FurnaceELK/Furnace/FurnaceRT/Equipments/PMs/PMModule.cs

using System;
using System.Collections.Generic;
using System.Diagnostics;
using System.Linq;
using Aitex.Core.Common;
using Aitex.Core.RT.DataCenter;
using Aitex.Core.RT.Device;
using Aitex.Core.RT.Device.Unit;
using Aitex.Core.RT.Event;
using Aitex.Core.RT.Fsm;
using Aitex.Core.RT.OperationCenter;
using Aitex.Core.RT.Routine;
using Aitex.Core.RT.SCCore;
using Aitex.Core.Util;
using Aitex.Core.Utilities;
using Aitex.Sorter.Common;
using MECF.Framework.Common.Alarms;
using MECF.Framework.Common.DataCenter;
using MECF.Framework.Common.Equipment;
using MECF.Framework.Common.Schedulers;
using MECF.Framework.Common.SubstrateTrackings;
using FurnaceRT.Equipments.PMs.RecipeExecutions;
using FurnaceRT.Equipments.PMs.Routines;
using FurnaceRT.Equipments.Systems;
using Process = FurnaceRT.Equipments.PMs.RecipeExecutions.Process;
using Aitex.Core.Common.DeviceData;
using FurnaceRT.Devices;
using FurnaceRT.Modules.PMs;
using MECF.Framework.Common.Device.Bases;
using Aitex.Core.RT.Log;
using FurnaceRT.Equipments.Boats;
using MECF.Framework.Common.Event;
using System.IO;
using Aitex.Common.Util;
using static Aitex.Core.Common.DeviceData.AITConfigData;
using MECF.Framework.Common.CommonData.SorterDefines;
using MECF.Framework.Common.Utilities;
using System.Windows.Documents;
using MECF.Framework.Common.CommonData.EnumData;
using MECF.Framework.Common.CommonData;
using System.ServiceModel;
using FabConnect.SecsGemInterface.Application.Objects.ObjectService;
using DocumentFormat.OpenXml.Packaging;
using System.Runtime.Remoting.Metadata.W3cXsd2001;
using FurnaceRT.Equipments.Schedulers;
using FabConnect.SecsGemInterface.Common;
using MECF.Framework.Common.FAServices;
using MECF.Framework.FA.Core.FAInterface;

namespace FurnaceRT.Equipments.PMs
{
    public partial class PMModule : PMModuleBase, IRecipeExecutor
    {
        public enum STATE
        {
            NotInstall,

            NotConnected,

            Init,
            Idle,

            Homing,

            OpenSlitValve,
            CloseSlitValve,

            Error,

            PrepareTransfer,

            PostTransfer,

            PreProcess,
            PostProcess,
            Process,
            LeakCheck,

            MFCCali,
            Paused,

            InTransfer,
        }
        public enum MSG
        {
            Home,

            Connected,
            Disconnected,

            Transfer,

            PrepareTransfer,

            PostTransfer,

            Reset,
            Abort,
            Error,
            EndIdleRecipe,

            OpenSlitValve,
            CloseSlitValve,

            SelectRecipe,
            RunRecipe,
            RunIdleRecipe,
            RunOtherRecipe,
            RecipeSkipStep,
            RecipeJumpStep,
            RecipePause,
            RecipeContinue,
            RecipeAbort,
            Continue,

            SetOnline,
            SetOffline,

            PostProcess,
            Process,
            AlarmConditionJumpStep,
            LeakCheck,

            ToInit,
            StartMFCCalibration,

        }

        public enum ProcessFlowState
        {
            None,
            Idle,
            Standby,
            Ready,
            Run,
            End,
            Abort,
        }

        public override bool IsInit
        {
            get { return FsmState == (int)STATE.Init; }
        }
        //Add by SSH,20250930,判断recipe是否执行结束，给job使用

        public bool IsBusy
        {
            get { return !IsInit && !IsError && !IsReady; }
        }
        public bool IsProcessing
        {
            get { return FsmState == (int)STATE.Process; }
        }

        public override bool IsReady
        {
            get { return FsmState == (int)STATE.Idle && CheckAllMessageProcessed(); }
        }

        public override bool IsError
        {
            get
            {
                return _alarmNumber != 0;
            }
        }

        public event Action<string> OnEnterError;

        private PMHomeRoutine _homeRoutine;
        public bool IsRecipeCompleted
        {
            get
            {
                if (_processRoutine == null)
                {
                    return true;
                }
                return _processRoutine.IsRecipeCompleted;

            }
        }
        private PMLeakCheckRoutine _leakCheckRoutine;

        private PreProcess _preprocessRoutine;
        private Process _processRoutine;
        private PostProcess _postprocessRoutine;

        private PMPrepareTransferRoutine _prepareTransferRoutine;
        private PMPostTransferRoutine _postTransferRoutine;

        private ModuleName _module;

        private RecipeRunningInfo _recipeRunningInfo = new RecipeRunningInfo();

        private bool _isInit = true;
        private bool _isPrepareProcess = true;
        private bool _isStandbyStep;

        private StatsData _statTubeCleanNumber;
        private StatsData _statTubeCleanTime;
        private StatsData _statTubeCleanThick;
        private StatsData _statBoatCleanNumber;
        private StatsData _statBoatCleanTime;
        private StatsData _statBoatCleanThick;
        private StatsData _statForkCleanNumber;
        private StatsData _statForkCleanTime;
        private StatsData _statForkCleanThick;

        private Stopwatch _processTimer = new Stopwatch();


        public List<IoValve> ValveLists = new List<IoValve>();
        public List<IoFlowMeter> FlowmeterLists = new List<IoFlowMeter>();

        private bool _isExternalSensorConditionBypass;
        private bool _isTempStabilizeConditionBypass;
        private bool _isPressureStabilizeConditionBypass;
        private bool _isReachTempConditionBypass;
        private bool _isReachPressureConditionBypass;
        private bool _isFinishAutoProfileConditionBypass;
        private SerializableDictionary<string, bool> _conditionCheckDic = new SerializableDictionary<string, bool>();
        private Dictionary<string, string> _conditionCheckItemDic = new Dictionary<string, string>();
        private Stopwatch _waitTimer = new Stopwatch();
        public string StringProcessFlowState { get; set; } = ProcessFlowState.Standby.ToString();

        public bool IsExcuteRoutineFailed { get; set; }

        public bool IsJobProcess { get; private set; }
        public string EditRecipeName { get; set; } = string.Empty;
        public string EditRecipeStepName { get; set; } = string.Empty;
        public bool IsExcuteIdleRecipe { get; set; }
        public string ToolType { get; set; }

        public PMModule(ModuleName module) : base(SC.GetValue<int>($"Boat.SlotCount"))
        {
            _module = module;

            Module = module.ToString();
            Name = module.ToString();

            EnumLoop<STATE>.ForEach((item) =>
            {
                MapState((int)item, item.ToString());
            });

            EnumLoop<MSG>.ForEach((item) =>
            {
                MapMessage((int)item, item.ToString());
            });

            EnableFsm(1, STATE.Idle);
        }

        public override bool Initialize()
        {
            IsOnline = true;

            InitRoutine();

            InitDevice();

            InitAUX();

            InitInterlock();

            InitFsm();

            InitOp();

            InitData();

            InitLeakCheckData();

            InitStats();

            InitAlarmEvent();
            InitScheduleMaintenance();
            InitAlarmConditionChecker();

            Singleton<EventManager>.Instance.OnAlarmEvent += Instance_OnAlarmEvent;
            ToolType = SC.GetStringValue("System.SetUp.ToolType");
            #region bufferpurge重启下发
            var isEnable = SC.GetValue<bool>("BufferPurge.IsEnable");
            if (isEnable)
            {
                var sequence = SC.GetStringValue("BufferPurge.OperationOrder")?.Split(';');
                string[] names = SC.GetStringValue("BufferPurge.NameList")?.Split(';');
                if (sequence?.Length > 0 && names?.Length > 0)
                {
                    List<PurgeParameter> purge = new List<PurgeParameter>();
                    foreach (string p in sequence)
                    {
                        if (string.IsNullOrWhiteSpace(p)) continue;//Purge1,0,Time(10),Open;
                        var step = p.Trim().Split(',');
                        if (step.Length == 4)
                        {
                            if (string.IsNullOrEmpty(step[0])) continue;//name
                            if (names.Contains(step[0]))
                            {
                                var index = step[2].IndexOf('(') + 1;
                                int.TryParse(step[2].Substring(index, step[2].Length - index - 1), out int time);//仅考虑时间
                                purge.Add(
                                new PurgeParameter() { Name = step[0], TimeString = $"{time / 3600:00}:{time % 3600 / 60:00}:{time % 60:00}", IsClose = step[3].ToLower() == "close", IsOpen = step[3].ToLower() == "open" });
                            }
                        }
                    }
                    SetBufferPurge(purge);
                }
            }
            #endregion
            return base.Initialize();
        }
        private void Instance_OnAlarmEvent(EventItem item)
        {
            if (item != null && item.Level == EventLevel.Alarm && (item.Source == Name || item.Source == Module))
            {
                var alarm = item as AlarmEventItem;
                DEVICE.GetDevice<SignalTowerBase>("System.SignalTower")?.Reset();
                LOG.Write($"{item.Source} {item.EventEnum} {item.Description}\n");
                //PostMsg(MSG.Error);
            }
        }
        private void InitRoutine()
        {
            _homeRoutine = new PMHomeRoutine(ModuleHelper.Converter(Module), this);

            _leakCheckRoutine = new PMLeakCheckRoutine(ModuleHelper.Converter(Module), this);

            _preprocessRoutine = new PreProcess(ModuleHelper.Converter(Module), this);
            _processRoutine = new Process(ModuleHelper.Converter(Module), this);
            _postprocessRoutine = new PostProcess(ModuleHelper.Converter(Module), this);

            _prepareTransferRoutine = new PMPrepareTransferRoutine(Module, this);
            _postTransferRoutine = new PMPostTransferRoutine(Module, this);
        }
        public bool GetRunningModeIsDebug()
        {
            if (SC.ContainsItem("System.RunningMode"))
            {
                return SC.GetStringValue("System.RunningMode") == ConfigEnum.Debug.ToString();
            }
            return true;
        }
        private void InitData()
        {
            DATA.Subscribe($"{Module}.IsError", () => IsError);
            DATA.Subscribe($"{Module}.IsProcessing", () => IsProcessing);

            DATA.Subscribe($"{Module}.Status", () => StringFsmStatus);
            DATA.Subscribe($"{Module}.IsOnline", () => IsOnline);
            DATA.Subscribe($"{Module}.RunningModeIsDebug", () => GetRunningModeIsDebug());
            DATA.Subscribe($"{Module}.EnableMinics", () => SC.ContainsItem("Minics.EnableMinics") ? SC.GetValue<bool>("Minics.EnableMinics") : false);

            //DATA.Subscribe($"{Module}.WaferSize", () => WaferManager.Instance.GetWaferSize(_module, 0).ToString());

            DATA.Subscribe($"{Module}.IsInMaintainMode", () => !IsOnline);


            //DATA.Subscribe($"{Name}.LeakCheckElapseTime", () =>
            //{
            //    if (FsmState == (int)STATE.LeakCheck)
            //        return _leakCheckRoutine.ElapsedTime;
            //    return 0;
            //});

            DATA.Subscribe($"{Name}.ChamberPressure", () => ChamberPressure);
            //DATA.Subscribe($"{Name}.VAC1", () => _vac1);
            //DATA.Subscribe($"{Name}.VAC2", () => _vac2);
            //DATA.Subscribe($"{Name}.VAC3", () => _vac3);

            DATA.Subscribe($"{Name}.MainRecipeName", () => _recipeRunningInfo.MainRecipeName);
            DATA.Subscribe($"{Name}.SelectedRecipeName", () => _recipeRunningInfo.RecipeName);

            DATA.Subscribe($"{Name}.ProcessSubRecipe", () => _recipeRunningInfo.SubRecipeName);
            DATA.Subscribe($"{Name}.ProcessSubRecipeTable", () => _recipeRunningInfo.SubRecipeTable);
            DATA.Subscribe($"{Name}.ProcessAbortRecipe", () => _recipeRunningInfo.AbortRecipeName);

            DATA.Subscribe($"{Name}.AbortRecipeName", () => _recipeRunningInfo.RecipeName);

            DATA.Subscribe($"{Name}.SubRecipeCurrentLoopCount", () => _recipeRunningInfo.SubRecipeCurrentLoopCount);
            DATA.Subscribe($"{Name}.SubRecipeLoopCount", () => _recipeRunningInfo.SubRecipeLoopCount);
            DATA.Subscribe($"{Name}.IsExecuteSubRecipe", () => _processRoutine.IsSubReciep);

            DATA.Subscribe($"{Name}.RecipeBeginTime", () => _recipeRunningInfo.BeginTime);
            DATA.Subscribe($"{Name}.RecipeStepNumber", () => IsProcessing ? _recipeRunningInfo.StepNumber : 0);
            DATA.Subscribe($"{Name}.RecipeNextStepName", () => _recipeRunningInfo.NextStepName);
            DATA.Subscribe($"{Name}.RecipeStepName", () => IsProcessing ? _recipeRunningInfo.StepName : "");
            DATA.Subscribe($"{Name}.RecipeStepElapseTime", () => _recipeRunningInfo.StepElapseTime);
            DATA.Subscribe($"{Name}.RecipeStepTime", () => _recipeRunningInfo.StepTime);
            DATA.Subscribe($"{Name}.RecipeTotalElapseTime", () => _recipeRunningInfo.TotalElapseTime);
            DATA.Subscribe($"{Name}.RecipeTotalTime", () => _recipeRunningInfo.TotalTime);
            DATA.Subscribe($"{Name}.RecipeHoldTime", () => _recipeRunningInfo.HoldTime);
            DATA.Subscribe($"{Name}.RecipeHold", () => IsPaused);//按了hold按键
            DATA.Subscribe($"{Name}.RecipeHolded", () => IsHolded);//按了hold按键之后，当前step执行完了
            DATA.Subscribe($"{Name}.RecipeWait", () => IsWait);//等待wait条件的结束
            DATA.Subscribe($"{Name}.NewShowTime", () => GetNewShowTime());
            DATA.Subscribe($"{Name}.ExecRecipeType", () => _recipeRunningInfo.ExecRecipeType);
            DATA.Subscribe($"{Name}.LoopCountSet", () => _recipeRunningInfo.LoopCountSet);
            DATA.Subscribe($"{Name}.LoopCountCurrent", () => _recipeRunningInfo.LoopCountCurrent);
            DATA.Subscribe($"{Name}.IsLooping", () => _recipeRunningInfo.IsLooping);




            DATA.Subscribe("ProcessFlow.Status", () => StringProcessFlowState);

            DATA.Subscribe($"{Name}.ConditionCheck", () => _conditionCheckDic);
            //DATA.Subscribe($"{Name}.LZoneHeaterData", () => Heater2.DeviceData.IsLspModeFeedBack ? Heater2.DeviceData : Heater1.DeviceData);
            //DATA.Subscribe($"{Name}.CLZoneHeaterData", () => Heater4.DeviceData.IsLspModeFeedBack ? Heater4.DeviceData : Heater3.DeviceData);
            //DATA.Subscribe($"{Name}.CZoneHeaterData", () => Heater6.DeviceData.IsLspModeFeedBack ? Heater6.DeviceData : Heater5.DeviceData);
            //DATA.Subscribe($"{Name}.CUZoneHeaterData", () => Heater8.DeviceData.IsLspModeFeedBack ? Heater8.DeviceData : Heater7.DeviceData);
            //DATA.Subscribe($"{Name}.UZoneHeaterData", () => Heater10.DeviceData.IsLspModeFeedBack ? Heater10.DeviceData : Heater9.DeviceData);
            SensorRecipeOK = new AITSensorData()
            {
                DeviceName = "SensorRecipeOK",
                DeviceSchematicId = "SensorRecipe",
                DisplayName = "SensorRecipe",
                Value = false,
            };
            DATA.Subscribe($"{Module}.{SensorRecipeOK.DeviceName}", () => SensorRecipeOK);
            SensorPROCManualOK = new AITSensorData()
            {
                DeviceName = "SensorPROCManualOK",
                DeviceSchematicId = "PROCManual",
                DisplayName = "PROCManual",
                Value = false,
            };
            DATA.Subscribe($"{Module}.{SensorPROCManualOK.DeviceName}", () => SensorPROCManualOK);
            DATA.Subscribe($"{Module}.EditRecipeName", () => EditRecipeName);
            DATA.Subscribe($"{Module}.EditRecipeStepName", () => EditRecipeStepName);

            DATA.Subscribe($"{Module}.HTR1Enable", () => IsHTR1Enable);
            DATA.Subscribe($"{Module}.HTR2Enable", () => IsHTR2Enable);
            DATA.Subscribe($"{Module}.HTR3Enable", () => IsHTR3Enable);
            DATA.Subscribe($"{Module}.IsDPROn", () => _isDPROn);
            DATA.Subscribe($"{Module}.IsCEXHOn", () => TrigCEXHON?.Value);
            DATA.Subscribe($"{Module}.IsF2ClnOn", () =>
            {
                return IsF2ClnOn;
            });
            DATA.Subscribe($"{Module}.IsHFClnOn", () =>
            {
                return IsHFClnOn;
            });
            DATA.Subscribe($"{Module}.IsDEPOOn", () => TrigDEPOSW != null ? TrigDEPOSW.Value : false);

            DATA.Subscribe($"{Module}.IsCREFOn", () => TrigCREFON != null ? TrigCREFON.Value : false);
            DATA.Subscribe($"{Module}.IsSIREFOn", () => TrigSIREFON != null ? TrigSIREFON.Value : false);

            DATA.Subscribe($"{Module}.MFCList", () =>
            {
                List<AITMfcData> aITMfcDataList = new List<AITMfcData>();
                var mfcs = DEVICE.GetDevice<PMs.Devices.IoMFC>();
                if (mfcs != null)
                {
                    foreach (var item in mfcs)
                    {
                        if (item == null) continue;
                        if (item.IsMFCInstalled)
                        {
                            aITMfcDataList.Add(item.DeviceData);
                        }
                    }
                }
                return aITMfcDataList;
            });


            InitScheduleData();

            FDCSubscribe();

            InitOtherData();
            InitN2PurgeData();
        }

        private void InitStats()
        {
            _statTubeCleanNumber = new StatsData($"{Module}.Tube Clean Number", "Tube clean number", 0);
            _statTubeCleanTime = new StatsData($"{Module}.Tube Clean Time", "Tube clean time(Min)", 0);
            _statTubeCleanThick = new StatsData($"{Module}.Tube Clean thick", "Tube clean thick(nm)", 0);
            _statBoatCleanNumber = new StatsData($"{Module}.Boat Clean Number", "Boat clean number", 0);
            _statBoatCleanTime = new StatsData($"{Module}.Boat Clean Time", "Boat clean time(Min)", 0);
            _statBoatCleanThick = new StatsData($"{Module}.Boat Clean thick", "Boat clean thick(nm)", 0);
            _statForkCleanNumber = new StatsData($"{Module}.Fork Clean Number", "Fork clean number", 0);
            _statForkCleanTime = new StatsData($"{Module}.Fork Clean Time", "Fork clean time(Min)", 0);
            _statBoatCleanThick = new StatsData($"{Module}.Boat Clean thick", "Boat clean thick(nm)", 0);
            _statForkCleanThick = new StatsData($"{Module}.Fork Clean thick", "Fork clean thick", 0);
        }


        private void InitOp()
        {
            OP.Subscribe($"{Module}.Home", (string cmd, object[] args) =>
            {
                if (!(Singleton<EquipmentManager>.Instance.Modules[ModuleName.WaferRobot] as IModuleDevice).IsReady)
                {
                    TubeHomeFailedWarning.Set($"Wafer Robot is not in ilde state, init failed.");
                    return false;
                }
                return CheckToPostMessage((int)MSG.Home);
            });
            OP.Subscribe($"{Module}.Reset", (string cmd, object[] args) => CheckToPostMessage((int)MSG.Reset));
            OP.Subscribe($"{Module}.Abort", (string cmd, object[] args) => CheckToPostMessage((int)MSG.Abort));

            OP.Subscribe($"{Module}.PutOnline", (string cmd, object[] args) => CheckToPostMessage((int)MSG.SetOnline));
            OP.Subscribe($"{Module}.PutOffline", (string cmd, object[] args) => CheckToPostMessage((int)MSG.SetOffline));

            OP.Subscribe($"{Name}.SelectRecipe", (string cmd, object[] args) => CheckToPostMessage((int)MSG.SelectRecipe, args[0]));
            OP.Subscribe($"{Name}.RunRecipe", (string cmd, object[] args) => CheckToPostMessage((int)MSG.RunRecipe, (string)args[0]));
            OP.Subscribe($"{Name}.RecipeSkipStep", (string cmd, object[] args) => CheckToPostMessage((int)MSG.RecipeSkipStep));
            OP.Subscribe($"{Name}.RecipeJumpStep", (string cmd, object[] args) => CheckToPostMessage((int)MSG.RecipeJumpStep, args[0], args[1]));
            OP.Subscribe($"{Name}.RecipePause", (string cmd, object[] args) => CheckToPostMessage((int)MSG.RecipePause));
            OP.Subscribe($"{Name}.RecipeContinue", (string cmd, object[] args) => CheckToPostMessage((int)MSG.RecipeContinue));
            OP.Subscribe($"{Name}.RecipeAbort", (string cmd, object[] args) => CheckToPostMessage((int)MSG.RecipeAbort));
            OP.Subscribe($"{Name}.RecipeIdle", (string cmd, object[] args) => CheckToPostMessage((int)MSG.RunIdleRecipe));

            OP.Subscribe($"{Name}.LeakCheck", (string cmd, object[] args) => CheckToPostMessage((int)MSG.LeakCheck, args[0], args[1], args[2], args[3]));
            OP.Subscribe($"{Name}.Wait", (string cmd, object[] args) =>
            {
                IsWait = !IsWait;

                return true;
            });
            OP.Subscribe($"{Module}.AlarmAction", (string cmd, object[] args) =>
            {
                Enum.TryParse(args[0].ToString(), out AlarmAction alarmAction);
                string eventName = null;
                if (args.Length > 1)
                    eventName = args[1].ToString();
                if (eventName != null)
                {
                    EV.ClearAlarmEvent(eventName);

                    var item = _triggeredAlarmList.FirstOrDefault(x => x.EventEnum == eventName);
                    if (item != null)
                    {
                        item.Reset();
                        _triggeredAlarmList.Remove(item);
                    }

                    if (item != null)
                    {
                        switch (alarmAction)
                        {
                            case AlarmAction.Retry:
                                {
                                    CheckToPostMessage((int)item.RetryMessage, item.RetryMessageParas);
                                }
                                break;
                            case AlarmAction.Abort:
                                {
                                    CheckToPostMessage((int)MSG.Abort);
                                }
                                break;
                            case AlarmAction.Clear:
                                {
                                    int alarmCount = 0;
                                    var alarms = EV.GetAlarmEvent();
                                    foreach (var alarm in alarms)
                                    {
                                        if (alarm.Level == EventLevel.Alarm && alarm.Source == Name)
                                            alarmCount++;
                                    }
                                    if (alarmCount == 0 && !IsProcessing)
                                    {
                                        CheckToPostMessage((int)MSG.Reset);
                                        _alarmNumber = 0;
                                    }
                                }
                                break;
                            case AlarmAction.Continue:
                                {
                                    int alarmCount = 0;
                                    var alarms = EV.GetAlarmEvent();
                                    foreach (var alarm in alarms)
                                    {
                                        if (alarm.Level == EventLevel.Alarm && alarm.Source == Name)
                                            alarmCount++;
                                    }
                                    if (alarmCount == 0)
                                        CheckToPostMessage((int)MSG.Reset);
                                }
                                break;
                            case AlarmAction.ClearAll:
                                ResetAUXTrig();
                                break;
                        }
                    }
                }

                return true;
            });
            OP.Subscribe($"{Name}.SetConditionCheck", SetConditionCheck);

            OP.Subscribe($"{Name}.SetBoatZAxisMotion", SetBoatZAxisMotion);
            OP.Subscribe($"{Name}.SetBoatRAxisMotion", SetBoatRAxisMotion);
            OP.Subscribe($"{Name}.SetAutoShutterUp", SetAutoShutterUp);
            OP.Subscribe($"{Name}.SetAutoShutterOpen", SetAutoShutterOpen);
            OP.Subscribe($"{Name}.SetAutoShutterRotateOpen", SetAutoShutterRotateOpen);
            OP.Subscribe($"{Name}.BypassStandbyFactor", SeBypassStandbyFactor);
            OP.Subscribe($"{Name}.SetCommand", SetCommand);
            OP.Subscribe($"{Name}.SetN2PurgeMode", SetN2PurgeMode);
            OP.Subscribe($"{Name}.SetAllFFUPower", (out string reason, int time, object[] param) =>
            {
                reason = string.Empty;
                SetAllFFUPower(param);
                return true;
            });
            //OP.Subscribe($"{Name}.SetTemperatureDetail",)
            OP.Subscribe($"{Name}.SetSensorRecipeOK", SetSensorRecipeOK);
            OP.Subscribe($"{Name}.SetSensorPROCManualOK", SetSensorPROCManualOK);
            OP.Subscribe($"{Name}.SetEditRecipeName", SetEditRecipeName);
            OP.Subscribe($"{Name}.SetEditRecipeStepName", SetEditRecipeStepName);
            OP.Subscribe($"{Name}.Heater.SetParameters", (out string reason, int time, object[] param) =>
            {
                reason = string.Empty;
                //Mode参数;Correct Table;PID Table
                //"Heater;Parameter\\TempCorrection\\tempCorrect,2,Name2;Parameter\\TempPID\\tempPID,3,Name3"
                SetHeaterControlParameters(param);
                return true;
            });
            OP.Subscribe($"{Name}.Heater.SetPID", (out string reason, int time, object[] param) =>
            {
                reason = string.Empty;
                SetHeaterPIDParameters(param[0].ToString());
                return true;
            });
            OP.Subscribe($"{Name}.Heater.SetCorrect", (out string reason, int time, object[] param) =>
            {
                reason = string.Empty;
                SetHeaterCorrectParameters(param[0].ToString());
                return true;
            });
            //Recipe
            OP.Subscribe($"{Name}.SetBoatMotion", (out string reason, int time, object[] param) =>
            {
                reason = string.Empty;
                SetBoatMotion(param);
                return true;
            });
            //Recipe
            OP.Subscribe($"{Name}.SetValves", (out string reason, int time, object[] param) =>
            {
                reason = string.Empty;
                SetValves(param);
                return true;
            });
            //Recipe
            OP.Subscribe($"{Name}.SetAlarmConditionTable", (out string reason, int time, object[] param) =>
            {
                reason = string.Empty;
                SetAlarmConditionTable(param);
                return true;
            });
            //manual
            OP.Subscribe($"{Name}.SetAlarmConditionParameter", (out string reason, int time, object[] param) =>
            {
                reason = string.Empty;
                InitAlarmCondition(param[0].ToString());
                SetAlarmConditionTable(new object[1] { param[1] });
                return true;
            });
            OP.Subscribe($"{Name}.SetBoatManualMotion", (out string reason, int time, object[] param) =>
            {
                reason = string.Empty;
                SetBoatManualMotion(param);
                return true;
            });
            OP.Subscribe($"{Name}.SetBWREnable", (out string reason, int time, object[] param) =>
            {
                reason = string.Empty;
                SetBWREnable(param);
                return true;
            });
            OP.Subscribe($"{Name}.SetF2ClnEnable", (out string reason, int time, object[] param) =>
            {
                reason = string.Empty;
                SetF2ClnEnable(param);
                return true;
            });
            OP.Subscribe($"{Name}.SetHFClnEnable", (out string reason, int time, object[] param) =>
            {
                reason = string.Empty;
                SetHFClnEnable(param);
                return true;
            });
            OP.Subscribe($"{Name}.SetDEPOEnable", (out string reason, int time, object[] param) =>
            {
                reason = string.Empty;
                SetDEPOEnable(param);
                return true;
            });
            OP.Subscribe($"{Name}.SetHTR1Enable", (out string reason, int time, object[] param) =>
            {
                reason = string.Empty;
                SetHTR1Enable(param);
                return true;
            });
            OP.Subscribe($"{Name}.SetHTR2Enable", (out string reason, int time, object[] param) =>
            {
                reason = string.Empty;
                SetHTR2Enable(param);
                return true;
            });
            OP.Subscribe($"{Name}.SetHTR3Enable", (out string reason, int time, object[] param) =>
            {
                reason = string.Empty;
                SetHTR3Enable(param);
                return true;
            });
            OP.Subscribe($"{Name}.SetCEXHEnable", (out string reason, int time, object[] param) =>
            {
                reason = string.Empty;
                SetCEXHEnable(param);
                return true;
            });
            OP.Subscribe($"{Name}.AUX.SetParameters", (out string reason, int time, object[] param) =>
            {
                reason = string.Empty;
                //Mode参数;Correct Table;PID Table
                //"Heater;Parameter\\TempCorrection\\tempCorrect,2,Name2;Parameter\\TempPID\\tempPID,3,Name3"
                SetAUXParameters(param);
                return true;
            });
            OP.Subscribe($"{Module}.SetAllMfcVirtualValue", (out string reason, int time, object[] param) =>
            {
                reason = string.Empty;
                var dict = param[0] as Dictionary<string, string>;
                foreach (var item in dict)
                {
                    var mfc = _processMFCs.FirstOrDefault(x => x.Name == item.Key);
                    if (mfc != null)
                    {
                        mfc.SetMfcVirtualValue(out reason, 0, new object[] { item.Value });

                    }
                }
                return true;
            });
            OP.Subscribe($"{Module}.SetAllMfcValue", (out string reason, int time, object[] param) =>
            {
                reason = string.Empty;
                var dict = param[0] as Dictionary<string, string>;
                foreach (var item in dict)
                {
                    var mfc = _processMFCs.FirstOrDefault(x => x.Name == item.Key);
                    if (mfc != null)
                    { mfc.SetMfcValue(out reason, 0, new object[] { item.Value }); }
                }
                return true;
            });

            OP.Subscribe($"{Module}.SetAllMfcSetPoint", (out string reason, int time, object[] param) =>
            {
                reason = string.Empty;
                var dict = param[0] as Dictionary<string, string>;
                foreach (var item in dict)
                {
                    var mfc = _processMFCs.FirstOrDefault(x => x.Name == item.Key);
                    if (mfc != null)
                    { mfc.SetMfcSetPoint(out reason, 0, new object[] { item.Value }); }
                }
                return true;
            });

            OP.Subscribe($"{Module}.SetAll{AITValveOperation.GVVirtualTurnValve}", (out string reason, int time, object[] param) =>
            {
                reason = string.Empty;
                var dict = param[0] as Dictionary<string, bool>;
                foreach (var item in dict)
                {
                    var valve = _valves.FirstOrDefault(x => x.Name == item.Key);
                    if (valve != null)
                    {
                        valve.InvokeOpenCloseVirtualValve("", new object[] { item.Value });
                    }
                }
                return true;
            });
            OP.Subscribe($"{Module}.SetAll{AITValveOperation.GVTurnValve}", (out string reason, int time, object[] param) =>
            {
                reason = string.Empty;
                var dict = param[0] as Dictionary<string, bool>;
                foreach (var item in dict)
                {
                    _valves.FirstOrDefault(x => x.Name == item.Key).InvokeOpenCloseValve("", new object[] { item.Value });
                }
                return true;
            });

            OP.Subscribe($"{Name}.SetCREFEnable", (out string reason, int time, object[] param) =>
            {
                reason = string.Empty;
                SetCREFEnable(param);
                return true;
            });
            OP.Subscribe($"{Name}.SetSIREFEnable", (out string reason, int time, object[] param) =>
            {
                reason = string.Empty;
                SetHREFEnable(param);

                return true;
            });
            OP.Subscribe($"{Name}.SetBufferPurge", (out string reason, int time, object[] param) =>
            {
                reason = string.Empty;
                if (param.Length > 0 && param[0] is List<PurgeParameter> purge)
                {
                    reason = SetBufferPurge(purge);
                    if (!string.IsNullOrEmpty(reason)) return false;
                    SC.SetItemValue("BufferPurge.OperationOrder", $"{purge[0].Name},{purge[0].Speed},Time({purge[0].Time}),{(purge[0].IsOpen ? "Open" : (purge[0].IsClose ? "Close" : ""))}");
                }
                return true;
            });
            InitOtherOP();
        }
        private string SetBufferPurge(List<PurgeParameter> purge)
        {
            string reason = string.Empty;
            if (TrigBufferPurgeTime == null || TrigBufferN2PurageEN == null) { reason = "TrigBufferPurgeTime/TrigBufferN2PurageEN is null"; }
            if (purge[0].IsOpen || purge[0].IsClose)
            {
                if (TrigBufferPurgeTime.SetAOTrigger(purge[0].Time, out reason))
                {
                    TrigBufferN2PurageEN.SetTrigger(purge[0].IsOpen, out reason);
                }
            }
            return reason;
        }
        public void SetTemperatureDetail()
        {

        }

        private void InitFsm()
        {


            //Error
            Transition(STATE.Error, MSG.Reset, FsmReset, STATE.Idle);
            AnyStateTransition(MSG.Error, FsmOnError, STATE.Error);

            AnyStateTransition(MSG.Disconnected, FsmOnDisconnect, STATE.NotConnected);

            EnterExitTransition<STATE, FSM_MSG>(STATE.Error, FsmEnterError, FSM_MSG.NONE, FsmExitError);

            Transition(STATE.Idle, MSG.Abort, null, STATE.Idle);
            Transition(STATE.Idle, MSG.Reset, null, STATE.Idle);
            Transition(STATE.Init, MSG.Reset, null, STATE.Idle);
            Transition(STATE.Error, MSG.Abort, null, STATE.Error);

            //init
            Transition(STATE.Init, MSG.Home, FsmStartHome, STATE.Homing);

            AnyStateTransition(MSG.ToInit, FsmToInit, STATE.Init);

            //not connected
            Transition(STATE.NotConnected, MSG.Connected, null, STATE.Init);

            //Home 
            EnterExitTransition((int)STATE.Homing, FsmEnterHome, (int)FSM_MSG.NONE, FsmExitHome);

            Transition(STATE.Error, MSG.Home, FsmStartHome, STATE.Homing);
            Transition(STATE.Idle, MSG.Home, FsmStartHome, STATE.Homing);
            Transition(STATE.Homing, FSM_MSG.TIMER, FsmMonitorHomeTask, STATE.Idle);
            Transition(STATE.Homing, MSG.Error, null, STATE.Init);
            Transition(STATE.Homing, MSG.Abort, FsmAbortTask, STATE.Init);

            //PrepareTransfer
            Transition(STATE.Idle, MSG.PrepareTransfer, FsmStartPrepareTransfer, STATE.PrepareTransfer);
            Transition(STATE.PrepareTransfer, FSM_MSG.TIMER, FsmMonitorTask, STATE.Idle);
            Transition(STATE.PrepareTransfer, MSG.Abort, FsmAbortTask, STATE.Idle);

            //PostTransfer
            Transition(STATE.InTransfer, MSG.PostTransfer, FsmStartPostTransfer, STATE.PostTransfer);
            Transition(STATE.Idle, MSG.PostTransfer, FsmStartPostTransfer, STATE.PostTransfer);
            Transition(STATE.PostTransfer, FSM_MSG.TIMER, FsmMonitorTask, STATE.Idle);
            Transition(STATE.PostTransfer, MSG.Abort, FsmAbortTask, STATE.Idle);

            //online
            Transition(STATE.Idle, MSG.SetOnline, FsmStartSetOnline, STATE.Idle);
            Transition(STATE.Idle, MSG.SetOffline, FsmStartSetOffline, STATE.Idle);

            //Leak check
            Transition(STATE.Idle, MSG.LeakCheck, FsmStartLeakCheck, STATE.LeakCheck);
            Transition(STATE.LeakCheck, FSM_MSG.TIMER, FsmMonitorTask, STATE.Idle);
            Transition(STATE.LeakCheck, MSG.Abort, FsmAbortTask, STATE.Idle);
            EnterExitTransition<STATE, FSM_MSG>(STATE.LeakCheck, FsmEnterLeakCheck, FSM_MSG.NONE, FsmExitLeakCheck);

            //open SlitValve
            Transition(STATE.Idle, MSG.OpenSlitValve, FsmStartOpenSlitValve, STATE.OpenSlitValve);
            Transition(STATE.OpenSlitValve, FSM_MSG.TIMER, FsmMonitorTask, STATE.Idle);
            Transition(STATE.OpenSlitValve, MSG.Abort, FsmAbortTask, STATE.Idle);

            //close SlitValve
            Transition(STATE.Idle, MSG.CloseSlitValve, FsmStartCloseSlitValve, STATE.CloseSlitValve);
            Transition(STATE.CloseSlitValve, FSM_MSG.TIMER, FsmMonitorTask, STATE.Idle);
            Transition(STATE.CloseSlitValve, MSG.Abort, FsmAbortTask, STATE.Idle);

            //PreProcess
            Transition(STATE.Process, MSG.RunIdleRecipe, FsmStartIdleRecipePreProcess, STATE.PreProcess);
            Transition(STATE.Process, MSG.RunOtherRecipe, FsmStartOtherRecipePreProcess, STATE.PreProcess);
            Transition(STATE.Idle, MSG.RunOtherRecipe, FsmStartOtherRecipePreProcess, STATE.PreProcess);
            Transition(STATE.Idle, MSG.SelectRecipe, FsmSelectRecipe, STATE.Idle);
            Transition(STATE.Idle, MSG.RunRecipe, FsmStartPreProcess, STATE.PreProcess);
            Transition(STATE.PreProcess, FSM_MSG.TIMER, FsmMonitorTask, STATE.PreProcess);
            Transition(STATE.PreProcess, MSG.Abort, FsmAbortTask, STATE.Idle);
            Transition(STATE.PreProcess, MSG.RecipeAbort, FsmAbortTask, STATE.Idle);

            //Process
            Transition(STATE.PreProcess, MSG.Process, FsmStartProcess, STATE.Process);
            Transition(STATE.Idle, MSG.AlarmConditionJumpStep, FsmStartAlarmConditionJumpStep, STATE.Process);
            Transition(STATE.Process, FSM_MSG.TIMER, FsmMonitorTask, STATE.Process);
            Transition(STATE.Process, MSG.Abort, FsmAbortTask, STATE.Idle);
            Transition(STATE.Process, MSG.EndIdleRecipe, null, STATE.Idle);
            EnterExitTransition<STATE, FSM_MSG>(STATE.Process, FsmEnterProcess, FSM_MSG.NONE, FsmExitProcess);

            Transition(STATE.Paused, FSM_MSG.TIMER, FsmMonitorTask, STATE.Paused);
            Transition(STATE.Paused, MSG.Continue, FsmStartContinue, STATE.Process);
            Transition(STATE.Paused, MSG.Error, null, STATE.Paused);
            Transition(STATE.Paused, MSG.Abort, FsmAbortTask, STATE.Idle);

            //Transition(STATE.Paused, MSG.Error, null, STATE.Paused);

            Transition(STATE.Process, MSG.RecipeSkipStep, FsmSkipStep, STATE.Process);
            Transition(STATE.Process, MSG.RecipeJumpStep, FsmJumpStep, STATE.Process);
            Transition(STATE.Process, MSG.RecipePause, FsmRecipePause, STATE.Process);
            Transition(STATE.Process, MSG.RecipeContinue, FsmRecipeContinue, STATE.Process);
            Transition(STATE.Process, MSG.RecipeAbort, FsmRecipeAbort, STATE.Process);

            //PostProcess
            Transition(STATE.Process, MSG.PostProcess, FsmStartPostProcess, STATE.PostProcess);
            Transition(STATE.PostProcess, FSM_MSG.TIMER, FsmMonitorTask, STATE.Idle);
            Transition(STATE.PostProcess, MSG.Abort, FsmAbortTask, STATE.Idle);
            EnterExitTransition<STATE, FSM_MSG>(STATE.PostProcess, null, FSM_MSG.NONE, ExitPostProcess);


            //MFC Calibration
            Transition(STATE.Idle, MSG.StartMFCCalibration, FsmStartMFCCalibration, STATE.MFCCali);
            Transition(STATE.MFCCali, FSM_MSG.TIMER, FsmMonitorTask, STATE.Idle);
            Transition(STATE.MFCCali, MSG.Abort, FsmAbortTask, STATE.Idle);
        }

        private bool FsmToInit(object[] param)
        {
            return true;
        }

        private bool FsmExitError(object[] param)
        {
            return true;
        }

        private bool FsmEnterError(object[] param)
        {
            if (OnEnterError != null)
                OnEnterError(Module);

            if (IsOnline)
            {
                //EV.PostWarningLog(Module, $"{Module}");
            }

            return true;
        }

        private bool FsmStartPostTransfer(object[] param)
        {
            _postTransferRoutine.Init((EnumTransferType)Enum.Parse(typeof(EnumTransferType), (string)param[0]));

            Result ret = StartRoutine(_postTransferRoutine);
            if (ret == Result.FAIL || ret == Result.DONE)
                return false;
            return ret == Result.RUN;
        }

        private bool FsmStartPrepareTransfer(object[] param)
        {
            _prepareTransferRoutine.Init((EnumTransferType)Enum.Parse(typeof(EnumTransferType), (string)param[0]));

            Result ret = StartRoutine(_prepareTransferRoutine);
            if (ret == Result.FAIL || ret == Result.DONE)
                return false;
            return ret == Result.RUN;
        }

        private bool FsmStartSetOffline(object[] param)
        {
            IsOnline = false;
            return true;
        }

        private bool FsmStartSetOnline(object[] param)
        {
            IsOnline = true;
            return true;
        }

        private bool FsmStartLeakCheck(object[] param)
        {
            _leakCheckRoutine.Init((int)param[0], (int)param[1], (string)param[2], (bool[])param[3]);
            Result ret = StartRoutine(_leakCheckRoutine);
            if (ret == Result.FAIL || ret == Result.DONE)
                return false;
            return ret == Result.RUN;
        }

        private bool FsmEnterLeakCheck(object[] param)
        {

            return true;
        }

        private bool FsmExitLeakCheck(object[] param)
        {
            //ChamberProcessPressureGauge.UnsetTuning();

            return true;
        }

        private bool FsmStartOpenSlitValve(object[] param)
        {
            return true;
        }

        private bool FsmStartCloseSlitValve(object[] param)
        {
            return true;
        }

        private bool FsmSelectRecipe(object[] param)
        {
            return true;
        }

        private bool FsmStartPreProcess(object[] param)
        {
            _recipeRunningInfo.RecipeName = (string)param[0];


            if (!RecipeParser.Parse(_recipeRunningInfo.RecipeName, ModuleName.PM1.ToString(), out var recipeHead, out var recipeSteps, out string reason, "Process"))
            {
                PreprocessStartFailedWarning.Set($"Load process recipe {_recipeRunningInfo.RecipeName} failed, {reason}");
                return false;
            }
            if (recipeSteps == null || recipeSteps.Count == 0)
            {
                PreprocessStartFailedWarning.Set($"Process recipe {_recipeRunningInfo.RecipeName} is empty");
                return false;
            }

            string abortRecipeName = SC.ContainsItem("System.Recipe.Abort Recipe") ? SC.GetStringValue("System.Recipe.Abort Recipe") : string.Empty;
            if (string.IsNullOrEmpty(abortRecipeName))
            {
                PreprocessStartFailedWarning.Set($"Load abort recipe failed, recipe file is null");
                return false;
            }

            SC.SetItemValueFromString("PM1.ProcessRecipe", _recipeRunningInfo.RecipeName);
            if (!IsJobProcess)
                Singleton<EquipmentManager>.Instance.CreatePj((string)param[0]);

            RecipeExecEntryEnumValue = RecipeExecEntryEnum.MaintenanceJobTrigger;

            _preprocessRoutine.Init((string)param[0]);
            Result ret = StartRoutine(_preprocessRoutine);
            if (ret == Result.FAIL || ret == Result.DONE)
                return false;



            if (!IsJobProcess)
                SensorPROCManualOK.Value = true;

            return ret == Result.RUN;
        }
        private bool FsmStartOtherRecipePreProcess(object[] param)
        {
            Singleton<EquipmentManager>.Instance.EndPj("AbnormalEnd");
            _processRoutine?.Abort();
            IsWait = false;
            IsJobProcess = false;
            _recipeRunningInfo.RecipeName = param[0].ToString();
            var recipeType = param[1].ToString();
            var tableID = 1;
            if (param.Length > 2)
                int.TryParse(param[2].ToString(), out tableID);
            if (!RecipeParser.Parse(_recipeRunningInfo.RecipeName, ModuleName.PM1.ToString(), out var recipeHead, out var recipeSteps, out string reason, recipeType, tableID))
            {
                PreprocessStartFailedWarning.Set($"Load {recipeType} recipe {_recipeRunningInfo.RecipeName} failed {reason}");
                return false;
            }
            if (recipeSteps == null || recipeSteps.Count == 0)
            {
                PreprocessStartFailedWarning.Set($"{recipeType} recipe {_recipeRunningInfo.RecipeName} is empty");
                return false;
            }

            if (!IsJobProcess)
                Singleton<EquipmentManager>.Instance.CreatePj(_recipeRunningInfo.RecipeName);

            _preprocessRoutine.Init(_recipeRunningInfo.RecipeName, false);
            RecipeRunningInfo.MainRecipeName = _recipeRunningInfo.RecipeName;
            RecipeRunningInfo.Head = recipeHead;
            RecipeRunningInfo.RecipeStepList = recipeSteps;
            RecipeRunningInfo.RecipeName = _recipeRunningInfo.RecipeName;
            RecipeRunningInfo.ExecRecipeType = recipeSteps.Count > 0 ? recipeSteps[0].RecipeType : string.Empty;
            Result ret = StartRoutine(_preprocessRoutine);
            if (ret == Result.FAIL || ret == Result.DONE)
                return false;

            if (!IsJobProcess)
                SensorPROCManualOK.Value = true;

            return ret == Result.RUN;
        }
        private bool FsmStartIdleRecipePreProcess(object[] param)
        {
            if (!CheckBoatState())
            {
                PreprocessStartFailedWarning.Set($"boat is not ready");
                return false;
            }
            Singleton<EquipmentManager>.Instance.EndPj("AbnormalEnd");
            _recipeRunningInfo.RecipeName = SC.ContainsItem("System.Recipe.Idle Recipe") ? SC.GetStringValue("System.Recipe.Idle Recipe") : string.Empty;
            if (!RecipeParser.Parse(_recipeRunningInfo.RecipeName, ModuleName.PM1.ToString(), out var recipeHead, out var recipeSteps, out string reason, "Idle"))
            {
                PreprocessStartFailedWarning.Set($"Load idle recipe {_recipeRunningInfo.RecipeName} failed {reason}");
                return false;
            }
            if (recipeSteps == null || recipeSteps.Count == 0)
            {
                PreprocessStartFailedWarning.Set($"Process recipe {_recipeRunningInfo.RecipeName} is empty");
                return false;
            }

            if (!IsJobProcess)
                Singleton<EquipmentManager>.Instance.CreatePj(_recipeRunningInfo.RecipeName);


            _preprocessRoutine.Init(_recipeRunningInfo.RecipeName, false);
            RecipeRunningInfo.MainRecipeName = _recipeRunningInfo.RecipeName;
            RecipeRunningInfo.Head = recipeHead;
            RecipeRunningInfo.RecipeStepList = recipeSteps;
            RecipeRunningInfo.RecipeName = _recipeRunningInfo.RecipeName;
            RecipeRunningInfo.ExecRecipeType = recipeSteps.Count > 0 ? recipeSteps[0].RecipeType : string.Empty;

            RecipeExecEntryEnumValue = RecipeExecEntryEnum.IdleRecipeTrigger;

            Result ret = StartRoutine(_preprocessRoutine);
            if (ret == Result.FAIL || ret == Result.DONE)
                return false;

            if (!IsJobProcess)
                SensorPROCManualOK.Value = true;

            return ret == Result.RUN;
        }
        private bool FsmStartProcess(object[] param)
        {
            Result ret = StartRoutine(_processRoutine);
            if (ret == Result.FAIL || ret == Result.DONE)
                return false;

            if (ret == Result.RUN && !IsJobProcess)
                Singleton<EquipmentManager>.Instance.StartPj();

            return ret == Result.RUN;
        }
        private bool FsmStartAlarmConditionJumpStep(object[] param)
        {
            if (param != null && param.Length > 0)
            {
                int.TryParse(param[0].ToString(), out int jumpStep);
                _processRoutine.AlarmConditionJumpStep = jumpStep;
                Result ret = StartRoutine(_processRoutine);
                if (ret == Result.FAIL || ret == Result.DONE)
                    return false;

                return ret == Result.RUN;
            }

            return false;
        }

        private bool FsmEnterProcess(object[] param)
        {
            for (int i = 0; i < SC.GetValue<int>($"Boat.SlotCount"); i++)
            {
                if (!WaferManager.Instance.CheckHasWafer(ModuleHelper.Converter(Module), i))
                    continue;

                WaferManager.Instance.UpdateWaferProcessStatus(ModuleHelper.Converter(Module), i, EnumWaferProcessStatus.InProcess);
            }

            _processTimer.Restart();
            return true;
        }

        private bool FsmExitProcess(object[] param)
        {
            _processRoutine.ExitProcess();
            if (!IsJobProcess && !_processRoutine.IsExecuteAbort)//非jobprocess需要recipe结束也需要更新数据库
            {
                var firstPjId = Singleton<EquipmentManager>.Instance.GetFirstPJId();

                Singleton<EquipmentManager>.Instance.EndPj();
            }


            //_statWaferCount.Increase();

            //_statProcessTime.Increase((int)(_processTimer.ElapsedMilliseconds/1000));

            _isPrepareProcess = true;

            IsJobProcess = false;

            SensorPROCManualOK.Value = false;

            //if (SC.GetStringValue($"System.Recipe.ExcuteAfterRecipeComplete") == "StandbyStep")
            //{
            //    StringProcessFlowState = ProcessFlowState.Standby.ToString();

            //    _recipeRunningInfo.StepName = "Standby";

            //    var standbyStep = _recipeRunningInfo.RecipeStepList.Where(x => x.StepName == "Standby").FirstOrDefault();

            //    if (standbyStep != null)
            //    {
            //        EV.PostInfoLog(Module, $"Recipe {_recipeRunningInfo.RecipeName} complete excute standby step");

            //        foreach (var recipeCmd in standbyStep.RecipeCommands.Keys)
            //        {
            //            if (!OP.CanDoOperation($"{Module}.{recipeCmd}", out string reason, standbyStep.RecipeCommands[recipeCmd]))
            //            {
            //                if (!OP.CanDoOperation($"{ModuleName.PM1}.{recipeCmd}", out reason, standbyStep.RecipeCommands[recipeCmd]))
            //                {
            //                    if (!OP.CanDoOperation($"{ModuleName.System}.{recipeCmd}", out reason, standbyStep.RecipeCommands[recipeCmd]))
            //                    {
            //                        reason = $"Can not execute {recipeCmd}, {reason}";
            //                        return false;
            //                    }
            //                    else
            //                    {
            //                        OP.DoOperation($"{ModuleName.System}.{recipeCmd}", out string reason1, 0, standbyStep.RecipeCommands[recipeCmd]);
            //                    }
            //                }
            //                else
            //                {
            //                    OP.DoOperation($"{ModuleName.PM1}.{recipeCmd}", out string reason1, 0, standbyStep.RecipeCommands[recipeCmd]);
            //                }
            //            }
            //            else
            //            {
            //                OP.DoOperation($"{Module}.{recipeCmd}", out string reason1, 0, standbyStep.RecipeCommands[recipeCmd]);
            //            }
            //        }
            //    }

            //    _isStandbyStep = true;
            //    IsExcuteIdleRecipe = false;
            //}
            //else if (SC.GetStringValue($"System.Recipe.ExcuteAfterRecipeComplete") == "IdleRecipe")
            //{
            //    if (!IsExcuteIdleRecipe)
            //    {
            //        PostMsg((int)MSG.RunIdleRecipe);
            //        IsExcuteIdleRecipe = true;
            //    }
            //    else
            //    {
            //        IsExcuteIdleRecipe = false;
            //        _isStandbyStep = false;
            //    }
            //}
            //else
            //{
            //    IsExcuteIdleRecipe = false;
            //    _isStandbyStep = false;
            //}

            return true;
        }


        private bool FsmStartContinue(object[] param)
        {
            return true;
        }

        private bool FsmSkipStep(object[] param)
        {
            _processRoutine.SkipCurrentRecipeStep();
            return true;
        }

        private bool FsmJumpStep(object[] param)
        {
            int.TryParse(param[0].ToString(), out int stepNumber);
            _processRoutine.JumpCurrentRecipeStep(stepNumber, param[1].ToString());
            return true;
        }

        private bool FsmRecipePause(object[] param)
        {
            _processRoutine.PauseRecipe();
            return true;
        }

        private bool FsmRecipeContinue(object[] param)
        {
            _processRoutine.ContinueRecipe();
            return true;
        }

        private bool FsmRecipeAbort(object[] param)
        {
            Singleton<EquipmentManager>.Instance.EndPj("AbnormalEnd");
            var firstPjId = Singleton<EquipmentManager>.Instance.GetFirstPJId();
            _processRoutine.UpdateProcessDataPJid(firstPjId);
            _processRoutine.Abort();

            IsWait = false;
            IsJobProcess = false;

            var recipeName = _recipeRunningInfo.Head.AbortRecipe;
            var reason = "";

            if (!File.Exists($"{PathManager.GetRecipeDir()}\\{SC.GetStringValue("System.Recipe.SupportedChamberType")}\\Abort\\{recipeName}.rcp") ||
                !RecipeParser.Parse(recipeName, ModuleName.PM1.ToString(), out var recipeHead, out var recipeSteps, out reason, "Abort"))
            {
                recipeName = SC.GetStringValue("System.Recipe.Abort Recipe");
                if (!File.Exists($"{PathManager.GetRecipeDir()}\\{SC.GetStringValue("System.Recipe.SupportedChamberType")}\\Abort\\{recipeName}.rcp") ||
                    !RecipeParser.Parse(SC.GetStringValue("System.Recipe.Abort Recipe"), ModuleName.PM1.ToString(), out recipeHead, out recipeSteps, out reason, "Abort"))
                {
                    PostMsg(MSG.Error);
                    ExecuteAbortRecipeFailAlarm.Set($"Load abort recipe {recipeName} failed, {reason}");
                    _processRoutine.FACallBack(UniversalEvents.RecipeAbort, Module, RecipeRunningInfo.RecipeName, _processRoutine._currentStepNumber.ToString());

                    return false;
                }
            }
            var recipeType = recipeSteps.Count > 0 ? recipeSteps[0].RecipeType : string.Empty;
            var recipeTable = "";


            if (!string.IsNullOrEmpty(_recipeRunningInfo.Head.AbortRecipe))
            {
                var currectStep = _recipeRunningInfo.RecipeStepList[_processRoutine._currentStepNumber];
                if (string.IsNullOrEmpty(currectStep.AbortRecipeTableInfo))
                {
                    if (!RecipeParser.ParseTables(_recipeRunningInfo.Head.AbortRecipe, Module, out var recipeData, out reason, "Abort"))
                    {
                        ExecuteAbortRecipeFailAlarm.Set($"Load abort recipe {recipeName} failed, {reason}");
                        _processRoutine.FACallBack(UniversalEvents.RecipeAbort, Module, RecipeRunningInfo.RecipeName, _processRoutine._currentStepNumber.ToString());

                        return false;
                    }
                    else
                    {
                        recipeTable = recipeData.FirstOrDefault().Key.ToString();
                    }
                }
                else
                {
                    recipeTable = currectStep.AbortRecipeTableInfo.Split(':').FirstOrDefault();
                }
            }
            else
            {
                if (!RecipeParser.ParseTables(SC.GetStringValue("System.Recipe.Abort Recipe"), Module, out var recipeData, out reason, "Abort"))
                {
                    _processRoutine.FACallBack(UniversalEvents.RecipeAbort, Module, RecipeRunningInfo.RecipeName, _processRoutine._currentStepNumber.ToString());

                    ExecuteAbortRecipeFailAlarm.Set($"Load abort recipe {recipeName} failed, {reason}");
                    return false;
                }
                else
                {
                    recipeTable = recipeData.FirstOrDefault().Key.ToString();

                }

            }
            _processRoutine.FACallBack(UniversalEvents.RecipeAbort, Module, RecipeRunningInfo.RecipeName, _processRoutine._currentStepNumber.ToString());

            RecipeExecEntryEnumValue = RecipeExecEntryEnum.AbortRecipeTrigger;
            CheckToPostMessage((int)MSG.RunOtherRecipe, recipeName, recipeType, recipeTable);
            return true;
        }

        private bool FsmStartPostProcess(object[] param)
        {
            Result ret = StartRoutine(_postprocessRoutine);
            if (ret == Result.FAIL || ret == Result.DONE)
                return false;
            return ret == Result.RUN;
        }

        private bool ExitPostProcess(object[] param)
        {
            return true;
        }

        private bool FsmStartMFCCalibration(object[] param)
        {
            return true;
        }

        private bool FsmOnDisconnect(object[] param)
        {
            if (FsmState == (int)STATE.Error)
            {
                return false;
            }

            return true;
        }

        private bool FsmOnError(object[] param)
        {
            if (FsmState == (int)STATE.Error)
            {
                return false;
            }

            if ((FsmState == (int)STATE.Process) || (FsmState == (int)STATE.PreProcess) || (FsmState == (int)STATE.PostProcess))
            {
                for (int i = 0; i < SC.GetValue<int>($"Boat.SlotCount"); i++)
                {
                    if (!WaferManager.Instance.CheckHasWafer(ModuleHelper.Converter(Module), i))
                        continue;

                    WaferManager.Instance.UpdateWaferProcessStatus(ModuleHelper.Converter(Module), i, EnumWaferProcessStatus.Failed);
                }

                //    _processRoutine.Abort();

                _postprocessRoutine.Abort();

                _preprocessRoutine.Abort();
                IsWait = false;
            }

            return true;
        }

        private bool FsmReset(object[] param)
        {
            if (!_isInit)
            {
                PostMsg(MSG.ToInit);
                return false;
            }

            foreach (var device in _allModuleDevice)
            {
                if (device.HasAlarm)
                {
                    CheckHasAlarmWarning.Set($"{device.Name} has error");
                }
            }

            if (CheckHasAlarm())
                return false;

            return true;
        }

        private bool FsmStartHome(object[] param)
        {
            //if (!CheckIsConnected())
            //{
            //    PostMsg(MSG.Disconnected);
            //    return false;
            //}

            if (CheckHasAlarm())
            {
                CheckHasAlarmWarning.Set($"There exist active alarm, reset error before continue the initialization");

                PostMsg(MSG.Error);
                return false;
            }

            Result ret = StartRoutine(_homeRoutine);
            if (ret == Result.FAIL || ret == Result.DONE)
                return false;

            _isInit = false;

            return ret == Result.RUN;
        }

        private bool FsmExitHome(object[] param)
        {
            return true;
        }

        private bool FsmEnterHome(object[] param)
        {
            return true;
        }


        private bool FsmAbortTask(object[] param)
        {
            AbortRoutine();
            _isPrepareProcess = true;
            return true;
        }

        private bool FsmMonitorHomeTask(object[] param)
        {
            Result ret = MonitorRoutine();
            if (ret == Result.FAIL)
            {
                PostMsg(MSG.Error);
                return false;
            }

            if (ret == Result.DONE)
            {
                _isInit = true;
                return true;
            }

            return false;
        }

        private bool FsmMonitorTask(object[] param)
        {
            Result ret = MonitorRoutine();
            if (ret == Result.FAIL)
            {
                PostMsg(MSG.Error);
                return false;
            }

            if (ret == Result.DONE && FsmState == (int)STATE.PreProcess)
            {
                PostMsg(MSG.Process);
                return true;
            }

            if (ret == Result.DONE && FsmState == (int)STATE.Process)
            {
                PostMsg(MSG.PostProcess);
                return true;
            }

            if (ret == Result.DONE && IsExcuteIdleRecipe && FsmState == (int)STATE.PostProcess)
            {
                PostMsg(MSG.RunIdleRecipe);
                return true;
            }

            return ret == Result.DONE;
        }


        #region Service functions

        public override bool Home(out string reason)
        {
            CheckToPostMessage((int)MSG.Home);
            reason = string.Empty;
            return true;
        }
        public override void Reset()
        {
            ResetAUXTrig();

            if (!IsProcessing)
                CheckToPostMessage((int)MSG.Reset);
        }

        public override bool PrepareTransfer(ModuleName robot, Hand blade, int targetSlot, EnumTransferType transferType, out string reason)
        {
            CheckToPostMessage((int)MSG.PrepareTransfer, transferType.ToString());
            reason = string.Empty;
            return true;
        }

        public override bool TransferHandoff(ModuleName robot, Hand blade, int targetSlot, EnumTransferType transferType, out string reason)
        {
            reason = string.Empty;
            return true;
        }

        public override bool PostTransfer(ModuleName robot, Hand blade, int targetSlot, EnumTransferType transferType, out string reason)
        {
            CheckToPostMessage((int)MSG.PostTransfer, transferType.ToString());
            reason = string.Empty;
            return true;
        }

        public override bool CheckReadyForTransfer(ModuleName robot, Hand blade, int targetSlot, EnumTransferType transferType, out string reason)
        {
            reason = string.Empty;
            var boat = Singleton<EquipmentManager>.Instance.Modules[ModuleName.Boat] as BoatModule;
            if (!boat.IsBoatElevatorAtHomePosition)
            {
                reason = "Boat z axis is not at home position";
                return false;
            }
            if (!boat.IsBoatRotationAtHomePosition)
            {
                reason = "Boat r axis is not at home position";
                return false;
            }

            return true;
        }

        public override void NoteTransferStart(ModuleName robot, Hand blade, int targetSlot, EnumTransferType transferType)
        {
            //if (FsmState == (int)STATE.InTransfer)
            //    CheckToPostMessage(MSG.Transfer)
        }

        public override void NoteTransferStop(ModuleName robot, Hand blade, int targetSlot, EnumTransferType transferType)
        {
            //if (FsmState == (int)STATE.InTransfer)
            //    CheckToPostMessage(MSG.Transfer)
        }

        public override bool Process(string recipeName, bool isCleanRecipe, bool withWafer, out string reason)
        {
            _recipeRunningInfo.RecipeName = recipeName;
            _isPrepareProcess = false;
            _isStandbyStep = false;
            IsJobProcess = true;
            IsExcuteIdleRecipe = false;

            CheckToPostMessage((int)MSG.RunRecipe, recipeName);

            reason = string.Empty;
            return true;
        }

        public override bool Standby(string recipeName, out string reason)
        {
            reason = string.Empty;
            _recipeRunningInfo.RecipeName = recipeName;
            _recipeRunningInfo.MainRecipeName = recipeName;
            if (!RecipeParser.Parse(_recipeRunningInfo.RecipeName, ModuleName.PM1.ToString(), out var recipeHead, out var recipeSteps, out reason, "Process"))
            {
                reason = $"Load process recipe {_recipeRunningInfo.RecipeName} failed, {reason}";
                return false;
            }
            if (recipeSteps == null || recipeSteps.Count == 0)
            {
                reason = $"Process recipe {_recipeRunningInfo.RecipeName} is empty";
                return false;
            }

            _isStandbyStep = true;

            var standbyStep = recipeSteps.Where(x => x.StepName == "Standby").FirstOrDefault();

            if (standbyStep != null)
            {
                StringProcessFlowState = ProcessFlowState.Standby.ToString();

                _recipeRunningInfo.StepName = "Standby";

                EV.PostInfoLog(Module, $"pj job excute recipe {recipeName} standby step");

                foreach (var recipeCmd in standbyStep.RecipeCommands.Keys)
                {
                    if (!OP.CanDoOperation($"{Module}.{recipeCmd}", out reason, standbyStep.RecipeCommands[recipeCmd]))
                    {
                        if (!OP.CanDoOperation($"{ModuleName.PM1}.{recipeCmd}", out reason, standbyStep.RecipeCommands[recipeCmd]))
                        {
                            if (!OP.CanDoOperation($"{ModuleName.System}.{recipeCmd}", out reason, standbyStep.RecipeCommands[recipeCmd]))
                            {
                                reason = $"Can not execute {recipeCmd}, {reason}";
                                return false;
                            }
                            else
                            {
                                OP.DoOperation($"{ModuleName.System}.{recipeCmd}", out string reason1, 0, standbyStep.RecipeCommands[recipeCmd]);
                            }
                        }
                        else
                        {
                            OP.DoOperation($"{ModuleName.PM1}.{recipeCmd}", out string reason1, 0, standbyStep.RecipeCommands[recipeCmd]);
                        }
                    }
                    else
                    {
                        OP.DoOperation($"{Module}.{recipeCmd}", out string reason1, 0, standbyStep.RecipeCommands[recipeCmd]);
                    }
                }
            }

            return true;
        }
        public void EndIdleRecipe()
        {
            CheckToPostMessage((int)MSG.EndIdleRecipe);
        }
        private double GetNewShowTime()
        {
            return GetWaitTime() + _recipeRunningInfo.HoldTime;


        }
        private double GetWaitTime()
        {
            if (StringFsmStatus == "Idle")
            {
                _waitTimer.Reset();
            }
            if (IsWait)
            {
                _waitTimer.Start();
            }
            else
            {
                _waitTimer.Stop();
            }
            return _waitTimer.ElapsedMilliseconds / 1000;


        }
        #region 

        #region 
        private string _processRecipeStepNumber = "";
        private string _processRecipeStepName = "";
        private string _subRecipeStepName = "";
        private string _subRecipeStepNumber = "";
        private string _currentFilmThickness = "";
        private string _dryClearCount = "";
        private bool _isInSubProcessing = false;
        /// <summary>
        /// 更新FDC采集的数据
        /// </summary>
        /// <param name="isSub"></param>
        /// <param name="stepName"></param>
        /// <param name="stepNo"></param>
        public void SetFDCRecipeStepName(bool isSub, string stepName, string stepNo = "")
        {
            if (isSub)
            {
                _subRecipeStepName = stepName;
                _subRecipeStepNumber = stepNo;
                _isInSubProcessing = true;
                _processRecipeStepName = "";
                _processRecipeStepNumber = "";
            }
            else
            {
                _isInSubProcessing = false;
                _processRecipeStepName = stepName;
                _processRecipeStepNumber = stepNo;
                _subRecipeStepName = string.Empty;
                _subRecipeStepNumber = string.Empty;

            }
        }
        #endregion

        public void ResetFDCRecipeStepName()
        {
            _subRecipeStepName = "";
            _subRecipeStepNumber = "";
            _processRecipeStepName = "";
            _processRecipeStepNumber = "";
            _isInSubProcessing = false;
        }
        public void SetCurrentFilmThickness(float value)
        {
            _currentFilmThickness = value.ToString();
        }
        public void SetDryClearCount(float value)
        {
            _dryClearCount = value.ToString();
        }
        public void FDCSubscribe()
        {
            DATA.Subscribe($"DryClearCount", () => _dryClearCount);
            DATA.Subscribe($"BoatCurrentFilmThickness", () => _currentFilmThickness);
            DATA.Subscribe($"ProcessRecipeStepNumber", () => IsProcessing ? _processRecipeStepNumber : "");
            DATA.Subscribe($"ProcessRecipeStepName", () => IsProcessing ? _processRecipeStepName : "");
            DATA.Subscribe($"SubRecipeStepName", () => _subRecipeStepName);
            DATA.Subscribe($"SubRecipeStepNumber", () => _subRecipeStepNumber);
            //DATA.Subscribe($"IsInSubProcessing", () => _isInSubProcessing);
        }
        #endregion
        #region 

        public void CarrierOutStart(CarrierInfo carrier)
        {
            List<string> crids = CarrierManager.Instance.GetBufferMaterialInfo();
            SECsDataItem BufferMaterialInfos = new SECsDataItem(SECsFormat.List);
            SECsDataItem BufferMaterialInfo = new SECsDataItem(SECsFormat.List);
            foreach (var _id in crids)
            {
                BufferMaterialInfo = new SECsDataItem(SECsFormat.List);
                BufferMaterialInfo.Add("StockerName", _id.Split(';')[0], SECsFormat.Ascii);
                BufferMaterialInfo.Add("StockerCarrierID", _id.Split(';')[1].Replace("emptyid", ""), SECsFormat.Ascii);
                BufferMaterialInfos.Add(BufferMaterialInfo);
            }

            if (carrier != null)
            {
                EV.Notify(UniversalEvents.CarrierOutStart, new SerializableDictionary<string, object>()
                {
                    {DataVariables.Usage,  carrier.CarrierType.ToString()},
                    {DataVariables.CarrierID,  carrier.CarrierId},
                    {DataVariables.BufferCapacitiyList,  GetBufferCapacitiyList()},
                    {DataVariables.BufferMaterialInfo,  BufferMaterialInfos},
                });
            }
        }
        private SECsDataItem GetBufferCapacitiyList()
        {
            SECsDataItem bufinfo = new SECsDataItem(SECsFormat.List);
            bufinfo.Add("BUFPara", "Partition1");
            bufinfo.Add("BUFPara", "General");
            int emptyStocker = 0;
            int totalStocker = 0;
            foreach (var key in Singleton<EquipmentManager>.Instance.Modules.Keys)
            {
                if (ModuleHelper.IsStocker(key))
                    totalStocker++;

                if (ModuleHelper.IsStocker(key) && CarrierManager.Instance.CheckNoCarrier(key, 0))
                {
                    var has = false;
                    foreach (var key1 in Singleton<EquipmentManager>.Instance.Modules.Keys)
                    {
                        if (CarrierManager.Instance.CheckHasCarrier(key1, 0) && CarrierManager.Instance.GetCarrier(key1, 0).InternalModuleName == key)
                        {
                            has = true;
                            break;
                        }
                    }

                    if (has)
                        continue;

                    emptyStocker++;
                }
            }

            bufinfo.Add("BUFPara", emptyStocker, SECsFormat.U1);
            bufinfo.Add("BUFPara", totalStocker, SECsFormat.U1);

            int unallocatedPartitionCapacity = 0;
            List<ModuleName> checkList = new List<ModuleName>()
                {
                    ModuleName.LP1,
                    ModuleName.LP2,
                    ModuleName.FIMS1,
                    ModuleName.FIMS2,
                };
            foreach (var module in checkList)
            {
                if (CarrierManager.Instance.CheckHasCarrier(module, 0))
                    unallocatedPartitionCapacity++;
            }

            bufinfo.Add("BUFPara", unallocatedPartitionCapacity, SECsFormat.U1);
            return bufinfo;
        }
        public void CarrierOutEnd(CarrierInfo carrier, string lPPortID)
        {

            List<string> crids = CarrierManager.Instance.GetBufferMaterialInfo();
            SECsDataItem BufferMaterialInfos = new SECsDataItem(SECsFormat.List);
            SECsDataItem BufferMaterialInfo = new SECsDataItem(SECsFormat.List);
            foreach (var _id in crids)
            {
                BufferMaterialInfo = new SECsDataItem(SECsFormat.List);
                BufferMaterialInfo.Add("StockerName", _id.Split(';')[0], SECsFormat.Ascii);
                BufferMaterialInfo.Add("StockerCarrierID", _id.Split(';')[1].Replace("emptyid", ""), SECsFormat.Ascii);
                BufferMaterialInfos.Add(BufferMaterialInfo);
            }

            if (carrier != null)
            {
                EV.Notify(UniversalEvents.CarrierOutEnd, new SerializableDictionary<string, object>()
                {
                    {"PortID", lPPortID},
                    {DataVariables.Usage,  carrier.CarrierType.ToString()},
                    {DataVariables.BufferCapacitiyList,  GetBufferCapacitiyList()},
                    {DataVariables.BufferMaterialInfo,  BufferMaterialInfos},
                    {DataVariables.CarrierID,  carrier.CarrierId},
                });
            }
        }
        #endregion
    }
    #endregion
}