FIMSModule.cs 21 KB

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  1. using Aitex.Core.Common.DeviceData;
  2. using Aitex.Core.RT.DataCenter;
  3. using Aitex.Core.RT.Device;
  4. using Aitex.Core.RT.Device.Unit;
  5. using Aitex.Core.RT.Event;
  6. using Aitex.Core.RT.Fsm;
  7. using Aitex.Core.RT.Log;
  8. using Aitex.Core.RT.OperationCenter;
  9. using Aitex.Core.RT.Routine;
  10. using Aitex.Core.RT.SCCore;
  11. using Aitex.Core.Util;
  12. using Aitex.Core.Utilities;
  13. using Aitex.Sorter.Common;
  14. using MECF.Framework.Common.Alarms;
  15. using MECF.Framework.Common.Device.Bases;
  16. using MECF.Framework.Common.Equipment;
  17. using MECF.Framework.Common.Schedulers;
  18. using MECF.Framework.Common.SubstrateTrackings;
  19. using System;
  20. using System.Collections.Generic;
  21. using System.Linq;
  22. using System.Text;
  23. using System.Threading.Tasks;
  24. namespace FurnaceRT.Equipments.FIMSs
  25. {
  26. public partial class FIMSModule : FIMSModuleBase
  27. {
  28. public enum STATE
  29. {
  30. NotInstall,
  31. NotConnected,
  32. Idle,
  33. Error,
  34. Init,
  35. Homing,
  36. Unloading,
  37. Loading,
  38. Cycle,
  39. InTransfer,
  40. }
  41. public enum MSG
  42. {
  43. Home,
  44. Disconnected,
  45. Connected,
  46. Reset,
  47. Abort,
  48. Error,
  49. InTransfer,
  50. Cycle,
  51. TransferComplete,
  52. Load,
  53. Unload,
  54. LoadRetry,
  55. UnloadRetry,
  56. }
  57. public override bool IsReady
  58. {
  59. get { return FsmState == (int)STATE.Idle && CheckAllMessageProcessed(); }
  60. }
  61. public override bool IsError
  62. {
  63. get
  64. {
  65. return FsmState == (int)STATE.Error;
  66. }
  67. }
  68. public override bool IsInit
  69. {
  70. get { return false; }
  71. }
  72. public bool IsFoupExist => FIMSDevice != null ? FIMSDevice.IsFoupExist : false;
  73. public bool IsLoading
  74. {
  75. get
  76. {
  77. return FsmState == (int)STATE.Loading;
  78. }
  79. }
  80. private bool _isOnline;
  81. public override bool IsOnline
  82. {
  83. get
  84. {
  85. return _isOnline;
  86. }
  87. set
  88. {
  89. _isOnline = value;
  90. SC.SetItemValue($"FIMS.{Name}.IsOnline", value);
  91. }
  92. }
  93. #region fields
  94. private FIMSHomeRoutine _homeRoutine;
  95. private FIMSLoadRoutine _loadRoutine;
  96. private FIMSUnloadRoutine _unloadRoutine;
  97. private FIMSCycleTest _moveCycleTest;
  98. private List<AITWaterMappingData> _mappingData;
  99. #endregion
  100. public FIMSModule(ModuleName module) : base(SC.GetValue<int>("System.CassetteSlotCount"))
  101. {
  102. Name = module.ToString();
  103. Module = module.ToString();
  104. IsOnline = SC.GetValue<bool>($"FIMS.{Name}.IsOnline");
  105. }
  106. public override bool Initialize()
  107. {
  108. InitRoutine();
  109. InitDevice();
  110. InitFsm();
  111. InitOp();
  112. InitData();
  113. InitAlarmEvent();
  114. Singleton<EventManager>.Instance.OnAlarmEvent += Instance_OnAlarmEvent;
  115. return base.Initialize();
  116. }
  117. private void Instance_OnAlarmEvent(EventItem item)
  118. {
  119. if (item != null && item.Level == EventLevel.Alarm && (item.Source == Name || item.Source == Module))
  120. {
  121. DEVICE.GetDevice<SignalTowerBase>("System.SignalTower")?.Reset();
  122. LOG.Write($"{item.Source} {item.EventEnum} {item.Description}\n");
  123. PostMsg(MSG.Error);
  124. }
  125. }
  126. private void InitRoutine()
  127. {
  128. _homeRoutine = new FIMSHomeRoutine(this);
  129. _loadRoutine = new FIMSLoadRoutine(this);
  130. _unloadRoutine = new FIMSUnloadRoutine(this);
  131. _moveCycleTest = new FIMSCycleTest(this);
  132. }
  133. private void InitData()
  134. {
  135. DATA.Subscribe($"{Module}.MappingData", () => new List<AITWaterMappingData>()
  136. {
  137. new AITWaterMappingData(){Slot = 1,Detect=2500, Base=2500,Diff = 0,Thickness = 10},
  138. new AITWaterMappingData(){Slot = 2,Detect=2500, Base=2500,Diff = 0,Thickness = 10},
  139. new AITWaterMappingData(){Slot = 3,Detect=2500, Base=2500,Diff = 0,Thickness = 10},
  140. new AITWaterMappingData(){Slot = 4,Detect=2500, Base=2500,Diff = 0,Thickness = 10},
  141. new AITWaterMappingData(){Slot = 5,Detect=2500, Base=2500,Diff = 0,Thickness = 10},
  142. new AITWaterMappingData(){Slot = 6,Detect=2500, Base=2500,Diff = 0,Thickness = 10},
  143. new AITWaterMappingData(){Slot = 7,Detect=2500, Base=2500,Diff = 0,Thickness = 10},
  144. new AITWaterMappingData(){Slot = 8,Detect=2500, Base=2500,Diff = 0,Thickness = 10},
  145. new AITWaterMappingData(){Slot = 9,Detect=2500, Base=2500,Diff = 0,Thickness = 10},
  146. new AITWaterMappingData(){Slot = 10,Detect=2500, Base=2500,Diff = 0,Thickness = 10},
  147. new AITWaterMappingData(){Slot = 11,Detect=2500, Base=2500,Diff = 0,Thickness = 10},
  148. new AITWaterMappingData(){Slot = 12,Detect=2500, Base=2500,Diff = 0,Thickness = 10},
  149. new AITWaterMappingData(){Slot = 13,Detect=2500, Base=2500,Diff = 0,Thickness = 10},
  150. new AITWaterMappingData(){Slot = 14,Detect=2500, Base=2500,Diff = 0,Thickness = 10},
  151. new AITWaterMappingData(){Slot = 15,Detect=2500, Base=2500,Diff = 0,Thickness = 10},
  152. new AITWaterMappingData(){Slot = 16,Detect=2500, Base=2500,Diff = 0,Thickness = 10},
  153. new AITWaterMappingData(){Slot = 17,Detect=2500, Base=2500,Diff = 0,Thickness = 10},
  154. new AITWaterMappingData(){Slot = 18,Detect=2500, Base=2500,Diff = 0,Thickness = 10},
  155. new AITWaterMappingData(){Slot = 19,Detect=2500, Base=2500,Diff = 0,Thickness = 10},
  156. new AITWaterMappingData(){Slot = 20,Detect=2500, Base=2500,Diff = 0,Thickness = 10},
  157. new AITWaterMappingData(){Slot = 21,Detect=2500, Base=2500,Diff = 0,Thickness = 10},
  158. new AITWaterMappingData(){Slot = 22,Detect=2500, Base=2500,Diff = 0,Thickness = 10},
  159. new AITWaterMappingData(){Slot = 23,Detect=2500, Base=2500,Diff = 0,Thickness = 10},
  160. new AITWaterMappingData(){Slot = 24,Detect=2500, Base=2500,Diff = 0,Thickness = 10},
  161. new AITWaterMappingData(){Slot = 25,Detect=2500, Base=2500,Diff = 0,Thickness = 10},
  162. });
  163. DATA.Subscribe($"{Module}.SlotNo1Distance", () => 100.0f);
  164. DATA.Subscribe($"{Module}.SlotPitchDistance", () => 100f);
  165. DATA.Subscribe($"{Module}.ThicknessReferenceValue", () => 5f);
  166. DATA.Subscribe($"{Module}.ThicknessPermissions", () => 8f);
  167. DATA.Subscribe($"{Module}.MappingResult", () => "Normal Complete");
  168. DATA.Subscribe($"{Module}.Status", () => StringFsmStatus);
  169. DATA.Subscribe($"{Module}.IsOnline", () => IsOnline);
  170. DATA.Subscribe($"{Module}.IsError", () => IsError);
  171. DATA.Subscribe($"{Module}.FIMSCycledCount", () => _moveCycleTest.LoopCounter);
  172. //DATA.Subscribe(Module, "CassettePresent", () => _diStationCassettePresent.Value);
  173. //DATA.Subscribe($"{Module}.StageValveState", () => StageValveState.ToString());
  174. }
  175. private void InitOp()
  176. {
  177. OP.Subscribe($"{Module}.Abort", (string cmd, object[] args) => CheckToPostMessage((int)MSG.Abort));
  178. OP.Subscribe($"{Module}.Home", (string cmd, object[] args) => CheckToPostMessage((int)MSG.Home));
  179. OP.Subscribe($"{Module}.Load", (string cmd, object[] args) => CheckToPostMessage((int)MSG.Load, args));
  180. OP.Subscribe($"{Module}.Unload", (string cmd, object[] args) => CheckToPostMessage((int)MSG.Unload, args));
  181. OP.Subscribe($"{Module}.Reset", (string cmd, object[] args) => CheckToPostMessage((int)MSG.Reset));
  182. OP.Subscribe($"{Module}.Cycle", (string cmd, object[] args) => CheckToPostMessage((int)MSG.Cycle));
  183. OP.Subscribe($"{Module}.SetOnline", (string cmd, object[] args) =>
  184. {
  185. IsOnline = true;
  186. return true;
  187. });
  188. OP.Subscribe($"{Module}.SetOffline", (string cmd, object[] args) =>
  189. {
  190. IsOnline = false;
  191. return true;
  192. });
  193. OP.Subscribe($"{Module}.AlarmAction", (string cmd, object[] args) =>
  194. {
  195. Enum.TryParse(args[0].ToString(), out AlarmAction alarmAction);
  196. string eventName = null;
  197. if (args.Length > 1)
  198. eventName = args[1].ToString();
  199. if (eventName != null)
  200. {
  201. EV.ClearAlarmEvent(eventName);
  202. var item = _triggeredAlarmList.FirstOrDefault(x => x.EventEnum == eventName);
  203. if (item != null)
  204. {
  205. item.Reset();
  206. _triggeredAlarmList.Remove(item);
  207. }
  208. if (item != null)
  209. {
  210. switch (alarmAction)
  211. {
  212. case AlarmAction.Retry:
  213. {
  214. CheckToPostMessage((int)item.RetryMessage, item.RetryMessageParas);
  215. }
  216. break;
  217. case AlarmAction.Abort:
  218. {
  219. CheckToPostMessage((int)MSG.Abort);
  220. }
  221. break;
  222. case AlarmAction.Clear:
  223. {
  224. int alarmCount = 0;
  225. var alarms = EV.GetAlarmEvent();
  226. foreach (var alarm in alarms)
  227. {
  228. if (alarm.Level == EventLevel.Alarm && alarm.Source == Name)
  229. alarmCount++;
  230. }
  231. if (alarmCount == 0)
  232. CheckToPostMessage((int)MSG.Reset);
  233. }
  234. break;
  235. case AlarmAction.Continue:
  236. {
  237. int alarmCount = 0;
  238. var alarms = EV.GetAlarmEvent();
  239. foreach (var alarm in alarms)
  240. {
  241. if (alarm.Level == EventLevel.Alarm && alarm.Source == Name)
  242. alarmCount++;
  243. }
  244. if (alarmCount == 0)
  245. CheckToPostMessage((int)MSG.Reset);
  246. }
  247. break;
  248. }
  249. }
  250. }
  251. return true;
  252. });
  253. }
  254. private void InitFsm()
  255. {
  256. EnumLoop<STATE>.ForEach((item) =>
  257. {
  258. MapState((int)item, item.ToString());
  259. });
  260. EnumLoop<MSG>.ForEach((item) =>
  261. {
  262. MapMessage((int)item, item.ToString());
  263. });
  264. EnableFsm(100, STATE.Init);
  265. Transition(STATE.Init, MSG.Home, FsmStartHome, STATE.Homing);
  266. Transition(STATE.Error, MSG.Home, FsmStartHome, STATE.Homing);
  267. Transition(STATE.Idle, MSG.Home, FsmStartHome, STATE.Homing);
  268. Transition(STATE.Homing, FSM_MSG.TIMER, FsmMonitorHomeTask, STATE.Idle);
  269. Transition(STATE.Homing, MSG.Error, null, STATE.Init);
  270. Transition(STATE.Homing, MSG.Abort, FsmAbortTask, STATE.Init);
  271. Transition(STATE.Idle, MSG.Disconnected, null, STATE.NotConnected);
  272. Transition(STATE.Idle, MSG.InTransfer, null, STATE.InTransfer);
  273. Transition(STATE.InTransfer, MSG.TransferComplete, null, STATE.Idle);
  274. Transition(STATE.InTransfer, MSG.Abort, null, STATE.Idle);
  275. Transition(STATE.NotConnected, MSG.Connected, null, STATE.Idle);
  276. //Error
  277. AnyStateTransition(MSG.Error, FsmOnError, STATE.Error);
  278. Transition(STATE.Error, MSG.Reset, FsmReset, STATE.Idle);
  279. Transition(STATE.Init, MSG.Reset, FsmReset, STATE.Init);
  280. Transition(STATE.Idle, MSG.Reset, FsmReset, STATE.Idle);
  281. //load
  282. Transition(STATE.Error, MSG.LoadRetry, FsmStartLoad, STATE.Loading);
  283. Transition(STATE.Idle, MSG.Load, FsmStartLoad, STATE.Loading);
  284. Transition(STATE.Loading, FSM_MSG.TIMER, FsmMonitorLoadTask, STATE.Idle);
  285. Transition(STATE.Loading, MSG.Abort, FsmAbortTask, STATE.Idle);
  286. //unload
  287. Transition(STATE.Error, MSG.UnloadRetry, FsmStartUnload, STATE.Unloading);
  288. Transition(STATE.Idle, MSG.Unload, FsmStartUnload, STATE.Unloading);
  289. Transition(STATE.Unloading, FSM_MSG.TIMER, FsmMonitorUnloadTask, STATE.Idle);
  290. Transition(STATE.Unloading, MSG.Abort, FsmAbortTask, STATE.Idle);
  291. Transition(STATE.Idle, MSG.Cycle, FsmStartMoveTest, STATE.Cycle);
  292. Transition(STATE.Cycle, FSM_MSG.TIMER, FsmMonitorTask, STATE.Idle);
  293. Transition(STATE.Cycle, MSG.Abort, FsmAbortTask, STATE.Idle);
  294. }
  295. #region Service Functions
  296. private bool FsmStartHome(object[] param)
  297. {
  298. Result ret = StartRoutine(_homeRoutine);
  299. if (ret == Result.FAIL || ret == Result.DONE)
  300. return false;
  301. return ret == Result.RUN;
  302. }
  303. private bool FsmAbortTask(object[] param)
  304. {
  305. return true;
  306. }
  307. private bool FsmMonitorHomeTask(object[] param)
  308. {
  309. Result ret = MonitorRoutine();
  310. if (ret == Result.FAIL)
  311. {
  312. PostMsg(MSG.Error);
  313. return false;
  314. }
  315. if (ret == Result.DONE)
  316. {
  317. return true;
  318. }
  319. return false;
  320. }
  321. private bool FsmStartMoveTest(object[] param)
  322. {
  323. Result ret = StartRoutine(_moveCycleTest);
  324. if (ret == Result.FAIL || ret == Result.DONE)
  325. return false;
  326. return ret == Result.RUN;
  327. }
  328. private bool FsmStartLoad(object[] param)
  329. {
  330. bool isNeedN2Purge = false;
  331. if(param.Length > 0)
  332. {
  333. bool.TryParse(param[0].ToString(), out isNeedN2Purge);
  334. }
  335. _loadRoutine.Init(isNeedN2Purge);
  336. QueueRoutine.Clear();
  337. QueueRoutine.Enqueue(_loadRoutine);
  338. Result ret = QueueRoutine.Peek().Start();
  339. if (ret == Result.FAIL || ret == Result.DONE)
  340. return false;
  341. return ret == Result.RUN;
  342. }
  343. private bool FsmStartUnload(object[] param)
  344. {
  345. bool isNeedN2Purge = false;
  346. if (param.Length > 0)
  347. {
  348. bool.TryParse(param[0].ToString(), out isNeedN2Purge);
  349. }
  350. _unloadRoutine.Init(isNeedN2Purge);
  351. QueueRoutine.Clear();
  352. Result ret = StartRoutine(_unloadRoutine);
  353. if (ret == Result.FAIL || ret == Result.DONE)
  354. return false;
  355. return ret == Result.RUN;
  356. }
  357. private bool FsmMonitorLoadTask(object[] param)
  358. {
  359. Result ret = MonitorRoutine();
  360. if (ret == Result.FAIL)
  361. {
  362. PostMsg(MSG.Error);
  363. return false;
  364. }
  365. if (ret == Result.DONE)
  366. IsOnline = true;
  367. return ret == Result.DONE;
  368. }
  369. private bool FsmMonitorTask(object[] param)
  370. {
  371. Result ret = MonitorRoutine();
  372. if (ret == Result.FAIL)
  373. {
  374. PostMsg(MSG.Error);
  375. return false;
  376. }
  377. return ret == Result.DONE;
  378. }
  379. private bool FsmMonitorUnloadTask(object[] param)
  380. {
  381. Result ret = MonitorRoutine();
  382. if (ret == Result.FAIL)
  383. {
  384. PostMsg(MSG.Error);
  385. return false;
  386. }
  387. return ret == Result.DONE;
  388. }
  389. public override bool Home(out string reason)
  390. {
  391. CheckToPostMessage((int)MSG.Home);
  392. reason = string.Empty;
  393. return true;
  394. }
  395. private bool FsmOnError(object[] param)
  396. {
  397. if (FsmState == (int)STATE.Error)
  398. {
  399. return false;
  400. }
  401. if (FsmState != (int)STATE.Init && FsmState != (int)STATE.Idle)
  402. AbortRoutine();
  403. return true;
  404. }
  405. public override void Reset()
  406. {
  407. if (IsError)
  408. {
  409. CheckToPostMessage((int)MSG.Reset);
  410. }
  411. }
  412. private bool FsmReset(object[] param)
  413. {
  414. FIMSDevice.SetAlarmReset();
  415. return true;
  416. }
  417. public override bool PrepareTransfer(ModuleName robot, Hand blade, int targetSlot, EnumTransferType transferType, out string reason)
  418. {
  419. reason = string.Empty;
  420. return true;
  421. }
  422. public override bool TransferHandoff(ModuleName robot, Hand blade, int targetSlot, EnumTransferType transferType, out string reason)
  423. {
  424. reason = string.Empty;
  425. return true;
  426. }
  427. public override bool PostTransfer(ModuleName robot, Hand blade, int targetSlot, EnumTransferType transferType, out string reason)
  428. {
  429. reason = string.Empty;
  430. return true;
  431. }
  432. public override bool CheckReadyForTransfer(ModuleName robot, Hand blade, int targetSlot, EnumTransferType transferType,
  433. out string reason)
  434. {
  435. reason = string.Empty;
  436. if (!IsReady)
  437. {
  438. reason = $"{Module} status={StringFsmStatus} is busy";
  439. return false;
  440. }
  441. if (robot == ModuleName.WaferRobot)
  442. {
  443. if (!FIMSDevice.IsLoadCompleted)
  444. {
  445. reason = $"{Module} is not loaded";
  446. return false;
  447. }
  448. if (!IsDoorOpen)
  449. {
  450. reason = $"{Module} door is not open";
  451. }
  452. }
  453. if (robot == ModuleName.CarrierRobot)
  454. {
  455. if (!FIMSDevice.IsUnloadCompleted)
  456. {
  457. reason = $"{Module} is not unloaded";
  458. return false;
  459. }
  460. if (transferType == EnumTransferType.Pick)
  461. {
  462. if (!CarrierManager.Instance.CheckHasCarrier(Module, 0))
  463. {
  464. reason = $"{Module} carrier not present";
  465. return false;
  466. }
  467. }
  468. if (transferType == EnumTransferType.Place)
  469. {
  470. if (!CarrierManager.Instance.CheckNoCarrier(Module, 0))
  471. {
  472. reason = $"{Module} carrier present";
  473. return false;
  474. }
  475. }
  476. }
  477. return true;
  478. }
  479. public override void NoteTransferStart(ModuleName robot, Hand blade, int targetSlot, EnumTransferType transferType)
  480. {
  481. CheckToPostMessage(MSG.InTransfer);
  482. }
  483. public override void NoteTransferStop(ModuleName robot, Hand blade, int targetSlot, EnumTransferType transferType)
  484. {
  485. if (FsmState == (int)STATE.InTransfer)
  486. CheckToPostMessage(MSG.TransferComplete);
  487. }
  488. public void InvokeLoad(bool isNeedN2Purge)
  489. {
  490. CheckToPostMessage((int)MSG.Load, isNeedN2Purge);
  491. }
  492. public void InvokeUnload(bool isNeedN2Purge)
  493. {
  494. CheckToPostMessage((int)MSG.Unload, isNeedN2Purge);
  495. }
  496. #endregion
  497. }
  498. }