FurnaceELK/Furnace/FurnaceRT/Equipments/PMs/PMAlarmCondition.cs

using Aitex.Core.Common.DeviceData;
using Aitex.Core.RT.DataCenter;
using Aitex.Core.RT.Device.Unit;
using Aitex.Core.RT.Event;
using Aitex.Core.RT.IOCore;
using Aitex.Core.RT.Log;
using Aitex.Core.RT.OperationCenter;
using Aitex.Core.RT.ParameterCenter;
using Aitex.Core.RT.SCCore;
using Aitex.Core.RT.Tolerance;
using Aitex.Core.Util;
using FurnaceRT.Equipments.PMs.RecipeExecutions;
using FurnaceRT.Equipments.Systems;
using MECF.Framework.Common.Equipment;
using MECF.Framework.Common.Event;
using MECF.Framework.Common.OperationCenter;
using System;
using System.Collections;
using System.Collections.Generic;
using System.Diagnostics;
using System.Linq;
using System.Xml;

namespace FurnaceRT.Equipments.PMs
{
    public partial class PMModule
    {
        private string _currentAlarmConditionFileName;
        private int _currentAlarmConditionIndex;
        private Dictionary<int, AlarmConditionTableParameter> _alarmConditionDic;
        private List<AlarmConditionChecker> _heaterChecker;
        private List<AlarmConditionChecker> _mfcChecker;
        private List<AlarmConditionChecker> _apcChecker;
        private List<AlarmConditionChecker> _auxChecker;
        private object _alarmConditionLocker = new object();
        private bool _isAlarmConditionHasRecipeCommand;//End,Reset,Hold,JumpStep,CallAlarmRecipe,CallAbortRecipe
        private Dictionary<string, string> _hardwareInterlockAlarmConditionDic;
        private Dictionary<string, string> _clnAlarmConditionDic;
        private AlarmEventItem _lastAlarmInAlarmCondition;
        private void SetAlarmConditionTableIndex(int index)
        {
            if (_alarmConditionDic == null)
                return;
            var ret = _alarmConditionDic.TryGetValue(index, out var currentParameter);
            if (!ret)
                return;

            _currentAlarmConditionIndex = index;
            SC.SetItemValueFromString("PM1.AlarmConditionIndex", index.ToString());

            //ResetAlarmCondition();

            for (int i = 0; i < _heaterChecker.Count; i++)
            {
                var checker = _heaterChecker[i];

                //checker.Parameter = checker.Parameter.Clone(currentParameter.HeaterParameterLst.Find(x => x.Name == checker.Heater.Display));
                checker.Parameter = currentParameter.HeaterParameterLst[i];
                //checker.ToleranceCheckerWarning.Reset(checker.Parameter.WarningTime);
                //checker.ToleranceCheckerAlarm.Reset(checker.Parameter.AlarmTime);
            }

            for (int i = 0; i < _mfcChecker.Count && i < currentParameter.MFCParameterLst.Count; i++)
            {
                var checker = _mfcChecker[i];
                checker.Parameter = currentParameter.MFCParameterLst[i];
            }

            for (int i = 0; i < _apcChecker.Count && i < currentParameter.APCParameterLst.Count; i++)
            {
                var checker = _apcChecker[i];
                checker.Parameter = currentParameter.APCParameterLst[i];
            }

            for (int i = 0; i < _auxChecker.Count && i < currentParameter.AUXParameterLst.Count; i++)
            {
                var checker = _auxChecker[i];
                checker.Parameter = currentParameter.AUXParameterLst[i];
            }
        }
        public void ResetAlarmCondition()
        {
            for (int i = 0; i < _heaterChecker.Count; i++)
            {
                var checker = _heaterChecker[i];
                checker.ToleranceCheckerWarning.RST = true;
                checker.ToleranceCheckerAlarm.RST = true;
                checker?.DelayTimer.Restart();
            }

            for (int i = 0; i < _mfcChecker.Count; i++)
            {
                var checker = _mfcChecker[i];
                checker.ToleranceCheckerWarning.RST = true;
                checker.ToleranceCheckerAlarm.RST = true;
                checker?.DelayTimer.Restart();
            }

            for (int i = 0; i < _apcChecker.Count; i++)
            {
                var checker = _apcChecker[i];
                checker.ToleranceCheckerWarning.RST = true;
                checker.ToleranceCheckerAlarm.RST = true;
                checker?.DelayTimer.Restart();
            }

            for (int i = 0; i < _auxChecker.Count; i++)
            {
                var checker = _auxChecker[i];
                checker.ToleranceCheckerWarning.RST = true;
                checker.ToleranceCheckerAlarm.RST = true;
                checker?.DelayTimer.Restart();
            }
        }
        private void InitAlarmConditionChecker()
        {
            InitHeaterChecker();
            InitMFCChecker();
            InitAPCChecker();
            InitAUXChecker();
            _hardwareInterlockAlarmConditionDic = new Dictionary<string, string>()
            {
                {"AlarmSignalOPBoxPS11Out1", "Air/N2-7 Pressure Too Low"},//deviceModel的名称和AlarmCondition ParameterFormat.xml的名称
                {"AlarmSignalGLBoxPG1CNT1Alarm", "N2-1 Pressure Too Low"},
                {"AlarmSignalGLBoxPG1CNT2Alarm", "N2-1 Pressure Too High"},
                {"AlarmSignalGLBoxPG2CNT1Alarm", "SiH2Cl2 Pressure Too Low"},
                {"AlarmSignalGLBoxPG2CNT2Alarm", "SiH2Cl2 Pressure Too High"},
                {"AlarmSignalGLBoxPG3CNT1Alarm", "NH3-1 Pressure To Low"},
                {"AlarmSignalGLBoxPG3CNT2Alarm", "NH3-1 Pressure Too High"},
                {"AlarmSignalGLBoxPG4CNT1Alarm", "NH3-2 Pressure Too Low"},
                {"AlarmSignalGLBoxPG4CNT2Alarm", "NH3-2 Pressure Too High"},
                {"AlarmSignalGLBoxPG5CNT1Alarm", "N2-2 Pressure Too Low"},
                {"AlarmSignalGLBoxPG5CNT2Alarm", "N2-2 Pressure Too High"},
                {"AlarmSignalGLBoxPG6CNT1Alarm", "20% F2/N2 Pressure Too Low"},
                {"AlarmSignalGLBoxPG6CNT2Alarm", "20% F2/N2 Pressure Too High"},
                {"AlarmSignalPG12OUT1", "N2-8-1 Pressure Too Low"},
                {"AlarmSignalPG12OUT2", "N2-8-1 Pressure Too High"},
                {"AlarmSignalPG13OUT1", "N2-8-2 Pressure Too Low"},
                {"AlarmSignalPS14OUT1", "O.PRS-PS14 Pressure Too High"},
                {"AlarmSignalPS14OUT2", "O.PRS-PS14 Pressure Too High"},
                {"AlarmSignalN2PurgeBOXPG16CNT1", "N2-6 Pressure Too Low"},
                {"AlarmSignalN2PurgeBOXPG70CNT2", "N2-70 Pressure Too Low"},
                {"AlarmSignalPS17ValueLowLimitAlarm", "Air/N2-1 Pressure Too Low"},
                {"AlarmSignalHeatingExhaust1stAlarmMS1", "Heater Exhaust Pressure Too Low"},
                {"AlarmSignalScavengeExhaust1stAlarmMS3", "Scavenge Exhaust Pressure Too Low"},
                {"AlarmSignalValveBoxExhaust1stAlarmMS4", "ValveBox Exhaust Pressure Too Low"},
                {"AlarmSignalGasBoxExhaust1stAlarmMS2", "GasBox Exhaust Pressure Too Low"},
                {"AlarmSignalLAExhaust1stAlarmMS7", "LA Exhaust Pressure Too Low"},
                {"AlarmSignalRHC1stAlarmMS8", "RHC Exhaust Pressure Too Low"},
                {"AlarmSignalLoadingAreaExhaust1stAlarmMS5", "Loading Area Exhaust Abnormal"},
                {"AlarmSignalFrontBodyExhaust1stAlarmMS6", "FrontBody Exhaust Pressure Too Low"},
                {"AlarmSignalMainFurnaceCellingTS306", "TEMP1 HTR Abnormal"},
                {"AlarmSignalT101TempStatus", "TEMP3 TR1 Abnormal"},
                {"AlarmSignalT102TempStatus", "TEMP4 TR2 Abnormal"},
                {"AlarmSignalT103TempStatus", "TEMP5 TR3 Abnormal"},
                {"AlarmSignalMagneticFluidLeak", "Magnetic Water Leak"},
                {"AlarmSignalCoolingWaterLeak", "Cooling Water Leak"},
                {"AlarmSignalFBFrontDoorSwitch", "Front Panel Abnormal"},
                {"AlarmSignalFilterBox1DoorSwitch", "Filter Box Cover Abnormal"},
                {"AlarmSignalLABacksideDoorSwitch", "Transfer Room Panel Abnormal"},
                {"AlarmSignalHeaterRoomSWS11S12", "Heater Room Panel Abnormal"},
                {"AlarmSignalGasBoxLowerDoorSW", "GasBox Lower Door Abnormal"},
                {"AlarmSignalGasBoxUpperDoorSW", "GasBox Upper Door Abnormal"},
                {"AlarmSignalRHCTS305", "RHC Abnormal Radiator"},
                {"AlarmSignalRHCFlowAlarmFL901", "RHC Flow Abnormal"},
                {"AlarmSignalCoolingWaterFlowAlarmOfFurnaceFL902", "Cooling Water Flow Of Furnace Abnormal"},
                {"AlarmSignalCoolingWaterFlowAlarmOfShuttleFL903", "Cooling Water Flow Of Shuttle Abnormal"},
                {"AlarmSignalCoolingWaterFlowAlarmOfBoatRotationFL904", "Cooling Water Flow Of BoatRotation Abnormal"},
                {"AlarmSignalCoolingWaterFlowAlarmOfFlangeFL905", "Cooling Water Flow Of Flange Abnormal"},
                {"AlarmSignalCoolingWaterFlowAlarmOfLoadingAreaFL906", "Cooling Water Flow Of Loading Area Abnormal"},
                {"AlarmSignalRFAlarm", "RF Alarm"},
                {"AlarmSignalAirFlowFL70", "RF N2 Flow Abnormal"},
                {"AlarmSignalAirFlowFL71", "RF N2 Flow Abnormal"},
                {"AlarmSignalFilterBox1Fan1Alarm", "Filter Box Fan Abnormal"},
                {"AlarmSignalFilterBox1Fan2Alarm", "Filter Box Fan Abnormal"},
                {"AlarmSignalHCLGasLeak1stAlarm", "SiH2CL2 Gas Leak"},
                {"AlarmSignalHCLGasLeak2ndAlarm", "SiH2CL2 Gas Leak"},
                {"AlarmSignalNH3GasLeak1stAlarm", "NH3 Gas Leak"},
                {"AlarmSignalNH3GasLeak2ndAlarm", "NH3 Gas Leak"},
                {"AlarmSignalF2GasLeak1stAlarm", "F2 Gas Leak"},
                {"AlarmSignalF2GasLeak2ndAlarm", "F2 Gas Leak"},
                {"AlarmSignalGasLeakFault", "Gas Leak Fault"},
                //{"AlarmSignalFurnaceMainCircuitBreakerStatusMonitor", "Heater Power Down"},
                {"AlarmSignalVaccumPumpWarning", "Vacuum Pump Warning"},
                {"AlarmSignalVaccumPumpAlarm", "Vacuum Pump Alarm"},
                {"AlarmSignalPS13HStatus", "O.PRS Too High"},
                {"AlarmSignalPS13LStatus", "CK.PRS Too Low"},
                {"AlarmSignalFFU1DataWriteError", "FFU Data Write Error"},
                {"AlarmSignalFFU2DataWriteError", "FFU Data Write Error"},
                {"AlarmSignalFFU3DataWriteError", "FFU Data Write Error"},
                {"AlarmSignalFFU4DataWriteError", "FFU Data Write Error"},
                {"AlarmSignalFFU5DataWriteError", "FFU Data Write Error"},
                {"AlarmSignalFFU6DataWriteError", "FFU Data Write Error"},
                {"AlarmSignalFFU7DataWriteError", "FFU Data Write Error"},
                {"AlarmSignalFFU8DataWriteError", "FFU Data Write Error"},
                {"AlarmSignalFFU9DataWriteError", "FFU Data Write Error"},
                {"AlarmSignalDG1Output1", "P.CNT Pressure NG"},
                {"AlarmSignalDG1Output2", "P.CNT Pressure NG"},
                {"AlarmSignalAV91_1RHCAirInOpened", "RHC.DMR Abnormal"},
                {"AlarmSignalAV91_2RHCAirInOpened", "RHC.DMR Abnormal"},
                {"AlarmSignalAV91_3RHCAirInOpened", "RHC.DMR Abnormal"},
                {"AlarmSignalAV91_4RHCAirInOpened", "RHC.DMR Abnormal"},
                {"AlarmSignalBlowerPower", "BlowerPower Overload"},
                {"AlarmSignalRFSetPowerReached", "RF Output Abnormal"},
                {"AlarmSignalN2FlowInFOUPAbnormal", "N2 Flow in FOUP Abnormal"},
                {"AlarmSignalCapHeaterAbnormal", "Cap Heater Abnormal"},
                {"AlarmSignalHeaterUOverTemp", "Tube Heater OverTemp"},
                {"AlarmSignalHeaterCUOverTemp", "Tube Heater OverTemp"},
                {"AlarmSignalHeaterCOverTemp", "Tube Heater OverTemp"},
                {"AlarmSignalHeaterCLOverTemp", "Tube Heater OverTemp"},
                {"AlarmSignalHeaterLOverTemp", "Tube Heater OverTemp"},
                {"InterlockAlarm", "Valve Interlock"},
                {"GasLine1AlarmSignalTempOutRange", "temp range alarm"},
                {"GasLine2AlarmSignalTempOutRange", "temp range alarm"},
                {"GasLine3AlarmSignalTempOutRange", "temp range alarm"},
                {"GasLine4AlarmSignalTempOutRange", "temp range alarm"},
                {"GasLine5AlarmSignalTempOutRange", "temp range alarm"},
                {"GasLine6AlarmSignalTempOutRange", "temp range alarm"},
                {"GasLine7AlarmSignalTempOutRange", "temp range alarm"},
                {"GasLine1AlarmSignalCLN", "CLN alarm"},
                {"GasLine2AlarmSignalCLN", "CLN alarm"},
                {"GasLine3AlarmSignalCLN", "CLN alarm"},
                {"GasLine4AlarmSignalCLN", "CLN alarm"},
                {"GasLine5AlarmSignalCLN", "CLN alarm"},
                {"GasLine6AlarmSignalCLN", "CLN alarm"},
                {"GasLine7AlarmSignalCLN", "CLN alarm"},
            };

            _clnAlarmConditionDic = new Dictionary<string, string>()
            {
                {"AlarmSignalOPBoxPS11Out1", "temp range warning"},//deviceModel的名称和AlarmCondition ParameterFormat.xml的名称
                {"AlarmSignalTempOutRange", "temp range alarm"},
                {"AlarmSignalGLBoxPG1CNT2Alarm", "CLN warning"},
                {"AlarmSignalCLN", "CLN alarm"},
            };

            if (!string.IsNullOrEmpty(SC.GetStringValue("PM1.AlarmCondition")))
            {
                InitAlarmCondition(SC.GetStringValue("PM1.AlarmCondition"));
                int.TryParse(SC.GetStringValue("PM1.AlarmConditionIndex"), out int index);
                SetAlarmConditionTableIndex(index);
            }
        }
        private void InitAUXChecker()
        {
            _auxChecker = new List<AlarmConditionChecker>();
            for (int index = 0; index < 512; index++)
            {
                if (!SC.ContainsItem($"PM1.RecipeEditParameter.AUX.{index}.AI"))
                    continue;
                var checker = new AlarmConditionChecker()
                {
                    AUXIOName = SC.GetStringValue($"PM1.RecipeEditParameter.AUX.{index}.AI"),
                    AUXIndex = index,
                    ToleranceCheckerWarning = new ToleranceChecker(),
                    ToleranceCheckerAlarm = new ToleranceChecker(),
                    Parameter = new AlarmConditionAIParameter(),
                    DelayTimer = new Stopwatch(),
                };

                _auxChecker.Add(checker);
            }
        }
        private void InitAPCChecker()
        {
            _apcChecker = new List<AlarmConditionChecker>()
            {
                new AlarmConditionChecker()
                {
                    APC = APC,
                    ToleranceCheckerWarning = new ToleranceChecker(),
                    ToleranceCheckerAlarm = new ToleranceChecker(),
                    Parameter = new AlarmConditionAIParameter(),
                    DelayTimer = new Stopwatch(),
                },
                new AlarmConditionChecker()
                {
                    APC = APC,
                    ToleranceCheckerWarning = new ToleranceChecker(),
                    ToleranceCheckerAlarm = new ToleranceChecker(),
                    Parameter = new AlarmConditionAIParameter(),
                    DelayTimer = new Stopwatch(),
                },
                new AlarmConditionChecker()
                {
                    APC = APC,
                    ToleranceCheckerWarning = new ToleranceChecker(),
                    ToleranceCheckerAlarm = new ToleranceChecker(),
                    Parameter = new AlarmConditionAIParameter(),
                    DelayTimer = new Stopwatch(),
                },
            };
        }
        private void InitMFCChecker()
        {
            _mfcChecker = new List<AlarmConditionChecker>()
            {
                new AlarmConditionChecker()
                {
                    MFC = MFC1,
                    ToleranceCheckerWarning = new ToleranceChecker(),
                    ToleranceCheckerAlarm = new ToleranceChecker(),
                    Parameter = new AlarmConditionAIParameter(),
                    DelayTimer = new Stopwatch(),
                },
                new AlarmConditionChecker()
                {
                    MFC = MFC2,
                    ToleranceCheckerWarning = new ToleranceChecker(),
                    ToleranceCheckerAlarm = new ToleranceChecker(),
                    Parameter = new AlarmConditionAIParameter(),
                    DelayTimer = new Stopwatch(),
                },
                new AlarmConditionChecker()
                {
                    MFC = MFC3,
                    ToleranceCheckerWarning = new ToleranceChecker(),
                    ToleranceCheckerAlarm = new ToleranceChecker(),
                    Parameter = new AlarmConditionAIParameter(),
                    DelayTimer = new Stopwatch(),
                },
                new AlarmConditionChecker()
                {
                    MFC = MFC4,
                    ToleranceCheckerWarning = new ToleranceChecker(),
                    ToleranceCheckerAlarm = new ToleranceChecker(),
                    Parameter = new AlarmConditionAIParameter(),
                    DelayTimer = new Stopwatch(),
                },
                new AlarmConditionChecker()
                {
                    MFC = MFC5,
                    ToleranceCheckerWarning = new ToleranceChecker(),
                    ToleranceCheckerAlarm = new ToleranceChecker(),
                    Parameter = new AlarmConditionAIParameter(),
                    DelayTimer = new Stopwatch(),
                },
                new AlarmConditionChecker()
                {
                    MFC = MFC6,
                    ToleranceCheckerWarning = new ToleranceChecker(),
                    ToleranceCheckerAlarm = new ToleranceChecker(),
                    Parameter = new AlarmConditionAIParameter(),
                    DelayTimer = new Stopwatch(),
                },
                new AlarmConditionChecker()
                {
                    MFC = MFC7,
                    ToleranceCheckerWarning = new ToleranceChecker(),
                    ToleranceCheckerAlarm = new ToleranceChecker(),
                    Parameter = new AlarmConditionAIParameter(),
                    DelayTimer = new Stopwatch(),
                },
                new AlarmConditionChecker()
                {
                    MFC = MFC8,
                    ToleranceCheckerWarning = new ToleranceChecker(),
                    ToleranceCheckerAlarm = new ToleranceChecker(),
                    Parameter = new AlarmConditionAIParameter(),
                    DelayTimer = new Stopwatch(),
                },
                new AlarmConditionChecker()
                {
                    MFC = MFC9,
                    ToleranceCheckerWarning = new ToleranceChecker(),
                    ToleranceCheckerAlarm = new ToleranceChecker(),
                    Parameter = new AlarmConditionAIParameter(),
                    DelayTimer = new Stopwatch(),
                },
                new AlarmConditionChecker()
                {
                    MFC = MFC10,
                    ToleranceCheckerWarning = new ToleranceChecker(),
                    ToleranceCheckerAlarm = new ToleranceChecker(),
                    Parameter = new AlarmConditionAIParameter(),
                    DelayTimer = new Stopwatch(),
                },
                new AlarmConditionChecker()
                {
                    MFC = MFC11,
                    ToleranceCheckerWarning = new ToleranceChecker(),
                    ToleranceCheckerAlarm = new ToleranceChecker(),
                    Parameter = new AlarmConditionAIParameter(),
                    DelayTimer = new Stopwatch(),
                },
                new AlarmConditionChecker()
                {
                    MFC = MFC12,
                    ToleranceCheckerWarning = new ToleranceChecker(),
                    ToleranceCheckerAlarm = new ToleranceChecker(),
                    Parameter = new AlarmConditionAIParameter(),
                    DelayTimer = new Stopwatch(),
                },
            };

            if (MFC13 != null)
            {
                _mfcChecker.Add(new AlarmConditionChecker()
                {
                    MFC = MFC13,
                    ToleranceCheckerWarning = new ToleranceChecker(),
                    ToleranceCheckerAlarm = new ToleranceChecker(),
                    Parameter = new AlarmConditionAIParameter(),
                    DelayTimer = new Stopwatch(),
                });
            }

            if (MFC14 != null)
            {
                _mfcChecker.Add(new AlarmConditionChecker()
                {
                    MFC = MFC14,
                    ToleranceCheckerWarning = new ToleranceChecker(),
                    ToleranceCheckerAlarm = new ToleranceChecker(),
                    Parameter = new AlarmConditionAIParameter(),
                    DelayTimer = new Stopwatch(),
                });
            }

            if (MFC15 != null)
            {
                _mfcChecker.Add(new AlarmConditionChecker()
                {
                    MFC = MFC15,
                    ToleranceCheckerWarning = new ToleranceChecker(),
                    ToleranceCheckerAlarm = new ToleranceChecker(),
                    Parameter = new AlarmConditionAIParameter(),
                    DelayTimer = new Stopwatch(),
                });
            }

            if (MFC16 != null)
            {
                _mfcChecker.Add(new AlarmConditionChecker()
                {
                    MFC = MFC16,
                    ToleranceCheckerWarning = new ToleranceChecker(),
                    ToleranceCheckerAlarm = new ToleranceChecker(),
                    Parameter = new AlarmConditionAIParameter(),
                    DelayTimer = new Stopwatch(),
                });
            }
        }
        private void InitHeaterChecker()
        {
            _heaterChecker = new List<AlarmConditionChecker>()
            {
                new AlarmConditionChecker()
                {
                    Heater = HeaterU,
                    ToleranceCheckerWarning = new ToleranceChecker(),
                    ToleranceCheckerAlarm = new ToleranceChecker(),
                    Parameter = new AlarmConditionAIParameter(),
                    DelayTimer = new Stopwatch(),
                },
                new AlarmConditionChecker()
                {
                    Heater = HeaterCU,
                    ToleranceCheckerWarning = new ToleranceChecker(),
                    ToleranceCheckerAlarm = new ToleranceChecker(),
                    Parameter = new AlarmConditionAIParameter(),
                    DelayTimer = new Stopwatch(),
                },
                new AlarmConditionChecker()
                {
                    Heater = HeaterC,
                    ToleranceCheckerWarning = new ToleranceChecker(),
                    ToleranceCheckerAlarm = new ToleranceChecker(),
                    Parameter = new AlarmConditionAIParameter(),
                    DelayTimer = new Stopwatch(),
                },
                new AlarmConditionChecker()
                {
                    Heater = HeaterCL,
                    ToleranceCheckerWarning = new ToleranceChecker(),
                    ToleranceCheckerAlarm = new ToleranceChecker(),
                    Parameter = new AlarmConditionAIParameter(),
                    DelayTimer = new Stopwatch(),
                },
                new AlarmConditionChecker()
                {
                    Heater = HeaterL,
                    ToleranceCheckerWarning = new ToleranceChecker(),
                    ToleranceCheckerAlarm = new ToleranceChecker(),
                    Parameter = new AlarmConditionAIParameter(),
                    DelayTimer = new Stopwatch(),
                },
            };
        }
        public void InitAlarmCondition(string fileName)
        {
            if (string.IsNullOrEmpty(fileName))
            {
                //EV.PostWarningLog(ModuleName.PM1.ToString(), $"Heater temperature correct file is empty");
                return;
            }

            _currentAlarmConditionFileName = fileName;
            //_currentAlarmConditionIndex = index;
            var content = ParameterFileManager.Instance.LoadParameter("Parameter\\AlarmCondition", fileName, false);
            if (string.IsNullOrEmpty(content))
            {
                //EV.PostWarningLog(ModuleName.PM1.ToString(), $"{fileNameAndPath} heater temperature correct file is empty");
                return;
            }
            var doc = new XmlDocument();
            doc.LoadXml(content);

            XmlNodeList nodeSteps = doc.SelectNodes($"Aitex/TableParameterData/Module[@Name='']/Step");
            if (nodeSteps == null)
                nodeSteps = doc.SelectNodes($"Aitex/TableParameterData/Step");
            if (nodeSteps == null)
            {
                EV.PostWarningLog(ModuleName.PM1.ToString(), $"Invalid alarm condition file {fileName}");
                return;
            }

            SC.SetItemValueFromString("PM1.AlarmCondition", fileName);

            _alarmConditionDic = new Dictionary<int, AlarmConditionTableParameter>();
            for (int i = 0; i < nodeSteps.Count; i++)
            {
                var step = nodeSteps[i];
                XmlElement stepNode = step as XmlElement;
                int tableIndex = i + 1;
                AlarmConditionTableParameter table = new AlarmConditionTableParameter();
                List<AlarmConditionDIParameter> valveInterlockParameterLst = null;
                List<AlarmConditionDIParameter> clnParameterLst = null;
                foreach (XmlAttribute att in stepNode.Attributes)
                {
                    switch (att.Name)
                    {
                        case "StepNo":
                            int.TryParse(att.Value, out int no);
                            table.No = no;
                            break;
                        case "Name":
                            table.Name = att.Value;
                            break;
                        case "TempHeater":
                            table.HeaterParameterLst = InitAlarmConditionItem(att.Value);
                            break;
                        case "TempBoat":
                            break;
                        case "FlowDeviation":
                            table.MFCParameterLst = InitAlarmConditionItem(att.Value);
                            break;
                        case "Press":
                            table.APCParameterLst = InitAlarmConditionItem(att.Value);
                            break;
                        case "AUX":
                            table.AUXParameterLst = InitAlarmConditionItem(att.Value);
                            break;
                        case "HWILK":
                            table.InterlockParameterLst = InitAlarmConditionDIItem(att.Value);
                            break;
                        case "ValveILK":
                            valveInterlockParameterLst = InitAlarmConditionDIItem(att.Value);
                            break;
                        case "TempController":
                            break;
                        case "APCController":
                            break;
                        case "TransferError":
                            break;
                        case "SerialLineDown":
                            break;
                        case "LanLineDown":
                            break;
                        case "DeviceNetLineDown":
                            break;
                        case "Sensor":
                            break;
                        case "CLNAlarmList":
                            clnParameterLst = InitAlarmConditionDIItem(att.Value);
                            break;
                    }
                }

                if (table.InterlockParameterLst != null && valveInterlockParameterLst != null)
                    table.InterlockParameterLst.AddRange(valveInterlockParameterLst);

                if (table.InterlockParameterLst != null && clnParameterLst != null)
                    table.InterlockParameterLst.AddRange(clnParameterLst);

                if (!_alarmConditionDic.ContainsKey(table.No))
                    _alarmConditionDic.Add(table.No, table);
                _alarmConditionDic[table.No] = table;
            }
        }

        public void MonitorAlarmCondition()
        {
            if (_alarmConditionDic == null)
                return;

            _isAlarmConditionHasRecipeCommand = false;
            MonitorHeaterAlarmCondition();
            MonitorMFCAlarmCondition();
            MonitorAUXAlarmCondition();
            MonitorAPCAlarmCondition();
            MonitorInterlockAlarmCondition();
        }

        private void MonitorInterlockAlarmCondition()
        {
            if (_triggeredAlarmList == null || _triggeredAlarmList.Count == 0)
                return;

            if (_hardwareInterlockAlarmConditionDic == null)
                return;

            if (_alarmConditionDic == null || !_alarmConditionDic.ContainsKey(_currentAlarmConditionIndex) || _alarmConditionDic[_currentAlarmConditionIndex].InterlockParameterLst == null)
                return;

            var newAlarm = _triggeredAlarmList[_triggeredAlarmList.Count - 1];
            var alarmConditionItemName = "";
            for (int i = _triggeredAlarmList.Count - 1; i >= 0; i--)
            {
                var alarm = _triggeredAlarmList[i];
                var interval = DateTime.Now - newAlarm.OccuringTime;
                if (interval.TotalMilliseconds > 1000)//老的alarm
                    continue;
                var paras = newAlarm.EventEnum.Split('.');
                if (paras.Length < 2)
                    continue;
                var ret = _hardwareInterlockAlarmConditionDic.TryGetValue(paras[1], out string name);
                if (ret)
                {
                    newAlarm = alarm;
                    alarmConditionItemName = name;
                    var alarmConditionItem = _alarmConditionDic[_currentAlarmConditionIndex].InterlockParameterLst.FirstOrDefault(x => x.Name == alarmConditionItemName);
                    if (alarmConditionItem == null)
                        continue;
                    if (alarmConditionItem.IsEnable)
                        ProcessAlarmConditionErrorCommand(alarmConditionItem.Command);
                    break;
                }
            }
        }
        private void MonitorAPCAlarmCondition()
        {
            for (int i = 0; i < _apcChecker.Count; i++)
            {
                var checker = _apcChecker[i];
                if (checker.Parameter.Unit == null)
                    continue;

                var warningLow = checker.Parameter.WarningLow;
                var warningHigh = checker.Parameter.WarningHigh;
                var alarmLow = checker.Parameter.AlarmLow;
                var alarmHigh = checker.Parameter.AlarmHigh;
                var unit = checker.Parameter.Unit;
                if (checker.Parameter.Unit.ToLower().Contains("%"))
                {
                    unit = "%";
                    //angle
                    if (checker.Parameter.Unit.ToLower() == "%d")
                    {
                        //do nothing
                    }
                    else
                    {
                        warningLow = (float)checker.APC.DeviceData.PositionSetPoint * warningLow;
                        warningHigh = (float)checker.APC.DeviceData.PositionSetPoint * warningHigh;
                        alarmLow = (float)checker.APC.DeviceData.PositionSetPoint * alarmLow;
                        alarmHigh = (float)checker.APC.DeviceData.PositionSetPoint * alarmHigh;
                    }

                    if (checker.Parameter.IsWarningEnable && checker.Parameter.WarningTime > 0 && checker.DelayTimer.IsRunning && checker.DelayTimer.ElapsedMilliseconds >= checker.Parameter.WarningDelayDetectTimeS * 1000)
                        checker.ToleranceCheckerWarning.Monitor(checker.APC.DeviceData.PositionFeedback,
                            checker.APC.DeviceData.PositionSetPoint - warningLow, checker.APC.DeviceData.PositionSetPoint + warningHigh, checker.Parameter.WarningTime);

                    if (checker.Parameter.IsAlarmEnable && checker.Parameter.AlarmTime > 0 && checker.DelayTimer.IsRunning && checker.DelayTimer.ElapsedMilliseconds >= checker.Parameter.AlarmDelayDetectTimeS * 1000)
                        checker.ToleranceCheckerAlarm.Monitor(checker.APC.DeviceData.PositionFeedback,
                            checker.APC.DeviceData.PositionSetPoint - alarmLow, checker.APC.DeviceData.PositionSetPoint + alarmHigh, checker.Parameter.AlarmTime);

                    if (checker.ToleranceCheckerAlarm.Trig || checker.ToleranceCheckerWarning.Trig)
                    {
                        var range = "";
                        var time = "";
                        var command = checker.Parameter.AlarmCommand;
                        if (checker.ToleranceCheckerAlarm.Trig)
                        {
                            range = $"({checker.APC.DeviceData.PositionSetPoint - alarmLow},{checker.APC.DeviceData.PositionSetPoint + alarmHigh})";
                            time = $"{checker.Parameter.AlarmTime:F1}";
                            checker.APC.APCAngleToleranceAlarm.Set($"APC angle out of range {range} {unit} in {time} seconds");
                            command = checker.Parameter.AlarmCommand;
                        }
                        else if (checker.ToleranceCheckerWarning.Trig)
                        {
                            range = $"({checker.APC.DeviceData.PositionSetPoint - warningLow},{checker.APC.DeviceData.PositionSetPoint + warningHigh})";
                            time = $"{checker.Parameter.WarningTime:F1}";
                            checker.APC.APCAngleToleranceWarning.Set($"APC angle out of range {range} {unit} in {time} seconds");
                            command = checker.Parameter.WarningCommand;
                        }

                        ProcessAlarmConditionErrorCommand(command);
                    }
                }
                else
                {
                    warningLow = (float)checker.APC.DeviceData.PressureSetPoint * warningLow;
                    warningHigh = (float)checker.APC.DeviceData.PressureSetPoint * warningHigh;
                    alarmLow = (float)checker.APC.DeviceData.PressureSetPoint * alarmLow;
                    alarmHigh = (float)checker.APC.DeviceData.PressureSetPoint * alarmHigh;

                    var alarmToleranceAlarm = checker.APC.APCPressure2ToleranceAlarm;
                    var alarmToleranceWarning = checker.APC.APCPressure2ToleranceWarning;
                    var pressureFeedback = checker.APC.DeviceData.Pressure2Feedback;
                    if (i == 0)
                    {
                        alarmToleranceAlarm = checker.APC.APCPressure1ToleranceAlarm;
                        alarmToleranceWarning = checker.APC.APCPressure1ToleranceWarning;
                        pressureFeedback = checker.APC.DeviceData.Pressure1Feedback;
                    }

                    if (checker.Parameter.IsWarningEnable && checker.Parameter.WarningTime > 0)
                        checker.ToleranceCheckerWarning.Monitor(pressureFeedback,
                            checker.APC.DeviceData.PressureSetPoint - warningLow, checker.APC.DeviceData.PressureSetPoint + warningHigh, checker.Parameter.WarningTime);

                    if (checker.Parameter.IsAlarmEnable && checker.Parameter.AlarmTime > 0)
                        checker.ToleranceCheckerAlarm.Monitor(pressureFeedback,
                            checker.APC.DeviceData.PressureSetPoint - alarmLow, checker.APC.DeviceData.PressureSetPoint + alarmHigh, checker.Parameter.AlarmTime);

                    if (checker.ToleranceCheckerAlarm.Trig || checker.ToleranceCheckerWarning.Trig)
                    {
                        var range = "";
                        var time = "";
                        var command = checker.Parameter.AlarmCommand;
                        if (checker.ToleranceCheckerAlarm.Trig)
                        {
                            range = $"({checker.APC.DeviceData.PressureSetPoint - alarmLow},{checker.APC.DeviceData.PressureSetPoint + alarmHigh})";
                            time = $"{checker.Parameter.AlarmTime:F1}";
                            alarmToleranceAlarm.Set($"APC Press{i + 1} out of range {range} {unit} in {time} seconds");
                            command = checker.Parameter.AlarmCommand;
                        }
                        else if (checker.ToleranceCheckerWarning.Trig)
                        {
                            range = $"({checker.APC.DeviceData.PressureSetPoint - warningLow},{checker.APC.DeviceData.PressureSetPoint + warningHigh})";
                            time = $"{checker.Parameter.WarningTime:F1}";
                            alarmToleranceWarning.Set($"APC Press{i + 1} out of range {range} {unit} in {time} seconds");
                            command = checker.Parameter.WarningCommand;
                        }

                        ProcessAlarmConditionErrorCommand(command);
                    }
                }
            }
        }
        private void MonitorAUXAlarmCondition()
        {
            if (SC.ContainsItem("Minics.EnableMinics") && SC.GetValue<bool>("Minics.EnableMinics"))
            { return; }

            for (int i = 0; i < _auxChecker.Count; i++)
            {
                var checker = _auxChecker[i];

                if (checker.Parameter.Unit == null)
                    continue;

                var warningLow = checker.Parameter.WarningLow;
                var warningHigh = checker.Parameter.WarningHigh;
                var alarmLow = checker.Parameter.AlarmLow;
                var alarmHigh = checker.Parameter.AlarmHigh;
                var unit = "";
                var setpoint = 0.0f;
                var feedback = 0.0f;
                var display = "";
                if (_auxDic != null && _auxDic.ContainsKey(_currentAuxTable))
                {
                    foreach (var item in _auxDic[_currentAuxTable])
                    {
                        if (item == null || checker.AUXIOName != item.IOName)
                            continue;

                        setpoint = (float)item.SetPointConfig.DoubleValue;
                        unit = item.Unit;
                        display = item.DisplayNameConfig.StringValue;
                        feedback = IO.AI[$"{Module}.{item.IOName}"] != null ? IO.AI[$"{Module}.{item.IOName}"].FloatValue : 0;
                        break;
                    }
                }

                if (checker.Parameter.Unit.ToLower() == "%sv")
                {
                    warningLow = (float)setpoint * warningLow / 100.0f;
                    warningHigh = (float)setpoint * warningHigh / 100.0f;
                    alarmLow = (float)setpoint * alarmLow / 100.0f;
                    alarmHigh = (float)setpoint * alarmHigh / 100.0f;
                }
                else if (checker.Parameter.Unit.ToLower() == "%fs")
                {
                    //后续改为scale
                    warningLow = (float)setpoint * warningLow / 100.0f;
                    warningHigh = (float)setpoint * warningHigh / 100.0f;
                    alarmLow = (float)setpoint * alarmLow / 100.0f;
                    alarmHigh = (float)setpoint * alarmHigh / 100.0f;
                }

                if (checker.Parameter.IsWarningEnable && checker.Parameter.WarningTime > 0 && checker.DelayTimer.IsRunning && checker.DelayTimer.ElapsedMilliseconds >= checker.Parameter.WarningDelayDetectTimeS * 1000)
                    checker.ToleranceCheckerWarning.Monitor(feedback,
                        setpoint - warningLow, setpoint + warningHigh, checker.Parameter.WarningTime);

                if (checker.Parameter.IsAlarmEnable && checker.Parameter.AlarmTime > 0 && checker.DelayTimer.IsRunning && checker.DelayTimer.ElapsedMilliseconds >= checker.Parameter.AlarmDelayDetectTimeS * 1000)
                    checker.ToleranceCheckerAlarm.Monitor(feedback,
                        setpoint - alarmLow, setpoint + alarmHigh, checker.Parameter.AlarmTime);

                if (checker.ToleranceCheckerAlarm.Trig || checker.ToleranceCheckerWarning.Trig)
                {
                    var range = "";
                    var time = "";
                    var ret = AUXAlarmDic.TryGetValue(checker.AUXIndex, out var AUXAlarm);
                    if (ret)
                    {
                        var command = checker.Parameter.AlarmCommand;
                        if (checker.ToleranceCheckerAlarm.Trig)
                        {
                            range = $"({(setpoint - alarmLow).ToString("f3")},{(setpoint + alarmHigh).ToString("f3")})";
                            time = $"{checker.Parameter.AlarmTime:F1}";
                            AUXAlarm.Item2.Set($"AUX {display} value out of range {range} {unit} in {time} seconds");
                            command = checker.Parameter.AlarmCommand;
                        }
                        else if (checker.ToleranceCheckerWarning.Trig)
                        {
                            range = $"({(setpoint - warningLow).ToString("f3")},{(setpoint + warningHigh).ToString("f3")})";
                            time = $"{checker.Parameter.WarningTime:F1}";
                            AUXAlarm.Item1.Set($"AUX {display} value out of range {range} {unit} in {time} seconds");
                            command = checker.Parameter.WarningCommand;
                        }

                        ProcessAlarmConditionErrorCommand(command);
                    }
                }
            }
        }
        private void MonitorMFCAlarmCondition()
        {
            for (int i = 0; i < _mfcChecker.Count; i++)
            {
                var checker = _mfcChecker[i];
                if (checker.Parameter.Unit == null)
                    continue;

                var warningLow = checker.Parameter.WarningLow;
                var warningHigh = checker.Parameter.WarningHigh;
                var alarmLow = checker.Parameter.AlarmLow;
                var alarmHigh = checker.Parameter.AlarmHigh;
                var unit = checker.MFC.Unit;
                if (checker.Parameter.Unit.ToLower() == "%sv")
                {
                    warningLow = (float)checker.MFC.SetPoint * warningLow / 100.0f;
                    warningHigh = (float)checker.MFC.SetPoint * warningHigh / 100.0f;
                    alarmLow = (float)checker.MFC.SetPoint * alarmLow / 100.0f;
                    alarmHigh = (float)checker.MFC.SetPoint * alarmHigh / 100.0f;
                }
                else if (checker.Parameter.Unit.ToLower() == "%fs")
                {
                    warningLow = (float)checker.MFC.Scale * warningLow / 100.0f;
                    warningHigh = (float)checker.MFC.Scale * warningHigh / 100.0f;
                    alarmLow = (float)checker.MFC.Scale * alarmLow / 100.0f;
                    alarmHigh = (float)checker.MFC.Scale * alarmHigh / 100.0f;
                }

                if (checker.Parameter.IsWarningEnable && checker.Parameter.WarningTime > 0 && checker.DelayTimer.IsRunning && checker.DelayTimer.ElapsedMilliseconds >= checker.Parameter.WarningDelayDetectTimeS * 1000)
                    checker.ToleranceCheckerWarning.Monitor(checker.MFC.FeedBack,
                        checker.MFC.SetPoint - warningLow, checker.MFC.SetPoint + warningHigh, checker.Parameter.WarningTime);

                if (checker.Parameter.IsAlarmEnable && checker.Parameter.AlarmTime > 0 && checker.DelayTimer.IsRunning && checker.DelayTimer.ElapsedMilliseconds >= checker.Parameter.AlarmDelayDetectTimeS * 1000)
                    checker.ToleranceCheckerAlarm.Monitor(checker.MFC.FeedBack,
                        checker.MFC.SetPoint - alarmLow, checker.MFC.SetPoint + alarmHigh, checker.Parameter.AlarmTime);

                if (checker.ToleranceCheckerAlarm.Trig || checker.ToleranceCheckerWarning.Trig)
                {
                    var range = "";
                    var time = "";
                    var command = checker.Parameter.AlarmCommand;
                    if (checker.ToleranceCheckerAlarm.Trig)
                    {
                        range = $"({(checker.MFC.SetPoint - alarmLow).ToString("f3")},{(checker.MFC.SetPoint + alarmHigh).ToString("f3")})";
                        time = $"{checker.Parameter.AlarmTime:F1}";
                        checker.MFC.AlarmToleranceAlarm.Set($"{Display} flow out of range {range} {unit} in {time} seconds");
                        command = checker.Parameter.AlarmCommand;
                    }
                    else if (checker.ToleranceCheckerWarning.Trig)
                    {
                        range = $"({(checker.MFC.SetPoint - warningLow).ToString("f3")},{(checker.MFC.SetPoint + warningHigh).ToString("f3")})";
                        time = $"{checker.Parameter.WarningTime:F1}";
                        checker.MFC.AlarmToleranceWarning.Set($"{Display} flow out of range {range} {unit} in {time} seconds");
                        command = checker.Parameter.WarningCommand;
                    }

                    ProcessAlarmConditionErrorCommand(command);
                }
            }
        }
        private void MonitorHeaterAlarmCondition()
        {
            for (int i = 0; i < _heaterChecker.Count; i++)
            {
                var checker = _heaterChecker[i];
                if (checker.Parameter.Unit == null)
                    continue;

                if (checker.Parameter.IsWarningEnable && checker.Parameter.WarningTime > 0 && checker.DelayTimer.IsRunning && checker.DelayTimer.ElapsedMilliseconds >= checker.Parameter.WarningDelayDetectTimeS * 1000)
                    checker.ToleranceCheckerWarning.Monitor(checker.Heater.TempFeedback,
                        checker.Heater.TempSetPoint - checker.Parameter.WarningLow, checker.Heater.TempSetPoint + checker.Parameter.WarningHigh, checker.Parameter.WarningTime);

                if (checker.Parameter.IsAlarmEnable && checker.Parameter.AlarmTime > 0 && checker.DelayTimer.IsRunning && checker.DelayTimer.ElapsedMilliseconds >= checker.Parameter.AlarmDelayDetectTimeS * 1000)
                    checker.ToleranceCheckerAlarm.Monitor(checker.Heater.TempFeedback,
                        checker.Heater.TempSetPoint - checker.Parameter.AlarmLow, checker.Heater.TempSetPoint + checker.Parameter.AlarmHigh, checker.Parameter.AlarmTime);

                if (checker.ToleranceCheckerAlarm.Trig || checker.ToleranceCheckerWarning.Trig)
                {
                    var range = "";
                    var time = "";
                    var command = checker.Parameter.AlarmCommand;
                    if (checker.ToleranceCheckerAlarm.Trig)
                    {
                        range = $"({checker.Heater.TempSetPoint - checker.Parameter.AlarmLow},{checker.Heater.TempSetPoint + checker.Parameter.AlarmHigh})";
                        time = $"{checker.Parameter.AlarmTime:F1}";
                        checker.Heater.AlarmToleranceAlarm.Set($"{Display} temperature out of range {range} °C in {time} seconds");
                        command = checker.Parameter.AlarmCommand;
                    }
                    else if (checker.ToleranceCheckerWarning.Trig)
                    {
                        range = $"({checker.Heater.TempSetPoint - checker.Parameter.WarningLow},{checker.Heater.TempSetPoint + checker.Parameter.WarningHigh})";
                        time = $"{checker.Parameter.WarningTime:F1}";
                        checker.Heater.AlarmToleranceWarning.Set($"{Display} temperature out of range {range} °C in {time} seconds");
                        command = checker.Parameter.WarningCommand;
                    }

                    ProcessAlarmConditionErrorCommand(command);
                }
            }
        }
        private void ProcessAlarmConditionErrorCommand(string command)
        {
            var recipe = "";
            var recipeType = "";
            var recipeTable = "";
            switch (command)
            {
                case "Reset":
                    if (_isAlarmConditionHasRecipeCommand)
                        break;
                    _isAlarmConditionHasRecipeCommand = true;
                    recipe = SC.GetStringValue("System.Recipe.Reset Recipe");
                    recipeType = "Reset";
                    CheckToPostMessage((int)MSG.RunOtherRecipe, recipe, recipeType);
                    LOG.Write($"Alarm condition: command={command} recipe={recipe}");
                    break;
                case "End":
                    if (_isAlarmConditionHasRecipeCommand)
                        break;
                    _isAlarmConditionHasRecipeCommand = true;
                    if (IsProcessing)
                    {
                        //因为要跳到执行最后一步，所以stepNumber需要减一
                        _processRoutine.JumpCurrentRecipeStep(RecipeRunningInfo.RecipeStepList.Count - 1, RecipeRunningInfo.RecipeStepList[RecipeRunningInfo.RecipeStepList.Count - 1].StepName);
                    }
                    else
                    {
                        if (!RecipeParser.Parse(SC.GetStringValue("PM1.ProcessRecipe"), Module, out var recipeHead, out var recipeSteps, out var reason, "Process"))
                        {
                            PreprocessStartFailedWarning.Set($"Load process recipe {SC.GetStringValue("PM1.ProcessRecipe")} failed, {reason}");
                            return;
                        }

                        RecipeRunningInfo.MainRecipeName = SC.GetStringValue("PM1.ProcessRecipe");
                        RecipeRunningInfo.Head = recipeHead;
                        RecipeRunningInfo.RecipeStepList = recipeSteps;
                        CheckToPostMessage((int)MSG.AlarmConditionJumpStep, RecipeRunningInfo.RecipeStepList.Count - 1);
                    }

                    LOG.Write($"Alarm condition: command={command} step name={RecipeRunningInfo.RecipeStepList[RecipeRunningInfo.RecipeStepList.Count - 1].StepName}");
                    break;
                case "Hold":
                    if (_isAlarmConditionHasRecipeCommand)
                        break;
                    _isAlarmConditionHasRecipeCommand = true;
                    _processRoutine.PauseRecipe();
                    LOG.Write($"Alarm condition: command={command}");
                    break;
                case "Monitor":
                    LOG.Write($"Alarm condition: command={command}");
                    break;
                case "Buzzer":
                    Singleton<EquipmentManager>.Instance.IsAlarmConditionBuzzerOn = true;
                    LOG.Write($"Alarm condition: command={command}");
                    break;
                default:
                    if (_isAlarmConditionHasRecipeCommand)
                        break;
                    _isAlarmConditionHasRecipeCommand = true;
                    if (command.StartsWith("JUMP"))
                    {
                        //Jump step
                        //Jump 1:
                        var stepName = command.Replace("JUMP ", "");
                        if (IsProcessing)
                        {
                            var jumpStepNumber = RecipeRunningInfo.RecipeStepList.FindIndex(x => x.StepName == stepName);
                            if (jumpStepNumber > 0)
                            {
                                _processRoutine.JumpCurrentRecipeStep(jumpStepNumber, stepName);
                            }
                        }
                        else
                        {
                            if (!RecipeParser.Parse(SC.GetStringValue("PM1.ProcessRecipe"), Module, out var recipeHead, out var recipeSteps, out var reason, "Process"))
                            {
                                PreprocessStartFailedWarning.Set($"Load process recipe {SC.GetStringValue("PM1.ProcessRecipe")} failed, {reason}");
                                return;
                            }

                            RecipeRunningInfo.MainRecipeName = SC.GetStringValue("PM1.ProcessRecipe");
                            RecipeRunningInfo.Head = recipeHead;
                            RecipeRunningInfo.RecipeStepList = recipeSteps;
                            var jumpStepNumber = RecipeRunningInfo.RecipeStepList.FindIndex(x => x.StepName == stepName);
                            if (jumpStepNumber > 0)
                            {
                                CheckToPostMessage((int)MSG.AlarmConditionJumpStep, jumpStepNumber);
                            }
                        }

                        LOG.Write($"Alarm condition: command={command} step name={stepName}");
                    }
                    else if (command.StartsWith("CALL"))
                    {
                        //call Alarm recipe
                        //Call 1:
                        var paras = command.Split(':');
                        if (paras.Length > 0)
                        {
                            recipe = RecipeRunningInfo.Head.AlarmRecipe;
                            recipeType = "Alarm";
                            recipeTable = paras[0].Replace("CALL", "").Replace(" ", "").Replace(":", "").Replace("：", "");
                            CheckToPostMessage((int)MSG.RunOtherRecipe, recipe, recipeType, recipeTable);

                            LOG.Write($"Alarm condition: command={command} recipe={recipe}");
                        }
                    }
                    else if (command.StartsWith("ABORT"))
                    {
                        //call Abort recipe
                        //Abort 1:
                        var paras = command.Split(':');
                        if (paras.Length > 0)
                        {
                            recipe = RecipeRunningInfo.Head.AbortRecipe;
                            recipeType = "Abort";
                            recipeTable = paras[0].Replace("ABORT", "").Replace(" ", "").Replace(":", "").Replace("：", "");
                            CheckToPostMessage((int)MSG.RunOtherRecipe, recipe, recipeType, recipeTable);

                            LOG.Write($"Alarm condition: command={command} recipe={recipe}");
                        }
                    }
                    break;
            }

        }
        private List<AlarmConditionAIParameter> InitAlarmConditionItem(string content)
        {
            List<AlarmConditionAIParameter> items = new List<AlarmConditionAIParameter>();
            if (string.IsNullOrEmpty(content))
                return items;

            var zoneParas = content.Split('|');
            foreach (var zonePara in zoneParas)
            {
                //U;Alert,True,0,0,℃,5,Monitor;Alarm,True,0,0,℃,6,Buzzer
                //1;C1-N2-1;Alert,True,0,0,%fs,5,Buzzer;Alarm,True,0,0,%fs,6,Buzzer
                //1;MS1;Alert,True,0,0,%fs,5,Monitor;Alarm,True,0,0,%fs,6,Monitor
                AlarmConditionAIParameter item = new AlarmConditionAIParameter();
                var array = zonePara.Split(';');
                if (array.Length > 2)
                {
                    item.Name = array[0];
                    var warningParas = array[array.Length - 2].Split(',');
                    var alarmParas = array[array.Length - 1].Split(',');
                    if (warningParas.Length > 6)
                    {
                        bool.TryParse(warningParas[1], out bool isEnable);
                        float.TryParse(warningParas[2], out float high);
                        float.TryParse(warningParas[3], out float low);
                        item.Unit = warningParas[4];
                        float.TryParse(warningParas[5], out float time);
                        item.WarningCommand = warningParas[6];
                        item.IsWarningEnable = isEnable;
                        item.WarningHigh = high;
                        item.WarningLow = low;
                        item.WarningTime = time;
                    }

                    if (warningParas.Length > 7)
                    {
                        float.TryParse(warningParas[7], out float time);
                        item.WarningDelayDetectTimeS = time;
                    }

                    if (alarmParas.Length > 6)
                    {
                        bool.TryParse(alarmParas[1], out bool isEnable);
                        float.TryParse(alarmParas[2], out float high);
                        float.TryParse(alarmParas[3], out float low);
                        item.Unit = alarmParas[4];
                        float.TryParse(alarmParas[5], out float time);
                        item.AlarmCommand = alarmParas[6];
                        item.IsAlarmEnable = isEnable;
                        item.AlarmHigh = high;
                        item.AlarmLow = low;
                        item.AlarmTime = time;
                    }

                    if (alarmParas.Length > 7)
                    {
                        float.TryParse(alarmParas[7], out float time);
                        item.AlarmDelayDetectTimeS = time;
                    }
                }

                items.Add(item);
            }

            return items;
        }
        private List<AlarmConditionDIParameter> InitAlarmConditionDIItem(string content)
        {
            List<AlarmConditionDIParameter> items = new List<AlarmConditionDIParameter>();
            if (string.IsNullOrEmpty(content))
                return items;

            var zoneParas = content.Split('|');
            foreach (var zonePara in zoneParas)
            {
                //1,Air/N2-7 Pressure Too Low,Alert,False,Buzzer|2,N2-1 Pressure Too Low,Alert,False,End
                AlarmConditionDIParameter item = new AlarmConditionDIParameter();
                var array = zonePara.Split(',');
                if (array.Length > 4)
                {
                    item.Name = array[1];
                    item.IsAlarm = array[2].ToLower() == "alarm";
                    bool.TryParse(array[3], out bool isEnable);
                    item.IsEnable = isEnable;
                    item.Command = array[4];
                }

                items.Add(item);
            }

            return items;
        }
        class AlarmConditionChecker
        {
            public FurnaceRT.Devices.IoHeater Heater { get; set; }
            public FurnaceRT.Devices.IoAPC APC { get; set; }
            public FurnaceRT.Equipments.PMs.Devices.IoMFC MFC { get; set; }
            public string AUXIOName { get; set; }
            public int AUXIndex { get; set; }
            public ToleranceChecker ToleranceCheckerWarning { get; set; }
            public ToleranceChecker ToleranceCheckerAlarm { get; set; }
            public AlarmConditionAIParameter Parameter { get; set; }
            public Stopwatch DelayTimer { get; set; }//N秒过后才检测
        }
        class AlarmConditionTableParameter
        {
            public int No { get; set; }
            public string Name { get; set; }
            public List<AlarmConditionAIParameter> HeaterParameterLst { get; set; }
            public List<AlarmConditionAIParameter> MFCParameterLst { get; set; }
            public List<AlarmConditionAIParameter> APCParameterLst { get; set; }
            public List<AlarmConditionAIParameter> AUXParameterLst { get; set; }
            public List<AlarmConditionDIParameter> InterlockParameterLst { get; set; }
        }
        class AlarmConditionAIParameter
        {
            //类似AI的
            public string Name { get; set; }
            public string Unit { get; set; }
            public string DataPoll { get; set; }
            public float WarningHigh { get; set; }
            public float WarningLow { get; set; }
            public float WarningTime { get; set; }
            public string WarningCommand { get; set; }
            public bool IsWarningEnable { get; set; }
            public float AlarmHigh { get; set; }
            public float AlarmLow { get; set; }
            public float AlarmTime { get; set; }
            public string AlarmCommand { get; set; }
            public bool IsAlarmEnable { get; set; }
            public float WarningDelayDetectTimeS { get; set; } = 0;//N秒过后才检测
            public float AlarmDelayDetectTimeS { get; set; } = 0;//N秒过后才检测
            public AlarmConditionAIParameter Clone(AlarmConditionAIParameter source)
            {
                AlarmConditionAIParameter clone = new AlarmConditionAIParameter();
                clone.Name = source.Name;
                clone.Unit = source.Unit;
                clone.DataPoll = source.DataPoll;
                clone.WarningHigh = source.WarningHigh;
                clone.WarningLow = source.WarningLow;
                clone.WarningTime = source.WarningTime;
                clone.WarningCommand = source.WarningCommand;
                clone.IsWarningEnable = source.IsWarningEnable;
                clone.AlarmHigh = source.AlarmHigh;
                clone.AlarmLow = source.AlarmLow;
                clone.AlarmTime = source.AlarmTime;
                clone.AlarmCommand = source.AlarmCommand;
                clone.IsAlarmEnable = source.IsAlarmEnable;
                return clone;
            }
        }
        class AlarmConditionDIParameter
        {
            //类似DI的
            public string Name { get; set; }
            public string DataPoll { get; set; }
            public bool IsAlarm { get; set; }
            public bool IsEnable { get; set; }
            public string Command { get; set; }
        }
        class AlarmConditionBoatParameter
        {
            //Boat load,unload温度判断
            public string Name { get; set; }
            public string DataPoll { get; set; }
            public bool IsAlarm { get; set; }
            public bool IsEnable { get; set; }
            public float AlarmHighLimit { get; set; }
        }
    }
}