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- <?xml version="1.0" encoding="utf-8"?>
- <DataGroupConfig type="Furnace" xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance" >
- <DataGroup name="Process" display="" fix="true">
- <DataItem name="PM1.ProcessStepName" />
- <DataItem name="PM2.ProcessStepName" />
- <DataItem name="PM3.ProcessStepName" />
- <DataItem name="Buffer.IsOnline" />
- </DataGroup>
- <DataGroup name="SignalTower" display="Signal Tower" fix="true">
- <DataItem name ="System.IsAlarm" Red="On" Yellow="Off" Green="Off" Blue="Off" Buzzer="On"/>
- <DataItem name ="LP1.IndicatorError" Red="On" Yellow="Off" Green="Off" Blue="Off" Buzzer="On"/>
- <DataItem name ="LP2.IndicatorError" Red="On" Yellow="Off" Green="Off" Blue="Off" Buzzer="On"/>
- <DataItem name ="LP3.IndicatorError" Red="On" Yellow="Off" Green="Off" Blue="Off" Buzzer="On"/>
- <DataItem name ="LP4.IndicatorError" Red="On" Yellow="Off" Green="Off" Blue="Off" Buzzer="On"/>
- <DataItem name ="EFEM.IsError" Red="On" Yellow="Off" Green="Off" Blue="Off" Buzzer="On"/>
- <DataItem name ="PM1.IsError" Red="On" Yellow="Off" Green="Off" Blue="Off" Buzzer="On"/>
- <DataItem name ="PM2.IsError" Red="On" Yellow="Off" Green="Off" Blue="Off" Buzzer="On"/>
- <DataItem name ="System.IsBusy" Red="Off" Yellow="Off" Green="On" Blue="Off" Buzzer="Off"/>
- <DataItem name ="System.IsIdle" Red="Off" Yellow="On" Green="Off" Blue="Off" Buzzer="Off"/>
- <DataItem name ="System.IsWaitUnload" Red="Off" Yellow="Blinking" Green="Off" Blue="Off" Buzzer="Off"/>
- <DataItem name ="System.IsAutoRunning" Red="Off" Yellow="Off" Green="On" Blue="Off" Buzzer="Off"/>
- <DataItem name ="System.IsConnectedWithHost" Red="Off" Yellow="Off" Green="Off" Blue="On" Buzzer="Off"/>
- <DataItem name ="System.IsDisconnectWithHost" Red="Off" Yellow="Off" Green="Off" Blue="Off" Buzzer="Off"/>
- </DataGroup>
- <DataGroup name="UserDefine" display="" fix="false">
- <DataItem name="PM1.IsOnline" />
- <DataItem name="PM2.ProcessStepName" />
- <DataItem name="PM3.ProcessStepName" />
- <DataItem name="PM4.ProcessStepName" />
- </DataGroup>
- <DataGroup name="Fdc" display="" fix="true" visible="false">
- <DataItem name="PM1.RF.ForwardPower" control_name="RF.SetPower" />
- <DataItem name="PM2.RF.ForwardPower" control_name="RF.SetPower" />
- <DataItem name="PM1.Microwave.ForwardPower" control_name="Microwave.SetPower" />
- <DataItem name="PM2.Microwave.ForwardPower" control_name="Microwave.SetPower" />
- <DataItem name="PM1.Mfc1.Feedback" control_name="GasLine1.Flow" />
- <DataItem name="PM2.Mfc1.Feedback" control_name="GasLine1.Flow" />
- <DataItem name="PM1.Mfc2.Feedback" control_name="GasLine2.Flow" />
- <DataItem name="PM2.Mfc2.Feedback" control_name="GasLine2.Flow" />
- <DataItem name="PM1.Mfc3.Feedback" control_name="GasLine3.Flow" />
- <DataItem name="PM2.Mfc3.Feedback" control_name="GasLine3.Flow" />
-
- </DataGroup>
- </DataGroupConfig>
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