AlignerBaseDevice.cs 44 KB

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  1. using Aitex.Core.Common;
  2. using Aitex.Core.RT.DataCenter;
  3. using Aitex.Core.RT.Device;
  4. using Aitex.Core.RT.Event;
  5. using Aitex.Core.RT.Fsm;
  6. using Aitex.Core.RT.OperationCenter;
  7. using Aitex.Core.RT.SCCore;
  8. using MECF.Framework.Common.Equipment;
  9. using MECF.Framework.Common.Event;
  10. using MECF.Framework.Common.SubstrateTrackings;
  11. using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.OcrReaders;
  12. using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.Robots;
  13. using System;
  14. using System.Collections.Generic;
  15. using System.Linq;
  16. using System.Text;
  17. using System.Threading.Tasks;
  18. namespace MECF.Framework.RT.EquipmentLibrary.HardwareUnits.Aligners.AlignersBase
  19. {
  20. public abstract class AlignerBaseDevice : Entity, IDevice, IEntity
  21. {
  22. protected bool IsSimulatorMode
  23. {
  24. get
  25. {
  26. if (SC.ContainsItem("System.IsSimulatorMode"))
  27. return SC.GetValue<bool>("System.IsSimulatorMode");
  28. return false;
  29. }
  30. }
  31. private OCRReaderBaseDevice[] _ocrs;
  32. public OCRReaderBaseDevice[] OCRs
  33. {
  34. get => _ocrs;
  35. set
  36. {
  37. _ocrs = value;
  38. foreach(var ocr in _ocrs)
  39. {
  40. if(ocr!=null)
  41. ocr.InstalledModule = RobotModuleName;
  42. }
  43. }
  44. }
  45. public event Action<bool> ActionDone;
  46. public event Action<string, AlarmEventItem> OnDeviceAlarmStateChanged;
  47. public bool HasAlarm { get; }
  48. public bool IsBusy { get; set; }
  49. public string ErrorCode { get; set; } = "";
  50. public virtual bool IsReady()
  51. {
  52. return AlignerState == AlignerStateEnum.Idle && !IsBusy;
  53. }
  54. public object[] CurrentParamter { get; private set; }
  55. public bool IsOnline { get; set; }
  56. public WaferSize Size
  57. {
  58. get; set;
  59. } = WaferSize.WS12;
  60. public virtual int AlginerSpeedSetPoint
  61. {
  62. get
  63. {
  64. if (SC.ContainsItem($"Aligner.{RobotModuleName}.AlignSpeed"))
  65. return SC.GetValue<int>($"Aligner.{RobotModuleName}.AlignSpeed");
  66. return 100;
  67. }
  68. set
  69. {
  70. if (SC.ContainsItem($"Aligner.{RobotModuleName}.AlignSpeed"))
  71. SC.SetItemValue($"Aligner.{RobotModuleName}.AlignSpeed", value);
  72. }
  73. }
  74. public virtual WaferSize GetCurrentWaferSize()
  75. {
  76. return Size;
  77. }
  78. public virtual double CompensationAngleValue
  79. {
  80. get
  81. {
  82. if (SC.ContainsItem($"Aligner.{Name}.CompensationAngle"))
  83. return SC.GetValue<double>($"Aligner.{Name}.CompensationAngle");
  84. return 0;
  85. }
  86. }
  87. public virtual bool IsGripperHoldWafer { get; set; }
  88. public bool IsIdle
  89. {
  90. get
  91. {
  92. return fsm.State == (int)AlignerStateEnum.Idle && fsm.CheckExecuted() && !IsBusy;
  93. }
  94. }
  95. public bool IsError
  96. {
  97. get
  98. {
  99. return fsm.State == (int)AlignerStateEnum.Error;
  100. }
  101. }
  102. public bool IsInit
  103. {
  104. get
  105. {
  106. return fsm.State == (int)AlignerStateEnum.Init;
  107. }
  108. }
  109. public double CurrentNotch { get; set; }
  110. public int SpeedAxis1 { set; get; }
  111. public int SpeedAxis2 { set; get; }
  112. public int SpeedAxis3 { set; get; }
  113. public int SpeedAxis4 { set; get; }
  114. public int SpeedAxis5 { set; get; }
  115. public int SpeedAxis6 { set; get; }
  116. public float PositionAxis1 { get; set; }
  117. public float PositionAxis2 { get; set; }
  118. public float PositionAxis3 { get; set; }
  119. public float PositionAxis4 { get; set; }
  120. public float PositionAxis5 { get; set; }
  121. public float PositionAxis6 { get; set; }
  122. public int AlignerCommandTimeout { get; private set; }
  123. public virtual int TimeLimitAlignWafer
  124. {
  125. get
  126. {
  127. if (SC.ContainsItem($"Aligner.{Name}.TimeLimitForAlignWafer"))
  128. return SC.GetValue<int>($"Aligner.{Name}.TimeLimitForAlignWafer");
  129. return 90;
  130. }
  131. }
  132. public virtual int TimeLimitAlignerHome
  133. {
  134. get
  135. {
  136. if (SC.ContainsItem($"Aligner.{Name}.TimeLimitAlignerHome"))
  137. return SC.GetValue<int>($"Aligner.{Name}.TimeLimitAlignerHome");
  138. return 30;
  139. }
  140. }
  141. public virtual int TimeLimitReadOcr
  142. {
  143. get
  144. {
  145. if (SC.ContainsItem($"Aligner.{Name}.TimeLimitReadOCR"))
  146. return SC.GetValue<int>($"Aligner.{Name}.TimeLimitReadOCR");
  147. return 180;
  148. }
  149. }
  150. public virtual int TimeLimitVerifyOcr
  151. {
  152. get
  153. {
  154. if (SC.ContainsItem($"Aligner.{Name}.TimeLimitVerifyOCR"))
  155. return SC.GetValue<int>($"Aligner.{Name}.TimeLimitVerifyOCR");
  156. return 5;
  157. }
  158. }
  159. public enum AlignerMsg
  160. {
  161. Reset,
  162. Clear,
  163. ResetToReady,
  164. Stop,
  165. StartInit,
  166. InitComplete,
  167. StartHome,
  168. HomeComplete,
  169. ERROR,
  170. ActionDone,
  171. Abort,
  172. StartMaintenance,
  173. CompleteMaintenance,
  174. ReadData,
  175. SetParameters,
  176. SetParametersComplete,
  177. Grip,
  178. GripComplete,
  179. UnGrip,
  180. UnGripComplete,
  181. LiftUp,
  182. LiftUpComplete,
  183. LiftDown,
  184. LiftDownComplete,
  185. Align,
  186. AlignComplete,
  187. PrepareAccept,
  188. PrepareAcceptComplete,
  189. }
  190. protected AlignerBaseDevice(string module, string name)
  191. : base()
  192. {
  193. Module = module;
  194. Name = name;
  195. RobotModuleName = (ModuleName)Enum.Parse(typeof(ModuleName), Name);
  196. InitializeRobot();
  197. }
  198. public string EventAlignerStartAlign { get => RobotModuleName.ToString() + "StartAligning"; }
  199. public string EventAlignerCompleteAlign { get => RobotModuleName.ToString() + "CompleteAligning"; }
  200. public string AlarmAlignFailed { get => RobotModuleName.ToString() + "AligningFailed"; }
  201. public string AlarmAlignTimeout { get => RobotModuleName.ToString() + "AligningTimeout"; }
  202. public string AlarmVerifyLaserMarkFailed { get => RobotModuleName.ToString() + "VerifyLaserMarkFailed"; }
  203. public string AlarmVerifyLaserMarkSlotNoFailed { get => RobotModuleName.ToString() + "VerifyLaserMarkSlotNoFailed"; }
  204. public string AlarmVerifyLaserMarkLengthFailed { get => RobotModuleName.ToString() + "VerifyLaserMarkLengthFailed"; }
  205. public string AlarmVerifyLaserMarkWithHostFailed { get => RobotModuleName.ToString() + "VerifyLaserMarkWithHostFailed"; }
  206. public string AlarmSlotInLaserMarkIsOccuppied { get => RobotModuleName.ToString() + "SlotInLaserMarkIsOccuppied"; }
  207. public string AlarmVerifyLaserMarkTimeout { get => RobotModuleName.ToString() + "VerifyLaserMarkTimeout"; }
  208. public string AlarmWaferInformationError { get => RobotModuleName.ToString() + "WaferInformationError"; }
  209. public virtual bool IsNeedChangeWaferSize(WaferSize wz)
  210. {
  211. return false;
  212. }
  213. protected override bool Init()
  214. {
  215. return base.Init();
  216. }
  217. public void InitializeRobot()
  218. {
  219. BuildTransitionTable();
  220. SubscribeDataVariable();
  221. SubscribeOperation();
  222. SubscribeDeviceOperation();
  223. AlignerCommandTimeout = SC.ContainsItem("Aligner.TimeLimitAlignerCommand") ?
  224. SC.GetValue<int>("Aligner.TimeLimitAlignerCommand") : 120;
  225. WaferManager.Instance.SubscribeLocation(Name, 1);
  226. Running = true;
  227. }
  228. protected virtual void SubscribeOperation()
  229. {
  230. OP.Subscribe(String.Format("{0}.{1}", Name, "LiftUp"), (out string reason, int time, object[] param) =>
  231. {
  232. bool ret = LiftUp(out reason);
  233. if (ret)
  234. {
  235. reason = string.Format("{0} {1}", Name, "LiftUp");
  236. return true;
  237. }
  238. reason = "";
  239. return false;
  240. });
  241. OP.Subscribe(String.Format("{0}.{1}", Name, "LiftDown"), (out string reason, int time, object[] param) =>
  242. {
  243. bool ret = LiftDown(out reason);
  244. if (ret)
  245. {
  246. reason = string.Format("{0} {1}", Name, "LiftDown");
  247. return true;
  248. }
  249. reason = "";
  250. return false;
  251. });
  252. OP.Subscribe(String.Format("{0}.{1}", Name, "SetWaferSize"), (out string reason, int time, object[] param) =>
  253. {
  254. if(param.Length <2)
  255. {
  256. reason = "Invalide parameter";
  257. return false;
  258. }
  259. WaferSize size = (WaferSize)Enum.Parse(typeof(WaferSize), param[1].ToString());
  260. bool ret = SetWaferSize( size, out reason);
  261. if (ret)
  262. {
  263. reason = string.Format("{0} {1}", Name, "SetWaferSize");
  264. return true;
  265. }
  266. reason = "";
  267. return false;
  268. });
  269. OP.Subscribe(String.Format("{0}.{1}", Name, "Init"), (out string reason, int time, object[] param) =>
  270. {
  271. bool ret = Init(out reason);
  272. if (ret)
  273. {
  274. reason = string.Format("{0} {1}", Name, "Initializing");
  275. return true;
  276. }
  277. reason = "";
  278. return false;
  279. });
  280. OP.Subscribe(String.Format("{0}.{1}", Name, "Abort"), (out string reason, int time, object[] param) =>
  281. {
  282. bool ret = Abort(out reason);
  283. if (ret)
  284. {
  285. reason = string.Format("{0} {1}", Name, "Abort");
  286. return true;
  287. }
  288. reason = "";
  289. return false;
  290. });
  291. OP.Subscribe(String.Format("{0}.{1}", Name, "Home"), (out string reason, int time, object[] param) =>
  292. {
  293. bool ret = Home(out reason);
  294. if (ret)
  295. {
  296. reason = string.Format("{0} {1}", Name, "Homing");
  297. return true;
  298. }
  299. reason = "";
  300. return false;
  301. });
  302. OP.Subscribe(String.Format("{0}.{1}", Name, "AlignerHome"), (out string reason, int time, object[] param) =>
  303. {
  304. bool ret = Home(out reason);
  305. if (ret)
  306. {
  307. reason = string.Format("{0} {1}", Name, "Homing");
  308. return true;
  309. }
  310. reason = "";
  311. return false;
  312. });
  313. OP.Subscribe(String.Format("{0}.{1}", Name, "HomeModule"), (out string reason, int time, object[] param) =>
  314. {
  315. bool ret = HomeModule(out reason);
  316. if (ret)
  317. {
  318. reason = string.Format("{0} {1}", Name, "ModuleHoming");
  319. return true;
  320. }
  321. reason = "";
  322. return false;
  323. });
  324. OP.Subscribe(String.Format("{0}.{1}", Name, "AlignerHomeModule"), (out string reason, int time, object[] param) =>
  325. {
  326. bool ret = HomeModule(out reason);
  327. if (ret)
  328. {
  329. reason = string.Format("{0} {1}", Name, "ModuleHoming");
  330. return true;
  331. }
  332. reason = "";
  333. return false;
  334. });
  335. OP.Subscribe(String.Format("{0}.{1}", Name, "Reset"), (out string reason, int time, object[] param) =>
  336. {
  337. bool ret = AlignerReset( out reason);
  338. if (ret)
  339. {
  340. reason = string.Format("{0} {1}", Name, "Resetting");
  341. return true;
  342. }
  343. reason = "";
  344. return true;
  345. });
  346. OP.Subscribe(String.Format("{0}.{1}", Name, "AlignerReset"), (out string reason, int time, object[] param) =>
  347. {
  348. bool ret = AlignerReset( out reason);
  349. if (ret)
  350. {
  351. reason = string.Format("{0} {1}", Name, "Resetting");
  352. return true;
  353. }
  354. reason = "";
  355. return true;
  356. });
  357. OP.Subscribe(String.Format("{0}.{1}", Name, "AlignerAlign"), (out string reason, int time, object[] param) =>
  358. {
  359. bool ret = AlignerAlign(param, out reason);
  360. if (ret)
  361. {
  362. reason = string.Format("{0} {1}", Name, "Resetting");
  363. return true;
  364. }
  365. reason = "";
  366. return true;
  367. });
  368. OP.Subscribe(String.Format("{0}.{1}", Name, "AlignerSetWaferSize"), (out string reason, int time, object[] param) =>
  369. {
  370. bool ret = AlignerSetWaferSize(param, out reason);
  371. if (ret)
  372. {
  373. reason = string.Format("{0} {1}", Name, "Resetting");
  374. return true;
  375. }
  376. reason = "";
  377. return true;
  378. });
  379. OP.Subscribe(String.Format("{0}.{1}", Name, "PrepareAccept"), (out string reason, int time, object[] param) =>
  380. {
  381. bool ret = PrepareAcceptWafer();
  382. if (ret)
  383. {
  384. reason = string.Format("{0} {1}", Name, "PrepareAccept");
  385. return true;
  386. }
  387. reason = "";
  388. return true;
  389. });
  390. OP.Subscribe(String.Format("{0}.{1}", Name, "AlignerHold"), (out string reason, int time, object[] param) =>
  391. {
  392. bool ret = Grip(0, out reason);
  393. if (ret)
  394. {
  395. reason = string.Format("{0} {1}", Name, "Hold Wafer");
  396. return true;
  397. }
  398. return false;
  399. });
  400. OP.Subscribe(String.Format("{0}.{1}", Name, "AlignerRelease"), (out string reason, int time, object[] param) =>
  401. {
  402. bool ret = Release(0, out reason);
  403. if (ret)
  404. {
  405. reason = string.Format("{0} {1}", Name, "Release Wafer");
  406. return true;
  407. }
  408. return false;
  409. });
  410. }
  411. protected virtual void SubscribeDeviceOperation()
  412. {
  413. DEVICE.Register(String.Format("{0}.{1}", Name, "AlignerInit"), (out string reason, int time, object[] param) =>
  414. {
  415. bool ret = Init(out reason);
  416. if (ret)
  417. {
  418. reason = string.Format("{0} {1}", Name, "Init");
  419. return true;
  420. }
  421. return false;
  422. });
  423. DEVICE.Register(String.Format("{0}.{1}", Name, "AlignerHome"), (out string reason, int time, object[] param) =>
  424. {
  425. bool ret = Home(out reason);
  426. if (ret)
  427. {
  428. reason = string.Format("{0} {1}", Name, "Home");
  429. return true;
  430. }
  431. return false;
  432. });
  433. DEVICE.Register(String.Format("{0}.{1}", Name, "AlignerHomeModule"), (out string reason, int time, object[] param) =>
  434. {
  435. bool ret = HomeModule(out reason);
  436. if (ret)
  437. {
  438. reason = string.Format("{0} {1}", Name, "ModuleHome");
  439. return true;
  440. }
  441. return false;
  442. });
  443. DEVICE.Register(String.Format("{0}.{1}", Name, "AlignerReset"), (out string reason, int time, object[] param) =>
  444. {
  445. bool ret = AlignerReset(out reason);
  446. if (ret)
  447. {
  448. reason = string.Format("{0} {1}", Name, "Reset Error");
  449. return true;
  450. }
  451. return false;
  452. });
  453. DEVICE.Register(String.Format("{0}.{1}", Name, "AlignerGrip"), (out string reason, int time, object[] param) =>
  454. {
  455. bool ret = Grip(0, out reason);
  456. if (ret)
  457. {
  458. reason = string.Format("{0} {1}", Name, "Hold Wafer");
  459. return true;
  460. }
  461. return false;
  462. });
  463. DEVICE.Register(String.Format("{0}.{1}", Name, "AlignerRelease"), (out string reason, int time, object[] param) =>
  464. {
  465. bool ret = Release(0, out reason);
  466. if (ret)
  467. {
  468. reason = string.Format("{0} {1}", Name, "Release Wafer");
  469. return true;
  470. }
  471. return false;
  472. });
  473. DEVICE.Register(String.Format("{0}.{1}", Name, "AlignerLiftUp"), (out string reason, int time, object[] param) =>
  474. {
  475. bool ret = LiftUp(out reason);
  476. if (ret)
  477. {
  478. reason = string.Format("{0} {1}", Name, "Lifter Up");
  479. return true;
  480. }
  481. return false;
  482. });
  483. DEVICE.Register(String.Format("{0}.{1}", Name, "AlignerLiftDown"), (out string reason, int time, object[] param) =>
  484. {
  485. bool ret = LiftDown(out reason);
  486. if (ret)
  487. {
  488. reason = string.Format("{0} {1}", Name, "Lifter Down");
  489. return true;
  490. }
  491. return false;
  492. });
  493. DEVICE.Register(String.Format("{0}.{1}", Name, "AlignerStop"), (out string reason, int time, object[] param) =>
  494. {
  495. bool ret = Stop(out reason);
  496. if (ret)
  497. {
  498. reason = string.Format("{0} {1}", Name, "Stop Align");
  499. return true;
  500. }
  501. return false;
  502. });
  503. DEVICE.Register(String.Format("{0}.{1}", Name, "AlignerAlign"), (out string reason, int time, object[] param) =>
  504. {
  505. double angle = double.Parse((string)param[0]);
  506. bool ret = Align(angle, out reason);
  507. if (ret)
  508. {
  509. reason = string.Format("{0} {1}", Name, "PreAlign");
  510. return true;
  511. }
  512. return false;
  513. });
  514. }
  515. public bool SetWaferSize(WaferSize size, out string reason)
  516. {
  517. reason = "";
  518. if( (CheckToPostMessage((int)AlignerMsg.SetParameters, new object[] { "WaferSize", size })))
  519. {
  520. IsBusy = true;
  521. return true;
  522. }
  523. return false;
  524. }
  525. public bool AlignerReset(out string reason)
  526. {
  527. IsBusy = false;
  528. reason = "";
  529. if (CheckToPostMessage((int)AlignerMsg.Reset, null))
  530. return true;
  531. reason = $"{Name} is in {AlignerState}";
  532. return false;
  533. }
  534. public bool Abort(out string reason)
  535. {
  536. reason = "";
  537. if (CheckToPostMessage((int)AlignerMsg.Abort, null))
  538. return true;
  539. reason = $"{Name} is in {AlignerState}";
  540. return false;
  541. }
  542. public bool Stop(out string reason)
  543. {
  544. reason = "";
  545. if (CheckToPostMessage((int)AlignerMsg.Stop, null))
  546. return true;
  547. reason = $"{Name} is in {AlignerState}";
  548. return false;
  549. }
  550. public bool AlignerAlign(object[] param, out string reason)
  551. {
  552. reason = "";
  553. if (CheckToPostMessage((int)AlignerMsg.Align, param))
  554. {
  555. IsBusy = true;
  556. return true;
  557. }
  558. reason = $"{Name} is in {AlignerState}";
  559. return false;
  560. }
  561. public bool AlignerSetWaferSize(object[] param, out string reason)
  562. {
  563. reason = "";
  564. if (CheckToPostMessage((int)AlignerMsg.SetParameters, param))
  565. {
  566. IsBusy = true;
  567. return true;
  568. }
  569. reason = $"{Name} is in {AlignerState}";
  570. return false;
  571. }
  572. public bool AlignerSetWaferSize(WaferSize wz,out string reason)
  573. {
  574. reason = "";
  575. if (CheckToPostMessage((int)AlignerMsg.SetParameters, new object[] { "WaferSize",wz }))
  576. {
  577. IsBusy = true;
  578. return true;
  579. }
  580. reason = $"{Name} is in {AlignerState}";
  581. return false;
  582. }
  583. public bool Align(double angle, out string reason)
  584. {
  585. reason = "";
  586. double anglevalue = angle + CompensationAngleValue;
  587. if (CheckToPostMessage((int)AlignerMsg.Align, new object[] { anglevalue }))
  588. {
  589. IsBusy = true;
  590. return true;
  591. }
  592. reason = $"{Name} is in {AlignerState}";
  593. return false;
  594. }
  595. public bool LiftDown(out string reason)
  596. {
  597. reason = "";
  598. if (CheckToPostMessage((int)AlignerMsg.LiftDown, null))
  599. {
  600. IsBusy = true;
  601. return true;
  602. }
  603. reason = $"{Name} is in {AlignerState}";
  604. return false;
  605. }
  606. public bool LiftUp(out string reason)
  607. {
  608. reason = "";
  609. if (CheckToPostMessage((int)AlignerMsg.LiftUp, null))
  610. {
  611. IsBusy = true;
  612. return true;
  613. }
  614. reason = $"{Name} is in {AlignerState}";
  615. return false;
  616. }
  617. public bool Release(int v, out string reason)
  618. {
  619. reason = "";
  620. if (CheckToPostMessage((int)AlignerMsg.UnGrip, new object[] { v}))
  621. {
  622. IsBusy = true;
  623. return true;
  624. }
  625. reason = $"{Name} is in {AlignerState}";
  626. return false;
  627. }
  628. public bool Grip(int v, out string reason)
  629. {
  630. reason = "";
  631. if (CheckToPostMessage((int)AlignerMsg.Grip, new object[] { v }))
  632. {
  633. IsBusy = true;
  634. return true;
  635. }
  636. reason = $"{Name} is in {AlignerState}";
  637. return false;
  638. }
  639. public bool Clear(out string reason)
  640. {
  641. reason = "";
  642. if (CheckToPostMessage((int)AlignerMsg.Clear, null))
  643. {
  644. return true;
  645. }
  646. reason = $"{Name} is in {AlignerState}";
  647. return false;
  648. }
  649. public bool Init(out string reason)
  650. {
  651. reason = "";
  652. if (CheckToPostMessage((int)AlignerMsg.StartInit, null))
  653. {
  654. IsBusy = true;
  655. return true;
  656. }
  657. reason = $"{Name} is in {AlignerState}";
  658. return false;
  659. }
  660. public bool Home(out string reason)
  661. {
  662. reason = "";
  663. if (CheckToPostMessage((int)AlignerMsg.StartInit, null))
  664. {
  665. IsBusy = true;
  666. return true;
  667. }
  668. reason = $"{Name} is in {AlignerState}";
  669. return false;
  670. }
  671. public bool HomeModule(out string reason)
  672. {
  673. reason = "";
  674. if (CheckToPostMessage((int)AlignerMsg.StartHome, null))
  675. {
  676. IsBusy = true;
  677. return true;
  678. }
  679. reason = $"{Name} is in {AlignerState}";
  680. return false;
  681. }
  682. public bool SetMaintenanceMode(bool ismaintain)
  683. {
  684. if (ismaintain)
  685. return CheckToPostMessage((int)AlignerMsg.StartMaintenance, null);
  686. else
  687. return CheckToPostMessage((int)AlignerMsg.CompleteMaintenance, null);
  688. }
  689. private void SubscribeDataVariable()
  690. {
  691. DATA.Subscribe($"{Name}.State", () => AlignerState.ToString());
  692. DATA.Subscribe($"{Name}.AlignerState", () => AlignerState.ToString());
  693. DATA.Subscribe($"{Name}.Busy", () => AlignerState != AlignerStateEnum.Idle && AlignerState != AlignerStateEnum.Init);
  694. DATA.Subscribe($"{Name}.ErrorCode", () => ErrorCode);
  695. DATA.Subscribe($"{Name}.Error", () => AlignerState == AlignerStateEnum.Error);
  696. DATA.Subscribe($"{Name}.Notch", () => CurrentNotch);
  697. DATA.Subscribe($"{Name}.WaferOnAligner", () => IsWaferPresent(0));
  698. DATA.Subscribe($"{Name}.WaferSize", () => GetCurrentWaferSize().ToString());
  699. // string str = string.Empty;
  700. //
  701. DATA.Subscribe($"{Module}.{Name}.State", () => AlignerState.ToString());
  702. DATA.Subscribe($"{Module}.{Name}.Axis1Postion", () => PositionAxis1.ToString());
  703. DATA.Subscribe($"{Module}.{Name}.Axis2Postion", () => PositionAxis2.ToString());
  704. DATA.Subscribe($"{Module}.{Name}.Axis3Postion", () => PositionAxis3.ToString());
  705. DATA.Subscribe($"{Module}.{Name}.Axis4Postion", () => PositionAxis4.ToString());
  706. DATA.Subscribe($"{Module}.{Name}.Axis5Postion", () => PositionAxis5.ToString());
  707. DATA.Subscribe($"{Module}.{Name}.AlignerErrorCode", () => ErrorCode ?? ErrorCode.ToString());
  708. EV.Subscribe(new EventItem("Event", EventAlignerStartAlign, $"{RobotModuleName} start aligning wafer.", EventLevel.Information, Aitex.Core.RT.Event.EventType.EventUI_Notify));
  709. EV.Subscribe(new EventItem("Event", EventAlignerCompleteAlign, $"{RobotModuleName} complete aligning wafer.", EventLevel.Information, Aitex.Core.RT.Event.EventType.EventUI_Notify));
  710. EV.Subscribe(new EventItem("Alarm", AlarmAlignTimeout, "Aligner align wafer time out.", EventLevel.Alarm, Aitex.Core.RT.Event.EventType.EventUI_Notify));
  711. EV.Subscribe(new EventItem("Alarm", AlarmAlignFailed, "Aligner aligner wafer failed.", EventLevel.Alarm, Aitex.Core.RT.Event.EventType.EventUI_Notify));
  712. EV.Subscribe(new EventItem("Alarm", AlarmVerifyLaserMarkFailed, "Aligner verify laser mark failed.", EventLevel.Alarm, Aitex.Core.RT.Event.EventType.EventUI_Notify));
  713. EV.Subscribe(new EventItem("Alarm", AlarmVerifyLaserMarkSlotNoFailed, "Aligner verify laser mark slot no failed.", EventLevel.Alarm, Aitex.Core.RT.Event.EventType.EventUI_Notify));
  714. EV.Subscribe(new EventItem("Alarm", AlarmVerifyLaserMarkLengthFailed, "Aligner verify laser mark length failed.", EventLevel.Alarm, Aitex.Core.RT.Event.EventType.EventUI_Notify));
  715. EV.Subscribe(new EventItem("Alarm", AlarmVerifyLaserMarkWithHostFailed, "Aligner verify laser mark with host failed.", EventLevel.Alarm, Aitex.Core.RT.Event.EventType.EventUI_Notify));
  716. EV.Subscribe(new EventItem("Alarm", AlarmVerifyLaserMarkTimeout, "Aligner wait ocr manual verification timeout.", EventLevel.Alarm, Aitex.Core.RT.Event.EventType.EventUI_Notify));
  717. EV.Subscribe(new EventItem("Alarm", AlarmSlotInLaserMarkIsOccuppied, "The slot in Laser Mark is occuppied.", EventLevel.Alarm, Aitex.Core.RT.Event.EventType.EventUI_Notify));
  718. EV.Subscribe(new EventItem("Alarm", AlarmWaferInformationError, "The wafer sensor status doesn't match wafer information.", EventLevel.Alarm, Aitex.Core.RT.Event.EventType.EventUI_Notify));
  719. }
  720. private void BuildTransitionTable()
  721. {
  722. fsm = new StateMachine<AlignerBaseDevice>(Name + ".StateMachine", (int)AlignerStateEnum.Init, 50);
  723. //Init sequence
  724. AnyStateTransition(AlignerMsg.ERROR, fError, AlignerStateEnum.Error);
  725. AnyStateTransition(AlignerMsg.Reset, fReset, AlignerStateEnum.Resetting);
  726. AnyStateTransition(AlignerMsg.Stop, fStop, AlignerStateEnum.Stopped);
  727. AnyStateTransition(AlignerMsg.Abort, FsmAbort, AlignerStateEnum.Init);
  728. AnyStateTransition(AlignerMsg.StartMaintenance, fStartMaintenance, AlignerStateEnum.Maintenance);
  729. Transition(AlignerStateEnum.Maintenance, FSM_MSG.TIMER, fMonitorMaintenance, AlignerStateEnum.Idle);
  730. Transition(AlignerStateEnum.Maintenance, AlignerMsg.CompleteMaintenance, fCompleteMaintenance, AlignerStateEnum.Idle);
  731. Transition(AlignerStateEnum.Resetting, AlignerMsg.ActionDone, fResetComplete, AlignerStateEnum.Idle);
  732. Transition(AlignerStateEnum.Resetting, FSM_MSG.TIMER, fMonitorReset, AlignerStateEnum.Idle);
  733. Transition(AlignerStateEnum.Init, AlignerMsg.StartInit, fStartInit, AlignerStateEnum.Initializing);
  734. Transition(AlignerStateEnum.Idle, AlignerMsg.StartInit, fStartInit, AlignerStateEnum.Initializing);
  735. Transition(AlignerStateEnum.Error, AlignerMsg.StartInit, fStartInit, AlignerStateEnum.Initializing);
  736. Transition(AlignerStateEnum.Init, AlignerMsg.InitComplete, fInitComplete, AlignerStateEnum.Idle);
  737. Transition(AlignerStateEnum.Error, AlignerMsg.InitComplete, fInitComplete, AlignerStateEnum.Idle);
  738. Transition(AlignerStateEnum.Initializing, AlignerMsg.InitComplete, fInitComplete, AlignerStateEnum.Idle);
  739. Transition(AlignerStateEnum.Initializing, AlignerMsg.ActionDone, fInitComplete, AlignerStateEnum.Idle);
  740. Transition(AlignerStateEnum.Initializing, FSM_MSG.TIMER, fMonitorInit, AlignerStateEnum.Idle);
  741. Transition(AlignerStateEnum.Init, AlignerMsg.StartHome, fStartHome, AlignerStateEnum.Homing);
  742. Transition(AlignerStateEnum.Idle, AlignerMsg.StartHome, fStartHome, AlignerStateEnum.Homing);
  743. Transition(AlignerStateEnum.Error, AlignerMsg.StartHome, fStartHome, AlignerStateEnum.Homing);
  744. Transition(AlignerStateEnum.Init, AlignerMsg.HomeComplete, fHomeComplete, AlignerStateEnum.Idle);
  745. Transition(AlignerStateEnum.Error, AlignerMsg.HomeComplete, fHomeComplete, AlignerStateEnum.Idle);
  746. Transition(AlignerStateEnum.Homing, AlignerMsg.HomeComplete, fHomeComplete, AlignerStateEnum.Idle);
  747. Transition(AlignerStateEnum.Homing, AlignerMsg.ActionDone, fHomeComplete, AlignerStateEnum.Idle);
  748. Transition(AlignerStateEnum.Homing, FSM_MSG.TIMER, fMonitorHome, AlignerStateEnum.Idle);
  749. Transition(AlignerStateEnum.Error, AlignerMsg.Clear, fClear, AlignerStateEnum.Init);
  750. Transition(AlignerStateEnum.Error, AlignerMsg.ResetToReady, fResetToReady, AlignerStateEnum.Idle);
  751. Transition(AlignerStateEnum.Idle, AlignerMsg.SetParameters, fStartSetParameters, AlignerStateEnum.SettingServos);
  752. Transition(AlignerStateEnum.SettingServos, AlignerMsg.SetParametersComplete, fSetComplete, AlignerStateEnum.Idle);
  753. Transition(AlignerStateEnum.SettingServos, AlignerMsg.ActionDone, fSetComplete, AlignerStateEnum.Idle);
  754. Transition(AlignerStateEnum.SettingServos, FSM_MSG.TIMER, fMonitorSetParamter, AlignerStateEnum.Idle);
  755. Transition(AlignerStateEnum.Idle, AlignerMsg.ReadData, fStartReadData, AlignerStateEnum.ReadingData);
  756. Transition(AlignerStateEnum.ReadingData, AlignerMsg.ActionDone, null, AlignerStateEnum.Idle);
  757. Transition(AlignerStateEnum.ReadingData, FSM_MSG.TIMER, fMonitorReadData, AlignerStateEnum.Idle);
  758. Transition(AlignerStateEnum.Idle, AlignerMsg.Grip, fStartGrip, AlignerStateEnum.Gripping);
  759. Transition(AlignerStateEnum.Gripping, AlignerMsg.GripComplete, fGripComplete, AlignerStateEnum.Idle);
  760. Transition(AlignerStateEnum.Gripping, AlignerMsg.ActionDone, fGripComplete, AlignerStateEnum.Idle);
  761. Transition(AlignerStateEnum.Gripping, FSM_MSG.TIMER, fMonitorGrip, AlignerStateEnum.Idle);
  762. Transition(AlignerStateEnum.Idle, AlignerMsg.UnGrip, fStartUnGrip, AlignerStateEnum.UnGripping);
  763. Transition(AlignerStateEnum.UnGripping, AlignerMsg.UnGripComplete, fUnGripComplete, AlignerStateEnum.Idle);
  764. Transition(AlignerStateEnum.UnGripping, AlignerMsg.ActionDone, fUnGripComplete, AlignerStateEnum.Idle);
  765. Transition(AlignerStateEnum.UnGripping, FSM_MSG.TIMER, fMonitorUnGrip, AlignerStateEnum.Idle);
  766. Transition(AlignerStateEnum.Idle, AlignerMsg.LiftUp, fStartLiftup, AlignerStateEnum.LiftingUp);
  767. Transition(AlignerStateEnum.LiftingUp, AlignerMsg.LiftUpComplete, fLiftupComplete, AlignerStateEnum.Idle);
  768. Transition(AlignerStateEnum.LiftingUp, AlignerMsg.ActionDone, fLiftupComplete, AlignerStateEnum.Idle);
  769. Transition(AlignerStateEnum.LiftingUp, FSM_MSG.TIMER, fMonitorLiftup, AlignerStateEnum.Idle);
  770. Transition(AlignerStateEnum.Idle, AlignerMsg.LiftDown, fStartLiftdown, AlignerStateEnum.LiftingDown);
  771. Transition(AlignerStateEnum.LiftingDown, AlignerMsg.LiftDownComplete, fLiftdownComplete, AlignerStateEnum.Idle);
  772. Transition(AlignerStateEnum.LiftingDown, AlignerMsg.ActionDone, fLiftdownComplete, AlignerStateEnum.Idle);
  773. Transition(AlignerStateEnum.LiftingDown, FSM_MSG.TIMER, fMonitorLiftdown, AlignerStateEnum.Idle);
  774. Transition(AlignerStateEnum.Idle, AlignerMsg.Align, fStartAlign, AlignerStateEnum.Aligning);
  775. Transition(AlignerStateEnum.Aligning, AlignerMsg.AlignComplete, fAlignComplete, AlignerStateEnum.Idle);
  776. Transition(AlignerStateEnum.Aligning, AlignerMsg.ActionDone, fAlignComplete, AlignerStateEnum.Idle);
  777. Transition(AlignerStateEnum.Aligning, FSM_MSG.TIMER, fMonitorAligning, AlignerStateEnum.Idle);
  778. Transition(AlignerStateEnum.Idle, AlignerMsg.PrepareAccept, fStartPrepareAccept, AlignerStateEnum.PrepareAccept);
  779. Transition(AlignerStateEnum.PrepareAccept, AlignerMsg.PrepareAcceptComplete, fPrepareAcceptComplete, AlignerStateEnum.Idle);
  780. Transition(AlignerStateEnum.PrepareAccept, AlignerMsg.ActionDone, fPrepareAcceptComplete, AlignerStateEnum.Idle);
  781. Transition(AlignerStateEnum.PrepareAccept, FSM_MSG.TIMER, fMonitorPrepareAccept, AlignerStateEnum.Idle);
  782. }
  783. protected virtual bool fMonitorPrepareAccept(object[] param)
  784. {
  785. return false;
  786. }
  787. protected virtual bool fPrepareAcceptComplete(object[] param)
  788. {
  789. return true;
  790. }
  791. protected virtual bool fStartPrepareAccept(object[] param)
  792. {
  793. return true ;
  794. }
  795. protected virtual bool fMonitorHome(object[] param)
  796. {
  797. return false;
  798. }
  799. protected virtual bool fHomeComplete(object[] param)
  800. {
  801. return true; ;
  802. }
  803. protected virtual bool fStartHome(object[] param)
  804. {
  805. return true;
  806. }
  807. public virtual bool IsWaferPresent(int slotindex)
  808. {
  809. return WaferManager.Instance.CheckHasWafer(RobotModuleName, slotindex);
  810. }
  811. public virtual RobotArmWaferStateEnum GetWaferState(int slotindex=0)
  812. {
  813. if (WaferManager.Instance.CheckHasWafer(RobotModuleName, slotindex) != IsWaferPresent(slotindex))
  814. {
  815. return RobotArmWaferStateEnum.Error;
  816. }
  817. return IsWaferPresent(slotindex)? RobotArmWaferStateEnum.Present: RobotArmWaferStateEnum.Absent;
  818. }
  819. protected virtual bool fStartMaintenance(object[] param)
  820. {
  821. return true;
  822. }
  823. protected virtual bool fMonitorMaintenance(object[] param)
  824. {
  825. return false;
  826. }
  827. protected virtual bool fCompleteMaintenance(object[] param)
  828. {
  829. return true;
  830. }
  831. protected abstract bool fStartLiftup(object[] param);
  832. protected virtual bool fLiftupComplete(object[] param)
  833. {
  834. return true;
  835. }
  836. protected virtual bool fMonitorLiftup(object[] param)
  837. {
  838. return false;
  839. }
  840. protected abstract bool fStartLiftdown(object[] param);
  841. protected virtual bool fLiftdownComplete(object[] param)
  842. {
  843. return true ;
  844. }
  845. protected virtual bool fMonitorLiftdown(object[] param)
  846. {
  847. return false;
  848. }
  849. protected abstract bool fStartAlign(object[] param);
  850. private bool fAlignComplete(object[] param)
  851. {
  852. return true;
  853. }
  854. protected virtual bool fMonitorAligning(object[] param)
  855. {
  856. return false;
  857. }
  858. protected virtual bool fMonitorUnGrip(object[] param)
  859. {
  860. return false;
  861. }
  862. protected virtual bool fMonitorGrip(object[] param)
  863. {
  864. return false;
  865. }
  866. protected virtual bool fMoveComplete(object[] param)
  867. {
  868. return true;
  869. }
  870. protected virtual bool fStartMove(object[] param)
  871. {
  872. return true;
  873. }
  874. protected virtual bool fMonitorSetParamter(object[] param)
  875. {
  876. return false;
  877. }
  878. protected virtual bool fMonitorReadData(object[] param)
  879. {
  880. return false;
  881. }
  882. protected virtual bool fMonitorReset(object[] param)
  883. {
  884. return false;
  885. }
  886. protected virtual bool fMonitorGoTo(object[] param)
  887. {
  888. return false;
  889. }
  890. protected virtual bool fMonitorMap(object[] param)
  891. {
  892. return false;
  893. }
  894. protected virtual bool fMonitorPlace(object[] param)
  895. {
  896. return false;
  897. }
  898. protected virtual bool fMonitorSwap(object[] param)
  899. {
  900. return false;
  901. }
  902. protected virtual bool fMonitorPick(object[] param)
  903. {
  904. return false;
  905. }
  906. protected virtual bool fMonitorInit(object[] param)
  907. {
  908. return false;
  909. }
  910. protected abstract bool fStop(object[] param);
  911. protected abstract bool FsmAbort(object[] param);
  912. protected bool fResetComplete(object[] param)
  913. {
  914. IsBusy = false;
  915. return true;
  916. }
  917. protected abstract bool fClear(object[] param);
  918. protected virtual bool fSetComplete(object[] param)
  919. {
  920. IsBusy = false;
  921. return true;
  922. }
  923. protected abstract bool fStartReadData(object[] param);
  924. protected abstract bool fStartSetParameters(object[] param);
  925. protected abstract bool fStartUnGrip(object[] param);
  926. protected abstract bool fStartGrip(object[] param);
  927. protected abstract bool fResetToReady(object[] param);
  928. protected abstract bool fReset(object[] param);
  929. protected abstract bool fStartInit(object[] param);
  930. protected abstract bool fError(object[] param);
  931. protected virtual bool fUnGripComplete(object[] param)
  932. {
  933. IsBusy = false;
  934. return true;
  935. }
  936. protected virtual bool fGripComplete(object[] param)
  937. {
  938. IsBusy = false;
  939. return true;
  940. }
  941. protected virtual bool fInitComplete(object[] param)
  942. {
  943. IsBusy = false;
  944. return true;
  945. }
  946. public AlignerStateEnum AlignerState { get => (AlignerStateEnum)fsm.State; }
  947. public string Module { get; set; }
  948. public string Name { get; set; }
  949. public ModuleName RobotModuleName { get; private set; }
  950. public ModuleName CurrentInteractModule { get; private set; }
  951. public virtual bool IsNeedRelease
  952. {
  953. get
  954. {
  955. return false;
  956. }
  957. }
  958. public virtual bool IsNeedPrepareBeforePlaceWafer()
  959. {
  960. return false;
  961. }
  962. public virtual void Monitor()
  963. {
  964. return;
  965. }
  966. public virtual void Reset()
  967. {
  968. }
  969. public virtual void OnError(string errortext)
  970. {
  971. EV.PostAlarmLog(Module, $"{Name} occurred error: {errortext}");
  972. IsBusy = false;
  973. CheckToPostMessage((int)AlignerMsg.ERROR, new object[] { errortext });
  974. }
  975. public virtual bool SetParameters(object[] param)
  976. {
  977. return CheckToPostMessage((int)AlignerMsg.SetParameters, param);
  978. }
  979. public virtual bool PrepareAcceptWafer()
  980. {
  981. if(CheckToPostMessage((int)AlignerMsg.PrepareAccept,null))
  982. {
  983. IsBusy = true;
  984. return true;
  985. }
  986. return false;
  987. }
  988. public virtual bool HomeAllAxes(out string reason)
  989. {
  990. reason = string.Empty;
  991. return true;
  992. }
  993. public virtual bool QueryWaferMap(ModuleName module, out string reason)
  994. {
  995. reason = "";
  996. return true;
  997. }
  998. public virtual bool OnActionDone(object[] param)
  999. {
  1000. IsBusy = false;
  1001. return CheckToPostMessage((int)AlignerMsg.ActionDone, new object[] { "ActionDone" });
  1002. }
  1003. public bool CheckToPostMessage(int msg, params object[] args)
  1004. {
  1005. if (!fsm.FindTransition(fsm.State, msg))
  1006. {
  1007. if (msg != 7)
  1008. EV.PostWarningLog(Name, $"{Name} is in { (AlignerStateEnum)fsm.State} state,can not do {(AlignerMsg)msg}");
  1009. return false;
  1010. }
  1011. CurrentParamter = args;
  1012. fsm.PostMsg(msg, args);
  1013. return true;
  1014. }
  1015. public bool CheckToPostMessage(AlignerMsg msg, params object[] args)
  1016. {
  1017. if (!fsm.FindTransition(fsm.State, (int)msg))
  1018. {
  1019. if ((int)msg != 7)
  1020. EV.PostWarningLog(Name, $"{Name} is in { (AlignerStateEnum)fsm.State} state,can not do {(AlignerMsg)msg}");
  1021. return false;
  1022. }
  1023. CurrentParamter = args;
  1024. fsm.PostMsg((int)msg, args);
  1025. return true;
  1026. }
  1027. public bool Check(int msg, out string reason, params object[] args)
  1028. {
  1029. if (!fsm.FindTransition(fsm.State, msg))
  1030. {
  1031. reason = String.Format("{0} is in {1} state,can not do {2}", Name, (AlignerStateEnum)fsm.State, (AlignerMsg)msg);
  1032. return false;
  1033. }
  1034. CurrentParamter = args;
  1035. reason = "";
  1036. return true;
  1037. }
  1038. }
  1039. }