PMN2Purge.cs 18 KB

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  1. using Aitex.Core.RT.DataCenter;
  2. using Aitex.Core.RT.Device;
  3. using Aitex.Core.RT.Device.Unit;
  4. using Aitex.Core.RT.Log;
  5. using Aitex.Core.RT.SCCore;
  6. using Aitex.Core.Util;
  7. using DocumentFormat.OpenXml.Packaging;
  8. using FurnaceRT.Devices;
  9. using FurnaceRT.Equipments.PMs.Devices;
  10. using FurnaceRT.Extraction;
  11. using MECF.Framework.Common.CommonData.SorterDefines;
  12. using MECF.Framework.Common.Equipment;
  13. using System;
  14. using System.Collections.Generic;
  15. using System.Diagnostics;
  16. namespace FurnaceRT.Equipments.PMs
  17. {
  18. /// <summary>
  19. /// 分布类 定义N2Purge的执行逻辑
  20. /// </summary>
  21. public partial class PMModule
  22. {
  23. private R_TRIG _trigN2UpRD = new R_TRIG();
  24. private R_TRIG _trigN2DownRD = new R_TRIG();
  25. private R_TRIG _trigN2AirUpRD = new R_TRIG();
  26. private R_TRIG _trigN2AirDownRD = new R_TRIG();
  27. private R_TRIG _trigN2AirDownTwoRD = new R_TRIG();
  28. private R_TRIG _trigSelectN2PurgeModeD = new R_TRIG();
  29. private Dictionary<string, Tuple<R_TRIG, List<Tuple<IDevice, string>>>> _n2PurgeSequenceAction;
  30. private Dictionary<string, Func<bool>> _n2PurgeSequenceStatus;
  31. private Dictionary<string, R_TRIG> _rTrigDict;
  32. private N2PurgeModeEnum _N2PurgeMode = N2PurgeModeEnum.Auto;
  33. private double _n2PurgeData = 20;
  34. private double _n2ToAirData = 185000;
  35. private double _manualPhase2StabilityTime = 0;
  36. private double _manualPhase4StabilityTime = 0;
  37. private bool _manualPhase2NeedCheck = true;
  38. private bool _manualPhase4NeedCheck = true;
  39. private Dictionary<string, Stopwatch> _allTimeDict = new Dictionary<string, Stopwatch>();
  40. private void InitN2PurgeData()
  41. {
  42. DATA.Subscribe($"{Module}.O2DensityData", () => GetO2DensityData(), SubscriptionAttribute.FLAG.IgnoreSaveDB);
  43. DATA.Subscribe($"{Module}.CheckO2Location", () => GetCheckO2Location(), SubscriptionAttribute.FLAG.IgnoreSaveDB);
  44. DATA.Subscribe($"{Module}.O2SetCheckSetPoint", () => GetO2SetCheckSetPoint(), SubscriptionAttribute.FLAG.IgnoreSaveDB);
  45. DATA.Subscribe($"{Module}.N2PurgeMode", () => SC.ContainsItem("PM1.SelectN2PurgeMode") ? SC.GetStringValue("PM1.SelectN2PurgeMode") : "");
  46. }
  47. private void InitN2PurgeConfigData()
  48. {
  49. _n2PurgeData = SC.ContainsItem($"System.N2PurgeData") ? SC.GetValue<double>("System.N2PurgeData") : 20;
  50. _n2ToAirData = SC.ContainsItem($"System.N2PurgeData") ? SC.GetValue<double>("System.N2ToAirData") : 185000;
  51. _manualPhase2StabilityTime = SC.ContainsItem($"PM1.N2Purge.Manual_phase2.StabilityTime") ? SC.GetValue<double>("PM1.N2Purge.Manual_phase2.StabilityTime") : 0;
  52. _manualPhase2NeedCheck = _manualPhase2StabilityTime > 0;
  53. _manualPhase4StabilityTime = SC.ContainsItem($"PM1.N2Purge.Manual_phase4.StabilityTime") ? SC.GetValue<double>("PM1.N2Purge.Manual_phase4.StabilityTime") : 0;
  54. _manualPhase4NeedCheck = _manualPhase4StabilityTime > 0;
  55. _n2PurgeSequenceAction = ExtractionMethods.GetN2PurgeSequenceAction();
  56. _n2PurgeSequenceStatus = new Dictionary<string, Func<bool>>()
  57. {
  58. {"N2PurgeAIRTo20PPM",()=> GetN2PurgeAIRTo20PPMStatus()},
  59. {"N2PurgeUnder20PPM",()=> GetN2PurgeUnder20PPMStatus()},
  60. {"AIR",()=> GetN2PurgeAIRStatus()},
  61. {"DoorOpen",()=> GetN2PurgeDoorOpenStatus()},
  62. {"Foup1",()=> GetN2PurgeFoup1Status()},
  63. {"Foup2",()=> GetN2PurgeFoup2Status()},
  64. {N2PurgeModeEnum.Manual_phase1.ToString(),()=> GetN2PurgePhase1() },
  65. {N2PurgeModeEnum.Manual_phase2.ToString(),()=> GetN2PurgePhase2()},
  66. {N2PurgeModeEnum.Manual_phase3.ToString(),()=> GetN2PurgePhase3() },
  67. {N2PurgeModeEnum.Manual_phase4.ToString(),()=> GetN2PurgePhase4() },
  68. {N2PurgeModeEnum.Manual_phase5.ToString(),()=> GetN2PurgePhase5() },
  69. };
  70. _allTimeDict = new Dictionary<string, Stopwatch>()
  71. {
  72. {N2PurgeModeEnum.Manual_phase1.ToString(),new Stopwatch() },
  73. {N2PurgeModeEnum.Manual_phase2.ToString(),new Stopwatch()},
  74. {N2PurgeModeEnum.Manual_phase3.ToString(),new Stopwatch()},
  75. {N2PurgeModeEnum.Manual_phase4.ToString(),new Stopwatch() },
  76. {N2PurgeModeEnum.Manual_phase5.ToString(),new Stopwatch() }
  77. };
  78. _rTrigDict = new Dictionary<string, R_TRIG>();
  79. }
  80. private void MonitorN2Purge()
  81. {
  82. var selectN2PurgeMode = SC.ContainsItem("PM1.SelectN2PurgeMode") ? SC.GetStringValue("PM1.SelectN2PurgeMode") : "";
  83. if (string.IsNullOrEmpty(selectN2PurgeMode))
  84. {
  85. return;
  86. }
  87. SetN2PurgeModeAction(selectN2PurgeMode);
  88. }
  89. private void SetN2PurgeModeAction(string selectN2PurgeMode)
  90. {
  91. _N2PurgeMode = (N2PurgeModeEnum)Enum.Parse(typeof(N2PurgeModeEnum), selectN2PurgeMode);
  92. switch (_N2PurgeMode)
  93. {
  94. case N2PurgeModeEnum.Auto:
  95. // 自动模式下的操作
  96. break;
  97. case N2PurgeModeEnum.ManualMode:
  98. break;
  99. case N2PurgeModeEnum.N2PurgeMode:
  100. ProcessPhase(_trigN2UpRD, N2PurgeModeEnum.Manual_phase1.ToString());
  101. ProcessPhase(_trigN2DownRD, N2PurgeModeEnum.Manual_phase2.ToString(), _manualPhase2NeedCheck, (int)(_manualPhase2StabilityTime * 1000));
  102. break;
  103. case N2PurgeModeEnum.ATMMode:
  104. ProcessPhase(_trigN2AirDownRD, N2PurgeModeEnum.Manual_phase3.ToString());
  105. ProcessPhase(_trigN2AirUpRD, N2PurgeModeEnum.Manual_phase4.ToString(), _manualPhase4NeedCheck, (int)(_manualPhase4StabilityTime * 1000));
  106. ProcessPhase(_trigN2AirDownTwoRD, N2PurgeModeEnum.Manual_phase5.ToString());
  107. break;
  108. }
  109. }
  110. bool CheckConditionInTime(string modeKey, int millisecondsTimeout, Func<bool> condition)
  111. {
  112. var stopwatch = _allTimeDict[modeKey];
  113. if (!_allTimeDict[modeKey].IsRunning)
  114. {
  115. _allTimeDict[modeKey].Restart();
  116. }
  117. while (stopwatch.ElapsedMilliseconds < millisecondsTimeout)
  118. {
  119. if (!condition())
  120. {
  121. _allTimeDict[modeKey].Stop();
  122. _allTimeDict[modeKey].Reset();
  123. return false;
  124. }
  125. }
  126. if (stopwatch.ElapsedMilliseconds > millisecondsTimeout)
  127. {
  128. _allTimeDict[modeKey].Stop();
  129. _allTimeDict[modeKey].Reset();
  130. }
  131. return true;
  132. }
  133. private void ProcessPhase(R_TRIG r_TRIG, string modeKey, bool needCheck = false, int time = 0)
  134. {
  135. r_TRIG.CLK = needCheck ? (CheckConditionInTime(modeKey, time, () => _n2PurgeSequenceStatus[modeKey].Invoke())) : _n2PurgeSequenceStatus[modeKey].Invoke();
  136. if (r_TRIG.Q)
  137. {
  138. LOG.Info($"N2PurgeMode Trigger {modeKey}!,O2:{GetO2Density()},time:{_allTimeDict[modeKey].ElapsedMilliseconds}");
  139. SetN2PurgeValveData(modeKey);
  140. _allTimeDict[modeKey].Stop();
  141. _allTimeDict[modeKey].Reset();
  142. }
  143. }
  144. public void RestAllN2PrugeRD()
  145. {
  146. _trigN2AirDownRD.RST = false;
  147. _trigN2AirUpRD.RST = false;
  148. _trigN2DownRD.RST = false;
  149. _trigN2UpRD.RST = false;
  150. foreach (var item in _allTimeDict)
  151. {
  152. item.Value.Stop();
  153. item.Value.Reset();
  154. }
  155. }
  156. private void SetN2PurgeValveData(string mode)
  157. {
  158. var value = _n2PurgeSequenceAction[mode];
  159. foreach (var operateItem in value.Item2)
  160. {
  161. if (operateItem.Item1 is IoMFC)
  162. {
  163. var ioMFc = (operateItem.Item1 as IoMFC);
  164. { ioMFc.SetMfcValue(out _, 0, new object[] { float.Parse(operateItem.Item2.ToString()) }); }
  165. }
  166. if (operateItem.Item1 is IoValve)
  167. {
  168. var ioValve = (operateItem.Item1 as IoValve);
  169. ioValve.TurnValve(bool.Parse(operateItem.Item2), out _);
  170. }
  171. if (operateItem.Item1 is IoTrigger)
  172. {
  173. var ioTrigger = (operateItem.Item1 as IoTrigger);
  174. ioTrigger.CheckAndSet(bool.Parse(operateItem.Item2), out _);
  175. }
  176. }
  177. }
  178. private bool SetN2PurgeMode(out string reason, int time, object[] param)
  179. {
  180. reason = string.Empty;
  181. var mode = param[0].ToString();
  182. _N2PurgeMode = (N2PurgeModeEnum)Enum.Parse(typeof(N2PurgeModeEnum), mode);
  183. if (SC.ContainsItem("PM1.SelectN2PurgeMode"))
  184. {
  185. SC.SetItemValue("PM1.SelectN2PurgeMode", mode);
  186. }
  187. RestAllN2PrugeRD();
  188. return true;
  189. }
  190. /// <summary>
  191. /// 获取当前O2检测位置的设定值
  192. /// </summary>
  193. /// <returns></returns>
  194. private string GetO2SetCheckSetPoint()
  195. {
  196. if (SensorO2DetectSideLA != null && SensorO2DetectSideLA.Value)
  197. {
  198. var key = "PM1.N2Purge.N2PurgeLAO2CheckSV";
  199. if (SC.ContainsItem(key))
  200. return SC.GetValue<double>(key).ToString("f3");
  201. }
  202. if ((SensorO2DetectSideFIMS1 != null && SensorO2DetectSideFIMS1.Value) || (SensorO2DetectSideFIMS2 != null && SensorO2DetectSideFIMS2.Value))
  203. {
  204. var key = "PM1.N2Purge.N2PurgeFOUPO2CheckSV";
  205. if (SC.ContainsItem(key))
  206. return SC.GetValue<double>(key).ToString("f3");
  207. }
  208. return "";
  209. }
  210. /// <summary>
  211. /// 获取当前O2检测位置
  212. /// </summary>
  213. /// <returns></returns>
  214. private string GetCheckO2Location()
  215. {
  216. if (SensorO2DetectSideLA != null && SensorO2DetectSideLA.Value)
  217. return SensorO2DetectSideLA.Display;
  218. if (SensorO2DetectSideFIMS1 != null && SensorO2DetectSideFIMS1.Value)
  219. return SensorO2DetectSideFIMS1.Display;
  220. if (SensorO2DetectSideFIMS2 != null && SensorO2DetectSideFIMS2.Value)
  221. return SensorO2DetectSideFIMS2.Display;
  222. return "";
  223. }
  224. /// <summary>
  225. /// 获取当前O2浓度
  226. /// </summary>
  227. /// <returns></returns>
  228. private string GetO2DensityData()
  229. {
  230. var result = "";
  231. result = ConcentrationO2.FeedBack.ToString("f3");
  232. return result;
  233. }
  234. private double GetO2Density()
  235. {
  236. return ConcentrationO2.FeedBack;
  237. }
  238. private bool GetN2PurgePhase1()
  239. {
  240. return (GetO2Density() >= _n2PurgeData) && GetLADoorOpenStatus();
  241. }
  242. private bool GetN2PurgePhase2()
  243. {
  244. return (GetO2Density() < _n2PurgeData) && GetLADoorOpenStatus();
  245. }
  246. private bool GetN2PurgePhase3()
  247. {
  248. return GetO2Density() < _n2ToAirData && GetLADoorOpenStatus();
  249. }
  250. private bool GetN2PurgePhase5()
  251. {
  252. return GetO2Density() >= _n2ToAirData && !GetLADoorOpenStatus();
  253. }
  254. private bool GetN2PurgePhase4()
  255. {
  256. return GetO2Density() >= _n2ToAirData && GetLADoorOpenStatus();
  257. }
  258. private bool GetN2PurgeAIRTo20PPMStatus()
  259. {
  260. return ValveAV202.DOOpen.Value;
  261. }
  262. private bool GetN2PurgeUnder20PPMStatus(double value = 20)
  263. {
  264. return ConcentrationO2.Value < value;
  265. }
  266. private bool GetN2PurgeAIRStatus()
  267. {
  268. return ValveAV202.DOClose.Value && (AlarmSignalFilterBox1DoorSwitch != null ? !AlarmSignalFilterBox1DoorSwitch.Value : false);
  269. }
  270. private bool GetLADoorOpenStatus()
  271. {
  272. return (bool)(SensorLADoorSw1?.Value);
  273. }
  274. private bool GetN2PurgeDoorOpenStatus()
  275. {
  276. return ValveAV202.DOClose.Value && (AlarmSignalFilterBox1DoorSwitch != null ? !AlarmSignalFilterBox1DoorSwitch.Value : false);
  277. }
  278. private bool GetN2PurgeFoup1Status()
  279. {
  280. return GetN2PurgeAIRTo20PPMStatus() && GetN2PurgeUnder20PPMStatus() && FIMS1.IsFoupExist && FIMS1.CollisionAvoidanceUpDownStatus == DeviceStatus.Down;
  281. }
  282. private bool GetN2PurgeFoup2Status()
  283. {
  284. return GetN2PurgeAIRTo20PPMStatus() && GetN2PurgeUnder20PPMStatus() && FIMS2.IsFoupExist && FIMS2.CollisionAvoidanceUpDownStatus == DeviceStatus.Down; ;
  285. }
  286. public void SetN2PurgeLAO2CheckFirstEnable(bool isEable)
  287. {
  288. if (TrigN2PurgeLAO2CheckFirstEnable != null && TrigN2PurgeLAO2CheckFirstEnable.Value != isEable)
  289. {
  290. TrigN2PurgeLAO2CheckFirstEnable.SetTrigger(isEable, out _);
  291. }
  292. }
  293. public void SetN2PurgeFIMS1O2CheckEnable(ModuleName fims, bool isEable)
  294. {
  295. if (fims == ModuleName.FIMS1 && TrigN2PurgeFIMS1O2CheckEnable != null && TrigN2PurgeFIMS1O2CheckEnable.Value != isEable)
  296. {
  297. TrigN2PurgeFIMS1O2CheckEnable.SetTrigger(isEable, out _);
  298. }
  299. if (fims == ModuleName.FIMS2 && TrigN2PurgeFIMS2O2CheckEnable != null && TrigN2PurgeFIMS2O2CheckEnable.Value != isEable)
  300. {
  301. TrigN2PurgeFIMS2O2CheckEnable.SetTrigger(isEable, out _);
  302. }
  303. }
  304. public void SetN2PurgeProcess(bool isEable)
  305. {
  306. if (TrigN2PurgeProcess != null && TrigN2PurgeProcess.Value != isEable)
  307. {
  308. TrigN2PurgeProcess.SetTrigger(isEable, out _);
  309. }
  310. }
  311. public void SetN2PurgeLAO2CheckSV(float value)
  312. {
  313. if (TrigN2PurgeLAO2CheckSV != null)
  314. TrigN2PurgeLAO2CheckSV?.SetAOTrigger(value, out _);
  315. }
  316. public void SetN2PurgeFOUPO2CheckSV(float value)
  317. {
  318. if (TrigN2PurgeFOUPO2CheckSV != null)
  319. TrigN2PurgeFOUPO2CheckSV?.SetAOTrigger(value, out _);
  320. }
  321. public void SetAVParameter(ModuleName fims, bool isEable)
  322. {
  323. if (fims == ModuleName.FIMS1)
  324. {
  325. var avValve58 = DEVICE.GetDevice<IoValve>($"{ModuleName.PM1}.ValveAV58");
  326. avValve58?.TurnValve(isEable, out _);
  327. }
  328. if (fims == ModuleName.FIMS2)
  329. {
  330. var avValve59 = DEVICE.GetDevice<IoValve>($"{ModuleName.PM1}.ValveAV59");
  331. avValve59?.TurnValve(isEable, out _);
  332. }
  333. }
  334. /// <summary>
  335. /// N2Purge相关时间参数,电气要求设定为秒,实际下发按照毫秒
  336. /// </summary>
  337. public void SetN2PurgeParameters()
  338. {
  339. if (SC.ContainsItem("PM1.N2Purge.TransferRoomArrivalWaitTime") && TrigN2PurgeLAO2CheckTime != null)
  340. {
  341. var time = (float)SC.GetValue<double>("PM1.N2Purge.TransferRoomArrivalWaitTime") * 1000;
  342. TrigN2PurgeLAO2CheckTime.SetAOTrigger(time, out _);
  343. }
  344. if (SC.ContainsItem("PM1.N2Purge.TransferRoomStableWaitTime") && TrigN2PurgeLAO2OverTime != null)
  345. {
  346. var time = (float)SC.GetValue<double>("PM1.N2Purge.TransferRoomStableWaitTime") * 1000;
  347. TrigN2PurgeLAO2OverTime.SetAOTrigger(time, out _);
  348. }
  349. if (SC.ContainsItem("PM1.N2Purge.FOUPOpenerArrivalWaitTime") && TrigN2PurgeFOUPO2CheckTime != null)
  350. {
  351. var time = (float)SC.GetValue<double>("PM1.N2Purge.FOUPOpenerArrivalWaitTime") * 1000;
  352. TrigN2PurgeFOUPO2CheckTime.SetAOTrigger(time, out _);
  353. }
  354. if (SC.ContainsItem("PM1.N2Purge.FOUPOpenerStableWaitTime") && TrigN2PurgeFOUPO2OverTime != null)
  355. {
  356. var time = (float)SC.GetValue<double>("PM1.N2Purge.FOUPOpenerStableWaitTime") * 1000;
  357. TrigN2PurgeFOUPO2OverTime.SetAOTrigger(time, out _);
  358. }
  359. if (SC.ContainsItem("PM1.N2Purge.O2DetectorTransferRoomToFOUPTime") && TrigN2PurgeExchangeLATOFOUPWaitTime != null)
  360. {
  361. var time = (float)SC.GetValue<double>("PM1.N2Purge.O2DetectorTransferRoomToFOUPTime") * 1000;
  362. TrigN2PurgeExchangeLATOFOUPWaitTime.SetAOTrigger(time, out _);
  363. }
  364. if (SC.ContainsItem("PM1.N2Purge.O2DetectorFOUPToTransferRoomTime") && TrigN2PurgeExchangeFOUPTOLAWaitTime != null)
  365. {
  366. var time = (float)SC.GetValue<double>("PM1.N2Purge.O2DetectorFOUPToTransferRoomTime") * 1000;
  367. TrigN2PurgeExchangeFOUPTOLAWaitTime.SetAOTrigger(time, out _);
  368. }
  369. if (SC.ContainsItem("PM1.N2Purge.O2DetectorFOUPToFOUPTime") && TrigN2PurgeExchangeFOUPTOFOUPWaitTime != null)
  370. {
  371. var time = (float)SC.GetValue<double>("PM1.N2Purge.O2DetectorFOUPToFOUPTime") * 1000;
  372. TrigN2PurgeExchangeFOUPTOFOUPWaitTime.SetAOTrigger(time, out _);
  373. }
  374. }
  375. public void InitN2PurgeMode(string n2PurgeModeStr, bool isN2Purge)
  376. {
  377. if (SC.ContainsItem("PM1.RecipeRelevancyN2Purge") && SC.GetValue<bool>("PM1.RecipeRelevancyN2Purge") && SC.ContainsItem("PM1.SelectN2PurgeMode"))
  378. {
  379. if (!isN2Purge)
  380. {
  381. SC.SetItemValueFromString("PM1.SelectN2PurgeMode", N2PurgeModeEnum.ManualMode.ToString());
  382. }
  383. else
  384. {
  385. var setValue = GetN2PurgeModeEnumByStr(n2PurgeModeStr);
  386. SC.SetItemValueFromString("PM1.SelectN2PurgeMode", setValue);
  387. }
  388. RestAllN2PrugeRD();
  389. }
  390. }
  391. }
  392. }