FurnaceELK/Furnace/FurnaceRT/Config/IO/ELK/_ioDefinePM.xml

<?xml version='1.0'?>
<IO_DEFINE xmlns:xsi='http://www.w3.org/2001/XMLSchema-instance' xmlns:xsd='http://www.w3.org/2001/XMLSchema'>
	<Dig_In>
		<DI_ITEM Index="48" Name="DI_O2ConcentrationHI" BufferOffset="48" Addr="D3.0" Description="O2 concentration HI"/>
		<DI_ITEM Index="49" Name="DI_O2ConcentrationLow" BufferOffset="49" Addr="D3.1" Description="O2 concentration lo"/>
		<DI_ITEM Index="50" Name="DI_O2ConcentrationEcho1" BufferOffset="50" Addr="D3.2" Description="O2 concentration echo1"/>
		<DI_ITEM Index="51" Name="DI_O2ConcentrationEcho2" BufferOffset="51" Addr="D3.3" Description="O2 concentration echo2"/>
		<DI_ITEM Index="51" Name="DI_SMK1DetectorSensorOperates" BufferOffset="52" Addr="D3.4" Description="SMK1 detector sensor operates"/>
		<DI_ITEM Index="51" Name="DI_SMK1DetectorFireAlarm" BufferOffset="53" Addr="D3.5" Description="SMK1 detector fire alarm"/>
		<DI_ITEM Index="51" Name="DI_SMK1DetectorFault" BufferOffset="54" Addr="D3.6" Description="SMK1 detector fault"/>

		<DI_ITEM Index="56" Name="DI_HCL1GasLeak1stAlarm" BufferOffset="56" Addr="D3.8" Description="HCL-1 gas leak 1st alarm" />
		<DI_ITEM Index="57" Name="DI_HCL1GasLeak2ndAlarm" BufferOffset="57" Addr="D3.9" Description="HCL-1 gas leak 2nd alarm" />
		<DI_ITEM Index="58" Name="DI_HCL2GasLeak1stAlarm" BufferOffset="58" Addr="D3.10" Description="HCL-2gas leak 1st alarm" />
		<DI_ITEM Index="59" Name="DI_HCL2GasLeak2ndAlarm" BufferOffset="59" Addr="D3.11" Description="HCL-2gas leak 2nd alarm" />
		<DI_ITEM Index="60" Name="DI_NH31GasLeak1stAlarm" BufferOffset="60" Addr="D3.12" Description="NH3-1gas leak 1st alarm" />
		<DI_ITEM Index="61" Name="DI_NH31GasLeak2ndAlarm" BufferOffset="61" Addr="D3.13" Description="NH3-1gas leak 2nd alarm" />
		<DI_ITEM Index="62" Name="DI_NH32GasLeak1stAlarm" BufferOffset="62" Addr="D3.14" Description="NH3-2gas leak 1st alarm" />
		<DI_ITEM Index="63" Name="DI_NH32GasLeak2ndAlarm" BufferOffset="63" Addr="D3.15" Description="NH3-2 gas leak 2nd alarm" />
		<DI_ITEM Index="64" Name="DI_F21GasLeak1stAlarm" BufferOffset="64" Addr="D4.0" Description="F2-1 gas leak 1st alarm" />
		<DI_ITEM Index="65" Name="DI_F21GasLeak2ndAlarm" BufferOffset="65" Addr="D4.1" Description="F2-1 gas leak 2nd alarm" />
		<DI_ITEM Index="66" Name="DI_F22GasLeak1stAlarm" BufferOffset="66" Addr="D4.2" Description="F2-2 gas leak 1st alarm" />
		<DI_ITEM Index="67" Name="DI_F22GasLeak2ndAlarm" BufferOffset="67" Addr="D4.3" Description="F2-2 gas leak 2nd alarm" />
		<DI_ITEM Index="68" Name="DI_NO1GasLeak1stAlarm" BufferOffset="68" Addr="D4.4" Description="NO-1 gas leak 1st alarm" />
		<DI_ITEM Index="69" Name="DI_NO1GasLeak2ndAlarm" BufferOffset="69" Addr="D4.5" Description="NO-1 gas leak 2nd alarm" />
		<DI_ITEM Index="70" Name="DI_NO2GasLeak1stAlarm" BufferOffset="70" Addr="D4.6" Description="NO-2 gas leak 1st alarm" />
		<DI_ITEM Index="71" Name="DI_NO2GasLeak2ndAlarm" BufferOffset="71" Addr="D4.7" Description="NO-2 gas leak 2nd alarm" />
		<DI_ITEM Index="72" Name="DI_C3H61GasLeak1stAlarm" BufferOffset="72" Addr="D4.8" Description="C3H6-1 gas leak 1st alarm" />
		<DI_ITEM Index="73" Name="DI_C3H61GasLeak2ndAlarm" BufferOffset="73" Addr="D4.9" Description="C3H6-1 gas leak 2nd alarm" />
		<DI_ITEM Index="74" Name="DI_C3H62GasLeak1stAlarm" BufferOffset="74" Addr="D4.10" Description="C3H6-2 gas leak 1st alarm" />
		<DI_ITEM Index="75" Name="DI_C3H62GasLeak2ndAlarm" BufferOffset="75" Addr="D4.11" Description="C3H6-2 gas leak 2nd alarm" />
		<DI_ITEM Index="76" Name="DI_DMA1GasLeak1stAlarm" BufferOffset="76" Addr="D4.12" Description="DMA-1 gas leak 1st alarm" />
		<DI_ITEM Index="77" Name="DI_DMA1GasLeak2ndAlarm" BufferOffset="77" Addr="D4.13" Description="DMA-1 gas leak 2nd alarm" />
		<DI_ITEM Index="78" Name="DI_DMA2GasLeak1stAlarm" BufferOffset="78" Addr="D4.14" Description="DMA-2gas leak 1st alarm" />
		<DI_ITEM Index="79" Name="DI_DMA2GasLeak2ndAlarm" BufferOffset="79" Addr="D4.15" Description="DMA-2 gas leak 2nd alarm" />

		<DI_ITEM Index="80" Name="DI_TS34RRotationTempSw" BufferOffset="80" Addr="D5.0" Description="TS34 R rotation temp. sw" />
		<DI_ITEM Index="81" Name="DI_TS30CapInsideTempSw" BufferOffset="81" Addr="D5.1" Description="TS30 cap inside temp.sw" />

		<DI_ITEM Index="82" Name="DI_TS31capoutsidetemSw" BufferOffset="82" Addr="D5.2"   Description="TS31 cap outside temp.sw" />
		<DI_ITEM Index="83" Name="DI_GasboxlowerdoorSw" BufferOffset="83" Addr="D5.3"   Description="gas box lower door sw" />
		<DI_ITEM Index="84" Name="DI_GasboxupperdoorSw" BufferOffset="84" Addr="D5.4"   Description="gas box upper door sw" />
		<DI_ITEM Index="85" Name="DI_EXHboxwaterleak" BufferOffset="85" Addr="D5.5"   Description="EXH box water leak" />
		<DI_ITEM Index="86" Name="DI_OPpanelEMO1" BufferOffset="86" Addr="D5.6"   Description="OP panel EMO 1" />
		<DI_ITEM Index="87" Name="DI_OPpanelEMO2" BufferOffset="87" Addr="D5.7"   Description="OP panel EMO 2" />
		<DI_ITEM Index="88" Name="DI_MainFurnaceTS306" BufferOffset="88" Addr="D5.8" Description="main furnace TS306"/>
		<DI_ITEM Index="89" Name="DI_HeaterRoomSWS11S12" BufferOffset="89" Addr="D5.9" Description="heater room SW S11/S12"/>
		<DI_ITEM Index="90" Name="DI_HeaterBbacksidePanelSWS112" BufferOffset="90" Addr="D5.10" Description="heater backside panel SW S112"/>
		<DI_ITEM Index="91" Name="DI_RHCTS305" BufferOffset="91" Addr="D5.11" Description="RHC TS305"/>
		<DI_ITEM Index="92" Name="DI_GasLeakFault" BufferOffset="92" Addr="D5.12" Description="gas leak fault"/>
		<DI_ITEM Index="93" Name="DI_MagneticFluidLeak" BufferOffset="93" Addr="D5.13" Description="Magnetic fluid leak"/>
		<DI_ITEM Index="94" Name="DI_CoolingWaterLeak" BufferOffset="94" Addr="D5.14" Description="Cooling water leak"/>
		<DI_ITEM Index="95" Name="DI_LSCWaterLeak" BufferOffset="95" Addr="D5.15" Description="LSC water leak"/>
		<DI_ITEM Index="528" Name="DI_GasBoxExhaust1stAlarmMS2" BufferOffset="96" Addr="D6.0" Description="gas box exhaust 1st alarm MS2"/>
		<DI_ITEM Index="529" Name="DI_GasBoxExhaust2ndAlarmMS2" BufferOffset="97" Addr="D6.1" Description="gas box exhaust 2nd alarm MS2"/>
		<DI_ITEM Index="534" Name="DI_LABacksideDoorSwitch" BufferOffset="102" Addr="D6.6" Description="LA backside door switch"/>

		<DI_ITEM Index="288" Name="DI_MachineEMO1" BufferOffset="288" Addr="D18.0" Description="Machine EMO 1" />
		<DI_ITEM Index="289" Name="DI_MachineEMO2" BufferOffset="289" Addr="D18.1" Description="Machine EMO 2" />
		<DI_ITEM Index="290" Name="DI_EMOReset" BufferOffset="290" Addr="D18.2" Description="EMO reset" />
		<DI_ITEM Index="291" Name="DI_T101TempStatus" BufferOffset="291" Addr="D18.3" Description="T101 Temp. status" />
		<DI_ITEM Index="292" Name="DI_T102TempStatus" BufferOffset="292" Addr="D18.4" Description="T102 Temp. status" />
		<DI_ITEM Index="293" Name="DI_T103TempStatus" BufferOffset="293" Addr="D18.5" Description="T103 Temp. status" />
		<DI_ITEM Index="294" Name="DI_RFPowerOn" BufferOffset="294" Addr="D18.6" Description="RF power on button" />

		<DI_ITEM Index="295" Name="DI_MachineExternalEMO" BufferOffset="295" Addr="D18.7" Description="Machine external EMO" />
		<DI_ITEM Index="296" Name="DI_FurnacePowerOnButton" BufferOffset="296" Addr="D18.8" Description="Furnace power on button" />
		<DI_ITEM Index="297" Name="DI_GasLineHeaterPowerOnButton" BufferOffset="297" Addr="D18.9" Description="Gas line heater power on button" />
		<DI_ITEM Index="298" Name="DI_ExhaustHeaterPowerOnButton" BufferOffset="298" Addr="D18.10" Description="Exhaust heater power on button" />
		<DI_ITEM Index="299" Name="DI_FrontbodyPowerOnButton" BufferOffset="299" Addr="D18.11" Description="Frontbody power on button" />
		<DI_ITEM Index="300" Name="DI_BlowerMotorPowerOnButton" BufferOffset="300" Addr="D18.12" Description="Blower motor power on button" />
		<DI_ITEM Index="301" Name="DI_FFUPowerOnButton" BufferOffset="301" Addr="D18.13" Description="FFU power on button" />
		<DI_ITEM Index="302" Name="DI_T102PowerOnButton" BufferOffset="302" Addr="D18.14" Description="T102 power on button" />
		<DI_ITEM Index="303" Name="DI_T103PowerOnButton" BufferOffset="303" Addr="D18.15" Description="T103 power on button" />


		<DI_ITEM Index="1338" Name="DI_ToFurnaceTransformer" BufferOffset="304" Addr="D19.0"  Description="To Furnace Transformer" />
		<DI_ITEM Index="1338" Name="DI_GasLineHeater" BufferOffset="305" Addr="D19.1"  Description="Gas Line Heater" />
		<DI_ITEM Index="1338" Name="DI_ExhaustLineHeater" BufferOffset="306" Addr="D19.2"  Description="Exhaust Line Heater" />
		<DI_ITEM Index="1338" Name="DI_Tofrontbodybox" BufferOffset="307" Addr="D19.3"  Description="To frontbody box" />
		<DI_ITEM Index="1338" Name="DI_BlowerMotorSupply" BufferOffset="308" Addr="D19.4"  Description="Blower Motor Supply" />
		<DI_ITEM Index="1338" Name="DI_FFUPowerSupply" BufferOffset="309" Addr="D19.5"  Description="FFU Power Supply" />
		<DI_ITEM Index="1338" Name="" BufferOffset="310" Addr="D19.6"  Description="" />
		<DI_ITEM Index="1338" Name="DI_HEXPowersupply" BufferOffset="311" Addr="D19.7"  Description="H-EX Power supply" />

		<DI_ITEM Index="336" Name="DI_BufferMotorEDMEAlarm" BufferOffset="336" Addr="D21.0" Description="Buffer motor EDM alarm" />
		<DI_ITEM Index="337" Name="DI_BoatLiftMotorEDMAlarm" BufferOffset="337" Addr="D21.1" Description="Boat lift motor EDM alarm" />

		<DI_ITEM Index="343" Name="DI_MachineEMS1" BufferOffset="342" Addr="D21.6" Description="Machine EMS1" />
		<DI_ITEM Index="344" Name="DI_MachineEMS2" BufferOffset="343" Addr="D21.7" Description="Machine EMS2" />

		<DI_ITEM Index="384" Name="DI_FBLightCurtainFault" BufferOffset="384" Addr="D24.0" Description="FB light curtain fault" />
		<DI_ITEM Index="385" Name="DI_FBLightCurtainOSSD1" BufferOffset="385" Addr="D24.1" Description="FB light curtain OSSD1" />
		<DI_ITEM Index="386" Name="DI_FBLightCurtainOSSD2" BufferOffset="386" Addr="D24.2" Description="FB light curtain OSSD2" />
		<DI_ITEM Index="387" Name="DI_FBFrontDoorSwitch" BufferOffset="387" Addr="D24.3" Description="FB front door switch" />
		<DI_ITEM Index="388" Name="DI_FBEMO1" BufferOffset="388" Addr="D24.4" Description="FB EMO1" />
		<DI_ITEM Index="389" Name="DI_FBEMO2" BufferOffset="389" Addr="D24.5" Description="FB EMO2" />

		<DI_ITEM Index="960" Name="DI_GLBoxPG1CNT1Alarm" BufferOffset="960" Addr="D60.0"  Description="Gas box PG1 CNT1 alarm" />
		<DI_ITEM Index="961" Name="DI_GLBoxPG1CNT2Alarm" BufferOffset="961" Addr="D60.1"  Description="Gas box PG1 CNT2 alarm" />
		<DI_ITEM Index="962" Name="DI_GLBoxPG2CNT1Alarm" BufferOffset="962" Addr="D60.2"  Description="Gas box PG2 CNT1 alarm" />
		<DI_ITEM Index="963" Name="DI_GLBoxPG2CNT2Alarm" BufferOffset="963" Addr="D60.3"  Description="Gas box PG2 CNT2 alarm" />
		<DI_ITEM Index="964" Name="DI_GLBoxPG3CNT1Alarm" BufferOffset="964" Addr="D60.4"  Description="Gas box PG3 CNT1 alarm" />
		<DI_ITEM Index="965" Name="DI_GLBoxPG3CNT2Alarm" BufferOffset="965" Addr="D60.5"  Description="Gas box PG3 CNT2 alarm" />
		<DI_ITEM Index="966" Name="DI_GLBoxPG4CNT1Alarm" BufferOffset="966" Addr="D60.6"  Description="Gas box PG4 CNT1 alarm" />
		<DI_ITEM Index="967" Name="DI_GLBoxPG4CNT2Alarm" BufferOffset="967" Addr="D60.7"  Description="Gas box PG4 CNT2 alarm" />
		<DI_ITEM Index="968" Name="DI_GLBoxPG5CNT1Alarm" BufferOffset="968" Addr="D60.8"  Description="Gas box PG5 CNT1 alarm" />
		<DI_ITEM Index="969" Name="DI_GLBoxPG5CNT2Alarm" BufferOffset="969" Addr="D60.9"  Description="Gas box PG5 CNT2 alarm" />
		<DI_ITEM Index="970" Name="DI_GLBoxPG6CNT1Alarm" BufferOffset="970" Addr="D60.10" Description="Gas box PG6 CNT1 alarm" />
		<DI_ITEM Index="971" Name="DI_GLBoxPG6CNT2Alarm" BufferOffset="971" Addr="D60.11" Description="Gas box PG6 CNT2 alarm" />

		<DI_ITEM Index="971" Name="DI_GLBoxPG7CNT1Alarm" BufferOffset="972" Addr="D60.12" Description="Gas box PG7 CNT1 alarm" />
		<DI_ITEM Index="971" Name="DI_GLBoxPG7CNT2Alarm" BufferOffset="973" Addr="D60.13" Description="Gas box PG7 CNT2 alarm" />
		<DI_ITEM Index="971" Name="DI_GLBoxPG8CNT2Alarm" BufferOffset="974" Addr="D60.14" Description="Gas box PG8 CNT1 alarm" />
		<DI_ITEM Index="971" Name="DI_GLBoxPG9CNT2Alarm" BufferOffset="975" Addr="D60.15" Description="Gas box PG8 CNT2 alarm" />

		<DI_ITEM Index="976" Name="DI_GLBoxVG32Status" BufferOffset="976" Addr="D61.0" Description="GL box VG32 status" />
		<DI_ITEM Index="977" Name="DI_GLBoxVG32Output1" BufferOffset="977" Addr="D61.1" Description="GL box VG32 output1" />
		<DI_ITEM Index="977" Name="DI_GLBoxVG32Output2" BufferOffset="978" Addr="D61.2" Description="GL box VG32 output2" />
		<DI_ITEM Index="979" Name="DI_GLBoxVG33Status" BufferOffset="979" Addr="D61.3" Description="GL box VG33 status" />
		<DI_ITEM Index="980" Name="DI_GLBoxVG33Output1" BufferOffset="980" Addr="D61.4" Description="GL box VG33 output1" />
		<DI_ITEM Index="981" Name="DI_GLBoxVG33Output2" BufferOffset="981" Addr="D61.5" Description="GL box VG33 output2" />

		<DI_ITEM Index="992" Name="DI_AV93_1RHCAirInOpened" BufferOffset="992" Addr="D62.0" Description="AV93_1 RHC air in opened" />
		<DI_ITEM Index="993" Name="DI_AV93_1RHCAirInClosed" BufferOffset="993" Addr="D62.1" Description="AV93_1 RHC air in closed" />
		<DI_ITEM Index="994" Name="DI_AV93_2RHCAirInOpened" BufferOffset="994" Addr="D62.2" Description="AV93_2 RHC air in opened" />
		<DI_ITEM Index="995" Name="DI_AV93_2RHCAirInClosed" BufferOffset="995" Addr="D62.3" Description="AV93_2 RHC air in closed" />
		<DI_ITEM Index="996" Name="DI_AV93_3RHCAirOutOpened" BufferOffset="996" Addr="D62.4" Description="AV93_3 RHC air Out opened" />
		<DI_ITEM Index="997" Name="DI_AV93_3RHCAirOutClosed" BufferOffset="997" Addr="D62.5" Description="AV93_3 RHC air Out closed" />
		<DI_ITEM Index="998" Name="DI_AV93_4RHCAirOutOpened" BufferOffset="998" Addr="D62.6" Description="AV93_4 RHC air Out opened" />
		<DI_ITEM Index="999" Name="DI_AV93_4RHCAirOutClosed" BufferOffset="999" Addr="D62.7" Description="AV93_4 RHC air Out closed" />
		<DI_ITEM Index="1000" Name="DI_HEXOverTemperatureAlarm" BufferOffset="1000" Addr="D62.8" Description="H-EX over temperature alarm" />

		<DI_ITEM Index="1338" Name="DI_GLBoxPG21CNT1Alarm" BufferOffset="1024" Addr="D64.0"  Description="GL box PG21 CNT1 alarm" />
		<DI_ITEM Index="1338" Name="DI_GLBoxPG21CNT2Alarm" BufferOffset="1025" Addr="D64.1"  Description="GL box PG21 CNT2 alarm" />
		<DI_ITEM Index="1338" Name="DI_GLBoxPG22CNT1Alarm" BufferOffset="1026" Addr="D64.2"  Description="GL box PG22 CNT1 alarm" />
		<DI_ITEM Index="1338" Name="DI_GLBoxPG22CNT2Alarm" BufferOffset="1027" Addr="D64.3"  Description="GL box PG22 CNT2 alarm" />
		<DI_ITEM Index="1338" Name="DI_GLBoxPG23CNT1Alarm" BufferOffset="1028" Addr="D64.4"  Description="GL box PG23 CNT1 alarm" />
		<DI_ITEM Index="1338" Name="DI_GLBoxPG23CNT2Alarm" BufferOffset="1029" Addr="D64.5"  Description="GL box PG23 CNT2 alarm" />
		<DI_ITEM Index="1338" Name="DI_GLBoxPG24CNT1Alarm" BufferOffset="1030" Addr="D64.6"  Description="GL box PG24 CNT1 alarm" />
		<DI_ITEM Index="1338" Name="DI_GLBoxPG24CNT2Alarm" BufferOffset="1031" Addr="D64.7"  Description="GL box PG24 CNT2 alarm" />
		<DI_ITEM Index="1338" Name="DI_GLBoxPG25CNT1Alarm" BufferOffset="1032" Addr="D64.8"  Description="GL box PG25 CNT1 alarm" />
		<DI_ITEM Index="1338" Name="DI_GLBoxPG25CNT2Alarm" BufferOffset="1033" Addr="D64.9"  Description="GL box PG25 CNT2 alarm" />
		<DI_ITEM Index="1338" Name="DI_GLBoxPG31CNT1Alarm" BufferOffset="1034" Addr="D64.10" Description="GL box PG31 CNT1 alarm" />
		<DI_ITEM Index="1338" Name="DI_GLBoxPG31CNT2Alarm" BufferOffset="1035" Addr="D64.11" Description="GL box PG31 CNT2 alarm" />
		<DI_ITEM Index="1338" Name="DI_GLBoxPG32CNT1Alarm" BufferOffset="1036" Addr="D64.12" Description="GL box PG32 CNT1 alarm" />
		<DI_ITEM Index="1338" Name="DI_GLBoxPG32CNT2Alarm" BufferOffset="1037" Addr="D64.13" Description="GL box PG32 CNT2 alarm" />


		<DI_ITEM Index="1338" Name="DI_LSC1HLEVEL" BufferOffset="1040" Addr="D65.0"  Description="LSC1-H LEVEL" />
		<DI_ITEM Index="1338" Name="DI_LSC1MLEVEL" BufferOffset="1041" Addr="D65.1"  Description="LSC1-M LEVEL" />
		<DI_ITEM Index="1338" Name="DI_LSC1LLEVEL" BufferOffset="1042" Addr="D65.2"  Description="LSC1-L LEVEL" />
		<DI_ITEM Index="1338" Name="DI_LSC2HLEVEL" BufferOffset="1044" Addr="D65.4"  Description="LSC2-H LEVEL" />
		<DI_ITEM Index="1338" Name="DI_LSC2MLEVEL" BufferOffset="1045" Addr="D65.5"  Description="LSC2-M LEVEL" />
		<DI_ITEM Index="1338" Name="DI_LSC2LLEVEL" BufferOffset="1046" Addr="D65.6"  Description="LSC2-L LEVEL" />

		<DI_ITEM Index="1338" Name="DI_VG11ZeroRuning" BufferOffset="1056" Addr="D66.0"  Description="VG11 Runing" />
		<DI_ITEM Index="1338" Name="DI_VG11ZeroEnd" BufferOffset="1057" Addr="D66.1"  Description="VG11 Complete" />
		<DI_ITEM Index="1338" Name="DI_VG11ZeroError" BufferOffset="1058" Addr="D66.2"  Description="VG11 Error" />
		<DI_ITEM Index="1338" Name="DI_VG13ZeroRuning" BufferOffset="1059" Addr="D66.3"  Description="VG13 Runing" />
		<DI_ITEM Index="1338" Name="DI_VG13ZeroEnd" BufferOffset="1060" Addr="D66.4"  Description="VG13 Complete" />
		<DI_ITEM Index="1338" Name="DI_VG13ZeroError" BufferOffset="1061" Addr="D66.5"  Description="VG13 Error" />

		<DI_ITEM Index="1184" Name="DI_HeatingExhaust1stAlarmMS1" BufferOffset="1184" Addr="D74.0" Description="Heating exhaust 1st alarm MS1" />
		<DI_ITEM Index="1185" Name="DI_HeatingExhaust2ndAlarmMS1" BufferOffset="1185" Addr="D74.1" Description="Heating exhaust 2nd alarm MS1" />

		<DI_ITEM Index="1188" Name="DI_ScavengeExhaust1stAlarmMS3" BufferOffset="1188" Addr="D74.4" Description="scavenge exhaust 1st alarm MS3" />
		<DI_ITEM Index="1189" Name="DI_ScavengeExhaust2ndAlarmMS3" BufferOffset="1189" Addr="D74.5" Description="scavenge exhaust 2nd alarm MS3" />
		<DI_ITEM Index="1190" Name="DI_ValveBoxExhaust1stAlarmMS4" BufferOffset="1190" Addr="D74.6" Description="valve box exhaust 1st alarm MS4" />
		<DI_ITEM Index="1191" Name="DI_ValveBoxExhaust2ndAlarmMS4" BufferOffset="1191" Addr="D74.7" Description="valve box exhaust 2nd alarm MS4" />
		<DI_ITEM Index="1192" Name="DI_LoadingAreaExhaust1stAlarmMS5" BufferOffset="1192" Addr="D74.8" Description="loading area exhaust 1st alarm MS5" />
		<DI_ITEM Index="1193" Name="DI_LoadingAreaExhaust2ndAlarmMS5" BufferOffset="1193" Addr="D74.9" Description="loading area exhaust 2nd alarm MS5" />
		<DI_ITEM Index="1196" Name="DI_LAExhaust1stAlarmMS7" BufferOffset="1196" Addr="D74.12" Description="common exhaust 1st alarm MS7" />
		<DI_ITEM Index="1197" Name="DI_LAExhaust2ndAlarmMS7" BufferOffset="1197" Addr="D74.13" Description="common exhaust 2nd alarm MS7" />
		<DI_ITEM Index="1198" Name="DI_RHC1stAlarmMS8" BufferOffset="1198" Addr="D74.14" Description="RHC 1st alarm MS8" />
		<DI_ITEM Index="1199" Name="DI_RHC2ndAlarmMS8" BufferOffset="1199" Addr="D74.15" Description="RHC 2nd alarm MS8" />

		<DI_ITEM Index="1200" Name="DI_REV1stAlarmMS9" BufferOffset="1200" Addr="D75.0" Description="LSC-up 1st alarm MS9" />
		<DI_ITEM Index="1201" Name="DI_REV2ndAlarmMS9" BufferOffset="1201" Addr="D75.1" Description="LSC-up 2nd alarm MS9" />
		<DI_ITEM Index="1202" Name="DI_REV1stAlarmMS10" BufferOffset="1202" Addr="D75.2" Description="LSC-down 1st alarm MS10" />
		<DI_ITEM Index="1203" Name="DI_REV2ndAlarmMS10" BufferOffset="1203" Addr="D75.3" Description="LSC-down 2nd alarm MS10" />
		<DI_ITEM Index="1204" Name="DI_OPBoxPS11Out1" BufferOffset="1204" Addr="D75.4" Description="OP box PS11 out1" />

		<DI_ITEM Index="1218" Name="DI_AV202LADoorLocked" BufferOffset="1218" Addr="D76.2" Description="AV95 LA door locked" />
		<DI_ITEM Index="1219" Name="DI_AV20LADoorUnlocked" BufferOffset="1219" Addr="D76.3" Description="AV95 LA door unlocked" />

		<DI_ITEM Index="1232" Name="DI_StartButton" BufferOffset="1232" Addr="D77.0" Description="start button" />
		<DI_ITEM Index="1233" Name="DI_StopButton" BufferOffset="1233" Addr="D77.1" Description="stop button" />
		<DI_ITEM Index="1234" Name="DI_ResetButton" BufferOffset="1234" Addr="D77.2" Description="reset button" />
		<DI_ITEM Index="1235" Name="DI_MechaStopButton" BufferOffset="1235" Addr="D77.3" Description="mecha stop button" />
		<DI_ITEM Index="1236" Name="DI_AutoOrmanualKnob" BufferOffset="1236" Addr="D77.4" Description="auto/manual knob" />
		<DI_ITEM Index="1237" Name="DI_NormalOrMaintainKnob" BufferOffset="1237" Addr="D77.5" Description="normal/maintain knob" />
		<DI_ITEM Index="1238" Name="DI_HeaterPowerOnOffKnob" BufferOffset="1238" Addr="D77.6" Description="heater power on/off knob" />
		<DI_ITEM Index="1239" Name="DI_REVReset1" BufferOffset="1239" Addr="D77.7" Description="REV reset1" />
		<DI_ITEM Index="1240" Name="DI_REVReset2" BufferOffset="1240" Addr="D77.8" Description="REV reset2" />
		<DI_ITEM Index="1241" Name="DI_REVReset3" BufferOffset="1241" Addr="D77.9" Description="REV reset3" />
		<DI_ITEM Index="1242" Name="DI_REVReset4" BufferOffset="1242" Addr="D77.10" Description="REV reset4" />
		<DI_ITEM Index="1243" Name="DI_REVReset5" BufferOffset="1243" Addr="D77.11" Description="REV reset5" />

		<DI_ITEM Index="1248" Name="DI_FilterBox1Fan1Alarm" BufferOffset="1248" Addr="D78.0" Description="Filter Box1 Fan1 Alarm" />
		<DI_ITEM Index="1249" Name="DI_FilterBox1Fan2Alarm" BufferOffset="1249" Addr="D78.1" Description="Filter Box1 Fan2 Alarm" />

		<DI_ITEM Index="1296" Name="DI_RHCFlowAlarmFL901" BufferOffset="1296" Addr="D81.0" Description="RHC flow alarm(FL901)" />
		<DI_ITEM Index="1297" Name="DI_CoolingWaterFlowAlarmOfFurnaceFL902" BufferOffset="1297" Addr="D81.1" Description="water flow alarm  FL902" />
		<DI_ITEM Index="1298" Name="DI_CoolingWaterFlowAlarmOfShuttleFL903" BufferOffset="1298" Addr="D81.2" Description="water flow alarm  FL903" />
		<DI_ITEM Index="1299" Name="DI_CoolingWaterFlowAlarmOfBoatRotationFL904" BufferOffset="1299" Addr="D81.3" Description="water flow alarm  FL904" />
		<DI_ITEM Index="1300" Name="DI_CoolingWaterFlowAlarmOfFlangeFL905" BufferOffset="1300" Addr="D81.4" Description="water flow alarm  FL905" />
		<DI_ITEM Index="1301" Name="DI_CoolingWaterFlowAlarmOfLoadingAreaFL906" BufferOffset="1301" Addr="D81.5" Description="water flow alarm  FL906" />

		<DI_ITEM Index="1301" Name="DI_DG1Output1" BufferOffset="1304" Addr="D81.8" Description="DG1 output-1" />
		<DI_ITEM Index="1301" Name="DI_DG1Output2" BufferOffset="1305" Addr="D81.9" Description="DG1 output-2" />
		<DI_ITEM Index="1301" Name="DI_PS13LStatus" BufferOffset="1306" Addr="D81.10" Description="PS13 L status" />
		<DI_ITEM Index="1301" Name="DI_PS13HStatus" BufferOffset="1307" Addr="D81.11" Description="PS13 H status" />
		<DI_ITEM Index="1301" Name="DI_APCValveStatus" BufferOffset="1308" Addr="D81.12" Description="APC valve status" />
		<DI_ITEM Index="1301" Name="DI_APCAlarmStatus" BufferOffset="1309" Addr="D81.13" Description="APC alarm status" />

		<DI_ITEM Index="1312" Name="DI_VG11Status" BufferOffset="1312" Addr="D82.0" Description="VG11 status" />
		<DI_ITEM Index="1313" Name="DI_VG11LowAlarm" BufferOffset="1313" Addr="D82.1" Description="VG11 LowAlarm" />
		<DI_ITEM Index="1314" Name="DI_VG11HighAlarm" BufferOffset="1314" Addr="D82.2" Description="VG11 HighAlarm" />
		<DI_ITEM Index="1315" Name="DI_VG12Status" BufferOffset="1315" Addr="D82.3" Description="VG12 status" />
		<DI_ITEM Index="1316" Name="DI_VG12LowAlarm" BufferOffset="1316" Addr="D82.4" Description="VG12 LowAlarm" />
		<DI_ITEM Index="1317" Name="DI_VG12HighAlarm" BufferOffset="1317" Addr="D82.5" Description="VG12 HighAlarm" />
		<DI_ITEM Index="1318" Name="DI_VG13Status" BufferOffset="1318" Addr="D82.6" Description="VG13 status" />
		<DI_ITEM Index="1319" Name="DI_VG13LowAlarm" BufferOffset="1319" Addr="D82.7" Description="VG13 LowAlarm" />
		<DI_ITEM Index="1320" Name="DI_VG13HighAlarm" BufferOffset="1320" Addr="D82.8" Description="VG13 HighAlarm" />
		<DI_ITEM Index="1321" Name="DI_PG12CNT1Alarm" BufferOffset="1321" Addr="D82.9" Description="PG12 CNT1 alarm" />
		<DI_ITEM Index="1322" Name="DI_PG12CNT2Alarm" BufferOffset="1322" Addr="D82.10" Description="PG12 CNT2 alarm" />
		<DI_ITEM Index="1323" Name="DI_PG13CNT1Alarm" BufferOffset="1323" Addr="D82.11" Description="PG13 CNT1 alarm" />
		<DI_ITEM Index="1324" Name="DI_PG13CNT2Alarm" BufferOffset="1324" Addr="D82.12" Description="PG13 CNT2 alarm" />
		<DI_ITEM Index="1325" Name="DI_PS14OUT1" BufferOffset="1325" Addr="D82.13" Description="PS14 OUT1" />
		<DI_ITEM Index="1326" Name="DI_PS14OUT2" BufferOffset="1326" Addr="D82.14" Description="PS14 OUT2" />

		<DI_ITEM Index="1328" Name="DI_AV66CommonExhaustOpened" BufferOffset="1328" Addr="D83.0" Description="AV66 common exhaust opened" />
		<DI_ITEM Index="1329" Name="DI_AV66CommonExhaustClosed" BufferOffset="1329" Addr="D83.1" Description="AV66 common exhaust closed" />
		<DI_ITEM Index="1330" Name="DI_AV96CommonExhaustCylinderOpened" BufferOffset="1330" Addr="D83.2" Description="AV96 common exhaust cylinder opened" />
		<DI_ITEM Index="1331" Name="DI_AV96CommonExhaustCylinderClosed" BufferOffset="1331" Addr="D83.3" Description="AV96 common exhaust cylinder closed" />
		<DI_ITEM Index="1332" Name="DI_CoolingWaterPressureOut1" BufferOffset="1332" Addr="D83.4" Description="cooling water pressure Out1" />
		<DI_ITEM Index="1333" Name="DI_CoolingWaterPressureOut2" BufferOffset="1333" Addr="D83.5" Description="cooling water pressure Out2" />
		<DI_ITEM Index="1334" Name="DI_AirFlowFL70" BufferOffset="1334" Addr="D83.6" Description="air flow FL70" />
		<DI_ITEM Index="1335" Name="DI_AirFlowFL71" BufferOffset="1335" Addr="D83.7" Description="air flow FL71" />
		<DI_ITEM Index="1336" Name="DI_AirFlowFL72" BufferOffset="1336" Addr="D83.8" Description="air flow FL72" />
		<DI_ITEM Index="1337" Name="DI_WaterFlowFL61" BufferOffset="1337" Addr="D83.9" Description="water flow FL61" />
		<DI_ITEM Index="1338" Name="DI_WaterFlowFL62" BufferOffset="1338" Addr="D83.10" Description="water flow FL62" />

		<DI_ITEM Index="1338" Name="DI_SWITCHINGFUNCTUON1LAM1" BufferOffset="1344" Addr="D84.0" Description="SWITCHING FUNCTUON1 LAM1" />
		<DI_ITEM Index="1338" Name="DI_SWITCHINGFUNCTUON1LAM2" BufferOffset="1345" Addr="D84.1" Description="SWITCHING FUNCTUON1 LAM2" />
		<DI_ITEM Index="1338" Name="DI_SWITCHINGFUNCTUON2LAM1" BufferOffset="1346" Addr="D84.2" Description="SWITCHING FUNCTUON2 LAM1" />
		<DI_ITEM Index="1338" Name="DI_SWITCHINGFUNCTUON2LAM2" BufferOffset="1347" Addr="D84.3" Description="SWITCHING FUNCTUON2 LAM2" />
		<DI_ITEM Index="1338" Name="DI_SWITCHINGFUNCTUON3LAM1" BufferOffset="1348" Addr="D84.4" Description="SWITCHING FUNCTUON3 LAM1" />
		<DI_ITEM Index="1338" Name="DI_SWITCHINGFUNCTUON3LAM2" BufferOffset="1349" Addr="D84.5" Description="SWITCHING FUNCTUON3 LAM2" />
		<DI_ITEM Index="1338" Name="DI_SWITCHINGFUNCTUON4LAM1" BufferOffset="1350" Addr="D84.6" Description="SWITCHING FUNCTUON4 LAM1" />
		<DI_ITEM Index="1338" Name="DI_SWITCHINGFUNCTUON4LAM2" BufferOffset="1351" Addr="D84.7" Description="SWITCHING FUNCTUON4 LAM2" />
		<DI_ITEM Index="1338" Name="DI_ERRORLAM1" BufferOffset="1352" Addr="D84.8" Description="ERROR LAM1" />
		<DI_ITEM Index="1338" Name="DI_ERRORLAM2" BufferOffset="1353" Addr="D84.9" Description="ERROR LAM2" />
		<DI_ITEM Index="1338" Name="" BufferOffset="1354" Addr="D84.10" Description="" />
		<DI_ITEM Index="1338" Name="" BufferOffset="1355" Addr="D84.11" Description="" />
		<DI_ITEM Index="1338" Name="" BufferOffset="1356" Addr="D84.12" Description="" />
		<DI_ITEM Index="1338" Name="" BufferOffset="1357" Addr="D84.13" Description="" />
		<DI_ITEM Index="1338" Name="" BufferOffset="1358" Addr="D84.14" Description="" />
		<DI_ITEM Index="1338" Name="" BufferOffset="1359" Addr="D84.15" Description="" />

		<DI_ITEM Index="1520" Name="DI_RFSetPowerReached" BufferOffset="1520" Addr="D95.0" Description="RF set power reached" />
		<DI_ITEM Index="1521" Name="DI_RFAlarm" BufferOffset="1521" Addr="D95.1" Description="RF alarm" />
		<DI_ITEM Index="1522" Name="DI_RFOnStatus" BufferOffset="1522" Addr="D95.2" Description="RF on status" />

		<DI_ITEM Index="1632" Name="DI_FurnaceMainCircuitBreakerStatusMonitor" BufferOffset="1632" Addr="D102.0" Description="Furnace Main Circuit Breaker Status Monitor" />
		<DI_ITEM Index="1633" Name="DI_Zone1CircuitBreakerStatusMonitor" BufferOffset="1633" Addr="D102.1" Description="Zone1 Circuit Breaker Status Monitor" />
		<DI_ITEM Index="1634" Name="DI_Zone2CircuitBreakerStatusMonitor" BufferOffset="1634" Addr="D102.2" Description="Zone2 Circuit Breaker Status Monitor" />
		<DI_ITEM Index="1635" Name="DI_Zone4CircuitBreakerStatusMonitor" BufferOffset="1635" Addr="D102.3" Description="Zone4 Circuit Breaker Status Monitor" />
		<DI_ITEM Index="1636" Name="DI_Zone5CircuitBreakerStatusMonitor" BufferOffset="1636" Addr="D102.4" Description="Zone5 Circuit Breaker Status Monitor" />
		<DI_ITEM Index="1637" Name="DI_Zone3CircuitBreakerStatusMonitor" BufferOffset="1637" Addr="D102.5" Description="Zone3 Circuit Breaker Status Monitor" />
		<DI_ITEM Index="1638" Name="DI_UPSFault" BufferOffset="1638" Addr="D102.6" Description="UPS Fault" />
		<DI_ITEM Index="1639" Name="DI_K141UPSAlarm" BufferOffset="1639" Addr="D102.7" Description="K141 UPS Alarm" />
		<DI_ITEM Index="1640" Name="DI_UPSBypassStatus" BufferOffset="1640" Addr="D102.8" Description="UPS Bypass Status" />
		<DI_ITEM Index="1641" Name="DI_UPSBatteryVoltageLow" BufferOffset="1641" Addr="D102.9" Description="UPS Battery Voltage Low" />
		<DI_ITEM Index="1642" Name="DI_UPSStart" BufferOffset="1642" Addr="D102.10" Description="UPS Start" />
		<DI_ITEM Index="1643" Name="DI_UPSACInputCutOff" BufferOffset="1643" Addr="D102.11" Description="UPS AC Input Cut Off" />
		<DI_ITEM Index="1644" Name="DI_N2PurgeBOXPG14CNT1" BufferOffset="1644" Addr="D102.12" Description="N2 Purge BOX PG14 CNT1" />
		<DI_ITEM Index="1645" Name="DI_N2PurgeBOXPG14CNT2" BufferOffset="1645" Addr="D102.13" Description="N2 Purge BOX PG14 CNT2" />
		<DI_ITEM Index="1646" Name="DI_N2PurgeBOXPG15CNT1" BufferOffset="1646" Addr="D102.14" Description="N2 Purge BOX PG15 CNT1" />
		<DI_ITEM Index="1647" Name="DI_N2PurgeBOXPG15CNT2" BufferOffset="1647" Addr="D102.15" Description="N2 Purge BOX PG15 CNT2" />
		<DI_ITEM Index="1648" Name="DI_N2PurgeBOXPG16CNT1" BufferOffset="1648" Addr="D103.0" Description="N2 Purge BOX PG16 CNT1" />
		<DI_ITEM Index="1649" Name="DI_N2PurgeBOXPG16CNT2" BufferOffset="1649" Addr="D103.1" Description="N2 Purge BOX PG16 CNT2" />
		<DI_ITEM Index="1650" Name="DI_N2PurgeBOXPG70CNT1" BufferOffset="1650" Addr="D103.2" Description="N2 Purge BOX PG70 CNT1" />
		<DI_ITEM Index="1651" Name="DI_N2PurgeBOXPG70CNT2" BufferOffset="1651" Addr="D103.3" Description="N2 Purge BOX PG70 CNT2" />
		<DI_ITEM Index="1652" Name="DI_PS17ValueLowLimitAlarm" BufferOffset="1652" Addr="D103.4" Description="PS17 Value Low Limit Alarm1" />
		<DI_ITEM Index="1653" Name="DI_PS17ValueLowLimitAlarm2" BufferOffset="1653" Addr="D103.5" Description="PS17 Value Low Limit Alarm2" />

		<DI_ITEM Index="1654" Name="DI_BlowerPowerStatusFeedback" BufferOffset="1654"           Addr="D103.6" Description="Blower Power Status Feedback"/>
		<DI_ITEM Index="1655" Name="DI_VaccumPumpBothOn" BufferOffset="1655"           Addr="D103.7" Description="Vaccum1 Pump Both On"/>
		<DI_ITEM Index="1656" Name="DI_Vaccum1PumpWarning" BufferOffset="1656"           Addr="D103.8" Description="Vaccum1 Pump Warning"/>
		<DI_ITEM Index="1657" Name="DI_Vaccum1PumpAlarm" BufferOffset="1657"           Addr="D103.9" Description="Vaccum1 Pump Alarm"/>
		<DI_ITEM Index="1658" Name="DI_Vaccum2PumpBothOn" BufferOffset="1658"           Addr="D103.10" Description="Vaccum2 Pump Both On"/>
		<DI_ITEM Index="1659" Name="DI_Vaccum2PumpWarning" BufferOffset="1659"           Addr="D103.11" Description="Vaccum2 Pump Warning"/>
		<DI_ITEM Index="1660" Name="DI_Vaccum2PumpAlarm" BufferOffset="1660"           Addr="D103.12" Description="Vaccum2 Pump Alarm"/>
		<DI_ITEM Index="1661" Name="DI_N2PurgeBOXPG13CNT1" BufferOffset="1661"           Addr="D103.13" Description="N2 Purge BOX PG13 CNT1"/>
		<DI_ITEM Index="1662" Name="DI_N2PurgeBOXPG13CNT2" BufferOffset="1662"           Addr="D103.14" Description="N2 Purge BOX PG13 CNT2"/>
		<DI_ITEM Index="1664" Name="DI_ForelineHeaterJacketLightAlarm" BufferOffset="1664"           Addr="D104.0" Description="Foreline heater jacket light alarm"/>
		<DI_ITEM Index="1665" Name="DI_ForelineHeaterJacketHeavyAlarm" BufferOffset="1665"           Addr="D104.1" Description="Foreline heater jacket heavy alarm"/>
		<DI_ITEM Index="1666" Name="DI_ScrubberWarning" BufferOffset="1666"           Addr="D104.2" Description="Scrubber warning"/>
		<DI_ITEM Index="1667" Name="DI_ScrubberAlarm" BufferOffset="1667"           Addr="D104.3" Description="Scrubber alarm"/>
		<DI_ITEM Index="1668" Name="DI_ExternalHPMIn" BufferOffset="1668"           Addr="D104.4" Description="External HPM In"/>

		<DI_ITEM Index="1680" Name="DI_K169UPSAlarm" BufferOffset="1680" Addr="D105.0" Description="K169 UPS Alarm" />
		<DI_ITEM Index="1681" Name="DI_HotN2Alarm" BufferOffset="1681" Addr="D105.1" Description="HOT N2 ALARM" />
		<DI_ITEM Index="1682" Name="DI_ForELineEchaustHeaterALARM" BufferOffset="1682" Addr="D105.2" Description="FORELINE ECHAUST HEATER ALARM" />
		<DI_ITEM Index="1688" Name="DI_EXTERNALEMOIN" BufferOffset="1688" Addr="D105.8" Description="EXTERNAL EMO IN" />

		<DI_ITEM Index="1689" Name="DI_LDS1SystemReady" BufferOffset="1689"  Addr="D105.9" Description="LDS1 system ready"/>
		<DI_ITEM Index="1690" Name="DI_LDS1MajorAlarm" BufferOffset="1690"           Addr="D105.10" Description="LDS1 major alarm"/>
		<DI_ITEM Index="1691" Name="DI_LDS1MinorWarning" BufferOffset="1691"           Addr="D105.11" Description="LDS1 minor warning"/>
		<DI_ITEM Index="1692" Name="DI_LDS1liquidLowWarning" BufferOffset="1692"           Addr="D105.12" Description="LDS1 liquid low warning"/>
		<DI_ITEM Index="1693" Name="DI_LDS1TankBlankAlarm" BufferOffset="1693"           Addr="D105.13" Description="LDS1 tank blank alarm"/>
		<DI_ITEM Index="1694" Name="DI_LDS2SystemReady" BufferOffset="1694"           Addr="D105.14" Description="LDS2 system ready"/>
		<DI_ITEM Index="1695" Name="DI_LDS2MajorAlarm" BufferOffset="1695"           Addr="D105.15" Description="LDS2 major alarm"/>
		<DI_ITEM Index="1696" Name="DI_LDS2MinorWarning" BufferOffset="1696" Addr="D106.0" Description="LDS2 minor warning"/>
		<DI_ITEM Index="1697" Name="DI_LDS2LiquidLowWarning" BufferOffset="1697" Addr="D106.1" Description="LDS2 liquid low warning"/>
		<DI_ITEM Index="1698" Name="DI_LDS2TankBlankAlarm" BufferOffset="1698" Addr="D106.2" Description="LDS2 tank blank alarm"/>

		<DI_ITEM Index="1699" Name="DI_SCRUBBER1SYSTEMOK" BufferOffset="1699" Addr="D106.3" Description="SCRUBBER-1 SYSTEM OK"/>
		<DI_ITEM Index="1700" Name="DI_SCRUBBER1WARNING" BufferOffset="1700" Addr="D106.4" Description="SCRUBBER-1 WARNING"/>
		<DI_ITEM Index="1701" Name="DI_SCRUBBER1ALARM" BufferOffset="1701" Addr="D106.5" Description="SCRUBBER-1 ALARM"/>
		<DI_ITEM Index="1702" Name="DI_SCRUBBER2SYSTEMOK" BufferOffset="1702" Addr="D106.6" Description="SCRUBBER-2 SYSTEM OK"/>
		<DI_ITEM Index="1703" Name="DI_SCRUBBER2WARNING" BufferOffset="1703" Addr="D106.7" Description="SCRUBBER-2 WARNING"/>
		<DI_ITEM Index="1704" Name="DI_SCRUBBER2ALARM" BufferOffset="1704" Addr="D106.8" Description="SCRUBBER-2 ALARM"/>
		<DI_ITEM Index="1705" Name="DI_BOTHSCRUBBERDOWN" BufferOffset="1705" Addr="D106.9" Description="BOTH SCRUBBER DOWN"/>
		<DI_ITEM Index="1706" Name="DI_LDS1SUPPLIED" BufferOffset="1706" Addr="D106.10" Description="LDS1 SUPPLIED"/>
		<DI_ITEM Index="1707" Name="DI_LDS2SUPPLIED" BufferOffset="1707" Addr="D106.11" Description="LDS2 SUPPLIED"/>

		<DI_ITEM Index="1744" Name="DI_BoatRAxisInWorkPosition" BufferOffset="1744" Addr="D109.0" Description="Boat R Axis in work position" />
		<DI_ITEM Index="1745" Name="DI_BoatRAxisMoving " BufferOffset="1745" Addr="D109.1" Description="Boat R Axis moving " />
		<DI_ITEM Index="1746" Name="DI_BoatRAxisAlarm" BufferOffset="1746" Addr="D109.2" Description="Boat R Axis alarm" />
		<DI_ITEM Index="1747" Name="DI_BoatRAxisInHomeArea" BufferOffset="1747" Addr="D109.3" Description="Boat R Axis in home area" />
		<DI_ITEM Index="1748" Name="DI_BoatRAxisInReady" BufferOffset="1748" Addr="D109.4" Description="Boat R Axis in ready" />
		<DI_ITEM Index="1749" Name="DI_BoatRAxisWarning" BufferOffset="1749" Addr="D109.5" Description="Boat R Axis warning" />
		<DI_ITEM Index="1750" Name="DI_BoatRAxisInHomePosition" BufferOffset="1750" Addr="D109.6" Description="Boat R Axis in home position" />
		<DI_ITEM Index="1751" Name="DI_BoatLiftCAPInPosition" BufferOffset="1751" Addr="D109.7" Description="Boat Lift CAP In Position" />

		<DI_ITEM Index="1760" Name="DI_L1Position" BufferOffset="1760" Addr="D110.0" Description="L1 Position" />
		<DI_ITEM Index="1761" Name="DI_L2Position" BufferOffset="1761" Addr="D110.1" Description="L2 Position" />
		<DI_ITEM Index="1762" Name="DI_L3Position" BufferOffset="1762" Addr="D110.2" Description="L3 Position" />
		<DI_ITEM Index="1763" Name="DI_L4Position" BufferOffset="1763" Addr="D110.3" Description="L4 Position" />
		<DI_ITEM Index="1764" Name="DI_H1Position" BufferOffset="1764" Addr="D110.4" Description="H1 Position" />
		<DI_ITEM Index="1765" Name="DI_H2Position" BufferOffset="1765" Addr="D110.5" Description="H2 Position" />
		<DI_ITEM Index="1766" Name="DI_H3Position" BufferOffset="1766" Addr="D110.6" Description="H3 Position" />
		<DI_ITEM Index="1767" Name="DI_H4Position" BufferOffset="1767" Addr="D110.7" Description="H4 Position" />
		<DI_ITEM Index="1768" Name="DI_FurnaceShutterOpened" BufferOffset="1768" Addr="D110.8" Description="Furnace shutter opened" />
		<DI_ITEM Index="1769" Name="DI_FurnaceShutterClosed" BufferOffset="1769" Addr="D110.9" Description="Furnace shutter closed" />
		<DI_ITEM Index="1770" Name="DI_LADamperOpen" BufferOffset="1770" Addr="D110.10" Description="LA Damper Open" />
		<DI_ITEM Index="1771" Name="DI_LADamperClose" BufferOffset="1771" Addr="D110.11" Description="LA Damper Close" />

		<DI_ITEM Index="1792" Name="DI_BufferRotationConvDetectSensor" BufferOffset="1792" Addr="D112.0" Description="buffer rotation conv. detect sensor" />
		<DI_ITEM Index="1793" Name="DI_BoatLiftMotorUpPosition" BufferOffset="1793" Addr="D112.1" Description="boat lift motor up position" />
		<DI_ITEM Index="1794" Name="DI_BoatLiftMotorDownPosition" BufferOffset="1794" Addr="D112.2" Description="boat lift motor down position" />
		<DI_ITEM Index="1795" Name="DI_WaferRobotAtPOD1Area" BufferOffset="1795" Addr="D112.3" Description="Wafer Robot At POD1 Area" />
		<DI_ITEM Index="1796" Name="DI_WaferRobotAtPOD2Area" BufferOffset="1796" Addr="D112.4" Description="Wafer Robot At POD2 Area" />
		<DI_ITEM Index="1797" Name="DI_WaferRobotAtBoatRotaryArea" BufferOffset="1797" Addr="D112.5" Description="Wafer Robot At Boat Rotary Area" />
		<DI_ITEM Index="1798" Name="DI_WaferRobotAtBoatBottomArea" BufferOffset="1798" Addr="D112.6" Description="Wafer Robot At Boat Bottom Area" />
		<DI_ITEM Index="1799" Name="DI_WaferRobotTPEMOButtonStatus" BufferOffset="1799" Addr="D112.7" Description="Wafer Robot TP EMO Button Status" />
		<DI_ITEM Index="1800" Name="DI_WaferRobotTPServoOn" BufferOffset="1800" Addr="D112.8" Description="Wafer Robot TP EMO Servo On" />

		<DI_ITEM Index="1808" Name="DI_POD1FOUPExtend" BufferOffset="1808" Addr="D113.0" Description="POD1 FOUP extend" />
		<DI_ITEM Index="1809" Name="DI_POD1FOUPRetract" BufferOffset="1809" Addr="D113.1" Description="POD1 FOUP retract" />
		<DI_ITEM Index="1810" Name="DI_POD1FOUPInPosition" BufferOffset="1810" Addr="D113.2" Description="POD1 FOUP in position" />
		<DI_ITEM Index="1811" Name="DI_POD1XForward" BufferOffset="1811" Addr="D113.3" Description="POD1 X forward" />
		<DI_ITEM Index="1812" Name="DI_POD1XBackward" BufferOffset="1812" Addr="D113.4" Description="POD1 X backward" />
		<DI_ITEM Index="1813" Name="DI_POD1YForward" BufferOffset="1813" Addr="D113.5" Description="POD1 Y forward" />
		<DI_ITEM Index="1814" Name="DI_POD1YBackward" BufferOffset="1814" Addr="D113.6" Description="POD1 Y backward" />
		<DI_ITEM Index="1815" Name="DI_POD1FOUPLocked" BufferOffset="1815" Addr="D113.7" Description="POD1 FOUP locked" />
		<DI_ITEM Index="1816" Name="DI_POD1FOUPUnlocked" BufferOffset="1816" Addr="D113.8" Description="POD1 FOUP unlocked" />
		<DI_ITEM Index="1817" Name="DI_POD1CollisionAvoidanceForward" BufferOffset="1817" Addr="D113.9" Description="POD1 collision avoidance forward" />
		<DI_ITEM Index="1818" Name="DI_POD1CollisionAvoidanceBackward" BufferOffset="1818" Addr="D113.10" Description="POD1 collision avoidance backward" />
		<DI_ITEM Index="1819" Name="DI_POD1N2PurgeAV63Closed" BufferOffset="1819" Addr="D113.11" Description="POD1 N2 purge AV63 closed" />
		<DI_ITEM Index="1820" Name="DI_POD1N2PurgeAV63Opened" BufferOffset="1820" Addr="D113.12" Description="POD1 N2 purge AV63 opened" />
		<DI_ITEM Index="1821" Name="DI_POD1FOUPVacuumSuckingOK" BufferOffset="1821" Addr="D113.13" Description="POD1 FOUP vacuum sucking OK" />
		<DI_ITEM Index="1822" Name="DI_POD1FOUPVacuumSuckingAlarm" BufferOffset="1822" Addr="D113.14" Description="POD1 FOUP vacuum sucking alarm" />

		<DI_ITEM Index="1824" Name="DI_POD2FOUPExtend" BufferOffset="1824" Addr="D114.0" Description="POD2 FOUP extend" />
		<DI_ITEM Index="1825" Name="DI_POD2FOUPRetract" BufferOffset="1825" Addr="D114.1" Description="POD2 FOUP retract" />
		<DI_ITEM Index="1826" Name="DI_POD2FOUPInPosition" BufferOffset="1826" Addr="D114.2" Description="POD2 FOUP in position" />
		<DI_ITEM Index="1827" Name="DI_POD2XForward" BufferOffset="1827" Addr="D114.3" Description="POD2 X forward" />
		<DI_ITEM Index="1828" Name="DI_POD2XBackward" BufferOffset="1828" Addr="D114.4" Description="POD2 X backward" />
		<DI_ITEM Index="1829" Name="DI_POD2YForward" BufferOffset="1829" Addr="D114.5" Description="POD2 Y forward" />
		<DI_ITEM Index="1830" Name="DI_POD2YBackward" BufferOffset="1830" Addr="D114.6" Description="POD2 Y backward" />
		<DI_ITEM Index="1831" Name="DI_POD2FOUPLocked" BufferOffset="1831" Addr="D114.7" Description="POD2 FOUP locked" />
		<DI_ITEM Index="1832" Name="DI_POD2FOUPUnlocked" BufferOffset="1832" Addr="D114.8" Description="POD2 FOUP unlocked" />
		<DI_ITEM Index="1833" Name="DI_POD2CollisionAvoidanceForward" BufferOffset="1833" Addr="D114.9" Description="POD2 collision avoidance forward" />
		<DI_ITEM Index="1834" Name="DI_POD2CollisionAvoidanceBackward" BufferOffset="1834" Addr="D114.10" Description="POD2 collision avoidance backward" />
		<DI_ITEM Index="1835" Name="DI_POD2N2PurgeAV63Closed" BufferOffset="1835" Addr="D114.11" Description="POD2 N2 purge AV63 closed" />
		<DI_ITEM Index="1836" Name="DI_POD2N2PurgeAV63Opened" BufferOffset="1836" Addr="D114.12" Description="POD2 N2 purge AV63 opened" />
		<DI_ITEM Index="1837" Name="DI_POD2FOUPVacuumSuckingOK" BufferOffset="1837" Addr="D114.13" Description="POD2 FOUP vacuum sucking OK" />
		<DI_ITEM Index="1838" Name="DI_POD2FOUPVacuumSuckingAlarm" BufferOffset="1838" Addr="D114.14" Description="POD2 FOUP vacuum sucking alarm" />

		<DI_ITEM Index="1840" Name="DI_POD1WaferOnRobot" BufferOffset="1840" Addr="D115.0" Description="POD1 wafer on robot" />
		<DI_ITEM Index="1841" Name="DI_POD2WaferOnRobot" BufferOffset="1841" Addr="D115.1" Description="POD2 wafer on robot" />
		<DI_ITEM Index="1842" Name="DI_WaferRobotTPStatus" BufferOffset="1842" Addr="D115.2" Description="Wafer Robot TP/Host Status" />
		<DI_ITEM Index="1843" Name="DI_WaferRobotPowerOn" BufferOffset="1843" Addr="D115.3" Description="Wafer Robot Power On" />
		<DI_ITEM Index="1844" Name="DI_WaferRobotAlarm" BufferOffset="1844" Addr="D115.4" Description="Wafer Robot Alarm" />
		<DI_ITEM Index="1845" Name="DI_WaferRobotWafer1Checked" BufferOffset="1845" Addr="D115.5" Description="Wafer Robot Wafer1 Checked" />
		<DI_ITEM Index="1846" Name="DI_WaferRobotWafer2Checked" BufferOffset="1846" Addr="D115.6" Description="Wafer Robot Wafer2 Checked" />
		<DI_ITEM Index="1847" Name="DI_WaferRobotWafer3Checked" BufferOffset="1847" Addr="D115.7" Description="Wafer Robot Wafer3 Checked" />
		<DI_ITEM Index="1848" Name="DI_WaferRobotWafer4Checked" BufferOffset="1848" Addr="D115.8" Description="Wafer Robot Wafer4 Checked" />
		<DI_ITEM Index="1849" Name="DI_WaferRobotWafer5Checked" BufferOffset="1849" Addr="D115.9" Description="Wafer Robot Wafer5 Checked" />
		<DI_ITEM Index="1850" Name="DI_WaferRobotZAxisHomePosition" BufferOffset="1850" Addr="D115.10" Description="Wafer Robot Z Axis Home Position" />
		<DI_ITEM Index="1851" Name="DI_WaferRobotYAxisHomePosition" BufferOffset="1851" Addr="D115.11" Description="Wafer Robot Axis-TH Home Position  (Axis-Y)" />
		<DI_ITEM Index="1852" Name="DI_WaferRobotEX1AxisHomePosition" BufferOffset="1852" Addr="D115.12" Description="Wafer Robot Axis-EX1 Home Position  (Axis-X1)" />
		<DI_ITEM Index="1853" Name="DI_WaferRobotEX2AxisHomePosition" BufferOffset="1853" Addr="D115.13" Description="Wafer Robot Axis-EX2 Home Position (Axis-X4)" />
		<DI_ITEM Index="1854" Name="DI_WaferRobotVAxisHomePosition" BufferOffset="1854" Addr="D115.14" Description="Wafer Robot Axis-P Home Hosition (Axis-V)" />
		<DI_ITEM Index="1855" Name="DI_WaferRobotRunning" BufferOffset="1855" Addr="D115.15" Description="Wafer Robot Running" />
		<DI_ITEM Index="1856" Name="DI_LP1FOUPLeftClamp" BufferOffset="1856" Addr="D116.0" Description="AGV loadport1 FOUP left clamp" />
		<DI_ITEM Index="1857" Name="DI_LP1FOUPRightClamp" BufferOffset="1857" Addr="D116.1" Description="AGV loadport1 FOUP right clamp" />
		<DI_ITEM Index="1858" Name="DI_LP1FOUPLeftRelease" BufferOffset="1858" Addr="D116.2" Description="AGV loadport1 FOUP left release" />
		<DI_ITEM Index="1859" Name="DI_LP1FOUPRightRelease" BufferOffset="1859" Addr="D116.3" Description="AGV loadport1 FOUP right release" />
		<DI_ITEM Index="1860" Name="DI_LP1FOUPInPosition1" BufferOffset="1860" Addr="D116.4" Description="AGV loadport1 FOUP in position1" />
		<DI_ITEM Index="1861" Name="DI_LP1FOUPInPosition2" BufferOffset="1861" Addr="D116.5" Description="AGV loadport1 FOUP in position2" />
		<DI_ITEM Index="1862" Name="DI_LP1FOUPInPosition3" BufferOffset="1862" Addr="D116.6" Description="AGV loadport1 FOUP in position3" />
		<DI_ITEM Index="1863" Name="DI_LP1FOUPDetect" BufferOffset="1863" Addr="D116.7" Description="AGV loadport1 FOUP detect" />

		<DI_ITEM Index="1872" Name="DI_LP2FOUPLeftClamp" BufferOffset="1872" Addr="D117.0" Description="AGV loadport2 FOUP left clamp" />
		<DI_ITEM Index="1873" Name="DI_LP2FOUPRightClamp" BufferOffset="1873" Addr="D117.1" Description="AGV loadport2 FOUP right clamp" />
		<DI_ITEM Index="1874" Name="DI_LP2FOUPLeftRelease" BufferOffset="1874" Addr="D117.2" Description="AGV loadport2 FOUP left release" />
		<DI_ITEM Index="1875" Name="DI_LP2FOUPRightRelease" BufferOffset="1875" Addr="D117.3" Description="AGV loadport2 FOUP right release" />
		<DI_ITEM Index="1876" Name="DI_LP2FOUPInPosition1" BufferOffset="1876" Addr="D117.4" Description="AGV loadport2 FOUP in position1" />
		<DI_ITEM Index="1877" Name="DI_LP2FOUPInPosition2" BufferOffset="1877" Addr="D117.5" Description="AGV loadport2 FOUP in position2" />
		<DI_ITEM Index="1878" Name="DI_LP2FOUPInPosition3" BufferOffset="1878" Addr="D117.6" Description="AGV loadport2 FOUP in position3" />
		<DI_ITEM Index="1879" Name="DI_LP2FOUPDetect" BufferOffset="1879" Addr="D117.7" Description="AGV loadport2 FOUP detect" />

		<DI_ITEM Index="1884" Name="DI_FOUPRobotWithinFIMS1Area" BufferOffset="1884" Addr="D117.12" Description="FOUP Robot Within FIMS1 Area" />
		<DI_ITEM Index="1885" Name="DI_FOUPRobotWithinFIMS2Area" BufferOffset="1885" Addr="D117.13" Description="FOUP Robot Within FIMS2 Area" />
		<DI_ITEM Index="1886" Name="DI_FOUPRobotTPEMOButton" BufferOffset="1886" Addr="D117.14" Description="FOUP Robot TP EMO Button" />
		<DI_ITEM Index="1887" Name="DI_FOUPRobotTPServoOn" BufferOffset="1887" Addr="D117.15" Description="FOUP Robot TP Servo On" />
		<DI_ITEM Index="1888" Name="DI_LP3FOUPInPosition1" BufferOffset="1888" Addr="D118.0" Description="OHT1 FOUP in position1(loadport3)" />
		<DI_ITEM Index="1889" Name="DI_LP3FOUPInPosition2" BufferOffset="1889" Addr="D118.1" Description="OHT1 FOUP in position2(loadport3)" />
		<DI_ITEM Index="1890" Name="DI_LP3FOUPInPosition3" BufferOffset="1890" Addr="D118.2" Description="OHT1 FOUP in position3(loadport3)" />
		<DI_ITEM Index="1891" Name="DI_LP3FOUPDetect" BufferOffset="1891" Addr="D118.3" Description="OHT1 FOUP DETECT(loadport3)" />
		<DI_ITEM Index="1892" Name="DI_LP4FOUPInPosition1" BufferOffset="1892" Addr="D118.4" Description="OHT2 FOUP in position1(loadport4)" />
		<DI_ITEM Index="1893" Name="DI_LP4FOUPInPosition2" BufferOffset="1893" Addr="D118.5" Description="OHT2 FOUP in position2(loadport4)" />
		<DI_ITEM Index="1894" Name="DI_LP4FOUPInPosition3" BufferOffset="1894" Addr="D118.6" Description="OHT2 FOUP in position3(loadport4)" />
		<DI_ITEM Index="1895" Name="DI_LP4FOUPDetect" BufferOffset="1895" Addr="D118.7" Description="OHT2 FOUP DETECT(loadport4)" />
		<DI_ITEM Index="1896" Name="DI_LAFrontFOUPBuffer1InPosition" BufferOffset="1896" Addr="D118.8" Description="LA front FOUP buffer1 in position" />
		<DI_ITEM Index="1897" Name="DI_LAFrontFOUPBuffer2InPosition" BufferOffset="1897" Addr="D118.9" Description="LA front FOUP buffer2 in position" />
		<DI_ITEM Index="1898" Name="DI_AGVDoorOpened" BufferOffset="1898" Addr="D118.10" Description="LA shutter clamp on" />
		<DI_ITEM Index="1899" Name="DI_AGVDoorClosed" BufferOffset="1899" Addr="D118.11" Description="LA shutter clamp off" />

		<DI_ITEM Index="1904" Name="DI_MachineStop" BufferOffset="1904" Addr="D119.0" Description="Machine stop" />
		<DI_ITEM Index="1905" Name="DI_MachinePause" BufferOffset="1905" Addr="D119.1" Description="Machine pause" />
		<DI_ITEM Index="1906" Name="DI_OperatorAccessHandOffLeft" BufferOffset="1906" Addr="D119.2" Description="Operator access-hand off left" />
		<DI_ITEM Index="1907" Name="DI_OperatorAccessHandOffRight" BufferOffset="1907" Addr="D119.3" Description="Operator access-hand off right" />

		<DI_ITEM Index="1908" Name="DI_FOUPRobotPedantMode" BufferOffset="1908" Addr="D119.4" Description="Foup robot pedant mode" />
		<DI_ITEM Index="1909" Name="DI_FOUPRobotEachHandWaferStatus" BufferOffset="1909" Addr="D119.5" Description="Foup robot each hand wafer status" />
		<DI_ITEM Index="1910" Name="DI_FOUPRobotAlarmSignal" BufferOffset="1910" Addr="D119.6" Description="Foup robot alarm signal" />
		<DI_ITEM Index="1911" Name="DI_FOUPRobotFoupOnRobotCheck" BufferOffset="1911" Addr="D119.7" Description="Foup robot foup on robot check" />
		<DI_ITEM Index="1912" Name="DI_FOUPRobotAxisZHomePosition" BufferOffset="1912" Addr="D119.8" Description="Foup robot axis-Z home position(axis-CZ)" />
		<DI_ITEM Index="1913" Name="DI_FOUPRobotAxisYHomePosition" BufferOffset="1913" Addr="D119.9" Description="Foup robot axis-Y home position(axis-CS)" />
		<DI_ITEM Index="1914" Name="DI_FOUPRobotAxisRHomePosition" BufferOffset="1914" Addr="D119.10" Description="Foup robot axis-R home position (axis-CX)" />
		<DI_ITEM Index="1915" Name="DI_FOUPRobotRunning" BufferOffset="1915" Addr="D119.11" Description="Foup robot running" />

		<DI_ITEM Index="1916" Name="DI_FOUPRobotWithinBufferLayer1Area" BufferOffset="1916" Addr="D119.12" Description="FOUP Robot Within Buffer Layer1 Area" />
		<DI_ITEM Index="1917" Name="DI_FOUPRobotWithinBufferLayer2Area" BufferOffset="1917" Addr="D119.13" Description="FOUP Robot Within Buffer Layer2 Area" />
		<DI_ITEM Index="1918" Name="DI_FOUPRobotWithinBufferLayer3Area" BufferOffset="1918" Addr="D119.14" Description="FOUP Robot Within Buffer Layer3 Area" />
		<DI_ITEM Index="1919" Name="DI_FOUPRobotWithinBufferLayer4Area" BufferOffset="1919" Addr="D119.15" Description="FOUP Robot Within Buffer Layer4 Area" />

		<DI_ITEM Index="1920" Name="DI_Loadport1E84Valid" BufferOffset="1920" Addr="D120.0" Description="Loadport1 E84 Valid" />
		<DI_ITEM Index="1921" Name="DI_Loadport1E84CS0" BufferOffset="1921" Addr="D120.1" Description="Loadport1 E84 CS_0" />
		<DI_ITEM Index="1922" Name="DI_Loadport1E84CS1" BufferOffset="1922" Addr="D120.2" Description="Loadport1 E84 CS_1" />
		<DI_ITEM Index="1923" Name="" BufferOffset="1923" Addr="D120.3" Description="" />
		<DI_ITEM Index="1924" Name="DI_Loadport1E84TRREQ" BufferOffset="1924" Addr="D120.4" Description="Loadport1 E84 TR_REQ" />
		<DI_ITEM Index="1925" Name="DI_Loadport1E84busy" BufferOffset="1925" Addr="D120.5" Description="Loadport1 E84 busy" />
		<DI_ITEM Index="1926" Name="DI_Loadport1E84COMPT" BufferOffset="1926" Addr="D120.6" Description="Loadport1 E84 COMPT" />
		<DI_ITEM Index="1927" Name="DI_Loadport1E84CONT" BufferOffset="1927" Addr="D120.7" Description="Loadport1 E84 CONT" />
		<DI_ITEM Index="1928" Name="DI_Loadport2E84Valid" BufferOffset="1928" Addr="D120.8" Description="Loadport2 E84 Valid" />
		<DI_ITEM Index="1929" Name="DI_Loadport2E84CS0" BufferOffset="1929" Addr="D120.9" Description="Loadport2 E84 CS_0" />
		<DI_ITEM Index="1930" Name="DI_Loadport2E84CS1" BufferOffset="1930" Addr="D120.10" Description="Loadport2 E84 CS_1" />
		<DI_ITEM Index="1931" Name="" BufferOffset="1931" Addr="D120.11" Description="Loadport1 E84 CS_1" />
		<DI_ITEM Index="1932" Name="DI_Loadport2E84TRREQ" BufferOffset="1932" Addr="D120.12" Description="Loadport2 E84 TR_REQ" />
		<DI_ITEM Index="1933" Name="DI_Loadport2E84busy" BufferOffset="1933" Addr="D120.13" Description="Loadport2 E84 busy" />
		<DI_ITEM Index="1934" Name="DI_Loadport2E84COMPT" BufferOffset="1934" Addr="D120.14" Description="Loadport2 E84 COMPT" />
		<DI_ITEM Index="1935" Name="DI_Loadport2E84CONT" BufferOffset="1935" Addr="D120.15" Description="Loadport2 E84 CONT" />

		<DI_ITEM Index="3200" Name="DI_BoatRAxisRotationBusy" BufferOffset="3200" Addr="D200.0" Description="Boat RAxis Rotation Busy" />
		<DI_ITEM Index="3201" Name="DI_BoatRAxisHomeBusy" BufferOffset="3201" Addr="D200.1" Description="Boat RAxis Home Busy" />
		<DI_ITEM Index="3202" Name="DI_BoatRAxisInitBusy" BufferOffset="3202" Addr="D200.2" Description="Boat RAxis Init Busy" />
		<DI_ITEM Index="3203" Name="DI_BoatRAxisHomeDone" BufferOffset="3203" Addr="D200.3" Description="Boat RAxis Home Done" />
		<DI_ITEM Index="3204" Name="DI_BoatRAxisInitDone" BufferOffset="3204" Addr="D200.4" Description="Boat RAxis Init Done" />
		<DI_ITEM Index="3205" Name="" BufferOffset="3205" Addr="D200.5" Description="Spare5 BoatRAxis" />
		<DI_ITEM Index="3206" Name="" BufferOffset="3206" Addr="D200.6" Description="Spare6 BoatRAxis" />
		<DI_ITEM Index="3207" Name="" BufferOffset="3207" Addr="D200.7" Description="Spare7 BoatRAxis" />
		<DI_ITEM Index="3208" Name="" BufferOffset="3208" Addr="D200.8" Description="Spare8 BoatRAxis" />
		<DI_ITEM Index="3209" Name="" BufferOffset="3209" Addr="D200.9" Description="Spare9 BoatRAxis" />
		<DI_ITEM Index="3210" Name="" BufferOffset="3210" Addr="D200.10" Description="SpareA BoatRAxis" />
		<DI_ITEM Index="3211" Name="" BufferOffset="3211" Addr="D200.11" Description="SpareB BoatRAxis" />
		<DI_ITEM Index="3212" Name="" BufferOffset="3212" Addr="D200.12" Description="SpareC BoatRAxis" />
		<DI_ITEM Index="3213" Name="" BufferOffset="3213" Addr="D200.13" Description="SpareD BoatRAxis" />
		<DI_ITEM Index="3214" Name="" BufferOffset="3214" Addr="D200.14" Description="SpareE BoatRAxis" />
		<DI_ITEM Index="3215" Name="" BufferOffset="3215" Addr="D200.15" Description="SpareF BoatRAxis" />

		<DI_ITEM Index="3216" Name="DI_PwrBusyBufferAxis" BufferOffset="3216" Addr="D201.0" Description="Buffer servo power on doing" />
		<DI_ITEM Index="3217" Name="DI_PwrErrBufferAxis" BufferOffset="3217" Addr="D201.1" Description="Buffer servo power error" />
		<DI_ITEM Index="3218" Name="DI_StopBusyBufferAxis" BufferOffset="3218" Addr="D201.2" Description="Buffer servo stop doing" />

		<DI_ITEM Index="3221" Name="DI_StopErrBufferAxis" BufferOffset="3221" Addr="D201.5" Description="Buffer servo stop error" />
		<!--<DI_ITEM Index="3222" Name="" BufferOffset="3222" Addr="D201.6" Description="" />-->

		<!--<DI_ITEM Index="3224" Name="" BufferOffset="3224" Addr="D201.8" Description="Buffer servo home doing" />-->
		<DI_ITEM Index="3225" Name="DI_MvAbsBusyBufferAxis" BufferOffset="3225" Addr="D201.9" Description="Buffer servo moving" />

		<DI_ITEM Index="3228" Name="DI_MvAbsErrBufferAxis" BufferOffset="3228" Addr="D201.12" Description="Buffer servo movin error" />

		<DI_ITEM Index="3232" Name="DI_HmPosBufferAxis" BufferOffset="3232" Addr="D202.0" Description="Buffer servo home position" />
		<DI_ITEM Index="3233" Name="DI_NegLmtAlmBufferAxis" BufferOffset="3233" Addr="D202.1" Description="Buffer servo negative limit alarm" />
		<DI_ITEM Index="3234" Name="DI_PotLmtAlmbBufferAxis" BufferOffset="3234" Addr="D202.2" Description="Buffer servo positive limit alarm" />
		<DI_ITEM Index="3235" Name="DI_ConveyRelaxAlmBufferAxis" BufferOffset="3235" Addr="D202.3" Description="Buffer  convey relax alarm" />
		<DI_ITEM Index="3236" Name="DI_ReadytoSwitchOnBufferAxis" BufferOffset="3236" Addr="D202.4" Description="Buffer servo ready to switch on" />
		<DI_ITEM Index="3237" Name="DI_SwitchedOnBufferAxis" BufferOffset="3237" Addr="D202.5" Description="Buffer servo switched on" />
		<DI_ITEM Index="3238" Name="DI_BufferWarningBufferAxis" BufferOffset="3238" Addr="D202.6" Description="Buffer servo warning" />
		<DI_ITEM Index="3239" Name="DI_BufferFaultBufferAxis" BufferOffset="3239" Addr="D202.7" Description="Buffer servo fault" />
		<DI_ITEM Index="3240" Name="DI_BufferInPosBufferAxis" BufferOffset="3240" Addr="D202.8" Description="Buffer arrive target position" />

		<DI_ITEM Index="3248" Name="DI_PwrBusyBoatZAxis" BufferOffset="3248" Addr="D203.0" Description="Boat Z servo power on doing" />
		<DI_ITEM Index="3249" Name="DI_PwrErrBoatZAxis" BufferOffset="3249" Addr="D203.1" Description="Boat Z servo power error" />
		<DI_ITEM Index="3250" Name="DI_StopBusyBoatZAxis" BufferOffset="3250" Addr="D203.2" Description="Boat Z servo stop doing" />

		<DI_ITEM Index="3253" Name="DI_StopErrBoatZAxis" BufferOffset="3253" Addr="D203.5" Description="Boat Z servo stop error" />
		<!--<DI_ITEM Index="3254" Name="DI_HmBusyBoatZAxis" BufferOffset="3254" Addr="D203.6" Description="Boat Z servo home doing" />-->

		<!--<DI_ITEM Index="3256" Name="DI_HmErrBoatZAxis" BufferOffset="3256" Addr="D203.8" Description="Boat Z servo home doing" />-->
		<DI_ITEM Index="3257" Name="DI_MvAbsBusyBoatZAxis" BufferOffset="3257" Addr="D203.9" Description="Boat Z servo moving" />

		<DI_ITEM Index="3260" Name="DI_MvAbsErrBoatZAxis" BufferOffset="3260" Addr="D203.12" Description="Boat Z servo movin error" />

		<DI_ITEM Index="3264" Name="DI_HmPosBoatZAxis" BufferOffset="3264" Addr="D204.0" Description="Boat Z servo home position" />
		<DI_ITEM Index="3265" Name="DI_NegLmtPosBoatZAxis" BufferOffset="3265" Addr="D204.1" Description="Boat Z servo negative limit position" />
		<DI_ITEM Index="3266" Name="DI_PotLmtPosBoatZAxis" BufferOffset="3266" Addr="D204.2" Description="Boat Z servo positive limit position" />

		<DI_ITEM Index="3268" Name="DI_ReadytoSwitchOnBoatZAxis" BufferOffset="3268" Addr="D204.4" Description="Boat Z servo ready to switch on" />
		<DI_ITEM Index="3269" Name="DI_SwitchedOnBoatZAxis" BufferOffset="3269" Addr="D204.5" Description="Boat Z servo switched on" />
		<DI_ITEM Index="3270" Name="DI_BoatWarningBoatZAxis" BufferOffset="3270" Addr="D204.6" Description="Boat Z  servo warning" />
		<DI_ITEM Index="3271" Name="DI_BoatFaultBoatZAxis" BufferOffset="3271" Addr="D204.7" Description="Boat Z  servo fault" />
		<DI_ITEM Index="3273" Name="DI_MiddlePos1BoatZAxis" BufferOffset="3273" Addr="D204.9" Description="Boat Z  servo Middle Position" />
		<DI_ITEM Index="3274" Name="DI_MiddlePos2BoatZAxis" BufferOffset="3274" Addr="D204.10" Description="Boat Z  servo Cap Position" />
		<DI_ITEM Index="3274" Name="DI_MiddlePos3BoatZAxis" BufferOffset="3275" Addr="D204.11" Description="Boat Z  servo Charge Position" />

		<DI_ITEM Index="3280" Name="DI_P1ZeroOffsetOutRangeAlm" BufferOffset="3280" Addr="D205.0" Description="P1 Zero Offset Out Range Alm" />
		<DI_ITEM Index="3281" Name="DI_P1ZeroAdjOutRangeAlm" BufferOffset="3281" Addr="D205.1" Description="P1 Zero Adj Out Range Alm" />
		<DI_ITEM Index="3282" Name="DI_P1SpanAdjOutRangeAlm" BufferOffset="3282" Addr="D205.2" Description="P1 Span Adj Out Range Alm" />
		<DI_ITEM Index="3283" Name="DI_P2ZeroOffsetOutRangeAlm" BufferOffset="3283" Addr="D205.3" Description="P2 Zero Offset Out Range Alm" />
		<DI_ITEM Index="3284" Name="DI_P2ZeroAdjOutRangeAlm" BufferOffset="3284" Addr="D205.4" Description="P2 Zero Adj Out Range Alm" />
		<DI_ITEM Index="3285" Name="DI_P2SpanAdjOutRangeAlm" BufferOffset="3285" Addr="D205.5" Description="P2 Span Adj Out Range Alm" />
		<DI_ITEM Index="3286" Name="DI_P1PressCtrlInterlockAlm" BufferOffset="3286" Addr="D205.6" Description="P1 Press Ctrl Interlock Alm" />
		<DI_ITEM Index="3287" Name="DI_P2PressCtrlInterlockAlm" BufferOffset="3287" Addr="D205.7" Description="P2 Press Ctrl Interlock Alm" />
		<DI_ITEM Index="3288" Name="DI_ValveOpenCtrlInterlockAlm" BufferOffset="3288" Addr="D205.8" Description="Valve Open Ctrl Interlock Alm" />
		<DI_ITEM Index="3289" Name="DI_ValveHoldCtrlInterlockAlm" BufferOffset="3289" Addr="D205.9" Description="Valve Hold Ctrl Interlock Alm" />
		<DI_ITEM Index="3290" Name="DI_ValveCloseInterlockAlm" BufferOffset="3290" Addr="D205.10" Description="Valve Close Interlock Alm" />
		<DI_ITEM Index="3291" Name="DI_AutoTeachingInterlockAlm" BufferOffset="3291" Addr="D205.11" Description="Auto Teaching Interlock Alm" />
		<DI_ITEM Index="3292" Name="DI_P1DisconnectionAlm" BufferOffset="3292" Addr="D205.12" Description="P1 Disconnection Alm" />
		<DI_ITEM Index="3293" Name="DI_P2DisconnectionAlm" BufferOffset="3293" Addr="D205.13" Description="P2 Disconnection Alm" />
		<DI_ITEM Index="3294" Name="DI_PumpStopInterlockAlm" BufferOffset="3294" Addr="D205.14" Description="Pump Stop Interlock Alm" />
		<DI_ITEM Index="3295" Name="DI_AutoTeachingErr1Alm" BufferOffset="3295" Addr="D205.15" Description="Auto Teaching Err1 Alm" />
		<DI_ITEM Index="3296" Name="DI_AutoTeachingErr2Alm" BufferOffset="3296" Addr="D206.0" Description="Auto Teaching Err2 Alm" />

		<DI_ITEM Index="3312" Name="DI_FFU801DataWriteDone" BufferOffset="3312" Addr="D207.0" Description="FFU801 data write done" />
		<DI_ITEM Index="3313" Name="DI_FFU802DataWriteDone" BufferOffset="3313" Addr="D207.1" Description="FFU802 data write done" />
		<DI_ITEM Index="3314" Name="DI_FFU803DataWriteDone" BufferOffset="3314" Addr="D207.2" Description="FFU803 data write done" />
		<DI_ITEM Index="3315" Name="DI_FFU201DataWriteDone" BufferOffset="3315" Addr="D207.3" Description="FFU201 data write done" />
		<DI_ITEM Index="3316" Name="DI_FFU202DataWriteDone" BufferOffset="3316" Addr="D207.4" Description="FFU202 data write done" />
		<DI_ITEM Index="3317" Name="DI_FFU203DataWriteDone" BufferOffset="3317" Addr="D207.5" Description="FFU203 data write done" />
		<DI_ITEM Index="3318" Name="DI_FFU204DataWriteDone" BufferOffset="3318" Addr="D207.6" Description="FFU204 data write done" />
		<DI_ITEM Index="3319" Name="DI_FFU205DataWriteDone" BufferOffset="3319" Addr="D207.7" Description="FFU205 data write done" />
		<DI_ITEM Index="3320" Name="DI_FFU206DataWriteDone" BufferOffset="3320" Addr="D207.8" Description="FFU206 data write done" />

		<DI_ITEM Index="3328" Name="DI_FFU801DataWriteError" BufferOffset="3328" Addr="D208.0" Description="FFU801 data write error" />
		<DI_ITEM Index="3329" Name="DI_FFU802DataWriteError" BufferOffset="3329" Addr="D208.1" Description="FFU802 data write error" />
		<DI_ITEM Index="3330" Name="DI_FFU803DataWriteError" BufferOffset="3330" Addr="D208.2" Description="FFU803 data write error" />
		<DI_ITEM Index="3331" Name="DI_FFU201DataWriteError" BufferOffset="3331" Addr="D208.3" Description="FFU201 data write error" />
		<DI_ITEM Index="3332" Name="DI_FFU202DataWriteError" BufferOffset="3332" Addr="D208.4" Description="FFU202 data write error" />
		<DI_ITEM Index="3333" Name="DI_FFU203DataWriteError" BufferOffset="3333" Addr="D208.5" Description="FFU203 data write error" />
		<DI_ITEM Index="3334" Name="DI_FFU204DataWriteError" BufferOffset="3334" Addr="D208.6" Description="FFU204 data write error" />
		<DI_ITEM Index="3335" Name="DI_FFU205DataWriteError" BufferOffset="3335" Addr="D208.7" Description="FFU205 data write error" />
		<DI_ITEM Index="3336" Name="DI_FFU206DataWriteError" BufferOffset="3336" Addr="D208.8" Description="FFU206 data write error" />

		<DI_ITEM Index="3360" Name="DI_FFU801DataReadError" BufferOffset="3360" Addr="D210.0" Description="FFU801 data read error" />
		<DI_ITEM Index="3361" Name="DI_FFU802DataReadError" BufferOffset="3361" Addr="D210.1" Description="FFU802 data read error" />
		<DI_ITEM Index="3362" Name="DI_FFU803DataReadError" BufferOffset="3362" Addr="D210.2" Description="FFU803 data read error" />
		<DI_ITEM Index="3363" Name="DI_FFU201DataReadError" BufferOffset="3363" Addr="D210.3" Description="FFU201 data read error" />
		<DI_ITEM Index="3364" Name="DI_FFU202DataReadError" BufferOffset="3364" Addr="D210.4" Description="FFU202 data read error" />
		<DI_ITEM Index="3365" Name="DI_FFU203DataReadError" BufferOffset="3365" Addr="D210.5" Description="FFU203 data read error" />
		<DI_ITEM Index="3366" Name="DI_FFU204DataReadError" BufferOffset="3366" Addr="D210.6" Description="FFU204 data read error" />
		<DI_ITEM Index="3367" Name="DI_FFU205DataReadError" BufferOffset="3367" Addr="D210.7" Description="FFU205 data read error" />
		<DI_ITEM Index="3368" Name="DI_FFU206DataReadError" BufferOffset="3368" Addr="D210.8" Description="FFU206 data read error" />

		<DI_ITEM Index="3520" Name="DI_ForelineHeater1ControlDoing" BufferOffset="3520" Addr="D220.0" Description="Foreline heater-1 control doing" />
		<DI_ITEM Index="3521" Name="DI_ForelineHeater2ControlDoing" BufferOffset="3521" Addr="D220.1" Description="Foreline heater-2 control doing" />
		<DI_ITEM Index="3522" Name="DI_ForelineHeater3ControlDoing" BufferOffset="3522" Addr="D220.2" Description="Foreline heater-3 control doing" />
		<DI_ITEM Index="3523" Name="DI_ForelineHeater4ControlDoing" BufferOffset="3523" Addr="D220.3" Description="Foreline heater-4 control doing" />
		<DI_ITEM Index="3524" Name="DI_ForelineHeater5ControlDoing" BufferOffset="3524" Addr="D220.4" Description="Foreline heater-5 control doing" />
		<DI_ITEM Index="3525" Name="DI_ForelineHeater6ControlDoing" BufferOffset="3525" Addr="D220.5" Description="Foreline heater-6 control doing" />
		<DI_ITEM Index="3526" Name="DI_ForelineHeater7ControlDoing" BufferOffset="3526" Addr="D220.6" Description="Foreline heater-7 control doing" />
		<DI_ITEM Index="3527" Name="DI_ForelineHeater8ControlDoing" BufferOffset="3527" Addr="D220.7" Description="Foreline heater-8 control doing" />
		<DI_ITEM Index="3528" Name="DI_ForelineHeater9ControlDoing" BufferOffset="3528" Addr="D220.8" Description="Foreline heater-9 control doing" />
		<DI_ITEM Index="3529" Name="DI_ForelineHeater10ControlDoing" BufferOffset="3529" Addr="D220.9" Description="Foreline heater-10 control doing" />
		<DI_ITEM Index="3530" Name="DI_ForelineHeater11ControlDoing" BufferOffset="3530" Addr="D220.10" Description="Foreline heater-11 control doing" />
		<DI_ITEM Index="3531" Name="DI_CapHeaterControlDoing" BufferOffset="3531" Addr="D220.11" Description="Cap heater control doing" />
		<DI_ITEM Index="3532" Name="DI_ForelineHeater12ControlDoing" BufferOffset="3532" Addr="D220.12" Description="Foreline heater-12 control doing" />
		<!--<DI_ITEM Index="3533" Name="DI_SPARE" BufferOffset="3533" Addr="D220.13" Description="SPARE" />-->
		<DI_ITEM Index="3534" Name="DI_APCExternalHeaterControlDoing" BufferOffset="3534" Addr="D220.14" Description="APC external heater control doing" />
		<DI_ITEM Index="3534" Name="DI_APCRingHeaterControlDoing" BufferOffset="3535" Addr="D220.15" Description="APC ring heater control doing" />

		<DI_ITEM Index="3552" Name="DI_ForelineHeater1PIDATDoing" BufferOffset="3552" Addr="D222.0" Description="Foreline heater-1 PID AT doing" />
		<DI_ITEM Index="3553" Name="DI_ForelineHeater2PIDATDoing" BufferOffset="3553" Addr="D222.1" Description="Foreline heater-2 PID AT doing" />
		<DI_ITEM Index="3554" Name="DI_ForelineHeater3PIDATDoing" BufferOffset="3554" Addr="D222.2" Description="Foreline heater-3 PID AT doing" />
		<DI_ITEM Index="3555" Name="DI_ForelineHeater4PIDATDoing" BufferOffset="3555" Addr="D222.3" Description="Foreline heater-4 PID AT doing" />
		<DI_ITEM Index="3556" Name="DI_ForelineHeater5PIDATDoing" BufferOffset="3556" Addr="D222.4" Description="Foreline heater-5 PID AT doing" />
		<DI_ITEM Index="3557" Name="DI_ForelineHeater6PIDATDoing" BufferOffset="3557" Addr="D222.5" Description="Foreline heater-6 PID AT doing" />
		<DI_ITEM Index="3558" Name="DI_ForelineHeater7PIDATDoing" BufferOffset="3558" Addr="D222.6" Description="Foreline heater-7 PID AT doing" />
		<DI_ITEM Index="3559" Name="DI_ForelineHeater8PIDATDoing" BufferOffset="3559" Addr="D222.7" Description="Foreline heater-8 PID AT doing" />
		<DI_ITEM Index="3560" Name="DI_ForelineHeater9PIDATDoing" BufferOffset="3560" Addr="D222.8" Description="Foreline heater-9 PID AT doing" />
		<DI_ITEM Index="3561" Name="DI_ForelineHeater10PIDATDoing" BufferOffset="3561" Addr="D222.9" Description="Foreline heater-10 PID AT doing" />
		<DI_ITEM Index="3562" Name="DI_ForelineHeater11PIDATDoing" BufferOffset="3562" Addr="D222.10" Description="Foreline heater-11 PID AT doing" />
		<DI_ITEM Index="3563" Name="DI_CapHeaterPIDATDoing" BufferOffset="3563" Addr="D222.11" Description="Cap heater PID AT doing" />
		<DI_ITEM Index="3564" Name="DI_ForelineHeater12PIDATDoing" BufferOffset="3564" Addr="D222.12" Description="Foreline heater-12 PID AT doing" />

		<DI_ITEM Index="3565" Name="DI_APCExternalHeaterPIDATDoing" BufferOffset="3566" Addr="D222.14" Description="APC external heater PID AT doing" />
		<DI_ITEM Index="3566" Name="DI_APCRingHeaterPIDATDoing" BufferOffset="3567" Addr="D222.15" Description="APC ring heater PID AT doing" />

		<DI_ITEM Index="3584" Name="DI_ForelineHeater1PIDATDone" BufferOffset="3584" Addr="D224.0" Description="Foreline heater-1 PID AT done" />
		<DI_ITEM Index="3585" Name="DI_ForelineHeater2PIDATDone" BufferOffset="3585" Addr="D224.1" Description="Foreline heater-2 PID AT done" />
		<DI_ITEM Index="3586" Name="DI_ForelineHeater3PIDATDone" BufferOffset="3586" Addr="D224.2" Description="Foreline heater-3 PID AT done" />
		<DI_ITEM Index="3587" Name="DI_ForelineHeater4PIDATDone" BufferOffset="3587" Addr="D224.3" Description="Foreline heater-4 PID AT done" />
		<DI_ITEM Index="3588" Name="DI_ForelineHeater5PIDATDone" BufferOffset="3588" Addr="D224.4" Description="Foreline heater-5 PID AT done" />
		<DI_ITEM Index="3589" Name="DI_ForelineHeater6PIDATDone" BufferOffset="3589" Addr="D224.5" Description="Foreline heater-6 PID AT done" />
		<DI_ITEM Index="3590" Name="DI_ForelineHeater7PIDATDone" BufferOffset="3590" Addr="D224.6" Description="Foreline heater-7 PID AT done" />
		<DI_ITEM Index="3591" Name="DI_ForelineHeater8PIDATDone" BufferOffset="3591" Addr="D224.7" Description="Foreline heater-8 PID AT done" />
		<DI_ITEM Index="3592" Name="DI_ForelineHeater9PIDATDone" BufferOffset="3592" Addr="D224.8" Description="Foreline heater-9 PID AT done" />
		<DI_ITEM Index="3593" Name="DI_ForelineHeater10PIDATDone" BufferOffset="3593" Addr="D224.9" Description="Foreline heater-10 PID AT done" />
		<DI_ITEM Index="3594" Name="DI_ForelineHeater11PIDATDone" BufferOffset="3594" Addr="D224.10" Description="Foreline heater-11 PID AT done" />
		<DI_ITEM Index="3595" Name="DI_CapHeaterPIDATDone" BufferOffset="3595" Addr="D224.11" Description="Cap heater PID AT done" />
		<DI_ITEM Index="3596" Name="DI_ForelineHeater12PIDATDone" BufferOffset="3596" Addr="D224.12" Description="Foreline heater-12 PID AT done" />

		<DI_ITEM Index="3597" Name="DI_APCExternalHeaterPIDATDone" BufferOffset="3598" Addr="D224.14" Description="APC external heater PID AT done" />
		<DI_ITEM Index="3598" Name="DI_APCRingHeaterPIDATDone" BufferOffset="3599" Addr="D224.15" Description="APC ring heater PID AT done" />


		<DI_ITEM Index="3616" Name="DI_ForelineHeater1PIDControlError" BufferOffset="3616" Addr="D226.0" Description="Foreline heater-1 PID control error" />
		<DI_ITEM Index="3617" Name="DI_ForelineHeater2PIDControlError" BufferOffset="3617" Addr="D226.1" Description="Foreline heater-2 PID control error" />
		<DI_ITEM Index="3618" Name="DI_ForelineHeater3PIDControlError" BufferOffset="3618" Addr="D226.2" Description="Foreline heater-3 PID control error" />
		<DI_ITEM Index="3619" Name="DI_ForelineHeater4PIDControlError" BufferOffset="3619" Addr="D226.3" Description="Foreline heater-4 PID control error" />
		<DI_ITEM Index="3620" Name="DI_ForelineHeater5PIDControlError" BufferOffset="3620" Addr="D226.4" Description="Foreline heater-5 PID control error" />
		<DI_ITEM Index="3621" Name="DI_ForelineHeater6PIDControlError" BufferOffset="3621" Addr="D226.5" Description="Foreline heater-6 PID control error" />
		<DI_ITEM Index="3622" Name="DI_ForelineHeater7PIDControlError" BufferOffset="3622" Addr="D226.6" Description="Foreline heater-7 PID control error" />
		<DI_ITEM Index="3623" Name="DI_ForelineHeater8PIDControlError" BufferOffset="3623" Addr="D226.7" Description="Foreline heater-8 PID control error" />
		<DI_ITEM Index="3624" Name="DI_ForelineHeater9PIDControlError" BufferOffset="3624" Addr="D226.8" Description="Foreline heater-9 PID control error" />
		<DI_ITEM Index="3625" Name="DI_ForelineHeater10PIDControlError" BufferOffset="3625" Addr="D226.9" Description="Foreline heater-10 PID control error" />
		<DI_ITEM Index="3626" Name="DI_ForelineHeater11PIDControlError" BufferOffset="3626" Addr="D226.10" Description="Foreline heater-11 PID control error" />
		<DI_ITEM Index="3627" Name="DI_CapHeaterPIDControlError" BufferOffset="3627" Addr="D226.11" Description="Cap heater PID control error" />
		<DI_ITEM Index="3628" Name="DI_ForelineHeater12PIDControlError" BufferOffset="3628" Addr="D226.12" Description="Foreline heater-12 PID control error" />

		<DI_ITEM Index="3629" Name="DI_APCExternalHeaterPIDControlError" BufferOffset="3630" Addr="D226.14" Description="APC external heater PID control error" />
		<DI_ITEM Index="3630" Name="DI_APCRingHeaterPIDControlError" BufferOffset="3631" Addr="D226.15" Description="APC ring heater PID control error" />


		<DI_ITEM Index="3648" Name="DI_ForelineHeater1TimePropControlError" BufferOffset="3648" Addr="D228.0" Description="Foreline heater-1 Time-prop control error" />
		<DI_ITEM Index="3649" Name="DI_ForelineHeater2TimePropControlError" BufferOffset="3649" Addr="D228.1" Description="Foreline heater-2 Time-prop control error" />
		<DI_ITEM Index="3650" Name="DI_ForelineHeater3TimePropControlError" BufferOffset="3650" Addr="D228.2" Description="Foreline heater-3 Time-prop control error" />
		<DI_ITEM Index="3651" Name="DI_ForelineHeater4TimePropControlError" BufferOffset="3651" Addr="D228.3" Description="Foreline heater-4 Time-prop control error" />
		<DI_ITEM Index="3652" Name="DI_ForelineHeater5TimePropControlError" BufferOffset="3652" Addr="D228.4" Description="Foreline heater-5 Time-prop control error" />
		<DI_ITEM Index="3653" Name="DI_ForelineHeater6TimePropControlError" BufferOffset="3653" Addr="D228.5" Description="Foreline heater-6 Time-prop control error" />
		<DI_ITEM Index="3654" Name="DI_ForelineHeater7TimePropControlError" BufferOffset="3654" Addr="D228.6" Description="Foreline heater-7 Time-prop control error" />
		<DI_ITEM Index="3655" Name="DI_ForelineHeater8TimePropControlError" BufferOffset="3655" Addr="D228.7" Description="Foreline heater-8 Time-prop control error" />
		<DI_ITEM Index="3656" Name="DI_ForelineHeater9TimePropControlError" BufferOffset="3656" Addr="D228.8" Description="Foreline heater-9 Time-prop control error" />
		<DI_ITEM Index="3657" Name="DI_ForelineHeater10TimePropControlError" BufferOffset="3657" Addr="D228.9" Description="Foreline heater-10 Time-prop control error" />
		<DI_ITEM Index="3658" Name="DI_ForelineHeater11TimePropControlError" BufferOffset="3658" Addr="D228.10" Description="Foreline heater-11 Time-prop control error" />
		<DI_ITEM Index="3659" Name="DI_CapHeaterTimePropControlError" BufferOffset="3659" Addr="D228.11" Description="Cap heater Time-prop control error" />
		<DI_ITEM Index="3660" Name="DI_ForelineHeater12TimePropControlError" BufferOffset="3660" Addr="D228.12" Description="Foreline heater-12 Time-prop control error" />

		<DI_ITEM Index="3661" Name="DI_APCExternalHeaterTimePropControlError" BufferOffset="3662" Addr="D228.14" Description="APC external heater Time-prop control error" />
		<DI_ITEM Index="3662" Name="DI_APCRingHeaterTimePropControlError" BufferOffset="3663" Addr="D228.15" Description="APC ring heater Time-prop control error" />

		<DI_ITEM Index="5216" Name="DI_FIMS1LoadComplete" BufferOffset="5216" Addr="D326.0" Description="FIMS1 Load Complete" />
		<DI_ITEM Index="5217" Name="DI_FIMS1UnloadComplete" BufferOffset="5217" Addr="D326.1" Description="FIMS1 Unload Complete" />
		<DI_ITEM Index="5218" Name="DI_FIMS1HomeComplete" BufferOffset="5218" Addr="D326.2" Description="FIMS1 Home Complete" />
		<DI_ITEM Index="5219" Name="DI_FIMS1Running" BufferOffset="5219" Addr="D326.3" Description="FIMS1 Running" />
		<DI_ITEM Index="5220" Name="DI_FIMS1AutoManualMode" BufferOffset="5220" Addr="D326.4" Description="FIMS1 Auto/Manual Mode" />

		<DI_ITEM Index="5232" Name="DI_FIMS2LoadComplete" BufferOffset="5232" Addr="D327.0" Description="FIMS2 Load Complete" />
		<DI_ITEM Index="5233" Name="DI_FIMS2UnloadComplete" BufferOffset="5233" Addr="D327.1" Description="FIMS2 Unload Complete" />
		<DI_ITEM Index="5234" Name="DI_FIMS2HomeComplete" BufferOffset="5234" Addr="D327.2" Description="FIMS2 Home Complete" />
		<DI_ITEM Index="5235" Name="DI_FIMS2Running" BufferOffset="5235" Addr="D327.3" Description="FIMS2 Running" />
		<DI_ITEM Index="5236" Name="DI_FIMS2AutoManualMode" BufferOffset="5236" Addr="D327.4" Description="FIMS2 Auto/Manual Mode" />

		<DI_ITEM Index="5248" Name="DI_BufferInPositionA1" BufferOffset="5248" Addr="D328.0" Description="Buffer in position A1 " />
		<DI_ITEM Index="5249" Name="DI_BufferInPositionB1" BufferOffset="5249" Addr="D328.1" Description="Buffer in position B1 " />
		<DI_ITEM Index="5250" Name="DI_BufferInPositionC1" BufferOffset="5250" Addr="D328.2" Description="Buffer in position C1 " />
		<DI_ITEM Index="5251" Name="DI_BufferInPositionD1" BufferOffset="5251" Addr="D328.3" Description="Buffer in position D1 " />
		<DI_ITEM Index="5252" Name="DI_BufferInPositionA2" BufferOffset="5252" Addr="D328.4" Description="Buffer in position A2 " />
		<DI_ITEM Index="5253" Name="DI_BufferInPositionB2" BufferOffset="5253" Addr="D328.5" Description="Buffer in position B2 " />
		<DI_ITEM Index="5254" Name="DI_BufferInPositionC2" BufferOffset="5254" Addr="D328.6" Description="Buffer in position C2 " />
		<DI_ITEM Index="5255" Name="DI_BufferInPositionD2" BufferOffset="5255" Addr="D328.7" Description="Buffer in position D2 " />
		<DI_ITEM Index="5256" Name="DI_BufferInPositionA3" BufferOffset="5256" Addr="D328.8" Description="Buffer in position A3 " />
		<DI_ITEM Index="5257" Name="DI_BufferInPositionB3" BufferOffset="5257" Addr="D328.9" Description="Buffer in position B3 " />
		<DI_ITEM Index="5258" Name="DI_BufferInPositionC3" BufferOffset="5258" Addr="D328.10" Description="Buffer in position C3 " />
		<DI_ITEM Index="5259" Name="DI_BufferInPositionD3" BufferOffset="5259" Addr="D328.11" Description="Buffer in position D3 " />
		<DI_ITEM Index="5260" Name="DI_BufferInPositionA4" BufferOffset="5260" Addr="D328.12" Description="Buffer in position A4 " />
		<DI_ITEM Index="5261" Name="DI_BufferInPositionB4" BufferOffset="5261" Addr="D328.13" Description="Buffer in position B4 " />
		<DI_ITEM Index="5262" Name="DI_BufferInPositionC4" BufferOffset="5262" Addr="D328.14" Description="Buffer in position C4 " />
		<DI_ITEM Index="5263" Name="DI_BufferInPositionD4" BufferOffset="5263" Addr="D328.15" Description="Buffer in position D4 " />

		<DI_ITEM Index="5280" Name="DI_LAFFUCommAlarm" BufferOffset="5280" Addr="D330.0" Description="LA FFU Comm Alarm" />
		<DI_ITEM Index="5281" Name="DI_MINI8CommAlarm" BufferOffset="5281" Addr="D330.1" Description="MINI 8 Comm Alarm" />
		<DI_ITEM Index="5282" Name="DI_AVGSwitchStatus" BufferOffset="5282" Addr="D330.2" Description="AVGSwitchStatus" />
		<DI_ITEM Index="5283" Name="DI_MainWaterFlowAlarm" BufferOffset="5283" Addr="D330.3" Description="MainWaterFlowAlarm" />
		<DI_ITEM Index="5284" Name="DI_BufferRemoteIOAlarm" BufferOffset="5284" Addr="D330.4" Description="BufferRemoteIOAlarm_b" />
		<DI_ITEM Index="5285" Name="DI_APCCommAlarm" BufferOffset="5285" Addr="D330.5" Description="APC Comm Alarm" />

		<DI_ITEM Index="5440" Name="DI_VAC1" BufferOffset="5440" Addr="D340.0" Description="VAC1" />
		<DI_ITEM Index="5441" Name="DI_VAC2" BufferOffset="5441" Addr="D340.1" Description="VAC2" />
		<DI_ITEM Index="5442" Name="DI_VAC3" BufferOffset="5442" Addr="D340.2" Description="VAC3" />
		<DI_ITEM Index="5443" Name="DI_VAC4" BufferOffset="5443" Addr="D340.3" Description="VAC4" />
		<DI_ITEM Index="5444" Name="DI_VAC5" BufferOffset="5444" Addr="D340.4" Description="VAC5" />
		<DI_ITEM Index="5445" Name="DI_VAC6" BufferOffset="5445" Addr="D340.5" Description="VAC6" />
		<DI_ITEM Index="5446" Name="DI_VAC7" BufferOffset="5446" Addr="D340.6" Description="VAC7" />
		<DI_ITEM Index="5447" Name="DI_VAC8" BufferOffset="5447" Addr="D340.7" Description="VAC8" />
		<DI_ITEM Index="5448" Name="DI_NVAC" BufferOffset="5448" Addr="D340.8" Description="NVAC" />
		<DI_ITEM Index="5455" Name="DI_BoatUnloadInterlock" BufferOffset="5455" Addr="D340.15" Description="BoatUnloadInterlock" />

		<DI_ITEM Index="5456" Name="DI_AV60ILK" BufferOffset="5456" Addr="D341.0" Description="AV60ILK" />
		<DI_ITEM Index="5456" Name="DI_AV74ILK" BufferOffset="5457" Addr="D341.1" Description="AV74ILK" />
		<DI_ITEM Index="5456" Name="DI_AV77ILK" BufferOffset="5458" Addr="D341.2" Description="AV77ILK" />
		<DI_ITEM Index="5456" Name="DI_AV78ILK" BufferOffset="5459" Addr="D341.3" Description="AV78ILK" />
		<DI_ITEM Index="5456" Name="DI_AV80ILK" BufferOffset="5460" Addr="D341.4" Description="AV80ILK" />
		<DI_ITEM Index="5456" Name="DI_AV81ILK" BufferOffset="5461" Addr="D341.5" Description="AV81ILK" />
		<DI_ITEM Index="5456" Name="DI_AV131ILK" BufferOffset="5462" Addr="D341.6" Description="AV131ILK" />
		<DI_ITEM Index="5456" Name="DI_AV134ILK" BufferOffset="5463" Addr="D341.7" Description="AV134ILK" />
		<DI_ITEM Index="5456" Name="DI_DEPOOKILK" BufferOffset="5464" Addr="D341.8" Description="DEPO_OK_ILK" />
		<DI_ITEM Index="5456" Name="DI_CLNOKILK" BufferOffset="5465" Addr="D341.9" Description="CLN_OK_ILK" />

		<DI_ITEM Index="5550" Name="DI_AV1ILK" BufferOffset="5616" Addr="D351.0" Description="AV1 ILK"  />
		<DI_ITEM Index="5550" Name="DI_AV2ILK" BufferOffset="5617" Addr="D351.1" Description="AV2 ILK"  />
		<DI_ITEM Index="5550" Name="DI_AV3ILK" BufferOffset="5618" Addr="D351.2" Description="AV3 ILK"  />
		<DI_ITEM Index="5550" Name="DI_AV4ILK" BufferOffset="5619" Addr="D351.3" Description="AV4 ILK"  />
		<DI_ITEM Index="5550" Name="DI_AV5ILK" BufferOffset="5620" Addr="D351.4" Description="AV5 ILK"  />
		<DI_ITEM Index="5550" Name="DI_AV6ILK" BufferOffset="5621" Addr="D351.5" Description="AV6 ILK"  />
		<DI_ITEM Index="5550" Name="DI_AV7ILK" BufferOffset="5622" Addr="D351.6" Description="AV7 ILK"  />
		<DI_ITEM Index="5550" Name="DI_AV8ILK" BufferOffset="5623" Addr="D351.7" Description="AV8 ILK"  />
		<DI_ITEM Index="5550" Name="DI_AV9ILK" BufferOffset="5624" Addr="D351.8" Description="AV9 ILK"  />
		<DI_ITEM Index="5550" Name="DI_AV10ILK" BufferOffset="5625" Addr="D351.9" Description="AV10 ILK"  />
		<DI_ITEM Index="5550" Name="DI_AV11ILK" BufferOffset="5626" Addr="D351.10" Description="AV11 ILK"  />
		<DI_ITEM Index="5550" Name="DI_AV12ILK" BufferOffset="5627" Addr="D351.11" Description="AV12 ILK"  />
		<DI_ITEM Index="5550" Name="DI_AV13ILK" BufferOffset="5628" Addr="D351.12" Description="AV13 ILK"  />
		<DI_ITEM Index="5550" Name="DI_AV14ILK" BufferOffset="5629" Addr="D351.13" Description="AV14 ILK"  />
		<DI_ITEM Index="5550" Name="DI_AV15ILK" BufferOffset="5630" Addr="D351.14" Description="AV15 ILK"  />
		<DI_ITEM Index="5550" Name="DI_AV16ILK" BufferOffset="5631" Addr="D351.15" Description="AV16 ILK"  />
		<DI_ITEM Index="5550" Name="DI_AV17ILK" BufferOffset="5632" Addr="D352.0" Description="AV17 ILK"  />
		<DI_ITEM Index="5550" Name="DI_AV18ILK" BufferOffset="5633" Addr="D352.1" Description="AV18 ILK"  />
		<DI_ITEM Index="5550" Name="DI_AV19ILK" BufferOffset="5634" Addr="D352.2" Description="AV19 ILK"  />
		<DI_ITEM Index="5550" Name="DI_AV20ILK" BufferOffset="5635" Addr="D352.3" Description="AV20 ILK"  />
		<DI_ITEM Index="5550" Name="DI_AV21ILK" BufferOffset="5636" Addr="D352.4" Description="AV21 ILK"  />
		<DI_ITEM Index="5550" Name="DI_AV22ILK" BufferOffset="5637" Addr="D352.5" Description="AV22 ILK"  />
		<DI_ITEM Index="5550" Name="DI_AV23ILK" BufferOffset="5638" Addr="D352.6" Description="AV23 ILK"  />
		<DI_ITEM Index="5550" Name="DI_AV24ILK" BufferOffset="5639" Addr="D352.7" Description="AV24 ILK"  />
		<DI_ITEM Index="5550" Name="DI_AV25ILK" BufferOffset="5640" Addr="D352.8" Description="AV25 ILK"  />
		<DI_ITEM Index="5550" Name="DI_AV26ILK" BufferOffset="5641" Addr="D352.9" Description="AV26 ILK"  />
		<DI_ITEM Index="5550" Name="DI_AV27ILK" BufferOffset="5642" Addr="D352.10" Description="AV27 ILK"  />
		<DI_ITEM Index="5550" Name="DI_AV28ILK" BufferOffset="5643" Addr="D352.11" Description="AV28 ILK"  />
		<DI_ITEM Index="5550" Name="DI_AV29ILK" BufferOffset="5644" Addr="D352.12" Description="AV29 ILK"  />
		<DI_ITEM Index="5550" Name="DI_AV30ILK" BufferOffset="5645" Addr="D352.13" Description="AV30 ILK"  />
		<DI_ITEM Index="5550" Name="DI_AV31ILK" BufferOffset="5646" Addr="D352.14" Description="AV31 ILK"  />
		<DI_ITEM Index="5550" Name="DI_AV32ILK" BufferOffset="5647" Addr="D352.15" Description="AV32 ILK"  />
		<DI_ITEM Index="5550" Name="DI_AV33ILK" BufferOffset="5648" Addr="D353.0" Description="AV33 ILK"  />
		<DI_ITEM Index="5550" Name="DI_AV34ILK" BufferOffset="5649" Addr="D353.1" Description="AV34 ILK"  />
		<DI_ITEM Index="5550" Name="DI_AV35ILK" BufferOffset="5650" Addr="D353.2" Description="AV35 ILK"  />
		<DI_ITEM Index="5550" Name="DI_AV36ILK" BufferOffset="5651" Addr="D353.3" Description="AV36 ILK"  />
		<DI_ITEM Index="5550" Name="DI_AV37ILK" BufferOffset="5652" Addr="D353.4" Description="AV37 ILK"  />
		<DI_ITEM Index="5550" Name="DI_AV38ILK" BufferOffset="5653" Addr="D353.5" Description="AV38 ILK"  />
		<DI_ITEM Index="5550" Name="DI_AV39ILK" BufferOffset="5654" Addr="D353.6" Description="AV39 ILK"  />
		<DI_ITEM Index="5550" Name="DI_AV40ILK" BufferOffset="5655" Addr="D353.7" Description="AV40 ILK"  />
		<DI_ITEM Index="5550" Name="DI_AV41ILK" BufferOffset="5656" Addr="D353.8" Description="AV41 ILK"  />
		<DI_ITEM Index="5550" Name="DI_AV42ILK" BufferOffset="5657" Addr="D353.9" Description="AV42 ILK"  />
		<DI_ITEM Index="5550" Name="DI_AV43ILK" BufferOffset="5658" Addr="D353.10" Description="AV43 ILK"  />
		<DI_ITEM Index="5550" Name="DI_AV44ILK" BufferOffset="5659" Addr="D353.11" Description="AV44 ILK"  />
		<DI_ITEM Index="5550" Name="DI_AV45ILK" BufferOffset="5660" Addr="D353.12" Description="AV45 ILK"  />
		<DI_ITEM Index="5550" Name="DI_AV46ILK" BufferOffset="5661" Addr="D353.13" Description="AV46 ILK"  />
		<DI_ITEM Index="5550" Name="DI_AV47ILK" BufferOffset="5662" Addr="D353.14" Description="AV47 ILK"  />
		<DI_ITEM Index="5550" Name="DI_AV48ILK" BufferOffset="5663" Addr="D353.15" Description="AV48 ILK"  />
		<DI_ITEM Index="5550" Name="DI_AV49ILK" BufferOffset="5664" Addr="D354.0" Description="AV49 ILK"  />
		<DI_ITEM Index="5550" Name="DI_AV50ILK" BufferOffset="5665" Addr="D354.1" Description="AV50 ILK"  />
		<DI_ITEM Index="5550" Name="DI_AV51ILK" BufferOffset="5666" Addr="D354.2" Description="AV51 ILK"  />
		<DI_ITEM Index="5550" Name="DI_AV52ILK" BufferOffset="5667" Addr="D354.3" Description="AV52 ILK"  />
		<DI_ITEM Index="5550" Name="DI_AV53ILK" BufferOffset="5668" Addr="D354.4" Description="AV53 ILK"  />
		<DI_ITEM Index="5550" Name="DI_AV54ILK" BufferOffset="5669" Addr="D354.5" Description="AV54 ILK"  />
		<DI_ITEM Index="5550" Name="DI_AV55ILK" BufferOffset="5670" Addr="D354.6" Description="AV55 ILK"  />
		<DI_ITEM Index="5550" Name="DI_AV56ILK" BufferOffset="5671" Addr="D354.7" Description="AV56 ILK"  />
		<DI_ITEM Index="5550" Name="DI_AV57ILK" BufferOffset="5672" Addr="D354.8" Description="AV57 ILK"  />
		<DI_ITEM Index="5550" Name="DI_AV58ILK" BufferOffset="5673" Addr="D354.9" Description="AV58 ILK"  />
		<DI_ITEM Index="5550" Name="DI_AV59ILK" BufferOffset="5674" Addr="D354.10" Description="AV59 ILK"  />
		<DI_ITEM Index="5550" Name="DI_AV61ILK" BufferOffset="5676" Addr="D354.12" Description="AV61 ILK"  />
		<DI_ITEM Index="5550" Name="DI_AV62ILK" BufferOffset="5677" Addr="D354.13" Description="AV62 ILK"  />
		<DI_ITEM Index="5550" Name="DI_AV63ILK" BufferOffset="5678" Addr="D354.14" Description="AV63 ILK"  />
		<DI_ITEM Index="5550" Name="DI_AV64ILK" BufferOffset="5679" Addr="D354.15" Description="AV64 ILK"  />
		<DI_ITEM Index="5550" Name="DI_AV65ILK" BufferOffset="5680" Addr="D355.0" Description="AV65 ILK"  />
		<DI_ITEM Index="5550" Name="DI_AV66ILK" BufferOffset="5681" Addr="D355.1" Description="AV66 ILK"  />
		<DI_ITEM Index="5550" Name="DI_AV67ILK" BufferOffset="5682" Addr="D355.2" Description="AV67 ILK"  />
		<DI_ITEM Index="5550" Name="DI_AV68ILK" BufferOffset="5683" Addr="D355.3" Description="AV68 ILK"  />
		<DI_ITEM Index="5550" Name="DI_AV69ILK" BufferOffset="5684" Addr="D355.4" Description="AV69 ILK"  />
		<DI_ITEM Index="5550" Name="DI_AV70ILK" BufferOffset="5685" Addr="D355.5" Description="AV70 ILK"  />
		<DI_ITEM Index="5550" Name="DI_AV71ILK" BufferOffset="5686" Addr="D355.6" Description="AV71 ILK"  />
		<DI_ITEM Index="5550" Name="DI_AV72ILK" BufferOffset="5687" Addr="D355.7" Description="AV72 ILK"  />
		<DI_ITEM Index="5550" Name="DI_AV73ILK" BufferOffset="5688" Addr="D355.8" Description="AV73 ILK"  />
		<DI_ITEM Index="5550" Name="DI_AV75ILK" BufferOffset="5690" Addr="D355.10" Description="AV75 ILK"  />
		<DI_ITEM Index="5550" Name="DI_AV76ILK" BufferOffset="5691" Addr="D355.11" Description="AV76 ILK"  />
		<DI_ITEM Index="5550" Name="DI_AV79ILK" BufferOffset="5694" Addr="D355.14" Description="AV79 ILK"  />
		<DI_ITEM Index="5550" Name="DI_AV82ILK" BufferOffset="5697" Addr="D356.1" Description="AV82 ILK"  />
		<DI_ITEM Index="5550" Name="DI_AV83ILK" BufferOffset="5698" Addr="D356.2" Description="AV83 ILK" />
		<DI_ITEM Index="5550" Name="DI_AV85ILK" BufferOffset="5700" Addr="D356.4" Description="AV85 ILK" />
		<DI_ITEM Index="5550" Name="DI_AV86ILK" BufferOffset="5701" Addr="D356.5" Description="AV86 ILK" />
		<DI_ITEM Index="5550" Name="DI_AV87ILK" BufferOffset="5702" Addr="D356.6" Description="AV87 ILK" />
		<DI_ITEM Index="5550" Name="DI_AV88ILK" BufferOffset="5703" Addr="D356.7" Description="AV88 ILK" />
		<DI_ITEM Index="5550" Name="DI_AV89ILK" BufferOffset="5704" Addr="D356.8" Description="AV89 ILK" />
		<DI_ITEM Index="5550" Name="DI_AV90ILK" BufferOffset="5705" Addr="D356.9" Description="AV90 ILK" />
		<DI_ITEM Index="5550" Name="DI_AV91ILK" BufferOffset="5706" Addr="D356.10" Description="AV91 ILK" />
		<DI_ITEM Index="5550" Name="DI_AV92ILK" BufferOffset="5707" Addr="D356.11" Description="AV92 ILK" />
		<DI_ITEM Index="5550" Name="DI_AV93ILK" BufferOffset="5708" Addr="D356.12" Description="AV93 ILK" />
		<DI_ITEM Index="5550" Name="DI_AV94ILK" BufferOffset="5709" Addr="D356.13" Description="AV94 ILK" />
		<DI_ITEM Index="5550" Name="DI_AV95ILK" BufferOffset="5710" Addr="D356.14" Description="AV95 ILK" />
		<DI_ITEM Index="5550" Name="DI_AV96ILK" BufferOffset="5711" Addr="D356.15" Description="AV96 ILK" />
		<DI_ITEM Index="5550" Name="DI_AV97ILK" BufferOffset="5712" Addr="D357.0" Description="AV97 ILK" />
		<DI_ITEM Index="5550" Name="DI_AV98ILK" BufferOffset="5713" Addr="D357.1" Description="AV98 ILK" />
		<DI_ITEM Index="5550" Name="DI_AV99ILK" BufferOffset="5714" Addr="D357.2" Description="AV99 ILK" />
		<DI_ITEM Index="5550" Name="DI_AV101ILK" BufferOffset="5716" Addr="D357.4" Description="AV101 ILK" />
		<DI_ITEM Index="5550" Name="DI_AV102ILK" BufferOffset="5717" Addr="D357.5" Description="AV102 ILK" />
		<DI_ITEM Index="5550" Name="DI_AV103ILK" BufferOffset="5718" Addr="D357.6" Description="AV103 ILK" />
		<DI_ITEM Index="5550" Name="DI_AV104ILK" BufferOffset="5719" Addr="D357.7" Description="AV104 ILK" />
		<DI_ITEM Index="5550" Name="DI_AV105ILK" BufferOffset="5720" Addr="D357.8" Description="AV105 ILK" />
		<DI_ITEM Index="5550" Name="DI_AV106ILK" BufferOffset="5721" Addr="D357.9" Description="AV106 ILK" />
		<DI_ITEM Index="5550" Name="DI_AV107ILK" BufferOffset="5722" Addr="D357.10" Description="AV107 ILK" />
		<DI_ITEM Index="5550" Name="DI_AV108ILK" BufferOffset="5723" Addr="D357.11" Description="AV108 ILK" />
		<DI_ITEM Index="5550" Name="DI_AV109ILK" BufferOffset="5724" Addr="D357.12" Description="AV109 ILK" />
		<DI_ITEM Index="5550" Name="DI_AV110ILK" BufferOffset="5725" Addr="D357.13" Description="AV110 ILK" />
		<DI_ITEM Index="5550" Name="DI_AV111ILK" BufferOffset="5726" Addr="D357.14" Description="AV111 ILK" />
		<DI_ITEM Index="5550" Name="DI_AV112ILK" BufferOffset="5727" Addr="D357.15" Description="AV112 ILK" />
		<DI_ITEM Index="5550" Name="DI_AV113ILK" BufferOffset="5728" Addr="D358.0" Description="AV113 ILK" />
		<DI_ITEM Index="5550" Name="DI_AV114ILK" BufferOffset="5729" Addr="D358.1" Description="AV114 ILK" />
		<DI_ITEM Index="5550" Name="DI_AV115ILK" BufferOffset="5730" Addr="D358.2" Description="AV115 ILK" />
		<DI_ITEM Index="5550" Name="DI_AV116ILK" BufferOffset="5731" Addr="D358.3" Description="AV116 ILK" />
		<DI_ITEM Index="5550" Name="DI_AV117ILK" BufferOffset="5732" Addr="D358.4" Description="AV117 ILK" />
		<DI_ITEM Index="5550" Name="DI_AV118ILK" BufferOffset="5733" Addr="D358.5" Description="AV118 ILK" />
		<DI_ITEM Index="5550" Name="DI_AV119ILK" BufferOffset="5734" Addr="D358.6" Description="AV119 ILK" />
		<DI_ITEM Index="5550" Name="DI_AV120ILK" BufferOffset="5735" Addr="D358.7" Description="AV120 ILK" />
		<DI_ITEM Index="5550" Name="DI_AV121ILK" BufferOffset="5736" Addr="D358.8" Description="AV121 ILK" />
		<DI_ITEM Index="5550" Name="DI_AV122ILK" BufferOffset="5737" Addr="D358.9" Description="AV122 ILK" />
		<DI_ITEM Index="5550" Name="DI_AV123ILK" BufferOffset="5738" Addr="D358.10" Description="AV123 ILK" />
		<DI_ITEM Index="5550" Name="DI_AV124ILK" BufferOffset="5739" Addr="D358.11" Description="AV124 ILK" />
		<DI_ITEM Index="5550" Name="DI_AV125ILK" BufferOffset="5740" Addr="D358.12" Description="AV125 ILK" />
		<DI_ITEM Index="5550" Name="DI_AV132ILK" BufferOffset="5747" Addr="D359.3" Description="AV132 ILK" />
		<DI_ITEM Index="5550" Name="DI_AV133ILK" BufferOffset="5748" Addr="D359.4" Description="AV133 ILK" />
		<DI_ITEM Index="5550" Name="DI_AV135ILK" BufferOffset="5750" Addr="D359.6" Description="AV135 ILK" />
		<DI_ITEM Index="5550" Name="DI_AV136ILK" BufferOffset="5751" Addr="D359.7" Description="AV136 ILK" />

		<DI_ITEM Index="5555" Name="DI_MFC816ALM1" BufferOffset="5936" Addr="D371.0" Description="MFC816ALM1(4A)" />
		<DI_ITEM Index="5555" Name="DI_MFC816ALM2" BufferOffset="5937" Addr="D371.1" Description="MFC816ALM2(4A)" />
		<DI_ITEM Index="5555" Name="DI_PG816ALM1"  BufferOffset="5938" Addr="D371.2" Description="PG816ALM1(4A)" />
		<DI_ITEM Index="5555" Name="DI_PG816ALM2"  BufferOffset="5939" Addr="D371.3" Description="PG816ALM2(4A)" />
		<DI_ITEM Index="5555" Name=""              BufferOffset="5940" Addr="D371.4" Description="" />
		<DI_ITEM Index="5555" Name=""              BufferOffset="5941" Addr="D371.5" Description="" />
		<DI_ITEM Index="5555" Name="DI_BufferStock4A"     BufferOffset="5942" Addr="D371.6" Description="Buffer Stock 4-A"/>
		<DI_ITEM Index="5555" Name="DI_MFC819ALM1" BufferOffset="5943" Addr="D371.7" Description="MFC819ALM1(4D)" />
		<DI_ITEM Index="5555" Name="DI_MFC819ALM2" BufferOffset="5944" Addr="D371.8" Description="MFC819ALM2(4D)" />
		<DI_ITEM Index="5555" Name="DI_PG819ALM1"  BufferOffset="5945" Addr="D371.9" Description="PG819ALM1(4D)" />
		<DI_ITEM Index="5555" Name="DI_PG819ALM2"  BufferOffset="5946" Addr="D371.10" Description="PG819ALM2(4D)" />
		<DI_ITEM Index="5555" Name=""              BufferOffset="5947" Addr="D371.11" Description="" />
		<DI_ITEM Index="5555" Name=""              BufferOffset="5948" Addr="D371.12" Description="" />
		<DI_ITEM Index="5555" Name="DI_BufferStock4D"     BufferOffset="5949" Addr="D371.13" Description="Buffer Stock 4-D" />
		<DI_ITEM Index="5555" Name=""              BufferOffset="5950" Addr="D371.14" Description="" />
		<DI_ITEM Index="5555" Name=""              BufferOffset="5951" Addr="D371.15" Description="" />
		<DI_ITEM Index="5555" Name="DI_MFC818ALM1" BufferOffset="5952" Addr="D372.0" Description="MFC818ALM1(4C)" />
		<DI_ITEM Index="5555" Name="DI_MFC818ALM2" BufferOffset="5953" Addr="D372.1" Description="MFC818ALM2(4C)" />
		<DI_ITEM Index="5555" Name="DI_PG818ALM1"  BufferOffset="5954" Addr="D372.2" Description="PG818ALM1(4C)" />
		<DI_ITEM Index="5555" Name="DI_PG818ALM2"  BufferOffset="5955" Addr="D372.3" Description="PG818ALM1(4C)" />
		<DI_ITEM Index="5555" Name=""              BufferOffset="5956" Addr="D372.4" Description="" />
		<DI_ITEM Index="5555" Name=""              BufferOffset="5957" Addr="D372.5" Description="" />
		<DI_ITEM Index="5555" Name="DI_BufferStock4C"     BufferOffset="5958" Addr="D372.6"  Description="Buffer Stock 4-C" />
		<DI_ITEM Index="5555" Name="DI_MFC817ALM1" BufferOffset="5959" Addr="D372.7"  Description="MFC817ALM1(4B)" />
		<DI_ITEM Index="5555" Name="DI_MFC817ALM2" BufferOffset="5960" Addr="D372.8"  Description="MFC817ALM1(4B)" />
		<DI_ITEM Index="5555" Name="DI_PG817ALM1"  BufferOffset="5961" Addr="D372.9"  Description="PG817ALM1(4B)" />
		<DI_ITEM Index="5555" Name="DI_PG817ALM2"  BufferOffset="5962" Addr="D372.10" Description="PG817ALM2(4B)" />
		<DI_ITEM Index="5555" Name=""              BufferOffset="5963" Addr="D372.11" Description="" />
		<DI_ITEM Index="5555" Name=""              BufferOffset="5964" Addr="D372.12" Description="" />
		<DI_ITEM Index="5555" Name="DI_BufferStock4B"     BufferOffset="5965" Addr="D372.13" Description="Buffer Stock 4-B" />
		<DI_ITEM Index="5555" Name=""              BufferOffset="5966" Addr="D372.14" Description="" />
		<DI_ITEM Index="5555" Name=""              BufferOffset="5967" Addr="D372.15" Description="" />
		<DI_ITEM Index="5555" Name="DI_MFC820ALM1" BufferOffset="5968" Addr="D373.0" Description="MFC820ALM1(3A)" />
		<DI_ITEM Index="5555" Name="DI_MFC820ALM2" BufferOffset="5969" Addr="D373.1" Description="MFC820ALM2(3A)" />
		<DI_ITEM Index="5555" Name="DI_PG820ALM1"  BufferOffset="5970" Addr="D373.2" Description="PG820ALM1(3A)" />
		<DI_ITEM Index="5555" Name="DI_PG820ALM2"  BufferOffset="5971" Addr="D373.3" Description="PG820ALM2(3A)" />
		<DI_ITEM Index="5555" Name=""              BufferOffset="5972" Addr="D373.4" Description="" />
		<DI_ITEM Index="5555" Name=""              BufferOffset="5973" Addr="D373.5" Description="" />
		<DI_ITEM Index="5555" Name="DI_BufferStock3A"     BufferOffset="5974" Addr="D373.6"  Description="Buffer Stock 3-A" />
		<DI_ITEM Index="5555" Name="DI_MFC823ALM1" BufferOffset="5975" Addr="D373.7"  Description="MFC823ALM1(3D)" />
		<DI_ITEM Index="5555" Name="DI_MFC823ALM2" BufferOffset="5976" Addr="D373.8"  Description="MFC823ALM2(3D)" />
		<DI_ITEM Index="5555" Name="DI_PG823ALM1"  BufferOffset="5977" Addr="D373.9"  Description="PG823ALM1(3D)" />
		<DI_ITEM Index="5555" Name="DI_PG823ALM2"  BufferOffset="5978" Addr="D373.10" Description="PG823ALM2(3D)" />
		<DI_ITEM Index="5555" Name=""              BufferOffset="5979" Addr="D373.11" Description="" />
		<DI_ITEM Index="5555" Name=""              BufferOffset="5980" Addr="D373.12" Description="" />
		<DI_ITEM Index="5555" Name="DI_BufferStock3D"     BufferOffset="5981" Addr="D373.13" Description="Buffer Stock 3-D" />
		<DI_ITEM Index="5555" Name=""              BufferOffset="5982" Addr="D373.14" Description="" />
		<DI_ITEM Index="5555" Name=""              BufferOffset="5983" Addr="D373.15" Description="" />
		<DI_ITEM Index="5555" Name="DI_MFC822ALM1" BufferOffset="5984" Addr="D374.0" Description="MFC822ALM1(3C)" />
		<DI_ITEM Index="5555" Name="DI_MFC822ALM2" BufferOffset="5985" Addr="D374.1" Description="MFC822ALM2(3C)" />
		<DI_ITEM Index="5555" Name="DI_PG822ALM1"  BufferOffset="5986" Addr="D374.2" Description="PG822ALM1(3C)" />
		<DI_ITEM Index="5555" Name="DI_PG822ALM2"  BufferOffset="5987" Addr="D374.3" Description="PG822ALM2(3C)" />
		<DI_ITEM Index="5555" Name=""              BufferOffset="5988" Addr="D374.4" Description="" />
		<DI_ITEM Index="5555" Name=""              BufferOffset="5989" Addr="D374.5" Description="" />
		<DI_ITEM Index="5555" Name="DI_BufferStock3C"     BufferOffset="5990" Addr="D374.6"  Description="Buffer Stock 3-C" />
		<DI_ITEM Index="5555" Name="DI_MFC821ALM1" BufferOffset="5991" Addr="D374.7"  Description="MFC821ALM1(3B)" />
		<DI_ITEM Index="5555" Name="DI_MFC821ALM2" BufferOffset="5992" Addr="D374.8"  Description="MFC821ALM2(3B)" />
		<DI_ITEM Index="5555" Name="DI_PG821ALM1"  BufferOffset="5993" Addr="D374.9"  Description="PG821ALM2(3B)" />
		<DI_ITEM Index="5555" Name="DI_PG821ALM2"  BufferOffset="5994" Addr="D374.10" Description="PG821ALM2(3B)" />
		<DI_ITEM Index="5555" Name=""              BufferOffset="5995" Addr="D374.11" Description="" />
		<DI_ITEM Index="5555" Name=""              BufferOffset="5996" Addr="D374.12" Description="" />
		<DI_ITEM Index="5555" Name="DI_BufferStock3B"     BufferOffset="5997" Addr="D374.13" Description="Buffer Stock 3-B" />
		<DI_ITEM Index="5555" Name=""              BufferOffset="5998" Addr="D374.14" Description="" />
		<DI_ITEM Index="5555" Name=""              BufferOffset="5999" Addr="D374.15" Description="" />
		<DI_ITEM Index="5555" Name="DI_MFC824ALM1" BufferOffset="6000" Addr="D375.0" Description="MFC824ALM1(2A)" />
		<DI_ITEM Index="5555" Name="DI_MFC824ALM2" BufferOffset="6001" Addr="D375.1" Description="MFC824ALM2(2A)" />
		<DI_ITEM Index="5555" Name="DI_PG824ALM1"  BufferOffset="6002" Addr="D375.2" Description="PG824ALM1(2A)" />
		<DI_ITEM Index="5555" Name="DI_PG824ALM2"  BufferOffset="6003" Addr="D375.3" Description="PG824ALM2(2A)" />
		<DI_ITEM Index="5555" Name=""              BufferOffset="6004" Addr="D375.4" Description="" />
		<DI_ITEM Index="5555" Name=""              BufferOffset="6005" Addr="D375.5" Description="" />
		<DI_ITEM Index="5555" Name="DI_BufferStock2A"     BufferOffset="6006" Addr="D375.6"  Description="Buffer Stock 2-A" />
		<DI_ITEM Index="5555" Name="DI_MFC827ALM1" BufferOffset="6007" Addr="D375.7"  Description="MFC827ALM1(2D)" />
		<DI_ITEM Index="5555" Name="DI_MFC827ALM2" BufferOffset="6008" Addr="D375.8"  Description="MFC827ALM2(2D)" />
		<DI_ITEM Index="5555" Name="DI_PG827ALM1"  BufferOffset="6009" Addr="D375.9"  Description="PG827ALM1(2D)" />
		<DI_ITEM Index="5555" Name="DI_PG827ALM2"  BufferOffset="6010" Addr="D375.10" Description="PG827ALM2(2D)" />
		<DI_ITEM Index="5555" Name=""              BufferOffset="6011" Addr="D375.11" Description="" />
		<DI_ITEM Index="5555" Name=""              BufferOffset="6012" Addr="D375.12" Description="" />
		<DI_ITEM Index="5555" Name="DI_BufferStock2D"     BufferOffset="6013" Addr="D375.13" Description="Buffer Stock 2-D" />
		<DI_ITEM Index="5555" Name=""              BufferOffset="6014" Addr="D375.14" Description="" />
		<DI_ITEM Index="5555" Name=""              BufferOffset="6015" Addr="D375.15" Description="" />
		<DI_ITEM Index="5555" Name="DI_MFC826ALM1" BufferOffset="6016" Addr="D376.0" Description="MFC826ALM1(2C)" />
		<DI_ITEM Index="5555" Name="DI_MFC826ALM2" BufferOffset="6017" Addr="D376.1" Description="MFC826ALM2(2C)" />
		<DI_ITEM Index="5555" Name="DI_PG826ALM1"  BufferOffset="6018" Addr="D376.2" Description="PG826ALM1（2C)" />
		<DI_ITEM Index="5555" Name="DI_PG826ALM2"  BufferOffset="6019" Addr="D376.3" Description="PG826ALM2（2C)" />
		<DI_ITEM Index="5555" Name=""              BufferOffset="6020" Addr="D376.4" Description="" />
		<DI_ITEM Index="5555" Name=""              BufferOffset="6021" Addr="D376.5" Description="" />
		<DI_ITEM Index="5555" Name="DI_BufferStock2C"     BufferOffset="6022" Addr="D376.6"  Description="Buffer Stock 2-C" />
		<DI_ITEM Index="5555" Name="DI_MFC825ALM1" BufferOffset="6023" Addr="D376.7"  Description="MFC825ALM2(2B)" />
		<DI_ITEM Index="5555" Name="DI_MFC825ALM2" BufferOffset="6024" Addr="D376.8"  Description="MFC825ALM2(2B)" />
		<DI_ITEM Index="5555" Name="DI_PG825ALM1"  BufferOffset="6025" Addr="D376.9"  Description="PG825ALM2(2B)" />
		<DI_ITEM Index="5555" Name="DI_PG825ALM2"  BufferOffset="6026" Addr="D376.10" Description="PG825ALM2(2B)" />
		<DI_ITEM Index="5555" Name=""              BufferOffset="6027" Addr="D376.11" Description="" />
		<DI_ITEM Index="5555" Name=""              BufferOffset="6028" Addr="D376.12" Description="" />
		<DI_ITEM Index="5555" Name="DI_BufferStock2B"     BufferOffset="6029" Addr="D376.13" Description="Buffer Stock 2-B" />
		<DI_ITEM Index="5555" Name=""              BufferOffset="6030" Addr="D376.14" Description="" />
		<DI_ITEM Index="5555" Name=""              BufferOffset="6031" Addr="D376.15" Description="" />
		<DI_ITEM Index="5555" Name="DI_MFC828ALM1" BufferOffset="6032" Addr="D377.0" Description="MFC828ALM1(1A)" />
		<DI_ITEM Index="5555" Name="DI_MFC828ALM2" BufferOffset="6033" Addr="D377.1" Description="MFC828ALM2(1A)" />
		<DI_ITEM Index="5555" Name="DI_PG828ALM1"  BufferOffset="6034" Addr="D377.2" Description="PG828ALM1(1A)" />
		<DI_ITEM Index="5555" Name="DI_PG828ALM2"  BufferOffset="6035" Addr="D377.3" Description="PG828ALM2(1A)" />
		<DI_ITEM Index="5555" Name=""              BufferOffset="6036" Addr="D377.4" Description="" />
		<DI_ITEM Index="5555" Name=""              BufferOffset="6037" Addr="D377.5" Description="" />
		<DI_ITEM Index="5555" Name="DI_BufferStock1A"     BufferOffset="6038" Addr="D377.6"  Description="Buffer Stock 1-A" />
		<DI_ITEM Index="5555" Name="DI_MFC831ALM1" BufferOffset="6039" Addr="D377.7"  Description="MFC831ALM1(1D)" />
		<DI_ITEM Index="5555" Name="DI_MFC831ALM2" BufferOffset="6040" Addr="D377.8"  Description="MFC831ALM2(1D)" />
		<DI_ITEM Index="5555" Name="DI_PG831ALM1"  BufferOffset="6041" Addr="D377.9"  Description="PG831ALM1(1D)" />
		<DI_ITEM Index="5555" Name="DI_PG831ALM2"  BufferOffset="6042" Addr="D377.10" Description="PG831ALM2(1D)" />
		<DI_ITEM Index="5555" Name=""              BufferOffset="6043" Addr="D377.11" Description="" />
		<DI_ITEM Index="5555" Name=""              BufferOffset="6044" Addr="D377.12" Description="" />
		<DI_ITEM Index="5555" Name="DI_BufferStock1D"     BufferOffset="6045" Addr="D377.13" Description="Buffer Stock 1-D" />
		<DI_ITEM Index="5555" Name=""              BufferOffset="6046" Addr="D377.14" Description="" />
		<DI_ITEM Index="5555" Name=""              BufferOffset="6047" Addr="D377.15" Description="" />
		<DI_ITEM Index="5555" Name="DI_MFC830ALM1" BufferOffset="6048" Addr="D378.0" Description="MFC830ALM1(1C)" />
		<DI_ITEM Index="5555" Name="DI_MFC830ALM2" BufferOffset="6049" Addr="D378.1" Description="MFC830ALM2(1C)" />
		<DI_ITEM Index="5555" Name="DI_PG830ALM1"  BufferOffset="6050" Addr="D378.2" Description="PG830ALM1(1C)" />
		<DI_ITEM Index="5555" Name="DI_PG830ALM2"  BufferOffset="6051" Addr="D378.3" Description="PG830ALM2(1C)" />
		<DI_ITEM Index="5555" Name=""              BufferOffset="6052" Addr="D378.4" Description="" />
		<DI_ITEM Index="5555" Name=""              BufferOffset="6053" Addr="D378.5" Description="" />
		<DI_ITEM Index="5555" Name="DI_BufferStock1C"     BufferOffset="6054" Addr="D378.6"  Description="Buffer Stock 1-C" />
		<DI_ITEM Index="5555" Name="DI_MFC829ALM1" BufferOffset="6055" Addr="D378.7"  Description="MFC829ALM1(1B)" />
		<DI_ITEM Index="5555" Name="DI_MFC829ALM2" BufferOffset="6056" Addr="D378.8"  Description="MFC829ALM2(1B)" />
		<DI_ITEM Index="5555" Name="DI_PG829ALM1"  BufferOffset="6057" Addr="D378.9"  Description="PG829ALM1(1B)" />
		<DI_ITEM Index="5555" Name="DI_PG829ALM2"  BufferOffset="6058" Addr="D378.10" Description="PG829ALM1(1B)" />
		<DI_ITEM Index="5555" Name=""              BufferOffset="6059" Addr="D378.11" Description="" />
		<DI_ITEM Index="5555" Name=""              BufferOffset="6060" Addr="D378.12" Description="" />
		<DI_ITEM Index="5555" Name="DI_BufferStock1B"     BufferOffset="6061" Addr="D378.13" Description="Buffer Stock 1-B" />
		<DI_ITEM Index="5555" Name=""              BufferOffset="6062" Addr="D378.14" Description="" />
		<DI_ITEM Index="5555" Name=""              BufferOffset="6063" Addr="D378.15" Description="" />

		<DI_ITEM Index="6064" Name="DI_PCONNTILK" BufferOffset="6064" Addr="D379.0" Description="PCONNT_ILK" />
		<DI_ITEM Index="6065" Name="DI_DGZEROILK" BufferOffset="6065" Addr="D379.1" Description="DGZERO_ILK" />
		<DI_ITEM Index="6066" Name="DI_DP1ILK" BufferOffset="6066" Addr="D379.2" Description="DP1_ILK" />
		<DI_ITEM Index="6067" Name="DI_DP2ILK" BufferOffset="6067" Addr="D379.3" Description="DP2_ILK" />
		<DI_ITEM Index="6068" Name="DI_BWRILK" BufferOffset="6068" Addr="D379.4" Description="BWR_ILK" />
		<DI_ITEM Index="6069" Name="DI_DPRILK" BufferOffset="6069" Addr="D379.5" Description="DPR_ILK" />
		<DI_ITEM Index="6070" Name="DI_CLNILK" BufferOffset="6070" Addr="D379.6" Description="CLN_ILK" />
		<DI_ITEM Index="6071" Name="DI_HTR1" BufferOffset="6071" Addr="D379.7" Description="HTR1" />
		<DI_ITEM Index="6072" Name="DI_HTR2" BufferOffset="6072" Addr="D379.8" Description="HTR2" />
		<DI_ITEM Index="6073" Name="DI_HTR3" BufferOffset="6073" Addr="D379.9" Description="HTR3" />
		<DI_ITEM Index="6074" Name="DI_HREFILK" BufferOffset="6074" Addr="D379.10" Description="HREF_ILK" />
		<DI_ITEM Index="6075" Name="DI_CREFILK" BufferOffset="6075" Addr="D379.11" Description="CREF_ILK" />
		<DI_ITEM Index="6076" Name="DI_HMNTILK" BufferOffset="6076" Addr="D379.12" Description="HMNT_ILK" />
		<DI_ITEM Index="6077" Name="DI_CMNTILK" BufferOffset="6077" Addr="D379.13" Description="CMNT_ILK" />
		<DI_ITEM Index="6078" Name="DI_HZEROILK" BufferOffset="6078" Addr="D379.14" Description="HZERO_ILK" />
		<DI_ITEM Index="6079" Name="DI_CZEROILK" BufferOffset="6079" Addr="D379.15" Description="CZERO_ILK" />
		<DI_ITEM Index="6080" Name="DI_WATILK" BufferOffset="6080" Addr="D380.0" Description="WAT_ILK" />
		<DI_ITEM Index="6081" Name="DI_CEXHILK" BufferOffset="6081" Addr="D380.1" Description="CEXH_ILK" />
		<DI_ITEM Index="6082" Name="DI_NZEROILK" BufferOffset="6082" Addr="D380.2" Description="NZERO_ILK" />
		<DI_ITEM Index="6083" Name="DI_MZEROILK" BufferOffset="6083" Addr="D380.3" Description="MZERO_ILK" />
		<DI_ITEM Index="6084" Name="DI_HCDTANKHH" BufferOffset="6084" Addr="D380.4" Description="HCD_TANK_HH" />
		<DI_ITEM Index="6085" Name="DI_HCDTANKH" BufferOffset="6085" Addr="D380.5" Description="HCD_TANK_H" />
		<DI_ITEM Index="6086" Name="DI_HCDTANKM" BufferOffset="6086" Addr="D380.6" Description="HCD_TANK_M" />
		<DI_ITEM Index="6087" Name="DI_HCDTANKL" BufferOffset="6087" Addr="D380.7" Description="HCD_TANK_L" />
		<DI_ITEM Index="6088" Name="DI_CSOURCETANKHH" BufferOffset="6088" Addr="D380.8" Description="C_SOURCE_TANK_HH" />
		<DI_ITEM Index="6089" Name="DI_CSOURCETANKH" BufferOffset="6089" Addr="D380.9" Description="C_SOURCE_TANK_H" />
		<DI_ITEM Index="6090" Name="DI_CSOURCETANKM" BufferOffset="6090" Addr="D380.10" Description="C_SOURCE_TANK_M" />
		<DI_ITEM Index="6091" Name="DI_CSOURCETANKL" BufferOffset="6091" Addr="D380.11" Description="C_SOURCE_TANK_L" />

		<DI_ITEM Index="6092" Name="DI_HCDREFACT" BufferOffset="6092" Addr="D380.12" Description="HCD_REF_ACT" />
		<DI_ITEM Index="6093" Name="DI_CSourCeREFACT" BufferOffset="6093" Addr="D380.13" Description="C_SourCe_REF_ACT" />
		<DI_ITEM Index="6094" Name="DI_HTR2ILK" BufferOffset="6094" Addr="D380.14" Description="HTR2_ILK" />

		<DI_ITEM Index="6400" Name="DI_SiSourceTANKHeater1INHIBITHIALARM" BufferOffset="6400" Addr="D400.0" Description="Si-Source TANK heater1 INHIBIT HI ALARM" />
		<DI_ITEM Index="6401" Name="DI_SiSourceTANKHeater1INHIBITLOWALARM" BufferOffset="6401" Addr="D400.1" Description="Si-Source TANK heater1 INHIBIT LOW ALARM" />
		<DI_ITEM Index="6402" Name="DI_SiSourceTANKHeater2INHIBITHIALARM" BufferOffset="6402" Addr="D400.2" Description="Si-Source TANK heater2 INHIBIT HI ALARM" />
		<DI_ITEM Index="6403" Name="DI_SiSourceTANKHeater2INHIBITLOWALARM" BufferOffset="6403" Addr="D400.3" Description="Si-Source TANK heater2 INHIBIT LOW ALARM" />
		<DI_ITEM Index="6404" Name="DI_SiSourceTANKHeater3INHIBITHIALARM" BufferOffset="6404" Addr="D400.4" Description="Si-Source TANK heater3 INHIBIT HI ALARM" />
		<DI_ITEM Index="6405" Name="DI_SiSourceTANKHeater3INHIBITLOWALARM" BufferOffset="6405" Addr="D400.5" Description="Si-Source TANK heater3 INHIBIT LOW ALARM" />
		<DI_ITEM Index="6406" Name="DI_SiSourceAVMFCHeaterINHIBITHIALARM" BufferOffset="6406" Addr="D400.6" Description="Si-Source AV&amp;MFC heater INHIBIT HI ALARM" />
		<DI_ITEM Index="6407" Name="DI_SiSourceAVMFCHeaterINHIBITLOWALARM" BufferOffset="6407" Addr="D400.7" Description="Si-Source AV&amp;MFC heater INHIBIT LOW ALARM" />

		<DI_ITEM Index="6408" Name="DI_CSourceTANKHeater1INHIBITHIALARM" BufferOffset="6408" Addr="D400.8" Description="C-Source TANK heater1 INHIBIT HI ALARM" />
		<DI_ITEM Index="6409" Name="DI_CSourceTANKHeater1INHIBITLOWALARM" BufferOffset="6409" Addr="D400.9" Description="C-Source TANK heater1 INHIBIT LOW ALARM" />
		<DI_ITEM Index="6410" Name="DI_CSourceTANKHeater2INHIBITHIALARM" BufferOffset="6410" Addr="D400.10" Description="C-Source TANK heater2 INHIBIT HI ALARM" />
		<DI_ITEM Index="6411" Name="DI_CSourceTANKHeater2INHIBITLOWALARM" BufferOffset="6411" Addr="D400.11" Description="C-Source TANK heater2 INHIBIT LOW ALARM" />
		<DI_ITEM Index="6412" Name="DI_CSourceTANKHeater3INHIBITHIALARM" BufferOffset="6412" Addr="D400.12" Description="C-Source TANK heater3 INHIBIT HI ALARM" />
		<DI_ITEM Index="6413" Name="DI_CSourceTANKHeater3INHIBITLOWALARM" BufferOffset="6413" Addr="D400.13" Description="C-Source TANK heater3 INHIBIT LOW ALARM" />
		<DI_ITEM Index="6414" Name="DI_CSourceAVMFCHeaterINHIBITHIALARM" BufferOffset="6414" Addr="D400.14" Description="C-Source AV&amp;MFC heater INHIBIT HI ALARM" />
		<DI_ITEM Index="6415" Name="DI_CSourceAVMFCHeaterINHIBITLOWALARM" BufferOffset="6415" Addr="D400.15" Description="C-Source AV&amp;MFC heater INHIBIT LOW ALARM" />

	</Dig_In>

	<Dig_Out>
		<DO_ITEM Index="0" Name="DO_HPMValveOnOff" BufferOffset="48" Addr="D1003.0" Description="HPM valve on/off"/>
		<DO_ITEM Index="1" Name="DO_O2ANALYZERPUMPOFF" BufferOffset="49" Addr="D1003.1" Description="O2_ANALYZER PUMP OFF"/>

		<DO_ITEM Index="2" Name="DO_MainPowerOn" BufferOffset="288" Addr="D1018.0" Description="Main power on"/>
		<DO_ITEM Index="3" Name="DO_MainPowerOff" BufferOffset="289" Addr="D1018.1" Description="Main power off"/>
		<DO_ITEM Index="4" Name="DO_GaslineHeaterPowerOn" BufferOffset="290" Addr="D1018.2" Description="Gasline heater power on"/>
		<DO_ITEM Index="5" Name="DO_ExhaustHeaterPowerOn" BufferOffset="291" Addr="D1018.3" Description="Exhaust heater power on"/>
		<DO_ITEM Index="6" Name="DO_FrontBodyPowerOn" BufferOffset="292" Addr="D1018.4" Description="Front body power on"/>
		<DO_ITEM Index="7" Name="DO_BlowerMotorPowerOn" BufferOffset="293" Addr="D1018.5" Description="Blower motor power on"/>
		<DO_ITEM Index="8" Name="DO_FFUPowerOn" BufferOffset="294" Addr="D1018.6" Description="FFU power on"/>
		<DO_ITEM Index="9" Name="DO_T102PowerOn" BufferOffset="295" Addr="D1018.7" Description="T102 power on"/>
		<DO_ITEM Index="10" Name="DO_HExPowerOn" BufferOffset="296" Addr="D1018.8" Description="H-ex power on"/>
		<DO_ITEM Index="11" Name="DO_RFPowerOn" BufferOffset="304" Addr="D1019.0" Description="RF power on"/>

		<DO_ITEM Index="12" Name="DO_SV801HardwareInterlocks1" BufferOffset="336" Addr="D1021.0" Description="SV801 hardware interlocks1"/>
		<DO_ITEM Index="13" Name="DO_SV801HardwareInterlocks2" BufferOffset="337" Addr="D1021.1" Description="SV801 hardware interlocks2"/>
		<DO_ITEM Index="14" Name="DO_SV802HardwareInterlocks1" BufferOffset="338" Addr="D1021.2" Description="SV802 hardware interlocks1"/>
		<DO_ITEM Index="15" Name="DO_SV802HardwareInterlocks2" BufferOffset="339" Addr="D1021.3" Description="SV802 hardware interlocks2"/>
		<DO_ITEM Index="16" Name="DO_WaferRobotEnable1" BufferOffset="340" Addr="D1021.4" Description="Wafer robot enable1"/>
		<DO_ITEM Index="17" Name="DO_WaferRobotEnable2" BufferOffset="341" Addr="D1021.5" Description="Wafer robot enable2"/>
		<DO_ITEM Index="18" Name="DO_WaferRobotReset" BufferOffset="342" Addr="D1021.6" Description="Wafer robot reset"/>

		<DO_ITEM Index="20" Name="DO_FOUPRobotEnable1" BufferOffset="384" Addr="D1024.0" Description="FOUP robot enable1"/>
		<DO_ITEM Index="21" Name="DO_FOUPRobotEnable2" BufferOffset="385" Addr="D1024.1" Description="FOUP robot enable2"/>
		<DO_ITEM Index="22" Name="DO_LightCurtainIdle" BufferOffset="386" Addr="D1024.2" Description="Light curtain idle"/>
		<DO_ITEM Index="23" Name="DO_FOUPRobotReset" BufferOffset="387" Addr="D1024.3" Description="FOUP Robot Reset"/>

		<DO_ITEM Index="24" Name="DO_O2ConcentrationContact1" BufferOffset="960" Addr="D1060.0" Description="O2 Concentration contact-1"/>
		<DO_ITEM Index="25" Name="DO_O2ConcentrationContact2" BufferOffset="961" Addr="D1060.1" Description="O2 Concentration contact-2"/>
		<DO_ITEM Index="26" Name="DO_LADamperOpen" BufferOffset="962" Addr="D1060.2" Description="LA Damper open(AV227)"/>
		<DO_ITEM Index="27" Name="DO_LADamperClose" BufferOffset="963" Addr="D1060.3" Description="LA Damper Close(AV227)"/>

		<DO_ITEM Index="54" Name="DO_GaslineHeatingEN1K5201" BufferOffset="1088" Addr="D1068.0" Description="gasline heating EN1(K5201)"/>
		<DO_ITEM Index="55" Name="DO_GaslineHeatingEN2K5201" BufferOffset="1089" Addr="D1068.1" Description="gasline heating EN2(K5201)"/>
		<DO_ITEM Index="56" Name="DO_GaslineHeatingEN1K5202" BufferOffset="1090" Addr="D1068.2" Description="gasline heating EN1(K5202)"/>
		<DO_ITEM Index="57" Name="DO_GaslineHeatingEN2K5202" BufferOffset="1091" Addr="D1068.3" Description="gasline heating EN2(K5202)"/>
		<DO_ITEM Index="58" Name="DO_GaslineHeatingEN1K5203" BufferOffset="1092" Addr="D1068.4" Description="gasline heating EN1(K5203)"/>
		<DO_ITEM Index="59" Name="DO_GaslineHeatingEN2K5203" BufferOffset="1093" Addr="D1068.5" Description="gasline heating EN2(K5203)"/>
		<DO_ITEM Index="60" Name="DO_GaslineHeatingEN1K5204" BufferOffset="1094" Addr="D1068.6" Description="gasline heating EN1(K5204)"/>
		<DO_ITEM Index="61" Name="DO_GaslineHeatingEN2K5204" BufferOffset="1095" Addr="D1068.7" Description="gasline heating EN2(K5204)"/>
		<DO_ITEM Index="62" Name="DO_GaslineHeatingEN1K5205" BufferOffset="1096" Addr="D1068.8" Description="gasline heating EN1(K5205)"/>
		<DO_ITEM Index="63" Name="DO_GaslineHeatingEN2K5205" BufferOffset="1097" Addr="D1068.9" Description="gasline heating EN2(K5205)"/>

		<DO_ITEM Index="67" Name="DO_StartButton" BufferOffset="1104" Addr="D1069.0" Description="start button"/>
		<DO_ITEM Index="68" Name="DO_StopButton" BufferOffset="1105" Addr="D1069.1" Description="stop button"/>
		<DO_ITEM Index="69" Name="DO_ResetButton" BufferOffset="1106" Addr="D1069.2" Description="reset button"/>
		<DO_ITEM Index="70" Name="DO_MechaStopButton" BufferOffset="1107" Addr="D1069.3" Description="mecha stop button"/>
		<DO_ITEM Index="71" Name="DO_AutoOrManualKnob" BufferOffset="1108" Addr="D1069.4" Description="auto/manual knob"/>
		<DO_ITEM Index="72" Name="DO_NormalOrMaintainKnob" BufferOffset="1109" Addr="D1069.5" Description="normal/maintain knob"/>
		<DO_ITEM Index="73" Name="DO_HeaterPowerOnOffKnob" BufferOffset="1110" Addr="D1069.6" Description="heater power on/off knob"/>
		<DO_ITEM Index="74" Name="DO_REVReset" BufferOffset="1111" Addr="D1069.7" Description="REV reset"/>

		<DO_ITEM Index="97" Name="DO_EV101CoolingWaterShift" BufferOffset="1152" Addr="D1072.0" Description="EV101 cooling water shift"/>
		<DO_ITEM Index="98" Name="DO_APCControllerAutoClose" BufferOffset="1154" Addr="D1072.2" Description="APC controller auto close"/>
		<DO_ITEM Index="99" Name="DO_APCControllerPumpOn" BufferOffset="1155" Addr="D1072.3" Description="APC controller pump on/off status"/>
		
		<DO_ITEM Index="99" Name="DO_VG11ZeroStart" BufferOffset="1168" Addr="D1073.0" Description="VG11 zero Start"/>
		<DO_ITEM Index="99" Name="DO_VG11ZeroRest" BufferOffset="1169" Addr="D1073.1" Description="VG11 zero Rest"/>
		<DO_ITEM Index="99" Name="DO_VG13ZeroStart" BufferOffset="1170" Addr="D1073.2" Description="VG13 zero Start"/>
		<DO_ITEM Index="99" Name="DO_VG13ZeroRest" BufferOffset="1171" Addr="D1073.3" Description="VG13 zero Rest"/>


		<DO_ITEM Index="1345" Name="DO_VaccumPumpBothOn" BufferOffset="1345"           Addr="D1084.1" Description="Vaccum1 Pump Both On"/>
		<DO_ITEM Index="1346" Name="DO_VaccumPumpAUCOn" BufferOffset="1346"           Addr="D1084.2" Description="Vaccum1 Pump AUC On"/>
		<DO_ITEM Index="1347" Name="DO_VaccumPumpAGVOpen" BufferOffset="1347"           Addr="D1084.3" Description="Vaccum1 Pump AGV Open"/>
		<DO_ITEM Index="1348" Name="DO_FurnaceUZoneHeatingEnable" BufferOffset="1348"           Addr="D1084.4" Description="Furnace L zone heating enable"/>
		<DO_ITEM Index="1349" Name="DO_FurnaceCUZoneHeatingEnable" BufferOffset="1349"           Addr="D1084.5" Description="Furnace CL zone heating enable"/>
		<DO_ITEM Index="1350" Name="DO_FurnaceCZoneHeatingEnable" BufferOffset="1350"           Addr="D1084.6" Description="Furnace C zone heating enable"/>
		<DO_ITEM Index="1351" Name="DO_FurnaceCLZoneHeatingEnable" BufferOffset="1351"           Addr="D1084.7" Description="Furnace CU zone heating enable"/>
		<DO_ITEM Index="1352" Name="DO_FurnaceLZoneHeatingEnable" BufferOffset="1352"           Addr="D1084.8" Description="Furnace U zone heating enable"/>
		<DO_ITEM Index="1353" Name="DO_HPMValveOutStatus" BufferOffset="1353"           Addr="D1084.9" Description="HPM Output"/>
		<DO_ITEM Index="1354" Name="DO_ForlineHeaterOn" BufferOffset="1354"           Addr="D1084.10" Description="Foreline heater on"/>

		<DO_ITEM Index="1356" Name="DO_Vaccum2PumpBothOn" BufferOffset="1356"           Addr="D1084.12" Description="Vaccum2 Pump Both On"/>
		<DO_ITEM Index="1357" Name="DO_Vaccum2PumpAUCOn" BufferOffset="1357"           Addr="D1084.13" Description="Vaccum 2Pump AUC On"/>
		<DO_ITEM Index="1358" Name="DO_Vaccum2PumpAGVOpen" BufferOffset="1358"           Addr="D1084.14" Description="Vaccum 2Pump AGV Open"/>
		<DO_ITEM Index="1359" Name="DO_DEPOSW" BufferOffset="1359"  Addr="D1084.15" Description="DEPO SW"/>


		<DO_ITEM Index="143" Name="DO_HeaterE901Enable" BufferOffset="1360" Addr="D1085.0" Description="Heater E901 power on Enable"/>
		<DO_ITEM Index="144" Name="DO_HeaterE902Enable" BufferOffset="1361" Addr="D1085.1" Description="Heater E902 power on Enable"/>
		<DO_ITEM Index="145" Name="DO_HeaterE903Enable" BufferOffset="1362" Addr="D1085.2" Description="Heater E903 power on Enable"/>
		<DO_ITEM Index="146" Name="DO_HeaterE904Enable" BufferOffset="1363" Addr="D1085.3" Description="Heater E904 power on Enable"/>
		<DO_ITEM Index="147" Name="DO_HeaterE905Enable" BufferOffset="1364" Addr="D1085.4" Description="Heater E905 power on Enable"/>
		<DO_ITEM Index="148" Name="DO_HeaterE906Enable" BufferOffset="1365" Addr="D1085.5" Description="Heater E906 power on Enable"/>
		<DO_ITEM Index="149" Name="DO_HeaterE907Enable" BufferOffset="1366" Addr="D1085.6" Description="Heater E907 power on Enable"/>
		<DO_ITEM Index="150" Name="DO_HeaterE908Enable" BufferOffset="1367" Addr="D1085.7" Description="Heater E908 power on Enable"/>
		<DO_ITEM Index="151" Name="DO_HeaterE909Enable" BufferOffset="1368" Addr="D1085.8" Description="Heater E909 power on Enable"/>
		<DO_ITEM Index="152" Name="DO_HeaterE910Enable" BufferOffset="1369" Addr="D1085.9" Description="Heater E910 power on Enable"/>
		<DO_ITEM Index="153" Name="DO_HeaterE911Enable" BufferOffset="1370" Addr="D1085.10" Description="Heater E911 power on Enable"/>
		<DO_ITEM Index="154" Name="DO_CapHeaterPowerOnEnable" BufferOffset="1371" Addr="D1085.11" Description="Cap heater power on Enable"/>
		<DO_ITEM Index="155" Name="DO_HeaterE912Enable" BufferOffset="1372" Addr="D1085.12" Description="Heater E912 power on Enable"/>
		<!--<DO_ITEM Index="155" Name="DO_SPARE" BufferOffset="1373" Addr="D1085.13" Description="SPARE"/>-->
		<DO_ITEM Index="155" Name="DO_AV71ExternalHeater" BufferOffset="1374" Addr="D1085.14" Description="AV71 External heater"/>
		<DO_ITEM Index="155" Name="DO_AV71RingHeater" BufferOffset="1375" Addr="D1085.15" Description="AV71 Ring heater"/>

		<!--<DO_ITEM Index="160" Name="DO_FurnacePowerOffLed" BufferOffset="1392" Addr="D1087.0" Description="Furnace Power Off Led"/>
		<DO_ITEM Index="161" Name="DO_GaslineHeaterPowerOffLed" BufferOffset="1393" Addr="D1087.1" Description="Gasline Heater Power Off Led"/>
		<DO_ITEM Index="162" Name="DO_ExhaustHeaterPowerOffLed" BufferOffset="1394" Addr="D1087.2" Description="Exhaust Heater Power Off Led"/>
		<DO_ITEM Index="163" Name="DO_FrontBodyPowerOffLed" BufferOffset="1395" Addr="D1087.3" Description="Front Body Power Off Led"/>
		<DO_ITEM Index="164" Name="DO_BlowePowerOffLed" BufferOffset="1396" Addr="D1087.4" Description="Blowe Power Off Led"/>
		<DO_ITEM Index="165" Name="DO_FFUPowerOffLed" BufferOffset="1397" Addr="D1087.5" Description="FFU Power Off Led"/>
		<DO_ITEM Index="166" Name="DO_T102PowerOffLed" BufferOffset="1398" Addr="D1087.6" Description="T102 Power Off Led"/>
		<DO_ITEM Index="167" Name="DO_T103PowerOffLed" BufferOffset="1399" Addr="D1087.7" Description="T103 Power Off Led"/>
		<DO_ITEM Index="168" Name="DO_InterlockAlarmLed" BufferOffset="1400" Addr="D1087.8" Description="Interlock Alarm Led"/>-->

		<DO_ITEM Index="173" Name="DO_BoatRAxisDriverStart" BufferOffset="1408" Addr="D1088.0" Description="Boat R Axis driver start"/>
		<DO_ITEM Index="174" Name="DO_BoatRAxisAlarmReset" BufferOffset="1409" Addr="D1088.1" Description="Boat R Axis alarm reset"/>
		<DO_ITEM Index="175" Name="DO_BoatRAxisAllWindingsOff" BufferOffset="1410" Addr="D1088.2" Description="Boat R Axis all windings off"/>
		<DO_ITEM Index="176" Name="DO_BoatRotationStepperDriverStop" BufferOffset="1411" Addr="D1088.3" Description="Boat rotation stepper driver stop"/>
		<DO_ITEM Index="177" Name="DO_BoatRAxisDataSelectionM0" BufferOffset="1412" Addr="D1088.4" Description="Boat R Axisr data selection M0"/>
		<DO_ITEM Index="178" Name="DO_BoatRAxisDataSelectionM1" BufferOffset="1413" Addr="D1088.5" Description="Boat R Axis data selection M1"/>
		<DO_ITEM Index="179" Name="DO_BoatRAxisDataSelectionM2" BufferOffset="1414" Addr="D1088.6" Description="Boat R Axis data selection M2"/>
		<DO_ITEM Index="180" Name="DO_BoatRAxisDataSelectionM3" BufferOffset="1415" Addr="D1088.7" Description="Boat R Axis data selection M3"/>
		<DO_ITEM Index="181" Name="DO_BoatRAxisDataSelectionM4" BufferOffset="1416" Addr="D1088.8" Description="Boat R Axis data selection M4"/>
		<DO_ITEM Index="182" Name="DO_BoatRAxisDataSelectionM5" BufferOffset="1417" Addr="D1088.9" Description="Boat R Axis data selection M5"/>
		<DO_ITEM Index="183" Name="DO_BoatRAxisHomeOrPosPrerst" BufferOffset="1418" Addr="D1088.10" Description="Boat R Axis home or pos pre-rst"/>
		<DO_ITEM Index="184" Name="DO_BoatRAxisForwardRun" BufferOffset="1419" Addr="D1088.11" Description="Boat R Axis forward run"/>
		<DO_ITEM Index="185" Name="DO_BoatRAxisReverseRun" BufferOffset="1420" Addr="D1088.12" Description="Boat R Axis reverse run"/>
		<DO_ITEM Index="186" Name="DO_TransferRoomLedLightBar" BufferOffset="1421" Addr="D1088.13" Description="Transfer room led light bar"/>
		<DO_ITEM Index="187" Name="DO_ShutterOpen" BufferOffset="1422" Addr="D1088.14" Description="Furnace shutter Open"/>
		<DO_ITEM Index="187" Name="DO_ShutterClose" BufferOffset="1423" Addr="D1088.15" Description="Furnace shutter Close"/>

		<DO_ITEM Index="189" Name="DO_WaferRobotAlarmReset" BufferOffset="1424" Addr="D1089.0" Description="Wafer Robot Alarm Reset"/>
		<DO_ITEM Index="190" Name="DO_WaferRobotActionHold" BufferOffset="1425" Addr="D1089.1" Description="Wafer Robot Action Hold"/>
		<DO_ITEM Index="191" Name="DO_WaferRobotTPEnable" BufferOffset="1426" Addr="D1089.2" Description="Wafer Robot TP Enable"/>
		<DO_ITEM Index="192" Name="DO_WaferRobotFIMS1Interlock" BufferOffset="1427" Addr="D1089.3" Description="Wafer Robot FIMS1 Interlock"/>
		<DO_ITEM Index="193" Name="DO_WaferRobotFIMS2Interlock" BufferOffset="1428" Addr="D1089.4" Description="Wafer Robot FIMS2 Interlock"/>
		<DO_ITEM Index="194" Name="DO_WaferRobotBoatRotaryInterlock" BufferOffset="1429" Addr="D1089.5" Description="Wafer Robot Boat Rotary Interlock"/>
		<DO_ITEM Index="195" Name="DO_WaferRobotBoatBottomInterlock" BufferOffset="1430" Addr="D1089.6" Description="Wafer Robot Boat Bottom Interlock"/>
		<DO_ITEM Index="195" Name="DO_FIMS1VaccumValveAction" BufferOffset="1431" Addr="D1089.7" Description="FIMS1 vaccum valve action"/>
		<DO_ITEM Index="195" Name="DO_FIMS2VaccumValveAction" BufferOffset="1432" Addr="D1089.8" Description="FIMS2 vaccum valve action"/>


		<DO_ITEM Index="198" Name="DO_SV61Open" BufferOffset="1436" Addr="D1089.12" Description="SV61 Open"/>
		<DO_ITEM Index="199" Name="DO_SV62Open" BufferOffset="1437" Addr="D1089.13" Description="SV62 Open"/>
		<DO_ITEM Index="200" Name="DO_SV63Open" BufferOffset="1438" Addr="D1089.14" Description="SV63 Open"/>
		<DO_ITEM Index="201" Name="DO_SV64Open" BufferOffset="1439" Addr="D1089.15" Description="SV64 Open"/>

		<DO_ITEM Index="204" Name="DO_MechaStopRed" BufferOffset="1472" Addr="D1092.0" Description="mecha stop red"/>
		<DO_ITEM Index="205" Name="DO_MechaPause" BufferOffset="1473" Addr="D1092.1" Description="mecha pause"/>
		<DO_ITEM Index="206" Name="DO_HandOffLeft" BufferOffset="1474" Addr="D1092.2" Description="hand off left"/>
		<DO_ITEM Index="207" Name="DO_HandOffRight" BufferOffset="1475" Addr="D1092.3" Description="hand off right"/>
		<DO_ITEM Index="208" Name="DO_TowerRed" BufferOffset="1476" Addr="D1092.4" Description="tower-red"/>
		<DO_ITEM Index="209" Name="DO_TowerOrange" BufferOffset="1477" Addr="D1092.5" Description="tower-orange"/>
		<DO_ITEM Index="210" Name="DO_TowerGreen" BufferOffset="1478" Addr="D1092.6" Description="tower-green"/>
		<DO_ITEM Index="211" Name="DO_TowerBuzzle" BufferOffset="1479" Addr="D1092.7" Description="tower-buzzle"/>
		<DO_ITEM Index="212" Name="DO_AGVDoorSwitchOpen" BufferOffset="1480" Addr="D1092.8" Description="AGV Door Switch Open"/>
		<DO_ITEM Index="213" Name="DO_AGVDoorSwitchClose" BufferOffset="1481" Addr="D1092.9" Description="AGV Door Switch Close"/>
		<DO_ITEM Index="214" Name="DO_LP1FOUPClamp" BufferOffset="1482" Addr="D1092.10" Description="Load Port1 FOUP Clamp"/>
		<DO_ITEM Index="215" Name="DO_LP1FOUPRelease" BufferOffset="1483" Addr="D1092.11" Description="Load Port1 FOUP Release"/>
		<DO_ITEM Index="216" Name="DO_FOUPRobotAlarmReset" BufferOffset="1484" Addr="D1092.12" Description="FOUP Robot Alarm Reset"/>
		<DO_ITEM Index="217" Name="DO_FOUPRobotActionHold" BufferOffset="1485" Addr="D1092.13" Description="FOUP Robot Action Hold"/>
		<DO_ITEM Index="218" Name="DO_FOUPRobotTPEnable" BufferOffset="1486" Addr="D1092.14" Description="FOUP Robot TP Enable"/>
		<DO_ITEM Index="219" Name="DO_FOUPRobotBufferInterlock" BufferOffset="1487" Addr="D1092.15" Description="FOUP Robot BuffeInterlock"/>
		<DO_ITEM Index="220" Name="DO_LP1FOUPPresence" BufferOffset="1488" Addr="D1093.0" Description="Load Port1 FOUP presence"/>
		<DO_ITEM Index="221" Name="DO_LP1FOUPPlacement" BufferOffset="1489" Addr="D1093.1" Description="Load Port1 FOUP placement"/>
		<DO_ITEM Index="222" Name="DO_LP1FOUPLoad" BufferOffset="1490" Addr="D1093.2" Description="Load Port1 FOUP load"/>
		<DO_ITEM Index="223" Name="DO_LP1FOUPUnload" BufferOffset="1491" Addr="D1093.3" Description="Load Port1 FOUP unload"/>
		<DO_ITEM Index="224" Name="DO_LP1FOUPManual" BufferOffset="1492" Addr="D1093.4" Description="Load Port1 FOUP manual"/>
		<DO_ITEM Index="225" Name="DO_FOUPRobotFIMS1Interlock" BufferOffset="1493" Addr="D1093.5" Description="FOUP Robot FIMS1 Interlock"/>
		<DO_ITEM Index="226" Name="DO_FOUPRobotFIMS2Interlock" BufferOffset="1494" Addr="D1093.6" Description="FOUP Robot FIMS2 Interlock"/>

		<DO_ITEM Index="228" Name="DO_LP2FOUPPresence" BufferOffset="1496" Addr="D1093.8" Description="loadport 2 FOUP presence"/>
		<DO_ITEM Index="229" Name="DO_LP2FOUPPlacement" BufferOffset="1497" Addr="D1093.9" Description="loadport 2 FOUP placement"/>
		<DO_ITEM Index="230" Name="DO_LP2FOUPLoad" BufferOffset="1498" Addr="D1093.10" Description="loadport 2 FOUP load"/>
		<DO_ITEM Index="231" Name="DO_LP2FOUPUnload" BufferOffset="1499" Addr="D1093.11" Description="loadport 2 FOUP unload"/>
		<DO_ITEM Index="232" Name="DO_LP2FOUPManual" BufferOffset="1500" Addr="D1093.12" Description="loadport 2 FOUP manual"/>
		<DO_ITEM Index="233" Name="DO_LP2FOUPClamp" BufferOffset="1501" Addr="D1093.13" Description="loadport 2 FOUP clamp"/>
		<DO_ITEM Index="234" Name="DO_LP2FOUPRelease" BufferOffset="1502" Addr="D1093.14" Description="loadport 2 FOUP release"/>

		<DO_ITEM Index="1504" Name="DO_Loadport1E84REQ" BufferOffset="1504" Addr="D1094.00" Description="loadport 1 E84 REQ"/>
		<DO_ITEM Index="1505" Name="DO_Loadport1E84UREQ" BufferOffset="1505" Addr="D1094.01" Description="loadport 1 E84 UREQ"/>
		<DO_ITEM Index="1507" Name="DO_Loadport1E84Ready" BufferOffset="1507" Addr="D1094.03" Description="loadport 1 E84 ready"/>
		<DO_ITEM Index="1510" Name="DO_Loadport1E84HOAVBL" BufferOffset="1510" Addr="D1094.06" Description="loadport 1 E84 HO AVBL"/>
		<DO_ITEM Index="1511" Name="DO_Loadport1E84ES" BufferOffset="1511" Addr="D1094.07" Description="loadport 1 E84 ES"/>
		<DO_ITEM Index="1512" Name="DO_Loadport2E84REQ" BufferOffset="1512" Addr="D1094.08" Description="loadport 2 E84 REQ"/>
		<DO_ITEM Index="1513" Name="DO_Loadport2E84UREQ" BufferOffset="1513" Addr="D1094.09" Description="loadport 2 E84 UREQ"/>
		<DO_ITEM Index="1515" Name="DO_Loadport2E84Ready" BufferOffset="1515" Addr="D1094.11" Description="loadport 2 E84 ready"/>
		<DO_ITEM Index="1518" Name="DO_Loadport2E84HOAVBL" BufferOffset="1518" Addr="D1094.14" Description="loadport 2 E84 HO AVBL"/>
		<DO_ITEM Index="1519" Name="DO_Loadport2E84ES" BufferOffset="1519" Addr="D1094.15" Description="loadport2 E84 ES"/>

		<DO_ITEM Index="300" Name="DO_S101Indicator" BufferOffset="1601" Addr="D1100.1" Description="S101 Indicator(Main power)"/>
		<DO_ITEM Index="301" Name="DO_S102Indicator" BufferOffset="1602" Addr="D1100.2" Description="S102 Indicator(Gsline heater)"/>
		<DO_ITEM Index="302" Name="DO_S103Indicator" BufferOffset="1603" Addr="D1100.3" Description="S103 Indicator(exhaust heater)"/>
		<DO_ITEM Index="303" Name="DO_S104Indicator" BufferOffset="1604" Addr="D1100.4" Description="S104 Indicator(FurnacePower)"/>
		<DO_ITEM Index="304" Name="DO_S105Indicator" BufferOffset="1605" Addr="D1100.5" Description="S105 Indicator(blower motor power)"/>
		<DO_ITEM Index="305" Name="DO_S106Indicator" BufferOffset="1606" Addr="D1100.6" Description="S106 Indicator(ffu power)"/>
		<DO_ITEM Index="306" Name="DO_S107Indicator" BufferOffset="1607" Addr="D1100.7" Description="S107 Indicator(t102 power)"/>
		<DO_ITEM Index="307" Name="DO_S108Indicator" BufferOffset="1608" Addr="D1100.8" Description="S108 Indicator(t103 power)"/>
		<DO_ITEM Index="306" Name="DO_S109Indicator" BufferOffset="1609" Addr="D1100.09" Description="S109 Indicator(RF POWER)"/>
		<DO_ITEM Index="307" Name="DO_RSTIndicator" BufferOffset="1610" Addr="D1100.10" Description="RST indicator"/>
		<!--<DO_ITEM Index="306" Name="" BufferOffset="1611" Addr="D1100.11" Description=""/>
		<DO_ITEM Index="307" Name="" BufferOffset="1612" Addr="D1100.12" Description=""/>
		<DO_ITEM Index="306" Name="" BufferOffset="1613" Addr="D1100.13" Description=""/>
		<DO_ITEM Index="307" Name="" BufferOffset="1614" Addr="D1100.14" Description=""/>
		<DO_ITEM Index="307" Name="" BufferOffset="1615" Addr="D1100.15" Description=""/>-->

		<DO_ITEM Index="307" Name="DO_FORELINEHEATERON/OFF" BufferOffset="1616"   Addr="D1101.0" Description="FORELINE HEATER ON/OFF"/>
		<!--<DO_ITEM Index="307" Name="DO_HOTN2ON/OFF" BufferOffset="1618"           Addr="D1101.2" Description="HOT N2 ON/OFF"/>-->
		<DO_ITEM Index="307" Name="DO_EXTERNALBMOOUT" BufferOffset="1620"           Addr="D1101.4" Description="EXTERNAL EMO OUT"/>
		<DO_ITEM Index="307" Name="DO_AUTOREFILL1REQUESTOrVALVEOPEN" BufferOffset="1621"           Addr="D1101.5" Description="AUTOREFILL-1 REQUEST Or VALVE OPEN"/>
		<!--<DO_ITEM Index="307" Name="DO_AUTOREFLL1READYOrFDLLB" BufferOffset="1623"           Addr="D1101.7" Description="AUTOREFLL-1 READY Or FDLL. B"/>-->
		<DO_ITEM Index="307" Name="DO_ALTOREFILL2REQUESTOrVALVEOPEN" BufferOffset="1623"           Addr="D1101.7" Description="ALTOREFILL-2 REQUEST Or VALVE OPEN"/>

		<DO_ITEM Index="236" Name="DO_BoatRAxisInitialCmd" BufferOffset="2240" Addr="D1140.0" Description="Boat Rotation Axis Initial Cmd"/>
		<DO_ITEM Index="237" Name="DO_BoatRAxisHomeCmd" BufferOffset="2241" Addr="D1140.1" Description="Boat Rotation Axis Home Cmd"/>
		<DO_ITEM Index="238" Name="DO_BoatRAxisRotationCmd" BufferOffset="2242" Addr="D1140.2" Description="Boat Rotation Axis Rotation Cmd"/>
		<!--<DO_ITEM Index="239" Name="" BufferOffset="2243" Addr="D1140.3" Description=""/>-->
		<DO_ITEM Index="240" Name="DO_BoatRAxisRotationForward" BufferOffset="2244" Addr="D1140.4" Description="Boat Rotation Axis Rotation Forward"/>
		<DO_ITEM Index="241" Name="DO_BoatRAxisRotationReverse" BufferOffset="2245" Addr="D1140.5" Description="Boat Rotation Axis Rotation Reverse"/>
		<DO_ITEM Index="242" Name="DO_BoatRAxisM0" BufferOffset="2246" Addr="D1140.6" Description="Boat Rotation Axis Rotation M0"/>
		<DO_ITEM Index="243" Name="DO_BoatRAxisM1" BufferOffset="2247" Addr="D1140.7" Description="Boat Rotation Axis Rotation M1"/>
		<DO_ITEM Index="244" Name="DO_BoatRAxisM2" BufferOffset="2248" Addr="D1140.8" Description="Boat Rotation Axis Rotation M2"/>
		<DO_ITEM Index="245" Name="DO_BoatRAxisM3" BufferOffset="2249" Addr="D1140.9" Description="Boat Rotation Axis Rotation M3"/>
		<DO_ITEM Index="246" Name="DO_BoatRAxisM4" BufferOffset="2250" Addr="D1140.10" Description="Boat Rotation Axis Rotation M4"/>
		<DO_ITEM Index="247" Name="DO_BoatRAxisM5" BufferOffset="2251" Addr="D1140.11" Description="Boat Rotation Axis Rotation M5"/>
		<DO_ITEM Index="248" Name="DO_BoatRAxisStop" BufferOffset="2252" Addr="D1140.12" Description="Boat Rotation Axis Stop"/>
		<DO_ITEM Index="249" Name="DO_SpareDBoatRAxis" BufferOffset="2253" Addr="D1140.13" Description="SpareD Boat R Axis"/>
		<DO_ITEM Index="250" Name="DO_SpareEBoatRAxis" BufferOffset="2254" Addr="D1140.14" Description="SpareE Boat R Axis"/>
		<DO_ITEM Index="251" Name="DO_SpareFBoatRAxis" BufferOffset="2255" Addr="D1140.15" Description="SpareF Boat R Axis"/>

		<DO_ITEM Index="252" Name="DO_ServoOnBufferAxis" BufferOffset="2256" Addr="D1141.0" Description="Servo On Buffer Axis"/>
		<DO_ITEM Index="254" Name="DO_MoveCommandBufferAxis" BufferOffset="2257" Addr="D1141.1" Description="Move Command Buffer Axis"/>
		<DO_ITEM Index="256" Name="DO_StopBufferAxis" BufferOffset="2260" Addr="D1141.4" Description="Stop Buffer Axis"/>
		<DO_ITEM Index="257" Name="DO_ResetBufferAxis" BufferOffset="2261" Addr="D1141.5" Description="Reset Buffer Axis"/>

		<DO_ITEM Index="262" Name="DO_SpareABufferAxis" BufferOffset="2266" Addr="D1141.10" Description="SpareA Buffer Axis"/>
		<DO_ITEM Index="263" Name="DO_SpareBBufferAxis" BufferOffset="2267" Addr="D1141.11" Description="SpareB Buffer Axis"/>
		<DO_ITEM Index="264" Name="DO_SpareCBufferAxis" BufferOffset="2268" Addr="D1141.12" Description="SpareC Buffer Axis"/>
		<DO_ITEM Index="265" Name="DO_SpareDBufferAxis" BufferOffset="2269" Addr="D1141.13" Description="SpareD Buffer Axis"/>
		<DO_ITEM Index="266" Name="DO_SpareEBufferAxis" BufferOffset="2270" Addr="D1141.14" Description="SpareE Buffer Axis"/>
		<DO_ITEM Index="267" Name="DO_SpareFBufferAxis" BufferOffset="2271" Addr="D1141.15" Description="SpareF Buffer Axis"/>

		<DO_ITEM Index="270" Name="DO_MoveEnableBoatZAxis" BufferOffset="2272" Addr="D1142.0" Description="Move Enable Boat Z Axis"/>

		<DO_ITEM Index="274" Name="DO_StopBoatZAxis" BufferOffset="2276" Addr="D1142.4" Description="Stop Boat Z Axis"/>
		<DO_ITEM Index="275" Name="DO_ResetBoatZAxis" BufferOffset="2277" Addr="D1142.5" Description="Reset Boat Z Axis"/>
		<DO_ITEM Index="276" Name="DO_ServoOnBoatZAxis" BufferOffset="2278" Addr="D1142.6" Description="ServoOn Boat Z Axis"/>

		<DO_ITEM Index="280" Name="DO_ValveAV9" BufferOffset="2400" Addr="D1150.0"  Description="Valve AV9"/>
		<DO_ITEM Index="281" Name="DO_ValveAV13" BufferOffset="2401" Addr="D1150.1" Description="Valve AV13"/>
		<DO_ITEM Index="282" Name="DO_ValveAV17" BufferOffset="2402" Addr="D1150.2" Description="Valve AV17"/>
		<DO_ITEM Index="283" Name="DO_ValveAV21" BufferOffset="2403" Addr="D1150.3" Description="Valve AV21"/>
		<DO_ITEM Index="284" Name="DO_ValveAV28" BufferOffset="2404" Addr="D1150.4" Description="Valve AV28"/>
		<DO_ITEM Index="285" Name="DO_ValveAV32" BufferOffset="2405" Addr="D1150.5" Description="Valve AV32"/>
		<DO_ITEM Index="286" Name="DO_ValveAV36" BufferOffset="2406" Addr="D1150.6" Description="Valve AV36"/>


		<DO_ITEM Index="287" Name="DO_ValveAV1" BufferOffset="2464" Addr="D1154.0"  Description="Valve AV1"/>
		<DO_ITEM Index="288" Name="DO_ValveAV2" BufferOffset="2465" Addr="D1154.1"  Description="Valve AV2"/>
		<DO_ITEM Index="289" Name="DO_ValveAV3" BufferOffset="2466" Addr="D1154.2"  Description="Valve AV3"/>
		<DO_ITEM Index="290" Name="DO_ValveAV4" BufferOffset="2467" Addr="D1154.3"  Description="Valve AV4"/>
		<DO_ITEM Index="291" Name="DO_ValveAV5" BufferOffset="2468" Addr="D1154.4"  Description="Valve AV5"/>
		<DO_ITEM Index="292" Name="DO_ValveAV6" BufferOffset="2469" Addr="D1154.5"  Description="Valve AV6"/>
		<DO_ITEM Index="293" Name="DO_ValveAV7" BufferOffset="2470" Addr="D1154.6"  Description="Valve AV7"/>
		<DO_ITEM Index="294" Name="DO_ValveAV8" BufferOffset="2471" Addr="D1154.7"  Description="Valve AV8"/>
		<DO_ITEM Index="295" Name="DO_ValveAV33" BufferOffset="2480" Addr="D1155.0" Description="Valve AV33"/>
		<DO_ITEM Index="296" Name="DO_ValveAV10" BufferOffset="2481" Addr="D1155.1" Description="Valve AV10"/>
		<DO_ITEM Index="297" Name="DO_ValveAV11" BufferOffset="2482" Addr="D1155.2" Description="Valve AV11"/>
		<DO_ITEM Index="298" Name="DO_ValveAV12" BufferOffset="2483" Addr="D1155.3" Description="Valve AV12"/>
		<DO_ITEM Index="299" Name="DO_ValveAV34" BufferOffset="2484" Addr="D1155.4" Description="Valve AV34"/>
		<DO_ITEM Index="300" Name="DO_ValveAV14" BufferOffset="2485" Addr="D1155.5" Description="Valve AV14"/>
		<DO_ITEM Index="301" Name="DO_ValveAV15" BufferOffset="2486" Addr="D1155.6" Description="Valve AV15"/>
		<DO_ITEM Index="302" Name="DO_ValveAV16" BufferOffset="2487" Addr="D1155.7" Description="Valve AV16"/>
		<DO_ITEM Index="303" Name="DO_ValveAV35" BufferOffset="2496" Addr="D1156.0" Description="Valve AV35"/>
		<DO_ITEM Index="304" Name="DO_ValveAV18" BufferOffset="2497" Addr="D1156.1" Description="Valve AV18"/>
		<DO_ITEM Index="305" Name="DO_ValveAV19" BufferOffset="2498" Addr="D1156.2" Description="Valve AV19"/>
		<DO_ITEM Index="306" Name="DO_ValveAV20" BufferOffset="2499" Addr="D1156.3" Description="Valve AV20"/>
		<DO_ITEM Index="307" Name="DO_ValveAV37" BufferOffset="2500" Addr="D1156.4" Description="Valve AV37"/>
		<DO_ITEM Index="308" Name="DO_ValveAV22" BufferOffset="2501" Addr="D1156.5" Description="Valve AV22"/>
		<DO_ITEM Index="309" Name="DO_ValveAV23" BufferOffset="2502" Addr="D1156.6" Description="Valve AV23"/>
		<DO_ITEM Index="310" Name="DO_ValveAV24" BufferOffset="2503" Addr="D1156.7" Description="Valve AV24"/>
		<DO_ITEM Index="311" Name="DO_ValveAV25" BufferOffset="2512" Addr="D1157.0" Description="Valve AV25"/>
		<DO_ITEM Index="312" Name="DO_ValveAV26" BufferOffset="2513" Addr="D1157.1" Description="Valve AV26"/>
		<DO_ITEM Index="313" Name="DO_ValveAV27" BufferOffset="2514" Addr="D1157.2" Description="Valve AV27"/>
		<DO_ITEM Index="314" Name="DO_ValveAV38" BufferOffset="2515" Addr="D1157.3" Description="Valve AV38"/>
		<DO_ITEM Index="315" Name="DO_ValveAV29" BufferOffset="2516" Addr="D1157.4" Description="Valve AV29"/>
		<DO_ITEM Index="316" Name="DO_ValveAV30" BufferOffset="2517" Addr="D1157.5" Description="Valve AV30"/>
		<DO_ITEM Index="317" Name="DO_ValveAV31" BufferOffset="2518" Addr="D1157.6" Description="Valve AV31"/>
		<DO_ITEM Index="318" Name="DO_ValveAV39" BufferOffset="2519" Addr="D1157.7" Description="Valve AV39"/>

		<DO_ITEM Index="319" Name="DO_ValveAV99" BufferOffset="2528" Addr="D1158.0" Description="Valve AV99"/>
		<DO_ITEM Index="320" Name="DO_ValveAV101" BufferOffset="2530" Addr="D1158.2" Description="Valve AV101"/>
		<DO_ITEM Index="321" Name="DO_ValveAV102" BufferOffset="2531" Addr="D1158.3" Description="Valve AV102"/>
		<DO_ITEM Index="322" Name="DO_ValveAV103" BufferOffset="2532" Addr="D1158.4" Description="Valve AV103"/>
		<DO_ITEM Index="323" Name="DO_ValveAV104" BufferOffset="2533" Addr="D1158.5" Description="Valve AV104"/>
		<DO_ITEM Index="324" Name="DO_ValveAV105" BufferOffset="2534" Addr="D1158.6" Description="Valve AV105"/>
		<DO_ITEM Index="325" Name="DO_ValveAV106" BufferOffset="2535" Addr="D1158.7" Description="Valve AV106"/>
		<DO_ITEM Index="326" Name="DO_ValveAV107" BufferOffset="2544" Addr="D1159.0" Description="Valve AV107"/>
		<DO_ITEM Index="327" Name="DO_ValveAV108" BufferOffset="2545" Addr="D1159.1" Description="Valve AV108"/>
		<DO_ITEM Index="328" Name="DO_ValveAV110" BufferOffset="2547" Addr="D1159.3" Description="Valve AV110"/>
		<DO_ITEM Index="329" Name="DO_ValveAV111" BufferOffset="2548" Addr="D1159.4" Description="Valve AV111"/>
		<DO_ITEM Index="330" Name="DO_ValveAV112" BufferOffset="2549" Addr="D1159.5" Description="Valve AV112"/>
		<DO_ITEM Index="331" Name="DO_ValveAV113" BufferOffset="2550" Addr="D1159.6" Description="Valve AV113"/>
		<DO_ITEM Index="332" Name="DO_ValveAV114" BufferOffset="2551" Addr="D1159.7" Description="Valve AV114"/>
		<DO_ITEM Index="333" Name="DO_ValveAV115" BufferOffset="2560" Addr="D1160.0" Description="Valve AV115"/>
		<DO_ITEM Index="334" Name="DO_ValveAV116" BufferOffset="2561" Addr="D1160.1" Description="Valve AV116"/>
		<DO_ITEM Index="335" Name="DO_ValveAV117" BufferOffset="2562" Addr="D1160.2" Description="Valve AV117"/>
		<DO_ITEM Index="336" Name="DO_ValveAV118" BufferOffset="2563" Addr="D1160.3" Description="Valve AV118"/>
		<DO_ITEM Index="337" Name="DO_ValveAV119" BufferOffset="2564" Addr="D1160.4" Description="Valve AV119"/>
		<DO_ITEM Index="338" Name="DO_ValveAV120" BufferOffset="2565" Addr="D1160.5" Description="Valve AV120"/>
		<DO_ITEM Index="339" Name="DO_ValveAV121" BufferOffset="2566" Addr="D1160.6" Description="Valve AV121"/>
		<DO_ITEM Index="340" Name="DO_ValveAV122" BufferOffset="2567" Addr="D1160.7" Description="Valve AV122"/>
		<DO_ITEM Index="341" Name="DO_ValveAV123" BufferOffset="2576" Addr="D1161.0" Description="Valve AV123"/>
		<DO_ITEM Index="342" Name="DO_ValveAV124" BufferOffset="2577" Addr="D1161.1" Description="Valve AV124"/>
		<DO_ITEM Index="343" Name="DO_ValveAV125" BufferOffset="2578" Addr="D1161.2" Description="Valve AV125"/>
		<DO_ITEM Index="344" Name="DO_ValveAV131" BufferOffset="2579" Addr="D1161.3" Description="Valve AV131"/>
		<DO_ITEM Index="345" Name="DO_ValveAV134" BufferOffset="2580" Addr="D1161.4" Description="Valve AV134"/>
		<DO_ITEM Index="346" Name="DO_ValveAV133" BufferOffset="2581" Addr="D1161.5" Description="Valve AV133"/>
		<DO_ITEM Index="347" Name="DO_ValveAV136" BufferOffset="2582" Addr="D1161.6" Description="Valve AV136"/>

		<DO_ITEM Index="345" Name="DO_CommonBoxPressureRegulatingCylinderValveOpen" BufferOffset="2592" Addr="D1162.0" Description="Common box pressure regulating cylinder valve open"/>
		<DO_ITEM Index="346" Name="DO_CommonBoxPressureRegulatingCylinderValveClose" BufferOffset="2593" Addr="D1162.1" Description="Common box pressure regulating cylinder valve close"/>
		<DO_ITEM Index="347" Name="DO_FFUAirInValveClose" BufferOffset="2594" Addr="D1162.2" Description="FFU air in valve Close"/>
		<DO_ITEM Index="348" Name="DO_FFUAirInValveOpen" BufferOffset="2595" Addr="D1162.3" Description="FFU air in valve Open"/>
		<DO_ITEM Index="349" Name="DO_LABacksideDoorCylinderControlValveOpen" BufferOffset="2596" Addr="D1162.4" Description="LA backside door cylinder control valve open"/>
		<DO_ITEM Index="350" Name="DO_LABacksideDoorCylinderControlValveClose" BufferOffset="2597" Addr="D1162.5" Description="LA backside door cylinder control valve close"/>
		<DO_ITEM Index="351" Name="DO_LAExhaustValveOpen" BufferOffset="2598" Addr="D1162.6" Description="LA exhaust damper valve open"/>
		<DO_ITEM Index="352" Name="DO_LAExhaustValveClose" BufferOffset="2599" Addr="D1162.7" Description="LA exhaust damper valve close"/>



		<DO_ITEM Index="353" Name="DO_ValveAV60" BufferOffset="2656" Addr="D1166.0" Description="Valve AV60"/>
		<DO_ITEM Index="354" Name="DO_ValveAV68" BufferOffset="2657" Addr="D1166.1" Description="Valve AV68"/>
		<DO_ITEM Index="355" Name="DO_ValveAV72" BufferOffset="2658" Addr="D1166.2" Description="Valve AV72"/>
		<DO_ITEM Index="356" Name="DO_ValveAV74" BufferOffset="2660" Addr="D1166.4" Description="Valve AV74"/>
		<DO_ITEM Index="357" Name="DO_ValveAV75" BufferOffset="2661" Addr="D1166.5" Description="Valve AV75"/>
		<DO_ITEM Index="358" Name="DO_ValveAV77" BufferOffset="2662" Addr="D1166.6" Description="Valve AV77"/>
		<DO_ITEM Index="359" Name="DO_ValveAV78" BufferOffset="2663" Addr="D1166.7" Description="Valve AV78"/>
		<DO_ITEM Index="360" Name="DO_ValveAV80" BufferOffset="2672" Addr="D1167.0" Description="Valve AV80"/>
		<DO_ITEM Index="361" Name="DO_ValveAV81" BufferOffset="2673" Addr="D1167.1" Description="Valve AV81"/>
		<DO_ITEM Index="362" Name="DO_ValveAV85" BufferOffset="2674" Addr="D1167.2" Description="Valve AV85"/>
		<DO_ITEM Index="363" Name="DO_ValveAV86" BufferOffset="2675" Addr="D1167.3" Description="Valve AV86"/>
		<DO_ITEM Index="364" Name="DO_ValveAV87" BufferOffset="2676" Addr="D1167.4" Description="Valve AV87"/>
		<DO_ITEM Index="365" Name="DO_ValveAV88" BufferOffset="2677" Addr="D1167.5" Description="Valve AV88"/>
		<DO_ITEM Index="366" Name="DO_ValveAV91" BufferOffset="2678" Addr="D1167.6" Description="Valve AV91"/>
		<DO_ITEM Index="367" Name="DO_ValveAV92" BufferOffset="2679" Addr="D1167.7" Description="Valve AV92"/>
		<DO_ITEM Index="368" Name="DO_ValveAV71" BufferOffset="2688" Addr="D1168.0" Description="Valve AV71"/>
		<DO_ITEM Index="369" Name="DO_ValveAV82" BufferOffset="2690" Addr="D1168.2" Description="Valve AV82"/>
		<DO_ITEM Index="370" Name="DO_ValveAV83" BufferOffset="2691" Addr="D1168.3" Description="Valve AV83"/>
		<DO_ITEM Index="371" Name="DO_ValveAV93" BufferOffset="2692" Addr="D1168.4" Description="Valve AV93"/>
		<DO_ITEM Index="372" Name="DO_ValveAV54" BufferOffset="2720" Addr="D1170.0" Description="Valve AV54"/>
		<DO_ITEM Index="373" Name="DO_ValveAV55" BufferOffset="2721" Addr="D1170.1" Description="Valve AV55"/>
		<DO_ITEM Index="374" Name="DO_ValveAV56" BufferOffset="2722" Addr="D1170.2" Description="Valve AV56"/>
		<DO_ITEM Index="375" Name="DO_ValveAV57" BufferOffset="2723" Addr="D1170.3" Description="Valve AV57"/>
		<DO_ITEM Index="376" Name="DO_ValveAV58" BufferOffset="2724" Addr="D1170.4" Description="Valve AV58"/>
		<DO_ITEM Index="377" Name="DO_ValveAV59" BufferOffset="2725" Addr="D1170.5" Description="Valve AV59"/>


		<DO_ITEM Index="383" Name="DO_FIMS1N2PurgeValveOpen" BufferOffset="2784" Addr="D1174.0" Description="FIMS1 N2 Purge valve open"/>
		<DO_ITEM Index="384" Name="DO_FIMS1N2PurgeValveClose" BufferOffset="2785" Addr="D1174.1" Description="FIMS1 N2 Purge valve close"/>
		<DO_ITEM Index="385" Name="DO_FIMS2N2PurgeValveOpen" BufferOffset="2786" Addr="D1174.2" Description="FIMS2 N2 Purge valve open"/>
		<DO_ITEM Index="386" Name="DO_FIMS2N2PurgeValveClose" BufferOffset="2787" Addr="D1174.3" Description="FIMS2 N2 Purge valve close"/>

		<DO_ITEM Index="387" Name="DO_FIMS1VaccumValveOpen" BufferOffset="2912" Addr="D1182.0" Description="FIMS1 vaccum valve open"/>
		<DO_ITEM Index="388" Name="DO_FIMS1VaccumValveClose" BufferOffset="2913" Addr="D1182.1" Description="FIMS1 vaccum valve close"/>
		<DO_ITEM Index="389" Name="DO_FIMS2VaccumValveOpen" BufferOffset="2914" Addr="D1182.2" Description="FIMS2 vaccum valve open"/>
		<DO_ITEM Index="390" Name="DO_FIMS2VaccumValveClose" BufferOffset="2915" Addr="D1182.3" Description="FIMS2 vaccum valve close"/>

		<DO_ITEM Index="391" Name="DO_FIMS1Latch1Off" BufferOffset="2976" Addr="D1186.0" Description="FIMS1 Latch1 Off"/>
		<DO_ITEM Index="392" Name="DO_FIMS1Latch1On" BufferOffset="2977" Addr="D1186.1" Description="FIMS1 Latch1 On"/>
		<DO_ITEM Index="393" Name="DO_FIMS1Latch2Off" BufferOffset="2978" Addr="D1186.2" Description="FIMS1 Latch2 Off"/>
		<DO_ITEM Index="394" Name="DO_FIMS1Latch2On" BufferOffset="2979" Addr="D1186.3" Description="FIMS1 Latch2 On"/>
		<DO_ITEM Index="395" Name="DO_FIMS2Latch1Off" BufferOffset="2980" Addr="D1186.4" Description="FIMS2 Latch1 Off"/>
		<DO_ITEM Index="396" Name="DO_FIMS2Latch1On" BufferOffset="2981" Addr="D1186.5" Description="FIMS2 Latch1 On"/>
		<DO_ITEM Index="397" Name="DO_FIMS2Latch2Off" BufferOffset="2982" Addr="D1186.6" Description="FIMS2 Latch2 Off"/>
		<DO_ITEM Index="398" Name="DO_FIMS2Latch2On" BufferOffset="2983" Addr="D1186.7" Description="FIMS2 Latch2 On"/>

		<DO_ITEM Index="399" Name="DO_FIMS1Seal" BufferOffset="2992" Addr="D1187.0" Description="FIMS1 Seal"/>
		<DO_ITEM Index="400" Name="DO_FIMS1Release" BufferOffset="2993" Addr="D1187.1" Description="FIMS1 Release"/>
		<DO_ITEM Index="401" Name="DO_FIMS2Seal" BufferOffset="2994" Addr="D1187.2" Description="FIMS2 Seal"/>
		<DO_ITEM Index="402" Name="DO_FIMS2Release" BufferOffset="2995" Addr="D1187.3" Description="FIMS2 Release"/>
		<DO_ITEM Index="403" Name="DO_FIMS1DoorClose" BufferOffset="2996" Addr="D1187.4" Description="FIMS1 Door Close"/>
		<DO_ITEM Index="404" Name="DO_FIMS1DoorOpen" BufferOffset="2997" Addr="D1187.5" Description="FIMS1 Door Open"/>
		<DO_ITEM Index="405" Name="DO_FIMS2DoorClose" BufferOffset="2998" Addr="D1187.6" Description="FIMS2 Door Close"/>
		<DO_ITEM Index="406" Name="DO_FIMS2DoorOpen" BufferOffset="2999" Addr="D1187.7" Description="FIMS2 Door Open"/>

		<DO_ITEM Index="407" Name="DO_FIMS1CollisionAvoidanceDown" BufferOffset="3008" Addr="D1188.0" Description="FIMS1 Collision Avoidance Down"/>
		<DO_ITEM Index="408" Name="DO_FIMS1CollisionAvoidanceUp" BufferOffset="3009" Addr="D1188.1" Description="FIMS1 Collision Avoidance Up"/>
		<DO_ITEM Index="409" Name="DO_FIMS2CollisionAvoidanceDown" BufferOffset="3010" Addr="D1188.2" Description="FIMS2 Collision Avoidance Down"/>
		<DO_ITEM Index="410" Name="DO_FIMS2CollisionAvoidanceUp" BufferOffset="3011" Addr="D1188.3" Description="FIMS2 Collision Avoidance Up"/>
		<DO_ITEM Index="411" Name="DO_FIMS1Undock" BufferOffset="3012" Addr="D1188.4" Description="FIMS1 Undock"/>
		<DO_ITEM Index="412" Name="DO_FIMS1Dock" BufferOffset="3013" Addr="D1188.5" Description="FIMS1 Dock"/>
		<DO_ITEM Index="413" Name="DO_FIMS2Undock" BufferOffset="3014" Addr="D1188.6" Description="FIMS2 Undock"/>
		<DO_ITEM Index="414" Name="DO_FIMS2Dock" BufferOffset="3015" Addr="D1188.7" Description="FIMS2 Dock"/>

		<DO_ITEM Index="417" Name="DO_FFU1WriteCommand" BufferOffset="3056" Addr="D1191.0" Description="FFU1 write command"/>
		<DO_ITEM Index="418" Name="DO_FFU2WriteCommand" BufferOffset="3057" Addr="D1191.1" Description="FFU2 write command"/>
		<DO_ITEM Index="419" Name="DO_FFU3WriteCommand" BufferOffset="3058" Addr="D1191.2" Description="FFU3 write command"/>
		<DO_ITEM Index="420" Name="DO_FFU4WriteCommand" BufferOffset="3059" Addr="D1191.3" Description="FFU4 write command"/>
		<DO_ITEM Index="421" Name="DO_FFU5WriteCommand" BufferOffset="3060" Addr="D1191.4" Description="FFU5 write command"/>
		<DO_ITEM Index="422" Name="DO_FFU6WriteCommand" BufferOffset="3061" Addr="D1191.5" Description="FFU6 write command"/>
		<DO_ITEM Index="423" Name="DO_FFU7WriteCommand" BufferOffset="3062" Addr="D1191.6" Description="FFU7 write command"/>
		<DO_ITEM Index="424" Name="DO_FFU8WriteCommand" BufferOffset="3063" Addr="D1191.7" Description="FFU8 write command"/>
		<DO_ITEM Index="425" Name="DO_FFU9WriteCommand" BufferOffset="3064" Addr="D1191.8" Description="FFU9 write command"/>

		<DO_ITEM Index="426" Name="DO_HTR1" BufferOffset="3200" Addr="D1200.0" Description="HTR1" />
		<DO_ITEM Index="427" Name="DO_HTR2" BufferOffset="3201" Addr="D1200.1" Description="HTR2" />
		<DO_ITEM Index="428" Name="DO_HTR3" BufferOffset="3202" Addr="D1200.2" Description="HTR3" />
		<DO_ITEM Index="429" Name="DO_CLN" BufferOffset="3203" Addr="D1200.3" Description="CLN (F2 Clean button)" />

		<DO_ITEM Index="3776" Name="DO_FIMS1LoadCommand" BufferOffset="3776" Addr="D1236.0" Description="FIMS1 Load Command"/>
		<DO_ITEM Index="3777" Name="DO_FIMS1UnloadCommand" BufferOffset="3777" Addr="D1236.1" Description="FIMS1 Unload Command"/>
		<DO_ITEM Index="3778" Name="DO_FIMS1HomeCommand" BufferOffset="3778" Addr="D1236.2" Description="FIMS1 Home Command"/>
		<DO_ITEM Index="3779" Name="DO_FIMS1AlarmReset" BufferOffset="3779" Addr="D1236.3" Description="FIMS1 Alarm Reset"/>
		<DO_ITEM Index="3780" Name="DO_FIMS1StopCommand" BufferOffset="3780" Addr="D1236.4" Description="FIMS1 Stop Command"/>
		<DO_ITEM Index="3781" Name="DO_FIMS1N2PurgeBypass" BufferOffset="3781" Addr="D1236.5" Description="FIMS1 N2 Purge Bypass"/>

		<DO_ITEM Index="3792" Name="DO_FIMS2LoadCommand" BufferOffset="3792" Addr="D1237.0" Description="FIMS2 Load Command"/>
		<DO_ITEM Index="3793" Name="DO_FIMS2UnloadCommand" BufferOffset="3793" Addr="D1237.1" Description="FIMS2 Unload Command"/>
		<DO_ITEM Index="3794" Name="DO_FIMS2HomeCommand" BufferOffset="3794" Addr="D1237.2" Description="FIMS2 Home Command"/>
		<DO_ITEM Index="3795" Name="DO_FIMS2AlarmReset" BufferOffset="3795" Addr="D1237.3" Description="FIMS2 Alarm Reset"/>
		<DO_ITEM Index="3796" Name="DO_FIMS2StopCommand" BufferOffset="3796" Addr="D1237.4" Description="FIMS2 Stop Command"/>
		<DO_ITEM Index="3797" Name="DO_FIMS2N2PurgeBypass" BufferOffset="3797" Addr="D1237.5" Description="FIMS2 N2 Purge Bypass"/>

		<DO_ITEM Index="3840" Name="DO_PLCCPUReset" BufferOffset="3840" Addr="D1240.0" Description="PLC CPU Reset"/>
		<DO_ITEM Index="3841" Name="DO_BlowerPowerOn" BufferOffset="3841" Addr="D1240.1" Description="Blower power on/off"/>
		<DO_ITEM Index="3842" Name="DO_LightCurtainBypass" BufferOffset="3842" Addr="D1240.2" Description="Light curtain bypass"/>
		<DO_ITEM Index="3843" Name="DO_FFUAlarmReset" BufferOffset="3843" Addr="D1240.3" Description="FFU Alarm Reset"/>
		<DO_ITEM Index="3844" Name="DO_MINI8AlarmReset" BufferOffset="3844" Addr="D1240.4" Description="MINI 8 Alarm Reset"/>
		<DO_ITEM Index="3845" Name="DO_VGUnitConversion" BufferOffset="3845" Addr="D1240.5" Description="VG Unit Conversion 0:Torr,1:Pa"/>
		<DO_ITEM Index="3846" Name="DO_CleanSwitch" BufferOffset="3846" Addr="D1240.6" Description="Clean Switch"/>

		<DO_ITEM Index="3847" Name="DO_APCAoDataReadSysConfig" BufferOffset="3847" Addr="D1240.7" Description="APC AO DATA READ SYSCONFIG"/>
		<DO_ITEM Index="3848" Name="DO_APCAoDataWriteSysConfig" BufferOffset="3848" Addr="D1240.8" Description="APC AO DATA WRITE SYSCONFIG"/>
		<DO_ITEM Index="3849" Name="DO_APCAoDataReadCusConfig" BufferOffset="3849" Addr="D1240.9" Description="APC DATA READ_CUSCONFIG"/>
		<DO_ITEM Index="3850" Name="DO_APCAoDataWriteCusConfig" BufferOffset="3850" Addr="D1240.10" Description="APC DATA WRITE_CUSCONFIG"/>
		<DO_ITEM Index="3851" Name="DO_GasLineHeaterTempalarm" BufferOffset="3851" Addr="D1240.11" Description="Gas Line Heater Temp alarm"/>
		<DO_ITEM Index="3852" Name="DO_ExhaustLineHeaterTempalarm" BufferOffset="3852" Addr="D1240.12" Description="Exhaust Line Heater  Temp alarm"/>
		<DO_ITEM Index="3853" Name="DO_Abnormalsealcapheatertemp" BufferOffset="3853" Addr="D1240.13" Description="Abnormal seal cap heater temp"/>
		<DO_ITEM Index="3854" Name="DO_exhaustlineheatertemp" BufferOffset="3854" Addr="D1240.14" Description="Exhaust line heater temp"/>
		<DO_ITEM Index="3856" Name="DO_HMNT" BufferOffset="3856" Addr="D1241.0" Description="H MNT"/>
		<DO_ITEM Index="3857" Name="DO_CMNT" BufferOffset="3857" Addr="D1241.1" Description="C MNT"/>
		<DO_ITEM Index="3858" Name="DO_DP1" BufferOffset="3858" Addr="D1241.2" Description="DP1"/>
		<DO_ITEM Index="3859" Name="DO_DP2" BufferOffset="3859" Addr="D1241.3" Description="DP2"/>
		<DO_ITEM Index="3860" Name="DO_BWR" BufferOffset="3860" Addr="D1241.4" Description="BWR"/>
		<DO_ITEM Index="3861" Name="DO_DPR" BufferOffset="3861" Addr="D1241.5" Description="DPR"/>
		<DO_ITEM Index="3863" Name="DO_HREF" BufferOffset="3863" Addr="D1241.7" Description="H.REF"/>
		<DO_ITEM Index="3864" Name="DO_CREF" BufferOffset="3864" Addr="D1241.8" Description="C.REF"/>
		<DO_ITEM Index="3865" Name="DO_HZERO" BufferOffset="3865" Addr="D1241.9" Description="H.ZERO"/>
		<DO_ITEM Index="3866" Name="DO_CZERO" BufferOffset="3866" Addr="D1241.10" Description="C.ZERO"/>
		<DO_ITEM Index="3867" Name="DO_WAT" BufferOffset="3867" Addr="D1241.11" Description="WAT(NO)"/>
		<DO_ITEM Index="3868" Name="DO_CEXH" BufferOffset="3868" Addr="D1241.12" Description="C.EXH"/>
		<DO_ITEM Index="3869" Name="DO_NZERO" BufferOffset="3869" Addr="D1241.13" Description="N.ZERO"/>
		<DO_ITEM Index="3870" Name="DO_MZERO" BufferOffset="3870" Addr="D1241.14" Description="M.ZERO"/>

		<DO_ITEM Index="3871" Name="DO_NDIR" BufferOffset="3871" Addr="D1241.15" Description="NDIR"/>
		<DO_ITEM Index="3872" Name="DO_HMNTAV113" BufferOffset="3872" Addr="D1242.0" Description="HMNT_AV113"/>
		<DO_ITEM Index="3873" Name="DO_HMNTAV131" BufferOffset="3873" Addr="D1242.1" Description="HMNT_AV131"/>
		<DO_ITEM Index="3874" Name="DO_HMNTAV132" BufferOffset="3874" Addr="D1242.2" Description="HMNT_AV132"/>
		<DO_ITEM Index="3875" Name="DO_CMNTAV121" BufferOffset="3875" Addr="D1242.3" Description="CMNT_AV121"/>
		<DO_ITEM Index="3876" Name="DO_CMNTAV134" BufferOffset="3876" Addr="D1242.4" Description="CMNT_AV134"/>
		<DO_ITEM Index="3877" Name="DO_CMNTAV135" BufferOffset="3877" Addr="D1242.5" Description="CMNT_AV135"/>
		<DO_ITEM Index="3878" Name="DO_GASTempOutRangeAlarm" BufferOffset="3878" Addr="D1242.6" Description="GAS Temp out range alarm"/>
		<DO_ITEM Index="3879" Name="DO_EXHAUSTTempOutRangeAlarm" BufferOffset="3879" Addr="D1242.7" Description="EXHAUST Temp out range alarm"/>
		<DO_ITEM Index="3880" Name="DO_MCLNAlarm" BufferOffset="3880" Addr="D1242.8" Description="CLN alarm"/>



		<DO_ITEM Index="4000" Name="DO_SV816ON" BufferOffset="4000" Addr="D1250.0" Description="SV816ON"/>
		<DO_ITEM Index="4001" Name="DO_SV817ON" BufferOffset="4001" Addr="D1250.1" Description="SV817ON"/>
		<DO_ITEM Index="4002" Name="DO_SV818ON" BufferOffset="4002" Addr="D1250.2" Description="SV818ON"/>
		<DO_ITEM Index="4003" Name="DO_SV819ON" BufferOffset="4003" Addr="D1250.3" Description="SV819ON"/>
		<DO_ITEM Index="4016" Name="DO_SV820ON" BufferOffset="4016" Addr="D1251.0" Description="SV820ON"/>
		<DO_ITEM Index="4017" Name="DO_SV821ON" BufferOffset="4017" Addr="D1251.1" Description="SV821ON"/>
		<DO_ITEM Index="4018" Name="DO_SV822ON" BufferOffset="4018" Addr="D1251.2" Description="SV822ON"/>
		<DO_ITEM Index="4019" Name="DO_SV823ON" BufferOffset="4019" Addr="D1251.3" Description="SV823ON"/>
		<DO_ITEM Index="4032" Name="DO_SV824ON" BufferOffset="4032" Addr="D1252.0" Description="SV824ON"/>
		<DO_ITEM Index="4033" Name="DO_SV825ON" BufferOffset="4033" Addr="D1252.1" Description="SV825ON"/>
		<DO_ITEM Index="4034" Name="DO_SV826ON" BufferOffset="4034" Addr="D1252.2" Description="SV826ON"/>
		<DO_ITEM Index="4035" Name="DO_SV827ON" BufferOffset="4035" Addr="D1252.3" Description="SV827ON"/>
		<DO_ITEM Index="4048" Name="DO_SV828ON" BufferOffset="4048" Addr="D1253.0" Description="SV828ON"/>
		<DO_ITEM Index="4049" Name="DO_SV829ON" BufferOffset="4049" Addr="D1253.1" Description="SV829ON"/>
		<DO_ITEM Index="4050" Name="DO_SV830ON" BufferOffset="4050" Addr="D1253.2" Description="SV830ON"/>
		<DO_ITEM Index="4051" Name="DO_SV831ON" BufferOffset="4051" Addr="D1253.3" Description="SV831ON"/>

		<DO_ITEM Index="4160" Name="DO_ValveAV132" BufferOffset="4160" Addr="D1260.0" Description="Valve AV132"/>
		<DO_ITEM Index="4161" Name="DO_ValveAV135" BufferOffset="4161" Addr="D1260.1" Description="Valve AV135"/>


	</Dig_Out>

	<Ana_In>
		<AI_ITEM Index="0" Name="AI_GLBoxPG1Pressure" BufferOffset="0" Addr="D5000" Description="GL box PG1 pressure"/>
		<AI_ITEM Index="1" Name="AI_GLBoxPG2Pressure" BufferOffset="1" Addr="D5002" Description="GL box PG2 pressure"/>
		<AI_ITEM Index="2" Name="AI_GLBoxPG3Pressure" BufferOffset="2" Addr="D5004" Description="GL box PG3 pressure"/>
		<AI_ITEM Index="3" Name="AI_GLBoxPG4Pressure" BufferOffset="3" Addr="D5006" Description="GL box PG4 pressure"/>
		<AI_ITEM Index="4" Name="AI_GLBoxPG5Pressure" BufferOffset="4" Addr="D5008" Description="GL box PG5 pressure"/>
		<AI_ITEM Index="5" Name="AI_GLBoxPG6Pressure" BufferOffset="5" Addr="D5010" Description="GL box PG6 pressure"/>
		<AI_ITEM Index="6" Name="AI_GLBoxPG7Pressure" BufferOffset="6" Addr="D5012" Description="GL box PG7 pressure"/>
		<AI_ITEM Index="7" Name="AI_GLBoxPG8Pressure" BufferOffset="7" Addr="D5014" Description="GL box PG8 pressure"/>

		<AI_ITEM Index="8" Name="AI_GasBoxUpperVG32" BufferOffset="8" Addr="D5016" Description="gas box upper VG32"/>
		<AI_ITEM Index="9" Name="AI_GasBoxUpperVG33" BufferOffset="9" Addr="D5018" Description="gas box upper VG33"/>
		<AI_ITEM Index="24" Name="AI_O2Concentration" BufferOffset="32" Addr="D5064" Description="O2 concentration"/>

		<AI_ITEM Index="40" Name="AI_Tank1Pressure" BufferOffset="40" Addr="D5080" Description="Tank1 Pressure"/>
		<AI_ITEM Index="41" Name="AI_Tank2Pressure" BufferOffset="41" Addr="D5082" Description="Tank2 Pressure"/>

		<AI_ITEM Index="32" Name="AI_HeatingExhaustMS1" BufferOffset="64" Addr="D5128" Description="Heating exhaust MS1"/>
		<AI_ITEM Index="33" Name="AI_GasBoxExhaustMS2" BufferOffset="65" Addr="D5130" Description="gas box exhaust MS2"/>
		<AI_ITEM Index="34" Name="AI_ScavengerExhaustMS3" BufferOffset="66" Addr="D5132" Description="scavenger exhaust MS3"/>
		<AI_ITEM Index="35" Name="AI_ExhaustBoxExhaustMS4" BufferOffset="67" Addr="D5134" Description="exhaust box exhaust MS4"/>
		<AI_ITEM Index="36" Name="AI_LoadingAreaExhaustMS5" BufferOffset="68" Addr="D5136" Description="loading area exhaust MS5"/>
		<!--<AI_ITEM Index="37" Name="AI_FrontBodyExhaustMS6" BufferOffset="69" Addr="D5138" Description="front body exhaust MS6"/>-->
		<AI_ITEM Index="38" Name="AI_CommonExhaustMS7" BufferOffset="70" Addr="D5140" Description="common exhaust MS7"/>
		<AI_ITEM Index="39" Name="AI_LSCUpExhaustMS8" BufferOffset="71" Addr="D5142" Description="LSC-up exhaust MS8"/>
		<AI_ITEM Index="39" Name="AI_LSCUpExhaustMS9" BufferOffset="72" Addr="D5144" Description="LSC-up exhaust MS9"/>
		<AI_ITEM Index="39" Name="AI_LSCDownExhaustMS10" BufferOffset="73" Addr="D5146" Description="LSC-down exhaust MS10"/>

		<AI_ITEM Index="40" Name="AI_PS11Value" BufferOffset="74" Addr="D5148" Description="PS11 Value"/>

		<AI_ITEM Index="48" Name="AI_RHCFlowFL901" BufferOffset="96" Addr="D5192" Description="RHC flow (FL901)"/>
		<AI_ITEM Index="49" Name="AI_CoolingWaterFlowOfFurnaceFL902" BufferOffset="97" Addr="D5194" Description="cooling water flow of furnace (FL902)"/>
		<AI_ITEM Index="50" Name="AI_CoolingWateFlowOfShuttleFL903" BufferOffset="98" Addr="D5196" Description="cooling water flow of shuttle (FL903)"/>
		<AI_ITEM Index="51" Name="AI_CoolingWaterFlowOfBoatRotationFL904" BufferOffset="99" Addr="D5198" Description="cooling water flow of boat rotation (FL904)"/>
		<AI_ITEM Index="52" Name="AI_CoolingWaterFlowOfFlangeFL905" BufferOffset="100" Addr="D5200" Description="cooling water flow of flange (FL905)"/>
		<AI_ITEM Index="53" Name="AI_CoolingWaterFlowOfLoadingAreaFL906" BufferOffset="101" Addr="D5202" Description="cooling water flow of loading area (FL906)"/>
		<AI_ITEM Index="54" Name="AI_WaterFlowREV" BufferOffset="102" Addr="D5204" Description="water flow REV."/>
		<AI_ITEM Index="55" Name="AI_PS13AnalogValue" BufferOffset="103" Addr="D5206" Description="PS13 analog value"/>

		<AI_ITEM Index="55" Name="AI_VG21Pressure" BufferOffset="104" Addr="D5208" Description="VG21 pressure"/>
		<AI_ITEM Index="56" Name="AI_DG1Pressure" BufferOffset="105" Addr="D5210" Description="DG1 pressure"/>
		<AI_ITEM Index="57" Name="AI_PG12Pressure" BufferOffset="106" Addr="D5212" Description="PG12 pressure"/>
		<AI_ITEM Index="58" Name="AI_PG13Pressure" BufferOffset="107" Addr="D5214" Description="PG13 pressure"/>
		<AI_ITEM Index="58" Name="AI_PS14Pressure" BufferOffset="109" Addr="D5218" Description="PS14 pressure"/>

		<!--<AI_ITEM Index="71" Name="AI_RFGeneratorRelfectionPower" BufferOffset="160" Addr="D5320" Description="RF generator relfection power"/>
		<AI_ITEM Index="72" Name="AI_RFGeneratorForwardPower" BufferOffset="161" Addr="D5322" Description="RF generator forward power"/>
		<AI_ITEM Index="73" Name="AI_MatchingUnitVppMonitor" BufferOffset="162" Addr="D5324" Description="Matching unit Vpp monitor"/>
		<AI_ITEM Index="74" Name="AI_MatchingUnitVdcMonitor" BufferOffset="163" Addr="D5326" Description="Matching unit Vdc monitor"/>
		<AI_ITEM Index="75" Name="AI_MatchingUnitLoadPosition" BufferOffset="164" Addr="D5328" Description="Matching unit load position"/>
		<AI_ITEM Index="76" Name="AI_MatchingUnitPhasePosition" BufferOffset="165" Addr="D5330" Description="Matching unit phase position"/>-->

		<AI_ITEM Index="79" Name="AI_N24PurgePressure" BufferOffset="192" Addr="D5384" Description="N2-4 purge pressure"/>
		<AI_ITEM Index="80" Name="AI_N25PurgePressure" BufferOffset="193" Addr="D5386" Description="N2-5 purge pressure"/>
		<AI_ITEM Index="81" Name="AI_N26PurgePressure" BufferOffset="194" Addr="D5388" Description="N2-6 purge pressure"/>
		<AI_ITEM Index="82" Name="AI_N27PurgePressure" BufferOffset="195" Addr="D5390" Description="N2-7 purge pressure"/>
		<!--<AI_ITEM Index="83" Name="AI_PS17Value" BufferOffset="196" Addr="D5392" Description="PS17 Value"/>-->
		<AI_ITEM Index="84" Name="AI_N28PurgePressure" BufferOffset="197" Addr="D5394" Description="N2-8 purge pressuree"/>

		<AI_ITEM Index="87" Name="AI_BufferTargetPosFb" BufferOffset="320" Addr="D5640" Description="Buffer Target Pos Fb"/>
		<AI_ITEM Index="88" Name="AI_BufferMotionErrID" BufferOffset="321" Addr="D5642" Description="Buffer Motio Err ID"/>
		<AI_ITEM Index="93" Name="AI_BufferDriverErrCode" BufferOffset="326" Addr="D5652" Description="Buffer Driver Err Code"/>
		<AI_ITEM Index="94" Name="AI_BufferMotorPositionFb" BufferOffset="327" Addr="D5654" Description="Buffer Motor Position Fb"/>
		<AI_ITEM Index="95" Name="AI_BufferMotorTorqueFb" BufferOffset="328" Addr="D5656" Description="Buffer Motor Torque Fb"/>
		<AI_ITEM Index="96" Name="AI_BufferMotorSpeedFb" BufferOffset="329" Addr="D5658" Description="Buffer Motor Speed Fb"/>

		<AI_ITEM Index="98" Name="AI_BoatTargetPosFb" BufferOffset="330" Addr="D5660" Description="Bozt Z Target Pos Fb"/>
		<AI_ITEM Index="99" Name="AI_BoatMotioErrID" BufferOffset="331" Addr="D5662" Description="Bozt Z Motio Err ID"/>
		<AI_ITEM Index="104" Name="AI_BoatDriverErrCode" BufferOffset="336" Addr="D5672" Description="Bozt Z Driver Err Code"/>
		<AI_ITEM Index="105" Name="AI_BoatMotorPositionFeedback" BufferOffset="337" Addr="D5674" Description="Boat Motor Position Feedback"/>
		<AI_ITEM Index="106" Name="AI_BoatMotorTorqueFeedback" BufferOffset="338" Addr="D5676" Description="Boat Motor Torque Feedback"/>
		<AI_ITEM Index="107" Name="AI_BoatMotorSpeedFb" BufferOffset="339" Addr="D5678" Description="Bozt Z Motor Speed Fb"/>


		<AI_ITEM Index="109" Name="AI_VG11Pressure" BufferOffset="340" Addr="D5680" Description="VG11 Pressure"/>
		<AI_ITEM Index="111" Name="AI_VG12Pressure" BufferOffset="341" Addr="D5682" Description="VG12 Pressure"/>
		<AI_ITEM Index="113" Name="AI_VG13Pressure" BufferOffset="342" Addr="D5684" Description="VG13 Pressure"/>
		<AI_ITEM Index="117" Name="AI_VG32Pressure" BufferOffset="344" Addr="D5688" Description="VG32 Pressure"/>
		<AI_ITEM Index="119" Name="AI_VG33Pressure" BufferOffset="345" Addr="D5690" Description="VG33 Pressure"/>


		<AI_ITEM Index="120" Name="AI_FFU1GroupNumber" BufferOffset="350" Addr="D5700" Description="FFU1 group number"/>
		<AI_ITEM Index="121" Name="AI_FFU1AddressNumber" BufferOffset="351" Addr="D5702" Description="FFU1 Address Number"/>
		<AI_ITEM Index="122" Name="AI_FFU1Switch" BufferOffset="352" Addr="D5704" Description="FFU1 switch"/>
		<AI_ITEM Index="123" Name="AI_FFU1SetSpeed" BufferOffset="353" Addr="D5706" Description="FFU1 Set speed"/>
		<AI_ITEM Index="124" Name="AI_FFU1MaxSpeed" BufferOffset="354" Addr="D5708" Description="FFU1 Max speed"/>
		<AI_ITEM Index="125" Name="AI_FFU1Reset" BufferOffset="355" Addr="D5710" Description="FFU1 Maximum speed reset"/>
		<AI_ITEM Index="126" Name="AI_FFU1ErrorTimer" BufferOffset="356" Addr="D5712" Description="FFU1 Error Timer"/>
		<AI_ITEM Index="127" Name="AI_FFU1CurrentSpeed" BufferOffset="357" Addr="D5714" Description="FFU1 Current speed"/>
		<AI_ITEM Index="128" Name="AI_FFU1Voltage" BufferOffset="358" Addr="D5716" Description="FFU1 voltage"/>
		<AI_ITEM Index="129" Name="AI_FFU1Current" BufferOffset="359" Addr="D5718" Description="FFU1 current"/>

		<AI_ITEM Index="131" Name="AI_FFU2GroupNumber" BufferOffset="360" Addr="D5720" Description="FFU2 group number"/>
		<AI_ITEM Index="132" Name="AI_FFU2AddressNumber" BufferOffset="361" Addr="D5722" Description="FFU2 Address Number"/>
		<AI_ITEM Index="133" Name="AI_FFU2Switch" BufferOffset="362" Addr="D5724" Description="FFU2 switch"/>
		<AI_ITEM Index="134" Name="AI_FFU2SetSpeed" BufferOffset="363" Addr="D5726" Description="FFU2 Set speed"/>
		<AI_ITEM Index="135" Name="AI_FFU2MaxSpeed" BufferOffset="364" Addr="D5728" Description="FFU2 Max speed"/>
		<AI_ITEM Index="136" Name="AI_FFU2Reset" BufferOffset="365" Addr="D5730" Description="FFU2 Maximum speed reset"/>
		<AI_ITEM Index="137" Name="AI_FFU2ErrorTimer" BufferOffset="366" Addr="D5732" Description="FFU2 Error Timer"/>
		<AI_ITEM Index="138" Name="AI_FFU2CurrentSpeed" BufferOffset="367" Addr="D5734" Description="FFU2 Current speed"/>
		<AI_ITEM Index="139" Name="AI_FFU2Voltage" BufferOffset="368" Addr="D5736" Description="FFU2 voltage"/>
		<AI_ITEM Index="140" Name="AI_FFU2Current" BufferOffset="369" Addr="D5738" Description="FFU2 current"/>

		<AI_ITEM Index="142" Name="AI_FFU3GroupNumber" BufferOffset="370" Addr="D5740" Description="FFU3 group number"/>
		<AI_ITEM Index="143" Name="AI_FFU3AddressNumber" BufferOffset="371" Addr="D5742" Description="FFU3 Address Number"/>
		<AI_ITEM Index="144" Name="AI_FFU3Switch" BufferOffset="372" Addr="D5744" Description="FFU3 switch"/>
		<AI_ITEM Index="145" Name="AI_FFU3SetSpeed" BufferOffset="373" Addr="D5746" Description="FFU3 Set speed"/>
		<AI_ITEM Index="146" Name="AI_FFU3MaxSpeed" BufferOffset="374" Addr="D5748" Description="FFU3 Max speed"/>
		<AI_ITEM Index="147" Name="AI_FFU3Reset" BufferOffset="375" Addr="D5750" Description="FFU3 Maximum speed reset"/>
		<AI_ITEM Index="148" Name="AI_FFU3ErrorTimer" BufferOffset="376" Addr="D5752" Description="FFU3 Error Timer"/>
		<AI_ITEM Index="149" Name="AI_FFU3CurrentSpeed" BufferOffset="377" Addr="D5754" Description="FFU3 Current speed"/>
		<AI_ITEM Index="150" Name="AI_FFU3Voltage" BufferOffset="378" Addr="D5756" Description="FFU3 voltage"/>
		<AI_ITEM Index="151" Name="AI_FFU3Current" BufferOffset="379" Addr="D5758" Description="FFU3 current"/>

		<AI_ITEM Index="153" Name="AI_FFU4GroupNumber" BufferOffset="380" Addr="D5760" Description="FFU4 group number"/>
		<AI_ITEM Index="154" Name="AI_FFU4AddressNumber" BufferOffset="381" Addr="D5762" Description="FFU4 Address Number"/>
		<AI_ITEM Index="155" Name="AI_FFU4Switch" BufferOffset="382" Addr="D5764" Description="FFU4 switch"/>
		<AI_ITEM Index="156" Name="AI_FFU4SetSpeed" BufferOffset="383" Addr="D5766" Description="FFU4 Set speed"/>
		<AI_ITEM Index="157" Name="AI_FFU4MaxSpeed" BufferOffset="384" Addr="D5768" Description="FFU4 Max speed"/>
		<AI_ITEM Index="158" Name="AI_FFU4Reset" BufferOffset="385" Addr="D5770" Description="FFU4 Maximum speed reset"/>
		<AI_ITEM Index="159" Name="AI_FFU4ErrorTimer" BufferOffset="386" Addr="D5772" Description="FFU4 Error Timer"/>
		<AI_ITEM Index="160" Name="AI_FFU4CurrentSpeed" BufferOffset="387" Addr="D5774" Description="FFU4 Current speed"/>
		<AI_ITEM Index="161" Name="AI_FFU4Voltage" BufferOffset="388" Addr="D5776" Description="FFU4 voltage"/>
		<AI_ITEM Index="162" Name="AI_FFU4Current" BufferOffset="389" Addr="D5778" Description="FFU4 current"/>

		<AI_ITEM Index="164" Name="AI_FFU5GroupNumber" BufferOffset="390" Addr="D5780" Description="FFU5 group number"/>
		<AI_ITEM Index="165" Name="AI_FFU5AddressNumber" BufferOffset="391" Addr="D5782" Description="FFU5 Address Number"/>
		<AI_ITEM Index="166" Name="AI_FFU5Switch" BufferOffset="392" Addr="D5784" Description="FFU5 switch"/>
		<AI_ITEM Index="167" Name="AI_FFU5SetSpeed" BufferOffset="393" Addr="D5786" Description="FFU5 Set speed"/>
		<AI_ITEM Index="168" Name="AI_FFU5MaxSpeed" BufferOffset="394" Addr="D5788" Description="FFU5 Max speed"/>
		<AI_ITEM Index="169" Name="AI_FFU5Reset" BufferOffset="395" Addr="D5790" Description="FFU5 Maximum speed reset"/>
		<AI_ITEM Index="170" Name="AI_FFU5ErrorTimer" BufferOffset="396" Addr="D5792" Description="FFU5 Error Timer"/>
		<AI_ITEM Index="171" Name="AI_FFU5CurrentSpeed" BufferOffset="397" Addr="D5794" Description="FFU5 Current speed"/>
		<AI_ITEM Index="172" Name="AI_FFU5Voltage" BufferOffset="398" Addr="D5796" Description="FFU5 voltage"/>
		<AI_ITEM Index="173" Name="AI_FFU5Current" BufferOffset="399" Addr="D5798" Description="FFU5 current"/>

		<AI_ITEM Index="175" Name="AI_FFU6GroupNumber" BufferOffset="400" Addr="D5800" Description="FFU6 group number"/>
		<AI_ITEM Index="176" Name="AI_FFU6AddressNumber" BufferOffset="401" Addr="D5802" Description="FFU6 Address Number"/>
		<AI_ITEM Index="177" Name="AI_FFU6Switch" BufferOffset="402" Addr="D5804" Description="FFU6 switch"/>
		<AI_ITEM Index="178" Name="AI_FFU6SetSpeed" BufferOffset="403" Addr="D5806" Description="FFU6 Set speed"/>
		<AI_ITEM Index="179" Name="AI_FFU6MaxSpeed" BufferOffset="404" Addr="D5808" Description="FFU6 Max speed"/>
		<AI_ITEM Index="180" Name="AI_FFU6Reset" BufferOffset="405" Addr="D5810" Description="FFU6 Maximum speed reset"/>
		<AI_ITEM Index="181" Name="AI_FFU6ErrorTimer" BufferOffset="406" Addr="D5812" Description="FFU6 Error Timer"/>
		<AI_ITEM Index="182" Name="AI_FFU6CurrentSpeed" BufferOffset="407" Addr="D5814" Description="FFU6 Current speed"/>
		<AI_ITEM Index="183" Name="AI_FFU6Voltage" BufferOffset="408" Addr="D5816" Description="FFU6 voltage"/>
		<AI_ITEM Index="184" Name="AI_FFU6Current" BufferOffset="409" Addr="D5818" Description="FFU6 current"/>

		<AI_ITEM Index="186" Name="AI_FFU7GroupNumber" BufferOffset="410" Addr="D5820" Description="FFU7 group number"/>
		<AI_ITEM Index="187" Name="AI_FFU7AddressNumber" BufferOffset="411" Addr="D5822" Description="FFU7 Address Number"/>
		<AI_ITEM Index="188" Name="AI_FFU7Switch" BufferOffset="412" Addr="D5824" Description="FFU7 switch"/>
		<AI_ITEM Index="189" Name="AI_FFU7SetSpeed" BufferOffset="413" Addr="D5826" Description="FFU7 Set speed"/>
		<AI_ITEM Index="190" Name="AI_FFU7MaxSpeed" BufferOffset="414" Addr="D5828" Description="FFU7 Max speed"/>
		<AI_ITEM Index="191" Name="AI_FFU7Reset" BufferOffset="415" Addr="D5830" Description="FFU7 Maximum speed reset"/>
		<AI_ITEM Index="192" Name="AI_FFU7ErrorTimer" BufferOffset="416" Addr="D5832" Description="FFU7 Error Timer"/>
		<AI_ITEM Index="193" Name="AI_FFU7CurrentSpeed" BufferOffset="417" Addr="D5834" Description="FFU7 Current speed"/>
		<AI_ITEM Index="194" Name="AI_FFU7Voltage" BufferOffset="418" Addr="D5836" Description="FFU7 voltage"/>
		<AI_ITEM Index="195" Name="AI_FFU7Current" BufferOffset="419" Addr="D5838" Description="FFU7 current"/>

		<AI_ITEM Index="197" Name="AI_FFU8GroupNumber" BufferOffset="420" Addr="D5840" Description="FFU8 group number"/>
		<AI_ITEM Index="198" Name="AI_FFU8AddressNumber" BufferOffset="421" Addr="D5842" Description="FFU8 Address Number"/>
		<AI_ITEM Index="199" Name="AI_FFU8Switch" BufferOffset="422" Addr="D5844" Description="FFU8 switch"/>
		<AI_ITEM Index="200" Name="AI_FFU8SetSpeed" BufferOffset="423" Addr="D5846" Description="FFU8 Set speed"/>
		<AI_ITEM Index="201" Name="AI_FFU8MaxSpeed" BufferOffset="424" Addr="D5848" Description="FFU8 Max speed"/>
		<AI_ITEM Index="202" Name="AI_FFU8Reset" BufferOffset="425" Addr="D5850" Description="FFU8 Maximum speed reset"/>
		<AI_ITEM Index="203" Name="AI_FFU8ErrorTimer" BufferOffset="426" Addr="D5852" Description="FFU8 Error Timer"/>
		<AI_ITEM Index="204" Name="AI_FFU8CurrentSpeed" BufferOffset="427" Addr="D5854" Description="FFU8 Current speed"/>
		<AI_ITEM Index="205" Name="AI_FFU8Voltage" BufferOffset="428" Addr="D5856" Description="FFU8 voltage"/>
		<AI_ITEM Index="206" Name="AI_FFU8Current" BufferOffset="429" Addr="D5858" Description="FFU8 current"/>

		<AI_ITEM Index="207" Name="AI_FFU9GroupNumber" BufferOffset="430" Addr="D5860" Description="FFU9 group number"/>
		<AI_ITEM Index="208" Name="AI_FFU9AddressNumber" BufferOffset="431" Addr="D5862" Description="FFU9 Address Number"/>
		<AI_ITEM Index="209" Name="AI_FFU9Switch" BufferOffset="432" Addr="D5864" Description="FFU9 switch"/>
		<AI_ITEM Index="210" Name="AI_FFU9SetSpeed" BufferOffset="433" Addr="D5866" Description="FFU9 Set speed"/>
		<AI_ITEM Index="211" Name="AI_FFU9MaxSpeed" BufferOffset="434" Addr="D5868" Description="FFU9 Max speed"/>
		<AI_ITEM Index="212" Name="AI_FFU9Reset" BufferOffset="435" Addr="D5870" Description="FFU9 Maximum speed reset"/>
		<AI_ITEM Index="213" Name="AI_FFU9ErrorTimer" BufferOffset="436" Addr="D5872" Description="FFU9 Error Timer"/>
		<AI_ITEM Index="214" Name="AI_FFU9CurrentSpeed" BufferOffset="437" Addr="D5874" Description="FFU9 Current speed"/>
		<AI_ITEM Index="215" Name="AI_FFU9Voltage" BufferOffset="438" Addr="D5876" Description="FFU9 voltage"/>
		<AI_ITEM Index="216" Name="AI_FFU9Current" BufferOffset="439" Addr="D5878" Description="FFU9 current"/>

		<AI_ITEM Index="218" Name="AI_MFC1AirFlowPV" BufferOffset="450" Addr="D5900" Description="MFC1 air flow PV"/>
		<AI_ITEM Index="219" Name="AI_MFC2AirFlowPV" BufferOffset="451" Addr="D5902" Description="MFC2 air flow PV"/>
		<AI_ITEM Index="220" Name="AI_MFC3AirFlowPV" BufferOffset="452" Addr="D5904" Description="MFC3 air flow PV"/>
		<AI_ITEM Index="221" Name="AI_MFC4AirFlowPV" BufferOffset="453" Addr="D5906" Description="MFC4 air flow PV"/>
		<AI_ITEM Index="222" Name="AI_MFC5AirFlowPV" BufferOffset="454" Addr="D5908" Description="MFC5 air flow PV"/>
		<AI_ITEM Index="223" Name="AI_MFC6AirFlowPV" BufferOffset="455" Addr="D5910" Description="MFC6 air flow PV"/>
		<AI_ITEM Index="224" Name="AI_MFC7AirFlowPV" BufferOffset="456" Addr="D5912" Description="MFC7 air flow PV"/>
		<AI_ITEM Index="225" Name="AI_MFC8AirFlowPV" BufferOffset="457" Addr="D5914" Description="MFC8 air flow PV"/>
		<AI_ITEM Index="226" Name="AI_MFC9AirFlowPV" BufferOffset="458" Addr="D5916" Description="MFC9 air flow PV"/>
		<AI_ITEM Index="227" Name="AI_MFC10AirFlowPV" BufferOffset="459" Addr="D5918" Description="MFC10 air flow PV"/>
		<AI_ITEM Index="228" Name="AI_MFC11AirFlowPV" BufferOffset="460" Addr="D5920" Description="MFC11 air flow PV"/>
		<AI_ITEM Index="229" Name="AI_MFC12AirFlowPV" BufferOffset="461" Addr="D5922" Description="MFC12 air flow PV"/>
		<AI_ITEM Index="230" Name="AI_MFC51AirFlowPV" BufferOffset="462" Addr="D5924" Description="MFC51 air flow PV"/>
		<AI_ITEM Index="231" Name="AI_MFM57AirFlowPV" BufferOffset="463" Addr="D5926" Description="MFM57 air flow PV"/>

		<AI_ITEM Index="300" Name="AI_MFC13AirFlowPV"  BufferOffset="464" Addr="D5928" Description="MFC13 air flow PV"/>
		<AI_ITEM Index="301" Name="AI_MFC16AirFlowPV"  BufferOffset="465" Addr="D5930" Description="MFC16 air flow PV"/>
		<AI_ITEM Index="302" Name="AI_MFC17AirFlowPV"  BufferOffset="466" Addr="D5932" Description="MFC17 air flow PV"/>

		<AI_ITEM Index="303" Name="AI_MFM6AirFlowPV"  BufferOffset="467" Addr="D5934" Description="MFM6 air flow PV"/>
		<AI_ITEM Index="304" Name="AI_MFM7AirFlowPV"  BufferOffset="468" Addr="D5936" Description="MFM7 air flow PV"/>
		<AI_ITEM Index="305" Name="AI_MFM8AirFlowPV"  BufferOffset="469" Addr="D5938" Description="MFM8 air flow PV"/>
		<AI_ITEM Index="306" Name="AI_MFM9AirFlowPV"  BufferOffset="470" Addr="D5940" Description="MFM9 air flow PV"/>
		<AI_ITEM Index="307" Name="AI_MFM11AirFlowPV"  BufferOffset="471" Addr="D5942" Description="MFM11 air flow PV"/>
		<AI_ITEM Index="306" Name="AI_MFM12AirFlowPV"  BufferOffset="472" Addr="D5944" Description="MFM12 air flow PV"/>
		<AI_ITEM Index="307" Name="AI_MFM13AirFlowPV"  BufferOffset="473" Addr="D5946" Description="MFM13 air flow PV"/>
		<AI_ITEM Index="306" Name="AI_MFM16AirFlowPV"  BufferOffset="474" Addr="D5948" Description="MFM16 air flow PV"/>
		<AI_ITEM Index="307" Name="AI_LSC1AirFlowPV"  BufferOffset="475" Addr="D5950" Description="LSC1 air flow PV"/>
		<AI_ITEM Index="306" Name="AI_LSC2AirFlowPV"  BufferOffset="476" Addr="D5952" Description="LSC2 air flow PV"/>




		<AI_ITEM Index="1167" Name="AI_APCValueSensorInput1" BufferOffset="2000" Addr="D9000" Description="APC Value sensor input1 (p1)"/>
		<AI_ITEM Index="1167" Name="AI_APCValueSensorInput2" BufferOffset="2001" Addr="D9002" Description="APC Value sensor input1 (p2)"/>
		<AI_ITEM Index="1167" Name="AI_APCSelectController" BufferOffset="2002" Addr="D9004" Description="Select controller"/>
		<AI_ITEM Index="1167" Name="AI_APCPositionActualValue" BufferOffset="2003" Addr="D9006" Description="APC Position actual value"/>
		<AI_ITEM Index="1167" Name="AI_APCControlModeStatus" BufferOffset="2004" Addr="D9008" Description="APC Control mode status"/>
		<AI_ITEM Index="1167" Name="AI_APCHomeStatus" BufferOffset="2005" Addr="D9010" Description="APC HOME status"/>
		<AI_ITEM Index="1167" Name="AI_APCWarningStatus1" BufferOffset="2006" Addr="D9012" Description="Active Device Warning Details (Device Management)"/>
		<AI_ITEM Index="1167" Name="AI_APCWarningStatus2" BufferOffset="2007" Addr="D9014" Description="Active Device Warning Details (Sensor Input1)"/>
		<AI_ITEM Index="1167" Name="AI_APCWarningStatus3" BufferOffset="2008" Addr="D9016" Description="Active Device Warning Details (Sensor Input2)"/>
		<AI_ITEM Index="1167" Name="AI_APCWarningStatus4" BufferOffset="2009" Addr="D9018" Description="Active Device Warning Details (Process Controller Selector)"/>
		<AI_ITEM Index="1167" Name="AI_APCWarningStatus5" BufferOffset="2010" Addr="D9020" Description="Active Device Warning Details (Valve)"/>
		<AI_ITEM Index="1167" Name="AI_APCWarningStatus6" BufferOffset="2011" Addr="D9022" Description="Active manufacturer Warning Details (Valve)"/>
		<AI_ITEM Index="1167" Name="AI_APCErrorStatus1" BufferOffset="2012" Addr="D9024" Description="Active manufacturer Error Details (Device Management)"/>
		<AI_ITEM Index="1167" Name="AI_APCErrorStatus2" BufferOffset="2013" Addr="D9026" Description="Active manufacturer Error Details(Sensor Input1)"/>
		<AI_ITEM Index="1167" Name="AI_APCErrorStatus3" BufferOffset="2014" Addr="D9028" Description="Active manufacturer Error Details (Sensor Input2)"/>
		<AI_ITEM Index="1167" Name="AI_APCErrorStatus4" BufferOffset="2015" Addr="D9030" Description="Active manufacturer Error Details (Valve)"/>

		<AI_ITEM Index="1166" Name="AI_APCZeroResetP1" BufferOffset="2016" Addr="D9032" Description="Zero Reset P1 (0:NO OPERATION,1:ADJUST)"/>
		<AI_ITEM Index="1166" Name="AI_APCZeroAdjustP1" BufferOffset="2017" Addr="D9034" Description="Zero adjust P1 (0:NO OPERATION,1:ADJUST)"/>
		<AI_ITEM Index="1166" Name="AI_APCSpanAdjustP1" BufferOffset="2018" Addr="D9036" Description="Span adjust P1 (0:NO OPERATION,1:ADJUST)"/>
		<AI_ITEM Index="1166" Name="AI_APCZeroResetP2" BufferOffset="2019" Addr="D9038" Description="Zero Reset P2 (0:NO OPERATION,1:ADJUST)"/>
		<AI_ITEM Index="1166" Name="AI_APCZeroAdjustP2" BufferOffset="2020" Addr="D9040" Description="Zero adjust P2 (0:NO OPERATION,1:ADJUST)"/>
		<AI_ITEM Index="1166" Name="AI_APCSpanAdjustP2" BufferOffset="2021" Addr="D9042" Description="Span adjust P2 (0:NO OPERATION,1:ADJUST)"/>
		<AI_ITEM Index="1166" Name="AI_APCSlowVacuumTargetPressure" BufferOffset="2022" Addr="D9044" Description="Slow vacuum control target vacuum pressure"/>
		<AI_ITEM Index="1166" Name="AI_APCValveStatusThreshold" BufferOffset="2023" Addr="D9046" Description="Valve status threshold(0.36~17.86)"/>
		<AI_ITEM Index="1166" Name="AI_APCForbidInterlockOutbreak" BufferOffset="2024" Addr="D9048" Description="Forbid interlock outbreak(0:enable,1:disable)"/>
		<AI_ITEM Index="1166" Name="AI_APCSlowVacuumModeSetting" BufferOffset="2025" Addr="D9050" Description="Slow vacuum mode setting(0:normal,1:short)"/>
		<AI_ITEM Index="1166" Name="AI_APCInterlock1" BufferOffset="2026" Addr="D9052" Description="Interlock1"/>
		<AI_ITEM Index="1166" Name="AI_APCInterlock2" BufferOffset="2027" Addr="D9054" Description="Interlock2"/>
		<AI_ITEM Index="1166" Name="AI_APCInterlock3" BufferOffset="2028" Addr="D9056" Description="Interlock3"/>
		<AI_ITEM Index="1166" Name="AI_APCInterlockConstantOfInterlock3" BufferOffset="2029" Addr="D9058" Description="Interlock constant of interlock3"/>
		<AI_ITEM Index="1166" Name="AI_APCP1SensorOffsetSetting" BufferOffset="2030" Addr="D9060" Description="P1 sensor offset setting"/>
		<AI_ITEM Index="1166" Name="AI_APCPosMonOffsetSetting" BufferOffset="2031" Addr="D9062" Description="Pos mon offset setting"/>
		<AI_ITEM Index="1166" Name="AI_APCSensorAdjustReset" BufferOffset="2032" Addr="D9064" Description="Sensor adjust reset"/>
		<AI_ITEM Index="1166" Name="AI_APCSlowVacuumRate" BufferOffset="2033" Addr="D9066" Description="Slow vacuum rate"/>
		<AI_ITEM Index="1166" Name="AI_APCSlowVacuumP" BufferOffset="2034" Addr="D9068" Description="P constant for slow vacuum control"/>
		<AI_ITEM Index="1166" Name="AI_APCSlowVacuumI" BufferOffset="2035" Addr="D9070" Description="I constant for slow vacuum control"/>
		<AI_ITEM Index="1166" Name="AI_APCSlowVacuumD" BufferOffset="2036" Addr="D9072" Description="D constant for slow vacuum control"/>
		<AI_ITEM Index="1166" Name="AI_APCSlowVacuumA" BufferOffset="2037" Addr="D9074" Description="a(sensor differential) constant for slow vacuum control "/>
		<AI_ITEM Index="1166" Name="AI_APCControllerModeSelect" BufferOffset="2038" Addr="D9076" Description="controller mode select(1~10分别代表Controller1-10)"/>
		<AI_ITEM Index="1166" Name="AI_APCSpecifyTargetVacuumPressureControl" BufferOffset="2039" Addr="D9078" Description="Specify target vacuum pressure control"/>
		<AI_ITEM Index="1166" Name="AI_APCSpecifyTargetOpeningForValveOpeningControl" BufferOffset="2040" Addr="D9080" Description="Specify target opening for valve opening control"/>
		<AI_ITEM Index="1166" Name="AI_APCSpecifyControlMode" BufferOffset="2041" Addr="D9082" Description="Specify control mode"/>
		<AI_ITEM Index="1166" Name="AI_APCRangeUpperLimitSensorInput" BufferOffset="2042" Addr="D9084" Description="Range Upper Limit Sensor Input 1(默认3）"/>

		<AI_ITEM Index="1166" Name="AI_APCController1P" BufferOffset="2045" Addr="D9090" Description="Controller 1 P"/>
		<AI_ITEM Index="1166" Name="AI_APCController1I" BufferOffset="2046" Addr="D9092" Description="Controller 1 I"/>
		<AI_ITEM Index="1166" Name="AI_APCController1D" BufferOffset="2047" Addr="D9094" Description="Controller 1 D"/>
		<AI_ITEM Index="1166" Name="AI_APCController1A" BufferOffset="2048" Addr="D9096" Description="Controller 1 A"/>
		<AI_ITEM Index="1166" Name="AI_APCController1CH" BufferOffset="2049" Addr="D9098" Description="CH(air pressure exhaust threshold value 1) for Process Controller 1"/>
		<AI_ITEM Index="1166" Name="AI_APCController1CL" BufferOffset="2050" Addr="D9100" Description="CL(air pressure exhaust threshold value 2) for Process Controller 1"/>
		<AI_ITEM Index="1166" Name="AI_APCController1Offset" BufferOffset="2051" Addr="D9102" Description="OFFSET for Pocess Controller 1"/>
		<AI_ITEM Index="1166" Name="AI_APCController2P" BufferOffset="2053" Addr="D9106" Description="Controller 2 P"/>
		<AI_ITEM Index="1166" Name="AI_APCController2I" BufferOffset="2054" Addr="D9108" Description="Controller 2 I"/>
		<AI_ITEM Index="1166" Name="AI_APCController2D" BufferOffset="2055" Addr="D9110" Description="Controller 2 D"/>
		<AI_ITEM Index="1166" Name="AI_APCController2A" BufferOffset="2056" Addr="D9112" Description="Controller 2 A"/>
		<AI_ITEM Index="1166" Name="AI_APCController2CH" BufferOffset="2057" Addr="D9114" Description="CH(air pressure exhaust threshold value 1) for Process Controller 2"/>
		<AI_ITEM Index="1166" Name="AI_APCController2CL" BufferOffset="2058" Addr="D9116" Description="CL(air pressure exhaust threshold value 2) for Process Controller 2"/>
		<AI_ITEM Index="1166" Name="AI_APCController2Offset" BufferOffset="2059" Addr="D9118" Description="OFFSET for Pocess Controller 2"/>
		<AI_ITEM Index="1166" Name="AI_APCController3P" BufferOffset="2061" Addr="D9122" Description="Controller 3 P"/>
		<AI_ITEM Index="1166" Name="AI_APCController3I" BufferOffset="2062" Addr="D9124" Description="Controller 3 I"/>
		<AI_ITEM Index="1166" Name="AI_APCController3D" BufferOffset="2063" Addr="D9126" Description="Controller 3 D"/>
		<AI_ITEM Index="1166" Name="AI_APCController3A" BufferOffset="2064" Addr="D9128" Description="Controller 3 A"/>
		<AI_ITEM Index="1166" Name="AI_APCController3CH" BufferOffset="2065" Addr="D9130" Description="CH(air pressure exhaust threshold value 1) for Process Controller 3"/>
		<AI_ITEM Index="1166" Name="AI_APCController3CL" BufferOffset="2066" Addr="D9132" Description="CL(air pressure exhaust threshold value 2) for Process Controller 3"/>
		<AI_ITEM Index="1166" Name="AI_APCController3Offset" BufferOffset="2067" Addr="D9134" Description="OFFSET for Pocess Controller 3"/>
		<AI_ITEM Index="1166" Name="AI_APCController4P" BufferOffset="2069" Addr="D9138" Description="Controller 4 P"/>
		<AI_ITEM Index="1166" Name="AI_APCController4I" BufferOffset="2070" Addr="D9140" Description="Controller 4 I"/>
		<AI_ITEM Index="1166" Name="AI_APCController4D" BufferOffset="2071" Addr="D9142" Description="Controller 4 D"/>
		<AI_ITEM Index="1166" Name="AI_APCController4A" BufferOffset="2072" Addr="D9144" Description="Controller 4 A"/>
		<AI_ITEM Index="1166" Name="AI_APCController4CH" BufferOffset="2073" Addr="D9146" Description="CH(air pressure exhaust threshold value 1) for Process Controller 4"/>
		<AI_ITEM Index="1166" Name="AI_APCController4CL" BufferOffset="2074" Addr="D9148" Description="CL(air pressure exhaust threshold value 2) for Process Controller 4"/>
		<AI_ITEM Index="1166" Name="AI_APCController4Offset" BufferOffset="2075" Addr="D9150" Description="OFFSET for Pocess Controller 4"/>
		<AI_ITEM Index="1166" Name="AI_APCController5P" BufferOffset="2077" Addr="D9154" Description="Controller 5 P"/>
		<AI_ITEM Index="1166" Name="AI_APCController5I" BufferOffset="2078" Addr="D9156" Description="Controller 5 I"/>
		<AI_ITEM Index="1166" Name="AI_APCController5D" BufferOffset="2079" Addr="D9158" Description="Controller 5 D"/>
		<AI_ITEM Index="1166" Name="AI_APCController5A" BufferOffset="2080" Addr="D9160" Description="Controller 5 A"/>
		<AI_ITEM Index="1166" Name="AI_APCController5CH" BufferOffset="2081" Addr="D9162" Description="CH(air pressure exhaust threshold value 1) for Process Controller 5"/>
		<AI_ITEM Index="1166" Name="AI_APCController5CL" BufferOffset="2082" Addr="D9164" Description="CL(air pressure exhaust threshold value 2) for Process Controller 5"/>
		<AI_ITEM Index="1166" Name="AI_APCController5Offset" BufferOffset="2083" Addr="D9166" Description="OFFSET for Pocess Controller 5"/>

		<AI_ITEM Index="1166" Name="AI_APCController6P" BufferOffset="2085" Addr="D9170" Description="Controller 6 P"/>
		<AI_ITEM Index="1166" Name="AI_APCController6I" BufferOffset="2086" Addr="D9172" Description="Controller 6 I"/>
		<AI_ITEM Index="1166" Name="AI_APCController6D" BufferOffset="2087" Addr="D9174" Description="Controller 6 D"/>
		<AI_ITEM Index="1166" Name="AI_APCController6A" BufferOffset="2088" Addr="D9176" Description="Controller 6 A"/>
		<AI_ITEM Index="1166" Name="AI_APCController6CH" BufferOffset="2089" Addr="D9178" Description="CH(air pressure exhaust threshold value 1) for Process Controller 6"/>
		<AI_ITEM Index="1166" Name="AI_APCController6CL" BufferOffset="2090" Addr="D9180" Description="CL(air pressure exhaust threshold value 2) for Process Controller 6"/>
		<AI_ITEM Index="1166" Name="AI_APCController6Offset" BufferOffset="2091" Addr="D9182" Description="OFFSET for Pocess Controller 6"/>
		<AI_ITEM Index="1166" Name="AI_APCController7P" BufferOffset="2093" Addr="D9186" Description="Controller 7 P"/>
		<AI_ITEM Index="1166" Name="AI_APCController7I" BufferOffset="2094" Addr="D9188" Description="Controller 7 I"/>
		<AI_ITEM Index="1166" Name="AI_APCController7D" BufferOffset="2095" Addr="D9190" Description="Controller 7 D"/>
		<AI_ITEM Index="1166" Name="AI_APCController7A" BufferOffset="2096" Addr="D9192" Description="Controller 7 A"/>
		<AI_ITEM Index="1166" Name="AI_APCController7CH" BufferOffset="2097" Addr="D9194" Description="CH(air pressure exhaust threshold value 1) for Process Controller 7"/>
		<AI_ITEM Index="1166" Name="AI_APCController7CL" BufferOffset="2098" Addr="D9196" Description="CL(air pressure exhaust threshold value 2) for Process Controller 7"/>
		<AI_ITEM Index="1166" Name="AI_APCController7Offset" BufferOffset="2099" Addr="D9198" Description="OFFSET for Pocess Controller 7"/>
		<AI_ITEM Index="1166" Name="AI_APCController8P" BufferOffset="2101" Addr="D9202" Description="Controller 8 P"/>
		<AI_ITEM Index="1166" Name="AI_APCController8I" BufferOffset="2102" Addr="D9204" Description="Controller 8 I"/>
		<AI_ITEM Index="1166" Name="AI_APCController8D" BufferOffset="2103" Addr="D9206" Description="Controller 8 D"/>
		<AI_ITEM Index="1166" Name="AI_APCController8A" BufferOffset="2104" Addr="D9208" Description="Controller 8 A"/>
		<AI_ITEM Index="1166" Name="AI_APCController8CH" BufferOffset="2105" Addr="D9210" Description="CH(air pressure exhaust threshold value 1) for Process Controller 8"/>
		<AI_ITEM Index="1166" Name="AI_APCController8CL" BufferOffset="2106" Addr="D9212" Description="CL(air pressure exhaust threshold value 2) for Process Controller 8"/>
		<AI_ITEM Index="1166" Name="AI_APCController8Offset" BufferOffset="2107" Addr="D9214" Description="OFFSET for Pocess Controller 8"/>
		<AI_ITEM Index="1166" Name="AI_APCController9P" BufferOffset="2109" Addr="D9218" Description="Controller 9 P"/>
		<AI_ITEM Index="1166" Name="AI_APCController9I" BufferOffset="2110" Addr="D9220" Description="Controller 9 I"/>
		<AI_ITEM Index="1166" Name="AI_APCController9D" BufferOffset="2111" Addr="D9222" Description="Controller 9 D"/>
		<AI_ITEM Index="1166" Name="AI_APCController9A" BufferOffset="2112" Addr="D9224" Description="Controller 9 A"/>
		<AI_ITEM Index="1166" Name="AI_APCController9CH" BufferOffset="2113" Addr="D9226" Description="CH(air pressure exhaust threshold value 1) for Process Controller 9"/>
		<AI_ITEM Index="1166" Name="AI_APCController9CL" BufferOffset="2114" Addr="D9228" Description="CL(air pressure exhaust threshold value 2) for Process Controller 9"/>
		<AI_ITEM Index="1166" Name="AI_APCController9Offset" BufferOffset="2115" Addr="D9230" Description="OFFSET for Pocess Controller 9"/>
		<AI_ITEM Index="1166" Name="AI_APCController10P" BufferOffset="2117" Addr="D9234" Description="Controller 10 P"/>
		<AI_ITEM Index="1166" Name="AI_APCController10I" BufferOffset="2118" Addr="D9236" Description="Controller 10 I"/>
		<AI_ITEM Index="1166" Name="AI_APCController10D" BufferOffset="2119" Addr="D9238" Description="Controller 10 D"/>
		<AI_ITEM Index="1166" Name="AI_APCController10A" BufferOffset="2120" Addr="D9240" Description="Controller 10 A"/>
		<AI_ITEM Index="1166" Name="AI_APCController10CH" BufferOffset="2121" Addr="D9242" Description="CH(air pressure exhaust threshold value 1) for Process Controller 10"/>
		<AI_ITEM Index="1166" Name="AI_APCController0CL" BufferOffset="2122" Addr="D9244" Description="CL(air pressure exhaust threshold value 2) for Process Controller 10"/>
		<AI_ITEM Index="1166" Name="AI_APCController10Offset" BufferOffset="2123" Addr="D9246" Description="OFFSET for Pocess Controller 10"/>


		<AI_ITEM Index="1177" Name="AI_MFC816AI" BufferOffset="2125" Addr="D9250" Description="MFC816AI"/>
		<AI_ITEM Index="1177" Name="AI_MFC817AI" BufferOffset="2126" Addr="D9252" Description="MFC817AI"/>
		<AI_ITEM Index="1177" Name="AI_MFC818AI" BufferOffset="2127" Addr="D9254" Description="MFC818AI"/>
		<AI_ITEM Index="1177" Name="AI_MFC819AI" BufferOffset="2128" Addr="D9256" Description="MFC819AI"/>
		<AI_ITEM Index="1177" Name="AI_PG816AI" BufferOffset="2129" Addr="D9258" Description="PG816AI"/>
		<AI_ITEM Index="1177" Name="AI_PG817AI" BufferOffset="2130" Addr="D9260" Description="PG817AI"/>
		<AI_ITEM Index="1177" Name="AI_PG818AI" BufferOffset="2131" Addr="D9262" Description="PG818AI"/>
		<AI_ITEM Index="1177" Name="AI_PG819AI" BufferOffset="2132" Addr="D9264" Description="PG819AI"/>

		<AI_ITEM Index="1177" Name="AI_MFC820AI" BufferOffset="2133" Addr="D9266" Description="MFC820AI"/>
		<AI_ITEM Index="1177" Name="AI_MFC821AI" BufferOffset="2134" Addr="D9268" Description="MFC821AI"/>
		<AI_ITEM Index="1177" Name="AI_MFC822AI" BufferOffset="2135" Addr="D9270" Description="MFC822AI"/>
		<AI_ITEM Index="1177" Name="AI_MFC823AI" BufferOffset="2136" Addr="D9272" Description="MFC823AI"/>
		<AI_ITEM Index="1177" Name="AI_PG820AI" BufferOffset="2137" Addr="D9274" Description="PG820AI"/>
		<AI_ITEM Index="1177" Name="AI_PG821AI" BufferOffset="2138" Addr="D9276" Description="PG821AI"/>
		<AI_ITEM Index="1177" Name="AI_PG822AI" BufferOffset="2139" Addr="D9278" Description="PG822AI"/>
		<AI_ITEM Index="1177" Name="AI_PG823AI" BufferOffset="2140" Addr="D9280" Description="PG823AI"/>

		<AI_ITEM Index="1177" Name="AI_MFC824AI" BufferOffset="2142" Addr="D9284" Description="MFC824AI"/>
		<AI_ITEM Index="1177" Name="AI_MFC825AI" BufferOffset="2143" Addr="D9286" Description="MFC825AI"/>
		<AI_ITEM Index="1177" Name="AI_MFC826AI" BufferOffset="2144" Addr="D9288" Description="MFC826AI"/>
		<AI_ITEM Index="1177" Name="AI_MFC827AI" BufferOffset="2145" Addr="D9290" Description="MFC827AI"/>
		<AI_ITEM Index="1177" Name="AI_PG824AI" BufferOffset="2146" Addr="D9292" Description="PG824AI"/>
		<AI_ITEM Index="1177" Name="AI_PG825AI" BufferOffset="2147" Addr="D9294" Description="PG825AI"/>
		<AI_ITEM Index="1177" Name="AI_PG826AI" BufferOffset="2148" Addr="D9296" Description="PG826AI"/>
		<AI_ITEM Index="1177" Name="AI_PG827AI" BufferOffset="2149" Addr="D9298" Description="PG827AI"/>

		<AI_ITEM Index="1177" Name="AI_MFC828AI" BufferOffset="2150" Addr="D9300" Description="MFC828AI"/>
		<AI_ITEM Index="1177" Name="AI_MFC829AI" BufferOffset="2151" Addr="D9302" Description="MFC829AI"/>
		<AI_ITEM Index="1177" Name="AI_MFC830AI" BufferOffset="2152" Addr="D9304" Description="MFC830AI"/>
		<AI_ITEM Index="1177" Name="AI_MFC831AI" BufferOffset="2153" Addr="D9306" Description="MFC831AI"/>
		<AI_ITEM Index="1177" Name="AI_PG828AI" BufferOffset="2154" Addr="D9308" Description="PG828AI"/>
		<AI_ITEM Index="1177" Name="AI_PG829AI" BufferOffset="2155" Addr="D9310" Description="PG829AI"/>
		<AI_ITEM Index="1177" Name="AI_PG830AI" BufferOffset="2156" Addr="D9312" Description="PG830AI"/>
		<AI_ITEM Index="1177" Name="AI_PG831AI" BufferOffset="2157" Addr="D9314" Description="PG831AI"/>

		<AI_ITEM Index="2150" Name="AI_FOUPRobotActionCommand" BufferOffset="2250" Addr="D9500" Description="FOUP Robot Action Command" />
		<AI_ITEM Index="2151" Name="AI_WaferRobotActionCommand" BufferOffset="2251" Addr="D9502" Description="Wafer Robot Action Command" />
		<AI_ITEM Index="2175" Name="AI_RingBreakingNodeError" BufferOffset="2175" Addr="D9350" Description="RingBreaking Node Error"/>


	</Ana_In>

	<Ana_Out>
		<!--<AO_ITEM Index="0" Name="AO_RFPowerSet" BufferOffset="0" Addr="D10000" Description="RF power set"/>
		<AO_ITEM Index="1" Name="AO_MatchingUnitLoadPositionSet" BufferOffset="1" Addr="D10002" Description="Matching unit load position set"/>
		<AO_ITEM Index="2" Name="AO_MatchingUnitPhaseSet" BufferOffset="2" Addr="D10004" Description="Matching unit phase set"/>-->

		<AO_ITEM Index="3" Name="AO_TargetPositionBufferAxis" BufferOffset="5" Addr="D10010" Description="Target Position Buffer Axis"/>
		<AO_ITEM Index="4" Name="AO_BufferRotationSpeed" BufferOffset="6" Addr="D10012" Description="Buffer Rotation Speed"/>
		<AO_ITEM Index="5" Name="AO_BufferRotationAcc" BufferOffset="7" Addr="D10014" Description="Buffer Rotation Acc"/>
		<AO_ITEM Index="6" Name="AO_BufferRotationDec" BufferOffset="8" Addr="D10016" Description="Buffer Rotation Dec"/>

		<AO_ITEM Index="9" Name="AO_BoatPosition" BufferOffset="55" Addr="D10110" Description="Boat Position"/>
		<AO_ITEM Index="10" Name="AO_BoatRotationSpeed" BufferOffset="56" Addr="D10112" Description="Boat Rotation Speed"/>
		<AO_ITEM Index="11" Name="AO_BoatRotationAcc" BufferOffset="57" Addr="D10114" Description="Boat Rotation Acc"/>
		<AO_ITEM Index="12" Name="AO_BoatRotationDec" BufferOffset="58" Addr="D10116" Description="Boat Rotation Dec"/>
		
		<AO_ITEM Index="12" Name="AO_VG11ZeroValue" BufferOffset="60" Addr="D10120" Description="VG11 zero SetValue"/>
		<AO_ITEM Index="12" Name="AO_VG13ZeroValue" BufferOffset="61" Addr="D10122" Description="VG13 zero SetValue"/>

		<AO_ITEM Index="58" Name="AO_FFU1Switch" BufferOffset="157" Addr="D10314" Description="FFU1 switch"/>
		<AO_ITEM Index="59" Name="AO_FFU1SetSpeed" BufferOffset="158" Addr="D10316" Description="FFU1 Set speed"/>
		<AO_ITEM Index="61" Name="AO_FFU1Reset" BufferOffset="160" Addr="D10320" Description="FFU1 Maximum speed reset"/>

		<AO_ITEM Index="65" Name="AO_FFU2Switch" BufferOffset="163" Addr="D10326" Description="FFU2 switch"/>
		<AO_ITEM Index="66" Name="AO_FFU2SetSpeed" BufferOffset="164" Addr="D10328" Description="FFU2 Set speed"/>
		<AO_ITEM Index="68" Name="AO_FFU2Reset" BufferOffset="166" Addr="D10332" Description="FFU2 Maximum speed reset"/>

		<AO_ITEM Index="72" Name="AO_FFU3Switch" BufferOffset="169" Addr="D10338" Description="FFU3 switch"/>
		<AO_ITEM Index="73" Name="AO_FFU3SetSpeed" BufferOffset="170" Addr="D10340" Description="FFU3 Set speed"/>
		<AO_ITEM Index="75" Name="AO_FFU3Reset" BufferOffset="172" Addr="D10344" Description="FFU3 Maximum speed reset"/>

		<AO_ITEM Index="79" Name="AO_FFU4Switch" BufferOffset="175" Addr="D10350" Description="FFU4 switch"/>
		<AO_ITEM Index="80" Name="AO_FFU4SetSpeed" BufferOffset="176" Addr="D10352" Description="FFU4 Set speed"/>
		<AO_ITEM Index="82" Name="AO_FFU4Reset" BufferOffset="178" Addr="D10356" Description="FFU4 Maximum speed reset"/>

		<AO_ITEM Index="86" Name="AO_FFU5Switch" BufferOffset="181" Addr="D10362" Description="FFU5 switch"/>
		<AO_ITEM Index="87" Name="AO_FFU5SetSpeed" BufferOffset="182" Addr="D10364" Description="FFU5 Set speed"/>
		<AO_ITEM Index="89" Name="AO_FFU5Reset" BufferOffset="184" Addr="D10368" Description="FFU5 Maximum speed reset"/>

		<AO_ITEM Index="93" Name="AO_FFU6Switch" BufferOffset="187" Addr="D10374" Description="FFU6 switch"/>
		<AO_ITEM Index="94" Name="AO_FFU6SetSpeed" BufferOffset="188" Addr="D10376" Description="FFU6 Set speed"/>
		<AO_ITEM Index="96" Name="AO_FFU6Reset" BufferOffset="190" Addr="D10380" Description="FFU6 Maximum speed reset"/>

		<AO_ITEM Index="100" Name="AO_FFU7Switch" BufferOffset="193" Addr="D10386" Description="FFU7 switch"/>
		<AO_ITEM Index="101" Name="AO_FFU7SetSpeed" BufferOffset="194" Addr="D10388" Description="FFU7 Set speed"/>
		<AO_ITEM Index="103" Name="AO_FFU7Reset" BufferOffset="196" Addr="D10392" Description="FFU7 Maximum speed reset"/>

		<AO_ITEM Index="107" Name="AO_FFU8Switch" BufferOffset="199" Addr="D10398" Description="FFU8 switch"/>
		<AO_ITEM Index="108" Name="AO_FFU8SetSpeed" BufferOffset="200" Addr="D10400" Description="FFU8 Set speed"/>
		<AO_ITEM Index="110" Name="AO_FFU8Reset" BufferOffset="202" Addr="D10404" Description="FFU8 Maximum speed reset"/>

		<AO_ITEM Index="114" Name="AO_FFU9Switch" BufferOffset="205" Addr="D10410" Description="FFU9 switch"/>
		<AO_ITEM Index="115" Name="AO_FFU9SetSpeed" BufferOffset="206" Addr="D10412" Description="FFU9 Set speed"/>
		<AO_ITEM Index="117" Name="AO_FFU9Reset" BufferOffset="208" Addr="D10416" Description="FFU9 Maximum speed reset"/>

		<AO_ITEM Index="119" Name="AO_MFC1AirFlowSV" BufferOffset="215" Addr="D10430" Description="MFC1 air flow SV"/>
		<AO_ITEM Index="120" Name="AO_MFC2AirFlowSV" BufferOffset="216" Addr="D10432" Description="MFC2 air flow SV"/>
		<AO_ITEM Index="121" Name="AO_MFC3AirFlowSV" BufferOffset="217" Addr="D10434" Description="MFC3 air flow SV"/>
		<AO_ITEM Index="122" Name="AO_MFC4AirFlowSV" BufferOffset="218" Addr="D10436" Description="MFC4 air flow SV"/>
		<AO_ITEM Index="123" Name="AO_MFC5AirFlowSV" BufferOffset="219" Addr="D10438" Description="MFC5 air flow SV"/>
		<AO_ITEM Index="124" Name="AO_MFC6AirFlowSV" BufferOffset="220" Addr="D10440" Description="MFC6 air flow SV"/>
		<AO_ITEM Index="125" Name="AO_MFC7AirFlowSV" BufferOffset="221" Addr="D10442" Description="MFC7 air flow SV"/>
		<AO_ITEM Index="126" Name="AO_MFC8AirFlowSV" BufferOffset="222" Addr="D10444" Description="MFC8 air flow SV"/>
		<AO_ITEM Index="127" Name="AO_MFC9AirFlowSV" BufferOffset="223" Addr="D10446" Description="MFC9 air flow SV"/>
		<AO_ITEM Index="128" Name="AO_MFC10AirFlowSV" BufferOffset="224" Addr="D10448" Description="MFC10 air flow SV"/>
		<AO_ITEM Index="129" Name="AO_MFC11AirFlowSV" BufferOffset="225" Addr="D10450" Description="MFC11 air flow SV"/>
		<AO_ITEM Index="130" Name="AO_MFC12AirFlowSV" BufferOffset="226" Addr="D10452" Description="MFC12 air flow SV"/>
		<AO_ITEM Index="131" Name="AO_MFC51AirFlowSV" BufferOffset="227" Addr="D10454" Description="MFC51 air flow SV"/>

		<AO_ITEM Index="132" Name="AO_MFC13AirFlowSV" BufferOffset="229" Addr="D10458" Description="MFC13 air flow SV"/>
		<AO_ITEM Index="133" Name="AO_MFC16AirFlowSV" BufferOffset="230" Addr="D10460" Description="MFC16 air flow SV"/>
		<AO_ITEM Index="134" Name="AO_MFC17AirFlowSV" BufferOffset="231" Addr="D10462" Description="MFC17 air flow SV"/>
		<AO_ITEM Index="135" Name="AO_LSC1AirFlowSV" BufferOffset="240" Addr="D10480" Description="LSC1 air flow SV"/>
		<AO_ITEM Index="136" Name="AO_LSC2AirFlowSV" BufferOffset="241" Addr="D10482" Description="LSC2 air flow SV"/>



		<AO_ITEM Index="1166" Name="AO_APCZeroAdjustP1" BufferOffset="1501" Addr="D13002" Description="Zero adjust P1 (0:NO OPERATION,1:ADJUST)"/>
		<!--<AO_ITEM Index="1166" Name="AO_APCSpanAdjustP1" BufferOffset="1502" Addr="D13004" Description="Span adjust P1 (0:NO OPERATION,1:ADJUST)"/>-->
		<AO_ITEM Index="1166" Name="AO_APCZeroAdjustP2" BufferOffset="1504" Addr="D13008" Description="Zero adjust P2 (0:NO OPERATION,1:ADJUST)"/>
		<AO_ITEM Index="1166" Name="AO_APCSlowVacuumTargetPressure" BufferOffset="1506" Addr="D13012" Description="Slow vacuum control target vacuum pressure"/>
		<AO_ITEM Index="1166" Name="AO_APCValveStatusThreshold" BufferOffset="1507" Addr="D13014" Description="Valve status threshold(0.36~17.86)"/>
		<AO_ITEM Index="1166" Name="AO_APCForbidInterlockOutbreak" BufferOffset="1508" Addr="D13016" Description="Forbid interlock outbreak(0:enable,1:disable)"/>
		<AO_ITEM Index="1166" Name="AO_APCSlowVacuumModeSetting" BufferOffset="1509" Addr="D13018" Description="Slow vacuum mode setting(0:normal,1:short)"/>
		<AO_ITEM Index="1166" Name="AO_APCInterlock1" BufferOffset="1510" Addr="D13020" Description="Interlock1"/>
		<AO_ITEM Index="1166" Name="AO_APCInterlock2" BufferOffset="1511" Addr="D13022" Description="Interlock2"/>
		<AO_ITEM Index="1166" Name="AO_APCInterlock3" BufferOffset="1512" Addr="D13024" Description="Interlock3"/>
		<AO_ITEM Index="1166" Name="AO_APCInterlockConstantOfInterlock3" BufferOffset="1513" Addr="D13026" Description="Interlock constant of interlock3"/>
		<AO_ITEM Index="1166" Name="AO_APCP1SensorOffsetSetting" BufferOffset="1514" Addr="D13028" Description="P1 sensor offset setting"/>
		<AO_ITEM Index="1166" Name="AO_APCPosMonOffsetSetting" BufferOffset="1515" Addr="D13030" Description="Pos mon offset setting"/>
		<AO_ITEM Index="1166" Name="AO_APCSensorAdjustReset" BufferOffset="1516" Addr="D13032" Description="Sensor adjust reset"/>
		<AO_ITEM Index="1166" Name="AO_APCSlowVacuumRate" BufferOffset="1517" Addr="D13034" Description="Slow vacuum rate"/>
		<AO_ITEM Index="1166" Name="AO_APCSlowVacuumP" BufferOffset="1518" Addr="D13036" Description="P constant for slow vacuum control"/>
		<AO_ITEM Index="1166" Name="AO_APCSlowVacuumI" BufferOffset="1519" Addr="D13038" Description="I constant for slow vacuum control"/>
		<AO_ITEM Index="1166" Name="AO_APCSlowVacuumD" BufferOffset="1520" Addr="D13040" Description="D constant for slow vacuum control"/>
		<AO_ITEM Index="1166" Name="AO_APCSlowVacuumA" BufferOffset="1521" Addr="D13042" Description="a(sensor differential) constant for slow vacuum control "/>
		<AO_ITEM Index="1166" Name="AO_APCControllerModeSelect" BufferOffset="1522" Addr="D13044" Description="controller mode select(1~10分别代表Controller1-10)"/>
		<AO_ITEM Index="1166" Name="AO_APCSpecifyTargetVacuumPressureControl" BufferOffset="1523" Addr="D13046" Description="Specify target vacuum pressure control"/>
		<AO_ITEM Index="1166" Name="AO_APCSpecifyTargetOpeningForValveOpeningControl" BufferOffset="1524" Addr="D13048" Description="Specify target opening for valve opening control"/>
		<AO_ITEM Index="1166" Name="AO_APCSpecifyControlMode" BufferOffset="1525" Addr="D13050" Description="Specify control mode"/>
		<AO_ITEM Index="1166" Name="AO_APCRangeUpperLimitSensorInput" BufferOffset="1526" Addr="D13052" Description="Range Upper Limit Sensor Input 1(默认3）"/>
		<AO_ITEM Index="1166" Name="AO_APCController1" BufferOffset="1528" Addr="D13056" Description="Controller 1(number of entries)"/>
		<AO_ITEM Index="1166" Name="AO_APCController1P" BufferOffset="1529" Addr="D13058" Description="Controller 1 P"/>
		<AO_ITEM Index="1166" Name="AO_APCController1I" BufferOffset="1530" Addr="D13060" Description="Controller 1 I"/>
		<AO_ITEM Index="1166" Name="AO_APCController1D" BufferOffset="1531" Addr="D13062" Description="Controller 1 D"/>
		<AO_ITEM Index="1166" Name="AO_APCController1A" BufferOffset="1532" Addr="D13064" Description="Controller 1 A"/>
		<AO_ITEM Index="1166" Name="AO_APCController1CH" BufferOffset="1533" Addr="D13066" Description="CH(air pressure exhaust threshold value 1) for Process Controller 1"/>
		<AO_ITEM Index="1166" Name="AO_APCController1CL" BufferOffset="1534" Addr="D13068" Description="CL(air pressure exhaust threshold value 2) for Process Controller 1"/>
		<AO_ITEM Index="1166" Name="AO_APCController1Offset" BufferOffset="1535" Addr="D13070" Description="OFFSET for Pocess Controller 1"/>
		<AO_ITEM Index="1166" Name="AO_APCController2P" BufferOffset="1537" Addr="D13074" Description="Controller 2 P"/>
		<AO_ITEM Index="1166" Name="AO_APCController2I" BufferOffset="1538" Addr="D13076" Description="Controller 2 I"/>
		<AO_ITEM Index="1166" Name="AO_APCController2D" BufferOffset="1539" Addr="D13078" Description="Controller 2 D"/>
		<AO_ITEM Index="1166" Name="AO_APCController2A" BufferOffset="1540" Addr="D13080" Description="Controller 2 A"/>
		<AO_ITEM Index="1166" Name="AO_APCController2CH" BufferOffset="1541" Addr="D13082" Description="CH(air pressure exhaust threshold value 1) for Process Controller 2"/>
		<AO_ITEM Index="1166" Name="AO_APCController2CL" BufferOffset="1542" Addr="D13084" Description="CL(air pressure exhaust threshold value 2) for Process Controller 2"/>
		<AO_ITEM Index="1166" Name="AO_APCController2Offset" BufferOffset="1543" Addr="D13086" Description="OFFSET for Pocess Controller 2"/>
		<AO_ITEM Index="1166" Name="AO_APCController3P" BufferOffset="1545" Addr="D13090" Description="Controller 3 P"/>
		<AO_ITEM Index="1166" Name="AO_APCController3I" BufferOffset="1546" Addr="D13092" Description="Controller 3 I"/>
		<AO_ITEM Index="1166" Name="AO_APCController3D" BufferOffset="1547" Addr="D13094" Description="Controller 3 D"/>
		<AO_ITEM Index="1166" Name="AO_APCController3A" BufferOffset="1548" Addr="D13096" Description="Controller 3 A"/>
		<AO_ITEM Index="1166" Name="AO_APCController3CH" BufferOffset="1549" Addr="D13098" Description="CH(air pressure exhaust threshold value 1) for Process Controller 3"/>
		<AO_ITEM Index="1166" Name="AO_APCController3CL" BufferOffset="1550" Addr="D13100" Description="CL(air pressure exhaust threshold value 2) for Process Controller 3"/>
		<AO_ITEM Index="1166" Name="AO_APCController3Offset" BufferOffset="1551" Addr="D13102" Description="OFFSET for Pocess Controller 3"/>
		<AO_ITEM Index="1166" Name="AO_APCController4P" BufferOffset="1553" Addr="D13106" Description="Controller 4 P"/>
		<AO_ITEM Index="1166" Name="AO_APCController4I" BufferOffset="1554" Addr="D13108" Description="Controller 4 I"/>
		<AO_ITEM Index="1166" Name="AO_APCController4D" BufferOffset="1555" Addr="D13110" Description="Controller 4 D"/>
		<AO_ITEM Index="1166" Name="AO_APCController4A" BufferOffset="1556" Addr="D13112" Description="Controller 4 A"/>
		<AO_ITEM Index="1166" Name="AO_APCController4CH" BufferOffset="1557" Addr="D13114" Description="CH(air pressure exhaust threshold value 1) for Process Controller 4"/>
		<AO_ITEM Index="1166" Name="AO_APCController4CL" BufferOffset="1558" Addr="D13116" Description="CL(air pressure exhaust threshold value 2) for Process Controller 4"/>
		<AO_ITEM Index="1166" Name="AO_APCController4Offset" BufferOffset="1559" Addr="D13118" Description="OFFSET for Pocess Controller 4"/>
		<AO_ITEM Index="1166" Name="AO_APCController5P" BufferOffset="1561" Addr="D13122" Description="Controller 5 P"/>
		<AO_ITEM Index="1166" Name="AO_APCController5I" BufferOffset="1562" Addr="D13124" Description="Controller 5 I"/>
		<AO_ITEM Index="1166" Name="AO_APCController5D" BufferOffset="1563" Addr="D13126" Description="Controller 5 D"/>
		<AO_ITEM Index="1166" Name="AO_APCController5A" BufferOffset="1564" Addr="D13128" Description="Controller 5 A"/>
		<AO_ITEM Index="1166" Name="AO_APCController5CH" BufferOffset="1565" Addr="D13130" Description="CH(air pressure exhaust threshold value 1) for Process Controller 5"/>
		<AO_ITEM Index="1166" Name="AO_APCController5CL" BufferOffset="1566" Addr="D13132" Description="CL(air pressure exhaust threshold value 2) for Process Controller 5"/>
		<AO_ITEM Index="1166" Name="AO_APCController5Offset" BufferOffset="1567" Addr="D13134" Description="OFFSET for Pocess Controller 5"/>

		<AO_ITEM Index="1166" Name="AO_APCController6P" BufferOffset="1569" Addr="D13138" Description="Controller 6 P"/>
		<AO_ITEM Index="1166" Name="AO_APCController6I" BufferOffset="1570" Addr="D13140" Description="Controller 6 I"/>
		<AO_ITEM Index="1166" Name="AO_APCController6D" BufferOffset="1571" Addr="D13142" Description="Controller 6 D"/>
		<AO_ITEM Index="1166" Name="AO_APCController6A" BufferOffset="1572" Addr="D13144" Description="Controller 6 A"/>
		<AO_ITEM Index="1166" Name="AO_APCController6CH" BufferOffset="1573" Addr="D13146" Description="CH(air pressure exhaust threshold value 1) for Process Controller 6"/>
		<AO_ITEM Index="1166" Name="AO_APCController6CL" BufferOffset="1574" Addr="D13148" Description="CL(air pressure exhaust threshold value 2) for Process Controller 6"/>
		<AO_ITEM Index="1166" Name="AO_APCController6Offset" BufferOffset="1575" Addr="D13150" Description="OFFSET for Pocess Controller 6"/>
		<AO_ITEM Index="1166" Name="AO_APCController7P" BufferOffset="1577" Addr="D13154" Description="Controller 7 P"/>
		<AO_ITEM Index="1166" Name="AO_APCController7I" BufferOffset="1578" Addr="D13156" Description="Controller 7 I"/>
		<AO_ITEM Index="1166" Name="AO_APCController7D" BufferOffset="1579" Addr="D13158" Description="Controller 7 D"/>
		<AO_ITEM Index="1166" Name="AO_APCController7A" BufferOffset="1580" Addr="D13160" Description="Controller 7 A"/>
		<AO_ITEM Index="1166" Name="AO_APCController7CH" BufferOffset="1581" Addr="D13162" Description="CH(air pressure exhaust threshold value 1) for Process Controller 7"/>
		<AO_ITEM Index="1166" Name="AO_APCController7CL" BufferOffset="1582" Addr="D13164" Description="CL(air pressure exhaust threshold value 2) for Process Controller 7"/>
		<AO_ITEM Index="1166" Name="AO_APCController7Offset" BufferOffset="1583" Addr="D13166" Description="OFFSET for Pocess Controller 7"/>
		<AO_ITEM Index="1166" Name="AO_APCController8P" BufferOffset="1585" Addr="D13170" Description="Controller 8 P"/>
		<AO_ITEM Index="1166" Name="AO_APCController8I" BufferOffset="1586" Addr="D13172" Description="Controller 8 I"/>
		<AO_ITEM Index="1166" Name="AO_APCController8D" BufferOffset="1587" Addr="D13174" Description="Controller 8 D"/>
		<AO_ITEM Index="1166" Name="AO_APCController8A" BufferOffset="1588" Addr="D13176" Description="Controller 8 A"/>
		<AO_ITEM Index="1166" Name="AO_APCController8CH" BufferOffset="1589" Addr="D13178" Description="CH(air pressure exhaust threshold value 1) for Process Controller 8"/>
		<AO_ITEM Index="1166" Name="AO_APCController8CL" BufferOffset="1590" Addr="D13180" Description="CL(air pressure exhaust threshold value 2) for Process Controller 8"/>
		<AO_ITEM Index="1166" Name="AO_APCController8Offset" BufferOffset="1591" Addr="D13182" Description="OFFSET for Pocess Controller 8"/>
		<AO_ITEM Index="1166" Name="AO_APCController9P" BufferOffset="1593" Addr="D13186" Description="Controller 9 P"/>
		<AO_ITEM Index="1166" Name="AO_APCController9I" BufferOffset="1594" Addr="D13188" Description="Controller 9 I"/>
		<AO_ITEM Index="1166" Name="AO_APCController9D" BufferOffset="1595" Addr="D13190" Description="Controller 9 D"/>
		<AO_ITEM Index="1166" Name="AO_APCController9A" BufferOffset="1596" Addr="D13192" Description="Controller 9 A"/>
		<AO_ITEM Index="1166" Name="AO_APCController9CH" BufferOffset="1597" Addr="D13194" Description="CH(air pressure exhaust threshold value 1) for Process Controller 9"/>
		<AO_ITEM Index="1166" Name="AO_APCController9CL" BufferOffset="1598" Addr="D13196" Description="CL(air pressure exhaust threshold value 2) for Process Controller 9"/>
		<AO_ITEM Index="1166" Name="AO_APCController9Offset" BufferOffset="1599" Addr="D13198" Description="OFFSET for Pocess Controller 9"/>
		<AO_ITEM Index="1166" Name="AO_APCController10P" BufferOffset="1601" Addr="D13202" Description="Controller 10 P"/>
		<AO_ITEM Index="1166" Name="AO_APCController10I" BufferOffset="1602" Addr="D13204" Description="Controller 10 I"/>
		<AO_ITEM Index="1166" Name="AO_APCController10D" BufferOffset="1603" Addr="D13206" Description="Controller 10 D"/>
		<AO_ITEM Index="1166" Name="AO_APCController10A" BufferOffset="1604" Addr="D13208" Description="Controller 10 A"/>
		<AO_ITEM Index="1166" Name="AO_APCController10CH" BufferOffset="1605" Addr="D13210" Description="CH(air pressure exhaust threshold value 1) for Process Controller 10"/>
		<AO_ITEM Index="1166" Name="AO_APCController10CL" BufferOffset="1606" Addr="D13212" Description="CL(air pressure exhaust threshold value 2) for Process Controller 10"/>
		<AO_ITEM Index="1166" Name="AO_APCController10Offset" BufferOffset="1607" Addr="D13214" Description="OFFSET for Pocess Controller 10"/>


		<AO_ITEM Index="1167" Name="AO_MFC1RampTime" BufferOffset="1620" Addr="D13240" Description="MFC1 Ramp Time"/>
		<AO_ITEM Index="1167" Name="AO_MFC2RampTime" BufferOffset="1621" Addr="D13242" Description="MFC2 Ramp Time"/>
		<AO_ITEM Index="1167" Name="AO_MFC3RampTime" BufferOffset="1622" Addr="D13244" Description="MFC3 Ramp Time"/>
		<AO_ITEM Index="1167" Name="AO_MFC4RampTime" BufferOffset="1623" Addr="D13246" Description="MFC4 Ramp Time"/>
		<AO_ITEM Index="1167" Name="AO_MFC5RampTime" BufferOffset="1624" Addr="D13248" Description="MFC5 Ramp Time"/>
		<AO_ITEM Index="1167" Name="AO_MFC6RampTime" BufferOffset="1625" Addr="D13250" Description="MFC6 Ramp Time"/>
		<AO_ITEM Index="1167" Name="AO_MFC7RampTime" BufferOffset="1626" Addr="D13252" Description="MFC7 Ramp Time"/>
		<AO_ITEM Index="1167" Name="AO_MFC8RampTime" BufferOffset="1627" Addr="D13254" Description="MFC8 Ramp Time"/>
		<AO_ITEM Index="1167" Name="AO_MFC9RampTime" BufferOffset="1628" Addr="D13256" Description="MFC9 Ramp Time"/>
		<AO_ITEM Index="1167" Name="AO_MFC10RampTime" BufferOffset="1629" Addr="D13258" Description="MFC10 Ramp Time"/>
		<AO_ITEM Index="1167" Name="AO_MFC11RampTime" BufferOffset="1630" Addr="D13260" Description="MFC11 Ramp Time"/>
		<AO_ITEM Index="1167" Name="AO_MFC12RampTime" BufferOffset="1631" Addr="D13262" Description="MFC12 Ramp Time"/>
		<AO_ITEM Index="1167" Name="AO_MFC51RampTime" BufferOffset="1632" Addr="D13264" Description="MFC51 Ramp Time"/>

		<AO_ITEM Index="1167" Name="AO_MFC13RampTime" BufferOffset="1634" Addr="D13268" Description="MFC13 Ramp Time"/>
		<AO_ITEM Index="1167" Name="AO_MFC16RampTime" BufferOffset="1635" Addr="D13270" Description="MFC16 Ramp Time"/>
		<AO_ITEM Index="1167" Name="AO_MFC17RampTime" BufferOffset="1636" Addr="D13272" Description="MFC17 Ramp Time"/>

		<AO_ITEM Index="1167" Name="" BufferOffset="1637" Addr="D13274" Description=""/>
		<AO_ITEM Index="1167" Name="" BufferOffset="1638" Addr="D13276" Description=""/>
		<AO_ITEM Index="1167" Name="" BufferOffset="1639" Addr="D13278" Description=""/>
		<AO_ITEM Index="1167" Name="" BufferOffset="1640" Addr="D13280" Description=""/>
		<AO_ITEM Index="1167" Name="" BufferOffset="1641" Addr="D13282" Description=""/>
		<AO_ITEM Index="1167" Name="" BufferOffset="1642" Addr="D13284" Description=""/>
		<AO_ITEM Index="1167" Name="" BufferOffset="1643" Addr="D13286" Description=""/>
		<AO_ITEM Index="1167" Name="" BufferOffset="1644" Addr="D13288" Description=""/>

		<AO_ITEM Index="1167" Name="AO_LSC1RampTime" BufferOffset="1645" Addr="D13290" Description="LSC1 Ramp Time"/>
		<AO_ITEM Index="1167" Name="AO_LSC2RampTime" BufferOffset="1646" Addr="D13292" Description="LSC2 Ramp Time"/>


		<AO_ITEM Index="1167" Name="AO_UZoneCascadeTemp" BufferOffset="1650" Addr="D13300" Description="U Zone Cascade Temp"/>
		<AO_ITEM Index="1167" Name="AO_CUZoneCascadeTemp" BufferOffset="1651" Addr="D13302" Description="CU Zone Cascade Temp"/>
		<AO_ITEM Index="1167" Name="AO_CZoneCascadeTemp" BufferOffset="1652" Addr="D13304" Description="C Zone Cascade Temp"/>
		<AO_ITEM Index="1167" Name="AO_CLZoneCascadeTemp" BufferOffset="1653" Addr="D13306" Description="CL Zone Cascade Temp"/>
		<AO_ITEM Index="1167" Name="AO_LZoneCascadeTemp" BufferOffset="1654" Addr="D13308" Description="L Zone Cascade Temp"/>
		<AO_ITEM Index="1167" Name="AO_HeaterAllEnable" BufferOffset="1655" Addr="D13310" Description="Heater All Enable"/>




		<AO_ITEM Index="2000" Name="AO_FOUPRobotActionCommand" BufferOffset="2000" Addr="D14000" Description="FOUP Robot Action Command" />
		<AO_ITEM Index="2001" Name="AO_WaferRobotActionCommand" BufferOffset="2001" Addr="D14002" Description="Wafer Robot Action Command" />
	</Ana_Out>
</IO_DEFINE>