FIMSUnloadRoutine.cs 6.5 KB

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  1. using Aitex.Core.RT.Event;
  2. using Aitex.Core.RT.Routine;
  3. using Aitex.Core.RT.SCCore;
  4. using Aitex.Core.Util;
  5. using FurnaceRT.Equipments.PMs;
  6. using FurnaceRT.Equipments.Systems;
  7. using MECF.Framework.Common.Equipment;
  8. using MECF.Framework.Common.SubstrateTrackings;
  9. using System;
  10. namespace FurnaceRT.Equipments.FIMSs
  11. {
  12. public class FIMSUnloadRoutine : ModuleRoutine, IRoutine
  13. {
  14. enum RoutineStep
  15. {
  16. Unload,
  17. Delay,
  18. CheckUnloadFinish,
  19. }
  20. private int _timeout;
  21. private FIMSModule _fimsModule;
  22. private PMModule _pmModule;
  23. private bool _isNeedN2Purge;
  24. public FIMSUnloadRoutine(FIMSModule fimsModule)
  25. {
  26. Module = fimsModule.Module.ToString();
  27. _fimsModule = fimsModule;
  28. Name = "Unload";
  29. _pmModule = Singleton<EquipmentManager>.Instance.Modules[ModuleName.PM1] as PMModule;
  30. }
  31. public Result Init(bool isNeedN2Purge)
  32. {
  33. _isNeedN2Purge = isNeedN2Purge;
  34. return Result.DONE;
  35. }
  36. public Result Start(params object[] objs)
  37. {
  38. Reset();
  39. _timeout = SC.GetValue<int>($"FIMS.{Module}.MotionTimeout");
  40. if (_fimsModule.FIMSDevice.IsUnloadCompleted)
  41. {
  42. EV.PostInfoLog(Module, $"{Module} already at unload position");
  43. _fimsModule.FIMSDevice.IsLoadCompleted = false;
  44. _fimsModule.FIMSDevice.IsUnloadCompleted = true;
  45. return Result.DONE;
  46. }
  47. if (!Singleton<EquipmentManager>.Instance.IsAutoMode && !Singleton<EquipmentManager>.Instance.IsReturnWafer)
  48. {
  49. if (!_fimsModule.SensorWaferRobotEX1AxisHomePosition.Value)
  50. {
  51. _fimsModule.UnloadFailAlarm.Set($"wafer robot EX1 axis not at home position");
  52. return Result.FAIL;
  53. }
  54. if (!_fimsModule.SensorWaferRobotEX2AxisHomePosition.Value)
  55. {
  56. _fimsModule.UnloadFailAlarm.Set($"wafer robot EX2 axis not at home position");
  57. return Result.FAIL;
  58. }
  59. }
  60. //if (_fimsModule.FIMSDevice.DoorOpenCloseStatus == Devices.DeviceStatus.Open && _fimsModule.IsWaferOnRobot)
  61. //{
  62. // _fimsModule.UnloadFailAlarm.Set($"wafer robot inside {Module}");
  63. // return Result.FAIL;
  64. //}
  65. Notify($"{_fimsModule.Name} {Name} start");
  66. _fimsModule.FIMSDevice.IsLoadCompleted = false;
  67. _fimsModule.FIMSDevice.IsUnloadCompleted = false;
  68. if (SC.ContainsItem("PM1.N2Purge.FOUPOpenerStableWaitTime"))
  69. {
  70. _timeout = (int)SC.GetValue<double>("PM1.N2Purge.FOUPOpenerStableWaitTime");
  71. }
  72. if (_fimsModule.FIMSDevice.DoorOpenCloseStatus == Devices.DeviceStatus.Close && _fimsModule.IsWaferOnRobot)
  73. {
  74. _fimsModule.UnloadFailAlarm.Set($"The wafer on {Module} has shifted");
  75. return Result.FAIL;
  76. }
  77. if (_isNeedN2Purge)
  78. _pmModule?.SetN2PurgeParameters();
  79. _pmModule?.SetN2PurgeFIMS1O2CheckEnable(ModuleHelper.Converter(Module), _isNeedN2Purge);
  80. return Result.RUN;
  81. }
  82. public override Result Monitor()
  83. {
  84. try
  85. {
  86. PauseRountine(_fimsModule.FIMSDevice.IsPause);
  87. if (_fimsModule.FIMSDevice.IsPause)
  88. return Result.RUN;
  89. Unload((int)RoutineStep.Unload, _timeout);
  90. Delay((int)RoutineStep.Delay, 3);
  91. CheckUnloadFinish((int)RoutineStep.CheckUnloadFinish, _timeout);
  92. }
  93. catch (RoutineBreakException)
  94. {
  95. return Result.RUN;
  96. }
  97. catch (RoutineFaildException)
  98. {
  99. _pmModule?.SetN2PurgeFIMS1O2CheckEnable(ModuleHelper.Converter(Module), false);
  100. _fimsModule.Stop();
  101. return Result.FAIL;
  102. }
  103. _pmModule?.SetN2PurgeFIMS1O2CheckEnable(ModuleHelper.Converter(Module), false);
  104. _fimsModule.FIMSDevice.IsUnloadCompleted = true;
  105. _fimsModule.Stop();
  106. Notify($"{_fimsModule.Name} {Name} finished");
  107. return Result.DONE;
  108. }
  109. public void Abort()
  110. {
  111. _fimsModule.Stop();
  112. }
  113. private void Unload(int id, int timeout)
  114. {
  115. Tuple<bool, Result> ret = ExecuteAndWait(id, () =>
  116. {
  117. Notify($"{Module} unload");
  118. if (!_fimsModule.FIMSDevice.Unload(out string reason))
  119. {
  120. Stop(reason);
  121. return false;
  122. }
  123. return true;
  124. }, () =>
  125. {
  126. return true;
  127. }, timeout * 1000);
  128. if (ret.Item1)
  129. {
  130. if (ret.Item2 == Result.FAIL)
  131. {
  132. throw (new RoutineFaildException());
  133. }
  134. else if (ret.Item2 == Result.TIMEOUT) //timeout
  135. {
  136. _fimsModule.UnloadTimeoutAlarm.Set($"can not complete in {timeout} seconds");
  137. throw (new RoutineFaildException());
  138. }
  139. else
  140. throw (new RoutineBreakException());
  141. }
  142. }
  143. private void CheckUnloadFinish(int id, int timeout)
  144. {
  145. Tuple<bool, Result> ret = ExecuteAndWait(id, () =>
  146. {
  147. Notify($"Check {Module} unload finish");
  148. return true;
  149. }, () =>
  150. {
  151. return _fimsModule.FIMSDevice.IsPLCUnloadCompleted && !_fimsModule.FIMSDevice.IsRunning;
  152. }, timeout * 1000);
  153. if (ret.Item1)
  154. {
  155. if (ret.Item2 == Result.FAIL)
  156. {
  157. throw (new RoutineFaildException());
  158. }
  159. else if (ret.Item2 == Result.TIMEOUT) //timeout
  160. {
  161. _fimsModule.UnloadTimeoutAlarm.Set($"can not complete in {timeout} seconds");
  162. throw (new RoutineFaildException());
  163. }
  164. else
  165. throw (new RoutineBreakException());
  166. }
  167. }
  168. }
  169. }