RecipeFACallback.cs 23 KB

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  1. using System;
  2. using System.Collections.Generic;
  3. using System.Linq;
  4. using System.Text;
  5. using System.Threading.Tasks;
  6. using Aitex.Core.RT.Event;
  7. using Aitex.Core.Util;
  8. using MECF.Framework.Common.Equipment;
  9. using FurnaceRT.FAs;
  10. using Aitex.Core.Common;
  11. using FabConnect.SecsGemInterface.Common;
  12. using MECF.Framework.Common.SubstrateTrackings;
  13. using MECF.Framework.Common.FAServices;
  14. using static MECF.Framework.Common.FAServices.DataVariables;
  15. using FurnaceRT.Equipments.Systems;
  16. using MECF.Framework.Common.Jobs;
  17. using Aitex.Core.RT.DataCenter;
  18. namespace FurnaceRT.Equipments.PMs
  19. {
  20. public class RecipeFACallback : IRecipeFACallback
  21. {
  22. private const string PM1RecipeStart = "RecipeStart";
  23. private const string PM1RecipeComplete = "RecipeComplete";
  24. private const string PM1RecipeStepStart = "RecipeStepStart";
  25. private const string PM1RecipeStepEnd = "RecipeStepEnd";
  26. private const string PM1RecipeFailed = "RecipeFailed";
  27. private const string PM2RecipeStart = "RecipeStart";
  28. private const string PM2RecipeComplete = "RecipeComplete";
  29. private const string PM2RecipeStepStart = "RecipeStepStart";
  30. private const string PM2RecipeStepEnd = "RecipeStepEnd";
  31. private const string PM2RecipeFailed = "RecipeFailed";
  32. private Dictionary<ModuleName, string> PMRecipeStart = new Dictionary<ModuleName, string>()
  33. {
  34. {ModuleName.PM1, PM1RecipeStart},
  35. {ModuleName.PM2, PM2RecipeStart},
  36. };
  37. private Dictionary<ModuleName, string> PMRecipeComplete = new Dictionary<ModuleName, string>()
  38. {
  39. {ModuleName.PM1, PM1RecipeComplete},
  40. {ModuleName.PM2, PM2RecipeComplete},
  41. };
  42. private Dictionary<ModuleName, string> PMRecipeStepStart = new Dictionary<ModuleName, string>()
  43. {
  44. {ModuleName.PM1, PM1RecipeStepStart},
  45. {ModuleName.PM2, PM2RecipeStepStart},
  46. };
  47. private Dictionary<ModuleName, string> PMRecipeStepEnd = new Dictionary<ModuleName, string>()
  48. {
  49. {ModuleName.PM1, PM1RecipeStepEnd},
  50. {ModuleName.PM2, PM2RecipeStepEnd},
  51. };
  52. private Dictionary<ModuleName, string> PMRecipeFailed = new Dictionary<ModuleName, string>()
  53. {
  54. {ModuleName.PM1, PM1RecipeFailed},
  55. {ModuleName.PM2, PM2RecipeFailed},
  56. };
  57. public RecipeFACallback()
  58. {
  59. EV.Subscribe(new EventItem("Event", PM1RecipeStart, PM1RecipeStart));
  60. EV.Subscribe(new EventItem("Event", PM1RecipeComplete, PM1RecipeComplete));
  61. EV.Subscribe(new EventItem("Event", PM1RecipeStepStart, PM1RecipeStepStart));
  62. EV.Subscribe(new EventItem("Event", PM1RecipeStepEnd, PM1RecipeStepEnd));
  63. EV.Subscribe(new EventItem("Event", PM1RecipeFailed, PM1RecipeFailed));
  64. EV.Subscribe(new EventItem("Event", UniversalEvents.RecipeAbnormalEnd, $"RecipeAbnormalEnd"));
  65. EV.Subscribe(new EventItem("Event", UniversalEvents.AlarmConditionTriggerReset, $"AlarmConditionTriggerReset"));
  66. EV.Subscribe(new EventItem("Event", UniversalEvents.AlarmConditionTriggerEnd, $"AlarmConditionTriggerEnd"));
  67. EV.Subscribe(new EventItem("Event", UniversalEvents.AlarmConditionTriggerHold, $"AlarmConditionTriggerHold"));
  68. EV.Subscribe(new EventItem("Event", UniversalEvents.AlarmConditionTriggerJumpStep, $"AlarmConditionTriggerJumpStep"));
  69. EV.Subscribe(new EventItem("Event", UniversalEvents.AlarmConditionTriggerCallAlarmRecipe, $"AlarmConditionTriggerCallAlarmRecipe"));
  70. EV.Subscribe(new EventItem("Event", UniversalEvents.AlarmConditionTriggerCallAbortRecipe, $"AlarmConditionTriggerCallAbortRecipe"));
  71. EV.Subscribe(new EventItem("Event", UniversalEvents.LeakCheckTriggerReset, $"LeakCheckTriggerReset"));
  72. EV.Subscribe(new EventItem("Event", UniversalEvents.LeakCheckTriggerEnd, $"LeakCheckTriggerEnd"));
  73. EV.Subscribe(new EventItem("Event", UniversalEvents.LeakCheckTriggerHold, $"LeakCheckTriggerHold"));
  74. EV.Subscribe(new EventItem("Event", UniversalEvents.LeakCheckTriggerJumpStep, $"LeakCheckTriggerJumpStep"));
  75. EV.Subscribe(new EventItem("Event", UniversalEvents.LeakCheckTriggerCallAlarmRecipe, $"LeakCheckTriggerCallAlarmRecipe"));
  76. EV.Subscribe(new EventItem("Event", UniversalEvents.LeakCheckTriggerCallAbortRecipe, $"LeakCheckTriggerCallAbortRecipe"));
  77. EV.Subscribe(new EventItem("Event", UniversalEvents.ManualTriggerRecipeHold, $"ManualTriggerRecipeHold"));
  78. EV.Subscribe(new EventItem("Event", UniversalEvents.ManualTriggerRecipeRelease, $"ManualTriggerRecipeRelease"));
  79. EV.Subscribe(new EventItem("Event", UniversalEvents.ManualTriggerRecipeSkip, $"ManualTriggerRecipeSkip"));
  80. EV.Subscribe(new EventItem("Event", UniversalEvents.ManualTriggerRecipeJump, $"ManualTriggerRecipeJump"));
  81. EV.Subscribe(new EventItem("Event", UniversalEvents.ManualTriggerRecipeAbort, $"ManualTriggerRecipeAbort"));
  82. EV.Subscribe(new EventItem("Event", UniversalEvents.RecipeTriggerReset, $"RecipeTriggerReset"));
  83. EV.Subscribe(new EventItem("Event", UniversalEvents.RecipeTriggerEnd, $"RecipeTriggerEnd"));
  84. EV.Subscribe(new EventItem("Event", UniversalEvents.RecipeTriggerHold, $"RecipeTriggerHold"));
  85. EV.Subscribe(new EventItem("Event", UniversalEvents.RecipeTriggerLeakCheck, $"RecipeTriggerLeakCheck"));
  86. EV.Subscribe(new EventItem("Event", UniversalEvents.RecipeTriggerJumpStep, $"RecipeTriggerJumpStep"));
  87. EV.Subscribe(new EventItem("Event", UniversalEvents.RecipeTriggerCallSubRecipe, $"RecipeTriggerCallSubRecipe"));
  88. //EV.Subscribe(new EventItem("Event", PM2RecipeStart, PM2RecipeStart));
  89. //EV.Subscribe(new EventItem("Event", PM2RecipeComplete, PM2RecipeComplete));
  90. //EV.Subscribe(new EventItem("Event", PM2RecipeStepStart, PM2RecipeStepStart));
  91. //EV.Subscribe(new EventItem("Event", PM2RecipeStepEnd, PM2RecipeStepEnd));
  92. //EV.Subscribe(new EventItem("Event", PM2RecipeFailed, PM2RecipeFailed));
  93. }
  94. public void RecipeComplete(string module, string recipeName)
  95. {
  96. ModuleName moduleName = ModuleHelper.Converter(module);
  97. var wafers = WaferManager.Instance.GetWafers(ModuleName.PM1);
  98. List<string> fdcwafers = new List<string>();
  99. List<string> fdcCarriers = new List<string>();
  100. List<string> fdcLotIds = new List<string>();
  101. if (wafers != null)
  102. {
  103. foreach (var wafer in wafers)
  104. {
  105. if (!(fdcCarriers.Contains(wafer.OriginCarrierID)))
  106. {
  107. fdcCarriers.Add(wafer.OriginCarrierID);
  108. }
  109. if (!(fdcwafers.Contains(wafer.WaferID)))
  110. {
  111. fdcwafers.Add(wafer.WaferID);
  112. }
  113. if (!(fdcLotIds.Contains(wafer.LotId)))
  114. {
  115. fdcLotIds.Add(wafer.LotId);
  116. }
  117. }
  118. }
  119. SECsDataItem _fdccridlst = new SECsDataItem(SECsFormat.List);
  120. foreach (var fdcid in fdcCarriers)
  121. {
  122. _fdccridlst.Add("CRID", fdcid, SECsFormat.Ascii);
  123. }
  124. SECsDataItem _fdcwaferList = new SECsDataItem(SECsFormat.List);
  125. foreach (var fdcid in fdcwafers)
  126. {
  127. _fdcwaferList.Add("CRID", fdcid, SECsFormat.Ascii);
  128. }
  129. SECsDataItem _fdcLotIds = new SECsDataItem(SECsFormat.List);
  130. foreach (var fdcid in fdcLotIds)
  131. {
  132. _fdcLotIds.Add("CRID", fdcid, SECsFormat.Ascii);
  133. }
  134. EV.Notify(PMRecipeComplete[moduleName], new SerializableDictionary<string, object>()
  135. {
  136. {DVIDName.RecipeID, recipeName},
  137. {DVIDName.StationName, module},
  138. {DataVariables.ProcessWaferIdList, _fdcwaferList},
  139. {DataVariables.ProcessCarrierIDList, _fdccridlst},
  140. {DataVariables.ProcessLotIdList, _fdcLotIds},
  141. });
  142. }
  143. public void RecipeFailed(string module, string recipeName)
  144. {
  145. ModuleName moduleName = ModuleHelper.Converter(module);
  146. EV.Notify(PMRecipeFailed[moduleName], new SerializableDictionary<string, object>()
  147. {
  148. {DVIDName.RecipeID, recipeName},
  149. {DVIDName.StationName, module},
  150. });
  151. }
  152. public void RecipeStart(string module, string recipeName)
  153. {
  154. ModuleName moduleName = ModuleHelper.Converter(module);
  155. var wafers = WaferManager.Instance.GetWafers(ModuleName.PM1);
  156. List<string> fdcwafers = new List<string>();
  157. List<string> fdcCarriers = new List<string>();
  158. List<string> fdcLotIds = new List<string>();
  159. if (wafers != null)
  160. {
  161. foreach (var wafer in wafers)
  162. {
  163. if (!(fdcCarriers.Contains(wafer.OriginCarrierID)))
  164. {
  165. fdcCarriers.Add(wafer.OriginCarrierID);
  166. }
  167. if (!(fdcwafers.Contains(wafer.WaferID)))
  168. {
  169. fdcwafers.Add(wafer.WaferID);
  170. }
  171. if (!(fdcLotIds.Contains(wafer.LotId)))
  172. {
  173. fdcLotIds.Add(wafer.LotId);
  174. }
  175. }
  176. }
  177. SECsDataItem _fdccridlst = new SECsDataItem(SECsFormat.List);
  178. foreach (var fdcid in fdcCarriers)
  179. {
  180. _fdccridlst.Add("CRID", fdcid, SECsFormat.Ascii);
  181. }
  182. SECsDataItem _fdcwaferList = new SECsDataItem(SECsFormat.List);
  183. foreach (var fdcid in fdcwafers)
  184. {
  185. _fdcwaferList.Add("CRID", fdcid, SECsFormat.Ascii);
  186. }
  187. SECsDataItem _fdcLotIds = new SECsDataItem(SECsFormat.List);
  188. foreach (var fdcid in fdcLotIds)
  189. {
  190. _fdcLotIds.Add("CRID", fdcid, SECsFormat.Ascii);
  191. }
  192. EV.Notify(PMRecipeStart[moduleName], new SerializableDictionary<string, object>()
  193. {
  194. {DVIDName.RecipeID, recipeName},
  195. {DVIDName.StationName, module},
  196. {DataVariables.ProcessWaferIdList, _fdcwaferList},
  197. {DataVariables.ProcessCarrierIDList, _fdccridlst},
  198. {DataVariables.ProcessLotIdList, _fdcLotIds},
  199. });
  200. }
  201. public void RecipeStepEnd(string module, string recipeName, int stepNumber)
  202. {
  203. ModuleName moduleName = ModuleHelper.Converter(module);
  204. EV.Notify(PMRecipeStepEnd[moduleName], new SerializableDictionary<string, object>()
  205. {
  206. {DVIDName.RecipeID, recipeName},
  207. {DVIDName.StationName, module},
  208. {DVIDName.RecipeStepNumber, (stepNumber+1).ToString()},
  209. });
  210. }
  211. public void RecipeStepStart(string module, string recipeName, int stepNumber)
  212. {
  213. ModuleName moduleName = ModuleHelper.Converter(module);
  214. EV.Notify(PMRecipeStepStart[moduleName], new SerializableDictionary<string, object>()
  215. {
  216. {DVIDName.RecipeID, recipeName},
  217. {DVIDName.StationName, module},
  218. {DVIDName.RecipeStepNumber, (stepNumber+1).ToString()},
  219. });
  220. }
  221. #region 子事件上报
  222. public void AlarmConditionTriggerReset(string module, string recipeName, string stepNumber, string otherRecipeName)
  223. {
  224. EV.Notify(UniversalEvents.AlarmConditionTriggerReset, new SerializableDictionary<string, object>()
  225. {
  226. {DVIDName.RecipeID, recipeName},
  227. {DVIDName.RecipeStepNumber, stepNumber},
  228. {DVIDName.RecipeName, otherRecipeName},
  229. });
  230. }
  231. public void AlarmConditionTriggerEnd(string module, string recipeName, string stepNumber)
  232. {
  233. ModuleName moduleName = ModuleHelper.Converter(module);
  234. EV.Notify(UniversalEvents.AlarmConditionTriggerEnd, new SerializableDictionary<string, object>()
  235. {
  236. {DVIDName.RecipeID, recipeName},
  237. {DVIDName.RecipeStepNumber, stepNumber},
  238. });
  239. }
  240. public void AlarmConditionTriggerHold(string module, string recipeName, string stepNumber)
  241. {
  242. ModuleName moduleName = ModuleHelper.Converter(module);
  243. EV.Notify(UniversalEvents.AlarmConditionTriggerHold, new SerializableDictionary<string, object>()
  244. {
  245. {DVIDName.RecipeID, recipeName},
  246. {DVIDName.RecipeStepNumber, stepNumber},
  247. });
  248. }
  249. public void AlarmConditionTriggerJumpStep(string module, string recipeName, string stepNumber, string stepId)
  250. {
  251. ModuleName moduleName = ModuleHelper.Converter(module);
  252. EV.Notify(UniversalEvents.AlarmConditionTriggerJumpStep, new SerializableDictionary<string, object>()
  253. {
  254. {DVIDName.RecipeID, recipeName},
  255. {DVIDName.RecipeStepNumber, stepNumber},
  256. {DataVariables.StepId, stepId},
  257. });
  258. }
  259. public void AlarmConditionTriggerCallAlarmRecipe(string module, string recipeName, string stepNumber, string otherRecipeName)
  260. {
  261. ModuleName moduleName = ModuleHelper.Converter(module);
  262. EV.Notify(UniversalEvents.AlarmConditionTriggerCallAlarmRecipe, new SerializableDictionary<string, object>()
  263. {
  264. {DVIDName.RecipeID, recipeName},
  265. {DVIDName.RecipeStepNumber, stepNumber},
  266. {DVIDName.RecipeName, otherRecipeName},
  267. });
  268. }
  269. public void AlarmConditionTriggerCallAbortRecipe(string module, string recipeName, string stepNumber, string otherRecipeName)
  270. {
  271. ModuleName moduleName = ModuleHelper.Converter(module);
  272. EV.Notify(UniversalEvents.AlarmConditionTriggerCallAbortRecipe, new SerializableDictionary<string, object>()
  273. {
  274. {DVIDName.RecipeID, recipeName},
  275. {DVIDName.RecipeStepNumber, stepNumber},
  276. {DVIDName.RecipeName, otherRecipeName},
  277. });
  278. }
  279. public void LeakCheckTriggerReset(string module, string recipeName, string stepNumber, string otherRecipeName)
  280. {
  281. ModuleName moduleName = ModuleHelper.Converter(module);
  282. EV.Notify(UniversalEvents.LeakCheckTriggerReset, new SerializableDictionary<string, object>()
  283. {
  284. {DVIDName.RecipeID, recipeName},
  285. {DVIDName.RecipeStepNumber, stepNumber},
  286. });
  287. }
  288. public void LeakCheckTriggerEnd(string module, string recipeName, string stepNumber)
  289. {
  290. ModuleName moduleName = ModuleHelper.Converter(module);
  291. EV.Notify(UniversalEvents.LeakCheckTriggerEnd, new SerializableDictionary<string, object>()
  292. {
  293. {DVIDName.RecipeID, recipeName},
  294. {DVIDName.RecipeStepNumber, stepNumber},
  295. });
  296. }
  297. public void LeakCheckTriggerHold(string module, string recipeName, string stepNumber)
  298. {
  299. ModuleName moduleName = ModuleHelper.Converter(module);
  300. EV.Notify(UniversalEvents.LeakCheckTriggerHold, new SerializableDictionary<string, object>()
  301. {
  302. {DVIDName.RecipeID, recipeName},
  303. {DVIDName.RecipeStepNumber, stepNumber},
  304. });
  305. }
  306. public void LeakCheckTriggerJumpStep(string module, string recipeName, string stepNumber, string stepId)
  307. {
  308. ModuleName moduleName = ModuleHelper.Converter(module);
  309. EV.Notify(UniversalEvents.LeakCheckTriggerJumpStep, new SerializableDictionary<string, object>()
  310. {
  311. {DVIDName.RecipeID, recipeName},
  312. {DVIDName.RecipeStepNumber, stepNumber},
  313. {DataVariables.StepId, stepId},
  314. });
  315. }
  316. public void LeakCheckTriggerCallAlarmRecipe(string module, string recipeName, string stepNumber, string otherRecipeName)
  317. {
  318. ModuleName moduleName = ModuleHelper.Converter(module);
  319. EV.Notify(UniversalEvents.LeakCheckTriggerCallAlarmRecipe, new SerializableDictionary<string, object>()
  320. {
  321. {DVIDName.RecipeID, recipeName},
  322. {DVIDName.RecipeStepNumber, stepNumber},
  323. {DVIDName.RecipeName, otherRecipeName},
  324. });
  325. }
  326. public void LeakCheckTriggerCallAbortRecipe(string module, string recipeName, string stepNumber, string otherRecipeName)
  327. {
  328. ModuleName moduleName = ModuleHelper.Converter(module);
  329. EV.Notify(UniversalEvents.LeakCheckTriggerCallAbortRecipe, new SerializableDictionary<string, object>()
  330. {
  331. {DVIDName.RecipeID, recipeName},
  332. {DVIDName.RecipeStepNumber, stepNumber},
  333. {DVIDName.RecipeName, otherRecipeName},
  334. });
  335. }
  336. public void ManualTriggerRecipeHold(string module, string recipeName, string stepNumber)
  337. {
  338. ModuleName moduleName = ModuleHelper.Converter(module);
  339. EV.Notify(UniversalEvents.ManualTriggerRecipeHold, new SerializableDictionary<string, object>()
  340. {
  341. {DVIDName.RecipeID, recipeName},
  342. {DVIDName.RecipeStepNumber, stepNumber},
  343. });
  344. }
  345. public void ManualTriggerRecipeRelease(string module, string recipeName, string stepNumber)
  346. {
  347. ModuleName moduleName = ModuleHelper.Converter(module);
  348. EV.Notify(UniversalEvents.ManualTriggerRecipeRelease, new SerializableDictionary<string, object>()
  349. {
  350. {DVIDName.RecipeID, recipeName},
  351. {DVIDName.RecipeStepNumber, stepNumber},
  352. });
  353. }
  354. public void ManualTriggerRecipeSkip(string module, string recipeName, string stepNumber)
  355. {
  356. ModuleName moduleName = ModuleHelper.Converter(module);
  357. EV.Notify(UniversalEvents.ManualTriggerRecipeSkip, new SerializableDictionary<string, object>()
  358. {
  359. {DVIDName.RecipeID, recipeName},
  360. {DVIDName.RecipeStepNumber, stepNumber},
  361. });
  362. }
  363. public void ManualTriggerRecipeJump(string module, string recipeName, string stepNumber, string stepId)
  364. {
  365. ModuleName moduleName = ModuleHelper.Converter(module);
  366. EV.Notify(UniversalEvents.ManualTriggerRecipeJump, new SerializableDictionary<string, object>()
  367. {
  368. {DVIDName.RecipeID, recipeName},
  369. {DVIDName.RecipeStepNumber,stepNumber},
  370. {DataVariables.StepId, stepId},
  371. });
  372. }
  373. public void ManualTriggerRecipeAbort(string module, string recipeName, string stepNumber, string otherRecipeName)
  374. {
  375. ModuleName moduleName = ModuleHelper.Converter(module);
  376. EV.Notify(UniversalEvents.ManualTriggerRecipeAbort, new SerializableDictionary<string, object>()
  377. {
  378. {DVIDName.RecipeID, recipeName},
  379. {DVIDName.RecipeStepNumber, stepNumber},
  380. {DVIDName.RecipeName, otherRecipeName},
  381. });
  382. }
  383. public void RecipeTriggerReset(string module, string recipeName, string stepNumber, string otherRecipeName)
  384. {
  385. ModuleName moduleName = ModuleHelper.Converter(module);
  386. EV.Notify(UniversalEvents.RecipeTriggerReset, new SerializableDictionary<string, object>()
  387. {
  388. {DVIDName.RecipeID, recipeName},
  389. {DVIDName.RecipeStepNumber, stepNumber},
  390. {DVIDName.RecipeName, otherRecipeName},
  391. });
  392. }
  393. public void RecipeTriggerEnd(string module, string recipeName, string stepNumber)
  394. {
  395. ModuleName moduleName = ModuleHelper.Converter(module);
  396. EV.Notify(UniversalEvents.RecipeTriggerEnd, new SerializableDictionary<string, object>()
  397. {
  398. {DVIDName.RecipeID, recipeName},
  399. {DVIDName.RecipeStepNumber, stepNumber},
  400. });
  401. }
  402. public void RecipeTriggerHold(string module, string recipeName, string stepNumber)
  403. {
  404. ModuleName moduleName = ModuleHelper.Converter(module);
  405. EV.Notify(UniversalEvents.RecipeTriggerHold, new SerializableDictionary<string, object>()
  406. {
  407. {DVIDName.RecipeID, recipeName},
  408. {DVIDName.RecipeStepNumber, stepNumber},
  409. });
  410. }
  411. public void RecipeTriggerLeakCheck(string module, string recipeName, string stepNumber)
  412. {
  413. ModuleName moduleName = ModuleHelper.Converter(module);
  414. EV.Notify(UniversalEvents.RecipeTriggerLeakCheck, new SerializableDictionary<string, object>()
  415. {
  416. {DVIDName.RecipeID, recipeName},
  417. {DVIDName.RecipeStepNumber, stepNumber},
  418. });
  419. }
  420. public void RecipeTriggerJumpStep(string module, string recipeName, string stepNumber, string stepId)
  421. {
  422. ModuleName moduleName = ModuleHelper.Converter(module);
  423. EV.Notify(UniversalEvents.RecipeTriggerJumpStep, new SerializableDictionary<string, object>()
  424. {
  425. {DVIDName.RecipeID, recipeName},
  426. {DVIDName.RecipeStepNumber, stepNumber},
  427. {DataVariables.StepId, stepId},
  428. });
  429. }
  430. public void RecipeTriggerCallSubRecipe(string module, string recipeName, string stepNumber, string otherRecipeName)
  431. {
  432. ModuleName moduleName = ModuleHelper.Converter(module);
  433. EV.Notify(UniversalEvents.RecipeTriggerCallSubRecipe, new SerializableDictionary<string, object>()
  434. {
  435. {DVIDName.RecipeID, recipeName},
  436. {DVIDName.RecipeStepNumber, stepNumber},
  437. {DVIDName.RecipeName, otherRecipeName},
  438. });
  439. }
  440. #endregion
  441. }
  442. }