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- using System;
- using System.Collections.Generic;
- using System.Linq;
- using System.Text;
- using System.Threading.Tasks;
- using Aitex.Core.RT.DataCenter;
- using Aitex.Core.RT.Device;
- using Aitex.Core.RT.Event;
- using Aitex.Core.RT.Log;
- using Aitex.Core.RT.SCCore;
- using MECF.Framework.Common.DataCenter;
- using MECF.Framework.Common.DBCore;
- using MECF.Framework.Common.Equipment;
- using MECF.Framework.Common.Schedulers;
- using MECF.Framework.Common.SubstrateTrackings;
- using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.TMs;
- namespace MECF.Framework.RT.EquipmentLibrary.HardwareUnits.PMs
- {
- public class PM : BaseDevice, IDevice, IPM
- {
- //如果true,robot采用extend, retract指令
- //如果false,robot采用pick,place指令
- public bool IsActiveHandoff { get; set; }
- //如果true,robot调用收尾PostTransfer
- public bool IsNeedPostTransfer { get; set; }
- public virtual double ChamberPressure { get; }
- public virtual bool IsError { get; }
- public virtual bool IsIdle { get; }
- public virtual bool IsProcessing { get; }
- public virtual bool IsInstalled { get; set; }
- public virtual double ForelinePressure { get; set; }
- protected readonly string _statNameWaferProcessed;
- protected readonly string _statNameWaferProcessedSincePreviousClean;
- protected readonly string _statNameWaferProcessedSincePreviousWash;
- public PM(string module) : base(module, module, module, module)
- {
- _statNameWaferProcessed = $"{module}.WaferProcessed";
- _statNameWaferProcessedSincePreviousClean = $"{module}.WaferProcessedSincePreviousClean";
- _statNameWaferProcessedSincePreviousWash = $"{module}.WaferProcessedSincePreviousWash";
- }
- public virtual bool Initialize()
- {
- DATA.Subscribe($"{Name}.IsAtm", () => { return CheckAtm(); });
- DATA.Subscribe($"{Name}.IsVacuum", () => { return CheckVacuum(); });
- DATA.Subscribe($"{Name}.ChamberPressure", () => ChamberPressure);
- IsInstalled = !SC.ContainsItem($"System.{Name}IsInstalled") || SC.GetValue<bool>($"System.{Name}IsInstalled");
- StatsDataManager.Instance.Subscribe(_statNameWaferProcessed, $"{Name} Wafer processed", 0);
- StatsDataManager.Instance.Subscribe(_statNameWaferProcessedSincePreviousClean, $"{Name} Wafer processed since previous clean", 0);
- return true;
- }
- public virtual bool CheckAtm()
- {
- return false;
- }
- public virtual bool CheckVacuum()
- {
- return false;
- }
- public virtual bool CheckChuckState()
- {
- return false;
- }
- public virtual bool CheckServoTransferPos()
- {
- return false;
- }
- public virtual bool CheckChuckPos()
- {
- return false;
- }
- public virtual bool CheckHandoff(EnumTransferType type)
- {
- return false;
- }
- public virtual bool CheckEnableTransfer(EnumTransferType type, out string reason)
- {
- reason = string.Empty;
- return false;
- }
- public virtual bool CheckEnableTransfer(EnumTransferType type, int slot, out string reason)
- {
- reason = string.Empty;
- return false;
- }
- public virtual bool CheckEnablePump(out string reason)
- {
- reason = "Undefined";
- return false;
- }
- public virtual void Monitor()
- {
- }
- public virtual void Terminate()
- {
- }
- public virtual void Reset()
- {
- }
- public virtual bool PrepareTransfer(EnumTransferType type, out string reason)
- {
- reason = string.Empty;
- return true;
- }
- public virtual bool Home()
- {
- return true;
- }
- public virtual void PostTransfer(EnumTransferType type)
- {
- }
- public virtual void TransferHandoff(EnumTransferType type)
- {
- }
-
- public virtual void StartProcess(string recipeName, string recipeContent, bool isClean)
- {
- }
- public virtual bool SetPumpOn(out string reason)
- {
- throw new NotImplementedException();
- }
- public virtual void OnProcessStart(string guid, string recipeName, bool isClean)
- {
- ProcessDataRecorder.Start(guid, recipeName,
- WaferManager.Instance.GetWafer(ModuleHelper.Converter(Module), 0).InnerId.ToString(), Module);
- if (!isClean)
- {
- int value1 = StatsDataManager.Instance.Increase(_statNameWaferProcessed);
- int value2 = StatsDataManager.Instance.Increase(_statNameWaferProcessedSincePreviousClean);
- LOG.Write($"{_statNameWaferProcessed} counter increase 1 to {value1}");
- LOG.Write($"{_statNameWaferProcessedSincePreviousClean} counter increase 1 to {value2}");
- }
- LOG.Write($"{Module} start run recipe {recipeName}, guid {guid}, clean: {isClean}");
- }
- public virtual bool CheckPumpIsOn()
- {
- throw new NotImplementedException();
- }
- public virtual bool SetPumpOff(out string reason)
- {
- throw new NotImplementedException();
- }
- public virtual void OnProcessEnd(string guid, string recipeName, bool isClean, bool isSucceed)
- {
- if (isClean)
- {
- int value = StatsDataManager.Instance.Reset(_statNameWaferProcessedSincePreviousClean);
- LOG.Write($"{_statNameWaferProcessedSincePreviousClean} counter reset from {value}");
- }
- LOG.Write($"{Module} end run recipe {recipeName}, guid {guid}, clean: {isClean}, result {isSucceed}");
- ProcessDataRecorder.End(guid, isSucceed ? "Complete" : "Failed");
- }
- public virtual void OnProcessAbort(string guid, string recipeName, bool isClean, bool isSucceed)
- {
- if (isClean)
- {
- int value = StatsDataManager.Instance.Reset(_statNameWaferProcessedSincePreviousClean);
- LOG.Write($"{_statNameWaferProcessedSincePreviousClean} counter reset from {value}");
- }
- LOG.Write($"{Module} end run recipe {recipeName}, guid {guid}, clean: {isClean}, result {isSucceed}");
- ProcessDataRecorder.End(guid, "Abort" );
- }
- public virtual bool SetThrottleValvePosition(int slowPumpPosition, out string reason)
- {
- throw new NotImplementedException();
- }
- public virtual bool SetThrottleValvePressure(float pressure, out string reason)
- {
- throw new NotImplementedException();
- }
- public virtual bool CloseThrottleValve(out string reason)
- {
- throw new NotImplementedException();
- }
- public virtual bool SetFastPumpValve(bool isOpen, out string reason)
- {
- throw new NotImplementedException();
- }
- public virtual bool SetSlowPumpValve(bool isOpen, out string reason)
- {
- throw new NotImplementedException();
- }
- public virtual bool OpenThrottleValve(out string reason)
- {
- throw new NotImplementedException();
- }
- public virtual bool SetAllValves(bool isOpen, out string reason)
- {
- reason = string.Empty;
- return true;
- }
- public virtual bool CheckNoError(out List<string> reason)
- {
- reason = new List<string>();
- return true;
- }
- }
- }
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