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- <?xml version="1.0" encoding="UTF-8"?>
- <Equipment xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance" xmlns:xsd="http://www.w3.org/2001/XMLSchema" persistence="false" schemaVersion="1.0.3" productInfo="Furnace">
- <Nameable id="Furnace" description="Furnace" locator="" alias="Furnace" make="Furnace" model="Furnace" softwareRev="1.0" />
- <GemConnection protocol="Hsms" defaultCommunicationState="Enabled" defaultControlState="Online" defaultOnlineSubState="Local" deviceId="0" multipleOpen="false" maxOpenTransactions="3">
- <HSMS connectionMode="Passive" linktestInterval="30" localIPAddress="127.0.0.1" localPortNumber="5000" remoteIPAddress="127.0.0.1" remotePortNumber="5001" T3Timeout="45" T5Timeout="10" T6Timeout="5" T7Timeout="10" T8Timeout="5" />
- <RS232 commPort="1" baudRate="9600" retry="3" t1="1" t2="10" t3="30" t4="10" />
- </GemConnection>
- <SecsItemFormats ackc5="Binary" ackc7="Binary" ackc7a="U1" ackc10="Binary" alid="U4" alcd="Binary" altx="Ascii" aled="Binary" attrid="Ascii" ccode="U2" ceid="U4" cpname="Ascii" dataid="U4" dsper="Ascii" errw7="Ascii" loc="Binary" mdln="Ascii" mid="Ascii" objid="Ascii" objspec="Ascii" objtype="Ascii" ppbody="Binary" ppid="Ascii" rcmd="Ascii" repgsz="U4" rptid="U4" seqnum="U2" softrev="Ascii" text="Ascii" tid="Binary" totsmp="U4" trid="U4" svid="U4" ecid="U4" ddid="U4" errcode="U1" opid="U1" length="U4" cmda="U1" ecmin="U4" ecmax="U4" ecdef="Ascii" idtyp="Binary" fnloc="U2" ffrot="U2" orloc="Binary" rpsel="U1" dutms="Ascii" xdies="U4" ydies="U4" rowct="U4" colct="U4" nulbc_binlt_bcequ="U1" prdct="U1" praxi="Binary" smpln="U4" mlcl="U8" refp="I2" />
- <Logger logLevel="Info" rolloverSize="10000000" maxBytes="100000" messageLengthLimit="1048576" />
- <Clock timeFormat="yymmddhhmmss" />
- <RemoteCommand allowLocalMode="false">
- <S2F21>
- <S2F21Command name="100" logicalName="START" description=" " />
- <S2F21Command name="101" logicalName="PAUSE" description=" " />
- <S2F21Command name="102" logicalName="STOP" description=" " />
- <S2F21Command name="103" logicalName="PP-SELECT" description=" " />
- <S2F21Command name="104" logicalName="RESUME" description=" " />
- <S2F21Command name="105" logicalName="ABORT" description=" " />
- </S2F21>
- <S2F41>
- <S2F41Command name="ReadCarrierID" logicalName="ReadCarrierID" description=" " />
- </S2F41>
- <S2F49>
- <S2F49Command name="GOREMOTE" logicalName="GOREMOTE" description="">
- </S2F49Command>
- <S2F49Command name="PP-SELECT" logicalName="PP-SELECT" description=" ">
- </S2F49Command>
- <S2F49Command name="START" logicalName="START" description=" ">
- </S2F49Command>
- <S2F49Command name="STOP" logicalName="STOP" description=" ">
- </S2F49Command>
- <S2F49Command name="ABORT" logicalName="ABORT" description=" ">
- </S2F49Command>
- <S2F49Command name="PAUSE" logicalName="PAUSE" description=" ">
- </S2F49Command>
- <S2F49Command name="RESUME" logicalName="RESUME" description=" ">
- </S2F49Command>
- </S2F49>
- </RemoteCommand>
- <StatusVariables>
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- <SVID id="2" valueType="List" logicalName="AlarmsSet" value="" eventTrigger="" units="" description="" isArray="false" />
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- <SVID id="12" valueType="Ascii" logicalName="SpoolStartTime" value="" eventTrigger="" units="" description="" isArray="false" />
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- <SVID id="14" valueType="Ascii" logicalName="SpoolSubstate" value="" eventTrigger="" units="" description="" isArray="false" />
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- <SVID id="10000031" valueType="Boolean" logicalName="IO.MF.DI_HeaterControllerOK" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="10000032" valueType="Boolean" logicalName="IO.MF.DI_HeaterEXHOK" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="10000033" valueType="Boolean" logicalName="IO.MF.DI_HeaterMCON" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="10000034" valueType="Boolean" logicalName="IO.MF.DI_HeaterPowerONSW" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="10000035" valueType="Boolean" logicalName="IO.MF.DI_HeaterTempOK" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="10000036" valueType="Boolean" logicalName="IO.MF.DI_HeaterTransTempOK" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="10000037" valueType="Boolean" logicalName="IO.MF.DI_HeaterWaterFlowOK" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="10000038" valueType="Boolean" logicalName="IO.MF.DI_HeaterWaterFlowOK1" value="" eventTrigger="" units="" description="" isArray="false" />
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- <SVID id="10000040" valueType="Boolean" logicalName="IO.MF.DI_HECMCON" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="10000041" valueType="Boolean" logicalName="IO.MF.DI_HECPowerONSW" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="10000042" valueType="Boolean" logicalName="IO.MF.DI_HECTempOK" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="10000043" valueType="Boolean" logicalName="IO.MF.DI_HECWaterLeakDetectOK" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="10000044" valueType="Boolean" logicalName="IO.MF.DI_HECWaterLevelOK" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="10000045" valueType="Boolean" logicalName="IO.MF.DI_HtRCUPowerON" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="10000046" valueType="Boolean" logicalName="IO.MF.DI_MFWaterFlowOK" value="" eventTrigger="" units="" description="" isArray="false" />
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- <SVID id="10000048" valueType="Boolean" logicalName="IO.MF.DI_NH3LeakOK" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="10000049" valueType="Boolean" logicalName="IO.MF.DI_PipinglineT_HTempOK" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="10000050" valueType="Boolean" logicalName="IO.MF.DI_PumpAlarm" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="10000051" valueType="Boolean" logicalName="IO.MF.DI_PumpExhaustPressureOK" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="10000052" valueType="Boolean" logicalName="IO.MF.DI_PumpN2OK" value="" eventTrigger="" units="" description="" isArray="false" />
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- <SVID id="10000082" valueType="Boolean" logicalName="IO.MF.DO_HeaterPowerONLamp" value="" eventTrigger="" units="" description="" isArray="false" />
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- <SVID id="10000084" valueType="Boolean" logicalName="IO.MF.DO_HECPowerONLamp" value="" eventTrigger="" units="" description="" isArray="false" />
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- <SVID id="10000090" valueType="Boolean" logicalName="IO.MF.DO_TowerFlash_RD" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="10000091" valueType="Boolean" logicalName="IO.MF.DO_TowerFlash_YL" value="" eventTrigger="" units="" description="" isArray="false" />
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- <SVID id="10001131" valueType="Boolean" logicalName="IO.PM1.DI_EXTIN2" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="10001132" valueType="Boolean" logicalName="IO.PM1.DI_EXTIN3" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="10001133" valueType="Boolean" logicalName="IO.PM1.DI_EXTIN4" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="10001134" valueType="Boolean" logicalName="IO.PM1.DI_EXTIN5" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="10001135" valueType="Boolean" logicalName="IO.PM1.DI_EXTIN6" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="10001136" valueType="Boolean" logicalName="IO.PM1.DI_EXTIN7" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="10001137" valueType="Boolean" logicalName="IO.PM1.DI_EXTIN8" value="" eventTrigger="" units="" description="" isArray="false" />
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- <SVID id="10001141" valueType="Boolean" logicalName="IO.PM1.DI_M11REALOUT" value="" eventTrigger="" units="" description="" isArray="false" />
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- <SVID id="10001146" valueType="Boolean" logicalName="IO.PM1.DI_PSW2LOW" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="10001147" valueType="Boolean" logicalName="IO.PM1.DI_PureN2PressureOK" value="" eventTrigger="" units="" description="" isArray="false" />
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- <SVID id="10001149" valueType="Boolean" logicalName="IO.PM1.DI_VV2REALOUT" value="" eventTrigger="" units="" description="" isArray="false" />
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- <SVID id="10001152" valueType="Boolean" logicalName="IO.PM1.DO_D13ValveOpen" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="10001153" valueType="Boolean" logicalName="IO.PM1.DO_D14ValveOpen" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="10001154" valueType="Boolean" logicalName="IO.PM1.DO_D15ValveOpen" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="10001155" valueType="Boolean" logicalName="IO.PM1.DO_IV1ValveOpen" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="10001156" valueType="Boolean" logicalName="IO.PM1.DO_IV2ValveOpen" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="10001157" valueType="Boolean" logicalName="IO.PM1.DO_J11ValveOpen" value="" eventTrigger="" units="" description="" isArray="false" />
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- <SVID id="10001159" valueType="Boolean" logicalName="IO.PM1.DO_J13ValveOpen" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="10001160" valueType="Boolean" logicalName="IO.PM1.DO_J14ValveOpen" value="" eventTrigger="" units="" description="" isArray="false" />
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- <SVID id="10001163" valueType="Boolean" logicalName="IO.PM1.DO_M12ValveOpen" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="10001164" valueType="Boolean" logicalName="IO.PM1.DO_M13ValveOpen" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="10001165" valueType="Boolean" logicalName="IO.PM1.DO_M14ValveOpen" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="10001166" valueType="Boolean" logicalName="IO.PM1.DO_M21ValveOpen" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="10001167" valueType="Boolean" logicalName="IO.PM1.DO_M22ValveOpen" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="10001168" valueType="Boolean" logicalName="IO.PM1.DO_M23ValveOpen" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="10001169" valueType="Boolean" logicalName="IO.PM1.DO_M24ValveOpen" value="" eventTrigger="" units="" description="" isArray="false" />
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- <SVID id="10001171" valueType="Boolean" logicalName="IO.PM1.DO_MFC11ForceOpen" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="10001172" valueType="Boolean" logicalName="IO.PM1.DO_MFC12ForceClose" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="10001173" valueType="Boolean" logicalName="IO.PM1.DO_MFC12ForceOpen" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="10001174" valueType="Boolean" logicalName="IO.PM1.DO_MFC13ForceClose" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="10001175" valueType="Boolean" logicalName="IO.PM1.DO_MFC13ForceOpen" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="10001176" valueType="Boolean" logicalName="IO.PM1.DO_MFC14ForceClose" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="10001177" valueType="Boolean" logicalName="IO.PM1.DO_MFC14ForceOpen" value="" eventTrigger="" units="" description="" isArray="false" />
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- <SVID id="10001179" valueType="Boolean" logicalName="IO.PM1.DO_MFC15ForceOpen" value="" eventTrigger="" units="" description="" isArray="false" />
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- <SVID id="10001181" valueType="Boolean" logicalName="IO.PM1.DO_MFC16ForceOpen" value="" eventTrigger="" units="" description="" isArray="false" />
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- <SVID id="10001183" valueType="Boolean" logicalName="IO.PM1.DO_MFCD1ForceOpen" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="10001184" valueType="Boolean" logicalName="IO.PM1.DO_MFCJ1ForceClose" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="10001185" valueType="Boolean" logicalName="IO.PM1.DO_MFCJ1ForceOpen" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="10001186" valueType="Boolean" logicalName="IO.PM1.DO_MFCM1ForceClose" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="10001187" valueType="Boolean" logicalName="IO.PM1.DO_MFCM1ForceOpen" value="" eventTrigger="" units="" description="" isArray="false" />
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- <SVID id="10001190" valueType="Boolean" logicalName="IO.PM1.DO_MFCN1ForceClose" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="10001191" valueType="Boolean" logicalName="IO.PM1.DO_MFCN1ForceOpen" value="" eventTrigger="" units="" description="" isArray="false" />
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- <SVID id="10001195" valueType="Boolean" logicalName="IO.PM1.DO_MFCN3ForceOpen" value="" eventTrigger="" units="" description="" isArray="false" />
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- <SVID id="10001197" valueType="Boolean" logicalName="IO.PM1.DO_MFCNRForceOpen" value="" eventTrigger="" units="" description="" isArray="false" />
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- <SVID id="10001199" valueType="Boolean" logicalName="IO.PM1.DO_MFCNXForceOpen" value="" eventTrigger="" units="" description="" isArray="false" />
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- <SVID id="10001201" valueType="Boolean" logicalName="IO.PM1.DO_MFCNYForceOpen" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="10001202" valueType="Boolean" logicalName="IO.PM1.DO_MVValveOpen" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="10001203" valueType="Boolean" logicalName="IO.PM1.DO_N12ValveOpen" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="10001204" valueType="Boolean" logicalName="IO.PM1.DO_N22ValveOpen" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="10001205" valueType="Boolean" logicalName="IO.PM1.DO_N32ValveOpen" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="10001206" valueType="Boolean" logicalName="IO.PM1.DO_NB1ValveOpen" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="10001207" valueType="Boolean" logicalName="IO.PM1.DO_NR2ValveOpen" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="10001208" valueType="Boolean" logicalName="IO.PM1.DO_NR3ValveOpen" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="10001209" valueType="Boolean" logicalName="IO.PM1.DO_NX2ValveOpen" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="10001210" valueType="Boolean" logicalName="IO.PM1.DO_NY2ValveOpen" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="10001211" valueType="Boolean" logicalName="IO.PM1.DO_SSVValveOpen" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="10001212" valueType="Boolean" logicalName="IO.PM1.DO_SVValveOpen" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="10001213" valueType="Boolean" logicalName="IO.PM1.DO_VV1ValveOpen" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="10001214" valueType="Boolean" logicalName="IO.PM1.DO_VV2ValveOpen" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="10001240" valueType="Boolean" logicalName="System.PM1.IsConnected" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="10001241" valueType="Ascii" logicalName="System.PM1.ComunicationSpanTotal" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="10002229" valueType="Ascii" logicalName="Scheduler.CycledCount" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="10002230" valueType="Ascii" logicalName="Scheduler.CycledTime" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="10002231" valueType="Ascii" logicalName="Scheduler.CycledTotalWafer" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="10002232" valueType="Ascii" logicalName="Scheduler.CycledWafer" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="10002233" valueType="Ascii" logicalName="Scheduler.CycleSetPoint" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="10002234" valueType="Boolean" logicalName="System.HasActiveAlarm" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="10002235" valueType="Boolean" logicalName="System.IsAlarm" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="10002236" valueType="Boolean" logicalName="System.IsAutoRunning" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="10002237" valueType="Boolean" logicalName="System.IsBusy" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="10002238" valueType="Boolean" logicalName="System.IsIdle" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="10002239" valueType="Boolean" logicalName="System.IsSpoolingEnable" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="10002241" valueType="Ascii" logicalName="System.SpoolingState" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="10002242" valueType="Ascii" logicalName="CJQueue_Space" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="10002243" valueType="Ascii" logicalName="PJQueue_Space" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="10002244" valueType="Boolean" logicalName="System.IsAlarmConditionBuzzerOn" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="10002245" valueType="Boolean" logicalName="System.IsInitialized" value="" eventTrigger="" units="" description="" isArray="false" />
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- <SVID id="10077222" valueType="F8" logicalName="System.HTVoltage5.Feedback" value="" eventTrigger="" units="" description="" isArray="false" />
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- <SVID id="10079222" valueType="F8" logicalName="System.MFCNB.Feedback" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="10080228" valueType="Boolean" logicalName="System.SensorASClosePosition.Value" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="10081228" valueType="Boolean" logicalName="System.SensorASUpPosition.Value" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="10082228" valueType="Boolean" logicalName="System.SensorASWaterFlowOK.Value" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="10083228" valueType="Boolean" logicalName="System.SensorASWaterFlowOK1.Value" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="10084228" valueType="Boolean" logicalName="System.SensorCAPClosePosition.Value" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="10085228" valueType="Boolean" logicalName="System.SensorCAPOpenPosition.Value" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="10086228" valueType="Boolean" logicalName="System.SensorCAPWaterFlowOK.Value" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="10087228" valueType="Boolean" logicalName="System.SensorCAPWaterFlowOK1.Value" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="10088228" valueType="Boolean" logicalName="System.SensorChamberTempOK.Value" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="10089228" valueType="Boolean" logicalName="System.SensorEXHFanOK.Value" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="10090228" valueType="Boolean" logicalName="System.SensorFNCBreakOK.Value" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="10091228" valueType="Boolean" logicalName="System.SensorFNCPanelClose.Value" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="10092228" valueType="Boolean" logicalName="System.SensorFNCPowerLatchON.Value" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="10093228" valueType="Boolean" logicalName="System.SensorFNCWaterLeakDet1OK.Value" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="10094228" valueType="Boolean" logicalName="System.SensorFNCWaterLeakDet2OK.Value" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="10095228" valueType="Boolean" logicalName="System.SensorGASDetectorOK.Value" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="10096228" valueType="Boolean" logicalName="System.SensorGasLineTHTempOK.Value" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="10097228" valueType="Boolean" logicalName="System.SensorHeaterBreakOK.Value" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="10098228" valueType="Boolean" logicalName="System.SensorHeaterControllerOK.Value" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="10099228" valueType="Boolean" logicalName="System.SensorHeaterEXHOK.Value" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="10178216" valueType="Boolean" logicalName="System.IoValve.MainWaterValve.SetPoint" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="10178217" valueType="Boolean" logicalName="System.IoValve.MainWaterValve.Status" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="10680001" valueType="Boolean" logicalName="System.AlarmSignalHeaterCLOverTemp.Value" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="10690001" valueType="Boolean" logicalName="System.AlarmSignalHeaterCOverTemp.Value" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="10700001" valueType="Boolean" logicalName="System.AlarmSignalHeaterCUOverTemp.Value" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="10710001" valueType="Boolean" logicalName="System.AlarmSignalHeaterLOverTemp.Value" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="10720001" valueType="Boolean" logicalName="System.AlarmSignalHeaterUOverTemp.Value" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="10730001" valueType="F8" logicalName="System.HeaterC.CascadePID_D" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="10730002" valueType="F8" logicalName="System.HeaterC.CascadePID_I" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="10730003" valueType="F8" logicalName="System.HeaterC.CascadePID_P" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="10730004" valueType="F8" logicalName="System.HeaterC.CascadePV" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="10730005" valueType="Ascii" logicalName="System.HeaterC.ControlMode" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="10730006" valueType="F8" logicalName="System.HeaterC.DownRate" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="10730007" valueType="F8" logicalName="System.HeaterC.HeaterPID_D" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="10730008" valueType="F8" logicalName="System.HeaterC.HeaterPID_I" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="10730009" valueType="F8" logicalName="System.HeaterC.HeaterPID_P" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="10730010" valueType="F8" logicalName="System.HeaterC.HeaterPV" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="10730011" valueType="Boolean" logicalName="System.HeaterC.IsAutoManual" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="10730012" valueType="Boolean" logicalName="System.HeaterC.IsCascadeMode" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="10730013" valueType="Boolean" logicalName="System.HeaterC.IsCascadePVBreak" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="10730014" valueType="Boolean" logicalName="System.HeaterC.IsEnableIn" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="10730015" valueType="Boolean" logicalName="System.HeaterC.IsEnableOutput" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="10730016" valueType="Boolean" logicalName="System.HeaterC.IsHeaterPVBreak" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="10730017" valueType="Boolean" logicalName="System.HeaterC.IsSelect" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="10730018" valueType="F8" logicalName="System.HeaterC.OverTemp" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="10730019" valueType="F8" logicalName="System.HeaterC.TempFeedback" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="10730020" valueType="F8" logicalName="System.HeaterC.TempSetPoint" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="10730021" valueType="F8" logicalName="System.HeaterC.UpRate" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="10730022" valueType="F8" logicalName="System.HeaterC.WorkingOutput" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="10740001" valueType="F8" logicalName="System.HeaterCL.CascadePID_D" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="10740002" valueType="F8" logicalName="System.HeaterCL.CascadePID_I" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="10740003" valueType="F8" logicalName="System.HeaterCL.CascadePID_P" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="10740004" valueType="F8" logicalName="System.HeaterCL.CascadePV" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="10740005" valueType="Ascii" logicalName="System.HeaterCL.ControlMode" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="10740006" valueType="F8" logicalName="System.HeaterCL.DownRate" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="10740007" valueType="F8" logicalName="System.HeaterCL.HeaterPID_D" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="10740008" valueType="F8" logicalName="System.HeaterCL.HeaterPID_I" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="10740009" valueType="F8" logicalName="System.HeaterCL.HeaterPID_P" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="10740010" valueType="F8" logicalName="System.HeaterCL.HeaterPV" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="10740011" valueType="Boolean" logicalName="System.HeaterCL.IsAutoManual" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="10740012" valueType="Boolean" logicalName="System.HeaterCL.IsCascadeMode" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="10740013" valueType="Boolean" logicalName="System.HeaterCL.IsCascadePVBreak" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="10740014" valueType="Boolean" logicalName="System.HeaterCL.IsEnableIn" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="10740015" valueType="Boolean" logicalName="System.HeaterCL.IsEnableOutput" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="10740016" valueType="Boolean" logicalName="System.HeaterCL.IsHeaterPVBreak" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="10740017" valueType="Boolean" logicalName="System.HeaterCL.IsSelect" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="10740018" valueType="F8" logicalName="System.HeaterCL.OverTemp" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="10740019" valueType="F8" logicalName="System.HeaterCL.TempFeedback" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="10740020" valueType="F8" logicalName="System.HeaterCL.TempSetPoint" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="10740021" valueType="F8" logicalName="System.HeaterCL.UpRate" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="10740022" valueType="F8" logicalName="System.HeaterCL.WorkingOutput" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="10750001" valueType="F8" logicalName="System.HeaterCU.CascadePID_D" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="10750002" valueType="F8" logicalName="System.HeaterCU.CascadePID_I" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="10750003" valueType="F8" logicalName="System.HeaterCU.CascadePID_P" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="10750004" valueType="F8" logicalName="System.HeaterCU.CascadePV" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="10750005" valueType="Ascii" logicalName="System.HeaterCU.ControlMode" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="10750006" valueType="F8" logicalName="System.HeaterCU.DownRate" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="10750007" valueType="F8" logicalName="System.HeaterCU.HeaterPID_D" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="10750008" valueType="F8" logicalName="System.HeaterCU.HeaterPID_I" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="10750009" valueType="F8" logicalName="System.HeaterCU.HeaterPID_P" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="10750010" valueType="F8" logicalName="System.HeaterCU.HeaterPV" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="10750011" valueType="Boolean" logicalName="System.HeaterCU.IsAutoManual" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="10750012" valueType="Boolean" logicalName="System.HeaterCU.IsCascadeMode" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="10750013" valueType="Boolean" logicalName="System.HeaterCU.IsCascadePVBreak" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="10750014" valueType="Boolean" logicalName="System.HeaterCU.IsEnableIn" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="10750015" valueType="Boolean" logicalName="System.HeaterCU.IsEnableOutput" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="10750016" valueType="Boolean" logicalName="System.HeaterCU.IsHeaterPVBreak" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="10750017" valueType="Boolean" logicalName="System.HeaterCU.IsSelect" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="10750018" valueType="F8" logicalName="System.HeaterCU.OverTemp" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="10750019" valueType="F8" logicalName="System.HeaterCU.TempFeedback" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="10750020" valueType="F8" logicalName="System.HeaterCU.TempSetPoint" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="10750021" valueType="F8" logicalName="System.HeaterCU.UpRate" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="10750022" valueType="F8" logicalName="System.HeaterCU.WorkingOutput" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="10760001" valueType="F8" logicalName="System.HeaterL.CascadePID_D" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="10760002" valueType="F8" logicalName="System.HeaterL.CascadePID_I" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="10760003" valueType="F8" logicalName="System.HeaterL.CascadePID_P" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="10760004" valueType="F8" logicalName="System.HeaterL.CascadePV" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="10760005" valueType="Ascii" logicalName="System.HeaterL.ControlMode" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="10760006" valueType="F8" logicalName="System.HeaterL.DownRate" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="10760007" valueType="F8" logicalName="System.HeaterL.HeaterPID_D" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="10760008" valueType="F8" logicalName="System.HeaterL.HeaterPID_I" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="10760009" valueType="F8" logicalName="System.HeaterL.HeaterPID_P" value="" eventTrigger="" units="" description="" isArray="false" />
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- <SVID id="10760011" valueType="Boolean" logicalName="System.HeaterL.IsAutoManual" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="10760012" valueType="Boolean" logicalName="System.HeaterL.IsCascadeMode" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="10760013" valueType="Boolean" logicalName="System.HeaterL.IsCascadePVBreak" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="10760014" valueType="Boolean" logicalName="System.HeaterL.IsEnableIn" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="10760015" valueType="Boolean" logicalName="System.HeaterL.IsEnableOutput" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="10760016" valueType="Boolean" logicalName="System.HeaterL.IsHeaterPVBreak" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="10760017" valueType="Boolean" logicalName="System.HeaterL.IsSelect" value="" eventTrigger="" units="" description="" isArray="false" />
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- <SVID id="10770002" valueType="F8" logicalName="System.HeaterU.CascadePID_I" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="10770003" valueType="F8" logicalName="System.HeaterU.CascadePID_P" value="" eventTrigger="" units="" description="" isArray="false" />
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- <SVID id="10770015" valueType="Boolean" logicalName="System.HeaterU.IsEnableOutput" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="10770016" valueType="Boolean" logicalName="System.HeaterU.IsHeaterPVBreak" value="" eventTrigger="" units="" description="" isArray="false" />
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- <SVID id="10770019" valueType="F8" logicalName="System.HeaterU.TempFeedback" value="" eventTrigger="" units="" description="" isArray="false" />
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- <SVID id="20010014" valueType="Boolean" logicalName="LP1.IsDoorOpen" value="" eventTrigger="" units="" description="" isArray="false" />
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- <SVID id="20010016" valueType="Boolean" logicalName="LP1.IsMapped" value="" eventTrigger="" units="" description="" isArray="false" />
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- <SVID id="40010008" valueType="Boolean" logicalName="LP3.IsError" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="40010009" valueType="Boolean" logicalName="LP3.IsMapped" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="40010010" valueType="Boolean" logicalName="LP3.IsOnline" value="" eventTrigger="" units="" description="" isArray="false" />
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- <SVID id="40010012" valueType="Boolean" logicalName="LP3.IsPresent" value="" eventTrigger="" units="" description="" isArray="false" />
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- <SVID id="50010002" valueType="Ascii" logicalName="LP4.InfoPadCarrierIndex" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="50010003" valueType="Boolean" logicalName="LP4.IsAccessSwPressed" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="50010004" valueType="Boolean" logicalName="LP4.IsAutoDetectCarrierType" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="50010005" valueType="Boolean" logicalName="LP4.IsClamped" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="50010006" valueType="Boolean" logicalName="LP4.IsDocked" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="50010007" valueType="Boolean" logicalName="LP4.IsDoorOpen" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="50010008" valueType="Boolean" logicalName="LP4.IsError" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="50010009" valueType="Boolean" logicalName="LP4.IsMapped" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="50010010" valueType="Boolean" logicalName="LP4.IsOnline" value="" eventTrigger="" units="" description="" isArray="false" />
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- <SVID id="50010012" valueType="Boolean" logicalName="LP4.IsPresent" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="50010013" valueType="Boolean" logicalName="LP4.IsVerifyPreDefineWaferCount" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="50010014" valueType="Ascii" logicalName="LP4.PreDefineWaferCount" value="" eventTrigger="" units="" description="" isArray="false" />
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- <SVID id="100101228" valueType="Boolean" logicalName="System.SensorHeaterPowerONSW.Value" value="" eventTrigger="" units="" description="" isArray="false" />
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- <SVID id="100103228" valueType="Boolean" logicalName="System.SensorHeaterTransTempOK.Value" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="100104228" valueType="Boolean" logicalName="System.SensorHeaterWaterFlowOK.Value" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="100105228" valueType="Boolean" logicalName="System.SensorHeaterWaterFlowOK1.Value" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="100106228" valueType="Boolean" logicalName="System.SensorHECDoorClosed.Value" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="100107228" valueType="Boolean" logicalName="System.SensorHECMCON.Value" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="100108228" valueType="Boolean" logicalName="System.SensorHECPowerONSW.Value" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="100109228" valueType="Boolean" logicalName="System.SensorHECTempOK.Value" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="100110228" valueType="Boolean" logicalName="System.SensorHECWaterLeakDetectOK.Value" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="100111228" valueType="Boolean" logicalName="System.SensorHECWaterLevelOK.Value" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="100112228" valueType="Boolean" logicalName="System.SensorHTRCUPowerON.Value" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="100113228" valueType="Boolean" logicalName="System.SensorMFWaterFlowOK.Value" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="100114228" valueType="Boolean" logicalName="System.SensorMFWaterFlowOK1.Value" value="" eventTrigger="" units="" description="" isArray="false" />
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- <SVID id="100116228" valueType="Boolean" logicalName="System.SensorPipingLineTHTempOK.Value" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="100117228" valueType="Boolean" logicalName="System.SensorSCRFanOK.Value" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="100118228" valueType="Boolean" logicalName="System.SensorSCRTempOK.Value" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="100119228" valueType="Boolean" logicalName="System.SensorSCVOK.Value" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="100120228" valueType="Boolean" logicalName="System.SensorSiH2Cl2LeakOK.Value" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="100121228" valueType="Boolean" logicalName="System.SensorSpareWaterFlowOK.Value" value="" eventTrigger="" units="" description="" isArray="false" />
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- <SVID id="100124228" valueType="Boolean" logicalName="System.SensorTHControllerOK.Value" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="100125228" valueType="Boolean" logicalName="System.SensorTHMCON.Value" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="100126228" valueType="Boolean" logicalName="System.SensorTubeATMPressure.Value" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="100127228" valueType="Boolean" logicalName="System.SensorTubeOverPressure.Value" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="100128228" valueType="Boolean" logicalName="System.SensorVG1OK.Value" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="100129228" valueType="Boolean" logicalName="System.SensorVG2LOW.Value" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="100130228" valueType="Boolean" logicalName="System.SensorVG2OK.Value" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="100131228" valueType="F8" logicalName="System.VG2Pressure.Value" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="330670001" valueType="Boolean" logicalName="PM1.AGVPump.Feedback" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="330670002" valueType="Boolean" logicalName="PM1.AGVPump.SetPoint" value="" eventTrigger="" units="" description="" isArray="false" />
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- <SVID id="330690001" valueType="Boolean" logicalName="PM1.AlarmSignaBoatRAxisWarning.Value" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="330700001" valueType="Boolean" logicalName="PM1.AlarmSignaBoatZAxisAlarm.Value" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="330710001" valueType="Boolean" logicalName="PM1.AlarmSignaBoatZAxisWarning.Value" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="330720001" valueType="Boolean" logicalName="PM1.AlarmSignaFOUPRobotAlarm.Value" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="330730001" valueType="Boolean" logicalName="PM1.AlarmSignaFOUPRobotTPStatusWarning.Value" value="" eventTrigger="" units="" description="" isArray="false" />
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- <SVID id="330770001" valueType="Boolean" logicalName="PM1.AlarmSignalAirFlowFL72.Value" value="" eventTrigger="" units="" description="" isArray="false" />
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- <SVID id="330790001" valueType="Boolean" logicalName="PM1.AlarmSignalAV91_2RHCAirInOpened.Value" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="330800001" valueType="Boolean" logicalName="PM1.AlarmSignalAV91_3RHCAirInOpened.Value" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="330810001" valueType="Boolean" logicalName="PM1.AlarmSignalAV91_4RHCAirInOpened.Value" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="330820001" valueType="Boolean" logicalName="PM1.AlarmSignalBlowerPower.Value" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="330830001" valueType="Boolean" logicalName="PM1.AlarmSignalBoatLiftMotorHardwareInterlockAlarm.Value" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="330840001" valueType="Boolean" logicalName="PM1.AlarmSignalBufferMotorHardwareInterlockAlarm.Value" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="330850001" valueType="Boolean" logicalName="PM1.AlarmSignalCapHeaterAbnormal.Value" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="330860001" valueType="Boolean" logicalName="PM1.AlarmSignalCoolingWaterFlowAlarmOfBoatRotationFL904.Value" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="330870001" valueType="Boolean" logicalName="PM1.AlarmSignalCoolingWaterFlowAlarmOfFlangeFL905.Value" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="330880001" valueType="Boolean" logicalName="PM1.AlarmSignalCoolingWaterFlowAlarmOfFurnaceFL902.Value" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="330890001" valueType="Boolean" logicalName="PM1.AlarmSignalCoolingWaterFlowAlarmOfLoadingAreaFL906.Value" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="330900001" valueType="Boolean" logicalName="PM1.AlarmSignalCoolingWaterFlowAlarmOfShuttleFL903.Value" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="330910001" valueType="Boolean" logicalName="PM1.AlarmSignalCoolingWaterLeak.Value" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="330920001" valueType="Boolean" logicalName="PM1.AlarmSignalCoolingWaterPressureOut1.Value" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="330930001" valueType="Boolean" logicalName="PM1.AlarmSignalCoolingWaterPressureOut2.Value" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="330940001" valueType="Boolean" logicalName="PM1.AlarmSignalDG1Output1.Value" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="330950001" valueType="Boolean" logicalName="PM1.AlarmSignalDG1Output2.Value" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="330960001" valueType="Boolean" logicalName="PM1.AlarmSignalDoorOverride.Value" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="330970001" valueType="Boolean" logicalName="PM1.AlarmSignalEXHBoxWaterLeak.Value" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="330980001" valueType="Boolean" logicalName="PM1.AlarmSignalF2GasLeak1stAlarm.Value" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="330990001" valueType="Boolean" logicalName="PM1.AlarmSignalF2GasLeak2ndAlarm.Value" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="331000001" valueType="Boolean" logicalName="PM1.AlarmSignalFBEMO1.Value" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="331010001" valueType="Boolean" logicalName="PM1.AlarmSignalFBEMO2.Value" value="" eventTrigger="" units="" description="" isArray="false" />
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- <SVID id="332710004" valueType="Boolean" logicalName="PM1.ForelineHeater7.IsAutoTuningDone" value="" eventTrigger="" units="" description="" isArray="false" />
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- <SVID id="332720006" valueType="Boolean" logicalName="PM1.ForelineHeater8.IsEnable" value="" eventTrigger="" units="" description="" isArray="false" />
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- <SVID id="332760002" valueType="Boolean" logicalName="PM1.GaslineHeaterUnit1CH1.IsEnable" value="" eventTrigger="" units="" description="" isArray="false" />
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- <SVID id="332770002" valueType="Boolean" logicalName="PM1.GaslineHeaterUnit1CH10.IsEnable" value="" eventTrigger="" units="" description="" isArray="false" />
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- <SVID id="332780002" valueType="Boolean" logicalName="PM1.GaslineHeaterUnit1CH11.IsEnable" value="" eventTrigger="" units="" description="" isArray="false" />
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- <SVID id="332790002" valueType="Boolean" logicalName="PM1.GaslineHeaterUnit1CH12.IsEnable" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="332790003" valueType="F8" logicalName="PM1.GaslineHeaterUnit1CH12.TempFeedback" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="332790004" valueType="F8" logicalName="PM1.GaslineHeaterUnit1CH12.TempSetPoint" value="" eventTrigger="" units="" description="" isArray="false" />
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- <SVID id="332800002" valueType="Boolean" logicalName="PM1.GaslineHeaterUnit1CH13.IsEnable" value="" eventTrigger="" units="" description="" isArray="false" />
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- <SVID id="332810002" valueType="Boolean" logicalName="PM1.GaslineHeaterUnit1CH14.IsEnable" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="332810003" valueType="F8" logicalName="PM1.GaslineHeaterUnit1CH14.TempFeedback" value="" eventTrigger="" units="" description="" isArray="false" />
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- <SVID id="332820003" valueType="F8" logicalName="PM1.GaslineHeaterUnit1CH15.TempFeedback" value="" eventTrigger="" units="" description="" isArray="false" />
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- <SVID id="334840001" valueType="Boolean" logicalName="PM1.SensorFrontbodyPowerOnButton.Value" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="334850001" valueType="Boolean" logicalName="PM1.SensorFurnacePowerOnButton.Value" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="334860001" valueType="Boolean" logicalName="PM1.SensorGasLineHeaterPowerOnButton.Value" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="334870001" valueType="Boolean" logicalName="PM1.SensorHeaterPowerOnOffKnob.Value" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="334880001" valueType="Boolean" logicalName="PM1.SensorMachinePause.Value" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="334890001" valueType="Boolean" logicalName="PM1.SensorMachineStop.Value" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="334900001" valueType="Boolean" logicalName="PM1.SensorMechaStopButton.Value" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="334910001" valueType="Boolean" logicalName="PM1.SensorNormalOrMaintainKnob.Value" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="334920001" valueType="Boolean" logicalName="PM1.SensorOperatorAccessHandOffLeft.Value" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="334930001" valueType="Boolean" logicalName="PM1.SensorOperatorAccessHandOffRight.Value" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="334940001" valueType="Boolean" logicalName="PM1.SensorPS13LStatus.Value" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="334950001" valueType="Boolean" logicalName="PM1.SensorResetButton.Value" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="334960001" valueType="Boolean" logicalName="PM1.SensorREVReset.Value" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="334970001" valueType="Boolean" logicalName="PM1.SensorStartButton.Value" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="334980001" valueType="Boolean" logicalName="PM1.SensorStocker1.Value" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="334990001" valueType="Boolean" logicalName="PM1.SensorStocker10.Value" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="335000001" valueType="Boolean" logicalName="PM1.SensorStocker11.Value" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="335010001" valueType="Boolean" logicalName="PM1.SensorStocker12.Value" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="335020001" valueType="Boolean" logicalName="PM1.SensorStocker13.Value" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="335030001" valueType="Boolean" logicalName="PM1.SensorStocker14.Value" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="335040001" valueType="Boolean" logicalName="PM1.SensorStocker15.Value" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="335050001" valueType="Boolean" logicalName="PM1.SensorStocker16.Value" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="335060001" valueType="Boolean" logicalName="PM1.SensorStocker17.Value" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="335070001" valueType="Boolean" logicalName="PM1.SensorStocker18.Value" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="335080001" valueType="Boolean" logicalName="PM1.SensorStocker2.Value" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="335090001" valueType="Boolean" logicalName="PM1.SensorStocker3.Value" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="335100001" valueType="Boolean" logicalName="PM1.SensorStocker4.Value" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="335110001" valueType="Boolean" logicalName="PM1.SensorStocker5.Value" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="335120001" valueType="Boolean" logicalName="PM1.SensorStocker6.Value" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="335130001" valueType="Boolean" logicalName="PM1.SensorStocker7.Value" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="335140001" valueType="Boolean" logicalName="PM1.SensorStocker8.Value" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="335150001" valueType="Boolean" logicalName="PM1.SensorStocker9.Value" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="335160001" valueType="Boolean" logicalName="PM1.SensorStopButton.Value" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="335170001" valueType="Boolean" logicalName="PM1.SensorT102PowerOnButton.Value" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="335180001" valueType="Boolean" logicalName="PM1.SensorT103PowerOnButton.Value" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="335190001" valueType="Boolean" logicalName="PM1.SensorUPSACInputCutOff.Value" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="335200001" valueType="Boolean" logicalName="PM1.SensorUPSBatteryVoltageLow.Value" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="335210001" valueType="Boolean" logicalName="PM1.SensorUPSBypassStatus.Value" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="335220001" valueType="Boolean" logicalName="PM1.SensorUPSStart.Value" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="335230001" valueType="Boolean" logicalName="PM1.SensorVAC1.Value" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="335240001" valueType="Boolean" logicalName="PM1.SensorVAC2.Value" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="335250001" valueType="Boolean" logicalName="PM1.SensorVAC3.Value" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="335260001" valueType="Boolean" logicalName="PM1.SensorVAC4.Value" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="335270001" valueType="Boolean" logicalName="PM1.SensorVAC5.Value" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="335280001" valueType="Boolean" logicalName="PM1.SensorVAC6.Value" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="335290001" valueType="Boolean" logicalName="PM1.SensorVaccumPumpBothOn.Value" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="335300001" valueType="Boolean" logicalName="PM1.SensorVACDEPOOK.Value" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="335310001" valueType="Boolean" logicalName="PM1.SensorVACF2OK.Value" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="335320001" valueType="Boolean" logicalName="PM1.SensorVACHFOK.Value" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="335330001" valueType="Boolean" logicalName="PM1.SensorVG11Status.Value" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="335340001" valueType="Boolean" logicalName="PM1.SensorVG12Status.Value" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="335350001" valueType="Boolean" logicalName="PM1.SensorVG13Status.Value" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="335360001" valueType="Boolean" logicalName="PM1.SensorWaferRobotEX1AxisHomePosition.Value" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="335370001" valueType="Boolean" logicalName="PM1.SensorWaferRobotEX2AxisHomePosition.Value" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="335380001" valueType="Boolean" logicalName="PM1.SensorZone1CircuitBreakerStatusMonitor.Value" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="335390001" valueType="Boolean" logicalName="PM1.SensorZone2CircuitBreakerStatusMonitor.Value" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="335400001" valueType="Boolean" logicalName="PM1.SensorZone3CircuitBreakerStatusMonitor.Value" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="335410001" valueType="Boolean" logicalName="PM1.SensorZone4CircuitBreakerStatusMonitor.Value" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="335420001" valueType="Boolean" logicalName="PM1.SensorZone5CircuitBreakerStatusMonitor.Value" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="335430001" valueType="Boolean" logicalName="PM1.Shutter.DiClose" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="335430002" valueType="Boolean" logicalName="PM1.Shutter.DiOpen" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="335430003" valueType="Boolean" logicalName="PM1.Shutter.DoClose" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="335430004" valueType="Boolean" logicalName="PM1.Shutter.DoOpen" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="335440001" valueType="Boolean" logicalName="PM1.ValveAV1.Feedback" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="335440002" valueType="Boolean" logicalName="PM1.ValveAV1.SetPoint" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="335450001" valueType="Boolean" logicalName="PM1.ValveAV10.Feedback" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="335450002" valueType="Boolean" logicalName="PM1.ValveAV10.SetPoint" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="335460001" valueType="Boolean" logicalName="PM1.ValveAV11.Feedback" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="335460002" valueType="Boolean" logicalName="PM1.ValveAV11.SetPoint" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="335470001" valueType="Boolean" logicalName="PM1.ValveAV12.Feedback" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="335470002" valueType="Boolean" logicalName="PM1.ValveAV12.SetPoint" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="335480001" valueType="Boolean" logicalName="PM1.ValveAV13.Feedback" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="335480002" valueType="Boolean" logicalName="PM1.ValveAV13.SetPoint" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="335490001" valueType="Boolean" logicalName="PM1.ValveAV14.Feedback" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="335490002" valueType="Boolean" logicalName="PM1.ValveAV14.SetPoint" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="335500001" valueType="Boolean" logicalName="PM1.ValveAV15.Feedback" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="335500002" valueType="Boolean" logicalName="PM1.ValveAV15.SetPoint" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="335510001" valueType="Boolean" logicalName="PM1.ValveAV16.Feedback" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="335510002" valueType="Boolean" logicalName="PM1.ValveAV16.SetPoint" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="335520001" valueType="Boolean" logicalName="PM1.ValveAV17.Feedback" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="335520002" valueType="Boolean" logicalName="PM1.ValveAV17.SetPoint" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="335530001" valueType="Boolean" logicalName="PM1.ValveAV18.Feedback" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="335530002" valueType="Boolean" logicalName="PM1.ValveAV18.SetPoint" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="335540001" valueType="Boolean" logicalName="PM1.ValveAV19.Feedback" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="335540002" valueType="Boolean" logicalName="PM1.ValveAV19.SetPoint" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="335550001" valueType="Boolean" logicalName="PM1.ValveAV2.Feedback" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="335550002" valueType="Boolean" logicalName="PM1.ValveAV2.SetPoint" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="335560001" valueType="Boolean" logicalName="PM1.ValveAV20.Feedback" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="335560002" valueType="Boolean" logicalName="PM1.ValveAV20.SetPoint" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="335570001" valueType="Boolean" logicalName="PM1.ValveAV202LADoor.Feedback" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="335570002" valueType="Boolean" logicalName="PM1.ValveAV202LADoor.SetPoint" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="335580001" valueType="Boolean" logicalName="PM1.ValveAV21.Feedback" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="335580002" valueType="Boolean" logicalName="PM1.ValveAV21.SetPoint" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="335590001" valueType="Boolean" logicalName="PM1.ValveAV22.Feedback" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="335590002" valueType="Boolean" logicalName="PM1.ValveAV22.SetPoint" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="335600001" valueType="Boolean" logicalName="PM1.ValveAV23.Feedback" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="335600002" valueType="Boolean" logicalName="PM1.ValveAV23.SetPoint" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="335610001" valueType="Boolean" logicalName="PM1.ValveAV230.Feedback" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="335610002" valueType="Boolean" logicalName="PM1.ValveAV230.SetPoint" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="335620001" valueType="Boolean" logicalName="PM1.ValveAV24.Feedback" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="335620002" valueType="Boolean" logicalName="PM1.ValveAV24.SetPoint" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="335630001" valueType="Boolean" logicalName="PM1.ValveAV25.Feedback" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="335630002" valueType="Boolean" logicalName="PM1.ValveAV25.SetPoint" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="335640001" valueType="Boolean" logicalName="PM1.ValveAV26.Feedback" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="335640002" valueType="Boolean" logicalName="PM1.ValveAV26.SetPoint" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="335650001" valueType="Boolean" logicalName="PM1.ValveAV27.Feedback" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="335650002" valueType="Boolean" logicalName="PM1.ValveAV27.SetPoint" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="335660001" valueType="Boolean" logicalName="PM1.ValveAV28.Feedback" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="335660002" valueType="Boolean" logicalName="PM1.ValveAV28.SetPoint" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="335670001" valueType="Boolean" logicalName="PM1.ValveAV29.Feedback" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="335670002" valueType="Boolean" logicalName="PM1.ValveAV29.SetPoint" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="335680001" valueType="Boolean" logicalName="PM1.ValveAV3.Feedback" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="335680002" valueType="Boolean" logicalName="PM1.ValveAV3.SetPoint" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="335690001" valueType="Boolean" logicalName="PM1.ValveAV30.Feedback" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="335690002" valueType="Boolean" logicalName="PM1.ValveAV30.SetPoint" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="335700001" valueType="Boolean" logicalName="PM1.ValveAV31.Feedback" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="335700002" valueType="Boolean" logicalName="PM1.ValveAV31.SetPoint" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="335710001" valueType="Boolean" logicalName="PM1.ValveAV32.Feedback" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="335710002" valueType="Boolean" logicalName="PM1.ValveAV32.SetPoint" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="335720001" valueType="Boolean" logicalName="PM1.ValveAV33.Feedback" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="335720002" valueType="Boolean" logicalName="PM1.ValveAV33.SetPoint" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="335730001" valueType="Boolean" logicalName="PM1.ValveAV34.Feedback" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="335730002" valueType="Boolean" logicalName="PM1.ValveAV34.SetPoint" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="335740001" valueType="Boolean" logicalName="PM1.ValveAV35.Feedback" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="335740002" valueType="Boolean" logicalName="PM1.ValveAV35.SetPoint" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="335750001" valueType="Boolean" logicalName="PM1.ValveAV36.Feedback" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="335750002" valueType="Boolean" logicalName="PM1.ValveAV36.SetPoint" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="335760001" valueType="Boolean" logicalName="PM1.ValveAV37.Feedback" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="335760002" valueType="Boolean" logicalName="PM1.ValveAV37.SetPoint" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="335770001" valueType="Boolean" logicalName="PM1.ValveAV38.Feedback" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="335770002" valueType="Boolean" logicalName="PM1.ValveAV38.SetPoint" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="335780001" valueType="Boolean" logicalName="PM1.ValveAV39.Feedback" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="335780002" valueType="Boolean" logicalName="PM1.ValveAV39.SetPoint" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="335790001" valueType="Boolean" logicalName="PM1.ValveAV4.Feedback" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="335790002" valueType="Boolean" logicalName="PM1.ValveAV4.SetPoint" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="335800001" valueType="Boolean" logicalName="PM1.ValveAV40.Feedback" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="335800002" valueType="Boolean" logicalName="PM1.ValveAV40.SetPoint" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="335810001" valueType="Boolean" logicalName="PM1.ValveAV41.Feedback" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="335810002" valueType="Boolean" logicalName="PM1.ValveAV41.SetPoint" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="335820001" valueType="Boolean" logicalName="PM1.ValveAV42.Feedback" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="335820002" valueType="Boolean" logicalName="PM1.ValveAV42.SetPoint" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="335830001" valueType="Boolean" logicalName="PM1.ValveAV43.Feedback" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="335830002" valueType="Boolean" logicalName="PM1.ValveAV43.SetPoint" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="335840001" valueType="Boolean" logicalName="PM1.ValveAV44.Feedback" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="335840002" valueType="Boolean" logicalName="PM1.ValveAV44.SetPoint" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="335850001" valueType="Boolean" logicalName="PM1.ValveAV45.Feedback" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="335850002" valueType="Boolean" logicalName="PM1.ValveAV45.SetPoint" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="335860001" valueType="Boolean" logicalName="PM1.ValveAV46.Feedback" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="335860002" valueType="Boolean" logicalName="PM1.ValveAV46.SetPoint" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="335870001" valueType="Boolean" logicalName="PM1.ValveAV47.Feedback" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="335870002" valueType="Boolean" logicalName="PM1.ValveAV47.SetPoint" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="335880001" valueType="Boolean" logicalName="PM1.ValveAV48.Feedback" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="335880002" valueType="Boolean" logicalName="PM1.ValveAV48.SetPoint" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="335890001" valueType="Boolean" logicalName="PM1.ValveAV49.Feedback" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="335890002" valueType="Boolean" logicalName="PM1.ValveAV49.SetPoint" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="335900001" valueType="Boolean" logicalName="PM1.ValveAV5.Feedback" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="335900002" valueType="Boolean" logicalName="PM1.ValveAV5.SetPoint" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="335910001" valueType="Boolean" logicalName="PM1.ValveAV50.Feedback" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="335910002" valueType="Boolean" logicalName="PM1.ValveAV50.SetPoint" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="335920001" valueType="Boolean" logicalName="PM1.ValveAV51.Feedback" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="335920002" valueType="Boolean" logicalName="PM1.ValveAV51.SetPoint" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="335930001" valueType="Boolean" logicalName="PM1.ValveAV52.Feedback" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="335930002" valueType="Boolean" logicalName="PM1.ValveAV52.SetPoint" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="335940001" valueType="Boolean" logicalName="PM1.ValveAV53.Feedback" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="335940002" valueType="Boolean" logicalName="PM1.ValveAV53.SetPoint" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="335950001" valueType="Boolean" logicalName="PM1.ValveAV54.Feedback" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="335950002" valueType="Boolean" logicalName="PM1.ValveAV54.SetPoint" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="335960001" valueType="Boolean" logicalName="PM1.ValveAV55.Feedback" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="335960002" valueType="Boolean" logicalName="PM1.ValveAV55.SetPoint" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="335970001" valueType="Boolean" logicalName="PM1.ValveAV56.Feedback" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="335970002" valueType="Boolean" logicalName="PM1.ValveAV56.SetPoint" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="335980001" valueType="Boolean" logicalName="PM1.ValveAV57.Feedback" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="335980002" valueType="Boolean" logicalName="PM1.ValveAV57.SetPoint" value="" eventTrigger="" units="" description="" isArray="false" />
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- <SVID id="335990002" valueType="Boolean" logicalName="PM1.ValveAV58.SetPoint" value="" eventTrigger="" units="" description="" isArray="false" />
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- <SVID id="336000002" valueType="Boolean" logicalName="PM1.ValveAV59.SetPoint" value="" eventTrigger="" units="" description="" isArray="false" />
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- <SVID id="336010002" valueType="Boolean" logicalName="PM1.ValveAV6.SetPoint" value="" eventTrigger="" units="" description="" isArray="false" />
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- <SVID id="336030002" valueType="Boolean" logicalName="PM1.ValveAV65.SetPoint" value="" eventTrigger="" units="" description="" isArray="false" />
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- <SVID id="540048222" valueType="F8" logicalName="PM1.MfcN3.Feedback" value="" eventTrigger="" units="" description="" isArray="false" />
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- <SVID id="540050222" valueType="F8" logicalName="PM1.MfcNX.Feedback" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="540051216" valueType="F8" logicalName="PM1.MfcNY.SetPoint" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="540051222" valueType="F8" logicalName="PM1.MfcNY.Feedback" value="" eventTrigger="" units="" description="" isArray="false" />
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- <SVID id="540054228" valueType="Boolean" logicalName="PM1.SensorEXTIN2.Value" value="" eventTrigger="" units="" description="" isArray="false" />
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- <SVID id="540056228" valueType="Boolean" logicalName="PM1.SensorEXTIN4.Value" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="540057228" valueType="Boolean" logicalName="PM1.SensorEXTIN5.Value" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="540058228" valueType="Boolean" logicalName="PM1.SensorEXTIN6.Value" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="540059228" valueType="Boolean" logicalName="PM1.SensorEXTIN7.Value" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="540060228" valueType="Boolean" logicalName="PM1.SensorEXTIN8.Value" value="" eventTrigger="" units="" description="" isArray="false" />
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- <SVID id="540062228" valueType="Boolean" logicalName="PM1.SensorN2OPressureOK.Value" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="540063228" valueType="Boolean" logicalName="PM1.SensorNH3PressureOK.Value" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="540064228" valueType="Boolean" logicalName="PM1.SensorPSW1LOW.Value" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="540065228" valueType="Boolean" logicalName="PM1.SensorPSW2LOW.Value" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="540066228" valueType="Boolean" logicalName="PM1.SensorPureN2PressureOK.Value" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="540067228" valueType="Boolean" logicalName="PM1.SensorSiH2CL2PressureOK.Value" value="" eventTrigger="" units="" description="" isArray="false" />
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- <SVID id="940010015" valueType="Boolean" logicalName="CarrierRobot.IsWaferPresenceOnBlade1" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="940010016" valueType="Boolean" logicalName="CarrierRobot.IsWaferPresenceOnBlade2" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="940010017" valueType="Boolean" logicalName="CarrierRobot.IsWaferPresenceOnBlade3" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="940010018" valueType="Boolean" logicalName="CarrierRobot.IsWaferPresenceOnBlade4" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="940010019" valueType="Boolean" logicalName="CarrierRobot.IsWaferPresenceOnBlade5" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="940010020" valueType="Ascii" logicalName="CarrierRobot.SwapCycledCount" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="950010001" valueType="Ascii" logicalName="FIMS1.FIMSCycledCount" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="950010002" valueType="Boolean" logicalName="FIMS1.IsError" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="950010003" valueType="Boolean" logicalName="FIMS1.IsOnline" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="950010004" valueType="F8" logicalName="FIMS1.SlotNo1Distance" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="950010005" valueType="F8" logicalName="FIMS1.SlotPitchDistance" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="950010006" valueType="F8" logicalName="FIMS1.ThicknessPermissions" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="950010007" valueType="F8" logicalName="FIMS1.ThicknessReferenceValue" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="960010001" valueType="Ascii" logicalName="FIMS2.FIMSCycledCount" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="960010002" valueType="Boolean" logicalName="FIMS2.IsError" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="960010003" valueType="Boolean" logicalName="FIMS2.IsOnline" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="960010004" valueType="F8" logicalName="FIMS2.SlotNo1Distance" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="960010005" valueType="F8" logicalName="FIMS2.SlotPitchDistance" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="960010006" valueType="F8" logicalName="FIMS2.ThicknessPermissions" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="960010007" valueType="F8" logicalName="FIMS2.ThicknessReferenceValue" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="990010001" valueType="Ascii" logicalName="RecipeEdit.CurrentStepID" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="990010002" valueType="Boolean" logicalName="RecipeEdit.IsEnableNext" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="990010003" valueType="Boolean" logicalName="RecipeEdit.IsEnablePrevious" value="" eventTrigger="" units="" description="" isArray="false" />
- </StatusVariables>
- <EquipmentConstants>
- <ECID id="2000" valueType="U2" logicalName="EstablishCommunicationsTimeout" value="2" min="0" max="100" eventTrigger="" units="" description="" isArray="false" />
- <ECID id="2001" valueType="U4" logicalName="MaxSpoolTransmit" value="100" min="0" max="100" eventTrigger="" units="" description="" isArray="false" />
- <ECID id="2003" valueType="Boolean" logicalName="OverWriteSpool" value="FALSE" min="0" max="100" eventTrigger="" units="" description="" isArray="false" />
- <ECID id="2005" valueType="U4" logicalName="MaxSpoolCapacity" value="100" min="0" max="100" eventTrigger="" units="" description="" isArray="false" />
- <ECID id="2006" valueType="Boolean" logicalName="SpoolEnabled" value="False" min="0" max="100" eventTrigger="" units="" description="" isArray="false" />
- <ECID id="2007" valueType="U1" logicalName="TimeFormat" value="0" min="0" max="100" eventTrigger="" units="" description="" isArray="false" />
- <ECID id="10002116" valueType="Ascii" logicalName="System.ATMProcessDelayTime" value="" min="" max="" eventTrigger="" units="" description="ATM Process Delay Time" isArray="false" />
- <ECID id="10002117" valueType="Ascii" logicalName="System.AutoAlignManualTransfer" value="" min="" max="" eventTrigger="" units="" description="Auto Align Manual Transfer" isArray="false" />
- <ECID id="10002118" valueType="Ascii" logicalName="System.AutoPassCooling" value="" min="" max="" eventTrigger="" units="" description="Auto Pass Cooling" isArray="false" />
- <ECID id="10002119" valueType="Ascii" logicalName="System.BypassInterlock" value="" min="" max="" eventTrigger="" units="" description="Bypass Interlock" isArray="false" />
- <ECID id="10002120" valueType="Ascii" logicalName="System.CycleCount" value="" min="" max="" eventTrigger="" units="" description="Cycle Count" isArray="false" />
- <ECID id="10002121" valueType="Ascii" logicalName="System.DataCollectionInterval" value="" min="" max="" eventTrigger="" units="" description="Data Collection Interval" isArray="false" />
- <ECID id="10002159" valueType="Ascii" logicalName="System.IsATMMode" value="" min="" max="" eventTrigger="" units="" description="Is ATM Mode" isArray="false" />
- <ECID id="10002160" valueType="Ascii" logicalName="System.IsCycleMode" value="" min="" max="" eventTrigger="" units="" description="Is Cycle Mode" isArray="false" />
- <ECID id="10002161" valueType="Ascii" logicalName="System.IsServiceControlMode" value="" min="" max="" eventTrigger="" units="" description="Is Service Control Mode" isArray="false" />
- <ECID id="10002162" valueType="Ascii" logicalName="System.IsSimulatorMode" value="" min="" max="" eventTrigger="" units="" description="Is Simulator Mode" isArray="false" />
- <ECID id="10002165" valueType="Ascii" logicalName="System.LogsSaveDays" value="" min="" max="" eventTrigger="" units="" description="Logs Save Days" isArray="false" />
- <ECID id="10002183" valueType="Ascii" logicalName="System.TotalCycledWafer" value="" min="" max="" eventTrigger="" units="" description="Total Cycled Wafer" isArray="false" />
- <ECID id="10002184" valueType="Ascii" logicalName="System.CassetteSlotCount" value="" min="" max="" eventTrigger="" units="" description="Cassette Slot Count" isArray="false" />
- <ECID id="10002185" valueType="Ascii" logicalName="System.ChargingOrderBySort" value="" min="" max="" eventTrigger="" units="" description="Charging Order By Sort" isArray="false" />
- <ECID id="10002186" valueType="Ascii" logicalName="System.ChargingOrderFromCassette" value="" min="" max="" eventTrigger="" units="" description="Charging Order From Cassette" isArray="false" />
- <ECID id="10002187" valueType="Ascii" logicalName="System.ChargingOrderToBoat" value="" min="" max="" eventTrigger="" units="" description="Charging Order To Boat" isArray="false" />
- <ECID id="10002188" valueType="Ascii" logicalName="System.EnablePopupKeyboard" value="" min="" max="" eventTrigger="" units="" description="Enable Popup Keyboard" isArray="false" />
- <ECID id="10002189" valueType="Ascii" logicalName="System.EnableWarningFailedWafer" value="" min="" max="" eventTrigger="" units="" description="Enable Warning Failed Wafer" isArray="false" />
- <ECID id="10002190" valueType="Ascii" logicalName="System.EnableWarningWaferProcessState" value="" min="" max="" eventTrigger="" units="" description="Enable Warning Wafer Process State" isArray="false" />
- <ECID id="10002191" valueType="Ascii" logicalName="System.IsAutoFillCarrierId" value="" min="" max="" eventTrigger="" units="" description="Load Is Auto Fill CarrierId" isArray="false" />
- <ECID id="10002192" valueType="Ascii" logicalName="System.IsEnableBoatChargeMapping" value="" min="" max="" eventTrigger="" units="" description="Is Enable Boat Charge Mapping" isArray="false" />
- <ECID id="10002193" valueType="Ascii" logicalName="System.IsEnableBoatDischargeMapping" value="" min="" max="" eventTrigger="" units="" description="Is Enable Boat Discharge Mapping" isArray="false" />
- <ECID id="10002194" valueType="Ascii" logicalName="System.IsEnableDummyWaferDischarge" value="" min="" max="" eventTrigger="" units="" description="Is Enable Dummy Wafer Discharge" isArray="false" />
- <ECID id="10002195" valueType="Ascii" logicalName="System.IsEnableFIMSChargeMapping" value="" min="" max="" eventTrigger="" units="" description="Is Enable FIMS Charge Mapping" isArray="false" />
- <ECID id="10002196" valueType="Ascii" logicalName="System.IsIgnoreSaveDB" value="" min="" max="" eventTrigger="" units="" description="Ignore Save IO data to DB" isArray="false" />
- <ECID id="10002197" valueType="Ascii" logicalName="System.IsLeaveAsAllWaferWhenWaferShort" value="" min="" max="" eventTrigger="" units="" description="Is LeaveAs All Wafer When Wafer Short" isArray="false" />
- <ECID id="10002198" valueType="Ascii" logicalName="System.LightCurtain" value="" min="" max="" eventTrigger="" units="" description="light curtain" isArray="false" />
- <ECID id="10002199" valueType="Ascii" logicalName="System.LoadNeedPressCassetteInButton" value="" min="" max="" eventTrigger="" units="" description="Load Need Press Cassette In Button" isArray="false" />
- <ECID id="10002200" valueType="Ascii" logicalName="System.LoadNeedPressCassetteOutButton" value="" min="" max="" eventTrigger="" units="" description="Load Need Press Cassette Out Button" isArray="false" />
- <ECID id="10002201" valueType="Ascii" logicalName="System.ModbusCommunicationEnableLogMessage" value="" min="" max="" eventTrigger="" units="" description="Modbus Communication Enable Log Message" isArray="false" />
- <ECID id="10002202" valueType="Ascii" logicalName="System.UnloadNeedPressCassetteInButton" value="" min="" max="" eventTrigger="" units="" description="Unload Need Press Cassette In Button" isArray="false" />
- <ECID id="10002203" valueType="Ascii" logicalName="System.UnloadNeedPressCassetteOutButton" value="" min="" max="" eventTrigger="" units="" description="Unload Need Press Cassette Out Button" isArray="false" />
- <ECID id="10031122" valueType="Ascii" logicalName="System.FA.ConnectionMode" value="" min="" max="" eventTrigger="" units="" description="Connection Mode" isArray="false" />
- <ECID id="10031123" valueType="Ascii" logicalName="System.FA.DefaultCommunicationState" value="" min="" max="" eventTrigger="" units="" description="Default Communication State" isArray="false" />
- <ECID id="10031124" valueType="Ascii" logicalName="System.FA.DefaultControlState" value="" min="" max="" eventTrigger="" units="" description="Default Control State" isArray="false" />
- <ECID id="10031125" valueType="Ascii" logicalName="System.FA.DefaultControlSubState" value="" min="" max="" eventTrigger="" units="" description="Default Control SubState" isArray="false" />
- <ECID id="10031126" valueType="Ascii" logicalName="System.FA.DeviceId" value="" min="" max="" eventTrigger="" units="" description="Device ID" isArray="false" />
- <ECID id="10031127" valueType="Ascii" logicalName="System.FA.EnableSpooling" value="" min="" max="" eventTrigger="" units="" description="Enable Spooling" isArray="false" />
- <ECID id="10031128" valueType="Ascii" logicalName="System.FA.LinkTestInterval" value="" min="" max="" eventTrigger="" units="" description="Link Test Interval" isArray="false" />
- <ECID id="10031129" valueType="Ascii" logicalName="System.FA.LocalIpAddress" value="" min="" max="" eventTrigger="" units="" description="Local IP Address" isArray="false" />
- <ECID id="10031130" valueType="Ascii" logicalName="System.FA.LocalPortNumber" value="" min="" max="" eventTrigger="" units="" description="Local Port Number" isArray="false" />
- <ECID id="10031131" valueType="Ascii" logicalName="System.FA.LP1BypassCarrierIDReader" value="" min="" max="" eventTrigger="" units="" description="LP1 Bypass CarrierID Reader" isArray="false" />
- <ECID id="10031132" valueType="Ascii" logicalName="System.FA.LP1DefaultAccessMode" value="" min="" max="" eventTrigger="" units="" description="LP1 Default Access Mode" isArray="false" />
- <ECID id="10031133" valueType="Ascii" logicalName="System.FA.LP1DefaultTransferState" value="" min="" max="" eventTrigger="" units="" description="LP1 Default Transfer State" isArray="false" />
- <ECID id="10031134" valueType="Ascii" logicalName="System.FA.LP2BypassCarrierIDReader" value="" min="" max="" eventTrigger="" units="" description="LP2 Bypass CarrierID Reader" isArray="false" />
- <ECID id="10031135" valueType="Ascii" logicalName="System.FA.LP2DefaultAccessMode" value="" min="" max="" eventTrigger="" units="" description="LP2 Default Access Mode" isArray="false" />
- <ECID id="10031136" valueType="Ascii" logicalName="System.FA.LP2DefaultTransferState" value="" min="" max="" eventTrigger="" units="" description="LP2 Default Transfer State" isArray="false" />
- <ECID id="10031137" valueType="Ascii" logicalName="System.FA.LP3BypassCarrierIDReader" value="" min="" max="" eventTrigger="" units="" description="LP3 Bypass CarrierID Reader" isArray="false" />
- <ECID id="10031138" valueType="Ascii" logicalName="System.FA.LP3DefaultAccessMode" value="" min="" max="" eventTrigger="" units="" description="LP3 Default Access Mode" isArray="false" />
- <ECID id="10031139" valueType="Ascii" logicalName="System.FA.LP3DefaultTransferState" value="" min="" max="" eventTrigger="" units="" description="LP3 Default Transfer State" isArray="false" />
- <ECID id="10031140" valueType="Ascii" logicalName="System.FA.LP4BypassCarrierIDReader" value="" min="" max="" eventTrigger="" units="" description="LP4 Bypass CarrierID Reader" isArray="false" />
- <ECID id="10031141" valueType="Ascii" logicalName="System.FA.LP4DefaultAccessMode" value="" min="" max="" eventTrigger="" units="" description="LP4 Default Access Mode" isArray="false" />
- <ECID id="10031142" valueType="Ascii" logicalName="System.FA.LP4DefaultTransferState" value="" min="" max="" eventTrigger="" units="" description="LP4 Default Transfer State" isArray="false" />
- <ECID id="10031143" valueType="Ascii" logicalName="System.FA.LP5BypassCarrierIDReader" value="" min="" max="" eventTrigger="" units="" description="LP5 Bypass CarrierID Reader" isArray="false" />
- <ECID id="10031144" valueType="Ascii" logicalName="System.FA.LP5DefaultAccessMode" value="" min="" max="" eventTrigger="" units="" description="LP5 Default Access Mode" isArray="false" />
- <ECID id="10031145" valueType="Ascii" logicalName="System.FA.LP5DefaultTransferState" value="" min="" max="" eventTrigger="" units="" description="LP5 Default Transfer State" isArray="false" />
- <ECID id="10031146" valueType="Ascii" logicalName="System.FA.LP6BypassCarrierIDReader" value="" min="" max="" eventTrigger="" units="" description="LP6 Bypass CarrierID Reader" isArray="false" />
- <ECID id="10031147" valueType="Ascii" logicalName="System.FA.LP6DefaultAccessMode" value="" min="" max="" eventTrigger="" units="" description="LP6 Default Access Mode" isArray="false" />
- <ECID id="10031148" valueType="Ascii" logicalName="System.FA.LP6DefaultTransferState" value="" min="" max="" eventTrigger="" units="" description="LP6 Default Transfer State" isArray="false" />
- <ECID id="10031149" valueType="Ascii" logicalName="System.FA.RemoteIpAddress" value="" min="" max="" eventTrigger="" units="" description="Remote IP Address" isArray="false" />
- <ECID id="10031150" valueType="Ascii" logicalName="System.FA.RemotePortNumber" value="" min="" max="" eventTrigger="" units="" description="Remote Port Number" isArray="false" />
- <ECID id="10031151" valueType="Ascii" logicalName="System.FA.T3Timeout" value="" min="" max="" eventTrigger="" units="" description="T3 Timeout" isArray="false" />
- <ECID id="10031152" valueType="Ascii" logicalName="System.FA.T5Timeout" value="" min="" max="" eventTrigger="" units="" description="T5 Timeout" isArray="false" />
- <ECID id="10031153" valueType="Ascii" logicalName="System.FA.T6Timeout" value="" min="" max="" eventTrigger="" units="" description="T6 Timeout" isArray="false" />
- <ECID id="10031154" valueType="Ascii" logicalName="System.FA.T7Timeout" value="" min="" max="" eventTrigger="" units="" description="T7 Timeout" isArray="false" />
- <ECID id="10031155" valueType="Ascii" logicalName="System.FA.T8Timeout" value="" min="" max="" eventTrigger="" units="" description="T8 Timeout" isArray="false" />
- <ECID id="10032156" valueType="Ascii" logicalName="System.FDC.DataGroupName" value="" min="" max="" eventTrigger="" units="" description="FDC data group" isArray="false" />
- <ECID id="10032157" valueType="Ascii" logicalName="System.FDC.DelayTime" value="" min="" max="" eventTrigger="" units="" description="Step Delay time before collection data" isArray="false" />
- <ECID id="10032158" valueType="Ascii" logicalName="System.FDC.SampleInterval" value="" min="" max="" eventTrigger="" units="" description="interval time collection sample data" isArray="false" />
- <ECID id="10033163" valueType="Ascii" logicalName="System.Job.BuzzerTimeWhenJobDone" value="" min="" max="" eventTrigger="" units="" description="buzzer time after job done, -1=never stop, 0=silent,xxx=buzzer time" isArray="false" />
- <ECID id="10033164" valueType="Ascii" logicalName="System.Job.EnablePopDialogWhenJobDone" value="" min="" max="" eventTrigger="" units="" description="Whether pop window after job done" isArray="false" />
- <ECID id="10034166" valueType="Ascii" logicalName="System.Recipe.ChamberModules" value="" min="" max="" eventTrigger="" units="" description="Chamber Modules" isArray="false" />
- <ECID id="10034167" valueType="Ascii" logicalName="System.Recipe.SupportedChamberType" value="" min="" max="" eventTrigger="" units="" description="Supported Chamber Type" isArray="false" />
- <ECID id="10034168" valueType="Ascii" logicalName="System.Recipe.SupportedProcessType" value="" min="" max="" eventTrigger="" units="" description="Supported Process Type" isArray="false" />
- <ECID id="10034169" valueType="Ascii" logicalName="System.Recipe.Abort Recipe" value="" min="" max="" eventTrigger="" units="" description="Default abort recipe" isArray="false" />
- <ECID id="10034170" valueType="Ascii" logicalName="System.Recipe.DefaultJobRecipeName" value="" min="" max="" eventTrigger="" units="" description="Default recipe name" isArray="false" />
- <ECID id="10034171" valueType="Ascii" logicalName="System.Recipe.DefaultLayoutRecipeName" value="" min="" max="" eventTrigger="" units="" description="Default recipe name" isArray="false" />
- <ECID id="10034172" valueType="Ascii" logicalName="System.Recipe.DefaultProcessRecipe" value="" min="" max="" eventTrigger="" units="" description="Default process recipe" isArray="false" />
- <ECID id="10034173" valueType="Ascii" logicalName="System.Recipe.DefaultProcessRecipeName" value="" min="" max="" eventTrigger="" units="" description="Default recipe name" isArray="false" />
- <ECID id="10034174" valueType="Ascii" logicalName="System.Recipe.DefaultStepNameList" value="" min="" max="" eventTrigger="" units="" description="Default step name list" isArray="false" />
- <ECID id="10034175" valueType="Ascii" logicalName="System.Recipe.ExcuteAfterRecipeComplete" value="" min="" max="" eventTrigger="" units="" description="Excute After Recipe Complete" isArray="false" />
- <ECID id="10034176" valueType="Ascii" logicalName="System.Recipe.Idle Recipe" value="" min="" max="" eventTrigger="" units="" description="Default idle recipe" isArray="false" />
- <ECID id="10034177" valueType="Ascii" logicalName="System.Recipe.RecipeSaveNumber" value="" min="" max="" eventTrigger="" units="" description="Step Delay time before collection data" isArray="false" />
- <ECID id="10034178" valueType="Ascii" logicalName="System.Recipe.Reset Recipe" value="" min="" max="" eventTrigger="" units="" description="Default reset recipe" isArray="false" />
- <ECID id="10034179" valueType="Ascii" logicalName="System.Recipe.SupportedAbortType" value="" min="" max="" eventTrigger="" units="" description="Supported Abort Recipe Type" isArray="false" />
- <ECID id="10034180" valueType="Ascii" logicalName="System.Recipe.SupportedAlarmType" value="" min="" max="" eventTrigger="" units="" description="Supported Alarm Recipe Type" isArray="false" />
- <ECID id="10034181" valueType="Ascii" logicalName="System.Recipe.SupportedIdleType" value="" min="" max="" eventTrigger="" units="" description="Supported Idle Recipe Type" isArray="false" />
- <ECID id="10034182" valueType="Ascii" logicalName="System.Recipe.SupportedJobType" value="" min="" max="" eventTrigger="" units="" description="Supported Job Recipe Type" isArray="false" />
- <ECID id="10034183" valueType="Ascii" logicalName="System.Recipe.SupportedLayoutType" value="" min="" max="" eventTrigger="" units="" description="Supported Layout Recipe Type" isArray="false" />
- <ECID id="10034184" valueType="Ascii" logicalName="System.Recipe.SupportedResetType" value="" min="" max="" eventTrigger="" units="" description="Supported Reset Recipe Type" isArray="false" />
- <ECID id="10034185" valueType="Ascii" logicalName="System.Recipe.SupportedSubType" value="" min="" max="" eventTrigger="" units="" description="Supported Sub Recipe Type" isArray="false" />
- <ECID id="10035169" valueType="Ascii" logicalName="System.Scheduler.GroupWaferBySequence" value="" min="" max="" eventTrigger="" units="" description="Group Wafer By Sequence" isArray="false" />
- <ECID id="10035170" valueType="Ascii" logicalName="System.Scheduler.IsRunInParallelMode" value="" min="" max="" eventTrigger="" units="" description="IsRunInParallelMode" isArray="false" />
- <ECID id="10035171" valueType="Ascii" logicalName="System.Scheduler.WaferCountBelowWhichStartNewProcessJob" value="" min="" max="" eventTrigger="" units="" description="Wafer Count Below Which Start New Process Job" isArray="false" />
- <ECID id="10035172" valueType="Ascii" logicalName="System.Scheduler.WaitLoadTimeOut" value="" min="" max="" eventTrigger="" units="" description="Wait Load TimeOut" isArray="false" />
- <ECID id="10036173" valueType="Ascii" logicalName="System.SetUp.IsBufferInstalled" value="" min="" max="" eventTrigger="" units="" description="Is Buffer Installed" isArray="false" />
- <ECID id="10036174" valueType="Ascii" logicalName="System.SetUp.IsLP1Installed" value="" min="" max="" eventTrigger="" units="" description="Is LP1 Installed" isArray="false" />
- <ECID id="10036175" valueType="Ascii" logicalName="System.SetUp.IsLP2Installed" value="" min="" max="" eventTrigger="" units="" description="Is LP2 Installed" isArray="false" />
- <ECID id="10036176" valueType="Ascii" logicalName="System.SetUp.IsLP3Installed" value="" min="" max="" eventTrigger="" units="" description="Is LP3 Installed" isArray="false" />
- <ECID id="10036177" valueType="Ascii" logicalName="System.SetUp.IsLP4Installed" value="" min="" max="" eventTrigger="" units="" description="Is LP4 Installed" isArray="false" />
- <ECID id="10036178" valueType="Ascii" logicalName="System.SetUp.IsPM1Installed" value="" min="" max="" eventTrigger="" units="" description="Is PM1 Installed" isArray="false" />
- <ECID id="10036179" valueType="Ascii" logicalName="System.SetUp.IsPM2Installed" value="" min="" max="" eventTrigger="" units="" description="Is PM2 Installed" isArray="false" />
- <ECID id="10036180" valueType="Ascii" logicalName="System.SetUp.ExportMaxRow" value="" min="" max="" eventTrigger="" units="" description="Export Max Row" isArray="false" />
- <ECID id="10036181" valueType="Ascii" logicalName="System.SetUp.IsFIMS1Installed" value="" min="" max="" eventTrigger="" units="" description="Is FIMS1 Installed" isArray="false" />
- <ECID id="10036182" valueType="Ascii" logicalName="System.SetUp.IsFIMS2Installed" value="" min="" max="" eventTrigger="" units="" description="Is FIMS2 Installed" isArray="false" />
- <ECID id="10036183" valueType="Ascii" logicalName="System.SetUp.IsStocker10Installed" value="" min="" max="" eventTrigger="" units="" description="Is Stocker10 Installed" isArray="false" />
- <ECID id="10036184" valueType="Ascii" logicalName="System.SetUp.IsStocker11Installed" value="" min="" max="" eventTrigger="" units="" description="Is Stocker11 Installed" isArray="false" />
- <ECID id="10036185" valueType="Ascii" logicalName="System.SetUp.IsStocker12Installed" value="" min="" max="" eventTrigger="" units="" description="Is Stocker12 Installed" isArray="false" />
- <ECID id="10036186" valueType="Ascii" logicalName="System.SetUp.IsStocker13Installed" value="" min="" max="" eventTrigger="" units="" description="Is Stocker13 Installed" isArray="false" />
- <ECID id="10036187" valueType="Ascii" logicalName="System.SetUp.IsStocker14Installed" value="" min="" max="" eventTrigger="" units="" description="Is Stocker14 Installed" isArray="false" />
- <ECID id="10036188" valueType="Ascii" logicalName="System.SetUp.IsStocker15Installed" value="" min="" max="" eventTrigger="" units="" description="Is Stocker15 Installed" isArray="false" />
- <ECID id="10036189" valueType="Ascii" logicalName="System.SetUp.IsStocker16Installed" value="" min="" max="" eventTrigger="" units="" description="Is Stocker16 Installed" isArray="false" />
- <ECID id="10036190" valueType="Ascii" logicalName="System.SetUp.IsStocker17Installed" value="" min="" max="" eventTrigger="" units="" description="Is Stocker17 Installed" isArray="false" />
- <ECID id="10036191" valueType="Ascii" logicalName="System.SetUp.IsStocker18Installed" value="" min="" max="" eventTrigger="" units="" description="Is Stocker18 Installed" isArray="false" />
- <ECID id="10036192" valueType="Ascii" logicalName="System.SetUp.IsStocker1Installed" value="" min="" max="" eventTrigger="" units="" description="Is Stocker1 Installed" isArray="false" />
- <ECID id="10036193" valueType="Ascii" logicalName="System.SetUp.IsStocker2Installed" value="" min="" max="" eventTrigger="" units="" description="Is Stocker2 Installed" isArray="false" />
- <ECID id="10036194" valueType="Ascii" logicalName="System.SetUp.IsStocker3Installed" value="" min="" max="" eventTrigger="" units="" description="Is Stocker3 Installed" isArray="false" />
- <ECID id="10036195" valueType="Ascii" logicalName="System.SetUp.IsStocker4Installed" value="" min="" max="" eventTrigger="" units="" description="Is Stocker4 Installed" isArray="false" />
- <ECID id="10036196" valueType="Ascii" logicalName="System.SetUp.IsStocker5Installed" value="" min="" max="" eventTrigger="" units="" description="Is Stocker5 Installed" isArray="false" />
- <ECID id="10036197" valueType="Ascii" logicalName="System.SetUp.IsStocker6Installed" value="" min="" max="" eventTrigger="" units="" description="Is Stocker6 Installed" isArray="false" />
- <ECID id="10036198" valueType="Ascii" logicalName="System.SetUp.IsStocker7Installed" value="" min="" max="" eventTrigger="" units="" description="Is Stocker7 Installed" isArray="false" />
- <ECID id="10036199" valueType="Ascii" logicalName="System.SetUp.IsStocker8Installed" value="" min="" max="" eventTrigger="" units="" description="Is Stocker8 Installed" isArray="false" />
- <ECID id="10036200" valueType="Ascii" logicalName="System.SetUp.IsStocker9Installed" value="" min="" max="" eventTrigger="" units="" description="Is Stocker9 Installed" isArray="false" />
- <ECID id="10036201" valueType="Ascii" logicalName="System.SetUp.ToolType" value="" min="" max="" eventTrigger="" units="" description="Tool Type" isArray="false" />
- <ECID id="10037180" valueType="Ascii" logicalName="System.SignalTower.Light" value="" min="" max="" eventTrigger="" units="" description="设置灯的种类，顺序" isArray="false" />
- <ECID id="10037181" valueType="Ascii" logicalName="System.SignalTower.Trigger" value="" min="" max="" eventTrigger="" units="" description="设置触发灯塔的项" isArray="false" />
- <ECID id="10037182" valueType="Ascii" logicalName="System.SignalTower.Value" value="" min="" max="" eventTrigger="" units="" description="设置灯塔触发的逻辑关系" isArray="false" />
- <ECID id="10090001" valueType="Ascii" logicalName="System.EditParameter.EditChamberType" value="" min="" max="" eventTrigger="" units="" description="Edit Chamber Type" isArray="false" />
- <ECID id="10090002" valueType="Ascii" logicalName="System.EditParameter.EditParameterType" value="" min="" max="" eventTrigger="" units="" description="Alarm Condition,Temp Correction,Temp PID,Temp Profile,Temp Auto PID,Leak Check Condition,APC PID" isArray="false" />
- <ECID id="10100001" valueType="Ascii" logicalName="System.Job.CreateJob.CarrierPara" value="" min="" max="" eventTrigger="" units="" description="CarrierPara" isArray="false" />
- <ECID id="10100002" valueType="Ascii" logicalName="System.Job.CreateJob.Charge" value="" min="" max="" eventTrigger="" units="" description="Charge" isArray="false" />
- <ECID id="10100003" valueType="Ascii" logicalName="System.Job.CreateJob.CJID" value="" min="" max="" eventTrigger="" units="" description="CJID" isArray="false" />
- <ECID id="10100004" valueType="Ascii" logicalName="System.Job.CreateJob.JobRecipe" value="" min="" max="" eventTrigger="" units="" description="JobRecipe" isArray="false" />
- <ECID id="10100005" valueType="Ascii" logicalName="System.Job.CreateJob.m1CarrierPara" value="" min="" max="" eventTrigger="" units="" description="m1CarrierPara" isArray="false" />
- <ECID id="10100006" valueType="Ascii" logicalName="System.Job.CreateJob.m2CarrierPara" value="" min="" max="" eventTrigger="" units="" description="m2CarrierPara" isArray="false" />
- <ECID id="10100007" valueType="Ascii" logicalName="System.Job.CreateJob.MaterialPCassetteNo" value="" min="" max="" eventTrigger="" units="" description="Material P CassetteNo" isArray="false" />
- <ECID id="10100008" valueType="Ascii" logicalName="System.Job.CreateJob.PCassette" value="" min="" max="" eventTrigger="" units="" description="PCassette" isArray="false" />
- <ECID id="10100009" valueType="Ascii" logicalName="System.Job.CreateJob.PJID" value="" min="" max="" eventTrigger="" units="" description="PJID" isArray="false" />
- <ECID id="10100010" valueType="Ascii" logicalName="System.Job.CreateJob.PJVariable" value="" min="" max="" eventTrigger="" units="" description="PJVariable" isArray="false" />
- <ECID id="10110001" valueType="Ascii" logicalName="System.Job.JOBProcessStock.CarrierPara" value="" min="" max="" eventTrigger="" units="" description="CarrierPara" isArray="false" />
- <ECID id="10110002" valueType="Ascii" logicalName="System.Job.JOBProcessStock.Charge" value="" min="" max="" eventTrigger="" units="" description="Charge" isArray="false" />
- <ECID id="10110003" valueType="Ascii" logicalName="System.Job.JOBProcessStock.CJID" value="" min="" max="" eventTrigger="" units="" description="CJID" isArray="false" />
- <ECID id="10110004" valueType="Ascii" logicalName="System.Job.JOBProcessStock.JobRecipe" value="" min="" max="" eventTrigger="" units="" description="JobRecipe" isArray="false" />
- <ECID id="10110005" valueType="Ascii" logicalName="System.Job.JOBProcessStock.m1CarrierPara" value="" min="" max="" eventTrigger="" units="" description="m1CarrierPara" isArray="false" />
- <ECID id="10110006" valueType="Ascii" logicalName="System.Job.JOBProcessStock.m2CarrierPara" value="" min="" max="" eventTrigger="" units="" description="m2CarrierPara" isArray="false" />
- <ECID id="10110007" valueType="Ascii" logicalName="System.Job.JOBProcessStock.MaterialPCassetteNo" value="" min="" max="" eventTrigger="" units="" description="Material P CassetteNo" isArray="false" />
- <ECID id="10110008" valueType="Ascii" logicalName="System.Job.JOBProcessStock.PCassette" value="" min="" max="" eventTrigger="" units="" description="PCassette" isArray="false" />
- <ECID id="10110009" valueType="Ascii" logicalName="System.Job.JOBProcessStock.PJID" value="" min="" max="" eventTrigger="" units="" description="PJID" isArray="false" />
- <ECID id="10110010" valueType="Ascii" logicalName="System.Job.JOBProcessStock.PJVariable" value="" min="" max="" eventTrigger="" units="" description="PJVariable" isArray="false" />
- <ECID id="10110011" valueType="Ascii" logicalName="System.Job.JOBProcessStock.WaferType" value="" min="" max="" eventTrigger="" units="" description="WaferType" isArray="false" />
- <ECID id="10120001" valueType="Ascii" logicalName="System.Job.JOBUnLoad.CarrierPara" value="" min="" max="" eventTrigger="" units="" description="Carrier Para" isArray="false" />
- <ECID id="10120002" valueType="Ascii" logicalName="System.Job.JOBUnLoad.TransferType" value="" min="" max="" eventTrigger="" units="" description="Transfer Type" isArray="false" />
- <ECID id="10120003" valueType="Ascii" logicalName="System.Job.JOBUnLoad.WaferType" value="" min="" max="" eventTrigger="" units="" description="Wafer Type" isArray="false" />
- <ECID id="10130001" valueType="Ascii" logicalName="System.Job.Unload.MaterialPCassetteNo" value="" min="" max="" eventTrigger="" units="" description="Material P CassetteNo" isArray="false" />
- <ECID id="10130002" valueType="Ascii" logicalName="System.Job.Unload.PCassette" value="" min="" max="" eventTrigger="" units="" description="PCassette" isArray="false" />
- <ECID id="10140001" valueType="Ascii" logicalName="System.ShutDown.ShutDown" value="" min="" max="" eventTrigger="" units="" description="ShutDown" isArray="false" />
- <ECID id="10150001" valueType="Ascii" logicalName="System.Step Name.Count" value="" min="" max="" eventTrigger="" units="" description="Step Name Length" isArray="false" />
- <ECID id="10150002" valueType="Ascii" logicalName="System.Step Name.Name" value="" min="" max="" eventTrigger="" units="" description="Name" isArray="false" />
- <ECID id="10160001" valueType="Ascii" logicalName="System.Stocker.LP1Type" value="" min="" max="" eventTrigger="" units="" description="LP1 Type" isArray="false" />
- <ECID id="10160002" valueType="Ascii" logicalName="System.Stocker.LP2Type" value="" min="" max="" eventTrigger="" units="" description="LP2 Type" isArray="false" />
- <ECID id="10160003" valueType="Ascii" logicalName="System.Stocker.LP3Type" value="" min="" max="" eventTrigger="" units="" description="LP3 Type" isArray="false" />
- <ECID id="10160004" valueType="Ascii" logicalName="System.Stocker.LP4Type" value="" min="" max="" eventTrigger="" units="" description="LP4 Type" isArray="false" />
- <ECID id="10160005" valueType="Ascii" logicalName="System.Stocker.Stocker10WaferType" value="" min="" max="" eventTrigger="" units="" description="Stocker10 Type" isArray="false" />
- <ECID id="10160006" valueType="Ascii" logicalName="System.Stocker.Stocker11WaferType" value="" min="" max="" eventTrigger="" units="" description="Stocker11 Type" isArray="false" />
- <ECID id="10160007" valueType="Ascii" logicalName="System.Stocker.Stocker12WaferType" value="" min="" max="" eventTrigger="" units="" description="Stocker12 Type" isArray="false" />
- <ECID id="10160008" valueType="Ascii" logicalName="System.Stocker.Stocker13WaferType" value="" min="" max="" eventTrigger="" units="" description="Stocker13 Type" isArray="false" />
- <ECID id="10160009" valueType="Ascii" logicalName="System.Stocker.Stocker14WaferType" value="" min="" max="" eventTrigger="" units="" description="Stocker14 Type" isArray="false" />
- <ECID id="10160010" valueType="Ascii" logicalName="System.Stocker.Stocker15WaferType" value="" min="" max="" eventTrigger="" units="" description="Stocker15 Type" isArray="false" />
- <ECID id="10160011" valueType="Ascii" logicalName="System.Stocker.Stocker16WaferType" value="" min="" max="" eventTrigger="" units="" description="Stocker16 Type" isArray="false" />
- <ECID id="10160012" valueType="Ascii" logicalName="System.Stocker.Stocker17WaferType" value="" min="" max="" eventTrigger="" units="" description="Stocker17 Type" isArray="false" />
- <ECID id="10160013" valueType="Ascii" logicalName="System.Stocker.Stocker18WaferType" value="" min="" max="" eventTrigger="" units="" description="Stocker18 Type" isArray="false" />
- <ECID id="10160014" valueType="Ascii" logicalName="System.Stocker.Stocker1WaferType" value="" min="" max="" eventTrigger="" units="" description="Stocker1 Type" isArray="false" />
- <ECID id="10160015" valueType="Ascii" logicalName="System.Stocker.Stocker2WaferType" value="" min="" max="" eventTrigger="" units="" description="Stocker2 Type" isArray="false" />
- <ECID id="10160016" valueType="Ascii" logicalName="System.Stocker.Stocker3WaferType" value="" min="" max="" eventTrigger="" units="" description="Stocker3 Type" isArray="false" />
- <ECID id="10160017" valueType="Ascii" logicalName="System.Stocker.Stocker4WaferType" value="" min="" max="" eventTrigger="" units="" description="Stocker4 Type" isArray="false" />
- <ECID id="10160018" valueType="Ascii" logicalName="System.Stocker.Stocker5WaferType" value="" min="" max="" eventTrigger="" units="" description="Stocker5 Type" isArray="false" />
- <ECID id="10160019" valueType="Ascii" logicalName="System.Stocker.Stocker6WaferType" value="" min="" max="" eventTrigger="" units="" description="Stocker6 Type" isArray="false" />
- <ECID id="10160020" valueType="Ascii" logicalName="System.Stocker.Stocker7WaferType" value="" min="" max="" eventTrigger="" units="" description="Stocker7 Type" isArray="false" />
- <ECID id="10160021" valueType="Ascii" logicalName="System.Stocker.Stocker8WaferType" value="" min="" max="" eventTrigger="" units="" description="Stocker8 Type" isArray="false" />
- <ECID id="10160022" valueType="Ascii" logicalName="System.Stocker.Stocker9WaferType" value="" min="" max="" eventTrigger="" units="" description="Stocker9 Type" isArray="false" />
- <ECID id="10170001" valueType="Ascii" logicalName="System.StockerDisplayName.Stocker1" value="" min="" max="" eventTrigger="" units="" description="Stocker1 Display Name" isArray="false" />
- <ECID id="10170002" valueType="Ascii" logicalName="System.StockerDisplayName.Stocker10" value="" min="" max="" eventTrigger="" units="" description="Stocker10 Display Name" isArray="false" />
- <ECID id="10170003" valueType="Ascii" logicalName="System.StockerDisplayName.Stocker11" value="" min="" max="" eventTrigger="" units="" description="Stocker11 Display Name" isArray="false" />
- <ECID id="10170004" valueType="Ascii" logicalName="System.StockerDisplayName.Stocker12" value="" min="" max="" eventTrigger="" units="" description="Stocker12 Display Name" isArray="false" />
- <ECID id="10170005" valueType="Ascii" logicalName="System.StockerDisplayName.Stocker13" value="" min="" max="" eventTrigger="" units="" description="Stocker13 Display Name" isArray="false" />
- <ECID id="10170006" valueType="Ascii" logicalName="System.StockerDisplayName.Stocker14" value="" min="" max="" eventTrigger="" units="" description="Stocker14 Display Name" isArray="false" />
- <ECID id="10170007" valueType="Ascii" logicalName="System.StockerDisplayName.Stocker15" value="" min="" max="" eventTrigger="" units="" description="Stocker15 Display Name" isArray="false" />
- <ECID id="10170008" valueType="Ascii" logicalName="System.StockerDisplayName.Stocker16" value="" min="" max="" eventTrigger="" units="" description="Stocker16 Display Name" isArray="false" />
- <ECID id="10170009" valueType="Ascii" logicalName="System.StockerDisplayName.Stocker17" value="" min="" max="" eventTrigger="" units="" description="Stocker17 Display Name" isArray="false" />
- <ECID id="10170010" valueType="Ascii" logicalName="System.StockerDisplayName.Stocker18" value="" min="" max="" eventTrigger="" units="" description="Stocker18 Display Name" isArray="false" />
- <ECID id="10170011" valueType="Ascii" logicalName="System.StockerDisplayName.Stocker2" value="" min="" max="" eventTrigger="" units="" description="Stocker2 Display Name" isArray="false" />
- <ECID id="10170012" valueType="Ascii" logicalName="System.StockerDisplayName.Stocker3" value="" min="" max="" eventTrigger="" units="" description="Stocker3 Display Name" isArray="false" />
- <ECID id="10170013" valueType="Ascii" logicalName="System.StockerDisplayName.Stocker4" value="" min="" max="" eventTrigger="" units="" description="Stocker4 Display Name" isArray="false" />
- <ECID id="10170014" valueType="Ascii" logicalName="System.StockerDisplayName.Stocker5" value="" min="" max="" eventTrigger="" units="" description="Stocker5 Display Name" isArray="false" />
- <ECID id="10170015" valueType="Ascii" logicalName="System.StockerDisplayName.Stocker6" value="" min="" max="" eventTrigger="" units="" description="Stocker6 Display Name" isArray="false" />
- <ECID id="10170016" valueType="Ascii" logicalName="System.StockerDisplayName.Stocker7" value="" min="" max="" eventTrigger="" units="" description="Stocker7 Display Name" isArray="false" />
- <ECID id="10170017" valueType="Ascii" logicalName="System.StockerDisplayName.Stocker8" value="" min="" max="" eventTrigger="" units="" description="Stocker8 Display Name" isArray="false" />
- <ECID id="10170018" valueType="Ascii" logicalName="System.StockerDisplayName.Stocker9" value="" min="" max="" eventTrigger="" units="" description="Stocker9 Display Name" isArray="false" />
- <ECID id="170000000" valueType="Ascii" logicalName="EFEM.Aligner.AlignTimeout" value="" min="" max="" eventTrigger="" units="" description="Align Timeout" isArray="false" />
- <ECID id="170000001" valueType="Ascii" logicalName="EFEM.Aligner.DefaultNotchDegree" value="" min="" max="" eventTrigger="" units="" description="Default Notch Degree" isArray="false" />
- <ECID id="170000002" valueType="Ascii" logicalName="EFEM.Aligner.HomeTimeout" value="" min="" max="" eventTrigger="" units="" description="Home Timeout" isArray="false" />
- <ECID id="170001002" valueType="Ascii" logicalName="EFEM.EfemRobot.HomeTimeout" value="" min="" max="" eventTrigger="" units="" description="Home超时时间" isArray="false" />
- <ECID id="170001003" valueType="Ascii" logicalName="EFEM.EfemRobot.GotoTimeout" value="" min="" max="" eventTrigger="" units="" description="goto超时时间" isArray="false" />
- <ECID id="170001004" valueType="Ascii" logicalName="EFEM.EfemRobot.MapTimeout" value="" min="" max="" eventTrigger="" units="" description="map超时时间" isArray="false" />
- <ECID id="170001005" valueType="Ascii" logicalName="EFEM.EfemRobot.PickTimeout" value="" min="" max="" eventTrigger="" units="" description="Pick Timeout" isArray="false" />
- <ECID id="170001006" valueType="Ascii" logicalName="EFEM.EfemRobot.PlaceTimeout" value="" min="" max="" eventTrigger="" units="" description="Place Timeout" isArray="false" />
- <ECID id="170002002" valueType="Ascii" logicalName="EFEM.HomeTimeout" value="" min="" max="" eventTrigger="" units="" description="Home Timeout" isArray="false" />
- <ECID id="170003002" valueType="Ascii" logicalName="EFEM.LoadPort.HomeTimeout" value="" min="" max="" eventTrigger="" units="" description="Home Timeout" isArray="false" />
- <ECID id="170003007" valueType="Ascii" logicalName="EFEM.LoadPort.EnableAutoCarrierIdRead" value="" min="" max="" eventTrigger="" units="" description="Enable Auto CarrierId Read" isArray="false" />
- <ECID id="170003008" valueType="Ascii" logicalName="EFEM.LoadPort.EnableWaferThicknessCheck" value="" min="" max="" eventTrigger="" units="" description="4'Wafer是否需要输入厚度才能Map" isArray="false" />
- <ECID id="170003009" valueType="Ascii" logicalName="EFEM.LoadPort.MotionTimeout" value="" min="" max="" eventTrigger="" units="" description="Motion Timeout" isArray="false" />
- <ECID id="170003010" valueType="Ascii" logicalName="EFEM.LoadPort.WaferThicknessIndexMap" value="" min="" max="" eventTrigger="" units="" description="Wafer厚度设定映射" isArray="false" />
- <ECID id="330010001" valueType="Ascii" logicalName="PM1.AlarmCondition" value="" min="" max="" eventTrigger="" units="" description="Alarm Condition" isArray="false" />
- <ECID id="330010002" valueType="Ascii" logicalName="PM1.AlarmConditionIndex" value="" min="" max="" eventTrigger="" units="" description="Alarm ConditionIndex" isArray="false" />
- <ECID id="330010003" valueType="Ascii" logicalName="PM1.APCPID" value="" min="" max="" eventTrigger="" units="" description="APCP ID" isArray="false" />
- <ECID id="330010004" valueType="Ascii" logicalName="PM1.APCPIDControllerID" value="" min="" max="" eventTrigger="" units="" description="APCP ID ControllerID" isArray="false" />
- <ECID id="330010005" valueType="Ascii" logicalName="PM1.AUXAlarmCondtionUnit" value="" min="" max="" eventTrigger="" units="" description="AUX Alarm Condtion Unit" isArray="false" />
- <ECID id="330010006" valueType="Ascii" logicalName="PM1.HomeTimeout" value="" min="" max="" eventTrigger="" units="" description="Home Time Out" isArray="false" />
- <ECID id="330010007" valueType="Ascii" logicalName="PM1.IsAIAOFloatType" value="" min="" max="" eventTrigger="" units="" description="Is AI AO Float Type" isArray="false" />
- <ECID id="330010008" valueType="Ascii" logicalName="PM1.IsBWREnable" value="" min="" max="" eventTrigger="" units="" description="IsBWREnable " isArray="false" />
- <ECID id="330010009" valueType="Ascii" logicalName="PM1.IsCEXHEnable" value="" min="" max="" eventTrigger="" units="" description="IsCEXHEnable " isArray="false" />
- <ECID id="330010010" valueType="Ascii" logicalName="PM1.IsCMNTEnable" value="" min="" max="" eventTrigger="" units="" description="IsCMNTEnable " isArray="false" />
- <ECID id="330010011" valueType="Ascii" logicalName="PM1.IsCZEROEnable" value="" min="" max="" eventTrigger="" units="" description="IsCZEROEnable " isArray="false" />
- <ECID id="330010012" valueType="Ascii" logicalName="PM1.IsDEPOEnable" value="" min="" max="" eventTrigger="" units="" description="IsDEPOEnable " isArray="false" />
- <ECID id="330010013" valueType="Ascii" logicalName="PM1.IsDEPOOn" value="" min="" max="" eventTrigger="" units="" description="IsDEPOOn" isArray="false" />
- <ECID id="330010014" valueType="Ascii" logicalName="PM1.IsDP1Enable" value="" min="" max="" eventTrigger="" units="" description="IsDP1Enable " isArray="false" />
- <ECID id="330010015" valueType="Ascii" logicalName="PM1.IsDP2Enable" value="" min="" max="" eventTrigger="" units="" description="IsDP2Enable " isArray="false" />
- <ECID id="330010016" valueType="Ascii" logicalName="PM1.IsDPREnable" value="" min="" max="" eventTrigger="" units="" description="IsDPREnable " isArray="false" />
- <ECID id="330010017" valueType="Ascii" logicalName="PM1.IsF2ClnOn" value="" min="" max="" eventTrigger="" units="" description="IsF2ClnOn" isArray="false" />
- <ECID id="330010018" valueType="Ascii" logicalName="PM1.IsF2Enable" value="" min="" max="" eventTrigger="" units="" description="IsF2Enable " isArray="false" />
- <ECID id="330010019" valueType="Ascii" logicalName="PM1.IsHFClnOn" value="" min="" max="" eventTrigger="" units="" description="IsHFClnOn" isArray="false" />
- <ECID id="330010020" valueType="Ascii" logicalName="PM1.IsHTR1Enable" value="" min="" max="" eventTrigger="" units="" description="IsHTR1Enable " isArray="false" />
- <ECID id="330010021" valueType="Ascii" logicalName="PM1.IsHTR2Enable" value="" min="" max="" eventTrigger="" units="" description="IsHTR2Enable " isArray="false" />
- <ECID id="330010022" valueType="Ascii" logicalName="PM1.IsHTR3Enable" value="" min="" max="" eventTrigger="" units="" description="IsHTR3Enable " isArray="false" />
- <ECID id="330010023" valueType="Ascii" logicalName="PM1.IsNMNTEnable" value="" min="" max="" eventTrigger="" units="" description="IsNMNTEnable " isArray="false" />
- <ECID id="330010024" valueType="Ascii" logicalName="PM1.IsNZEROEnable" value="" min="" max="" eventTrigger="" units="" description="IsNZEROEnable " isArray="false" />
- <ECID id="330010025" valueType="Ascii" logicalName="PM1.IsSIMNTEnable" value="" min="" max="" eventTrigger="" units="" description="IsSIMNTEnable " isArray="false" />
- <ECID id="330010026" valueType="Ascii" logicalName="PM1.IsSIZEROEnable" value="" min="" max="" eventTrigger="" units="" description="IsSIZEROEnable " isArray="false" />
- <ECID id="330010027" valueType="Ascii" logicalName="PM1.LeakCheckCondition" value="" min="" max="" eventTrigger="" units="" description="Leak Check Condition" isArray="false" />
- <ECID id="330010028" valueType="Ascii" logicalName="PM1.MFCAlarmCondtionUnit" value="" min="" max="" eventTrigger="" units="" description="MFC Alarm Condtion Unit" isArray="false" />
- <ECID id="330010029" valueType="Ascii" logicalName="PM1.ProcessRecipe" value="" min="" max="" eventTrigger="" units="" description="Process Recipe" isArray="false" />
- <ECID id="330010030" valueType="Ascii" logicalName="PM1.RecipeChamberType" value="" min="" max="" eventTrigger="" units="" description="Recipe Chamber Type" isArray="false" />
- <ECID id="330010031" valueType="Ascii" logicalName="PM1.TempAutoPID" value="" min="" max="" eventTrigger="" units="" description="Temp Auto PID" isArray="false" />
- <ECID id="330010032" valueType="Ascii" logicalName="PM1.TempCorrection" value="" min="" max="" eventTrigger="" units="" description="Temp Correction" isArray="false" />
- <ECID id="330010033" valueType="Ascii" logicalName="PM1.TempPID" value="" min="" max="" eventTrigger="" units="" description="Temp PID" isArray="false" />
- <ECID id="330010034" valueType="Ascii" logicalName="PM1.TempProfile" value="" min="" max="" eventTrigger="" units="" description="Temp Profile" isArray="false" />
- <ECID id="330020001" valueType="Ascii" logicalName="PM1.APC.AlarmRange" value="" min="" max="" eventTrigger="" units="" description="Alarm Range" isArray="false" />
- <ECID id="330020002" valueType="Ascii" logicalName="PM1.APC.AlarmTime" value="" min="" max="" eventTrigger="" units="" description="Alarm Time" isArray="false" />
- <ECID id="330020003" valueType="Ascii" logicalName="PM1.APC.AngleAlarmCondtionUnit" value="" min="" max="" eventTrigger="" units="" description="Angle Alarm Condtion Unit" isArray="false" />
- <ECID id="330020004" valueType="Ascii" logicalName="PM1.APC.EnableAlarm" value="" min="" max="" eventTrigger="" units="" description="Enable Alarm" isArray="false" />
- <ECID id="330020005" valueType="Ascii" logicalName="PM1.APC.Interlock1" value="" min="" max="" eventTrigger="" units="" description="Interlock1" isArray="false" />
- <ECID id="330020006" valueType="Ascii" logicalName="PM1.APC.Interlock2" value="" min="" max="" eventTrigger="" units="" description="Interlock2" isArray="false" />
- <ECID id="330020007" valueType="Ascii" logicalName="PM1.APC.Interlock3" value="" min="" max="" eventTrigger="" units="" description="Interlock3" isArray="false" />
- <ECID id="330020008" valueType="Ascii" logicalName="PM1.APC.InterlockConstantOfInterlock3" value="" min="" max="" eventTrigger="" units="" description="InterlockConstantOfInterlock3" isArray="false" />
- <ECID id="330020009" valueType="Ascii" logicalName="PM1.APC.P1SensorOffsetSetting" value="" min="" max="" eventTrigger="" units="" description="P1SensorOffsetSetting" isArray="false" />
- <ECID id="330020010" valueType="Ascii" logicalName="PM1.APC.PhyScale" value="" min="" max="" eventTrigger="" units="" description="Physical Scale" isArray="false" />
- <ECID id="330020011" valueType="Ascii" logicalName="PM1.APC.PosMonOffsetSetting" value="" min="" max="" eventTrigger="" units="" description="PosMonOffsetSetting" isArray="false" />
- <ECID id="330020012" valueType="Ascii" logicalName="PM1.APC.PressureScale" value="" min="" max="" eventTrigger="" units="" description="Pressure Scale" isArray="false" />
- <ECID id="330020013" valueType="Ascii" logicalName="PM1.APC.PressureUnit" value="" min="" max="" eventTrigger="" units="" description="Pressure Unit" isArray="false" />
- <ECID id="330020014" valueType="Ascii" logicalName="PM1.APC.SlowExhRate" value="" min="" max="" eventTrigger="" units="" description="SlowExhRate" isArray="false" />
- <ECID id="330020015" valueType="Ascii" logicalName="PM1.APC.SlowVacuumModeSetting" value="" min="" max="" eventTrigger="" units="" description="SlowVacuumModeSetting" isArray="false" />
- <ECID id="330020016" valueType="Ascii" logicalName="PM1.APC.ValveStatusThreshold" value="" min="" max="" eventTrigger="" units="" description="ValveStatusThreshold" isArray="false" />
- <ECID id="330020017" valueType="Ascii" logicalName="PM1.APC.WarningRange" value="" min="" max="" eventTrigger="" units="" description="Warning Range" isArray="false" />
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- <ECID id="330050024" valueType="Ascii" logicalName="PM1.AUX.AO_GaslineHeater31EnableIn" value="" min="" max="" eventTrigger="" units="" description="Unit2-CH15" isArray="false" />
- <ECID id="330050025" valueType="Ascii" logicalName="PM1.AUX.AO_GaslineHeater32EnableIn" value="" min="" max="" eventTrigger="" units="" description="Unit2-CH16" isArray="false" />
- <ECID id="330050026" valueType="Ascii" logicalName="PM1.AUX.AO_GaslineHeater33EnableIn" value="" min="" max="" eventTrigger="" units="" description="Unit3-CH1" isArray="false" />
- <ECID id="330050027" valueType="Ascii" logicalName="PM1.AUX.AO_GaslineHeater34EnableIn" value="" min="" max="" eventTrigger="" units="" description="Unit3-CH2" isArray="false" />
- <ECID id="330050028" valueType="Ascii" logicalName="PM1.AUX.AO_GaslineHeater35EnableIn" value="" min="" max="" eventTrigger="" units="" description="Unit3-CH3" isArray="false" />
- <ECID id="330050029" valueType="Ascii" logicalName="PM1.AUX.AO_GaslineHeater36EnableIn" value="" min="" max="" eventTrigger="" units="" description="Unit3-CH4" isArray="false" />
- <ECID id="330050030" valueType="Ascii" logicalName="PM1.AUX.AO_GaslineHeater37EnableIn" value="" min="" max="" eventTrigger="" units="" description="Unit3-CH5" isArray="false" />
- <ECID id="330050031" valueType="Ascii" logicalName="PM1.AUX.AO_GaslineHeater38EnableIn" value="" min="" max="" eventTrigger="" units="" description="Unit3-CH6" isArray="false" />
- <ECID id="330050032" valueType="Ascii" logicalName="PM1.AUX.AO_GaslineHeater39EnableIn" value="" min="" max="" eventTrigger="" units="" description="Unit3-CH7" isArray="false" />
- <ECID id="330050033" valueType="Ascii" logicalName="PM1.AUX.AO_GaslineHeater3EnableIn" value="" min="" max="" eventTrigger="" units="" description="Unit1-CH3" isArray="false" />
- <ECID id="330050034" valueType="Ascii" logicalName="PM1.AUX.AO_GaslineHeater40EnableIn" value="" min="" max="" eventTrigger="" units="" description="Unit3-CH8" isArray="false" />
- <ECID id="330050035" valueType="Ascii" logicalName="PM1.AUX.AO_GaslineHeater41EnableIn" value="" min="" max="" eventTrigger="" units="" description="Unit3-CH9" isArray="false" />
- <ECID id="330050036" valueType="Ascii" logicalName="PM1.AUX.AO_GaslineHeater42EnableIn" value="" min="" max="" eventTrigger="" units="" description="Unit3-CH10" isArray="false" />
- <ECID id="330050037" valueType="Ascii" logicalName="PM1.AUX.AO_GaslineHeater43EnableIn" value="" min="" max="" eventTrigger="" units="" description="Unit3-CH11" isArray="false" />
- <ECID id="330050038" valueType="Ascii" logicalName="PM1.AUX.AO_GaslineHeater44EnableIn" value="" min="" max="" eventTrigger="" units="" description="Unit3-CH12" isArray="false" />
- <ECID id="330050039" valueType="Ascii" logicalName="PM1.AUX.AO_GaslineHeater45EnableIn" value="" min="" max="" eventTrigger="" units="" description="Unit3-CH13" isArray="false" />
- <ECID id="330050040" valueType="Ascii" logicalName="PM1.AUX.AO_GaslineHeater46EnableIn" value="" min="" max="" eventTrigger="" units="" description="Unit3-CH14" isArray="false" />
- <ECID id="330050041" valueType="Ascii" logicalName="PM1.AUX.AO_GaslineHeater47EnableIn" value="" min="" max="" eventTrigger="" units="" description="Unit3-CH15" isArray="false" />
- <ECID id="330050042" valueType="Ascii" logicalName="PM1.AUX.AO_GaslineHeater48EnableIn" value="" min="" max="" eventTrigger="" units="" description="Unit3-CH16" isArray="false" />
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- <ECID id="330050045" valueType="Ascii" logicalName="PM1.AUX.AO_GaslineHeater50EnableIn" value="" min="" max="" eventTrigger="" units="" description="Unit4-CH2" isArray="false" />
- <ECID id="330050046" valueType="Ascii" logicalName="PM1.AUX.AO_GaslineHeater51EnableIn" value="" min="" max="" eventTrigger="" units="" description="Unit4-CH3" isArray="false" />
- <ECID id="330050047" valueType="Ascii" logicalName="PM1.AUX.AO_GaslineHeater52EnableIn" value="" min="" max="" eventTrigger="" units="" description="Unit4-CH4" isArray="false" />
- <ECID id="330050048" valueType="Ascii" logicalName="PM1.AUX.AO_GaslineHeater53EnableIn" value="" min="" max="" eventTrigger="" units="" description="Unit4-CH5" isArray="false" />
- <ECID id="330050049" valueType="Ascii" logicalName="PM1.AUX.AO_GaslineHeater54EnableIn" value="" min="" max="" eventTrigger="" units="" description="Unit4-CH6" isArray="false" />
- <ECID id="330050050" valueType="Ascii" logicalName="PM1.AUX.AO_GaslineHeater55EnableIn" value="" min="" max="" eventTrigger="" units="" description="Unit4-CH7" isArray="false" />
- <ECID id="330050051" valueType="Ascii" logicalName="PM1.AUX.AO_GaslineHeater56EnableIn" value="" min="" max="" eventTrigger="" units="" description="Unit4-CH8" isArray="false" />
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- <ECID id="330050053" valueType="Ascii" logicalName="PM1.AUX.AO_GaslineHeater58EnableIn" value="" min="" max="" eventTrigger="" units="" description="Unit4-CH10" isArray="false" />
- <ECID id="330050054" valueType="Ascii" logicalName="PM1.AUX.AO_GaslineHeater59EnableIn" value="" min="" max="" eventTrigger="" units="" description="Unit4-CH11" isArray="false" />
- <ECID id="330050055" valueType="Ascii" logicalName="PM1.AUX.AO_GaslineHeater5EnableIn" value="" min="" max="" eventTrigger="" units="" description="Unit1-CH5" isArray="false" />
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- <ECID id="330050057" valueType="Ascii" logicalName="PM1.AUX.AO_GaslineHeater61EnableIn" value="" min="" max="" eventTrigger="" units="" description="Unit4-CH13" isArray="false" />
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- <ECID id="330050059" valueType="Ascii" logicalName="PM1.AUX.AO_GaslineHeater63EnableIn" value="" min="" max="" eventTrigger="" units="" description="Unit4-CH15" isArray="false" />
- <ECID id="330050060" valueType="Ascii" logicalName="PM1.AUX.AO_GaslineHeater64EnableIn" value="" min="" max="" eventTrigger="" units="" description="Unit4-CH16" isArray="false" />
- <ECID id="330050061" valueType="Ascii" logicalName="PM1.AUX.AO_GaslineHeater6EnableIn" value="" min="" max="" eventTrigger="" units="" description="Unit1-CH6" isArray="false" />
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- <ECID id="330110006" valueType="Ascii" logicalName="PM1.Heater.HeaterCU.Proportioning" value="" min="" max="" eventTrigger="" units="" description="PID中的P参数" isArray="false" />
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- <ECID id="330110008" valueType="Ascii" logicalName="PM1.Heater.HeaterCU.Range" value="" min="" max="" eventTrigger="" units="" description="Heater max value" isArray="false" />
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- <ECID id="330110010" valueType="Ascii" logicalName="PM1.Heater.HeaterCU.SetLastRamping" value="" min="" max="" eventTrigger="" units="" description="Set Ramping" isArray="false" />
- <ECID id="330110011" valueType="Ascii" logicalName="PM1.Heater.HeaterCU.TemperatureOffset" value="" min="" max="" eventTrigger="" units="" description="Temperature Offset" isArray="false" />
- <ECID id="330110012" valueType="Ascii" logicalName="PM1.Heater.HeaterCU.ToleranceAlarmID" value="" min="" max="" eventTrigger="" units="" description="Tolerance Alarm ID" isArray="false" />
- <ECID id="330110013" valueType="Ascii" logicalName="PM1.Heater.HeaterCU.ToleranceWarningID" value="" min="" max="" eventTrigger="" units="" description="Tolerance Warning ID" isArray="false" />
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- <ECID id="330120002" valueType="Ascii" logicalName="PM1.Heater.HeaterL.Derivative" value="" min="" max="" eventTrigger="" units="" description="PID中的D参数" isArray="false" />
- <ECID id="330120003" valueType="Ascii" logicalName="PM1.Heater.HeaterL.DisplayName" value="" min="" max="" eventTrigger="" units="" description="Display Name" isArray="false" />
- <ECID id="330120004" valueType="Ascii" logicalName="PM1.Heater.HeaterL.InstallPosition" value="" min="" max="" eventTrigger="" units="" description="Install position" isArray="false" />
- <ECID id="330120005" valueType="Ascii" logicalName="PM1.Heater.HeaterL.Integral" value="" min="" max="" eventTrigger="" units="" description="PID中的I参数" isArray="false" />
- <ECID id="330120006" valueType="Ascii" logicalName="PM1.Heater.HeaterL.Proportioning" value="" min="" max="" eventTrigger="" units="" description="PID中的P参数" isArray="false" />
- <ECID id="330120007" valueType="Ascii" logicalName="PM1.Heater.HeaterL.RampRate" value="" min="" max="" eventTrigger="" units="" description="Ramp Rate" isArray="false" />
- <ECID id="330120008" valueType="Ascii" logicalName="PM1.Heater.HeaterL.Range" value="" min="" max="" eventTrigger="" units="" description="Heater max value" isArray="false" />
- <ECID id="330120009" valueType="Ascii" logicalName="PM1.Heater.HeaterL.SetLastPoint" value="" min="" max="" eventTrigger="" units="" description="Set Point" isArray="false" />
- <ECID id="330120010" valueType="Ascii" logicalName="PM1.Heater.HeaterL.SetLastRamping" value="" min="" max="" eventTrigger="" units="" description="Set Ramping" isArray="false" />
- <ECID id="330120011" valueType="Ascii" logicalName="PM1.Heater.HeaterL.TemperatureOffset" value="" min="" max="" eventTrigger="" units="" description="Temperature Offset" isArray="false" />
- <ECID id="330120012" valueType="Ascii" logicalName="PM1.Heater.HeaterL.ToleranceAlarmID" value="" min="" max="" eventTrigger="" units="" description="Tolerance Alarm ID" isArray="false" />
- <ECID id="330120013" valueType="Ascii" logicalName="PM1.Heater.HeaterL.ToleranceWarningID" value="" min="" max="" eventTrigger="" units="" description="Tolerance Warning ID" isArray="false" />
- <ECID id="330130001" valueType="Ascii" logicalName="PM1.Heater.HeaterU.AssociateParameterTable" value="" min="" max="" eventTrigger="" units="" description="Associate parameter table" isArray="false" />
- <ECID id="330130002" valueType="Ascii" logicalName="PM1.Heater.HeaterU.Derivative" value="" min="" max="" eventTrigger="" units="" description="PID中的D参数" isArray="false" />
- <ECID id="330130003" valueType="Ascii" logicalName="PM1.Heater.HeaterU.DisplayName" value="" min="" max="" eventTrigger="" units="" description="Display Name" isArray="false" />
- <ECID id="330130004" valueType="Ascii" logicalName="PM1.Heater.HeaterU.InstallPosition" value="" min="" max="" eventTrigger="" units="" description="Install position" isArray="false" />
- <ECID id="330130005" valueType="Ascii" logicalName="PM1.Heater.HeaterU.Integral" value="" min="" max="" eventTrigger="" units="" description="PID中的I参数" isArray="false" />
- <ECID id="330130006" valueType="Ascii" logicalName="PM1.Heater.HeaterU.Proportioning" value="" min="" max="" eventTrigger="" units="" description="PID中的P参数" isArray="false" />
- <ECID id="330130007" valueType="Ascii" logicalName="PM1.Heater.HeaterU.RampRate" value="" min="" max="" eventTrigger="" units="" description="Ramp Rate" isArray="false" />
- <ECID id="330130008" valueType="Ascii" logicalName="PM1.Heater.HeaterU.Range" value="" min="" max="" eventTrigger="" units="" description="Heater max value" isArray="false" />
- <ECID id="330130009" valueType="Ascii" logicalName="PM1.Heater.HeaterU.SetLastPoint" value="" min="" max="" eventTrigger="" units="" description="Set Point" isArray="false" />
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- <ECID id="338820005" valueType="Ascii" logicalName="PM1.RecipeEditParameter.WaferRobotParameter.PositionAxis.C08.Type" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
- <ECID id="338820006" valueType="Ascii" logicalName="PM1.RecipeEditParameter.WaferRobotParameter.PositionAxis.C08.VariableSpacingAxis" value="" min="" max="" eventTrigger="" units="" description="变间距轴" isArray="false" />
- <ECID id="338830001" valueType="Ascii" logicalName="PM1.RecipeEditParameter.WaferRobotParameter.PositionAxis.C09.RotateAxis" value="" min="" max="" eventTrigger="" units="" description="旋转轴" isArray="false" />
- <ECID id="338830002" valueType="Ascii" logicalName="PM1.RecipeEditParameter.WaferRobotParameter.PositionAxis.C09.TelescopingAxis1" value="" min="" max="" eventTrigger="" units="" description="伸缩轴1" isArray="false" />
- <ECID id="338830003" valueType="Ascii" logicalName="PM1.RecipeEditParameter.WaferRobotParameter.PositionAxis.C09.TelescopingAxis2" value="" min="" max="" eventTrigger="" units="" description="伸缩轴2" isArray="false" />
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- <ECID id="338830005" valueType="Ascii" logicalName="PM1.RecipeEditParameter.WaferRobotParameter.PositionAxis.C09.Type" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
- <ECID id="338830006" valueType="Ascii" logicalName="PM1.RecipeEditParameter.WaferRobotParameter.PositionAxis.C09.VariableSpacingAxis" value="" min="" max="" eventTrigger="" units="" description="变间距轴" isArray="false" />
- <ECID id="338840001" valueType="Ascii" logicalName="PM1.RecipeEditParameter.WaferRobotParameter.PositionAxis.C10.RotateAxis" value="" min="" max="" eventTrigger="" units="" description="旋转轴" isArray="false" />
- <ECID id="338840002" valueType="Ascii" logicalName="PM1.RecipeEditParameter.WaferRobotParameter.PositionAxis.C10.TelescopingAxis1" value="" min="" max="" eventTrigger="" units="" description="伸缩轴1" isArray="false" />
- <ECID id="338840003" valueType="Ascii" logicalName="PM1.RecipeEditParameter.WaferRobotParameter.PositionAxis.C10.TelescopingAxis2" value="" min="" max="" eventTrigger="" units="" description="伸缩轴2" isArray="false" />
- <ECID id="338840004" valueType="Ascii" logicalName="PM1.RecipeEditParameter.WaferRobotParameter.PositionAxis.C10.ToDownAxis" value="" min="" max="" eventTrigger="" units="" description="升降轴" isArray="false" />
- <ECID id="338840005" valueType="Ascii" logicalName="PM1.RecipeEditParameter.WaferRobotParameter.PositionAxis.C10.Type" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
- <ECID id="338840006" valueType="Ascii" logicalName="PM1.RecipeEditParameter.WaferRobotParameter.PositionAxis.C10.VariableSpacingAxis" value="" min="" max="" eventTrigger="" units="" description="变间距轴" isArray="false" />
- <ECID id="338850001" valueType="Ascii" logicalName="PM1.RecipeEditParameter.WaferRobotParameter.PositionAxis.C11.RotateAxis" value="" min="" max="" eventTrigger="" units="" description="旋转轴" isArray="false" />
- <ECID id="338850002" valueType="Ascii" logicalName="PM1.RecipeEditParameter.WaferRobotParameter.PositionAxis.C11.TelescopingAxis1" value="" min="" max="" eventTrigger="" units="" description="伸缩轴1" isArray="false" />
- <ECID id="338850003" valueType="Ascii" logicalName="PM1.RecipeEditParameter.WaferRobotParameter.PositionAxis.C11.TelescopingAxis2" value="" min="" max="" eventTrigger="" units="" description="伸缩轴2" isArray="false" />
- <ECID id="338850004" valueType="Ascii" logicalName="PM1.RecipeEditParameter.WaferRobotParameter.PositionAxis.C11.ToDownAxis" value="" min="" max="" eventTrigger="" units="" description="升降轴" isArray="false" />
- <ECID id="338850005" valueType="Ascii" logicalName="PM1.RecipeEditParameter.WaferRobotParameter.PositionAxis.C11.Type" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
- <ECID id="338850006" valueType="Ascii" logicalName="PM1.RecipeEditParameter.WaferRobotParameter.PositionAxis.C11.VariableSpacingAxis" value="" min="" max="" eventTrigger="" units="" description="变间距轴" isArray="false" />
- <ECID id="338860001" valueType="Ascii" logicalName="PM1.RecipeEditParameter.WaferRobotParameter.PositionAxis.C12.RotateAxis" value="" min="" max="" eventTrigger="" units="" description="旋转轴" isArray="false" />
- <ECID id="338860002" valueType="Ascii" logicalName="PM1.RecipeEditParameter.WaferRobotParameter.PositionAxis.C12.TelescopingAxis1" value="" min="" max="" eventTrigger="" units="" description="伸缩轴1" isArray="false" />
- <ECID id="338860003" valueType="Ascii" logicalName="PM1.RecipeEditParameter.WaferRobotParameter.PositionAxis.C12.TelescopingAxis2" value="" min="" max="" eventTrigger="" units="" description="伸缩轴2" isArray="false" />
- <ECID id="338860004" valueType="Ascii" logicalName="PM1.RecipeEditParameter.WaferRobotParameter.PositionAxis.C12.ToDownAxis" value="" min="" max="" eventTrigger="" units="" description="升降轴" isArray="false" />
- <ECID id="338860005" valueType="Ascii" logicalName="PM1.RecipeEditParameter.WaferRobotParameter.PositionAxis.C12.Type" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
- <ECID id="338860006" valueType="Ascii" logicalName="PM1.RecipeEditParameter.WaferRobotParameter.PositionAxis.C12.VariableSpacingAxis" value="" min="" max="" eventTrigger="" units="" description="变间距轴" isArray="false" />
- <ECID id="338870001" valueType="Ascii" logicalName="PM1.RecipeEditParameter.WaferRobotParameter.PositionConfig.C01.SetValue" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
- <ECID id="338870002" valueType="Ascii" logicalName="PM1.RecipeEditParameter.WaferRobotParameter.PositionConfig.C01.StParam" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
- <ECID id="338870003" valueType="Ascii" logicalName="PM1.RecipeEditParameter.WaferRobotParameter.PositionConfig.C01.Type" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
- <ECID id="338880001" valueType="Ascii" logicalName="PM1.RecipeEditParameter.WaferRobotParameter.PositionConfig.C02.SetValue" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
- <ECID id="338880002" valueType="Ascii" logicalName="PM1.RecipeEditParameter.WaferRobotParameter.PositionConfig.C02.StParam" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
- <ECID id="338880003" valueType="Ascii" logicalName="PM1.RecipeEditParameter.WaferRobotParameter.PositionConfig.C02.Type" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
- <ECID id="338890001" valueType="Ascii" logicalName="PM1.RecipeEditParameter.WaferRobotParameter.PositionConfig.C03.SetValue" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
- <ECID id="338890002" valueType="Ascii" logicalName="PM1.RecipeEditParameter.WaferRobotParameter.PositionConfig.C03.StParam" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
- <ECID id="338890003" valueType="Ascii" logicalName="PM1.RecipeEditParameter.WaferRobotParameter.PositionConfig.C03.Type" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
- <ECID id="338900001" valueType="Ascii" logicalName="PM1.RecipeEditParameter.WaferRobotParameter.PositionConfig.C04.SetValue" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
- <ECID id="338900002" valueType="Ascii" logicalName="PM1.RecipeEditParameter.WaferRobotParameter.PositionConfig.C04.StParam" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
- <ECID id="338900003" valueType="Ascii" logicalName="PM1.RecipeEditParameter.WaferRobotParameter.PositionConfig.C04.Type" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
- <ECID id="338910001" valueType="Ascii" logicalName="PM1.RecipeEditParameter.WaferRobotParameter.PositionConfig.C05.SetValue" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
- <ECID id="338910002" valueType="Ascii" logicalName="PM1.RecipeEditParameter.WaferRobotParameter.PositionConfig.C05.StParam" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
- <ECID id="338910003" valueType="Ascii" logicalName="PM1.RecipeEditParameter.WaferRobotParameter.PositionConfig.C05.Type" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
- <ECID id="338920001" valueType="Ascii" logicalName="PM1.RecipeEditParameter.WaferRobotParameter.PositionConfig.C06.SetValue" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
- <ECID id="338920002" valueType="Ascii" logicalName="PM1.RecipeEditParameter.WaferRobotParameter.PositionConfig.C06.StParam" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
- <ECID id="338920003" valueType="Ascii" logicalName="PM1.RecipeEditParameter.WaferRobotParameter.PositionConfig.C06.Type" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
- <ECID id="338930001" valueType="Ascii" logicalName="PM1.RecipeEditParameter.WaferRobotParameter.PositionConfig.C07.SetValue" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
- <ECID id="338930002" valueType="Ascii" logicalName="PM1.RecipeEditParameter.WaferRobotParameter.PositionConfig.C07.StParam" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
- <ECID id="338930003" valueType="Ascii" logicalName="PM1.RecipeEditParameter.WaferRobotParameter.PositionConfig.C07.Type" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
- <ECID id="338940001" valueType="Ascii" logicalName="PM1.RecipeEditParameter.WaferRobotParameter.PositionConfig.C08.SetValue" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
- <ECID id="338940002" valueType="Ascii" logicalName="PM1.RecipeEditParameter.WaferRobotParameter.PositionConfig.C08.StParam" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
- <ECID id="338940003" valueType="Ascii" logicalName="PM1.RecipeEditParameter.WaferRobotParameter.PositionConfig.C08.Type" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
- <ECID id="338950001" valueType="Ascii" logicalName="PM1.RecipeEditParameter.WaferRobotParameter.PositionConfig.C09.SetValue" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
- <ECID id="338950002" valueType="Ascii" logicalName="PM1.RecipeEditParameter.WaferRobotParameter.PositionConfig.C09.StParam" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
- <ECID id="338950003" valueType="Ascii" logicalName="PM1.RecipeEditParameter.WaferRobotParameter.PositionConfig.C09.Type" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
- <ECID id="338960001" valueType="Ascii" logicalName="PM1.RecipeEditParameter.WaferRobotParameter.PositionConfig.C10.SetValue" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
- <ECID id="338960002" valueType="Ascii" logicalName="PM1.RecipeEditParameter.WaferRobotParameter.PositionConfig.C10.StParam" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
- <ECID id="338960003" valueType="Ascii" logicalName="PM1.RecipeEditParameter.WaferRobotParameter.PositionConfig.C10.Type" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
- <ECID id="338970001" valueType="Ascii" logicalName="PM1.RecipeEditParameter.WaferRobotParameter.PositionConfig.C11.SetValue" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
- <ECID id="338970002" valueType="Ascii" logicalName="PM1.RecipeEditParameter.WaferRobotParameter.PositionConfig.C11.StParam" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
- <ECID id="338970003" valueType="Ascii" logicalName="PM1.RecipeEditParameter.WaferRobotParameter.PositionConfig.C11.Type" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
- <ECID id="338980001" valueType="Ascii" logicalName="PM1.RecipeEditParameter.WaferRobotParameter.PositionConfig.C12.SetValue" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
- <ECID id="338980002" valueType="Ascii" logicalName="PM1.RecipeEditParameter.WaferRobotParameter.PositionConfig.C12.StParam" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
- <ECID id="338980003" valueType="Ascii" logicalName="PM1.RecipeEditParameter.WaferRobotParameter.PositionConfig.C12.Type" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
- <ECID id="338990001" valueType="Ascii" logicalName="PM1.WaferCycleTime.EDCountAlarm" value="" min="" max="" eventTrigger="" units="" description="ED use count alarm" isArray="false" />
- <ECID id="338990002" valueType="Ascii" logicalName="PM1.WaferCycleTime.EDCountWarning" value="" min="" max="" eventTrigger="" units="" description="ED use count warning" isArray="false" />
- <ECID id="338990003" valueType="Ascii" logicalName="PM1.WaferCycleTime.EDThicknessAlarm" value="" min="" max="" eventTrigger="" units="" description="ED use thickness alarm" isArray="false" />
- <ECID id="338990004" valueType="Ascii" logicalName="PM1.WaferCycleTime.EDThicknessWarning" value="" min="" max="" eventTrigger="" units="" description="ED use thickness warning" isArray="false" />
- <ECID id="338990005" valueType="Ascii" logicalName="PM1.WaferCycleTime.EDTimeAlarm" value="" min="" max="" eventTrigger="" units="" description="ED use time alarm" isArray="false" />
- <ECID id="338990006" valueType="Ascii" logicalName="PM1.WaferCycleTime.EDTimeWarning" value="" min="" max="" eventTrigger="" units="" description="ED use time warning" isArray="false" />
- <ECID id="338990007" valueType="Ascii" logicalName="PM1.WaferCycleTime.IsEnableEDWaferThicknessWarning" value="" min="" max="" eventTrigger="" units="" description="Is Enable ED Wafer Thickness Warning" isArray="false" />
- <ECID id="338990008" valueType="Ascii" logicalName="PM1.WaferCycleTime.IsEnableEDWaferUseCountWarning" value="" min="" max="" eventTrigger="" units="" description="Is Enable ED Wafer Use Count Warning" isArray="false" />
- <ECID id="338990009" valueType="Ascii" logicalName="PM1.WaferCycleTime.IsEnableEDWaferUseTimeWarning" value="" min="" max="" eventTrigger="" units="" description="Is Enable ED Wafer Use Time Warning" isArray="false" />
- <ECID id="338990010" valueType="Ascii" logicalName="PM1.WaferCycleTime.IsEnableSDWaferThicknessWarning" value="" min="" max="" eventTrigger="" units="" description="Is Enable SD Wafer Thickness Warning" isArray="false" />
- <ECID id="338990011" valueType="Ascii" logicalName="PM1.WaferCycleTime.IsEnableSDWaferUseCountWarning" value="" min="" max="" eventTrigger="" units="" description="Is Enable SD Wafer Use Count Warning" isArray="false" />
- <ECID id="338990012" valueType="Ascii" logicalName="PM1.WaferCycleTime.IsEnableSDWaferUseTimeWarning" value="" min="" max="" eventTrigger="" units="" description="Is Enable SD Wafer Use Time Warning" isArray="false" />
- <ECID id="338990013" valueType="Ascii" logicalName="PM1.WaferCycleTime.SDCountAlarm" value="" min="" max="" eventTrigger="" units="" description="SD use count alarm" isArray="false" />
- <ECID id="338990014" valueType="Ascii" logicalName="PM1.WaferCycleTime.SDCountWarning" value="" min="" max="" eventTrigger="" units="" description="SD use count warning" isArray="false" />
- <ECID id="338990015" valueType="Ascii" logicalName="PM1.WaferCycleTime.SDThicknessAlarm" value="" min="" max="" eventTrigger="" units="" description="SD use thickness alarm" isArray="false" />
- <ECID id="338990016" valueType="Ascii" logicalName="PM1.WaferCycleTime.SDThicknessWarning" value="" min="" max="" eventTrigger="" units="" description="SD use thickness warning" isArray="false" />
- <ECID id="338990017" valueType="Ascii" logicalName="PM1.WaferCycleTime.SDTimeAlarm" value="" min="" max="" eventTrigger="" units="" description="SD use time alarm" isArray="false" />
- <ECID id="338990018" valueType="Ascii" logicalName="PM1.WaferCycleTime.SDTimeWarning" value="" min="" max="" eventTrigger="" units="" description="SD use time warning" isArray="false" />
- <ECID id="530002002" valueType="Ascii" logicalName="PM.HomeTimeout" value="" min="" max="" eventTrigger="" units="" description="Home Timeout" isArray="false" />
- <ECID id="530002011" valueType="Ascii" logicalName="PM.AdsIPAddr" value="" min="" max="" eventTrigger="" units="" description="Ads IP Address" isArray="false" />
- <ECID id="530002012" valueType="Ascii" logicalName="PM.AtmPressureBase" value="" min="" max="" eventTrigger="" units="" description="Atm Pressure Base" isArray="false" />
- <ECID id="530002013" valueType="Ascii" logicalName="PM.IsAdsSimulatorMode" value="" min="" max="" eventTrigger="" units="" description="Is Ads Simulator Mode" isArray="false" />
- <ECID id="530002112" valueType="Ascii" logicalName="PM.PostTransferTimeout" value="" min="" max="" eventTrigger="" units="" description="Post Transfer Timeout" isArray="false" />
- <ECID id="530002113" valueType="Ascii" logicalName="PM.PrepareTransferTimeout" value="" min="" max="" eventTrigger="" units="" description="Prepare Transfer Timeout" isArray="false" />
- <ECID id="530002114" valueType="Ascii" logicalName="PM.ProcessTimeout" value="" min="" max="" eventTrigger="" units="" description="Process Timeout" isArray="false" />
- <ECID id="530002115" valueType="Ascii" logicalName="PM.VacuumPressureBase" value="" min="" max="" eventTrigger="" units="" description="Vacuum Pressure Base" isArray="false" />
- <ECID id="530004014" valueType="Ascii" logicalName="PM.PM1.AutoControlCoolingValve" value="" min="" max="" eventTrigger="" units="" description="是否允许自动开关水冷阀门" isArray="false" />
- <ECID id="530004015" valueType="Ascii" logicalName="PM.PM1.AutoControlHeater" value="" min="" max="" eventTrigger="" units="" description="是否允许自动开关腔体壁加热" isArray="false" />
- <ECID id="530004106" valueType="Ascii" logicalName="PM.PM1.RecipeChamberType" value="" min="" max="" eventTrigger="" units="" description="Recipe Chamber Type" isArray="false" />
- <ECID id="530004108" valueType="Ascii" logicalName="PM.PM1.VacuumSensorPressure" value="" min="" max="" eventTrigger="" units="" description="Vacuum Pressure Base" isArray="false" />
- <ECID id="530030014" valueType="Ascii" logicalName="PM.PM2.AutoControlCoolingValve" value="" min="" max="" eventTrigger="" units="" description="是否允许自动开关水冷阀门" isArray="false" />
- <ECID id="530030106" valueType="Ascii" logicalName="PM.PM2.RecipeChamberType" value="" min="" max="" eventTrigger="" units="" description="Recipe Chamber Type" isArray="false" />
- <ECID id="530030108" valueType="Ascii" logicalName="PM.PM2.VacuumSensorPressure" value="" min="" max="" eventTrigger="" units="" description="Vacuum Pressure Base" isArray="false" />
- <ECID id="530105016" valueType="Ascii" logicalName="PM.PM1.ChamberDoor.MoveTimeout" value="" min="" max="" eventTrigger="" units="" description="Move Timeout" isArray="false" />
- <ECID id="530106016" valueType="Ascii" logicalName="PM.PM1.ChamberLiftPin.MoveTimeout" value="" min="" max="" eventTrigger="" units="" description="Move Timeout" isArray="false" />
- <ECID id="530107017" valueType="Ascii" logicalName="PM.PM1.Chiller.EnableAutoAdjust" value="" min="" max="" eventTrigger="" units="" description="是否运行自动调节Chiller开关" isArray="false" />
- <ECID id="530107018" valueType="Ascii" logicalName="PM.PM1.Chiller.TurnOffIfTempBelow" value="" min="" max="" eventTrigger="" units="" description="低于这个温度，关闭Chiller" isArray="false" />
- <ECID id="530107019" valueType="Ascii" logicalName="PM.PM1.Chiller.TurnOnIfTempAbove" value="" min="" max="" eventTrigger="" units="" description="高于这个温度，打开chiller" isArray="false" />
- <ECID id="530110029" valueType="Ascii" logicalName="PM.PM1.LeakCheck.EnableTuning" value="" min="" max="" eventTrigger="" units="" description="whether enable tuning" isArray="false" />
- <ECID id="530110030" valueType="Ascii" logicalName="PM.PM1.LeakCheck.LeakCheckDelayTime" value="" min="" max="" eventTrigger="" units="" description="Leak Check Delay Time" isArray="false" />
- <ECID id="530110031" valueType="Ascii" logicalName="PM.PM1.LeakCheck.PumpBasePressure" value="" min="" max="" eventTrigger="" units="" description="Pump Base Pressure" isArray="false" />
- <ECID id="530110032" valueType="Ascii" logicalName="PM.PM1.LeakCheck.PumpDelayTime" value="" min="" max="" eventTrigger="" units="" description="Pump Delay Time" isArray="false" />
- <ECID id="530110033" valueType="Ascii" logicalName="PM.PM1.LeakCheck.PumpTimeout" value="" min="" max="" eventTrigger="" units="" description="Pump Timeout" isArray="false" />
- <ECID id="530110034" valueType="Ascii" logicalName="PM.PM1.LeakCheck.TuningPercent" value="" min="" max="" eventTrigger="" units="" description="tuning percent" isArray="false" />
- <ECID id="530110035" valueType="Ascii" logicalName="PM.PM1.LeakCheck.TVPosition" value="" min="" max="" eventTrigger="" units="" description="TV Position" isArray="false" />
- <ECID id="530111036" valueType="Ascii" logicalName="PM.PM1.MainPump.ResetErrorTimeout" value="" min="" max="" eventTrigger="" units="" description="Reset Error Timeout" isArray="false" />
- <ECID id="530111037" valueType="Ascii" logicalName="PM.PM1.MainPump.StartTimeout" value="" min="" max="" eventTrigger="" units="" description="Start Timeout" isArray="false" />
- <ECID id="530117036" valueType="Ascii" logicalName="PM.PM1.Microwave.ResetErrorTimeout" value="" min="" max="" eventTrigger="" units="" description="Reset Error Timeout" isArray="false" />
- <ECID id="530117044" valueType="Ascii" logicalName="PM.PM1.Microwave.StableTime" value="" min="" max="" eventTrigger="" units="" description="Stable Time" isArray="false" />
- <ECID id="530117047" valueType="Ascii" logicalName="PM.PM1.Microwave.CalibrationGasFlowDelayTime" value="" min="" max="" eventTrigger="" units="" description="Calibration Gas Flow Delay Time" isArray="false" />
- <ECID id="530117048" valueType="Ascii" logicalName="PM.PM1.Microwave.CalibrationTimeOut" value="" min="" max="" eventTrigger="" units="" description="Calibration TimeOut" isArray="false" />
- <ECID id="530117049" valueType="Ascii" logicalName="PM.PM1.Microwave.CalibrationUseDummyLoad" value="" min="" max="" eventTrigger="" units="" description="Calibration Use Dummy Load" isArray="false" />
- <ECID id="530117050" valueType="Ascii" logicalName="PM.PM1.Microwave.EnablePlasmaDetect" value="" min="" max="" eventTrigger="" units="" description="Enable PlasmaD etect" isArray="false" />
- <ECID id="530117051" valueType="Ascii" logicalName="PM.PM1.Microwave.EnablePlasmaDetectDelayTime" value="" min="" max="" eventTrigger="" units="" description="Enable Plasma Detect Delay Time" isArray="false" />
- <ECID id="530117052" valueType="Ascii" logicalName="PM.PM1.Microwave.EnablePlasmaDetectStableTime" value="" min="" max="" eventTrigger="" units="" description="Enable Plasma Detect Stable Time" isArray="false" />
- <ECID id="530117053" valueType="Ascii" logicalName="PM.PM1.Microwave.EnablePowerAlarm" value="" min="" max="" eventTrigger="" units="" description="Enable Power Alarm" isArray="false" />
- <ECID id="530117054" valueType="Ascii" logicalName="PM.PM1.Microwave.EnableReflectPowerAlarm" value="" min="" max="" eventTrigger="" units="" description="Enable Reflect Power Alarm" isArray="false" />
- <ECID id="530117055" valueType="Ascii" logicalName="PM.PM1.Microwave.ForwardPowerDisplayOffset" value="" min="" max="" eventTrigger="" units="" description="Forward Power Display Offset" isArray="false" />
- <ECID id="530117056" valueType="Ascii" logicalName="PM.PM1.Microwave.ImpulseTime" value="" min="" max="" eventTrigger="" units="" description="脉冲持续时间ti" isArray="false" />
- <ECID id="530117057" valueType="Ascii" logicalName="PM.PM1.Microwave.PauseTime" value="" min="" max="" eventTrigger="" units="" description="暂停时间tp" isArray="false" />
- <ECID id="530117058" valueType="Ascii" logicalName="PM.PM1.Microwave.PowerAlarmRange" value="" min="" max="" eventTrigger="" units="" description="Power Alarm Range" isArray="false" />
- <ECID id="530117059" valueType="Ascii" logicalName="PM.PM1.Microwave.PowerAlarmTime" value="" min="" max="" eventTrigger="" units="" description="Power Alarm Time" isArray="false" />
- <ECID id="530117060" valueType="Ascii" logicalName="PM.PM1.Microwave.PowerCalibrationEnable" value="" min="" max="" eventTrigger="" units="" description="是否校准" isArray="false" />
- <ECID id="530117061" valueType="Ascii" logicalName="PM.PM1.Microwave.PowerCoefficient" value="" min="" max="" eventTrigger="" units="" description="Power Coefficient" isArray="false" />
- <ECID id="530117062" valueType="Ascii" logicalName="PM.PM1.Microwave.PowerOnTimeout" value="" min="" max="" eventTrigger="" units="" description="Power On Timeout" isArray="false" />
- <ECID id="530117063" valueType="Ascii" logicalName="PM.PM1.Microwave.PowerRange" value="" min="" max="" eventTrigger="" units="" description="Power Range" isArray="false" />
- <ECID id="530117064" valueType="Ascii" logicalName="PM.PM1.Microwave.PowerTuneEnable" value="" min="" max="" eventTrigger="" units="" description="是否补偿" isArray="false" />
- <ECID id="530117065" valueType="Ascii" logicalName="PM.PM1.Microwave.PowerTuneIsPercent" value="" min="" max="" eventTrigger="" units="" description="是否用百分比" isArray="false" />
- <ECID id="530117066" valueType="Ascii" logicalName="PM.PM1.Microwave.PowerTuneTable" value="" min="" max="" eventTrigger="" units="" description="Power补偿" isArray="false" />
- <ECID id="530117067" valueType="Ascii" logicalName="PM.PM1.Microwave.PowerWarningRange" value="" min="" max="" eventTrigger="" units="" description="Power Warning Range" isArray="false" />
- <ECID id="530117068" valueType="Ascii" logicalName="PM.PM1.Microwave.PowerWarningTime" value="" min="" max="" eventTrigger="" units="" description="Power Warning Time" isArray="false" />
- <ECID id="530117069" valueType="Ascii" logicalName="PM.PM1.Microwave.Rate10MeterPower" value="" min="" max="" eventTrigger="" units="" description="Rate10 Meter Power" isArray="false" />
- <ECID id="530117070" valueType="Ascii" logicalName="PM.PM1.Microwave.Rate1MeterPower" value="" min="" max="" eventTrigger="" units="" description="Rate1 Meter Power" isArray="false" />
- <ECID id="530117071" valueType="Ascii" logicalName="PM.PM1.Microwave.Rate2MeterPower" value="" min="" max="" eventTrigger="" units="" description="Rate2 Meter Power" isArray="false" />
- <ECID id="530117072" valueType="Ascii" logicalName="PM.PM1.Microwave.Rate3MeterPower" value="" min="" max="" eventTrigger="" units="" description="Rate3 Meter Power" isArray="false" />
- <ECID id="530117073" valueType="Ascii" logicalName="PM.PM1.Microwave.Rate4MeterPower" value="" min="" max="" eventTrigger="" units="" description="Rate4 Meter Power" isArray="false" />
- <ECID id="530117074" valueType="Ascii" logicalName="PM.PM1.Microwave.Rate5MeterPower" value="" min="" max="" eventTrigger="" units="" description="Rate5 Meter Power" isArray="false" />
- <ECID id="530117075" valueType="Ascii" logicalName="PM.PM1.Microwave.Rate6MeterPower" value="" min="" max="" eventTrigger="" units="" description="Rate6 Meter Power" isArray="false" />
- <ECID id="530117076" valueType="Ascii" logicalName="PM.PM1.Microwave.Rate7MeterPower" value="" min="" max="" eventTrigger="" units="" description="Rate7 Meter Power" isArray="false" />
- <ECID id="530117077" valueType="Ascii" logicalName="PM.PM1.Microwave.Rate8MeterPower" value="" min="" max="" eventTrigger="" units="" description="Rate8 Meter Power" isArray="false" />
- <ECID id="530117078" valueType="Ascii" logicalName="PM.PM1.Microwave.Rate9MeterPower" value="" min="" max="" eventTrigger="" units="" description="Rate9 Meter Power" isArray="false" />
- <ECID id="530117079" valueType="Ascii" logicalName="PM.PM1.Microwave.ReflectPowerAlarmRange" value="" min="" max="" eventTrigger="" units="" description="Reflect Power Alarm Range" isArray="false" />
- <ECID id="530117080" valueType="Ascii" logicalName="PM.PM1.Microwave.ReflectPowerAlarmTime" value="" min="" max="" eventTrigger="" units="" description="Reflect Power Alarm Time" isArray="false" />
- <ECID id="530117081" valueType="Ascii" logicalName="PM.PM1.Microwave.ReflectPowerWarningRange" value="" min="" max="" eventTrigger="" units="" description="Reflect Power Warning Range" isArray="false" />
- <ECID id="530117082" valueType="Ascii" logicalName="PM.PM1.Microwave.ReflectPowerWarningTime" value="" min="" max="" eventTrigger="" units="" description="Reflect Power Warning Time" isArray="false" />
- <ECID id="530117083" valueType="Ascii" logicalName="PM.PM1.Microwave.TuningTable" value="" min="" max="" eventTrigger="" units="" description="Tuning Table" isArray="false" />
- <ECID id="530117084" valueType="Ascii" logicalName="PM.PM1.Microwave.TuningTableRange" value="" min="" max="" eventTrigger="" units="" description="Tuning Table Range" isArray="false" />
- <ECID id="530124088" valueType="Ascii" logicalName="PM.PM1.ProcessRoutine.PressureAlarmRange" value="" min="" max="" eventTrigger="" units="" description="Pressure Alarm Range" isArray="false" />
- <ECID id="530124089" valueType="Ascii" logicalName="PM.PM1.ProcessRoutine.PressureAlarmTime" value="" min="" max="" eventTrigger="" units="" description="Pressure Alarm Time" isArray="false" />
- <ECID id="530124090" valueType="Ascii" logicalName="PM.PM1.ProcessRoutine.PurgePumpDelayTime" value="" min="" max="" eventTrigger="" units="" description="Purge Pump Delay Time" isArray="false" />
- <ECID id="530124091" valueType="Ascii" logicalName="PM.PM1.ProcessRoutine.PurgePumpPressure" value="" min="" max="" eventTrigger="" units="" description="Purge Pump Pressure" isArray="false" />
- <ECID id="530124092" valueType="Ascii" logicalName="PM.PM1.ProcessRoutine.PurgePumpTimeout" value="" min="" max="" eventTrigger="" units="" description="Purge Pump Timeout" isArray="false" />
- <ECID id="530124093" valueType="Ascii" logicalName="PM.PM1.ProcessRoutine.PurgeVentDelayTime" value="" min="" max="" eventTrigger="" units="" description="Purge Vent Delay Time" isArray="false" />
- <ECID id="530124094" valueType="Ascii" logicalName="PM.PM1.ProcessRoutine.PurgeVentPressure" value="" min="" max="" eventTrigger="" units="" description="Purge Vent Pressure" isArray="false" />
- <ECID id="530124095" valueType="Ascii" logicalName="PM.PM1.ProcessRoutine.PurgeVentTimeout" value="" min="" max="" eventTrigger="" units="" description="Purge Vent Timeout" isArray="false" />
- <ECID id="530125031" valueType="Ascii" logicalName="PM.PM1.PumpRoutine.PumpBasePressure" value="" min="" max="" eventTrigger="" units="" description="Pump Base Pressure" isArray="false" />
- <ECID id="530125096" valueType="Ascii" logicalName="PM.PM1.PumpRoutine.PreparePumpTimeout" value="" min="" max="" eventTrigger="" units="" description="Prepare Pump Timeout" isArray="false" />
- <ECID id="530125097" valueType="Ascii" logicalName="PM.PM1.PumpRoutine.PumpStableTime" value="" min="" max="" eventTrigger="" units="" description="Pump Stable Time" isArray="false" />
- <ECID id="530125098" valueType="Ascii" logicalName="PM.PM1.PumpRoutine.PumpToBasePressureTimeout" value="" min="" max="" eventTrigger="" units="" description="Pump To Base Pressure Timeout" isArray="false" />
- <ECID id="530125099" valueType="Ascii" logicalName="PM.PM1.PumpRoutine.SlowPumpBasePressure" value="" min="" max="" eventTrigger="" units="" description="Slow Pump Base Pressure" isArray="false" />
- <ECID id="530125100" valueType="Ascii" logicalName="PM.PM1.PumpRoutine.SlowPumpTimeout" value="" min="" max="" eventTrigger="" units="" description="Slow Pump Timeout" isArray="false" />
- <ECID id="530125101" valueType="Ascii" logicalName="PM.PM1.PumpRoutine.TVPositionFastPump" value="" min="" max="" eventTrigger="" units="" description="TV Position Fast Pump" isArray="false" />
- <ECID id="530125102" valueType="Ascii" logicalName="PM.PM1.PumpRoutine.TVPositionSlowPump" value="" min="" max="" eventTrigger="" units="" description="TV Position Slow Pump" isArray="false" />
- <ECID id="530126031" valueType="Ascii" logicalName="PM.PM1.Purge.PumpBasePressure" value="" min="" max="" eventTrigger="" units="" description="Pump Base Pressure" isArray="false" />
- <ECID id="530126032" valueType="Ascii" logicalName="PM.PM1.Purge.PumpDelayTime" value="" min="" max="" eventTrigger="" units="" description="Pump Delay Time" isArray="false" />
- <ECID id="530126103" valueType="Ascii" logicalName="PM.PM1.Purge.CyclePurgeCount" value="" min="" max="" eventTrigger="" units="" description="Cycle Purge Count" isArray="false" />
- <ECID id="530126104" valueType="Ascii" logicalName="PM.PM1.Purge.VentBasePressure" value="" min="" max="" eventTrigger="" units="" description="Vent Base Pressure" isArray="false" />
- <ECID id="530126105" valueType="Ascii" logicalName="PM.PM1.Purge.VentDelayTime" value="" min="" max="" eventTrigger="" units="" description="Vent Delay Time" isArray="false" />
- <ECID id="530127044" valueType="Ascii" logicalName="PM.PM1.RF.StableTime" value="" min="" max="" eventTrigger="" units="" description="Stable Time" isArray="false" />
- <ECID id="530127047" valueType="Ascii" logicalName="PM.PM1.RF.CalibrationGasFlowDelayTime" value="" min="" max="" eventTrigger="" units="" description="Calibration Gas Flow Delay Time" isArray="false" />
- <ECID id="530127048" valueType="Ascii" logicalName="PM.PM1.RF.CalibrationTimeOut" value="" min="" max="" eventTrigger="" units="" description="Calibration TimeOut" isArray="false" />
- <ECID id="530127049" valueType="Ascii" logicalName="PM.PM1.RF.CalibrationUseDummyLoad" value="" min="" max="" eventTrigger="" units="" description="Calibration Use Dummy Load" isArray="false" />
- <ECID id="530127050" valueType="Ascii" logicalName="PM.PM1.RF.EnablePlasmaDetect" value="" min="" max="" eventTrigger="" units="" description="Enable Plasma Detect" isArray="false" />
- <ECID id="530127051" valueType="Ascii" logicalName="PM.PM1.RF.EnablePlasmaDetectDelayTime" value="" min="" max="" eventTrigger="" units="" description="Enable Plasma Detect Delay Time" isArray="false" />
- <ECID id="530127052" valueType="Ascii" logicalName="PM.PM1.RF.EnablePlasmaDetectStableTime" value="" min="" max="" eventTrigger="" units="" description="Enable Plasma Detect Stable Time" isArray="false" />
- <ECID id="530127053" valueType="Ascii" logicalName="PM.PM1.RF.EnablePowerAlarm" value="" min="" max="" eventTrigger="" units="" description="Enable Power Alarm" isArray="false" />
- <ECID id="530127054" valueType="Ascii" logicalName="PM.PM1.RF.EnableReflectPowerAlarm" value="" min="" max="" eventTrigger="" units="" description="Enable Reflect Power Alarm" isArray="false" />
- <ECID id="530127055" valueType="Ascii" logicalName="PM.PM1.RF.ForwardPowerDisplayOffset" value="" min="" max="" eventTrigger="" units="" description="Forward Power Display Offset" isArray="false" />
- <ECID id="530127058" valueType="Ascii" logicalName="PM.PM1.RF.PowerAlarmRange" value="" min="" max="" eventTrigger="" units="" description="Power Alarm Range" isArray="false" />
- <ECID id="530127059" valueType="Ascii" logicalName="PM.PM1.RF.PowerAlarmTime" value="" min="" max="" eventTrigger="" units="" description="Power Alarm Time" isArray="false" />
- <ECID id="530127060" valueType="Ascii" logicalName="PM.PM1.RF.PowerCalibrationEnable" value="" min="" max="" eventTrigger="" units="" description="是否校准" isArray="false" />
- <ECID id="530127061" valueType="Ascii" logicalName="PM.PM1.RF.PowerCoefficient" value="" min="" max="" eventTrigger="" units="" description="Power Coefficient" isArray="false" />
- <ECID id="530127062" valueType="Ascii" logicalName="PM.PM1.RF.PowerOnTimeout" value="" min="" max="" eventTrigger="" units="" description="Power On Timeout" isArray="false" />
- <ECID id="530127063" valueType="Ascii" logicalName="PM.PM1.RF.PowerRange" value="" min="" max="" eventTrigger="" units="" description="Power Range" isArray="false" />
- <ECID id="530127064" valueType="Ascii" logicalName="PM.PM1.RF.PowerTuneEnable" value="" min="" max="" eventTrigger="" units="" description="是否补偿" isArray="false" />
- <ECID id="530127065" valueType="Ascii" logicalName="PM.PM1.RF.PowerTuneIsPercent" value="" min="" max="" eventTrigger="" units="" description="是否用百分比" isArray="false" />
- <ECID id="530127066" valueType="Ascii" logicalName="PM.PM1.RF.PowerTuneTable" value="" min="" max="" eventTrigger="" units="" description="Power补偿" isArray="false" />
- <ECID id="530127067" valueType="Ascii" logicalName="PM.PM1.RF.PowerWarningRange" value="" min="" max="" eventTrigger="" units="" description="Power Warning Range" isArray="false" />
- <ECID id="530127068" valueType="Ascii" logicalName="PM.PM1.RF.PowerWarningTime" value="" min="" max="" eventTrigger="" units="" description="Power Warning Time" isArray="false" />
- <ECID id="530127069" valueType="Ascii" logicalName="PM.PM1.RF.Rate10MeterPower" value="" min="" max="" eventTrigger="" units="" description="Rate10 Meter Power" isArray="false" />
- <ECID id="530127070" valueType="Ascii" logicalName="PM.PM1.RF.Rate1MeterPower" value="" min="" max="" eventTrigger="" units="" description="Rate1 Meter Power" isArray="false" />
- <ECID id="530127071" valueType="Ascii" logicalName="PM.PM1.RF.Rate2MeterPower" value="" min="" max="" eventTrigger="" units="" description="Rate2 Meter Power" isArray="false" />
- <ECID id="530127072" valueType="Ascii" logicalName="PM.PM1.RF.Rate3MeterPower" value="" min="" max="" eventTrigger="" units="" description="Rate3 Meter Power" isArray="false" />
- <ECID id="530127073" valueType="Ascii" logicalName="PM.PM1.RF.Rate4MeterPower" value="" min="" max="" eventTrigger="" units="" description="Rate4 Meter Power" isArray="false" />
- <ECID id="530127074" valueType="Ascii" logicalName="PM.PM1.RF.Rate5MeterPower" value="" min="" max="" eventTrigger="" units="" description="Rate5 Meter Power" isArray="false" />
- <ECID id="530127075" valueType="Ascii" logicalName="PM.PM1.RF.Rate6MeterPower" value="" min="" max="" eventTrigger="" units="" description="Rate6 Meter Power" isArray="false" />
- <ECID id="530127076" valueType="Ascii" logicalName="PM.PM1.RF.Rate7MeterPower" value="" min="" max="" eventTrigger="" units="" description="Rate7 Meter Power" isArray="false" />
- <ECID id="530127077" valueType="Ascii" logicalName="PM.PM1.RF.Rate8MeterPower" value="" min="" max="" eventTrigger="" units="" description="Rate8 Meter Power" isArray="false" />
- <ECID id="530127078" valueType="Ascii" logicalName="PM.PM1.RF.Rate9MeterPower" value="" min="" max="" eventTrigger="" units="" description="Rate9 Meter Power" isArray="false" />
- <ECID id="530127079" valueType="Ascii" logicalName="PM.PM1.RF.ReflectPowerAlarmRange" value="" min="" max="" eventTrigger="" units="" description="Reflect Power Alarm Range" isArray="false" />
- <ECID id="530127080" valueType="Ascii" logicalName="PM.PM1.RF.ReflectPowerAlarmTime" value="" min="" max="" eventTrigger="" units="" description="Reflect Power Alarm Time" isArray="false" />
- <ECID id="530127081" valueType="Ascii" logicalName="PM.PM1.RF.ReflectPowerWarningRange" value="" min="" max="" eventTrigger="" units="" description="Reflect Power Warning Range" isArray="false" />
- <ECID id="530127082" valueType="Ascii" logicalName="PM.PM1.RF.ReflectPowerWarningTime" value="" min="" max="" eventTrigger="" units="" description="Reflect Power Warning Time" isArray="false" />
- <ECID id="530128107" valueType="Ascii" logicalName="PM.PM1.Signal.IgnoreExhaustAlarm" value="" min="" max="" eventTrigger="" units="" description="是否忽略排风报警" isArray="false" />
- <ECID id="530129104" valueType="Ascii" logicalName="PM.PM1.VentRoutine.VentBasePressure" value="" min="" max="" eventTrigger="" units="" description="Vent Base Pressure" isArray="false" />
- <ECID id="530129109" valueType="Ascii" logicalName="PM.PM1.VentRoutine.PrepareVentTimeout" value="" min="" max="" eventTrigger="" units="" description="Prepare Vent Timeout" isArray="false" />
- <ECID id="530129110" valueType="Ascii" logicalName="PM.PM1.VentRoutine.VentStableTime" value="" min="" max="" eventTrigger="" units="" description="Vent Stable Time" isArray="false" />
- <ECID id="530129111" valueType="Ascii" logicalName="PM.PM1.VentRoutine.VentTimeout" value="" min="" max="" eventTrigger="" units="" description="Vent Timeout" isArray="false" />
- <ECID id="530208020" valueType="Ascii" logicalName="PM.PM1.Heater.ChamberHeater.CalibrationTable" value="" min="" max="" eventTrigger="" units="" description="校准表" isArray="false" />
- <ECID id="530208021" valueType="Ascii" logicalName="PM.PM1.Heater.ChamberHeater.EnableCalibration" value="" min="" max="" eventTrigger="" units="" description="是否校准" isArray="false" />
- <ECID id="530208022" valueType="Ascii" logicalName="PM.PM1.Heater.ChamberHeater.Range" value="" min="" max="" eventTrigger="" units="" description="Heater max value" isArray="false" />
- <ECID id="530209017" valueType="Ascii" logicalName="PM.PM1.Heater.ChamberHeater1.EnableAutoAdjust" value="" min="" max="" eventTrigger="" units="" description="是否运行自动调节温度开关" isArray="false" />
- <ECID id="530209020" valueType="Ascii" logicalName="PM.PM1.Heater.ChamberHeater1.CalibrationTable" value="" min="" max="" eventTrigger="" units="" description="校准表" isArray="false" />
- <ECID id="530209021" valueType="Ascii" logicalName="PM.PM1.Heater.ChamberHeater1.EnableCalibration" value="" min="" max="" eventTrigger="" units="" description="是否校准" isArray="false" />
- <ECID id="530209022" valueType="Ascii" logicalName="PM.PM1.Heater.ChamberHeater1.Range" value="" min="" max="" eventTrigger="" units="" description="Heater max value" isArray="false" />
- <ECID id="530209023" valueType="Ascii" logicalName="PM.PM1.Heater.ChamberHeater1.AlarmMaxValue" value="" min="" max="" eventTrigger="" units="" description="超过多少°C报警" isArray="false" />
- <ECID id="530209024" valueType="Ascii" logicalName="PM.PM1.Heater.ChamberHeater1.AlarmMinValue" value="" min="" max="" eventTrigger="" units="" description="低于多少°C报警" isArray="false" />
- <ECID id="530209025" valueType="Ascii" logicalName="PM.PM1.Heater.ChamberHeater1.AlarmTime" value="" min="" max="" eventTrigger="" units="" description="持续超过设定时间后报警" isArray="false" />
- <ECID id="530209026" valueType="Ascii" logicalName="PM.PM1.Heater.ChamberHeater1.AutoAdjustMaxValue" value="" min="" max="" eventTrigger="" units="" description="高于这个温度，关闭" isArray="false" />
- <ECID id="530209027" valueType="Ascii" logicalName="PM.PM1.Heater.ChamberHeater1.AutoAdjustMinValue" value="" min="" max="" eventTrigger="" units="" description="低于这个温度，打开" isArray="false" />
- <ECID id="530209028" valueType="Ascii" logicalName="PM.PM1.Heater.ChamberHeater1.EnableAlarm" value="" min="" max="" eventTrigger="" units="" description="是否运行报警" isArray="false" />
- <ECID id="530312025" valueType="Ascii" logicalName="PM.PM1.MFC.Mfc1.AlarmTime" value="" min="" max="" eventTrigger="" units="" description="Alarm Time" isArray="false" />
- <ECID id="530312028" valueType="Ascii" logicalName="PM.PM1.MFC.Mfc1.EnableAlarm" value="" min="" max="" eventTrigger="" units="" description="Enable Alarm" isArray="false" />
- <ECID id="530312038" valueType="Ascii" logicalName="PM.PM1.MFC.Mfc1.AlarmRange" value="" min="" max="" eventTrigger="" units="" description="Alarm Range" isArray="false" />
- <ECID id="530312039" valueType="Ascii" logicalName="PM.PM1.MFC.Mfc1.FlowRegulationFactor" value="" min="" max="" eventTrigger="" units="" description="Flow Regulation Factor" isArray="false" />
- <ECID id="530312040" valueType="Ascii" logicalName="PM.PM1.MFC.Mfc1.GasName" value="" min="" max="" eventTrigger="" units="" description="Gas Name" isArray="false" />
- <ECID id="530312041" valueType="Ascii" logicalName="PM.PM1.MFC.Mfc1.IsGoldenMFC" value="" min="" max="" eventTrigger="" units="" description="Is Golden MFC" isArray="false" />
- <ECID id="530312042" valueType="Ascii" logicalName="PM.PM1.MFC.Mfc1.N2Scale" value="" min="" max="" eventTrigger="" units="" description="N2 Scale" isArray="false" />
- <ECID id="530312043" valueType="Ascii" logicalName="PM.PM1.MFC.Mfc1.ScaleFactor" value="" min="" max="" eventTrigger="" units="" description="Scale Factor" isArray="false" />
- <ECID id="530312044" valueType="Ascii" logicalName="PM.PM1.MFC.Mfc1.StableTime" value="" min="" max="" eventTrigger="" units="" description="Stable Time" isArray="false" />
- <ECID id="530312045" valueType="Ascii" logicalName="PM.PM1.MFC.Mfc1.WarningRange" value="" min="" max="" eventTrigger="" units="" description="Warning Range" isArray="false" />
- <ECID id="530312046" valueType="Ascii" logicalName="PM.PM1.MFC.Mfc1.WarningTime" value="" min="" max="" eventTrigger="" units="" description="Warning Time" isArray="false" />
- <ECID id="530313025" valueType="Ascii" logicalName="PM.PM1.MFC.Mfc2.AlarmTime" value="" min="" max="" eventTrigger="" units="" description="Alarm Time" isArray="false" />
- <ECID id="530313028" valueType="Ascii" logicalName="PM.PM1.MFC.Mfc2.EnableAlarm" value="" min="" max="" eventTrigger="" units="" description="Enable Alarm" isArray="false" />
- <ECID id="530313038" valueType="Ascii" logicalName="PM.PM1.MFC.Mfc2.AlarmRange" value="" min="" max="" eventTrigger="" units="" description="Alarm Range" isArray="false" />
- <ECID id="530313039" valueType="Ascii" logicalName="PM.PM1.MFC.Mfc2.FlowRegulationFactor" value="" min="" max="" eventTrigger="" units="" description="Flow Regulation Factor" isArray="false" />
- <ECID id="530313040" valueType="Ascii" logicalName="PM.PM1.MFC.Mfc2.GasName" value="" min="" max="" eventTrigger="" units="" description="Gas Name" isArray="false" />
- <ECID id="530313041" valueType="Ascii" logicalName="PM.PM1.MFC.Mfc2.IsGoldenMFC" value="" min="" max="" eventTrigger="" units="" description="Is Golden MFC" isArray="false" />
- <ECID id="530313042" valueType="Ascii" logicalName="PM.PM1.MFC.Mfc2.N2Scale" value="" min="" max="" eventTrigger="" units="" description="N2 Scale" isArray="false" />
- <ECID id="530313043" valueType="Ascii" logicalName="PM.PM1.MFC.Mfc2.ScaleFactor" value="" min="" max="" eventTrigger="" units="" description="Scale Factor" isArray="false" />
- <ECID id="530313044" valueType="Ascii" logicalName="PM.PM1.MFC.Mfc2.StableTime" value="" min="" max="" eventTrigger="" units="" description="Stable Time" isArray="false" />
- <ECID id="530313045" valueType="Ascii" logicalName="PM.PM1.MFC.Mfc2.WarningRange" value="" min="" max="" eventTrigger="" units="" description="Warning Range" isArray="false" />
- <ECID id="530313046" valueType="Ascii" logicalName="PM.PM1.MFC.Mfc2.WarningTime" value="" min="" max="" eventTrigger="" units="" description="Warning Time" isArray="false" />
- <ECID id="530314025" valueType="Ascii" logicalName="PM.PM1.MFC.Mfc3.AlarmTime" value="" min="" max="" eventTrigger="" units="" description="Alarm Time" isArray="false" />
- <ECID id="530314028" valueType="Ascii" logicalName="PM.PM1.MFC.Mfc3.EnableAlarm" value="" min="" max="" eventTrigger="" units="" description="Enable Alarm" isArray="false" />
- <ECID id="530314038" valueType="Ascii" logicalName="PM.PM1.MFC.Mfc3.AlarmRange" value="" min="" max="" eventTrigger="" units="" description="Alarm Range" isArray="false" />
- <ECID id="530314039" valueType="Ascii" logicalName="PM.PM1.MFC.Mfc3.FlowRegulationFactor" value="" min="" max="" eventTrigger="" units="" description="Flow Regulation Factor" isArray="false" />
- <ECID id="530314040" valueType="Ascii" logicalName="PM.PM1.MFC.Mfc3.GasName" value="" min="" max="" eventTrigger="" units="" description="Gas Name" isArray="false" />
- <ECID id="530314041" valueType="Ascii" logicalName="PM.PM1.MFC.Mfc3.IsGoldenMFC" value="" min="" max="" eventTrigger="" units="" description="Is Golden MFC" isArray="false" />
- <ECID id="530314042" valueType="Ascii" logicalName="PM.PM1.MFC.Mfc3.N2Scale" value="" min="" max="" eventTrigger="" units="" description="N2 Scale" isArray="false" />
- <ECID id="530314043" valueType="Ascii" logicalName="PM.PM1.MFC.Mfc3.ScaleFactor" value="" min="" max="" eventTrigger="" units="" description="Scale Factor" isArray="false" />
- <ECID id="530314044" valueType="Ascii" logicalName="PM.PM1.MFC.Mfc3.StableTime" value="" min="" max="" eventTrigger="" units="" description="Stable Time" isArray="false" />
- <ECID id="530314045" valueType="Ascii" logicalName="PM.PM1.MFC.Mfc3.WarningRange" value="" min="" max="" eventTrigger="" units="" description="Warning Range" isArray="false" />
- <ECID id="530314046" valueType="Ascii" logicalName="PM.PM1.MFC.Mfc3.WarningTime" value="" min="" max="" eventTrigger="" units="" description="Warning Time" isArray="false" />
- <ECID id="530315025" valueType="Ascii" logicalName="PM.PM1.MFC.Mfc4.AlarmTime" value="" min="" max="" eventTrigger="" units="" description="Alarm Time" isArray="false" />
- <ECID id="530315028" valueType="Ascii" logicalName="PM.PM1.MFC.Mfc4.EnableAlarm" value="" min="" max="" eventTrigger="" units="" description="Enable Alarm" isArray="false" />
- <ECID id="530315038" valueType="Ascii" logicalName="PM.PM1.MFC.Mfc4.AlarmRange" value="" min="" max="" eventTrigger="" units="" description="Alarm Range" isArray="false" />
- <ECID id="530315039" valueType="Ascii" logicalName="PM.PM1.MFC.Mfc4.FlowRegulationFactor" value="" min="" max="" eventTrigger="" units="" description="Flow Regulation Factor" isArray="false" />
- <ECID id="530315040" valueType="Ascii" logicalName="PM.PM1.MFC.Mfc4.GasName" value="" min="" max="" eventTrigger="" units="" description="Gas Name" isArray="false" />
- <ECID id="530315041" valueType="Ascii" logicalName="PM.PM1.MFC.Mfc4.IsGoldenMFC" value="" min="" max="" eventTrigger="" units="" description="Is Golden MFC" isArray="false" />
- <ECID id="530315042" valueType="Ascii" logicalName="PM.PM1.MFC.Mfc4.N2Scale" value="" min="" max="" eventTrigger="" units="" description="N2 Scale" isArray="false" />
- <ECID id="530315043" valueType="Ascii" logicalName="PM.PM1.MFC.Mfc4.ScaleFactor" value="" min="" max="" eventTrigger="" units="" description="Scale Factor" isArray="false" />
- <ECID id="530315044" valueType="Ascii" logicalName="PM.PM1.MFC.Mfc4.StableTime" value="" min="" max="" eventTrigger="" units="" description="Stable Time" isArray="false" />
- <ECID id="530315045" valueType="Ascii" logicalName="PM.PM1.MFC.Mfc4.WarningRange" value="" min="" max="" eventTrigger="" units="" description="Warning Range" isArray="false" />
- <ECID id="530315046" valueType="Ascii" logicalName="PM.PM1.MFC.Mfc4.WarningTime" value="" min="" max="" eventTrigger="" units="" description="Warning Time" isArray="false" />
- <ECID id="530316025" valueType="Ascii" logicalName="PM.PM1.MFC.MfcPurge.AlarmTime" value="" min="" max="" eventTrigger="" units="" description="Alarm Time" isArray="false" />
- <ECID id="530316028" valueType="Ascii" logicalName="PM.PM1.MFC.MfcPurge.EnableAlarm" value="" min="" max="" eventTrigger="" units="" description="Enable Alarm" isArray="false" />
- <ECID id="530316038" valueType="Ascii" logicalName="PM.PM1.MFC.MfcPurge.AlarmRange" value="" min="" max="" eventTrigger="" units="" description="Alarm Range" isArray="false" />
- <ECID id="530316039" valueType="Ascii" logicalName="PM.PM1.MFC.MfcPurge.FlowRegulationFactor" value="" min="" max="" eventTrigger="" units="" description="Flow Regulation Factor" isArray="false" />
- <ECID id="530316040" valueType="Ascii" logicalName="PM.PM1.MFC.MfcPurge.GasName" value="" min="" max="" eventTrigger="" units="" description="Gas Name" isArray="false" />
- <ECID id="530316041" valueType="Ascii" logicalName="PM.PM1.MFC.MfcPurge.IsGoldenMFC" value="" min="" max="" eventTrigger="" units="" description="Is Golden MFC" isArray="false" />
- <ECID id="530316042" valueType="Ascii" logicalName="PM.PM1.MFC.MfcPurge.N2Scale" value="" min="" max="" eventTrigger="" units="" description="N2 Scale" isArray="false" />
- <ECID id="530316043" valueType="Ascii" logicalName="PM.PM1.MFC.MfcPurge.ScaleFactor" value="" min="" max="" eventTrigger="" units="" description="Scale Factor" isArray="false" />
- <ECID id="530316044" valueType="Ascii" logicalName="PM.PM1.MFC.MfcPurge.StableTime" value="" min="" max="" eventTrigger="" units="" description="Stable Time" isArray="false" />
- <ECID id="530316045" valueType="Ascii" logicalName="PM.PM1.MFC.MfcPurge.WarningRange" value="" min="" max="" eventTrigger="" units="" description="Warning Range" isArray="false" />
- <ECID id="530316046" valueType="Ascii" logicalName="PM.PM1.MFC.MfcPurge.WarningTime" value="" min="" max="" eventTrigger="" units="" description="Warning Time" isArray="false" />
- <ECID id="530418025" valueType="Ascii" logicalName="PM.PM1.PressureMeter.CDAPressure.AlarmTime" value="" min="" max="" eventTrigger="" units="" description="Alarm Time" isArray="false" />
- <ECID id="530418028" valueType="Ascii" logicalName="PM.PM1.PressureMeter.CDAPressure.EnableAlarm" value="" min="" max="" eventTrigger="" units="" description="Enable Alarm" isArray="false" />
- <ECID id="530418046" valueType="Ascii" logicalName="PM.PM1.PressureMeter.CDAPressure.WarningTime" value="" min="" max="" eventTrigger="" units="" description="Warning Time" isArray="false" />
- <ECID id="530418085" valueType="Ascii" logicalName="PM.PM1.PressureMeter.CDAPressure.MaxValue" value="" min="" max="" eventTrigger="" units="" description="Max Value" isArray="false" />
- <ECID id="530418086" valueType="Ascii" logicalName="PM.PM1.PressureMeter.CDAPressure.MinValue" value="" min="" max="" eventTrigger="" units="" description="Min Value" isArray="false" />
- <ECID id="530419087" valueType="Ascii" logicalName="PM.PM1.PressureMeter.ChamberMonitorPressure.Precision" value="" min="" max="" eventTrigger="" units="" description="Precision" isArray="false" />
- <ECID id="530420025" valueType="Ascii" logicalName="PM.PM1.PressureMeter.Gas1Pressure.AlarmTime" value="" min="" max="" eventTrigger="" units="" description="Alarm Time" isArray="false" />
- <ECID id="530420028" valueType="Ascii" logicalName="PM.PM1.PressureMeter.Gas1Pressure.EnableAlarm" value="" min="" max="" eventTrigger="" units="" description="Enable Alarm" isArray="false" />
- <ECID id="530420046" valueType="Ascii" logicalName="PM.PM1.PressureMeter.Gas1Pressure.WarningTime" value="" min="" max="" eventTrigger="" units="" description="Warning Time" isArray="false" />
- <ECID id="530420085" valueType="Ascii" logicalName="PM.PM1.PressureMeter.Gas1Pressure.MaxValue" value="" min="" max="" eventTrigger="" units="" description="Max Value" isArray="false" />
- <ECID id="530420086" valueType="Ascii" logicalName="PM.PM1.PressureMeter.Gas1Pressure.MinValue" value="" min="" max="" eventTrigger="" units="" description="Min Value" isArray="false" />
- <ECID id="530421025" valueType="Ascii" logicalName="PM.PM1.PressureMeter.Gas2Pressure.AlarmTime" value="" min="" max="" eventTrigger="" units="" description="Alarm Time" isArray="false" />
- <ECID id="530421028" valueType="Ascii" logicalName="PM.PM1.PressureMeter.Gas2Pressure.EnableAlarm" value="" min="" max="" eventTrigger="" units="" description="Enable Alarm" isArray="false" />
- <ECID id="530421046" valueType="Ascii" logicalName="PM.PM1.PressureMeter.Gas2Pressure.WarningTime" value="" min="" max="" eventTrigger="" units="" description="Warning Time" isArray="false" />
- <ECID id="530421085" valueType="Ascii" logicalName="PM.PM1.PressureMeter.Gas2Pressure.MaxValue" value="" min="" max="" eventTrigger="" units="" description="Max Value" isArray="false" />
- <ECID id="530421086" valueType="Ascii" logicalName="PM.PM1.PressureMeter.Gas2Pressure.MinValue" value="" min="" max="" eventTrigger="" units="" description="Min Value" isArray="false" />
- <ECID id="530422025" valueType="Ascii" logicalName="PM.PM1.PressureMeter.Gas3Pressure.AlarmTime" value="" min="" max="" eventTrigger="" units="" description="Alarm Time" isArray="false" />
- <ECID id="530422028" valueType="Ascii" logicalName="PM.PM1.PressureMeter.Gas3Pressure.EnableAlarm" value="" min="" max="" eventTrigger="" units="" description="Enable Alarm" isArray="false" />
- <ECID id="530422046" valueType="Ascii" logicalName="PM.PM1.PressureMeter.Gas3Pressure.WarningTime" value="" min="" max="" eventTrigger="" units="" description="Warning Time" isArray="false" />
- <ECID id="530422085" valueType="Ascii" logicalName="PM.PM1.PressureMeter.Gas3Pressure.MaxValue" value="" min="" max="" eventTrigger="" units="" description="Max Value" isArray="false" />
- <ECID id="530422086" valueType="Ascii" logicalName="PM.PM1.PressureMeter.Gas3Pressure.MinValue" value="" min="" max="" eventTrigger="" units="" description="Min Value" isArray="false" />
- <ECID id="530423025" valueType="Ascii" logicalName="PM.PM1.PressureMeter.Gas4Pressure.AlarmTime" value="" min="" max="" eventTrigger="" units="" description="Alarm Time" isArray="false" />
- <ECID id="530423028" valueType="Ascii" logicalName="PM.PM1.PressureMeter.Gas4Pressure.EnableAlarm" value="" min="" max="" eventTrigger="" units="" description="Enable Alarm" isArray="false" />
- <ECID id="530423046" valueType="Ascii" logicalName="PM.PM1.PressureMeter.Gas4Pressure.WarningTime" value="" min="" max="" eventTrigger="" units="" description="Warning Time" isArray="false" />
- <ECID id="530423085" valueType="Ascii" logicalName="PM.PM1.PressureMeter.Gas4Pressure.MaxValue" value="" min="" max="" eventTrigger="" units="" description="Max Value" isArray="false" />
- <ECID id="530423086" valueType="Ascii" logicalName="PM.PM1.PressureMeter.Gas4Pressure.MinValue" value="" min="" max="" eventTrigger="" units="" description="Min Value" isArray="false" />
- <ECID id="530505016" valueType="Ascii" logicalName="PM.PM2.ChamberDoor.MoveTimeout" value="" min="" max="" eventTrigger="" units="" description="Move Timeout" isArray="false" />
- <ECID id="530506016" valueType="Ascii" logicalName="PM.PM2.ChamberLiftPin.MoveTimeout" value="" min="" max="" eventTrigger="" units="" description="Move Timeout" isArray="false" />
- <ECID id="530507017" valueType="Ascii" logicalName="PM.PM2.Chiller.EnableAutoAdjust" value="" min="" max="" eventTrigger="" units="" description="是否运行自动调节Chiller开关" isArray="false" />
- <ECID id="530507018" valueType="Ascii" logicalName="PM.PM2.Chiller.TurnOffIfTempBelow" value="" min="" max="" eventTrigger="" units="" description="低于这个温度，关闭Chiller" isArray="false" />
- <ECID id="530507019" valueType="Ascii" logicalName="PM.PM2.Chiller.TurnOnIfTempAbove" value="" min="" max="" eventTrigger="" units="" description="高于这个温度，打开chiller" isArray="false" />
- <ECID id="530510029" valueType="Ascii" logicalName="PM.PM2.LeakCheck.EnableTuning" value="" min="" max="" eventTrigger="" units="" description="whether enable tuning" isArray="false" />
- <ECID id="530510030" valueType="Ascii" logicalName="PM.PM2.LeakCheck.LeakCheckDelayTime" value="" min="" max="" eventTrigger="" units="" description="Leak Check Delay Time" isArray="false" />
- <ECID id="530510031" valueType="Ascii" logicalName="PM.PM2.LeakCheck.PumpBasePressure" value="" min="" max="" eventTrigger="" units="" description="Pump Base Pressure" isArray="false" />
- <ECID id="530510032" valueType="Ascii" logicalName="PM.PM2.LeakCheck.PumpDelayTime" value="" min="" max="" eventTrigger="" units="" description="Pump Delay Time" isArray="false" />
- <ECID id="530510033" valueType="Ascii" logicalName="PM.PM2.LeakCheck.PumpTimeout" value="" min="" max="" eventTrigger="" units="" description="Pump Timeout" isArray="false" />
- <ECID id="530510034" valueType="Ascii" logicalName="PM.PM2.LeakCheck.TuningPercent" value="" min="" max="" eventTrigger="" units="" description="tuning percent" isArray="false" />
- <ECID id="530510035" valueType="Ascii" logicalName="PM.PM2.LeakCheck.TVPosition" value="" min="" max="" eventTrigger="" units="" description="TV Position" isArray="false" />
- <ECID id="530511036" valueType="Ascii" logicalName="PM.PM2.MainPump.ResetErrorTimeout" value="" min="" max="" eventTrigger="" units="" description="Reset Error Timeout" isArray="false" />
- <ECID id="530511037" valueType="Ascii" logicalName="PM.PM2.MainPump.StartTimeout" value="" min="" max="" eventTrigger="" units="" description="Start Timeout" isArray="false" />
- <ECID id="530517036" valueType="Ascii" logicalName="PM.PM2.Microwave.ResetErrorTimeout" value="" min="" max="" eventTrigger="" units="" description="Reset Error Timeout" isArray="false" />
- <ECID id="530517044" valueType="Ascii" logicalName="PM.PM2.Microwave.StableTime" value="" min="" max="" eventTrigger="" units="" description="Stable Time" isArray="false" />
- <ECID id="530517047" valueType="Ascii" logicalName="PM.PM2.Microwave.CalibrationGasFlowDelayTime" value="" min="" max="" eventTrigger="" units="" description="Calibration Gas Flow Delay Time" isArray="false" />
- <ECID id="530517048" valueType="Ascii" logicalName="PM.PM2.Microwave.CalibrationTimeOut" value="" min="" max="" eventTrigger="" units="" description="Calibration TimeOut" isArray="false" />
- <ECID id="530517049" valueType="Ascii" logicalName="PM.PM2.Microwave.CalibrationUseDummyLoad" value="" min="" max="" eventTrigger="" units="" description="Calibration Use Dummy Load" isArray="false" />
- <ECID id="530517050" valueType="Ascii" logicalName="PM.PM2.Microwave.EnablePlasmaDetect" value="" min="" max="" eventTrigger="" units="" description="Enable PlasmaD etect" isArray="false" />
- <ECID id="530517051" valueType="Ascii" logicalName="PM.PM2.Microwave.EnablePlasmaDetectDelayTime" value="" min="" max="" eventTrigger="" units="" description="Enable Plasma Detect Delay Time" isArray="false" />
- <ECID id="530517052" valueType="Ascii" logicalName="PM.PM2.Microwave.EnablePlasmaDetectStableTime" value="" min="" max="" eventTrigger="" units="" description="Enable Plasma Detect Stable Time" isArray="false" />
- <ECID id="530517053" valueType="Ascii" logicalName="PM.PM2.Microwave.EnablePowerAlarm" value="" min="" max="" eventTrigger="" units="" description="Enable Power Alarm" isArray="false" />
- <ECID id="530517054" valueType="Ascii" logicalName="PM.PM2.Microwave.EnableReflectPowerAlarm" value="" min="" max="" eventTrigger="" units="" description="Enable Reflect Power Alarm" isArray="false" />
- <ECID id="530517055" valueType="Ascii" logicalName="PM.PM2.Microwave.ForwardPowerDisplayOffset" value="" min="" max="" eventTrigger="" units="" description="Forward Power Display Offset" isArray="false" />
- <ECID id="530517056" valueType="Ascii" logicalName="PM.PM2.Microwave.ImpulseTime" value="" min="" max="" eventTrigger="" units="" description="脉冲持续时间ti" isArray="false" />
- <ECID id="530517057" valueType="Ascii" logicalName="PM.PM2.Microwave.PauseTime" value="" min="" max="" eventTrigger="" units="" description="暂停时间tp" isArray="false" />
- <ECID id="530517058" valueType="Ascii" logicalName="PM.PM2.Microwave.PowerAlarmRange" value="" min="" max="" eventTrigger="" units="" description="Power Alarm Range" isArray="false" />
- <ECID id="530517059" valueType="Ascii" logicalName="PM.PM2.Microwave.PowerAlarmTime" value="" min="" max="" eventTrigger="" units="" description="Power Alarm Time" isArray="false" />
- <ECID id="530517060" valueType="Ascii" logicalName="PM.PM2.Microwave.PowerCalibrationEnable" value="" min="" max="" eventTrigger="" units="" description="是否校准" isArray="false" />
- <ECID id="530517061" valueType="Ascii" logicalName="PM.PM2.Microwave.PowerCoefficient" value="" min="" max="" eventTrigger="" units="" description="Power Coefficient" isArray="false" />
- <ECID id="530517062" valueType="Ascii" logicalName="PM.PM2.Microwave.PowerOnTimeout" value="" min="" max="" eventTrigger="" units="" description="Power On Timeout" isArray="false" />
- <ECID id="530517063" valueType="Ascii" logicalName="PM.PM2.Microwave.PowerRange" value="" min="" max="" eventTrigger="" units="" description="Power Range" isArray="false" />
- <ECID id="530517064" valueType="Ascii" logicalName="PM.PM2.Microwave.PowerTuneEnable" value="" min="" max="" eventTrigger="" units="" description="是否补偿" isArray="false" />
- <ECID id="530517065" valueType="Ascii" logicalName="PM.PM2.Microwave.PowerTuneIsPercent" value="" min="" max="" eventTrigger="" units="" description="是否用百分比" isArray="false" />
- <ECID id="530517066" valueType="Ascii" logicalName="PM.PM2.Microwave.PowerTuneTable" value="" min="" max="" eventTrigger="" units="" description="Power补偿" isArray="false" />
- <ECID id="530517067" valueType="Ascii" logicalName="PM.PM2.Microwave.PowerWarningRange" value="" min="" max="" eventTrigger="" units="" description="Power Warning Range" isArray="false" />
- <ECID id="530517068" valueType="Ascii" logicalName="PM.PM2.Microwave.PowerWarningTime" value="" min="" max="" eventTrigger="" units="" description="Power Warning Time" isArray="false" />
- <ECID id="530517069" valueType="Ascii" logicalName="PM.PM2.Microwave.Rate10MeterPower" value="" min="" max="" eventTrigger="" units="" description="Rate10 Meter Power" isArray="false" />
- <ECID id="530517070" valueType="Ascii" logicalName="PM.PM2.Microwave.Rate1MeterPower" value="" min="" max="" eventTrigger="" units="" description="Rate1 Meter Power" isArray="false" />
- <ECID id="530517071" valueType="Ascii" logicalName="PM.PM2.Microwave.Rate2MeterPower" value="" min="" max="" eventTrigger="" units="" description="Rate2 Meter Power" isArray="false" />
- <ECID id="530517072" valueType="Ascii" logicalName="PM.PM2.Microwave.Rate3MeterPower" value="" min="" max="" eventTrigger="" units="" description="Rate3 Meter Power" isArray="false" />
- <ECID id="530517073" valueType="Ascii" logicalName="PM.PM2.Microwave.Rate4MeterPower" value="" min="" max="" eventTrigger="" units="" description="Rate4 Meter Power" isArray="false" />
- <ECID id="530517074" valueType="Ascii" logicalName="PM.PM2.Microwave.Rate5MeterPower" value="" min="" max="" eventTrigger="" units="" description="Rate5 Meter Power" isArray="false" />
- <ECID id="530517075" valueType="Ascii" logicalName="PM.PM2.Microwave.Rate6MeterPower" value="" min="" max="" eventTrigger="" units="" description="Rate6 Meter Power" isArray="false" />
- <ECID id="530517076" valueType="Ascii" logicalName="PM.PM2.Microwave.Rate7MeterPower" value="" min="" max="" eventTrigger="" units="" description="Rate7 Meter Power" isArray="false" />
- <ECID id="530517077" valueType="Ascii" logicalName="PM.PM2.Microwave.Rate8MeterPower" value="" min="" max="" eventTrigger="" units="" description="Rate8 Meter Power" isArray="false" />
- <ECID id="530517078" valueType="Ascii" logicalName="PM.PM2.Microwave.Rate9MeterPower" value="" min="" max="" eventTrigger="" units="" description="Rate9 Meter Power" isArray="false" />
- <ECID id="530517079" valueType="Ascii" logicalName="PM.PM2.Microwave.ReflectPowerAlarmRange" value="" min="" max="" eventTrigger="" units="" description="Reflect Power Alarm Range" isArray="false" />
- <ECID id="530517080" valueType="Ascii" logicalName="PM.PM2.Microwave.ReflectPowerAlarmTime" value="" min="" max="" eventTrigger="" units="" description="Reflect Power Alarm Time" isArray="false" />
- <ECID id="530517081" valueType="Ascii" logicalName="PM.PM2.Microwave.ReflectPowerWarningRange" value="" min="" max="" eventTrigger="" units="" description="Reflect Power Warning Range" isArray="false" />
- <ECID id="530517082" valueType="Ascii" logicalName="PM.PM2.Microwave.ReflectPowerWarningTime" value="" min="" max="" eventTrigger="" units="" description="Reflect Power Warning Time" isArray="false" />
- <ECID id="530517083" valueType="Ascii" logicalName="PM.PM2.Microwave.TuningTable" value="" min="" max="" eventTrigger="" units="" description="Tuning Table" isArray="false" />
- <ECID id="530517084" valueType="Ascii" logicalName="PM.PM2.Microwave.TuningTableRange" value="" min="" max="" eventTrigger="" units="" description="Tuning Table Range" isArray="false" />
- <ECID id="530524088" valueType="Ascii" logicalName="PM.PM2.ProcessRoutine.PressureAlarmRange" value="" min="" max="" eventTrigger="" units="" description="Pressure Alarm Range" isArray="false" />
- <ECID id="530524089" valueType="Ascii" logicalName="PM.PM2.ProcessRoutine.PressureAlarmTime" value="" min="" max="" eventTrigger="" units="" description="Pressure Alarm Time" isArray="false" />
- <ECID id="530524090" valueType="Ascii" logicalName="PM.PM2.ProcessRoutine.PurgePumpDelayTime" value="" min="" max="" eventTrigger="" units="" description="Purge Pump Delay Time" isArray="false" />
- <ECID id="530524091" valueType="Ascii" logicalName="PM.PM2.ProcessRoutine.PurgePumpPressure" value="" min="" max="" eventTrigger="" units="" description="Purge Pump Pressure" isArray="false" />
- <ECID id="530524092" valueType="Ascii" logicalName="PM.PM2.ProcessRoutine.PurgePumpTimeout" value="" min="" max="" eventTrigger="" units="" description="Purge Pump Timeout" isArray="false" />
- <ECID id="530524093" valueType="Ascii" logicalName="PM.PM2.ProcessRoutine.PurgeVentDelayTime" value="" min="" max="" eventTrigger="" units="" description="Purge Vent Delay Time" isArray="false" />
- <ECID id="530524094" valueType="Ascii" logicalName="PM.PM2.ProcessRoutine.PurgeVentPressure" value="" min="" max="" eventTrigger="" units="" description="Purge Vent Pressure" isArray="false" />
- <ECID id="530524095" valueType="Ascii" logicalName="PM.PM2.ProcessRoutine.PurgeVentTimeout" value="" min="" max="" eventTrigger="" units="" description="Purge Vent Timeout" isArray="false" />
- <ECID id="530525031" valueType="Ascii" logicalName="PM.PM2.PumpRoutine.PumpBasePressure" value="" min="" max="" eventTrigger="" units="" description="Pump Base Pressure" isArray="false" />
- <ECID id="530525096" valueType="Ascii" logicalName="PM.PM2.PumpRoutine.PreparePumpTimeout" value="" min="" max="" eventTrigger="" units="" description="Prepare Pump Timeout" isArray="false" />
- <ECID id="530525097" valueType="Ascii" logicalName="PM.PM2.PumpRoutine.PumpStableTime" value="" min="" max="" eventTrigger="" units="" description="Pump Stable Time" isArray="false" />
- <ECID id="530525098" valueType="Ascii" logicalName="PM.PM2.PumpRoutine.PumpToBasePressureTimeout" value="" min="" max="" eventTrigger="" units="" description="Pump To Base Pressure Timeout" isArray="false" />
- <ECID id="530525099" valueType="Ascii" logicalName="PM.PM2.PumpRoutine.SlowPumpBasePressure" value="" min="" max="" eventTrigger="" units="" description="Slow Pump Base Pressure" isArray="false" />
- <ECID id="530525100" valueType="Ascii" logicalName="PM.PM2.PumpRoutine.SlowPumpTimeout" value="" min="" max="" eventTrigger="" units="" description="Slow Pump Timeout" isArray="false" />
- <ECID id="530525101" valueType="Ascii" logicalName="PM.PM2.PumpRoutine.TVPositionFastPump" value="" min="" max="" eventTrigger="" units="" description="TV Position Fast Pump" isArray="false" />
- <ECID id="530525102" valueType="Ascii" logicalName="PM.PM2.PumpRoutine.TVPositionSlowPump" value="" min="" max="" eventTrigger="" units="" description="TV Position Slow Pump" isArray="false" />
- <ECID id="530526031" valueType="Ascii" logicalName="PM.PM2.Purge.PumpBasePressure" value="" min="" max="" eventTrigger="" units="" description="Pump Base Pressure" isArray="false" />
- <ECID id="530526032" valueType="Ascii" logicalName="PM.PM2.Purge.PumpDelayTime" value="" min="" max="" eventTrigger="" units="" description="Pump Delay Time" isArray="false" />
- <ECID id="530526103" valueType="Ascii" logicalName="PM.PM2.Purge.CyclePurgeCount" value="" min="" max="" eventTrigger="" units="" description="Cycle Purge Count" isArray="false" />
- <ECID id="530526104" valueType="Ascii" logicalName="PM.PM2.Purge.VentBasePressure" value="" min="" max="" eventTrigger="" units="" description="Vent Base Pressure" isArray="false" />
- <ECID id="530526105" valueType="Ascii" logicalName="PM.PM2.Purge.VentDelayTime" value="" min="" max="" eventTrigger="" units="" description="Vent Delay Time" isArray="false" />
- <ECID id="530527044" valueType="Ascii" logicalName="PM.PM2.RF.StableTime" value="" min="" max="" eventTrigger="" units="" description="Stable Time" isArray="false" />
- <ECID id="530527047" valueType="Ascii" logicalName="PM.PM2.RF.CalibrationGasFlowDelayTime" value="" min="" max="" eventTrigger="" units="" description="Calibration Gas Flow Delay Time" isArray="false" />
- <ECID id="530527048" valueType="Ascii" logicalName="PM.PM2.RF.CalibrationTimeOut" value="" min="" max="" eventTrigger="" units="" description="Calibration TimeOut" isArray="false" />
- <ECID id="530527049" valueType="Ascii" logicalName="PM.PM2.RF.CalibrationUseDummyLoad" value="" min="" max="" eventTrigger="" units="" description="Calibration Use Dummy Load" isArray="false" />
- <ECID id="530527050" valueType="Ascii" logicalName="PM.PM2.RF.EnablePlasmaDetect" value="" min="" max="" eventTrigger="" units="" description="Enable Plasma Detect" isArray="false" />
- <ECID id="530527051" valueType="Ascii" logicalName="PM.PM2.RF.EnablePlasmaDetectDelayTime" value="" min="" max="" eventTrigger="" units="" description="Enable Plasma Detect Delay Time" isArray="false" />
- <ECID id="530527052" valueType="Ascii" logicalName="PM.PM2.RF.EnablePlasmaDetectStableTime" value="" min="" max="" eventTrigger="" units="" description="Enable Plasma Detect Stable Time" isArray="false" />
- <ECID id="530527053" valueType="Ascii" logicalName="PM.PM2.RF.EnablePowerAlarm" value="" min="" max="" eventTrigger="" units="" description="Enable Power Alarm" isArray="false" />
- <ECID id="530527054" valueType="Ascii" logicalName="PM.PM2.RF.EnableReflectPowerAlarm" value="" min="" max="" eventTrigger="" units="" description="Enable Reflect Power Alarm" isArray="false" />
- <ECID id="530527055" valueType="Ascii" logicalName="PM.PM2.RF.ForwardPowerDisplayOffset" value="" min="" max="" eventTrigger="" units="" description="Forward Power Display Offset" isArray="false" />
- <ECID id="530527058" valueType="Ascii" logicalName="PM.PM2.RF.PowerAlarmRange" value="" min="" max="" eventTrigger="" units="" description="Power Alarm Range" isArray="false" />
- <ECID id="530527059" valueType="Ascii" logicalName="PM.PM2.RF.PowerAlarmTime" value="" min="" max="" eventTrigger="" units="" description="Power Alarm Time" isArray="false" />
- <ECID id="530527060" valueType="Ascii" logicalName="PM.PM2.RF.PowerCalibrationEnable" value="" min="" max="" eventTrigger="" units="" description="是否校准" isArray="false" />
- <ECID id="530527061" valueType="Ascii" logicalName="PM.PM2.RF.PowerCoefficient" value="" min="" max="" eventTrigger="" units="" description="Power Coefficient" isArray="false" />
- <ECID id="530527062" valueType="Ascii" logicalName="PM.PM2.RF.PowerOnTimeout" value="" min="" max="" eventTrigger="" units="" description="Power On Timeout" isArray="false" />
- <ECID id="530527063" valueType="Ascii" logicalName="PM.PM2.RF.PowerRange" value="" min="" max="" eventTrigger="" units="" description="Power Range" isArray="false" />
- <ECID id="530527064" valueType="Ascii" logicalName="PM.PM2.RF.PowerTuneEnable" value="" min="" max="" eventTrigger="" units="" description="是否补偿" isArray="false" />
- <ECID id="530527065" valueType="Ascii" logicalName="PM.PM2.RF.PowerTuneIsPercent" value="" min="" max="" eventTrigger="" units="" description="是否用百分比" isArray="false" />
- <ECID id="530527066" valueType="Ascii" logicalName="PM.PM2.RF.PowerTuneTable" value="" min="" max="" eventTrigger="" units="" description="Power补偿" isArray="false" />
- <ECID id="530527067" valueType="Ascii" logicalName="PM.PM2.RF.PowerWarningRange" value="" min="" max="" eventTrigger="" units="" description="Power Warning Range" isArray="false" />
- <ECID id="530527068" valueType="Ascii" logicalName="PM.PM2.RF.PowerWarningTime" value="" min="" max="" eventTrigger="" units="" description="Power Warning Time" isArray="false" />
- <ECID id="530527069" valueType="Ascii" logicalName="PM.PM2.RF.Rate10MeterPower" value="" min="" max="" eventTrigger="" units="" description="Rate10 Meter Power" isArray="false" />
- <ECID id="530527070" valueType="Ascii" logicalName="PM.PM2.RF.Rate1MeterPower" value="" min="" max="" eventTrigger="" units="" description="Rate1 Meter Power" isArray="false" />
- <ECID id="530527071" valueType="Ascii" logicalName="PM.PM2.RF.Rate2MeterPower" value="" min="" max="" eventTrigger="" units="" description="Rate2 Meter Power" isArray="false" />
- <ECID id="530527072" valueType="Ascii" logicalName="PM.PM2.RF.Rate3MeterPower" value="" min="" max="" eventTrigger="" units="" description="Rate3 Meter Power" isArray="false" />
- <ECID id="530527073" valueType="Ascii" logicalName="PM.PM2.RF.Rate4MeterPower" value="" min="" max="" eventTrigger="" units="" description="Rate4 Meter Power" isArray="false" />
- <ECID id="530527074" valueType="Ascii" logicalName="PM.PM2.RF.Rate5MeterPower" value="" min="" max="" eventTrigger="" units="" description="Rate5 Meter Power" isArray="false" />
- <ECID id="530527075" valueType="Ascii" logicalName="PM.PM2.RF.Rate6MeterPower" value="" min="" max="" eventTrigger="" units="" description="Rate6 Meter Power" isArray="false" />
- <ECID id="530527076" valueType="Ascii" logicalName="PM.PM2.RF.Rate7MeterPower" value="" min="" max="" eventTrigger="" units="" description="Rate7 Meter Power" isArray="false" />
- <ECID id="530527077" valueType="Ascii" logicalName="PM.PM2.RF.Rate8MeterPower" value="" min="" max="" eventTrigger="" units="" description="Rate8 Meter Power" isArray="false" />
- <ECID id="530527078" valueType="Ascii" logicalName="PM.PM2.RF.Rate9MeterPower" value="" min="" max="" eventTrigger="" units="" description="Rate9 Meter Power" isArray="false" />
- <ECID id="530527079" valueType="Ascii" logicalName="PM.PM2.RF.ReflectPowerAlarmRange" value="" min="" max="" eventTrigger="" units="" description="Reflect Power Alarm Range" isArray="false" />
- <ECID id="530527080" valueType="Ascii" logicalName="PM.PM2.RF.ReflectPowerAlarmTime" value="" min="" max="" eventTrigger="" units="" description="Reflect Power Alarm Time" isArray="false" />
- <ECID id="530527081" valueType="Ascii" logicalName="PM.PM2.RF.ReflectPowerWarningRange" value="" min="" max="" eventTrigger="" units="" description="Reflect Power Warning Range" isArray="false" />
- <ECID id="530527082" valueType="Ascii" logicalName="PM.PM2.RF.ReflectPowerWarningTime" value="" min="" max="" eventTrigger="" units="" description="Reflect Power Warning Time" isArray="false" />
- <ECID id="530528107" valueType="Ascii" logicalName="PM.PM2.Signal.IgnoreExhaustAlarm" value="" min="" max="" eventTrigger="" units="" description="忽略排风报警" isArray="false" />
- <ECID id="530529104" valueType="Ascii" logicalName="PM.PM2.VentRoutine.VentBasePressure" value="" min="" max="" eventTrigger="" units="" description="Vent Base Pressure" isArray="false" />
- <ECID id="530529109" valueType="Ascii" logicalName="PM.PM2.VentRoutine.PrepareVentTimeout" value="" min="" max="" eventTrigger="" units="" description="Prepare Vent Timeout" isArray="false" />
- <ECID id="530529110" valueType="Ascii" logicalName="PM.PM2.VentRoutine.VentStableTime" value="" min="" max="" eventTrigger="" units="" description="Vent Stable Time" isArray="false" />
- <ECID id="530529111" valueType="Ascii" logicalName="PM.PM2.VentRoutine.VentTimeout" value="" min="" max="" eventTrigger="" units="" description="Vent Timeout" isArray="false" />
- <ECID id="530608020" valueType="Ascii" logicalName="PM.PM2.Heater.ChamberHeater.CalibrationTable" value="" min="" max="" eventTrigger="" units="" description="校准表" isArray="false" />
- <ECID id="530608021" valueType="Ascii" logicalName="PM.PM2.Heater.ChamberHeater.EnableCalibration" value="" min="" max="" eventTrigger="" units="" description="是否校准" isArray="false" />
- <ECID id="530608022" valueType="Ascii" logicalName="PM.PM2.Heater.ChamberHeater.Range" value="" min="" max="" eventTrigger="" units="" description="Heater max value" isArray="false" />
- <ECID id="530609017" valueType="Ascii" logicalName="PM.PM2.Heater.ChamberHeater1.EnableAutoAdjust" value="" min="" max="" eventTrigger="" units="" description="是否运行自动调节温度开关" isArray="false" />
- <ECID id="530609020" valueType="Ascii" logicalName="PM.PM2.Heater.ChamberHeater1.CalibrationTable" value="" min="" max="" eventTrigger="" units="" description="校准表" isArray="false" />
- <ECID id="530609021" valueType="Ascii" logicalName="PM.PM2.Heater.ChamberHeater1.EnableCalibration" value="" min="" max="" eventTrigger="" units="" description="是否校准" isArray="false" />
- <ECID id="530609022" valueType="Ascii" logicalName="PM.PM2.Heater.ChamberHeater1.Range" value="" min="" max="" eventTrigger="" units="" description="Heater max value" isArray="false" />
- <ECID id="530609023" valueType="Ascii" logicalName="PM.PM2.Heater.ChamberHeater1.AlarmMaxValue" value="" min="" max="" eventTrigger="" units="" description="超过多少°C报警" isArray="false" />
- <ECID id="530609024" valueType="Ascii" logicalName="PM.PM2.Heater.ChamberHeater1.AlarmMinValue" value="" min="" max="" eventTrigger="" units="" description="低于多少°C报警" isArray="false" />
- <ECID id="530609025" valueType="Ascii" logicalName="PM.PM2.Heater.ChamberHeater1.AlarmTime" value="" min="" max="" eventTrigger="" units="" description="持续超过设定时间后报警" isArray="false" />
- <ECID id="530609026" valueType="Ascii" logicalName="PM.PM2.Heater.ChamberHeater1.AutoAdjustMaxValue" value="" min="" max="" eventTrigger="" units="" description="高于这个温度，关闭" isArray="false" />
- <ECID id="530609027" valueType="Ascii" logicalName="PM.PM2.Heater.ChamberHeater1.AutoAdjustMinValue" value="" min="" max="" eventTrigger="" units="" description="低于这个温度，打开" isArray="false" />
- <ECID id="530609028" valueType="Ascii" logicalName="PM.PM2.Heater.ChamberHeater1.EnableAlarm" value="" min="" max="" eventTrigger="" units="" description="是否运行报警" isArray="false" />
- <ECID id="530712025" valueType="Ascii" logicalName="PM.PM2.MFC.Mfc1.AlarmTime" value="" min="" max="" eventTrigger="" units="" description="Alarm Time" isArray="false" />
- <ECID id="530712028" valueType="Ascii" logicalName="PM.PM2.MFC.Mfc1.EnableAlarm" value="" min="" max="" eventTrigger="" units="" description="Enable Alarm" isArray="false" />
- <ECID id="530712038" valueType="Ascii" logicalName="PM.PM2.MFC.Mfc1.AlarmRange" value="" min="" max="" eventTrigger="" units="" description="Alarm Range" isArray="false" />
- <ECID id="530712039" valueType="Ascii" logicalName="PM.PM2.MFC.Mfc1.FlowRegulationFactor" value="" min="" max="" eventTrigger="" units="" description="Flow Regulation Factor" isArray="false" />
- <ECID id="530712040" valueType="Ascii" logicalName="PM.PM2.MFC.Mfc1.GasName" value="" min="" max="" eventTrigger="" units="" description="Gas Name" isArray="false" />
- <ECID id="530712041" valueType="Ascii" logicalName="PM.PM2.MFC.Mfc1.IsGoldenMFC" value="" min="" max="" eventTrigger="" units="" description="Is Golden MFC" isArray="false" />
- <ECID id="530712042" valueType="Ascii" logicalName="PM.PM2.MFC.Mfc1.N2Scale" value="" min="" max="" eventTrigger="" units="" description="N2 Scale" isArray="false" />
- <ECID id="530712043" valueType="Ascii" logicalName="PM.PM2.MFC.Mfc1.ScaleFactor" value="" min="" max="" eventTrigger="" units="" description="Scale Factor" isArray="false" />
- <ECID id="530712044" valueType="Ascii" logicalName="PM.PM2.MFC.Mfc1.StableTime" value="" min="" max="" eventTrigger="" units="" description="Stable Time" isArray="false" />
- <ECID id="530712045" valueType="Ascii" logicalName="PM.PM2.MFC.Mfc1.WarningRange" value="" min="" max="" eventTrigger="" units="" description="Warning Range" isArray="false" />
- <ECID id="530712046" valueType="Ascii" logicalName="PM.PM2.MFC.Mfc1.WarningTime" value="" min="" max="" eventTrigger="" units="" description="Warning Time" isArray="false" />
- <ECID id="530713025" valueType="Ascii" logicalName="PM.PM2.MFC.Mfc2.AlarmTime" value="" min="" max="" eventTrigger="" units="" description="Alarm Time" isArray="false" />
- <ECID id="530713028" valueType="Ascii" logicalName="PM.PM2.MFC.Mfc2.EnableAlarm" value="" min="" max="" eventTrigger="" units="" description="Enable Alarm" isArray="false" />
- <ECID id="530713038" valueType="Ascii" logicalName="PM.PM2.MFC.Mfc2.AlarmRange" value="" min="" max="" eventTrigger="" units="" description="Alarm Range" isArray="false" />
- <ECID id="530713039" valueType="Ascii" logicalName="PM.PM2.MFC.Mfc2.FlowRegulationFactor" value="" min="" max="" eventTrigger="" units="" description="Flow Regulation Factor" isArray="false" />
- <ECID id="530713040" valueType="Ascii" logicalName="PM.PM2.MFC.Mfc2.GasName" value="" min="" max="" eventTrigger="" units="" description="Gas Name" isArray="false" />
- <ECID id="530713041" valueType="Ascii" logicalName="PM.PM2.MFC.Mfc2.IsGoldenMFC" value="" min="" max="" eventTrigger="" units="" description="Is Golden MFC" isArray="false" />
- <ECID id="530713042" valueType="Ascii" logicalName="PM.PM2.MFC.Mfc2.N2Scale" value="" min="" max="" eventTrigger="" units="" description="N2 Scale" isArray="false" />
- <ECID id="530713043" valueType="Ascii" logicalName="PM.PM2.MFC.Mfc2.ScaleFactor" value="" min="" max="" eventTrigger="" units="" description="Scale Factor" isArray="false" />
- <ECID id="530713044" valueType="Ascii" logicalName="PM.PM2.MFC.Mfc2.StableTime" value="" min="" max="" eventTrigger="" units="" description="Stable Time" isArray="false" />
- <ECID id="530713045" valueType="Ascii" logicalName="PM.PM2.MFC.Mfc2.WarningRange" value="" min="" max="" eventTrigger="" units="" description="Warning Range" isArray="false" />
- <ECID id="530713046" valueType="Ascii" logicalName="PM.PM2.MFC.Mfc2.WarningTime" value="" min="" max="" eventTrigger="" units="" description="Warning Time" isArray="false" />
- <ECID id="530714025" valueType="Ascii" logicalName="PM.PM2.MFC.Mfc3.AlarmTime" value="" min="" max="" eventTrigger="" units="" description="Alarm Time" isArray="false" />
- <ECID id="530714028" valueType="Ascii" logicalName="PM.PM2.MFC.Mfc3.EnableAlarm" value="" min="" max="" eventTrigger="" units="" description="Enable Alarm" isArray="false" />
- <ECID id="530714038" valueType="Ascii" logicalName="PM.PM2.MFC.Mfc3.AlarmRange" value="" min="" max="" eventTrigger="" units="" description="Alarm Range" isArray="false" />
- <ECID id="530714039" valueType="Ascii" logicalName="PM.PM2.MFC.Mfc3.FlowRegulationFactor" value="" min="" max="" eventTrigger="" units="" description="Flow Regulation Factor" isArray="false" />
- <ECID id="530714040" valueType="Ascii" logicalName="PM.PM2.MFC.Mfc3.GasName" value="" min="" max="" eventTrigger="" units="" description="Gas Name" isArray="false" />
- <ECID id="530714041" valueType="Ascii" logicalName="PM.PM2.MFC.Mfc3.IsGoldenMFC" value="" min="" max="" eventTrigger="" units="" description="Is Golden MFC" isArray="false" />
- <ECID id="530714042" valueType="Ascii" logicalName="PM.PM2.MFC.Mfc3.N2Scale" value="" min="" max="" eventTrigger="" units="" description="N2 Scale" isArray="false" />
- <ECID id="530714043" valueType="Ascii" logicalName="PM.PM2.MFC.Mfc3.ScaleFactor" value="" min="" max="" eventTrigger="" units="" description="Scale Factor" isArray="false" />
- <ECID id="530714044" valueType="Ascii" logicalName="PM.PM2.MFC.Mfc3.StableTime" value="" min="" max="" eventTrigger="" units="" description="Stable Time" isArray="false" />
- <ECID id="530714045" valueType="Ascii" logicalName="PM.PM2.MFC.Mfc3.WarningRange" value="" min="" max="" eventTrigger="" units="" description="Warning Range" isArray="false" />
- <ECID id="530714046" valueType="Ascii" logicalName="PM.PM2.MFC.Mfc3.WarningTime" value="" min="" max="" eventTrigger="" units="" description="Warning Time" isArray="false" />
- <ECID id="530715025" valueType="Ascii" logicalName="PM.PM2.MFC.Mfc4.AlarmTime" value="" min="" max="" eventTrigger="" units="" description="Alarm Time" isArray="false" />
- <ECID id="530715028" valueType="Ascii" logicalName="PM.PM2.MFC.Mfc4.EnableAlarm" value="" min="" max="" eventTrigger="" units="" description="Enable Alarm" isArray="false" />
- <ECID id="530715038" valueType="Ascii" logicalName="PM.PM2.MFC.Mfc4.AlarmRange" value="" min="" max="" eventTrigger="" units="" description="Alarm Range" isArray="false" />
- <ECID id="530715039" valueType="Ascii" logicalName="PM.PM2.MFC.Mfc4.FlowRegulationFactor" value="" min="" max="" eventTrigger="" units="" description="Flow Regulation Factor" isArray="false" />
- <ECID id="530715040" valueType="Ascii" logicalName="PM.PM2.MFC.Mfc4.GasName" value="" min="" max="" eventTrigger="" units="" description="Gas Name" isArray="false" />
- <ECID id="530715041" valueType="Ascii" logicalName="PM.PM2.MFC.Mfc4.IsGoldenMFC" value="" min="" max="" eventTrigger="" units="" description="Is Golden MFC" isArray="false" />
- <ECID id="530715042" valueType="Ascii" logicalName="PM.PM2.MFC.Mfc4.N2Scale" value="" min="" max="" eventTrigger="" units="" description="N2 Scale" isArray="false" />
- <ECID id="530715043" valueType="Ascii" logicalName="PM.PM2.MFC.Mfc4.ScaleFactor" value="" min="" max="" eventTrigger="" units="" description="Scale Factor" isArray="false" />
- <ECID id="530715044" valueType="Ascii" logicalName="PM.PM2.MFC.Mfc4.StableTime" value="" min="" max="" eventTrigger="" units="" description="Stable Time" isArray="false" />
- <ECID id="530715045" valueType="Ascii" logicalName="PM.PM2.MFC.Mfc4.WarningRange" value="" min="" max="" eventTrigger="" units="" description="Warning Range" isArray="false" />
- <ECID id="530715046" valueType="Ascii" logicalName="PM.PM2.MFC.Mfc4.WarningTime" value="" min="" max="" eventTrigger="" units="" description="Warning Time" isArray="false" />
- <ECID id="530716025" valueType="Ascii" logicalName="PM.PM2.MFC.MfcPurge.AlarmTime" value="" min="" max="" eventTrigger="" units="" description="Alarm Time" isArray="false" />
- <ECID id="530716028" valueType="Ascii" logicalName="PM.PM2.MFC.MfcPurge.EnableAlarm" value="" min="" max="" eventTrigger="" units="" description="Enable Alarm" isArray="false" />
- <ECID id="530716038" valueType="Ascii" logicalName="PM.PM2.MFC.MfcPurge.AlarmRange" value="" min="" max="" eventTrigger="" units="" description="Alarm Range" isArray="false" />
- <ECID id="530716039" valueType="Ascii" logicalName="PM.PM2.MFC.MfcPurge.FlowRegulationFactor" value="" min="" max="" eventTrigger="" units="" description="Flow Regulation Factor" isArray="false" />
- <ECID id="530716040" valueType="Ascii" logicalName="PM.PM2.MFC.MfcPurge.GasName" value="" min="" max="" eventTrigger="" units="" description="Gas Name" isArray="false" />
- <ECID id="530716041" valueType="Ascii" logicalName="PM.PM2.MFC.MfcPurge.IsGoldenMFC" value="" min="" max="" eventTrigger="" units="" description="Is Golden MFC" isArray="false" />
- <ECID id="530716042" valueType="Ascii" logicalName="PM.PM2.MFC.MfcPurge.N2Scale" value="" min="" max="" eventTrigger="" units="" description="N2 Scale" isArray="false" />
- <ECID id="530716043" valueType="Ascii" logicalName="PM.PM2.MFC.MfcPurge.ScaleFactor" value="" min="" max="" eventTrigger="" units="" description="Scale Factor" isArray="false" />
- <ECID id="530716044" valueType="Ascii" logicalName="PM.PM2.MFC.MfcPurge.StableTime" value="" min="" max="" eventTrigger="" units="" description="Stable Time" isArray="false" />
- <ECID id="530716045" valueType="Ascii" logicalName="PM.PM2.MFC.MfcPurge.WarningRange" value="" min="" max="" eventTrigger="" units="" description="Warning Range" isArray="false" />
- <ECID id="530716046" valueType="Ascii" logicalName="PM.PM2.MFC.MfcPurge.WarningTime" value="" min="" max="" eventTrigger="" units="" description="Warning Time" isArray="false" />
- <ECID id="530818025" valueType="Ascii" logicalName="PM.PM2.PressureMeter.CDAPressure.AlarmTime" value="" min="" max="" eventTrigger="" units="" description="Alarm Time" isArray="false" />
- <ECID id="530818028" valueType="Ascii" logicalName="PM.PM2.PressureMeter.CDAPressure.EnableAlarm" value="" min="" max="" eventTrigger="" units="" description="Enable Alarm" isArray="false" />
- <ECID id="530818046" valueType="Ascii" logicalName="PM.PM2.PressureMeter.CDAPressure.WarningTime" value="" min="" max="" eventTrigger="" units="" description="Warning Time" isArray="false" />
- <ECID id="530818085" valueType="Ascii" logicalName="PM.PM2.PressureMeter.CDAPressure.MaxValue" value="" min="" max="" eventTrigger="" units="" description="Max Value" isArray="false" />
- <ECID id="530818086" valueType="Ascii" logicalName="PM.PM2.PressureMeter.CDAPressure.MinValue" value="" min="" max="" eventTrigger="" units="" description="Min Value" isArray="false" />
- <ECID id="530819087" valueType="Ascii" logicalName="PM.PM2.PressureMeter.ChamberMonitorPressure.Precision" value="" min="" max="" eventTrigger="" units="" description="Precision" isArray="false" />
- <ECID id="530820025" valueType="Ascii" logicalName="PM.PM2.PressureMeter.Gas1Pressure.AlarmTime" value="" min="" max="" eventTrigger="" units="" description="Alarm Time" isArray="false" />
- <ECID id="530820028" valueType="Ascii" logicalName="PM.PM2.PressureMeter.Gas1Pressure.EnableAlarm" value="" min="" max="" eventTrigger="" units="" description="Enable Alarm" isArray="false" />
- <ECID id="530820046" valueType="Ascii" logicalName="PM.PM2.PressureMeter.Gas1Pressure.WarningTime" value="" min="" max="" eventTrigger="" units="" description="Warning Time" isArray="false" />
- <ECID id="530820085" valueType="Ascii" logicalName="PM.PM2.PressureMeter.Gas1Pressure.MaxValue" value="" min="" max="" eventTrigger="" units="" description="Max Value" isArray="false" />
- <ECID id="530820086" valueType="Ascii" logicalName="PM.PM2.PressureMeter.Gas1Pressure.MinValue" value="" min="" max="" eventTrigger="" units="" description="Min Value" isArray="false" />
- <ECID id="530821025" valueType="Ascii" logicalName="PM.PM2.PressureMeter.Gas2Pressure.AlarmTime" value="" min="" max="" eventTrigger="" units="" description="Alarm Time" isArray="false" />
- <ECID id="530821028" valueType="Ascii" logicalName="PM.PM2.PressureMeter.Gas2Pressure.EnableAlarm" value="" min="" max="" eventTrigger="" units="" description="Enable Alarm" isArray="false" />
- <ECID id="530821046" valueType="Ascii" logicalName="PM.PM2.PressureMeter.Gas2Pressure.WarningTime" value="" min="" max="" eventTrigger="" units="" description="Warning Time" isArray="false" />
- <ECID id="530821085" valueType="Ascii" logicalName="PM.PM2.PressureMeter.Gas2Pressure.MaxValue" value="" min="" max="" eventTrigger="" units="" description="Max Value" isArray="false" />
- <ECID id="530821086" valueType="Ascii" logicalName="PM.PM2.PressureMeter.Gas2Pressure.MinValue" value="" min="" max="" eventTrigger="" units="" description="Min Value" isArray="false" />
- <ECID id="530822025" valueType="Ascii" logicalName="PM.PM2.PressureMeter.Gas3Pressure.AlarmTime" value="" min="" max="" eventTrigger="" units="" description="Alarm Time" isArray="false" />
- <ECID id="530822028" valueType="Ascii" logicalName="PM.PM2.PressureMeter.Gas3Pressure.EnableAlarm" value="" min="" max="" eventTrigger="" units="" description="Enable Alarm" isArray="false" />
- <ECID id="530822046" valueType="Ascii" logicalName="PM.PM2.PressureMeter.Gas3Pressure.WarningTime" value="" min="" max="" eventTrigger="" units="" description="Warning Time" isArray="false" />
- <ECID id="530822085" valueType="Ascii" logicalName="PM.PM2.PressureMeter.Gas3Pressure.MaxValue" value="" min="" max="" eventTrigger="" units="" description="Max Value" isArray="false" />
- <ECID id="530822086" valueType="Ascii" logicalName="PM.PM2.PressureMeter.Gas3Pressure.MinValue" value="" min="" max="" eventTrigger="" units="" description="Min Value" isArray="false" />
- <ECID id="530823025" valueType="Ascii" logicalName="PM.PM2.PressureMeter.Gas4Pressure.AlarmTime" value="" min="" max="" eventTrigger="" units="" description="Alarm Time" isArray="false" />
- <ECID id="530823028" valueType="Ascii" logicalName="PM.PM2.PressureMeter.Gas4Pressure.EnableAlarm" value="" min="" max="" eventTrigger="" units="" description="Enable Alarm" isArray="false" />
- <ECID id="530823046" valueType="Ascii" logicalName="PM.PM2.PressureMeter.Gas4Pressure.WarningTime" value="" min="" max="" eventTrigger="" units="" description="Warning Time" isArray="false" />
- <ECID id="530823085" valueType="Ascii" logicalName="PM.PM2.PressureMeter.Gas4Pressure.MaxValue" value="" min="" max="" eventTrigger="" units="" description="Max Value" isArray="false" />
- <ECID id="530823086" valueType="Ascii" logicalName="PM.PM2.PressureMeter.Gas4Pressure.MinValue" value="" min="" max="" eventTrigger="" units="" description="Min Value" isArray="false" />
- <ECID id="860010001" valueType="Ascii" logicalName="WaferRobot.Address" value="" min="" max="" eventTrigger="" units="" description="Robot ip,default 192.168.250.35:13000" isArray="false" />
- <ECID id="860010002" valueType="Ascii" logicalName="WaferRobot.Blade1Enable" value="" min="" max="" eventTrigger="" units="" description="Blade1 Enable" isArray="false" />
- <ECID id="860010003" valueType="Ascii" logicalName="WaferRobot.Blade2Enable" value="" min="" max="" eventTrigger="" units="" description="Blade2 Enable" isArray="false" />
- <ECID id="860010004" valueType="Ascii" logicalName="WaferRobot.Blade2Slots" value="" min="" max="" eventTrigger="" units="" description="Slot数目" isArray="false" />
- <ECID id="860010005" valueType="Ascii" logicalName="WaferRobot.BypassFIMSMap" value="" min="" max="" eventTrigger="" units="" description="Bypass FIMS Map" isArray="false" />
- <ECID id="860010006" valueType="Ascii" logicalName="WaferRobot.ConnectTimeout" value="" min="" max="" eventTrigger="" units="" description="Connect Time Out" isArray="false" />
- <ECID id="860010007" valueType="Ascii" logicalName="WaferRobot.CycleMode" value="" min="" max="" eventTrigger="" units="" description="CycleMode" isArray="false" />
- <ECID id="860010008" valueType="Ascii" logicalName="WaferRobot.CycleNumber" value="" min="" max="" eventTrigger="" units="" description="CycleNumber" isArray="false" />
- <ECID id="860010009" valueType="Ascii" logicalName="WaferRobot.DualBlade1TransferEnable" value="" min="" max="" eventTrigger="" units="" description="Dual Blade1 Transfer Enable" isArray="false" />
- <ECID id="860010010" valueType="Ascii" logicalName="WaferRobot.EnableLogMessage" value="" min="" max="" eventTrigger="" units="" description="Enable Log Message" isArray="false" />
- <ECID id="860010011" valueType="Ascii" logicalName="WaferRobot.ExtendTimeout" value="" min="" max="" eventTrigger="" units="" description="Extend Time Out" isArray="false" />
- <ECID id="860010012" valueType="Ascii" logicalName="WaferRobot.HomeTimeout" value="" min="" max="" eventTrigger="" units="" description="Home Time Out" isArray="false" />
- <ECID id="860010013" valueType="Ascii" logicalName="WaferRobot.IsSupport5Wafer" value="" min="" max="" eventTrigger="" units="" description="Is Support 5 Wafer" isArray="false" />
- <ECID id="860010014" valueType="Ascii" logicalName="WaferRobot.MotionTimeout" value="" min="" max="" eventTrigger="" units="" description="Motion Time Out" isArray="false" />
- <ECID id="860010015" valueType="Ascii" logicalName="WaferRobot.PickTimeout" value="" min="" max="" eventTrigger="" units="" description="Pick Time Out" isArray="false" />
- <ECID id="860010016" valueType="Ascii" logicalName="WaferRobot.PlaceTimeout" value="" min="" max="" eventTrigger="" units="" description="Place Time Out" isArray="false" />
- <ECID id="860010017" valueType="Ascii" logicalName="WaferRobot.RetractTimeout" value="" min="" max="" eventTrigger="" units="" description="Retract Time Out" isArray="false" />
- <ECID id="860010018" valueType="Ascii" logicalName="WaferRobot.RobotCommunicationToken" value="" min="" max="" eventTrigger="" units="" description="Robot Communication Token" isArray="false" />
- <ECID id="860010019" valueType="Ascii" logicalName="WaferRobot.RobotSpeed" value="" min="" max="" eventTrigger="" units="" description="Robot速度, 1-100百分比" isArray="false" />
- <ECID id="860010020" valueType="Ascii" logicalName="WaferRobot.SlotCount" value="" min="" max="" eventTrigger="" units="" description="Slot Count" isArray="false" />
- <ECID id="870010001" valueType="Ascii" logicalName="Boat.AutoShutter.MotionTimeout" value="" min="" max="" eventTrigger="" units="" description="Motion Time Out" isArray="false" />
- <ECID id="870020001" valueType="Ascii" logicalName="Boat.BoatElevatorServo.Acc" value="" min="" max="" eventTrigger="" units="" description="Acc" isArray="false" />
- <ECID id="870020002" valueType="Ascii" logicalName="Boat.BoatElevatorServo.CycleCount" value="" min="" max="" eventTrigger="" units="" description="Cycle Count" isArray="false" />
- <ECID id="870020003" valueType="Ascii" logicalName="Boat.BoatElevatorServo.Dec" value="" min="" max="" eventTrigger="" units="" description="Dec" isArray="false" />
- <ECID id="870020004" valueType="Ascii" logicalName="Boat.BoatElevatorServo.IntervalTime" value="" min="" max="" eventTrigger="" units="" description="Interval Time" isArray="false" />
- <ECID id="870020005" valueType="Ascii" logicalName="Boat.BoatElevatorServo.MotionTimeout" value="" min="" max="" eventTrigger="" units="" description="Motion Time Out" isArray="false" />
- <ECID id="870020006" valueType="Ascii" logicalName="Boat.BoatElevatorServo.MoveSpeed" value="" min="" max="" eventTrigger="" units="" description="MoveSpeed" isArray="false" />
- <ECID id="870020007" valueType="Ascii" logicalName="Boat.BoatElevatorServo.Position1" value="" min="" max="" eventTrigger="" units="" description="Position1" isArray="false" />
- <ECID id="870020008" valueType="Ascii" logicalName="Boat.BoatElevatorServo.Position10" value="" min="" max="" eventTrigger="" units="" description="Position10" isArray="false" />
- <ECID id="870020009" valueType="Ascii" logicalName="Boat.BoatElevatorServo.Position2" value="" min="" max="" eventTrigger="" units="" description="Position2" isArray="false" />
- <ECID id="870020010" valueType="Ascii" logicalName="Boat.BoatElevatorServo.Position3" value="" min="" max="" eventTrigger="" units="" description="Position3" isArray="false" />
- <ECID id="870020011" valueType="Ascii" logicalName="Boat.BoatElevatorServo.Position4" value="" min="" max="" eventTrigger="" units="" description="Position4" isArray="false" />
- <ECID id="870020012" valueType="Ascii" logicalName="Boat.BoatElevatorServo.Position5" value="" min="" max="" eventTrigger="" units="" description="Position5" isArray="false" />
- <ECID id="870020013" valueType="Ascii" logicalName="Boat.BoatElevatorServo.Position6" value="" min="" max="" eventTrigger="" units="" description="Position6" isArray="false" />
- <ECID id="870020014" valueType="Ascii" logicalName="Boat.BoatElevatorServo.Position7" value="" min="" max="" eventTrigger="" units="" description="Position7" isArray="false" />
- <ECID id="870020015" valueType="Ascii" logicalName="Boat.BoatElevatorServo.Position8" value="" min="" max="" eventTrigger="" units="" description="Position8" isArray="false" />
- <ECID id="870020016" valueType="Ascii" logicalName="Boat.BoatElevatorServo.Position9" value="" min="" max="" eventTrigger="" units="" description="Position9" isArray="false" />
- <ECID id="870030001" valueType="Ascii" logicalName="Boat.BoatRotationServo.Acc" value="" min="" max="" eventTrigger="" units="" description="Acc" isArray="false" />
- <ECID id="870030002" valueType="Ascii" logicalName="Boat.BoatRotationServo.CycleCount" value="" min="" max="" eventTrigger="" units="" description="Cycle Count" isArray="false" />
- <ECID id="870030003" valueType="Ascii" logicalName="Boat.BoatRotationServo.Dec" value="" min="" max="" eventTrigger="" units="" description="Dec" isArray="false" />
- <ECID id="870030004" valueType="Ascii" logicalName="Boat.BoatRotationServo.IntervalTime" value="" min="" max="" eventTrigger="" units="" description="Interval Time" isArray="false" />
- <ECID id="870030005" valueType="Ascii" logicalName="Boat.BoatRotationServo.MotionTimeout" value="" min="" max="" eventTrigger="" units="" description="Motion Time Out" isArray="false" />
- <ECID id="870030006" valueType="Ascii" logicalName="Boat.BoatRotationServo.MoveSpeed" value="" min="" max="" eventTrigger="" units="" description="MoveSpeed" isArray="false" />
- <ECID id="870030007" valueType="Ascii" logicalName="Boat.BoatRotationServo.Position1" value="" min="" max="" eventTrigger="" units="" description="Position1" isArray="false" />
- <ECID id="870030008" valueType="Ascii" logicalName="Boat.BoatRotationServo.Position10" value="" min="" max="" eventTrigger="" units="" description="Position10" isArray="false" />
- <ECID id="870030009" valueType="Ascii" logicalName="Boat.BoatRotationServo.Position2" value="" min="" max="" eventTrigger="" units="" description="Position2" isArray="false" />
- <ECID id="870030010" valueType="Ascii" logicalName="Boat.BoatRotationServo.Position3" value="" min="" max="" eventTrigger="" units="" description="Position3" isArray="false" />
- <ECID id="870030011" valueType="Ascii" logicalName="Boat.BoatRotationServo.Position4" value="" min="" max="" eventTrigger="" units="" description="Position4" isArray="false" />
- <ECID id="870030012" valueType="Ascii" logicalName="Boat.BoatRotationServo.Position5" value="" min="" max="" eventTrigger="" units="" description="Position5" isArray="false" />
- <ECID id="870030013" valueType="Ascii" logicalName="Boat.BoatRotationServo.Position6" value="" min="" max="" eventTrigger="" units="" description="Position6" isArray="false" />
- <ECID id="870030014" valueType="Ascii" logicalName="Boat.BoatRotationServo.Position7" value="" min="" max="" eventTrigger="" units="" description="Position7" isArray="false" />
- <ECID id="870030015" valueType="Ascii" logicalName="Boat.BoatRotationServo.Position8" value="" min="" max="" eventTrigger="" units="" description="Position8" isArray="false" />
- <ECID id="870030016" valueType="Ascii" logicalName="Boat.BoatRotationServo.Position9" value="" min="" max="" eventTrigger="" units="" description="Position9" isArray="false" />
- <ECID id="870030017" valueType="Ascii" logicalName="Boat.BoatRotationServo.RotateTime" value="" min="" max="" eventTrigger="" units="" description="RotateTime" isArray="false" />
- <ECID id="870040001" valueType="Ascii" logicalName="Boat.CycleCount" value="" min="" max="" eventTrigger="" units="" description="Cycle Count" isArray="false" />
- <ECID id="870040002" valueType="Ascii" logicalName="Boat.IntervalTime" value="" min="" max="" eventTrigger="" units="" description="Interval Time" isArray="false" />
- <ECID id="870040003" valueType="Ascii" logicalName="Boat.MotionTimeout" value="" min="" max="" eventTrigger="" units="" description="Motion Time Out" isArray="false" />
- <ECID id="870040004" valueType="Ascii" logicalName="Boat.RAxisInterval" value="" min="" max="" eventTrigger="" units="" description="R Axis Interval" isArray="false" />
- <ECID id="870040005" valueType="Ascii" logicalName="Boat.RAxisSpeed" value="" min="" max="" eventTrigger="" units="" description="R Axis Speed" isArray="false" />
- <ECID id="870040006" valueType="Ascii" logicalName="Boat.SlotCount" value="" min="" max="" eventTrigger="" units="" description="Boat Slot Count" isArray="false" />
- <ECID id="870040007" valueType="Ascii" logicalName="Boat.ZAxisDownSpeed" value="" min="" max="" eventTrigger="" units="" description="Z Down Speed" isArray="false" />
- <ECID id="870040008" valueType="Ascii" logicalName="Boat.ZAxisUpSpeed" value="" min="" max="" eventTrigger="" units="" description="Z Up Speed" isArray="false" />
- <ECID id="870040009" valueType="Ascii" logicalName="Boat.ZMaxPosition" value="" min="" max="" eventTrigger="" units="" description="Z Max Position" isArray="false" />
- <ECID id="870040010" valueType="Ascii" logicalName="Boat.ZMinPosition" value="" min="" max="" eventTrigger="" units="" description="Z Min Position" isArray="false" />
- <ECID id="940010001" valueType="Ascii" logicalName="CarrierRobot.Address" value="" min="" max="" eventTrigger="" units="" description="Robot ip,default 192.168.250.32:13000" isArray="false" />
- <ECID id="940010002" valueType="Ascii" logicalName="CarrierRobot.Blade1Enable" value="" min="" max="" eventTrigger="" units="" description="Blade1 Enable" isArray="false" />
- <ECID id="940010003" valueType="Ascii" logicalName="CarrierRobot.Blade2Enable" value="" min="" max="" eventTrigger="" units="" description="Blade2 Enable" isArray="false" />
- <ECID id="940010004" valueType="Ascii" logicalName="CarrierRobot.Blade2Slots" value="" min="" max="" eventTrigger="" units="" description="Slot数目" isArray="false" />
- <ECID id="940010005" valueType="Ascii" logicalName="CarrierRobot.ConnectTimeout" value="" min="" max="" eventTrigger="" units="" description="Connect Time Out" isArray="false" />
- <ECID id="940010006" valueType="Ascii" logicalName="CarrierRobot.CycleMode" value="" min="" max="" eventTrigger="" units="" description="CycleMode" isArray="false" />
- <ECID id="940010007" valueType="Ascii" logicalName="CarrierRobot.CycleNumber" value="" min="" max="" eventTrigger="" units="" description="CycleNumber" isArray="false" />
- <ECID id="940010008" valueType="Ascii" logicalName="CarrierRobot.DualBlade1TransferEnable" value="" min="" max="" eventTrigger="" units="" description="Dual Blade1 Transfer Enable" isArray="false" />
- <ECID id="940010009" valueType="Ascii" logicalName="CarrierRobot.EnableLogMessage" value="" min="" max="" eventTrigger="" units="" description="Enable Log Message" isArray="false" />
- <ECID id="940010010" valueType="Ascii" logicalName="CarrierRobot.ExtendTimeout" value="" min="" max="" eventTrigger="" units="" description="Extend Time Out" isArray="false" />
- <ECID id="940010011" valueType="Ascii" logicalName="CarrierRobot.HomeTimeout" value="" min="" max="" eventTrigger="" units="" description="Home Time Out" isArray="false" />
- <ECID id="940010012" valueType="Ascii" logicalName="CarrierRobot.MotionTimeout" value="" min="" max="" eventTrigger="" units="" description="Motion Time Out" isArray="false" />
- <ECID id="940010013" valueType="Ascii" logicalName="CarrierRobot.PickTimeout" value="" min="" max="" eventTrigger="" units="" description="Pick Time Out" isArray="false" />
- <ECID id="940010014" valueType="Ascii" logicalName="CarrierRobot.PlaceTimeout" value="" min="" max="" eventTrigger="" units="" description="Place Time Out" isArray="false" />
- <ECID id="940010015" valueType="Ascii" logicalName="CarrierRobot.RetractTimeout" value="" min="" max="" eventTrigger="" units="" description="Retract Time Out" isArray="false" />
- <ECID id="940010016" valueType="Ascii" logicalName="CarrierRobot.RobotCommunicationToken" value="" min="" max="" eventTrigger="" units="" description="Robot Communication Token" isArray="false" />
- <ECID id="940010017" valueType="Ascii" logicalName="CarrierRobot.RobotSpeed" value="" min="" max="" eventTrigger="" units="" description="Robot速度, 1-100百分比" isArray="false" />
- <ECID id="940010018" valueType="Ascii" logicalName="CarrierRobot.RobotType" value="" min="" max="" eventTrigger="" units="" description="Robot Type" isArray="false" />
- <ECID id="940010019" valueType="Ascii" logicalName="CarrierRobot.RunToRunMode" value="" min="" max="" eventTrigger="" units="" description="Run To Run Mode" isArray="false" />
- <ECID id="940010020" valueType="Ascii" logicalName="CarrierRobot.RunToRunNumber" value="" min="" max="" eventTrigger="" units="" description="Run To Run Number" isArray="false" />
- <ECID id="940010021" valueType="Ascii" logicalName="CarrierRobot.SlotCount" value="" min="" max="" eventTrigger="" units="" description="Slot Count" isArray="false" />
- <ECID id="970010001" valueType="Ascii" logicalName="BufferServo.MotionTimeout" value="" min="" max="" eventTrigger="" units="" description="Motion Time Out" isArray="false" />
- <ECID id="970010002" valueType="Ascii" logicalName="BufferServo.MoveSpeed" value="" min="" max="" eventTrigger="" units="" description="MoveSpeed" isArray="false" />
- <ECID id="970010003" valueType="Ascii" logicalName="BufferServo.Position1" value="" min="" max="" eventTrigger="" units="" description="Position1" isArray="false" />
- <ECID id="970010004" valueType="Ascii" logicalName="BufferServo.Position10" value="" min="" max="" eventTrigger="" units="" description="Position10" isArray="false" />
- <ECID id="970010005" valueType="Ascii" logicalName="BufferServo.Position2" value="" min="" max="" eventTrigger="" units="" description="Position2" isArray="false" />
- <ECID id="970010006" valueType="Ascii" logicalName="BufferServo.Position3" value="" min="" max="" eventTrigger="" units="" description="Position3" isArray="false" />
- <ECID id="970010007" valueType="Ascii" logicalName="BufferServo.Position4" value="" min="" max="" eventTrigger="" units="" description="Position4" isArray="false" />
- <ECID id="970010008" valueType="Ascii" logicalName="BufferServo.Position5" value="" min="" max="" eventTrigger="" units="" description="Position5" isArray="false" />
- <ECID id="970010009" valueType="Ascii" logicalName="BufferServo.Position6" value="" min="" max="" eventTrigger="" units="" description="Position6" isArray="false" />
- <ECID id="970010010" valueType="Ascii" logicalName="BufferServo.Position7" value="" min="" max="" eventTrigger="" units="" description="Position7" isArray="false" />
- <ECID id="970010011" valueType="Ascii" logicalName="BufferServo.Position8" value="" min="" max="" eventTrigger="" units="" description="Position8" isArray="false" />
- <ECID id="970010012" valueType="Ascii" logicalName="BufferServo.Position9" value="" min="" max="" eventTrigger="" units="" description="Position9" isArray="false" />
- <ECID id="980010001" valueType="Ascii" logicalName="CarrierID.CarrierIdReaderProtocolType" value="" min="" max="" eventTrigger="" units="" description="Protocol" isArray="false" />
- <ECID id="980020001" valueType="Ascii" logicalName="CarrierID.RFIDReader1.Address" value="" min="" max="" eventTrigger="" units="" description="ConnectioAddress" isArray="false" />
- <ECID id="980020002" valueType="Ascii" logicalName="CarrierID.RFIDReader1.BaudRate" value="" min="" max="" eventTrigger="" units="" description="BaudRate" isArray="false" />
- <ECID id="980020003" valueType="Ascii" logicalName="CarrierID.RFIDReader1.DataBits" value="" min="" max="" eventTrigger="" units="" description="DataBits" isArray="false" />
- <ECID id="980020004" valueType="Ascii" logicalName="CarrierID.RFIDReader1.EnableLogMessage" value="" min="" max="" eventTrigger="" units="" description="EnableLogMessage" isArray="false" />
- <ECID id="980020005" valueType="Ascii" logicalName="CarrierID.RFIDReader1.Parity" value="" min="" max="" eventTrigger="" units="" description="Parity" isArray="false" />
- <ECID id="980020006" valueType="Ascii" logicalName="CarrierID.RFIDReader1.PortName" value="" min="" max="" eventTrigger="" units="" description="Carrier ID COM串口地址" isArray="false" />
- <ECID id="980020007" valueType="Ascii" logicalName="CarrierID.RFIDReader1.StopBits" value="" min="" max="" eventTrigger="" units="" description="StopBits" isArray="false" />
- <ECID id="990010001" valueType="Ascii" logicalName="FA.ConnectionMode" value="" min="" max="" eventTrigger="" units="" description="Connection Mode" isArray="false" />
- <ECID id="990010002" valueType="Ascii" logicalName="FA.DefaultCommunicationState" value="" min="" max="" eventTrigger="" units="" description="Default Communication State" isArray="false" />
- <ECID id="990010003" valueType="Ascii" logicalName="FA.DefaultControlState" value="" min="" max="" eventTrigger="" units="" description="Default Control State" isArray="false" />
- <ECID id="990010004" valueType="Ascii" logicalName="FA.DefaultControlSubState" value="" min="" max="" eventTrigger="" units="" description="Default Control SubState" isArray="false" />
- <ECID id="990010005" valueType="Ascii" logicalName="FA.DeviceId" value="" min="" max="" eventTrigger="" units="" description="Device ID" isArray="false" />
- <ECID id="990010006" valueType="Ascii" logicalName="FA.EnableSpooling" value="" min="" max="" eventTrigger="" units="" description="Enable Spooling" isArray="false" />
- <ECID id="990010007" valueType="Ascii" logicalName="FA.LinkTestInterval" value="" min="" max="" eventTrigger="" units="" description="Link Test Interval" isArray="false" />
- <ECID id="990010008" valueType="Ascii" logicalName="FA.LocalIpAddress" value="" min="" max="" eventTrigger="" units="" description="Local IP Address" isArray="false" />
- <ECID id="990010009" valueType="Ascii" logicalName="FA.LocalPortNumber" value="" min="" max="" eventTrigger="" units="" description="Local Port Number" isArray="false" />
- <ECID id="990010010" valueType="Ascii" logicalName="FA.LP1BypassCarrierIDReader" value="" min="" max="" eventTrigger="" units="" description="LP1 Bypass CarrierID Reader" isArray="false" />
- <ECID id="990010011" valueType="Ascii" logicalName="FA.LP1DefaultAccessMode" value="" min="" max="" eventTrigger="" units="" description="LP1 Default Access Mode" isArray="false" />
- <ECID id="990010012" valueType="Ascii" logicalName="FA.LP1DefaultTransferState" value="" min="" max="" eventTrigger="" units="" description="LP1 Default Transfer State" isArray="false" />
- <ECID id="990010013" valueType="Ascii" logicalName="FA.LP2BypassCarrierIDReader" value="" min="" max="" eventTrigger="" units="" description="LP2 Bypass CarrierID Reader" isArray="false" />
- <ECID id="990010014" valueType="Ascii" logicalName="FA.LP2DefaultAccessMode" value="" min="" max="" eventTrigger="" units="" description="LP2 Default Access Mode" isArray="false" />
- <ECID id="990010015" valueType="Ascii" logicalName="FA.LP2DefaultTransferState" value="" min="" max="" eventTrigger="" units="" description="LP2 Default Transfer State" isArray="false" />
- <ECID id="990010016" valueType="Ascii" logicalName="FA.RemoteIpAddress" value="" min="" max="" eventTrigger="" units="" description="Remote IP Address" isArray="false" />
- <ECID id="990010017" valueType="Ascii" logicalName="FA.RemotePortNumber" value="" min="" max="" eventTrigger="" units="" description="Remote Port Number" isArray="false" />
- <ECID id="990010018" valueType="Ascii" logicalName="FA.T3Timeout" value="" min="" max="" eventTrigger="" units="" description="T3 Timeout" isArray="false" />
- <ECID id="990010019" valueType="Ascii" logicalName="FA.T5Timeout" value="" min="" max="" eventTrigger="" units="" description="T5 Timeout" isArray="false" />
- <ECID id="990010020" valueType="Ascii" logicalName="FA.T6Timeout" value="" min="" max="" eventTrigger="" units="" description="T6 Timeout" isArray="false" />
- <ECID id="990010021" valueType="Ascii" logicalName="FA.T7Timeout" value="" min="" max="" eventTrigger="" units="" description="T7 Timeout" isArray="false" />
- <ECID id="990010022" valueType="Ascii" logicalName="FA.T8Timeout" value="" min="" max="" eventTrigger="" units="" description="T8 Timeout" isArray="false" />
- <ECID id="990020001" valueType="Ascii" logicalName="FA.E84.TP1" value="" min="" max="" eventTrigger="" units="" description="TP1 time out" isArray="false" />
- <ECID id="990020002" valueType="Ascii" logicalName="FA.E84.TP2" value="" min="" max="" eventTrigger="" units="" description="TP2 time out" isArray="false" />
- <ECID id="990020003" valueType="Ascii" logicalName="FA.E84.TP3" value="" min="" max="" eventTrigger="" units="" description="TP3 time out" isArray="false" />
- <ECID id="990020004" valueType="Ascii" logicalName="FA.E84.TP4" value="" min="" max="" eventTrigger="" units="" description="TP4 time out" isArray="false" />
- <ECID id="990020005" valueType="Ascii" logicalName="FA.E84.TP5" value="" min="" max="" eventTrigger="" units="" description="TP5 time out" isArray="false" />
- <ECID id="990020006" valueType="Ascii" logicalName="FA.E84.TP6" value="" min="" max="" eventTrigger="" units="" description="TP6 time out" isArray="false" />
- <ECID id="1000010001" valueType="Ascii" logicalName="FIMS.Address" value="" min="" max="" eventTrigger="" units="" description="Robot ip,default 192.168.38.11:1102" isArray="false" />
- <ECID id="1000010002" valueType="Ascii" logicalName="FIMS.EnableLogMessage" value="" min="" max="" eventTrigger="" units="" description="Enable Log Message" isArray="false" />
- <ECID id="1000020001" valueType="Ascii" logicalName="FIMS.FIMS1.CycleCount" value="" min="" max="" eventTrigger="" units="" description="Cycle Count" isArray="false" />
- <ECID id="1000020002" valueType="Ascii" logicalName="FIMS.FIMS1.HomeTimeout" value="" min="" max="" eventTrigger="" units="" description="Home Time Out" isArray="false" />
- <ECID id="1000020003" valueType="Ascii" logicalName="FIMS.FIMS1.IsOnline" value="" min="" max="" eventTrigger="" units="" description="Is Online" isArray="false" />
- <ECID id="1000020004" valueType="Ascii" logicalName="FIMS.FIMS1.MotionTimeout" value="" min="" max="" eventTrigger="" units="" description="Motion Time Out" isArray="false" />
- <ECID id="1000030001" valueType="Ascii" logicalName="FIMS.FIMS2.CycleCount" value="" min="" max="" eventTrigger="" units="" description="Cycle Count" isArray="false" />
- <ECID id="1000030002" valueType="Ascii" logicalName="FIMS.FIMS2.HomeTimeout" value="" min="" max="" eventTrigger="" units="" description="Home Time Out" isArray="false" />
- <ECID id="1000030003" valueType="Ascii" logicalName="FIMS.FIMS2.IsOnline" value="" min="" max="" eventTrigger="" units="" description="Is Online" isArray="false" />
- <ECID id="1000030004" valueType="Ascii" logicalName="FIMS.FIMS2.MotionTimeout" value="" min="" max="" eventTrigger="" units="" description="Motion Time Out" isArray="false" />
- <ECID id="1010010001" valueType="Ascii" logicalName="LoadPort.LoadPortPosition" value="" min="" max="" eventTrigger="" units="" description="LoadPort Position" isArray="false" />
- <ECID id="1010010002" valueType="Ascii" logicalName="LoadPort.SlotCount" value="" min="" max="" eventTrigger="" units="" description="Slot Count" isArray="false" />
- <ECID id="1010020001" valueType="Ascii" logicalName="LoadPort.LoadPortSwitch.AccessSwitchPressedAfterCarrierIn" value="" min="" max="" eventTrigger="" units="" description="M Wafer Count After Process" isArray="false" />
- <ECID id="1010020002" valueType="Ascii" logicalName="LoadPort.LoadPortSwitch.AccessSwitchPressedAfterCarrierOut" value="" min="" max="" eventTrigger="" units="" description="Access Switch Pressed After Carrier Out" isArray="false" />
- <ECID id="1010020003" valueType="Ascii" logicalName="LoadPort.LoadPortSwitch.AccessSwitchPressedBeforeCarrierIn" value="" min="" max="" eventTrigger="" units="" description="Access Switch Pressed Before Carrier In" isArray="false" />
- <ECID id="1010020004" valueType="Ascii" logicalName="LoadPort.LoadPortSwitch.AccessSwitchPressedBeforeCarrierOut" value="" min="" max="" eventTrigger="" units="" description="Access Switch Pressed Before Carrier Out" isArray="false" />
- <ECID id="1010020005" valueType="Ascii" logicalName="LoadPort.LoadPortSwitch.AccessSwitchTimeout" value="" min="" max="" eventTrigger="" units="" description="Access Switch Timeout" isArray="false" />
- <ECID id="1010020006" valueType="Ascii" logicalName="LoadPort.LoadPortSwitch.CarrierInOrOutDelayTime" value="" min="" max="" eventTrigger="" units="" description="Carrier In Or Out Delay Time" isArray="false" />
- <ECID id="1010020007" valueType="Ascii" logicalName="LoadPort.LoadPortSwitch.OperationSwitchPressedAfterCarrierOut" value="" min="" max="" eventTrigger="" units="" description="Operation Switch Pressed After Carrier Out" isArray="false" />
- <ECID id="1010030001" valueType="Ascii" logicalName="LoadPort.LP1.Address" value="" min="" max="" eventTrigger="" units="" description="ip:port" isArray="false" />
- <ECID id="1010030002" valueType="Ascii" logicalName="LoadPort.LP1.BaudRate" value="" min="" max="" eventTrigger="" units="" description="BaudRate" isArray="false" />
- <ECID id="1010030003" valueType="Ascii" logicalName="LoadPort.LP1.BypassCarrierIDReader" value="" min="" max="" eventTrigger="" units="" description=" " isArray="false" />
- <ECID id="1010030004" valueType="Ascii" logicalName="LoadPort.LP1.BypassReadID" value="" min="" max="" eventTrigger="" units="" description="Bypass Read ID" isArray="false" />
- <ECID id="1010030005" valueType="Ascii" logicalName="LoadPort.LP1.CarrierIDReaderSetting" value="" min="" max="" eventTrigger="" units="" description="Carrier ID Reader Setting" isArray="false" />
- <ECID id="1010030006" valueType="Ascii" logicalName="LoadPort.LP1.CarrierIndex" value="" min="" max="" eventTrigger="" units="" description="LP1CarrierIndex" isArray="false" />
- <ECID id="1010030007" valueType="Ascii" logicalName="LoadPort.LP1.CloseDoorWhenIdle" value="" min="" max="" eventTrigger="" units="" description=" " isArray="false" />
- <ECID id="1010030008" valueType="Ascii" logicalName="LoadPort.LP1.DataBits" value="" min="" max="" eventTrigger="" units="" description="DataBits" isArray="false" />
- <ECID id="1010030009" valueType="Ascii" logicalName="LoadPort.LP1.DataReadSize" value="" min="" max="" eventTrigger="" units="" description="RFID Read Size" isArray="false" />
- <ECID id="1010030010" valueType="Ascii" logicalName="LoadPort.LP1.DefaultPage" value="" min="" max="" eventTrigger="" units="" description="RFID Read Start Page" isArray="false" />
- <ECID id="1010030011" valueType="Ascii" logicalName="LoadPort.LP1.EnableAutoCarrierIdRead" value="" min="" max="" eventTrigger="" units="" description=" " isArray="false" />
- <ECID id="1010030012" valueType="Ascii" logicalName="LoadPort.LP1.EnableAutoLock" value="" min="" max="" eventTrigger="" units="" description="EnableAutoLockWhenCassetteArrived" isArray="false" />
- <ECID id="1010030013" valueType="Ascii" logicalName="LoadPort.LP1.EnableAutoUnload" value="" min="" max="" eventTrigger="" units="" description=" " isArray="false" />
- <ECID id="1010030014" valueType="Ascii" logicalName="LoadPort.LP1.EnableLogMessage" value="" min="" max="" eventTrigger="" units="" description="EnableLogMessage" isArray="false" />
- <ECID id="1010030015" valueType="Ascii" logicalName="LoadPort.LP1.HomeTimeout" value="" min="" max="" eventTrigger="" units="" description="home time out" isArray="false" />
- <ECID id="1010030016" valueType="Ascii" logicalName="LoadPort.LP1.InfoPadType" value="" min="" max="" eventTrigger="" units="" description="InfoPadType,0=TDK,1=Ext,2=FixedbySC" isArray="false" />
- <ECID id="1010030017" valueType="Ascii" logicalName="LoadPort.LP1.MotionTimeout" value="" min="" max="" eventTrigger="" units="" description="motion time out" isArray="false" />
- <ECID id="1010030018" valueType="Ascii" logicalName="LoadPort.LP1.NeedMoveToReadCarrierID" value="" min="" max="" eventTrigger="" units="" description=" " isArray="false" />
- <ECID id="1010030019" valueType="Ascii" logicalName="LoadPort.LP1.Parity" value="" min="" max="" eventTrigger="" units="" description="Parity" isArray="false" />
- <ECID id="1010030020" valueType="Ascii" logicalName="LoadPort.LP1.PLInService" value="" min="" max="" eventTrigger="" units="" description=" " isArray="false" />
- <ECID id="1010030021" valueType="Ascii" logicalName="LoadPort.LP1.PortName" value="" min="" max="" eventTrigger="" units="" description="LP COM串口地址" isArray="false" />
- <ECID id="1010030022" valueType="Ascii" logicalName="LoadPort.LP1.RFIDNoteNo" value="" min="" max="" eventTrigger="" units="" description="RFID NoteNo" isArray="false" />
- <ECID id="1010030023" valueType="Ascii" logicalName="LoadPort.LP1.StartPage" value="" min="" max="" eventTrigger="" units="" description="RFID Read Start Page" isArray="false" />
- <ECID id="1010030024" valueType="Ascii" logicalName="LoadPort.LP1.StopBits" value="" min="" max="" eventTrigger="" units="" description="StopBits" isArray="false" />
- <ECID id="1010040001" valueType="Ascii" logicalName="LoadPort.LP2.Address" value="" min="" max="" eventTrigger="" units="" description="ip:port" isArray="false" />
- <ECID id="1010040002" valueType="Ascii" logicalName="LoadPort.LP2.BaudRate" value="" min="" max="" eventTrigger="" units="" description="BaudRate" isArray="false" />
- <ECID id="1010040003" valueType="Ascii" logicalName="LoadPort.LP2.BypassCarrierIDReader" value="" min="" max="" eventTrigger="" units="" description=" " isArray="false" />
- <ECID id="1010040004" valueType="Ascii" logicalName="LoadPort.LP2.BypassReadID" value="" min="" max="" eventTrigger="" units="" description="Bypass Read ID" isArray="false" />
- <ECID id="1010040005" valueType="Ascii" logicalName="LoadPort.LP2.CarrierIDReaderSetting" value="" min="" max="" eventTrigger="" units="" description="Carrier ID Reader Setting" isArray="false" />
- <ECID id="1010040006" valueType="Ascii" logicalName="LoadPort.LP2.CarrierIndex" value="" min="" max="" eventTrigger="" units="" description="LP1CarrierIndex" isArray="false" />
- <ECID id="1010040007" valueType="Ascii" logicalName="LoadPort.LP2.CloseDoorWhenIdle" value="" min="" max="" eventTrigger="" units="" description=" " isArray="false" />
- <ECID id="1010040008" valueType="Ascii" logicalName="LoadPort.LP2.DataBits" value="" min="" max="" eventTrigger="" units="" description="DataBits" isArray="false" />
- <ECID id="1010040009" valueType="Ascii" logicalName="LoadPort.LP2.DataReadSize" value="" min="" max="" eventTrigger="" units="" description="RFID Read Size" isArray="false" />
- <ECID id="1010040010" valueType="Ascii" logicalName="LoadPort.LP2.DefaultPage" value="" min="" max="" eventTrigger="" units="" description="RFID Read Start Page" isArray="false" />
- <ECID id="1010040011" valueType="Ascii" logicalName="LoadPort.LP2.EnableAutoCarrierIdRead" value="" min="" max="" eventTrigger="" units="" description=" " isArray="false" />
- <ECID id="1010040012" valueType="Ascii" logicalName="LoadPort.LP2.EnableAutoLock" value="" min="" max="" eventTrigger="" units="" description="EnableAutoLockWhenCassetteArrived" isArray="false" />
- <ECID id="1010040013" valueType="Ascii" logicalName="LoadPort.LP2.EnableAutoUnload" value="" min="" max="" eventTrigger="" units="" description=" " isArray="false" />
- <ECID id="1010040014" valueType="Ascii" logicalName="LoadPort.LP2.EnableLogMessage" value="" min="" max="" eventTrigger="" units="" description="EnableLogMessage" isArray="false" />
- <ECID id="1010040015" valueType="Ascii" logicalName="LoadPort.LP2.HomeTimeout" value="" min="" max="" eventTrigger="" units="" description="home time out" isArray="false" />
- <ECID id="1010040016" valueType="Ascii" logicalName="LoadPort.LP2.InfoPadType" value="" min="" max="" eventTrigger="" units="" description="InfoPadType,0=TDK,1=Ext,2=FixedbySC" isArray="false" />
- <ECID id="1010040017" valueType="Ascii" logicalName="LoadPort.LP2.MotionTimeout" value="" min="" max="" eventTrigger="" units="" description="motion time out" isArray="false" />
- <ECID id="1010040018" valueType="Ascii" logicalName="LoadPort.LP2.NeedMoveToReadCarrierID" value="" min="" max="" eventTrigger="" units="" description=" " isArray="false" />
- <ECID id="1010040019" valueType="Ascii" logicalName="LoadPort.LP2.Parity" value="" min="" max="" eventTrigger="" units="" description="Parity" isArray="false" />
- <ECID id="1010040020" valueType="Ascii" logicalName="LoadPort.LP2.PLInService" value="" min="" max="" eventTrigger="" units="" description=" " isArray="false" />
- <ECID id="1010040021" valueType="Ascii" logicalName="LoadPort.LP2.PortName" value="" min="" max="" eventTrigger="" units="" description="LP COM串口地址" isArray="false" />
- <ECID id="1010040022" valueType="Ascii" logicalName="LoadPort.LP2.RFIDNoteNo" value="" min="" max="" eventTrigger="" units="" description="RFID NoteNo" isArray="false" />
- <ECID id="1010040023" valueType="Ascii" logicalName="LoadPort.LP2.StartPage" value="" min="" max="" eventTrigger="" units="" description="RFID Read Start Page" isArray="false" />
- <ECID id="1010040024" valueType="Ascii" logicalName="LoadPort.LP2.StopBits" value="" min="" max="" eventTrigger="" units="" description="StopBits" isArray="false" />
- <ECID id="1010050001" valueType="Ascii" logicalName="LoadPort.LP3.Address" value="" min="" max="" eventTrigger="" units="" description="ip:port" isArray="false" />
- <ECID id="1010050002" valueType="Ascii" logicalName="LoadPort.LP3.BaudRate" value="" min="" max="" eventTrigger="" units="" description="BaudRate" isArray="false" />
- <ECID id="1010050003" valueType="Ascii" logicalName="LoadPort.LP3.BypassCarrierIDReader" value="" min="" max="" eventTrigger="" units="" description=" " isArray="false" />
- <ECID id="1010050004" valueType="Ascii" logicalName="LoadPort.LP3.BypassReadID" value="" min="" max="" eventTrigger="" units="" description="Bypass Read ID" isArray="false" />
- <ECID id="1010050005" valueType="Ascii" logicalName="LoadPort.LP3.CarrierIDReaderSetting" value="" min="" max="" eventTrigger="" units="" description="Carrier ID Reader Setting" isArray="false" />
- <ECID id="1010050006" valueType="Ascii" logicalName="LoadPort.LP3.CarrierIndex" value="" min="" max="" eventTrigger="" units="" description="LP1CarrierIndex" isArray="false" />
- <ECID id="1010050007" valueType="Ascii" logicalName="LoadPort.LP3.CloseDoorWhenIdle" value="" min="" max="" eventTrigger="" units="" description=" " isArray="false" />
- <ECID id="1010050008" valueType="Ascii" logicalName="LoadPort.LP3.DataBits" value="" min="" max="" eventTrigger="" units="" description="DataBits" isArray="false" />
- <ECID id="1010050009" valueType="Ascii" logicalName="LoadPort.LP3.DataReadSize" value="" min="" max="" eventTrigger="" units="" description="RFID Read Size" isArray="false" />
- <ECID id="1010050010" valueType="Ascii" logicalName="LoadPort.LP3.DefaultPage" value="" min="" max="" eventTrigger="" units="" description="RFID Read Start Page" isArray="false" />
- <ECID id="1010050011" valueType="Ascii" logicalName="LoadPort.LP3.EnableAutoCarrierIdRead" value="" min="" max="" eventTrigger="" units="" description=" " isArray="false" />
- <ECID id="1010050012" valueType="Ascii" logicalName="LoadPort.LP3.EnableAutoLock" value="" min="" max="" eventTrigger="" units="" description="EnableAutoLockWhenCassetteArrived" isArray="false" />
- <ECID id="1010050013" valueType="Ascii" logicalName="LoadPort.LP3.EnableAutoUnload" value="" min="" max="" eventTrigger="" units="" description=" " isArray="false" />
- <ECID id="1010050014" valueType="Ascii" logicalName="LoadPort.LP3.EnableLogMessage" value="" min="" max="" eventTrigger="" units="" description="EnableLogMessage" isArray="false" />
- <ECID id="1010050015" valueType="Ascii" logicalName="LoadPort.LP3.HomeTimeout" value="" min="" max="" eventTrigger="" units="" description="home time out" isArray="false" />
- <ECID id="1010050016" valueType="Ascii" logicalName="LoadPort.LP3.InfoPadType" value="" min="" max="" eventTrigger="" units="" description="InfoPadType,0=TDK,1=Ext,2=FixedbySC" isArray="false" />
- <ECID id="1010050017" valueType="Ascii" logicalName="LoadPort.LP3.MotionTimeout" value="" min="" max="" eventTrigger="" units="" description="motion time out" isArray="false" />
- <ECID id="1010050018" valueType="Ascii" logicalName="LoadPort.LP3.NeedMoveToReadCarrierID" value="" min="" max="" eventTrigger="" units="" description=" " isArray="false" />
- <ECID id="1010050019" valueType="Ascii" logicalName="LoadPort.LP3.Parity" value="" min="" max="" eventTrigger="" units="" description="Parity" isArray="false" />
- <ECID id="1010050020" valueType="Ascii" logicalName="LoadPort.LP3.PLInService" value="" min="" max="" eventTrigger="" units="" description=" " isArray="false" />
- <ECID id="1010050021" valueType="Ascii" logicalName="LoadPort.LP3.PortName" value="" min="" max="" eventTrigger="" units="" description="LP COM串口地址" isArray="false" />
- <ECID id="1010050022" valueType="Ascii" logicalName="LoadPort.LP3.RFIDNoteNo" value="" min="" max="" eventTrigger="" units="" description="RFID NoteNo" isArray="false" />
- <ECID id="1010050023" valueType="Ascii" logicalName="LoadPort.LP3.StartPage" value="" min="" max="" eventTrigger="" units="" description="RFID Read Start Page" isArray="false" />
- <ECID id="1010050024" valueType="Ascii" logicalName="LoadPort.LP3.StopBits" value="" min="" max="" eventTrigger="" units="" description="StopBits" isArray="false" />
- <ECID id="1010060001" valueType="Ascii" logicalName="LoadPort.LP4.Address" value="" min="" max="" eventTrigger="" units="" description="ip:port" isArray="false" />
- <ECID id="1010060002" valueType="Ascii" logicalName="LoadPort.LP4.BaudRate" value="" min="" max="" eventTrigger="" units="" description="BaudRate" isArray="false" />
- <ECID id="1010060003" valueType="Ascii" logicalName="LoadPort.LP4.BypassCarrierIDReader" value="" min="" max="" eventTrigger="" units="" description=" " isArray="false" />
- <ECID id="1010060004" valueType="Ascii" logicalName="LoadPort.LP4.BypassReadID" value="" min="" max="" eventTrigger="" units="" description="Bypass Read ID" isArray="false" />
- <ECID id="1010060005" valueType="Ascii" logicalName="LoadPort.LP4.CarrierIDReaderSetting" value="" min="" max="" eventTrigger="" units="" description="Carrier ID Reader Setting" isArray="false" />
- <ECID id="1010060006" valueType="Ascii" logicalName="LoadPort.LP4.CarrierIndex" value="" min="" max="" eventTrigger="" units="" description="LP1CarrierIndex" isArray="false" />
- <ECID id="1010060007" valueType="Ascii" logicalName="LoadPort.LP4.CloseDoorWhenIdle" value="" min="" max="" eventTrigger="" units="" description=" " isArray="false" />
- <ECID id="1010060008" valueType="Ascii" logicalName="LoadPort.LP4.DataBits" value="" min="" max="" eventTrigger="" units="" description="DataBits" isArray="false" />
- <ECID id="1010060009" valueType="Ascii" logicalName="LoadPort.LP4.DataReadSize" value="" min="" max="" eventTrigger="" units="" description="RFID Read Size" isArray="false" />
- <ECID id="1010060010" valueType="Ascii" logicalName="LoadPort.LP4.DefaultPage" value="" min="" max="" eventTrigger="" units="" description="RFID Read Start Page" isArray="false" />
- <ECID id="1010060011" valueType="Ascii" logicalName="LoadPort.LP4.EnableAutoCarrierIdRead" value="" min="" max="" eventTrigger="" units="" description=" " isArray="false" />
- <ECID id="1010060012" valueType="Ascii" logicalName="LoadPort.LP4.EnableAutoLock" value="" min="" max="" eventTrigger="" units="" description="EnableAutoLockWhenCassetteArrived" isArray="false" />
- <ECID id="1010060013" valueType="Ascii" logicalName="LoadPort.LP4.EnableAutoUnload" value="" min="" max="" eventTrigger="" units="" description=" " isArray="false" />
- <ECID id="1010060014" valueType="Ascii" logicalName="LoadPort.LP4.EnableLogMessage" value="" min="" max="" eventTrigger="" units="" description="EnableLogMessage" isArray="false" />
- <ECID id="1010060015" valueType="Ascii" logicalName="LoadPort.LP4.HomeTimeout" value="" min="" max="" eventTrigger="" units="" description="home time out" isArray="false" />
- <ECID id="1010060016" valueType="Ascii" logicalName="LoadPort.LP4.InfoPadType" value="" min="" max="" eventTrigger="" units="" description="InfoPadType,0=TDK,1=Ext,2=FixedbySC" isArray="false" />
- <ECID id="1010060017" valueType="Ascii" logicalName="LoadPort.LP4.MotionTimeout" value="" min="" max="" eventTrigger="" units="" description="motion time out" isArray="false" />
- <ECID id="1010060018" valueType="Ascii" logicalName="LoadPort.LP4.NeedMoveToReadCarrierID" value="" min="" max="" eventTrigger="" units="" description=" " isArray="false" />
- <ECID id="1010060019" valueType="Ascii" logicalName="LoadPort.LP4.Parity" value="" min="" max="" eventTrigger="" units="" description="Parity" isArray="false" />
- <ECID id="1010060020" valueType="Ascii" logicalName="LoadPort.LP4.PLInService" value="" min="" max="" eventTrigger="" units="" description=" " isArray="false" />
- <ECID id="1010060021" valueType="Ascii" logicalName="LoadPort.LP4.PortName" value="" min="" max="" eventTrigger="" units="" description="LP COM串口地址" isArray="false" />
- <ECID id="1010060022" valueType="Ascii" logicalName="LoadPort.LP4.RFIDNoteNo" value="" min="" max="" eventTrigger="" units="" description="RFID NoteNo" isArray="false" />
- <ECID id="1010060023" valueType="Ascii" logicalName="LoadPort.LP4.StartPage" value="" min="" max="" eventTrigger="" units="" description="RFID Read Start Page" isArray="false" />
- <ECID id="1010060024" valueType="Ascii" logicalName="LoadPort.LP4.StopBits" value="" min="" max="" eventTrigger="" units="" description="StopBits" isArray="false" />
- </EquipmentConstants>
- <DataVariables>
- <DVID id="3007" valueType="I4" logicalName="ECChangedID" value="" eventTrigger="" description="Changed ECID list L,n<ECID>" isArray="false" />
- <DVID id="3105" valueType="Ascii" logicalName="CarrierID" value="" eventTrigger="" description="The ID of the carrier." isArray="false" />
- <DVID id="3106" valueType="Ascii" logicalName="SlotMap" value="" eventTrigger="" description="Presence status of wafers in the carrier.
L, n (n = Number of SLOTSTATEs)
<SLOTSTATE>
0=UNDEFINED
1=EMPTY
2=NOT EMPTY
3=CORRECTLY OCCUPIED
4=DOUBLE SLOTTED
5=CROSS SLOTTED" isArray="false" />
- <DVID id="3113" valueType="I4" logicalName="PortID" value="" eventTrigger="" description="Load port ID" isArray="false" />
- <DVID id="3404" valueType="Ascii" logicalName="SubstID" value="" eventTrigger="" description="Identifier of substrate associated with last event." isArray="false" />
- <DVID id="3405" valueType="Ascii" logicalName="SubstLocID" value="" eventTrigger="" description="Identifier for equipment substrate location associated with the last event." isArray="false" />
- <DVID id="3406" valueType="I4" logicalName="SubstLocState" value="" eventTrigger="" description="State of substrate location associated with the last event.
0=UNOCCUPIED
1=OCCUPIED" isArray="false" />
- </DataVariables>
- <DataCollections useAnnotatedEvent="false">
- <RPTIDs>
- <RPTID id="1" logicalName="DefaultDefinedReport_1">
- <ReportVariable id="3" varType="StatusVariable" logicalName="Clock" />
- <ReportVariable id="4" varType="StatusVariable" logicalName="ControlState" />
- </RPTID>
- <RPTID id="2" logicalName="DefaultDefinedReport_2">
- <ReportVariable id="3007" varType="DataVariable" logicalName="ECChangedID" />
- </RPTID>
- <RPTID id="3" logicalName="DefaultDefinedReport_3">
- <ReportVariable id="3404" varType="DataVariable" logicalName="SubstID" />
- <ReportVariable id="3405" varType="DataVariable" logicalName="SubstLocID" />
- <ReportVariable id="3406" varType="DataVariable" logicalName="SubstLocState" />
- <ReportVariable id="3" varType="StatusVariable" logicalName="Clock" />
- </RPTID>
- <RPTID id="4" logicalName="DefaultDefinedReport_4">
- <ReportVariable id="3113" varType="DataVariable" logicalName="PortID" />
- <ReportVariable id="3" varType="StatusVariable" logicalName="Clock" />
- </RPTID>
- <RPTID id="5" logicalName="DefaultDefinedReport_5">
- <ReportVariable id="3105" varType="DataVariable" logicalName="CarrierID" />
- <ReportVariable id="3113" varType="DataVariable" logicalName="PortID" />
- <ReportVariable id="3" varType="StatusVariable" logicalName="Clock" />
- </RPTID>
- <RPTID id="6" logicalName="DefaultDefinedReport_6">
- <ReportVariable id="3105" varType="DataVariable" logicalName="CarrierID" />
- <ReportVariable id="3106" varType="DataVariable" logicalName="SlotMap" />
- <ReportVariable id="3113" varType="DataVariable" logicalName="PortID" />
- <ReportVariable id="3" varType="StatusVariable" logicalName="Clock" />
- </RPTID>
- </RPTIDs>
- <CEIDs>
- <CEID id="1" logicalName="EquipmentOFFLINE" description="" enabled="true">
- <RPTID id="1" logicalName="DefaultDefinedReport_1">
- <ReportVariable id="3" varType="StatusVariable" logicalName="Clock" />
- <ReportVariable id="4" varType="StatusVariable" logicalName="ControlState" />
- </RPTID>
- </CEID>
- <CEID id="2" logicalName="ControlStateLOCAL" description="" enabled="true">
- <RPTID id="1" logicalName="DefaultDefinedReport_1">
- <ReportVariable id="3" varType="StatusVariable" logicalName="Clock" />
- <ReportVariable id="4" varType="StatusVariable" logicalName="ControlState" />
- </RPTID>
- </CEID>
- <CEID id="3" logicalName="ControlStateREMOTE" description="" enabled="true">
- <RPTID id="1" logicalName="DefaultDefinedReport_1">
- <ReportVariable id="3" varType="StatusVariable" logicalName="Clock" />
- <ReportVariable id="4" varType="StatusVariable" logicalName="ControlState" />
- </RPTID>
- </CEID>
- <CEID id="8" logicalName="EquipmentConstantChanged" description="" enabled="true">
- <RPTID id="2" logicalName="DefaultDefinedReport_2">
- <ReportVariable id="3007" varType="DataVariable" logicalName="ECChangedID" />
- </RPTID>
- </CEID>
- <CEID id="160" logicalName="SpoolingActivated" description="" enabled="true" />
- <CEID id="161" logicalName="SpoolingDeactivated" description="" enabled="true" />
- <CEID id="162" logicalName="SpoolingFailed" description="" enabled="true" />
- <CEID id="503" logicalName="WAFER_LEFT_POSITION" description="" enabled="true">
- <RPTID id="3" logicalName="DefaultDefinedReport_3">
- <ReportVariable id="3404" varType="DataVariable" logicalName="SubstID" />
- <ReportVariable id="3405" varType="DataVariable" logicalName="SubstLocID" />
- <ReportVariable id="3406" varType="DataVariable" logicalName="SubstLocState" />
- <ReportVariable id="3" varType="StatusVariable" logicalName="Clock" />
- </RPTID>
- </CEID>
- <CEID id="504" logicalName="WAFER_ARRIVE_POSITION" description="" enabled="true">
- <RPTID id="3" logicalName="DefaultDefinedReport_3">
- <ReportVariable id="3404" varType="DataVariable" logicalName="SubstID" />
- <ReportVariable id="3405" varType="DataVariable" logicalName="SubstLocID" />
- <ReportVariable id="3406" varType="DataVariable" logicalName="SubstLocState" />
- <ReportVariable id="3" varType="StatusVariable" logicalName="Clock" />
- </RPTID>
- </CEID>
- <CEID id="1000" logicalName="CARRIER_ARRIVED" description="" enabled="true">
- <RPTID id="4" logicalName="DefaultDefinedReport_4">
- <ReportVariable id="3113" varType="DataVariable" logicalName="PortID" />
- <ReportVariable id="3" varType="StatusVariable" logicalName="Clock" />
- </RPTID>
- </CEID>
- <CEID id="1001" logicalName="CARRIER_REMOVED" description="" enabled="true">
- <RPTID id="5" logicalName="DefaultDefinedReport_5">
- <ReportVariable id="3105" varType="DataVariable" logicalName="CarrierID" />
- <ReportVariable id="3113" varType="DataVariable" logicalName="PortID" />
- <ReportVariable id="3" varType="StatusVariable" logicalName="Clock" />
- </RPTID>
- </CEID>
- <CEID id="1002" logicalName="CARRIER_ID_READ" description="" enabled="true">
- <RPTID id="5" logicalName="DefaultDefinedReport_5">
- <ReportVariable id="3105" varType="DataVariable" logicalName="CarrierID" />
- <ReportVariable id="3113" varType="DataVariable" logicalName="PortID" />
- <ReportVariable id="3" varType="StatusVariable" logicalName="Clock" />
- </RPTID>
- </CEID>
- <CEID id="1003" logicalName="CARRIER_ID_READ_FAILED" description="" enabled="true">
- <RPTID id="4" logicalName="DefaultDefinedReport_4">
- <ReportVariable id="3113" varType="DataVariable" logicalName="PortID" />
- <ReportVariable id="3" varType="StatusVariable" logicalName="Clock" />
- </RPTID>
- </CEID>
- <CEID id="1004" logicalName="CARRIER_ID_WRITE" description="" enabled="true">
- <RPTID id="5" logicalName="DefaultDefinedReport_5">
- <ReportVariable id="3105" varType="DataVariable" logicalName="CarrierID" />
- <ReportVariable id="3113" varType="DataVariable" logicalName="PortID" />
- <ReportVariable id="3" varType="StatusVariable" logicalName="Clock" />
- </RPTID>
- </CEID>
- <CEID id="1005" logicalName="CARRIER_ID_WRITE_FAILED" description="" enabled="true">
- <RPTID id="4" logicalName="DefaultDefinedReport_4">
- <ReportVariable id="3113" varType="DataVariable" logicalName="PortID" />
- <ReportVariable id="3" varType="StatusVariable" logicalName="Clock" />
- </RPTID>
- </CEID>
- <CEID id="1006" logicalName="CARRIER_LOADED" description="" enabled="true">
- <RPTID id="5" logicalName="DefaultDefinedReport_5">
- <ReportVariable id="3105" varType="DataVariable" logicalName="CarrierID" />
- <ReportVariable id="3113" varType="DataVariable" logicalName="PortID" />
- <ReportVariable id="3" varType="StatusVariable" logicalName="Clock" />
- </RPTID>
- </CEID>
- <CEID id="1007" logicalName="CARRIER_UNLOADED" description="" enabled="true">
- <RPTID id="5" logicalName="DefaultDefinedReport_5">
- <ReportVariable id="3105" varType="DataVariable" logicalName="CarrierID" />
- <ReportVariable id="3113" varType="DataVariable" logicalName="PortID" />
- <ReportVariable id="3" varType="StatusVariable" logicalName="Clock" />
- </RPTID>
- </CEID>
- <CEID id="1008" logicalName="SLOT_MAP_AVAILABLE" description="" enabled="true">
- <RPTID id="6" logicalName="DefaultDefinedReport_6">
- <ReportVariable id="3105" varType="DataVariable" logicalName="CarrierID" />
- <ReportVariable id="3106" varType="DataVariable" logicalName="SlotMap" />
- <ReportVariable id="3113" varType="DataVariable" logicalName="PortID" />
- <ReportVariable id="3" varType="StatusVariable" logicalName="Clock" />
- </RPTID>
- </CEID>
- </CEIDs>
- </DataCollections>
- <Alarms>
- <ALID id="10016000" logicalName="System.MFCNB.ToleranceAlarm" description="" category="EquipmentStatusWarning" enabled="false" eventSet="110016000" eventClear="210016000" />
- <ALID id="10016001" logicalName="System.MFCNB.ToleranceWarning" description="" category="EquipmentStatusWarning" enabled="false" eventSet="110016001" eventClear="210016001" />
- <ALID id="10017002" logicalName="System.VG2Pressure.OutOfToleranceError" description="" category="EquipmentStatusWarning" enabled="false" eventSet="110017002" eventClear="210017002" />
- <ALID id="10017003" logicalName="System.VG2Pressure.OutOfToleranceWarning" description="" category="EquipmentStatusWarning" enabled="false" eventSet="110017003" eventClear="210017003" />
- <ALID id="10203001" logicalName="System.Boat.BoatHumanInterlock" description="" category="EquipmentStatusWarning" enabled="false" eventSet="110203001" eventClear="210203001" />
- <ALID id="10203002" logicalName="System.Boat.BoatRAxisMoveFailedForInterlock" description="" category="EquipmentStatusWarning" enabled="false" eventSet="110203002" eventClear="210203002" />
- <ALID id="10203003" logicalName="System.Boat.BoatRAxisMoveTimeOut" description="" category="EquipmentStatusWarning" enabled="false" eventSet="110203003" eventClear="210203003" />
- <ALID id="10203004" logicalName="System.Boat.BoatZAxisDownLimit" description="" category="EquipmentStatusWarning" enabled="false" eventSet="110203004" eventClear="210203004" />
- <ALID id="10203005" logicalName="System.Boat.BoatZAxisMoveFailedForAutoShutterNotDown" description="" category="EquipmentStatusWarning" enabled="false" eventSet="110203005" eventClear="210203005" />
- <ALID id="10203006" logicalName="System.Boat.BoatZAxisMoveFailedForAutoShutterNotOpen" description="" category="EquipmentStatusWarning" enabled="false" eventSet="110203006" eventClear="210203006" />
- <ALID id="10203007" logicalName="System.Boat.BoatZAxisMoveFailedForHumanInterlock" description="" category="EquipmentStatusWarning" enabled="false" eventSet="110203007" eventClear="210203007" />
- <ALID id="10203008" logicalName="System.Boat.BoatZAxisMoveFailedForInterlock" description="" category="EquipmentStatusWarning" enabled="false" eventSet="110203008" eventClear="210203008" />
- <ALID id="10203009" logicalName="System.Boat.BoatZAxisMoveFailedForTiltStatus" description="" category="EquipmentStatusWarning" enabled="false" eventSet="110203009" eventClear="210203009" />
- <ALID id="10203010" logicalName="System.Boat.BoatZAxisMoveFailedForWaferRobotArmExtend" description="" category="EquipmentStatusWarning" enabled="false" eventSet="110203010" eventClear="210203010" />
- <ALID id="10203011" logicalName="System.Boat.BoatZAxisMoveTimeOut" description="" category="EquipmentStatusWarning" enabled="false" eventSet="110203011" eventClear="210203011" />
- <ALID id="10203012" logicalName="System.Boat.BoatZAxisUpLimit" description="" category="EquipmentStatusWarning" enabled="false" eventSet="110203012" eventClear="210203012" />
- <ALID id="10204001" logicalName="System.ChargeProcessDischargeStartFailedWarning" description="System ChargeProcessDischarge start failed " category="EquipmentStatusWarning" enabled="false" eventSet="110204001" eventClear="210204001" />
- <ALID id="10204002" logicalName="System.ChargeWaferJobMonitorFailedAlarm" description="System ChargeWafer job monitor start failed " category="EquipmentStatusWarning" enabled="false" eventSet="110204002" eventClear="210204002" />
- <ALID id="10204003" logicalName="System.ChargeWaferJobStartFailedWarning" description="System ChargeWafer job start failed " category="EquipmentStatusWarning" enabled="false" eventSet="110204003" eventClear="210204003" />
- <ALID id="10204004" logicalName="System.CreateWaferFailedWarning" description="System create wafer failed " category="EquipmentStatusWarning" enabled="false" eventSet="110204004" eventClear="210204004" />
- <ALID id="10204005" logicalName="System.DeleteWaferFailedWarning" description="System delete wafer failed " category="EquipmentStatusWarning" enabled="false" eventSet="110204005" eventClear="210204005" />
- <ALID id="10204006" logicalName="System.DischargeWaferJobMonitorFailedAlarm" description="System DischargeWafer job monitor start failed " category="EquipmentStatusWarning" enabled="false" eventSet="110204006" eventClear="210204006" />
- <ALID id="10204007" logicalName="System.EDWaferTypeUseCountAlarm" description="System ED wafer type use count alarm " category="EquipmentStatusWarning" enabled="false" eventSet="110204007" eventClear="210204007" />
- <ALID id="10204008" logicalName="System.EDWaferTypeUseCountWarning" description="System ED wafer type use count warning " category="EquipmentStatusWarning" enabled="false" eventSet="110204008" eventClear="210204008" />
- <ALID id="10204009" logicalName="System.EquipmentEmergencyStopAlarm" description="System equipment emergency stop alarm " category="EquipmentStatusWarning" enabled="false" eventSet="110204009" eventClear="210204009" />
- <ALID id="10204010" logicalName="System.ExpertChargeProcessDischargeStartFailedWarning" description="System Expert ChargeProcessDischarge start failed " category="EquipmentStatusWarning" enabled="false" eventSet="110204010" eventClear="210204010" />
- <ALID id="10204011" logicalName="System.ExpertChargeProcessStartFailedWarning" description="System Expert ChargeProcess start failed " category="EquipmentStatusWarning" enabled="false" eventSet="110204011" eventClear="210204011" />
- <ALID id="10204012" logicalName="System.LoadCassetteJobStartFailedWarning" description="System LoadCassette job start failed " category="EquipmentStatusWarning" enabled="false" eventSet="110204012" eventClear="210204012" />
- <ALID id="10204013" logicalName="System.LoadProcessStockerStartFailedWarning" description="System LoadProcessStocker start failed " category="EquipmentStatusWarning" enabled="false" eventSet="110204013" eventClear="210204013" />
- <ALID id="10204014" logicalName="System.LoadProcessUnloadStartFailedWarning" description="System LoadProcessUnload start failed " category="EquipmentStatusWarning" enabled="false" eventSet="110204014" eventClear="210204014" />
- <ALID id="10204015" logicalName="System.MoveWaferFailedWarning" description="System move wafer failed " category="EquipmentStatusWarning" enabled="false" eventSet="110204015" eventClear="210204015" />
- <ALID id="10204016" logicalName="System.MWaferTypeUseCountAlarm" description="System M wafer type use count alarm " category="EquipmentStatusWarning" enabled="false" eventSet="110204016" eventClear="210204016" />
- <ALID id="10204017" logicalName="System.MWaferTypeUseCountWarning" description="System M wafer type use count warning " category="EquipmentStatusWarning" enabled="false" eventSet="110204017" eventClear="210204017" />
- <ALID id="10204018" logicalName="System.ReturnAllWaferJobStartFailedWarning" description="System ReturnAllWafer job start failed " category="EquipmentStatusWarning" enabled="false" eventSet="110204018" eventClear="210204018" />
- <ALID id="10204019" logicalName="System.ReturnWaferFailedWarning" description="System return wafer failed " category="EquipmentStatusWarning" enabled="false" eventSet="110204019" eventClear="210204019" />
- <ALID id="10204020" logicalName="System.SDWaferTypeUseCountAlarm" description="System SD wafer type use count alarm " category="EquipmentStatusWarning" enabled="false" eventSet="110204020" eventClear="210204020" />
- <ALID id="10204021" logicalName="System.SDWaferTypeUseCountWarning" description="System SD wafer type use count warning " category="EquipmentStatusWarning" enabled="false" eventSet="110204021" eventClear="210204021" />
- <ALID id="10204022" logicalName="System.SetLotIDFailedWarning" description="System set lotID failed " category="EquipmentStatusWarning" enabled="false" eventSet="110204022" eventClear="210204022" />
- <ALID id="10204023" logicalName="System.UnloadCassetteJobStartFailedWarning" description="System UnloadCassette job start failed " category="EquipmentStatusWarning" enabled="false" eventSet="110204023" eventClear="210204023" />
- <ALID id="10204024" logicalName="System.TransferJobStartFailedWarning" description="Transfer job start failed " category="EquipmentStatusWarning" enabled="false" eventSet="110204024" eventClear="210204024" />
- <ALID id="10204025" logicalName="System.EDWaferTypeThicknessAlarm" description="ED wafer type thickness alarm " category="EquipmentStatusWarning" enabled="false" eventSet="110204025" eventClear="210204025" />
- <ALID id="10204026" logicalName="System.EDWaferTypeThicknessWarning" description="ED wafer type thickness warning " category="EquipmentStatusWarning" enabled="false" eventSet="110204026" eventClear="210204026" />
- <ALID id="10204027" logicalName="System.EDWaferTypeUseTimeAlarm" description="ED wafer type use time alarm " category="EquipmentStatusWarning" enabled="false" eventSet="110204027" eventClear="210204027" />
- <ALID id="10204028" logicalName="System.EDWaferTypeUseTimeWarning" description="ED wafer type use time warning " category="EquipmentStatusWarning" enabled="false" eventSet="110204028" eventClear="210204028" />
- <ALID id="10204029" logicalName="System.PLCConnectRecoveryWarning" description="PLC connect recovery " category="EquipmentStatusWarning" enabled="false" eventSet="110204029" eventClear="210204029" />
- <ALID id="10204030" logicalName="System.PLCDisconnectAlarm" description="PLC disconnect " category="EquipmentStatusWarning" enabled="false" eventSet="110204030" eventClear="210204030" />
- <ALID id="10204031" logicalName="System.SDWaferTypeThicknessAlarm" description="SD wafer type thickness alarm " category="EquipmentStatusWarning" enabled="false" eventSet="110204031" eventClear="210204031" />
- <ALID id="10204032" logicalName="System.SDWaferTypeThicknessWarning" description="SD wafer type thickness warning " category="EquipmentStatusWarning" enabled="false" eventSet="110204032" eventClear="210204032" />
- <ALID id="10204033" logicalName="System.SDWaferTypeUseTimeAlarm" description="SD wafer type use time alarm " category="EquipmentStatusWarning" enabled="false" eventSet="110204033" eventClear="210204033" />
- <ALID id="10204034" logicalName="System.SDWaferTypeUseTimeWarning" description="SD wafer type use time warning " category="EquipmentStatusWarning" enabled="false" eventSet="110204034" eventClear="210204034" />
- <ALID id="10205001" logicalName="System.PM1.CommunicationError" description="Can not Communication " category="EquipmentStatusWarning" enabled="false" eventSet="110205001" eventClear="210205001" />
- <ALID id="10205002" logicalName="System.PM1.ConnectionError" description="Can not connect with " category="EquipmentStatusWarning" enabled="false" eventSet="110205002" eventClear="210205002" />
- <ALID id="10206001" logicalName="System.Heater.CommunicationError" description="Can not Communication " category="EquipmentStatusWarning" enabled="false" eventSet="110206001" eventClear="210206001" />
- <ALID id="10206002" logicalName="System.Heater.ConnectionError" description="Can not connect with " category="EquipmentStatusWarning" enabled="false" eventSet="110206002" eventClear="210206002" />
- <ALID id="10207001" logicalName="System.CHM.CommunicationError" description="Can not Communication " category="EquipmentStatusWarning" enabled="false" eventSet="110207001" eventClear="210207001" />
- <ALID id="10207002" logicalName="System.CHM.ConnectionError" description="Can not connect with " category="EquipmentStatusWarning" enabled="false" eventSet="110207002" eventClear="210207002" />
- <ALID id="20101001" logicalName="LP1.HomeFailAlarm" description="Home fail reason " category="EquipmentStatusWarning" enabled="false" eventSet="120101001" eventClear="220101001" />
- <ALID id="20101002" logicalName="LP1.HomeTimeoutAlarm" description="Home timeout " category="EquipmentStatusWarning" enabled="false" eventSet="120101002" eventClear="220101002" />
- <ALID id="20101003" logicalName="LP1.LoadFailAlarm" description="Load fail reason " category="EquipmentStatusWarning" enabled="false" eventSet="120101003" eventClear="220101003" />
- <ALID id="20101004" logicalName="LP1.LoadJobFailWarning" description="Load job fail reason " category="EquipmentStatusWarning" enabled="false" eventSet="120101004" eventClear="220101004" />
- <ALID id="20101005" logicalName="LP1.LoadTimeoutAlarm" description="Load timeout " category="EquipmentStatusWarning" enabled="false" eventSet="120101005" eventClear="220101005" />
- <ALID id="20101006" logicalName="LP1.SMIFNotReadyWarning" description="Smif not ready " category="EquipmentStatusWarning" enabled="false" eventSet="120101006" eventClear="220101006" />
- <ALID id="20101007" logicalName="LP1.SMIFPodNotPresentWarning" description="Smif pod not present " category="EquipmentStatusWarning" enabled="false" eventSet="120101007" eventClear="220101007" />
- <ALID id="20101008" logicalName="LP1.UnloadFailAlarm" description="Unload fail reason " category="EquipmentStatusWarning" enabled="false" eventSet="120101008" eventClear="220101008" />
- <ALID id="20101009" logicalName="LP1.UnloadTimeoutAlarm" description="Unload timeout " category="EquipmentStatusWarning" enabled="false" eventSet="120101009" eventClear="220101009" />
- <ALID id="30101001" logicalName="LP2.HomeFailAlarm" description="Home fail reason " category="EquipmentStatusWarning" enabled="false" eventSet="130101001" eventClear="230101001" />
- <ALID id="30101002" logicalName="LP2.HomeTimeoutAlarm" description="Home timeout " category="EquipmentStatusWarning" enabled="false" eventSet="130101002" eventClear="230101002" />
- <ALID id="30101003" logicalName="LP2.LoadFailAlarm" description="Load fail reason " category="EquipmentStatusWarning" enabled="false" eventSet="130101003" eventClear="230101003" />
- <ALID id="30101004" logicalName="LP2.LoadJobFailWarning" description="Load job fail reason " category="EquipmentStatusWarning" enabled="false" eventSet="130101004" eventClear="230101004" />
- <ALID id="30101005" logicalName="LP2.LoadTimeoutAlarm" description="Load timeout " category="EquipmentStatusWarning" enabled="false" eventSet="130101005" eventClear="230101005" />
- <ALID id="30101006" logicalName="LP2.SMIFNotReadyWarning" description="Smif not ready " category="EquipmentStatusWarning" enabled="false" eventSet="130101006" eventClear="230101006" />
- <ALID id="30101007" logicalName="LP2.SMIFPodNotPresentWarning" description="Smif pod not present " category="EquipmentStatusWarning" enabled="false" eventSet="130101007" eventClear="230101007" />
- <ALID id="30101008" logicalName="LP2.UnloadFailAlarm" description="Unload fail reason " category="EquipmentStatusWarning" enabled="false" eventSet="130101008" eventClear="230101008" />
- <ALID id="30101009" logicalName="LP2.UnloadTimeoutAlarm" description="Unload timeout " category="EquipmentStatusWarning" enabled="false" eventSet="130101009" eventClear="230101009" />
- <ALID id="40101001" logicalName="LP3.HomeFailAlarm" description="Home fail reason " category="EquipmentStatusWarning" enabled="false" eventSet="140101001" eventClear="240101001" />
- <ALID id="40101002" logicalName="LP3.HomeTimeoutAlarm" description="Home timeout " category="EquipmentStatusWarning" enabled="false" eventSet="140101002" eventClear="240101002" />
- <ALID id="40101003" logicalName="LP3.LoadFailAlarm" description="Load fail reason " category="EquipmentStatusWarning" enabled="false" eventSet="140101003" eventClear="240101003" />
- <ALID id="40101004" logicalName="LP3.LoadJobFailWarning" description="Load job fail reason " category="EquipmentStatusWarning" enabled="false" eventSet="140101004" eventClear="240101004" />
- <ALID id="40101005" logicalName="LP3.LoadTimeoutAlarm" description="Load timeout " category="EquipmentStatusWarning" enabled="false" eventSet="140101005" eventClear="240101005" />
- <ALID id="40101006" logicalName="LP3.SMIFNotReadyWarning" description="Smif not ready " category="EquipmentStatusWarning" enabled="false" eventSet="140101006" eventClear="240101006" />
- <ALID id="40101007" logicalName="LP3.SMIFPodNotPresentWarning" description="Smif pod not present " category="EquipmentStatusWarning" enabled="false" eventSet="140101007" eventClear="240101007" />
- <ALID id="40101008" logicalName="LP3.UnloadFailAlarm" description="Unload fail reason " category="EquipmentStatusWarning" enabled="false" eventSet="140101008" eventClear="240101008" />
- <ALID id="40101009" logicalName="LP3.UnloadTimeoutAlarm" description="Unload timeout " category="EquipmentStatusWarning" enabled="false" eventSet="140101009" eventClear="240101009" />
- <ALID id="50101001" logicalName="LP4.HomeFailAlarm" description="Home fail reason " category="EquipmentStatusWarning" enabled="false" eventSet="150101001" eventClear="250101001" />
- <ALID id="50101002" logicalName="LP4.HomeTimeoutAlarm" description="Home timeout " category="EquipmentStatusWarning" enabled="false" eventSet="150101002" eventClear="250101002" />
- <ALID id="50101003" logicalName="LP4.LoadFailAlarm" description="Load fail reason " category="EquipmentStatusWarning" enabled="false" eventSet="150101003" eventClear="250101003" />
- <ALID id="50101004" logicalName="LP4.LoadJobFailWarning" description="Load job fail reason " category="EquipmentStatusWarning" enabled="false" eventSet="150101004" eventClear="250101004" />
- <ALID id="50101005" logicalName="LP4.LoadTimeoutAlarm" description="Load timeout " category="EquipmentStatusWarning" enabled="false" eventSet="150101005" eventClear="250101005" />
- <ALID id="50101006" logicalName="LP4.SMIFNotReadyWarning" description="Smif not ready " category="EquipmentStatusWarning" enabled="false" eventSet="150101006" eventClear="250101006" />
- <ALID id="50101007" logicalName="LP4.SMIFPodNotPresentWarning" description="Smif pod not present " category="EquipmentStatusWarning" enabled="false" eventSet="150101007" eventClear="250101007" />
- <ALID id="50101008" logicalName="LP4.UnloadFailAlarm" description="Unload fail reason " category="EquipmentStatusWarning" enabled="false" eventSet="150101008" eventClear="250101008" />
- <ALID id="50101009" logicalName="LP4.UnloadTimeoutAlarm" description="Unload timeout " category="EquipmentStatusWarning" enabled="false" eventSet="150101009" eventClear="250101009" />
- <ALID id="330201001" logicalName="PM1.AlarmHighLimit.AI_WaterFlowREV." description="water flow REV. High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330201001" eventClear="2330201001" />
- <ALID id="330235001" logicalName="PM1.AlarmHighLimit.AI_APCExternalHeaterTempPV" description="APC external heater Temp.PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330235001" eventClear="2330235001" />
- <ALID id="330235002" logicalName="PM1.AlarmHighLimit.AI_APCRingHeaterTempPV" description="APC ring heater Temp.PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330235002" eventClear="2330235002" />
- <ALID id="330235003" logicalName="PM1.AlarmHighLimit.AI_CapHeaterTempPV" description="Cap heater Temp.PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330235003" eventClear="2330235003" />
- <ALID id="330235004" logicalName="PM1.AlarmHighLimit.AI_ForelineHeater10TempPV" description="Foreline heater-10 Temp.PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330235004" eventClear="2330235004" />
- <ALID id="330235005" logicalName="PM1.AlarmHighLimit.AI_ForelineHeater11TempPV" description="Foreline heater-11 Temp.PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330235005" eventClear="2330235005" />
- <ALID id="330235006" logicalName="PM1.AlarmHighLimit.AI_ForelineHeater12TempPV" description="Foreline heater-12 Temp.PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330235006" eventClear="2330235006" />
- <ALID id="330235007" logicalName="PM1.AlarmHighLimit.AI_ForelineHeater1TempPV" description="Foreline heater-2 Temp.PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330235007" eventClear="2330235007" />
- <ALID id="330235008" logicalName="PM1.AlarmHighLimit.AI_ForelineHeater3TempPV" description="Foreline heater-3 Temp.PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330235008" eventClear="2330235008" />
- <ALID id="330235009" logicalName="PM1.AlarmHighLimit.AI_ForelineHeater4TempPV" description="Foreline heater-4 Temp.PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330235009" eventClear="2330235009" />
- <ALID id="330235010" logicalName="PM1.AlarmHighLimit.AI_ForelineHeater5TempPV" description="Foreline heater-5 Temp.PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330235010" eventClear="2330235010" />
- <ALID id="330235011" logicalName="PM1.AlarmHighLimit.AI_ForelineHeater6TempPV" description="Foreline heater-6 Temp.PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330235011" eventClear="2330235011" />
- <ALID id="330235012" logicalName="PM1.AlarmHighLimit.AI_ForelineHeater7TempPV" description="Foreline heater-7 Temp.PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330235012" eventClear="2330235012" />
- <ALID id="330235013" logicalName="PM1.AlarmHighLimit.AI_ForelineHeater8TempPV" description="Foreline heater-8 Temp.PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330235013" eventClear="2330235013" />
- <ALID id="330235014" logicalName="PM1.AlarmHighLimit.AI_ForelineHeater9TempPV" description="Foreline heater-9 Temp.PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330235014" eventClear="2330235014" />
- <ALID id="330235015" logicalName="PM1.AlarmHighLimit.AI_GaslineHeater10PV" description="Gasline heater10 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330235015" eventClear="2330235015" />
- <ALID id="330235016" logicalName="PM1.AlarmHighLimit.AI_GaslineHeater11PV" description="Gasline heater11 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330235016" eventClear="2330235016" />
- <ALID id="330235017" logicalName="PM1.AlarmHighLimit.AI_GaslineHeater12PV" description="Gasline heater12 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330235017" eventClear="2330235017" />
- <ALID id="330235018" logicalName="PM1.AlarmHighLimit.AI_GaslineHeater13PV" description="Gasline heater13 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330235018" eventClear="2330235018" />
- <ALID id="330235019" logicalName="PM1.AlarmHighLimit.AI_GaslineHeater14PV" description="Gasline heater14 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330235019" eventClear="2330235019" />
- <ALID id="330235020" logicalName="PM1.AlarmHighLimit.AI_GaslineHeater15PV" description="Gasline heater15 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330235020" eventClear="2330235020" />
- <ALID id="330235021" logicalName="PM1.AlarmHighLimit.AI_GaslineHeater16PV" description="Gasline heater16 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330235021" eventClear="2330235021" />
- <ALID id="330235022" logicalName="PM1.AlarmHighLimit.AI_GaslineHeater17PV" description="Gasline heater17 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330235022" eventClear="2330235022" />
- <ALID id="330235023" logicalName="PM1.AlarmHighLimit.AI_GaslineHeater18PV" description="Gasline heater18 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330235023" eventClear="2330235023" />
- <ALID id="330235024" logicalName="PM1.AlarmHighLimit.AI_GaslineHeater19PV" description="Gasline heater19 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330235024" eventClear="2330235024" />
- <ALID id="330235025" logicalName="PM1.AlarmHighLimit.AI_GaslineHeater1PV" description="Foreline heater-1 Temp.PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330235025" eventClear="2330235025" />
- <ALID id="330235026" logicalName="PM1.AlarmHighLimit.AI_GaslineHeater20PV" description="Gasline heater20 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330235026" eventClear="2330235026" />
- <ALID id="330235027" logicalName="PM1.AlarmHighLimit.AI_GaslineHeater21PV" description="Gasline heater21 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330235027" eventClear="2330235027" />
- <ALID id="330235028" logicalName="PM1.AlarmHighLimit.AI_GaslineHeater22PV" description="Gasline heater22 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330235028" eventClear="2330235028" />
- <ALID id="330235029" logicalName="PM1.AlarmHighLimit.AI_GaslineHeater23PV" description="Gasline heater23 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330235029" eventClear="2330235029" />
- <ALID id="330235030" logicalName="PM1.AlarmHighLimit.AI_GaslineHeater24PV" description="Gasline heater24 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330235030" eventClear="2330235030" />
- <ALID id="330235031" logicalName="PM1.AlarmHighLimit.AI_GaslineHeater25PV" description="Gasline heater25 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330235031" eventClear="2330235031" />
- <ALID id="330235032" logicalName="PM1.AlarmHighLimit.AI_GaslineHeater26PV" description="Gasline heater26 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330235032" eventClear="2330235032" />
- <ALID id="330235033" logicalName="PM1.AlarmHighLimit.AI_GaslineHeater27PV" description="Gasline heater27 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330235033" eventClear="2330235033" />
- <ALID id="330235034" logicalName="PM1.AlarmHighLimit.AI_GaslineHeater28PV" description="Gasline heater28 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330235034" eventClear="2330235034" />
- <ALID id="330235035" logicalName="PM1.AlarmHighLimit.AI_GaslineHeater29PV" description="Gasline heater29 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330235035" eventClear="2330235035" />
- <ALID id="330235036" logicalName="PM1.AlarmHighLimit.AI_GaslineHeater2PV" description="Gasline heater2 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330235036" eventClear="2330235036" />
- <ALID id="330235037" logicalName="PM1.AlarmHighLimit.AI_GaslineHeater30PV" description="Gasline heater30 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330235037" eventClear="2330235037" />
- <ALID id="330235038" logicalName="PM1.AlarmHighLimit.AI_GaslineHeater31PV" description="Gasline heater31 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330235038" eventClear="2330235038" />
- <ALID id="330235039" logicalName="PM1.AlarmHighLimit.AI_GaslineHeater32PV" description="Gasline heater32 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330235039" eventClear="2330235039" />
- <ALID id="330235040" logicalName="PM1.AlarmHighLimit.AI_GaslineHeater33PV" description="Gasline heater33 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330235040" eventClear="2330235040" />
- <ALID id="330235041" logicalName="PM1.AlarmHighLimit.AI_GaslineHeater34PV" description="Gasline heater34 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330235041" eventClear="2330235041" />
- <ALID id="330235042" logicalName="PM1.AlarmHighLimit.AI_GaslineHeater35PV" description="Gasline heater35 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330235042" eventClear="2330235042" />
- <ALID id="330235043" logicalName="PM1.AlarmHighLimit.AI_GaslineHeater36PV" description="Gasline heater36 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330235043" eventClear="2330235043" />
- <ALID id="330235044" logicalName="PM1.AlarmHighLimit.AI_GaslineHeater37PV" description="Gasline heater37 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330235044" eventClear="2330235044" />
- <ALID id="330235045" logicalName="PM1.AlarmHighLimit.AI_GaslineHeater38PV" description="Gasline heater38 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330235045" eventClear="2330235045" />
- <ALID id="330235046" logicalName="PM1.AlarmHighLimit.AI_GaslineHeater39PV" description="Gasline heater39 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330235046" eventClear="2330235046" />
- <ALID id="330235047" logicalName="PM1.AlarmHighLimit.AI_GaslineHeater3PV" description="Gasline heater3 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330235047" eventClear="2330235047" />
- <ALID id="330235048" logicalName="PM1.AlarmHighLimit.AI_GaslineHeater40PV" description="Gasline heater40 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330235048" eventClear="2330235048" />
- <ALID id="330235049" logicalName="PM1.AlarmHighLimit.AI_GaslineHeater41PV" description="Gasline heater41 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330235049" eventClear="2330235049" />
- <ALID id="330235050" logicalName="PM1.AlarmHighLimit.AI_GaslineHeater42PV" description="Gasline heater42 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330235050" eventClear="2330235050" />
- <ALID id="330235051" logicalName="PM1.AlarmHighLimit.AI_GaslineHeater43PV" description="Gasline heater43 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330235051" eventClear="2330235051" />
- <ALID id="330235052" logicalName="PM1.AlarmHighLimit.AI_GaslineHeater44PV" description="Gasline heater44 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330235052" eventClear="2330235052" />
- <ALID id="330235053" logicalName="PM1.AlarmHighLimit.AI_GaslineHeater45PV" description="Gasline heater45 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330235053" eventClear="2330235053" />
- <ALID id="330235054" logicalName="PM1.AlarmHighLimit.AI_GaslineHeater46PV" description="Gasline heater46 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330235054" eventClear="2330235054" />
- <ALID id="330235055" logicalName="PM1.AlarmHighLimit.AI_GaslineHeater47PV" description="Gasline heater47 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330235055" eventClear="2330235055" />
- <ALID id="330235056" logicalName="PM1.AlarmHighLimit.AI_GaslineHeater48PV" description="Gasline heater48 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330235056" eventClear="2330235056" />
- <ALID id="330235057" logicalName="PM1.AlarmHighLimit.AI_GaslineHeater49PV" description="Gasline heater49 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330235057" eventClear="2330235057" />
- <ALID id="330235058" logicalName="PM1.AlarmHighLimit.AI_GaslineHeater4PV" description="Gasline heater4 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330235058" eventClear="2330235058" />
- <ALID id="330235059" logicalName="PM1.AlarmHighLimit.AI_GaslineHeater50PV" description="Gasline heater50 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330235059" eventClear="2330235059" />
- <ALID id="330235060" logicalName="PM1.AlarmHighLimit.AI_GaslineHeater51PV" description="Gasline heater51 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330235060" eventClear="2330235060" />
- <ALID id="330235061" logicalName="PM1.AlarmHighLimit.AI_GaslineHeater52PV" description="Gasline heater52 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330235061" eventClear="2330235061" />
- <ALID id="330235062" logicalName="PM1.AlarmHighLimit.AI_GaslineHeater5PV" description="Gasline heater5 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330235062" eventClear="2330235062" />
- <ALID id="330235063" logicalName="PM1.AlarmHighLimit.AI_GaslineHeater6PV" description="Gasline heater6 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330235063" eventClear="2330235063" />
- <ALID id="330235064" logicalName="PM1.AlarmHighLimit.AI_GaslineHeater7PV" description="Gasline heater7 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330235064" eventClear="2330235064" />
- <ALID id="330235065" logicalName="PM1.AlarmHighLimit.AI_GaslineHeater8PV" description="Gasline heater8 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330235065" eventClear="2330235065" />
- <ALID id="330235066" logicalName="PM1.AlarmHighLimit.AI_GaslineHeater9PV" description="Gasline heater9 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330235066" eventClear="2330235066" />
- <ALID id="330235067" logicalName="PM1.AlarmHighLimit.AI_ForelineHeater2TempPV" description="Foreline heater-2 Temp.PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330235067" eventClear="2330235067" />
- <ALID id="330235068" logicalName="PM1.AlarmHighLimit.AI_CoolingWaterFlowOfBoatRotation(FL904)" description="cooling water flow of boat rotation (FL904) High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330235068" eventClear="2330235068" />
- <ALID id="330235069" logicalName="PM1.AlarmHighLimit.AI_CoolingWaterFlowOfFlange(FL905)" description="cooling water flow of flange (FL905) High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330235069" eventClear="2330235069" />
- <ALID id="330235070" logicalName="PM1.AlarmHighLimit.AI_CoolingWaterFlowOfFurnace(FL902)" description="cooling water flow of furnace (FL902) High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330235070" eventClear="2330235070" />
- <ALID id="330235071" logicalName="PM1.AlarmHighLimit.AI_CoolingWaterFlowOfLoadingArea(FL906)" description="cooling water flow of loading area (FL906) High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330235071" eventClear="2330235071" />
- <ALID id="330235072" logicalName="PM1.AlarmHighLimit.AI_CoolingWaterFlowOfShutter(FL903)" description="cooling water flow of shutter (FL903) High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330235072" eventClear="2330235072" />
- <ALID id="330235073" logicalName="PM1.AlarmHighLimit.AI_FrontBodyExhaustMS6" description="Front Body Exhaust MS6 High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330235073" eventClear="2330235073" />
- <ALID id="330235074" logicalName="PM1.AlarmHighLimit.AI_GasBoxExhaustMS2" description="Gas Box Exhaust MS2 High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330235074" eventClear="2330235074" />
- <ALID id="330235075" logicalName="PM1.AlarmHighLimit.AI_GasBoxUpperVG21Pressure" description="Gas box upper VG21 pressure High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330235075" eventClear="2330235075" />
- <ALID id="330235076" logicalName="PM1.AlarmHighLimit.AI_GasBoxUpperVG22Pressure" description="Gas box upper VG22 pressure High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330235076" eventClear="2330235076" />
- <ALID id="330235077" logicalName="PM1.AlarmHighLimit.AI_GLBoxPG1Pressure" description="GL box PG1 pressure High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330235077" eventClear="2330235077" />
- <ALID id="330235078" logicalName="PM1.AlarmHighLimit.AI_GLBoxPG2Pressure" description="GL box PG2 pressure High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330235078" eventClear="2330235078" />
- <ALID id="330235079" logicalName="PM1.AlarmHighLimit.AI_GLBoxPG3Pressure" description="GL box PG3 pressure High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330235079" eventClear="2330235079" />
- <ALID id="330235080" logicalName="PM1.AlarmHighLimit.AI_GLBoxPG4Pressure" description="GL box PG4 pressure High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330235080" eventClear="2330235080" />
- <ALID id="330235081" logicalName="PM1.AlarmHighLimit.AI_GLBoxPG5Pressure" description="GL box PG5 pressure High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330235081" eventClear="2330235081" />
- <ALID id="330235082" logicalName="PM1.AlarmHighLimit.AI_GLBoxPG6Pressure" description="GL box PG6 pressure High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330235082" eventClear="2330235082" />
- <ALID id="330235083" logicalName="PM1.AlarmHighLimit.AI_HeatingExhaustMS1" description="Heating Exhaust MS1 High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330235083" eventClear="2330235083" />
- <ALID id="330235084" logicalName="PM1.AlarmHighLimit.AI_LAExhaustMS7" description="L/A Exhaust MS7 High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330235084" eventClear="2330235084" />
- <ALID id="330235085" logicalName="PM1.AlarmHighLimit.AI_LoadingAreaExhaustMS5" description="Loading Area Exhaust MS5 High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330235085" eventClear="2330235085" />
- <ALID id="330235086" logicalName="PM1.AlarmHighLimit.AI_N2-4(PG14)purgePressure" description="N2-4(PG14) purge pressure High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330235086" eventClear="2330235086" />
- <ALID id="330235087" logicalName="PM1.AlarmHighLimit.AI_N2-5(PG15)purgePressure" description="N2-5(PG15) purge pressure High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330235087" eventClear="2330235087" />
- <ALID id="330235088" logicalName="PM1.AlarmHighLimit.AI_N2-6(PG16)purgePressure" description="N2-6(PG16) purge pressure High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330235088" eventClear="2330235088" />
- <ALID id="330235089" logicalName="PM1.AlarmHighLimit.AI_N2-7(PG17)PurgePressure" description="N2-7(PG17) purge pressure High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330235089" eventClear="2330235089" />
- <ALID id="330235090" logicalName="PM1.AlarmHighLimit.AI_PG12AnalogValue" description="PG12 analog value High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330235090" eventClear="2330235090" />
- <ALID id="330235091" logicalName="PM1.AlarmHighLimit.AI_PG13AnalogValue" description="PG13 analog value High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330235091" eventClear="2330235091" />
- <ALID id="330235092" logicalName="PM1.AlarmHighLimit.AI_PS11Value" description="PS11 Value High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330235092" eventClear="2330235092" />
- <ALID id="330235093" logicalName="PM1.AlarmHighLimit.AI_PS13AnalogValue" description="PS13 analog value High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330235093" eventClear="2330235093" />
- <ALID id="330235094" logicalName="PM1.AlarmHighLimit.AI_PS17Value" description="PS17 value High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330235094" eventClear="2330235094" />
- <ALID id="330235095" logicalName="PM1.AlarmHighLimit.AI_RHCExhaustMS8" description="RHC Exhaust MS8 High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330235095" eventClear="2330235095" />
- <ALID id="330235096" logicalName="PM1.AlarmHighLimit.AI_RHCFlow(FL901)" description="RHC flow (FL901) High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330235096" eventClear="2330235096" />
- <ALID id="330235097" logicalName="PM1.AlarmHighLimit.AI_ScavengerExhaustMS3" description="Scavenger Exhaust MS3 High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330235097" eventClear="2330235097" />
- <ALID id="330235098" logicalName="PM1.AlarmHighLimit.AI_ValveBoxExhaustMS4" description="Valve Box Exhaust MS4 High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330235098" eventClear="2330235098" />
- <ALID id="330235099" logicalName="PM1.AlarmHighLimit.AI_VG12AnalogValue" description="VG12 analog value High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330235099" eventClear="2330235099" />
- <ALID id="330235100" logicalName="PM1.AlarmHighLimit.AI_VG14AnalogValue" description="VG14 analog value High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330235100" eventClear="2330235100" />
- <ALID id="330235101" logicalName="PM1.AlarmHighLimit.AI_GaslineHeater53PV" description="Gasline heater53 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330235101" eventClear="2330235101" />
- <ALID id="330235102" logicalName="PM1.AlarmHighLimit.AI_GaslineHeater55PV" description="Gasline heater55 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330235102" eventClear="2330235102" />
- <ALID id="330235103" logicalName="PM1.AlarmHighLimit.AI_GaslineHeater56PV" description="Gasline heater56 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330235103" eventClear="2330235103" />
- <ALID id="330235104" logicalName="PM1.AlarmHighLimit.AI_GaslineHeater57PV" description="Gasline heater57 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330235104" eventClear="2330235104" />
- <ALID id="330235105" logicalName="PM1.AlarmHighLimit.AI_GaslineHeater58PV" description="Gasline heater58 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330235105" eventClear="2330235105" />
- <ALID id="330235106" logicalName="PM1.AlarmHighLimit.AI_GaslineHeater59PV" description="Gasline heater59 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330235106" eventClear="2330235106" />
- <ALID id="330235107" logicalName="PM1.AlarmHighLimit.AI_GaslineHeater60PV" description="Gasline heater60 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330235107" eventClear="2330235107" />
- <ALID id="330235108" logicalName="PM1.AlarmHighLimit.AI_GaslineHeater61PV" description="Gasline heater61 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330235108" eventClear="2330235108" />
- <ALID id="330235109" logicalName="PM1.AlarmHighLimit.AI_GaslineHeater62PV" description="Gasline heater62 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330235109" eventClear="2330235109" />
- <ALID id="330235110" logicalName="PM1.AlarmHighLimit.AI_GaslineHeater54PV" description="Gasline heater54 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330235110" eventClear="2330235110" />
- <ALID id="330235111" logicalName="PM1.AlarmHighLimit.AI_GaslineHeater63PV" description="Gasline heater63 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330235111" eventClear="2330235111" />
- <ALID id="330235112" logicalName="PM1.AlarmHighLimit.AI_GaslineHeater64PV" description="Gasline heater64 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330235112" eventClear="2330235112" />
- <ALID id="330235113" logicalName="PM1.AlarmHighLimit.AI_Unit1CH10PV" description="Unit1-CH10 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330235113" eventClear="2330235113" />
- <ALID id="330235114" logicalName="PM1.AlarmHighLimit.AI_Unit1CH11PV" description="Unit1-CH11 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330235114" eventClear="2330235114" />
- <ALID id="330235115" logicalName="PM1.AlarmHighLimit.AI_Unit1CH12PV" description="Unit1-CH12 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330235115" eventClear="2330235115" />
- <ALID id="330235116" logicalName="PM1.AlarmHighLimit.AI_Unit1CH13PV" description="Unit1-CH13 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330235116" eventClear="2330235116" />
- <ALID id="330235117" logicalName="PM1.AlarmHighLimit.AI_Unit1CH14PV" description="Unit1-CH14 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330235117" eventClear="2330235117" />
- <ALID id="330235118" logicalName="PM1.AlarmHighLimit.AI_Unit1CH15PV" description="Unit1-CH15 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330235118" eventClear="2330235118" />
- <ALID id="330235119" logicalName="PM1.AlarmHighLimit.AI_Unit1CH16PV" description="Unit1-CH16 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330235119" eventClear="2330235119" />
- <ALID id="330235120" logicalName="PM1.AlarmHighLimit.AI_Unit1CH1PV" description="Unit1-CH1 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330235120" eventClear="2330235120" />
- <ALID id="330235121" logicalName="PM1.AlarmHighLimit.AI_Unit1CH2PV" description="Unit1-CH2 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330235121" eventClear="2330235121" />
- <ALID id="330235122" logicalName="PM1.AlarmHighLimit.AI_Unit1CH3PV" description="Unit1-CH3 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330235122" eventClear="2330235122" />
- <ALID id="330235123" logicalName="PM1.AlarmHighLimit.AI_Unit1CH4PV" description="Unit1-CH4 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330235123" eventClear="2330235123" />
- <ALID id="330235124" logicalName="PM1.AlarmHighLimit.AI_Unit1CH5PV" description="Unit1-CH5 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330235124" eventClear="2330235124" />
- <ALID id="330235125" logicalName="PM1.AlarmHighLimit.AI_Unit1CH6PV" description="Unit1-CH6 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330235125" eventClear="2330235125" />
- <ALID id="330235126" logicalName="PM1.AlarmHighLimit.AI_Unit1CH7PV" description="Unit1-CH7 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330235126" eventClear="2330235126" />
- <ALID id="330235127" logicalName="PM1.AlarmHighLimit.AI_Unit1CH8PV" description="Unit1-CH8 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330235127" eventClear="2330235127" />
- <ALID id="330235128" logicalName="PM1.AlarmHighLimit.AI_Unit1CH9PV" description="Unit1-CH9 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330235128" eventClear="2330235128" />
- <ALID id="330235129" logicalName="PM1.AlarmHighLimit.AI_Unit2CH10PV" description="Unit2-CH10 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330235129" eventClear="2330235129" />
- <ALID id="330235130" logicalName="PM1.AlarmHighLimit.AI_Unit2CH11PV" description="Unit2-CH11 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330235130" eventClear="2330235130" />
- <ALID id="330235131" logicalName="PM1.AlarmHighLimit.AI_Unit2CH12PV" description="Unit2-CH12 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330235131" eventClear="2330235131" />
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- <ALID id="330235137" logicalName="PM1.AlarmHighLimit.AI_Unit2CH2PV" description="Unit2-CH2 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330235137" eventClear="2330235137" />
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- <ALID id="330235152" logicalName="PM1.AlarmHighLimit.AI_Unit3CH1PV" description="Unit3-CH1 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330235152" eventClear="2330235152" />
- <ALID id="330235153" logicalName="PM1.AlarmHighLimit.AI_Unit3CH2PV" description="Unit3-CH2 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330235153" eventClear="2330235153" />
- <ALID id="330235154" logicalName="PM1.AlarmHighLimit.AI_Unit3CH3PV" description="Unit3-CH3 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330235154" eventClear="2330235154" />
- <ALID id="330235155" logicalName="PM1.AlarmHighLimit.AI_Unit3CH4PV" description="Unit3-CH4 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330235155" eventClear="2330235155" />
- <ALID id="330235156" logicalName="PM1.AlarmHighLimit.AI_Unit3CH5PV" description="Unit3-CH5 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330235156" eventClear="2330235156" />
- <ALID id="330235157" logicalName="PM1.AlarmHighLimit.AI_Unit3CH6PV" description="Unit3-CH6 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330235157" eventClear="2330235157" />
- <ALID id="330235158" logicalName="PM1.AlarmHighLimit.AI_Unit3CH7PV" description="Unit3-CH7 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330235158" eventClear="2330235158" />
- <ALID id="330235159" logicalName="PM1.AlarmHighLimit.AI_Unit3CH8PV" description="Unit3-CH8 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330235159" eventClear="2330235159" />
- <ALID id="330235160" logicalName="PM1.AlarmHighLimit.AI_Unit3CH9PV" description="Unit3-CH9 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330235160" eventClear="2330235160" />
- <ALID id="330235161" logicalName="PM1.AlarmHighLimit.AI_Unit4CH10PV" description="Unit4-CH10 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330235161" eventClear="2330235161" />
- <ALID id="330235162" logicalName="PM1.AlarmHighLimit.AI_Unit4CH11PV" description="Unit4-CH11 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330235162" eventClear="2330235162" />
- <ALID id="330235163" logicalName="PM1.AlarmHighLimit.AI_Unit4CH12PV" description="Unit4-CH12 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330235163" eventClear="2330235163" />
- <ALID id="330235164" logicalName="PM1.AlarmHighLimit.AI_Unit4CH13PV" description="Unit4-CH13 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330235164" eventClear="2330235164" />
- <ALID id="330235165" logicalName="PM1.AlarmHighLimit.AI_Unit4CH14PV" description="Unit4-CH14 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330235165" eventClear="2330235165" />
- <ALID id="330235166" logicalName="PM1.AlarmHighLimit.AI_Unit4CH15PV" description="Unit4-CH15 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330235166" eventClear="2330235166" />
- <ALID id="330235167" logicalName="PM1.AlarmHighLimit.AI_Unit4CH16PV" description="Unit4-CH16 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330235167" eventClear="2330235167" />
- <ALID id="330235168" logicalName="PM1.AlarmHighLimit.AI_Unit4CH1PV" description="Unit4-CH1 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330235168" eventClear="2330235168" />
- <ALID id="330235169" logicalName="PM1.AlarmHighLimit.AI_Unit4CH2PV" description="Unit4-CH2 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330235169" eventClear="2330235169" />
- <ALID id="330235170" logicalName="PM1.AlarmHighLimit.AI_Unit4CH3PV" description="Unit4-CH3 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330235170" eventClear="2330235170" />
- <ALID id="330235171" logicalName="PM1.AlarmHighLimit.AI_Unit4CH4PV" description="Unit4-CH4 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330235171" eventClear="2330235171" />
- <ALID id="330235172" logicalName="PM1.AlarmHighLimit.AI_Unit4CH5PV" description="Unit4-CH5 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330235172" eventClear="2330235172" />
- <ALID id="330235173" logicalName="PM1.AlarmHighLimit.AI_Unit4CH6PV" description="Unit4-CH6 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330235173" eventClear="2330235173" />
- <ALID id="330235174" logicalName="PM1.AlarmHighLimit.AI_Unit4CH7PV" description="Unit4-CH7 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330235174" eventClear="2330235174" />
- <ALID id="330235175" logicalName="PM1.AlarmHighLimit.AI_Unit4CH8PV" description="Unit4-CH8 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330235175" eventClear="2330235175" />
- <ALID id="330235176" logicalName="PM1.AlarmHighLimit.AI_Unit4CH9PV" description="Unit4-CH9 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330235176" eventClear="2330235176" />
- <ALID id="330236001" logicalName="PM1.AlarmLowLimit.AI_APCExternalHeaterTempPV" description="APC external heater Temp.PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330236001" eventClear="2330236001" />
- <ALID id="330236002" logicalName="PM1.AlarmLowLimit.AI_APCRingHeaterTempPV" description="APC ring heater Temp.PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330236002" eventClear="2330236002" />
- <ALID id="330236003" logicalName="PM1.AlarmLowLimit.AI_CapHeaterTempPV" description="Cap heater Temp.PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330236003" eventClear="2330236003" />
- <ALID id="330236004" logicalName="PM1.AlarmLowLimit.AI_ForelineHeater10TempPV" description="Foreline heater-10 Temp.PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330236004" eventClear="2330236004" />
- <ALID id="330236005" logicalName="PM1.AlarmLowLimit.AI_ForelineHeater11TempPV" description="Foreline heater-11 Temp.PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330236005" eventClear="2330236005" />
- <ALID id="330236006" logicalName="PM1.AlarmLowLimit.AI_ForelineHeater12TempPV" description="Foreline heater-12 Temp.PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330236006" eventClear="2330236006" />
- <ALID id="330236007" logicalName="PM1.AlarmLowLimit.AI_ForelineHeater1TempPV" description="Foreline heater-2 Temp.PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330236007" eventClear="2330236007" />
- <ALID id="330236008" logicalName="PM1.AlarmLowLimit.AI_ForelineHeater3TempPV" description="Foreline heater-3 Temp.PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330236008" eventClear="2330236008" />
- <ALID id="330236009" logicalName="PM1.AlarmLowLimit.AI_ForelineHeater4TempPV" description="Foreline heater-4 Temp.PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330236009" eventClear="2330236009" />
- <ALID id="330236010" logicalName="PM1.AlarmLowLimit.AI_ForelineHeater5TempPV" description="Foreline heater-5 Temp.PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330236010" eventClear="2330236010" />
- <ALID id="330236011" logicalName="PM1.AlarmLowLimit.AI_ForelineHeater6TempPV" description="Foreline heater-6 Temp.PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330236011" eventClear="2330236011" />
- <ALID id="330236012" logicalName="PM1.AlarmLowLimit.AI_ForelineHeater7TempPV" description="Foreline heater-7 Temp.PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330236012" eventClear="2330236012" />
- <ALID id="330236013" logicalName="PM1.AlarmLowLimit.AI_ForelineHeater8TempPV" description="Foreline heater-8 Temp.PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330236013" eventClear="2330236013" />
- <ALID id="330236014" logicalName="PM1.AlarmLowLimit.AI_ForelineHeater9TempPV" description="Foreline heater-9 Temp.PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330236014" eventClear="2330236014" />
- <ALID id="330236015" logicalName="PM1.AlarmLowLimit.AI_GaslineHeater10PV" description="Gasline heater10 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330236015" eventClear="2330236015" />
- <ALID id="330236016" logicalName="PM1.AlarmLowLimit.AI_GaslineHeater11PV" description="Gasline heater11 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330236016" eventClear="2330236016" />
- <ALID id="330236017" logicalName="PM1.AlarmLowLimit.AI_GaslineHeater12PV" description="Gasline heater12 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330236017" eventClear="2330236017" />
- <ALID id="330236018" logicalName="PM1.AlarmLowLimit.AI_GaslineHeater13PV" description="Gasline heater13 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330236018" eventClear="2330236018" />
- <ALID id="330236019" logicalName="PM1.AlarmLowLimit.AI_GaslineHeater14PV" description="Gasline heater14 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330236019" eventClear="2330236019" />
- <ALID id="330236020" logicalName="PM1.AlarmLowLimit.AI_GaslineHeater15PV" description="Gasline heater15 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330236020" eventClear="2330236020" />
- <ALID id="330236021" logicalName="PM1.AlarmLowLimit.AI_GaslineHeater16PV" description="Gasline heater16 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330236021" eventClear="2330236021" />
- <ALID id="330236022" logicalName="PM1.AlarmLowLimit.AI_GaslineHeater17PV" description="Gasline heater17 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330236022" eventClear="2330236022" />
- <ALID id="330236023" logicalName="PM1.AlarmLowLimit.AI_GaslineHeater18PV" description="Gasline heater18 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330236023" eventClear="2330236023" />
- <ALID id="330236024" logicalName="PM1.AlarmLowLimit.AI_GaslineHeater19PV" description="Gasline heater19 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330236024" eventClear="2330236024" />
- <ALID id="330236025" logicalName="PM1.AlarmLowLimit.AI_GaslineHeater1PV" description="Foreline heater-1 Temp.PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330236025" eventClear="2330236025" />
- <ALID id="330236026" logicalName="PM1.AlarmLowLimit.AI_GaslineHeater20PV" description="Gasline heater20 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330236026" eventClear="2330236026" />
- <ALID id="330236027" logicalName="PM1.AlarmLowLimit.AI_GaslineHeater21PV" description="Gasline heater21 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330236027" eventClear="2330236027" />
- <ALID id="330236028" logicalName="PM1.AlarmLowLimit.AI_GaslineHeater22PV" description="Gasline heater22 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330236028" eventClear="2330236028" />
- <ALID id="330236029" logicalName="PM1.AlarmLowLimit.AI_GaslineHeater23PV" description="Gasline heater23 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330236029" eventClear="2330236029" />
- <ALID id="330236030" logicalName="PM1.AlarmLowLimit.AI_GaslineHeater24PV" description="Gasline heater24 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330236030" eventClear="2330236030" />
- <ALID id="330236031" logicalName="PM1.AlarmLowLimit.AI_GaslineHeater25PV" description="Gasline heater25 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330236031" eventClear="2330236031" />
- <ALID id="330236032" logicalName="PM1.AlarmLowLimit.AI_GaslineHeater26PV" description="Gasline heater26 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330236032" eventClear="2330236032" />
- <ALID id="330236033" logicalName="PM1.AlarmLowLimit.AI_GaslineHeater27PV" description="Gasline heater27 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330236033" eventClear="2330236033" />
- <ALID id="330236034" logicalName="PM1.AlarmLowLimit.AI_GaslineHeater28PV" description="Gasline heater28 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330236034" eventClear="2330236034" />
- <ALID id="330236035" logicalName="PM1.AlarmLowLimit.AI_GaslineHeater29PV" description="Gasline heater29 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330236035" eventClear="2330236035" />
- <ALID id="330236036" logicalName="PM1.AlarmLowLimit.AI_GaslineHeater2PV" description="Gasline heater2 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330236036" eventClear="2330236036" />
- <ALID id="330236037" logicalName="PM1.AlarmLowLimit.AI_GaslineHeater30PV" description="Gasline heater30 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330236037" eventClear="2330236037" />
- <ALID id="330236038" logicalName="PM1.AlarmLowLimit.AI_GaslineHeater31PV" description="Gasline heater31 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330236038" eventClear="2330236038" />
- <ALID id="330236039" logicalName="PM1.AlarmLowLimit.AI_GaslineHeater32PV" description="Gasline heater32 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330236039" eventClear="2330236039" />
- <ALID id="330236040" logicalName="PM1.AlarmLowLimit.AI_GaslineHeater33PV" description="Gasline heater33 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330236040" eventClear="2330236040" />
- <ALID id="330236041" logicalName="PM1.AlarmLowLimit.AI_GaslineHeater34PV" description="Gasline heater34 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330236041" eventClear="2330236041" />
- <ALID id="330236042" logicalName="PM1.AlarmLowLimit.AI_GaslineHeater35PV" description="Gasline heater35 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330236042" eventClear="2330236042" />
- <ALID id="330236043" logicalName="PM1.AlarmLowLimit.AI_GaslineHeater36PV" description="Gasline heater36 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330236043" eventClear="2330236043" />
- <ALID id="330236044" logicalName="PM1.AlarmLowLimit.AI_GaslineHeater37PV" description="Gasline heater37 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330236044" eventClear="2330236044" />
- <ALID id="330236045" logicalName="PM1.AlarmLowLimit.AI_GaslineHeater38PV" description="Gasline heater38 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330236045" eventClear="2330236045" />
- <ALID id="330236046" logicalName="PM1.AlarmLowLimit.AI_GaslineHeater39PV" description="Gasline heater39 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330236046" eventClear="2330236046" />
- <ALID id="330236047" logicalName="PM1.AlarmLowLimit.AI_GaslineHeater3PV" description="Gasline heater3 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330236047" eventClear="2330236047" />
- <ALID id="330236048" logicalName="PM1.AlarmLowLimit.AI_GaslineHeater40PV" description="Gasline heater40 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330236048" eventClear="2330236048" />
- <ALID id="330236049" logicalName="PM1.AlarmLowLimit.AI_GaslineHeater41PV" description="Gasline heater41 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330236049" eventClear="2330236049" />
- <ALID id="330236050" logicalName="PM1.AlarmLowLimit.AI_GaslineHeater42PV" description="Gasline heater42 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330236050" eventClear="2330236050" />
- <ALID id="330236051" logicalName="PM1.AlarmLowLimit.AI_GaslineHeater43PV" description="Gasline heater43 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330236051" eventClear="2330236051" />
- <ALID id="330236052" logicalName="PM1.AlarmLowLimit.AI_GaslineHeater44PV" description="Gasline heater44 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330236052" eventClear="2330236052" />
- <ALID id="330236053" logicalName="PM1.AlarmLowLimit.AI_GaslineHeater45PV" description="Gasline heater45 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330236053" eventClear="2330236053" />
- <ALID id="330236054" logicalName="PM1.AlarmLowLimit.AI_GaslineHeater46PV" description="Gasline heater46 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330236054" eventClear="2330236054" />
- <ALID id="330236055" logicalName="PM1.AlarmLowLimit.AI_GaslineHeater47PV" description="Gasline heater47 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330236055" eventClear="2330236055" />
- <ALID id="330236056" logicalName="PM1.AlarmLowLimit.AI_GaslineHeater48PV" description="Gasline heater48 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330236056" eventClear="2330236056" />
- <ALID id="330236057" logicalName="PM1.AlarmLowLimit.AI_GaslineHeater49PV" description="Gasline heater49 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330236057" eventClear="2330236057" />
- <ALID id="330236058" logicalName="PM1.AlarmLowLimit.AI_GaslineHeater4PV" description="Gasline heater4 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330236058" eventClear="2330236058" />
- <ALID id="330236059" logicalName="PM1.AlarmLowLimit.AI_GaslineHeater50PV" description="Gasline heater50 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330236059" eventClear="2330236059" />
- <ALID id="330236060" logicalName="PM1.AlarmLowLimit.AI_GaslineHeater51PV" description="Gasline heater51 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330236060" eventClear="2330236060" />
- <ALID id="330236061" logicalName="PM1.AlarmLowLimit.AI_GaslineHeater52PV" description="Gasline heater52 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330236061" eventClear="2330236061" />
- <ALID id="330236062" logicalName="PM1.AlarmLowLimit.AI_GaslineHeater5PV" description="Gasline heater5 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330236062" eventClear="2330236062" />
- <ALID id="330236063" logicalName="PM1.AlarmLowLimit.AI_GaslineHeater6PV" description="Gasline heater6 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330236063" eventClear="2330236063" />
- <ALID id="330236064" logicalName="PM1.AlarmLowLimit.AI_GaslineHeater7PV" description="Gasline heater7 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330236064" eventClear="2330236064" />
- <ALID id="330236065" logicalName="PM1.AlarmLowLimit.AI_GaslineHeater8PV" description="Gasline heater8 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330236065" eventClear="2330236065" />
- <ALID id="330236066" logicalName="PM1.AlarmLowLimit.AI_GaslineHeater9PV" description="Gasline heater9 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330236066" eventClear="2330236066" />
- <ALID id="330236067" logicalName="PM1.AlarmLowLimit.AI_ForelineHeater2TempPV" description="Foreline heater-2 Temp.PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330236067" eventClear="2330236067" />
- <ALID id="330236068" logicalName="PM1.AlarmLowLimit.AI_CoolingWaterFlowOfBoatRotation(FL904)" description="cooling water flow of boat rotation (FL904) Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330236068" eventClear="2330236068" />
- <ALID id="330236069" logicalName="PM1.AlarmLowLimit.AI_CoolingWaterFlowOfFlange(FL905)" description="cooling water flow of flange (FL905) Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330236069" eventClear="2330236069" />
- <ALID id="330236070" logicalName="PM1.AlarmLowLimit.AI_CoolingWaterFlowOfFurnace(FL902)" description="cooling water flow of furnace (FL902) Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330236070" eventClear="2330236070" />
- <ALID id="330236071" logicalName="PM1.AlarmLowLimit.AI_CoolingWaterFlowOfLoadingArea(FL906)" description="cooling water flow of loading area (FL906) Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330236071" eventClear="2330236071" />
- <ALID id="330236072" logicalName="PM1.AlarmLowLimit.AI_CoolingWaterFlowOfShutter(FL903)" description="cooling water flow of shutter (FL903) Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330236072" eventClear="2330236072" />
- <ALID id="330236073" logicalName="PM1.AlarmLowLimit.AI_FrontBodyExhaustMS6" description="Front Body Exhaust MS6 Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330236073" eventClear="2330236073" />
- <ALID id="330236074" logicalName="PM1.AlarmLowLimit.AI_GasBoxExhaustMS2" description="Gas Box Exhaust MS2 Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330236074" eventClear="2330236074" />
- <ALID id="330236075" logicalName="PM1.AlarmLowLimit.AI_GasBoxUpperVG21Pressure" description="Gas box upper VG21 pressure Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330236075" eventClear="2330236075" />
- <ALID id="330236076" logicalName="PM1.AlarmLowLimit.AI_GasBoxUpperVG22Pressure" description="Gas box upper VG22 pressure Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330236076" eventClear="2330236076" />
- <ALID id="330236077" logicalName="PM1.AlarmLowLimit.AI_GLBoxPG1Pressure" description="GL box PG1 pressure Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330236077" eventClear="2330236077" />
- <ALID id="330236078" logicalName="PM1.AlarmLowLimit.AI_GLBoxPG2Pressure" description="GL box PG2 pressure Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330236078" eventClear="2330236078" />
- <ALID id="330236079" logicalName="PM1.AlarmLowLimit.AI_GLBoxPG3Pressure" description="GL box PG3 pressure Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330236079" eventClear="2330236079" />
- <ALID id="330236080" logicalName="PM1.AlarmLowLimit.AI_GLBoxPG4Pressure" description="GL box PG4 pressure Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330236080" eventClear="2330236080" />
- <ALID id="330236081" logicalName="PM1.AlarmLowLimit.AI_GLBoxPG5Pressure" description="GL box PG5 pressure Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330236081" eventClear="2330236081" />
- <ALID id="330236082" logicalName="PM1.AlarmLowLimit.AI_GLBoxPG6Pressure" description="GL box PG6 pressure Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330236082" eventClear="2330236082" />
- <ALID id="330236083" logicalName="PM1.AlarmLowLimit.AI_HeatingExhaustMS1" description="Heating Exhaust MS1 Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330236083" eventClear="2330236083" />
- <ALID id="330236084" logicalName="PM1.AlarmLowLimit.AI_LAExhaustMS7" description="L/A Exhaust MS7 Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330236084" eventClear="2330236084" />
- <ALID id="330236085" logicalName="PM1.AlarmLowLimit.AI_LoadingAreaExhaustMS5" description="Loading Area Exhaust MS5 Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330236085" eventClear="2330236085" />
- <ALID id="330236086" logicalName="PM1.AlarmLowLimit.AI_N2-4(PG14)purgePressure" description="N2-4(PG14) purge pressure Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330236086" eventClear="2330236086" />
- <ALID id="330236087" logicalName="PM1.AlarmLowLimit.AI_N2-5(PG15)purgePressure" description="N2-5(PG15) purge pressure Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330236087" eventClear="2330236087" />
- <ALID id="330236088" logicalName="PM1.AlarmLowLimit.AI_N2-6(PG16)purgePressure" description="N2-6(PG16) purge pressure Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330236088" eventClear="2330236088" />
- <ALID id="330236089" logicalName="PM1.AlarmLowLimit.AI_N2-7(PG17)PurgePressure" description="N2-7(PG17) purge pressure Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330236089" eventClear="2330236089" />
- <ALID id="330236090" logicalName="PM1.AlarmLowLimit.AI_PG12AnalogValue" description="PG12 analog value Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330236090" eventClear="2330236090" />
- <ALID id="330236091" logicalName="PM1.AlarmLowLimit.AI_PG13AnalogValue" description="PG13 analog value Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330236091" eventClear="2330236091" />
- <ALID id="330236092" logicalName="PM1.AlarmLowLimit.AI_PS11Value" description="PS11 Value Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330236092" eventClear="2330236092" />
- <ALID id="330236093" logicalName="PM1.AlarmLowLimit.AI_PS13AnalogValue" description="PS13 analog value Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330236093" eventClear="2330236093" />
- <ALID id="330236094" logicalName="PM1.AlarmLowLimit.AI_PS17Value" description="PS17 value Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330236094" eventClear="2330236094" />
- <ALID id="330236095" logicalName="PM1.AlarmLowLimit.AI_RHCExhaustMS8" description="RHC Exhaust MS8 Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330236095" eventClear="2330236095" />
- <ALID id="330236096" logicalName="PM1.AlarmLowLimit.AI_RHCFlow(FL901)" description="RHC flow (FL901) Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330236096" eventClear="2330236096" />
- <ALID id="330236097" logicalName="PM1.AlarmLowLimit.AI_ScavengerExhaustMS3" description="Scavenger Exhaust MS3 Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330236097" eventClear="2330236097" />
- <ALID id="330236098" logicalName="PM1.AlarmLowLimit.AI_ValveBoxExhaustMS4" description="Valve Box Exhaust MS4 Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330236098" eventClear="2330236098" />
- <ALID id="330236099" logicalName="PM1.AlarmLowLimit.AI_VG12AnalogValue" description="VG12 analog value Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330236099" eventClear="2330236099" />
- <ALID id="330236100" logicalName="PM1.AlarmLowLimit.AI_VG14AnalogValue" description="VG14 analog value Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330236100" eventClear="2330236100" />
- <ALID id="330236101" logicalName="PM1.AlarmLowLimit.AI_GaslineHeater53PV" description="Gasline heater53 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330236101" eventClear="2330236101" />
- <ALID id="330236102" logicalName="PM1.AlarmLowLimit.AI_GaslineHeater55PV" description="Gasline heater55 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330236102" eventClear="2330236102" />
- <ALID id="330236103" logicalName="PM1.AlarmLowLimit.AI_GaslineHeater56PV" description="Gasline heater56 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330236103" eventClear="2330236103" />
- <ALID id="330236104" logicalName="PM1.AlarmLowLimit.AI_GaslineHeater57PV" description="Gasline heater57 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330236104" eventClear="2330236104" />
- <ALID id="330236105" logicalName="PM1.AlarmLowLimit.AI_GaslineHeater58PV" description="Gasline heater58 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330236105" eventClear="2330236105" />
- <ALID id="330236106" logicalName="PM1.AlarmLowLimit.AI_GaslineHeater59PV" description="Gasline heater59 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330236106" eventClear="2330236106" />
- <ALID id="330236107" logicalName="PM1.AlarmLowLimit.AI_GaslineHeater60PV" description="Gasline heater60 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330236107" eventClear="2330236107" />
- <ALID id="330236108" logicalName="PM1.AlarmLowLimit.AI_GaslineHeater61PV" description="Gasline heater61 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330236108" eventClear="2330236108" />
- <ALID id="330236109" logicalName="PM1.AlarmLowLimit.AI_GaslineHeater62PV" description="Gasline heater62 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330236109" eventClear="2330236109" />
- <ALID id="330236110" logicalName="PM1.AlarmLowLimit.AI_GaslineHeater54PV" description="Gasline heater54 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330236110" eventClear="2330236110" />
- <ALID id="330236111" logicalName="PM1.AlarmLowLimit.AI_GaslineHeater63PV" description="Gasline heater63 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330236111" eventClear="2330236111" />
- <ALID id="330236112" logicalName="PM1.AlarmLowLimit.AI_GaslineHeater64PV" description="Gasline heater64 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330236112" eventClear="2330236112" />
- <ALID id="330236113" logicalName="PM1.AlarmLowLimit.AI_Unit1CH10PV" description="Unit1-CH10 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330236113" eventClear="2330236113" />
- <ALID id="330236114" logicalName="PM1.AlarmLowLimit.AI_Unit1CH11PV" description="Unit1-CH11 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330236114" eventClear="2330236114" />
- <ALID id="330236115" logicalName="PM1.AlarmLowLimit.AI_Unit1CH12PV" description="Unit1-CH12 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330236115" eventClear="2330236115" />
- <ALID id="330236116" logicalName="PM1.AlarmLowLimit.AI_Unit1CH13PV" description="Unit1-CH13 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330236116" eventClear="2330236116" />
- <ALID id="330236117" logicalName="PM1.AlarmLowLimit.AI_Unit1CH14PV" description="Unit1-CH14 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330236117" eventClear="2330236117" />
- <ALID id="330236118" logicalName="PM1.AlarmLowLimit.AI_Unit1CH15PV" description="Unit1-CH15 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330236118" eventClear="2330236118" />
- <ALID id="330236119" logicalName="PM1.AlarmLowLimit.AI_Unit1CH16PV" description="Unit1-CH16 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330236119" eventClear="2330236119" />
- <ALID id="330236120" logicalName="PM1.AlarmLowLimit.AI_Unit1CH1PV" description="Unit1-CH1 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330236120" eventClear="2330236120" />
- <ALID id="330236121" logicalName="PM1.AlarmLowLimit.AI_Unit1CH2PV" description="Unit1-CH2 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330236121" eventClear="2330236121" />
- <ALID id="330236122" logicalName="PM1.AlarmLowLimit.AI_Unit1CH3PV" description="Unit1-CH3 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330236122" eventClear="2330236122" />
- <ALID id="330236123" logicalName="PM1.AlarmLowLimit.AI_Unit1CH4PV" description="Unit1-CH4 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330236123" eventClear="2330236123" />
- <ALID id="330236124" logicalName="PM1.AlarmLowLimit.AI_Unit1CH5PV" description="Unit1-CH5 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330236124" eventClear="2330236124" />
- <ALID id="330236125" logicalName="PM1.AlarmLowLimit.AI_Unit1CH6PV" description="Unit1-CH6 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330236125" eventClear="2330236125" />
- <ALID id="330236126" logicalName="PM1.AlarmLowLimit.AI_Unit1CH7PV" description="Unit1-CH7 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330236126" eventClear="2330236126" />
- <ALID id="330236127" logicalName="PM1.AlarmLowLimit.AI_Unit1CH8PV" description="Unit1-CH8 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330236127" eventClear="2330236127" />
- <ALID id="330236128" logicalName="PM1.AlarmLowLimit.AI_Unit1CH9PV" description="Unit1-CH9 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330236128" eventClear="2330236128" />
- <ALID id="330236129" logicalName="PM1.AlarmLowLimit.AI_Unit2CH10PV" description="Unit2-CH10 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330236129" eventClear="2330236129" />
- <ALID id="330236130" logicalName="PM1.AlarmLowLimit.AI_Unit2CH11PV" description="Unit2-CH11 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330236130" eventClear="2330236130" />
- <ALID id="330236131" logicalName="PM1.AlarmLowLimit.AI_Unit2CH12PV" description="Unit2-CH12 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330236131" eventClear="2330236131" />
- <ALID id="330236132" logicalName="PM1.AlarmLowLimit.AI_Unit2CH13PV" description="Unit2-CH13 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330236132" eventClear="2330236132" />
- <ALID id="330236133" logicalName="PM1.AlarmLowLimit.AI_Unit2CH14PV" description="Unit2-CH14 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330236133" eventClear="2330236133" />
- <ALID id="330236134" logicalName="PM1.AlarmLowLimit.AI_Unit2CH15PV" description="Unit2-CH15 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330236134" eventClear="2330236134" />
- <ALID id="330236135" logicalName="PM1.AlarmLowLimit.AI_Unit2CH16PV" description="Unit2-CH16 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330236135" eventClear="2330236135" />
- <ALID id="330236136" logicalName="PM1.AlarmLowLimit.AI_Unit2CH1PV" description="Unit2-CH1 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330236136" eventClear="2330236136" />
- <ALID id="330236137" logicalName="PM1.AlarmLowLimit.AI_Unit2CH2PV" description="Unit2-CH2 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330236137" eventClear="2330236137" />
- <ALID id="330236138" logicalName="PM1.AlarmLowLimit.AI_Unit2CH3PV" description="Unit2-CH3 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330236138" eventClear="2330236138" />
- <ALID id="330236139" logicalName="PM1.AlarmLowLimit.AI_Unit2CH4PV" description="Unit2-CH4 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330236139" eventClear="2330236139" />
- <ALID id="330236140" logicalName="PM1.AlarmLowLimit.AI_Unit2CH5PV" description="Unit2-CH5 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330236140" eventClear="2330236140" />
- <ALID id="330236141" logicalName="PM1.AlarmLowLimit.AI_Unit2CH6PV" description="Unit2-CH6 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330236141" eventClear="2330236141" />
- <ALID id="330236142" logicalName="PM1.AlarmLowLimit.AI_Unit2CH7PV" description="Unit2-CH7 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330236142" eventClear="2330236142" />
- <ALID id="330236143" logicalName="PM1.AlarmLowLimit.AI_Unit2CH8PV" description="Unit2-CH8 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330236143" eventClear="2330236143" />
- <ALID id="330236144" logicalName="PM1.AlarmLowLimit.AI_Unit2CH9PV" description="Unit2-CH9 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330236144" eventClear="2330236144" />
- <ALID id="330236145" logicalName="PM1.AlarmLowLimit.AI_Unit3CH10PV" description="Unit3-CH10 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330236145" eventClear="2330236145" />
- <ALID id="330236146" logicalName="PM1.AlarmLowLimit.AI_Unit3CH11PV" description="Unit3-CH11 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330236146" eventClear="2330236146" />
- <ALID id="330236147" logicalName="PM1.AlarmLowLimit.AI_Unit3CH12PV" description="Unit3-CH12 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330236147" eventClear="2330236147" />
- <ALID id="330236148" logicalName="PM1.AlarmLowLimit.AI_Unit3CH13PV" description="Unit3-CH13 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330236148" eventClear="2330236148" />
- <ALID id="330236149" logicalName="PM1.AlarmLowLimit.AI_Unit3CH14PV" description="Unit3-CH14 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330236149" eventClear="2330236149" />
- <ALID id="330236150" logicalName="PM1.AlarmLowLimit.AI_Unit3CH15PV" description="Unit3-CH15 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330236150" eventClear="2330236150" />
- <ALID id="330236151" logicalName="PM1.AlarmLowLimit.AI_Unit3CH16PV" description="Unit3-CH16 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330236151" eventClear="2330236151" />
- <ALID id="330236152" logicalName="PM1.AlarmLowLimit.AI_Unit3CH1PV" description="Unit3-CH1 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330236152" eventClear="2330236152" />
- <ALID id="330236153" logicalName="PM1.AlarmLowLimit.AI_Unit3CH2PV" description="Unit3-CH2 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330236153" eventClear="2330236153" />
- <ALID id="330236154" logicalName="PM1.AlarmLowLimit.AI_Unit3CH3PV" description="Unit3-CH3 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330236154" eventClear="2330236154" />
- <ALID id="330236155" logicalName="PM1.AlarmLowLimit.AI_Unit3CH4PV" description="Unit3-CH4 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330236155" eventClear="2330236155" />
- <ALID id="330236156" logicalName="PM1.AlarmLowLimit.AI_Unit3CH5PV" description="Unit3-CH5 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330236156" eventClear="2330236156" />
- <ALID id="330236157" logicalName="PM1.AlarmLowLimit.AI_Unit3CH6PV" description="Unit3-CH6 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330236157" eventClear="2330236157" />
- <ALID id="330236158" logicalName="PM1.AlarmLowLimit.AI_Unit3CH7PV" description="Unit3-CH7 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330236158" eventClear="2330236158" />
- <ALID id="330236159" logicalName="PM1.AlarmLowLimit.AI_Unit3CH8PV" description="Unit3-CH8 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330236159" eventClear="2330236159" />
- <ALID id="330236160" logicalName="PM1.AlarmLowLimit.AI_Unit3CH9PV" description="Unit3-CH9 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330236160" eventClear="2330236160" />
- <ALID id="330236161" logicalName="PM1.AlarmLowLimit.AI_Unit4CH10PV" description="Unit4-CH10 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330236161" eventClear="2330236161" />
- <ALID id="330236162" logicalName="PM1.AlarmLowLimit.AI_Unit4CH11PV" description="Unit4-CH11 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330236162" eventClear="2330236162" />
- <ALID id="330236163" logicalName="PM1.AlarmLowLimit.AI_Unit4CH12PV" description="Unit4-CH12 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330236163" eventClear="2330236163" />
- <ALID id="330236164" logicalName="PM1.AlarmLowLimit.AI_Unit4CH13PV" description="Unit4-CH13 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330236164" eventClear="2330236164" />
- <ALID id="330236165" logicalName="PM1.AlarmLowLimit.AI_Unit4CH14PV" description="Unit4-CH14 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330236165" eventClear="2330236165" />
- <ALID id="330236166" logicalName="PM1.AlarmLowLimit.AI_Unit4CH15PV" description="Unit4-CH15 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330236166" eventClear="2330236166" />
- <ALID id="330236167" logicalName="PM1.AlarmLowLimit.AI_Unit4CH16PV" description="Unit4-CH16 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330236167" eventClear="2330236167" />
- <ALID id="330236168" logicalName="PM1.AlarmLowLimit.AI_Unit4CH1PV" description="Unit4-CH1 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330236168" eventClear="2330236168" />
- <ALID id="330236169" logicalName="PM1.AlarmLowLimit.AI_Unit4CH2PV" description="Unit4-CH2 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330236169" eventClear="2330236169" />
- <ALID id="330236170" logicalName="PM1.AlarmLowLimit.AI_Unit4CH3PV" description="Unit4-CH3 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330236170" eventClear="2330236170" />
- <ALID id="330236171" logicalName="PM1.AlarmLowLimit.AI_Unit4CH4PV" description="Unit4-CH4 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330236171" eventClear="2330236171" />
- <ALID id="330236172" logicalName="PM1.AlarmLowLimit.AI_Unit4CH5PV" description="Unit4-CH5 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330236172" eventClear="2330236172" />
- <ALID id="330236173" logicalName="PM1.AlarmLowLimit.AI_Unit4CH6PV" description="Unit4-CH6 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330236173" eventClear="2330236173" />
- <ALID id="330236174" logicalName="PM1.AlarmLowLimit.AI_Unit4CH7PV" description="Unit4-CH7 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330236174" eventClear="2330236174" />
- <ALID id="330236175" logicalName="PM1.AlarmLowLimit.AI_Unit4CH8PV" description="Unit4-CH8 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330236175" eventClear="2330236175" />
- <ALID id="330236176" logicalName="PM1.AlarmLowLimit.AI_Unit4CH9PV" description="Unit4-CH9 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330236176" eventClear="2330236176" />
- <ALID id="330237001" logicalName="PM1.WarningHighLimit.AI_APCExternalHeaterTempPV" description="APC external heater Temp.PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330237001" eventClear="2330237001" />
- <ALID id="330237002" logicalName="PM1.WarningHighLimit.AI_APCRingHeaterTempPV" description="APC ring heater Temp.PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330237002" eventClear="2330237002" />
- <ALID id="330237003" logicalName="PM1.WarningHighLimit.AI_CapHeaterTempPV" description="Cap heater Temp.PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330237003" eventClear="2330237003" />
- <ALID id="330237004" logicalName="PM1.WarningHighLimit.AI_ForelineHeater10TempPV" description="Foreline heater-10 Temp.PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330237004" eventClear="2330237004" />
- <ALID id="330237005" logicalName="PM1.WarningHighLimit.AI_ForelineHeater11TempPV" description="Foreline heater-11 Temp.PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330237005" eventClear="2330237005" />
- <ALID id="330237006" logicalName="PM1.WarningHighLimit.AI_ForelineHeater12TempPV" description="Foreline heater-12 Temp.PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330237006" eventClear="2330237006" />
- <ALID id="330237007" logicalName="PM1.WarningHighLimit.AI_ForelineHeater1TempPV" description="Foreline heater-2 Temp.PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330237007" eventClear="2330237007" />
- <ALID id="330237008" logicalName="PM1.WarningHighLimit.AI_ForelineHeater3TempPV" description="Foreline heater-3 Temp.PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330237008" eventClear="2330237008" />
- <ALID id="330237009" logicalName="PM1.WarningHighLimit.AI_ForelineHeater4TempPV" description="Foreline heater-4 Temp.PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330237009" eventClear="2330237009" />
- <ALID id="330237010" logicalName="PM1.WarningHighLimit.AI_ForelineHeater5TempPV" description="Foreline heater-5 Temp.PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330237010" eventClear="2330237010" />
- <ALID id="330237011" logicalName="PM1.WarningHighLimit.AI_ForelineHeater6TempPV" description="Foreline heater-6 Temp.PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330237011" eventClear="2330237011" />
- <ALID id="330237012" logicalName="PM1.WarningHighLimit.AI_ForelineHeater7TempPV" description="Foreline heater-7 Temp.PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330237012" eventClear="2330237012" />
- <ALID id="330237013" logicalName="PM1.WarningHighLimit.AI_ForelineHeater8TempPV" description="Foreline heater-8 Temp.PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330237013" eventClear="2330237013" />
- <ALID id="330237014" logicalName="PM1.WarningHighLimit.AI_ForelineHeater9TempPV" description="Foreline heater-9 Temp.PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330237014" eventClear="2330237014" />
- <ALID id="330237015" logicalName="PM1.WarningHighLimit.AI_GaslineHeater10PV" description="Gasline heater10 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330237015" eventClear="2330237015" />
- <ALID id="330237016" logicalName="PM1.WarningHighLimit.AI_GaslineHeater11PV" description="Gasline heater11 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330237016" eventClear="2330237016" />
- <ALID id="330237017" logicalName="PM1.WarningHighLimit.AI_GaslineHeater12PV" description="Gasline heater12 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330237017" eventClear="2330237017" />
- <ALID id="330237018" logicalName="PM1.WarningHighLimit.AI_GaslineHeater13PV" description="Gasline heater13 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330237018" eventClear="2330237018" />
- <ALID id="330237019" logicalName="PM1.WarningHighLimit.AI_GaslineHeater14PV" description="Gasline heater14 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330237019" eventClear="2330237019" />
- <ALID id="330237020" logicalName="PM1.WarningHighLimit.AI_GaslineHeater15PV" description="Gasline heater15 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330237020" eventClear="2330237020" />
- <ALID id="330237021" logicalName="PM1.WarningHighLimit.AI_GaslineHeater16PV" description="Gasline heater16 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330237021" eventClear="2330237021" />
- <ALID id="330237022" logicalName="PM1.WarningHighLimit.AI_GaslineHeater17PV" description="Gasline heater17 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330237022" eventClear="2330237022" />
- <ALID id="330237023" logicalName="PM1.WarningHighLimit.AI_GaslineHeater18PV" description="Gasline heater18 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330237023" eventClear="2330237023" />
- <ALID id="330237024" logicalName="PM1.WarningHighLimit.AI_GaslineHeater19PV" description="Gasline heater19 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330237024" eventClear="2330237024" />
- <ALID id="330237025" logicalName="PM1.WarningHighLimit.AI_GaslineHeater1PV" description="Foreline heater-1 Temp.PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330237025" eventClear="2330237025" />
- <ALID id="330237026" logicalName="PM1.WarningHighLimit.AI_GaslineHeater20PV" description="Gasline heater20 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330237026" eventClear="2330237026" />
- <ALID id="330237027" logicalName="PM1.WarningHighLimit.AI_GaslineHeater21PV" description="Gasline heater21 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330237027" eventClear="2330237027" />
- <ALID id="330237028" logicalName="PM1.WarningHighLimit.AI_GaslineHeater22PV" description="Gasline heater22 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330237028" eventClear="2330237028" />
- <ALID id="330237029" logicalName="PM1.WarningHighLimit.AI_GaslineHeater23PV" description="Gasline heater23 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330237029" eventClear="2330237029" />
- <ALID id="330237030" logicalName="PM1.WarningHighLimit.AI_GaslineHeater24PV" description="Gasline heater24 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330237030" eventClear="2330237030" />
- <ALID id="330237031" logicalName="PM1.WarningHighLimit.AI_GaslineHeater25PV" description="Gasline heater25 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330237031" eventClear="2330237031" />
- <ALID id="330237032" logicalName="PM1.WarningHighLimit.AI_GaslineHeater26PV" description="Gasline heater26 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330237032" eventClear="2330237032" />
- <ALID id="330237033" logicalName="PM1.WarningHighLimit.AI_GaslineHeater27PV" description="Gasline heater27 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330237033" eventClear="2330237033" />
- <ALID id="330237034" logicalName="PM1.WarningHighLimit.AI_GaslineHeater28PV" description="Gasline heater28 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330237034" eventClear="2330237034" />
- <ALID id="330237035" logicalName="PM1.WarningHighLimit.AI_GaslineHeater29PV" description="Gasline heater29 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330237035" eventClear="2330237035" />
- <ALID id="330237036" logicalName="PM1.WarningHighLimit.AI_GaslineHeater2PV" description="Gasline heater2 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330237036" eventClear="2330237036" />
- <ALID id="330237037" logicalName="PM1.WarningHighLimit.AI_GaslineHeater30PV" description="Gasline heater30 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330237037" eventClear="2330237037" />
- <ALID id="330237038" logicalName="PM1.WarningHighLimit.AI_GaslineHeater31PV" description="Gasline heater31 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330237038" eventClear="2330237038" />
- <ALID id="330237039" logicalName="PM1.WarningHighLimit.AI_GaslineHeater32PV" description="Gasline heater32 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330237039" eventClear="2330237039" />
- <ALID id="330237040" logicalName="PM1.WarningHighLimit.AI_GaslineHeater33PV" description="Gasline heater33 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330237040" eventClear="2330237040" />
- <ALID id="330237041" logicalName="PM1.WarningHighLimit.AI_GaslineHeater34PV" description="Gasline heater34 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330237041" eventClear="2330237041" />
- <ALID id="330237042" logicalName="PM1.WarningHighLimit.AI_GaslineHeater35PV" description="Gasline heater35 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330237042" eventClear="2330237042" />
- <ALID id="330237043" logicalName="PM1.WarningHighLimit.AI_GaslineHeater36PV" description="Gasline heater36 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330237043" eventClear="2330237043" />
- <ALID id="330237044" logicalName="PM1.WarningHighLimit.AI_GaslineHeater37PV" description="Gasline heater37 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330237044" eventClear="2330237044" />
- <ALID id="330237045" logicalName="PM1.WarningHighLimit.AI_GaslineHeater38PV" description="Gasline heater38 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330237045" eventClear="2330237045" />
- <ALID id="330237046" logicalName="PM1.WarningHighLimit.AI_GaslineHeater39PV" description="Gasline heater39 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330237046" eventClear="2330237046" />
- <ALID id="330237047" logicalName="PM1.WarningHighLimit.AI_GaslineHeater3PV" description="Gasline heater3 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330237047" eventClear="2330237047" />
- <ALID id="330237048" logicalName="PM1.WarningHighLimit.AI_GaslineHeater40PV" description="Gasline heater40 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330237048" eventClear="2330237048" />
- <ALID id="330237049" logicalName="PM1.WarningHighLimit.AI_GaslineHeater41PV" description="Gasline heater41 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330237049" eventClear="2330237049" />
- <ALID id="330237050" logicalName="PM1.WarningHighLimit.AI_GaslineHeater42PV" description="Gasline heater42 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330237050" eventClear="2330237050" />
- <ALID id="330237051" logicalName="PM1.WarningHighLimit.AI_GaslineHeater43PV" description="Gasline heater43 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330237051" eventClear="2330237051" />
- <ALID id="330237052" logicalName="PM1.WarningHighLimit.AI_GaslineHeater44PV" description="Gasline heater44 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330237052" eventClear="2330237052" />
- <ALID id="330237053" logicalName="PM1.WarningHighLimit.AI_GaslineHeater45PV" description="Gasline heater45 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330237053" eventClear="2330237053" />
- <ALID id="330237054" logicalName="PM1.WarningHighLimit.AI_GaslineHeater46PV" description="Gasline heater46 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330237054" eventClear="2330237054" />
- <ALID id="330237055" logicalName="PM1.WarningHighLimit.AI_GaslineHeater47PV" description="Gasline heater47 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330237055" eventClear="2330237055" />
- <ALID id="330237056" logicalName="PM1.WarningHighLimit.AI_GaslineHeater48PV" description="Gasline heater48 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330237056" eventClear="2330237056" />
- <ALID id="330237057" logicalName="PM1.WarningHighLimit.AI_GaslineHeater49PV" description="Gasline heater49 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330237057" eventClear="2330237057" />
- <ALID id="330237058" logicalName="PM1.WarningHighLimit.AI_GaslineHeater4PV" description="Gasline heater4 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330237058" eventClear="2330237058" />
- <ALID id="330237059" logicalName="PM1.WarningHighLimit.AI_GaslineHeater50PV" description="Gasline heater50 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330237059" eventClear="2330237059" />
- <ALID id="330237060" logicalName="PM1.WarningHighLimit.AI_GaslineHeater51PV" description="Gasline heater51 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330237060" eventClear="2330237060" />
- <ALID id="330237061" logicalName="PM1.WarningHighLimit.AI_GaslineHeater52PV" description="Gasline heater52 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330237061" eventClear="2330237061" />
- <ALID id="330237062" logicalName="PM1.WarningHighLimit.AI_GaslineHeater5PV" description="Gasline heater5 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330237062" eventClear="2330237062" />
- <ALID id="330237063" logicalName="PM1.WarningHighLimit.AI_GaslineHeater6PV" description="Gasline heater6 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330237063" eventClear="2330237063" />
- <ALID id="330237064" logicalName="PM1.WarningHighLimit.AI_GaslineHeater7PV" description="Gasline heater7 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330237064" eventClear="2330237064" />
- <ALID id="330237065" logicalName="PM1.WarningHighLimit.AI_GaslineHeater8PV" description="Gasline heater8 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330237065" eventClear="2330237065" />
- <ALID id="330237066" logicalName="PM1.WarningHighLimit.AI_GaslineHeater9PV" description="Gasline heater9 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330237066" eventClear="2330237066" />
- <ALID id="330237067" logicalName="PM1.WarningHighLimit.AI_ForelineHeater2TempPV" description="Foreline heater-2 Temp.PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330237067" eventClear="2330237067" />
- <ALID id="330237068" logicalName="PM1.WarningHighLimit.AI_CoolingWaterFlowOfBoatRotation(FL904)" description="cooling water flow of boat rotation (FL904) High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330237068" eventClear="2330237068" />
- <ALID id="330237069" logicalName="PM1.WarningHighLimit.AI_CoolingWaterFlowOfFlange(FL905)" description="cooling water flow of flange (FL905) High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330237069" eventClear="2330237069" />
- <ALID id="330237070" logicalName="PM1.WarningHighLimit.AI_CoolingWaterFlowOfFurnace(FL902)" description="cooling water flow of furnace (FL902) High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330237070" eventClear="2330237070" />
- <ALID id="330237071" logicalName="PM1.WarningHighLimit.AI_CoolingWaterFlowOfLoadingArea(FL906)" description="cooling water flow of loading area (FL906) High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330237071" eventClear="2330237071" />
- <ALID id="330237072" logicalName="PM1.WarningHighLimit.AI_CoolingWaterFlowOfShutter(FL903)" description="cooling water flow of shutter (FL903) High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330237072" eventClear="2330237072" />
- <ALID id="330237073" logicalName="PM1.WarningHighLimit.AI_FrontBodyExhaustMS6" description="Front Body Exhaust MS6 High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330237073" eventClear="2330237073" />
- <ALID id="330237074" logicalName="PM1.WarningHighLimit.AI_GasBoxExhaustMS2" description="Gas Box Exhaust MS2 High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330237074" eventClear="2330237074" />
- <ALID id="330237075" logicalName="PM1.WarningHighLimit.AI_GasBoxUpperVG21Pressure" description="Gas box upper VG21 pressure High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330237075" eventClear="2330237075" />
- <ALID id="330237076" logicalName="PM1.WarningHighLimit.AI_GasBoxUpperVG22Pressure" description="Gas box upper VG22 pressure High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330237076" eventClear="2330237076" />
- <ALID id="330237077" logicalName="PM1.WarningHighLimit.AI_GLBoxPG1Pressure" description="GL box PG1 pressure High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330237077" eventClear="2330237077" />
- <ALID id="330237078" logicalName="PM1.WarningHighLimit.AI_GLBoxPG2Pressure" description="GL box PG2 pressure High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330237078" eventClear="2330237078" />
- <ALID id="330237079" logicalName="PM1.WarningHighLimit.AI_GLBoxPG3Pressure" description="GL box PG3 pressure High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330237079" eventClear="2330237079" />
- <ALID id="330237080" logicalName="PM1.WarningHighLimit.AI_GLBoxPG4Pressure" description="GL box PG4 pressure High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330237080" eventClear="2330237080" />
- <ALID id="330237081" logicalName="PM1.WarningHighLimit.AI_GLBoxPG5Pressure" description="GL box PG5 pressure High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330237081" eventClear="2330237081" />
- <ALID id="330237082" logicalName="PM1.WarningHighLimit.AI_GLBoxPG6Pressure" description="GL box PG6 pressure High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330237082" eventClear="2330237082" />
- <ALID id="330237083" logicalName="PM1.WarningHighLimit.AI_HeatingExhaustMS1" description="Heating Exhaust MS1 High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330237083" eventClear="2330237083" />
- <ALID id="330237084" logicalName="PM1.WarningHighLimit.AI_LAExhaustMS7" description="L/A Exhaust MS7 High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330237084" eventClear="2330237084" />
- <ALID id="330237085" logicalName="PM1.WarningHighLimit.AI_LoadingAreaExhaustMS5" description="Loading Area Exhaust MS5 High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330237085" eventClear="2330237085" />
- <ALID id="330237086" logicalName="PM1.WarningHighLimit.AI_N2-4(PG14)purgePressure" description="N2-4(PG14) purge pressure High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330237086" eventClear="2330237086" />
- <ALID id="330237087" logicalName="PM1.WarningHighLimit.AI_N2-5(PG15)purgePressure" description="N2-5(PG15) purge pressure High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330237087" eventClear="2330237087" />
- <ALID id="330237088" logicalName="PM1.WarningHighLimit.AI_N2-6(PG16)purgePressure" description="N2-6(PG16) purge pressure High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330237088" eventClear="2330237088" />
- <ALID id="330237089" logicalName="PM1.WarningHighLimit.AI_N2-7(PG17)PurgePressure" description="N2-7(PG17) purge pressure High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330237089" eventClear="2330237089" />
- <ALID id="330237090" logicalName="PM1.WarningHighLimit.AI_PG12AnalogValue" description="PG12 analog value High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330237090" eventClear="2330237090" />
- <ALID id="330237091" logicalName="PM1.WarningHighLimit.AI_PG13AnalogValue" description="PG13 analog value High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330237091" eventClear="2330237091" />
- <ALID id="330237092" logicalName="PM1.WarningHighLimit.AI_PS11Value" description="PS11 Value High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330237092" eventClear="2330237092" />
- <ALID id="330237093" logicalName="PM1.WarningHighLimit.AI_PS13AnalogValue" description="PS13 analog value High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330237093" eventClear="2330237093" />
- <ALID id="330237094" logicalName="PM1.WarningHighLimit.AI_PS17Value" description="PS17 value High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330237094" eventClear="2330237094" />
- <ALID id="330237095" logicalName="PM1.WarningHighLimit.AI_RHCExhaustMS8" description="RHC Exhaust MS8 High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330237095" eventClear="2330237095" />
- <ALID id="330237096" logicalName="PM1.WarningHighLimit.AI_RHCFlow(FL901)" description="RHC flow (FL901) High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330237096" eventClear="2330237096" />
- <ALID id="330237097" logicalName="PM1.WarningHighLimit.AI_ScavengerExhaustMS3" description="Scavenger Exhaust MS3 High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330237097" eventClear="2330237097" />
- <ALID id="330237098" logicalName="PM1.WarningHighLimit.AI_ValveBoxExhaustMS4" description="Valve Box Exhaust MS4 High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330237098" eventClear="2330237098" />
- <ALID id="330237099" logicalName="PM1.WarningHighLimit.AI_VG12AnalogValue" description="VG12 analog value High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330237099" eventClear="2330237099" />
- <ALID id="330237100" logicalName="PM1.WarningHighLimit.AI_VG14AnalogValue" description="VG14 analog value High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330237100" eventClear="2330237100" />
- <ALID id="330237101" logicalName="PM1.WarningHighLimit.AI_GaslineHeater53PV" description="Gasline heater53 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330237101" eventClear="2330237101" />
- <ALID id="330237102" logicalName="PM1.WarningHighLimit.AI_GaslineHeater55PV" description="Gasline heater55 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330237102" eventClear="2330237102" />
- <ALID id="330237103" logicalName="PM1.WarningHighLimit.AI_GaslineHeater56PV" description="Gasline heater56 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330237103" eventClear="2330237103" />
- <ALID id="330237104" logicalName="PM1.WarningHighLimit.AI_GaslineHeater57PV" description="Gasline heater57 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330237104" eventClear="2330237104" />
- <ALID id="330237105" logicalName="PM1.WarningHighLimit.AI_GaslineHeater58PV" description="Gasline heater58 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330237105" eventClear="2330237105" />
- <ALID id="330237106" logicalName="PM1.WarningHighLimit.AI_GaslineHeater59PV" description="Gasline heater59 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330237106" eventClear="2330237106" />
- <ALID id="330237107" logicalName="PM1.WarningHighLimit.AI_GaslineHeater60PV" description="Gasline heater60 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330237107" eventClear="2330237107" />
- <ALID id="330237108" logicalName="PM1.WarningHighLimit.AI_GaslineHeater61PV" description="Gasline heater61 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330237108" eventClear="2330237108" />
- <ALID id="330237109" logicalName="PM1.WarningHighLimit.AI_GaslineHeater62PV" description="Gasline heater62 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330237109" eventClear="2330237109" />
- <ALID id="330237110" logicalName="PM1.WarningHighLimit.AI_GaslineHeater54PV" description="Gasline heater54 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330237110" eventClear="2330237110" />
- <ALID id="330237111" logicalName="PM1.WarningHighLimit.AI_GaslineHeater63PV" description="Gasline heater63 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330237111" eventClear="2330237111" />
- <ALID id="330237112" logicalName="PM1.WarningHighLimit.AI_GaslineHeater64PV" description="Gasline heater64 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330237112" eventClear="2330237112" />
- <ALID id="330237113" logicalName="PM1.WarningHighLimit.AI_Unit1CH10PV" description="Unit1-CH10 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330237113" eventClear="2330237113" />
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- <ALID id="330238002" logicalName="PM1.WarningLowLimit.AI_APCRingHeaterTempPV" description="APC ring heater Temp.PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330238002" eventClear="2330238002" />
- <ALID id="330238003" logicalName="PM1.WarningLowLimit.AI_CapHeaterTempPV" description="Cap heater Temp.PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330238003" eventClear="2330238003" />
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- <ALID id="330238005" logicalName="PM1.WarningLowLimit.AI_ForelineHeater11TempPV" description="Foreline heater-11 Temp.PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330238005" eventClear="2330238005" />
- <ALID id="330238006" logicalName="PM1.WarningLowLimit.AI_ForelineHeater12TempPV" description="Foreline heater-12 Temp.PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330238006" eventClear="2330238006" />
- <ALID id="330238007" logicalName="PM1.WarningLowLimit.AI_ForelineHeater1TempPV" description="Foreline heater-2 Temp.PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330238007" eventClear="2330238007" />
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- <ALID id="330238032" logicalName="PM1.WarningLowLimit.AI_GaslineHeater26PV" description="Gasline heater26 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330238032" eventClear="2330238032" />
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- <ALID id="330238037" logicalName="PM1.WarningLowLimit.AI_GaslineHeater30PV" description="Gasline heater30 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330238037" eventClear="2330238037" />
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- <ALID id="330238042" logicalName="PM1.WarningLowLimit.AI_GaslineHeater35PV" description="Gasline heater35 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330238042" eventClear="2330238042" />
- <ALID id="330238043" logicalName="PM1.WarningLowLimit.AI_GaslineHeater36PV" description="Gasline heater36 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330238043" eventClear="2330238043" />
- <ALID id="330238044" logicalName="PM1.WarningLowLimit.AI_GaslineHeater37PV" description="Gasline heater37 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330238044" eventClear="2330238044" />
- <ALID id="330238045" logicalName="PM1.WarningLowLimit.AI_GaslineHeater38PV" description="Gasline heater38 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330238045" eventClear="2330238045" />
- <ALID id="330238046" logicalName="PM1.WarningLowLimit.AI_GaslineHeater39PV" description="Gasline heater39 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330238046" eventClear="2330238046" />
- <ALID id="330238047" logicalName="PM1.WarningLowLimit.AI_GaslineHeater3PV" description="Gasline heater3 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330238047" eventClear="2330238047" />
- <ALID id="330238048" logicalName="PM1.WarningLowLimit.AI_GaslineHeater40PV" description="Gasline heater40 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330238048" eventClear="2330238048" />
- <ALID id="330238049" logicalName="PM1.WarningLowLimit.AI_GaslineHeater41PV" description="Gasline heater41 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330238049" eventClear="2330238049" />
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- <ALID id="330238051" logicalName="PM1.WarningLowLimit.AI_GaslineHeater43PV" description="Gasline heater43 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330238051" eventClear="2330238051" />
- <ALID id="330238052" logicalName="PM1.WarningLowLimit.AI_GaslineHeater44PV" description="Gasline heater44 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330238052" eventClear="2330238052" />
- <ALID id="330238053" logicalName="PM1.WarningLowLimit.AI_GaslineHeater45PV" description="Gasline heater45 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330238053" eventClear="2330238053" />
- <ALID id="330238054" logicalName="PM1.WarningLowLimit.AI_GaslineHeater46PV" description="Gasline heater46 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330238054" eventClear="2330238054" />
- <ALID id="330238055" logicalName="PM1.WarningLowLimit.AI_GaslineHeater47PV" description="Gasline heater47 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330238055" eventClear="2330238055" />
- <ALID id="330238056" logicalName="PM1.WarningLowLimit.AI_GaslineHeater48PV" description="Gasline heater48 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330238056" eventClear="2330238056" />
- <ALID id="330238057" logicalName="PM1.WarningLowLimit.AI_GaslineHeater49PV" description="Gasline heater49 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330238057" eventClear="2330238057" />
- <ALID id="330238058" logicalName="PM1.WarningLowLimit.AI_GaslineHeater4PV" description="Gasline heater4 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330238058" eventClear="2330238058" />
- <ALID id="330238059" logicalName="PM1.WarningLowLimit.AI_GaslineHeater50PV" description="Gasline heater50 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330238059" eventClear="2330238059" />
- <ALID id="330238060" logicalName="PM1.WarningLowLimit.AI_GaslineHeater51PV" description="Gasline heater51 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330238060" eventClear="2330238060" />
- <ALID id="330238061" logicalName="PM1.WarningLowLimit.AI_GaslineHeater52PV" description="Gasline heater52 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330238061" eventClear="2330238061" />
- <ALID id="330238062" logicalName="PM1.WarningLowLimit.AI_GaslineHeater5PV" description="Gasline heater5 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330238062" eventClear="2330238062" />
- <ALID id="330238063" logicalName="PM1.WarningLowLimit.AI_GaslineHeater6PV" description="Gasline heater6 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330238063" eventClear="2330238063" />
- <ALID id="330238064" logicalName="PM1.WarningLowLimit.AI_GaslineHeater7PV" description="Gasline heater7 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330238064" eventClear="2330238064" />
- <ALID id="330238065" logicalName="PM1.WarningLowLimit.AI_GaslineHeater8PV" description="Gasline heater8 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330238065" eventClear="2330238065" />
- <ALID id="330238066" logicalName="PM1.WarningLowLimit.AI_GaslineHeater9PV" description="Gasline heater9 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330238066" eventClear="2330238066" />
- <ALID id="330238067" logicalName="PM1.WarningLowLimit.AI_ForelineHeater2TempPV" description="Foreline heater-2 Temp.PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330238067" eventClear="2330238067" />
- <ALID id="330238068" logicalName="PM1.WarningLowLimit.AI_CoolingWaterFlowOfBoatRotation(FL904)" description="cooling water flow of boat rotation (FL904) Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330238068" eventClear="2330238068" />
- <ALID id="330238069" logicalName="PM1.WarningLowLimit.AI_CoolingWaterFlowOfFlange(FL905)" description="cooling water flow of flange (FL905) Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330238069" eventClear="2330238069" />
- <ALID id="330238070" logicalName="PM1.WarningLowLimit.AI_CoolingWaterFlowOfFurnace(FL902)" description="cooling water flow of furnace (FL902) Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330238070" eventClear="2330238070" />
- <ALID id="330238071" logicalName="PM1.WarningLowLimit.AI_CoolingWaterFlowOfLoadingArea(FL906)" description="cooling water flow of loading area (FL906) Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330238071" eventClear="2330238071" />
- <ALID id="330238072" logicalName="PM1.WarningLowLimit.AI_CoolingWaterFlowOfShutter(FL903)" description="cooling water flow of shutter (FL903) Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330238072" eventClear="2330238072" />
- <ALID id="330238073" logicalName="PM1.WarningLowLimit.AI_FrontBodyExhaustMS6" description="Front Body Exhaust MS6 Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330238073" eventClear="2330238073" />
- <ALID id="330238074" logicalName="PM1.WarningLowLimit.AI_GasBoxExhaustMS2" description="Gas Box Exhaust MS2 Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330238074" eventClear="2330238074" />
- <ALID id="330238075" logicalName="PM1.WarningLowLimit.AI_GasBoxUpperVG21Pressure" description="Gas box upper VG21 pressure Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330238075" eventClear="2330238075" />
- <ALID id="330238076" logicalName="PM1.WarningLowLimit.AI_GasBoxUpperVG22Pressure" description="Gas box upper VG22 pressure Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330238076" eventClear="2330238076" />
- <ALID id="330238077" logicalName="PM1.WarningLowLimit.AI_GLBoxPG1Pressure" description="GL box PG1 pressure Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330238077" eventClear="2330238077" />
- <ALID id="330238078" logicalName="PM1.WarningLowLimit.AI_GLBoxPG2Pressure" description="GL box PG2 pressure Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330238078" eventClear="2330238078" />
- <ALID id="330238079" logicalName="PM1.WarningLowLimit.AI_GLBoxPG3Pressure" description="GL box PG3 pressure Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330238079" eventClear="2330238079" />
- <ALID id="330238080" logicalName="PM1.WarningLowLimit.AI_GLBoxPG4Pressure" description="GL box PG4 pressure Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330238080" eventClear="2330238080" />
- <ALID id="330238081" logicalName="PM1.WarningLowLimit.AI_GLBoxPG5Pressure" description="GL box PG5 pressure Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330238081" eventClear="2330238081" />
- <ALID id="330238082" logicalName="PM1.WarningLowLimit.AI_GLBoxPG6Pressure" description="GL box PG6 pressure Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330238082" eventClear="2330238082" />
- <ALID id="330238083" logicalName="PM1.WarningLowLimit.AI_HeatingExhaustMS1" description="Heating Exhaust MS1 Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330238083" eventClear="2330238083" />
- <ALID id="330238084" logicalName="PM1.WarningLowLimit.AI_LAExhaustMS7" description="L/A Exhaust MS7 Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330238084" eventClear="2330238084" />
- <ALID id="330238085" logicalName="PM1.WarningLowLimit.AI_LoadingAreaExhaustMS5" description="Loading Area Exhaust MS5 Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330238085" eventClear="2330238085" />
- <ALID id="330238086" logicalName="PM1.WarningLowLimit.AI_N2-4(PG14)purgePressure" description="N2-4(PG14) purge pressure Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330238086" eventClear="2330238086" />
- <ALID id="330238087" logicalName="PM1.WarningLowLimit.AI_N2-5(PG15)purgePressure" description="N2-5(PG15) purge pressure Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330238087" eventClear="2330238087" />
- <ALID id="330238088" logicalName="PM1.WarningLowLimit.AI_N2-6(PG16)purgePressure" description="N2-6(PG16) purge pressure Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330238088" eventClear="2330238088" />
- <ALID id="330238089" logicalName="PM1.WarningLowLimit.AI_N2-7(PG17)PurgePressure" description="N2-7(PG17) purge pressure Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330238089" eventClear="2330238089" />
- <ALID id="330238090" logicalName="PM1.WarningLowLimit.AI_PG12AnalogValue" description="PG12 analog value Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330238090" eventClear="2330238090" />
- <ALID id="330238091" logicalName="PM1.WarningLowLimit.AI_PG13AnalogValue" description="PG13 analog value Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330238091" eventClear="2330238091" />
- <ALID id="330238092" logicalName="PM1.WarningLowLimit.AI_PS11Value" description="PS11 Value Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330238092" eventClear="2330238092" />
- <ALID id="330238093" logicalName="PM1.WarningLowLimit.AI_PS13AnalogValue" description="PS13 analog value Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330238093" eventClear="2330238093" />
- <ALID id="330238094" logicalName="PM1.WarningLowLimit.AI_PS17Value" description="PS17 value Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330238094" eventClear="2330238094" />
- <ALID id="330238095" logicalName="PM1.WarningLowLimit.AI_RHCExhaustMS8" description="RHC Exhaust MS8 Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330238095" eventClear="2330238095" />
- <ALID id="330238096" logicalName="PM1.WarningLowLimit.AI_RHCFlow(FL901)" description="RHC flow (FL901) Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330238096" eventClear="2330238096" />
- <ALID id="330238097" logicalName="PM1.WarningLowLimit.AI_ScavengerExhaustMS3" description="Scavenger Exhaust MS3 Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330238097" eventClear="2330238097" />
- <ALID id="330238098" logicalName="PM1.WarningLowLimit.AI_ValveBoxExhaustMS4" description="Valve Box Exhaust MS4 Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330238098" eventClear="2330238098" />
- <ALID id="330238099" logicalName="PM1.WarningLowLimit.AI_VG12AnalogValue" description="VG12 analog value Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330238099" eventClear="2330238099" />
- <ALID id="330238100" logicalName="PM1.WarningLowLimit.AI_VG14AnalogValue" description="VG14 analog value Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330238100" eventClear="2330238100" />
- <ALID id="330238101" logicalName="PM1.WarningLowLimit.AI_GaslineHeater53PV" description="Gasline heater53 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330238101" eventClear="2330238101" />
- <ALID id="330238102" logicalName="PM1.WarningLowLimit.AI_GaslineHeater55PV" description="Gasline heater55 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330238102" eventClear="2330238102" />
- <ALID id="330238103" logicalName="PM1.WarningLowLimit.AI_GaslineHeater56PV" description="Gasline heater56 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330238103" eventClear="2330238103" />
- <ALID id="330238104" logicalName="PM1.WarningLowLimit.AI_GaslineHeater57PV" description="Gasline heater57 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330238104" eventClear="2330238104" />
- <ALID id="330238105" logicalName="PM1.WarningLowLimit.AI_GaslineHeater58PV" description="Gasline heater58 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330238105" eventClear="2330238105" />
- <ALID id="330238106" logicalName="PM1.WarningLowLimit.AI_GaslineHeater59PV" description="Gasline heater59 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330238106" eventClear="2330238106" />
- <ALID id="330238107" logicalName="PM1.WarningLowLimit.AI_GaslineHeater60PV" description="Gasline heater60 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330238107" eventClear="2330238107" />
- <ALID id="330238108" logicalName="PM1.WarningLowLimit.AI_GaslineHeater61PV" description="Gasline heater61 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330238108" eventClear="2330238108" />
- <ALID id="330238109" logicalName="PM1.WarningLowLimit.AI_GaslineHeater62PV" description="Gasline heater62 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330238109" eventClear="2330238109" />
- <ALID id="330238110" logicalName="PM1.WarningLowLimit.AI_GaslineHeater54PV" description="Gasline heater54 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330238110" eventClear="2330238110" />
- <ALID id="330238111" logicalName="PM1.WarningLowLimit.AI_GaslineHeater63PV" description="Gasline heater63 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330238111" eventClear="2330238111" />
- <ALID id="330238112" logicalName="PM1.WarningLowLimit.AI_GaslineHeater64PV" description="Gasline heater64 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330238112" eventClear="2330238112" />
- <ALID id="330238113" logicalName="PM1.WarningLowLimit.AI_Unit1CH10PV" description="Unit1-CH10 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330238113" eventClear="2330238113" />
- <ALID id="330238114" logicalName="PM1.WarningLowLimit.AI_Unit1CH11PV" description="Unit1-CH11 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330238114" eventClear="2330238114" />
- <ALID id="330238115" logicalName="PM1.WarningLowLimit.AI_Unit1CH12PV" description="Unit1-CH12 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330238115" eventClear="2330238115" />
- <ALID id="330238116" logicalName="PM1.WarningLowLimit.AI_Unit1CH13PV" description="Unit1-CH13 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330238116" eventClear="2330238116" />
- <ALID id="330238117" logicalName="PM1.WarningLowLimit.AI_Unit1CH14PV" description="Unit1-CH14 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330238117" eventClear="2330238117" />
- <ALID id="330238118" logicalName="PM1.WarningLowLimit.AI_Unit1CH15PV" description="Unit1-CH15 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330238118" eventClear="2330238118" />
- <ALID id="330238119" logicalName="PM1.WarningLowLimit.AI_Unit1CH16PV" description="Unit1-CH16 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330238119" eventClear="2330238119" />
- <ALID id="330238120" logicalName="PM1.WarningLowLimit.AI_Unit1CH1PV" description="Unit1-CH1 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330238120" eventClear="2330238120" />
- <ALID id="330238121" logicalName="PM1.WarningLowLimit.AI_Unit1CH2PV" description="Unit1-CH2 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330238121" eventClear="2330238121" />
- <ALID id="330238122" logicalName="PM1.WarningLowLimit.AI_Unit1CH3PV" description="Unit1-CH3 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330238122" eventClear="2330238122" />
- <ALID id="330238123" logicalName="PM1.WarningLowLimit.AI_Unit1CH4PV" description="Unit1-CH4 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330238123" eventClear="2330238123" />
- <ALID id="330238124" logicalName="PM1.WarningLowLimit.AI_Unit1CH5PV" description="Unit1-CH5 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330238124" eventClear="2330238124" />
- <ALID id="330238125" logicalName="PM1.WarningLowLimit.AI_Unit1CH6PV" description="Unit1-CH6 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330238125" eventClear="2330238125" />
- <ALID id="330238126" logicalName="PM1.WarningLowLimit.AI_Unit1CH7PV" description="Unit1-CH7 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330238126" eventClear="2330238126" />
- <ALID id="330238127" logicalName="PM1.WarningLowLimit.AI_Unit1CH8PV" description="Unit1-CH8 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330238127" eventClear="2330238127" />
- <ALID id="330238128" logicalName="PM1.WarningLowLimit.AI_Unit1CH9PV" description="Unit1-CH9 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330238128" eventClear="2330238128" />
- <ALID id="330238129" logicalName="PM1.WarningLowLimit.AI_Unit2CH10PV" description="Unit2-CH10 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330238129" eventClear="2330238129" />
- <ALID id="330238130" logicalName="PM1.WarningLowLimit.AI_Unit2CH11PV" description="Unit2-CH11 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330238130" eventClear="2330238130" />
- <ALID id="330238131" logicalName="PM1.WarningLowLimit.AI_Unit2CH12PV" description="Unit2-CH12 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330238131" eventClear="2330238131" />
- <ALID id="330238132" logicalName="PM1.WarningLowLimit.AI_Unit2CH13PV" description="Unit2-CH13 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330238132" eventClear="2330238132" />
- <ALID id="330238133" logicalName="PM1.WarningLowLimit.AI_Unit2CH14PV" description="Unit2-CH14 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330238133" eventClear="2330238133" />
- <ALID id="330238134" logicalName="PM1.WarningLowLimit.AI_Unit2CH15PV" description="Unit2-CH15 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330238134" eventClear="2330238134" />
- <ALID id="330238135" logicalName="PM1.WarningLowLimit.AI_Unit2CH16PV" description="Unit2-CH16 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330238135" eventClear="2330238135" />
- <ALID id="330238136" logicalName="PM1.WarningLowLimit.AI_Unit2CH1PV" description="Unit2-CH1 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330238136" eventClear="2330238136" />
- <ALID id="330238137" logicalName="PM1.WarningLowLimit.AI_Unit2CH2PV" description="Unit2-CH2 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330238137" eventClear="2330238137" />
- <ALID id="330238138" logicalName="PM1.WarningLowLimit.AI_Unit2CH3PV" description="Unit2-CH3 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330238138" eventClear="2330238138" />
- <ALID id="330238139" logicalName="PM1.WarningLowLimit.AI_Unit2CH4PV" description="Unit2-CH4 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330238139" eventClear="2330238139" />
- <ALID id="330238140" logicalName="PM1.WarningLowLimit.AI_Unit2CH5PV" description="Unit2-CH5 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330238140" eventClear="2330238140" />
- <ALID id="330238141" logicalName="PM1.WarningLowLimit.AI_Unit2CH6PV" description="Unit2-CH6 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330238141" eventClear="2330238141" />
- <ALID id="330238142" logicalName="PM1.WarningLowLimit.AI_Unit2CH7PV" description="Unit2-CH7 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330238142" eventClear="2330238142" />
- <ALID id="330238143" logicalName="PM1.WarningLowLimit.AI_Unit2CH8PV" description="Unit2-CH8 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330238143" eventClear="2330238143" />
- <ALID id="330238144" logicalName="PM1.WarningLowLimit.AI_Unit2CH9PV" description="Unit2-CH9 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330238144" eventClear="2330238144" />
- <ALID id="330238145" logicalName="PM1.WarningLowLimit.AI_Unit3CH10PV" description="Unit3-CH10 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330238145" eventClear="2330238145" />
- <ALID id="330238146" logicalName="PM1.WarningLowLimit.AI_Unit3CH11PV" description="Unit3-CH11 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330238146" eventClear="2330238146" />
- <ALID id="330238147" logicalName="PM1.WarningLowLimit.AI_Unit3CH12PV" description="Unit3-CH12 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330238147" eventClear="2330238147" />
- <ALID id="330238148" logicalName="PM1.WarningLowLimit.AI_Unit3CH13PV" description="Unit3-CH13 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330238148" eventClear="2330238148" />
- <ALID id="330238149" logicalName="PM1.WarningLowLimit.AI_Unit3CH14PV" description="Unit3-CH14 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330238149" eventClear="2330238149" />
- <ALID id="330238150" logicalName="PM1.WarningLowLimit.AI_Unit3CH15PV" description="Unit3-CH15 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330238150" eventClear="2330238150" />
- <ALID id="330238151" logicalName="PM1.WarningLowLimit.AI_Unit3CH16PV" description="Unit3-CH16 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330238151" eventClear="2330238151" />
- <ALID id="330238152" logicalName="PM1.WarningLowLimit.AI_Unit3CH1PV" description="Unit3-CH1 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330238152" eventClear="2330238152" />
- <ALID id="330238153" logicalName="PM1.WarningLowLimit.AI_Unit3CH2PV" description="Unit3-CH2 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330238153" eventClear="2330238153" />
- <ALID id="330238154" logicalName="PM1.WarningLowLimit.AI_Unit3CH3PV" description="Unit3-CH3 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330238154" eventClear="2330238154" />
- <ALID id="330238155" logicalName="PM1.WarningLowLimit.AI_Unit3CH4PV" description="Unit3-CH4 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330238155" eventClear="2330238155" />
- <ALID id="330238156" logicalName="PM1.WarningLowLimit.AI_Unit3CH5PV" description="Unit3-CH5 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330238156" eventClear="2330238156" />
- <ALID id="330238157" logicalName="PM1.WarningLowLimit.AI_Unit3CH6PV" description="Unit3-CH6 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330238157" eventClear="2330238157" />
- <ALID id="330238158" logicalName="PM1.WarningLowLimit.AI_Unit3CH7PV" description="Unit3-CH7 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330238158" eventClear="2330238158" />
- <ALID id="330238159" logicalName="PM1.WarningLowLimit.AI_Unit3CH8PV" description="Unit3-CH8 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330238159" eventClear="2330238159" />
- <ALID id="330238160" logicalName="PM1.WarningLowLimit.AI_Unit3CH9PV" description="Unit3-CH9 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330238160" eventClear="2330238160" />
- <ALID id="330238161" logicalName="PM1.WarningLowLimit.AI_Unit4CH10PV" description="Unit4-CH10 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330238161" eventClear="2330238161" />
- <ALID id="330238162" logicalName="PM1.WarningLowLimit.AI_Unit4CH11PV" description="Unit4-CH11 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330238162" eventClear="2330238162" />
- <ALID id="330238163" logicalName="PM1.WarningLowLimit.AI_Unit4CH12PV" description="Unit4-CH12 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330238163" eventClear="2330238163" />
- <ALID id="330238164" logicalName="PM1.WarningLowLimit.AI_Unit4CH13PV" description="Unit4-CH13 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330238164" eventClear="2330238164" />
- <ALID id="330238165" logicalName="PM1.WarningLowLimit.AI_Unit4CH14PV" description="Unit4-CH14 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330238165" eventClear="2330238165" />
- <ALID id="330238166" logicalName="PM1.WarningLowLimit.AI_Unit4CH15PV" description="Unit4-CH15 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330238166" eventClear="2330238166" />
- <ALID id="330238167" logicalName="PM1.WarningLowLimit.AI_Unit4CH16PV" description="Unit4-CH16 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330238167" eventClear="2330238167" />
- <ALID id="330238168" logicalName="PM1.WarningLowLimit.AI_Unit4CH1PV" description="Unit4-CH1 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330238168" eventClear="2330238168" />
- <ALID id="330238169" logicalName="PM1.WarningLowLimit.AI_Unit4CH2PV" description="Unit4-CH2 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330238169" eventClear="2330238169" />
- <ALID id="330238170" logicalName="PM1.WarningLowLimit.AI_Unit4CH3PV" description="Unit4-CH3 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330238170" eventClear="2330238170" />
- <ALID id="330238171" logicalName="PM1.WarningLowLimit.AI_Unit4CH4PV" description="Unit4-CH4 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330238171" eventClear="2330238171" />
- <ALID id="330238172" logicalName="PM1.WarningLowLimit.AI_Unit4CH5PV" description="Unit4-CH5 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330238172" eventClear="2330238172" />
- <ALID id="330238173" logicalName="PM1.WarningLowLimit.AI_Unit4CH6PV" description="Unit4-CH6 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330238173" eventClear="2330238173" />
- <ALID id="330238174" logicalName="PM1.WarningLowLimit.AI_Unit4CH7PV" description="Unit4-CH7 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330238174" eventClear="2330238174" />
- <ALID id="330238175" logicalName="PM1.WarningLowLimit.AI_Unit4CH8PV" description="Unit4-CH8 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330238175" eventClear="2330238175" />
- <ALID id="330238176" logicalName="PM1.WarningLowLimit.AI_Unit4CH9PV" description="Unit4-CH9 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330238176" eventClear="2330238176" />
- <ALID id="330301001" logicalName="PM1.AlarmLowLimit.AI_WaterFlowREV." description="water flow REV. Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330301001" eventClear="2330301001" />
- <ALID id="330401001" logicalName="PM1.WarningHighLimit.AI_WaterFlowREV." description="water flow REV. High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330401001" eventClear="2330401001" />
- <ALID id="330501001" logicalName="PM1.WarningLowLimit.AI_WaterFlowREV." description="water flow REV. Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330501001" eventClear="2330501001" />
- <ALID id="460217001" logicalName="PM1.APC.ToleranceAlarm" description="" category="EquipmentStatusWarning" enabled="false" eventSet="1460217001" eventClear="2460217001" />
- <ALID id="460217002" logicalName="PM1.APC.ToleranceWarning" description="" category="EquipmentStatusWarning" enabled="false" eventSet="1460217002" eventClear="2460217002" />
- <ALID id="460218001" logicalName="PM1.AutoProfileTimeOutAlarm" description="" category="EquipmentStatusWarning" enabled="false" eventSet="1460218001" eventClear="2460218001" />
- <ALID id="460218002" logicalName="PM1.BoatMoveTimeOutAlarm" description="" category="EquipmentStatusWarning" enabled="false" eventSet="1460218002" eventClear="2460218002" />
- <ALID id="460218003" logicalName="PM1.EmergencyAbort" description="" category="EquipmentStatusWarning" enabled="false" eventSet="1460218003" eventClear="2460218003" />
- <ALID id="460218004" logicalName="PM1.FlowConvergenceTimeOutAlarm" description="" category="EquipmentStatusWarning" enabled="false" eventSet="1460218004" eventClear="2460218004" />
- <ALID id="460218005" logicalName="PM1.InputSignalTimeOutAlarm" description="" category="EquipmentStatusWarning" enabled="false" eventSet="1460218005" eventClear="2460218005" />
- <ALID id="460218006" logicalName="PM1.PressureConvergenceTimeOutAlarm" description="" category="EquipmentStatusWarning" enabled="false" eventSet="1460218006" eventClear="2460218006" />
- <ALID id="460218007" logicalName="PM1.RecipeErrorAlarm" description="" category="EquipmentStatusWarning" enabled="false" eventSet="1460218007" eventClear="2460218007" />
- <ALID id="460218008" logicalName="PM1.RecipeExecutionError" description="" category="EquipmentStatusWarning" enabled="false" eventSet="1460218008" eventClear="2460218008" />
- <ALID id="460218009" logicalName="PM1.RecipeFinishedAbnormallyAlarm" description="" category="EquipmentStatusWarning" enabled="false" eventSet="1460218009" eventClear="2460218009" />
- <ALID id="460218010" logicalName="PM1.TemperatureConvergenceTimeOutAlarm" description="" category="EquipmentStatusWarning" enabled="false" eventSet="1460218010" eventClear="2460218010" />
- <ALID id="460218011" logicalName="PM1.Heater10ToleranceAlarm" description="PM1 heater10 tolerance alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1460218011" eventClear="2460218011" />
- <ALID id="460218012" logicalName="PM1.Heater10ToleranceWarning" description="PM1 heater10 tolerance warning " category="EquipmentStatusWarning" enabled="false" eventSet="1460218012" eventClear="2460218012" />
- <ALID id="460218013" logicalName="PM1.Heater1ToleranceAlarm" description="PM1 heater1 tolerance alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1460218013" eventClear="2460218013" />
- <ALID id="460218014" logicalName="PM1.Heater1ToleranceWarning" description="PM1 heater1 tolerance warning " category="EquipmentStatusWarning" enabled="false" eventSet="1460218014" eventClear="2460218014" />
- <ALID id="460218015" logicalName="PM1.Heater2ToleranceAlarm" description="PM1 heater2 tolerance alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1460218015" eventClear="2460218015" />
- <ALID id="460218016" logicalName="PM1.Heater2ToleranceWarning" description="PM1 heater2 tolerance warning " category="EquipmentStatusWarning" enabled="false" eventSet="1460218016" eventClear="2460218016" />
- <ALID id="460218017" logicalName="PM1.Heater3ToleranceAlarm" description="PM1 heater3 tolerance alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1460218017" eventClear="2460218017" />
- <ALID id="460218018" logicalName="PM1.Heater3ToleranceWarning" description="PM1 heater3 tolerance warning " category="EquipmentStatusWarning" enabled="false" eventSet="1460218018" eventClear="2460218018" />
- <ALID id="460218019" logicalName="PM1.Heater4ToleranceAlarm" description="PM1 heater4 tolerance alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1460218019" eventClear="2460218019" />
- <ALID id="460218020" logicalName="PM1.Heater4ToleranceWarning" description="PM1 heater4 tolerance warning " category="EquipmentStatusWarning" enabled="false" eventSet="1460218020" eventClear="2460218020" />
- <ALID id="460218021" logicalName="PM1.Heater5ToleranceAlarm" description="PM1 heater5 tolerance alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1460218021" eventClear="2460218021" />
- <ALID id="460218022" logicalName="PM1.Heater5ToleranceWarning" description="PM1 heater5 tolerance warning " category="EquipmentStatusWarning" enabled="false" eventSet="1460218022" eventClear="2460218022" />
- <ALID id="460218023" logicalName="PM1.Heater6ToleranceAlarm" description="PM1 heater6 tolerance alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1460218023" eventClear="2460218023" />
- <ALID id="460218024" logicalName="PM1.Heater6ToleranceWarning" description="PM1 heater6 tolerance warning " category="EquipmentStatusWarning" enabled="false" eventSet="1460218024" eventClear="2460218024" />
- <ALID id="460218025" logicalName="PM1.Heater7ToleranceAlarm" description="PM1 heater7 tolerance alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1460218025" eventClear="2460218025" />
- <ALID id="460218026" logicalName="PM1.Heater7ToleranceWarning" description="PM1 heater7 tolerance warning " category="EquipmentStatusWarning" enabled="false" eventSet="1460218026" eventClear="2460218026" />
- <ALID id="460218027" logicalName="PM1.Heater8ToleranceAlarm" description="PM1 heater8 tolerance alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1460218027" eventClear="2460218027" />
- <ALID id="460218028" logicalName="PM1.Heater8ToleranceWarning" description="PM1 heater8 tolerance warning " category="EquipmentStatusWarning" enabled="false" eventSet="1460218028" eventClear="2460218028" />
- <ALID id="460218029" logicalName="PM1.Heater9ToleranceAlarm" description="PM1 heater9 tolerance alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1460218029" eventClear="2460218029" />
- <ALID id="460218030" logicalName="PM1.Heater9ToleranceWarning" description="PM1 heater9 tolerance warning " category="EquipmentStatusWarning" enabled="false" eventSet="1460218030" eventClear="2460218030" />
- <ALID id="460218031" logicalName="PM1.MfcD1ToleranceAlarm" description="PM1 mfcD1 tolerance alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1460218031" eventClear="2460218031" />
- <ALID id="460218032" logicalName="PM1.MfcD1ToleranceWarning" description="PM1 mfcD1 tolerance warning " category="EquipmentStatusWarning" enabled="false" eventSet="1460218032" eventClear="2460218032" />
- <ALID id="460218033" logicalName="PM1.MfcJ1ToleranceAlarm" description="PM1 mfcJ1 tolerance alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1460218033" eventClear="2460218033" />
- <ALID id="460218034" logicalName="PM1.MfcJ1ToleranceWarning" description="PM1 mfcJ1 tolerance warning " category="EquipmentStatusWarning" enabled="false" eventSet="1460218034" eventClear="2460218034" />
- <ALID id="460218035" logicalName="PM1.MfcM1ToleranceAlarm" description="PM1 mfcM1 tolerance alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1460218035" eventClear="2460218035" />
- <ALID id="460218036" logicalName="PM1.MfcM1ToleranceWarning" description="PM1 mfcM1 tolerance warning " category="EquipmentStatusWarning" enabled="false" eventSet="1460218036" eventClear="2460218036" />
- <ALID id="460218037" logicalName="PM1.MfcM2ToleranceAlarm" description="PM1 mfcM2 tolerance alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1460218037" eventClear="2460218037" />
- <ALID id="460218038" logicalName="PM1.MfcM2ToleranceWarning" description="PM1 mfcM2 tolerance warning " category="EquipmentStatusWarning" enabled="false" eventSet="1460218038" eventClear="2460218038" />
- <ALID id="460218039" logicalName="PM1.MfcN1ToleranceAlarm" description="PM1 mfcN1 tolerance alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1460218039" eventClear="2460218039" />
- <ALID id="460218040" logicalName="PM1.MfcN1ToleranceWarning" description="PM1 mfcN1 tolerance warning " category="EquipmentStatusWarning" enabled="false" eventSet="1460218040" eventClear="2460218040" />
- <ALID id="460218041" logicalName="PM1.MfcN2ToleranceAlarm" description="PM1 mfcN2 tolerance alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1460218041" eventClear="2460218041" />
- <ALID id="460218042" logicalName="PM1.MfcN2ToleranceWarning" description="PM1 mfcN2 tolerance warning " category="EquipmentStatusWarning" enabled="false" eventSet="1460218042" eventClear="2460218042" />
- <ALID id="460218043" logicalName="PM1.MfcN3ToleranceAlarm" description="PM1 mfcN3 tolerance alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1460218043" eventClear="2460218043" />
- <ALID id="460218044" logicalName="PM1.MfcN3ToleranceWarning" description="PM1 mfcN3 tolerance warning " category="EquipmentStatusWarning" enabled="false" eventSet="1460218044" eventClear="2460218044" />
- <ALID id="460218045" logicalName="PM1.MfcNRToleranceAlarm" description="PM1 mfcNR tolerance alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1460218045" eventClear="2460218045" />
- <ALID id="460218046" logicalName="PM1.MfcNRToleranceWarning" description="PM1 mfcNR tolerance warning " category="EquipmentStatusWarning" enabled="false" eventSet="1460218046" eventClear="2460218046" />
- <ALID id="460218047" logicalName="PM1.MfcNXToleranceAlarm" description="PM1 mfcNX tolerance alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1460218047" eventClear="2460218047" />
- <ALID id="460218048" logicalName="PM1.MfcNXToleranceWarning" description="PM1 mfcNX tolerance warning " category="EquipmentStatusWarning" enabled="false" eventSet="1460218048" eventClear="2460218048" />
- <ALID id="460218049" logicalName="PM1.MfcNYToleranceAlarm" description="PM1 mfcNY tolerance alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1460218049" eventClear="2460218049" />
- <ALID id="460218050" logicalName="PM1.MfcNYToleranceWarning" description="PM1 mfcNY tolerance warning " category="EquipmentStatusWarning" enabled="false" eventSet="1460218050" eventClear="2460218050" />
- <ALID id="460218051" logicalName="PM1.Mfc11ToleranceAlarm" description="PM1 mfc11 tolerance alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1460218051" eventClear="2460218051" />
- <ALID id="460218052" logicalName="PM1.Mfc11ToleranceWarning" description="PM1 mfc11 tolerance warning " category="EquipmentStatusWarning" enabled="false" eventSet="1460218052" eventClear="2460218052" />
- <ALID id="460218053" logicalName="PM1.Mfc12ToleranceAlarm" description="PM1 mfc12 tolerance alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1460218053" eventClear="2460218053" />
- <ALID id="460218054" logicalName="PM1.Mfc12ToleranceWarning" description="PM1 mfc12 tolerance warning " category="EquipmentStatusWarning" enabled="false" eventSet="1460218054" eventClear="2460218054" />
- <ALID id="460218055" logicalName="PM1.Mfc13ToleranceAlarm" description="PM1 mfc13 tolerance alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1460218055" eventClear="2460218055" />
- <ALID id="460218056" logicalName="PM1.Mfc13ToleranceWarning" description="PM1 mfc13 tolerance warning " category="EquipmentStatusWarning" enabled="false" eventSet="1460218056" eventClear="2460218056" />
- <ALID id="460218057" logicalName="PM1.Mfc14ToleranceAlarm" description="PM1 mfc14 tolerance alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1460218057" eventClear="2460218057" />
- <ALID id="460218058" logicalName="PM1.Mfc14ToleranceWarning" description="PM1 mfc14 tolerance warning " category="EquipmentStatusWarning" enabled="false" eventSet="1460218058" eventClear="2460218058" />
- <ALID id="460218059" logicalName="PM1.Mfc15ToleranceAlarm" description="PM1 mfc15 tolerance alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1460218059" eventClear="2460218059" />
- <ALID id="460218060" logicalName="PM1.Mfc15ToleranceWarning" description="PM1 mfc15 tolerance warning " category="EquipmentStatusWarning" enabled="false" eventSet="1460218060" eventClear="2460218060" />
- <ALID id="460218061" logicalName="PM1.Mfc16ToleranceAlarm" description="PM1 mfc16 tolerance alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1460218061" eventClear="2460218061" />
- <ALID id="460218062" logicalName="PM1.Mfc16ToleranceWarning" description="PM1 mfc16 tolerance warning " category="EquipmentStatusWarning" enabled="false" eventSet="1460218062" eventClear="2460218062" />
- <ALID id="460218063" logicalName="PM1.APCToleranceAlarm" description="PM1 APC tolerance alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1460218063" eventClear="2460218063" />
- <ALID id="460218064" logicalName="PM1.APCToleranceWarning" description="PM1 APC tolerance warning " category="EquipmentStatusWarning" enabled="false" eventSet="1460218064" eventClear="2460218064" />
- <ALID id="460218065" logicalName="PM1.MfmD1ToleranceAlarm" description="PM1 mfmD1 tolerance alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1460218065" eventClear="2460218065" />
- <ALID id="460218066" logicalName="PM1.MfmD1ToleranceWarning" description="PM1 mfmD1 tolerance warning " category="EquipmentStatusWarning" enabled="false" eventSet="1460218066" eventClear="2460218066" />
- <ALID id="460218067" logicalName="PM1.PumpError" description="PM1 pump error " category="EquipmentStatusWarning" enabled="false" eventSet="1460218067" eventClear="2460218067" />
- <ALID id="460218068" logicalName="PM1.PumpExhaustPressureNotOK" description="PM1 pump exhaust pressure not ok " category="EquipmentStatusWarning" enabled="false" eventSet="1460218068" eventClear="2460218068" />
- <ALID id="460218069" logicalName="PM1.PumpN2NotOK" description="PM1 pump N2 not ok " category="EquipmentStatusWarning" enabled="false" eventSet="1460218069" eventClear="2460218069" />
- <ALID id="460218070" logicalName="PM1.PumpOverload" description="PM1 pump overload " category="EquipmentStatusWarning" enabled="false" eventSet="1460218070" eventClear="2460218070" />
- <ALID id="460218071" logicalName="PM1.PumpWarning" description="PM1 pump warning " category="EquipmentStatusWarning" enabled="false" eventSet="1460218071" eventClear="2460218071" />
- <ALID id="460218072" logicalName="PM1.VG2PressureToleranceAlarm" description="PM1 VG2 pressure tolerance alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1460218072" eventClear="2460218072" />
- <ALID id="460218073" logicalName="PM1.VG2PressureToleranceWarning" description="PM1 VG2 pressure tolerance warning " category="EquipmentStatusWarning" enabled="false" eventSet="1460218073" eventClear="2460218073" />
- <ALID id="460218074" logicalName="PM1.MainPumpPumpError" description="MainPump error " category="EquipmentStatusWarning" enabled="false" eventSet="1460218074" eventClear="2460218074" />
- <ALID id="460218075" logicalName="PM1.MainPumpPumpExhaustPressureNotOK" description="MainPump exhaust pressure not ok " category="EquipmentStatusWarning" enabled="false" eventSet="1460218075" eventClear="2460218075" />
- <ALID id="460218076" logicalName="PM1.MainPumpPumpN2NotOK" description="MainPump N2 not ok " category="EquipmentStatusWarning" enabled="false" eventSet="1460218076" eventClear="2460218076" />
- <ALID id="460218077" logicalName="PM1.MainPumpPumpOverload" description="MainPump overload " category="EquipmentStatusWarning" enabled="false" eventSet="1460218077" eventClear="2460218077" />
- <ALID id="460218078" logicalName="PM1.MainPumpPumpWarning" description="MainPump warning " category="EquipmentStatusWarning" enabled="false" eventSet="1460218078" eventClear="2460218078" />
- <ALID id="460218079" logicalName="PM1.SensorASWaterFlowOK1Alarm" description="PM1 sensor ASWaterFlowOK1 alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1460218079" eventClear="2460218079" />
- <ALID id="460218080" logicalName="PM1.SensorASWaterFlowOKAlarm" description="PM1 sensor ASWaterFlowOK alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1460218080" eventClear="2460218080" />
- <ALID id="460218081" logicalName="PM1.SensorCAPWaterFlowOK1Alarm" description="PM1 sensor CAPWaterFlowOK1 alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1460218081" eventClear="2460218081" />
- <ALID id="460218082" logicalName="PM1.SensorCAPWaterFlowOKAlarm" description="PM1 sensor CAPWaterFlowOK alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1460218082" eventClear="2460218082" />
- <ALID id="460218083" logicalName="PM1.SensorChamberTempOKAlarm" description="PM1 sensor ChamberTempOK alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1460218083" eventClear="2460218083" />
- <ALID id="460218084" logicalName="PM1.SensorEXHFanOKAlarm" description="PM1 sensor EXHFanOK alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1460218084" eventClear="2460218084" />
- <ALID id="460218085" logicalName="PM1.SensorFNCPanelCloseAlarm" description="PM1 sensor FNCPanelClose alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1460218085" eventClear="2460218085" />
- <ALID id="460218086" logicalName="PM1.SensorFNCWaterLeakDet1OKAlarm" description="PM1 sensor FNCWaterLeakDet1OK alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1460218086" eventClear="2460218086" />
- <ALID id="460218087" logicalName="PM1.SensorFNCWaterLeakDet2OKAlarm" description="PM1 sensor FNCWaterLeakDet2OK alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1460218087" eventClear="2460218087" />
- <ALID id="460218088" logicalName="PM1.SensorGASDetectorOKAlarm" description="PM1 sensor GASDetectorOK alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1460218088" eventClear="2460218088" />
- <ALID id="460218089" logicalName="PM1.SensorGasLineTHTempOKAlarm" description="PM1 sensor GasLineTHTempOK alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1460218089" eventClear="2460218089" />
- <ALID id="460218090" logicalName="PM1.SensorGUExhaustOKAlarm" description="PM1 sensor GUExhaustOK alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1460218090" eventClear="2460218090" />
- <ALID id="460218091" logicalName="PM1.SensorHeaterBreakOKAlarm" description="PM1 sensor HeaterBreakOK alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1460218091" eventClear="2460218091" />
- <ALID id="460218092" logicalName="PM1.SensorHeaterControllerOKAlarm" description="PM1 sensor HeaterControllerOK alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1460218092" eventClear="2460218092" />
- <ALID id="460218093" logicalName="PM1.SensorHeaterEXHOKAlarm" description="PM1 sensor HeaterEXHOK alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1460218093" eventClear="2460218093" />
- <ALID id="460218094" logicalName="PM1.SensorHeaterMCONAlarm" description="PM1 sensor HeaterMCON alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1460218094" eventClear="2460218094" />
- <ALID id="460218095" logicalName="PM1.SensorHeaterTempOKAlarm" description="PM1 sensor HeaterTempOK alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1460218095" eventClear="2460218095" />
- <ALID id="460218096" logicalName="PM1.SensorHeaterTransTempOKAlarm" description="PM1 sensor HeaterTransTempOK alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1460218096" eventClear="2460218096" />
- <ALID id="460218097" logicalName="PM1.SensorHeaterWaterFlowOK1Alarm" description="PM1 sensor HeaterWaterFlowOK1 alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1460218097" eventClear="2460218097" />
- <ALID id="460218098" logicalName="PM1.SensorHeaterWaterFlowOKAlarm" description="PM1 sensor HeaterWaterFlowOK alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1460218098" eventClear="2460218098" />
- <ALID id="460218099" logicalName="PM1.SensorHECDoorClosedAlarm" description="PM1 sensor HECDoorClosed alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1460218099" eventClear="2460218099" />
- <ALID id="460218100" logicalName="PM1.SensorHECTempOKAlarm" description="PM1 sensor HECTempOK alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1460218100" eventClear="2460218100" />
- <ALID id="460218101" logicalName="PM1.SensorHECWaterLeakDetectOKAlarm" description="PM1 sensor HECWaterLeakDetectOK alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1460218101" eventClear="2460218101" />
- <ALID id="460218102" logicalName="PM1.SensorHECWaterLevelOKAlarm" description="PM1 sensor HECWaterLevelOK alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1460218102" eventClear="2460218102" />
- <ALID id="460218103" logicalName="PM1.SensorHTRCUPowerONAlarm" description="PM1 sensor HTRCUPowerON alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1460218103" eventClear="2460218103" />
- <ALID id="460218104" logicalName="PM1.SensorLV1PressureOKAlarm" description="PM1 sensor LV1PressureOK alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1460218104" eventClear="2460218104" />
- <ALID id="460218105" logicalName="PM1.SensorMFWaterFlowOK1Alarm" description="PM1 sensor MFWaterFlowOK1 alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1460218105" eventClear="2460218105" />
- <ALID id="460218106" logicalName="PM1.SensorMFWaterFlowOKAlarm" description="PM1 sensor MFWaterFlowOK alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1460218106" eventClear="2460218106" />
- <ALID id="460218107" logicalName="PM1.SensorN2OPressureOKAlarm" description="PM1 sensor N2OPressureOK alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1460218107" eventClear="2460218107" />
- <ALID id="460218108" logicalName="PM1.SensorNBPressureOKAlarm" description="PM1 sensor NBPressureOK alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1460218108" eventClear="2460218108" />
- <ALID id="460218109" logicalName="PM1.SensorNH3LeakOKAlarm" description="PM1 sensor NH3LeakOK alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1460218109" eventClear="2460218109" />
- <ALID id="460218110" logicalName="PM1.SensorNH3PressureOKAlarm" description="PM1 sensor NH3PressureOK alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1460218110" eventClear="2460218110" />
- <ALID id="460218111" logicalName="PM1.SensorPipingLineTHTempOKAlarm" description="PM1 sensor PipingLineTHTempOK alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1460218111" eventClear="2460218111" />
- <ALID id="460218112" logicalName="PM1.SensorPSW1LOWAlarm" description="PM1 sensor PSW1LOW alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1460218112" eventClear="2460218112" />
- <ALID id="460218113" logicalName="PM1.SensorPSW2LOWAlarm" description="PM1 sensor PSW2LOW alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1460218113" eventClear="2460218113" />
- <ALID id="460218114" logicalName="PM1.SensorPureN2PressureOKAlarm" description="PM1 sensor PureN2PressureOK alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1460218114" eventClear="2460218114" />
- <ALID id="460218115" logicalName="PM1.SensorSCRFanOKAlarm" description="PM1 sensor SCRFanOK alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1460218115" eventClear="2460218115" />
- <ALID id="460218116" logicalName="PM1.SensorSCRTempOKAlarm" description="PM1 sensor SCRTempOK alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1460218116" eventClear="2460218116" />
- <ALID id="460218117" logicalName="PM1.SensorSCVOKAlarm" description="PM1 sensor SCVOK alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1460218117" eventClear="2460218117" />
- <ALID id="460218118" logicalName="PM1.SensorSiH2Cl2LeakOKAlarm" description="PM1 sensor SiH2Cl2LeakOK alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1460218118" eventClear="2460218118" />
- <ALID id="460218119" logicalName="PM1.SensorSiH2CL2PressureOKAlarm" description="PM1 sensor SiH2CL2PressureOK alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1460218119" eventClear="2460218119" />
- <ALID id="460218120" logicalName="PM1.SensorSpareWaterFlowOK1Alarm" description="PM1 sensor SpareWaterFlowOK1 alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1460218120" eventClear="2460218120" />
- <ALID id="460218121" logicalName="PM1.SensorSpareWaterFlowOKAlarm" description="PM1 sensor SpareWaterFlowOK alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1460218121" eventClear="2460218121" />
- <ALID id="460218122" logicalName="PM1.SensorTHBreakOKAlarm" description="PM1 sensor THBreakOK alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1460218122" eventClear="2460218122" />
- <ALID id="460218123" logicalName="PM1.SensorTHControllerOKAlarm" description="PM1 sensor THControllerOK alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1460218123" eventClear="2460218123" />
- <ALID id="460218124" logicalName="PM1.SensorTHMCONAlarm" description="PM1 sensor THMCON alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1460218124" eventClear="2460218124" />
- <ALID id="460218125" logicalName="PM1.SensorTubeOverPressureAlarm" description="PM1 sensor TubeOverPressure alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1460218125" eventClear="2460218125" />
- <ALID id="460218126" logicalName="PM1.SensorVG1OKAlarm" description="PM1 sensor VG1OK alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1460218126" eventClear="2460218126" />
- <ALID id="460218127" logicalName="PM1.SensorVG2OKAlarm" description="PM1 sensor VG2OK alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1460218127" eventClear="2460218127" />
- <ALID id="460218128" logicalName="PM1.BoatHomeFailedWarning" description="Boat home failed warning " category="EquipmentStatusWarning" enabled="false" eventSet="1460218128" eventClear="2460218128" />
- <ALID id="460218129" logicalName="PM1.CheckCanDoOperationAlarm" description="Check can do operation failed " category="EquipmentStatusWarning" enabled="false" eventSet="1460218129" eventClear="2460218129" />
- <ALID id="460218130" logicalName="PM1.CheckEnableRunProcessAlarm" description="Check enable run process failed " category="EquipmentStatusWarning" enabled="false" eventSet="1460218130" eventClear="2460218130" />
- <ALID id="460218131" logicalName="PM1.CheckHasAlarmWarning" description="Check has alarm warning " category="EquipmentStatusWarning" enabled="false" eventSet="1460218131" eventClear="2460218131" />
- <ALID id="460218132" logicalName="PM1.ExecuteAbortRecipeWarning" description="Execute abort recipe warning " category="EquipmentStatusWarning" enabled="false" eventSet="1460218132" eventClear="2460218132" />
- <ALID id="460218133" logicalName="PM1.PreprocesStartFailedWarning" description="Preproces start failed warning " category="EquipmentStatusWarning" enabled="false" eventSet="1460218133" eventClear="2460218133" />
- <ALID id="460218134" logicalName="PM1.UserDefineInterlockAlarm" description="User define interlock occure alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1460218134" eventClear="2460218134" />
- <ALID id="460218135" logicalName="PM1.PreprocessStartFailedWarning" description="PM1 preprocess start failed " category="EquipmentStatusWarning" enabled="false" eventSet="1460218135" eventClear="2460218135" />
- <ALID id="460218136" logicalName="PM1.TubeHomeFailedWarning" description="PM1 tube home failed " category="EquipmentStatusWarning" enabled="false" eventSet="1460218136" eventClear="2460218136" />
- <ALID id="460218137" logicalName="PM1.SensorFBLightCurtainFaultAlarm" description="FB Light Curtain Fault " category="EquipmentStatusWarning" enabled="false" eventSet="1460218137" eventClear="2460218137" />
- <ALID id="460218138" logicalName="PM1.SensorFBLightCurtainOSSD1Alarm" description="FB Light Curtain OSSD1 Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1460218138" eventClear="2460218138" />
- <ALID id="460218139" logicalName="PM1.SensorFBLightCurtainOSSD2Alarm" description="FB Light Curtain OSSD2 Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1460218139" eventClear="2460218139" />
- <ALID id="460218140" logicalName="PM1.InterlockAlarm" description="Interlock occure alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1460218140" eventClear="2460218140" />
- <ALID id="460218141" logicalName="PM1.AlarmSignalHCLGasLeak1stAlarm" description="HCL Gas Leak 1st Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1460218141" eventClear="2460218141" />
- <ALID id="460218142" logicalName="PM1.AlarmSignalHCLGasLeak2ndAlarm" description="HCL Gas Leak 2nd Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1460218142" eventClear="2460218142" />
- <ALID id="460218143" logicalName="PM1.AlarmSignalNH3GasLeak1stAlarm" description="NH3 Gas Leak 1stTriger " category="EquipmentStatusWarning" enabled="false" eventSet="1460218143" eventClear="2460218143" />
- <ALID id="460218144" logicalName="PM1.AlarmSignalNH3GasLeak2ndAlarm" description="NH3 Gas Leak 2ndTriger " category="EquipmentStatusWarning" enabled="false" eventSet="1460218144" eventClear="2460218144" />
- <ALID id="460218145" logicalName="PM1.AlarmSignalO2ConcentrationEcho1" description="O2 Concentration Echo1 Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1460218145" eventClear="2460218145" />
- <ALID id="460218146" logicalName="PM1.AlarmSignalO2ConcentrationEcho2" description="O2 Concentration Echo2 Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1460218146" eventClear="2460218146" />
- <ALID id="460218147" logicalName="PM1.AlarmSignalO2ConcentrationHI" description="O2 Concentration High Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1460218147" eventClear="2460218147" />
- <ALID id="460218148" logicalName="PM1.AlarmSignalO2ConcentrationLow" description="O2 Concentration Low Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1460218148" eventClear="2460218148" />
- <ALID id="460218149" logicalName="PM1.AlarmSignalAirFlowFL70" description="Air Flow FL70 Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1460218149" eventClear="2460218149" />
- <ALID id="460218150" logicalName="PM1.AlarmSignalAirFlowFL71" description="Air Flow FL71 Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1460218150" eventClear="2460218150" />
- <ALID id="460218151" logicalName="PM1.AlarmSignalAirFlowFL72" description="Air Flow FL72 Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1460218151" eventClear="2460218151" />
- <ALID id="460218152" logicalName="PM1.AlarmSignalBoatLiftMotorHardwareInterlockAlarm" description="Boat Lift Motor Hardware Interlock Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1460218152" eventClear="2460218152" />
- <ALID id="460218153" logicalName="PM1.AlarmSignalBufferMotorHardwareInterlockAlarm" description="Buffer Motor Hardware Interlock Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1460218153" eventClear="2460218153" />
- <ALID id="460218154" logicalName="PM1.AlarmSignalCoolingWaterLeak" description="Cooling Water Leak Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1460218154" eventClear="2460218154" />
- <ALID id="460218155" logicalName="PM1.AlarmSignalCoolingWaterPressureOut1" description="Cooling Water Pressure Out1 Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1460218155" eventClear="2460218155" />
- <ALID id="460218156" logicalName="PM1.AlarmSignalCoolingWaterPressureOut2" description="Cooling Water Pressure Out2 Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1460218156" eventClear="2460218156" />
- <ALID id="460218157" logicalName="PM1.AlarmSignalDoorOverride" description="Door Override Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1460218157" eventClear="2460218157" />
- <ALID id="460218158" logicalName="PM1.AlarmSignalEXHBoxWaterLeak" description="EXH Box Water Leak Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1460218158" eventClear="2460218158" />
- <ALID id="460218159" logicalName="PM1.AlarmSignalF2GasLeak1stAlarm" description="F2 Gas Leak 1st Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1460218159" eventClear="2460218159" />
- <ALID id="460218160" logicalName="PM1.AlarmSignalF2GasLeak2ndAlarm" description="F2 Gas Leak 2nd Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1460218160" eventClear="2460218160" />
- <ALID id="460218161" logicalName="PM1.AlarmSignalFBEMO1" description="FB EMO1 Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1460218161" eventClear="2460218161" />
- <ALID id="460218162" logicalName="PM1.AlarmSignalFBEMO2" description="FB EMO2 Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1460218162" eventClear="2460218162" />
- <ALID id="460218163" logicalName="PM1.AlarmSignalFBFrontDoorSwitch" description="FB Front Door Switch Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1460218163" eventClear="2460218163" />
- <ALID id="460218164" logicalName="PM1.AlarmSignalFilterBox1Fan1Alarm" description="Filter Box1 Fan1 Alarm Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1460218164" eventClear="2460218164" />
- <ALID id="460218165" logicalName="PM1.AlarmSignalFilterBox1Fan2Alarm" description="Filter Box1 Fan2 Alarm Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1460218165" eventClear="2460218165" />
- <ALID id="460218166" logicalName="PM1.AlarmSignalForelineHeaterJacketHeavyAlarm" description="Foreline Heater Jacket Heavy Alarm Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1460218166" eventClear="2460218166" />
- <ALID id="460218167" logicalName="PM1.AlarmSignalForelineHeaterJacketLightAlarm" description="Foreline Heater Jacket Light Alarm Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1460218167" eventClear="2460218167" />
- <ALID id="460218168" logicalName="PM1.AlarmSignalFrontBodyExhaust1stAlarmMS6" description="Front Body Exhaust 1st Alarm MS6 Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1460218168" eventClear="2460218168" />
- <ALID id="460218169" logicalName="PM1.AlarmSignalFrontBodyExhaust2ndAlarmMS6" description="Front Body Exhaust 2nd Alarm MS6 Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1460218169" eventClear="2460218169" />
- <ALID id="460218170" logicalName="PM1.AlarmSignalFurnaceBacksideDoor" description="Furnace Backside Door Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1460218170" eventClear="2460218170" />
- <ALID id="460218171" logicalName="PM1.AlarmSignalGasBoxExhaust1stAlarmMS2" description="Gas Box Exhaust 1st Alarm MS2 Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1460218171" eventClear="2460218171" />
- <ALID id="460218172" logicalName="PM1.AlarmSignalGasBoxExhaust2ndAlarmMS2" description="Gas Box Exhaust 2nd Alarm MS2 Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1460218172" eventClear="2460218172" />
- <ALID id="460218173" logicalName="PM1.AlarmSignalGasBoxLowerDoorSW" description="Gas Box Lower Door Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1460218173" eventClear="2460218173" />
- <ALID id="460218174" logicalName="PM1.AlarmSignalGasBoxUpperDoorSW" description="Gas Box Upper Door Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1460218174" eventClear="2460218174" />
- <ALID id="460218175" logicalName="PM1.AlarmSignalGasLeakFault" description="Gas Leak Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1460218175" eventClear="2460218175" />
- <ALID id="460218176" logicalName="PM1.AlarmSignalGLBoxPG1CNT1Alarm" description="GL Box PG1 CNT1 Alarm Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1460218176" eventClear="2460218176" />
- <ALID id="460218177" logicalName="PM1.AlarmSignalGLBoxPG1CNT2Alarm" description="GL Box PG1 CNT2 Alarm Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1460218177" eventClear="2460218177" />
- <ALID id="460218178" logicalName="PM1.AlarmSignalGLBoxPG2CNT1Alarm" description="GL Box PG2 CNT1 Alarm Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1460218178" eventClear="2460218178" />
- <ALID id="460218179" logicalName="PM1.AlarmSignalGLBoxPG2CNT2Alarm" description="GL Box PG2 CNT2 Alarm Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1460218179" eventClear="2460218179" />
- <ALID id="460218180" logicalName="PM1.AlarmSignalGLBoxPG3CNT1Alarm" description="GL Box PG3 CNT1 Alarm Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1460218180" eventClear="2460218180" />
- <ALID id="460218181" logicalName="PM1.AlarmSignalGLBoxPG3CNT2Alarm" description="GL Box PG3 CNT2 Alarm Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1460218181" eventClear="2460218181" />
- <ALID id="460218182" logicalName="PM1.AlarmSignalGLBoxPG4CNT1Alarm" description="GL Box PG4 CNT1 Alarm Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1460218182" eventClear="2460218182" />
- <ALID id="460218183" logicalName="PM1.AlarmSignalGLBoxPG4CNT2Alarm" description="GL Box PG4 CNT2 Alarm Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1460218183" eventClear="2460218183" />
- <ALID id="460218184" logicalName="PM1.AlarmSignalGLBoxPG5CNT1Alarm" description="GL Box PG5 CNT1 Alarm Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1460218184" eventClear="2460218184" />
- <ALID id="460218185" logicalName="PM1.AlarmSignalGLBoxPG5CNT2Alarm" description="GL Box PG5 CNT2 Alarm Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1460218185" eventClear="2460218185" />
- <ALID id="460218186" logicalName="PM1.AlarmSignalGLBoxPG6CNT1Alarm" description="GL Box PG6 CNT1 Alarm Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1460218186" eventClear="2460218186" />
- <ALID id="460218187" logicalName="PM1.AlarmSignalGLBoxPG6CNT2Alarm" description="GL Box PG6 CNT2 Alarm Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1460218187" eventClear="2460218187" />
- <ALID id="460218188" logicalName="PM1.AlarmSignalGLBoxVG21Output1" description="GL Box VG21 Output1 Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1460218188" eventClear="2460218188" />
- <ALID id="460218189" logicalName="PM1.AlarmSignalGLBoxVG21Output2" description="GL Box VG21 Output2 Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1460218189" eventClear="2460218189" />
- <ALID id="460218190" logicalName="PM1.AlarmSignalGLBoxVG21Status" description="GL Box VG21 Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1460218190" eventClear="2460218190" />
- <ALID id="460218191" logicalName="PM1.AlarmSignalGLBoxVG22Output1" description="GL Box VG22 Output1 Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1460218191" eventClear="2460218191" />
- <ALID id="460218192" logicalName="PM1.AlarmSignalGLBoxVG22Output2" description="GL Box VG22 Output2 Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1460218192" eventClear="2460218192" />
- <ALID id="460218193" logicalName="PM1.AlarmSignalGLBoxVG22Status" description="GL Box VG22 Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1460218193" eventClear="2460218193" />
- <ALID id="460218194" logicalName="PM1.AlarmSignalHeaterBacksidePanelSWS112" description="Heater Backside Panel SW S112 Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1460218194" eventClear="2460218194" />
- <ALID id="460218195" logicalName="PM1.AlarmSignalHeaterRoomSWS11S12" description="Heater Room SW S11 S12 Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1460218195" eventClear="2460218195" />
- <ALID id="460218196" logicalName="PM1.AlarmSignalHeatingExhaust1stAlarmMS1" description="Heating Exhaust 1st Alarm MS1 Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1460218196" eventClear="2460218196" />
- <ALID id="460218197" logicalName="PM1.AlarmSignalHeatingExhaust2ndAlarmMS1" description="Heating Exhaust 2nd Alarm MS1 Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1460218197" eventClear="2460218197" />
- <ALID id="460218198" logicalName="PM1.AlarmSignalHFReconciliationPressureMinAbnormal" description="HF Reconciliation Pressure Min Abnormal Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1460218198" eventClear="2460218198" />
- <ALID id="460218199" logicalName="PM1.AlarmSignalLAExhaust1stAlarmMS7" description="L/A Exhaust 1st Alarm MS7 Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1460218199" eventClear="2460218199" />
- <ALID id="460218200" logicalName="PM1.AlarmSignalLAExhaust2ndAlarmMS7" description="L/A Exhaust 2nd Alarm MS7 Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1460218200" eventClear="2460218200" />
- <ALID id="460218201" logicalName="PM1.AlarmSignalLoadingAreaExhaust1stAlarmMS5" description="Loading Area Exhaust 1st Alarm MS5 Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1460218201" eventClear="2460218201" />
- <ALID id="460218202" logicalName="PM1.AlarmSignalLoadingAreaExhaust2ndAlarmMS5" description="Loading Area Exhaust 2nd Alarm MS5 Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1460218202" eventClear="2460218202" />
- <ALID id="460218203" logicalName="PM1.AlarmSignalMachineEMO1" description="Machine EMO1 Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1460218203" eventClear="2460218203" />
- <ALID id="460218204" logicalName="PM1.AlarmSignalMachineEMO2" description="Machine EMO2 Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1460218204" eventClear="2460218204" />
- <ALID id="460218205" logicalName="PM1.AlarmSignalMachineEMS1" description="Machine EMS1 Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1460218205" eventClear="2460218205" />
- <ALID id="460218206" logicalName="PM1.AlarmSignalMachineEMS2" description="Machine EMS2 Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1460218206" eventClear="2460218206" />
- <ALID id="460218207" logicalName="PM1.AlarmSignalMagneticFluidLeak" description="Magnetic Fluid Leak Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1460218207" eventClear="2460218207" />
- <ALID id="460218208" logicalName="PM1.AlarmSignalMainFurnaceCellingTS306" description="Main Furnace Celling TS306 Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1460218208" eventClear="2460218208" />
- <ALID id="460218209" logicalName="PM1.AlarmSignalN2PurgeBOXPG14CNT1" description="N2 Purge BOX PG14 CNT1 Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1460218209" eventClear="2460218209" />
- <ALID id="460218210" logicalName="PM1.AlarmSignalN2PurgeBOXPG14CNT2" description="N2 Purge BOX PG14 CNT2 Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1460218210" eventClear="2460218210" />
- <ALID id="460218211" logicalName="PM1.AlarmSignalN2PurgeBOXPG15CNT1" description="N2 Purge BOX PG15 CNT1 Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1460218211" eventClear="2460218211" />
- <ALID id="460218212" logicalName="PM1.AlarmSignalN2PurgeBOXPG15CNT2" description="N2 Purge BOX PG15 CNT2 Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1460218212" eventClear="2460218212" />
- <ALID id="460218213" logicalName="PM1.AlarmSignalN2PurgeBOXPG16CNT1" description="N2 Purge BOX PG16 CNT1 Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1460218213" eventClear="2460218213" />
- <ALID id="460218214" logicalName="PM1.AlarmSignalN2PurgeBOXPG16CNT2" description="N2 Purge BOX PG16 CNT2 Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1460218214" eventClear="2460218214" />
- <ALID id="460218215" logicalName="PM1.AlarmSignalN2PurgeBOXPG70CNT1" description="N2 Purge BOX PG70 CNT1 Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1460218215" eventClear="2460218215" />
- <ALID id="460218216" logicalName="PM1.AlarmSignalN2PurgeBOXPG70CNT2" description="N2 Purge BOX PG70 CNT2 Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1460218216" eventClear="2460218216" />
- <ALID id="460218217" logicalName="PM1.AlarmSignalOPBoxPS11Out1" description="OP Box PS11 Out1 Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1460218217" eventClear="2460218217" />
- <ALID id="460218218" logicalName="PM1.AlarmSignalOPBoxPS11Out2" description="OP Box PS11 Out2 Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1460218218" eventClear="2460218218" />
- <ALID id="460218219" logicalName="PM1.AlarmSignalOPPanelEMO1" description="OP Panel EMO1 Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1460218219" eventClear="2460218219" />
- <ALID id="460218220" logicalName="PM1.AlarmSignalOPPanelEMO2" description="OP Panel EMO2 Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1460218220" eventClear="2460218220" />
- <ALID id="460218221" logicalName="PM1.AlarmSignalPG12OUT1" description="PG12 OUT1 Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1460218221" eventClear="2460218221" />
- <ALID id="460218222" logicalName="PM1.AlarmSignalPG12OUT2" description="PG12 OUT2 Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1460218222" eventClear="2460218222" />
- <ALID id="460218223" logicalName="PM1.AlarmSignalPG13OUT1" description="PG13 OUT1 Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1460218223" eventClear="2460218223" />
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- <ALID id="540015001" logicalName="PM1.MfcNY.ToleranceWarning" description="" category="EquipmentStatusWarning" enabled="false" eventSet="1540015001" eventClear="2540015001" />
- <ALID id="710101001" logicalName="SMIFA.HomeFailAlarm" description="" category="EquipmentStatusWarning" enabled="false" eventSet="1710101001" eventClear="2710101001" />
- <ALID id="710101002" logicalName="SMIFA.HomeTimeoutAlarm" description="" category="EquipmentStatusWarning" enabled="false" eventSet="1710101002" eventClear="2710101002" />
- <ALID id="710101003" logicalName="SMIFA.LoadFailAlarm" description="SMIFA load failed " category="EquipmentStatusWarning" enabled="false" eventSet="1710101003" eventClear="2710101003" />
- <ALID id="710101004" logicalName="SMIFA.LoadJobFailWarning" description="" category="EquipmentStatusWarning" enabled="false" eventSet="1710101004" eventClear="2710101004" />
- <ALID id="710101005" logicalName="SMIFA.LoadTimeoutAlarm" description="" category="EquipmentStatusWarning" enabled="false" eventSet="1710101005" eventClear="2710101005" />
- <ALID id="710101006" logicalName="SMIFA.SMIFNotReadyWarning" description="" category="EquipmentStatusWarning" enabled="false" eventSet="1710101006" eventClear="2710101006" />
- <ALID id="710101007" logicalName="SMIFA.SMIFPodNotPresentWarning" description="" category="EquipmentStatusWarning" enabled="false" eventSet="1710101007" eventClear="2710101007" />
- <ALID id="710101008" logicalName="SMIFA.UnloadFailAlarm" description="" category="EquipmentStatusWarning" enabled="false" eventSet="1710101008" eventClear="2710101008" />
- <ALID id="710101009" logicalName="SMIFA.UnloadTimeoutAlarm" description="" category="EquipmentStatusWarning" enabled="false" eventSet="1710101009" eventClear="2710101009" />
- <ALID id="720101001" logicalName="SMIFB.HomeFailAlarm" description="" category="EquipmentStatusWarning" enabled="false" eventSet="1720101001" eventClear="2720101001" />
- <ALID id="720101002" logicalName="SMIFB.HomeTimeoutAlarm" description="" category="EquipmentStatusWarning" enabled="false" eventSet="1720101002" eventClear="2720101002" />
- <ALID id="720101003" logicalName="SMIFB.LoadFailAlarm" description="SMIFB load failed " category="EquipmentStatusWarning" enabled="false" eventSet="1720101003" eventClear="2720101003" />
- <ALID id="720101004" logicalName="SMIFB.LoadJobFailWarning" description="" category="EquipmentStatusWarning" enabled="false" eventSet="1720101004" eventClear="2720101004" />
- <ALID id="720101005" logicalName="SMIFB.LoadTimeoutAlarm" description="" category="EquipmentStatusWarning" enabled="false" eventSet="1720101005" eventClear="2720101005" />
- <ALID id="720101006" logicalName="SMIFB.SMIFNotReadyWarning" description="" category="EquipmentStatusWarning" enabled="false" eventSet="1720101006" eventClear="2720101006" />
- <ALID id="720101007" logicalName="SMIFB.SMIFPodNotPresentWarning" description="" category="EquipmentStatusWarning" enabled="false" eventSet="1720101007" eventClear="2720101007" />
- <ALID id="720101008" logicalName="SMIFB.UnloadFailAlarm" description="" category="EquipmentStatusWarning" enabled="false" eventSet="1720101008" eventClear="2720101008" />
- <ALID id="720101009" logicalName="SMIFB.UnloadTimeoutAlarm" description="" category="EquipmentStatusWarning" enabled="false" eventSet="1720101009" eventClear="2720101009" />
- <ALID id="730101001" logicalName="CassetteRobot.BladeCassetteNotPresentWarning" description="" category="EquipmentStatusWarning" enabled="false" eventSet="1730101001" eventClear="2730101001" />
- <ALID id="730101002" logicalName="CassetteRobot.BladeCassettePresentWarning" description="" category="EquipmentStatusWarning" enabled="false" eventSet="1730101002" eventClear="2730101002" />
- <ALID id="730101003" logicalName="CassetteRobot.CheckCassetteInformationFailAlarm" description="" category="EquipmentStatusWarning" enabled="false" eventSet="1730101003" eventClear="2730101003" />
- <ALID id="730101004" logicalName="CassetteRobot.CheckLoadFailAlarm" description="" category="EquipmentStatusWarning" enabled="false" eventSet="1730101004" eventClear="2730101004" />
- <ALID id="730101005" logicalName="CassetteRobot.CheckLoadTimeoutAlarm" description="" category="EquipmentStatusWarning" enabled="false" eventSet="1730101005" eventClear="2730101005" />
- <ALID id="730101006" logicalName="CassetteRobot.PickCassetteFailAlarm" description="" category="EquipmentStatusWarning" enabled="false" eventSet="1730101006" eventClear="2730101006" />
- <ALID id="730101007" logicalName="CassetteRobot.PickCassetteTimeoutAlarm" description="" category="EquipmentStatusWarning" enabled="false" eventSet="1730101007" eventClear="2730101007" />
- <ALID id="730101008" logicalName="CassetteRobot.PlaceCassetteFailAlarm" description="" category="EquipmentStatusWarning" enabled="false" eventSet="1730101008" eventClear="2730101008" />
- <ALID id="730101009" logicalName="CassetteRobot.PlaceCassetteTimeoutAlarm" description="" category="EquipmentStatusWarning" enabled="false" eventSet="1730101009" eventClear="2730101009" />
- <ALID id="730101010" logicalName="CassetteRobot.RequestCassettePresentFailAlarm" description="" category="EquipmentStatusWarning" enabled="false" eventSet="1730101010" eventClear="2730101010" />
- <ALID id="730101011" logicalName="CassetteRobot.RequestCassettePresentTimeoutAlarm" description="" category="EquipmentStatusWarning" enabled="false" eventSet="1730101011" eventClear="2730101011" />
- <ALID id="730101012" logicalName="CassetteRobot.RobotExecuteFail" description="" category="EquipmentStatusWarning" enabled="false" eventSet="1730101012" eventClear="2730101012" />
- <ALID id="730101013" logicalName="CassetteRobot.RobotHasError" description="" category="EquipmentStatusWarning" enabled="false" eventSet="1730101013" eventClear="2730101013" />
- <ALID id="730101014" logicalName="CassetteRobot.RobotHomeFailAlarm" description="" category="EquipmentStatusWarning" enabled="false" eventSet="1730101014" eventClear="2730101014" />
- <ALID id="730101015" logicalName="CassetteRobot.RobotHomeTimeoutAlarm" description="" category="EquipmentStatusWarning" enabled="false" eventSet="1730101015" eventClear="2730101015" />
- <ALID id="730101016" logicalName="CassetteRobot.RobotReceiveInvalidPackage" description="" category="EquipmentStatusWarning" enabled="false" eventSet="1730101016" eventClear="2730101016" />
- <ALID id="730101017" logicalName="CassetteRobot.RobotSensorFoundCassetteOnBladeAfterPlaceAlarm" description="" category="EquipmentStatusWarning" enabled="false" eventSet="1730101017" eventClear="2730101017" />
- <ALID id="730101018" logicalName="CassetteRobot.RobotSensorNotFoundCassetteOnBladeAfterPickAlarm" description="" category="EquipmentStatusWarning" enabled="false" eventSet="1730101018" eventClear="2730101018" />
- <ALID id="730101019" logicalName="CassetteRobot.SetServoOnFailAlarm" description="" category="EquipmentStatusWarning" enabled="false" eventSet="1730101019" eventClear="2730101019" />
- <ALID id="730101020" logicalName="CassetteRobot.SetServoOnTimeoutAlarm" description="" category="EquipmentStatusWarning" enabled="false" eventSet="1730101020" eventClear="2730101020" />
- <ALID id="730101021" logicalName="CassetteRobot.SetSpeedFailAlarm" description="" category="EquipmentStatusWarning" enabled="false" eventSet="1730101021" eventClear="2730101021" />
- <ALID id="730101022" logicalName="CassetteRobot.SetSpeedTimeoutAlarm" description="" category="EquipmentStatusWarning" enabled="false" eventSet="1730101022" eventClear="2730101022" />
- <ALID id="730101023" logicalName="CassetteRobot.SetStageValveFailAlarm" description="" category="EquipmentStatusWarning" enabled="false" eventSet="1730101023" eventClear="2730101023" />
- <ALID id="730101024" logicalName="CassetteRobot.SetStageValveTimeout" description="" category="EquipmentStatusWarning" enabled="false" eventSet="1730101024" eventClear="2730101024" />
- <ALID id="730101025" logicalName="CassetteRobot.TargetCassetteNotPresentWarning" description="" category="EquipmentStatusWarning" enabled="false" eventSet="1730101025" eventClear="2730101025" />
- <ALID id="730101026" logicalName="CassetteRobot.TargetCassettePresentWarning" description="" category="EquipmentStatusWarning" enabled="false" eventSet="1730101026" eventClear="2730101026" />
- <ALID id="730101027" logicalName="CassetteRobot.WaferMapFailAlarm" description="" category="EquipmentStatusWarning" enabled="false" eventSet="1730101027" eventClear="2730101027" />
- <ALID id="730101028" logicalName="CassetteRobot.WaferMapTimeout" description="" category="EquipmentStatusWarning" enabled="false" eventSet="1730101028" eventClear="2730101028" />
- <ALID id="730101029" logicalName="CassetteRobot.WaitInCommandTimeout" description="" category="EquipmentStatusWarning" enabled="false" eventSet="1730101029" eventClear="2730101029" />
- <ALID id="730101030" logicalName="CassetteRobot.WaitOutCommandTimeout" description="" category="EquipmentStatusWarning" enabled="false" eventSet="1730101030" eventClear="2730101030" />
- <ALID id="730101031" logicalName="CassetteRobot.WaitPodPrensentChangeTimeout" description="" category="EquipmentStatusWarning" enabled="false" eventSet="1730101031" eventClear="2730101031" />
- <ALID id="730101032" logicalName="CassetteRobot.LoadCassetteFailAlarm" description="CassetteRobot load cassette fail " category="EquipmentStatusWarning" enabled="false" eventSet="1730101032" eventClear="2730101032" />
- <ALID id="730101033" logicalName="CassetteRobot.LoadCassetteMappingFailAlarm" description="CassetteRobot load cassette mapping fail " category="EquipmentStatusWarning" enabled="false" eventSet="1730101033" eventClear="2730101033" />
- <ALID id="730101034" logicalName="CassetteRobot.LoadCassetteTimeoutAlarm" description="CassetteRobot load cassette timeout " category="EquipmentStatusWarning" enabled="false" eventSet="1730101034" eventClear="2730101034" />
- <ALID id="730101035" logicalName="CassetteRobot.UnloadCassetteFailAlarm" description="CassetteRobot unload cassette fail " category="EquipmentStatusWarning" enabled="false" eventSet="1730101035" eventClear="2730101035" />
- <ALID id="730101036" logicalName="CassetteRobot.UnloadCassetteTimeoutAlarm" description="CassetteRobot unload cassette timeout " category="EquipmentStatusWarning" enabled="false" eventSet="1730101036" eventClear="2730101036" />
- <ALID id="730101037" logicalName="CassetteRobot.LoadCassettePauseWarning" description="CassetteRobot load cassette pause warning " category="EquipmentStatusWarning" enabled="false" eventSet="1730101037" eventClear="2730101037" />
- <ALID id="730101038" logicalName="CassetteRobot.LoadCassetteResumeWarning" description="CassetteRobot load cassette resume warning " category="EquipmentStatusWarning" enabled="false" eventSet="1730101038" eventClear="2730101038" />
- <ALID id="730101039" logicalName="CassetteRobot.PickCassettePauseWarning" description="CassetteRobot pick cassette pause warning " category="EquipmentStatusWarning" enabled="false" eventSet="1730101039" eventClear="2730101039" />
- <ALID id="730101040" logicalName="CassetteRobot.PickCassetteResumeWarning" description="CassetteRobot pick cassette resume warning " category="EquipmentStatusWarning" enabled="false" eventSet="1730101040" eventClear="2730101040" />
- <ALID id="730101041" logicalName="CassetteRobot.PlaceCassettePauseWarning" description="CassetteRobot place cassette pause warning " category="EquipmentStatusWarning" enabled="false" eventSet="1730101041" eventClear="2730101041" />
- <ALID id="730101042" logicalName="CassetteRobot.PlaceCassetteResumeWarning" description="CassetteRobot place cassette resume warning " category="EquipmentStatusWarning" enabled="false" eventSet="1730101042" eventClear="2730101042" />
- <ALID id="730101043" logicalName="CassetteRobot.UnoadCassettePauseWarning" description="CassetteRobot unload cassette pause warning " category="EquipmentStatusWarning" enabled="false" eventSet="1730101043" eventClear="2730101043" />
- <ALID id="730101044" logicalName="CassetteRobot.UnoadCassetteResumeWarning" description="CassetteRobot unload cassette resume warning " category="EquipmentStatusWarning" enabled="false" eventSet="1730101044" eventClear="2730101044" />
- <ALID id="950101001" logicalName="FIMS1.HomeFailAlarm" description="FIMS1 home fail reason " category="EquipmentStatusWarning" enabled="false" eventSet="1950101001" eventClear="2950101001" />
- <ALID id="950101002" logicalName="FIMS1.HomeTimeoutAlarm" description="FIMS1 home timeout " category="EquipmentStatusWarning" enabled="false" eventSet="1950101002" eventClear="2950101002" />
- <ALID id="950101003" logicalName="FIMS1.LoadFailAlarm" description="FIMS1 load fail reason " category="EquipmentStatusWarning" enabled="false" eventSet="1950101003" eventClear="2950101003" />
- <ALID id="950101004" logicalName="FIMS1.LoadTimeoutAlarm" description="FIMS1 load timeout " category="EquipmentStatusWarning" enabled="false" eventSet="1950101004" eventClear="2950101004" />
- <ALID id="950101005" logicalName="FIMS1.UnloadFailAlarm" description="FIMS1 unload fail reason " category="EquipmentStatusWarning" enabled="false" eventSet="1950101005" eventClear="2950101005" />
- <ALID id="950101006" logicalName="FIMS1.UnloadTimeoutAlarm" description="FIMS1 unload timeout " category="EquipmentStatusWarning" enabled="false" eventSet="1950101006" eventClear="2950101006" />
- <ALID id="960101001" logicalName="FIMS2.HomeFailAlarm" description="FIMS2 home fail reason " category="EquipmentStatusWarning" enabled="false" eventSet="1960101001" eventClear="2960101001" />
- <ALID id="960101002" logicalName="FIMS2.HomeTimeoutAlarm" description="FIMS2 home timeout " category="EquipmentStatusWarning" enabled="false" eventSet="1960101002" eventClear="2960101002" />
- <ALID id="960101003" logicalName="FIMS2.LoadFailAlarm" description="FIMS2 load fail reason " category="EquipmentStatusWarning" enabled="false" eventSet="1960101003" eventClear="2960101003" />
- <ALID id="960101004" logicalName="FIMS2.LoadTimeoutAlarm" description="FIMS2 load timeout " category="EquipmentStatusWarning" enabled="false" eventSet="1960101004" eventClear="2960101004" />
- <ALID id="960101005" logicalName="FIMS2.UnloadFailAlarm" description="FIMS2 unload fail reason " category="EquipmentStatusWarning" enabled="false" eventSet="1960101005" eventClear="2960101005" />
- <ALID id="960101006" logicalName="FIMS2.UnloadTimeoutAlarm" description="FIMS2 unload timeout " category="EquipmentStatusWarning" enabled="false" eventSet="1960101006" eventClear="2960101006" />
- <ALID id="970101001" logicalName="PM1.ConcentrationO2ToleranceAlarm" description="ConcentrationO2 tolerance alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1970101001" eventClear="2970101001" />
- <ALID id="970101002" logicalName="PM1.ConcentrationO2ToleranceWarning" description="ConcentrationO2 tolerance warning " category="EquipmentStatusWarning" enabled="false" eventSet="1970101002" eventClear="2970101002" />
- <ALID id="970101003" logicalName="PM1.ExhaustBoxExhaustMS4ToleranceAlarm" description="ExhaustBoxExhaustMS4 tolerance alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1970101003" eventClear="2970101003" />
- <ALID id="970101004" logicalName="PM1.ExhaustBoxExhaustMS4ToleranceWarning" description="ExhaustBoxExhaustMS4 tolerance warning " category="EquipmentStatusWarning" enabled="false" eventSet="1970101004" eventClear="2970101004" />
- <ALID id="970101005" logicalName="PM1.FrontBodyExhaustMS6ToleranceAlarm" description="FrontBodyExhaustMS6 tolerance alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1970101005" eventClear="2970101005" />
- <ALID id="970101006" logicalName="PM1.FrontBodyExhaustMS6ToleranceWarning" description="FrontBodyExhaustMS6 tolerance warning " category="EquipmentStatusWarning" enabled="false" eventSet="1970101006" eventClear="2970101006" />
- <ALID id="970101007" logicalName="PM1.GasBoxExhaustMS2ToleranceAlarm" description="GasBoxExhaustMS2 tolerance alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1970101007" eventClear="2970101007" />
- <ALID id="970101008" logicalName="PM1.GasBoxExhaustMS2ToleranceWarning" description="GasBoxExhaustMS2 tolerance warning " category="EquipmentStatusWarning" enabled="false" eventSet="1970101008" eventClear="2970101008" />
- <ALID id="970101009" logicalName="PM1.HeatingExhaustMS1ToleranceAlarm" description="HeatingExhaustMS1 tolerance alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1970101009" eventClear="2970101009" />
- <ALID id="970101010" logicalName="PM1.HeatingExhaustMS1ToleranceWarning" description="HeatingExhaustMS1 tolerance warning " category="EquipmentStatusWarning" enabled="false" eventSet="1970101010" eventClear="2970101010" />
- <ALID id="970101011" logicalName="PM1.LAExhaustMS7ToleranceAlarm" description="LAExhaustMS7 tolerance alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1970101011" eventClear="2970101011" />
- <ALID id="970101012" logicalName="PM1.LAExhaustMS7ToleranceWarning" description="LAExhaustMS7 tolerance warning " category="EquipmentStatusWarning" enabled="false" eventSet="1970101012" eventClear="2970101012" />
- <ALID id="970101013" logicalName="PM1.LoadingAreaExhaustMS5ToleranceAlarm" description="LoadingAreaExhaustMS5 tolerance alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1970101013" eventClear="2970101013" />
- <ALID id="970101014" logicalName="PM1.LoadingAreaExhaustMS5ToleranceWarning" description="LoadingAreaExhaustMS5 tolerance warning " category="EquipmentStatusWarning" enabled="false" eventSet="1970101014" eventClear="2970101014" />
- <ALID id="970101015" logicalName="PM1.N24PurgePressureToleranceAlarm" description="N24PurgePressure tolerance alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1970101015" eventClear="2970101015" />
- <ALID id="970101016" logicalName="PM1.N24PurgePressureToleranceWarning" description="N24PurgePressure tolerance warning " category="EquipmentStatusWarning" enabled="false" eventSet="1970101016" eventClear="2970101016" />
- <ALID id="970101017" logicalName="PM1.N25PurgePressureToleranceAlarm" description="N25PurgePressure tolerance alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1970101017" eventClear="2970101017" />
- <ALID id="970101018" logicalName="PM1.N25PurgePressureToleranceWarning" description="N25PurgePressure tolerance warning " category="EquipmentStatusWarning" enabled="false" eventSet="1970101018" eventClear="2970101018" />
- <ALID id="970101019" logicalName="PM1.N26PurgePressureToleranceAlarm" description="N26PurgePressure tolerance alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1970101019" eventClear="2970101019" />
- <ALID id="970101020" logicalName="PM1.N26PurgePressureToleranceWarning" description="N26PurgePressure tolerance warning " category="EquipmentStatusWarning" enabled="false" eventSet="1970101020" eventClear="2970101020" />
- <ALID id="970101021" logicalName="PM1.N27PurgePressureToleranceAlarm" description="N27PurgePressure tolerance alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1970101021" eventClear="2970101021" />
- <ALID id="970101022" logicalName="PM1.N27PurgePressureToleranceWarning" description="N27PurgePressure tolerance warning " category="EquipmentStatusWarning" enabled="false" eventSet="1970101022" eventClear="2970101022" />
- <ALID id="970101023" logicalName="PM1.O2Detector1ToleranceAlarm" description="O2Detector1 tolerance alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1970101023" eventClear="2970101023" />
- <ALID id="970101024" logicalName="PM1.O2Detector1ToleranceWarning" description="O2Detector1 tolerance warning " category="EquipmentStatusWarning" enabled="false" eventSet="1970101024" eventClear="2970101024" />
- <ALID id="970101025" logicalName="PM1.O2Detector2ToleranceAlarm" description="O2Detector2 tolerance alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1970101025" eventClear="2970101025" />
- <ALID id="970101026" logicalName="PM1.O2Detector2ToleranceWarning" description="O2Detector2 tolerance warning " category="EquipmentStatusWarning" enabled="false" eventSet="1970101026" eventClear="2970101026" />
- <ALID id="970101027" logicalName="PM1.PG12ToleranceAlarm" description="PG12 tolerance alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1970101027" eventClear="2970101027" />
- <ALID id="970101028" logicalName="PM1.PG12ToleranceWarning" description="PG12 tolerance warning " category="EquipmentStatusWarning" enabled="false" eventSet="1970101028" eventClear="2970101028" />
- <ALID id="970101029" logicalName="PM1.PG13ToleranceAlarm" description="PG13 tolerance alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1970101029" eventClear="2970101029" />
- <ALID id="970101030" logicalName="PM1.PG13ToleranceWarning" description="PG13 tolerance warning " category="EquipmentStatusWarning" enabled="false" eventSet="1970101030" eventClear="2970101030" />
- <ALID id="970101031" logicalName="PM1.PG14ToleranceAlarm" description="PG14 tolerance alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1970101031" eventClear="2970101031" />
- <ALID id="970101032" logicalName="PM1.PG14ToleranceWarning" description="PG14 tolerance warning " category="EquipmentStatusWarning" enabled="false" eventSet="1970101032" eventClear="2970101032" />
- <ALID id="970101033" logicalName="PM1.PressureGasBoxUpperVG21ToleranceAlarm" description="PressureGasBoxUpperVG21 tolerance alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1970101033" eventClear="2970101033" />
- <ALID id="970101034" logicalName="PM1.PressureGasBoxUpperVG21ToleranceWarning" description="PressureGasBoxUpperVG21 tolerance warning " category="EquipmentStatusWarning" enabled="false" eventSet="1970101034" eventClear="2970101034" />
- <ALID id="970101035" logicalName="PM1.PressureGasBoxUpperVG22ToleranceAlarm" description="PressureGasBoxUpperVG22 tolerance alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1970101035" eventClear="2970101035" />
- <ALID id="970101036" logicalName="PM1.PressureGasBoxUpperVG22ToleranceWarning" description="PressureGasBoxUpperVG22 tolerance warning " category="EquipmentStatusWarning" enabled="false" eventSet="1970101036" eventClear="2970101036" />
- <ALID id="970101037" logicalName="PM1.PressureGLBoxPG1ToleranceAlarm" description="PressureGLBoxPG1 tolerance alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1970101037" eventClear="2970101037" />
- <ALID id="970101038" logicalName="PM1.PressureGLBoxPG1ToleranceWarning" description="PressureGLBoxPG1 tolerance warning " category="EquipmentStatusWarning" enabled="false" eventSet="1970101038" eventClear="2970101038" />
- <ALID id="970101039" logicalName="PM1.PressureGLBoxPG2ToleranceAlarm" description="PressureGLBoxPG2 tolerance alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1970101039" eventClear="2970101039" />
- <ALID id="970101040" logicalName="PM1.PressureGLBoxPG2ToleranceWarning" description="PressureGLBoxPG2 tolerance warning " category="EquipmentStatusWarning" enabled="false" eventSet="1970101040" eventClear="2970101040" />
- <ALID id="970101041" logicalName="PM1.PressureGLBoxPG3ToleranceAlarm" description="PressureGLBoxPG3 tolerance alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1970101041" eventClear="2970101041" />
- <ALID id="970101042" logicalName="PM1.PressureGLBoxPG3ToleranceWarning" description="PressureGLBoxPG3 tolerance warning " category="EquipmentStatusWarning" enabled="false" eventSet="1970101042" eventClear="2970101042" />
- <ALID id="970101043" logicalName="PM1.PressureGLBoxPG4ToleranceAlarm" description="PressureGLBoxPG4 tolerance alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1970101043" eventClear="2970101043" />
- <ALID id="970101044" logicalName="PM1.PressureGLBoxPG4ToleranceWarning" description="PressureGLBoxPG4 tolerance warning " category="EquipmentStatusWarning" enabled="false" eventSet="1970101044" eventClear="2970101044" />
- <ALID id="970101045" logicalName="PM1.PressureGLBoxPG5ToleranceAlarm" description="PressureGLBoxPG5 tolerance alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1970101045" eventClear="2970101045" />
- <ALID id="970101046" logicalName="PM1.PressureGLBoxPG5ToleranceWarning" description="PressureGLBoxPG5 tolerance warning " category="EquipmentStatusWarning" enabled="false" eventSet="1970101046" eventClear="2970101046" />
- <ALID id="970101047" logicalName="PM1.PressureGLBoxPG6ToleranceAlarm" description="PressureGLBoxPG6 tolerance alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1970101047" eventClear="2970101047" />
- <ALID id="970101048" logicalName="PM1.PressureGLBoxPG6ToleranceWarning" description="PressureGLBoxPG6 tolerance warning " category="EquipmentStatusWarning" enabled="false" eventSet="1970101048" eventClear="2970101048" />
- <ALID id="970101049" logicalName="PM1.PS13ToleranceAlarm" description="PS13 tolerance alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1970101049" eventClear="2970101049" />
- <ALID id="970101050" logicalName="PM1.PS13ToleranceWarning" description="PS13 tolerance warning " category="EquipmentStatusWarning" enabled="false" eventSet="1970101050" eventClear="2970101050" />
- <ALID id="970101051" logicalName="PM1.PT71ToleranceAlarm" description="PT71 tolerance alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1970101051" eventClear="2970101051" />
- <ALID id="970101052" logicalName="PM1.PT71ToleranceWarning" description="PT71 tolerance warning " category="EquipmentStatusWarning" enabled="false" eventSet="1970101052" eventClear="2970101052" />
- <ALID id="970101053" logicalName="PM1.PT80ToleranceAlarm" description="PT80 tolerance alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1970101053" eventClear="2970101053" />
- <ALID id="970101054" logicalName="PM1.PT80ToleranceWarning" description="PT80 tolerance warning " category="EquipmentStatusWarning" enabled="false" eventSet="1970101054" eventClear="2970101054" />
- <ALID id="970101055" logicalName="PM1.RHCExhaustMS8ToleranceAlarm" description="RHCExhaustMS8 tolerance alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1970101055" eventClear="2970101055" />
- <ALID id="970101056" logicalName="PM1.RHCExhaustMS8ToleranceWarning" description="RHCExhaustMS8 tolerance warning " category="EquipmentStatusWarning" enabled="false" eventSet="1970101056" eventClear="2970101056" />
- <ALID id="970101057" logicalName="PM1.ScavengerExhaustMS3ToleranceAlarm" description="ScavengerExhaustMS3 tolerance alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1970101057" eventClear="2970101057" />
- <ALID id="970101058" logicalName="PM1.ScavengerExhaustMS3ToleranceWarning" description="ScavengerExhaustMS3 tolerance warning " category="EquipmentStatusWarning" enabled="false" eventSet="1970101058" eventClear="2970101058" />
- <ALID id="970101059" logicalName="PM1.VG12ToleranceAlarm" description="VG12 tolerance alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1970101059" eventClear="2970101059" />
- <ALID id="970101060" logicalName="PM1.VG12ToleranceWarning" description="VG12 tolerance warning " category="EquipmentStatusWarning" enabled="false" eventSet="1970101060" eventClear="2970101060" />
- <ALID id="970101061" logicalName="PM1.VG14ToleranceAlarm" description="VG14 tolerance alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1970101061" eventClear="2970101061" />
- <ALID id="970101062" logicalName="PM1.VG14ToleranceWarning" description="VG14 tolerance warning " category="EquipmentStatusWarning" enabled="false" eventSet="1970101062" eventClear="2970101062" />
- <ALID id="970101063" logicalName="PM1.WaterFlowFS102ToleranceAlarm" description="WaterFlowFS102 tolerance alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1970101063" eventClear="2970101063" />
- <ALID id="970101064" logicalName="PM1.WaterFlowFS102ToleranceWarning" description="WaterFlowFS102 tolerance warning " category="EquipmentStatusWarning" enabled="false" eventSet="1970101064" eventClear="2970101064" />
- <ALID id="970101065" logicalName="PM1.WaterFlowFS104ToleranceAlarm" description="WaterFlowFS104 tolerance alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1970101065" eventClear="2970101065" />
- <ALID id="970101066" logicalName="PM1.WaterFlowFS104ToleranceWarning" description="WaterFlowFS104 tolerance warning " category="EquipmentStatusWarning" enabled="false" eventSet="1970101066" eventClear="2970101066" />
- <ALID id="970101067" logicalName="PM1.WaterFlowFS105ToleranceAlarm" description="WaterFlowFS105 tolerance alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1970101067" eventClear="2970101067" />
- <ALID id="970101068" logicalName="PM1.WaterFlowFS105ToleranceWarning" description="WaterFlowFS105 tolerance warning " category="EquipmentStatusWarning" enabled="false" eventSet="1970101068" eventClear="2970101068" />
- <ALID id="970101069" logicalName="PM1.WaterFlowFS106ToleranceAlarm" description="WaterFlowFS106 tolerance alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1970101069" eventClear="2970101069" />
- <ALID id="970101070" logicalName="PM1.WaterFlowFS106ToleranceWarning" description="WaterFlowFS106 tolerance warning " category="EquipmentStatusWarning" enabled="false" eventSet="1970101070" eventClear="2970101070" />
- <ALID id="970101071" logicalName="PM1.WaterFlowFS111ToleranceAlarm" description="WaterFlowFS111 tolerance alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1970101071" eventClear="2970101071" />
- <ALID id="970101072" logicalName="PM1.WaterFlowFS111ToleranceWarning" description="WaterFlowFS111 tolerance warning " category="EquipmentStatusWarning" enabled="false" eventSet="1970101072" eventClear="2970101072" />
- <ALID id="970101073" logicalName="PM1.WaterFlowFS116ToleranceAlarm" description="WaterFlowFS116 tolerance alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1970101073" eventClear="2970101073" />
- <ALID id="970101074" logicalName="PM1.WaterFlowFS116ToleranceWarning" description="WaterFlowFS116 tolerance warning " category="EquipmentStatusWarning" enabled="false" eventSet="1970101074" eventClear="2970101074" />
- <ALID id="970101075" logicalName="PM1.VG11ToleranceAlarm" description="VG11 tolerance alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1970101075" eventClear="2970101075" />
- <ALID id="970101076" logicalName="PM1.VG11ToleranceWarning" description="VG11 tolerance warning " category="EquipmentStatusWarning" enabled="false" eventSet="1970101076" eventClear="2970101076" />
- <ALID id="970101077" logicalName="PM1.WaterFlowFL901ToleranceAlarm" description="WaterFlowFL901 tolerance alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1970101077" eventClear="2970101077" />
- <ALID id="970101078" logicalName="PM1.WaterFlowFL901ToleranceWarning" description="WaterFlowFL901 tolerance warning " category="EquipmentStatusWarning" enabled="false" eventSet="1970101078" eventClear="2970101078" />
- <ALID id="970101079" logicalName="PM1.WaterFlowFL902ToleranceAlarm" description="WaterFlowFL902 tolerance alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1970101079" eventClear="2970101079" />
- <ALID id="970101080" logicalName="PM1.WaterFlowFL902ToleranceWarning" description="WaterFlowFL902 tolerance warning " category="EquipmentStatusWarning" enabled="false" eventSet="1970101080" eventClear="2970101080" />
- <ALID id="970101081" logicalName="PM1.WaterFlowFL903ToleranceAlarm" description="WaterFlowFL903 tolerance alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1970101081" eventClear="2970101081" />
- <ALID id="970101082" logicalName="PM1.WaterFlowFL903ToleranceWarning" description="WaterFlowFL903 tolerance warning " category="EquipmentStatusWarning" enabled="false" eventSet="1970101082" eventClear="2970101082" />
- <ALID id="970101083" logicalName="PM1.WaterFlowFL904ToleranceAlarm" description="WaterFlowFL904 tolerance alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1970101083" eventClear="2970101083" />
- <ALID id="970101084" logicalName="PM1.WaterFlowFL904ToleranceWarning" description="WaterFlowFL904 tolerance warning " category="EquipmentStatusWarning" enabled="false" eventSet="1970101084" eventClear="2970101084" />
- <ALID id="970101085" logicalName="PM1.WaterFlowFL905ToleranceAlarm" description="WaterFlowFL905 tolerance alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1970101085" eventClear="2970101085" />
- <ALID id="970101086" logicalName="PM1.WaterFlowFL905ToleranceWarning" description="WaterFlowFL905 tolerance warning " category="EquipmentStatusWarning" enabled="false" eventSet="1970101086" eventClear="2970101086" />
- <ALID id="970101087" logicalName="PM1.WaterFlowFL906ToleranceAlarm" description="WaterFlowFL906 tolerance alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1970101087" eventClear="2970101087" />
- <ALID id="970101088" logicalName="PM1.WaterFlowFL906ToleranceWarning" description="WaterFlowFL906 tolerance warning " category="EquipmentStatusWarning" enabled="false" eventSet="1970101088" eventClear="2970101088" />
- <ALID id="970101089" logicalName="PM1.PS11ToleranceAlarm" description="PS11 tolerance alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1970101089" eventClear="2970101089" />
- <ALID id="970101090" logicalName="PM1.PS11ToleranceWarning" description="PS11 tolerance warning " category="EquipmentStatusWarning" enabled="false" eventSet="1970101090" eventClear="2970101090" />
- <ALID id="970101091" logicalName="PM1.PS17ToleranceAlarm" description="PS17 tolerance alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1970101091" eventClear="2970101091" />
- <ALID id="970101092" logicalName="PM1.PS17ToleranceWarning" description="PS17 tolerance warning " category="EquipmentStatusWarning" enabled="false" eventSet="1970101092" eventClear="2970101092" />
- <ALID id="970101093" logicalName="PM1.AlarmSignalCoolingWaterFlowAlarmOfBoatRotationFL904" description="Cooling Water Flow Alarm Of Boat Rotation FL904 Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1970101093" eventClear="2970101093" />
- <ALID id="970101094" logicalName="PM1.AlarmSignalCoolingWaterFlowAlarmOfFlangeFL905" description="Cooling Water Flow Alarm Of Flang eFL905 Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1970101094" eventClear="2970101094" />
- <ALID id="970101095" logicalName="PM1.AlarmSignalCoolingWaterFlowAlarmOfFurnaceFL902" description="Cooling Water Flow Alarm Of Furnace FL902 Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1970101095" eventClear="2970101095" />
- <ALID id="970101096" logicalName="PM1.AlarmSignalCoolingWaterFlowAlarmOfLoadingAreaFL906" description="Cooling Water Flow Alarm Of Loading Area FL906 Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1970101096" eventClear="2970101096" />
- <ALID id="970101097" logicalName="PM1.AlarmSignalCoolingWaterFlowAlarmOfShuttleFL903" description="Cooling Water Flow Alarm Of Furnace FL903 Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1970101097" eventClear="2970101097" />
- <ALID id="970101098" logicalName="PM1.AlarmSignalRHCFlowAlarmFL901" description="RHC Flow Alarm FL901 Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1970101098" eventClear="2970101098" />
- <ALID id="970101099" logicalName="PM1.CoolingWateFlowOfShuttleFL903ToleranceAlarm" description="CoolingWateFlowOfShuttleFL903 tolerance alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1970101099" eventClear="2970101099" />
- <ALID id="970101100" logicalName="PM1.CoolingWateFlowOfShuttleFL903ToleranceWarning" description="CoolingWateFlowOfShuttleFL903 tolerance warning " category="EquipmentStatusWarning" enabled="false" eventSet="1970101100" eventClear="2970101100" />
- <ALID id="970101101" logicalName="PM1.CoolingWaterFlowOfBoatRotationFL904ToleranceAlarm" description="CoolingWaterFlowOfBoatRotationFL904 tolerance alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1970101101" eventClear="2970101101" />
- <ALID id="970101102" logicalName="PM1.CoolingWaterFlowOfBoatRotationFL904ToleranceWarning" description="CoolingWaterFlowOfBoatRotationFL904 tolerance warning " category="EquipmentStatusWarning" enabled="false" eventSet="1970101102" eventClear="2970101102" />
- <ALID id="970101103" logicalName="PM1.CoolingWaterFlowOfFlangeFL905ToleranceAlarm" description="CoolingWaterFlowOfFlangeFL905 tolerance alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1970101103" eventClear="2970101103" />
- <ALID id="970101104" logicalName="PM1.CoolingWaterFlowOfFlangeFL905ToleranceWarning" description="CoolingWaterFlowOfFlangeFL905 tolerance warning " category="EquipmentStatusWarning" enabled="false" eventSet="1970101104" eventClear="2970101104" />
- <ALID id="970101105" logicalName="PM1.CoolingWaterFlowOfFurnaceFL902ToleranceAlarm" description="CoolingWaterFlowOfFurnaceFL902 tolerance alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1970101105" eventClear="2970101105" />
- <ALID id="970101106" logicalName="PM1.CoolingWaterFlowOfFurnaceFL902ToleranceWarning" description="CoolingWaterFlowOfFurnaceFL902 tolerance warning " category="EquipmentStatusWarning" enabled="false" eventSet="1970101106" eventClear="2970101106" />
- <ALID id="970101107" logicalName="PM1.CoolingWaterFlowOfLoadingAreaFL906ToleranceAlarm" description="CoolingWaterFlowOfLoadingAreaFL906 tolerance alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1970101107" eventClear="2970101107" />
- <ALID id="970101108" logicalName="PM1.CoolingWaterFlowOfLoadingAreaFL906ToleranceWarning" description="CoolingWaterFlowOfLoadingAreaFL906 tolerance warning " category="EquipmentStatusWarning" enabled="false" eventSet="1970101108" eventClear="2970101108" />
- <ALID id="970101109" logicalName="PM1.RHCFlowFL901ToleranceAlarm" description="RHCFlowFL901 tolerance alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1970101109" eventClear="2970101109" />
- <ALID id="970101110" logicalName="PM1.RHCFlowFL901ToleranceWarning" description="RHCFlowFL901 tolerance warning " category="EquipmentStatusWarning" enabled="false" eventSet="1970101110" eventClear="2970101110" />
- <ALID id="970101111" logicalName="PM1.VG13ToleranceAlarm" description="VG13 tolerance alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1970101111" eventClear="2970101111" />
- <ALID id="970101112" logicalName="PM1.VG13ToleranceWarning" description="VG13 tolerance warning " category="EquipmentStatusWarning" enabled="false" eventSet="1970101112" eventClear="2970101112" />
- <ALID id="970101113" logicalName="PM1.AlarmSignalLAFFUCommAlarm" description="LA FFU Comm Alarm Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1970101113" eventClear="2970101113" />
- <ALID id="970101114" logicalName="PM1.AlarmSignalMINI8CommAlarm" description="MINI8 Comm Alarm Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1970101114" eventClear="2970101114" />
- <ALID id="970101115" logicalName="PM1.VG21ToleranceAlarm" description="VG21 tolerance alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1970101115" eventClear="2970101115" />
- <ALID id="970101116" logicalName="PM1.VG21ToleranceWarning" description="VG21 tolerance warning " category="EquipmentStatusWarning" enabled="false" eventSet="1970101116" eventClear="2970101116" />
- <ALID id="970101117" logicalName="PM1.VG22ToleranceAlarm" description="VG22 tolerance alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1970101117" eventClear="2970101117" />
- <ALID id="970101118" logicalName="PM1.VG22ToleranceWarning" description="VG22 tolerance warning " category="EquipmentStatusWarning" enabled="false" eventSet="1970101118" eventClear="2970101118" />
- <ALID id="970101119" logicalName="PM1.DG1AnalogValueToleranceAlarm" description="DG1AnalogValue tolerance alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1970101119" eventClear="2970101119" />
- <ALID id="970101120" logicalName="PM1.DG1AnalogValueToleranceWarning" description="DG1AnalogValue tolerance warning " category="EquipmentStatusWarning" enabled="false" eventSet="1970101120" eventClear="2970101120" />
- <ALID id="970101121" logicalName="PM1.PS14AnalogValueToleranceAlarm" description="PS14AnalogValue tolerance alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1970101121" eventClear="2970101121" />
- <ALID id="970101122" logicalName="PM1.PS14AnalogValueToleranceWarning" description="PS14AnalogValue tolerance warning " category="EquipmentStatusWarning" enabled="false" eventSet="1970101122" eventClear="2970101122" />
- <ALID id="970101123" logicalName="PM1.VG12AnalogValueToleranceAlarm" description="VG12AnalogValue tolerance alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1970101123" eventClear="2970101123" />
- <ALID id="970101124" logicalName="PM1.VG12AnalogValueToleranceWarning" description="VG12AnalogValue tolerance warning " category="EquipmentStatusWarning" enabled="false" eventSet="1970101124" eventClear="2970101124" />
- <ALID id="970101125" logicalName="PM1.AlarmSignaMainWaterFlowAlarm" description="Main Water Flow Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1970101125" eventClear="2970101125" />
- <ALID id="970101126" logicalName="PM1.HeaterCLToleranceAlarm" description="PM1 heaterCL tolerance alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1970101126" eventClear="2970101126" />
- <ALID id="970101127" logicalName="PM1.HeaterCLToleranceWarning" description="PM1 heaterCL tolerance warning " category="EquipmentStatusWarning" enabled="false" eventSet="1970101127" eventClear="2970101127" />
- <ALID id="970101128" logicalName="PM1.HeaterCToleranceAlarm" description="PM1 heaterC tolerance alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1970101128" eventClear="2970101128" />
- <ALID id="970101129" logicalName="PM1.HeaterCToleranceWarning" description="PM1 heaterC tolerance warning " category="EquipmentStatusWarning" enabled="false" eventSet="1970101129" eventClear="2970101129" />
- <ALID id="970101130" logicalName="PM1.HeaterCUToleranceAlarm" description="PM1 heaterCU tolerance alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1970101130" eventClear="2970101130" />
- <ALID id="970101131" logicalName="PM1.HeaterCUToleranceWarning" description="PM1 heaterCU tolerance warning " category="EquipmentStatusWarning" enabled="false" eventSet="1970101131" eventClear="2970101131" />
- <ALID id="970101132" logicalName="PM1.HeaterLToleranceAlarm" description="PM1 heaterL tolerance alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1970101132" eventClear="2970101132" />
- <ALID id="970101133" logicalName="PM1.HeaterLToleranceWarning" description="PM1 heaterL tolerance warning " category="EquipmentStatusWarning" enabled="false" eventSet="1970101133" eventClear="2970101133" />
- <ALID id="970101134" logicalName="PM1.HeaterUToleranceAlarm" description="PM1 heaterU tolerance alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1970101134" eventClear="2970101134" />
- <ALID id="970101135" logicalName="PM1.HeaterUToleranceWarning" description="PM1 heaterU tolerance warning " category="EquipmentStatusWarning" enabled="false" eventSet="1970101135" eventClear="2970101135" />
- <ALID id="970101136" logicalName="PM1.MFC10ToleranceAlarm" description="MFC10 tolerance alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1970101136" eventClear="2970101136" />
- <ALID id="970101137" logicalName="PM1.MFC10ToleranceWarning" description="MFC10 tolerance warning " category="EquipmentStatusWarning" enabled="false" eventSet="1970101137" eventClear="2970101137" />
- <ALID id="970101138" logicalName="PM1.MFC11ToleranceAlarm" description="MFC11 tolerance alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1970101138" eventClear="2970101138" />
- <ALID id="970101139" logicalName="PM1.MFC11ToleranceWarning" description="MFC11 tolerance warning " category="EquipmentStatusWarning" enabled="false" eventSet="1970101139" eventClear="2970101139" />
- <ALID id="970101140" logicalName="PM1.MFC12ToleranceAlarm" description="MFC12 tolerance alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1970101140" eventClear="2970101140" />
- <ALID id="970101141" logicalName="PM1.MFC12ToleranceWarning" description="MFC12 tolerance warning " category="EquipmentStatusWarning" enabled="false" eventSet="1970101141" eventClear="2970101141" />
- <ALID id="970101142" logicalName="PM1.MFC1ToleranceAlarm" description="MFC1 tolerance alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1970101142" eventClear="2970101142" />
- <ALID id="970101143" logicalName="PM1.MFC1ToleranceWarning" description="MFC1 tolerance warning " category="EquipmentStatusWarning" enabled="false" eventSet="1970101143" eventClear="2970101143" />
- <ALID id="970101144" logicalName="PM1.MFC2ToleranceAlarm" description="MFC2 tolerance alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1970101144" eventClear="2970101144" />
- <ALID id="970101145" logicalName="PM1.MFC2ToleranceWarning" description="MFC2 tolerance warning " category="EquipmentStatusWarning" enabled="false" eventSet="1970101145" eventClear="2970101145" />
- <ALID id="970101146" logicalName="PM1.MFC3ToleranceAlarm" description="MFC3 tolerance alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1970101146" eventClear="2970101146" />
- <ALID id="970101147" logicalName="PM1.MFC3ToleranceWarning" description="MFC3 tolerance warning " category="EquipmentStatusWarning" enabled="false" eventSet="1970101147" eventClear="2970101147" />
- <ALID id="970101148" logicalName="PM1.MFC4ToleranceAlarm" description="MFC4 tolerance alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1970101148" eventClear="2970101148" />
- <ALID id="970101149" logicalName="PM1.MFC4ToleranceWarning" description="MFC4 tolerance warning " category="EquipmentStatusWarning" enabled="false" eventSet="1970101149" eventClear="2970101149" />
- <ALID id="970101150" logicalName="PM1.MFC5ToleranceAlarm" description="MFC5 tolerance alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1970101150" eventClear="2970101150" />
- <ALID id="970101151" logicalName="PM1.MFC5ToleranceWarning" description="MFC5 tolerance warning " category="EquipmentStatusWarning" enabled="false" eventSet="1970101151" eventClear="2970101151" />
- <ALID id="970101152" logicalName="PM1.MFC6ToleranceAlarm" description="MFC6 tolerance alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1970101152" eventClear="2970101152" />
- <ALID id="970101153" logicalName="PM1.MFC6ToleranceWarning" description="MFC6 tolerance warning " category="EquipmentStatusWarning" enabled="false" eventSet="1970101153" eventClear="2970101153" />
- <ALID id="970101154" logicalName="PM1.MFC7ToleranceAlarm" description="MFC7 tolerance alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1970101154" eventClear="2970101154" />
- <ALID id="970101155" logicalName="PM1.MFC7ToleranceWarning" description="MFC7 tolerance warning " category="EquipmentStatusWarning" enabled="false" eventSet="1970101155" eventClear="2970101155" />
- <ALID id="970101156" logicalName="PM1.MFC8ToleranceAlarm" description="MFC8 tolerance alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1970101156" eventClear="2970101156" />
- <ALID id="970101157" logicalName="PM1.MFC8ToleranceWarning" description="MFC8 tolerance warning " category="EquipmentStatusWarning" enabled="false" eventSet="1970101157" eventClear="2970101157" />
- <ALID id="970101158" logicalName="PM1.MFC9ToleranceAlarm" description="MFC9 tolerance alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1970101158" eventClear="2970101158" />
- <ALID id="970101159" logicalName="PM1.MFC9ToleranceWarning" description="MFC9 tolerance warning " category="EquipmentStatusWarning" enabled="false" eventSet="1970101159" eventClear="2970101159" />
- <ALID id="970101160" logicalName="PM1.APCSetModeAlarm" description="PM1 APC alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1970101160" eventClear="2970101160" />
- <ALID id="970101161" logicalName="PM1.APCPressure1ToleranceWarning" description="PM1 APC Pressure1 tolerance warning " category="EquipmentStatusWarning" enabled="false" eventSet="1970101161" eventClear="2970101161" />
- <ALID id="970101162" logicalName="PM1.APCAngleToleranceAlarm" description="PM1 APC Angle tolerance alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1970101162" eventClear="2970101162" />
- <ALID id="970101163" logicalName="PM1.APCAngleToleranceWarning" description="PM1 APC Angle tolerance warning " category="EquipmentStatusWarning" enabled="false" eventSet="1970101163" eventClear="2970101163" />
- <ALID id="970101164" logicalName="PM1.APCPressure1ToleranceAlarm" description="PM1 APC Pressure1 tolerance alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1970101164" eventClear="2970101164" />
- <ALID id="970101165" logicalName="PM1.APCPressure2ToleranceAlarm" description="PM1 APC Pressure1 tolerance alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1970101165" eventClear="2970101165" />
- <ALID id="970101166" logicalName="PM1.APCPressure2ToleranceWarning" description="PM1 APC Pressure2 tolerance warning " category="EquipmentStatusWarning" enabled="false" eventSet="1970101166" eventClear="2970101166" />
- <ALID id="970101167" logicalName="PM1.AUX100Alarm" description="True alarm Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1970101167" eventClear="2970101167" />
- <ALID id="970101168" logicalName="PM1.AUX100Warning" description="True warning Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1970101168" eventClear="2970101168" />
- <ALID id="970101169" logicalName="PM1.AUX101Alarm" description="True alarm Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1970101169" eventClear="2970101169" />
- <ALID id="970101170" logicalName="PM1.AUX101Warning" description="True warning Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1970101170" eventClear="2970101170" />
- <ALID id="970101171" logicalName="PM1.AUX10Alarm" description="True alarm Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1970101171" eventClear="2970101171" />
- <ALID id="970101172" logicalName="PM1.AUX10Warning" description="True warning Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1970101172" eventClear="2970101172" />
- <ALID id="970101173" logicalName="PM1.AUX11Alarm" description="True alarm Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1970101173" eventClear="2970101173" />
- <ALID id="970101174" logicalName="PM1.AUX11Warning" description="True warning Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1970101174" eventClear="2970101174" />
- <ALID id="970101175" logicalName="PM1.AUX12Alarm" description="True alarm Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1970101175" eventClear="2970101175" />
- <ALID id="970101176" logicalName="PM1.AUX12Warning" description="True warning Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1970101176" eventClear="2970101176" />
- <ALID id="970101177" logicalName="PM1.AUX13Alarm" description="True alarm Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1970101177" eventClear="2970101177" />
- <ALID id="970101178" logicalName="PM1.AUX13Warning" description="True warning Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1970101178" eventClear="2970101178" />
- <ALID id="970101179" logicalName="PM1.AUX14Alarm" description="True alarm Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1970101179" eventClear="2970101179" />
- <ALID id="970101180" logicalName="PM1.AUX14Warning" description="True warning Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1970101180" eventClear="2970101180" />
- <ALID id="970101181" logicalName="PM1.AUX15Alarm" description="True alarm Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1970101181" eventClear="2970101181" />
- <ALID id="970101182" logicalName="PM1.AUX15Warning" description="True warning Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1970101182" eventClear="2970101182" />
- <ALID id="970101183" logicalName="PM1.AUX16Alarm" description="True alarm Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1970101183" eventClear="2970101183" />
- <ALID id="970101184" logicalName="PM1.AUX16Warning" description="True warning Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1970101184" eventClear="2970101184" />
- <ALID id="970101185" logicalName="PM1.AUX17Alarm" description="True alarm Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1970101185" eventClear="2970101185" />
- <ALID id="970101186" logicalName="PM1.AUX17Warning" description="True warning Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1970101186" eventClear="2970101186" />
- <ALID id="970101187" logicalName="PM1.AUX18Alarm" description="True alarm Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1970101187" eventClear="2970101187" />
- <ALID id="970101188" logicalName="PM1.AUX18Warning" description="True warning Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1970101188" eventClear="2970101188" />
- <ALID id="970101189" logicalName="PM1.AUX19Alarm" description="True alarm Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1970101189" eventClear="2970101189" />
- <ALID id="970101190" logicalName="PM1.AUX19Warning" description="True warning Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1970101190" eventClear="2970101190" />
- <ALID id="970101191" logicalName="PM1.AUX1Alarm" description="True alarm Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1970101191" eventClear="2970101191" />
- <ALID id="970101192" logicalName="PM1.AUX1Warning" description="True warning Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1970101192" eventClear="2970101192" />
- <ALID id="970101193" logicalName="PM1.AUX20Alarm" description="True alarm Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1970101193" eventClear="2970101193" />
- <ALID id="970101194" logicalName="PM1.AUX20Warning" description="True warning Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1970101194" eventClear="2970101194" />
- <ALID id="970101195" logicalName="PM1.AUX21Alarm" description="True alarm Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1970101195" eventClear="2970101195" />
- <ALID id="970101196" logicalName="PM1.AUX21Warning" description="True warning Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1970101196" eventClear="2970101196" />
- <ALID id="970101197" logicalName="PM1.AUX22Alarm" description="True alarm Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1970101197" eventClear="2970101197" />
- <ALID id="970101198" logicalName="PM1.AUX22Warning" description="True warning Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1970101198" eventClear="2970101198" />
- <ALID id="970101199" logicalName="PM1.AUX23Alarm" description="True alarm Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1970101199" eventClear="2970101199" />
- <ALID id="970101200" logicalName="PM1.AUX23Warning" description="True warning Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1970101200" eventClear="2970101200" />
- <ALID id="970101201" logicalName="PM1.AUX24Alarm" description="True alarm Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1970101201" eventClear="2970101201" />
- <ALID id="970101202" logicalName="PM1.AUX24Warning" description="True warning Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1970101202" eventClear="2970101202" />
- <ALID id="970101203" logicalName="PM1.AUX25Alarm" description="True alarm Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1970101203" eventClear="2970101203" />
- <ALID id="970101204" logicalName="PM1.AUX25Warning" description="True warning Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1970101204" eventClear="2970101204" />
- <ALID id="970101205" logicalName="PM1.AUX26Alarm" description="True alarm Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1970101205" eventClear="2970101205" />
- <ALID id="970101206" logicalName="PM1.AUX26Warning" description="True warning Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1970101206" eventClear="2970101206" />
- <ALID id="970101207" logicalName="PM1.AUX27Alarm" description="True alarm Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1970101207" eventClear="2970101207" />
- <ALID id="970101208" logicalName="PM1.AUX27Warning" description="True warning Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1970101208" eventClear="2970101208" />
- <ALID id="970101209" logicalName="PM1.AUX28Alarm" description="True alarm Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1970101209" eventClear="2970101209" />
- <ALID id="970101210" logicalName="PM1.AUX28Warning" description="True warning Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1970101210" eventClear="2970101210" />
- <ALID id="970101211" logicalName="PM1.AUX29Alarm" description="True alarm Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1970101211" eventClear="2970101211" />
- <ALID id="970101212" logicalName="PM1.AUX29Warning" description="True warning Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1970101212" eventClear="2970101212" />
- <ALID id="970101213" logicalName="PM1.AUX2Alarm" description="True alarm Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1970101213" eventClear="2970101213" />
- <ALID id="970101214" logicalName="PM1.AUX2Warning" description="True warning Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1970101214" eventClear="2970101214" />
- <ALID id="970101215" logicalName="PM1.AUX30Alarm" description="True alarm Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1970101215" eventClear="2970101215" />
- <ALID id="970101216" logicalName="PM1.AUX30Warning" description="True warning Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1970101216" eventClear="2970101216" />
- <ALID id="970101217" logicalName="PM1.AUX31Alarm" description="True alarm Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1970101217" eventClear="2970101217" />
- <ALID id="970101218" logicalName="PM1.AUX31Warning" description="True warning Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1970101218" eventClear="2970101218" />
- <ALID id="970101219" logicalName="PM1.AUX32Alarm" description="True alarm Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1970101219" eventClear="2970101219" />
- <ALID id="970101220" logicalName="PM1.AUX32Warning" description="True warning Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1970101220" eventClear="2970101220" />
- <ALID id="970101221" logicalName="PM1.AUX33Alarm" description="True alarm Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1970101221" eventClear="2970101221" />
- <ALID id="970101222" logicalName="PM1.AUX33Warning" description="True warning Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1970101222" eventClear="2970101222" />
- <ALID id="970101223" logicalName="PM1.AUX34Alarm" description="True alarm Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1970101223" eventClear="2970101223" />
- <ALID id="970101224" logicalName="PM1.AUX34Warning" description="True warning Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1970101224" eventClear="2970101224" />
- <ALID id="970101225" logicalName="PM1.AUX35Alarm" description="True alarm Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1970101225" eventClear="2970101225" />
- <ALID id="970101226" logicalName="PM1.AUX35Warning" description="True warning Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1970101226" eventClear="2970101226" />
- <ALID id="970101227" logicalName="PM1.AUX36Alarm" description="True alarm Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1970101227" eventClear="2970101227" />
- <ALID id="970101228" logicalName="PM1.AUX36Warning" description="True warning Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1970101228" eventClear="2970101228" />
- <ALID id="970101229" logicalName="PM1.AUX37Alarm" description="True alarm Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1970101229" eventClear="2970101229" />
- <ALID id="970101230" logicalName="PM1.AUX37Warning" description="True warning Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1970101230" eventClear="2970101230" />
- <ALID id="970101231" logicalName="PM1.AUX38Alarm" description="True alarm Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1970101231" eventClear="2970101231" />
- <ALID id="970101232" logicalName="PM1.AUX38Warning" description="True warning Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1970101232" eventClear="2970101232" />
- <ALID id="970101233" logicalName="PM1.AUX39Alarm" description="True alarm Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1970101233" eventClear="2970101233" />
- <ALID id="970101234" logicalName="PM1.AUX39Warning" description="True warning Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1970101234" eventClear="2970101234" />
- <ALID id="970101235" logicalName="PM1.AUX3Alarm" description="True alarm Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1970101235" eventClear="2970101235" />
- <ALID id="970101236" logicalName="PM1.AUX3Warning" description="True warning Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1970101236" eventClear="2970101236" />
- <ALID id="970101237" logicalName="PM1.AUX40Alarm" description="True alarm Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1970101237" eventClear="2970101237" />
- <ALID id="970101238" logicalName="PM1.AUX40Warning" description="True warning Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1970101238" eventClear="2970101238" />
- <ALID id="970101239" logicalName="PM1.AUX41Alarm" description="True alarm Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1970101239" eventClear="2970101239" />
- <ALID id="970101240" logicalName="PM1.AUX41Warning" description="True warning Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1970101240" eventClear="2970101240" />
- <ALID id="970101241" logicalName="PM1.AUX42Alarm" description="True alarm Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1970101241" eventClear="2970101241" />
- <ALID id="970101242" logicalName="PM1.AUX42Warning" description="True warning Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1970101242" eventClear="2970101242" />
- <ALID id="970101243" logicalName="PM1.AUX43Alarm" description="True alarm Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1970101243" eventClear="2970101243" />
- <ALID id="970101244" logicalName="PM1.AUX43Warning" description="True warning Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1970101244" eventClear="2970101244" />
- <ALID id="970101245" logicalName="PM1.AUX44Alarm" description="True alarm Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1970101245" eventClear="2970101245" />
- <ALID id="970101246" logicalName="PM1.AUX44Warning" description="True warning Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1970101246" eventClear="2970101246" />
- <ALID id="970101247" logicalName="PM1.AUX45Alarm" description="True alarm Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1970101247" eventClear="2970101247" />
- <ALID id="970101248" logicalName="PM1.AUX45Warning" description="True warning Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1970101248" eventClear="2970101248" />
- <ALID id="970101249" logicalName="PM1.AUX46Alarm" description="True alarm Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1970101249" eventClear="2970101249" />
- <ALID id="970101250" logicalName="PM1.AUX46Warning" description="True warning Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1970101250" eventClear="2970101250" />
- <ALID id="970101251" logicalName="PM1.AUX47Alarm" description="True alarm Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1970101251" eventClear="2970101251" />
- <ALID id="970101252" logicalName="PM1.AUX47Warning" description="True warning Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1970101252" eventClear="2970101252" />
- <ALID id="970101253" logicalName="PM1.AUX48Alarm" description="True alarm Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1970101253" eventClear="2970101253" />
- <ALID id="970101254" logicalName="PM1.AUX48Warning" description="True warning Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1970101254" eventClear="2970101254" />
- <ALID id="970101255" logicalName="PM1.AUX49Alarm" description="True alarm Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1970101255" eventClear="2970101255" />
- <ALID id="970101256" logicalName="PM1.AUX49Warning" description="True warning Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1970101256" eventClear="2970101256" />
- <ALID id="970101257" logicalName="PM1.AUX4Alarm" description="True alarm Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1970101257" eventClear="2970101257" />
- <ALID id="970101258" logicalName="PM1.AUX4Warning" description="True warning Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1970101258" eventClear="2970101258" />
- <ALID id="970101259" logicalName="PM1.AUX50Alarm" description="True alarm Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1970101259" eventClear="2970101259" />
- <ALID id="970101260" logicalName="PM1.AUX50Warning" description="True warning Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1970101260" eventClear="2970101260" />
- <ALID id="970101261" logicalName="PM1.AUX51Alarm" description="True alarm Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1970101261" eventClear="2970101261" />
- <ALID id="970101262" logicalName="PM1.AUX51Warning" description="True warning Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1970101262" eventClear="2970101262" />
- <ALID id="970101263" logicalName="PM1.AUX52Alarm" description="True alarm Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1970101263" eventClear="2970101263" />
- <ALID id="970101264" logicalName="PM1.AUX52Warning" description="True warning Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1970101264" eventClear="2970101264" />
- <ALID id="970101265" logicalName="PM1.AUX53Alarm" description="True alarm Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1970101265" eventClear="2970101265" />
- <ALID id="970101266" logicalName="PM1.AUX53Warning" description="True warning Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1970101266" eventClear="2970101266" />
- <ALID id="970101267" logicalName="PM1.AUX54Alarm" description="True alarm Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1970101267" eventClear="2970101267" />
- <ALID id="970101268" logicalName="PM1.AUX54Warning" description="True warning Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1970101268" eventClear="2970101268" />
- <ALID id="970101269" logicalName="PM1.AUX55Alarm" description="True alarm Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1970101269" eventClear="2970101269" />
- <ALID id="970101270" logicalName="PM1.AUX55Warning" description="True warning Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1970101270" eventClear="2970101270" />
- <ALID id="970101271" logicalName="PM1.AUX56Alarm" description="True alarm Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1970101271" eventClear="2970101271" />
- <ALID id="970101272" logicalName="PM1.AUX56Warning" description="True warning Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1970101272" eventClear="2970101272" />
- <ALID id="970101273" logicalName="PM1.AUX57Alarm" description="True alarm Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1970101273" eventClear="2970101273" />
- <ALID id="970101274" logicalName="PM1.AUX57Warning" description="True warning Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1970101274" eventClear="2970101274" />
- <ALID id="970101275" logicalName="PM1.AUX58Alarm" description="True alarm Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1970101275" eventClear="2970101275" />
- <ALID id="970101276" logicalName="PM1.AUX58Warning" description="True warning Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1970101276" eventClear="2970101276" />
- <ALID id="970101277" logicalName="PM1.AUX59Alarm" description="True alarm Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1970101277" eventClear="2970101277" />
- <ALID id="970101278" logicalName="PM1.AUX59Warning" description="True warning Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1970101278" eventClear="2970101278" />
- <ALID id="970101279" logicalName="PM1.AUX5Alarm" description="True alarm Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1970101279" eventClear="2970101279" />
- <ALID id="970101280" logicalName="PM1.AUX5Warning" description="True warning Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1970101280" eventClear="2970101280" />
- <ALID id="970101281" logicalName="PM1.AUX60Alarm" description="True alarm Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1970101281" eventClear="2970101281" />
- <ALID id="970101282" logicalName="PM1.AUX60Warning" description="True warning Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1970101282" eventClear="2970101282" />
- <ALID id="970101283" logicalName="PM1.AUX61Alarm" description="True alarm Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1970101283" eventClear="2970101283" />
- <ALID id="970101284" logicalName="PM1.AUX61Warning" description="True warning Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1970101284" eventClear="2970101284" />
- <ALID id="970101285" logicalName="PM1.AUX62Alarm" description="True alarm Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1970101285" eventClear="2970101285" />
- <ALID id="970101286" logicalName="PM1.AUX62Warning" description="True warning Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1970101286" eventClear="2970101286" />
- <ALID id="970101287" logicalName="PM1.AUX63Alarm" description="True alarm Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1970101287" eventClear="2970101287" />
- <ALID id="970101288" logicalName="PM1.AUX63Warning" description="True warning Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1970101288" eventClear="2970101288" />
- <ALID id="970101289" logicalName="PM1.AUX64Alarm" description="True alarm Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1970101289" eventClear="2970101289" />
- <ALID id="970101290" logicalName="PM1.AUX64Warning" description="True warning Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1970101290" eventClear="2970101290" />
- <ALID id="970101291" logicalName="PM1.AUX65Alarm" description="True alarm Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1970101291" eventClear="2970101291" />
- <ALID id="970101292" logicalName="PM1.AUX65Warning" description="True warning Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1970101292" eventClear="2970101292" />
- <ALID id="970101293" logicalName="PM1.AUX66Alarm" description="True alarm Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1970101293" eventClear="2970101293" />
- <ALID id="970101294" logicalName="PM1.AUX66Warning" description="True warning Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1970101294" eventClear="2970101294" />
- <ALID id="970101295" logicalName="PM1.AUX67Alarm" description="True alarm Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1970101295" eventClear="2970101295" />
- <ALID id="970101296" logicalName="PM1.AUX67Warning" description="True warning Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1970101296" eventClear="2970101296" />
- <ALID id="970101297" logicalName="PM1.AUX68Alarm" description="True alarm Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1970101297" eventClear="2970101297" />
- <ALID id="970101298" logicalName="PM1.AUX68Warning" description="True warning Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1970101298" eventClear="2970101298" />
- <ALID id="970101299" logicalName="PM1.AUX69Alarm" description="True alarm Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1970101299" eventClear="2970101299" />
- <ALID id="970101300" logicalName="PM1.AUX69Warning" description="True warning Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1970101300" eventClear="2970101300" />
- <ALID id="970101301" logicalName="PM1.AUX6Alarm" description="True alarm Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1970101301" eventClear="2970101301" />
- <ALID id="970101302" logicalName="PM1.AUX6Warning" description="True warning Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1970101302" eventClear="2970101302" />
- <ALID id="970101303" logicalName="PM1.AUX70Alarm" description="True alarm Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1970101303" eventClear="2970101303" />
- <ALID id="970101304" logicalName="PM1.AUX70Warning" description="True warning Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1970101304" eventClear="2970101304" />
- <ALID id="970101305" logicalName="PM1.AUX71Alarm" description="True alarm Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1970101305" eventClear="2970101305" />
- <ALID id="970101306" logicalName="PM1.AUX71Warning" description="True warning Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1970101306" eventClear="2970101306" />
- <ALID id="970101307" logicalName="PM1.AUX72Alarm" description="True alarm Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1970101307" eventClear="2970101307" />
- <ALID id="970101308" logicalName="PM1.AUX72Warning" description="True warning Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1970101308" eventClear="2970101308" />
- <ALID id="970101309" logicalName="PM1.AUX73Alarm" description="True alarm Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1970101309" eventClear="2970101309" />
- <ALID id="970101310" logicalName="PM1.AUX73Warning" description="True warning Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1970101310" eventClear="2970101310" />
- <ALID id="970101311" logicalName="PM1.AUX74Alarm" description="True alarm Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1970101311" eventClear="2970101311" />
- <ALID id="970101312" logicalName="PM1.AUX74Warning" description="True warning Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1970101312" eventClear="2970101312" />
- <ALID id="970101313" logicalName="PM1.AUX75Alarm" description="True alarm Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1970101313" eventClear="2970101313" />
- <ALID id="970101314" logicalName="PM1.AUX75Warning" description="True warning Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1970101314" eventClear="2970101314" />
- <ALID id="970101315" logicalName="PM1.AUX76Alarm" description="True alarm Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1970101315" eventClear="2970101315" />
- <ALID id="970101316" logicalName="PM1.AUX76Warning" description="True warning Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1970101316" eventClear="2970101316" />
- <ALID id="970101317" logicalName="PM1.AUX77Alarm" description="True alarm Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1970101317" eventClear="2970101317" />
- <ALID id="970101318" logicalName="PM1.AUX77Warning" description="True warning Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1970101318" eventClear="2970101318" />
- <ALID id="970101319" logicalName="PM1.AUX78Alarm" description="True alarm Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1970101319" eventClear="2970101319" />
- <ALID id="970101320" logicalName="PM1.AUX78Warning" description="True warning Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1970101320" eventClear="2970101320" />
- <ALID id="970101321" logicalName="PM1.AUX79Alarm" description="True alarm Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1970101321" eventClear="2970101321" />
- <ALID id="970101322" logicalName="PM1.AUX79Warning" description="True warning Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1970101322" eventClear="2970101322" />
- <ALID id="970101323" logicalName="PM1.AUX7Alarm" description="True alarm Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1970101323" eventClear="2970101323" />
- <ALID id="970101324" logicalName="PM1.AUX7Warning" description="True warning Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1970101324" eventClear="2970101324" />
- <ALID id="970101325" logicalName="PM1.AUX80Alarm" description="True alarm Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1970101325" eventClear="2970101325" />
- <ALID id="970101326" logicalName="PM1.AUX80Warning" description="True warning Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1970101326" eventClear="2970101326" />
- <ALID id="970101327" logicalName="PM1.AUX81Alarm" description="True alarm Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1970101327" eventClear="2970101327" />
- <ALID id="970101328" logicalName="PM1.AUX81Warning" description="True warning Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1970101328" eventClear="2970101328" />
- <ALID id="970101329" logicalName="PM1.AUX82Alarm" description="True alarm Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1970101329" eventClear="2970101329" />
- <ALID id="970101330" logicalName="PM1.AUX82Warning" description="True warning Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1970101330" eventClear="2970101330" />
- <ALID id="970101331" logicalName="PM1.AUX83Alarm" description="True alarm Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1970101331" eventClear="2970101331" />
- <ALID id="970101332" logicalName="PM1.AUX83Warning" description="True warning Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1970101332" eventClear="2970101332" />
- <ALID id="970101333" logicalName="PM1.AUX84Alarm" description="True alarm Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1970101333" eventClear="2970101333" />
- <ALID id="970101334" logicalName="PM1.AUX84Warning" description="True warning Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1970101334" eventClear="2970101334" />
- <ALID id="970101335" logicalName="PM1.AUX85Alarm" description="True alarm Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1970101335" eventClear="2970101335" />
- <ALID id="970101336" logicalName="PM1.AUX85Warning" description="True warning Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1970101336" eventClear="2970101336" />
- <ALID id="970101337" logicalName="PM1.AUX86Alarm" description="True alarm Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1970101337" eventClear="2970101337" />
- <ALID id="970101338" logicalName="PM1.AUX86Warning" description="True warning Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1970101338" eventClear="2970101338" />
- <ALID id="970101339" logicalName="PM1.AUX87Alarm" description="True alarm Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1970101339" eventClear="2970101339" />
- <ALID id="970101340" logicalName="PM1.AUX87Warning" description="True warning Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1970101340" eventClear="2970101340" />
- <ALID id="970101341" logicalName="PM1.AUX88Alarm" description="True alarm Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1970101341" eventClear="2970101341" />
- <ALID id="970101342" logicalName="PM1.AUX88Warning" description="True warning Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1970101342" eventClear="2970101342" />
- <ALID id="970101343" logicalName="PM1.AUX89Alarm" description="True alarm Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1970101343" eventClear="2970101343" />
- <ALID id="970101344" logicalName="PM1.AUX89Warning" description="True warning Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1970101344" eventClear="2970101344" />
- <ALID id="970101345" logicalName="PM1.AUX8Alarm" description="True alarm Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1970101345" eventClear="2970101345" />
- <ALID id="970101346" logicalName="PM1.AUX8Warning" description="True warning Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1970101346" eventClear="2970101346" />
- <ALID id="970101347" logicalName="PM1.AUX90Alarm" description="True alarm Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1970101347" eventClear="2970101347" />
- <ALID id="970101348" logicalName="PM1.AUX90Warning" description="True warning Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1970101348" eventClear="2970101348" />
- <ALID id="970101349" logicalName="PM1.AUX91Alarm" description="True alarm Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1970101349" eventClear="2970101349" />
- <ALID id="970101350" logicalName="PM1.AUX91Warning" description="True warning Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1970101350" eventClear="2970101350" />
- <ALID id="970101351" logicalName="PM1.AUX92Alarm" description="True alarm Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1970101351" eventClear="2970101351" />
- <ALID id="970101352" logicalName="PM1.AUX92Warning" description="True warning Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1970101352" eventClear="2970101352" />
- <ALID id="970101353" logicalName="PM1.AUX93Alarm" description="True alarm Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1970101353" eventClear="2970101353" />
- <ALID id="970101354" logicalName="PM1.AUX93Warning" description="True warning Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1970101354" eventClear="2970101354" />
- <ALID id="970101355" logicalName="PM1.AUX94Alarm" description="True alarm Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1970101355" eventClear="2970101355" />
- <ALID id="970101356" logicalName="PM1.AUX94Warning" description="True warning Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1970101356" eventClear="2970101356" />
- <ALID id="970101357" logicalName="PM1.AUX95Alarm" description="True alarm Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1970101357" eventClear="2970101357" />
- <ALID id="970101358" logicalName="PM1.AUX95Warning" description="True warning Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1970101358" eventClear="2970101358" />
- <ALID id="970101359" logicalName="PM1.AUX96Alarm" description="True alarm Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1970101359" eventClear="2970101359" />
- <ALID id="970101360" logicalName="PM1.AUX96Warning" description="True warning Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1970101360" eventClear="2970101360" />
- <ALID id="970101361" logicalName="PM1.AUX97Alarm" description="True alarm Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1970101361" eventClear="2970101361" />
- <ALID id="970101362" logicalName="PM1.AUX97Warning" description="True warning Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1970101362" eventClear="2970101362" />
- <ALID id="970101363" logicalName="PM1.AUX98Alarm" description="True alarm Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1970101363" eventClear="2970101363" />
- <ALID id="970101364" logicalName="PM1.AUX98Warning" description="True warning Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1970101364" eventClear="2970101364" />
- <ALID id="970101365" logicalName="PM1.AUX99Alarm" description="True alarm Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1970101365" eventClear="2970101365" />
- <ALID id="970101366" logicalName="PM1.AUX99Warning" description="True warning Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1970101366" eventClear="2970101366" />
- <ALID id="970101367" logicalName="PM1.AUX9Alarm" description="True alarm Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1970101367" eventClear="2970101367" />
- <ALID id="970101368" logicalName="PM1.AUX9Warning" description="True warning Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1970101368" eventClear="2970101368" />
- <ALID id="970101369" logicalName="PM1.AlarmSignalAV91_1RHCAirInOpened" description="RHC.DMR Abnormal Trigger " category="EquipmentStatusWarning" enabled="false" eventSet="1970101369" eventClear="2970101369" />
- <ALID id="970101370" logicalName="PM1.AlarmSignalAV91_2RHCAirInOpened" description="RHC.DMR Abnormal Trigger " category="EquipmentStatusWarning" enabled="false" eventSet="1970101370" eventClear="2970101370" />
- <ALID id="970101371" logicalName="PM1.AlarmSignalAV91_3RHCAirInOpened" description="RHC.DMR Abnormal Trigger " category="EquipmentStatusWarning" enabled="false" eventSet="1970101371" eventClear="2970101371" />
- <ALID id="970101372" logicalName="PM1.AlarmSignalAV91_4RHCAirInOpened" description="RHC.DMR Abnormal Trigger " category="EquipmentStatusWarning" enabled="false" eventSet="1970101372" eventClear="2970101372" />
- <ALID id="970101373" logicalName="PM1.AlarmSignalBlowerPower" description="BlowerPower Overload Trigger " category="EquipmentStatusWarning" enabled="false" eventSet="1970101373" eventClear="2970101373" />
- <ALID id="970101374" logicalName="PM1.AlarmSignalCapHeaterAbnormal" description="Cap Heater Abnormal Trigger " category="EquipmentStatusWarning" enabled="false" eventSet="1970101374" eventClear="2970101374" />
- <ALID id="970101375" logicalName="PM1.AlarmSignalDG1Output1" description="P.CNT Pressure NG Trigger " category="EquipmentStatusWarning" enabled="false" eventSet="1970101375" eventClear="2970101375" />
- <ALID id="970101376" logicalName="PM1.AlarmSignalDG1Output2" description="P.CNT Pressure NG Trigger " category="EquipmentStatusWarning" enabled="false" eventSet="1970101376" eventClear="2970101376" />
- <ALID id="970101377" logicalName="PM1.AlarmSignalFFU1DataWriteError" description="FFU1 Data Write Error Trigger " category="EquipmentStatusWarning" enabled="false" eventSet="1970101377" eventClear="2970101377" />
- <ALID id="970101378" logicalName="PM1.AlarmSignalFFU2DataWriteError" description="FFU2 Data Write Error Trigger " category="EquipmentStatusWarning" enabled="false" eventSet="1970101378" eventClear="2970101378" />
- <ALID id="970101379" logicalName="PM1.AlarmSignalFFU3DataWriteError" description="FFU3 Data Write Error Trigger " category="EquipmentStatusWarning" enabled="false" eventSet="1970101379" eventClear="2970101379" />
- <ALID id="970101380" logicalName="PM1.AlarmSignalFFU4DataWriteError" description="FFU1 Data Write Error Trigger " category="EquipmentStatusWarning" enabled="false" eventSet="1970101380" eventClear="2970101380" />
- <ALID id="970101381" logicalName="PM1.AlarmSignalFFU5DataWriteError" description="FFU1 Data Write Error Trigger " category="EquipmentStatusWarning" enabled="false" eventSet="1970101381" eventClear="2970101381" />
- <ALID id="970101382" logicalName="PM1.AlarmSignalFFU6DataWriteError" description="FFU1 Data Write Error Trigger " category="EquipmentStatusWarning" enabled="false" eventSet="1970101382" eventClear="2970101382" />
- <ALID id="970101383" logicalName="PM1.AlarmSignalFFU7DataWriteError" description="FFU1 Data Write Error Trigger " category="EquipmentStatusWarning" enabled="false" eventSet="1970101383" eventClear="2970101383" />
- <ALID id="970101384" logicalName="PM1.AlarmSignalFFU8DataWriteError" description="FFU1 Data Write Error Trigger " category="EquipmentStatusWarning" enabled="false" eventSet="1970101384" eventClear="2970101384" />
- <ALID id="970101385" logicalName="PM1.AlarmSignalFFU9DataWriteError" description="FFU1 Data Write Error Trigger " category="EquipmentStatusWarning" enabled="false" eventSet="1970101385" eventClear="2970101385" />
- <ALID id="970101386" logicalName="PM1.AlarmSignalFurnaceMainCircuitBreakerStatusMonitor" description="Furnace Main Circuit Breaker Trigger " category="EquipmentStatusWarning" enabled="false" eventSet="1970101386" eventClear="2970101386" />
- <ALID id="970101387" logicalName="PM1.AlarmSignalHeaterCLOverTemp" description="HeaterCL OverTemp Trigger " category="EquipmentStatusWarning" enabled="false" eventSet="1970101387" eventClear="2970101387" />
- <ALID id="970101388" logicalName="PM1.AlarmSignalHeaterCOverTemp" description="HeaterC OverTemp Trigger " category="EquipmentStatusWarning" enabled="false" eventSet="1970101388" eventClear="2970101388" />
- <ALID id="970101389" logicalName="PM1.AlarmSignalHeaterCUOverTemp" description="HeaterCU OverTemp Trigger " category="EquipmentStatusWarning" enabled="false" eventSet="1970101389" eventClear="2970101389" />
- <ALID id="970101390" logicalName="PM1.AlarmSignalHeaterLOverTemp" description="HeaterL OverTemp Trigger " category="EquipmentStatusWarning" enabled="false" eventSet="1970101390" eventClear="2970101390" />
- <ALID id="970101391" logicalName="PM1.AlarmSignalHeaterUOverTemp" description="HeaterU OverTemp Trigger " category="EquipmentStatusWarning" enabled="false" eventSet="1970101391" eventClear="2970101391" />
- <ALID id="970101392" logicalName="PM1.AlarmSignalN2FlowInFOUPAbnormal" description="N2 Flow in FOUP Abnormal Trigger " category="EquipmentStatusWarning" enabled="false" eventSet="1970101392" eventClear="2970101392" />
- <ALID id="970101393" logicalName="PM1.AlarmSignalPS13HStatus" description="O.PRS Too High Trigger " category="EquipmentStatusWarning" enabled="false" eventSet="1970101393" eventClear="2970101393" />
- <ALID id="970101394" logicalName="PM1.AlarmSignalPS13LStatus" description="CK.PRS Too Low Trigger " category="EquipmentStatusWarning" enabled="false" eventSet="1970101394" eventClear="2970101394" />
- <ALID id="970101395" logicalName="PM1.AlarmSignalPumpDown" description="Pump Down Trigger " category="EquipmentStatusWarning" enabled="false" eventSet="1970101395" eventClear="2970101395" />
- <ALID id="970101396" logicalName="PM1.AlarmSignalRFSetPowerReached" description="RF Output Abnormal Trigger " category="EquipmentStatusWarning" enabled="false" eventSet="1970101396" eventClear="2970101396" />
- <ALID id="970101397" logicalName="PM1.LeakCheckAlarm" description="Leak Check alarm Trigger " category="EquipmentStatusWarning" enabled="false" eventSet="1970101397" eventClear="2970101397" />
- <ALID id="970101398" logicalName="PM1.AUX103Alarm" description="True alarm Trigger " category="EquipmentStatusWarning" enabled="false" eventSet="1970101398" eventClear="2970101398" />
- <ALID id="970101399" logicalName="PM1.AUX103Warning" description="True warning Trigger " category="EquipmentStatusWarning" enabled="false" eventSet="1970101399" eventClear="2970101399" />
- <ALID id="970101400" logicalName="PM1.AUX102Alarm" description="True alarm Trigger " category="EquipmentStatusWarning" enabled="false" eventSet="1970101400" eventClear="2970101400" />
- <ALID id="970101401" logicalName="PM1.AUX102Warning" description="True warning Trigger " category="EquipmentStatusWarning" enabled="false" eventSet="1970101401" eventClear="2970101401" />
- <ALID id="970101402" logicalName="PM1.AUX104Alarm" description="True alarm Trigger " category="EquipmentStatusWarning" enabled="false" eventSet="1970101402" eventClear="2970101402" />
- <ALID id="970101403" logicalName="PM1.AUX104Warning" description="True warning Trigger " category="EquipmentStatusWarning" enabled="false" eventSet="1970101403" eventClear="2970101403" />
- <ALID id="970101404" logicalName="PM1.AUX105Alarm" description="True alarm Trigger " category="EquipmentStatusWarning" enabled="false" eventSet="1970101404" eventClear="2970101404" />
- <ALID id="970101405" logicalName="PM1.AUX105Warning" description="True warning Trigger " category="EquipmentStatusWarning" enabled="false" eventSet="1970101405" eventClear="2970101405" />
- <ALID id="970101406" logicalName="PM1.AUX106Alarm" description="True alarm Trigger " category="EquipmentStatusWarning" enabled="false" eventSet="1970101406" eventClear="2970101406" />
- <ALID id="970101407" logicalName="PM1.AUX106Warning" description="True warning Trigger " category="EquipmentStatusWarning" enabled="false" eventSet="1970101407" eventClear="2970101407" />
- <ALID id="970101408" logicalName="PM1.AUX107Alarm" description="True alarm Trigger " category="EquipmentStatusWarning" enabled="false" eventSet="1970101408" eventClear="2970101408" />
- <ALID id="970101409" logicalName="PM1.AUX107Warning" description="True warning Trigger " category="EquipmentStatusWarning" enabled="false" eventSet="1970101409" eventClear="2970101409" />
- <ALID id="970101410" logicalName="PM1.AUX108Alarm" description="True alarm Trigger " category="EquipmentStatusWarning" enabled="false" eventSet="1970101410" eventClear="2970101410" />
- <ALID id="970101411" logicalName="PM1.AUX108Warning" description="True warning Trigger " category="EquipmentStatusWarning" enabled="false" eventSet="1970101411" eventClear="2970101411" />
- <ALID id="970101412" logicalName="PM1.AUX109Alarm" description="True alarm Trigger " category="EquipmentStatusWarning" enabled="false" eventSet="1970101412" eventClear="2970101412" />
- <ALID id="970101413" logicalName="PM1.AUX109Warning" description="True warning Trigger " category="EquipmentStatusWarning" enabled="false" eventSet="1970101413" eventClear="2970101413" />
- <ALID id="970101414" logicalName="PM1.AUX110Alarm" description="True alarm Trigger " category="EquipmentStatusWarning" enabled="false" eventSet="1970101414" eventClear="2970101414" />
- <ALID id="970101415" logicalName="PM1.AUX110Warning" description="True warning Trigger " category="EquipmentStatusWarning" enabled="false" eventSet="1970101415" eventClear="2970101415" />
- <ALID id="970101416" logicalName="PM1.AUX111Alarm" description="True alarm Trigger " category="EquipmentStatusWarning" enabled="false" eventSet="1970101416" eventClear="2970101416" />
- <ALID id="970101417" logicalName="PM1.AUX111Warning" description="True warning Trigger " category="EquipmentStatusWarning" enabled="false" eventSet="1970101417" eventClear="2970101417" />
- <ALID id="970101418" logicalName="PM1.AUX112Alarm" description="True alarm Trigger " category="EquipmentStatusWarning" enabled="false" eventSet="1970101418" eventClear="2970101418" />
- <ALID id="970101419" logicalName="PM1.AUX112Warning" description="True warning Trigger " category="EquipmentStatusWarning" enabled="false" eventSet="1970101419" eventClear="2970101419" />
- <ALID id="970101420" logicalName="PM1.AUX113Alarm" description="True alarm Trigger " category="EquipmentStatusWarning" enabled="false" eventSet="1970101420" eventClear="2970101420" />
- <ALID id="970101421" logicalName="PM1.AUX113Warning" description="True warning Trigger " category="EquipmentStatusWarning" enabled="false" eventSet="1970101421" eventClear="2970101421" />
- <ALID id="970101422" logicalName="PM1.AlarmSignaBoatRAxisAlarm" description="Boat RAxis Alarm Trigger " category="EquipmentStatusWarning" enabled="false" eventSet="1970101422" eventClear="2970101422" />
- <ALID id="970101423" logicalName="PM1.AlarmSignaBoatRAxisWarning" description="Boat RAxis Warning Trigger " category="EquipmentStatusWarning" enabled="false" eventSet="1970101423" eventClear="2970101423" />
- <ALID id="970101424" logicalName="PM1.AlarmSignaBoatZAxisAlarm" description="Boat ZAxis Alarm Trigger " category="EquipmentStatusWarning" enabled="false" eventSet="1970101424" eventClear="2970101424" />
- <ALID id="970101425" logicalName="PM1.AlarmSignaBoatZAxisWarning" description="Boat ZAxis Warning Trigger " category="EquipmentStatusWarning" enabled="false" eventSet="1970101425" eventClear="2970101425" />
- <ALID id="970101426" logicalName="PM1.AlarmSignaGasHeaterSensorBreakOutAlarm" description="Gas Heater Sensor Break Out Alarm Trigger " category="EquipmentStatusWarning" enabled="false" eventSet="1970101426" eventClear="2970101426" />
- <ALID id="970101427" logicalName="PM1.AlarmSignaTempLimitAlarm" description="Temp Limit Alarm Trigger " category="EquipmentStatusWarning" enabled="false" eventSet="1970101427" eventClear="2970101427" />
- <ALID id="970101428" logicalName="PM1.ShutterMoveFailedForInterlock" description="Shutter Move Failed For Interlock Trigger " category="EquipmentStatusWarning" enabled="false" eventSet="1970101428" eventClear="2970101428" />
- <ALID id="990101001" logicalName="WaferRobot.BladeWaferNotPresentWarning" description="" category="EquipmentStatusWarning" enabled="false" eventSet="1990101001" eventClear="2990101001" />
- <ALID id="990101002" logicalName="WaferRobot.BladeWaferPresentWarning" description="" category="EquipmentStatusWarning" enabled="false" eventSet="1990101002" eventClear="2990101002" />
- <ALID id="990101003" logicalName="WaferRobot.CheckLoadFailAlarm" description="" category="EquipmentStatusWarning" enabled="false" eventSet="1990101003" eventClear="2990101003" />
- <ALID id="990101004" logicalName="WaferRobot.CheckLoadTimeoutAlarm" description="" category="EquipmentStatusWarning" enabled="false" eventSet="1990101004" eventClear="2990101004" />
- <ALID id="990101005" logicalName="WaferRobot.CheckWaferInformationFailAlarm" description="" category="EquipmentStatusWarning" enabled="false" eventSet="1990101005" eventClear="2990101005" />
- <ALID id="990101006" logicalName="WaferRobot.PickWaferFailAlarm" description="" category="EquipmentStatusWarning" enabled="false" eventSet="1990101006" eventClear="2990101006" />
- <ALID id="990101007" logicalName="WaferRobot.PickWaferTimeoutAlarm" description="" category="EquipmentStatusWarning" enabled="false" eventSet="1990101007" eventClear="2990101007" />
- <ALID id="990101008" logicalName="WaferRobot.PlaceWaferFailAlarm" description="" category="EquipmentStatusWarning" enabled="false" eventSet="1990101008" eventClear="2990101008" />
- <ALID id="990101009" logicalName="WaferRobot.PlaceWaferTimeoutAlarm" description="" category="EquipmentStatusWarning" enabled="false" eventSet="1990101009" eventClear="2990101009" />
- <ALID id="990101010" logicalName="WaferRobot.RequestWaferPresentFailAlarm" description="" category="EquipmentStatusWarning" enabled="false" eventSet="1990101010" eventClear="2990101010" />
- <ALID id="990101011" logicalName="WaferRobot.RequestWaferPresentTimeoutAlarm" description="" category="EquipmentStatusWarning" enabled="false" eventSet="1990101011" eventClear="2990101011" />
- <ALID id="990101012" logicalName="WaferRobot.RobotExecuteFail" description="" category="EquipmentStatusWarning" enabled="false" eventSet="1990101012" eventClear="2990101012" />
- <ALID id="990101013" logicalName="WaferRobot.RobotHasError" description="" category="EquipmentStatusWarning" enabled="false" eventSet="1990101013" eventClear="2990101013" />
- <ALID id="990101014" logicalName="WaferRobot.RobotHomeFailAlarm" description="" category="EquipmentStatusWarning" enabled="false" eventSet="1990101014" eventClear="2990101014" />
- <ALID id="990101015" logicalName="WaferRobot.RobotHomeTimeoutAlarm" description="" category="EquipmentStatusWarning" enabled="false" eventSet="1990101015" eventClear="2990101015" />
- <ALID id="990101016" logicalName="WaferRobot.RobotReceiveInvalidPackage" description="" category="EquipmentStatusWarning" enabled="false" eventSet="1990101016" eventClear="2990101016" />
- <ALID id="990101017" logicalName="WaferRobot.RobotSensorFoundWaferOnBladeAfterPlaceAlarm" description="" category="EquipmentStatusWarning" enabled="false" eventSet="1990101017" eventClear="2990101017" />
- <ALID id="990101018" logicalName="WaferRobot.RobotSensorNotFoundWaferOnBladeAfterPickAlarm" description="" category="EquipmentStatusWarning" enabled="false" eventSet="1990101018" eventClear="2990101018" />
- <ALID id="990101019" logicalName="WaferRobot.SetServoOnFailAlarm" description="" category="EquipmentStatusWarning" enabled="false" eventSet="1990101019" eventClear="2990101019" />
- <ALID id="990101020" logicalName="WaferRobot.SetServoOnTimeoutAlarm" description="" category="EquipmentStatusWarning" enabled="false" eventSet="1990101020" eventClear="2990101020" />
- <ALID id="990101021" logicalName="WaferRobot.SetSpeedFailAlarm" description="" category="EquipmentStatusWarning" enabled="false" eventSet="1990101021" eventClear="2990101021" />
- <ALID id="990101022" logicalName="WaferRobot.SetSpeedTimeoutAlarm" description="" category="EquipmentStatusWarning" enabled="false" eventSet="1990101022" eventClear="2990101022" />
- <ALID id="990101023" logicalName="WaferRobot.TargetWaferNotPresentWarning" description="" category="EquipmentStatusWarning" enabled="false" eventSet="1990101023" eventClear="2990101023" />
- <ALID id="990101024" logicalName="WaferRobot.TargetWaferPresentWarning" description="" category="EquipmentStatusWarning" enabled="false" eventSet="1990101024" eventClear="2990101024" />
- <ALID id="990101025" logicalName="WaferRobot.PickWaferPauseWarning" description="WaferRobot pick wafer pause warning " category="EquipmentStatusWarning" enabled="false" eventSet="1990101025" eventClear="2990101025" />
- <ALID id="990101026" logicalName="WaferRobot.PickWaferResumeWarning" description="WaferRobot pick wafer resume warning " category="EquipmentStatusWarning" enabled="false" eventSet="1990101026" eventClear="2990101026" />
- <ALID id="990101027" logicalName="WaferRobot.PlaceWaferPauseWarning" description="WaferRobot place wafer pause warning " category="EquipmentStatusWarning" enabled="false" eventSet="1990101027" eventClear="2990101027" />
- <ALID id="990101028" logicalName="WaferRobot.PlaceWaferResumeWarning" description="WaferRobot place wafer resume warning " category="EquipmentStatusWarning" enabled="false" eventSet="1990101028" eventClear="2990101028" />
- <ALID id="990101029" logicalName="WaferRobot.MapFailAlarm" description="Map fail reason " category="EquipmentStatusWarning" enabled="false" eventSet="1990101029" eventClear="2990101029" />
- <ALID id="990101030" logicalName="WaferRobot.MapTimeoutAlarm" description="Map timeout " category="EquipmentStatusWarning" enabled="false" eventSet="1990101030" eventClear="2990101030" />
- <ALID id="990101031" logicalName="WaferRobot.AlarmSignaWaferRobotTPStatusWarning" description="Wafer Robot TP Status Warning Trigger " category="EquipmentStatusWarning" enabled="false" eventSet="1990101031" eventClear="2990101031" />
- <ALID id="990101032" logicalName="WaferRobot.RobotDIAlarm" description="Robot DI Alarm Trigger " category="EquipmentStatusWarning" enabled="false" eventSet="1990101032" eventClear="2990101032" />
- <ALID id="1000101001" logicalName="Boat.AutoShutterCloseTimeOut" description="Boat auto shutter close timeout " category="EquipmentStatusWarning" enabled="false" eventSet="11000101001" eventClear="21000101001" />
- <ALID id="1000101002" logicalName="Boat.AutoShutterDownTimeOut" description="Boat auto shutter down timeout " category="EquipmentStatusWarning" enabled="false" eventSet="11000101002" eventClear="21000101002" />
- <ALID id="1000101003" logicalName="Boat.AutoShutterMoveFailedForInterlock" description="Boat auto shutter move failed for interlock " category="EquipmentStatusWarning" enabled="false" eventSet="11000101003" eventClear="21000101003" />
- <ALID id="1000101004" logicalName="Boat.AutoShutterOpenTimeOut" description="Boat auto shutter open timeout " category="EquipmentStatusWarning" enabled="false" eventSet="11000101004" eventClear="21000101004" />
- <ALID id="1000101005" logicalName="Boat.AutoShutterUpTimeOut" description="Boat auto shutter up timeout " category="EquipmentStatusWarning" enabled="false" eventSet="11000101005" eventClear="21000101005" />
- <ALID id="1000101006" logicalName="Boat.BoatHumanInterlock" description="Boat boat human interlock " category="EquipmentStatusWarning" enabled="false" eventSet="11000101006" eventClear="21000101006" />
- <ALID id="1000101007" logicalName="Boat.BoatRAxisMoveFailedForInterlock" description="Boat boat r axis move failed for interlock " category="EquipmentStatusWarning" enabled="false" eventSet="11000101007" eventClear="21000101007" />
- <ALID id="1000101008" logicalName="Boat.BoatRAxisMoveTimeOut" description="Boat boat r axis move timeout " category="EquipmentStatusWarning" enabled="false" eventSet="11000101008" eventClear="21000101008" />
- <ALID id="1000101009" logicalName="Boat.BoatZAxisDownLimit" description="Boat boat z axis down limit " category="EquipmentStatusWarning" enabled="false" eventSet="11000101009" eventClear="21000101009" />
- <ALID id="1000101010" logicalName="Boat.BoatZAxisMoveFailedForAutoShutterNotDown" description="Boat boat z axis move failed for auto shutter not down " category="EquipmentStatusWarning" enabled="false" eventSet="11000101010" eventClear="21000101010" />
- <ALID id="1000101011" logicalName="Boat.BoatZAxisMoveFailedForAutoShutterNotOpen" description="Boat boat z axis move failed for auto shutter not open " category="EquipmentStatusWarning" enabled="false" eventSet="11000101011" eventClear="21000101011" />
- <ALID id="1000101012" logicalName="Boat.BoatZAxisMoveFailedForHumanInterlock" description="Boat boat z axis move failed for human interlock " category="EquipmentStatusWarning" enabled="false" eventSet="11000101012" eventClear="21000101012" />
- <ALID id="1000101013" logicalName="Boat.BoatZAxisMoveFailedForInterlock" description="Boat boat z axis move failed for interlock " category="EquipmentStatusWarning" enabled="false" eventSet="11000101013" eventClear="21000101013" />
- <ALID id="1000101014" logicalName="Boat.BoatZAxisMoveFailedForTiltStatus" description="Boat boat z axis move failed for tilt status " category="EquipmentStatusWarning" enabled="false" eventSet="11000101014" eventClear="21000101014" />
- <ALID id="1000101015" logicalName="Boat.BoatZAxisMoveFailedForWaferRobotArmExtend" description="Boat boat z axis move failed for wafer robot arm extend " category="EquipmentStatusWarning" enabled="false" eventSet="11000101015" eventClear="21000101015" />
- <ALID id="1000101016" logicalName="Boat.BoatZAxisMoveTimeOut" description="Boat boat z axis move timeout " category="EquipmentStatusWarning" enabled="false" eventSet="11000101016" eventClear="21000101016" />
- <ALID id="1000101017" logicalName="Boat.BoatZAxisUpLimit" description="Boat boat z axis up limit " category="EquipmentStatusWarning" enabled="false" eventSet="11000101017" eventClear="21000101017" />
- <ALID id="1000101018" logicalName="Boat.BoatRAxisHomeFailed" description="Boat boat R Axis home failed " category="EquipmentStatusWarning" enabled="false" eventSet="11000101018" eventClear="21000101018" />
- <ALID id="1000101019" logicalName="Boat.BoatRAxisHomeTimeout" description="Boat boat R Axis home timeout " category="EquipmentStatusWarning" enabled="false" eventSet="11000101019" eventClear="21000101019" />
- <ALID id="1000101020" logicalName="Boat.BoatZAxisHomeFailed" description="Boat boat Z Axis home failed " category="EquipmentStatusWarning" enabled="false" eventSet="11000101020" eventClear="21000101020" />
- <ALID id="1000101021" logicalName="Boat.BoatZAxisHomeTimeout" description="Boat boat Z Axis home timeout " category="EquipmentStatusWarning" enabled="false" eventSet="11000101021" eventClear="21000101021" />
- <ALID id="1000101022" logicalName="Boat.BoatStepperMotorAlarm" description="Boat Boat Stepper Motor Alarm" category="EquipmentStatusWarning" enabled="false" eventSet="11000101022" eventClear="21000101022" />
- <ALID id="1010101001" logicalName="CHM.ConcentrationO2ToleranceAlarm" description="ConcentrationO2 tolerance alarm " category="EquipmentStatusWarning" enabled="false" eventSet="11010101001" eventClear="21010101001" />
- <ALID id="1010101002" logicalName="CHM.ConcentrationO2ToleranceWarning" description="ConcentrationO2 tolerance warning " category="EquipmentStatusWarning" enabled="false" eventSet="11010101002" eventClear="21010101002" />
- <ALID id="1010101003" logicalName="CHM.ExhaustBoxExhaustMS4ToleranceAlarm" description="ExhaustBoxExhaustMS4 tolerance alarm " category="EquipmentStatusWarning" enabled="false" eventSet="11010101003" eventClear="21010101003" />
- <ALID id="1010101004" logicalName="CHM.ExhaustBoxExhaustMS4ToleranceWarning" description="ExhaustBoxExhaustMS4 tolerance warning " category="EquipmentStatusWarning" enabled="false" eventSet="11010101004" eventClear="21010101004" />
- <ALID id="1010101005" logicalName="CHM.FrontBodyExhaustMS6ToleranceAlarm" description="FrontBodyExhaustMS6 tolerance alarm " category="EquipmentStatusWarning" enabled="false" eventSet="11010101005" eventClear="21010101005" />
- <ALID id="1010101006" logicalName="CHM.FrontBodyExhaustMS6ToleranceWarning" description="FrontBodyExhaustMS6 tolerance warning " category="EquipmentStatusWarning" enabled="false" eventSet="11010101006" eventClear="21010101006" />
- <ALID id="1010101007" logicalName="CHM.GasBoxExhaustMS2ToleranceAlarm" description="GasBoxExhaustMS2 tolerance alarm " category="EquipmentStatusWarning" enabled="false" eventSet="11010101007" eventClear="21010101007" />
- <ALID id="1010101008" logicalName="CHM.GasBoxExhaustMS2ToleranceWarning" description="GasBoxExhaustMS2 tolerance warning " category="EquipmentStatusWarning" enabled="false" eventSet="11010101008" eventClear="21010101008" />
- <ALID id="1010101009" logicalName="CHM.HeatingExhaustMS1ToleranceAlarm" description="HeatingExhaustMS1 tolerance alarm " category="EquipmentStatusWarning" enabled="false" eventSet="11010101009" eventClear="21010101009" />
- <ALID id="1010101010" logicalName="CHM.HeatingExhaustMS1ToleranceWarning" description="HeatingExhaustMS1 tolerance warning " category="EquipmentStatusWarning" enabled="false" eventSet="11010101010" eventClear="21010101010" />
- <ALID id="1010101011" logicalName="CHM.LAExhaustMS7ToleranceAlarm" description="LAExhaustMS7 tolerance alarm " category="EquipmentStatusWarning" enabled="false" eventSet="11010101011" eventClear="21010101011" />
- <ALID id="1010101012" logicalName="CHM.LAExhaustMS7ToleranceWarning" description="LAExhaustMS7 tolerance warning " category="EquipmentStatusWarning" enabled="false" eventSet="11010101012" eventClear="21010101012" />
- <ALID id="1010101013" logicalName="CHM.LoadingAreaExhaustMS5ToleranceAlarm" description="LoadingAreaExhaustMS5 tolerance alarm " category="EquipmentStatusWarning" enabled="false" eventSet="11010101013" eventClear="21010101013" />
- <ALID id="1010101014" logicalName="CHM.LoadingAreaExhaustMS5ToleranceWarning" description="LoadingAreaExhaustMS5 tolerance warning " category="EquipmentStatusWarning" enabled="false" eventSet="11010101014" eventClear="21010101014" />
- <ALID id="1010101015" logicalName="CHM.N24PurgePressureToleranceAlarm" description="N24PurgePressure tolerance alarm " category="EquipmentStatusWarning" enabled="false" eventSet="11010101015" eventClear="21010101015" />
- <ALID id="1010101016" logicalName="CHM.N24PurgePressureToleranceWarning" description="N24PurgePressure tolerance warning " category="EquipmentStatusWarning" enabled="false" eventSet="11010101016" eventClear="21010101016" />
- <ALID id="1010101017" logicalName="CHM.N25PurgePressureToleranceAlarm" description="N25PurgePressure tolerance alarm " category="EquipmentStatusWarning" enabled="false" eventSet="11010101017" eventClear="21010101017" />
- <ALID id="1010101018" logicalName="CHM.N25PurgePressureToleranceWarning" description="N25PurgePressure tolerance warning " category="EquipmentStatusWarning" enabled="false" eventSet="11010101018" eventClear="21010101018" />
- <ALID id="1010101019" logicalName="CHM.N26PurgePressureToleranceAlarm" description="N26PurgePressure tolerance alarm " category="EquipmentStatusWarning" enabled="false" eventSet="11010101019" eventClear="21010101019" />
- <ALID id="1010101020" logicalName="CHM.N26PurgePressureToleranceWarning" description="N26PurgePressure tolerance warning " category="EquipmentStatusWarning" enabled="false" eventSet="11010101020" eventClear="21010101020" />
- <ALID id="1010101021" logicalName="CHM.N27PurgePressureToleranceAlarm" description="N27PurgePressure tolerance alarm " category="EquipmentStatusWarning" enabled="false" eventSet="11010101021" eventClear="21010101021" />
- <ALID id="1010101022" logicalName="CHM.N27PurgePressureToleranceWarning" description="N27PurgePressure tolerance warning " category="EquipmentStatusWarning" enabled="false" eventSet="11010101022" eventClear="21010101022" />
- <ALID id="1010101023" logicalName="CHM.O2Detector1ToleranceAlarm" description="O2Detector1 tolerance alarm " category="EquipmentStatusWarning" enabled="false" eventSet="11010101023" eventClear="21010101023" />
- <ALID id="1010101024" logicalName="CHM.O2Detector1ToleranceWarning" description="O2Detector1 tolerance warning " category="EquipmentStatusWarning" enabled="false" eventSet="11010101024" eventClear="21010101024" />
- <ALID id="1010101025" logicalName="CHM.O2Detector2ToleranceAlarm" description="O2Detector2 tolerance alarm " category="EquipmentStatusWarning" enabled="false" eventSet="11010101025" eventClear="21010101025" />
- <ALID id="1010101026" logicalName="CHM.O2Detector2ToleranceWarning" description="O2Detector2 tolerance warning " category="EquipmentStatusWarning" enabled="false" eventSet="11010101026" eventClear="21010101026" />
- <ALID id="1010101027" logicalName="CHM.PG12ToleranceAlarm" description="PG12 tolerance alarm " category="EquipmentStatusWarning" enabled="false" eventSet="11010101027" eventClear="21010101027" />
- <ALID id="1010101028" logicalName="CHM.PG12ToleranceWarning" description="PG12 tolerance warning " category="EquipmentStatusWarning" enabled="false" eventSet="11010101028" eventClear="21010101028" />
- <ALID id="1010101029" logicalName="CHM.PG13ToleranceAlarm" description="PG13 tolerance alarm " category="EquipmentStatusWarning" enabled="false" eventSet="11010101029" eventClear="21010101029" />
- <ALID id="1010101030" logicalName="CHM.PG13ToleranceWarning" description="PG13 tolerance warning " category="EquipmentStatusWarning" enabled="false" eventSet="11010101030" eventClear="21010101030" />
- <ALID id="1010101031" logicalName="CHM.PG14ToleranceAlarm" description="PG14 tolerance alarm " category="EquipmentStatusWarning" enabled="false" eventSet="11010101031" eventClear="21010101031" />
- <ALID id="1010101032" logicalName="CHM.PG14ToleranceWarning" description="PG14 tolerance warning " category="EquipmentStatusWarning" enabled="false" eventSet="11010101032" eventClear="21010101032" />
- <ALID id="1010101033" logicalName="CHM.PressureGasBoxUpperVG21ToleranceAlarm" description="PressureGasBoxUpperVG21 tolerance alarm " category="EquipmentStatusWarning" enabled="false" eventSet="11010101033" eventClear="21010101033" />
- <ALID id="1010101034" logicalName="CHM.PressureGasBoxUpperVG21ToleranceWarning" description="PressureGasBoxUpperVG21 tolerance warning " category="EquipmentStatusWarning" enabled="false" eventSet="11010101034" eventClear="21010101034" />
- <ALID id="1010101035" logicalName="CHM.PressureGasBoxUpperVG22ToleranceAlarm" description="PressureGasBoxUpperVG22 tolerance alarm " category="EquipmentStatusWarning" enabled="false" eventSet="11010101035" eventClear="21010101035" />
- <ALID id="1010101036" logicalName="CHM.PressureGasBoxUpperVG22ToleranceWarning" description="PressureGasBoxUpperVG22 tolerance warning " category="EquipmentStatusWarning" enabled="false" eventSet="11010101036" eventClear="21010101036" />
- <ALID id="1010101037" logicalName="CHM.PressureGLBoxPG1ToleranceAlarm" description="PressureGLBoxPG1 tolerance alarm " category="EquipmentStatusWarning" enabled="false" eventSet="11010101037" eventClear="21010101037" />
- <ALID id="1010101038" logicalName="CHM.PressureGLBoxPG1ToleranceWarning" description="PressureGLBoxPG1 tolerance warning " category="EquipmentStatusWarning" enabled="false" eventSet="11010101038" eventClear="21010101038" />
- <ALID id="1010101039" logicalName="CHM.PressureGLBoxPG2ToleranceAlarm" description="PressureGLBoxPG2 tolerance alarm " category="EquipmentStatusWarning" enabled="false" eventSet="11010101039" eventClear="21010101039" />
- <ALID id="1010101040" logicalName="CHM.PressureGLBoxPG2ToleranceWarning" description="PressureGLBoxPG2 tolerance warning " category="EquipmentStatusWarning" enabled="false" eventSet="11010101040" eventClear="21010101040" />
- <ALID id="1010101041" logicalName="CHM.PressureGLBoxPG3ToleranceAlarm" description="PressureGLBoxPG3 tolerance alarm " category="EquipmentStatusWarning" enabled="false" eventSet="11010101041" eventClear="21010101041" />
- <ALID id="1010101042" logicalName="CHM.PressureGLBoxPG3ToleranceWarning" description="PressureGLBoxPG3 tolerance warning " category="EquipmentStatusWarning" enabled="false" eventSet="11010101042" eventClear="21010101042" />
- <ALID id="1010101043" logicalName="CHM.PressureGLBoxPG4ToleranceAlarm" description="PressureGLBoxPG4 tolerance alarm " category="EquipmentStatusWarning" enabled="false" eventSet="11010101043" eventClear="21010101043" />
- <ALID id="1010101044" logicalName="CHM.PressureGLBoxPG4ToleranceWarning" description="PressureGLBoxPG4 tolerance warning " category="EquipmentStatusWarning" enabled="false" eventSet="11010101044" eventClear="21010101044" />
- <ALID id="1010101045" logicalName="CHM.PressureGLBoxPG5ToleranceAlarm" description="PressureGLBoxPG5 tolerance alarm " category="EquipmentStatusWarning" enabled="false" eventSet="11010101045" eventClear="21010101045" />
- <ALID id="1010101046" logicalName="CHM.PressureGLBoxPG5ToleranceWarning" description="PressureGLBoxPG5 tolerance warning " category="EquipmentStatusWarning" enabled="false" eventSet="11010101046" eventClear="21010101046" />
- <ALID id="1010101047" logicalName="CHM.PressureGLBoxPG6ToleranceAlarm" description="PressureGLBoxPG6 tolerance alarm " category="EquipmentStatusWarning" enabled="false" eventSet="11010101047" eventClear="21010101047" />
- <ALID id="1010101048" logicalName="CHM.PressureGLBoxPG6ToleranceWarning" description="PressureGLBoxPG6 tolerance warning " category="EquipmentStatusWarning" enabled="false" eventSet="11010101048" eventClear="21010101048" />
- <ALID id="1010101049" logicalName="CHM.PS11ToleranceAlarm" description="PS11 tolerance alarm " category="EquipmentStatusWarning" enabled="false" eventSet="11010101049" eventClear="21010101049" />
- <ALID id="1010101050" logicalName="CHM.PS11ToleranceWarning" description="PS11 tolerance warning " category="EquipmentStatusWarning" enabled="false" eventSet="11010101050" eventClear="21010101050" />
- <ALID id="1010101051" logicalName="CHM.PS13ToleranceAlarm" description="PS13 tolerance alarm " category="EquipmentStatusWarning" enabled="false" eventSet="11010101051" eventClear="21010101051" />
- <ALID id="1010101052" logicalName="CHM.PS13ToleranceWarning" description="PS13 tolerance warning " category="EquipmentStatusWarning" enabled="false" eventSet="11010101052" eventClear="21010101052" />
- <ALID id="1010101053" logicalName="CHM.PS17ToleranceAlarm" description="PS17 tolerance alarm " category="EquipmentStatusWarning" enabled="false" eventSet="11010101053" eventClear="21010101053" />
- <ALID id="1010101054" logicalName="CHM.PS17ToleranceWarning" description="PS17 tolerance warning " category="EquipmentStatusWarning" enabled="false" eventSet="11010101054" eventClear="21010101054" />
- <ALID id="1010101055" logicalName="CHM.PT71ToleranceAlarm" description="PT71 tolerance alarm " category="EquipmentStatusWarning" enabled="false" eventSet="11010101055" eventClear="21010101055" />
- <ALID id="1010101056" logicalName="CHM.PT71ToleranceWarning" description="PT71 tolerance warning " category="EquipmentStatusWarning" enabled="false" eventSet="11010101056" eventClear="21010101056" />
- <ALID id="1010101057" logicalName="CHM.PT80ToleranceAlarm" description="PT80 tolerance alarm " category="EquipmentStatusWarning" enabled="false" eventSet="11010101057" eventClear="21010101057" />
- <ALID id="1010101058" logicalName="CHM.PT80ToleranceWarning" description="PT80 tolerance warning " category="EquipmentStatusWarning" enabled="false" eventSet="11010101058" eventClear="21010101058" />
- <ALID id="1010101059" logicalName="CHM.RHCExhaustMS8ToleranceAlarm" description="RHCExhaustMS8 tolerance alarm " category="EquipmentStatusWarning" enabled="false" eventSet="11010101059" eventClear="21010101059" />
- <ALID id="1010101060" logicalName="CHM.RHCExhaustMS8ToleranceWarning" description="RHCExhaustMS8 tolerance warning " category="EquipmentStatusWarning" enabled="false" eventSet="11010101060" eventClear="21010101060" />
- <ALID id="1010101061" logicalName="CHM.ScavengerExhaustMS3ToleranceAlarm" description="ScavengerExhaustMS3 tolerance alarm " category="EquipmentStatusWarning" enabled="false" eventSet="11010101061" eventClear="21010101061" />
- <ALID id="1010101062" logicalName="CHM.ScavengerExhaustMS3ToleranceWarning" description="ScavengerExhaustMS3 tolerance warning " category="EquipmentStatusWarning" enabled="false" eventSet="11010101062" eventClear="21010101062" />
- <ALID id="1010101063" logicalName="CHM.VG11ToleranceAlarm" description="VG11 tolerance alarm " category="EquipmentStatusWarning" enabled="false" eventSet="11010101063" eventClear="21010101063" />
- <ALID id="1010101064" logicalName="CHM.VG11ToleranceWarning" description="VG11 tolerance warning " category="EquipmentStatusWarning" enabled="false" eventSet="11010101064" eventClear="21010101064" />
- <ALID id="1010101065" logicalName="CHM.VG12ToleranceAlarm" description="VG12 tolerance alarm " category="EquipmentStatusWarning" enabled="false" eventSet="11010101065" eventClear="21010101065" />
- <ALID id="1010101066" logicalName="CHM.VG12ToleranceWarning" description="VG12 tolerance warning " category="EquipmentStatusWarning" enabled="false" eventSet="11010101066" eventClear="21010101066" />
- <ALID id="1010101067" logicalName="CHM.VG14ToleranceAlarm" description="VG14 tolerance alarm " category="EquipmentStatusWarning" enabled="false" eventSet="11010101067" eventClear="21010101067" />
- <ALID id="1010101068" logicalName="CHM.VG14ToleranceWarning" description="VG14 tolerance warning " category="EquipmentStatusWarning" enabled="false" eventSet="11010101068" eventClear="21010101068" />
- <ALID id="1010101069" logicalName="CHM.WaterFlowFL901ToleranceAlarm" description="WaterFlowFL901 tolerance alarm " category="EquipmentStatusWarning" enabled="false" eventSet="11010101069" eventClear="21010101069" />
- <ALID id="1010101070" logicalName="CHM.WaterFlowFL901ToleranceWarning" description="WaterFlowFL901 tolerance warning " category="EquipmentStatusWarning" enabled="false" eventSet="11010101070" eventClear="21010101070" />
- <ALID id="1010101071" logicalName="CHM.WaterFlowFL902ToleranceAlarm" description="WaterFlowFL902 tolerance alarm " category="EquipmentStatusWarning" enabled="false" eventSet="11010101071" eventClear="21010101071" />
- <ALID id="1010101072" logicalName="CHM.WaterFlowFL902ToleranceWarning" description="WaterFlowFL902 tolerance warning " category="EquipmentStatusWarning" enabled="false" eventSet="11010101072" eventClear="21010101072" />
- <ALID id="1010101073" logicalName="CHM.WaterFlowFL903ToleranceAlarm" description="WaterFlowFL903 tolerance alarm " category="EquipmentStatusWarning" enabled="false" eventSet="11010101073" eventClear="21010101073" />
- <ALID id="1010101074" logicalName="CHM.WaterFlowFL903ToleranceWarning" description="WaterFlowFL903 tolerance warning " category="EquipmentStatusWarning" enabled="false" eventSet="11010101074" eventClear="21010101074" />
- <ALID id="1010101075" logicalName="CHM.WaterFlowFL904ToleranceAlarm" description="WaterFlowFL904 tolerance alarm " category="EquipmentStatusWarning" enabled="false" eventSet="11010101075" eventClear="21010101075" />
- <ALID id="1010101076" logicalName="CHM.WaterFlowFL904ToleranceWarning" description="WaterFlowFL904 tolerance warning " category="EquipmentStatusWarning" enabled="false" eventSet="11010101076" eventClear="21010101076" />
- <ALID id="1010101077" logicalName="CHM.WaterFlowFL905ToleranceAlarm" description="WaterFlowFL905 tolerance alarm " category="EquipmentStatusWarning" enabled="false" eventSet="11010101077" eventClear="21010101077" />
- <ALID id="1010101078" logicalName="CHM.WaterFlowFL905ToleranceWarning" description="WaterFlowFL905 tolerance warning " category="EquipmentStatusWarning" enabled="false" eventSet="11010101078" eventClear="21010101078" />
- <ALID id="1010101079" logicalName="CHM.WaterFlowFL906ToleranceAlarm" description="WaterFlowFL906 tolerance alarm " category="EquipmentStatusWarning" enabled="false" eventSet="11010101079" eventClear="21010101079" />
- <ALID id="1010101080" logicalName="CHM.WaterFlowFL906ToleranceWarning" description="WaterFlowFL906 tolerance warning " category="EquipmentStatusWarning" enabled="false" eventSet="11010101080" eventClear="21010101080" />
- <ALID id="1010101081" logicalName="CHM.WaterFlowFS102ToleranceAlarm" description="WaterFlowFS102 tolerance alarm " category="EquipmentStatusWarning" enabled="false" eventSet="11010101081" eventClear="21010101081" />
- <ALID id="1010101082" logicalName="CHM.WaterFlowFS102ToleranceWarning" description="WaterFlowFS102 tolerance warning " category="EquipmentStatusWarning" enabled="false" eventSet="11010101082" eventClear="21010101082" />
- <ALID id="1010101083" logicalName="CHM.WaterFlowFS104ToleranceAlarm" description="WaterFlowFS104 tolerance alarm " category="EquipmentStatusWarning" enabled="false" eventSet="11010101083" eventClear="21010101083" />
- <ALID id="1010101084" logicalName="CHM.WaterFlowFS104ToleranceWarning" description="WaterFlowFS104 tolerance warning " category="EquipmentStatusWarning" enabled="false" eventSet="11010101084" eventClear="21010101084" />
- <ALID id="1010101085" logicalName="CHM.WaterFlowFS105ToleranceAlarm" description="WaterFlowFS105 tolerance alarm " category="EquipmentStatusWarning" enabled="false" eventSet="11010101085" eventClear="21010101085" />
- <ALID id="1010101086" logicalName="CHM.WaterFlowFS105ToleranceWarning" description="WaterFlowFS105 tolerance warning " category="EquipmentStatusWarning" enabled="false" eventSet="11010101086" eventClear="21010101086" />
- <ALID id="1010101087" logicalName="CHM.WaterFlowFS106ToleranceAlarm" description="WaterFlowFS106 tolerance alarm " category="EquipmentStatusWarning" enabled="false" eventSet="11010101087" eventClear="21010101087" />
- <ALID id="1010101088" logicalName="CHM.WaterFlowFS106ToleranceWarning" description="WaterFlowFS106 tolerance warning " category="EquipmentStatusWarning" enabled="false" eventSet="11010101088" eventClear="21010101088" />
- <ALID id="1010101089" logicalName="CHM.WaterFlowFS111ToleranceAlarm" description="WaterFlowFS111 tolerance alarm " category="EquipmentStatusWarning" enabled="false" eventSet="11010101089" eventClear="21010101089" />
- <ALID id="1010101090" logicalName="CHM.WaterFlowFS111ToleranceWarning" description="WaterFlowFS111 tolerance warning " category="EquipmentStatusWarning" enabled="false" eventSet="11010101090" eventClear="21010101090" />
- <ALID id="1010101091" logicalName="CHM.WaterFlowFS116ToleranceAlarm" description="WaterFlowFS116 tolerance alarm " category="EquipmentStatusWarning" enabled="false" eventSet="11010101091" eventClear="21010101091" />
- <ALID id="1010101092" logicalName="CHM.WaterFlowFS116ToleranceWarning" description="WaterFlowFS116 tolerance warning " category="EquipmentStatusWarning" enabled="false" eventSet="11010101092" eventClear="21010101092" />
- <ALID id="1790101001" logicalName="CarrierRobot.BladeCassetteNotPresentWarning" description="Blade cassette not present " category="EquipmentStatusWarning" enabled="false" eventSet="11790101001" eventClear="21790101001" />
- <ALID id="1790101002" logicalName="CarrierRobot.BladeCassettePresentWarning" description="Blade cassette present " category="EquipmentStatusWarning" enabled="false" eventSet="11790101002" eventClear="21790101002" />
- <ALID id="1790101003" logicalName="CarrierRobot.CheckCarrierIDFailAlarm" description="Check carrier id fail reason " category="EquipmentStatusWarning" enabled="false" eventSet="11790101003" eventClear="21790101003" />
- <ALID id="1790101004" logicalName="CarrierRobot.CheckCassetteInformationFailAlarm" description="Check cassette information fail " category="EquipmentStatusWarning" enabled="false" eventSet="11790101004" eventClear="21790101004" />
- <ALID id="1790101005" logicalName="CarrierRobot.CheckLoadFailAlarm" description="Check load fail reason " category="EquipmentStatusWarning" enabled="false" eventSet="11790101005" eventClear="21790101005" />
- <ALID id="1790101006" logicalName="CarrierRobot.CheckLoadTimeoutAlarm" description="Check load timeout " category="EquipmentStatusWarning" enabled="false" eventSet="11790101006" eventClear="21790101006" />
- <ALID id="1790101007" logicalName="CarrierRobot.LoadCassetteFailAlarm" description="Load cassette fail reason " category="EquipmentStatusWarning" enabled="false" eventSet="11790101007" eventClear="21790101007" />
- <ALID id="1790101008" logicalName="CarrierRobot.LoadCassetteMappingFailAlarm" description="Load cassette mapping fail reason " category="EquipmentStatusWarning" enabled="false" eventSet="11790101008" eventClear="21790101008" />
- <ALID id="1790101009" logicalName="CarrierRobot.LoadCassettePauseWarning" description="Load cassette pause " category="EquipmentStatusWarning" enabled="false" eventSet="11790101009" eventClear="21790101009" />
- <ALID id="1790101010" logicalName="CarrierRobot.LoadCassetteResumeWarning" description="Load cassette resume " category="EquipmentStatusWarning" enabled="false" eventSet="11790101010" eventClear="21790101010" />
- <ALID id="1790101011" logicalName="CarrierRobot.LoadCassetteTimeoutAlarm" description="Load cassette timeout " category="EquipmentStatusWarning" enabled="false" eventSet="11790101011" eventClear="21790101011" />
- <ALID id="1790101012" logicalName="CarrierRobot.PickCassetteFailAlarm" description="Pick cassette fail reason " category="EquipmentStatusWarning" enabled="false" eventSet="11790101012" eventClear="21790101012" />
- <ALID id="1790101013" logicalName="CarrierRobot.PickCassettePauseWarning" description="Pick cassette pause " category="EquipmentStatusWarning" enabled="false" eventSet="11790101013" eventClear="21790101013" />
- <ALID id="1790101014" logicalName="CarrierRobot.PickCassetteResumeWarning" description="Pick cassette resume " category="EquipmentStatusWarning" enabled="false" eventSet="11790101014" eventClear="21790101014" />
- <ALID id="1790101015" logicalName="CarrierRobot.PickCassetteTimeoutAlarm" description="Pick cassette timeout " category="EquipmentStatusWarning" enabled="false" eventSet="11790101015" eventClear="21790101015" />
- <ALID id="1790101016" logicalName="CarrierRobot.PlaceCassetteFailAlarm" description="Place cassette fail reason " category="EquipmentStatusWarning" enabled="false" eventSet="11790101016" eventClear="21790101016" />
- <ALID id="1790101017" logicalName="CarrierRobot.PlaceCassettePauseWarning" description="Place cassette pause " category="EquipmentStatusWarning" enabled="false" eventSet="11790101017" eventClear="21790101017" />
- <ALID id="1790101018" logicalName="CarrierRobot.PlaceCassetteResumeWarning" description="Place cassette resume " category="EquipmentStatusWarning" enabled="false" eventSet="11790101018" eventClear="21790101018" />
- <ALID id="1790101019" logicalName="CarrierRobot.PlaceCassetteTimeoutAlarm" description="Place cassette timeout " category="EquipmentStatusWarning" enabled="false" eventSet="11790101019" eventClear="21790101019" />
- <ALID id="1790101020" logicalName="CarrierRobot.RequestCassettePresentFailAlarm" description="Request cassette present fail " category="EquipmentStatusWarning" enabled="false" eventSet="11790101020" eventClear="21790101020" />
- <ALID id="1790101021" logicalName="CarrierRobot.RequestCassettePresentTimeoutAlarm" description="Request cassette present timeout " category="EquipmentStatusWarning" enabled="false" eventSet="11790101021" eventClear="21790101021" />
- <ALID id="1790101022" logicalName="CarrierRobot.RobotHasError" description="Robot has error " category="EquipmentStatusWarning" enabled="false" eventSet="11790101022" eventClear="21790101022" />
- <ALID id="1790101023" logicalName="CarrierRobot.RobotHomeFailAlarm" description="Robot home fail reason " category="EquipmentStatusWarning" enabled="false" eventSet="11790101023" eventClear="21790101023" />
- <ALID id="1790101024" logicalName="CarrierRobot.RobotHomeTimeoutAlarm" description="Robot home timeout " category="EquipmentStatusWarning" enabled="false" eventSet="11790101024" eventClear="21790101024" />
- <ALID id="1790101025" logicalName="CarrierRobot.RobotSensorFoundCassetteOnBladeAfterPlaceAlarm" description="Robot sensor found cassette on blade after place " category="EquipmentStatusWarning" enabled="false" eventSet="11790101025" eventClear="21790101025" />
- <ALID id="1790101026" logicalName="CarrierRobot.RobotSensorNotFoundCassetteOnBladeAfterPickAlarm" description="Robot sensor not found cassette on blade after pick " category="EquipmentStatusWarning" enabled="false" eventSet="11790101026" eventClear="21790101026" />
- <ALID id="1790101027" logicalName="CarrierRobot.SetServoOnFailAlarm" description="Set servo on fail reason " category="EquipmentStatusWarning" enabled="false" eventSet="11790101027" eventClear="21790101027" />
- <ALID id="1790101028" logicalName="CarrierRobot.SetServoOnTimeoutAlarm" description="Set servo on timeout " category="EquipmentStatusWarning" enabled="false" eventSet="11790101028" eventClear="21790101028" />
- <ALID id="1790101029" logicalName="CarrierRobot.SetSpeedFailAlarm" description="Set speed fail " category="EquipmentStatusWarning" enabled="false" eventSet="11790101029" eventClear="21790101029" />
- <ALID id="1790101030" logicalName="CarrierRobot.SetSpeedTimeoutAlarm" description="Set speed timeout " category="EquipmentStatusWarning" enabled="false" eventSet="11790101030" eventClear="21790101030" />
- <ALID id="1790101031" logicalName="CarrierRobot.SetStageValveFailAlarm" description="Set stage valve fail reason " category="EquipmentStatusWarning" enabled="false" eventSet="11790101031" eventClear="21790101031" />
- <ALID id="1790101032" logicalName="CarrierRobot.SetStageValveTimeout" description="Set stage valve timeout " category="EquipmentStatusWarning" enabled="false" eventSet="11790101032" eventClear="21790101032" />
- <ALID id="1790101033" logicalName="CarrierRobot.TargetCassetteNotPresentWarning" description="Target cassette not present " category="EquipmentStatusWarning" enabled="false" eventSet="11790101033" eventClear="21790101033" />
- <ALID id="1790101034" logicalName="CarrierRobot.TargetCassettePresentWarning" description="Target cassette present " category="EquipmentStatusWarning" enabled="false" eventSet="11790101034" eventClear="21790101034" />
- <ALID id="1790101035" logicalName="CarrierRobot.UnloadCassetteFailAlarm" description="Unload cassette fail reason " category="EquipmentStatusWarning" enabled="false" eventSet="11790101035" eventClear="21790101035" />
- <ALID id="1790101036" logicalName="CarrierRobot.UnloadCassetteTimeoutAlarm" description="Unload cassette timeout " category="EquipmentStatusWarning" enabled="false" eventSet="11790101036" eventClear="21790101036" />
- <ALID id="1790101037" logicalName="CarrierRobot.UnoadCassettePauseWarning" description="Unload cassette pause " category="EquipmentStatusWarning" enabled="false" eventSet="11790101037" eventClear="21790101037" />
- <ALID id="1790101038" logicalName="CarrierRobot.UnoadCassetteResumeWarning" description="Unload cassette resume " category="EquipmentStatusWarning" enabled="false" eventSet="11790101038" eventClear="21790101038" />
- <ALID id="1790101039" logicalName="CarrierRobot.WaferMapFailAlarm" description="Wafer map fail reason " category="EquipmentStatusWarning" enabled="false" eventSet="11790101039" eventClear="21790101039" />
- <ALID id="1790101040" logicalName="CarrierRobot.WaferMapTimeout" description="Wafer map timeout " category="EquipmentStatusWarning" enabled="false" eventSet="11790101040" eventClear="21790101040" />
- <ALID id="1790101041" logicalName="CarrierRobot.WaitInCommandTimeout" description="Wait In Command timeout " category="EquipmentStatusWarning" enabled="false" eventSet="11790101041" eventClear="21790101041" />
- <ALID id="1790101042" logicalName="CarrierRobot.WaitOutCommandTimeout" description="Wait Out Command timeout " category="EquipmentStatusWarning" enabled="false" eventSet="11790101042" eventClear="21790101042" />
- <ALID id="1790101043" logicalName="CarrierRobot.WaitPodPrensentChangeTimeout" description="Wait pod prensent change timeout " category="EquipmentStatusWarning" enabled="false" eventSet="11790101043" eventClear="21790101043" />
- <ALID id="1790101044" logicalName="CarrierRobot.GotoFailAlarm" description="CarrierRobot goto fail " category="EquipmentStatusWarning" enabled="false" eventSet="11790101044" eventClear="21790101044" />
- <ALID id="1790101045" logicalName="CarrierRobot.GotoPauseWarning" description="CarrierRobot goto pause " category="EquipmentStatusWarning" enabled="false" eventSet="11790101045" eventClear="21790101045" />
- <ALID id="1790101046" logicalName="CarrierRobot.GotoResumeWarning" description="CarrierRobot goto resume " category="EquipmentStatusWarning" enabled="false" eventSet="11790101046" eventClear="21790101046" />
- <ALID id="1790101047" logicalName="CarrierRobot.GotoTimeoutAlarm" description="CarrierRobot goto timeout " category="EquipmentStatusWarning" enabled="false" eventSet="11790101047" eventClear="21790101047" />
- <ALID id="1790101048" logicalName="CarrierRobot.ShutterCloseTimeoutAlarm" description="Shutter Close Timeout " category="EquipmentStatusWarning" enabled="false" eventSet="11790101048" eventClear="21790101048" />
- <ALID id="1790101049" logicalName="CarrierRobot.ShutterOpenTimeoutAlarm" description="Shutter Open Timeout " category="EquipmentStatusWarning" enabled="false" eventSet="11790101049" eventClear="21790101049" />
- <ALID id="1790101050" logicalName="CarrierRobot.AlarmSignaFOUPRobotTPStatusWarning" description="FOUP Robot TP Status Warning Trigger " category="EquipmentStatusWarning" enabled="false" eventSet="11790101050" eventClear="21790101050" />
- <ALID id="1790101051" logicalName="CarrierRobot.RobotDIAlarm" description="Robot DI Alarm Trigger " category="EquipmentStatusWarning" enabled="false" eventSet="11790101051" eventClear="21790101051" />
- <ALID id="1930101001" logicalName="AutoShutter.AutoShutterCloseTimeOut" description="" category="EquipmentStatusWarning" enabled="false" eventSet="11930101001" eventClear="21930101001" />
- <ALID id="1930101001" logicalName="NXD15Controller1.CommunicationAlarm" description="NXD15Controller1 communication error " category="EquipmentStatusWarning" enabled="false" eventSet="11930101001" eventClear="21930101001" />
- <ALID id="1930101002" logicalName="AutoShutter.AutoShutterDownTimeOut" description="" category="EquipmentStatusWarning" enabled="false" eventSet="11930101002" eventClear="21930101002" />
- <ALID id="1930101002" logicalName="NXD15Controller1.ConnectionAlarm" description="NXD15Controller1 can not connect with 127.0.0.1:501 " category="EquipmentStatusWarning" enabled="false" eventSet="11930101002" eventClear="21930101002" />
- <ALID id="1930101003" logicalName="AutoShutter.AutoShutterMoveFailedForInterlock" description="" category="EquipmentStatusWarning" enabled="false" eventSet="11930101003" eventClear="21930101003" />
- <ALID id="1930101003" logicalName="NXD15Controller1.Controller10Warning" description="NXD15Controller1 AD1 Fault. " category="EquipmentStatusWarning" enabled="false" eventSet="11930101003" eventClear="21930101003" />
- <ALID id="1930101004" logicalName="AutoShutter.AutoShutterOpenTimeOut" description="" category="EquipmentStatusWarning" enabled="false" eventSet="11930101004" eventClear="21930101004" />
- <ALID id="1930101004" logicalName="NXD15Controller1.Controller11Warning" description="NXD15Controller1 AD2 Fault. " category="EquipmentStatusWarning" enabled="false" eventSet="11930101004" eventClear="21930101004" />
- <ALID id="1930101005" logicalName="AutoShutter.AutoShutterUpTimeOut" description="" category="EquipmentStatusWarning" enabled="false" eventSet="11930101005" eventClear="21930101005" />
- <ALID id="1930101005" logicalName="NXD15Controller1.Controller12Warning" description="NXD15Controller1 AD3 Fault. " category="EquipmentStatusWarning" enabled="false" eventSet="11930101005" eventClear="21930101005" />
- <ALID id="1930101006" logicalName="NXD15Controller1.Controller13Warning" description="NXD15Controller1 AD4 Fault. " category="EquipmentStatusWarning" enabled="false" eventSet="11930101006" eventClear="21930101006" />
- <ALID id="1930101007" logicalName="NXD15Controller1.Controller1Warning" description="NXD15Controller1 PV1 Upper Limit. " category="EquipmentStatusWarning" enabled="false" eventSet="11930101007" eventClear="21930101007" />
- <ALID id="1930101008" logicalName="NXD15Controller1.Controller21Warning" description="NXD15Controller1 CT1 Abnormal input. " category="EquipmentStatusWarning" enabled="false" eventSet="11930101008" eventClear="21930101008" />
- <ALID id="1930101009" logicalName="NXD15Controller1.Controller22Warning" description="NXD15Controller1 CT2 Abnormal input. " category="EquipmentStatusWarning" enabled="false" eventSet="11930101009" eventClear="21930101009" />
- <ALID id="1930101010" logicalName="NXD15Controller1.Controller23Warning" description="NXD15Controller1 CT3 Abnormal input. " category="EquipmentStatusWarning" enabled="false" eventSet="11930101010" eventClear="21930101010" />
- <ALID id="1930101011" logicalName="NXD15Controller1.Controller24Warning" description="NXD15Controller1 CT4 Abnormal input. " category="EquipmentStatusWarning" enabled="false" eventSet="11930101011" eventClear="21930101011" />
- <ALID id="1930101012" logicalName="NXD15Controller1.Controller25Warning" description="NXD15Controller1 Receiving Monitoring. " category="EquipmentStatusWarning" enabled="false" eventSet="11930101012" eventClear="21930101012" />
- <ALID id="1930101013" logicalName="NXD15Controller1.Controller26Warning" description="NXD15Controller1 Communication between modules has timed out. " category="EquipmentStatusWarning" enabled="false" eventSet="11930101013" eventClear="21930101013" />
- <ALID id="1930101014" logicalName="NXD15Controller1.Controller27Warning" description="NXD15Controller1 Set the abnormal. " category="EquipmentStatusWarning" enabled="false" eventSet="11930101014" eventClear="21930101014" />
- <ALID id="1930101015" logicalName="NXD15Controller1.Controller2Warning" description="NXD15Controller1 PV1 Lower Limit. " category="EquipmentStatusWarning" enabled="false" eventSet="11930101015" eventClear="21930101015" />
- <ALID id="1930101016" logicalName="NXD15Controller1.Controller33Alarm" description="NXD15Controller1 The read and write of the baseboard EEPROM is abnormal. " category="EquipmentStatusWarning" enabled="false" eventSet="11930101016" eventClear="21930101016" />
- <ALID id="1930101017" logicalName="NXD15Controller1.Controller34Alarm" description="NXD15Controller1 The BASEboard EEPROM is abnormal. " category="EquipmentStatusWarning" enabled="false" eventSet="11930101017" eventClear="21930101017" />
- <ALID id="1930101018" logicalName="NXD15Controller1.Controller3Warning" description="NXD15Controller1 PV2 Upper Limit. " category="EquipmentStatusWarning" enabled="false" eventSet="11930101018" eventClear="21930101018" />
- <ALID id="1930101019" logicalName="NXD15Controller1.Controller49Warning" description="NXD15Controller1 CJ1 Abnormal. " category="EquipmentStatusWarning" enabled="false" eventSet="11930101019" eventClear="21930101019" />
- <ALID id="1930101020" logicalName="NXD15Controller1.Controller4Warning" description="NXD15Controller1 PV2 Upper Limit. " category="EquipmentStatusWarning" enabled="false" eventSet="11930101020" eventClear="21930101020" />
- <ALID id="1930101021" logicalName="NXD15Controller1.Controller50Warning" description="NXD15Controller1 CJ2 Abnormal. " category="EquipmentStatusWarning" enabled="false" eventSet="11930101021" eventClear="21930101021" />
- <ALID id="1930101022" logicalName="NXD15Controller1.Controller51Warning" description="NXD15Controller1 CJ3 Abnormal. " category="EquipmentStatusWarning" enabled="false" eventSet="11930101022" eventClear="21930101022" />
- <ALID id="1930101023" logicalName="NXD15Controller1.Controller52Warning" description="NXD15Controller1 CJ4 Abnormal. " category="EquipmentStatusWarning" enabled="false" eventSet="11930101023" eventClear="21930101023" />
- <ALID id="1930101024" logicalName="NXD15Controller1.Controller55Alarm" description="NXD15Controller1 The ontology EEPROM is not initialized. " category="EquipmentStatusWarning" enabled="false" eventSet="11930101024" eventClear="21930101024" />
- <ALID id="1930101025" logicalName="NXD15Controller1.Controller56Alarm" description="NXD15Controller1 MAC Address abnormal. " category="EquipmentStatusWarning" enabled="false" eventSet="11930101025" eventClear="21930101025" />
- <ALID id="1930101026" logicalName="NXD15Controller1.Controller57Alarm" description="NXD15Controller1 RAM read and write abnormal. " category="EquipmentStatusWarning" enabled="false" eventSet="11930101026" eventClear="21930101026" />
- <ALID id="1930101027" logicalName="NXD15Controller1.Controller58Alarm" description="NXD15Controller1 EEPRO read and write abnormal. " category="EquipmentStatusWarning" enabled="false" eventSet="11930101027" eventClear="21930101027" />
- <ALID id="1930101028" logicalName="NXD15Controller1.Controller5Warning" description="NXD15Controller1 PV3 Upper Limit. " category="EquipmentStatusWarning" enabled="false" eventSet="11930101028" eventClear="21930101028" />
- <ALID id="1930101029" logicalName="NXD15Controller1.Controller64Alarm" description="NXD15Controller1 ROM abnormal. " category="EquipmentStatusWarning" enabled="false" eventSet="11930101029" eventClear="21930101029" />
- <ALID id="1930101030" logicalName="NXD15Controller1.Controller6Warning" description="NXD15Controller1 PV3 Upper Limit. " category="EquipmentStatusWarning" enabled="false" eventSet="11930101030" eventClear="21930101030" />
- <ALID id="1930101031" logicalName="NXD15Controller1.Controller7Warning" description="NXD15Controller1 PV4 Upper Limit. " category="EquipmentStatusWarning" enabled="false" eventSet="11930101031" eventClear="21930101031" />
- <ALID id="1930101032" logicalName="NXD15Controller1.Controller8Warning" description="NXD15Controller1 PV4 Upper Limit. " category="EquipmentStatusWarning" enabled="false" eventSet="11930101032" eventClear="21930101032" />
- <ALID id="1930101033" logicalName="NXD15Controller1.Controller9Warning" description="NXD15Controller1 AD1 Fault. " category="EquipmentStatusWarning" enabled="false" eventSet="11930101033" eventClear="21930101033" />
- <ALID id="1930101034" logicalName="NXD15Controller1.LogicalOperation10Warning" description="NXD15Controller1 Logical Operation10. " category="EquipmentStatusWarning" enabled="false" eventSet="11930101034" eventClear="21930101034" />
- <ALID id="1930101035" logicalName="NXD15Controller1.LogicalOperation11Warning" description="NXD15Controller1 Logical Operation11. " category="EquipmentStatusWarning" enabled="false" eventSet="11930101035" eventClear="21930101035" />
- <ALID id="1930101036" logicalName="NXD15Controller1.LogicalOperation12Warning" description="NXD15Controller1 Logical Operation12. " category="EquipmentStatusWarning" enabled="false" eventSet="11930101036" eventClear="21930101036" />
- <ALID id="1930101037" logicalName="NXD15Controller1.LogicalOperation13Warning" description="NXD15Controller1 Logical Operation13. " category="EquipmentStatusWarning" enabled="false" eventSet="11930101037" eventClear="21930101037" />
- <ALID id="1930101038" logicalName="NXD15Controller1.LogicalOperation14Warning" description="NXD15Controller1 Logical Operation14. " category="EquipmentStatusWarning" enabled="false" eventSet="11930101038" eventClear="21930101038" />
- <ALID id="1930101039" logicalName="NXD15Controller1.LogicalOperation15Warning" description="NXD15Controller1 Logical Operation15. " category="EquipmentStatusWarning" enabled="false" eventSet="11930101039" eventClear="21930101039" />
- <ALID id="1930101040" logicalName="NXD15Controller1.LogicalOperation16Warning" description="NXD15Controller1 Logical Operation16. " category="EquipmentStatusWarning" enabled="false" eventSet="11930101040" eventClear="21930101040" />
- <ALID id="1930101041" logicalName="NXD15Controller1.LogicalOperation1Warning" description="NXD15Controller1 Logical Operation1. " category="EquipmentStatusWarning" enabled="false" eventSet="11930101041" eventClear="21930101041" />
- <ALID id="1930101042" logicalName="NXD15Controller1.LogicalOperation2Warning" description="NXD15Controller1 Logical Operation2. " category="EquipmentStatusWarning" enabled="false" eventSet="11930101042" eventClear="21930101042" />
- <ALID id="1930101043" logicalName="NXD15Controller1.LogicalOperation3Warning" description="NXD15Controller1 Logical Operation3. " category="EquipmentStatusWarning" enabled="false" eventSet="11930101043" eventClear="21930101043" />
- <ALID id="1930101044" logicalName="NXD15Controller1.LogicalOperation4Warning" description="NXD15Controller1 Logical Operation4. " category="EquipmentStatusWarning" enabled="false" eventSet="11930101044" eventClear="21930101044" />
- <ALID id="1930101045" logicalName="NXD15Controller1.LogicalOperation5Warning" description="NXD15Controller1 Logical Operation5. " category="EquipmentStatusWarning" enabled="false" eventSet="11930101045" eventClear="21930101045" />
- <ALID id="1930101046" logicalName="NXD15Controller1.LogicalOperation6Warning" description="NXD15Controller1 Logical Operation6. " category="EquipmentStatusWarning" enabled="false" eventSet="11930101046" eventClear="21930101046" />
- <ALID id="1930101047" logicalName="NXD15Controller1.LogicalOperation7Warning" description="NXD15Controller1 Logical Operation7. " category="EquipmentStatusWarning" enabled="false" eventSet="11930101047" eventClear="21930101047" />
- <ALID id="1930101048" logicalName="NXD15Controller1.LogicalOperation8Warning" description="NXD15Controller1 Logical Operation8. " category="EquipmentStatusWarning" enabled="false" eventSet="11930101048" eventClear="21930101048" />
- <ALID id="1930101049" logicalName="NXD15Controller1.LogicalOperation9Warning" description="NXD15Controller1 Logical Operation9. " category="EquipmentStatusWarning" enabled="false" eventSet="11930101049" eventClear="21930101049" />
- <ALID id="1930101050" logicalName="NXD15Controller1.QueryAbnormal1Warning" description="NXD15Controller1 query abnormal: Incorrect function code, this machine does not correspond to the function code. " category="EquipmentStatusWarning" enabled="false" eventSet="11930101050" eventClear="21930101050" />
- <ALID id="1930101051" logicalName="NXD15Controller1.QueryAbnormal2Warning" description="NXD15Controller1 query abnormal: Incorrect data address " category="EquipmentStatusWarning" enabled="false" eventSet="11930101051" eventClear="21930101051" />
- <ALID id="1930101052" logicalName="NXD15Controller1.QueryAbnormal3Warning" description="NXD15Controller1 query abnormal: Incorrect data. " category="EquipmentStatusWarning" enabled="false" eventSet="11930101052" eventClear="21930101052" />
- <ALID id="1930101053" logicalName="NXD15Controller1.QueryAbnormal6Warning" description="NXD15Controller1 query abnormal: The machine is in an unprocessed state.Plase Send again. " category="EquipmentStatusWarning" enabled="false" eventSet="11930101053" eventClear="21930101053" />
- <ALID id="1930101054" logicalName="NXD15Controller1.WriteAbnormal1Warning" description="NXD15Controller1 write abnormal: Incorrect function code, this machine does not correspond to the function code. " category="EquipmentStatusWarning" enabled="false" eventSet="11930101054" eventClear="21930101054" />
- <ALID id="1930101055" logicalName="NXD15Controller1.WriteAbnormal2Warning" description="NXD15Controller1 write abnormal: Incorrect data address " category="EquipmentStatusWarning" enabled="false" eventSet="11930101055" eventClear="21930101055" />
- <ALID id="1930101056" logicalName="NXD15Controller1.WriteAbnormal3Warning" description="NXD15Controller1 write abnormal: Incorrect data. " category="EquipmentStatusWarning" enabled="false" eventSet="11930101056" eventClear="21930101056" />
- <ALID id="1930101057" logicalName="NXD15Controller1.WriteAbnormal6Warning" description="NXD15Controller1 write abnormal: The machine is in an unprocessed state.Plase Send again. " category="EquipmentStatusWarning" enabled="false" eventSet="11930101057" eventClear="21930101057" />
- <ALID id="1940101001" logicalName="NXD15Controller2.CommunicationAlarm" description="NXD15Controller2 communication error " category="EquipmentStatusWarning" enabled="false" eventSet="11940101001" eventClear="21940101001" />
- <ALID id="1940101002" logicalName="NXD15Controller2.ConnectionAlarm" description="NXD15Controller2 can not connect with 127.0.0.1:502 " category="EquipmentStatusWarning" enabled="false" eventSet="11940101002" eventClear="21940101002" />
- <ALID id="1940101003" logicalName="NXD15Controller2.Controller10Warning" description="NXD15Controller2 AD1 Fault. " category="EquipmentStatusWarning" enabled="false" eventSet="11940101003" eventClear="21940101003" />
- <ALID id="1940101004" logicalName="NXD15Controller2.Controller11Warning" description="NXD15Controller2 AD2 Fault. " category="EquipmentStatusWarning" enabled="false" eventSet="11940101004" eventClear="21940101004" />
- <ALID id="1940101005" logicalName="NXD15Controller2.Controller12Warning" description="NXD15Controller2 AD3 Fault. " category="EquipmentStatusWarning" enabled="false" eventSet="11940101005" eventClear="21940101005" />
- <ALID id="1940101006" logicalName="NXD15Controller2.Controller13Warning" description="NXD15Controller2 AD4 Fault. " category="EquipmentStatusWarning" enabled="false" eventSet="11940101006" eventClear="21940101006" />
- <ALID id="1940101007" logicalName="NXD15Controller2.Controller1Warning" description="NXD15Controller2 PV1 Upper Limit. " category="EquipmentStatusWarning" enabled="false" eventSet="11940101007" eventClear="21940101007" />
- <ALID id="1940101008" logicalName="NXD15Controller2.Controller21Warning" description="NXD15Controller2 CT1 Abnormal input. " category="EquipmentStatusWarning" enabled="false" eventSet="11940101008" eventClear="21940101008" />
- <ALID id="1940101009" logicalName="NXD15Controller2.Controller22Warning" description="NXD15Controller2 CT2 Abnormal input. " category="EquipmentStatusWarning" enabled="false" eventSet="11940101009" eventClear="21940101009" />
- <ALID id="1940101010" logicalName="NXD15Controller2.Controller23Warning" description="NXD15Controller2 CT3 Abnormal input. " category="EquipmentStatusWarning" enabled="false" eventSet="11940101010" eventClear="21940101010" />
- <ALID id="1940101011" logicalName="NXD15Controller2.Controller24Warning" description="NXD15Controller2 CT4 Abnormal input. " category="EquipmentStatusWarning" enabled="false" eventSet="11940101011" eventClear="21940101011" />
- <ALID id="1940101012" logicalName="NXD15Controller2.Controller25Warning" description="NXD15Controller2 Receiving Monitoring. " category="EquipmentStatusWarning" enabled="false" eventSet="11940101012" eventClear="21940101012" />
- <ALID id="1940101013" logicalName="NXD15Controller2.Controller26Warning" description="NXD15Controller2 Communication between modules has timed out. " category="EquipmentStatusWarning" enabled="false" eventSet="11940101013" eventClear="21940101013" />
- <ALID id="1940101014" logicalName="NXD15Controller2.Controller27Warning" description="NXD15Controller2 Set the abnormal. " category="EquipmentStatusWarning" enabled="false" eventSet="11940101014" eventClear="21940101014" />
- <ALID id="1940101015" logicalName="NXD15Controller2.Controller2Warning" description="NXD15Controller2 PV1 Lower Limit. " category="EquipmentStatusWarning" enabled="false" eventSet="11940101015" eventClear="21940101015" />
- <ALID id="1940101016" logicalName="NXD15Controller2.Controller33Alarm" description="NXD15Controller2 The read and write of the baseboard EEPROM is abnormal. " category="EquipmentStatusWarning" enabled="false" eventSet="11940101016" eventClear="21940101016" />
- <ALID id="1940101017" logicalName="NXD15Controller2.Controller34Alarm" description="NXD15Controller2 The BASEboard EEPROM is abnormal. " category="EquipmentStatusWarning" enabled="false" eventSet="11940101017" eventClear="21940101017" />
- <ALID id="1940101018" logicalName="NXD15Controller2.Controller3Warning" description="NXD15Controller2 PV2 Upper Limit. " category="EquipmentStatusWarning" enabled="false" eventSet="11940101018" eventClear="21940101018" />
- <ALID id="1940101019" logicalName="NXD15Controller2.Controller49Warning" description="NXD15Controller2 CJ1 Abnormal. " category="EquipmentStatusWarning" enabled="false" eventSet="11940101019" eventClear="21940101019" />
- <ALID id="1940101020" logicalName="NXD15Controller2.Controller4Warning" description="NXD15Controller2 PV2 Upper Limit. " category="EquipmentStatusWarning" enabled="false" eventSet="11940101020" eventClear="21940101020" />
- <ALID id="1940101021" logicalName="NXD15Controller2.Controller50Warning" description="NXD15Controller2 CJ2 Abnormal. " category="EquipmentStatusWarning" enabled="false" eventSet="11940101021" eventClear="21940101021" />
- <ALID id="1940101022" logicalName="NXD15Controller2.Controller51Warning" description="NXD15Controller2 CJ3 Abnormal. " category="EquipmentStatusWarning" enabled="false" eventSet="11940101022" eventClear="21940101022" />
- <ALID id="1940101023" logicalName="NXD15Controller2.Controller52Warning" description="NXD15Controller2 CJ4 Abnormal. " category="EquipmentStatusWarning" enabled="false" eventSet="11940101023" eventClear="21940101023" />
- <ALID id="1940101024" logicalName="NXD15Controller2.Controller55Alarm" description="NXD15Controller2 The ontology EEPROM is not initialized. " category="EquipmentStatusWarning" enabled="false" eventSet="11940101024" eventClear="21940101024" />
- <ALID id="1940101025" logicalName="NXD15Controller2.Controller56Alarm" description="NXD15Controller2 MAC Address abnormal. " category="EquipmentStatusWarning" enabled="false" eventSet="11940101025" eventClear="21940101025" />
- <ALID id="1940101026" logicalName="NXD15Controller2.Controller57Alarm" description="NXD15Controller2 RAM read and write abnormal. " category="EquipmentStatusWarning" enabled="false" eventSet="11940101026" eventClear="21940101026" />
- <ALID id="1940101027" logicalName="NXD15Controller2.Controller58Alarm" description="NXD15Controller2 EEPRO read and write abnormal. " category="EquipmentStatusWarning" enabled="false" eventSet="11940101027" eventClear="21940101027" />
- <ALID id="1940101028" logicalName="NXD15Controller2.Controller5Warning" description="NXD15Controller2 PV3 Upper Limit. " category="EquipmentStatusWarning" enabled="false" eventSet="11940101028" eventClear="21940101028" />
- <ALID id="1940101029" logicalName="NXD15Controller2.Controller64Alarm" description="NXD15Controller2 ROM abnormal. " category="EquipmentStatusWarning" enabled="false" eventSet="11940101029" eventClear="21940101029" />
- <ALID id="1940101030" logicalName="NXD15Controller2.Controller6Warning" description="NXD15Controller2 PV3 Upper Limit. " category="EquipmentStatusWarning" enabled="false" eventSet="11940101030" eventClear="21940101030" />
- <ALID id="1940101031" logicalName="NXD15Controller2.Controller7Warning" description="NXD15Controller2 PV4 Upper Limit. " category="EquipmentStatusWarning" enabled="false" eventSet="11940101031" eventClear="21940101031" />
- <ALID id="1940101032" logicalName="NXD15Controller2.Controller8Warning" description="NXD15Controller2 PV4 Upper Limit. " category="EquipmentStatusWarning" enabled="false" eventSet="11940101032" eventClear="21940101032" />
- <ALID id="1940101033" logicalName="NXD15Controller2.Controller9Warning" description="NXD15Controller2 AD1 Fault. " category="EquipmentStatusWarning" enabled="false" eventSet="11940101033" eventClear="21940101033" />
- <ALID id="1940101034" logicalName="NXD15Controller2.LogicalOperation10Warning" description="NXD15Controller2 Logical Operation10. " category="EquipmentStatusWarning" enabled="false" eventSet="11940101034" eventClear="21940101034" />
- <ALID id="1940101035" logicalName="NXD15Controller2.LogicalOperation11Warning" description="NXD15Controller2 Logical Operation11. " category="EquipmentStatusWarning" enabled="false" eventSet="11940101035" eventClear="21940101035" />
- <ALID id="1940101036" logicalName="NXD15Controller2.LogicalOperation12Warning" description="NXD15Controller2 Logical Operation12. " category="EquipmentStatusWarning" enabled="false" eventSet="11940101036" eventClear="21940101036" />
- <ALID id="1940101037" logicalName="NXD15Controller2.LogicalOperation13Warning" description="NXD15Controller2 Logical Operation13. " category="EquipmentStatusWarning" enabled="false" eventSet="11940101037" eventClear="21940101037" />
- <ALID id="1940101038" logicalName="NXD15Controller2.LogicalOperation14Warning" description="NXD15Controller2 Logical Operation14. " category="EquipmentStatusWarning" enabled="false" eventSet="11940101038" eventClear="21940101038" />
- <ALID id="1940101039" logicalName="NXD15Controller2.LogicalOperation15Warning" description="NXD15Controller2 Logical Operation15. " category="EquipmentStatusWarning" enabled="false" eventSet="11940101039" eventClear="21940101039" />
- <ALID id="1940101040" logicalName="NXD15Controller2.LogicalOperation16Warning" description="NXD15Controller2 Logical Operation16. " category="EquipmentStatusWarning" enabled="false" eventSet="11940101040" eventClear="21940101040" />
- <ALID id="1940101041" logicalName="NXD15Controller2.LogicalOperation1Warning" description="NXD15Controller2 Logical Operation1. " category="EquipmentStatusWarning" enabled="false" eventSet="11940101041" eventClear="21940101041" />
- <ALID id="1940101042" logicalName="NXD15Controller2.LogicalOperation2Warning" description="NXD15Controller2 Logical Operation2. " category="EquipmentStatusWarning" enabled="false" eventSet="11940101042" eventClear="21940101042" />
- <ALID id="1940101043" logicalName="NXD15Controller2.LogicalOperation3Warning" description="NXD15Controller2 Logical Operation3. " category="EquipmentStatusWarning" enabled="false" eventSet="11940101043" eventClear="21940101043" />
- <ALID id="1940101044" logicalName="NXD15Controller2.LogicalOperation4Warning" description="NXD15Controller2 Logical Operation4. " category="EquipmentStatusWarning" enabled="false" eventSet="11940101044" eventClear="21940101044" />
- <ALID id="1940101045" logicalName="NXD15Controller2.LogicalOperation5Warning" description="NXD15Controller2 Logical Operation5. " category="EquipmentStatusWarning" enabled="false" eventSet="11940101045" eventClear="21940101045" />
- <ALID id="1940101046" logicalName="NXD15Controller2.LogicalOperation6Warning" description="NXD15Controller2 Logical Operation6. " category="EquipmentStatusWarning" enabled="false" eventSet="11940101046" eventClear="21940101046" />
- <ALID id="1940101047" logicalName="NXD15Controller2.LogicalOperation7Warning" description="NXD15Controller2 Logical Operation7. " category="EquipmentStatusWarning" enabled="false" eventSet="11940101047" eventClear="21940101047" />
- <ALID id="1940101048" logicalName="NXD15Controller2.LogicalOperation8Warning" description="NXD15Controller2 Logical Operation8. " category="EquipmentStatusWarning" enabled="false" eventSet="11940101048" eventClear="21940101048" />
- <ALID id="1940101049" logicalName="NXD15Controller2.LogicalOperation9Warning" description="NXD15Controller2 Logical Operation9. " category="EquipmentStatusWarning" enabled="false" eventSet="11940101049" eventClear="21940101049" />
- <ALID id="1940101050" logicalName="NXD15Controller2.QueryAbnormal1Warning" description="NXD15Controller2 query abnormal: Incorrect function code, this machine does not correspond to the function code. " category="EquipmentStatusWarning" enabled="false" eventSet="11940101050" eventClear="21940101050" />
- <ALID id="1940101051" logicalName="NXD15Controller2.QueryAbnormal2Warning" description="NXD15Controller2 query abnormal: Incorrect data address " category="EquipmentStatusWarning" enabled="false" eventSet="11940101051" eventClear="21940101051" />
- <ALID id="1940101052" logicalName="NXD15Controller2.QueryAbnormal3Warning" description="NXD15Controller2 query abnormal: Incorrect data. " category="EquipmentStatusWarning" enabled="false" eventSet="11940101052" eventClear="21940101052" />
- <ALID id="1940101053" logicalName="NXD15Controller2.QueryAbnormal6Warning" description="NXD15Controller2 query abnormal: The machine is in an unprocessed state.Plase Send again. " category="EquipmentStatusWarning" enabled="false" eventSet="11940101053" eventClear="21940101053" />
- <ALID id="1940101054" logicalName="NXD15Controller2.WriteAbnormal1Warning" description="NXD15Controller2 write abnormal: Incorrect function code, this machine does not correspond to the function code. " category="EquipmentStatusWarning" enabled="false" eventSet="11940101054" eventClear="21940101054" />
- <ALID id="1940101055" logicalName="NXD15Controller2.WriteAbnormal2Warning" description="NXD15Controller2 write abnormal: Incorrect data address " category="EquipmentStatusWarning" enabled="false" eventSet="11940101055" eventClear="21940101055" />
- <ALID id="1940101056" logicalName="NXD15Controller2.WriteAbnormal3Warning" description="NXD15Controller2 write abnormal: Incorrect data. " category="EquipmentStatusWarning" enabled="false" eventSet="11940101056" eventClear="21940101056" />
- <ALID id="1940101057" logicalName="NXD15Controller2.WriteAbnormal6Warning" description="NXD15Controller2 write abnormal: The machine is in an unprocessed state.Plase Send again. " category="EquipmentStatusWarning" enabled="false" eventSet="11940101057" eventClear="21940101057" />
- <ALID id="1950101001" logicalName="NXD15Controller3.CommunicationAlarm" description="NXD15Controller3 communication error " category="EquipmentStatusWarning" enabled="false" eventSet="11950101001" eventClear="21950101001" />
- <ALID id="1950101002" logicalName="NXD15Controller3.ConnectionAlarm" description="NXD15Controller3 can not connect with 127.0.0.1:503 " category="EquipmentStatusWarning" enabled="false" eventSet="11950101002" eventClear="21950101002" />
- <ALID id="1950101003" logicalName="NXD15Controller3.Controller10Warning" description="NXD15Controller3 AD1 Fault. " category="EquipmentStatusWarning" enabled="false" eventSet="11950101003" eventClear="21950101003" />
- <ALID id="1950101004" logicalName="NXD15Controller3.Controller11Warning" description="NXD15Controller3 AD2 Fault. " category="EquipmentStatusWarning" enabled="false" eventSet="11950101004" eventClear="21950101004" />
- <ALID id="1950101005" logicalName="NXD15Controller3.Controller12Warning" description="NXD15Controller3 AD3 Fault. " category="EquipmentStatusWarning" enabled="false" eventSet="11950101005" eventClear="21950101005" />
- <ALID id="1950101006" logicalName="NXD15Controller3.Controller13Warning" description="NXD15Controller3 AD4 Fault. " category="EquipmentStatusWarning" enabled="false" eventSet="11950101006" eventClear="21950101006" />
- <ALID id="1950101007" logicalName="NXD15Controller3.Controller1Warning" description="NXD15Controller3 PV1 Upper Limit. " category="EquipmentStatusWarning" enabled="false" eventSet="11950101007" eventClear="21950101007" />
- <ALID id="1950101008" logicalName="NXD15Controller3.Controller21Warning" description="NXD15Controller3 CT1 Abnormal input. " category="EquipmentStatusWarning" enabled="false" eventSet="11950101008" eventClear="21950101008" />
- <ALID id="1950101009" logicalName="NXD15Controller3.Controller22Warning" description="NXD15Controller3 CT2 Abnormal input. " category="EquipmentStatusWarning" enabled="false" eventSet="11950101009" eventClear="21950101009" />
- <ALID id="1950101010" logicalName="NXD15Controller3.Controller23Warning" description="NXD15Controller3 CT3 Abnormal input. " category="EquipmentStatusWarning" enabled="false" eventSet="11950101010" eventClear="21950101010" />
- <ALID id="1950101011" logicalName="NXD15Controller3.Controller24Warning" description="NXD15Controller3 CT4 Abnormal input. " category="EquipmentStatusWarning" enabled="false" eventSet="11950101011" eventClear="21950101011" />
- <ALID id="1950101012" logicalName="NXD15Controller3.Controller25Warning" description="NXD15Controller3 Receiving Monitoring. " category="EquipmentStatusWarning" enabled="false" eventSet="11950101012" eventClear="21950101012" />
- <ALID id="1950101013" logicalName="NXD15Controller3.Controller26Warning" description="NXD15Controller3 Communication between modules has timed out. " category="EquipmentStatusWarning" enabled="false" eventSet="11950101013" eventClear="21950101013" />
- <ALID id="1950101014" logicalName="NXD15Controller3.Controller27Warning" description="NXD15Controller3 Set the abnormal. " category="EquipmentStatusWarning" enabled="false" eventSet="11950101014" eventClear="21950101014" />
- <ALID id="1950101015" logicalName="NXD15Controller3.Controller2Warning" description="NXD15Controller3 PV1 Lower Limit. " category="EquipmentStatusWarning" enabled="false" eventSet="11950101015" eventClear="21950101015" />
- <ALID id="1950101016" logicalName="NXD15Controller3.Controller33Alarm" description="NXD15Controller3 The read and write of the baseboard EEPROM is abnormal. " category="EquipmentStatusWarning" enabled="false" eventSet="11950101016" eventClear="21950101016" />
- <ALID id="1950101017" logicalName="NXD15Controller3.Controller34Alarm" description="NXD15Controller3 The BASEboard EEPROM is abnormal. " category="EquipmentStatusWarning" enabled="false" eventSet="11950101017" eventClear="21950101017" />
- <ALID id="1950101018" logicalName="NXD15Controller3.Controller3Warning" description="NXD15Controller3 PV2 Upper Limit. " category="EquipmentStatusWarning" enabled="false" eventSet="11950101018" eventClear="21950101018" />
- <ALID id="1950101019" logicalName="NXD15Controller3.Controller49Warning" description="NXD15Controller3 CJ1 Abnormal. " category="EquipmentStatusWarning" enabled="false" eventSet="11950101019" eventClear="21950101019" />
- <ALID id="1950101020" logicalName="NXD15Controller3.Controller4Warning" description="NXD15Controller3 PV2 Upper Limit. " category="EquipmentStatusWarning" enabled="false" eventSet="11950101020" eventClear="21950101020" />
- <ALID id="1950101021" logicalName="NXD15Controller3.Controller50Warning" description="NXD15Controller3 CJ2 Abnormal. " category="EquipmentStatusWarning" enabled="false" eventSet="11950101021" eventClear="21950101021" />
- <ALID id="1950101022" logicalName="NXD15Controller3.Controller51Warning" description="NXD15Controller3 CJ3 Abnormal. " category="EquipmentStatusWarning" enabled="false" eventSet="11950101022" eventClear="21950101022" />
- <ALID id="1950101023" logicalName="NXD15Controller3.Controller52Warning" description="NXD15Controller3 CJ4 Abnormal. " category="EquipmentStatusWarning" enabled="false" eventSet="11950101023" eventClear="21950101023" />
- <ALID id="1950101024" logicalName="NXD15Controller3.Controller55Alarm" description="NXD15Controller3 The ontology EEPROM is not initialized. " category="EquipmentStatusWarning" enabled="false" eventSet="11950101024" eventClear="21950101024" />
- <ALID id="1950101025" logicalName="NXD15Controller3.Controller56Alarm" description="NXD15Controller3 MAC Address abnormal. " category="EquipmentStatusWarning" enabled="false" eventSet="11950101025" eventClear="21950101025" />
- <ALID id="1950101026" logicalName="NXD15Controller3.Controller57Alarm" description="NXD15Controller3 RAM read and write abnormal. " category="EquipmentStatusWarning" enabled="false" eventSet="11950101026" eventClear="21950101026" />
- <ALID id="1950101027" logicalName="NXD15Controller3.Controller58Alarm" description="NXD15Controller3 EEPRO read and write abnormal. " category="EquipmentStatusWarning" enabled="false" eventSet="11950101027" eventClear="21950101027" />
- <ALID id="1950101028" logicalName="NXD15Controller3.Controller5Warning" description="NXD15Controller3 PV3 Upper Limit. " category="EquipmentStatusWarning" enabled="false" eventSet="11950101028" eventClear="21950101028" />
- <ALID id="1950101029" logicalName="NXD15Controller3.Controller64Alarm" description="NXD15Controller3 ROM abnormal. " category="EquipmentStatusWarning" enabled="false" eventSet="11950101029" eventClear="21950101029" />
- <ALID id="1950101030" logicalName="NXD15Controller3.Controller6Warning" description="NXD15Controller3 PV3 Upper Limit. " category="EquipmentStatusWarning" enabled="false" eventSet="11950101030" eventClear="21950101030" />
- <ALID id="1950101031" logicalName="NXD15Controller3.Controller7Warning" description="NXD15Controller3 PV4 Upper Limit. " category="EquipmentStatusWarning" enabled="false" eventSet="11950101031" eventClear="21950101031" />
- <ALID id="1950101032" logicalName="NXD15Controller3.Controller8Warning" description="NXD15Controller3 PV4 Upper Limit. " category="EquipmentStatusWarning" enabled="false" eventSet="11950101032" eventClear="21950101032" />
- <ALID id="1950101033" logicalName="NXD15Controller3.Controller9Warning" description="NXD15Controller3 AD1 Fault. " category="EquipmentStatusWarning" enabled="false" eventSet="11950101033" eventClear="21950101033" />
- <ALID id="1950101034" logicalName="NXD15Controller3.LogicalOperation10Warning" description="NXD15Controller3 Logical Operation10. " category="EquipmentStatusWarning" enabled="false" eventSet="11950101034" eventClear="21950101034" />
- <ALID id="1950101035" logicalName="NXD15Controller3.LogicalOperation11Warning" description="NXD15Controller3 Logical Operation11. " category="EquipmentStatusWarning" enabled="false" eventSet="11950101035" eventClear="21950101035" />
- <ALID id="1950101036" logicalName="NXD15Controller3.LogicalOperation12Warning" description="NXD15Controller3 Logical Operation12. " category="EquipmentStatusWarning" enabled="false" eventSet="11950101036" eventClear="21950101036" />
- <ALID id="1950101037" logicalName="NXD15Controller3.LogicalOperation13Warning" description="NXD15Controller3 Logical Operation13. " category="EquipmentStatusWarning" enabled="false" eventSet="11950101037" eventClear="21950101037" />
- <ALID id="1950101038" logicalName="NXD15Controller3.LogicalOperation14Warning" description="NXD15Controller3 Logical Operation14. " category="EquipmentStatusWarning" enabled="false" eventSet="11950101038" eventClear="21950101038" />
- <ALID id="1950101039" logicalName="NXD15Controller3.LogicalOperation15Warning" description="NXD15Controller3 Logical Operation15. " category="EquipmentStatusWarning" enabled="false" eventSet="11950101039" eventClear="21950101039" />
- <ALID id="1950101040" logicalName="NXD15Controller3.LogicalOperation16Warning" description="NXD15Controller3 Logical Operation16. " category="EquipmentStatusWarning" enabled="false" eventSet="11950101040" eventClear="21950101040" />
- <ALID id="1950101041" logicalName="NXD15Controller3.LogicalOperation1Warning" description="NXD15Controller3 Logical Operation1. " category="EquipmentStatusWarning" enabled="false" eventSet="11950101041" eventClear="21950101041" />
- <ALID id="1950101042" logicalName="NXD15Controller3.LogicalOperation2Warning" description="NXD15Controller3 Logical Operation2. " category="EquipmentStatusWarning" enabled="false" eventSet="11950101042" eventClear="21950101042" />
- <ALID id="1950101043" logicalName="NXD15Controller3.LogicalOperation3Warning" description="NXD15Controller3 Logical Operation3. " category="EquipmentStatusWarning" enabled="false" eventSet="11950101043" eventClear="21950101043" />
- <ALID id="1950101044" logicalName="NXD15Controller3.LogicalOperation4Warning" description="NXD15Controller3 Logical Operation4. " category="EquipmentStatusWarning" enabled="false" eventSet="11950101044" eventClear="21950101044" />
- <ALID id="1950101045" logicalName="NXD15Controller3.LogicalOperation5Warning" description="NXD15Controller3 Logical Operation5. " category="EquipmentStatusWarning" enabled="false" eventSet="11950101045" eventClear="21950101045" />
- <ALID id="1950101046" logicalName="NXD15Controller3.LogicalOperation6Warning" description="NXD15Controller3 Logical Operation6. " category="EquipmentStatusWarning" enabled="false" eventSet="11950101046" eventClear="21950101046" />
- <ALID id="1950101047" logicalName="NXD15Controller3.LogicalOperation7Warning" description="NXD15Controller3 Logical Operation7. " category="EquipmentStatusWarning" enabled="false" eventSet="11950101047" eventClear="21950101047" />
- <ALID id="1950101048" logicalName="NXD15Controller3.LogicalOperation8Warning" description="NXD15Controller3 Logical Operation8. " category="EquipmentStatusWarning" enabled="false" eventSet="11950101048" eventClear="21950101048" />
- <ALID id="1950101049" logicalName="NXD15Controller3.LogicalOperation9Warning" description="NXD15Controller3 Logical Operation9. " category="EquipmentStatusWarning" enabled="false" eventSet="11950101049" eventClear="21950101049" />
- <ALID id="1950101050" logicalName="NXD15Controller3.QueryAbnormal1Warning" description="NXD15Controller3 query abnormal: Incorrect function code, this machine does not correspond to the function code. " category="EquipmentStatusWarning" enabled="false" eventSet="11950101050" eventClear="21950101050" />
- <ALID id="1950101051" logicalName="NXD15Controller3.QueryAbnormal2Warning" description="NXD15Controller3 query abnormal: Incorrect data address " category="EquipmentStatusWarning" enabled="false" eventSet="11950101051" eventClear="21950101051" />
- <ALID id="1950101052" logicalName="NXD15Controller3.QueryAbnormal3Warning" description="NXD15Controller3 query abnormal: Incorrect data. " category="EquipmentStatusWarning" enabled="false" eventSet="11950101052" eventClear="21950101052" />
- <ALID id="1950101053" logicalName="NXD15Controller3.QueryAbnormal6Warning" description="NXD15Controller3 query abnormal: The machine is in an unprocessed state.Plase Send again. " category="EquipmentStatusWarning" enabled="false" eventSet="11950101053" eventClear="21950101053" />
- <ALID id="1950101054" logicalName="NXD15Controller3.WriteAbnormal1Warning" description="NXD15Controller3 write abnormal: Incorrect function code, this machine does not correspond to the function code. " category="EquipmentStatusWarning" enabled="false" eventSet="11950101054" eventClear="21950101054" />
- <ALID id="1950101055" logicalName="NXD15Controller3.WriteAbnormal2Warning" description="NXD15Controller3 write abnormal: Incorrect data address " category="EquipmentStatusWarning" enabled="false" eventSet="11950101055" eventClear="21950101055" />
- <ALID id="1950101056" logicalName="NXD15Controller3.WriteAbnormal3Warning" description="NXD15Controller3 write abnormal: Incorrect data. " category="EquipmentStatusWarning" enabled="false" eventSet="11950101056" eventClear="21950101056" />
- <ALID id="1950101057" logicalName="NXD15Controller3.WriteAbnormal6Warning" description="NXD15Controller3 write abnormal: The machine is in an unprocessed state.Plase Send again. " category="EquipmentStatusWarning" enabled="false" eventSet="11950101057" eventClear="21950101057" />
- </Alarms>
- </Equipment>
|
