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- using Aitex.Common.Util;
- using Aitex.Core.Common;
- using Aitex.Core.RT.Device;
- using Aitex.Core.RT.Event;
- using Aitex.Core.RT.Log;
- using Aitex.Core.RT.Routine;
- using Aitex.Core.RT.SCCore;
- using Aitex.Core.Util;
- using Aitex.Sorter.Common;
- using FurnaceRT.Devices;
- using FurnaceRT.Equipments.Boats;
- using FurnaceRT.Equipments.CarrierRobots;
- using FurnaceRT.Equipments.FIMSs;
- using FurnaceRT.Equipments.PMs;
- using FurnaceRT.Equipments.Schedulers;
- using FurnaceRT.Equipments.Systems;
- using FurnaceRT.Equipments.WaferRobots;
- using MECF.Framework.Common.Equipment;
- using MECF.Framework.Common.Schedulers;
- using MECF.Framework.Common.SubstrateTrackings;
- using System;
- using System.Collections.Generic;
- namespace FurnaceRT.Equipments.Jobs
- {
- public class ReturnAllWafer : SchedulerModuleFactory, IRoutine
- {
- private const string LogSource = "System";
- private Dictionary<int, WaferType> _boatSlotWafers = new Dictionary<int, WaferType>();
- private List<int> _sideDummySlots = new List<int>();
- private List<int> _extraDummySlots = new List<int>();
- private List<int> _productSlots = new List<int>();
- private List<int> _monitor1Slots = new List<int>();
- private List<int> _monitor2Slots = new List<int>();
- private PMModule _pmModule;
- public ReturnAllWafer()
- {
- InitModule();
- }
- public Result Start(params object[] objs)
- {
- Clear();
- //if (!(Singleton<EquipmentManager>.Instance.Modules[ModuleName.CarrierRobot] as CarrierRobotModule).CheckCassetteRobotRetractPosition())
- //{
- // Singleton<EquipmentManager>.Instance.ReturnAllWaferJobStartFailedWarning.Description = "Cassette Robot not at home position";
- // Singleton<EquipmentManager>.Instance.ReturnAllWaferJobStartFailedWarning.Set();
- // return Result.FAIL;
- //}
- //if (!(Singleton<EquipmentManager>.Instance.Modules[ModuleName.WaferRobot] as WaferRobotModule).WaferRobotDevice.IsRetract)
- //{
- // Singleton<EquipmentManager>.Instance.ReturnAllWaferJobStartFailedWarning.Description = "Wafer Robot not at home position";
- // Singleton<EquipmentManager>.Instance.ReturnAllWaferJobStartFailedWarning.Set();
- // return Result.FAIL;
- //}
- if (!(Singleton<EquipmentManager>.Instance.Modules[ModuleName.Boat] as BoatModule).IsBoatElevatorAtHomePosition)
- {
- Singleton<EquipmentManager>.Instance.ReturnAllWaferJobStartFailedWarning.Set("Boat Z Axis not at home position");
- return Result.FAIL;
- }
- if (!(Singleton<EquipmentManager>.Instance.Modules[ModuleName.Boat] as BoatModule).IsBoatRotationAtHomePosition)
- {
- Singleton<EquipmentManager>.Instance.ReturnAllWaferJobStartFailedWarning.Set("Boat R Axis not at home position");
- return Result.FAIL;
- }
- var waferRobotWafers = WaferManager.Instance.GetWafers(_waferRobot.Module);
- foreach (var wafer in waferRobotWafers)
- {
- if (wafer == null || wafer.IsEmpty)
- continue;
- //wafer robot上的wafer必须全部能够return
- if (!CheckWaferCouldBeReturn(wafer))
- {
- Singleton<EquipmentManager>.Instance.ReturnAllWaferJobStartFailedWarning.Set($"Wafer {(ModuleName)wafer.Station}.{wafer.Slot + 1} can not return, origin {(ModuleName)wafer.OriginStation}.{wafer.OriginSlot + 1} is not available");
- return Result.FAIL;
- }
- }
- var pmWafers = WaferManager.Instance.GetWafers(_pm1.Module);
- foreach (var wafer in pmWafers)
- {
- if (wafer == null || wafer.IsEmpty)
- continue;
- //boat上的wafer可以有不能return
- if (!CheckWaferCouldBeReturn(wafer))
- {
- Singleton<EquipmentManager>.Instance.ReturnAllWaferJobStartFailedWarning.Set($"Wafer {(ModuleName)wafer.Station}.{wafer.Slot + 1} can not return, origin {(ModuleName)wafer.OriginStation}.{wafer.OriginSlot + 1} is not available");
- }
- }
- Init();
- return Result.RUN;
- }
- public void ResetTask(ModuleName module)
- {
- if (module == _waferRobot.Module)
- _waferRobot.ResetTask();
- if (module == _carrierRobot.Module)
- _carrierRobot.ResetTask();
- }
- private void Clear()
- {
- _carrierRobot.ResetTask();
- _waferRobot.ResetTask();
- }
- private void Init()
- {
- _boatSlotWafers.Clear();
- _sideDummySlots.Clear();
- _extraDummySlots.Clear();
- _productSlots.Clear();
- _monitor1Slots.Clear();
- _monitor2Slots.Clear();
- //M-->P-->ED-->SD
- for (int i = 0; i < SC.GetValue<int>($"Boat.SlotCount"); i++)
- {
- if (!WaferManager.Instance.CheckHasWafer(_pm1.Module, i))
- continue;
- var wafer = WaferManager.Instance.GetWafer(_pm1.Module, i);
- if (wafer == null || wafer.IsEmpty)
- continue;
- if (!CheckWaferCouldBeReturn(wafer))
- continue;
- switch (wafer.WaferType)
- {
- case WaferType.SD:
- _sideDummySlots.Add(i);
- break;
- case WaferType.ED:
- _extraDummySlots.Add(i);
- break;
- case WaferType.P:
- _productSlots.Add(i);
- break;
- case WaferType.M1:
- _monitor1Slots.Add(i);
- break;
- case WaferType.M2:
- _monitor2Slots.Add(i);
- break;
- }
- }
- if (SC.GetStringValue("System.ChargingOrderToBoat") == "FromTopToBottom")
- {
- //升序,return wafer和charge顺序相反
- }
- else
- {
- _productSlots.Sort((x, y) => -x.CompareTo(y));//降序
- _monitor1Slots.Sort((x, y) => -x.CompareTo(y));//降序
- _monitor2Slots.Sort((x, y) => -x.CompareTo(y));//降序
- _extraDummySlots.Sort((x, y) => -x.CompareTo(y));//降序
- _sideDummySlots.Sort((x, y) => -x.CompareTo(y));//降序
- }
- }
- public Result Monitor()
- {
- MonitorCassetteRobotTask();
- MonitorWaferRobotTask();
- MonitorFIMSTask();
- if (MonitorTaskDone())
- {
- return Result.DONE;
- }
- return Result.RUN;
- }
- public bool MonitorTaskDone()
- {
- if (!_carrierRobot.IsAvailable)
- return false;
- if (!_waferRobot.IsAvailable)
- return false;
- if (CarrierManager.Instance.CheckHasCarrier(_carrierRobot.Module, 0))
- {
- return false;
- }
- var waferRobotWafers = WaferManager.Instance.GetWafers(_waferRobot.Module);
- foreach (var wafer in waferRobotWafers)
- {
- if (!wafer.IsEmpty)
- return false;
- }
- var pmWafers = WaferManager.Instance.GetWafers(_pm1.Module);
- foreach (var wafer in pmWafers)
- {
- if (!wafer.IsEmpty)
- {
- if (CheckWaferCouldBeReturn(wafer))
- {
- return false;
- }
- }
- }
- foreach (var st in _lstFIMSs)
- {
- if (!st.IsOnline)
- continue;
- if (CarrierManager.Instance.CheckHasCarrier(st.Module, 0))
- {
- return false;
- }
- }
- return true;
- }
- private bool CheckWaferCouldBeReturn(WaferInfo wafer)
- {
- if (wafer != null && !wafer.IsEmpty)
- {
- return ModuleHelper.IsStocker((ModuleName)wafer.OriginStation)
- && SC.ContainsItem($"System.SetUp.Is{(ModuleName)wafer.OriginStation}Installed")
- && SC.GetValue<bool>($"System.SetUp.Is{(ModuleName)wafer.OriginStation}Installed")
- && WaferManager.Instance.CheckNoWafer((ModuleName)wafer.OriginStation, wafer.OriginSlot);
- }
- return false;
- }
- private void MonitorFIMSTask()
- {
- //load
- bool haveLoadingFims = false;
- foreach (var st in _lstFIMSs)
- {
- if ((Singleton<EquipmentManager>.Instance.Modules[st.Module] as FIMSModule).IsLoading)
- {
- haveLoadingFims = true;
- break;
- }
- }
- //load
- foreach (var st in _lstFIMSs)
- {
- if (!st.IsAvailable || haveLoadingFims || !CarrierManager.Instance.CheckHasCarrier(st.Module, 0))
- continue;
- var fimsDevice = DEVICE.GetDevice<IoFIMS>($"PM1.{st.Module}");
- var carrier = CarrierManager.Instance.GetCarrier(st.Module, 0);
- if (carrier != null)
- {
- if (!CheckCarrierCanPickFromFIMSInDischarge(carrier.InternalModuleName) && !fimsDevice.IsLoadCompleted && st.Load())
- {
- return;
- }
- }
- }
- //unload
- //先判断满片的情况,满片的先unload
- foreach (var st in _lstFIMSs)
- {
- if (!st.IsAvailable || !CarrierManager.Instance.CheckHasCarrier(st.Module, 0))
- continue;
- var fimsDevice = DEVICE.GetDevice<IoFIMS>($"PM1.{st.Module}");
- var carrier = CarrierManager.Instance.GetCarrier(st.Module, 0);
- if (carrier != null)
- {
- if (!CheckCarrierHasEmptySlot(st.Module) && !fimsDevice.IsUnloadCompleted && st.Unload())
- {
- return;
- }
- }
- }
- if (!_waferRobot.IsAvailable)
- return;
- foreach (var st in _lstFIMSs)
- {
- if (!st.IsAvailable || !CarrierManager.Instance.CheckHasCarrier(st.Module, 0))
- continue;
- var fimsDevice = DEVICE.GetDevice<IoFIMS>($"PM1.{st.Module}");
- var carrier = CarrierManager.Instance.GetCarrier(st.Module, 0);
- if (carrier != null)
- {
- if (CheckCarrierCanPickFromFIMSInDischarge(carrier.InternalModuleName) && !fimsDevice.IsUnloadCompleted && st.Unload())
- {
- return;
- }
- }
- }
- }
- private void MonitorCassetteRobotTask()
- {
- if (!_carrierRobot.IsAvailable)
- return;
- //cassette robot is idle, release all the target
- foreach (var stocker in _lstTotlaStockers)
- {
- if (stocker.IsWaitTransfer(ModuleName.CarrierRobot))
- {
- stocker.StopWaitTransfer(ModuleName.CarrierRobot);
- }
- }
- foreach (var stage in _lstFIMSs)
- {
- if (stage.IsWaitTransfer(ModuleName.CarrierRobot))
- {
- stage.StopWaitTransfer(ModuleName.CarrierRobot);
- }
- }
- DischargingOrderBySort(SC.GetStringValue("System.ChargingOrderBySort"));
- if (!_carrierRobot.IsAvailable)
- return;
- MonitorCassetteRobotStageTask();
- }
- private void DischargingOrderBySort(string order)
- {
- switch (order)
- {
- case "ED,P,M":
- MonitorCassetteRobotStockerTaskInDischarge(_lstTotlaStockers, WaferType.M1, _monitor1Slots);
- MonitorCassetteRobotStockerTaskInDischarge(_lstTotlaStockers, WaferType.M2, _monitor2Slots);
- if (!_carrierRobot.IsAvailable)
- return;
- MonitorCassetteRobotStockerTaskInDischarge(_lstTotlaStockers, WaferType.P, _productSlots);
- if (!_carrierRobot.IsAvailable)
- return;
- MonitorCassetteRobotStockerTaskInDischarge(_lstTotlaStockers, WaferType.ED, _extraDummySlots);
- break;
- case "ED,M,P":
- MonitorCassetteRobotStockerTaskInDischarge(_lstTotlaStockers, WaferType.P, _productSlots);
- if (!_carrierRobot.IsAvailable)
- return;
- MonitorCassetteRobotStockerTaskInDischarge(_lstTotlaStockers, WaferType.M1, _monitor1Slots);
- MonitorCassetteRobotStockerTaskInDischarge(_lstTotlaStockers, WaferType.M2, _monitor2Slots);
- if (!_carrierRobot.IsAvailable)
- return;
- MonitorCassetteRobotStockerTaskInDischarge(_lstTotlaStockers, WaferType.ED, _extraDummySlots);
- break;
- case "P,ED,M":
- MonitorCassetteRobotStockerTaskInDischarge(_lstTotlaStockers, WaferType.M1, _monitor1Slots);
- MonitorCassetteRobotStockerTaskInDischarge(_lstTotlaStockers, WaferType.M2, _monitor2Slots);
- if (!_carrierRobot.IsAvailable)
- return;
- MonitorCassetteRobotStockerTaskInDischarge(_lstTotlaStockers, WaferType.ED, _extraDummySlots);
- if (!_carrierRobot.IsAvailable)
- return;
- MonitorCassetteRobotStockerTaskInDischarge(_lstTotlaStockers, WaferType.P, _productSlots);
- break;
- case "P,M,ED":
- MonitorCassetteRobotStockerTaskInDischarge(_lstTotlaStockers, WaferType.ED, _extraDummySlots);
- if (!_carrierRobot.IsAvailable)
- return;
- MonitorCassetteRobotStockerTaskInDischarge(_lstTotlaStockers, WaferType.M1, _monitor1Slots);
- MonitorCassetteRobotStockerTaskInDischarge(_lstTotlaStockers, WaferType.M2, _monitor2Slots);
- if (!_carrierRobot.IsAvailable)
- return;
- MonitorCassetteRobotStockerTaskInDischarge(_lstTotlaStockers, WaferType.P, _productSlots);
- break;
- case "M,P,ED":
- MonitorCassetteRobotStockerTaskInDischarge(_lstTotlaStockers, WaferType.ED, _extraDummySlots);
- if (!_carrierRobot.IsAvailable)
- return;
- MonitorCassetteRobotStockerTaskInDischarge(_lstTotlaStockers, WaferType.P, _productSlots);
- if (!_carrierRobot.IsAvailable)
- return;
- MonitorCassetteRobotStockerTaskInDischarge(_lstTotlaStockers, WaferType.M1, _monitor1Slots);
- MonitorCassetteRobotStockerTaskInDischarge(_lstTotlaStockers, WaferType.M2, _monitor2Slots);
- break;
- case "M,ED,P":
- MonitorCassetteRobotStockerTaskInDischarge(_lstTotlaStockers, WaferType.P, _productSlots);
- if (!_carrierRobot.IsAvailable)
- return;
- MonitorCassetteRobotStockerTaskInDischarge(_lstTotlaStockers, WaferType.ED, _extraDummySlots);
- if (!_carrierRobot.IsAvailable)
- return;
- MonitorCassetteRobotStockerTaskInDischarge(_lstTotlaStockers, WaferType.M1, _monitor1Slots);
- MonitorCassetteRobotStockerTaskInDischarge(_lstTotlaStockers, WaferType.M2, _monitor2Slots);
- break;
- default:
- MonitorCassetteRobotStockerTaskInDischarge(_lstTotlaStockers, WaferType.M1, _monitor1Slots);
- MonitorCassetteRobotStockerTaskInDischarge(_lstTotlaStockers, WaferType.M2, _monitor2Slots);
- if (!_carrierRobot.IsAvailable)
- return;
- MonitorCassetteRobotStockerTaskInDischarge(_lstTotlaStockers, WaferType.P, _productSlots);
- if (!_carrierRobot.IsAvailable)
- return;
- MonitorCassetteRobotStockerTaskInDischarge(_lstTotlaStockers, WaferType.ED, _extraDummySlots);
- break;
- }
- if (!_carrierRobot.IsAvailable)
- return;
- MonitorCassetteRobotStockerTaskInDischarge(_lstSideDummyStocker, WaferType.SD, _sideDummySlots);
- }
- private void MonitorCassetteRobotStockerTaskInDischarge(List<SchedulerStocker> targetStockers, WaferType targetWaferType, List<int> waferSlots)
- {
- if (!_carrierRobot.IsAvailable)
- return;
- var targetCarrierType = (CarrierType)(Enum.Parse(typeof(CarrierType), targetWaferType.ToString()));
- //pick
- if (CarrierManager.Instance.CheckNoCarrier(ModuleName.CarrierRobot, 0) && waferSlots.Count > 0)
- {
- bool needPickSdCassette = false;
- int sdWaferCount = GetWaferCountRelatedToWaferRobot(targetWaferType, true);
- needPickSdCassette = sdWaferCount > 0;
- var sdStockerModule = GetModuleNameForNextWafer(targetWaferType);
- if (needPickSdCassette && sdStockerModule != ModuleName.System)
- {
- SchedulerStocker sdStocker = null;
- foreach (var sd in targetStockers)
- {
- if (!CarrierManager.Instance.CheckHasCarrier(sd.Module, 0) ||
- CarrierManager.Instance.GetCarrier(sd.Module, 0).CarrierType != targetCarrierType)
- continue;
- if (sd.Module == sdStockerModule &&
- CheckCarrierHasEmptySlot(sd.Module))
- {
- sdStocker = sd;
- break;
- }
- }
- SchedulerFIMS fims = null;
- foreach (var st in _lstFIMSs)
- {
- if (!st.IsAvailable)
- continue;
- if (CarrierManager.Instance.CheckNoCarrier(st.Module, 0))
- {
- fims = st;
- break;
- }
- }
- if (sdStocker != null && fims != null)
- {
- if (_carrierRobot.Pick(sdStocker.Module, 0, Hand.Blade1))
- {
- sdStocker.WaitTransfer(ModuleName.CarrierRobot);
- return;
- }
- }
- }
- }
- if (!_carrierRobot.IsAvailable)
- return;
- if (!_waferRobot.IsAvailable)
- return;
- //place
- var carrier = CarrierManager.Instance.GetCarrier(ModuleName.CarrierRobot, 0);
- if (carrier != null && !carrier.IsEmpty && carrier.CarrierType == targetCarrierType)
- {
- if (!CheckModuleHasWaferInWaferRobotAndPM(carrier.InternalModuleName) || !CheckCarrierHasEmptySlot(ModuleName.CarrierRobot))
- {
- SchedulerStocker sdStocker = null;
- foreach (var sd in targetStockers)
- {
- if (CarrierManager.Instance.CheckNoCarrier(sd.Module, 0) && sd.Module == carrier.InternalModuleName)
- {
- sdStocker = sd;
- break;
- }
- }
- if (sdStocker != null)
- {
- if (_carrierRobot.Place(sdStocker.Module, 0, Hand.Blade1))
- {
- sdStocker.WaitTransfer(ModuleName.CarrierRobot);
- return;
- }
- }
- }
- }
- }
- private ModuleName GetModuleNameForNextWafer(WaferType waferType)
- {
- ModuleName module = ModuleName.System;
- bool hasEmptyFims = false;
- foreach (var fims in _lstFIMSs)
- {
- if (CarrierManager.Instance.CheckNoCarrier(fims.Module, 0))
- {
- hasEmptyFims = true;
- break;
- }
- }
- if (!hasEmptyFims)
- return module;
- if (WaferManager.Instance.CheckHasWafer(ModuleName.WaferRobot, 0))
- {
- module = (ModuleName)WaferManager.Instance.GetWafer(ModuleName.WaferRobot, 0).OriginStation;
- }
- else if (WaferManager.Instance.CheckHasWafer(ModuleName.WaferRobot, 1))
- {
- module = (ModuleName)WaferManager.Instance.GetWafer(ModuleName.WaferRobot, 1).OriginStation;
- }
- else if (WaferManager.Instance.CheckHasWafer(ModuleName.WaferRobot, 2))
- {
- module = (ModuleName)WaferManager.Instance.GetWafer(ModuleName.WaferRobot, 2).OriginStation;
- }
- else if (WaferManager.Instance.CheckHasWafer(ModuleName.WaferRobot, 3))
- {
- module = (ModuleName)WaferManager.Instance.GetWafer(ModuleName.WaferRobot, 3).OriginStation;
- }
- else if (WaferManager.Instance.CheckHasWafer(ModuleName.WaferRobot, 4))
- {
- module = (ModuleName)WaferManager.Instance.GetWafer(ModuleName.WaferRobot, 4).OriginStation;
- }
- else
- {
- if (SC.GetStringValue("System.ChargingOrderToBoat") == "FromTopToBottom")
- {
- for (int i = 0; i < SC.GetValue<int>($"Boat.SlotCount"); i++)
- {
- if (!WaferManager.Instance.CheckHasWafer(_pm1.Module, i))
- continue;
- var wafer = WaferManager.Instance.GetWafer(_pm1.Module, i);
- if (wafer == null || wafer.IsEmpty)
- continue;
- if (wafer.WaferType == waferType)
- {
- module = (ModuleName)WaferManager.Instance.GetWafer(_pm1.Module, i).OriginStation;
- break;
- }
- }
- }
- else
- {
- for (int i = SC.GetValue<int>($"Boat.SlotCount") - 1; i >= 0; i--)
- {
- if (!WaferManager.Instance.CheckHasWafer(_pm1.Module, i))
- continue;
- var wafer = WaferManager.Instance.GetWafer(_pm1.Module, i);
- if (wafer == null || wafer.IsEmpty)
- continue;
- if (wafer.WaferType == waferType)
- {
- module = (ModuleName)WaferManager.Instance.GetWafer(_pm1.Module, i).OriginStation;
- break;
- }
- }
- }
- }
- //下一片要放回的cassette已经在fims上
- bool isCarrierAlreadyPicked = false;
- foreach (var fims in _lstFIMSs)
- {
- if (!CarrierManager.Instance.CheckHasCarrier(fims.Module, 0))
- continue;
- var carrier = CarrierManager.Instance.GetCarrier(fims.Module);
- if (carrier != null && carrier.InternalModuleName == module)
- {
- isCarrierAlreadyPicked = true;
- }
- }
- if (CarrierManager.Instance.CheckHasCarrier(ModuleName.CarrierRobot, 0))
- {
- var carrier = CarrierManager.Instance.GetCarrier(ModuleName.CarrierRobot);
- if (carrier != null && carrier.InternalModuleName == module)
- {
- isCarrierAlreadyPicked = true;
- }
- }
- if (isCarrierAlreadyPicked)
- {
- if (SC.GetStringValue("System.ChargingOrderToBoat") == "FromTopToBottom")
- {
- for (int i = 0; i < SC.GetValue<int>($"Boat.SlotCount"); i++)
- {
- if (!WaferManager.Instance.CheckHasWafer(_pm1.Module, i))
- continue;
- var wafer = WaferManager.Instance.GetWafer(_pm1.Module, i);
- if (wafer == null || wafer.IsEmpty)
- continue;
- if (wafer.WaferType == waferType && (ModuleName)WaferManager.Instance.GetWafer(_pm1.Module, i).OriginStation != module)
- {
- module = (ModuleName)WaferManager.Instance.GetWafer(_pm1.Module, i).OriginStation;
- break;
- }
- }
- }
- else
- {
- for (int i = SC.GetValue<int>($"Boat.SlotCount") - 1; i >= 0; i--)
- {
- if (!WaferManager.Instance.CheckHasWafer(_pm1.Module, i))
- continue;
- var wafer = WaferManager.Instance.GetWafer(_pm1.Module, i);
- if (wafer == null || wafer.IsEmpty)
- continue;
- if (wafer.WaferType == waferType && (ModuleName)WaferManager.Instance.GetWafer(_pm1.Module, i).OriginStation != module)
- {
- module = (ModuleName)WaferManager.Instance.GetWafer(_pm1.Module, i).OriginStation;
- break;
- }
- }
- }
- }
- return module;
- }
- private void MonitorCassetteRobotStockerTask()
- {
- if (!_carrierRobot.IsAvailable)
- return;
- //pick
- if (CarrierManager.Instance.CheckNoCarrier(ModuleName.CarrierRobot, 0) && WaferManager.Instance.CheckHasWafer(ModuleName.WaferRobot, 2))
- {
- var stockerModule = (ModuleName)WaferManager.Instance.GetWafer(ModuleName.WaferRobot, 2).OriginStation;
- if (stockerModule != ModuleName.System)
- {
- SchedulerStocker mStocker = null;
- foreach (var m in _lstTotlaStockers)
- {
- bool hasCarrier = CarrierManager.Instance.CheckHasCarrier(m.Module, 0);
- bool hasEmptySlot = CheckCarrierHasEmptySlot(m.Module);
- //if (CarrierManager.Instance.CheckHasCarrier(m.Module, 0) && m.Module == stockerModule && CheckCarrierHasEmptySlot(m.Module))
- if (hasCarrier && m.Module == stockerModule && hasEmptySlot)
- {
- mStocker = m;
- break;
- }
- }
- SchedulerFIMS stage = null;
- foreach (var st in _lstFIMSs)
- {
- if (!st.IsAvailable)
- continue;
- if (CarrierManager.Instance.CheckNoCarrier(st.Module, 0))
- {
- stage = st;
- break;
- }
- }
- if (mStocker != null && stage != null)
- {
- if (_carrierRobot.Pick(mStocker.Module, 0, Hand.Blade1))
- {
- mStocker.WaitTransfer(ModuleName.CarrierRobot);
- }
- }
- }
- }
- if (!_carrierRobot.IsAvailable)
- return;
- //place
- var carrier = CarrierManager.Instance.GetCarrier(ModuleName.CarrierRobot, 0);
- if (carrier != null && !carrier.IsEmpty)
- {
- if (!CheckModuleHasWaferInWaferRobotAndPM(carrier.InternalModuleName) || !CheckCarrierHasEmptySlot(ModuleName.CarrierRobot))
- {
- SchedulerStocker stocker = null;
- foreach (var m in _lstTotlaStockers)
- {
- if (CarrierManager.Instance.CheckNoCarrier(m.Module, 0) && m.Module == carrier.InternalModuleName)
- {
- stocker = m;
- break;
- }
- }
- if (stocker != null)
- {
- if (_carrierRobot.Place(stocker.Module, 0, Hand.Blade1))
- {
- stocker.WaitTransfer(ModuleName.CarrierRobot);
- }
- }
- }
- }
- }
- private void MonitorCassetteRobotStageTask()
- {
- if (!_carrierRobot.IsAvailable)
- return;
- //pick
- var carrier = CarrierManager.Instance.GetCarrier(ModuleName.CarrierRobot, 0);
- if (carrier != null && carrier.IsEmpty)
- {
- SchedulerFIMS stage = null;
- foreach (var st in _lstFIMSs)
- {
- if (!st.IsAvailable)
- continue;
- if (!_waferRobot.IsAvailable)
- continue;
- if (CarrierManager.Instance.CheckHasCarrier(st.Module, 0))
- {
- carrier = CarrierManager.Instance.GetCarrier(st.Module, 0);
- if (carrier != null)
- {
- if (!CheckCarrierHasEmptySlot(st.Module))
- {
- stage = st;
- break;
- }
- //GetWaferSlotsAndWaferType(carrier, out List<int> slots, out WaferType waferType);
- //if (slots != null && !CheckModuleHasWaferInWaferRobotAndPM(carrier.InternalModuleName))
- if (!CheckModuleHasWaferInWaferRobotAndPM(carrier.InternalModuleName))
- {
- stage = st;
- break;
- }
- }
- }
- }
- if (stage != null)
- {
- if (_carrierRobot.Pick(stage.Module, 0, Hand.Blade1))
- {
- stage.WaitTransfer(ModuleName.CarrierRobot);
- }
- }
- }
- if (!_carrierRobot.IsAvailable)
- return;
- //place
- carrier = CarrierManager.Instance.GetCarrier(ModuleName.CarrierRobot, 0);
- if (carrier != null && !carrier.IsEmpty)
- {
- SchedulerFIMS stage = null;
- foreach (var st in _lstFIMSs)
- {
- if (!st.IsAvailable)
- continue;
- if (CarrierManager.Instance.CheckNoCarrier(st.Module, 0))
- {
- GetWaferSlotsAndWaferType(carrier, out List<int> slots, out WaferType waferType);
- if (slots != null && GetWaferCountRelatedToWaferRobot(waferType, false) > 0 && CheckModuleHasWaferInWaferRobotAndPM(carrier.InternalModuleName))
- {
- stage = st;
- break;
- }
- }
- }
- if (stage != null)
- {
- if (_carrierRobot.Place(stage.Module, 0, Hand.Blade1))
- {
- stage.WaitTransfer(ModuleName.CarrierRobot);
- }
- }
- }
- }
- private void MonitorWaferRobotTask()
- {
- if (!_waferRobot.IsAvailable)
- return;
- foreach (var stage in _lstFIMSs)
- {
- if (stage.IsWaitTransfer(ModuleName.WaferRobot))
- {
- stage.StopWaitTransfer(ModuleName.WaferRobot);
- }
- }
- if (_pm1.IsWaitTransfer(ModuleName.WaferRobot))
- {
- _pm1.StopWaitTransfer(ModuleName.WaferRobot);
- }
- MonitorWaferRobotFIMSTask();
- if (!_waferRobot.IsAvailable)
- return;
- MonitorWaferRobotPMTask();
- }
- private void MonitorWaferRobotFIMSTask()
- {
- if (!_waferRobot.IsAvailable)
- return;
- //place
- if (WaferManager.Instance.CheckHasWafer(ModuleName.WaferRobot, 2))
- {
- SchedulerFIMS stage = null;
- var waferInRobot = WaferManager.Instance.GetWafer(ModuleName.WaferRobot, 2);
- foreach (var st in _lstFIMSs)
- {
- if (!st.IsAvailable)
- continue;
- if (!CarrierManager.Instance.CheckHasCarrier(st.Module, 0))
- continue;
- var carrier = CarrierManager.Instance.GetCarrier(st.Module, 0);
- if (carrier == null || carrier.IsEmpty)
- continue;
- if ((ModuleName)waferInRobot.OriginStation != carrier.InternalModuleName)
- continue;
- // check FIMS
- var fimsDevice = DEVICE.GetDevice<IoFIMS>($"PM1.{st.Module}");
- if (!fimsDevice.IsLoadCompleted)
- continue;
- bool hasEmptySlot = false;
- var wafers = WaferManager.Instance.GetWafers(st.Module);
- if (wafers != null)
- {
- foreach (var wafer in wafers)
- {
- if (wafer == null)
- continue;
- if (wafer.IsEmpty)
- {
- hasEmptySlot = true;
- break;
- }
- }
- }
- if (hasEmptySlot)
- {
- stage = st;
- break;
- }
- }
- if (stage != null)
- {
- Hand placeBlade = Hand.Blade1;
- int placeSlot = waferInRobot.OriginSlot;
- if (WaferManager.Instance.CheckHasWafer(ModuleName.WaferRobot, 0) &&
- WaferManager.Instance.CheckHasWafer(ModuleName.WaferRobot, 1) &&
- WaferManager.Instance.CheckHasWafer(ModuleName.WaferRobot, 3) &&
- WaferManager.Instance.CheckHasWafer(ModuleName.WaferRobot, 4) &&
- WaferManager.Instance.GetWafer(ModuleName.WaferRobot, 0).OriginStation == WaferManager.Instance.GetWafer(ModuleName.WaferRobot, 1).OriginStation &&
- WaferManager.Instance.GetWafer(ModuleName.WaferRobot, 1).OriginStation == WaferManager.Instance.GetWafer(ModuleName.WaferRobot, 2).OriginStation &&
- WaferManager.Instance.GetWafer(ModuleName.WaferRobot, 2).OriginStation == WaferManager.Instance.GetWafer(ModuleName.WaferRobot, 3).OriginStation &&
- WaferManager.Instance.GetWafer(ModuleName.WaferRobot, 3).OriginStation == WaferManager.Instance.GetWafer(ModuleName.WaferRobot, 4).OriginStation)
- {
- var tempPlaceSlot = WaferManager.Instance.GetWafer(ModuleName.WaferRobot, 0).OriginSlot;
- if (tempPlaceSlot + 4 < SC.GetValue<int>("System.CassetteSlotCount"))
- {
- if (WaferManager.Instance.CheckNoWafer(stage.Module, tempPlaceSlot + 1) &&
- WaferManager.Instance.CheckNoWafer(stage.Module, tempPlaceSlot + 2) &&
- WaferManager.Instance.CheckNoWafer(stage.Module, tempPlaceSlot + 3) &&
- WaferManager.Instance.CheckNoWafer(stage.Module, tempPlaceSlot + 4))
- {
- placeBlade = Hand.Both;
- placeSlot = tempPlaceSlot;
- }
- }
- }
- if (placeSlot != -1 && _waferRobot.Place(stage.Module, placeSlot, placeBlade))
- {
- stage.WaitTransfer(ModuleName.WaferRobot);
- }
- }
- }
- }
- private void MonitorWaferRobotPMTask()
- {
- if (!_waferRobot.IsAvailable)
- return;
- var pmModule = Singleton<EquipmentManager>.Instance.Modules[ModuleName.PM1] as PMModule;
- if (pmModule == null)
- return;
- var stageStockerModeleName = ModuleName.System;
- foreach (var st in _lstFIMSs)
- {
- if (!st.IsAvailable)
- continue;
- if (!CarrierManager.Instance.CheckHasCarrier(st.Module, 0))
- continue;
- var carrier = CarrierManager.Instance.GetCarrier(st.Module, 0);
- if (carrier == null || carrier.IsEmpty)
- continue;
- bool hasEmptySlot = false;
- var wafers = WaferManager.Instance.GetWafers(st.Module);
- if (wafers != null)
- {
- foreach (var item in wafers)
- {
- if (item == null)
- continue;
- if (item.IsEmpty)
- {
- hasEmptySlot = true;
- break;
- }
- }
- }
- if (hasEmptySlot)
- {
- stageStockerModeleName = carrier.InternalModuleName;
- break;
- }
- }
- //pick
- var wafer = WaferManager.Instance.GetWafer(ModuleName.WaferRobot, 2);
- List<int> targetWaferSlots = GetWaferSlots();
- if (wafer != null && wafer.IsEmpty && targetWaferSlots != null)
- {
- Hand pickBlade = Hand.Blade1;
- int pickSlot = -1;
- for (int i = 0; i < targetWaferSlots.Count; i++)
- {
- var targetWafer = WaferManager.Instance.GetWafer(_pm1.Module, targetWaferSlots[i]);
- if (targetWafer == null || targetWafer.IsEmpty || !CheckWaferCouldBeReturn(targetWafer))
- continue;
- //先取stage上有空slot的carrier对应的wafer
- if (stageStockerModeleName != ModuleName.System && (ModuleName)targetWafer.OriginStation != stageStockerModeleName)
- continue;
- pickSlot = targetWaferSlots[i];
- if (i + 4 < targetWaferSlots.Count && Math.Abs(targetWaferSlots[i] - targetWaferSlots[i + 4]) == 4)
- {
- if (WaferManager.Instance.CheckHasWafer(_pm1.Module, targetWaferSlots[i + 1]) &&
- WaferManager.Instance.CheckHasWafer(_pm1.Module, targetWaferSlots[i + 2]) &&
- WaferManager.Instance.CheckHasWafer(_pm1.Module, targetWaferSlots[i + 3]) &&
- WaferManager.Instance.CheckHasWafer(_pm1.Module, targetWaferSlots[i + 4]) &&
- SC.GetValue<bool>($"{_waferRobot.Module}.IsSupport5Wafer"))
- {
- bool isFromTopToBottom = SC.GetStringValue("System.ChargingOrderToBoat") == "FromTopToBottom";
- var wafer0 = WaferManager.Instance.GetWafer(_pm1.Module, targetWaferSlots[i + (isFromTopToBottom ? 4 : 0)]);
- var wafer1 = WaferManager.Instance.GetWafer(_pm1.Module, targetWaferSlots[i + (isFromTopToBottom ? 3 : 1)]);
- var wafer2 = WaferManager.Instance.GetWafer(_pm1.Module, targetWaferSlots[i + 2]);
- var wafer3 = WaferManager.Instance.GetWafer(_pm1.Module, targetWaferSlots[i + (isFromTopToBottom ? 1 : 3)]);
- var wafer4 = WaferManager.Instance.GetWafer(_pm1.Module, targetWaferSlots[i + (isFromTopToBottom ? 0 : 4)]);
- if (WaferManager.Instance.CheckNoWafer(ModuleName.WaferRobot, 0) &&
- WaferManager.Instance.CheckNoWafer(ModuleName.WaferRobot, 1) &&
- WaferManager.Instance.CheckNoWafer(ModuleName.WaferRobot, 3) &&
- WaferManager.Instance.CheckNoWafer(ModuleName.WaferRobot, 4) &&
- wafer0.OriginStation == wafer1.OriginStation &&
- wafer0.OriginStation == wafer2.OriginStation &&
- wafer0.OriginStation == wafer3.OriginStation &&
- wafer0.OriginStation == wafer4.OriginStation &&
- Math.Abs(wafer1.OriginSlot - wafer2.OriginSlot) == 1 &&
- Math.Abs(wafer2.OriginSlot - wafer3.OriginSlot) == 1 &&
- Math.Abs(wafer0.OriginSlot - wafer4.OriginSlot) == 4 &&
- Math.Abs(wafer0.OriginSlot - wafer3.OriginSlot) == 3 &&
- Math.Abs(wafer0.OriginSlot - wafer2.OriginSlot) == 2 &&
- Math.Abs(wafer0.OriginSlot - wafer1.OriginSlot) == 1)
- {
- pickBlade = Hand.Both;
- pickSlot = wafer4.Slot;
- }
- }
- }
- break;
- }
- if (pmModule.CheckReadyForTransfer(_waferRobot.Module, pickBlade, pickSlot, EnumTransferType.Pick, out string reason) &&
- pickSlot != -1 && _waferRobot.Pick(_pm1.Module, pickSlot, pickBlade))
- {
- _pm1.WaitTransfer(ModuleName.WaferRobot);
- }
- }
- }
- private List<int> GetWaferSlots()
- {
- List<int> slots = null;
- switch (SC.GetStringValue("System.ChargingOrderBySort"))
- {
- case "ED,P,M":
- if (CheckWaferSlotsHasWafer(_monitor1Slots))
- return _monitor1Slots;
- if (CheckWaferSlotsHasWafer(_monitor2Slots))
- return _monitor2Slots;
- if (CheckWaferSlotsHasWafer(_productSlots))
- return _productSlots;
- if (CheckWaferSlotsHasWafer(_extraDummySlots))
- return _extraDummySlots;
- break;
- case "ED,M,P":
- if (CheckWaferSlotsHasWafer(_productSlots))
- return _productSlots;
- if (CheckWaferSlotsHasWafer(_monitor1Slots))
- return _monitor1Slots;
- if (CheckWaferSlotsHasWafer(_monitor2Slots))
- return _monitor2Slots;
- if (CheckWaferSlotsHasWafer(_extraDummySlots))
- return _extraDummySlots;
- break;
- case "P,ED,M":
- if (CheckWaferSlotsHasWafer(_monitor1Slots))
- return _monitor1Slots;
- if (CheckWaferSlotsHasWafer(_monitor2Slots))
- return _monitor2Slots;
- if (CheckWaferSlotsHasWafer(_extraDummySlots))
- return _extraDummySlots;
- if (CheckWaferSlotsHasWafer(_productSlots))
- return _productSlots;
- break;
- case "P,M,ED":
- if (CheckWaferSlotsHasWafer(_extraDummySlots))
- return _extraDummySlots;
- if (CheckWaferSlotsHasWafer(_monitor1Slots))
- return _monitor1Slots;
- if (CheckWaferSlotsHasWafer(_monitor2Slots))
- return _monitor2Slots;
- if (CheckWaferSlotsHasWafer(_productSlots))
- return _productSlots;
- break;
- case "M,P,ED":
- if (CheckWaferSlotsHasWafer(_extraDummySlots))
- return _extraDummySlots;
- if (CheckWaferSlotsHasWafer(_productSlots))
- return _productSlots;
- if (CheckWaferSlotsHasWafer(_monitor1Slots))
- return _monitor1Slots;
- if (CheckWaferSlotsHasWafer(_monitor2Slots))
- return _monitor2Slots;
- break;
- case "M,ED,P":
- if (CheckWaferSlotsHasWafer(_productSlots))
- return _productSlots;
- if (CheckWaferSlotsHasWafer(_extraDummySlots))
- return _extraDummySlots;
- if (CheckWaferSlotsHasWafer(_monitor1Slots))
- return _monitor1Slots;
- if (CheckWaferSlotsHasWafer(_monitor2Slots))
- return _monitor2Slots;
- break;
- default:
- if (CheckWaferSlotsHasWafer(_monitor1Slots))
- return _monitor1Slots;
- if (CheckWaferSlotsHasWafer(_monitor2Slots))
- return _monitor2Slots;
- if (CheckWaferSlotsHasWafer(_productSlots))
- return _productSlots;
- if (CheckWaferSlotsHasWafer(_extraDummySlots))
- return _extraDummySlots;
- break;
- }
- foreach (var slot in _sideDummySlots)
- {
- if (WaferManager.Instance.CheckHasWafer(_pm1.Module, slot))
- {
- return _sideDummySlots;
- }
- }
- return slots;
- }
- private void GetWaferSlotsAndWaferType(CarrierInfo carrier, out List<int> slots, out WaferType waferType)
- {
- slots = null;
- waferType = WaferType.None;
- if (carrier != null && !carrier.IsEmpty)
- {
- switch (carrier.CarrierType)
- {
- case CarrierType.SD:
- slots = _sideDummySlots;
- waferType = WaferType.SD;
- break;
- case CarrierType.ED:
- slots = _extraDummySlots;
- waferType = WaferType.ED;
- break;
- case CarrierType.M1:
- slots = _monitor1Slots;
- waferType = WaferType.M1;
- break;
- case CarrierType.M2:
- slots = _monitor2Slots;
- waferType = WaferType.M2;
- break;
- case CarrierType.P:
- slots = _productSlots;
- waferType = WaferType.P;
- break;
- }
- }
- }
- private bool CheckWaferSlotsHasWafer(List<int> slots)
- {
- foreach (var slot in slots)
- {
- if (WaferManager.Instance.CheckHasWafer(_pm1.Module, slot))
- {
- return true;
- }
- }
- return false;
- }
- private bool CheckModuleHasWaferInWaferRobotAndPM(ModuleName module)
- {
- bool isHaveWafer = false;
- for (int i = 0; i < SC.GetValue<int>($"Boat.SlotCount"); i++)
- {
- if (!WaferManager.Instance.CheckHasWafer(_pm1.Module, i))
- continue;
- var wafer = WaferManager.Instance.GetWafer(_pm1.Module, i);
- if (wafer == null || wafer.IsEmpty)
- continue;
- if (wafer.OriginStation == (int)module)
- {
- isHaveWafer = true;
- break;
- }
- }
- for (int i = 0; i < SC.GetValue<int>("WaferRobot.SlotCount"); i++)
- {
- if (!WaferManager.Instance.CheckHasWafer(ModuleName.WaferRobot, i))
- continue;
- var wafer = WaferManager.Instance.GetWafer(ModuleName.WaferRobot, i);
- if (wafer == null || wafer.IsEmpty)
- continue;
- if (wafer.OriginStation == (int)module)
- {
- isHaveWafer = true;
- break;
- }
- }
- return isHaveWafer;
- }
- private int GetWaferCountRelatedToWaferRobot(WaferType waferType, bool subtractionStage = true)
- {
- int count = 0;
- for (int i = 0; i < 5; i++)
- {
- var wafer = WaferManager.Instance.GetWafer(ModuleName.WaferRobot, i);
- if (!wafer.IsEmpty && wafer.WaferType == waferType)
- count++;
- }
- for (int i = 0; i < SC.GetValue<int>($"Boat.SlotCount"); i++)
- {
- var wafer = WaferManager.Instance.GetWafer(_pm1.Module, i);
- if (!wafer.IsEmpty && wafer.WaferType == waferType)
- count++;
- }
- if (subtractionStage)
- {
- foreach (var stage in _lstFIMSs)
- {
- if (CarrierManager.Instance.CheckNoCarrier(stage.Module, 0))
- continue;
- var wafers = WaferManager.Instance.GetWafers(stage.Module);
- foreach (var wafer in wafers)
- {
- if (!wafer.IsEmpty && wafer.WaferType == waferType)
- count--;
- }
- }
- }
- return count < 0 ? 0 : count;
- }
- private bool CheckCarrierHasEmptySlot(ModuleName module)
- {
- bool hasEmpty = false;
- var wafers = WaferManager.Instance.GetWafers(module);
- if (wafers != null)
- {
- foreach (var wafer in wafers)
- {
- if (wafer.IsEmpty)
- {
- hasEmpty = true;
- break;
- }
- }
- }
- return hasEmpty;
- }
- private bool CheckCarrierHasWaferInPM(ModuleName module)
- {
- bool isHaveWafer = false;
- for (int i = 0; i < SC.GetValue<int>($"Boat.SlotCount"); i++)
- {
- if (!WaferManager.Instance.CheckHasWafer(_pm1.Module, i))
- continue;
- var wafer = WaferManager.Instance.GetWafer(_pm1.Module, i);
- if (wafer == null || wafer.IsEmpty)
- continue;
- if (wafer.OriginStation == (int)module)
- {
- isHaveWafer = true;
- break;
- }
- }
- return isHaveWafer;
- }
- private bool CheckCarrierHasWaferInWaferRobot(ModuleName module)
- {
- bool isHaveWafer = false;
- for (int i = 0; i < 5; i++)
- {
- var wafer = WaferManager.Instance.GetWafer(ModuleName.WaferRobot, i);
- if (wafer.OriginStation == (int)module)
- {
- isHaveWafer = true;
- break;
- };
- }
- return isHaveWafer;
- }
- private bool CheckCarrierNoHasEmptySlot(ModuleName module)
- {
- bool noHasEmpty = true;
- var wafers = WaferManager.Instance.GetWafers(module);
- if (wafers != null)
- {
- foreach (var wafer in wafers)
- {
- if (!wafer.IsEmpty)
- {
- noHasEmpty = false;
- break;
- }
- }
- }
- return noHasEmpty;
- }
- private bool CheckCarrierCanPickFromFIMSInDischarge(ModuleName fimsCarrierModule)
- {
- List<ModuleName> robotModules = new List<ModuleName>();
- for (int i = 0; i < WaferManager.Instance.GetWafers(ModuleName.WaferRobot).Length; i++)
- {
- var wafer = WaferManager.Instance.GetWafer(ModuleName.WaferRobot, i);
- if (wafer == null || wafer.IsEmpty)
- continue;
- if (!robotModules.Contains((ModuleName)wafer.OriginStation))
- robotModules.Add((ModuleName)wafer.OriginStation);
- }
- if (robotModules.Contains(fimsCarrierModule))
- return false;
- List<ModuleName> pmModules = new List<ModuleName>();
- for (int i = 0; i < WaferManager.Instance.GetWafers(_pm1.Module).Length; i++)
- {
- var wafer = WaferManager.Instance.GetWafer(_pm1.Module, i);
- if (wafer == null || wafer.IsEmpty)
- continue;
- if (!pmModules.Contains((ModuleName)wafer.OriginStation))
- pmModules.Add((ModuleName)wafer.OriginStation);
- if (pmModules.Count == _lstFIMSs.Count)
- break;
- }
- if (pmModules.Contains(fimsCarrierModule))
- return false;
- return true;
- }
- public void Abort()
- {
- }
- }
- }
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