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- <?xml version="1.0" encoding="utf-8"?>
- <Aitex>
- <TableParameterFormat ChamberType="APCPID" Version="1.0" TableNumber="10">
- <!--###########################################-->
- <Catalog DisplayName="ParameterInfo">
- <Group DisplayName="Parameter Information">
- <Step ModuleName="" DeviceType="" DisplayName="No." ControlName="TableNo" InputType="ReadOnly" />
- <Step ModuleName="" DeviceType="" DisplayName="Name" ControlName="Name" InputType="TextInput" />
- <Step ModuleName="" DeviceType="" DisplayName="P" DefaultValue="0.1" ControlName="P" InputType="DoubleInput" InputMode="" Min="0.01" Max="2000"/>
- <Step ModuleName="" DeviceType="" DisplayName="I" DefaultValue="0" ControlName="I" InputType="DoubleInput" InputMode="" Min="0" Max="2000"/>
- <Step ModuleName="" DeviceType="" DisplayName="D" DefaultValue="0" ControlName="D" InputType="DoubleInput" InputMode="" Min="0" Max="2000"/>
- <Step ModuleName="" DeviceType="" DisplayName="a" DefaultValue="0" ControlName="a" InputType="DoubleInput" InputMode="" Min="0" Max="2000"/>
- </Group>
- </Catalog>
- <!--###########################################-->
- <Catalog DisplayName="Table">
- <Group DisplayName="Press" ControlName="Press">
- <Step ModuleName="" DeviceType="" DisplayName="No." ControlName="No" InputType="ReadOnly" />
- <Step ModuleName="" DeviceType="" DisplayName="Name" ControlName="Name" InputType="TextInput" />
- <Step ModuleName="" DeviceType="" DisplayName="P" DefaultValue="0.1" ControlName="P" InputType="DoubleInput" InputMode="" Min="0.01" Max="2000"/>
- <Step ModuleName="" DeviceType="" DisplayName="I" DefaultValue="0" ControlName="I" InputType="DoubleInput" InputMode="" Min="0" Max="2000"/>
- <Step ModuleName="" DeviceType="" DisplayName="D" DefaultValue="0" ControlName="D" InputType="DoubleInput" InputMode="" Min="0" Max="2000"/>
- <Step ModuleName="" DeviceType="" DisplayName="a" DefaultValue="0" ControlName="a" InputType="DoubleInput" InputMode="" Min="0" Max="2000"/>
- <Step ModuleName="" DeviceType="" DisplayName="offset" DefaultValue="0" ControlName="offset" InputType="NumInput" InputMode="" Min="-999" Max="2000"/>
- <Step ModuleName="" DeviceType="" DisplayName="CH(mm)" DefaultValue="0.1" ControlName="CH" InputType="DoubleInput" InputMode="" Min="0.1" Max="2000"/>
- <Step ModuleName="" DeviceType="" DisplayName="CL(mm)" DefaultValue="0.1" ControlName="CL" InputType="DoubleInput" InputMode="" Min="0.1" Max="2000"/>
- </Group>
- </Catalog>
- </TableParameterFormat>
- <TableParameterSchema>
- <xs:schema attributeFormDefault="unqualified" elementFormDefault="qualified" xmlns:xs="http://www.w3.org/2001/XMLSchema">
- <xs:simpleType name="booleanType">
- <xs:restriction base="xs:string">
- <xs:enumeration value="0" />
- <xs:enumeration value="1" />
- <xs:enumeration value="False" />
- <xs:enumeration value="True" />
- <xs:enumeration value="false" />
- <xs:enumeration value="true" />
- </xs:restriction>
- </xs:simpleType>
- <xs:element name="TableParameterData">
- <xs:complexType>
- <xs:sequence>
- <xs:element maxOccurs="unbounded" name="Step">
- <xs:complexType>
- <xs:attribute name="TableNo" type="xs:string" use="required" />
- <xs:attribute name="Name" type="xs:string" use="required" />
- <xs:attribute name="Type" type="xs:string" use="required" />
- <!--<xs:attribute name="UseTemp" type="xs:decimal" use="required" />-->
- </xs:complexType>
- </xs:element>
- </xs:sequence>
- <xs:attribute name="ParameterChamberType" type="xs:string" fixed="Parameter" use="required" />
- <xs:attribute name="ParameterType" type="xs:string" use="required" />
- <xs:attribute name="ParameterVersion" type="xs:string" fixed="1.0" use="required" />
- <xs:attribute name="CreatedBy" type="xs:string" use="required" />
- <xs:attribute name="CreationTime" type="xs:dateTime" use="required" />
- <xs:attribute name="LastRevisedBy" type="xs:string" use="required" />
- <xs:attribute name="LastRevisionTime" type="xs:dateTime" use="required" />
- <xs:attribute name="Description" type="xs:string" use="required" />
- </xs:complexType>
- </xs:element>
- </xs:schema>
- </TableParameterSchema>
- </Aitex>
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