CarrierRobotPick.cs 32 KB

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  1. using Aitex.Core.RT.Routine;
  2. using Aitex.Core.RT.SCCore;
  3. using Aitex.Core.Util;
  4. using Aitex.Sorter.Common;
  5. using DocumentFormat.OpenXml.Wordprocessing;
  6. using MECF.Framework.Common.Equipment;
  7. using MECF.Framework.Common.Schedulers;
  8. using MECF.Framework.Common.SubstrateTrackings;
  9. using MECF.Framework.RT.EquipmentLibrary.LogicUnits;
  10. using System;
  11. using System.Collections.Generic;
  12. using FurnaceRT.Equipments.FIMSs;
  13. using FurnaceRT.Equipments.LPs;
  14. using FurnaceRT.Equipments.Stockers;
  15. using FurnaceRT.Equipments.Systems;
  16. using FurnaceRT.Equipments.WaferRobots;
  17. using static FurnaceRT.Equipments.FIMSs.FIMSModule;
  18. namespace FurnaceRT.Equipments.CarrierRobots
  19. {
  20. public class CarrierRobotPick : ModuleRoutine, IRoutine
  21. {
  22. enum RoutineStep
  23. {
  24. SetBufferTargetPosition,
  25. SetBufferMoveTo,
  26. Delay,
  27. Goto,
  28. Pick,
  29. DoorOpen,
  30. DoorClose,
  31. RobotRequestCassettePresent,
  32. CheckCassetteInfoByRobotSensor,
  33. SetStageUnlock,
  34. CheckBeforePick,
  35. CheckGotoFinish,
  36. SetRobotActionCommand,
  37. }
  38. private CarrierRobotModule _cassetteRobotModule;
  39. private ModuleName _source;
  40. private int _sourceSlot;
  41. private Hand _blade;
  42. private int _timeout = 0;
  43. private RD_TRIG _holdTrig = new RD_TRIG();
  44. private R_TRIG _emergencyStopTrig = new R_TRIG();
  45. private R_TRIG _pauseTrig = new R_TRIG();
  46. private R_TRIG _resumeTrig = new R_TRIG();
  47. private RoutineStep _routineStep;
  48. private double _durationTime = 0;
  49. private bool _isHasAlarm = false;
  50. private bool _needStartCheck = true;
  51. public CarrierRobotPick(CarrierRobotModule cassetteModule)
  52. {
  53. _cassetteRobotModule = cassetteModule;
  54. Module = cassetteModule.Module;
  55. Name = "Pick";
  56. }
  57. public void Init(ModuleName source, int sourceSlot, Hand blade, bool isHasAlarm)
  58. {
  59. _source = source;
  60. _sourceSlot = sourceSlot;
  61. _blade = blade;
  62. var para = new List<object> { _source, _sourceSlot, _blade, true };
  63. _cassetteRobotModule.PickCassetteTimeoutAlarm.RetryMessage = (int)CarrierRobotModule.MSG.PickRetry;
  64. _cassetteRobotModule.PickCassetteTimeoutAlarm.RetryMessageParas = para.ToArray();
  65. _cassetteRobotModule.PickCassetteFailAlarm.RetryMessage = (int)CarrierRobotModule.MSG.PickRetry;
  66. _cassetteRobotModule.PickCassetteFailAlarm.RetryMessageParas = para.ToArray();
  67. _cassetteRobotModule.RequestCassettePresentFailAlarm.RetryMessage = (int)CarrierRobotModule.MSG.PickRetry;
  68. _cassetteRobotModule.RequestCassettePresentFailAlarm.RetryMessageParas = para.ToArray();
  69. _cassetteRobotModule.RequestCassettePresentTimeoutAlarm.RetryMessage = (int)CarrierRobotModule.MSG.PickRetry;
  70. _cassetteRobotModule.RequestCassettePresentTimeoutAlarm.RetryMessageParas = para.ToArray();
  71. _cassetteRobotModule.SetStageValveFailAlarm.RetryMessage = (int)CarrierRobotModule.MSG.PickRetry;
  72. _cassetteRobotModule.SetStageValveFailAlarm.RetryMessageParas = para.ToArray();
  73. _cassetteRobotModule.SetStageValveTimeout.RetryMessage = (int)CarrierRobotModule.MSG.PickRetry;
  74. _cassetteRobotModule.SetStageValveTimeout.RetryMessageParas = para.ToArray();
  75. _cassetteRobotModule.RobotHasError.RetryMessage = (int)CarrierRobotModule.MSG.PickRetry;
  76. _cassetteRobotModule.RobotHasError.RetryMessageParas = para.ToArray();
  77. _cassetteRobotModule.ShutterOpenTimeoutAlarm.RetryMessage = (int)CarrierRobotModule.MSG.PickRetry;
  78. _cassetteRobotModule.ShutterOpenTimeoutAlarm.RetryMessageParas = para.ToArray();
  79. _cassetteRobotModule.ShutterCloseTimeoutAlarm.RetryMessage = (int)CarrierRobotModule.MSG.PickRetry;
  80. _cassetteRobotModule.ShutterCloseTimeoutAlarm.RetryMessageParas = para.ToArray();
  81. _isHasAlarm = isHasAlarm;
  82. if (!_isHasAlarm)
  83. _needStartCheck = true;
  84. }
  85. public Result Start(params object[] objs)
  86. {
  87. // 抛出过alarm就不reset
  88. if (!_isHasAlarm)
  89. {
  90. Reset();
  91. }
  92. else
  93. {
  94. _historySteps.Remove((int)_routineStep);
  95. _isHasAlarm = false;
  96. ResetState();
  97. }
  98. _holdTrig.RST = true;
  99. _emergencyStopTrig.RST = true;
  100. _pauseTrig.RST = true;
  101. _resumeTrig.RST = true;
  102. _timeout = SC.GetValue<int>($"{Module}.MotionTimeout");
  103. if (_needStartCheck)
  104. {
  105. if (!Singleton<EquipmentManager>.Instance.Modules.ContainsKey(_source))
  106. {
  107. _cassetteRobotModule.PlaceCassetteFailAlarm.Set($"pick from {_source} failed for not install");
  108. return Result.FAIL;
  109. }
  110. if (ModuleHelper.IsLoadPort(_source))
  111. {
  112. var lpModule = Singleton<EquipmentManager>.Instance.Modules[_source] as LoadPortModule;
  113. if(lpModule == null)
  114. {
  115. _cassetteRobotModule.PickCassetteFailAlarm.Set($"pick from {_source} failed for not install");
  116. return Result.FAIL;
  117. }
  118. if (lpModule != null && !lpModule.CheckReadyForTransfer(ModuleHelper.Converter(Module), _blade, _sourceSlot, EnumTransferType.Pick, out string reason))
  119. {
  120. _cassetteRobotModule.PickCassetteFailAlarm.Set($"pick from {_source} failed for {reason}");
  121. return Result.FAIL;
  122. }
  123. (Singleton<EquipmentManager>.Instance.Modules[_source] as ITransferTarget)?.NoteTransferStart(ModuleHelper.Converter(_cassetteRobotModule.Module), _blade, _sourceSlot, EnumTransferType.Pick);
  124. }
  125. else if (_source == ModuleName.FIMS1 || _source == ModuleName.FIMS2)
  126. {
  127. var fims = Singleton<EquipmentManager>.Instance.Modules[_source] as FIMSModule;
  128. if (fims == null)
  129. {
  130. _cassetteRobotModule.PickCassetteFailAlarm.Set($"pick from {_source} failed for not install");
  131. return Result.FAIL;
  132. }
  133. if (fims != null && !fims.CheckReadyForTransfer(ModuleHelper.Converter(Module), _blade, _sourceSlot, EnumTransferType.Pick, out string reason))
  134. {
  135. _cassetteRobotModule.PickCassetteFailAlarm.Set($"pick from {_source} failed for {reason}");
  136. return Result.FAIL;
  137. }
  138. if (!SC.GetValue<bool>("System.IsSimulatorMode"))
  139. {
  140. if (fims != null && !fims.IsFoupExist)
  141. {
  142. _cassetteRobotModule.PickCassetteFailAlarm.Set($"pick from {_source} failed for cassette is not present");
  143. return Result.FAIL;
  144. }
  145. }
  146. }
  147. else
  148. {
  149. var stockerModule = Singleton<EquipmentManager>.Instance.Modules[_source] as StockerModule;
  150. if (stockerModule == null)
  151. {
  152. _cassetteRobotModule.PickCassetteFailAlarm.Set($"pick from {_source} failed for not install");
  153. return Result.FAIL;
  154. }
  155. if (!SC.GetValue<bool>("System.IsSimulatorMode"))
  156. {
  157. if (stockerModule != null && !stockerModule.IsFoupPresent)
  158. {
  159. _cassetteRobotModule.PickCassetteFailAlarm.Set($"pick from {_source} failed for cassette is not present");
  160. return Result.FAIL;
  161. }
  162. }
  163. }
  164. if (SC.GetValue<bool>("System.IsSimulatorMode"))
  165. {
  166. if (!CarrierManager.Instance.CheckNoCarrier(ModuleName.CarrierRobot, 0))
  167. {
  168. _cassetteRobotModule.BladeCassettePresentWarning.Set($"{ModuleName.CarrierRobot} cassette present");
  169. return Result.FAIL;
  170. }
  171. }
  172. else
  173. {
  174. if (_cassetteRobotModule.CarrierRobotDevice.IsWaferPresenceOnBlade1 || !CarrierManager.Instance.CheckNoCarrier(ModuleName.CarrierRobot, 0))
  175. {
  176. _cassetteRobotModule.BladeCassettePresentWarning.Set($"{ModuleName.CarrierRobot} cassette present");
  177. return Result.FAIL;
  178. }
  179. }
  180. if (!CarrierManager.Instance.CheckHasCarrier(_source, 0))
  181. {
  182. _cassetteRobotModule.PickCassetteFailAlarm.Set($"pick from {_source} failed for cassette is not present");
  183. return Result.FAIL;
  184. }
  185. }
  186. Notify($"Start");
  187. return Result.RUN;
  188. }
  189. public void Abort()
  190. {
  191. _cassetteRobotModule.ResetRobotActionCommand();
  192. _cassetteRobotModule.Stop();
  193. (Singleton<EquipmentManager>.Instance.Modules[_source] as ITransferTarget)?.NoteTransferStop(ModuleHelper.Converter(_cassetteRobotModule.Module), _blade, _sourceSlot, EnumTransferType.Pick);
  194. }
  195. public override Result Monitor()
  196. {
  197. try
  198. {
  199. PauseRountine(_cassetteRobotModule.CarrierRobotDevice.IsPause);
  200. if (_cassetteRobotModule.CarrierRobotDevice.IsPause)
  201. return Result.RUN;
  202. PickStartInfo();
  203. CheckBeforePick((int)RoutineStep.CheckBeforePick, _source, _sourceSlot, _blade);
  204. if (ModuleHelper.IsBufferStocker(_source))
  205. {
  206. Goto((int)RoutineStep.Goto, _source, _sourceSlot, _blade, true, _timeout);
  207. SetBufferTargetPosition((int)RoutineStep.SetBufferTargetPosition, _source, _timeout);
  208. SetBufferMoveTo((int)RoutineStep.SetBufferMoveTo, _source, _timeout);
  209. CheckGotoFinish((int)RoutineStep.CheckGotoFinish, _source, _timeout);
  210. }
  211. if (_source == ModuleName.LP1 || _source == ModuleName.LP2)
  212. {
  213. Goto((int)RoutineStep.Goto, _source, _sourceSlot, _blade, true, _timeout);
  214. SaferDoorOpen((int)RoutineStep.DoorOpen, true, _timeout);
  215. CheckGotoFinish((int)RoutineStep.CheckGotoFinish, _source, _timeout);
  216. }
  217. if (_cassetteRobotModule.TrigActionCommand != null)
  218. SetRobotActionCommand((int)RoutineStep.SetRobotActionCommand, _source, _timeout);
  219. Pick((int)RoutineStep.Pick, _source, _sourceSlot, _blade, _timeout);
  220. if (_source == ModuleName.LP1 || _source == ModuleName.LP2)
  221. SaferDoorOpen((int)RoutineStep.DoorClose, false, _timeout);
  222. //RobotRequestCassettePresent((int)RoutineStep.RobotRequestCassettePresent, _blade, _timeout);
  223. CheckCassetteInfoByRobotSensor((int)RoutineStep.CheckCassetteInfoByRobotSensor, _blade, true);
  224. }
  225. catch (RoutineBreakException)
  226. {
  227. return Result.RUN;
  228. }
  229. catch (RoutineFaildException ex)
  230. {
  231. _cassetteRobotModule.ResetRobotActionCommand();
  232. PickEndInfo();
  233. return Result.FAIL;
  234. }
  235. _cassetteRobotModule.ResetRobotActionCommand();
  236. PickEndInfo();
  237. Notify("Finished");
  238. return Result.DONE;
  239. }
  240. private void PickStartInfo()
  241. {
  242. var stockerFoupInfo = CarrierManager.Instance.GetCarrier(_source);
  243. stockerFoupInfo.UICarrierStatusEnum = CarrierStatus.MOVECST;
  244. Singleton<EquipmentManager>.Instance.SetVisibility(stockerFoupInfo, true);
  245. }
  246. private void PickEndInfo()
  247. {
  248. (Singleton<EquipmentManager>.Instance.Modules[_source] as ITransferTarget)?.NoteTransferStop(ModuleHelper.Converter(_cassetteRobotModule.Module), _blade, _sourceSlot, EnumTransferType.Pick);
  249. var stockerFoupInfo = CarrierManager.Instance.GetCarrier(_source);
  250. stockerFoupInfo.UICarrierStatusEnum = CarrierStatus.TRAKCST;
  251. Singleton<EquipmentManager>.Instance.SetVisibility(stockerFoupInfo, false);
  252. var carrierRobotFoupInfo = CarrierManager.Instance.GetCarrier(ModuleName.CarrierRobot);
  253. carrierRobotFoupInfo.UICarrierStatusEnum = CarrierStatus.TRAKCST;
  254. Singleton<EquipmentManager>.Instance.SetVisibility(carrierRobotFoupInfo, true);
  255. }
  256. private void SetRobotActionCommand(int id, ModuleName source, int timeout)
  257. {
  258. _routineStep = (RoutineStep)Enum.Parse(typeof(RoutineStep), id.ToString());
  259. Tuple<bool, Result> ret = ExecuteAndWait(id, () =>
  260. {
  261. Notify($"Set robot action command target position {source}");
  262. _cassetteRobotModule.SetRobotActionCommand(source, EnumTransferType.Pick);
  263. return true;
  264. }, () =>
  265. {
  266. return _cassetteRobotModule.CheckRobotActionCommand(source, EnumTransferType.Pick);
  267. }, timeout * 1000);
  268. if (ret.Item1)
  269. {
  270. if (ret.Item2 == Result.FAIL)
  271. {
  272. _cassetteRobotModule.PickCassetteFailAlarm.Set($"pick from {source} failed for robot action command interlock");
  273. throw (new RoutineFaildException());
  274. }
  275. else if (ret.Item2 == Result.TIMEOUT) //timeout
  276. {
  277. _cassetteRobotModule.PickCassetteTimeoutAlarm.Set($"timeout over {timeout} seconds");
  278. throw (new RoutineFaildException());
  279. }
  280. else
  281. throw (new RoutineBreakException());
  282. }
  283. }
  284. private void SetBufferTargetPosition(int id, ModuleName source, int timeout)
  285. {
  286. _routineStep = (RoutineStep)Enum.Parse(typeof(RoutineStep), id.ToString());
  287. Tuple<bool, Result> ret = ExecuteAndWait(id, () =>
  288. {
  289. Notify($"Set buffer target position {source}");
  290. _cassetteRobotModule.SetBufferTargetPosition(source.ToString());
  291. return true;
  292. }, () =>
  293. {
  294. return _cassetteRobotModule.CheckBufferTargetPosition(source.ToString());
  295. }, timeout * 1000);
  296. if (ret.Item1)
  297. {
  298. if (ret.Item2 == Result.FAIL)
  299. {
  300. _cassetteRobotModule.PickCassetteFailAlarm.Set($"pick from {source} failed for set buffer target position");
  301. throw (new RoutineFaildException());
  302. }
  303. else if (ret.Item2 == Result.TIMEOUT) //timeout
  304. {
  305. _cassetteRobotModule.PickCassetteTimeoutAlarm.Set($"timeout over {timeout} seconds");
  306. throw (new RoutineFaildException());
  307. }
  308. else
  309. throw (new RoutineBreakException());
  310. }
  311. }
  312. private void SetBufferMoveTo(int id, ModuleName source, int timeout)
  313. {
  314. _routineStep = (RoutineStep)Enum.Parse(typeof(RoutineStep), id.ToString());
  315. Tuple<bool, Result> ret = ExecuteAndWait(id, () =>
  316. {
  317. Notify($"Set buffer move to {source}");
  318. _cassetteRobotModule.SetBufferMoveTo();
  319. return true;
  320. }, () =>
  321. {
  322. return _cassetteRobotModule.BufferDevice.IsReady && _cassetteRobotModule.BufferDevice.IsInPosition;
  323. }, timeout * 1000);
  324. if (ret.Item1)
  325. {
  326. if (ret.Item2 == Result.FAIL)
  327. {
  328. _cassetteRobotModule.PickCassetteFailAlarm.Set($"pick from {source} failed for robot error, error code={_cassetteRobotModule.CarrierRobotDevice.ErrorCode}");
  329. throw (new RoutineFaildException());
  330. }
  331. else if (ret.Item2 == Result.TIMEOUT) //timeout
  332. {
  333. _cassetteRobotModule.PickCassetteTimeoutAlarm.Set($"timeout over {timeout} seconds");
  334. throw (new RoutineFaildException());
  335. }
  336. else
  337. throw (new RoutineBreakException());
  338. }
  339. }
  340. private void Pick(int id, ModuleName source, int slot, Hand hand, int timeout)
  341. {
  342. _routineStep = (RoutineStep)Enum.Parse(typeof(RoutineStep), id.ToString());
  343. Tuple<bool, Result> ret = ExecuteAndWait(id, () =>
  344. {
  345. Notify($"Send pick from {source} command to robot device");
  346. string reason;
  347. (Singleton<EquipmentManager>.Instance.Modules[source] as ITransferTarget)?.NoteTransferStart(ModuleHelper.Converter(_cassetteRobotModule.Module), hand, slot, EnumTransferType.Pick);
  348. if (!_cassetteRobotModule.RobotPick(source, slot, hand, out reason))
  349. {
  350. //_cassetteRobotModule.PickCassetteFailAlarm.Description = reason;
  351. _cassetteRobotModule.PickCassetteFailAlarm.Set(reason);
  352. return false;
  353. }
  354. return true;
  355. }, () =>
  356. {
  357. if (_cassetteRobotModule.CarrierRobotDevice.IsReady() && !_cassetteRobotModule.CarrierRobotDevice.IsError)
  358. {
  359. return true;
  360. }
  361. return false;
  362. }, timeout * 1000);
  363. if (ret.Item1)
  364. {
  365. if (ret.Item2 == Result.FAIL)
  366. {
  367. //_cassetteRobotModule.PickCassetteFailAlarm.Description = $"{_cassetteRobotModule.CassetteRobotDevice.ErrorCode}";
  368. _cassetteRobotModule.PickCassetteFailAlarm.Set($"pick from {source} failed for robot error, error code={_cassetteRobotModule.CarrierRobotDevice.ErrorCode}");
  369. throw (new RoutineFaildException());
  370. }
  371. else if (ret.Item2 == Result.TIMEOUT) //timeout
  372. {
  373. //_cassetteRobotModule.PickCassetteTimeoutAlarm.Description = $"timeout over {timeout} seconds";
  374. _cassetteRobotModule.PickCassetteTimeoutAlarm.Set($"timeout over {timeout} seconds");
  375. throw (new RoutineFaildException());
  376. }
  377. else
  378. throw (new RoutineBreakException());
  379. }
  380. }
  381. private void RobotRequestCassettePresent(int id, Hand hand, int timeout)
  382. {
  383. Tuple<bool, Result> ret = ExecuteAndWait(id, () =>
  384. {
  385. Notify("Request cassette present");
  386. if (!_cassetteRobotModule.RequestCassettePresent(hand, out string reason))
  387. {
  388. //_cassetteRobotModule.RequestCassettePresentFailAlarm.Description = reason;
  389. _cassetteRobotModule.RequestCassettePresentFailAlarm.Set(reason);
  390. return false;
  391. }
  392. return true;
  393. }, () =>
  394. {
  395. if (_cassetteRobotModule.CarrierRobotDevice.IsReady() && !_cassetteRobotModule.CarrierRobotDevice.IsError)
  396. {
  397. return true;
  398. }
  399. return false;
  400. }, timeout * 1000);
  401. if (ret.Item1)
  402. {
  403. if (ret.Item2 == Result.FAIL)
  404. {
  405. throw (new RoutineFaildException());
  406. }
  407. else if (ret.Item2 == Result.TIMEOUT) //timeout
  408. {
  409. //_cassetteRobotModule.RequestCassettePresentTimeoutAlarm.Description = $"timeout over {timeout} seconds";
  410. _cassetteRobotModule.RequestCassettePresentTimeoutAlarm.Set($"timeout over {timeout} seconds");
  411. throw (new RoutineFaildException());
  412. }
  413. else
  414. throw (new RoutineBreakException());
  415. }
  416. }
  417. private void CheckCassetteInfoByRobotSensor(int id, Hand hand, bool isAfterPick)
  418. {
  419. Tuple<bool, Result> ret = Execute(id, () =>
  420. {
  421. Notify($"Check cassette info by robot RQ present");
  422. if (SC.GetValue<bool>("System.IsSimulatorMode"))
  423. return true;
  424. if (hand == Hand.Blade1 || hand == Hand.Both)
  425. {
  426. if (!isAfterPick && _cassetteRobotModule.CarrierRobotDevice.IsWaferPresenceOnBlade1)
  427. {
  428. //_cassetteRobotModule.RobotSensorFoundCassetteOnBladeAfterPlaceAlarm.Description = "Cassette Robot sensor found cassette on blade 1";
  429. _cassetteRobotModule.RobotSensorFoundCassetteOnBladeAfterPlaceAlarm.Set("Cassette Robot sensor found cassette on blade 1");
  430. return false;
  431. }
  432. if (isAfterPick && !_cassetteRobotModule.CarrierRobotDevice.IsWaferPresenceOnBlade1)
  433. {
  434. //_cassetteRobotModule.RobotSensorNotFoundCassetteOnBladeAfterPickAlarm.Description = "Cassette Robot sensor no cassette on blade 1";
  435. _cassetteRobotModule.RobotSensorNotFoundCassetteOnBladeAfterPickAlarm.Set("Cassette Robot sensor no cassette on blade 1");
  436. return false;
  437. }
  438. }
  439. if (hand == Hand.Blade2 || hand == Hand.Both)
  440. {
  441. if (!isAfterPick && _cassetteRobotModule.CarrierRobotDevice.IsWaferPresenceOnBlade2)
  442. {
  443. //_cassetteRobotModule.RobotSensorFoundCassetteOnBladeAfterPlaceAlarm.Description = "Cassette Robot sensor found cassette on blade 2";
  444. _cassetteRobotModule.RobotSensorFoundCassetteOnBladeAfterPlaceAlarm.Set("Cassette Robot sensor found cassette on blade 2");
  445. return false;
  446. }
  447. if (isAfterPick && !_cassetteRobotModule.CarrierRobotDevice.IsWaferPresenceOnBlade2)
  448. {
  449. //_cassetteRobotModule.RobotSensorNotFoundCassetteOnBladeAfterPickAlarm.Description = "Cassette Robot sensor no cassette on blade 2";
  450. _cassetteRobotModule.RobotSensorNotFoundCassetteOnBladeAfterPickAlarm.Set("Cassette Robot sensor no cassette on blade 2");
  451. return false;
  452. }
  453. }
  454. return true;
  455. });
  456. if (ret.Item1)
  457. {
  458. if (ret.Item2 == Result.FAIL)
  459. {
  460. //_cassetteRobotModule.CheckCassetteInformationFailAlarm.Description = $"check cassette info failed.";
  461. _cassetteRobotModule.CheckCassetteInformationFailAlarm.Set($"check cassette info failed.");
  462. throw (new RoutineFaildException());
  463. }
  464. else
  465. throw (new RoutineBreakException());
  466. }
  467. }
  468. private void CheckBeforePick(int id, ModuleName source, int slot, Hand blade)
  469. {
  470. Tuple<bool, Result> ret = Execute(id, () =>
  471. {
  472. Notify($"Check pick from {source} condition");
  473. string reason = string.Empty;
  474. if (_cassetteRobotModule.CarrierRobotDevice.IsError)
  475. {
  476. _cassetteRobotModule.PickCassetteFailAlarm.Set($"pick from {source} failed for robot error, error code={_cassetteRobotModule.CarrierRobotDevice.ErrorCode}");
  477. return false;
  478. }
  479. if (!_cassetteRobotModule.CarrierRobotDevice.IsReady())
  480. {
  481. _cassetteRobotModule.PickCassetteFailAlarm.Set($"pick from {source} failed for robot isn't Ready");
  482. return false;
  483. }
  484. if (!CarrierManager.Instance.CheckHasCarrier(_source, 0))
  485. {
  486. _cassetteRobotModule.PickCassetteFailAlarm.Set($"pick from {_source} failed for pod is not present");
  487. return false;
  488. }
  489. if (blade == Hand.Blade1)
  490. {
  491. if (!CarrierManager.Instance.CheckHasCarrier(source, 0))
  492. {
  493. _cassetteRobotModule.PickCassetteFailAlarm.Set($"pick from {source} failed for {source} no carrier");
  494. return false;
  495. }
  496. if (!CarrierManager.Instance.CheckNoCarrier(Module, 0))
  497. {
  498. _cassetteRobotModule.PickCassetteFailAlarm.Set($"pick from {source} failed for blade has carrier");
  499. return false;
  500. }
  501. }
  502. else if (blade == Hand.Blade2)
  503. {
  504. if (!CarrierManager.Instance.CheckHasCarrier(source, 0))
  505. {
  506. _cassetteRobotModule.PickCassetteFailAlarm.Set($"pick from {source} failed for {source} no carrier");
  507. return false;
  508. }
  509. if (!CarrierManager.Instance.CheckNoCarrier(Module, 0))
  510. {
  511. _cassetteRobotModule.PickCassetteFailAlarm.Set($"pick from {source} failed for blade has carrier");
  512. return false;
  513. }
  514. }
  515. else
  516. {
  517. if (!CarrierManager.Instance.CheckHasCarrier(source, 0))
  518. {
  519. _cassetteRobotModule.PickCassetteFailAlarm.Set($"pick from {source} failed for {source} no carrier");
  520. return false;
  521. }
  522. if (!CarrierManager.Instance.CheckNoCarrier(Module, 0))
  523. {
  524. _cassetteRobotModule.PickCassetteFailAlarm.Set($"pick from {source} failed for blade has carrier");
  525. return false;
  526. }
  527. }
  528. return true;
  529. });
  530. if (ret.Item1)
  531. {
  532. if (ret.Item2 == Result.FAIL)
  533. {
  534. throw (new RoutineFaildException());
  535. }
  536. }
  537. _needStartCheck = false;
  538. }
  539. private void Goto(int id, ModuleName target, int slot, Hand hand, bool isPickReady, int timeout)
  540. {
  541. _routineStep = (RoutineStep)Enum.Parse(typeof(RoutineStep), id.ToString());
  542. Tuple<bool, Result> ret = ExecuteAndWait(id, () =>
  543. {
  544. Notify($"Send goto to {target} command to robot device");
  545. string reason;
  546. _cassetteRobotModule.RobotGoto(target, slot, hand, isPickReady, out reason);
  547. return true;
  548. }, () =>
  549. {
  550. return true;
  551. }, timeout * 1000);
  552. if (ret.Item1)
  553. {
  554. if (ret.Item2 == Result.FAIL)
  555. {
  556. _cassetteRobotModule.GotoFailAlarm.Set($"goto to {target} failed for robot error, error code={_cassetteRobotModule.CarrierRobotDevice.ErrorCode}");
  557. throw (new RoutineFaildException());
  558. }
  559. else if (ret.Item2 == Result.TIMEOUT) //timeout
  560. {
  561. _cassetteRobotModule.GotoTimeoutAlarm.Set($"timeout over {timeout} seconds");
  562. throw (new RoutineFaildException());
  563. }
  564. else
  565. throw (new RoutineBreakException());
  566. }
  567. }
  568. private void CheckGotoFinish(int id, ModuleName target, int timeout)
  569. {
  570. Tuple<bool, Result> ret = ExecuteAndWait(id, () =>
  571. {
  572. Notify($"Check goto to {target} command finish");
  573. return true;
  574. }, () =>
  575. {
  576. if (_cassetteRobotModule.CarrierRobotDevice.IsError)
  577. return null;
  578. if (_cassetteRobotModule.CarrierRobotDevice.IsReady() && !_cassetteRobotModule.CarrierRobotDevice.IsError)
  579. {
  580. return true;
  581. }
  582. return false;
  583. }, timeout * 1000);
  584. if (ret.Item1)
  585. {
  586. if (ret.Item2 == Result.FAIL)
  587. {
  588. _cassetteRobotModule.GotoFailAlarm.Set($"goto to {target} failed for robot error, error code={_cassetteRobotModule.CarrierRobotDevice.ErrorCode}");
  589. throw (new RoutineFaildException());
  590. }
  591. else if (ret.Item2 == Result.TIMEOUT) //timeout
  592. {
  593. _cassetteRobotModule.GotoTimeoutAlarm.Set($"timeout over {timeout} seconds");
  594. throw (new RoutineFaildException());
  595. }
  596. else
  597. throw (new RoutineBreakException());
  598. }
  599. }
  600. private void SaferDoorOpen(int id, bool isOpen, int timeout)
  601. {
  602. Tuple<bool, Result> ret = ExecuteAndWait(id, () =>
  603. {
  604. Notify($"Shutter Door {(isOpen ? "Open" : "Close")}");
  605. if (isOpen)
  606. _cassetteRobotModule.DoorDevice.Open();
  607. else
  608. _cassetteRobotModule.DoorDevice.Close();
  609. if (isOpen)
  610. (Singleton<EquipmentManager>.Instance.Modules[_source] as LoadPortModule)?.LPDevice.Unclamp(out _);
  611. return true;
  612. }, () =>
  613. {
  614. return isOpen ? _cassetteRobotModule.DoorDevice.OpenCloseStatus == Devices.DeviceStatus.Open && (Singleton<EquipmentManager>.Instance.Modules[_source] as LoadPortModule).IsReleased : _cassetteRobotModule.DoorDevice.OpenCloseStatus == Devices.DeviceStatus.Close;
  615. }, timeout * 1000);
  616. if (ret.Item1)
  617. {
  618. if (ret.Item2 == Result.FAIL)
  619. {
  620. throw new RoutineFaildException();
  621. }
  622. else if (ret.Item2 == Result.TIMEOUT) //timeout
  623. {
  624. if (isOpen)
  625. _cassetteRobotModule.ShutterOpenTimeoutAlarm.Set($"timeout over {timeout} seconds");
  626. else
  627. _cassetteRobotModule.ShutterCloseTimeoutAlarm.Set($"timeout over {timeout} seconds");
  628. throw (new RoutineFaildException());
  629. }
  630. else
  631. throw new RoutineBreakException();
  632. }
  633. }
  634. }
  635. }