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- using Aitex.Core.Common.DeviceData;
- using Aitex.Core.RT.Device;
- using Aitex.Core.RT.Device.Unit;
- using Aitex.Core.RT.Event;
- using Aitex.Core.Util;
- using Aitex.Core.Utilities;
- using MECF.Framework.Common.Event;
- using System;
- using System.Collections.Generic;
- using System.Linq;
- using System.Reflection;
- using MECF.Framework.Common.SubstrateTrackings;
- using Aitex.Core.Common;
- using FurnaceRT.Equipments.Systems;
- using Aitex.Core.RT.IOCore;
- using MECF.Framework.Common.Equipment;
- using MECF.Framework.RT.Core.IoProviders;
- using MECF.Framework.Common.Device.Bases;
- using FurnaceRT.Equipments.Boats;
- using IoHeater = FurnaceRT.Devices.IoHeater;
- using IoPressureMeter = FurnaceRT.Devices.IoPressureMeter;
- using FurnaceRT.Devices;
- using Aitex.Core.RT.Log;
- using FurnaceRT.Equipments.PMs.Devices;
- using Aitex.Core.RT.SCCore;
- using static Aitex.Core.RT.Device.Unit.IoBoat;
- using MECF.Framework.Common.CommonData.SorterDefines;
- using System.Windows;
- namespace FurnaceRT.Equipments.PMs
- {
- public partial class PMModule
- {
- // -------------------------------------------------------------------------
- #region AlarmSignal
- [Tag("AlarmSignalO2ConcentrationHI")]
- public IoAlarmSignal AlarmSignalO2ConcentrationHI { get; set; }
- [Tag("AlarmSignalO2ConcentrationLow")]
- public IoAlarmSignal AlarmSignalO2ConcentrationLow { get; set; }
- [Tag("AlarmSignalO2ConcentrationEcho1")]
- public IoAlarmSignal AlarmSignalO2ConcentrationEcho1 { get; set; }
- [Tag("AlarmSignalO2ConcentrationEcho2")]
- public IoAlarmSignal AlarmSignalO2ConcentrationEcho2 { get; set; }
- [Tag("AlarmSignalSMK1DetectorSensorOperates")]
- public IoAlarmSignal AlarmSignalSMK1DetectorSensorOperates { get; set; }
- [Tag("AlarmSignalSMK1DetectorSensorFireAlarm")]
- public IoAlarmSignal AlarmSignalSMK1DetectorSensorFireAlarm { get; set; }
- [Tag("AlarmSignalSMK1DetectorSensorFault")]
- public IoAlarmSignal AlarmSignalSMK1DetectorSensorFault { get; set; }
- [Tag("AlarmSignalHCLGasLeak1stAlarm")]
- public IoAlarmSignal AlarmSignalHCLGasLeak1stAlarm { get; set; }
- [Tag("AlarmSignalHCLGasLeak2ndAlarm")]
- public IoAlarmSignal AlarmSignalHCLGasLeak2ndAlarm { get; set; }
- [Tag("AlarmSignalNH3GasLeak1stAlarm")]
- public IoAlarmSignal AlarmSignalNH3GasLeak1stAlarm { get; set; }
- [Tag("AlarmSignalNH3GasLeak2ndAlarm")]
- public IoAlarmSignal AlarmSignalNH3GasLeak2ndAlarm { get; set; }
- [Tag("AlarmSignalF2GasLeak1stAlarm")]
- public IoAlarmSignal AlarmSignalF2GasLeak1stAlarm { get; set; }
- [Tag("AlarmSignalF2GasLeak2ndAlarm")]
- public IoAlarmSignal AlarmSignalF2GasLeak2ndAlarm { get; set; }
- [Tag("AlarmSignalGasLeakFault")]
- public IoAlarmSignal AlarmSignalGasLeakFault { get; set; }
- [Tag("AlarmSignalTS34RotationTempSW")]
- public IoAlarmSignal AlarmSignalTS34RotationTempSW { get; set; }
- [Tag("AlarmSignalTS30CapInsideTempSW")]
- public IoAlarmSignal AlarmSignalTS30CapInsideTempSW { get; set; }
- [Tag("AlarmSignalTS31CapOutsideTempSW")]
- public IoAlarmSignal AlarmSignalTS31CapOutsideTempSW { get; set; }
- [Tag("AlarmSignalGasBoxLowerDoorSW")]
- public IoAlarmSignal AlarmSignalGasBoxLowerDoorSW { get; set; }
- [Tag("AlarmSignalGasBoxUpperDoorSW")]
- public IoAlarmSignal AlarmSignalGasBoxUpperDoorSW { get; set; }
- [Tag("AlarmSignalEXHBoxWaterLeak")]
- public IoAlarmSignal AlarmSignalEXHBoxWaterLeak { get; set; }
- [Tag("AlarmSignalOPPanelEMO1")]
- public IoAlarmSignal AlarmSignalOPPanelEMO1 { get; set; }
- [Tag("AlarmSignalOPPanelEMO2")]
- public IoAlarmSignal AlarmSignalOPPanelEMO2 { get; set; }
- [Tag("AlarmSignalMainFurnaceCellingTS306")]
- public IoAlarmSignal AlarmSignalMainFurnaceCellingTS306 { get; set; }
- [Tag("AlarmSignalHeaterRoomSWS11S12")]
- public IoAlarmSignal AlarmSignalHeaterRoomSWS11S12 { get; set; }
- [Tag("AlarmSignalFilterBox1DoorSwitch")]
- public IoAlarmSignal AlarmSignalFilterBox1DoorSwitch { get; set; }
- [Tag("AlarmSignalLABacksideDoorSwitch")]
- public IoAlarmSignal AlarmSignalLABacksideDoorSwitch { get; set; }
- [Tag("AlarmSignalRHCTS305")]
- public IoAlarmSignal AlarmSignalRHCTS305 { get; set; }
- [Tag("AlarmSignalGasBoxExhaust1stAlarmMS2")]
- public IoAlarmSignal AlarmSignalGasBoxExhaust1stAlarmMS2 { get; set; }
- [Tag("AlarmSignalGasBoxExhaust2ndAlarmMS2")]
- public IoAlarmSignal AlarmSignalGasBoxExhaust2ndAlarmMS2 { get; set; }
- [Tag("AlarmSignalMachineEMO1")]
- public IoAlarmSignal AlarmSignalMachineEMO1 { get; set; }
- [Tag("AlarmSignalMachineEMO2")]
- public IoAlarmSignal AlarmSignalMachineEMO2 { get; set; }
- [Tag("AlarmSignalT101TempStatus")]
- public IoAlarmSignal AlarmSignalT101TempStatus { get; set; }
- [Tag("AlarmSignalT102TempStatus")]
- public IoAlarmSignal AlarmSignalT102TempStatus { get; set; }
- [Tag("AlarmSignalT103TempStatus")]
- public IoAlarmSignal AlarmSignalT103TempStatus { get; set; }
- [Tag("AlarmSignalBufferMotorHardwareInterlockAlarm")]
- public IoAlarmSignal AlarmSignalBufferMotorHardwareInterlockAlarm { get; set; }
- [Tag("AlarmSignalBoatLiftMotorHardwareInterlockAlarm")]
- public IoAlarmSignal AlarmSignalBoatLiftMotorHardwareInterlockAlarm { get; set; }
- [Tag("AlarmSignalHFReconciliationPressureMinAbnormal")]
- public IoAlarmSignal AlarmSignalHFReconciliationPressureMinAbnormal { get; set; }
- [Tag("AlarmSignalMagneticFluidLeak")]
- public IoAlarmSignal AlarmSignalMagneticFluidLeak { get; set; }
- [Tag("AlarmSignalCoolingWaterLeak")]
- public IoAlarmSignal AlarmSignalCoolingWaterLeak { get; set; }
- [Tag("AlarmSignalMachineEMS1")]
- public IoAlarmSignal AlarmSignalMachineEMS1 { get; set; }
- [Tag("AlarmSignalMachineEMS2")]
- public IoAlarmSignal AlarmSignalMachineEMS2 { get; set; }
- [Tag("AlarmSignalFBLightCurtainFault")]
- public IoAlarmSignal AlarmSignalFBLightCurtainFault { get; set; }
- [Tag("AlarmSignalFBLightCurtainOSSD1")]
- public IoAlarmSignal AlarmSignalFBLightCurtainOSSD1 { get; set; }
- [Tag("AlarmSignalFBLightCurtainOSSD2")]
- public IoAlarmSignal AlarmSignalFBLightCurtainOSSD2 { get; set; }
- [Tag("AlarmSignalFBEMO1")]
- public IoAlarmSignal AlarmSignalFBEMO1 { get; set; }
- [Tag("AlarmSignalFBEMO2")]
- public IoAlarmSignal AlarmSignalFBEMO2 { get; set; }
- [Tag("AlarmSignalDoorOverride")]
- public IoAlarmSignal AlarmSignalDoorOverride { get; set; }
- [Tag("AlarmSignalFBFrontDoorSwitch")]
- public IoAlarmSignal AlarmSignalFBFrontDoorSwitch { get; set; }
- [Tag("AlarmSignalGLBoxPG1CNT1Alarm")]
- public IoAlarmSignal AlarmSignalGLBoxPG1CNT1Alarm { get; set; }
- [Tag("AlarmSignalGLBoxPG1CNT2Alarm")]
- public IoAlarmSignal AlarmSignalGLBoxPG1CNT2Alarm { get; set; }
- [Tag("AlarmSignalGLBoxPG2CNT1Alarm")]
- public IoAlarmSignal AlarmSignalGLBoxPG2CNT1Alarm { get; set; }
- [Tag("AlarmSignalGLBoxPG2CNT2Alarm")]
- public IoAlarmSignal AlarmSignalGLBoxPG2CNT2Alarm { get; set; }
- [Tag("AlarmSignalGLBoxPG3CNT1Alarm")]
- public IoAlarmSignal AlarmSignalGLBoxPG3CNT1Alarm { get; set; }
- [Tag("AlarmSignalGLBoxPG3CNT2Alarm")]
- public IoAlarmSignal AlarmSignalGLBoxPG3CNT2Alarm { get; set; }
- [Tag("AlarmSignalGLBoxPG4CNT1Alarm")]
- public IoAlarmSignal AlarmSignalGLBoxPG4CNT1Alarm { get; set; }
- [Tag("AlarmSignalGLBoxPG4CNT2Alarm")]
- public IoAlarmSignal AlarmSignalGLBoxPG4CNT2Alarm { get; set; }
- [Tag("AlarmSignalGLBoxPG5CNT1Alarm")]
- public IoAlarmSignal AlarmSignalGLBoxPG5CNT1Alarm { get; set; }
- [Tag("AlarmSignalGLBoxPG5CNT2Alarm")]
- public IoAlarmSignal AlarmSignalGLBoxPG5CNT2Alarm { get; set; }
- [Tag("AlarmSignalGLBoxPG6CNT1Alarm")]
- public IoAlarmSignal AlarmSignalGLBoxPG6CNT1Alarm { get; set; }
- [Tag("AlarmSignalGLBoxPG6CNT2Alarm")]
- public IoAlarmSignal AlarmSignalGLBoxPG6CNT2Alarm { get; set; }
- [Tag("AlarmSignalGLBoxVG21Status")]
- public IoAlarmSignal AlarmSignalGLBoxVG21Output1 { get; set; }
- [Tag("AlarmSignalGLBoxVG21Output2")]
- public IoAlarmSignal AlarmSignalGLBoxVG21Output2 { get; set; }
- [Tag("AlarmSignalGLBoxVG22Output1")]
- public IoAlarmSignal AlarmSignalGLBoxVG22Output1 { get; set; }
- [Tag("AlarmSignalGLBoxVG22Output2")]
- public IoAlarmSignal AlarmSignalGLBoxVG22Output2 { get; set; }
- [Tag("AlarmSignalGLBoxVG32Output1")]
- public IoAlarmSignal AlarmSignalGLBoxVG32Output1 { get; set; }
- [Tag("AlarmSignalGLBoxVG32Output2")]
- public IoAlarmSignal AlarmSignalGLBoxVG32Output2 { get; set; }
- [Tag("AlarmSignalGLBoxVG33Output1")]
- public IoAlarmSignal AlarmSignalGLBoxVG33Output1 { get; set; }
- [Tag("AlarmSignalGLBoxVG33Output2")]
- public IoAlarmSignal AlarmSignalGLBoxVG33Output2 { get; set; }
- [Tag("AlarmSignalHeatingExhaust1stAlarmMS1")]
- public IoAlarmSignal AlarmSignalHeatingExhaust1stAlarmMS1 { get; set; }
- [Tag("AlarmSignalHeatingExhaust2ndAlarmMS1")]
- public IoAlarmSignal AlarmSignalHeatingExhaust2ndAlarmMS1 { get; set; }
- [Tag("AlarmSignalScavengeExhaust1stAlarmMS3")]
- public IoAlarmSignal AlarmSignalScavengeExhaust1stAlarmMS3 { get; set; }
- [Tag("AlarmSignalScavengeExhaust2ndAlarmMS3")]
- public IoAlarmSignal AlarmSignalScavengeExhaust2ndAlarmMS3 { get; set; }
- [Tag("AlarmSignalValveBoxExhaust1stAlarmMS4")]
- public IoAlarmSignal AlarmSignalValveBoxExhaust1stAlarmMS4 { get; set; }
- [Tag("AlarmSignalValveBoxExhaust2ndAlarmMS4")]
- public IoAlarmSignal AlarmSignalValveBoxExhaust2ndAlarmMS4 { get; set; }
- [Tag("AlarmSignalLoadingAreaExhaust1stAlarmMS5")]
- public IoAlarmSignal AlarmSignalLoadingAreaExhaust1stAlarmMS5 { get; set; }
- [Tag("AlarmSignalLoadingAreaExhaust2ndAlarmMS5")]
- public IoAlarmSignal AlarmSignalLoadingAreaExhaust2ndAlarmMS5 { get; set; }
- [Tag("AlarmSignalFrontBodyExhaust1stAlarmMS6")]
- public IoAlarmSignal AlarmSignalFrontBodyExhaust1stAlarmMS6 { get; set; }
- [Tag("AlarmSignalFrontBodyExhaust2ndAlarmMS6")]
- public IoAlarmSignal AlarmSignalFrontBodyExhaust2ndAlarmMS6 { get; set; }
- [Tag("AlarmSignalLAExhaust1stAlarmMS7")]
- public IoAlarmSignal AlarmSignalLAExhaust1stAlarmMS7 { get; set; }
- [Tag("AlarmSignalLAExhaust2ndAlarmMS7")]
- public IoAlarmSignal AlarmSignalLAExhaust2ndAlarmMS7 { get; set; }
- [Tag("AlarmSignalRHC1stAlarmMS8")]
- public IoAlarmSignal AlarmSignalRHC1stAlarmMS8 { get; set; }
- [Tag("AlarmSignalRHC2ndAlarmMS8")]
- public IoAlarmSignal AlarmSignalRHC2ndAlarmMS8 { get; set; }
- [Tag("AlarmSignalREV1stAlarmMS9")]
- public IoAlarmSignal AlarmSignalREV1stAlarmMS9 { get; set; }
- [Tag("AlarmSignalREV2ndAlarmMS9")]
- public IoAlarmSignal AlarmSignalREV2ndAlarmMS9 { get; set; }
- [Tag("AlarmSignalREV1stAlarmMS10")]
- public IoAlarmSignal AlarmSignalREV1stAlarmMS10 { get; set; }
- [Tag("AlarmSignalREV2ndAlarmMS10")]
- public IoAlarmSignal AlarmSignalREV2ndAlarmMS10 { get; set; }
- [Tag("AlarmSignalOPBoxPS11Out1")]
- public IoAlarmSignal AlarmSignalOPBoxPS11Out1 { get; set; }
- [Tag("AlarmSignalOPBoxPS11Out2")]
- public IoAlarmSignal AlarmSignalOPBoxPS11Out2 { get; set; }
- [Tag("AlarmSignalRHCFlowAlarmFL901")]
- public IoAlarmSignal AlarmSignalRHCFlowAlarmFL901 { get; set; }
- [Tag("AlarmSignalCoolingWaterFlowAlarmOfFurnaceFL902")]
- public IoAlarmSignal AlarmSignalCoolingWaterFlowAlarmOfFurnaceFL902 { get; set; }
- [Tag("AlarmSignalCoolingWaterFlowAlarmOfShuttleFL903")]
- public IoAlarmSignal AlarmSignalCoolingWaterFlowAlarmOfShuttleFL903 { get; set; }
- [Tag("AlarmSignalCoolingWaterFlowAlarmOfBoatRotationFL904")]
- public IoAlarmSignal AlarmSignalCoolingWaterFlowAlarmOfBoatRotationFL904 { get; set; }
- [Tag("AlarmSignalCoolingWaterFlowAlarmOfFlangeFL905")]
- public IoAlarmSignal AlarmSignalCoolingWaterFlowAlarmOfFlangeFL905 { get; set; }
- [Tag("AlarmSignalCoolingWaterFlowAlarmOfLoadingAreaFL906")]
- public IoAlarmSignal AlarmSignalCoolingWaterFlowAlarmOfLoadingAreaFL906 { get; set; }
- [Tag("AlarmSignalVG11LowAlarm")]
- public IoAlarmSignal AlarmSignalVG11LowAlarm { get; set; }
- [Tag("AlarmSignalVG11HighAlarm")]
- public IoAlarmSignal AlarmSignalVG11HighAlarm { get; set; }
- [Tag("AlarmSignalVG12LowAlarm")]
- public IoAlarmSignal AlarmSignalVG12LowAlarm { get; set; }
- [Tag("AlarmSignalVG12HighAlarm")]
- public IoAlarmSignal AlarmSignalVG12HighAlarm { get; set; }
- [Tag("AlarmSignalVG13LowAlarm")]
- public IoAlarmSignal AlarmSignalVG13LowAlarm { get; set; }
- [Tag("AlarmSignalVG13HighAlarm")]
- public IoAlarmSignal AlarmSignalVG13HighAlarm { get; set; }
- [Tag("AlarmSignalPG12OUT1")]
- public IoAlarmSignal AlarmSignalPG12OUT1 { get; set; }
- [Tag("AlarmSignalPG12OUT2")]
- public IoAlarmSignal AlarmSignalPG12OUT2 { get; set; }
- [Tag("AlarmSignalPG13OUT1")]
- public IoAlarmSignal AlarmSignalPG13OUT1 { get; set; }
- [Tag("AlarmSignalPG13OUT2")]
- public IoAlarmSignal AlarmSignalPG13OUT2 { get; set; }
- [Tag("AlarmSignalPS14OUT1")]
- public IoAlarmSignal AlarmSignalPS14OUT1 { get; set; }
- [Tag("AlarmSignalPS14OUT2")]
- public IoAlarmSignal AlarmSignalPS14OUT2 { get; set; }
- [Tag("AlarmSignalCoolingWaterPressureOut1")]
- public IoAlarmSignal AlarmSignalCoolingWaterPressureOut1 { get; set; }
- [Tag("AlarmSignalCoolingWaterPressureOut2")]
- public IoAlarmSignal AlarmSignalCoolingWaterPressureOut2 { get; set; }
- [Tag("AlarmSignalAirFlowFL70")]
- public IoAlarmSignal AlarmSignalAirFlowFL70 { get; set; }
- [Tag("AlarmSignalAirFlowFL71")]
- public IoAlarmSignal AlarmSignalAirFlowFL71 { get; set; }
- [Tag("AlarmSignalAirFlowFL72")]
- public IoAlarmSignal AlarmSignalAirFlowFL72 { get; set; }
- [Tag("AlarmSignalWaterFlowFL62")]
- public IoAlarmSignal AlarmSignalWaterFlowFL62 { get; set; }
- [Tag("AlarmSignalUPSFault")]
- public IoAlarmSignal AlarmSignalUPSFault { get; set; }
- [Tag("AlarmSignalUPSAlarm")]
- public IoAlarmSignal AlarmSignalUPSAlarm { get; set; }
- [Tag("AlarmSignalK141UPSAlarm")]
- public IoAlarmSignal AlarmSignalK141UPSAlarm { get; set; }
- [Tag("AlarmSignalK169UPSAlarm")]
- public IoAlarmSignal AlarmSignalK169UPSAlarm { get; set; }
- [Tag("AlarmSignalN2PurgeBOXPG14CNT1")]
- public IoAlarmSignal AlarmSignalN2PurgeBOXPG14CNT1 { get; set; }
- [Tag("AlarmSignalN2PurgeBOXPG14CNT2")]
- public IoAlarmSignal AlarmSignalN2PurgeBOXPG14CNT2 { get; set; }
- [Tag("AlarmSignalN2PurgeBOXPG15CNT1")]
- public IoAlarmSignal AlarmSignalN2PurgeBOXPG15CNT1 { get; set; }
- [Tag("AlarmSignalN2PurgeBOXPG15CNT2")]
- public IoAlarmSignal AlarmSignalN2PurgeBOXPG15CNT2 { get; set; }
- [Tag("AlarmSignalN2PurgeBOXPG16CNT1")]
- public IoAlarmSignal AlarmSignalN2PurgeBOXPG16CNT1 { get; set; }
- [Tag("AlarmSignalN2PurgeBOXPG16CNT2")]
- public IoAlarmSignal AlarmSignalN2PurgeBOXPG16CNT2 { get; set; }
- [Tag("AlarmSignalN2PurgeBOXPG70CNT1")]
- public IoAlarmSignal AlarmSignalN2PurgeBOXPG70CNT1 { get; set; }
- [Tag("AlarmSignalN2PurgeBOXPG70CNT2")]
- public IoAlarmSignal AlarmSignalN2PurgeBOXPG70CNT2 { get; set; }
- [Tag("AlarmSignalPS17ValueLowLimitAlarm")]
- public IoAlarmSignal AlarmSignalPS17ValueLowLimitAlarm { get; set; }
- [Tag("AlarmSignalVaccumPumpWarning")]
- public IoAlarmSignal AlarmSignalVaccumPumpWarning { get; set; }
- [Tag("AlarmSignalVaccumPumpAlarm")]
- public IoAlarmSignal AlarmSignalVaccumPumpAlarm { get; set; }
- [Tag("AlarmSignalFilterBox1Fan1Alarm")]
- public IoAlarmSignal AlarmSignalFilterBox1Fan1Alarm { get; set; }
- [Tag("AlarmSignalFilterBox1Fan2Alarm")]
- public IoAlarmSignal AlarmSignalFilterBox1Fan2Alarm { get; set; }
- [Tag("AlarmSignalStepperMotorAlarm")]
- public IoAlarmSignal AlarmSignalStepperMotorAlarm { get; set; }
- [Tag("AlarmSignalRFAlarm")]
- public IoAlarmSignal AlarmSignalRFAlarm { get; set; }
- [Tag("AlarmSignalForelineHeaterJacketLightAlarm")]
- public IoAlarmSignal AlarmSignalForelineHeaterJacketLightAlarm { get; set; }
- [Tag("AlarmSignalForelineHeaterJacketHeavyAlarm")]
- public IoAlarmSignal AlarmSignalForelineHeaterJacketHeavyAlarm { get; set; }
- [Tag("AlarmSignalScrubberWarning")]
- public IoAlarmSignal AlarmSignalScrubberWarning { get; set; }
- [Tag("AlarmSignalScrubberAlarm")]
- public IoAlarmSignal AlarmSignalScrubberAlarm { get; set; }
- [Tag("AlarmSignalNegLmtPosBoatZAxis")]
- public IoAlarmSignal AlarmSignalNegLmtPosBoatZAxis { get; set; }
- [Tag("AlarmSignalPotLmtPosBoatZAxis")]
- public IoAlarmSignal AlarmSignalPotLmtPosBoatZAxis { get; set; }
- [Tag("AlarmSignalLAFFUCommAlarm")]
- public IoAlarmSignal AlarmSignalLAFFUCommAlarm { get; set; }
- [Tag("AlarmSignaAPCCommAlarm")]
- public IoAlarmSignal AlarmSignaAPCCommAlarm { get; set; }
- [Tag("AlarmSignalMINI8CommAlarm")]
- public IoAlarmSignal AlarmSignalMINI8CommAlarm { get; set; }
- [Tag("AlarmSignaMainWaterFlowAlarm")]
- public IoAlarmSignal AlarmSignaMainWaterFlowAlarm { get; set; }
- [Tag("AlarmSignalFurnaceMainCircuitBreakerStatusMonitor")]
- public IoAlarmSignal AlarmSignalFurnaceMainCircuitBreakerStatusMonitor { get; set; }
- [Tag("AlarmSignalPumpDown")]
- public IoAlarmSignal AlarmSignalPumpDown { get; set; }
- [Tag("AlarmSignalPS13HStatus")]
- public IoAlarmSignal AlarmSignalPS13HStatus { get; set; }
- [Tag("AlarmSignalPS13LStatus")]
- public IoAlarmSignal AlarmSignalPS13LStatus { get; set; }
- [Tag("AlarmSignalFFU1DataWriteError")]
- public IoAlarmSignal AlarmSignalFFU1DataWriteError { get; set; }
- [Tag("AlarmSignalFFU2DataWriteError")]
- public IoAlarmSignal AlarmSignalFFU2DataWriteError { get; set; }
- [Tag("AlarmSignalFFU3DataWriteError")]
- public IoAlarmSignal AlarmSignalFFU3DataWriteError { get; set; }
- [Tag("AlarmSignalFFU4DataWriteError")]
- public IoAlarmSignal AlarmSignalFFU4DataWriteError { get; set; }
- [Tag("AlarmSignalFFU5DataWriteError")]
- public IoAlarmSignal AlarmSignalFFU5DataWriteError { get; set; }
- [Tag("AlarmSignalFFU6DataWriteError")]
- public IoAlarmSignal AlarmSignalFFU6DataWriteError { get; set; }
- [Tag("AlarmSignalFFU7DataWriteError")]
- public IoAlarmSignal AlarmSignalFFU7DataWriteError { get; set; }
- [Tag("AlarmSignalFFU8DataWriteError")]
- public IoAlarmSignal AlarmSignalFFU8DataWriteError { get; set; }
- [Tag("AlarmSignalFFU9DataWriteError")]
- public IoAlarmSignal AlarmSignalFFU9DataWriteError { get; set; }
- [Tag("AlarmSignalDG1Output1")]
- public IoAlarmSignal AlarmSignalDG1Output1 { get; set; }
- [Tag("AlarmSignalDG1Output2")]
- public IoAlarmSignal AlarmSignalDG1Output2 { get; set; }
- [Tag("AlarmSignalAV91_1RHCAirInOpened")]
- public IoAlarmSignal AlarmSignalAV91_1RHCAirInOpened { get; set; }
- [Tag("AlarmSignalAV91_2RHCAirInOpened")]
- public IoAlarmSignal AlarmSignalAV91_2RHCAirInOpened { get; set; }
- [Tag("AlarmSignalAV91_3RHCAirInOpened")]
- public IoAlarmSignal AlarmSignalAV91_3RHCAirInOpened { get; set; }
- [Tag("AlarmSignalAV91_4RHCAirInOpened")]
- public IoAlarmSignal AlarmSignalAV91_4RHCAirInOpened { get; set; }
- [Tag("AlarmSignalBlowerPower")]
- public IoAlarmSignal AlarmSignalBlowerPower { get; set; }
- [Tag("AlarmSignalRFSetPowerReached")]
- public IoAlarmSignal AlarmSignalRFSetPowerReached { get; set; }
- [Tag("AlarmSignalN2FlowInFOUPAbnormal")]
- public IoAlarmSignal AlarmSignalN2FlowInFOUPAbnormal { get; set; }
- [Tag("AlarmSignalCapHeaterAbnormal")]
- public IoAlarmSignal AlarmSignalCapHeaterAbnormal { get; set; }
- [Tag("AlarmSignalHeaterUOverTemp")]
- public IoAlarmSignal AlarmSignalHeaterUOverTemp { get; set; }
- [Tag("AlarmSignalHeaterCUOverTemp")]
- public IoAlarmSignal AlarmSignalHeaterCUOverTemp { get; set; }
- [Tag("AlarmSignalHeaterCOverTemp")]
- public IoAlarmSignal AlarmSignalHeaterCOverTemp { get; set; }
- [Tag("AlarmSignalHeaterCLOverTemp")]
- public IoAlarmSignal AlarmSignalHeaterCLOverTemp { get; set; }
- [Tag("AlarmSignalHeaterLOverTemp")]
- public IoAlarmSignal AlarmSignalHeaterLOverTemp { get; set; }
- [Tag("AlarmSignaBoatRAxisAlarm")]
- public IoAlarmSignal AlarmSignaBoatRAxisAlarm { get; set; }
- [Tag("AlarmSignaBoatRAxisWarning")]
- public IoAlarmSignal AlarmSignaBoatRAxisWarning { get; set; }
- [Tag("AlarmSignaBoatZAxisWarning")]
- public IoAlarmSignal AlarmSignaBoatZAxisWarning { get; set; }
- [Tag("AlarmSignaBoatZAxisAlarm")]
- public IoAlarmSignal AlarmSignaBoatZAxisAlarm { get; set; }
- [Tag("AlarmSignaGasHeaterSensorBreakOutAlarm")]
- public IoAlarmSignal AlarmSignaGasHeaterSensorBreakOutAlarm { get; set; }
- [Tag("AlarmSignaTempLimitAlarm")]
- public IoAlarmSignal AlarmSignaTempLimitAlarm { get; set; }
- [Tag("AlarmSignalLAO2CheckOTWarning")]
- public IoAlarmSignal AlarmSignalLAO2CheckOTWarning { get; set; }
- [Tag("AlarmSignalFIMS1O2CheckOTWarning")]
- public IoAlarmSignal AlarmSignalFIMS1O2CheckOTWarning { get; set; }
- [Tag("AlarmSignalFIMS2O2CheckOTWarning")]
- public IoAlarmSignal AlarmSignalFIMS2O2CheckOTWarning { get; set; }
- [Tag("AlarmSignalHeaterUCascadePVSBrk")]
- public IoAlarmSignal AlarmSignalHeaterUCascadePVSBrk { get; set; }
- [Tag("AlarmSignalHeaterUHeaterPVSBrk")]
- public IoAlarmSignal AlarmSignalHeaterUHeaterPVSBrk { get; set; }
- [Tag("AlarmSignalHeaterCUCascadePVSBrk")]
- public IoAlarmSignal AlarmSignalHeaterCUCascadePVSBrk { get; set; }
- [Tag("AlarmSignalHeaterCUHeaterPVSBrk")]
- public IoAlarmSignal AlarmSignalHeaterCUHeaterPVSBrk { get; set; }
- [Tag("AlarmSignalHeaterCCascadePVSBrk")]
- public IoAlarmSignal AlarmSignalHeaterCCascadePVSBrk { get; set; }
- [Tag("AlarmSignalHeaterCHeaterPVSBrk")]
- public IoAlarmSignal AlarmSignalHeaterCHeaterPVSBrk { get; set; }
- [Tag("AlarmSignalHeaterCLCascadePVSBrk")]
- public IoAlarmSignal AlarmSignalHeaterCLCascadePVSBrk { get; set; }
- [Tag("AlarmSignalHeaterCLHeaterPVSBrk")]
- public IoAlarmSignal AlarmSignalHeaterCLHeaterPVSBrk { get; set; }
- [Tag("AlarmSignalHeaterLCascadePVSBrk")]
- public IoAlarmSignal AlarmSignalHeaterLCascadePVSBrk { get; set; }
- [Tag("AlarmSignalHeaterLHeaterPVSBrk")]
- public IoAlarmSignal AlarmSignalHeaterLHeaterPVSBrk { get; set; }
- [Tag("GasLine1AlarmSignalTempOutRange")]
- public IoAlarmSignal GasLine1AlarmSignalTempOutRange { get; set; }
- [Tag("GasLine2AlarmSignalTempOutRange")]
- public IoAlarmSignal GasLine2AlarmSignalTempOutRange { get; set; }
- [Tag("GasLine3AlarmSignalTempOutRange")]
- public IoAlarmSignal GasLine3AlarmSignalTempOutRange { get; set; }
- [Tag("GasLine4AlarmSignalTempOutRange")]
- public IoAlarmSignal GasLine4AlarmSignalTempOutRange { get; set; }
- [Tag("GasLine6AlarmSignalTempOutRange")]
- public IoAlarmSignal GasLine6AlarmSignalTempOutRange { get; set; }
- [Tag("GasLine7AlarmSignalTempOutRange")]
- public IoAlarmSignal GasLine7AlarmSignalTempOutRange { get; set; }
- [Tag("GasLine1AlarmSignalCLN")]
- public IoAlarmSignal GasLine1AlarmSignalCLN { get; set; }
- [Tag("GasLine2AlarmSignalCLN")]
- public IoAlarmSignal GasLine2AlarmSignalCLN { get; set; }
- [Tag("GasLine3AlarmSignalCLN")]
- public IoAlarmSignal GasLine3AlarmSignalCLN { get; set; }
- [Tag("GasLine4AlarmSignalCLN")]
- public IoAlarmSignal GasLine4AlarmSignalCLN { get; set; }
- [Tag("GasLine6AlarmSignalCLN")]
- public IoAlarmSignal GasLine6AlarmSignalCLN { get; set; }
- [Tag("GasLine7AlarmSignalCLN")]
- public IoAlarmSignal GasLine7AlarmSignalCLN { get; set; }
- [Tag("AlarmSignalHCL1GasLeak1stAlarm")]
- public IoAlarmSignal AlarmSignalHCL1GasLeak1stAlarm { get; set; }
- [Tag("AlarmSignalHCL1GasLeak2ndAlarm")]
- public IoAlarmSignal AlarmSignalHCL1GasLeak2ndAlarm { get; set; }
- [Tag("AlarmSignalHCL2GasLeak1stAlarm")]
- public IoAlarmSignal AlarmSignalHCL2GasLeak1stAlarm { get; set; }
- [Tag("AlarmSignalHCL2GasLeak2ndAlarm")]
- public IoAlarmSignal AlarmSignalHCL2GasLeak2ndAlarm { get; set; }
- [Tag("AlarmSignalNH31GasLeak1stAlarm")]
- public IoAlarmSignal AlarmSignalNH31GasLeak1stAlarm { get; set; }
- [Tag("AlarmSignalNH31GasLeak2ndAlarm")]
- public IoAlarmSignal AlarmSignalNH31GasLeak2ndAlarm { get; set; }
- [Tag("AlarmSignalNH32GasLeak1stAlarm")]
- public IoAlarmSignal AlarmSignalNH32GasLeak1stAlarm { get; set; }
- [Tag("AlarmSignalNH32GasLeak2ndAlarm")]
- public IoAlarmSignal AlarmSignalNH32GasLeak2ndAlarm { get; set; }
- [Tag("AlarmSignalF21GasLeak1stAlarm")]
- public IoAlarmSignal AlarmSignalF21GasLeak1stAlarm { get; set; }
- [Tag("AlarmSignalF21GasLeak2ndAlarm")]
- public IoAlarmSignal AlarmSignalF21GasLeak2ndAlarm { get; set; }
- [Tag("AlarmSignalF22GasLeak1stAlarm")]
- public IoAlarmSignal AlarmSignalF22GasLeak1stAlarm { get; set; }
- [Tag("AlarmSignalF22GasLeak2ndAlarm")]
- public IoAlarmSignal AlarmSignalF22GasLeak2ndAlarm { get; set; }
- [Tag("AlarmSignalNO1GasLeak1stAlarm")]
- public IoAlarmSignal AlarmSignalNO1GasLeak1stAlarm { get; set; }
- [Tag("AlarmSignalNO1GasLeak2ndAlarm")]
- public IoAlarmSignal AlarmSignalNO1GasLeak2ndAlarm { get; set; }
- [Tag("AlarmSignalNO2GasLeak1stAlarm")]
- public IoAlarmSignal AlarmSignalNO2GasLeak1stAlarm { get; set; }
- [Tag("AlarmSignalNO2GasLeak2ndAlarm")]
- public IoAlarmSignal AlarmSignalNO2GasLeak2ndAlarm { get; set; }
- [Tag("AlarmSignalC3H61GasLeak1stAlarm")]
- public IoAlarmSignal AlarmSignalC3H61GasLeak1stAlarm { get; set; }
- [Tag("AlarmSignalC3H61GasLeak2ndAlarm")]
- public IoAlarmSignal AlarmSignalC3H61GasLeak2ndAlarm { get; set; }
- [Tag("AlarmSignalC3H62GasLeak1stAlarm")]
- public IoAlarmSignal AlarmSignalC3H62GasLeak1stAlarm { get; set; }
- [Tag("AlarmSignalC3H62GasLeak2ndAlarm")]
- public IoAlarmSignal AlarmSignalC3H62GasLeak2ndAlarm { get; set; }
- [Tag("AlarmSignalDMA1GasLeak1stAlarm")]
- public IoAlarmSignal AlarmSignalDMA1GasLeak1stAlarm { get; set; }
- [Tag("AlarmSignalDMA1GasLeak2ndAlarm")]
- public IoAlarmSignal AlarmSignalDMA1GasLeak2ndAlarm { get; set; }
- [Tag("AlarmSignalDMA2GasLeak1stAlarm")]
- public IoAlarmSignal AlarmSignalDMA2GasLeak1stAlarm { get; set; }
- [Tag("AlarmSignalDMA2GasLeak2ndAlarm")]
- public IoAlarmSignal AlarmSignalDMA2GasLeak2ndAlarm { get; set; }
- [Tag("AlarmSignalGLBoxPG7CNT1Alarm")]
- public IoAlarmSignal AlarmSignalGLBoxPG7CNT1Alarm { get; set; }
- [Tag("AlarmSignalGLBoxPG7CNT2Alarm")]
- public IoAlarmSignal AlarmSignalGLBoxPG7CNT2Alarm { get; set; }
- [Tag("AlarmSignalGLBoxPG8CNT2Alarm")]
- public IoAlarmSignal AlarmSignalGLBoxPG8CNT2Alarm { get; set; }
- [Tag("AlarmSignalGLBoxPG9CNT2Alarm")]
- public IoAlarmSignal AlarmSignalGLBoxPG9CNT2Alarm { get; set; }
- [Tag("AlarmSignalHEXOverTemperatureAlarm")]
- public IoAlarmSignal AlarmSignalHEXOverTemperatureAlarm { get; set; }
- [Tag("AlarmSignalGLBoxPG21CNT1Alarm")]
- public IoAlarmSignal AlarmSignalGLBoxPG21CNT1Alarm { get; set; }
- [Tag("AlarmSignalGLBoxPG21CNT2Alarm")]
- public IoAlarmSignal AlarmSignalGLBoxPG21CNT2Alarm { get; set; }
- [Tag("AlarmSignalGLBoxPG22CNT1Alarm")]
- public IoAlarmSignal AlarmSignalGLBoxPG22CNT1Alarm { get; set; }
- [Tag("AlarmSignalGLBoxPG22CNT2Alarm")]
- public IoAlarmSignal AlarmSignalGLBoxPG22CNT2Alarm { get; set; }
- [Tag("AlarmSignalGLBoxPG23CNT1Alarm")]
- public IoAlarmSignal AlarmSignalGLBoxPG23CNT1Alarm { get; set; }
- [Tag("AlarmSignalGLBoxPG23CNT2Alarm")]
- public IoAlarmSignal AlarmSignalGLBoxPG23CNT2Alarm { get; set; }
- [Tag("AlarmSignalGLBoxPG24CNT1Alarm")]
- public IoAlarmSignal AlarmSignalGLBoxPG24CNT1Alarm { get; set; }
- [Tag("AlarmSignalGLBoxPG24CNT2Alarm")]
- public IoAlarmSignal AlarmSignalGLBoxPG24CNT2Alarm { get; set; }
- [Tag("AlarmSignalGLBoxPG25CNT1Alarm")]
- public IoAlarmSignal AlarmSignalGLBoxPG25CNT1Alarm { get; set; }
- [Tag("AlarmSignalGLBoxPG25CNT2Alarm")]
- public IoAlarmSignal AlarmSignalGLBoxPG25CNT2Alarm { get; set; }
- [Tag("AlarmSignalGLBoxPG31CNT1Alarm")]
- public IoAlarmSignal AlarmSignalGLBoxPG31CNT1Alarm { get; set; }
- [Tag("AlarmSignalGLBoxPG31CNT2Alarm")]
- public IoAlarmSignal AlarmSignalGLBoxPG31CNT2Alarm { get; set; }
- [Tag("AlarmSignalGLBoxPG32CNT1Alarm")]
- public IoAlarmSignal AlarmSignalGLBoxPG32CNT1Alarm { get; set; }
- [Tag("AlarmSignalGLBoxPG32CNT2Alarm")]
- public IoAlarmSignal AlarmSignalGLBoxPG32CNT2Alarm { get; set; }
- [Tag("AlarmSignalPG12CNT1Alarm")]
- public IoAlarmSignal AlarmSignalPG12CNT1Alarm { get; set; }
- [Tag("AlarmSignalPG12CNT2Alarm")]
- public IoAlarmSignal AlarmSignalPG12CNT2Alarm { get; set; }
- [Tag("AlarmSignalPG13CNT1Alarm")]
- public IoAlarmSignal AlarmSignalPG13CNT1Alarm { get; set; }
- [Tag("AlarmSignalPG13CNT2Alarm")]
- public IoAlarmSignal AlarmSignalPG13CNT2Alarm { get; set; }
- [Tag("AlarmSignalVaccum1PumpWarning")]
- public IoAlarmSignal AlarmSignalVaccum1PumpWarning { get; set; }
- [Tag("AlarmSignalVaccum1PumpAlarm")]
- public IoAlarmSignal AlarmSignalVaccum1PumpAlarm { get; set; }
- [Tag("AlarmSignalVaccum2PumpWarning")]
- public IoAlarmSignal AlarmSignalVaccum2PumpWarning { get; set; }
- [Tag("AlarmSignalVaccum2PumpAlarm")]
- public IoAlarmSignal AlarmSignalVaccum2PumpAlarm { get; set; }
- [Tag("AlarmSignalHotN2Alarm")]
- public IoAlarmSignal AlarmSignalHotN2Alarm { get; set; }
- [Tag("AlarmSignalLDS1MajorAlarm")]
- public IoAlarmSignal AlarmSignalLDS1MajorAlarm { get; set; }
- [Tag("AlarmSignalLDS1MinorWarning")]
- public IoAlarmSignal AlarmSignalLDS1MinorWarning { get; set; }
- [Tag("AlarmSignalLDS1liquidLowWarning")]
- public IoAlarmSignal AlarmSignalLDS1liquidLowWarning { get; set; }
- [Tag("AlarmSignalLDS1TankBlankAlarm")]
- public IoAlarmSignal AlarmSignalLDS1TankBlankAlarm { get; set; }
- [Tag("AlarmSignalLDS2MajorAlarm")]
- public IoAlarmSignal AlarmSignalLDS2MajorAlarm { get; set; }
- [Tag("AlarmSignalLDS2MinorWarning")]
- public IoAlarmSignal AlarmSignalLDS2MinorWarning { get; set; }
- [Tag("AlarmSignalLDS2LiquidLowWarning")]
- public IoAlarmSignal AlarmSignalLDS2LiquidLowWarning { get; set; }
- [Tag("AlarmSignalLDS2TankBlankAlarm")]
- public IoAlarmSignal AlarmSignalLDS2TankBlankAlarm { get; set; }
- [Tag("AlarmSignalPOD1FOUPVacuumSuckingAlarm")]
- public IoAlarmSignal AlarmSignalPOD1FOUPVacuumSuckingAlarm { get; set; }
- [Tag("AlarmSignalPOD2FOUPVacuumSuckingAlarm")]
- public IoAlarmSignal AlarmSignalPOD2FOUPVacuumSuckingAlarm { get; set; }
- [Tag("AlarmTS34RRotationTempSwAlarm")]
- public IoAlarmSignal AlarmTS34RRotationTempSwAlarm { get; set; }
- [Tag("AlarmTS30CapInsideTempSwAlarm")]
- public IoAlarmSignal AlarmTS30CapInsideTempSwAlarm { get; set; }
- [Tag("AlarmTS31capoutsidetemSwAlarm")]
- public IoAlarmSignal AlarmTS31capoutsidetemSwAlarm { get; set; }
- [Tag("AlarmGasboxlowerdoorSwAlarm")]
- public IoAlarmSignal AlarmGasboxlowerdoorSwAlarm { get; set; }
- [Tag("AlarmGasboxupperdoorSwAlarm")]
- public IoAlarmSignal AlarmGasboxupperdoorSwAlarm { get; set; }
- [Tag("AlarmEXHboxwaterleakAlarm")]
- public IoAlarmSignal AlarmEXHboxwaterleakAlarm { get; set; }
- [Tag("AlarmOPpanelEMO1Alarm")]
- public IoAlarmSignal AlarmOPpanelEMO1Alarm { get; set; }
- [Tag("AlarmOPpanelEMO2Alarm")]
- public IoAlarmSignal AlarmOPpanelEMO2Alarm { get; set; }
- [Tag("AlarmMainFurnaceTS306Alarm")]
- public IoAlarmSignal AlarmMainFurnaceTS306Alarm { get; set; }
- [Tag("AlarmHeaterRoomSWS11S12Alarm")]
- public IoAlarmSignal AlarmHeaterRoomSWS11S12Alarm { get; set; }
- [Tag("AlarmHeaterBbacksidePanelSWS112Alarm")]
- public IoAlarmSignal AlarmHeaterBbacksidePanelSWS112Alarm { get; set; }
- [Tag("AlarmRHCTS305Alarm")]
- public IoAlarmSignal AlarmRHCTS305Alarm { get; set; }
- [Tag("AlarmGasLeakFaultAlarm")]
- public IoAlarmSignal AlarmGasLeakFaultAlarm { get; set; }
- [Tag("AlarmMagneticFluidLeakAlarm")]
- public IoAlarmSignal AlarmMagneticFluidLeakAlarm { get; set; }
- [Tag("AlarmCoolingWaterLeakAlarm")]
- public IoAlarmSignal AlarmCoolingWaterLeakAlarm { get; set; }
- [Tag("AlarmLSCWaterLeakAlarm")]
- public IoAlarmSignal AlarmLSCWaterLeakAlarm { get; set; }
- [Tag("AlarmLABacksideDoorSwitchAlarm")]
- public IoAlarmSignal AlarmLABacksideDoorSwitchAlarm { get; set; }
- [Tag("AlarmSiSourceTANKHeater1INHIBITHIAlarm")]
- public IoAlarmSignal AlarmSiSourceTANKHeater1INHIBITHIAlarm { get; set; }
- [Tag("AlarmSiSourceTANKHeater1INHIBITLOWAlarm")]
- public IoAlarmSignal AlarmSiSourceTANKHeater1INHIBITLOWAlarm { get; set; }
- [Tag("AlarmSiSourceTANKHeater2INHIBITHIAlarm")]
- public IoAlarmSignal AlarmSiSourceTANKHeater2INHIBITHIAlarm { get; set; }
- [Tag("AlarmSiSourceTANKHeater2INHIBITLOWAlarm")]
- public IoAlarmSignal AlarmSiSourceTANKHeater2INHIBITLOWAlarm { get; set; }
- [Tag("AlarmSiSourceTANKHeater3INHIBITHIAlarm")]
- public IoAlarmSignal AlarmSiSourceTANKHeater3INHIBITHIAlarm { get; set; }
- [Tag("AlarmSiSourceTANKHeater3INHIBITLOWAlarm")]
- public IoAlarmSignal AlarmSiSourceTANKHeater3INHIBITLOWAlarm { get; set; }
- [Tag("AlarmSiSourceAVMFCHeaterINHIBITHIAlarm")]
- public IoAlarmSignal AlarmSiSourceAVMFCHeaterINHIBITHIAlarm { get; set; }
- [Tag("AlarmSiSourceAVMFCHeaterINHIBITLOWAlarm")]
- public IoAlarmSignal AlarmSiSourceAVMFCHeaterINHIBITLOWAlarm { get; set; }
- [Tag("AlarmCSourceTANKHeater1INHIBITHIAlarm")]
- public IoAlarmSignal AlarmCSourceTANKHeater1INHIBITHIAlarm { get; set; }
- [Tag("AlarmCSourceTANKHeater1INHIBITLOWAlarm")]
- public IoAlarmSignal AlarmCSourceTANKHeater1INHIBITLOWAlarm { get; set; }
- [Tag("AlarmCSourceTANKHeater2INHIBITHIAlarm")]
- public IoAlarmSignal AlarmCSourceTANKHeater2INHIBITHIAlarm { get; set; }
- [Tag("AlarmCSourceTANKHeater2INHIBITLOWAlarm")]
- public IoAlarmSignal AlarmCSourceTANKHeater2INHIBITLOWAlarm { get; set; }
- [Tag("AlarmCSourceTANKHeater3INHIBITHIAlarm")]
- public IoAlarmSignal AlarmCSourceTANKHeater3INHIBITHIAlarm { get; set; }
- [Tag("AlarmCSourceTANKHeater3INHIBITLOWAlarm")]
- public IoAlarmSignal AlarmCSourceTANKHeater3INHIBITLOWAlarm { get; set; }
- [Tag("AlarmCSourceAVMFCHeaterINHIBITHIAlarm")]
- public IoAlarmSignal AlarmCSourceAVMFCHeaterINHIBITHIAlarm { get; set; }
- [Tag("AlarmCSourceAVMFCHeaterINHIBITLOWAlarm")]
- public IoAlarmSignal AlarmCSourceAVMFCHeaterINHIBITLOWAlarm { get; set; }
- #endregion
- public AITSensorData SensorRecipeOK { get; set; }
- public AITSensorData SensorPROCManualOK { get; set; }
- [Tag("SensorVG11Status")]
- public IoSensor SensorVG11Status { get; set; }
- [Tag("SensorVG12Status")]
- public IoSensor SensorVG12Status { get; set; }
- [Tag("SensorVG13Status")]
- public IoSensor SensorVG13Status { get; set; }
- [Tag("SensorVACDEPOOK")]
- public IoSensor SensorVACDEPOOK { get; set; }
- [Tag("SensorVACHFOK")]
- public IoSensor SensorVACHFOK { get; set; }
- [Tag("SensorVACF2OK")]
- public IoSensor SensorVACF2OK { get; set; }
- [Tag("SensorO2DetectSideLA")]
- public IoSensor SensorO2DetectSideLA { get; set; }
- [Tag("SensorO2DetectSideFIMS1")]
- public IoSensor SensorO2DetectSideFIMS1 { get; set; }
- [Tag("SensorO2DetectSideFIMS2")]
- public IoSensor SensorO2DetectSideFIMS2 { get; set; }
- [Tag("SensorLADoorSw1")]
- public IoSensor SensorLADoorSw1 { get; set; }
- [Tag("SensorLADoorSw2")]
- public IoSensor SensorLADoorSw2 { get; set; }
- [Tag("SensorLADoorSw3")]
- public IoSensor SensorLADoorSw3 { get; set; }
- //[Tag("SensorNH3PressureOK")]
- //public IoAlarmSignal SignalLeak { get; set; }
- //[Tag("SignalExhaustAlarm")]
- //public IoAlarmSignal SignalExhaustAlarm { get; set; }
- //[Tag("SignalLeakBroken")]
- //public IoAlarmSignal SignalLeakBroken { get; set; }
- //[Tag("EmoAlarm")]
- //public IoAlarmSignal EmoAlarm { get; set; }
- // -------------------------------------------------------------------------
- //[Tag("ChamberLiftPin")]
- //public IoLift2 ChamberLiftPin { get; set; }
- // -------------------------------------------------------------------------
- //[Tag("ChamberDoor")]
- //public IoDoor2 ChamberDoor { get; set; }
- //[Tag("MFM61")]
- //public IoMFM MFM61 { get; set; }
- //[Tag("MfmNB")]
- //public IoMFM MfmNB { get; set; }
- [Tag("ValveAV1")]
- public IoValve ValveAV1 { get; set; }
- [Tag("ValveAV2")]
- public IoValve ValveAV2 { get; set; }
- [Tag("ValveAV3")]
- public IoValve ValveAV3 { get; set; }
- [Tag("ValveAV4")]
- public IoValve ValveAV4 { get; set; }
- [Tag("ValveAV5")]
- public IoValve ValveAV5 { get; set; }
- [Tag("ValveAV6")]
- public IoValve ValveAV6 { get; set; }
- [Tag("ValveAV7")]
- public IoValve ValveAV7 { get; set; }
- [Tag("ValveAV8")]
- public IoValve ValveAV8 { get; set; }
- [Tag("ValveAV9")]
- public IoValve ValveAV9 { get; set; }
- [Tag("ValveAV10")]
- public IoValve ValveAV10 { get; set; }
- [Tag("ValveAV11")]
- public IoValve ValveAV11 { get; set; }
- [Tag("ValveAV12")]
- public IoValve ValveAV12 { get; set; }
- [Tag("ValveAV13")]
- public IoValve ValveAV13 { get; set; }
- [Tag("ValveAV14")]
- public IoValve ValveAV14 { get; set; }
- [Tag("ValveAV15")]
- public IoValve ValveAV15 { get; set; }
- [Tag("ValveAV16")]
- public IoValve ValveAV16 { get; set; }
- [Tag("ValveAV17")]
- public IoValve ValveAV17 { get; set; }
- [Tag("ValveAV18")]
- public IoValve ValveAV18 { get; set; }
- [Tag("ValveAV19")]
- public IoValve ValveAV19 { get; set; }
- [Tag("ValveAV20")]
- public IoValve ValveAV20 { get; set; }
- [Tag("ValveAV21")]
- public IoValve ValveAV21 { get; set; }
- [Tag("ValveAV22")]
- public IoValve ValveAV22 { get; set; }
- [Tag("ValveAV23")]
- public IoValve ValveAV23 { get; set; }
- [Tag("ValveAV24")]
- public IoValve ValveAV24 { get; set; }
- [Tag("ValveAV25")]
- public IoValve ValveAV25 { get; set; }
- [Tag("ValveAV26")]
- public IoValve ValveAV26 { get; set; }
- [Tag("ValveAV27")]
- public IoValve ValveAV27 { get; set; }
- [Tag("ValveAV28")]
- public IoValve ValveAV28 { get; set; }
- [Tag("ValveAV29")]
- public IoValve ValveAV29 { get; set; }
- [Tag("ValveAV30")]
- public IoValve ValveAV30 { get; set; }
- [Tag("ValveAV31")]
- public IoValve ValveAV31 { get; set; }
- [Tag("ValveAV32")]
- public IoValve ValveAV32 { get; set; }
- [Tag("ValveAV33")]
- public IoValve ValveAV33 { get; set; }
- [Tag("ValveAV34")]
- public IoValve ValveAV34 { get; set; }
- [Tag("ValveAV35")]
- public IoValve ValveAV35 { get; set; }
- [Tag("ValveAV36")]
- public IoValve ValveAV36 { get; set; }
- [Tag("ValveAV37")]
- public IoValve ValveAV37 { get; set; }
- [Tag("ValveAV38")]
- public IoValve ValveAV38 { get; set; }
- [Tag("ValveAV39")]
- public IoValve ValveAV39 { get; set; }
- [Tag("ValveAV40")]
- public IoValve ValveAV40 { get; set; }
- [Tag("ValveAV41")]
- public IoValve ValveAV41 { get; set; }
- [Tag("ValveAV42")]
- public IoValve ValveAV42 { get; set; }
- [Tag("ValveAV43")]
- public IoValve ValveAV43 { get; set; }
- [Tag("ValveAV44")]
- public IoValve ValveAV44 { get; set; }
- [Tag("ValveAV45")]
- public IoValve ValveAV45 { get; set; }
- [Tag("ValveAV46")]
- public IoValve ValveAV46 { get; set; }
- [Tag("ValveAV47")]
- public IoValve ValveAV47 { get; set; }
- [Tag("ValveAV48")]
- public IoValve ValveAV48 { get; set; }
- [Tag("ValveAV49")]
- public IoValve ValveAV49 { get; set; }
- [Tag("ValveAV50")]
- public IoValve ValveAV50 { get; set; }
- [Tag("ValveAV51")]
- public IoValve ValveAV51 { get; set; }
- [Tag("ValveAV52")]
- public IoValve ValveAV52 { get; set; }
- [Tag("ValveAV53")]
- public IoValve ValveAV53 { get; set; }
- [Tag("ValveAV54")]
- public IoValve ValveAV54 { get; set; }
- [Tag("ValveAV55")]
- public IoValve ValveAV55 { get; set; }
- [Tag("ValveAV56")]
- public IoValve ValveAV56 { get; set; }
- [Tag("ValveAV57")]
- public IoValve ValveAV57 { get; set; }
- [Tag("ValveAV58")]
- public IoValve ValveAV58 { get; set; }
- [Tag("ValveAV59")]
- public IoValve ValveAV59 { get; set; }
- [Tag("ValveAV60")]
- public IoValve ValveAV60 { get; set; }
- [Tag("ValveAV61")]
- public IoValve ValveAV61 { get; set; }
- [Tag("ValveAV62")]
- public IoValve ValveAV62 { get; set; }
- [Tag("ValveAV63")]
- public IoValve ValveAV63 { get; set; }
- [Tag("ValveAV64")]
- public IoValve ValveAV64 { get; set; }
- [Tag("ValveAV65")]
- public IoValve ValveAV65 { get; set; }
- [Tag("ValveAV202LADoor")]
- public IoValve ValveAV202LADoor { get; set; }
- [Tag("ValveAV66")]
- public IoValve ValveAV66 { get; set; }
- [Tag("ValveAV67")]
- public IoValve ValveAV67 { get; set; }
- [Tag("ValveAV68")]
- public IoValve ValveAV68 { get; set; }
- [Tag("ValveAV69")]
- public IoValve ValveAV69 { get; set; }
- [Tag("ValveAV70")]
- public IoValve ValveAV70 { get; set; }
- [Tag("ValveAV71")]
- public IoValve ValveAV71 { get; set; }
- [Tag("ValveAV72")]
- public IoValve ValveAV72 { get; set; }
- [Tag("ValveAV73")]
- public IoValve ValveAV73 { get; set; }
- [Tag("ValveAV74")]
- public IoValve ValveAV74 { get; set; }
- [Tag("ValveAV75")]
- public IoValve ValveAV75 { get; set; }
- [Tag("ValveAV76")]
- public IoValve ValveAV76 { get; set; }
- [Tag("ValveAV77")]
- public IoValve ValveAV77 { get; set; }
- [Tag("ValveAV78")]
- public IoValve ValveAV78 { get; set; }
- [Tag("ValveAV79")]
- public IoValve ValveAV79 { get; set; }
- [Tag("ValveAV80")]
- public IoValve ValveAV80 { get; set; }
- [Tag("ValveAV81")]
- public IoValve ValveAV81 { get; set; }
- [Tag("ValveAV82")]
- public IoValve ValveAV82 { get; set; }
- [Tag("ValveAV83")]
- public IoValve ValveAV83 { get; set; }
- [Tag("ValveAV84")]
- public IoValve ValveAV84 { get; set; }
- [Tag("ValveAV85")]
- public IoValve ValveAV85 { get; set; }
- [Tag("ValveAV86")]
- public IoValve ValveAV86 { get; set; }
- [Tag("ValveAV87")]
- public IoValve ValveAV87 { get; set; }
- [Tag("ValveAV88")]
- public IoValve ValveAV88 { get; set; }
- [Tag("ValveAV89")]
- public IoValve ValveAV89 { get; set; }
- [Tag("ValveAV90")]
- public IoValve ValveAV90 { get; set; }
- [Tag("ValveAV91")]
- public IoValve ValveAV91 { get; set; }
- [Tag("ValveAV92")]
- public IoValve ValveAV92 { get; set; }
- [Tag("ValveAV93")]
- public IoValve ValveAV93 { get; set; }
- [Tag("ValveAV94")]
- public IoValve ValveAV94 { get; set; }
- [Tag("ValveAV95")]
- public IoValve ValveAV95 { get; set; }
- [Tag("ValveAV96")]
- public IoValve ValveAV96 { get; set; }
- [Tag("ValveAV97")]
- public IoValve ValveAV97 { get; set; }
- [Tag("ValveAV98")]
- public IoValve ValveAV98 { get; set; }
- [Tag("ValveAV99")]
- public IoValve ValveAV99 { get; set; }
- [Tag("ValveAV100")]
- public IoValve ValveAV100 { get; set; }
- [Tag("ValveAV101")]
- public IoValve ValveAV101 { get; set; }
- [Tag("ValveAV102")]
- public IoValve ValveAV102 { get; set; }
- [Tag("ValveAV103")]
- public IoValve ValveAV103 { get; set; }
- [Tag("ValveAV104")]
- public IoValve ValveAV104 { get; set; }
- [Tag("ValveAV105")]
- public IoValve ValveAV105 { get; set; }
- [Tag("ValveAV106")]
- public IoValve ValveAV106 { get; set; }
- [Tag("ValveAV107")]
- public IoValve ValveAV107 { get; set; }
- [Tag("ValveAV108")]
- public IoValve ValveAV108 { get; set; }
- [Tag("ValveAV109")]
- public IoValve ValveAV109 { get; set; }
- [Tag("ValveAV110")]
- public IoValve ValveAV110 { get; set; }
- [Tag("ValveAV111")]
- public IoValve ValveAV111 { get; set; }
- [Tag("ValveAV112")]
- public IoValve ValveAV112 { get; set; }
- [Tag("ValveAV113")]
- public IoValve ValveAV113 { get; set; }
- [Tag("ValveAV114")]
- public IoValve ValveAV114 { get; set; }
- [Tag("ValveAV115")]
- public IoValve ValveAV115 { get; set; }
- [Tag("ValveAV116")]
- public IoValve ValveAV116 { get; set; }
- [Tag("ValveAV117")]
- public IoValve ValveAV117 { get; set; }
- [Tag("ValveAV118")]
- public IoValve ValveAV118 { get; set; }
- [Tag("ValveAV119")]
- public IoValve ValveAV119 { get; set; }
- [Tag("ValveAV120")]
- public IoValve ValveAV120 { get; set; }
- [Tag("ValveAV121")]
- public IoValve ValveAV121 { get; set; }
- [Tag("ValveAV122")]
- public IoValve ValveAV122 { get; set; }
- [Tag("ValveAV123")]
- public IoValve ValveAV123 { get; set; }
- [Tag("ValveAV124")]
- public IoValve ValveAV124 { get; set; }
- [Tag("ValveAV125")]
- public IoValve ValveAV125 { get; set; }
- [Tag("ValveAV126")]
- public IoValve ValveAV126 { get; set; }
- [Tag("ValveAV127")]
- public IoValve ValveAV127 { get; set; }
- [Tag("ValveAV128")]
- public IoValve ValveAV128 { get; set; }
- [Tag("ValveAV129")]
- public IoValve ValveAV129 { get; set; }
- [Tag("ValveAV130")]
- public IoValve ValveAV130 { get; set; }
- [Tag("ValveAV131")]
- public IoValve ValveAV131 { get; set; }
- [Tag("ValveAV132")]
- public IoValve ValveAV132 { get; set; }
- [Tag("ValveAV133")]
- public IoValve ValveAV133 { get; set; }
- [Tag("ValveAV134")]
- public IoValve ValveAV134 { get; set; }
- [Tag("ValveAV135")]
- public IoValve ValveAV135 { get; set; }
- [Tag("ValveAV136")]
- public IoValve ValveAV136 { get; set; }
- [Tag("ValveAV230")]
- public IoValve ValveAV230 { get; set; }
- [Tag("ValveCommonBoxPressureRegulatingCylinder")]
- public IoValve ValveCommonBoxPressureRegulatingCylinder { get; set; }
- [Tag("ValveLABacksideDoorCylinderControl")]
- public IoValve ValveLABacksideDoorCylinderControl { get; set; }
- [Tag("ValveLAExhaustDamper")]
- public IoValve ValveLAExhaustDamper { get; set; }
- [Tag("ValveLADamper")]
- public IoValve ValveLADamper { get; set; }
- [Tag("ValveFIMS1N2Purge")]
- public IoValve ValveFIMS1N2Purge { get; set; }
- [Tag("ValveFIMS2N2Purge")]
- public IoValve ValveFIMS2N2Purge { get; set; }
- [Tag("ValveSV61")]
- public IoValve ValveSV61 { get; set; }
- [Tag("ValveSV62")]
- public IoValve ValveSV62 { get; set; }
- [Tag("ValveSV63")]
- public IoValve ValveSV63 { get; set; }
- [Tag("ValveSV64")]
- public IoValve ValveSV64 { get; set; }
- [Tag("AGVPump")]
- public IoValve AGVPump { get; set; }
- [Tag("AGV2Pump")]
- public IoValve AGV2Pump { get; set; }
- [Tag("BothPump")]
- public IoValve BothPump { get; set; }
- [Tag("BothPump1")]
- public IoValve BothPump1 { get; set; }
- [Tag("BothPump2")]
- public IoValve BothPump2 { get; set; }
- [Tag("ValveBlowerPowerOn")]
- public IoValve ValveBlowerPowerOn { get; set; }
- [Tag("HMNT")]
- public IoValve HMNT { get; set; }
- [Tag("CMNT")]
- public IoValve CMNT { get; set; }
- [Tag("HREF")]
- public IoValve HREF { get; set; }
- [Tag("CREF")]
- public IoValve CREF { get; set; }
- [Tag("HZERO")]
- public IoValve HZERO { get; set; }
- [Tag("CZERO")]
- public IoValve CZERO { get; set; }
- // -------------------------------------------------------------------------
- [Tag("PressureGLBoxPG1")]
- public IoPressureMeter PressureGLBoxPG1 { get; set; }
- [Tag("PressureGLBoxPG2")]
- public IoPressureMeter PressureGLBoxPG2 { get; set; }
- [Tag("PressureGLBoxPG3")]
- public IoPressureMeter PressureGLBoxPG3 { get; set; }
- [Tag("PressureGLBoxPG4")]
- public IoPressureMeter PressureGLBoxPG4 { get; set; }
- [Tag("PressureGLBoxPG5")]
- public IoPressureMeter PressureGLBoxPG5 { get; set; }
- [Tag("PressureGLBoxPG6")]
- public IoPressureMeter PressureGLBoxPG6 { get; set; }
- [Tag("PressureGasBoxUpperVG21")]
- public IoPressureMeter PressureGasBoxUpperVG21 { get; set; }
- [Tag("PressureGasBoxUpperVG22")]
- public IoPressureMeter PressureGasBoxUpperVG22 { get; set; }
- [Tag("ConcentrationO2")]
- public IoPressureMeter ConcentrationO2 { get; set; }
- [Tag("GasBoxExhaustMS2")]
- public IoPressureMeter GasBoxExhaustMS2 { get; set; }
- [Tag("ScavengerExhaustMS3")]
- public IoPressureMeter ScavengerExhaustMS3 { get; set; }
- [Tag("ExhaustBoxExhaustMS4")]
- public IoPressureMeter ExhaustBoxExhaustMS4 { get; set; }
- [Tag("LoadingAreaExhaustMS5")]
- public IoPressureMeter LoadingAreaExhaustMS5 { get; set; }
- [Tag("FrontBodyExhaustMS6")]
- public IoPressureMeter FrontBodyExhaustMS6 { get; set; }
- [Tag("LAExhaustMS7")]
- public IoPressureMeter LAExhaustMS7 { get; set; }
- [Tag("RHCExhaustMS8")]
- public IoPressureMeter RHCExhaustMS8 { get; set; }
- [Tag("RHCFlowFL901")]
- public IoPressureMeter RHCFlowFL901 { get; set; }
- [Tag("CoolingWaterFlowOfFurnaceFL902")]
- public IoPressureMeter CoolingWaterFlowOfFurnaceFL902 { get; set; }
- [Tag("CoolingWateFlowOfShuttleFL903")]
- public IoPressureMeter CoolingWateFlowOfShuttleFL903 { get; set; }
- [Tag("CoolingWaterFlowOfBoatRotationFL904")]
- public IoPressureMeter CoolingWaterFlowOfBoatRotationFL904 { get; set; }
- [Tag("CoolingWaterFlowOfFlangeFL905")]
- public IoPressureMeter CoolingWaterFlowOfFlangeFL905 { get; set; }
- [Tag("CoolingWaterFlowOfLoadingAreaFL906")]
- public IoPressureMeter CoolingWaterFlowOfLoadingAreaFL906 { get; set; }
- [Tag("VG11")]
- public IoPressureMeter VG11 { get; set; }
- [Tag("VG12")]
- public IoPressureMeter VG12 { get; set; }
- [Tag("VG13")]
- public IoPressureMeter VG13 { get; set; }
- [Tag("VG21")]
- public IoPressureMeter VG21 { get; set; }
- [Tag("VG22")]
- public IoPressureMeter VG22 { get; set; }
- [Tag("PG12")]
- public IoPressureMeter PG12 { get; set; }
- [Tag("PG13")]
- public IoPressureMeter PG13 { get; set; }
- [Tag("PS13")]
- public IoPressureMeter PS13 { get; set; }
- [Tag("N24PurgePressure")]
- public IoPressureMeter N24PurgePressure { get; set; }
- [Tag("N25PurgePressure")]
- public IoPressureMeter N25PurgePressure { get; set; }
- [Tag("N26PurgePressure")]
- public IoPressureMeter N26PurgePressure { get; set; }
- [Tag("N27PurgePressure")]
- public IoPressureMeter N27PurgePressure { get; set; }
- [Tag("PS11")]
- public IoPressureMeter PS11 { get; set; }
- [Tag("PS17")]
- public IoPressureMeter PS17 { get; set; }
- // -------------------------------------------------------------------------
- [Tag("FIMS1")]
- public IoFIMS FIMS1 { get; set; }
- [Tag("FIMS2")]
- public IoFIMS FIMS2 { get; set; }
- //[Tag("ValvePV12")]
- //public IoValve ValvePV12 { get; set; }
- //[Tag("ValvePV13")]
- //public IoValve ValvePV13 { get; set; }
- //[Tag("ValvePV14")]
- //public IoValve ValvePV14 { get; set; }
- //[Tag("ValvePV15")]
- //public IoValve ValvePV15 { get; set; }
- //[Tag("ValvePV16")]
- //public IoValve ValvePV16 { get; set; }
- //[Tag("ValvePV17")]
- //public IoValve ValvePV17 { get; set; }
- [Tag("MFC1")]
- public IoMFC MFC1 { get; set; }
- [Tag("MFC2")]
- public IoMFC MFC2 { get; set; }
- [Tag("MFC3")]
- public IoMFC MFC3 { get; set; }
- [Tag("MFC4")]
- public IoMFC MFC4 { get; set; }
- [Tag("MFC5")]
- public IoMFC MFC5 { get; set; }
- [Tag("MFC6")]
- public IoMFC MFC6 { get; set; }
- [Tag("MFC7")]
- public IoMFC MFC7 { get; set; }
- [Tag("MFC8")]
- public IoMFC MFC8 { get; set; }
- [Tag("MFC9")]
- public IoMFC MFC9 { get; set; }
- [Tag("MFC10")]
- public IoMFC MFC10 { get; set; }
- [Tag("MFC11")]
- public IoMFC MFC11 { get; set; }
- [Tag("MFC12")]
- public IoMFC MFC12 { get; set; }
- [Tag("MFC13")]
- public IoMFC MFC13 { get; set; }
- [Tag("MFC14")]
- public IoMFC MFC14 { get; set; }
- [Tag("MFC15")]
- public IoMFC MFC15 { get; set; }
- [Tag("MFC16")]
- public IoMFC MFC16 { get; set; }
- [Tag("MFC17")]
- public IoMFC MFC17 { get; set; }
- [Tag("MFC31")]
- public IoMFC MFC31 { get; set; }
- [Tag("MFC32")]
- public IoMFC MFC32 { get; set; }
- [Tag("MFC51")]
- public IoMFC MFC51 { get; set; }
- [Tag("MFC57")]
- public IoMFC MFC57 { get; set; }
- //[Tag("GasLineA")]
- //public IoGasStick2 GasLineA { get; set; }
- //[Tag("GasLineB")]
- //public IoGasStick2 GasLineB { get; set; }
- //[Tag("GasLineC")]
- //public IoGasStick2 GasLineC { get; set; }
- //[Tag("GasLineNX")]
- //public IoGasStick2 GasLineNX { get; set; }
- //[Tag("GasLineNY")]
- //public IoGasStick2 GasLineNY { get; set; }
- //[Tag("GasLineN1")]
- //public IoGasStick2 GasLineN1 { get; set; }
- //[Tag("GasLineN2")]
- //public IoGasStick2 GasLineN2 { get; set; }
- //[Tag("GasLineN3")]
- //public IoGasStick2 GasLineN3 { get; set; }
- //[Tag("GasLineM1")]
- //public IoGasStick2 GasLineM1 { get; set; }
- //[Tag("GasLineM2")]
- //public IoGasStick2 GasLineM2 { get; set; }
- //[Tag("GasLineD1")]
- //public IoGasStick2 GasLineD1 { get; set; }
- //[Tag("GasLineJ1")]
- //public IoGasStick2 GasLineJ1 { get; set; }
- // -------------------------------------------------------------------------
- [Tag("Shutter")]
- public IoShutter Shutter { get; set; }
- [Tag("FFU1")] public IoFFU FFU1 { get; set; }
- [Tag("FFU2")] public IoFFU FFU2 { get; set; }
- [Tag("FFU3")] public IoFFU FFU3 { get; set; }
- [Tag("FFU4")] public IoFFU FFU4 { get; set; }
- [Tag("FFU5")] public IoFFU FFU5 { get; set; }
- [Tag("FFU6")] public IoFFU FFU6 { get; set; }
- [Tag("FFU7")] public IoFFU FFU7 { get; set; }
- [Tag("FFU8")] public IoFFU FFU8 { get; set; }
- [Tag("FFU9")] public IoFFU FFU9 { get; set; }
- // -------------------------------------------------------------------------
- [Tag("APC")]
- public IoAPC APC { get; set; }
- // -------------------------------------------------------------------------
- //[Tag("MainPump")]
- //public IoPump MainPump { get; set; }
- //[Tag("IoPump")]
- //public IoPump IoPump { get; set; }
- // -------------------------------------------------------------------------
- //[Tag("VG2Pressure")]
- //public IoPressureMeter VG2Pressure { get; set; }
- //[Tag("PT52")]
- //public IoPressureMeter PT52 { get; set; }
- //[Tag("PT53")]
- //public IoPressureMeter PT53 { get; set; }
- //[Tag("PT10")]
- //public IoPressureMeter PT10 { get; set; }
- //[Tag("PT20")]
- //public IoPressureMeter PT20 { get; set; }
- //[Tag("PT30")]
- //public IoPressureMeter PT30 { get; set; }
- //[Tag("O2Detector1")]
- //public IoPressureMeter O2Detector1 { get; set; }
- //[Tag("O2Detector2")]
- //public IoPressureMeter O2Detector2 { get; set; }
- // -------------------------------------------------------------------------
- [Tag("TrigFurnaceLZoneHeatingEnable")]
- public IoTrigger TrigFurnaceLZoneHeatingEnable { get; set; }
- [Tag("TrigFurnaceCLZoneHeatingEnable")]
- public IoTrigger TrigFurnaceCLZoneHeatingEnable { get; set; }
- [Tag("TrigFurnaceCZoneHeatingEnable")]
- public IoTrigger TrigFurnaceCZoneHeatingEnable { get; set; }
- [Tag("TrigFurnaceCUZoneHeatingEnable")]
- public IoTrigger TrigFurnaceCUZoneHeatingEnable { get; set; }
- [Tag("TrigFurnaceUZoneHeatingEnable")]
- public IoTrigger TrigFurnaceUZoneHeatingEnable { get; set; }
- [Tag("TrigFFULSPEED")]
- public IoTrigger TrigFFULSPEED { get; set; }
- [Tag("TrigFFUHSPEED")]
- public IoTrigger TrigFFUHSPEED { get; set; }
- [Tag("TrigVGUnitConversion")]
- public IoTrigger TrigVGUnitConversion { get; set; }
- [Tag("TrigForlineHeaterOn")]
- public IoTrigger TrigForlineHeaterOn { get; set; }
- [Tag("TrigHTR1SWON")]
- public IoTrigger TrigHTR1SWON { get; set; }
- [Tag("TrigHTR2SWON")]
- public IoTrigger TrigHTR2SWON { get; set; }
- [Tag("TrigHTR3SWON")]
- public IoTrigger TrigHTR3SWON { get; set; }
- [Tag("TrigDEPOSW")]
- public IoTrigger TrigDEPOSW { get; set; }
- [Tag("TrigCREFON")]
- public IoTrigger TrigCREFON { get; set; }
- [Tag("TrigSIREFON")]
- public IoTrigger TrigSIREFON { get; set; }
- [Tag("TrigHFCleanSwitchB")]
- public IoTrigger TrigHFCleanSwitchB { get; set; }
- [Tag("TrigF2CleanSwitchB")]
- public IoTrigger TrigF2CleanSwitchB { get; set; }
- public IoHeater HeaterU { get; set; }
- public IoHeater HeaterCU { get; set; }
- public IoHeater HeaterC { get; set; }
- public IoHeater HeaterCL { get; set; }
- public IoHeater HeaterL { get; set; }
- //private Dictionary<string, IoMFC> _gasMFCs;
- //public Dictionary<string, IoMFC> GasMFCs => _gasMFCs;
- [Tag("TrigAV71ExternalHeater")]
- public IoTrigger TrigAV71ExternalHeater { get; set; }
- [Tag("TrigAV71RingHeater")]
- public IoTrigger TrigAV71RingHeater { get; set; }
- [Tag("TrigHeaterAllEnable")]
- public IoTrigger TrigHeaterAllEnable { get; set; }
- [Tag("TrigGasLineHeaterMemoryChange")]
- public IoTrigger TrigGasLineHeaterMemoryChange { get; set; }
- #region N2Purge
- [Tag("TrigN2PurgeLAO2CheckFirstEnable")]
- public IoTrigger TrigN2PurgeLAO2CheckFirstEnable { get; set; }
- [Tag("TrigN2PurgeFIMS1O2CheckEnable")]
- public IoTrigger TrigN2PurgeFIMS1O2CheckEnable { get; set; }
- [Tag("TrigN2PurgeFIMS2O2CheckEnable")]
- public IoTrigger TrigN2PurgeFIMS2O2CheckEnable { get; set; }
- [Tag("TrigN2PurgeProcess")]
- public IoTrigger TrigN2PurgeProcess { get; set; }
- [Tag("TrigN2PurgeLAO2OverTime")]
- public IoTrigger TrigN2PurgeLAO2OverTime { get; set; }
- [Tag("TrigN2PurgeLAO2CheckTime")]
- public IoTrigger TrigN2PurgeLAO2CheckTime { get; set; }
- [Tag("TrigN2PurgeFOUPO2OverTime")]
- public IoTrigger TrigN2PurgeFOUPO2OverTime { get; set; }
- [Tag("TrigN2PurgeFOUPO2CheckTime")]
- public IoTrigger TrigN2PurgeFOUPO2CheckTime { get; set; }
- [Tag("TrigN2PurgeExchangeLATOFOUPWaitTime")]
- public IoTrigger TrigN2PurgeExchangeLATOFOUPWaitTime { get; set; }
- [Tag("TrigN2PurgeExchangeFOUPTOLAWaitTime")]
- public IoTrigger TrigN2PurgeExchangeFOUPTOLAWaitTime { get; set; }
- [Tag("TrigN2PurgeExchangeFOUPTOFOUPWaitTime")]
- public IoTrigger TrigN2PurgeExchangeFOUPTOFOUPWaitTime { get; set; }
- [Tag("TrigN2PurgeLAO2CheckSV")]
- public IoTrigger TrigN2PurgeLAO2CheckSV { get; set; }
- [Tag("TrigN2PurgeFOUPO2CheckSV")]
- public IoTrigger TrigN2PurgeFOUPO2CheckSV { get; set; }
- #endregion
- #region IoHeaterBand
- [Tag("CapHeater")]
- public IoHeaterBand CapHeater { get; set; }
- [Tag("APCExternalHeater")]
- public IoHeaterBand APCExternalHeater { get; set; }
- [Tag("APCRingHeater")]
- public IoHeaterBand APCRingHeater { get; set; }
- #endregion
- // -------------------------------------------------------------------------
- [Tag("BoatElevatorServo")]
- public IoFurnaceMotor ZAxisDevice { get; set; }
- [Tag("BoatRotationServo")]
- public IoFurnaceMotor RAxisDevice { get; set; }
- [Tag("APC")]
- public IoAPC APCDevice { get; set; }
- [Tag("TrigGasLineHeaterUnit1PowerOn")]
- public IoTrigger2 TrigGasLine1PowerOn { get; set; }
- [Tag("TrigGasLineHeaterUnit2PowerOn")]
- public IoTrigger2 TrigGasLine2PowerOn { get; set; }
- [Tag("TrigGasLineHeaterUnit3PowerOn")]
- public IoTrigger2 TrigGasLine3PowerOn { get; set; }
- [Tag("TrigGasLineHeaterUnit4PowerOn")]
- public IoTrigger2 TrigGasLine4PowerOn { get; set; }
- [Tag("TrigGasLineHeaterUnit6PowerOn")]
- public IoTrigger2 TrigGasLine6PowerOn { get; set; }
- [Tag("TrigGasLineHeaterUnit7PowerOn")]
- public IoTrigger2 TrigGasLine7PowerOn { get; set; }
- [Tag("TrigGasLineHeaterUnit1RecipeChange")]
- public IoTrigger2 TrigGasLine1RecipeChange { get; set; }
- [Tag("TrigGasLineHeaterUnit2RecipeChange")]
- public IoTrigger2 TrigGasLine2RecipeChange { get; set; }
- [Tag("TrigGasLineHeaterUnit3RecipeChange")]
- public IoTrigger2 TrigGasLine3RecipeChange { get; set; }
- [Tag("TrigGasLineHeaterUnit4RecipeChange")]
- public IoTrigger2 TrigGasLine4RecipeChange { get; set; }
- [Tag("TrigGasLineHeaterUnit6RecipeChange")]
- public IoTrigger2 TrigGasLine6RecipeChange { get; set; }
- [Tag("TrigGasLineHeaterUnit7RecipeChange")]
- public IoTrigger2 TrigGasLine7RecipeChange { get; set; }
- [Tag("MINI8AlarmReset")]
- public IoReset MINI8AlarmReset { get; set; }
- [Tag("PLCCPUReset")]
- public IoReset PLCCPUReset { get; set; }
- Func<MemberInfo, bool> _hasTagAttribute;
- Func<object, bool> _isTagAttribute;
- public override double ChamberPressure
- {
- get
- {
- return 0;
- }
- }
- //public IAdsPlc Plc { get; set; }
- private List<IDevice> _allModuleDevice = new List<IDevice>();
- private List<IoMFC> _processMFCs = new List<IoMFC>();
- private List<IoHeater> _heaters = new List<IoHeater>();
- private List<IoValve> _valves = new List<IoValve>();
- private List<IoFFU> _fFUs = new List<IoFFU>();
- private List<IoGasStick2> _gasSticks;
- public List<IoGasStick2> GasSticks => _gasSticks;
- private List<AlarmEventItem> _triggeredAlarmList = new List<AlarmEventItem>();
- private List<IoAlarmSignal> _alarmSignals = new List<IoAlarmSignal>();
- private FurnaceSignalTower _signalTowerDevice;
- private int _alarmNumber;
- private List<IoAlarmSignal> _inCommandLst;
- private Dictionary<string, RD_TRIG> _inCommandTirgs = new Dictionary<string, RD_TRIG>();
- private IoTrigger _trigTHPowerEN;
- private IoTrigger _trigHECPowerONLamp;
- private List<HeaterBase> _HTR1Group = new List<HeaterBase>();
- private List<HeaterBase> _HTR2Group = new List<HeaterBase>();
- private List<HeaterBase> _HTR3Group = new List<HeaterBase>();
- public void InitDevice()
- {
- InitAllWaferTypeNode();
- _isTagAttribute = attribute => attribute is TagAttribute;
- _hasTagAttribute = mi => mi.GetCustomAttributes(false).Any(_isTagAttribute);
- var properties = this.GetType().GetProperties().Where(_hasTagAttribute);
- foreach (var field in properties)
- {
- TagAttribute tag = field.GetCustomAttributes(false).First(_isTagAttribute) as TagAttribute;
- IDevice device = DEVICE.GetDevice<IDevice>($"{Module}.{tag.Tag}");
- if (device == null)
- device = DEVICE.GetDevice<IDevice>($"PM1.{tag.Tag}");
- if (device == null)
- device = DEVICE.GetDevice<IDevice>($"System.{tag.Tag}");
- if (device != null)
- {
- _allModuleDevice.Add(device);
- PropertyInfo pi = (PropertyInfo)field;
- var convertedValue = Convert.ChangeType(device, pi.PropertyType);
- System.Diagnostics.Debug.Assert(convertedValue != null);
- pi.SetValue(this, convertedValue);
- if (device is IoAlarmSignal)
- {
- _alarmSignals.Add(device as IoAlarmSignal);
- }
- device.OnDeviceAlarmStateChanged += OnModuleDeviceAlarmStateChanged;
- if (device is IoMFC && device.Name != "MFC57")
- _processMFCs.Add(device as IoMFC);
- if (device is IoHeater)
- _heaters.Add(device as IoHeater);
- else if (device is IoValve)
- _valves.Add(device as IoValve);
- else if (device is HeaterBase)
- _HTR2Group.Add(device as HeaterBase);
- else if (device is IoFFU)
- _fFUs.Add(device as IoFFU);
- }
- else
- {
- }
- }
- for (int i = 1; i < 10; i++)
- {
- for (int ch = 1; ch < 40; ch++)
- {
- var device = DEVICE.GetDevice<HeaterBase>($"PM1.GaslineHeaterUnit{i}CH{ch}");
- if (device != null)
- {
- if ((i == 4 && ch == 1) || (i == 4 && ch == 2) || (i == 4 && ch == 3) || (i == 4 && ch == 4))
- {
- //这几个从_HTR2Group中删除
- //_HTR2Group.Add(device);
- continue;
- }
- else
- _HTR1Group.Add(device);
- }
- }
- }
- for (int i = 1; i < 20; i++)
- {
- var device = DEVICE.GetDevice<HeaterBase>($"PM1.ForelineHeater{i}");
- if (device != null)
- {
- _HTR2Group.Add(device);
- }
- }
- //Singleton<DeviceController>.Instance.Start(Singleton<DeviceManager>.Instance);
- //FlowmeterLists = DEVICE.GetDevice<IoFlowMeter>().Where(o => o.Module == Module).ToList();
- HeaterU = DEVICE.GetDevice<IoHeater>($"System.HeaterU");
- HeaterCU = DEVICE.GetDevice<IoHeater>($"System.HeaterCU");
- HeaterC = DEVICE.GetDevice<IoHeater>($"System.HeaterC");
- HeaterCL = DEVICE.GetDevice<IoHeater>($"System.HeaterCL");
- HeaterL = DEVICE.GetDevice<IoHeater>($"System.HeaterL");
- _heaters = new List<IoHeater>()
- {
- HeaterU,
- HeaterCU,
- HeaterC,
- HeaterCL,
- HeaterL,
- };
- foreach (var heater in _heaters)
- {
- if (heater != null)
- {
- heater.OnDeviceAlarmStateChanged += OnModuleDeviceAlarmStateChanged;
- }
- }
- Singleton<InterlockManager>.Instance.OnDeviceAlarmStateChanged += OnModuleDeviceAlarmStateChanged;
- this.OnDeviceAlarmStateChanged += OnModuleDeviceAlarmStateChanged;
- foreach (var pv in Singleton<IoProviderManager>.Instance.Providers)
- {
- if ((pv as IoProvider) != null)
- (pv as IoProvider).OnDeviceAlarmStateChanged += OnModuleDeviceAlarmStateChanged;
- }
- _gasSticks = new List<IoGasStick2>()
- {
- //GasLineA,
- //GasLineB,
- //GasLineC,
- //GasLineNX,
- //GasLineNY,
- //GasLineN1,
- //GasLineN2,
- //GasLineN3,
- //GasLineM1,
- //GasLineM2,
- //GasLineD1,
- //GasLineJ1,
- };
- _signalTowerDevice = DEVICE.GetDevice<FurnaceSignalTower>($"{ModuleName.System}.{ModuleName.SignalTower}");
- _trigTHPowerEN = DEVICE.GetDevice<IoTrigger>($"PM1.TrigTHPowerEN");
- _trigHECPowerONLamp = DEVICE.GetDevice<IoTrigger>($"{Module}.TrigHECPowerONLamp");
- _inCommandLst = new List<IoAlarmSignal>()
- {
- //SensorHECPowerONSW,
- // SensorTHBreakOK,
- };
- //SensorLidClosed.OnSignalChanged += SensorLidClosed_OnSignalChanged;
- TrigFurnaceUZoneHeatingEnable.SetTrigger(true, out _);
- TrigFurnaceCUZoneHeatingEnable.SetTrigger(true, out _);
- TrigFurnaceCZoneHeatingEnable.SetTrigger(true, out _);
- TrigFurnaceCLZoneHeatingEnable.SetTrigger(true, out _);
- TrigFurnaceLZoneHeatingEnable.SetTrigger(true, out _);
- MINI8AlarmReset?.Reset();
- PLCCPUReset?.Reset();
- InitN2PurgeConfigData();
- InitSCToAODO();
- }
- private void InitSCToAODO()
- {
- var scTrigFFULSPEEDData = SC.GetValue<double>($"FFU.LSPEED");
- TrigFFULSPEED?.SetAOTrigger((float)scTrigFFULSPEEDData, out _);
- var hSPEED = SC.GetValue<double>($"FFU.HSPEED");
- TrigFFUHSPEED?.SetAOTrigger((float)hSPEED, out _);
- SetN2PurgeLAO2CheckSV((float)SC.GetValue<double>("PM1.N2Purge.N2PurgeLAO2CheckSV"));
- SetN2PurgeFOUPO2CheckSV((float)SC.GetValue<double>("PM1.N2Purge.N2PurgeFOUPO2CheckSV"));
- }
- private void SensorLidClosed_OnSignalChanged(IoSensor sender, bool isTriggered)
- {
- if (!isTriggered)
- {
- EV.PostWarningLog(Module, $"Lid Open.");
- }
- }
- private void PlcDisconnected()
- {
- CheckToPostMessage(MSG.Disconnected);
- }
- private void PlcConnected()
- {
- if (IsInit)
- return;
- if (FsmState.Equals((int)STATE.NotConnected))
- CheckToPostMessage(MSG.Connected);
- }
- public void OnModuleDeviceAlarmStateChanged(string deviceId, AlarmEventItem alarmItem)
- {
- if (alarmItem.IsTriggered)
- {
- EventLevel level = alarmItem.Level;
- string description = alarmItem.AdditionalDescription;
- //description += $" {(!string.IsNullOrEmpty(_recipeRunningInfo.RecipeName) ? $"Recipe:{_recipeRunningInfo.RecipeName}," : "")}Step:{(IsProcessing ? _recipeRunningInfo.StepName : "Standby")}";
- //alarmItem.AdditionalDescription += $" {(!string.IsNullOrEmpty(_recipeRunningInfo.RecipeName) ? $"Recipe:{_recipeRunningInfo.RecipeName}," : "")}Step:{(IsProcessing ? _recipeRunningInfo.StepName : "Standby")}";
- alarmItem.AdditionalDescription = description;
- alarmItem.OccuringTime = DateTime.Now;
- _triggeredAlarmList.Add(alarmItem);
- if (IsProcessing)
- {
- if (level == EventLevel.Alarm)
- {
- EV.PostAlarmLog(Module, alarmItem);
- }
- else
- {
- EV.PostWarningLog(Module, alarmItem);
- }
- }
- else
- {
- if (level == EventLevel.Alarm)
- {
- try
- {
- //if (!(bool)Aitex.Core.RT.DataCenter.DATA.Poll($"{alarmItem.EventEnum}.ignoreSaveDB")) {
- EV.PostAlarmLog(Module, alarmItem);
- //}
- }
- catch (Exception ex)
- {
- EV.WriteEvent(ex.Message.ToString());
- }
- }
- else
- {
- EV.PostWarningLog(Module, alarmItem);
- }
- }
- }
- else
- {
- }
- }
- public override bool CheckAcked(int entityTaskToken)
- {
- return true;
- }
- #region pump device operation
- public override bool TurnOnPump(out string reason)
- {
- reason = string.Empty;
- return true /*MainPump.SetPump(out reason, 0, true)*/;
- }
- public override bool CheckPumpIsOn()
- {
- return true/*MainPump.IsRunning*/;
- }
- #endregion
- public bool CheckIsConnected()
- {
- return true;
- }
- public bool CheckHasAlarm()
- {
- foreach (var device in _allModuleDevice)
- {
- if (device != null && device.HasAlarm)
- return true;
- }
- return false;
- }
- public override bool CheckSlitValveClose()
- {
- return true;
- }
- public override bool CheckLidClosed()
- {
- return true;
- }
- public override bool CheckPrepareProcess()
- {
- return _isPrepareProcess;
- }
- public override bool CheckProcessFinished()
- {
- bool isFinished = true;
- var wafers = WaferManager.Instance.GetWafers(_module);
- if (wafers == null)
- {
- return false;
- }
- foreach (var wafer in wafers)
- {
- if (wafer.IsEmpty)
- continue;
- if (wafer.ProcessState != EnumWaferProcessStatus.Completed && wafer.ProcessState != EnumWaferProcessStatus.Failed)
- isFinished = false;
- }
- return isFinished;
- }
- public override bool CheckStandbyCondition()
- {
- return true;
- return CheckExternalSensorCondition() && CheckTempStabilizeCondition() &&
- CheckReachTempCondition() && CheckPressureStablilizeCondition() &&
- CheckReachPressureCondition() && CheckFinishAutoProfileCondition();
- }
- #region conditionCheck
- private bool SeBypassStandbyFactor(out string reason, int time, object[] param)
- {
- reason = string.Empty;
- if (param != null && param.Length > 0)
- {
- var condition = param[0].ToString();
- if (_conditionCheckDic.ContainsKey(condition))
- {
- _conditionCheckDic[condition] = true;
- }
- }
- return true;
- }
- private bool SetConditionCheck(out string reason, int time, object[] param)
- {
- reason = string.Empty;
- _conditionCheckDic.Clear();
- _conditionCheckItemDic.Clear();
- _isExternalSensorConditionBypass = false;
- _isTempStabilizeConditionBypass = false;
- _isPressureStabilizeConditionBypass = false;
- _isReachTempConditionBypass = false;
- _isReachPressureConditionBypass = false;
- _isFinishAutoProfileConditionBypass = false;
- if (param.Length > 0)
- {
- var conditions = param[0].ToString().Split(';').ToList();
- foreach (var condition in conditions)
- {
- var arry = condition.Split(':');
- if (arry.Length > 1)
- {
- switch (arry[0])
- {
- case "ExternalSensor":
- SetExternalSensorCondition("Wait For External Sensor", arry[1]);
- break;
- case "TempStabilize":
- SetTempStabilizeCondition("Wait For Temperature Stablilize", arry[1]);
- break;
- case "ReachTemp":
- SetReachTempCondition("Wait For Reach Temperature", arry[1]);
- break;
- case "ReachPressure":
- SetReachPressureCondition("Wait For Reach Pressure", arry[1]);
- break;
- case "PressureStabilize":
- SetPressureStabilizeCondition("Wait For Pressure Stablilize", arry[1]);
- break;
- case "FinishAutoProfile":
- SetFinishAutoProfileCondition("Wait For Finish Auto Profile", arry[1]);
- break;
- case "None":
- case "none":
- break;
- }
- }
- }
- }
- return true;
- }
- private void SetExternalSensorCondition(string title, string para)
- {
- var conditions = para.ToLower().Split(',').ToList();
- if (conditions.Any(x => !x.Contains("none")))
- {
- _conditionCheckDic.Add(title, false);
- _conditionCheckItemDic.Add(title, para);
- }
- }
- private void SetTempStabilizeCondition(string title, string para)
- {
- if (para.ToLower() != "none")
- {
- _conditionCheckDic.Add(title, false);
- _conditionCheckItemDic.Add(title, para);
- foreach (var heater in _heaters)
- {
- //heater.SetStableParameters(para);
- }
- }
- }
- private void SetReachTempCondition(string title, string para)
- {
- if (para.ToLower() != "none")
- {
- _conditionCheckDic.Add(title, false);
- _conditionCheckItemDic.Add(title, para);
- }
- }
- private void SetReachPressureCondition(string title, string para)
- {
- if (para.ToLower() != "none")
- {
- _conditionCheckDic.Add(title, false);
- _conditionCheckItemDic.Add(title, para);
- }
- }
- private void SetFinishAutoProfileCondition(string title, string para)
- {
- if (para.ToLower() != "none")
- {
- _conditionCheckDic.Add(title, false);
- _conditionCheckItemDic.Add(title, para);
- }
- }
- private void SetPressureStabilizeCondition(string title, string para)
- {
- if (para.ToLower() != "none")
- {
- _conditionCheckDic.Add(title, false);
- _conditionCheckItemDic.Add(title, para);
- //APC.SetStableParameters(para);
- }
- }
- public bool CheckExternalSensorCondition()
- {
- var key = "Wait For External Sensor";
- if (_conditionCheckDic.ContainsKey(key))
- {
- if (_conditionCheckItemDic.ContainsKey(key))
- {
- var items = _conditionCheckItemDic[key].Split(',').ToList();
- bool isMatch = true;
- foreach (var item in items)
- {
- var sensorAndResult = item.Split('.');
- if (sensorAndResult.Length > 1 && sensorAndResult[1].ToLower() != "none")
- {
- var sensorDevice = DEVICE.GetDevice<IoSensor>($"{Module}.{sensorAndResult[0]}");
- if (sensorDevice == null)
- sensorDevice = DEVICE.GetDevice<IoSensor>($"System.{sensorAndResult[0]}");
- if (sensorDevice != null)
- {
- isMatch = sensorAndResult[1].ToLower() == "on" ? sensorDevice.Value : !sensorDevice.Value;
- }
- if (!isMatch)
- break;
- }
- }
- _conditionCheckDic[key] = isMatch;
- }
- if (_isExternalSensorConditionBypass)
- _conditionCheckDic[key] = true;
- return _conditionCheckDic[key];
- }
- else
- {
- return true;
- }
- }
- public bool CheckTempStabilizeCondition()
- {
- var key = "Wait For Temperature Stablilize";
- return true;
- }
- public bool CheckReachTempCondition()
- {
- var key = "Wait For Reach Temperature";
- return true;
- }
- public bool CheckPressureStablilizeCondition()
- {
- var key = "Wait For Pressure Stablilize";
- if (_conditionCheckDic.ContainsKey(key))
- {
- //_conditionCheckDic[key] = APC.IsStable;
- if (_isPressureStabilizeConditionBypass)
- _conditionCheckDic[key] = true;
- return _conditionCheckDic[key];
- }
- else
- {
- return true;
- }
- }
- public bool CheckReachPressureCondition()
- {
- var key = "Wait For Reach Pressure";
- if (_conditionCheckDic.ContainsKey(key))
- {
- if (_conditionCheckItemDic.ContainsKey(key))
- {
- var itemArry = _conditionCheckItemDic[key].Split(',');
- if (itemArry != null && itemArry.Length > 1)
- {
- float.TryParse(itemArry[1], out float pressure);
- if (itemArry[0] == "WaitMoreThan")
- {
- //_conditionCheckDic[key] = APC.PressureFeedback > pressure;
- }
- else if (itemArry[0] == "WaitLessThan")
- {
- //_conditionCheckDic[key] = APC.PressureFeedback < pressure;
- }
- }
- }
- if (_isReachPressureConditionBypass)
- _conditionCheckDic[key] = true;
- return _conditionCheckDic[key];
- }
- else
- {
- return true;
- }
- }
- public bool CheckFinishAutoProfileCondition()
- {
- var key = "Wait For Finish Auto Profile";
- if (_conditionCheckDic.ContainsKey(key))
- {
- if (_isFinishAutoProfileConditionBypass)
- _conditionCheckDic[key] = true;
- return _conditionCheckDic[key];
- }
- else
- {
- return true;
- }
- }
- #endregion
- private bool SetBoatZAxisMotion(out string reason, int time, object[] param)
- {
- reason = string.Empty;
- //if (AutoDoor.UpDownStatus != ASUpDownStatus.Down || AutoDoor.OpenCloseStatus != ASOpenCloseStatus.Open)
- //{
- // (Singleton<EquipmentManager>.Instance.Modules[ModuleName.Boat] as BoatModule).BoatZAxisMoveFailedForInterlock.Set();
- // return false;
- //}
- return true;
- //return BoatDevice.ZAxisMoveTo(param[0].ToString(), out reason);
- }
- private bool SetBoatRAxisMotion(out string reason, int time, object[] param)
- {
- reason = string.Empty;
- return true;
- }
- private bool SetAutoShutterUp(out string reason, int time, object[] param)
- {
- reason = string.Empty;
- bool.TryParse(param[0].ToString(), out bool isUp);
- //if (BoatDevice.BoatCurrentPosition != BoatPosition.HomePosition && BoatDevice.BoatCurrentPosition != BoatPosition.ProcessPosition)
- //{
- // AutoShutter.AutoShutterMoveFailedForInterlock.Set();
- // return false;
- //}
- //return AutoDoor.SetUp(isUp, out reason);
- return true;
- }
- private bool SetAutoShutterOpen(out string reason, int time, object[] param)
- {
- reason = string.Empty;
- bool.TryParse(param[0].ToString(), out bool isOpen);
- var ZAxisDevice = DEVICE.GetDevice<IoFurnaceMotor>($"PM1.BoatElevatorServo");
- if (!ZAxisDevice.CheckServoAtPosition(BoatPosition.HomePosition.ToString()))
- {
- ShutterMoveFailedForInterlock.Set();
- return true;
- }
- return Shutter.SetOpen(isOpen, out reason);
- }
- private bool SetAutoShutterRotateOpen(out string reason, int time, object[] param)
- {
- reason = string.Empty;
- bool.TryParse(param[0].ToString(), out bool isOpen);
- //if (BoatDevice.BoatCurrentPosition != BoatPosition.HomePosition && BoatDevice.BoatCurrentPosition != BoatPosition.ProcessPosition)
- //{
- // AutoShutter.AutoShutterMoveFailedForInterlock.Set();
- // return false;
- //}
- //return AutoDoor.SetShutterRotateOpen(isOpen, out reason);
- return true;
- }
- private bool SetCommand(out string reason, int time, object[] param)
- {
- reason = string.Empty;
- var command = param[0].ToString();
- switch (command)
- {
- case "Hold":
- _processRoutine.PauseRecipe();
- break;
- case "Hold + Buzzer":
- _processRoutine.PauseRecipe();
- BuzzerOn();
- break;
- case "Buzzer":
- BuzzerOn();
- break;
- case "Leak Check1":
- case "Leak Check2":
- case "Leak Check3":
- int.TryParse(command.Replace("Leak Check", ""), out int index);
- SetLeakCheckTableIndex(index);
- break;
- }
- return true;
- }
- public bool SetSensorRecipeOK(out string reason, int time, object[] param)
- {
- reason = string.Empty;
- SensorRecipeOK.Value = true;
- //SensorPROCManualOK.Value = false;
- return true;
- }
- public bool SetSensorPROCManualOK(out string reason, int time, object[] param)
- {
- reason = string.Empty;
- SensorRecipeOK.Value = false;
- //SensorPROCManualOK.Value = true;
- return true;
- }
- public bool SetEditRecipeName(out string reason, int time, object[] param)
- {
- reason = string.Empty;
- EditRecipeName = param[0].ToString();
- return true;
- }
- public bool SetEditRecipeStepName(out string reason, int time, object[] param)
- {
- reason = string.Empty;
- EditRecipeStepName = param[0].ToString();
- return true;
- }
- private void BuzzerOn()
- {
- _signalTowerDevice.IsAutoSetLight = false;
- _signalTowerDevice.SetLight(LightType.Buzzer1, TowerLightStatus.On);
- }
- public bool CheckBoatState()
- {
- return (Singleton<EquipmentManager>.Instance.Modules[ModuleName.Boat] as BoatModule).IsReady;
- }
- //#region Temperature/Pressure Tolerance
- //#region Heater Tolerance Alarm
- //public bool CheckHeaterBottomToleranceAlaram()
- //{
- // return Heater2.DeviceData.IsLspModeFeedBack ? Heater2.CheckToleranceAlarm() : Heater1.CheckToleranceAlarm();
- //}
- //public bool CheckHeaterCenterBottomToleranceAlaram()
- //{
- // return Heater4.DeviceData.IsLspModeFeedBack ? Heater4.CheckToleranceAlarm() : Heater3.CheckToleranceAlarm();
- //}
- //public bool CheckHeaterCenterToleranceAlaram()
- //{
- // return Heater6.DeviceData.IsLspModeFeedBack ? Heater6.CheckToleranceAlarm() : Heater5.CheckToleranceAlarm();
- //}
- //public bool CheckHeaterCenterTopToleranceAlaram()
- //{
- // return Heater8.DeviceData.IsLspModeFeedBack ? Heater8.CheckToleranceAlarm() : Heater7.CheckToleranceAlarm();
- //}
- //public bool CheckHeaterTopToleranceAlaram()
- //{
- // return Heater10.DeviceData.IsLspModeFeedBack ? Heater10.CheckToleranceAlarm() : Heater9.CheckToleranceAlarm();
- //}
- //public void SetHeaterBottomToleranceAlaram()
- //{
- // if (Heater2.DeviceData.IsLspModeFeedBack)
- // Heater2.SetToleranceAlarm();
- // else
- // Heater1.SetToleranceAlarm();
- //}
- //public void SetHeaterCenterBottomToleranceAlaram()
- //{
- // if (Heater4.DeviceData.IsLspModeFeedBack)
- // Heater4.SetToleranceAlarm();
- // else
- // Heater3.SetToleranceAlarm();
- //}
- //public void SetHeaterCenterToleranceAlaram()
- //{
- // if (Heater6.DeviceData.IsLspModeFeedBack)
- // Heater6.SetToleranceAlarm();
- // else
- // Heater5.SetToleranceAlarm();
- //}
- //public void SetHeaterCenterTopToleranceAlaram()
- //{
- // if (Heater8.DeviceData.IsLspModeFeedBack)
- // Heater8.SetToleranceAlarm();
- // else
- // Heater7.SetToleranceAlarm();
- //}
- //public void SetHeaterTopToleranceAlaram()
- //{
- // if (Heater10.DeviceData.IsLspModeFeedBack)
- // Heater10.SetToleranceAlarm();
- // else
- // Heater9.SetToleranceAlarm();
- //}
- //#endregion
- //#region Heater Tolerance Warning
- //public bool CheckHeaterBottomToleranceWarning()
- //{
- // return Heater2.DeviceData.IsLspModeFeedBack ? Heater2.CheckToleranceWarning() : Heater1.CheckToleranceWarning();
- //}
- //public bool CheckHeaterCenterBottomToleranceWarning()
- //{
- // return Heater4.DeviceData.IsLspModeFeedBack ? Heater4.CheckToleranceWarning() : Heater3.CheckToleranceWarning();
- //}
- //public bool CheckHeaterCenterToleranceWarning()
- //{
- // return Heater6.DeviceData.IsLspModeFeedBack ? Heater6.CheckToleranceWarning() : Heater5.CheckToleranceWarning();
- //}
- //public bool CheckHeaterCenterTopToleranceWarning()
- //{
- // return Heater8.DeviceData.IsLspModeFeedBack ? Heater8.CheckToleranceWarning() : Heater7.CheckToleranceWarning();
- //}
- //public bool CheckHeaterTopToleranceWarning()
- //{
- // return Heater10.DeviceData.IsLspModeFeedBack ? Heater10.CheckToleranceWarning() : Heater9.CheckToleranceWarning();
- //}
- //public void SetHeaterBottomToleranceWarning()
- //{
- // if (Heater2.DeviceData.IsLspModeFeedBack)
- // Heater2.SetToleranceWarning();
- // else
- // Heater1.SetToleranceWarning();
- //}
- //public void SetHeaterCenterBottomToleranceWarning()
- //{
- // if (Heater4.DeviceData.IsLspModeFeedBack)
- // Heater4.SetToleranceWarning();
- // else
- // Heater3.SetToleranceWarning();
- //}
- //public void SetHeaterCenterToleranceWarning()
- //{
- // if (Heater6.DeviceData.IsLspModeFeedBack)
- // Heater6.SetToleranceWarning();
- // else
- // Heater5.SetToleranceWarning();
- //}
- //public void SetHeaterCenterTopToleranceWarning()
- //{
- // if (Heater8.DeviceData.IsLspModeFeedBack)
- // Heater8.SetToleranceWarning();
- // else
- // Heater7.SetToleranceWarning();
- //}
- //public void SetHeaterTopToleranceWarning()
- //{
- // if (Heater10.DeviceData.IsLspModeFeedBack)
- // Heater10.SetToleranceWarning();
- // else
- // Heater9.SetToleranceWarning();
- //}
- //#endregion
- //#region Pressure Tolerance Alarm
- ////public bool CheckPressureToleranceAlaram()
- ////{
- //// return APC.CheckToleranceAlarm();
- ////}
- ////public void SetPressureToleranceAlaram()
- ////{
- //// APC.SetToleranceAlarm();
- ////}
- //#endregion
- //#region Pressure Tolerance Warning
- ////public bool CheckPressureToleranceWarning()
- ////{
- //// return APC.CheckToleranceWarning();
- ////}
- ////public void SetPressureToleranceWarning()
- ////{
- //// APC.SetToleranceWarning();
- ////}
- //#endregion
- //#region Reset Tolerance
- //public void ResetToleranceAlarm()
- //{
- // foreach (var heater in _heaters)
- // {
- // heater.Reset();
- // }
- // foreach (var key in _gasMFCs.Keys)
- // {
- // _gasMFCs[key].Reset();
- // }
- // //APC.Reset();
- //}
- //public void ResetToleranceAlarmChecker()
- //{
- // foreach (var heater in _heaters)
- // {
- // heater.ResetAlarmChecker();
- // heater.ResetWarningChecker();
- // }
- // foreach (var key in _gasMFCs.Keys)
- // {
- // _gasMFCs[key].ResetAlarmChecker();
- // _gasMFCs[key].ResetWarningChecker();
- // }
- // //APC.ResetAlarmChecker();
- // //APC.ResetWarningChecker();
- //}
- //#endregion
- //#endregion
- private void SetHeaterControlParameters(object[] param)
- {
- //Mode参数;Correct Table;PID Table
- //"Heater;Parameter\\TempCorrection\\tempCorrect,2,Name2;Parameter\\TempPID\\tempPID,3,Name3"
- if (param == null || param.Length == 0)
- {
- EV.PostWarningLog(Module, $"Invalid heater parameter");
- return;
- }
- var paras = param[0].ToString().Split(';');
- if (paras == null || paras.Length < 3)
- {
- EV.PostWarningLog(Module, $"Invalid heater parameter");
- return;
- }
- var controlMode = paras[0];
- var correct = paras[1];
- var pid = paras[2];
- HeaterU.SetControlMode(controlMode);
- HeaterCU.SetControlMode(controlMode);
- HeaterC.SetControlMode(controlMode);
- HeaterCL.SetControlMode(controlMode);
- HeaterL.SetControlMode(controlMode);
- SetHeaterCorrectParameters(correct);
- SetHeaterPIDParameters(pid);
- }
- private void SetHeaterCorrectParameters(string correct)
- {
- HeaterU.SetCorrectParameters(correct);
- HeaterCU.SetCorrectParameters(correct);
- HeaterC.SetCorrectParameters(correct);
- HeaterCL.SetCorrectParameters(correct);
- HeaterL.SetCorrectParameters(correct);
- }
- private void SetHeaterPIDParameters(string pid)
- {
- HeaterU.SetPIDParameters(pid);
- HeaterCU.SetPIDParameters(pid);
- HeaterC.SetPIDParameters(pid);
- HeaterCL.SetPIDParameters(pid);
- HeaterL.SetPIDParameters(pid);
- }
- private bool SetCEXHEnable(object[] param)
- {
- if (param != null && param.Length > 0)
- {
- bool.TryParse(param[0].ToString(), out bool isEnable);
- _fFUs.ForEach(a => a.SetSwitch(isEnable));
- }
- return true;
- }
- private bool SetHTR1Enable(object[] param)
- {
- if (param != null && param.Length > 0)
- {
- bool.TryParse(param[0].ToString(), out bool isEnable);
- SC.SetItemValue($"PM1.IsHTR1Enable", isEnable);
- TrigHeaterAllEnable?.SetTrigger(isEnable, out _);
- }
- return true;
- }
- private bool SetHTR2Enable(object[] param)
- {
- if (param != null && param.Length > 0)
- {
- bool.TryParse(param[0].ToString(), out bool isEnable);
- SC.SetItemValue($"PM1.IsHTR2Enable", isEnable);
- }
- return true;
- }
- private bool SetHTR3Enable(object[] param)
- {
- if (param != null && param.Length > 0)
- {
- bool.TryParse(param[0].ToString(), out bool isEnable);
- SC.SetItemValue($"PM1.IsHTR3Enable", isEnable);
- }
- return true;
- }
- }
- }
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