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- using System;
- using System.Collections.Generic;
- using System.Linq;
- using System.Text;
- using System.Threading.Tasks;
- using Aitex.Core.Common;
- using Aitex.Core.RT.Event;
- using Aitex.Sorter.Common;
- using MECF.Framework.Common.Device.Bases;
- using MECF.Framework.Common.Equipment;
- using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.LoadPorts;
- using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.LoadPorts.TDK;
- namespace MECF.Framework.RT.EquipmentLibrary.HardwareUnits.Efems
- {
- public interface IEfemBase
- {
- }
- public interface IEfemController
- {
- //efem
- event Action<string/*ModuleName*/, EventLevel, string/*message*/> AlarmGenerated;
- bool IsInitialized { get; }
- void Initialize();
- void Terminate();
- bool AlarmIsTripped();
- bool IsOperable();
- bool CheckIsBusy(ModuleName module);
- bool Home(out string reason);
- bool QueryWaferPresence(out string reason);
- //loadport
- event Action<string/*ModuleName*/> CarrierArrived;
- event Action<string/*ModuleName*/> CarrierRemoved;
- event Action<string/*ModuleName*/, string /*message*/> CarrierPresenceStateError;
- event Action<string/*ModuleName*/, bool/*present*/> CarrierPresenceStateChanged;
- event Action<string/*ModuleName*/> CarrierDoorClosed;
- event Action<string/*ModuleName*/> CarrierDoorOpened;
- event Action<string/*ModuleName*/> E84HandOffStart;
- event Action<string/*ModuleName*/> E84HandOffComplete;
- bool HomeLoadPort(string lp, out string reason);
- bool LoadPortClearAlarm(string lp, out string reason);
- bool UnclampCarrier(string lp, out string reason);
- bool ClampCarrier(string lp, out string reason);
- bool MoveCarrierPort(string lp, string position, out string reason);
- bool OpenCarrierDoor(string lp, out string reason);
- bool OpenDoorAndMapCarrier(string lp, out string slotMap, out string reason);
- bool CloseCarrierDoor(string lp, out string reason);
- bool GetLoadPortStatus(string lp, out LoadportCassetteState cassetteState, out FoupClampState clampState, out FoupDockState dockState, out FoupDoorState doorState, out string reason);
- bool MapCarrier(string lp, out string slotMap, out string reason);
- bool QueryMapResult(string lp, out string reason, bool mapByRobot = true);
- //carrier ID
- bool ReadCarrierId(string lp, out string carrierId, out string reason);
- //aligner
- bool HomeWaferAligner(out string reason);
- bool AlignWafer(double angle, out string reason);
- bool AlignerMapWaferPresence(out string slotMap, out string reason);
- //robot
- bool HomeAllAxes(out string reason);
- bool QueryRobotWaferPresence(out string slotMap, out string reason);
- bool GetTwoWafers(ModuleName chamber, int slot, out string reason);
- bool PutTwoWafers(ModuleName chamber, int slot, out string reason);
- bool GetWafer(ModuleName chamber, int slot, Hand hand, out string reason);
- bool PutWafer(ModuleName chamber, int slot, Hand hand, out string reason);
- bool MoveToReadyGet(ModuleName chamber, int slot, Hand hand, out string reason);
- bool MoveToReadyPut(ModuleName chamber, int slot, Hand hand, out string reason);
- //signal tower
- bool SetSignalLight(LightType type, TowerLightStatus state, out string reason);
- [Obsolete]
- bool SetLoadPortLight(ModuleName chamber, Indicator light, IndicatorState state);
-
- bool SetLoadPortLight(ModuleName chamber, IndicatorType lightType, IndicatorState state, out string reason);
- bool SetE84Available(string lp, out string reason);
- bool SetE84Unavailable(string lp, out string reason);
- }
- }
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