Process.cs 99 KB

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  1. using Aitex.Core.Common;
  2. using Aitex.Core.RT.Event;
  3. using Aitex.Core.RT.Log;
  4. using Aitex.Core.RT.OperationCenter;
  5. using Aitex.Core.RT.Routine;
  6. using Aitex.Core.RT.SCCore;
  7. using Aitex.Core.Util;
  8. using MECF.Framework.Common.DBCore;
  9. using MECF.Framework.Common.Equipment;
  10. using MECF.Framework.Common.Alarms;
  11. using MECF.Framework.Common.Event;
  12. using MECF.Framework.Common.SubstrateTrackings;
  13. using System;
  14. using System.Collections.Generic;
  15. using FurnaceRT.Equipments.PMs.Routines;
  16. using System.Diagnostics;
  17. using MECF.Framework.Common.DataCenter;
  18. using System.Runtime.Remoting.Metadata.W3cXsd2001;
  19. using FurnaceRT.Equipments.Systems;
  20. using MECF.Framework.Common.CommonData.EnumData;
  21. using MECF.Framework.Common.FAServices;
  22. using System.Threading.Tasks;
  23. using DocumentFormat.OpenXml.Drawing.Charts;
  24. using MECF.Framework.Common.Device;
  25. using Aitex.Core.Common.DeviceData;
  26. using Aitex.Sorter.Common;
  27. using MECF.Framework.FA.Core.FAControl;
  28. namespace FurnaceRT.Equipments.PMs.RecipeExecutions
  29. {
  30. public enum RecipeContinueMode
  31. {
  32. None,
  33. WaferReturnAndJobStop,
  34. RecipeCompleted,
  35. StepContinue,
  36. StepRestart,
  37. RecipeRestart,
  38. NextStep,
  39. }
  40. public class Process : PMBaseRoutine
  41. {
  42. enum RecipeRunningState
  43. {
  44. Error,
  45. RecipeCompleted,
  46. ExecStep,
  47. TimeWait,
  48. ConditionWait,
  49. StepCompleted,
  50. Paused,
  51. }
  52. enum RecipeAlaramAction
  53. {
  54. None,
  55. JumpAbortRecipe,
  56. JumpStep,
  57. JumpStepCancelCallLoop,
  58. Abort,
  59. Hold,
  60. IgnoreAlaram,
  61. }
  62. private object _recipeLocker = new object();
  63. private RecipeRunningState _state = RecipeRunningState.ExecStep;
  64. private RecipeRunningState _pausedState = RecipeRunningState.ExecStep;
  65. private double _curStepElpasedTimeBeforePaused;
  66. private double _holdTimeElpasedTime;
  67. private bool _hasItBeenTriggeredRecipeComplete;
  68. private double _waferTimeElpasedTimeBeforPaused;
  69. //Add by SSH,20250930,判断recipe是否执行结束,给job使用
  70. public bool IsRecipeCompleted { get { return _state == RecipeRunningState.RecipeCompleted || _state == RecipeRunningState.Error; } }
  71. private double _totalElpasedTime;
  72. public RecipeContinueMode ContinueAction { get; set; }
  73. public DateTime _recipeStartTime
  74. {
  75. get;
  76. private set;
  77. }
  78. public string CurrentRecipeContent { get; private set; }
  79. public int _currentStepNumber;
  80. private int _currentSubRecipeStepNumber;
  81. private bool _loopEnd;
  82. public int CurStepTotalLoopCount
  83. {
  84. get;
  85. private set;
  86. }
  87. public int CurSubRecipeStepTotalLoopCount
  88. {
  89. get;
  90. private set;
  91. }
  92. public double CurStepTotalTime
  93. {
  94. get
  95. {
  96. if (PMModule.RecipeRunningInfo.RecipeStepList == null || PMModule.RecipeRunningInfo.RecipeStepList.Count == 0 || _state == RecipeRunningState.RecipeCompleted || _state == RecipeRunningState.Error)
  97. return 0;
  98. return PMModule.RecipeRunningInfo.RecipeStepList[_currentStepNumber].StepTime * 1000;
  99. }
  100. }
  101. public string FDCRecipeStep { get; set; }
  102. public int CurrentLoopCount
  103. {
  104. get;
  105. private set;
  106. }
  107. public int CurrentAbortRecipeLoopCount
  108. {
  109. get;
  110. private set;
  111. }
  112. public int CurrentSubRecipeLoopCount
  113. {
  114. get;
  115. private set;
  116. }
  117. public bool IsExecuteAbort
  118. {
  119. get;
  120. private set;
  121. }
  122. public bool IsSubReciep
  123. {
  124. get;
  125. private set;
  126. }
  127. public int AlarmConditionJumpStep { get; set; } = -1;
  128. private DeviceTimer _stepTimer = new DeviceTimer();
  129. private DeviceTimer _holdTimer = new DeviceTimer();
  130. private RecipeFACallback _faCallback;
  131. private RecipeDBCallback _dbCallback;
  132. private Fdc _fdc;
  133. private ModuleName _doModule = ModuleName.PM1;
  134. private bool IsJumpStepCancelCallLoop;
  135. private int _jumpStepNumber;
  136. private int _showStepNo;
  137. private int _subRecipeStartStepNumber;
  138. private RecipeAlaramAction _alarmAction = RecipeAlaramAction.None;
  139. public List<string> _alarmNames
  140. {
  141. private set;
  142. get;
  143. }
  144. private R_TRIG _trigHeaterBottomToleranceAlarm = new R_TRIG();
  145. private R_TRIG _trigHeaterBottomToleranceWarning = new R_TRIG();
  146. private R_TRIG _trigHeaterCenterBottomToleranceAlarm = new R_TRIG();
  147. private R_TRIG _trigHeaterCenterBottomToleranceWarning = new R_TRIG();
  148. private R_TRIG _trigHeaterCenterToleranceAlarm = new R_TRIG();
  149. private R_TRIG _trigHeaterCenterToleranceWarning = new R_TRIG();
  150. private R_TRIG _trigHeaterCenterTopToleranceAlarm = new R_TRIG();
  151. private R_TRIG _trigHeaterCenterTopToleranceWarning = new R_TRIG();
  152. private R_TRIG _trigHeaterTopToleranceAlarm = new R_TRIG();
  153. private R_TRIG _trigHeaterTopToleranceWarning = new R_TRIG();
  154. private R_TRIG _trigPressureToleranceAlarm = new R_TRIG();
  155. private R_TRIG _trigPressureToleranceWarning = new R_TRIG();
  156. private R_TRIG _trigInputSignalTimeOutAlarm = new R_TRIG();
  157. private R_TRIG _trigTemperatureConvergenceTimeOutAlarm = new R_TRIG();
  158. private R_TRIG _trigReachTempTimeOutAlarm = new R_TRIG();
  159. private R_TRIG _trigPressureConvergenceTimeOutAlarm = new R_TRIG();
  160. private R_TRIG _trigReachPressureTimeOutAlarm = new R_TRIG();
  161. private R_TRIG _trigAutoProfileTimeOutAlarm = new R_TRIG();
  162. private Dictionary<string, R_TRIG> _trigMfcToleranceAlarms;
  163. private Dictionary<string, R_TRIG> _trigMfcToleranceWarnings;
  164. private R_TRIG _trigBoatMoveToLoadPositionTimeout = new R_TRIG();
  165. private R_TRIG _trigHeaterProfileFinish = new R_TRIG();
  166. private R_TRIG _trigLeakCheckFinish = new R_TRIG();
  167. private R_TRIG _trigBoatWaitCondition = new R_TRIG();
  168. private R_TRIG _trigAPCWaitCondition = new R_TRIG();
  169. private R_TRIG _trigAUXWaitCondition = new R_TRIG();
  170. private R_TRIG _trigHeaterWaitCondition = new R_TRIG();
  171. private R_TRIG _trigMFCWaitCondition = new R_TRIG();
  172. private string _infoHeaterProfileFinish = "";
  173. private string _infoAUXWaitCondition = "";
  174. private string _infoHeaterWaitCondition = "";
  175. private string _infoMFCWaitCondition = "";
  176. private Dictionary<int, Tuple<bool, int>> _callSubSteps = new Dictionary<int, Tuple<bool, int>>();
  177. private bool _isJumpStep = false;
  178. private double _remainTimeExcludeEnd = 0;
  179. public Process(ModuleName module, PMModule pm) : base(module, pm)
  180. {
  181. Module = module.ToString();
  182. Name = "Process";
  183. _trigMfcToleranceAlarms = new Dictionary<string, R_TRIG>()
  184. {
  185. {"MFC61", new R_TRIG() },
  186. {"MFC13", new R_TRIG() },
  187. {"MFC14", new R_TRIG() },
  188. {"MFC15", new R_TRIG() },
  189. {"MFC16", new R_TRIG() },
  190. {"MFC24", new R_TRIG() },
  191. {"MFC25", new R_TRIG() },
  192. {"MFC26", new R_TRIG() },
  193. {"MFC34", new R_TRIG() },
  194. {"MFC35", new R_TRIG() },
  195. {"MFC36", new R_TRIG() },
  196. {"MFC90", new R_TRIG() },
  197. {"MFC91", new R_TRIG() },
  198. {"MFC84", new R_TRIG() },
  199. };
  200. _trigMfcToleranceWarnings = new Dictionary<string, R_TRIG>()
  201. {
  202. {"MFC61", new R_TRIG() },
  203. {"MFC13", new R_TRIG() },
  204. {"MFC14", new R_TRIG() },
  205. {"MFC15", new R_TRIG() },
  206. {"MFC16", new R_TRIG() },
  207. {"MFC24", new R_TRIG() },
  208. {"MFC25", new R_TRIG() },
  209. {"MFC26", new R_TRIG() },
  210. {"MFC34", new R_TRIG() },
  211. {"MFC35", new R_TRIG() },
  212. {"MFC36", new R_TRIG() },
  213. {"MFC90", new R_TRIG() },
  214. {"MFC91", new R_TRIG() },
  215. {"MFC84", new R_TRIG() },
  216. };
  217. _faCallback = new RecipeFACallback();
  218. _dbCallback = new RecipeDBCallback();
  219. _fdc = new Fdc(Module);
  220. }
  221. public override Result Start(params object[] param)
  222. {
  223. CurStepTotalLoopCount = 0;
  224. _currentSubRecipeStepNumber = CurSubRecipeStepTotalLoopCount = 0;
  225. if (AlarmConditionJumpStep > 0)
  226. _currentStepNumber = AlarmConditionJumpStep;
  227. else
  228. _currentStepNumber = PMModule.IsJobProcess ? 1 : 0; // 如果是从Job Process开始,从1开始,跳过standby step
  229. AlarmConditionJumpStep = -1;
  230. PMModule.RecipeRunningInfo.InnerId = Guid.NewGuid();
  231. PMModule.RecipeRunningInfo.BeginTime = DateTime.Now;
  232. PMModule.RecipeRunningInfo.TotalTime = CalcRecipeTime();
  233. if (PMModule.RecipeRunningInfo.TotalTime < 0)
  234. return Result.FAIL;
  235. PMModule.RecipeRunningInfo.RemainTimeExcludeEndStep = _remainTimeExcludeEnd;
  236. IsSubReciep = false;
  237. IsExecuteAbort = false;
  238. IsJumpStepCancelCallLoop = false;
  239. PMModule.IsPaused = false;
  240. PMModule.IsHeaterProfile = false;
  241. PMModule.IsHeaterProfileSuccess = false;
  242. PMModule.IsMainRecipeComplete = false;
  243. _loopEnd = false;
  244. _isJumpStep = false;
  245. _curStepElpasedTimeBeforePaused = 0;
  246. _waferTimeElpasedTimeBeforPaused = 0;
  247. _totalElpasedTime = 0;
  248. _holdTimeElpasedTime = 0;
  249. _jumpStepNumber = 0;
  250. _showStepNo = 0;
  251. _state = RecipeRunningState.ExecStep;
  252. _alarmAction = RecipeAlaramAction.None;
  253. _alarmNames = new List<string>();
  254. _subRecipeStartStepNumber = 1;
  255. _callSubSteps.Clear();
  256. PMModule.InitAlarmCondition(PMModule.RecipeRunningInfo.Head.AlarmCondition);
  257. PMModule.InitLeakCheck(PMModule.RecipeRunningInfo.Head.LeakCheck);
  258. PMModule.InitN2PurgeMode(PMModule.RecipeRunningInfo.Head.N2PurgeModeStr);
  259. ResetTrig();
  260. Notify($"Start");
  261. _faCallback.RecipeStart(PMModule.Module, PMModule.RecipeRunningInfo.RecipeName);
  262. _dbCallback.RecipeStart(PMModule.Module, 0, PMModule.RecipeRunningInfo.InnerId.ToString(), PMModule.RecipeRunningInfo.RecipeName, GetDBRecipeType(PMModule.RecipeRunningInfo.ExecRecipeType), (int)PMModule.RecipeExecEntryEnumValue);
  263. _dbCallback.RecipeUpdateStatus(PMModule.RecipeRunningInfo.InnerId.ToString(), "InProcess");
  264. _fdc.Reset();
  265. WaferManager.Instance.UpdateWaferProcessStatus(ModuleHelper.Converter(Module), 0, EnumWaferProcessStatus.InProcess);
  266. PMModule.InitScheduleData();
  267. PMModule.ResetFDCRecipeStepName();
  268. PMModule.HeaterEnable(true);
  269. #region 把pj_id更新到process表
  270. //从原来退出process挪到此处写入,是为了避免多个job手动abort掉当前job,而recipe继续执行导致的pj_id更新错误
  271. var firstPjId = Singleton<EquipmentManager>.Instance.GetFirstPJId();
  272. UpdateProcessDataPJid(firstPjId);
  273. #endregion
  274. PMModule.RecipeExecEntryEnumValue = RecipeExecEntryEnum.None;
  275. return Result.RUN;
  276. }
  277. public override Result Monitor()
  278. {
  279. if (!PMModule.CheckEnableRunProcess(out string reason))
  280. {
  281. PMModule.CheckEnableRunProcessAlarm.Set(reason);
  282. return Result.FAIL;
  283. }
  284. //MonitorRecipeAlaramAction();
  285. //if (IsExecuteAbort)
  286. // return Result.DONE;
  287. MonitorRecipePause();
  288. CheckTolerance();
  289. List<RecipeStep> curSteps;
  290. if ((IsSubReciep || PMModule.RecipeRunningInfo.RecipeStepList[_currentStepNumber].IsCallSubStep) && !_isJumpStep)
  291. {
  292. curSteps = PMModule.RecipeRunningInfo.RecipeStepList[_currentStepNumber].SubRecipeSteps;
  293. if (!_callSubSteps.ContainsKey(_currentStepNumber))
  294. _callSubSteps.Add(_currentStepNumber, Tuple.Create(false, 0));
  295. if (PMModule.RecipeRunningInfo.RecipeStepList[_currentStepNumber].IsCallSubStep)
  296. _callSubSteps[_currentStepNumber] = Tuple.Create(true, PMModule.RecipeRunningInfo.RecipeStepList[_currentStepNumber].SubRecipeLoopCount);
  297. if (!IsSubReciep)
  298. {
  299. PMModule.RecipeRunningInfo.SubRecipeCurrentLoopCount = 1;
  300. PMModule.RecipeRunningInfo.SubRecipeLoopCount = PMModule.RecipeRunningInfo.RecipeStepList[_currentStepNumber].SubRecipeLoopCount;
  301. PMModule.RecipeRunningInfo.SubRecipeTable = PMModule.RecipeRunningInfo.RecipeStepList[_currentStepNumber].SubRecipeTableInfo;
  302. _faCallback.RecipeTriggerCallSubRecipe(Module, PMModule.RecipeRunningInfo.RecipeName, PMModule.RecipeRunningInfo.StepNumber.ToString(), PMModule.RecipeRunningInfo.RecipeStepList[_currentStepNumber].SubRecipeTableInfo);
  303. if (PMModule.RecipeRunningInfo.RecipeStepList[_currentStepNumber].StepName == "End" && PMModule.RecipeRunningInfo.RecipeStepList.Count - 1 == _currentStepNumber)
  304. {
  305. _faCallback.RecipeComplete(PMModule.Module, PMModule.RecipeRunningInfo.RecipeName);
  306. _hasItBeenTriggeredRecipeComplete = true;
  307. }
  308. }
  309. PMModule.RecipeRunningInfo.RecipeStepList[_currentStepNumber].IsCallSubStep = false;
  310. IsSubReciep = true;
  311. }
  312. else
  313. {
  314. PMModule.RecipeRunningInfo.SubRecipeTable = string.Empty;
  315. curSteps = PMModule.RecipeRunningInfo.RecipeStepList;
  316. PMModule.RecipeRunningInfo.SubRecipeLoopCount = 0;
  317. }
  318. lock (_recipeLocker)
  319. {
  320. try
  321. {
  322. switch (_state)
  323. {
  324. case RecipeRunningState.ExecStep:
  325. {
  326. PMModule.IsWait = false;
  327. _loopEnd = false;
  328. if (!_holdTimer.IsIdle())
  329. {
  330. _holdTimeElpasedTime += _holdTimer.GetElapseTime();
  331. _holdTimer.Stop();
  332. }
  333. PMModule.ResetToleranceChecker();
  334. _curStepElpasedTimeBeforePaused = 0;
  335. ContinueAction = RecipeContinueMode.None;
  336. if (IsSubReciep)
  337. {
  338. if (curSteps[_currentSubRecipeStepNumber].IsLoopStartStep)
  339. {
  340. CurrentSubRecipeLoopCount++;
  341. PMModule.RecipeRunningInfo.IsLooping = true;
  342. PMModule.RecipeRunningInfo.LoopCountCurrent = CurrentSubRecipeLoopCount - 1;//即使不循环,本身也有一次。本身的一次不算,所以减1
  343. PMModule.RecipeRunningInfo.LoopCountSet = curSteps[_currentSubRecipeStepNumber].LoopCount - 1;//即使不循环,本身也有一次。本身的一次不算,所以减1
  344. }
  345. if (curSteps[_currentSubRecipeStepNumber].IsJumpStep)
  346. {
  347. _faCallback.RecipeTriggerJumpStep(Module, PMModule.RecipeRunningInfo.RecipeName, _currentStepNumber.ToString(), curSteps[_currentStepNumber].JumpStepNo.ToString());
  348. _currentSubRecipeStepNumber = curSteps[_currentSubRecipeStepNumber].JumpStepNo;
  349. }
  350. PMModule.SetFDCRecipeStepName(IsSubReciep, curSteps[_currentSubRecipeStepNumber].StepName, (_currentSubRecipeStepNumber + 1).ToString());
  351. RecipeExec("Sub recipe", curSteps, _currentSubRecipeStepNumber, _curStepElpasedTimeBeforePaused, _currentSubRecipeStepNumber + 1);
  352. }
  353. else
  354. {
  355. if (curSteps[_currentStepNumber].IsLoopStartStep)
  356. {
  357. CurrentLoopCount++;
  358. PMModule.RecipeRunningInfo.IsLooping = true;
  359. PMModule.RecipeRunningInfo.LoopCountCurrent = CurrentLoopCount - 1;//即使不循环,本身也有一次。本身的一次不算,所以减1
  360. PMModule.RecipeRunningInfo.LoopCountSet = curSteps[_currentStepNumber].LoopCount - 1;//即使不循环,本身也有一次。本身的一次不算,所以减1
  361. }
  362. if (curSteps[_currentStepNumber].IsJumpStep)
  363. {
  364. _faCallback.RecipeTriggerJumpStep(Module, PMModule.RecipeRunningInfo.RecipeName, _currentStepNumber.ToString(), curSteps[_currentStepNumber].JumpStepNo.ToString());
  365. curSteps[_currentStepNumber].IsJumpStep = false;//只执行一次
  366. _currentStepNumber = curSteps[_currentStepNumber].JumpStepNo;
  367. }
  368. PMModule.SetFDCRecipeStepName(IsSubReciep, curSteps[_currentStepNumber].StepName, _currentStepNumber.ToString());
  369. RecipeExec("Main recipe", curSteps, _currentStepNumber, _curStepElpasedTimeBeforePaused);
  370. }
  371. }
  372. break;
  373. case RecipeRunningState.TimeWait:
  374. //if (PMModule.IsPaused)
  375. //{
  376. // _state = RecipeRunningState.Paused;
  377. // break;
  378. //}
  379. var leakCheck = PMModule.CheckLeakCheckFinish();
  380. _trigLeakCheckFinish.CLK = !leakCheck;
  381. if (_trigLeakCheckFinish.Q)
  382. LOG.Write($"Wait condition:leak check");
  383. if (_stepTimer.IsTimeout())
  384. {
  385. var heaterProfile = PMModule.CheckHeaterProfileFinish(out reason);
  386. _trigHeaterProfileFinish.CLK = !heaterProfile || _infoHeaterProfileFinish != reason;
  387. if (_trigHeaterProfileFinish.Q)
  388. LOG.Write($"Wait condition:heater profile--{reason}");
  389. _infoHeaterProfileFinish = reason;
  390. var boatWaitCondition = PMModule.CheckBoatWaitCondition(out reason);
  391. _trigBoatWaitCondition.CLK = !boatWaitCondition;
  392. if (_trigBoatWaitCondition.Q)
  393. LOG.Write($"Wait condition:boat--{reason}");
  394. var apcWaitCondition = PMModule.CheckAPCWaitCondition(out reason);
  395. _trigAPCWaitCondition.CLK = !apcWaitCondition;
  396. if (_trigAPCWaitCondition.Q)
  397. LOG.Write($"Wait condition:APC--{reason}");
  398. var auxWaitCondition = PMModule.CheckAUXWaitCondition(out reason);
  399. _trigAUXWaitCondition.CLK = !auxWaitCondition || _infoAUXWaitCondition != reason;
  400. if (_trigAUXWaitCondition.Q)
  401. LOG.Write($"Wait condition:heater profile--{reason}");
  402. _infoAUXWaitCondition = reason;
  403. var heaterWaitCondition = PMModule.CheckHeaterWaitCondition(out reason);
  404. _trigHeaterWaitCondition.CLK = !heaterWaitCondition || _infoHeaterWaitCondition != reason;
  405. if (_trigHeaterWaitCondition.Q)
  406. LOG.Write($"Wait condition:heater--{reason}");
  407. _infoHeaterWaitCondition = reason;
  408. var mfcWaitCondition = PMModule.CheckMFCWaitCondition(out reason);
  409. _trigMFCWaitCondition.CLK = !mfcWaitCondition || _infoMFCWaitCondition != reason;
  410. if (_trigMFCWaitCondition.Q)
  411. LOG.Write($"Wait condition:MFC--{reason}");
  412. _infoMFCWaitCondition = reason;
  413. if (heaterProfile &&
  414. leakCheck &&
  415. boatWaitCondition &&
  416. apcWaitCondition &&
  417. auxWaitCondition &&
  418. heaterWaitCondition &&
  419. mfcWaitCondition)
  420. {
  421. _state = RecipeRunningState.StepCompleted;
  422. }
  423. else
  424. {
  425. PMModule.IsWait = true;
  426. }
  427. }
  428. else
  429. {
  430. PMModule.CheckHeaterProfileFinish(out reason);
  431. PMModule.CheckBoatWaitCondition(out reason);
  432. PMModule.CheckAPCWaitCondition(out reason);
  433. PMModule.CheckAUXWaitCondition(out reason);
  434. PMModule.CheckHeaterWaitCondition(out reason);
  435. PMModule.CheckMFCWaitCondition(out reason);
  436. }
  437. break;
  438. case RecipeRunningState.ConditionWait:
  439. {
  440. if (!PMModule.CheckBoatState() && !PMModule.IsBoatMoveToLoadPosition)
  441. break;
  442. var heaterProfile = PMModule.CheckHeaterProfileFinish(out reason);
  443. _trigHeaterProfileFinish.CLK = !heaterProfile || _infoHeaterProfileFinish != reason;
  444. if (_trigHeaterProfileFinish.Q)
  445. LOG.Write($"Wait condition:heater profile--{reason}");
  446. _infoHeaterProfileFinish = reason;
  447. leakCheck = PMModule.CheckLeakCheckFinish();
  448. _trigLeakCheckFinish.CLK = !leakCheck;
  449. if (_trigLeakCheckFinish.Q)
  450. LOG.Write($"Wait condition:leak check");
  451. var boatWaitCondition = PMModule.CheckBoatWaitCondition(out reason);
  452. _trigBoatWaitCondition.CLK = !boatWaitCondition;
  453. if (_trigBoatWaitCondition.Q)
  454. LOG.Write($"Wait condition:boat--{reason}");
  455. var apcWaitCondition = PMModule.CheckAPCWaitCondition(out reason);
  456. _trigAPCWaitCondition.CLK = !apcWaitCondition;
  457. if (_trigAPCWaitCondition.Q)
  458. LOG.Write($"Wait condition:APC--{reason}");
  459. var auxWaitCondition = PMModule.CheckAUXWaitCondition(out reason);
  460. _trigAUXWaitCondition.CLK = !auxWaitCondition || _infoAUXWaitCondition != reason;
  461. if (_trigAUXWaitCondition.Q)
  462. LOG.Write($"Wait condition:heater profile--{reason}");
  463. _infoAUXWaitCondition = reason;
  464. var heaterWaitCondition = PMModule.CheckHeaterWaitCondition(out reason);
  465. _trigHeaterWaitCondition.CLK = !heaterWaitCondition || _infoHeaterWaitCondition != reason;
  466. if (_trigHeaterWaitCondition.Q)
  467. LOG.Write($"Wait condition:heater--{reason}");
  468. _infoHeaterWaitCondition = reason;
  469. var mfcWaitCondition = PMModule.CheckMFCWaitCondition(out reason);
  470. _trigMFCWaitCondition.CLK = !mfcWaitCondition || _infoMFCWaitCondition != reason;
  471. if (_trigMFCWaitCondition.Q)
  472. LOG.Write($"Wait condition:MFC--{reason}");
  473. _infoMFCWaitCondition = reason;
  474. if (heaterProfile &&
  475. leakCheck &&
  476. boatWaitCondition &&
  477. apcWaitCondition &&
  478. auxWaitCondition &&
  479. heaterWaitCondition &&
  480. mfcWaitCondition)
  481. {
  482. _state = RecipeRunningState.StepCompleted;
  483. }
  484. if (_stepTimer.IsTimeout())
  485. {
  486. if (PMModule.IsBoatMoveToLoadPosition)
  487. {
  488. _trigBoatMoveToLoadPositionTimeout.CLK = !boatWaitCondition;
  489. if (_trigBoatMoveToLoadPositionTimeout.Q)
  490. {
  491. LOG.Info($"stepName:{PMModule.RecipeRunningInfo.StepName},step timeout ,boatWaitCondition={boatWaitCondition}");
  492. }
  493. }
  494. //_trigInputSignalTimeOutAlarm.CLK = !PMModule.CheckExternalSensorCondition();
  495. //if (_trigInputSignalTimeOutAlarm.Q)
  496. // PMModule.InputSignalTimeOutAlarm.Set();
  497. //_trigTemperatureConvergenceTimeOutAlarm.CLK = !PMModule.CheckTempStabilizeCondition();
  498. //if (_trigTemperatureConvergenceTimeOutAlarm.Q)
  499. // PMModule.TemperatureConvergenceTimeOutAlarm.Set();
  500. //_trigReachTempTimeOutAlarm.CLK = !PMModule.CheckReachTempCondition();
  501. //if (_trigReachTempTimeOutAlarm.Q)
  502. // PMModule.TemperatureConvergenceTimeOutAlarm.Set("Reach temp condition timeout");
  503. //_trigPressureConvergenceTimeOutAlarm.CLK = !PMModule.CheckPressureStablilizeCondition();
  504. //if (_trigPressureConvergenceTimeOutAlarm.Q)
  505. // PMModule.PressureConvergenceTimeOutAlarm.Set();
  506. //_trigReachPressureTimeOutAlarm.CLK = !PMModule.CheckReachPressureCondition();
  507. //if (_trigReachPressureTimeOutAlarm.Q)
  508. // PMModule.PressureConvergenceTimeOutAlarm.Set("Reach pressure condition timeout");
  509. //_trigAutoProfileTimeOutAlarm.CLK = !PMModule.CheckFinishAutoProfileCondition();
  510. //if (_trigAutoProfileTimeOutAlarm.Q)
  511. // PMModule.AutoProfileTimeOutAlarm.Set();
  512. //_state = RecipeRunningState.StepCompleted;
  513. }
  514. else
  515. {
  516. _trigBoatMoveToLoadPositionTimeout.RST = true;
  517. }
  518. }
  519. break;
  520. case RecipeRunningState.Paused:
  521. if (!_stepTimer.IsIdle())
  522. {
  523. _curStepElpasedTimeBeforePaused += _stepTimer.GetElapseTime();
  524. _stepTimer.Stop();
  525. }
  526. if (_holdTimer.IsIdle())
  527. _holdTimer.Start(0);
  528. switch (ContinueAction)
  529. {
  530. case RecipeContinueMode.None:
  531. break;
  532. case RecipeContinueMode.StepContinue:
  533. if (!_holdTimer.IsIdle())
  534. {
  535. _holdTimeElpasedTime += _holdTimer.GetElapseTime();
  536. _holdTimer.Stop();
  537. }
  538. _state = RecipeRunningState.ExecStep;
  539. _stepTimer.Stop();
  540. break;
  541. }
  542. break;
  543. case RecipeRunningState.StepCompleted:
  544. {
  545. ResetTrig();
  546. //CloseAllValve();
  547. _curStepElpasedTimeBeforePaused = 0;
  548. var stepName = "";
  549. var stepTime = (float)_stepTimer.GetElapseTime() / 1000;//sec
  550. var thickness = 0.0f;
  551. if (IsSubReciep)
  552. {
  553. stepName = PMModule.RecipeRunningInfo.RecipeStepList[_currentStepNumber].SubRecipeSteps[_currentSubRecipeStepNumber].StepName;
  554. float.TryParse(PMModule.RecipeRunningInfo.RecipeStepList[_currentStepNumber].SubRecipeSteps[_currentSubRecipeStepNumber].FilmThickFormula, out thickness);
  555. //放在前面,stepnumber后面会被更新
  556. if (!_isJumpStep)
  557. {
  558. _faCallback.RecipeStepEnd(PMModule.Module, PMModule.RecipeRunningInfo.RecipeName, _currentSubRecipeStepNumber + 1);
  559. _dbCallback.RecipeStepEnd(PMModule.RecipeRunningInfo.InnerId.ToString(), _currentSubRecipeStepNumber + 1, _fdc.DataList, SC.GetStringValue("PM1.TempCorrection"), SC.GetStringValue("PM1.Heater.PID"));
  560. }
  561. _fdc.Stop();
  562. _totalElpasedTime += curSteps[_currentSubRecipeStepNumber].StepTime;
  563. _subRecipeStartStepNumber++;
  564. if (_loopEnd)
  565. {
  566. _currentSubRecipeStepNumber++;
  567. CurrentSubRecipeLoopCount = 0;
  568. PMModule.RecipeRunningInfo.IsLooping = false;
  569. PMModule.RecipeRunningInfo.LoopCountCurrent = 0;
  570. PMModule.RecipeRunningInfo.LoopCountSet = 0;
  571. }
  572. else
  573. {
  574. SubRecipeLoopEndCheck(curSteps);
  575. }
  576. if (_currentSubRecipeStepNumber >= curSteps.Count)
  577. {
  578. PMModule.RecipeRunningInfo.RecipeStepList[_currentStepNumber].SubRecipeLoopCount--;
  579. if (PMModule.RecipeRunningInfo.RecipeStepList[_currentStepNumber].SubRecipeLoopCount > 0)
  580. {
  581. IsSubReciep = true;
  582. }
  583. else
  584. {
  585. IsSubReciep = false;
  586. }
  587. _currentSubRecipeStepNumber = 0;
  588. CurrentSubRecipeLoopCount = 0;
  589. //// sub recipe执行完后,检查下是否在main recipe的loop内
  590. //RecipeLoopEndCheck();
  591. //if (_currentStepNumber >= PMModule.RecipeRunningInfo.RecipeStepList.Count)
  592. //{
  593. // _currentStepNumber = PMModule.RecipeRunningInfo.RecipeStepList.Count - 1;
  594. // _state = RecipeRunningState.RecipeCompleted;
  595. //}
  596. }
  597. _state = RecipeRunningState.ExecStep;
  598. _stepTimer.Stop();
  599. }
  600. else
  601. {
  602. stepName = PMModule.RecipeRunningInfo.RecipeStepList[_currentStepNumber].StepName;
  603. float.TryParse(PMModule.RecipeRunningInfo.RecipeStepList[_currentStepNumber].FilmThickFormula, out thickness);
  604. //放在前面,stepnumber后面会被更新
  605. if (!_isJumpStep)
  606. {
  607. _faCallback.RecipeStepEnd(PMModule.Module, PMModule.RecipeRunningInfo.RecipeName, _currentStepNumber);
  608. _dbCallback.RecipeStepEnd(PMModule.RecipeRunningInfo.InnerId.ToString(), _currentStepNumber, _fdc.DataList, SC.GetStringValue("PM1.TempCorrection"), SC.GetStringValue("PM1.Heater.PID"));
  609. }
  610. _fdc.Stop();
  611. if (_currentStepNumber >= 0 && !IsSubReciep)
  612. {
  613. _totalElpasedTime += PMModule.RecipeRunningInfo.RecipeStepList[_currentStepNumber].StepTime;
  614. }
  615. if (IsSubReciep)
  616. IsSubReciep = false;
  617. if (_loopEnd)
  618. {
  619. _currentStepNumber++;
  620. CurrentLoopCount = 0;
  621. CurrentAbortRecipeLoopCount = 0;
  622. CurrentSubRecipeLoopCount = 0;
  623. PMModule.RecipeRunningInfo.IsLooping = false;
  624. PMModule.RecipeRunningInfo.LoopCountCurrent = 0;
  625. PMModule.RecipeRunningInfo.LoopCountSet = 0;
  626. }
  627. else
  628. {
  629. RecipeLoopEndCheck(PMModule.RecipeRunningInfo.RecipeStepList);
  630. }
  631. if (_currentStepNumber >= PMModule.RecipeRunningInfo.RecipeStepList.Count - 1)
  632. {
  633. for (int i = 0; i < SC.GetValue<int>($"Boat.SlotCount"); i++)
  634. {
  635. if (!WaferManager.Instance.CheckHasWafer(ModuleHelper.Converter(Module), i))
  636. continue;
  637. var wafer = WaferManager.Instance.GetWafer(ModuleHelper.Converter(Module), i);
  638. if (wafer.ProcessState == EnumWaferProcessStatus.Completed ||
  639. wafer.ProcessState == EnumWaferProcessStatus.Idle)
  640. continue;
  641. WaferManager.Instance.UpdateWaferProcessStatus(ModuleHelper.Converter(Module), i, EnumWaferProcessStatus.Completed);
  642. }
  643. PMModule.IsMainRecipeComplete = true;
  644. }
  645. if (_currentStepNumber >= PMModule.RecipeRunningInfo.RecipeStepList.Count)
  646. {
  647. _currentStepNumber = PMModule.RecipeRunningInfo.RecipeStepList.Count - 1;
  648. _state = RecipeRunningState.RecipeCompleted;
  649. }
  650. else
  651. {
  652. _state = RecipeRunningState.ExecStep;
  653. _stepTimer.Stop();
  654. }
  655. }
  656. if (!_isJumpStep)
  657. {
  658. var wafers = WaferManager.Instance.GetWafers(ModuleHelper.Converter(Module));
  659. for (int i = 0; i < wafers.Length; i++)
  660. {
  661. if (WaferManager.Instance.CheckNoWafer(ModuleHelper.Converter(Module), i))
  662. continue;
  663. var useCount = wafers[i].UseCount;
  664. var useTime = wafers[i].UseTime + (float)stepTime;
  665. var useThick = wafers[i].UseThick + thickness;
  666. WaferManager.Instance.UpdateWaferStatistics(ModuleHelper.Converter(Module), i, useCount, (float)Math.Round(useTime, 1), useThick);
  667. }
  668. PMModule.UpdateRecipeThickness(PMModule.RecipeRunningInfo.RecipeName, thickness);
  669. PMModule.UpdateRecipeStepFre(stepName);
  670. PMModule.UpdateRecipeStepRunTime(stepName, Math.Round(stepTime, 1));
  671. PMModule.UpdateRecipeStepGroupThickness(stepName, thickness);
  672. PMModule.UpdateBoatTotalThickness(thickness);
  673. }
  674. }
  675. _isJumpStep = false;
  676. if (PMModule.IsPaused)
  677. {
  678. _state = RecipeRunningState.Paused;
  679. var step = IsSubReciep ? _currentSubRecipeStepNumber + 1 : _currentStepNumber;
  680. break;
  681. }
  682. break;
  683. case RecipeRunningState.RecipeCompleted:
  684. {
  685. var wafers = WaferManager.Instance.GetWafers(ModuleHelper.Converter(Module));
  686. for (int i = 0; i < wafers.Length; i++)
  687. {
  688. if (WaferManager.Instance.CheckNoWafer(ModuleHelper.Converter(Module), i))
  689. continue;
  690. var useCount = wafers[i].UseCount + 1;
  691. var useTime = wafers[i].UseTime;
  692. var useThick = wafers[i].UseThick;
  693. WaferManager.Instance.UpdateWaferStatistics(ModuleHelper.Converter(Module), i, useCount, (float)Math.Round(useTime, 1), useThick);
  694. }
  695. PMModule.UpdateSEDWafer(WaferManager.Instance.GetAllWafers());
  696. if (PMModule.IsHeaterProfile && !PMModule.IsHeaterProfileSuccess)
  697. EV.PostWarningLog(PMModule.Module, "Auto profile failed");
  698. PMModule.UpdateRecipeFre(PMModule.RecipeRunningInfo.RecipeName);
  699. CheckScheduleMaintenanceModule(PMModule.RecipeRunningInfo.RecipeName);
  700. PMModule.ResetFDCRecipeStepName();
  701. Notify("End");
  702. return Result.DONE;
  703. }
  704. case RecipeRunningState.Error:
  705. {
  706. return Result.DONE;
  707. }
  708. default:
  709. break;
  710. }
  711. }
  712. catch (Exception ex)
  713. {
  714. LOG.Write(ex);
  715. return Result.FAIL;
  716. }
  717. }
  718. MonitorRecipeRunInfo();
  719. return Result.RUN;
  720. }
  721. public void CheckScheduleMaintenanceModule(string processName)
  722. {
  723. #region MyRegion
  724. var isScheduleMaintenance = SC.ContainsItem("System.EnableScheduleMaintenance") && SC.GetValue<bool>("System.EnableScheduleMaintenance");
  725. if (isScheduleMaintenance)
  726. {
  727. var pm = (Singleton<EquipmentManager>.Instance.Modules[ModuleName.PM1] as PMModule);
  728. pm.GetAllDBRecord();
  729. pm.CheckBoatRecipeThicknessMoreThan(out var boatRecipeThicknessIsPause, out var boatRecipeThicknessIsPauseJobName);
  730. if (boatRecipeThicknessIsPause)
  731. LOG.Info($"boatRecipeThicknessIsPause trigger JobAutoStart,JobName:{boatRecipeThicknessIsPauseJobName}");
  732. pm.CheckRecipeThicknessMoreThan(processName, out var recipeThicknessMoreThanisPause, out var recipeThicknessMoreThanJobName);
  733. if (recipeThicknessMoreThanisPause)
  734. LOG.Info($"CheckRecipeThicknessMoreThan trigger JobAutoStart,JobName:{recipeThicknessMoreThanJobName}");
  735. pm.CheckRecipeExecuteFreqMoreThan(processName, out var recipeExecuteFreqMoreThanIsPause, out var recipeExecuteFreqMoreThanJobName);
  736. if (recipeExecuteFreqMoreThanIsPause)
  737. LOG.Info($"CheckRecipeExecuteFreqMoreThan trigger JobAutoStart,JobName:{recipeExecuteFreqMoreThanJobName}");
  738. if (RecipeParser.Parse(processName, Module, out var recipeHead, out var recipeSteps, out var reason, "Process"))
  739. {
  740. foreach (var item in recipeSteps)
  741. {
  742. pm.CheckRecipeStepFreqMoreThan(item.StepName, out var recipeStepFreqMoreThanIsPause, out var recipeStepFreqMoreThanJobName);
  743. if (recipeStepFreqMoreThanIsPause)
  744. LOG.Info($"CheckRecipeStepFreqMoreThan trigger JobAutoStart,JobName:{recipeStepFreqMoreThanJobName}");
  745. pm.CheckRecipeStepTimeMoreThan(item.StepName, out var recipeStepTimeMoreThanIsPause, out var recipeStepTimeMoreThanJobName);
  746. if (recipeStepTimeMoreThanIsPause)
  747. LOG.Info($"CheckRecipeStepTimeMoreThan trigger JobAutoStart,JobName:{recipeStepTimeMoreThanJobName}");
  748. pm.CheckRecipeStepGroupThicknessMoreThan(item.StepName, out var recipeStepGroupThicknessMoreThanIsPause, out var recipeStepGroupThicknessMoreThanJobName);
  749. if (recipeStepGroupThicknessMoreThanIsPause)
  750. LOG.Info($"CheckRecipeStepGroupThicknessMoreThan trigger JobAutoStart,JobName:{recipeStepGroupThicknessMoreThanJobName}");
  751. }
  752. }
  753. }
  754. #endregion
  755. }
  756. private void MonitorRecipeRunInfo()
  757. {
  758. PMModule.IsHolded = _state == RecipeRunningState.Paused;
  759. double elapseTime;
  760. double totalElapseTime;
  761. double holdTotalElapseTime;
  762. var step = 0;
  763. if (IsSubReciep)
  764. {
  765. if (PMModule.RecipeRunningInfo.RecipeStepList[_currentStepNumber].SubRecipeSteps != null)
  766. {
  767. if (_stepTimer.IsIdle())
  768. {
  769. elapseTime = (_curStepElpasedTimeBeforePaused / 1000) < 1 ? 0 : _curStepElpasedTimeBeforePaused / 1000;
  770. }
  771. else
  772. {
  773. elapseTime = ((_curStepElpasedTimeBeforePaused + _stepTimer.GetElapseTime()) / 1000) < 1 ? 0 : (_curStepElpasedTimeBeforePaused + _stepTimer.GetElapseTime()) / 1000;
  774. }
  775. if (elapseTime > PMModule.RecipeRunningInfo.RecipeStepList[_currentStepNumber].SubRecipeSteps[_currentSubRecipeStepNumber].StepTime)
  776. elapseTime = PMModule.RecipeRunningInfo.RecipeStepList[_currentStepNumber].SubRecipeSteps[_currentSubRecipeStepNumber].StepTime;
  777. totalElapseTime = _totalElpasedTime + elapseTime > PMModule.RecipeRunningInfo.TotalTime ? PMModule.RecipeRunningInfo.TotalTime : _totalElpasedTime + elapseTime;
  778. if (_holdTimer.IsIdle())
  779. {
  780. holdTotalElapseTime = _holdTimeElpasedTime / 1000;
  781. }
  782. else
  783. {
  784. holdTotalElapseTime = (_holdTimeElpasedTime + _holdTimer.GetElapseTime()) / 1000;
  785. }
  786. PMModule.RecipeRunningInfo.StepElapseTime = elapseTime;
  787. PMModule.RecipeRunningInfo.TotalElapseTime = totalElapseTime;
  788. PMModule.RecipeRunningInfo.HoldTime = holdTotalElapseTime;
  789. PMModule.RecipeRunningInfo.StepTime = PMModule.RecipeRunningInfo.RecipeStepList[_currentStepNumber].SubRecipeSteps[_currentSubRecipeStepNumber].StepTime;
  790. PMModule.RecipeRunningInfo.RecipeName = $"Sub/{PMModule.RecipeRunningInfo.Head.SubRecipe}-{PMModule.RecipeRunningInfo.RecipeStepList[_currentStepNumber].SubRecipeTableInfo}-{PMModule.RecipeRunningInfo.RecipeStepList[_currentStepNumber].SubRecipeSteps[_currentSubRecipeStepNumber].StepName}";
  791. PMModule.RecipeRunningInfo.ExecRecipeType = PMModule.RecipeRunningInfo.RecipeStepList[_currentStepNumber].SubRecipeSteps[_currentSubRecipeStepNumber].RecipeType;
  792. PMModule.RecipeRunningInfo.SubRecipeCurrentLoopCount = PMModule.RecipeRunningInfo.SubRecipeLoopCount - PMModule.RecipeRunningInfo.RecipeStepList[_currentStepNumber].SubRecipeLoopCount + 1;
  793. PMModule.RecipeRunningInfo.SubRecipeName = PMModule.RecipeRunningInfo.Head.SubRecipe;
  794. PMModule.RecipeRunningInfo.SubRecipeTable = PMModule.RecipeRunningInfo.RecipeStepList[_currentStepNumber].SubRecipeTableInfo;
  795. step = _currentSubRecipeStepNumber;
  796. if (_state == RecipeRunningState.Paused)
  797. {
  798. //pause之后,当前step执行完,显示的step要保持hold住的这一步的
  799. step--;
  800. if (step < 0)
  801. step = 0;
  802. }
  803. PMModule.RecipeRunningInfo.StepNumber = step + 1; //CurStepNum start from 0
  804. PMModule.RecipeRunningInfo.StepName = PMModule.RecipeRunningInfo.RecipeStepList[_currentStepNumber].SubRecipeSteps[step].StepName;
  805. if (PMModule.RecipeRunningInfo.RecipeStepList[_currentStepNumber].SubRecipeSteps[step].IsLoopEndStep)
  806. PMModule.RecipeRunningInfo.NextStepName = PMModule.RecipeRunningInfo.RecipeStepList[_currentStepNumber].SubRecipeSteps.Count > PMModule.RecipeRunningInfo.RecipeStepList[_currentStepNumber].SubRecipeSteps[_currentSubRecipeStepNumber].LoopStartStep ?
  807. PMModule.RecipeRunningInfo.RecipeStepList[_currentStepNumber].SubRecipeSteps[PMModule.RecipeRunningInfo.RecipeStepList[_currentStepNumber].SubRecipeSteps[step].LoopStartStep].StepName : "";
  808. else
  809. {
  810. if (PMModule.RecipeRunningInfo.RecipeStepList[_currentStepNumber].SubRecipeSteps.Count > step + 1)
  811. {
  812. PMModule.RecipeRunningInfo.NextStepName = PMModule.RecipeRunningInfo.RecipeStepList[_currentStepNumber].SubRecipeSteps[step + 1].StepName;
  813. }
  814. else
  815. {
  816. if (PMModule.RecipeRunningInfo.SubRecipeCurrentLoopCount < PMModule.RecipeRunningInfo.SubRecipeLoopCount)
  817. {
  818. //sub 下一个循环
  819. PMModule.RecipeRunningInfo.NextStepName = PMModule.RecipeRunningInfo.RecipeStepList[_currentStepNumber].SubRecipeSteps[0].StepName;
  820. }
  821. else
  822. {
  823. //sub执行结束
  824. if (PMModule.RecipeRunningInfo.RecipeStepList.Count > _currentStepNumber)
  825. {
  826. PMModule.RecipeRunningInfo.NextStepName = PMModule.RecipeRunningInfo.RecipeStepList[_currentStepNumber].StepName;
  827. }
  828. }
  829. }
  830. }
  831. if (PMModule.RecipeRunningInfo.RecipeStepList[_currentStepNumber].SubRecipeSteps[_currentSubRecipeStepNumber].StepName.ToLower() == "standby")
  832. {
  833. PMModule.StringProcessFlowState = PMModule.ProcessFlowState.Standby.ToString();
  834. }
  835. else
  836. {
  837. PMModule.StringProcessFlowState = PMModule.ProcessFlowState.Run.ToString();
  838. }
  839. }
  840. return;
  841. }
  842. if (_stepTimer.IsIdle())
  843. {
  844. elapseTime = (_curStepElpasedTimeBeforePaused / 1000) < 1 ? 0 : _curStepElpasedTimeBeforePaused / 1000;
  845. }
  846. else
  847. {
  848. elapseTime = ((_curStepElpasedTimeBeforePaused + _stepTimer.GetElapseTime()) / 1000) < 1 ? 0 : (_curStepElpasedTimeBeforePaused + _stepTimer.GetElapseTime()) / 1000;
  849. }
  850. if (elapseTime > PMModule.RecipeRunningInfo.RecipeStepList[_currentStepNumber].StepTime)
  851. elapseTime = PMModule.RecipeRunningInfo.RecipeStepList[_currentStepNumber].StepTime;
  852. totalElapseTime = _totalElpasedTime + elapseTime > PMModule.RecipeRunningInfo.TotalTime ? PMModule.RecipeRunningInfo.TotalTime : _totalElpasedTime + elapseTime;
  853. if (_holdTimer.IsIdle())
  854. {
  855. holdTotalElapseTime = _holdTimeElpasedTime / 1000;
  856. }
  857. else
  858. {
  859. holdTotalElapseTime = (_holdTimeElpasedTime + _holdTimer.GetElapseTime()) / 1000;
  860. }
  861. PMModule.RecipeRunningInfo.StepElapseTime = elapseTime;
  862. PMModule.RecipeRunningInfo.TotalElapseTime = totalElapseTime;
  863. PMModule.RecipeRunningInfo.HoldTime = holdTotalElapseTime;
  864. PMModule.RecipeRunningInfo.StepTime = PMModule.RecipeRunningInfo.RecipeStepList[_currentStepNumber].StepTime;
  865. PMModule.RecipeRunningInfo.RecipeName = PMModule.RecipeRunningInfo.MainRecipeName;
  866. PMModule.RecipeRunningInfo.ExecRecipeType = PMModule.RecipeRunningInfo.RecipeStepList[_currentStepNumber].RecipeType;
  867. if (_state == RecipeRunningState.RecipeCompleted)
  868. {
  869. PMModule.RecipeRunningInfo.HoldTime = 0;
  870. }
  871. step = _currentStepNumber;
  872. if (_state == RecipeRunningState.Paused)
  873. {
  874. //pause之后,当前step执行完,显示的step要保持hold住的这一步的
  875. step--;
  876. if (step < 0)
  877. step = 0;
  878. }
  879. if (PMModule.RecipeRunningInfo.RecipeStepList[0].StepName.ToLower() == "standby")
  880. {
  881. PMModule.RecipeRunningInfo.StepNumber = step; //CurStepNum start from 0
  882. }
  883. else
  884. {
  885. PMModule.RecipeRunningInfo.StepNumber = step + 1; //CurStepNum start from 0
  886. }
  887. PMModule.RecipeRunningInfo.StepName = PMModule.RecipeRunningInfo.RecipeStepList[_showStepNo].StepName;
  888. if (PMModule.RecipeRunningInfo.RecipeStepList[step].IsLoopEndStep)
  889. PMModule.RecipeRunningInfo.NextStepName = PMModule.RecipeRunningInfo.RecipeStepList.Count > PMModule.RecipeRunningInfo.RecipeStepList[step].LoopStartStep ? PMModule.RecipeRunningInfo.RecipeStepList[PMModule.RecipeRunningInfo.RecipeStepList[_currentStepNumber].LoopStartStep].StepName : "";
  890. else
  891. PMModule.RecipeRunningInfo.NextStepName = PMModule.RecipeRunningInfo.RecipeStepList.Count > step + 1 ? PMModule.RecipeRunningInfo.RecipeStepList[step + 1].StepName : "";
  892. if (PMModule.RecipeRunningInfo.RecipeStepList[_currentStepNumber].StepName.ToLower() == "standby")
  893. {
  894. PMModule.StringProcessFlowState = PMModule.ProcessFlowState.Standby.ToString();
  895. }
  896. else if (PMModule.RecipeRunningInfo.RecipeStepList.Count - 1 == _currentStepNumber)
  897. {
  898. PMModule.StringProcessFlowState = PMModule.ProcessFlowState.End.ToString();
  899. }
  900. else
  901. {
  902. PMModule.StringProcessFlowState = PMModule.ProcessFlowState.Run.ToString();
  903. }
  904. }
  905. private void MonitorRecipeAlaramAction()
  906. {
  907. if (_state != RecipeRunningState.TimeWait && _state != RecipeRunningState.ConditionWait)
  908. return;
  909. if (_alarmNames.Count == 0)
  910. return;
  911. int group = -1, temp = 0;
  912. string iAlarmConditionTable = "1:";
  913. if (IsSubReciep)
  914. {
  915. for (int i = 0; i < _alarmNames.Count; i++)
  916. {
  917. iAlarmConditionTable = PMModule.RecipeRunningInfo.RecipeStepList[_currentStepNumber].SubRecipeSteps[_currentSubRecipeStepNumber].AlarmConditionTable;
  918. temp = (int)Singleton<EventManager>.Instance.AlarmDic[iAlarmConditionTable.ToString()][_alarmNames[i]].Group;
  919. if (!PMModule.RecipeRunningInfo.RecipeStepList[_currentStepNumber].SubRecipeSteps[_currentSubRecipeStepNumber].AlarmActionSets.ContainsKey(temp))
  920. continue;
  921. var type = PMModule.RecipeRunningInfo.RecipeStepList[_currentStepNumber].SubRecipeSteps[_currentSubRecipeStepNumber].AlarmActionSets[temp].ProcessingType;
  922. if (temp >= group && (group == -1 || type != "Ignore Alarm"))
  923. group = temp;
  924. }
  925. }
  926. else
  927. {
  928. for (int i = 0; i < _alarmNames.Count; i++)
  929. {
  930. iAlarmConditionTable = PMModule.RecipeRunningInfo.RecipeStepList[_currentStepNumber].AlarmConditionTable;
  931. temp = (int)Singleton<EventManager>.Instance.AlarmDic[iAlarmConditionTable.ToString()][_alarmNames[i]].Group;
  932. if (!PMModule.RecipeRunningInfo.RecipeStepList[_currentStepNumber].AlarmActionSets.ContainsKey(temp))
  933. continue;
  934. var type = PMModule.RecipeRunningInfo.RecipeStepList[_currentStepNumber].AlarmActionSets[temp].ProcessingType;
  935. if (temp >= group && (group == -1 || type != "Ignore Alarm"))
  936. group = temp;
  937. }
  938. }
  939. _alarmNames.Clear();
  940. if (group == -1)
  941. return;
  942. string alarmAction = "", alarmDetails = "";
  943. List<RecipeStep> abortRecipes = new List<RecipeStep>();
  944. if (IsSubReciep)
  945. {
  946. alarmAction = PMModule.RecipeRunningInfo.RecipeStepList[_currentStepNumber].SubRecipeSteps[_currentSubRecipeStepNumber].AlarmActionSets[group].ProcessingType;
  947. alarmDetails = PMModule.RecipeRunningInfo.RecipeStepList[_currentStepNumber].SubRecipeSteps[_currentSubRecipeStepNumber].AlarmActionSets[group].ProcessingDetails;
  948. abortRecipes = PMModule.RecipeRunningInfo.RecipeStepList[_currentStepNumber].SubRecipeSteps[_currentSubRecipeStepNumber].AlarmActionSets[group].AbortRecipeStepList;
  949. }
  950. else
  951. {
  952. alarmAction = PMModule.RecipeRunningInfo.RecipeStepList[_currentStepNumber].AlarmActionSets[group].ProcessingType;
  953. alarmDetails = PMModule.RecipeRunningInfo.RecipeStepList[_currentStepNumber].AlarmActionSets[group].ProcessingDetails;
  954. abortRecipes = PMModule.RecipeRunningInfo.RecipeStepList[_currentStepNumber].AlarmActionSets[group].AbortRecipeStepList;
  955. }
  956. switch (alarmAction)
  957. {
  958. case "Jump Abort Recipe":
  959. alarmDetails = alarmDetails.Replace("Abort Recipe/", string.Empty);
  960. Abort();
  961. _alarmAction = RecipeAlaramAction.JumpAbortRecipe;
  962. break;
  963. case "Jump Step":
  964. alarmDetails = alarmDetails.Replace("Jump Step/", string.Empty);
  965. _jumpStepNumber = PMModule.RecipeRunningInfo.RecipeStepList.FindIndex(x => x.StepName == alarmDetails);
  966. _alarmAction = RecipeAlaramAction.JumpStep;
  967. _state = RecipeRunningState.StepCompleted;
  968. break;
  969. case "Jump Step(Cancel Call Loop)":
  970. alarmDetails = alarmDetails.Replace("Jump Step(Cancel Call Loop)/", string.Empty);
  971. _jumpStepNumber = PMModule.RecipeRunningInfo.RecipeStepList.FindIndex(x => x.StepName == alarmDetails);
  972. _alarmAction = RecipeAlaramAction.JumpStepCancelCallLoop;
  973. IsJumpStepCancelCallLoop = true;
  974. _state = RecipeRunningState.StepCompleted;
  975. break;
  976. case "Abort":
  977. IsExecuteAbort = true;
  978. break;
  979. case "Hold":
  980. PMModule.IsPaused = true;
  981. ContinueAction = RecipeContinueMode.None;
  982. _alarmAction = RecipeAlaramAction.Hold;
  983. break;
  984. case "Ignore Alarm":
  985. _alarmAction = RecipeAlaramAction.IgnoreAlaram;
  986. break;
  987. default:
  988. _alarmAction = RecipeAlaramAction.IgnoreAlaram;
  989. break;
  990. }
  991. }
  992. private void MonitorRecipePause()
  993. {
  994. if (_state != RecipeRunningState.TimeWait && _state != RecipeRunningState.ConditionWait)
  995. return;
  996. //if (PMModule.IsPaused)
  997. //{
  998. // _state = RecipeRunningState.Paused;
  999. //}
  1000. }
  1001. public override void Abort()
  1002. {
  1003. //PMModule.AbortRecipe();//暂时这么做
  1004. PMModule.RecipeRunningInfo.IsLooping = false;
  1005. PMModule.RecipeRunningInfo.LoopCountCurrent = 0;
  1006. PMModule.RecipeRunningInfo.LoopCountSet = 0;
  1007. IsExecuteAbort = true;
  1008. IsSubReciep = false;
  1009. PMModule.IsPaused = false;
  1010. PMModule.IsHeaterProfile = false;
  1011. PMModule.IsHeaterProfileSuccess = false;
  1012. if (!_holdTimer.IsIdle())
  1013. {
  1014. _holdTimeElpasedTime += _holdTimer.GetElapseTime();
  1015. _holdTimer.Stop();
  1016. }
  1017. CurrentLoopCount = 0;
  1018. CurrentAbortRecipeLoopCount = 0;
  1019. CurrentSubRecipeLoopCount = 0;
  1020. _state = RecipeRunningState.RecipeCompleted;//暂时这么做
  1021. //更新步次结束时间
  1022. var step = IsSubReciep ? _currentSubRecipeStepNumber + 1 : _currentStepNumber;
  1023. _dbCallback.RecipeStepEnd(PMModule.RecipeRunningInfo.InnerId.ToString(), step, _fdc.DataList, SC.GetStringValue("PM1.TempCorrection"), SC.GetStringValue("PM1.Heater.PID"));
  1024. return;//暂时这么做
  1025. //_totalElpasedTime = 0;
  1026. PMModule.RecipeRunningInfo.BeginTime = DateTime.Now;
  1027. double total = 0;
  1028. for (int i = 0; i < PMModule.RecipeRunningInfo.RecipeStepList[_currentStepNumber].AbortRecipeSteps.Count; i++)
  1029. {
  1030. total += PMModule.RecipeRunningInfo.RecipeStepList[_currentStepNumber].AbortRecipeSteps[i].StepTime;
  1031. }
  1032. PMModule.RecipeRunningInfo.TotalTime = _totalElpasedTime + total;
  1033. ResetTrig();
  1034. //PMModule.ResetToleranceAlarm();
  1035. //PMModule.ResetToleranceAlarmChecker();
  1036. PMModule.ExecuteAbortRecipeWarning.Set($"from recipe name:{PMModule.RecipeRunningInfo.RecipeName} step:{_currentStepNumber} start execute abort recipe.");
  1037. _state = RecipeRunningState.ExecStep;
  1038. }
  1039. public void UpdateProcessDataPJid(string pjId)
  1040. {
  1041. _dbCallback.RecipeUpdatePjId(PMModule.RecipeRunningInfo.InnerId.ToString(), pjId);
  1042. }
  1043. public void ExitProcess()
  1044. {
  1045. if (_state == RecipeRunningState.RecipeCompleted)
  1046. {
  1047. if (!_hasItBeenTriggeredRecipeComplete)
  1048. _faCallback.RecipeComplete(PMModule.Module, PMModule.RecipeRunningInfo.RecipeName);
  1049. PMModule.StringProcessFlowState = PMModule.ProcessFlowState.Standby.ToString();
  1050. _dbCallback.RecipeComplete(PMModule.RecipeRunningInfo.InnerId.ToString());
  1051. _fdc.Stop();
  1052. }
  1053. else
  1054. {
  1055. if (PMModule.IsExcuteIdleRecipe)
  1056. {
  1057. if (!_hasItBeenTriggeredRecipeComplete)
  1058. _faCallback.RecipeComplete(PMModule.Module, PMModule.RecipeRunningInfo.RecipeName);
  1059. _dbCallback.RecipeComplete(PMModule.RecipeRunningInfo.InnerId.ToString());
  1060. _fdc.Stop();
  1061. }
  1062. else
  1063. {
  1064. _faCallback.RecipeFailed(PMModule.Module, PMModule.RecipeRunningInfo.RecipeName);
  1065. _dbCallback.RecipeFailed(PMModule.RecipeRunningInfo.InnerId.ToString());
  1066. _fdc.Stop();
  1067. };
  1068. }
  1069. _hasItBeenTriggeredRecipeComplete = false;
  1070. }
  1071. public void PauseRecipe()
  1072. {
  1073. PMModule.IsPaused = true;
  1074. ContinueAction = RecipeContinueMode.None;
  1075. }
  1076. public void ContinueRecipe()
  1077. {
  1078. PMModule.IsPaused = false;
  1079. ContinueAction = RecipeContinueMode.StepContinue;
  1080. var step = IsSubReciep ? _currentSubRecipeStepNumber + 1 : _currentStepNumber;
  1081. }
  1082. public void SkipCurrentRecipeStep()
  1083. {
  1084. if (_state == RecipeRunningState.ConditionWait || _state == RecipeRunningState.TimeWait || _state == RecipeRunningState.Paused)
  1085. {
  1086. _state = RecipeRunningState.StepCompleted;
  1087. _loopEnd = true;
  1088. PMModule.RecipeRunningInfo.IsLooping = false;
  1089. PMModule.RecipeRunningInfo.LoopCountCurrent = 0;
  1090. PMModule.RecipeRunningInfo.LoopCountSet = 0;
  1091. PMModule.IsPaused = false;
  1092. if (!_holdTimer.IsIdle())
  1093. {
  1094. _holdTimeElpasedTime += _holdTimer.GetElapseTime();
  1095. _holdTimer.Stop();
  1096. }
  1097. }
  1098. if (IsSubReciep)
  1099. {
  1100. ResetLoop(PMModule.RecipeRunningInfo.RecipeStepList[_currentStepNumber].SubRecipeSteps, _currentSubRecipeStepNumber);
  1101. }
  1102. else
  1103. {
  1104. ResetLoop(PMModule.RecipeRunningInfo.RecipeStepList, _currentStepNumber);
  1105. }
  1106. }
  1107. private void ResetLoop(List<RecipeStep> checkRecipeSeps, int currentStepNumber)
  1108. {
  1109. if (checkRecipeSeps == null)
  1110. return;
  1111. var hasLoopStart = false;
  1112. for (int i = currentStepNumber; i >= 0; i--)
  1113. {
  1114. if (checkRecipeSeps[i].IsLoopStartStep)
  1115. {
  1116. hasLoopStart = true;
  1117. break;
  1118. }
  1119. if (checkRecipeSeps[i].IsLoopEndStep)
  1120. {
  1121. hasLoopStart = false;//前面有end,说明没有循环
  1122. break;
  1123. }
  1124. }
  1125. if (hasLoopStart)
  1126. {
  1127. for (int i = currentStepNumber; i < checkRecipeSeps.Count; i++)
  1128. {
  1129. if (checkRecipeSeps[i].IsLoopStartStep)
  1130. {
  1131. break;//没有循环
  1132. }
  1133. if (checkRecipeSeps[i].IsLoopEndStep)
  1134. {
  1135. checkRecipeSeps[i].IsLoopEndStep = false;//跳出skip step之间的循环
  1136. break;
  1137. }
  1138. }
  1139. }
  1140. }
  1141. public void LeakCheckRetry()
  1142. {
  1143. JumpCurrentRecipeStep(_currentStepNumber - 1, PMModule.RecipeRunningInfo.RecipeStepList[_currentStepNumber - 1].StepName);
  1144. }
  1145. public void JumpCurrentRecipeStep(int stepNumber, string stepName, bool isAlarmConditionCall = false)
  1146. {
  1147. PMModule.StopLeakCheckTimer();
  1148. LOG.Write($"Jump to step stepNumber={stepNumber} stepName={stepName}, currentStepNumber={_currentStepNumber}");
  1149. if (_state == RecipeRunningState.ConditionWait || _state == RecipeRunningState.TimeWait ||
  1150. _state == RecipeRunningState.Paused || _state == RecipeRunningState.ExecStep)
  1151. {
  1152. _loopEnd = true;
  1153. PMModule.RecipeRunningInfo.IsLooping = false;
  1154. PMModule.RecipeRunningInfo.LoopCountCurrent = 0;
  1155. PMModule.RecipeRunningInfo.LoopCountSet = 0;
  1156. CurrentLoopCount = 0;
  1157. CurrentAbortRecipeLoopCount = 0;
  1158. CurrentSubRecipeLoopCount = 0;
  1159. IsSubReciep = false;
  1160. if (IsSubReciep)
  1161. {
  1162. _faCallback.RecipeStepEnd(PMModule.Module, PMModule.RecipeRunningInfo.RecipeName, _currentSubRecipeStepNumber + 1);
  1163. _dbCallback.RecipeStepEnd(PMModule.RecipeRunningInfo.InnerId.ToString(), _currentSubRecipeStepNumber + 1, _fdc.DataList, SC.GetStringValue("PM1.TempCorrection"), SC.GetStringValue("PM1.Heater.PID"));
  1164. ResetLoop(PMModule.RecipeRunningInfo.RecipeStepList[_currentStepNumber].SubRecipeSteps, _currentSubRecipeStepNumber);
  1165. }
  1166. else
  1167. {
  1168. _faCallback.RecipeStepEnd(PMModule.Module, PMModule.RecipeRunningInfo.RecipeName, _currentStepNumber);
  1169. _dbCallback.RecipeStepEnd(PMModule.RecipeRunningInfo.InnerId.ToString(), _currentStepNumber, _fdc.DataList, SC.GetStringValue("PM1.TempCorrection"), SC.GetStringValue("PM1.Heater.PID"));
  1170. ResetLoop(PMModule.RecipeRunningInfo.RecipeStepList, _currentStepNumber);
  1171. }
  1172. if (_callSubSteps != null)
  1173. {
  1174. foreach (var key in _callSubSteps.Keys)
  1175. {
  1176. if (PMModule.RecipeRunningInfo.RecipeStepList.Count > key)
  1177. {
  1178. PMModule.RecipeRunningInfo.RecipeStepList[key].IsCallSubStep = _callSubSteps[key].Item1;
  1179. PMModule.RecipeRunningInfo.RecipeStepList[key].SubRecipeLoopCount = _callSubSteps[key].Item2;
  1180. }
  1181. }
  1182. _currentSubRecipeStepNumber = CurSubRecipeStepTotalLoopCount = 0;
  1183. }
  1184. _isJumpStep = true;
  1185. _currentStepNumber = stepNumber - 1;
  1186. if (_currentStepNumber < 0)
  1187. _currentStepNumber = 0;
  1188. _totalElpasedTime = RefreshElpasedTime();
  1189. _state = RecipeRunningState.StepCompleted;
  1190. PMModule.IsPaused = false;
  1191. if (!_holdTimer.IsIdle())
  1192. {
  1193. _holdTimeElpasedTime += _holdTimer.GetElapseTime();
  1194. _holdTimer.Stop();
  1195. }
  1196. }
  1197. }
  1198. private double RefreshElpasedTime()
  1199. {
  1200. double total = 0;
  1201. try
  1202. {
  1203. for (int i = 0; i < _currentStepNumber; i++)
  1204. {
  1205. if (!PMModule.RecipeRunningInfo.RecipeStepList[i].IsJumpStep)
  1206. {
  1207. if (PMModule.RecipeRunningInfo.RecipeStepList[i].IsLoopEndStep)
  1208. {
  1209. int iLoopStartStep = PMModule.RecipeRunningInfo.RecipeStepList[i].LoopStartStep;
  1210. for (int j = 0; j < PMModule.RecipeRunningInfo.RecipeStepList[i].LoopCount; j++)
  1211. {
  1212. for (int m = iLoopStartStep; m <= i; m++)
  1213. {
  1214. if (PMModule.RecipeRunningInfo.RecipeStepList[i].SubRecipeSteps != null && PMModule.RecipeRunningInfo.RecipeStepList[i].SubRecipeSteps.Count > _currentSubRecipeStepNumber)
  1215. {
  1216. total += SubRecipeCalTotalTime(i) * PMModule.RecipeRunningInfo.RecipeStepList[i].SubRecipeLoopCount;
  1217. }
  1218. total += PMModule.RecipeRunningInfo.RecipeStepList[m].StepTime;
  1219. }
  1220. }
  1221. }
  1222. else
  1223. {
  1224. if (PMModule.RecipeRunningInfo.RecipeStepList[i].SubRecipeSteps != null &&
  1225. PMModule.RecipeRunningInfo.RecipeStepList[i].SubRecipeSteps.Count > _currentSubRecipeStepNumber)
  1226. {
  1227. total += SubRecipeCalTotalTime(i) * PMModule.RecipeRunningInfo.RecipeStepList[i].SubRecipeLoopCount;
  1228. }
  1229. total += PMModule.RecipeRunningInfo.RecipeStepList[i].StepTime;
  1230. }
  1231. }
  1232. }
  1233. }
  1234. catch (Exception ex)
  1235. {
  1236. LOG.Write(ex);
  1237. return -1;
  1238. }
  1239. return (int)total;
  1240. }
  1241. public void RespondAlarm(string name)
  1242. {
  1243. if (!_alarmNames.Contains(name))
  1244. _alarmNames.Add(name);
  1245. }
  1246. protected int CalcRecipeTime()
  1247. {
  1248. double total = 0;
  1249. int iStart = PMModule.IsJobProcess ? 1 : 0;
  1250. try
  1251. {
  1252. for (int i = iStart; i < PMModule.RecipeRunningInfo.RecipeStepList.Count; i++)
  1253. //for (int i = PMModule.RecipeRunningInfo.RecipeStepList.Count - 1; i <= iStart; i--)
  1254. {
  1255. if (!PMModule.RecipeRunningInfo.RecipeStepList[i].IsJumpStep)
  1256. {
  1257. if (PMModule.RecipeRunningInfo.RecipeStepList[i].IsLoopEndStep)
  1258. {
  1259. int iLoopStartStep = PMModule.RecipeRunningInfo.RecipeStepList[i].LoopStartStep;
  1260. total += PMModule.RecipeRunningInfo.RecipeStepList[i].StepTime;
  1261. for (int j = 0; j < PMModule.RecipeRunningInfo.RecipeStepList[i].LoopCount - 1; j++)
  1262. {
  1263. for (int m = iLoopStartStep; m <= i; m++)
  1264. {
  1265. if (PMModule.RecipeRunningInfo.RecipeStepList[i].SubRecipeSteps != null && PMModule.RecipeRunningInfo.RecipeStepList[i].SubRecipeSteps.Count > _currentSubRecipeStepNumber)
  1266. {
  1267. total += SubRecipeCalTotalTime(i) * PMModule.RecipeRunningInfo.RecipeStepList[i].SubRecipeLoopCount;
  1268. }
  1269. total += PMModule.RecipeRunningInfo.RecipeStepList[m].StepTime;
  1270. }
  1271. }
  1272. }
  1273. else
  1274. {
  1275. if (PMModule.RecipeRunningInfo.RecipeStepList[i].SubRecipeSteps != null && PMModule.RecipeRunningInfo.RecipeStepList[i].SubRecipeSteps.Count > _currentSubRecipeStepNumber)
  1276. {
  1277. total += SubRecipeCalTotalTime(i) * PMModule.RecipeRunningInfo.RecipeStepList[i].SubRecipeLoopCount;
  1278. }
  1279. total += PMModule.RecipeRunningInfo.RecipeStepList[i].StepTime;
  1280. }
  1281. }
  1282. else
  1283. {
  1284. i = PMModule.RecipeRunningInfo.RecipeStepList[i].JumpStepNo - 1;// -1是因为i++
  1285. }
  1286. if (i < PMModule.RecipeRunningInfo.RecipeStepList.Count - 1)
  1287. {
  1288. _remainTimeExcludeEnd = total;//获取除最后一步外的process时间,End步会cooling
  1289. }
  1290. }
  1291. }
  1292. catch (Exception ex)
  1293. {
  1294. LOG.Write(ex);
  1295. return -1;
  1296. }
  1297. return (int)total;
  1298. }
  1299. private int AbortRecipeCalTotalTime()
  1300. {
  1301. double total = 0;
  1302. List<RecipeStep> abortRecipeSteps;
  1303. abortRecipeSteps = PMModule.RecipeRunningInfo.RecipeStepList[_currentStepNumber].AbortRecipeSteps;
  1304. try
  1305. {
  1306. for (int i = 0; i < abortRecipeSteps.Count; i++)
  1307. {
  1308. if (!abortRecipeSteps[i].IsJumpStep)
  1309. {
  1310. if (abortRecipeSteps[i].IsLoopStartStep)
  1311. {
  1312. int iLoopEndStep = 0;
  1313. for (int j = 0; j < abortRecipeSteps[i].LoopCount; j++)
  1314. {
  1315. for (int m = i; m < abortRecipeSteps.Count; m++)
  1316. {
  1317. total += abortRecipeSteps[m].StepTime;
  1318. if (abortRecipeSteps[m].IsLoopEndStep)
  1319. {
  1320. iLoopEndStep = m;
  1321. break;
  1322. }
  1323. }
  1324. }
  1325. i = iLoopEndStep;
  1326. }
  1327. else
  1328. {
  1329. total += abortRecipeSteps[i].StepTime;
  1330. }
  1331. }
  1332. else
  1333. {
  1334. i = abortRecipeSteps[i].JumpStepNo - 1;// -1是因为i++
  1335. }
  1336. }
  1337. }
  1338. catch (Exception ex)
  1339. {
  1340. LOG.Write(ex);
  1341. return -1;
  1342. }
  1343. return (int)total;
  1344. }
  1345. public void SetContinue(string continueMode)
  1346. {
  1347. switch (continueMode)
  1348. {
  1349. case "Step continue":
  1350. ContinueAction = RecipeContinueMode.StepContinue;
  1351. break;
  1352. case "Step restart":
  1353. ContinueAction = RecipeContinueMode.StepRestart;
  1354. break;
  1355. case "Next step":
  1356. ContinueAction = RecipeContinueMode.NextStep;
  1357. break;
  1358. case "Recipe restart":
  1359. ContinueAction = RecipeContinueMode.RecipeRestart;
  1360. break;
  1361. case "Recipe complete":
  1362. ContinueAction = RecipeContinueMode.RecipeCompleted;
  1363. break;
  1364. case "Wafer return and job stop":
  1365. ContinueAction = RecipeContinueMode.WaferReturnAndJobStop;
  1366. break;
  1367. }
  1368. PMModule.ResetToleranceChecker();
  1369. }
  1370. private double SubRecipeCalTotalTime(int currentStepNumber)
  1371. {
  1372. double total = 0;
  1373. for (int k = _currentSubRecipeStepNumber; k < PMModule.RecipeRunningInfo.RecipeStepList[currentStepNumber].SubRecipeSteps.Count; k++)
  1374. {
  1375. if (!PMModule.RecipeRunningInfo.RecipeStepList[currentStepNumber].SubRecipeSteps[k].IsJumpStep)
  1376. {
  1377. if (PMModule.RecipeRunningInfo.RecipeStepList[currentStepNumber].SubRecipeSteps[k].IsLoopEndStep)
  1378. {
  1379. int iSystemLoopStartStep = PMModule.RecipeRunningInfo.RecipeStepList[currentStepNumber].SubRecipeSteps[k].LoopStartStep;
  1380. total += PMModule.RecipeRunningInfo.RecipeStepList[currentStepNumber].SubRecipeSteps[k].StepTime;
  1381. for (int n = 0; n < PMModule.RecipeRunningInfo.RecipeStepList[currentStepNumber].SubRecipeSteps[k].LoopCount - 1; n++)
  1382. {
  1383. for (int l = iSystemLoopStartStep; l <= k; l++)
  1384. {
  1385. total += PMModule.RecipeRunningInfo.RecipeStepList[currentStepNumber].SubRecipeSteps[l].StepTime;
  1386. }
  1387. }
  1388. }
  1389. else
  1390. {
  1391. total += PMModule.RecipeRunningInfo.RecipeStepList[currentStepNumber].SubRecipeSteps[k].StepTime;
  1392. }
  1393. }
  1394. else
  1395. {
  1396. k = PMModule.RecipeRunningInfo.RecipeStepList[currentStepNumber].SubRecipeSteps[k].JumpStepNo - 1;// -1是因为k++
  1397. }
  1398. }
  1399. return total;
  1400. }
  1401. private void SubRecipeLoopEndCheck(List<RecipeStep> recipeSteps)
  1402. {
  1403. if (_alarmAction == RecipeAlaramAction.JumpStep || _alarmAction == RecipeAlaramAction.JumpStepCancelCallLoop)
  1404. {
  1405. _currentSubRecipeStepNumber = _jumpStepNumber;
  1406. _alarmAction = RecipeAlaramAction.None;
  1407. _alarmNames.Clear();
  1408. return;
  1409. }
  1410. if (recipeSteps[_currentSubRecipeStepNumber].IsLoopEndStep)
  1411. {
  1412. if (IsJumpStepCancelCallLoop)
  1413. {
  1414. _currentSubRecipeStepNumber++;
  1415. IsJumpStepCancelCallLoop = false;
  1416. return;
  1417. }
  1418. //重新读取循环的设定次数
  1419. CurSubRecipeStepTotalLoopCount = recipeSteps[_currentSubRecipeStepNumber].LoopCount;
  1420. if (CurrentSubRecipeLoopCount >= CurSubRecipeStepTotalLoopCount)
  1421. {
  1422. CurrentSubRecipeLoopCount = CurSubRecipeStepTotalLoopCount = 0;
  1423. _currentSubRecipeStepNumber++;
  1424. PMModule.RecipeRunningInfo.IsLooping = false;
  1425. PMModule.RecipeRunningInfo.LoopCountCurrent = 0;
  1426. PMModule.RecipeRunningInfo.LoopCountSet = 0;
  1427. }
  1428. else
  1429. {
  1430. _currentSubRecipeStepNumber = recipeSteps[_currentSubRecipeStepNumber].LoopStartStep;
  1431. }
  1432. }
  1433. else
  1434. {
  1435. _currentSubRecipeStepNumber++;
  1436. }
  1437. }
  1438. private void RecipeLoopEndCheck(List<RecipeStep> recipeSteps)
  1439. {
  1440. if (_alarmAction == RecipeAlaramAction.JumpStep || _alarmAction == RecipeAlaramAction.JumpStepCancelCallLoop)
  1441. {
  1442. _currentStepNumber = _jumpStepNumber;
  1443. _alarmAction = RecipeAlaramAction.None;
  1444. _alarmNames.Clear();
  1445. return;
  1446. }
  1447. if (recipeSteps[_currentStepNumber].IsLoopEndStep)
  1448. {
  1449. if (IsJumpStepCancelCallLoop)
  1450. {
  1451. _currentStepNumber++;
  1452. IsJumpStepCancelCallLoop = false;
  1453. return;
  1454. }
  1455. //重新读取循环的设定次数
  1456. CurStepTotalLoopCount = recipeSteps[_currentStepNumber].LoopCount;
  1457. if (CurrentLoopCount >= CurStepTotalLoopCount)
  1458. {
  1459. CurrentLoopCount = CurStepTotalLoopCount = 0;
  1460. _currentStepNumber++;
  1461. PMModule.RecipeRunningInfo.IsLooping = false;
  1462. PMModule.RecipeRunningInfo.LoopCountCurrent = 0;
  1463. PMModule.RecipeRunningInfo.LoopCountSet = 0;
  1464. }
  1465. else
  1466. {
  1467. _currentStepNumber = recipeSteps[_currentStepNumber].LoopStartStep;
  1468. }
  1469. }
  1470. else
  1471. {
  1472. _currentStepNumber++;
  1473. }
  1474. }
  1475. private void CheckTolerance()
  1476. {
  1477. //foreach (var key in _trigMfcToleranceAlarms.Keys)
  1478. //{
  1479. // if (PMModule.GasMFCs.ContainsKey(key) && _trigMfcToleranceWarnings.ContainsKey(key))
  1480. // {
  1481. // _trigMfcToleranceAlarms[key].CLK = PMModule.GasMFCs[key].CheckToleranceAlarm();
  1482. // if (_trigMfcToleranceAlarms[key].Q)
  1483. // PMModule.GasMFCs[key].SetToleranceAlarm();
  1484. // _trigMfcToleranceWarnings[key].CLK = PMModule.GasMFCs[key].CheckToleranceWarning();
  1485. // if (_trigMfcToleranceWarnings[key].Q && !_trigMfcToleranceAlarms[key].Q)
  1486. // PMModule.GasMFCs[key].SetToleranceWarning();
  1487. // }
  1488. //}
  1489. //_trigHeaterBottomToleranceAlarm.CLK = PMModule.CheckHeaterBottomToleranceAlaram();
  1490. //if (_trigHeaterBottomToleranceAlarm.Q)
  1491. // PMModule.SetHeaterBottomToleranceAlaram();
  1492. //_trigHeaterBottomToleranceWarning.CLK = PMModule.CheckHeaterBottomToleranceWarning();
  1493. //if (_trigHeaterBottomToleranceWarning.Q && !_trigHeaterBottomToleranceAlarm.Q)
  1494. // PMModule.SetHeaterBottomToleranceWarning();
  1495. //_trigHeaterCenterBottomToleranceAlarm.CLK = PMModule.CheckHeaterCenterBottomToleranceAlaram();
  1496. //if (_trigHeaterCenterBottomToleranceAlarm.Q)
  1497. // PMModule.SetHeaterCenterBottomToleranceAlaram();
  1498. //_trigHeaterCenterBottomToleranceWarning.CLK = PMModule.CheckHeaterCenterBottomToleranceWarning();
  1499. //if (_trigHeaterCenterBottomToleranceWarning.Q && !_trigHeaterCenterBottomToleranceAlarm.Q)
  1500. // PMModule.SetHeaterCenterBottomToleranceWarning();
  1501. //_trigHeaterCenterToleranceAlarm.CLK = PMModule.CheckHeaterCenterToleranceAlaram();
  1502. //if (_trigHeaterCenterToleranceAlarm.Q)
  1503. // PMModule.SetHeaterCenterToleranceAlaram();
  1504. //_trigHeaterCenterToleranceWarning.CLK = PMModule.CheckHeaterCenterToleranceWarning();
  1505. //if (_trigHeaterCenterToleranceWarning.Q && !_trigHeaterCenterToleranceAlarm.Q)
  1506. // PMModule.SetHeaterCenterToleranceWarning();
  1507. //_trigHeaterCenterTopToleranceAlarm.CLK = PMModule.CheckHeaterCenterTopToleranceAlaram();
  1508. //if (_trigHeaterCenterTopToleranceAlarm.Q)
  1509. // PMModule.SetHeaterCenterTopToleranceAlaram();
  1510. //_trigHeaterCenterTopToleranceWarning.CLK = PMModule.CheckHeaterCenterTopToleranceWarning();
  1511. //if (_trigHeaterCenterTopToleranceWarning.Q && !_trigHeaterCenterTopToleranceAlarm.Q)
  1512. // PMModule.SetHeaterCenterTopToleranceWarning();
  1513. //_trigHeaterTopToleranceAlarm.CLK = PMModule.CheckHeaterTopToleranceAlaram();
  1514. //if (_trigHeaterTopToleranceAlarm.Q)
  1515. // PMModule.SetHeaterTopToleranceAlaram();
  1516. //_trigHeaterTopToleranceWarning.CLK = PMModule.CheckHeaterTopToleranceWarning();
  1517. //if (_trigHeaterTopToleranceWarning.Q && !_trigHeaterTopToleranceAlarm.Q)
  1518. // PMModule.SetHeaterTopToleranceWarning();
  1519. //_trigPressureToleranceAlarm.CLK = PMModule.CheckPressureToleranceAlaram();
  1520. //if (_trigPressureToleranceAlarm.Q)
  1521. // PMModule.SetPressureToleranceAlaram();
  1522. //_trigPressureToleranceWarning.CLK = PMModule.CheckPressureToleranceWarning();
  1523. //if (_trigPressureToleranceWarning.Q && !_trigPressureToleranceAlarm.Q)
  1524. // PMModule.SetPressureToleranceWarning();
  1525. }
  1526. private void ResetTrig()
  1527. {
  1528. PMModule.ResetAlarmCondition();
  1529. foreach (var key in _trigMfcToleranceAlarms.Keys)
  1530. {
  1531. if (_trigMfcToleranceWarnings.ContainsKey(key))
  1532. {
  1533. _trigMfcToleranceAlarms[key].RST = true;
  1534. _trigMfcToleranceWarnings[key].RST = true;
  1535. }
  1536. }
  1537. _trigHeaterBottomToleranceAlarm.RST = true;
  1538. _trigHeaterBottomToleranceWarning.RST = true;
  1539. _trigHeaterCenterBottomToleranceAlarm.RST = true;
  1540. _trigHeaterCenterBottomToleranceWarning.RST = true;
  1541. _trigHeaterCenterToleranceAlarm.RST = true;
  1542. _trigHeaterCenterToleranceWarning.RST = true;
  1543. _trigHeaterCenterTopToleranceAlarm.RST = true;
  1544. _trigHeaterCenterTopToleranceWarning.RST = true;
  1545. _trigHeaterTopToleranceAlarm.RST = true;
  1546. _trigHeaterTopToleranceWarning.RST = true;
  1547. _trigPressureToleranceAlarm.RST = true;
  1548. _trigPressureToleranceWarning.RST = true;
  1549. _trigInputSignalTimeOutAlarm.RST = true;
  1550. _trigTemperatureConvergenceTimeOutAlarm.RST = true;
  1551. _trigReachTempTimeOutAlarm.RST = true;
  1552. _trigPressureConvergenceTimeOutAlarm.RST = true;
  1553. _trigReachPressureTimeOutAlarm.RST = true;
  1554. _trigAutoProfileTimeOutAlarm.RST = true;
  1555. _trigHeaterProfileFinish.RST = true;
  1556. _trigLeakCheckFinish.RST = true;
  1557. _trigBoatWaitCondition.RST = true;
  1558. _trigAPCWaitCondition.RST = true;
  1559. _trigAUXWaitCondition.RST = true;
  1560. _trigHeaterWaitCondition.RST = true;
  1561. _trigMFCWaitCondition.RST = true;
  1562. _infoHeaterProfileFinish = "";
  1563. _infoAUXWaitCondition = "";
  1564. _infoHeaterWaitCondition = "";
  1565. _infoMFCWaitCondition = "";
  1566. }
  1567. private int GetDBRecipeType(string recipeTypeName)
  1568. {
  1569. if (string.IsNullOrEmpty(recipeTypeName))
  1570. return (int)RecipeTypeEnum.none;
  1571. if (Enum.TryParse<RecipeTypeEnum>(recipeTypeName, true, out var result))
  1572. return (int)result;
  1573. return (int)RecipeTypeEnum.none;
  1574. }
  1575. private void RecipeExec(string type, List<RecipeStep> curSteps, int currentStepNumber, double curStepElpasedTimeBeforePaused, int otherRecipeStartStepNumber = 0)
  1576. {
  1577. var reason = "";
  1578. _stepTimer.Start(curSteps[currentStepNumber].StepTime * 1000 - curStepElpasedTimeBeforePaused);
  1579. _showStepNo = currentStepNumber;
  1580. Notify($"{type} running step {currentStepNumber + 1}:{curSteps[currentStepNumber].StepName}");
  1581. var stopwatch = new Stopwatch();
  1582. stopwatch.Start();
  1583. //执行工艺程序命令
  1584. foreach (var recipeCmd in curSteps[currentStepNumber].RecipeCommands.Keys)
  1585. {
  1586. if (!OP.CanDoOperation($"{_doModule}.{recipeCmd}", out reason, curSteps[currentStepNumber].RecipeCommands[recipeCmd]))
  1587. {
  1588. if (!OP.CanDoOperation($"{Module}.{recipeCmd}", out reason, curSteps[currentStepNumber].RecipeCommands[recipeCmd]))
  1589. {
  1590. if (!OP.CanDoOperation($"{ModuleName.System}.{recipeCmd}", out reason, curSteps[currentStepNumber].RecipeCommands[recipeCmd]))
  1591. {
  1592. PMModule.CheckCanDoOperationAlarm.Set($"Can not execute {recipeCmd}, {reason}");
  1593. return;
  1594. }
  1595. else
  1596. {
  1597. OP.DoOperation($"{ModuleName.System}.{recipeCmd}", out string reason1, 0, curSteps[currentStepNumber].RecipeCommands[recipeCmd]);
  1598. }
  1599. }
  1600. else
  1601. {
  1602. OP.DoOperation($"{Module}.{recipeCmd}", out string reason1, 0, curSteps[currentStepNumber].RecipeCommands[recipeCmd]);
  1603. }
  1604. }
  1605. else
  1606. {
  1607. OP.DoOperation($"{_doModule}.{recipeCmd}", out string reason1, 0, curSteps[currentStepNumber].RecipeCommands[recipeCmd]);
  1608. }
  1609. }
  1610. LOG.Write($"step exec time {stopwatch.ElapsedMilliseconds}");
  1611. if (curSteps[currentStepNumber].EndBy == EnumEndByCondition.ByTime && !PMModule.IsBoatMoveToLoadPosition)
  1612. _state = RecipeRunningState.TimeWait;
  1613. else
  1614. _state = RecipeRunningState.ConditionWait;
  1615. _faCallback.RecipeStepStart(PMModule.Module, PMModule.RecipeRunningInfo.RecipeName, otherRecipeStartStepNumber != 0 ? otherRecipeStartStepNumber : currentStepNumber);
  1616. if (type == "Sub recipe")
  1617. _dbCallback.RecipeStepStart(PMModule.RecipeRunningInfo.InnerId.ToString(), _currentStepNumber, PMModule.RecipeRunningInfo.RecipeStepList.Count > _currentStepNumber ? PMModule.RecipeRunningInfo.RecipeStepList[_currentStepNumber].StepName : "",
  1618. PMModule.RecipeRunningInfo.RecipeStepList.Count > _currentStepNumber ? (float)PMModule.RecipeRunningInfo.RecipeStepList[_currentStepNumber].StepTime : 0,
  1619. $"{(otherRecipeStartStepNumber != 0 ? otherRecipeStartStepNumber : currentStepNumber)}", curSteps[currentStepNumber].StepName, (float)curSteps[currentStepNumber].StepTime,
  1620. $"{PMModule.RecipeRunningInfo.SubRecipeCurrentLoopCount}/{PMModule.RecipeRunningInfo.SubRecipeLoopCount}");
  1621. else
  1622. _dbCallback.RecipeStepStart(PMModule.RecipeRunningInfo.InnerId.ToString(), otherRecipeStartStepNumber != 0 ? otherRecipeStartStepNumber : currentStepNumber,
  1623. curSteps[currentStepNumber].StepName, (float)curSteps[currentStepNumber].StepTime, "", "", 0, "");
  1624. _fdc.Start(curSteps[currentStepNumber].RecipeCommands);
  1625. }
  1626. public void FACallBack(string triggerModule, string recipeAction, string module, string recipeName, string recipeStep, string jumpStpeId = "", string otherRecipeName = "")
  1627. {
  1628. if (triggerModule == ConstantsCommon.AlarmConditionTrigger)
  1629. {
  1630. switch (recipeAction)
  1631. {
  1632. case UniversalEvents.AlarmConditionTriggerReset:
  1633. _faCallback.AlarmConditionTriggerReset(module, recipeName, recipeStep, otherRecipeName);
  1634. break;
  1635. case UniversalEvents.AlarmConditionTriggerEnd:
  1636. _faCallback.AlarmConditionTriggerEnd(module, recipeName, recipeStep);
  1637. break;
  1638. case UniversalEvents.AlarmConditionTriggerHold:
  1639. _faCallback.AlarmConditionTriggerHold(module, recipeName, recipeStep);
  1640. break;
  1641. case UniversalEvents.AlarmConditionTriggerJumpStep:
  1642. _faCallback.AlarmConditionTriggerJumpStep(module, recipeName, recipeStep, jumpStpeId);
  1643. break;
  1644. case UniversalEvents.AlarmConditionTriggerCallAlarmRecipe:
  1645. _faCallback.AlarmConditionTriggerCallAlarmRecipe(module, recipeName, recipeStep, otherRecipeName);
  1646. break;
  1647. case UniversalEvents.AlarmConditionTriggerCallAbortRecipe:
  1648. _faCallback.AlarmConditionTriggerCallAbortRecipe(module, recipeName, recipeStep, otherRecipeName);
  1649. break;
  1650. }
  1651. Task.Delay(1000).ContinueWith(x =>
  1652. {
  1653. PMModule.RecipeAbnormalEnd(module, recipeName, recipeStep, recipeAction);
  1654. });
  1655. }
  1656. else if (triggerModule == ConstantsCommon.LeakCheckTrigger)
  1657. {
  1658. switch (recipeAction)
  1659. {
  1660. case UniversalEvents.LeakCheckTriggerReset:
  1661. _faCallback.LeakCheckTriggerReset(module, recipeName, recipeStep, otherRecipeName);
  1662. break;
  1663. case UniversalEvents.LeakCheckTriggerEnd:
  1664. _faCallback.LeakCheckTriggerEnd(module, recipeName, recipeStep);
  1665. break;
  1666. case UniversalEvents.LeakCheckTriggerHold:
  1667. _faCallback.LeakCheckTriggerHold(module, recipeName, recipeStep);
  1668. break;
  1669. case UniversalEvents.LeakCheckTriggerJumpStep:
  1670. _faCallback.LeakCheckTriggerJumpStep(module, recipeName, recipeStep, jumpStpeId);
  1671. break;
  1672. case UniversalEvents.LeakCheckTriggerCallAlarmRecipe:
  1673. _faCallback.LeakCheckTriggerCallAlarmRecipe(module, recipeName, recipeStep, otherRecipeName);
  1674. break;
  1675. case UniversalEvents.LeakCheckTriggerCallAbortRecipe:
  1676. _faCallback.LeakCheckTriggerCallAbortRecipe(module, recipeName, recipeStep, otherRecipeName);
  1677. break;
  1678. }
  1679. Task.Delay(1000).ContinueWith(x =>
  1680. {
  1681. PMModule.RecipeAbnormalEnd(module, recipeName, recipeStep, recipeAction);
  1682. });
  1683. }
  1684. else if (triggerModule == ConstantsCommon.ManualTrigger)
  1685. {
  1686. switch (recipeAction)
  1687. {
  1688. case UniversalEvents.ManualTriggerRecipeHold:
  1689. _faCallback.ManualTriggerRecipeHold(module, recipeName, recipeStep);
  1690. break;
  1691. case UniversalEvents.ManualTriggerRecipeRelease:
  1692. _faCallback.ManualTriggerRecipeRelease(module, recipeName, recipeStep);
  1693. break;
  1694. case UniversalEvents.ManualTriggerRecipeSkip:
  1695. _faCallback.ManualTriggerRecipeSkip(module, recipeName, recipeStep);
  1696. break;
  1697. case UniversalEvents.ManualTriggerRecipeJump:
  1698. _faCallback.ManualTriggerRecipeJump(module, recipeName, recipeStep, jumpStpeId);
  1699. break;
  1700. case UniversalEvents.ManualTriggerRecipeAbort:
  1701. _faCallback.ManualTriggerRecipeAbort(module, recipeName, recipeStep, otherRecipeName);
  1702. break;
  1703. }
  1704. Task.Delay(1000).ContinueWith(x =>
  1705. {
  1706. PMModule.RecipeAbnormalEnd(module, recipeName, recipeStep, recipeAction);
  1707. });
  1708. }
  1709. else if (triggerModule == ConstantsCommon.RecipeTrigger)
  1710. {
  1711. switch (recipeAction)
  1712. {
  1713. case UniversalEvents.RecipeTriggerReset:
  1714. _faCallback.RecipeTriggerReset(module, recipeName, recipeStep, otherRecipeName);
  1715. break;
  1716. case UniversalEvents.RecipeTriggerEnd:
  1717. _faCallback.RecipeTriggerEnd(module, recipeName, recipeStep);
  1718. break;
  1719. case UniversalEvents.RecipeTriggerHold:
  1720. _faCallback.RecipeTriggerHold(module, recipeName, recipeStep);
  1721. break;
  1722. case UniversalEvents.RecipeTriggerLeakCheck:
  1723. _faCallback.RecipeTriggerLeakCheck(module, recipeName, recipeStep);
  1724. break;
  1725. case UniversalEvents.RecipeTriggerJumpStep:
  1726. _faCallback.RecipeTriggerJumpStep(module, recipeName, recipeStep, otherRecipeName);
  1727. break;
  1728. case UniversalEvents.RecipeTriggerCallSubRecipe:
  1729. _faCallback.RecipeTriggerCallSubRecipe(module, recipeName, recipeStep, otherRecipeName);
  1730. break;
  1731. }
  1732. }
  1733. }
  1734. }
  1735. }