PMN2Purge.cs 18 KB

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  1. using Aitex.Core.RT.DataCenter;
  2. using Aitex.Core.RT.Device;
  3. using Aitex.Core.RT.Device.Unit;
  4. using Aitex.Core.RT.Log;
  5. using Aitex.Core.RT.SCCore;
  6. using Aitex.Core.Util;
  7. using DocumentFormat.OpenXml.Packaging;
  8. using FurnaceRT.Devices;
  9. using FurnaceRT.Equipments.PMs.Devices;
  10. using FurnaceRT.Extraction;
  11. using MECF.Framework.Common.CommonData.SorterDefines;
  12. using MECF.Framework.Common.Equipment;
  13. using System;
  14. using System.Collections.Generic;
  15. using System.Diagnostics;
  16. namespace FurnaceRT.Equipments.PMs
  17. {
  18. /// <summary>
  19. /// 分布类 定义N2Purge的执行逻辑
  20. /// </summary>
  21. public partial class PMModule
  22. {
  23. private R_TRIG _trigN2UpRD = new R_TRIG();
  24. private R_TRIG _trigN2DownRD = new R_TRIG();
  25. private R_TRIG _trigN2AirUpRD = new R_TRIG();
  26. private R_TRIG _trigN2AirDownRD = new R_TRIG();
  27. private R_TRIG _trigN2AirDownTwoRD = new R_TRIG();
  28. private R_TRIG _trigSelectN2PurgeModeD = new R_TRIG();
  29. private Dictionary<string, Tuple<R_TRIG, List<Tuple<IDevice, string>>>> _n2PurgeSequenceAction;
  30. private Dictionary<string, Func<bool>> _n2PurgeSequenceStatus;
  31. private Dictionary<string, R_TRIG> _rTrigDict;
  32. private N2PurgeModeEnum _N2PurgeMode = N2PurgeModeEnum.Auto;
  33. private double _n2PurgeData = 20;
  34. private double _n2ToAirData = 185000;
  35. private double _manualPhase2StabilityTime = 60;
  36. private double _manualPhase4StabilityTime = 60;
  37. private Dictionary<string, Stopwatch> _allTimeDict = new Dictionary<string, Stopwatch>();
  38. private void InitN2PurgeData()
  39. {
  40. DATA.Subscribe($"{Module}.O2DensityData", () => GetO2DensityData(), SubscriptionAttribute.FLAG.IgnoreSaveDB);
  41. DATA.Subscribe($"{Module}.CheckO2Location", () => GetCheckO2Location(), SubscriptionAttribute.FLAG.IgnoreSaveDB);
  42. DATA.Subscribe($"{Module}.O2SetCheckSetPoint", () => GetO2SetCheckSetPoint(), SubscriptionAttribute.FLAG.IgnoreSaveDB);
  43. DATA.Subscribe($"{Module}.N2PurgeMode", () => SC.ContainsItem("PM1.SelectN2PurgeMode") ? SC.GetStringValue("PM1.SelectN2PurgeMode") : "");
  44. }
  45. private void InitN2PurgeConfigData()
  46. {
  47. _n2PurgeData = SC.ContainsItem($"System.N2PurgeData") ? SC.GetValue<double>("System.N2PurgeData") : 20;
  48. _n2ToAirData = SC.ContainsItem($"System.N2PurgeData") ? SC.GetValue<double>("System.N2ToAirData") : 185000;
  49. _manualPhase2StabilityTime = SC.ContainsItem($"PM1.N2Purge.Manual_phase2.StabilityTime") ? SC.GetValue<double>("PM1.N2Purge.Manual_phase2.StabilityTime") : 60;
  50. _manualPhase4StabilityTime = SC.ContainsItem($"PM1.N2Purge.Manual_phase4.StabilityTime") ? SC.GetValue<double>("PM1.N2Purge.Manual_phase4.StabilityTime") : 60;
  51. _n2PurgeSequenceAction = ExtractionMethods.GetN2PurgeSequenceAction();
  52. _n2PurgeSequenceStatus = new Dictionary<string, Func<bool>>()
  53. {
  54. {"N2PurgeAIRTo20PPM",()=> GetN2PurgeAIRTo20PPMStatus()},
  55. {"N2PurgeUnder20PPM",()=> GetN2PurgeUnder20PPMStatus()},
  56. {"AIR",()=> GetN2PurgeAIRStatus()},
  57. {"DoorOpen",()=> GetN2PurgeDoorOpenStatus()},
  58. {"Foup1",()=> GetN2PurgeFoup1Status()},
  59. {"Foup2",()=> GetN2PurgeFoup2Status()},
  60. {N2PurgeModeEnum.Manual_phase1.ToString(),()=> GetN2PurgePhase1() },
  61. {N2PurgeModeEnum.Manual_phase2.ToString(),()=> GetN2PurgePhase2()},
  62. {N2PurgeModeEnum.Manual_phase3.ToString(),()=> GetN2PurgePhase3() },
  63. {N2PurgeModeEnum.Manual_phase4.ToString(),()=> GetN2PurgePhase4() },
  64. {N2PurgeModeEnum.Manual_phase5.ToString(),()=> GetN2PurgePhase5() },
  65. };
  66. _allTimeDict = new Dictionary<string, Stopwatch>()
  67. {
  68. {N2PurgeModeEnum.Manual_phase1.ToString(),new Stopwatch() },
  69. {N2PurgeModeEnum.Manual_phase2.ToString(),new Stopwatch()},
  70. {N2PurgeModeEnum.Manual_phase3.ToString(),new Stopwatch()},
  71. {N2PurgeModeEnum.Manual_phase4.ToString(),new Stopwatch() },
  72. {N2PurgeModeEnum.Manual_phase5.ToString(),new Stopwatch() }
  73. };
  74. _rTrigDict = new Dictionary<string, R_TRIG>();
  75. }
  76. private void MonitorN2Purge()
  77. {
  78. var selectN2PurgeMode = SC.ContainsItem("PM1.SelectN2PurgeMode") ? SC.GetStringValue("PM1.SelectN2PurgeMode") : "";
  79. if (string.IsNullOrEmpty(selectN2PurgeMode))
  80. {
  81. return;
  82. }
  83. SetN2PurgeModeAction(selectN2PurgeMode);
  84. }
  85. private void SetN2PurgeModeAction(string selectN2PurgeMode)
  86. {
  87. _N2PurgeMode = (N2PurgeModeEnum)Enum.Parse(typeof(N2PurgeModeEnum), selectN2PurgeMode);
  88. switch (_N2PurgeMode)
  89. {
  90. case N2PurgeModeEnum.Auto:
  91. // 自动模式下的操作
  92. break;
  93. case N2PurgeModeEnum.ManualMode:
  94. break;
  95. case N2PurgeModeEnum.N2PurgeMode:
  96. ProcessPhase(_trigN2UpRD, N2PurgeModeEnum.Manual_phase1.ToString());
  97. ProcessPhase(_trigN2DownRD, N2PurgeModeEnum.Manual_phase2.ToString(), true, (int)(_manualPhase2StabilityTime * 1000));
  98. break;
  99. case N2PurgeModeEnum.ATMMode:
  100. ProcessPhase(_trigN2AirDownRD, N2PurgeModeEnum.Manual_phase3.ToString());
  101. ProcessPhase(_trigN2AirUpRD, N2PurgeModeEnum.Manual_phase4.ToString(), true, (int)(_manualPhase4StabilityTime * 1000));
  102. ProcessPhase(_trigN2AirDownTwoRD, N2PurgeModeEnum.Manual_phase5.ToString());
  103. break;
  104. }
  105. }
  106. bool CheckConditionInTime(string modeKey, int millisecondsTimeout, Func<bool> condition)
  107. {
  108. var stopwatch = _allTimeDict[modeKey];
  109. if (!_allTimeDict[modeKey].IsRunning)
  110. {
  111. _allTimeDict[modeKey].Restart();
  112. }
  113. while (stopwatch.ElapsedMilliseconds < millisecondsTimeout)
  114. {
  115. if (!condition())
  116. {
  117. _allTimeDict[modeKey].Stop();
  118. _allTimeDict[modeKey].Reset();
  119. return false;
  120. }
  121. }
  122. if (stopwatch.ElapsedMilliseconds > millisecondsTimeout)
  123. {
  124. _allTimeDict[modeKey].Stop();
  125. _allTimeDict[modeKey].Reset();
  126. }
  127. return true;
  128. }
  129. private void ProcessPhase(R_TRIG r_TRIG, string modeKey, bool needCheck = false, int time = 0)
  130. {
  131. r_TRIG.CLK = needCheck ? (CheckConditionInTime(modeKey, time, () => _n2PurgeSequenceStatus[modeKey].Invoke())) : _n2PurgeSequenceStatus[modeKey].Invoke();
  132. if (r_TRIG.Q)
  133. {
  134. LOG.Info($"N2PurgeMode Trigger {modeKey}!,O2:{GetO2Density()},time:{_allTimeDict[modeKey].ElapsedMilliseconds}");
  135. SetN2PurgeValveData(modeKey);
  136. _allTimeDict[modeKey].Stop();
  137. _allTimeDict[modeKey].Reset();
  138. }
  139. }
  140. public void RestAllN2PrugeRD()
  141. {
  142. _trigN2AirDownRD.RST = false;
  143. _trigN2AirUpRD.RST = false;
  144. _trigN2DownRD.RST = false;
  145. _trigN2UpRD.RST = false;
  146. foreach (var item in _allTimeDict)
  147. {
  148. item.Value.Stop();
  149. item.Value.Reset();
  150. }
  151. }
  152. private void SetN2PurgeValveData(string mode)
  153. {
  154. var value = _n2PurgeSequenceAction[mode];
  155. foreach (var operateItem in value.Item2)
  156. {
  157. if (operateItem.Item1 is IoMFC)
  158. {
  159. var ioMFc = (operateItem.Item1 as IoMFC);
  160. { ioMFc.SetMfcValue(out _, 0, new object[] { float.Parse(operateItem.Item2.ToString()) }); }
  161. }
  162. if (operateItem.Item1 is IoValve)
  163. {
  164. var ioValve = (operateItem.Item1 as IoValve);
  165. ioValve.TurnValve(bool.Parse(operateItem.Item2), out _);
  166. }
  167. if (operateItem.Item1 is IoTrigger)
  168. {
  169. var ioTrigger = (operateItem.Item1 as IoTrigger);
  170. ioTrigger.CheckAndSet(bool.Parse(operateItem.Item2), out _);
  171. }
  172. }
  173. }
  174. private bool SetN2PurgeMode(out string reason, int time, object[] param)
  175. {
  176. reason = string.Empty;
  177. var mode = param[0].ToString();
  178. _N2PurgeMode = (N2PurgeModeEnum)Enum.Parse(typeof(N2PurgeModeEnum), mode);
  179. if (SC.ContainsItem("PM1.SelectN2PurgeMode"))
  180. {
  181. SC.SetItemValue("PM1.SelectN2PurgeMode", mode);
  182. }
  183. RestAllN2PrugeRD();
  184. return true;
  185. }
  186. /// <summary>
  187. /// 获取当前O2检测位置的设定值
  188. /// </summary>
  189. /// <returns></returns>
  190. private string GetO2SetCheckSetPoint()
  191. {
  192. if (SensorO2DetectSideLA != null && SensorO2DetectSideLA.Value)
  193. {
  194. var key = "PM1.N2Purge.N2PurgeLAO2CheckSV";
  195. if (SC.ContainsItem(key))
  196. return SC.GetValue<double>(key).ToString("f3");
  197. }
  198. if ((SensorO2DetectSideFIMS1 != null && SensorO2DetectSideFIMS1.Value) || (SensorO2DetectSideFIMS2 != null && SensorO2DetectSideFIMS2.Value))
  199. {
  200. var key = "PM1.N2Purge.N2PurgeFOUPO2CheckSV";
  201. if (SC.ContainsItem(key))
  202. return SC.GetValue<double>(key).ToString("f3");
  203. }
  204. return "";
  205. }
  206. /// <summary>
  207. /// 获取当前O2检测位置
  208. /// </summary>
  209. /// <returns></returns>
  210. private string GetCheckO2Location()
  211. {
  212. if (SensorO2DetectSideLA != null && SensorO2DetectSideLA.Value)
  213. return SensorO2DetectSideLA.Display;
  214. if (SensorO2DetectSideFIMS1 != null && SensorO2DetectSideFIMS1.Value)
  215. return SensorO2DetectSideFIMS1.Display;
  216. if (SensorO2DetectSideFIMS2 != null && SensorO2DetectSideFIMS2.Value)
  217. return SensorO2DetectSideFIMS2.Display;
  218. return "";
  219. }
  220. /// <summary>
  221. /// 获取当前O2浓度
  222. /// </summary>
  223. /// <returns></returns>
  224. private string GetO2DensityData()
  225. {
  226. var result = "";
  227. result = ConcentrationO2.FeedBack.ToString("f3");
  228. return result;
  229. }
  230. private double GetO2Density()
  231. {
  232. return ConcentrationO2.FeedBack;
  233. }
  234. private bool GetN2PurgePhase1()
  235. {
  236. return (GetO2Density() >= _n2PurgeData) && GetLADoorOpenStatus();
  237. }
  238. private bool GetN2PurgePhase2()
  239. {
  240. return (GetO2Density() < _n2PurgeData) && GetLADoorOpenStatus();
  241. }
  242. private bool GetN2PurgePhase3()
  243. {
  244. return GetO2Density() < _n2ToAirData && GetLADoorOpenStatus();
  245. }
  246. private bool GetN2PurgePhase5()
  247. {
  248. return GetO2Density() >= _n2ToAirData && !GetLADoorOpenStatus();
  249. }
  250. private bool GetN2PurgePhase4()
  251. {
  252. return GetO2Density() >= _n2ToAirData && GetLADoorOpenStatus();
  253. }
  254. private bool GetN2PurgeAIRTo20PPMStatus()
  255. {
  256. return ValveAV202.DOOpen.Value;
  257. }
  258. private bool GetN2PurgeUnder20PPMStatus(double value = 20)
  259. {
  260. return ConcentrationO2.Value < value;
  261. }
  262. private bool GetN2PurgeAIRStatus()
  263. {
  264. return ValveAV202.DOClose.Value && (AlarmSignalFilterBox1DoorSwitch != null ? !AlarmSignalFilterBox1DoorSwitch.Value : false);
  265. }
  266. private bool GetLADoorOpenStatus()
  267. {
  268. return (bool)(SensorLADoorSw1?.Value);
  269. }
  270. private bool GetN2PurgeDoorOpenStatus()
  271. {
  272. return ValveAV202.DOClose.Value && (AlarmSignalFilterBox1DoorSwitch != null ? !AlarmSignalFilterBox1DoorSwitch.Value : false);
  273. }
  274. private bool GetN2PurgeFoup1Status()
  275. {
  276. return GetN2PurgeAIRTo20PPMStatus() && GetN2PurgeUnder20PPMStatus() && FIMS1.IsFoupExist && FIMS1.CollisionAvoidanceUpDownStatus == DeviceStatus.Down;
  277. }
  278. private bool GetN2PurgeFoup2Status()
  279. {
  280. return GetN2PurgeAIRTo20PPMStatus() && GetN2PurgeUnder20PPMStatus() && FIMS2.IsFoupExist && FIMS2.CollisionAvoidanceUpDownStatus == DeviceStatus.Down; ;
  281. }
  282. public void SetN2PurgeLAO2CheckFirstEnable(bool isEable)
  283. {
  284. if (TrigN2PurgeLAO2CheckFirstEnable != null && TrigN2PurgeLAO2CheckFirstEnable.Value != isEable)
  285. {
  286. TrigN2PurgeLAO2CheckFirstEnable.SetTrigger(isEable, out _);
  287. }
  288. }
  289. public void SetN2PurgeFIMS1O2CheckEnable(ModuleName fims, bool isEable)
  290. {
  291. if (fims == ModuleName.FIMS1 && TrigN2PurgeFIMS1O2CheckEnable != null && TrigN2PurgeFIMS1O2CheckEnable.Value != isEable)
  292. {
  293. TrigN2PurgeFIMS1O2CheckEnable.SetTrigger(isEable, out _);
  294. }
  295. if (fims == ModuleName.FIMS2 && TrigN2PurgeFIMS2O2CheckEnable != null && TrigN2PurgeFIMS2O2CheckEnable.Value != isEable)
  296. {
  297. TrigN2PurgeFIMS2O2CheckEnable.SetTrigger(isEable, out _);
  298. }
  299. }
  300. public void SetN2PurgeProcess(bool isEable)
  301. {
  302. if (TrigN2PurgeProcess != null && TrigN2PurgeProcess.Value != isEable)
  303. {
  304. TrigN2PurgeProcess.SetTrigger(isEable, out _);
  305. }
  306. }
  307. public void SetN2PurgeLAO2CheckSV(float value)
  308. {
  309. if (TrigN2PurgeLAO2CheckSV != null)
  310. TrigN2PurgeLAO2CheckSV?.SetAOTrigger(value, out _);
  311. }
  312. public void SetN2PurgeFOUPO2CheckSV(float value)
  313. {
  314. if (TrigN2PurgeFOUPO2CheckSV != null)
  315. TrigN2PurgeFOUPO2CheckSV?.SetAOTrigger(value, out _);
  316. }
  317. public void SetAVParameter(ModuleName fims, bool isEable)
  318. {
  319. if (fims == ModuleName.FIMS1)
  320. {
  321. var avValve58 = DEVICE.GetDevice<IoValve>($"{ModuleName.PM1}.ValveAV58");
  322. avValve58?.TurnValve(isEable, out _);
  323. }
  324. if (fims == ModuleName.FIMS2)
  325. {
  326. var avValve59 = DEVICE.GetDevice<IoValve>($"{ModuleName.PM1}.ValveAV59");
  327. avValve59?.TurnValve(isEable, out _);
  328. }
  329. }
  330. /// <summary>
  331. /// N2Purge相关时间参数,电气要求设定为秒,实际下发按照毫秒
  332. /// </summary>
  333. public void SetN2PurgeParameters()
  334. {
  335. if (SC.ContainsItem("PM1.N2Purge.TransferRoomArrivalWaitTime") && TrigN2PurgeLAO2CheckTime != null)
  336. {
  337. var time = (float)SC.GetValue<double>("PM1.N2Purge.TransferRoomArrivalWaitTime") * 1000;
  338. TrigN2PurgeLAO2CheckTime.SetAOTrigger(time, out _);
  339. }
  340. if (SC.ContainsItem("PM1.N2Purge.TransferRoomStableWaitTime") && TrigN2PurgeLAO2OverTime != null)
  341. {
  342. var time = (float)SC.GetValue<double>("PM1.N2Purge.TransferRoomStableWaitTime") * 1000;
  343. TrigN2PurgeLAO2OverTime.SetAOTrigger(time, out _);
  344. }
  345. if (SC.ContainsItem("PM1.N2Purge.FOUPOpenerArrivalWaitTime") && TrigN2PurgeFOUPO2CheckTime != null)
  346. {
  347. var time = (float)SC.GetValue<double>("PM1.N2Purge.FOUPOpenerArrivalWaitTime") * 1000;
  348. TrigN2PurgeFOUPO2CheckTime.SetAOTrigger(time, out _);
  349. }
  350. if (SC.ContainsItem("PM1.N2Purge.FOUPOpenerStableWaitTime") && TrigN2PurgeFOUPO2OverTime != null)
  351. {
  352. var time = (float)SC.GetValue<double>("PM1.N2Purge.FOUPOpenerStableWaitTime") * 1000;
  353. TrigN2PurgeFOUPO2OverTime.SetAOTrigger(time, out _);
  354. }
  355. if (SC.ContainsItem("PM1.N2Purge.O2DetectorTransferRoomToFOUPTime") && TrigN2PurgeExchangeLATOFOUPWaitTime != null)
  356. {
  357. var time = (float)SC.GetValue<double>("PM1.N2Purge.O2DetectorTransferRoomToFOUPTime") * 1000;
  358. TrigN2PurgeExchangeLATOFOUPWaitTime.SetAOTrigger(time, out _);
  359. }
  360. if (SC.ContainsItem("PM1.N2Purge.O2DetectorFOUPToTransferRoomTime") && TrigN2PurgeExchangeFOUPTOLAWaitTime != null)
  361. {
  362. var time = (float)SC.GetValue<double>("PM1.N2Purge.O2DetectorFOUPToTransferRoomTime") * 1000;
  363. TrigN2PurgeExchangeFOUPTOLAWaitTime.SetAOTrigger(time, out _);
  364. }
  365. if (SC.ContainsItem("PM1.N2Purge.O2DetectorFOUPToFOUPTime") && TrigN2PurgeExchangeFOUPTOFOUPWaitTime != null)
  366. {
  367. var time = (float)SC.GetValue<double>("PM1.N2Purge.O2DetectorFOUPToFOUPTime") * 1000;
  368. TrigN2PurgeExchangeFOUPTOFOUPWaitTime.SetAOTrigger(time, out _);
  369. }
  370. }
  371. public void InitN2PurgeMode(string n2PurgeModeStr, bool isN2Purge)
  372. {
  373. if (SC.ContainsItem("PM1.RecipeRelevancyN2Purge") && SC.GetValue<bool>("PM1.RecipeRelevancyN2Purge") && SC.ContainsItem("PM1.SelectN2PurgeMode"))
  374. {
  375. if (!isN2Purge)
  376. {
  377. SC.SetItemValueFromString("PM1.SelectN2PurgeMode", N2PurgeModeEnum.ManualMode.ToString());
  378. }
  379. else
  380. {
  381. var setValue = GetN2PurgeModeEnumByStr(n2PurgeModeStr);
  382. SC.SetItemValueFromString("PM1.SelectN2PurgeMode", setValue);
  383. }
  384. RestAllN2PrugeRD();
  385. }
  386. }
  387. }
  388. }