| 123456789101112131415161718192021222324252627282930313233343536373839404142434445464748495051525354555657585960616263646566676869707172737475767778798081828384858687888990919293949596979899100101102103104105106107108109110111112113114115116117118119120121122123124125126127128129130131132133134135136137138139140141142143144145146147148149150151152153154155156157158159160161162163164165166167168169170171172173174175176177178179180181182183184185186187188189190191192193194195196197198199200201202203204205206207208209210211212213214215216217218219220221222223224225226227228229230231232233234235236237238239240241242243244245246247248249250251252253254255256257258259260261262263264265266267268269270271272273274275276277278279280281282283284285286287288289290291292293294295296297298299300301302303304305306307308309310311312313314315316317318319320321322323324325326327328329330331332333334335336337338339340341342343344345346347348349350351352353354355356357358359360361362363364365366367368369370371372373374375376377378379380381382383384385386387388389390391392393394395396397398399400401402403404405406407408409410411412413414415416417418419420421422423424425426427428429430431432433434435436437438439440441442443 | using Aitex.Core.RT.Device;using Aitex.Core.RT.Event;using Aitex.Core.RT.Routine;using Aitex.Core.RT.SCCore;using Aitex.Core.Util;using Aitex.Sorter.Common;using MECF.Framework.Common.Device.Bases;using MECF.Framework.Common.Equipment;using MECF.Framework.Common.Schedulers;using MECF.Framework.Common.SubstrateTrackings;using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.Robot;using System;using System.Collections.Generic;using System.Linq;using System.Text;using System.Threading.Tasks;using FurnaceRT.Equipments.PMs;using FurnaceRT.Equipments.FIMSs;using FurnaceRT.Equipments.Systems;using static FurnaceRT.Equipments.FIMSs.FIMSModule;using Aitex.Core.Common;using System.Text.RegularExpressions;using Aitex.Core.RT.Device.Unit;namespace FurnaceRT.Equipments.WaferRobots{    public class WaferRobotMap : ModuleRoutine, IRoutine    {        enum RoutineStep        {            Map,            CheckBeforeMap,            CheckAfterMap,            CheckMappingFinish,        }        private ModuleName _mapFIMS;        private int _slotNumber;        private string _slotMap;        private bool _isCompareWithSlotMap;        private bool _isCreateWafer;        private Hand _blade;        private WaferRobotModule _waferRobotModule;        private int _timeout = 0;        private int _timeout2 = 10;        private RD_TRIG _holdTrig = new RD_TRIG();        private R_TRIG _emergencyStopTrig = new R_TRIG();        private R_TRIG _pauseTrig = new R_TRIG();        private R_TRIG _resumeTrig = new R_TRIG();        private RoutineStep _routineStep;        private double _durationTime = 0;        private bool _isHasAlarm = false;        private bool _needStartCheck = true;        public WaferRobotMap(WaferRobotModule waferRobotModule)        {            _waferRobotModule = waferRobotModule;            Module = waferRobotModule.Module;            Name = "Map";        }        public void Init(ModuleName mapFIMS, int slotNumber, Hand blade, string slotMap, bool isCompareWithSlotMap, bool isCreateWafer, bool isHasAlarm)        {            _mapFIMS = mapFIMS;            _slotNumber = slotNumber;            _blade = blade;            _slotMap = slotMap;            _isCompareWithSlotMap = isCompareWithSlotMap;            _isCreateWafer = isCreateWafer;            var para = new List<object> { _mapFIMS, _slotNumber, _blade, slotMap, isCompareWithSlotMap, isCreateWafer, true };//增加参数true,表示执行过程中有alarm            _waferRobotModule.MapFailAlarm.RetryMessage = (int)WaferRobotModule.MSG.MapRetry;            _waferRobotModule.MapFailAlarm.RetryMessageParas = para.ToArray();            _waferRobotModule.MapTimeoutAlarm.RetryMessage = (int)WaferRobotModule.MSG.MapRetry;            _waferRobotModule.MapTimeoutAlarm.RetryMessageParas = para.ToArray();            _isHasAlarm = isHasAlarm;            if (!_isHasAlarm)                _needStartCheck = true;        }        public Result Start(params object[] objs)        {            // 抛出过alarm就不reset            if (!_isHasAlarm)            {                Reset();            }            else            {                _historySteps.Remove((int)_routineStep);                _isHasAlarm = false;                ResetState();            }            _holdTrig.RST = true;            _emergencyStopTrig.RST = true;            _pauseTrig.RST = true;            _resumeTrig.RST = true;            _timeout = SC.GetValue<int>($"{Module}.PickTimeout");            if (_needStartCheck)            {                if (_mapFIMS == ModuleName.FIMS1 || _mapFIMS == ModuleName.FIMS2)                {                    if (!Singleton<EquipmentManager>.Instance.Modules.ContainsKey(_mapFIMS))                    {                        _waferRobotModule.PickWaferFailAlarm.Set($"{_mapFIMS} is not install");                        return Result.FAIL;                    }                    if (!CarrierManager.Instance.CheckHasCarrier(_mapFIMS, 0))                    {                        _waferRobotModule.MapFailAlarm.Set($"no carrier at {_mapFIMS}");                        return Result.FAIL;                    }                    var fims = Singleton<EquipmentManager>.Instance.Modules[_mapFIMS] as FIMSModule;                    if (fims != null && !fims.CheckReadyForTransfer(ModuleHelper.Converter(Module), _blade, 0, EnumTransferType.Map, out string reason))                    {                        _waferRobotModule.MapFailAlarm.Set(reason);                        return Result.FAIL;                    }                    if (fims != null && fims.IsWaferOnRobot)                    {                        _waferRobotModule.MapFailAlarm.Set($"The wafer on {Module} has shifted");                    }                    fims.IsMapping = true;                }                if (ModuleHelper.IsPm(_mapFIMS))                {                    var pmModule = Singleton<EquipmentManager>.Instance.Modules[_mapFIMS] as PMModule;                    if (pmModule != null && !pmModule.CheckReadyForTransfer(ModuleHelper.Converter(_waferRobotModule.Module), _blade, 0, EnumTransferType.Map, out string reason))                    {                        _waferRobotModule.MapFailAlarm.Set(reason);                        return Result.FAIL;                    }                }            }            Notify($"Start");            return Result.RUN;        }        public void Abort()        {            if (_mapFIMS == ModuleName.FIMS1 || _mapFIMS == ModuleName.FIMS2)                (Singleton<EquipmentManager>.Instance.Modules[_mapFIMS] as FIMSModule).IsMapping = false;            _waferRobotModule.Stop();        }        public override Result Monitor()        {            try            {                CheckBeforeMap((int)RoutineStep.CheckBeforeMap, _mapFIMS, _blade);                Map((int)RoutineStep.Map, _mapFIMS, _blade, _timeout);                CheckMappingFinish((int)RoutineStep.CheckMappingFinish, _mapFIMS, _timeout2);                CheckAfterMap((int)RoutineStep.CheckAfterMap, _mapFIMS, _slotNumber, _slotMap, _isCompareWithSlotMap, _isCreateWafer);            }            catch (RoutineBreakException)            {                return Result.RUN;            }            catch (RoutineFaildException ex)            {                if (_mapFIMS == ModuleName.FIMS1 || _mapFIMS == ModuleName.FIMS2)                    (Singleton<EquipmentManager>.Instance.Modules[_mapFIMS] as FIMSModule).IsMapping = false;                return Result.FAIL;            }            if (_mapFIMS == ModuleName.FIMS1 || _mapFIMS == ModuleName.FIMS2)                (Singleton<EquipmentManager>.Instance.Modules[_mapFIMS] as FIMSModule).IsMapping = false;            Notify("Finished");            return Result.DONE;        }        private void CheckAfterMap(int id, ModuleName mapModule, int slotNumber, string slotMap, bool isCompareWithSlotMap, bool isCreateWafer)        {            Tuple<bool, Result> ret = Execute(id, () =>            {                Notify("Check after map condition");                string reason = string.Empty;                //_waferRobotModule.WaferRobotDevice.SlotMap = "1111111111111111111111111";                if (SC.GetValue<bool>($"System.IsSimulatorMode"))                    _waferRobotModule.WaferRobotDevice.SlotMap = "1111111111111111111111111";                int waferCount = _waferRobotModule.WaferRobotDevice.SlotMap.Length == 0 ? 0 : Regex.Matches(_waferRobotModule.WaferRobotDevice.SlotMap, "1").Count;                //if (waferCount != slotNumber)                //{                //    _waferRobotModule.MapFailAlarm.Set($"Mapping result {waferCount} unequal to input number {slotNumber}");                //    return false;                //}                if (isCompareWithSlotMap && string.IsNullOrEmpty(_waferRobotModule.WaferRobotDevice.SlotMap))                {                    _waferRobotModule.MapFailAlarm.Set($"Mapping result is null");                    return false;                }                var carrier = CarrierManager.Instance.GetCarrier(mapModule, 0);                if (carrier != null)                {                    carrier.IsMapped = true;                    carrier.IsMapOK = true;                }                ModuleName originModule = ModuleName.System;                WaferType waferType = WaferType.None;                if (mapModule != ModuleName.PM1)                {                    originModule = carrier.InternalModuleName;                    Enum.TryParse(carrier.CarrierType.ToString(), out waferType);                }                waferCount = 0;                //"返回结果,格式:“MAP 1 0 D C 1 1” 1:单片,D:叠片 C:跨槽 0:无片"                for (int i = 0; i < _waferRobotModule.WaferRobotDevice.SlotMap.Length; i++)                {                    switch (_waferRobotModule.WaferRobotDevice.SlotMap[i])                    {                        case '1':                            if (isCreateWafer)                            {                                if (WaferManager.Instance.CheckHasWafer(mapModule, i))                                    WaferManager.Instance.DeleteWafer(mapModule, i);                                WaferManager.Instance.CreateWafer(mapModule, i, originModule, i, WaferStatus.Normal, waferType);                                CarrierManager.Instance.UpdateWaferIn(originModule, 0, true);                            }                            waferCount++;                            break;                        case '0':                            if (isCreateWafer)                            {                                if (WaferManager.Instance.CheckHasWafer(mapModule, i))                                    WaferManager.Instance.DeleteWafer(mapModule, i);                            }                            break;                        case 'D':                            if (isCreateWafer)                            {                                if (WaferManager.Instance.CheckHasWafer(mapModule, i))                                    WaferManager.Instance.DeleteWafer(mapModule, i);                                WaferManager.Instance.CreateWafer(mapModule, i, originModule, i, WaferStatus.Double, waferType);                                CarrierManager.Instance.UpdateWaferIn(originModule, 0, true);                            }                            reason += $"slot={i + 1} double wafer\n";                            break;                        case 'C':                            if (isCreateWafer)                            {                                if (WaferManager.Instance.CheckHasWafer(mapModule, i))                                    WaferManager.Instance.DeleteWafer(mapModule, i);                                WaferManager.Instance.CreateWafer(mapModule, i, originModule, i, WaferStatus.Crossed, waferType);                                CarrierManager.Instance.UpdateWaferIn(originModule, 0, true);                            }                            reason += $"slot={i + 1} crossed wafer\n";                            break;                    }                }                if (!string.IsNullOrEmpty(reason))                {                    if (carrier != null)                        carrier.IsMapOK = false;                    _waferRobotModule.MapFailAlarm.Set(reason);                    return false;                }                //if (waferCount != slotNumber)                //{                //    if (carrier != null)                //        carrier.IsMapOK = false;                //    _waferRobotModule.MapFailAlarm.Set($"mapping result wafer count={waferCount}, set wafer count={slotNumber}, not match");                //    return false;                //}                if (carrier != null)                    carrier.HasWaferIn = waferCount > 0;                //if (isCompareWithSlotMap && slotMap != _waferRobotModule.WaferRobotDevice.SlotMap)                //{                //    if (carrier != null)                //        carrier.IsMapOK = false;                //    _waferRobotModule.MapFailAlarm.Set($"mapping result slot map={_waferRobotModule.WaferRobotDevice.SlotMap}, set slot map={slotMap}, not match");                //    return false;                //}                return true;            });            if (ret.Item1)            {                if (ret.Item2 == Result.FAIL)                {                    throw (new RoutineFaildException());                }            }            _needStartCheck = false;        }        private void CheckBeforeMap(int id, ModuleName source, Hand blade)        {            Tuple<bool, Result> ret = Execute(id, () =>            {                Notify("Check map condition");                string reason = string.Empty;                if (_waferRobotModule.WaferRobotDevice.IsError)                {                    _waferRobotModule.MapFailAlarm.Set($"pick from {source} failed for robot error, error code={_waferRobotModule.WaferRobotDevice.ErrorCode}");                    return false;                }                if (!_waferRobotModule.WaferRobotDevice.IsIdle)                {                    _waferRobotModule.MapFailAlarm.Set($"pick from {source} failed for robot isn't Ready");                    return false;                }                if (source == ModuleName.FIMS1 || source == ModuleName.FIMS2)                {                    var stage = Singleton<EquipmentManager>.Instance.Modules[source] as FIMSModule;                    if (stage == null && !stage.CheckReadyForTransfer(ModuleHelper.Converter(Module), _blade, 0, EnumTransferType.Map, out reason))                    {                        _waferRobotModule.MapFailAlarm.Set(reason);                        return false;                    }                }                if (ModuleHelper.IsPm(source))                {                    var pmModule = Singleton<EquipmentManager>.Instance.Modules[_mapFIMS] as PMModule;                    if (pmModule != null && !pmModule.CheckReadyForTransfer(ModuleHelper.Converter(_waferRobotModule.Module), _blade, 0, EnumTransferType.Map, out reason))                    {                        _waferRobotModule.MapFailAlarm.Set(reason);                        return false;                    }                }                return true;            });            if (ret.Item1)            {                if (ret.Item2 == Result.FAIL)                {                    throw (new RoutineFaildException());                }            }            _needStartCheck = false;        }        private void Map(int id, ModuleName source, Hand hand, int timeout)        {            _routineStep = (RoutineStep)Enum.Parse(typeof(RoutineStep), id.ToString());            Tuple<bool, Result> ret = ExecuteAndWait(id, () =>            {                Notify("Map");                string reason;                if (!_waferRobotModule.RobotMap(source, hand, out reason))                {                    _waferRobotModule.MapFailAlarm.Set(reason);                    return false;                }                return true;            }, () =>            {                if (_waferRobotModule.WaferRobotDevice.IsReady() && !_waferRobotModule.WaferRobotDevice.IsError)                {                    return true;                }                return false;            }, timeout * 1000);            if (ret.Item1)            {                if (ret.Item2 == Result.FAIL)                {                    //_waferRobotModule.MapFailAlarm.Description = $"{_waferRobotModule.WaferRobotDevice.ErrorCode}";                    _waferRobotModule.MapFailAlarm.Set($"mapping {source} failed for robot error, error code={_waferRobotModule.WaferRobotDevice.ErrorCode}");                    throw (new RoutineFaildException());                }                else if (ret.Item2 == Result.TIMEOUT) //timeout                {                    //_waferRobotModule.PickWaferTimeoutAlarm.Description = $"timeout over {timeout} seconds";                    _waferRobotModule.MapTimeoutAlarm.Set($"timeout over {timeout} seconds");                    throw (new RoutineFaildException());                }                else                    throw (new RoutineBreakException());            }        }        private void CheckMappingFinish(int id, ModuleName source, int timeout)        {            _routineStep = (RoutineStep)Enum.Parse(typeof(RoutineStep), id.ToString());            Tuple<bool, Result> ret = ExecuteAndWait(id, () =>            {                Notify("Check EX1/EX2 Home Position");                return true;            }, () =>            {                var sensor1 = DEVICE.GetDevice<IoSensor>($"PM1.SensorWaferRobotEX1AxisHomePosition");                var sensor2 = DEVICE.GetDevice<IoSensor>($"PM1.SensorWaferRobotEX2AxisHomePosition");                if (sensor1 != null && sensor1.Value && sensor2 != null && sensor2.Value)                {                    return true;                }                return false;            }, timeout * 1000);            if (ret.Item1)            {                if (ret.Item2 == Result.FAIL)                {                    throw (new RoutineFaildException());                }                else if (ret.Item2 == Result.TIMEOUT) //timeout                {                    //_waferRobotModule.PickWaferTimeoutAlarm.Description = $"timeout over {timeout} seconds";                    _waferRobotModule.MapTimeoutAlarm.Set($"check wafer robot EX1/EX2 home position timeout over {timeout} seconds");                    throw (new RoutineFaildException());                }                else                    throw (new RoutineBreakException());            }        }    }}
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