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- using Aitex.Core.Common.DeviceData;
- using Aitex.Core.RT.Device;
- using Aitex.Core.RT.Device.Unit;
- using Aitex.Core.RT.Event;
- using Aitex.Core.Util;
- using Aitex.Core.Utilities;
- using MECF.Framework.Common.Event;
- using System;
- using System.Collections.Generic;
- using System.Linq;
- using System.Reflection;
- using MECF.Framework.Common.SubstrateTrackings;
- using Aitex.Core.Common;
- using FurnaceRT.Equipments.Systems;
- using Aitex.Core.RT.IOCore;
- using MECF.Framework.Common.Equipment;
- using MECF.Framework.RT.Core.IoProviders;
- using MECF.Framework.Common.Device.Bases;
- using FurnaceRT.Equipments.Boats;
- using IoHeater = FurnaceRT.Devices.IoHeater;
- using IoPressureMeter = FurnaceRT.Devices.IoPressureMeter;
- using FurnaceRT.Devices;
- using Aitex.Core.RT.Log;
- using FurnaceRT.Equipments.PMs.Devices;
- using Aitex.Core.RT.SCCore;
- namespace FurnaceRT.Equipments.PMs
- {
- public partial class PMModule
- {
- enum N2PurgeMode
- {
- Auto,
- Manual_N2Purge,
- Manual_ATM,
- Manual_Maintenance,
- Auto_Check,
- }
- private Dictionary<string, Tuple<R_TRIG, List<Tuple<IoValve, bool>>>> _n2PurgeSequenceAction;
- private Dictionary<string, Func<bool>> _n2PurgeSequenceStatus;
- private N2PurgeMode _N2PurgeMode = N2PurgeMode.Auto;
- private bool GetN2PurgeAIRTo20PPMStatus()
- {
- return ValveLABacksideDoorCylinderControl.DOOpen.Value;
- }
- private bool GetN2PurgeUnder20PPMStatus()
- {
- return ConcentrationO2.Value < 20;
- }
- private bool GetN2PurgeAIRStatus()
- {
- return ValveLABacksideDoorCylinderControl.DOClose.Value && (AlarmSignalFilterBox1DoorSwitch != null ? !AlarmSignalFilterBox1DoorSwitch.Value : false);
- }
- private bool GetN2PurgeDoorOpenStatus()
- {
- return ValveLABacksideDoorCylinderControl.DOClose.Value && (AlarmSignalFilterBox1DoorSwitch != null ? !AlarmSignalFilterBox1DoorSwitch.Value : false);
- }
- private bool GetN2PurgeFoup1Status()
- {
- return GetN2PurgeAIRTo20PPMStatus() && GetN2PurgeUnder20PPMStatus() && FIMS1.IsFoupExist && FIMS1.CollisionAvoidanceUpDownStatus == DeviceStatus.Down;
- }
- private bool GetN2PurgeFoup2Status()
- {
- return GetN2PurgeAIRTo20PPMStatus() && GetN2PurgeUnder20PPMStatus() && FIMS2.IsFoupExist && FIMS2.CollisionAvoidanceUpDownStatus == DeviceStatus.Down; ;
- }
- private void MonitorN2Purge()
- {
- if (_N2PurgeMode != N2PurgeMode.Auto)
- return;
- if (_n2PurgeSequenceAction != null && _n2PurgeSequenceStatus != null)
- {
- foreach (var key in _n2PurgeSequenceAction.Keys)
- {
- var value = _n2PurgeSequenceAction[key];
- value.Item1.CLK = _n2PurgeSequenceStatus[key].Invoke();
- if (value.Item1.Q && value.Item2 != null)
- {
- LOG.Write($"N2 purge sequence trig: {key}");
- //EV.PostWarningLog("System",$"N2 purge sequence trig: {key}");
- foreach (var valve in value.Item2)
- {
- if (valve.Item1.Status != valve.Item2)
- valve.Item1.TurnValve(valve.Item2, out _);
- }
- }
- }
- }
- }
- public void SetN2PurgeLAO2CheckFirstEnable(bool isEable)
- {
- if (TrigN2PurgeLAO2CheckFirstEnable != null && TrigN2PurgeLAO2CheckFirstEnable.Value != isEable)
- TrigN2PurgeLAO2CheckFirstEnable.SetTrigger(isEable, out _);
- }
- public void SetN2PurgeFIMS1O2CheckEnable(ModuleName fims, bool isEable)
- {
- if (fims == ModuleName.FIMS1 && TrigN2PurgeFIMS1O2CheckEnable != null && TrigN2PurgeFIMS1O2CheckEnable.Value != isEable)
- TrigN2PurgeFIMS1O2CheckEnable.SetTrigger(isEable, out _);
- if (fims == ModuleName.FIMS2 && TrigN2PurgeFIMS2O2CheckEnable != null && TrigN2PurgeFIMS2O2CheckEnable.Value != isEable)
- TrigN2PurgeFIMS2O2CheckEnable.SetTrigger(isEable, out _);
- }
- public void SetN2PurgeProcess(bool isEable)
- {
- if (TrigN2PurgeProcess != null && TrigN2PurgeProcess.Value != isEable)
- TrigN2PurgeProcess.SetTrigger(isEable, out _);
- }
- public void SetN2PurgeLAO2CheckSV(float value)
- {
- if (TrigN2PurgeLAO2CheckSV != null)
- TrigN2PurgeLAO2CheckSV?.SetAOTrigger(value, out _);
- }
- public void SetN2PurgeFOUPO2CheckSV(float value)
- {
- if (TrigN2PurgeFOUPO2CheckSV != null)
- TrigN2PurgeFOUPO2CheckSV?.SetAOTrigger(value, out _);
- }
- public void SetN2PurgeParameters()
- {
- if (SC.ContainsItem("PM1.N2Purge.TransferRoomArrivalWaitTime") && TrigN2PurgeLAO2CheckTime != null)
- {
- var time = (float)SC.GetValue<double>("PM1.N2Purge.TransferRoomArrivalWaitTime");
- TrigN2PurgeLAO2CheckTime.SetAOTrigger(time, out _);
- }
- if (SC.ContainsItem("PM1.N2Purge.TransferRoomStableWaitTime") && TrigN2PurgeLAO2OverTime != null)
- {
- var time = (float)SC.GetValue<double>("PM1.N2Purge.TransferRoomStableWaitTime");
- TrigN2PurgeLAO2OverTime.SetAOTrigger(time, out _);
- }
- if (SC.ContainsItem("PM1.N2Purge.FOUPOpenerArrivalWaitTime") && TrigN2PurgeFOUPO2CheckTime != null)
- {
- var time = (float)SC.GetValue<double>("PM1.N2Purge.FOUPOpenerArrivalWaitTime");
- TrigN2PurgeFOUPO2CheckTime.SetAOTrigger(time, out _);
- }
- if (SC.ContainsItem("PM1.N2Purge.FOUPOpenerStableWaitTime") && TrigN2PurgeFOUPO2OverTime != null)
- {
- var time = (float)SC.GetValue<double>("PM1.N2Purge.FOUPOpenerStableWaitTime");
- TrigN2PurgeFOUPO2OverTime.SetAOTrigger(time, out _);
- }
- if (SC.ContainsItem("PM1.N2Purge.O2DetectorTransferRoomToFOUPTime") && TrigN2PurgeExchangeLATOFOUPWaitTime != null)
- {
- var time = (float)SC.GetValue<double>("PM1.N2Purge.O2DetectorTransferRoomToFOUPTime");
- TrigN2PurgeExchangeLATOFOUPWaitTime.SetAOTrigger(time, out _);
- }
- if (SC.ContainsItem("PM1.N2Purge.O2DetectorFOUPToTransferRoomTime") && TrigN2PurgeExchangeFOUPTOLAWaitTime != null)
- {
- var time = (float)SC.GetValue<double>("PM1.N2Purge.O2DetectorFOUPToTransferRoomTime");
- TrigN2PurgeExchangeFOUPTOLAWaitTime.SetAOTrigger(time, out _);
- }
- if (SC.ContainsItem("PM1.N2Purge.O2DetectorFOUPToFOUPTime") && TrigN2PurgeExchangeFOUPTOFOUPWaitTime != null)
- {
- var time = (float)SC.GetValue<double>("PM1.N2Purge.O2DetectorFOUPToFOUPTime");
- TrigN2PurgeExchangeFOUPTOFOUPWaitTime.SetAOTrigger(time, out _);
- }
- }
- }
- }
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