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- using Aitex.Core.Common.DeviceData;
- using Aitex.Core.RT.DataCenter;
- using Aitex.Core.RT.Device;
- using Aitex.Core.RT.Device.Unit;
- using Aitex.Core.RT.Event;
- using Aitex.Core.RT.Fsm;
- using Aitex.Core.RT.Log;
- using Aitex.Core.RT.OperationCenter;
- using Aitex.Core.RT.Routine;
- using Aitex.Core.RT.SCCore;
- using Aitex.Core.Util;
- using Aitex.Core.Utilities;
- using Aitex.Sorter.Common;
- using MECF.Framework.Common.Alarms;
- using MECF.Framework.Common.Device.Bases;
- using MECF.Framework.Common.Equipment;
- using MECF.Framework.Common.Schedulers;
- using MECF.Framework.Common.SubstrateTrackings;
- using System;
- using System.Collections.Generic;
- using System.Linq;
- using System.Text;
- using System.Threading.Tasks;
- namespace FurnaceRT.Equipments.FIMSs
- {
- public partial class FIMSModule : FIMSModuleBase
- {
- public enum STATE
- {
- NotInstall,
- NotConnected,
- Idle,
- Error,
- Init,
- Homing,
- Unloading,
- Loading,
- Cycle,
- InTransfer,
- }
- public enum MSG
- {
- Home,
- Disconnected,
- Connected,
- Reset,
- Abort,
- Error,
- InTransfer,
- Cycle,
- TransferComplete,
- Load,
- Unload,
- LoadRetry,
- UnloadRetry,
- }
- public override bool IsReady
- {
- get { return FsmState == (int)STATE.Idle && CheckAllMessageProcessed(); }
- }
- public override bool IsError
- {
- get
- {
- return FsmState == (int)STATE.Error;
- }
- }
- public override bool IsInit
- {
- get { return false; }
- }
- public bool IsFoupExist => FIMSDevice != null ? FIMSDevice.IsFoupExist : false;
- public bool IsLoading
- {
- get
- {
- return FsmState == (int)STATE.Loading;
- }
- }
- private bool _isOnline;
- public override bool IsOnline
- {
- get
- {
- return _isOnline;
- }
- set
- {
- _isOnline = value;
- SC.SetItemValue($"FIMS.{Name}.IsOnline", value);
- }
- }
- #region fields
- private FIMSHomeRoutine _homeRoutine;
- private FIMSLoadRoutine _loadRoutine;
- private FIMSUnloadRoutine _unloadRoutine;
- private FIMSCycleTest _moveCycleTest;
- private List<AITWaterMappingData> _mappingData;
- #endregion
- public FIMSModule(ModuleName module) : base(SC.GetValue<int>("System.CassetteSlotCount"))
- {
- Name = module.ToString();
- Module = module.ToString();
- IsOnline = SC.GetValue<bool>($"FIMS.{Name}.IsOnline");
- }
- public override bool Initialize()
- {
- InitRoutine();
- InitDevice();
- InitFsm();
- InitOp();
- InitData();
- InitAlarmEvent();
- Singleton<EventManager>.Instance.OnAlarmEvent += Instance_OnAlarmEvent;
- return base.Initialize();
- }
- private void Instance_OnAlarmEvent(EventItem item)
- {
- if (item != null && item.Level == EventLevel.Alarm && (item.Source == Name || item.Source == Module))
- {
- DEVICE.GetDevice<SignalTowerBase>("System.SignalTower")?.Reset();
- LOG.Write($"{item.Source} {item.EventEnum} {item.Description}\n");
- PostMsg(MSG.Error);
- }
- }
- private void InitRoutine()
- {
- _homeRoutine = new FIMSHomeRoutine(this);
- _loadRoutine = new FIMSLoadRoutine(this);
- _unloadRoutine = new FIMSUnloadRoutine(this);
- _moveCycleTest = new FIMSCycleTest(this);
- }
- private void InitData()
- {
-
- DATA.Subscribe($"{Module}.MappingData", () => new List<AITWaterMappingData>()
- {
- new AITWaterMappingData(){Slot = 1,Detect=2500, Base=2500,Diff = 0,Thickness = 10},
- new AITWaterMappingData(){Slot = 2,Detect=2500, Base=2500,Diff = 0,Thickness = 10},
- new AITWaterMappingData(){Slot = 3,Detect=2500, Base=2500,Diff = 0,Thickness = 10},
- new AITWaterMappingData(){Slot = 4,Detect=2500, Base=2500,Diff = 0,Thickness = 10},
- new AITWaterMappingData(){Slot = 5,Detect=2500, Base=2500,Diff = 0,Thickness = 10},
- new AITWaterMappingData(){Slot = 6,Detect=2500, Base=2500,Diff = 0,Thickness = 10},
- new AITWaterMappingData(){Slot = 7,Detect=2500, Base=2500,Diff = 0,Thickness = 10},
- new AITWaterMappingData(){Slot = 8,Detect=2500, Base=2500,Diff = 0,Thickness = 10},
- new AITWaterMappingData(){Slot = 9,Detect=2500, Base=2500,Diff = 0,Thickness = 10},
- new AITWaterMappingData(){Slot = 10,Detect=2500, Base=2500,Diff = 0,Thickness = 10},
- new AITWaterMappingData(){Slot = 11,Detect=2500, Base=2500,Diff = 0,Thickness = 10},
- new AITWaterMappingData(){Slot = 12,Detect=2500, Base=2500,Diff = 0,Thickness = 10},
- new AITWaterMappingData(){Slot = 13,Detect=2500, Base=2500,Diff = 0,Thickness = 10},
- new AITWaterMappingData(){Slot = 14,Detect=2500, Base=2500,Diff = 0,Thickness = 10},
- new AITWaterMappingData(){Slot = 15,Detect=2500, Base=2500,Diff = 0,Thickness = 10},
- new AITWaterMappingData(){Slot = 16,Detect=2500, Base=2500,Diff = 0,Thickness = 10},
- new AITWaterMappingData(){Slot = 17,Detect=2500, Base=2500,Diff = 0,Thickness = 10},
- new AITWaterMappingData(){Slot = 18,Detect=2500, Base=2500,Diff = 0,Thickness = 10},
- new AITWaterMappingData(){Slot = 19,Detect=2500, Base=2500,Diff = 0,Thickness = 10},
- new AITWaterMappingData(){Slot = 20,Detect=2500, Base=2500,Diff = 0,Thickness = 10},
- new AITWaterMappingData(){Slot = 21,Detect=2500, Base=2500,Diff = 0,Thickness = 10},
- new AITWaterMappingData(){Slot = 22,Detect=2500, Base=2500,Diff = 0,Thickness = 10},
- new AITWaterMappingData(){Slot = 23,Detect=2500, Base=2500,Diff = 0,Thickness = 10},
- new AITWaterMappingData(){Slot = 24,Detect=2500, Base=2500,Diff = 0,Thickness = 10},
- new AITWaterMappingData(){Slot = 25,Detect=2500, Base=2500,Diff = 0,Thickness = 10},
- });
- DATA.Subscribe($"{Module}.SlotNo1Distance", () => 100.0f);
- DATA.Subscribe($"{Module}.SlotPitchDistance", () => 100f);
- DATA.Subscribe($"{Module}.ThicknessReferenceValue", () => 5f);
- DATA.Subscribe($"{Module}.ThicknessPermissions", () => 8f);
- DATA.Subscribe($"{Module}.MappingResult", () => "Normal Complete");
- DATA.Subscribe($"{Module}.Status", () => StringFsmStatus);
- DATA.Subscribe($"{Module}.IsOnline", () => IsOnline);
- DATA.Subscribe($"{Module}.IsError", () => IsError);
- DATA.Subscribe($"{Module}.FIMSCycledCount", () => _moveCycleTest.LoopCounter);
- //DATA.Subscribe(Module, "CassettePresent", () => _diStationCassettePresent.Value);
- //DATA.Subscribe($"{Module}.StageValveState", () => StageValveState.ToString());
- }
- private void InitOp()
- {
- OP.Subscribe($"{Module}.Abort", (string cmd, object[] args) => CheckToPostMessage((int)MSG.Abort));
- OP.Subscribe($"{Module}.Home", (string cmd, object[] args) => CheckToPostMessage((int)MSG.Home));
- OP.Subscribe($"{Module}.Load", (string cmd, object[] args) => CheckToPostMessage((int)MSG.Load, args));
- OP.Subscribe($"{Module}.Unload", (string cmd, object[] args) => CheckToPostMessage((int)MSG.Unload, args));
- OP.Subscribe($"{Module}.Reset", (string cmd, object[] args) => CheckToPostMessage((int)MSG.Reset));
- OP.Subscribe($"{Module}.Cycle", (string cmd, object[] args) => CheckToPostMessage((int)MSG.Cycle));
- OP.Subscribe($"{Module}.SetOnline", (string cmd, object[] args) =>
- {
- IsOnline = true;
- return true;
- });
- OP.Subscribe($"{Module}.SetOffline", (string cmd, object[] args) =>
- {
- IsOnline = false;
- return true;
- });
- OP.Subscribe($"{Module}.AlarmAction", (string cmd, object[] args) =>
- {
- Enum.TryParse(args[0].ToString(), out AlarmAction alarmAction);
- string eventName = null;
- if (args.Length > 1)
- eventName = args[1].ToString();
- if (eventName != null)
- {
- EV.ClearAlarmEvent(eventName);
- var item = _triggeredAlarmList.FirstOrDefault(x => x.EventEnum == eventName);
- if (item != null)
- {
- item.Reset();
- _triggeredAlarmList.Remove(item);
- }
- if (item != null)
- {
- switch (alarmAction)
- {
- case AlarmAction.Retry:
- {
- CheckToPostMessage((int)item.RetryMessage, item.RetryMessageParas);
- }
- break;
- case AlarmAction.Abort:
- {
- CheckToPostMessage((int)MSG.Abort);
- }
- break;
- case AlarmAction.Clear:
- {
- int alarmCount = 0;
- var alarms = EV.GetAlarmEvent();
- foreach (var alarm in alarms)
- {
- if (alarm.Level == EventLevel.Alarm && alarm.Source == Name)
- alarmCount++;
- }
- if (alarmCount == 0)
- CheckToPostMessage((int)MSG.Reset);
- }
- break;
- case AlarmAction.Continue:
- {
- int alarmCount = 0;
- var alarms = EV.GetAlarmEvent();
- foreach (var alarm in alarms)
- {
- if (alarm.Level == EventLevel.Alarm && alarm.Source == Name)
- alarmCount++;
- }
- if (alarmCount == 0)
- CheckToPostMessage((int)MSG.Reset);
- }
- break;
- }
- }
- }
- return true;
- });
- }
- private void InitFsm()
- {
- EnumLoop<STATE>.ForEach((item) =>
- {
- MapState((int)item, item.ToString());
- });
- EnumLoop<MSG>.ForEach((item) =>
- {
- MapMessage((int)item, item.ToString());
- });
- EnableFsm(100, STATE.Init);
- Transition(STATE.Init, MSG.Home, FsmStartHome, STATE.Homing);
- Transition(STATE.Error, MSG.Home, FsmStartHome, STATE.Homing);
- Transition(STATE.Idle, MSG.Home, FsmStartHome, STATE.Homing);
- Transition(STATE.Homing, FSM_MSG.TIMER, FsmMonitorHomeTask, STATE.Idle);
- Transition(STATE.Homing, MSG.Error, null, STATE.Init);
- Transition(STATE.Homing, MSG.Abort, FsmAbortTask, STATE.Init);
- Transition(STATE.Idle, MSG.Disconnected, null, STATE.NotConnected);
- Transition(STATE.Idle, MSG.InTransfer, null, STATE.InTransfer);
- Transition(STATE.InTransfer, MSG.TransferComplete, null, STATE.Idle);
- Transition(STATE.InTransfer, MSG.Abort, null, STATE.Idle);
- Transition(STATE.NotConnected, MSG.Connected, null, STATE.Idle);
- //Error
- AnyStateTransition(MSG.Error, FsmOnError, STATE.Error);
- Transition(STATE.Error, MSG.Reset, FsmReset, STATE.Idle);
- Transition(STATE.Init, MSG.Reset, FsmReset, STATE.Init);
- Transition(STATE.Idle, MSG.Reset, FsmReset, STATE.Idle);
- //load
- Transition(STATE.Error, MSG.LoadRetry, FsmStartLoad, STATE.Loading);
- Transition(STATE.Idle, MSG.Load, FsmStartLoad, STATE.Loading);
- Transition(STATE.Loading, FSM_MSG.TIMER, FsmMonitorLoadTask, STATE.Idle);
- Transition(STATE.Loading, MSG.Abort, FsmAbortTask, STATE.Idle);
- //unload
- Transition(STATE.Error, MSG.UnloadRetry, FsmStartUnload, STATE.Unloading);
- Transition(STATE.Idle, MSG.Unload, FsmStartUnload, STATE.Unloading);
- Transition(STATE.Unloading, FSM_MSG.TIMER, FsmMonitorUnloadTask, STATE.Idle);
- Transition(STATE.Unloading, MSG.Abort, FsmAbortTask, STATE.Idle);
- Transition(STATE.Idle, MSG.Cycle, FsmStartMoveTest, STATE.Cycle);
- Transition(STATE.Cycle, FSM_MSG.TIMER, FsmMonitorTask, STATE.Idle);
- Transition(STATE.Cycle, MSG.Abort, FsmAbortTask, STATE.Idle);
- }
- #region Service Functions
- private bool FsmStartHome(object[] param)
- {
- Result ret = StartRoutine(_homeRoutine);
- if (ret == Result.FAIL || ret == Result.DONE)
- return false;
- return ret == Result.RUN;
- }
- private bool FsmAbortTask(object[] param)
- {
- return true;
- }
- private bool FsmMonitorHomeTask(object[] param)
- {
- Result ret = MonitorRoutine();
- if (ret == Result.FAIL)
- {
- PostMsg(MSG.Error);
- return false;
- }
- if (ret == Result.DONE)
- {
- return true;
- }
- return false;
- }
- private bool FsmStartMoveTest(object[] param)
- {
- Result ret = StartRoutine(_moveCycleTest);
- if (ret == Result.FAIL || ret == Result.DONE)
- return false;
- return ret == Result.RUN;
- }
- private bool FsmStartLoad(object[] param)
- {
- bool isNeedN2Purge = false;
- if(param.Length > 0)
- {
- bool.TryParse(param[0].ToString(), out isNeedN2Purge);
- }
- _loadRoutine.Init(isNeedN2Purge);
- QueueRoutine.Clear();
- QueueRoutine.Enqueue(_loadRoutine);
- Result ret = QueueRoutine.Peek().Start();
- if (ret == Result.FAIL || ret == Result.DONE)
- return false;
- return ret == Result.RUN;
- }
- private bool FsmStartUnload(object[] param)
- {
- bool isNeedN2Purge = false;
- if (param.Length > 0)
- {
- bool.TryParse(param[0].ToString(), out isNeedN2Purge);
- }
- _unloadRoutine.Init(isNeedN2Purge);
- QueueRoutine.Clear();
- Result ret = StartRoutine(_unloadRoutine);
- if (ret == Result.FAIL || ret == Result.DONE)
- return false;
- return ret == Result.RUN;
- }
- private bool FsmMonitorLoadTask(object[] param)
- {
- Result ret = MonitorRoutine();
- if (ret == Result.FAIL)
- {
- PostMsg(MSG.Error);
- return false;
- }
- if (ret == Result.DONE)
- IsOnline = true;
- return ret == Result.DONE;
- }
- private bool FsmMonitorTask(object[] param)
- {
- Result ret = MonitorRoutine();
- if (ret == Result.FAIL)
- {
- PostMsg(MSG.Error);
- return false;
- }
- return ret == Result.DONE;
- }
- private bool FsmMonitorUnloadTask(object[] param)
- {
- Result ret = MonitorRoutine();
- if (ret == Result.FAIL)
- {
- PostMsg(MSG.Error);
- return false;
- }
- return ret == Result.DONE;
- }
- public override bool Home(out string reason)
- {
- CheckToPostMessage((int)MSG.Home);
- reason = string.Empty;
- return true;
- }
- private bool FsmOnError(object[] param)
- {
- if (FsmState == (int)STATE.Error)
- {
- return false;
- }
- if (FsmState != (int)STATE.Init && FsmState != (int)STATE.Idle)
- AbortRoutine();
- return true;
- }
- public override void Reset()
- {
- if (IsError)
- {
- CheckToPostMessage((int)MSG.Reset);
- }
- }
- private bool FsmReset(object[] param)
- {
- FIMSDevice.SetAlarmReset();
- return true;
- }
- public override bool PrepareTransfer(ModuleName robot, Hand blade, int targetSlot, EnumTransferType transferType, out string reason)
- {
- reason = string.Empty;
- return true;
- }
- public override bool TransferHandoff(ModuleName robot, Hand blade, int targetSlot, EnumTransferType transferType, out string reason)
- {
- reason = string.Empty;
- return true;
- }
- public override bool PostTransfer(ModuleName robot, Hand blade, int targetSlot, EnumTransferType transferType, out string reason)
- {
- reason = string.Empty;
- return true;
- }
- public override bool CheckReadyForTransfer(ModuleName robot, Hand blade, int targetSlot, EnumTransferType transferType,
- out string reason)
- {
- reason = string.Empty;
- if (!IsReady)
- {
- reason = $"{Module} status={StringFsmStatus} is busy";
- return false;
- }
- if (robot == ModuleName.WaferRobot)
- {
- if (!FIMSDevice.IsLoadCompleted)
- {
- reason = $"{Module} is not loaded";
- return false;
- }
- if (!IsDoorOpen)
- {
- reason = $"{Module} door is not open";
- }
- }
- if (robot == ModuleName.CarrierRobot)
- {
- if (!FIMSDevice.IsUnloadCompleted)
- {
- reason = $"{Module} is not unloaded";
- return false;
- }
- if (transferType == EnumTransferType.Pick)
- {
- if (!CarrierManager.Instance.CheckHasCarrier(Module, 0))
- {
- reason = $"{Module} carrier not present";
- return false;
- }
- }
- if (transferType == EnumTransferType.Place)
- {
- if (!CarrierManager.Instance.CheckNoCarrier(Module, 0))
- {
- reason = $"{Module} carrier present";
- return false;
- }
- }
- }
- return true;
- }
- public override void NoteTransferStart(ModuleName robot, Hand blade, int targetSlot, EnumTransferType transferType)
- {
- CheckToPostMessage(MSG.InTransfer);
- }
- public override void NoteTransferStop(ModuleName robot, Hand blade, int targetSlot, EnumTransferType transferType)
- {
- if (FsmState == (int)STATE.InTransfer)
- CheckToPostMessage(MSG.TransferComplete);
- }
- public void InvokeLoad(bool isNeedN2Purge)
- {
- CheckToPostMessage((int)MSG.Load, isNeedN2Purge);
- }
- public void InvokeUnload(bool isNeedN2Purge)
- {
- CheckToPostMessage((int)MSG.Unload, isNeedN2Purge);
- }
- #endregion
- }
- }
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