using Aitex.Core.RT.DataCenter; using Aitex.Core.RT.Device; using Aitex.Core.RT.Device.Unit; using Aitex.Core.RT.IOCore; using Aitex.Core.RT.Log; using Aitex.Core.RT.SCCore; using Aitex.Core.Util; using DocumentFormat.OpenXml.Packaging; using DocumentFormat.OpenXml.Spreadsheet; using FurnaceRT.Devices; using FurnaceRT.Equipments.PMs.Devices; using FurnaceRT.Extraction; using MECF.Framework.Common.CommonData.SorterDefines; using MECF.Framework.Common.Equipment; using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.LoadPorts.TDK; using System; using System.Collections.Generic; using System.Diagnostics; namespace FurnaceRT.Equipments.PMs { /// /// 分布类 定义N2Purge的执行逻辑 /// public partial class PMModule { private R_TRIG _trigN2UpRD = new R_TRIG(); private R_TRIG _trigN2DownRD = new R_TRIG(); private R_TRIG _trigN2AirUpRD = new R_TRIG(); private R_TRIG _trigN2AirDownRD = new R_TRIG(); private R_TRIG _trigN2AirDownTwoRD = new R_TRIG(); private R_TRIG _trigSelectN2PurgeModeD = new R_TRIG(); private Dictionary>>> _n2PurgeSequenceAction; private Dictionary> _n2PurgeSequenceStatus; private Dictionary _rTrigDict; private N2PurgeModeEnum _N2PurgeMode = N2PurgeModeEnum.Auto; private double _n2PurgeData = 20; private double _n2ToAirData = 185000; private N2PurgeModeEnum _currentPhase; private double _manualPhase2StabilityTime = 0; private double _manualPhase4StabilityTime = 0; private bool _enableAbortN2purge = true; private int _phase1CycleCount = 0; private int _phase1CycleCountSC = 0; private bool _canSwitchToPhase2 = true; private Dictionary _allTimeDict = new Dictionary(); private void InitN2PurgeData() { DATA.Subscribe($"{Module}.N2PurgeLimitData", () => GetN2PurgeLimitData()); DATA.Subscribe($"{Module}.O2DensityData", () => ConcentrationO2.Value.ToString("f3"), SubscriptionAttribute.FLAG.IgnoreSaveDB); DATA.Subscribe($"{Module}.CheckO2Location", () => GetCheckO2Location(), SubscriptionAttribute.FLAG.IgnoreSaveDB); DATA.Subscribe($"{Module}.O2SetCheckSetPoint", () => GetO2SetCheckSetPoint(), SubscriptionAttribute.FLAG.IgnoreSaveDB); DATA.Subscribe($"{Module}.N2PurgeMode", () => SC.ContainsItem("PM1.SelectN2PurgeMode") ? SC.GetStringValue("PM1.SelectN2PurgeMode") : ""); var selectN2PurgeMode = SC.ContainsItem("PM1.SelectN2PurgeMode") ? SC.GetStringValue("PM1.SelectN2PurgeMode") : ""; if (!string.IsNullOrEmpty(selectN2PurgeMode)) { if (selectN2PurgeMode != _N2PurgeMode.ToString()) { SetN2PurgeModeAction(selectN2PurgeMode); } } var currentPhase = SC.ContainsItem("PM1.SelectN2PurgeModePhase") ? SC.GetStringValue("PM1.SelectN2PurgeModePhase") : ""; if (!string.IsNullOrEmpty(currentPhase)) { var enumCurrentPhase = (N2PurgeModeEnum)Enum.Parse(typeof(N2PurgeModeEnum), currentPhase); _currentPhase = enumCurrentPhase; } } private void InitN2PurgeConfigData() { _n2PurgeData = SC.ContainsItem($"System.N2PurgeData") ? SC.GetValue("System.N2PurgeData") : 20; _n2ToAirData = SC.ContainsItem($"System.N2PurgeData") ? SC.GetValue("System.N2ToAirData") : 185000; _enableAbortN2purge = SC.ContainsItem($"PM1.N2Purge.EnableAbortN2purge") ? SC.GetValue("PM1.N2Purge.EnableAbortN2purge") : false; _manualPhase2StabilityTime = SC.ContainsItem($"PM1.N2Purge.Manual_phase2.StabilityTime") ? SC.GetValue("PM1.N2Purge.Manual_phase2.StabilityTime") : 0; _manualPhase4StabilityTime = SC.ContainsItem($"PM1.N2Purge.Manual_phase4.StabilityTime") ? SC.GetValue("PM1.N2Purge.Manual_phase4.StabilityTime") : 0; _phase1CycleCountSC = SC.ContainsItem($"PM1.N2Purge.Manual_phase1.CycleCount") ? SC.GetValue("PM1.N2Purge.Manual_phase1.CycleCount") : 0; _n2PurgeSequenceAction = ExtractionMethods.GetN2PurgeSequenceAction(); _n2PurgeSequenceStatus = new Dictionary>() { {"N2PurgeAIRTo20PPM",()=> GetN2PurgeAIRTo20PPMStatus()}, {"N2PurgeUnder20PPM",()=> GetN2PurgeUnder20PPMStatus()}, {"AIR",()=> GetN2PurgeAIRStatus()}, {"DoorOpen",()=> GetN2PurgeDoorOpenStatus()}, {"Foup1",()=> GetN2PurgeFoup1Status()}, {"Foup2",()=> GetN2PurgeFoup2Status()}, {N2PurgeModeEnum.Manual_phase1.ToString(),()=> CheckN2PurgePhase1() }, {N2PurgeModeEnum.Manual_phase2.ToString(),()=> CheckN2PurgePhase2()}, {N2PurgeModeEnum.Manual_phase3.ToString(),()=> CheckN2PurgePhase3() }, {N2PurgeModeEnum.Manual_phase4.ToString(),()=> CheckN2PurgePhase4() }, {N2PurgeModeEnum.Manual_phase5.ToString(),()=> CheckN2PurgePhase5() }, }; _allTimeDict = new Dictionary() { {N2PurgeModeEnum.Manual_phase1.ToString(),new Stopwatch() }, {N2PurgeModeEnum.Manual_phase2.ToString(),new Stopwatch()}, {N2PurgeModeEnum.Manual_phase3.ToString(),new Stopwatch()}, {N2PurgeModeEnum.Manual_phase4.ToString(),new Stopwatch() }, {N2PurgeModeEnum.Manual_phase5.ToString(),new Stopwatch() } }; _rTrigDict = new Dictionary(); } private void MonitorN2Purge() { var selectN2PurgeMode = SC.ContainsItem("PM1.SelectN2PurgeMode") ? SC.GetStringValue("PM1.SelectN2PurgeMode") : ""; if (string.IsNullOrEmpty(selectN2PurgeMode)) { return; } SetN2PurgeModeAction(selectN2PurgeMode); } private double GetN2PurgeLimitData() { if (_N2PurgeMode == N2PurgeModeEnum.N2PurgeMode) { if ((SensorO2DetectSideFIMS1 != null && SensorO2DetectSideFIMS1.Value) || (SensorO2DetectSideFIMS2 != null && SensorO2DetectSideFIMS2.Value)) { return (float)SC.GetValue("PM1.N2Purge.N2PurgeFOUPO2CheckSV"); } return _n2PurgeData; } if (_N2PurgeMode == N2PurgeModeEnum.ATMMode) { return _n2ToAirData; } return ConcentrationO2.Value; } private void SetN2PurgeModeAction(string selectN2PurgeMode) { _N2PurgeMode = (N2PurgeModeEnum)Enum.Parse(typeof(N2PurgeModeEnum), selectN2PurgeMode); if (_N2PurgeMode == N2PurgeModeEnum.N2PurgeMode) { if (_currentPhase == N2PurgeModeEnum.Manual_phase1) { if (CheckN2PurgePhase2() && _canSwitchToPhase2) { LOG.Info($" N2PurgeMode Trigger from Manual_phase1 to Manual_phase2,O2:{ConcentrationO2.Value}"); SetN2PurgeValveData(N2PurgeModeEnum.Manual_phase2.ToString()); } } else if (_currentPhase == N2PurgeModeEnum.Manual_phase2) { if (!_allTimeDict[N2PurgeModeEnum.Manual_phase2.ToString()].IsRunning && _canSwitchToPhase2) { _allTimeDict[N2PurgeModeEnum.Manual_phase2.ToString()].Restart(); } var second = _allTimeDict[N2PurgeModeEnum.Manual_phase2.ToString()].Elapsed.TotalSeconds; if (second >= _manualPhase2StabilityTime) { if (CheckN2PurgePhase1()) { LOG.Info($"N2PurgeMode Trigger Manual_phase1 was triggered {second} seconds later,O2:{ConcentrationO2.Value}"); N2PurgeFaileAlarm.Set(); _allTimeDict[N2PurgeModeEnum.Manual_phase2.ToString()].Restart(); _allTimeDict[N2PurgeModeEnum.Manual_phase2.ToString()].Stop(); _canSwitchToPhase2 = false; SetN2PurgeValveData(N2PurgeModeEnum.Manual_phase1.ToString()); } if (CheckN2PurgePhase2()) { LOG.Info($"N2PurgeMode Trigger Hold Manual_phase2 was triggered {second} seconds later,O2:{ConcentrationO2.Value}"); _allTimeDict[N2PurgeModeEnum.Manual_phase2.ToString()].Restart(); _allTimeDict[N2PurgeModeEnum.Manual_phase2.ToString()].Stop(); _canSwitchToPhase2 = false; } } } else { if (CheckN2PurgePhase1()) { LOG.Info($"N2PurgeMode Trigger Directly triggered Manual_phase1,O2:{ConcentrationO2.Value}"); SetN2PurgeValveData(N2PurgeModeEnum.Manual_phase1.ToString()); } else if (CheckN2PurgePhase2()) { LOG.Info($"N2PurgeMode Trigger Directly triggered Manual_phase2,O2:{ConcentrationO2.Value}"); SetN2PurgeValveData(N2PurgeModeEnum.Manual_phase2.ToString()); } } } if (_N2PurgeMode == N2PurgeModeEnum.ATMMode) { if (_currentPhase == N2PurgeModeEnum.Manual_phase3) { var checkResult = CheckN2PurgePhase4(); if (!_allTimeDict[N2PurgeModeEnum.Manual_phase4.ToString()].IsRunning) { _allTimeDict[N2PurgeModeEnum.Manual_phase4.ToString()].Restart(); } var second = _allTimeDict[N2PurgeModeEnum.Manual_phase4.ToString()].Elapsed.TotalSeconds; if (second >= _manualPhase4StabilityTime && checkResult) { LOG.Info($"N2PurgeMode Trigger from Manual_phase3 to Manual_phase4 is triggered {second} seconds later,O2:{ConcentrationO2.Value}"); SetN2PurgeValveData(N2PurgeModeEnum.Manual_phase4.ToString()); _allTimeDict[N2PurgeModeEnum.Manual_phase4.ToString()].Restart(); _allTimeDict[N2PurgeModeEnum.Manual_phase4.ToString()].Stop(); } } else if (_currentPhase == N2PurgeModeEnum.Manual_phase4) { if (CheckN2PurgePhase5()) { LOG.Info($"N2PurgeMode Trigger from Manual_phase4 to Manual_phase5,O2:{ConcentrationO2.Value}"); SetN2PurgeValveData(N2PurgeModeEnum.Manual_phase5.ToString()); } //if (CheckN2PurgePhase3( )) //{ // LOG.Info($"N2PurgeMode Trigger from Manual_phase4 to Manual_phase3,O2:{o2Value}"); // SetN2PurgeValveData(N2PurgeModeEnum.Manual_phase3.ToString()); //} } else if (_currentPhase == N2PurgeModeEnum.Manual_phase5) { if (CheckN2PurgePhase4()) { LOG.Info($"N2PurgeMode Trigger from Manual_phase5 to Manual_phase4,O2:{ConcentrationO2.Value}"); SetN2PurgeValveData(N2PurgeModeEnum.Manual_phase4.ToString()); } //if (CheckN2PurgePhase3( )) //{ // LOG.Info($"N2PurgeMode Trigger from Manual_phase5 to Manual_phase3,O2:{o2Value}"); // SetN2PurgeValveData(N2PurgeModeEnum.Manual_phase3.ToString()); //} } else { if (CheckN2PurgePhase3()) { LOG.Info($"N2PurgeMode Trigger Directly triggered Manual_phase3,O2:{ConcentrationO2.Value}"); SetN2PurgeValveData(N2PurgeModeEnum.Manual_phase3.ToString()); return; } if (CheckN2PurgePhase5()) { LOG.Info($"N2PurgeMode Trigger Directly triggered Manual_phase5,O2:{ConcentrationO2.Value}"); SetN2PurgeValveData(N2PurgeModeEnum.Manual_phase5.ToString()); return; } if (CheckN2PurgePhase4()) { LOG.Info($"N2PurgeMode Trigger Directly triggered Manual_phase4,O2:{ConcentrationO2.Value}"); SetN2PurgeValveData(N2PurgeModeEnum.Manual_phase4.ToString()); return; } } } if (_N2PurgeMode == N2PurgeModeEnum.ManualMode || _N2PurgeMode == N2PurgeModeEnum.Auto) { _currentPhase = _N2PurgeMode; } //switch (_N2PurgeMode) //{ // case N2PurgeModeEnum.Auto: // // 自动模式下的操作 // break; // case N2PurgeModeEnum.ManualMode: // break; // case N2PurgeModeEnum.N2PurgeMode: // ProcessPhase(_trigN2UpRD, N2PurgeModeEnum.Manual_phase1.ToString()); // ProcessPhase(_trigN2DownRD, N2PurgeModeEnum.Manual_phase2.ToString(), _manualPhase2NeedCheck, (int)(_manualPhase2StabilityTime * 1000)); // break; // case N2PurgeModeEnum.ATMMode: // ProcessPhase(_trigN2AirDownRD, N2PurgeModeEnum.Manual_phase3.ToString()); // ProcessPhase(_trigN2AirUpRD, N2PurgeModeEnum.Manual_phase4.ToString(), _manualPhase4NeedCheck, (int)(_manualPhase4StabilityTime * 1000)); // ProcessPhase(_trigN2AirDownTwoRD, N2PurgeModeEnum.Manual_phase5.ToString()); // break; //} } bool CheckConditionInTime(string modeKey, int millisecondsTimeout, Func condition) { var stopwatch = _allTimeDict[modeKey]; if (!_allTimeDict[modeKey].IsRunning) { _allTimeDict[modeKey].Restart(); } while (stopwatch.ElapsedMilliseconds < millisecondsTimeout) { if (!_allTimeDict[modeKey].IsRunning) { return true; } if (!condition()) { _allTimeDict[modeKey].Stop(); _allTimeDict[modeKey].Reset(); return false; } } if (stopwatch.ElapsedMilliseconds > millisecondsTimeout) { _allTimeDict[modeKey].Stop(); _allTimeDict[modeKey].Reset(); } return true; } private void ProcessPhase(R_TRIG r_TRIG, string modeKey, bool needCheck = false, int time = 0) { r_TRIG.CLK = needCheck ? (CheckConditionInTime(modeKey, time, () => _n2PurgeSequenceStatus[modeKey].Invoke())) : _n2PurgeSequenceStatus[modeKey].Invoke(); if (r_TRIG.Q) { LOG.Info($"N2PurgeMode Trigger {modeKey}!,O2:{ConcentrationO2.Value},time:{_allTimeDict[modeKey].ElapsedMilliseconds}"); SetN2PurgeValveData(modeKey); _allTimeDict[modeKey].Stop(); _allTimeDict[modeKey].Reset(); } } public void RestAllN2PrugeRD() { _trigN2AirDownRD.RST = false; _trigN2AirUpRD.RST = false; _trigN2DownRD.RST = false; _trigN2UpRD.RST = false; foreach (var item in _allTimeDict) { item.Value.Stop(); item.Value.Reset(); } _canSwitchToPhase2 = true; } private void SetN2PurgeValveData(string mode, string msg = "") { var value = _n2PurgeSequenceAction[mode]; _currentPhase = (N2PurgeModeEnum)Enum.Parse(typeof(N2PurgeModeEnum), mode); if (SC.ContainsItem("PM1.SelectN2PurgeModePhase")) { SC.SetItemValue("PM1.SelectN2PurgeModePhase", mode); } foreach (var operateItem in value.Item2) { if (operateItem.Item1 is IoMFC) { var ioMFc = (operateItem.Item1 as IoMFC); { ioMFc.SetMfcValue(out _, 0, new object[] { float.Parse(operateItem.Item2.ToString()) }); } } if (operateItem.Item1 is IoValve) { var ioValve = (operateItem.Item1 as IoValve); ioValve.TurnValve(bool.Parse(operateItem.Item2), out _); } if (operateItem.Item1 is IoTrigger) { var ioTrigger = (operateItem.Item1 as IoTrigger); ioTrigger.CheckAndSet(bool.Parse(operateItem.Item2), out _); } } } private bool SetN2PurgeMode(out string reason, int time, object[] param) { reason = string.Empty; var mode = param[0].ToString(); _N2PurgeMode = (N2PurgeModeEnum)Enum.Parse(typeof(N2PurgeModeEnum), mode); if (SC.ContainsItem("PM1.SelectN2PurgeMode")) { SC.SetItemValue("PM1.SelectN2PurgeMode", mode); } RestAllN2PrugeRD(); return true; } /// /// 获取当前O2检测位置的设定值 /// /// private string GetO2SetCheckSetPoint() { if (SensorO2DetectSideLA != null && SensorO2DetectSideLA.Value) { var key = "PM1.N2Purge.N2PurgeLAO2CheckSV"; if (SC.ContainsItem(key)) return SC.GetValue(key).ToString("f3"); } if ((SensorO2DetectSideFIMS1 != null && SensorO2DetectSideFIMS1.Value) || (SensorO2DetectSideFIMS2 != null && SensorO2DetectSideFIMS2.Value)) { var key = "PM1.N2Purge.N2PurgeFOUPO2CheckSV"; if (SC.ContainsItem(key)) return SC.GetValue(key).ToString("f3"); } return ""; } /// /// 获取当前O2检测位置 /// /// private string GetCheckO2Location() { if (SensorO2DetectSideLA != null && SensorO2DetectSideLA.Value) return SensorO2DetectSideLA.Display; if (SensorO2DetectSideFIMS1 != null && SensorO2DetectSideFIMS1.Value) return SensorO2DetectSideFIMS1.Display; if (SensorO2DetectSideFIMS2 != null && SensorO2DetectSideFIMS2.Value) return SensorO2DetectSideFIMS2.Display; return ""; } /// /// 获取当前O2浓度 /// /// private bool CheckN2PurgePhase1() { return ((int)ConcentrationO2.Value >= _n2PurgeData) && GetLADoorOpenStatus(); } private bool CheckN2PurgePhase2() { return ((int)ConcentrationO2.Value < _n2PurgeData) && GetLADoorOpenStatus(); } private bool CheckN2PurgePhase3() { return ((int)ConcentrationO2.Value) < _n2ToAirData && GetLADoorOpenStatus(); } private bool CheckN2PurgePhase5() { return ((int)ConcentrationO2.Value) >= _n2ToAirData && !GetLADoorOpenStatus(); } private bool CheckN2PurgePhase4() { return (((int)ConcentrationO2.Value)) >= _n2ToAirData && GetLADoorOpenStatus(); } private bool GetN2PurgeAIRTo20PPMStatus() { return ValveAV202.DOOpen.Value; } private bool GetN2PurgeUnder20PPMStatus(double value = 20) { return ConcentrationO2.Value < value; } private bool GetN2PurgeAIRStatus() { return ValveAV202.DOClose.Value && (AlarmSignalFilterBox1DoorSwitch != null ? !AlarmSignalFilterBox1DoorSwitch.Value : false); } private bool GetLADoorOpenStatus() { return (bool)(SensorLADoorSw1?.Value); } private bool GetN2PurgeDoorOpenStatus() { return ValveAV202.DOClose.Value && (AlarmSignalFilterBox1DoorSwitch != null ? !AlarmSignalFilterBox1DoorSwitch.Value : false); } private bool GetN2PurgeFoup1Status() { return GetN2PurgeAIRTo20PPMStatus() && GetN2PurgeUnder20PPMStatus() && FIMS1.IsFoupExist && FIMS1.CollisionAvoidanceUpDownStatus == DeviceStatus.Down; } private bool GetN2PurgeFoup2Status() { return GetN2PurgeAIRTo20PPMStatus() && GetN2PurgeUnder20PPMStatus() && FIMS2.IsFoupExist && FIMS2.CollisionAvoidanceUpDownStatus == DeviceStatus.Down; ; } public bool IsAbortN2purge() { if (!_enableAbortN2purge) { return false; } if (SensorSL02001gasboxdoorsw11.Value || SensorSL02001gasboxdoorsw12.Value || SensorSL02002gasboxdoorsw11.Value || SensorSL02002gasboxdoorsw12.Value || SensorSL05002LAdoorsw2.Value || SensorSL05004LAfurnacedoorsw.Value) { return true; } return false; } public void SetN2PurgeLAO2CheckFirstEnable(bool isEable) { if (TrigN2PurgeLAO2CheckFirstEnable != null && TrigN2PurgeLAO2CheckFirstEnable.Value != isEable) { TrigN2PurgeLAO2CheckFirstEnable.SetTrigger(isEable, out _); } } public void SetN2PurgeFIMS1O2CheckEnable(ModuleName fims, bool isEable) { if (fims == ModuleName.FIMS1 && TrigN2PurgeFIMS1O2CheckEnable != null && TrigN2PurgeFIMS1O2CheckEnable.Value != isEable) { TrigN2PurgeFIMS1O2CheckEnable.SetTrigger(isEable, out _); } if (fims == ModuleName.FIMS2 && TrigN2PurgeFIMS2O2CheckEnable != null && TrigN2PurgeFIMS2O2CheckEnable.Value != isEable) { TrigN2PurgeFIMS2O2CheckEnable.SetTrigger(isEable, out _); } } public void SetN2PurgeProcess(bool isEable) { if (TrigN2PurgeProcess != null && TrigN2PurgeProcess.Value != isEable) { TrigN2PurgeProcess.SetTrigger(isEable, out _); } } public void SetN2PurgeLAO2CheckSV(float value) { if (TrigN2PurgeLAO2CheckSV != null) TrigN2PurgeLAO2CheckSV?.SetAOTrigger(value, out _); } public void SetN2PurgeFOUPO2CheckSV(float value) { if (TrigN2PurgeFOUPO2CheckSV != null) TrigN2PurgeFOUPO2CheckSV?.SetAOTrigger(value, out _); } public bool FIMSLoadCheckLAO2(out string reason) { var scLAO2 = (float)SC.GetValue("PM1.N2Purge.N2PurgeLAO2CheckSV"); reason = $"LA O2 concentration has not reached below {scLAO2}ppm"; if (SensorO2DetectSideLA == null || !SensorO2DetectSideLA.Value) { reason = $"Oxygen analyzer not switched to LA"; return false; } return ((int)(ConcentrationO2.Value)) < scLAO2; } public void SetAVParameter(ModuleName fims, bool isEable) { if (fims == ModuleName.FIMS1) { var avValve58 = DEVICE.GetDevice($"{ModuleName.PM1}.ValveAV58"); avValve58?.TurnValve(isEable, out _); } if (fims == ModuleName.FIMS2) { var avValve59 = DEVICE.GetDevice($"{ModuleName.PM1}.ValveAV59"); avValve59?.TurnValve(isEable, out _); } } /// /// N2Purge相关时间参数,电气要求设定为秒,实际下发按照毫秒 /// public void SetN2PurgeParameters() { if (SC.ContainsItem("PM1.N2Purge.TransferRoomArrivalWaitTime") && TrigN2PurgeLAO2CheckTime != null) { var time = (float)SC.GetValue("PM1.N2Purge.TransferRoomArrivalWaitTime"); TrigN2PurgeLAO2CheckTime.SetAOTrigger(time, out _); } if (SC.ContainsItem("PM1.N2Purge.TransferRoomStableWaitTime") && TrigN2PurgeLAO2OverTime != null) { var time = (float)SC.GetValue("PM1.N2Purge.TransferRoomStableWaitTime"); TrigN2PurgeLAO2OverTime.SetAOTrigger(time, out _); } if (SC.ContainsItem("PM1.N2Purge.FOUPOpenerArrivalWaitTime") && TrigN2PurgeFOUPO2CheckTime != null) { var time = (float)SC.GetValue("PM1.N2Purge.FOUPOpenerArrivalWaitTime"); TrigN2PurgeFOUPO2CheckTime.SetAOTrigger(time, out _); } if (SC.ContainsItem("PM1.N2Purge.FOUPOpenerStableWaitTime") && TrigN2PurgeFOUPO2OverTime != null) { var time = (float)SC.GetValue("PM1.N2Purge.FOUPOpenerStableWaitTime"); TrigN2PurgeFOUPO2OverTime.SetAOTrigger(time, out _); } if (SC.ContainsItem("PM1.N2Purge.O2DetectorTransferRoomToFOUPTime") && TrigN2PurgeExchangeLATOFOUPWaitTime != null) { var time = (float)SC.GetValue("PM1.N2Purge.O2DetectorTransferRoomToFOUPTime"); TrigN2PurgeExchangeLATOFOUPWaitTime.SetAOTrigger(time, out _); } if (SC.ContainsItem("PM1.N2Purge.O2DetectorFOUPToTransferRoomTime") && TrigN2PurgeExchangeFOUPTOLAWaitTime != null) { var time = (float)SC.GetValue("PM1.N2Purge.O2DetectorFOUPToTransferRoomTime"); TrigN2PurgeExchangeFOUPTOLAWaitTime.SetAOTrigger(time, out _); } if (SC.ContainsItem("PM1.N2Purge.O2DetectorFOUPToFOUPTime") && TrigN2PurgeExchangeFOUPTOFOUPWaitTime != null) { var time = (float)SC.GetValue("PM1.N2Purge.O2DetectorFOUPToFOUPTime"); TrigN2PurgeExchangeFOUPTOFOUPWaitTime.SetAOTrigger(time, out _); } SetN2PurgeLAO2CheckSV((float)SC.GetValue("PM1.N2Purge.N2PurgeLAO2CheckSV")); SetN2PurgeFOUPO2CheckSV((float)SC.GetValue("PM1.N2Purge.N2PurgeFOUPO2CheckSV")); } public void InitN2PurgeMode(string n2PurgeModeStr, bool isN2Purge) { if (SC.ContainsItem("PM1.RecipeRelevancyN2Purge") && SC.GetValue("PM1.RecipeRelevancyN2Purge") && SC.ContainsItem("PM1.SelectN2PurgeMode")) { if (!isN2Purge) { SC.SetItemValueFromString("PM1.SelectN2PurgeMode", N2PurgeModeEnum.ManualMode.ToString()); } else { var setValue = GetN2PurgeModeEnumByStr(n2PurgeModeStr); SC.SetItemValueFromString("PM1.SelectN2PurgeMode", setValue); } RestAllN2PrugeRD(); } } } }