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- using System;
- using System.Collections.Generic;
- using System.IO;
- using System.Linq;
- using System.Threading.Tasks;
- using System.Windows.Media;
- using System.Xml;
- using Aitex.Common.Util;
- using Aitex.Core.Common;
- using Aitex.Core.RT.DataCenter;
- using Aitex.Core.RT.Device;
- using Aitex.Core.RT.Event;
- using Aitex.Core.RT.Fsm;
- using Aitex.Core.RT.Log;
- using Aitex.Core.RT.OperationCenter;
- using Aitex.Core.RT.RecipeCenter;
- using Aitex.Core.RT.Routine;
- using Aitex.Core.RT.SCCore;
- using Aitex.Core.Util;
- using Aitex.Core.Utilities;
- using FurnaceRT.Devices;
- using FurnaceRT.Equipments.CarrierRobots;
- using FurnaceRT.Equipments.FIMSs;
- using FurnaceRT.Equipments.Jobs;
- using FurnaceRT.Equipments.LPs;
- using FurnaceRT.Equipments.PMs;
- using FurnaceRT.Equipments.PMs.RecipeExecutions;
- using FurnaceRT.Equipments.Schedulers;
- using FurnaceRT.Equipments.Stockers;
- using FurnaceRT.Equipments.WaferRobots;
- using FurnaceRT.Instances;
- using MECF.Framework.Common.Alarms;
- using MECF.Framework.Common.DataCenter;
- using MECF.Framework.Common.Device.Bases;
- using MECF.Framework.Common.Equipment;
- using MECF.Framework.Common.Jobs;
- using MECF.Framework.Common.SCCore;
- using MECF.Framework.Common.SubstrateTrackings;
- using MECF.Framework.FA.Core.FAControl;
- using MECF.Framework.RT.Core.Applications;
- using MECF.Framework.RT.Core.IoProviders;
- using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.PMs;
- using AutoTransfer = FurnaceRT.Equipments.Jobs.AutoTransfer;
- using ReturnAllWafer = FurnaceRT.Equipments.Jobs.ReturnAllWafer;
- namespace FurnaceRT.Equipments.Systems
- {
- public enum RtState
- {
- Init,
- Initializing,
- Idle,
- Transfer,
- AutoRunning,
- AutoIdle,
- ReturnAllWafer,
- Error,
- Loading,
- Unloading,
- ChargeProcessDischarging,
- LoadProcessStockering,
- LoadProcessUnloading,
- ReturnWafer,
- }
- public enum TransferJobState
- {
- Idle,
- Error,
- Loading,
- Unloading,
- }
- public enum ProcessJobState
- {
- Idle,
- Error,
- Charging,
- Processing,
- Cooling,
- Discharging,
- }
- public partial class EquipmentManager : FsmDevice
- {
- public enum MSG
- {
- MoveWafer,
- ReturnAllWafer,
- Stop,
- HOME,
- RESET,
- ABORT,
- ERROR,
- ToInit,
- SetAutoMode,
- SetManualMode,
- FAJobCommand,
- CreateJob,
- PauseJob,
- ResumeJob,
- StartJob,
- StopJob,
- AbortJob,
- JobAutoStart,
- JobDone,
- ModuleError,
- Map,
- Load,
- Unload,
- ChargeProcessDischarge,
- LoadProcessStocker,
- LoadProcessUnload,
- CancelUnloadingJob,
- ToUnloading,
- ToLoading,
- CreateTransferJob,
- AbortTransferJob,
- }
- public Dictionary<ModuleName, ModuleFsmDevice> Modules { get; set; }
- public bool IsAutoMode
- {
- get
- {
- return FsmState == (int)RtState.AutoRunning || FsmState == (int)RtState.AutoIdle;
- }
- }
- public bool IsReturnWafer
- {
- get
- {
- return FsmState == (int)RtState.ReturnAllWafer || FsmState == (int)RtState.ReturnWafer;
- }
- }
- public bool IsInit
- {
- get { return FsmState == (int)RtState.Init; }
- }
- public bool IsIdle
- {
- get { return FsmState == (int)RtState.Idle; }
- }
- public bool IsAlarm
- {
- get { return FsmState == (int)RtState.Error; }
- }
- public bool IsRunning
- {
- get
- {
- return !IsAlarm && !IsIdle && !IsInit && (FsmState != (int)RtState.AutoIdle);
- }
- }
- public bool IsReturnWaferMode
- {
- get
- {
- return FsmState == (int)RtState.ReturnAllWafer || FsmState == (int)RtState.ReturnWafer;
- }
- }
- public bool IsAlarmConditionBuzzerOn { get; set; }
- public TransferJobState TransferJobStatus { get; set; } = TransferJobState.Idle;
- public ProcessJobState ProcessJobStatus { get; set; } = ProcessJobState.Idle;
- public object JsonConvert { get; private set; }
- private bool _isInited;
- protected IRoutine _manualTransfer;
- private AutoTransfer _auto = null;
- private TransferJob _transferJob = null;
- protected IRoutine _homeAll;
- protected IRoutine _returnAll;
- private string _batchType;
- private string _processJob;
- private string _processRecipe;
- private DeviceTimer _coolTimer = new DeviceTimer();
- private int _cycledCount = 0;
- private int _jobMSG = 0;
- private object[] _jobParas;
- private object _locker = new object();
- private List<string> _modules;
- private PeriodicJob _cycleJob;
- private RD_TRIG _plcConnectTrig = new RD_TRIG();
- public List<ModuleName> StockerNameForFATJob = new List<ModuleName>();
- public EquipmentManager()
- {
- Module = "System";
- Name = "System";
- Modules = new Dictionary<ModuleName, ModuleFsmDevice>();
- _modules = new List<string>() { "System" };
- }
- public override bool Initialize()
- {
- InitDevices();
- InitModules();
- EnumLoop<RtState>.ForEach((item) =>
- {
- MapState((int)item, item.ToString());
- });
- EnumLoop<MSG>.ForEach((item) =>
- {
- MapMessage((int)item, item.ToString());
- });
- EnableFsm(50, RtState.Init);
- BuildTransitionTable();
- SubscribeDataVariable();
- SubscribeOperation();
- InitRoutine();
- InitAlarmDefine();
- _auto = new AutoTransfer();
- _transferJob = new TransferJob();
- _cycleJob = new PeriodicJob(100, OnCycleTimer, Name, true);
- Singleton<EventManager>.Instance.OnAlarmEvent += Instance_OnAlarmEvent;
- return true;
- }
- protected void BuildModules(params ModuleFsmDevice[] modules)
- {
- if (modules != null && modules.Length > 0)
- {
- foreach (var moduleFsmDevice in modules)
- {
- Modules[ModuleHelper.Converter(moduleFsmDevice.Module)] = moduleFsmDevice;
- }
- foreach (var modulesKey in Modules.Keys)
- {
- _modules.Add(modulesKey.ToString());
- }
- foreach (var modulesValue in Modules.Values)
- {
- modulesValue.Initialize();
- }
- }
- }
- protected virtual void InitRoutine()
- {
- _homeAll = new HomeAll();
- _returnAll = new ReturnAllWafer();
- _dbCallback = new SchedulerDBCallback();
- }
- //private PeriodicJob _job1;
- //Stopwatch _sw = new Stopwatch();
- //private bool OnJob1()
- //{
- // _sw.Restart();
- // BufferModule buffer = Modules[ModuleName.Buffer] as BufferModule;
- // if (!buffer.CheckToPostMessage(BufferModule.MSG.InTransfer))
- // {
- // System.Diagnostics.Trace.Assert(false)
- // System.Diagnostics.Trace.WriteLine("fail to in transfer");
- // }
- // if (buffer.IsIdle)
- // {
- // System.Diagnostics.Trace.Assert(false);
- // System.Diagnostics.Trace.WriteLine("!!!==========>IsIdle");
- // }
- // //System.Diagnostics.Trace.Assert(buffer.IsIdle, $"in {buffer.StringFsmStatus}");
- // while (buffer.IsIdle)
- // {
- // Thread.Sleep(5);
- // }
- // //buffer.NoteTransferStop(ModuleName.EfemRobot, Hand.Blade1, 0, EnumTransferType.Place);
- // //Thread.Sleep(15);
- // if (!buffer.CheckToPostMessage(BufferModule.MSG.TransferComplete))
- // {
- // System.Diagnostics.Trace.Assert(false);
- // System.Diagnostics.Trace.WriteLine("fail to complete");
- // }
- // //if (!buffer.IsIdle)
- // //{
- // // System.Diagnostics.Trace.WriteLine("not idle");
- // //}
- // System.Diagnostics.Trace.WriteLine($" === {_sw.ElapsedMilliseconds}");
- // while (!buffer.IsIdle)
- // {
- // Thread.Sleep(5);
- // }
- // return true;
- //}
- private void BuildTransitionTable()
- {
- //Init sequence
- Transition(RtState.Init, MSG.HOME, FsmStartHome, RtState.Initializing);
- Transition(RtState.Idle, MSG.HOME, FsmStartHome, RtState.Initializing);
- Transition(RtState.Error, MSG.HOME, FsmStartHome, RtState.Initializing);
- Transition(RtState.Error, MSG.ToInit, null, RtState.Init);
- Transition(RtState.Initializing, FSM_MSG.TIMER, FsmMonitorHome, RtState.Idle);
- Transition(RtState.Initializing, MSG.ERROR, fError, RtState.Error);
- Transition(RtState.Initializing, MSG.ABORT, FsmAbort, RtState.Init);
- //Reset
- AnyStateTransition(MSG.ERROR, fError, RtState.Error);
- AnyStateTransition((int)FSM_MSG.ALARM, fError, (int)RtState.Error);
- Transition(RtState.Error, MSG.RESET, fStartReset, RtState.Idle);
- Transition(RtState.Init, MSG.RESET, fStartReset, RtState.Init);
- Transition(RtState.Idle, MSG.RESET, fStartReset, RtState.Idle);
- Transition(RtState.AutoIdle, MSG.RESET, fStartReset, RtState.AutoIdle);
- Transition(RtState.AutoRunning, MSG.RESET, fStartReset, RtState.AutoRunning);
- Transition(RtState.ReturnWafer, MSG.RESET, fStartReset, RtState.ReturnWafer);
- //Auto/manual sequence
- Transition(RtState.Idle, MSG.SetAutoMode, fStartAutoTransfer, RtState.AutoIdle);
- Transition(RtState.AutoRunning, FSM_MSG.TIMER, fAutoTransfer, RtState.AutoRunning);
- Transition(RtState.AutoRunning, MSG.JobAutoStart, FsmJobAutoStart, RtState.Idle);
- Transition(RtState.AutoRunning, MSG.ABORT, FsmAbort, RtState.Idle);
- Transition(RtState.AutoRunning, MSG.JobDone, null, RtState.AutoIdle);
- Transition(RtState.Idle, MSG.CreateJob, FsmCreateJob, RtState.AutoRunning);
- Transition(RtState.Idle, MSG.LoadProcessUnload, FsmStartLoadProcessUnload, RtState.AutoRunning);
- Transition(RtState.Idle, MSG.LoadProcessStocker, FsmStartLoadProcessStocker, RtState.AutoRunning);
- Transition(RtState.AutoRunning, MSG.FAJobCommand, FsmFAJobCommand, RtState.AutoRunning);
- Transition(RtState.AutoRunning, MSG.CreateJob, FsmCreateJob, RtState.AutoRunning);
- Transition(RtState.AutoRunning, MSG.StartJob, FsmStartJob, RtState.AutoRunning);
- Transition(RtState.AutoRunning, MSG.PauseJob, FsmPauseJob, RtState.AutoRunning);
- Transition(RtState.AutoRunning, MSG.ResumeJob, FsmResumeJob, RtState.AutoRunning);
- Transition(RtState.AutoRunning, MSG.StopJob, FsmStopJob, RtState.AutoRunning);
- Transition(RtState.AutoRunning, MSG.AbortJob, FsmAbortJob, RtState.AutoRunning);
- Transition(RtState.AutoRunning, MSG.ModuleError, FsmModuleError, RtState.AutoRunning);
- Transition(RtState.AutoRunning, MSG.Load, FsmStartLoad, RtState.AutoRunning);
- Transition(RtState.AutoRunning, MSG.Unload, FsmStartUnload, RtState.AutoRunning);
- Transition(RtState.Idle, MSG.CreateTransferJob, FsmCreateTransferJob, RtState.AutoRunning);
- Transition(RtState.AutoRunning, MSG.CreateTransferJob, FsmCreateTransferJob, RtState.AutoRunning);
- Transition(RtState.AutoRunning, MSG.AbortTransferJob, FsmAbortTransferJob, RtState.AutoRunning);
- Transition(RtState.AutoRunning, MSG.CancelUnloadingJob, FsmCancelUnloadingJob, RtState.AutoRunning);
- Transition(RtState.AutoRunning, MSG.LoadProcessUnload, FsmStartLoadProcessUnload, RtState.AutoRunning);
- Transition(RtState.AutoRunning, MSG.LoadProcessStocker, FsmStartLoadProcessStocker, RtState.AutoRunning);
- Transition(RtState.AutoIdle, MSG.FAJobCommand, FsmFAJobCommand, RtState.AutoRunning);
- Transition(RtState.AutoIdle, FSM_MSG.TIMER, FsmMonitorAutoIdle, RtState.AutoIdle);
- Transition(RtState.AutoIdle, MSG.SetManualMode, FsmStartSetManualMode, RtState.Idle);
- Transition(RtState.AutoIdle, MSG.CreateJob, FsmCreateJob, RtState.AutoRunning);
- Transition(RtState.AutoIdle, MSG.StartJob, FsmStartJob, RtState.AutoRunning);
- Transition(RtState.AutoIdle, MSG.ABORT, FsmAbort, RtState.Idle);
- Transition(RtState.AutoIdle, MSG.AbortJob, FsmAbortJob, RtState.AutoIdle);
- Transition(RtState.AutoIdle, MSG.Load, FsmStartLoad, RtState.AutoIdle);
- Transition(RtState.AutoIdle, MSG.Unload, FsmStartUnload, RtState.AutoIdle);
- Transition(RtState.AutoIdle, MSG.CreateTransferJob, FsmCreateTransferJob, RtState.AutoRunning);
- Transition(RtState.AutoIdle, MSG.AbortTransferJob, FsmAbortTransferJob, RtState.AutoIdle);
- Transition(RtState.AutoIdle, MSG.LoadProcessUnload, FsmStartLoadProcessUnload, RtState.AutoRunning);
- Transition(RtState.AutoIdle, MSG.LoadProcessStocker, FsmStartLoadProcessStocker, RtState.AutoRunning);
- EnterExitTransition<RtState, FSM_MSG>(RtState.AutoRunning, null, FSM_MSG.NONE, fExitAutoTransfer);
- //return all wafer
- //Transition(RtState.Idle, MSG.ReturnAllWafer, FsmStartReturnAllWafer, RtState.ReturnAllWafer);
- //Transition(RtState.ReturnAllWafer, FSM_MSG.TIMER, FsmMonitorReturnAllWafer, RtState.Idle);
- //Transition(RtState.ReturnAllWafer, MSG.ABORT, FsmAbortReturnAllWafer, RtState.Idle);
- //Return wafer
- Transition(RtState.Idle, MSG.ReturnAllWafer, FsmStartReturnWafer, RtState.ReturnWafer);
- Transition(RtState.AutoIdle, MSG.ReturnAllWafer, FsmStartReturnWafer, RtState.ReturnWafer);
- Transition(RtState.ReturnWafer, FSM_MSG.TIMER, FsmMonitorReturnWafer, RtState.Idle);
- Transition(RtState.ReturnWafer, MSG.ABORT, FsmAbort, RtState.Idle);
- //Transfer sequence
- Transition(RtState.Idle, MSG.MoveWafer, fStartTransfer, RtState.Transfer);
- Transition(RtState.Transfer, FSM_MSG.TIMER, fTransfer, RtState.Idle);
- EnterExitTransition<RtState, FSM_MSG>(RtState.Transfer, null, FSM_MSG.NONE, fExitTransfer);
- Transition(RtState.Transfer, MSG.ABORT, FsmAbort, RtState.Idle);
- }
- void SubscribeDataVariable()
- {
- DATA.Subscribe("System.FFUKeyDict", () => GetDeviceKeyDict(DeviceName.IoFFUNameKey), SubscriptionAttribute.FLAG.IgnoreSaveDB);
- DATA.Subscribe("System.NameKeyDict", () => GetALLDeviceKeyDict(), SubscriptionAttribute.FLAG.IgnoreSaveDB);
- DATA.Subscribe("Rt.Status", () => StringFsmStatus);
- DATA.Subscribe("System.IsInitialized", () => _isInited);
- DATA.Subscribe("System.IsIdle", () => IsIdle || IsInit || (FsmState == (int)RtState.AutoIdle));
- DATA.Subscribe("System.IsAlarm", () => IsAlarm);
- DATA.Subscribe("System.IsBusy", () => IsRunning);
- DATA.Subscribe("System.IsAutoRunning", () => IsRunning);
- DATA.Subscribe("System.IsAlarmConditionBuzzerOn", () => IsAlarmConditionBuzzerOn);
- DATA.Subscribe("System.Modules", () => _modules);
- }
- List<string> GetDeviceKeyDict(string key)
- {
- List<string> result = null;
- if (SC.GetStringValue("System.SetUp.ToolType") != "ELK") return null;
- GetXmlElement("DeviceModelPM", key, ref result);
- return result;
- }
- Dictionary<string, List<string>> GetALLDeviceKeyDict()
- {
- return GetXmlElement("DeviceModelPM");
- }
- public void GetXmlElement(string fileName, string type, ref List<string> result, bool isSystem = false)
- {
- result = new List<string>();
- XmlDocument xmlDoc = new XmlDocument();
- var cfDirPath = PathManager.GetCfgDir();
- var path = cfDirPath + $"IO\\{SC.GetStringValue("System.SetUp.ToolType")}\\{fileName}.xml";
- if (!File.Exists(path)) return;
- xmlDoc.Load(path);
- XmlNode node = xmlDoc.SelectSingleNode("DeviceModelDefine");
- foreach (XmlNode item in node.ChildNodes)
- {
- if (item.NodeType != XmlNodeType.Element) continue;
- var element = item as XmlElement;
- var classType = element.GetAttribute("classType");
- if (classType == null) continue;
- classType = classType.Split('.').LastOrDefault();
- if (classType == type)
- {
- foreach (XmlNode children in item.ChildNodes)
- {
- if (children is XmlElement childElement)
- {
- if (result.Contains(childElement.GetAttribute("id"))) continue;
- var key = isSystem ? $"System.{childElement.GetAttribute("id")}.DeviceData" : $"PM1.{childElement.GetAttribute("id")}.DeviceData";
- result.Add(key);
- }
- }
- }
- }
- }
- public Dictionary<string, List<string>> GetXmlElement(string fileName, bool isSystem = false)
- {
- Dictionary<string, List<string>> result = new Dictionary<string, List<string>>();
- XmlDocument xmlDoc = new XmlDocument();
- var cfDirPath = PathManager.GetCfgDir();
- var path = cfDirPath + $"IO\\{SC.GetStringValue("System.SetUp.ToolType")}\\{fileName}.xml";
- if (!File.Exists(path)) return result;
- xmlDoc.Load(path);
- XmlNode node = xmlDoc.SelectSingleNode("DeviceModelDefine");
- foreach (XmlNode item in node.ChildNodes)
- {
- if (item.NodeType != XmlNodeType.Element) continue;
- var element = item as XmlElement;
- var classType = element.GetAttribute("classType");
- if (classType == null) continue;
- classType = classType.Split('.').LastOrDefault();
- result[classType] = new List<string>();
- foreach (XmlNode children in item.ChildNodes)
- {
- if (children.Name != classType) continue;//类型限定一致
- if (children is XmlElement childElement)
- {
- if (result[classType].Contains(childElement.GetAttribute("id"))) continue;
- var key = isSystem ? $"System.{childElement.GetAttribute("id")}.DeviceData" : $"PM1.{childElement.GetAttribute("id")}.DeviceData";
- result[classType].Add(key);
- }
- }
- }
- return result;
- }
- void SubscribeOperation()
- {
- OP.Subscribe("CreateWafer", InvokeCreateWafer);
- OP.Subscribe("System.UpdateWafer", InvokeUpdateWafer);
- OP.Subscribe("CreateWaferFromTo", InvokeCreateWaferFromTo);
- OP.Subscribe("DeleteWafer", InvokeDeleteWafer);
- OP.Subscribe("DeleteWaferFromTo", InvokeDeleteWaferFromTo);
- OP.Subscribe("CreateCassetteWafer", InvokeCreateCassetteWafer);
- OP.Subscribe("DeleteCassetteWafer", InvokeDeleteCassetteWafer);
- OP.Subscribe("System.CreateCarrier", InvokeCreateCarrier);
- OP.Subscribe("System.DeleteCarrier", InvokeDeleteCarrier);
- OP.Subscribe("System.SetLotID", InvokeSetLotID);
- OP.Subscribe("System.DeleteAllWafer", InvokeDeleteAllWafer);
- OP.Subscribe("System.DeleteAllCarrier", InvokeDeleteAllCarrier);
- OP.Subscribe("ReturnWafer", InvokeReturnWafer);
- OP.Subscribe("System.SignalTower.SwitchOffBuzzer", InvokeSwitchOffBuzzer);
- OP.Subscribe("System.ReturnAllWafer", (string cmd, object[] args) =>
- {
- return CheckToPostMessage((int)MSG.ReturnAllWafer);
- });
- OP.Subscribe("System.MoveWafer", (string cmd, object[] args) =>
- {
- if (!Enum.TryParse((string)args[0], out ModuleName source))
- {
- EV.PostWarningLog(Name, $"Parameter source {(string)args[0]} not valid");
- return false;
- }
- if (!Enum.TryParse((string)args[2], out ModuleName destination))
- {
- EV.PostWarningLog(Name, $"Parameter destination {(string)args[1]} not valid");
- return false;
- }
- if (args.Length > 8)
- {
- return CheckToPostMessage((int)MSG.MoveWafer, source, (int)args[1], destination, (int)args[3],
- (bool)args[4], (int)args[5], (bool)args[6], (int)args[7]);
- }
- else if (args.Length > 5)
- {
- return CheckToPostMessage((int)MSG.MoveWafer, source, (int)args[1], destination, (int)args[3], (bool)args[4]);
- }
- return CheckToPostMessage((int)MSG.MoveWafer, source, (int)args[1], destination, (int)args[3]);
- });
- OP.Subscribe("System.HomeAll", (string cmd, object[] args) =>
- {
- return CheckToPostMessage((int)MSG.HOME);
- });
- OP.Subscribe("System.Abort", (string cmd, object[] args) =>
- {
- return CheckToPostMessage((int)MSG.ABORT);
- });
- OP.Subscribe("System.Reset", (string cmd, object[] args) =>
- {
- return CheckToPostMessage((int)MSG.RESET);
- });
- OP.Subscribe("System.SetAutoMode", (string cmd, object[] args) =>
- {
- return CheckToPostMessage((int)MSG.SetAutoMode);
- });
- OP.Subscribe("System.SetManualMode", (string cmd, object[] args) =>
- {
- return CheckToPostMessage((int)MSG.SetManualMode);
- });
- OP.Subscribe("System.CreateJob", (string cmd, object[] args) =>
- {
- return CheckToPostMessage((int)MSG.CreateJob, args[0]);
- });
- OP.Subscribe("System.StartJob", (string cmd, object[] args) =>
- {
- return CheckToPostMessage((int)MSG.StartJob, args[0]);
- });
- OP.Subscribe("System.PauseJob", (string cmd, object[] args) =>
- {
- return CheckToPostMessage((int)MSG.PauseJob, args[0]);
- });
- OP.Subscribe("System.ResumeJob", (string cmd, object[] args) =>
- {
- return CheckToPostMessage((int)MSG.ResumeJob, args[0]);
- });
- OP.Subscribe("System.StopJob", (string cmd, object[] args) =>
- {
- return CheckToPostMessage((int)MSG.StopJob, args[0]);
- });
- OP.Subscribe("System.AbortJob", (string cmd, object[] args) =>
- {
- return CheckToPostMessage((int)MSG.AbortJob, args[0]);
- });
- OP.Subscribe("System.CoolingSkip", (string cmd, object[] args) =>
- {
- CoolingSkip();
- return true;
- });
- OP.Subscribe("System.ShutDown", InvokeShutDown);
- OP.Subscribe($"System.Load", (string cmd, object[] args) => CheckToPostJobMessage((int)MSG.CreateTransferJob, args));
- OP.Subscribe($"System.Unload", (string cmd, object[] args) => CheckToPostJobMessage((int)MSG.CreateTransferJob, args));
- OP.Subscribe($"System.ChargeProcessDischarge", (string cmd, object[] args) => CheckToPostJobMessage((int)MSG.CreateJob, args));
- OP.Subscribe($"System.LoadProcessUnload", (string cmd, object[] args) => CheckToPostJobMessage((int)MSG.LoadProcessUnload, args));
- OP.Subscribe($"System.LoadProcessStocker", (string cmd, object[] args) => CheckToPostJobMessage((int)MSG.LoadProcessStocker, args));
- OP.Subscribe($"System.MonitorLoad", (string cmd, object[] args) => CheckToPostJobMessage((int)MSG.CreateTransferJob, args));
- OP.Subscribe($"System.MonitorUnload", (string cmd, object[] args) => CheckToPostJobMessage((int)MSG.CreateTransferJob, args));
- OP.Subscribe($"System.SDLoad", (string cmd, object[] args) => CheckToPostJobMessage((int)MSG.CreateTransferJob, args));
- OP.Subscribe($"System.SDUnload", (string cmd, object[] args) => CheckToPostJobMessage((int)MSG.CreateTransferJob, args));
- OP.Subscribe($"{Module}.AlarmAction", (string cmd, object[] args) =>
- {
- Enum.TryParse(args[0].ToString(), out AlarmAction alarmAction);
- if (alarmAction == AlarmAction.ClearAll)
- {
- CheckToPostMessage((int)MSG.RESET);
- return true;
- }
- string eventName = null;
- if (args.Length > 1)
- eventName = args[1].ToString();
- if (eventName != null)
- {
- EV.ClearAlarmEvent(eventName);
- var item = _triggeredAlarmList.FirstOrDefault(x => x.EventEnum == eventName);
- if (item != null)
- {
- item.Reset();
- _triggeredAlarmList.Remove(item);
- }
- if (item != null)
- {
- switch (alarmAction)
- {
- case AlarmAction.Retry:
- {
- CheckToPostMessage((int)item.RetryMessage, item.RetryMessageParas);
- }
- break;
- case AlarmAction.Abort:
- {
- CheckToPostMessage((int)MSG.ABORT);
- }
- break;
- case AlarmAction.Clear:
- {
- int alarmCount = 0;
- var alarms = EV.GetAlarmEvent();
- foreach (var alarm in alarms)
- {
- if (alarm.Level == EventLevel.Alarm && alarm.Source == Name)
- alarmCount++;
- }
- if (alarmCount == 0)
- CheckToPostMessage((int)MSG.RESET);
- }
- break;
- case AlarmAction.Continue:
- {
- int alarmCount = 0;
- var alarms = EV.GetAlarmEvent();
- foreach (var alarm in alarms)
- {
- if (alarm.Level == EventLevel.Alarm && alarm.Source == Name)
- alarmCount++;
- }
- if (alarmCount == 0)
- CheckToPostMessage((int)MSG.RESET);
- }
- break;
- }
- }
- }
- return true;
- });
- }
- private void Instance_OnAlarmEvent(EventItem item)
- {
- if (item != null && item.Level == EventLevel.Alarm && (item.Source == Name || item.Source == Module))
- {
- DEVICE.GetDevice<SignalTowerBase>("System.SignalTower")?.Reset();
- LOG.Write($"{item.Source} {item.EventEnum} {item.Description}\n");
- PostMsg(MSG.ERROR);
- }
- }
- #region Init
- private bool FsmStartHome(object[] objs)
- {
- _isInited = false;
- return _homeAll.Start() == Result.RUN;
- }
- private bool FsmMonitorHome(object[] objs)
- {
- Result ret = _homeAll.Monitor();
- if (ret == Result.DONE)
- {
- _isInited = true;
- return true;
- }
- if (ret == Result.FAIL)
- {
- PostMsg(MSG.ERROR);
- }
- return false;
- }
- private bool fError(object[] objs)
- {
- if (FsmState == (int)RtState.Transfer)
- {
- }
- return true;
- }
- #endregion
- #region job
- private bool FsmStartLoad(object[] param)
- {
- if (_transferJob.CreateJob(param) != Result.RUN)
- {
- return false;
- }
- return true;
- }
- private bool FsmStartUnload(object[] param)
- {
- if (_transferJob.CreateJob(param) != Result.RUN)
- {
- return false;
- }
- return true;
- }
- private bool FsmStartLoadProcessStocker(object[] param)
- {
- var paramDic = (Dictionary<string, object>)param[0];
- if (paramDic == null)
- {
- LoadProcessStockerStartFailedWarning.Set("Parameter not valid");
- return false;
- }
- paramDic["TransferType"] = "Loading";
- param[0] = paramDic;
- if (_transferJob.CreateJob(param) != Result.RUN)
- {
- return false;
- }
- if (_auto.CreateJob(param) != Result.RUN)
- {
- return false;
- }
- return true;
- }
- private bool FsmStartLoadProcessUnload(object[] param)
- {
- var paramDic = (Dictionary<string, object>)param[0];
- if (paramDic == null)
- {
- LoadProcessUnloadStartFailedWarning.Set("Parameter not valid");
- return false;
- }
- paramDic["TransferType"] = "Loading";
- param[0] = paramDic;
- if (_transferJob.CreateJob(param) != Result.RUN)
- {
- return false;
- }
- if (_auto.CreateJob(param) != Result.RUN)
- {
- return false;
- }
- paramDic["TransferType"] = "Unloading";
- param[0] = paramDic;
- if (_transferJob.CreateJob(param) != Result.RUN)
- {
- return false;
- }
- return true;
- }
- #endregion
- #region AutoTransfer
- private bool FsmMonitorAutoIdle(object[] param)
- {
- Result ret = _transferJob.Monitor();
- _auto.Monitor();
- if (!_auto.CheckAllJobDone() || !_transferJob.CheckAllJobDone())
- {
- return false;
- }
- return ret == Result.DONE;
- }
- private bool FsmStartSetManualMode(object[] objs)
- {
- if (_auto.HasJobRunning)
- {
- EV.PostWarningLog("System", "Can not change to manual mode, abort running job first");
- return false;
- }
- return true;
- }
- private bool fStartAutoTransfer(object[] objs)
- {
- Result ret = _auto.Start(objs);
- return ret == Result.RUN;
- }
- private bool fAutoTransfer(object[] objs)
- {
- Result ret = _transferJob.Monitor();
- _auto.Monitor();
- if (_auto.CheckAllJobDone() && _transferJob.CheckAllJobDone())
- {
- if (!CheckToPostMessage((int)MSG.JobDone))
- return false;
- }
- return ret == Result.DONE;
- }
- private bool fExitAutoTransfer(object[] objs)
- {
- _auto.Clear();
- _transferJob.Clear();
- return true;
- }
- private bool fAbortAutoTransfer(object[] objs)
- {
- _auto.Clear();
- _transferJob.Clear();
- return true;
- }
- #endregion
- #region return all wafer
- private bool FsmAbortReturnAllWafer(object[] param)
- {
- return true;
- }
- private bool FsmMonitorReturnAllWafer(object[] param)
- {
- return _returnAll.Monitor() == Result.DONE;
- }
- private bool FsmStartReturnAllWafer(object[] param)
- {
- return _returnAll.Start() == Result.RUN;
- }
- #endregion
- #region Transfer
- private bool fStartTransfer(object[] objs)
- {
- Result ret = _manualTransfer.Start(objs);
- if (ret == Result.FAIL || ret == Result.DONE)
- return false;
- return ret == Result.RUN;
- }
- private bool fTransfer(object[] objs)
- {
- Result ret = _manualTransfer.Monitor();
- if (ret == Result.FAIL)
- {
- PostMsg(MSG.ERROR);
- return false;
- }
- return ret == Result.DONE;
- }
- private bool fExitTransfer(object[] objs)
- {
- return true;
- }
- private bool fAbortTransfer(object[] objs)
- {
- return true;
- }
- #endregion
- #region reset
- private bool fStartReset(object[] objs)
- {
- EV.ClearAlarmEvent();
- Singleton<DeviceEntity>.Instance.PostMsg(DeviceEntity.MSG.RESET);
- Singleton<FAJobController>.Instance.ClearAlarm();
- IoProviderManager.Instance.Reset();
- foreach (var modulesValue in Modules.Values)
- {
- modulesValue.Reset();
- }
- _triggeredAlarmList.ForEach(x => x.Reset());
- _triggeredAlarmList.Clear();
- if (FsmState == (int)RtState.Error)
- {
- if (!_isInited)
- {
- PostMsg(MSG.ToInit);
- return false;
- }
- return true;
- }
- return false;
- }
- #endregion
- private bool FsmCreateJob(object[] param)
- {
- if (FsmState != (int)RtState.AutoRunning && CarrierManager.Instance.CheckHasCarrier(ModuleName.CarrierRobot, 0))
- {
- EV.PostWarningLog("System", $"FOUP robot already has a FOUP, create job failed");
- return false;
- }
- _auto.CreateJob((Dictionary<string, object>)param[0]);
- return true;
- }
- private bool FsmAbortJob(object[] param)
- {
- _auto.AbortJob((string)param[0]);
- return true;
- }
- private bool FsmStopJob(object[] param)
- {
- _auto.StopJob((string)param[0]);
- Singleton<FAJobController>.Instance.CJAbort((string)param[0]);
- //CheckToPostMessage((int)MSG.StopJob);//
- return true;
- }
- private bool FsmResumeJob(object[] param)
- {
- _auto.ResumeJob((string)param[0]);
- return true;
- }
- private bool FsmPauseJob(object[] param)
- {
- _auto.PauseJob((string)param[0]);
- return true;
- }
- private bool FsmStartJob(object[] param)
- {
- return _auto.StartJob((string)param[0]);
- }
- private bool FsmCreateTransferJob(object[] param)
- {
- if (FsmState != (int)RtState.AutoRunning && CarrierManager.Instance.CheckHasCarrier(ModuleName.CarrierRobot, 0))
- {
- EV.PostWarningLog("System", $"FOUP robot already has a FOUP, create job failed");
- return false;
- }
- _transferJob.CreateJob(param);
- return true;
- }
- private bool FsmAbortTransferJob(object[] param)
- {
- _transferJob.AbortJob((string)param[0]);
- return true;
- }
- private bool FsmCancelUnloadingJob(object[] param)
- {
- _transferJob.CancelUnloadingJob((string)param[0], (string)param[1]);
- return true;
- }
- private bool FsmJobAutoStart(object[] param)
- {
- _auto.PauseJob((string)param[0]);
- _auto.Clear();
- return true;
- }
- private bool FsmAbort(object[] param)
- {
- if (FsmState == (int)RtState.Transfer)
- {
- // _manualTransfer.Clear();
- }
- if (FsmState == (int)RtState.ChargeProcessDischarging || FsmState == (int)RtState.LoadProcessStockering || FsmState == (int)RtState.LoadProcessUnloading)
- {
- _auto.PjUpdated();
- _auto.PjFinished("Job Abort");
- }
- if (FsmState == (int)RtState.AutoRunning)
- {
- _auto.Clear();
- }
- if (FsmState == (int)RtState.Initializing)
- {
- _homeAll.Abort();
- }
- return true;
- }
- private bool FsmModuleError(object[] param)
- {
- //_auto.ModuleError((string)param[0]);
- return true;
- }
- private bool FsmStartReturnWafer(object[] objs)
- {
- Result ret = _returnAll.Start();
- if (ret == Result.FAIL)
- {
- PostMsg(MSG.ERROR);
- return false;
- }
- return ret == Result.RUN;
- }
- private bool FsmMonitorReturnWafer(object[] objs)
- {
- Result ret = _returnAll.Monitor();
- if (ret == Result.FAIL)
- {
- PostMsg(MSG.ERROR);
- return false;
- }
- if (ret == Result.DONE)
- {
- _batchType = "";
- _processJob = "";
- _processRecipe = "";
- (Modules[ModuleName.CarrierRobot] as CarrierRobotModule).Home(out _);
- (Modules[ModuleName.WaferRobot] as WaferRobotModule).Home(out _);
- }
- return ret == Result.DONE;
- }
- private bool InvokeSwitchOffBuzzer(string arg1, object[] args)
- {
- DEVICE.GetDevice<SignalTowerBase>("System.SignalTower")?.SwitchOffBuzzer(true);
- IsAlarmConditionBuzzerOn = false;
- return true;
- }
- private bool InvokeReturnWafer(string arg1, object[] args)
- {
- ModuleName target = ModuleHelper.Converter(args[0].ToString());
- int slot = (int)args[1];
- if (ModuleHelper.IsLoadPort(target))
- {
- EV.PostInfoLog("System", string.Format("Wafer already at LoadPort {0} {1}, return operation is not valid", target.ToString(), slot + 1));
- return false;
- }
- if (!WaferManager.Instance.IsWaferSlotLocationValid(target, slot))
- {
- EV.PostWarningLog("System", string.Format("Invalid position,{0},{1}", target.ToString(), slot.ToString()));
- return false;
- }
- WaferInfo wafer = WaferManager.Instance.GetWafer(target, slot);
- if (wafer.IsEmpty)
- {
- EV.PostInfoLog("System", string.Format("No wafer at {0} {1}, return operation is not valid", target.ToString(), slot + 1));
- return false;
- }
- return CheckToPostMessage((int)MSG.MoveWafer,
- target, slot,
- (ModuleName)wafer.OriginStation, wafer.OriginSlot,
- false, 0, false, 0);
- }
- private bool InvokeDeleteAllWafer(string arg1, object[] args)
- {
- foreach (var item in Modules.Values)
- {
- if ((item as PMModule) != null || (item as WaferRobotModule) != null)
- {
- var wafers = WaferManager.Instance.GetWafers(ModuleHelper.Converter(item.Module));
- for (int i = 0; i < wafers.Length; i++)
- {
- if (!wafers[i].IsEmpty)
- WaferManager.Instance.DeleteWafer(ModuleHelper.Converter(item.Module), i);
- }
- }
- }
- return true;
- }
- private bool InvokeDeleteAllCarrier(string arg1, object[] args)
- {
- foreach (var item in Modules.Values)
- {
- if ((item as LoadPortModule) != null || (item as StockerModule) != null || (item as FIMSModule) != null || (item as CarrierRobotModule) != null)
- {
- if (CarrierManager.Instance.HasCarrier(item.Module.ToString()))
- {
- CarrierManager.Instance.DeleteCarrier(item.Module.ToString());
- var wafers = WaferManager.Instance.GetWafers(ModuleHelper.Converter(item.Module));
- for (int i = 0; i < wafers.Length; i++)
- {
- if (!wafers[i].IsEmpty)
- WaferManager.Instance.DeleteWafer(ModuleHelper.Converter(item.Module), i);
- }
- }
- }
- }
- return true;
- }
- private bool InvokeDeleteWaferFromTo(string arg1, object[] args)
- {
- ModuleName chamber = ModuleHelper.Converter(args[0].ToString());
- int slotFrom = (int)args[1];
- int slotTo = (int)args[2];
- for (int slot = slotTo - 1; slot >= slotFrom - 1; slot--)
- {
- if (WaferManager.Instance.IsWaferSlotLocationValid(chamber, slot))
- {
- if (WaferManager.Instance.CheckHasWafer(chamber, slot))
- {
- WaferManager.Instance.DeleteWafer(chamber, slot);
- EV.PostMessage(ModuleName.System.ToString(), EventEnum.WaferDelete, chamber.ToString(), slot + 1);
- }
- else
- {
- EV.PostInfoLog("System", string.Format("No wafer at {0} {1}, delete not valid", chamber.ToString(), slot + 1));
- }
- }
- else
- {
- DeleteWaferFailedWarning.Set(string.Format("Invalid position,{0},{1}", chamber.ToString(), slot.ToString()));
- return false;
- }
- }
- var carrier = CarrierManager.Instance.GetCarrier(chamber);
- if (carrier != null)
- {
- CarrierManager.Instance.UpdateWaferIn(chamber, 0, false);
- }
- var wafers = WaferManager.Instance.GetWafers(chamber);
- if (wafers != null && carrier != null)
- {
- foreach (var wafer in wafers)
- {
- if (wafer != null && !wafer.IsEmpty)
- {
- CarrierManager.Instance.UpdateWaferIn(chamber, 0, true);
- break;
- }
- }
- }
- return true;
- }
- private bool InvokeDeleteWafer(string arg1, object[] args)
- {
- ModuleName chamber = ModuleHelper.Converter(args[0].ToString());
- int slot = (int)args[1];
- if (WaferManager.Instance.IsWaferSlotLocationValid(chamber, slot))
- {
- if (WaferManager.Instance.CheckHasWafer(chamber, slot))
- {
- WaferManager.Instance.DeleteWafer(chamber, slot);
- EV.PostMessage(ModuleName.System.ToString(), EventEnum.WaferDelete, chamber.ToString(), slot + 1);
- }
- else
- {
- EV.PostInfoLog("System", string.Format("No wafer at {0} {1}, delete not valid", chamber.ToString(), slot + 1));
- }
- }
- else
- {
- DeleteWaferFailedWarning.Set(string.Format("Invalid position,{0},{1}", chamber.ToString(), slot.ToString()));
- return false;
- }
- var carrier = CarrierManager.Instance.GetCarrier(chamber);
- if (carrier != null)
- {
- CarrierManager.Instance.UpdateWaferIn(chamber, 0, false);
- }
- var wafers = WaferManager.Instance.GetWafers(chamber);
- if (wafers != null && carrier != null)
- {
- foreach (var wafer in wafers)
- {
- if (wafer != null && !wafer.IsEmpty)
- {
- CarrierManager.Instance.UpdateWaferIn(chamber, 0, true);
- break;
- }
- }
- }
- return true;
- }
- private bool InvokeCreateWaferFromTo(string arg1, object[] args)
- {
- ModuleName chamber = ModuleHelper.Converter(args[0].ToString());
- ModuleName originChamber = chamber;
- int slotFrom = (int)args[1];
- int slotTo = (int)args[2];
- int originSlot = 1;
- WaferStatus state = WaferStatus.Normal;
- WaferType waferTye = WaferType.None;
- var strs = (string[])args[3];
- Enum.TryParse(strs[0].ToString(), out waferTye);
- originChamber = ModuleHelper.Converter(strs[1].ToString());
- originSlot = int.Parse(strs[2]);
- for (int slot = slotTo - 1; slot >= slotFrom - 1; slot--)
- {
- if (WaferManager.Instance.IsWaferSlotLocationValid(chamber, slot))
- {
- if (WaferManager.Instance.CheckHasWafer(chamber, slot))
- {
- EV.PostInfoLog("System", string.Format("{0} slot {1} already has wafer.create wafer is not valid", chamber, slot + 1));
- }
- else
- {
- if (originChamber == chamber && WaferManager.Instance.CreateWafer(chamber, slot, state, waferTye) != null)
- {
- EV.PostMessage(ModuleName.System.ToString(), EventEnum.WaferCreate, chamber.ToString(), slot + 1, state.ToString());
- }
- else if (originChamber != chamber && WaferManager.Instance.CreateWafer(chamber, slot, originChamber, originSlot, state, waferTye) != null)
- {
- EV.PostMessage(ModuleName.System.ToString(), EventEnum.WaferCreate, chamber.ToString(), slot + 1, state.ToString());
- }
- }
- }
- else
- {
- EV.PostWarningLog("System", string.Format("Invalid position,{0},{1}", chamber.ToString(), slot.ToString()));
- return false;
- }
- }
- var carrier = CarrierManager.Instance.GetCarrier(chamber);
- if (carrier != null)
- {
- CarrierManager.Instance.UpdateWaferIn(chamber, 0, true);
- }
- return true;
- }
- private bool InvokeCreateWafer(string arg1, object[] args)
- {
- ModuleName chamber = ModuleHelper.Converter(args[0].ToString());
- ModuleName originChamber = chamber;
- int slot = (int)args[1];
- int originSlot = 1;
- WaferStatus state = WaferStatus.Normal;
- WaferType waferTye = WaferType.None;
- if (args.Length > 2)
- Enum.TryParse(args[2].ToString(), out waferTye);
- if (args.Length > 3)
- originChamber = ModuleHelper.Converter(args[3].ToString());
- if (args.Length > 4)
- originSlot = (int)args[4];
- if (ModuleHelper.IsLoadPort(chamber))
- {
- //var lp = Modules[chamber] as LoadPortModule;
- //if (lp.LPDevice.CassetteState != LoadportCassetteState.Normal)
- //{
- // EV.PostWarningLog("System", $"Can not create wafer at {chamber}.{slot + 1}, Cassette not placed.");
- // return false;
- //}
- }
- if (WaferManager.Instance.IsWaferSlotLocationValid(chamber, slot))
- {
- if (WaferManager.Instance.CheckHasWafer(chamber, slot))
- {
- EV.PostInfoLog("System", string.Format("{0} slot {1} already has wafer.create wafer is not valid", chamber, slot + 1));
- }
- else
- {
- if (originChamber == chamber && WaferManager.Instance.CreateWafer(chamber, slot, state, waferTye) != null)
- {
- EV.PostMessage(ModuleName.System.ToString(), EventEnum.WaferCreate, chamber.ToString(), slot + 1, state.ToString());
- }
- else if (originChamber != chamber && WaferManager.Instance.CreateWafer(chamber, slot, originChamber, originSlot, state, waferTye) != null)
- {
- EV.PostMessage(ModuleName.System.ToString(), EventEnum.WaferCreate, chamber.ToString(), slot + 1, state.ToString());
- }
- }
- }
- else
- {
- EV.PostWarningLog("System", string.Format("Invalid position,{0},{1}", chamber.ToString(), slot.ToString()));
- return false;
- }
- var carrier = CarrierManager.Instance.GetCarrier(chamber);
- if (carrier != null)
- {
- CarrierManager.Instance.UpdateWaferIn(chamber, 0, true);
- }
- return true;
- }
- private bool InvokeUpdateWafer(string arg1, params object[] args)
- {
- if (args == null || args.Length == 0) return false;
- ModuleName chamber = ModuleHelper.Converter(args[0].ToString());
- var carrier = CarrierManager.Instance.GetCarrier(chamber);
- if (carrier == null || carrier.IsEmpty)
- {
- EV.PostInfoLog(Module, $"{chamber} update wafer fail for carrier not exist.");
- return false;
- }
- if (args.Length > 3 && !carrier.CarrierType.ToString().Equals(CarrierType.None.ToString()) && !carrier.CarrierType.ToString().Equals(args[2].ToString()))
- {
- EV.PostInfoLog(Module, $"{chamber} type mismatch!");
- return false;
- }
- int slot = 0;
- if (args.Length > 1)
- {
- int.TryParse(args[1].ToString(), out slot);
- slot = slot - 1;
- }
- WaferType waferTye = WaferType.None;
- if (args.Length > 2)
- {
- Enum.TryParse(args[2].ToString(), out waferTye);
- }
- float useCount = 0, useThick = 0, UseTime = 0;
- if (args.Length > 3)
- {
- float.TryParse(args[3].ToString(), out useCount);
- }
- if (args.Length > 4)
- {
- float.TryParse(args[4].ToString(), out useThick);
- }
- if (args.Length > 5)
- {
- float.TryParse(args[5].ToString(), out UseTime);
- }
- if (WaferManager.Instance.IsWaferSlotLocationValid(chamber, slot))
- {
- if (WaferManager.Instance.CheckHasWafer(chamber, slot))
- {
- WaferManager.Instance.UpdateWaferStatistics(chamber, slot, useCount, useThick, UseTime);
- (Singleton<EquipmentManager>.Instance.Modules[ModuleName.PM1] as PMModule).UpdateSEDWafer(WaferManager.Instance.GetAllWafers());
- }
- }
- if (carrier != null)
- {
- CarrierManager.Instance.UpdateWaferIn(chamber, 0, true);
- }
- return true;
- }
- private bool InvokeCreateCassetteWafer(string arg1, object[] args)
- {
- ModuleName chamber = ModuleHelper.Converter(args[0].ToString());
- var carrier = CarrierManager.Instance.GetCarrier(chamber);
- if (carrier == null || carrier.IsEmpty)
- {
- EV.PostInfoLog(Module, $"{chamber} create wafer fail for carrier not exist.");
- return false;
- }
- if (args.Length > 3 && !carrier.CarrierType.ToString().Equals(CarrierType.None.ToString()) && !carrier.CarrierType.ToString().Equals(args[3].ToString()))
- {
- EV.PostInfoLog(Module, $"{chamber} type mismatch!");
- return false;
- }
- int slotFrom = (int)args[1];
- int slotTo = (int)args[2];
- WaferStatus state = WaferStatus.Normal;
- WaferType waferTye = WaferType.None;
- if (args.Length > 3)
- Enum.TryParse(args[3].ToString(), out waferTye);
- for (int slot = slotTo - 1; slot >= slotFrom - 1; slot--)
- {
- if (WaferManager.Instance.IsWaferSlotLocationValid(chamber, slot))
- {
- if (WaferManager.Instance.CheckHasWafer(chamber, slot))
- {
- EV.PostInfoLog(Module, string.Format("{0} slot {1} already has wafer.", chamber, slot + 1));
- continue;
- }
- else if (WaferManager.Instance.CreateWafer(chamber, slot, state, waferTye) == null)
- {
- CreateWaferFailedWarning.Set(string.Format($"Create slot {slot + 1} wafer failed."));
- return false;
- }
- }
- else
- {
- CreateWaferFailedWarning.Set(string.Format("Invalid slot,{0},{1}", chamber.ToString(), (slot + 1).ToString()));
- return false;
- }
- }
- if (carrier != null)
- {
- CarrierManager.Instance.UpdateWaferIn(chamber, 0, true);
- }
- EV.PostInfoLog(Module, $"Create wafer from {slotFrom} to {slotTo} successed.");
- return true;
- }
- private bool InvokeDeleteCassetteWafer(string arg1, object[] args)
- {
- ModuleName chamber = ModuleHelper.Converter(args[0].ToString());
- int slotFrom = (int)args[1];
- int slotTo = (int)args[2];
- if (WaferManager.Instance.IsWaferSlotLocationValid(chamber, slotFrom - 1) && WaferManager.Instance.IsWaferSlotLocationValid(chamber, slotTo - 1))
- {
- WaferManager.Instance.DeleteWafer(chamber, slotFrom - 1, slotTo - slotFrom + 1);
- }
- else
- {
- DeleteWaferFailedWarning.Set(string.Format($"Invalid slot,{chamber} slot from {slotFrom}, slot to {slotTo}"));
- return false;
- }
- var carrier = CarrierManager.Instance.GetCarrier(chamber);
- if (carrier != null)
- {
- CarrierManager.Instance.UpdateWaferIn(chamber, 0, false);
- }
- var wafers = WaferManager.Instance.GetWafers(chamber);
- if (wafers != null && carrier != null)
- {
- foreach (var wafer in wafers)
- {
- if (wafer != null && !wafer.IsEmpty)
- {
- CarrierManager.Instance.UpdateWaferIn(chamber, 0, true);
- break;
- }
- }
- }
- EV.PostInfoLog(Module, $"Delete wafer from {slotFrom} to {slotTo} successed.");
- return true;
- }
- private CarrierType GetStockerType(string name)
- {
- var result = CarrierType.SD;
- var scName = name.Contains("LP") ? $"{name}Type" : $"{name}WaferType";
- string configType = SC.GetStringValue($"System.Stocker.{scName}");
- if (string.IsNullOrEmpty(configType))
- {
- return result;
- }
- result = configType.StartsWith(CarrierType.P.ToString()) ? CarrierType.P : (CarrierType)Enum.Parse(typeof(CarrierType), configType);
- return result;
- }
- public bool InvokeCreateCarrier(string arg1, object[] args)
- {
- ModuleName chamber = ModuleHelper.Converter(args[0].ToString());
- int slot = (int)args[1];
- CarrierType carrierTye = GetStockerType(chamber.ToString());
- bool isCheckType = true;
- if (args.Length > 2)
- {
- if (args.Length > 3)
- {
- isCheckType = bool.Parse(args[3].ToString());
- }
- var inputType = args[2].ToString();
- if (!carrierTye.ToString().Equals(CarrierType.None.ToString()) && !carrierTye.ToString().Equals(inputType) && isCheckType)
- {
- EV.PostInfoLog(Module, $"{chamber} type mismatch!");
- return false;
- }
- Enum.TryParse(args[2].ToString(), out carrierTye);
- }
- if (CarrierManager.Instance.HasCarrier(args[0].ToString(), slot))
- {
- EV.PostInfoLog("System", $"{chamber} already has carrier.create is not valid");
- }
- else
- {
- CarrierManager.Instance.CreateCarrier(args[0].ToString(), carrierTye, args[0].ToString());
- EV.PostInfoLog("System", $"{chamber} create carrier");
- }
- var wafers = WaferManager.Instance.GetWafers(chamber);
- if (wafers != null)
- {
- foreach (var wafer in wafers)
- {
- if (wafer != null && !wafer.IsEmpty)
- {
- CarrierManager.Instance.UpdateWaferIn(chamber, 0, true);
- break;
- }
- }
- }
- return true;
- }
- private bool InvokeDeleteCarrier(string arg1, object[] args)
- {
- ModuleName chamber = ModuleHelper.Converter(args[0].ToString());
- if (CarrierManager.Instance.HasCarrier(chamber.ToString()))
- {
- CarrierManager.Instance.DeleteCarrier(chamber.ToString());
- EV.PostInfoLog("System", $"Carrier deleted from {chamber}");
- var wafers = WaferManager.Instance.GetWafers(chamber);
- for (int i = 0; i < wafers.Length; i++)
- {
- if (!wafers[i].IsEmpty)
- WaferManager.Instance.DeleteWafer(chamber, i);
- }
- }
- else
- {
- EV.PostInfoLog("System", string.Format("No carrier at {0}, delete not valid", chamber.ToString()));
- }
- return true;
- }
- private bool InvokeSetLotID(string arg1, object[] args)
- {
- ModuleName chamber = ModuleHelper.Converter(args[0].ToString());
- List<string> lotIdLst = new List<string>();
- foreach (var module in Modules.Keys)
- {
- if ((Modules[module] as StockerModule) == null)
- continue;
- if (CarrierManager.Instance.HasCarrier(module.ToString()))
- {
- lotIdLst.Add(CarrierManager.Instance.GetCarrier(module.ToString()).CarrierId);
- }
- }
- if (lotIdLst.Any(x => x == args[1].ToString()))
- {
- SetLotIDFailedWarning.Set($"Carrier ID={args[1]} of {chamber} is already exist");
- return false;
- }
- if (CarrierManager.Instance.HasCarrier(chamber.ToString()))
- {
- CarrierManager.Instance.UpdateCarrierId(chamber.ToString(), args[1].ToString());
- EV.PostInfoLog("System", $"Carrier {chamber} update carrier ID {args[1]}");
- }
- else
- {
- EV.PostInfoLog("System", string.Format("No carrier at {0}, update carrier ID not valid", chamber.ToString()));
- }
- return true;
- }
- private bool InvokeShutDown(string arg1, object[] arg2)
- {
- if (IsAlarm || IsIdle || IsInit)
- {
- EV.PostWarningLog(Module, $"System start shut down");
- EV.PostKickoutMessage("ShutDown");
- RtApplication.Instance.Terminate();
- return true;
- }
- EV.PostWarningLog(Module, $"System in {StringFsmStatus} mode, can not shut down");
- return false;
- }
- private void OnModuleError(string module)
- {
- if (FsmState == (int)RtState.AutoRunning)
- {
- ModuleName mod = ModuleHelper.Converter(module);
- PostMsg(MSG.ModuleError, module);
- }
- }
- public override void Monitor()
- {
- base.Monitor();
- }
- private bool CheckPWaferBatch(ModuleName module, string batch)
- {
- string stockerWaferType = batch == "A" ? "P1" : "P2";
- return SC.GetStringValue($"System.Stocker.{module}WaferType") == stockerWaferType;
- }
- private bool CheckMWaferBatch(ModuleName module, string batch)
- {
- string stockerWaferType = batch == "A" ? "M1" : "M2";
- return SC.GetStringValue($"System.Stocker.{module}WaferType") == stockerWaferType;
- }
- private bool CheckJobPause()
- {
- return _pauseTrig.R;
- }
- private bool CheckToPostJobMessage(int msg, params object[] args)
- {
- _cycledCount = 0;
- //只有LoadProcessUnload和ChargeProcessDischarge有cycle模式
- if (SC.GetValue<bool>("System.IsCycleMode") && (msg == (int)MSG.LoadProcessUnload || msg == (int)MSG.ChargeProcessDischarge))
- {
- lock (_locker)
- {
- _jobMSG = msg;
- _jobParas = args;
- }
- }
- else
- {
- lock (_locker)
- {
- _jobMSG = 0;
- _jobParas = null;
- }
- }
- return CheckToPostMessage(msg, args);
- }
- private bool OnCycleTimer()
- {
- fMonitorFAJob();
- if (!SC.GetValue<bool>("System.IsSimulatorMode"))
- {
- //_plcConnectTrig.CLK = !(IoProviderManager.Instance.Providers[0] as AdsPlcAdapter).IsPlcConnected;
- //if (_plcConnectTrig.R)
- //{
- // PLCDisconnectAlarm.Set();
- //}
- //if (_plcConnectTrig.T)
- //{
- // EV.ClearAlarmEvent(PLCDisconnectAlarm.Id);
- // PLCDisconnectAlarm.Reset();
- // PLCConnectRecoveryWarning.Set();
- //}
- }
- _cassetteRobotModule.Monitor();
- _waferRobotModule.Monitor();
- _lp1Module.Monitor();
- _lp2Module.Monitor();
- _lp3Module.Monitor();
- _lp4Module.Monitor();
- _fims1Module.Monitor();
- _fims2Module.Monitor();
- _boatModule.Monitor();
- foreach (var module in Modules.Keys)
- {
- if (!(Modules[module] is StockerModule))
- continue;
- Modules[module].Monitor();
- }
- return true;
- }
- public List<ProcessJobInfo> GetProcessJobInfo()
- {
- return _auto.LstProcessJobs;
- }
- public List<Tuple<string, string, List<int>>> GetProcessingStockers()
- {
- return _auto.GetProcessingStockers();
- }
- public List<Tuple<string, string, List<int>>> GetAllPJStockers()
- {
- return _auto.GetAllPJStockers();
- }
- public List<CarrierPara> GetTransferJobStockers()
- {
- return _transferJob.GetTransferJobStockers();
- }
- public void ResetTask(ModuleName module)
- {
- _auto.ResetTask(module);
- _transferJob.ResetTask(module);
- (_returnAll as ReturnAllWafer).ResetTask(module);
- }
- private void CoolingSkip()
- {
- _auto.CoolingSkip();
- }
- public void SetVisibility(CarrierInfo carrierInfo, bool setValue, string moduleName = null)
- {
- if (carrierInfo == null)
- {
- return;
- }
- carrierInfo.UIExitFoup = setValue;
- carrierInfo.UICarrierColorVisibility = setValue;
- carrierInfo.UICarrierStatusVisibility = setValue;
- carrierInfo.UICarrierTypeVisibility = setValue;
- carrierInfo.UICarrierWaferCountVisibility = setValue;
- }
- public void SetUIWaferCount(CarrierInfo carrierInfo, ModuleName name, out WaferInfo[] wafers)
- {
- wafers = WaferManager.Instance.GetWafers(name);
- if (carrierInfo == null)
- {
- return;
- }
- var count = wafers == null ? 0 : wafers.Count(a => !a.IsEmpty);
- carrierInfo.UICarrierWaferCount = $"({count})";
- }
- public string GetActivePjStatus()
- {
- return _auto.GetFirstPJStatus();
- }
- public void PjFinished(string endStatus = "Normal")
- {
- _auto.PjFinished(endStatus);
- }
- #region FA
- private bool FsmFAJobCommand(object[] param)
- {
- switch ((string)param[0])
- {
- case "CreateProcessJob":
- _auto.CreateProcessJob(out var pj, (Dictionary<string, object>)param[1]);
- break;
- case "CreateControlJob":
- _auto.CreateControlJob((string)param[1], (List<string>)param[2], out var cj);
- //_auto.StartJob((string)param[1]);
- //CheckToPostMessage((int)MSG.StartJob, (string)param[1]);
- break;
- }
- return true;
- }
- #endregion
- }
- }
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