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- using Aitex.Core.RT.DataCenter;
- using Aitex.Core.RT.Device;
- using Aitex.Core.RT.Device.Unit;
- using Aitex.Core.RT.IOCore;
- using Aitex.Core.RT.Log;
- using Aitex.Core.RT.SCCore;
- using Aitex.Core.Util;
- using DocumentFormat.OpenXml.Packaging;
- using DocumentFormat.OpenXml.Spreadsheet;
- using FurnaceRT.Devices;
- using FurnaceRT.Equipments.PMs.Devices;
- using FurnaceRT.Extraction;
- using MECF.Framework.Common.CommonData.SorterDefines;
- using MECF.Framework.Common.Equipment;
- using MECF.Framework.Common.Tolerance;
- using MECF.Framework.Common.Utilities;
- using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.LoadPorts.TDK;
- using System;
- using System.Collections.Generic;
- using System.Diagnostics;
- using System.Linq;
- namespace FurnaceRT.Equipments.PMs
- {
- /// <summary>
- /// 分布类 定义N2Purge的执行逻辑
- /// </summary>
- public partial class PMModule
- {
- private R_TRIG _trigN2UpRD = new R_TRIG();
- private R_TRIG _trigN2DownRD = new R_TRIG();
- private R_TRIG _trigN2AirUpRD = new R_TRIG();
- private R_TRIG _trigN2AirDownRD = new R_TRIG();
- private R_TRIG _trigN2AirDownTwoRD = new R_TRIG();
- private R_TRIG _trigSelectN2PurgeModeD = new R_TRIG();
- private FilterChecker _filterChecker = new FilterChecker();
- private R_TRIG tank1_TRIG = new R_TRIG();
- private R_TRIG tank2_TRIG = new R_TRIG();
- private Dictionary<string, Tuple<R_TRIG, List<Tuple<IDevice, string>>>> _n2PurgeSequenceAction;
- private Dictionary<string, Func<bool>> _n2PurgeSequenceStatus;
- private Dictionary<string, R_TRIG> _rTrigDict;
- private N2PurgeModeEnum _N2PurgeMode = N2PurgeModeEnum.Auto;
- private double _n2PurgeData = 20;
- private double _n2ToAirData = 185000;
- private N2PurgeModeEnum _currentPhase;
- private double _manualPhase2StabilityTime = 0;
- private double _manualPhase4StabilityTime = 0;
- private bool _enableAbortN2purge = true;
- private int _phase1CycleCount = 0;
- private int _phase1CycleCountSC = 0;
- private bool _canSwitchToPhase2 = true;
- private Dictionary<string, Stopwatch> _allTimeDict = new Dictionary<string, Stopwatch>();
- private void InitN2PurgeData()
- {
- DATA.Subscribe($"{Module}.N2PurgeLimitData", () => GetN2PurgeLimitData());
- DATA.Subscribe($"{Module}.O2DensityData", () => ConcentrationO2.Value.ToString("f3"), SubscriptionAttribute.FLAG.IgnoreSaveDB);
- DATA.Subscribe($"{Module}.CheckO2Location", () => GetCheckO2Location(), SubscriptionAttribute.FLAG.IgnoreSaveDB);
- DATA.Subscribe($"{Module}.O2SetCheckSetPoint", () => GetO2SetCheckSetPoint(), SubscriptionAttribute.FLAG.IgnoreSaveDB);
- DATA.Subscribe($"{Module}.N2PurgeMode", () => SC.ContainsItem("PM1.SelectN2PurgeMode") ? SC.GetStringValue("PM1.SelectN2PurgeMode") : "");
- var selectN2PurgeMode = SC.ContainsItem("PM1.SelectN2PurgeMode") ? SC.GetStringValue("PM1.SelectN2PurgeMode") : "";
- if (!string.IsNullOrEmpty(selectN2PurgeMode))
- {
- if (selectN2PurgeMode != _N2PurgeMode.ToString())
- {
- SetN2PurgeModeAction(selectN2PurgeMode);
- }
- }
- var currentPhase = SC.ContainsItem("PM1.SelectN2PurgeModePhase") ? SC.GetStringValue("PM1.SelectN2PurgeModePhase") : "";
- if (!string.IsNullOrEmpty(currentPhase))
- {
- var enumCurrentPhase = (N2PurgeModeEnum)Enum.Parse(typeof(N2PurgeModeEnum), currentPhase);
- _currentPhase = enumCurrentPhase;
- }
- }
- private void InitN2PurgeConfigData()
- {
- _n2PurgeData = SC.ContainsItem($"System.N2PurgeData") ? SC.GetValue<double>("System.N2PurgeData") : 20;
- _n2ToAirData = SC.ContainsItem($"System.N2PurgeData") ? SC.GetValue<double>("System.N2ToAirData") : 185000;
- _enableAbortN2purge = SC.ContainsItem($"PM1.N2Purge.EnableAbortN2purge") ? SC.GetValue<bool>("PM1.N2Purge.EnableAbortN2purge") : false;
- _manualPhase2StabilityTime = SC.ContainsItem($"PM1.N2Purge.Manual_phase2.StabilityTime") ? SC.GetValue<double>("PM1.N2Purge.Manual_phase2.StabilityTime") : 0;
- _manualPhase4StabilityTime = SC.ContainsItem($"PM1.N2Purge.Manual_phase4.StabilityTime") ? SC.GetValue<double>("PM1.N2Purge.Manual_phase4.StabilityTime") : 0;
- _phase1CycleCountSC = SC.ContainsItem($"PM1.N2Purge.Manual_phase1.CycleCount") ? SC.GetValue<int>("PM1.N2Purge.Manual_phase1.CycleCount") : 0;
- _n2PurgeSequenceAction = ExtractionMethods.GetN2PurgeSequenceAction();
- _n2PurgeSequenceStatus = new Dictionary<string, Func<bool>>()
- {
- {"N2PurgeAIRTo20PPM",()=> GetN2PurgeAIRTo20PPMStatus()},
- {"N2PurgeUnder20PPM",()=> GetN2PurgeUnder20PPMStatus()},
- {"AIR",()=> GetN2PurgeAIRStatus()},
- {"DoorOpen",()=> GetN2PurgeDoorOpenStatus()},
- {"Foup1",()=> GetN2PurgeFoup1Status()},
- {"Foup2",()=> GetN2PurgeFoup2Status()},
- {N2PurgeModeEnum.Manual_phase1.ToString(),()=> CheckN2PurgePhase1() },
- {N2PurgeModeEnum.Manual_phase2.ToString(),()=> CheckN2PurgePhase2()},
- {N2PurgeModeEnum.Manual_phase3.ToString(),()=> CheckN2PurgePhase3() },
- {N2PurgeModeEnum.Manual_phase4.ToString(),()=> CheckN2PurgePhase4() },
- {N2PurgeModeEnum.Manual_phase5.ToString(),()=> CheckN2PurgePhase5() },
- };
- _allTimeDict = new Dictionary<string, Stopwatch>()
- {
- {N2PurgeModeEnum.Manual_phase1.ToString(),new Stopwatch() },
- {N2PurgeModeEnum.Manual_phase2.ToString(),new Stopwatch()},
- {N2PurgeModeEnum.Manual_phase3.ToString(),new Stopwatch()},
- {N2PurgeModeEnum.Manual_phase4.ToString(),new Stopwatch() },
- {N2PurgeModeEnum.Manual_phase5.ToString(),new Stopwatch() }
- };
- _rTrigDict = new Dictionary<string, R_TRIG>();
- }
- private void MonitorN2Purge()
- {
- var selectN2PurgeMode = SC.ContainsItem("PM1.SelectN2PurgeMode") ? SC.GetStringValue("PM1.SelectN2PurgeMode") : "";
- if (string.IsNullOrEmpty(selectN2PurgeMode))
- {
- return;
- }
- SetN2PurgeModeAction(selectN2PurgeMode);
- }
- private void MonitorTank1LeakAgeExec()
- {
- tank1_TRIG.CLK = SensorHCDTANKH != null && SensorHCDTANKH.Value;
- if (tank1_TRIG.Q)
- {
- SetHREFEnable(new object[1] { false });
- ValveAV113?.TurnValve(false, out _);
- }
- }
- public bool SetHREFEnable(object[] param)
- {
- if (param == null || param.Length <= 0)
- return true;
- bool.TryParse(param[0].ToString(), out bool isEnable);
- if (isEnable)
- {
- if (SensorHREFILK != null && SensorHREFILK.Value)
- {
- TrigSIREFON?.CheckAndSet(isEnable, out _);
- }
- }
- else
- {
- TrigSIREFON?.CheckAndSet(isEnable, out _);
- }
- return true;
- }
- private void MonitorTank2LeakAgeExec()
- {
- tank2_TRIG.CLK = SensorCSOURCETANKH != null && SensorCSOURCETANKH.Value;
- if (tank2_TRIG.Q)
- {
- SetCREFEnable(new object[1] { false });
- ValveAV121?.TurnValve(false, out _);
- }
- }
- public bool SetCREFEnable(object[] param)
- {
- if (param == null || param.Length <= 0)
- return true;
- bool.TryParse(param[0].ToString(), out bool isEnable);
- if (isEnable)
- {
- if (SensorCREFILK != null && SensorCREFILK.Value)
- {
- TrigCREFON?.CheckAndSet(isEnable, out _);
- }
- }
- else
- {
- TrigCREFON?.CheckAndSet(isEnable, out _);
- }
- return true;
- }
- /// <summary>
- /// TODO:这里展示数据的逻辑 不正确,待明确逻辑
- /// </summary>
- /// <returns></returns>
- private double GetN2PurgeLimitData()
- {
- if (_N2PurgeMode == N2PurgeModeEnum.N2PurgeMode)
- {
- if ((SensorO2DetectSideFIMS1 != null && SensorO2DetectSideFIMS1.Value) || (SensorO2DetectSideFIMS2 != null && SensorO2DetectSideFIMS2.Value))
- {
- return (float)SC.GetValue<double>("PM1.N2Purge.N2PurgeFOUPO2CheckSV");
- }
- return _n2PurgeData;
- }
- if (_N2PurgeMode == N2PurgeModeEnum.ATMMode)
- {
- return _n2ToAirData;
- }
- return ConcentrationO2.Value;
- }
- private void SetN2PurgeModeAction(string selectN2PurgeMode)
- {
- _N2PurgeMode = (N2PurgeModeEnum)Enum.Parse(typeof(N2PurgeModeEnum), selectN2PurgeMode);
- if (_N2PurgeMode == N2PurgeModeEnum.N2PurgeMode)
- {
- if (_currentPhase == N2PurgeModeEnum.Manual_phase1)
- {
- _filterChecker.CheckInterval = 3;
- _filterChecker.Monitor(CheckN2PurgePhase2());
- if (_filterChecker.Trig && _canSwitchToPhase2)
- {
- LOG.Info($" N2PurgeMode Trigger from Manual_phase1 to Manual_phase2,O2:{ConcentrationO2.Value}");
- SetN2PurgeValveData(N2PurgeModeEnum.Manual_phase2.ToString());
- }
- }
- else if (_currentPhase == N2PurgeModeEnum.Manual_phase2)
- {
- if (!_allTimeDict[N2PurgeModeEnum.Manual_phase2.ToString()].IsRunning && _canSwitchToPhase2)
- {
- _allTimeDict[N2PurgeModeEnum.Manual_phase2.ToString()].Restart();
- }
- var second = _allTimeDict[N2PurgeModeEnum.Manual_phase2.ToString()].Elapsed.TotalSeconds;
- if (second >= _manualPhase2StabilityTime)
- {
- if (CheckN2PurgePhase1())
- {
- LOG.Info($"N2PurgeMode Trigger Manual_phase1 was triggered {second} seconds later,O2:{ConcentrationO2.Value}");
- N2PurgeFaileAlarm.Set();
- _allTimeDict[N2PurgeModeEnum.Manual_phase2.ToString()].Restart();
- _allTimeDict[N2PurgeModeEnum.Manual_phase2.ToString()].Stop();
- _canSwitchToPhase2 = false;
- SetN2PurgeValveData(N2PurgeModeEnum.Manual_phase1.ToString());
- }
- if (CheckN2PurgePhase2())
- {
- LOG.Info($"N2PurgeMode Trigger Hold Manual_phase2 was triggered {second} seconds later,O2:{ConcentrationO2.Value}");
- _allTimeDict[N2PurgeModeEnum.Manual_phase2.ToString()].Restart();
- _allTimeDict[N2PurgeModeEnum.Manual_phase2.ToString()].Stop();
- _canSwitchToPhase2 = false;
- }
- }
- }
- else
- {
- if (CheckN2PurgePhase1())
- {
- LOG.Info($"N2PurgeMode Trigger Directly triggered Manual_phase1,O2:{ConcentrationO2.Value}");
- SetN2PurgeValveData(N2PurgeModeEnum.Manual_phase1.ToString());
- }
- else if (CheckN2PurgePhase2())
- {
- LOG.Info($"N2PurgeMode Trigger Directly triggered Manual_phase2,O2:{ConcentrationO2.Value}");
- SetN2PurgeValveData(N2PurgeModeEnum.Manual_phase2.ToString());
- }
- }
- }
- if (_N2PurgeMode == N2PurgeModeEnum.ATMMode)
- {
- if (_currentPhase == N2PurgeModeEnum.Manual_phase3)
- {
- var checkResult = CheckN2PurgePhase4();
- if (!_allTimeDict[N2PurgeModeEnum.Manual_phase4.ToString()].IsRunning)
- {
- _allTimeDict[N2PurgeModeEnum.Manual_phase4.ToString()].Restart();
- }
- var second = _allTimeDict[N2PurgeModeEnum.Manual_phase4.ToString()].Elapsed.TotalSeconds;
- if (second >= _manualPhase4StabilityTime && checkResult)
- {
- LOG.Info($"N2PurgeMode Trigger from Manual_phase3 to Manual_phase4 is triggered {second} seconds later,O2:{ConcentrationO2.Value}");
- SetN2PurgeValveData(N2PurgeModeEnum.Manual_phase4.ToString());
- _allTimeDict[N2PurgeModeEnum.Manual_phase4.ToString()].Restart();
- _allTimeDict[N2PurgeModeEnum.Manual_phase4.ToString()].Stop();
- }
- }
- else if (_currentPhase == N2PurgeModeEnum.Manual_phase4)
- {
- if (CheckN2PurgePhase5())
- {
- LOG.Info($"N2PurgeMode Trigger from Manual_phase4 to Manual_phase5,O2:{ConcentrationO2.Value}");
- SetN2PurgeValveData(N2PurgeModeEnum.Manual_phase5.ToString());
- }
- //if (CheckN2PurgePhase3( ))
- //{
- // LOG.Info($"N2PurgeMode Trigger from Manual_phase4 to Manual_phase3,O2:{o2Value}");
- // SetN2PurgeValveData(N2PurgeModeEnum.Manual_phase3.ToString());
- //}
- }
- else if (_currentPhase == N2PurgeModeEnum.Manual_phase5)
- {
- if (CheckN2PurgePhase4())
- {
- LOG.Info($"N2PurgeMode Trigger from Manual_phase5 to Manual_phase4,O2:{ConcentrationO2.Value}");
- SetN2PurgeValveData(N2PurgeModeEnum.Manual_phase4.ToString());
- }
- //if (CheckN2PurgePhase3( ))
- //{
- // LOG.Info($"N2PurgeMode Trigger from Manual_phase5 to Manual_phase3,O2:{o2Value}");
- // SetN2PurgeValveData(N2PurgeModeEnum.Manual_phase3.ToString());
- //}
- }
- else
- {
- if (CheckN2PurgePhase3())
- {
- LOG.Info($"N2PurgeMode Trigger Directly triggered Manual_phase3,O2:{ConcentrationO2.Value}");
- SetN2PurgeValveData(N2PurgeModeEnum.Manual_phase3.ToString());
- return;
- }
- if (CheckN2PurgePhase5())
- {
- LOG.Info($"N2PurgeMode Trigger Directly triggered Manual_phase5,O2:{ConcentrationO2.Value}");
- SetN2PurgeValveData(N2PurgeModeEnum.Manual_phase5.ToString());
- return;
- }
- if (CheckN2PurgePhase4())
- {
- LOG.Info($"N2PurgeMode Trigger Directly triggered Manual_phase4,O2:{ConcentrationO2.Value}");
- SetN2PurgeValveData(N2PurgeModeEnum.Manual_phase4.ToString());
- return;
- }
- }
- }
- if (_N2PurgeMode == N2PurgeModeEnum.ManualMode || _N2PurgeMode == N2PurgeModeEnum.Auto)
- {
- _currentPhase = _N2PurgeMode;
- }
- //switch (_N2PurgeMode)
- //{
- // case N2PurgeModeEnum.Auto:
- // // 自动模式下的操作
- // break;
- // case N2PurgeModeEnum.ManualMode:
- // break;
- // case N2PurgeModeEnum.N2PurgeMode:
- // ProcessPhase(_trigN2UpRD, N2PurgeModeEnum.Manual_phase1.ToString());
- // ProcessPhase(_trigN2DownRD, N2PurgeModeEnum.Manual_phase2.ToString(), _manualPhase2NeedCheck, (int)(_manualPhase2StabilityTime * 1000));
- // break;
- // case N2PurgeModeEnum.ATMMode:
- // ProcessPhase(_trigN2AirDownRD, N2PurgeModeEnum.Manual_phase3.ToString());
- // ProcessPhase(_trigN2AirUpRD, N2PurgeModeEnum.Manual_phase4.ToString(), _manualPhase4NeedCheck, (int)(_manualPhase4StabilityTime * 1000));
- // ProcessPhase(_trigN2AirDownTwoRD, N2PurgeModeEnum.Manual_phase5.ToString());
- // break;
- //}
- }
- bool CheckConditionInTime(string modeKey, int millisecondsTimeout, Func<bool> condition)
- {
- var stopwatch = _allTimeDict[modeKey];
- if (!_allTimeDict[modeKey].IsRunning)
- {
- _allTimeDict[modeKey].Restart();
- }
- while (stopwatch.ElapsedMilliseconds < millisecondsTimeout)
- {
- if (!_allTimeDict[modeKey].IsRunning)
- {
- return true;
- }
- if (!condition())
- {
- _allTimeDict[modeKey].Stop();
- _allTimeDict[modeKey].Reset();
- return false;
- }
- }
- if (stopwatch.ElapsedMilliseconds > millisecondsTimeout)
- {
- _allTimeDict[modeKey].Stop();
- _allTimeDict[modeKey].Reset();
- }
- return true;
- }
- private void ProcessPhase(R_TRIG r_TRIG, string modeKey, bool needCheck = false, int time = 0)
- {
- r_TRIG.CLK = needCheck ? (CheckConditionInTime(modeKey, time, () => _n2PurgeSequenceStatus[modeKey].Invoke())) : _n2PurgeSequenceStatus[modeKey].Invoke();
- if (r_TRIG.Q)
- {
- LOG.Info($"N2PurgeMode Trigger {modeKey}!,O2:{ConcentrationO2.Value},time:{_allTimeDict[modeKey].ElapsedMilliseconds}");
- SetN2PurgeValveData(modeKey);
- _allTimeDict[modeKey].Stop();
- _allTimeDict[modeKey].Reset();
- }
- }
- public void RestAllN2PrugeRD()
- {
- _trigN2AirDownRD.RST = false;
- _trigN2AirUpRD.RST = false;
- _trigN2DownRD.RST = false;
- _trigN2UpRD.RST = false;
- foreach (var item in _allTimeDict)
- {
- item.Value.Stop();
- item.Value.Reset();
- }
- _canSwitchToPhase2 = true;
- }
- private void SetN2PurgeValveData(string mode, string msg = "")
- {
- var value = _n2PurgeSequenceAction[mode];
- _currentPhase = (N2PurgeModeEnum)Enum.Parse(typeof(N2PurgeModeEnum), mode);
- if (SC.ContainsItem("PM1.SelectN2PurgeModePhase"))
- {
- SC.SetItemValue("PM1.SelectN2PurgeModePhase", mode);
- }
- foreach (var operateItem in value.Item2)
- {
- if (operateItem.Item1 is IoMFC)
- {
- var ioMFc = (operateItem.Item1 as IoMFC);
- { ioMFc.SetMfcValue(out _, 0, new object[] { float.Parse(operateItem.Item2.ToString()) }); }
- }
- if (operateItem.Item1 is IoValve)
- {
- var ioValve = (operateItem.Item1 as IoValve);
- ioValve.TurnValve(bool.Parse(operateItem.Item2), out _);
- }
- if (operateItem.Item1 is IoTrigger)
- {
- var ioTrigger = (operateItem.Item1 as IoTrigger);
- ioTrigger.CheckAndSet(bool.Parse(operateItem.Item2), out _);
- }
- }
- }
- private bool SetN2PurgeMode(out string reason, int time, object[] param)
- {
- reason = string.Empty;
- var mode = param[0].ToString();
- _N2PurgeMode = (N2PurgeModeEnum)Enum.Parse(typeof(N2PurgeModeEnum), mode);
- if (SC.ContainsItem("PM1.SelectN2PurgeMode"))
- {
- SC.SetItemValue("PM1.SelectN2PurgeMode", mode);
- }
- RestAllN2PrugeRD();
- return true;
- }
- /// <summary>
- /// 获取当前O2检测位置的设定值
- /// TODO:这里展示数据的逻辑也不正确,待明确逻辑
- /// </summary>
- /// <returns></returns>
- private string GetO2SetCheckSetPoint()
- {
- if (SensorO2DetectSideLA != null && SensorO2DetectSideLA.Value)
- {
- var key = "PM1.N2Purge.N2PurgeLAO2CheckSV";
- if (SC.ContainsItem(key))
- return SC.GetValue<double>(key).ToString("f3");
- }
- if ((SensorO2DetectSideFIMS1 != null && SensorO2DetectSideFIMS1.Value) || (SensorO2DetectSideFIMS2 != null && SensorO2DetectSideFIMS2.Value))
- {
- var key = "PM1.N2Purge.N2PurgeFOUPO2CheckSV";
- if (SC.ContainsItem(key))
- return SC.GetValue<double>(key).ToString("f3");
- }
- return "";
- }
- /// <summary>
- /// 获取当前O2检测位置
- /// </summary>
- /// <returns></returns>
- private string GetCheckO2Location()
- {
- if (SensorO2DetectSideLA != null && SensorO2DetectSideLA.Value)
- return SensorO2DetectSideLA.Display;
- if (SensorO2DetectSideFIMS1 != null && SensorO2DetectSideFIMS1.Value)
- return SensorO2DetectSideFIMS1.Display;
- if (SensorO2DetectSideFIMS2 != null && SensorO2DetectSideFIMS2.Value)
- return SensorO2DetectSideFIMS2.Display;
- return "";
- }
- /// <summary>
- /// 获取当前O2浓度
- /// </summary>
- /// <returns></returns>
- private bool CheckN2PurgePhase1()
- {
- return ((int)ConcentrationO2.Value >= _n2PurgeData) && GetLADoorOpenStatus();
- }
- private bool CheckN2PurgePhase2()
- {
- return ((int)ConcentrationO2.Value < _n2PurgeData) && GetLADoorOpenStatus();
- }
- private bool CheckN2PurgePhase3()
- {
- return ((int)ConcentrationO2.Value) < _n2ToAirData && GetLADoorOpenStatus();
- }
- private bool CheckN2PurgePhase5()
- {
- return ((int)ConcentrationO2.Value) >= _n2ToAirData && !GetLADoorOpenStatus();
- }
- private bool CheckN2PurgePhase4()
- {
- return (((int)ConcentrationO2.Value)) >= _n2ToAirData && GetLADoorOpenStatus();
- }
- private bool GetN2PurgeAIRTo20PPMStatus()
- {
- return ValveAV202.DOOpen.Value;
- }
- public bool GetN2PurgeUnder20PPMStatus(double value = 20)
- {
- return ConcentrationO2.Value < value;
- }
- private bool GetN2PurgeAIRStatus()
- {
- return ValveAV202.DOClose.Value && (AlarmSignalFilterBox1DoorSwitch != null ? !AlarmSignalFilterBox1DoorSwitch.Value : false);
- }
- private bool GetLADoorOpenStatus()
- {
- return (bool)(SensorLADoorSw1?.Value);
- }
- private bool GetN2PurgeDoorOpenStatus()
- {
- return ValveAV202.DOClose.Value && (AlarmSignalFilterBox1DoorSwitch != null ? !AlarmSignalFilterBox1DoorSwitch.Value : false);
- }
- private bool GetN2PurgeFoup1Status()
- {
- return GetN2PurgeAIRTo20PPMStatus() && GetN2PurgeUnder20PPMStatus() && FIMS1.IsFoupExist && FIMS1.CollisionAvoidanceUpDownStatus == DeviceStatus.Down;
- }
- private bool GetN2PurgeFoup2Status()
- {
- return GetN2PurgeAIRTo20PPMStatus() && GetN2PurgeUnder20PPMStatus() && FIMS2.IsFoupExist && FIMS2.CollisionAvoidanceUpDownStatus == DeviceStatus.Down; ;
- }
- public bool IsAbortN2purge()
- {
- if (!_enableAbortN2purge)
- {
- return false;
- }
- if (SensorSL02001gasboxdoorsw11.Value || SensorSL02001gasboxdoorsw12.Value || SensorSL02002gasboxdoorsw11.Value || SensorSL02002gasboxdoorsw12.Value || SensorSL05002LAdoorsw2.Value || SensorSL05004LAfurnacedoorsw.Value)
- {
- return true;
- }
- return false;
- }
- public void SetN2PurgeLAO2CheckFirstEnable(bool isEable)
- {
- if (TrigN2PurgeLAO2CheckFirstEnable != null && TrigN2PurgeLAO2CheckFirstEnable.Value != isEable)
- {
- TrigN2PurgeLAO2CheckFirstEnable.SetTrigger(isEable, out _);
- }
- }
- public void SetN2PurgeFIMS1O2CheckEnable(ModuleName fims, bool isEable)
- {
- if (fims == ModuleName.FIMS1 && TrigN2PurgeFIMS1O2CheckEnable != null && TrigN2PurgeFIMS1O2CheckEnable.Value != isEable)
- {
- TrigN2PurgeFIMS1O2CheckEnable.SetTrigger(isEable, out _);
- }
- if (fims == ModuleName.FIMS2 && TrigN2PurgeFIMS2O2CheckEnable != null && TrigN2PurgeFIMS2O2CheckEnable.Value != isEable)
- {
- TrigN2PurgeFIMS2O2CheckEnable.SetTrigger(isEable, out _);
- }
- }
- public void SetN2PurgeProcess(bool isEable)
- {
- if (TrigN2PurgeProcess != null && TrigN2PurgeProcess.Value != isEable)
- {
- TrigN2PurgeProcess.SetTrigger(isEable, out _);
- }
- }
- public void SetN2PurgeLAO2CheckSV(float value)
- {
- if (TrigN2PurgeLAO2CheckSV != null)
- TrigN2PurgeLAO2CheckSV?.SetAOTrigger(value, out _);
- }
- public void SetN2PurgeFOUPO2CheckSV(float value)
- {
- if (TrigN2PurgeFOUPO2CheckSV != null)
- TrigN2PurgeFOUPO2CheckSV?.SetAOTrigger(value, out _);
- }
- /// <summary>
- /// N2Purge相关时间参数,电气要求设定为秒,实际下发按照毫秒
- /// </summary>
- public void SetN2PurgeParameters(string n2PurgeModeEnum)
- {
- if (SC.ContainsItem("PM1.N2Purge.TransferRoomArrivalWaitTime") && TrigN2PurgeLAO2CheckTime != null)
- {
- var time = (float)SC.GetValue<double>("PM1.N2Purge.TransferRoomArrivalWaitTime");
- TrigN2PurgeLAO2CheckTime.SetAOTrigger(time, out _);
- }
- if (SC.ContainsItem("PM1.N2Purge.TransferRoomStableWaitTime") && TrigN2PurgeLAO2OverTime != null)
- {
- var time = (float)SC.GetValue<double>("PM1.N2Purge.TransferRoomStableWaitTime");
- TrigN2PurgeLAO2OverTime.SetAOTrigger(time, out _);
- }
- if (SC.ContainsItem("PM1.N2Purge.FOUPOpenerArrivalWaitTime") && TrigN2PurgeFOUPO2CheckTime != null)
- {
- var time = (float)SC.GetValue<double>("PM1.N2Purge.FOUPOpenerArrivalWaitTime");
- TrigN2PurgeFOUPO2CheckTime.SetAOTrigger(time, out _);
- }
- if (SC.ContainsItem("PM1.N2Purge.FOUPOpenerStableWaitTime") && TrigN2PurgeFOUPO2OverTime != null)
- {
- var time = (float)SC.GetValue<double>("PM1.N2Purge.FOUPOpenerStableWaitTime");
- TrigN2PurgeFOUPO2OverTime.SetAOTrigger(time, out _);
- }
- if (SC.ContainsItem("PM1.N2Purge.O2DetectorTransferRoomToFOUPTime") && TrigN2PurgeExchangeLATOFOUPWaitTime != null)
- {
- var time = (float)SC.GetValue<double>("PM1.N2Purge.O2DetectorTransferRoomToFOUPTime");
- TrigN2PurgeExchangeLATOFOUPWaitTime.SetAOTrigger(time, out _);
- }
- if (SC.ContainsItem("PM1.N2Purge.O2DetectorFOUPToTransferRoomTime") && TrigN2PurgeExchangeFOUPTOLAWaitTime != null)
- {
- var time = (float)SC.GetValue<double>("PM1.N2Purge.O2DetectorFOUPToTransferRoomTime");
- TrigN2PurgeExchangeFOUPTOLAWaitTime.SetAOTrigger(time, out _);
- }
- if (SC.ContainsItem("PM1.N2Purge.O2DetectorFOUPToFOUPTime") && TrigN2PurgeExchangeFOUPTOFOUPWaitTime != null)
- {
- var time = (float)SC.GetValue<double>("PM1.N2Purge.O2DetectorFOUPToFOUPTime");
- TrigN2PurgeExchangeFOUPTOFOUPWaitTime.SetAOTrigger(time, out _);
- }
- //这2个SV下发值应该根据什么阶段下发什么值
- if (n2PurgeModeEnum == N2PurgeModeEnum.WaferCharge.ToString())
- {
- SetN2PurgeFOUPO2CheckSV((float)GetWaferChargeFOUPO2CheckSV());
- SetN2PurgeLAO2CheckSV((float)GetWaferChargeLAO2CheckSV());
- }
- if (n2PurgeModeEnum == N2PurgeModeEnum.FoupEnter.ToString())
- {
- SetN2PurgeFOUPO2CheckSV((float)GetFoupEnterFOUPO2CheckSV());
- SetN2PurgeLAO2CheckSV((float)GetFoupEnterLAO2CheckSV());
- }
- if (n2PurgeModeEnum == N2PurgeModeEnum.WaferDisCharge.ToString())
- {
- SetN2PurgeFOUPO2CheckSV((float)GetWaferDisChargeFOUPO2CheckSV());
- SetN2PurgeLAO2CheckSV((float)GetWaferDisChargeLAO2CheckSV());
- }
- }
- /// <summary>
- /// Job start的时候,就根据Process的配置判定是否需要进行LA压氧
- /// </summary>
- /// <param name="n2PurgeModeStr"></param>
- public void InitN2PurgeMode(string n2PurgeModeStr)
- {
- if (string.IsNullOrEmpty(n2PurgeModeStr))
- return;
- if (n2PurgeModeStr.ToLower() == "none")
- return;
- if (SC.ContainsItem("PM1.RecipeRelevancyN2Purge") && SC.GetValue<bool>("PM1.RecipeRelevancyN2Purge") && SC.ContainsItem("PM1.SelectN2PurgeMode"))
- {
- var setValue = GetN2PurgeModeEnumByStr(n2PurgeModeStr);
- SC.SetItemValueFromString("PM1.SelectN2PurgeMode", setValue);
- RestAllN2PrugeRD();
- }
- }
- public bool CheckFimsIsNeedOxygenPressure(bool fimsN2PurgeConfig, string recipeN2PurgeModeStr, out bool isCheckO2, bool isCheckRecipeHeader = true)
- {
- isCheckO2 = false;
- var currectN2PurgeModel = GetLACurrectN2purgeMode();
- if (isCheckRecipeHeader)
- {
- if (string.IsNullOrEmpty(recipeN2PurgeModeStr))
- return false;
- if (recipeN2PurgeModeStr.ToLower().Equals("n2 purge"))
- {
- recipeN2PurgeModeStr = N2PurgeModeEnum.N2PurgeMode.ToString();
- }
- if (recipeN2PurgeModeStr.ToLower().Contains("atm"))
- {
- recipeN2PurgeModeStr = IsATMMode(recipeN2PurgeModeStr);
- }
- var n2PurgeEnum = (N2PurgeModeEnum)Enum.Parse(typeof(N2PurgeModeEnum), recipeN2PurgeModeStr);
- if (n2PurgeEnum == N2PurgeModeEnum.ATMMode)
- return false;
- if (n2PurgeEnum == N2PurgeModeEnum.N2PurgeMode)
- {
- if (currectN2PurgeModel == N2PurgeModeEnum.N2PurgeMode.ToString() || currectN2PurgeModel == N2PurgeModeEnum.ATMMode.ToString() || currectN2PurgeModel == N2PurgeModeEnum.ManualMode.ToString())
- {
- if (fimsN2PurgeConfig)
- {
- isCheckO2 = true;
- return true;
- }
- else
- {
- return false;
- }
- }
- }
- if (n2PurgeEnum == N2PurgeModeEnum.None)
- {
- if (currectN2PurgeModel == N2PurgeModeEnum.ATMMode.ToString() || currectN2PurgeModel == N2PurgeModeEnum.ManualMode.ToString())
- {
- return false;
- }
- if (currectN2PurgeModel == N2PurgeModeEnum.N2PurgeMode.ToString())
- {
- if (fimsN2PurgeConfig)
- {
- isCheckO2 = true;
- return true;
- }
- else
- {
- return false;
- }
- }
- }
- }
- else
- {
- if (currectN2PurgeModel == N2PurgeModeEnum.N2PurgeMode.ToString() || currectN2PurgeModel == N2PurgeModeEnum.ManualMode.ToString())
- {
- if (fimsN2PurgeConfig)
- {
- isCheckO2 = true;
- return true;
- }
- else
- {
- return false;
- }
- }
- if (currectN2PurgeModel == N2PurgeModeEnum.ATMMode.ToString())
- {
- return false;
- }
- }
- return false;
- }
- public bool CheckLAIsNeedOxygenPressure(string recipeN2PurgeModeStr)
- {
- if (string.IsNullOrEmpty(recipeN2PurgeModeStr))
- return false;
- if (recipeN2PurgeModeStr.ToLower() == "none")
- return false;
- if (recipeN2PurgeModeStr.ToLower() == "atm")
- {
- recipeN2PurgeModeStr = N2PurgeModeEnum.ATMMode.ToString();
- }
- if (recipeN2PurgeModeStr.ToLower().Contains("n2"))
- {
- recipeN2PurgeModeStr = N2PurgeModeEnum.N2PurgeMode.ToString();
- }
- var n2PurgeEnum = (N2PurgeModeEnum)Enum.Parse(typeof(N2PurgeModeEnum), recipeN2PurgeModeStr);
- if (n2PurgeEnum == N2PurgeModeEnum.N2PurgeMode || n2PurgeEnum == N2PurgeModeEnum.ATMMode)
- return true;
- return false;
- }
- public string GetN2PurgeModeEnumByStr(string str)
- {
- if ((str == N2PurgeModeEnum.ATMMode.ToString()) || (str == N2PurgeModeEnum.ATMMode.ToDescription()) || (str.StartsWith("ATM")))
- {
- return N2PurgeModeEnum.ATMMode.ToString();
- }
- else if ((str == N2PurgeModeEnum.N2PurgeMode.ToString()) || (str == N2PurgeModeEnum.N2PurgeMode.ToDescription()) || (str.StartsWith("N2")))
- {
- return N2PurgeModeEnum.N2PurgeMode.ToString();
- }
- else
- {
- return GetLACurrectN2purgeMode();
- }
- }
- public string IsATMMode(string str)
- {
- if ((str == N2PurgeModeEnum.ATMMode.ToString()) || (str == N2PurgeModeEnum.ATMMode.ToDescription()) || (str.StartsWith("ATM")))
- {
- return N2PurgeModeEnum.ATMMode.ToString();
- }
- return str;
- }
- public double GetFoupEnterLAO2CheckSV()
- {
- return SC.ContainsItem("PM1.N2Purge.FoupEnter.LAO2CheckSV") ? SC.GetValue<double>("PM1.N2Purge.FoupEnter.LAO2CheckSV") : 20;
- }
- public double GetFoupEnterFOUPO2CheckSV()
- {
- return SC.ContainsItem("PM1.N2Purge.FoupEnter.FOUPO2CheckSV") ? SC.GetValue<double>("PM1.N2Purge.FoupEnter.FOUPO2CheckSV") : 20;
- }
- public bool GetFoupEnterFIMSN2purgeConfig()
- {
- return SC.ContainsItem("PM1.N2Purge.FoupEnter.FOUPN2PurgeEnable") ? SC.GetValue<bool>("PM1.N2Purge.FoupEnter.FOUPN2PurgeEnable") : false;
- }
- public double GetWaferChargeLAO2CheckSV()
- {
- return SC.ContainsItem("PM1.N2Purge.WaferCharge.LAO2CheckSV") ? SC.GetValue<double>("PM1.N2Purge.WaferCharge.LAO2CheckSV") : 20;
- }
- public double GetWaferChargeFOUPO2CheckSV()
- {
- return SC.ContainsItem("PM1.N2Purge.WaferCharge.FOUPO2CheckSV") ? SC.GetValue<double>("PM1.N2Purge.WaferCharge.FOUPO2CheckSV") : 20;
- }
- public bool GetWaferChargeFIMSN2purgeConfig()
- {
- return SC.ContainsItem("PM1.N2Purge.WaferCharge.FOUPN2PurgeEnable") ? SC.GetValue<bool>("PM1.N2Purge.WaferCharge.FOUPN2PurgeEnable") : false;
- }
- public double GetWaferDisChargeLAO2CheckSV()
- {
- return SC.ContainsItem("PM1.N2Purge.WaferDisCharge.LAO2CheckSV") ? SC.GetValue<double>("PM1.N2Purge.WaferDisCharge.LAO2CheckSV") : 20;
- }
- public double GetWaferDisChargeFOUPO2CheckSV()
- {
- return SC.ContainsItem("PM1.N2Purge.WaferDisCharge.FOUPO2CheckSV") ? SC.GetValue<double>("PM1.N2Purge.WaferDisCharge.FOUPO2CheckSV") : 20;
- }
- public bool GetWaferDisChargeFIMSN2purgeConfig()
- {
- return SC.ContainsItem("PM1.N2Purge.WaferDisCharge.FOUPN2PurgeEnable") ? SC.GetValue<bool>("PM1.N2Purge.WaferDisCharge.FOUPN2PurgeEnable") : false;
- }
- public string GetLACurrectN2purgeMode()
- {
- return SC.ContainsItem("PM1.SelectN2PurgeMode") ? SC.GetStringValue("PM1.SelectN2PurgeMode") : N2PurgeModeEnum.ManualMode.ToString();
- }
- }
- }
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