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- using Aitex.Core.RT.Event;
- using Aitex.Core.RT.Routine;
- using Aitex.Core.RT.SCCore;
- using Aitex.Core.Util;
- using FurnaceRT.Equipments.PMs;
- using FurnaceRT.Equipments.Systems;
- using MECF.Framework.Common.Equipment;
- using MECF.Framework.Common.SubstrateTrackings;
- using System;
- namespace FurnaceRT.Equipments.FIMSs
- {
- public class FIMSUnloadRoutine : ModuleRoutine, IRoutine
- {
- enum RoutineStep
- {
- Unload,
- Delay,
- CheckUnloadFinish,
- }
- private int _timeout;
- private FIMSModule _fimsModule;
- private PMModule _pmModule;
- private bool _isNeedN2Purge;
- public FIMSUnloadRoutine(FIMSModule fimsModule)
- {
- Module = fimsModule.Module.ToString();
- _fimsModule = fimsModule;
- Name = "Unload";
- _pmModule = Singleton<EquipmentManager>.Instance.Modules[ModuleName.PM1] as PMModule;
- }
- public Result Init(bool isNeedN2Purge)
- {
- _isNeedN2Purge = isNeedN2Purge;
- return Result.DONE;
- }
- public Result Start(params object[] objs)
- {
- Reset();
- _timeout = SC.GetValue<int>($"FIMS.{Module}.MotionTimeout");
- if (_fimsModule.FIMSDevice.IsUnloadCompleted)
- {
- EV.PostInfoLog(Module, $"{Module} already at unload position");
- _fimsModule.FIMSDevice.IsLoadCompleted = false;
- _fimsModule.FIMSDevice.IsUnloadCompleted = true;
- return Result.DONE;
- }
- if (!Singleton<EquipmentManager>.Instance.IsAutoMode && !Singleton<EquipmentManager>.Instance.IsReturnWafer)
- {
- if (!_fimsModule.SensorWaferRobotEX1AxisHomePosition.Value)
- {
- _fimsModule.UnloadFailAlarm.Set($"wafer robot EX1 axis not at home position");
- return Result.FAIL;
- }
- if (!_fimsModule.SensorWaferRobotEX2AxisHomePosition.Value)
- {
- _fimsModule.UnloadFailAlarm.Set($"wafer robot EX2 axis not at home position");
- return Result.FAIL;
- }
- }
-
- //if (_fimsModule.FIMSDevice.DoorOpenCloseStatus == Devices.DeviceStatus.Open && _fimsModule.IsWaferOnRobot)
- //{
- // _fimsModule.UnloadFailAlarm.Set($"wafer robot inside {Module}");
- // return Result.FAIL;
- //}
- Notify($"{_fimsModule.Name} {Name} start");
- _fimsModule.FIMSDevice.IsLoadCompleted = false;
- _fimsModule.FIMSDevice.IsUnloadCompleted = false;
- if (SC.ContainsItem("PM1.N2Purge.FOUPOpenerStableWaitTime"))
- {
- _timeout = (int)SC.GetValue<double>("PM1.N2Purge.FOUPOpenerStableWaitTime");
- }
- if (_fimsModule.FIMSDevice.DoorOpenCloseStatus == Devices.DeviceStatus.Close && _fimsModule.IsWaferOnRobot)
- {
- _fimsModule.UnloadFailAlarm.Set($"The wafer on {Module} has shifted");
- return Result.FAIL;
- }
- if (_isNeedN2Purge)
- _pmModule?.SetN2PurgeParameters();
- _pmModule?.SetN2PurgeFIMS1O2CheckEnable(ModuleHelper.Converter(Module), _isNeedN2Purge);
- return Result.RUN;
- }
- public override Result Monitor()
- {
- try
- {
- PauseRountine(_fimsModule.FIMSDevice.IsPause);
- if (_fimsModule.FIMSDevice.IsPause)
- return Result.RUN;
- Unload((int)RoutineStep.Unload, _timeout);
- Delay((int)RoutineStep.Delay, 3);
- CheckUnloadFinish((int)RoutineStep.CheckUnloadFinish, _timeout);
- }
- catch (RoutineBreakException)
- {
- return Result.RUN;
- }
- catch (RoutineFaildException)
- {
- _pmModule?.SetN2PurgeFIMS1O2CheckEnable(ModuleHelper.Converter(Module), false);
- _fimsModule.Stop();
- return Result.FAIL;
- }
- _pmModule?.SetN2PurgeFIMS1O2CheckEnable(ModuleHelper.Converter(Module), false);
- _fimsModule.FIMSDevice.IsUnloadCompleted = true;
- _fimsModule.Stop();
- Notify($"{_fimsModule.Name} {Name} finished");
- return Result.DONE;
- }
- public void Abort()
- {
- _fimsModule.Stop();
- }
- private void Unload(int id, int timeout)
- {
- Tuple<bool, Result> ret = ExecuteAndWait(id, () =>
- {
- Notify($"{Module} unload");
- if (!_fimsModule.FIMSDevice.Unload(out string reason))
- {
- Stop(reason);
- return false;
- }
- return true;
- }, () =>
- {
- return true;
- }, timeout * 1000);
- if (ret.Item1)
- {
- if (ret.Item2 == Result.FAIL)
- {
- throw (new RoutineFaildException());
- }
- else if (ret.Item2 == Result.TIMEOUT) //timeout
- {
- _fimsModule.UnloadTimeoutAlarm.Set($"can not complete in {timeout} seconds");
- throw (new RoutineFaildException());
- }
- else
- throw (new RoutineBreakException());
- }
- }
- private void CheckUnloadFinish(int id, int timeout)
- {
- Tuple<bool, Result> ret = ExecuteAndWait(id, () =>
- {
- Notify($"Check {Module} unload finish");
- return true;
- }, () =>
- {
- return _fimsModule.FIMSDevice.IsPLCUnloadCompleted && !_fimsModule.FIMSDevice.IsRunning;
- }, timeout * 1000);
- if (ret.Item1)
- {
- if (ret.Item2 == Result.FAIL)
- {
- throw (new RoutineFaildException());
- }
- else if (ret.Item2 == Result.TIMEOUT) //timeout
- {
- _fimsModule.UnloadTimeoutAlarm.Set($"can not complete in {timeout} seconds");
- throw (new RoutineFaildException());
- }
- else
- throw (new RoutineBreakException());
- }
- }
- }
- }
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