AutoTransfer.cs 344 KB

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  1. using Aitex.Common.Util;
  2. using Aitex.Core.Common;
  3. using Aitex.Core.RT.Device;
  4. using Aitex.Core.RT.Event;
  5. using Aitex.Core.RT.Routine;
  6. using Aitex.Core.RT.SCCore;
  7. using Aitex.Core.Util;
  8. using Aitex.Sorter.Common;
  9. using MECF.Framework.Common.Equipment;
  10. using MECF.Framework.Common.SubstrateTrackings;
  11. using System;
  12. using System.Collections.Generic;
  13. using System.IO;
  14. using System.Linq;
  15. using System.Text;
  16. using System.Threading.Tasks;
  17. using FurnaceRT.Equipments.CarrierRobots;
  18. using FurnaceRT.Equipments.PMs.RecipeExecutions;
  19. using FurnaceRT.Equipments.Schedulers;
  20. using FurnaceRT.Equipments.Systems;
  21. using FurnaceRT.Equipments.WaferRobots;
  22. using MECF.Framework.Common.Jobs;
  23. using Aitex.Core.RT.Log;
  24. using MECF.Framework.Common.DBCore;
  25. using Aitex.Core.RT.DataCenter;
  26. using System.Diagnostics;
  27. using FurnaceRT.Equipments.PMs;
  28. using MECF.Framework.Common.Schedulers;
  29. using System.Windows.Input;
  30. using System.Net.Sockets;
  31. using FurnaceRT.Equipments.FIMSs;
  32. using FurnaceRT.Devices;
  33. using System.Text.RegularExpressions;
  34. using MECF.Framework.Common.CommonData;
  35. using FurnaceRT.Equipments.Boats;
  36. using MECF.Framework.FA.Core.FAControl;
  37. using MECF.Framework.UI.Client.CenterViews.Operations.FA;
  38. using FurnaceRT.Equipments.LPs;
  39. using MECF.Framework.Common.CommonData.EnumData;
  40. using MECF.Framework.Common.DataCenter;
  41. using DocumentFormat.OpenXml.Drawing.Charts;
  42. using MECF.Framework.Common.Utilities;
  43. using System.Threading;
  44. using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.PMs;
  45. using System.Reflection;
  46. using MECF.Framework.UI.Client.CenterViews.Editors.Recipe;
  47. namespace FurnaceRT.Equipments.Jobs
  48. {
  49. public class AutoTransfer : SchedulerModuleFactory
  50. {
  51. private List<ControlJobInfo> _lstControlJobs = new List<ControlJobInfo>();
  52. private List<ProcessJobInfo> _lstProcessJobs = new List<ProcessJobInfo>();
  53. public List<ProcessJobInfo> LstProcessJobs => _lstProcessJobs;
  54. //private Object _locker = new Object();
  55. private const string LogSource = "Scheduler";
  56. System.Timers.Timer timer = null;
  57. private bool _isCycleMode;
  58. private int _cycleSetPoint = 0;
  59. private int _cycledCount = 0;
  60. private int _cycledWafer = 0;
  61. private int _cycledTotalWafer = 0;
  62. private int _cycleTime;
  63. private int _cycleTimeSecond = 0;
  64. private Stopwatch _coolTimer = new Stopwatch();
  65. private SchedulerFACallback _faCallback;
  66. private SchedulerDBCallback _dbCallback;
  67. private ProcessJobInfo _secondPj;
  68. private Dictionary<string, int> _sideDummyWafers = new Dictionary<string, int>();
  69. private Dictionary<string, int> _extraDummyWafers = new Dictionary<string, int>();
  70. private List<int> _sideDummySlots = new List<int>();
  71. private List<int> _extraDummySlots = new List<int>();
  72. private List<int> _productSlots = new List<int>();
  73. private List<int> _monitor1Slots = new List<int>();
  74. private List<int> _monitor2Slots = new List<int>();
  75. private List<int> _tSlots = new List<int>();//expert mode
  76. private List<int> _xdSlots = new List<int>();//expert mode
  77. private List<SchedulerStocker> _lstCurrentPjStocker = new List<SchedulerStocker>();
  78. private Dictionary<string, R_TRIG> _chargeRuleAlarmTrigDic = new Dictionary<string, R_TRIG>();
  79. private Dictionary<string, R_TRIG> _waferStatusAlarmTrigDic = new Dictionary<string, R_TRIG>();
  80. private Dictionary<string, R_TRIG> _dummyWaferCheckTrigDic = new Dictionary<string, R_TRIG>();
  81. private Dictionary<string, R_TRIG> _logTrigDic = new Dictionary<string, R_TRIG>();
  82. private bool _isCoolingSkip = false;
  83. public bool HasJobRunning
  84. {
  85. get { return _lstControlJobs.Count > 0; }
  86. }
  87. public AutoTransfer()
  88. {
  89. _faCallback = new SchedulerFACallback();
  90. _dbCallback = new SchedulerDBCallback();
  91. InitModule();
  92. _cycledTotalWafer = SC.ContainsItem("System.TotalCycledWafer")
  93. ? SC.GetValue<int>("System.TotalCycledWafer")
  94. : 0;
  95. DATA.Subscribe("Scheduler.CycledCount", () => _cycledCount);
  96. DATA.Subscribe("Scheduler.CycledWafer", () => _cycledWafer);
  97. DATA.Subscribe("Scheduler.CycleSetPoint", () => _cycleSetPoint);
  98. DATA.Subscribe("Scheduler.CycledTotalWafer", () => _cycledTotalWafer);
  99. DATA.Subscribe("Scheduler.SecondPj", () => new List<ProcessJobInfo>() { _secondPj });
  100. DATA.Subscribe("Scheduler.PjIdList", () => Array.ConvertAll(_lstProcessJobs.ToArray(), x => x.InnerId.ToString()).ToList());
  101. DATA.Subscribe($"LP1.LocalJobName", () =>
  102. {
  103. var cj = _lstControlJobs.FirstOrDefault(x => x.Module == "LP1");
  104. if (cj != null)
  105. return cj.Name;
  106. return "";
  107. });
  108. DATA.Subscribe($"LP2.LocalJobStatus", () =>
  109. {
  110. var cj = _lstControlJobs.FirstOrDefault(x => x.Module == "LP2");
  111. if (cj != null)
  112. return cj.State.ToString();
  113. return "";
  114. });
  115. DATA.Subscribe($"Scheduler.CurrentControlJob", () =>
  116. {
  117. var cj = _lstControlJobs.Find(x => x.State == EnumControlJobState.Executing);
  118. return cj;
  119. });
  120. DATA.Subscribe($"Scheduler.CurrentProcessJob", () =>
  121. {
  122. var pj = _lstProcessJobs.Find(x => x.State == EnumProcessJobState.Processing || x.State == EnumProcessJobState.Paused);
  123. return pj;
  124. });
  125. DATA.Subscribe($"Scheduler.ControlJobList", () =>
  126. {
  127. return _lstControlJobs;
  128. });
  129. DATA.Subscribe($"Scheduler.ProcessJobList", () =>
  130. {
  131. return _lstProcessJobs;
  132. });
  133. DATA.Subscribe($"Scheduler.CoolingTime", () =>
  134. {
  135. var pj = _lstProcessJobs.Find(x => x.State == EnumProcessJobState.Processing || x.State == EnumProcessJobState.Paused);
  136. return pj != null ? pj.CoolTimeSec : 0;
  137. });
  138. DATA.Subscribe($"Scheduler.CoolingRemainTime", () =>
  139. {
  140. var pj = _lstProcessJobs.Find(x => x.State == EnumProcessJobState.Processing || x.State == EnumProcessJobState.Paused);
  141. var coolTime = pj != null ? pj.CoolTimeSec : 0;
  142. if (_coolTimer.IsRunning)
  143. return (coolTime - _coolTimer.ElapsedMilliseconds / 1000) > 0 ? Convert.ToInt32(coolTime - _coolTimer.ElapsedMilliseconds / 1000) : 0;
  144. return coolTime;
  145. });
  146. DATA.Subscribe($"Scheduler.StockerUseSlots", () =>
  147. {
  148. Dictionary<string, string> stockerUseSlots = new Dictionary<string, string>();
  149. if (!_lstProcessJobs.Any())
  150. return stockerUseSlots;
  151. foreach (var pj in _lstProcessJobs)
  152. {
  153. if (pj.Stockers != null)
  154. {
  155. foreach (var stocker in pj.Stockers)
  156. {
  157. if (!stockerUseSlots.ContainsKey(stocker.Item1))
  158. stockerUseSlots.Add(stocker.Item1, string.Join(",", stocker.Item3));
  159. else
  160. {
  161. var value = stockerUseSlots[stocker.Item1];
  162. stockerUseSlots[stocker.Item1] = $"{value},{string.Join(",", stocker.Item3)}";
  163. }
  164. }
  165. }
  166. }
  167. return stockerUseSlots;
  168. });
  169. }
  170. public void Clear()
  171. {
  172. _carrierRobot.ResetTask();
  173. _waferRobot.ResetTask();
  174. foreach (var pm in _lstPms)
  175. {
  176. pm.ResetTask();
  177. }
  178. foreach (var lp in _lstLPs)
  179. {
  180. lp.ResetTask();
  181. }
  182. foreach (var fims in _lstFIMSs)
  183. {
  184. fims.ResetTask();
  185. }
  186. _lstControlJobs.Clear();
  187. _lstProcessJobs.Clear();
  188. _isCoolingSkip = false;
  189. }
  190. public void ResetTask(ModuleName module)
  191. {
  192. if (module == _carrierRobot.Module)
  193. _carrierRobot.ResetTask();
  194. if (module == _waferRobot.Module)
  195. _waferRobot.ResetTask();
  196. foreach (var lp in _lstLPs)
  197. {
  198. if (module == _carrierRobot.Module)
  199. lp.ResetTask();
  200. }
  201. foreach (var fims in _lstFIMSs)
  202. {
  203. if (module == _carrierRobot.Module)
  204. fims.ResetTask();
  205. }
  206. }
  207. #region Job Management
  208. public Result CreateJob(params object[] objs)
  209. {
  210. _isCycleMode = SC.GetValue<bool>("System.IsCycleMode");
  211. _cycleSetPoint = _isCycleMode ? SC.GetValue<int>("System.CycleCount") : 0;
  212. if (_isCycleMode)
  213. {
  214. _cycledWafer = 0;
  215. _cycledCount = 0;
  216. }
  217. if (objs == null || objs.Length == 0)
  218. {
  219. Singleton<EquipmentManager>.Instance.ChargeWaferJobStartFailedWarning.Set("Parameter not valid");
  220. return Result.FAIL;
  221. }
  222. var param = (Dictionary<string, object>)objs[0];
  223. if (param == null)
  224. {
  225. Singleton<EquipmentManager>.Instance.ChargeWaferJobStartFailedWarning.Set("Parameter not valid");
  226. return Result.FAIL;
  227. }
  228. var content = "";
  229. foreach (var key in param.Keys)
  230. {
  231. content += $"{key}-{param[key]}#";
  232. }
  233. LOG.Write($"Control Job: {content}");
  234. if (!Singleton<EquipmentManager>.Instance.GetJobRecipeInfor((string)param["JobRecipe"], out string processRecipe, out string layoutRecipe, out int coolTime, out string reason))
  235. {
  236. Singleton<EquipmentManager>.Instance.ChargeWaferJobStartFailedWarning.Set(reason);
  237. return Result.FAIL;
  238. }
  239. if (string.IsNullOrEmpty(layoutRecipe))
  240. {
  241. Singleton<EquipmentManager>.Instance.ChargeWaferJobStartFailedWarning.Set("Parameter not valid, Layout Recipe is null");
  242. return Result.FAIL;
  243. }
  244. var path = $"{PathManager.GetRecipeDir()}\\{SC.GetStringValue("System.Recipe.SupportedChamberType")}\\Layout\\{layoutRecipe}.rcp";
  245. if (!File.Exists(path))
  246. {
  247. Singleton<EquipmentManager>.Instance.ChargeWaferJobStartFailedWarning.Set($"Layout \"{layoutRecipe}\" not exist.");
  248. return Result.FAIL;
  249. }
  250. path = $"{PathManager.GetRecipeDir()}\\{SC.GetStringValue("System.Recipe.SupportedChamberType")}\\Process\\{processRecipe}.rcp";
  251. if (!File.Exists(path))
  252. {
  253. Singleton<EquipmentManager>.Instance.ChargeWaferJobStartFailedWarning.Set($"Process recipe \"{processRecipe}\" not exist.");
  254. return Result.FAIL;
  255. }
  256. if (!RecipeParser.Parse(processRecipe, ModuleName.PM1.ToString(), out var recipeHead, out var recipeSteps, out reason, "Process"))
  257. {
  258. Singleton<EquipmentManager>.Instance.ChargeWaferJobStartFailedWarning.Set($"Load process recipe {processRecipe} failed, {reason}");
  259. return Result.FAIL;
  260. }
  261. List<Tuple<string, string, List<int>>> useStockers = new List<Tuple<string, string, List<int>>>();
  262. if (RecipeParser.LayoutRecipeParse(layoutRecipe, ModuleName.PM1.ToString(), out RecipeLayoutEntityNormal layoutRecipeDataNormal, out RecipeLayoutEntityExpert layoutRecipeDataExpert, out reason))
  263. {
  264. if (param.ContainsKey("CarrierPara"))
  265. {
  266. //Stocker1,P_00000036,25,Exist,1111111111111111111111111,LP1;Stocker2,P_00000037,25,Exist,1111111111111111111111111,LP2
  267. var paras = param["CarrierPara"].ToString().Split(';');
  268. if (paras != null && paras.Length > 0)
  269. {
  270. foreach (var item in paras)
  271. {
  272. //Stocker13,,21/22/23/24/25"
  273. var arry = item.Split(',');
  274. if (arry != null && arry.Length >= 2)
  275. {
  276. var pStocker = GetModule(arry[0]) as SchedulerStocker;
  277. if (pStocker != null && (SC.GetStringValue($"System.Stocker.{arry[0]}WaferType").Contains("P") || SC.GetStringValue($"System.Stocker.{arry[0]}WaferType").Contains("None")))
  278. {
  279. var slots = new List<int>();
  280. if (arry.Length >= 3)
  281. {
  282. var slotParas = arry[2].Split('/').ToList();
  283. if (slotParas != null && slotParas.Count > 0)
  284. {
  285. foreach (var slotPara in slotParas)
  286. {
  287. var ret = int.TryParse(slotPara, out int slot);
  288. if (ret && slot - 1 >= 0 && !slots.Any(x => x == slot - 1))
  289. {
  290. if (_lstProcessJobs.Any())
  291. {
  292. foreach (var job in _lstProcessJobs)
  293. {
  294. if (job.Stockers.Any(x => x.Item1 == arry[0] && x.Item3.Contains(slot - 1)))
  295. {
  296. Singleton<EquipmentManager>.Instance.ChargeWaferJobStartFailedWarning.Set($"Create job failed, already contains {arry[0]}.{slot} in previous process job");
  297. return Result.FAIL;
  298. }
  299. }
  300. }
  301. slots.Add(slot - 1);
  302. }
  303. }
  304. }
  305. }
  306. useStockers.Add(Tuple.Create(arry[0], arry[1], slots));
  307. }
  308. }
  309. }
  310. }
  311. }
  312. if (param.ContainsKey("mCarrierPara"))
  313. {
  314. //Stocker14,P_00000014;Stocker15,P_00000015
  315. var paras = param["mCarrierPara"].ToString().Split(';');
  316. if (paras != null && paras.Length > 0)
  317. {
  318. if (!string.IsNullOrEmpty(paras[0]))
  319. {
  320. foreach (var item in paras)
  321. {
  322. var arry = item.Split(',');
  323. if (arry != null && arry.Length >= 2)
  324. {
  325. var mStocker = GetModule(arry[0]) as SchedulerStocker;
  326. if (mStocker != null && SC.GetStringValue($"System.Stocker.{arry[0]}WaferType").Contains("M"))
  327. {
  328. var slots = new List<int>();
  329. if (arry.Length >= 3)
  330. {
  331. var slotParas = arry[2].Split('/').ToList();
  332. if (slotParas != null && slotParas.Count > 0)
  333. {
  334. foreach (var slotPara in slotParas)
  335. {
  336. var ret = int.TryParse(slotPara, out int slot);
  337. if (ret && slot - 1 >= 0 && !slots.Any(x => x == slot - 1))
  338. {
  339. if (_lstProcessJobs.Any())
  340. {
  341. foreach (var job in _lstProcessJobs)
  342. {
  343. if (job.Stockers.Any(x => x.Item1 == arry[0] && x.Item3.Contains(slot - 1)))
  344. {
  345. Singleton<EquipmentManager>.Instance.ChargeWaferJobStartFailedWarning.Set($"Create job failed, already contains {arry[0]}.{slot} in previous process job");
  346. return Result.FAIL;
  347. }
  348. }
  349. }
  350. slots.Add(slot - 1);
  351. }
  352. }
  353. }
  354. }
  355. useStockers.Add(Tuple.Create(arry[0], arry[1], slots));
  356. }
  357. }
  358. }
  359. }
  360. }
  361. }
  362. if (param.ContainsKey("m1CarrierPara"))
  363. {
  364. //Stocker14,P_00000014;Stocker15,P_00000015
  365. var paras = param["m1CarrierPara"].ToString().Split(';');
  366. if (paras != null && paras.Length > 0)
  367. {
  368. if (!string.IsNullOrEmpty(paras[0]))
  369. {
  370. foreach (var item in paras)
  371. {
  372. var arry = item.Split(',');
  373. if (arry != null && arry.Length >= 2)
  374. {
  375. var mStocker = GetModule(arry[0]) as SchedulerStocker;
  376. if (mStocker != null && (SC.GetStringValue($"System.Stocker.{arry[0]}WaferType").Contains("M1") || SC.GetStringValue($"System.Stocker.{arry[0]}WaferType").Contains("None")))
  377. {
  378. var slots = new List<int>();
  379. if (arry.Length >= 3)
  380. {
  381. var slotParas = arry[2].Split('/').ToList();
  382. if (slotParas != null && slotParas.Count > 0)
  383. {
  384. foreach (var slotPara in slotParas)
  385. {
  386. var ret = int.TryParse(slotPara, out int slot);
  387. if (ret && slot - 1 >= 0 && !slots.Any(x => x == slot - 1))
  388. {
  389. if (_lstProcessJobs.Any())
  390. {
  391. foreach (var job in _lstProcessJobs)
  392. {
  393. if (job.Stockers.Any(x => x.Item1 == arry[0] && x.Item3.Contains(slot - 1)))
  394. {
  395. Singleton<EquipmentManager>.Instance.ChargeWaferJobStartFailedWarning.Set($"Create job failed, already contains {arry[0]}.{slot} in previous process job");
  396. return Result.FAIL;
  397. }
  398. }
  399. }
  400. slots.Add(slot - 1);
  401. }
  402. }
  403. }
  404. }
  405. useStockers.Add(Tuple.Create(arry[0], arry[1], slots));
  406. }
  407. }
  408. }
  409. }
  410. }
  411. }
  412. if (param.ContainsKey("m2CarrierPara"))
  413. {
  414. //Stocker14,P_00000014;Stocker15,P_00000015
  415. var paras = param["m2CarrierPara"].ToString().Split(';');
  416. if (paras != null && paras.Length > 0)
  417. {
  418. if (!string.IsNullOrEmpty(paras[0]))
  419. {
  420. foreach (var item in paras)
  421. {
  422. var arry = item.Split(',');
  423. if (arry != null && arry.Length >= 2)
  424. {
  425. var mStocker = GetModule(arry[0]) as SchedulerStocker;
  426. if (mStocker != null && (SC.GetStringValue($"System.Stocker.{arry[0]}WaferType").Contains("M2") || SC.GetStringValue($"System.Stocker.{arry[0]}WaferType").Contains("None")))
  427. {
  428. var slots = new List<int>();
  429. if (arry.Length >= 3)
  430. {
  431. var slotParas = arry[2].Split('/').ToList();
  432. if (slotParas != null && slotParas.Count > 0)
  433. {
  434. foreach (var slotPara in slotParas)
  435. {
  436. var ret = int.TryParse(slotPara, out int slot);
  437. if (ret && slot - 1 >= 0 && !slots.Any(x => x == slot - 1))
  438. {
  439. if (_lstProcessJobs.Any())
  440. {
  441. foreach (var job in _lstProcessJobs)
  442. {
  443. if (job.Stockers.Any(x => x.Item1 == arry[0] && x.Item3.Contains(slot - 1)))
  444. {
  445. Singleton<EquipmentManager>.Instance.ChargeWaferJobStartFailedWarning.Set($"Create job failed, already contains {arry[0]}.{slot} in previous process job");
  446. return Result.FAIL;
  447. }
  448. }
  449. }
  450. slots.Add(slot - 1);
  451. }
  452. }
  453. }
  454. }
  455. useStockers.Add(Tuple.Create(arry[0], arry[1], slots));
  456. }
  457. }
  458. }
  459. }
  460. }
  461. }
  462. useStockers.Sort(compare);
  463. foreach (var s in _lstSideDummyStocker)
  464. {
  465. if (CarrierManager.Instance.CheckHasCarrier(s.Module, 0) && CarrierManager.Instance.GetCarrier(s.Module, 0).CarrierType == CarrierType.SD)
  466. useStockers.Add(Tuple.Create(s.Module.ToString(), CarrierManager.Instance.GetCarrier(s.Module, 0).CarrierId, new List<int>()));
  467. else
  468. {
  469. bool onRobot = false;
  470. if (CarrierManager.Instance.CheckHasCarrier(ModuleName.CarrierRobot, 0))
  471. {
  472. var carrier = CarrierManager.Instance.GetCarrier(ModuleName.CarrierRobot, 0);
  473. if (carrier.CarrierType == CarrierType.SD &&
  474. carrier.InternalModuleName == s.Module)
  475. {
  476. useStockers.Add(Tuple.Create(s.Module.ToString(), carrier.CarrierId, new List<int>()));
  477. onRobot = true;
  478. }
  479. }
  480. if (!onRobot)
  481. {
  482. bool inFIMS = false;
  483. foreach (var fims in _lstFIMSs)
  484. {
  485. if (!fims.IsOnline)
  486. continue;
  487. var carrier = CarrierManager.Instance.GetCarrier(fims.Module, 0);
  488. if (!carrier.IsEmpty && carrier.CarrierType == CarrierType.SD &&
  489. carrier.InternalModuleName == s.Module)
  490. {
  491. inFIMS = true;
  492. useStockers.Add(Tuple.Create(s.Module.ToString(), carrier.CarrierId, new List<int>()));
  493. }
  494. }
  495. if (!inFIMS && CarrierManager.Instance.GetLocationByInternalCarrierModuleName(s.Module, CarrierType.SD) != null)
  496. useStockers.Add(Tuple.Create(s.Module.ToString(), "", new List<int>()));
  497. }
  498. }
  499. }
  500. foreach (var s in _lstExtraDummyStocker)
  501. {
  502. if (CarrierManager.Instance.CheckHasCarrier(s.Module, 0) && CarrierManager.Instance.GetCarrier(s.Module, 0).CarrierType == CarrierType.ED)
  503. useStockers.Add(Tuple.Create(s.Module.ToString(), CarrierManager.Instance.GetCarrier(s.Module, 0).CarrierId, new List<int>()));
  504. else
  505. {
  506. bool onRobot = false;
  507. if (CarrierManager.Instance.CheckHasCarrier(ModuleName.CarrierRobot, 0))
  508. {
  509. var carrier = CarrierManager.Instance.GetCarrier(ModuleName.CarrierRobot, 0);
  510. if (carrier.CarrierType == CarrierType.ED &&
  511. carrier.InternalModuleName == s.Module)
  512. {
  513. useStockers.Add(Tuple.Create(s.Module.ToString(), carrier.CarrierId, new List<int>()));
  514. onRobot = true;
  515. }
  516. }
  517. if (!onRobot)
  518. {
  519. bool inFIMS = false;
  520. foreach (var fims in _lstFIMSs)
  521. {
  522. if (!fims.IsOnline)
  523. continue;
  524. var carrier = CarrierManager.Instance.GetCarrier(fims.Module, 0);
  525. if (!carrier.IsEmpty && carrier.CarrierType == CarrierType.ED &&
  526. carrier.InternalModuleName == s.Module)
  527. {
  528. inFIMS = true;
  529. useStockers.Add(Tuple.Create(s.Module.ToString(), carrier.CarrierId, new List<int>()));
  530. }
  531. }
  532. if (!inFIMS && CarrierManager.Instance.GetLocationByInternalCarrierModuleName(s.Module, CarrierType.SD) != null)
  533. useStockers.Add(Tuple.Create(s.Module.ToString(), "", new List<int>()));
  534. }
  535. }
  536. }
  537. var wafers = WaferManager.Instance.GetWafers(_pm1.Module);
  538. if (wafers.Any(x => !x.IsEmpty) && !_lstProcessJobs.Any(x => x.State == EnumProcessJobState.Processing || x.State == EnumProcessJobState.Paused) &&
  539. SC.GetValue<bool>("System.IsEnableDummyWaferDischarge"))
  540. {
  541. Singleton<EquipmentManager>.Instance.ChargeWaferJobStartFailedWarning.Set($"Already have wafer in boat");
  542. return Result.FAIL;
  543. }
  544. if (wafers.Any(x => !x.IsEmpty && x.WaferType == WaferType.None))
  545. {
  546. Singleton<EquipmentManager>.Instance.ChargeWaferJobStartFailedWarning.Set($"Already have unknown wafer in boat");
  547. return Result.FAIL;
  548. }
  549. var robotWafers = WaferManager.Instance.GetWafers(ModuleName.WaferRobot);
  550. if (robotWafers.Any(x => !x.IsEmpty) && !_lstProcessJobs.Any(x => x.State == EnumProcessJobState.Processing || x.State == EnumProcessJobState.Paused))
  551. {
  552. Singleton<EquipmentManager>.Instance.ChargeWaferJobStartFailedWarning.Set($"Already have wafer in wafer robot");
  553. return Result.FAIL;
  554. }
  555. if (robotWafers.Any(x => !x.IsEmpty && x.WaferType == WaferType.None))
  556. {
  557. Singleton<EquipmentManager>.Instance.ChargeWaferJobStartFailedWarning.Set($"Already have unknown wafer in wafer robot");
  558. return Result.FAIL;
  559. }
  560. if (!CheckWaferStatus(useStockers, true, true, out reason))
  561. {
  562. Singleton<EquipmentManager>.Instance.ChargeWaferJobStartFailedWarning.Set(reason);
  563. return Result.FAIL;
  564. }
  565. }
  566. var pjJobId = param["PJID"].ToString();
  567. var cjJobId = param["CJID"].ToString();
  568. ControlJobInfo cj = null;
  569. if (_lstControlJobs.Exists(x => x.Name == cjJobId))
  570. {
  571. for (int i = 1; i < 1000; i++)
  572. {
  573. if (!_lstControlJobs.Exists(x => x.Name == $"{cjJobId}_{i}"))
  574. {
  575. cjJobId = $"{cjJobId}_{i}";
  576. break;
  577. }
  578. }
  579. }
  580. cj = new ControlJobInfo();
  581. cj.Name = cjJobId;
  582. //cj.Module = module;
  583. cj.LotName = cjJobId;
  584. cj.LotInnerId = Guid.NewGuid();
  585. cj.LotWafers = new List<WaferInfo>();
  586. cj.CreateTime = DateTime.Now;
  587. cj.SetState(EnumControlJobState.WaitingForStart);
  588. ProcessJobInfo pj = new ProcessJobInfo();
  589. pj.Name = pjJobId;
  590. pj.JobRecipe = param["JobRecipe"].ToString();
  591. pj.ProcessRecipe = processRecipe;
  592. pj.LayoutRecipe = layoutRecipe;
  593. pj.ControlJobName = cj.Name;
  594. pj.SetState(EnumProcessJobState.Queued);
  595. pj.CreateTime = DateTime.Now;
  596. pj.Stockers = useStockers;
  597. pj.SlotWafers = new List<Tuple<ModuleName, int>>();
  598. pj.ProcessingState = EnumProcessingState.WaitingMaterial;
  599. pj.CoolTimeSec = coolTime;
  600. pj.IsEmptyLayout = !layoutRecipeDataExpert.Items.Any(x => x != "----");
  601. pj.IsN2PurgeMode = recipeHead.IsN2PurgeMode;
  602. pj.N2PurgeModeStr = recipeHead.N2PurgeModeStr;
  603. if (useStockers.Any() && !CheckChargeRule(pj, out bool waferShort, false, true, out reason))
  604. {
  605. Singleton<EquipmentManager>.Instance.ChargeWaferJobStartFailedWarning.Set($"layout recipe {layoutRecipe} check charge rule failed, {reason}");
  606. return Result.FAIL;
  607. }
  608. foreach (var stocker in useStockers)
  609. {
  610. if (CarrierManager.Instance.CheckHasCarrier($"{stocker.Item1}", 0) &&
  611. CarrierManager.Instance.GetCarrier($"{stocker.Item1}", 0).InternalModuleName.ToString() != stocker.Item1)
  612. {
  613. Singleton<EquipmentManager>.Instance.ChargeWaferJobStartFailedWarning.Set($"Carrier of {stocker.Item1} is not match stocker module name {CarrierManager.Instance.GetCarrier($"{stocker.Item1}", 0).InternalModuleName}");
  614. return Result.FAIL;
  615. }
  616. }
  617. _lstProcessJobs.Add(pj);
  618. cj.ProcessJobNameList.Add(pj.Name);
  619. if (!_lstControlJobs.Contains(cj))
  620. _lstControlJobs.Add(cj);
  621. _faCallback.JobCreated(cj, pj);
  622. _secondPj = null;
  623. if ((Singleton<EquipmentManager>.Instance.Modules[ModuleName.PM1] as PMModule).IsExcuteIdleRecipe)
  624. (Singleton<EquipmentManager>.Instance.Modules[ModuleName.PM1] as PMModule).EndIdleRecipe();
  625. return Result.RUN;
  626. }
  627. static int compare(Tuple<string, string> t1, Tuple<string, string> t2)
  628. {
  629. int.TryParse(t1.Item1.Replace("Stocker", ""), out int s1);
  630. int.TryParse(t2.Item1.Replace("Stocker", ""), out int s2);
  631. if (s1 > s2)
  632. {
  633. return 1;
  634. }
  635. else
  636. {
  637. return -1;
  638. }
  639. }
  640. static int compare(Tuple<string, string, List<int>> t1, Tuple<string, string, List<int>> t2)
  641. {
  642. int.TryParse(t1.Item1.Replace("Stocker", ""), out int s1);
  643. int.TryParse(t2.Item1.Replace("Stocker", ""), out int s2);
  644. if (s1 > s2)
  645. {
  646. return 1;
  647. }
  648. else
  649. {
  650. return -1;
  651. }
  652. }
  653. internal ProcessJobInfo GetFirstProcessJob(ControlJobInfo cj, ProcessJobInfo checkPj = null)
  654. {
  655. DateTime dtMin = DateTime.MaxValue;
  656. ProcessJobInfo currentPj = null;
  657. foreach (var pj in _lstProcessJobs)
  658. {
  659. if (checkPj != null && checkPj == pj)
  660. continue;
  661. if (pj.ControlJobName == cj.Name)
  662. {
  663. if (pj.CreateTime.CompareTo(dtMin) < 0)
  664. {
  665. dtMin = pj.CreateTime;
  666. currentPj = pj;
  667. }
  668. }
  669. }
  670. return currentPj;
  671. }
  672. internal void StopJob(string jobName)
  673. {
  674. ControlJobInfo cj = _lstControlJobs.Find(x => x.Name == jobName);
  675. if (cj == null)
  676. {
  677. EV.PostWarningLog(LogSource, $"stop job rejected, not found job with id {jobName}");
  678. return;
  679. }
  680. foreach (var pj in _lstProcessJobs)
  681. {
  682. if (pj.ControlJobName == cj.Name)
  683. {
  684. if (pj.State == EnumProcessJobState.Processing)
  685. _faCallback.JobStopped(cj, pj);
  686. pj.SetState(EnumProcessJobState.Stopping);
  687. pj.ProcessingState = EnumProcessingState.WaitingWithdrawal;
  688. }
  689. }
  690. if (_isCycleMode)
  691. {
  692. if (_cycleSetPoint > _cycledCount)
  693. {
  694. _cycleSetPoint = _cycledCount;
  695. EV.PostWarningLog("System", $"system in cycle mode, cycle count reset to {_cycledCount}");
  696. }
  697. }
  698. _dbCallback.LotFinished(cj);
  699. }
  700. internal void AbortJob(string jobName)
  701. {
  702. ControlJobInfo cj = _lstControlJobs.Find(x => x.Name == jobName);
  703. if (cj == null)
  704. {
  705. EV.PostWarningLog(LogSource, $"abort job rejected, not found job with id {jobName}");
  706. return;
  707. }
  708. List<ProcessJobInfo> pjAbortList = new List<ProcessJobInfo>();
  709. foreach (var pj in _lstProcessJobs)
  710. {
  711. if (pj.ControlJobName == cj.Name)
  712. {
  713. if (pj.State == EnumProcessJobState.Processing)
  714. _faCallback.JobAborted(cj, pj);
  715. pj.SetState(EnumProcessJobState.Aborting);
  716. if (pj.ProcessingState == EnumProcessingState.Charging || pj.ProcessingState == EnumProcessingState.Discharging)
  717. {
  718. var pmModule = Singleton<EquipmentManager>.Instance.Modules[ModuleName.PM1] as PMModule;
  719. pmModule?.SetN2PurgeLAO2CheckFirstEnable(false);
  720. pmModule?.SetN2PurgeProcess(false);
  721. }
  722. pj.ProcessingState = EnumProcessingState.WaitingWithdrawal;
  723. pjAbortList.Add(pj);
  724. int unprocessed = 0;
  725. int aborted = 0;
  726. WaferInfo[] wafers = WaferManager.Instance.GetWaferByProcessJob(pj.Name);
  727. foreach (var waferInfo in wafers)
  728. {
  729. waferInfo.ProcessJob = null;
  730. waferInfo.NextSequenceStep = 0;
  731. if (waferInfo.ProcessState != EnumWaferProcessStatus.Completed)
  732. unprocessed++;
  733. }
  734. JobDataRecorder.EndPJ(pj.InnerId.ToString(), aborted, unprocessed);
  735. }
  736. }
  737. if (_coolTimer.IsRunning) _coolTimer.Stop();
  738. if (!string.IsNullOrEmpty(jobName) && Singleton<FAJobController>.Instance.FAProcessJobs.ContainsKey(jobName))
  739. {
  740. Singleton<FAJobController>.Instance.FAProcessJobs[jobName].RequestAbort();
  741. }
  742. foreach (var pj in pjAbortList)
  743. {
  744. _lstProcessJobs.Remove(pj);
  745. }
  746. _lstControlJobs.Remove(cj);
  747. _dbCallback.LotFinished(cj);
  748. }
  749. public void ResumeJob(string jobName)
  750. {
  751. ControlJobInfo cj = _lstControlJobs.Find(x => x.Name == jobName);
  752. if (cj == null)
  753. {
  754. EV.PostWarningLog(LogSource, $"resume job rejected, not found job with id {jobName}");
  755. return;
  756. }
  757. if (cj.State == EnumControlJobState.Paused)
  758. {
  759. cj.SetState(EnumControlJobState.Executing);
  760. }
  761. foreach (var pj in _lstProcessJobs)
  762. {
  763. if (pj.ControlJobName == cj.Name)
  764. {
  765. if (pj.State == EnumProcessJobState.Processing)
  766. _faCallback.JobResumed(cj, pj);
  767. }
  768. }
  769. }
  770. internal bool StartJob(string jobName)
  771. {
  772. if (!CheckPMStatus())
  773. {
  774. EV.PostWarningLog("Scheduler", "can not change to auto mode, at least one process chamber be online");
  775. return false;
  776. }
  777. ControlJobInfo cj = _lstControlJobs.Find(x => x.Name == jobName);
  778. if (cj == null)
  779. {
  780. EV.PostWarningLog(LogSource, $"start job rejected, not found job with id {jobName}");
  781. return false;
  782. }
  783. if (_isCycleMode)
  784. {
  785. if (CheckAllJobDone())
  786. {
  787. _cycledWafer = 0;
  788. _cycledCount = 0;
  789. }
  790. }
  791. if (cj.State == EnumControlJobState.WaitingForStart)
  792. {
  793. cj.SetState(EnumControlJobState.Executing);
  794. //(GetModule(cj.Module) as SchedulerLoadPort).NoteJobStart();
  795. cj.LotInnerId = Guid.NewGuid();
  796. cj.BeginTime = DateTime.Now;
  797. _dbCallback.LotCreated(cj);
  798. _faCallback.JobStarted(cj, GetFirstProcessJob(cj));
  799. }
  800. return true;
  801. }
  802. internal void PauseJob(string jobName)
  803. {
  804. foreach (var cj in _lstControlJobs)
  805. {
  806. if (cj.Name != jobName && !string.IsNullOrEmpty(jobName))
  807. continue;
  808. if (cj.State == EnumControlJobState.Executing)
  809. {
  810. cj.SetState(EnumControlJobState.Paused);
  811. _faCallback.JobPaused(cj, GetFirstProcessJob(cj));
  812. }
  813. }
  814. }
  815. #endregion Job Management
  816. private bool CheckPMStatus()
  817. {
  818. bool hasPmOnline = false;
  819. foreach (var schedulerPm in _lstPms)
  820. {
  821. if (schedulerPm.IsAvailable)
  822. {
  823. hasPmOnline = true;
  824. continue;
  825. }
  826. }
  827. return hasPmOnline;
  828. }
  829. public Result Start(params object[] objs)
  830. {
  831. Clear();
  832. _cycledWafer = 0;
  833. _cycledCount = 0;
  834. timer.Start();
  835. if (!CheckPMStatus())
  836. {
  837. EV.PostWarningLog("Scheduler", "can not change to auto mode, at least one process chamber be online");
  838. return Result.FAIL;
  839. }
  840. return Result.RUN;
  841. }
  842. public Result Monitor()
  843. {
  844. ControlJobInfo cjActive = _lstControlJobs.Find(x => x.State == EnumControlJobState.Executing);
  845. if (cjActive != null)
  846. {
  847. MonitorModuleTasks();
  848. }
  849. MonitorJobTasks();
  850. return Result.RUN;
  851. }
  852. #region Job task
  853. public Result MonitorJobTasks()
  854. {
  855. UpdateProcessJobStatus();
  856. UpdateControlJobStatus();
  857. StartNewJob();
  858. return Result.RUN;
  859. }
  860. private void UpdateProcessJobStatus()
  861. {
  862. foreach (var pj in _lstProcessJobs)
  863. {
  864. if (pj.ProcessingState == EnumProcessingState.Discharging && pj.IsEmptyLayout)
  865. {
  866. pj.SetState(EnumProcessJobState.ProcessingComplete);
  867. JobDataRecorder.EndPJ(pj.InnerId.ToString(), 0, 0);
  868. var pmModule = Singleton<EquipmentManager>.Instance.Modules[ModuleName.PM1] as PMModule;
  869. pmModule?.SetN2PurgeLAO2CheckFirstEnable(false);
  870. pmModule?.SetN2PurgeProcess(false);
  871. }
  872. else
  873. {
  874. if (pj.State == EnumProcessJobState.Processing)
  875. {
  876. if (CheckAllWaferReturned(pj, true))
  877. {
  878. pj.SetState(EnumProcessJobState.ProcessingComplete);
  879. JobDataRecorder.EndPJ(pj.InnerId.ToString(), 0, 0);
  880. _faCallback.EndDischarge(pj);
  881. var pmModule = Singleton<EquipmentManager>.Instance.Modules[ModuleName.PM1] as PMModule;
  882. pmModule?.SetN2PurgeLAO2CheckFirstEnable(false);
  883. pmModule?.SetN2PurgeProcess(false);
  884. }
  885. }
  886. else if (pj.State == EnumProcessJobState.Stopping)
  887. {
  888. if (CheckAllWaferReturned(pj, false))
  889. {
  890. pj.SetState(EnumProcessJobState.ProcessingComplete);
  891. JobDataRecorder.EndPJ(pj.InnerId.ToString(), 0, 0);
  892. var pmModule = Singleton<EquipmentManager>.Instance.Modules[ModuleName.PM1] as PMModule;
  893. pmModule?.SetN2PurgeLAO2CheckFirstEnable(false);
  894. pmModule?.SetN2PurgeProcess(false);
  895. }
  896. }
  897. }
  898. }
  899. }
  900. private void UpdateControlJobStatus()
  901. {
  902. if (_lstControlJobs.Count == 0)
  903. return;
  904. bool allControlJobComplete = true;
  905. List<ControlJobInfo> cjRemoveList = new List<ControlJobInfo>();
  906. foreach (var cj in _lstControlJobs)
  907. {
  908. if (cj.State == EnumControlJobState.Executing)
  909. {
  910. bool allPjCompleted = true;
  911. foreach (var pjName in cj.ProcessJobNameList)
  912. {
  913. var pj = _lstProcessJobs.Find(x => x.Name == pjName);
  914. if (pj == null)
  915. {
  916. LOG.Error($"Not find pj named {pjName} in {cj.Name}");
  917. continue;
  918. }
  919. if (pj.State != EnumProcessJobState.Complete && pj.State != EnumProcessJobState.ProcessingComplete)
  920. {
  921. allPjCompleted = false;
  922. break;
  923. }
  924. }
  925. if (allPjCompleted)
  926. {
  927. cj.SetState(EnumControlJobState.Completed);
  928. cj.EndTime = DateTime.Now;
  929. string strInfo = $"{cj.Module} has finished: \r\n\r\nProcessed wafer number: {cj.LotWafers.Count} \r\nBegin time: {cj.BeginTime} \r\nEnd time: {cj.EndTime} \r\nDuration: {(cj.EndTime - cj.BeginTime).TotalSeconds:F0} sec";
  930. EV.PostInfoLog("Scheduler", strInfo);
  931. if (SC.GetValue<bool>("System.Job.EnablePopDialogWhenJobDone"))
  932. {
  933. EV.PostPopDialogMessage(EventLevel.Information, "System Information", strInfo);
  934. }
  935. _faCallback.JobFinished(cj, GetFirstProcessJob(cj));
  936. _dbCallback.LotFinished(cj);
  937. //if (!(_isCycleMode && _cycledCount < _cycleSetPoint))
  938. // (GetModule(cj.Module) as SchedulerLoadPort).NoteJobComplete();
  939. }
  940. }
  941. if (cj.State == EnumControlJobState.Completed && (!SC.GetValue<bool>("System.IsCycleMode") ||
  942. (SC.GetValue<bool>("System.IsCycleMode") && _cycledCount >= _cycleSetPoint)))
  943. {
  944. cjRemoveList.Add(cj);
  945. }
  946. allControlJobComplete = allControlJobComplete && cj.State == EnumControlJobState.Completed;
  947. }
  948. if (_isCycleMode && _cycledCount < _cycleSetPoint)
  949. {
  950. int countPerCycle = 0;
  951. int countProcessed = 0;
  952. foreach (var pj in _lstProcessJobs)
  953. {
  954. if (pj.State == EnumProcessJobState.Queued || pj.SlotWafers == null)
  955. continue;
  956. foreach (var pjSlotWafer in pj.SlotWafers)
  957. {
  958. countPerCycle++;
  959. WaferInfo wafer = WaferManager.Instance.GetWafer(pjSlotWafer.Item1, pjSlotWafer.Item2);
  960. if (!wafer.IsEmpty && !CheckWaferNeedProcess(pjSlotWafer.Item1, pjSlotWafer.Item2))
  961. {
  962. countProcessed++;
  963. }
  964. }
  965. }
  966. _cycledWafer = _cycledCount * countPerCycle + countProcessed;
  967. if (allControlJobComplete)
  968. {
  969. _cycledCount++;
  970. if (_cycledCount < _cycleSetPoint)
  971. {
  972. foreach (var cj in _lstControlJobs)
  973. {
  974. cj.SetState(EnumControlJobState.Executing);
  975. cj.LotInnerId = Guid.NewGuid();
  976. //_dbCallback.LotCreated(cj);
  977. }
  978. foreach (var pj in _lstProcessJobs)
  979. {
  980. pj.SetState(EnumProcessJobState.Queued);
  981. pj.ProcessingState = EnumProcessingState.WaitingMaterial;
  982. pj.InnerId = Guid.NewGuid();
  983. if (pj.SlotWafers == null)
  984. continue;
  985. foreach (var pjSlotWafer in pj.SlotWafers)
  986. {
  987. WaferInfo wafer = WaferManager.Instance.GetWafer(pjSlotWafer.Item1, pjSlotWafer.Item2);
  988. wafer.ProcessJob = null;
  989. wafer.NextSequenceStep = 0;
  990. wafer.ProcessState = EnumWaferProcessStatus.Idle;
  991. }
  992. pj.SlotWafers.Clear();
  993. }
  994. }
  995. else
  996. {
  997. foreach (var cj in _lstControlJobs)
  998. {
  999. if (cj.State == EnumControlJobState.Completed)
  1000. {
  1001. cjRemoveList.Add(cj);
  1002. }
  1003. }
  1004. }
  1005. }
  1006. }
  1007. if (_waferRobot.IsAvailable && cjRemoveList.Any())
  1008. {
  1009. (Singleton<EquipmentManager>.Instance.Modules[ModuleName.WaferRobot] as WaferRobotModule).Home(out _);
  1010. }
  1011. foreach (var cj in cjRemoveList)
  1012. {
  1013. List<ProcessJobInfo> pjRemoveList = new List<ProcessJobInfo>();
  1014. foreach (var pj in _lstProcessJobs)
  1015. {
  1016. if (pj.ControlJobName == cj.Name)
  1017. pjRemoveList.Add(pj);
  1018. }
  1019. foreach (var pj in pjRemoveList)
  1020. {
  1021. _lstProcessJobs.Remove(pj);
  1022. }
  1023. _lstControlJobs.Remove(cj);
  1024. }
  1025. }
  1026. public bool CheckAllJobDone()
  1027. {
  1028. foreach (var cj in _lstControlJobs)
  1029. {
  1030. if (cj.State == EnumControlJobState.Executing ||
  1031. cj.State == EnumControlJobState.Paused ||
  1032. cj.State == EnumControlJobState.Queued ||
  1033. cj.State == EnumControlJobState.WaitingForStart)
  1034. return false;
  1035. }
  1036. if (_lstControlJobs.Count > 0 || _lstProcessJobs.Count > 0)
  1037. {
  1038. return false;
  1039. }
  1040. return true;
  1041. }
  1042. public List<Tuple<string, string, List<int>>> GetProcessingStockers()
  1043. {
  1044. if (!_lstControlJobs.Any() || !_lstProcessJobs.Any())
  1045. return null;
  1046. foreach (var cj in _lstControlJobs)
  1047. {
  1048. if (cj.State == EnumControlJobState.Completed)
  1049. continue;
  1050. var pj = GetFirstProcessJob(cj);
  1051. if (pj != null)
  1052. {
  1053. if (pj.ProcessingState != EnumProcessingState.Discharging)
  1054. return pj.Stockers;
  1055. else
  1056. {
  1057. List<Tuple<string, string, List<int>>> temp = new List<Tuple<string, string, List<int>>>();
  1058. foreach (var item in pj.Stockers)
  1059. {
  1060. if (CarrierManager.Instance.CheckHasCarrier(item.Item1, 0))
  1061. {
  1062. var wafers = WaferManager.Instance.GetWafers(ModuleName.PM1).ToList();
  1063. if (wafers != null && !wafers.Any(x => !x.IsEmpty && x.OriginStation == (int)ModuleHelper.Converter(item.Item1)))
  1064. continue;
  1065. }
  1066. temp.Add(Tuple.Create(item.Item1, item.Item2, item.Item3));
  1067. }
  1068. return temp;
  1069. }
  1070. }
  1071. }
  1072. return null;
  1073. }
  1074. public List<Tuple<string, string, List<int>>> GetSecondlyProcessingStockers()
  1075. {
  1076. var pj = GetSecondlyProcessJob();
  1077. return pj != null ? pj.Stockers : null;
  1078. }
  1079. private ProcessJobInfo GetSecondlyProcessJob()
  1080. {
  1081. if (!_lstControlJobs.Any() || !_lstProcessJobs.Any())
  1082. return null;
  1083. if (_lstControlJobs.Count > 1)
  1084. {
  1085. var cj = _lstControlJobs[1];
  1086. if (cj.State == EnumControlJobState.Completed)
  1087. return null;
  1088. var pj = GetFirstProcessJob(cj);
  1089. return pj;
  1090. }
  1091. return null;
  1092. }
  1093. private ProcessJobInfo GetSecondlyProcessJobV2()
  1094. {
  1095. if (!_lstControlJobs.Any() || !_lstProcessJobs.Any())
  1096. return null;
  1097. if (_lstControlJobs.Count > 1 && _secondPj == null)
  1098. {
  1099. var cj = _lstControlJobs[1];
  1100. if (cj.State == EnumControlJobState.Completed)
  1101. return null;
  1102. var pj = GetFirstProcessJob(cj);
  1103. return pj;
  1104. }
  1105. return _secondPj;
  1106. }
  1107. public List<Tuple<string, string, List<int>>> GetAllPJStockers()
  1108. {
  1109. List<Tuple<string, string, List<int>>> temp = new List<Tuple<string, string, List<int>>>();
  1110. if (!_lstControlJobs.Any() || !_lstProcessJobs.Any())
  1111. return temp;
  1112. foreach (var cj in _lstControlJobs)
  1113. {
  1114. if (cj.State == EnumControlJobState.Completed)
  1115. continue;
  1116. foreach (var pj in _lstProcessJobs)
  1117. {
  1118. if (pj != null && pj.ControlJobName == cj.Name)
  1119. {
  1120. temp.AddRange(pj.Stockers);
  1121. }
  1122. }
  1123. }
  1124. return temp;
  1125. }
  1126. private void StartNewJob()
  1127. {
  1128. if (!_lstControlJobs.Any() || !_lstProcessJobs.Any())
  1129. return;
  1130. _secondPj = GetSecondlyProcessJobV2();
  1131. ControlJobInfo cjActived = null;
  1132. DateTime dtMin = DateTime.MaxValue;
  1133. foreach (var cj in _lstControlJobs)
  1134. {
  1135. if (cj.State == EnumControlJobState.Completed)
  1136. continue;
  1137. if (cj.CreateTime.CompareTo(dtMin) < 0)
  1138. {
  1139. dtMin = cj.CreateTime;
  1140. cjActived = cj;
  1141. }
  1142. }
  1143. if (cjActived == null)
  1144. return;
  1145. if (cjActived.State != EnumControlJobState.Executing &&
  1146. cjActived.State != EnumControlJobState.Paused)
  1147. {
  1148. cjActived.BeginTime = DateTime.Now;
  1149. cjActived.SetState(EnumControlJobState.Executing);
  1150. }
  1151. ProcessJobInfo pj = null;
  1152. foreach (var cj in _lstControlJobs)
  1153. {
  1154. if (cj.State != EnumControlJobState.Executing)
  1155. continue;
  1156. cjActived = cj;
  1157. pj = GetFirstProcessJob(cjActived);
  1158. if (pj != null && pj.State == EnumProcessJobState.Queued)
  1159. {
  1160. if (!pj.IsEmptyLayout)
  1161. {
  1162. if (CheckProcessJobReady(pj))
  1163. {
  1164. //先不管charge rule
  1165. if (!CheckChargeRule(pj, out bool waferShort, true, true, out string reason))
  1166. {
  1167. if (!_chargeRuleAlarmTrigDic.ContainsKey(pj.InnerId.ToString()))
  1168. _chargeRuleAlarmTrigDic.Add(pj.InnerId.ToString(), new R_TRIG());
  1169. _chargeRuleAlarmTrigDic[pj.InnerId.ToString()].CLK = true;
  1170. if (_chargeRuleAlarmTrigDic[pj.InnerId.ToString()].Q)
  1171. Singleton<EquipmentManager>.Instance.ChargeWaferJobStartFailedWarning.Set($"layout recipe {pj.LayoutRecipe} check charge rule failed, {reason}");
  1172. return;
  1173. }
  1174. if (!CheckWaferStatus(pj.Stockers, false, false, out reason))
  1175. {
  1176. if (!_waferStatusAlarmTrigDic.ContainsKey(pj.InnerId.ToString()))
  1177. _waferStatusAlarmTrigDic.Add(pj.InnerId.ToString(), new R_TRIG());
  1178. _waferStatusAlarmTrigDic[pj.InnerId.ToString()].CLK = true;
  1179. if (_waferStatusAlarmTrigDic[pj.InnerId.ToString()].Q)
  1180. Singleton<EquipmentManager>.Instance.ChargeWaferJobStartFailedWarning.Set(reason);
  1181. return;
  1182. }
  1183. if (!CheckDummyWaferUse(pj, cj))
  1184. return;
  1185. if (!SC.GetValue<bool>("System.IsEnableDummyWaferDischarge"))
  1186. {
  1187. var wafers = WaferManager.Instance.GetWafers(ModuleName.PM1).ToList();
  1188. if (wafers != null && wafers.Any(x => !x.IsEmpty && (x.WaferType == WaferType.SD || x.WaferType == WaferType.ED)))
  1189. {
  1190. for (int i = 0; i < wafers.Count; i++)
  1191. {
  1192. var wafer = wafers[i];
  1193. if (wafer == null || wafer.IsEmpty)
  1194. continue;
  1195. if (wafer.WaferType != WaferType.SD && wafer.WaferType != WaferType.ED)
  1196. {
  1197. if (!_dummyWaferCheckTrigDic.ContainsKey(pj.InnerId.ToString()))
  1198. _dummyWaferCheckTrigDic.Add(pj.InnerId.ToString(), new R_TRIG());
  1199. _dummyWaferCheckTrigDic[pj.InnerId.ToString()].CLK = true;
  1200. if (_dummyWaferCheckTrigDic[pj.InnerId.ToString()].Q)
  1201. Singleton<EquipmentManager>.Instance.ChargeWaferJobStartFailedWarning.Set($"layout recipe {pj.LayoutRecipe} check charge rule failed, invalid wafer in boat");
  1202. return;
  1203. }
  1204. if (!pj.SideDummySlots.Any(x => x == i) && !pj.ExtraDummySlots.Any(x => x == i))
  1205. {
  1206. if (!_dummyWaferCheckTrigDic.ContainsKey(pj.InnerId.ToString()))
  1207. _dummyWaferCheckTrigDic.Add(pj.InnerId.ToString(), new R_TRIG());
  1208. _dummyWaferCheckTrigDic[pj.InnerId.ToString()].CLK = true;
  1209. if (_dummyWaferCheckTrigDic[pj.InnerId.ToString()].Q)
  1210. Singleton<EquipmentManager>.Instance.ChargeWaferJobStartFailedWarning.Set($"layout recipe {pj.LayoutRecipe} check charge rule failed, invalid dummy wafer in boat, dummy wafer layout mismatch");
  1211. return;
  1212. }
  1213. }
  1214. var existSDSlots = new List<int>();
  1215. foreach (var slot in pj.SideDummySlots)
  1216. {
  1217. var wafer = WaferManager.Instance.GetWafer(ModuleName.PM1, slot);
  1218. if (!wafer.IsEmpty)
  1219. {
  1220. if (wafer.WaferType != WaferType.SD)
  1221. {
  1222. if (!_dummyWaferCheckTrigDic.ContainsKey(pj.InnerId.ToString()))
  1223. _dummyWaferCheckTrigDic.Add(pj.InnerId.ToString(), new R_TRIG());
  1224. _dummyWaferCheckTrigDic[pj.InnerId.ToString()].CLK = true;
  1225. if (_dummyWaferCheckTrigDic[pj.InnerId.ToString()].Q)
  1226. Singleton<EquipmentManager>.Instance.ChargeWaferJobStartFailedWarning.Set($"layout recipe {pj.LayoutRecipe} check charge rule failed, invalid dummy wafer in boat, SD wafer layout mismatch");
  1227. return;
  1228. }
  1229. else
  1230. {
  1231. existSDSlots.Add(slot);
  1232. }
  1233. }
  1234. }
  1235. var existEDSlots = new List<int>();
  1236. foreach (var slot in pj.ExtraDummySlots)
  1237. {
  1238. var wafer = WaferManager.Instance.GetWafer(ModuleName.PM1, slot);
  1239. if (!wafer.IsEmpty)
  1240. {
  1241. if (wafer.WaferType != WaferType.ED)
  1242. {
  1243. if (!_dummyWaferCheckTrigDic.ContainsKey(pj.InnerId.ToString()))
  1244. _dummyWaferCheckTrigDic.Add(pj.InnerId.ToString(), new R_TRIG());
  1245. _dummyWaferCheckTrigDic[pj.InnerId.ToString()].CLK = true;
  1246. if (_dummyWaferCheckTrigDic[pj.InnerId.ToString()].Q)
  1247. Singleton<EquipmentManager>.Instance.ChargeWaferJobStartFailedWarning.Set($"layout recipe {pj.LayoutRecipe} check charge rule failed, invalid dummy wafer in boat, ED wafer layout mismatch");
  1248. return;
  1249. }
  1250. else
  1251. {
  1252. existEDSlots.Add(slot);
  1253. }
  1254. }
  1255. }
  1256. for (int i = 0; i < wafers.Count; i++)
  1257. {
  1258. var wafer = wafers[i];
  1259. if (wafer == null || wafer.IsEmpty)
  1260. continue;
  1261. wafer.ProcessState = EnumWaferProcessStatus.Idle;
  1262. }
  1263. pj.IsNeedChargeDummyWafer = pj.ExtraDummySlots.Count != existEDSlots.Count || pj.SideDummySlots.Count != existSDSlots.Count;
  1264. }
  1265. else
  1266. {
  1267. pj.IsNeedChargeDummyWafer = true;
  1268. }
  1269. }
  1270. else
  1271. {
  1272. pj.IsNeedChargeDummyWafer = true;
  1273. }
  1274. ActiveProcessJob(cjActived, pj);
  1275. _sideDummyWafers = GetDummyWafers(_lstSideDummyStocker, pj.SideDummySlots.Count(), WaferType.SD);
  1276. _extraDummyWafers = GetDummyWafers(_lstExtraDummyStocker, pj.ExtraDummySlots.Count(), WaferType.ED);
  1277. _sideDummySlots = pj.SideDummySlots;
  1278. _extraDummySlots = pj.ExtraDummySlots;
  1279. _productSlots = pj.ProductSlots;
  1280. _monitor1Slots = pj.Monitor1Slots;
  1281. _monitor2Slots = pj.Monitor2Slots;
  1282. _lstCurrentPjStocker.Clear();
  1283. foreach (var s in pj.Stockers)
  1284. {
  1285. var module = GetModule(s.Item1) as SchedulerStocker;
  1286. if (module != null)
  1287. _lstCurrentPjStocker.Add(module);
  1288. }
  1289. }
  1290. }
  1291. else
  1292. {
  1293. if (!SC.GetValue<bool>("System.IsEnableDummyWaferDischarge"))
  1294. {
  1295. var wafers = WaferManager.Instance.GetWafers(ModuleName.PM1).ToList();
  1296. for (int i = 0; i < wafers.Count; i++)
  1297. {
  1298. var wafer = wafers[i];
  1299. if (wafer == null || wafer.IsEmpty)
  1300. continue;
  1301. if (wafer.WaferType != WaferType.ED && wafer.WaferType != WaferType.SD)
  1302. continue;
  1303. wafer.ProcessState = EnumWaferProcessStatus.Idle;
  1304. }
  1305. }
  1306. ActiveProcessJob(cjActived, pj);
  1307. }
  1308. break;
  1309. }
  1310. }
  1311. if (_lstControlJobs.Count > 1 && pj != null)
  1312. {
  1313. var second = GetSecondlyProcessJob();
  1314. if (second != null && second.IsEmptyLayout && !second.IsStandbyStarted &&
  1315. (pj.ProcessingState == EnumProcessingState.Cooling || pj.ProcessingState == EnumProcessingState.Discharging))
  1316. {
  1317. foreach (var pm in _lstPms)
  1318. {
  1319. if (pm.IsAvailable)
  1320. {
  1321. _dbCallback.PjCreated(second);
  1322. _dbCallback.PjStart();
  1323. pm.Standby(second.ProcessRecipe);
  1324. second.IsStandbyStarted = true;
  1325. }
  1326. }
  1327. }
  1328. }
  1329. }
  1330. private bool ActiveProcessJob(ControlJobInfo cj, ProcessJobInfo pj)
  1331. {
  1332. //_dbCallback.JobCreated(cj, pj);
  1333. pj.SetState(EnumProcessJobState.Processing);
  1334. pj.ProcessingState = EnumProcessingState.Charging;
  1335. pj.BeginTime = DateTime.Now;
  1336. if (pj.IsN2PurgeMode)
  1337. {
  1338. var pmModule = Singleton<EquipmentManager>.Instance.Modules[ModuleName.PM1] as PMModule;
  1339. //pmModule?.SetN2PurgeProcess(true);
  1340. //if (SC.ContainsItem("PM1.N2Purge.WaferCharge.TransferRoomN2PurgeEnable") && SC.GetValue<bool>("PM1.N2Purge.WaferCharge.TransferRoomN2PurgeEnable"))
  1341. // pmModule?.SetN2PurgeLAO2CheckFirstEnable(true);
  1342. if (SC.ContainsItem("PM1.N2Purge.WaferCharge.TransferRoomN2PurgeEnable") && SC.GetValue<bool>("PM1.N2Purge.WaferCharge.TransferRoomN2PurgeEnable"))
  1343. {
  1344. pmModule?.SetN2PurgeProcess(true);
  1345. pmModule?.SetN2PurgeLAO2CheckFirstEnable(true);
  1346. }
  1347. if (SC.ContainsItem("PM1.RecipeRelevancyN2Purge") && SC.GetValue<bool>("PM1.RecipeRelevancyN2Purge") && SC.ContainsItem("PM1.SelectN2PurgeMode"))
  1348. {
  1349. var setValue = pmModule.GetN2PurgeModeEnumByStr(pj.N2PurgeModeStr);
  1350. SC.SetItemValueFromString("PM1.SelectN2PurgeMode", setValue);
  1351. pmModule.RestAllN2PrugeRD();
  1352. }
  1353. }
  1354. foreach (var pm in _lstPms)
  1355. {
  1356. if (pm.IsAvailable)
  1357. {
  1358. _dbCallback.PjCreated(pj);
  1359. _dbCallback.PjStart();
  1360. _faCallback.StartCharge(pj);
  1361. pm.Standby(pj.ProcessRecipe);
  1362. pj.IsStandbyStarted = true;
  1363. }
  1364. }
  1365. return true;
  1366. }
  1367. #endregion Job task
  1368. #region Module task
  1369. public Result MonitorModuleTasks()
  1370. {
  1371. MonitorFIMSTask();
  1372. MonitorWaferRobotTask();
  1373. MonitorCarrierRobotTask();
  1374. MonitorPMTask();
  1375. return Result.RUN;
  1376. }
  1377. private void MonitorWaferRobotTask()
  1378. {
  1379. if (!_waferRobot.IsAvailable)
  1380. return;
  1381. foreach (var fims in _lstFIMSs)
  1382. {
  1383. if (fims.IsWaitTransfer(ModuleName.WaferRobot))
  1384. {
  1385. fims.StopWaitTransfer(ModuleName.WaferRobot);
  1386. }
  1387. }
  1388. foreach (var pm in _lstPms)
  1389. {
  1390. if (pm.IsWaitTransfer(ModuleName.WaferRobot))
  1391. {
  1392. pm.StopWaitTransfer(ModuleName.WaferRobot);
  1393. }
  1394. }
  1395. MonitorWaferRobotFIMSTask();
  1396. if (!_waferRobot.IsAvailable)
  1397. return;
  1398. MonitorWaferRobotPMTask();
  1399. }
  1400. private void MonitorCarrierRobotTask()
  1401. {
  1402. if (!_carrierRobot.IsAvailable)
  1403. return;
  1404. //efem robot is idle, release all the target
  1405. foreach (var fims in _lstFIMSs)
  1406. {
  1407. if (fims.IsWaitTransfer(ModuleName.CarrierRobot))
  1408. {
  1409. fims.StopWaitTransfer(ModuleName.CarrierRobot);
  1410. }
  1411. }
  1412. foreach (var stock in _lstTotlaStockers)
  1413. {
  1414. if (stock.IsWaitTransfer(ModuleName.CarrierRobot))
  1415. {
  1416. stock.StopWaitTransfer(ModuleName.CarrierRobot);
  1417. }
  1418. }
  1419. var pj = _lstProcessJobs.FirstOrDefault(x => x.State == EnumProcessJobState.Processing);
  1420. if (pj == null || pj.IsEmptyLayout)
  1421. return;
  1422. if (pj.ProcessingState == EnumProcessingState.Discharging)
  1423. {
  1424. //discharge
  1425. DischargingOrderBySort(SC.GetStringValue("System.ChargingOrderBySort"));
  1426. if (!_carrierRobot.IsAvailable)
  1427. return;
  1428. if (SC.GetValue<bool>("System.IsEnableDummyWaferDischarge"))
  1429. MonitorCassetteRobotStockerTaskInDischarge(_lstSideDummyStocker, WaferType.SD, _sideDummySlots);
  1430. if (!_carrierRobot.IsAvailable)
  1431. return;
  1432. MonitorCarrierRobotPickFIMSTask();
  1433. if (!_carrierRobot.IsAvailable)
  1434. return;
  1435. MonitorCarrierRobotPlaceFIMSTaskInDischarge();
  1436. }
  1437. else if (pj.ProcessingState == EnumProcessingState.Charging)
  1438. {
  1439. //charge
  1440. if (pj.IsNeedChargeDummyWafer)
  1441. MonitorCassetteRobotStockerTask(_lstSideDummyStocker, WaferType.SD);
  1442. if (!_carrierRobot.IsAvailable)
  1443. return;
  1444. ChargingOrderBySort(pj, SC.GetStringValue("System.ChargingOrderBySort"));
  1445. if (!_carrierRobot.IsAvailable)
  1446. return;
  1447. MonitorCarrierRobotPickFIMSTask();
  1448. if (!_carrierRobot.IsAvailable)
  1449. return;
  1450. MonitorCarrierRobotPlaceFIMSTaskInCharge();
  1451. }
  1452. else if (pj.ProcessingState == EnumProcessingState.Processing)
  1453. {
  1454. MonitorCarrierRobotPickFIMSTask();
  1455. MonitorCassetteRobotPlaceStockerTask();
  1456. }
  1457. }
  1458. private void MonitorFIMSTask()
  1459. {
  1460. if (!_lstProcessJobs.Any())
  1461. return;
  1462. var pj = _lstProcessJobs.FirstOrDefault(x => x.State == EnumProcessJobState.Processing);
  1463. if (pj == null || pj.IsEmptyLayout)
  1464. return;
  1465. //load
  1466. if (pj.ProcessingState == EnumProcessingState.Charging)
  1467. {
  1468. foreach (var st in _lstFIMSs)
  1469. {
  1470. if (!st.IsAvailable || !CarrierManager.Instance.CheckHasCarrier(st.Module, 0))
  1471. continue;
  1472. var fimsDevice = DEVICE.GetDevice<IoFIMS>($"PM1.{st.Module}");
  1473. if (!CheckCarrierCanPickFromFIMS(st.Module) && !fimsDevice.IsLoadCompleted && st.Load(pj.IsN2PurgeMode, "Charging"))
  1474. {
  1475. return;
  1476. }
  1477. }
  1478. }
  1479. else if (pj.ProcessingState == EnumProcessingState.Discharging)
  1480. {
  1481. //先判断空片的情况,空片的先load
  1482. foreach (var st in _lstFIMSs)
  1483. {
  1484. if (!st.IsAvailable || !CarrierManager.Instance.CheckHasCarrier(st.Module, 0))
  1485. continue;
  1486. var fimsDevice = DEVICE.GetDevice<IoFIMS>($"PM1.{st.Module}");
  1487. var wafers = WaferManager.Instance.GetWafers(st.Module);
  1488. if (wafers != null)
  1489. {
  1490. if (CheckCarrierNoHasEmptySlot(st.Module) && !fimsDevice.IsLoadCompleted && st.Load(pj.IsN2PurgeMode, "Discharging"))
  1491. {
  1492. return;
  1493. }
  1494. }
  1495. }
  1496. foreach (var st in _lstFIMSs)
  1497. {
  1498. if (!st.IsAvailable || !CarrierManager.Instance.CheckHasCarrier(st.Module, 0))
  1499. continue;
  1500. var fimsDevice = DEVICE.GetDevice<IoFIMS>($"PM1.{st.Module}");
  1501. var carrier = CarrierManager.Instance.GetCarrier(st.Module, 0);
  1502. if (carrier != null)
  1503. {
  1504. if (!CheckCarrierCanPickFromFIMSInDischarge(carrier.InternalModuleName) && !fimsDevice.IsLoadCompleted && st.Load(pj.IsN2PurgeMode, "Discharging"))
  1505. {
  1506. return;
  1507. }
  1508. }
  1509. }
  1510. }
  1511. //unload
  1512. if (pj.ProcessingState == EnumProcessingState.Charging)
  1513. {
  1514. foreach (var st in _lstFIMSs)
  1515. {
  1516. if (!st.IsAvailable || !CarrierManager.Instance.CheckHasCarrier(st.Module, 0))
  1517. continue;
  1518. var fimsDevice = DEVICE.GetDevice<IoFIMS>($"PM1.{st.Module}");
  1519. if (CheckCarrierCanPickFromFIMS(st.Module) && !fimsDevice.IsUnloadCompleted && st.Unload(pj.IsN2PurgeMode, "Charging"))
  1520. {
  1521. return;
  1522. }
  1523. }
  1524. if (CarrierManager.Instance.CheckHasCarrier(ModuleName.CarrierRobot, 0))
  1525. {
  1526. SchedulerFIMS fims = null;
  1527. foreach (var st in _lstFIMSs)
  1528. {
  1529. if (!st.IsAvailable || CarrierManager.Instance.CheckHasCarrier(st.Module, 0))
  1530. continue;
  1531. // check FIMS
  1532. var fimsDevice = DEVICE.GetDevice<IoFIMS>($"PM1.{st.Module}");
  1533. if (fimsDevice.IsUnloadCompleted)
  1534. continue;
  1535. var carrier = CarrierManager.Instance.GetCarrier(ModuleName.CarrierRobot, 0);
  1536. var transfer = Singleton<EquipmentManager>.Instance.GetTransferJobStockers();
  1537. if (transfer != null && transfer.Any(x => x.Stocker == carrier.InternalModuleName))
  1538. continue;
  1539. GetWaferSlotsAndWaferType(carrier, out List<int> slots, out WaferType waferType);
  1540. if (fims != null && slots != null && GetWaferCountRelatedToWaferRobot(waferType, false) <= slots.Count && CheckCarrierCanPickFromStocker(ModuleName.CarrierRobot) && fims.Unload(pj.IsN2PurgeMode, "Charging"))
  1541. {
  1542. return;
  1543. }
  1544. }
  1545. }
  1546. }
  1547. else if (pj.ProcessingState == EnumProcessingState.Discharging)
  1548. {
  1549. //先判断满片的情况,满片的先unload
  1550. foreach (var st in _lstFIMSs)
  1551. {
  1552. if (!st.IsAvailable || !CarrierManager.Instance.CheckHasCarrier(st.Module, 0))
  1553. continue;
  1554. var fimsDevice = DEVICE.GetDevice<IoFIMS>($"PM1.{st.Module}");
  1555. var carrier = CarrierManager.Instance.GetCarrier(st.Module, 0);
  1556. if (carrier != null)
  1557. {
  1558. if (!CheckCarrierHasEmptySlot(st.Module) && _waferRobot.IsAvailable && !fimsDevice.IsUnloadCompleted && st.Unload(pj.IsN2PurgeMode, "Discharging"))
  1559. {
  1560. return;
  1561. }
  1562. }
  1563. }
  1564. foreach (var st in _lstFIMSs)
  1565. {
  1566. if (!st.IsAvailable || !CarrierManager.Instance.CheckHasCarrier(st.Module, 0))
  1567. continue;
  1568. var fimsDevice = DEVICE.GetDevice<IoFIMS>($"PM1.{st.Module}");
  1569. var carrier = CarrierManager.Instance.GetCarrier(st.Module, 0);
  1570. if (carrier != null)
  1571. {
  1572. if (CheckCarrierCanPickFromFIMSInDischarge(carrier.InternalModuleName) && _waferRobot.IsAvailable && !fimsDevice.IsUnloadCompleted && st.Unload(pj.IsN2PurgeMode, "Discharging"))
  1573. {
  1574. return;
  1575. }
  1576. }
  1577. }
  1578. }
  1579. }
  1580. private void MonitorWaferRobotPMTask()
  1581. {
  1582. if (!_waferRobot.IsAvailable)
  1583. return;
  1584. var pmModule = Singleton<EquipmentManager>.Instance.Modules[ModuleName.PM1] as PMModule;
  1585. if (pmModule == null)
  1586. return;
  1587. var pj = _lstProcessJobs.FirstOrDefault(x => x.State == EnumProcessJobState.Processing);
  1588. if (pj == null || pj.IsEmptyLayout)
  1589. return;
  1590. //place
  1591. var wafer = WaferManager.Instance.GetWafer(ModuleName.WaferRobot, 2);
  1592. List<int> slots = GetWaferSlots(wafer.WaferType);
  1593. if (!_logTrigDic.ContainsKey("GetWaferSlots(wafer.WaferType)"))
  1594. _logTrigDic.Add("GetWaferSlots(wafer.WaferType)", new R_TRIG());
  1595. _logTrigDic["GetWaferSlots(wafer.WaferType)"].CLK = slots == null;
  1596. if (_logTrigDic["GetWaferSlots(wafer.WaferType)"].Q)
  1597. LOG.Write($"GetWaferSlots(wafer.WaferType) is null");
  1598. if (pj.ProcessingState == EnumProcessingState.Charging &&
  1599. wafer != null && !wafer.IsEmpty && wafer.ProcessState == EnumWaferProcessStatus.Idle &&
  1600. slots != null)
  1601. {
  1602. Hand placeBlade = Hand.Blade1;
  1603. int placeSlot = -1;
  1604. for (int i = 0; i < slots.Count; i++)
  1605. {
  1606. if (!WaferManager.Instance.CheckNoWafer(_pm1.Module, slots[i]))
  1607. continue;
  1608. placeSlot = slots[i];
  1609. placeBlade = Hand.Blade1;
  1610. break;
  1611. }
  1612. if (WaferManager.Instance.CheckHasWafer(ModuleName.WaferRobot, 0) &&
  1613. WaferManager.Instance.CheckHasWafer(ModuleName.WaferRobot, 1) &&
  1614. WaferManager.Instance.CheckHasWafer(ModuleName.WaferRobot, 3) &&
  1615. WaferManager.Instance.CheckHasWafer(ModuleName.WaferRobot, 4))
  1616. {
  1617. //check PM
  1618. for (int i = 0; i < slots.Count; i++)
  1619. {
  1620. if (!WaferManager.Instance.CheckNoWafer(_pm1.Module, slots[i]))
  1621. continue;
  1622. placeSlot = slots[i];
  1623. if (i + 4 < slots.Count && Math.Abs(slots[i] - slots[i + 4]) == 4)
  1624. {
  1625. if (WaferManager.Instance.CheckNoWafer(_pm1.Module, slots[i + 1]) &&
  1626. WaferManager.Instance.CheckNoWafer(_pm1.Module, slots[i + 2]) &&
  1627. WaferManager.Instance.CheckNoWafer(_pm1.Module, slots[i + 3]) &&
  1628. WaferManager.Instance.CheckNoWafer(_pm1.Module, slots[i + 4]))
  1629. {
  1630. placeBlade = Hand.Both;
  1631. if (SC.GetStringValue("System.ChargingOrderToBoat") == "FromTopToBottom")
  1632. placeSlot = slots[i + 4];
  1633. }
  1634. }
  1635. break;
  1636. }
  1637. }
  1638. if (pmModule.CheckReadyForTransfer(_waferRobot.Module, placeBlade, placeSlot, EnumTransferType.Place, out string reason) &&
  1639. placeSlot != -1 && _waferRobot.Place(_pm1.Module, placeSlot, placeBlade))
  1640. {
  1641. _pm1.WaitTransfer(ModuleName.WaferRobot);
  1642. return;
  1643. }
  1644. }
  1645. if (!_waferRobot.IsAvailable)
  1646. return;
  1647. //pick
  1648. List<int> targetWaferSlots = GetWaferSlots();
  1649. if (!_logTrigDic.ContainsKey("GetWaferSlots()"))
  1650. _logTrigDic.Add("GetWaferSlots()", new R_TRIG());
  1651. _logTrigDic["GetWaferSlots()"].CLK = targetWaferSlots == null;
  1652. if (_logTrigDic["GetWaferSlots()"].Q)
  1653. LOG.Write($"GetWaferSlots() is null");
  1654. if (pj.ProcessingState == EnumProcessingState.Discharging &&
  1655. wafer != null && wafer.IsEmpty && targetWaferSlots != null)
  1656. {
  1657. Hand pickBlade = Hand.Blade1;
  1658. int pickSlot = -1;
  1659. var isEnableDummyWaferDischarge = SC.GetValue<bool>("System.IsEnableDummyWaferDischarge");
  1660. //check PM
  1661. for (int i = 0; i < targetWaferSlots.Count; i++)
  1662. {
  1663. var targetWafer = WaferManager.Instance.GetWafer(_pm1.Module, targetWaferSlots[i]);
  1664. if (targetWafer == null || targetWafer.IsEmpty || (targetWafer.ProcessState != EnumWaferProcessStatus.Completed &&
  1665. targetWafer.ProcessState != EnumWaferProcessStatus.Abort &&
  1666. targetWafer.ProcessState != EnumWaferProcessStatus.Failed))
  1667. continue;
  1668. if (!isEnableDummyWaferDischarge && (targetWafer.WaferType == WaferType.SD || targetWafer.WaferType == WaferType.ED))
  1669. continue;
  1670. pickSlot = targetWaferSlots[i];
  1671. if (i + 4 < targetWaferSlots.Count && Math.Abs(targetWaferSlots[i] - targetWaferSlots[i + 4]) == 4)
  1672. {
  1673. if (WaferManager.Instance.CheckHasWafer(_pm1.Module, targetWaferSlots[i + 1]) &&
  1674. WaferManager.Instance.CheckHasWafer(_pm1.Module, targetWaferSlots[i + 2]) &&
  1675. WaferManager.Instance.CheckHasWafer(_pm1.Module, targetWaferSlots[i + 3]) &&
  1676. WaferManager.Instance.CheckHasWafer(_pm1.Module, targetWaferSlots[i + 4]) &&
  1677. SC.GetValue<bool>($"{_waferRobot.Module}.IsSupport5Wafer"))
  1678. {
  1679. bool isFromTopToBottom = SC.GetStringValue("System.ChargingOrderToBoat") == "FromTopToBottom";
  1680. var wafer0 = WaferManager.Instance.GetWafer(_pm1.Module, targetWaferSlots[i + (isFromTopToBottom ? 4 : 0)]);
  1681. var wafer1 = WaferManager.Instance.GetWafer(_pm1.Module, targetWaferSlots[i + (isFromTopToBottom ? 3 : 1)]);
  1682. var wafer2 = WaferManager.Instance.GetWafer(_pm1.Module, targetWaferSlots[i + 2]);
  1683. var wafer3 = WaferManager.Instance.GetWafer(_pm1.Module, targetWaferSlots[i + (isFromTopToBottom ? 1 : 3)]);
  1684. var wafer4 = WaferManager.Instance.GetWafer(_pm1.Module, targetWaferSlots[i + (isFromTopToBottom ? 0 : 4)]);
  1685. if (WaferManager.Instance.CheckNoWafer(ModuleName.WaferRobot, 0) &&
  1686. WaferManager.Instance.CheckNoWafer(ModuleName.WaferRobot, 1) &&
  1687. WaferManager.Instance.CheckNoWafer(ModuleName.WaferRobot, 3) &&
  1688. WaferManager.Instance.CheckNoWafer(ModuleName.WaferRobot, 4) &&
  1689. wafer0.OriginStation == wafer1.OriginStation &&
  1690. wafer0.OriginStation == wafer2.OriginStation &&
  1691. wafer0.OriginStation == wafer3.OriginStation &&
  1692. wafer0.OriginStation == wafer4.OriginStation &&
  1693. Math.Abs(wafer1.OriginSlot - wafer2.OriginSlot) == 1 &&
  1694. Math.Abs(wafer2.OriginSlot - wafer3.OriginSlot) == 1 &&
  1695. Math.Abs(wafer0.OriginSlot - wafer4.OriginSlot) == 4 &&
  1696. Math.Abs(wafer0.OriginSlot - wafer3.OriginSlot) == 3 &&
  1697. Math.Abs(wafer0.OriginSlot - wafer2.OriginSlot) == 2 &&
  1698. Math.Abs(wafer0.OriginSlot - wafer1.OriginSlot) == 1)
  1699. {
  1700. pickBlade = Hand.Both;
  1701. pickSlot = wafer4.Slot;
  1702. }
  1703. }
  1704. }
  1705. break;
  1706. }
  1707. if (pmModule.CheckReadyForTransfer(_waferRobot.Module, pickBlade, pickSlot, EnumTransferType.Pick, out string reason) &&
  1708. pickSlot != -1 && _waferRobot.Pick(_pm1.Module, pickSlot, pickBlade))
  1709. {
  1710. _pm1.WaitTransfer(ModuleName.WaferRobot);
  1711. }
  1712. }
  1713. }
  1714. private void MonitorWaferRobotFIMSTask()
  1715. {
  1716. if (!_waferRobot.IsAvailable)
  1717. return;
  1718. var pj = _lstProcessJobs.FirstOrDefault(x => x.State == EnumProcessJobState.Processing);
  1719. if (pj == null || pj.IsEmptyLayout)
  1720. return;
  1721. //pick
  1722. if (pj.ProcessingState == EnumProcessingState.Charging &&
  1723. WaferManager.Instance.CheckNoWafer(ModuleName.WaferRobot, 2))
  1724. {
  1725. SchedulerFIMS fims = null;
  1726. List<int> slots = null;
  1727. WaferType waferType = WaferType.None;
  1728. ModuleName currentFims = GetCurrentTransferFims();
  1729. foreach (var st in _lstFIMSs)
  1730. {
  1731. if (!st.IsAvailable)
  1732. continue;
  1733. if (!CarrierManager.Instance.CheckHasCarrier(st.Module, 0))
  1734. continue;
  1735. // check FIMS
  1736. var fimsDevice = DEVICE.GetDevice<IoFIMS>($"PM1.{st.Module}");
  1737. if (!fimsDevice.IsLoadCompleted)
  1738. continue;
  1739. var carrier = CarrierManager.Instance.GetCarrier(st.Module, 0);
  1740. if (carrier != null && !carrier.IsEmpty)
  1741. {
  1742. var stockerInfo = pj.Stockers.FirstOrDefault(x => x.Item1 == carrier.InternalModuleName.ToString());
  1743. bool hasWafer = false;
  1744. var wafers = WaferManager.Instance.GetWafers(st.Module);
  1745. if (wafers != null && stockerInfo != null)
  1746. {
  1747. foreach (var wafer in wafers)
  1748. {
  1749. if (wafer == null || wafer.IsEmpty || wafer.ProcessState != EnumWaferProcessStatus.Idle)
  1750. continue;
  1751. if (!wafer.IsEmpty && (!stockerInfo.Item3.Any() || stockerInfo.Item3.Any(x => x == wafer.OriginSlot)))
  1752. {
  1753. hasWafer = true;
  1754. break;
  1755. }
  1756. }
  1757. }
  1758. if (!hasWafer)
  1759. continue;
  1760. if (currentFims != ModuleName.System && currentFims != st.Module)
  1761. continue;
  1762. GetWaferSlotsAndWaferType(carrier, out slots, out waferType);
  1763. if (slots != null && GetWaferCountRelatedToWaferRobot(waferType, false) < slots.Count)
  1764. {
  1765. fims = st;
  1766. break;
  1767. }
  1768. }
  1769. }
  1770. if (fims != null && slots != null)
  1771. {
  1772. Hand pickBlade = Hand.Blade1;
  1773. int pickSlot = -1;
  1774. var carrier = CarrierManager.Instance.GetCarrier(fims.Module, 0);
  1775. var stockerInfo = pj.Stockers.FirstOrDefault(x => x.Item1 == carrier.InternalModuleName.ToString());
  1776. if (WaferManager.Instance.CheckNoWafer(ModuleName.WaferRobot, 0) &&
  1777. WaferManager.Instance.CheckNoWafer(ModuleName.WaferRobot, 1) &&
  1778. WaferManager.Instance.CheckNoWafer(ModuleName.WaferRobot, 3) &&
  1779. WaferManager.Instance.CheckNoWafer(ModuleName.WaferRobot, 4))
  1780. {
  1781. //check PM
  1782. for (int i = 0; i < slots.Count; i++)
  1783. {
  1784. if (!WaferManager.Instance.CheckNoWafer(_pm1.Module, slots[i]))
  1785. continue;
  1786. if (i + 4 < slots.Count && Math.Abs(slots[i] - slots[i + 4]) == 4)
  1787. {
  1788. if (WaferManager.Instance.CheckNoWafer(_pm1.Module, slots[i + 1]) &&
  1789. WaferManager.Instance.CheckNoWafer(_pm1.Module, slots[i + 2]) &&
  1790. WaferManager.Instance.CheckNoWafer(_pm1.Module, slots[i + 3]) &&
  1791. WaferManager.Instance.CheckNoWafer(_pm1.Module, slots[i + 4]) &&
  1792. SC.GetValue<bool>($"{_waferRobot.Module}.IsSupport5Wafer"))
  1793. {
  1794. pickBlade = Hand.Both;
  1795. break;
  1796. }
  1797. }
  1798. break;
  1799. }
  1800. //check cassette
  1801. Dictionary<string, int> dummyWafers = new Dictionary<string, int>();
  1802. if (waferType == WaferType.SD)
  1803. dummyWafers = _sideDummyWafers;
  1804. else if (waferType == WaferType.ED)
  1805. dummyWafers = _extraDummyWafers;
  1806. var wafers = WaferManager.Instance.GetWafers(fims.Module).ToList();
  1807. if (SC.GetStringValue("System.ChargingOrderFromCassette") == "FromTopToBottom")
  1808. wafers.Reverse();
  1809. if (wafers != null)
  1810. {
  1811. for (int i = 0; i < wafers.Count; i++)
  1812. {
  1813. if (wafers[i] == null || wafers[i].IsEmpty || wafers[i].ProcessState != EnumWaferProcessStatus.Idle)
  1814. continue;
  1815. if ((wafers[i].WaferType == WaferType.SD || wafers[i].WaferType == WaferType.ED) && !dummyWafers.ContainsKey(wafers[i].InnerId.ToString()))
  1816. continue;
  1817. pickSlot = wafers[i].OriginSlot;
  1818. if (stockerInfo.Item3.Any() && !stockerInfo.Item3.Any(x => x == pickSlot))//非dummy类型要根据传入的slot按顺序取
  1819. continue;
  1820. if (pickBlade == Hand.Both)
  1821. {
  1822. if (i < SC.GetValue<int>("System.CassetteSlotCount") - 4)
  1823. {
  1824. if (waferType == WaferType.SD || waferType == WaferType.ED)
  1825. {
  1826. if (!wafers[i + 1].IsEmpty && !wafers[i + 2].IsEmpty && !wafers[i + 3].IsEmpty && !wafers[i + 4].IsEmpty &&
  1827. wafers[i + 1].ProcessState == EnumWaferProcessStatus.Idle &&
  1828. wafers[i + 2].ProcessState == EnumWaferProcessStatus.Idle &&
  1829. wafers[i + 3].ProcessState == EnumWaferProcessStatus.Idle &&
  1830. wafers[i + 4].ProcessState == EnumWaferProcessStatus.Idle &&
  1831. (!stockerInfo.Item3.Any() || (stockerInfo.Item3.Any(x => x == i + 1) && stockerInfo.Item3.Any(x => x == i + 2) && stockerInfo.Item3.Any(x => x == i + 3) && stockerInfo.Item3.Any(x => x == i + 4))) &&
  1832. dummyWafers.ContainsKey(wafers[i + 1].InnerId.ToString()) && dummyWafers.ContainsKey(wafers[i + 2].InnerId.ToString()) &&
  1833. dummyWafers.ContainsKey(wafers[i + 3].InnerId.ToString()) && dummyWafers.ContainsKey(wafers[i + 4].InnerId.ToString()))
  1834. {
  1835. if (SC.GetStringValue("System.ChargingOrderFromCassette") == "FromTopToBottom")
  1836. pickSlot = wafers[i + 4].OriginSlot;
  1837. break;
  1838. }
  1839. else
  1840. {
  1841. pickBlade = Hand.Blade1;
  1842. break;
  1843. }
  1844. }
  1845. else
  1846. {
  1847. if (!wafers[i + 1].IsEmpty && !wafers[i + 2].IsEmpty && !wafers[i + 3].IsEmpty && !wafers[i + 4].IsEmpty &&
  1848. wafers[i + 1].ProcessState == EnumWaferProcessStatus.Idle &&
  1849. wafers[i + 2].ProcessState == EnumWaferProcessStatus.Idle &&
  1850. wafers[i + 3].ProcessState == EnumWaferProcessStatus.Idle &&
  1851. wafers[i + 4].ProcessState == EnumWaferProcessStatus.Idle &&
  1852. (!stockerInfo.Item3.Any() || (stockerInfo.Item3.Any(x => x == i + 1) && stockerInfo.Item3.Any(x => x == i + 2) && stockerInfo.Item3.Any(x => x == i + 3) && stockerInfo.Item3.Any(x => x == i + 4))))
  1853. {
  1854. if (SC.GetStringValue("System.ChargingOrderFromCassette") == "FromTopToBottom")
  1855. pickSlot = wafers[i + 4].OriginSlot;
  1856. break;
  1857. }
  1858. else
  1859. {
  1860. pickBlade = Hand.Blade1;
  1861. break;
  1862. }
  1863. }
  1864. }
  1865. else
  1866. {
  1867. pickBlade = Hand.Blade1;
  1868. break;
  1869. }
  1870. }
  1871. else
  1872. {
  1873. pickBlade = Hand.Blade1;
  1874. break;
  1875. }
  1876. }
  1877. }
  1878. }
  1879. if (SC.GetValue<bool>($"System.IsEnableFIMSChargeMapping"))
  1880. {
  1881. if (carrier != null && !carrier.IsEmpty && carrier.IsMapped && carrier.IsMapOK &&
  1882. pickSlot != -1 && _pm1.IsAvailable && _waferRobot.Pick(fims.Module, pickSlot, pickBlade))
  1883. {
  1884. fims.WaitTransfer(ModuleName.WaferRobot);
  1885. return;
  1886. }
  1887. }
  1888. else
  1889. {
  1890. if (pickSlot != -1 && _waferRobot.Pick(fims.Module, pickSlot, pickBlade))
  1891. {
  1892. fims.WaitTransfer(ModuleName.WaferRobot);
  1893. }
  1894. }
  1895. }
  1896. }
  1897. if (!_waferRobot.IsAvailable)
  1898. return;
  1899. // mapping
  1900. if (pj.ProcessingState == EnumProcessingState.Charging && SC.GetValue<bool>($"System.IsEnableFIMSChargeMapping") &&
  1901. WaferManager.Instance.CheckNoWafer(ModuleName.WaferRobot, 2) && WaferManager.Instance.CheckNoWafer(ModuleName.WaferRobot, 1))
  1902. {
  1903. foreach (var fims in _lstFIMSs)
  1904. {
  1905. if (!fims.IsAvailable)
  1906. continue;
  1907. if (!CarrierManager.Instance.CheckHasCarrier(fims.Module.ToString(), 0))
  1908. continue;
  1909. // check FIMS
  1910. var fimsDevice = DEVICE.GetDevice<IoFIMS>($"PM1.{fims.Module}");
  1911. if (!fimsDevice.IsLoadCompleted)
  1912. continue;
  1913. var carrier = CarrierManager.Instance.GetCarrier(fims.Module);
  1914. if (carrier == null || carrier.IsEmpty || carrier.IsMapped)
  1915. continue;
  1916. var mappingSlot = GetMappingSlot(fims.Module);
  1917. if (_waferRobot.Map(fims.Module, mappingSlot.Length == 0 ? 0 : Regex.Matches(mappingSlot, "1").Count, mappingSlot, true, false, Hand.Blade1))
  1918. {
  1919. fims.WaitTransfer(ModuleName.WaferRobot);
  1920. return;
  1921. }
  1922. }
  1923. }
  1924. if (!_waferRobot.IsAvailable)
  1925. return;
  1926. //place
  1927. var robotWafer = WaferManager.Instance.GetWafer(ModuleName.WaferRobot, 2);
  1928. if (pj.ProcessingState == EnumProcessingState.Discharging &&
  1929. robotWafer != null && !robotWafer.IsEmpty && (robotWafer.ProcessState == EnumWaferProcessStatus.Completed ||
  1930. robotWafer.ProcessState == EnumWaferProcessStatus.Abort ||
  1931. robotWafer.ProcessState == EnumWaferProcessStatus.Failed))
  1932. {
  1933. SchedulerFIMS fims = null;
  1934. var waferInRobot = WaferManager.Instance.GetWafer(ModuleName.WaferRobot, 2);
  1935. foreach (var st in _lstFIMSs)
  1936. {
  1937. if (!st.IsAvailable)
  1938. continue;
  1939. if (!CarrierManager.Instance.CheckHasCarrier(st.Module, 0))
  1940. continue;
  1941. // check FIMS
  1942. var fimsDevice = DEVICE.GetDevice<IoFIMS>($"PM1.{st.Module}");
  1943. if (!fimsDevice.IsLoadCompleted)
  1944. continue;
  1945. var carrier = CarrierManager.Instance.GetCarrier(st.Module, 0);
  1946. if (carrier == null || carrier.IsEmpty)
  1947. continue;
  1948. if ((ModuleName)waferInRobot.OriginStation != carrier.InternalModuleName)
  1949. continue;
  1950. bool hasEmptySlot = false;
  1951. var wafers = WaferManager.Instance.GetWafers(st.Module);
  1952. if (wafers != null)
  1953. {
  1954. foreach (var wafer in wafers)
  1955. {
  1956. if (wafer == null)
  1957. continue;
  1958. if (wafer.IsEmpty)
  1959. {
  1960. hasEmptySlot = true;
  1961. break;
  1962. }
  1963. }
  1964. }
  1965. if (hasEmptySlot)
  1966. {
  1967. fims = st;
  1968. break;
  1969. }
  1970. }
  1971. if (fims != null)
  1972. {
  1973. Hand placeBlade = Hand.Blade1;
  1974. int placeSlot = waferInRobot.OriginSlot;
  1975. if (WaferManager.Instance.CheckHasWafer(ModuleName.WaferRobot, 0) &&
  1976. WaferManager.Instance.CheckHasWafer(ModuleName.WaferRobot, 1) &&
  1977. WaferManager.Instance.CheckHasWafer(ModuleName.WaferRobot, 3) &&
  1978. WaferManager.Instance.CheckHasWafer(ModuleName.WaferRobot, 4) &&
  1979. WaferManager.Instance.GetWafer(ModuleName.WaferRobot, 0).OriginStation == WaferManager.Instance.GetWafer(ModuleName.WaferRobot, 1).OriginStation &&
  1980. WaferManager.Instance.GetWafer(ModuleName.WaferRobot, 1).OriginStation == WaferManager.Instance.GetWafer(ModuleName.WaferRobot, 2).OriginStation &&
  1981. WaferManager.Instance.GetWafer(ModuleName.WaferRobot, 2).OriginStation == WaferManager.Instance.GetWafer(ModuleName.WaferRobot, 3).OriginStation &&
  1982. WaferManager.Instance.GetWafer(ModuleName.WaferRobot, 3).OriginStation == WaferManager.Instance.GetWafer(ModuleName.WaferRobot, 4).OriginStation)
  1983. {
  1984. var tempPlaceSlot = WaferManager.Instance.GetWafer(ModuleName.WaferRobot, 0).OriginSlot;
  1985. if (tempPlaceSlot + 4 < SC.GetValue<int>("System.CassetteSlotCount"))
  1986. {
  1987. if (WaferManager.Instance.CheckNoWafer(fims.Module, tempPlaceSlot + 1) &&
  1988. WaferManager.Instance.CheckNoWafer(fims.Module, tempPlaceSlot + 2) &&
  1989. WaferManager.Instance.CheckNoWafer(fims.Module, tempPlaceSlot + 3) &&
  1990. WaferManager.Instance.CheckNoWafer(fims.Module, tempPlaceSlot + 4))
  1991. {
  1992. placeBlade = Hand.Both;
  1993. placeSlot = tempPlaceSlot;
  1994. }
  1995. }
  1996. }
  1997. if (placeSlot != -1 && _waferRobot.Place(fims.Module, placeSlot, placeBlade))
  1998. {
  1999. fims.WaitTransfer(ModuleName.WaferRobot);
  2000. }
  2001. }
  2002. }
  2003. }
  2004. private bool CheckWaferSlotsHasWafer(List<int> slots)
  2005. {
  2006. foreach (var slot in slots)
  2007. {
  2008. if (WaferManager.Instance.CheckHasWafer(_pm1.Module, slot))
  2009. {
  2010. return true;
  2011. }
  2012. }
  2013. return false;
  2014. }
  2015. private List<int> GetWaferSlots()
  2016. {
  2017. List<int> slots = null;
  2018. switch (SC.GetStringValue("System.ChargingOrderBySort"))
  2019. {
  2020. case "ED,P,M":
  2021. if (CheckWaferSlotsHasWafer(_monitor1Slots))
  2022. return _monitor1Slots;
  2023. if (CheckWaferSlotsHasWafer(_monitor2Slots))
  2024. return _monitor2Slots;
  2025. if (CheckWaferSlotsHasWafer(_productSlots))
  2026. return _productSlots;
  2027. if (CheckWaferSlotsHasWafer(_extraDummySlots))
  2028. return _extraDummySlots;
  2029. break;
  2030. case "ED,M,P":
  2031. if (CheckWaferSlotsHasWafer(_productSlots))
  2032. return _productSlots;
  2033. if (CheckWaferSlotsHasWafer(_monitor1Slots))
  2034. return _monitor1Slots;
  2035. if (CheckWaferSlotsHasWafer(_monitor2Slots))
  2036. return _monitor2Slots;
  2037. if (CheckWaferSlotsHasWafer(_extraDummySlots))
  2038. return _extraDummySlots;
  2039. break;
  2040. case "P,ED,M":
  2041. if (CheckWaferSlotsHasWafer(_monitor1Slots))
  2042. return _monitor1Slots;
  2043. if (CheckWaferSlotsHasWafer(_monitor2Slots))
  2044. return _monitor2Slots;
  2045. if (CheckWaferSlotsHasWafer(_extraDummySlots))
  2046. return _extraDummySlots;
  2047. if (CheckWaferSlotsHasWafer(_productSlots))
  2048. return _productSlots;
  2049. break;
  2050. case "P,M,ED":
  2051. if (CheckWaferSlotsHasWafer(_extraDummySlots))
  2052. return _extraDummySlots;
  2053. if (CheckWaferSlotsHasWafer(_monitor1Slots))
  2054. return _monitor1Slots;
  2055. if (CheckWaferSlotsHasWafer(_monitor2Slots))
  2056. return _monitor2Slots;
  2057. if (CheckWaferSlotsHasWafer(_productSlots))
  2058. return _productSlots;
  2059. break;
  2060. case "M,P,ED":
  2061. if (CheckWaferSlotsHasWafer(_extraDummySlots))
  2062. return _extraDummySlots;
  2063. if (CheckWaferSlotsHasWafer(_productSlots))
  2064. return _productSlots;
  2065. if (CheckWaferSlotsHasWafer(_monitor1Slots))
  2066. return _monitor1Slots;
  2067. if (CheckWaferSlotsHasWafer(_monitor2Slots))
  2068. return _monitor2Slots;
  2069. break;
  2070. case "M,ED,P":
  2071. if (CheckWaferSlotsHasWafer(_productSlots))
  2072. return _productSlots;
  2073. if (CheckWaferSlotsHasWafer(_extraDummySlots))
  2074. return _extraDummySlots;
  2075. if (CheckWaferSlotsHasWafer(_monitor1Slots))
  2076. return _monitor1Slots;
  2077. if (CheckWaferSlotsHasWafer(_monitor2Slots))
  2078. return _monitor2Slots;
  2079. break;
  2080. default:
  2081. if (CheckWaferSlotsHasWafer(_monitor1Slots))
  2082. return _monitor1Slots;
  2083. if (CheckWaferSlotsHasWafer(_monitor2Slots))
  2084. return _monitor2Slots;
  2085. if (CheckWaferSlotsHasWafer(_productSlots))
  2086. return _productSlots;
  2087. if (CheckWaferSlotsHasWafer(_extraDummySlots))
  2088. return _extraDummySlots;
  2089. break;
  2090. }
  2091. foreach (var slot in _sideDummySlots)
  2092. {
  2093. if (WaferManager.Instance.CheckHasWafer(_pm1.Module, slot))
  2094. {
  2095. return _sideDummySlots;
  2096. }
  2097. }
  2098. return slots;
  2099. }
  2100. private bool CheckCarrierHasWaferInPM(ModuleName module)
  2101. {
  2102. bool isHaveWafer = false;
  2103. for (int i = 0; i < WaferManager.Instance.GetWafers(_pm1.Module).Length; i++)
  2104. {
  2105. if (!WaferManager.Instance.CheckHasWafer(_pm1.Module, i))
  2106. continue;
  2107. var wafer = WaferManager.Instance.GetWafer(_pm1.Module, i);
  2108. if (wafer == null || wafer.IsEmpty)
  2109. continue;
  2110. if (wafer.OriginStation == (int)module)
  2111. {
  2112. isHaveWafer = true;
  2113. break;
  2114. }
  2115. }
  2116. return isHaveWafer;
  2117. }
  2118. private void DischargingOrderBySort(string order)
  2119. {
  2120. switch (order)
  2121. {
  2122. case "ED,P,M":
  2123. MonitorCassetteRobotStockerTaskInDischarge(_lstTotlaStockers, WaferType.M1, _monitor1Slots);
  2124. if (!_carrierRobot.IsAvailable)
  2125. return;
  2126. MonitorCassetteRobotStockerTaskInDischarge(_lstTotlaStockers, WaferType.M2, _monitor2Slots);
  2127. if (!_carrierRobot.IsAvailable)
  2128. return;
  2129. MonitorCassetteRobotStockerTaskInDischarge(_lstTotlaStockers, WaferType.P, _productSlots);
  2130. if (!_carrierRobot.IsAvailable)
  2131. return;
  2132. if (SC.GetValue<bool>("System.IsEnableDummyWaferDischarge"))
  2133. MonitorCassetteRobotStockerTaskInDischarge(_lstTotlaStockers, WaferType.ED, _extraDummySlots);
  2134. break;
  2135. case "ED,M,P":
  2136. MonitorCassetteRobotStockerTaskInDischarge(_lstTotlaStockers, WaferType.P, _productSlots);
  2137. if (!_carrierRobot.IsAvailable)
  2138. return;
  2139. MonitorCassetteRobotStockerTaskInDischarge(_lstTotlaStockers, WaferType.M1, _monitor1Slots);
  2140. if (!_carrierRobot.IsAvailable)
  2141. return;
  2142. MonitorCassetteRobotStockerTaskInDischarge(_lstTotlaStockers, WaferType.M2, _monitor2Slots);
  2143. if (!_carrierRobot.IsAvailable)
  2144. return;
  2145. if (SC.GetValue<bool>("System.IsEnableDummyWaferDischarge"))
  2146. MonitorCassetteRobotStockerTaskInDischarge(_lstTotlaStockers, WaferType.ED, _extraDummySlots);
  2147. break;
  2148. case "P,ED,M":
  2149. MonitorCassetteRobotStockerTaskInDischarge(_lstTotlaStockers, WaferType.M1, _monitor1Slots);
  2150. if (!_carrierRobot.IsAvailable)
  2151. return;
  2152. MonitorCassetteRobotStockerTaskInDischarge(_lstTotlaStockers, WaferType.M2, _monitor2Slots);
  2153. if (!_carrierRobot.IsAvailable)
  2154. return;
  2155. if (SC.GetValue<bool>("System.IsEnableDummyWaferDischarge"))
  2156. MonitorCassetteRobotStockerTaskInDischarge(_lstTotlaStockers, WaferType.ED, _extraDummySlots);
  2157. if (!_carrierRobot.IsAvailable)
  2158. return;
  2159. MonitorCassetteRobotStockerTaskInDischarge(_lstTotlaStockers, WaferType.P, _productSlots);
  2160. break;
  2161. case "P,M,ED":
  2162. if (SC.GetValue<bool>("System.IsEnableDummyWaferDischarge"))
  2163. MonitorCassetteRobotStockerTaskInDischarge(_lstTotlaStockers, WaferType.ED, _extraDummySlots);
  2164. if (!_carrierRobot.IsAvailable)
  2165. return;
  2166. MonitorCassetteRobotStockerTaskInDischarge(_lstTotlaStockers, WaferType.M1, _monitor1Slots);
  2167. if (!_carrierRobot.IsAvailable)
  2168. return;
  2169. MonitorCassetteRobotStockerTaskInDischarge(_lstTotlaStockers, WaferType.M2, _monitor2Slots);
  2170. if (!_carrierRobot.IsAvailable)
  2171. return;
  2172. MonitorCassetteRobotStockerTaskInDischarge(_lstTotlaStockers, WaferType.P, _productSlots);
  2173. break;
  2174. case "M,P,ED":
  2175. if (SC.GetValue<bool>("System.IsEnableDummyWaferDischarge"))
  2176. MonitorCassetteRobotStockerTaskInDischarge(_lstTotlaStockers, WaferType.ED, _extraDummySlots);
  2177. if (!_carrierRobot.IsAvailable)
  2178. return;
  2179. MonitorCassetteRobotStockerTaskInDischarge(_lstTotlaStockers, WaferType.P, _productSlots);
  2180. if (!_carrierRobot.IsAvailable)
  2181. return;
  2182. MonitorCassetteRobotStockerTaskInDischarge(_lstTotlaStockers, WaferType.M1, _monitor1Slots);
  2183. if (!_carrierRobot.IsAvailable)
  2184. return;
  2185. MonitorCassetteRobotStockerTaskInDischarge(_lstTotlaStockers, WaferType.M2, _monitor2Slots);
  2186. if (!_carrierRobot.IsAvailable)
  2187. return;
  2188. break;
  2189. case "M,ED,P":
  2190. MonitorCassetteRobotStockerTaskInDischarge(_lstTotlaStockers, WaferType.P, _productSlots);
  2191. if (!_carrierRobot.IsAvailable)
  2192. return;
  2193. if (SC.GetValue<bool>("System.IsEnableDummyWaferDischarge"))
  2194. MonitorCassetteRobotStockerTaskInDischarge(_lstTotlaStockers, WaferType.ED, _extraDummySlots);
  2195. if (!_carrierRobot.IsAvailable)
  2196. return;
  2197. MonitorCassetteRobotStockerTaskInDischarge(_lstTotlaStockers, WaferType.M1, _monitor1Slots);
  2198. if (!_carrierRobot.IsAvailable)
  2199. return;
  2200. MonitorCassetteRobotStockerTaskInDischarge(_lstTotlaStockers, WaferType.M2, _monitor2Slots);
  2201. if (!_carrierRobot.IsAvailable)
  2202. return;
  2203. break;
  2204. default:
  2205. MonitorCassetteRobotStockerTaskInDischarge(_lstTotlaStockers, WaferType.M1, _monitor1Slots);
  2206. if (!_carrierRobot.IsAvailable)
  2207. return;
  2208. MonitorCassetteRobotStockerTaskInDischarge(_lstTotlaStockers, WaferType.M2, _monitor2Slots);
  2209. if (!_carrierRobot.IsAvailable)
  2210. return;
  2211. MonitorCassetteRobotStockerTaskInDischarge(_lstTotlaStockers, WaferType.P, _productSlots);
  2212. if (!_carrierRobot.IsAvailable)
  2213. return;
  2214. if (SC.GetValue<bool>("System.IsEnableDummyWaferDischarge"))
  2215. MonitorCassetteRobotStockerTaskInDischarge(_lstTotlaStockers, WaferType.ED, _extraDummySlots);
  2216. break;
  2217. }
  2218. }
  2219. private void ChargingOrderBySort(ProcessJobInfo pj, string order)
  2220. {
  2221. List<SchedulerStocker> pjStocker = new List<SchedulerStocker>();
  2222. foreach (var s in pj.Stockers)
  2223. {
  2224. var module = GetModule(s.Item1) as SchedulerStocker;
  2225. if (module != null)
  2226. pjStocker.Add(module);
  2227. }
  2228. switch (order)
  2229. {
  2230. case "ED,P,M":
  2231. if (pj.IsNeedChargeDummyWafer)
  2232. MonitorCassetteRobotStockerTask(_lstExtraDummyStocker, WaferType.ED);
  2233. if (!_carrierRobot.IsAvailable)
  2234. return;
  2235. MonitorCassetteRobotStockerTask(pjStocker, WaferType.P);
  2236. if (!_carrierRobot.IsAvailable)
  2237. return;
  2238. MonitorCassetteRobotStockerTask(pjStocker, WaferType.M1);
  2239. MonitorCassetteRobotStockerTask(pjStocker, WaferType.M2);
  2240. break;
  2241. case "ED,M,P":
  2242. if (pj.IsNeedChargeDummyWafer)
  2243. MonitorCassetteRobotStockerTask(_lstExtraDummyStocker, WaferType.ED);
  2244. if (!_carrierRobot.IsAvailable)
  2245. return;
  2246. MonitorCassetteRobotStockerTask(pjStocker, WaferType.M1);
  2247. MonitorCassetteRobotStockerTask(pjStocker, WaferType.M2);
  2248. if (!_carrierRobot.IsAvailable)
  2249. return;
  2250. MonitorCassetteRobotStockerTask(pjStocker, WaferType.P);
  2251. break;
  2252. case "P,ED,M":
  2253. MonitorCassetteRobotStockerTask(pjStocker, WaferType.P);
  2254. if (!_carrierRobot.IsAvailable)
  2255. return;
  2256. if (pj.IsNeedChargeDummyWafer)
  2257. MonitorCassetteRobotStockerTask(_lstExtraDummyStocker, WaferType.ED);
  2258. if (!_carrierRobot.IsAvailable)
  2259. return;
  2260. MonitorCassetteRobotStockerTask(pjStocker, WaferType.M1);
  2261. MonitorCassetteRobotStockerTask(pjStocker, WaferType.M2);
  2262. break;
  2263. case "P,M,ED":
  2264. MonitorCassetteRobotStockerTask(pjStocker, WaferType.P);
  2265. if (!_carrierRobot.IsAvailable)
  2266. return;
  2267. MonitorCassetteRobotStockerTask(pjStocker, WaferType.M1);
  2268. MonitorCassetteRobotStockerTask(pjStocker, WaferType.M2);
  2269. if (!_carrierRobot.IsAvailable)
  2270. return;
  2271. if (pj.IsNeedChargeDummyWafer)
  2272. MonitorCassetteRobotStockerTask(_lstExtraDummyStocker, WaferType.ED);
  2273. break;
  2274. case "M,P,ED":
  2275. MonitorCassetteRobotStockerTask(pjStocker, WaferType.M1);
  2276. MonitorCassetteRobotStockerTask(pjStocker, WaferType.M2);
  2277. if (!_carrierRobot.IsAvailable)
  2278. return;
  2279. MonitorCassetteRobotStockerTask(pjStocker, WaferType.P);
  2280. if (!_carrierRobot.IsAvailable)
  2281. return;
  2282. if (pj.IsNeedChargeDummyWafer)
  2283. MonitorCassetteRobotStockerTask(_lstExtraDummyStocker, WaferType.ED);
  2284. break;
  2285. case "M,ED,P":
  2286. MonitorCassetteRobotStockerTask(pjStocker, WaferType.M1);
  2287. MonitorCassetteRobotStockerTask(pjStocker, WaferType.M2);
  2288. if (!_carrierRobot.IsAvailable)
  2289. return;
  2290. if (pj.IsNeedChargeDummyWafer)
  2291. MonitorCassetteRobotStockerTask(_lstExtraDummyStocker, WaferType.ED);
  2292. if (!_carrierRobot.IsAvailable)
  2293. return;
  2294. MonitorCassetteRobotStockerTask(pjStocker, WaferType.P);
  2295. break;
  2296. default:
  2297. if (pj.IsNeedChargeDummyWafer)
  2298. MonitorCassetteRobotStockerTask(_lstExtraDummyStocker, WaferType.ED);
  2299. if (!_carrierRobot.IsAvailable)
  2300. return;
  2301. MonitorCassetteRobotStockerTask(pjStocker, WaferType.P);
  2302. if (!_carrierRobot.IsAvailable)
  2303. return;
  2304. MonitorCassetteRobotStockerTask(pjStocker, WaferType.M1);
  2305. MonitorCassetteRobotStockerTask(pjStocker, WaferType.M2);
  2306. break;
  2307. }
  2308. }
  2309. private void MonitorCassetteRobotStockerTaskInDischarge(List<SchedulerStocker> targetStockers, WaferType targetWaferType, List<int> waferSlots)
  2310. {
  2311. if (!_carrierRobot.IsAvailable)
  2312. return;
  2313. var targetCarrierType = (CarrierType)(Enum.Parse(typeof(CarrierType), targetWaferType.ToString()));
  2314. //pick
  2315. if (CarrierManager.Instance.CheckNoCarrier(ModuleName.CarrierRobot, 0) && waferSlots.Count > 0)
  2316. {
  2317. bool needPickSdCassette = false;
  2318. int sdWaferCount = GetWaferCountRelatedToWaferRobot(targetWaferType, true);
  2319. needPickSdCassette = sdWaferCount > 0;
  2320. var sdStockerModule = GetModuleNameForNextWafer(targetWaferType);
  2321. if (needPickSdCassette && sdStockerModule != ModuleName.System)
  2322. {
  2323. SchedulerStocker sdStocker = null;
  2324. foreach (var sd in targetStockers)
  2325. {
  2326. if (!CarrierManager.Instance.CheckHasCarrier(sd.Module, 0) ||
  2327. CarrierManager.Instance.GetCarrier(sd.Module, 0).CarrierType != targetCarrierType)
  2328. continue;
  2329. if (sd.Module == sdStockerModule &&
  2330. CheckCarrierHasEmptySlot(sd.Module))
  2331. {
  2332. sdStocker = sd;
  2333. break;
  2334. }
  2335. }
  2336. SchedulerFIMS fims = null;
  2337. foreach (var st in _lstFIMSs)
  2338. {
  2339. if (!st.IsAvailable)
  2340. continue;
  2341. if (CarrierManager.Instance.CheckNoCarrier(st.Module, 0))
  2342. {
  2343. fims = st;
  2344. break;
  2345. }
  2346. }
  2347. if (sdStocker != null && fims != null)
  2348. {
  2349. if (_carrierRobot.Pick(sdStocker.Module, 0, Hand.Blade1))
  2350. {
  2351. sdStocker.WaitTransfer(ModuleName.CarrierRobot);
  2352. return;
  2353. }
  2354. }
  2355. }
  2356. }
  2357. if (!_carrierRobot.IsAvailable)
  2358. return;
  2359. //place
  2360. var carrier = CarrierManager.Instance.GetCarrier(ModuleName.CarrierRobot, 0);
  2361. if (carrier != null && !carrier.IsEmpty && carrier.CarrierType == targetCarrierType)
  2362. {
  2363. if (!CheckModuleHasWaferInWaferRobotAndPM(carrier.InternalModuleName) || !CheckCarrierHasEmptySlot(ModuleName.CarrierRobot))
  2364. {
  2365. SchedulerStocker sdStocker = null;
  2366. foreach (var sd in targetStockers)
  2367. {
  2368. if (CarrierManager.Instance.CheckNoCarrier(sd.Module, 0) && sd.Module == carrier.InternalModuleName)
  2369. {
  2370. sdStocker = sd;
  2371. break;
  2372. }
  2373. }
  2374. if (sdStocker != null)
  2375. {
  2376. var canPlace = true;
  2377. var transfer = Singleton<EquipmentManager>.Instance.GetTransferJobStockers();
  2378. if (transfer != null && transfer.Any(x => x.Stocker == carrier.InternalModuleName))
  2379. canPlace = false;
  2380. if (canPlace && _carrierRobot.Place(sdStocker.Module, 0, Hand.Blade1))
  2381. {
  2382. sdStocker.WaitTransfer(ModuleName.CarrierRobot);
  2383. return;
  2384. }
  2385. }
  2386. }
  2387. }
  2388. }
  2389. private bool CheckCarrierCanPickFromFIMSInDischarge(ModuleName fimsCarrierModule)
  2390. {
  2391. List<ModuleName> robotModules = new List<ModuleName>();
  2392. for (int i = 0; i < WaferManager.Instance.GetWafers(ModuleName.WaferRobot).Length; i++)
  2393. {
  2394. var wafer = WaferManager.Instance.GetWafer(ModuleName.WaferRobot, i);
  2395. if (wafer == null || wafer.IsEmpty)
  2396. continue;
  2397. if (!robotModules.Contains((ModuleName)wafer.OriginStation))
  2398. robotModules.Add((ModuleName)wafer.OriginStation);
  2399. }
  2400. if (robotModules.Contains(fimsCarrierModule))
  2401. return false;
  2402. List<ModuleName> pmModules = new List<ModuleName>();
  2403. for (int i = 0; i < WaferManager.Instance.GetWafers(_pm1.Module).Length; i++)
  2404. {
  2405. var wafer = WaferManager.Instance.GetWafer(_pm1.Module, i);
  2406. if (wafer == null || wafer.IsEmpty)
  2407. continue;
  2408. if (!pmModules.Contains((ModuleName)wafer.OriginStation))
  2409. pmModules.Add((ModuleName)wafer.OriginStation);
  2410. }
  2411. if (pmModules.Contains(fimsCarrierModule))
  2412. return false;
  2413. return true;
  2414. }
  2415. private ModuleName GetNextStockerRelatedToWaferRobot()
  2416. {
  2417. List<ModuleName> fimsModules = new List<ModuleName>();
  2418. foreach (var fims in _lstFIMSs)
  2419. {
  2420. if (CarrierManager.Instance.CheckNoCarrier(fims.Module, 0))
  2421. continue;
  2422. fimsModules.Add(CarrierManager.Instance.GetCarrier(fims.Module, 0).InternalModuleName);
  2423. }
  2424. List<ModuleName> robotModules = new List<ModuleName>();
  2425. for (int i = 0; i < WaferManager.Instance.GetWafers(ModuleName.WaferRobot).Length; i++)
  2426. {
  2427. var wafer = WaferManager.Instance.GetWafer(ModuleName.WaferRobot, i);
  2428. if (wafer == null || wafer.IsEmpty)
  2429. continue;
  2430. if (!robotModules.Contains((ModuleName)wafer.OriginStation))
  2431. robotModules.Add((ModuleName)wafer.OriginStation);
  2432. }
  2433. if (robotModules.Count > 0)
  2434. {
  2435. foreach (var module in robotModules)
  2436. {
  2437. if (!fimsModules.Any(x => x == module))
  2438. return module;
  2439. }
  2440. }
  2441. List<ModuleName> pmModules = new List<ModuleName>();
  2442. for (int i = 0; i < WaferManager.Instance.GetWafers(_pm1.Module).Length; i++)
  2443. {
  2444. var wafer = WaferManager.Instance.GetWafer(_pm1.Module, i);
  2445. if (wafer == null || wafer.IsEmpty)
  2446. continue;
  2447. if (!pmModules.Contains((ModuleName)wafer.OriginStation))
  2448. pmModules.Add((ModuleName)wafer.OriginStation);
  2449. if (pmModules.Count == _lstFIMSs.Count)
  2450. break;
  2451. }
  2452. if (pmModules.Count > 0)
  2453. {
  2454. foreach (var module in pmModules)
  2455. {
  2456. if (!fimsModules.Any(x => x == module))
  2457. return module;
  2458. }
  2459. }
  2460. return ModuleName.System;
  2461. }
  2462. private void MonitorCassetteRobotPlaceStockerTask()
  2463. {
  2464. if (!_carrierRobot.IsAvailable)
  2465. return;
  2466. var pj = _lstProcessJobs.FirstOrDefault(x => x.State == EnumProcessJobState.Processing);
  2467. if (pj == null)
  2468. return;
  2469. //place
  2470. var carrier = CarrierManager.Instance.GetCarrier(ModuleName.CarrierRobot, 0);
  2471. if (carrier != null && !carrier.IsEmpty && pj.Stockers.Any(x => x.Item1 == carrier.InternalModuleName.ToString()))
  2472. {
  2473. var target = pj.Stockers.Find(x => x.Item1 == carrier.InternalModuleName.ToString());
  2474. if (target != null && CarrierManager.Instance.CheckNoCarrier(target.Item1, 0))
  2475. {
  2476. if (_carrierRobot.Place(ModuleHelper.Converter(target.Item1), 0, Hand.Blade1))
  2477. {
  2478. GetModule(target.Item1).WaitTransfer(ModuleName.CarrierRobot);
  2479. return;
  2480. }
  2481. }
  2482. }
  2483. }
  2484. private void MonitorCassetteRobotStockerTask(List<SchedulerStocker> targetStockers, WaferType targetWaferType)
  2485. {
  2486. if (!_carrierRobot.IsAvailable)
  2487. return;
  2488. var pj = _lstProcessJobs.FirstOrDefault(x => x.State == EnumProcessJobState.Processing);
  2489. if (pj == null || pj.IsEmptyLayout)
  2490. return;
  2491. var carrier = CarrierManager.Instance.GetCarrier(ModuleName.CarrierRobot, 0);
  2492. var targetSlots = GetWaferSlots(targetWaferType);
  2493. var targetCarrierType = (CarrierType)(Enum.Parse(typeof(CarrierType), targetWaferType.ToString()));
  2494. if (targetSlots == null)
  2495. return;
  2496. //pick
  2497. if (CarrierManager.Instance.CheckNoCarrier(ModuleName.CarrierRobot, 0) && targetSlots.Count > 0)
  2498. {
  2499. bool needPickTargetCassette = false;
  2500. int targetWaferCount = GetWaferCountRelatedToWaferRobot(targetWaferType);
  2501. if (targetWaferCount < targetSlots.Count)
  2502. needPickTargetCassette = true;
  2503. if (needPickTargetCassette)
  2504. {
  2505. SchedulerStocker targetStocker = null;
  2506. foreach (var target in targetStockers)
  2507. {
  2508. if (CarrierManager.Instance.CheckHasCarrier(target.Module, 0) && !CheckCarrierHasNoWafer(target.Module, targetWaferType) &&
  2509. CarrierManager.Instance.GetCarrier(target.Module).CarrierType == targetCarrierType)
  2510. {
  2511. if (pj.ProcessingState == EnumProcessingState.Charging)
  2512. {
  2513. carrier = CarrierManager.Instance.GetCarrier(target.Module);
  2514. var stockerInfo = pj.Stockers.FirstOrDefault(x => x.Item1 == carrier.InternalModuleName.ToString());
  2515. var wafers = WaferManager.Instance.GetWafers(target.Module);
  2516. if (wafers != null && stockerInfo != null)
  2517. {
  2518. foreach (var wafer in wafers)
  2519. {
  2520. if (wafer == null || wafer.IsEmpty || wafer.ProcessState != EnumWaferProcessStatus.Idle)
  2521. continue;
  2522. if (!wafer.IsEmpty && (!stockerInfo.Item3.Any() || stockerInfo.Item3.Any(x => x == wafer.OriginSlot)))
  2523. {
  2524. targetStocker = target;
  2525. break;
  2526. }
  2527. }
  2528. if (targetStocker != null)
  2529. break;
  2530. }
  2531. }
  2532. else
  2533. {
  2534. targetStocker = target;
  2535. break;
  2536. }
  2537. }
  2538. }
  2539. SchedulerFIMS fims = null;
  2540. foreach (var st in _lstFIMSs)
  2541. {
  2542. if (!st.IsAvailable)
  2543. continue;
  2544. if (CarrierManager.Instance.CheckNoCarrier(st.Module, 0))
  2545. {
  2546. fims = st;
  2547. break;
  2548. }
  2549. }
  2550. if (targetStocker != null && fims != null)
  2551. {
  2552. switch (targetCarrierType.ToString())
  2553. {
  2554. case "SD":
  2555. _lstPlaceSideDummyStocker.Add(targetStocker);
  2556. break;
  2557. case "ED":
  2558. _lstPlaceExtraDummyStockers.Add(targetStocker);
  2559. break;
  2560. case "P":
  2561. _lstPlaceCurrentBatchStocker.Add(targetStocker);
  2562. break;
  2563. case "M1":
  2564. _lstPlaceMonitor1Stocker.Add(targetStocker);
  2565. break;
  2566. case "M2":
  2567. _lstPlaceMonitor2Stocker.Add(targetStocker);
  2568. break;
  2569. }
  2570. if (_carrierRobot.Pick(targetStocker.Module, 0, Hand.Blade1))
  2571. {
  2572. targetStocker.WaitTransfer(ModuleName.CarrierRobot);
  2573. return;
  2574. }
  2575. }
  2576. }
  2577. }
  2578. if (!_carrierRobot.IsAvailable)
  2579. return;
  2580. //place
  2581. carrier = CarrierManager.Instance.GetCarrier(ModuleName.CarrierRobot, 0);
  2582. if (carrier != null && !carrier.IsEmpty && carrier.CarrierType == targetCarrierType)
  2583. {
  2584. var needPlace = false;
  2585. if (pj.ProcessingState == EnumProcessingState.Charging)
  2586. {
  2587. var stockerInfo = pj.Stockers.FirstOrDefault(x => x.Item1 == carrier.InternalModuleName.ToString());
  2588. var wafers = WaferManager.Instance.GetWafers(ModuleName.CarrierRobot);
  2589. if (wafers != null && stockerInfo != null)
  2590. {
  2591. foreach (var wafer in wafers)
  2592. {
  2593. if (wafer == null || wafer.IsEmpty || wafer.ProcessState != EnumWaferProcessStatus.Idle)
  2594. continue;
  2595. if (stockerInfo.Item3.Any() && !stockerInfo.Item3.Any(x => x == wafer.OriginSlot))
  2596. {
  2597. needPlace = true;
  2598. break;
  2599. }
  2600. }
  2601. }
  2602. }
  2603. if (GetWaferCountRelatedToWaferRobot(targetWaferType) >= targetSlots.Count || CheckCarrierHasNoWafer(ModuleName.CarrierRobot, targetWaferType) || needPlace)
  2604. {
  2605. switch (targetCarrierType.ToString())
  2606. {
  2607. case "SD":
  2608. targetStockers = _lstPlaceSideDummyStocker;
  2609. break;
  2610. case "ED":
  2611. targetStockers = _lstPlaceExtraDummyStockers;
  2612. break;
  2613. case "P":
  2614. targetStockers = _lstPlaceCurrentBatchStocker;
  2615. break;
  2616. case "M1":
  2617. targetStockers = _lstPlaceMonitor1Stocker;
  2618. break;
  2619. case "M2":
  2620. targetStockers = _lstPlaceMonitor2Stocker;
  2621. break;
  2622. }
  2623. SchedulerStocker targetStocker = null;
  2624. foreach (var target in targetStockers)
  2625. {
  2626. if (CarrierManager.Instance.CheckNoCarrier(target.Module, 0) && carrier.InternalModuleName == target.Module)
  2627. {
  2628. if (pj.ProcessingState == EnumProcessingState.Charging)
  2629. {
  2630. var stockerInfo = pj.Stockers.FirstOrDefault(x => x.Item1 == carrier.InternalModuleName.ToString());
  2631. var wafers = WaferManager.Instance.GetWafers(ModuleName.CarrierRobot);
  2632. if (wafers != null && stockerInfo != null)
  2633. {
  2634. var hasWafer = false;
  2635. foreach (var wafer in wafers)
  2636. {
  2637. if (wafer == null || wafer.IsEmpty || wafer.ProcessState != EnumWaferProcessStatus.Idle)
  2638. continue;
  2639. if (stockerInfo.Item3.Any() && stockerInfo.Item3.Any(x => x == wafer.OriginSlot))
  2640. {
  2641. hasWafer = true;
  2642. break;
  2643. }
  2644. }
  2645. if (!hasWafer)
  2646. {
  2647. targetStocker = target;
  2648. break;
  2649. }
  2650. }
  2651. }
  2652. else
  2653. {
  2654. targetStocker = target;
  2655. break;
  2656. }
  2657. }
  2658. }
  2659. if (targetStocker != null)
  2660. {
  2661. if (_carrierRobot.Place(targetStocker.Module, 0, Hand.Blade1))
  2662. {
  2663. targetStocker.WaitTransfer(ModuleName.CarrierRobot);
  2664. return;
  2665. }
  2666. }
  2667. }
  2668. }
  2669. }
  2670. private bool CheckCarrierCanPickFromStocker(ModuleName currentModule)
  2671. {
  2672. var currentWafers = WaferManager.Instance.GetWafers(currentModule);
  2673. if (currentWafers != null && !currentWafers.Any(x => !x.IsEmpty))
  2674. {
  2675. //空盒子
  2676. return false;
  2677. }
  2678. var carrierType = CarrierManager.Instance.GetCarrier(currentModule, 0).CarrierType;
  2679. var ret = CheckHasPWafer();
  2680. var waferTypeSlots = GetWaferTypeSlots();
  2681. if (waferTypeSlots != null && waferTypeSlots.Count > 0)
  2682. {
  2683. Dictionary<WaferType, int> nextWaferTypeDic = new Dictionary<WaferType, int>();
  2684. int startIndex = -1;
  2685. for (int i = 0; i < waferTypeSlots.Count; i++)
  2686. {
  2687. if (WaferManager.Instance.CheckHasWafer(_pm1.Module, waferTypeSlots[i].Item2))
  2688. {
  2689. startIndex = i;
  2690. continue;
  2691. }
  2692. //P wafer不够的情况
  2693. if (waferTypeSlots[i].Item1 == WaferType.P)
  2694. {
  2695. if (!ret.Item1)
  2696. continue;
  2697. else
  2698. {
  2699. if (i - startIndex > ret.Item2)
  2700. continue;
  2701. }
  2702. }
  2703. if (!nextWaferTypeDic.ContainsKey(waferTypeSlots[i].Item1))
  2704. nextWaferTypeDic.Add(waferTypeSlots[i].Item1, 0);
  2705. nextWaferTypeDic[waferTypeSlots[i].Item1] += 1;
  2706. if (nextWaferTypeDic.Count == _lstFIMSs.Count)
  2707. break;
  2708. if (i - startIndex >= _lstFIMSs.Count * 25)
  2709. break;
  2710. }
  2711. Dictionary<WaferType, int> fimsWaferTypeDic = new Dictionary<WaferType, int>();
  2712. foreach (var fims in _lstFIMSs)
  2713. {
  2714. if (CarrierManager.Instance.CheckHasCarrier(fims.Module, 0))
  2715. {
  2716. for (int i = 0; i < WaferManager.Instance.GetWafers(fims.Module).Length; i++)
  2717. {
  2718. var wafer = WaferManager.Instance.GetWafer(fims.Module, i);
  2719. if (wafer == null || wafer.IsEmpty)
  2720. continue;
  2721. if (!fimsWaferTypeDic.ContainsKey(wafer.WaferType))
  2722. fimsWaferTypeDic.Add(wafer.WaferType, 0);
  2723. fimsWaferTypeDic[wafer.WaferType] += 1;
  2724. }
  2725. }
  2726. }
  2727. foreach (var type in nextWaferTypeDic.Keys)
  2728. {
  2729. if (carrierType.ToString() == type.ToString())
  2730. {
  2731. if (type == WaferType.P || type == WaferType.M1 || type == WaferType.M2)
  2732. {
  2733. if (!fimsWaferTypeDic.ContainsKey(type) || nextWaferTypeDic[type] > fimsWaferTypeDic[type])
  2734. return true;
  2735. }
  2736. else if (type == WaferType.SD)
  2737. {
  2738. foreach (var wafer in currentWafers)
  2739. {
  2740. if (wafer.IsEmpty)
  2741. continue;
  2742. if (_sideDummyWafers.ContainsKey(wafer.InnerId.ToString()))
  2743. return true;
  2744. }
  2745. }
  2746. else if (type == WaferType.ED)
  2747. {
  2748. foreach (var wafer in currentWafers)
  2749. {
  2750. if (wafer.IsEmpty)
  2751. continue;
  2752. if (_extraDummyWafers.ContainsKey(wafer.InnerId.ToString()))
  2753. return true;
  2754. }
  2755. }
  2756. }
  2757. }
  2758. }
  2759. return false;
  2760. }
  2761. private bool CheckCarrierCanPickFromFIMS(ModuleName currentModule)
  2762. {
  2763. var fimsWafers = WaferManager.Instance.GetWafers(currentModule);
  2764. if (fimsWafers != null && !fimsWafers.Any(x => !x.IsEmpty))
  2765. {
  2766. //空盒子
  2767. return true;
  2768. }
  2769. var pj = _lstProcessJobs.FirstOrDefault(x => x.State == EnumProcessJobState.Processing);
  2770. if (pj == null)
  2771. return true;
  2772. var carrier = CarrierManager.Instance.GetCarrier(currentModule, 0);
  2773. var carrierType = carrier.CarrierType;
  2774. if (!pj.Stockers.Any(x => x.Item1 == carrier.InternalModuleName.ToString()))
  2775. return true;
  2776. var stockerInfo = pj.Stockers.FirstOrDefault(x => x.Item1 == carrier.InternalModuleName.ToString());
  2777. GetWaferSlotsAndWaferType(carrier, out var slots, out var waferType);
  2778. Dictionary<string, int> dummyWafers = new Dictionary<string, int>();
  2779. if (waferType == WaferType.SD)
  2780. dummyWafers = _sideDummyWafers;
  2781. else if (waferType == WaferType.ED)
  2782. dummyWafers = _extraDummyWafers;
  2783. if (stockerInfo != null)
  2784. {
  2785. var hasWafer = false;
  2786. foreach (var wafer in fimsWafers)
  2787. {
  2788. if (wafer == null || wafer.IsEmpty || wafer.ProcessState != EnumWaferProcessStatus.Idle)
  2789. continue;
  2790. if (stockerInfo.Item3.Any() && stockerInfo.Item3.Any(x => x == wafer.OriginSlot))
  2791. {
  2792. hasWafer = true;
  2793. break;
  2794. }
  2795. if (!stockerInfo.Item3.Any())
  2796. {
  2797. if (slots != null && slots.Count > 0)
  2798. {
  2799. for (int i = 0; i < slots.Count; i++)
  2800. {
  2801. if (WaferManager.Instance.CheckHasWafer(_pm1.Module, slots[i]))
  2802. {
  2803. continue;
  2804. }
  2805. if ((wafer.WaferType == WaferType.SD || wafer.WaferType == WaferType.ED) && !dummyWafers.ContainsKey(wafer.InnerId.ToString()))
  2806. continue;
  2807. return false;
  2808. }
  2809. }
  2810. }
  2811. }
  2812. if (hasWafer)
  2813. return false;
  2814. }
  2815. return true;
  2816. var ret = CheckHasPWafer();
  2817. var waferTypeSlots = GetWaferTypeSlots();
  2818. if (waferTypeSlots != null && waferTypeSlots.Count > 0)
  2819. {
  2820. List<WaferType> nextWaferTypeLst = new List<WaferType>();
  2821. int startIndex = -1;
  2822. for (int i = 0; i < waferTypeSlots.Count; i++)
  2823. {
  2824. if (WaferManager.Instance.CheckHasWafer(_pm1.Module, waferTypeSlots[i].Item2))
  2825. {
  2826. startIndex = i;
  2827. continue;
  2828. }
  2829. //P wafer不够的情况
  2830. if (waferTypeSlots[i].Item1 == WaferType.P)
  2831. {
  2832. if (!ret.Item1)
  2833. continue;
  2834. else
  2835. {
  2836. if (i - startIndex > ret.Item2)
  2837. continue;
  2838. }
  2839. }
  2840. if (!nextWaferTypeLst.Contains(waferTypeSlots[i].Item1))
  2841. nextWaferTypeLst.Add(waferTypeSlots[i].Item1);
  2842. if (nextWaferTypeLst.Count == _lstFIMSs.Count)
  2843. break;
  2844. if (i - startIndex >= _lstFIMSs.Count * 25)
  2845. break;
  2846. }
  2847. foreach (var type in nextWaferTypeLst)
  2848. {
  2849. if (carrierType.ToString() == type.ToString())
  2850. {
  2851. if (type == WaferType.P || type == WaferType.M1 || type == WaferType.M2)
  2852. return false;
  2853. else if (type == WaferType.SD)
  2854. {
  2855. foreach (var wafer in fimsWafers)
  2856. {
  2857. if (wafer.IsEmpty)
  2858. continue;
  2859. if (_sideDummyWafers.ContainsKey(wafer.InnerId.ToString()))
  2860. return false;
  2861. }
  2862. }
  2863. else if (type == WaferType.ED)
  2864. {
  2865. foreach (var wafer in fimsWafers)
  2866. {
  2867. if (wafer.IsEmpty)
  2868. continue;
  2869. if (_extraDummyWafers.ContainsKey(wafer.InnerId.ToString()))
  2870. return false;
  2871. }
  2872. }
  2873. }
  2874. }
  2875. }
  2876. return true;
  2877. }
  2878. private bool CheckCarrierCanPlaceToStocker(ModuleName currentModule)
  2879. {
  2880. var fimsWafers = WaferManager.Instance.GetWafers(currentModule);
  2881. if (fimsWafers != null && !fimsWafers.Any(x => !x.IsEmpty))
  2882. {
  2883. //空盒子
  2884. return true;
  2885. }
  2886. var carrierType = CarrierManager.Instance.GetCarrier(currentModule, 0).CarrierType;
  2887. var ret = CheckHasPWafer();
  2888. var waferTypeSlots = GetWaferTypeSlots();
  2889. if (waferTypeSlots != null && waferTypeSlots.Count > 0)
  2890. {
  2891. List<WaferType> nextWaferTypeLst = new List<WaferType>();
  2892. int startIndex = -1;
  2893. for (int i = 0; i < waferTypeSlots.Count; i++)
  2894. {
  2895. if (WaferManager.Instance.CheckHasWafer(_pm1.Module, waferTypeSlots[i].Item2))
  2896. {
  2897. startIndex = i;
  2898. continue;
  2899. }
  2900. //P wafer不够的情况
  2901. if (waferTypeSlots[i].Item1 == WaferType.P)
  2902. {
  2903. if (!ret.Item1)
  2904. continue;
  2905. else
  2906. {
  2907. if (i - startIndex > ret.Item2)
  2908. continue;
  2909. }
  2910. }
  2911. if (!nextWaferTypeLst.Contains(waferTypeSlots[i].Item1))
  2912. nextWaferTypeLst.Add(waferTypeSlots[i].Item1);
  2913. if (nextWaferTypeLst.Count == _lstFIMSs.Count)
  2914. break;
  2915. if (i - startIndex >= _lstFIMSs.Count * 25)
  2916. break;
  2917. }
  2918. foreach (var type in nextWaferTypeLst)
  2919. {
  2920. if (carrierType.ToString() == type.ToString())
  2921. {
  2922. if (type == WaferType.P || type == WaferType.M1 || type == WaferType.M2)
  2923. return false;
  2924. else if (type == WaferType.SD)
  2925. {
  2926. foreach (var wafer in fimsWafers)
  2927. {
  2928. if (wafer.IsEmpty)
  2929. continue;
  2930. if (_sideDummyWafers.ContainsKey(wafer.InnerId.ToString()))
  2931. return false;
  2932. }
  2933. }
  2934. else if (type == WaferType.ED)
  2935. {
  2936. foreach (var wafer in fimsWafers)
  2937. {
  2938. if (wafer.IsEmpty)
  2939. continue;
  2940. if (_extraDummyWafers.ContainsKey(wafer.InnerId.ToString()))
  2941. return false;
  2942. }
  2943. }
  2944. }
  2945. }
  2946. }
  2947. return true;
  2948. }
  2949. private void MonitorCarrierRobotPickFIMSTask()
  2950. {
  2951. if (!_carrierRobot.IsAvailable)
  2952. return;
  2953. var pj = _lstProcessJobs.FirstOrDefault(x => x.State == EnumProcessJobState.Processing);
  2954. if (pj == null)
  2955. return;
  2956. //pick
  2957. var carrier = CarrierManager.Instance.GetCarrier(ModuleName.CarrierRobot, 0);
  2958. if (carrier != null && carrier.IsEmpty)
  2959. {
  2960. SchedulerFIMS fims = null;
  2961. foreach (var st in _lstFIMSs)
  2962. {
  2963. if (!st.IsAvailable)
  2964. continue;
  2965. // check FIMS
  2966. var fimsDevice = DEVICE.GetDevice<IoFIMS>($"PM1.{st.Module}");
  2967. if (!fimsDevice.IsUnloadCompleted)
  2968. continue;
  2969. if (CarrierManager.Instance.CheckHasCarrier(st.Module, 0))
  2970. {
  2971. carrier = CarrierManager.Instance.GetCarrier(st.Module, 0);
  2972. if (carrier != null)
  2973. {
  2974. if (pj.ProcessingState == EnumProcessingState.Discharging)
  2975. {
  2976. //discharge
  2977. if (!CheckCarrierHasEmptySlot(st.Module))
  2978. {
  2979. fims = st;
  2980. break;
  2981. }
  2982. if (!CheckModuleHasWaferInWaferRobotAndPM(carrier.InternalModuleName))
  2983. {
  2984. fims = st;
  2985. break;
  2986. }
  2987. }
  2988. else if (pj.ProcessingState == EnumProcessingState.Charging)
  2989. {
  2990. //charge
  2991. GetWaferSlotsAndWaferType(carrier, out List<int> slots, out WaferType waferType);
  2992. var stockerInfo = pj.Stockers.FirstOrDefault(x => x.Item1 == carrier.InternalModuleName.ToString());
  2993. var wafers = WaferManager.Instance.GetWafers(st.Module);
  2994. if (wafers != null && stockerInfo != null)
  2995. {
  2996. bool isEmpty = true;
  2997. foreach (var wafer in wafers)
  2998. {
  2999. if (!wafer.IsEmpty)
  3000. {
  3001. if (stockerInfo.Item3.Any())
  3002. {
  3003. if (stockerInfo.Item3.Any(x => x == wafer.OriginSlot))
  3004. {
  3005. isEmpty = false;
  3006. break;
  3007. }
  3008. }
  3009. else
  3010. {
  3011. if (waferType == WaferType.P || waferType == WaferType.M1 || waferType == WaferType.M2)
  3012. {
  3013. isEmpty = false;
  3014. break;
  3015. }
  3016. else if (waferType == WaferType.SD && _sideDummyWafers.ContainsKey(wafer.InnerId.ToString()))
  3017. {
  3018. isEmpty = false;
  3019. break;
  3020. }
  3021. else if (waferType == WaferType.ED && _extraDummyWafers.ContainsKey(wafer.InnerId.ToString()))
  3022. {
  3023. isEmpty = false;
  3024. break;
  3025. }
  3026. }
  3027. }
  3028. }
  3029. if (isEmpty)
  3030. {
  3031. fims = st;
  3032. break;
  3033. }
  3034. }
  3035. if (slots != null && GetWaferCountRelatedToWaferRobot(waferType, false) >= slots.Count)
  3036. {
  3037. fims = st;
  3038. break;
  3039. }
  3040. }
  3041. else if (pj.ProcessingState == EnumProcessingState.Processing)
  3042. {
  3043. foreach (var bf in pj.Stockers)
  3044. {
  3045. if (CarrierManager.Instance.CheckHasCarrier(bf.Item1, 0))
  3046. continue;
  3047. if (bf.Item1 == carrier.InternalModuleName.ToString())
  3048. {
  3049. fims = st;
  3050. break;
  3051. }
  3052. }
  3053. }
  3054. }
  3055. }
  3056. }
  3057. if (fims != null)
  3058. {
  3059. if (_carrierRobot.Pick(fims.Module, 0, Hand.Blade1))
  3060. {
  3061. fims.WaitTransfer(ModuleName.CarrierRobot);
  3062. return;
  3063. }
  3064. }
  3065. }
  3066. if (!_carrierRobot.IsAvailable)
  3067. return;
  3068. }
  3069. private void MonitorCarrierRobotPlaceFIMSTaskInCharge()
  3070. {
  3071. if (!_carrierRobot.IsAvailable)
  3072. return;
  3073. var pj = _lstProcessJobs.FirstOrDefault(x => x.State == EnumProcessJobState.Processing);
  3074. if (pj == null)
  3075. return;
  3076. var carrier = CarrierManager.Instance.GetCarrier(ModuleName.CarrierRobot, 0);
  3077. //place
  3078. carrier = CarrierManager.Instance.GetCarrier(ModuleName.CarrierRobot, 0);
  3079. var stockerInfo = pj.Stockers.FirstOrDefault(x => x.Item1 == carrier.InternalModuleName.ToString());
  3080. if (carrier != null && !carrier.IsEmpty && stockerInfo != null)
  3081. {
  3082. SchedulerFIMS fims = null;
  3083. foreach (var st in _lstFIMSs)
  3084. {
  3085. if (!st.IsAvailable)
  3086. continue;
  3087. // check FIMS
  3088. var fimsDevice = DEVICE.GetDevice<IoFIMS>($"PM1.{st.Module}");
  3089. if (!fimsDevice.IsUnloadCompleted)
  3090. continue;
  3091. if (CarrierManager.Instance.CheckNoCarrier(st.Module, 0))
  3092. {
  3093. GetWaferSlotsAndWaferType(carrier, out List<int> slots, out WaferType waferType);
  3094. if (slots != null && GetWaferCountRelatedToWaferRobot(waferType, false) <= slots.Count)
  3095. {
  3096. var wafers = WaferManager.Instance.GetWafers(ModuleName.CarrierRobot);
  3097. foreach (var wafer in wafers)
  3098. {
  3099. if (!wafer.IsEmpty && wafer.WaferType == waferType)
  3100. {
  3101. if (pj.ProcessingState == EnumProcessingState.Charging && stockerInfo.Item3.Any() && !stockerInfo.Item3.Any(x => x == wafer.OriginSlot))
  3102. continue;
  3103. fims = st;
  3104. break;
  3105. }
  3106. }
  3107. }
  3108. if (fims != null)
  3109. break;
  3110. }
  3111. }
  3112. if (fims != null)
  3113. {
  3114. if (_carrierRobot.Place(fims.Module, 0, Hand.Blade1))
  3115. {
  3116. fims.WaitTransfer(ModuleName.CarrierRobot);
  3117. return;
  3118. }
  3119. }
  3120. }
  3121. }
  3122. private void MonitorCarrierRobotPlaceFIMSTaskInDischarge()
  3123. {
  3124. if (!_carrierRobot.IsAvailable)
  3125. return;
  3126. var pj = _lstProcessJobs.FirstOrDefault(x => x.State == EnumProcessJobState.Processing);
  3127. if (pj == null)
  3128. return;
  3129. var carrier = CarrierManager.Instance.GetCarrier(ModuleName.CarrierRobot, 0);
  3130. //place
  3131. carrier = CarrierManager.Instance.GetCarrier(ModuleName.CarrierRobot, 0);
  3132. if (carrier != null && !carrier.IsEmpty && CheckCarrierHasEmptySlot(ModuleName.CarrierRobot) && CheckModuleHasWaferInWaferRobotAndPM(carrier.InternalModuleName))
  3133. {
  3134. SchedulerFIMS fims = null;
  3135. foreach (var st in _lstFIMSs)
  3136. {
  3137. if (!st.IsAvailable)
  3138. continue;
  3139. // check FIMS
  3140. var fimsDevice = DEVICE.GetDevice<IoFIMS>($"PM1.{st.Module}");
  3141. if (!fimsDevice.IsUnloadCompleted)
  3142. continue;
  3143. if (CarrierManager.Instance.CheckNoCarrier(st.Module, 0))
  3144. {
  3145. fims = st;
  3146. break;
  3147. }
  3148. }
  3149. if (fims != null)
  3150. {
  3151. if (_carrierRobot.Place(fims.Module, 0, Hand.Blade1))
  3152. {
  3153. fims.WaitTransfer(ModuleName.CarrierRobot);
  3154. return;
  3155. }
  3156. }
  3157. }
  3158. }
  3159. private bool CheckCarrierHasNoWafer(ModuleName module, WaferType waferType)
  3160. {
  3161. bool isEmpty = true;
  3162. var wafers = WaferManager.Instance.GetWafers(module);
  3163. if (wafers != null)
  3164. {
  3165. foreach (var wafer in wafers)
  3166. {
  3167. if (!wafer.IsEmpty)
  3168. {
  3169. if (waferType == WaferType.P || waferType == WaferType.M1 || waferType == WaferType.M2)
  3170. {
  3171. isEmpty = false;
  3172. break;
  3173. }
  3174. else if (waferType == WaferType.SD && _sideDummyWafers.ContainsKey(wafer.InnerId.ToString()))
  3175. {
  3176. isEmpty = false;
  3177. break;
  3178. }
  3179. else if (waferType == WaferType.ED && _extraDummyWafers.ContainsKey(wafer.InnerId.ToString()))
  3180. {
  3181. isEmpty = false;
  3182. break;
  3183. }
  3184. }
  3185. }
  3186. }
  3187. return isEmpty;
  3188. }
  3189. private Dictionary<string, int> GetDummyWafers(List<SchedulerStocker> targetStockers, int needWaferCount, WaferType waferType)
  3190. {
  3191. Dictionary<string, int> dummyWafers = new Dictionary<string, int>();
  3192. float useCountMin = GetWaferUseCountMin(targetStockers, waferType);
  3193. float useCountMax = GetWaferUseCountMax(targetStockers, waferType);
  3194. int range = (int)(useCountMax - useCountMin);
  3195. var targetCarrierType = (CarrierType)(Enum.Parse(typeof(CarrierType), waferType.ToString()));
  3196. for (int i = 0; i <= range; i++)
  3197. {
  3198. foreach (var target in targetStockers)
  3199. {
  3200. var carrier = CarrierManager.Instance.GetCarrier(target.Module);
  3201. if (carrier == null || carrier.IsEmpty || carrier.CarrierType != targetCarrierType)
  3202. continue;
  3203. var wafers = WaferManager.Instance.GetWafers(target.Module);
  3204. if (wafers != null)
  3205. {
  3206. foreach (var wafer in wafers)
  3207. {
  3208. if (wafer.IsEmpty)
  3209. continue;
  3210. if (wafer.UseCount <= useCountMin && dummyWafers.Count() < needWaferCount)
  3211. {
  3212. if (!dummyWafers.ContainsKey(wafer.InnerId.ToString()))
  3213. dummyWafers.Add(wafer.InnerId.ToString(), wafer.OriginStation);
  3214. }
  3215. }
  3216. }
  3217. }
  3218. if (CarrierManager.Instance.CheckHasCarrier(ModuleName.CarrierRobot, 0))
  3219. {
  3220. var carrier = CarrierManager.Instance.GetCarrier(ModuleName.CarrierRobot, 0);
  3221. if (carrier.CarrierType == targetCarrierType)
  3222. {
  3223. var wafers = WaferManager.Instance.GetWafers(ModuleName.CarrierRobot);
  3224. if (wafers != null)
  3225. {
  3226. foreach (var wafer in wafers)
  3227. {
  3228. if (wafer.IsEmpty)
  3229. continue;
  3230. if (wafer.UseCount <= useCountMin && dummyWafers.Count() < needWaferCount)
  3231. {
  3232. if (!dummyWafers.ContainsKey(wafer.InnerId.ToString()))
  3233. dummyWafers.Add(wafer.InnerId.ToString(), wafer.OriginStation);
  3234. }
  3235. }
  3236. }
  3237. }
  3238. }
  3239. foreach (var fims in _lstFIMSs)
  3240. {
  3241. if (!fims.IsOnline)
  3242. continue;
  3243. var carrier = CarrierManager.Instance.GetCarrier(fims.Module, 0);
  3244. if (!carrier.IsEmpty && carrier.CarrierType == targetCarrierType)
  3245. {
  3246. var wafers = WaferManager.Instance.GetWafers(fims.Module);
  3247. if (wafers != null)
  3248. {
  3249. foreach (var wafer in wafers)
  3250. {
  3251. if (wafer.IsEmpty)
  3252. continue;
  3253. if (wafer.UseCount <= useCountMin && dummyWafers.Count() < needWaferCount)
  3254. {
  3255. if (!dummyWafers.ContainsKey(wafer.InnerId.ToString()))
  3256. dummyWafers.Add(wafer.InnerId.ToString(), wafer.OriginStation);
  3257. }
  3258. }
  3259. }
  3260. }
  3261. }
  3262. if (dummyWafers.Count() < needWaferCount)
  3263. useCountMin++;
  3264. else
  3265. break;
  3266. }
  3267. return dummyWafers;
  3268. }
  3269. private float GetWaferUseCountMin(List<SchedulerStocker> targetStockers, WaferType waferType)
  3270. {
  3271. float iUseCountMin = 10000;
  3272. foreach (var target in targetStockers)
  3273. {
  3274. var wafers = WaferManager.Instance.GetWafers(target.Module);
  3275. if (wafers == null)
  3276. continue;
  3277. foreach (var wafer in wafers)
  3278. {
  3279. if (wafer.IsEmpty || wafer.WaferType != waferType)
  3280. continue;
  3281. if (wafer.UseCount < iUseCountMin)
  3282. iUseCountMin = wafer.UseCount;
  3283. }
  3284. }
  3285. if (CarrierManager.Instance.CheckHasCarrier(ModuleName.CarrierRobot, 0))
  3286. {
  3287. var wafers = WaferManager.Instance.GetWafers(ModuleName.CarrierRobot);
  3288. foreach (var wafer in wafers)
  3289. {
  3290. if (wafer.IsEmpty || wafer.WaferType != waferType)
  3291. continue;
  3292. if (wafer.UseCount < iUseCountMin)
  3293. iUseCountMin = wafer.UseCount;
  3294. }
  3295. }
  3296. foreach (var fims in _lstFIMSs)
  3297. {
  3298. if (!fims.IsOnline)
  3299. continue;
  3300. var wafers = WaferManager.Instance.GetWafers(fims.Module);
  3301. foreach (var wafer in wafers)
  3302. {
  3303. if (wafer.IsEmpty || wafer.WaferType != waferType)
  3304. continue;
  3305. if (wafer.UseCount < iUseCountMin)
  3306. iUseCountMin = wafer.UseCount;
  3307. }
  3308. }
  3309. return iUseCountMin;
  3310. }
  3311. private float GetWaferUseCountMax(List<SchedulerStocker> targetStockers, WaferType waferType)
  3312. {
  3313. float iUseCountMax = 0;
  3314. foreach (var target in targetStockers)
  3315. {
  3316. var wafers = WaferManager.Instance.GetWafers(target.Module);
  3317. if (wafers == null)
  3318. continue;
  3319. foreach (var wafer in wafers)
  3320. {
  3321. if (wafer.IsEmpty || wafer.WaferType != waferType)
  3322. continue;
  3323. if (wafer.UseCount >= iUseCountMax)
  3324. iUseCountMax = wafer.UseCount;
  3325. }
  3326. }
  3327. if (CarrierManager.Instance.CheckHasCarrier(ModuleName.CarrierRobot, 0))
  3328. {
  3329. var wafers = WaferManager.Instance.GetWafers(ModuleName.CarrierRobot);
  3330. foreach (var wafer in wafers)
  3331. {
  3332. if (wafer.IsEmpty || wafer.WaferType != waferType)
  3333. continue;
  3334. if (wafer.UseCount >= iUseCountMax)
  3335. iUseCountMax = wafer.UseCount;
  3336. }
  3337. }
  3338. foreach (var fims in _lstFIMSs)
  3339. {
  3340. if (!fims.IsOnline)
  3341. continue;
  3342. var wafers = WaferManager.Instance.GetWafers(fims.Module);
  3343. foreach (var wafer in wafers)
  3344. {
  3345. if (wafer.IsEmpty || wafer.WaferType != waferType)
  3346. continue;
  3347. if (wafer.UseCount >= iUseCountMax)
  3348. iUseCountMax = wafer.UseCount;
  3349. }
  3350. }
  3351. return iUseCountMax;
  3352. }
  3353. private ModuleName GetModuleNameForNextWafer(WaferType waferType)
  3354. {
  3355. ModuleName module = ModuleName.System;
  3356. bool hasEmptyFims = false;
  3357. foreach (var fims in _lstFIMSs)
  3358. {
  3359. if (CarrierManager.Instance.CheckNoCarrier(fims.Module, 0))
  3360. {
  3361. hasEmptyFims = true;
  3362. break;
  3363. }
  3364. }
  3365. if (!hasEmptyFims)
  3366. return module;
  3367. if (WaferManager.Instance.CheckHasWafer(ModuleName.WaferRobot, 0))
  3368. {
  3369. module = (ModuleName)WaferManager.Instance.GetWafer(ModuleName.WaferRobot, 0).OriginStation;
  3370. }
  3371. else if (WaferManager.Instance.CheckHasWafer(ModuleName.WaferRobot, 1))
  3372. {
  3373. module = (ModuleName)WaferManager.Instance.GetWafer(ModuleName.WaferRobot, 1).OriginStation;
  3374. }
  3375. else if (WaferManager.Instance.CheckHasWafer(ModuleName.WaferRobot, 2))
  3376. {
  3377. module = (ModuleName)WaferManager.Instance.GetWafer(ModuleName.WaferRobot, 2).OriginStation;
  3378. }
  3379. else if (WaferManager.Instance.CheckHasWafer(ModuleName.WaferRobot, 3))
  3380. {
  3381. module = (ModuleName)WaferManager.Instance.GetWafer(ModuleName.WaferRobot, 3).OriginStation;
  3382. }
  3383. else if (WaferManager.Instance.CheckHasWafer(ModuleName.WaferRobot, 4))
  3384. {
  3385. module = (ModuleName)WaferManager.Instance.GetWafer(ModuleName.WaferRobot, 4).OriginStation;
  3386. }
  3387. else
  3388. {
  3389. if (SC.GetStringValue("System.ChargingOrderToBoat") == "FromTopToBottom")
  3390. {
  3391. for (int i = 0; i < SC.GetValue<int>($"Boat.SlotCount"); i++)
  3392. {
  3393. if (!WaferManager.Instance.CheckHasWafer(_pm1.Module, i))
  3394. continue;
  3395. var wafer = WaferManager.Instance.GetWafer(_pm1.Module, i);
  3396. if (wafer == null || wafer.IsEmpty)
  3397. continue;
  3398. if (wafer.WaferType == waferType)
  3399. {
  3400. module = (ModuleName)WaferManager.Instance.GetWafer(_pm1.Module, i).OriginStation;
  3401. break;
  3402. }
  3403. }
  3404. }
  3405. else
  3406. {
  3407. for (int i = SC.GetValue<int>($"Boat.SlotCount") - 1; i >= 0; i--)
  3408. {
  3409. if (!WaferManager.Instance.CheckHasWafer(_pm1.Module, i))
  3410. continue;
  3411. var wafer = WaferManager.Instance.GetWafer(_pm1.Module, i);
  3412. if (wafer == null || wafer.IsEmpty)
  3413. continue;
  3414. if (wafer.WaferType == waferType)
  3415. {
  3416. module = (ModuleName)WaferManager.Instance.GetWafer(_pm1.Module, i).OriginStation;
  3417. break;
  3418. }
  3419. }
  3420. }
  3421. }
  3422. //下一片要放回的cassette已经在fims上
  3423. bool isCarrierAlreadyPicked = false;
  3424. foreach (var fims in _lstFIMSs)
  3425. {
  3426. if (!CarrierManager.Instance.CheckHasCarrier(fims.Module, 0))
  3427. continue;
  3428. var carrier = CarrierManager.Instance.GetCarrier(fims.Module);
  3429. if (carrier != null && carrier.InternalModuleName == module)
  3430. {
  3431. isCarrierAlreadyPicked = true;
  3432. }
  3433. }
  3434. if (CarrierManager.Instance.CheckHasCarrier(ModuleName.CarrierRobot, 0))
  3435. {
  3436. var carrier = CarrierManager.Instance.GetCarrier(ModuleName.CarrierRobot);
  3437. if (carrier != null && carrier.InternalModuleName == module)
  3438. {
  3439. isCarrierAlreadyPicked = true;
  3440. }
  3441. }
  3442. if (isCarrierAlreadyPicked)
  3443. {
  3444. if (SC.GetStringValue("System.ChargingOrderToBoat") == "FromTopToBottom")
  3445. {
  3446. for (int i = 0; i < SC.GetValue<int>($"Boat.SlotCount"); i++)
  3447. {
  3448. if (!WaferManager.Instance.CheckHasWafer(_pm1.Module, i))
  3449. continue;
  3450. var wafer = WaferManager.Instance.GetWafer(_pm1.Module, i);
  3451. if (wafer == null || wafer.IsEmpty)
  3452. continue;
  3453. if (wafer.WaferType == waferType && (ModuleName)WaferManager.Instance.GetWafer(_pm1.Module, i).OriginStation != module)
  3454. {
  3455. module = (ModuleName)WaferManager.Instance.GetWafer(_pm1.Module, i).OriginStation;
  3456. break;
  3457. }
  3458. }
  3459. }
  3460. else
  3461. {
  3462. for (int i = SC.GetValue<int>($"Boat.SlotCount") - 1; i >= 0; i--)
  3463. {
  3464. if (!WaferManager.Instance.CheckHasWafer(_pm1.Module, i))
  3465. continue;
  3466. var wafer = WaferManager.Instance.GetWafer(_pm1.Module, i);
  3467. if (wafer == null || wafer.IsEmpty)
  3468. continue;
  3469. if (wafer.WaferType == waferType && (ModuleName)WaferManager.Instance.GetWafer(_pm1.Module, i).OriginStation != module)
  3470. {
  3471. module = (ModuleName)WaferManager.Instance.GetWafer(_pm1.Module, i).OriginStation;
  3472. break;
  3473. }
  3474. }
  3475. }
  3476. }
  3477. return module;
  3478. }
  3479. private int GetWaferCountRelatedToWaferRobot(WaferType waferType, bool includeFims = true)
  3480. {
  3481. int count = 0;
  3482. var pj = _lstProcessJobs.FirstOrDefault(x => x.State == EnumProcessJobState.Processing);
  3483. if (pj == null || pj.IsEmptyLayout)
  3484. return count;
  3485. if (includeFims)
  3486. {
  3487. foreach (var fims in _lstFIMSs)
  3488. {
  3489. if (CarrierManager.Instance.CheckNoCarrier(fims.Module, 0))
  3490. continue;
  3491. var wafers = WaferManager.Instance.GetWafers(fims.Module);
  3492. var carrier = CarrierManager.Instance.GetCarrier(fims.Module, 0);
  3493. var stockerInfo = pj.Stockers.FirstOrDefault(x => x.Item1 == carrier.InternalModuleName.ToString());
  3494. foreach (var wafer in wafers)
  3495. {
  3496. if (!wafer.IsEmpty && wafer.WaferType == waferType)
  3497. {
  3498. if (pj.ProcessingState == EnumProcessingState.Charging && stockerInfo != null && stockerInfo.Item3.Any() && !stockerInfo.Item3.Any(x => x == wafer.OriginSlot))
  3499. continue;
  3500. if (waferType == WaferType.P || waferType == WaferType.M1 || waferType == WaferType.M2)
  3501. count++;
  3502. else if (waferType == WaferType.SD && _sideDummyWafers.ContainsKey(wafer.InnerId.ToString()))
  3503. count++;
  3504. else if (waferType == WaferType.ED && _extraDummyWafers.ContainsKey(wafer.InnerId.ToString()))
  3505. count++;
  3506. }
  3507. }
  3508. }
  3509. }
  3510. for (int i = 0; i < WaferManager.Instance.GetWafers(ModuleName.WaferRobot).Length; i++)
  3511. {
  3512. var wafer = WaferManager.Instance.GetWafer(ModuleName.WaferRobot, i);
  3513. if (!wafer.IsEmpty && wafer.WaferType == waferType)
  3514. {
  3515. var stockerInfo = pj.Stockers.FirstOrDefault(x => x.Item1 == ((ModuleName)wafer.OriginStation).ToString());
  3516. if (pj.ProcessingState == EnumProcessingState.Charging && stockerInfo != null && stockerInfo.Item3.Any() && !stockerInfo.Item3.Any(x => x == wafer.OriginSlot))
  3517. continue;
  3518. count++;
  3519. }
  3520. }
  3521. for (int i = 0; i < WaferManager.Instance.GetWafers(_pm1.Module).Length; i++)
  3522. {
  3523. var wafer = WaferManager.Instance.GetWafer(_pm1.Module, i);
  3524. if (!wafer.IsEmpty && wafer.WaferType == waferType)
  3525. count++;
  3526. }
  3527. return count;
  3528. }
  3529. private void GetWaferSlotsAndWaferType(CarrierInfo carrier, out List<int> slots, out WaferType waferType)
  3530. {
  3531. slots = null;
  3532. waferType = WaferType.None;
  3533. if (carrier != null && !carrier.IsEmpty)
  3534. {
  3535. switch (carrier.CarrierType)
  3536. {
  3537. case CarrierType.SD:
  3538. slots = _sideDummySlots;
  3539. waferType = WaferType.SD;
  3540. break;
  3541. case CarrierType.ED:
  3542. slots = _extraDummySlots;
  3543. waferType = WaferType.ED;
  3544. break;
  3545. case CarrierType.M1:
  3546. slots = _monitor1Slots;
  3547. waferType = WaferType.M1;
  3548. break;
  3549. case CarrierType.M2:
  3550. slots = _monitor2Slots;
  3551. waferType = WaferType.M2;
  3552. break;
  3553. case CarrierType.P:
  3554. slots = _productSlots;
  3555. waferType = WaferType.P;
  3556. break;
  3557. }
  3558. }
  3559. }
  3560. private bool CheckCarrierHasEmptySlot(ModuleName module)
  3561. {
  3562. bool hasEmpty = false;
  3563. var wafers = WaferManager.Instance.GetWafers(module);
  3564. if (wafers != null)
  3565. {
  3566. foreach (var wafer in wafers)
  3567. {
  3568. if (wafer.IsEmpty)
  3569. {
  3570. hasEmpty = true;
  3571. break;
  3572. }
  3573. }
  3574. }
  3575. return hasEmpty;
  3576. }
  3577. private bool CheckCarrierNoHasEmptySlot(ModuleName module)
  3578. {
  3579. bool noHasEmpty = true;
  3580. var wafers = WaferManager.Instance.GetWafers(module);
  3581. if (wafers != null)
  3582. {
  3583. foreach (var wafer in wafers)
  3584. {
  3585. if (!wafer.IsEmpty)
  3586. {
  3587. noHasEmpty = false;
  3588. break;
  3589. }
  3590. }
  3591. }
  3592. return noHasEmpty;
  3593. }
  3594. private bool CheckModuleHasWaferInWaferRobotAndPM(ModuleName module)
  3595. {
  3596. bool isHaveWafer = false;
  3597. var wafers = WaferManager.Instance.GetWafers(ModuleName.PM1).ToList();
  3598. if (wafers != null)
  3599. {
  3600. foreach (var wafer in wafers)
  3601. {
  3602. if (wafer == null || wafer.IsEmpty)
  3603. continue;
  3604. if (wafer.OriginStation == (int)module)
  3605. {
  3606. isHaveWafer = true;
  3607. break;
  3608. }
  3609. }
  3610. }
  3611. wafers = WaferManager.Instance.GetWafers(ModuleName.WaferRobot).ToList();
  3612. if (wafers != null)
  3613. {
  3614. foreach (var wafer in wafers)
  3615. {
  3616. if (wafer == null || wafer.IsEmpty)
  3617. continue;
  3618. if (wafer.OriginStation == (int)module)
  3619. {
  3620. isHaveWafer = true;
  3621. break;
  3622. }
  3623. }
  3624. }
  3625. return isHaveWafer;
  3626. }
  3627. private bool CheckWaferStatus(List<Tuple<string, string, List<int>>> useStockers, bool isNeedCheckMonitor, bool isNeedCheckP, out string reason)
  3628. {
  3629. reason = string.Empty;
  3630. if (SC.GetValue<bool>("System.IsCycleMode"))
  3631. {
  3632. foreach (var module in Singleton<EquipmentManager>.Instance.Modules.Keys)
  3633. {
  3634. if (!ModuleHelper.IsStocker(module) || !useStockers.Any(x => x.Item1 == module.ToString()))
  3635. continue;
  3636. var wafers = WaferManager.Instance.GetWafers(module);
  3637. if (wafers == null)
  3638. continue;
  3639. foreach (var wafer in wafers)
  3640. {
  3641. if (wafer.IsEmpty)
  3642. continue;
  3643. wafer.ProcessState = EnumWaferProcessStatus.Idle;
  3644. }
  3645. }
  3646. }
  3647. else
  3648. {
  3649. foreach (var module in Singleton<EquipmentManager>.Instance.Modules.Keys)
  3650. {
  3651. if (!ModuleHelper.IsStocker(module) || !useStockers.Any(x => x.Item1 == module.ToString()))
  3652. continue;
  3653. var stockerInfo = useStockers.FirstOrDefault(x => x.Item1 == module.ToString());
  3654. var wafers = WaferManager.Instance.GetWafers(module);
  3655. if (wafers == null || stockerInfo == null)
  3656. continue;
  3657. if (SC.GetValue<bool>("System.EnableWarningFailedWafer"))
  3658. {
  3659. if (wafers.ToList().Any(x => x.ProcessState == EnumWaferProcessStatus.Failed))
  3660. {
  3661. reason = $"{module} has failed wafers.";
  3662. return false;
  3663. }
  3664. }
  3665. foreach (var wafer in wafers)
  3666. {
  3667. if (wafer.IsEmpty)
  3668. continue;
  3669. if (wafer.ProcessState != EnumWaferProcessStatus.Idle && SC.GetValue<bool>("System.EnableWarningWaferProcessState") && (!stockerInfo.Item3.Any() || stockerInfo.Item3.Any(x => x == wafer.OriginSlot)))
  3670. {
  3671. if (wafer.WaferType == WaferType.P && isNeedCheckP)
  3672. {
  3673. reason = $"{(ModuleName)wafer.OriginStation} {wafer.WaferType} wafer already completed process.";
  3674. return false;
  3675. }
  3676. if (isNeedCheckMonitor)
  3677. {
  3678. if (wafer.WaferType == WaferType.M2 || wafer.WaferType == WaferType.M || wafer.WaferType == WaferType.M1)
  3679. {
  3680. reason = $"{(ModuleName)wafer.OriginStation} {wafer.WaferType} wafer already completed process.";
  3681. return false;
  3682. }
  3683. }
  3684. }
  3685. if (wafer.WaferType == WaferType.ED || wafer.WaferType == WaferType.SD)
  3686. wafer.ProcessState = EnumWaferProcessStatus.Idle;
  3687. }
  3688. }
  3689. }
  3690. return true;
  3691. }
  3692. private Tuple<bool, int> CheckHasPWafer()
  3693. {
  3694. var pj = _lstProcessJobs.FirstOrDefault(x => x.State == EnumProcessJobState.Processing);
  3695. if (pj == null || pj.Stockers == null)
  3696. return Tuple.Create(false, 0);
  3697. int countP = 0;
  3698. foreach (var stocker in pj.Stockers)
  3699. {
  3700. var wafers = WaferManager.Instance.GetWafersByOriginalPosition(ModuleHelper.Converter(stocker.Item1));
  3701. foreach (var wafer in wafers)
  3702. {
  3703. if (!wafer.IsEmpty && wafer.WaferType == WaferType.P && wafer.Station != (int)ModuleName.PM1)
  3704. {
  3705. countP++;
  3706. }
  3707. }
  3708. }
  3709. return Tuple.Create(countP > 0, countP);
  3710. }
  3711. //返回下一片要放的wafer的slot和type
  3712. private int GetNextWaferSlot(out WaferType waferType)
  3713. {
  3714. var waferTypeSlots = GetWaferTypeSlots();
  3715. waferType = WaferType.None;
  3716. var ret = CheckHasPWafer();
  3717. int slot = -1;
  3718. if (waferTypeSlots != null)
  3719. {
  3720. for (int i = 0; i < waferTypeSlots.Count; i++)
  3721. {
  3722. if (WaferManager.Instance.CheckHasWafer(ModuleName.PM1, waferTypeSlots[i].Item2))
  3723. {
  3724. continue;
  3725. }
  3726. //针对P wafer不够的情况
  3727. if (!ret.Item1 && waferTypeSlots[i].Item1 == WaferType.P)
  3728. continue;
  3729. slot = waferTypeSlots[i].Item2;
  3730. waferType = waferTypeSlots[i].Item1;
  3731. break;
  3732. }
  3733. }
  3734. return slot;
  3735. }
  3736. //返回下一片要放的wafer的type,需要除去当前在机械手上的wafer
  3737. private WaferType GetNextWaferType()
  3738. {
  3739. var ret = CheckHasPWafer();
  3740. var waferTypeSlots = GetWaferTypeSlots();
  3741. WaferType waferType = WaferType.None;
  3742. if (waferTypeSlots != null)
  3743. {
  3744. for (int i = 0; i < waferTypeSlots.Count; i++)
  3745. {
  3746. if (WaferManager.Instance.CheckHasWafer(ModuleName.PM1, waferTypeSlots[i].Item2))
  3747. {
  3748. continue;
  3749. }
  3750. var wafer0 = WaferManager.Instance.GetWafer(ModuleName.WaferRobot, 0);
  3751. var wafer1 = WaferManager.Instance.GetWafer(ModuleName.WaferRobot, 1);
  3752. if (i < waferTypeSlots.Count && wafer0 != null && !wafer0.IsEmpty && wafer0.WaferType == waferTypeSlots[i].Item1)
  3753. i++;
  3754. if (i < waferTypeSlots.Count && wafer1 != null && !wafer1.IsEmpty && wafer1.WaferType == waferTypeSlots[i].Item1)
  3755. i++;
  3756. //机械手wafer放过去就放满了
  3757. if (i >= waferTypeSlots.Count)
  3758. {
  3759. break;
  3760. }
  3761. //针对P wafer不够的情况
  3762. if (!ret.Item1 && waferTypeSlots[i].Item1 == WaferType.P)
  3763. continue;
  3764. waferType = waferTypeSlots[i].Item1;
  3765. break;
  3766. }
  3767. }
  3768. return waferType;
  3769. }
  3770. private ModuleName GetCurrentTransferFims()
  3771. {
  3772. ModuleName currentFims = ModuleName.System;
  3773. foreach (var st in _lstFIMSs)
  3774. {
  3775. if (!st.IsAvailable)
  3776. continue;
  3777. if (!CarrierManager.Instance.CheckHasCarrier(st.Module, 0))
  3778. continue;
  3779. var carrier = CarrierManager.Instance.GetCarrier(st.Module, 0);
  3780. if (carrier != null && !carrier.IsEmpty)
  3781. {
  3782. bool hasWafer = false;
  3783. var wafers = WaferManager.Instance.GetWafers(st.Module);
  3784. if (wafers != null)
  3785. {
  3786. foreach (var wafer in wafers)
  3787. {
  3788. if (wafer == null || wafer.IsEmpty)
  3789. continue;
  3790. if (!wafer.IsEmpty)
  3791. {
  3792. hasWafer = true;
  3793. break;
  3794. }
  3795. }
  3796. }
  3797. if (hasWafer && CheckCarrierHasWaferInPM(carrier.InternalModuleName))
  3798. {
  3799. currentFims = st.Module;
  3800. break;
  3801. };
  3802. }
  3803. }
  3804. return currentFims;
  3805. }
  3806. private List<int> GetWaferSlots(out WaferType waferType)
  3807. {
  3808. var waferTypeSlots = GetWaferTypeSlots();
  3809. waferType = WaferType.None;
  3810. var slots = new List<int>();
  3811. if (waferTypeSlots != null)
  3812. {
  3813. List<Tuple<ModuleName, WaferType, int>> fimsWaferInforLst = new List<Tuple<ModuleName, WaferType, int>>();
  3814. foreach (var st in _lstFIMSs)
  3815. {
  3816. if (!CarrierManager.Instance.CheckHasCarrier(st.Module, 0))
  3817. continue;
  3818. var fimsWafers = WaferManager.Instance.GetWafers(st.Module);
  3819. int waferCountFIMS = 0;
  3820. WaferType waferTypeFIMS = WaferType.None;
  3821. if (fimsWafers != null)
  3822. {
  3823. foreach (var fimsWafer in fimsWafers)
  3824. {
  3825. if (!fimsWafer.IsEmpty)
  3826. {
  3827. waferTypeFIMS = fimsWafer.WaferType;
  3828. if (fimsWafer.WaferType == WaferType.P || fimsWafer.WaferType == WaferType.M1 || fimsWafer.WaferType == WaferType.M2)
  3829. {
  3830. waferCountFIMS++;
  3831. }
  3832. else if (fimsWafer.WaferType == WaferType.SD && _sideDummyWafers.ContainsKey(fimsWafer.InnerId.ToString()))
  3833. {
  3834. waferCountFIMS++;
  3835. }
  3836. else if (fimsWafer.WaferType == WaferType.ED && _extraDummyWafers.ContainsKey(fimsWafer.InnerId.ToString()))
  3837. {
  3838. waferCountFIMS++;
  3839. }
  3840. }
  3841. }
  3842. }
  3843. if (waferCountFIMS > 0)
  3844. fimsWaferInforLst.Add(Tuple.Create(st.Module, waferTypeFIMS, waferCountFIMS));
  3845. }
  3846. //两个FIMS都有Carrier,直接返回
  3847. if (_lstFIMSs.Count == fimsWaferInforLst.Count)
  3848. return slots;
  3849. //FIMS有空的,才继续
  3850. int startIndex = 0;
  3851. for (int i = 0; i < waferTypeSlots.Count; i++)
  3852. {
  3853. if (WaferManager.Instance.CheckHasWafer(ModuleName.PM1, waferTypeSlots[i].Item2))
  3854. {
  3855. continue;
  3856. }
  3857. var wafer0 = WaferManager.Instance.GetWafer(ModuleName.WaferRobot, 0);
  3858. var wafer1 = WaferManager.Instance.GetWafer(ModuleName.WaferRobot, 1);
  3859. if (i < waferTypeSlots.Count && wafer0 != null && !wafer0.IsEmpty && wafer0.WaferType == waferTypeSlots[i].Item1)
  3860. i++;
  3861. if (i >= waferTypeSlots.Count)
  3862. break;
  3863. if (i < waferTypeSlots.Count && wafer1 != null && !wafer1.IsEmpty && wafer1.WaferType == waferTypeSlots[i].Item1)
  3864. i++;
  3865. if (i >= waferTypeSlots.Count)
  3866. break;
  3867. if (fimsWaferInforLst.Count > 0)
  3868. {
  3869. var fimsWaferInfor = fimsWaferInforLst.FirstOrDefault(x => x.Item2 == waferTypeSlots[i].Item1);
  3870. if (fimsWaferInfor != null)
  3871. {
  3872. for (; i < waferTypeSlots.Count;)
  3873. {
  3874. if (i >= waferTypeSlots.Count)
  3875. break;
  3876. if (waferTypeSlots[i].Item1 == fimsWaferInfor.Item2)
  3877. i++;
  3878. else
  3879. break;
  3880. }
  3881. }
  3882. }
  3883. if (i >= waferTypeSlots.Count)
  3884. {
  3885. i = waferTypeSlots.Count - 1;
  3886. }
  3887. startIndex = i;
  3888. waferType = waferTypeSlots[i].Item1;
  3889. break;
  3890. }
  3891. for (int i = startIndex; i < waferTypeSlots.Count; i++)
  3892. {
  3893. if (waferTypeSlots[i].Item1 != waferType)
  3894. {
  3895. break;
  3896. }
  3897. slots.Add(waferTypeSlots[i].Item2);
  3898. }
  3899. }
  3900. return slots;
  3901. }
  3902. private List<int> GetWaferSlots(WaferType waferType)
  3903. {
  3904. var slots = new List<int>();
  3905. var pj = _lstProcessJobs.FirstOrDefault(x => x.State == EnumProcessJobState.Processing);
  3906. if (pj == null)
  3907. return null;
  3908. if (!RecipeParser.LayoutRecipeParse(pj.LayoutRecipe, ModuleName.PM1.ToString(), out RecipeLayoutEntityNormal layoutRecipeDataNormal, out RecipeLayoutEntityExpert layoutRecipeDataExpert, out string reason))
  3909. {
  3910. //Singleton<EquipmentManager>.Instance.ChargeWaferJobStartFailedWarning.Set($"Load layout recipe {pj.LayoutRecipe} failed, {reason}");
  3911. return null;
  3912. }
  3913. switch (waferType)
  3914. {
  3915. case WaferType.SD:
  3916. return pj.SideDummySlots;
  3917. case WaferType.ED:
  3918. return pj.ExtraDummySlots;
  3919. case WaferType.M1:
  3920. return pj.Monitor1Slots;
  3921. case WaferType.M2:
  3922. return pj.Monitor2Slots;
  3923. case WaferType.P:
  3924. return pj.ProductSlots;
  3925. }
  3926. return null;
  3927. }
  3928. private List<int> GetWaferSlots(RecipeLayoutEntityExpert layoutRecipeDataExpert, WaferType waferType)
  3929. {
  3930. var slots = new List<int>();
  3931. if (layoutRecipeDataExpert == null)
  3932. return null;
  3933. var type = "";
  3934. switch (waferType)
  3935. {
  3936. case WaferType.SD:
  3937. type = "sd";
  3938. break;
  3939. case WaferType.ED:
  3940. type = "fd";
  3941. break;
  3942. case WaferType.M1:
  3943. type = "m1";
  3944. break;
  3945. case WaferType.M2:
  3946. type = "m2";
  3947. break;
  3948. case WaferType.P:
  3949. type = "pd";
  3950. break;
  3951. }
  3952. if (layoutRecipeDataExpert != null)
  3953. {
  3954. for (int i = 0; i < layoutRecipeDataExpert.Items.Count; i++)
  3955. {
  3956. if (layoutRecipeDataExpert.Items[i].ToLower() == type)
  3957. {
  3958. slots.Add(i);
  3959. }
  3960. }
  3961. if (SC.GetStringValue("System.ChargingOrderToBoat") == "FromTopToBottom")
  3962. {
  3963. slots.Sort((x, y) => -x.CompareTo(y));//降序
  3964. }
  3965. else
  3966. {
  3967. slots.Sort((x, y) => x.CompareTo(y));//升序
  3968. }
  3969. }
  3970. return slots;
  3971. }
  3972. #region charge rule
  3973. private bool CheckChargeRule(ProcessJobInfo pj, out bool waferShort, bool needCheckPWafer, bool needCheckMWafer, out string reason)
  3974. {
  3975. waferShort = false;
  3976. //needCheckPWafer = false;
  3977. reason = string.Empty;
  3978. if (!RecipeParser.LayoutRecipeParse(pj.LayoutRecipe, ModuleName.PM1.ToString(), out RecipeLayoutEntityNormal layoutRecipeDataNormal, out RecipeLayoutEntityExpert layoutRecipeDataExpert, out reason))
  3979. {
  3980. //Singleton<EquipmentManager>.Instance.ChargeWaferJobStartFailedWarning.Set($"Load layout recipe {pj.LayoutRecipe} failed, {reason}");
  3981. return false;
  3982. }
  3983. if (!CheckLayoutParameter(layoutRecipeDataNormal, out reason))
  3984. {
  3985. return false;
  3986. }
  3987. int iCassetteSlotCount = SC.GetValue<int>("System.CassetteSlotCount");
  3988. if (iCassetteSlotCount == 0)
  3989. {
  3990. reason = "System.CassetteSlotCount not valid";
  3991. return false;
  3992. }
  3993. int iSlotCount = SC.GetValue<int>($"Boat.SlotCount");
  3994. var productSlots = GetWaferSlots(layoutRecipeDataExpert, WaferType.P);
  3995. var monitor1Slots = GetWaferSlots(layoutRecipeDataExpert, WaferType.M1);
  3996. var monitor2Slots = GetWaferSlots(layoutRecipeDataExpert, WaferType.M2);
  3997. var sideDummySlots = GetWaferSlots(layoutRecipeDataExpert, WaferType.SD);
  3998. var extraDummySlots = GetWaferSlots(layoutRecipeDataExpert, WaferType.ED);
  3999. int iNeedCassetteNum;
  4000. var temp = (float)productSlots.Count / iCassetteSlotCount;
  4001. iNeedCassetteNum = (int)Math.Ceiling(temp);
  4002. int iCurrentCassetteNum = GetCurrentCassetteNum(pj, WaferType.P);
  4003. int iDummyUpper = int.Parse(layoutRecipeDataNormal.DummyUpperSlot);
  4004. int iDummyLower = int.Parse(layoutRecipeDataNormal.DummyLowerSlot);
  4005. int iNeedPWaferNum = productSlots.Count;
  4006. int iNeedM1WaferNum = monitor1Slots.Count;
  4007. int iNeedM2WaferNum = monitor2Slots.Count;
  4008. int iNeedSDWaferNum = sideDummySlots.Count;
  4009. int iNeedEDWaferNum = extraDummySlots.Count;
  4010. int iCurrentPWaferNum = GetCurrentWaferNum(pj, WaferType.P, out bool pSlotSelect);
  4011. int iCurrentSDWaferNum = GetCurrentDummyWaferNum(WaferType.SD);
  4012. int iCurrentM1WaferNum = GetCurrentWaferNum(pj, WaferType.M1, out bool m1SlotSelect);
  4013. int iCurrentM2WaferNum = GetCurrentWaferNum(pj, WaferType.M2, out bool m2SlotSelect);
  4014. int iCurrentEDWaferNum = GetCurrentDummyWaferNum(WaferType.ED);
  4015. //if (iNeedMWaferNum > iCurrentMWaferNum)
  4016. //{
  4017. // reason = "monitor wafer are short.";
  4018. // return false;
  4019. //}
  4020. //if (iNeedSDWaferNum > iCurrentSDWaferNum)
  4021. //{
  4022. // reason = "dummy wafer are short.";
  4023. // return false;
  4024. //}
  4025. //if (iNeedEDWaferNum > iCurrentEDWaferNum)
  4026. //{
  4027. // reason = "extra dummy wafer are short.";
  4028. // return false;
  4029. //}
  4030. if (SC.GetStringValue("System.ChargingOrderToBoat") == "FromTopToBottom")
  4031. {
  4032. sideDummySlots.Sort((x, y) => -x.CompareTo(y));//降序
  4033. extraDummySlots.Sort((x, y) => -x.CompareTo(y));//降序
  4034. monitor1Slots.Sort((x, y) => -x.CompareTo(y));//降序
  4035. monitor2Slots.Sort((x, y) => -x.CompareTo(y));//降序
  4036. productSlots.Sort((x, y) => -x.CompareTo(y));//降序
  4037. }
  4038. else
  4039. {
  4040. sideDummySlots.Sort((x, y) => x.CompareTo(y));//升序
  4041. extraDummySlots.Sort((x, y) => x.CompareTo(y));//升序
  4042. monitor1Slots.Sort((x, y) => x.CompareTo(y));//升序
  4043. monitor2Slots.Sort((x, y) => x.CompareTo(y));//升序
  4044. productSlots.Sort((x, y) => x.CompareTo(y));//升序
  4045. }
  4046. pj.SideDummySlots = sideDummySlots;
  4047. pj.ExtraDummySlots = extraDummySlots;
  4048. pj.Monitor1Slots = monitor1Slots;
  4049. pj.Monitor2Slots = monitor2Slots;
  4050. pj.ProductSlots = productSlots;
  4051. bool bM1Short = false;
  4052. bool bM2Short = false;
  4053. if (needCheckMWafer)
  4054. {
  4055. bM1Short = GetRemainWaferNum(pj, WaferType.M1) < 0 && monitor1Slots.Count > 0;
  4056. bM2Short = GetRemainWaferNum(pj, WaferType.M2) < 0 && monitor2Slots.Count > 0;
  4057. if (monitor1Slots.Count > 0 && m1SlotSelect && iCurrentM1WaferNum != monitor1Slots.Count)
  4058. {
  4059. reason = $"layout recipe M1 wafer number={iCurrentM1WaferNum}, current M1 wafer number={monitor1Slots.Count}, not match";
  4060. return false;
  4061. }
  4062. if (monitor2Slots.Count > 0 && m2SlotSelect && iCurrentM2WaferNum != monitor2Slots.Count)
  4063. {
  4064. reason = $"layout recipe M2 wafer number={iCurrentM2WaferNum}, current M2 wafer number={monitor2Slots.Count}, not match";
  4065. return false;
  4066. }
  4067. if (bM1Short)
  4068. {
  4069. reason = "M1 wafer are short";
  4070. return false;
  4071. }
  4072. if (bM2Short)
  4073. {
  4074. reason = "M2 wafer are short";
  4075. return false;
  4076. }
  4077. }
  4078. if (!needCheckPWafer)
  4079. return true;
  4080. if (iNeedPWaferNum > iCurrentPWaferNum)
  4081. {
  4082. reason = "layout recipe production wafer number greater than current production wafer number";
  4083. return false;
  4084. }
  4085. if (pSlotSelect && iNeedPWaferNum != iCurrentPWaferNum)
  4086. {
  4087. reason = $"layout recipe production wafer number={iNeedPWaferNum}, current production wafer number={iCurrentPWaferNum}, not match";
  4088. return false;
  4089. }
  4090. //下面charge rule暂时不判断
  4091. return true;
  4092. //if (layoutRecipeDataNormal.ProductPosition.ToLower() == "slot")
  4093. //{
  4094. // if (iNeedPWaferNum <= iCurrentPWaferNum)
  4095. // {
  4096. // return true;
  4097. // }
  4098. // else
  4099. // {
  4100. // reason = "production wafer insufficiency productPos set to slot";
  4101. // return false;
  4102. // }
  4103. //}
  4104. string strWhenCassetteAreShort = layoutRecipeDataNormal.WhenCassetteInBatchAreShort;
  4105. string strWhenPWaferShort = layoutRecipeDataNormal.WhenPWaferShort;
  4106. string strWhenWaferInCassetteAreShort = layoutRecipeDataNormal.WhenWaferInCassetteAreShort;
  4107. string strWhenEDAreShort = layoutRecipeDataNormal.WhenEDAreShort;
  4108. bool bSDMove = layoutRecipeDataNormal.SDRule == "Move";
  4109. bool bBoatSupplyED = layoutRecipeDataNormal.RuleOfSpaceInBoat == "SupplyED" && !bSDMove;
  4110. bool bEDShort = false;
  4111. List<string> adjustedSlot = new List<string>();
  4112. for (int i = 0; i < layoutRecipeDataExpert.Items.Count; i++)
  4113. {
  4114. adjustedSlot.Add(layoutRecipeDataExpert.Items[i]);
  4115. }
  4116. bool bCassetteSuppleED;
  4117. bool bWaferSuppleED;
  4118. if (iNeedPWaferNum > iCurrentPWaferNum)
  4119. {
  4120. // 先判断cassette是否充足,然后再判断P wafers是否充足
  4121. if (iNeedCassetteNum > iCurrentCassetteNum)
  4122. {
  4123. if (strWhenCassetteAreShort != "LeaveAs" && strWhenCassetteAreShort != "SupplyED")
  4124. {
  4125. reason = "cassette in batch are short";
  4126. return true;
  4127. }
  4128. else
  4129. {
  4130. bCassetteSuppleED = strWhenCassetteAreShort == "SupplyED";
  4131. // 重新计算需要的P wafers
  4132. iNeedPWaferNum = iNeedPWaferNum - (iNeedCassetteNum - iCurrentCassetteNum) * iCassetteSlotCount;
  4133. // 判断P wafers是否充足
  4134. if (iNeedPWaferNum > iCurrentPWaferNum)
  4135. { // 只有在when P wafer short == leave as 的时候 when wafer in cassette are short 才执行判断
  4136. if (strWhenPWaferShort == "LeaveAs")
  4137. {
  4138. if (strWhenWaferInCassetteAreShort != "LeaveAs" && strWhenWaferInCassetteAreShort != "SupplyED")
  4139. {
  4140. reason = "wafer in cassette are short";
  4141. return true;
  4142. }
  4143. else
  4144. {
  4145. bWaferSuppleED = strWhenWaferInCassetteAreShort == "SupplyED";
  4146. bEDShort = CassetteShortWaferInCassetteShort(pj, ref adjustedSlot, ref iCurrentEDWaferNum, layoutRecipeDataNormal, layoutRecipeDataExpert, bCassetteSuppleED, bWaferSuppleED);
  4147. }
  4148. }
  4149. else
  4150. {
  4151. bEDShort = CassetteShortPWaferShort(pj, ref adjustedSlot, ref iCurrentEDWaferNum, layoutRecipeDataNormal, layoutRecipeDataExpert, iCurrentPWaferNum, bCassetteSuppleED);
  4152. }
  4153. }
  4154. else
  4155. {
  4156. bWaferSuppleED = false;
  4157. bEDShort = CassetteShortWaferInCassetteShort(pj, ref adjustedSlot, ref iCurrentEDWaferNum, layoutRecipeDataNormal, layoutRecipeDataExpert, bCassetteSuppleED, bWaferSuppleED);
  4158. }
  4159. }
  4160. }
  4161. else
  4162. { // 只有在when P wafer short == leave as 的时候 when wafer in cassette are short 才执行判断
  4163. if (strWhenPWaferShort == "LeaveAs")
  4164. {
  4165. if (strWhenWaferInCassetteAreShort == "LeaveAs")
  4166. {
  4167. }
  4168. else if (strWhenWaferInCassetteAreShort == "SupplyED")
  4169. {
  4170. bCassetteSuppleED = false;
  4171. bWaferSuppleED = true;
  4172. bEDShort = CassetteShortWaferInCassetteShort(pj, ref adjustedSlot, ref iCurrentEDWaferNum, layoutRecipeDataNormal, layoutRecipeDataExpert, bCassetteSuppleED, bWaferSuppleED);
  4173. }
  4174. else
  4175. {
  4176. reason = "wafer in cassette are short";
  4177. return true;
  4178. }
  4179. }
  4180. else
  4181. {
  4182. bWaferSuppleED = false;
  4183. bEDShort = CassetteShortPWaferShort(pj, ref adjustedSlot, ref iCurrentEDWaferNum, layoutRecipeDataNormal, layoutRecipeDataExpert, iCurrentPWaferNum, bWaferSuppleED);
  4184. }
  4185. }
  4186. }
  4187. if (bSDMove)
  4188. {
  4189. for (int i = iDummyUpper; i < iSlotCount - iDummyLower; i++)
  4190. {
  4191. if (adjustedSlot[i] != "")
  4192. {
  4193. for (int j = 0; j < iDummyUpper; j++)
  4194. {
  4195. adjustedSlot[i - j - 1] = "dummy";
  4196. }
  4197. break;
  4198. }
  4199. }
  4200. for (int i = iSlotCount - iDummyLower - 1; i > iDummyUpper; i--)
  4201. {
  4202. if (adjustedSlot[i] != "")
  4203. {
  4204. for (int j = 0; j < iDummyLower; j++)
  4205. {
  4206. adjustedSlot[i + j + 1] = "dummy";
  4207. }
  4208. break;
  4209. }
  4210. }
  4211. }
  4212. else
  4213. {
  4214. if (bBoatSupplyED)
  4215. {
  4216. for (int i = iDummyUpper; i < iSlotCount - iDummyLower; i++)
  4217. {
  4218. if (iCurrentEDWaferNum > 0)
  4219. {
  4220. if (adjustedSlot[i] == "")
  4221. {
  4222. adjustedSlot[i] = "extradummy";
  4223. iCurrentEDWaferNum--;
  4224. }
  4225. }
  4226. else
  4227. {
  4228. bEDShort = true;
  4229. break;
  4230. }
  4231. }
  4232. }
  4233. for (int i = 0; i < iDummyUpper; i++)
  4234. {
  4235. adjustedSlot[i] = "dummy";
  4236. }
  4237. for (int i = iSlotCount - iDummyLower; i < iSlotCount; i++)
  4238. {
  4239. adjustedSlot[i] = "dummy";
  4240. }
  4241. }
  4242. if (bEDShort)
  4243. {
  4244. switch (strWhenEDAreShort)
  4245. {
  4246. case "WarningAndContinue":
  4247. case "AbortWhenError":
  4248. reason = "extradummy wafer are short";
  4249. break;
  4250. case "LeaveAs":
  4251. bEDShort = false;
  4252. break;
  4253. }
  4254. }
  4255. sideDummySlots.Clear();
  4256. extraDummySlots.Clear();
  4257. monitor1Slots.Clear();
  4258. monitor2Slots.Clear();
  4259. productSlots.Clear();
  4260. for (int i = 0; i < adjustedSlot.Count; i++)
  4261. {
  4262. if (adjustedSlot[i].ToLower() == "dummy" && iCurrentSDWaferNum > 0)
  4263. {
  4264. sideDummySlots.Add(i);
  4265. iCurrentSDWaferNum--;
  4266. }
  4267. if (adjustedSlot[i].ToLower() == "extradummy")
  4268. {
  4269. extraDummySlots.Add(i);
  4270. }
  4271. if (adjustedSlot[i].ToLower() == "monitor1" && iCurrentM1WaferNum > 0)
  4272. {
  4273. monitor1Slots.Add(i);
  4274. iCurrentM1WaferNum--;
  4275. }
  4276. if (adjustedSlot[i].ToLower() == "monitor2" && iCurrentM2WaferNum > 0)
  4277. {
  4278. monitor2Slots.Add(i);
  4279. iCurrentM2WaferNum--;
  4280. }
  4281. if (adjustedSlot[i].ToLower() == "pd")
  4282. {
  4283. productSlots.Add(i);
  4284. }
  4285. }
  4286. bM1Short = (GetCurrentWaferNum(pj, WaferType.M1, out m1SlotSelect) < monitor1Slots.Count) || monitor1Slots.Count == 0;
  4287. bM2Short = (GetCurrentWaferNum(pj, WaferType.M2, out m2SlotSelect) < monitor2Slots.Count) || monitor2Slots.Count == 0;
  4288. bool bSDShort = (GetCurrentWaferNum(pj, WaferType.SD, out bool sdSlotSelect) < sideDummySlots.Count) || sideDummySlots.Count == 0;
  4289. if (SC.GetValue<bool>("System.IsLeaveAsAllWaferWhenWaferShort"))
  4290. bEDShort = bM1Short = bM2Short = bSDShort = false;
  4291. waferShort = bEDShort || bM1Short || bM2Short || bSDShort;
  4292. if (bM1Short || bM2Short)
  4293. {
  4294. if (reason == string.Empty)
  4295. {
  4296. if (bSDShort)
  4297. {
  4298. reason = "dummy wafer and monitor wafer are short";
  4299. }
  4300. else
  4301. {
  4302. reason = "monitor wafer are short";
  4303. }
  4304. }
  4305. else
  4306. {
  4307. if (bSDShort)
  4308. {
  4309. reason = "extradummy wafer,monitor wafer and dummy wafer are short";
  4310. }
  4311. else
  4312. {
  4313. reason = "extradummy wafer and dummy wafer are short";
  4314. }
  4315. }
  4316. }
  4317. else
  4318. {
  4319. if (reason == string.Empty)
  4320. {
  4321. if (bSDShort)
  4322. {
  4323. reason = "dummy wafer are short";
  4324. }
  4325. }
  4326. else
  4327. {
  4328. if (bSDShort)
  4329. {
  4330. reason = "extradummy wafer and dummy wafer are short";
  4331. }
  4332. }
  4333. }
  4334. if (SC.GetStringValue("System.ChargingOrderToBoat") == "FromTopToBottom")
  4335. {
  4336. sideDummySlots.Sort((x, y) => -x.CompareTo(y));//降序
  4337. extraDummySlots.Sort((x, y) => -x.CompareTo(y));//降序
  4338. monitor1Slots.Sort((x, y) => -x.CompareTo(y));//降序
  4339. monitor2Slots.Sort((x, y) => -x.CompareTo(y));//降序
  4340. productSlots.Sort((x, y) => -x.CompareTo(y));//降序
  4341. }
  4342. else
  4343. {
  4344. sideDummySlots.Sort((x, y) => x.CompareTo(y));//升序
  4345. extraDummySlots.Sort((x, y) => x.CompareTo(y));//升序
  4346. monitor1Slots.Sort((x, y) => x.CompareTo(y));//升序
  4347. monitor2Slots.Sort((x, y) => x.CompareTo(y));//升序
  4348. productSlots.Sort((x, y) => x.CompareTo(y));//升序
  4349. }
  4350. pj.SideDummySlots = sideDummySlots;
  4351. pj.ExtraDummySlots = extraDummySlots;
  4352. pj.Monitor1Slots = monitor1Slots;
  4353. pj.Monitor2Slots = monitor2Slots;
  4354. pj.ProductSlots = productSlots;
  4355. return true;
  4356. }
  4357. private bool CheckLayoutParameter(RecipeLayoutEntityNormal layoutRecipeDataNormal, out string reason)
  4358. {
  4359. reason = string.Empty;
  4360. if (string.IsNullOrEmpty(layoutRecipeDataNormal.DummyUpperSlot))
  4361. {
  4362. reason = "DummyUpper is null";
  4363. return false;
  4364. }
  4365. if (string.IsNullOrEmpty(layoutRecipeDataNormal.DummyLowerSlot))
  4366. {
  4367. reason = "DummyLower is null";
  4368. return false;
  4369. }
  4370. if (string.IsNullOrEmpty(layoutRecipeDataNormal.CenteringSlotPosition))
  4371. {
  4372. reason = "CenteringSlotPosition is null";
  4373. return false;
  4374. }
  4375. //if (string.IsNullOrEmpty(layoutRecipeDataNormal.Pitch))
  4376. //{
  4377. // reason = "Pitch is null";
  4378. // return false;
  4379. //}
  4380. if (string.IsNullOrEmpty(layoutRecipeDataNormal.ProductPosition))
  4381. {
  4382. reason = "ProductPosition is null";
  4383. return false;
  4384. }
  4385. if (string.IsNullOrEmpty(layoutRecipeDataNormal.MonitorPosition))
  4386. {
  4387. reason = "MonitorPosition is null";
  4388. return false;
  4389. }
  4390. if (string.IsNullOrEmpty(layoutRecipeDataNormal.WhenCassetteInBatchAreShort))
  4391. {
  4392. reason = "WhenCassetteInBatchAreShort is null";
  4393. return false;
  4394. }
  4395. if (string.IsNullOrEmpty(layoutRecipeDataNormal.WhenPWaferShort))
  4396. {
  4397. reason = "WhenPWaferShort is null";
  4398. return false;
  4399. }
  4400. if (string.IsNullOrEmpty(layoutRecipeDataNormal.WhenWaferInCassetteAreShort))
  4401. {
  4402. reason = "WhenWaferInCassetteAreShort is null";
  4403. return false;
  4404. }
  4405. if (string.IsNullOrEmpty(layoutRecipeDataNormal.WhenEDAreShort))
  4406. {
  4407. reason = "WhenEDAreShort is null";
  4408. return false;
  4409. }
  4410. if (string.IsNullOrEmpty(layoutRecipeDataNormal.SDRule))
  4411. {
  4412. reason = "SDRule is null";
  4413. return false;
  4414. }
  4415. if (string.IsNullOrEmpty(layoutRecipeDataNormal.RuleOfSpaceInBoat))
  4416. {
  4417. reason = "RuleOfSpaceInBoat is null";
  4418. return false;
  4419. }
  4420. return true;
  4421. }
  4422. private int GetCurrentCassetteNum(ProcessJobInfo pj, WaferType targetWaferType)
  4423. {
  4424. int iCassetteNum = 0;
  4425. var targetCarrierType = (CarrierType)(Enum.Parse(typeof(CarrierType), targetWaferType.ToString()));
  4426. foreach (var target in _lstTotlaStockers)
  4427. {
  4428. if (pj == null || !pj.Stockers.Any(x => x.Item1 == target.Module.ToString()))
  4429. continue;
  4430. var carrier = CarrierManager.Instance.GetCarrier(target.Module);
  4431. if (!carrier.IsEmpty && carrier.CarrierType == targetCarrierType)
  4432. iCassetteNum++;
  4433. }
  4434. return iCassetteNum;
  4435. }
  4436. private int GetRemainWaferNum(ProcessJobInfo pj, WaferType targetWaferType)
  4437. {
  4438. int iWaferNum = 0;
  4439. var targetCarrierType = (CarrierType)(Enum.Parse(typeof(CarrierType), targetWaferType.ToString()));
  4440. foreach (var target in _lstTotlaStockers)
  4441. {
  4442. var carrier = CarrierManager.Instance.GetCarrier(target.Module);
  4443. if (carrier == null || carrier.IsEmpty || carrier.CarrierType != targetCarrierType)
  4444. continue;
  4445. var stockerInfo = pj.Stockers.FirstOrDefault(x => x.Item1 == carrier.InternalModuleName.ToString());
  4446. if (pj == null || !pj.Stockers.Any(x => x.Item1 == target.Module.ToString()) || stockerInfo == null)
  4447. continue;
  4448. var wafers = WaferManager.Instance.GetWafers(target.Module);
  4449. foreach (var wafer in wafers)
  4450. {
  4451. if (!wafer.IsEmpty && wafer.WaferType == targetWaferType && (!stockerInfo.Item3.Any() || stockerInfo.Item3.Any(x => x == wafer.OriginSlot)))
  4452. iWaferNum++;
  4453. }
  4454. }
  4455. if (CarrierManager.Instance.CheckHasCarrier(_carrierRobot.Module, 0))
  4456. {
  4457. var carrier = CarrierManager.Instance.GetCarrier(_carrierRobot.Module);
  4458. var stockerInfo = pj.Stockers.FirstOrDefault(x => x.Item1 == carrier.InternalModuleName.ToString());
  4459. if (carrier.CarrierType == targetCarrierType && pj != null && pj.Stockers.Any(x => x.Item1 == carrier.InternalModuleName.ToString()) && stockerInfo != null)
  4460. {
  4461. var wafers = WaferManager.Instance.GetWafers(_carrierRobot.Module);
  4462. foreach (var wafer in wafers)
  4463. {
  4464. if (!wafer.IsEmpty && wafer.WaferType == targetWaferType && (!stockerInfo.Item3.Any() || stockerInfo.Item3.Any(x => x == wafer.OriginSlot)))
  4465. iWaferNum++;
  4466. }
  4467. }
  4468. }
  4469. foreach (var fims in _lstFIMSs)
  4470. {
  4471. if (!fims.IsOnline)
  4472. continue;
  4473. var carrier = CarrierManager.Instance.GetCarrier(fims.Module);
  4474. var stockerInfo = pj.Stockers.FirstOrDefault(x => x.Item1 == carrier.InternalModuleName.ToString());
  4475. if (carrier.CarrierType == targetCarrierType && pj != null && pj.Stockers.Any(x => x.Item1 == carrier.InternalModuleName.ToString()) && stockerInfo != null)
  4476. {
  4477. var wafers = WaferManager.Instance.GetWafers(fims.Module);
  4478. foreach (var wafer in wafers)
  4479. {
  4480. if (!wafer.IsEmpty && wafer.WaferType == targetWaferType && (!stockerInfo.Item3.Any() || stockerInfo.Item3.Any(x => x == wafer.OriginSlot)))
  4481. iWaferNum++;
  4482. }
  4483. }
  4484. }
  4485. {
  4486. var wafers = WaferManager.Instance.GetWafers(ModuleName.PM1);
  4487. foreach (var wafer in wafers)
  4488. {
  4489. if (wafer == null || wafer.IsEmpty || wafer.WaferType != targetWaferType)
  4490. continue;
  4491. var stockerInfo = pj.Stockers.FirstOrDefault(x => x.Item1 == ((ModuleName)wafer.OriginStation).ToString());
  4492. if (stockerInfo != null && pj != null && pj.Stockers.Any(x => x.Item1 == ((ModuleName)wafer.OriginStation).ToString()) && (!stockerInfo.Item3.Any() || stockerInfo.Item3.Any(x => x == wafer.OriginSlot)))
  4493. iWaferNum++;
  4494. }
  4495. }
  4496. var useCount = 0;
  4497. if (targetWaferType == WaferType.M1)
  4498. useCount = pj.Monitor1Slots.Count;
  4499. if (targetWaferType == WaferType.M2)
  4500. useCount = pj.Monitor2Slots.Count;
  4501. return iWaferNum - useCount;
  4502. }
  4503. private int GetCurrentWaferNum(ProcessJobInfo pj, WaferType targetWaferType, out bool isSlotSelect)
  4504. {
  4505. int iWaferNum = 0;
  4506. isSlotSelect = false;
  4507. var targetCarrierType = (CarrierType)(Enum.Parse(typeof(CarrierType), targetWaferType.ToString()));
  4508. foreach (var target in _lstTotlaStockers)
  4509. {
  4510. var carrier = CarrierManager.Instance.GetCarrier(target.Module);
  4511. if (carrier == null || carrier.IsEmpty || carrier.CarrierType != targetCarrierType)
  4512. continue;
  4513. if (pj == null || !pj.Stockers.Any(x => x.Item1 == target.Module.ToString()))
  4514. continue;
  4515. var stockerInfo = pj.Stockers.FirstOrDefault(x => x.Item1 == target.Module.ToString());
  4516. var wafers = WaferManager.Instance.GetWafers(target.Module);
  4517. foreach (var wafer in wafers)
  4518. {
  4519. if (!stockerInfo.Item3.Any() && !wafer.IsEmpty && wafer.WaferType == targetWaferType)
  4520. iWaferNum++;
  4521. if (stockerInfo.Item3.Any(x => x == wafer.OriginSlot) && !wafer.IsEmpty && wafer.WaferType == targetWaferType)
  4522. {
  4523. iWaferNum++;
  4524. isSlotSelect = true;
  4525. }
  4526. }
  4527. }
  4528. return iWaferNum;
  4529. }
  4530. private int GetCurrentDummyWaferNum(WaferType targetWaferType)
  4531. {
  4532. int iWaferNum = 0;
  4533. var targetCarrierType = (CarrierType)(Enum.Parse(typeof(CarrierType), targetWaferType.ToString()));
  4534. foreach (var module in Singleton<EquipmentManager>.Instance.Modules.Keys)
  4535. {
  4536. if (module == ModuleName.SMIFA || module == ModuleName.SMIFB || module == ModuleName.Boat)
  4537. continue;
  4538. if (ModuleHelper.IsStocker(module))
  4539. {
  4540. var carrier = CarrierManager.Instance.GetCarrier(module);
  4541. if (carrier == null || carrier.IsEmpty || carrier.CarrierType != targetCarrierType)
  4542. continue;
  4543. }
  4544. var wafers = WaferManager.Instance.GetWafers(module);
  4545. if (wafers == null)
  4546. continue;
  4547. foreach (var wafer in wafers)
  4548. {
  4549. if (!wafer.IsEmpty && wafer.WaferType == targetWaferType)
  4550. iWaferNum++;
  4551. }
  4552. }
  4553. return iWaferNum;
  4554. }
  4555. private bool CassetteShortWaferInCassetteShort(ProcessJobInfo pj, ref List<string> adjustslot, ref int currentEDNum, RecipeLayoutEntityNormal layoutRecipeDataNormal, RecipeLayoutEntityExpert layoutRecipeDataExpert, bool cassetteSupplyED, bool waferSupplyED)
  4556. {
  4557. bool bEDShort = false;
  4558. bool monitorSlot = layoutRecipeDataNormal.MonitorPosition.ToLower() == "slot";
  4559. int slotCount = SC.GetValue<int>($"Boat.SlotCount");
  4560. int cassetteSlotCount = SC.GetValue<int>("System.CassetteSlotCount");
  4561. adjustslot = new List<string>();
  4562. for (int i = 0; i < slotCount; i++)
  4563. {
  4564. adjustslot.Add("");
  4565. }
  4566. if (monitorSlot)
  4567. {
  4568. for (int i = 0; i < slotCount; i++)
  4569. {
  4570. if (layoutRecipeDataExpert.Items[i].ToLower() == "monitor")
  4571. adjustslot[i] = "monitor";
  4572. }
  4573. }
  4574. List<SchedulerStocker> tempStockers = new List<SchedulerStocker>();
  4575. foreach (var p in pj.Stockers)
  4576. {
  4577. var module = GetModule(p.Item1) as SchedulerStocker;
  4578. var carrier = CarrierManager.Instance.GetCarrier(module.Module);
  4579. if (!carrier.IsEmpty && carrier.CarrierType.ToString() == "P")
  4580. tempStockers.Add(module);
  4581. }
  4582. if (SC.GetStringValue("System.ChargingOrderToBoat") == "FromTopToBottom")
  4583. tempStockers.Reverse();
  4584. int.TryParse(layoutRecipeDataNormal.DummyUpperSlot, out int dummyUpper);
  4585. int.TryParse(layoutRecipeDataNormal.DummyLowerSlot, out int dummyLower);
  4586. int.TryParse(layoutRecipeDataNormal.CenteringSlotPosition, out int centeringSlotPos);
  4587. int centeringSlotPosLower;
  4588. int centeringSlotPosUpper;
  4589. if (tempStockers.Count % 2 == 0)
  4590. {
  4591. centeringSlotPosLower = centeringSlotPos + (cassetteSlotCount + 1) * (tempStockers.Count / 2);
  4592. centeringSlotPosUpper = centeringSlotPos - (cassetteSlotCount + 1) * (tempStockers.Count / 2);
  4593. }
  4594. else
  4595. {
  4596. centeringSlotPosLower = centeringSlotPos + (cassetteSlotCount / 2) + 1 + (cassetteSlotCount + 1) * (tempStockers.Count / 2);
  4597. centeringSlotPosUpper = centeringSlotPos - (cassetteSlotCount / 2) - 1 - (cassetteSlotCount + 1) * (tempStockers.Count / 2);
  4598. }
  4599. if (centeringSlotPosLower >= slotCount - dummyLower)
  4600. {
  4601. int iIndex = slotCount - dummyLower - 1;
  4602. if (!monitorSlot)
  4603. {
  4604. adjustslot[iIndex] = "monitor";
  4605. iIndex--;
  4606. }
  4607. foreach (var stocker in tempStockers)
  4608. {
  4609. var wafers = WaferManager.Instance.GetWafers(stocker.Module);
  4610. if (wafers == null)
  4611. continue;
  4612. foreach (var wafer in wafers)
  4613. {
  4614. if (!wafer.IsEmpty)
  4615. {
  4616. for (int i = iIndex; i >= dummyUpper; i--)
  4617. {
  4618. if (adjustslot[i] == "")
  4619. {
  4620. adjustslot[i] = "production";
  4621. iIndex = i - 1;
  4622. break;
  4623. }
  4624. }
  4625. }
  4626. else
  4627. {
  4628. if (waferSupplyED)
  4629. {
  4630. if (currentEDNum > 0)
  4631. {
  4632. for (int i = iIndex; i >= dummyUpper; i--)
  4633. {
  4634. if (adjustslot[i] == "")
  4635. {
  4636. adjustslot[i] = "extradummy";
  4637. currentEDNum--;
  4638. iIndex = i - 1;
  4639. break;
  4640. }
  4641. }
  4642. }
  4643. else
  4644. {
  4645. bEDShort = true;
  4646. }
  4647. }
  4648. }
  4649. }
  4650. if (!monitorSlot)
  4651. {
  4652. adjustslot[iIndex] = "monitor";
  4653. iIndex--;
  4654. }
  4655. }
  4656. if (cassetteSupplyED && currentEDNum > 0)
  4657. {
  4658. for (int i = iIndex; i >= dummyUpper; i--)
  4659. {
  4660. if (currentEDNum > 0)
  4661. {
  4662. if (adjustslot[i] == "")
  4663. {
  4664. adjustslot[i] = "extradummy";
  4665. currentEDNum--;
  4666. }
  4667. }
  4668. else
  4669. {
  4670. bEDShort = true;
  4671. break;
  4672. }
  4673. }
  4674. }
  4675. }
  4676. else if (centeringSlotPosUpper <= dummyUpper + 1)
  4677. {
  4678. int iIndex = dummyUpper;
  4679. if (!monitorSlot)
  4680. {
  4681. adjustslot[iIndex] = "monitor";
  4682. iIndex++;
  4683. }
  4684. foreach (var stocker in tempStockers)
  4685. {
  4686. var wafers = WaferManager.Instance.GetWafers(stocker.Module);
  4687. if (wafers == null)
  4688. continue;
  4689. foreach (var wafer in wafers)
  4690. {
  4691. if (!wafer.IsEmpty)
  4692. {
  4693. for (int i = iIndex; i < slotCount - dummyLower; i++)
  4694. {
  4695. if (adjustslot[i] == "")
  4696. {
  4697. adjustslot[i] = "production";
  4698. iIndex = i + 1;
  4699. break;
  4700. }
  4701. }
  4702. }
  4703. else
  4704. {
  4705. if (waferSupplyED)
  4706. {
  4707. if (currentEDNum > 0)
  4708. {
  4709. for (int i = iIndex; i < slotCount - dummyLower; i++)
  4710. {
  4711. if (adjustslot[i] == "")
  4712. {
  4713. adjustslot[i] = "extradummy";
  4714. currentEDNum--;
  4715. iIndex = i + 1;
  4716. break;
  4717. }
  4718. }
  4719. }
  4720. else
  4721. {
  4722. bEDShort = true;
  4723. }
  4724. }
  4725. }
  4726. }
  4727. if (!monitorSlot)
  4728. {
  4729. adjustslot[iIndex] = "monitor";
  4730. iIndex++;
  4731. }
  4732. }
  4733. if (cassetteSupplyED && currentEDNum > 0)
  4734. {
  4735. for (int i = iIndex; i < slotCount - dummyLower; i++)
  4736. {
  4737. if (currentEDNum > 0)
  4738. {
  4739. if (adjustslot[i] == "")
  4740. {
  4741. adjustslot[i] = "extradummy";
  4742. currentEDNum--;
  4743. }
  4744. }
  4745. else
  4746. {
  4747. bEDShort = true;
  4748. break;
  4749. }
  4750. }
  4751. }
  4752. }
  4753. else
  4754. {
  4755. int iCount = 0;
  4756. int iUpperIndex = centeringSlotPos - 1;
  4757. int iLowerIndex = centeringSlotPos - 1;
  4758. int iUpperCount = 0;
  4759. int iLowerCount = 0;
  4760. bool bCassetteEvenNumber = tempStockers.Count % 2 == 0;
  4761. if (bCassetteEvenNumber && !monitorSlot)
  4762. {
  4763. adjustslot[centeringSlotPos - 1] = "monitor";
  4764. iUpperIndex--;
  4765. iLowerIndex++;
  4766. iCount++;
  4767. }
  4768. foreach (var stocker in tempStockers)
  4769. {
  4770. var wafers = WaferManager.Instance.GetWafers(stocker.Module);
  4771. if (wafers == null)
  4772. continue;
  4773. foreach (var wafer in wafers)
  4774. {
  4775. if (bCassetteEvenNumber)
  4776. {
  4777. if (!monitorSlot && iUpperCount >= cassetteSlotCount && iUpperIndex >= dummyUpper)
  4778. {
  4779. adjustslot[iUpperIndex] = "monitor";
  4780. iUpperIndex--;
  4781. iUpperCount = 0;
  4782. }
  4783. if (!monitorSlot && iLowerCount >= cassetteSlotCount && iLowerIndex < slotCount - dummyLower)
  4784. {
  4785. adjustslot[iLowerIndex] = "monitor";
  4786. iLowerIndex++;
  4787. iLowerCount = 0;
  4788. }
  4789. }
  4790. else
  4791. {
  4792. if (!monitorSlot && iUpperCount + iLowerCount >= cassetteSlotCount && iUpperIndex >= dummyUpper && iLowerIndex < slotCount - dummyLower)
  4793. {
  4794. adjustslot[iUpperIndex] = "monitor";
  4795. iUpperIndex--;
  4796. iUpperCount = 0;
  4797. adjustslot[iLowerIndex] = "monitor";
  4798. iLowerIndex++;
  4799. iLowerCount = 0;
  4800. bCassetteEvenNumber = true;
  4801. }
  4802. }
  4803. if (iCount % 2 == 0)
  4804. {
  4805. if (!wafer.IsEmpty)
  4806. {
  4807. for (int i = iUpperIndex; i >= dummyUpper; i--)
  4808. {
  4809. if (adjustslot[i] == "")
  4810. {
  4811. adjustslot[i] = "production";
  4812. iUpperIndex = i - 1;
  4813. iUpperCount++;
  4814. iCount++;
  4815. break;
  4816. }
  4817. }
  4818. }
  4819. else
  4820. {
  4821. if (waferSupplyED)
  4822. {
  4823. if (currentEDNum > 0)
  4824. {
  4825. for (int i = iUpperIndex; i >= dummyUpper; i--)
  4826. {
  4827. if (adjustslot[i] == "")
  4828. {
  4829. adjustslot[i] = "extradummy";
  4830. currentEDNum--;
  4831. iUpperIndex = i - 1;
  4832. iUpperCount++;
  4833. iCount++;
  4834. break;
  4835. }
  4836. }
  4837. }
  4838. else
  4839. {
  4840. bEDShort = true;
  4841. }
  4842. }
  4843. }
  4844. }
  4845. else
  4846. {
  4847. if (!wafer.IsEmpty)
  4848. {
  4849. for (int i = iLowerIndex; i < slotCount - dummyLower; i++)
  4850. {
  4851. if (adjustslot[i] == "")
  4852. {
  4853. adjustslot[i] = "production";
  4854. iLowerIndex = i + 1;
  4855. iLowerCount++;
  4856. iCount++;
  4857. break;
  4858. }
  4859. }
  4860. }
  4861. else
  4862. {
  4863. if (waferSupplyED)
  4864. {
  4865. if (currentEDNum > 0)
  4866. {
  4867. for (int i = iLowerIndex; i < slotCount - dummyLower; i++)
  4868. {
  4869. if (adjustslot[i] == "")
  4870. {
  4871. adjustslot[i] = "extradummy";
  4872. currentEDNum--;
  4873. iLowerIndex = i + 1;
  4874. iLowerCount++;
  4875. iCount++;
  4876. break;
  4877. }
  4878. }
  4879. }
  4880. else
  4881. {
  4882. bEDShort = true;
  4883. }
  4884. }
  4885. }
  4886. }
  4887. }
  4888. if (!monitorSlot)
  4889. {
  4890. if (adjustslot[iUpperIndex + 1] != "M")
  4891. {
  4892. adjustslot[iUpperIndex] = "monitor";
  4893. iUpperIndex--;
  4894. iCount++;
  4895. }
  4896. if (adjustslot[iLowerIndex - 1] != "monitor")
  4897. {
  4898. adjustslot[iLowerIndex] = "monitor";
  4899. iLowerIndex++;
  4900. iCount++;
  4901. }
  4902. }
  4903. }
  4904. if (cassetteSupplyED && currentEDNum > 0)
  4905. {
  4906. for (int i = 0; i < slotCount - iCount - dummyUpper - dummyLower; i++)
  4907. {
  4908. if (currentEDNum <= 0)
  4909. {
  4910. bEDShort = true;
  4911. break;
  4912. }
  4913. for (int j = iUpperIndex; j >= dummyUpper; j--)
  4914. {
  4915. if (adjustslot[j] == "")
  4916. {
  4917. adjustslot[j] = "extradummy";
  4918. iUpperIndex = j - 1;
  4919. currentEDNum--;
  4920. break;
  4921. }
  4922. }
  4923. if (currentEDNum <= 0)
  4924. {
  4925. bEDShort = true;
  4926. break;
  4927. }
  4928. for (int j = iLowerIndex; j < slotCount - dummyLower; j++)
  4929. {
  4930. if (adjustslot[j] == "")
  4931. {
  4932. adjustslot[j] = "extradummy";
  4933. iLowerIndex = j + 1;
  4934. currentEDNum--;
  4935. break;
  4936. }
  4937. }
  4938. }
  4939. }
  4940. }
  4941. return bEDShort;
  4942. }
  4943. private bool CassetteShortPWaferShort(ProcessJobInfo pj, ref List<string> adjustslot, ref int currentEDNum, RecipeLayoutEntityNormal layoutRecipeDataNormal, RecipeLayoutEntityExpert layoutRecipeDataExpert, int currentPWaferNum, bool cassetteSupplyED)
  4944. {
  4945. bool bEDShort = false;
  4946. bool monitorSlot = layoutRecipeDataNormal.MonitorPosition.ToLower() == "slot";
  4947. int slotCount = SC.GetValue<int>($"Boat.SlotCount");
  4948. int cassetteSlotCount = SC.GetValue<int>("System.CassetteSlotCount");
  4949. adjustslot = new List<string>();
  4950. for (int i = 0; i < slotCount; i++)
  4951. {
  4952. adjustslot.Add("");
  4953. }
  4954. if (monitorSlot)
  4955. {
  4956. for (int i = 0; i < slotCount; i++)
  4957. {
  4958. if (layoutRecipeDataExpert.Items[i].ToLower() == "monitor")
  4959. adjustslot[i] = "monitor";
  4960. }
  4961. }
  4962. int.TryParse(layoutRecipeDataNormal.DummyUpperSlot, out int dummyUpper);
  4963. int.TryParse(layoutRecipeDataNormal.DummyLowerSlot, out int dummyLower);
  4964. int.TryParse(layoutRecipeDataNormal.CenteringSlotPosition, out int centeringSlotPos);
  4965. List<SchedulerStocker> tempStockers = new List<SchedulerStocker>();
  4966. foreach (var p in pj.Stockers)
  4967. {
  4968. var module = GetModule(p.Item1) as SchedulerStocker;
  4969. var carrier = CarrierManager.Instance.GetCarrier(module.Module);
  4970. if (!carrier.IsEmpty && carrier.CarrierType.ToString() == "P")
  4971. tempStockers.Add(module);
  4972. }
  4973. if (SC.GetStringValue("System.ChargingOrderToBoat") == "FromTopToBottom")
  4974. tempStockers.Reverse();
  4975. int centeringSlotPosLower;
  4976. int centeringSlotPosUpper;
  4977. if ((currentPWaferNum / 2) % cassetteSlotCount == 0)
  4978. {
  4979. var temp = (int)Math.Ceiling((float)((currentPWaferNum / 2) / cassetteSlotCount));
  4980. centeringSlotPosLower = centeringSlotPos + (cassetteSlotCount + 1) * temp;
  4981. centeringSlotPosUpper = centeringSlotPos - (cassetteSlotCount + 1) * temp;
  4982. }
  4983. else
  4984. {
  4985. var temp = (int)Math.Ceiling((float)((currentPWaferNum / 2) / cassetteSlotCount));
  4986. centeringSlotPosLower = centeringSlotPos + (currentPWaferNum / 2) + 1 + temp;
  4987. centeringSlotPosUpper = centeringSlotPos - (currentPWaferNum / 2) - 1 - temp;
  4988. }
  4989. if (centeringSlotPosLower >= slotCount - dummyLower)
  4990. {
  4991. int iIndex = slotCount - dummyLower - 1;
  4992. if (!monitorSlot)
  4993. {
  4994. adjustslot[iIndex] = "monitor";
  4995. iIndex--;
  4996. }
  4997. for (int i = 0; i < tempStockers.Count; i++)
  4998. {
  4999. if (currentPWaferNum == 0)
  5000. break;
  5001. for (int j = 0; j < cassetteSlotCount; j++)
  5002. {
  5003. if (currentPWaferNum == 0)
  5004. break;
  5005. for (int k = iIndex; k >= dummyUpper; k--)
  5006. {
  5007. if (adjustslot[k] == "")
  5008. {
  5009. adjustslot[k] = "production";
  5010. currentPWaferNum--;
  5011. iIndex = k - 1;
  5012. break;
  5013. }
  5014. }
  5015. }
  5016. if (!monitorSlot)
  5017. {
  5018. adjustslot[iIndex] = "monitor";
  5019. iIndex--;
  5020. }
  5021. }
  5022. if (cassetteSupplyED)
  5023. {
  5024. for (int i = iIndex; i >= dummyUpper; i--)
  5025. {
  5026. if (currentEDNum > 0)
  5027. {
  5028. if (adjustslot[i] == "")
  5029. {
  5030. adjustslot[i] = "extradummy";
  5031. currentEDNum--;
  5032. }
  5033. }
  5034. else
  5035. {
  5036. bEDShort = true;
  5037. break;
  5038. }
  5039. }
  5040. }
  5041. }
  5042. else if (centeringSlotPosUpper <= dummyUpper + 1)
  5043. {
  5044. int iIndex = dummyUpper;
  5045. if (!monitorSlot)
  5046. {
  5047. adjustslot[iIndex] = "monitor";
  5048. iIndex++;
  5049. }
  5050. for (int i = 0; i < tempStockers.Count; i++)
  5051. {
  5052. if (currentPWaferNum == 0)
  5053. break;
  5054. for (int j = 0; j < cassetteSlotCount; j++)
  5055. {
  5056. if (currentPWaferNum == 0)
  5057. break;
  5058. for (int k = iIndex; k < slotCount - dummyLower; k++)
  5059. {
  5060. if (adjustslot[k] == "")
  5061. {
  5062. adjustslot[k] = "production";
  5063. currentPWaferNum--;
  5064. iIndex = k + 1;
  5065. break;
  5066. }
  5067. }
  5068. }
  5069. if (!monitorSlot)
  5070. {
  5071. adjustslot[iIndex] = "monitor";
  5072. iIndex++;
  5073. }
  5074. }
  5075. if (cassetteSupplyED)
  5076. {
  5077. for (int i = iIndex; i < slotCount - dummyLower; i++)
  5078. {
  5079. if (currentEDNum > 0)
  5080. {
  5081. if (adjustslot[i] == "")
  5082. {
  5083. adjustslot[i] = "extradummy";
  5084. currentEDNum--;
  5085. }
  5086. }
  5087. else
  5088. {
  5089. bEDShort = true;
  5090. break;
  5091. }
  5092. }
  5093. }
  5094. }
  5095. else
  5096. {
  5097. int iCount = 0;
  5098. int iUpperIndex = centeringSlotPos - 1;
  5099. int iLowerIndex = centeringSlotPos - 1;
  5100. int iUpperCount = 0;
  5101. int iLowerCount = 0;
  5102. bool bCassetteEvenNumber = (currentPWaferNum / 2) % cassetteSlotCount == 0;
  5103. if (bCassetteEvenNumber && !monitorSlot)
  5104. {
  5105. adjustslot[centeringSlotPos - 1] = "monitor";
  5106. iUpperIndex--;
  5107. iLowerIndex++;
  5108. iCount++;
  5109. }
  5110. for (int i = 0; i < tempStockers.Count; i++)
  5111. {
  5112. if (currentPWaferNum == 0)
  5113. break;
  5114. for (int j = 0; j < cassetteSlotCount; j++)
  5115. {
  5116. if (currentPWaferNum == 0)
  5117. break;
  5118. if (bCassetteEvenNumber)
  5119. {
  5120. if (!monitorSlot && iUpperCount >= cassetteSlotCount && iUpperIndex >= dummyUpper)
  5121. {
  5122. adjustslot[iUpperIndex] = "monitor";
  5123. iUpperIndex--;
  5124. iUpperCount = 0;
  5125. }
  5126. if (!monitorSlot && iLowerCount >= cassetteSlotCount && iLowerIndex < slotCount - dummyLower)
  5127. {
  5128. adjustslot[iLowerIndex] = "monitor";
  5129. iLowerIndex++;
  5130. iLowerCount = 0;
  5131. }
  5132. }
  5133. else
  5134. {
  5135. if (!monitorSlot && iUpperCount + iLowerCount >= cassetteSlotCount && iUpperIndex >= dummyUpper && iLowerIndex < slotCount - dummyLower)
  5136. {
  5137. adjustslot[iUpperIndex] = "monitor";
  5138. iUpperIndex--;
  5139. iUpperCount = 0;
  5140. adjustslot[iLowerIndex] = "monitor";
  5141. iLowerIndex++;
  5142. iLowerCount = 0;
  5143. bCassetteEvenNumber = true;
  5144. }
  5145. }
  5146. if (iCount % 2 == 0)
  5147. {
  5148. for (int k = iUpperIndex; k >= dummyUpper; k--)
  5149. {
  5150. if (adjustslot[k] == "")
  5151. {
  5152. adjustslot[k] = "production";
  5153. currentPWaferNum--;
  5154. iUpperIndex = k - 1;
  5155. iUpperCount++;
  5156. iCount++;
  5157. break;
  5158. }
  5159. }
  5160. }
  5161. else
  5162. {
  5163. for (int k = iLowerIndex; k < slotCount - dummyLower; k++)
  5164. {
  5165. if (adjustslot[k] == "")
  5166. {
  5167. adjustslot[k] = "production";
  5168. currentPWaferNum--;
  5169. iLowerIndex = k + 1;
  5170. iLowerCount++;
  5171. iCount++;
  5172. break;
  5173. }
  5174. }
  5175. }
  5176. }
  5177. }
  5178. if (!monitorSlot)
  5179. {
  5180. if (adjustslot[iUpperIndex + 1] != "monitor")
  5181. {
  5182. adjustslot[iUpperIndex] = "monitor";
  5183. iUpperIndex--;
  5184. iCount++;
  5185. }
  5186. if (adjustslot[iLowerIndex - 1] != "monitor")
  5187. {
  5188. adjustslot[iLowerIndex] = "monitor";
  5189. iLowerIndex++;
  5190. iCount++;
  5191. }
  5192. }
  5193. if (cassetteSupplyED)
  5194. {
  5195. for (int i = 0; i < slotCount - iCount - dummyUpper - dummyLower; i++)
  5196. {
  5197. if (currentEDNum <= 0)
  5198. {
  5199. bEDShort = true;
  5200. break;
  5201. }
  5202. for (int j = iUpperIndex; j >= dummyUpper; j--)
  5203. {
  5204. if (adjustslot[j] == "")
  5205. {
  5206. adjustslot[j] = "extradummy";
  5207. currentEDNum--;
  5208. iUpperIndex = j - 1;
  5209. break;
  5210. }
  5211. }
  5212. if (currentEDNum <= 0)
  5213. {
  5214. bEDShort = true;
  5215. break;
  5216. }
  5217. for (int j = iLowerIndex; j < slotCount - dummyLower; j++)
  5218. {
  5219. if (adjustslot[j] == "")
  5220. {
  5221. adjustslot[j] = "extradummy";
  5222. currentEDNum--;
  5223. iLowerIndex = j + 1;
  5224. break;
  5225. }
  5226. }
  5227. }
  5228. }
  5229. }
  5230. return bEDShort;
  5231. }
  5232. #endregion
  5233. #region dummy use
  5234. private bool CheckDummyWaferUse(ProcessJobInfo pj, ControlJobInfo cj)
  5235. {
  5236. var pm = (Singleton<EquipmentManager>.Instance.Modules[ModuleName.PM1] as PMModule);
  5237. foreach (var module in Singleton<EquipmentManager>.Instance.Modules.Keys)
  5238. {
  5239. if (!ModuleHelper.IsStocker(module) || !pj.Stockers.Any(x => x.Item1 == module.ToString()))
  5240. continue;
  5241. var wafers = WaferManager.Instance.GetWafers(module);
  5242. if (wafers == null)
  5243. continue;
  5244. var isScheduleMaintenance = SC.ContainsItem("System.EnableScheduleMaintenance") && SC.GetValue<bool>("System.EnableScheduleMaintenance");
  5245. if (isScheduleMaintenance)
  5246. {
  5247. pm.GetAllDBRecord();
  5248. }
  5249. foreach (var wafer in wafers)
  5250. {
  5251. if (wafer == null || wafer.IsEmpty || (wafer.WaferType != WaferType.SD && wafer.WaferType != WaferType.ED))
  5252. continue;
  5253. #region New
  5254. if (isScheduleMaintenance)
  5255. {
  5256. #region SD Dummy 时间/次数/膜厚限制
  5257. if (wafer.WaferType == WaferType.SD)
  5258. {
  5259. var maintenanceItemCarrierUseFreq = ScheduleMaintenanceDataManager.Instance.GetItem(MaintenanceItemEnum.SDCarrierUseFreq.ToString());
  5260. var maintenanceItemWaferThickness = ScheduleMaintenanceDataManager.Instance.GetItem(MaintenanceItemEnum.SDWaferThickness.ToString());
  5261. var maintenanceItemWaferUserTime = ScheduleMaintenanceDataManager.Instance.GetItem(MaintenanceItemEnum.SDWaferUserTime.ToString());
  5262. if (maintenanceItemCarrierUseFreq.StartValue > 0 && wafer.UseCount > maintenanceItemCarrierUseFreq.StartValue && wafer.UseCount < maintenanceItemCarrierUseFreq.LimitValue)
  5263. {
  5264. if (maintenanceItemCarrierUseFreq.MaintenanceProcessing == MaintenanceProcessingCommandEnum.AlarmReport.ToString() ||
  5265. maintenanceItemCarrierUseFreq.MaintenanceProcessing == MaintenanceProcessingCommandEnum.JobAutoStart.ToString())
  5266. {
  5267. var msg = pm.GetAlarmWarningMsg(maintenanceItemCarrierUseFreq, false, wafer.UseCount.ToString(), maintenanceItemCarrierUseFreq.StartValue.ToString(), maintenanceItemCarrierUseFreq.LimitValue.ToString());
  5268. Singleton<EquipmentManager>.Instance.SDWaferTypeUseCountWarning.Set(msg);
  5269. }
  5270. }
  5271. if (maintenanceItemWaferUserTime.StartValue > 0 && wafer.UseTime > maintenanceItemWaferUserTime.StartValue && wafer.UseTime < maintenanceItemWaferUserTime.LimitValue)
  5272. {
  5273. if (maintenanceItemWaferUserTime.MaintenanceProcessing == MaintenanceProcessingCommandEnum.AlarmReport.ToString() ||
  5274. maintenanceItemWaferUserTime.MaintenanceProcessing == MaintenanceProcessingCommandEnum.JobAutoStart.ToString())
  5275. {
  5276. var currentValue = DateTimeUtil.SecondToHHmmss(maintenanceItemWaferUserTime.CurrentValue.ToString());
  5277. var minValue = DateTimeUtil.SecondToHHmmss(maintenanceItemWaferUserTime.StartValue.ToString());
  5278. var maxValue = DateTimeUtil.SecondToHHmmss(maintenanceItemWaferUserTime.LimitValue.ToString());
  5279. var msg = pm.GetAlarmWarningMsg(maintenanceItemWaferUserTime, true, currentValue, minValue, maxValue);
  5280. Singleton<EquipmentManager>.Instance.SDWaferTypeUseTimeWarning.Set(msg);
  5281. }
  5282. }
  5283. if (maintenanceItemWaferThickness.StartValue > 0 && wafer.UseThick > maintenanceItemWaferThickness.StartValue && wafer.UseThick < maintenanceItemWaferThickness.LimitValue)
  5284. {
  5285. if (maintenanceItemWaferThickness.MaintenanceProcessing == MaintenanceProcessingCommandEnum.AlarmReport.ToString() ||
  5286. maintenanceItemWaferThickness.MaintenanceProcessing == MaintenanceProcessingCommandEnum.JobAutoStart.ToString())
  5287. {
  5288. var msg = pm.GetAlarmWarningMsg(maintenanceItemWaferThickness, false, wafer.UseThick.ToString(), maintenanceItemWaferThickness.StartValue.ToString(), maintenanceItemWaferThickness.LimitValue.ToString());
  5289. Singleton<EquipmentManager>.Instance.SDWaferTypeThicknessWarning.Set(msg);
  5290. }
  5291. }
  5292. if (maintenanceItemCarrierUseFreq.StartValue > 0 && wafer.UseCount >= maintenanceItemCarrierUseFreq.LimitValue)
  5293. {
  5294. if (maintenanceItemCarrierUseFreq.MaintenanceProcessing == MaintenanceProcessingCommandEnum.AlarmReport.ToString())
  5295. {
  5296. var msg = pm.GetAlarmWarningMsg(maintenanceItemCarrierUseFreq, false, wafer.UseCount.ToString(), maintenanceItemCarrierUseFreq.StartValue.ToString(), maintenanceItemCarrierUseFreq.LimitValue.ToString());
  5297. Singleton<EquipmentManager>.Instance.SDWaferTypeUseCountAlarm.Set(msg);
  5298. return false;
  5299. }
  5300. else if (maintenanceItemCarrierUseFreq.MaintenanceProcessing == MaintenanceProcessingCommandEnum.JobAutoStart.ToString())
  5301. {
  5302. var msg = pm.GetAlarmWarningMsg(maintenanceItemCarrierUseFreq, true);
  5303. if (string.IsNullOrEmpty(maintenanceItemCarrierUseFreq.AssociationProcessRecipeName))
  5304. {
  5305. Singleton<EquipmentManager>.Instance.SDWaferTypeUseCountAlarm.Set(msg);
  5306. return false;
  5307. }
  5308. Singleton<EquipmentManager>.Instance.SDWaferTypeUseCountAlarm.Set(msg);
  5309. pm.TriggerJobAutoStart(maintenanceItemCarrierUseFreq.AssociationProcessRecipeName, RecipeExecEntryEnum.SDWaferRangeTrigger);
  5310. LOG.Info($"{msg} Trigger {maintenanceItemCarrierUseFreq.AssociationProcessRecipeName}");
  5311. return false;
  5312. }
  5313. }
  5314. if (maintenanceItemWaferUserTime.StartValue > 0 && wafer.UseTime >= maintenanceItemWaferUserTime.LimitValue)
  5315. {
  5316. var currentValue = DateTimeUtil.SecondToHHmmss(maintenanceItemWaferUserTime.CurrentValue.ToString());
  5317. var minValue = DateTimeUtil.SecondToHHmmss(maintenanceItemWaferUserTime.StartValue.ToString());
  5318. var maxValue = DateTimeUtil.SecondToHHmmss(maintenanceItemWaferUserTime.LimitValue.ToString());
  5319. var msg = pm.GetAlarmWarningMsg(maintenanceItemWaferUserTime, true, currentValue, minValue, maxValue);
  5320. if (maintenanceItemWaferUserTime.MaintenanceProcessing == MaintenanceProcessingCommandEnum.AlarmReport.ToString())
  5321. {
  5322. Singleton<EquipmentManager>.Instance.SDWaferTypeUseTimeAlarm.Set(msg);
  5323. return false;
  5324. }
  5325. else if (maintenanceItemWaferUserTime.MaintenanceProcessing == MaintenanceProcessingCommandEnum.JobAutoStart.ToString())
  5326. {
  5327. if (string.IsNullOrEmpty(maintenanceItemWaferUserTime.AssociationProcessRecipeName))
  5328. {
  5329. Singleton<EquipmentManager>.Instance.SDWaferTypeUseTimeAlarm.Set(msg);
  5330. return false;
  5331. }
  5332. Singleton<EquipmentManager>.Instance.SDWaferTypeUseTimeAlarm.Set(msg);
  5333. pm.TriggerJobAutoStart(maintenanceItemWaferUserTime.AssociationProcessRecipeName, RecipeExecEntryEnum.SDWaferRangeTrigger);
  5334. LOG.Info($"{msg} Trigger {maintenanceItemWaferUserTime.AssociationProcessRecipeName}");
  5335. return false;
  5336. }
  5337. }
  5338. if (maintenanceItemWaferThickness.StartValue > 0 && wafer.UseThick >= maintenanceItemWaferThickness.LimitValue)
  5339. {
  5340. if (maintenanceItemWaferThickness.MaintenanceProcessing == MaintenanceProcessingCommandEnum.AlarmReport.ToString())
  5341. {
  5342. var msg = pm.GetAlarmWarningMsg(maintenanceItemWaferThickness, false, wafer.UseThick.ToString(), maintenanceItemWaferThickness.StartValue.ToString(), maintenanceItemWaferThickness.LimitValue.ToString());
  5343. Singleton<EquipmentManager>.Instance.SDWaferTypeThicknessAlarm.Set(msg);
  5344. return false;
  5345. }
  5346. else if (maintenanceItemWaferThickness.MaintenanceProcessing == MaintenanceProcessingCommandEnum.JobAutoStart.ToString())
  5347. {
  5348. var msg = pm.GetAlarmWarningMsg(maintenanceItemWaferThickness, true);
  5349. if (string.IsNullOrEmpty(maintenanceItemWaferThickness.AssociationProcessRecipeName))
  5350. {
  5351. Singleton<EquipmentManager>.Instance.SDWaferTypeThicknessAlarm.Set(msg);
  5352. return false;
  5353. }
  5354. Singleton<EquipmentManager>.Instance.SDWaferTypeThicknessAlarm.Set(msg);
  5355. pm.TriggerJobAutoStart(maintenanceItemWaferThickness.AssociationProcessRecipeName, RecipeExecEntryEnum.SDWaferRangeTrigger);
  5356. LOG.Info($"{msg} Trigger {maintenanceItemWaferThickness.AssociationProcessRecipeName}");
  5357. return false;
  5358. }
  5359. }
  5360. }
  5361. #endregion
  5362. #region ED
  5363. if (wafer.WaferType == WaferType.ED)
  5364. {
  5365. var maintenanceItemCarrierUseFreq = ScheduleMaintenanceDataManager.Instance.GetItem(MaintenanceItemEnum.FDCarrierUseFreq.ToString());
  5366. var maintenanceItemWaferThickness = ScheduleMaintenanceDataManager.Instance.GetItem(MaintenanceItemEnum.FDWaferThickness.ToString());
  5367. var maintenanceItemWaferUserTime = ScheduleMaintenanceDataManager.Instance.GetItem(MaintenanceItemEnum.FDWaferUserTime.ToString());
  5368. if (maintenanceItemCarrierUseFreq.StartValue > 0 && wafer.UseCount > maintenanceItemCarrierUseFreq.StartValue && wafer.UseCount < maintenanceItemCarrierUseFreq.LimitValue)
  5369. {
  5370. if (maintenanceItemCarrierUseFreq.MaintenanceProcessing == MaintenanceProcessingCommandEnum.AlarmReport.ToString() ||
  5371. maintenanceItemCarrierUseFreq.MaintenanceProcessing == MaintenanceProcessingCommandEnum.JobAutoStart.ToString())
  5372. {
  5373. var msg = pm.GetAlarmWarningMsg(maintenanceItemCarrierUseFreq, false, wafer.UseCount.ToString(), maintenanceItemCarrierUseFreq.StartValue.ToString(), maintenanceItemCarrierUseFreq.LimitValue.ToString());
  5374. Singleton<EquipmentManager>.Instance.FDWaferTypeUseCountWarning.Set(msg);
  5375. }
  5376. }
  5377. if (maintenanceItemWaferUserTime.StartValue > 0 && wafer.UseTime > maintenanceItemWaferUserTime.StartValue && wafer.UseTime < maintenanceItemWaferUserTime.LimitValue)
  5378. {
  5379. if (maintenanceItemWaferUserTime.MaintenanceProcessing == MaintenanceProcessingCommandEnum.AlarmReport.ToString() ||
  5380. maintenanceItemWaferUserTime.MaintenanceProcessing == MaintenanceProcessingCommandEnum.JobAutoStart.ToString())
  5381. {
  5382. var currentValue = DateTimeUtil.SecondToHHmmss(maintenanceItemWaferUserTime.CurrentValue.ToString());
  5383. var minValue = DateTimeUtil.SecondToHHmmss(maintenanceItemWaferUserTime.StartValue.ToString());
  5384. var maxValue = DateTimeUtil.SecondToHHmmss(maintenanceItemWaferUserTime.LimitValue.ToString());
  5385. var msg = pm.GetAlarmWarningMsg(maintenanceItemWaferUserTime, true, currentValue, minValue, maxValue);
  5386. Singleton<EquipmentManager>.Instance.FDWaferTypeUseTimeWarning.Set(msg);
  5387. }
  5388. }
  5389. if (maintenanceItemWaferThickness.StartValue > 0 && wafer.UseThick > maintenanceItemWaferThickness.StartValue && wafer.UseThick < maintenanceItemWaferThickness.LimitValue)
  5390. {
  5391. if (maintenanceItemWaferThickness.MaintenanceProcessing == MaintenanceProcessingCommandEnum.AlarmReport.ToString() ||
  5392. maintenanceItemWaferThickness.MaintenanceProcessing == MaintenanceProcessingCommandEnum.JobAutoStart.ToString())
  5393. {
  5394. var msg = pm.GetAlarmWarningMsg(maintenanceItemWaferThickness, false, wafer.UseThick.ToString(), maintenanceItemWaferThickness.StartValue.ToString(), maintenanceItemWaferThickness.LimitValue.ToString());
  5395. Singleton<EquipmentManager>.Instance.FDWaferTypeThicknessWarning.Set(msg);
  5396. }
  5397. }
  5398. if (maintenanceItemCarrierUseFreq.StartValue > 0 && wafer.UseCount >= maintenanceItemCarrierUseFreq.LimitValue)
  5399. {
  5400. if (maintenanceItemCarrierUseFreq.MaintenanceProcessing == MaintenanceProcessingCommandEnum.AlarmReport.ToString())
  5401. {
  5402. var msg = pm.GetAlarmWarningMsg(maintenanceItemCarrierUseFreq, false, wafer.UseCount.ToString(), maintenanceItemCarrierUseFreq.StartValue.ToString(), maintenanceItemCarrierUseFreq.LimitValue.ToString());
  5403. Singleton<EquipmentManager>.Instance.FDWaferTypeUseCountAlarm.Set(msg);
  5404. return false;
  5405. }
  5406. else if (maintenanceItemCarrierUseFreq.MaintenanceProcessing == MaintenanceProcessingCommandEnum.JobAutoStart.ToString())
  5407. {
  5408. var msg = pm.GetAlarmWarningMsg(maintenanceItemCarrierUseFreq);
  5409. if (string.IsNullOrEmpty(maintenanceItemCarrierUseFreq.AssociationProcessRecipeName))
  5410. {
  5411. Singleton<EquipmentManager>.Instance.FDWaferTypeUseCountAlarm.Set(msg);
  5412. return false;
  5413. }
  5414. Singleton<EquipmentManager>.Instance.FDWaferTypeUseCountAlarm.Set(msg);
  5415. pm.TriggerJobAutoStart(maintenanceItemCarrierUseFreq.AssociationProcessRecipeName, RecipeExecEntryEnum.EDWaferRangeTrigger);
  5416. LOG.Info($"{msg} Trigger {maintenanceItemCarrierUseFreq.AssociationProcessRecipeName}");
  5417. return false;
  5418. }
  5419. }
  5420. if (maintenanceItemWaferUserTime.StartValue > 0 && wafer.UseTime >= maintenanceItemWaferUserTime.LimitValue)
  5421. {
  5422. var currentValue = DateTimeUtil.SecondToHHmmss(maintenanceItemWaferUserTime.CurrentValue.ToString());
  5423. var minValue = DateTimeUtil.SecondToHHmmss(maintenanceItemWaferUserTime.StartValue.ToString());
  5424. var maxValue = DateTimeUtil.SecondToHHmmss(maintenanceItemWaferUserTime.LimitValue.ToString());
  5425. var msg = pm.GetAlarmWarningMsg(maintenanceItemWaferUserTime, true, currentValue, minValue, maxValue);
  5426. if (maintenanceItemWaferUserTime.MaintenanceProcessing == MaintenanceProcessingCommandEnum.AlarmReport.ToString())
  5427. {
  5428. Singleton<EquipmentManager>.Instance.FDWaferTypeUseTimeAlarm.Set(msg);
  5429. return false;
  5430. }
  5431. else if (maintenanceItemWaferUserTime.MaintenanceProcessing == MaintenanceProcessingCommandEnum.JobAutoStart.ToString())
  5432. {
  5433. if (string.IsNullOrEmpty(maintenanceItemWaferUserTime.AssociationProcessRecipeName))
  5434. {
  5435. Singleton<EquipmentManager>.Instance.FDWaferTypeUseTimeAlarm.Set(msg);
  5436. return false;
  5437. }
  5438. Singleton<EquipmentManager>.Instance.FDWaferTypeUseTimeAlarm.Set(msg);
  5439. pm.TriggerJobAutoStart(maintenanceItemWaferUserTime.AssociationProcessRecipeName, RecipeExecEntryEnum.EDWaferRangeTrigger);
  5440. LOG.Info($"{msg} Trigger {maintenanceItemWaferUserTime.AssociationProcessRecipeName}");
  5441. return false;
  5442. }
  5443. }
  5444. if (maintenanceItemWaferThickness.StartValue > 0 && wafer.UseThick >= maintenanceItemWaferThickness.LimitValue)
  5445. {
  5446. if (maintenanceItemWaferThickness.MaintenanceProcessing == MaintenanceProcessingCommandEnum.AlarmReport.ToString())
  5447. {
  5448. var msg = pm.GetAlarmWarningMsg(maintenanceItemWaferThickness, false, wafer.UseThick.ToString(), maintenanceItemWaferThickness.StartValue.ToString(), maintenanceItemWaferThickness.LimitValue.ToString());
  5449. Singleton<EquipmentManager>.Instance.FDWaferTypeThicknessAlarm.Set(msg);
  5450. return false;
  5451. }
  5452. else if (maintenanceItemWaferThickness.MaintenanceProcessing == MaintenanceProcessingCommandEnum.JobAutoStart.ToString())
  5453. {
  5454. var msg = pm.GetAlarmWarningMsg(maintenanceItemWaferThickness, true);
  5455. if (string.IsNullOrEmpty(maintenanceItemWaferThickness.AssociationProcessRecipeName))
  5456. {
  5457. Singleton<EquipmentManager>.Instance.FDWaferTypeThicknessAlarm.Set(msg);
  5458. return false;
  5459. }
  5460. Singleton<EquipmentManager>.Instance.FDWaferTypeThicknessAlarm.Set(msg);
  5461. pm.TriggerJobAutoStart(maintenanceItemWaferThickness.AssociationProcessRecipeName, RecipeExecEntryEnum.EDWaferRangeTrigger);
  5462. LOG.Info($"{msg} Trigger {maintenanceItemWaferThickness.AssociationProcessRecipeName}");
  5463. return false;
  5464. }
  5465. }
  5466. }
  5467. #endregion
  5468. }
  5469. else
  5470. {
  5471. // SD Dummy
  5472. if (wafer.WaferType == WaferType.SD && SC.GetValue<bool>($"PM1.WaferCycleTime.IsEnableSDWaferUseCountWarning") && wafer.UseCount > SC.GetValue<int>($"PM1.WaferCycleTime.SDCountWarning") && wafer.UseCount < SC.GetValue<int>($"PM1.WaferCycleTime.SDCountAlarm"))
  5473. {
  5474. Singleton<EquipmentManager>.Instance.SDWaferTypeUseCountWarning.Set($"more than {SC.GetValue<int>($"PM1.WaferCycleTime.SDCountWarning")} 次");
  5475. }
  5476. if (wafer.WaferType == WaferType.SD && SC.GetValue<bool>($"PM1.WaferCycleTime.IsEnableSDWaferUseTimeWarning") && wafer.UseTime / 3600 > SC.GetValue<double>($"PM1.WaferCycleTime.SDTimeWarning") && wafer.UseTime / 3600 < SC.GetValue<double>($"PM1.WaferCycleTime.SDTimeAlarm"))
  5477. {
  5478. Singleton<EquipmentManager>.Instance.SDWaferTypeUseTimeWarning.Set($"more than {SC.GetValue<double>($"PM1.WaferCycleTime.SDTimeWarning")} hour");
  5479. }
  5480. if (wafer.WaferType == WaferType.SD && SC.GetValue<bool>($"PM1.WaferCycleTime.IsEnableSDWaferThicknessWarning") && wafer.UseThick > SC.GetValue<double>($"PM1.WaferCycleTime.SDThicknessWarning") && wafer.UseThick < SC.GetValue<double>($"PM1.WaferCycleTime.SDThicknessAlarm"))
  5481. {
  5482. Singleton<EquipmentManager>.Instance.SDWaferTypeThicknessWarning.Set($"more than {SC.GetValue<double>($"PM1.WaferCycleTime.SDThicknessWarning")} nm");
  5483. }
  5484. if (wafer.WaferType == WaferType.SD && SC.GetValue<bool>($"PM1.WaferCycleTime.IsEnableSDWaferUseCountWarning") && wafer.UseCount >= SC.GetValue<int>($"PM1.WaferCycleTime.SDCountAlarm"))
  5485. {
  5486. Singleton<EquipmentManager>.Instance.SDWaferTypeUseCountAlarm.Set($"more than {SC.GetValue<int>($"PM1.WaferCycleTime.SDCountAlarm")} 次");
  5487. return false;
  5488. }
  5489. if (wafer.WaferType == WaferType.SD && SC.GetValue<bool>($"PM1.WaferCycleTime.IsEnableSDWaferUseTimeWarning") && wafer.UseTime / 3600 >= SC.GetValue<double>($"PM1.WaferCycleTime.SDTimeAlarm"))
  5490. {
  5491. Singleton<EquipmentManager>.Instance.SDWaferTypeUseTimeAlarm.Set($"more than {SC.GetValue<double>($"PM1.WaferCycleTime.SDTimeAlarm")} hour");
  5492. return false;
  5493. }
  5494. if (wafer.WaferType == WaferType.SD && SC.GetValue<bool>($"PM1.WaferCycleTime.IsEnableSDWaferThicknessWarning") && wafer.UseThick >= SC.GetValue<double>($"PM1.WaferCycleTime.SDThicknessAlarm"))
  5495. {
  5496. Singleton<EquipmentManager>.Instance.SDWaferTypeThicknessAlarm.Set($"more than {SC.GetValue<double>($"PM1.WaferCycleTime.SDThicknessAlarm")} nm");
  5497. return false;
  5498. }
  5499. // Extra Dummy
  5500. if (wafer.WaferType == WaferType.ED && SC.GetValue<bool>($"PM1.WaferCycleTime.IsEnableEDWaferUseCountWarning") && wafer.UseCount > SC.GetValue<int>($"PM1.WaferCycleTime.EDCountWarning") && wafer.UseCount < SC.GetValue<int>($"PM1.WaferCycleTime.EDCountAlarm"))
  5501. {
  5502. Singleton<EquipmentManager>.Instance.FDWaferTypeUseCountWarning.Set($"more than {SC.GetValue<int>($"PM1.WaferCycleTime.EDCountWarning")} 次");
  5503. }
  5504. if (wafer.WaferType == WaferType.ED && SC.GetValue<bool>($"PM1.WaferCycleTime.IsEnableEDWaferUseTimeWarning") && wafer.UseTime / 3600 > SC.GetValue<double>($"PM1.WaferCycleTime.EDTimeWarning") && wafer.UseTime / 3600 < SC.GetValue<double>($"PM1.WaferCycleTime.EDTimeAlarm"))
  5505. {
  5506. Singleton<EquipmentManager>.Instance.FDWaferTypeUseTimeWarning.Set($"more than {SC.GetValue<double>($"PM1.WaferCycleTime.EDTimeWarning")} hour");
  5507. }
  5508. if (wafer.WaferType == WaferType.ED && SC.GetValue<bool>($"PM1.WaferCycleTime.IsEnableEDWaferThicknessWarning") && wafer.UseThick > SC.GetValue<double>($"PM1.WaferCycleTime.EDThicknessWarning") && wafer.UseThick < SC.GetValue<double>($"PM1.WaferCycleTime.EDThicknessAlarm"))
  5509. {
  5510. Singleton<EquipmentManager>.Instance.FDWaferTypeThicknessWarning.Set($"more than {SC.GetValue<double>($"PM1.WaferCycleTime.EDThicknessWarning")} nm");
  5511. }
  5512. if (wafer.WaferType == WaferType.ED && SC.GetValue<bool>($"PM1.WaferCycleTime.IsEnableEDWaferUseCountWarning") && wafer.UseCount >= SC.GetValue<int>($"PM1.WaferCycleTime.EDCountAlarm"))
  5513. {
  5514. Singleton<EquipmentManager>.Instance.FDWaferTypeUseCountAlarm.Set($"more than {SC.GetValue<int>($"PM1.WaferCycleTime.EDCountAlarm")} 次");
  5515. return false;
  5516. }
  5517. if (wafer.WaferType == WaferType.ED && SC.GetValue<bool>($"PM1.WaferCycleTime.IsEnableEDWaferUseTimeWarning") && wafer.UseTime / 3600 >= SC.GetValue<double>($"PM1.WaferCycleTime.EDTimeAlarm"))
  5518. {
  5519. Singleton<EquipmentManager>.Instance.FDWaferTypeUseTimeAlarm.Set($"more than {SC.GetValue<double>($"PM1.WaferCycleTime.EDTimeAlarm")} hour");
  5520. return false;
  5521. }
  5522. if (wafer.WaferType == WaferType.ED && SC.GetValue<bool>($"PM1.WaferCycleTime.IsEnableEDWaferThicknessWarning") && wafer.UseThick >= SC.GetValue<double>($"PM1.WaferCycleTime.EDThicknessAlarm"))
  5523. {
  5524. Singleton<EquipmentManager>.Instance.FDWaferTypeThicknessAlarm.Set($"more than {SC.GetValue<double>($"PM1.WaferCycleTime.EDThicknessAlarm")} nm");
  5525. return false;
  5526. }
  5527. }
  5528. #endregion
  5529. }
  5530. }
  5531. return true;
  5532. }
  5533. #endregion
  5534. private void MonitorPMTask()
  5535. {
  5536. if (!_carrierRobot.IsAvailable || !_waferRobot.IsAvailable)
  5537. return;
  5538. foreach (var pm in _lstPms)
  5539. {
  5540. var pmModule = Singleton<EquipmentManager>.Instance.Modules[ModuleName.PM1] as PMModule;
  5541. if (pmModule == null)
  5542. return;
  5543. if (!pm.IsAvailable && !pmModule.IsMainRecipeComplete)
  5544. continue;
  5545. var wafers = WaferManager.Instance.GetWafers(pm.Module);
  5546. if (wafers == null)
  5547. continue;
  5548. var pj = _lstProcessJobs.FirstOrDefault(x => x.State == EnumProcessJobState.Processing);
  5549. if (pj == null)
  5550. return;
  5551. bool isNeedProcess = false;
  5552. bool isProcessed = false;
  5553. foreach (var wafer in wafers)
  5554. {
  5555. if (wafer == null || wafer.IsEmpty)
  5556. continue;
  5557. if (!pj.SlotWafers.Any(x => x.Item1 == (ModuleName)wafer.OriginStation && x.Item2 == wafer.OriginSlot))
  5558. pj.SlotWafers.Add(Tuple.Create((ModuleName)wafer.OriginStation, wafer.OriginSlot));
  5559. if (wafer.ProcessJob == null)
  5560. {
  5561. wafer.ProcessJob = pj;
  5562. WaferDataRecorder.SetPjInfo(wafer.InnerId.ToString(), pj.InnerId.ToString());
  5563. }
  5564. if (wafer.ProcessState == EnumWaferProcessStatus.Idle)
  5565. {
  5566. isNeedProcess = true;
  5567. isProcessed = false;
  5568. }
  5569. if (wafer.ProcessState == EnumWaferProcessStatus.Completed)
  5570. {
  5571. isNeedProcess = false;
  5572. isProcessed = true;
  5573. }
  5574. }
  5575. if (pj.IsEmptyLayout)
  5576. {
  5577. if (pj.ProcessingState == EnumProcessingState.Charging)
  5578. {
  5579. isNeedProcess = true;
  5580. isProcessed = false;
  5581. }
  5582. else
  5583. {
  5584. isNeedProcess = false;
  5585. if (DateTime.Now - pm.RecipeStartTime > TimeSpan.FromSeconds(5))
  5586. isProcessed = true;
  5587. }
  5588. }
  5589. if (isNeedProcess && CheckChargeFinished(pj, pm.Module) && pj.ProcessingState != EnumProcessingState.Processing &&
  5590. pmModule.CheckStandbyCondition() && pm.IsAvailable)
  5591. {
  5592. if (SC.GetValue<bool>("System.IsEnableBoatChargeMapping") && !pj.IsMapAfterCharge)
  5593. {
  5594. var mappingSlot = GetMappingSlot(ModuleName.PM1);
  5595. if (_waferRobot.Map(ModuleName.PM1, mappingSlot.Length == 0 ? 0 : Regex.Matches(mappingSlot, "1").Count, mappingSlot, true, false, Hand.Blade1))
  5596. {
  5597. pj.IsMapAfterCharge = true;
  5598. return;
  5599. }
  5600. }
  5601. if (!pj.RobotHomed)
  5602. {
  5603. (Singleton<EquipmentManager>.Instance.Modules[ModuleName.WaferRobot] as WaferRobotModule).Home(out _);
  5604. pj.RobotHomed = true;
  5605. }
  5606. pj.ProcessingState = EnumProcessingState.Processing;
  5607. var _boatslotmap = GetBoatSlotMap();
  5608. _faCallback.EndCharge(pj, _boatslotmap);
  5609. pmModule?.SetN2PurgeLAO2CheckFirstEnable(false);
  5610. if (pm.Process((string)pj.ProcessRecipe, false, true))
  5611. return;
  5612. }
  5613. //工艺结束
  5614. if (isProcessed)
  5615. {
  5616. if (pj.ProcessingState == EnumProcessingState.Processing)
  5617. {
  5618. Singleton<EquipmentManager>.Instance.EndPj();
  5619. if (pj.CoolTimeSec > 0)
  5620. {
  5621. _coolTimer.Restart();
  5622. pj.ProcessingState = EnumProcessingState.CoolingBeforeDischarge;
  5623. }
  5624. else
  5625. {
  5626. _coolTimer.Restart();
  5627. pj.ProcessingState = EnumProcessingState.CoolingBeforeDischarge;
  5628. }
  5629. LOG.Write($"Cooling start {pj.CoolTimeSec}");
  5630. }
  5631. if (pj.ProcessingState == EnumProcessingState.CoolingBeforeDischarge && (_coolTimer.ElapsedMilliseconds > pj.CoolTimeSec * 1000 || _isCoolingSkip))
  5632. {
  5633. _isCoolingSkip = false;
  5634. var boatModule = Singleton<EquipmentManager>.Instance.Modules[ModuleName.Boat] as BoatModule;
  5635. if (boatModule != null && !boatModule.IsBoatElevatorAtHomePosition && boatModule.ZAxisDevice.IsReady)
  5636. {
  5637. boatModule.ZAxisDevice.SetServoMoveTo("HomePosition", out _);
  5638. }
  5639. if (boatModule != null && !boatModule.IsBoatRotationAtHomePosition && boatModule.RAxisDevice.IsReady)
  5640. {
  5641. boatModule.RAxisDevice.ServoStop();
  5642. boatModule.RAxisDevice.SetServoHome();
  5643. }
  5644. if (boatModule != null && boatModule.IsBoatElevatorAtHomePosition && boatModule.IsBoatRotationAtHomePosition)
  5645. {
  5646. if (SC.GetValue<bool>("System.IsEnableBoatDischargeMapping") && !pj.IsMapBeforeDischarge)
  5647. {
  5648. var mappingSlot = GetMappingSlot(ModuleName.PM1);
  5649. if (_waferRobot.Map(ModuleName.PM1, mappingSlot.Length == 0 ? 0 : Regex.Matches(mappingSlot, "1").Count, mappingSlot, true, false, Hand.Blade1))
  5650. {
  5651. pj.IsMapBeforeDischarge = true;
  5652. return;
  5653. }
  5654. }
  5655. _coolTimer.Stop();
  5656. AdjustDischargeSlots();
  5657. pj.ProcessingState = EnumProcessingState.Discharging;
  5658. var _boatslotmap = GetBoatSlotMap();
  5659. _faCallback.StartDischarge(pj, _boatslotmap);
  5660. LOG.Write($"Cooling completed {pj.CoolTimeSec}");
  5661. if (pj.IsN2PurgeMode)
  5662. {
  5663. //pmModule?.SetN2PurgeProcess(true);
  5664. //if (SC.ContainsItem("PM1.N2Purge.WaferCharge.TransferRoomN2PurgeEnable") && SC.GetValue<bool>("PM1.N2Purge.WaferCharge.TransferRoomN2PurgeEnable"))
  5665. // pmModule?.SetN2PurgeLAO2CheckFirstEnable(true);
  5666. if (SC.ContainsItem("PM1.N2Purge.WaferCharge.TransferRoomN2PurgeEnable") && SC.GetValue<bool>("PM1.N2Purge.WaferCharge.TransferRoomN2PurgeEnable"))
  5667. {
  5668. pmModule?.SetN2PurgeProcess(true);
  5669. pmModule?.SetN2PurgeLAO2CheckFirstEnable(true);
  5670. }
  5671. if (SC.ContainsItem("PM1.RecipeRelevancyN2Purge") && SC.GetValue<bool>("PM1.RecipeRelevancyN2Purge") && SC.ContainsItem("PM1.SelectN2PurgeMode"))
  5672. {
  5673. var setValue = pmModule.GetN2PurgeModeEnumByStr(pj.N2PurgeModeStr);
  5674. SC.SetItemValueFromString("PM1.SelectN2PurgeMode", setValue);
  5675. pmModule.RestAllN2PrugeRD();
  5676. }
  5677. }
  5678. }
  5679. }
  5680. }
  5681. }
  5682. }
  5683. #endregion Module task
  5684. #region Logic Check
  5685. private bool CheckChargeFinished(ProcessJobInfo pj, ModuleName module, bool isOnlyCharge = false)
  5686. {
  5687. var wafers = WaferManager.Instance.GetWafers(module);
  5688. if (pj == null || wafers == null)
  5689. return false;
  5690. if (WaferManager.Instance.CheckHasWafer(ModuleName.WaferRobot, 0) ||
  5691. WaferManager.Instance.CheckHasWafer(ModuleName.WaferRobot, 1) ||
  5692. WaferManager.Instance.CheckHasWafer(ModuleName.WaferRobot, 2) ||
  5693. WaferManager.Instance.CheckHasWafer(ModuleName.WaferRobot, 3) ||
  5694. WaferManager.Instance.CheckHasWafer(ModuleName.WaferRobot, 4))
  5695. return false;
  5696. int edCount = 0;
  5697. int sdCount = 0;
  5698. int m1Count = 0;
  5699. int m2Count = 0;
  5700. int pCount = 0;
  5701. int expertCount = 0;
  5702. foreach (var wafer in wafers)
  5703. {
  5704. if (wafer == null || wafer.IsEmpty)
  5705. continue;
  5706. switch (wafer.WaferType)
  5707. {
  5708. case WaferType.M1:
  5709. m1Count++;
  5710. break;
  5711. case WaferType.M2:
  5712. m2Count++;
  5713. break;
  5714. case WaferType.ED:
  5715. edCount++;
  5716. break;
  5717. case WaferType.SD:
  5718. sdCount++;
  5719. break;
  5720. case WaferType.P:
  5721. pCount++;
  5722. break;
  5723. case WaferType.XD:
  5724. case WaferType.T:
  5725. expertCount++;
  5726. break;
  5727. }
  5728. }
  5729. if (expertCount > 0)
  5730. {
  5731. if (pj.XdSlots == null || pj.TSlots == null)
  5732. return false;
  5733. return expertCount == pj.XdSlots.Count + pj.TSlots.Count;
  5734. }
  5735. if (pj.ExtraDummySlots != null && pj.ExtraDummySlots.Count != edCount && pj.ExtraDummySlots.Count > 0)
  5736. return false;
  5737. if (pj.SideDummySlots != null && pj.SideDummySlots.Count != sdCount && pj.SideDummySlots.Count > 0)
  5738. return false;
  5739. if (pj.Monitor1Slots != null && pj.Monitor1Slots.Count != m1Count)
  5740. return false;
  5741. if (pj.Monitor2Slots != null && pj.Monitor2Slots.Count != m2Count)
  5742. return false;
  5743. foreach (var s in pj.Stockers)
  5744. {
  5745. var carrier = CarrierManager.Instance.GetCarrier(s.Item1, 0);
  5746. if (carrier == null || carrier.CarrierType != CarrierType.P || carrier.IsEmpty)
  5747. continue;
  5748. var carrierWafers = WaferManager.Instance.GetWafers(ModuleHelper.Converter(s.Item1)).ToList();
  5749. if (carrierWafers == null || (carrierWafers.Any(x => !x.IsEmpty) && pj.ProductSlots.Count > pCount))
  5750. return false;
  5751. }
  5752. var carrierRobot = CarrierManager.Instance.GetCarrier(_carrierRobot.Module, 0);
  5753. if (carrierRobot != null && !carrierRobot.IsEmpty && isOnlyCharge)
  5754. return false;
  5755. if (carrierRobot != null && !carrierRobot.IsEmpty &&
  5756. carrierRobot.CarrierType == CarrierType.P &&
  5757. pj.Stockers.Any(x => ModuleHelper.Converter(x.Item1) == carrierRobot.InternalModuleName))
  5758. {
  5759. var carrierWafers = WaferManager.Instance.GetWafers(_carrierRobot.Module).ToList();
  5760. if (carrierWafers == null || carrierWafers.Any(x => !x.IsEmpty))
  5761. return false;
  5762. }
  5763. foreach (var fims in _lstFIMSs)
  5764. {
  5765. var carrier = CarrierManager.Instance.GetCarrier(fims.Module, 0);
  5766. if (carrier != null && !carrier.IsEmpty && isOnlyCharge)
  5767. return false;
  5768. if (carrier != null && !carrier.IsEmpty &&
  5769. carrier.CarrierType == CarrierType.P &&
  5770. pj.Stockers.Any(x => ModuleHelper.Converter(x.Item1) == carrier.InternalModuleName))
  5771. {
  5772. var carrierWafers = WaferManager.Instance.GetWafers(fims.Module).ToList();
  5773. if (carrierWafers == null || carrierWafers.Any(x => !x.IsEmpty))
  5774. return false;
  5775. }
  5776. }
  5777. return true;
  5778. }
  5779. private bool CheckProcessJobReady(ProcessJobInfo pj)
  5780. {
  5781. bool isReady = true;
  5782. if (pj == null)
  5783. return false;
  5784. //Boat Ready检查
  5785. var pmModule = Singleton<EquipmentManager>.Instance.Modules[ModuleName.PM1] as PMModule;
  5786. if (pmModule == null || !pmModule.CheckReadyForTransfer(_waferRobot.Module, Hand.Blade1, 0, EnumTransferType.Place, out string reason))
  5787. return false;
  5788. int pCount = 0;
  5789. int m1Count = 0;
  5790. int m2Count = 0;
  5791. foreach (var s in pj.Stockers)
  5792. {
  5793. var type = SC.GetStringValue($"System.Stocker.{s.Item1}WaferType");
  5794. if (!string.IsNullOrEmpty(type) && (type.Contains("P") || type.Contains("M") || type.Contains("None")))
  5795. {
  5796. ModuleName module = ModuleHelper.Converter(s.Item1);
  5797. if (!CarrierManager.Instance.CheckHasCarrier(module, 0))
  5798. continue;
  5799. var wafers = WaferManager.Instance.GetWafers(module).ToList();
  5800. if (wafers == null)
  5801. continue;
  5802. foreach (var wafer in wafers)
  5803. {
  5804. if (wafer == null || wafer.ProcessState != EnumWaferProcessStatus.Idle)
  5805. continue;
  5806. if (wafer.WaferType == WaferType.M1)
  5807. m1Count++;
  5808. if (wafer.WaferType == WaferType.M2)
  5809. m2Count++;
  5810. if (wafer.WaferType == WaferType.P)
  5811. pCount++;
  5812. }
  5813. }
  5814. }
  5815. var a = pj.Monitor1Slots != null && m1Count < pj.Monitor1Slots.Count;
  5816. var b = pj.Monitor2Slots != null && m2Count < pj.Monitor2Slots.Count;
  5817. var c = pj.ProductSlots != null && pCount < pj.ProductSlots.Count;
  5818. if (a || b || c)
  5819. return false;
  5820. return isReady;
  5821. }
  5822. protected bool CheckAllWaferReturned(ProcessJobInfo pj, bool checkAllProcessed)
  5823. {
  5824. if (pj.SlotWafers == null || pj.SlotWafers.Count == 0 ||
  5825. pj.SlotWafers.Count != (pj.SideDummySlots != null ? pj.SideDummySlots.Count : 0) +
  5826. (pj.ExtraDummySlots != null ? pj.ExtraDummySlots.Count : 0) +
  5827. (pj.ProductSlots != null ? pj.ProductSlots.Count : 0) +
  5828. (pj.Monitor1Slots != null ? pj.Monitor1Slots.Count : 0) +
  5829. (pj.Monitor2Slots != null ? pj.Monitor2Slots.Count : 0))
  5830. return false;
  5831. var boatWafers = WaferManager.Instance.GetWafers(ModuleName.PM1).ToList();
  5832. for (int i = 0; i < pj.SlotWafers.Count; ++i)
  5833. {
  5834. if (!CarrierManager.Instance.CheckHasCarrier(pj.SlotWafers[i].Item1, 0))
  5835. {
  5836. var isFOUPUnloaded = true;
  5837. if (CarrierManager.Instance.CheckHasCarrier(_carrierRobot.Module, 0) && CarrierManager.Instance.GetCarrier(_carrierRobot.Module, 0).InternalModuleName == pj.SlotWafers[i].Item1)
  5838. {
  5839. isFOUPUnloaded = false;
  5840. }
  5841. foreach (var st in _lstFIMSs)
  5842. {
  5843. if (!st.IsOnline || !CarrierManager.Instance.CheckHasCarrier(st.Module, 0))
  5844. continue;
  5845. if (CarrierManager.Instance.GetCarrier(st.Module, 0).InternalModuleName == pj.SlotWafers[i].Item1)
  5846. {
  5847. isFOUPUnloaded = false;
  5848. break;
  5849. }
  5850. }
  5851. if (isFOUPUnloaded)
  5852. continue;//已经unload
  5853. }
  5854. WaferInfo wafer = WaferManager.Instance.GetWafer(pj.SlotWafers[i].Item1, pj.SlotWafers[i].Item2);
  5855. if (wafer.IsEmpty)
  5856. {
  5857. if (SC.GetValue<bool>("System.IsEnableDummyWaferDischarge"))
  5858. return false;
  5859. else
  5860. {
  5861. if (boatWafers.Any(x => x.OriginStation == (int)pj.SlotWafers[i].Item1 && x.OriginSlot == pj.SlotWafers[i].Item2 &&
  5862. !x.IsEmpty &&
  5863. (x.WaferType == WaferType.SD || x.WaferType == WaferType.ED)))
  5864. continue;
  5865. else
  5866. return false;
  5867. }
  5868. }
  5869. if (checkAllProcessed && CheckWaferNeedProcess(pj.SlotWafers[i].Item1, pj.SlotWafers[i].Item2))
  5870. return false;
  5871. }
  5872. if (checkAllProcessed)
  5873. {
  5874. if (boatWafers != null)
  5875. {
  5876. for (int i = 0; i < boatWafers.Count; i++)
  5877. {
  5878. var wafer = boatWafers[i];
  5879. if (wafer.IsEmpty)
  5880. continue;
  5881. if (wafer.ProcessState != EnumWaferProcessStatus.Completed && wafer.ProcessState != EnumWaferProcessStatus.Failed)
  5882. {
  5883. return false;
  5884. }
  5885. }
  5886. }
  5887. }
  5888. return true;
  5889. }
  5890. public bool CheckWaferNeedProcess(ModuleName waferModule, int waferSlot, ModuleName processIn = ModuleName.System)
  5891. {
  5892. WaferInfo wafer = WaferManager.Instance.GetWafer(waferModule, waferSlot);
  5893. if (wafer.IsEmpty)
  5894. return false;
  5895. if (wafer.ProcessJob == null || wafer.ProcessJob.Sequence == null)
  5896. return false;
  5897. if (wafer.NextSequenceStep >= wafer.ProcessJob.Sequence.Steps.Count)
  5898. return false;
  5899. for (int i = wafer.NextSequenceStep; i < wafer.ProcessJob.Sequence.Steps.Count; i++)
  5900. {
  5901. if (wafer.ProcessJob.Sequence.Steps[i].StepModules
  5902. .Contains(ModuleName.PM1) || wafer.ProcessJob.Sequence.Steps[i].StepModules
  5903. .Contains(ModuleName.PM2))
  5904. {
  5905. if (processIn == ModuleName.System)
  5906. return true;
  5907. //if (_mapLpPm[(ModuleName)wafer.OriginStation] != processIn)
  5908. // return false;
  5909. if (wafer.ProcessJob.Sequence.Steps[i].StepModules
  5910. .Contains(processIn))
  5911. return true;
  5912. }
  5913. }
  5914. return false;
  5915. }
  5916. private List<Tuple<WaferType, int>> GetWaferTypeSlots()
  5917. {
  5918. List<Tuple<WaferType, int>> slots = new List<Tuple<WaferType, int>>();
  5919. var pj = _lstProcessJobs.FirstOrDefault(x => x.State == EnumProcessJobState.Processing);
  5920. if (pj == null)
  5921. return slots;
  5922. if (pj.SideDummySlots != null && pj.SideDummySlots.Count > 0)
  5923. {
  5924. pj.SideDummySlots.ForEach(x => slots.Add(Tuple.Create(WaferType.SD, x)));
  5925. }
  5926. if (pj.ExtraDummySlots != null && pj.ExtraDummySlots.Count > 0)
  5927. {
  5928. pj.ExtraDummySlots.ForEach(x => slots.Add(Tuple.Create(WaferType.ED, x)));
  5929. }
  5930. if (pj.ProductSlots != null && pj.ProductSlots.Count > 0)
  5931. {
  5932. pj.ProductSlots.ForEach(x => slots.Add(Tuple.Create(WaferType.P, x)));
  5933. }
  5934. if (pj.Monitor1Slots != null && pj.Monitor1Slots.Count > 0)
  5935. {
  5936. pj.Monitor1Slots.ForEach(x => slots.Add(Tuple.Create(WaferType.M1, x)));
  5937. }
  5938. if (pj.Monitor2Slots != null && pj.Monitor2Slots.Count > 0)
  5939. {
  5940. pj.Monitor2Slots.ForEach(x => slots.Add(Tuple.Create(WaferType.M2, x)));
  5941. }
  5942. return slots.OrderByDescending(x => x.Item2).ToList();
  5943. }
  5944. private string GetMappingSlot(ModuleName module)
  5945. {
  5946. string mappingSlot = string.Empty;
  5947. var wafers = WaferManager.Instance.GetWafers(module);
  5948. if (wafers != null)
  5949. {
  5950. for (int i = 0; i < wafers.Length; i++)
  5951. {
  5952. if (!wafers[i].IsEmpty)
  5953. mappingSlot += "1";
  5954. else
  5955. mappingSlot += "0";
  5956. }
  5957. }
  5958. return mappingSlot;
  5959. }
  5960. private void AdjustDischargeSlots()
  5961. {
  5962. _sideDummySlots.Clear();
  5963. _extraDummySlots.Clear();
  5964. _productSlots.Clear();
  5965. _monitor1Slots.Clear();
  5966. _monitor2Slots.Clear();
  5967. for (int i = 0; i < SC.GetValue<int>($"Boat.SlotCount"); i++)
  5968. {
  5969. if (!WaferManager.Instance.CheckHasWafer(_pm1.Module, i))
  5970. continue;
  5971. var wafer = WaferManager.Instance.GetWafer(_pm1.Module, i);
  5972. if (wafer == null || wafer.IsEmpty)
  5973. continue;
  5974. switch (wafer.WaferType)
  5975. {
  5976. case WaferType.SD:
  5977. _sideDummySlots.Add(i);
  5978. break;
  5979. case WaferType.ED:
  5980. _extraDummySlots.Add(i);
  5981. break;
  5982. case WaferType.P:
  5983. _productSlots.Add(i);
  5984. break;
  5985. case WaferType.M1:
  5986. _monitor1Slots.Add(i);
  5987. break;
  5988. case WaferType.M2:
  5989. _monitor2Slots.Add(i);
  5990. break;
  5991. }
  5992. }
  5993. if (SC.GetStringValue("System.ChargingOrderToBoat") == "FromTopToBottom")
  5994. {
  5995. _productSlots.Sort((x, y) => x.CompareTo(y));//升序
  5996. _monitor1Slots.Sort((x, y) => x.CompareTo(y));//升序
  5997. _monitor2Slots.Sort((x, y) => x.CompareTo(y));//升序
  5998. _extraDummySlots.Sort((x, y) => x.CompareTo(y));//升序
  5999. _sideDummySlots.Sort((x, y) => x.CompareTo(y));//升序
  6000. }
  6001. else
  6002. {
  6003. _productSlots.Sort((x, y) => -x.CompareTo(y));//降序
  6004. _monitor1Slots.Sort((x, y) => -x.CompareTo(y));//降序
  6005. _monitor2Slots.Sort((x, y) => -x.CompareTo(y));//降序
  6006. _extraDummySlots.Sort((x, y) => -x.CompareTo(y));//降序
  6007. _sideDummySlots.Sort((x, y) => -x.CompareTo(y));//降序
  6008. }
  6009. }
  6010. public void CreatePj(string processName)
  6011. {
  6012. _dbCallback.PjCreated(processName);
  6013. }
  6014. public void StartPj()
  6015. {
  6016. _dbCallback.PjStart();
  6017. }
  6018. public void EndPj(string endStatus)
  6019. {
  6020. _dbCallback.PjUpdated();
  6021. _dbCallback.PjFinished(endStatus);
  6022. }
  6023. public void PjUpdated()
  6024. {
  6025. _dbCallback.PjUpdated();
  6026. }
  6027. public void PjFinished(string endStatus)
  6028. {
  6029. _dbCallback.PjFinished(endStatus);
  6030. }
  6031. #endregion Logic Check
  6032. public void CoolingSkip()
  6033. {
  6034. _isCoolingSkip = true;
  6035. }
  6036. public string GetFirstPJId()
  6037. {
  6038. return _dbCallback.GetFirstPJId();
  6039. }
  6040. public string GetFirstPJStatus()
  6041. {
  6042. if (_lstProcessJobs == null || _lstProcessJobs.Count == 0)
  6043. {
  6044. return "";
  6045. }
  6046. return _lstProcessJobs[0].ProcessingState.ToString();
  6047. }
  6048. #region FA
  6049. public bool IsCJExisted(string cjid)
  6050. {
  6051. return _lstControlJobs.Exists(x => x.Name == cjid);
  6052. }
  6053. public bool IsCJExcuting(string cjid)
  6054. {
  6055. return _lstControlJobs.Exists(x => x.Name == cjid && x.State == EnumControlJobState.Executing);
  6056. }
  6057. public bool CreateControlJob(string jobId, List<string> pjIDs, out ControlJobInfo cj)
  6058. {
  6059. cj = null;
  6060. if (_lstControlJobs.Exists(x => x.Name == jobId))
  6061. {
  6062. //EV.PostWarningLog(LogSource, $"{jobId} is already created");
  6063. return false;
  6064. }
  6065. cj = new ControlJobInfo();
  6066. cj.Name = jobId;
  6067. //cj.Module = module;
  6068. cj.LotName = jobId;
  6069. cj.LotInnerId = Guid.NewGuid();
  6070. cj.LotWafers = new List<WaferInfo>();
  6071. cj.CreateTime = DateTime.Now;
  6072. cj.SetState(EnumControlJobState.Queued);
  6073. foreach (var pjName in pjIDs)
  6074. {
  6075. var pj = _lstProcessJobs.FirstOrDefault(x => x.Name == pjName);
  6076. if (pj == null)
  6077. {
  6078. LOG.Info($"not find {pjName} while create control job");
  6079. continue;
  6080. }
  6081. pj.ControlJobName = jobId;
  6082. cj.ProcessJobNameList.Add(pj.Name);
  6083. }
  6084. if (!_lstControlJobs.Contains(cj))
  6085. _lstControlJobs.Add(cj);
  6086. _faCallback.JobCreated(cj);
  6087. //if ((Singleton<EquipmentManager>.Instance.Modules[ModuleName.PM1] as PMModule).IsExcuteIdleRecipe)
  6088. // (Singleton<EquipmentManager>.Instance.Modules[ModuleName.PM1] as PMModule).EndIdleRecipe();
  6089. return true;
  6090. }
  6091. private bool CheckWaferStatus(List<Tuple<string, string>> useStockers, bool isNeedCheckMonitor, bool isNeedCheckP, out string reason)
  6092. {
  6093. reason = string.Empty;
  6094. if (SC.GetValue<bool>("System.IsCycleMode"))
  6095. {
  6096. foreach (var module in Singleton<EquipmentManager>.Instance.Modules.Keys)
  6097. {
  6098. if (!ModuleHelper.IsStocker(module) || !useStockers.Any(x => x.Item1 == module.ToString()))
  6099. continue;
  6100. var wafers = WaferManager.Instance.GetWafers(module);
  6101. if (wafers == null)
  6102. continue;
  6103. foreach (var wafer in wafers)
  6104. {
  6105. if (wafer.IsEmpty)
  6106. continue;
  6107. wafer.ProcessState = EnumWaferProcessStatus.Idle;
  6108. }
  6109. }
  6110. }
  6111. else
  6112. {
  6113. foreach (var module in Singleton<EquipmentManager>.Instance.Modules.Keys)
  6114. {
  6115. if (!ModuleHelper.IsStocker(module) || !useStockers.Any(x => x.Item1 == module.ToString()))
  6116. continue;
  6117. var wafers = WaferManager.Instance.GetWafers(module);
  6118. if (wafers == null)
  6119. continue;
  6120. if (SC.GetValue<bool>("System.EnableWarningFailedWafer"))
  6121. {
  6122. if (wafers.ToList().Any(x => x.ProcessState == EnumWaferProcessStatus.Failed))
  6123. {
  6124. reason = $"{module} has failed wafers.";
  6125. return false;
  6126. }
  6127. }
  6128. foreach (var wafer in wafers)
  6129. {
  6130. if (wafer.IsEmpty)
  6131. continue;
  6132. if (wafer.ProcessState != EnumWaferProcessStatus.Idle)
  6133. {
  6134. if (SC.GetValue<bool>("System.EnableWarningWaferProcessState"))
  6135. {
  6136. if (wafer.WaferType == WaferType.P && isNeedCheckP)
  6137. {
  6138. reason = $"{(ModuleName)wafer.OriginStation} {wafer.WaferType} wafer already completed process.";
  6139. return false;
  6140. }
  6141. if (isNeedCheckMonitor)
  6142. {
  6143. if (wafer.WaferType == WaferType.M)
  6144. {
  6145. reason = $"{(ModuleName)wafer.OriginStation} {wafer.WaferType} wafer already completed process.";
  6146. return false;
  6147. }
  6148. }
  6149. }
  6150. else
  6151. {
  6152. wafer.ProcessState = EnumWaferProcessStatus.Idle;
  6153. }
  6154. }
  6155. if (wafer.WaferType == WaferType.ED || wafer.WaferType == WaferType.SD)
  6156. wafer.ProcessState = EnumWaferProcessStatus.Idle;
  6157. }
  6158. }
  6159. }
  6160. return true;
  6161. }
  6162. public bool CreateProcessJob(out ProcessJobInfo pj, params object[] objs)
  6163. {
  6164. var param = (Dictionary<string, object>)objs[0];
  6165. pj = null;
  6166. foreach (var module in Singleton<EquipmentManager>.Instance.Modules.Keys)
  6167. {
  6168. var lpModule = Singleton<EquipmentManager>.Instance.Modules[module] as LoadPortModule;
  6169. if (lpModule != null)
  6170. {
  6171. if (lpModule.FsmState == (int)LoadPortModule.STATE.Init)
  6172. {
  6173. Singleton<EquipmentManager>.Instance.ChargeWaferJobStartFailedWarning.Set($"{module} is init state");
  6174. return false;
  6175. }
  6176. if (lpModule.FsmState == (int)LoadPortModule.STATE.Error)
  6177. {
  6178. Singleton<EquipmentManager>.Instance.ChargeWaferJobStartFailedWarning.Set($"{module} is error state");
  6179. return false;
  6180. }
  6181. }
  6182. var fimsModule = Singleton<EquipmentManager>.Instance.Modules[module] as FIMSModule;
  6183. if (fimsModule != null)
  6184. {
  6185. if (fimsModule.FsmState == (int)FIMSModule.STATE.Init)
  6186. {
  6187. Singleton<EquipmentManager>.Instance.ChargeWaferJobStartFailedWarning.Set($"{module} is init state");
  6188. return false;
  6189. }
  6190. if (fimsModule.FsmState == (int)FIMSModule.STATE.Error)
  6191. {
  6192. Singleton<EquipmentManager>.Instance.ChargeWaferJobStartFailedWarning.Set($"{module} is error state");
  6193. return false;
  6194. }
  6195. }
  6196. var boatModule = Singleton<EquipmentManager>.Instance.Modules[module] as BoatModule;
  6197. if (boatModule != null)
  6198. {
  6199. if (boatModule.FsmState == (int)BoatModule.STATE.Init)
  6200. {
  6201. Singleton<EquipmentManager>.Instance.ChargeWaferJobStartFailedWarning.Set($"{module} is init state");
  6202. return false;
  6203. }
  6204. if (boatModule.FsmState == (int)BoatModule.STATE.Error)
  6205. {
  6206. Singleton<EquipmentManager>.Instance.ChargeWaferJobStartFailedWarning.Set($"{module} is error state");
  6207. return false;
  6208. }
  6209. }
  6210. var carrierRobotModule = Singleton<EquipmentManager>.Instance.Modules[module] as CarrierRobotModule;
  6211. if (carrierRobotModule != null)
  6212. {
  6213. if (carrierRobotModule.FsmState == (int)CarrierRobotModule.STATE.Init)
  6214. {
  6215. Singleton<EquipmentManager>.Instance.ChargeWaferJobStartFailedWarning.Set($"{module} is init state");
  6216. return false;
  6217. }
  6218. if (carrierRobotModule.FsmState == (int)CarrierRobotModule.STATE.Error)
  6219. {
  6220. Singleton<EquipmentManager>.Instance.ChargeWaferJobStartFailedWarning.Set($"{module} is error state");
  6221. return false;
  6222. }
  6223. }
  6224. var waferRobotModule = Singleton<EquipmentManager>.Instance.Modules[module] as WaferRobotModule;
  6225. if (waferRobotModule != null)
  6226. {
  6227. if (waferRobotModule.FsmState == (int)WaferRobotModule.STATE.Init)
  6228. {
  6229. Singleton<EquipmentManager>.Instance.ChargeWaferJobStartFailedWarning.Set($"{module} is init state");
  6230. return false;
  6231. }
  6232. if (waferRobotModule.FsmState == (int)WaferRobotModule.STATE.Error)
  6233. {
  6234. Singleton<EquipmentManager>.Instance.ChargeWaferJobStartFailedWarning.Set($"{module} is error state");
  6235. return false;
  6236. }
  6237. }
  6238. var pmModule = Singleton<EquipmentManager>.Instance.Modules[module] as PMModule;
  6239. if (pmModule != null)
  6240. {
  6241. if (pmModule.FsmState == (int)PMModule.STATE.Init)
  6242. {
  6243. Singleton<EquipmentManager>.Instance.ChargeWaferJobStartFailedWarning.Set($"{module} is init state");
  6244. return false;
  6245. }
  6246. if (pmModule.FsmState == (int)PMModule.STATE.Error)
  6247. {
  6248. Singleton<EquipmentManager>.Instance.ChargeWaferJobStartFailedWarning.Set($"{module} is error state");
  6249. return false;
  6250. }
  6251. }
  6252. }
  6253. if (!Singleton<EquipmentManager>.Instance.GetJobRecipeInfor((string)param["JobRecipe"], out string processRecipe, out string layoutRecipe, out int coolTime, out string reason))
  6254. {
  6255. Singleton<EquipmentManager>.Instance.ChargeWaferJobStartFailedWarning.Set(reason);
  6256. return false;
  6257. }
  6258. if (string.IsNullOrEmpty(layoutRecipe))
  6259. {
  6260. Singleton<EquipmentManager>.Instance.ChargeWaferJobStartFailedWarning.Set("Parameter not valid, Layout Recipe is null");
  6261. return false;
  6262. }
  6263. var path = $"{PathManager.GetRecipeDir()}\\{SC.GetStringValue("System.Recipe.SupportedChamberType")}\\Layout\\{layoutRecipe}.rcp";
  6264. if (!File.Exists(path))
  6265. {
  6266. Singleton<EquipmentManager>.Instance.ChargeWaferJobStartFailedWarning.Set($"Layout \"{layoutRecipe}\" not exist.");
  6267. return false;
  6268. }
  6269. path = $"{PathManager.GetRecipeDir()}\\{SC.GetStringValue("System.Recipe.SupportedChamberType")}\\Process\\{processRecipe}.rcp";
  6270. if (!File.Exists(path))
  6271. {
  6272. Singleton<EquipmentManager>.Instance.ChargeWaferJobStartFailedWarning.Set($"Process recipe \"{processRecipe}\" not exist.");
  6273. return false;
  6274. }
  6275. if (!RecipeParser.Parse(processRecipe, ModuleName.PM1.ToString(), out var recipeHead, out var recipeSteps, out reason, "Process"))
  6276. {
  6277. Singleton<EquipmentManager>.Instance.ChargeWaferJobStartFailedWarning.Set($"Load process recipe {processRecipe} failed, {reason}");
  6278. return false;
  6279. }
  6280. List<Tuple<string, string, List<int>>> useStockers = new List<Tuple<string, string, List<int>>>();
  6281. if (RecipeParser.LayoutRecipeParse(layoutRecipe, ModuleName.PM1.ToString(), out RecipeLayoutEntityNormal layoutRecipeDataNormal, out RecipeLayoutEntityExpert layoutRecipeDataExpert, out reason))
  6282. {
  6283. if (param.ContainsKey("CarrierPara"))
  6284. {
  6285. //Stocker1,P_00000036,25,Exist,1111111111111111111111111,LP1;Stocker2,P_00000037,25,Exist,1111111111111111111111111,LP2
  6286. var paras = param["CarrierPara"].ToString().Split(';');
  6287. if (paras != null && paras.Length > 0)
  6288. {
  6289. foreach (var item in paras)
  6290. {
  6291. //Stocker13,,21/22/23/24/25"
  6292. var arry = item.Split(',');
  6293. if (arry != null && arry.Length >= 2)
  6294. {
  6295. var pStocker = GetModule(arry[0]) as SchedulerStocker;
  6296. if (pStocker != null && (SC.GetStringValue($"System.Stocker.{arry[0]}WaferType").Contains("P") || SC.GetStringValue($"System.Stocker.{arry[0]}WaferType").Contains("None")))
  6297. {
  6298. var slots = new List<int>();
  6299. if (arry.Length >= 3)
  6300. {
  6301. var slotParas = arry[2].Split('/').ToList();
  6302. if (slotParas != null && slotParas.Count > 0)
  6303. {
  6304. foreach (var slotPara in slotParas)
  6305. {
  6306. var ret = int.TryParse(slotPara, out int slot);
  6307. if (ret && slot - 1 >= 0 && !slots.Any(x => x == slot - 1))
  6308. {
  6309. if (_lstProcessJobs.Any())
  6310. {
  6311. foreach (var job in _lstProcessJobs)
  6312. {
  6313. if (job.Stockers.Any(x => x.Item1 == arry[0] && x.Item3.Contains(slot - 1)))
  6314. {
  6315. Singleton<EquipmentManager>.Instance.ChargeWaferJobStartFailedWarning.Set($"Create job failed, already contains {arry[0]}.{slot} in previous process job");
  6316. return false;
  6317. }
  6318. }
  6319. }
  6320. slots.Add(slot - 1);
  6321. }
  6322. }
  6323. }
  6324. }
  6325. useStockers.Add(Tuple.Create(arry[0], arry[1], slots));
  6326. }
  6327. }
  6328. }
  6329. }
  6330. }
  6331. if (param.ContainsKey("mCarrierPara"))
  6332. {
  6333. //Stocker14,P_00000014;Stocker15,P_00000015
  6334. var paras = param["mCarrierPara"].ToString().Split(';');
  6335. if (paras != null && paras.Length > 0)
  6336. {
  6337. if (!string.IsNullOrEmpty(paras[0]))
  6338. {
  6339. foreach (var item in paras)
  6340. {
  6341. var arry = item.Split(',');
  6342. if (arry != null && arry.Length >= 2)
  6343. {
  6344. var mStocker = GetModule(arry[0]) as SchedulerStocker;
  6345. if (mStocker != null && SC.GetStringValue($"System.Stocker.{arry[0]}WaferType").Contains("M"))
  6346. {
  6347. var slots = new List<int>();
  6348. if (arry.Length >= 3)
  6349. {
  6350. var slotParas = arry[2].Split('/').ToList();
  6351. if (slotParas != null && slotParas.Count > 0)
  6352. {
  6353. foreach (var slotPara in slotParas)
  6354. {
  6355. var ret = int.TryParse(slotPara, out int slot);
  6356. if (ret && slot - 1 >= 0 && !slots.Any(x => x == slot - 1))
  6357. {
  6358. if (_lstProcessJobs.Any())
  6359. {
  6360. foreach (var job in _lstProcessJobs)
  6361. {
  6362. if (job.Stockers.Any(x => x.Item1 == arry[0] && x.Item3.Contains(slot - 1)))
  6363. {
  6364. Singleton<EquipmentManager>.Instance.ChargeWaferJobStartFailedWarning.Set($"Create job failed, already contains {arry[0]}.{slot} in previous process job");
  6365. return false;
  6366. }
  6367. }
  6368. }
  6369. slots.Add(slot - 1);
  6370. }
  6371. }
  6372. }
  6373. }
  6374. useStockers.Add(Tuple.Create(arry[0], arry[1], slots));
  6375. }
  6376. }
  6377. }
  6378. }
  6379. }
  6380. }
  6381. if (param.ContainsKey("m1CarrierPara"))
  6382. {
  6383. //Stocker14,P_00000014;Stocker15,P_00000015
  6384. var paras = param["m1CarrierPara"].ToString().Split(';');
  6385. if (paras != null && paras.Length > 0)
  6386. {
  6387. if (!string.IsNullOrEmpty(paras[0]))
  6388. {
  6389. foreach (var item in paras)
  6390. {
  6391. var arry = item.Split(',');
  6392. if (arry != null && arry.Length >= 2)
  6393. {
  6394. var mStocker = GetModule(arry[0]) as SchedulerStocker;
  6395. if (mStocker != null && (SC.GetStringValue($"System.Stocker.{arry[0]}WaferType").Contains("M1") || SC.GetStringValue($"System.Stocker.{arry[0]}WaferType").Contains("None")))
  6396. {
  6397. var slots = new List<int>();
  6398. if (arry.Length >= 3)
  6399. {
  6400. var slotParas = arry[2].Split('/').ToList();
  6401. if (slotParas != null && slotParas.Count > 0)
  6402. {
  6403. foreach (var slotPara in slotParas)
  6404. {
  6405. var ret = int.TryParse(slotPara, out int slot);
  6406. if (ret && slot - 1 >= 0 && !slots.Any(x => x == slot - 1))
  6407. {
  6408. if (_lstProcessJobs.Any())
  6409. {
  6410. foreach (var job in _lstProcessJobs)
  6411. {
  6412. if (job.Stockers.Any(x => x.Item1 == arry[0] && x.Item3.Contains(slot - 1)))
  6413. {
  6414. Singleton<EquipmentManager>.Instance.ChargeWaferJobStartFailedWarning.Set($"Create job failed, already contains {arry[0]}.{slot} in previous process job");
  6415. return false;
  6416. }
  6417. }
  6418. }
  6419. slots.Add(slot - 1);
  6420. }
  6421. }
  6422. }
  6423. }
  6424. useStockers.Add(Tuple.Create(arry[0], arry[1], slots));
  6425. }
  6426. }
  6427. }
  6428. }
  6429. }
  6430. }
  6431. if (param.ContainsKey("m2CarrierPara"))
  6432. {
  6433. //Stocker14,P_00000014;Stocker15,P_00000015
  6434. var paras = param["m2CarrierPara"].ToString().Split(';');
  6435. if (paras != null && paras.Length > 0)
  6436. {
  6437. if (!string.IsNullOrEmpty(paras[0]))
  6438. {
  6439. foreach (var item in paras)
  6440. {
  6441. var arry = item.Split(',');
  6442. if (arry != null && arry.Length >= 2)
  6443. {
  6444. var mStocker = GetModule(arry[0]) as SchedulerStocker;
  6445. if (mStocker != null && (SC.GetStringValue($"System.Stocker.{arry[0]}WaferType").Contains("M2") || SC.GetStringValue($"System.Stocker.{arry[0]}WaferType").Contains("None")))
  6446. {
  6447. var slots = new List<int>();
  6448. if (arry.Length >= 3)
  6449. {
  6450. var slotParas = arry[2].Split('/').ToList();
  6451. if (slotParas != null && slotParas.Count > 0)
  6452. {
  6453. foreach (var slotPara in slotParas)
  6454. {
  6455. var ret = int.TryParse(slotPara, out int slot);
  6456. if (ret && slot - 1 >= 0 && !slots.Any(x => x == slot - 1))
  6457. {
  6458. if (_lstProcessJobs.Any())
  6459. {
  6460. foreach (var job in _lstProcessJobs)
  6461. {
  6462. if (job.Stockers.Any(x => x.Item1 == arry[0] && x.Item3.Contains(slot - 1)))
  6463. {
  6464. Singleton<EquipmentManager>.Instance.ChargeWaferJobStartFailedWarning.Set($"Create job failed, already contains {arry[0]}.{slot} in previous process job");
  6465. return false;
  6466. }
  6467. }
  6468. }
  6469. slots.Add(slot - 1);
  6470. }
  6471. }
  6472. }
  6473. }
  6474. useStockers.Add(Tuple.Create(arry[0], arry[1], slots));
  6475. }
  6476. }
  6477. }
  6478. }
  6479. }
  6480. }
  6481. }
  6482. if (Singleton<FAJobController>.Instance.FaControlState != FAControlState.OnlineRemote.ToString())
  6483. useStockers.Sort(compare);
  6484. foreach (var s in _lstSideDummyStocker)
  6485. {
  6486. if (CarrierManager.Instance.CheckHasCarrier(s.Module, 0) && CarrierManager.Instance.GetCarrier(s.Module, 0).CarrierType == CarrierType.SD)
  6487. useStockers.Add(Tuple.Create(s.Module.ToString(), CarrierManager.Instance.GetCarrier(s.Module, 0).CarrierId, new List<int>()));
  6488. else
  6489. {
  6490. bool onRobot = false;
  6491. if (CarrierManager.Instance.CheckHasCarrier(ModuleName.CarrierRobot, 0))
  6492. {
  6493. var carrier = CarrierManager.Instance.GetCarrier(ModuleName.CarrierRobot, 0);
  6494. if (carrier.CarrierType == CarrierType.SD &&
  6495. carrier.InternalModuleName == s.Module)
  6496. {
  6497. useStockers.Add(Tuple.Create(s.Module.ToString(), carrier.CarrierId, new List<int>()));
  6498. onRobot = true;
  6499. }
  6500. }
  6501. if (!onRobot)
  6502. {
  6503. bool inFIMS = false;
  6504. foreach (var fims in _lstFIMSs)
  6505. {
  6506. if (!fims.IsOnline)
  6507. continue;
  6508. var carrier = CarrierManager.Instance.GetCarrier(fims.Module, 0);
  6509. if (!carrier.IsEmpty && carrier.CarrierType == CarrierType.SD &&
  6510. carrier.InternalModuleName == s.Module)
  6511. {
  6512. inFIMS = true;
  6513. useStockers.Add(Tuple.Create(s.Module.ToString(), carrier.CarrierId, new List<int>()));
  6514. }
  6515. }
  6516. if (!inFIMS && CarrierManager.Instance.GetLocationByInternalCarrierModuleName(s.Module, CarrierType.SD) != null)
  6517. useStockers.Add(Tuple.Create(s.Module.ToString(), "", new List<int>()));
  6518. }
  6519. }
  6520. }
  6521. foreach (var s in _lstExtraDummyStocker)
  6522. {
  6523. if (CarrierManager.Instance.CheckHasCarrier(s.Module, 0) && CarrierManager.Instance.GetCarrier(s.Module, 0).CarrierType == CarrierType.ED)
  6524. useStockers.Add(Tuple.Create(s.Module.ToString(), CarrierManager.Instance.GetCarrier(s.Module, 0).CarrierId, new List<int>()));
  6525. else
  6526. {
  6527. bool onRobot = false;
  6528. if (CarrierManager.Instance.CheckHasCarrier(ModuleName.CarrierRobot, 0))
  6529. {
  6530. var carrier = CarrierManager.Instance.GetCarrier(ModuleName.CarrierRobot, 0);
  6531. if (carrier.CarrierType == CarrierType.ED &&
  6532. carrier.InternalModuleName == s.Module)
  6533. {
  6534. useStockers.Add(Tuple.Create(s.Module.ToString(), carrier.CarrierId, new List<int>()));
  6535. onRobot = true;
  6536. }
  6537. }
  6538. if (!onRobot)
  6539. {
  6540. bool inFIMS = false;
  6541. foreach (var fims in _lstFIMSs)
  6542. {
  6543. if (!fims.IsOnline)
  6544. continue;
  6545. var carrier = CarrierManager.Instance.GetCarrier(fims.Module, 0);
  6546. if (!carrier.IsEmpty && carrier.CarrierType == CarrierType.ED &&
  6547. carrier.InternalModuleName == s.Module)
  6548. {
  6549. inFIMS = true;
  6550. useStockers.Add(Tuple.Create(s.Module.ToString(), carrier.CarrierId, new List<int>()));
  6551. }
  6552. }
  6553. if (!inFIMS && CarrierManager.Instance.GetLocationByInternalCarrierModuleName(s.Module, CarrierType.SD) != null)
  6554. useStockers.Add(Tuple.Create(s.Module.ToString(), "", new List<int>()));
  6555. }
  6556. }
  6557. }
  6558. var wafers = WaferManager.Instance.GetWafers(_pm1.Module);
  6559. if (wafers.Any(x => !x.IsEmpty) && !_lstProcessJobs.Any(x => x.State == EnumProcessJobState.Processing || x.State == EnumProcessJobState.Paused) &&
  6560. SC.GetValue<bool>("System.IsEnableDummyWaferDischarge"))
  6561. {
  6562. Singleton<EquipmentManager>.Instance.ChargeWaferJobStartFailedWarning.Set($"Already have wafer in boat");
  6563. return false;
  6564. }
  6565. if (wafers.Any(x => !x.IsEmpty && x.WaferType == WaferType.None))
  6566. {
  6567. Singleton<EquipmentManager>.Instance.ChargeWaferJobStartFailedWarning.Set($"Already have unknown wafer in boat");
  6568. return false;
  6569. }
  6570. var robotWafers = WaferManager.Instance.GetWafers(ModuleName.WaferRobot);
  6571. if (robotWafers.Any(x => !x.IsEmpty) && !_lstProcessJobs.Any(x => x.State == EnumProcessJobState.Processing || x.State == EnumProcessJobState.Paused))
  6572. {
  6573. Singleton<EquipmentManager>.Instance.ChargeWaferJobStartFailedWarning.Set($"Already have wafer in wafer robot");
  6574. return false;
  6575. }
  6576. if (robotWafers.Any(x => !x.IsEmpty && x.WaferType == WaferType.None))
  6577. {
  6578. Singleton<EquipmentManager>.Instance.ChargeWaferJobStartFailedWarning.Set($"Already have unknown wafer in wafer robot");
  6579. return false;
  6580. }
  6581. if (!CheckWaferStatus(useStockers, true, true, out reason))
  6582. {
  6583. Singleton<EquipmentManager>.Instance.ChargeWaferJobStartFailedWarning.Set(reason);
  6584. return false;
  6585. }
  6586. //if (!CheckWaferStatus(useStockers, out reason))
  6587. //{
  6588. // Singleton<EquipmentManager>.Instance.ChargeWaferJobStartFailedWarning.Set(reason);
  6589. // return false;
  6590. //}
  6591. foreach (var stocker in useStockers)
  6592. {
  6593. if (CarrierManager.Instance.CheckHasCarrier($"{stocker.Item1}", 0) &&
  6594. CarrierManager.Instance.GetCarrier($"{stocker.Item1}", 0).InternalModuleName.ToString() != stocker.Item1)
  6595. {
  6596. Singleton<EquipmentManager>.Instance.ChargeWaferJobStartFailedWarning.Set($"Carrier of {stocker.Item1} is not match stocker module name {CarrierManager.Instance.GetCarrier($"{stocker.Item1}", 0).InternalModuleName}");
  6597. return false;
  6598. }
  6599. }
  6600. bool isOnlyCharge = false;
  6601. if (param.ContainsKey("Charge"))
  6602. {
  6603. bool.TryParse(param["Charge"].ToString(), out isOnlyCharge);
  6604. }
  6605. var pjJobId = param["PJID"].ToString();
  6606. if (_lstProcessJobs.Exists(x => x.Name == pjJobId))
  6607. {
  6608. Singleton<EquipmentManager>.Instance.ChargeWaferJobStartFailedWarning.Set($"Already have the same pj id={pjJobId}");
  6609. return false;
  6610. }
  6611. pj = new ProcessJobInfo();
  6612. pj.Name = pjJobId;
  6613. pj.JobRecipe = param.ContainsKey("JobRecipe") ? param["JobRecipe"].ToString() : "";
  6614. pj.ProcessRecipe = processRecipe;
  6615. pj.LayoutRecipe = layoutRecipe;
  6616. pj.ControlJobName = "";
  6617. pj.SetState(EnumProcessJobState.Queued);
  6618. pj.CreateTime = DateTime.Now;
  6619. pj.Stockers = useStockers;
  6620. pj.SlotWafers = new List<Tuple<ModuleName, int>>();
  6621. pj.ProcessingState = EnumProcessingState.WaitingMaterial;
  6622. pj.CoolTimeSec = coolTime;
  6623. //pj.IsEmptyLayout = !layoutRecipeDataExpert.Items.Any(x => x != "----");
  6624. //pj.IsOnlyCharge = isOnlyCharge;
  6625. if (!CheckChargeRule(pj, out bool waferShort, false, true, out reason))
  6626. {
  6627. Singleton<EquipmentManager>.Instance.ChargeWaferJobStartFailedWarning.Set($"layout recipe {layoutRecipe} check charge rule failed, {reason}");
  6628. return false;
  6629. }
  6630. _lstProcessJobs.Add(pj);
  6631. //_faCallback.JobCreated(pj);
  6632. return true;
  6633. }
  6634. #endregion
  6635. private bool InvokeCoolingAbort(string arg1, object[] args)
  6636. {
  6637. var pj = _lstProcessJobs.FirstOrDefault(x => x.State == EnumProcessJobState.Processing && x.ProcessingState == EnumProcessingState.Cooling);
  6638. if (pj != null)
  6639. {
  6640. pj.CoolTimeSec = 0;
  6641. }
  6642. return true;
  6643. }
  6644. private bool InvokeCoolingModify(string arg1, object[] args)
  6645. {
  6646. var pj = _lstProcessJobs.FirstOrDefault(x => x.State == EnumProcessJobState.Processing && x.ProcessingState == EnumProcessingState.Cooling);
  6647. if (pj != null && args != null && args.Length > 0)
  6648. {
  6649. float.TryParse(args[0].ToString(), out float addCoolTime);
  6650. pj.CoolTimeSec = (int)addCoolTime;
  6651. }
  6652. return true;
  6653. }
  6654. private List<string> GetBoatSlotMap()
  6655. {
  6656. var wafers = WaferManager.Instance.GetWafers(ModuleName.PM1);
  6657. if (wafers != null)
  6658. {
  6659. List<string> slotMap = new List<string>();
  6660. foreach (var wafer in wafers)
  6661. {
  6662. if (wafer == null || wafer.IsEmpty)
  6663. {
  6664. slotMap.Add("");
  6665. continue;
  6666. }
  6667. if (wafer.WaferType == WaferType.ED || wafer.WaferType == WaferType.SD)
  6668. slotMap.Add("filler");
  6669. else
  6670. slotMap.Add(wafer.WaferID);
  6671. }
  6672. return slotMap;
  6673. }
  6674. return null;
  6675. }
  6676. }
  6677. }