PM.cs 7.9 KB

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  1. using System;
  2. using System.Collections.Generic;
  3. using System.Linq;
  4. using System.Text;
  5. using System.Threading.Tasks;
  6. using Aitex.Core.RT.DataCenter;
  7. using Aitex.Core.RT.Device;
  8. using Aitex.Core.RT.Event;
  9. using Aitex.Core.RT.Log;
  10. using Aitex.Core.RT.SCCore;
  11. using MECF.Framework.Common.DataCenter;
  12. using MECF.Framework.Common.DBCore;
  13. using MECF.Framework.Common.Equipment;
  14. using MECF.Framework.Common.Schedulers;
  15. using MECF.Framework.Common.SubstrateTrackings;
  16. using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.TMs;
  17. namespace MECF.Framework.RT.EquipmentLibrary.HardwareUnits.PMs
  18. {
  19. public class PM : BaseDevice, IDevice, IPM
  20. {
  21. //如果true,robot采用extend, retract指令
  22. //如果false,robot采用pick,place指令
  23. public bool IsActiveHandoff { get; set; }
  24. //如果true,robot调用收尾PostTransfer
  25. public bool IsNeedPostTransfer { get; set; }
  26. public virtual double ChamberPressure { get; }
  27. public virtual bool IsError { get; }
  28. public virtual bool IsIdle { get; }
  29. public virtual bool IsProcessing { get; }
  30. public virtual bool IsInstalled { get; set; }
  31. public virtual double ForelinePressure { get; set; }
  32. protected readonly string _statNameWaferProcessed;
  33. protected readonly string _statNameWaferProcessedSincePreviousClean;
  34. protected readonly string _statNameWaferProcessedSincePreviousWash;
  35. public PM(string module) : base(module, module, module, module)
  36. {
  37. _statNameWaferProcessed = $"{module}.WaferProcessed";
  38. _statNameWaferProcessedSincePreviousClean = $"{module}.WaferProcessedSincePreviousClean";
  39. _statNameWaferProcessedSincePreviousWash = $"{module}.WaferProcessedSincePreviousWash";
  40. }
  41. public virtual bool Initialize()
  42. {
  43. DATA.Subscribe($"{Name}.IsAtm", () => { return CheckAtm(); });
  44. DATA.Subscribe($"{Name}.IsVacuum", () => { return CheckVacuum(); });
  45. DATA.Subscribe($"{Name}.ChamberPressure", () => ChamberPressure);
  46. IsInstalled = !SC.ContainsItem($"System.{Name}IsInstalled") || SC.GetValue<bool>($"System.{Name}IsInstalled");
  47. StatsDataManager.Instance.Subscribe(_statNameWaferProcessed, $"{Name} Wafer processed", 0);
  48. StatsDataManager.Instance.Subscribe(_statNameWaferProcessedSincePreviousClean, $"{Name} Wafer processed since previous clean", 0);
  49. return true;
  50. }
  51. public virtual bool CheckAtm()
  52. {
  53. return false;
  54. }
  55. public virtual bool CheckVacuum()
  56. {
  57. return false;
  58. }
  59. public virtual bool CheckChuckState()
  60. {
  61. return false;
  62. }
  63. public virtual bool CheckServoTransferPos()
  64. {
  65. return false;
  66. }
  67. public virtual bool CheckChuckPos()
  68. {
  69. return false;
  70. }
  71. public virtual bool CheckHandoff(EnumTransferType type)
  72. {
  73. return false;
  74. }
  75. public virtual bool CheckEnableTransfer(EnumTransferType type, out string reason)
  76. {
  77. reason = string.Empty;
  78. return false;
  79. }
  80. public virtual bool CheckEnableTransfer(EnumTransferType type, int slot, out string reason)
  81. {
  82. reason = string.Empty;
  83. return false;
  84. }
  85. public virtual bool CheckEnablePump(out string reason)
  86. {
  87. reason = "Undefined";
  88. return false;
  89. }
  90. public virtual void Monitor()
  91. {
  92. }
  93. public virtual void Terminate()
  94. {
  95. }
  96. public virtual void Reset()
  97. {
  98. }
  99. public virtual bool PrepareTransfer(EnumTransferType type, out string reason)
  100. {
  101. reason = string.Empty;
  102. return true;
  103. }
  104. public virtual bool Home()
  105. {
  106. return true;
  107. }
  108. public virtual void PostTransfer(EnumTransferType type)
  109. {
  110. }
  111. public virtual void TransferHandoff(EnumTransferType type)
  112. {
  113. }
  114. public virtual void StartProcess(string recipeName, string recipeContent, bool isClean)
  115. {
  116. }
  117. public virtual bool SetPumpOn(out string reason)
  118. {
  119. throw new NotImplementedException();
  120. }
  121. public virtual void OnProcessStart(string guid, string recipeName, bool isClean)
  122. {
  123. ProcessDataRecorder.Start(guid, recipeName,
  124. WaferManager.Instance.GetWafer(ModuleHelper.Converter(Module), 0).InnerId.ToString(), Module);
  125. if (!isClean)
  126. {
  127. int value1 = StatsDataManager.Instance.Increase(_statNameWaferProcessed);
  128. int value2 = StatsDataManager.Instance.Increase(_statNameWaferProcessedSincePreviousClean);
  129. LOG.Write($"{_statNameWaferProcessed} counter increase 1 to {value1}");
  130. LOG.Write($"{_statNameWaferProcessedSincePreviousClean} counter increase 1 to {value2}");
  131. }
  132. LOG.Write($"{Module} start run recipe {recipeName}, guid {guid}, clean: {isClean}");
  133. }
  134. public virtual bool CheckPumpIsOn()
  135. {
  136. throw new NotImplementedException();
  137. }
  138. public virtual bool SetPumpOff(out string reason)
  139. {
  140. throw new NotImplementedException();
  141. }
  142. public virtual void OnProcessEnd(string guid, string recipeName, bool isClean, bool isSucceed)
  143. {
  144. if (isClean)
  145. {
  146. int value = StatsDataManager.Instance.Reset(_statNameWaferProcessedSincePreviousClean);
  147. LOG.Write($"{_statNameWaferProcessedSincePreviousClean} counter reset from {value}");
  148. }
  149. LOG.Write($"{Module} end run recipe {recipeName}, guid {guid}, clean: {isClean}, result {isSucceed}");
  150. ProcessDataRecorder.End(guid, isSucceed ? "Complete" : "Failed");
  151. }
  152. public virtual void OnProcessAbort(string guid, string recipeName, bool isClean, bool isSucceed)
  153. {
  154. if (isClean)
  155. {
  156. int value = StatsDataManager.Instance.Reset(_statNameWaferProcessedSincePreviousClean);
  157. LOG.Write($"{_statNameWaferProcessedSincePreviousClean} counter reset from {value}");
  158. }
  159. LOG.Write($"{Module} end run recipe {recipeName}, guid {guid}, clean: {isClean}, result {isSucceed}");
  160. ProcessDataRecorder.End(guid, "Abort" );
  161. }
  162. public virtual bool SetThrottleValvePosition(int slowPumpPosition, out string reason)
  163. {
  164. throw new NotImplementedException();
  165. }
  166. public virtual bool SetThrottleValvePressure(float pressure, out string reason)
  167. {
  168. throw new NotImplementedException();
  169. }
  170. public virtual bool CloseThrottleValve(out string reason)
  171. {
  172. throw new NotImplementedException();
  173. }
  174. public virtual bool SetFastPumpValve(bool isOpen, out string reason)
  175. {
  176. throw new NotImplementedException();
  177. }
  178. public virtual bool SetSlowPumpValve(bool isOpen, out string reason)
  179. {
  180. throw new NotImplementedException();
  181. }
  182. public virtual bool OpenThrottleValve(out string reason)
  183. {
  184. throw new NotImplementedException();
  185. }
  186. public virtual bool SetAllValves(bool isOpen, out string reason)
  187. {
  188. reason = string.Empty;
  189. return true;
  190. }
  191. public virtual bool CheckNoError(out List<string> reason)
  192. {
  193. reason = new List<string>();
  194. return true;
  195. }
  196. }
  197. }