PMN2Purge.cs 25 KB

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  1. using Aitex.Core.RT.DataCenter;
  2. using Aitex.Core.RT.Device;
  3. using Aitex.Core.RT.Device.Unit;
  4. using Aitex.Core.RT.Log;
  5. using Aitex.Core.RT.SCCore;
  6. using Aitex.Core.Util;
  7. using DocumentFormat.OpenXml.Packaging;
  8. using FurnaceRT.Devices;
  9. using FurnaceRT.Equipments.PMs.Devices;
  10. using FurnaceRT.Extraction;
  11. using MECF.Framework.Common.CommonData.SorterDefines;
  12. using MECF.Framework.Common.Equipment;
  13. using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.LoadPorts.TDK;
  14. using System;
  15. using System.Collections.Generic;
  16. using System.Diagnostics;
  17. namespace FurnaceRT.Equipments.PMs
  18. {
  19. /// <summary>
  20. /// 分布类 定义N2Purge的执行逻辑
  21. /// </summary>
  22. public partial class PMModule
  23. {
  24. private R_TRIG _trigN2UpRD = new R_TRIG();
  25. private R_TRIG _trigN2DownRD = new R_TRIG();
  26. private R_TRIG _trigN2AirUpRD = new R_TRIG();
  27. private R_TRIG _trigN2AirDownRD = new R_TRIG();
  28. private R_TRIG _trigN2AirDownTwoRD = new R_TRIG();
  29. private R_TRIG _trigSelectN2PurgeModeD = new R_TRIG();
  30. private Dictionary<string, Tuple<R_TRIG, List<Tuple<IDevice, string>>>> _n2PurgeSequenceAction;
  31. private Dictionary<string, Func<bool>> _n2PurgeSequenceStatus;
  32. private Dictionary<string, R_TRIG> _rTrigDict;
  33. private N2PurgeModeEnum _N2PurgeMode = N2PurgeModeEnum.Auto;
  34. private double _n2PurgeData = 20;
  35. private double _n2ToAirData = 185000;
  36. private N2PurgeModeEnum _currentPhase;
  37. private double _manualPhase2StabilityTime = 0;
  38. private double _manualPhase4StabilityTime = 0;
  39. private bool _enableAbortN2purge = true;
  40. private int _phase1CycleCount = 0;
  41. private int _phase1CycleCountSC = 0;
  42. private bool _canSwitchToPhase2 = true;
  43. private Dictionary<string, Stopwatch> _allTimeDict = new Dictionary<string, Stopwatch>();
  44. private void InitN2PurgeData()
  45. {
  46. DATA.Subscribe($"{Module}.O2DensityData", () => GetO2DensityData(), SubscriptionAttribute.FLAG.IgnoreSaveDB);
  47. DATA.Subscribe($"{Module}.CheckO2Location", () => GetCheckO2Location(), SubscriptionAttribute.FLAG.IgnoreSaveDB);
  48. DATA.Subscribe($"{Module}.O2SetCheckSetPoint", () => GetO2SetCheckSetPoint(), SubscriptionAttribute.FLAG.IgnoreSaveDB);
  49. DATA.Subscribe($"{Module}.N2PurgeMode", () => SC.ContainsItem("PM1.SelectN2PurgeMode") ? SC.GetStringValue("PM1.SelectN2PurgeMode") : "");
  50. }
  51. private void InitN2PurgeConfigData()
  52. {
  53. _n2PurgeData = SC.ContainsItem($"System.N2PurgeData") ? SC.GetValue<double>("System.N2PurgeData") : 20;
  54. _n2ToAirData = SC.ContainsItem($"System.N2PurgeData") ? SC.GetValue<double>("System.N2ToAirData") : 185000;
  55. _enableAbortN2purge = SC.ContainsItem($"PM1.N2Purge.EnableAbortN2purge") ? SC.GetValue<bool>("PM1.N2Purge.EnableAbortN2purge") : false;
  56. _manualPhase2StabilityTime = SC.ContainsItem($"PM1.N2Purge.Manual_phase2.StabilityTime") ? SC.GetValue<double>("PM1.N2Purge.Manual_phase2.StabilityTime") : 0;
  57. _manualPhase4StabilityTime = SC.ContainsItem($"PM1.N2Purge.Manual_phase4.StabilityTime") ? SC.GetValue<double>("PM1.N2Purge.Manual_phase4.StabilityTime") : 0;
  58. _phase1CycleCountSC = SC.ContainsItem($"PM1.N2Purge.Manual_phase1.CycleCount") ? SC.GetValue<int>("PM1.N2Purge.Manual_phase1.CycleCount") : 0;
  59. _n2PurgeSequenceAction = ExtractionMethods.GetN2PurgeSequenceAction();
  60. _n2PurgeSequenceStatus = new Dictionary<string, Func<bool>>()
  61. {
  62. {"N2PurgeAIRTo20PPM",()=> GetN2PurgeAIRTo20PPMStatus()},
  63. {"N2PurgeUnder20PPM",()=> GetN2PurgeUnder20PPMStatus()},
  64. {"AIR",()=> GetN2PurgeAIRStatus()},
  65. {"DoorOpen",()=> GetN2PurgeDoorOpenStatus()},
  66. {"Foup1",()=> GetN2PurgeFoup1Status()},
  67. {"Foup2",()=> GetN2PurgeFoup2Status()},
  68. {N2PurgeModeEnum.Manual_phase1.ToString(),()=> GetN2PurgePhase1() },
  69. {N2PurgeModeEnum.Manual_phase2.ToString(),()=> GetN2PurgePhase2()},
  70. {N2PurgeModeEnum.Manual_phase3.ToString(),()=> GetN2PurgePhase3() },
  71. {N2PurgeModeEnum.Manual_phase4.ToString(),()=> GetN2PurgePhase4() },
  72. {N2PurgeModeEnum.Manual_phase5.ToString(),()=> GetN2PurgePhase5() },
  73. };
  74. _allTimeDict = new Dictionary<string, Stopwatch>()
  75. {
  76. {N2PurgeModeEnum.Manual_phase1.ToString(),new Stopwatch() },
  77. {N2PurgeModeEnum.Manual_phase2.ToString(),new Stopwatch()},
  78. {N2PurgeModeEnum.Manual_phase3.ToString(),new Stopwatch()},
  79. {N2PurgeModeEnum.Manual_phase4.ToString(),new Stopwatch() },
  80. {N2PurgeModeEnum.Manual_phase5.ToString(),new Stopwatch() }
  81. };
  82. _rTrigDict = new Dictionary<string, R_TRIG>();
  83. }
  84. private void MonitorN2Purge()
  85. {
  86. var selectN2PurgeMode = SC.ContainsItem("PM1.SelectN2PurgeMode") ? SC.GetStringValue("PM1.SelectN2PurgeMode") : "";
  87. if (string.IsNullOrEmpty(selectN2PurgeMode))
  88. {
  89. return;
  90. }
  91. SetN2PurgeModeAction(selectN2PurgeMode);
  92. }
  93. private void SetN2PurgeModeAction(string selectN2PurgeMode)
  94. {
  95. _N2PurgeMode = (N2PurgeModeEnum)Enum.Parse(typeof(N2PurgeModeEnum), selectN2PurgeMode);
  96. if (_N2PurgeMode == N2PurgeModeEnum.N2PurgeMode)
  97. {
  98. if (_currentPhase == N2PurgeModeEnum.Manual_phase1)
  99. {
  100. if (_n2PurgeSequenceStatus[N2PurgeModeEnum.Manual_phase2.ToString()].Invoke() && _canSwitchToPhase2)
  101. {
  102. SetN2PurgeValveData(N2PurgeModeEnum.Manual_phase2.ToString(), "from Manual_phase1 to Manual_phase2");
  103. }
  104. }
  105. else if (_currentPhase == N2PurgeModeEnum.Manual_phase2)
  106. {
  107. if (!_allTimeDict[N2PurgeModeEnum.Manual_phase2.ToString()].IsRunning && _canSwitchToPhase2)
  108. {
  109. _allTimeDict[N2PurgeModeEnum.Manual_phase2.ToString()].Restart();
  110. }
  111. var second = _allTimeDict[N2PurgeModeEnum.Manual_phase2.ToString()].Elapsed.Seconds;
  112. if (second >= _manualPhase2StabilityTime)
  113. {
  114. if (_n2PurgeSequenceStatus[N2PurgeModeEnum.Manual_phase1.ToString()].Invoke())
  115. {
  116. SetN2PurgeValveData(N2PurgeModeEnum.Manual_phase1.ToString(), "from Manual_phase2 to Manual_phase1");
  117. N2PurgeFaileAlarm.Set();
  118. _allTimeDict[N2PurgeModeEnum.Manual_phase2.ToString()].Restart();
  119. _allTimeDict[N2PurgeModeEnum.Manual_phase2.ToString()].Stop();
  120. _canSwitchToPhase2 = false;
  121. }
  122. if (_n2PurgeSequenceStatus[N2PurgeModeEnum.Manual_phase2.ToString()].Invoke())
  123. {
  124. _allTimeDict[N2PurgeModeEnum.Manual_phase2.ToString()].Restart();
  125. _allTimeDict[N2PurgeModeEnum.Manual_phase2.ToString()].Stop();
  126. _canSwitchToPhase2 = false;
  127. }
  128. }
  129. }
  130. else
  131. {
  132. if (_n2PurgeSequenceStatus[N2PurgeModeEnum.Manual_phase1.ToString()].Invoke())
  133. {
  134. SetN2PurgeValveData(N2PurgeModeEnum.Manual_phase1.ToString());
  135. }
  136. else if (_n2PurgeSequenceStatus[N2PurgeModeEnum.Manual_phase2.ToString()].Invoke())
  137. {
  138. SetN2PurgeValveData(N2PurgeModeEnum.Manual_phase2.ToString());
  139. }
  140. }
  141. }
  142. if (_N2PurgeMode == N2PurgeModeEnum.ATMMode)
  143. {
  144. if (_currentPhase == N2PurgeModeEnum.Manual_phase3)
  145. {
  146. if (_n2PurgeSequenceStatus[N2PurgeModeEnum.Manual_phase4.ToString()].Invoke())
  147. {
  148. if (!_allTimeDict[N2PurgeModeEnum.Manual_phase4.ToString()].IsRunning)
  149. {
  150. _allTimeDict[N2PurgeModeEnum.Manual_phase4.ToString()].Restart();
  151. }
  152. var second = _allTimeDict[N2PurgeModeEnum.Manual_phase4.ToString()].Elapsed.Seconds;
  153. if (second >= _manualPhase4StabilityTime)
  154. {
  155. SetN2PurgeValveData(N2PurgeModeEnum.Manual_phase4.ToString(), "from Manual_phase3 to Manual_phase4");
  156. _allTimeDict[N2PurgeModeEnum.Manual_phase4.ToString()].Stop();
  157. }
  158. }
  159. }
  160. else if (_currentPhase == N2PurgeModeEnum.Manual_phase4)
  161. {
  162. if (_n2PurgeSequenceStatus[N2PurgeModeEnum.Manual_phase5.ToString()].Invoke())
  163. {
  164. SetN2PurgeValveData(N2PurgeModeEnum.Manual_phase5.ToString(), "from Manual_phase4 to Manual_phase5");
  165. }
  166. if (_n2PurgeSequenceStatus[N2PurgeModeEnum.Manual_phase3.ToString()].Invoke())
  167. {
  168. SetN2PurgeValveData(N2PurgeModeEnum.Manual_phase3.ToString(), "from Manual_phase4 to Manual_phase3");
  169. }
  170. }
  171. else if (_currentPhase == N2PurgeModeEnum.Manual_phase5)
  172. {
  173. if (_n2PurgeSequenceStatus[N2PurgeModeEnum.Manual_phase4.ToString()].Invoke())
  174. {
  175. SetN2PurgeValveData(N2PurgeModeEnum.Manual_phase4.ToString(), "from Manual_phase5 to Manual_phase4");
  176. }
  177. if (_n2PurgeSequenceStatus[N2PurgeModeEnum.Manual_phase3.ToString()].Invoke())
  178. {
  179. SetN2PurgeValveData(N2PurgeModeEnum.Manual_phase3.ToString(), "from Manual_phase5 to Manual_phase3");
  180. }
  181. }
  182. else
  183. {
  184. if (_n2PurgeSequenceStatus[N2PurgeModeEnum.Manual_phase3.ToString()].Invoke())
  185. {
  186. SetN2PurgeValveData(N2PurgeModeEnum.Manual_phase3.ToString());
  187. }
  188. if (_n2PurgeSequenceStatus[N2PurgeModeEnum.Manual_phase5.ToString()].Invoke())
  189. {
  190. SetN2PurgeValveData(N2PurgeModeEnum.Manual_phase5.ToString());
  191. }
  192. if (_n2PurgeSequenceStatus[N2PurgeModeEnum.Manual_phase4.ToString()].Invoke())
  193. {
  194. SetN2PurgeValveData(N2PurgeModeEnum.Manual_phase4.ToString());
  195. }
  196. }
  197. }
  198. //switch (_N2PurgeMode)
  199. //{
  200. // case N2PurgeModeEnum.Auto:
  201. // // 自动模式下的操作
  202. // break;
  203. // case N2PurgeModeEnum.ManualMode:
  204. // break;
  205. // case N2PurgeModeEnum.N2PurgeMode:
  206. // ProcessPhase(_trigN2UpRD, N2PurgeModeEnum.Manual_phase1.ToString());
  207. // ProcessPhase(_trigN2DownRD, N2PurgeModeEnum.Manual_phase2.ToString(), _manualPhase2NeedCheck, (int)(_manualPhase2StabilityTime * 1000));
  208. // break;
  209. // case N2PurgeModeEnum.ATMMode:
  210. // ProcessPhase(_trigN2AirDownRD, N2PurgeModeEnum.Manual_phase3.ToString());
  211. // ProcessPhase(_trigN2AirUpRD, N2PurgeModeEnum.Manual_phase4.ToString(), _manualPhase4NeedCheck, (int)(_manualPhase4StabilityTime * 1000));
  212. // ProcessPhase(_trigN2AirDownTwoRD, N2PurgeModeEnum.Manual_phase5.ToString());
  213. // break;
  214. //}
  215. }
  216. bool CheckConditionInTime(string modeKey, int millisecondsTimeout, Func<bool> condition)
  217. {
  218. var stopwatch = _allTimeDict[modeKey];
  219. if (!_allTimeDict[modeKey].IsRunning)
  220. {
  221. _allTimeDict[modeKey].Restart();
  222. }
  223. while (stopwatch.ElapsedMilliseconds < millisecondsTimeout)
  224. {
  225. if (!_allTimeDict[modeKey].IsRunning)
  226. {
  227. return true;
  228. }
  229. if (!condition())
  230. {
  231. _allTimeDict[modeKey].Stop();
  232. _allTimeDict[modeKey].Reset();
  233. return false;
  234. }
  235. }
  236. if (stopwatch.ElapsedMilliseconds > millisecondsTimeout)
  237. {
  238. _allTimeDict[modeKey].Stop();
  239. _allTimeDict[modeKey].Reset();
  240. }
  241. return true;
  242. }
  243. private void ProcessPhase(R_TRIG r_TRIG, string modeKey, bool needCheck = false, int time = 0)
  244. {
  245. r_TRIG.CLK = needCheck ? (CheckConditionInTime(modeKey, time, () => _n2PurgeSequenceStatus[modeKey].Invoke())) : _n2PurgeSequenceStatus[modeKey].Invoke();
  246. if (r_TRIG.Q)
  247. {
  248. LOG.Info($"N2PurgeMode Trigger {modeKey}!,O2:{GetO2Density()},time:{_allTimeDict[modeKey].ElapsedMilliseconds}");
  249. SetN2PurgeValveData(modeKey);
  250. _allTimeDict[modeKey].Stop();
  251. _allTimeDict[modeKey].Reset();
  252. }
  253. }
  254. public void RestAllN2PrugeRD()
  255. {
  256. _trigN2AirDownRD.RST = false;
  257. _trigN2AirUpRD.RST = false;
  258. _trigN2DownRD.RST = false;
  259. _trigN2UpRD.RST = false;
  260. foreach (var item in _allTimeDict)
  261. {
  262. item.Value.Stop();
  263. item.Value.Reset();
  264. }
  265. }
  266. private void SetN2PurgeValveData(string mode, string msg = "")
  267. {
  268. string message = string.IsNullOrEmpty(msg) ? $"N2PurgeMode Trigger {mode},O2:{GetO2Density()}" : $"N2PurgeMode Trigger {msg},O2:{GetO2Density()}";
  269. LOG.Info(message);
  270. var value = _n2PurgeSequenceAction[mode];
  271. _currentPhase = (N2PurgeModeEnum)Enum.Parse(typeof(N2PurgeModeEnum), mode);
  272. foreach (var operateItem in value.Item2)
  273. {
  274. if (operateItem.Item1 is IoMFC)
  275. {
  276. var ioMFc = (operateItem.Item1 as IoMFC);
  277. { ioMFc.SetMfcValue(out _, 0, new object[] { float.Parse(operateItem.Item2.ToString()) }); }
  278. }
  279. if (operateItem.Item1 is IoValve)
  280. {
  281. var ioValve = (operateItem.Item1 as IoValve);
  282. ioValve.TurnValve(bool.Parse(operateItem.Item2), out _);
  283. }
  284. if (operateItem.Item1 is IoTrigger)
  285. {
  286. var ioTrigger = (operateItem.Item1 as IoTrigger);
  287. ioTrigger.CheckAndSet(bool.Parse(operateItem.Item2), out _);
  288. }
  289. }
  290. }
  291. private bool SetN2PurgeMode(out string reason, int time, object[] param)
  292. {
  293. reason = string.Empty;
  294. var mode = param[0].ToString();
  295. _N2PurgeMode = (N2PurgeModeEnum)Enum.Parse(typeof(N2PurgeModeEnum), mode);
  296. if (SC.ContainsItem("PM1.SelectN2PurgeMode"))
  297. {
  298. SC.SetItemValue("PM1.SelectN2PurgeMode", mode);
  299. }
  300. RestAllN2PrugeRD();
  301. return true;
  302. }
  303. /// <summary>
  304. /// 获取当前O2检测位置的设定值
  305. /// </summary>
  306. /// <returns></returns>
  307. private string GetO2SetCheckSetPoint()
  308. {
  309. if (SensorO2DetectSideLA != null && SensorO2DetectSideLA.Value)
  310. {
  311. var key = "PM1.N2Purge.N2PurgeLAO2CheckSV";
  312. if (SC.ContainsItem(key))
  313. return SC.GetValue<double>(key).ToString("f3");
  314. }
  315. if ((SensorO2DetectSideFIMS1 != null && SensorO2DetectSideFIMS1.Value) || (SensorO2DetectSideFIMS2 != null && SensorO2DetectSideFIMS2.Value))
  316. {
  317. var key = "PM1.N2Purge.N2PurgeFOUPO2CheckSV";
  318. if (SC.ContainsItem(key))
  319. return SC.GetValue<double>(key).ToString("f3");
  320. }
  321. return "";
  322. }
  323. /// <summary>
  324. /// 获取当前O2检测位置
  325. /// </summary>
  326. /// <returns></returns>
  327. private string GetCheckO2Location()
  328. {
  329. if (SensorO2DetectSideLA != null && SensorO2DetectSideLA.Value)
  330. return SensorO2DetectSideLA.Display;
  331. if (SensorO2DetectSideFIMS1 != null && SensorO2DetectSideFIMS1.Value)
  332. return SensorO2DetectSideFIMS1.Display;
  333. if (SensorO2DetectSideFIMS2 != null && SensorO2DetectSideFIMS2.Value)
  334. return SensorO2DetectSideFIMS2.Display;
  335. return "";
  336. }
  337. /// <summary>
  338. /// 获取当前O2浓度
  339. /// </summary>
  340. /// <returns></returns>
  341. private string GetO2DensityData()
  342. {
  343. var result = "";
  344. result = ConcentrationO2.FeedBack.ToString("f3");
  345. return result;
  346. }
  347. private double GetO2Density()
  348. {
  349. return ConcentrationO2.FeedBack;
  350. }
  351. private bool GetN2PurgePhase1()
  352. {
  353. return (GetO2Density() >= _n2PurgeData) && GetLADoorOpenStatus();
  354. }
  355. private bool GetN2PurgePhase2()
  356. {
  357. return (GetO2Density() < _n2PurgeData) && GetLADoorOpenStatus();
  358. }
  359. private bool GetN2PurgePhase3()
  360. {
  361. return GetO2Density() < _n2ToAirData && GetLADoorOpenStatus();
  362. }
  363. private bool GetN2PurgePhase5()
  364. {
  365. return GetO2Density() >= _n2ToAirData && !GetLADoorOpenStatus();
  366. }
  367. private bool GetN2PurgePhase4()
  368. {
  369. return GetO2Density() >= _n2ToAirData && GetLADoorOpenStatus();
  370. }
  371. private bool GetN2PurgeAIRTo20PPMStatus()
  372. {
  373. return ValveAV202.DOOpen.Value;
  374. }
  375. private bool GetN2PurgeUnder20PPMStatus(double value = 20)
  376. {
  377. return ConcentrationO2.Value < value;
  378. }
  379. private bool GetN2PurgeAIRStatus()
  380. {
  381. return ValveAV202.DOClose.Value && (AlarmSignalFilterBox1DoorSwitch != null ? !AlarmSignalFilterBox1DoorSwitch.Value : false);
  382. }
  383. private bool GetLADoorOpenStatus()
  384. {
  385. return (bool)(SensorLADoorSw1?.Value);
  386. }
  387. private bool GetN2PurgeDoorOpenStatus()
  388. {
  389. return ValveAV202.DOClose.Value && (AlarmSignalFilterBox1DoorSwitch != null ? !AlarmSignalFilterBox1DoorSwitch.Value : false);
  390. }
  391. private bool GetN2PurgeFoup1Status()
  392. {
  393. return GetN2PurgeAIRTo20PPMStatus() && GetN2PurgeUnder20PPMStatus() && FIMS1.IsFoupExist && FIMS1.CollisionAvoidanceUpDownStatus == DeviceStatus.Down;
  394. }
  395. private bool GetN2PurgeFoup2Status()
  396. {
  397. return GetN2PurgeAIRTo20PPMStatus() && GetN2PurgeUnder20PPMStatus() && FIMS2.IsFoupExist && FIMS2.CollisionAvoidanceUpDownStatus == DeviceStatus.Down; ;
  398. }
  399. public bool IsAbortN2purge()
  400. {
  401. if (!_enableAbortN2purge)
  402. {
  403. return false;
  404. }
  405. if (SensorSL02001gasboxdoorsw11.Value || SensorSL02001gasboxdoorsw12.Value || SensorSL02002gasboxdoorsw11.Value || SensorSL02002gasboxdoorsw12.Value || SensorSL05002LAdoorsw2.Value || SensorSL05004LAfurnacedoorsw.Value)
  406. {
  407. return true;
  408. }
  409. return false;
  410. }
  411. public void SetN2PurgeLAO2CheckFirstEnable(bool isEable)
  412. {
  413. if (TrigN2PurgeLAO2CheckFirstEnable != null && TrigN2PurgeLAO2CheckFirstEnable.Value != isEable)
  414. {
  415. TrigN2PurgeLAO2CheckFirstEnable.SetTrigger(isEable, out _);
  416. }
  417. }
  418. public void SetN2PurgeFIMS1O2CheckEnable(ModuleName fims, bool isEable)
  419. {
  420. if (fims == ModuleName.FIMS1 && TrigN2PurgeFIMS1O2CheckEnable != null && TrigN2PurgeFIMS1O2CheckEnable.Value != isEable)
  421. {
  422. TrigN2PurgeFIMS1O2CheckEnable.SetTrigger(isEable, out _);
  423. }
  424. if (fims == ModuleName.FIMS2 && TrigN2PurgeFIMS2O2CheckEnable != null && TrigN2PurgeFIMS2O2CheckEnable.Value != isEable)
  425. {
  426. TrigN2PurgeFIMS2O2CheckEnable.SetTrigger(isEable, out _);
  427. }
  428. }
  429. public void SetN2PurgeProcess(bool isEable)
  430. {
  431. if (TrigN2PurgeProcess != null && TrigN2PurgeProcess.Value != isEable)
  432. {
  433. TrigN2PurgeProcess.SetTrigger(isEable, out _);
  434. }
  435. }
  436. public void SetN2PurgeLAO2CheckSV(float value)
  437. {
  438. if (TrigN2PurgeLAO2CheckSV != null)
  439. TrigN2PurgeLAO2CheckSV?.SetAOTrigger(value, out _);
  440. }
  441. public void SetN2PurgeFOUPO2CheckSV(float value)
  442. {
  443. if (TrigN2PurgeFOUPO2CheckSV != null)
  444. TrigN2PurgeFOUPO2CheckSV?.SetAOTrigger(value, out _);
  445. }
  446. public void SetAVParameter(ModuleName fims, bool isEable)
  447. {
  448. if (fims == ModuleName.FIMS1)
  449. {
  450. var avValve58 = DEVICE.GetDevice<IoValve>($"{ModuleName.PM1}.ValveAV58");
  451. avValve58?.TurnValve(isEable, out _);
  452. }
  453. if (fims == ModuleName.FIMS2)
  454. {
  455. var avValve59 = DEVICE.GetDevice<IoValve>($"{ModuleName.PM1}.ValveAV59");
  456. avValve59?.TurnValve(isEable, out _);
  457. }
  458. }
  459. /// <summary>
  460. /// N2Purge相关时间参数,电气要求设定为秒,实际下发按照毫秒
  461. /// </summary>
  462. public void SetN2PurgeParameters()
  463. {
  464. if (SC.ContainsItem("PM1.N2Purge.TransferRoomArrivalWaitTime") && TrigN2PurgeLAO2CheckTime != null)
  465. {
  466. var time = (float)SC.GetValue<double>("PM1.N2Purge.TransferRoomArrivalWaitTime");
  467. TrigN2PurgeLAO2CheckTime.SetAOTrigger(time, out _);
  468. }
  469. if (SC.ContainsItem("PM1.N2Purge.TransferRoomStableWaitTime") && TrigN2PurgeLAO2OverTime != null)
  470. {
  471. var time = (float)SC.GetValue<double>("PM1.N2Purge.TransferRoomStableWaitTime");
  472. TrigN2PurgeLAO2OverTime.SetAOTrigger(time, out _);
  473. }
  474. if (SC.ContainsItem("PM1.N2Purge.FOUPOpenerArrivalWaitTime") && TrigN2PurgeFOUPO2CheckTime != null)
  475. {
  476. var time = (float)SC.GetValue<double>("PM1.N2Purge.FOUPOpenerArrivalWaitTime");
  477. TrigN2PurgeFOUPO2CheckTime.SetAOTrigger(time, out _);
  478. }
  479. if (SC.ContainsItem("PM1.N2Purge.FOUPOpenerStableWaitTime") && TrigN2PurgeFOUPO2OverTime != null)
  480. {
  481. var time = (float)SC.GetValue<double>("PM1.N2Purge.FOUPOpenerStableWaitTime");
  482. TrigN2PurgeFOUPO2OverTime.SetAOTrigger(time, out _);
  483. }
  484. if (SC.ContainsItem("PM1.N2Purge.O2DetectorTransferRoomToFOUPTime") && TrigN2PurgeExchangeLATOFOUPWaitTime != null)
  485. {
  486. var time = (float)SC.GetValue<double>("PM1.N2Purge.O2DetectorTransferRoomToFOUPTime");
  487. TrigN2PurgeExchangeLATOFOUPWaitTime.SetAOTrigger(time, out _);
  488. }
  489. if (SC.ContainsItem("PM1.N2Purge.O2DetectorFOUPToTransferRoomTime") && TrigN2PurgeExchangeFOUPTOLAWaitTime != null)
  490. {
  491. var time = (float)SC.GetValue<double>("PM1.N2Purge.O2DetectorFOUPToTransferRoomTime");
  492. TrigN2PurgeExchangeFOUPTOLAWaitTime.SetAOTrigger(time, out _);
  493. }
  494. if (SC.ContainsItem("PM1.N2Purge.O2DetectorFOUPToFOUPTime") && TrigN2PurgeExchangeFOUPTOFOUPWaitTime != null)
  495. {
  496. var time = (float)SC.GetValue<double>("PM1.N2Purge.O2DetectorFOUPToFOUPTime");
  497. TrigN2PurgeExchangeFOUPTOFOUPWaitTime.SetAOTrigger(time, out _);
  498. }
  499. SetN2PurgeLAO2CheckSV((float)SC.GetValue<double>("PM1.N2Purge.N2PurgeLAO2CheckSV"));
  500. SetN2PurgeFOUPO2CheckSV((float)SC.GetValue<double>("PM1.N2Purge.N2PurgeFOUPO2CheckSV"));
  501. }
  502. public void InitN2PurgeMode(string n2PurgeModeStr, bool isN2Purge)
  503. {
  504. if (SC.ContainsItem("PM1.RecipeRelevancyN2Purge") && SC.GetValue<bool>("PM1.RecipeRelevancyN2Purge") && SC.ContainsItem("PM1.SelectN2PurgeMode"))
  505. {
  506. if (!isN2Purge)
  507. {
  508. SC.SetItemValueFromString("PM1.SelectN2PurgeMode", N2PurgeModeEnum.ManualMode.ToString());
  509. }
  510. else
  511. {
  512. var setValue = GetN2PurgeModeEnumByStr(n2PurgeModeStr);
  513. SC.SetItemValueFromString("PM1.SelectN2PurgeMode", setValue);
  514. }
  515. RestAllN2PrugeRD();
  516. }
  517. }
  518. }
  519. }