BoatMove.cs 18 KB

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  1. using Aitex.Core.RT.Device;
  2. using Aitex.Core.RT.Device.Unit;
  3. using Aitex.Core.RT.Event;
  4. using Aitex.Core.RT.Routine;
  5. using Aitex.Core.RT.SCCore;
  6. using Aitex.Core.Util;
  7. using Aitex.Sorter.Common;
  8. using MECF.Framework.Common.Alarms;
  9. using MECF.Framework.Common.Device.Bases;
  10. using MECF.Framework.Common.Equipment;
  11. using MECF.Framework.Common.SubstrateTrackings;
  12. using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.Robot;
  13. using System;
  14. using System.Collections.Generic;
  15. using System.Linq;
  16. using System.Text;
  17. using System.Threading.Tasks;
  18. using FurnaceRT.Equipments.Systems;
  19. using static Aitex.Core.RT.Device.Unit.IoBoat;
  20. using System.Diagnostics;
  21. using FurnaceRT.Devices;
  22. using FurnaceRT.Equipments.PMs;
  23. using MECF.Framework.Common.Tolerance;
  24. using MECF.Framework.Common.CommonData.SorterDefines;
  25. using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.PMs;
  26. using Aitex.Core.RT.Log;
  27. namespace FurnaceRT.Equipments.Boats
  28. {
  29. public class BoatMove : ModuleRoutine, IRoutine
  30. {
  31. enum RoutineStep
  32. {
  33. SetBoatSpeed,
  34. SetBoatDirection,
  35. BoatRAxisHome,
  36. BoatRAxisMove,
  37. SetBoatZAxisMoveStop,
  38. SetBoatRAxisMoveStop,
  39. SetBoatInterval,
  40. CheckPrepareMove,
  41. Load,
  42. Unload,
  43. Delay1,
  44. Delay2,
  45. Delay3,
  46. ZMoveToStart,
  47. ZMoveToEnd,
  48. ZMove,
  49. AutoShutterOpen,
  50. AutoShutterClose,
  51. }
  52. private BoatModule _boatModule;
  53. private int _zAxisTimeout = 0;
  54. private int _rAxisTimeout = 0;
  55. private int _shutterTimeout = 0;
  56. private string _command;
  57. private string _position;
  58. private float _speed;
  59. private FilterChecker _filterChecker = new FilterChecker();
  60. public BoatMove(BoatModule boatModule)
  61. {
  62. _boatModule = boatModule;
  63. Module = boatModule.Module;
  64. Name = "Move";
  65. }
  66. public void Init(string command, string position, string speed)
  67. {
  68. _command = command;
  69. _position = position;
  70. float.TryParse(speed, out _speed);
  71. var para = new List<object> { _command, _position, _speed };
  72. _boatModule.BoatZAxisMoveFailedForInterlock.RetryMessage = (int)BoatModule.MSG.BoatMoveRetry;
  73. _boatModule.BoatZAxisMoveFailedForInterlock.RetryMessageParas = para.ToArray();
  74. _boatModule.BoatZAxisMoveFailedForHumanInterlock.RetryMessage = (int)BoatModule.MSG.BoatMoveRetry;
  75. _boatModule.BoatZAxisMoveFailedForHumanInterlock.RetryMessageParas = para.ToArray();
  76. _boatModule.BoatZAxisMoveFailedForWaferRobotArmExtend.RetryMessage = (int)BoatModule.MSG.BoatMoveRetry;
  77. _boatModule.BoatZAxisMoveFailedForWaferRobotArmExtend.RetryMessageParas = para.ToArray();
  78. _boatModule.BoatZAxisMoveTimeOut.RetryMessage = (int)BoatModule.MSG.BoatMoveRetry;
  79. _boatModule.BoatZAxisMoveTimeOut.RetryMessageParas = para.ToArray();
  80. _boatModule.AutoShutterMoveFailedForInterlock.RetryMessage = (int)BoatModule.MSG.BoatMoveRetry;
  81. _boatModule.AutoShutterMoveFailedForInterlock.RetryMessageParas = para.ToArray();
  82. _boatModule.AutoShutterOpenTimeOut.RetryMessage = (int)BoatModule.MSG.BoatMoveRetry;
  83. _boatModule.AutoShutterOpenTimeOut.RetryMessageParas = para.ToArray();
  84. _boatModule.AutoShutterCloseTimeOut.RetryMessage = (int)BoatModule.MSG.BoatMoveRetry;
  85. _boatModule.AutoShutterCloseTimeOut.RetryMessageParas = para.ToArray();
  86. _boatModule.BoatRAxisMoveTimeOut.RetryMessage = (int)BoatModule.MSG.BoatMoveRetry;
  87. _boatModule.BoatRAxisMoveTimeOut.RetryMessageParas = para.ToArray();
  88. }
  89. public Result Start(params object[] objs)
  90. {
  91. Reset();
  92. _zAxisTimeout = SC.GetValue<int>($"{Module}.BoatElevatorServo.MotionTimeout");
  93. _rAxisTimeout = SC.GetValue<int>($"{Module}.BoatRotationServo.MotionTimeout");
  94. _shutterTimeout = SC.GetValue<int>($"{Module}.AutoShutter.MotionTimeout");
  95. var isBeforeShutter = new List<string>() { "boatload", "boatcap2", "boatunload", "boatloaderhome", };
  96. if (!string.IsNullOrEmpty(_command) && isBeforeShutter.Contains(_command))
  97. {
  98. string reason = "";
  99. if (!_boatModule.CheckPrepareMove(out reason, false))
  100. {
  101. _boatModule.BoatZAxisMoveFailedForInterlock.Set(reason);
  102. //return Result.FAIL;
  103. }
  104. }
  105. _filterChecker.CheckInterval = 1;
  106. Notify($"Start");
  107. return Result.RUN;
  108. }
  109. public void Abort()
  110. {
  111. if (_boatModule.CheckPrepareMove(out _, false))
  112. {
  113. _boatModule.ZAxisDevice.ServoStop();
  114. _boatModule.RAxisDevice.ServoStop();
  115. }
  116. }
  117. public override Result Monitor()
  118. {
  119. try
  120. {
  121. PauseRountine(_boatModule.RAxisDevice.IsPause);
  122. if (_boatModule.RAxisDevice.IsPause)
  123. return Result.RUN;
  124. if (_boatModule.RAxisDevice.IsError || _boatModule.ZAxisDevice.IsError)
  125. return Result.FAIL;
  126. switch (_command)
  127. {
  128. case "boatload":
  129. case "boatcap2":
  130. CheckBoatMoveO2Desity((int)RoutineStep.Load, _zAxisTimeout, N2PurgeModeEnum.BoatLoad.ToString());
  131. AutoShutterOpen((int)RoutineStep.AutoShutterOpen, true, _shutterTimeout);
  132. var position = (BoatPosition)Enum.Parse(typeof(BoatPosition), _position);
  133. SetBoatZAxisMove((int)RoutineStep.ZMove, position, _speed, (int)_zAxisTimeout);
  134. break;
  135. case "boatunload":
  136. case "boatloaderhome":
  137. CheckBoatMoveO2Desity((int)RoutineStep.Unload, _zAxisTimeout, N2PurgeModeEnum.BoatUnLoad.ToString());
  138. AutoShutterOpen((int)RoutineStep.AutoShutterOpen, true, _shutterTimeout);
  139. //CheckPrepareMove((int)RoutineStep.CheckPrepareMove, 2);
  140. position = (BoatPosition)Enum.Parse(typeof(BoatPosition), _position);
  141. SetBoatZAxisMove((int)RoutineStep.ZMove, position, _speed, (int)_zAxisTimeout);
  142. AutoShutterOpen((int)RoutineStep.AutoShutterClose, false, _shutterTimeout);
  143. break;
  144. case "boatrotate":
  145. var direction = (BoatRotationDirection)Enum.Parse(typeof(BoatRotationDirection), _position);
  146. SetBoatRAxisMove((int)RoutineStep.BoatRAxisMove, direction, _speed, _rAxisTimeout);
  147. break;
  148. case "boatrotatestop"://r home
  149. SetBoatRAxisMoveStop((int)RoutineStep.SetBoatRAxisMoveStop);
  150. Delay((int)RoutineStep.Delay1, 2);
  151. SetBoatRAxisHome((int)RoutineStep.BoatRAxisHome, _rAxisTimeout);
  152. break;
  153. case "stop(includer-axis)":
  154. SetBoatZAxisMoveStop((int)RoutineStep.SetBoatZAxisMoveStop);
  155. SetBoatRAxisMoveStop((int)RoutineStep.SetBoatRAxisMoveStop);
  156. break;
  157. }
  158. }
  159. catch (RoutineBreakException)
  160. {
  161. return Result.RUN;
  162. }
  163. catch (RoutineFaildException ex)
  164. {
  165. //_boatModule.RAxisDevice.ServoStop();
  166. return Result.FAIL;
  167. }
  168. Notify("Finished");
  169. return Result.DONE;
  170. }
  171. private void CheckBoatMoveO2Desity(int id, int timeout, string boatMoveN2Purge)
  172. {
  173. var reason = "";
  174. Tuple<bool, Result> ret = ExecuteAndWait(id, () =>
  175. {
  176. Notify($"Check {boatMoveN2Purge} O2Desity");
  177. return true;
  178. }, () =>
  179. {
  180. var pm = (Singleton<EquipmentManager>.Instance.Modules[ModuleName.PM1] as PMModule);
  181. var isCheckO2Enbale = pm.CheckBoatMoveIsNeedOxygenPressure(boatMoveN2Purge, pm.IsProcessing, out var o2LimtData);
  182. if (!isCheckO2Enbale)
  183. return true;
  184. _filterChecker.Monitor(pm.GetN2PurgeUnder20PPMStatus(o2LimtData) && pm.CheckIsLASide());
  185. pm.SetN2PurgeModePhase(boatMoveN2Purge);
  186. if (_filterChecker.Trig)
  187. {
  188. pm.IsWait = false;
  189. LOG.Info($"{boatMoveN2Purge} Check O2Desity,TransferRoomO2DensityCheckEnable={isCheckO2Enbale},LA LimtData={o2LimtData},Wait {boatMoveN2Purge}。A");
  190. _filterChecker.Restart();
  191. pm.SetN2PurgeModePhase(N2PurgeModeEnum.Idle.ToString());
  192. return true;
  193. }
  194. if (!pm.IsWait)
  195. {
  196. pm.IsWait = true;
  197. }
  198. return false; ;
  199. }, timeout * 1000);
  200. if (ret.Item1)
  201. {
  202. if (ret.Item2 == Result.FAIL)
  203. {
  204. throw (new RoutineFaildException());
  205. }
  206. else if (ret.Item2 == Result.TIMEOUT) //timeout
  207. {
  208. _boatModule.BoatZAxisMoveFailedForInterlock.Set($"{boatMoveN2Purge} CheckO2Desity timeout={timeout}");
  209. throw (new RoutineFaildException());
  210. }
  211. else
  212. throw (new RoutineBreakException());
  213. }
  214. }
  215. private void CheckPrepareMove(int id, int timeout)
  216. {
  217. var reason = "";
  218. Tuple<bool, Result> ret = ExecuteAndWait(id, () =>
  219. {
  220. Notify($"Check boat move enable");
  221. return true;
  222. }, () =>
  223. {
  224. return _boatModule.CheckPrepareMove(out reason);
  225. }, timeout * 2 * 1000);
  226. if (ret.Item1)
  227. {
  228. if (ret.Item2 == Result.FAIL)
  229. {
  230. throw (new RoutineFaildException());
  231. }
  232. else if (ret.Item2 == Result.TIMEOUT) //timeout
  233. {
  234. _boatModule.BoatZAxisMoveFailedForInterlock.Set($"{reason} is not OK, can not complete in {timeout} seconds");
  235. throw (new RoutineFaildException());
  236. }
  237. else
  238. throw (new RoutineBreakException());
  239. }
  240. }
  241. private void AutoShutterOpen(int id, bool isOpen, int timeout)
  242. {
  243. Tuple<bool, Result> ret = ExecuteAndWait(id, () =>
  244. {
  245. Notify($"shutter {(isOpen ? "open" : "close")}");
  246. string reason;
  247. if (!_boatModule.ShutterDevice.SetOpen(isOpen, out reason))
  248. {
  249. _boatModule.ShutterDevice.AutoShutterMoveFailedForInterlock.Set();
  250. return false;
  251. }
  252. return true;
  253. }, () =>
  254. {
  255. return isOpen ? _boatModule.ShutterDevice.OpenCloseStatus == DeviceStatus.Open : _boatModule.ShutterDevice.OpenCloseStatus == DeviceStatus.Close;
  256. }, timeout * 1000);
  257. if (ret.Item1)
  258. {
  259. if (ret.Item2 == Result.FAIL)
  260. {
  261. throw (new RoutineFaildException());
  262. }
  263. else if (ret.Item2 == Result.TIMEOUT) //timeout
  264. {
  265. if (isOpen)
  266. {
  267. _boatModule.ShutterDevice.AutoShutterOpenTimeOut.Set($"can not complete in {timeout} seconds");
  268. }
  269. else
  270. {
  271. _boatModule.ShutterDevice.AutoShutterCloseTimeOut.Set($"can not complete in {timeout} seconds");
  272. }
  273. throw (new RoutineFaildException());
  274. }
  275. else
  276. throw (new RoutineBreakException());
  277. }
  278. }
  279. private void SetBoatZAxisMove(int id, BoatPosition position, float speed, int timeout)
  280. {
  281. Tuple<bool, Result> ret = ExecuteAndWait(id, () =>
  282. {
  283. Notify($"Boat ZAxis movet to {position}");
  284. string reason;
  285. if (!_boatModule.ZAxisDevice.SetServoMoveTo(position.ToString(), out reason, speed))
  286. {
  287. //_boatModule.BoatDevice.BoatRAxisMoveFailedForInterlock.Description = reason;
  288. _boatModule.BoatZAxisMoveFailedForInterlock.Set(reason);
  289. }
  290. return true;
  291. }, () =>
  292. {
  293. if (_boatModule.ZAxisDevice.IsError)
  294. return null;
  295. return _boatModule.ZAxisDevice.CheckServoAtPosition(position.ToString());
  296. }, timeout * 2 * 1000);
  297. if (ret.Item1)
  298. {
  299. if (ret.Item2 == Result.FAIL)
  300. {
  301. _boatModule.ZAxisDevice.ServoStop();
  302. throw (new RoutineFaildException());
  303. }
  304. else if (ret.Item2 == Result.TIMEOUT) //timeout
  305. {
  306. _boatModule.ZAxisDevice.ServoStop();
  307. _boatModule.BoatZAxisMoveTimeOut.Set($"can not complete in {timeout} seconds");
  308. throw (new RoutineFaildException());
  309. }
  310. else
  311. throw (new RoutineBreakException());
  312. }
  313. }
  314. private void SetBoatZAxisMoveStop(int id)
  315. {
  316. Tuple<bool, Result> ret = Execute(id, () =>
  317. {
  318. Notify($"Set ZAxis boat stop");
  319. _boatModule.ZAxisDevice.ServoStop();
  320. return true;
  321. });
  322. if (ret.Item1)
  323. {
  324. if (ret.Item2 == Result.FAIL)
  325. {
  326. throw (new RoutineFaildException());
  327. }
  328. else
  329. throw (new RoutineBreakException());
  330. }
  331. }
  332. private void SetBoatRAxisMoveStop(int id)
  333. {
  334. Tuple<bool, Result> ret = Execute(id, () =>
  335. {
  336. Notify($"Set RAxis boat stop");
  337. _boatModule.RAxisDevice.ServoStop();
  338. return true;
  339. });
  340. if (ret.Item1)
  341. {
  342. if (ret.Item2 == Result.FAIL)
  343. {
  344. throw (new RoutineFaildException());
  345. }
  346. else
  347. throw (new RoutineBreakException());
  348. }
  349. }
  350. private void SetBoatRAxisHome(int id, int timeout)
  351. {
  352. Tuple<bool, Result> ret = ExecuteAndWait(id, () =>
  353. {
  354. Notify($"Boat RAxis home");
  355. if (!_boatModule.RAxisDevice.SetServoHome())
  356. {
  357. _boatModule.BoatRAxisHomeFailed.Set();
  358. }
  359. return true;
  360. }, () =>
  361. {
  362. if (_boatModule.RAxisDevice.IsError)
  363. return null;
  364. return _boatModule.RAxisDevice.IsHomeDone && _boatModule.RAxisDevice.IsReady;
  365. }, timeout * 1000);
  366. if (ret.Item1)
  367. {
  368. if (ret.Item2 == Result.FAIL)
  369. {
  370. _boatModule.RAxisDevice.ServoStop();
  371. throw (new RoutineFaildException());
  372. }
  373. else if (ret.Item2 == Result.TIMEOUT) //timeout
  374. {
  375. _boatModule.RAxisDevice.ServoStop();
  376. _boatModule.BoatRAxisHomeTimeout.Set($"can not complete in {timeout} seconds");
  377. throw (new RoutineFaildException());
  378. }
  379. else
  380. throw (new RoutineBreakException());
  381. }
  382. }
  383. private void SetBoatRAxisMove(int id, BoatRotationDirection direction, float speed, int timeout)
  384. {
  385. Tuple<bool, Result> ret = ExecuteAndWait(id, () =>
  386. {
  387. Notify($"Boat RAxis {direction}");
  388. string reason;
  389. if (!_boatModule.RAxisDevice.SetServoMoveTo(direction.ToString(), out reason, speed))
  390. {
  391. //_boatModule.BoatDevice.BoatRAxisMoveFailedForInterlock.Description = reason;
  392. _boatModule.BoatRAxisMoveFailedForInterlock.Set(reason);
  393. }
  394. return true;
  395. }, () =>
  396. {
  397. if (_boatModule.RAxisDevice.IsError)
  398. return null;
  399. return _boatModule.RAxisDevice.IsMoving;
  400. }, timeout * 2 * 1000);
  401. if (ret.Item1)
  402. {
  403. if (ret.Item2 == Result.FAIL)
  404. {
  405. _boatModule.RAxisDevice.ServoStop();
  406. throw (new RoutineFaildException());
  407. }
  408. else if (ret.Item2 == Result.TIMEOUT) //timeout
  409. {
  410. _boatModule.RAxisDevice.ServoStop();
  411. _boatModule.BoatRAxisMoveTimeOut.Set($"can not complete in {timeout} seconds");
  412. throw (new RoutineFaildException());
  413. }
  414. else
  415. throw (new RoutineBreakException());
  416. }
  417. }
  418. }
  419. }