LoadLock.cs 3.8 KB

123456789101112131415161718192021222324252627282930313233343536373839404142434445464748495051525354555657585960616263646566676869707172737475767778798081828384858687888990919293949596979899100101102103104105106107108109110111112113114115116117118119120121122123124125126127128129130131132133134135136137138139140141142143144145146147148149150151152153
  1. using System;
  2. using System.Collections.Generic;
  3. using System.Linq;
  4. using System.Text;
  5. using System.Threading.Tasks;
  6. using Aitex.Core.RT.DataCenter;
  7. using Aitex.Core.RT.Device;
  8. using Aitex.Core.RT.Device.Unit;
  9. using MECF.Framework.Common.Schedulers;
  10. using MECF.Framework.Common.SubstrateTrackings;
  11. namespace MECF.Framework.RT.EquipmentLibrary.HardwareUnits.LoadLocks
  12. {
  13. public class LoadLock : BaseDevice, IDevice, ILoadLock
  14. {
  15. public virtual double ChamberPressure { get; }
  16. public virtual double ForelinePressure { get; }
  17. public virtual bool EnableLift { get; }
  18. public const int SlotCount = 2;
  19. public LoadLock(string module, int slotCount) : base(module, module, module, module)
  20. {
  21. WaferManager.Instance.SubscribeLocation(module, slotCount);
  22. EnableLift = true;
  23. }
  24. public LoadLock(string module):this(module, SlotCount)
  25. {
  26. }
  27. public virtual bool Initialize()
  28. {
  29. DATA.Subscribe($"{Name}.IsAtm", () => { return CheckAtm(); });
  30. DATA.Subscribe($"{Name}.IsVacuum", () => { return CheckVacuum(); });
  31. DATA.Subscribe($"{Name}.ChamberPressure", () => ChamberPressure);
  32. DATA.Subscribe($"{Name}.ForelinePressure", () => ForelinePressure);
  33. DATA.Subscribe($"{Name}.EnableLift", () => { return EnableLift; });
  34. return true;
  35. }
  36. public virtual bool CheckAtm()
  37. {
  38. return false;
  39. }
  40. public virtual bool CheckVacuum()
  41. {
  42. return false;
  43. }
  44. public virtual bool CheckIsPumping()
  45. {
  46. return false;
  47. }
  48. public virtual bool SetFastVentValve(bool isOpen, out string reason)
  49. {
  50. reason = string.Empty;
  51. return true;
  52. }
  53. public virtual bool SetSlowVentValve(bool isOpen, out string reason)
  54. {
  55. reason = string.Empty;
  56. return true;
  57. }
  58. public virtual bool SetFastPumpValve(bool isOpen, out string reason)
  59. {
  60. reason = string.Empty;
  61. return true;
  62. }
  63. public virtual bool SetSlowPumpValve(bool isOpen, out string reason)
  64. {
  65. reason = string.Empty;
  66. return true;
  67. }
  68. public virtual bool SetEqualVentValve(bool isOpen, out string reason)
  69. {
  70. reason = string.Empty;
  71. return true;
  72. }
  73. public virtual void Monitor()
  74. {
  75. }
  76. public virtual void Terminate()
  77. {
  78. }
  79. public virtual void Reset()
  80. {
  81. }
  82. public virtual bool SetDoor(bool isOpen, out string reason)
  83. {
  84. reason = string.Empty;
  85. return true;
  86. }
  87. public virtual bool CheckDoorOpen()
  88. {
  89. return true;
  90. }
  91. public virtual bool CheckDoorClose()
  92. {
  93. return true;
  94. }
  95. public virtual bool SetLift(bool isUp, out string reason)
  96. {
  97. reason = string.Empty;
  98. return true;
  99. }
  100. public virtual bool SetLift(int slot, out string reason)
  101. {
  102. reason = string.Empty;
  103. return true;
  104. }
  105. public virtual bool CheckLiftUp()
  106. {
  107. return true;
  108. }
  109. public virtual bool CheckLiftDown()
  110. {
  111. return true;
  112. }
  113. public virtual bool CheckLift(int slot)
  114. {
  115. return true;
  116. }
  117. public virtual bool CheckEnableTransfer(EnumTransferType type)
  118. {
  119. return false;
  120. }
  121. }
  122. }