PMN2Purge.cs 38 KB

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  1. using Aitex.Core.RT.DataCenter;
  2. using Aitex.Core.RT.Device;
  3. using Aitex.Core.RT.Device.Unit;
  4. using Aitex.Core.RT.IOCore;
  5. using Aitex.Core.RT.Log;
  6. using Aitex.Core.RT.SCCore;
  7. using Aitex.Core.Util;
  8. using DocumentFormat.OpenXml.Packaging;
  9. using DocumentFormat.OpenXml.Spreadsheet;
  10. using FurnaceRT.Devices;
  11. using FurnaceRT.Equipments.PMs.Devices;
  12. using FurnaceRT.Extraction;
  13. using MECF.Framework.Common.CommonData.SorterDefines;
  14. using MECF.Framework.Common.Equipment;
  15. using MECF.Framework.Common.Tolerance;
  16. using MECF.Framework.Common.Utilities;
  17. using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.LoadPorts.TDK;
  18. using System;
  19. using System.Collections.Generic;
  20. using System.Diagnostics;
  21. using System.Linq;
  22. namespace FurnaceRT.Equipments.PMs
  23. {
  24. /// <summary>
  25. /// 分布类 定义N2Purge的执行逻辑
  26. /// </summary>
  27. public partial class PMModule
  28. {
  29. private R_TRIG _trigN2UpRD = new R_TRIG();
  30. private R_TRIG _trigN2DownRD = new R_TRIG();
  31. private R_TRIG _trigN2AirUpRD = new R_TRIG();
  32. private R_TRIG _trigN2AirDownRD = new R_TRIG();
  33. private R_TRIG _trigN2AirDownTwoRD = new R_TRIG();
  34. private R_TRIG _trigSelectN2PurgeModeD = new R_TRIG();
  35. private FilterChecker _filterChecker = new FilterChecker();
  36. private R_TRIG tank1_TRIG = new R_TRIG();
  37. private R_TRIG tank2_TRIG = new R_TRIG();
  38. private Dictionary<string, Tuple<R_TRIG, List<Tuple<IDevice, string>>>> _n2PurgeSequenceAction;
  39. private Dictionary<string, Func<bool>> _n2PurgeSequenceStatus;
  40. private Dictionary<string, R_TRIG> _rTrigDict;
  41. private N2PurgeModeEnum _N2PurgeMode = N2PurgeModeEnum.Auto;
  42. private double _n2PurgeData = 20;
  43. private double _n2ToAirData = 185000;
  44. private N2PurgeModeEnum _currentPhase;
  45. private double _manualPhase2StabilityTime = 0;
  46. private double _manualPhase4StabilityTime = 0;
  47. private bool _enableAbortN2purge = true;
  48. private int _phase1CycleCount = 0;
  49. private int _phase1CycleCountSC = 0;
  50. private bool _canSwitchToPhase2 = true;
  51. private Dictionary<string, Stopwatch> _allTimeDict = new Dictionary<string, Stopwatch>();
  52. private void InitN2PurgeData()
  53. {
  54. DATA.Subscribe($"{Module}.N2PurgeLimitData", () => GetN2PurgeLimitData());
  55. DATA.Subscribe($"{Module}.O2DensityData", () => ConcentrationO2.Value.ToString("f3"), SubscriptionAttribute.FLAG.IgnoreSaveDB);
  56. DATA.Subscribe($"{Module}.CheckO2Location", () => GetCheckO2Location(), SubscriptionAttribute.FLAG.IgnoreSaveDB);
  57. DATA.Subscribe($"{Module}.O2SetCheckSetPoint", () => GetO2SetCheckSetPoint(), SubscriptionAttribute.FLAG.IgnoreSaveDB);
  58. DATA.Subscribe($"{Module}.N2PurgeMode", () => SC.ContainsItem("PM1.SelectN2PurgeMode") ? SC.GetStringValue("PM1.SelectN2PurgeMode") : "");
  59. var selectN2PurgeMode = SC.ContainsItem("PM1.SelectN2PurgeMode") ? SC.GetStringValue("PM1.SelectN2PurgeMode") : "";
  60. if (!string.IsNullOrEmpty(selectN2PurgeMode))
  61. {
  62. if (selectN2PurgeMode != _N2PurgeMode.ToString())
  63. {
  64. SetN2PurgeModeAction(selectN2PurgeMode);
  65. }
  66. }
  67. var currentPhase = SC.ContainsItem("PM1.SelectN2PurgeModePhase") ? SC.GetStringValue("PM1.SelectN2PurgeModePhase") : "";
  68. if (!string.IsNullOrEmpty(currentPhase))
  69. {
  70. var enumCurrentPhase = (N2PurgeModeEnum)Enum.Parse(typeof(N2PurgeModeEnum), currentPhase);
  71. _currentPhase = enumCurrentPhase;
  72. }
  73. }
  74. private void InitN2PurgeConfigData()
  75. {
  76. _n2PurgeData = SC.ContainsItem($"System.N2PurgeData") ? SC.GetValue<double>("System.N2PurgeData") : 20;
  77. _n2ToAirData = SC.ContainsItem($"System.N2PurgeData") ? SC.GetValue<double>("System.N2ToAirData") : 185000;
  78. _enableAbortN2purge = SC.ContainsItem($"PM1.N2Purge.EnableAbortN2purge") ? SC.GetValue<bool>("PM1.N2Purge.EnableAbortN2purge") : false;
  79. _manualPhase2StabilityTime = SC.ContainsItem($"PM1.N2Purge.Manual_phase2.StabilityTime") ? SC.GetValue<double>("PM1.N2Purge.Manual_phase2.StabilityTime") : 0;
  80. _manualPhase4StabilityTime = SC.ContainsItem($"PM1.N2Purge.Manual_phase4.StabilityTime") ? SC.GetValue<double>("PM1.N2Purge.Manual_phase4.StabilityTime") : 0;
  81. _phase1CycleCountSC = SC.ContainsItem($"PM1.N2Purge.Manual_phase1.CycleCount") ? SC.GetValue<int>("PM1.N2Purge.Manual_phase1.CycleCount") : 0;
  82. _n2PurgeSequenceAction = ExtractionMethods.GetN2PurgeSequenceAction();
  83. _n2PurgeSequenceStatus = new Dictionary<string, Func<bool>>()
  84. {
  85. {"N2PurgeAIRTo20PPM",()=> GetN2PurgeAIRTo20PPMStatus()},
  86. {"N2PurgeUnder20PPM",()=> GetN2PurgeUnder20PPMStatus()},
  87. {"AIR",()=> GetN2PurgeAIRStatus()},
  88. {"DoorOpen",()=> GetN2PurgeDoorOpenStatus()},
  89. {"Foup1",()=> GetN2PurgeFoup1Status()},
  90. {"Foup2",()=> GetN2PurgeFoup2Status()},
  91. {N2PurgeModeEnum.Manual_phase1.ToString(),()=> CheckN2PurgePhase1() },
  92. {N2PurgeModeEnum.Manual_phase2.ToString(),()=> CheckN2PurgePhase2()},
  93. {N2PurgeModeEnum.Manual_phase3.ToString(),()=> CheckN2PurgePhase3() },
  94. {N2PurgeModeEnum.Manual_phase4.ToString(),()=> CheckN2PurgePhase4() },
  95. {N2PurgeModeEnum.Manual_phase5.ToString(),()=> CheckN2PurgePhase5() },
  96. };
  97. _allTimeDict = new Dictionary<string, Stopwatch>()
  98. {
  99. {N2PurgeModeEnum.Manual_phase1.ToString(),new Stopwatch() },
  100. {N2PurgeModeEnum.Manual_phase2.ToString(),new Stopwatch()},
  101. {N2PurgeModeEnum.Manual_phase3.ToString(),new Stopwatch()},
  102. {N2PurgeModeEnum.Manual_phase4.ToString(),new Stopwatch() },
  103. {N2PurgeModeEnum.Manual_phase5.ToString(),new Stopwatch() }
  104. };
  105. _rTrigDict = new Dictionary<string, R_TRIG>();
  106. }
  107. private void MonitorN2Purge()
  108. {
  109. var selectN2PurgeMode = SC.ContainsItem("PM1.SelectN2PurgeMode") ? SC.GetStringValue("PM1.SelectN2PurgeMode") : "";
  110. if (string.IsNullOrEmpty(selectN2PurgeMode))
  111. {
  112. return;
  113. }
  114. SetN2PurgeModeAction(selectN2PurgeMode);
  115. }
  116. private void MonitorTank1LeakAgeExec()
  117. {
  118. tank1_TRIG.CLK = SensorHCDTANKH != null && SensorHCDTANKH.Value;
  119. if (tank1_TRIG.Q)
  120. {
  121. SetHREFEnable(new object[1] { false });
  122. ValveAV113?.TurnValve(false, out _);
  123. }
  124. }
  125. public bool SetHREFEnable(object[] param)
  126. {
  127. if (param == null || param.Length <= 0)
  128. return true;
  129. bool.TryParse(param[0].ToString(), out bool isEnable);
  130. if (isEnable)
  131. {
  132. if (SensorHREFILK != null && SensorHREFILK.Value)
  133. {
  134. TrigSIREFON?.CheckAndSet(isEnable, out _);
  135. }
  136. }
  137. else
  138. {
  139. TrigSIREFON?.CheckAndSet(isEnable, out _);
  140. }
  141. return true;
  142. }
  143. private void MonitorTank2LeakAgeExec()
  144. {
  145. tank2_TRIG.CLK = SensorCSOURCETANKH != null && SensorCSOURCETANKH.Value;
  146. if (tank2_TRIG.Q)
  147. {
  148. SetCREFEnable(new object[1] { false });
  149. ValveAV121?.TurnValve(false, out _);
  150. }
  151. }
  152. public bool SetCREFEnable(object[] param)
  153. {
  154. if (param == null || param.Length <= 0)
  155. return true;
  156. bool.TryParse(param[0].ToString(), out bool isEnable);
  157. if (isEnable)
  158. {
  159. if (SensorCREFILK != null && SensorCREFILK.Value)
  160. {
  161. TrigCREFON?.CheckAndSet(isEnable, out _);
  162. }
  163. }
  164. else
  165. {
  166. TrigCREFON?.CheckAndSet(isEnable, out _);
  167. }
  168. return true;
  169. }
  170. /// <summary>
  171. /// TODO:这里展示数据的逻辑 不正确,待明确逻辑
  172. /// </summary>
  173. /// <returns></returns>
  174. private double GetN2PurgeLimitData()
  175. {
  176. if (_N2PurgeMode == N2PurgeModeEnum.N2PurgeMode)
  177. {
  178. if ((SensorO2DetectSideFIMS1 != null && SensorO2DetectSideFIMS1.Value) || (SensorO2DetectSideFIMS2 != null && SensorO2DetectSideFIMS2.Value))
  179. {
  180. return (float)SC.GetValue<double>("PM1.N2Purge.N2PurgeFOUPO2CheckSV");
  181. }
  182. return _n2PurgeData;
  183. }
  184. if (_N2PurgeMode == N2PurgeModeEnum.ATMMode)
  185. {
  186. return _n2ToAirData;
  187. }
  188. return ConcentrationO2.Value;
  189. }
  190. private void SetN2PurgeModeAction(string selectN2PurgeMode)
  191. {
  192. _N2PurgeMode = (N2PurgeModeEnum)Enum.Parse(typeof(N2PurgeModeEnum), selectN2PurgeMode);
  193. if (_N2PurgeMode == N2PurgeModeEnum.N2PurgeMode)
  194. {
  195. if (_currentPhase == N2PurgeModeEnum.Manual_phase1)
  196. {
  197. _filterChecker.CheckInterval = 3;
  198. _filterChecker.Monitor(CheckN2PurgePhase2());
  199. if (_filterChecker.Trig && _canSwitchToPhase2)
  200. {
  201. LOG.Info($" N2PurgeMode Trigger from Manual_phase1 to Manual_phase2,O2:{ConcentrationO2.Value}");
  202. SetN2PurgeValveData(N2PurgeModeEnum.Manual_phase2.ToString());
  203. }
  204. }
  205. else if (_currentPhase == N2PurgeModeEnum.Manual_phase2)
  206. {
  207. if (!_allTimeDict[N2PurgeModeEnum.Manual_phase2.ToString()].IsRunning && _canSwitchToPhase2)
  208. {
  209. _allTimeDict[N2PurgeModeEnum.Manual_phase2.ToString()].Restart();
  210. }
  211. var second = _allTimeDict[N2PurgeModeEnum.Manual_phase2.ToString()].Elapsed.TotalSeconds;
  212. if (second >= _manualPhase2StabilityTime)
  213. {
  214. if (CheckN2PurgePhase1())
  215. {
  216. LOG.Info($"N2PurgeMode Trigger Manual_phase1 was triggered {second} seconds later,O2:{ConcentrationO2.Value}");
  217. N2PurgeFaileAlarm.Set();
  218. _allTimeDict[N2PurgeModeEnum.Manual_phase2.ToString()].Restart();
  219. _allTimeDict[N2PurgeModeEnum.Manual_phase2.ToString()].Stop();
  220. _canSwitchToPhase2 = false;
  221. SetN2PurgeValveData(N2PurgeModeEnum.Manual_phase1.ToString());
  222. }
  223. if (CheckN2PurgePhase2())
  224. {
  225. LOG.Info($"N2PurgeMode Trigger Hold Manual_phase2 was triggered {second} seconds later,O2:{ConcentrationO2.Value}");
  226. _allTimeDict[N2PurgeModeEnum.Manual_phase2.ToString()].Restart();
  227. _allTimeDict[N2PurgeModeEnum.Manual_phase2.ToString()].Stop();
  228. _canSwitchToPhase2 = false;
  229. }
  230. }
  231. }
  232. else
  233. {
  234. if (CheckN2PurgePhase1())
  235. {
  236. LOG.Info($"N2PurgeMode Trigger Directly triggered Manual_phase1,O2:{ConcentrationO2.Value}");
  237. SetN2PurgeValveData(N2PurgeModeEnum.Manual_phase1.ToString());
  238. }
  239. else if (CheckN2PurgePhase2())
  240. {
  241. LOG.Info($"N2PurgeMode Trigger Directly triggered Manual_phase2,O2:{ConcentrationO2.Value}");
  242. SetN2PurgeValveData(N2PurgeModeEnum.Manual_phase2.ToString());
  243. }
  244. }
  245. }
  246. if (_N2PurgeMode == N2PurgeModeEnum.ATMMode)
  247. {
  248. if (_currentPhase == N2PurgeModeEnum.Manual_phase3)
  249. {
  250. var checkResult = CheckN2PurgePhase4();
  251. if (!_allTimeDict[N2PurgeModeEnum.Manual_phase4.ToString()].IsRunning)
  252. {
  253. _allTimeDict[N2PurgeModeEnum.Manual_phase4.ToString()].Restart();
  254. }
  255. var second = _allTimeDict[N2PurgeModeEnum.Manual_phase4.ToString()].Elapsed.TotalSeconds;
  256. if (second >= _manualPhase4StabilityTime && checkResult)
  257. {
  258. LOG.Info($"N2PurgeMode Trigger from Manual_phase3 to Manual_phase4 is triggered {second} seconds later,O2:{ConcentrationO2.Value}");
  259. SetN2PurgeValveData(N2PurgeModeEnum.Manual_phase4.ToString());
  260. _allTimeDict[N2PurgeModeEnum.Manual_phase4.ToString()].Restart();
  261. _allTimeDict[N2PurgeModeEnum.Manual_phase4.ToString()].Stop();
  262. }
  263. }
  264. else if (_currentPhase == N2PurgeModeEnum.Manual_phase4)
  265. {
  266. if (CheckN2PurgePhase5())
  267. {
  268. LOG.Info($"N2PurgeMode Trigger from Manual_phase4 to Manual_phase5,O2:{ConcentrationO2.Value}");
  269. SetN2PurgeValveData(N2PurgeModeEnum.Manual_phase5.ToString());
  270. }
  271. //if (CheckN2PurgePhase3( ))
  272. //{
  273. // LOG.Info($"N2PurgeMode Trigger from Manual_phase4 to Manual_phase3,O2:{o2Value}");
  274. // SetN2PurgeValveData(N2PurgeModeEnum.Manual_phase3.ToString());
  275. //}
  276. }
  277. else if (_currentPhase == N2PurgeModeEnum.Manual_phase5)
  278. {
  279. if (CheckN2PurgePhase4())
  280. {
  281. LOG.Info($"N2PurgeMode Trigger from Manual_phase5 to Manual_phase4,O2:{ConcentrationO2.Value}");
  282. SetN2PurgeValveData(N2PurgeModeEnum.Manual_phase4.ToString());
  283. }
  284. //if (CheckN2PurgePhase3( ))
  285. //{
  286. // LOG.Info($"N2PurgeMode Trigger from Manual_phase5 to Manual_phase3,O2:{o2Value}");
  287. // SetN2PurgeValveData(N2PurgeModeEnum.Manual_phase3.ToString());
  288. //}
  289. }
  290. else
  291. {
  292. if (CheckN2PurgePhase3())
  293. {
  294. LOG.Info($"N2PurgeMode Trigger Directly triggered Manual_phase3,O2:{ConcentrationO2.Value}");
  295. SetN2PurgeValveData(N2PurgeModeEnum.Manual_phase3.ToString());
  296. return;
  297. }
  298. if (CheckN2PurgePhase5())
  299. {
  300. LOG.Info($"N2PurgeMode Trigger Directly triggered Manual_phase5,O2:{ConcentrationO2.Value}");
  301. SetN2PurgeValveData(N2PurgeModeEnum.Manual_phase5.ToString());
  302. return;
  303. }
  304. if (CheckN2PurgePhase4())
  305. {
  306. LOG.Info($"N2PurgeMode Trigger Directly triggered Manual_phase4,O2:{ConcentrationO2.Value}");
  307. SetN2PurgeValveData(N2PurgeModeEnum.Manual_phase4.ToString());
  308. return;
  309. }
  310. }
  311. }
  312. if (_N2PurgeMode == N2PurgeModeEnum.ManualMode || _N2PurgeMode == N2PurgeModeEnum.Auto)
  313. {
  314. _currentPhase = _N2PurgeMode;
  315. }
  316. //switch (_N2PurgeMode)
  317. //{
  318. // case N2PurgeModeEnum.Auto:
  319. // // 自动模式下的操作
  320. // break;
  321. // case N2PurgeModeEnum.ManualMode:
  322. // break;
  323. // case N2PurgeModeEnum.N2PurgeMode:
  324. // ProcessPhase(_trigN2UpRD, N2PurgeModeEnum.Manual_phase1.ToString());
  325. // ProcessPhase(_trigN2DownRD, N2PurgeModeEnum.Manual_phase2.ToString(), _manualPhase2NeedCheck, (int)(_manualPhase2StabilityTime * 1000));
  326. // break;
  327. // case N2PurgeModeEnum.ATMMode:
  328. // ProcessPhase(_trigN2AirDownRD, N2PurgeModeEnum.Manual_phase3.ToString());
  329. // ProcessPhase(_trigN2AirUpRD, N2PurgeModeEnum.Manual_phase4.ToString(), _manualPhase4NeedCheck, (int)(_manualPhase4StabilityTime * 1000));
  330. // ProcessPhase(_trigN2AirDownTwoRD, N2PurgeModeEnum.Manual_phase5.ToString());
  331. // break;
  332. //}
  333. }
  334. bool CheckConditionInTime(string modeKey, int millisecondsTimeout, Func<bool> condition)
  335. {
  336. var stopwatch = _allTimeDict[modeKey];
  337. if (!_allTimeDict[modeKey].IsRunning)
  338. {
  339. _allTimeDict[modeKey].Restart();
  340. }
  341. while (stopwatch.ElapsedMilliseconds < millisecondsTimeout)
  342. {
  343. if (!_allTimeDict[modeKey].IsRunning)
  344. {
  345. return true;
  346. }
  347. if (!condition())
  348. {
  349. _allTimeDict[modeKey].Stop();
  350. _allTimeDict[modeKey].Reset();
  351. return false;
  352. }
  353. }
  354. if (stopwatch.ElapsedMilliseconds > millisecondsTimeout)
  355. {
  356. _allTimeDict[modeKey].Stop();
  357. _allTimeDict[modeKey].Reset();
  358. }
  359. return true;
  360. }
  361. private void ProcessPhase(R_TRIG r_TRIG, string modeKey, bool needCheck = false, int time = 0)
  362. {
  363. r_TRIG.CLK = needCheck ? (CheckConditionInTime(modeKey, time, () => _n2PurgeSequenceStatus[modeKey].Invoke())) : _n2PurgeSequenceStatus[modeKey].Invoke();
  364. if (r_TRIG.Q)
  365. {
  366. LOG.Info($"N2PurgeMode Trigger {modeKey}!,O2:{ConcentrationO2.Value},time:{_allTimeDict[modeKey].ElapsedMilliseconds}");
  367. SetN2PurgeValveData(modeKey);
  368. _allTimeDict[modeKey].Stop();
  369. _allTimeDict[modeKey].Reset();
  370. }
  371. }
  372. public void RestAllN2PrugeRD()
  373. {
  374. _trigN2AirDownRD.RST = false;
  375. _trigN2AirUpRD.RST = false;
  376. _trigN2DownRD.RST = false;
  377. _trigN2UpRD.RST = false;
  378. foreach (var item in _allTimeDict)
  379. {
  380. item.Value.Stop();
  381. item.Value.Reset();
  382. }
  383. _canSwitchToPhase2 = true;
  384. }
  385. private void SetN2PurgeValveData(string mode, string msg = "")
  386. {
  387. var value = _n2PurgeSequenceAction[mode];
  388. _currentPhase = (N2PurgeModeEnum)Enum.Parse(typeof(N2PurgeModeEnum), mode);
  389. if (SC.ContainsItem("PM1.SelectN2PurgeModePhase"))
  390. {
  391. SC.SetItemValue("PM1.SelectN2PurgeModePhase", mode);
  392. }
  393. foreach (var operateItem in value.Item2)
  394. {
  395. if (operateItem.Item1 is IoMFC)
  396. {
  397. var ioMFc = (operateItem.Item1 as IoMFC);
  398. { ioMFc.SetMfcValue(out _, 0, new object[] { float.Parse(operateItem.Item2.ToString()) }); }
  399. }
  400. if (operateItem.Item1 is IoValve)
  401. {
  402. var ioValve = (operateItem.Item1 as IoValve);
  403. ioValve.TurnValve(bool.Parse(operateItem.Item2), out _);
  404. }
  405. if (operateItem.Item1 is IoTrigger)
  406. {
  407. var ioTrigger = (operateItem.Item1 as IoTrigger);
  408. ioTrigger.CheckAndSet(bool.Parse(operateItem.Item2), out _);
  409. }
  410. }
  411. }
  412. private bool SetN2PurgeMode(out string reason, int time, object[] param)
  413. {
  414. reason = string.Empty;
  415. var mode = param[0].ToString();
  416. _N2PurgeMode = (N2PurgeModeEnum)Enum.Parse(typeof(N2PurgeModeEnum), mode);
  417. if (SC.ContainsItem("PM1.SelectN2PurgeMode"))
  418. {
  419. SC.SetItemValue("PM1.SelectN2PurgeMode", mode);
  420. }
  421. RestAllN2PrugeRD();
  422. return true;
  423. }
  424. /// <summary>
  425. /// 获取当前O2检测位置的设定值
  426. /// TODO:这里展示数据的逻辑也不正确,待明确逻辑
  427. /// </summary>
  428. /// <returns></returns>
  429. private string GetO2SetCheckSetPoint()
  430. {
  431. if (SensorO2DetectSideLA != null && SensorO2DetectSideLA.Value)
  432. {
  433. var key = "PM1.N2Purge.N2PurgeLAO2CheckSV";
  434. if (SC.ContainsItem(key))
  435. return SC.GetValue<double>(key).ToString("f3");
  436. }
  437. if ((SensorO2DetectSideFIMS1 != null && SensorO2DetectSideFIMS1.Value) || (SensorO2DetectSideFIMS2 != null && SensorO2DetectSideFIMS2.Value))
  438. {
  439. var key = "PM1.N2Purge.N2PurgeFOUPO2CheckSV";
  440. if (SC.ContainsItem(key))
  441. return SC.GetValue<double>(key).ToString("f3");
  442. }
  443. return "";
  444. }
  445. /// <summary>
  446. /// 获取当前O2检测位置
  447. /// </summary>
  448. /// <returns></returns>
  449. private string GetCheckO2Location()
  450. {
  451. if (SensorO2DetectSideLA != null && SensorO2DetectSideLA.Value)
  452. return SensorO2DetectSideLA.Display;
  453. if (SensorO2DetectSideFIMS1 != null && SensorO2DetectSideFIMS1.Value)
  454. return SensorO2DetectSideFIMS1.Display;
  455. if (SensorO2DetectSideFIMS2 != null && SensorO2DetectSideFIMS2.Value)
  456. return SensorO2DetectSideFIMS2.Display;
  457. return "";
  458. }
  459. /// <summary>
  460. /// 获取当前O2浓度
  461. /// </summary>
  462. /// <returns></returns>
  463. private bool CheckN2PurgePhase1()
  464. {
  465. return ((int)ConcentrationO2.Value >= _n2PurgeData) && GetLADoorOpenStatus();
  466. }
  467. private bool CheckN2PurgePhase2()
  468. {
  469. return ((int)ConcentrationO2.Value < _n2PurgeData) && GetLADoorOpenStatus();
  470. }
  471. private bool CheckN2PurgePhase3()
  472. {
  473. return ((int)ConcentrationO2.Value) < _n2ToAirData && GetLADoorOpenStatus();
  474. }
  475. private bool CheckN2PurgePhase5()
  476. {
  477. return ((int)ConcentrationO2.Value) >= _n2ToAirData && !GetLADoorOpenStatus();
  478. }
  479. private bool CheckN2PurgePhase4()
  480. {
  481. return (((int)ConcentrationO2.Value)) >= _n2ToAirData && GetLADoorOpenStatus();
  482. }
  483. private bool GetN2PurgeAIRTo20PPMStatus()
  484. {
  485. return ValveAV202.DOOpen.Value;
  486. }
  487. public bool GetN2PurgeUnder20PPMStatus(double value = 20)
  488. {
  489. return ConcentrationO2.Value < value;
  490. }
  491. private bool GetN2PurgeAIRStatus()
  492. {
  493. return ValveAV202.DOClose.Value && (AlarmSignalFilterBox1DoorSwitch != null ? !AlarmSignalFilterBox1DoorSwitch.Value : false);
  494. }
  495. private bool GetLADoorOpenStatus()
  496. {
  497. return (bool)(SensorLADoorSw1?.Value);
  498. }
  499. private bool GetN2PurgeDoorOpenStatus()
  500. {
  501. return ValveAV202.DOClose.Value && (AlarmSignalFilterBox1DoorSwitch != null ? !AlarmSignalFilterBox1DoorSwitch.Value : false);
  502. }
  503. private bool GetN2PurgeFoup1Status()
  504. {
  505. return GetN2PurgeAIRTo20PPMStatus() && GetN2PurgeUnder20PPMStatus() && FIMS1.IsFoupExist && FIMS1.CollisionAvoidanceUpDownStatus == DeviceStatus.Down;
  506. }
  507. private bool GetN2PurgeFoup2Status()
  508. {
  509. return GetN2PurgeAIRTo20PPMStatus() && GetN2PurgeUnder20PPMStatus() && FIMS2.IsFoupExist && FIMS2.CollisionAvoidanceUpDownStatus == DeviceStatus.Down; ;
  510. }
  511. public bool IsAbortN2purge()
  512. {
  513. if (!_enableAbortN2purge)
  514. {
  515. return false;
  516. }
  517. if (SensorSL02001gasboxdoorsw11.Value || SensorSL02001gasboxdoorsw12.Value || SensorSL02002gasboxdoorsw11.Value || SensorSL02002gasboxdoorsw12.Value || SensorSL05002LAdoorsw2.Value || SensorSL05004LAfurnacedoorsw.Value)
  518. {
  519. return true;
  520. }
  521. return false;
  522. }
  523. public void SetN2PurgeLAO2CheckFirstEnable(bool isEable)
  524. {
  525. if (TrigN2PurgeLAO2CheckFirstEnable != null && TrigN2PurgeLAO2CheckFirstEnable.Value != isEable)
  526. {
  527. TrigN2PurgeLAO2CheckFirstEnable.SetTrigger(isEable, out _);
  528. }
  529. }
  530. public void SetN2PurgeFIMS1O2CheckEnable(ModuleName fims, bool isEable)
  531. {
  532. if (fims == ModuleName.FIMS1 && TrigN2PurgeFIMS1O2CheckEnable != null && TrigN2PurgeFIMS1O2CheckEnable.Value != isEable)
  533. {
  534. TrigN2PurgeFIMS1O2CheckEnable.SetTrigger(isEable, out _);
  535. }
  536. if (fims == ModuleName.FIMS2 && TrigN2PurgeFIMS2O2CheckEnable != null && TrigN2PurgeFIMS2O2CheckEnable.Value != isEable)
  537. {
  538. TrigN2PurgeFIMS2O2CheckEnable.SetTrigger(isEable, out _);
  539. }
  540. }
  541. public void SetN2PurgeProcess(bool isEable)
  542. {
  543. if (TrigN2PurgeProcess != null && TrigN2PurgeProcess.Value != isEable)
  544. {
  545. TrigN2PurgeProcess.SetTrigger(isEable, out _);
  546. }
  547. }
  548. public void SetN2PurgeLAO2CheckSV(float value)
  549. {
  550. if (TrigN2PurgeLAO2CheckSV != null)
  551. TrigN2PurgeLAO2CheckSV?.SetAOTrigger(value, out _);
  552. }
  553. public void SetN2PurgeFOUPO2CheckSV(float value)
  554. {
  555. if (TrigN2PurgeFOUPO2CheckSV != null)
  556. TrigN2PurgeFOUPO2CheckSV?.SetAOTrigger(value, out _);
  557. }
  558. /// <summary>
  559. /// N2Purge相关时间参数,电气要求设定为秒,实际下发按照毫秒
  560. /// </summary>
  561. public void SetN2PurgeParameters(string n2PurgeModeEnum)
  562. {
  563. if (SC.ContainsItem("PM1.N2Purge.TransferRoomArrivalWaitTime") && TrigN2PurgeLAO2CheckTime != null)
  564. {
  565. var time = (float)SC.GetValue<double>("PM1.N2Purge.TransferRoomArrivalWaitTime");
  566. TrigN2PurgeLAO2CheckTime.SetAOTrigger(time, out _);
  567. }
  568. if (SC.ContainsItem("PM1.N2Purge.TransferRoomStableWaitTime") && TrigN2PurgeLAO2OverTime != null)
  569. {
  570. var time = (float)SC.GetValue<double>("PM1.N2Purge.TransferRoomStableWaitTime");
  571. TrigN2PurgeLAO2OverTime.SetAOTrigger(time, out _);
  572. }
  573. if (SC.ContainsItem("PM1.N2Purge.FOUPOpenerArrivalWaitTime") && TrigN2PurgeFOUPO2CheckTime != null)
  574. {
  575. var time = (float)SC.GetValue<double>("PM1.N2Purge.FOUPOpenerArrivalWaitTime");
  576. TrigN2PurgeFOUPO2CheckTime.SetAOTrigger(time, out _);
  577. }
  578. if (SC.ContainsItem("PM1.N2Purge.FOUPOpenerStableWaitTime") && TrigN2PurgeFOUPO2OverTime != null)
  579. {
  580. var time = (float)SC.GetValue<double>("PM1.N2Purge.FOUPOpenerStableWaitTime");
  581. TrigN2PurgeFOUPO2OverTime.SetAOTrigger(time, out _);
  582. }
  583. if (SC.ContainsItem("PM1.N2Purge.O2DetectorTransferRoomToFOUPTime") && TrigN2PurgeExchangeLATOFOUPWaitTime != null)
  584. {
  585. var time = (float)SC.GetValue<double>("PM1.N2Purge.O2DetectorTransferRoomToFOUPTime");
  586. TrigN2PurgeExchangeLATOFOUPWaitTime.SetAOTrigger(time, out _);
  587. }
  588. if (SC.ContainsItem("PM1.N2Purge.O2DetectorFOUPToTransferRoomTime") && TrigN2PurgeExchangeFOUPTOLAWaitTime != null)
  589. {
  590. var time = (float)SC.GetValue<double>("PM1.N2Purge.O2DetectorFOUPToTransferRoomTime");
  591. TrigN2PurgeExchangeFOUPTOLAWaitTime.SetAOTrigger(time, out _);
  592. }
  593. if (SC.ContainsItem("PM1.N2Purge.O2DetectorFOUPToFOUPTime") && TrigN2PurgeExchangeFOUPTOFOUPWaitTime != null)
  594. {
  595. var time = (float)SC.GetValue<double>("PM1.N2Purge.O2DetectorFOUPToFOUPTime");
  596. TrigN2PurgeExchangeFOUPTOFOUPWaitTime.SetAOTrigger(time, out _);
  597. }
  598. //这2个SV下发值应该根据什么阶段下发什么值
  599. if (n2PurgeModeEnum == N2PurgeModeEnum.WaferCharge.ToString())
  600. {
  601. SetN2PurgeFOUPO2CheckSV((float)GetWaferChargeFOUPO2CheckSV());
  602. SetN2PurgeLAO2CheckSV((float)GetWaferChargeLAO2CheckSV());
  603. }
  604. if (n2PurgeModeEnum == N2PurgeModeEnum.FoupEnter.ToString())
  605. {
  606. SetN2PurgeFOUPO2CheckSV((float)GetFoupEnterFOUPO2CheckSV());
  607. SetN2PurgeLAO2CheckSV((float)GetFoupEnterLAO2CheckSV());
  608. }
  609. if (n2PurgeModeEnum == N2PurgeModeEnum.WaferDisCharge.ToString())
  610. {
  611. SetN2PurgeFOUPO2CheckSV((float)GetWaferDisChargeFOUPO2CheckSV());
  612. SetN2PurgeLAO2CheckSV((float)GetWaferDisChargeLAO2CheckSV());
  613. }
  614. }
  615. /// <summary>
  616. /// Job start的时候,就根据Process的配置判定是否需要进行LA压氧
  617. /// </summary>
  618. /// <param name="n2PurgeModeStr"></param>
  619. public void InitN2PurgeMode(string n2PurgeModeStr)
  620. {
  621. if (string.IsNullOrEmpty(n2PurgeModeStr))
  622. return;
  623. if (n2PurgeModeStr.ToLower() == "none")
  624. return;
  625. if (SC.ContainsItem("PM1.RecipeRelevancyN2Purge") && SC.GetValue<bool>("PM1.RecipeRelevancyN2Purge") && SC.ContainsItem("PM1.SelectN2PurgeMode"))
  626. {
  627. var setValue = GetN2PurgeModeEnumByStr(n2PurgeModeStr);
  628. SC.SetItemValueFromString("PM1.SelectN2PurgeMode", setValue);
  629. RestAllN2PrugeRD();
  630. }
  631. }
  632. public bool CheckFimsIsNeedOxygenPressure(bool fimsN2PurgeConfig, string recipeN2PurgeModeStr, out bool isCheckO2, bool isCheckRecipeHeader = true)
  633. {
  634. isCheckO2 = false;
  635. var currectN2PurgeModel = GetLACurrectN2purgeMode();
  636. if (isCheckRecipeHeader)
  637. {
  638. if (string.IsNullOrEmpty(recipeN2PurgeModeStr))
  639. return false;
  640. if (recipeN2PurgeModeStr.ToLower().Equals("n2 purge"))
  641. {
  642. recipeN2PurgeModeStr = N2PurgeModeEnum.N2PurgeMode.ToString();
  643. }
  644. if (recipeN2PurgeModeStr.ToLower().Contains("atm"))
  645. {
  646. recipeN2PurgeModeStr = IsATMMode(recipeN2PurgeModeStr);
  647. }
  648. var n2PurgeEnum = (N2PurgeModeEnum)Enum.Parse(typeof(N2PurgeModeEnum), recipeN2PurgeModeStr);
  649. if (n2PurgeEnum == N2PurgeModeEnum.ATMMode)
  650. return false;
  651. if (n2PurgeEnum == N2PurgeModeEnum.N2PurgeMode)
  652. {
  653. if (currectN2PurgeModel == N2PurgeModeEnum.N2PurgeMode.ToString() || currectN2PurgeModel == N2PurgeModeEnum.ATMMode.ToString() || currectN2PurgeModel == N2PurgeModeEnum.ManualMode.ToString())
  654. {
  655. if (fimsN2PurgeConfig)
  656. {
  657. isCheckO2 = true;
  658. return true;
  659. }
  660. else
  661. {
  662. return false;
  663. }
  664. }
  665. }
  666. if (n2PurgeEnum == N2PurgeModeEnum.None)
  667. {
  668. if (currectN2PurgeModel == N2PurgeModeEnum.ATMMode.ToString() || currectN2PurgeModel == N2PurgeModeEnum.ManualMode.ToString())
  669. {
  670. return false;
  671. }
  672. if (currectN2PurgeModel == N2PurgeModeEnum.N2PurgeMode.ToString())
  673. {
  674. if (fimsN2PurgeConfig)
  675. {
  676. isCheckO2 = true;
  677. return true;
  678. }
  679. else
  680. {
  681. return false;
  682. }
  683. }
  684. }
  685. }
  686. else
  687. {
  688. if (currectN2PurgeModel == N2PurgeModeEnum.N2PurgeMode.ToString() || currectN2PurgeModel == N2PurgeModeEnum.ManualMode.ToString())
  689. {
  690. if (fimsN2PurgeConfig)
  691. {
  692. isCheckO2 = true;
  693. return true;
  694. }
  695. else
  696. {
  697. return false;
  698. }
  699. }
  700. if (currectN2PurgeModel == N2PurgeModeEnum.ATMMode.ToString())
  701. {
  702. return false;
  703. }
  704. }
  705. return false;
  706. }
  707. public bool CheckLAIsNeedOxygenPressure(string recipeN2PurgeModeStr)
  708. {
  709. if (string.IsNullOrEmpty(recipeN2PurgeModeStr))
  710. return false;
  711. if (recipeN2PurgeModeStr.ToLower() == "none")
  712. return false;
  713. if (recipeN2PurgeModeStr.ToLower() == "atm")
  714. {
  715. recipeN2PurgeModeStr = N2PurgeModeEnum.ATMMode.ToString();
  716. }
  717. if (recipeN2PurgeModeStr.ToLower().Contains("n2"))
  718. {
  719. recipeN2PurgeModeStr = N2PurgeModeEnum.N2PurgeMode.ToString();
  720. }
  721. var n2PurgeEnum = (N2PurgeModeEnum)Enum.Parse(typeof(N2PurgeModeEnum), recipeN2PurgeModeStr);
  722. if (n2PurgeEnum == N2PurgeModeEnum.N2PurgeMode || n2PurgeEnum == N2PurgeModeEnum.ATMMode)
  723. return true;
  724. return false;
  725. }
  726. public string GetN2PurgeModeEnumByStr(string str)
  727. {
  728. if ((str == N2PurgeModeEnum.ATMMode.ToString()) || (str == N2PurgeModeEnum.ATMMode.ToDescription()) || (str.StartsWith("ATM")))
  729. {
  730. return N2PurgeModeEnum.ATMMode.ToString();
  731. }
  732. else if ((str == N2PurgeModeEnum.N2PurgeMode.ToString()) || (str == N2PurgeModeEnum.N2PurgeMode.ToDescription()) || (str.StartsWith("N2")))
  733. {
  734. return N2PurgeModeEnum.N2PurgeMode.ToString();
  735. }
  736. else
  737. {
  738. return GetLACurrectN2purgeMode();
  739. }
  740. }
  741. public string IsATMMode(string str)
  742. {
  743. if ((str == N2PurgeModeEnum.ATMMode.ToString()) || (str == N2PurgeModeEnum.ATMMode.ToDescription()) || (str.StartsWith("ATM")))
  744. {
  745. return N2PurgeModeEnum.ATMMode.ToString();
  746. }
  747. return str;
  748. }
  749. public double GetFoupEnterLAO2CheckSV()
  750. {
  751. return SC.ContainsItem("PM1.N2Purge.FoupEnter.LAO2CheckSV") ? SC.GetValue<double>("PM1.N2Purge.FoupEnter.LAO2CheckSV") : 20;
  752. }
  753. public double GetFoupEnterFOUPO2CheckSV()
  754. {
  755. return SC.ContainsItem("PM1.N2Purge.FoupEnter.FOUPO2CheckSV") ? SC.GetValue<double>("PM1.N2Purge.FoupEnter.FOUPO2CheckSV") : 20;
  756. }
  757. public bool GetFoupEnterFIMSN2purgeConfig()
  758. {
  759. return SC.ContainsItem("PM1.N2Purge.FoupEnter.FOUPN2PurgeEnable") ? SC.GetValue<bool>("PM1.N2Purge.FoupEnter.FOUPN2PurgeEnable") : false;
  760. }
  761. public double GetWaferChargeLAO2CheckSV()
  762. {
  763. return SC.ContainsItem("PM1.N2Purge.WaferCharge.LAO2CheckSV") ? SC.GetValue<double>("PM1.N2Purge.WaferCharge.LAO2CheckSV") : 20;
  764. }
  765. public double GetWaferChargeFOUPO2CheckSV()
  766. {
  767. return SC.ContainsItem("PM1.N2Purge.WaferCharge.FOUPO2CheckSV") ? SC.GetValue<double>("PM1.N2Purge.WaferCharge.FOUPO2CheckSV") : 20;
  768. }
  769. public bool GetWaferChargeFIMSN2purgeConfig()
  770. {
  771. return SC.ContainsItem("PM1.N2Purge.WaferCharge.FOUPN2PurgeEnable") ? SC.GetValue<bool>("PM1.N2Purge.WaferCharge.FOUPN2PurgeEnable") : false;
  772. }
  773. public double GetWaferDisChargeLAO2CheckSV()
  774. {
  775. return SC.ContainsItem("PM1.N2Purge.WaferDisCharge.LAO2CheckSV") ? SC.GetValue<double>("PM1.N2Purge.WaferDisCharge.LAO2CheckSV") : 20;
  776. }
  777. public double GetWaferDisChargeFOUPO2CheckSV()
  778. {
  779. return SC.ContainsItem("PM1.N2Purge.WaferDisCharge.FOUPO2CheckSV") ? SC.GetValue<double>("PM1.N2Purge.WaferDisCharge.FOUPO2CheckSV") : 20;
  780. }
  781. public bool GetWaferDisChargeFIMSN2purgeConfig()
  782. {
  783. return SC.ContainsItem("PM1.N2Purge.WaferDisCharge.FOUPN2PurgeEnable") ? SC.GetValue<bool>("PM1.N2Purge.WaferDisCharge.FOUPN2PurgeEnable") : false;
  784. }
  785. public string GetLACurrectN2purgeMode()
  786. {
  787. return SC.ContainsItem("PM1.SelectN2PurgeMode") ? SC.GetStringValue("PM1.SelectN2PurgeMode") : N2PurgeModeEnum.ManualMode.ToString();
  788. }
  789. }
  790. }