| 123456789101112131415161718192021222324252627282930313233343536373839404142434445464748495051525354555657585960616263646566676869707172737475767778798081828384858687888990919293949596979899100101102103104105106107108109110111112113114115116117118119120121122123124125126127128129130131132133134135136137138139140141142143144145146147148149150151152153154155156157158159160161162163164165166167168169170171172173174175176177178179180181182183184185186187188189190191192193194195196197198199200201202203204205206207208209210211212213214215216217218219220221222223224225226227228229230231232233234235236237238239240241242243244245246247248249250251252253254255256257258259260261262263264265266267268269270271272273274275276277278279280281282283284285286287288289290291292293294295296297298299300301302303304305306307308309310311312313314315316317318319320321322323324325326327328329330331332333334335336337338339340341342343344345346347348349350351352353354355356357358359360361362363364365366367368369370371372373374375376377378379380381382383384385386387388389390391392393394395396397398399400401402403404405406407408409410411412413414415416417418419420421422423424425426427428429430431432433434435436437438439440441442443444445446447448449450 | using Aitex.Core.RT.Routine;using MECF.Framework.Common.Equipment;using System;using Aitex.Core.RT.SCCore;using FurnaceRT.Equipments.PMs.Routines;using System.Collections.Generic;using FurnaceRT.Equipments.Systems;using Aitex.Core.Util;using MECF.Framework.Common.SubstrateTrackings;using System.Linq;using Aitex.Core.Common;using MECF.Framework.Common.CommonData.EnumData;using MECF.Framework.Common.DataCenter;using MECF.Framework.Common.Utilities;using Aitex.Core.RT.Log;namespace FurnaceRT.Equipments.PMs.RecipeExecutions{    public class PreProcess : PMBaseRoutine, IRoutine    {        public enum Routine        {            ToReadyProcessState,            Pump,            PinDown,        }        private string _recipeName;        private int _liftTimeout;        private bool _isProcessRecipe;        public PreProcess(ModuleName module, PMModule pm) : base(module, pm)        {            Module = module.ToString();            Name = "PreProcess";        }        public void Init(string recipeName, bool isProcessRecipe = true)        {            _recipeName = recipeName;            _isProcessRecipe = isProcessRecipe;        }        public override Result Start(params object[] objs)        {            RecipeHead recipeHead;            List<RecipeStep> recipeSteps;            Dictionary<int, List<RecipeStep>> abortRecipe;            Dictionary<int, string> abortRecipeName;            Dictionary<int, List<RecipeStep>> subRecipe;            Dictionary<int, string> subRecipeName;            string reason = string.Empty;            if (_isProcessRecipe)            {                if (!RecipeParser.Parse(_recipeName, Module, out recipeHead, out recipeSteps, out reason, "Process"))                {                    PMModule.PreprocessStartFailedWarning.Set($"Load process recipe {_recipeName} failed, {reason}");                    return Result.FAIL;                }                #region MyRegion                var isScheduleMaintenance = SC.ContainsItem("System.EnableScheduleMaintenance") && SC.GetValue<bool>("System.EnableScheduleMaintenance");                if (isScheduleMaintenance)                {                    var pm = (Singleton<EquipmentManager>.Instance.Modules[ModuleName.PM1] as PMModule);                    pm.GetAllDBRecord();                    var wafers = WaferManager.Instance.GetWafers(ModuleName.PM1);                    if (wafers != null && wafers.Count() > 0)                    {                        foreach (var wafer in wafers)                        {                            if (wafer == null || wafer.IsEmpty || (wafer.WaferType != WaferType.SD && wafer.WaferType != WaferType.ED))                                continue;                            #region New                            if (isScheduleMaintenance)                            {                                #region  SD Dummy 时间/次数/膜厚限制                                if (wafer.WaferType == WaferType.SD)                                {                                    var maintenanceItemCarrierUseFreq = ScheduleMaintenanceDataManager.Instance.GetItem(MaintenanceItemEnum.SDCarrierUseFreq.ToString());                                    var maintenanceItemWaferThickness = ScheduleMaintenanceDataManager.Instance.GetItem(MaintenanceItemEnum.SDWaferThickness.ToString());                                    var maintenanceItemWaferUserTime = ScheduleMaintenanceDataManager.Instance.GetItem(MaintenanceItemEnum.SDWaferUserTime.ToString());                                    if (maintenanceItemCarrierUseFreq.StartValue > 0 && wafer.UseCount > maintenanceItemCarrierUseFreq.StartValue && wafer.UseCount < maintenanceItemCarrierUseFreq.LimitValue)                                    {                                        if (maintenanceItemCarrierUseFreq.MaintenanceProcessing == MaintenanceProcessingCommandEnum.AlarmReport.ToString() ||                                            maintenanceItemCarrierUseFreq.MaintenanceProcessing == MaintenanceProcessingCommandEnum.JobAutoStart.ToString())                                        {                                            var msg = pm.GetAlarmWarningMsg(maintenanceItemCarrierUseFreq, false, wafer.UseCount.ToString(), maintenanceItemCarrierUseFreq.StartValue.ToString(), maintenanceItemCarrierUseFreq.LimitValue.ToString());                                            Singleton<EquipmentManager>.Instance.SDWaferTypeUseCountWarning.Set(msg);                                        }                                    }                                    if (maintenanceItemWaferUserTime.StartValue > 0 && wafer.UseTime > maintenanceItemWaferUserTime.StartValue && wafer.UseTime < maintenanceItemWaferUserTime.LimitValue)                                    {                                        if (maintenanceItemWaferUserTime.MaintenanceProcessing == MaintenanceProcessingCommandEnum.AlarmReport.ToString() ||                                            maintenanceItemWaferUserTime.MaintenanceProcessing == MaintenanceProcessingCommandEnum.JobAutoStart.ToString())                                        {                                            var currentValue = DateTimeUtil.SecondToHHmmss(maintenanceItemWaferUserTime.CurrentValue.ToString());                                            var minValue = DateTimeUtil.SecondToHHmmss(maintenanceItemWaferUserTime.StartValue.ToString());                                            var maxValue = DateTimeUtil.SecondToHHmmss(maintenanceItemWaferUserTime.LimitValue.ToString());                                            var msg = pm.GetAlarmWarningMsg(maintenanceItemWaferUserTime, true, currentValue, minValue, maxValue);                                            Singleton<EquipmentManager>.Instance.SDWaferTypeUseTimeWarning.Set(msg);                                        }                                    }                                    if (maintenanceItemWaferThickness.StartValue > 0 && wafer.UseThick > maintenanceItemWaferThickness.StartValue && wafer.UseThick < maintenanceItemWaferThickness.LimitValue)                                    {                                        if (maintenanceItemWaferThickness.MaintenanceProcessing == MaintenanceProcessingCommandEnum.AlarmReport.ToString() ||                                            maintenanceItemWaferThickness.MaintenanceProcessing == MaintenanceProcessingCommandEnum.JobAutoStart.ToString())                                        {                                            var msg = pm.GetAlarmWarningMsg(maintenanceItemWaferThickness, false, wafer.UseThick.ToString(), maintenanceItemWaferThickness.StartValue.ToString(), maintenanceItemWaferThickness.LimitValue.ToString());                                            Singleton<EquipmentManager>.Instance.SDWaferTypeThicknessWarning.Set(msg);                                        }                                    }                                    if (maintenanceItemCarrierUseFreq.StartValue > 0 && wafer.UseCount >= maintenanceItemCarrierUseFreq.LimitValue)                                    {                                        if (maintenanceItemCarrierUseFreq.MaintenanceProcessing == MaintenanceProcessingCommandEnum.AlarmReport.ToString())                                        {                                            var msg = pm.GetAlarmWarningMsg(maintenanceItemCarrierUseFreq, false, wafer.UseCount.ToString(), maintenanceItemCarrierUseFreq.StartValue.ToString(), maintenanceItemCarrierUseFreq.LimitValue.ToString());                                            Singleton<EquipmentManager>.Instance.SDWaferTypeUseCountAlarm.Set(msg);                                            return Result.FAIL;                                        }                                        else if (maintenanceItemCarrierUseFreq.MaintenanceProcessing == MaintenanceProcessingCommandEnum.JobAutoStart.ToString())                                        {                                            var msg = pm.GetAlarmWarningMsg(maintenanceItemCarrierUseFreq, true);                                            if (string.IsNullOrEmpty(maintenanceItemCarrierUseFreq.AssociationProcessRecipeName))                                            {                                                Singleton<EquipmentManager>.Instance.SDWaferTypeUseCountAlarm.Set(msg);                                                return Result.FAIL;                                            }                                            Singleton<EquipmentManager>.Instance.SDWaferTypeUseCountAlarm.Set(msg);                                            pm.TriggerJobAutoStart(maintenanceItemCarrierUseFreq.AssociationProcessRecipeName, RecipeExecEntryEnum.SDWaferRangeTrigger);                                            LOG.Info($"{msg} Trigger {maintenanceItemCarrierUseFreq.AssociationProcessRecipeName},auto clear CurrentValue {maintenanceItemCarrierUseFreq.LimitValue} to 0");                                           // Singleton<ScheduleMaintenanceDataManager>.Instance.SetValue(maintenanceItemCarrierUseFreq.Item, 0, true);                                            return Result.FAIL;                                        }                                    }                                    if (maintenanceItemWaferUserTime.StartValue > 0 && wafer.UseTime >= maintenanceItemWaferUserTime.LimitValue)                                    {                                        var currentValue = DateTimeUtil.SecondToHHmmss(maintenanceItemWaferUserTime.CurrentValue.ToString());                                        var minValue = DateTimeUtil.SecondToHHmmss(maintenanceItemWaferUserTime.StartValue.ToString());                                        var maxValue = DateTimeUtil.SecondToHHmmss(maintenanceItemWaferUserTime.LimitValue.ToString());                                        var msg = pm.GetAlarmWarningMsg(maintenanceItemWaferUserTime, true, currentValue, minValue, maxValue);                                        if (maintenanceItemWaferUserTime.MaintenanceProcessing == MaintenanceProcessingCommandEnum.AlarmReport.ToString())                                        {                                            Singleton<EquipmentManager>.Instance.SDWaferTypeUseTimeAlarm.Set(msg);                                            return Result.FAIL;                                        }                                        else if (maintenanceItemWaferUserTime.MaintenanceProcessing == MaintenanceProcessingCommandEnum.JobAutoStart.ToString())                                        {                                            if (string.IsNullOrEmpty(maintenanceItemWaferUserTime.AssociationProcessRecipeName))                                            {                                                Singleton<EquipmentManager>.Instance.SDWaferTypeUseTimeAlarm.Set(msg);                                                return Result.FAIL;                                            }                                            Singleton<EquipmentManager>.Instance.SDWaferTypeUseTimeAlarm.Set(msg);                                            pm.TriggerJobAutoStart(maintenanceItemWaferUserTime.AssociationProcessRecipeName, RecipeExecEntryEnum.SDWaferRangeTrigger);                                            LOG.Info($"{msg} Trigger {maintenanceItemWaferUserTime.AssociationProcessRecipeName},auto clear CurrentValue {maintenanceItemWaferUserTime.LimitValue} to 0");                                           // Singleton<ScheduleMaintenanceDataManager>.Instance.SetValue(maintenanceItemWaferUserTime.Item, 0, true);                                            return Result.FAIL;                                        }                                    }                                    if (maintenanceItemWaferThickness.StartValue > 0 && wafer.UseThick >= maintenanceItemWaferThickness.LimitValue)                                    {                                        if (maintenanceItemWaferThickness.MaintenanceProcessing == MaintenanceProcessingCommandEnum.AlarmReport.ToString())                                        {                                            var msg = pm.GetAlarmWarningMsg(maintenanceItemWaferThickness, false, wafer.UseThick.ToString(), maintenanceItemWaferThickness.StartValue.ToString(), maintenanceItemWaferThickness.LimitValue.ToString());                                            Singleton<EquipmentManager>.Instance.SDWaferTypeThicknessAlarm.Set(msg);                                            return Result.FAIL;                                        }                                        else if (maintenanceItemWaferThickness.MaintenanceProcessing == MaintenanceProcessingCommandEnum.JobAutoStart.ToString())                                        {                                            var msg = pm.GetAlarmWarningMsg(maintenanceItemWaferThickness, true);                                            if (string.IsNullOrEmpty(maintenanceItemWaferThickness.AssociationProcessRecipeName))                                            {                                                Singleton<EquipmentManager>.Instance.SDWaferTypeThicknessAlarm.Set(msg);                                                return Result.FAIL;                                            }                                            Singleton<EquipmentManager>.Instance.SDWaferTypeThicknessAlarm.Set(msg);                                            pm.TriggerJobAutoStart(maintenanceItemWaferThickness.AssociationProcessRecipeName, RecipeExecEntryEnum.SDWaferRangeTrigger);                                            LOG.Info($"{msg} Trigger {maintenanceItemWaferThickness.AssociationProcessRecipeName},auto clear CurrentValue {maintenanceItemWaferThickness.LimitValue} to 0");                                         //   Singleton<ScheduleMaintenanceDataManager>.Instance.SetValue(maintenanceItemWaferThickness.Item, 0, true);                                            return Result.FAIL;                                        }                                    }                                }                                #endregion                                #region ED                                if (wafer.WaferType == WaferType.ED)                                {                                    var maintenanceItemCarrierUseFreq = ScheduleMaintenanceDataManager.Instance.GetItem(MaintenanceItemEnum.FDCarrierUseFreq.ToString());                                    var maintenanceItemWaferThickness = ScheduleMaintenanceDataManager.Instance.GetItem(MaintenanceItemEnum.FDWaferThickness.ToString());                                    var maintenanceItemWaferUserTime = ScheduleMaintenanceDataManager.Instance.GetItem(MaintenanceItemEnum.FDWaferUserTime.ToString());                                    if (maintenanceItemCarrierUseFreq.StartValue > 0 && wafer.UseCount > maintenanceItemCarrierUseFreq.StartValue && wafer.UseCount < maintenanceItemCarrierUseFreq.LimitValue)                                    {                                        if (maintenanceItemCarrierUseFreq.MaintenanceProcessing == MaintenanceProcessingCommandEnum.AlarmReport.ToString() ||                                           maintenanceItemCarrierUseFreq.MaintenanceProcessing == MaintenanceProcessingCommandEnum.JobAutoStart.ToString())                                        {                                            var msg = pm.GetAlarmWarningMsg(maintenanceItemCarrierUseFreq, false, wafer.UseCount.ToString(), maintenanceItemCarrierUseFreq.StartValue.ToString(), maintenanceItemCarrierUseFreq.LimitValue.ToString());                                            Singleton<EquipmentManager>.Instance.FDWaferTypeUseCountWarning.Set(msg);                                        }                                    }                                    if (maintenanceItemWaferUserTime.StartValue > 0 && wafer.UseTime > maintenanceItemWaferUserTime.StartValue && wafer.UseTime < maintenanceItemWaferUserTime.LimitValue)                                    {                                        if (maintenanceItemWaferUserTime.MaintenanceProcessing == MaintenanceProcessingCommandEnum.AlarmReport.ToString() ||                                            maintenanceItemWaferUserTime.MaintenanceProcessing == MaintenanceProcessingCommandEnum.JobAutoStart.ToString())                                        {                                            var currentValue = DateTimeUtil.SecondToHHmmss(maintenanceItemWaferUserTime.CurrentValue.ToString());                                            var minValue = DateTimeUtil.SecondToHHmmss(maintenanceItemWaferUserTime.StartValue.ToString());                                            var maxValue = DateTimeUtil.SecondToHHmmss(maintenanceItemWaferUserTime.LimitValue.ToString());                                            var msg = pm.GetAlarmWarningMsg(maintenanceItemWaferUserTime, true, currentValue, minValue, maxValue);                                            Singleton<EquipmentManager>.Instance.FDWaferTypeUseTimeWarning.Set(msg);                                        }                                    }                                    if (maintenanceItemWaferThickness.StartValue > 0 && wafer.UseThick > maintenanceItemWaferThickness.StartValue && wafer.UseThick < maintenanceItemWaferThickness.LimitValue)                                    {                                        if (maintenanceItemWaferThickness.MaintenanceProcessing == MaintenanceProcessingCommandEnum.AlarmReport.ToString() ||                                            maintenanceItemWaferThickness.MaintenanceProcessing == MaintenanceProcessingCommandEnum.JobAutoStart.ToString())                                        {                                            var msg = pm.GetAlarmWarningMsg(maintenanceItemWaferThickness, false, wafer.UseThick.ToString(), maintenanceItemWaferThickness.StartValue.ToString(), maintenanceItemWaferThickness.LimitValue.ToString());                                            Singleton<EquipmentManager>.Instance.FDWaferTypeThicknessWarning.Set(msg);                                        }                                    }                                    if (maintenanceItemCarrierUseFreq.StartValue > 0 && wafer.UseCount >= maintenanceItemCarrierUseFreq.LimitValue)                                    {                                        if (maintenanceItemCarrierUseFreq.MaintenanceProcessing == MaintenanceProcessingCommandEnum.AlarmReport.ToString())                                        {                                            var msg = pm.GetAlarmWarningMsg(maintenanceItemCarrierUseFreq, false, wafer.UseCount.ToString(), maintenanceItemCarrierUseFreq.StartValue.ToString(), maintenanceItemCarrierUseFreq.LimitValue.ToString());                                            Singleton<EquipmentManager>.Instance.FDWaferTypeUseCountAlarm.Set(msg);                                            return Result.FAIL;                                        }                                        else if (maintenanceItemCarrierUseFreq.MaintenanceProcessing == MaintenanceProcessingCommandEnum.JobAutoStart.ToString())                                        {                                            var msg = pm.GetAlarmWarningMsg(maintenanceItemCarrierUseFreq);                                            if (string.IsNullOrEmpty(maintenanceItemCarrierUseFreq.AssociationProcessRecipeName))                                            {                                                Singleton<EquipmentManager>.Instance.FDWaferTypeUseCountAlarm.Set(msg);                                                return Result.FAIL;                                            }                                            Singleton<EquipmentManager>.Instance.FDWaferTypeUseCountAlarm.Set(msg);                                            pm.TriggerJobAutoStart(maintenanceItemCarrierUseFreq.AssociationProcessRecipeName, RecipeExecEntryEnum.EDWaferRangeTrigger);                                            LOG.Info($"{msg} Trigger {maintenanceItemCarrierUseFreq.AssociationProcessRecipeName},auto clear CurrentValue {maintenanceItemCarrierUseFreq.LimitValue} to 0");                                           // Singleton<ScheduleMaintenanceDataManager>.Instance.SetValue(maintenanceItemCarrierUseFreq.Item, 0, true);                                            return Result.FAIL;                                        }                                    }                                    if (maintenanceItemWaferUserTime.StartValue > 0 && wafer.UseTime >= maintenanceItemWaferUserTime.LimitValue)                                    {                                        var currentValue = DateTimeUtil.SecondToHHmmss(maintenanceItemWaferUserTime.CurrentValue.ToString());                                        var minValue = DateTimeUtil.SecondToHHmmss(maintenanceItemWaferUserTime.StartValue.ToString());                                        var maxValue = DateTimeUtil.SecondToHHmmss(maintenanceItemWaferUserTime.LimitValue.ToString());                                        var msg = pm.GetAlarmWarningMsg(maintenanceItemWaferUserTime, true, currentValue, minValue, maxValue);                                        if (maintenanceItemWaferUserTime.MaintenanceProcessing == MaintenanceProcessingCommandEnum.AlarmReport.ToString())                                        {                                            Singleton<EquipmentManager>.Instance.FDWaferTypeUseTimeAlarm.Set(msg);                                            return Result.FAIL;                                        }                                        else if (maintenanceItemWaferUserTime.MaintenanceProcessing == MaintenanceProcessingCommandEnum.JobAutoStart.ToString())                                        {                                            if (string.IsNullOrEmpty(maintenanceItemWaferUserTime.AssociationProcessRecipeName))                                            {                                                Singleton<EquipmentManager>.Instance.FDWaferTypeUseTimeAlarm.Set(msg);                                                return Result.FAIL;                                            }                                            Singleton<EquipmentManager>.Instance.FDWaferTypeUseTimeAlarm.Set(msg);                                            pm.TriggerJobAutoStart(maintenanceItemWaferUserTime.AssociationProcessRecipeName, RecipeExecEntryEnum.EDWaferRangeTrigger);                                            LOG.Info($"{msg} Trigger {maintenanceItemWaferUserTime.AssociationProcessRecipeName},auto clear CurrentValue {maintenanceItemWaferUserTime.LimitValue} to 0");                                          //  Singleton<ScheduleMaintenanceDataManager>.Instance.SetValue(maintenanceItemWaferUserTime.Item, 0, true);                                            return Result.FAIL;                                        }                                    }                                    if (maintenanceItemWaferThickness.StartValue > 0 && wafer.UseThick >= maintenanceItemWaferThickness.LimitValue)                                    {                                        if (maintenanceItemWaferThickness.MaintenanceProcessing == MaintenanceProcessingCommandEnum.AlarmReport.ToString())                                        {                                            var msg = pm.GetAlarmWarningMsg(maintenanceItemWaferThickness, false, wafer.UseThick.ToString(), maintenanceItemWaferThickness.StartValue.ToString(), maintenanceItemWaferThickness.LimitValue.ToString());                                            Singleton<EquipmentManager>.Instance.FDWaferTypeThicknessAlarm.Set(msg);                                            return Result.FAIL;                                        }                                        else if (maintenanceItemWaferThickness.MaintenanceProcessing == MaintenanceProcessingCommandEnum.JobAutoStart.ToString())                                        {                                            var msg = pm.GetAlarmWarningMsg(maintenanceItemWaferThickness, true);                                            if (string.IsNullOrEmpty(maintenanceItemWaferThickness.AssociationProcessRecipeName))                                            {                                                Singleton<EquipmentManager>.Instance.FDWaferTypeThicknessAlarm.Set(msg);                                                return Result.FAIL;                                            }                                            Singleton<EquipmentManager>.Instance.FDWaferTypeThicknessAlarm.Set(msg);                                            pm.TriggerJobAutoStart(maintenanceItemWaferThickness.AssociationProcessRecipeName, RecipeExecEntryEnum.EDWaferRangeTrigger);                                            LOG.Info($"{msg} Trigger {maintenanceItemWaferThickness.AssociationProcessRecipeName},auto clear CurrentValue {maintenanceItemWaferThickness.LimitValue} to 0");                                            //Singleton<ScheduleMaintenanceDataManager>.Instance.SetValue(maintenanceItemWaferThickness.Item, 0, true);                                            return Result.FAIL;                                        }                                    }                                }                                #endregion                            }                            #endregion                        }                    }                    pm.CheckBoatRecipeThicknessMoreThan(out var boatRecipeThicknessIsPause);                    if (boatRecipeThicknessIsPause)                        return Result.FAIL;                    pm.CheckRecipeThicknessMoreThan(_recipeName, out var isPause);                    if (isPause)                        return Result.FAIL;                    pm.CheckRecipeExecuteFreqMoreThan(_recipeName, out var isPause1);                    if (isPause1)                        return Result.FAIL;                    foreach (var item in recipeSteps)                    {                        pm.CheckRecipeStepFreqMoreThan(item.StepName, out var isPause2);                        if (isPause2)                            return Result.FAIL;                        pm.CheckRecipeStepTimeMoreThan(item.StepName, out var isPause3);                        if (isPause3)                            return Result.FAIL;                        pm.CheckRecipeStepGroupThicknessMoreThan(item.StepName, out var isPause4);                        if (isPause4)                            return Result.FAIL;                    }                }                #endregion                PMModule.RecipeRunningInfo.MainRecipeName = _recipeName;                PMModule.RecipeRunningInfo.Head = recipeHead;                PMModule.RecipeRunningInfo.RecipeStepList = recipeSteps;                PMModule.RecipeRunningInfo.ExecRecipeType = recipeSteps.Count > 0 ? recipeSteps[0].RecipeType : string.Empty;            }            Reset();            Notify($"Start");            return Result.RUN;        }        public override Result Monitor()        {            try            {                //ToReadyProcessState((int)Routine.ToReadyProcessState, PMModule, _liftTimeout);                //ExecuteRoutine((int)Routine.Pump, _pumpRoutine);                //MovePinDown((int)Routine.PinDown, PMModule, _liftTimeout);            }            catch (RoutineBreakException)            {                return Result.RUN;            }            catch (RoutineFaildException)            {                return Result.FAIL;            }            return Result.DONE;        }        public override void Abort()        {        }    }}
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