PreProcess.cs 25 KB

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  1. using Aitex.Core.RT.Routine;
  2. using MECF.Framework.Common.Equipment;
  3. using System;
  4. using Aitex.Core.RT.SCCore;
  5. using FurnaceRT.Equipments.PMs.Routines;
  6. using System.Collections.Generic;
  7. using FurnaceRT.Equipments.Systems;
  8. using Aitex.Core.Util;
  9. using MECF.Framework.Common.SubstrateTrackings;
  10. using System.Linq;
  11. using Aitex.Core.Common;
  12. using MECF.Framework.Common.CommonData.EnumData;
  13. using MECF.Framework.Common.DataCenter;
  14. using MECF.Framework.Common.Utilities;
  15. using Aitex.Core.RT.Log;
  16. namespace FurnaceRT.Equipments.PMs.RecipeExecutions
  17. {
  18. public class PreProcess : PMBaseRoutine, IRoutine
  19. {
  20. public enum Routine
  21. {
  22. ToReadyProcessState,
  23. Pump,
  24. PinDown,
  25. }
  26. private string _recipeName;
  27. private int _liftTimeout;
  28. private bool _isProcessRecipe;
  29. public PreProcess(ModuleName module, PMModule pm) : base(module, pm)
  30. {
  31. Module = module.ToString();
  32. Name = "PreProcess";
  33. }
  34. public void Init(string recipeName, bool isProcessRecipe = true)
  35. {
  36. _recipeName = recipeName;
  37. _isProcessRecipe = isProcessRecipe;
  38. }
  39. public override Result Start(params object[] objs)
  40. {
  41. RecipeHead recipeHead;
  42. List<RecipeStep> recipeSteps;
  43. Dictionary<int, List<RecipeStep>> abortRecipe;
  44. Dictionary<int, string> abortRecipeName;
  45. Dictionary<int, List<RecipeStep>> subRecipe;
  46. Dictionary<int, string> subRecipeName;
  47. string reason = string.Empty;
  48. if (_isProcessRecipe)
  49. {
  50. if (!RecipeParser.Parse(_recipeName, Module, out recipeHead, out recipeSteps, out reason, "Process"))
  51. {
  52. PMModule.PreprocessStartFailedWarning.Set($"Load process recipe {_recipeName} failed, {reason}");
  53. return Result.FAIL;
  54. }
  55. #region MyRegion
  56. var isScheduleMaintenance = SC.ContainsItem("System.EnableScheduleMaintenance") && SC.GetValue<bool>("System.EnableScheduleMaintenance");
  57. if (isScheduleMaintenance)
  58. {
  59. var pm = (Singleton<EquipmentManager>.Instance.Modules[ModuleName.PM1] as PMModule);
  60. pm.GetAllDBRecord();
  61. var wafers = WaferManager.Instance.GetWafers(ModuleName.PM1);
  62. if (wafers != null && wafers.Count() > 0)
  63. {
  64. foreach (var wafer in wafers)
  65. {
  66. if (wafer == null || wafer.IsEmpty || (wafer.WaferType != WaferType.SD && wafer.WaferType != WaferType.ED))
  67. continue;
  68. #region New
  69. if (isScheduleMaintenance)
  70. {
  71. #region SD Dummy 时间/次数/膜厚限制
  72. var maintenanceItemSDCarrierUseFreq = ScheduleMaintenanceDataManager.Instance.GetItem(MaintenanceItemEnum.SDCarrierUseFreq.ToString());
  73. var maintenanceItemSDWaferThickness = ScheduleMaintenanceDataManager.Instance.GetItem(MaintenanceItemEnum.SDWaferThickness.ToString());
  74. var maintenanceItemSDWaferUserTime = ScheduleMaintenanceDataManager.Instance.GetItem(MaintenanceItemEnum.SDWaferUserTime.ToString());
  75. if (wafer.WaferType == WaferType.SD && maintenanceItemSDCarrierUseFreq.StartValue > 0 && wafer.UseCount > maintenanceItemSDCarrierUseFreq.StartValue && wafer.UseCount < maintenanceItemSDCarrierUseFreq.LimitValue)
  76. {
  77. if (maintenanceItemSDCarrierUseFreq.MaintenanceProcessing == MaintenanceProcessingCommandEnum.AlarmReport.ToString() ||
  78. maintenanceItemSDCarrierUseFreq.MaintenanceProcessing == MaintenanceProcessingCommandEnum.JobAutoStart.ToString())
  79. {
  80. var msg = pm.GetAlarmWarningMsg(maintenanceItemSDCarrierUseFreq);
  81. Singleton<EquipmentManager>.Instance.SDWaferTypeUseCountWarning.Set(msg);
  82. }
  83. }
  84. if (wafer.WaferType == WaferType.SD && maintenanceItemSDWaferUserTime.StartValue > 0 && wafer.UseTime > maintenanceItemSDWaferUserTime.StartValue && wafer.UseTime < maintenanceItemSDWaferUserTime.LimitValue)
  85. {
  86. if (maintenanceItemSDWaferUserTime.MaintenanceProcessing == MaintenanceProcessingCommandEnum.AlarmReport.ToString() ||
  87. maintenanceItemSDWaferUserTime.MaintenanceProcessing == MaintenanceProcessingCommandEnum.JobAutoStart.ToString())
  88. {
  89. var currentValue = DateTimeUtil.SecondToHHmmss(maintenanceItemSDWaferUserTime.CurrentValue.ToString());
  90. var minValue = DateTimeUtil.SecondToHHmmss(maintenanceItemSDWaferUserTime.StartValue.ToString());
  91. var maxValue = DateTimeUtil.SecondToHHmmss(maintenanceItemSDWaferUserTime.LimitValue.ToString());
  92. var msg = pm.GetAlarmWarningMsg(maintenanceItemSDWaferUserTime, true, currentValue, minValue, maxValue);
  93. Singleton<EquipmentManager>.Instance.SDWaferTypeUseTimeWarning.Set(msg);
  94. }
  95. }
  96. if (wafer.WaferType == WaferType.SD && maintenanceItemSDWaferThickness.StartValue > 0 && wafer.UseThick > maintenanceItemSDWaferThickness.StartValue && wafer.UseThick < maintenanceItemSDWaferThickness.LimitValue)
  97. {
  98. if (maintenanceItemSDWaferThickness.MaintenanceProcessing == MaintenanceProcessingCommandEnum.AlarmReport.ToString() ||
  99. maintenanceItemSDWaferThickness.MaintenanceProcessing == MaintenanceProcessingCommandEnum.JobAutoStart.ToString()
  100. )
  101. {
  102. var msg = pm.GetAlarmWarningMsg(maintenanceItemSDWaferThickness);
  103. Singleton<EquipmentManager>.Instance.SDWaferTypeThicknessWarning.Set(msg);
  104. }
  105. }
  106. if (wafer.WaferType == WaferType.SD && maintenanceItemSDCarrierUseFreq.StartValue > 0 && wafer.UseCount >= maintenanceItemSDCarrierUseFreq.LimitValue)
  107. {
  108. if (maintenanceItemSDCarrierUseFreq.MaintenanceProcessing == MaintenanceProcessingCommandEnum.AlarmReport.ToString())
  109. {
  110. var msg = pm.GetAlarmWarningMsg(maintenanceItemSDCarrierUseFreq);
  111. Singleton<EquipmentManager>.Instance.SDWaferTypeUseCountAlarm.Set(msg);
  112. return Result.FAIL;
  113. }
  114. else if (maintenanceItemSDCarrierUseFreq.MaintenanceProcessing == MaintenanceProcessingCommandEnum.JobAutoStart.ToString())
  115. {
  116. var msg = pm.GetAlarmWarningMsg(maintenanceItemSDCarrierUseFreq, true);
  117. if (string.IsNullOrEmpty(maintenanceItemSDCarrierUseFreq.AssociationProcessRecipeName))
  118. {
  119. Singleton<EquipmentManager>.Instance.SDWaferTypeUseCountAlarm.Set(msg);
  120. return Result.FAIL;
  121. }
  122. Singleton<EquipmentManager>.Instance.SDWaferTypeUseCountAlarm.Set(msg);
  123. pm.TriggerJobAutoStart(maintenanceItemSDCarrierUseFreq.AssociationProcessRecipeName);
  124. LOG.Info($"{msg} Trigger {maintenanceItemSDCarrierUseFreq.AssociationProcessRecipeName}");
  125. return Result.FAIL;
  126. }
  127. }
  128. if (wafer.WaferType == WaferType.SD && maintenanceItemSDWaferUserTime.StartValue > 0 && wafer.UseTime >= maintenanceItemSDWaferUserTime.LimitValue)
  129. {
  130. var currentValue = DateTimeUtil.SecondToHHmmss(maintenanceItemSDWaferUserTime.CurrentValue.ToString());
  131. var minValue = DateTimeUtil.SecondToHHmmss(maintenanceItemSDWaferUserTime.StartValue.ToString());
  132. var maxValue = DateTimeUtil.SecondToHHmmss(maintenanceItemSDWaferUserTime.LimitValue.ToString());
  133. var msg = pm.GetAlarmWarningMsg(maintenanceItemSDWaferUserTime, true, currentValue, minValue, maxValue);
  134. if (maintenanceItemSDWaferUserTime.MaintenanceProcessing == MaintenanceProcessingCommandEnum.AlarmReport.ToString())
  135. {
  136. Singleton<EquipmentManager>.Instance.SDWaferTypeUseTimeAlarm.Set(msg);
  137. return Result.FAIL;
  138. }
  139. else if (maintenanceItemSDWaferUserTime.MaintenanceProcessing == MaintenanceProcessingCommandEnum.JobAutoStart.ToString())
  140. {
  141. if (string.IsNullOrEmpty(maintenanceItemSDWaferUserTime.AssociationProcessRecipeName))
  142. {
  143. Singleton<EquipmentManager>.Instance.SDWaferTypeUseTimeAlarm.Set(msg);
  144. return Result.FAIL;
  145. }
  146. Singleton<EquipmentManager>.Instance.SDWaferTypeUseTimeAlarm.Set(msg);
  147. pm.TriggerJobAutoStart(maintenanceItemSDWaferUserTime.AssociationProcessRecipeName);
  148. LOG.Info($"{msg} Trigger {maintenanceItemSDWaferUserTime.AssociationProcessRecipeName}");
  149. return Result.FAIL;
  150. }
  151. }
  152. if (wafer.WaferType == WaferType.SD && maintenanceItemSDWaferThickness.StartValue > 0 && wafer.UseThick >= maintenanceItemSDWaferThickness.LimitValue)
  153. {
  154. if (maintenanceItemSDWaferThickness.MaintenanceProcessing == MaintenanceProcessingCommandEnum.AlarmReport.ToString())
  155. {
  156. var msg = pm.GetAlarmWarningMsg(maintenanceItemSDWaferThickness);
  157. Singleton<EquipmentManager>.Instance.SDWaferTypeThicknessAlarm.Set(msg);
  158. return Result.FAIL;
  159. }
  160. else if (maintenanceItemSDWaferThickness.MaintenanceProcessing == MaintenanceProcessingCommandEnum.JobAutoStart.ToString())
  161. {
  162. var msg = pm.GetAlarmWarningMsg(maintenanceItemSDWaferThickness, true);
  163. if (string.IsNullOrEmpty(maintenanceItemSDWaferThickness.AssociationProcessRecipeName))
  164. {
  165. Singleton<EquipmentManager>.Instance.SDWaferTypeThicknessAlarm.Set(msg);
  166. return Result.FAIL;
  167. }
  168. Singleton<EquipmentManager>.Instance.SDWaferTypeThicknessAlarm.Set(msg);
  169. pm.TriggerJobAutoStart(maintenanceItemSDWaferThickness.AssociationProcessRecipeName);
  170. LOG.Info($"{msg} Trigger {maintenanceItemSDWaferThickness.AssociationProcessRecipeName}");
  171. return Result.FAIL;
  172. }
  173. }
  174. #endregion
  175. #region ED
  176. var maintenanceItemEDCarrierUseFreq = ScheduleMaintenanceDataManager.Instance.GetItem(MaintenanceItemEnum.FDCarrierUseFreq.ToString());
  177. var maintenanceItemEDWaferThickness = ScheduleMaintenanceDataManager.Instance.GetItem(MaintenanceItemEnum.FDWaferThickness.ToString());
  178. var maintenanceItemEDWaferUserTime = ScheduleMaintenanceDataManager.Instance.GetItem(MaintenanceItemEnum.FDWaferUserTime.ToString());
  179. if (wafer.WaferType == WaferType.ED && maintenanceItemEDCarrierUseFreq.StartValue > 0 && wafer.UseCount > maintenanceItemEDCarrierUseFreq.StartValue && wafer.UseCount < maintenanceItemEDCarrierUseFreq.LimitValue)
  180. {
  181. if (maintenanceItemEDCarrierUseFreq.MaintenanceProcessing == MaintenanceProcessingCommandEnum.AlarmReport.ToString()||
  182. maintenanceItemEDCarrierUseFreq.MaintenanceProcessing == MaintenanceProcessingCommandEnum.JobAutoStart.ToString()
  183. )
  184. {
  185. var msg = pm.GetAlarmWarningMsg(maintenanceItemEDCarrierUseFreq);
  186. Singleton<EquipmentManager>.Instance.FDWaferTypeUseCountWarning.Set(msg);
  187. }
  188. }
  189. if (wafer.WaferType == WaferType.ED && maintenanceItemEDWaferUserTime.StartValue > 0 && wafer.UseTime > maintenanceItemEDWaferUserTime.StartValue && wafer.UseTime < maintenanceItemEDWaferUserTime.LimitValue)
  190. {
  191. if (maintenanceItemEDWaferUserTime.MaintenanceProcessing == MaintenanceProcessingCommandEnum.AlarmReport.ToString()||
  192. maintenanceItemEDWaferUserTime.MaintenanceProcessing == MaintenanceProcessingCommandEnum.JobAutoStart.ToString()
  193. )
  194. {
  195. var currentValue = DateTimeUtil.SecondToHHmmss(maintenanceItemEDWaferUserTime.CurrentValue.ToString());
  196. var minValue = DateTimeUtil.SecondToHHmmss(maintenanceItemEDWaferUserTime.StartValue.ToString());
  197. var maxValue = DateTimeUtil.SecondToHHmmss(maintenanceItemEDWaferUserTime.LimitValue.ToString());
  198. var msg = pm.GetAlarmWarningMsg(maintenanceItemEDWaferUserTime, true, currentValue, minValue, maxValue);
  199. Singleton<EquipmentManager>.Instance.FDWaferTypeUseTimeWarning.Set(msg);
  200. }
  201. }
  202. if (wafer.WaferType == WaferType.ED && maintenanceItemEDWaferThickness.StartValue > 0 && wafer.UseThick > maintenanceItemEDWaferThickness.StartValue && wafer.UseThick < maintenanceItemEDWaferThickness.LimitValue)
  203. {
  204. if (maintenanceItemEDWaferThickness.MaintenanceProcessing == MaintenanceProcessingCommandEnum.AlarmReport.ToString()||
  205. maintenanceItemEDWaferThickness.MaintenanceProcessing == MaintenanceProcessingCommandEnum.AlarmReport.ToString())
  206. {
  207. var msg = pm.GetAlarmWarningMsg(maintenanceItemEDWaferThickness);
  208. Singleton<EquipmentManager>.Instance.FDWaferTypeThicknessWarning.Set(msg);
  209. }
  210. }
  211. if (wafer.WaferType == WaferType.ED && maintenanceItemEDCarrierUseFreq.StartValue > 0 && wafer.UseCount >= maintenanceItemEDCarrierUseFreq.LimitValue)
  212. {
  213. if (maintenanceItemEDCarrierUseFreq.MaintenanceProcessing == MaintenanceProcessingCommandEnum.AlarmReport.ToString())
  214. {
  215. var msg = pm.GetAlarmWarningMsg(maintenanceItemEDCarrierUseFreq);
  216. Singleton<EquipmentManager>.Instance.FDWaferTypeUseCountAlarm.Set(msg);
  217. return Result.FAIL;
  218. }
  219. else if (maintenanceItemEDCarrierUseFreq.MaintenanceProcessing == MaintenanceProcessingCommandEnum.JobAutoStart.ToString())
  220. {
  221. var msg = pm.GetAlarmWarningMsg(maintenanceItemEDCarrierUseFreq);
  222. if (string.IsNullOrEmpty(maintenanceItemEDCarrierUseFreq.AssociationProcessRecipeName))
  223. {
  224. Singleton<EquipmentManager>.Instance.FDWaferTypeUseCountAlarm.Set(msg);
  225. return Result.FAIL;
  226. }
  227. Singleton<EquipmentManager>.Instance.FDWaferTypeUseCountAlarm.Set(msg);
  228. pm.TriggerJobAutoStart(maintenanceItemEDCarrierUseFreq.AssociationProcessRecipeName);
  229. LOG.Info($"{msg} Trigger {maintenanceItemEDCarrierUseFreq.AssociationProcessRecipeName}");
  230. return Result.FAIL;
  231. }
  232. }
  233. if (wafer.WaferType == WaferType.ED && maintenanceItemEDWaferUserTime.StartValue > 0 && wafer.UseTime >= maintenanceItemEDWaferUserTime.LimitValue)
  234. {
  235. var currentValue = DateTimeUtil.SecondToHHmmss(maintenanceItemEDWaferUserTime.CurrentValue.ToString());
  236. var minValue = DateTimeUtil.SecondToHHmmss(maintenanceItemEDWaferUserTime.StartValue.ToString());
  237. var maxValue = DateTimeUtil.SecondToHHmmss(maintenanceItemEDWaferUserTime.LimitValue.ToString());
  238. var msg = pm.GetAlarmWarningMsg(maintenanceItemEDWaferUserTime, true, currentValue, minValue, maxValue);
  239. if (maintenanceItemEDWaferUserTime.MaintenanceProcessing == MaintenanceProcessingCommandEnum.AlarmReport.ToString())
  240. {
  241. Singleton<EquipmentManager>.Instance.FDWaferTypeUseTimeAlarm.Set(msg);
  242. return Result.FAIL;
  243. }
  244. else if (maintenanceItemEDWaferUserTime.MaintenanceProcessing == MaintenanceProcessingCommandEnum.JobAutoStart.ToString())
  245. {
  246. if (string.IsNullOrEmpty(maintenanceItemEDWaferUserTime.AssociationProcessRecipeName))
  247. {
  248. Singleton<EquipmentManager>.Instance.FDWaferTypeUseTimeAlarm.Set(msg);
  249. return Result.FAIL;
  250. }
  251. Singleton<EquipmentManager>.Instance.FDWaferTypeUseTimeAlarm.Set(msg);
  252. pm.TriggerJobAutoStart(maintenanceItemEDWaferUserTime.AssociationProcessRecipeName);
  253. LOG.Info($"{msg} Trigger {maintenanceItemEDWaferUserTime.AssociationProcessRecipeName}");
  254. return Result.FAIL;
  255. }
  256. }
  257. if (wafer.WaferType == WaferType.ED && maintenanceItemEDWaferThickness.StartValue > 0 && wafer.UseThick >= maintenanceItemEDWaferThickness.LimitValue)
  258. {
  259. if (maintenanceItemEDWaferThickness.MaintenanceProcessing == MaintenanceProcessingCommandEnum.AlarmReport.ToString())
  260. {
  261. var msg = pm.GetAlarmWarningMsg(maintenanceItemEDWaferThickness);
  262. Singleton<EquipmentManager>.Instance.FDWaferTypeThicknessAlarm.Set(msg);
  263. return Result.FAIL;
  264. }
  265. else if (maintenanceItemEDWaferThickness.MaintenanceProcessing == MaintenanceProcessingCommandEnum.JobAutoStart.ToString())
  266. {
  267. var msg = pm.GetAlarmWarningMsg(maintenanceItemEDWaferThickness, true);
  268. if (string.IsNullOrEmpty(maintenanceItemEDWaferThickness.AssociationProcessRecipeName))
  269. {
  270. Singleton<EquipmentManager>.Instance.FDWaferTypeThicknessAlarm.Set(msg);
  271. return Result.FAIL;
  272. }
  273. Singleton<EquipmentManager>.Instance.FDWaferTypeThicknessAlarm.Set(msg);
  274. pm.TriggerJobAutoStart(maintenanceItemEDWaferThickness.AssociationProcessRecipeName);
  275. LOG.Info($"{msg} Trigger {maintenanceItemEDWaferThickness.AssociationProcessRecipeName}");
  276. return Result.FAIL;
  277. }
  278. }
  279. #endregion
  280. }
  281. #endregion
  282. }
  283. }
  284. pm.CheckRecipeThicknessMoreThan(_recipeName, out var isPause);
  285. if (isPause)
  286. return Result.FAIL;
  287. pm.CheckRecipeExecuteFreqMoreThan(_recipeName, out var isPause1);
  288. if (isPause1)
  289. return Result.FAIL;
  290. foreach (var item in recipeSteps)
  291. {
  292. pm.CheckRecipeStepFreqMoreThan(item.StepName, out var isPause2);
  293. if (isPause2)
  294. return Result.FAIL;
  295. pm.CheckRecipeStepTimeMoreThan(item.StepName, out var isPause3);
  296. if (isPause3)
  297. return Result.FAIL;
  298. pm.CheckRecipeStepGroupThicknessMoreThan(item.StepName, out var isPause4);
  299. if (isPause4)
  300. return Result.FAIL;
  301. }
  302. }
  303. #endregion
  304. PMModule.RecipeRunningInfo.MainRecipeName = _recipeName;
  305. PMModule.RecipeRunningInfo.Head = recipeHead;
  306. PMModule.RecipeRunningInfo.RecipeStepList = recipeSteps;
  307. }
  308. Reset();
  309. Notify($"Start");
  310. return Result.RUN;
  311. }
  312. public override Result Monitor()
  313. {
  314. try
  315. {
  316. //ToReadyProcessState((int)Routine.ToReadyProcessState, PMModule, _liftTimeout);
  317. //ExecuteRoutine((int)Routine.Pump, _pumpRoutine);
  318. //MovePinDown((int)Routine.PinDown, PMModule, _liftTimeout);
  319. }
  320. catch (RoutineBreakException)
  321. {
  322. return Result.RUN;
  323. }
  324. catch (RoutineFaildException)
  325. {
  326. return Result.FAIL;
  327. }
  328. return Result.DONE;
  329. }
  330. public override void Abort()
  331. {
  332. }
  333. }
  334. }