PMN2Purge.cs 28 KB

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  1. using Aitex.Core.RT.DataCenter;
  2. using Aitex.Core.RT.Device;
  3. using Aitex.Core.RT.Device.Unit;
  4. using Aitex.Core.RT.IOCore;
  5. using Aitex.Core.RT.Log;
  6. using Aitex.Core.RT.SCCore;
  7. using Aitex.Core.Util;
  8. using DocumentFormat.OpenXml.Packaging;
  9. using DocumentFormat.OpenXml.Spreadsheet;
  10. using FurnaceRT.Devices;
  11. using FurnaceRT.Equipments.PMs.Devices;
  12. using FurnaceRT.Extraction;
  13. using MECF.Framework.Common.CommonData.SorterDefines;
  14. using MECF.Framework.Common.Equipment;
  15. using MECF.Framework.Common.Tolerance;
  16. using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.LoadPorts.TDK;
  17. using System;
  18. using System.Collections.Generic;
  19. using System.Diagnostics;
  20. namespace FurnaceRT.Equipments.PMs
  21. {
  22. /// <summary>
  23. /// 分布类 定义N2Purge的执行逻辑
  24. /// </summary>
  25. public partial class PMModule
  26. {
  27. private R_TRIG _trigN2UpRD = new R_TRIG();
  28. private R_TRIG _trigN2DownRD = new R_TRIG();
  29. private R_TRIG _trigN2AirUpRD = new R_TRIG();
  30. private R_TRIG _trigN2AirDownRD = new R_TRIG();
  31. private R_TRIG _trigN2AirDownTwoRD = new R_TRIG();
  32. private R_TRIG _trigSelectN2PurgeModeD = new R_TRIG();
  33. private FilterChecker _filterChecker = new FilterChecker();
  34. private Dictionary<string, Tuple<R_TRIG, List<Tuple<IDevice, string>>>> _n2PurgeSequenceAction;
  35. private Dictionary<string, Func<bool>> _n2PurgeSequenceStatus;
  36. private Dictionary<string, R_TRIG> _rTrigDict;
  37. private N2PurgeModeEnum _N2PurgeMode = N2PurgeModeEnum.Auto;
  38. private double _n2PurgeData = 20;
  39. private double _n2ToAirData = 185000;
  40. private N2PurgeModeEnum _currentPhase;
  41. private double _manualPhase2StabilityTime = 0;
  42. private double _manualPhase4StabilityTime = 0;
  43. private bool _enableAbortN2purge = true;
  44. private int _phase1CycleCount = 0;
  45. private int _phase1CycleCountSC = 0;
  46. private bool _canSwitchToPhase2 = true;
  47. private Dictionary<string, Stopwatch> _allTimeDict = new Dictionary<string, Stopwatch>();
  48. private void InitN2PurgeData()
  49. {
  50. DATA.Subscribe($"{Module}.N2PurgeLimitData", () => GetN2PurgeLimitData());
  51. DATA.Subscribe($"{Module}.O2DensityData", () => ConcentrationO2.Value.ToString("f3"), SubscriptionAttribute.FLAG.IgnoreSaveDB);
  52. DATA.Subscribe($"{Module}.CheckO2Location", () => GetCheckO2Location(), SubscriptionAttribute.FLAG.IgnoreSaveDB);
  53. DATA.Subscribe($"{Module}.O2SetCheckSetPoint", () => GetO2SetCheckSetPoint(), SubscriptionAttribute.FLAG.IgnoreSaveDB);
  54. DATA.Subscribe($"{Module}.N2PurgeMode", () => SC.ContainsItem("PM1.SelectN2PurgeMode") ? SC.GetStringValue("PM1.SelectN2PurgeMode") : "");
  55. var selectN2PurgeMode = SC.ContainsItem("PM1.SelectN2PurgeMode") ? SC.GetStringValue("PM1.SelectN2PurgeMode") : "";
  56. if (!string.IsNullOrEmpty(selectN2PurgeMode))
  57. {
  58. if (selectN2PurgeMode != _N2PurgeMode.ToString())
  59. {
  60. SetN2PurgeModeAction(selectN2PurgeMode);
  61. }
  62. }
  63. var currentPhase = SC.ContainsItem("PM1.SelectN2PurgeModePhase") ? SC.GetStringValue("PM1.SelectN2PurgeModePhase") : "";
  64. if (!string.IsNullOrEmpty(currentPhase))
  65. {
  66. var enumCurrentPhase = (N2PurgeModeEnum)Enum.Parse(typeof(N2PurgeModeEnum), currentPhase);
  67. _currentPhase = enumCurrentPhase;
  68. }
  69. }
  70. private void InitN2PurgeConfigData()
  71. {
  72. _n2PurgeData = SC.ContainsItem($"System.N2PurgeData") ? SC.GetValue<double>("System.N2PurgeData") : 20;
  73. _n2ToAirData = SC.ContainsItem($"System.N2PurgeData") ? SC.GetValue<double>("System.N2ToAirData") : 185000;
  74. _enableAbortN2purge = SC.ContainsItem($"PM1.N2Purge.EnableAbortN2purge") ? SC.GetValue<bool>("PM1.N2Purge.EnableAbortN2purge") : false;
  75. _manualPhase2StabilityTime = SC.ContainsItem($"PM1.N2Purge.Manual_phase2.StabilityTime") ? SC.GetValue<double>("PM1.N2Purge.Manual_phase2.StabilityTime") : 0;
  76. _manualPhase4StabilityTime = SC.ContainsItem($"PM1.N2Purge.Manual_phase4.StabilityTime") ? SC.GetValue<double>("PM1.N2Purge.Manual_phase4.StabilityTime") : 0;
  77. _phase1CycleCountSC = SC.ContainsItem($"PM1.N2Purge.Manual_phase1.CycleCount") ? SC.GetValue<int>("PM1.N2Purge.Manual_phase1.CycleCount") : 0;
  78. _n2PurgeSequenceAction = ExtractionMethods.GetN2PurgeSequenceAction();
  79. _n2PurgeSequenceStatus = new Dictionary<string, Func<bool>>()
  80. {
  81. {"N2PurgeAIRTo20PPM",()=> GetN2PurgeAIRTo20PPMStatus()},
  82. {"N2PurgeUnder20PPM",()=> GetN2PurgeUnder20PPMStatus()},
  83. {"AIR",()=> GetN2PurgeAIRStatus()},
  84. {"DoorOpen",()=> GetN2PurgeDoorOpenStatus()},
  85. {"Foup1",()=> GetN2PurgeFoup1Status()},
  86. {"Foup2",()=> GetN2PurgeFoup2Status()},
  87. {N2PurgeModeEnum.Manual_phase1.ToString(),()=> CheckN2PurgePhase1() },
  88. {N2PurgeModeEnum.Manual_phase2.ToString(),()=> CheckN2PurgePhase2()},
  89. {N2PurgeModeEnum.Manual_phase3.ToString(),()=> CheckN2PurgePhase3() },
  90. {N2PurgeModeEnum.Manual_phase4.ToString(),()=> CheckN2PurgePhase4() },
  91. {N2PurgeModeEnum.Manual_phase5.ToString(),()=> CheckN2PurgePhase5() },
  92. };
  93. _allTimeDict = new Dictionary<string, Stopwatch>()
  94. {
  95. {N2PurgeModeEnum.Manual_phase1.ToString(),new Stopwatch() },
  96. {N2PurgeModeEnum.Manual_phase2.ToString(),new Stopwatch()},
  97. {N2PurgeModeEnum.Manual_phase3.ToString(),new Stopwatch()},
  98. {N2PurgeModeEnum.Manual_phase4.ToString(),new Stopwatch() },
  99. {N2PurgeModeEnum.Manual_phase5.ToString(),new Stopwatch() }
  100. };
  101. _rTrigDict = new Dictionary<string, R_TRIG>();
  102. }
  103. private void MonitorN2Purge()
  104. {
  105. var selectN2PurgeMode = SC.ContainsItem("PM1.SelectN2PurgeMode") ? SC.GetStringValue("PM1.SelectN2PurgeMode") : "";
  106. if (string.IsNullOrEmpty(selectN2PurgeMode))
  107. {
  108. return;
  109. }
  110. SetN2PurgeModeAction(selectN2PurgeMode);
  111. }
  112. private double GetN2PurgeLimitData()
  113. {
  114. if (_N2PurgeMode == N2PurgeModeEnum.N2PurgeMode)
  115. {
  116. if ((SensorO2DetectSideFIMS1 != null && SensorO2DetectSideFIMS1.Value) || (SensorO2DetectSideFIMS2 != null && SensorO2DetectSideFIMS2.Value))
  117. {
  118. return (float)SC.GetValue<double>("PM1.N2Purge.N2PurgeFOUPO2CheckSV");
  119. }
  120. return _n2PurgeData;
  121. }
  122. if (_N2PurgeMode == N2PurgeModeEnum.ATMMode)
  123. {
  124. return _n2ToAirData;
  125. }
  126. return ConcentrationO2.Value;
  127. }
  128. private void SetN2PurgeModeAction(string selectN2PurgeMode)
  129. {
  130. _N2PurgeMode = (N2PurgeModeEnum)Enum.Parse(typeof(N2PurgeModeEnum), selectN2PurgeMode);
  131. if (_N2PurgeMode == N2PurgeModeEnum.N2PurgeMode)
  132. {
  133. if (_currentPhase == N2PurgeModeEnum.Manual_phase1)
  134. {
  135. _filterChecker.CheckInterval = 3;
  136. _filterChecker.Monitor(CheckN2PurgePhase2());
  137. if (_filterChecker.Trig && _canSwitchToPhase2)
  138. {
  139. LOG.Info($" N2PurgeMode Trigger from Manual_phase1 to Manual_phase2,O2:{ConcentrationO2.Value}");
  140. SetN2PurgeValveData(N2PurgeModeEnum.Manual_phase2.ToString());
  141. }
  142. }
  143. else if (_currentPhase == N2PurgeModeEnum.Manual_phase2)
  144. {
  145. if (!_allTimeDict[N2PurgeModeEnum.Manual_phase2.ToString()].IsRunning && _canSwitchToPhase2)
  146. {
  147. _allTimeDict[N2PurgeModeEnum.Manual_phase2.ToString()].Restart();
  148. }
  149. var second = _allTimeDict[N2PurgeModeEnum.Manual_phase2.ToString()].Elapsed.TotalSeconds;
  150. if (second >= _manualPhase2StabilityTime)
  151. {
  152. if (CheckN2PurgePhase1())
  153. {
  154. LOG.Info($"N2PurgeMode Trigger Manual_phase1 was triggered {second} seconds later,O2:{ConcentrationO2.Value}");
  155. N2PurgeFaileAlarm.Set();
  156. _allTimeDict[N2PurgeModeEnum.Manual_phase2.ToString()].Restart();
  157. _allTimeDict[N2PurgeModeEnum.Manual_phase2.ToString()].Stop();
  158. _canSwitchToPhase2 = false;
  159. SetN2PurgeValveData(N2PurgeModeEnum.Manual_phase1.ToString());
  160. }
  161. if (CheckN2PurgePhase2())
  162. {
  163. LOG.Info($"N2PurgeMode Trigger Hold Manual_phase2 was triggered {second} seconds later,O2:{ConcentrationO2.Value}");
  164. _allTimeDict[N2PurgeModeEnum.Manual_phase2.ToString()].Restart();
  165. _allTimeDict[N2PurgeModeEnum.Manual_phase2.ToString()].Stop();
  166. _canSwitchToPhase2 = false;
  167. }
  168. }
  169. }
  170. else
  171. {
  172. if (CheckN2PurgePhase1())
  173. {
  174. LOG.Info($"N2PurgeMode Trigger Directly triggered Manual_phase1,O2:{ConcentrationO2.Value}");
  175. SetN2PurgeValveData(N2PurgeModeEnum.Manual_phase1.ToString());
  176. }
  177. else if (CheckN2PurgePhase2())
  178. {
  179. LOG.Info($"N2PurgeMode Trigger Directly triggered Manual_phase2,O2:{ConcentrationO2.Value}");
  180. SetN2PurgeValveData(N2PurgeModeEnum.Manual_phase2.ToString());
  181. }
  182. }
  183. }
  184. if (_N2PurgeMode == N2PurgeModeEnum.ATMMode)
  185. {
  186. if (_currentPhase == N2PurgeModeEnum.Manual_phase3)
  187. {
  188. var checkResult = CheckN2PurgePhase4();
  189. if (!_allTimeDict[N2PurgeModeEnum.Manual_phase4.ToString()].IsRunning)
  190. {
  191. _allTimeDict[N2PurgeModeEnum.Manual_phase4.ToString()].Restart();
  192. }
  193. var second = _allTimeDict[N2PurgeModeEnum.Manual_phase4.ToString()].Elapsed.TotalSeconds;
  194. if (second >= _manualPhase4StabilityTime && checkResult)
  195. {
  196. LOG.Info($"N2PurgeMode Trigger from Manual_phase3 to Manual_phase4 is triggered {second} seconds later,O2:{ConcentrationO2.Value}");
  197. SetN2PurgeValveData(N2PurgeModeEnum.Manual_phase4.ToString());
  198. _allTimeDict[N2PurgeModeEnum.Manual_phase4.ToString()].Restart();
  199. _allTimeDict[N2PurgeModeEnum.Manual_phase4.ToString()].Stop();
  200. }
  201. }
  202. else if (_currentPhase == N2PurgeModeEnum.Manual_phase4)
  203. {
  204. if (CheckN2PurgePhase5())
  205. {
  206. LOG.Info($"N2PurgeMode Trigger from Manual_phase4 to Manual_phase5,O2:{ConcentrationO2.Value}");
  207. SetN2PurgeValveData(N2PurgeModeEnum.Manual_phase5.ToString());
  208. }
  209. //if (CheckN2PurgePhase3( ))
  210. //{
  211. // LOG.Info($"N2PurgeMode Trigger from Manual_phase4 to Manual_phase3,O2:{o2Value}");
  212. // SetN2PurgeValveData(N2PurgeModeEnum.Manual_phase3.ToString());
  213. //}
  214. }
  215. else if (_currentPhase == N2PurgeModeEnum.Manual_phase5)
  216. {
  217. if (CheckN2PurgePhase4())
  218. {
  219. LOG.Info($"N2PurgeMode Trigger from Manual_phase5 to Manual_phase4,O2:{ConcentrationO2.Value}");
  220. SetN2PurgeValveData(N2PurgeModeEnum.Manual_phase4.ToString());
  221. }
  222. //if (CheckN2PurgePhase3( ))
  223. //{
  224. // LOG.Info($"N2PurgeMode Trigger from Manual_phase5 to Manual_phase3,O2:{o2Value}");
  225. // SetN2PurgeValveData(N2PurgeModeEnum.Manual_phase3.ToString());
  226. //}
  227. }
  228. else
  229. {
  230. if (CheckN2PurgePhase3())
  231. {
  232. LOG.Info($"N2PurgeMode Trigger Directly triggered Manual_phase3,O2:{ConcentrationO2.Value}");
  233. SetN2PurgeValveData(N2PurgeModeEnum.Manual_phase3.ToString());
  234. return;
  235. }
  236. if (CheckN2PurgePhase5())
  237. {
  238. LOG.Info($"N2PurgeMode Trigger Directly triggered Manual_phase5,O2:{ConcentrationO2.Value}");
  239. SetN2PurgeValveData(N2PurgeModeEnum.Manual_phase5.ToString());
  240. return;
  241. }
  242. if (CheckN2PurgePhase4())
  243. {
  244. LOG.Info($"N2PurgeMode Trigger Directly triggered Manual_phase4,O2:{ConcentrationO2.Value}");
  245. SetN2PurgeValveData(N2PurgeModeEnum.Manual_phase4.ToString());
  246. return;
  247. }
  248. }
  249. }
  250. if (_N2PurgeMode == N2PurgeModeEnum.ManualMode || _N2PurgeMode == N2PurgeModeEnum.Auto)
  251. {
  252. _currentPhase = _N2PurgeMode;
  253. }
  254. //switch (_N2PurgeMode)
  255. //{
  256. // case N2PurgeModeEnum.Auto:
  257. // // 自动模式下的操作
  258. // break;
  259. // case N2PurgeModeEnum.ManualMode:
  260. // break;
  261. // case N2PurgeModeEnum.N2PurgeMode:
  262. // ProcessPhase(_trigN2UpRD, N2PurgeModeEnum.Manual_phase1.ToString());
  263. // ProcessPhase(_trigN2DownRD, N2PurgeModeEnum.Manual_phase2.ToString(), _manualPhase2NeedCheck, (int)(_manualPhase2StabilityTime * 1000));
  264. // break;
  265. // case N2PurgeModeEnum.ATMMode:
  266. // ProcessPhase(_trigN2AirDownRD, N2PurgeModeEnum.Manual_phase3.ToString());
  267. // ProcessPhase(_trigN2AirUpRD, N2PurgeModeEnum.Manual_phase4.ToString(), _manualPhase4NeedCheck, (int)(_manualPhase4StabilityTime * 1000));
  268. // ProcessPhase(_trigN2AirDownTwoRD, N2PurgeModeEnum.Manual_phase5.ToString());
  269. // break;
  270. //}
  271. }
  272. bool CheckConditionInTime(string modeKey, int millisecondsTimeout, Func<bool> condition)
  273. {
  274. var stopwatch = _allTimeDict[modeKey];
  275. if (!_allTimeDict[modeKey].IsRunning)
  276. {
  277. _allTimeDict[modeKey].Restart();
  278. }
  279. while (stopwatch.ElapsedMilliseconds < millisecondsTimeout)
  280. {
  281. if (!_allTimeDict[modeKey].IsRunning)
  282. {
  283. return true;
  284. }
  285. if (!condition())
  286. {
  287. _allTimeDict[modeKey].Stop();
  288. _allTimeDict[modeKey].Reset();
  289. return false;
  290. }
  291. }
  292. if (stopwatch.ElapsedMilliseconds > millisecondsTimeout)
  293. {
  294. _allTimeDict[modeKey].Stop();
  295. _allTimeDict[modeKey].Reset();
  296. }
  297. return true;
  298. }
  299. private void ProcessPhase(R_TRIG r_TRIG, string modeKey, bool needCheck = false, int time = 0)
  300. {
  301. r_TRIG.CLK = needCheck ? (CheckConditionInTime(modeKey, time, () => _n2PurgeSequenceStatus[modeKey].Invoke())) : _n2PurgeSequenceStatus[modeKey].Invoke();
  302. if (r_TRIG.Q)
  303. {
  304. LOG.Info($"N2PurgeMode Trigger {modeKey}!,O2:{ConcentrationO2.Value},time:{_allTimeDict[modeKey].ElapsedMilliseconds}");
  305. SetN2PurgeValveData(modeKey);
  306. _allTimeDict[modeKey].Stop();
  307. _allTimeDict[modeKey].Reset();
  308. }
  309. }
  310. public void RestAllN2PrugeRD()
  311. {
  312. _trigN2AirDownRD.RST = false;
  313. _trigN2AirUpRD.RST = false;
  314. _trigN2DownRD.RST = false;
  315. _trigN2UpRD.RST = false;
  316. foreach (var item in _allTimeDict)
  317. {
  318. item.Value.Stop();
  319. item.Value.Reset();
  320. }
  321. _canSwitchToPhase2 = true;
  322. }
  323. private void SetN2PurgeValveData(string mode, string msg = "")
  324. {
  325. var value = _n2PurgeSequenceAction[mode];
  326. _currentPhase = (N2PurgeModeEnum)Enum.Parse(typeof(N2PurgeModeEnum), mode);
  327. if (SC.ContainsItem("PM1.SelectN2PurgeModePhase"))
  328. {
  329. SC.SetItemValue("PM1.SelectN2PurgeModePhase", mode);
  330. }
  331. foreach (var operateItem in value.Item2)
  332. {
  333. if (operateItem.Item1 is IoMFC)
  334. {
  335. var ioMFc = (operateItem.Item1 as IoMFC);
  336. { ioMFc.SetMfcValue(out _, 0, new object[] { float.Parse(operateItem.Item2.ToString()) }); }
  337. }
  338. if (operateItem.Item1 is IoValve)
  339. {
  340. var ioValve = (operateItem.Item1 as IoValve);
  341. ioValve.TurnValve(bool.Parse(operateItem.Item2), out _);
  342. }
  343. if (operateItem.Item1 is IoTrigger)
  344. {
  345. var ioTrigger = (operateItem.Item1 as IoTrigger);
  346. ioTrigger.CheckAndSet(bool.Parse(operateItem.Item2), out _);
  347. }
  348. }
  349. }
  350. private bool SetN2PurgeMode(out string reason, int time, object[] param)
  351. {
  352. reason = string.Empty;
  353. var mode = param[0].ToString();
  354. _N2PurgeMode = (N2PurgeModeEnum)Enum.Parse(typeof(N2PurgeModeEnum), mode);
  355. if (SC.ContainsItem("PM1.SelectN2PurgeMode"))
  356. {
  357. SC.SetItemValue("PM1.SelectN2PurgeMode", mode);
  358. }
  359. RestAllN2PrugeRD();
  360. return true;
  361. }
  362. /// <summary>
  363. /// 获取当前O2检测位置的设定值
  364. /// </summary>
  365. /// <returns></returns>
  366. private string GetO2SetCheckSetPoint()
  367. {
  368. if (SensorO2DetectSideLA != null && SensorO2DetectSideLA.Value)
  369. {
  370. var key = "PM1.N2Purge.N2PurgeLAO2CheckSV";
  371. if (SC.ContainsItem(key))
  372. return SC.GetValue<double>(key).ToString("f3");
  373. }
  374. if ((SensorO2DetectSideFIMS1 != null && SensorO2DetectSideFIMS1.Value) || (SensorO2DetectSideFIMS2 != null && SensorO2DetectSideFIMS2.Value))
  375. {
  376. var key = "PM1.N2Purge.N2PurgeFOUPO2CheckSV";
  377. if (SC.ContainsItem(key))
  378. return SC.GetValue<double>(key).ToString("f3");
  379. }
  380. return "";
  381. }
  382. /// <summary>
  383. /// 获取当前O2检测位置
  384. /// </summary>
  385. /// <returns></returns>
  386. private string GetCheckO2Location()
  387. {
  388. if (SensorO2DetectSideLA != null && SensorO2DetectSideLA.Value)
  389. return SensorO2DetectSideLA.Display;
  390. if (SensorO2DetectSideFIMS1 != null && SensorO2DetectSideFIMS1.Value)
  391. return SensorO2DetectSideFIMS1.Display;
  392. if (SensorO2DetectSideFIMS2 != null && SensorO2DetectSideFIMS2.Value)
  393. return SensorO2DetectSideFIMS2.Display;
  394. return "";
  395. }
  396. /// <summary>
  397. /// 获取当前O2浓度
  398. /// </summary>
  399. /// <returns></returns>
  400. private bool CheckN2PurgePhase1()
  401. {
  402. return ((int)ConcentrationO2.Value >= _n2PurgeData) && GetLADoorOpenStatus();
  403. }
  404. private bool CheckN2PurgePhase2()
  405. {
  406. return ((int)ConcentrationO2.Value < _n2PurgeData) && GetLADoorOpenStatus();
  407. }
  408. private bool CheckN2PurgePhase3()
  409. {
  410. return ((int)ConcentrationO2.Value) < _n2ToAirData && GetLADoorOpenStatus();
  411. }
  412. private bool CheckN2PurgePhase5()
  413. {
  414. return ((int)ConcentrationO2.Value) >= _n2ToAirData && !GetLADoorOpenStatus();
  415. }
  416. private bool CheckN2PurgePhase4()
  417. {
  418. return (((int)ConcentrationO2.Value)) >= _n2ToAirData && GetLADoorOpenStatus();
  419. }
  420. private bool GetN2PurgeAIRTo20PPMStatus()
  421. {
  422. return ValveAV202.DOOpen.Value;
  423. }
  424. private bool GetN2PurgeUnder20PPMStatus(double value = 20)
  425. {
  426. return ConcentrationO2.Value < value;
  427. }
  428. private bool GetN2PurgeAIRStatus()
  429. {
  430. return ValveAV202.DOClose.Value && (AlarmSignalFilterBox1DoorSwitch != null ? !AlarmSignalFilterBox1DoorSwitch.Value : false);
  431. }
  432. private bool GetLADoorOpenStatus()
  433. {
  434. return (bool)(SensorLADoorSw1?.Value);
  435. }
  436. private bool GetN2PurgeDoorOpenStatus()
  437. {
  438. return ValveAV202.DOClose.Value && (AlarmSignalFilterBox1DoorSwitch != null ? !AlarmSignalFilterBox1DoorSwitch.Value : false);
  439. }
  440. private bool GetN2PurgeFoup1Status()
  441. {
  442. return GetN2PurgeAIRTo20PPMStatus() && GetN2PurgeUnder20PPMStatus() && FIMS1.IsFoupExist && FIMS1.CollisionAvoidanceUpDownStatus == DeviceStatus.Down;
  443. }
  444. private bool GetN2PurgeFoup2Status()
  445. {
  446. return GetN2PurgeAIRTo20PPMStatus() && GetN2PurgeUnder20PPMStatus() && FIMS2.IsFoupExist && FIMS2.CollisionAvoidanceUpDownStatus == DeviceStatus.Down; ;
  447. }
  448. public bool IsAbortN2purge()
  449. {
  450. if (!_enableAbortN2purge)
  451. {
  452. return false;
  453. }
  454. if (SensorSL02001gasboxdoorsw11.Value || SensorSL02001gasboxdoorsw12.Value || SensorSL02002gasboxdoorsw11.Value || SensorSL02002gasboxdoorsw12.Value || SensorSL05002LAdoorsw2.Value || SensorSL05004LAfurnacedoorsw.Value)
  455. {
  456. return true;
  457. }
  458. return false;
  459. }
  460. public void SetN2PurgeLAO2CheckFirstEnable(bool isEable)
  461. {
  462. if (TrigN2PurgeLAO2CheckFirstEnable != null && TrigN2PurgeLAO2CheckFirstEnable.Value != isEable)
  463. {
  464. TrigN2PurgeLAO2CheckFirstEnable.SetTrigger(isEable, out _);
  465. }
  466. }
  467. public void SetN2PurgeFIMS1O2CheckEnable(ModuleName fims, bool isEable)
  468. {
  469. if (fims == ModuleName.FIMS1 && TrigN2PurgeFIMS1O2CheckEnable != null && TrigN2PurgeFIMS1O2CheckEnable.Value != isEable)
  470. {
  471. TrigN2PurgeFIMS1O2CheckEnable.SetTrigger(isEable, out _);
  472. }
  473. if (fims == ModuleName.FIMS2 && TrigN2PurgeFIMS2O2CheckEnable != null && TrigN2PurgeFIMS2O2CheckEnable.Value != isEable)
  474. {
  475. TrigN2PurgeFIMS2O2CheckEnable.SetTrigger(isEable, out _);
  476. }
  477. }
  478. public void SetN2PurgeProcess(bool isEable)
  479. {
  480. if (TrigN2PurgeProcess != null && TrigN2PurgeProcess.Value != isEable)
  481. {
  482. TrigN2PurgeProcess.SetTrigger(isEable, out _);
  483. }
  484. }
  485. public void SetN2PurgeLAO2CheckSV(float value)
  486. {
  487. if (TrigN2PurgeLAO2CheckSV != null)
  488. TrigN2PurgeLAO2CheckSV?.SetAOTrigger(value, out _);
  489. }
  490. public void SetN2PurgeFOUPO2CheckSV(float value)
  491. {
  492. if (TrigN2PurgeFOUPO2CheckSV != null)
  493. TrigN2PurgeFOUPO2CheckSV?.SetAOTrigger(value, out _);
  494. }
  495. public bool FIMSLoadCheckLAO2(out string reason)
  496. {
  497. var scLAO2 = (float)SC.GetValue<double>("PM1.N2Purge.N2PurgeLAO2CheckSV");
  498. reason = $"LA O2 concentration has not reached below {scLAO2}ppm";
  499. if (SensorO2DetectSideLA == null || !SensorO2DetectSideLA.Value)
  500. {
  501. reason = $"Oxygen analyzer not switched to LA";
  502. return false;
  503. }
  504. return ((int)(ConcentrationO2.Value)) < scLAO2;
  505. }
  506. public void SetAVParameter(ModuleName fims, bool isEable)
  507. {
  508. if (fims == ModuleName.FIMS1)
  509. {
  510. var avValve58 = DEVICE.GetDevice<IoValve>($"{ModuleName.PM1}.ValveAV58");
  511. avValve58?.TurnValve(isEable, out _);
  512. }
  513. if (fims == ModuleName.FIMS2)
  514. {
  515. var avValve59 = DEVICE.GetDevice<IoValve>($"{ModuleName.PM1}.ValveAV59");
  516. avValve59?.TurnValve(isEable, out _);
  517. }
  518. }
  519. /// <summary>
  520. /// N2Purge相关时间参数,电气要求设定为秒,实际下发按照毫秒
  521. /// </summary>
  522. public void SetN2PurgeParameters()
  523. {
  524. if (SC.ContainsItem("PM1.N2Purge.TransferRoomArrivalWaitTime") && TrigN2PurgeLAO2CheckTime != null)
  525. {
  526. var time = (float)SC.GetValue<double>("PM1.N2Purge.TransferRoomArrivalWaitTime");
  527. TrigN2PurgeLAO2CheckTime.SetAOTrigger(time, out _);
  528. }
  529. if (SC.ContainsItem("PM1.N2Purge.TransferRoomStableWaitTime") && TrigN2PurgeLAO2OverTime != null)
  530. {
  531. var time = (float)SC.GetValue<double>("PM1.N2Purge.TransferRoomStableWaitTime");
  532. TrigN2PurgeLAO2OverTime.SetAOTrigger(time, out _);
  533. }
  534. if (SC.ContainsItem("PM1.N2Purge.FOUPOpenerArrivalWaitTime") && TrigN2PurgeFOUPO2CheckTime != null)
  535. {
  536. var time = (float)SC.GetValue<double>("PM1.N2Purge.FOUPOpenerArrivalWaitTime");
  537. TrigN2PurgeFOUPO2CheckTime.SetAOTrigger(time, out _);
  538. }
  539. if (SC.ContainsItem("PM1.N2Purge.FOUPOpenerStableWaitTime") && TrigN2PurgeFOUPO2OverTime != null)
  540. {
  541. var time = (float)SC.GetValue<double>("PM1.N2Purge.FOUPOpenerStableWaitTime");
  542. TrigN2PurgeFOUPO2OverTime.SetAOTrigger(time, out _);
  543. }
  544. if (SC.ContainsItem("PM1.N2Purge.O2DetectorTransferRoomToFOUPTime") && TrigN2PurgeExchangeLATOFOUPWaitTime != null)
  545. {
  546. var time = (float)SC.GetValue<double>("PM1.N2Purge.O2DetectorTransferRoomToFOUPTime");
  547. TrigN2PurgeExchangeLATOFOUPWaitTime.SetAOTrigger(time, out _);
  548. }
  549. if (SC.ContainsItem("PM1.N2Purge.O2DetectorFOUPToTransferRoomTime") && TrigN2PurgeExchangeFOUPTOLAWaitTime != null)
  550. {
  551. var time = (float)SC.GetValue<double>("PM1.N2Purge.O2DetectorFOUPToTransferRoomTime");
  552. TrigN2PurgeExchangeFOUPTOLAWaitTime.SetAOTrigger(time, out _);
  553. }
  554. if (SC.ContainsItem("PM1.N2Purge.O2DetectorFOUPToFOUPTime") && TrigN2PurgeExchangeFOUPTOFOUPWaitTime != null)
  555. {
  556. var time = (float)SC.GetValue<double>("PM1.N2Purge.O2DetectorFOUPToFOUPTime");
  557. TrigN2PurgeExchangeFOUPTOFOUPWaitTime.SetAOTrigger(time, out _);
  558. }
  559. SetN2PurgeLAO2CheckSV((float)SC.GetValue<double>("PM1.N2Purge.N2PurgeLAO2CheckSV"));
  560. SetN2PurgeFOUPO2CheckSV((float)SC.GetValue<double>("PM1.N2Purge.N2PurgeFOUPO2CheckSV"));
  561. }
  562. public void InitN2PurgeMode(string n2PurgeModeStr, bool isN2Purge)
  563. {
  564. if (!isN2Purge)
  565. return;
  566. if (SC.ContainsItem("PM1.RecipeRelevancyN2Purge") && SC.GetValue<bool>("PM1.RecipeRelevancyN2Purge") && SC.ContainsItem("PM1.SelectN2PurgeMode"))
  567. {
  568. var setValue = GetN2PurgeModeEnumByStr(n2PurgeModeStr);
  569. SC.SetItemValueFromString("PM1.SelectN2PurgeMode", setValue);
  570. RestAllN2PrugeRD();
  571. }
  572. }
  573. }
  574. }