Jet
/
FurnaceELK


			
				
					
						
						
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							<?xml version="1.0" encoding="utf-8"?>
<IO_DEFINE xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance" xmlns:xsd="http://www.w3.org/2001/XMLSchema">
	<Dig_In>
		<DI_ITEM Index="48"     Name="DI_EMO01001powerboxEMO"                                      BufferOffset="48"                                      Addr="D3.0"                      Description="safe module:EMO01001 power box EMO"                       />
		<DI_ITEM Index="49"     Name="DI_Powerboxfiredetector"                                      BufferOffset="49"                                      Addr="D3.1"                      Description="safe module:Power box fire detector"                       />
		<DI_ITEM Index="50"     Name="DI_SMK01001detectoroperator"                                      BufferOffset="50"                                      Addr="D3.2"                      Description="safe module:SMK01001 detector operator"                       />
		<DI_ITEM Index="51"     Name="DI_SMK01001detectorfault"                                      BufferOffset="51"                                      Addr="D3.3"                      Description="safe module:SMK01001 detector fault"                       />
		<DI_ITEM Index="52"     Name="DI_EMO02001gasboxEMO"                                      BufferOffset="52"                                      Addr="D3.4"                      Description="safe module:EMO02001 gas box EMO"                       />
		<DI_ITEM Index="54"     Name="DI_EMO04001frontbodyEMO"                                      BufferOffset="54"                                      Addr="D3.6"                      Description="safe module:EMO04001 frontbody EMO"                       />
		<DI_ITEM Index="55"     Name="DI_LD02001LSCleakalarm"                                      BufferOffset="55"                                      Addr="D3.7"                      Description="safe module:LD02001 LSC leak alarm"                       />
		<DI_ITEM Index="56"     Name="DI_LD05001Magneticfluidleak"                                      BufferOffset="56"                                      Addr="D3.8"                      Description="safe module:LD05001 Magnetic fluid leak"                       />
		<DI_ITEM Index="57"     Name="DI_LD05002Coolingwaterleak"                                      BufferOffset="57"                                      Addr="D3.9"                      Description="safe module:LD05002 Cooling water leak"                       />
		<DI_ITEM Index="58"     Name="DI_LD05003RHCleak"                                      BufferOffset="58"                                      Addr="D3.10"                      Description="safe module:LD05003 RHC leak"                       />
		<DI_ITEM Index="59"     Name="DI_LD03001exhaustboxwaterleakupside"                                      BufferOffset="59"                                      Addr="D3.11"                      Description="safe module:LD03001 exhaust box water leak (up-side)"                       />
		<DI_ITEM Index="60"     Name="DI_LD03002waterleakdownside"                                      BufferOffset="60"                                      Addr="D3.12"                      Description="safe module:LD03002 water leak (down-side)"                       />
		<DI_ITEM Index="61"     Name="DI_ExternalEMO"                                      BufferOffset="61"                                      Addr="D3.13"                      Description="safe module:External EMO"                       />
		<DI_ITEM Index="64"     Name="DI_Furnacetransformertempsw"                                      BufferOffset="64"                                      Addr="D4.0"                      Description="safe module:Furnace transformer temp sw"                       />
		<DI_ITEM Index="65"     Name="DI_AC100Vtransformertempsw"                                      BufferOffset="65"                                      Addr="D4.1"                      Description="safe module:AC100V transformer temp sw"                       />
		<DI_ITEM Index="66"     Name="DI_Furnacepoweronswitch"                                      BufferOffset="66"                                      Addr="D4.2"                      Description="safe module:Furnace power on switch"                       />
		<DI_ITEM Index="67"     Name="DI_AC100Vtransformerpowerswitch"                                      BufferOffset="67"                                      Addr="D4.3"                      Description="safe module:AC100V transformer power switch"                       />
		<DI_ITEM Index="68"     Name="DI_Powerboxinterlockresetbutton"                                      BufferOffset="68"                                      Addr="D4.4"                      Description="safe module:Power box interlock reset button"                       />
		<DI_ITEM Index="69"     Name="DI_VFD01001EDM"                                      BufferOffset="69"                                      Addr="D4.5"                      Description="safe module:VFD01001 EDM"                       />
		<DI_ITEM Index="74"     Name="DI_Gasboxinterlockresetbutton"                                      BufferOffset="74"                                      Addr="D4.10"                      Description="safe module:Gas box interlock reset button"                       />
		<DI_ITEM Index="75"     Name="DI_SCRONOFFSWITCH"                                      BufferOffset="75"                                      Addr="D4.11"                      Description="safe module:SCR ON/OFF SWITCH"                       />
		<DI_ITEM Index="76"     Name="DI_Gasboxexhaustpressurealarm1st"                                      BufferOffset="76"                                      Addr="D4.12"                      Description="safe module:Gas box exhaust pressure alarm 1st"                       />
		<DI_ITEM Index="77"     Name="DI_Gasboxexhaustpressurealarm2nd"                                      BufferOffset="77"                                      Addr="D4.13"                      Description="safe module:Gas box exhaust pressure alarm 2nd"                       />
		<DI_ITEM Index="78"     Name="DI_FS101waterflowalarm"                                      BufferOffset="78"                                      Addr="D4.14"                      Description="safe module:FS101 water flow alarm"                       />
		<DI_ITEM Index="79"     Name="DI_Frontbodyinterlockresetbutton"                                      BufferOffset="79"                                      Addr="D4.15"                      Description="safe module:Front body interlock reset button"                       />

		<DI_ITEM Index="80"     Name="DI_LightcurtainOSSD1"                                      BufferOffset="80"                                      Addr="D5.0"                      Description="safe module:Light curtain OSSD1"                       />
		<DI_ITEM Index="81"     Name="DI_LightcurtainOSSD2"                                      BufferOffset="81"                                      Addr="D5.1"                      Description="safe module:Light curtain OSSD2"                       />
		<DI_ITEM Index="82"     Name="DI_Lightcurtainfault"                                      BufferOffset="82"                                      Addr="D5.2"                      Description="safe module:Light curtain fault"                       />
		<DI_ITEM Index="83"     Name="DI_Frontbodydoorswitch"                                      BufferOffset="83"                                      Addr="D5.3"                      Description="safe module:Front body door switch"                       />
		<DI_ITEM Index="84"     Name="DI_FrontbodyIOshuttersw"                                      BufferOffset="84"                                      Addr="D5.4"                      Description="safe module:Front body I/O shutter sw"                       />
		<DI_ITEM Index="85"     Name="DI_FouprobotEMS"                                      BufferOffset="85"                                      Addr="D5.5"                      Description="safe module:Foup robot EMS"                       />
		<DI_ITEM Index="86"     Name="DI_WaferrobotEMS"                                      BufferOffset="86"                                      Addr="D5.6"                      Description="safe module:Wafer robot EMS"                       />
		<DI_ITEM Index="87"     Name="DI_AxisCRmotorEDM"                                      BufferOffset="87"                                      Addr="D5.7"                      Description="safe module:Axis-CR motor EDM"                       />
		<DI_ITEM Index="89"     Name="DI_AxisEmotorEDM"                                      BufferOffset="89"                                      Addr="D5.9"                      Description="safe module:Axis-E motor EDM"                       />
		<DI_ITEM Index="90"     Name="DI_TS05001FFUtempsw"                                      BufferOffset="90"                                      Addr="D5.10"                      Description="safe module:TS05001 FFU temp sw"                       />
		<DI_ITEM Index="91"     Name="DI_TS05002Capinsidetempsw"                                      BufferOffset="91"                                      Addr="D5.11"                      Description="safe module:TS05002 Cap inside temp sw"                       />
		<DI_ITEM Index="92"     Name="DI_TS05003Capoutsidetempsw"                                      BufferOffset="92"                                      Addr="D5.12"                      Description="safe module:TS05003 Cap outside temp sw"                       />
		<DI_ITEM Index="93"     Name="DI_TS05004Raxisrotationtempsw"                                      BufferOffset="93"                                      Addr="D5.13"                      Description="safe module:TS05004 R axis rotation temp sw"                       />
		<DI_ITEM Index="94"     Name="DI_TS05005RHCtempsw"                                      BufferOffset="94"                                      Addr="D5.14"                      Description="safe module:TS05005 RHC temp sw"                       />
		<DI_ITEM Index="95"     Name="DI_TS05006furnacetempsw"                                      BufferOffset="95"                                      Addr="D5.15"                      Description="safe module:TS05006 furnace temp sw"                       />

		<DI_ITEM Index="96"     Name="DI_LoadingareaEMS"                                      BufferOffset="96"                                      Addr="D6.0"                      Description="safe module:Loading area EMS"                       />
		<DI_ITEM Index="97"     Name="DI_GD02001HCL1gasleak1stalarm"                                      BufferOffset="97"                                      Addr="D6.1"                      Description="safe module:GD02001 HCL-1 gas leak 1st alarm"                       />
		<DI_ITEM Index="98"     Name="DI_GD02001HCL1gasleak2ndalarm"                                      BufferOffset="98"                                      Addr="D6.2"                      Description="safe module:GD02001 HCL-1 gas leak 2nd alarm"                       />
		<DI_ITEM Index="99"     Name="DI_GD02001fault"                                      BufferOffset="99"                                      Addr="D6.3"                      Description="safe module:GD02001 fault"                       />
		<DI_ITEM Index="100"    Name="DI_GD02002HCL2gasleak1stalarm"                                      BufferOffset="100"                                      Addr="D6.4"                      Description="safe module:GD02002 HCL-2 gas leak 1st alarm"                       />
		<DI_ITEM Index="101"    Name="DI_GD02002HCL2gasleak2ndalarm"                                      BufferOffset="101"                                      Addr="D6.5"                      Description="safe module:GD02002 HCL-2 gas leak 2nd alarm"                       />
		<DI_ITEM Index="102"    Name="DI_GD02002fault"                                      BufferOffset="102"                                      Addr="D6.6"                      Description="safe module:GD02002 fault"                       />
		<DI_ITEM Index="103"    Name="DI_GD02003NH31gasleak1stalarm"                                      BufferOffset="103"                                      Addr="D6.7"                      Description="safe module:GD02003 NH3-1 gas leak 1st alarm"                       />
		<DI_ITEM Index="104"    Name="DI_GD02003NH31gasleak2ndalarm"                                      BufferOffset="104"                                      Addr="D6.8"                      Description="safe module:GD02003 NH3-1 gas leak 2nd alarm"                       />
		<DI_ITEM Index="105"    Name="DI_GD02003fault"                                      BufferOffset="105"                                      Addr="D6.9"                      Description="safe module:GD02003 fault"                       />
		<DI_ITEM Index="106"    Name="DI_GD02004NH32gasleak1stalarm"                                      BufferOffset="106"                                      Addr="D6.10"                      Description="safe module:GD02004 NH3-2 gas leak 1st alarm"                       />
		<DI_ITEM Index="107"    Name="DI_GD02004NH32gasleak2ndalarm"                                      BufferOffset="107"                                      Addr="D6.11"                      Description="safe module:GD02004 NH3-2 gas leak 2nd alarm"                       />
		<DI_ITEM Index="108"    Name="DI_GD02004fault"                                      BufferOffset="108"                                      Addr="D6.12"                      Description="safe module:GD02004 fault"                       />
		<DI_ITEM Index="109"    Name="DI_GD02005F21gasleak1stalarm"                                      BufferOffset="109"                                      Addr="D6.13"                      Description="safe module:GD02005 F2-1 gas leak 1st alarm"                       />
		<DI_ITEM Index="110"    Name="DI_GD02005F21gasleak2ndalarm"                                      BufferOffset="110"                                      Addr="D6.14"                      Description="safe module:GD02005 F2-1 gas leak 2nd alarm"                       />
		<DI_ITEM Index="111"    Name="DI_GD02005fault"                                      BufferOffset="111"                                      Addr="D6.15"                      Description="safe module:GD02005 fault"                       />

		<DI_ITEM Index="112"    Name="DI_GD02006F22gasleak1stalarm"                                      BufferOffset="112"                                      Addr="D7.0"                      Description="safe module:GD02006 F2-2 gas leak 1st alarm"                       />
		<DI_ITEM Index="113"    Name="DI_GD02006F22gasleak2ndalarm"                                      BufferOffset="113"                                      Addr="D7.1"                      Description="safe module:GD02006 F2-2 gas leak 2nd alarm"                       />
		<DI_ITEM Index="114"    Name="DI_GD02006fault"                                      BufferOffset="114"                                      Addr="D7.2"                      Description="safe module:GD02006 fault"                       />
		<DI_ITEM Index="115"    Name="DI_GD02007NO1gasleak1stalarm"                                      BufferOffset="115"                                      Addr="D7.3"                      Description="safe module:GD02007 NO-1 gas leak 1st alarm"                       />
		<DI_ITEM Index="116"    Name="DI_GD02007NO1gasleak2ndalarm"                                      BufferOffset="116"                                      Addr="D7.4"                      Description="safe module:GD02007 NO-1 gas leak 2nd alarm"                       />
		<DI_ITEM Index="117"    Name="DI_GD02007fault"                                      BufferOffset="117"                                      Addr="D7.5"                      Description="safe module:GD02007 fault"                       />
		<DI_ITEM Index="118"    Name="DI_GD02008NO2gasleak1stalarm"                                      BufferOffset="118"                                      Addr="D7.6"                      Description="safe module:GD02008 NO-2 gas leak 1st alarm"                       />
		<DI_ITEM Index="119"    Name="DI_GD02008NO2gasleak2ndalarm"                                      BufferOffset="119"                                      Addr="D7.7"                      Description="safe module:GD02008 NO-2 gas leak 2nd alarm"                       />
		<DI_ITEM Index="120"    Name="DI_GD02008fault"                                      BufferOffset="120"                                      Addr="D7.8"                      Description="safe module:GD02008 fault"                       />
		<DI_ITEM Index="121"    Name="DI_GD02009C3H61gasleak1stalarm"                                      BufferOffset="121"                                      Addr="D7.9"                      Description="safe module:GD02009 C3H6-1 gas leak 1st alarm"                       />
		<DI_ITEM Index="122"    Name="DI_GD02009C3H61gasleak2ndalarm"                                      BufferOffset="122"                                      Addr="D7.10"                      Description="safe module:GD02009 C3H6-1 gas leak 2nd alarm"                       />
		<DI_ITEM Index="123"    Name="DI_GD02009fault"                                      BufferOffset="123"                                      Addr="D7.11"                      Description="safe module:GD02009 fault"                       />
		<DI_ITEM Index="124"    Name="DI_GD02010C3H62gasleak1stalarm"                                      BufferOffset="124"                                      Addr="D7.12"                      Description="safe module:GD02010 C3H6-2 gas leak 1st alarm"                       />
		<DI_ITEM Index="125"    Name="DI_GD02010C3H62gasleak2ndalarm"                                      BufferOffset="125"                                      Addr="D7.13"                      Description="safe module:GD02010 C3H6-2 gas leak 2nd alarm"                       />
		<DI_ITEM Index="126"    Name="DI_GD02010fault"                                      BufferOffset="126"                                      Addr="D7.14"                      Description="safe module:GD02010 fault"                       />
		<DI_ITEM Index="127"    Name="DI_GD02011DMA1gasleak1stalarm"                                      BufferOffset="127"                                      Addr="D7.15"                      Description="safe module:GD02011 DMA-1 gas leak 1st alarm"                       />

		<DI_ITEM Index="128"    Name="DI_GD02011DMA1gasleak2ndalarm"                                      BufferOffset="128"                                      Addr="D8.0"                      Description="safe module:GD02011 DMA-1 gas leak 2nd alarm"                       />
		<DI_ITEM Index="129"    Name="DI_GD02011fault"                                      BufferOffset="129"                                      Addr="D8.1"                      Description="safe module:GD02011 fault"                       />
		<DI_ITEM Index="130"    Name="DI_GD02012DMA2gasleak1stalarm"                                      BufferOffset="130"                                      Addr="D8.2"                      Description="safe module:GD02012 DMA-2 gas leak 1st alarm"                       />
		<DI_ITEM Index="131"    Name="DI_GD02012DMA2gasleak2ndalarm"                                      BufferOffset="131"                                      Addr="D8.3"                      Description="safe module:GD02012 DMA-2 gas leak 2nd alarm"                       />
		<DI_ITEM Index="132"    Name="DI_GD02012fault"                                      BufferOffset="132"                                      Addr="D8.4"                      Description="safe module:GD02012 fault"                       />
		<DI_ITEM Index="133"    Name="DI_SL02001gasboxdoorsw11"                                      BufferOffset="133"                                      Addr="D8.5"                      Description="safe module:SL02001 gas box door sw1-1"                       />
		<DI_ITEM Index="134"    Name="DI_SL02001gasboxdoorsw12"                                      BufferOffset="134"                                      Addr="D8.6"                      Description="safe module:SL02001 gas box door sw1-2"                       />
		<DI_ITEM Index="135"    Name="DI_SL02002gasboxdoorsw11"                                      BufferOffset="135"                                      Addr="D8.7"                      Description="safe module:SL02002 gas box door sw1-1"                       />
		<DI_ITEM Index="136"    Name="DI_SL02002gasboxdoorsw12"                                      BufferOffset="136"                                      Addr="D8.8"                      Description="safe module:SL02002 gas box door sw1-2"                       />
		<DI_ITEM Index="137"    Name="DI_SL05001LAdoorsw1"                                      BufferOffset="137"                                      Addr="D8.9"                      Description="safe module:SL05001 LA door sw1"                       />
		<DI_ITEM Index="138"    Name="DI_SL05002LAdoorsw2"                                      BufferOffset="138"                                      Addr="D8.10"                      Description="safe module:SL05002 LA door sw2"                       />
		<DI_ITEM Index="139"    Name="DI_SL05004LAfurnacedoorsw"                                      BufferOffset="139"                                      Addr="D8.11"                      Description="safe module:SL05004 LA furnace door sw"                       />
		<DI_ITEM Index="144"    Name="DI_Furnacepoweronoff"                                      BufferOffset="144"                                      Addr="D9.0"                      Description="safe module:Furnace power on/off"                       />
		<DI_ITEM Index="145"    Name="DI_Blowerpoweronoff"                                      BufferOffset="145"                                      Addr="D9.1"                      Description="safe module:Blower power on/off"                       />
		<DI_ITEM Index="146"    Name="DI_100Vtransformerpoweron"                                      BufferOffset="146"                                      Addr="D9.2"                      Description="safe module:100V transformer power on"                       />
		<DI_ITEM Index="147"    Name="DI_VFDenable"                                      BufferOffset="147"                                      Addr="D9.3"                      Description="safe module:VFD enable"                       />
		<DI_ITEM Index="149"    Name="DI_HPMvalvepoweronoff"                                      BufferOffset="149"                                      Addr="D9.5"                      Description="safe module:HPM valve power on/off"                       />
		<DI_ITEM Index="150"    Name="DI_AxisCRmotorenable1"                                      BufferOffset="150"                                      Addr="D9.6"                      Description="safe module:Axis-CR motor enable1"                       />
		<DI_ITEM Index="151"    Name="DI_AxisCRmotorenable2"                                      BufferOffset="151"                                      Addr="D9.7"                      Description="safe module:Axis-CR motor enable2"                       />
		<DI_ITEM Index="152"    Name="DI_AxisEmotorenable1"                                      BufferOffset="152"                                      Addr="D9.8"                      Description="safe module:Axis-E motor enable1"                       />
		<DI_ITEM Index="153"    Name="DI_AxisEmotorenable2"                                      BufferOffset="153"                                      Addr="D9.9"                      Description="safe module:Axis-E motor enable2"                       />
		<DI_ITEM Index="156"    Name="DI_FTRenable1"                                      BufferOffset="156"                                      Addr="D9.12"                      Description="safe module:FTR enable1"                       />
		<DI_ITEM Index="157"    Name="DI_FTRenable2"                                      BufferOffset="157"                                      Addr="D9.13"                      Description="safe module:FTR enable2"                       />
		<DI_ITEM Index="158"    Name="DI_FTRinterlockreset"                                      BufferOffset="158"                                      Addr="D9.14"                      Description="safe module:FTR interlock reset"                       />
		<DI_ITEM Index="159"    Name="DI_WTRenable1"                                      BufferOffset="159"                                      Addr="D9.15"                      Description="safe module:WTR enable1"                       />

		<DI_ITEM Index="160"    Name="DI_WTRenable2"                                      BufferOffset="160"                                      Addr="D10.0"                      Description="safe module:WTR enable2"                       />
		<DI_ITEM Index="161"    Name="DI_WTRinterlockreset"                                      BufferOffset="161"                                      Addr="D10.1"                      Description="safe module:WTR interlock reset"                       />
		<DI_ITEM Index="162"    Name="DI_Capheaterenable"                                      BufferOffset="162"                                      Addr="D10.2"                      Description="safe module:Cap heater enable"                       />
		<DI_ITEM Index="164"    Name="DI_Lightcurtainidel"                                      BufferOffset="164"                                      Addr="D10.4"                      Description="safe module:Light curtain idel"                       />
		<DI_ITEM Index="165"    Name="DI_Powerboxinterlockbuttonled"                                      BufferOffset="165"                                      Addr="D10.5"                      Description="safe module:Power box interlock button led"                       />
		<DI_ITEM Index="166"    Name="DI_Gasboxinterlockbuttonled"                                      BufferOffset="166"                                      Addr="D10.6"                      Description="safe module:Gas box interlock button led"                       />
		<DI_ITEM Index="167"    Name="DI_Frontbodyinterlockbuttonled"                                      BufferOffset="167"                                      Addr="D10.7"                      Description="safe module:Frontbody interlock button led"                       />
		<DI_ITEM Index="960"    Name="DI_GLBoxPG1CNT1Alarm"                                      BufferOffset="960"                                      Addr="D60.0"                      Description="Gas box PG1 CNT1 alarm"                       />
		<DI_ITEM Index="961"    Name="DI_GLBoxPG1CNT2Alarm"                                      BufferOffset="961"                                      Addr="D60.1"                      Description="Gas box PG1 CNT2 alarm"                       />
		<DI_ITEM Index="962"    Name="DI_GLBoxPG2CNT1Alarm"                                      BufferOffset="962"                                      Addr="D60.2"                      Description="Gas box PG2 CNT1 alarm"                       />
		<DI_ITEM Index="963"    Name="DI_GLBoxPG2CNT2Alarm"                                      BufferOffset="963"                                      Addr="D60.3"                      Description="Gas box PG2 CNT2 alarm"                       />
		<DI_ITEM Index="964"    Name="DI_GLBoxPG3CNT1Alarm"                                      BufferOffset="964"                                      Addr="D60.4"                      Description="Gas box PG3 CNT1 alarm"                       />
		<DI_ITEM Index="965"    Name="DI_GLBoxPG3CNT2Alarm"                                      BufferOffset="965"                                      Addr="D60.5"                      Description="Gas box PG3 CNT2 alarm"                       />
		<DI_ITEM Index="966"    Name="DI_GLBoxPG4CNT1Alarm"                                      BufferOffset="966"                                      Addr="D60.6"                      Description="Gas box PG4 CNT1 alarm"                       />
		<DI_ITEM Index="967"    Name="DI_GLBoxPG4CNT2Alarm"                                      BufferOffset="967"                                      Addr="D60.7"                      Description="Gas box PG4 CNT2 alarm"                       />
		<DI_ITEM Index="968"    Name="DI_GLBoxPG5CNT1Alarm"                                      BufferOffset="968"                                      Addr="D60.8"                      Description="Gas box PG5 CNT1 alarm"                       />
		<DI_ITEM Index="969"    Name="DI_GLBoxPG5CNT2Alarm"                                      BufferOffset="969"                                      Addr="D60.9"                      Description="Gas box PG5 CNT2 alarm"                       />
		<DI_ITEM Index="970"    Name="DI_GLBoxPG6CNT1Alarm"                                      BufferOffset="970"                                      Addr="D60.10"                      Description="Gas box PG6 CNT1 alarm"                       />
		<DI_ITEM Index="971"    Name="DI_GLBoxPG6CNT2Alarm"                                      BufferOffset="971"                                      Addr="D60.11"                      Description="Gas box PG6 CNT2 alarm"                       />
		<DI_ITEM Index="972"    Name="DI_GLBoxPG7CNT1Alarm"                                      BufferOffset="972"                                      Addr="D60.12"                      Description="Gas box PG7 CNT1 alarm"                       />
		<DI_ITEM Index="973"    Name="DI_GLBoxPG7CNT2Alarm"                                      BufferOffset="973"                                      Addr="D60.13"                      Description="Gas box PG7 CNT2 alarm"                       />
		<DI_ITEM Index="974"    Name="DI_GLBoxPG8CNT2Alarm"                                      BufferOffset="974"                                      Addr="D60.14"                      Description="Gas box PG8 CNT1 alarm"                       />
		<DI_ITEM Index="975"    Name="DI_GLBoxPG9CNT2Alarm"                                      BufferOffset="975"                                      Addr="D60.15"                      Description="Gas box PG8 CNT2 alarm"                       />

		<DI_ITEM Index="976"    Name="DI_GLBoxVG32Status"                                      BufferOffset="976"                                      Addr="D61.0"                      Description="GL box VG32 status"                       />
		<DI_ITEM Index="977"    Name="DI_GLBoxVG32Output1"                                      BufferOffset="977"                                      Addr="D61.1"                      Description="GL box VG32 output1"                       />
		<DI_ITEM Index="978"    Name="DI_GLBoxVG32Output2"                                      BufferOffset="978"                                      Addr="D61.2"                      Description="GL box VG32 output2"                       />
		<DI_ITEM Index="979"    Name="DI_GLBoxVG33Status"                                      BufferOffset="979"                                      Addr="D61.3"                      Description="GL box VG33 status"                       />
		<DI_ITEM Index="980"    Name="DI_GLBoxVG33Output1"                                      BufferOffset="980"                                      Addr="D61.4"                      Description="GL box VG33 output1"                       />
		<DI_ITEM Index="981"    Name="DI_GLBoxVG33Output2"                                      BufferOffset="981"                                      Addr="D61.5"                      Description="GL box VG33 output2"                       />
		<DI_ITEM Index="992"    Name="DI_AV93_1RHCAirInOpened"                                      BufferOffset="992"                                      Addr="D62.0"                      Description="AV93_1 RHC air in opened"                       />
		<DI_ITEM Index="993"    Name="DI_AV93_1RHCAirInClosed"                                      BufferOffset="993"                                      Addr="D62.1"                      Description="AV93_1 RHC air in closed"                       />
		<DI_ITEM Index="994"    Name="DI_AV93_2RHCAirInOpened"                                      BufferOffset="994"                                      Addr="D62.2"                      Description="AV93_2 RHC air in opened"                       />
		<DI_ITEM Index="995"    Name="DI_AV93_2RHCAirInClosed"                                      BufferOffset="995"                                      Addr="D62.3"                      Description="AV93_2 RHC air in closed"                       />
		<DI_ITEM Index="996"    Name="DI_AV93_3RHCAirOutOpened"                                      BufferOffset="996"                                      Addr="D62.4"                      Description="AV93_3 RHC air Out opened"                       />
		<DI_ITEM Index="997"    Name="DI_AV93_3RHCAirOutClosed"                                      BufferOffset="997"                                      Addr="D62.5"                      Description="AV93_3 RHC air Out closed"                       />
		<DI_ITEM Index="998"    Name="DI_AV93_4RHCAirOutOpened"                                      BufferOffset="998"                                      Addr="D62.6"                      Description="AV93_4 RHC air Out opened"                       />
		<DI_ITEM Index="999"    Name="DI_AV93_4RHCAirOutClosed"                                      BufferOffset="999"                                      Addr="D62.7"                      Description="AV93_4 RHC air Out closed"                       />
		<DI_ITEM Index="1000"   Name="DI_HEXOverTemperatureAlarm"                                      BufferOffset="1000"                                      Addr="D62.8"                      Description="H-EX over temperature alarm"                       />
		<DI_ITEM Index="1024"   Name="DI_GLBoxPG21CNT1Alarm"                                      BufferOffset="1024"                                      Addr="D64.0"                      Description="GL box PG21 CNT1 alarm"                       />
		<DI_ITEM Index="1025"   Name="DI_GLBoxPG21CNT2Alarm"                                      BufferOffset="1025"                                      Addr="D64.1"                      Description="GL box PG21 CNT2 alarm"                       />
		<DI_ITEM Index="1026"   Name="DI_GLBoxPG22CNT1Alarm"                                      BufferOffset="1026"                                      Addr="D64.2"                      Description="GL box PG22 CNT1 alarm"                       />
		<DI_ITEM Index="1027"   Name="DI_GLBoxPG22CNT2Alarm"                                      BufferOffset="1027"                                      Addr="D64.3"                      Description="GL box PG22 CNT2 alarm"                       />
		<DI_ITEM Index="1028"   Name="DI_GLBoxPG23CNT1Alarm"                                      BufferOffset="1028"                                      Addr="D64.4"                      Description="GL box PG23 CNT1 alarm"                       />
		<DI_ITEM Index="1029"   Name="DI_GLBoxPG23CNT2Alarm"                                      BufferOffset="1029"                                      Addr="D64.5"                      Description="GL box PG23 CNT2 alarm"                       />
		<DI_ITEM Index="1030"   Name="DI_GLBoxPG24CNT1Alarm"                                      BufferOffset="1030"                                      Addr="D64.6"                      Description="GL box PG24 CNT1 alarm"                       />
		<DI_ITEM Index="1031"   Name="DI_GLBoxPG24CNT2Alarm"                                      BufferOffset="1031"                                      Addr="D64.7"                      Description="GL box PG24 CNT2 alarm"                       />
		<DI_ITEM Index="1032"   Name="DI_GLBoxPG25CNT1Alarm"                                      BufferOffset="1032"                                      Addr="D64.8"                      Description="GL box PG25 CNT1 alarm"                       />
		<DI_ITEM Index="1033"   Name="DI_GLBoxPG25CNT2Alarm"                                      BufferOffset="1033"                                      Addr="D64.9"                      Description="GL box PG25 CNT2 alarm"                       />
		<DI_ITEM Index="1034"   Name="DI_GLBoxPG31CNT1Alarm"                                      BufferOffset="1034"                                      Addr="D64.10"                      Description="GL box PG31 CNT1 alarm"                       />
		<DI_ITEM Index="1035"   Name="DI_GLBoxPG31CNT2Alarm"                                      BufferOffset="1035"                                      Addr="D64.11"                      Description="GL box PG31 CNT2 alarm"                       />
		<DI_ITEM Index="1036"   Name="DI_GLBoxPG32CNT1Alarm"                                      BufferOffset="1036"                                      Addr="D64.12"                      Description="GL box PG32 CNT1 alarm"                       />
		<DI_ITEM Index="1037"   Name="DI_GLBoxPG32CNT2Alarm"                                      BufferOffset="1037"                                      Addr="D64.13"                      Description="GL box PG32 CNT2 alarm"                       />
		<DI_ITEM Index="1040"   Name="DI_LSC1HLEVEL"                                      BufferOffset="1040"                                      Addr="D65.0"                      Description="LSC1-H LEVEL"                       />
		<DI_ITEM Index="1041"   Name="DI_LSC1MLEVEL"                                      BufferOffset="1041"                                      Addr="D65.1"                      Description="LSC1-M LEVEL"                       />
		<DI_ITEM Index="1042"   Name="DI_LSC1LLEVEL"                                      BufferOffset="1042"                                      Addr="D65.2"                      Description="LSC1-L LEVEL"                       />
		<DI_ITEM Index="1044"   Name="DI_LSC2HLEVEL"                                      BufferOffset="1044"                                      Addr="D65.4"                      Description="LSC2-H LEVEL"                       />
		<DI_ITEM Index="1045"   Name="DI_LSC2MLEVEL"                                      BufferOffset="1045"                                      Addr="D65.5"                      Description="LSC2-M LEVEL"                       />
		<DI_ITEM Index="1046"   Name="DI_LSC2LLEVEL"                                      BufferOffset="1046"                                      Addr="D65.6"                      Description="LSC2-L LEVEL"                       />
		<DI_ITEM Index="1184"   Name="DI_HeatingExhaust1stAlarmMS1"                                      BufferOffset="1184"                                      Addr="D74.0"                      Description="Heating exhaust 1st alarm MS1"                       />
		<DI_ITEM Index="1185"   Name="DI_HeatingExhaust2ndAlarmMS1"                                      BufferOffset="1185"                                      Addr="D74.1"                      Description="Heating exhaust 2nd alarm MS1"                       />
		<DI_ITEM Index="1188"   Name="DI_ScavengeExhaust1stAlarmMS3"                                      BufferOffset="1188"                                      Addr="D74.4"                      Description="scavenge exhaust 1st alarm MS3"                       />
		<DI_ITEM Index="1189"   Name="DI_ScavengeExhaust2ndAlarmMS3"                                      BufferOffset="1189"                                      Addr="D74.5"                      Description="scavenge exhaust 2nd alarm MS3"                       />
		<DI_ITEM Index="1190"   Name="DI_ValveBoxExhaust1stAlarmMS4"                                      BufferOffset="1190"                                      Addr="D74.6"                      Description="valve box exhaust 1st alarm MS4"                       />
		<DI_ITEM Index="1191"   Name="DI_ValveBoxExhaust2ndAlarmMS4"                                      BufferOffset="1191"                                      Addr="D74.7"                      Description="valve box exhaust 2nd alarm MS4"                       />
		<DI_ITEM Index="1192"   Name="DI_LoadingAreaExhaust1stAlarmMS5"                                      BufferOffset="1192"                                      Addr="D74.8"                      Description="loading area exhaust 1st alarm MS5"                       />
		<DI_ITEM Index="1193"   Name="DI_LoadingAreaExhaust2ndAlarmMS5"                                      BufferOffset="1193"                                      Addr="D74.9"                      Description="loading area exhaust 2nd alarm MS5"                       />
		<DI_ITEM Index="1196"   Name="DI_LAExhaust1stAlarmMS7"                                      BufferOffset="1196"                                      Addr="D74.12"                      Description="common exhaust 1st alarm MS7"                       />
		<DI_ITEM Index="1197"   Name="DI_LAExhaust2ndAlarmMS7"                                      BufferOffset="1197"                                      Addr="D74.13"                      Description="common exhaust 2nd alarm MS7"                       />
		<DI_ITEM Index="1198"   Name="DI_RHC1stAlarmMS8"                                      BufferOffset="1198"                                      Addr="D74.14"                      Description="RHC 1st alarm MS8"                       />
		<DI_ITEM Index="1199"   Name="DI_RHC2ndAlarmMS8"                                      BufferOffset="1199"                                      Addr="D74.15"                      Description="RHC 2nd alarm MS8"                       />

		<DI_ITEM Index="1200"   Name="DI_REV1stAlarmMS9"                                      BufferOffset="1200"                                      Addr="D75.0"                      Description="LSC-up 1st alarm MS9"                       />
		<DI_ITEM Index="1201"   Name="DI_REV2ndAlarmMS9"                                      BufferOffset="1201"                                      Addr="D75.1"                      Description="LSC-up 2nd alarm MS9"                       />
		<DI_ITEM Index="1202"   Name="DI_REV1stAlarmMS10"                                      BufferOffset="1202"                                      Addr="D75.2"                      Description="LSC-down 1st alarm MS10"                       />
		<DI_ITEM Index="1203"   Name="DI_REV2ndAlarmMS10"                                      BufferOffset="1203"                                      Addr="D75.3"                      Description="LSC-down 2nd alarm MS10"                       />
		<DI_ITEM Index="1204"   Name="DI_OPBoxPS11Out1"                                      BufferOffset="1204"                                      Addr="D75.4"                      Description="OP box PS11 out limit alarm"                       />
		<DI_ITEM Index="1218"   Name="DI_AV202LADoorLocked"                                      BufferOffset="1218"                                      Addr="D76.2"                      Description="AV95 LA door locked"                       />
		<DI_ITEM Index="1219"   Name="DI_AV20LADoorUnlocked"                                      BufferOffset="1219"                                      Addr="D76.3"                      Description="AV95 LA door unlocked"                       />
		<DI_ITEM Index="1232"   Name="DI_StartButton"                                      BufferOffset="1232"                                      Addr="D77.0"                      Description="start button"                       />
		<DI_ITEM Index="1233"   Name="DI_StopButton"                                      BufferOffset="1233"                                      Addr="D77.1"                      Description="stop button"                       />
		<DI_ITEM Index="1234"   Name="DI_ResetButton"                                      BufferOffset="1234"                                      Addr="D77.2"                      Description="reset button"                       />
		<DI_ITEM Index="1235"   Name="DI_MechaStopButton"                                      BufferOffset="1235"                                      Addr="D77.3"                      Description="mecha stop button"                       />
		<DI_ITEM Index="1236"   Name="DI_AutoOrmanualKnob"                                      BufferOffset="1236"                                      Addr="D77.4"                      Description="auto/manual knob"                       />
		<DI_ITEM Index="1237"   Name="DI_NormalOrMaintainKnob"                                      BufferOffset="1237"                                      Addr="D77.5"                      Description="normal/maintain knob"                       />
		<DI_ITEM Index="1238"   Name="DI_HeaterPowerOnOffKnob"                                      BufferOffset="1238"                                      Addr="D77.6"                      Description="heater power on/off knob"                       />
		<DI_ITEM Index="1239"   Name="DI_REVReset1"                                      BufferOffset="1239"                                      Addr="D77.7"                      Description="REV reset1"                       />
		<DI_ITEM Index="1240"   Name="DI_REVReset2"                                      BufferOffset="1240"                                      Addr="D77.8"                      Description="REV reset2"                       />
		<DI_ITEM Index="1241"   Name="DI_REVReset3"                                      BufferOffset="1241"                                      Addr="D77.9"                      Description="REV reset3"                       />
		<DI_ITEM Index="1242"   Name="DI_REVReset4"                                      BufferOffset="1242"                                      Addr="D77.10"                      Description="REV reset4"                       />
		<DI_ITEM Index="1243"   Name="DI_REVReset5"                                      BufferOffset="1243"                                      Addr="D77.11"                      Description="REV reset5"                       />
		<DI_ITEM Index="1296"   Name="DI_RHCFlowAlarmFL901"                                      BufferOffset="1296"                                      Addr="D81.0"                      Description="RHC flow alarm(FL901)"                       />
		<DI_ITEM Index="1297"   Name="DI_CoolingWaterFlowAlarmOfFurnaceFL902"                                      BufferOffset="1297"                                      Addr="D81.1"                      Description="water flow alarm  FL902"                       />
		<DI_ITEM Index="1298"   Name="DI_CoolingWaterFlowAlarmOfShuttleFL903"                                      BufferOffset="1298"                                      Addr="D81.2"                      Description="water flow alarm  FL903"                       />
		<DI_ITEM Index="1299"   Name="DI_CoolingWaterFlowAlarmOfBoatRotationFL904"                                      BufferOffset="1299"                                      Addr="D81.3"                      Description="water flow alarm  FL904"                       />
		<DI_ITEM Index="1300"   Name="DI_CoolingWaterFlowAlarmOfFlangeFL905"                                      BufferOffset="1300"                                      Addr="D81.4"                      Description="water flow alarm  FL905"                       />
		<DI_ITEM Index="1301"   Name="DI_CoolingWaterFlowAlarmOfLoadingAreaFL906"                                      BufferOffset="1301"                                      Addr="D81.5"                      Description="water flow alarm  FL906"                       />
		<DI_ITEM Index="1304"   Name="DI_DG1Output1"                                      BufferOffset="1304"                                      Addr="D81.8"                      Description="DG1 output-1"                       />
		<DI_ITEM Index="1305"   Name="DI_DG1Output2"                                      BufferOffset="1305"                                      Addr="D81.9"                      Description="DG1 output-2"                       />
		<DI_ITEM Index="1306"   Name="DI_PS13LStatus"                                      BufferOffset="1306"                                      Addr="D81.10"                      Description="ATM"                       />
		<DI_ITEM Index="1307"   Name="DI_PS13HStatus"                                      BufferOffset="1307"                                      Addr="D81.11"                      Description="PS13 H status"                       />
		<DI_ITEM Index="1312"   Name="DI_VG11Status"                                      BufferOffset="1312"                                      Addr="D82.0"                      Description="VG11 status"                       />
		<DI_ITEM Index="1313"   Name="DI_VG11LowAlarm"                                      BufferOffset="1313"                                      Addr="D82.1"                      Description="VG11 LowAlarm"                       />
		<DI_ITEM Index="1314"   Name="DI_VG11HighAlarm"                                      BufferOffset="1314"                                      Addr="D82.2"                      Description="VG11 HighAlarm"                       />
		<DI_ITEM Index="1315"   Name="DI_VG12Status"                                      BufferOffset="1315"                                      Addr="D82.3"                      Description="VG12 status"                       />
		<DI_ITEM Index="1316"   Name="DI_VG12LowAlarm"                                      BufferOffset="1316"                                      Addr="D82.4"                      Description="VG12 LowAlarm"                       />
		<DI_ITEM Index="1317"   Name="DI_VG12HighAlarm"                                      BufferOffset="1317"                                      Addr="D82.5"                      Description="VG12 HighAlarm"                       />
		<DI_ITEM Index="1318"   Name="DI_VG13Status"                                      BufferOffset="1318"                                      Addr="D82.6"                      Description="VG13 status"                       />
		<DI_ITEM Index="1319"   Name="DI_VG13LowAlarm"                                      BufferOffset="1319"                                      Addr="D82.7"                      Description="VG13 LowAlarm"                       />
		<DI_ITEM Index="1320"   Name="DI_VG13HighAlarm"                                      BufferOffset="1320"                                      Addr="D82.8"                      Description="VG13 HighAlarm"                       />
		<DI_ITEM Index="1321"   Name="DI_PG12CNT1Alarm"                                      BufferOffset="1321"                                      Addr="D82.9"                      Description="PG12 CNT1 alarm"                       />
		<DI_ITEM Index="1322"   Name="DI_PG12CNT2Alarm"                                      BufferOffset="1322"                                      Addr="D82.10"                      Description="PG12 CNT2 alarm"                       />
		<DI_ITEM Index="1323"   Name="DI_PG13CNT1Alarm"                                      BufferOffset="1323"                                      Addr="D82.11"                      Description="PG13 CNT1 alarm"                       />
		<DI_ITEM Index="1324"   Name="DI_PG13CNT2Alarm"                                      BufferOffset="1324"                                      Addr="D82.12"                      Description="PG13 CNT2 alarm"                       />
		<DI_ITEM Index="1325"   Name="DI_PS14OUT1"                                      BufferOffset="1325"                                      Addr="D82.13"                      Description="PS14 OUT1"                       />
		<DI_ITEM Index="1326"   Name="DI_PS14OUT2"                                      BufferOffset="1326"                                      Addr="D82.14"                      Description="PS14 OUT2"                       />
		<DI_ITEM Index="1328"   Name="DI_AV66CommonExhaustOpened"                                      BufferOffset="1328"                                      Addr="D83.0"                      Description="AV66 common exhaust opened"                       />
		<DI_ITEM Index="1329"   Name="DI_AV66CommonExhaustClosed"                                      BufferOffset="1329"                                      Addr="D83.1"                      Description="AV66 common exhaust closed"                       />
		<DI_ITEM Index="1330"   Name="DI_AV96CommonExhaustCylinderOpened"                                      BufferOffset="1330"                                      Addr="D83.2"                      Description="AV96 common exhaust cylinder opened"                       />
		<DI_ITEM Index="1331"   Name="DI_AV96CommonExhaustCylinderClosed"                                      BufferOffset="1331"                                      Addr="D83.3"                      Description="AV96 common exhaust cylinder closed"                       />
		<DI_ITEM Index="1332"   Name="DI_CoolingWaterPressureOut1"                                      BufferOffset="1332"                                      Addr="D83.4"                      Description="cooling water pressure Out1"                       />
		<DI_ITEM Index="1333"   Name="DI_CoolingWaterPressureOut2"                                      BufferOffset="1333"                                      Addr="D83.5"                      Description="cooling water pressure Out2"                       />
		<DI_ITEM Index="1336"   Name="DI_AirFlowFL72"                                      BufferOffset="1336"                                      Addr="D83.8"                      Description="air flow FL72"                       />
		<DI_ITEM Index="1337"   Name="DI_WaterFlowFL61"                                      BufferOffset="1337"                                      Addr="D83.9"                      Description="water flow FL61"                       />
		<DI_ITEM Index="1338"   Name="DI_WaterFlowFL62"                                      BufferOffset="1338"                                      Addr="D83.10"                      Description="water flow FL62"                       />
		<DI_ITEM Index="1344"   Name="DI_SWITCHINGFUNCTUON1LAM1"                                      BufferOffset="1344"                                      Addr="D84.0"                      Description="SWITCHING FUNCTUON1 LAM1"                       />
		<DI_ITEM Index="1345"   Name="DI_SWITCHINGFUNCTUON1LAM2"                                      BufferOffset="1345"                                      Addr="D84.1"                      Description="SWITCHING FUNCTUON1 LAM2"                       />
		<DI_ITEM Index="1346"   Name="DI_SWITCHINGFUNCTUON2LAM1"                                      BufferOffset="1346"                                      Addr="D84.2"                      Description="SWITCHING FUNCTUON2 LAM1"                       />
		<DI_ITEM Index="1347"   Name="DI_SWITCHINGFUNCTUON2LAM2"                                      BufferOffset="1347"                                      Addr="D84.3"                      Description="SWITCHING FUNCTUON2 LAM2"                       />
		<DI_ITEM Index="1348"   Name="DI_SWITCHINGFUNCTUON3LAM1"                                      BufferOffset="1348"                                      Addr="D84.4"                      Description="SWITCHING FUNCTUON3 LAM1"                       />
		<DI_ITEM Index="1349"   Name="DI_SWITCHINGFUNCTUON3LAM2"                                      BufferOffset="1349"                                      Addr="D84.5"                      Description="SWITCHING FUNCTUON3 LAM2"                       />
		<DI_ITEM Index="1350"   Name="DI_SWITCHINGFUNCTUON4LAM1"                                      BufferOffset="1350"                                      Addr="D84.6"                      Description="SWITCHING FUNCTUON4 LAM1"                       />
		<DI_ITEM Index="1351"   Name="DI_SWITCHINGFUNCTUON4LAM2"                                      BufferOffset="1351"                                      Addr="D84.7"                      Description="SWITCHING FUNCTUON4 LAM2"                       />
		<DI_ITEM Index="1352"   Name="DI_ERRORLAM1"                                      BufferOffset="1352"                                      Addr="D84.8"                      Description="ERROR LAM1"                       />
		<DI_ITEM Index="1353"   Name="DI_ERRORLAM2"                                      BufferOffset="1353"                                      Addr="D84.9"                      Description="ERROR LAM2"                       />
		<DI_ITEM Index="1632"   Name="DI_FurnaceMainCircuitBreakerStatusMonitor"                                      BufferOffset="1632"                                      Addr="D102.0"                      Description="Furnace Main Circuit Breaker Status Monitor"                       />
		<DI_ITEM Index="1633"   Name="DI_Zone1CircuitBreakerStatusMonitor"                                      BufferOffset="1633"                                      Addr="D102.1"                      Description="Zone1 Circuit Breaker Status Monitor"                       />
		<DI_ITEM Index="1634"   Name="DI_Zone2CircuitBreakerStatusMonitor"                                      BufferOffset="1634"                                      Addr="D102.2"                      Description="Zone2 Circuit Breaker Status Monitor"                       />
		<DI_ITEM Index="1635"   Name="DI_Zone4CircuitBreakerStatusMonitor"                                      BufferOffset="1635"                                      Addr="D102.3"                      Description="Zone4 Circuit Breaker Status Monitor"                       />
		<DI_ITEM Index="1636"   Name="DI_Zone5CircuitBreakerStatusMonitor"                                      BufferOffset="1636"                                      Addr="D102.4"                      Description="Zone5 Circuit Breaker Status Monitor"                       />
		<DI_ITEM Index="1637"   Name="DI_Zone3CircuitBreakerStatusMonitor"                                      BufferOffset="1637"                                      Addr="D102.5"                      Description="Zone3 Circuit Breaker Status Monitor"                       />
		<DI_ITEM Index="1638"   Name="DI_UPSFault"                                      BufferOffset="1638"                                      Addr="D102.6"                      Description="UPS Fault"                       />
		<DI_ITEM Index="1639"   Name="DI_K141UPSAlarm"                                      BufferOffset="1639"                                      Addr="D102.7"                      Description="UPS Alarm"                       />
		<DI_ITEM Index="1640"   Name="DI_UPSBypassStatus"                                      BufferOffset="1640"                                      Addr="D102.8"                      Description="UPS Bypass Status"                       />
		<DI_ITEM Index="1641"   Name="DI_UPSBatteryVoltageLow"                                      BufferOffset="1641"                                      Addr="D102.9"                      Description="UPS Battery Voltage Low"                       />
		<DI_ITEM Index="1642"   Name="DI_UPSStart"                                      BufferOffset="1642"                                      Addr="D102.10"                      Description="UPS Start"                       />
		<DI_ITEM Index="1643"   Name="DI_UPSACInputCutOff"                                      BufferOffset="1643"                                      Addr="D102.11"                      Description="UPS AC Input Cut Off"                       />
		<DI_ITEM Index="1644"   Name="DI_N2PurgeBOXPG14CNT1"                                      BufferOffset="1644"                                      Addr="D102.12"                      Description="N2 Purge BOX PG14 CNT1"                       />
		<DI_ITEM Index="1645"   Name="DI_N2PurgeBOXPG14CNT2"                                      BufferOffset="1645"                                      Addr="D102.13"                      Description="N2 Purge BOX PG14 CNT2"                       />
		<DI_ITEM Index="1646"   Name="DI_N2PurgeBOXPG15CNT1"                                      BufferOffset="1646"                                      Addr="D102.14"                      Description="N2 Purge BOX PG15 CNT1"                       />
		<DI_ITEM Index="1647"   Name="DI_N2PurgeBOXPG15CNT2"                                      BufferOffset="1647"                                      Addr="D102.15"                      Description="N2 Purge BOX PG15 CNT2"                       />

		<DI_ITEM Index="1648"   Name="DI_N2PurgeBOXPG16CNT1"                                      BufferOffset="1648"                                      Addr="D103.0"                      Description="N2 Purge BOX PG16 CNT1"                       />
		<DI_ITEM Index="1649"   Name="DI_N2PurgeBOXPG16CNT2"                                      BufferOffset="1649"                                      Addr="D103.1"                      Description="N2 Purge BOX PG16 CNT2"                       />
		<DI_ITEM Index="1650"   Name="DI_N2PurgeBOXPG70CNT1"                                      BufferOffset="1650"                                      Addr="D103.2"                      Description="N2 Purge BOX PG70 CNT1"                       />
		<DI_ITEM Index="1651"   Name="DI_N2PurgeBOXPG70CNT2"                                      BufferOffset="1651"                                      Addr="D103.3"                      Description="N2 Purge BOX PG70 CNT2"                       />
		<DI_ITEM Index="1652"   Name="DI_PS17ValueLowLimitAlarm"                                      BufferOffset="1652"                                      Addr="D103.4"                      Description="PS17 Value Low Limit Alarm1"                       />
		<DI_ITEM Index="1653"   Name="DI_PS17ValueLowLimitAlarm2"                                      BufferOffset="1653"                                      Addr="D103.5"                      Description="PS17 Value Low Limit Alarm2"                       />
		<DI_ITEM Index="1654"   Name="DI_BlowerPowerStatusFeedback"                                      BufferOffset="1654"                                      Addr="D103.6"                      Description="Blower Power Status Feedback"                       />
		<DI_ITEM Index="1655"   Name="DI_VaccumPumpBothOn"                                      BufferOffset="1655"                                      Addr="D103.7"                      Description="Vaccum1 Pump Both On"                       />
		<DI_ITEM Index="1656"   Name="DI_Vaccum1PumpWarning"                                      BufferOffset="1656"                                      Addr="D103.8"                      Description="Vaccum1 Pump Warning"                       />
		<DI_ITEM Index="1657"   Name="DI_Vaccum1PumpAlarm"                                      BufferOffset="1657"                                      Addr="D103.9"                      Description="Vaccum1 Pump Alarm"                       />
		<DI_ITEM Index="1658"   Name="DI_Vaccum2PumpBothOn"                                      BufferOffset="1658"                                      Addr="D103.10"                      Description="Vaccum2 Pump Both On"                       />
		<DI_ITEM Index="1659"   Name="DI_Vaccum2PumpWarning"                                      BufferOffset="1659"                                      Addr="D103.11"                      Description="Vaccum2 Pump Warning"                       />
		<DI_ITEM Index="1660"   Name="DI_Vaccum2PumpAlarm"                                      BufferOffset="1660"                                      Addr="D103.12"                      Description="Vaccum2 Pump Alarm"                       />
		<DI_ITEM Index="1661"   Name="DI_N2PurgeBOXPG13CNT1"                                      BufferOffset="1661"                                      Addr="D103.13"                      Description="N2 Purge BOX PG13 CNT1"                       />
		<DI_ITEM Index="1662"   Name="DI_N2PurgeBOXPG13CNT2"                                      BufferOffset="1662"                                      Addr="D103.14"                      Description="N2 Purge BOX PG13 CNT2"                       />
		<DI_ITEM Index="1664"   Name="DI_ForelineHeaterJacketLightAlarm"                                      BufferOffset="1664"                                      Addr="D104.0"                      Description="Foreline heater jacket light alarm"                       />
		<DI_ITEM Index="1665"   Name="DI_ForelineHeaterJacketHeavyAlarm"                                      BufferOffset="1665"                                      Addr="D104.1"                      Description="Foreline heater jacket heavy alarm"                       />
		<DI_ITEM Index="1666"   Name="DI_ScrubberWarning"                                      BufferOffset="1666"                                      Addr="D104.2"                      Description="Scrubber warning"                       />
		<DI_ITEM Index="1667"   Name="DI_ScrubberAlarm"                                      BufferOffset="1667"                                      Addr="D104.3"                      Description="Scrubber alarm"                       />
		<DI_ITEM Index="1668"   Name="DI_ExternalHPMIn"                                      BufferOffset="1668"                                      Addr="D104.4"                      Description="External HPM In"                       />
		<DI_ITEM Index="1670"   Name="DI_Powerboxfrontdoorswitch1"                                      BufferOffset="1670"                                      Addr="D104.6"                      Description="Power box front door switch-1"                       />
		<DI_ITEM Index="1671"   Name="DI_Powerboxfrontdoorswitch2"                                      BufferOffset="1671"                                      Addr="D104.7"                      Description="Power box front door switch-2"                       />
		<DI_ITEM Index="1672"   Name="DI_Powerboxbackdoorswitch1"                                      BufferOffset="1672"                                      Addr="D104.8"                      Description="Power box back door switch-1"                       />
		<DI_ITEM Index="1673"   Name="DI_Powerboxbackdoorswitch2"                                      BufferOffset="1673"                                      Addr="D104.9"                      Description="Power box back door switch-2"                       />
		<DI_ITEM Index="1674"   Name="DI_FAN01001fanstatus"                                      BufferOffset="1674"                                      Addr="D104.10"                      Description="FAN01001 fan status"                       />
		<DI_ITEM Index="1675"   Name="DI_FAN01002fanstatus"                                      BufferOffset="1675"                                      Addr="D104.11"                      Description="FAN01002 fan status"                       />
		<DI_ITEM Index="1676"   Name="DI_FAN01003fanstatus"                                      BufferOffset="1676"                                      Addr="D104.12"                      Description="FAN01003 fan status"                       />
		<DI_ITEM Index="1677"   Name="DI_FAN01004fanstatus"                                      BufferOffset="1677"                                      Addr="D104.13"                      Description="FAN01004 fan status"                       />
		<DI_ITEM Index="1678"   Name="DI_FAN01005fanstatus"                                      BufferOffset="1678"                                      Addr="D104.14"                      Description="FAN01005 fan status"                       />
		<DI_ITEM Index="1679"   Name="DI_FAN01006fanstatus"                                      BufferOffset="1679"                                      Addr="D104.15"                      Description="FAN01006 fan status"                       />

		<DI_ITEM Index="1680"   Name="DI_KM01101on"                                      BufferOffset="1680"                                      Addr="D105.0"                      Description="KM01101 on 380V接触器"                       />
		<DI_ITEM Index="1681"   Name="DI_KM01102on"                                      BufferOffset="1681"                                      Addr="D105.1"                      Description="KM01102 on Furance 变压器接触器"                       />
		<DI_ITEM Index="1682"   Name="DI_KM01104on"                                      BufferOffset="1682"                                      Addr="D105.2"                      Description="KM01104 on 110V接触器"                       />
		<DI_ITEM Index="1683"   Name="DI_KM01201on"                                      BufferOffset="1683"                                      Addr="D105.3"                      Description="KM01201 on 220V接触器"                       />
		<DI_ITEM Index="1684"   Name="DI_VFDQF01102"                                      BufferOffset="1684"                                      Addr="D105.4"                      Description="VFD QF01102主断路器"                       />
		<DI_ITEM Index="1685"   Name="DI_LDS1bulktoprocessrunning"                                      BufferOffset="1685"                                      Addr="D105.5"                      Description="LDS1 bulk to process running"                       />
		<DI_ITEM Index="1686"   Name="DI_LDS2bulktoprocessrunning"                                      BufferOffset="1686"                                      Addr="D105.6"                      Description="LDS2 bulk to process running"                       />
		<DI_ITEM Index="1688"   Name="DI_EXTERNALEMOIN"                                      BufferOffset="1688"                                      Addr="D105.8"                      Description="EXTERNAL EMO IN"                       />
		<DI_ITEM Index="1689"   Name="DI_LDS1SystemReady"                                      BufferOffset="1689"                                      Addr="D105.9"                      Description="LDS1 system ready"                       />
		<DI_ITEM Index="1690"   Name="DI_LDS1MajorAlarm"                                      BufferOffset="1690"                                      Addr="D105.10"                      Description="LDS1 major alarm"                       />
		<DI_ITEM Index="1691"   Name="DI_LDS1MinorWarning"                                      BufferOffset="1691"                                      Addr="D105.11"                      Description="LDS1 minor warning"                       />
		<DI_ITEM Index="1692"   Name="DI_LDS1liquidLowWarning"                                      BufferOffset="1692"                                      Addr="D105.12"                      Description="LDS1 liquid low warning"                       />
		<DI_ITEM Index="1693"   Name="DI_LDS1TankBlankAlarm"                                      BufferOffset="1693"                                      Addr="D105.13"                      Description="LDS1 tank blank alarm"                       />
		<DI_ITEM Index="1694"   Name="DI_LDS2SystemReady"                                      BufferOffset="1694"                                      Addr="D105.14"                      Description="LDS2 system ready"                       />
		<DI_ITEM Index="1695"   Name="DI_LDS2MajorAlarm"                                      BufferOffset="1695"                                      Addr="D105.15"                      Description="LDS2 major alarm"                       />

		<DI_ITEM Index="1696"   Name="DI_LDS2MinorWarning"                                      BufferOffset="1696"                                      Addr="D106.0"                      Description="LDS2 minor warning"                       />
		<DI_ITEM Index="1697"   Name="DI_LDS2LiquidLowWarning"                                      BufferOffset="1697"                                      Addr="D106.1"                      Description="LDS2 liquid low warning"                       />
		<DI_ITEM Index="1698"   Name="DI_LDS2TankBlankAlarm"                                      BufferOffset="1698"                                      Addr="D106.2"                      Description="LDS2 tank blank alarm"                       />
		<DI_ITEM Index="1699"   Name="DI_Processgasavailiablesignal"                                      BufferOffset="1699"                                      Addr="D106.3"                      Description="Process gas availiable signal"                       />
		<DI_ITEM Index="1700"   Name="DI_Cleaninggasavailiablesignal"                                      BufferOffset="1700"                                      Addr="D106.4"                      Description="Cleaning gas availiable signal"                       />
		<DI_ITEM Index="1701"   Name="DI_AGVopensignal"                                      BufferOffset="1701"                                      Addr="D106.5"                      Description="AGV open signal"                       />
		<DI_ITEM Index="1702"   Name="DI_AGVclosesignal"                                      BufferOffset="1702"                                      Addr="D106.6"                      Description="AGV close signal"                       />
		<DI_ITEM Index="1706"   Name="DI_LDS1SUPPLIED"                                      BufferOffset="1706"                                      Addr="D106.10"                      Description="LDS1 SUPPLIED"                       />
		<DI_ITEM Index="1707"   Name="DI_LDS2SUPPLIED"                                      BufferOffset="1707"                                      Addr="D106.11"                      Description="LDS2 SUPPLIED"                       />
		<DI_ITEM Index="1744"   Name="DI_BoatRAxisInWorkPosition"                                      BufferOffset="1744"                                      Addr="D109.0"                      Description="Boat R Axis in work position"                       />
		<DI_ITEM Index="1745"   Name="DI_BoatRAxisMoving "                                      BufferOffset="1745"                                      Addr="D109.1"                      Description="Boat R Axis moving "                       />
		<DI_ITEM Index="1746"   Name="DI_BoatRAxisAlarm"                                      BufferOffset="1746"                                      Addr="D109.2"                      Description="Boat R Axis alarm"                       />
		<DI_ITEM Index="1747"   Name="DI_BoatRAxisInHomeArea"                                      BufferOffset="1747"                                      Addr="D109.3"                      Description="Boat R Axis in home area"                       />
		<DI_ITEM Index="1748"   Name="DI_BoatRAxisInReady"                                      BufferOffset="1748"                                      Addr="D109.4"                      Description="Boat R Axis in ready"                       />
		<DI_ITEM Index="1749"   Name="DI_BoatRAxisWarning"                                      BufferOffset="1749"                                      Addr="D109.5"                      Description="Boat R Axis warning"                       />
		<DI_ITEM Index="1750"   Name="DI_BoatRAxisInHomePosition"                                      BufferOffset="1750"                                      Addr="D109.6"                      Description="Boat R Axis in home position"                       />
		<DI_ITEM Index="1751"   Name="DI_BoatLiftCAPInPosition"                                      BufferOffset="1751"                                      Addr="D109.7"                      Description="Boat Lift CAP In Position"                       />
		<DI_ITEM Index="1760"   Name="DI_L1Position"                                      BufferOffset="1760"                                      Addr="D110.0"                      Description="L1 Position"                       />
		<DI_ITEM Index="1761"   Name="DI_L2Position"                                      BufferOffset="1761"                                      Addr="D110.1"                      Description="L2 Position"                       />
		<DI_ITEM Index="1762"   Name="DI_L3Position"                                      BufferOffset="1762"                                      Addr="D110.2"                      Description="L3 Position"                       />
		<DI_ITEM Index="1763"   Name="DI_L4Position"                                      BufferOffset="1763"                                      Addr="D110.3"                      Description="L4 Position"                       />
		<DI_ITEM Index="1764"   Name="DI_H1Position"                                      BufferOffset="1764"                                      Addr="D110.4"                      Description="H1 Position"                       />
		<DI_ITEM Index="1765"   Name="DI_H2Position"                                      BufferOffset="1765"                                      Addr="D110.5"                      Description="H2 Position"                       />
		<DI_ITEM Index="1766"   Name="DI_H3Position"                                      BufferOffset="1766"                                      Addr="D110.6"                      Description="H3 Position"                       />
		<DI_ITEM Index="1767"   Name="DI_H4Position"                                      BufferOffset="1767"                                      Addr="D110.7"                      Description="H4 Position"                       />
		<DI_ITEM Index="1768"   Name="DI_FurnaceShutterOpened"                                      BufferOffset="1768"                                      Addr="D110.8"                      Description="Furnace shutter opened"                       />
		<DI_ITEM Index="1769"   Name="DI_FurnaceShutterClosed"                                      BufferOffset="1769"                                      Addr="D110.9"                      Description="Furnace shutter closed"                       />
		<DI_ITEM Index="1770"   Name="DI_LADamperOpen"                                      BufferOffset="1770"                                      Addr="D110.10"                      Description="Damper Open"                       />
		<DI_ITEM Index="1771"   Name="DI_LADamperClose"                                      BufferOffset="1771"                                      Addr="D110.11"                      Description="Damper Close"                       />
		<DI_ITEM Index="1792"   Name="DI_BufferRotationConvDetectSensor"                                      BufferOffset="1792"                                      Addr="D112.0"                      Description="buffer rotation conv detect sensor"                       />
		<DI_ITEM Index="1793"   Name="DI_BoatLiftMotorUpPosition"                                      BufferOffset="1793"                                      Addr="D112.1"                      Description="boat lift motor up position"                       />
		<DI_ITEM Index="1794"   Name="DI_BoatLiftMotorDownPosition"                                      BufferOffset="1794"                                      Addr="D112.2"                      Description="boat lift motor down position"                       />
		<DI_ITEM Index="1795"   Name="DI_WaferRobotAtPOD1Area"                                      BufferOffset="1795"                                      Addr="D112.3"                      Description="Wafer Robot At POD1 Area"                       />
		<DI_ITEM Index="1796"   Name="DI_WaferRobotAtPOD2Area"                                      BufferOffset="1796"                                      Addr="D112.4"                      Description="Wafer Robot At POD2 Area"                       />
		<DI_ITEM Index="1797"   Name="DI_WaferRobotAtBoatRotaryArea"                                      BufferOffset="1797"                                      Addr="D112.5"                      Description="Wafer Robot At Boat Rotary Area"                       />
		<DI_ITEM Index="1798"   Name="DI_WaferRobotAtBoatBottomArea"                                      BufferOffset="1798"                                      Addr="D112.6"                      Description="Wafer Robot At Boat Bottom Area"                       />
		<DI_ITEM Index="1799"   Name="DI_WaferRobotTPEMOButtonStatus"                                      BufferOffset="1799"                                      Addr="D112.7"                      Description="Wafer Robot TP EMO Button Status"                       />
		<DI_ITEM Index="1800"   Name="DI_WaferRobotTPServoOn"                                      BufferOffset="1800"                                      Addr="D112.8"                      Description="Wafer Robot TP EMO Servo On"                       />
		<DI_ITEM Index="1808"   Name="DI_POD1FOUPExtend"                                      BufferOffset="1808"                                      Addr="D113.0"                      Description="POD1 FOUP extend"                       />
		<DI_ITEM Index="1809"   Name="DI_POD1FOUPRetract"                                      BufferOffset="1809"                                      Addr="D113.1"                      Description="POD1 FOUP retract"                       />
		<DI_ITEM Index="1810"   Name="DI_POD1FOUPInPosition"                                      BufferOffset="1810"                                      Addr="D113.2"                      Description="POD1 FOUP in position"                       />
		<DI_ITEM Index="1811"   Name="DI_POD1XForward"                                      BufferOffset="1811"                                      Addr="D113.3"                      Description="POD1 X forward"                       />
		<DI_ITEM Index="1812"   Name="DI_POD1XBackward"                                      BufferOffset="1812"                                      Addr="D113.4"                      Description="POD1 X backward"                       />
		<DI_ITEM Index="1813"   Name="DI_POD1YForward"                                      BufferOffset="1813"                                      Addr="D113.5"                      Description="POD1 Y forward"                       />
		<DI_ITEM Index="1814"   Name="DI_POD1YBackward"                                      BufferOffset="1814"                                      Addr="D113.6"                      Description="POD1 Y backward"                       />
		<DI_ITEM Index="1815"   Name="DI_POD1FOUPLocked"                                      BufferOffset="1815"                                      Addr="D113.7"                      Description="POD1 FOUP locked"                       />
		<DI_ITEM Index="1816"   Name="DI_POD1FOUPUnlocked"                                      BufferOffset="1816"                                      Addr="D113.8"                      Description="POD1 FOUP unlocked"                       />
		<DI_ITEM Index="1817"   Name="DI_POD1CollisionAvoidanceForward"                                      BufferOffset="1817"                                      Addr="D113.9"                      Description="POD1 collision avoidance forward"                       />
		<DI_ITEM Index="1818"   Name="DI_POD1CollisionAvoidanceBackward"                                      BufferOffset="1818"                                      Addr="D113.10"                      Description="POD1 collision avoidance backward"                       />
		<DI_ITEM Index="1819"   Name="DI_POD1N2PurgeAV63Closed"                                      BufferOffset="1819"                                      Addr="D113.11"                      Description="POD1 N2 purge AV63 closed"                       />
		<DI_ITEM Index="1820"   Name="DI_POD1N2PurgeAV63Opened"                                      BufferOffset="1820"                                      Addr="D113.12"                      Description="POD1 N2 purge AV63 opened"                       />
		<DI_ITEM Index="1821"   Name="DI_POD1FOUPVacuumSuckingOK"                                      BufferOffset="1821"                                      Addr="D113.13"                      Description="POD1 FOUP vacuum sucking OK"                       />
		<DI_ITEM Index="1822"   Name="DI_POD1FOUPVacuumSuckingAlarm"                                      BufferOffset="1822"                                      Addr="D113.14"                      Description="POD1 FOUP vacuum sucking alarm"                       />
		<DI_ITEM Index="1824"   Name="DI_POD2FOUPExtend"                                      BufferOffset="1824"                                      Addr="D114.0"                      Description="POD2 FOUP extend"                       />
		<DI_ITEM Index="1825"   Name="DI_POD2FOUPRetract"                                      BufferOffset="1825"                                      Addr="D114.1"                      Description="POD2 FOUP retract"                       />
		<DI_ITEM Index="1826"   Name="DI_POD2FOUPInPosition"                                      BufferOffset="1826"                                      Addr="D114.2"                      Description="POD2 FOUP in position"                       />
		<DI_ITEM Index="1827"   Name="DI_POD2XForward"                                      BufferOffset="1827"                                      Addr="D114.3"                      Description="POD2 X forward"                       />
		<DI_ITEM Index="1828"   Name="DI_POD2XBackward"                                      BufferOffset="1828"                                      Addr="D114.4"                      Description="POD2 X backward"                       />
		<DI_ITEM Index="1829"   Name="DI_POD2YForward"                                      BufferOffset="1829"                                      Addr="D114.5"                      Description="POD2 Y forward"                       />
		<DI_ITEM Index="1830"   Name="DI_POD2YBackward"                                      BufferOffset="1830"                                      Addr="D114.6"                      Description="POD2 Y backward"                       />
		<DI_ITEM Index="1831"   Name="DI_POD2FOUPLocked"                                      BufferOffset="1831"                                      Addr="D114.7"                      Description="POD2 FOUP locked"                       />
		<DI_ITEM Index="1832"   Name="DI_POD2FOUPUnlocked"                                      BufferOffset="1832"                                      Addr="D114.8"                      Description="POD2 FOUP unlocked"                       />
		<DI_ITEM Index="1833"   Name="DI_POD2CollisionAvoidanceForward"                                      BufferOffset="1833"                                      Addr="D114.9"                      Description="POD2 collision avoidance forward"                       />
		<DI_ITEM Index="1834"   Name="DI_POD2CollisionAvoidanceBackward"                                      BufferOffset="1834"                                      Addr="D114.10"                      Description="POD2 collision avoidance backward"                       />
		<DI_ITEM Index="1835"   Name="DI_POD2N2PurgeAV63Closed"                                      BufferOffset="1835"                                      Addr="D114.11"                      Description="POD2 N2 purge AV63 closed"                       />
		<DI_ITEM Index="1836"   Name="DI_POD2N2PurgeAV63Opened"                                      BufferOffset="1836"                                      Addr="D114.12"                      Description="POD2 N2 purge AV63 opened"                       />
		<DI_ITEM Index="1837"   Name="DI_POD2FOUPVacuumSuckingOK"                                      BufferOffset="1837"                                      Addr="D114.13"                      Description="POD2 FOUP vacuum sucking OK"                       />
		<DI_ITEM Index="1838"   Name="DI_POD2FOUPVacuumSuckingAlarm"                                      BufferOffset="1838"                                      Addr="D114.14"                      Description="POD2 FOUP vacuum sucking alarm"                       />
		<DI_ITEM Index="1840"   Name="DI_POD1WaferOnRobot"                                      BufferOffset="1840"                                      Addr="D115.0"                      Description="POD1 wafer on robot"                       />
		<DI_ITEM Index="1841"   Name="DI_POD2WaferOnRobot"                                      BufferOffset="1841"                                      Addr="D115.1"                      Description="POD2 wafer on robot"                       />
		<DI_ITEM Index="1842"   Name="DI_WaferRobotIsHostStatus"                                      BufferOffset="1842"                                      Addr="D115.2"                      Description="Wafer Robot TP/Host Status"                       />
		<DI_ITEM Index="1843"   Name="DI_WaferRobotPowerOn"                                      BufferOffset="1843"                                      Addr="D115.3"                      Description="Wafer Robot Power On"                       />
		<DI_ITEM Index="1844"   Name="DI_WaferRobotAlarm"                                      BufferOffset="1844"                                      Addr="D115.4"                      Description="Wafer Robot Alarm"                       />
		<DI_ITEM Index="1845"   Name="DI_WaferRobotWafer1Checked"                                      BufferOffset="1845"                                      Addr="D115.5"                      Description="Wafer Robot Wafer1 Checked"                       />
		<DI_ITEM Index="1846"   Name="DI_WaferRobotWafer2Checked"                                      BufferOffset="1846"                                      Addr="D115.6"                      Description="Wafer Robot Wafer2 Checked"                       />
		<DI_ITEM Index="1847"   Name="DI_WaferRobotWafer3Checked"                                      BufferOffset="1847"                                      Addr="D115.7"                      Description="Wafer Robot Wafer3 Checked"                       />
		<DI_ITEM Index="1848"   Name="DI_WaferRobotWafer4Checked"                                      BufferOffset="1848"                                      Addr="D115.8"                      Description="Wafer Robot Wafer4 Checked"                       />
		<DI_ITEM Index="1849"   Name="DI_WaferRobotWafer5Checked"                                      BufferOffset="1849"                                      Addr="D115.9"                      Description="Wafer Robot Wafer5 Checked"                       />
		<DI_ITEM Index="1850"   Name="DI_WaferRobotZAxisHomePosition"                                      BufferOffset="1850"                                      Addr="D115.10"                      Description="Wafer Robot Z Axis Home Position"                       />
		<DI_ITEM Index="1851"   Name="DI_WaferRobotYAxisHomePosition"                                      BufferOffset="1851"                                      Addr="D115.11"                      Description="Wafer Robot Axis-TH Home Position  (Axis-Y)"                       />
		<DI_ITEM Index="1852"   Name="DI_WaferRobotEX1AxisHomePosition"                                      BufferOffset="1852"                                      Addr="D115.12"                      Description="Wafer Robot Axis-EX1 Home Position  (Axis-X1)"                       />
		<DI_ITEM Index="1853"   Name="DI_WaferRobotEX2AxisHomePosition"                                      BufferOffset="1853"                                      Addr="D115.13"                      Description="Wafer Robot Axis-EX2 Home Position (Axis-X4)"                       />
		<DI_ITEM Index="1854"   Name="DI_WaferRobotPAxisHomePosition"                                      BufferOffset="1854"                                      Addr="D115.14"                      Description="Wafer Robot Axis-P Home Hosition (Axis-V)"                       />
		<DI_ITEM Index="1855"   Name="DI_WaferRobotRunning"                                      BufferOffset="1855"                                      Addr="D115.15"                      Description="Wafer Robot Running"                       />

		<DI_ITEM Index="1856"   Name="DI_LP1FOUPLeftClamp"                                      BufferOffset="1856"                                      Addr="D116.0"                      Description="AGV loadport1 FOUP left clamp"                       />
		<DI_ITEM Index="1857"   Name="DI_LP1FOUPRightClamp"                                      BufferOffset="1857"                                      Addr="D116.1"                      Description="AGV loadport1 FOUP right clamp"                       />
		<DI_ITEM Index="1858"   Name="DI_LP1FOUPLeftRelease"                                      BufferOffset="1858"                                      Addr="D116.2"                      Description="AGV loadport1 FOUP left release"                       />
		<DI_ITEM Index="1859"   Name="DI_LP1FOUPRightRelease"                                      BufferOffset="1859"                                      Addr="D116.3"                      Description="AGV loadport1 FOUP right release"                       />
		<DI_ITEM Index="1860"   Name="DI_LP1FOUPInPosition1"                                      BufferOffset="1860"                                      Addr="D116.4"                      Description="AGV loadport1 FOUP in position1"                       />
		<DI_ITEM Index="1861"   Name="DI_LP1FOUPInPosition2"                                      BufferOffset="1861"                                      Addr="D116.5"                      Description="AGV loadport1 FOUP in position2"                       />
		<DI_ITEM Index="1862"   Name="DI_LP1FOUPInPosition3"                                      BufferOffset="1862"                                      Addr="D116.6"                      Description="AGV loadport1 FOUP in position3"                       />
		<DI_ITEM Index="1863"   Name="DI_LP1FOUPDetect"                                      BufferOffset="1863"                                      Addr="D116.7"                      Description="AGV loadport1 FOUP detect"                       />
		<DI_ITEM Index="1872"   Name="DI_LP2FOUPLeftClamp"                                      BufferOffset="1872"                                      Addr="D117.0"                      Description="AGV loadport2 FOUP left clamp"                       />
		<DI_ITEM Index="1873"   Name="DI_LP2FOUPRightClamp"                                      BufferOffset="1873"                                      Addr="D117.1"                      Description="AGV loadport2 FOUP right clamp"                       />
		<DI_ITEM Index="1874"   Name="DI_LP2FOUPLeftRelease"                                      BufferOffset="1874"                                      Addr="D117.2"                      Description="AGV loadport2 FOUP left release"                       />
		<DI_ITEM Index="1875"   Name="DI_LP2FOUPRightRelease"                                      BufferOffset="1875"                                      Addr="D117.3"                      Description="AGV loadport2 FOUP right release"                       />
		<DI_ITEM Index="1876"   Name="DI_LP2FOUPInPosition1"                                      BufferOffset="1876"                                      Addr="D117.4"                      Description="AGV loadport2 FOUP in position1"                       />
		<DI_ITEM Index="1877"   Name="DI_LP2FOUPInPosition2"                                      BufferOffset="1877"                                      Addr="D117.5"                      Description="AGV loadport2 FOUP in position2"                       />
		<DI_ITEM Index="1878"   Name="DI_LP2FOUPInPosition3"                                      BufferOffset="1878"                                      Addr="D117.6"                      Description="AGV loadport2 FOUP in position3"                       />
		<DI_ITEM Index="1879"   Name="DI_LP2FOUPDetect"                                      BufferOffset="1879"                                      Addr="D117.7"                      Description="AGV loadport2 FOUP detect"                       />
		<DI_ITEM Index="1884"   Name="DI_FOUPRobotWithinFIMS1Area"                                      BufferOffset="1884"                                      Addr="D117.12"                      Description="FOUP Robot Within POD1 Area"                       />
		<DI_ITEM Index="1885"   Name="DI_FOUPRobotWithinFIMS2Area"                                      BufferOffset="1885"                                      Addr="D117.13"                      Description="FOUP Robot Within POD2 Area"                       />
		<DI_ITEM Index="1886"   Name="DI_FOUPRobotTPEMOButton"                                      BufferOffset="1886"                                      Addr="D117.14"                      Description="FOUP Robot TP EMO Button"                       />
		<DI_ITEM Index="1887"   Name="DI_FOUPRobotTPServoOn"                                      BufferOffset="1887"                                      Addr="D117.15"                      Description="FOUP Robot TP Servo On"                       />

		<DI_ITEM Index="1888"   Name="DI_LP3FOUPInPosition1"                                      BufferOffset="1888"                                      Addr="D118.0"                      Description="OHT1 FOUP in position1(loadport3)"                       />
		<DI_ITEM Index="1889"   Name="DI_LP3FOUPInPosition2"                                      BufferOffset="1889"                                      Addr="D118.1"                      Description="OHT1 FOUP in position2(loadport3)"                       />
		<DI_ITEM Index="1890"   Name="DI_LP3FOUPInPosition3"                                      BufferOffset="1890"                                      Addr="D118.2"                      Description="OHT1 FOUP in position3(loadport3)"                       />
		<DI_ITEM Index="1891"   Name="DI_LP3FOUPDetect"                                      BufferOffset="1891"                                      Addr="D118.3"                      Description="OHT1 FOUP DETECT(loadport3)"                       />
		<DI_ITEM Index="1892"   Name="DI_LP4FOUPInPosition1"                                      BufferOffset="1892"                                      Addr="D118.4"                      Description="OHT2 FOUP in position1(loadport4)"                       />
		<DI_ITEM Index="1893"   Name="DI_LP4FOUPInPosition2"                                      BufferOffset="1893"                                      Addr="D118.5"                      Description="OHT2 FOUP in position2(loadport4)"                       />
		<DI_ITEM Index="1894"   Name="DI_LP4FOUPInPosition3"                                      BufferOffset="1894"                                      Addr="D118.6"                      Description="OHT2 FOUP in position3(loadport4)"                       />
		<DI_ITEM Index="1895"   Name="DI_LP4FOUPDetect"                                      BufferOffset="1895"                                      Addr="D118.7"                      Description="OHT2 FOUP DETECT(loadport4)"                       />
		<DI_ITEM Index="1896"   Name="DI_LAFrontFOUPBuffer1InPosition"                                      BufferOffset="1896"                                      Addr="D118.8"                      Description="LA front FOUP buffer1 in position"                       />
		<DI_ITEM Index="1897"   Name="DI_LAFrontFOUPBuffer2InPosition"                                      BufferOffset="1897"                                      Addr="D118.9"                      Description="LA front FOUP buffer2 in position"                       />
		<DI_ITEM Index="1898"   Name="DI_AGVDoorOpened"                                      BufferOffset="1898"                                      Addr="D118.10"                      Description="LA shutter clamp on"                       />
		<DI_ITEM Index="1899"   Name="DI_AGVDoorClosed"                                      BufferOffset="1899"                                      Addr="D118.11"                      Description="LA shutter clamp off"                       />
		<DI_ITEM Index="1904"   Name="DI_MachineStop"                                      BufferOffset="1904"                                      Addr="D119.0"                      Description="Machine stop"                       />
		<DI_ITEM Index="1905"   Name="DI_MachinePause"                                      BufferOffset="1905"                                      Addr="D119.1"                      Description="Machine pause"                       />
		<DI_ITEM Index="1906"   Name="DI_OperatorAccessHandOffLeft"                                      BufferOffset="1906"                                      Addr="D119.2"                      Description="Operator access-hand off left"                       />
		<DI_ITEM Index="1907"   Name="DI_OperatorAccessHandOffRight"                                      BufferOffset="1907"                                      Addr="D119.3"                      Description="Operator access-hand off right"                       />
		<DI_ITEM Index="1908"   Name="DI_FOUPRobotIsTPStatus"                                      BufferOffset="1908"                                      Addr="D119.4"                      Description="FOUP Robot Pedant Mode"                       />
		<DI_ITEM Index="1909"   Name="DI_FOUPRobotEachHandWaferStatus"                                      BufferOffset="1909"                                      Addr="D119.5"                      Description="FOUP Robot Each Hand Wafer Status"                       />
		<DI_ITEM Index="1910"   Name="DI_FOUPRobotAlarmSignal"                                      BufferOffset="1910"                                      Addr="D119.6"                      Description="Foup robot alarm signal"                       />
		<DI_ITEM Index="1911"   Name="DI_FOUPRobotFoupOnRobotCheck"                                      BufferOffset="1911"                                      Addr="D119.7"                      Description="FOUP Robot Foup On Robot Check"                       />
		<DI_ITEM Index="1912"   Name="DI_FOUPRobotAxisZHomePosition"                                      BufferOffset="1912"                                      Addr="D119.8"                      Description="FOUP Robot Axis Z Home Position"                       />
		<DI_ITEM Index="1913"   Name="DI_FOUPRobotAxisYHomePosition"                                      BufferOffset="1913"                                      Addr="D119.9"                      Description="FOUP Robot Axis Y Home Position"                       />
		<DI_ITEM Index="1914"   Name="DI_FOUPRobotAxisRHomePosition"                                      BufferOffset="1914"                                      Addr="D119.10"                      Description="FOUP Robot Axis R Home Position"                       />
		<DI_ITEM Index="1915"   Name="DI_FOUPRobotRunning"                                      BufferOffset="1915"                                      Addr="D119.11"                      Description="FOUP Robot Running"                       />
		<DI_ITEM Index="1916"   Name="DI_FOUPRobotWithinBufferLayer1Area"                                      BufferOffset="1916"                                      Addr="D119.12"                      Description="FOUP Robot Within Buffer Layer1 Area"                       />
		<DI_ITEM Index="1917"   Name="DI_FOUPRobotWithinBufferLayer2Area"                                      BufferOffset="1917"                                      Addr="D119.13"                      Description="FOUP Robot Within Buffer Layer2 Area"                       />
		<DI_ITEM Index="1918"   Name="DI_FOUPRobotWithinBufferLayer3Area"                                      BufferOffset="1918"                                      Addr="D119.14"                      Description="FOUP Robot Within Buffer Layer3 Area"                       />
		<DI_ITEM Index="1919"   Name="DI_FOUPRobotWithinBufferLayer4Area"                                      BufferOffset="1919"                                      Addr="D119.15"                      Description="FOUP Robot Within Buffer Layer4 Area"                       />

		<DI_ITEM Index="1920"   Name="DI_Loadport1E84Valid"                                      BufferOffset="1920"                                      Addr="D120.0"                      Description="Loadport1 E84 Valid"                       />
		<DI_ITEM Index="1921"   Name="DI_Loadport1E84CS0"                                      BufferOffset="1921"                                      Addr="D120.1"                      Description="Loadport1 E84 CS_0"                       />
		<DI_ITEM Index="1922"   Name="DI_Loadport1E84CS1"                                      BufferOffset="1922"                                      Addr="D120.2"                      Description="Loadport1 E84 CS_1"                       />
		<DI_ITEM Index="1924"   Name="DI_Loadport1E84TRREQ"                                      BufferOffset="1924"                                      Addr="D120.4"                      Description="Loadport1 E84 TR_REQ"                       />
		<DI_ITEM Index="1925"   Name="DI_Loadport1E84busy"                                      BufferOffset="1925"                                      Addr="D120.5"                      Description="Loadport1 E84 busy"                       />
		<DI_ITEM Index="1926"   Name="DI_Loadport1E84COMPT"                                      BufferOffset="1926"                                      Addr="D120.6"                      Description="Loadport1 E84 COMPT"                       />
		<DI_ITEM Index="1927"   Name="DI_Loadport1E84CONT"                                      BufferOffset="1927"                                      Addr="D120.7"                      Description="Loadport1 E84 CONT"                       />
		<DI_ITEM Index="1928"   Name="DI_Loadport2E84Valid"                                      BufferOffset="1928"                                      Addr="D120.8"                      Description="Loadport2 E84 Valid"                       />
		<DI_ITEM Index="1929"   Name="DI_Loadport2E84CS0"                                      BufferOffset="1929"                                      Addr="D120.9"                      Description="Loadport2 E84 CS_0"                       />
		<DI_ITEM Index="1930"   Name="DI_Loadport2E84CS1"                                      BufferOffset="1930"                                      Addr="D120.10"                      Description="Loadport2 E84 CS_1"                       />
		<DI_ITEM Index="1932"   Name="DI_Loadport2E84TRREQ"                                      BufferOffset="1932"                                      Addr="D120.12"                      Description="Loadport2 E84 TR_REQ"                       />
		<DI_ITEM Index="1933"   Name="DI_Loadport2E84busy"                                      BufferOffset="1933"                                      Addr="D120.13"                      Description="Loadport2 E84 busy"                       />
		<DI_ITEM Index="1934"   Name="DI_Loadport2E84COMPT"                                      BufferOffset="1934"                                      Addr="D120.14"                      Description="Loadport2 E84 COMPT"                       />
		<DI_ITEM Index="1935"   Name="DI_Loadport2E84CONT"                                      BufferOffset="1935"                                      Addr="D120.15"                      Description="Loadport2 E84 CONT"                       />

		<DI_ITEM Index="3200"   Name="DI_BoatRAxisRotationBusy"                                      BufferOffset="3200"                                      Addr="D200.0"                      Description="Boat RAxis Rotation Busy"                       />
		<DI_ITEM Index="3201"   Name="DI_BoatRAxisHomeBusy"                                      BufferOffset="3201"                                      Addr="D200.1"                      Description="Boat RAxis Home Busy"                       />
		<DI_ITEM Index="3203"   Name="DI_BoatRAxisHomeDone"                                      BufferOffset="3203"                                      Addr="D200.3"                      Description="Boat RAxis Home Done"                       />
		<DI_ITEM Index="3204"   Name="DI_BoatRAxisM0"                                      BufferOffset="3204"                                      Addr="D200.4"                      Description="M0"                       />
		<DI_ITEM Index="3205"   Name="DI_BoatRAxisM1"                                      BufferOffset="3205"                                      Addr="D200.5"                      Description="M1"                       />
		<DI_ITEM Index="3206"   Name="DI_BoatRAxisM2"                                      BufferOffset="3206"                                      Addr="D200.6"                      Description="M2"                       />
		<DI_ITEM Index="3207"   Name="DI_BoatRAxisM3"                                      BufferOffset="3207"                                      Addr="D200.7"                      Description="M3"                       />
		<DI_ITEM Index="3208"   Name="DI_BoatRAxisM4"                                      BufferOffset="3208"                                      Addr="D200.8"                      Description="M4"                       />
		<DI_ITEM Index="3209"   Name="DI_BoatRAxisM5"                                      BufferOffset="3209"                                      Addr="D200.9"                      Description="M5"                       />
		<DI_ITEM Index="3210"   Name="DI_Direction"                                      BufferOffset="3210"                                      Addr="D200.10"                      Description="CCW CW"                       />
		<DI_ITEM Index="3216"   Name="DI_BufferPowerOn"                                      BufferOffset="3216"                                      Addr="D201.0"                      Description="Buffer servo power on"                       />
		<DI_ITEM Index="3225"   Name="DI_MvAbsBusyBufferAxis"                                      BufferOffset="3225"                                      Addr="D201.9"                      Description="Buffer servo moving"                       />
		<DI_ITEM Index="3233"   Name="DI_NegLmtAlmBufferAxis"                                      BufferOffset="3233"                                      Addr="D202.1"                      Description="Buffer servo negative limit alarm"                       />
		<DI_ITEM Index="3234"   Name="DI_PotLmtAlmbBufferAxis"                                      BufferOffset="3234"                                      Addr="D202.2"                      Description="Buffer servo positive limit alarm"                       />
		<DI_ITEM Index="3238"   Name="DI_BufferWarningBufferAxis"                                      BufferOffset="3238"                                      Addr="D202.6"                      Description="Buffer servo warning"                       />
		<DI_ITEM Index="3239"   Name="DI_BufferFaultBufferAxis"                                      BufferOffset="3239"                                      Addr="D202.7"                      Description="Buffer servo fault"                       />
		<DI_ITEM Index="3248"   Name="DI_PwrBusyBoatZAxis"                                      BufferOffset="3248"                                      Addr="D203.0"                      Description="Boat Z servo power on doing"                       />
		<DI_ITEM Index="3257"   Name="DI_MvAbsBusyBoatZAxis"                                      BufferOffset="3257"                                      Addr="D203.9"                      Description="Boat Z servo moving"                       />
		<DI_ITEM Index="3264"   Name="DI_HmPosBoatZAxis"                                      BufferOffset="3264"                                      Addr="D204.0"                      Description="Boat Z servo home position(HmPos_b)"                       />
		<DI_ITEM Index="3265"   Name="DI_NegLmtPosBoatZAxis"                                      BufferOffset="3265"                                      Addr="D204.1"                      Description="Boat Z servo negative limit position(NegLmtPos_b)"                       />
		<DI_ITEM Index="3266"   Name="DI_PotLmtPosBoatZAxis"                                      BufferOffset="3266"                                      Addr="D204.2"                      Description="Boat Z servo positive limit position(PotLmtPos_b)"                       />
		<DI_ITEM Index="3270"   Name="DI_BoatWarningBoatZAxis"                                      BufferOffset="3270"                                      Addr="D204.6"                      Description="Boat Z  servo warning"                       />
		<DI_ITEM Index="3271"   Name="DI_BoatFaultBoatZAxis"                                      BufferOffset="3271"                                      Addr="D204.7"                      Description="Boat Z  servo fault"                       />
		<DI_ITEM Index="3273"   Name="DI_MiddlePos1BoatZAxis"                                      BufferOffset="3273"                                      Addr="D204.9"                      Description="Boat Z  servo Middle Position"                       />
		<DI_ITEM Index="3274"   Name="DI_MiddlePos2BoatZAxis"                                      BufferOffset="3274"                                      Addr="D204.10"                      Description="Boat Z  servo Cap Position"                       />
		<DI_ITEM Index="3275"   Name="DI_MiddlePos3BoatZAxis"                                      BufferOffset="3275"                                      Addr="D204.11"                      Description="Boat Z  servo Charge Position"                       />
		<DI_ITEM Index="3280"   Name="DI_P1ZeroOffsetOutRangeAlm"                                      BufferOffset="3280"                                      Addr="D205.0"                      Description="P1 Zero Offset Out Range Alm"                       />
		<DI_ITEM Index="3281"   Name="DI_P1ZeroAdjOutRangeAlm"                                      BufferOffset="3281"                                      Addr="D205.1"                      Description="P1 Zero Adj Out Range Alm"                       />
		<DI_ITEM Index="3282"   Name="DI_P1SpanAdjOutRangeAlm"                                      BufferOffset="3282"                                      Addr="D205.2"                      Description="P1 Span Adj Out Range Alm"                       />
		<DI_ITEM Index="3283"   Name="DI_P2ZeroOffsetOutRangeAlm"                                      BufferOffset="3283"                                      Addr="D205.3"                      Description="P2 Zero Offset Out Range Alm"                       />
		<DI_ITEM Index="3284"   Name="DI_P2ZeroAdjOutRangeAlm"                                      BufferOffset="3284"                                      Addr="D205.4"                      Description="P2 Zero Adj Out Range Alm"                       />
		<DI_ITEM Index="3285"   Name="DI_P2SpanAdjOutRangeAlm"                                      BufferOffset="3285"                                      Addr="D205.5"                      Description="P2 Span Adj Out Range Alm"                       />
		<DI_ITEM Index="3286"   Name="DI_P1PressCtrlInterlockAlm"                                      BufferOffset="3286"                                      Addr="D205.6"                      Description="P1 Press Ctrl Interlock Alm"                       />
		<DI_ITEM Index="3287"   Name="DI_P2PressCtrlInterlockAlm"                                      BufferOffset="3287"                                      Addr="D205.7"                      Description="P2 Press Ctrl Interlock Alm"                       />
		<DI_ITEM Index="3288"   Name="DI_ValveOpenCtrlInterlockAlm"                                      BufferOffset="3288"                                      Addr="D205.8"                      Description="Valve Open Ctrl Interlock Alm"                       />
		<DI_ITEM Index="3289"   Name="DI_ValveHoldCtrlInterlockAlm"                                      BufferOffset="3289"                                      Addr="D205.9"                      Description="Valve Hold Ctrl Interlock Alm"                       />
		<DI_ITEM Index="3290"   Name="DI_ValveCloseInterlockAlm"                                      BufferOffset="3290"                                      Addr="D205.10"                      Description="Valve Close Interlock Alm"                       />
		<DI_ITEM Index="3291"   Name="DI_AutoTeachingInterlockAlm"                                      BufferOffset="3291"                                      Addr="D205.11"                      Description="Auto Teaching Interlock Alm"                       />
		<DI_ITEM Index="3292"   Name="DI_P1DisconnectionAlm"                                      BufferOffset="3292"                                      Addr="D205.12"                      Description="P1 Disconnection Alm"                       />
		<DI_ITEM Index="3293"   Name="DI_P2DisconnectionAlm"                                      BufferOffset="3293"                                      Addr="D205.13"                      Description="P2 Disconnection Alm"                       />
		<DI_ITEM Index="3294"   Name="DI_PumpStopInterlockAlm"                                      BufferOffset="3294"                                      Addr="D205.14"                      Description="Pump Stop Interlock Alm"                       />
		<DI_ITEM Index="3295"   Name="DI_AutoTeachingErr1Alm"                                      BufferOffset="3295"                                      Addr="D205.15"                      Description="Auto Teaching Err1 Alm"                       />

		<DI_ITEM Index="3296"   Name="DI_AutoTeachingErr2Alm"                                      BufferOffset="3296"                                      Addr="D206.0"                      Description="Auto Teaching Err2 Alm"                       />

		<DI_ITEM Index="5216"   Name="DI_FIMS1LoadComplete"                                      BufferOffset="5216"                                      Addr="D326.0"                      Description="FIMS1 Load Complete"                       />
		<DI_ITEM Index="5217"   Name="DI_FIMS1UnloadComplete"                                      BufferOffset="5217"                                      Addr="D326.1"                      Description="FIMS1 Unload Complete"                       />
		<DI_ITEM Index="5218"   Name="DI_FIMS1HomeComplete"                                      BufferOffset="5218"                                      Addr="D326.2"                      Description="FIMS1 Home Complete"                       />
		<DI_ITEM Index="5219"   Name="DI_FIMS1Running"                                      BufferOffset="5219"                                      Addr="D326.3"                      Description="FIMS1 Running"                       />
		<DI_ITEM Index="5220"   Name="DI_FIMS1AutoManualMode"                                      BufferOffset="5220"                                      Addr="D326.4"                      Description="FIMS1 Auto/Manual Mode"                       />
		<DI_ITEM Index="5232"   Name="DI_FIMS2LoadComplete"                                      BufferOffset="5232"                                      Addr="D327.0"                      Description="FIMS2 Load Complete"                       />
		<DI_ITEM Index="5233"   Name="DI_FIMS2UnloadComplete"                                      BufferOffset="5233"                                      Addr="D327.1"                      Description="FIMS2 Unload Complete"                       />
		<DI_ITEM Index="5234"   Name="DI_FIMS2HomeComplete"                                      BufferOffset="5234"                                      Addr="D327.2"                      Description="FIMS2 Home Complete"                       />
		<DI_ITEM Index="5235"   Name="DI_FIMS2Running"                                      BufferOffset="5235"                                      Addr="D327.3"                      Description="FIMS2 Running"                       />
		<DI_ITEM Index="5236"   Name="DI_FIMS2AutoManualMode"                                      BufferOffset="5236"                                      Addr="D327.4"                      Description="FIMS2 Auto/Manual Mode"                       />
		<DI_ITEM Index="5248"   Name="DI_BufferInPositionA1"                                      BufferOffset="5248"                                      Addr="D328.0"                      Description="Buffer in position A1 "                       />
		<DI_ITEM Index="5249"   Name="DI_BufferInPositionB1"                                      BufferOffset="5249"                                      Addr="D328.1"                      Description="Buffer in position B1 "                       />
		<DI_ITEM Index="5250"   Name="DI_BufferInPositionC1"                                      BufferOffset="5250"                                      Addr="D328.2"                      Description="Buffer in position C1 "                       />
		<DI_ITEM Index="5251"   Name="DI_BufferInPositionD1"                                      BufferOffset="5251"                                      Addr="D328.3"                      Description="Buffer in position D1 "                       />
		<DI_ITEM Index="5252"   Name="DI_BufferInPositionA2"                                      BufferOffset="5252"                                      Addr="D328.4"                      Description="Buffer in position A2 "                       />
		<DI_ITEM Index="5253"   Name="DI_BufferInPositionB2"                                      BufferOffset="5253"                                      Addr="D328.5"                      Description="Buffer in position B2 "                       />
		<DI_ITEM Index="5254"   Name="DI_BufferInPositionC2"                                      BufferOffset="5254"                                      Addr="D328.6"                      Description="Buffer in position C2 "                       />
		<DI_ITEM Index="5255"   Name="DI_BufferInPositionD2"                                      BufferOffset="5255"                                      Addr="D328.7"                      Description="Buffer in position D2 "                       />
		<DI_ITEM Index="5256"   Name="DI_BufferInPositionA3"                                      BufferOffset="5256"                                      Addr="D328.8"                      Description="Buffer in position A3 "                       />
		<DI_ITEM Index="5257"   Name="DI_BufferInPositionB3"                                      BufferOffset="5257"                                      Addr="D328.9"                      Description="Buffer in position B3 "                       />
		<DI_ITEM Index="5258"   Name="DI_BufferInPositionC3"                                      BufferOffset="5258"                                      Addr="D328.10"                      Description="Buffer in position C3 "                       />
		<DI_ITEM Index="5259"   Name="DI_BufferInPositionD3"                                      BufferOffset="5259"                                      Addr="D328.11"                      Description="Buffer in position D3 "                       />
		<DI_ITEM Index="5260"   Name="DI_BufferInPositionA4"                                      BufferOffset="5260"                                      Addr="D328.12"                      Description="Buffer in position A4 "                       />
		<DI_ITEM Index="5261"   Name="DI_BufferInPositionB4"                                      BufferOffset="5261"                                      Addr="D328.13"                      Description="Buffer in position B4 "                       />
		<DI_ITEM Index="5262"   Name="DI_BufferInPositionC4"                                      BufferOffset="5262"                                      Addr="D328.14"                      Description="Buffer in position C4 "                       />
		<DI_ITEM Index="5263"   Name="DI_BufferInPositionD4"                                      BufferOffset="5263"                                      Addr="D328.15"                      Description="Buffer in position D4 "                       />

		<DI_ITEM Index="5280"   Name="DI_LAFFUCommAlarm"                                      BufferOffset="5280"                                      Addr="D330.0"                      Description="LA FFU Comm Alarm"                       />
		<DI_ITEM Index="5281"   Name="DI_MINI8CommAlarm"                                      BufferOffset="5281"                                      Addr="D330.1"                      Description="MINI 8 Comm Alarm"                       />
		<DI_ITEM Index="5282"   Name="DI_AVGSwitchStatus"                                      BufferOffset="5282"                                      Addr="D330.2"                      Description="AVGSwitchStatus"                       />
		<DI_ITEM Index="5283"   Name="DI_MainWaterFlowAlarm"                                      BufferOffset="5283"                                      Addr="D330.3"                      Description="MainWaterFlowAlarm"                       />
		<DI_ITEM Index="5284"   Name="DI_BufferRemoteIOAlarm"                                      BufferOffset="5284"                                      Addr="D330.4"                      Description="BufferRemoteIOAlarm_b"                       />
		<DI_ITEM Index="5285"   Name="DI_APCCommAlarm"                                      BufferOffset="5285"                                      Addr="D330.5"                      Description="APC Comm Alarm"                       />
		<DI_ITEM Index="5440"   Name="DI_VAC1"                                      BufferOffset="5440"                                      Addr="D340.0"                      Description="VAC1"                       />
		<DI_ITEM Index="5441"   Name="DI_VAC2"                                      BufferOffset="5441"                                      Addr="D340.1"                      Description="VAC2"                       />
		<DI_ITEM Index="5442"   Name="DI_VAC3"                                      BufferOffset="5442"                                      Addr="D340.2"                      Description="VAC3"                       />
		<DI_ITEM Index="5443"   Name="DI_VAC4"                                      BufferOffset="5443"                                      Addr="D340.3"                      Description="VAC4"                       />
		<DI_ITEM Index="5444"   Name="DI_VAC5"                                      BufferOffset="5444"                                      Addr="D340.4"                      Description="VAC5"                       />
		<DI_ITEM Index="5445"   Name="DI_VAC6"                                      BufferOffset="5445"                                      Addr="D340.5"                      Description="VAC6"                       />
		<DI_ITEM Index="5446"   Name="DI_VAC7"                                      BufferOffset="5446"                                      Addr="D340.6"                      Description="VAC7"                       />
		<DI_ITEM Index="5447"   Name="DI_VAC8"                                      BufferOffset="5447"                                      Addr="D340.7"                      Description="VAC8"                       />
		<DI_ITEM Index="5448"   Name="DI_NVAC"                                      BufferOffset="5448"                                      Addr="D340.8"                      Description="NVAC"                       />
		<DI_ITEM Index="5455"   Name="DI_BoatUnloadInterlock"                                      BufferOffset="5455"                                      Addr="D340.15"                      Description="BoatUnloadInterlock"                       />

		<DI_ITEM Index="5456"   Name="DI_AV60ILK"                                      BufferOffset="5456"                                      Addr="D341.0"                      Description="AV60ILK"                       />
		<DI_ITEM Index="5457"   Name="DI_AV74ILK"                                      BufferOffset="5457"                                      Addr="D341.1"                      Description="AV74ILK"                       />
		<DI_ITEM Index="5458"   Name="DI_AV77ILK"                                      BufferOffset="5458"                                      Addr="D341.2"                      Description="AV77ILK"                       />
		<DI_ITEM Index="5459"   Name="DI_AV78ILK"                                      BufferOffset="5459"                                      Addr="D341.3"                      Description="AV78ILK"                       />
		<DI_ITEM Index="5460"   Name="DI_AV80ILK"                                      BufferOffset="5460"                                      Addr="D341.4"                      Description="AV80ILK"                       />
		<DI_ITEM Index="5461"   Name="DI_AV81ILK"                                      BufferOffset="5461"                                      Addr="D341.5"                      Description="AV81ILK"                       />
		<DI_ITEM Index="5462"   Name="DI_AV131ILK"                                      BufferOffset="5462"                                      Addr="D341.6"                      Description="AV131ILK"                       />
		<DI_ITEM Index="5463"   Name="DI_AV134ILK"                                      BufferOffset="5463"                                      Addr="D341.7"                      Description="AV134ILK"                       />
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		<DI_ITEM Index="6558"   Name="DI_AV159Status"                                      BufferOffset="6558"                                      Addr="D409.14"                      Description="AV159 Status"                       />
		<DI_ITEM Index="6559"   Name="DI_AV160Status"                                      BufferOffset="6559"                                      Addr="D409.15"                      Description="AV160 Status"                       />

		<DI_ITEM Index="6560"   Name="DI_AV161Status"                                      BufferOffset="6560"                                      Addr="D410.0"                      Description="AV161 Status"                       />
		<DI_ITEM Index="6561"   Name="DI_AV162Status"                                      BufferOffset="6561"                                      Addr="D410.1"                      Description="AV162 Status"                       />
		<DI_ITEM Index="6562"   Name="DI_AV163Status"                                      BufferOffset="6562"                                      Addr="D410.2"                      Description="AV163 Status"                       />
		<DI_ITEM Index="6563"   Name="DI_AV164Status"                                      BufferOffset="6563"                                      Addr="D410.3"                      Description="AV164 Status"                       />
		<DI_ITEM Index="6564"   Name="DI_AV165Status"                                      BufferOffset="6564"                                      Addr="D410.4"                      Description="AV165 Status"                       />
		<DI_ITEM Index="6565"   Name="DI_AV166Status"                                      BufferOffset="6565"                                      Addr="D410.5"                      Description="AV166 Status"                       />
		<DI_ITEM Index="6566"   Name="DI_AV167Status"                                      BufferOffset="6566"                                      Addr="D410.6"                      Description="AV167 Status"                       />
		<DI_ITEM Index="6567"   Name="DI_AV168Status"                                      BufferOffset="6567"                                      Addr="D410.7"                      Description="AV168 Status"                       />
		<DI_ITEM Index="6568"   Name="DI_AV169Status"                                      BufferOffset="6568"                                      Addr="D410.8"                      Description="AV169 Status"                       />
		<DI_ITEM Index="6569"   Name="DI_AV170Status"                                      BufferOffset="6569"                                      Addr="D410.9"                      Description="AV170 Status"                       />
		<DI_ITEM Index="6570"   Name="DI_AV171Status"                                      BufferOffset="6570"                                      Addr="D410.10"                      Description="AV171 Status"                       />
		<DI_ITEM Index="6571"   Name="DI_AV172Status"                                      BufferOffset="6571"                                      Addr="D410.11"                      Description="AV172 Status"                       />
		<DI_ITEM Index="6572"   Name="DI_AV173Status"                                      BufferOffset="6572"                                      Addr="D410.12"                      Description="AV173 Status"                       />
		<DI_ITEM Index="6573"   Name="DI_AV174Status"                                      BufferOffset="6573"                                      Addr="D410.13"                      Description="AV174 Status"                       />
		<DI_ITEM Index="6574"   Name="DI_AV175Status"                                      BufferOffset="6574"                                      Addr="D410.14"                      Description="AV175 Status"                       />
		<DI_ITEM Index="6575"   Name="DI_AV176Status"                                      BufferOffset="6575"                                      Addr="D410.15"                      Description="AV176 Status"                       />

		<DI_ITEM Index="6576"   Name="DI_AV177Status"                                      BufferOffset="6576"                                      Addr="D411.0"                      Description="AV177 Status"                       />
		<DI_ITEM Index="6577"   Name="DI_AV178Status"                                      BufferOffset="6577"                                      Addr="D411.1"                      Description="AV178 Status"                       />
		<DI_ITEM Index="6578"   Name="DI_AV179Status"                                      BufferOffset="6578"                                      Addr="D411.2"                      Description="AV179 Status"                       />
		<DI_ITEM Index="6579"   Name="DI_AV180Status"                                      BufferOffset="6579"                                      Addr="D411.3"                      Description="AV180 Status"                       />
		<DI_ITEM Index="6580"   Name="DI_AV181Status"                                      BufferOffset="6580"                                      Addr="D411.4"                      Description="AV181 Status"                       />
		<DI_ITEM Index="6581"   Name="DI_AV182Status"                                      BufferOffset="6581"                                      Addr="D411.5"                      Description="AV182 Status"                       />
		<DI_ITEM Index="6582"   Name="DI_AV183Status"                                      BufferOffset="6582"                                      Addr="D411.6"                      Description="AV183 Status"                       />
		<DI_ITEM Index="6583"   Name="DI_AV184Status"                                      BufferOffset="6583"                                      Addr="D411.7"                      Description="AV184 Status"                       />
		<DI_ITEM Index="6584"   Name="DI_AV185Status"                                      BufferOffset="6584"                                      Addr="D411.8"                      Description="AV185 Status"                       />
		<DI_ITEM Index="6585"   Name="DI_AV186Status"                                      BufferOffset="6585"                                      Addr="D411.9"                      Description="AV186 Status"                       />
		<DI_ITEM Index="6586"   Name="DI_AV187Status"                                      BufferOffset="6586"                                      Addr="D411.10"                      Description="AV187 Status"                       />
		<DI_ITEM Index="6587"   Name="DI_AV188Status"                                      BufferOffset="6587"                                      Addr="D411.11"                      Description="AV188 Status"                       />
		<DI_ITEM Index="6588"   Name="DI_AV189Status"                                      BufferOffset="6588"                                      Addr="D411.12"                      Description="AV189 Status"                       />
		<DI_ITEM Index="6589"   Name="DI_AV190Status"                                      BufferOffset="6589"                                      Addr="D411.13"                      Description="AV190 Status"                       />
		<DI_ITEM Index="6590"   Name="DI_AV191Status"                                      BufferOffset="6590"                                      Addr="D411.14"                      Description="AV191 Status"                       />
		<DI_ITEM Index="6591"   Name="DI_AV192Status"                                      BufferOffset="6591"                                      Addr="D411.15"                      Description="AV192 Status"                       />

		<DI_ITEM Index="6592"   Name="DI_AV193Status"                                      BufferOffset="6592"                                      Addr="D412.0"                      Description="AV193 Status"                       />
		<DI_ITEM Index="6593"   Name="DI_AV194Status"                                      BufferOffset="6593"                                      Addr="D412.1"                      Description="AV194 Status"                       />
		<DI_ITEM Index="6594"   Name="DI_AV195Status"                                      BufferOffset="6594"                                      Addr="D412.2"                      Description="AV195 Status"                       />
		<DI_ITEM Index="6595"   Name="DI_AV196Status"                                      BufferOffset="6595"                                      Addr="D412.3"                      Description="AV196 Status"                       />
		<DI_ITEM Index="6596"   Name="DI_AV197Status"                                      BufferOffset="6596"                                      Addr="D412.4"                      Description="AV197 Status"                       />
		<DI_ITEM Index="6597"   Name="DI_AV198Status"                                      BufferOffset="6597"                                      Addr="D412.5"                      Description="AV198 Status"                       />
		<DI_ITEM Index="6598"   Name="DI_AV199Status"                                      BufferOffset="6598"                                      Addr="D412.6"                      Description="AV199 Status"                       />
		<DI_ITEM Index="6599"   Name="DI_AV200Status"                                      BufferOffset="6599"                                      Addr="D412.7"                      Description="AV200 Status"                       />
		<DI_ITEM Index="6600"   Name="DI_AV201Status"                                      BufferOffset="6600"                                      Addr="D412.8"                      Description="AV201 Status"                       />
		<DI_ITEM Index="6601"   Name="DI_AV202Status"                                      BufferOffset="6601"                                      Addr="D412.9"                      Description="AV202 Status"                       />
		<DI_ITEM Index="6602"   Name="DI_AV203Status"                                      BufferOffset="6602"                                      Addr="D412.10"                      Description="AV203 Status"                       />
		<DI_ITEM Index="6603"   Name="DI_AV204Status"                                      BufferOffset="6603"                                      Addr="D412.11"                      Description="AV204 Status"                       />
		<DI_ITEM Index="6604"   Name="DI_AV205Status"                                      BufferOffset="6604"                                      Addr="D412.12"                      Description="AV205 Status"                       />
		<DI_ITEM Index="6605"   Name="DI_AV206Status"                                      BufferOffset="6605"                                      Addr="D412.13"                      Description="AV206 Status"                       />
		<DI_ITEM Index="6606"   Name="DI_AV207Status"                                      BufferOffset="6606"                                      Addr="D412.14"                      Description="AV207 Status"                       />
		<DI_ITEM Index="6607"   Name="DI_AV208Status"                                      BufferOffset="6607"                                      Addr="D412.15"                      Description="AV208 Status"                       />

		<DI_ITEM Index="6608"   Name="DI_AV209Status"                                      BufferOffset="6608"                                      Addr="D413.0"                      Description="AV209 Status"                       />
		<DI_ITEM Index="6609"   Name="DI_AV210Status"                                      BufferOffset="6609"                                      Addr="D413.1"                      Description="AV210 Status"                       />
		<DI_ITEM Index="6610"   Name="DI_AV211Status"                                      BufferOffset="6610"                                      Addr="D413.2"                      Description="AV211 Status"                       />
		<DI_ITEM Index="6611"   Name="DI_AV212Status"                                      BufferOffset="6611"                                      Addr="D413.3"                      Description="AV212 Status"                       />
		<DI_ITEM Index="6612"   Name="DI_AV213Status"                                      BufferOffset="6612"                                      Addr="D413.4"                      Description="AV213 Status"                       />
		<DI_ITEM Index="6613"   Name="DI_AV214Status"                                      BufferOffset="6613"                                      Addr="D413.5"                      Description="AV214 Status"                       />
		<DI_ITEM Index="6614"   Name="DI_AV215Status"                                      BufferOffset="6614"                                      Addr="D413.6"                      Description="AV215 Status"                       />
		<DI_ITEM Index="6615"   Name="DI_AV216Status"                                      BufferOffset="6615"                                      Addr="D413.7"                      Description="AV216 Status"                       />
		<DI_ITEM Index="6616"   Name="DI_AV217Status"                                      BufferOffset="6616"                                      Addr="D413.8"                      Description="AV217 Status"                       />
		<DI_ITEM Index="6617"   Name="DI_AV218Status"                                      BufferOffset="6617"                                      Addr="D413.9"                      Description="AV218 Status"                       />
		<DI_ITEM Index="6618"   Name="DI_AV219Status"                                      BufferOffset="6618"                                      Addr="D413.10"                      Description="AV219 Status"                       />
		<DI_ITEM Index="6619"   Name="DI_AV220Status"                                      BufferOffset="6619"                                      Addr="D413.11"                      Description="AV220 Status"                       />
		<DI_ITEM Index="6620"   Name="DI_AV221Status"                                      BufferOffset="6620"                                      Addr="D413.12"                      Description="AV221 Status"                       />
		<DI_ITEM Index="6621"   Name="DI_AV222Status"                                      BufferOffset="6621"                                      Addr="D413.13"                      Description="AV222 Status"                       />
		<DI_ITEM Index="6622"   Name="DI_AV223Status"                                      BufferOffset="6622"                                      Addr="D413.14"                      Description="AV223 Status"                       />
		<DI_ITEM Index="6623"   Name="DI_AV224Status"                                      BufferOffset="6623"                                      Addr="D413.15"                      Description="AV224 Status"                       />

		<DI_ITEM Index="6624"   Name="DI_AV225Status"                                      BufferOffset="6624"                                      Addr="D414.0"                      Description="AV225 Status"                       />
		<DI_ITEM Index="6625"   Name="DI_AV226Status"                                      BufferOffset="6625"                                      Addr="D414.1"                      Description="AV226 Status"                       />
		<DI_ITEM Index="6626"   Name="DI_AV227Status"                                      BufferOffset="6626"                                      Addr="D414.2"                      Description="AV227 Status"                       />
		<DI_ITEM Index="6627"   Name="DI_AV228Status"                                      BufferOffset="6627"                                      Addr="D414.3"                      Description="AV228 Status"                       />
		<DI_ITEM Index="6628"   Name="DI_AV229Status"                                      BufferOffset="6628"                                      Addr="D414.4"                      Description="AV229 Status"                       />
		<DI_ITEM Index="6629"   Name="DI_AV230Status"                                      BufferOffset="6629"                                      Addr="D414.5"                      Description="AV230 Status"                       />
		<DI_ITEM Index="6630"   Name="DI_AV231Status"                                      BufferOffset="6630"                                      Addr="D414.6"                      Description="AV231 Status"                       />
		<DI_ITEM Index="6631"   Name="DI_AV232Status"                                      BufferOffset="6631"                                      Addr="D414.7"                      Description="AV232 Status"                       />
		<DI_ITEM Index="6632"   Name="DI_AV233Status"                                      BufferOffset="6632"                                      Addr="D414.8"                      Description="AV233 Status"                       />
		<DI_ITEM Index="6633"   Name="DI_AV234Status"                                      BufferOffset="6633"                                      Addr="D414.9"                      Description="AV234 Status"                       />
		<DI_ITEM Index="6634"   Name="DI_AV235Status"                                      BufferOffset="6634"                                      Addr="D414.10"                      Description="AV235 Status"                       />
		<DI_ITEM Index="6635"   Name="DI_AV236Status"                                      BufferOffset="6635"                                      Addr="D414.11"                      Description="AV236 Status"                       />
		<DI_ITEM Index="6636"   Name="DI_AV237Status"                                      BufferOffset="6636"                                      Addr="D414.12"                      Description="AV237 Status"                       />
		<DI_ITEM Index="6637"   Name="DI_AV238Status"                                      BufferOffset="6637"                                      Addr="D414.13"                      Description="AV238 Status"                       />
		<DI_ITEM Index="6638"   Name="DI_AV239Status"                                      BufferOffset="6638"                                      Addr="D414.14"                      Description="AV239 Status"                       />
		<DI_ITEM Index="6639"   Name="DI_AV240Status"                                      BufferOffset="6639"                                      Addr="D414.15"                      Description="AV240 Status"                       />

		<DI_ITEM Index="6640"   Name="DI_AV241Status"                                      BufferOffset="6640"                                      Addr="D415.0"                      Description="AV241 Status"                       />
		<DI_ITEM Index="6641"   Name="DI_AV242Status"                                      BufferOffset="6641"                                      Addr="D415.1"                      Description="AV242 Status"                       />
		<DI_ITEM Index="6642"   Name="DI_AV243Status"                                      BufferOffset="6642"                                      Addr="D415.2"                      Description="AV243 Status"                       />
		<DI_ITEM Index="6643"   Name="DI_AV244Status"                                      BufferOffset="6643"                                      Addr="D415.3"                      Description="AV244 Status"                       />
		<DI_ITEM Index="6644"   Name="DI_AV245Status"                                      BufferOffset="6644"                                      Addr="D415.4"                      Description="AV245 Status"                       />
		<DI_ITEM Index="6645"   Name="DI_AV246Status"                                      BufferOffset="6645"                                      Addr="D415.5"                      Description="AV246 Status"                       />
		<DI_ITEM Index="6646"   Name="DI_AV247Status"                                      BufferOffset="6646"                                      Addr="D415.6"                      Description="AV247 Status"                       />
		<DI_ITEM Index="6647"   Name="DI_AV248Status"                                      BufferOffset="6647"                                      Addr="D415.7"                      Description="AV248 Status"                       />
		<DI_ITEM Index="6648"   Name="DI_AV249Status"                                      BufferOffset="6648"                                      Addr="D415.8"                      Description="AV249 Status"                       />
		<DI_ITEM Index="6649"   Name="DI_AV250Status"                                      BufferOffset="6649"                                      Addr="D415.9"                      Description="AV250 Status"                       />
		<DI_ITEM Index="6700"   Name="DI_PCONNTStatus"                                      BufferOffset="6700"                                      Addr="D418.12"                      Description="PCONNT Status"                       />
		<DI_ITEM Index="6701"   Name="DI_DGZEROStatus"                                      BufferOffset="6701"                                      Addr="D418.13"                      Description="DGZERO Status"                       />
		<DI_ITEM Index="6702"   Name="DI_DP1Status"                                      BufferOffset="6702"                                      Addr="D418.14"                      Description="DP1 Status"                       />
		<DI_ITEM Index="6703"   Name="DI_DP2Status"                                      BufferOffset="6703"                                      Addr="D418.15"                      Description="DP2 Status"                       />

		<DI_ITEM Index="6704"   Name="DI_BWRStatus"                                      BufferOffset="6704"                                      Addr="D419.00"                      Description="BWR Status"                       />
		<DI_ITEM Index="6705"   Name="DI_DPRStatus"                                      BufferOffset="6705"                                      Addr="D419.01"                      Description="DPR Status"                       />
		<DI_ITEM Index="6706"   Name="DI_CLNStatus"                                      BufferOffset="6706"                                      Addr="D419.02"                      Description="CLN Status"                       />
		<DI_ITEM Index="6707"   Name="DI_HTR1Status"                                      BufferOffset="6707"                                      Addr="D419.03"                      Description="HTR1 Status"                       />
		<DI_ITEM Index="6708"   Name="DI_HTR2Status"                                      BufferOffset="6708"                                      Addr="D419.04"                      Description="HTR2 Status"                       />
		<DI_ITEM Index="6709"   Name="DI_HTR3Status"                                      BufferOffset="6709"                                      Addr="D419.05"                      Description="HTR3 Status"                       />
		<DI_ITEM Index="6710"   Name="DI_HREFStatus"                                      BufferOffset="6710"                                      Addr="D419.06"                      Description="HREF Status"                       />
		<DI_ITEM Index="6711"   Name="DI_CREFStatus"                                      BufferOffset="6711"                                      Addr="D419.07"                      Description="CREF Status"                       />
		<DI_ITEM Index="6712"   Name="DI_HMNTStatus"                                      BufferOffset="6712"                                      Addr="D419.08"                      Description="HMNT Status"                       />
		<DI_ITEM Index="6713"   Name="DI_CMNTStatus"                                      BufferOffset="6713"                                      Addr="D419.09"                      Description="CMNT Status"                       />
		<DI_ITEM Index="6714"   Name="DI_HZEROStatus"                                      BufferOffset="6714"                                      Addr="D419.10"                      Description="HZERO Status"                       />
		<DI_ITEM Index="6715"   Name="DI_CZEROStatus"                                      BufferOffset="6715"                                      Addr="D419.11"                      Description="CZERO Status"                       />
		<DI_ITEM Index="6716"   Name="DI_WATStatus"                                      BufferOffset="6716"                                      Addr="D419.12"                      Description="WAT Status"                       />
		<DI_ITEM Index="6717"   Name="DI_CEXHStatus"                                      BufferOffset="6717"                                      Addr="D419.13"                      Description="CEXH Status"                       />
		<DI_ITEM Index="6718"   Name="DI_NZEROStatus"                                      BufferOffset="6718"                                      Addr="D419.14"                      Description="NZERO Status"                       />
		<DI_ITEM Index="6719"   Name="DI_MZEROStatus"                                      BufferOffset="6719"                                      Addr="D419.15"                      Description="MZERO Status"                       />

		<DI_ITEM Index="6720"   Name="DI_DEPOOKStatus"                                      BufferOffset="6720"                                      Addr="D420.00"                      Description="DEPO_OK Status"                       />
		<DI_ITEM Index="6721"   Name="DI_CLNOKLightStatus"                                      BufferOffset="6721"                                      Addr="D420.01"                      Description="CLN OK Light Status"                       />
		<DI_ITEM Index="6722"   Name="DI_NVACLEDStatus"                                      BufferOffset="6722"                                      Addr="D420.02"                      Description="NVAC LED Status"                       />
		<DI_ITEM Index="6723"   Name="DI_VAC1LEDStatus"                                      BufferOffset="6723"                                      Addr="D420.03"                      Description="VAC1 LED Status"                       />
		<DI_ITEM Index="6724"   Name="DI_VAC2LEDStatus"                                      BufferOffset="6724"                                      Addr="D420.04"                      Description="VAC2 LED Status"                       />
		<DI_ITEM Index="6725"   Name="DI_VAC3LEDStatus"                                      BufferOffset="6725"                                      Addr="D420.05"                      Description="VAC3 LED Status"                       />
		<DI_ITEM Index="6726"   Name="DI_VAC4LEDStatus"                                      BufferOffset="6726"                                      Addr="D420.06"                      Description="VAC4 LED Status"                       />
		<DI_ITEM Index="6727"   Name="DI_VAC5LEDStatus"                                      BufferOffset="6727"                                      Addr="D420.07"                      Description="VAC5 LED Status"                       />
		<DI_ITEM Index="6728"   Name="DI_VAC6LEDStatus"                                      BufferOffset="6728"                                      Addr="D420.08"                      Description="VAC6 LED Status"                       />
		<DI_ITEM Index="6729"   Name="DI_VAC7LEDStatus"                                      BufferOffset="6729"                                      Addr="D420.09"                      Description="VAC7 LED Status"                       />
		<DI_ITEM Index="6730"   Name="DI_VAC8LEDStatus"                                      BufferOffset="6730"                                      Addr="D420.10"                      Description="VAC8 LED Status"                       />
		<DI_ITEM Index="6731"   Name="DI_BoatUnloadStatus"                                      BufferOffset="6731"                                      Addr="D420.11"                      Description="BoatUnload Status"                       />
	</Dig_In>
	<Dig_Out>
		<DO_ITEM Index="962"    Name="DO_LADamperOpen"                                      BufferOffset="962"                                      Addr="D1060.2"                      Description="AV227 opne (LA Damper)"                       />
		<DO_ITEM Index="963"    Name="DO_LADamperClose"                                      BufferOffset="963"                                      Addr="D1060.3"                      Description="AV227 close(LA Damper)"                       />
		<DO_ITEM Index="965"    Name="DO_LAO2CheckFirstEN"                                      BufferOffset="965"                                      Addr="D1060.5"                      Description="LA O2 Check FirstEN"                       />
		<DO_ITEM Index="966"    Name="DO_FIMS1O2CheckEN"                                      BufferOffset="966"                                      Addr="D1060.6"                      Description="FIMS1 O2 CheckEN"                       />
		<DO_ITEM Index="967"    Name="DO_FIMS2O2CheckEN"                                      BufferOffset="967"                                      Addr="D1060.7"                      Description="FIMS2 O2 CheckEN"                       />
		<DO_ITEM Index="968"    Name="DO_N2PURGEPROCESS"                                      BufferOffset="968"                                      Addr="D1060.8"                      Description="N2 PURGE PROCESS"                       />
		<DO_ITEM Index="1104"   Name="DO_StartButton"                                      BufferOffset="1104"                                      Addr="D1069.0"                      Description="start button"                       />
		<DO_ITEM Index="1105"   Name="DO_StopButton"                                      BufferOffset="1105"                                      Addr="D1069.1"                      Description="stop button"                       />
		<DO_ITEM Index="1106"   Name="DO_ResetButton"                                      BufferOffset="1106"                                      Addr="D1069.2"                      Description="reset button"                       />
		<DO_ITEM Index="1107"   Name="DO_MechaStopButton"                                      BufferOffset="1107"                                      Addr="D1069.3"                      Description="mecha stop button"                       />
		<DO_ITEM Index="1108"   Name="DO_AutoOrManualKnob"                                      BufferOffset="1108"                                      Addr="D1069.4"                      Description="auto/manual knob"                       />
		<DO_ITEM Index="1109"   Name="DO_NormalOrMaintainKnob"                                      BufferOffset="1109"                                      Addr="D1069.5"                      Description="normal/maintain knob"                       />
		<DO_ITEM Index="1110"   Name="DO_HeaterPowerOnOffKnob"                                      BufferOffset="1110"                                      Addr="D1069.6"                      Description="heater power on/off knob"                       />
		<DO_ITEM Index="1345"   Name="DO_VaccumPumpBothOn"                                      BufferOffset="1345"                                      Addr="D1084.1"                      Description="Vaccum1 Pump Both On"                       />
		<DO_ITEM Index="1346"   Name="DO_VaccumPumpAUCOn"                                      BufferOffset="1346"                                      Addr="D1084.2"                      Description="Vaccum1 Pump AUC On"                       />
		<DO_ITEM Index="1347"   Name="DO_VaccumPumpAGVOpen"                                      BufferOffset="1347"                                      Addr="D1084.3"                      Description="Vaccum1 Pump AGV Open"                       />
		<DO_ITEM Index="1348"   Name="DO_FurnaceUZoneHeatingEnable"                                      BufferOffset="1348"                                      Addr="D1084.4"                      Description="Furnace L zone heating enable"                       />
		<DO_ITEM Index="1349"   Name="DO_FurnaceCUZoneHeatingEnable"                                      BufferOffset="1349"                                      Addr="D1084.5"                      Description="Furnace CL zone heating enable"                       />
		<DO_ITEM Index="1350"   Name="DO_FurnaceCZoneHeatingEnable"                                      BufferOffset="1350"                                      Addr="D1084.6"                      Description="Furnace C zone heating enable"                       />
		<DO_ITEM Index="1351"   Name="DO_FurnaceCLZoneHeatingEnable"                                      BufferOffset="1351"                                      Addr="D1084.7"                      Description="Furnace CU zone heating enable"                       />
		<DO_ITEM Index="1352"   Name="DO_FurnaceLZoneHeatingEnable"                                      BufferOffset="1352"                                      Addr="D1084.8"                      Description="Furnace U zone heating enable"                       />
		<DO_ITEM Index="1353"   Name="DO_HPMValveOutStatus"                                      BufferOffset="1353"                                      Addr="D1084.9"                      Description="HPM Output"                       />
		<DO_ITEM Index="1354"   Name="DO_ForlineHeaterOn"                                      BufferOffset="1354"                                      Addr="D1084.10"                      Description="Foreline heater on"                       />
		<DO_ITEM Index="1356"   Name="DO_Vaccum2PumpBothOn"                                      BufferOffset="1356"                                      Addr="D1084.12"                      Description="Vaccum2 Pump Both On"                       />
		<DO_ITEM Index="1357"   Name="DO_Vaccum2PumpAUCOn"                                      BufferOffset="1357"                                      Addr="D1084.13"                      Description="Vaccum 2Pump AUC On"                       />
		<DO_ITEM Index="1358"   Name="DO_Vaccum2PumpAGVOpen"                                      BufferOffset="1358"                                      Addr="D1084.14"                      Description="Vaccum 2Pump AGV Open"                       />
		<DO_ITEM Index="1359"   Name="DO_DEPOSW"                                      BufferOffset="1359"                                      Addr="D1084.15"                      Description="DEPO SW"                       />

		<DO_ITEM Index="1408"   Name="DO_BoatRAxisDriverStart"                                      BufferOffset="1408"                                      Addr="D1088.0"                      Description="Boat R Axis driver start"                       />
		<DO_ITEM Index="1409"   Name="DO_BoatRAxisAlarmReset"                                      BufferOffset="1409"                                      Addr="D1088.1"                      Description="Boat R Axis alarm reset"                       />
		<DO_ITEM Index="1410"   Name="DO_BoatRAxisAllWindingsOff"                                      BufferOffset="1410"                                      Addr="D1088.2"                      Description="Boat R Axis all windings off"                       />
		<DO_ITEM Index="1411"   Name="DO_BoatRotationStepperDriverStop"                                      BufferOffset="1411"                                      Addr="D1088.3"                      Description="Boat rotation stepper driver stop"                       />
		<DO_ITEM Index="1412"   Name="DO_BoatRAxisDataSelectionM0"                                      BufferOffset="1412"                                      Addr="D1088.4"                      Description="Boat R Axisr data selection M0"                       />
		<DO_ITEM Index="1413"   Name="DO_BoatRAxisDataSelectionM1"                                      BufferOffset="1413"                                      Addr="D1088.5"                      Description="Boat R Axis data selection M1"                       />
		<DO_ITEM Index="1414"   Name="DO_BoatRAxisDataSelectionM2"                                      BufferOffset="1414"                                      Addr="D1088.6"                      Description="Boat R Axis data selection M2"                       />
		<DO_ITEM Index="1415"   Name="DO_BoatRAxisDataSelectionM3"                                      BufferOffset="1415"                                      Addr="D1088.7"                      Description="Boat R Axis data selection M3"                       />
		<DO_ITEM Index="1416"   Name="DO_BoatRAxisDataSelectionM4"                                      BufferOffset="1416"                                      Addr="D1088.8"                      Description="Boat R Axis data selection M4"                       />
		<DO_ITEM Index="1417"   Name="DO_BoatRAxisDataSelectionM5"                                      BufferOffset="1417"                                      Addr="D1088.9"                      Description="Boat R Axis data selection M5"                       />
		<DO_ITEM Index="1418"   Name="DO_BoatRAxisHomeOrPosPrerst"                                      BufferOffset="1418"                                      Addr="D1088.10"                      Description="Boat R Axis home or pos pre-rst"                       />
		<DO_ITEM Index="1419"   Name="DO_BoatRAxisForwardRun"                                      BufferOffset="1419"                                      Addr="D1088.11"                      Description="Boat R Axis forward run"                       />
		<DO_ITEM Index="1420"   Name="DO_BoatRAxisReverseRun"                                      BufferOffset="1420"                                      Addr="D1088.12"                      Description="Boat R Axis reverse run"                       />
		<DO_ITEM Index="1421"   Name="DO_TransferRoomLedLightBar"                                      BufferOffset="1421"                                      Addr="D1088.13"                      Description="Transfer room led light bar"                       />
		<DO_ITEM Index="1422"   Name="DO_ShutterOpen"                                      BufferOffset="1422"                                      Addr="D1088.14"                      Description="Furnace shutter Open"                       />
		<DO_ITEM Index="1423"   Name="DO_ShutterClose"                                      BufferOffset="1423"                                      Addr="D1088.15"                      Description="Furnace shutter Close"                       />

		<DO_ITEM Index="1424"   Name="DO_WaferRobotAlarmReset"                                      BufferOffset="1424"                                      Addr="D1089.0"                      Description="Wafer Robot Alarm Reset"                       />
		<DO_ITEM Index="1425"   Name="DO_WaferRobotActionHold"                                      BufferOffset="1425"                                      Addr="D1089.1"                      Description="Wafer Robot Action Hold"                       />
		<DO_ITEM Index="1426"   Name="DO_WaferRobotTPEnable"                                      BufferOffset="1426"                                      Addr="D1089.2"                      Description="Wafer Robot TP Enable"                       />
		<DO_ITEM Index="1427"   Name="DO_WaferRobotFIMS1Interlock"                                      BufferOffset="1427"                                      Addr="D1089.3"                      Description="Wafer Robot POD1 Interlock"                       />
		<DO_ITEM Index="1428"   Name="DO_WaferRobotFIMS2Interlock"                                      BufferOffset="1428"                                      Addr="D1089.4"                      Description="Wafer Robot POD2 Interlock"                       />
		<DO_ITEM Index="1429"   Name="DO_WaferRobotBoatRotaryInterlock"                                      BufferOffset="1429"                                      Addr="D1089.5"                      Description="Wafer Robot Boat Rotary Interlock"                       />
		<DO_ITEM Index="1430"   Name="DO_WaferRobotBoatBottomInterlock"                                      BufferOffset="1430"                                      Addr="D1089.6"                      Description="Wafer Robot Boat Bottom Interlock"                       />
		<DO_ITEM Index="1431"   Name="DO_FIMS1VaccumValveAction"                                      BufferOffset="1431"                                      Addr="D1089.7"                      Description="FIMS1 vaccum valve action VT801"                       />
		<DO_ITEM Index="1432"   Name="DO_FIMS2VaccumValveAction"                                      BufferOffset="1432"                                      Addr="D1089.8"                      Description="FIMS2 vaccum valve action VT802"                       />
		<DO_ITEM Index="1436"   Name="DO_SV61Open"                                      BufferOffset="1436"                                      Addr="D1089.12"                      Description="SV61 Open"                       />
		<DO_ITEM Index="1437"   Name="DO_SV62Open"                                      BufferOffset="1437"                                      Addr="D1089.13"                      Description="SV62 Open"                       />
		<DO_ITEM Index="1438"   Name="DO_SV63Open"                                      BufferOffset="1438"                                      Addr="D1089.14"                      Description="SV63 Open"                       />
		<DO_ITEM Index="1439"   Name="DO_SV64Open"                                      BufferOffset="1439"                                      Addr="D1089.15"                      Description="SV64 Open"                       />

		<DO_ITEM Index="1472"   Name="DO_MechaStopRed"                                      BufferOffset="1472"                                      Addr="D1092.0"                      Description="mecha stop red"                       />
		<DO_ITEM Index="1473"   Name="DO_MechaPause"                                      BufferOffset="1473"                                      Addr="D1092.1"                      Description="mecha pause"                       />
		<DO_ITEM Index="1474"   Name="DO_HandOffLeft"                                      BufferOffset="1474"                                      Addr="D1092.2"                      Description="hand off left"                       />
		<DO_ITEM Index="1475"   Name="DO_HandOffRight"                                      BufferOffset="1475"                                      Addr="D1092.3"                      Description="hand off right"                       />
		<DO_ITEM Index="1476"   Name="DO_TowerRed"                                      BufferOffset="1476"                                      Addr="D1092.4"                      Description="tower-red"                       />
		<DO_ITEM Index="1477"   Name="DO_TowerOrange"                                      BufferOffset="1477"                                      Addr="D1092.5"                      Description="tower-orange"                       />
		<DO_ITEM Index="1478"   Name="DO_TowerGreen"                                      BufferOffset="1478"                                      Addr="D1092.6"                      Description="tower-green"                       />
		<DO_ITEM Index="1479"   Name="DO_TowerBuzzle"                                      BufferOffset="1479"                                      Addr="D1092.7"                      Description="tower-buzzle"                       />
		<DO_ITEM Index="1480"   Name="DO_AGVDoorSwitchOpen"                                      BufferOffset="1480"                                      Addr="D1092.8"                      Description="AGV Door Switch On"                       />
		<DO_ITEM Index="1481"   Name="DO_AGVDoorSwitchClose"                                      BufferOffset="1481"                                      Addr="D1092.9"                      Description="AGV Door Switch Off"                       />
		<DO_ITEM Index="1482"   Name="DO_LP1FOUPClamp"                                      BufferOffset="1482"                                      Addr="D1092.10"                      Description="Load Port1 FOUP Clamp"                       />
		<DO_ITEM Index="1484"   Name="DO_FOUPRobotAlarmReset"                                      BufferOffset="1484"                                      Addr="D1092.12"                      Description="FOUP Robot Alarm Reset"                       />
		<DO_ITEM Index="1485"   Name="DO_FOUPRobotActionHold"                                      BufferOffset="1485"                                      Addr="D1092.13"                      Description="FOUP Robot Action Hold"                       />
		<DO_ITEM Index="1486"   Name="DO_FOUPRobotTPEnable"                                      BufferOffset="1486"                                      Addr="D1092.14"                      Description="FOUP Robot TP Enable"                       />
		<DO_ITEM Index="1487"   Name="DO_FOUPRobotBufferInterlock"                                      BufferOffset="1487"                                      Addr="D1092.15"                      Description="FOUP Robot BuffeInterlock"                       />

		<DO_ITEM Index="1488"   Name="DO_LP1FOUPPresence"                                      BufferOffset="1488"                                      Addr="D1093.0"                      Description="Load Port1 FOUP presence"                       />
		<DO_ITEM Index="1489"   Name="DO_LP1FOUPPlacement"                                      BufferOffset="1489"                                      Addr="D1093.1"                      Description="Load Port1 FOUP placement"                       />
		<DO_ITEM Index="1490"   Name="DO_LP1FOUPLoad"                                      BufferOffset="1490"                                      Addr="D1093.2"                      Description="Load Port1 FOUP load"                       />
		<DO_ITEM Index="1491"   Name="DO_LP1FOUPUnload"                                      BufferOffset="1491"                                      Addr="D1093.3"                      Description="Load Port1 FOUP unload"                       />
		<DO_ITEM Index="1492"   Name="DO_LP1FOUPManual"                                      BufferOffset="1492"                                      Addr="D1093.4"                      Description="Load Port1 FOUP manual"                       />
		<DO_ITEM Index="1493"   Name="DO_FOUPRobotFIMS1Interlock"                                      BufferOffset="1493"                                      Addr="D1093.5"                      Description="FOUP Robot FIMS1 Interlock"                       />
		<DO_ITEM Index="1494"   Name="DO_FOUPRobotFIMS2Interlock"                                      BufferOffset="1494"                                      Addr="D1093.6"                      Description="FOUP Robot FIMS2 Interlock"                       />
		<DO_ITEM Index="1496"   Name="DO_LP2FOUPPresence"                                      BufferOffset="1496"                                      Addr="D1093.8"                      Description="loadport 2 FOUP presence"                       />
		<DO_ITEM Index="1497"   Name="DO_LP2FOUPPlacement"                                      BufferOffset="1497"                                      Addr="D1093.9"                      Description="loadport 2 FOUP placement"                       />
		<DO_ITEM Index="1498"   Name="DO_LP2FOUPLoad"                                      BufferOffset="1498"                                      Addr="D1093.10"                      Description="loadport 2 FOUP load"                       />
		<DO_ITEM Index="1499"   Name="DO_LP2FOUPUnload"                                      BufferOffset="1499"                                      Addr="D1093.11"                      Description="loadport 2 FOUP unload"                       />
		<DO_ITEM Index="1500"   Name="DO_LP2FOUPManual"                                      BufferOffset="1500"                                      Addr="D1093.12"                      Description="loadport 2 FOUP manual"                       />
		<DO_ITEM Index="1501"   Name="DO_LP2FOUPClamp"                                      BufferOffset="1501"                                      Addr="D1093.13"                      Description="loadport 2 FOUP clamp"                       />
		<DO_ITEM Index="1504"   Name="DO_loadport1E84REQ"                                      BufferOffset="1504"                                      Addr="D1094.00"                      Description="loadport 1 E84 REQ"                       />
		<DO_ITEM Index="1505"   Name="DO_loadport1E84UREQ"                                      BufferOffset="1505"                                      Addr="D1094.01"                      Description="loadport 1 E84 UREQ"                       />
		<DO_ITEM Index="1506"   Name="DO_loadport1E84Ready"                                      BufferOffset="1507"                                      Addr="D1094.03"                      Description="loadport 1 E84 ready"                       />
		<DO_ITEM Index="1510"   Name="DO_loadport1E84HOAVBL"                                      BufferOffset="1510"                                      Addr="D1094.06"                      Description="loadport 1 E84 HO_AVBL"                       />
		<DO_ITEM Index="1511"   Name="DO_loadport1E84ES"                                      BufferOffset="1511"                                      Addr="D1094.07"                      Description="loadport 1 E84 ES"                       />
		<DO_ITEM Index="1512"   Name="DO_loadport2E84REQ"                                      BufferOffset="1512"                                      Addr="D1094.08"                      Description="loadport 2 E84 REQ"                       />
		<DO_ITEM Index="1513"   Name="DO_loadport2E84UREQ"                                      BufferOffset="1513"                                      Addr="D1094.09"                      Description="loadport 2 E84 UREQ"                       />
		<DO_ITEM Index="1515"   Name="DO_loadport2E84Ready"                                      BufferOffset="1515"                                      Addr="D1094.11"                      Description="loadport 2 E84 ready"                       />
		<DO_ITEM Index="1518"   Name="DO_loadport2E84HOAVBL"                                      BufferOffset="1518"                                      Addr="D1094.14"                      Description="loadport 2 E84 HO_AVBL"                       />
		<DO_ITEM Index="1519"   Name="DO_loadport2E84ES"                                      BufferOffset="1519"                                      Addr="D1094.15"                      Description="loadport 2 E84 ES"                       />

		<DO_ITEM Index="1616"   Name="DO_FORELINEHEATERON/OFF"                                      BufferOffset="1616"                                      Addr="D1101.0"                      Description="FORELINE HEATER ON/OFF"                       />
		<DO_ITEM Index="1620"   Name="DO_EXTERNALBMOOUT"                                      BufferOffset="1620"                                      Addr="D1101.4"                      Description="EXTERNAL EMO OUT"                       />
		<DO_ITEM Index="1621"   Name="DO_AUTOREFILL1REQUESTOrVALVEOPEN"                                      BufferOffset="1621"                                      Addr="D1101.5"                      Description="AUTOREFILL-1 REQUEST Or VALVE OPEN"                       />
		<DO_ITEM Index="1623"   Name="DO_ALTOREFILL2REQUESTOrVALVEOPEN"                                      BufferOffset="1623"                                      Addr="D1101.7"                      Description="ALTOREFILL-2 REQUEST Or VALVE OPEN"                       />
		<DO_ITEM Index="2241"   Name="DO_BoatRAxisHomeCmd"                                      BufferOffset="2241"                                      Addr="D1140.1"                      Description="Boat Rotation Axis Home Cmd"                       />
		<DO_ITEM Index="2242"   Name="DO_BoatRAxisRotationCmd"                                      BufferOffset="2242"                                      Addr="D1140.2"                      Description="Boat Rotation Axis Rotation Cmd"                       />
		<DO_ITEM Index="2243"   Name="DO_BoatRAxisResetCmd"                                      BufferOffset="2243"                                      Addr="D1140.3"                      Description="Boat R Axis Reset Cmd"                       />
		<DO_ITEM Index="2244"   Name="DO_BoatRAxisRotationForward"                                      BufferOffset="2244"                                      Addr="D1140.4"                      Description="Boat R Axis CW cmd"                       />
		<DO_ITEM Index="2245"   Name="DO_BoatRAxisRotationReverse"                                      BufferOffset="2245"                                      Addr="D1140.5"                      Description="Boat R Axis CCW cmd"                       />
		<DO_ITEM Index="2246"   Name="DO_BoatRAxisM0"                                      BufferOffset="2246"                                      Addr="D1140.6"                      Description="Boat Rotation Axis Rotation M0"                       />
		<DO_ITEM Index="2247"   Name="DO_BoatRAxisM1"                                      BufferOffset="2247"                                      Addr="D1140.7"                      Description="Boat Rotation Axis Rotation M1"                       />
		<DO_ITEM Index="2248"   Name="DO_BoatRAxisM2"                                      BufferOffset="2248"                                      Addr="D1140.8"                      Description="Boat Rotation Axis Rotation M2"                       />
		<DO_ITEM Index="2249"   Name="DO_BoatRAxisM3"                                      BufferOffset="2249"                                      Addr="D1140.9"                      Description="Boat Rotation Axis Rotation M3"                       />
		<DO_ITEM Index="2250"   Name="DO_BoatRAxisM4"                                      BufferOffset="2250"                                      Addr="D1140.10"                      Description="Boat Rotation Axis Rotation M4"                       />
		<DO_ITEM Index="2251"   Name="DO_BoatRAxisM5"                                      BufferOffset="2251"                                      Addr="D1140.11"                      Description="Boat Rotation Axis Rotation M5"                       />
		<DO_ITEM Index="2252"   Name="DO_BoatRAxisStop"                                      BufferOffset="2252"                                      Addr="D1140.12"                      Description="Boat Rotation Axis Stop"                       />
		<DO_ITEM Index="2256"   Name="DO_ServoOnBufferAxis"                                      BufferOffset="2256"                                      Addr="D1141.0"                      Description="Servo On Buffer Axis"                       />
		<DO_ITEM Index="2257"   Name="DO_MoveCommandBufferAxis"                                      BufferOffset="2257"                                      Addr="D1141.1"                      Description="Move Command Buffer Axis"                       />
		<DO_ITEM Index="2260"   Name="DO_StopBufferAxis"                                      BufferOffset="2260"                                      Addr="D1141.4"                      Description="Stop Buffer Axis"                       />
		<DO_ITEM Index="2261"   Name="DO_ResetBufferAxis"                                      BufferOffset="2261"                                      Addr="D1141.5"                      Description="Reset Buffer Axis"                       />
		<DO_ITEM Index="2272"   Name="DO_MoveEnableBoatZAxis"                                      BufferOffset="2272"                                      Addr="D1142.0"                      Description="Move Enable Boat Z Axis"                       />
		<DO_ITEM Index="2276"   Name="DO_StopBoatZAxis"                                      BufferOffset="2276"                                      Addr="D1142.4"                      Description="Stop Boat Z Axis"                       />
		<DO_ITEM Index="2277"   Name="DO_ResetBoatZAxis"                                      BufferOffset="2277"                                      Addr="D1142.5"                      Description="Reset Boat Z Axis"                       />
		<DO_ITEM Index="2278"   Name="DO_ServoOnBoatZAxis"                                      BufferOffset="2278"                                      Addr="D1142.6"                      Description="ServoOn Boat Z Axis"                       />
		<DO_ITEM Index="2400"   Name="DO_ValveAV9"                                      BufferOffset="2400"                                      Addr="D1150.0"                      Description="AV9"                       />
		<DO_ITEM Index="2401"   Name="DO_ValveAV13"                                      BufferOffset="2401"                                      Addr="D1150.1"                      Description="AV13"                       />
		<DO_ITEM Index="2402"   Name="DO_ValveAV17"                                      BufferOffset="2402"                                      Addr="D1150.2"                      Description="AV17"                       />
		<DO_ITEM Index="2403"   Name="DO_ValveAV21"                                      BufferOffset="2403"                                      Addr="D1150.3"                      Description="AV21"                       />
		<DO_ITEM Index="2404"   Name="DO_ValveAV28"                                      BufferOffset="2404"                                      Addr="D1150.4"                      Description="AV28"                       />
		<DO_ITEM Index="2405"   Name="DO_ValveAV32"                                      BufferOffset="2405"                                      Addr="D1150.5"                      Description="AV32"                       />
		<DO_ITEM Index="2406"   Name="DO_ValveAV36"                                      BufferOffset="2406"                                      Addr="D1150.6"                      Description="AV36"                       />
		<DO_ITEM Index="2464"   Name="DO_ValveAV1"                                      BufferOffset="2464"                                      Addr="D1154.0"                      Description="AV1"                       />
		<DO_ITEM Index="2465"   Name="DO_ValveAV2"                                      BufferOffset="2465"                                      Addr="D1154.1"                      Description="AV2"                       />
		<DO_ITEM Index="2466"   Name="DO_ValveAV3"                                      BufferOffset="2466"                                      Addr="D1154.2"                      Description="AV3"                       />
		<DO_ITEM Index="2467"   Name="DO_ValveAV4"                                      BufferOffset="2467"                                      Addr="D1154.3"                      Description="AV4"                       />
		<DO_ITEM Index="2468"   Name="DO_ValveAV5"                                      BufferOffset="2468"                                      Addr="D1154.4"                      Description="AV5"                       />
		<DO_ITEM Index="2469"   Name="DO_ValveAV6"                                      BufferOffset="2469"                                      Addr="D1154.5"                      Description="AV6"                       />
		<DO_ITEM Index="2470"   Name="DO_ValveAV7"                                      BufferOffset="2470"                                      Addr="D1154.6"                      Description="AV7"                       />
		<DO_ITEM Index="2471"   Name="DO_ValveAV8"                                      BufferOffset="2471"                                      Addr="D1154.7"                      Description="AV8"                       />
		<DO_ITEM Index="2480"   Name="DO_ValveAV33"                                      BufferOffset="2480"                                      Addr="D1155.0"                      Description="AV33"                       />
		<DO_ITEM Index="2481"   Name="DO_ValveAV10"                                      BufferOffset="2481"                                      Addr="D1155.1"                      Description="AV10"                       />
		<DO_ITEM Index="2482"   Name="DO_ValveAV11"                                      BufferOffset="2482"                                      Addr="D1155.2"                      Description="AV11"                       />
		<DO_ITEM Index="2483"   Name="DO_ValveAV12"                                      BufferOffset="2483"                                      Addr="D1155.3"                      Description="AV12"                       />
		<DO_ITEM Index="2484"   Name="DO_ValveAV34"                                      BufferOffset="2484"                                      Addr="D1155.4"                      Description="AV34"                       />
		<DO_ITEM Index="2485"   Name="DO_ValveAV14"                                      BufferOffset="2485"                                      Addr="D1155.5"                      Description="AV14"                       />
		<DO_ITEM Index="2486"   Name="DO_ValveAV15"                                      BufferOffset="2486"                                      Addr="D1155.6"                      Description="AV15"                       />
		<DO_ITEM Index="2487"   Name="DO_ValveAV16"                                      BufferOffset="2487"                                      Addr="D1155.7"                      Description="AV16"                       />
		<DO_ITEM Index="2496"   Name="DO_ValveAV35"                                      BufferOffset="2496"                                      Addr="D1156.0"                      Description="AV35"                       />
		<DO_ITEM Index="2497"   Name="DO_ValveAV18"                                      BufferOffset="2497"                                      Addr="D1156.1"                      Description="AV18"                       />
		<DO_ITEM Index="2498"   Name="DO_ValveAV19"                                      BufferOffset="2498"                                      Addr="D1156.2"                      Description="AV19"                       />
		<DO_ITEM Index="2499"   Name="DO_ValveAV20"                                      BufferOffset="2499"                                      Addr="D1156.3"                      Description="AV20"                       />
		<DO_ITEM Index="2500"   Name="DO_ValveAV37"                                      BufferOffset="2500"                                      Addr="D1156.4"                      Description="AV37"                       />
		<DO_ITEM Index="2501"   Name="DO_ValveAV22"                                      BufferOffset="2501"                                      Addr="D1156.5"                      Description="AV22"                       />
		<DO_ITEM Index="2502"   Name="DO_ValveAV23"                                      BufferOffset="2502"                                      Addr="D1156.6"                      Description="AV23"                       />
		<DO_ITEM Index="2503"   Name="DO_ValveAV24"                                      BufferOffset="2503"                                      Addr="D1156.7"                      Description="AV24"                       />
		<DO_ITEM Index="2512"   Name="DO_ValveAV25"                                      BufferOffset="2512"                                      Addr="D1157.0"                      Description="AV25"                       />
		<DO_ITEM Index="2513"   Name="DO_ValveAV26"                                      BufferOffset="2513"                                      Addr="D1157.1"                      Description="AV26"                       />
		<DO_ITEM Index="2514"   Name="DO_ValveAV27"                                      BufferOffset="2514"                                      Addr="D1157.2"                      Description="AV27"                       />
		<DO_ITEM Index="2515"   Name="DO_ValveAV38"                                      BufferOffset="2515"                                      Addr="D1157.3"                      Description="AV38"                       />
		<DO_ITEM Index="2516"   Name="DO_ValveAV29"                                      BufferOffset="2516"                                      Addr="D1157.4"                      Description="AV29"                       />
		<DO_ITEM Index="2517"   Name="DO_ValveAV30"                                      BufferOffset="2517"                                      Addr="D1157.5"                      Description="AV30"                       />
		<DO_ITEM Index="2518"   Name="DO_ValveAV31"                                      BufferOffset="2518"                                      Addr="D1157.6"                      Description="AV31"                       />
		<DO_ITEM Index="2519"   Name="DO_ValveAV39"                                      BufferOffset="2519"                                      Addr="D1157.7"                      Description="AV39"                       />
		<DO_ITEM Index="2528"   Name="DO_ValveAV99"                                      BufferOffset="2528"                                      Addr="D1158.0"                      Description="AV99"                       />
		<DO_ITEM Index="2530"   Name="DO_ValveAV101"                                      BufferOffset="2530"                                      Addr="D1158.2"                      Description="AV101"                       />
		<DO_ITEM Index="2531"   Name="DO_ValveAV102"                                      BufferOffset="2531"                                      Addr="D1158.3"                      Description="AV102"                       />
		<DO_ITEM Index="2532"   Name="DO_ValveAV103"                                      BufferOffset="2532"                                      Addr="D1158.4"                      Description="AV103"                       />
		<DO_ITEM Index="2533"   Name="DO_ValveAV104"                                      BufferOffset="2533"                                      Addr="D1158.5"                      Description="AV104"                       />
		<DO_ITEM Index="2534"   Name="DO_ValveAV105"                                      BufferOffset="2534"                                      Addr="D1158.6"                      Description="AV105"                       />
		<DO_ITEM Index="2535"   Name="DO_ValveAV106"                                      BufferOffset="2535"                                      Addr="D1158.7"                      Description="AV106"                       />
		<DO_ITEM Index="2544"   Name="DO_ValveAV107"                                      BufferOffset="2544"                                      Addr="D1159.0"                      Description="AV107"                       />
		<DO_ITEM Index="2545"   Name="DO_ValveAV108"                                      BufferOffset="2545"                                      Addr="D1159.1"                      Description="AV108"                       />
		<DO_ITEM Index="2547"   Name="DO_ValveAV110"                                      BufferOffset="2547"                                      Addr="D1159.3"                      Description="AV110"                       />
		<DO_ITEM Index="2548"   Name="DO_ValveAV111"                                      BufferOffset="2548"                                      Addr="D1159.4"                      Description="AV111"                       />
		<DO_ITEM Index="2549"   Name="DO_ValveAV112"                                      BufferOffset="2549"                                      Addr="D1159.5"                      Description="AV112"                       />
		<DO_ITEM Index="2550"   Name="DO_ValveAV113"                                      BufferOffset="2550"                                      Addr="D1159.6"                      Description="AV113"                       />
		<DO_ITEM Index="2551"   Name="DO_ValveAV114"                                      BufferOffset="2551"                                      Addr="D1159.7"                      Description="AV114"                       />
		<DO_ITEM Index="2560"   Name="DO_ValveAV115"                                      BufferOffset="2560"                                      Addr="D1160.0"                      Description="AV115"                       />
		<DO_ITEM Index="2561"   Name="DO_ValveAV116"                                      BufferOffset="2561"                                      Addr="D1160.1"                      Description="AV116"                       />
		<DO_ITEM Index="2562"   Name="DO_ValveAV117"                                      BufferOffset="2562"                                      Addr="D1160.2"                      Description="AV117"                       />
		<DO_ITEM Index="2563"   Name="DO_ValveAV118"                                      BufferOffset="2563"                                      Addr="D1160.3"                      Description="AV118"                       />
		<DO_ITEM Index="2564"   Name="DO_ValveAV119"                                      BufferOffset="2564"                                      Addr="D1160.4"                      Description="AV119"                       />
		<DO_ITEM Index="2565"   Name="DO_ValveAV120"                                      BufferOffset="2565"                                      Addr="D1160.5"                      Description="AV120"                       />
		<DO_ITEM Index="2566"   Name="DO_ValveAV121"                                      BufferOffset="2566"                                      Addr="D1160.6"                      Description="AV121"                       />
		<DO_ITEM Index="2567"   Name="DO_ValveAV122"                                      BufferOffset="2567"                                      Addr="D1160.7"                      Description="AV122"                       />
		<DO_ITEM Index="2576"   Name="DO_ValveAV123"                                      BufferOffset="2576"                                      Addr="D1161.0"                      Description="AV123"                       />
		<DO_ITEM Index="2577"   Name="DO_ValveAV124"                                      BufferOffset="2577"                                      Addr="D1161.1"                      Description="AV124"                       />
		<DO_ITEM Index="2578"   Name="DO_ValveAV125"                                      BufferOffset="2578"                                      Addr="D1161.2"                      Description="AV125"                       />
		<DO_ITEM Index="2579"   Name="DO_ValveAV131"                                      BufferOffset="2579"                                      Addr="D1161.3"                      Description="AV131"                       />
		<DO_ITEM Index="2580"   Name="DO_ValveAV134"                                      BufferOffset="2580"                                      Addr="D1161.4"                      Description="AV134"                       />
		<DO_ITEM Index="2581"   Name="DO_ValveAV133"                                      BufferOffset="2581"                                      Addr="D1161.5"                      Description="AV133"                       />
		<DO_ITEM Index="2582"   Name="DO_ValveAV136"                                      BufferOffset="2582"                                      Addr="D1161.6"                      Description="AV136"                       />
		<DO_ITEM Index="2592"   Name="DO_CommonBoxPressureRegulatingCylinderValveOpen"                                      BufferOffset="2592"                                      Addr="D1162.0"                      Description="AV201 open(Common box)"                       />
		<DO_ITEM Index="2593"   Name="DO_CommonBoxPressureRegulatingCylinderValveClose"                                      BufferOffset="2593"                                      Addr="D1162.1"                      Description="AV201 close(Common box)"                       />
		<DO_ITEM Index="2594"   Name="DO_FFUAirInValveClose"                                      BufferOffset="2594"                                      Addr="D1162.2"                      Description="AV65 close（FFU air）"                       />
		<DO_ITEM Index="2595"   Name="DO_FFUAirInValveOpen"                                      BufferOffset="2595"                                      Addr="D1162.3"                      Description="AV65 open(FFU air)"                       />
		<DO_ITEM Index="2596"   Name="DO_LABacksideDoorCylinderControlValveOpen"                                      BufferOffset="2596"                                      Addr="D1162.4"                      Description="AV202 open(LA backside door cylinder control)"                       />
		<DO_ITEM Index="2597"   Name="DO_LABacksideDoorCylinderControlValveClose"                                      BufferOffset="2597"                                      Addr="D1162.5"                      Description="AV202 close(LA backside door cylinder control)"                       />
		<DO_ITEM Index="2598"   Name="DO_LAExhaustValveOpen"                                      BufferOffset="2598"                                      Addr="D1162.6"                      Description="AV66 Open(LA exhaust damper)"                       />
		<DO_ITEM Index="2599"   Name="DO_LAExhaustValveClose"                                      BufferOffset="2599"                                      Addr="D1162.7"                      Description="AV66 Clone(LA exhaust damper)"                       />
		<DO_ITEM Index="2612"   Name="DO_circulationfanisturnedopen"                                      BufferOffset="2612"                                      Addr="D1163.4"                      Description="AV227 open"                       />
		<DO_ITEM Index="2613"   Name="DO_circulationfanisturnedClose"                                      BufferOffset="2613"                                      Addr="D1163.5"                      Description="AV227 close"                       />
		<DO_ITEM Index="2614"   Name="DO_MS501"                                      BufferOffset="2614"                                      Addr="D1163.6"                      Description="MS501"                       />
		<DO_ITEM Index="2615"   Name="DO_MS520"                                      BufferOffset="2615"                                      Addr="D1163.7"                      Description="MS520"                       />
		<DO_ITEM Index="2616"   Name="DO_MS521"                                      BufferOffset="2616"                                      Addr="D1163.8"                      Description="MS521"                       />
		<DO_ITEM Index="2617"   Name="DO_MS522"                                      BufferOffset="2617"                                      Addr="D1163.9"                      Description="MS522"                       />
		<DO_ITEM Index="2656"   Name="DO_ValveAV60"                                      BufferOffset="2656"                                      Addr="D1166.0"                      Description="AV60"                       />
		<DO_ITEM Index="2657"   Name="DO_ValveAV68"                                      BufferOffset="2657"                                      Addr="D1166.1"                      Description="AV68"                       />
		<DO_ITEM Index="2658"   Name="DO_ValveAV72"                                      BufferOffset="2658"                                      Addr="D1166.2"                      Description="AV72"                       />
		<DO_ITEM Index="2660"   Name="DO_ValveAV74"                                      BufferOffset="2660"                                      Addr="D1166.4"                      Description="AV74"                       />
		<DO_ITEM Index="2661"   Name="DO_ValveAV75"                                      BufferOffset="2661"                                      Addr="D1166.5"                      Description="AV75"                       />
		<DO_ITEM Index="2662"   Name="DO_ValveAV77"                                      BufferOffset="2662"                                      Addr="D1166.6"                      Description="AV77"                       />
		<DO_ITEM Index="2663"   Name="DO_ValveAV78"                                      BufferOffset="2663"                                      Addr="D1166.7"                      Description="AV78"                       />
		<DO_ITEM Index="2672"   Name="DO_ValveAV80"                                      BufferOffset="2672"                                      Addr="D1167.0"                      Description="AV80"                       />
		<DO_ITEM Index="2673"   Name="DO_ValveAV81"                                      BufferOffset="2673"                                      Addr="D1167.1"                      Description="AV81"                       />
		<DO_ITEM Index="2674"   Name="DO_ValveAV85"                                      BufferOffset="2674"                                      Addr="D1167.2"                      Description="AV85"                       />
		<DO_ITEM Index="2675"   Name="DO_ValveAV86"                                      BufferOffset="2675"                                      Addr="D1167.3"                      Description="AV86"                       />
		<DO_ITEM Index="2676"   Name="DO_ValveAV87"                                      BufferOffset="2676"                                      Addr="D1167.4"                      Description="AV87"                       />
		<DO_ITEM Index="2677"   Name="DO_ValveAV88"                                      BufferOffset="2677"                                      Addr="D1167.5"                      Description="AV88"                       />
		<DO_ITEM Index="2678"   Name="DO_ValveAV91"                                      BufferOffset="2678"                                      Addr="D1167.6"                      Description="AV91"                       />
		<DO_ITEM Index="2679"   Name="DO_ValveAV92"                                      BufferOffset="2679"                                      Addr="D1167.7"                      Description="AV92"                       />
		<DO_ITEM Index="2688"   Name="DO_ValveAV71"                                      BufferOffset="2688"                                      Addr="D1168.0"                      Description="AV71"                       />
		<DO_ITEM Index="2690"   Name="DO_ValveAV82"                                      BufferOffset="2690"                                      Addr="D1168.2"                      Description="AV82"                       />
		<DO_ITEM Index="2691"   Name="DO_ValveAV83"                                      BufferOffset="2691"                                      Addr="D1168.3"                      Description="AV83"                       />
		<DO_ITEM Index="2692"   Name="DO_ValveAV93"                                      BufferOffset="2692"                                      Addr="D1168.4"                      Description="AV93"                       />
		<DO_ITEM Index="2720"   Name="DO_ValveAV54"                                      BufferOffset="2720"                                      Addr="D1170.0"                      Description="AV54"                       />
		<DO_ITEM Index="2721"   Name="DO_ValveAV55"                                      BufferOffset="2721"                                      Addr="D1170.1"                      Description="AV55"                       />
		<DO_ITEM Index="2722"   Name="DO_ValveAV56"                                      BufferOffset="2722"                                      Addr="D1170.2"                      Description="AV56"                       />
		<DO_ITEM Index="2723"   Name="DO_ValveAV57"                                      BufferOffset="2723"                                      Addr="D1170.3"                      Description="AV57"                       />
		<DO_ITEM Index="2724"   Name="DO_ValveAV58"                                      BufferOffset="2724"                                      Addr="D1170.4"                      Description="AV58"                       />
		<DO_ITEM Index="2725"   Name="DO_ValveAV59"                                      BufferOffset="2725"                                      Addr="D1170.5"                      Description="AV59"                       />
		<DO_ITEM Index="2784"   Name="DO_FIMS1N2PurgeValveOpen"                                      BufferOffset="2784"                                      Addr="D1174.0"                      Description="AV63 opne(FIMS1 N2 Purge Valve)"                       />
		<DO_ITEM Index="2785"   Name="DO_FIMS1N2PurgeValveClose"                                      BufferOffset="2785"                                      Addr="D1174.1"                      Description="AV63 close(FIMS1 N2 Purge Valve)"                       />
		<DO_ITEM Index="2786"   Name="DO_FIMS2N2PurgeValveOpen"                                      BufferOffset="2786"                                      Addr="D1174.2"                      Description="AV64 opne(FIMS2 N2 Purge Valve)"                       />
		<DO_ITEM Index="2787"   Name="DO_FIMS2N2PurgeValveClose"                                      BufferOffset="2787"                                      Addr="D1174.3"                      Description="AV65 close(FIMS2 N2 Purge Valve)"                       />
		<DO_ITEM Index="2912"   Name="DO_FIMS1VaccumValveOpen"                                      BufferOffset="2912"                                      Addr="D1182.0"                      Description="FIMS1 AV217-A (vacuum pumping)"                       />
		<DO_ITEM Index="2913"   Name="DO_FIMS1VaccumValveClose"                                      BufferOffset="2913"                                      Addr="D1182.1"                      Description="FIMS1 AV217-B (Breaking the vacuum)"                       />
		<DO_ITEM Index="2914"   Name="DO_FIMS2VaccumValveOpen"                                      BufferOffset="2914"                                      Addr="D1182.2"                      Description="AV218 open(FIMS2 vaccum valve)"                       />
		<DO_ITEM Index="2915"   Name="DO_FIMS2VaccumValveClose"                                      BufferOffset="2915"                                      Addr="D1182.3"                      Description="AV218 close(FIMS2 vaccum valve)"                       />
		<DO_ITEM Index="2976"   Name="DO_FIMS1Latch1Off"                                      BufferOffset="2976"                                      Addr="D1186.0"                      Description="FIMS1 Latch1 Off"                       />
		<DO_ITEM Index="2977"   Name="DO_FIMS1Latch1On"                                      BufferOffset="2977"                                      Addr="D1186.1"                      Description="FIMS1 Latch1 On"                       />
		<DO_ITEM Index="2978"   Name="DO_FIMS1Latch2Off"                                      BufferOffset="2978"                                      Addr="D1186.2"                      Description="FIMS1 Latch2 Off"                       />
		<DO_ITEM Index="2979"   Name="DO_FIMS1Latch2On"                                      BufferOffset="2979"                                      Addr="D1186.3"                      Description="FIMS1 Latch2 On"                       />
		<DO_ITEM Index="2980"   Name="DO_FIMS2Latch1Off"                                      BufferOffset="2980"                                      Addr="D1186.4"                      Description="FIMS2 Latch1 Off"                       />
		<DO_ITEM Index="2981"   Name="DO_FIMS2Latch1On"                                      BufferOffset="2981"                                      Addr="D1186.5"                      Description="FIMS2 Latch1 On"                       />
		<DO_ITEM Index="2982"   Name="DO_FIMS2Latch2Off"                                      BufferOffset="2982"                                      Addr="D1186.6"                      Description="FIMS2 Latch2 Off"                       />
		<DO_ITEM Index="2983"   Name="DO_FIMS2Latch2On"                                      BufferOffset="2983"                                      Addr="D1186.7"                      Description="FIMS2 Latch2 On"                       />
		<DO_ITEM Index="2992"   Name="DO_FIMS1Seal"                                      BufferOffset="2992"                                      Addr="D1187.0"                      Description="FIMS1 Seal"                       />
		<DO_ITEM Index="2993"   Name="DO_FIMS1Release"                                      BufferOffset="2993"                                      Addr="D1187.1"                      Description="FIMS1 Release"                       />
		<DO_ITEM Index="2994"   Name="DO_FIMS2Seal"                                      BufferOffset="2994"                                      Addr="D1187.2"                      Description="FIMS2 Seal"                       />
		<DO_ITEM Index="2995"   Name="DO_FIMS2Release"                                      BufferOffset="2995"                                      Addr="D1187.3"                      Description="FIMS2 Release"                       />
		<DO_ITEM Index="2996"   Name="DO_FIMS1DoorClose"                                      BufferOffset="2996"                                      Addr="D1187.4"                      Description="FIMS1 Door Close"                       />
		<DO_ITEM Index="2997"   Name="DO_FIMS1DoorOpen"                                      BufferOffset="2997"                                      Addr="D1187.5"                      Description="FIMS1 Door Open"                       />
		<DO_ITEM Index="2998"   Name="DO_FIMS2DoorClose"                                      BufferOffset="2998"                                      Addr="D1187.6"                      Description="FIMS2 Door Close"                       />
		<DO_ITEM Index="2999"   Name="DO_FIMS2DoorOpen"                                      BufferOffset="2999"                                      Addr="D1187.7"                      Description="FIMS2 Door Open"                       />
		<DO_ITEM Index="3008"   Name="DO_FIMS1CollisionAvoidanceDown"                                      BufferOffset="3008"                                      Addr="D1188.0"                      Description="FIMS1 Collision Avoidance Down"                       />
		<DO_ITEM Index="3009"   Name="DO_FIMS1CollisionAvoidanceUp"                                      BufferOffset="3009"                                      Addr="D1188.1"                      Description="FIMS1 Collision Avoidance Up"                       />
		<DO_ITEM Index="3010"   Name="DO_FIMS2CollisionAvoidanceDown"                                      BufferOffset="3010"                                      Addr="D1188.2"                      Description="FIMS2 Collision Avoidance Down"                       />
		<DO_ITEM Index="3011"   Name="DO_FIMS2CollisionAvoidanceUp"                                      BufferOffset="3011"                                      Addr="D1188.3"                      Description="FIMS2 Collision Avoidance Up"                       />
		<DO_ITEM Index="3012"   Name="DO_FIMS1Undock"                                      BufferOffset="3012"                                      Addr="D1188.4"                      Description="FIMS1 Undock"                       />
		<DO_ITEM Index="3013"   Name="DO_FIMS1Dock"                                      BufferOffset="3013"                                      Addr="D1188.5"                      Description="FIMS1 Dock"                       />
		<DO_ITEM Index="3014"   Name="DO_FIMS2Undock"                                      BufferOffset="3014"                                      Addr="D1188.6"                      Description="FIMS2 Undock"                       />
		<DO_ITEM Index="3015"   Name="DO_FIMS2Dock"                                      BufferOffset="3015"                                      Addr="D1188.7"                      Description="FIMS2 Dock"                       />
		<DO_ITEM Index="3200"   Name="DO_HTR1"                                      BufferOffset="3200"                                      Addr="D1200.0"                      Description="HTR1"                       />
		<DO_ITEM Index="3201"   Name="DO_HTR2"                                      BufferOffset="3201"                                      Addr="D1200.1"                      Description="HTR2"                       />
		<DO_ITEM Index="3202"   Name="DO_HTR3"                                      BufferOffset="3202"                                      Addr="D1200.2"                      Description="HTR3"                       />
		<DO_ITEM Index="3203"   Name="DO_CLN"                                      BufferOffset="3203"                                      Addr="D1200.3"                      Description="CLN (F2 Clean button)"                       />
		<DO_ITEM Index="3776"   Name="DO_FIMS1LoadCommand"                                      BufferOffset="3776"                                      Addr="D1236.0"                      Description="FIMS1 Load Command"                       />
		<DO_ITEM Index="3777"   Name="DO_FIMS1UnloadCommand"                                      BufferOffset="3777"                                      Addr="D1236.1"                      Description="FIMS1 Unload Command"                       />
		<DO_ITEM Index="3778"   Name="DO_FIMS1HomeCommand"                                      BufferOffset="3778"                                      Addr="D1236.2"                      Description="FIMS1 Home Command"                       />
		<DO_ITEM Index="3779"   Name="DO_FIMS1AlarmReset"                                      BufferOffset="3779"                                      Addr="D1236.3"                      Description="FIMS1 Alarm Reset"                       />
		<DO_ITEM Index="3780"   Name="DO_FIMS1StopCommand"                                      BufferOffset="3780"                                      Addr="D1236.4"                      Description="FIMS1 Stop Command"                       />
		<DO_ITEM Index="3781"   Name="DO_FIMS1N2PurgeBypass"                                      BufferOffset="3781"                                      Addr="D1236.5"                      Description="FIMS1 N2 Purge Bypass"                       />
		<DO_ITEM Index="3792"   Name="DO_FIMS2LoadCommand"                                      BufferOffset="3792"                                      Addr="D1237.0"                      Description="FIMS2 Load Command"                       />
		<DO_ITEM Index="3793"   Name="DO_FIMS2UnloadCommand"                                      BufferOffset="3793"                                      Addr="D1237.1"                      Description="FIMS2 Unload Command"                       />
		<DO_ITEM Index="3794"   Name="DO_FIMS2HomeCommand"                                      BufferOffset="3794"                                      Addr="D1237.2"                      Description="FIMS2 Home Command"                       />
		<DO_ITEM Index="3795"   Name="DO_FIMS2AlarmReset"                                      BufferOffset="3795"                                      Addr="D1237.3"                      Description="FIMS2 Alarm Reset"                       />
		<DO_ITEM Index="3796"   Name="DO_FIMS2StopCommand"                                      BufferOffset="3796"                                      Addr="D1237.4"                      Description="FIMS2 Stop Command"                       />
		<DO_ITEM Index="3797"   Name="DO_FIMS2N2PurgeBypass"                                      BufferOffset="3797"                                      Addr="D1237.5"                      Description="FIMS2 N2 Purge Bypass"                       />
		<DO_ITEM Index="3840"   Name="DO_PLCCPUReset"                                      BufferOffset="3840"                                      Addr="D1240.0"                      Description="PLC CPU Reset"                       />
		<DO_ITEM Index="3841"   Name="DO_BlowerPowerOn"                                      BufferOffset="3841"                                      Addr="D1240.1"                      Description="Blower power on/off"                       />
		<DO_ITEM Index="3842"   Name="DO_LightCurtainBypass"                                      BufferOffset="3842"                                      Addr="D1240.2"                      Description="Light curtain bypass"                       />
		<DO_ITEM Index="3843"   Name="DO_FFUAlarmReset"                                      BufferOffset="3843"                                      Addr="D1240.3"                      Description="FFU Alarm Reset"                       />
		<DO_ITEM Index="3844"   Name="DO_MINI8AlarmReset"                                      BufferOffset="3844"                                      Addr="D1240.4"                      Description="MINI 8 Alarm Reset"                       />
		<DO_ITEM Index="3845"   Name="DO_VGUnitConversion"                                      BufferOffset="3845"                                      Addr="D1240.5"                      Description="VG Unit Conversion 0:Torr,1:Pa"                       />
		<DO_ITEM Index="3846"   Name="DO_CleanSwitch"                                      BufferOffset="3846"                                      Addr="D1240.6"                      Description="Clean Switch"                       />
		<DO_ITEM Index="3847"   Name="DO_APCAoDataReadSysConfig"                                      BufferOffset="3847"                                      Addr="D1240.7"                      Description="APC AO DATA READ SYSCONFIG"                       />
		<DO_ITEM Index="3848"   Name="DO_APCAoDataWriteSysConfig"                                      BufferOffset="3848"                                      Addr="D1240.8"                      Description="APC AO DATA WRITE SYSCONFIG"                       />
		<DO_ITEM Index="3849"   Name="DO_APCAoDataReadCusConfig"                                      BufferOffset="3849"                                      Addr="D1240.9"                      Description="APC DATA READ_CUSCONFIG"                       />
		<DO_ITEM Index="3850"   Name="DO_APCAoDataWriteCusConfig"                                      BufferOffset="3850"                                      Addr="D1240.10"                      Description="APC DATA WRITE_CUSCONFIG"                       />
		<DO_ITEM Index="3851"   Name="DO_GasLineHeaterTempalarm"                                      BufferOffset="3851"                                      Addr="D1240.11"                      Description="Gas Line Heater Temp alarm"                       />
		<DO_ITEM Index="3852"   Name="DO_ExhaustLineHeaterTempalarm"                                      BufferOffset="3852"                                      Addr="D1240.12"                      Description="Exhaust Line Heater  Temp alarm"                       />
		<DO_ITEM Index="3853"   Name="DO_Abnormalsealcapheatertemp"                                      BufferOffset="3853"                                      Addr="D1240.13"                      Description="Abnormal seal cap heater temp"                       />
		<DO_ITEM Index="3854"   Name="DO_exhaustlineheatertemp"                                      BufferOffset="3854"                                      Addr="D1240.14"                      Description="Exhaust line heater temp"                       />
		<DO_ITEM Index="3856"   Name="DO_HMNT"                                      BufferOffset="3856"                                      Addr="D1241.0"                      Description="H MNT"                       />
		<DO_ITEM Index="3857"   Name="DO_CMNT"                                      BufferOffset="3857"                                      Addr="D1241.1"                      Description="C MNT"                       />
		<DO_ITEM Index="3858"   Name="DO_DP1"                                      BufferOffset="3858"                                      Addr="D1241.2"                      Description="DP1"                       />
		<DO_ITEM Index="3859"   Name="DO_DP2"                                      BufferOffset="3859"                                      Addr="D1241.3"                      Description="DP2"                       />
		<DO_ITEM Index="3860"   Name="DO_BWR"                                      BufferOffset="3860"                                      Addr="D1241.4"                      Description="BWR"                       />
		<DO_ITEM Index="3861"   Name="DO_DPR"                                      BufferOffset="3861"                                      Addr="D1241.5"                      Description="DPR"                       />
		<DO_ITEM Index="3865"   Name="DO_HZERO"                                      BufferOffset="3865"                                      Addr="D1241.9"                      Description="H.ZERO"                       />
		<DO_ITEM Index="3866"   Name="DO_CZERO"                                      BufferOffset="3866"                                      Addr="D1241.10"                      Description="C.ZERO"                       />
		<DO_ITEM Index="3867"   Name="DO_WAT"                                      BufferOffset="3867"                                      Addr="D1241.11"                      Description="WAT(NO)"                       />
		<DO_ITEM Index="3868"   Name="DO_CEXH"                                      BufferOffset="3868"                                      Addr="D1241.12"                      Description="C.EXH"                       />
		<DO_ITEM Index="3869"   Name="DO_NZERO"                                      BufferOffset="3869"                                      Addr="D1241.13"                      Description="N.ZERO"                       />
		<DO_ITEM Index="3870"   Name="DO_MZERO"                                      BufferOffset="3870"                                      Addr="D1241.14"                      Description="M.ZERO"                       />
		<DO_ITEM Index="3871"   Name="DO_NDIR"                                      BufferOffset="3871"                                      Addr="D1241.15"                      Description="NDIR"                       />

		<DO_ITEM Index="3872"   Name="DO_HMNTAV113"                                      BufferOffset="3872"                                      Addr="D1242.0"                      Description="HMNT_AV113"                       />
		<DO_ITEM Index="3873"   Name="DO_HMNTAV131"                                      BufferOffset="3873"                                      Addr="D1242.1"                      Description="HMNT_AV131"                       />
		<DO_ITEM Index="3874"   Name="DO_HMNTAV132"                                      BufferOffset="3874"                                      Addr="D1242.2"                      Description="HMNT_AV132"                       />
		<DO_ITEM Index="3875"   Name="DO_CMNTAV121"                                      BufferOffset="3875"                                      Addr="D1242.3"                      Description="CMNT_AV121"                       />
		<DO_ITEM Index="3876"   Name="DO_CMNTAV134"                                      BufferOffset="3876"                                      Addr="D1242.4"                      Description="CMNT_AV134"                       />
		<DO_ITEM Index="3877"   Name="DO_CMNTAV135"                                      BufferOffset="3877"                                      Addr="D1242.5"                      Description="CMNT_AV135"                       />
		<DO_ITEM Index="3878"   Name="DO_GASTempOutRangeAlarm"                                      BufferOffset="3878"                                      Addr="D1242.6"                      Description="GAS Temp out range alarm"                       />
		<DO_ITEM Index="3879"   Name="DO_EXHAUSTTempOutRangeAlarm"                                      BufferOffset="3879"                                      Addr="D1242.7"                      Description="EXHAUST Temp out range alarm"                       />
		<DO_ITEM Index="3880"   Name="DO_MCLNAlarm"                                      BufferOffset="3880"                                      Addr="D1242.8"                      Description="CLN alarm"                       />
		<DO_ITEM Index="4000"   Name="DO_BufferN2Purage4AOpen"                                      BufferOffset="4000"                                      Addr="D1250.0"                      Description="Buffer N2 Purage 4A Open"                       />
		<DO_ITEM Index="4001"   Name="DO_BufferN2Purage4BOpen"                                      BufferOffset="4001"                                      Addr="D1250.1"                      Description="Buffer N2 Purage 4B Open"                       />
		<DO_ITEM Index="4002"   Name="DO_BufferN2Purage4COpen"                                      BufferOffset="4002"                                      Addr="D1250.2"                      Description="Buffer N2 Purage 4C Open"                       />
		<DO_ITEM Index="4003"   Name="DO_BufferN2Purage4DOpen"                                      BufferOffset="4003"                                      Addr="D1250.3"                      Description="Buffer N2 Purage 4D Open"                       />
		<DO_ITEM Index="4016"   Name="DO_BufferN2Purage3AOpen"                                      BufferOffset="4016"                                      Addr="D1251.0"                      Description="Buffer N2 Purage 3A Open"                       />
		<DO_ITEM Index="4017"   Name="DO_BufferN2Purage3BOpen"                                      BufferOffset="4017"                                      Addr="D1251.1"                      Description="Buffer N2 Purage 3B Open"                       />
		<DO_ITEM Index="4018"   Name="DO_BufferN2Purage3COpen"                                      BufferOffset="4018"                                      Addr="D1251.2"                      Description="Buffer N2 Purage 3C Open"                       />
		<DO_ITEM Index="4019"   Name="DO_BufferN2Purage3DOpen"                                      BufferOffset="4019"                                      Addr="D1251.3"                      Description="Buffer N2 Purage 3D Open"                       />
		<DO_ITEM Index="4032"   Name="DO_BufferN2Purage2AOpen"                                      BufferOffset="4032"                                      Addr="D1252.0"                      Description="Buffer N2 Purage 2A Open"                       />
		<DO_ITEM Index="4033"   Name="DO_BufferN2Purage2BOpen"                                      BufferOffset="4033"                                      Addr="D1252.1"                      Description="Buffer N2 Purage 2B Open"                       />
		<DO_ITEM Index="4034"   Name="DO_BufferN2Purage2COpen"                                      BufferOffset="4034"                                      Addr="D1252.2"                      Description="Buffer N2 Purage 2C Open"                       />
		<DO_ITEM Index="4035"   Name="DO_BufferN2Purage2DOpen"                                      BufferOffset="4035"                                      Addr="D1252.3"                      Description="Buffer N2 Purage 2D Open"                       />
		<DO_ITEM Index="4048"   Name="DO_BufferN2Purage1AOpen"                                      BufferOffset="4048"                                      Addr="D1253.0"                      Description="Buffer N2 Purage 1A Open"                       />
		<DO_ITEM Index="4049"   Name="DO_BufferN2Purage1BOpen"                                      BufferOffset="4049"                                      Addr="D1253.1"                      Description="Buffer N2 Purage 1B Open"                       />
		<DO_ITEM Index="4050"   Name="DO_BufferN2Purage1COpen"                                      BufferOffset="4050"                                      Addr="D1253.2"                      Description="Buffer N2 Purage 1C Open"                       />
		<DO_ITEM Index="4051"   Name="DO_BufferN2Purage1DOpen"                                      BufferOffset="4051"                                      Addr="D1253.3"                      Description="Buffer N2 Purage 1D Open"                       />
		<DO_ITEM Index="4052"   Name="DO_BufferN2PurageEN"                                      BufferOffset="4052"                                      Addr="D1253.4"                      Description="Buffer N2 Purage EN"                       />
	</Dig_Out>
	<Ana_In>
		<AI_ITEM Index="0"      Name="AI_GLBoxPG1Pressure"                                      BufferOffset="0"                                      Addr="D5000"                      Description="GL box PG1 pressure"                       />
		<AI_ITEM Index="1"      Name="AI_GLBoxPG2Pressure"                                      BufferOffset="1"                                      Addr="D5002"                      Description="GL box PG2 pressure"                       />
		<AI_ITEM Index="2"      Name="AI_GLBoxPG3Pressure"                                      BufferOffset="2"                                      Addr="D5004"                      Description="GL box PG3 pressure"                       />
		<AI_ITEM Index="3"      Name="AI_GLBoxPG4Pressure"                                      BufferOffset="3"                                      Addr="D5006"                      Description="GL box PG4 pressure"                       />
		<AI_ITEM Index="4"      Name="AI_GLBoxPG5Pressure"                                      BufferOffset="4"                                      Addr="D5008"                      Description="GL box PG5 pressure"                       />
		<AI_ITEM Index="5"      Name="AI_GLBoxPG6Pressure"                                      BufferOffset="5"                                      Addr="D5010"                      Description="GL box PG6 pressure"                       />
		<AI_ITEM Index="8"      Name="AI_GasBoxUpperVG32"                                      BufferOffset="8"                                      Addr="D5016"                      Description="gas box upper VG32"                       />
		<AI_ITEM Index="9"      Name="AI_GasBoxUpperVG33"                                      BufferOffset="9"                                      Addr="D5018"                      Description="gas box upper VG33"                       />
		<AI_ITEM Index="32"     Name="AI_O2Concentration"                                      BufferOffset="32"                                      Addr="D5064"                      Description="O2 concentration"                       />
		<AI_ITEM Index="40"     Name="AI_Tank1Pressure"                                      BufferOffset="40"                                      Addr="D5080"                      Description="Tank1 Pressure(PS132)"                       />
		<AI_ITEM Index="41"     Name="AI_Tank2Pressure"                                      BufferOffset="41"                                      Addr="D5082"                      Description="Tank2 Pressure(PS135)"                       />
		<AI_ITEM Index="64"     Name="AI_HeatingExhaustMS1"                                      BufferOffset="64"                                      Addr="D5128"                      Description="Heating exhaust MS1"                       />
		<AI_ITEM Index="65"     Name="AI_GasBoxExhaustMS2"                                      BufferOffset="65"                                      Addr="D5130"                      Description="gas box exhaust MS2"                       />
		<AI_ITEM Index="66"     Name="AI_ScavengerExhaustMS3"                                      BufferOffset="66"                                      Addr="D5132"                      Description="scavenger exhaust MS3"                       />
		<AI_ITEM Index="67"     Name="AI_ExhaustBoxExhaustMS4"                                      BufferOffset="67"                                      Addr="D5134"                      Description="exhaust box exhaust MS4"                       />
		<AI_ITEM Index="68"     Name="AI_LoadingAreaExhaustMS5"                                      BufferOffset="68"                                      Addr="D5136"                      Description="loading area exhaust MS5"                       />
		<AI_ITEM Index="70"     Name="AI_CommonExhaustMS7"                                      BufferOffset="70"                                      Addr="D5140"                      Description="common exhaust MS7"                       />
		<AI_ITEM Index="71"     Name="AI_LSCUpExhaustMS8"                                      BufferOffset="71"                                      Addr="D5142"                      Description="LSC-up exhaust MS8"                       />
		<AI_ITEM Index="72"     Name="AI_LSCUpExhaustMS9"                                      BufferOffset="72"                                      Addr="D5144"                      Description="LSC-up exhaust MS9"                       />
		<AI_ITEM Index="73"     Name="AI_LSCDownExhaustMS10"                                      BufferOffset="73"                                      Addr="D5146"                      Description="LSC-down exhaust MS10"                       />
		<AI_ITEM Index="74"     Name="AI_PS11Value"                                      BufferOffset="74"                                      Addr="D5148"                      Description="PS11 Value"                       />
		<AI_ITEM Index="96"     Name="AI_RHCFlowFL901"                                      BufferOffset="96"                                      Addr="D5192"                      Description="RHC flow (FS105)"                       />
		<AI_ITEM Index="97"     Name="AI_CoolingWaterFlowOfFurnaceFL902"                                      BufferOffset="97"                                      Addr="D5194"                      Description="cooling water flow of furnace (FS106)"                       />
		<AI_ITEM Index="98"     Name="AI_CoolingWateFlowOfShuttleFL903"                                      BufferOffset="98"                                      Addr="D5196"                      Description="cooling water flow of shuttle (FS104)"                       />
		<AI_ITEM Index="99"     Name="AI_CoolingWaterFlowOfBoatRotationFL904"                                      BufferOffset="99"                                      Addr="D5198"                      Description="cooling water flow of boat rotation (FS111)"                       />
		<AI_ITEM Index="100"    Name="AI_CoolingWaterFlowOfFlangeFL905"                                      BufferOffset="100"                                      Addr="D5200"                      Description="cooling water flow of flange (FS201)"                       />
		<AI_ITEM Index="101"    Name="AI_CoolingWaterFlowOfLoadingAreaFL906"                                      BufferOffset="101"                                      Addr="D5202"                      Description="cooling water flow of loading area (FS116)"                       />
		<AI_ITEM Index="102"    Name="AI_WaterFlowREV"                                      BufferOffset="102"                                      Addr="D5204"                      Description="water flow REV."                       />
		<AI_ITEM Index="103"    Name="AI_PS13AnalogValue"                                      BufferOffset="103"                                      Addr="D5206"                      Description="PS13 analog value"                       />
		<AI_ITEM Index="104"    Name="AI_VG21Pressure"                                      BufferOffset="104"                                      Addr="D5208"                      Description="VG21 pressure"                       />
		<AI_ITEM Index="105"    Name="AI_DG1Pressure"                                      BufferOffset="105"                                      Addr="D5210"                      Description="DG1 pressure"                       />
		<AI_ITEM Index="106"    Name="AI_PG12Pressure"                                      BufferOffset="106"                                      Addr="D5212"                      Description="PG12 pressure"                       />
		<AI_ITEM Index="108"    Name="AI_PG13Pressure"                                      BufferOffset="108"                                      Addr="D5216"                      Description="PG14 pressure"                       />
		<AI_ITEM Index="109"    Name="AI_PS14Pressure"                                      BufferOffset="109"                                      Addr="D5218"                      Description="PS14 pressure"                       />
		<AI_ITEM Index="192"    Name="AI_N24PurgePressure"                                      BufferOffset="192"                                      Addr="D5384"                      Description="N2-4 purge pressure(PG14)"                       />
		<AI_ITEM Index="193"    Name="AI_N25PurgePressure"                                      BufferOffset="193"                                      Addr="D5386"                      Description="N2-5 purge pressure(PG15)"                       />
		<AI_ITEM Index="194"    Name="AI_N26PurgePressure"                                      BufferOffset="194"                                      Addr="D5388"                      Description="N2-6 purge pressure(PG16)"                       />
		<AI_ITEM Index="195"    Name="AI_N27PurgePressure"                                      BufferOffset="195"                                      Addr="D5390"                      Description="N2-7 purge pressure(PG70)"                       />
		<AI_ITEM Index="196"    Name="AI_PS17Value"                                      BufferOffset="196"                                      Addr="D5392"                      Description="N2-7 purge pressure(PG17)"                       />
		<AI_ITEM Index="197"    Name="AI_N28PurgePressure"                                      BufferOffset="197"                                      Addr="D5394"                      Description="N2-8 purge pressuree(PG13)"                       />
		<AI_ITEM Index="320"    Name="AI_BufferTargetPosFb"                                      BufferOffset="320"                                      Addr="D5640"                      Description="Buffer Target Pos Feedback"                       />
		<AI_ITEM Index="321"    Name="AI_BufferMotionErrID"                                      BufferOffset="321"                                      Addr="D5642"                      Description="Buffer Motio Err ID"                       />
		<AI_ITEM Index="326"    Name="AI_BufferDriverErrCode"                                      BufferOffset="326"                                      Addr="D5652"                      Description="Buffer Driver Err Code"                       />
		<AI_ITEM Index="327"    Name="AI_BufferMotorPositionFb"                                      BufferOffset="327"                                      Addr="D5654"                      Description="Buffer Motor Position Feedback"                       />
		<AI_ITEM Index="328"    Name="AI_BufferMotorTorqueFb"                                      BufferOffset="328"                                      Addr="D5656"                      Description="Buffer Motor Torque Feedback"                       />
		<AI_ITEM Index="329"    Name="AI_BufferMotorSpeedFb"                                      BufferOffset="329"                                      Addr="D5658"                      Description="Buffer Motor Speed Feedback"                       />
		<AI_ITEM Index="330"    Name="AI_BoatTargetPosFb"                                      BufferOffset="330"                                      Addr="D5660"                      Description="Bozt Z Target Pos Feedback"                       />
		<AI_ITEM Index="331"    Name="AI_BoatMotioErrID"                                      BufferOffset="331"                                      Addr="D5662"                      Description="Bozt Z Motio Err ID"                       />
		<AI_ITEM Index="336"    Name="AI_BoatDriverErrCode"                                      BufferOffset="336"                                      Addr="D5672"                      Description="Bozt Z Driver Err Code"                       />
		<AI_ITEM Index="337"    Name="AI_BoatMotorPositionFeedback"                                      BufferOffset="337"                                      Addr="D5674"                      Description="Boat Motor Position Feedback"                       />
		<AI_ITEM Index="338"    Name="AI_BoatMotorTorqueFeedback"                                      BufferOffset="338"                                      Addr="D5676"                      Description="Boat Motor Torque Feedback"                       />
		<AI_ITEM Index="339"    Name="AI_BoatMotorSpeedFb"                                      BufferOffset="339"                                      Addr="D5678"                      Description="Bozt Z Motor Speed Feedback"                       />
		<AI_ITEM Index="340"    Name="AI_VG11Pressure"                                      BufferOffset="340"                                      Addr="D5680"                      Description="VG11 Pressure"                       />
		<AI_ITEM Index="341"    Name="AI_VG12Pressure"                                      BufferOffset="341"                                      Addr="D5682"                      Description="VG12 Pressure"                       />
		<AI_ITEM Index="342"    Name="AI_VG13Pressure"                                      BufferOffset="342"                                      Addr="D5684"                      Description="VG13 Pressure"                       />
		<AI_ITEM Index="344"    Name="AI_VG32Pressure"                                      BufferOffset="344"                                      Addr="D5688"                      Description="VG32 Pressure"                       />
		<AI_ITEM Index="345"    Name="AI_VG33Pressure"                                      BufferOffset="345"                                      Addr="D5690"                      Description="VG33 Pressure"                       />

		<AI_ITEM Index="387"    Name="AI_FFU4CurrentSpeed"                                      BufferOffset="387"                                      Addr="D5774"                      Description="FFU4 Current speed"                       />
		<AI_ITEM Index="388"    Name="AI_FFU4Status"                                      BufferOffset="388"                                      Addr="D5776"                      Description="FFU4 voltage"                       />

		<AI_ITEM Index="397"    Name="AI_FFU5CurrentSpeed"                                      BufferOffset="397"                                      Addr="D5794"                      Description="FFU5 Current speed"                       />
		<AI_ITEM Index="398"    Name="AI_FFU5Status"                                      BufferOffset="398"                                      Addr="D5796"                      Description="FFU5 voltage"                       />

		<AI_ITEM Index="407"    Name="AI_FFU6CurrentSpeed"                                      BufferOffset="407"                                      Addr="D5814"                      Description="FFU6 Current speed"                       />
		<AI_ITEM Index="408"    Name="AI_FFU6Status"                                      BufferOffset="408"                                      Addr="D5816"                      Description="FFU6 voltage"                       />

		<AI_ITEM Index="417"    Name="AI_FFU7CurrentSpeed"                                      BufferOffset="417"                                      Addr="D5834"                      Description="FFU7 Current speed"                       />
		<AI_ITEM Index="418"    Name="AI_FFU7Status"                                      BufferOffset="418"                                      Addr="D5836"                      Description="FFU7 voltage"                       />

		<AI_ITEM Index="450"    Name="AI_MFC1AirFlowPV"                                      BufferOffset="450"                                      Addr="D5900"                      Description="MFC1 air flow PV"                       />
		<AI_ITEM Index="451"    Name="AI_MFC2AirFlowPV"                                      BufferOffset="451"                                      Addr="D5902"                      Description="MFC2 air flow PV"                       />
		<AI_ITEM Index="452"    Name="AI_MFC3AirFlowPV"                                      BufferOffset="452"                                      Addr="D5904"                      Description="MFC3 air flow PV"                       />
		<AI_ITEM Index="453"    Name="AI_MFC4AirFlowPV"                                      BufferOffset="453"                                      Addr="D5906"                      Description="MFC4 air flow PV"                       />
		<AI_ITEM Index="454"    Name="AI_MFC5AirFlowPV"                                      BufferOffset="454"                                      Addr="D5908"                      Description="MFC5 air flow PV"                       />
		<AI_ITEM Index="455"    Name="AI_MFC6AirFlowPV"                                      BufferOffset="455"                                      Addr="D5910"                      Description="MFC6 air flow PV"                       />
		<AI_ITEM Index="456"    Name="AI_MFC7AirFlowPV"                                      BufferOffset="456"                                      Addr="D5912"                      Description="MFC7 air flow PV"                       />
		<AI_ITEM Index="457"    Name="AI_MFC8AirFlowPV"                                      BufferOffset="457"                                      Addr="D5914"                      Description="MFC8 air flow PV"                       />
		<AI_ITEM Index="458"    Name="AI_MFC9AirFlowPV"                                      BufferOffset="458"                                      Addr="D5916"                      Description="MFC9 air flow PV"                       />
		<AI_ITEM Index="459"    Name="AI_MFC10AirFlowPV"                                      BufferOffset="459"                                      Addr="D5918"                      Description="MFC10 air flow PV"                       />
		<AI_ITEM Index="460"    Name="AI_MFC11AirFlowPV"                                      BufferOffset="460"                                      Addr="D5920"                      Description="MFC11 air flow PV"                       />
		<AI_ITEM Index="461"    Name="AI_MFC12AirFlowPV"                                      BufferOffset="461"                                      Addr="D5922"                      Description="MFC12 air flow PV"                       />
		<AI_ITEM Index="462"    Name="AI_MFC51AirFlowPV"                                      BufferOffset="462"                                      Addr="D5924"                      Description="MFC51 air flow PV"                       />
		<AI_ITEM Index="463"    Name="AI_MFM57AirFlowPV"                                      BufferOffset="463"                                      Addr="D5926"                      Description="MFM57 air flow PV"                       />
		<AI_ITEM Index="464"    Name="AI_MFC13AirFlowPV"                                      BufferOffset="464"                                      Addr="D5928"                      Description="MFC13 air flow PV"                       />
		<AI_ITEM Index="465"    Name="AI_MFC16AirFlowPV"                                      BufferOffset="465"                                      Addr="D5930"                      Description="MFC16 air flow PV"                       />
		<AI_ITEM Index="466"    Name="AI_MFC17AirFlowPV"                                      BufferOffset="466"                                      Addr="D5932"                      Description="MFC17 air flow PV"                       />
		<AI_ITEM Index="467"    Name="AI_MFM6AirFlowPV"                                      BufferOffset="467"                                      Addr="D5934"                      Description="MFM6 air flow PV"                       />
		<AI_ITEM Index="468"    Name="AI_MFM7AirFlowPV"                                      BufferOffset="468"                                      Addr="D5936"                      Description="MFM7 air flow PV"                       />
		<AI_ITEM Index="469"    Name="AI_MFM8AirFlowPV"                                      BufferOffset="469"                                      Addr="D5938"                      Description="MFM8 air flow PV"                       />
		<AI_ITEM Index="470"    Name="AI_MFM9AirFlowPV"                                      BufferOffset="470"                                      Addr="D5940"                      Description="MFM9 air flow PV"                       />
		<AI_ITEM Index="471"    Name="AI_MFM11AirFlowPV"                                      BufferOffset="471"                                      Addr="D5942"                      Description="MFM11 air flow PV"                       />
		<AI_ITEM Index="472"    Name="AI_MFM12AirFlowPV"                                      BufferOffset="472"                                      Addr="D5944"                      Description="MFM12 air flow PV"                       />
		<AI_ITEM Index="473"    Name="AI_MFM13AirFlowPV"                                      BufferOffset="473"                                      Addr="D5946"                      Description="MFM13 air flow PV"                       />
		<AI_ITEM Index="474"    Name="AI_MFM16AirFlowPV"                                      BufferOffset="474"                                      Addr="D5948"                      Description="MFM16 air flow PV"                       />
		<AI_ITEM Index="475"    Name="AI_LSC1AirFlowPV"                                      BufferOffset="475"                                      Addr="D5950"                      Description="LSC1 air flow PV"                       />
		<AI_ITEM Index="476"    Name="AI_LSC2AirFlowPV"                                      BufferOffset="476"                                      Addr="D5952"                      Description="LSC2 air flow PV"                       />
		<AI_ITEM Index="2000"   Name="AI_APCValueSensorInput1"                                      BufferOffset="2000"                                      Addr="D9000"                      Description="APC Value sensor input1 (p1)"                       />
		<AI_ITEM Index="2001"   Name="AI_APCValueSensorInput2"                                      BufferOffset="2001"                                      Addr="D9002"                      Description="APC Value sensor input1 (p2)"                       />
		<AI_ITEM Index="2002"   Name="AI_APCSelectController"                                      BufferOffset="2002"                                      Addr="D9004"                      Description="Select controller"                       />
		<AI_ITEM Index="2003"   Name="AI_APCPositionActualValue"                                      BufferOffset="2003"                                      Addr="D9006"                      Description="APC Position actual value"                       />
		<AI_ITEM Index="2004"   Name="AI_APCControlModeStatus"                                      BufferOffset="2004"                                      Addr="D9008"                      Description="APC Control mode status"                       />
		<AI_ITEM Index="2005"   Name="AI_APCHomeStatus"                                      BufferOffset="2005"                                      Addr="D9010"                      Description="APC HOME status"                       />
		<AI_ITEM Index="2006"   Name="AI_APCWarningStatus1"                                      BufferOffset="2006"                                      Addr="D9012"                      Description="Active Device Warning Details (Device Management)"                       />
		<AI_ITEM Index="2007"   Name="AI_APCWarningStatus2"                                      BufferOffset="2007"                                      Addr="D9014"                      Description="Active Device Warning Details (Sensor Input1)"                       />
		<AI_ITEM Index="2008"   Name="AI_APCWarningStatus3"                                      BufferOffset="2008"                                      Addr="D9016"                      Description="Active Device Warning Details (Sensor Input2)"                       />
		<AI_ITEM Index="2009"   Name="AI_APCWarningStatus4"                                      BufferOffset="2009"                                      Addr="D9018"                      Description="Active Device Warning Details (Process Controller Selector)"                       />
		<AI_ITEM Index="2010"   Name="AI_APCWarningStatus5"                                      BufferOffset="2010"                                      Addr="D9020"                      Description="Active Device Warning Details (Valve)"                       />
		<AI_ITEM Index="2011"   Name="AI_APCWarningStatus6"                                      BufferOffset="2011"                                      Addr="D9022"                      Description="Active manufacturer Warning Details (Valve)"                       />
		<AI_ITEM Index="2012"   Name="AI_APCErrorStatus1"                                      BufferOffset="2012"                                      Addr="D9024"                      Description="Active manufacturer Error Details (Device Management)"                       />
		<AI_ITEM Index="2013"   Name="AI_APCErrorStatus2"                                      BufferOffset="2013"                                      Addr="D9026"                      Description="Active manufacturer Error Details(Sensor Input1)"                       />
		<AI_ITEM Index="2014"   Name="AI_APCErrorStatus3"                                      BufferOffset="2014"                                      Addr="D9028"                      Description="Active manufacturer Error Details (Sensor Input2)"                       />
		<AI_ITEM Index="2015"   Name="AI_APCErrorStatus4"                                      BufferOffset="2015"                                      Addr="D9030"                      Description="Active manufacturer Error Details (Valve)"                       />
		<AI_ITEM Index="2017"   Name="AI_APCZeroAdjustP1"                                      BufferOffset="2017"                                      Addr="D9034"                      Description="Zero adjust P1 (0:NO OPERATION,1:ADJUST)"                       />
		<AI_ITEM Index="2020"   Name="AI_APCZeroAdjustP2"                                      BufferOffset="2020"                                      Addr="D9040"                      Description="Zero adjust P2 (0:NO OPERATION,1:ADJUST)"                       />
		<AI_ITEM Index="2022"   Name="AI_APCSlowVacuumTargetPressure"                                      BufferOffset="2022"                                      Addr="D9044"                      Description="Slow vacuum control target vacuum pressure"                       />
		<AI_ITEM Index="2023"   Name="AI_APCValveStatusThreshold"                                      BufferOffset="2023"                                      Addr="D9046"                      Description="Valve status threshold(0.36~17.86)"                       />
		<AI_ITEM Index="2024"   Name="AI_APCForbidInterlockOutbreak"                                      BufferOffset="2024"                                      Addr="D9048"                      Description="Forbid interlock outbreak(0:enable,1:disable)"                       />
		<AI_ITEM Index="2025"   Name="AI_APCSlowVacuumModeSetting"                                      BufferOffset="2025"                                      Addr="D9050"                      Description="Slow vacuum mode setting(0:normal,1:short)"                       />
		<AI_ITEM Index="2026"   Name="AI_APCInterlock1"                                      BufferOffset="2026"                                      Addr="D9052"                      Description="Interlock1"                       />
		<AI_ITEM Index="2027"   Name="AI_APCInterlock2"                                      BufferOffset="2027"                                      Addr="D9054"                      Description="Interlock2"                       />
		<AI_ITEM Index="2028"   Name="AI_APCInterlock3"                                      BufferOffset="2028"                                      Addr="D9056"                      Description="Interlock3"                       />
		<AI_ITEM Index="2029"   Name="AI_APCInterlockConstantOfInterlock3"                                      BufferOffset="2029"                                      Addr="D9058"                      Description="Interlock constant of interlock3"                       />
		<AI_ITEM Index="2030"   Name="AI_APCP1SensorOffsetSetting"                                      BufferOffset="2030"                                      Addr="D9060"                      Description="P1 sensor offset setting"                       />
		<AI_ITEM Index="2031"   Name="AI_APCPosMonOffsetSetting"                                      BufferOffset="2031"                                      Addr="D9062"                      Description="Pos mon offset setting"                       />
		<AI_ITEM Index="2032"   Name="AI_APCSensorAdjustReset"                                      BufferOffset="2032"                                      Addr="D9064"                      Description="Sensor adjust reset"                       />
		<AI_ITEM Index="2033"   Name="AI_APCSlowVacuumRate"                                      BufferOffset="2033"                                      Addr="D9066"                      Description="Slow vacuum rate"                       />
		<AI_ITEM Index="2034"   Name="AI_APCSlowVacuumP"                                      BufferOffset="2034"                                      Addr="D9068"                      Description="P constant for slow vacuum control"                       />
		<AI_ITEM Index="2035"   Name="AI_APCSlowVacuumI"                                      BufferOffset="2035"                                      Addr="D9070"                      Description="I constant for slow vacuum control"                       />
		<AI_ITEM Index="2036"   Name="AI_APCSlowVacuumD"                                      BufferOffset="2036"                                      Addr="D9072"                      Description="D constant for slow vacuum control"                       />
		<AI_ITEM Index="2037"   Name="AI_APCSlowVacuumA"                                      BufferOffset="2037"                                      Addr="D9074"                      Description="a(sensor differential) constant for slow vacuum control "                       />
		<AI_ITEM Index="2038"   Name="AI_APCControllerModeSelect"                                      BufferOffset="2038"                                      Addr="D9076"                      Description="controller mode select(1~10分别代表Controller1-10)"                       />
		<AI_ITEM Index="2039"   Name="AI_APCSpecifyTargetVacuumPressureControl"                                      BufferOffset="2039"                                      Addr="D9078"                      Description="Specify target vacuum pressure control"                       />
		<AI_ITEM Index="2040"   Name="AI_APCSpecifyTargetOpeningForValveOpeningControl"                                      BufferOffset="2040"                                      Addr="D9080"                      Description="Specify target opening for valve opening control"                       />
		<AI_ITEM Index="2041"   Name="AI_APCSpecifyControlMode"                                      BufferOffset="2041"                                      Addr="D9082"                      Description="Specify control mode"                       />
		<AI_ITEM Index="2042"   Name="AI_APCRangeUpperLimitSensorInput"                                      BufferOffset="2042"                                      Addr="D9084"                      Description="Range Upper Limit Sensor Input 1(默认3）"                       />
		<AI_ITEM Index="2045"   Name="AI_APCController1P"                                      BufferOffset="2045"                                      Addr="D9090"                      Description="Controller 1 P"                       />
		<AI_ITEM Index="2046"   Name="AI_APCController1I"                                      BufferOffset="2046"                                      Addr="D9092"                      Description="Controller 1 I"                       />
		<AI_ITEM Index="2047"   Name="AI_APCController1D"                                      BufferOffset="2047"                                      Addr="D9094"                      Description="Controller 1 D"                       />
		<AI_ITEM Index="2048"   Name="AI_APCController1A"                                      BufferOffset="2048"                                      Addr="D9096"                      Description="Controller 1 A"                       />
		<AI_ITEM Index="2049"   Name="AI_APCController1CH"                                      BufferOffset="2049"                                      Addr="D9098"                      Description="CH(air pressure exhaust threshold value 1) for Process Controller 1"                       />
		<AI_ITEM Index="2050"   Name="AI_APCController1CL"                                      BufferOffset="2050"                                      Addr="D9100"                      Description="CL(air pressure exhaust threshold value 2) for Process Controller 1"                       />
		<AI_ITEM Index="2051"   Name="AI_APCController1Offset"                                      BufferOffset="2051"                                      Addr="D9102"                      Description="OFFSET for Pocess Controller 1"                       />
		<AI_ITEM Index="2053"   Name="AI_APCController2P"                                      BufferOffset="2053"                                      Addr="D9106"                      Description="Controller 2 P"                       />
		<AI_ITEM Index="2054"   Name="AI_APCController2I"                                      BufferOffset="2054"                                      Addr="D9108"                      Description="Controller 2 I"                       />
		<AI_ITEM Index="2055"   Name="AI_APCController2D"                                      BufferOffset="2055"                                      Addr="D9110"                      Description="Controller 2 D"                       />
		<AI_ITEM Index="2056"   Name="AI_APCController2A"                                      BufferOffset="2056"                                      Addr="D9112"                      Description="Controller 2 A"                       />
		<AI_ITEM Index="2057"   Name="AI_APCController2CH"                                      BufferOffset="2057"                                      Addr="D9114"                      Description="CH(air pressure exhaust threshold value 1) for Process Controller 2"                       />
		<AI_ITEM Index="2058"   Name="AI_APCController2CL"                                      BufferOffset="2058"                                      Addr="D9116"                      Description="CL(air pressure exhaust threshold value 2) for Process Controller 2"                       />
		<AI_ITEM Index="2059"   Name="AI_APCController2Offset"                                      BufferOffset="2059"                                      Addr="D9118"                      Description="OFFSET for Pocess Controller 2"                       />
		<AI_ITEM Index="2061"   Name="AI_APCController3P"                                      BufferOffset="2061"                                      Addr="D9122"                      Description="Controller 3 P"                       />
		<AI_ITEM Index="2062"   Name="AI_APCController3I"                                      BufferOffset="2062"                                      Addr="D9124"                      Description="Controller 3 I"                       />
		<AI_ITEM Index="2063"   Name="AI_APCController3D"                                      BufferOffset="2063"                                      Addr="D9126"                      Description="Controller 3 D"                       />
		<AI_ITEM Index="2064"   Name="AI_APCController3A"                                      BufferOffset="2064"                                      Addr="D9128"                      Description="Controller 3 A"                       />
		<AI_ITEM Index="2065"   Name="AI_APCController3CH"                                     BufferOffset="2065"                                      Addr="D9130"                      Description="CH(air pressure exhaust threshold value 1) for Process Controller 3"                       />
		<AI_ITEM Index="2066"   Name="AI_APCController3CL"                                     BufferOffset="2066"                                      Addr="D9132"                      Description="CL(air pressure exhaust threshold value 2) for Process Controller 3"                       />
		<AI_ITEM Index="2067"   Name="AI_APCController3Offset"                                 BufferOffset="2067"                                      Addr="D9134"                      Description="OFFSET for Pocess Controller 3"                       />
		<AI_ITEM Index="2069"   Name="AI_APCController4P"                                      BufferOffset="2069"                                      Addr="D9138"                      Description="Controller 4 P"                       />
		<AI_ITEM Index="2070"   Name="AI_APCController4I"                                      BufferOffset="2070"                                      Addr="D9140"                      Description="Controller 4 I"                       />
		<AI_ITEM Index="2071"   Name="AI_APCController4D"                                      BufferOffset="2071"                                      Addr="D9142"                      Description="Controller 4 D"                       />
		<AI_ITEM Index="2072"   Name="AI_APCController4A"                                      BufferOffset="2072"                                      Addr="D9144"                      Description="Controller 4 A"                       />
		<AI_ITEM Index="2073"   Name="AI_APCController4CH"                                      BufferOffset="2073"                                      Addr="D9146"                      Description="CH(air pressure exhaust threshold value 1) for Process Controller 4"                       />
		<AI_ITEM Index="2074"   Name="AI_APCController4CL"                                      BufferOffset="2074"                                      Addr="D9148"                      Description="CL(air pressure exhaust threshold value 2) for Process Controller 4"                       />
		<AI_ITEM Index="2075"   Name="AI_APCController4Offset"                                    BufferOffset="2075"                                      Addr="D9150"                      Description="OFFSET for Pocess Controller 4"                       />
		<AI_ITEM Index="2077"   Name="AI_APCController5P"                                      BufferOffset="2077"                                      Addr="D9154"                      Description="Controller 5 P"                       />
		<AI_ITEM Index="2078"   Name="AI_APCController5I"                                      BufferOffset="2078"                                      Addr="D9156"                      Description="Controller 5 I"                       />
		<AI_ITEM Index="2079"   Name="AI_APCController5D"                                      BufferOffset="2079"                                      Addr="D9158"                      Description="Controller 5 D"                       />
		<AI_ITEM Index="2080"   Name="AI_APCController5A"                                      BufferOffset="2080"                                      Addr="D9160"                      Description="Controller 5 A"                       />
		<AI_ITEM Index="2081"   Name="AI_APCController5CH"                                      BufferOffset="2081"                                      Addr="D9162"                      Description="CH(air pressure exhaust threshold value 1) for Process Controller 5"                       />
		<AI_ITEM Index="2082"   Name="AI_APCController5CL"                                      BufferOffset="2082"                                      Addr="D9164"                      Description="CL(air pressure exhaust threshold value 2) for Process Controller 5"                       />
		<AI_ITEM Index="2083"   Name="AI_APCController5Offset"                                      BufferOffset="2083"                                      Addr="D9166"                      Description="OFFSET for Pocess Controller 5"                       />
		<AI_ITEM Index="2085"   Name="AI_APCController6P"                                      BufferOffset="2085"                                      Addr="D9170"                      Description="Controller 6 P"                       />
		<AI_ITEM Index="2086"   Name="AI_APCController6I"                                      BufferOffset="2086"                                      Addr="D9172"                      Description="Controller 6 I"                       />
		<AI_ITEM Index="2087"   Name="AI_APCController6D"                                      BufferOffset="2087"                                      Addr="D9174"                      Description="Controller 6 D"                       />
		<AI_ITEM Index="2088"   Name="AI_APCController6A"                                      BufferOffset="2088"                                      Addr="D9176"                      Description="Controller 6 A"                       />
		<AI_ITEM Index="2089"   Name="AI_APCController6CH"                                      BufferOffset="2089"                                      Addr="D9178"                      Description="CH(air pressure exhaust threshold value 1) for Process Controller 6"                       />
		<AI_ITEM Index="2090"   Name="AI_APCController6CL"                                      BufferOffset="2090"                                      Addr="D9180"                      Description="CL(air pressure exhaust threshold value 2) for Process Controller 6"                       />
		<AI_ITEM Index="2091"   Name="AI_APCController6Offset"                                      BufferOffset="2091"                                      Addr="D9182"                      Description="OFFSET for Pocess Controller 6"                       />
		<AI_ITEM Index="2093"   Name="AI_APCController7P"                                      BufferOffset="2093"                                      Addr="D9186"                      Description="Controller 7 P"                       />
		<AI_ITEM Index="2094"   Name="AI_APCController7I"                                      BufferOffset="2094"                                      Addr="D9188"                      Description="Controller 7 I"                       />
		<AI_ITEM Index="2095"   Name="AI_APCController7D"                                      BufferOffset="2095"                                      Addr="D9190"                      Description="Controller 7 D"                       />
		<AI_ITEM Index="2096"   Name="AI_APCController7A"                                      BufferOffset="2096"                                      Addr="D9192"                      Description="Controller 7 A"                       />
		<AI_ITEM Index="2097"   Name="AI_APCController7CH"                                      BufferOffset="2097"                                      Addr="D9194"                      Description="CH(air pressure exhaust threshold value 1) for Process Controller 7"                       />
		<AI_ITEM Index="2098"   Name="AI_APCController7CL"                                      BufferOffset="2098"                                      Addr="D9196"                      Description="CL(air pressure exhaust threshold value 2) for Process Controller 7"                       />
		<AI_ITEM Index="2099"   Name="AI_APCController7Offset"                                      BufferOffset="2099"                                      Addr="D9198"                      Description="OFFSET for Pocess Controller 7"                       />
		<AI_ITEM Index="2101"   Name="AI_APCController8P"                                      BufferOffset="2101"                                      Addr="D9202"                      Description="Controller 8 P"                       />
		<AI_ITEM Index="2102"   Name="AI_APCController8I"                                      BufferOffset="2102"                                      Addr="D9204"                      Description="Controller 8 I"                       />
		<AI_ITEM Index="2103"   Name="AI_APCController8D"                                      BufferOffset="2103"                                      Addr="D9206"                      Description="Controller 8 D"                       />
		<AI_ITEM Index="2104"   Name="AI_APCController8A"                                      BufferOffset="2104"                                      Addr="D9208"                      Description="Controller 8 A"                       />
		<AI_ITEM Index="2105"   Name="AI_APCController8CH"                                      BufferOffset="2105"                                      Addr="D9210"                      Description="CH(air pressure exhaust threshold value 1) for Process Controller 8"                       />
		<AI_ITEM Index="2106"   Name="AI_APCController8CL"                                      BufferOffset="2106"                                      Addr="D9212"                      Description="CL(air pressure exhaust threshold value 2) for Process Controller 8"                       />
		<AI_ITEM Index="2107"   Name="AI_APCController8Offset"                                      BufferOffset="2107"                                      Addr="D9214"                      Description="OFFSET for Pocess Controller 8"                       />
		<AI_ITEM Index="2109"   Name="AI_APCController9P"                                      BufferOffset="2109"                                      Addr="D9218"                      Description="Controller 9 P"                       />
		<AI_ITEM Index="2110"   Name="AI_APCController9I"                                      BufferOffset="2110"                                      Addr="D9220"                      Description="Controller 9 I"                       />
		<AI_ITEM Index="2111"   Name="AI_APCController9D"                                      BufferOffset="2111"                                      Addr="D9222"                      Description="Controller 9 D"                       />
		<AI_ITEM Index="2112"   Name="AI_APCController9A"                                      BufferOffset="2112"                                      Addr="D9224"                      Description="Controller 9 A"                       />
		<AI_ITEM Index="2113"   Name="AI_APCController9CH"                                      BufferOffset="2113"                                      Addr="D9226"                      Description="CH(air pressure exhaust threshold value 1) for Process Controller 9"                       />
		<AI_ITEM Index="2114"   Name="AI_APCController9CL"                                      BufferOffset="2114"                                      Addr="D9228"                      Description="CL(air pressure exhaust threshold value 2) for Process Controller 9"                       />
		<AI_ITEM Index="2115"   Name="AI_APCController9Offset"                                      BufferOffset="2115"                                      Addr="D9230"                      Description="OFFSET for Pocess Controller 9"                       />
		<AI_ITEM Index="2117"   Name="AI_APCController10P"                                      BufferOffset="2117"                                      Addr="D9234"                      Description="Controller 10 P"                       />
		<AI_ITEM Index="2118"   Name="AI_APCController10I"                                      BufferOffset="2118"                                      Addr="D9236"                      Description="Controller 10 I"                       />
		<AI_ITEM Index="2119"   Name="AI_APCController10D"                                      BufferOffset="2119"                                      Addr="D9238"                      Description="Controller 10 D"                       />
		<AI_ITEM Index="2120"   Name="AI_APCController10A"                                      BufferOffset="2120"                                      Addr="D9240"                      Description="Controller 10 A"                       />
		<AI_ITEM Index="2121"   Name="AI_APCController10CH"                                      BufferOffset="2121"                                      Addr="D9242"                      Description="CH(air pressure exhaust threshold value 1) for Process Controller 10"                       />
		<AI_ITEM Index="2122"   Name="AI_APCController10CL"                                      BufferOffset="2122"                                      Addr="D9244"                      Description="CL(air pressure exhaust threshold value 2) for Process Controller 10"                       />
		<AI_ITEM Index="2123"   Name="AI_APCController10Offset"                                      BufferOffset="2123"                                      Addr="D9246"                      Description="OFFSET for Pocess Controller 10"                       />
		<AI_ITEM Index="2125"   Name="AI_MFC816AI"                                      BufferOffset="2125"                                      Addr="D9250"                      Description="MFC816AI(4A)"                       />
		<AI_ITEM Index="2126"   Name="AI_MFC817AI"                                      BufferOffset="2126"                                      Addr="D9252"                      Description="MFC817AI(4B)"                       />
		<AI_ITEM Index="2127"   Name="AI_MFC818AI"                                      BufferOffset="2127"                                      Addr="D9254"                      Description="MFC818AI(4C)"                       />
		<AI_ITEM Index="2128"   Name="AI_MFC819AI"                                      BufferOffset="2128"                                      Addr="D9256"                      Description="MFC819AI(4D)"                       />
		<AI_ITEM Index="2129"   Name="AI_PG816AI"                                      BufferOffset="2129"                                      Addr="D9258"                      Description="PG816AI(4A)"                       />
		<AI_ITEM Index="2130"   Name="AI_PG817AI"                                      BufferOffset="2130"                                      Addr="D9260"                      Description="PG817AI(4B)"                       />
		<AI_ITEM Index="2131"   Name="AI_PG818AI"                                      BufferOffset="2131"                                      Addr="D9262"                      Description="PG818AI(4C)"                       />
		<AI_ITEM Index="2132"   Name="AI_PG819AI"                                      BufferOffset="2132"                                      Addr="D9264"                      Description="PG819AI(4D)"                       />
		<AI_ITEM Index="2133"   Name="AI_MFC820AI"                                      BufferOffset="2133"                                      Addr="D9266"                      Description="MFC820AI(3A)"                       />
		<AI_ITEM Index="2134"   Name="AI_MFC821AI"                                      BufferOffset="2134"                                      Addr="D9268"                      Description="MFC821AI(3B)"                       />
		<AI_ITEM Index="2135"   Name="AI_MFC822AI"                                      BufferOffset="2135"                                      Addr="D9270"                      Description="MFC822AI(3C)"                       />
		<AI_ITEM Index="2136"   Name="AI_MFC823AI"                                      BufferOffset="2136"                                      Addr="D9272"                      Description="MFC823AI(3D)"                       />
		<AI_ITEM Index="2137"   Name="AI_PG820AI"                                      BufferOffset="2137"                                      Addr="D9274"                      Description="PG820AI(3A)"                       />
		<AI_ITEM Index="2138"   Name="AI_PG821AI"                                      BufferOffset="2138"                                      Addr="D9276"                      Description="PG821AI(3B)"                       />
		<AI_ITEM Index="2139"   Name="AI_PG822AI"                                      BufferOffset="2139"                                      Addr="D9278"                      Description="PG822AI(3C)"                       />
		<AI_ITEM Index="2140"   Name="AI_PG823AI"                                      BufferOffset="2140"                                      Addr="D9280"                      Description="PG823AI(3D)"                       />
		<AI_ITEM Index="2142"   Name="AI_MFC824AI"                                      BufferOffset="2142"                                      Addr="D9284"                      Description="MFC824AI(2A)"                       />
		<AI_ITEM Index="2143"   Name="AI_MFC825AI"                                      BufferOffset="2143"                                      Addr="D9286"                      Description="MFC825AI(2B)"                       />
		<AI_ITEM Index="2144"   Name="AI_MFC826AI"                                      BufferOffset="2144"                                      Addr="D9288"                      Description="MFC826AI(2C)"                       />
		<AI_ITEM Index="2145"   Name="AI_MFC827AI"                                      BufferOffset="2145"                                      Addr="D9290"                      Description="MFC827AI(2D)"                       />
		<AI_ITEM Index="2146"   Name="AI_PG824AI"                                      BufferOffset="2146"                                      Addr="D9292"                      Description="PG824AI(2A)"                       />
		<AI_ITEM Index="2147"   Name="AI_PG825AI"                                      BufferOffset="2147"                                      Addr="D9294"                      Description="PG825AI(2B)"                       />
		<AI_ITEM Index="2148"   Name="AI_PG826AI"                                      BufferOffset="2148"                                      Addr="D9296"                      Description="PG826AI(2C)"                       />
		<AI_ITEM Index="2149"   Name="AI_PG827AI"                                      BufferOffset="2149"                                      Addr="D9298"                      Description="PG827AI(2D)"                       />
		<AI_ITEM Index="2150"   Name="AI_MFC828AI"                                      BufferOffset="2150"                                      Addr="D9300"                      Description="MFC828AI(1A)"                       />
		<AI_ITEM Index="2151"   Name="AI_MFC829AI"                                      BufferOffset="2151"                                      Addr="D9302"                      Description="MFC829AI(1B)"                       />
		<AI_ITEM Index="2152"   Name="AI_MFC830AI"                                      BufferOffset="2152"                                      Addr="D9304"                      Description="MFC830AI(1C)"                       />
		<AI_ITEM Index="2153"   Name="AI_MFC831AI"                                      BufferOffset="2153"                                      Addr="D9306"                      Description="MFC831AI(1D)"                       />
		<AI_ITEM Index="2154"   Name="AI_PG828AI"                                      BufferOffset="2154"                                      Addr="D9308"                      Description="PG828AI(1A)"                       />
		<AI_ITEM Index="2155"   Name="AI_PG829AI"                                      BufferOffset="2155"                                      Addr="D9310"                      Description="PG829AI(1B)"                       />
		<AI_ITEM Index="2156"   Name="AI_PG830AI"                                      BufferOffset="2156"                                      Addr="D9312"                      Description="PG830AI(1C)"                       />
		<AI_ITEM Index="2157"   Name="AI_PG831AI"                                      BufferOffset="2157"                                      Addr="D9314"                      Description="PG831AI(1D)"                       />
		<AI_ITEM Index="2250"   Name="AI_FOUPRobotActionCommand"                                      BufferOffset="2250"                                      Addr="D9500"                      Description="FOUP Robot Action Command"                       />
		<AI_ITEM Index="2251"   Name="AI_WaferRobotActionCommand"                                      BufferOffset="2251"                                      Addr="D9502"                      Description="Wafer Robot Action Command"                       />
		<AI_ITEM Index="2175"   Name="AI_RingBreakingNodeError"                                      BufferOffset="2175"                                      Addr="D9350"                      Description="RingBreaking Node Error"                       />
	</Ana_In>
	<Ana_Out>
		<AO_ITEM Index="5"      Name="AO_TargetPositionBufferAxis"                                      BufferOffset="5"                                      Addr="D10010"                      Description="Target Position Buffer Axis"                       />
		<AO_ITEM Index="6"      Name="AO_BufferRotationSpeed"                                      BufferOffset="6"                                      Addr="D10012"                      Description="Buffer Rotation Speed"                       />
		<AO_ITEM Index="7"      Name="AO_BufferRotationAcc"                                      BufferOffset="7"                                      Addr="D10014"                      Description="Buffer Rotation Acc"                       />
		<AO_ITEM Index="8"      Name="AO_BufferRotationDec"                                      BufferOffset="8"                                      Addr="D10016"                      Description="Buffer Rotation Dec"                       />
		<AO_ITEM Index="55"     Name="AO_BoatPosition"                                      BufferOffset="55"                                      Addr="D10110"                      Description="Boat Position"                       />
		<AO_ITEM Index="56"     Name="AO_BoatZAxisSpeed"                                      BufferOffset="56"                                      Addr="D10112"                      Description="Boat Z Speed"                       />
		<AO_ITEM Index="57"     Name="AO_BoatRotationAcc"                                      BufferOffset="57"                                      Addr="D10114"                      Description="Boat z Acc"                       />
		<AO_ITEM Index="58"     Name="AO_BoatRotationDec"                                      BufferOffset="58"                                      Addr="D10116"                      Description="Boat z Dec"                       />
		<AO_ITEM Index="105"    Name="AO_LAO2OverTime"                                      BufferOffset="105"                                      Addr="D10210"                      Description="LA 02 OverTime"                       />
		<AO_ITEM Index="106"    Name="AO_LAO2checkTime"                                      BufferOffset="106"                                      Addr="D10212"                      Description="LA 02 checkTime"                       />
		<AO_ITEM Index="107"    Name="AO_FOUPO2OverTime"                                      BufferOffset="107"                                      Addr="D10214"                      Description="FOUP O2 0ver Time"                       />
		<AO_ITEM Index="108"    Name="AO_FOUPO2CheckTime"                                      BufferOffset="108"                                      Addr="D10216"                      Description="FOUP O2 Check Time"                       />
		<AO_ITEM Index="109"    Name="AO_ExchangeLATOFOUPWaitTime"                                      BufferOffset="109"                                      Addr="D10218"                      Description="Exchange LA TO FOUP WaitTime"                       />
		<AO_ITEM Index="110"    Name="AO_ExchangeFOUPTOLAWaitTime"                                      BufferOffset="110"                                      Addr="D10220"                      Description="Exchange FOUP TO LA WaitTime"                       />
		<AO_ITEM Index="111"    Name="AO_ExchangeFOUPTOFOUPWaitTime"                                      BufferOffset="111"                                      Addr="D10222"                      Description="Exchange FOUP TO FOUP WaitTime"                       />
		<AO_ITEM Index="112"    Name="AO_LAO2checkSV"                                      BufferOffset="112"                                      Addr="D10224"                      Description="LA O2 check SV"                       />
		<AO_ITEM Index="113"    Name="AO_FOUPO2CheckSV"                                      BufferOffset="113"                                      Addr="D10226"                      Description="FOUP O2 Check SV"                       />

		<AO_ITEM Index="176"    Name="AO_FFU4SetSpeed"                                      BufferOffset="176"                                      Addr="D10352"                      Description="FFU4 Set speed"                       />
		<AO_ITEM Index="182"    Name="AO_FFU5SetSpeed"                                      BufferOffset="182"                                      Addr="D10364"                      Description="FFU5 Set speed"                       />
		<AO_ITEM Index="188"    Name="AO_FFU6SetSpeed"                                      BufferOffset="188"                                      Addr="D10376"                      Description="FFU6 Set speed"                       />
		<AO_ITEM Index="194"    Name="AO_FFU7SetSpeed"                                      BufferOffset="194"                                      Addr="D10388"                      Description="FFU7 Set speed"                       />

		<AO_ITEM Index="215"    Name="AO_MFC1AirFlowSV"                                      BufferOffset="215"                                      Addr="D10430"                      Description="MFC1 air flow SV"                       />
		<AO_ITEM Index="216"    Name="AO_MFC2AirFlowSV"                                      BufferOffset="216"                                      Addr="D10432"                      Description="MFC2 air flow SV"                       />
		<AO_ITEM Index="217"    Name="AO_MFC3AirFlowSV"                                      BufferOffset="217"                                      Addr="D10434"                      Description="MFC3 air flow SV"                       />
		<AO_ITEM Index="218"    Name="AO_MFC4AirFlowSV"                                      BufferOffset="218"                                      Addr="D10436"                      Description="MFC4 air flow SV"                       />
		<AO_ITEM Index="219"    Name="AO_MFC5AirFlowSV"                                      BufferOffset="219"                                      Addr="D10438"                      Description="MFC5 air flow SV"                       />
		<AO_ITEM Index="220"    Name="AO_MFC6AirFlowSV"                                      BufferOffset="220"                                      Addr="D10440"                      Description="MFC6 air flow SV"                       />
		<AO_ITEM Index="221"    Name="AO_MFC7AirFlowSV"                                      BufferOffset="221"                                      Addr="D10442"                      Description="MFC7 air flow SV"                       />
		<AO_ITEM Index="222"    Name="AO_MFC8AirFlowSV"                                      BufferOffset="222"                                      Addr="D10444"                      Description="MFC8 air flow SV"                       />
		<AO_ITEM Index="223"    Name="AO_MFC9AirFlowSV"                                      BufferOffset="223"                                      Addr="D10446"                      Description="MFC9 air flow SV"                       />
		<AO_ITEM Index="224"    Name="AO_MFC10AirFlowSV"                                      BufferOffset="224"                                      Addr="D10448"                      Description="MFC10 air flow SV"                       />
		<AO_ITEM Index="225"    Name="AO_MFC11AirFlowSV"                                      BufferOffset="225"                                      Addr="D10450"                      Description="MFC11 air flow SV"                       />
		<AO_ITEM Index="226"    Name="AO_MFC12AirFlowSV"                                      BufferOffset="226"                                      Addr="D10452"                      Description="MFC12 air flow SV"                       />
		<AO_ITEM Index="227"    Name="AO_MFC51AirFlowSV"                                      BufferOffset="227"                                      Addr="D10454"                      Description="MFC51 air flow SV"                       />
		<AO_ITEM Index="229"    Name="AO_MFC13AirFlowSV"                                      BufferOffset="229"                                      Addr="D10458"                      Description="MFC13 air flow SV"                       />
		<AO_ITEM Index="230"    Name="AO_MFC16AirFlowSV"                                      BufferOffset="230"                                      Addr="D10460"                      Description="MFC16 air flow SV"                       />
		<AO_ITEM Index="231"    Name="AO_MFC17AirFlowSV"                                      BufferOffset="231"                                      Addr="D10462"                      Description="MFC17 air flow SV"                       />
		<AO_ITEM Index="240"    Name="AO_LSC1AirFlowSV"                                      BufferOffset="240"                                      Addr="D10480"                      Description="LSC1 air flow SV"                       />
		<AO_ITEM Index="241"    Name="AO_LSC2AirFlowSV"                                      BufferOffset="241"                                      Addr="D10482"                      Description="LSC2 air flow SV"                       />
		<AO_ITEM Index="1501"    Name="AO_APCZeroAdjustP1"                                      BufferOffset="1501"                                      Addr="D13002"                      Description="Zero adjust P1 (0:NO OPERATION,1:ADJUST)"                       />
		<AO_ITEM Index="1504"    Name="AO_APCZeroAdjustP2"                                      BufferOffset="1504"                                      Addr="D13008"                      Description="Zero adjust P2 (0:NO OPERATION,1:ADJUST)"                       />
		<AO_ITEM Index="1506"    Name="AO_APCSlowVacuumTargetPressure"                                      BufferOffset="1506"                                      Addr="D13012"                      Description="Slow vacuum control target vacuum pressure"                       />
		<AO_ITEM Index="1507"    Name="AO_APCValveStatusThreshold"                                      BufferOffset="1507"                                      Addr="D13014"                      Description="Valve status threshold(0.36~17.86)"                       />
		<AO_ITEM Index="1508"    Name="AO_APCForbidInterlockOutbreak"                                      BufferOffset="1508"                                      Addr="D13016"                      Description="Forbid interlock outbreak(0:enable,1:disable)"                       />
		<AO_ITEM Index="1509"    Name="AO_APCSlowVacuumModeSetting"                                      BufferOffset="1509"                                      Addr="D13018"                      Description="Slow vacuum mode setting(0:normal,1:short)"                       />
		<AO_ITEM Index="1510"    Name="AO_APCInterlock1"                                      BufferOffset="1510"                                      Addr="D13020"                      Description="Interlock1"                       />
		<AO_ITEM Index="1511"    Name="AO_APCInterlock2"                                      BufferOffset="1511"                                      Addr="D13022"                      Description="Interlock2"                       />
		<AO_ITEM Index="1512"    Name="AO_APCInterlock3"                                      BufferOffset="1512"                                      Addr="D13024"                      Description="Interlock3"                       />
		<AO_ITEM Index="1513"    Name="AO_APCInterlockConstantOfInterlock3"                                      BufferOffset="1513"                                      Addr="D13026"                      Description="Interlock constant of interlock3"                       />
		<AO_ITEM Index="1514"    Name="AO_APCP1SensorOffsetSetting"                                      BufferOffset="1514"                                      Addr="D13028"                      Description="P1 sensor offset setting"                       />
		<AO_ITEM Index="1515"    Name="AO_APCPosMonOffsetSetting"                                      BufferOffset="1515"                                      Addr="D13030"                      Description="Pos mon offset setting"                       />
		<AO_ITEM Index="1516"    Name="AO_APCSensorAdjustReset"                                      BufferOffset="1516"                                      Addr="D13032"                      Description="Sensor adjust reset"                       />
		<AO_ITEM Index="1517"    Name="AO_APCSlowVacuumRate"                                      BufferOffset="1517"                                      Addr="D13034"                      Description="Slow vacuum rate"                       />
		<AO_ITEM Index="1518"    Name="AO_APCSlowVacuumP"                                      BufferOffset="1518"                                      Addr="D13036"                      Description="P constant for slow vacuum control"                       />
		<AO_ITEM Index="1519"    Name="AO_APCSlowVacuumI"                                      BufferOffset="1519"                                      Addr="D13038"                      Description="I constant for slow vacuum control"                       />
		<AO_ITEM Index="1520"    Name="AO_APCSlowVacuumD"                                      BufferOffset="1520"                                      Addr="D13040"                      Description="D constant for slow vacuum control"                       />
		<AO_ITEM Index="1521"    Name="AO_APCSlowVacuumA"                                      BufferOffset="1521"                                      Addr="D13042"                      Description="a(sensor differential) constant for slow vacuum control "                       />
		<AO_ITEM Index="1522"    Name="AO_APCControllerModeSelect"                                      BufferOffset="1522"                                      Addr="D13044"                      Description="controller mode select(1~10分别代表Controller1-10)"                       />
		<AO_ITEM Index="1523"    Name="AO_APCSpecifyTargetVacuumPressureControl"                                      BufferOffset="1523"                                      Addr="D13046"                      Description="Specify target vacuum pressure control"                       />
		<AO_ITEM Index="1524"    Name="AO_APCSpecifyTargetOpeningForValveOpeningControl"                                      BufferOffset="1524"                                      Addr="D13048"                      Description="Specify target opening for valve opening control"                       />
		<AO_ITEM Index="1525"    Name="AO_APCSpecifyControlMode"                                      BufferOffset="1525"                                      Addr="D13050"                      Description="Specify control mode"                       />
		<AO_ITEM Index="1526"    Name="AO_APCRangeUpperLimitSensorInput"                                      BufferOffset="1526"                                      Addr="D13052"                      Description="Range Upper Limit Sensor Input 1(默认3）"                       />
		<AO_ITEM Index="1528"    Name="AO_APCController1"                                      BufferOffset="1528"                                      Addr="D13056"                      Description="Controller 1(number of entries)"                       />
		<AO_ITEM Index="1529"    Name="AO_APCController1P"                                      BufferOffset="1529"                                      Addr="D13058"                      Description="Controller 1 P"                       />
		<AO_ITEM Index="1530"    Name="AO_APCController1I"                                      BufferOffset="1530"                                      Addr="D13060"                      Description="Controller 1 I"                       />
		<AO_ITEM Index="1531"    Name="AO_APCController1D"                                      BufferOffset="1531"                                      Addr="D13062"                      Description="Controller 1 D"                       />
		<AO_ITEM Index="1532"    Name="AO_APCController1A"                                      BufferOffset="1532"                                      Addr="D13064"                      Description="Controller 1 A"                       />
		<AO_ITEM Index="1533"    Name="AO_APCController1CH"                                      BufferOffset="1533"                                      Addr="D13066"                      Description="CH(air pressure exhaust threshold value 1) for Process Controller 1"                       />
		<AO_ITEM Index="1534"    Name="AO_APCController1CL"                                      BufferOffset="1534"                                      Addr="D13068"                      Description="CL(air pressure exhaust threshold value 2) for Process Controller 1"                       />
		<AO_ITEM Index="1535"    Name="AO_APCController1Offset"                                      BufferOffset="1535"                                      Addr="D13070"                      Description="OFFSET for Pocess Controller 1"                       />
		<AO_ITEM Index="1537"    Name="AO_APCController2P"                                      BufferOffset="1537"                                      Addr="D13074"                      Description="Controller 2 P"                       />
		<AO_ITEM Index="1538"    Name="AO_APCController2I"                                      BufferOffset="1538"                                      Addr="D13076"                      Description="Controller 2 I"                       />
		<AO_ITEM Index="1539"    Name="AO_APCController2D"                                      BufferOffset="1539"                                      Addr="D13078"                      Description="Controller 2 D"                       />
		<AO_ITEM Index="1540"    Name="AO_APCController2A"                                      BufferOffset="1540"                                      Addr="D13080"                      Description="Controller 2 A"                       />
		<AO_ITEM Index="1541"    Name="AO_APCController2CH"                                      BufferOffset="1541"                                      Addr="D13082"                      Description="CH(air pressure exhaust threshold value 1) for Process Controller 2"                       />
		<AO_ITEM Index="1542"    Name="AO_APCController2CL"                                      BufferOffset="1542"                                      Addr="D13084"                      Description="CL(air pressure exhaust threshold value 2) for Process Controller 2"                       />
		<AO_ITEM Index="1543"    Name="AO_APCController2Offset"                                      BufferOffset="1543"                                      Addr="D13086"                      Description="OFFSET for Pocess Controller 2"                       />
		<AO_ITEM Index="1545"    Name="AO_APCController3P"                                      BufferOffset="1545"                                      Addr="D13090"                      Description="Controller 3 P"                       />
		<AO_ITEM Index="1546"    Name="AO_APCController3I"                                      BufferOffset="1546"                                      Addr="D13092"                      Description="Controller 3 I"                       />
		<AO_ITEM Index="1547"    Name="AO_APCController3D"                                      BufferOffset="1547"                                      Addr="D13094"                      Description="Controller 3 D"                       />
		<AO_ITEM Index="1548"    Name="AO_APCController3A"                                      BufferOffset="1548"                                      Addr="D13096"                      Description="Controller 3 A"                       />
		<AO_ITEM Index="1549"    Name="AO_APCController3CH"                                      BufferOffset="1549"                                      Addr="D13098"                      Description="CH(air pressure exhaust threshold value 1) for Process Controller 3"                       />
		<AO_ITEM Index="1550"    Name="AO_APCController3CL"                                      BufferOffset="1550"                                      Addr="D13100"                      Description="CL(air pressure exhaust threshold value 2) for Process Controller 3"                       />
		<AO_ITEM Index="1551"    Name="AO_APCController3Offset"                                      BufferOffset="1551"                                      Addr="D13102"                      Description="OFFSET for Pocess Controller 3"                       />
		<AO_ITEM Index="1553"    Name="AO_APCController4P"                                      BufferOffset="1553"                                      Addr="D13106"                      Description="Controller 4 P"                       />
		<AO_ITEM Index="1554"    Name="AO_APCController4I"                                      BufferOffset="1554"                                      Addr="D13108"                      Description="Controller 4 I"                       />
		<AO_ITEM Index="1555"    Name="AO_APCController4D"                                      BufferOffset="1555"                                      Addr="D13110"                      Description="Controller 4 D"                       />
		<AO_ITEM Index="1556"    Name="AO_APCController4A"                                      BufferOffset="1556"                                      Addr="D13112"                      Description="Controller 4 A"                       />
		<AO_ITEM Index="1557"    Name="AO_APCController4CH"                                      BufferOffset="1557"                                      Addr="D13114"                      Description="CH(air pressure exhaust threshold value 1) for Process Controller 4"                       />
		<AO_ITEM Index="1558"    Name="AO_APCController4CL"                                      BufferOffset="1558"                                      Addr="D13116"                      Description="CL(air pressure exhaust threshold value 2) for Process Controller 4"                       />
		<AO_ITEM Index="1559"    Name="AO_APCController4Offset"                                      BufferOffset="1559"                                      Addr="D13118"                      Description="OFFSET for Pocess Controller 4"                       />
		<AO_ITEM Index="1561"    Name="AO_APCController5P"                                      BufferOffset="1561"                                      Addr="D13122"                      Description="Controller 5 P"                       />
		<AO_ITEM Index="1562"    Name="AO_APCController5I"                                      BufferOffset="1562"                                      Addr="D13124"                      Description="Controller 5 I"                       />
		<AO_ITEM Index="1563"    Name="AO_APCController5D"                                      BufferOffset="1563"                                      Addr="D13126"                      Description="Controller 5 D"                       />
		<AO_ITEM Index="1564"    Name="AO_APCController5A"                                      BufferOffset="1564"                                      Addr="D13128"                      Description="Controller 5 A"                       />
		<AO_ITEM Index="1565"    Name="AO_APCController5CH"                                      BufferOffset="1565"                                      Addr="D13130"                      Description="CH(air pressure exhaust threshold value 1) for Process Controller 5"                       />
		<AO_ITEM Index="1566"    Name="AO_APCController5CL"                                      BufferOffset="1566"                                      Addr="D13132"                      Description="CL(air pressure exhaust threshold value 2) for Process Controller 5"                       />
		<AO_ITEM Index="1567"    Name="AO_APCController5Offset"                                      BufferOffset="1567"                                      Addr="D13134"                      Description="OFFSET for Pocess Controller 5"                       />
		<AO_ITEM Index="1569"    Name="AO_APCController6P"                                      BufferOffset="1569"                                      Addr="D13138"                      Description="Controller 6 P"                       />
		<AO_ITEM Index="1570"    Name="AO_APCController6I"                                      BufferOffset="1570"                                      Addr="D13140"                      Description="Controller 6 I"                       />
		<AO_ITEM Index="1571"    Name="AO_APCController6D"                                      BufferOffset="1571"                                      Addr="D13142"                      Description="Controller 6 D"                       />
		<AO_ITEM Index="1572"    Name="AO_APCController6A"                                      BufferOffset="1572"                                      Addr="D13144"                      Description="Controller 6 A"                       />
		<AO_ITEM Index="1573"    Name="AO_APCController6CH"                                      BufferOffset="1573"                                      Addr="D13146"                      Description="CH(air pressure exhaust threshold value 1) for Process Controller 6"                       />
		<AO_ITEM Index="1574"    Name="AO_APCController6CL"                                      BufferOffset="1574"                                      Addr="D13148"                      Description="CL(air pressure exhaust threshold value 2) for Process Controller 6"                       />
		<AO_ITEM Index="1575"    Name="AO_APCController6Offset"                                      BufferOffset="1575"                                      Addr="D13150"                      Description="OFFSET for Pocess Controller 6"                       />
		<AO_ITEM Index="1577"    Name="AO_APCController7P"                                      BufferOffset="1577"                                      Addr="D13154"                      Description="Controller 7 P"                       />
		<AO_ITEM Index="1578"    Name="AO_APCController7I"                                      BufferOffset="1578"                                      Addr="D13156"                      Description="Controller 7 I"                       />
		<AO_ITEM Index="1579"    Name="AO_APCController7D"                                      BufferOffset="1579"                                      Addr="D13158"                      Description="Controller 7 D"                       />
		<AO_ITEM Index="1580"    Name="AO_APCController7A"                                      BufferOffset="1580"                                      Addr="D13160"                      Description="Controller 7 A"                       />
		<AO_ITEM Index="1581"    Name="AO_APCController7CH"                                      BufferOffset="1581"                                      Addr="D13162"                      Description="CH(air pressure exhaust threshold value 1) for Process Controller 7"                       />
		<AO_ITEM Index="1582"    Name="AO_APCController7CL"                                      BufferOffset="1582"                                      Addr="D13164"                      Description="CL(air pressure exhaust threshold value 2) for Process Controller 7"                       />
		<AO_ITEM Index="1583"    Name="AO_APCController7Offset"                                      BufferOffset="1583"                                      Addr="D13166"                      Description="OFFSET for Pocess Controller 7"                       />
		<AO_ITEM Index="1585"    Name="AO_APCController8P"                                      BufferOffset="1585"                                      Addr="D13170"                      Description="Controller 8 P"                       />
		<AO_ITEM Index="1586"    Name="AO_APCController8I"                                      BufferOffset="1586"                                      Addr="D13172"                      Description="Controller 8 I"                       />
		<AO_ITEM Index="1587"    Name="AO_APCController8D"                                      BufferOffset="1587"                                      Addr="D13174"                      Description="Controller 8 D"                       />
		<AO_ITEM Index="1588"    Name="AO_APCController8A"                                      BufferOffset="1588"                                      Addr="D13176"                      Description="Controller 8 A"                       />
		<AO_ITEM Index="1589"    Name="AO_APCController8CH"                                      BufferOffset="1589"                                      Addr="D13178"                      Description="CH(air pressure exhaust threshold value 1) for Process Controller 8"                       />
		<AO_ITEM Index="1590"    Name="AO_APCController8CL"                                      BufferOffset="1590"                                      Addr="D13180"                      Description="CL(air pressure exhaust threshold value 2) for Process Controller 8"                       />
		<AO_ITEM Index="1591"    Name="AO_APCController8Offset"                                      BufferOffset="1591"                                      Addr="D13182"                      Description="OFFSET for Pocess Controller 8"                       />
		<AO_ITEM Index="1593"    Name="AO_APCController9P"                                      BufferOffset="1593"                                      Addr="D13186"                      Description="Controller 9 P"                       />
		<AO_ITEM Index="1594"    Name="AO_APCController9I"                                      BufferOffset="1594"                                      Addr="D13188"                      Description="Controller 9 I"                       />
		<AO_ITEM Index="1595"    Name="AO_APCController9D"                                      BufferOffset="1595"                                      Addr="D13190"                      Description="Controller 9 D"                       />
		<AO_ITEM Index="1596"    Name="AO_APCController9A"                                      BufferOffset="1596"                                      Addr="D13192"                      Description="Controller 9 A"                       />
		<AO_ITEM Index="1597"    Name="AO_APCController9CH"                                      BufferOffset="1597"                                      Addr="D13194"                      Description="CH(air pressure exhaust threshold value 1) for Process Controller 9"                       />
		<AO_ITEM Index="1598"    Name="AO_APCController9CL"                                      BufferOffset="1598"                                      Addr="D13196"                      Description="CL(air pressure exhaust threshold value 2) for Process Controller 9"                       />
		<AO_ITEM Index="1599"    Name="AO_APCController9Offset"                                      BufferOffset="1599"                                      Addr="D13198"                      Description="OFFSET for Pocess Controller 9"                       />
		<AO_ITEM Index="1601"    Name="AO_APCController10P"                                      BufferOffset="1601"                                      Addr="D13202"                      Description="Controller 10 P"                       />
		<AO_ITEM Index="1602"    Name="AO_APCController10I"                                      BufferOffset="1602"                                      Addr="D13204"                      Description="Controller 10 I"                       />
		<AO_ITEM Index="1603"    Name="AO_APCController10D"                                      BufferOffset="1603"                                      Addr="D13206"                      Description="Controller 10 D"                       />
		<AO_ITEM Index="1604"    Name="AO_APCController10A"                                      BufferOffset="1604"                                      Addr="D13208"                      Description="Controller 10 A"                       />
		<AO_ITEM Index="1605"    Name="AO_APCController10CH"                                      BufferOffset="1605"                                      Addr="D13210"                      Description="CH(air pressure exhaust threshold value 1) for Process Controller 10"                       />
		<AO_ITEM Index="1606"    Name="AO_APCController10CL"                                      BufferOffset="1606"                                      Addr="D13212"                      Description="CL(air pressure exhaust threshold value 2) for Process Controller 10"                       />
		<AO_ITEM Index="1607"    Name="AO_APCController10Offset"                                      BufferOffset="1607"                                      Addr="D13214"                      Description="OFFSET for Pocess Controller 10"                       />
		<AO_ITEM Index="1620"    Name="AO_MFC1RampTime"                                      BufferOffset="1620"                                      Addr="D13240"                      Description="MFC1 Ramp Time"                       />
		<AO_ITEM Index="1621"    Name="AO_MFC2RampTime"                                      BufferOffset="1621"                                      Addr="D13242"                      Description="MFC2 Ramp Time"                       />
		<AO_ITEM Index="1622"    Name="AO_MFC3RampTime"                                      BufferOffset="1622"                                      Addr="D13244"                      Description="MFC3 Ramp Time"                       />
		<AO_ITEM Index="1623"    Name="AO_MFC4RampTime"                                      BufferOffset="1623"                                      Addr="D13246"                      Description="MFC4 Ramp Time"                       />
		<AO_ITEM Index="1624"    Name="AO_MFC5RampTime"                                      BufferOffset="1624"                                      Addr="D13248"                      Description="MFC5 Ramp Time"                       />
		<AO_ITEM Index="1625"    Name="AO_MFC6RampTime"                                      BufferOffset="1625"                                      Addr="D13250"                      Description="MFC6 Ramp Time"                       />
		<AO_ITEM Index="1626"    Name="AO_MFC7RampTime"                                      BufferOffset="1626"                                      Addr="D13252"                      Description="MFC7 Ramp Time"                       />
		<AO_ITEM Index="1627"    Name="AO_MFC8RampTime"                                      BufferOffset="1627"                                      Addr="D13254"                      Description="MFC8 Ramp Time"                       />
		<AO_ITEM Index="1628"    Name="AO_MFC9RampTime"                                      BufferOffset="1628"                                      Addr="D13256"                      Description="MFC9 Ramp Time"                       />
		<AO_ITEM Index="1629"    Name="AO_MFC10RampTime"                                      BufferOffset="1629"                                      Addr="D13258"                      Description="MFC10 Ramp Time"                       />
		<AO_ITEM Index="1630"    Name="AO_MFC11RampTime"                                      BufferOffset="1630"                                      Addr="D13260"                      Description="MFC11 Ramp Time"                       />
		<AO_ITEM Index="1631"    Name="AO_MFC12RampTime"                                      BufferOffset="1631"                                      Addr="D13262"                      Description="MFC12 Ramp Time"                       />
		<AO_ITEM Index="1632"    Name="AO_MFC51RampTime"                                      BufferOffset="1632"                                      Addr="D13264"                      Description="MFC51 Ramp Time"                       />
		<AO_ITEM Index="1634"    Name="AO_MFC13RampTime"                                      BufferOffset="1634"                                      Addr="D13268"                      Description="MFC13 Ramp Time"                       />
		<AO_ITEM Index="1635"    Name="AO_MFC16RampTime"                                      BufferOffset="1635"                                      Addr="D13270"                      Description="MFC16 Ramp Time"                       />
		<AO_ITEM Index="1636"    Name="AO_MFC17RampTime"                                      BufferOffset="1636"                                      Addr="D13272"                      Description="MFC17 Ramp Time"                       />
		<AO_ITEM Index="1645"    Name="AO_LSC1RampTime"                                      BufferOffset="1645"                                      Addr="D13290"                      Description="LSC1 Ramp Time"                       />
		<AO_ITEM Index="1646"    Name="AO_LSC2RampTime"                                      BufferOffset="1646"                                      Addr="D13292"                      Description="LSC2 Ramp Time"                       />
		<AO_ITEM Index="1650"    Name="AO_UZoneCascadeTemp"                                      BufferOffset="1650"                                      Addr="D13300"                      Description="U Zone Cascade Temp"                       />
		<AO_ITEM Index="1651"    Name="AO_CUZoneCascadeTemp"                                      BufferOffset="1651"                                      Addr="D13302"                      Description="CU Zone Cascade Temp"                       />
		<AO_ITEM Index="1652"    Name="AO_CZoneCascadeTemp"                                      BufferOffset="1652"                                      Addr="D13304"                      Description="C Zone Cascade Temp"                       />
		<AO_ITEM Index="1653"    Name="AO_CLZoneCascadeTemp"                                      BufferOffset="1653"                                      Addr="D13306"                      Description="CL Zone Cascade Temp"                       />
		<AO_ITEM Index="1654"    Name="AO_LZoneCascadeTemp"                                      BufferOffset="1654"                                      Addr="D13308"                      Description="L Zone Cascade Temp"                       />
		<AO_ITEM Index="1655"    Name="AO_HeaterAllEnable"                                      BufferOffset="1655"                                      Addr="D13310"                      Description="Heater All Enable"                       />
		<AO_ITEM Index="1750"    Name="AO_CapHeaterTemp"                                      BufferOffset="1750"                                      Addr="D13500"                      Description="Cap heater Temp"                       />
		<AO_ITEM Index="1751"    Name="AO_RAXIS"                                      BufferOffset="1751"                                      Addr="D13502"                      Description="R AXIS"                       />
		<AO_ITEM Index="2000"    Name="AO_FOUPRobotActionCommand"                                      BufferOffset="2000"                                      Addr="D14000"                      Description="FOUP Robot Action Command"                       />
		<AO_ITEM Index="2001"    Name="AO_WaferRobotActionCommand"                                      BufferOffset="2001"                                      Addr="D14002"                      Description="Wafer Robot Action Command"                       />
	</Ana_Out>
</IO_DEFINE>