WaferInfo.cs 16 KB

123456789101112131415161718192021222324252627282930313233343536373839404142434445464748495051525354555657585960616263646566676869707172737475767778798081828384858687888990919293949596979899100101102103104105106107108109110111112113114115116117118119120121122123124125126127128129130131132133134135136137138139140141142143144145146147148149150151152153154155156157158159160161162163164165166167168169170171172173174175176177178179180181182183184185186187188189190191192193194195196197198199200201202203204205206207208209210211212213214215216217218219220221222223224225226227228229230231232233234235236237238239240241242243244245246247248249250251252253254255256257258259260261262263264265266267268269270271272273274275276277278279280281282283284285286287288289290291292293294295296297298299300301302303304305306307308309310311312313314315316317318319320321322323324325326327328329330331332333334335336337338339340341342343344345346347348349350351352353354355356357358359360361362363364365366367368369370371372373374375376377378379380381382383384385386387388389390391392393394395396397398399400401402403404405406407408409410411412413414415416417418419420421422423424425426427428429430431432433434435436437438439440441442443444445446447448449450451452453454455456457458459460461462463464465466467468469470471472473474475476477478479480481482483484485486487488489490491492493494495496497498499500501502503504505506507508509510511512513514515516517518519520521522523524525526527528529530531532533534535536537538539540541542543544545546547548549550551552553554555556557558559560561562563564565566567568569570571572573574575576577578579580581582583584585586587588589590591592593594595596597598599600601602603604605606607608609610611612613614615616617618619620621622623624625626627628629630631632633634635636637638639640641642643644645646647648649650651652653654655656657658659660661662663664665666667668669670671672673674675676677678679680681682683684685686687688689690691692693694695696697698699700701702703704705706707708709710711712713714715716717718719720721722723724725726727728729730731732733734735736737738739740741742743744745746747748749750751752753754755756757758759760761762763764765766767768769770771772773774775776777778779780781782783784785786787788789790791792793794795796797798799800801802803804805806807808809810811812813814815816817818819820821822823824825826827
  1. using System;
  2. using System.Collections.Generic;
  3. using System.ComponentModel;
  4. using System.Linq;
  5. using System.Runtime.Serialization;
  6. using System.Text;
  7. using DocumentFormat.OpenXml.Drawing;
  8. using MECF.Framework.Common.CommonData;
  9. using MECF.Framework.Common.Jobs;
  10. namespace Aitex.Core.Common
  11. {
  12. public enum WaferSize
  13. {
  14. WS0, //undefine, initialize status
  15. WS3,
  16. WS4,
  17. WS6,
  18. WS8,
  19. WS12,
  20. WS2,
  21. WS5,
  22. }
  23. public enum WaferStatus
  24. {
  25. Empty = 0,
  26. Normal = 1,
  27. Crossed = 2,
  28. Double = 3,
  29. Unknown = 4,
  30. Dummy = 5
  31. }
  32. public enum EnumE90Status
  33. {
  34. None = -1,
  35. NeedProcessing = 0,
  36. InProcess,
  37. Processed,
  38. Aborted,
  39. Stopped,
  40. Rejected,
  41. Lost,
  42. Skipped,
  43. }
  44. //public enum EnumWaferProcessStatus
  45. //{
  46. // NeedProcessing=0,
  47. // Processed,
  48. // Aborted,
  49. // Stopped,
  50. // Rejected,
  51. // Lost,
  52. // Skipped,
  53. //}
  54. public enum SubstrateTransportStatus
  55. {
  56. AtSource =0,
  57. AtWork,
  58. AtDestination,
  59. None,
  60. }
  61. public enum EnumWaferProcessStatus
  62. {
  63. Idle = 0,
  64. InProcess,
  65. Completed,
  66. Failed,
  67. Warnning,
  68. Wait,
  69. Abort,
  70. }
  71. public enum ProcessStatus
  72. {
  73. Idle = 0,
  74. Wait = 1,
  75. Busy = 2,
  76. Completed = 3,
  77. Failed = 4,
  78. Abort = 5,
  79. }
  80. public enum SubstAccessType
  81. {
  82. Create=0,
  83. UpdateWaferID,
  84. Arrive,
  85. Left,
  86. UpdateLM1,
  87. UpdateLM2,
  88. Delete,
  89. Alignment,
  90. }
  91. public enum ScanResult
  92. {
  93. Init,//初始状态
  94. Fit,//一致
  95. TypeClash,//冲突
  96. ActualExist,//软件无检测结果有
  97. ActualNotExist,//软件有检测结果无
  98. }
  99. public enum WaferType
  100. {
  101. None,
  102. P,//Production wafer Processed so that a thin film forms on the surface, and becomes product.
  103. M,//Monitor wafer Used for film thickness and particle inspection
  104. M1,//Monitor wafer Used for film thickness and particle inspection
  105. M2,//Monitor wafer Used for film thickness and particle inspection
  106. SD,//Side dummy wafer Used to rectify process gases for more uniform wafer processing production.
  107. ED,//Extra dummy wafer Used as a supplement when there is a shortage of production wafers.
  108. XD,//Expert dummy wafer Dummy wafer used in expert mode to fill empty slots during test wafer processing.
  109. T,//Test wafer Used in expert mode for process verification, performance verification, and pilot processes
  110. }
  111. [Serializable]
  112. [DataContract]
  113. public class SubstHistory
  114. {
  115. [DataMember]
  116. public string locationID { get; set; }
  117. [DataMember]
  118. public int SlotNO { get; set; }
  119. [DataMember]
  120. public DateTime AccessTime { get; set; }
  121. [DataMember]
  122. public SubstAccessType AccessType { get; set; }
  123. public SubstHistory(string loc,int slot,DateTime dt, SubstAccessType type)
  124. {
  125. locationID = loc;
  126. SlotNO = slot;
  127. AccessTime = dt;
  128. AccessType = type;
  129. }
  130. }
  131. [Serializable]
  132. [DataContract]
  133. public class WaferInfo : NotifiableItem
  134. {
  135. private string procesjobid;
  136. [DataMember]
  137. public string ProcessJobID
  138. {
  139. get
  140. {
  141. return procesjobid;
  142. }
  143. set
  144. {
  145. procesjobid = value;
  146. InvokePropertyChanged("ProcessJobID");
  147. }
  148. }
  149. private string controljobid;
  150. [DataMember]
  151. public string ControlJobID
  152. {
  153. get
  154. {
  155. return controljobid;
  156. }
  157. set
  158. {
  159. controljobid = value;
  160. InvokePropertyChanged("ControlJobID");
  161. }
  162. }
  163. private SubstrateTransportStatus substtransstatus;
  164. [DataMember]
  165. public SubstrateTransportStatus SubstTransStatus
  166. {
  167. get
  168. {
  169. return substtransstatus;
  170. }
  171. set
  172. {
  173. substtransstatus = value;
  174. InvokePropertyChanged("SubstTransStatus");
  175. }
  176. }
  177. private EnumE90Status Subste90status;
  178. [DataMember]
  179. public EnumE90Status SubstE90Status
  180. {
  181. get
  182. {
  183. return Subste90status;
  184. }
  185. set
  186. {
  187. Subste90status = value;
  188. InvokePropertyChanged("SubstE90Status");
  189. }
  190. }
  191. private SubstHistory[] substhists;
  192. [DataMember]
  193. public SubstHistory[] SubstHists
  194. {
  195. get
  196. {
  197. return substhists;
  198. }
  199. set
  200. {
  201. substhists = value;
  202. InvokePropertyChanged("SubstHists");
  203. }
  204. }
  205. public bool IsEmpty
  206. {
  207. get { return Status == WaferStatus.Empty; }
  208. }
  209. private string waferID;
  210. [DataMember]
  211. public string WaferID
  212. {
  213. get
  214. {
  215. return waferID;
  216. }
  217. set
  218. {
  219. waferID = value;
  220. InvokePropertyChanged("WaferID");
  221. }
  222. }
  223. private string _waferOrigin;
  224. [DataMember]
  225. public string WaferOrigin
  226. {
  227. get
  228. {
  229. return _waferOrigin;
  230. }
  231. set
  232. {
  233. _waferOrigin = value;
  234. InvokePropertyChanged("WaferOrigin");
  235. }
  236. }
  237. private string hostlaserMark1;
  238. [DataMember]
  239. public string HostLaserMark1
  240. {
  241. get
  242. {
  243. return hostlaserMark1;
  244. }
  245. set
  246. {
  247. hostlaserMark1 = value;
  248. InvokePropertyChanged("HostLaserMark1");
  249. }
  250. }
  251. private string hostlaserMark2;
  252. [DataMember]
  253. public string HostLaserMark2
  254. {
  255. get
  256. {
  257. return hostlaserMark2;
  258. }
  259. set
  260. {
  261. hostlaserMark2 = value;
  262. InvokePropertyChanged("HostLaserMark2");
  263. }
  264. }
  265. private string laserMarker;
  266. [DataMember]
  267. public string LaserMarker
  268. {
  269. get
  270. {
  271. return laserMarker;
  272. }
  273. set
  274. {
  275. laserMarker = value;
  276. InvokePropertyChanged("LaserMarker");
  277. }
  278. }
  279. private string t7Code;
  280. [DataMember]
  281. public string T7Code
  282. {
  283. get
  284. {
  285. return t7Code;
  286. }
  287. set
  288. {
  289. t7Code = value;
  290. InvokePropertyChanged("T7Code");
  291. }
  292. }
  293. private string _laserMarkerScore;
  294. [DataMember]
  295. public string LaserMarkerScore
  296. {
  297. get
  298. {
  299. return _laserMarkerScore;
  300. }
  301. set
  302. {
  303. _laserMarkerScore = value;
  304. InvokePropertyChanged("LaserMarker1Score");
  305. }
  306. }
  307. private string _t7CodeScore;
  308. [DataMember]
  309. public string T7CodeScore
  310. {
  311. get
  312. {
  313. return _t7CodeScore;
  314. }
  315. set
  316. {
  317. _t7CodeScore = value;
  318. InvokePropertyChanged("T7CodeScore");
  319. }
  320. }
  321. private string _imageFileName;
  322. [DataMember]
  323. public string ImageFileName
  324. {
  325. get
  326. {
  327. return _imageFileName;
  328. }
  329. set
  330. {
  331. _imageFileName = value;
  332. InvokePropertyChanged("ImageFileName");
  333. }
  334. }
  335. private string _imageFilePath;
  336. [DataMember]
  337. public string ImageFilePath
  338. {
  339. get
  340. {
  341. return _imageFilePath;
  342. }
  343. set
  344. {
  345. _imageFilePath = value;
  346. InvokePropertyChanged("ImageFilePath");
  347. }
  348. }
  349. [DataMember]
  350. public string LotId { get; set; }
  351. [DataMember]
  352. public string TransFlag { get; set; }
  353. private WaferStatus status;
  354. [DataMember]
  355. public WaferStatus Status
  356. {
  357. get
  358. {
  359. return status;
  360. }
  361. set
  362. {
  363. status = value;
  364. InvokePropertyChanged("Status");
  365. }
  366. }
  367. [DataMember]
  368. public string CurrentCarrierID
  369. {
  370. get;
  371. set;
  372. }
  373. [DataMember]
  374. public int Station
  375. {
  376. get;
  377. set;
  378. }
  379. [DataMember]
  380. public int Slot
  381. {
  382. get;
  383. set;
  384. }
  385. [DataMember]
  386. public int OriginStation
  387. {
  388. get;
  389. set;
  390. }
  391. [DataMember]
  392. public int OriginSlot
  393. {
  394. get;
  395. set;
  396. }
  397. [DataMember]
  398. public string OriginCarrierID
  399. {
  400. get;
  401. set;
  402. }
  403. [DataMember]
  404. public int DestinationStation
  405. {
  406. get;
  407. set;
  408. }
  409. [DataMember]
  410. public string DestinationCarrierID
  411. {
  412. get;
  413. set;
  414. }
  415. [DataMember]
  416. public int DestinationSlot
  417. {
  418. get;
  419. set;
  420. }
  421. [DataMember]
  422. public int NextStation
  423. {
  424. get;
  425. set;
  426. }
  427. [DataMember]
  428. public int NextStationSlot
  429. {
  430. get;
  431. set;
  432. }
  433. [DataMember]
  434. public int Notch
  435. {
  436. get;
  437. set;
  438. }
  439. [DataMember]
  440. public float UseCount
  441. {
  442. get;
  443. set;
  444. }
  445. [DataMember]
  446. public float UseTime
  447. {
  448. get;
  449. set;
  450. }
  451. [DataMember]
  452. public float UseThick
  453. {
  454. get;
  455. set;
  456. }
  457. [DataMember]
  458. public float Thick
  459. {
  460. get;
  461. set;
  462. }
  463. [DataMember]
  464. public WaferSize Size
  465. {
  466. get;
  467. set;
  468. }
  469. private bool isChecked;
  470. public bool IsChecked
  471. {
  472. get
  473. { return isChecked; }
  474. set
  475. {
  476. isChecked = value;
  477. InvokePropertyChanged("IsChecked");
  478. }
  479. }
  480. [DataMember]
  481. public string PPID //Recipe or Sequence
  482. {
  483. get;
  484. set;
  485. }
  486. private EnumWaferProcessStatus processState;
  487. [DataMember]
  488. public EnumWaferProcessStatus ProcessState
  489. {
  490. get
  491. {
  492. return processState;
  493. }
  494. set
  495. {
  496. processState = value;
  497. InvokePropertyChanged("ProcessStatus");
  498. }
  499. }
  500. private bool isSource;
  501. [DataMember]
  502. public bool IsSource
  503. {
  504. get
  505. {
  506. return isSource;
  507. }
  508. set
  509. {
  510. isSource = value;
  511. InvokePropertyChanged("IsSource");
  512. }
  513. }
  514. private bool isDestination;
  515. [DataMember]
  516. public bool IsDestination
  517. {
  518. get
  519. {
  520. return isDestination;
  521. }
  522. set
  523. {
  524. isDestination = value;
  525. InvokePropertyChanged("IsDestination");
  526. }
  527. }
  528. [DataMember]
  529. public Guid InnerId { get; set; }
  530. [DataMember]
  531. public ProcessJobInfo ProcessJob { get; set; }
  532. [DataMember]
  533. public int NextSequenceStep { get; set; }
  534. [DataMember]
  535. public bool HasWarning { get; set; }
  536. [DataMember]
  537. public bool HasError { get; set; }
  538. [DataMember]
  539. public WaferType WaferType { get; set; }
  540. public WaferInfo()
  541. {
  542. InnerId = Guid.Empty;
  543. }
  544. public WaferInfo(string waferID, WaferStatus status = WaferStatus.Empty) : this()
  545. {
  546. this.WaferID = waferID;
  547. this.Status = status;
  548. }
  549. public void Update(WaferInfo source)
  550. {
  551. InnerId = source.InnerId;
  552. WaferID = source.waferID;
  553. WaferOrigin = source.WaferOrigin;
  554. LaserMarker = source.LaserMarker;
  555. LaserMarkerScore = source.LaserMarkerScore;
  556. T7Code = source.T7Code;
  557. T7CodeScore = source.T7CodeScore;
  558. Status = source.Status;
  559. ProcessState = source.ProcessState;
  560. IsSource = source.IsSource;
  561. IsDestination = source.IsDestination;
  562. Station = source.Station;
  563. Slot = source.Slot;
  564. OriginStation = source.OriginStation;
  565. OriginSlot = source.OriginSlot;
  566. if(source.OriginCarrierID!=null) OriginCarrierID = source.OriginCarrierID;
  567. if (source.DestinationCarrierID != null) DestinationCarrierID = source.DestinationCarrierID;
  568. DestinationStation = source.DestinationStation;
  569. DestinationSlot = source.DestinationSlot;
  570. NextStation = source.NextStation;
  571. NextStationSlot = source.NextStationSlot;
  572. Notch = source.Notch;
  573. Size = source.Size;
  574. TransFlag = source.TransFlag;
  575. LotId = source.LotId;
  576. ProcessJob = source.ProcessJob;
  577. NextSequenceStep = source.NextSequenceStep;
  578. SubstHists = source.SubstHists;
  579. HasWarning = source.HasWarning;
  580. HasError = source.HasError;
  581. SubstE90Status = source.SubstE90Status;
  582. PPID = source.PPID;
  583. HostLaserMark1 = source.HostLaserMark1;
  584. HostLaserMark2 = source.HostLaserMark2;
  585. WaferType = source.WaferType;
  586. UseCount = source.UseCount;
  587. UseTime = source.UseTime;
  588. UseThick = source.UseThick;
  589. }
  590. public WaferInfo Clone()
  591. {
  592. WaferInfo source = this;
  593. return new WaferInfo()
  594. {
  595. InnerId = source.InnerId,
  596. WaferID = source.waferID,
  597. WaferOrigin = source.WaferOrigin,
  598. LaserMarker = source.LaserMarker,
  599. LaserMarkerScore = source.LaserMarkerScore,
  600. T7Code = source.T7Code,
  601. T7CodeScore = source.T7CodeScore,
  602. Status = source.Status,
  603. ProcessState = source.ProcessState,
  604. IsSource = source.IsSource,
  605. IsDestination = source.IsDestination,
  606. Station = source.Station,
  607. Slot = source.Slot,
  608. OriginStation = source.OriginStation,
  609. OriginSlot = source.OriginSlot,
  610. OriginCarrierID = source.OriginCarrierID,
  611. DestinationCarrierID = source.DestinationCarrierID,
  612. DestinationStation = source.DestinationStation,
  613. DestinationSlot = source.DestinationSlot,
  614. NextStation = source.NextStation,
  615. NextStationSlot = source.NextStationSlot,
  616. Notch = source.Notch,
  617. Size = source.Size,
  618. TransFlag = source.TransFlag,
  619. LotId = source.LotId,
  620. ProcessJob = source.ProcessJob,
  621. NextSequenceStep = source.NextSequenceStep,
  622. SubstHists = source.SubstHists,
  623. HasWarning = source.HasWarning,
  624. HasError = source.HasError,
  625. SubstE90Status = source.SubstE90Status,
  626. PPID = source.PPID,
  627. UseCount = source.UseCount,
  628. UseTime = source.UseTime,
  629. UseThick = source.UseThick,
  630. };
  631. }
  632. public void SetEmpty()
  633. {
  634. this.InnerId = Guid.Empty;
  635. this.WaferID = string.Empty;
  636. this.WaferOrigin = string.Empty;
  637. this.LaserMarker = string.Empty;
  638. this.LaserMarkerScore = string.Empty;
  639. this.T7Code = string.Empty;
  640. this.T7CodeScore = string.Empty;
  641. this.Status = (int)WaferStatus.Empty;
  642. this.ProcessState = EnumWaferProcessStatus.Idle;
  643. this.IsSource = false;
  644. this.IsDestination = false;
  645. this.Station = 0;
  646. this.Slot = 0;
  647. this.OriginStation = 0;
  648. this.OriginSlot = 0;
  649. //this.SourceStation = 0;
  650. //this.SourceSlot = 0;
  651. this.DestinationStation = 0;
  652. this.DestinationSlot = 0;
  653. this.Notch = 0;
  654. //保留最后一次的Wafer Size信息,便于后续判断和优化
  655. //this.Size = WaferSize.WS0;
  656. this.TransFlag = string.Empty;
  657. this.LotId = string.Empty;
  658. this.ProcessJob = null;
  659. this.NextSequenceStep = 0;
  660. this.HasWarning = false;
  661. this.HasError = false;
  662. this.PPID = "";
  663. this.UseCount = 0;
  664. this.UseTime = 0;
  665. this.UseThick = 0;
  666. }
  667. }
  668. public class WaferTypeInfo
  669. {
  670. /// <summary>
  671. /// WaferType名称
  672. /// </summary>
  673. public string Name { get; set; }
  674. public string FullName { get; set; }
  675. /// <summary>
  676. /// 是否进行膜厚
  677. /// </summary>
  678. public bool AccFilmThick { get; set; }
  679. /// <summary>
  680. /// 备用waferType
  681. /// 在Auto流程中配置了此项的waferType可以缺少,如果缺少使用此项配置的类型填充
  682. /// </summary>
  683. public string AlternativeWaferType { get; set; }
  684. /// <summary>
  685. /// 是否是ReturnWafer类型
  686. /// </summary>
  687. public bool IsReturnWafer { get; set; }
  688. /// <summary>
  689. /// ReturnWafer类型
  690. /// IsReturnWafer=true,ReturnWaferType不能是可用waferType
  691. /// 即此Type作为ReturnWafer,不允许有其他ReturnWafer
  692. /// IsReturnWafer=false,可以不设定此参数,如果设定就必须是IsReturnWafer=true的waferType
  693. /// </summary>
  694. public string ReturnWaferType { get; set; }
  695. /// <summary>
  696. /// 主要用在UI界面上,不同的type显示的颜色
  697. /// </summary>
  698. public string ShowColor { get; set; }
  699. /// <summary>
  700. /// 是否可多次使用
  701. /// </summary>
  702. public bool CanProcessContinuously { get; set; }
  703. /// <summary>
  704. /// 是否是Dummy类型
  705. /// </summary>
  706. public bool IsDummy { get; set; }
  707. }
  708. }