PMN2Purge.cs 34 KB

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  1. using Aitex.Core.RT.DataCenter;
  2. using Aitex.Core.RT.Device;
  3. using Aitex.Core.RT.Device.Unit;
  4. using Aitex.Core.RT.IOCore;
  5. using Aitex.Core.RT.Log;
  6. using Aitex.Core.RT.SCCore;
  7. using Aitex.Core.Util;
  8. using DocumentFormat.OpenXml.Packaging;
  9. using DocumentFormat.OpenXml.Spreadsheet;
  10. using FurnaceRT.Devices;
  11. using FurnaceRT.Equipments.PMs.Devices;
  12. using FurnaceRT.Extraction;
  13. using MECF.Framework.Common.CommonData.SorterDefines;
  14. using MECF.Framework.Common.Equipment;
  15. using MECF.Framework.Common.Tolerance;
  16. using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.LoadPorts.TDK;
  17. using System;
  18. using System.Collections.Generic;
  19. using System.Diagnostics;
  20. using System.Linq;
  21. namespace FurnaceRT.Equipments.PMs
  22. {
  23. /// <summary>
  24. /// 分布类 定义N2Purge的执行逻辑
  25. /// </summary>
  26. public partial class PMModule
  27. {
  28. private R_TRIG _trigN2UpRD = new R_TRIG();
  29. private R_TRIG _trigN2DownRD = new R_TRIG();
  30. private R_TRIG _trigN2AirUpRD = new R_TRIG();
  31. private R_TRIG _trigN2AirDownRD = new R_TRIG();
  32. private R_TRIG _trigN2AirDownTwoRD = new R_TRIG();
  33. private R_TRIG _trigSelectN2PurgeModeD = new R_TRIG();
  34. private FilterChecker _filterChecker = new FilterChecker();
  35. private R_TRIG tank1_TRIG = new R_TRIG();
  36. private R_TRIG tank2_TRIG = new R_TRIG();
  37. private Dictionary<string, Tuple<R_TRIG, List<Tuple<IDevice, string>>>> _n2PurgeSequenceAction;
  38. private Dictionary<string, Func<bool>> _n2PurgeSequenceStatus;
  39. private Dictionary<string, R_TRIG> _rTrigDict;
  40. private N2PurgeModeEnum _N2PurgeMode = N2PurgeModeEnum.Auto;
  41. private double _n2PurgeData = 20;
  42. private double _n2ToAirData = 185000;
  43. private N2PurgeModeEnum _currentPhase;
  44. private double _manualPhase2StabilityTime = 0;
  45. private double _manualPhase4StabilityTime = 0;
  46. private bool _enableAbortN2purge = true;
  47. private int _phase1CycleCount = 0;
  48. private int _phase1CycleCountSC = 0;
  49. private bool _canSwitchToPhase2 = true;
  50. private Dictionary<string, Stopwatch> _allTimeDict = new Dictionary<string, Stopwatch>();
  51. private void InitN2PurgeData()
  52. {
  53. DATA.Subscribe($"{Module}.N2PurgeLimitData", () => GetN2PurgeLimitData());
  54. DATA.Subscribe($"{Module}.O2DensityData", () => ConcentrationO2.Value.ToString("f3"), SubscriptionAttribute.FLAG.IgnoreSaveDB);
  55. DATA.Subscribe($"{Module}.CheckO2Location", () => GetCheckO2Location(), SubscriptionAttribute.FLAG.IgnoreSaveDB);
  56. DATA.Subscribe($"{Module}.O2SetCheckSetPoint", () => GetO2SetCheckSetPoint(), SubscriptionAttribute.FLAG.IgnoreSaveDB);
  57. DATA.Subscribe($"{Module}.N2PurgeMode", () => SC.ContainsItem("PM1.SelectN2PurgeMode") ? SC.GetStringValue("PM1.SelectN2PurgeMode") : "");
  58. var selectN2PurgeMode = SC.ContainsItem("PM1.SelectN2PurgeMode") ? SC.GetStringValue("PM1.SelectN2PurgeMode") : "";
  59. if (!string.IsNullOrEmpty(selectN2PurgeMode))
  60. {
  61. if (selectN2PurgeMode != _N2PurgeMode.ToString())
  62. {
  63. SetN2PurgeModeAction(selectN2PurgeMode);
  64. }
  65. }
  66. var currentPhase = SC.ContainsItem("PM1.SelectN2PurgeModePhase") ? SC.GetStringValue("PM1.SelectN2PurgeModePhase") : "";
  67. if (!string.IsNullOrEmpty(currentPhase))
  68. {
  69. var enumCurrentPhase = (N2PurgeModeEnum)Enum.Parse(typeof(N2PurgeModeEnum), currentPhase);
  70. _currentPhase = enumCurrentPhase;
  71. }
  72. }
  73. private void InitN2PurgeConfigData()
  74. {
  75. _n2PurgeData = SC.ContainsItem($"System.N2PurgeData") ? SC.GetValue<double>("System.N2PurgeData") : 20;
  76. _n2ToAirData = SC.ContainsItem($"System.N2PurgeData") ? SC.GetValue<double>("System.N2ToAirData") : 185000;
  77. _enableAbortN2purge = SC.ContainsItem($"PM1.N2Purge.EnableAbortN2purge") ? SC.GetValue<bool>("PM1.N2Purge.EnableAbortN2purge") : false;
  78. _manualPhase2StabilityTime = SC.ContainsItem($"PM1.N2Purge.Manual_phase2.StabilityTime") ? SC.GetValue<double>("PM1.N2Purge.Manual_phase2.StabilityTime") : 0;
  79. _manualPhase4StabilityTime = SC.ContainsItem($"PM1.N2Purge.Manual_phase4.StabilityTime") ? SC.GetValue<double>("PM1.N2Purge.Manual_phase4.StabilityTime") : 0;
  80. _phase1CycleCountSC = SC.ContainsItem($"PM1.N2Purge.Manual_phase1.CycleCount") ? SC.GetValue<int>("PM1.N2Purge.Manual_phase1.CycleCount") : 0;
  81. _n2PurgeSequenceAction = ExtractionMethods.GetN2PurgeSequenceAction();
  82. _n2PurgeSequenceStatus = new Dictionary<string, Func<bool>>()
  83. {
  84. {"N2PurgeAIRTo20PPM",()=> GetN2PurgeAIRTo20PPMStatus()},
  85. {"N2PurgeUnder20PPM",()=> GetN2PurgeUnder20PPMStatus()},
  86. {"AIR",()=> GetN2PurgeAIRStatus()},
  87. {"DoorOpen",()=> GetN2PurgeDoorOpenStatus()},
  88. {"Foup1",()=> GetN2PurgeFoup1Status()},
  89. {"Foup2",()=> GetN2PurgeFoup2Status()},
  90. {N2PurgeModeEnum.Manual_phase1.ToString(),()=> CheckN2PurgePhase1() },
  91. {N2PurgeModeEnum.Manual_phase2.ToString(),()=> CheckN2PurgePhase2()},
  92. {N2PurgeModeEnum.Manual_phase3.ToString(),()=> CheckN2PurgePhase3() },
  93. {N2PurgeModeEnum.Manual_phase4.ToString(),()=> CheckN2PurgePhase4() },
  94. {N2PurgeModeEnum.Manual_phase5.ToString(),()=> CheckN2PurgePhase5() },
  95. };
  96. _allTimeDict = new Dictionary<string, Stopwatch>()
  97. {
  98. {N2PurgeModeEnum.Manual_phase1.ToString(),new Stopwatch() },
  99. {N2PurgeModeEnum.Manual_phase2.ToString(),new Stopwatch()},
  100. {N2PurgeModeEnum.Manual_phase3.ToString(),new Stopwatch()},
  101. {N2PurgeModeEnum.Manual_phase4.ToString(),new Stopwatch() },
  102. {N2PurgeModeEnum.Manual_phase5.ToString(),new Stopwatch() }
  103. };
  104. _rTrigDict = new Dictionary<string, R_TRIG>();
  105. }
  106. private void MonitorN2Purge()
  107. {
  108. var selectN2PurgeMode = SC.ContainsItem("PM1.SelectN2PurgeMode") ? SC.GetStringValue("PM1.SelectN2PurgeMode") : "";
  109. if (string.IsNullOrEmpty(selectN2PurgeMode))
  110. {
  111. return;
  112. }
  113. SetN2PurgeModeAction(selectN2PurgeMode);
  114. }
  115. private void MonitorTank1LeakAgeExec()
  116. {
  117. tank1_TRIG.CLK = SensorHCDTANKH != null && SensorHCDTANKH.Value;
  118. if (tank1_TRIG.Q)
  119. {
  120. SetHREFEnable(new object[1] { false });
  121. ValveAV113?.TurnValve(false, out _);
  122. }
  123. }
  124. public bool SetHREFEnable(object[] param)
  125. {
  126. if (param == null || param.Length <= 0)
  127. return true;
  128. bool.TryParse(param[0].ToString(), out bool isEnable);
  129. if (isEnable)
  130. {
  131. if (SensorHREFILK != null && SensorHREFILK.Value)
  132. {
  133. TrigSIREFON?.CheckAndSet(isEnable, out _);
  134. }
  135. }
  136. else
  137. {
  138. TrigSIREFON?.CheckAndSet(isEnable, out _);
  139. }
  140. return true;
  141. }
  142. private void MonitorTank2LeakAgeExec()
  143. {
  144. tank2_TRIG.CLK = SensorCSOURCETANKH != null && SensorCSOURCETANKH.Value;
  145. if (tank2_TRIG.Q)
  146. {
  147. SetCREFEnable(new object[1] { false });
  148. ValveAV121?.TurnValve(false, out _);
  149. }
  150. }
  151. public bool SetCREFEnable(object[] param)
  152. {
  153. if (param == null || param.Length <= 0)
  154. return true;
  155. bool.TryParse(param[0].ToString(), out bool isEnable);
  156. if (isEnable)
  157. {
  158. if (SensorCREFILK != null && SensorCREFILK.Value)
  159. {
  160. TrigCREFON?.CheckAndSet(isEnable, out _);
  161. }
  162. }
  163. else
  164. {
  165. TrigCREFON?.CheckAndSet(isEnable, out _);
  166. }
  167. return true;
  168. }
  169. private double GetN2PurgeLimitData()
  170. {
  171. if (_N2PurgeMode == N2PurgeModeEnum.N2PurgeMode)
  172. {
  173. if ((SensorO2DetectSideFIMS1 != null && SensorO2DetectSideFIMS1.Value) || (SensorO2DetectSideFIMS2 != null && SensorO2DetectSideFIMS2.Value))
  174. {
  175. return (float)SC.GetValue<double>("PM1.N2Purge.N2PurgeFOUPO2CheckSV");
  176. }
  177. return _n2PurgeData;
  178. }
  179. if (_N2PurgeMode == N2PurgeModeEnum.ATMMode)
  180. {
  181. return _n2ToAirData;
  182. }
  183. return ConcentrationO2.Value;
  184. }
  185. private void SetN2PurgeModeAction(string selectN2PurgeMode)
  186. {
  187. _N2PurgeMode = (N2PurgeModeEnum)Enum.Parse(typeof(N2PurgeModeEnum), selectN2PurgeMode);
  188. if (_N2PurgeMode == N2PurgeModeEnum.N2PurgeMode)
  189. {
  190. if (_currentPhase == N2PurgeModeEnum.Manual_phase1)
  191. {
  192. _filterChecker.CheckInterval = 3;
  193. _filterChecker.Monitor(CheckN2PurgePhase2());
  194. if (_filterChecker.Trig && _canSwitchToPhase2)
  195. {
  196. LOG.Info($" N2PurgeMode Trigger from Manual_phase1 to Manual_phase2,O2:{ConcentrationO2.Value}");
  197. SetN2PurgeValveData(N2PurgeModeEnum.Manual_phase2.ToString());
  198. }
  199. }
  200. else if (_currentPhase == N2PurgeModeEnum.Manual_phase2)
  201. {
  202. if (!_allTimeDict[N2PurgeModeEnum.Manual_phase2.ToString()].IsRunning && _canSwitchToPhase2)
  203. {
  204. _allTimeDict[N2PurgeModeEnum.Manual_phase2.ToString()].Restart();
  205. }
  206. var second = _allTimeDict[N2PurgeModeEnum.Manual_phase2.ToString()].Elapsed.TotalSeconds;
  207. if (second >= _manualPhase2StabilityTime)
  208. {
  209. if (CheckN2PurgePhase1())
  210. {
  211. LOG.Info($"N2PurgeMode Trigger Manual_phase1 was triggered {second} seconds later,O2:{ConcentrationO2.Value}");
  212. N2PurgeFaileAlarm.Set();
  213. _allTimeDict[N2PurgeModeEnum.Manual_phase2.ToString()].Restart();
  214. _allTimeDict[N2PurgeModeEnum.Manual_phase2.ToString()].Stop();
  215. _canSwitchToPhase2 = false;
  216. SetN2PurgeValveData(N2PurgeModeEnum.Manual_phase1.ToString());
  217. }
  218. if (CheckN2PurgePhase2())
  219. {
  220. LOG.Info($"N2PurgeMode Trigger Hold Manual_phase2 was triggered {second} seconds later,O2:{ConcentrationO2.Value}");
  221. _allTimeDict[N2PurgeModeEnum.Manual_phase2.ToString()].Restart();
  222. _allTimeDict[N2PurgeModeEnum.Manual_phase2.ToString()].Stop();
  223. _canSwitchToPhase2 = false;
  224. }
  225. }
  226. }
  227. else
  228. {
  229. if (CheckN2PurgePhase1())
  230. {
  231. LOG.Info($"N2PurgeMode Trigger Directly triggered Manual_phase1,O2:{ConcentrationO2.Value}");
  232. SetN2PurgeValveData(N2PurgeModeEnum.Manual_phase1.ToString());
  233. }
  234. else if (CheckN2PurgePhase2())
  235. {
  236. LOG.Info($"N2PurgeMode Trigger Directly triggered Manual_phase2,O2:{ConcentrationO2.Value}");
  237. SetN2PurgeValveData(N2PurgeModeEnum.Manual_phase2.ToString());
  238. }
  239. }
  240. }
  241. if (_N2PurgeMode == N2PurgeModeEnum.ATMMode)
  242. {
  243. if (_currentPhase == N2PurgeModeEnum.Manual_phase3)
  244. {
  245. var checkResult = CheckN2PurgePhase4();
  246. if (!_allTimeDict[N2PurgeModeEnum.Manual_phase4.ToString()].IsRunning)
  247. {
  248. _allTimeDict[N2PurgeModeEnum.Manual_phase4.ToString()].Restart();
  249. }
  250. var second = _allTimeDict[N2PurgeModeEnum.Manual_phase4.ToString()].Elapsed.TotalSeconds;
  251. if (second >= _manualPhase4StabilityTime && checkResult)
  252. {
  253. LOG.Info($"N2PurgeMode Trigger from Manual_phase3 to Manual_phase4 is triggered {second} seconds later,O2:{ConcentrationO2.Value}");
  254. SetN2PurgeValveData(N2PurgeModeEnum.Manual_phase4.ToString());
  255. _allTimeDict[N2PurgeModeEnum.Manual_phase4.ToString()].Restart();
  256. _allTimeDict[N2PurgeModeEnum.Manual_phase4.ToString()].Stop();
  257. }
  258. }
  259. else if (_currentPhase == N2PurgeModeEnum.Manual_phase4)
  260. {
  261. if (CheckN2PurgePhase5())
  262. {
  263. LOG.Info($"N2PurgeMode Trigger from Manual_phase4 to Manual_phase5,O2:{ConcentrationO2.Value}");
  264. SetN2PurgeValveData(N2PurgeModeEnum.Manual_phase5.ToString());
  265. }
  266. //if (CheckN2PurgePhase3( ))
  267. //{
  268. // LOG.Info($"N2PurgeMode Trigger from Manual_phase4 to Manual_phase3,O2:{o2Value}");
  269. // SetN2PurgeValveData(N2PurgeModeEnum.Manual_phase3.ToString());
  270. //}
  271. }
  272. else if (_currentPhase == N2PurgeModeEnum.Manual_phase5)
  273. {
  274. if (CheckN2PurgePhase4())
  275. {
  276. LOG.Info($"N2PurgeMode Trigger from Manual_phase5 to Manual_phase4,O2:{ConcentrationO2.Value}");
  277. SetN2PurgeValveData(N2PurgeModeEnum.Manual_phase4.ToString());
  278. }
  279. //if (CheckN2PurgePhase3( ))
  280. //{
  281. // LOG.Info($"N2PurgeMode Trigger from Manual_phase5 to Manual_phase3,O2:{o2Value}");
  282. // SetN2PurgeValveData(N2PurgeModeEnum.Manual_phase3.ToString());
  283. //}
  284. }
  285. else
  286. {
  287. if (CheckN2PurgePhase3())
  288. {
  289. LOG.Info($"N2PurgeMode Trigger Directly triggered Manual_phase3,O2:{ConcentrationO2.Value}");
  290. SetN2PurgeValveData(N2PurgeModeEnum.Manual_phase3.ToString());
  291. return;
  292. }
  293. if (CheckN2PurgePhase5())
  294. {
  295. LOG.Info($"N2PurgeMode Trigger Directly triggered Manual_phase5,O2:{ConcentrationO2.Value}");
  296. SetN2PurgeValveData(N2PurgeModeEnum.Manual_phase5.ToString());
  297. return;
  298. }
  299. if (CheckN2PurgePhase4())
  300. {
  301. LOG.Info($"N2PurgeMode Trigger Directly triggered Manual_phase4,O2:{ConcentrationO2.Value}");
  302. SetN2PurgeValveData(N2PurgeModeEnum.Manual_phase4.ToString());
  303. return;
  304. }
  305. }
  306. }
  307. if (_N2PurgeMode == N2PurgeModeEnum.ManualMode || _N2PurgeMode == N2PurgeModeEnum.Auto)
  308. {
  309. _currentPhase = _N2PurgeMode;
  310. }
  311. //switch (_N2PurgeMode)
  312. //{
  313. // case N2PurgeModeEnum.Auto:
  314. // // 自动模式下的操作
  315. // break;
  316. // case N2PurgeModeEnum.ManualMode:
  317. // break;
  318. // case N2PurgeModeEnum.N2PurgeMode:
  319. // ProcessPhase(_trigN2UpRD, N2PurgeModeEnum.Manual_phase1.ToString());
  320. // ProcessPhase(_trigN2DownRD, N2PurgeModeEnum.Manual_phase2.ToString(), _manualPhase2NeedCheck, (int)(_manualPhase2StabilityTime * 1000));
  321. // break;
  322. // case N2PurgeModeEnum.ATMMode:
  323. // ProcessPhase(_trigN2AirDownRD, N2PurgeModeEnum.Manual_phase3.ToString());
  324. // ProcessPhase(_trigN2AirUpRD, N2PurgeModeEnum.Manual_phase4.ToString(), _manualPhase4NeedCheck, (int)(_manualPhase4StabilityTime * 1000));
  325. // ProcessPhase(_trigN2AirDownTwoRD, N2PurgeModeEnum.Manual_phase5.ToString());
  326. // break;
  327. //}
  328. }
  329. bool CheckConditionInTime(string modeKey, int millisecondsTimeout, Func<bool> condition)
  330. {
  331. var stopwatch = _allTimeDict[modeKey];
  332. if (!_allTimeDict[modeKey].IsRunning)
  333. {
  334. _allTimeDict[modeKey].Restart();
  335. }
  336. while (stopwatch.ElapsedMilliseconds < millisecondsTimeout)
  337. {
  338. if (!_allTimeDict[modeKey].IsRunning)
  339. {
  340. return true;
  341. }
  342. if (!condition())
  343. {
  344. _allTimeDict[modeKey].Stop();
  345. _allTimeDict[modeKey].Reset();
  346. return false;
  347. }
  348. }
  349. if (stopwatch.ElapsedMilliseconds > millisecondsTimeout)
  350. {
  351. _allTimeDict[modeKey].Stop();
  352. _allTimeDict[modeKey].Reset();
  353. }
  354. return true;
  355. }
  356. private void ProcessPhase(R_TRIG r_TRIG, string modeKey, bool needCheck = false, int time = 0)
  357. {
  358. r_TRIG.CLK = needCheck ? (CheckConditionInTime(modeKey, time, () => _n2PurgeSequenceStatus[modeKey].Invoke())) : _n2PurgeSequenceStatus[modeKey].Invoke();
  359. if (r_TRIG.Q)
  360. {
  361. LOG.Info($"N2PurgeMode Trigger {modeKey}!,O2:{ConcentrationO2.Value},time:{_allTimeDict[modeKey].ElapsedMilliseconds}");
  362. SetN2PurgeValveData(modeKey);
  363. _allTimeDict[modeKey].Stop();
  364. _allTimeDict[modeKey].Reset();
  365. }
  366. }
  367. public void RestAllN2PrugeRD()
  368. {
  369. _trigN2AirDownRD.RST = false;
  370. _trigN2AirUpRD.RST = false;
  371. _trigN2DownRD.RST = false;
  372. _trigN2UpRD.RST = false;
  373. foreach (var item in _allTimeDict)
  374. {
  375. item.Value.Stop();
  376. item.Value.Reset();
  377. }
  378. _canSwitchToPhase2 = true;
  379. }
  380. private void SetN2PurgeValveData(string mode, string msg = "")
  381. {
  382. var value = _n2PurgeSequenceAction[mode];
  383. _currentPhase = (N2PurgeModeEnum)Enum.Parse(typeof(N2PurgeModeEnum), mode);
  384. if (SC.ContainsItem("PM1.SelectN2PurgeModePhase"))
  385. {
  386. SC.SetItemValue("PM1.SelectN2PurgeModePhase", mode);
  387. }
  388. foreach (var operateItem in value.Item2)
  389. {
  390. if (operateItem.Item1 is IoMFC)
  391. {
  392. var ioMFc = (operateItem.Item1 as IoMFC);
  393. { ioMFc.SetMfcValue(out _, 0, new object[] { float.Parse(operateItem.Item2.ToString()) }); }
  394. }
  395. if (operateItem.Item1 is IoValve)
  396. {
  397. var ioValve = (operateItem.Item1 as IoValve);
  398. ioValve.TurnValve(bool.Parse(operateItem.Item2), out _);
  399. }
  400. if (operateItem.Item1 is IoTrigger)
  401. {
  402. var ioTrigger = (operateItem.Item1 as IoTrigger);
  403. ioTrigger.CheckAndSet(bool.Parse(operateItem.Item2), out _);
  404. }
  405. }
  406. }
  407. private bool SetN2PurgeMode(out string reason, int time, object[] param)
  408. {
  409. reason = string.Empty;
  410. var mode = param[0].ToString();
  411. _N2PurgeMode = (N2PurgeModeEnum)Enum.Parse(typeof(N2PurgeModeEnum), mode);
  412. if (SC.ContainsItem("PM1.SelectN2PurgeMode"))
  413. {
  414. SC.SetItemValue("PM1.SelectN2PurgeMode", mode);
  415. }
  416. RestAllN2PrugeRD();
  417. return true;
  418. }
  419. /// <summary>
  420. /// 获取当前O2检测位置的设定值
  421. /// </summary>
  422. /// <returns></returns>
  423. private string GetO2SetCheckSetPoint()
  424. {
  425. if (SensorO2DetectSideLA != null && SensorO2DetectSideLA.Value)
  426. {
  427. var key = "PM1.N2Purge.N2PurgeLAO2CheckSV";
  428. if (SC.ContainsItem(key))
  429. return SC.GetValue<double>(key).ToString("f3");
  430. }
  431. if ((SensorO2DetectSideFIMS1 != null && SensorO2DetectSideFIMS1.Value) || (SensorO2DetectSideFIMS2 != null && SensorO2DetectSideFIMS2.Value))
  432. {
  433. var key = "PM1.N2Purge.N2PurgeFOUPO2CheckSV";
  434. if (SC.ContainsItem(key))
  435. return SC.GetValue<double>(key).ToString("f3");
  436. }
  437. return "";
  438. }
  439. /// <summary>
  440. /// 获取当前O2检测位置
  441. /// </summary>
  442. /// <returns></returns>
  443. private string GetCheckO2Location()
  444. {
  445. if (SensorO2DetectSideLA != null && SensorO2DetectSideLA.Value)
  446. return SensorO2DetectSideLA.Display;
  447. if (SensorO2DetectSideFIMS1 != null && SensorO2DetectSideFIMS1.Value)
  448. return SensorO2DetectSideFIMS1.Display;
  449. if (SensorO2DetectSideFIMS2 != null && SensorO2DetectSideFIMS2.Value)
  450. return SensorO2DetectSideFIMS2.Display;
  451. return "";
  452. }
  453. /// <summary>
  454. /// 获取当前O2浓度
  455. /// </summary>
  456. /// <returns></returns>
  457. private bool CheckN2PurgePhase1()
  458. {
  459. return ((int)ConcentrationO2.Value >= _n2PurgeData) && GetLADoorOpenStatus();
  460. }
  461. private bool CheckN2PurgePhase2()
  462. {
  463. return ((int)ConcentrationO2.Value < _n2PurgeData) && GetLADoorOpenStatus();
  464. }
  465. private bool CheckN2PurgePhase3()
  466. {
  467. return ((int)ConcentrationO2.Value) < _n2ToAirData && GetLADoorOpenStatus();
  468. }
  469. private bool CheckN2PurgePhase5()
  470. {
  471. return ((int)ConcentrationO2.Value) >= _n2ToAirData && !GetLADoorOpenStatus();
  472. }
  473. private bool CheckN2PurgePhase4()
  474. {
  475. return (((int)ConcentrationO2.Value)) >= _n2ToAirData && GetLADoorOpenStatus();
  476. }
  477. private bool GetN2PurgeAIRTo20PPMStatus()
  478. {
  479. return ValveAV202.DOOpen.Value;
  480. }
  481. public bool GetN2PurgeUnder20PPMStatus(double value = 20)
  482. {
  483. return ConcentrationO2.Value < value;
  484. }
  485. private bool GetN2PurgeAIRStatus()
  486. {
  487. return ValveAV202.DOClose.Value && (AlarmSignalFilterBox1DoorSwitch != null ? !AlarmSignalFilterBox1DoorSwitch.Value : false);
  488. }
  489. private bool GetLADoorOpenStatus()
  490. {
  491. return (bool)(SensorLADoorSw1?.Value);
  492. }
  493. private bool GetN2PurgeDoorOpenStatus()
  494. {
  495. return ValveAV202.DOClose.Value && (AlarmSignalFilterBox1DoorSwitch != null ? !AlarmSignalFilterBox1DoorSwitch.Value : false);
  496. }
  497. private bool GetN2PurgeFoup1Status()
  498. {
  499. return GetN2PurgeAIRTo20PPMStatus() && GetN2PurgeUnder20PPMStatus() && FIMS1.IsFoupExist && FIMS1.CollisionAvoidanceUpDownStatus == DeviceStatus.Down;
  500. }
  501. private bool GetN2PurgeFoup2Status()
  502. {
  503. return GetN2PurgeAIRTo20PPMStatus() && GetN2PurgeUnder20PPMStatus() && FIMS2.IsFoupExist && FIMS2.CollisionAvoidanceUpDownStatus == DeviceStatus.Down; ;
  504. }
  505. public bool IsAbortN2purge()
  506. {
  507. if (!_enableAbortN2purge)
  508. {
  509. return false;
  510. }
  511. if (SensorSL02001gasboxdoorsw11.Value || SensorSL02001gasboxdoorsw12.Value || SensorSL02002gasboxdoorsw11.Value || SensorSL02002gasboxdoorsw12.Value || SensorSL05002LAdoorsw2.Value || SensorSL05004LAfurnacedoorsw.Value)
  512. {
  513. return true;
  514. }
  515. return false;
  516. }
  517. public void SetN2PurgeLAO2CheckFirstEnable(bool isEable)
  518. {
  519. if (TrigN2PurgeLAO2CheckFirstEnable != null && TrigN2PurgeLAO2CheckFirstEnable.Value != isEable)
  520. {
  521. TrigN2PurgeLAO2CheckFirstEnable.SetTrigger(isEable, out _);
  522. }
  523. }
  524. public void SetN2PurgeFIMS1O2CheckEnable(ModuleName fims, bool isEable)
  525. {
  526. if (fims == ModuleName.FIMS1 && TrigN2PurgeFIMS1O2CheckEnable != null && TrigN2PurgeFIMS1O2CheckEnable.Value != isEable)
  527. {
  528. TrigN2PurgeFIMS1O2CheckEnable.SetTrigger(isEable, out _);
  529. }
  530. if (fims == ModuleName.FIMS2 && TrigN2PurgeFIMS2O2CheckEnable != null && TrigN2PurgeFIMS2O2CheckEnable.Value != isEable)
  531. {
  532. TrigN2PurgeFIMS2O2CheckEnable.SetTrigger(isEable, out _);
  533. }
  534. }
  535. public void SetN2PurgeProcess(bool isEable)
  536. {
  537. if (TrigN2PurgeProcess != null && TrigN2PurgeProcess.Value != isEable)
  538. {
  539. TrigN2PurgeProcess.SetTrigger(isEable, out _);
  540. }
  541. }
  542. public void SetN2PurgeLAO2CheckSV(float value)
  543. {
  544. if (TrigN2PurgeLAO2CheckSV != null)
  545. TrigN2PurgeLAO2CheckSV?.SetAOTrigger(value, out _);
  546. }
  547. public void SetN2PurgeFOUPO2CheckSV(float value)
  548. {
  549. if (TrigN2PurgeFOUPO2CheckSV != null)
  550. TrigN2PurgeFOUPO2CheckSV?.SetAOTrigger(value, out _);
  551. }
  552. public bool FIMSLoadCheckLAO2(out string reason)
  553. {
  554. var scLAO2 = (float)SC.GetValue<double>("PM1.N2Purge.N2PurgeLAO2CheckSV");
  555. reason = $"LA O2 concentration has not reached below {scLAO2}ppm";
  556. if (SensorO2DetectSideLA == null || !SensorO2DetectSideLA.Value)
  557. {
  558. reason = $"Oxygen analyzer not switched to LA";
  559. return false;
  560. }
  561. return ((int)(ConcentrationO2.Value)) < scLAO2;
  562. }
  563. public void SetAVParameter(ModuleName fims, bool isEable)
  564. {
  565. if (fims == ModuleName.FIMS1)
  566. {
  567. var avValve58 = DEVICE.GetDevice<IoValve>($"{ModuleName.PM1}.ValveAV58");
  568. avValve58?.TurnValve(isEable, out _);
  569. }
  570. if (fims == ModuleName.FIMS2)
  571. {
  572. var avValve59 = DEVICE.GetDevice<IoValve>($"{ModuleName.PM1}.ValveAV59");
  573. avValve59?.TurnValve(isEable, out _);
  574. }
  575. }
  576. /// <summary>
  577. /// N2Purge相关时间参数,电气要求设定为秒,实际下发按照毫秒
  578. /// </summary>
  579. public void SetN2PurgeParameters()
  580. {
  581. if (SC.ContainsItem("PM1.N2Purge.TransferRoomArrivalWaitTime") && TrigN2PurgeLAO2CheckTime != null)
  582. {
  583. var time = (float)SC.GetValue<double>("PM1.N2Purge.TransferRoomArrivalWaitTime");
  584. TrigN2PurgeLAO2CheckTime.SetAOTrigger(time, out _);
  585. }
  586. if (SC.ContainsItem("PM1.N2Purge.TransferRoomStableWaitTime") && TrigN2PurgeLAO2OverTime != null)
  587. {
  588. var time = (float)SC.GetValue<double>("PM1.N2Purge.TransferRoomStableWaitTime");
  589. TrigN2PurgeLAO2OverTime.SetAOTrigger(time, out _);
  590. }
  591. if (SC.ContainsItem("PM1.N2Purge.FOUPOpenerArrivalWaitTime") && TrigN2PurgeFOUPO2CheckTime != null)
  592. {
  593. var time = (float)SC.GetValue<double>("PM1.N2Purge.FOUPOpenerArrivalWaitTime");
  594. TrigN2PurgeFOUPO2CheckTime.SetAOTrigger(time, out _);
  595. }
  596. if (SC.ContainsItem("PM1.N2Purge.FOUPOpenerStableWaitTime") && TrigN2PurgeFOUPO2OverTime != null)
  597. {
  598. var time = (float)SC.GetValue<double>("PM1.N2Purge.FOUPOpenerStableWaitTime");
  599. TrigN2PurgeFOUPO2OverTime.SetAOTrigger(time, out _);
  600. }
  601. if (SC.ContainsItem("PM1.N2Purge.O2DetectorTransferRoomToFOUPTime") && TrigN2PurgeExchangeLATOFOUPWaitTime != null)
  602. {
  603. var time = (float)SC.GetValue<double>("PM1.N2Purge.O2DetectorTransferRoomToFOUPTime");
  604. TrigN2PurgeExchangeLATOFOUPWaitTime.SetAOTrigger(time, out _);
  605. }
  606. if (SC.ContainsItem("PM1.N2Purge.O2DetectorFOUPToTransferRoomTime") && TrigN2PurgeExchangeFOUPTOLAWaitTime != null)
  607. {
  608. var time = (float)SC.GetValue<double>("PM1.N2Purge.O2DetectorFOUPToTransferRoomTime");
  609. TrigN2PurgeExchangeFOUPTOLAWaitTime.SetAOTrigger(time, out _);
  610. }
  611. if (SC.ContainsItem("PM1.N2Purge.O2DetectorFOUPToFOUPTime") && TrigN2PurgeExchangeFOUPTOFOUPWaitTime != null)
  612. {
  613. var time = (float)SC.GetValue<double>("PM1.N2Purge.O2DetectorFOUPToFOUPTime");
  614. TrigN2PurgeExchangeFOUPTOFOUPWaitTime.SetAOTrigger(time, out _);
  615. }
  616. SetN2PurgeLAO2CheckSV((float)SC.GetValue<double>("PM1.N2Purge.N2PurgeLAO2CheckSV"));
  617. SetN2PurgeFOUPO2CheckSV((float)SC.GetValue<double>("PM1.N2Purge.N2PurgeFOUPO2CheckSV"));
  618. }
  619. /// <summary>
  620. /// Job start的时候,就根据Process的配置判定是否需要进行LA压氧
  621. /// </summary>
  622. /// <param name="n2PurgeModeStr"></param>
  623. public void InitN2PurgeMode(string n2PurgeModeStr)
  624. {
  625. if (string.IsNullOrEmpty(n2PurgeModeStr))
  626. return;
  627. if (n2PurgeModeStr.ToLower() == "none")
  628. return;
  629. if (SC.ContainsItem("PM1.RecipeRelevancyN2Purge") && SC.GetValue<bool>("PM1.RecipeRelevancyN2Purge") && SC.ContainsItem("PM1.SelectN2PurgeMode"))
  630. {
  631. var setValue = GetN2PurgeModeEnumByStr(n2PurgeModeStr);
  632. SC.SetItemValueFromString("PM1.SelectN2PurgeMode", setValue);
  633. RestAllN2PrugeRD();
  634. }
  635. }
  636. public bool CheckFimsIsNeedOxygenPressure(string recipeN2PurgeModeStr, out bool isCheckO2)
  637. {
  638. isCheckO2 = false;
  639. if (string.IsNullOrEmpty(recipeN2PurgeModeStr))
  640. return false;
  641. if (recipeN2PurgeModeStr.ToLower().Equals("n2 purge"))
  642. {
  643. recipeN2PurgeModeStr = N2PurgeModeEnum.N2PurgeMode.ToString();
  644. }
  645. if (recipeN2PurgeModeStr.ToLower().Contains("atm"))
  646. {
  647. recipeN2PurgeModeStr = IsATMMode(recipeN2PurgeModeStr);
  648. }
  649. var n2PurgeEnum = (N2PurgeModeEnum)Enum.Parse(typeof(N2PurgeModeEnum), recipeN2PurgeModeStr);
  650. if (n2PurgeEnum == N2PurgeModeEnum.ATMMode)
  651. return false;
  652. var currectN2PurgeModel = GetLACurrectN2purgeMode();
  653. var fimsN2PurgeConfig = GetFIMStN2purgeConfig();
  654. if (n2PurgeEnum == N2PurgeModeEnum.N2PurgeMode)
  655. {
  656. if (currectN2PurgeModel == N2PurgeModeEnum.N2PurgeMode.ToString())
  657. {
  658. if (fimsN2PurgeConfig)
  659. {
  660. isCheckO2 = true;
  661. return true;
  662. }
  663. else
  664. {
  665. return false;
  666. }
  667. }
  668. if (currectN2PurgeModel == N2PurgeModeEnum.ATMMode.ToString())
  669. {
  670. if (fimsN2PurgeConfig)
  671. {
  672. isCheckO2 = true;
  673. return true;
  674. }
  675. else
  676. {
  677. return false;
  678. }
  679. }
  680. }
  681. if (n2PurgeEnum == N2PurgeModeEnum.None)
  682. {
  683. if (currectN2PurgeModel == N2PurgeModeEnum.ATMMode.ToString())
  684. {
  685. return false;
  686. }
  687. if (currectN2PurgeModel == N2PurgeModeEnum.N2PurgeMode.ToString())
  688. {
  689. if (fimsN2PurgeConfig)
  690. {
  691. isCheckO2 = true;
  692. return true;
  693. }
  694. else
  695. {
  696. return false;
  697. }
  698. }
  699. }
  700. return false;
  701. }
  702. public bool CheckLAIsNeedOxygenPressure(string recipeN2PurgeModeStr)
  703. {
  704. if (string.IsNullOrEmpty(recipeN2PurgeModeStr))
  705. return false;
  706. if (recipeN2PurgeModeStr.ToLower() == "none")
  707. return false;
  708. if (recipeN2PurgeModeStr.ToLower() == "atm")
  709. {
  710. recipeN2PurgeModeStr = N2PurgeModeEnum.ATMMode.ToString();
  711. }
  712. var n2PurgeEnum = (N2PurgeModeEnum)Enum.Parse(typeof(N2PurgeModeEnum), recipeN2PurgeModeStr);
  713. if (n2PurgeEnum == N2PurgeModeEnum.N2PurgeMode || n2PurgeEnum == N2PurgeModeEnum.ATMMode)
  714. return true;
  715. return false;
  716. }
  717. }
  718. }