PMModuleInterlock.cs 16 KB

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  1. using Aitex.Core.RT.DataCenter;
  2. using Aitex.Core.RT.Device.Unit;
  3. using Aitex.Core.RT.Event;
  4. using Aitex.Core.RT.IOCore;
  5. using Aitex.Core.RT.Log;
  6. using Aitex.Core.RT.OperationCenter;
  7. using Aitex.Core.RT.SCCore;
  8. using Aitex.Core.Util;
  9. using MECF.Framework.Common.OperationCenter;
  10. using MECF.Framework.FA.Core.FAControl;
  11. using System;
  12. using System.Collections;
  13. using System.Diagnostics;
  14. using System.Linq;
  15. namespace FurnaceRT.Equipments.PMs
  16. {
  17. public partial class PMModule
  18. {
  19. private SCConfigItem _configAutoControlCoolingValve;
  20. private SCConfigItem _configVacuumSensorPressure;
  21. private SCConfigItem _configAutoControlChiller;
  22. private SCConfigItem _chillerTurnOffIfTempBelow;
  23. private SCConfigItem _chillerTurnOnIfTempAbove;
  24. private PeriodicJob _threadMonitor;
  25. private bool _vac1;
  26. private bool _vac2;
  27. private bool _vac3;
  28. private Stopwatch _vac1Timer = new Stopwatch();
  29. private Stopwatch _vac2Timer = new Stopwatch();
  30. private Stopwatch _vac3Timer = new Stopwatch();
  31. private int _vac1PumpTimeS = 120;
  32. private int _vac2PumpTimeS = 120;
  33. private int _vac3PumpTimeS = 120;
  34. private int _foolProofTime = 5;
  35. private DeviceTimer _plcFoolProofTime = null;
  36. private RD_TRIG _trigPLCConnected = null;
  37. private void InitInterlock()
  38. {
  39. OP.AddCheck($"{Module}.{Name}.Disconnect", new CheckPlcConnect(this));
  40. //OP.AddCheck($"{ChamberDoor.Module}.{ChamberDoor.Name}.Open", new CheckOpenDoor(this));
  41. if (SC.ContainsItem("System.PLCConnectSensorFoolTime"))
  42. _foolProofTime = SC.GetValue<int>("System.PLCConnectSensorFoolTime");
  43. _configAutoControlCoolingValve = SC.GetConfigItem($"PM.{Module}.AutoControlCoolingValve");
  44. _configVacuumSensorPressure = SC.GetConfigItem($"PM.{Module}.VacuumSensorPressure");
  45. _configAutoControlChiller = SC.GetConfigItem($"PM.{Module}.Chiller.EnableAutoAdjust");
  46. _chillerTurnOffIfTempBelow = SC.GetConfigItem($"PM.{Module}.Chiller.TurnOffIfTempBelow");
  47. _chillerTurnOnIfTempAbove = SC.GetConfigItem($"PM.{Module}.Chiller.TurnOnIfTempAbove");
  48. if (SensorPLCHeartBeatPC != null)
  49. {
  50. _trigPLCConnected = new RD_TRIG();
  51. _plcFoolProofTime = new DeviceTimer();
  52. _plcFoolProofTime.Start((_foolProofTime + 2) * 1000);//首次
  53. }
  54. _threadMonitor = new PeriodicJob(100, OnTimer, "interlock thread", true);
  55. }
  56. private void InitUserDefineInterlock()
  57. {
  58. //DATA.Subscribe($"{Module}.Heater1", () => 100);//自定义的Interlock limit
  59. InterlockManager.Instance.UserDefineInterlockHandler += UserDefineInterlockHandler;
  60. InterlockManager.Instance.UserDefineInterlocks += UserDefineInterlocks;
  61. //DATA.Subscribe("UserDefineInterlock", () => InterlockManager.Instance.UserDefineFlagCurrentValues);
  62. //DATA.Subscribe("UserDefineCurrent", () => InterlockManager.Instance.UserDefineCurrentValues);
  63. }
  64. //自定义的interlock action
  65. private bool UserDefineInterlocks(string name)
  66. {
  67. switch (name)
  68. {
  69. case "PM1.Heater1":
  70. return true;
  71. }
  72. return false;
  73. }
  74. //设置自定义的interlock action
  75. private bool UserDefineInterlockHandler(string name, object value)
  76. {
  77. switch (name)
  78. {
  79. case "PM1.Heater1":
  80. //设置Heater的值
  81. return true;
  82. }
  83. return false;
  84. }
  85. private class CheckOpenDoor : IInterlockChecker
  86. {
  87. private PMModule _pm;
  88. public CheckOpenDoor(PMModule pm)
  89. {
  90. _pm = pm;
  91. }
  92. public bool CanDo(out string reason, object[] args)
  93. {
  94. if (_pm.ChamberPressure < SC.GetValue<double>("PM.AtmPressureBase"))
  95. {
  96. reason = $"{_pm.Module} chamber pressure {_pm.ChamberPressure:F3} Torr less than {SC.GetValue<double>("PM.AtmPressureBase")} [PM.AtmPressureBase], can not open door";
  97. return false;
  98. }
  99. reason = string.Empty;
  100. return true;
  101. }
  102. }
  103. private class CheckPlcConnect : IInterlockChecker
  104. {
  105. private PMModule _pm;
  106. public CheckPlcConnect(PMModule pm)
  107. {
  108. _pm = pm;
  109. }
  110. public bool CanDo(out string reason, object[] args)
  111. {
  112. if (_pm.IsBusy)
  113. {
  114. reason = $"{_pm.Module} is in {_pm.StringFsmStatus} status, can not disconnect, should be idle";
  115. return false;
  116. }
  117. reason = string.Empty;
  118. return true;
  119. }
  120. }
  121. public bool OnTimer()
  122. {
  123. try
  124. {
  125. MonitorN2Purge();
  126. MonitorScheduleMaintenance();
  127. MonitorAux();
  128. MonitorFfu();
  129. lock (_alarmConditionLocker)
  130. {
  131. MonitorAlarmCondition();
  132. }
  133. if (!IsProcessing && TrigVGUnitConversion != null && SC.GetStringValue($"{Module}.APC.PressureUnit").ToLower() == "pa")
  134. {
  135. TrigVGUnitConversion.SetTrigger(SC.GetStringValue($"{Module}.APC.PressureUnit").ToLower() == "pa", out _);
  136. }
  137. //MonitorVAC1();
  138. //MonitorVAC2();
  139. //MonitorVAC3();
  140. MonitorPLCConnected();
  141. MonitorTank1LeakAgeExec();
  142. MonitorTank2LeakAgeExec();
  143. //foreach (var item in _inCommandLst)
  144. //{
  145. // if (item == null)
  146. // continue;
  147. // if (!_inCommandTirgs.ContainsKey(item.Name))
  148. // {
  149. // _inCommandTirgs.Add(item.Name, new RD_TRIG());
  150. // }
  151. // _inCommandTirgs[item.Name].CLK = item.Value;
  152. //}
  153. //if (_inCommandTirgs[SensorHECPowerONSW.Name].R)
  154. //{
  155. // _trigTHPowerEN.SetTrigger(true, out _);
  156. // _trigHECPowerONLamp.SetTrigger(true, out _);
  157. //}
  158. //if (_inCommandTirgs[SensorHECPowerONSW.Name].T)
  159. //{
  160. //}
  161. //if (_inCommandTirgs[SensorTHBreakOK.Name].R)
  162. //{
  163. //}
  164. //if (_inCommandTirgs[SensorTHBreakOK.Name].T)
  165. //{
  166. // _trigTHPowerEN.SetTrigger(false, out _);
  167. // _trigHECPowerONLamp.SetTrigger(false, out _);
  168. //}
  169. ProcessAlarmSignal();
  170. //if (IV2Valve.Status != SensorVG2LOW.Value)
  171. // IV2Valve.TurnValve(SensorVG2LOW.Value, out _);
  172. //if (IV2Valve.Status != SensorVG2LOW.Value)
  173. // VV2Valve.TurnValve(SensorTubeOverPressure.Value, out _);
  174. if (IsInit || !IsInstalled)
  175. return true;
  176. //cooling 阀门
  177. if (_configAutoControlCoolingValve == null || _configAutoControlCoolingValve.BoolValue)
  178. {
  179. //if (ElectricalCoolingValve.Status != MainChiller.IsRunning)
  180. // ElectricalCoolingValve.TurnValve(MainChiller.IsRunning, out _);
  181. //if (MicrowaveCoolingValve.Status != MainChiller.IsRunning)
  182. // MicrowaveCoolingValve.TurnValve(MainChiller.IsRunning, out _);
  183. //if (ChamberLidCoolingValve.Status != MainChiller.IsRunning)
  184. // ChamberLidCoolingValve.TurnValve(MainChiller.IsRunning, out _);
  185. }
  186. //auto control chiller
  187. if (_configAutoControlChiller != null && _configAutoControlChiller.BoolValue && _chillerTurnOffIfTempBelow != null && _chillerTurnOnIfTempAbove != null)
  188. {
  189. //if (!MainChiller.HasAlarm)
  190. //{
  191. // if (MainChiller.IsRunning && (ChamberHeater1.Feedback < _chillerTurnOffIfTempBelow.DoubleValue))
  192. // {
  193. // if (!MainChiller.SetMainPowerOnOff(false, out string reason))
  194. // {
  195. // LOG.Write(reason);
  196. // }
  197. // }else if (!MainChiller.IsRunning && (ChamberHeater1.Feedback > _chillerTurnOnIfTempAbove.DoubleValue))
  198. // {
  199. // if (!MainChiller.SetMainPowerOnOff(true, out string reason))
  200. // {
  201. // LOG.Write(reason);
  202. // }
  203. // }
  204. //}
  205. }
  206. //压力保护计
  207. double pressure = 3.0;
  208. if (_configVacuumSensorPressure != null)
  209. pressure = _configVacuumSensorPressure.DoubleValue;
  210. if (pressure > 30.0)
  211. pressure = 30.0;
  212. //bool canOpen = ChamberMonitorPressureGauge.Value < pressure;
  213. //if (VacuumSensorValve.Status != canOpen)
  214. //{
  215. // VacuumSensorValve.TurnValve(canOpen, out _);
  216. //}
  217. ////interlock ignore
  218. //SignalExhaustAlarm.SetIgnoreError(SC.GetValue<bool>($"PM.{Module}.Signal.IgnoreExhaustAlarm"));
  219. }
  220. catch (Exception ex)
  221. {
  222. LOG.Write(ex);
  223. }
  224. return true;
  225. }
  226. private void MonitorPLCConnected()
  227. {
  228. if (SensorPLCHeartBeatPC != null)
  229. {
  230. _trigPLCConnected.CLK = SensorPLCHeartBeatPC.Value;
  231. if (_trigPLCConnected.T || _trigPLCConnected.R)
  232. {
  233. _plcFoolProofTime.Start(_foolProofTime * 1000);
  234. }
  235. if (_plcFoolProofTime.IsTimeout())
  236. {
  237. _plcFoolProofTime.Stop();
  238. SensorPLCConnectedAlarm?.Set($"Connected Status keep {_trigPLCConnected.CLK} out of {_foolProofTime}s");
  239. }
  240. }
  241. }
  242. private void ProcessAlarmSignal()
  243. {
  244. var alarms = EV.GetAlarmEvent();
  245. if (alarms != null && alarms.Count > 0)
  246. {
  247. foreach (var device in HWILKAlarmDic)
  248. {
  249. if (device.Key is IoSensor && !((IoSensor)device.Key).Value && device.Value.AutoRecovery)
  250. {
  251. var item = alarms.FirstOrDefault(x => x.EventEnum == device.Value.EventEnum);
  252. if (item != null)
  253. {
  254. alarms.Remove(item);
  255. EV.ClearAlarmEvent(item.EventEnum);
  256. Singleton<FAJobController>.Instance.ClearAlarm(item.EventEnum);
  257. }
  258. }
  259. }
  260. }
  261. bool isTrig = false;
  262. foreach (var signal in _alarmSignals)
  263. {
  264. if (signal.RrigSignalOn.T && signal.IsAlarmAutoRecovery)
  265. {
  266. var item = _triggeredAlarmList.FirstOrDefault(x => x.EventEnum == signal.AlarmTriggered.EventEnum);
  267. if (item != null)
  268. {
  269. item.Reset();
  270. _triggeredAlarmList.Remove(item);
  271. EV.ClearAlarmEvent(item.EventEnum);
  272. Singleton<FAJobController>.Instance.ClearAlarm(item.EventEnum);
  273. }
  274. isTrig = true;
  275. signal.AlarmRecovery?.Set();
  276. }
  277. }
  278. if (isTrig)
  279. {
  280. int count = 0;
  281. foreach (var alarm in alarms)
  282. {
  283. if (alarm.Level == EventLevel.Alarm && alarm.Source == Name)
  284. count++;
  285. }
  286. if (count == 0)
  287. CheckToPostMessage((int)MSG.Reset);
  288. }
  289. }
  290. private void MonitorVAC1()
  291. {
  292. if (_vac1Timer == null)
  293. _vac1Timer = new Stopwatch();
  294. if (ValveAV24.Status)
  295. {
  296. _vac1 = false;
  297. if (_vac1Timer.IsRunning)
  298. _vac1Timer.Stop();
  299. }
  300. if (!ValveAV9.Status &&
  301. !ValveAV16.Status &&
  302. !ValveAV20.Status &&
  303. !ValveAV24.Status &&
  304. ValveAV26.Status &&
  305. (ValveAV33.Status || ValveAV35.Status) &&
  306. ValveAV83.Status &&
  307. ValveAV71.Status &&
  308. (APC.ModeFeedback == 0 || APC.ModeFeedback == 6) &&//0=idle;6=full open
  309. SensorVG11Status.Value && !AlarmSignalVG11HighAlarm.Value)
  310. {
  311. if (!_vac1Timer.IsRunning)
  312. _vac1Timer.Restart();
  313. if (_vac1Timer.ElapsedMilliseconds > _vac1PumpTimeS * 1000)
  314. _vac1 = true;
  315. }
  316. else
  317. {
  318. if (_vac1Timer.IsRunning)
  319. _vac1Timer.Stop();
  320. }
  321. }
  322. private void MonitorVAC2()
  323. {
  324. if (_vac2Timer == null)
  325. _vac2Timer = new Stopwatch();
  326. if (ValveAV9.Status)
  327. {
  328. _vac2 = false;
  329. if (_vac2Timer.IsRunning)
  330. _vac2Timer.Stop();
  331. }
  332. if (!ValveAV9.Status &&
  333. !ValveAV16.Status &&
  334. !ValveAV20.Status &&
  335. !ValveAV24.Status &&
  336. ValveAV12.Status &&
  337. ValveAV14.Status &&
  338. ValveAV28.Status &&
  339. ValveAV29.Status &&
  340. ValveAV36.Status &&
  341. ValveAV37.Status &&
  342. ValveAV81.Status &&
  343. ValveAV71.Status &&
  344. (APC.ModeFeedback == 0 || APC.ModeFeedback == 6) &&//0=idle;6=full open
  345. SensorVG11Status.Value && !AlarmSignalVG11HighAlarm.Value)
  346. {
  347. if (!_vac2Timer.IsRunning)
  348. _vac2Timer.Restart();
  349. if (_vac2Timer.ElapsedMilliseconds > _vac2PumpTimeS * 1000)
  350. _vac2 = true;
  351. }
  352. else
  353. {
  354. if (_vac2Timer.IsRunning)
  355. _vac2Timer.Stop();
  356. }
  357. }
  358. private void MonitorVAC3()
  359. {
  360. if (_vac3Timer == null)
  361. _vac3Timer = new Stopwatch();
  362. if (ValveAV16.Status || ValveAV20.Status)
  363. {
  364. _vac3 = false;
  365. if (_vac3Timer.IsRunning)
  366. _vac3Timer.Stop();
  367. }
  368. if (!ValveAV9.Status &&
  369. !ValveAV16.Status &&
  370. !ValveAV20.Status &&
  371. !ValveAV24.Status &&
  372. ValveAV18.Status &&
  373. ValveAV22.Status &&
  374. ValveAV38.Status &&
  375. ValveAV39.Status &&
  376. ValveAV82.Status &&
  377. ValveAV71.Status &&
  378. (APC.ModeFeedback == 0 || APC.ModeFeedback == 6) &&//0=idle;6=full open
  379. SensorVG11Status.Value && !AlarmSignalVG11HighAlarm.Value)
  380. {
  381. if (!_vac3Timer.IsRunning)
  382. _vac3Timer.Restart();
  383. if (_vac3Timer.ElapsedMilliseconds > _vac3PumpTimeS * 1000)
  384. _vac3 = true;
  385. }
  386. else
  387. {
  388. if (_vac3Timer.IsRunning)
  389. _vac3Timer.Stop();
  390. }
  391. }
  392. }
  393. }