FurnaceELK/Furnace/FurnaceRT/Config/Parameter/AlarmCondition/ParameterFormat.xml

<?xml version="1.0" encoding="utf-8"?>
<Aitex>
	<TableParameterFormat ChamberType="AlarmCondition" Version="1.0"  TableNumber="200">

		<!--###########################################-->
		<Catalog DisplayName="ParameterInfo">
			<Group DisplayName="Parameter Information">
				<Step ModuleName="" DeviceType="" DisplayName="No." ControlName="TableNo" InputType="ReadOnly" />
				<Step ModuleName="" DeviceType="" DisplayName="Name" ControlName="Name" InputType="TextInput" />
				<!--<Step ModuleName="" DeviceType="" DisplayName="Use Temp" ControlName="UseTemp" InputType="NumInput" InputMode="" Min="0" Max="99999"  />-->
			</Group>
		</Catalog>
		<!--###########################################-->
		<Catalog DisplayName="Table">
			<Group DisplayName="TempHeater" ControlName="TempHeater" TableNumber="5" NameList="U,CU,C,CL,L">
				<Step ModuleName="" DeviceType="" DisplayName="Name" ControlName="Name" InputType="TextInput" />
				<Step ModuleName="" DeviceType="" DisplayName="Check" DefaultValue="ON" ControlName="AlarmCheck" InputType="TextInput" Description=""/>
				<Step ModuleName="" DeviceType="" DisplayName="Dev.High" DefaultValue="0.0" ControlName="AlarmDevHigh" InputType="DoubleInput" InputMode=""  Min="0" Max="99999"/>
				<Step ModuleName="" DeviceType="" DisplayName="Dev.Low" DefaultValue="0.0" ControlName="AlarmDevLow" InputType="DoubleInput" InputMode=""  Min="0" Max="99999"/>
				<Step ModuleName="" DeviceType="" DisplayName="Unit" DefaultValue="℃" ControlName="AlarmUnit" InputType="TextInput" />
				<Step ModuleName="" DeviceType="" DisplayName="DelayTime" DefaultValue="0" ControlName="AlarmDelayTime" InputType="DoubleInput" InputMode=""  Min="0" Max="99999" />
				<Step ModuleName="" DeviceType="" DisplayName="Time" DefaultValue="0" ControlName="AlarmTime" InputType="DoubleInput" InputMode=""  Min="0" Max="99999" />
				<Step ModuleName="" DeviceType="" DisplayName="Error Command" DefaultValue="Monitor" ControlName="AlarmErrorCommand" InputType="TextInput" />
				<Step ModuleName="" DeviceType="" DisplayName="Check" DefaultValue="ON" ControlName="ErrorCheck" InputType="TextInput" Description=""/>
				<Step ModuleName="" DeviceType="" DisplayName="Dev.High" DefaultValue="0.0" ControlName="ErrorDevHigh" InputType="DoubleInput" InputMode=""  Min="0" Max="99999"/>
				<Step ModuleName="" DeviceType="" DisplayName="Dev.Low" DefaultValue="0.0" ControlName="ErrorDevLow" InputType="DoubleInput" InputMode=""  Min="0" Max="99999"/>
				<Step ModuleName="" DeviceType="" DisplayName="Unit" DefaultValue="℃" ControlName="ErrorUnit" InputType="TextInput" />
				<Step ModuleName="" DeviceType="" DisplayName="DelayTime" DefaultValue="0" ControlName="ErrorDelayTime" InputType="DoubleInput" InputMode=""  Min="0" Max="99999" />
				<Step ModuleName="" DeviceType="" DisplayName="Time" DefaultValue="0" ControlName="ErrorTime" InputType="DoubleInput" InputMode=""  Min="0" Max="99999"  />
				<Step ModuleName="" DeviceType="" DisplayName="Error Command" DefaultValue="Buzzer" ControlName="ErrorErrorCommand" InputType="TextInput" />
			</Group>
			<Group DisplayName="TempBoat" ControlName="TempBoat" TableNumber="2" NameList="Boat Load,Boat Unload" Description="BoatLoad/Unload">
				<Step ModuleName="" DeviceType="" DisplayName="Check" DefaultValue="ON" ControlName="AlarmCheck" InputType="TextInput" Description=""/>
				<Step ModuleName="" DeviceType="" DisplayName="High Limit" DefaultValue="0.0" ControlName="HighLimit" InputType="DoubleInput" InputMode=""  Min="0" Max="99999"/>
				<Step ModuleName="" DeviceType="" DisplayName="Unit" DefaultValue="℃" ControlName="Unit" InputType="TextInput" />
			</Group>
			<Group DisplayName="FlowDeviation"  ControlName="MFCFlowDeviation"  TableNumber="19" NameList="MFC1,MFC2,MFC3,MFC4,MFC5,MFC6,MFC7,MFC8,MFC9,MFC10,MFC11,MFC12,MFC13,MFC14,MFC15,MFC16,MFC17,MFC31,MFC32">
				<Step ModuleName="" DeviceType="" DisplayName="Name" ControlName="Name" InputType="TextInput" />
				<Step ModuleName="" DeviceType="" DisplayName="Check" DefaultValue="ON" ControlName="AlarmCheck" InputType="TextInput" Description=""/>
				<Step ModuleName="" DeviceType="" DisplayName="Dev.High" DefaultValue="0.0" ControlName="AlarmDevHigh" InputType="DoubleInput" InputMode=""  Min="0" Max="99999"/>
				<Step ModuleName="" DeviceType="" DisplayName="Dev.Low" DefaultValue="0.0" ControlName="AlarmDevLow" InputType="DoubleInput" InputMode=""  Min="0" Max="99999"/>
				<Step ModuleName="" DeviceType="" DisplayName="Unit" DefaultValue="℃" ControlName="AlarmUnit" InputType="TextInput" />
				<Step ModuleName="" DeviceType="" DisplayName="DelayTime" DefaultValue="0" ControlName="AlarmDelayTime" InputType="DoubleInput" InputMode=""  Min="0" Max="99999" />
				<Step ModuleName="" DeviceType="" DisplayName="Time" DefaultValue="0" ControlName="AlarmTime" InputType="DoubleInput" InputMode=""  Min="0" Max="99999" />
				<Step ModuleName="" DeviceType="" DisplayName="Error Command" DefaultValue="Buzzer" ControlName="AlarmErrorCommand" InputType="TextInput" />
				<Step ModuleName="" DeviceType="" DisplayName="Check" DefaultValue="ON" ControlName="ErrorCheck" InputType="TextInput" Description=""/>
				<Step ModuleName="" DeviceType="" DisplayName="Dev.High" DefaultValue="0.0" ControlName="ErrorDevHigh" InputType="DoubleInput" InputMode=""  Min="0" Max="99999"/>
				<Step ModuleName="" DeviceType="" DisplayName="Dev.Low" DefaultValue="0.0" ControlName="ErrorDevLow" InputType="DoubleInput" InputMode=""  Min="0" Max="99999"/>
				<Step ModuleName="" DeviceType="" DisplayName="Unit" DefaultValue="℃" ControlName="ErrorUnit" InputType="TextInput" />
                <Step ModuleName="" DeviceType="" DisplayName="DelayTime" DefaultValue="0" ControlName="ErrorDelayTime" InputType="DoubleInput" InputMode=""  Min="0" Max="99999" />
				<Step ModuleName="" DeviceType="" DisplayName="Time" DefaultValue="0" ControlName="ErrorTime" InputType="DoubleInput" InputMode=""  Min="0" Max="99999"  />
				<Step ModuleName="" DeviceType="" DisplayName="Error Command" DefaultValue="Buzzer" ControlName="ErrorErrorCommand" InputType="TextInput" />
			</Group>
			<Group DisplayName="Press" ControlName="Press" TableNumber="3" NameList="Press 1,Press 2,APC Angle">
				<Step ModuleName="" DeviceType="" DisplayName="Name" ControlName="Name" InputType="TextInput" />
				<Step ModuleName="" DeviceType="" DisplayName="Check" DefaultValue="ON" ControlName="AlarmCheck" InputType="TextInput" Description=""/>
				<Step ModuleName="" DeviceType="" DisplayName="Dev.High" DefaultValue="0.0" ControlName="AlarmDevHigh" InputType="DoubleInput" InputMode=""  Min="0" Max="99999"/>
				<Step ModuleName="" DeviceType="" DisplayName="Dev.Low" DefaultValue="0.0" ControlName="AlarmDevLow" InputType="DoubleInput" InputMode=""  Min="0" Max="99999"/>
				<Step ModuleName="" DeviceType="" DisplayName="Unit" DefaultValue="Torr" ControlName="AlarmUnit" InputType="TextInput" />
				<Step ModuleName="" DeviceType="" DisplayName="DelayTime" DefaultValue="0" ControlName="AlarmDelayTime" InputType="DoubleInput" InputMode=""  Min="0" Max="99999" />
				<Step ModuleName="" DeviceType="" DisplayName="Time" DefaultValue="0" ControlName="AlarmTime" InputType="DoubleInput" InputMode=""  Min="0" Max="99999"  />
				<Step ModuleName="" DeviceType="" DisplayName="Error Command" DefaultValue="Monitor" ControlName="AlarmErrorCommand" InputType="TextInput" />
				<Step ModuleName="" DeviceType="" DisplayName="Check" DefaultValue="ON" ControlName="ErrorCheck" InputType="TextInput" Description=""/>
				<Step ModuleName="" DeviceType="" DisplayName="Dev.High" DefaultValue="0.0" ControlName="ErrorDevHigh" InputType="DoubleInput" InputMode=""  Min="0" Max="99999"/>
				<Step ModuleName="" DeviceType="" DisplayName="Dev.Low" DefaultValue="0.0" ControlName="ErrorDevLow" InputType="DoubleInput" InputMode=""  Min="0" Max="99999"/>
				<Step ModuleName="" DeviceType="" DisplayName="Unit" DefaultValue="Torr" ControlName="ErrorUnit" InputType="TextInput" />
				<Step ModuleName="" DeviceType="" DisplayName="DelayTime" DefaultValue="0" ControlName="ErrorDelayTime" InputType="DoubleInput" InputMode=""  Min="0" Max="99999" />
				<Step ModuleName="" DeviceType="" DisplayName="Time" DefaultValue="0" ControlName="ErrorTime" InputType="DoubleInput" InputMode=""  Min="0" Max="99999"  />
				<Step ModuleName="" DeviceType="" DisplayName="Error Command" DefaultValue="Monitor" ControlName="ErrorErrorCommand" InputType="TextInput" />
			</Group>
			<Group DisplayName="AUX" ControlName="AUX" TableNumber="101" NameList="">
				<Step ModuleName="" DeviceType="" DisplayName="Name" ControlName="Name" InputType="TextInput" />
				<Step ModuleName="" DeviceType="" DisplayName="Check" DefaultValue="ON" ControlName="AlarmCheck" InputType="TextInput" Description=""/>
				<Step ModuleName="" DeviceType="" DisplayName="Dev.High" DefaultValue="0.0" ControlName="AlarmDevHigh" InputType="DoubleInput" InputMode=""  Min="0" Max="99999"/>
				<Step ModuleName="" DeviceType="" DisplayName="Dev.Low" DefaultValue="0.0" ControlName="AlarmDevLow" InputType="DoubleInput" InputMode=""  Min="0" Max="99999"/>
				<Step ModuleName="" DeviceType="" DisplayName="Unit" DefaultValue="%fs" ControlName="AlarmUnit" InputType="TextInput" />
				<Step ModuleName="" DeviceType="" DisplayName="Time" DefaultValue="0" ControlName="AlarmTime" InputType="DoubleInput" InputMode=""  Min="0" Max="99999"  />
				<Step ModuleName="" DeviceType="" DisplayName="Error Command" DefaultValue="Monitor" ControlName="AlarmErrorCommand" InputType="TextInput" />
				<Step ModuleName="" DeviceType="" DisplayName="Check" DefaultValue="ON" ControlName="ErrorCheck" InputType="TextInput" Description=""/>
				<Step ModuleName="" DeviceType="" DisplayName="Dev.High" DefaultValue="0.0" ControlName="ErrorDevHigh" InputType="DoubleInput" InputMode=""  Min="0" Max="99999"/>
				<Step ModuleName="" DeviceType="" DisplayName="Dev.Low" DefaultValue="0.0" ControlName="ErrorDevLow" InputType="DoubleInput" InputMode=""  Min="0" Max="99999"/>
				<Step ModuleName="" DeviceType="" DisplayName="Unit" DefaultValue="%fs" ControlName="ErrorUnit" InputType="TextInput" />
				<Step ModuleName="" DeviceType="" DisplayName="Time" DefaultValue="0" ControlName="ErrorTime" InputType="DoubleInput" InputMode=""  Min="0" Max="99999"  />
				<Step ModuleName="" DeviceType="" DisplayName="Error Command" DefaultValue="Monitor" ControlName="ErrorErrorCommand" InputType="TextInput" />
			</Group>
			<Group DisplayName="HWILK" ControlName="HWILK" TableNumber="68" NameList="N2_8,N2_1,H2,NH3,NO,N2_2,O2,C3H6,F2,N2_10,N2_11,N2_9,N2_7,AIR1,N2_4,N2_5,N2_6,H_EXH,G_EXH,S_EXH,L_EXH,R_EXH,V_EXH,O_HT,TEMP1HTR,TEMP2SCR,TEMP3HTR1,TEMP4HTR2,TEMP5HTR3,W_LEAK1,W_LEAK2,LSC_LEAK,PWR_DOWN,F_PNL,T_PNL,H_PNL,PU1_DOWN,PU1_ALARM,PU1_WARNIN,PU2_DOWN,PU2_ALARM,PU2_WARNIN,R_VG11,R_VG13,R_VG21,APC,O_PRS,CK_PRS,G_PNL,MAIN_WAT1,SUB_WAT2,C_UTA313,C_UTA311,C_UTMS5,C_UTTEMP,P_CNTILK,RHC_FAIL,RHC_DMR,RHC_BWR,NDIR_ERROR,NDIR_TEMP,NDIR_LO,NDIR_HI,NDIR_FAN,R_VG32,R_VG33,AR1_SYS_NG,AR1_ALARM,AR1_WARN,HCD_HH,HCD_HI,HCD_LO,LSC1_Z_P,HCD_FLOAT,RENA_HH,RENA_HI,RENA_LO,LSC2_Z_P,RENA_FLOAT,SMOKE_SYS2,SMOKE_ALM2,GAS_TEMP,EXH_TEMP,HTR_A,CAP_TEMP,CLN_TEMP,HCL_LEAK1,NH3_LEAK1,F2_LEAK1,DET_ALM2,SMOKE_SYS,SMOKE_ALM,C3H6_LEAK1,NO_LEAK1,DMA_LEAK1,UPS_ALARM,HOT_N2ALM,F_EXH_TEMP,S1_SYS_NG,SCR1_WARN,SCR1_ALARM,AR2_SYS_NG,AR2_ALARM,AR2_WARN" Description="">
				<Step ModuleName="" DeviceType="" DisplayName="Index" ControlName="Index" InputType="NumInput" InputMode="" Min="0" Max="99999"  />
				<Step ModuleName="" DeviceType="" DisplayName="InterLockName" ControlName="InterLockName" InputType="TextInput" />
				<Step ModuleName="" DeviceType="" DisplayName="Check" DefaultValue="ON" ControlName="AlarmCheck" InputType="TextInput" Description=""/>
				<Step ModuleName="" DeviceType="" DisplayName="Error Command" DefaultValue="Monitor" ControlName="ErrorCommand" InputType="TextInput" />
			</Group>
			<Group DisplayName="ValveILK" ControlName="ValveILK" TableNumber="1" NameList="Valve Interlock" Description="">
				<Step ModuleName="" DeviceType="" DisplayName="Index" ControlName="Index" InputType="NumInput" InputMode="" Min="0" Max="99999"  />
				<Step ModuleName="" DeviceType="" DisplayName="Name" ControlName="Name" InputType="TextInput" />
				<Step ModuleName="" DeviceType="" DisplayName="Check" DefaultValue="ON" ControlName="AlarmCheck" InputType="TextInput" Description=""/>
				<Step ModuleName="" DeviceType="" DisplayName="Error Command" DefaultValue="Monitor" ControlName="ErrorCommand" InputType="TextInput" />
			</Group>
			<Group DisplayName="TempController" ControlName="TempController" TableNumber="10" NameList="TC Open Error,TC Short Error,Limit Temperature Error,A/D Conversion Value Error,Sub Heater TC Open Error,Sub Heater Limit Temperature Error,Sub Heater A/D Conversion Value Error,Overheat Limit Temperature Error,Overheat Error,Overheat AD Conversion Value Error" Description="">
				<Step ModuleName="" DeviceType="" DisplayName="Index" ControlName="Index" InputType="NumInput" InputMode="" Min="0" Max="99999"  />
				<Step ModuleName="" DeviceType="" DisplayName="Name" ControlName="Name" InputType="TextInput" />
				<Step ModuleName="" DeviceType="" DisplayName="Check" DefaultValue="ON" ControlName="AlarmCheck" InputType="TextInput" Description=""/>
				<Step ModuleName="" DeviceType="" DisplayName="Error Command" DefaultValue="Monitor" ControlName="ErrorCommand" InputType="TextInput" />
			</Group>
			<Group DisplayName="APCController" ControlName="APCController" TableNumber="0" NameList="" Description="">
				<Step ModuleName="" DeviceType="" DisplayName="Index" ControlName="Index" InputType="NumInput" InputMode="" Min="0" Max="99999"  />
				<Step ModuleName="" DeviceType="" DisplayName="Name" ControlName="Name" InputType="TextInput" />
				<Step ModuleName="" DeviceType="" DisplayName="Check" DefaultValue="ON" ControlName="AlarmCheck" InputType="TextInput" Description=""/>
				<Step ModuleName="" DeviceType="" DisplayName="Error Command" DefaultValue="Monitor" ControlName="ErrorCommand" InputType="TextInput" />
			</Group>
			<Group DisplayName="CLNAlarm" ControlName="CLNAlarm" TableNumber="2" NameList="temp range warning,temp range alarm,CLN warning,CLN alarm" Description="">
				<Step ModuleName="" DeviceType="" DisplayName="Index" ControlName="Index" InputType="NumInput" InputMode="" Min="0" Max="99999"  />
				<Step ModuleName="" DeviceType="" DisplayName="Name" ControlName="Name" InputType="TextInput" />
				<Step ModuleName="" DeviceType="" DisplayName="Check" DefaultValue="ON" ControlName="AlarmCheck" InputType="TextInput" Description=""/>
				<Step ModuleName="" DeviceType="" DisplayName="Error Command" DefaultValue="Monitor" ControlName="ErrorCommand" InputType="TextInput" />
			</Group>
			<Group DisplayName="TransferError" ControlName="TransferError" TableNumber="1" NameList="RoBo Command Error" Description="">
				<Step ModuleName="" DeviceType="" DisplayName="Index" ControlName="Index" InputType="NumInput" InputMode="" Min="0" Max="99999"  />
				<Step ModuleName="" DeviceType="" DisplayName="Name" ControlName="Name" InputType="TextInput" />
				<Step ModuleName="" DeviceType="" DisplayName="Check" DefaultValue="ON" ControlName="AlarmCheck" InputType="TextInput" Description=""/>
				<Step ModuleName="" DeviceType="" DisplayName="Error Command" DefaultValue="Monitor" ControlName="ErrorCommand" InputType="TextInput" />
			</Group>
			<Group DisplayName="SerialLineDown" ControlName="SerialLineDown" TableNumber="2" NameList="Temperature Controller Line Down,APC Controller Line Down" Description="">
				<Step ModuleName="" DeviceType="" DisplayName="Index" ControlName="Index" InputType="NumInput" InputMode="" Min="0" Max="99999"  />
				<Step ModuleName="" DeviceType="" DisplayName="Name" ControlName="Name" InputType="TextInput" />
				<Step ModuleName="" DeviceType="" DisplayName="Check" DefaultValue="ON" ControlName="AlarmCheck" InputType="TextInput" Description=""/>
				<Step ModuleName="" DeviceType="" DisplayName="Error Command" DefaultValue="Monitor" ControlName="ErrorCommand" InputType="TextInput" />
			</Group>
			<Group DisplayName="LanLineDown" ControlName="LanLineDown" TableNumber="1" NameList="PMC - RoBo5000 Line Down" Description="">
				<Step ModuleName="" DeviceType="" DisplayName="Index" ControlName="Index" InputType="NumInput" InputMode="" Min="0" Max="99999"  />
				<Step ModuleName="" DeviceType="" DisplayName="Name" ControlName="Name" InputType="TextInput" />
				<Step ModuleName="" DeviceType="" DisplayName="Check" DefaultValue="ON" ControlName="AlarmCheck" InputType="TextInput" Description=""/>
				<Step ModuleName="" DeviceType="" DisplayName="Error Command" DefaultValue="Monitor" ControlName="ErrorCommand" InputType="TextInput" />
			</Group>
			<!--<Group DisplayName="DeviceNetLineDown" ControlName="DeviceNetLineDown" TableNumber="7" NameList="Sequencer Line Down,MFCDNET-1 Line Down,MFCDNET-2 Line Down,MFCDNET-3 Line Down,MFCDNET-4 Line Down,Hardware Gas Pattern Panel-1 Line Down,Hardware Gas Pattern Panel-2 Line Down" Description="">
				<Step ModuleName="" DeviceType="" DisplayName="Index" ControlName="Index" InputType="NumInput" InputMode="" Min="0" Max="99999"  />
				<Step ModuleName="" DeviceType="" DisplayName="Name" ControlName="Name" InputType="TextInput" />
				<Step ModuleName="" DeviceType="" DisplayName="Check" DefaultValue="ON" ControlName="AlarmCheck" InputType="TextInput" Description=""/>
				<Step ModuleName="" DeviceType="" DisplayName="Error Command" DefaultValue="Monitor" ControlName="ErrorCommand" InputType="TextInput" />
			</Group>-->
			<Group DisplayName="Sensor"  ControlName="Sensor" TableNumber="0" NameList="">
				<Step ModuleName="" DeviceType="" DisplayName="Name" ControlName="Name" InputType="TextInput" />
				<Step ModuleName="" DeviceType="" DisplayName="Check" DefaultValue="ON" ControlName="AlarmCheck" InputType="TextInput" Description=""/>
				<Step ModuleName="" DeviceType="" DisplayName="Dev.High" DefaultValue="0.0" ControlName="AlarmDevHigh" InputType="DoubleInput" InputMode=""  Min="0" Max="99999"/>
				<Step ModuleName="" DeviceType="" DisplayName="Dev.Low" DefaultValue="0.0" ControlName="AlarmDevLow" InputType="DoubleInput" InputMode=""  Min="0" Max="99999"/>
				<Step ModuleName="" DeviceType="" DisplayName="Unit" DefaultValue="%fs" ControlName="AlarmUnit" InputType="TextInput" />
				<Step ModuleName="" DeviceType="" DisplayName="Time" DefaultValue="0" ControlName="AlarmTime" InputType="DoubleInput" InputMode=""  Min="0" Max="99999"  />
				<Step ModuleName="" DeviceType="" DisplayName="Error Command" DefaultValue="Monitor" ControlName="AlarmErrorCommand" InputType="TextInput" />
				<Step ModuleName="" DeviceType="" DisplayName="Check" DefaultValue="ON" ControlName="ErrorCheck" InputType="TextInput" Description=""/>
				<Step ModuleName="" DeviceType="" DisplayName="Dev.High" DefaultValue="0.0" ControlName="ErrorDevHigh" InputType="DoubleInput" InputMode=""  Min="0" Max="99999"/>
				<Step ModuleName="" DeviceType="" DisplayName="Dev.Low" DefaultValue="0.0" ControlName="ErrorDevLow" InputType="DoubleInput" InputMode=""  Min="0" Max="99999"/>
				<Step ModuleName="" DeviceType="" DisplayName="Unit" DefaultValue="%fs" ControlName="ErrorUnit" InputType="TextInput" />
				<Step ModuleName="" DeviceType="" DisplayName="Time" DefaultValue="0" ControlName="ErrorTime" InputType="DoubleInput" InputMode=""  Min="0" Max="99999"  />
				<Step ModuleName="" DeviceType="" DisplayName="Error Command" DefaultValue="Monitor" ControlName="ErrorErrorCommand" InputType="TextInput" />
			</Group>
			<Group DisplayName="Other" ControlName="Other" TableNumber="1" NameList="Step HOLD Check" Description="">
				<Step ModuleName="" DeviceType="" DisplayName="Index" ControlName="Index" InputType="NumInput" InputMode="" Min="0" Max="99999"  />
				<Step ModuleName="" DeviceType="" DisplayName="Name" ControlName="Name" InputType="TextInput" />
				<Step ModuleName="" DeviceType="" DisplayName="Check" DefaultValue="ON" ControlName="AlarmCheck" InputType="TextInput" Description=""/>
				<Step ModuleName="" DeviceType="" DisplayName="Error Command" DefaultValue="Monitor" ControlName="ErrorCommand" InputType="TextInput" />
			</Group>
		</Catalog>
	</TableParameterFormat>

	<TableParameterSchema>
		<xs:schema attributeFormDefault="unqualified" elementFormDefault="qualified" xmlns:xs="http://www.w3.org/2001/XMLSchema">
			<xs:simpleType name="booleanType">
				<xs:restriction base="xs:string">
					<xs:enumeration value="0" />
					<xs:enumeration value="1" />
					<xs:enumeration value="False" />
					<xs:enumeration value="True" />
					<xs:enumeration value="false" />
					<xs:enumeration value="true" />
				</xs:restriction>
			</xs:simpleType>
			<xs:element name="TableParameterData">
				<xs:complexType>
					<xs:sequence>
						<xs:element maxOccurs="unbounded" name="Step">
							<xs:complexType>
								<xs:attribute name="TableNo" type="xs:string" use="required" />
								<xs:attribute name="Name" type="xs:string" use="required" />
								<xs:attribute name="Type" type="xs:string" use="required" />
								<xs:attribute name="UseTemp" type="xs:decimal" use="required" />
							</xs:complexType>
						</xs:element>
					</xs:sequence>
					<xs:attribute name="ParameterChamberType" type="xs:string" fixed="Parameter" use="required" />
					<xs:attribute name="ParameterType" type="xs:string" use="required" />
					<xs:attribute name="ParameterVersion" type="xs:string" fixed="1.0" use="required" />
					<xs:attribute name="CreatedBy" type="xs:string" use="required" />
					<xs:attribute name="CreationTime" type="xs:dateTime" use="required" />
					<xs:attribute name="LastRevisedBy" type="xs:string" use="required" />
					<xs:attribute name="LastRevisionTime" type="xs:dateTime" use="required" />
					<xs:attribute name="Description" type="xs:string" use="required" />
				</xs:complexType>
			</xs:element>
		</xs:schema>
	</TableParameterSchema>
</Aitex>