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							- <?xml version="1.0" encoding="utf-8"?>
 
- <Aitex>
 
- 	<TableParameterFormat ChamberType="APCPID" Version="1.0"  TableNumber="10">
 
- 		<!--###########################################-->
 
- 		<Catalog DisplayName="ParameterInfo">
 
- 			<Group DisplayName="Parameter Information">
 
- 				<Step ModuleName="" DeviceType="" DisplayName="No." ControlName="TableNo" InputType="ReadOnly" />
 
- 				<Step ModuleName="" DeviceType="" DisplayName="Name" ControlName="Name" InputType="TextInput" />
 
- 				<Step ModuleName="" DeviceType="" DisplayName="P" DefaultValue="0.1" ControlName="P" InputType="DoubleInput" InputMode=""  Min="0.01" Max="2000"/>
 
- 				<Step ModuleName="" DeviceType="" DisplayName="I" DefaultValue="0" ControlName="I" InputType="DoubleInput" InputMode=""  Min="0" Max="2000"/>
 
- 				<Step ModuleName="" DeviceType="" DisplayName="D" DefaultValue="0" ControlName="D" InputType="DoubleInput" InputMode=""  Min="0" Max="2000"/>
 
- 				<Step ModuleName="" DeviceType="" DisplayName="a" DefaultValue="0" ControlName="a" InputType="DoubleInput" InputMode=""  Min="0" Max="2000"/>
 
- 			</Group>
 
- 		</Catalog>
 
- 		<!--###########################################-->
 
- 		<Catalog DisplayName="Table">
 
- 			<Group DisplayName="Press" ControlName="Press">
 
- 				<Step ModuleName="" DeviceType="" DisplayName="No." ControlName="No" InputType="ReadOnly" />
 
- 				<Step ModuleName="" DeviceType="" DisplayName="Name" ControlName="Name" InputType="TextInput" />
 
- 				<Step ModuleName="" DeviceType="" DisplayName="P" DefaultValue="0.1" ControlName="P" InputType="DoubleInput" InputMode=""  Min="0.01" Max="2000"/>
 
- 				<Step ModuleName="" DeviceType="" DisplayName="I" DefaultValue="0" ControlName="I" InputType="DoubleInput" InputMode=""  Min="0" Max="2000"/>
 
- 				<Step ModuleName="" DeviceType="" DisplayName="D" DefaultValue="0" ControlName="D" InputType="DoubleInput" InputMode=""  Min="0" Max="2000"/>
 
- 				<Step ModuleName="" DeviceType="" DisplayName="a" DefaultValue="0" ControlName="a" InputType="DoubleInput" InputMode=""  Min="0" Max="2000"/>
 
- 				<Step ModuleName="" DeviceType="" DisplayName="offset" DefaultValue="0" ControlName="offset" InputType="NumInput" InputMode=""  Min="-999" Max="2000"/>
 
- 				<Step ModuleName="" DeviceType="" DisplayName="CH(mm)" DefaultValue="0.1" ControlName="CH" InputType="DoubleInput" InputMode=""  Min="0.1" Max="2000"/>
 
- 				<Step ModuleName="" DeviceType="" DisplayName="CL(mm)" DefaultValue="0.1" ControlName="CL" InputType="DoubleInput" InputMode=""  Min="0.1" Max="2000"/>
 
- 			</Group>
 
- 		</Catalog>
 
- 	</TableParameterFormat>
 
- 	<TableParameterSchema>
 
- 		<xs:schema attributeFormDefault="unqualified" elementFormDefault="qualified" xmlns:xs="http://www.w3.org/2001/XMLSchema">
 
- 			<xs:simpleType name="booleanType">
 
- 				<xs:restriction base="xs:string">
 
- 					<xs:enumeration value="0" />
 
- 					<xs:enumeration value="1" />
 
- 					<xs:enumeration value="False" />
 
- 					<xs:enumeration value="True" />
 
- 					<xs:enumeration value="false" />
 
- 					<xs:enumeration value="true" />
 
- 				</xs:restriction>
 
- 			</xs:simpleType>
 
- 			<xs:element name="TableParameterData">
 
- 				<xs:complexType>
 
- 					<xs:sequence>
 
- 						<xs:element maxOccurs="unbounded" name="Step">
 
- 							<xs:complexType>
 
- 								<xs:attribute name="TableNo" type="xs:string" use="required" />
 
- 								<xs:attribute name="Name" type="xs:string" use="required" />
 
- 								<xs:attribute name="Type" type="xs:string" use="required" />
 
- 								<!--<xs:attribute name="UseTemp" type="xs:decimal" use="required" />-->
 
- 							</xs:complexType>
 
- 						</xs:element>
 
- 					</xs:sequence>
 
- 					<xs:attribute name="ParameterChamberType" type="xs:string" fixed="Parameter" use="required" />
 
- 					<xs:attribute name="ParameterType" type="xs:string" use="required" />
 
- 					<xs:attribute name="ParameterVersion" type="xs:string" fixed="1.0" use="required" />
 
- 					<xs:attribute name="CreatedBy" type="xs:string" use="required" />
 
- 					<xs:attribute name="CreationTime" type="xs:dateTime" use="required" />
 
- 					<xs:attribute name="LastRevisedBy" type="xs:string" use="required" />
 
- 					<xs:attribute name="LastRevisionTime" type="xs:dateTime" use="required" />
 
- 					<xs:attribute name="Description" type="xs:string" use="required" />
 
- 				</xs:complexType>
 
- 			</xs:element>
 
- 		</xs:schema>
 
- 	</TableParameterSchema>
 
- </Aitex>
 
 
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