PMModuleInterlock.cs 16 KB

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  1. using Aitex.Core.RT.DataCenter;
  2. using Aitex.Core.RT.Device.Unit;
  3. using Aitex.Core.RT.Event;
  4. using Aitex.Core.RT.IOCore;
  5. using Aitex.Core.RT.Log;
  6. using Aitex.Core.RT.OperationCenter;
  7. using Aitex.Core.RT.SCCore;
  8. using Aitex.Core.Util;
  9. using MECF.Framework.Common.OperationCenter;
  10. using MECF.Framework.FA.Core.FAControl;
  11. using System;
  12. using System.Collections;
  13. using System.Diagnostics;
  14. using System.Linq;
  15. namespace FurnaceRT.Equipments.PMs
  16. {
  17. public partial class PMModule
  18. {
  19. private SCConfigItem _configAutoControlCoolingValve;
  20. private SCConfigItem _configVacuumSensorPressure;
  21. private SCConfigItem _configAutoControlChiller;
  22. private SCConfigItem _chillerTurnOffIfTempBelow;
  23. private SCConfigItem _chillerTurnOnIfTempAbove;
  24. private PeriodicJob _threadMonitor;
  25. private bool _vac1;
  26. private bool _vac2;
  27. private bool _vac3;
  28. private Stopwatch _vac1Timer = new Stopwatch();
  29. private Stopwatch _vac2Timer = new Stopwatch();
  30. private Stopwatch _vac3Timer = new Stopwatch();
  31. private int _vac1PumpTimeS = 120;
  32. private int _vac2PumpTimeS = 120;
  33. private int _vac3PumpTimeS = 120;
  34. private int _foolProofTime = 5;
  35. private DeviceTimer _plcFoolProofTime = null;
  36. private RD_TRIG _trigPLCConnected = null;
  37. private void InitInterlock()
  38. {
  39. OP.AddCheck($"{Module}.{Name}.Disconnect", new CheckPlcConnect(this));
  40. //OP.AddCheck($"{ChamberDoor.Module}.{ChamberDoor.Name}.Open", new CheckOpenDoor(this));
  41. if (SC.ContainsItem("System.PLCConnectSensorFoolTime"))
  42. _foolProofTime = SC.GetValue<int>("System.PLCConnectSensorFoolTime");
  43. _configAutoControlCoolingValve = SC.GetConfigItem($"PM.{Module}.AutoControlCoolingValve");
  44. _configVacuumSensorPressure = SC.GetConfigItem($"PM.{Module}.VacuumSensorPressure");
  45. _configAutoControlChiller = SC.GetConfigItem($"PM.{Module}.Chiller.EnableAutoAdjust");
  46. _chillerTurnOffIfTempBelow = SC.GetConfigItem($"PM.{Module}.Chiller.TurnOffIfTempBelow");
  47. _chillerTurnOnIfTempAbove = SC.GetConfigItem($"PM.{Module}.Chiller.TurnOnIfTempAbove");
  48. if (SensorPLCHeartBeatPC != null)
  49. {
  50. _trigPLCConnected = new RD_TRIG();
  51. _plcFoolProofTime = new DeviceTimer();
  52. _plcFoolProofTime.Start((_foolProofTime + 2) * 1000);//首次
  53. }
  54. _threadMonitor = new PeriodicJob(100, OnTimer, "interlock thread", true);
  55. }
  56. private void InitUserDefineInterlock()
  57. {
  58. //DATA.Subscribe($"{Module}.Heater1", () => 100);//自定义的Interlock limit
  59. InterlockManager.Instance.UserDefineInterlockHandler += UserDefineInterlockHandler;
  60. InterlockManager.Instance.UserDefineInterlocks += UserDefineInterlocks;
  61. //DATA.Subscribe("UserDefineInterlock", () => InterlockManager.Instance.UserDefineFlagCurrentValues);
  62. //DATA.Subscribe("UserDefineCurrent", () => InterlockManager.Instance.UserDefineCurrentValues);
  63. }
  64. //自定义的interlock action
  65. private bool UserDefineInterlocks(string name)
  66. {
  67. switch (name)
  68. {
  69. case "PM1.Heater1":
  70. return true;
  71. }
  72. return false;
  73. }
  74. //设置自定义的interlock action
  75. private bool UserDefineInterlockHandler(string name, object value)
  76. {
  77. switch (name)
  78. {
  79. case "PM1.Heater1":
  80. //设置Heater的值
  81. return true;
  82. }
  83. return false;
  84. }
  85. private class CheckOpenDoor : IInterlockChecker
  86. {
  87. private PMModule _pm;
  88. public CheckOpenDoor(PMModule pm)
  89. {
  90. _pm = pm;
  91. }
  92. public bool CanDo(out string reason, object[] args)
  93. {
  94. if (_pm.ChamberPressure < SC.GetValue<double>("PM.AtmPressureBase"))
  95. {
  96. reason = $"{_pm.Module} chamber pressure {_pm.ChamberPressure:F3} Torr less than {SC.GetValue<double>("PM.AtmPressureBase")} [PM.AtmPressureBase], can not open door";
  97. return false;
  98. }
  99. reason = string.Empty;
  100. return true;
  101. }
  102. }
  103. private class CheckPlcConnect : IInterlockChecker
  104. {
  105. private PMModule _pm;
  106. public CheckPlcConnect(PMModule pm)
  107. {
  108. _pm = pm;
  109. }
  110. public bool CanDo(out string reason, object[] args)
  111. {
  112. if (_pm.IsBusy)
  113. {
  114. reason = $"{_pm.Module} is in {_pm.StringFsmStatus} status, can not disconnect, should be idle";
  115. return false;
  116. }
  117. reason = string.Empty;
  118. return true;
  119. }
  120. }
  121. public bool OnTimer()
  122. {
  123. try
  124. {
  125. MonitorN2Purge();
  126. MonitorAux();
  127. MonitorFfu();
  128. lock (_alarmConditionLocker)
  129. {
  130. MonitorAlarmCondition();
  131. }
  132. if (!IsProcessing && TrigVGUnitConversion != null && SC.GetStringValue($"{Module}.APC.PressureUnit").ToLower() == "pa")
  133. {
  134. TrigVGUnitConversion.SetTrigger(SC.GetStringValue($"{Module}.APC.PressureUnit").ToLower() == "pa", out _);
  135. }
  136. //MonitorVAC1();
  137. //MonitorVAC2();
  138. //MonitorVAC3();
  139. MonitorPLCConnected();
  140. MonitorTank1LeakAgeExec();
  141. MonitorTank2LeakAgeExec();
  142. //foreach (var item in _inCommandLst)
  143. //{
  144. // if (item == null)
  145. // continue;
  146. // if (!_inCommandTirgs.ContainsKey(item.Name))
  147. // {
  148. // _inCommandTirgs.Add(item.Name, new RD_TRIG());
  149. // }
  150. // _inCommandTirgs[item.Name].CLK = item.Value;
  151. //}
  152. //if (_inCommandTirgs[SensorHECPowerONSW.Name].R)
  153. //{
  154. // _trigTHPowerEN.SetTrigger(true, out _);
  155. // _trigHECPowerONLamp.SetTrigger(true, out _);
  156. //}
  157. //if (_inCommandTirgs[SensorHECPowerONSW.Name].T)
  158. //{
  159. //}
  160. //if (_inCommandTirgs[SensorTHBreakOK.Name].R)
  161. //{
  162. //}
  163. //if (_inCommandTirgs[SensorTHBreakOK.Name].T)
  164. //{
  165. // _trigTHPowerEN.SetTrigger(false, out _);
  166. // _trigHECPowerONLamp.SetTrigger(false, out _);
  167. //}
  168. ProcessAlarmSignal();
  169. //if (IV2Valve.Status != SensorVG2LOW.Value)
  170. // IV2Valve.TurnValve(SensorVG2LOW.Value, out _);
  171. //if (IV2Valve.Status != SensorVG2LOW.Value)
  172. // VV2Valve.TurnValve(SensorTubeOverPressure.Value, out _);
  173. if (IsInit || !IsInstalled)
  174. return true;
  175. //cooling 阀门
  176. if (_configAutoControlCoolingValve == null || _configAutoControlCoolingValve.BoolValue)
  177. {
  178. //if (ElectricalCoolingValve.Status != MainChiller.IsRunning)
  179. // ElectricalCoolingValve.TurnValve(MainChiller.IsRunning, out _);
  180. //if (MicrowaveCoolingValve.Status != MainChiller.IsRunning)
  181. // MicrowaveCoolingValve.TurnValve(MainChiller.IsRunning, out _);
  182. //if (ChamberLidCoolingValve.Status != MainChiller.IsRunning)
  183. // ChamberLidCoolingValve.TurnValve(MainChiller.IsRunning, out _);
  184. }
  185. //auto control chiller
  186. if (_configAutoControlChiller != null && _configAutoControlChiller.BoolValue && _chillerTurnOffIfTempBelow != null && _chillerTurnOnIfTempAbove != null)
  187. {
  188. //if (!MainChiller.HasAlarm)
  189. //{
  190. // if (MainChiller.IsRunning && (ChamberHeater1.Feedback < _chillerTurnOffIfTempBelow.DoubleValue))
  191. // {
  192. // if (!MainChiller.SetMainPowerOnOff(false, out string reason))
  193. // {
  194. // LOG.Write(reason);
  195. // }
  196. // }else if (!MainChiller.IsRunning && (ChamberHeater1.Feedback > _chillerTurnOnIfTempAbove.DoubleValue))
  197. // {
  198. // if (!MainChiller.SetMainPowerOnOff(true, out string reason))
  199. // {
  200. // LOG.Write(reason);
  201. // }
  202. // }
  203. //}
  204. }
  205. //压力保护计
  206. double pressure = 3.0;
  207. if (_configVacuumSensorPressure != null)
  208. pressure = _configVacuumSensorPressure.DoubleValue;
  209. if (pressure > 30.0)
  210. pressure = 30.0;
  211. //bool canOpen = ChamberMonitorPressureGauge.Value < pressure;
  212. //if (VacuumSensorValve.Status != canOpen)
  213. //{
  214. // VacuumSensorValve.TurnValve(canOpen, out _);
  215. //}
  216. ////interlock ignore
  217. //SignalExhaustAlarm.SetIgnoreError(SC.GetValue<bool>($"PM.{Module}.Signal.IgnoreExhaustAlarm"));
  218. }
  219. catch (Exception ex)
  220. {
  221. LOG.Write(ex);
  222. }
  223. return true;
  224. }
  225. private void MonitorPLCConnected()
  226. {
  227. if (SensorPLCHeartBeatPC != null)
  228. {
  229. _trigPLCConnected.CLK = SensorPLCHeartBeatPC.Value;
  230. if (_trigPLCConnected.T || _trigPLCConnected.R)
  231. {
  232. _plcFoolProofTime.Start(_foolProofTime * 1000);
  233. }
  234. if (_plcFoolProofTime.IsTimeout())
  235. {
  236. _plcFoolProofTime.Stop();
  237. SensorPLCConnectedAlarm?.Set($"Connected Status keep {_trigPLCConnected.CLK} out of {_foolProofTime}s");
  238. }
  239. }
  240. }
  241. private void ProcessAlarmSignal()
  242. {
  243. var alarms = EV.GetAlarmEvent();
  244. if (alarms != null && alarms.Count > 0)
  245. {
  246. foreach (var device in HWILKAlarmDic)
  247. {
  248. if (device.Key is IoSensor && !((IoSensor)device.Key).Value && device.Value.AutoRecovery)
  249. {
  250. var item = alarms.FirstOrDefault(x => x.EventEnum == device.Value.EventEnum);
  251. if (item != null)
  252. {
  253. alarms.Remove(item);
  254. EV.ClearAlarmEvent(item.EventEnum);
  255. Singleton<FAJobController>.Instance.ClearAlarm(item.EventEnum);
  256. }
  257. }
  258. }
  259. }
  260. bool isTrig = false;
  261. foreach (var signal in _alarmSignals)
  262. {
  263. if (signal.RrigSignalOn.T && signal.IsAlarmAutoRecovery)
  264. {
  265. var item = _triggeredAlarmList.FirstOrDefault(x => x.EventEnum == signal.AlarmTriggered.EventEnum);
  266. if (item != null)
  267. {
  268. item.Reset();
  269. _triggeredAlarmList.Remove(item);
  270. EV.ClearAlarmEvent(item.EventEnum);
  271. Singleton<FAJobController>.Instance.ClearAlarm(item.EventEnum);
  272. }
  273. isTrig = true;
  274. signal.AlarmRecovery?.Set();
  275. }
  276. }
  277. if (isTrig)
  278. {
  279. int count = 0;
  280. foreach (var alarm in alarms)
  281. {
  282. if (alarm.Level == EventLevel.Alarm && alarm.Source == Name)
  283. count++;
  284. }
  285. if (count == 0)
  286. CheckToPostMessage((int)MSG.Reset);
  287. }
  288. }
  289. private void MonitorVAC1()
  290. {
  291. if (_vac1Timer == null)
  292. _vac1Timer = new Stopwatch();
  293. if (ValveAV24.Status)
  294. {
  295. _vac1 = false;
  296. if (_vac1Timer.IsRunning)
  297. _vac1Timer.Stop();
  298. }
  299. if (!ValveAV9.Status &&
  300. !ValveAV16.Status &&
  301. !ValveAV20.Status &&
  302. !ValveAV24.Status &&
  303. ValveAV26.Status &&
  304. (ValveAV33.Status || ValveAV35.Status) &&
  305. ValveAV83.Status &&
  306. ValveAV71.Status &&
  307. (APC.ModeFeedback == 0 || APC.ModeFeedback == 6) &&//0=idle;6=full open
  308. SensorVG11Status.Value && !AlarmSignalVG11HighAlarm.Value)
  309. {
  310. if (!_vac1Timer.IsRunning)
  311. _vac1Timer.Restart();
  312. if (_vac1Timer.ElapsedMilliseconds > _vac1PumpTimeS * 1000)
  313. _vac1 = true;
  314. }
  315. else
  316. {
  317. if (_vac1Timer.IsRunning)
  318. _vac1Timer.Stop();
  319. }
  320. }
  321. private void MonitorVAC2()
  322. {
  323. if (_vac2Timer == null)
  324. _vac2Timer = new Stopwatch();
  325. if (ValveAV9.Status)
  326. {
  327. _vac2 = false;
  328. if (_vac2Timer.IsRunning)
  329. _vac2Timer.Stop();
  330. }
  331. if (!ValveAV9.Status &&
  332. !ValveAV16.Status &&
  333. !ValveAV20.Status &&
  334. !ValveAV24.Status &&
  335. ValveAV12.Status &&
  336. ValveAV14.Status &&
  337. ValveAV28.Status &&
  338. ValveAV29.Status &&
  339. ValveAV36.Status &&
  340. ValveAV37.Status &&
  341. ValveAV81.Status &&
  342. ValveAV71.Status &&
  343. (APC.ModeFeedback == 0 || APC.ModeFeedback == 6) &&//0=idle;6=full open
  344. SensorVG11Status.Value && !AlarmSignalVG11HighAlarm.Value)
  345. {
  346. if (!_vac2Timer.IsRunning)
  347. _vac2Timer.Restart();
  348. if (_vac2Timer.ElapsedMilliseconds > _vac2PumpTimeS * 1000)
  349. _vac2 = true;
  350. }
  351. else
  352. {
  353. if (_vac2Timer.IsRunning)
  354. _vac2Timer.Stop();
  355. }
  356. }
  357. private void MonitorVAC3()
  358. {
  359. if (_vac3Timer == null)
  360. _vac3Timer = new Stopwatch();
  361. if (ValveAV16.Status || ValveAV20.Status)
  362. {
  363. _vac3 = false;
  364. if (_vac3Timer.IsRunning)
  365. _vac3Timer.Stop();
  366. }
  367. if (!ValveAV9.Status &&
  368. !ValveAV16.Status &&
  369. !ValveAV20.Status &&
  370. !ValveAV24.Status &&
  371. ValveAV18.Status &&
  372. ValveAV22.Status &&
  373. ValveAV38.Status &&
  374. ValveAV39.Status &&
  375. ValveAV82.Status &&
  376. ValveAV71.Status &&
  377. (APC.ModeFeedback == 0 || APC.ModeFeedback == 6) &&//0=idle;6=full open
  378. SensorVG11Status.Value && !AlarmSignalVG11HighAlarm.Value)
  379. {
  380. if (!_vac3Timer.IsRunning)
  381. _vac3Timer.Restart();
  382. if (_vac3Timer.ElapsedMilliseconds > _vac3PumpTimeS * 1000)
  383. _vac3 = true;
  384. }
  385. else
  386. {
  387. if (_vac3Timer.IsRunning)
  388. _vac3Timer.Stop();
  389. }
  390. }
  391. }
  392. }