PMModuleInterlock.cs 16 KB

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  1. using Aitex.Core.RT.DataCenter;
  2. using Aitex.Core.RT.Device.Unit;
  3. using Aitex.Core.RT.Event;
  4. using Aitex.Core.RT.IOCore;
  5. using Aitex.Core.RT.Log;
  6. using Aitex.Core.RT.OperationCenter;
  7. using Aitex.Core.RT.SCCore;
  8. using Aitex.Core.Util;
  9. using MECF.Framework.Common.OperationCenter;
  10. using MECF.Framework.FA.Core.FAControl;
  11. using System;
  12. using System.Collections;
  13. using System.Diagnostics;
  14. using System.Linq;
  15. namespace FurnaceRT.Equipments.PMs
  16. {
  17. public partial class PMModule
  18. {
  19. private SCConfigItem _configAutoControlCoolingValve;
  20. private SCConfigItem _configVacuumSensorPressure;
  21. private SCConfigItem _configAutoControlChiller;
  22. private SCConfigItem _chillerTurnOffIfTempBelow;
  23. private SCConfigItem _chillerTurnOnIfTempAbove;
  24. private PeriodicJob _threadMonitor;
  25. private bool _vac1;
  26. private bool _vac2;
  27. private bool _vac3;
  28. private Stopwatch _vac1Timer = new Stopwatch();
  29. private Stopwatch _vac2Timer = new Stopwatch();
  30. private Stopwatch _vac3Timer = new Stopwatch();
  31. private int _vac1PumpTimeS = 120;
  32. private int _vac2PumpTimeS = 120;
  33. private int _vac3PumpTimeS = 120;
  34. private int _foolProofTime = 5;
  35. private DeviceTimer _plcFoolProofTime = null;
  36. private RD_TRIG _trigPLCConnected = null;
  37. private void InitInterlock()
  38. {
  39. OP.AddCheck($"{Module}.{Name}.Disconnect", new CheckPlcConnect(this));
  40. //OP.AddCheck($"{ChamberDoor.Module}.{ChamberDoor.Name}.Open", new CheckOpenDoor(this));
  41. if (SC.ContainsItem("System.PLCConnectSensorFoolTime"))
  42. _foolProofTime = SC.GetValue<int>("System.PLCConnectSensorFoolTime");
  43. _configAutoControlCoolingValve = SC.GetConfigItem($"PM.{Module}.AutoControlCoolingValve");
  44. _configVacuumSensorPressure = SC.GetConfigItem($"PM.{Module}.VacuumSensorPressure");
  45. _configAutoControlChiller = SC.GetConfigItem($"PM.{Module}.Chiller.EnableAutoAdjust");
  46. _chillerTurnOffIfTempBelow = SC.GetConfigItem($"PM.{Module}.Chiller.TurnOffIfTempBelow");
  47. _chillerTurnOnIfTempAbove = SC.GetConfigItem($"PM.{Module}.Chiller.TurnOnIfTempAbove");
  48. if (SensorPLCHeartBeatPC != null)
  49. {
  50. _trigPLCConnected = new RD_TRIG();
  51. _plcFoolProofTime = new DeviceTimer();
  52. _plcFoolProofTime.Start((_foolProofTime + 2) * 1000);//首次
  53. }
  54. _threadMonitor = new PeriodicJob(100, OnTimer, "interlock thread", true);
  55. }
  56. private void InitUserDefineInterlock()
  57. {
  58. //DATA.Subscribe($"{Module}.Heater1", () => 100);//自定义的Interlock limit
  59. InterlockManager.Instance.UserDefineInterlockHandler += UserDefineInterlockHandler;
  60. InterlockManager.Instance.UserDefineInterlocks += UserDefineInterlocks;
  61. //DATA.Subscribe("UserDefineInterlock", () => InterlockManager.Instance.UserDefineFlagCurrentValues);
  62. //DATA.Subscribe("UserDefineCurrent", () => InterlockManager.Instance.UserDefineCurrentValues);
  63. }
  64. //自定义的interlock action
  65. private bool UserDefineInterlocks(string name)
  66. {
  67. switch (name)
  68. {
  69. case "PM1.Heater1":
  70. return true;
  71. }
  72. return false;
  73. }
  74. //设置自定义的interlock action
  75. private bool UserDefineInterlockHandler(string name, object value)
  76. {
  77. switch (name)
  78. {
  79. case "PM1.Heater1":
  80. //设置Heater的值
  81. return true;
  82. }
  83. return false;
  84. }
  85. private class CheckOpenDoor : IInterlockChecker
  86. {
  87. private PMModule _pm;
  88. public CheckOpenDoor(PMModule pm)
  89. {
  90. _pm = pm;
  91. }
  92. public bool CanDo(out string reason, object[] args)
  93. {
  94. if (_pm.ChamberPressure < SC.GetValue<double>("PM.AtmPressureBase"))
  95. {
  96. reason = $"{_pm.Module} chamber pressure {_pm.ChamberPressure:F3} Torr less than {SC.GetValue<double>("PM.AtmPressureBase")} [PM.AtmPressureBase], can not open door";
  97. return false;
  98. }
  99. reason = string.Empty;
  100. return true;
  101. }
  102. }
  103. private class CheckPlcConnect : IInterlockChecker
  104. {
  105. private PMModule _pm;
  106. public CheckPlcConnect(PMModule pm)
  107. {
  108. _pm = pm;
  109. }
  110. public bool CanDo(out string reason, object[] args)
  111. {
  112. if (_pm.IsBusy)
  113. {
  114. reason = $"{_pm.Module} is in {_pm.StringFsmStatus} status, can not disconnect, should be idle";
  115. return false;
  116. }
  117. reason = string.Empty;
  118. return true;
  119. }
  120. }
  121. public bool OnTimer()
  122. {
  123. try
  124. {
  125. MonitorN2Purge();
  126. MonitorAux();
  127. MonitorFfu();
  128. lock (_alarmConditionLocker)
  129. {
  130. MonitorAlarmCondition();
  131. }
  132. if (!IsProcessing && TrigVGUnitConversion != null && SC.GetStringValue($"{Module}.APC.PressureUnit").ToLower() == "pa")
  133. {
  134. TrigVGUnitConversion.SetTrigger(SC.GetStringValue($"{Module}.APC.PressureUnit").ToLower() == "pa", out _);
  135. }
  136. //MonitorVAC1();
  137. //MonitorVAC2();
  138. //MonitorVAC3();
  139. MonitorPLCConnected();
  140. //foreach (var item in _inCommandLst)
  141. //{
  142. // if (item == null)
  143. // continue;
  144. // if (!_inCommandTirgs.ContainsKey(item.Name))
  145. // {
  146. // _inCommandTirgs.Add(item.Name, new RD_TRIG());
  147. // }
  148. // _inCommandTirgs[item.Name].CLK = item.Value;
  149. //}
  150. //if (_inCommandTirgs[SensorHECPowerONSW.Name].R)
  151. //{
  152. // _trigTHPowerEN.SetTrigger(true, out _);
  153. // _trigHECPowerONLamp.SetTrigger(true, out _);
  154. //}
  155. //if (_inCommandTirgs[SensorHECPowerONSW.Name].T)
  156. //{
  157. //}
  158. //if (_inCommandTirgs[SensorTHBreakOK.Name].R)
  159. //{
  160. //}
  161. //if (_inCommandTirgs[SensorTHBreakOK.Name].T)
  162. //{
  163. // _trigTHPowerEN.SetTrigger(false, out _);
  164. // _trigHECPowerONLamp.SetTrigger(false, out _);
  165. //}
  166. ProcessAlarmSignal();
  167. //if (IV2Valve.Status != SensorVG2LOW.Value)
  168. // IV2Valve.TurnValve(SensorVG2LOW.Value, out _);
  169. //if (IV2Valve.Status != SensorVG2LOW.Value)
  170. // VV2Valve.TurnValve(SensorTubeOverPressure.Value, out _);
  171. if (IsInit || !IsInstalled)
  172. return true;
  173. //cooling 阀门
  174. if (_configAutoControlCoolingValve == null || _configAutoControlCoolingValve.BoolValue)
  175. {
  176. //if (ElectricalCoolingValve.Status != MainChiller.IsRunning)
  177. // ElectricalCoolingValve.TurnValve(MainChiller.IsRunning, out _);
  178. //if (MicrowaveCoolingValve.Status != MainChiller.IsRunning)
  179. // MicrowaveCoolingValve.TurnValve(MainChiller.IsRunning, out _);
  180. //if (ChamberLidCoolingValve.Status != MainChiller.IsRunning)
  181. // ChamberLidCoolingValve.TurnValve(MainChiller.IsRunning, out _);
  182. }
  183. //auto control chiller
  184. if (_configAutoControlChiller != null && _configAutoControlChiller.BoolValue && _chillerTurnOffIfTempBelow != null && _chillerTurnOnIfTempAbove != null)
  185. {
  186. //if (!MainChiller.HasAlarm)
  187. //{
  188. // if (MainChiller.IsRunning && (ChamberHeater1.Feedback < _chillerTurnOffIfTempBelow.DoubleValue))
  189. // {
  190. // if (!MainChiller.SetMainPowerOnOff(false, out string reason))
  191. // {
  192. // LOG.Write(reason);
  193. // }
  194. // }else if (!MainChiller.IsRunning && (ChamberHeater1.Feedback > _chillerTurnOnIfTempAbove.DoubleValue))
  195. // {
  196. // if (!MainChiller.SetMainPowerOnOff(true, out string reason))
  197. // {
  198. // LOG.Write(reason);
  199. // }
  200. // }
  201. //}
  202. }
  203. //压力保护计
  204. double pressure = 3.0;
  205. if (_configVacuumSensorPressure != null)
  206. pressure = _configVacuumSensorPressure.DoubleValue;
  207. if (pressure > 30.0)
  208. pressure = 30.0;
  209. //bool canOpen = ChamberMonitorPressureGauge.Value < pressure;
  210. //if (VacuumSensorValve.Status != canOpen)
  211. //{
  212. // VacuumSensorValve.TurnValve(canOpen, out _);
  213. //}
  214. ////interlock ignore
  215. //SignalExhaustAlarm.SetIgnoreError(SC.GetValue<bool>($"PM.{Module}.Signal.IgnoreExhaustAlarm"));
  216. }
  217. catch (Exception ex)
  218. {
  219. LOG.Write(ex);
  220. }
  221. return true;
  222. }
  223. private void MonitorPLCConnected()
  224. {
  225. if (SensorPLCHeartBeatPC != null)
  226. {
  227. _trigPLCConnected.CLK = SensorPLCHeartBeatPC.Value;
  228. if (_trigPLCConnected.T || _trigPLCConnected.R)
  229. {
  230. _plcFoolProofTime.Start(_foolProofTime * 1000);
  231. }
  232. if (_plcFoolProofTime.IsTimeout())
  233. {
  234. _plcFoolProofTime.Stop();
  235. SensorPLCConnectedAlarm?.Set($"Connected Status keep {_trigPLCConnected.CLK} out of {_foolProofTime}s");
  236. }
  237. }
  238. }
  239. private void ProcessAlarmSignal()
  240. {
  241. var alarms = EV.GetAlarmEvent();
  242. if (alarms != null && alarms.Count > 0)
  243. {
  244. foreach (var device in HWILKAlarmDic)
  245. {
  246. if (device.Key is IoSensor && !((IoSensor)device.Key).Value && device.Value.AutoRecovery)
  247. {
  248. var item = alarms.FirstOrDefault(x => x.EventEnum == device.Value.EventEnum);
  249. if (item != null)
  250. {
  251. alarms.Remove(item);
  252. EV.ClearAlarmEvent(item.EventEnum);
  253. Singleton<FAJobController>.Instance.ClearAlarm(item.EventEnum);
  254. }
  255. }
  256. }
  257. }
  258. bool isTrig = false;
  259. foreach (var signal in _alarmSignals)
  260. {
  261. if (signal.RrigSignalOn.T && signal.IsAlarmAutoRecovery)
  262. {
  263. var item = _triggeredAlarmList.FirstOrDefault(x => x.EventEnum == signal.AlarmTriggered.EventEnum);
  264. if (item != null)
  265. {
  266. item.Reset();
  267. _triggeredAlarmList.Remove(item);
  268. EV.ClearAlarmEvent(item.EventEnum);
  269. Singleton<FAJobController>.Instance.ClearAlarm(item.EventEnum);
  270. }
  271. isTrig = true;
  272. signal.AlarmRecovery?.Set();
  273. }
  274. }
  275. if (isTrig)
  276. {
  277. int count = 0;
  278. foreach (var alarm in alarms)
  279. {
  280. if (alarm.Level == EventLevel.Alarm && alarm.Source == Name)
  281. count++;
  282. }
  283. if (count == 0)
  284. CheckToPostMessage((int)MSG.Reset);
  285. }
  286. }
  287. private void MonitorVAC1()
  288. {
  289. if (_vac1Timer == null)
  290. _vac1Timer = new Stopwatch();
  291. if (ValveAV24.Status)
  292. {
  293. _vac1 = false;
  294. if (_vac1Timer.IsRunning)
  295. _vac1Timer.Stop();
  296. }
  297. if (!ValveAV9.Status &&
  298. !ValveAV16.Status &&
  299. !ValveAV20.Status &&
  300. !ValveAV24.Status &&
  301. ValveAV26.Status &&
  302. (ValveAV33.Status || ValveAV35.Status) &&
  303. ValveAV83.Status &&
  304. ValveAV71.Status &&
  305. (APC.ModeFeedback == 0 || APC.ModeFeedback == 6) &&//0=idle;6=full open
  306. SensorVG11Status.Value && !AlarmSignalVG11HighAlarm.Value)
  307. {
  308. if (!_vac1Timer.IsRunning)
  309. _vac1Timer.Restart();
  310. if (_vac1Timer.ElapsedMilliseconds > _vac1PumpTimeS * 1000)
  311. _vac1 = true;
  312. }
  313. else
  314. {
  315. if (_vac1Timer.IsRunning)
  316. _vac1Timer.Stop();
  317. }
  318. }
  319. private void MonitorVAC2()
  320. {
  321. if (_vac2Timer == null)
  322. _vac2Timer = new Stopwatch();
  323. if (ValveAV9.Status)
  324. {
  325. _vac2 = false;
  326. if (_vac2Timer.IsRunning)
  327. _vac2Timer.Stop();
  328. }
  329. if (!ValveAV9.Status &&
  330. !ValveAV16.Status &&
  331. !ValveAV20.Status &&
  332. !ValveAV24.Status &&
  333. ValveAV12.Status &&
  334. ValveAV14.Status &&
  335. ValveAV28.Status &&
  336. ValveAV29.Status &&
  337. ValveAV36.Status &&
  338. ValveAV37.Status &&
  339. ValveAV81.Status &&
  340. ValveAV71.Status &&
  341. (APC.ModeFeedback == 0 || APC.ModeFeedback == 6) &&//0=idle;6=full open
  342. SensorVG11Status.Value && !AlarmSignalVG11HighAlarm.Value)
  343. {
  344. if (!_vac2Timer.IsRunning)
  345. _vac2Timer.Restart();
  346. if (_vac2Timer.ElapsedMilliseconds > _vac2PumpTimeS * 1000)
  347. _vac2 = true;
  348. }
  349. else
  350. {
  351. if (_vac2Timer.IsRunning)
  352. _vac2Timer.Stop();
  353. }
  354. }
  355. private void MonitorVAC3()
  356. {
  357. if (_vac3Timer == null)
  358. _vac3Timer = new Stopwatch();
  359. if (ValveAV16.Status || ValveAV20.Status)
  360. {
  361. _vac3 = false;
  362. if (_vac3Timer.IsRunning)
  363. _vac3Timer.Stop();
  364. }
  365. if (!ValveAV9.Status &&
  366. !ValveAV16.Status &&
  367. !ValveAV20.Status &&
  368. !ValveAV24.Status &&
  369. ValveAV18.Status &&
  370. ValveAV22.Status &&
  371. ValveAV38.Status &&
  372. ValveAV39.Status &&
  373. ValveAV82.Status &&
  374. ValveAV71.Status &&
  375. (APC.ModeFeedback == 0 || APC.ModeFeedback == 6) &&//0=idle;6=full open
  376. SensorVG11Status.Value && !AlarmSignalVG11HighAlarm.Value)
  377. {
  378. if (!_vac3Timer.IsRunning)
  379. _vac3Timer.Restart();
  380. if (_vac3Timer.ElapsedMilliseconds > _vac3PumpTimeS * 1000)
  381. _vac3 = true;
  382. }
  383. else
  384. {
  385. if (_vac3Timer.IsRunning)
  386. _vac3Timer.Stop();
  387. }
  388. }
  389. }
  390. }