226. [Tag("AlarmSignalFTRinterlockreset")]
  227. public IoAlarmSignal AlarmSignalFTRinterlockreset { get; set; }
  228. [Tag("AlarmSignalWTRenable1")]
  229. public IoAlarmSignal AlarmSignalWTRenable1 { get; set; }
  230. [Tag("AlarmSignalWTRenable2")]
  231. public IoAlarmSignal AlarmSignalWTRenable2 { get; set; }
  232. [Tag("AlarmSignalWTRinterlockreset")]
  233. public IoAlarmSignal AlarmSignalWTRinterlockreset { get; set; }
  234. [Tag("AlarmSignalCapheaterenable")]
  235. public IoAlarmSignal AlarmSignalCapheaterenable { get; set; }
  236. [Tag("AlarmSignalLightcurtainidel")]
  237. public IoAlarmSignal AlarmSignalLightcurtainidel { get; set; }
  238. [Tag("AlarmSignalPowerboxinterlockbuttonled")]
  239. public IoAlarmSignal AlarmSignalPowerboxinterlockbuttonled { get; set; }
  240. [Tag("AlarmSignalGasboxinterlockbuttonled")]
  241. public IoAlarmSignal AlarmSignalGasboxinterlockbuttonled { get; set; }
  242. [Tag("AlarmSignalFrontbodyinterlockbuttonled")]
  243. public IoAlarmSignal AlarmSignalFrontbodyinterlockbuttonled { get; set; }
  244. #endregion
  245. #region AlarmSignal
  246. [Tag("AlarmSignalBufferA1N2LowPressureError")]
  247. public IoAlarmSignal AlarmSignalBufferA1N2LowPressureError { get; set; }
  248. [Tag("AlarmSignalBufferB1N2LowPressureError")]
  249. public IoAlarmSignal AlarmSignalBufferB1N2LowPressureError { get; set; }
  250. [Tag("AlarmSignalBufferC1N2LowPressureError")]
  251. public IoAlarmSignal AlarmSignalBufferC1N2LowPressureError { get; set; }
  252. [Tag("AlarmSignalBufferD1N2LowPressureError")]
  253. public IoAlarmSignal AlarmSignalBufferD1N2LowPressureError { get; set; }
  254. [Tag("AlarmSignalBufferA2N2LowPressureError")]
  255. public IoAlarmSignal AlarmSignalBufferA2N2LowPressureError { get; set; }
  256. [Tag("AlarmSignalBufferB2N2LowPressureError")]
  257. public IoAlarmSignal AlarmSignalBufferB2N2LowPressureError { get; set; }
  258. [Tag("AlarmSignalBufferC2N2LowPressureError")]
  259. public IoAlarmSignal AlarmSignalBufferC2N2LowPressureError { get; set; }
  260. [Tag("AlarmSignalBufferD2N2LowPressureError")]
  261. public IoAlarmSignal AlarmSignalBufferD2N2LowPressureError { get; set; }
  262. [Tag("AlarmSignalBufferA3N2LowPressureError")]
  263. public IoAlarmSignal AlarmSignalBufferA3N2LowPressureError { get; set; }
  264. [Tag("AlarmSignalBufferB3N2LowPressureError")]
  265. public IoAlarmSignal AlarmSignalBufferB3N2LowPressureError { get; set; }
  266. [Tag("AlarmSignalBufferC3N2LowPressureError")]
  267. public IoAlarmSignal AlarmSignalBufferC3N2LowPressureError { get; set; }
  268. [Tag("AlarmSignalBufferD3N2LowPressureError")]
  269. public IoAlarmSignal AlarmSignalBufferD3N2LowPressureError { get; set; }
  270. [Tag("AlarmSignalBufferA4N2LowPressureError")]
  271. public IoAlarmSignal AlarmSignalBufferA4N2LowPressureError { get; set; }
  272. [Tag("AlarmSignalBufferB4N2LowPressureError")]
  273. public IoAlarmSignal AlarmSignalBufferB4N2LowPressureError { get; set; }
  274. [Tag("AlarmSignalBufferC4N2LowPressureError")]
  275. public IoAlarmSignal AlarmSignalBufferC4N2LowPressureError { get; set; }
  276. [Tag("AlarmSignalBufferD4N2LowPressureError")]
  277. public IoAlarmSignal AlarmSignalBufferD4N2LowPressureError { get; set; }
  278. [Tag("AlarmSignalFIMS1LoadRunningError")]
  279. public IoAlarmSignal AlarmSignalFIMS1LoadRunningError { get; set; }
  280. [Tag("AlarmSignalFIMS1UnloadRunningError")]
  281. public IoAlarmSignal AlarmSignalFIMS1UnloadRunningError { get; set; }
  282. [Tag("AlarmSignalFIMS1InitRunningError")]
  283. public IoAlarmSignal AlarmSignalFIMS1InitRunningError { get; set; }
  284. [Tag("AlarmSignalFIMS2LoadRunningError")]
  285. public IoAlarmSignal AlarmSignalFIMS2LoadRunningError { get; set; }
  286. [Tag("AlarmSignalFIMS2UnloadRunningError")]
  287. public IoAlarmSignal AlarmSignalFIMS2UnloadRunningError { get; set; }
  288. [Tag("AlarmSignalFIMS2InitRunningError")]
  289. public IoAlarmSignal AlarmSignalFIMS2InitRunningError { get; set; }
  290. [Tag("AlarmSignalFIMS1UndockRunningError")]
  291. public IoAlarmSignal AlarmSignalFIMS1UndockRunningError { get; set; }
  292. [Tag("AlarmSignalFIMS1DockRunningError")]
  293. public IoAlarmSignal AlarmSignalFIMS1DockRunningError { get; set; }
  294. [Tag("AlarmSignalFIMS1VacuumOffRunningError")]
  295. public IoAlarmSignal AlarmSignalFIMS1VacuumOffRunningError { get; set; }
  296. [Tag("AlarmSignalFIMS1VacuumOnRunningError")]
  297. public IoAlarmSignal AlarmSignalFIMS1VacuumOnRunningError { get; set; }
  298. [Tag("AlarmSignalFIMS1N2Closed")]
  299. public IoAlarmSignal AlarmSignalFIMS1N2Closed { get; set; }
  300. [Tag("AlarmSignalFIMS1N2Opened")]
  301. public IoAlarmSignal AlarmSignalFIMS1N2Opened { get; set; }
  302. [Tag("AlarmSignalFIMS1ReleaseRunningError")]
  303. public IoAlarmSignal AlarmSignalFIMS1ReleaseRunningError { get; set; }
  304. [Tag("AlarmSignalFIMS1SealRunningError")]
  305. public IoAlarmSignal AlarmSignalFIMS1SealRunningError { get; set; }
  306. [Tag("AlarmSignalFIMS1SlideCloseRunningError")]
  307. public IoAlarmSignal AlarmSignalFIMS1SlideCloseRunningError { get; set; }
  308. [Tag("AlarmSignalFIMS1SlideOpenRunningError")]
  309. public IoAlarmSignal AlarmSignalFIMS1SlideOpenRunningError { get; set; }
  310. [Tag("AlarmSignalFIMS1LatchKeyOnRunningError")]
  311. public IoAlarmSignal AlarmSignalFIMS1LatchKeyOnRunningError { get; set; }
  312. [Tag("AlarmSignalFIMS1LatchKeyOffRunningError")]
  313. public IoAlarmSignal AlarmSignalFIMS1LatchKeyOffRunningError { get; set; }
  314. [Tag("AlarmSignalFIMS1N2ReleaseRunningError")]
  315. public IoAlarmSignal AlarmSignalFIMS1N2ReleaseRunningError { get; set; }
  316. [Tag("AlarmSignalFIMS1N2SealRunningError")]
  317. public IoAlarmSignal AlarmSignalFIMS1N2SealRunningError { get; set; }
  318. [Tag("AlarmSignalFIMS2UnDockRunningError")]
  319. public IoAlarmSignal AlarmSignalFIMS2UnDockRunningError { get; set; }
  320. [Tag("AlarmSignalFIMS2DockRunningError")]
  321. public IoAlarmSignal AlarmSignalFIMS2DockRunningError { get; set; }
  322. [Tag("AlarmSignalFIMS2VacuumOffRunningError")]
  323. public IoAlarmSignal AlarmSignalFIMS2VacuumOffRunningError { get; set; }
  324. [Tag("AlarmSignalFIMS2VacuumOnRunningError")]
  325. public IoAlarmSignal AlarmSignalFIMS2VacuumOnRunningError { get; set; }
  326. [Tag("AlarmSignalFIMS2N2Closed")]
  327. public IoAlarmSignal AlarmSignalFIMS2N2Closed { get; set; }
  328. [Tag("AlarmSignalFIMS2N2Opened")]
  329. public IoAlarmSignal AlarmSignalFIMS2N2Opened { get; set; }
  330. [Tag("AlarmSignalFIMS2SealRunningError")]
  331. public IoAlarmSignal AlarmSignalFIMS2SealRunningError { get; set; }
  332. [Tag("AlarmSignalFIMS2ReleaseRunningError")]
  333. public IoAlarmSignal AlarmSignalFIMS2ReleaseRunningError { get; set; }
  334. [Tag("AlarmSignalFIMS2SlideCloseRunningError")]
  335. public IoAlarmSignal AlarmSignalFIMS2SlideCloseRunningError { get; set; }
  336. [Tag("AlarmSignalFIMS2SlideOpenRunningError")]
  337. public IoAlarmSignal AlarmSignalFIMS2SlideOpenRunningError { get; set; }
  338. [Tag("AlarmSignalFIMS2LatchKeyOnRunningError")]
  339. public IoAlarmSignal AlarmSignalFIMS2LatchKeyOnRunningError { get; set; }
  340. [Tag("AlarmSignalFIMS2LatchKeyOffRunningError")]
  341. public IoAlarmSignal AlarmSignalFIMS2LatchKeyOffRunningError { get; set; }
  342. [Tag("AlarmSignalFIMS2N2ReleaseRunningError")]
  343. public IoAlarmSignal AlarmSignalFIMS2N2ReleaseRunningError { get; set; }
  344. [Tag("AlarmSignalFIMS2N2SealRunningError")]
  345. public IoAlarmSignal AlarmSignalFIMS2N2SealRunningError { get; set; }
  346. [Tag("AlarmSignalO2ConcentrationHI")]
  347. public IoAlarmSignal AlarmSignalO2ConcentrationHI { get; set; }
  348. [Tag("AlarmSignalO2ConcentrationLow")]
  349. public IoAlarmSignal AlarmSignalO2ConcentrationLow { get; set; }
  350. [Tag("AlarmSignalO2ConcentrationEcho1")]
  351. public IoAlarmSignal AlarmSignalO2ConcentrationEcho1 { get; set; }
  352. [Tag("AlarmSignalO2ConcentrationEcho2")]
  353. public IoAlarmSignal AlarmSignalO2ConcentrationEcho2 { get; set; }
  354. [Tag("AlarmSignalSMK1DetectorSensorOperates")]
  355. public IoAlarmSignal AlarmSignalSMK1DetectorSensorOperates { get; set; }
  356. [Tag("AlarmSignalSMK1DetectorSensorFireAlarm")]
  357. public IoAlarmSignal AlarmSignalSMK1DetectorSensorFireAlarm { get; set; }
  358. [Tag("AlarmSignalSMK1DetectorSensorFault")]
  359. public IoAlarmSignal AlarmSignalSMK1DetectorSensorFault { get; set; }
  360. [Tag("AlarmSignalHCLGasLeak1stAlarm")]
  361. public IoAlarmSignal AlarmSignalHCLGasLeak1stAlarm { get; set; }
  362. [Tag("AlarmSignalHCLGasLeak2ndAlarm")]
  363. public IoAlarmSignal AlarmSignalHCLGasLeak2ndAlarm { get; set; }
  364. [Tag("AlarmSignalNH3GasLeak1stAlarm")]
  365. public IoAlarmSignal AlarmSignalNH3GasLeak1stAlarm { get; set; }
  366. [Tag("AlarmSignalNH3GasLeak2ndAlarm")]
  367. public IoAlarmSignal AlarmSignalNH3GasLeak2ndAlarm { get; set; }
  368. [Tag("AlarmSignalF2GasLeak1stAlarm")]
  369. public IoAlarmSignal AlarmSignalF2GasLeak1stAlarm { get; set; }
  370. [Tag("AlarmSignalF2GasLeak2ndAlarm")]
  371. public IoAlarmSignal AlarmSignalF2GasLeak2ndAlarm { get; set; }
  372. [Tag("AlarmSignalGasLeakFault")]
  373. public IoAlarmSignal AlarmSignalGasLeakFault { get; set; }
  374. [Tag("AlarmSignalTS34RotationTempSW")]
  375. public IoAlarmSignal AlarmSignalTS34RotationTempSW { get; set; }
  376. [Tag("AlarmSignalTS30CapInsideTempSW")]
  377. public IoAlarmSignal AlarmSignalTS30CapInsideTempSW { get; set; }
  378. [Tag("AlarmSignalTS31CapOutsideTempSW")]
  379. public IoAlarmSignal AlarmSignalTS31CapOutsideTempSW { get; set; }
  380. [Tag("AlarmSignalGasBoxLowerDoorSW")]
  381. public IoAlarmSignal AlarmSignalGasBoxLowerDoorSW { get; set; }
  382. [Tag("AlarmSignalGasBoxUpperDoorSW")]
  383. public IoAlarmSignal AlarmSignalGasBoxUpperDoorSW { get; set; }
  384. [Tag("AlarmSignalEXHBoxWaterLeak")]
  385. public IoAlarmSignal AlarmSignalEXHBoxWaterLeak { get; set; }
  386. [Tag("AlarmSignalOPPanelEMO1")]
  387. public IoAlarmSignal AlarmSignalOPPanelEMO1 { get; set; }
  388. [Tag("AlarmSignalOPPanelEMO2")]
  389. public IoAlarmSignal AlarmSignalOPPanelEMO2 { get; set; }
  390. [Tag("AlarmSignalMainFurnaceCellingTS306")]
  391. public IoAlarmSignal AlarmSignalMainFurnaceCellingTS306 { get; set; }
  392. [Tag("AlarmSignalHeaterRoomSWS11S12")]
  393. public IoAlarmSignal AlarmSignalHeaterRoomSWS11S12 { get; set; }
  394. [Tag("AlarmSignalFilterBox1DoorSwitch")]
  395. public IoAlarmSignal AlarmSignalFilterBox1DoorSwitch { get; set; }
  396. [Tag("AlarmSignalLABacksideDoorSwitch")]
  397. public IoAlarmSignal AlarmSignalLABacksideDoorSwitch { get; set; }
  398. [Tag("AlarmSignalRHCTS305")]
  399. public IoAlarmSignal AlarmSignalRHCTS305 { get; set; }
  400. [Tag("AlarmSignalGasBoxExhaust1stAlarmMS2")]
  401. public IoAlarmSignal AlarmSignalGasBoxExhaust1stAlarmMS2 { get; set; }
  402. [Tag("AlarmSignalGasBoxExhaust2ndAlarmMS2")]
  403. public IoAlarmSignal AlarmSignalGasBoxExhaust2ndAlarmMS2 { get; set; }
  404. [Tag("AlarmSignalMachineEMO1")]
  405. public IoAlarmSignal AlarmSignalMachineEMO1 { get; set; }
  406. [Tag("AlarmSignalMachineEMO2")]
  407. public IoAlarmSignal AlarmSignalMachineEMO2 { get; set; }
  408. [Tag("AlarmSignalT101TempStatus")]
  409. public IoAlarmSignal AlarmSignalT101TempStatus { get; set; }
  410. [Tag("AlarmSignalT102TempStatus")]
  411. public IoAlarmSignal AlarmSignalT102TempStatus { get; set; }
  412. [Tag("AlarmSignalT103TempStatus")]
  413. public IoAlarmSignal AlarmSignalT103TempStatus { get; set; }
  414. [Tag("AlarmSignalBufferMotorHardwareInterlockAlarm")]
  415. public IoAlarmSignal AlarmSignalBufferMotorHardwareInterlockAlarm { get; set; }
  416. [Tag("AlarmSignalBoatLiftMotorHardwareInterlockAlarm")]
  417. public IoAlarmSignal AlarmSignalBoatLiftMotorHardwareInterlockAlarm { get; set; }
  418. [Tag("AlarmSignalHFReconciliationPressureMinAbnormal")]
  419. public IoAlarmSignal AlarmSignalHFReconciliationPressureMinAbnormal { get; set; }
  420. [Tag("AlarmSignalMagneticFluidLeak")]
  421. public IoAlarmSignal AlarmSignalMagneticFluidLeak { get; set; }
  422. [Tag("AlarmSignalCoolingWaterLeak")]
  423. public IoAlarmSignal AlarmSignalCoolingWaterLeak { get; set; }
  424. [Tag("AlarmSignalMachineEMS1")]
  425. public IoAlarmSignal AlarmSignalMachineEMS1 { get; set; }
  426. [Tag("AlarmSignalMachineEMS2")]
  427. public IoAlarmSignal AlarmSignalMachineEMS2 { get; set; }
  428. [Tag("AlarmSignalFBLightCurtainFault")]
  429. public IoAlarmSignal AlarmSignalFBLightCurtainFault { get; set; }
  430. [Tag("AlarmSignalFBLightCurtainOSSD1")]
  431. public IoAlarmSignal AlarmSignalFBLightCurtainOSSD1 { get; set; }
  432. [Tag("AlarmSignalFBLightCurtainOSSD2")]
  433. public IoAlarmSignal AlarmSignalFBLightCurtainOSSD2 { get; set; }
  434. [Tag("AlarmSignalFBEMO1")]
  435. public IoAlarmSignal AlarmSignalFBEMO1 { get; set; }
  436. [Tag("AlarmSignalFBEMO2")]
  437. public IoAlarmSignal AlarmSignalFBEMO2 { get; set; }
  438. [Tag("AlarmSignalDoorOverride")]
  439. public IoAlarmSignal AlarmSignalDoorOverride { get; set; }
  440. [Tag("AlarmSignalFBFrontDoorSwitch")]
  441. public IoAlarmSignal AlarmSignalFBFrontDoorSwitch { get; set; }
  442. [Tag("AlarmSignalGLBoxPG1CNT1Alarm")]
  443. public IoAlarmSignal AlarmSignalGLBoxPG1CNT1Alarm { get; set; }
  444. [Tag("AlarmSignalGLBoxPG1CNT2Alarm")]
  445. public IoAlarmSignal AlarmSignalGLBoxPG1CNT2Alarm { get; set; }
  446. [Tag("AlarmSignalGLBoxPG2CNT1Alarm")]
  447. public IoAlarmSignal AlarmSignalGLBoxPG2CNT1Alarm { get; set; }
  448. [Tag("AlarmSignalGLBoxPG2CNT2Alarm")]
  449. public IoAlarmSignal AlarmSignalGLBoxPG2CNT2Alarm { get; set; }
  450. [Tag("AlarmSignalGLBoxPG3CNT1Alarm")]
  451. public IoAlarmSignal AlarmSignalGLBoxPG3CNT1Alarm { get; set; }
  452. [Tag("AlarmSignalGLBoxPG3CNT2Alarm")]
  453. public IoAlarmSignal AlarmSignalGLBoxPG3CNT2Alarm { get; set; }
  454. [Tag("AlarmSignalGLBoxPG4CNT1Alarm")]
  455. public IoAlarmSignal AlarmSignalGLBoxPG4CNT1Alarm { get; set; }
  456. [Tag("AlarmSignalGLBoxPG4CNT2Alarm")]
  457. public IoAlarmSignal AlarmSignalGLBoxPG4CNT2Alarm { get; set; }
  458. [Tag("AlarmSignalGLBoxPG5CNT1Alarm")]
  459. public IoAlarmSignal AlarmSignalGLBoxPG5CNT1Alarm { get; set; }
  460. [Tag("AlarmSignalGLBoxPG5CNT2Alarm")]
  461. public IoAlarmSignal AlarmSignalGLBoxPG5CNT2Alarm { get; set; }
  462. [Tag("AlarmSignalGLBoxPG6CNT1Alarm")]
  463. public IoAlarmSignal AlarmSignalGLBoxPG6CNT1Alarm { get; set; }
  464. [Tag("AlarmSignalGLBoxPG6CNT2Alarm")]
  465. public IoAlarmSignal AlarmSignalGLBoxPG6CNT2Alarm { get; set; }
  466. [Tag("AlarmSignalGLBoxVG21Status")]
  467. public IoAlarmSignal AlarmSignalGLBoxVG21Output1 { get; set; }
  468. [Tag("AlarmSignalGLBoxVG21Output2")]
  469. public IoAlarmSignal AlarmSignalGLBoxVG21Output2 { get; set; }
  470. [Tag("AlarmSignalGLBoxVG22Output1")]
  471. public IoAlarmSignal AlarmSignalGLBoxVG22Output1 { get; set; }
  472. [Tag("AlarmSignalGLBoxVG22Output2")]
  473. public IoAlarmSignal AlarmSignalGLBoxVG22Output2 { get; set; }
  474. [Tag("AlarmSignalGLBoxVG32Output1")]
  475. public IoAlarmSignal AlarmSignalGLBoxVG32Output1 { get; set; }
  476. [Tag("AlarmSignalGLBoxVG32Output2")]
  477. public IoAlarmSignal AlarmSignalGLBoxVG32Output2 { get; set; }
  478. [Tag("AlarmSignalGLBoxVG33Output1")]
  479. public IoAlarmSignal AlarmSignalGLBoxVG33Output1 { get; set; }
  480. [Tag("AlarmSignalGLBoxVG33Output2")]
  481. public IoAlarmSignal AlarmSignalGLBoxVG33Output2 { get; set; }
  482. [Tag("AlarmSignalHeatingExhaust1stAlarmMS1")]
  483. public IoAlarmSignal AlarmSignalHeatingExhaust1stAlarmMS1 { get; set; }
  484. [Tag("AlarmSignalHeatingExhaust2ndAlarmMS1")]
  485. public IoAlarmSignal AlarmSignalHeatingExhaust2ndAlarmMS1 { get; set; }
  486. [Tag("AlarmSignalScavengeExhaust1stAlarmMS3")]
  487. public IoAlarmSignal AlarmSignalScavengeExhaust1stAlarmMS3 { get; set; }
  488. [Tag("AlarmSignalScavengeExhaust2ndAlarmMS3")]
  489. public IoAlarmSignal AlarmSignalScavengeExhaust2ndAlarmMS3 { get; set; }
  490. [Tag("AlarmSignalValveBoxExhaust1stAlarmMS4")]
  491. public IoAlarmSignal AlarmSignalValveBoxExhaust1stAlarmMS4 { get; set; }
  492. [Tag("AlarmSignalValveBoxExhaust2ndAlarmMS4")]
  493. public IoAlarmSignal AlarmSignalValveBoxExhaust2ndAlarmMS4 { get; set; }
  494. [Tag("AlarmSignalLoadingAreaExhaust1stAlarmMS5")]
  495. public IoAlarmSignal AlarmSignalLoadingAreaExhaust1stAlarmMS5 { get; set; }
  496. [Tag("AlarmSignalLoadingAreaExhaust2ndAlarmMS5")]
  497. public IoAlarmSignal AlarmSignalLoadingAreaExhaust2ndAlarmMS5 { get; set; }
  498. [Tag("AlarmSignalFrontBodyExhaust1stAlarmMS6")]
  499. public IoAlarmSignal AlarmSignalFrontBodyExhaust1stAlarmMS6 { get; set; }
  500. [Tag("AlarmSignalFrontBodyExhaust2ndAlarmMS6")]
  501. public IoAlarmSignal AlarmSignalFrontBodyExhaust2ndAlarmMS6 { get; set; }
  502. [Tag("AlarmSignalLAExhaust1stAlarmMS321")]
  503. public IoAlarmSignal AlarmSignalLAExhaust1stAlarmMS321 { get; set; }
  504. [Tag("AlarmSignalLAExhaust2ndAlarmMS321")]
  505. public IoAlarmSignal AlarmSignalLAExhaust2ndAlarmMS321 { get; set; }
  506. [Tag("AlarmSignalRHC1stAlarmMS8")]
  507. public IoAlarmSignal AlarmSignalRHC1stAlarmMS8 { get; set; }
  508. [Tag("AlarmSignalRHC2ndAlarmMS8")]
  509. public IoAlarmSignal AlarmSignalRHC2ndAlarmMS8 { get; set; }
  510. [Tag("AlarmSignalREV1stAlarmMS9")]
  511. public IoAlarmSignal AlarmSignalREV1stAlarmMS9 { get; set; }
  512. [Tag("AlarmSignalREV2ndAlarmMS9")]
  513. public IoAlarmSignal AlarmSignalREV2ndAlarmMS9 { get; set; }
  514. [Tag("AlarmSignalREV1stAlarmMS10")]
  515. public IoAlarmSignal AlarmSignalREV1stAlarmMS10 { get; set; }
  516. [Tag("AlarmSignalREV2ndAlarmMS10")]
  517. public IoAlarmSignal AlarmSignalREV2ndAlarmMS10 { get; set; }
  518. [Tag("AlarmSignalOPBoxPS11Out1")]
  519. public IoAlarmSignal AlarmSignalOPBoxPS11Out1 { get; set; }
  520. [Tag("AlarmSignalOPBoxPS11Out2")]
  521. public IoAlarmSignal AlarmSignalOPBoxPS11Out2 { get; set; }
  522. [Tag("AlarmSignalRHCFlowAlarmFL901")]
  523. public IoAlarmSignal AlarmSignalRHCFlowAlarmFL901 { get; set; }
  524. [Tag("AlarmSignalCoolingWaterFlowAlarmOfFurnaceFL902")]
  525. public IoAlarmSignal AlarmSignalCoolingWaterFlowAlarmOfFurnaceFL902 { get; set; }
  526. [Tag("AlarmSignalCoolingWaterFlowAlarmOfShuttleFL903")]
  527. public IoAlarmSignal AlarmSignalCoolingWaterFlowAlarmOfShuttleFL903 { get; set; }
  528. [Tag("AlarmSignalCoolingWaterFlowAlarmOfBoatRotationFL904")]
  529. public IoAlarmSignal AlarmSignalCoolingWaterFlowAlarmOfBoatRotationFL904 { get; set; }
  530. [Tag("AlarmSignalCoolingWaterFlowAlarmOfFlangeFL905")]
  531. public IoAlarmSignal AlarmSignalCoolingWaterFlowAlarmOfFlangeFL905 { get; set; }
  532. [Tag("AlarmSignalCoolingWaterFlowAlarmOfLoadingAreaFL906")]
  533. public IoAlarmSignal AlarmSignalCoolingWaterFlowAlarmOfLoadingAreaFL906 { get; set; }
  534. [Tag("AlarmSignalVG11LowAlarm")]
  535. public IoAlarmSignal AlarmSignalVG11LowAlarm { get; set; }
  536. [Tag("AlarmSignalVG11HighAlarm")]
  537. public IoAlarmSignal AlarmSignalVG11HighAlarm { get; set; }
  538. [Tag("AlarmSignalVG12LowAlarm")]
  539. public IoAlarmSignal AlarmSignalVG12LowAlarm { get; set; }
  540. [Tag("AlarmSignalVG12HighAlarm")]
  541. public IoAlarmSignal AlarmSignalVG12HighAlarm { get; set; }
  542. [Tag("AlarmSignalVG13LowAlarm")]
  543. public IoAlarmSignal AlarmSignalVG13LowAlarm { get; set; }
  544. [Tag("AlarmSignalVG13HighAlarm")]
  545. public IoAlarmSignal AlarmSignalVG13HighAlarm { get; set; }
  546. [Tag("AlarmSignalPG12OUT1")]
  547. public IoAlarmSignal AlarmSignalPG12OUT1 { get; set; }
  548. [Tag("AlarmSignalPG12OUT2")]
  549. public IoAlarmSignal AlarmSignalPG12OUT2 { get; set; }
  550. [Tag("AlarmSignalPG13OUT1")]
  551. public IoAlarmSignal AlarmSignalPG13OUT1 { get; set; }
  552. [Tag("AlarmSignalPG13OUT2")]
  553. public IoAlarmSignal AlarmSignalPG13OUT2 { get; set; }
  554. [Tag("AlarmSignalPS14OUT1")]
  555. public IoAlarmSignal AlarmSignalPS14OUT1 { get; set; }
  556. [Tag("AlarmSignalPS14OUT2")]
  557. public IoAlarmSignal AlarmSignalPS14OUT2 { get; set; }
  558. [Tag("AlarmSignalCoolingWaterPressureOut1")]
  559. public IoAlarmSignal AlarmSignalCoolingWaterPressureOut1 { get; set; }
  560. [Tag("AlarmSignalCoolingWaterPressureOut2")]
  561. public IoAlarmSignal AlarmSignalCoolingWaterPressureOut2 { get; set; }
  562. [Tag("AlarmSignalAirFlowFL70")]
  563. public IoAlarmSignal AlarmSignalAirFlowFL70 { get; set; }
  564. [Tag("AlarmSignalAirFlowFL71")]
  565. public IoAlarmSignal AlarmSignalAirFlowFL71 { get; set; }
  566. [Tag("AlarmSignalAirFlowFL72")]
  567. public IoAlarmSignal AlarmSignalAirFlowFL72 { get; set; }
  568. [Tag("AlarmSignalWaterFlowFL62")]
  569. public IoAlarmSignal AlarmSignalWaterFlowFL62 { get; set; }
  570. [Tag("AlarmSignalUPSFault")]
  571. public IoAlarmSignal AlarmSignalUPSFault { get; set; }
  572. [Tag("AlarmSignalUPSAlarm")]
  573. public IoAlarmSignal AlarmSignalUPSAlarm { get; set; }
  574. [Tag("AlarmSignalK141UPSAlarm")]
  575. public IoAlarmSignal AlarmSignalK141UPSAlarm { get; set; }
  576. [Tag("AlarmSignalK169UPSAlarm")]
  577. public IoAlarmSignal AlarmSignalK169UPSAlarm { get; set; }
  578. [Tag("AlarmSignalN2PurgeBOXPG14CNT1")]
  579. public IoAlarmSignal AlarmSignalN2PurgeBOXPG14CNT1 { get; set; }
  580. [Tag("AlarmSignalN2PurgeBOXPG14CNT2")]
  581. public IoAlarmSignal AlarmSignalN2PurgeBOXPG14CNT2 { get; set; }
  582. [Tag("AlarmSignalN2PurgeBOXPG15CNT1")]
  583. public IoAlarmSignal AlarmSignalN2PurgeBOXPG15CNT1 { get; set; }
  584. [Tag("AlarmSignalN2PurgeBOXPG15CNT2")]
  585. public IoAlarmSignal AlarmSignalN2PurgeBOXPG15CNT2 { get; set; }
  586. [Tag("AlarmSignalN2PurgeBOXPG16CNT1")]
  587. public IoAlarmSignal AlarmSignalN2PurgeBOXPG16CNT1 { get; set; }
  588. [Tag("AlarmSignalN2PurgeBOXPG16CNT2")]
  589. public IoAlarmSignal AlarmSignalN2PurgeBOXPG16CNT2 { get; set; }
  590. [Tag("AlarmSignalN2PurgeBOXPG70CNT1")]
  591. public IoAlarmSignal AlarmSignalN2PurgeBOXPG70CNT1 { get; set; }
  592. [Tag("AlarmSignalN2PurgeBOXPG70CNT2")]
  593. public IoAlarmSignal AlarmSignalN2PurgeBOXPG70CNT2 { get; set; }
  594. [Tag("AlarmSignalPS17ValueLowLimitAlarm")]
  595. public IoAlarmSignal AlarmSignalPS17ValueLowLimitAlarm { get; set; }
  596. [Tag("AlarmSignalVaccumPumpWarning")]
  597. public IoAlarmSignal AlarmSignalVaccumPumpWarning { get; set; }
  598. [Tag("AlarmSignalVaccumPumpAlarm")]
  599. public IoAlarmSignal AlarmSignalVaccumPumpAlarm { get; set; }
  600. [Tag("AlarmSignalFilterBox1Fan1Alarm")]
  601. public IoAlarmSignal AlarmSignalFilterBox1Fan1Alarm { get; set; }
  602. [Tag("AlarmSignalFilterBox1Fan2Alarm")]
  603. public IoAlarmSignal AlarmSignalFilterBox1Fan2Alarm { get; set; }
  604. [Tag("AlarmSignalStepperMotorAlarm")]
  605. public IoAlarmSignal AlarmSignalStepperMotorAlarm { get; set; }
  606. [Tag("AlarmSignalRFAlarm")]
  607. public IoAlarmSignal AlarmSignalRFAlarm { get; set; }
  608. [Tag("AlarmSignalForelineHeaterJacketLightAlarm")]
  609. public IoAlarmSignal AlarmSignalForelineHeaterJacketLightAlarm { get; set; }
  610. [Tag("AlarmSignalForelineHeaterJacketHeavyAlarm")]
  611. public IoAlarmSignal AlarmSignalForelineHeaterJacketHeavyAlarm { get; set; }
  612. [Tag("AlarmSignalScrubberWarning")]
  613. public IoAlarmSignal AlarmSignalScrubberWarning { get; set; }
  614. [Tag("AlarmSignalScrubberAlarm")]
  615. public IoAlarmSignal AlarmSignalScrubberAlarm { get; set; }
  616. [Tag("AlarmSignalNegLmtPosBoatZAxis")]
  617. public IoAlarmSignal AlarmSignalNegLmtPosBoatZAxis { get; set; }
  618. [Tag("AlarmSignalPotLmtPosBoatZAxis")]
  619. public IoAlarmSignal AlarmSignalPotLmtPosBoatZAxis { get; set; }
  620. [Tag("AlarmSignalLAFFUCommAlarm")]
  621. public IoAlarmSignal AlarmSignalLAFFUCommAlarm { get; set; }
  622. [Tag("AlarmSignaAPCCommAlarm")]
  623. public IoAlarmSignal AlarmSignaAPCCommAlarm { get; set; }
  624. [Tag("AlarmSignalMINI8CommAlarm")]
  625. public IoAlarmSignal AlarmSignalMINI8CommAlarm { get; set; }
  626. [Tag("AlarmSignaMainWaterFlowAlarm")]
  627. public IoAlarmSignal AlarmSignaMainWaterFlowAlarm { get; set; }
  628. [Tag("AlarmSignalFurnaceMainCircuitBreakerStatusMonitor")]
  629. public IoAlarmSignal AlarmSignalFurnaceMainCircuitBreakerStatusMonitor { get; set; }
  630. [Tag("AlarmSignalPumpDown")]
  631. public IoAlarmSignal AlarmSignalPumpDown { get; set; }
  632. [Tag("AlarmSignalPS13HStatus")]
  633. public IoAlarmSignal AlarmSignalPS13HStatus { get; set; }
  634. [Tag("AlarmSignalPS13LStatus")]
  635. public IoAlarmSignal AlarmSignalPS13LStatus { get; set; }
  636. [Tag("AlarmSignalDG1Output1")]
  637. public IoAlarmSignal AlarmSignalDG1Output1 { get; set; }
  638. [Tag("AlarmSignalDG1Output2")]
  639. public IoAlarmSignal AlarmSignalDG1Output2 { get; set; }
  640. [Tag("AlarmSignalAV91_1RHCAirInOpened")]
  641. public IoAlarmSignal AlarmSignalAV91_1RHCAirInOpened { get; set; }
  642. [Tag("AlarmSignalAV91_2RHCAirInOpened")]
  643. public IoAlarmSignal AlarmSignalAV91_2RHCAirInOpened { get; set; }
  644. [Tag("AlarmSignalAV91_3RHCAirInOpened")]
  645. public IoAlarmSignal AlarmSignalAV91_3RHCAirInOpened { get; set; }
  646. [Tag("AlarmSignalAV91_4RHCAirInOpened")]
  647. public IoAlarmSignal AlarmSignalAV91_4RHCAirInOpened { get; set; }
  648. [Tag("AlarmSignalBlowerPower")]
  649. public IoAlarmSignal AlarmSignalBlowerPower { get; set; }
  650. [Tag("AlarmSignalRFSetPowerReached")]
  651. public IoAlarmSignal AlarmSignalRFSetPowerReached { get; set; }
  652. [Tag("AlarmSignalN2FlowInFOUPAbnormal")]
  653. public IoAlarmSignal AlarmSignalN2FlowInFOUPAbnormal { get; set; }
  654. [Tag("AlarmSignalCapHeaterAbnormal")]
  655. public IoAlarmSignal AlarmSignalCapHeaterAbnormal { get; set; }
  656. [Tag("AlarmSignalHeaterUOverTemp")]
  657. public IoAlarmSignal AlarmSignalHeaterUOverTemp { get; set; }
  658. [Tag("AlarmSignalHeaterCUOverTemp")]
  659. public IoAlarmSignal AlarmSignalHeaterCUOverTemp { get; set; }
  660. [Tag("AlarmSignalHeaterCOverTemp")]
  661. public IoAlarmSignal AlarmSignalHeaterCOverTemp { get; set; }
  662. [Tag("AlarmSignalHeaterCLOverTemp")]
  663. public IoAlarmSignal AlarmSignalHeaterCLOverTemp { get; set; }
  664. [Tag("AlarmSignalHeaterLOverTemp")]
  665. public IoAlarmSignal AlarmSignalHeaterLOverTemp { get; set; }
  666. [Tag("AlarmSignaBoatRAxisAlarm")]
  667. public IoAlarmSignal AlarmSignaBoatRAxisAlarm { get; set; }
  668. [Tag("AlarmSignaBoatRAxisWarning")]
  669. public IoAlarmSignal AlarmSignaBoatRAxisWarning { get; set; }
  670. [Tag("AlarmSignaBoatZAxisWarning")]
  671. public IoAlarmSignal AlarmSignaBoatZAxisWarning { get; set; }
  672. [Tag("AlarmSignaBoatZAxisAlarm")]
  673. public IoAlarmSignal AlarmSignaBoatZAxisAlarm { get; set; }
  674. [Tag("AlarmSignaGasHeaterSensorBreakOutAlarm")]
  675. public IoAlarmSignal AlarmSignaGasHeaterSensorBreakOutAlarm { get; set; }
  676. [Tag("AlarmSignaTempLimitAlarm")]
  677. public IoAlarmSignal AlarmSignaTempLimitAlarm { get; set; }
  678. [Tag("AlarmSignalLAO2CheckOTWarning")]
  679. public IoAlarmSignal AlarmSignalLAO2CheckOTWarning { get; set; }
  680. [Tag("AlarmSignalFIMS1O2CheckOTWarning")]
  681. public IoAlarmSignal AlarmSignalFIMS1O2CheckOTWarning { get; set; }
  682. [Tag("AlarmSignalFIMS2O2CheckOTWarning")]
  683. public IoAlarmSignal AlarmSignalFIMS2O2CheckOTWarning { get; set; }
  684. [Tag("AlarmSignalHeaterUCascadePVSBrk")]
  685. public IoAlarmSignal AlarmSignalHeaterUCascadePVSBrk { get; set; }
  686. [Tag("AlarmSignalHeaterUHeaterPVSBrk")]
  687. public IoAlarmSignal AlarmSignalHeaterUHeaterPVSBrk { get; set; }
  688. [Tag("AlarmSignalHeaterCUCascadePVSBrk")]
  689. public IoAlarmSignal AlarmSignalHeaterCUCascadePVSBrk { get; set; }
  690. [Tag("AlarmSignalHeaterCUHeaterPVSBrk")]
  691. public IoAlarmSignal AlarmSignalHeaterCUHeaterPVSBrk { get; set; }
  692. [Tag("AlarmSignalHeaterCCascadePVSBrk")]
  693. public IoAlarmSignal AlarmSignalHeaterCCascadePVSBrk { get; set; }
  694. [Tag("AlarmSignalHeaterCHeaterPVSBrk")]
  695. public IoAlarmSignal AlarmSignalHeaterCHeaterPVSBrk { get; set; }
  696. [Tag("AlarmSignalHeaterCLCascadePVSBrk")]
  697. public IoAlarmSignal AlarmSignalHeaterCLCascadePVSBrk { get; set; }
  698. [Tag("AlarmSignalHeaterCLHeaterPVSBrk")]
  699. public IoAlarmSignal AlarmSignalHeaterCLHeaterPVSBrk { get; set; }
  700. [Tag("AlarmSignalHeaterLCascadePVSBrk")]
  701. public IoAlarmSignal AlarmSignalHeaterLCascadePVSBrk { get; set; }
  702. [Tag("AlarmSignalHeaterLHeaterPVSBrk")]
  703. public IoAlarmSignal AlarmSignalHeaterLHeaterPVSBrk { get; set; }
  704. [Tag("GasLine1AlarmSignalTempOutRange")]
  705. public IoAlarmSignal GasLine1AlarmSignalTempOutRange { get; set; }
  706. [Tag("GasLine2AlarmSignalTempOutRange")]
  707. public IoAlarmSignal GasLine2AlarmSignalTempOutRange { get; set; }
  708. [Tag("GasLine3AlarmSignalTempOutRange")]
  709. public IoAlarmSignal GasLine3AlarmSignalTempOutRange { get; set; }
  710. [Tag("GasLine4AlarmSignalTempOutRange")]
  711. public IoAlarmSignal GasLine4AlarmSignalTempOutRange { get; set; }
  712. [Tag("GasLine6AlarmSignalTempOutRange")]
  713. public IoAlarmSignal GasLine6AlarmSignalTempOutRange { get; set; }
  714. [Tag("GasLine7AlarmSignalTempOutRange")]
  715. public IoAlarmSignal GasLine7AlarmSignalTempOutRange { get; set; }
  716. [Tag("GasLine1AlarmSignalCLN")]
  717. public IoAlarmSignal GasLine1AlarmSignalCLN { get; set; }
  718. [Tag("GasLine2AlarmSignalCLN")]
  719. public IoAlarmSignal GasLine2AlarmSignalCLN { get; set; }
  720. [Tag("GasLine3AlarmSignalCLN")]
  721. public IoAlarmSignal GasLine3AlarmSignalCLN { get; set; }
  722. [Tag("GasLine4AlarmSignalCLN")]
  723. public IoAlarmSignal GasLine4AlarmSignalCLN { get; set; }
  724. [Tag("GasLine6AlarmSignalCLN")]
  725. public IoAlarmSignal GasLine6AlarmSignalCLN { get; set; }
  726. [Tag("GasLine7AlarmSignalCLN")]
  727. public IoAlarmSignal GasLine7AlarmSignalCLN { get; set; }
  728. [Tag("AlarmSignalHCL1GasLeak1stAlarm")]
  729. public IoAlarmSignal AlarmSignalHCL1GasLeak1stAlarm { get; set; }
  730. [Tag("AlarmSignalHCL1GasLeak2ndAlarm")]
  731. public IoAlarmSignal AlarmSignalHCL1GasLeak2ndAlarm { get; set; }
  732. [Tag("AlarmSignalHCL2GasLeak1stAlarm")]
  733. public IoAlarmSignal AlarmSignalHCL2GasLeak1stAlarm { get; set; }
  734. [Tag("AlarmSignalHCL2GasLeak2ndAlarm")]
  735. public IoAlarmSignal AlarmSignalHCL2GasLeak2ndAlarm { get; set; }
  736. [Tag("AlarmSignalNH31GasLeak1stAlarm")]
  737. public IoAlarmSignal AlarmSignalNH31GasLeak1stAlarm { get; set; }
  738. [Tag("AlarmSignalNH31GasLeak2ndAlarm")]
  739. public IoAlarmSignal AlarmSignalNH31GasLeak2ndAlarm { get; set; }
  740. [Tag("AlarmSignalNH32GasLeak1stAlarm")]
  741. public IoAlarmSignal AlarmSignalNH32GasLeak1stAlarm { get; set; }
  742. [Tag("AlarmSignalNH32GasLeak2ndAlarm")]
  743. public IoAlarmSignal AlarmSignalNH32GasLeak2ndAlarm { get; set; }
  744. [Tag("AlarmSignalF21GasLeak1stAlarm")]
  745. public IoAlarmSignal AlarmSignalF21GasLeak1stAlarm { get; set; }
  746. [Tag("AlarmSignalF21GasLeak2ndAlarm")]
  747. public IoAlarmSignal AlarmSignalF21GasLeak2ndAlarm { get; set; }
  748. [Tag("AlarmSignalF22GasLeak1stAlarm")]
  749. public IoAlarmSignal AlarmSignalF22GasLeak1stAlarm { get; set; }
  750. [Tag("AlarmSignalF22GasLeak2ndAlarm")]
  751. public IoAlarmSignal AlarmSignalF22GasLeak2ndAlarm { get; set; }
  752. [Tag("AlarmSignalNO1GasLeak1stAlarm")]
  753. public IoAlarmSignal AlarmSignalNO1GasLeak1stAlarm { get; set; }
  754. [Tag("AlarmSignalNO1GasLeak2ndAlarm")]
  755. public IoAlarmSignal AlarmSignalNO1GasLeak2ndAlarm { get; set; }
  756. [Tag("AlarmSignalNO2GasLeak1stAlarm")]
  757. public IoAlarmSignal AlarmSignalNO2GasLeak1stAlarm { get; set; }
  758. [Tag("AlarmSignalNO2GasLeak2ndAlarm")]
  759. public IoAlarmSignal AlarmSignalNO2GasLeak2ndAlarm { get; set; }
  760. [Tag("AlarmSignalC3H61GasLeak1stAlarm")]
  761. public IoAlarmSignal AlarmSignalC3H61GasLeak1stAlarm { get; set; }
  762. [Tag("AlarmSignalC3H61GasLeak2ndAlarm")]
  763. public IoAlarmSignal AlarmSignalC3H61GasLeak2ndAlarm { get; set; }
  764. [Tag("AlarmSignalC3H62GasLeak1stAlarm")]
  765. public IoAlarmSignal AlarmSignalC3H62GasLeak1stAlarm { get; set; }
  766. [Tag("AlarmSignalC3H62GasLeak2ndAlarm")]
  767. public IoAlarmSignal AlarmSignalC3H62GasLeak2ndAlarm { get; set; }
  768. [Tag("AlarmSignalDMA1GasLeak1stAlarm")]
  769. public IoAlarmSignal AlarmSignalDMA1GasLeak1stAlarm { get; set; }
  770. [Tag("AlarmSignalDMA1GasLeak2ndAlarm")]
  771. public IoAlarmSignal AlarmSignalDMA1GasLeak2ndAlarm { get; set; }
  772. [Tag("AlarmSignalDMA2GasLeak1stAlarm")]
  773. public IoAlarmSignal AlarmSignalDMA2GasLeak1stAlarm { get; set; }
  774. [Tag("AlarmSignalDMA2GasLeak2ndAlarm")]
  775. public IoAlarmSignal AlarmSignalDMA2GasLeak2ndAlarm { get; set; }
  776. [Tag("AlarmSignalGLBoxPG7CNT1Alarm")]
  777. public IoAlarmSignal AlarmSignalGLBoxPG7CNT1Alarm { get; set; }
  778. [Tag("AlarmSignalGLBoxPG7CNT2Alarm")]
  779. public IoAlarmSignal AlarmSignalGLBoxPG7CNT2Alarm { get; set; }
  780. [Tag("AlarmSignalGLBoxPG8CNT2Alarm")]
  781. public IoAlarmSignal AlarmSignalGLBoxPG8CNT2Alarm { get; set; }
  782. [Tag("AlarmSignalGLBoxPG9CNT2Alarm")]
  783. public IoAlarmSignal AlarmSignalGLBoxPG9CNT2Alarm { get; set; }
  784. [Tag("AlarmSignalHEXOverTemperatureAlarm")]
  785. public IoAlarmSignal AlarmSignalHEXOverTemperatureAlarm { get; set; }
  786. [Tag("AlarmSignalGLBoxPG21CNT1Alarm")]
  787. public IoAlarmSignal AlarmSignalGLBoxPG21CNT1Alarm { get; set; }
  788. [Tag("AlarmSignalGLBoxPG21CNT2Alarm")]
  789. public IoAlarmSignal AlarmSignalGLBoxPG21CNT2Alarm { get; set; }
  790. [Tag("AlarmSignalGLBoxPG22CNT1Alarm")]
  791. public IoAlarmSignal AlarmSignalGLBoxPG22CNT1Alarm { get; set; }
  792. [Tag("AlarmSignalGLBoxPG22CNT2Alarm")]
  793. public IoAlarmSignal AlarmSignalGLBoxPG22CNT2Alarm { get; set; }
  794. [Tag("AlarmSignalGLBoxPG23CNT1Alarm")]
  795. public IoAlarmSignal AlarmSignalGLBoxPG23CNT1Alarm { get; set; }
  796. [Tag("AlarmSignalGLBoxPG23CNT2Alarm")]
  797. public IoAlarmSignal AlarmSignalGLBoxPG23CNT2Alarm { get; set; }
  798. [Tag("AlarmSignalGLBoxPG24CNT1Alarm")]
  799. public IoAlarmSignal AlarmSignalGLBoxPG24CNT1Alarm { get; set; }
  800. [Tag("AlarmSignalGLBoxPG24CNT2Alarm")]
  801. public IoAlarmSignal AlarmSignalGLBoxPG24CNT2Alarm { get; set; }
  802. [Tag("AlarmSignalGLBoxPG25CNT1Alarm")]
  803. public IoAlarmSignal AlarmSignalGLBoxPG25CNT1Alarm { get; set; }
  804. [Tag("AlarmSignalGLBoxPG25CNT2Alarm")]
  805. public IoAlarmSignal AlarmSignalGLBoxPG25CNT2Alarm { get; set; }
  806. [Tag("AlarmSignalGLBoxPG31CNT1Alarm")]
  807. public IoAlarmSignal AlarmSignalGLBoxPG31CNT1Alarm { get; set; }
  808. [Tag("AlarmSignalGLBoxPG31CNT2Alarm")]
  809. public IoAlarmSignal AlarmSignalGLBoxPG31CNT2Alarm { get; set; }
  810. [Tag("AlarmSignalGLBoxPG32CNT1Alarm")]
  811. public IoAlarmSignal AlarmSignalGLBoxPG32CNT1Alarm { get; set; }
  812. [Tag("AlarmSignalGLBoxPG32CNT2Alarm")]
  813. public IoAlarmSignal AlarmSignalGLBoxPG32CNT2Alarm { get; set; }
  814. [Tag("AlarmSignalPG12CNT1Alarm")]
  815. public IoAlarmSignal AlarmSignalPG12CNT1Alarm { get; set; }
  816. [Tag("AlarmSignalPG12CNT2Alarm")]
  817. public IoAlarmSignal AlarmSignalPG12CNT2Alarm { get; set; }
  818. [Tag("AlarmSignalPG13CNT1Alarm")]
  819. public IoAlarmSignal AlarmSignalPG13CNT1Alarm { get; set; }
  820. [Tag("AlarmSignalPG13CNT2Alarm")]
  821. public IoAlarmSignal AlarmSignalPG13CNT2Alarm { get; set; }
  822. [Tag("AlarmSignalVaccum1PumpWarning")]
  823. public IoAlarmSignal AlarmSignalVaccum1PumpWarning { get; set; }
  824. [Tag("AlarmSignalVaccum1PumpAlarm")]
  825. public IoAlarmSignal AlarmSignalVaccum1PumpAlarm { get; set; }
  826. [Tag("AlarmSignalVaccum2PumpWarning")]
  827. public IoAlarmSignal AlarmSignalVaccum2PumpWarning { get; set; }
  828. [Tag("AlarmSignalVaccum2PumpAlarm")]
  829. public IoAlarmSignal AlarmSignalVaccum2PumpAlarm { get; set; }
  830. [Tag("AlarmSignalHotN2Alarm")]
  831. public IoAlarmSignal AlarmSignalHotN2Alarm { get; set; }
  832. [Tag("AlarmSignalLDS1MajorAlarm")]
  833. public IoAlarmSignal AlarmSignalLDS1MajorAlarm { get; set; }
  834. [Tag("AlarmSignalLDS1MinorWarning")]
  835. public IoAlarmSignal AlarmSignalLDS1MinorWarning { get; set; }
  836. [Tag("AlarmSignalLDS1liquidLowWarning")]
  837. public IoAlarmSignal AlarmSignalLDS1liquidLowWarning { get; set; }
  838. [Tag("AlarmSignalLDS1TankBlankAlarm")]
  839. public IoAlarmSignal AlarmSignalLDS1TankBlankAlarm { get; set; }
  840. [Tag("AlarmSignalLDS2MajorAlarm")]
  841. public IoAlarmSignal AlarmSignalLDS2MajorAlarm { get; set; }
  842. [Tag("AlarmSignalLDS2MinorWarning")]
  843. public IoAlarmSignal AlarmSignalLDS2MinorWarning { get; set; }
  844. [Tag("AlarmSignalLDS2LiquidLowWarning")]
  845. public IoAlarmSignal AlarmSignalLDS2LiquidLowWarning { get; set; }
  846. [Tag("AlarmSignalLDS2TankBlankAlarm")]
  847. public IoAlarmSignal AlarmSignalLDS2TankBlankAlarm { get; set; }
  848. [Tag("AlarmSignalPOD1FOUPVacuumSuckingAlarm")]
  849. public IoAlarmSignal AlarmSignalPOD1FOUPVacuumSuckingAlarm { get; set; }
  850. [Tag("AlarmSignalPOD2FOUPVacuumSuckingAlarm")]
  851. public IoAlarmSignal AlarmSignalPOD2FOUPVacuumSuckingAlarm { get; set; }
  852. [Tag("AlarmTS34RRotationTempSwAlarm")]
  853. public IoAlarmSignal AlarmTS34RRotationTempSwAlarm { get; set; }
  854. [Tag("AlarmTS30CapInsideTempSwAlarm")]
  855. public IoAlarmSignal AlarmTS30CapInsideTempSwAlarm { get; set; }
  856. [Tag("AlarmTS31capoutsidetemSwAlarm")]
  857. public IoAlarmSignal AlarmTS31capoutsidetemSwAlarm { get; set; }
  858. [Tag("AlarmGasboxlowerdoorSwAlarm")]
  859. public IoAlarmSignal AlarmGasboxlowerdoorSwAlarm { get; set; }
  860. [Tag("AlarmGasboxupperdoorSwAlarm")]
  861. public IoAlarmSignal AlarmGasboxupperdoorSwAlarm { get; set; }
  862. [Tag("AlarmEXHboxwaterleakAlarm")]
  863. public IoAlarmSignal AlarmEXHboxwaterleakAlarm { get; set; }
  864. [Tag("AlarmOPpanelEMO1Alarm")]
  865. public IoAlarmSignal AlarmOPpanelEMO1Alarm { get; set; }
  866. [Tag("AlarmOPpanelEMO2Alarm")]
  867. public IoAlarmSignal AlarmOPpanelEMO2Alarm { get; set; }
  868. [Tag("AlarmMainFurnaceTS306Alarm")]
  869. public IoAlarmSignal AlarmMainFurnaceTS306Alarm { get; set; }
  870. [Tag("AlarmHeaterRoomSWS11S12Alarm")]
  871. public IoAlarmSignal AlarmHeaterRoomSWS11S12Alarm { get; set; }
  872. [Tag("AlarmHeaterBbacksidePanelSWS112Alarm")]
  873. public IoAlarmSignal AlarmHeaterBbacksidePanelSWS112Alarm { get; set; }
  874. [Tag("AlarmRHCTS305Alarm")]
  875. public IoAlarmSignal AlarmRHCTS305Alarm { get; set; }
  876. [Tag("AlarmGasLeakFaultAlarm")]
  877. public IoAlarmSignal AlarmGasLeakFaultAlarm { get; set; }
  878. [Tag("AlarmMagneticFluidLeakAlarm")]
  879. public IoAlarmSignal AlarmMagneticFluidLeakAlarm { get; set; }
  880. [Tag("AlarmCoolingWaterLeakAlarm")]
  881. public IoAlarmSignal AlarmCoolingWaterLeakAlarm { get; set; }
  882. [Tag("AlarmLSCWaterLeakAlarm")]
  883. public IoAlarmSignal AlarmLSCWaterLeakAlarm { get; set; }
  884. [Tag("AlarmLABacksideDoorSwitchAlarm")]
  885. public IoAlarmSignal AlarmLABacksideDoorSwitchAlarm { get; set; }
  886. [Tag("AlarmSiSourceTANKHeater1INHIBITHIAlarm")]
  887. public IoAlarmSignal AlarmSiSourceTANKHeater1INHIBITHIAlarm { get; set; }
  888. [Tag("AlarmSiSourceTANKHeater1INHIBITLOWAlarm")]
  889. public IoAlarmSignal AlarmSiSourceTANKHeater1INHIBITLOWAlarm { get; set; }
  890. [Tag("AlarmSiSourceTANKHeater2INHIBITHIAlarm")]
  891. public IoAlarmSignal AlarmSiSourceTANKHeater2INHIBITHIAlarm { get; set; }
  892. [Tag("AlarmSiSourceTANKHeater2INHIBITLOWAlarm")]
  893. public IoAlarmSignal AlarmSiSourceTANKHeater2INHIBITLOWAlarm { get; set; }
  894. [Tag("AlarmSiSourceTANKHeater3INHIBITHIAlarm")]
  895. public IoAlarmSignal AlarmSiSourceTANKHeater3INHIBITHIAlarm { get; set; }
  896. [Tag("AlarmSiSourceTANKHeater3INHIBITLOWAlarm")]
  897. public IoAlarmSignal AlarmSiSourceTANKHeater3INHIBITLOWAlarm { get; set; }
  898. [Tag("AlarmSiSourceAVMFCHeaterINHIBITHIAlarm")]
  899. public IoAlarmSignal AlarmSiSourceAVMFCHeaterINHIBITHIAlarm { get; set; }
  900. [Tag("AlarmSiSourceAVMFCHeaterINHIBITLOWAlarm")]
  901. public IoAlarmSignal AlarmSiSourceAVMFCHeaterINHIBITLOWAlarm { get; set; }
  902. [Tag("AlarmCSourceTANKHeater1INHIBITHIAlarm")]
  903. public IoAlarmSignal AlarmCSourceTANKHeater1INHIBITHIAlarm { get; set; }
  904. [Tag("AlarmCSourceTANKHeater1INHIBITLOWAlarm")]
  905. public IoAlarmSignal AlarmCSourceTANKHeater1INHIBITLOWAlarm { get; set; }
  906. [Tag("AlarmCSourceTANKHeater2INHIBITHIAlarm")]
  907. public IoAlarmSignal AlarmCSourceTANKHeater2INHIBITHIAlarm { get; set; }
  908. [Tag("AlarmCSourceTANKHeater2INHIBITLOWAlarm")]
  909. public IoAlarmSignal AlarmCSourceTANKHeater2INHIBITLOWAlarm { get; set; }
  910. [Tag("AlarmCSourceTANKHeater3INHIBITHIAlarm")]
  911. public IoAlarmSignal AlarmCSourceTANKHeater3INHIBITHIAlarm { get; set; }
  912. [Tag("AlarmCSourceTANKHeater3INHIBITLOWAlarm")]
  913. public IoAlarmSignal AlarmCSourceTANKHeater3INHIBITLOWAlarm { get; set; }
  914. [Tag("AlarmCSourceAVMFCHeaterINHIBITHIAlarm")]
  915. public IoAlarmSignal AlarmCSourceAVMFCHeaterINHIBITHIAlarm { get; set; }
  916. [Tag("AlarmCSourceAVMFCHeaterINHIBITLOWAlarm")]
  917. public IoAlarmSignal AlarmCSourceAVMFCHeaterINHIBITLOWAlarm { get; set; }
  918. #endregion
  919. public AITSensorData SensorRecipeOK { get; set; }
  920. public AITSensorData SensorPROCManualOK { get; set; }
  921. [Tag("SensorVG11Status")]
  922. public IoSensor SensorVG11Status { get; set; }
  923. [Tag("SensorVG12Status")]
  924. public IoSensor SensorVG12Status { get; set; }
  925. [Tag("SensorVG13Status")]
  926. public IoSensor SensorVG13Status { get; set; }
  927. [Tag("SensorVACDEPOOK")]
  928. public IoSensor SensorVACDEPOOK { get; set; }
  929. [Tag("SensorVACHFOK")]
  930. public IoSensor SensorVACHFOK { get; set; }
  931. [Tag("SensorVACF2OK")]
  932. public IoSensor SensorVACF2OK { get; set; }
  933. [Tag("SensorO2DetectSideLA")]
  934. public IoSensor SensorO2DetectSideLA { get; set; }
  935. [Tag("SensorO2DetectSideFIMS1")]
  936. public IoSensor SensorO2DetectSideFIMS1 { get; set; }
  937. [Tag("SensorO2DetectSideFIMS2")]
  938. public IoSensor SensorO2DetectSideFIMS2 { get; set; }
  939. [Tag("SensorLADoorSw1")]
  940. public IoSensor SensorLADoorSw1 { get; set; }
  941. [Tag("SensorPLCHeartBeatPC")]
  942. public IoSensor SensorPLCHeartBeatPC { get; set; }
  943. [Tag("SensorSL02001gasboxdoorsw11")]
  944. public IoSensor SensorSL02001gasboxdoorsw11 { get; set; }
  945. [Tag("SensorSL02001gasboxdoorsw12")]
  946. public IoSensor SensorSL02001gasboxdoorsw12 { get; set; }
  947. [Tag("SensorSL02002gasboxdoorsw11")]
  948. public IoSensor SensorSL02002gasboxdoorsw11 { get; set; }
  949. [Tag("SensorSL02002gasboxdoorsw12")]
  950. public IoSensor SensorSL02002gasboxdoorsw12 { get; set; }
  951. [Tag("SensorSL05002LAdoorsw2")]
  952. public IoSensor SensorSL05002LAdoorsw2 { get; set; }
  953. [Tag("SensorSL05004LAfurnacedoorsw")]
  954. public IoSensor SensorSL05004LAfurnacedoorsw { get; set; }
  955. //[Tag("SensorNH3PressureOK")]
  956. //public IoAlarmSignal SignalLeak { get; set; }
  957. //[Tag("SignalExhaustAlarm")]
  958. //public IoAlarmSignal SignalExhaustAlarm { get; set; }
  959. //[Tag("SignalLeakBroken")]
  960. //public IoAlarmSignal SignalLeakBroken { get; set; }
  961. //[Tag("EmoAlarm")]
  962. //public IoAlarmSignal EmoAlarm { get; set; }
  963. // -------------------------------------------------------------------------
  964. //[Tag("ChamberLiftPin")]
  965. //public IoLift2 ChamberLiftPin { get; set; }
  966. // -------------------------------------------------------------------------
  967. //[Tag("ChamberDoor")]
  968. //public IoDoor2 ChamberDoor { get; set; }
  969. //[Tag("MFM61")]
  970. //public IoMFM MFM61 { get; set; }
  971. //[Tag("MfmNB")]
  972. //public IoMFM MfmNB { get; set; }
  973. [Tag("ValveAV1")]
  974. public IoValve ValveAV1 { get; set; }
  975. [Tag("ValveAV2")]
  976. public IoValve ValveAV2 { get; set; }
  977. [Tag("ValveAV3")]
  978. public IoValve ValveAV3 { get; set; }
  979. [Tag("ValveAV4")]
  980. public IoValve ValveAV4 { get; set; }
  981. [Tag("ValveAV5")]
  982. public IoValve ValveAV5 { get; set; }
  983. [Tag("ValveAV6")]
  984. public IoValve ValveAV6 { get; set; }
  985. [Tag("ValveAV7")]
  986. public IoValve ValveAV7 { get; set; }
  987. [Tag("ValveAV8")]
  988. public IoValve ValveAV8 { get; set; }
  989. [Tag("ValveAV9")]
  990. public IoValve ValveAV9 { get; set; }
  991. [Tag("ValveAV10")]
  992. public IoValve ValveAV10 { get; set; }
  993. [Tag("ValveAV11")]
  994. public IoValve ValveAV11 { get; set; }
  995. [Tag("ValveAV12")]
  996. public IoValve ValveAV12 { get; set; }
  997. [Tag("ValveAV13")]
  998. public IoValve ValveAV13 { get; set; }
  999. [Tag("ValveAV14")]
  1000. public IoValve ValveAV14 { get; set; }
  1001. [Tag("ValveAV15")]
  1002. public IoValve ValveAV15 { get; set; }
  1003. [Tag("ValveAV16")]
  1004. public IoValve ValveAV16 { get; set; }
  1005. [Tag("ValveAV17")]
  1006. public IoValve ValveAV17 { get; set; }
  1007. [Tag("ValveAV18")]
  1008. public IoValve ValveAV18 { get; set; }
  1009. [Tag("ValveAV19")]
  1010. public IoValve ValveAV19 { get; set; }
  1011. [Tag("ValveAV20")]
  1012. public IoValve ValveAV20 { get; set; }
  1013. [Tag("ValveAV21")]
  1014. public IoValve ValveAV21 { get; set; }
  1015. [Tag("ValveAV22")]
  1016. public IoValve ValveAV22 { get; set; }
  1017. [Tag("ValveAV23")]
  1018. public IoValve ValveAV23 { get; set; }
  1019. [Tag("ValveAV24")]
  1020. public IoValve ValveAV24 { get; set; }
  1021. [Tag("ValveAV25")]
  1022. public IoValve ValveAV25 { get; set; }
  1023. [Tag("ValveAV26")]
  1024. public IoValve ValveAV26 { get; set; }
  1025. [Tag("ValveAV27")]
  1026. public IoValve ValveAV27 { get; set; }
  1027. [Tag("ValveAV28")]
  1028. public IoValve ValveAV28 { get; set; }
  1029. [Tag("ValveAV29")]
  1030. public IoValve ValveAV29 { get; set; }
  1031. [Tag("ValveAV30")]
  1032. public IoValve ValveAV30 { get; set; }
  1033. [Tag("ValveAV31")]
  1034. public IoValve ValveAV31 { get; set; }
  1035. [Tag("ValveAV32")]
  1036. public IoValve ValveAV32 { get; set; }
  1037. [Tag("ValveAV33")]
  1038. public IoValve ValveAV33 { get; set; }
  1039. [Tag("ValveAV34")]
  1040. public IoValve ValveAV34 { get; set; }
  1041. [Tag("ValveAV35")]
  1042. public IoValve ValveAV35 { get; set; }
  1043. [Tag("ValveAV36")]
  1044. public IoValve ValveAV36 { get; set; }
  1045. [Tag("ValveAV37")]
  1046. public IoValve ValveAV37 { get; set; }
  1047. [Tag("ValveAV38")]
  1048. public IoValve ValveAV38 { get; set; }
  1049. [Tag("ValveAV39")]
  1050. public IoValve ValveAV39 { get; set; }
  1051. [Tag("ValveAV40")]
  1052. public IoValve ValveAV40 { get; set; }
  1053. [Tag("ValveAV41")]
  1054. public IoValve ValveAV41 { get; set; }
  1055. [Tag("ValveAV42")]
  1056. public IoValve ValveAV42 { get; set; }
  1057. [Tag("ValveAV43")]
  1058. public IoValve ValveAV43 { get; set; }
  1059. [Tag("ValveAV44")]
  1060. public IoValve ValveAV44 { get; set; }
  1061. [Tag("ValveAV45")]
  1062. public IoValve ValveAV45 { get; set; }
  1063. [Tag("ValveAV46")]
  1064. public IoValve ValveAV46 { get; set; }
  1065. [Tag("ValveAV47")]
  1066. public IoValve ValveAV47 { get; set; }
  1067. [Tag("ValveAV48")]
  1068. public IoValve ValveAV48 { get; set; }
  1069. [Tag("ValveAV49")]
  1070. public IoValve ValveAV49 { get; set; }
  1071. [Tag("ValveAV50")]
  1072. public IoValve ValveAV50 { get; set; }
  1073. [Tag("ValveAV51")]
  1074. public IoValve ValveAV51 { get; set; }
  1075. [Tag("ValveAV52")]
  1076. public IoValve ValveAV52 { get; set; }
  1077. [Tag("ValveAV53")]
  1078. public IoValve ValveAV53 { get; set; }
  1079. [Tag("ValveAV54")]
  1080. public IoValve ValveAV54 { get; set; }
  1081. [Tag("ValveAV55")]
  1082. public IoValve ValveAV55 { get; set; }
  1083. [Tag("ValveAV56")]
  1084. public IoValve ValveAV56 { get; set; }
  1085. [Tag("ValveAV57")]
  1086. public IoValve ValveAV57 { get; set; }
  1087. [Tag("ValveAV58")]
  1088. public IoValve ValveAV58 { get; set; }
  1089. [Tag("ValveAV59")]
  1090. public IoValve ValveAV59 { get; set; }
  1091. [Tag("ValveAV60")]
  1092. public IoValve ValveAV60 { get; set; }
  1093. [Tag("ValveAV61")]
  1094. public IoValve ValveAV61 { get; set; }
  1095. [Tag("ValveAV62")]
  1096. public IoValve ValveAV62 { get; set; }
  1097. [Tag("ValveAV63")]
  1098. public IoValve ValveAV63 { get; set; }
  1099. [Tag("ValveAV64")]
  1100. public IoValve ValveAV64 { get; set; }
  1101. [Tag("ValveAV65")]
  1102. public IoValve ValveAV65 { get; set; }
  1103. [Tag("ValveAV202LADoor")]
  1104. public IoValve ValveAV202LADoor { get; set; }
  1105. [Tag("ValveAV66")]
  1106. public IoValve ValveAV66 { get; set; }
  1107. [Tag("ValveAV67")]
  1108. public IoValve ValveAV67 { get; set; }
  1109. [Tag("ValveAV68")]
  1110. public IoValve ValveAV68 { get; set; }
  1111. [Tag("ValveAV69")]
  1112. public IoValve ValveAV69 { get; set; }
  1113. [Tag("ValveAV70")]
  1114. public IoValve ValveAV70 { get; set; }
  1115. [Tag("ValveAV71")]
  1116. public IoValve ValveAV71 { get; set; }
  1117. [Tag("ValveAV72")]
  1118. public IoValve ValveAV72 { get; set; }
  1119. [Tag("ValveAV73")]
  1120. public IoValve ValveAV73 { get; set; }
  1121. [Tag("ValveAV74")]
  1122. public IoValve ValveAV74 { get; set; }
  1123. [Tag("ValveAV75")]
  1124. public IoValve ValveAV75 { get; set; }
  1125. [Tag("ValveAV76")]
  1126. public IoValve ValveAV76 { get; set; }
  1127. [Tag("ValveAV77")]
  1128. public IoValve ValveAV77 { get; set; }
  1129. [Tag("ValveAV78")]
  1130. public IoValve ValveAV78 { get; set; }
  1131. [Tag("ValveAV79")]
  1132. public IoValve ValveAV79 { get; set; }
  1133. [Tag("ValveAV80")]
  1134. public IoValve ValveAV80 { get; set; }
  1135. [Tag("ValveAV81")]
  1136. public IoValve ValveAV81 { get; set; }
  1137. [Tag("ValveAV82")]
  1138. public IoValve ValveAV82 { get; set; }
  1139. [Tag("ValveAV83")]
  1140. public IoValve ValveAV83 { get; set; }
  1141. [Tag("ValveAV84")]
  1142. public IoValve ValveAV84 { get; set; }
  1143. [Tag("ValveAV85")]
  1144. public IoValve ValveAV85 { get; set; }
  1145. [Tag("ValveAV86")]
  1146. public IoValve ValveAV86 { get; set; }
  1147. [Tag("ValveAV87")]
  1148. public IoValve ValveAV87 { get; set; }
  1149. [Tag("ValveAV88")]
  1150. public IoValve ValveAV88 { get; set; }
  1151. [Tag("ValveAV89")]
  1152. public IoValve ValveAV89 { get; set; }
  1153. [Tag("ValveAV90")]
  1154. public IoValve ValveAV90 { get; set; }
  1155. [Tag("ValveAV91")]
  1156. public IoValve ValveAV91 { get; set; }
  1157. [Tag("ValveAV92")]
  1158. public IoValve ValveAV92 { get; set; }
  1159. [Tag("ValveAV93")]
  1160. public IoValve ValveAV93 { get; set; }
  1161. [Tag("ValveAV94")]
  1162. public IoValve ValveAV94 { get; set; }
  1163. [Tag("ValveAV95")]
  1164. public IoValve ValveAV95 { get; set; }
  1165. [Tag("ValveAV96")]
  1166. public IoValve ValveAV96 { get; set; }
  1167. [Tag("ValveAV97")]
  1168. public IoValve ValveAV97 { get; set; }
  1169. [Tag("ValveAV98")]
  1170. public IoValve ValveAV98 { get; set; }
  1171. [Tag("ValveAV99")]
  1172. public IoValve ValveAV99 { get; set; }
  1173. [Tag("ValveAV100")]
  1174. public IoValve ValveAV100 { get; set; }
  1175. [Tag("ValveAV101")]
  1176. public IoValve ValveAV101 { get; set; }
  1177. [Tag("ValveAV102")]
  1178. public IoValve ValveAV102 { get; set; }
  1179. [Tag("ValveAV103")]
  1180. public IoValve ValveAV103 { get; set; }
  1181. [Tag("ValveAV104")]
  1182. public IoValve ValveAV104 { get; set; }
  1183. [Tag("ValveAV105")]
  1184. public IoValve ValveAV105 { get; set; }
  1185. [Tag("ValveAV106")]
  1186. public IoValve ValveAV106 { get; set; }
  1187. [Tag("ValveAV107")]
  1188. public IoValve ValveAV107 { get; set; }
  1189. [Tag("ValveAV108")]
  1190. public IoValve ValveAV108 { get; set; }
  1191. [Tag("ValveAV109")]
  1192. public IoValve ValveAV109 { get; set; }
  1193. [Tag("ValveAV110")]
  1194. public IoValve ValveAV110 { get; set; }
  1195. [Tag("ValveAV111")]
  1196. public IoValve ValveAV111 { get; set; }
  1197. [Tag("ValveAV112")]
  1198. public IoValve ValveAV112 { get; set; }
  1199. [Tag("ValveAV113")]
  1200. public IoValve ValveAV113 { get; set; }
  1201. [Tag("ValveAV114")]
  1202. public IoValve ValveAV114 { get; set; }
  1203. [Tag("ValveAV115")]
  1204. public IoValve ValveAV115 { get; set; }
  1205. [Tag("ValveAV116")]
  1206. public IoValve ValveAV116 { get; set; }
  1207. [Tag("ValveAV117")]
  1208. public IoValve ValveAV117 { get; set; }
  1209. [Tag("ValveAV118")]
  1210. public IoValve ValveAV118 { get; set; }
  1211. [Tag("ValveAV119")]
  1212. public IoValve ValveAV119 { get; set; }
  1213. [Tag("ValveAV120")]
  1214. public IoValve ValveAV120 { get; set; }
  1215. [Tag("ValveAV121")]
  1216. public IoValve ValveAV121 { get; set; }
  1217. [Tag("ValveAV122")]
  1218. public IoValve ValveAV122 { get; set; }
  1219. [Tag("ValveAV123")]
  1220. public IoValve ValveAV123 { get; set; }
  1221. [Tag("ValveAV124")]
  1222. public IoValve ValveAV124 { get; set; }
  1223. [Tag("ValveAV125")]
  1224. public IoValve ValveAV125 { get; set; }
  1225. [Tag("ValveAV126")]
  1226. public IoValve ValveAV126 { get; set; }
  1227. [Tag("ValveAV127")]
  1228. public IoValve ValveAV127 { get; set; }
  1229. [Tag("ValveAV128")]
  1230. public IoValve ValveAV128 { get; set; }
  1231. [Tag("ValveAV129")]
  1232. public IoValve ValveAV129 { get; set; }
  1233. [Tag("ValveAV130")]
  1234. public IoValve ValveAV130 { get; set; }
  1235. [Tag("ValveAV131")]
  1236. public IoValve ValveAV131 { get; set; }
  1237. [Tag("ValveAV132")]
  1238. public IoValve ValveAV132 { get; set; }
  1239. [Tag("ValveAV133")]
  1240. public IoValve ValveAV133 { get; set; }
  1241. [Tag("ValveAV134")]
  1242. public IoValve ValveAV134 { get; set; }
  1243. [Tag("ValveAV135")]
  1244. public IoValve ValveAV135 { get; set; }
  1245. [Tag("ValveAV136")]
  1246. public IoValve ValveAV136 { get; set; }
  1247. [Tag("ValveAV230")]
  1248. public IoValve ValveAV230 { get; set; }
  1249. [Tag("ValveSV227")]
  1250. public IoValve ValveSV227 { get; set; }
  1251. [Tag("ValveAV201")]
  1252. public IoValve ValveAV201 { get; set; }
  1253. [Tag("ValveAV202")]
  1254. public IoValve ValveAV202 { get; set; }
  1255. [Tag("ValveLAExhaustDamper")]
  1256. public IoValve ValveLAExhaustDamper { get; set; }
  1257. [Tag("ValveLADamper")]
  1258. public IoValve ValveLADamper { get; set; }
  1259. [Tag("ValveFIMS1N2Purge")]
  1260. public IoValve ValveFIMS1N2Purge { get; set; }
  1261. [Tag("ValveFIMS2N2Purge")]
  1262. public IoValve ValveFIMS2N2Purge { get; set; }
  1263. [Tag("ValveSV61")]
  1264. public IoValve ValveSV61 { get; set; }
  1265. [Tag("ValveSV62")]
  1266. public IoValve ValveSV62 { get; set; }
  1267. [Tag("ValveSV63")]
  1268. public IoValve ValveSV63 { get; set; }
  1269. [Tag("ValveSV64")]
  1270. public IoValve ValveSV64 { get; set; }
  1271. [Tag("AGVPump")]
  1272. public IoValve AGVPump { get; set; }
  1273. [Tag("AGV2Pump")]
  1274. public IoValve AGV2Pump { get; set; }
  1275. [Tag("BothPump")]
  1276. public IoValve BothPump { get; set; }
  1277. [Tag("BothPump1")]
  1278. public IoValve BothPump1 { get; set; }
  1279. [Tag("BothPump2")]
  1280. public IoValve BothPump2 { get; set; }
  1281. [Tag("ValveBlowerPowerOn")]
  1282. public IoValve ValveBlowerPowerOn { get; set; }
  1283. [Tag("HMNT")]
  1284. public IoValve HMNT { get; set; }
  1285. [Tag("CMNT")]
  1286. public IoValve CMNT { get; set; }
  1287. [Tag("HREF")]
  1288. public IoValve HREF { get; set; }
  1289. [Tag("CREF")]
  1290. public IoValve CREF { get; set; }
  1291. [Tag("HZERO")]
  1292. public IoValve HZERO { get; set; }
  1293. [Tag("CZERO")]
  1294. public IoValve CZERO { get; set; }
  1295. // -------------------------------------------------------------------------
  1296. [Tag("PressureGLBoxPG1")]
  1297. public IoPressureMeter PressureGLBoxPG1 { get; set; }
  1298. [Tag("PressureGLBoxPG2")]
  1299. public IoPressureMeter PressureGLBoxPG2 { get; set; }
  1300. [Tag("PressureGLBoxPG3")]
  1301. public IoPressureMeter PressureGLBoxPG3 { get; set; }
  1302. [Tag("PressureGLBoxPG4")]
  1303. public IoPressureMeter PressureGLBoxPG4 { get; set; }
  1304. [Tag("PressureGLBoxPG5")]
  1305. public IoPressureMeter PressureGLBoxPG5 { get; set; }
  1306. [Tag("PressureGLBoxPG6")]
  1307. public IoPressureMeter PressureGLBoxPG6 { get; set; }
  1308. [Tag("PressureGasBoxUpperVG21")]
  1309. public IoPressureMeter PressureGasBoxUpperVG21 { get; set; }
  1310. [Tag("PressureGasBoxUpperVG22")]
  1311. public IoPressureMeter PressureGasBoxUpperVG22 { get; set; }
  1312. [Tag("ConcentrationO2")]
  1313. public IoPressureMeter ConcentrationO2 { get; set; }
  1314. [Tag("GasBoxExhaustMS2")]
  1315. public IoPressureMeter GasBoxExhaustMS2 { get; set; }
  1316. [Tag("ScavengerExhaustMS3")]
  1317. public IoPressureMeter ScavengerExhaustMS3 { get; set; }
  1318. [Tag("ExhaustBoxExhaustMS4")]
  1319. public IoPressureMeter ExhaustBoxExhaustMS4 { get; set; }
  1320. [Tag("LoadingAreaExhaustMS5")]
  1321. public IoPressureMeter LoadingAreaExhaustMS5 { get; set; }
  1322. [Tag("FrontBodyExhaustMS6")]
  1323. public IoPressureMeter FrontBodyExhaustMS6 { get; set; }
  1324. [Tag("LAExhaustMS7")]
  1325. public IoPressureMeter LAExhaustMS7 { get; set; }
  1326. [Tag("RHCExhaustMS8")]
  1327. public IoPressureMeter RHCExhaustMS8 { get; set; }
  1328. [Tag("RHCFlowFL901")]
  1329. public IoPressureMeter RHCFlowFL901 { get; set; }
  1330. [Tag("CoolingWaterFlowOfFurnaceFL902")]
  1331. public IoPressureMeter CoolingWaterFlowOfFurnaceFL902 { get; set; }
  1332. [Tag("CoolingWateFlowOfShuttleFL903")]
  1333. public IoPressureMeter CoolingWateFlowOfShuttleFL903 { get; set; }
  1334. [Tag("CoolingWaterFlowOfBoatRotationFL904")]
  1335. public IoPressureMeter CoolingWaterFlowOfBoatRotationFL904 { get; set; }
  1336. [Tag("CoolingWaterFlowOfFlangeFL905")]
  1337. public IoPressureMeter CoolingWaterFlowOfFlangeFL905 { get; set; }
  1338. [Tag("CoolingWaterFlowOfLoadingAreaFL906")]
  1339. public IoPressureMeter CoolingWaterFlowOfLoadingAreaFL906 { get; set; }
  1340. [Tag("VG11")]
  1341. public IoPressureMeter VG11 { get; set; }
  1342. [Tag("VG12")]
  1343. public IoPressureMeter VG12 { get; set; }
  1344. [Tag("VG13")]
  1345. public IoPressureMeter VG13 { get; set; }
  1346. [Tag("VG21")]
  1347. public IoPressureMeter VG21 { get; set; }
  1348. [Tag("VG22")]
  1349. public IoPressureMeter VG22 { get; set; }
  1350. [Tag("VG33")]
  1351. public IoPressureMeter VG33 { get; set; }
  1352. [Tag("VG32")]
  1353. public IoPressureMeter VG32 { get; set; }
  1354. [Tag("PG12")]
  1355. public IoPressureMeter PG12 { get; set; }
  1356. [Tag("PG13")]
  1357. public IoPressureMeter PG13 { get; set; }
  1358. [Tag("PS13")]
  1359. public IoPressureMeter PS13 { get; set; }
  1360. [Tag("LoadingAreaExhaustMS321")]
  1361. public IoPressureMeter LoadingAreaExhaustMS321 { get; set; }
  1362. [Tag("N24PurgePressure")]
  1363. public IoPressureMeter N24PurgePressure { get; set; }
  1364. [Tag("N25PurgePressure")]
  1365. public IoPressureMeter N25PurgePressure { get; set; }
  1366. [Tag("N26PurgePressure")]
  1367. public IoPressureMeter N26PurgePressure { get; set; }
  1368. [Tag("N27PurgePressure")]
  1369. public IoPressureMeter N27PurgePressure { get; set; }
  1370. [Tag("PS11")]
  1371. public IoPressureMeter PS11 { get; set; }
  1372. [Tag("PS17")]
  1373. public IoPressureMeter PS17 { get; set; }
  1374. // -------------------------------------------------------------------------
  1375. [Tag("FIMS1")]
  1376. public IoFIMS FIMS1 { get; set; }
  1377. [Tag("FIMS2")]
  1378. public IoFIMS FIMS2 { get; set; }
  1379. //[Tag("ValvePV12")]
  1380. //public IoValve ValvePV12 { get; set; }
  1381. //[Tag("ValvePV13")]
  1382. //public IoValve ValvePV13 { get; set; }
  1383. //[Tag("ValvePV14")]
  1384. //public IoValve ValvePV14 { get; set; }
  1385. //[Tag("ValvePV15")]
  1386. //public IoValve ValvePV15 { get; set; }
  1387. //[Tag("ValvePV16")]
  1388. //public IoValve ValvePV16 { get; set; }
  1389. //[Tag("ValvePV17")]
  1390. //public IoValve ValvePV17 { get; set; }
  1391. [Tag("MFC1")]
  1392. public IoMFC MFC1 { get; set; }
  1393. [Tag("MFC2")]
  1394. public IoMFC MFC2 { get; set; }
  1395. [Tag("MFC3")]
  1396. public IoMFC MFC3 { get; set; }
  1397. [Tag("MFC4")]
  1398. public IoMFC MFC4 { get; set; }
  1399. [Tag("MFC5")]
  1400. public IoMFC MFC5 { get; set; }
  1401. [Tag("MFC6")]
  1402. public IoMFC MFC6 { get; set; }
  1403. [Tag("MFC7")]
  1404. public IoMFC MFC7 { get; set; }
  1405. [Tag("MFC8")]
  1406. public IoMFC MFC8 { get; set; }
  1407. [Tag("MFC9")]
  1408. public IoMFC MFC9 { get; set; }
  1409. [Tag("MFC10")]
  1410. public IoMFC MFC10 { get; set; }
  1411. [Tag("MFC11")]
  1412. public IoMFC MFC11 { get; set; }
  1413. [Tag("MFC12")]
  1414. public IoMFC MFC12 { get; set; }
  1415. [Tag("MFC13")]
  1416. public IoMFC MFC13 { get; set; }
  1417. [Tag("MFC14")]
  1418. public IoMFC MFC14 { get; set; }
  1419. [Tag("MFC15")]
  1420. public IoMFC MFC15 { get; set; }
  1421. [Tag("MFC16")]
  1422. public IoMFC MFC16 { get; set; }
  1423. [Tag("MFC17")]
  1424. public IoMFC MFC17 { get; set; }
  1425. [Tag("MFC31")]
  1426. public IoMFC MFC31 { get; set; }
  1427. [Tag("MFC32")]
  1428. public IoMFC MFC32 { get; set; }
  1429. [Tag("MFC51")]
  1430. public IoMFC MFC51 { get; set; }
  1431. [Tag("MFC57")]
  1432. public IoMFC MFC57 { get; set; }
  1433. //[Tag("GasLineA")]
  1434. //public IoGasStick2 GasLineA { get; set; }
  1435. //[Tag("GasLineB")]
  1436. //public IoGasStick2 GasLineB { get; set; }
  1437. //[Tag("GasLineC")]
  1438. //public IoGasStick2 GasLineC { get; set; }
  1439. //[Tag("GasLineNX")]
  1440. //public IoGasStick2 GasLineNX { get; set; }
  1441. //[Tag("GasLineNY")]
  1442. //public IoGasStick2 GasLineNY { get; set; }
  1443. //[Tag("GasLineN1")]
  1444. //public IoGasStick2 GasLineN1 { get; set; }
  1445. //[Tag("GasLineN2")]
  1446. //public IoGasStick2 GasLineN2 { get; set; }
  1447. //[Tag("GasLineN3")]
  1448. //public IoGasStick2 GasLineN3 { get; set; }
  1449. //[Tag("GasLineM1")]
  1450. //public IoGasStick2 GasLineM1 { get; set; }
  1451. //[Tag("GasLineM2")]
  1452. //public IoGasStick2 GasLineM2 { get; set; }
  1453. //[Tag("GasLineD1")]
  1454. //public IoGasStick2 GasLineD1 { get; set; }
  1455. //[Tag("GasLineJ1")]
  1456. //public IoGasStick2 GasLineJ1 { get; set; }
  1457. // -------------------------------------------------------------------------
  1458. [Tag("Shutter")]
  1459. public IoShutter Shutter { get; set; }
  1460. [Tag("FFU1")] public IoFFU FFU1 { get; set; }
  1461. [Tag("FFU2")] public IoFFU FFU2 { get; set; }
  1462. [Tag("FFU3")] public IoFFU FFU3 { get; set; }
  1463. [Tag("FFU4")] public IoFFU FFU4 { get; set; }
  1464. [Tag("FFU5")] public IoFFU FFU5 { get; set; }
  1465. [Tag("FFU6")] public IoFFU FFU6 { get; set; }
  1466. [Tag("FFU7")] public IoFFU FFU7 { get; set; }
  1467. [Tag("FFU8")] public IoFFU FFU8 { get; set; }
  1468. [Tag("FFU9")] public IoFFU FFU9 { get; set; }
  1469. [Tag("BufferFFU1")] public IoFFU BufferFFU1 { get; set; }
  1470. [Tag("BufferFFU2")] public IoFFU BufferFFU2 { get; set; }
  1471. [Tag("BufferFFU3")] public IoFFU BufferFFU3 { get; set; }
  1472. [Tag("BufferFFU4")] public IoFFU BufferFFU4 { get; set; }
  1473. [Tag("BufferFFU5")] public IoFFU BufferFFU5 { get; set; }
  1474. [Tag("BufferFFU6")] public IoFFU BufferFFU6 { get; set; }
  1475. // -------------------------------------------------------------------------
  1476. [Tag("APC")]
  1477. public IoAPC APC { get; set; }
  1478. // -------------------------------------------------------------------------
  1479. //[Tag("MainPump")]
  1480. //public IoPump MainPump { get; set; }
  1481. //[Tag("IoPump")]
  1482. //public IoPump IoPump { get; set; }
  1483. // -------------------------------------------------------------------------
  1484. //[Tag("VG2Pressure")]
  1485. //public IoPressureMeter VG2Pressure { get; set; }
  1486. //[Tag("PT52")]
  1487. //public IoPressureMeter PT52 { get; set; }
  1488. //[Tag("PT53")]
  1489. //public IoPressureMeter PT53 { get; set; }
  1490. //[Tag("PT10")]
  1491. //public IoPressureMeter PT10 { get; set; }
  1492. //[Tag("PT20")]
  1493. //public IoPressureMeter PT20 { get; set; }
  1494. //[Tag("PT30")]
  1495. //public IoPressureMeter PT30 { get; set; }
  1496. //[Tag("O2Detector1")]
  1497. //public IoPressureMeter O2Detector1 { get; set; }
  1498. //[Tag("O2Detector2")]
  1499. //public IoPressureMeter O2Detector2 { get; set; }
  1500. // -------------------------------------------------------------------------
  1501. [Tag("TrigBufferPurgeTime")]
  1502. public IoTrigger TrigBufferPurgeTime { get; set; }
  1503. [Tag("TrigVFD")]
  1504. public IoTrigger TrigVFD { get; set; }
  1505. [Tag("TrigFurnaceLZoneHeatingEnable")]
  1506. public IoTrigger TrigFurnaceLZoneHeatingEnable { get; set; }
  1507. [Tag("TrigFurnaceCLZoneHeatingEnable")]
  1508. public IoTrigger TrigFurnaceCLZoneHeatingEnable { get; set; }
  1509. [Tag("TrigFurnaceCZoneHeatingEnable")]
  1510. public IoTrigger TrigFurnaceCZoneHeatingEnable { get; set; }
  1511. [Tag("TrigFurnaceCUZoneHeatingEnable")]
  1512. public IoTrigger TrigFurnaceCUZoneHeatingEnable { get; set; }
  1513. [Tag("TrigFurnaceUZoneHeatingEnable")]
  1514. public IoTrigger TrigFurnaceUZoneHeatingEnable { get; set; }
  1515. [Tag("TrigFFULSPEED")]
  1516. public IoTrigger TrigFFULSPEED { get; set; }
  1517. [Tag("TrigFFUHSPEED")]
  1518. public IoTrigger TrigFFUHSPEED { get; set; }
  1519. [Tag("TrigVGUnitConversion")]
  1520. public IoTrigger TrigVGUnitConversion { get; set; }
  1521. [Tag("TrigForlineHeaterOn")]
  1522. public IoTrigger TrigForlineHeaterOn { get; set; }
  1523. [Tag("TrigHTR1SWON")]
  1524. public IoTrigger TrigHTR1SWON { get; set; }
  1525. [Tag("TrigHTR2SWON")]
  1526. public IoTrigger TrigHTR2SWON { get; set; }
  1527. [Tag("TrigHTR3SWON")]
  1528. public IoTrigger TrigHTR3SWON { get; set; }
  1529. [Tag("TrigDEPOSW")]
  1530. public IoTrigger TrigDEPOSW { get; set; }
  1531. [Tag("TrigCREFON")]
  1532. public IoTrigger TrigCREFON { get; set; }
  1533. [Tag("TrigSIREFON")]
  1534. public IoTrigger TrigSIREFON { get; set; }
  1535. [Tag("TrigCEXHON")]
  1536. public IoTrigger TrigCEXHON { get; set; }
  1537. [Tag("TrigDPRON")]
  1538. public IoTrigger TrigDPRON { get; set; }
  1539. [Tag("TrigHFCleanSwitchB")]
  1540. public IoTrigger TrigHFCleanSwitchB { get; set; }
  1541. [Tag("TrigF2CleanSwitchB")]
  1542. public IoTrigger TrigF2CleanSwitchB { get; set; }
  1543. public IoHeater HeaterU { get; set; }
  1544. public IoHeater HeaterCU { get; set; }
  1545. public IoHeater HeaterC { get; set; }
  1546. public IoHeater HeaterCL { get; set; }
  1547. public IoHeater HeaterL { get; set; }
  1548. //private Dictionary<string, IoMFC> _gasMFCs;
  1549. //public Dictionary<string, IoMFC> GasMFCs => _gasMFCs;
  1550. [Tag("TrigAV71ExternalHeater")]
  1551. public IoTrigger TrigAV71ExternalHeater { get; set; }
  1552. [Tag("TrigAV71RingHeater")]
  1553. public IoTrigger TrigAV71RingHeater { get; set; }
  1554. [Tag("TrigHeaterAllEnable")]
  1555. public IoTrigger TrigHeaterAllEnable { get; set; }
  1556. [Tag("TrigGasLineHeaterMemoryChange")]
  1557. public IoTrigger TrigGasLineHeaterMemoryChange { get; set; }
  1558. #region N2Purge
  1559. [Tag("TrigN2PurgeLAO2CheckFirstEnable")]
  1560. public IoTrigger TrigN2PurgeLAO2CheckFirstEnable { get; set; }
  1561. [Tag("TrigN2PurgeFIMS1O2CheckEnable")]
  1562. public IoTrigger TrigN2PurgeFIMS1O2CheckEnable { get; set; }
  1563. [Tag("TrigN2PurgeFIMS2O2CheckEnable")]
  1564. public IoTrigger TrigN2PurgeFIMS2O2CheckEnable { get; set; }
  1565. [Tag("TrigN2PurgeProcess")]
  1566. public IoTrigger TrigN2PurgeProcess { get; set; }
  1567. [Tag("TrigN2PurgeLAO2OverTime")]
  1568. public IoTrigger TrigN2PurgeLAO2OverTime { get; set; }
  1569. [Tag("TrigN2PurgeLAO2CheckTime")]
  1570. public IoTrigger TrigN2PurgeLAO2CheckTime { get; set; }
  1571. [Tag("TrigN2PurgeFOUPO2OverTime")]
  1572. public IoTrigger TrigN2PurgeFOUPO2OverTime { get; set; }
  1573. [Tag("TrigN2PurgeFOUPO2CheckTime")]
  1574. public IoTrigger TrigN2PurgeFOUPO2CheckTime { get; set; }
  1575. [Tag("TrigN2PurgeExchangeLATOFOUPWaitTime")]
  1576. public IoTrigger TrigN2PurgeExchangeLATOFOUPWaitTime { get; set; }
  1577. [Tag("TrigN2PurgeExchangeFOUPTOLAWaitTime")]
  1578. public IoTrigger TrigN2PurgeExchangeFOUPTOLAWaitTime { get; set; }
  1579. [Tag("TrigN2PurgeExchangeFOUPTOFOUPWaitTime")]
  1580. public IoTrigger TrigN2PurgeExchangeFOUPTOFOUPWaitTime { get; set; }
  1581. [Tag("TrigN2PurgeLAO2CheckSV")]
  1582. public IoTrigger TrigN2PurgeLAO2CheckSV { get; set; }
  1583. [Tag("TrigN2PurgeFOUPO2CheckSV")]
  1584. public IoTrigger TrigN2PurgeFOUPO2CheckSV { get; set; }
  1585. [Tag("TrigBufferN2PurageEN")]
  1586. public IoTrigger TrigBufferN2PurageEN { get; set; }
  1587. #endregion
  1588. #region IoHeaterBand
  1589. [Tag("CapHeater")]
  1590. public IoHeaterBand CapHeater { get; set; }
  1591. [Tag("APCExternalHeater")]
  1592. public IoHeaterBand APCExternalHeater { get; set; }
  1593. [Tag("APCRingHeater")]
  1594. public IoHeaterBand APCRingHeater { get; set; }
  1595. #endregion
  1596. // -------------------------------------------------------------------------
  1597. [Tag("BoatElevatorServo")]
  1598. public IoFurnaceMotor ZAxisDevice { get; set; }
  1599. [Tag("BoatRotationServo")]
  1600. public IoFurnaceMotor RAxisDevice { get; set; }
  1601. [Tag("APC")]
  1602. public IoAPC APCDevice { get; set; }
  1603. [Tag("TrigGasLineHeaterUnit1PowerOn")]
  1604. public IoTrigger2 TrigGasLine1PowerOn { get; set; }
  1605. [Tag("TrigGasLineHeaterUnit2PowerOn")]
  1606. public IoTrigger2 TrigGasLine2PowerOn { get; set; }
  1607. [Tag("TrigGasLineHeaterUnit3PowerOn")]
  1608. public IoTrigger2 TrigGasLine3PowerOn { get; set; }
  1609. [Tag("TrigGasLineHeaterUnit4PowerOn")]
  1610. public IoTrigger2 TrigGasLine4PowerOn { get; set; }
  1611. [Tag("TrigGasLineHeaterUnit6PowerOn")]
  1612. public IoTrigger2 TrigGasLine6PowerOn { get; set; }
  1613. [Tag("TrigGasLineHeaterUnit7PowerOn")]
  1614. public IoTrigger2 TrigGasLine7PowerOn { get; set; }
  1615. [Tag("TrigGasLineHeaterUnit1RecipeChange")]
  1616. public IoTrigger2 TrigGasLine1RecipeChange { get; set; }
  1617. [Tag("TrigGasLineHeaterUnit2RecipeChange")]
  1618. public IoTrigger2 TrigGasLine2RecipeChange { get; set; }
  1619. [Tag("TrigGasLineHeaterUnit3RecipeChange")]
  1620. public IoTrigger2 TrigGasLine3RecipeChange { get; set; }
  1621. [Tag("TrigGasLineHeaterUnit4RecipeChange")]
  1622. public IoTrigger2 TrigGasLine4RecipeChange { get; set; }
  1623. [Tag("TrigGasLineHeaterUnit6RecipeChange")]
  1624. public IoTrigger2 TrigGasLine6RecipeChange { get; set; }
  1625. [Tag("TrigGasLineHeaterUnit7RecipeChange")]
  1626. public IoTrigger2 TrigGasLine7RecipeChange { get; set; }
  1627. [Tag("MINI8AlarmReset")]
  1628. public IoReset MINI8AlarmReset { get; set; }
  1629. [Tag("PLCCPUReset")]
  1630. public IoReset PLCCPUReset { get; set; }
  1631. Func<MemberInfo, bool> _hasTagAttribute;
  1632. Func<object, bool> _isTagAttribute;
  1633. public override double ChamberPressure
  1634. {
  1635. get
  1636. {
  1637. return 0;
  1638. }
  1639. }
  1640. //public IAdsPlc Plc { get; set; }
  1641. private List<IDevice> _allModuleDevice = new List<IDevice>();
  1642. private List<IoMFC> _processMFCs = new List<IoMFC>();
  1643. private List<IoHeater> _heaters = new List<IoHeater>();
  1644. private List<IoValve> _valves = new List<IoValve>();
  1645. private List<IoFFU> _fFUs = new List<IoFFU>();
  1646. private List<IoGasStick2> _gasSticks;
  1647. public List<IoGasStick2> GasSticks => _gasSticks;
  1648. private List<AlarmEventItem> _triggeredAlarmList = new List<AlarmEventItem>();
  1649. private List<IoAlarmSignal> _alarmSignals = new List<IoAlarmSignal>();
  1650. private FurnaceSignalTower _signalTowerDevice;
  1651. private int _alarmNumber;
  1652. private List<IoAlarmSignal> _inCommandLst;
  1653. private Dictionary<string, RD_TRIG> _inCommandTirgs = new Dictionary<string, RD_TRIG>();
  1654. private IoTrigger _trigTHPowerEN;
  1655. private IoTrigger _trigHECPowerONLamp;
  1656. private List<HeaterBase> _HTR1Group = new List<HeaterBase>();
  1657. private List<HeaterBase> _HTR2Group = new List<HeaterBase>();
  1658. private List<HeaterBase> _HTR3Group = new List<HeaterBase>();
  1659. public void InitDevice()
  1660. {
  1661. InitAllWaferTypeNode();
  1662. _isTagAttribute = attribute => attribute is TagAttribute;
  1663. _hasTagAttribute = mi => mi.GetCustomAttributes(false).Any(_isTagAttribute);
  1664. var properties = this.GetType().GetProperties().Where(_hasTagAttribute);
  1665. foreach (var field in properties)
  1666. {
  1667. TagAttribute tag = field.GetCustomAttributes(false).First(_isTagAttribute) as TagAttribute;
  1668. IDevice device = DEVICE.GetDevice<IDevice>($"{Module}.{tag.Tag}");
  1669. if (device == null)
  1670. device = DEVICE.GetDevice<IDevice>($"PM1.{tag.Tag}");
  1671. if (device == null)
  1672. device = DEVICE.GetDevice<IDevice>($"System.{tag.Tag}");
  1673. if (device != null)
  1674. {
  1675. _allModuleDevice.Add(device);
  1676. PropertyInfo pi = (PropertyInfo)field;
  1677. var convertedValue = Convert.ChangeType(device, pi.PropertyType);
  1678. System.Diagnostics.Debug.Assert(convertedValue != null);
  1679. pi.SetValue(this, convertedValue);
  1680. if (device is IoAlarmSignal)
  1681. {
  1682. _alarmSignals.Add(device as IoAlarmSignal);
  1683. }
  1684. device.OnDeviceAlarmStateChanged += OnModuleDeviceAlarmStateChanged;
  1685. if (device is IoMFC && device.Name != "MFC57")
  1686. _processMFCs.Add(device as IoMFC);
  1687. if (device is IoHeater)
  1688. _heaters.Add(device as IoHeater);
  1689. else if (device is IoValve)
  1690. _valves.Add(device as IoValve);
  1691. else if (device is HeaterBase)
  1692. _HTR2Group.Add(device as HeaterBase);
  1693. else if (device is IoFFU)
  1694. _fFUs.Add(device as IoFFU);
  1695. }
  1696. else
  1697. {
  1698. }
  1699. }
  1700. for (int i = 1; i < 10; i++)
  1701. {
  1702. for (int ch = 1; ch < 40; ch++)
  1703. {
  1704. var device = DEVICE.GetDevice<HeaterBase>($"PM1.GaslineHeaterUnit{i}CH{ch}");
  1705. if (device != null)
  1706. {
  1707. if ((i == 4 && ch == 1) || (i == 4 && ch == 2) || (i == 4 && ch == 3) || (i == 4 && ch == 4))
  1708. {
  1709. //这几个从_HTR2Group中删除
  1710. //_HTR2Group.Add(device);
  1711. continue;
  1712. }
  1713. else
  1714. _HTR1Group.Add(device);
  1715. }
  1716. }
  1717. }
  1718. for (int i = 1; i < 20; i++)
  1719. {
  1720. var device = DEVICE.GetDevice<HeaterBase>($"PM1.ForelineHeater{i}");
  1721. if (device != null)
  1722. {
  1723. _HTR2Group.Add(device);
  1724. }
  1725. }
  1726. //Singleton<DeviceController>.Instance.Start(Singleton<DeviceManager>.Instance);
  1727. //FlowmeterLists = DEVICE.GetDevice<IoFlowMeter>().Where(o => o.Module == Module).ToList();
  1728. HeaterU = DEVICE.GetDevice<IoHeater>($"System.HeaterU");
  1729. HeaterCU = DEVICE.GetDevice<IoHeater>($"System.HeaterCU");
  1730. HeaterC = DEVICE.GetDevice<IoHeater>($"System.HeaterC");
  1731. HeaterCL = DEVICE.GetDevice<IoHeater>($"System.HeaterCL");
  1732. HeaterL = DEVICE.GetDevice<IoHeater>($"System.HeaterL");
  1733. _heaters = new List<IoHeater>()
  1734. {
  1735. HeaterU,
  1736. HeaterCU,
  1737. HeaterC,
  1738. HeaterCL,
  1739. HeaterL,
  1740. };
  1741. foreach (var heater in _heaters)
  1742. {
  1743. if (heater != null)
  1744. {
  1745. heater.OnDeviceAlarmStateChanged += OnModuleDeviceAlarmStateChanged;
  1746. }
  1747. }
  1748. Singleton<InterlockManager>.Instance.OnDeviceAlarmStateChanged += OnModuleDeviceAlarmStateChanged;
  1749. this.OnDeviceAlarmStateChanged += OnModuleDeviceAlarmStateChanged;
  1750. foreach (var pv in Singleton<IoProviderManager>.Instance.Providers)
  1751. {
  1752. if ((pv as IoProvider) != null)
  1753. (pv as IoProvider).OnDeviceAlarmStateChanged += OnModuleDeviceAlarmStateChanged;
  1754. }
  1755. _gasSticks = new List<IoGasStick2>()
  1756. {
  1757. //GasLineA,
  1758. //GasLineB,
  1759. //GasLineC,
  1760. //GasLineNX,
  1761. //GasLineNY,
  1762. //GasLineN1,
  1763. //GasLineN2,
  1764. //GasLineN3,
  1765. //GasLineM1,
  1766. //GasLineM2,
  1767. //GasLineD1,
  1768. //GasLineJ1,
  1769. };
  1770. _signalTowerDevice = DEVICE.GetDevice<FurnaceSignalTower>($"{ModuleName.System}.{ModuleName.SignalTower}");
  1771. _trigTHPowerEN = DEVICE.GetDevice<IoTrigger>($"PM1.TrigTHPowerEN");
  1772. _trigHECPowerONLamp = DEVICE.GetDevice<IoTrigger>($"{Module}.TrigHECPowerONLamp");
  1773. _inCommandLst = new List<IoAlarmSignal>()
  1774. {
  1775. //SensorHECPowerONSW,
  1776. // SensorTHBreakOK,
  1777. };
  1778. //SensorLidClosed.OnSignalChanged += SensorLidClosed_OnSignalChanged;
  1779. InitExtractionDict();
  1780. InitFurnaceZone(true);
  1781. MINI8AlarmReset?.Reset();
  1782. PLCCPUReset?.Reset();
  1783. InitN2PurgeConfigData();
  1784. InitSCToAODO();
  1785. BackUpFileDataMethod();
  1786. CreateZIPMethod();
  1787. }
  1788. #region
  1789. private Dictionary<string, IoSensor> _sensors = new Dictionary<string, IoSensor>();
  1790. private void InitExtractionDict()
  1791. {
  1792. var allDatas = ExtractionMethods.GetNameKeyDict(new List<string>() {
  1793. DeviceName.IoSensorNameKey,
  1794. });
  1795. ExtractionMethods.AllNameKeyDict = allDatas;
  1796. InitSensor(allDatas);
  1797. }
  1798. private void InitSensor(Dictionary<string, List<string>> allDatas)
  1799. {
  1800. foreach (var item in allDatas[DeviceName.IoSensorNameKey])
  1801. {
  1802. var sensorName = item.Split('.').ToList()[1];
  1803. IDevice device = DEVICE.GetDevice<IDevice>($"PM1.{sensorName}");
  1804. _sensors.Add(sensorName, device as IoSensor);
  1805. }
  1806. }
  1807. #endregion
  1808. public void InitFurnaceZone(bool setValue)
  1809. {
  1810. TrigFurnaceUZoneHeatingEnable?.SetTrigger(setValue, out _);
  1811. TrigFurnaceCUZoneHeatingEnable?.SetTrigger(setValue, out _);
  1812. TrigFurnaceCZoneHeatingEnable?.SetTrigger(setValue, out _);
  1813. TrigFurnaceCLZoneHeatingEnable?.SetTrigger(setValue, out _);
  1814. TrigFurnaceLZoneHeatingEnable?.SetTrigger(setValue, out _);
  1815. _heaters.ForEach(a => a?.SetEnable(setValue));
  1816. }
  1817. private void InitSCToAODO()
  1818. {
  1819. var scTrigFFULSPEEDData = SC.GetValue<double>($"FFU.LSPEED");
  1820. TrigFFULSPEED?.SetAOTrigger((float)scTrigFFULSPEEDData, out _);
  1821. var hSPEED = SC.GetValue<double>($"FFU.HSPEED");
  1822. TrigFFUHSPEED?.SetAOTrigger((float)hSPEED, out _);
  1823. SetN2PurgeLAO2CheckSV((float)SC.GetValue<double>("PM1.N2Purge.N2PurgeLAO2CheckSV"));
  1824. SetN2PurgeFOUPO2CheckSV((float)SC.GetValue<double>("PM1.N2Purge.N2PurgeFOUPO2CheckSV"));
  1825. }
  1826. private void SensorLidClosed_OnSignalChanged(IoSensor sender, bool isTriggered)
  1827. {
  1828. if (!isTriggered)
  1829. {
  1830. EV.PostWarningLog(Module, $"Lid Open.");
  1831. }
  1832. }
  1833. private void PlcDisconnected()
  1834. {
  1835. CheckToPostMessage(MSG.Disconnected);
  1836. }
  1837. private void PlcConnected()
  1838. {
  1839. if (IsInit)
  1840. return;
  1841. if (FsmState.Equals((int)STATE.NotConnected))
  1842. CheckToPostMessage(MSG.Connected);
  1843. }
  1844. public void OnModuleDeviceAlarmStateChanged(string deviceId, AlarmEventItem alarmItem)
  1845. {
  1846. if (alarmItem.IsTriggered)
  1847. {
  1848. EventLevel level = alarmItem.Level;
  1849. string description = alarmItem.AdditionalDescription;
  1850. //description += $" {(!string.IsNullOrEmpty(_recipeRunningInfo.RecipeName) ? $"Recipe:{_recipeRunningInfo.RecipeName}," : "")}Step:{(IsProcessing ? _recipeRunningInfo.StepName : "Standby")}";
  1851. //alarmItem.AdditionalDescription += $" {(!string.IsNullOrEmpty(_recipeRunningInfo.RecipeName) ? $"Recipe:{_recipeRunningInfo.RecipeName}," : "")}Step:{(IsProcessing ? _recipeRunningInfo.StepName : "Standby")}";
  1852. alarmItem.AdditionalDescription = description;
  1853. alarmItem.OccuringTime = DateTime.Now;
  1854. _triggeredAlarmList.Add(alarmItem);
  1855. if (IsProcessing)
  1856. {
  1857. if (level == EventLevel.Alarm)
  1858. {
  1859. EV.PostAlarmLog(Module, alarmItem);
  1860. }
  1861. else
  1862. {
  1863. EV.PostWarningLog(Module, alarmItem);
  1864. }
  1865. }
  1866. else
  1867. {
  1868. if (level == EventLevel.Alarm)
  1869. {
  1870. try
  1871. {
  1872. //if (!(bool)Aitex.Core.RT.DataCenter.DATA.Poll($"{alarmItem.EventEnum}.ignoreSaveDB")) {
  1873. EV.PostAlarmLog(Module, alarmItem);
  1874. //}
  1875. }
  1876. catch (Exception ex)
  1877. {
  1878. EV.WriteEvent(ex.Message.ToString());
  1879. }
  1880. }
  1881. else
  1882. {
  1883. EV.PostWarningLog(Module, alarmItem);
  1884. }
  1885. }
  1886. }
  1887. else
  1888. {
  1889. }
  1890. }
  1891. public override bool CheckAcked(int entityTaskToken)
  1892. {
  1893. return true;
  1894. }
  1895. #region pump device operation
  1896. public override bool TurnOnPump(out string reason)
  1897. {
  1898. reason = string.Empty;
  1899. return true /*MainPump.SetPump(out reason, 0, true)*/;
  1900. }
  1901. public override bool CheckPumpIsOn()
  1902. {
  1903. return true/*MainPump.IsRunning*/;
  1904. }
  1905. #endregion
  1906. public bool CheckIsConnected()
  1907. {
  1908. return true;
  1909. }
  1910. public bool CheckHasAlarm()
  1911. {
  1912. foreach (var device in _allModuleDevice)
  1913. {
  1914. if (device != null && device.HasAlarm)
  1915. return true;
  1916. }
  1917. return false;
  1918. }
  1919. public override bool CheckSlitValveClose()
  1920. {
  1921. return true;
  1922. }
  1923. public override bool CheckLidClosed()
  1924. {
  1925. return true;
  1926. }
  1927. public override bool CheckPrepareProcess()
  1928. {
  1929. return _isPrepareProcess;
  1930. }
  1931. public override bool CheckProcessFinished()
  1932. {
  1933. bool isFinished = true;
  1934. var wafers = WaferManager.Instance.GetWafers(_module);
  1935. if (wafers == null)
  1936. {
  1937. return false;
  1938. }
  1939. foreach (var wafer in wafers)
  1940. {
  1941. if (wafer.IsEmpty)
  1942. continue;
  1943. if (wafer.ProcessState != EnumWaferProcessStatus.Completed && wafer.ProcessState != EnumWaferProcessStatus.Failed)
  1944. isFinished = false;
  1945. }
  1946. return isFinished;
  1947. }
  1948. public override bool CheckStandbyCondition()
  1949. {
  1950. return true;
  1951. return CheckExternalSensorCondition() && CheckTempStabilizeCondition() &&
  1952. CheckReachTempCondition() && CheckPressureStablilizeCondition() &&
  1953. CheckReachPressureCondition() && CheckFinishAutoProfileCondition();
  1954. }
  1955. #region conditionCheck
  1956. private bool SeBypassStandbyFactor(out string reason, int time, object[] param)
  1957. {
  1958. reason = string.Empty;
  1959. if (param != null && param.Length > 0)
  1960. {
  1961. var condition = param[0].ToString();
  1962. if (_conditionCheckDic.ContainsKey(condition))
  1963. {
  1964. _conditionCheckDic[condition] = true;
  1965. }
  1966. }
  1967. return true;
  1968. }
  1969. private bool SetConditionCheck(out string reason, int time, object[] param)
  1970. {
  1971. reason = string.Empty;
  1972. _conditionCheckDic.Clear();
  1973. _conditionCheckItemDic.Clear();
  1974. _isExternalSensorConditionBypass = false;
  1975. _isTempStabilizeConditionBypass = false;
  1976. _isPressureStabilizeConditionBypass = false;
  1977. _isReachTempConditionBypass = false;
  1978. _isReachPressureConditionBypass = false;
  1979. _isFinishAutoProfileConditionBypass = false;
  1980. if (param.Length > 0)
  1981. {
  1982. var conditions = param[0].ToString().Split(';').ToList();
  1983. foreach (var condition in conditions)
  1984. {
  1985. var arry = condition.Split(':');
  1986. if (arry.Length > 1)
  1987. {
  1988. switch (arry[0])
  1989. {
  1990. case "ExternalSensor":
  1991. SetExternalSensorCondition("Wait For External Sensor", arry[1]);
  1992. break;
  1993. case "TempStabilize":
  1994. SetTempStabilizeCondition("Wait For Temperature Stablilize", arry[1]);
  1995. break;
  1996. case "ReachTemp":
  1997. SetReachTempCondition("Wait For Reach Temperature", arry[1]);
  1998. break;
  1999. case "ReachPressure":
  2000. SetReachPressureCondition("Wait For Reach Pressure", arry[1]);
  2001. break;
  2002. case "PressureStabilize":
  2003. SetPressureStabilizeCondition("Wait For Pressure Stablilize", arry[1]);
  2004. break;
  2005. case "FinishAutoProfile":
  2006. SetFinishAutoProfileCondition("Wait For Finish Auto Profile", arry[1]);
  2007. break;
  2008. case "None":
  2009. case "none":
  2010. break;
  2011. }
  2012. }
  2013. }
  2014. }
  2015. return true;
  2016. }
  2017. private void SetExternalSensorCondition(string title, string para)
  2018. {
  2019. var conditions = para.ToLower().Split(',').ToList();
  2020. if (conditions.Any(x => !x.Contains("none")))
  2021. {
  2022. _conditionCheckDic.Add(title, false);
  2023. _conditionCheckItemDic.Add(title, para);
  2024. }
  2025. }
  2026. private void SetTempStabilizeCondition(string title, string para)
  2027. {
  2028. if (para.ToLower() != "none")
  2029. {
  2030. _conditionCheckDic.Add(title, false);
  2031. _conditionCheckItemDic.Add(title, para);
  2032. foreach (var heater in _heaters)
  2033. {
  2034. //heater.SetStableParameters(para);
  2035. }
  2036. }
  2037. }
  2038. private void SetReachTempCondition(string title, string para)
  2039. {
  2040. if (para.ToLower() != "none")
  2041. {
  2042. _conditionCheckDic.Add(title, false);
  2043. _conditionCheckItemDic.Add(title, para);
  2044. }
  2045. }
  2046. private void SetReachPressureCondition(string title, string para)
  2047. {
  2048. if (para.ToLower() != "none")
  2049. {
  2050. _conditionCheckDic.Add(title, false);
  2051. _conditionCheckItemDic.Add(title, para);
  2052. }
  2053. }
  2054. private void SetFinishAutoProfileCondition(string title, string para)
  2055. {
  2056. if (para.ToLower() != "none")
  2057. {
  2058. _conditionCheckDic.Add(title, false);
  2059. _conditionCheckItemDic.Add(title, para);
  2060. }
  2061. }
  2062. private void SetPressureStabilizeCondition(string title, string para)
  2063. {
  2064. if (para.ToLower() != "none")
  2065. {
  2066. _conditionCheckDic.Add(title, false);
  2067. _conditionCheckItemDic.Add(title, para);
  2068. //APC.SetStableParameters(para);
  2069. }
  2070. }
  2071. public bool CheckExternalSensorCondition()
  2072. {
  2073. var key = "Wait For External Sensor";
  2074. if (_conditionCheckDic.ContainsKey(key))
  2075. {
  2076. if (_conditionCheckItemDic.ContainsKey(key))
  2077. {
  2078. var items = _conditionCheckItemDic[key].Split(',').ToList();
  2079. bool isMatch = true;
  2080. foreach (var item in items)
  2081. {
  2082. var sensorAndResult = item.Split('.');
  2083. if (sensorAndResult.Length > 1 && sensorAndResult[1].ToLower() != "none")
  2084. {
  2085. var sensorDevice = DEVICE.GetDevice<IoSensor>($"{Module}.{sensorAndResult[0]}");
  2086. if (sensorDevice == null)
  2087. sensorDevice = DEVICE.GetDevice<IoSensor>($"System.{sensorAndResult[0]}");
  2088. if (sensorDevice != null)
  2089. {
  2090. isMatch = sensorAndResult[1].ToLower() == "on" ? sensorDevice.Value : !sensorDevice.Value;
  2091. }
  2092. if (!isMatch)
  2093. break;
  2094. }
  2095. }
  2096. _conditionCheckDic[key] = isMatch;
  2097. }
  2098. if (_isExternalSensorConditionBypass)
  2099. _conditionCheckDic[key] = true;
  2100. return _conditionCheckDic[key];
  2101. }
  2102. else
  2103. {
  2104. return true;
  2105. }
  2106. }
  2107. public bool CheckTempStabilizeCondition()
  2108. {
  2109. var key = "Wait For Temperature Stablilize";
  2110. return true;
  2111. }
  2112. public bool CheckReachTempCondition()
  2113. {
  2114. var key = "Wait For Reach Temperature";
  2115. return true;
  2116. }
  2117. public bool CheckPressureStablilizeCondition()
  2118. {
  2119. var key = "Wait For Pressure Stablilize";
  2120. if (_conditionCheckDic.ContainsKey(key))
  2121. {
  2122. //_conditionCheckDic[key] = APC.IsStable;
  2123. if (_isPressureStabilizeConditionBypass)
  2124. _conditionCheckDic[key] = true;
  2125. return _conditionCheckDic[key];
  2126. }
  2127. else
  2128. {
  2129. return true;
  2130. }
  2131. }
  2132. public bool CheckReachPressureCondition()
  2133. {
  2134. var key = "Wait For Reach Pressure";
  2135. if (_conditionCheckDic.ContainsKey(key))
  2136. {
  2137. if (_conditionCheckItemDic.ContainsKey(key))
  2138. {
  2139. var itemArry = _conditionCheckItemDic[key].Split(',');
  2140. if (itemArry != null && itemArry.Length > 1)
  2141. {
  2142. float.TryParse(itemArry[1], out float pressure);
  2143. if (itemArry[0] == "WaitMoreThan")
  2144. {
  2145. //_conditionCheckDic[key] = APC.PressureFeedback > pressure;
  2146. }
  2147. else if (itemArry[0] == "WaitLessThan")
  2148. {
  2149. //_conditionCheckDic[key] = APC.PressureFeedback < pressure;
  2150. }
  2151. }
  2152. }
  2153. if (_isReachPressureConditionBypass)
  2154. _conditionCheckDic[key] = true;
  2155. return _conditionCheckDic[key];
  2156. }
  2157. else
  2158. {
  2159. return true;
  2160. }
  2161. }
  2162. public bool CheckFinishAutoProfileCondition()
  2163. {
  2164. var key = "Wait For Finish Auto Profile";
  2165. if (_conditionCheckDic.ContainsKey(key))
  2166. {
  2167. if (_isFinishAutoProfileConditionBypass)
  2168. _conditionCheckDic[key] = true;
  2169. return _conditionCheckDic[key];
  2170. }
  2171. else
  2172. {
  2173. return true;
  2174. }
  2175. }
  2176. #endregion
  2177. private bool SetBoatZAxisMotion(out string reason, int time, object[] param)
  2178. {
  2179. reason = string.Empty;
  2180. //if (AutoDoor.UpDownStatus != ASUpDownStatus.Down || AutoDoor.OpenCloseStatus != ASOpenCloseStatus.Open)
  2181. //{
  2182. // (Singleton<EquipmentManager>.Instance.Modules[ModuleName.Boat] as BoatModule).BoatZAxisMoveFailedForInterlock.Set();
  2183. // return false;
  2184. //}
  2185. return true;
  2186. //return BoatDevice.ZAxisMoveTo(param[0].ToString(), out reason);
  2187. }
  2188. private bool SetBoatRAxisMotion(out string reason, int time, object[] param)
  2189. {
  2190. reason = string.Empty;
  2191. return true;
  2192. }
  2193. private bool SetAutoShutterUp(out string reason, int time, object[] param)
  2194. {
  2195. reason = string.Empty;
  2196. bool.TryParse(param[0].ToString(), out bool isUp);
  2197. //if (BoatDevice.BoatCurrentPosition != BoatPosition.HomePosition && BoatDevice.BoatCurrentPosition != BoatPosition.ProcessPosition)
  2198. //{
  2199. // AutoShutter.AutoShutterMoveFailedForInterlock.Set();
  2200. // return false;
  2201. //}
  2202. //return AutoDoor.SetUp(isUp, out reason);
  2203. return true;
  2204. }
  2205. private bool SetAutoShutterOpen(out string reason, int time, object[] param)
  2206. {
  2207. reason = string.Empty;
  2208. bool.TryParse(param[0].ToString(), out bool isOpen);
  2209. var ZAxisDevice = DEVICE.GetDevice<IoFurnaceMotor>($"PM1.BoatElevatorServo");
  2210. if (!ZAxisDevice.CheckServoAtPosition(BoatPosition.HomePosition.ToString()))
  2211. {
  2212. ShutterMoveFailedForInterlock.Set();
  2213. return true;
  2214. }
  2215. return Shutter.SetOpen(isOpen, out reason);
  2216. }
  2217. private bool SetAutoShutterRotateOpen(out string reason, int time, object[] param)
  2218. {
  2219. reason = string.Empty;
  2220. bool.TryParse(param[0].ToString(), out bool isOpen);
  2221. //if (BoatDevice.BoatCurrentPosition != BoatPosition.HomePosition && BoatDevice.BoatCurrentPosition != BoatPosition.ProcessPosition)
  2222. //{
  2223. // AutoShutter.AutoShutterMoveFailedForInterlock.Set();
  2224. // return false;
  2225. //}
  2226. //return AutoDoor.SetShutterRotateOpen(isOpen, out reason);
  2227. return true;
  2228. }
  2229. private bool SetCommand(out string reason, int time, object[] param)
  2230. {
  2231. reason = string.Empty;
  2232. var command = param[0].ToString();
  2233. switch (command)
  2234. {
  2235. case "Hold":
  2236. _processRoutine.PauseRecipe();
  2237. break;
  2238. case "Hold + Buzzer":
  2239. _processRoutine.PauseRecipe();
  2240. BuzzerOn();
  2241. break;
  2242. case "Buzzer":
  2243. BuzzerOn();
  2244. break;
  2245. case "Leak Check1":
  2246. case "Leak Check2":
  2247. case "Leak Check3":
  2248. int.TryParse(command.Replace("Leak Check", ""), out int index);
  2249. SetLeakCheckTableIndex(index);
  2250. break;
  2251. }
  2252. return true;
  2253. }
  2254. public bool SetSensorRecipeOK(out string reason, int time, object[] param)
  2255. {
  2256. reason = string.Empty;
  2257. SensorRecipeOK.Value = true;
  2258. //SensorPROCManualOK.Value = false;
  2259. return true;
  2260. }
  2261. public bool SetSensorPROCManualOK(out string reason, int time, object[] param)
  2262. {
  2263. reason = string.Empty;
  2264. SensorRecipeOK.Value = false;
  2265. //SensorPROCManualOK.Value = true;
  2266. return true;
  2267. }
  2268. public bool SetEditRecipeName(out string reason, int time, object[] param)
  2269. {
  2270. reason = string.Empty;
  2271. EditRecipeName = param[0].ToString();
  2272. return true;
  2273. }
  2274. public bool SetEditRecipeStepName(out string reason, int time, object[] param)
  2275. {
  2276. reason = string.Empty;
  2277. EditRecipeStepName = param[0].ToString();
  2278. return true;
  2279. }
  2280. private void BuzzerOn()
  2281. {
  2282. _signalTowerDevice.IsAutoSetLight = false;
  2283. _signalTowerDevice.SetLight(LightType.Buzzer1, TowerLightStatus.On);
  2284. }
  2285. public bool CheckBoatState()
  2286. {
  2287. return (Singleton<EquipmentManager>.Instance.Modules[ModuleName.Boat] as BoatModule).IsReady;
  2288. }
  2289. //#region Temperature/Pressure Tolerance
  2290. //#region Heater Tolerance Alarm
  2291. //public bool CheckHeaterBottomToleranceAlaram()
  2292. //{
  2293. // return Heater2.DeviceData.IsLspModeFeedBack ? Heater2.CheckToleranceAlarm() : Heater1.CheckToleranceAlarm();
  2294. //}
  2295. //public bool CheckHeaterCenterBottomToleranceAlaram()
  2296. //{
  2297. // return Heater4.DeviceData.IsLspModeFeedBack ? Heater4.CheckToleranceAlarm() : Heater3.CheckToleranceAlarm();
  2298. //}
  2299. //public bool CheckHeaterCenterToleranceAlaram()
  2300. //{
  2301. // return Heater6.DeviceData.IsLspModeFeedBack ? Heater6.CheckToleranceAlarm() : Heater5.CheckToleranceAlarm();
  2302. //}
  2303. //public bool CheckHeaterCenterTopToleranceAlaram()
  2304. //{
  2305. // return Heater8.DeviceData.IsLspModeFeedBack ? Heater8.CheckToleranceAlarm() : Heater7.CheckToleranceAlarm();
  2306. //}
  2307. //public bool CheckHeaterTopToleranceAlaram()
  2308. //{
  2309. // return Heater10.DeviceData.IsLspModeFeedBack ? Heater10.CheckToleranceAlarm() : Heater9.CheckToleranceAlarm();
  2310. //}
  2311. //public void SetHeaterBottomToleranceAlaram()
  2312. //{
  2313. // if (Heater2.DeviceData.IsLspModeFeedBack)
  2314. // Heater2.SetToleranceAlarm();
  2315. // else
  2316. // Heater1.SetToleranceAlarm();
  2317. //}
  2318. //public void SetHeaterCenterBottomToleranceAlaram()
  2319. //{
  2320. // if (Heater4.DeviceData.IsLspModeFeedBack)
  2321. // Heater4.SetToleranceAlarm();
  2322. // else
  2323. // Heater3.SetToleranceAlarm();
  2324. //}
  2325. //public void SetHeaterCenterToleranceAlaram()
  2326. //{
  2327. // if (Heater6.DeviceData.IsLspModeFeedBack)
  2328. // Heater6.SetToleranceAlarm();
  2329. // else
  2330. // Heater5.SetToleranceAlarm();
  2331. //}
  2332. //public void SetHeaterCenterTopToleranceAlaram()
  2333. //{
  2334. // if (Heater8.DeviceData.IsLspModeFeedBack)
  2335. // Heater8.SetToleranceAlarm();
  2336. // else
  2337. // Heater7.SetToleranceAlarm();
  2338. //}
  2339. //public void SetHeaterTopToleranceAlaram()
  2340. //{
  2341. // if (Heater10.DeviceData.IsLspModeFeedBack)
  2342. // Heater10.SetToleranceAlarm();
  2343. // else
  2344. // Heater9.SetToleranceAlarm();
  2345. //}
  2346. //#endregion
  2347. //#region Heater Tolerance Warning
  2348. //public bool CheckHeaterBottomToleranceWarning()
  2349. //{
  2350. // return Heater2.DeviceData.IsLspModeFeedBack ? Heater2.CheckToleranceWarning() : Heater1.CheckToleranceWarning();
  2351. //}
  2352. //public bool CheckHeaterCenterBottomToleranceWarning()
  2353. //{
  2354. // return Heater4.DeviceData.IsLspModeFeedBack ? Heater4.CheckToleranceWarning() : Heater3.CheckToleranceWarning();
  2355. //}
  2356. //public bool CheckHeaterCenterToleranceWarning()
  2357. //{
  2358. // return Heater6.DeviceData.IsLspModeFeedBack ? Heater6.CheckToleranceWarning() : Heater5.CheckToleranceWarning();
  2359. //}
  2360. //public bool CheckHeaterCenterTopToleranceWarning()
  2361. //{
  2362. // return Heater8.DeviceData.IsLspModeFeedBack ? Heater8.CheckToleranceWarning() : Heater7.CheckToleranceWarning();
  2363. //}
  2364. //public bool CheckHeaterTopToleranceWarning()
  2365. //{
  2366. // return Heater10.DeviceData.IsLspModeFeedBack ? Heater10.CheckToleranceWarning() : Heater9.CheckToleranceWarning();
  2367. //}
  2368. //public void SetHeaterBottomToleranceWarning()
  2369. //{
  2370. // if (Heater2.DeviceData.IsLspModeFeedBack)
  2371. // Heater2.SetToleranceWarning();
  2372. // else
  2373. // Heater1.SetToleranceWarning();
  2374. //}
  2375. //public void SetHeaterCenterBottomToleranceWarning()
  2376. //{
  2377. // if (Heater4.DeviceData.IsLspModeFeedBack)
  2378. // Heater4.SetToleranceWarning();
  2379. // else
  2380. // Heater3.SetToleranceWarning();
  2381. //}
  2382. //public void SetHeaterCenterToleranceWarning()
  2383. //{
  2384. // if (Heater6.DeviceData.IsLspModeFeedBack)
  2385. // Heater6.SetToleranceWarning();
  2386. // else
  2387. // Heater5.SetToleranceWarning();
  2388. //}
  2389. //public void SetHeaterCenterTopToleranceWarning()
  2390. //{
  2391. // if (Heater8.DeviceData.IsLspModeFeedBack)
  2392. // Heater8.SetToleranceWarning();
  2393. // else
  2394. // Heater7.SetToleranceWarning();
  2395. //}
  2396. //public void SetHeaterTopToleranceWarning()
  2397. //{
  2398. // if (Heater10.DeviceData.IsLspModeFeedBack)
  2399. // Heater10.SetToleranceWarning();
  2400. // else
  2401. // Heater9.SetToleranceWarning();
  2402. //}
  2403. //#endregion
  2404. //#region Pressure Tolerance Alarm
  2405. ////public bool CheckPressureToleranceAlaram()
  2406. ////{
  2407. //// return APC.CheckToleranceAlarm();
  2408. ////}
  2409. ////public void SetPressureToleranceAlaram()
  2410. ////{
  2411. //// APC.SetToleranceAlarm();
  2412. ////}
  2413. //#endregion
  2414. //#region Pressure Tolerance Warning
  2415. ////public bool CheckPressureToleranceWarning()
  2416. ////{
  2417. //// return APC.CheckToleranceWarning();
  2418. ////}
  2419. ////public void SetPressureToleranceWarning()
  2420. ////{
  2421. //// APC.SetToleranceWarning();
  2422. ////}
  2423. //#endregion
  2424. //#region Reset Tolerance
  2425. //public void ResetToleranceAlarm()
  2426. //{
  2427. // foreach (var heater in _heaters)
  2428. // {
  2429. // heater.Reset();
  2430. // }
  2431. // foreach (var key in _gasMFCs.Keys)
  2432. // {
  2433. // _gasMFCs[key].Reset();
  2434. // }
  2435. // //APC.Reset();
  2436. //}
  2437. //public void ResetToleranceAlarmChecker()
  2438. //{
  2439. // foreach (var heater in _heaters)
  2440. // {
  2441. // heater.ResetAlarmChecker();
  2442. // heater.ResetWarningChecker();
  2443. // }
  2444. // foreach (var key in _gasMFCs.Keys)
  2445. // {
  2446. // _gasMFCs[key].ResetAlarmChecker();
  2447. // _gasMFCs[key].ResetWarningChecker();
  2448. // }
  2449. // //APC.ResetAlarmChecker();
  2450. // //APC.ResetWarningChecker();
  2451. //}
  2452. //#endregion
  2453. //#endregion
  2454. private void SetAllFFUPower(object[] param)
  2455. {
  2456. var value = param[0].ToString();
  2457. foreach (var item in _fFUs)
  2458. {
  2459. item.SetSwitch(bool.Parse(value));
  2460. }
  2461. }
  2462. private void SetHeaterControlParameters(object[] param)
  2463. {
  2464. //Mode参数;Correct Table;PID Table
  2465. //"Heater;Parameter\\TempCorrection\\tempCorrect,2,Name2;Parameter\\TempPID\\tempPID,3,Name3"
  2466. if (param == null || param.Length == 0)
  2467. {
  2468. EV.PostWarningLog(Module, $"Invalid heater parameter");
  2469. return;
  2470. }
  2471. var paras = param[0].ToString().Split(';');
  2472. if (paras == null || paras.Length < 3)
  2473. {
  2474. EV.PostWarningLog(Module, $"Invalid heater parameter");
  2475. return;
  2476. }
  2477. var controlMode = paras[0];
  2478. var correct = paras[1];
  2479. var pid = paras[2];
  2480. HeaterU.SetControlMode(controlMode);
  2481. HeaterCU.SetControlMode(controlMode);
  2482. HeaterC.SetControlMode(controlMode);
  2483. HeaterCL.SetControlMode(controlMode);
  2484. HeaterL.SetControlMode(controlMode);
  2485. SetHeaterCorrectParameters(correct);
  2486. SetHeaterPIDParameters(pid);
  2487. }
  2488. private void SetHeaterCorrectParameters(string correct)
  2489. {
  2490. HeaterU.SetCorrectParameters(correct);
  2491. HeaterCU.SetCorrectParameters(correct);
  2492. HeaterC.SetCorrectParameters(correct);
  2493. HeaterCL.SetCorrectParameters(correct);
  2494. HeaterL.SetCorrectParameters(correct);
  2495. }
  2496. private void SetHeaterPIDParameters(string pid)
  2497. {
  2498. HeaterU.SetPIDParameters(pid);
  2499. HeaterCU.SetPIDParameters(pid);
  2500. HeaterC.SetPIDParameters(pid);
  2501. HeaterCL.SetPIDParameters(pid);
  2502. HeaterL.SetPIDParameters(pid);
  2503. }
  2504. private bool SetCEXHEnable(object[] param)
  2505. {
  2506. if (param != null && param.Length > 0)
  2507. {
  2508. bool.TryParse(param[0].ToString(), out bool isEnable);
  2509. TrigCEXHON?.SetTrigger(isEnable, out _);
  2510. _fFUs.ForEach(a => a.SetSwitch(isEnable));
  2511. }
  2512. return true;
  2513. }
  2514. private bool SetHTR1Enable(object[] param)
  2515. {
  2516. if (param != null && param.Length > 0)
  2517. {
  2518. bool.TryParse(param[0].ToString(), out bool isEnable);
  2519. SC.SetItemValue($"PM1.IsHTR1Enable", isEnable);
  2520. TrigHeaterAllEnable?.SetTrigger(isEnable, out _);
  2521. }
  2522. return true;
  2523. }
  2524. private bool SetHTR2Enable(object[] param)
  2525. {
  2526. if (param != null && param.Length > 0)
  2527. {
  2528. bool.TryParse(param[0].ToString(), out bool isEnable);
  2529. SC.SetItemValue($"PM1.IsHTR2Enable", isEnable);
  2530. }
  2531. return true;
  2532. }
  2533. private bool SetHTR3Enable(object[] param)
  2534. {
  2535. if (param != null && param.Length > 0)
  2536. {
  2537. bool.TryParse(param[0].ToString(), out bool isEnable);
  2538. SC.SetItemValue($"PM1.IsHTR3Enable", isEnable);
  2539. }
  2540. return true;
  2541. }
  2542. }
  2543. }