CarrierLoad.cs 32 KB

123456789101112131415161718192021222324252627282930313233343536373839404142434445464748495051525354555657585960616263646566676869707172737475767778798081828384858687888990919293949596979899100101102103104105106107108109110111112113114115116117118119120121122123124125126127128129130131132133134135136137138139140141142143144145146147148149150151152153154155156157158159160161162163164165166167168169170171172173174175176177178179180181182183184185186187188189190191192193194195196197198199200201202203204205206207208209210211212213214215216217218219220221222223224225226227228229230231232233234235236237238239240241242243244245246247248249250251252253254255256257258259260261262263264265266267268269270271272273274275276277278279280281282283284285286287288289290291292293294295296297298299300301302303304305306307308309310311312313314315316317318319320321322323324325326327328329330331332333334335336337338339340341342343344345346347348349350351352353354355356357358359360361362363364365366367368369370371372373374375376377378379380381382383384385386387388389390391392393394395396397398399400401402403404405406407408409410411412413414415416417418419420421422423424425426427428429430431432433434435436437438439440441442443444445446447448449450451452453454455456457458459460461462463464465466467468469470471472473474475476477478479480481482483484485486487488489490491492493494495496497498499500501502503504505506507508509510511512513514515516517518519520521522523524525526527528529530531532533534535536537538539540541542543544545546547548549550551552553554555556557558559560561562563564565566567568569570571572573574575576577578579580581582583584585586587588589590591592593594595596597598599600601602603604605606607608609610611612613614615616617618619620621622623624625626627628629630631632633634635636637638639640641642643644645646647648649650651652653654655656657658659660661662663664665666667668669670671672673674675676677678679680681682683684685686687688689690691692693694695696697698699700701702703704705706707708709710711712713714715716717718719720
  1. using Aitex.Core.RT.Routine;
  2. using Aitex.Core.RT.SCCore;
  3. using Aitex.Core.Util;
  4. using Aitex.Sorter.Common;
  5. using MECF.Framework.Common.Equipment;
  6. using MECF.Framework.Common.Schedulers;
  7. using MECF.Framework.Common.SubstrateTrackings;
  8. using MECF.Framework.RT.EquipmentLibrary.LogicUnits;
  9. using System;
  10. using System.Collections.Generic;
  11. using FurnaceRT.Equipments.FIMSs;
  12. using FurnaceRT.Equipments.LPs;
  13. using FurnaceRT.Equipments.Stockers;
  14. using FurnaceRT.Equipments.Systems;
  15. using FurnaceRT.Equipments.WaferRobots;
  16. using static FurnaceRT.Equipments.FIMSs.FIMSModule;
  17. namespace FurnaceRT.Equipments.CarrierRobots
  18. {
  19. public class CarrierLoad : ModuleRoutine, IRoutine
  20. {
  21. enum RoutineStep
  22. {
  23. Pick,
  24. DoorOpen,
  25. DoorClose,
  26. RobotRequestCassettePresent,
  27. CheckCassetteInfoByRobotSensor,
  28. ReadCarrierID,
  29. CheckCarrierID,
  30. CheckBeforePick,
  31. SetRobotActionCommand,
  32. Goto,
  33. CheckGotoFinish,
  34. }
  35. private CarrierRobotModule _cassetteRobotModule;
  36. private ModuleName _source;
  37. private ModuleName _destinationStocker;
  38. private int _sourceSlot;
  39. private Hand _blade;
  40. private int _timeout = 0;
  41. private RD_TRIG _holdTrig = new RD_TRIG();
  42. private R_TRIG _emergencyStopTrig = new R_TRIG();
  43. private R_TRIG _pauseTrig = new R_TRIG();
  44. private R_TRIG _resumeTrig = new R_TRIG();
  45. private RoutineStep _routineStep;
  46. private double _durationTime = 0;
  47. private bool _isHasAlarm = false;
  48. private bool _needStartCheck = true;
  49. private CarrierType _carrierType;
  50. private string _reservedCarrierId;
  51. private string _readCarrierId;
  52. private string _currentCarrierId;
  53. private string _bypassReadID;
  54. private string _carrierIDReaderSetting;
  55. public CarrierLoad(CarrierRobotModule cassetteModule)
  56. {
  57. _cassetteRobotModule = cassetteModule;
  58. Module = cassetteModule.Module;
  59. Name = "Load";
  60. }
  61. public void Init(ModuleName source, int sourceSlot, Hand blade, ModuleName destinationStocker,
  62. CarrierType carrierType, string reservedCarrierId, bool isHasAlarm)
  63. {
  64. _source = source;
  65. _sourceSlot = sourceSlot;
  66. _blade = blade;
  67. _destinationStocker = destinationStocker;
  68. _carrierType = carrierType;
  69. _reservedCarrierId = reservedCarrierId;
  70. var para = new List<object> { _source, _sourceSlot, _blade, destinationStocker, _carrierType, _reservedCarrierId, true };
  71. _cassetteRobotModule.PickCassetteTimeoutAlarm.RetryMessage = (int)CarrierRobotModule.MSG.LoadRetry;
  72. _cassetteRobotModule.PickCassetteTimeoutAlarm.RetryMessageParas = para.ToArray();
  73. _cassetteRobotModule.PickCassetteFailAlarm.RetryMessage = (int)CarrierRobotModule.MSG.LoadRetry;
  74. _cassetteRobotModule.PickCassetteFailAlarm.RetryMessageParas = para.ToArray();
  75. _cassetteRobotModule.RequestCassettePresentFailAlarm.RetryMessage = (int)CarrierRobotModule.MSG.LoadRetry;
  76. _cassetteRobotModule.RequestCassettePresentFailAlarm.RetryMessageParas = para.ToArray();
  77. _cassetteRobotModule.RequestCassettePresentTimeoutAlarm.RetryMessage = (int)CarrierRobotModule.MSG.LoadRetry;
  78. _cassetteRobotModule.RequestCassettePresentTimeoutAlarm.RetryMessageParas = para.ToArray();
  79. _cassetteRobotModule.SetStageValveFailAlarm.RetryMessage = (int)CarrierRobotModule.MSG.LoadRetry;
  80. _cassetteRobotModule.SetStageValveFailAlarm.RetryMessageParas = para.ToArray();
  81. _cassetteRobotModule.SetStageValveTimeout.RetryMessage = (int)CarrierRobotModule.MSG.LoadRetry;
  82. _cassetteRobotModule.SetStageValveTimeout.RetryMessageParas = para.ToArray();
  83. _cassetteRobotModule.RobotHasError.RetryMessage = (int)CarrierRobotModule.MSG.LoadRetry;
  84. _cassetteRobotModule.RobotHasError.RetryMessageParas = para.ToArray();
  85. _cassetteRobotModule.ShutterOpenTimeoutAlarm.RetryMessage = (int)CarrierRobotModule.MSG.LoadRetry;
  86. _cassetteRobotModule.ShutterOpenTimeoutAlarm.RetryMessageParas = para.ToArray();
  87. _cassetteRobotModule.ShutterCloseTimeoutAlarm.RetryMessage = (int)CarrierRobotModule.MSG.LoadRetry;
  88. _cassetteRobotModule.ShutterCloseTimeoutAlarm.RetryMessageParas = para.ToArray();
  89. _isHasAlarm = isHasAlarm;
  90. if (!_isHasAlarm)
  91. _needStartCheck = true;
  92. }
  93. public Result Start(params object[] objs)
  94. {
  95. // 抛出过alarm就不reset
  96. if (!_isHasAlarm)
  97. {
  98. Reset();
  99. }
  100. else
  101. {
  102. _historySteps.Remove((int)_routineStep);
  103. _isHasAlarm = false;
  104. ResetState();
  105. }
  106. _holdTrig.RST = true;
  107. _emergencyStopTrig.RST = true;
  108. _pauseTrig.RST = true;
  109. _resumeTrig.RST = true;
  110. _currentCarrierId = "";
  111. _timeout = SC.GetValue<int>($"{Module}.MotionTimeout");
  112. _bypassReadID = SC.GetStringValue($"LoadPort.{_source}.BypassReadID");
  113. _carrierIDReaderSetting = SC.GetStringValue($"LoadPort.{_source}.CarrierIDReaderSetting");
  114. if (_carrierIDReaderSetting == "UseReservedID")
  115. _currentCarrierId = _reservedCarrierId;
  116. if ((Singleton<EquipmentManager>.Instance.Modules[_source] as LoadPortModule).LPDevice.IsFoupPresent)
  117. {
  118. if (!CarrierManager.Instance.CheckNoCarrier(_source.ToString(), 0))
  119. CarrierManager.Instance.DeleteCarrier(_source.ToString());
  120. CarrierManager.Instance.CreateCarrier(_source.ToString(), _carrierType, _destinationStocker.ToString());
  121. }
  122. if (_needStartCheck)
  123. {
  124. if (!Singleton<EquipmentManager>.Instance.Modules.ContainsKey(_source))
  125. {
  126. _cassetteRobotModule.PlaceCassetteFailAlarm.Set($"pick from {_source} failed for not install");
  127. return Result.FAIL;
  128. }
  129. if (ModuleHelper.IsLoadPort(_source))
  130. {
  131. var lpModule = Singleton<EquipmentManager>.Instance.Modules[_source] as LoadPortModule;
  132. if (lpModule == null)
  133. {
  134. _cassetteRobotModule.PickCassetteFailAlarm.Set($"pick from {_source} failed for not install");
  135. return Result.FAIL;
  136. }
  137. if (lpModule != null && !lpModule.CheckReadyForTransfer(ModuleHelper.Converter(Module), _blade, _sourceSlot, EnumTransferType.Pick, out string reason))
  138. {
  139. _cassetteRobotModule.PickCassetteFailAlarm.Set($"pick from {_source} failed for {reason}");
  140. return Result.FAIL;
  141. }
  142. }
  143. else if (_source == ModuleName.FIMS1 || _source == ModuleName.FIMS2)
  144. {
  145. var fims = Singleton<EquipmentManager>.Instance.Modules[_source] as FIMSModule;
  146. if (fims == null)
  147. {
  148. _cassetteRobotModule.PickCassetteFailAlarm.Set($"pick from {_source} failed for not install");
  149. return Result.FAIL;
  150. }
  151. if (fims != null && !fims.CheckReadyForTransfer(ModuleHelper.Converter(Module), _blade, _sourceSlot, EnumTransferType.Pick, out string reason))
  152. {
  153. _cassetteRobotModule.PickCassetteFailAlarm.Set($"pick from {_source} failed for {reason}");
  154. return Result.FAIL;
  155. }
  156. if (!SC.GetValue<bool>("System.IsSimulatorMode"))
  157. {
  158. if (fims != null && !fims.IsFoupExist)
  159. {
  160. _cassetteRobotModule.PickCassetteFailAlarm.Set($"pick from {_source} failed for cassette is not present");
  161. return Result.FAIL;
  162. }
  163. }
  164. }
  165. else
  166. {
  167. var stockerModule = Singleton<EquipmentManager>.Instance.Modules[_source] as StockerModule;
  168. if (stockerModule == null)
  169. {
  170. _cassetteRobotModule.PickCassetteFailAlarm.Set($"pick from {_source} failed for not install");
  171. return Result.FAIL;
  172. }
  173. if (!SC.GetValue<bool>("System.IsSimulatorMode"))
  174. {
  175. if (stockerModule != null && !stockerModule.IsFoupPresent)
  176. {
  177. _cassetteRobotModule.PickCassetteFailAlarm.Set($"pick from {_source} failed for cassette is not present");
  178. return Result.FAIL;
  179. }
  180. }
  181. }
  182. if (SC.GetValue<bool>("System.IsSimulatorMode"))
  183. {
  184. if (!CarrierManager.Instance.CheckNoCarrier(ModuleName.CarrierRobot, 0))
  185. {
  186. _cassetteRobotModule.BladeCassettePresentWarning.Set($"{ModuleName.CarrierRobot} cassette present");
  187. return Result.FAIL;
  188. }
  189. }
  190. else
  191. {
  192. if (_cassetteRobotModule.CarrierRobotDevice.IsWaferPresenceOnBlade1 || !CarrierManager.Instance.CheckNoCarrier(ModuleName.CarrierRobot, 0))
  193. {
  194. _cassetteRobotModule.BladeCassettePresentWarning.Set($"{ModuleName.CarrierRobot} cassette present");
  195. return Result.FAIL;
  196. }
  197. }
  198. if (!CarrierManager.Instance.CheckHasCarrier(_source, 0))
  199. {
  200. _cassetteRobotModule.PickCassetteFailAlarm.Set($"pick from {_source} failed for cassette is not present");
  201. return Result.FAIL;
  202. }
  203. }
  204. Notify($"Start");
  205. return Result.RUN;
  206. }
  207. public void Abort()
  208. {
  209. _cassetteRobotModule.ResetRobotActionCommand();
  210. _cassetteRobotModule.Stop();
  211. (Singleton<EquipmentManager>.Instance.Modules[_source] as ITransferTarget)?.NoteTransferStop(ModuleHelper.Converter(_cassetteRobotModule.Module), _blade, _sourceSlot, EnumTransferType.Pick);
  212. }
  213. public override Result Monitor()
  214. {
  215. try
  216. {
  217. PauseRountine(_cassetteRobotModule.CarrierRobotDevice.IsPause);
  218. if (_cassetteRobotModule.CarrierRobotDevice.IsPause)
  219. return Result.RUN;
  220. CheckBeforePick((int)RoutineStep.CheckBeforePick, _source, _sourceSlot, _blade);
  221. //if (_carrierIDReaderSetting == "UseReadID" || _carrierIDReaderSetting == "ReadWithReservedIDCheck")
  222. // ReadCarrierID((int)RoutineStep.ReadCarrierID, _timeout);
  223. //if (_carrierIDReaderSetting == "ReadWithReservedIDCheck")
  224. // CheckCarrierID((int)RoutineStep.CheckCarrierID);
  225. Goto((int)RoutineStep.Goto, _source, _sourceSlot, _blade, true, _timeout);
  226. if (_source == ModuleName.LP1 || _source == ModuleName.LP2)
  227. SaferDoorOpen((int)RoutineStep.DoorOpen, true, _timeout);
  228. CheckGotoFinish((int)RoutineStep.CheckGotoFinish, _source, _timeout);
  229. if (_cassetteRobotModule.TrigActionCommand != null)
  230. SetRobotActionCommand((int)RoutineStep.SetRobotActionCommand, _source, _timeout);
  231. Pick((int)RoutineStep.Pick, _source, _sourceSlot, _blade, _carrierType, _currentCarrierId, _destinationStocker, _timeout);
  232. if (_source == ModuleName.LP1 || _source == ModuleName.LP2)
  233. SaferDoorOpen((int)RoutineStep.DoorClose, false, _timeout);
  234. RobotRequestCassettePresent((int)RoutineStep.RobotRequestCassettePresent, _blade, _timeout);
  235. CheckCassetteInfoByRobotSensor((int)RoutineStep.CheckCassetteInfoByRobotSensor, _blade, true);
  236. }
  237. catch (RoutineBreakException)
  238. {
  239. return Result.RUN;
  240. }
  241. catch (RoutineFaildException ex)
  242. {
  243. _cassetteRobotModule.ResetRobotActionCommand();
  244. (Singleton<EquipmentManager>.Instance.Modules[_source] as ITransferTarget)?.NoteTransferStop(ModuleHelper.Converter(_cassetteRobotModule.Module), _blade, _sourceSlot, EnumTransferType.Pick);
  245. return Result.FAIL;
  246. }
  247. _cassetteRobotModule.ResetRobotActionCommand();
  248. (Singleton<EquipmentManager>.Instance.Modules[_source] as ITransferTarget)?.NoteTransferStop(ModuleHelper.Converter(_cassetteRobotModule.Module), _blade, _sourceSlot, EnumTransferType.Pick);
  249. Notify("Finished");
  250. return Result.DONE;
  251. }
  252. private void SetRobotActionCommand(int id, ModuleName source, int timeout)
  253. {
  254. _routineStep = (RoutineStep)Enum.Parse(typeof(RoutineStep), id.ToString());
  255. Tuple<bool, Result> ret = ExecuteAndWait(id, () =>
  256. {
  257. Notify($"Set robot action command target position {source}");
  258. _cassetteRobotModule.SetRobotActionCommand(source, EnumTransferType.Pick);
  259. return true;
  260. }, () =>
  261. {
  262. return _cassetteRobotModule.CheckRobotActionCommand(source, EnumTransferType.Pick);
  263. }, timeout * 1000);
  264. if (ret.Item1)
  265. {
  266. if (ret.Item2 == Result.FAIL)
  267. {
  268. _cassetteRobotModule.PickCassetteFailAlarm.Set($"pick from {source} failed for robot action command interlock");
  269. throw (new RoutineFaildException());
  270. }
  271. else if (ret.Item2 == Result.TIMEOUT) //timeout
  272. {
  273. _cassetteRobotModule.PickCassetteTimeoutAlarm.Set($"timeout over {timeout} seconds");
  274. throw (new RoutineFaildException());
  275. }
  276. else
  277. throw (new RoutineBreakException());
  278. }
  279. }
  280. private void ReadCarrierID(int id, int timeout)
  281. {
  282. _routineStep = (RoutineStep)Enum.Parse(typeof(RoutineStep), id.ToString());
  283. Tuple<bool, Result> ret = ExecuteAndWait(id, () =>
  284. {
  285. Notify($"Read carrier ID");
  286. string reason;
  287. return true;
  288. }, () =>
  289. {
  290. _readCarrierId = "123";//Carrier ID reader读取到的值
  291. _currentCarrierId = "123";//Carrier ID reader读取到的值
  292. return true;
  293. }, timeout * 1000);
  294. if (ret.Item1)
  295. {
  296. if (ret.Item2 == Result.FAIL)
  297. {
  298. throw (new RoutineFaildException());
  299. }
  300. else if (ret.Item2 == Result.TIMEOUT) //timeout
  301. {
  302. //_cassetteRobotModule.SetStageValveTimeout.Description = $"timeout over {timeout} seconds";
  303. _cassetteRobotModule.SetStageValveTimeout.Set($"timeout over {timeout} seconds");
  304. throw (new RoutineFaildException());
  305. }
  306. else
  307. throw (new RoutineBreakException());
  308. }
  309. }
  310. private void Pick(int id, ModuleName source, int slot, Hand hand, CarrierType carrierType, string lotId, ModuleName carrierInternalModuleName, int timeout)
  311. {
  312. _routineStep = (RoutineStep)Enum.Parse(typeof(RoutineStep), id.ToString());
  313. Tuple<bool, Result> ret = ExecuteAndWait(id, () =>
  314. {
  315. Notify($"Send pick from {source} command to robot device");
  316. string reason;
  317. if (!CarrierManager.Instance.CheckNoCarrier(source.ToString(), 0))
  318. CarrierManager.Instance.DeleteCarrier(source.ToString());//要保留
  319. CarrierManager.Instance.CreateCarrier(source.ToString(), carrierType, carrierInternalModuleName.ToString());
  320. CarrierManager.Instance.GetCarrier(source.ToString(), 0).IsMapOK = false;
  321. CarrierManager.Instance.GetCarrier(source.ToString(), 0).IsMapped = false;
  322. (Singleton<EquipmentManager>.Instance.Modules[source] as ITransferTarget)?.NoteTransferStart(ModuleHelper.Converter(_cassetteRobotModule.Module), hand, slot, EnumTransferType.Pick);
  323. if (!_cassetteRobotModule.RobotPick(source, slot, hand, out reason))
  324. {
  325. //_cassetteRobotModule.PickCassetteFailAlarm.Description = reason;
  326. _cassetteRobotModule.PickCassetteFailAlarm.Set(reason);
  327. return false;
  328. }
  329. return true;
  330. }, () =>
  331. {
  332. if (_cassetteRobotModule.CarrierRobotDevice.IsReady() && !_cassetteRobotModule.CarrierRobotDevice.IsError)
  333. {
  334. var lp = Singleton<EquipmentManager>.Instance.Modules[_source] as LoadPortModule;
  335. var readCarrierId = lp != null ? lp.CarrierId : lotId;
  336. CarrierManager.Instance.UpdateCarrierId(ModuleName.CarrierRobot.ToString(), readCarrierId);
  337. return true;
  338. }
  339. return false;
  340. }, timeout * 1000);
  341. if (ret.Item1)
  342. {
  343. if (ret.Item2 == Result.FAIL)
  344. {
  345. //_cassetteRobotModule.PickCassetteFailAlarm.Description = $"{_cassetteRobotModule.CassetteRobotDevice.ErrorCode}";
  346. _cassetteRobotModule.PickCassetteFailAlarm.Set($"pick from {source} failed for robot error, error code={_cassetteRobotModule.CarrierRobotDevice.ErrorCode}");
  347. throw (new RoutineFaildException());
  348. }
  349. else if (ret.Item2 == Result.TIMEOUT) //timeout
  350. {
  351. //_cassetteRobotModule.PickCassetteTimeoutAlarm.Description = $"timeout over {timeout} seconds";
  352. _cassetteRobotModule.PickCassetteTimeoutAlarm.Set($"timeout over {timeout} seconds");
  353. throw (new RoutineFaildException());
  354. }
  355. else
  356. throw (new RoutineBreakException());
  357. }
  358. }
  359. private void RobotRequestCassettePresent(int id, Hand hand, int timeout)
  360. {
  361. Tuple<bool, Result> ret = ExecuteAndWait(id, () =>
  362. {
  363. Notify("Request cassette present");
  364. if (!_cassetteRobotModule.RequestCassettePresent(hand, out string reason))
  365. {
  366. //_cassetteRobotModule.RequestCassettePresentFailAlarm.Description = reason;
  367. _cassetteRobotModule.RequestCassettePresentFailAlarm.Set(reason);
  368. return false;
  369. }
  370. return true;
  371. }, () =>
  372. {
  373. if (_cassetteRobotModule.CarrierRobotDevice.IsReady() && !_cassetteRobotModule.CarrierRobotDevice.IsError)
  374. {
  375. return true;
  376. }
  377. return false;
  378. }, timeout * 1000);
  379. if (ret.Item1)
  380. {
  381. if (ret.Item2 == Result.FAIL)
  382. {
  383. throw (new RoutineFaildException());
  384. }
  385. else if (ret.Item2 == Result.TIMEOUT) //timeout
  386. {
  387. //_cassetteRobotModule.RequestCassettePresentTimeoutAlarm.Description = $"timeout over {timeout} seconds";
  388. _cassetteRobotModule.RequestCassettePresentTimeoutAlarm.Set($"timeout over {timeout} seconds");
  389. throw (new RoutineFaildException());
  390. }
  391. else
  392. throw (new RoutineBreakException());
  393. }
  394. }
  395. private void CheckCassetteInfoByRobotSensor(int id, Hand hand, bool isAfterPick)
  396. {
  397. Tuple<bool, Result> ret = Execute(id, () =>
  398. {
  399. Notify($"Check cassette info by robot RQ present");
  400. if (SC.GetValue<bool>("System.IsSimulatorMode"))
  401. return true;
  402. if (hand == Hand.Blade1 || hand == Hand.Both)
  403. {
  404. if (!isAfterPick && _cassetteRobotModule.CarrierRobotDevice.IsWaferPresenceOnBlade1)
  405. {
  406. //_cassetteRobotModule.RobotSensorFoundCassetteOnBladeAfterPlaceAlarm.Description = "Cassette Robot sensor found cassette on blade 1";
  407. _cassetteRobotModule.RobotSensorFoundCassetteOnBladeAfterPlaceAlarm.Set("Cassette Robot sensor found cassette on blade 1");
  408. return false;
  409. }
  410. if (isAfterPick && !_cassetteRobotModule.CarrierRobotDevice.IsWaferPresenceOnBlade1)
  411. {
  412. //_cassetteRobotModule.RobotSensorNotFoundCassetteOnBladeAfterPickAlarm.Description = "Cassette Robot sensor no cassette on blade 1";
  413. _cassetteRobotModule.RobotSensorNotFoundCassetteOnBladeAfterPickAlarm.Set("Cassette Robot sensor no cassette on blade 1");
  414. return false;
  415. }
  416. }
  417. if (hand == Hand.Blade2 || hand == Hand.Both)
  418. {
  419. if (!isAfterPick && _cassetteRobotModule.CarrierRobotDevice.IsWaferPresenceOnBlade2)
  420. {
  421. //_cassetteRobotModule.RobotSensorFoundCassetteOnBladeAfterPlaceAlarm.Description = "Cassette Robot sensor found cassette on blade 2";
  422. _cassetteRobotModule.RobotSensorFoundCassetteOnBladeAfterPlaceAlarm.Set("Cassette Robot sensor found cassette on blade 2");
  423. return false;
  424. }
  425. if (isAfterPick && !_cassetteRobotModule.CarrierRobotDevice.IsWaferPresenceOnBlade2)
  426. {
  427. //_cassetteRobotModule.RobotSensorNotFoundCassetteOnBladeAfterPickAlarm.Description = "Cassette Robot sensor no cassette on blade 2";
  428. _cassetteRobotModule.RobotSensorNotFoundCassetteOnBladeAfterPickAlarm.Set("Cassette Robot sensor no cassette on blade 2");
  429. return false;
  430. }
  431. }
  432. return true;
  433. });
  434. if (ret.Item1)
  435. {
  436. if (ret.Item2 == Result.FAIL)
  437. {
  438. //_cassetteRobotModule.CheckCassetteInformationFailAlarm.Description = $"check cassette info failed.";
  439. _cassetteRobotModule.CheckCassetteInformationFailAlarm.Set($"check cassette info failed.");
  440. throw (new RoutineFaildException());
  441. }
  442. else
  443. throw (new RoutineBreakException());
  444. }
  445. }
  446. private void CheckBeforePick(int id, ModuleName source, int slot, Hand blade)
  447. {
  448. Tuple<bool, Result> ret = Execute(id, () =>
  449. {
  450. Notify($"Check pick from {source} condition");
  451. string reason = string.Empty;
  452. if (_cassetteRobotModule.CarrierRobotDevice.IsError)
  453. {
  454. _cassetteRobotModule.PickCassetteFailAlarm.Set($"pick from {source} failed for robot error, error code={_cassetteRobotModule.CarrierRobotDevice.ErrorCode}");
  455. return false;
  456. }
  457. if (!_cassetteRobotModule.CarrierRobotDevice.IsReady())
  458. {
  459. _cassetteRobotModule.PickCassetteFailAlarm.Set($"pick from {source} failed for robot isn't Ready");
  460. return false;
  461. }
  462. if (!CarrierManager.Instance.CheckHasCarrier(_source, 0))
  463. {
  464. _cassetteRobotModule.PickCassetteFailAlarm.Set($"pick from {_source} failed for pod is not present");
  465. return false;
  466. }
  467. if (blade == Hand.Blade1)
  468. {
  469. if (!CarrierManager.Instance.CheckHasCarrier(source, 0))
  470. {
  471. _cassetteRobotModule.PickCassetteFailAlarm.Set($"pick from {source} failed for {source} no carrrier");
  472. return false;
  473. }
  474. if (!CarrierManager.Instance.CheckNoCarrier(Module, 0))
  475. {
  476. _cassetteRobotModule.PickCassetteFailAlarm.Set($"pick from {source} failed for blade has carrier");
  477. return false;
  478. }
  479. }
  480. else if (blade == Hand.Blade2)
  481. {
  482. if (!CarrierManager.Instance.CheckHasCarrier(source, 0))
  483. {
  484. _cassetteRobotModule.PickCassetteFailAlarm.Set($"pick from {source} failed for {source} no carrier");
  485. return false;
  486. }
  487. if (!CarrierManager.Instance.CheckNoCarrier(Module, 0))
  488. {
  489. _cassetteRobotModule.PickCassetteFailAlarm.Set($"pick from {source} failed for blade has carrier");
  490. return false;
  491. }
  492. }
  493. else
  494. {
  495. if (!CarrierManager.Instance.CheckHasCarrier(source, 0))
  496. {
  497. _cassetteRobotModule.PickCassetteFailAlarm.Set($"pick from {source} failed for {source} no carrier");
  498. return false;
  499. }
  500. if (!CarrierManager.Instance.CheckNoCarrier(Module, 0))
  501. {
  502. _cassetteRobotModule.PickCassetteFailAlarm.Set($"pick from {source} failed for blade has carrier");
  503. return false;
  504. }
  505. }
  506. return true;
  507. });
  508. if (ret.Item1)
  509. {
  510. if (ret.Item2 == Result.FAIL)
  511. {
  512. throw (new RoutineFaildException());
  513. }
  514. }
  515. _needStartCheck = false;
  516. }
  517. private void CheckCarrierID(int id)
  518. {
  519. Tuple<bool, Result> ret = Execute(id, () =>
  520. {
  521. Notify($"Check carrier ID");
  522. string reason = string.Empty;
  523. if (_readCarrierId != _reservedCarrierId)
  524. {
  525. _cassetteRobotModule.CheckCarrierIDFailAlarm.Set($"read id={_readCarrierId}, reserved id={_reservedCarrierId}, mismatch");
  526. return false;
  527. }
  528. return true;
  529. });
  530. if (ret.Item1)
  531. {
  532. if (ret.Item2 == Result.FAIL)
  533. {
  534. throw (new RoutineFaildException());
  535. }
  536. }
  537. _needStartCheck = false;
  538. }
  539. private void Goto(int id, ModuleName target, int slot, Hand hand, bool isPickReady, int timeout)
  540. {
  541. _routineStep = (RoutineStep)Enum.Parse(typeof(RoutineStep), id.ToString());
  542. Tuple<bool, Result> ret = ExecuteAndWait(id, () =>
  543. {
  544. Notify($"Send goto to {target} command to robot device");
  545. string reason;
  546. _cassetteRobotModule.RobotGoto(target, slot, hand, isPickReady, out reason);
  547. return true;
  548. }, () =>
  549. {
  550. return true;
  551. }, timeout * 1000);
  552. if (ret.Item1)
  553. {
  554. if (ret.Item2 == Result.FAIL)
  555. {
  556. _cassetteRobotModule.GotoFailAlarm.Set($"goto to {target} failed for robot error, error code={_cassetteRobotModule.CarrierRobotDevice.ErrorCode}");
  557. throw (new RoutineFaildException());
  558. }
  559. else if (ret.Item2 == Result.TIMEOUT) //timeout
  560. {
  561. _cassetteRobotModule.GotoTimeoutAlarm.Set($"timeout over {timeout} seconds");
  562. throw (new RoutineFaildException());
  563. }
  564. else
  565. throw (new RoutineBreakException());
  566. }
  567. }
  568. private void CheckGotoFinish(int id, ModuleName target, int timeout)
  569. {
  570. Tuple<bool, Result> ret = ExecuteAndWait(id, () =>
  571. {
  572. Notify($"Check goto to {target} command finish");
  573. return true;
  574. }, () =>
  575. {
  576. if (_cassetteRobotModule.CarrierRobotDevice.IsError)
  577. return null;
  578. if (_cassetteRobotModule.CarrierRobotDevice.IsReady() && !_cassetteRobotModule.CarrierRobotDevice.IsError)
  579. {
  580. return true;
  581. }
  582. return false;
  583. }, timeout * 1000);
  584. if (ret.Item1)
  585. {
  586. if (ret.Item2 == Result.FAIL)
  587. {
  588. _cassetteRobotModule.GotoFailAlarm.Set($"goto to {target} failed for robot error, error code={_cassetteRobotModule.CarrierRobotDevice.ErrorCode}");
  589. throw (new RoutineFaildException());
  590. }
  591. else if (ret.Item2 == Result.TIMEOUT) //timeout
  592. {
  593. _cassetteRobotModule.GotoTimeoutAlarm.Set($"timeout over {timeout} seconds");
  594. throw (new RoutineFaildException());
  595. }
  596. else
  597. throw (new RoutineBreakException());
  598. }
  599. }
  600. private void SaferDoorOpen(int id, bool isOpen, int timeout)
  601. {
  602. Tuple<bool, Result> ret = ExecuteAndWait(id, () =>
  603. {
  604. Notify($"Shutter Door {(isOpen ? "Open" : "Close")}");
  605. if (isOpen)
  606. _cassetteRobotModule.DoorDevice.Open();
  607. else
  608. _cassetteRobotModule.DoorDevice.Close();
  609. if (isOpen)
  610. (Singleton<EquipmentManager>.Instance.Modules[_source] as LoadPortModule)?.LPDevice.Unclamp(out _);
  611. return true;
  612. }, () =>
  613. {
  614. return isOpen ? _cassetteRobotModule.DoorDevice.OpenCloseStatus == Devices.DeviceStatus.Open && (Singleton<EquipmentManager>.Instance.Modules[_source] as LoadPortModule).IsReleased : _cassetteRobotModule.DoorDevice.OpenCloseStatus == Devices.DeviceStatus.Close;
  615. }, timeout * 1000);
  616. if (ret.Item1)
  617. {
  618. if (ret.Item2 == Result.FAIL)
  619. {
  620. throw new RoutineFaildException();
  621. }
  622. else if (ret.Item2 == Result.TIMEOUT) //timeout
  623. {
  624. if (isOpen)
  625. _cassetteRobotModule.ShutterOpenTimeoutAlarm.Set($"timeout over {timeout} seconds");
  626. else
  627. _cassetteRobotModule.ShutterCloseTimeoutAlarm.Set($"timeout over {timeout} seconds");
  628. throw (new RoutineFaildException());
  629. }
  630. else
  631. throw new RoutineBreakException();
  632. }
  633. }
  634. }
  635. }