PMN2Purge.cs 41 KB

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  1. using Aitex.Core.RT.DataCenter;
  2. using Aitex.Core.RT.Device;
  3. using Aitex.Core.RT.Device.Unit;
  4. using Aitex.Core.RT.IOCore;
  5. using Aitex.Core.RT.Log;
  6. using Aitex.Core.RT.SCCore;
  7. using Aitex.Core.Util;
  8. using DocumentFormat.OpenXml.Packaging;
  9. using DocumentFormat.OpenXml.Spreadsheet;
  10. using FurnaceRT.Devices;
  11. using FurnaceRT.Equipments.PMs.Devices;
  12. using FurnaceRT.Equipments.Systems;
  13. using FurnaceRT.Extraction;
  14. using MECF.Framework.Common.CommonData.SorterDefines;
  15. using MECF.Framework.Common.Equipment;
  16. using MECF.Framework.Common.Tolerance;
  17. using MECF.Framework.Common.Utilities;
  18. using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.LoadPorts.TDK;
  19. using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.PMs;
  20. using System;
  21. using System.Collections.Generic;
  22. using System.Diagnostics;
  23. using System.Linq;
  24. namespace FurnaceRT.Equipments.PMs
  25. {
  26. /// <summary>
  27. /// 分布类 定义N2Purge的执行逻辑
  28. /// </summary>
  29. public partial class PMModule
  30. {
  31. private R_TRIG _trigN2UpRD = new R_TRIG();
  32. private R_TRIG _trigN2DownRD = new R_TRIG();
  33. private R_TRIG _trigN2AirUpRD = new R_TRIG();
  34. private R_TRIG _trigN2AirDownRD = new R_TRIG();
  35. private R_TRIG _trigN2AirDownTwoRD = new R_TRIG();
  36. private R_TRIG _trigSelectN2PurgeModeD = new R_TRIG();
  37. private FilterChecker _filterChecker = new FilterChecker();
  38. private R_TRIG tank1_TRIG = new R_TRIG();
  39. private R_TRIG tank2_TRIG = new R_TRIG();
  40. private Dictionary<string, Tuple<R_TRIG, List<Tuple<IDevice, string>>>> _n2PurgeSequenceAction;
  41. private Dictionary<string, Func<bool>> _n2PurgeSequenceStatus;
  42. private Dictionary<string, R_TRIG> _rTrigDict;
  43. private N2PurgeModeEnum _N2PurgeMode = N2PurgeModeEnum.Auto;
  44. private double _n2PurgeData = 20;
  45. private double _n2ToAirData = 185000;
  46. private N2PurgeModeEnum _currentPhase;
  47. private double _manualPhase2StabilityTime = 0;
  48. private double _manualPhase4StabilityTime = 0;
  49. private bool _enableAbortN2purge = true;
  50. private int _phase1CycleCount = 0;
  51. private int _phase1CycleCountSC = 0;
  52. private bool _canSwitchToPhase2 = true;
  53. private Dictionary<string, Stopwatch> _allTimeDict = new Dictionary<string, Stopwatch>();
  54. private void InitN2PurgeData()
  55. {
  56. DATA.Subscribe($"{Module}.N2PurgeLimitData", () => GetN2PurgeLimitData());
  57. DATA.Subscribe($"{Module}.O2DensityData", () => ConcentrationO2.Value.ToString("f3"), SubscriptionAttribute.FLAG.IgnoreSaveDB);
  58. DATA.Subscribe($"{Module}.CheckO2Location", () => GetCheckO2Location(), SubscriptionAttribute.FLAG.IgnoreSaveDB);
  59. DATA.Subscribe($"{Module}.O2SetCheckSetPoint", () => GetO2SetCheckSetPoint(), SubscriptionAttribute.FLAG.IgnoreSaveDB);
  60. DATA.Subscribe($"{Module}.N2PurgeMode", () => SC.ContainsItem("PM1.SelectN2PurgeMode") ? SC.GetStringValue("PM1.SelectN2PurgeMode") : "");
  61. var selectN2PurgeMode = SC.ContainsItem("PM1.SelectN2PurgeMode") ? SC.GetStringValue("PM1.SelectN2PurgeMode") : "";
  62. if (!string.IsNullOrEmpty(selectN2PurgeMode))
  63. {
  64. if (selectN2PurgeMode != _N2PurgeMode.ToString())
  65. {
  66. SetN2PurgeModeAction(selectN2PurgeMode);
  67. }
  68. }
  69. var currentPhase = SC.ContainsItem("PM1.SelectN2PurgeModePhase") ? SC.GetStringValue("PM1.SelectN2PurgeModePhase") : "";
  70. if (!string.IsNullOrEmpty(currentPhase))
  71. {
  72. var enumCurrentPhase = (N2PurgeModeEnum)Enum.Parse(typeof(N2PurgeModeEnum), currentPhase);
  73. _currentPhase = enumCurrentPhase;
  74. }
  75. }
  76. private void InitN2PurgeConfigData()
  77. {
  78. _n2PurgeData = SC.ContainsItem($"System.N2PurgeData") ? SC.GetValue<double>("System.N2PurgeData") : 20;
  79. _n2ToAirData = SC.ContainsItem($"System.N2PurgeData") ? SC.GetValue<double>("System.N2ToAirData") : 185000;
  80. _enableAbortN2purge = SC.ContainsItem($"PM1.N2Purge.EnableAbortN2purge") ? SC.GetValue<bool>("PM1.N2Purge.EnableAbortN2purge") : false;
  81. _manualPhase2StabilityTime = SC.ContainsItem($"PM1.N2Purge.Manual_phase2.StabilityTime") ? SC.GetValue<double>("PM1.N2Purge.Manual_phase2.StabilityTime") : 0;
  82. _manualPhase4StabilityTime = SC.ContainsItem($"PM1.N2Purge.Manual_phase4.StabilityTime") ? SC.GetValue<double>("PM1.N2Purge.Manual_phase4.StabilityTime") : 0;
  83. _phase1CycleCountSC = SC.ContainsItem($"PM1.N2Purge.Manual_phase1.CycleCount") ? SC.GetValue<int>("PM1.N2Purge.Manual_phase1.CycleCount") : 0;
  84. _n2PurgeSequenceAction = ExtractionMethods.GetN2PurgeSequenceAction();
  85. _n2PurgeSequenceStatus = new Dictionary<string, Func<bool>>()
  86. {
  87. {"N2PurgeAIRTo20PPM",()=> GetN2PurgeAIRTo20PPMStatus()},
  88. {"N2PurgeUnder20PPM",()=> GetN2PurgeUnder20PPMStatus()},
  89. {"AIR",()=> GetN2PurgeAIRStatus()},
  90. {"DoorOpen",()=> GetN2PurgeDoorOpenStatus()},
  91. {"Foup1",()=> GetN2PurgeFoup1Status()},
  92. {"Foup2",()=> GetN2PurgeFoup2Status()},
  93. {N2PurgeModeEnum.Manual_phase1.ToString(),()=> CheckN2PurgePhase1() },
  94. {N2PurgeModeEnum.Manual_phase2.ToString(),()=> CheckN2PurgePhase2()},
  95. {N2PurgeModeEnum.Manual_phase3.ToString(),()=> CheckN2PurgePhase3() },
  96. {N2PurgeModeEnum.Manual_phase4.ToString(),()=> CheckN2PurgePhase4() },
  97. {N2PurgeModeEnum.Manual_phase5.ToString(),()=> CheckN2PurgePhase5() },
  98. };
  99. _allTimeDict = new Dictionary<string, Stopwatch>()
  100. {
  101. {N2PurgeModeEnum.Manual_phase1.ToString(),new Stopwatch() },
  102. {N2PurgeModeEnum.Manual_phase2.ToString(),new Stopwatch()},
  103. {N2PurgeModeEnum.Manual_phase3.ToString(),new Stopwatch()},
  104. {N2PurgeModeEnum.Manual_phase4.ToString(),new Stopwatch() },
  105. {N2PurgeModeEnum.Manual_phase5.ToString(),new Stopwatch() }
  106. };
  107. _rTrigDict = new Dictionary<string, R_TRIG>();
  108. }
  109. private void MonitorN2Purge()
  110. {
  111. var selectN2PurgeMode = SC.ContainsItem("PM1.SelectN2PurgeMode") ? SC.GetStringValue("PM1.SelectN2PurgeMode") : "";
  112. if (string.IsNullOrEmpty(selectN2PurgeMode))
  113. {
  114. return;
  115. }
  116. SetN2PurgeModeAction(selectN2PurgeMode);
  117. }
  118. private void MonitorTank1LeakAgeExec()
  119. {
  120. tank1_TRIG.CLK = SensorHCDTANKH != null && SensorHCDTANKH.Value;
  121. if (tank1_TRIG.Q)
  122. {
  123. SetHREFEnable(new object[1] { false });
  124. ValveAV113?.TurnValve(false, out _);
  125. }
  126. }
  127. public bool SetHREFEnable(object[] param)
  128. {
  129. if (param == null || param.Length <= 0)
  130. return true;
  131. bool.TryParse(param[0].ToString(), out bool isEnable);
  132. if (isEnable)
  133. {
  134. if (SensorHREFILK != null && SensorHREFILK.Value)
  135. {
  136. TrigSIREFON?.CheckAndSet(isEnable, out _);
  137. }
  138. }
  139. else
  140. {
  141. TrigSIREFON?.CheckAndSet(isEnable, out _);
  142. }
  143. return true;
  144. }
  145. private void MonitorTank2LeakAgeExec()
  146. {
  147. tank2_TRIG.CLK = SensorCSOURCETANKH != null && SensorCSOURCETANKH.Value;
  148. if (tank2_TRIG.Q)
  149. {
  150. SetCREFEnable(new object[1] { false });
  151. ValveAV121?.TurnValve(false, out _);
  152. }
  153. }
  154. public bool SetCREFEnable(object[] param)
  155. {
  156. if (param == null || param.Length <= 0)
  157. return true;
  158. bool.TryParse(param[0].ToString(), out bool isEnable);
  159. if (isEnable)
  160. {
  161. if (SensorCREFILK != null && SensorCREFILK.Value)
  162. {
  163. TrigCREFON?.CheckAndSet(isEnable, out _);
  164. }
  165. }
  166. else
  167. {
  168. TrigCREFON?.CheckAndSet(isEnable, out _);
  169. }
  170. return true;
  171. }
  172. /// <summary>
  173. /// TODO:这里展示数据的逻辑 不正确,待明确逻辑
  174. /// </summary>
  175. /// <returns></returns>
  176. private double GetN2PurgeLimitData()
  177. {
  178. if (_N2PurgeMode == N2PurgeModeEnum.N2PurgeMode)
  179. {
  180. if ((SensorO2DetectSideFIMS1 != null && SensorO2DetectSideFIMS1.Value) || (SensorO2DetectSideFIMS2 != null && SensorO2DetectSideFIMS2.Value))
  181. {
  182. return (float)SC.GetValue<double>("PM1.N2Purge.N2PurgeFOUPO2CheckSV");
  183. }
  184. return _n2PurgeData;
  185. }
  186. if (_N2PurgeMode == N2PurgeModeEnum.ATMMode)
  187. {
  188. return _n2ToAirData;
  189. }
  190. return ConcentrationO2.Value;
  191. }
  192. private void SetN2PurgeModeAction(string selectN2PurgeMode)
  193. {
  194. _N2PurgeMode = (N2PurgeModeEnum)Enum.Parse(typeof(N2PurgeModeEnum), selectN2PurgeMode);
  195. if (_N2PurgeMode == N2PurgeModeEnum.N2PurgeMode)
  196. {
  197. if (_currentPhase == N2PurgeModeEnum.Manual_phase1)
  198. {
  199. _filterChecker.CheckInterval = 3;
  200. _filterChecker.Monitor(CheckN2PurgePhase2());
  201. if (_filterChecker.Trig && _canSwitchToPhase2)
  202. {
  203. LOG.Info($" N2PurgeMode Trigger from Manual_phase1 to Manual_phase2,O2:{ConcentrationO2.Value}");
  204. SetN2PurgeValveData(N2PurgeModeEnum.Manual_phase2.ToString());
  205. }
  206. }
  207. else if (_currentPhase == N2PurgeModeEnum.Manual_phase2)
  208. {
  209. if (!_allTimeDict[N2PurgeModeEnum.Manual_phase2.ToString()].IsRunning && _canSwitchToPhase2)
  210. {
  211. _allTimeDict[N2PurgeModeEnum.Manual_phase2.ToString()].Restart();
  212. }
  213. var second = _allTimeDict[N2PurgeModeEnum.Manual_phase2.ToString()].Elapsed.TotalSeconds;
  214. if (second >= _manualPhase2StabilityTime)
  215. {
  216. if (CheckN2PurgePhase1())
  217. {
  218. LOG.Info($"N2PurgeMode Trigger Manual_phase1 was triggered {second} seconds later,O2:{ConcentrationO2.Value}");
  219. N2PurgeFaileAlarm.Set();
  220. _allTimeDict[N2PurgeModeEnum.Manual_phase2.ToString()].Restart();
  221. _allTimeDict[N2PurgeModeEnum.Manual_phase2.ToString()].Stop();
  222. _canSwitchToPhase2 = false;
  223. SetN2PurgeValveData(N2PurgeModeEnum.Manual_phase1.ToString());
  224. }
  225. if (CheckN2PurgePhase2())
  226. {
  227. LOG.Info($"N2PurgeMode Trigger Hold Manual_phase2 was triggered {second} seconds later,O2:{ConcentrationO2.Value}");
  228. _allTimeDict[N2PurgeModeEnum.Manual_phase2.ToString()].Restart();
  229. _allTimeDict[N2PurgeModeEnum.Manual_phase2.ToString()].Stop();
  230. _canSwitchToPhase2 = false;
  231. }
  232. }
  233. }
  234. else
  235. {
  236. if (CheckN2PurgePhase1())
  237. {
  238. LOG.Info($"N2PurgeMode Trigger Directly triggered Manual_phase1,O2:{ConcentrationO2.Value}");
  239. SetN2PurgeValveData(N2PurgeModeEnum.Manual_phase1.ToString());
  240. }
  241. else if (CheckN2PurgePhase2())
  242. {
  243. LOG.Info($"N2PurgeMode Trigger Directly triggered Manual_phase2,O2:{ConcentrationO2.Value}");
  244. SetN2PurgeValveData(N2PurgeModeEnum.Manual_phase2.ToString());
  245. }
  246. }
  247. }
  248. if (_N2PurgeMode == N2PurgeModeEnum.ATMMode)
  249. {
  250. if (_currentPhase == N2PurgeModeEnum.Manual_phase3)
  251. {
  252. var checkResult = CheckN2PurgePhase4();
  253. if (!_allTimeDict[N2PurgeModeEnum.Manual_phase4.ToString()].IsRunning)
  254. {
  255. _allTimeDict[N2PurgeModeEnum.Manual_phase4.ToString()].Restart();
  256. }
  257. var second = _allTimeDict[N2PurgeModeEnum.Manual_phase4.ToString()].Elapsed.TotalSeconds;
  258. if (second >= _manualPhase4StabilityTime && checkResult)
  259. {
  260. LOG.Info($"N2PurgeMode Trigger from Manual_phase3 to Manual_phase4 is triggered {second} seconds later,O2:{ConcentrationO2.Value}");
  261. SetN2PurgeValveData(N2PurgeModeEnum.Manual_phase4.ToString());
  262. _allTimeDict[N2PurgeModeEnum.Manual_phase4.ToString()].Restart();
  263. _allTimeDict[N2PurgeModeEnum.Manual_phase4.ToString()].Stop();
  264. }
  265. }
  266. else if (_currentPhase == N2PurgeModeEnum.Manual_phase4)
  267. {
  268. if (CheckN2PurgePhase5())
  269. {
  270. LOG.Info($"N2PurgeMode Trigger from Manual_phase4 to Manual_phase5,O2:{ConcentrationO2.Value}");
  271. SetN2PurgeValveData(N2PurgeModeEnum.Manual_phase5.ToString());
  272. }
  273. //if (CheckN2PurgePhase3( ))
  274. //{
  275. // LOG.Info($"N2PurgeMode Trigger from Manual_phase4 to Manual_phase3,O2:{o2Value}");
  276. // SetN2PurgeValveData(N2PurgeModeEnum.Manual_phase3.ToString());
  277. //}
  278. }
  279. else if (_currentPhase == N2PurgeModeEnum.Manual_phase5)
  280. {
  281. if (CheckN2PurgePhase4())
  282. {
  283. LOG.Info($"N2PurgeMode Trigger from Manual_phase5 to Manual_phase4,O2:{ConcentrationO2.Value}");
  284. SetN2PurgeValveData(N2PurgeModeEnum.Manual_phase4.ToString());
  285. }
  286. //if (CheckN2PurgePhase3( ))
  287. //{
  288. // LOG.Info($"N2PurgeMode Trigger from Manual_phase5 to Manual_phase3,O2:{o2Value}");
  289. // SetN2PurgeValveData(N2PurgeModeEnum.Manual_phase3.ToString());
  290. //}
  291. }
  292. else
  293. {
  294. if (CheckN2PurgePhase3())
  295. {
  296. LOG.Info($"N2PurgeMode Trigger Directly triggered Manual_phase3,O2:{ConcentrationO2.Value}");
  297. SetN2PurgeValveData(N2PurgeModeEnum.Manual_phase3.ToString());
  298. return;
  299. }
  300. if (CheckN2PurgePhase5())
  301. {
  302. LOG.Info($"N2PurgeMode Trigger Directly triggered Manual_phase5,O2:{ConcentrationO2.Value}");
  303. SetN2PurgeValveData(N2PurgeModeEnum.Manual_phase5.ToString());
  304. return;
  305. }
  306. if (CheckN2PurgePhase4())
  307. {
  308. LOG.Info($"N2PurgeMode Trigger Directly triggered Manual_phase4,O2:{ConcentrationO2.Value}");
  309. SetN2PurgeValveData(N2PurgeModeEnum.Manual_phase4.ToString());
  310. return;
  311. }
  312. }
  313. }
  314. if (_N2PurgeMode == N2PurgeModeEnum.ManualMode || _N2PurgeMode == N2PurgeModeEnum.Auto)
  315. {
  316. _currentPhase = _N2PurgeMode;
  317. }
  318. //switch (_N2PurgeMode)
  319. //{
  320. // case N2PurgeModeEnum.Auto:
  321. // // 自动模式下的操作
  322. // break;
  323. // case N2PurgeModeEnum.ManualMode:
  324. // break;
  325. // case N2PurgeModeEnum.N2PurgeMode:
  326. // ProcessPhase(_trigN2UpRD, N2PurgeModeEnum.Manual_phase1.ToString());
  327. // ProcessPhase(_trigN2DownRD, N2PurgeModeEnum.Manual_phase2.ToString(), _manualPhase2NeedCheck, (int)(_manualPhase2StabilityTime * 1000));
  328. // break;
  329. // case N2PurgeModeEnum.ATMMode:
  330. // ProcessPhase(_trigN2AirDownRD, N2PurgeModeEnum.Manual_phase3.ToString());
  331. // ProcessPhase(_trigN2AirUpRD, N2PurgeModeEnum.Manual_phase4.ToString(), _manualPhase4NeedCheck, (int)(_manualPhase4StabilityTime * 1000));
  332. // ProcessPhase(_trigN2AirDownTwoRD, N2PurgeModeEnum.Manual_phase5.ToString());
  333. // break;
  334. //}
  335. }
  336. bool CheckConditionInTime(string modeKey, int millisecondsTimeout, Func<bool> condition)
  337. {
  338. var stopwatch = _allTimeDict[modeKey];
  339. if (!_allTimeDict[modeKey].IsRunning)
  340. {
  341. _allTimeDict[modeKey].Restart();
  342. }
  343. while (stopwatch.ElapsedMilliseconds < millisecondsTimeout)
  344. {
  345. if (!_allTimeDict[modeKey].IsRunning)
  346. {
  347. return true;
  348. }
  349. if (!condition())
  350. {
  351. _allTimeDict[modeKey].Stop();
  352. _allTimeDict[modeKey].Reset();
  353. return false;
  354. }
  355. }
  356. if (stopwatch.ElapsedMilliseconds > millisecondsTimeout)
  357. {
  358. _allTimeDict[modeKey].Stop();
  359. _allTimeDict[modeKey].Reset();
  360. }
  361. return true;
  362. }
  363. private void ProcessPhase(R_TRIG r_TRIG, string modeKey, bool needCheck = false, int time = 0)
  364. {
  365. r_TRIG.CLK = needCheck ? (CheckConditionInTime(modeKey, time, () => _n2PurgeSequenceStatus[modeKey].Invoke())) : _n2PurgeSequenceStatus[modeKey].Invoke();
  366. if (r_TRIG.Q)
  367. {
  368. LOG.Info($"N2PurgeMode Trigger {modeKey}!,O2:{ConcentrationO2.Value},time:{_allTimeDict[modeKey].ElapsedMilliseconds}");
  369. SetN2PurgeValveData(modeKey);
  370. _allTimeDict[modeKey].Stop();
  371. _allTimeDict[modeKey].Reset();
  372. }
  373. }
  374. public void RestAllN2PrugeRD()
  375. {
  376. _trigN2AirDownRD.RST = false;
  377. _trigN2AirUpRD.RST = false;
  378. _trigN2DownRD.RST = false;
  379. _trigN2UpRD.RST = false;
  380. foreach (var item in _allTimeDict)
  381. {
  382. item.Value.Stop();
  383. item.Value.Reset();
  384. }
  385. _canSwitchToPhase2 = true;
  386. }
  387. private void SetN2PurgeValveData(string mode, string msg = "")
  388. {
  389. var value = _n2PurgeSequenceAction[mode];
  390. _currentPhase = (N2PurgeModeEnum)Enum.Parse(typeof(N2PurgeModeEnum), mode);
  391. if (SC.ContainsItem("PM1.SelectN2PurgeModePhase"))
  392. {
  393. SC.SetItemValue("PM1.SelectN2PurgeModePhase", mode);
  394. }
  395. foreach (var operateItem in value.Item2)
  396. {
  397. if (operateItem.Item1 is IoMFC)
  398. {
  399. var ioMFc = (operateItem.Item1 as IoMFC);
  400. { ioMFc.SetMfcValue(out _, 0, new object[] { float.Parse(operateItem.Item2.ToString()) }); }
  401. }
  402. if (operateItem.Item1 is IoValve)
  403. {
  404. var ioValve = (operateItem.Item1 as IoValve);
  405. ioValve.TurnValve(bool.Parse(operateItem.Item2), out _);
  406. }
  407. if (operateItem.Item1 is IoTrigger)
  408. {
  409. var ioTrigger = (operateItem.Item1 as IoTrigger);
  410. ioTrigger.CheckAndSet(bool.Parse(operateItem.Item2), out _);
  411. }
  412. }
  413. }
  414. private bool SetN2PurgeMode(out string reason, int time, object[] param)
  415. {
  416. reason = string.Empty;
  417. var mode = param[0].ToString();
  418. _N2PurgeMode = (N2PurgeModeEnum)Enum.Parse(typeof(N2PurgeModeEnum), mode);
  419. if (SC.ContainsItem("PM1.SelectN2PurgeMode"))
  420. {
  421. SC.SetItemValue("PM1.SelectN2PurgeMode", mode);
  422. }
  423. RestAllN2PrugeRD();
  424. return true;
  425. }
  426. /// <summary>
  427. /// 获取当前O2检测位置的设定值
  428. /// TODO:这里展示数据的逻辑也不正确,待明确逻辑
  429. /// </summary>
  430. /// <returns></returns>
  431. private string GetO2SetCheckSetPoint()
  432. {
  433. if (SensorO2DetectSideLA != null && SensorO2DetectSideLA.Value)
  434. {
  435. var key = "PM1.N2Purge.N2PurgeLAO2CheckSV";
  436. if (SC.ContainsItem(key))
  437. return SC.GetValue<double>(key).ToString("f3");
  438. }
  439. if ((SensorO2DetectSideFIMS1 != null && SensorO2DetectSideFIMS1.Value) || (SensorO2DetectSideFIMS2 != null && SensorO2DetectSideFIMS2.Value))
  440. {
  441. var key = "PM1.N2Purge.N2PurgeFOUPO2CheckSV";
  442. if (SC.ContainsItem(key))
  443. return SC.GetValue<double>(key).ToString("f3");
  444. }
  445. return "";
  446. }
  447. /// <summary>
  448. /// 获取当前O2检测位置
  449. /// </summary>
  450. /// <returns></returns>
  451. private string GetCheckO2Location()
  452. {
  453. if (SensorO2DetectSideLA != null && SensorO2DetectSideLA.Value)
  454. return SensorO2DetectSideLA.Display;
  455. if (SensorO2DetectSideFIMS1 != null && SensorO2DetectSideFIMS1.Value)
  456. return SensorO2DetectSideFIMS1.Display;
  457. if (SensorO2DetectSideFIMS2 != null && SensorO2DetectSideFIMS2.Value)
  458. return SensorO2DetectSideFIMS2.Display;
  459. return "";
  460. }
  461. /// <summary>
  462. /// 获取当前O2浓度
  463. /// </summary>
  464. /// <returns></returns>
  465. public bool CheckIsLASide()
  466. {
  467. if (SensorO2DetectSideLA == null)
  468. {
  469. return false;
  470. }
  471. return SensorO2DetectSideLA.Value;
  472. }
  473. private bool CheckN2PurgePhase1()
  474. {
  475. return ((int)ConcentrationO2.Value >= _n2PurgeData) && GetLADoorOpenStatus() && CheckIsLASide();
  476. }
  477. private bool CheckN2PurgePhase2()
  478. {
  479. return ((int)ConcentrationO2.Value < _n2PurgeData) && GetLADoorOpenStatus() && CheckIsLASide();
  480. }
  481. private bool CheckN2PurgePhase3()
  482. {
  483. return ((int)ConcentrationO2.Value) < _n2ToAirData && GetLADoorOpenStatus() && CheckIsLASide();
  484. }
  485. private bool CheckN2PurgePhase5()
  486. {
  487. return ((int)ConcentrationO2.Value) >= _n2ToAirData && !GetLADoorOpenStatus() && CheckIsLASide();
  488. }
  489. private bool CheckN2PurgePhase4()
  490. {
  491. return (((int)ConcentrationO2.Value)) >= _n2ToAirData && GetLADoorOpenStatus() && CheckIsLASide();
  492. }
  493. private bool GetN2PurgeAIRTo20PPMStatus()
  494. {
  495. return ValveAV202.DOOpen.Value;
  496. }
  497. public bool GetN2PurgeUnder20PPMStatus(double value = 20)
  498. {
  499. return ConcentrationO2.Value < value;
  500. }
  501. private bool GetN2PurgeAIRStatus()
  502. {
  503. return ValveAV202.DOClose.Value && (AlarmSignalFilterBox1DoorSwitch != null ? !AlarmSignalFilterBox1DoorSwitch.Value : false);
  504. }
  505. private bool GetLADoorOpenStatus()
  506. {
  507. return (bool)(SensorLADoorSw1?.Value);
  508. }
  509. private bool GetN2PurgeDoorOpenStatus()
  510. {
  511. return ValveAV202.DOClose.Value && (AlarmSignalFilterBox1DoorSwitch != null ? !AlarmSignalFilterBox1DoorSwitch.Value : false);
  512. }
  513. private bool GetN2PurgeFoup1Status()
  514. {
  515. return GetN2PurgeAIRTo20PPMStatus() && GetN2PurgeUnder20PPMStatus() && FIMS1.IsFoupExist && FIMS1.CollisionAvoidanceUpDownStatus == DeviceStatus.Down;
  516. }
  517. private bool GetN2PurgeFoup2Status()
  518. {
  519. return GetN2PurgeAIRTo20PPMStatus() && GetN2PurgeUnder20PPMStatus() && FIMS2.IsFoupExist && FIMS2.CollisionAvoidanceUpDownStatus == DeviceStatus.Down; ;
  520. }
  521. public bool IsAbortN2purge()
  522. {
  523. if (!_enableAbortN2purge)
  524. {
  525. return false;
  526. }
  527. if (SensorSL02001gasboxdoorsw11.Value || SensorSL02001gasboxdoorsw12.Value || SensorSL02002gasboxdoorsw11.Value || SensorSL02002gasboxdoorsw12.Value || SensorSL05002LAdoorsw2.Value || SensorSL05004LAfurnacedoorsw.Value)
  528. {
  529. return true;
  530. }
  531. return false;
  532. }
  533. public void SetN2PurgeLAO2CheckFirstEnable(bool isEable)
  534. {
  535. if (TrigN2PurgeLAO2CheckFirstEnable != null && TrigN2PurgeLAO2CheckFirstEnable.Value != isEable)
  536. {
  537. TrigN2PurgeLAO2CheckFirstEnable.SetTrigger(isEable, out _);
  538. }
  539. }
  540. public void SetN2PurgeFIMS1O2CheckEnable(ModuleName fims, bool isEable)
  541. {
  542. if (fims == ModuleName.FIMS1 && TrigN2PurgeFIMS1O2CheckEnable != null && TrigN2PurgeFIMS1O2CheckEnable.Value != isEable)
  543. {
  544. TrigN2PurgeFIMS1O2CheckEnable.SetTrigger(isEable, out _);
  545. }
  546. if (fims == ModuleName.FIMS2 && TrigN2PurgeFIMS2O2CheckEnable != null && TrigN2PurgeFIMS2O2CheckEnable.Value != isEable)
  547. {
  548. TrigN2PurgeFIMS2O2CheckEnable.SetTrigger(isEable, out _);
  549. }
  550. }
  551. public void SetN2PurgeProcess(bool isEable)
  552. {
  553. if (TrigN2PurgeProcess != null && TrigN2PurgeProcess.Value != isEable)
  554. {
  555. TrigN2PurgeProcess.SetTrigger(isEable, out _);
  556. }
  557. }
  558. public void SetN2PurgeLAO2CheckSV(float value)
  559. {
  560. if (TrigN2PurgeLAO2CheckSV != null)
  561. TrigN2PurgeLAO2CheckSV?.SetAOTrigger(value, out _);
  562. }
  563. public void SetN2PurgeFOUPO2CheckSV(float value)
  564. {
  565. if (TrigN2PurgeFOUPO2CheckSV != null)
  566. TrigN2PurgeFOUPO2CheckSV?.SetAOTrigger(value, out _);
  567. }
  568. /// <summary>
  569. /// N2Purge相关时间参数,电气要求设定为秒,实际下发按照毫秒
  570. /// </summary>
  571. public void SetN2PurgeParameters(string n2PurgeModeEnum)
  572. {
  573. if (SC.ContainsItem("PM1.N2Purge.TransferRoomArrivalWaitTime") && TrigN2PurgeLAO2CheckTime != null)
  574. {
  575. var time = (float)SC.GetValue<double>("PM1.N2Purge.TransferRoomArrivalWaitTime");
  576. TrigN2PurgeLAO2CheckTime.SetAOTrigger(time, out _);
  577. }
  578. if (SC.ContainsItem("PM1.N2Purge.TransferRoomStableWaitTime") && TrigN2PurgeLAO2OverTime != null)
  579. {
  580. var time = (float)SC.GetValue<double>("PM1.N2Purge.TransferRoomStableWaitTime");
  581. TrigN2PurgeLAO2OverTime.SetAOTrigger(time, out _);
  582. }
  583. if (SC.ContainsItem("PM1.N2Purge.FOUPOpenerArrivalWaitTime") && TrigN2PurgeFOUPO2CheckTime != null)
  584. {
  585. var time = (float)SC.GetValue<double>("PM1.N2Purge.FOUPOpenerArrivalWaitTime");
  586. TrigN2PurgeFOUPO2CheckTime.SetAOTrigger(time, out _);
  587. }
  588. if (SC.ContainsItem("PM1.N2Purge.FOUPOpenerStableWaitTime") && TrigN2PurgeFOUPO2OverTime != null)
  589. {
  590. var time = (float)SC.GetValue<double>("PM1.N2Purge.FOUPOpenerStableWaitTime");
  591. TrigN2PurgeFOUPO2OverTime.SetAOTrigger(time, out _);
  592. }
  593. if (SC.ContainsItem("PM1.N2Purge.O2DetectorTransferRoomToFOUPTime") && TrigN2PurgeExchangeLATOFOUPWaitTime != null)
  594. {
  595. var time = (float)SC.GetValue<double>("PM1.N2Purge.O2DetectorTransferRoomToFOUPTime");
  596. TrigN2PurgeExchangeLATOFOUPWaitTime.SetAOTrigger(time, out _);
  597. }
  598. if (SC.ContainsItem("PM1.N2Purge.O2DetectorFOUPToTransferRoomTime") && TrigN2PurgeExchangeFOUPTOLAWaitTime != null)
  599. {
  600. var time = (float)SC.GetValue<double>("PM1.N2Purge.O2DetectorFOUPToTransferRoomTime");
  601. TrigN2PurgeExchangeFOUPTOLAWaitTime.SetAOTrigger(time, out _);
  602. }
  603. if (SC.ContainsItem("PM1.N2Purge.O2DetectorFOUPToFOUPTime") && TrigN2PurgeExchangeFOUPTOFOUPWaitTime != null)
  604. {
  605. var time = (float)SC.GetValue<double>("PM1.N2Purge.O2DetectorFOUPToFOUPTime");
  606. TrigN2PurgeExchangeFOUPTOFOUPWaitTime.SetAOTrigger(time, out _);
  607. }
  608. //这2个SV下发值应该根据什么阶段下发什么值
  609. if (n2PurgeModeEnum == N2PurgeModeEnum.WaferCharge.ToString())
  610. {
  611. SetN2PurgeFOUPO2CheckSV((float)GetWaferChargeFOUPO2CheckSV());
  612. SetN2PurgeLAO2CheckSV((float)GetWaferChargeLAO2CheckSV());
  613. }
  614. if (n2PurgeModeEnum == N2PurgeModeEnum.FoupEnter.ToString())
  615. {
  616. SetN2PurgeFOUPO2CheckSV((float)GetFoupEnterFOUPO2CheckSV());
  617. SetN2PurgeLAO2CheckSV((float)GetFoupEnterLAO2CheckSV());
  618. }
  619. if (n2PurgeModeEnum == N2PurgeModeEnum.WaferDisCharge.ToString())
  620. {
  621. SetN2PurgeFOUPO2CheckSV((float)GetWaferDisChargeFOUPO2CheckSV());
  622. SetN2PurgeLAO2CheckSV((float)GetWaferDisChargeLAO2CheckSV());
  623. }
  624. }
  625. /// <summary>
  626. /// Job start的时候,就根据Process的配置判定是否需要进行LA压氧
  627. /// </summary>
  628. /// <param name="n2PurgeModeStr"></param>
  629. public void InitN2PurgeMode(string n2PurgeModeStr)
  630. {
  631. if (string.IsNullOrEmpty(n2PurgeModeStr))
  632. return;
  633. if (n2PurgeModeStr.ToLower() == "none")
  634. return;
  635. if (SC.ContainsItem("PM1.RecipeRelevancyN2Purge") && SC.GetValue<bool>("PM1.RecipeRelevancyN2Purge") && SC.ContainsItem("PM1.SelectN2PurgeMode"))
  636. {
  637. var setValue = GetN2PurgeModeEnumByStr(n2PurgeModeStr);
  638. SC.SetItemValueFromString("PM1.SelectN2PurgeMode", setValue);
  639. RestAllN2PrugeRD();
  640. }
  641. }
  642. public bool CheckFimsIsNeedOxygenPressure(bool fimsN2PurgeConfig, string recipeN2PurgeModeStr, out bool isCheckO2, bool isCheckRecipeHeader = true)
  643. {
  644. isCheckO2 = false;
  645. var currectN2PurgeModel = GetLACurrectN2purgeMode();
  646. if (isCheckRecipeHeader)
  647. {
  648. if (string.IsNullOrEmpty(recipeN2PurgeModeStr))
  649. return false;
  650. if (recipeN2PurgeModeStr.ToLower().Equals("n2 purge"))
  651. {
  652. recipeN2PurgeModeStr = N2PurgeModeEnum.N2PurgeMode.ToString();
  653. }
  654. if (recipeN2PurgeModeStr.ToLower().Contains("atm"))
  655. {
  656. recipeN2PurgeModeStr = IsATMMode(recipeN2PurgeModeStr);
  657. }
  658. var n2PurgeEnum = (N2PurgeModeEnum)Enum.Parse(typeof(N2PurgeModeEnum), recipeN2PurgeModeStr);
  659. if (n2PurgeEnum == N2PurgeModeEnum.ATMMode)
  660. return false;
  661. if (n2PurgeEnum == N2PurgeModeEnum.N2PurgeMode)
  662. {
  663. if (currectN2PurgeModel == N2PurgeModeEnum.N2PurgeMode.ToString() || currectN2PurgeModel == N2PurgeModeEnum.ATMMode.ToString() || currectN2PurgeModel == N2PurgeModeEnum.ManualMode.ToString())
  664. {
  665. if (fimsN2PurgeConfig)
  666. {
  667. isCheckO2 = true;
  668. return true;
  669. }
  670. else
  671. {
  672. return false;
  673. }
  674. }
  675. }
  676. if (n2PurgeEnum == N2PurgeModeEnum.None)
  677. {
  678. if (currectN2PurgeModel == N2PurgeModeEnum.ATMMode.ToString() || currectN2PurgeModel == N2PurgeModeEnum.ManualMode.ToString())
  679. {
  680. return false;
  681. }
  682. if (currectN2PurgeModel == N2PurgeModeEnum.N2PurgeMode.ToString())
  683. {
  684. if (fimsN2PurgeConfig)
  685. {
  686. isCheckO2 = true;
  687. return true;
  688. }
  689. else
  690. {
  691. return false;
  692. }
  693. }
  694. }
  695. }
  696. else
  697. {
  698. if (currectN2PurgeModel == N2PurgeModeEnum.N2PurgeMode.ToString() || currectN2PurgeModel == N2PurgeModeEnum.ManualMode.ToString())
  699. {
  700. if (fimsN2PurgeConfig)
  701. {
  702. isCheckO2 = true;
  703. return true;
  704. }
  705. else
  706. {
  707. return false;
  708. }
  709. }
  710. if (currectN2PurgeModel == N2PurgeModeEnum.ATMMode.ToString())
  711. {
  712. return false;
  713. }
  714. }
  715. return false;
  716. }
  717. public bool CheckLAIsNeedOxygenPressure(string recipeN2PurgeModeStr)
  718. {
  719. if (string.IsNullOrEmpty(recipeN2PurgeModeStr))
  720. return false;
  721. if (recipeN2PurgeModeStr.ToLower() == "none")
  722. return false;
  723. if (recipeN2PurgeModeStr.ToLower() == "atm")
  724. {
  725. recipeN2PurgeModeStr = N2PurgeModeEnum.ATMMode.ToString();
  726. }
  727. if (recipeN2PurgeModeStr.ToLower().Contains("n2"))
  728. {
  729. recipeN2PurgeModeStr = N2PurgeModeEnum.N2PurgeMode.ToString();
  730. }
  731. var n2PurgeEnum = (N2PurgeModeEnum)Enum.Parse(typeof(N2PurgeModeEnum), recipeN2PurgeModeStr);
  732. if (n2PurgeEnum == N2PurgeModeEnum.N2PurgeMode || n2PurgeEnum == N2PurgeModeEnum.ATMMode)
  733. return true;
  734. return false;
  735. }
  736. /// <summary>
  737. /// boat Move时候是否Check氧气浓度
  738. /// </summary>
  739. /// <param name="n2PurgeModeEnumStr"></param>
  740. /// <param name="isProcessing"></param>
  741. /// <param name="limitO2Data"></param>
  742. /// <returns></returns>
  743. public bool CheckBoatMoveIsNeedOxygenPressure(string n2PurgeModeEnumStr,bool isProcessing, out double limitO2Data)
  744. {
  745. limitO2Data = 0;
  746. if (!CheckIsLASide())
  747. return false;
  748. if (!isProcessing)
  749. return false;
  750. if (n2PurgeModeEnumStr == N2PurgeModeEnum.BoatLoad.ToString())
  751. {
  752. var isCheckO2Enbale = GetBoatLoadCheckO2DensityConfig();
  753. limitO2Data = GetBoatLoadLAO2CheckSV();
  754. return isCheckO2Enbale;
  755. }
  756. if (n2PurgeModeEnumStr == N2PurgeModeEnum.BoatUnLoad.ToString())
  757. {
  758. var isCheckO2Enbale = GetBoatUnLoadCheckO2DensityConfig();
  759. limitO2Data = GetBoatUnLoadLAO2CheckSV();
  760. return isCheckO2Enbale;
  761. }
  762. return false;
  763. }
  764. public string GetN2PurgeModeEnumByStr(string str)
  765. {
  766. if ((str == N2PurgeModeEnum.ATMMode.ToString()) || (str == N2PurgeModeEnum.ATMMode.ToDescription()) || (str.StartsWith("ATM")))
  767. {
  768. return N2PurgeModeEnum.ATMMode.ToString();
  769. }
  770. else if ((str == N2PurgeModeEnum.N2PurgeMode.ToString()) || (str == N2PurgeModeEnum.N2PurgeMode.ToDescription()) || (str.StartsWith("N2")))
  771. {
  772. return N2PurgeModeEnum.N2PurgeMode.ToString();
  773. }
  774. else
  775. {
  776. return GetLACurrectN2purgeMode();
  777. }
  778. }
  779. public string IsATMMode(string str)
  780. {
  781. if ((str == N2PurgeModeEnum.ATMMode.ToString()) || (str == N2PurgeModeEnum.ATMMode.ToDescription()) || (str.StartsWith("ATM")))
  782. {
  783. return N2PurgeModeEnum.ATMMode.ToString();
  784. }
  785. return str;
  786. }
  787. public double GetFoupEnterLAO2CheckSV()
  788. {
  789. return SC.ContainsItem("PM1.N2Purge.FoupEnter.LAO2CheckSV") ? SC.GetValue<double>("PM1.N2Purge.FoupEnter.LAO2CheckSV") : 20;
  790. }
  791. public double GetFoupEnterFOUPO2CheckSV()
  792. {
  793. return SC.ContainsItem("PM1.N2Purge.FoupEnter.FOUPO2CheckSV") ? SC.GetValue<double>("PM1.N2Purge.FoupEnter.FOUPO2CheckSV") : 20;
  794. }
  795. public bool GetFoupEnterFIMSN2purgeConfig()
  796. {
  797. return SC.ContainsItem("PM1.N2Purge.FoupEnter.FOUPN2PurgeEnable") ? SC.GetValue<bool>("PM1.N2Purge.FoupEnter.FOUPN2PurgeEnable") : false;
  798. }
  799. public double GetWaferChargeLAO2CheckSV()
  800. {
  801. return SC.ContainsItem("PM1.N2Purge.WaferCharge.LAO2CheckSV") ? SC.GetValue<double>("PM1.N2Purge.WaferCharge.LAO2CheckSV") : 20;
  802. }
  803. public double GetWaferChargeFOUPO2CheckSV()
  804. {
  805. return SC.ContainsItem("PM1.N2Purge.WaferCharge.FOUPO2CheckSV") ? SC.GetValue<double>("PM1.N2Purge.WaferCharge.FOUPO2CheckSV") : 20;
  806. }
  807. public bool GetWaferChargeFIMSN2purgeConfig()
  808. {
  809. return SC.ContainsItem("PM1.N2Purge.WaferCharge.FOUPN2PurgeEnable") ? SC.GetValue<bool>("PM1.N2Purge.WaferCharge.FOUPN2PurgeEnable") : false;
  810. }
  811. public bool GetBoatLoadCheckO2DensityConfig()
  812. {
  813. return SC.ContainsItem("PM1.N2Purge.BoatLoad.TransferRoomO2DensityCheckEnable") ? SC.GetValue<bool>("PM1.N2Purge.BoatLoad.TransferRoomO2DensityCheckEnable") : false;
  814. }
  815. public bool GetBoatUnLoadCheckO2DensityConfig()
  816. {
  817. return SC.ContainsItem("PM1.N2Purge.BoatUnLoad.TransferRoomO2DensityCheckEnable") ? SC.GetValue<bool>("PM1.N2Purge.BoatUnLoad.TransferRoomO2DensityCheckEnable") : false;
  818. }
  819. public bool GetBoatUnLoadEAxisInhibitEnableConfig()
  820. {
  821. return SC.ContainsItem("PM1.N2Purge.BoatUnLoad.EAxisInhibitEnable") ? SC.GetValue<bool>("PM1.N2Purge.BoatUnLoad.EAxisInhibitEnable") : false;
  822. }
  823. public bool GetBoatLoadEAxisInhibitEnableConfig()
  824. {
  825. return SC.ContainsItem("PM1.N2Purge.BoatLoad.EAxisInhibitEnable") ? SC.GetValue<bool>("PM1.N2Purge.BoatLoad.EAxisInhibitEnable") : false;
  826. }
  827. public double GetBoatUnLoadLAO2CheckSV()
  828. {
  829. return SC.ContainsItem("PM1.N2Purge.BoatUnLoad.LAO2CheckSV") ? SC.GetValue<double>("PM1.N2Purge.BoatUnLoad.LAO2CheckSV") : 20;
  830. }
  831. public double GetBoatLoadLAO2CheckSV()
  832. {
  833. return SC.ContainsItem("PM1.N2Purge.BoatLoad.LAO2CheckSV") ? SC.GetValue<double>("PM1.N2Purge.BoatLoad.LAO2CheckSV") : 20;
  834. }
  835. public double GetWaferDisChargeLAO2CheckSV()
  836. {
  837. return SC.ContainsItem("PM1.N2Purge.WaferDisCharge.LAO2CheckSV") ? SC.GetValue<double>("PM1.N2Purge.WaferDisCharge.LAO2CheckSV") : 20;
  838. }
  839. public double GetWaferDisChargeFOUPO2CheckSV()
  840. {
  841. return SC.ContainsItem("PM1.N2Purge.WaferDisCharge.FOUPO2CheckSV") ? SC.GetValue<double>("PM1.N2Purge.WaferDisCharge.FOUPO2CheckSV") : 20;
  842. }
  843. public bool GetWaferDisChargeFIMSN2purgeConfig()
  844. {
  845. return SC.ContainsItem("PM1.N2Purge.WaferDisCharge.FOUPN2PurgeEnable") ? SC.GetValue<bool>("PM1.N2Purge.WaferDisCharge.FOUPN2PurgeEnable") : false;
  846. }
  847. public string GetLACurrectN2purgeMode()
  848. {
  849. return SC.ContainsItem("PM1.SelectN2PurgeMode") ? SC.GetStringValue("PM1.SelectN2PurgeMode") : N2PurgeModeEnum.ManualMode.ToString();
  850. }
  851. }
  852. }