PMN2Purge.cs 39 KB

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  1. using Aitex.Core.RT.DataCenter;
  2. using Aitex.Core.RT.Device;
  3. using Aitex.Core.RT.Device.Unit;
  4. using Aitex.Core.RT.IOCore;
  5. using Aitex.Core.RT.Log;
  6. using Aitex.Core.RT.SCCore;
  7. using Aitex.Core.Util;
  8. using DocumentFormat.OpenXml.Packaging;
  9. using DocumentFormat.OpenXml.Spreadsheet;
  10. using FurnaceRT.Devices;
  11. using FurnaceRT.Equipments.PMs.Devices;
  12. using FurnaceRT.Equipments.Systems;
  13. using FurnaceRT.Extraction;
  14. using MECF.Framework.Common.CommonData.SorterDefines;
  15. using MECF.Framework.Common.Equipment;
  16. using MECF.Framework.Common.Tolerance;
  17. using MECF.Framework.Common.Utilities;
  18. using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.LoadPorts.TDK;
  19. using System;
  20. using System.Collections.Generic;
  21. using System.Diagnostics;
  22. using System.Linq;
  23. namespace FurnaceRT.Equipments.PMs
  24. {
  25. /// <summary>
  26. /// 分布类 定义N2Purge的执行逻辑
  27. /// </summary>
  28. public partial class PMModule
  29. {
  30. private R_TRIG _trigN2UpRD = new R_TRIG();
  31. private R_TRIG _trigN2DownRD = new R_TRIG();
  32. private R_TRIG _trigN2AirUpRD = new R_TRIG();
  33. private R_TRIG _trigN2AirDownRD = new R_TRIG();
  34. private R_TRIG _trigN2AirDownTwoRD = new R_TRIG();
  35. private R_TRIG _trigSelectN2PurgeModeD = new R_TRIG();
  36. private FilterChecker _filterChecker = new FilterChecker();
  37. private R_TRIG tank1_TRIG = new R_TRIG();
  38. private R_TRIG tank2_TRIG = new R_TRIG();
  39. private Dictionary<string, Tuple<R_TRIG, List<Tuple<IDevice, string>>>> _n2PurgeSequenceAction;
  40. private Dictionary<string, Func<bool>> _n2PurgeSequenceStatus;
  41. private Dictionary<string, R_TRIG> _rTrigDict;
  42. private N2PurgeModeEnum _N2PurgeMode = N2PurgeModeEnum.Auto;
  43. private double _n2PurgeData = 20;
  44. private double _n2ToAirData = 185000;
  45. private N2PurgeModeEnum _currentPhase;
  46. private double _manualPhase2StabilityTime = 0;
  47. private double _manualPhase4StabilityTime = 0;
  48. private bool _enableAbortN2purge = true;
  49. private int _phase1CycleCount = 0;
  50. private int _phase1CycleCountSC = 0;
  51. private bool _canSwitchToPhase2 = true;
  52. private Dictionary<string, Stopwatch> _allTimeDict = new Dictionary<string, Stopwatch>();
  53. private void InitN2PurgeData()
  54. {
  55. DATA.Subscribe($"{Module}.N2PurgeLimitData", () => GetN2PurgeLimitData());
  56. DATA.Subscribe($"{Module}.O2DensityData", () => ConcentrationO2.Value.ToString("f3"), SubscriptionAttribute.FLAG.IgnoreSaveDB);
  57. DATA.Subscribe($"{Module}.CheckO2Location", () => GetCheckO2Location(), SubscriptionAttribute.FLAG.IgnoreSaveDB);
  58. DATA.Subscribe($"{Module}.O2SetCheckSetPoint", () => GetO2SetCheckSetPoint(), SubscriptionAttribute.FLAG.IgnoreSaveDB);
  59. DATA.Subscribe($"{Module}.N2PurgeMode", () => SC.ContainsItem("PM1.SelectN2PurgeMode") ? SC.GetStringValue("PM1.SelectN2PurgeMode") : "");
  60. var selectN2PurgeMode = SC.ContainsItem("PM1.SelectN2PurgeMode") ? SC.GetStringValue("PM1.SelectN2PurgeMode") : "";
  61. if (!string.IsNullOrEmpty(selectN2PurgeMode))
  62. {
  63. if (selectN2PurgeMode != _N2PurgeMode.ToString())
  64. {
  65. SetN2PurgeModeAction(selectN2PurgeMode);
  66. }
  67. }
  68. var currentPhase = SC.ContainsItem("PM1.SelectN2PurgeModePhase") ? SC.GetStringValue("PM1.SelectN2PurgeModePhase") : "";
  69. if (!string.IsNullOrEmpty(currentPhase))
  70. {
  71. var enumCurrentPhase = (N2PurgeModeEnum)Enum.Parse(typeof(N2PurgeModeEnum), currentPhase);
  72. _currentPhase = enumCurrentPhase;
  73. }
  74. }
  75. private void InitN2PurgeConfigData()
  76. {
  77. _n2PurgeData = SC.ContainsItem($"System.N2PurgeData") ? SC.GetValue<double>("System.N2PurgeData") : 20;
  78. _n2ToAirData = SC.ContainsItem($"System.N2PurgeData") ? SC.GetValue<double>("System.N2ToAirData") : 185000;
  79. _enableAbortN2purge = SC.ContainsItem($"PM1.N2Purge.EnableAbortN2purge") ? SC.GetValue<bool>("PM1.N2Purge.EnableAbortN2purge") : false;
  80. _manualPhase2StabilityTime = SC.ContainsItem($"PM1.N2Purge.Manual_phase2.StabilityTime") ? SC.GetValue<double>("PM1.N2Purge.Manual_phase2.StabilityTime") : 0;
  81. _manualPhase4StabilityTime = SC.ContainsItem($"PM1.N2Purge.Manual_phase4.StabilityTime") ? SC.GetValue<double>("PM1.N2Purge.Manual_phase4.StabilityTime") : 0;
  82. _phase1CycleCountSC = SC.ContainsItem($"PM1.N2Purge.Manual_phase1.CycleCount") ? SC.GetValue<int>("PM1.N2Purge.Manual_phase1.CycleCount") : 0;
  83. _n2PurgeSequenceAction = ExtractionMethods.GetN2PurgeSequenceAction();
  84. _n2PurgeSequenceStatus = new Dictionary<string, Func<bool>>()
  85. {
  86. {"N2PurgeAIRTo20PPM",()=> GetN2PurgeAIRTo20PPMStatus()},
  87. {"N2PurgeUnder20PPM",()=> GetN2PurgeUnder20PPMStatus()},
  88. {"AIR",()=> GetN2PurgeAIRStatus()},
  89. {"DoorOpen",()=> GetN2PurgeDoorOpenStatus()},
  90. {"Foup1",()=> GetN2PurgeFoup1Status()},
  91. {"Foup2",()=> GetN2PurgeFoup2Status()},
  92. {N2PurgeModeEnum.Manual_phase1.ToString(),()=> CheckN2PurgePhase1() },
  93. {N2PurgeModeEnum.Manual_phase2.ToString(),()=> CheckN2PurgePhase2()},
  94. {N2PurgeModeEnum.Manual_phase3.ToString(),()=> CheckN2PurgePhase3() },
  95. {N2PurgeModeEnum.Manual_phase4.ToString(),()=> CheckN2PurgePhase4() },
  96. {N2PurgeModeEnum.Manual_phase5.ToString(),()=> CheckN2PurgePhase5() },
  97. };
  98. _allTimeDict = new Dictionary<string, Stopwatch>()
  99. {
  100. {N2PurgeModeEnum.Manual_phase1.ToString(),new Stopwatch() },
  101. {N2PurgeModeEnum.Manual_phase2.ToString(),new Stopwatch()},
  102. {N2PurgeModeEnum.Manual_phase3.ToString(),new Stopwatch()},
  103. {N2PurgeModeEnum.Manual_phase4.ToString(),new Stopwatch() },
  104. {N2PurgeModeEnum.Manual_phase5.ToString(),new Stopwatch() }
  105. };
  106. _rTrigDict = new Dictionary<string, R_TRIG>();
  107. }
  108. private void MonitorN2Purge()
  109. {
  110. var selectN2PurgeMode = SC.ContainsItem("PM1.SelectN2PurgeMode") ? SC.GetStringValue("PM1.SelectN2PurgeMode") : "";
  111. if (string.IsNullOrEmpty(selectN2PurgeMode))
  112. {
  113. return;
  114. }
  115. SetN2PurgeModeAction(selectN2PurgeMode);
  116. }
  117. private void MonitorTank1LeakAgeExec()
  118. {
  119. tank1_TRIG.CLK = SensorHCDTANKH != null && SensorHCDTANKH.Value;
  120. if (tank1_TRIG.Q)
  121. {
  122. SetHREFEnable(new object[1] { false });
  123. ValveAV113?.TurnValve(false, out _);
  124. }
  125. }
  126. public bool SetHREFEnable(object[] param)
  127. {
  128. if (param == null || param.Length <= 0)
  129. return true;
  130. bool.TryParse(param[0].ToString(), out bool isEnable);
  131. if (isEnable)
  132. {
  133. if (SensorHREFILK != null && SensorHREFILK.Value)
  134. {
  135. TrigSIREFON?.CheckAndSet(isEnable, out _);
  136. }
  137. }
  138. else
  139. {
  140. TrigSIREFON?.CheckAndSet(isEnable, out _);
  141. }
  142. return true;
  143. }
  144. private void MonitorTank2LeakAgeExec()
  145. {
  146. tank2_TRIG.CLK = SensorCSOURCETANKH != null && SensorCSOURCETANKH.Value;
  147. if (tank2_TRIG.Q)
  148. {
  149. SetCREFEnable(new object[1] { false });
  150. ValveAV121?.TurnValve(false, out _);
  151. }
  152. }
  153. public bool SetCREFEnable(object[] param)
  154. {
  155. if (param == null || param.Length <= 0)
  156. return true;
  157. bool.TryParse(param[0].ToString(), out bool isEnable);
  158. if (isEnable)
  159. {
  160. if (SensorCREFILK != null && SensorCREFILK.Value)
  161. {
  162. TrigCREFON?.CheckAndSet(isEnable, out _);
  163. }
  164. }
  165. else
  166. {
  167. TrigCREFON?.CheckAndSet(isEnable, out _);
  168. }
  169. return true;
  170. }
  171. /// <summary>
  172. /// TODO:这里展示数据的逻辑 不正确,待明确逻辑
  173. /// </summary>
  174. /// <returns></returns>
  175. private double GetN2PurgeLimitData()
  176. {
  177. if (_N2PurgeMode == N2PurgeModeEnum.N2PurgeMode)
  178. {
  179. if ((SensorO2DetectSideFIMS1 != null && SensorO2DetectSideFIMS1.Value) || (SensorO2DetectSideFIMS2 != null && SensorO2DetectSideFIMS2.Value))
  180. {
  181. return (float)SC.GetValue<double>("PM1.N2Purge.N2PurgeFOUPO2CheckSV");
  182. }
  183. return _n2PurgeData;
  184. }
  185. if (_N2PurgeMode == N2PurgeModeEnum.ATMMode)
  186. {
  187. return _n2ToAirData;
  188. }
  189. return ConcentrationO2.Value;
  190. }
  191. private void SetN2PurgeModeAction(string selectN2PurgeMode)
  192. {
  193. _N2PurgeMode = (N2PurgeModeEnum)Enum.Parse(typeof(N2PurgeModeEnum), selectN2PurgeMode);
  194. if (_N2PurgeMode == N2PurgeModeEnum.N2PurgeMode)
  195. {
  196. if (_currentPhase == N2PurgeModeEnum.Manual_phase1)
  197. {
  198. _filterChecker.CheckInterval = 3;
  199. _filterChecker.Monitor(CheckN2PurgePhase2());
  200. if (_filterChecker.Trig && _canSwitchToPhase2)
  201. {
  202. LOG.Info($" N2PurgeMode Trigger from Manual_phase1 to Manual_phase2,O2:{ConcentrationO2.Value}");
  203. SetN2PurgeValveData(N2PurgeModeEnum.Manual_phase2.ToString());
  204. }
  205. }
  206. else if (_currentPhase == N2PurgeModeEnum.Manual_phase2)
  207. {
  208. if (!_allTimeDict[N2PurgeModeEnum.Manual_phase2.ToString()].IsRunning && _canSwitchToPhase2)
  209. {
  210. _allTimeDict[N2PurgeModeEnum.Manual_phase2.ToString()].Restart();
  211. }
  212. var second = _allTimeDict[N2PurgeModeEnum.Manual_phase2.ToString()].Elapsed.TotalSeconds;
  213. if (second >= _manualPhase2StabilityTime)
  214. {
  215. if (CheckN2PurgePhase1())
  216. {
  217. LOG.Info($"N2PurgeMode Trigger Manual_phase1 was triggered {second} seconds later,O2:{ConcentrationO2.Value}");
  218. N2PurgeFaileAlarm.Set();
  219. _allTimeDict[N2PurgeModeEnum.Manual_phase2.ToString()].Restart();
  220. _allTimeDict[N2PurgeModeEnum.Manual_phase2.ToString()].Stop();
  221. _canSwitchToPhase2 = false;
  222. SetN2PurgeValveData(N2PurgeModeEnum.Manual_phase1.ToString());
  223. }
  224. if (CheckN2PurgePhase2())
  225. {
  226. LOG.Info($"N2PurgeMode Trigger Hold Manual_phase2 was triggered {second} seconds later,O2:{ConcentrationO2.Value}");
  227. _allTimeDict[N2PurgeModeEnum.Manual_phase2.ToString()].Restart();
  228. _allTimeDict[N2PurgeModeEnum.Manual_phase2.ToString()].Stop();
  229. _canSwitchToPhase2 = false;
  230. }
  231. }
  232. }
  233. else
  234. {
  235. if (CheckN2PurgePhase1())
  236. {
  237. LOG.Info($"N2PurgeMode Trigger Directly triggered Manual_phase1,O2:{ConcentrationO2.Value}");
  238. SetN2PurgeValveData(N2PurgeModeEnum.Manual_phase1.ToString());
  239. }
  240. else if (CheckN2PurgePhase2())
  241. {
  242. LOG.Info($"N2PurgeMode Trigger Directly triggered Manual_phase2,O2:{ConcentrationO2.Value}");
  243. SetN2PurgeValveData(N2PurgeModeEnum.Manual_phase2.ToString());
  244. }
  245. }
  246. }
  247. if (_N2PurgeMode == N2PurgeModeEnum.ATMMode)
  248. {
  249. if (_currentPhase == N2PurgeModeEnum.Manual_phase3)
  250. {
  251. var checkResult = CheckN2PurgePhase4();
  252. if (!_allTimeDict[N2PurgeModeEnum.Manual_phase4.ToString()].IsRunning)
  253. {
  254. _allTimeDict[N2PurgeModeEnum.Manual_phase4.ToString()].Restart();
  255. }
  256. var second = _allTimeDict[N2PurgeModeEnum.Manual_phase4.ToString()].Elapsed.TotalSeconds;
  257. if (second >= _manualPhase4StabilityTime && checkResult)
  258. {
  259. LOG.Info($"N2PurgeMode Trigger from Manual_phase3 to Manual_phase4 is triggered {second} seconds later,O2:{ConcentrationO2.Value}");
  260. SetN2PurgeValveData(N2PurgeModeEnum.Manual_phase4.ToString());
  261. _allTimeDict[N2PurgeModeEnum.Manual_phase4.ToString()].Restart();
  262. _allTimeDict[N2PurgeModeEnum.Manual_phase4.ToString()].Stop();
  263. }
  264. }
  265. else if (_currentPhase == N2PurgeModeEnum.Manual_phase4)
  266. {
  267. if (CheckN2PurgePhase5())
  268. {
  269. LOG.Info($"N2PurgeMode Trigger from Manual_phase4 to Manual_phase5,O2:{ConcentrationO2.Value}");
  270. SetN2PurgeValveData(N2PurgeModeEnum.Manual_phase5.ToString());
  271. }
  272. //if (CheckN2PurgePhase3( ))
  273. //{
  274. // LOG.Info($"N2PurgeMode Trigger from Manual_phase4 to Manual_phase3,O2:{o2Value}");
  275. // SetN2PurgeValveData(N2PurgeModeEnum.Manual_phase3.ToString());
  276. //}
  277. }
  278. else if (_currentPhase == N2PurgeModeEnum.Manual_phase5)
  279. {
  280. if (CheckN2PurgePhase4())
  281. {
  282. LOG.Info($"N2PurgeMode Trigger from Manual_phase5 to Manual_phase4,O2:{ConcentrationO2.Value}");
  283. SetN2PurgeValveData(N2PurgeModeEnum.Manual_phase4.ToString());
  284. }
  285. //if (CheckN2PurgePhase3( ))
  286. //{
  287. // LOG.Info($"N2PurgeMode Trigger from Manual_phase5 to Manual_phase3,O2:{o2Value}");
  288. // SetN2PurgeValveData(N2PurgeModeEnum.Manual_phase3.ToString());
  289. //}
  290. }
  291. else
  292. {
  293. if (CheckN2PurgePhase3())
  294. {
  295. LOG.Info($"N2PurgeMode Trigger Directly triggered Manual_phase3,O2:{ConcentrationO2.Value}");
  296. SetN2PurgeValveData(N2PurgeModeEnum.Manual_phase3.ToString());
  297. return;
  298. }
  299. if (CheckN2PurgePhase5())
  300. {
  301. LOG.Info($"N2PurgeMode Trigger Directly triggered Manual_phase5,O2:{ConcentrationO2.Value}");
  302. SetN2PurgeValveData(N2PurgeModeEnum.Manual_phase5.ToString());
  303. return;
  304. }
  305. if (CheckN2PurgePhase4())
  306. {
  307. LOG.Info($"N2PurgeMode Trigger Directly triggered Manual_phase4,O2:{ConcentrationO2.Value}");
  308. SetN2PurgeValveData(N2PurgeModeEnum.Manual_phase4.ToString());
  309. return;
  310. }
  311. }
  312. }
  313. if (_N2PurgeMode == N2PurgeModeEnum.ManualMode || _N2PurgeMode == N2PurgeModeEnum.Auto)
  314. {
  315. _currentPhase = _N2PurgeMode;
  316. }
  317. //switch (_N2PurgeMode)
  318. //{
  319. // case N2PurgeModeEnum.Auto:
  320. // // 自动模式下的操作
  321. // break;
  322. // case N2PurgeModeEnum.ManualMode:
  323. // break;
  324. // case N2PurgeModeEnum.N2PurgeMode:
  325. // ProcessPhase(_trigN2UpRD, N2PurgeModeEnum.Manual_phase1.ToString());
  326. // ProcessPhase(_trigN2DownRD, N2PurgeModeEnum.Manual_phase2.ToString(), _manualPhase2NeedCheck, (int)(_manualPhase2StabilityTime * 1000));
  327. // break;
  328. // case N2PurgeModeEnum.ATMMode:
  329. // ProcessPhase(_trigN2AirDownRD, N2PurgeModeEnum.Manual_phase3.ToString());
  330. // ProcessPhase(_trigN2AirUpRD, N2PurgeModeEnum.Manual_phase4.ToString(), _manualPhase4NeedCheck, (int)(_manualPhase4StabilityTime * 1000));
  331. // ProcessPhase(_trigN2AirDownTwoRD, N2PurgeModeEnum.Manual_phase5.ToString());
  332. // break;
  333. //}
  334. }
  335. bool CheckConditionInTime(string modeKey, int millisecondsTimeout, Func<bool> condition)
  336. {
  337. var stopwatch = _allTimeDict[modeKey];
  338. if (!_allTimeDict[modeKey].IsRunning)
  339. {
  340. _allTimeDict[modeKey].Restart();
  341. }
  342. while (stopwatch.ElapsedMilliseconds < millisecondsTimeout)
  343. {
  344. if (!_allTimeDict[modeKey].IsRunning)
  345. {
  346. return true;
  347. }
  348. if (!condition())
  349. {
  350. _allTimeDict[modeKey].Stop();
  351. _allTimeDict[modeKey].Reset();
  352. return false;
  353. }
  354. }
  355. if (stopwatch.ElapsedMilliseconds > millisecondsTimeout)
  356. {
  357. _allTimeDict[modeKey].Stop();
  358. _allTimeDict[modeKey].Reset();
  359. }
  360. return true;
  361. }
  362. private void ProcessPhase(R_TRIG r_TRIG, string modeKey, bool needCheck = false, int time = 0)
  363. {
  364. r_TRIG.CLK = needCheck ? (CheckConditionInTime(modeKey, time, () => _n2PurgeSequenceStatus[modeKey].Invoke())) : _n2PurgeSequenceStatus[modeKey].Invoke();
  365. if (r_TRIG.Q)
  366. {
  367. LOG.Info($"N2PurgeMode Trigger {modeKey}!,O2:{ConcentrationO2.Value},time:{_allTimeDict[modeKey].ElapsedMilliseconds}");
  368. SetN2PurgeValveData(modeKey);
  369. _allTimeDict[modeKey].Stop();
  370. _allTimeDict[modeKey].Reset();
  371. }
  372. }
  373. public void RestAllN2PrugeRD()
  374. {
  375. _trigN2AirDownRD.RST = false;
  376. _trigN2AirUpRD.RST = false;
  377. _trigN2DownRD.RST = false;
  378. _trigN2UpRD.RST = false;
  379. foreach (var item in _allTimeDict)
  380. {
  381. item.Value.Stop();
  382. item.Value.Reset();
  383. }
  384. _canSwitchToPhase2 = true;
  385. }
  386. private void SetN2PurgeValveData(string mode, string msg = "")
  387. {
  388. var value = _n2PurgeSequenceAction[mode];
  389. _currentPhase = (N2PurgeModeEnum)Enum.Parse(typeof(N2PurgeModeEnum), mode);
  390. if (SC.ContainsItem("PM1.SelectN2PurgeModePhase"))
  391. {
  392. SC.SetItemValue("PM1.SelectN2PurgeModePhase", mode);
  393. }
  394. foreach (var operateItem in value.Item2)
  395. {
  396. if (operateItem.Item1 is IoMFC)
  397. {
  398. var ioMFc = (operateItem.Item1 as IoMFC);
  399. { ioMFc.SetMfcValue(out _, 0, new object[] { float.Parse(operateItem.Item2.ToString()) }); }
  400. }
  401. if (operateItem.Item1 is IoValve)
  402. {
  403. var ioValve = (operateItem.Item1 as IoValve);
  404. ioValve.TurnValve(bool.Parse(operateItem.Item2), out _);
  405. }
  406. if (operateItem.Item1 is IoTrigger)
  407. {
  408. var ioTrigger = (operateItem.Item1 as IoTrigger);
  409. ioTrigger.CheckAndSet(bool.Parse(operateItem.Item2), out _);
  410. }
  411. }
  412. }
  413. private bool SetN2PurgeMode(out string reason, int time, object[] param)
  414. {
  415. reason = string.Empty;
  416. var mode = param[0].ToString();
  417. _N2PurgeMode = (N2PurgeModeEnum)Enum.Parse(typeof(N2PurgeModeEnum), mode);
  418. if (SC.ContainsItem("PM1.SelectN2PurgeMode"))
  419. {
  420. SC.SetItemValue("PM1.SelectN2PurgeMode", mode);
  421. }
  422. RestAllN2PrugeRD();
  423. return true;
  424. }
  425. /// <summary>
  426. /// 获取当前O2检测位置的设定值
  427. /// TODO:这里展示数据的逻辑也不正确,待明确逻辑
  428. /// </summary>
  429. /// <returns></returns>
  430. private string GetO2SetCheckSetPoint()
  431. {
  432. if (SensorO2DetectSideLA != null && SensorO2DetectSideLA.Value)
  433. {
  434. var key = "PM1.N2Purge.N2PurgeLAO2CheckSV";
  435. if (SC.ContainsItem(key))
  436. return SC.GetValue<double>(key).ToString("f3");
  437. }
  438. if ((SensorO2DetectSideFIMS1 != null && SensorO2DetectSideFIMS1.Value) || (SensorO2DetectSideFIMS2 != null && SensorO2DetectSideFIMS2.Value))
  439. {
  440. var key = "PM1.N2Purge.N2PurgeFOUPO2CheckSV";
  441. if (SC.ContainsItem(key))
  442. return SC.GetValue<double>(key).ToString("f3");
  443. }
  444. return "";
  445. }
  446. /// <summary>
  447. /// 获取当前O2检测位置
  448. /// </summary>
  449. /// <returns></returns>
  450. private string GetCheckO2Location()
  451. {
  452. if (SensorO2DetectSideLA != null && SensorO2DetectSideLA.Value)
  453. return SensorO2DetectSideLA.Display;
  454. if (SensorO2DetectSideFIMS1 != null && SensorO2DetectSideFIMS1.Value)
  455. return SensorO2DetectSideFIMS1.Display;
  456. if (SensorO2DetectSideFIMS2 != null && SensorO2DetectSideFIMS2.Value)
  457. return SensorO2DetectSideFIMS2.Display;
  458. return "";
  459. }
  460. /// <summary>
  461. /// 获取当前O2浓度
  462. /// </summary>
  463. /// <returns></returns>
  464. public bool CheckIsLASide()
  465. {
  466. if (SensorO2DetectSideLA == null)
  467. {
  468. return false;
  469. }
  470. return SensorO2DetectSideLA.Value;
  471. }
  472. private bool CheckN2PurgePhase1()
  473. {
  474. return ((int)ConcentrationO2.Value >= _n2PurgeData) && GetLADoorOpenStatus() && CheckIsLASide();
  475. }
  476. private bool CheckN2PurgePhase2()
  477. {
  478. return ((int)ConcentrationO2.Value < _n2PurgeData) && GetLADoorOpenStatus() && CheckIsLASide();
  479. }
  480. private bool CheckN2PurgePhase3()
  481. {
  482. return ((int)ConcentrationO2.Value) < _n2ToAirData && GetLADoorOpenStatus() && CheckIsLASide();
  483. }
  484. private bool CheckN2PurgePhase5()
  485. {
  486. return ((int)ConcentrationO2.Value) >= _n2ToAirData && !GetLADoorOpenStatus() && CheckIsLASide();
  487. }
  488. private bool CheckN2PurgePhase4()
  489. {
  490. return (((int)ConcentrationO2.Value)) >= _n2ToAirData && GetLADoorOpenStatus() && CheckIsLASide();
  491. }
  492. private bool GetN2PurgeAIRTo20PPMStatus()
  493. {
  494. return ValveAV202.DOOpen.Value;
  495. }
  496. public bool GetN2PurgeUnder20PPMStatus(double value = 20)
  497. {
  498. return ConcentrationO2.Value < value;
  499. }
  500. private bool GetN2PurgeAIRStatus()
  501. {
  502. return ValveAV202.DOClose.Value && (AlarmSignalFilterBox1DoorSwitch != null ? !AlarmSignalFilterBox1DoorSwitch.Value : false);
  503. }
  504. private bool GetLADoorOpenStatus()
  505. {
  506. return (bool)(SensorLADoorSw1?.Value);
  507. }
  508. private bool GetN2PurgeDoorOpenStatus()
  509. {
  510. return ValveAV202.DOClose.Value && (AlarmSignalFilterBox1DoorSwitch != null ? !AlarmSignalFilterBox1DoorSwitch.Value : false);
  511. }
  512. private bool GetN2PurgeFoup1Status()
  513. {
  514. return GetN2PurgeAIRTo20PPMStatus() && GetN2PurgeUnder20PPMStatus() && FIMS1.IsFoupExist && FIMS1.CollisionAvoidanceUpDownStatus == DeviceStatus.Down;
  515. }
  516. private bool GetN2PurgeFoup2Status()
  517. {
  518. return GetN2PurgeAIRTo20PPMStatus() && GetN2PurgeUnder20PPMStatus() && FIMS2.IsFoupExist && FIMS2.CollisionAvoidanceUpDownStatus == DeviceStatus.Down; ;
  519. }
  520. public bool IsAbortN2purge()
  521. {
  522. if (!_enableAbortN2purge)
  523. {
  524. return false;
  525. }
  526. if (SensorSL02001gasboxdoorsw11.Value || SensorSL02001gasboxdoorsw12.Value || SensorSL02002gasboxdoorsw11.Value || SensorSL02002gasboxdoorsw12.Value || SensorSL05002LAdoorsw2.Value || SensorSL05004LAfurnacedoorsw.Value)
  527. {
  528. return true;
  529. }
  530. return false;
  531. }
  532. public void SetN2PurgeLAO2CheckFirstEnable(bool isEable)
  533. {
  534. if (TrigN2PurgeLAO2CheckFirstEnable != null && TrigN2PurgeLAO2CheckFirstEnable.Value != isEable)
  535. {
  536. TrigN2PurgeLAO2CheckFirstEnable.SetTrigger(isEable, out _);
  537. }
  538. }
  539. public void SetN2PurgeFIMS1O2CheckEnable(ModuleName fims, bool isEable)
  540. {
  541. if (fims == ModuleName.FIMS1 && TrigN2PurgeFIMS1O2CheckEnable != null && TrigN2PurgeFIMS1O2CheckEnable.Value != isEable)
  542. {
  543. TrigN2PurgeFIMS1O2CheckEnable.SetTrigger(isEable, out _);
  544. }
  545. if (fims == ModuleName.FIMS2 && TrigN2PurgeFIMS2O2CheckEnable != null && TrigN2PurgeFIMS2O2CheckEnable.Value != isEable)
  546. {
  547. TrigN2PurgeFIMS2O2CheckEnable.SetTrigger(isEable, out _);
  548. }
  549. }
  550. public void SetN2PurgeProcess(bool isEable)
  551. {
  552. if (TrigN2PurgeProcess != null && TrigN2PurgeProcess.Value != isEable)
  553. {
  554. TrigN2PurgeProcess.SetTrigger(isEable, out _);
  555. }
  556. }
  557. public void SetN2PurgeLAO2CheckSV(float value)
  558. {
  559. if (TrigN2PurgeLAO2CheckSV != null)
  560. TrigN2PurgeLAO2CheckSV?.SetAOTrigger(value, out _);
  561. }
  562. public void SetN2PurgeFOUPO2CheckSV(float value)
  563. {
  564. if (TrigN2PurgeFOUPO2CheckSV != null)
  565. TrigN2PurgeFOUPO2CheckSV?.SetAOTrigger(value, out _);
  566. }
  567. /// <summary>
  568. /// N2Purge相关时间参数,电气要求设定为秒,实际下发按照毫秒
  569. /// </summary>
  570. public void SetN2PurgeParameters(string n2PurgeModeEnum)
  571. {
  572. if (SC.ContainsItem("PM1.N2Purge.TransferRoomArrivalWaitTime") && TrigN2PurgeLAO2CheckTime != null)
  573. {
  574. var time = (float)SC.GetValue<double>("PM1.N2Purge.TransferRoomArrivalWaitTime");
  575. TrigN2PurgeLAO2CheckTime.SetAOTrigger(time, out _);
  576. }
  577. if (SC.ContainsItem("PM1.N2Purge.TransferRoomStableWaitTime") && TrigN2PurgeLAO2OverTime != null)
  578. {
  579. var time = (float)SC.GetValue<double>("PM1.N2Purge.TransferRoomStableWaitTime");
  580. TrigN2PurgeLAO2OverTime.SetAOTrigger(time, out _);
  581. }
  582. if (SC.ContainsItem("PM1.N2Purge.FOUPOpenerArrivalWaitTime") && TrigN2PurgeFOUPO2CheckTime != null)
  583. {
  584. var time = (float)SC.GetValue<double>("PM1.N2Purge.FOUPOpenerArrivalWaitTime");
  585. TrigN2PurgeFOUPO2CheckTime.SetAOTrigger(time, out _);
  586. }
  587. if (SC.ContainsItem("PM1.N2Purge.FOUPOpenerStableWaitTime") && TrigN2PurgeFOUPO2OverTime != null)
  588. {
  589. var time = (float)SC.GetValue<double>("PM1.N2Purge.FOUPOpenerStableWaitTime");
  590. TrigN2PurgeFOUPO2OverTime.SetAOTrigger(time, out _);
  591. }
  592. if (SC.ContainsItem("PM1.N2Purge.O2DetectorTransferRoomToFOUPTime") && TrigN2PurgeExchangeLATOFOUPWaitTime != null)
  593. {
  594. var time = (float)SC.GetValue<double>("PM1.N2Purge.O2DetectorTransferRoomToFOUPTime");
  595. TrigN2PurgeExchangeLATOFOUPWaitTime.SetAOTrigger(time, out _);
  596. }
  597. if (SC.ContainsItem("PM1.N2Purge.O2DetectorFOUPToTransferRoomTime") && TrigN2PurgeExchangeFOUPTOLAWaitTime != null)
  598. {
  599. var time = (float)SC.GetValue<double>("PM1.N2Purge.O2DetectorFOUPToTransferRoomTime");
  600. TrigN2PurgeExchangeFOUPTOLAWaitTime.SetAOTrigger(time, out _);
  601. }
  602. if (SC.ContainsItem("PM1.N2Purge.O2DetectorFOUPToFOUPTime") && TrigN2PurgeExchangeFOUPTOFOUPWaitTime != null)
  603. {
  604. var time = (float)SC.GetValue<double>("PM1.N2Purge.O2DetectorFOUPToFOUPTime");
  605. TrigN2PurgeExchangeFOUPTOFOUPWaitTime.SetAOTrigger(time, out _);
  606. }
  607. //这2个SV下发值应该根据什么阶段下发什么值
  608. if (n2PurgeModeEnum == N2PurgeModeEnum.WaferCharge.ToString())
  609. {
  610. SetN2PurgeFOUPO2CheckSV((float)GetWaferChargeFOUPO2CheckSV());
  611. SetN2PurgeLAO2CheckSV((float)GetWaferChargeLAO2CheckSV());
  612. }
  613. if (n2PurgeModeEnum == N2PurgeModeEnum.FoupEnter.ToString())
  614. {
  615. SetN2PurgeFOUPO2CheckSV((float)GetFoupEnterFOUPO2CheckSV());
  616. SetN2PurgeLAO2CheckSV((float)GetFoupEnterLAO2CheckSV());
  617. }
  618. if (n2PurgeModeEnum == N2PurgeModeEnum.WaferDisCharge.ToString())
  619. {
  620. SetN2PurgeFOUPO2CheckSV((float)GetWaferDisChargeFOUPO2CheckSV());
  621. SetN2PurgeLAO2CheckSV((float)GetWaferDisChargeLAO2CheckSV());
  622. }
  623. }
  624. /// <summary>
  625. /// Job start的时候,就根据Process的配置判定是否需要进行LA压氧
  626. /// </summary>
  627. /// <param name="n2PurgeModeStr"></param>
  628. public void InitN2PurgeMode(string n2PurgeModeStr)
  629. {
  630. if (string.IsNullOrEmpty(n2PurgeModeStr))
  631. return;
  632. if (n2PurgeModeStr.ToLower() == "none")
  633. return;
  634. if (SC.ContainsItem("PM1.RecipeRelevancyN2Purge") && SC.GetValue<bool>("PM1.RecipeRelevancyN2Purge") && SC.ContainsItem("PM1.SelectN2PurgeMode"))
  635. {
  636. var setValue = GetN2PurgeModeEnumByStr(n2PurgeModeStr);
  637. SC.SetItemValueFromString("PM1.SelectN2PurgeMode", setValue);
  638. RestAllN2PrugeRD();
  639. }
  640. }
  641. public bool CheckFimsIsNeedOxygenPressure(bool fimsN2PurgeConfig, string recipeN2PurgeModeStr, out bool isCheckO2, bool isCheckRecipeHeader = true)
  642. {
  643. isCheckO2 = false;
  644. var currectN2PurgeModel = GetLACurrectN2purgeMode();
  645. if (isCheckRecipeHeader)
  646. {
  647. if (string.IsNullOrEmpty(recipeN2PurgeModeStr))
  648. return false;
  649. if (recipeN2PurgeModeStr.ToLower().Equals("n2 purge"))
  650. {
  651. recipeN2PurgeModeStr = N2PurgeModeEnum.N2PurgeMode.ToString();
  652. }
  653. if (recipeN2PurgeModeStr.ToLower().Contains("atm"))
  654. {
  655. recipeN2PurgeModeStr = IsATMMode(recipeN2PurgeModeStr);
  656. }
  657. var n2PurgeEnum = (N2PurgeModeEnum)Enum.Parse(typeof(N2PurgeModeEnum), recipeN2PurgeModeStr);
  658. if (n2PurgeEnum == N2PurgeModeEnum.ATMMode)
  659. return false;
  660. if (n2PurgeEnum == N2PurgeModeEnum.N2PurgeMode)
  661. {
  662. if (currectN2PurgeModel == N2PurgeModeEnum.N2PurgeMode.ToString() || currectN2PurgeModel == N2PurgeModeEnum.ATMMode.ToString() || currectN2PurgeModel == N2PurgeModeEnum.ManualMode.ToString())
  663. {
  664. if (fimsN2PurgeConfig)
  665. {
  666. isCheckO2 = true;
  667. return true;
  668. }
  669. else
  670. {
  671. return false;
  672. }
  673. }
  674. }
  675. if (n2PurgeEnum == N2PurgeModeEnum.None)
  676. {
  677. if (currectN2PurgeModel == N2PurgeModeEnum.ATMMode.ToString() || currectN2PurgeModel == N2PurgeModeEnum.ManualMode.ToString())
  678. {
  679. return false;
  680. }
  681. if (currectN2PurgeModel == N2PurgeModeEnum.N2PurgeMode.ToString())
  682. {
  683. if (fimsN2PurgeConfig)
  684. {
  685. isCheckO2 = true;
  686. return true;
  687. }
  688. else
  689. {
  690. return false;
  691. }
  692. }
  693. }
  694. }
  695. else
  696. {
  697. if (currectN2PurgeModel == N2PurgeModeEnum.N2PurgeMode.ToString() || currectN2PurgeModel == N2PurgeModeEnum.ManualMode.ToString())
  698. {
  699. if (fimsN2PurgeConfig)
  700. {
  701. isCheckO2 = true;
  702. return true;
  703. }
  704. else
  705. {
  706. return false;
  707. }
  708. }
  709. if (currectN2PurgeModel == N2PurgeModeEnum.ATMMode.ToString())
  710. {
  711. return false;
  712. }
  713. }
  714. return false;
  715. }
  716. public bool CheckLAIsNeedOxygenPressure(string recipeN2PurgeModeStr)
  717. {
  718. if (string.IsNullOrEmpty(recipeN2PurgeModeStr))
  719. return false;
  720. if (recipeN2PurgeModeStr.ToLower() == "none")
  721. return false;
  722. if (recipeN2PurgeModeStr.ToLower() == "atm")
  723. {
  724. recipeN2PurgeModeStr = N2PurgeModeEnum.ATMMode.ToString();
  725. }
  726. if (recipeN2PurgeModeStr.ToLower().Contains("n2"))
  727. {
  728. recipeN2PurgeModeStr = N2PurgeModeEnum.N2PurgeMode.ToString();
  729. }
  730. var n2PurgeEnum = (N2PurgeModeEnum)Enum.Parse(typeof(N2PurgeModeEnum), recipeN2PurgeModeStr);
  731. if (n2PurgeEnum == N2PurgeModeEnum.N2PurgeMode || n2PurgeEnum == N2PurgeModeEnum.ATMMode)
  732. return true;
  733. return false;
  734. }
  735. public string GetN2PurgeModeEnumByStr(string str)
  736. {
  737. if ((str == N2PurgeModeEnum.ATMMode.ToString()) || (str == N2PurgeModeEnum.ATMMode.ToDescription()) || (str.StartsWith("ATM")))
  738. {
  739. return N2PurgeModeEnum.ATMMode.ToString();
  740. }
  741. else if ((str == N2PurgeModeEnum.N2PurgeMode.ToString()) || (str == N2PurgeModeEnum.N2PurgeMode.ToDescription()) || (str.StartsWith("N2")))
  742. {
  743. return N2PurgeModeEnum.N2PurgeMode.ToString();
  744. }
  745. else
  746. {
  747. return GetLACurrectN2purgeMode();
  748. }
  749. }
  750. public string IsATMMode(string str)
  751. {
  752. if ((str == N2PurgeModeEnum.ATMMode.ToString()) || (str == N2PurgeModeEnum.ATMMode.ToDescription()) || (str.StartsWith("ATM")))
  753. {
  754. return N2PurgeModeEnum.ATMMode.ToString();
  755. }
  756. return str;
  757. }
  758. public double GetFoupEnterLAO2CheckSV()
  759. {
  760. return SC.ContainsItem("PM1.N2Purge.FoupEnter.LAO2CheckSV") ? SC.GetValue<double>("PM1.N2Purge.FoupEnter.LAO2CheckSV") : 20;
  761. }
  762. public double GetFoupEnterFOUPO2CheckSV()
  763. {
  764. return SC.ContainsItem("PM1.N2Purge.FoupEnter.FOUPO2CheckSV") ? SC.GetValue<double>("PM1.N2Purge.FoupEnter.FOUPO2CheckSV") : 20;
  765. }
  766. public bool GetFoupEnterFIMSN2purgeConfig()
  767. {
  768. return SC.ContainsItem("PM1.N2Purge.FoupEnter.FOUPN2PurgeEnable") ? SC.GetValue<bool>("PM1.N2Purge.FoupEnter.FOUPN2PurgeEnable") : false;
  769. }
  770. public double GetWaferChargeLAO2CheckSV()
  771. {
  772. return SC.ContainsItem("PM1.N2Purge.WaferCharge.LAO2CheckSV") ? SC.GetValue<double>("PM1.N2Purge.WaferCharge.LAO2CheckSV") : 20;
  773. }
  774. public double GetWaferChargeFOUPO2CheckSV()
  775. {
  776. return SC.ContainsItem("PM1.N2Purge.WaferCharge.FOUPO2CheckSV") ? SC.GetValue<double>("PM1.N2Purge.WaferCharge.FOUPO2CheckSV") : 20;
  777. }
  778. public bool GetWaferChargeFIMSN2purgeConfig()
  779. {
  780. return SC.ContainsItem("PM1.N2Purge.WaferCharge.FOUPN2PurgeEnable") ? SC.GetValue<bool>("PM1.N2Purge.WaferCharge.FOUPN2PurgeEnable") : false;
  781. }
  782. public bool GetBoatLoadCheckO2DensityConfig()
  783. {
  784. return SC.ContainsItem("PM1.N2Purge.BoatLoad.TransferRoomO2DensityCheckEnable") ? SC.GetValue<bool>("PM1.N2Purge.BoatLoad.TransferRoomO2DensityCheckEnable") : false;
  785. }
  786. public bool GetBoatUnLoadCheckO2DensityConfig()
  787. {
  788. return SC.ContainsItem("PM1.N2Purge.BoatUnLoad.TransferRoomO2DensityCheckEnable") ? SC.GetValue<bool>("PM1.N2Purge.BoatUnLoad.TransferRoomO2DensityCheckEnable") : false;
  789. }
  790. public bool GetBoatUnLoadEAxisInhibitEnableConfig()
  791. {
  792. return SC.ContainsItem("PM1.N2Purge.BoatUnLoad.EAxisInhibitEnable") ? SC.GetValue<bool>("PM1.N2Purge.BoatUnLoad.EAxisInhibitEnable") : false;
  793. }
  794. public bool GetBoatLoadEAxisInhibitEnableConfig()
  795. {
  796. return SC.ContainsItem("PM1.N2Purge.BoatLoad.EAxisInhibitEnable") ? SC.GetValue<bool>("PM1.N2Purge.BoatLoad.EAxisInhibitEnable") : false;
  797. }
  798. public double GetBoatUnLoadLAO2CheckSV()
  799. {
  800. return SC.ContainsItem("PM1.N2Purge.BoatUnLoad.LAO2CheckSV") ? SC.GetValue<double>("PM1.N2Purge.BoatUnLoad.LAO2CheckSV") : 20;
  801. }
  802. public double GetBoatLoadLAO2CheckSV()
  803. {
  804. return SC.ContainsItem("PM1.N2Purge.BoatLoad.LAO2CheckSV") ? SC.GetValue<double>("PM1.N2Purge.BoatLoad.LAO2CheckSV") : 20;
  805. }
  806. public double GetWaferDisChargeLAO2CheckSV()
  807. {
  808. return SC.ContainsItem("PM1.N2Purge.WaferDisCharge.LAO2CheckSV") ? SC.GetValue<double>("PM1.N2Purge.WaferDisCharge.LAO2CheckSV") : 20;
  809. }
  810. public double GetWaferDisChargeFOUPO2CheckSV()
  811. {
  812. return SC.ContainsItem("PM1.N2Purge.WaferDisCharge.FOUPO2CheckSV") ? SC.GetValue<double>("PM1.N2Purge.WaferDisCharge.FOUPO2CheckSV") : 20;
  813. }
  814. public bool GetWaferDisChargeFIMSN2purgeConfig()
  815. {
  816. return SC.ContainsItem("PM1.N2Purge.WaferDisCharge.FOUPN2PurgeEnable") ? SC.GetValue<bool>("PM1.N2Purge.WaferDisCharge.FOUPN2PurgeEnable") : false;
  817. }
  818. public string GetLACurrectN2purgeMode()
  819. {
  820. return SC.ContainsItem("PM1.SelectN2PurgeMode") ? SC.GetStringValue("PM1.SelectN2PurgeMode") : N2PurgeModeEnum.ManualMode.ToString();
  821. }
  822. }
  823. }