using Aitex.Core.Common.DeviceData; using Aitex.Core.RT.Device; using Aitex.Core.RT.Device.Unit; using Aitex.Core.RT.Event; using Aitex.Core.Util; using Aitex.Core.Utilities; using MECF.Framework.Common.Event; using System; using System.Collections.Generic; using System.Linq; using System.Reflection; using MECF.Framework.Common.SubstrateTrackings; using Aitex.Core.Common; using FurnaceRT.Equipments.Systems; using Aitex.Core.RT.IOCore; using MECF.Framework.Common.Equipment; using MECF.Framework.RT.Core.IoProviders; using MECF.Framework.Common.Device.Bases; using FurnaceRT.Equipments.Boats; using IoHeater = FurnaceRT.Devices.IoHeater; using IoPressureMeter = FurnaceRT.Devices.IoPressureMeter; using FurnaceRT.Devices; using Aitex.Core.RT.Log; using FurnaceRT.Equipments.PMs.Devices; using Aitex.Core.RT.SCCore; using static Aitex.Core.RT.Device.Unit.IoBoat; namespace FurnaceRT.Equipments.PMs { public partial class PMModule { // ------------------------------------------------------------------------- #region AlarmSignal [Tag("AlarmSignalO2ConcentrationHI")] public IoAlarmSignal AlarmSignalO2ConcentrationHI { get; set; } [Tag("AlarmSignalO2ConcentrationLow")] public IoAlarmSignal AlarmSignalO2ConcentrationLow { get; set; } [Tag("AlarmSignalO2ConcentrationEcho1")] public IoAlarmSignal AlarmSignalO2ConcentrationEcho1 { get; set; } [Tag("AlarmSignalO2ConcentrationEcho2")] public IoAlarmSignal AlarmSignalO2ConcentrationEcho2 { get; set; } [Tag("AlarmSignalSMK1DetectorSensorOperates")] public IoAlarmSignal AlarmSignalSMK1DetectorSensorOperates { get; set; } [Tag("AlarmSignalSMK1DetectorSensorFireAlarm")] public IoAlarmSignal AlarmSignalSMK1DetectorSensorFireAlarm { get; set; } [Tag("AlarmSignalSMK1DetectorSensorFault")] public IoAlarmSignal AlarmSignalSMK1DetectorSensorFault { get; set; } [Tag("AlarmSignalHCLGasLeak1stAlarm")] public IoAlarmSignal AlarmSignalHCLGasLeak1stAlarm { get; set; } [Tag("AlarmSignalHCLGasLeak2ndAlarm")] public IoAlarmSignal AlarmSignalHCLGasLeak2ndAlarm { get; set; } [Tag("AlarmSignalNH3GasLeak1stAlarm")] public IoAlarmSignal AlarmSignalNH3GasLeak1stAlarm { get; set; } [Tag("AlarmSignalNH3GasLeak2ndAlarm")] public IoAlarmSignal AlarmSignalNH3GasLeak2ndAlarm { get; set; } [Tag("AlarmSignalF2GasLeak1stAlarm")] public IoAlarmSignal AlarmSignalF2GasLeak1stAlarm { get; set; } [Tag("AlarmSignalF2GasLeak2ndAlarm")] public IoAlarmSignal AlarmSignalF2GasLeak2ndAlarm { get; set; } [Tag("AlarmSignalGasLeakFault")] public IoAlarmSignal AlarmSignalGasLeakFault { get; set; } [Tag("AlarmSignalTS34RotationTempSW")] public IoAlarmSignal AlarmSignalTS34RotationTempSW { get; set; } [Tag("AlarmSignalTS30CapInsideTempSW")] public IoAlarmSignal AlarmSignalTS30CapInsideTempSW { get; set; } [Tag("AlarmSignalTS31CapOutsideTempSW")] public IoAlarmSignal AlarmSignalTS31CapOutsideTempSW { get; set; } [Tag("AlarmSignalGasBoxLowerDoorSW")] public IoAlarmSignal AlarmSignalGasBoxLowerDoorSW { get; set; } [Tag("AlarmSignalGasBoxUpperDoorSW")] public IoAlarmSignal AlarmSignalGasBoxUpperDoorSW { get; set; } [Tag("AlarmSignalEXHBoxWaterLeak")] public IoAlarmSignal AlarmSignalEXHBoxWaterLeak { get; set; } [Tag("AlarmSignalOPPanelEMO1")] public IoAlarmSignal AlarmSignalOPPanelEMO1 { get; set; } [Tag("AlarmSignalOPPanelEMO2")] public IoAlarmSignal AlarmSignalOPPanelEMO2 { get; set; } [Tag("AlarmSignalMainFurnaceCellingTS306")] public IoAlarmSignal AlarmSignalMainFurnaceCellingTS306 { get; set; } [Tag("AlarmSignalHeaterRoomSWS11S12")] public IoAlarmSignal AlarmSignalHeaterRoomSWS11S12 { get; set; } [Tag("AlarmSignalFilterBox1DoorSwitch")] public IoAlarmSignal AlarmSignalFilterBox1DoorSwitch { get; set; } [Tag("AlarmSignalLABacksideDoorSwitch")] public IoAlarmSignal AlarmSignalLABacksideDoorSwitch { get; set; } [Tag("AlarmSignalRHCTS305")] public IoAlarmSignal AlarmSignalRHCTS305 { get; set; } [Tag("AlarmSignalGasBoxExhaust1stAlarmMS2")] public IoAlarmSignal AlarmSignalGasBoxExhaust1stAlarmMS2 { get; set; } [Tag("AlarmSignalGasBoxExhaust2ndAlarmMS2")] public IoAlarmSignal AlarmSignalGasBoxExhaust2ndAlarmMS2 { get; set; } [Tag("AlarmSignalMachineEMO1")] public IoAlarmSignal AlarmSignalMachineEMO1 { get; set; } [Tag("AlarmSignalMachineEMO2")] public IoAlarmSignal AlarmSignalMachineEMO2 { get; set; } [Tag("AlarmSignalT101TempStatus")] public IoAlarmSignal AlarmSignalT101TempStatus { get; set; } [Tag("AlarmSignalT102TempStatus")] public IoAlarmSignal AlarmSignalT102TempStatus { get; set; } [Tag("AlarmSignalT103TempStatus")] public IoAlarmSignal AlarmSignalT103TempStatus { get; set; } [Tag("AlarmSignalBufferMotorHardwareInterlockAlarm")] public IoAlarmSignal AlarmSignalBufferMotorHardwareInterlockAlarm { get; set; } [Tag("AlarmSignalBoatLiftMotorHardwareInterlockAlarm")] public IoAlarmSignal AlarmSignalBoatLiftMotorHardwareInterlockAlarm { get; set; } [Tag("AlarmSignalHFReconciliationPressureMinAbnormal")] public IoAlarmSignal AlarmSignalHFReconciliationPressureMinAbnormal { get; set; } [Tag("AlarmSignalMagneticFluidLeak")] public IoAlarmSignal AlarmSignalMagneticFluidLeak { get; set; } [Tag("AlarmSignalCoolingWaterLeak")] public IoAlarmSignal AlarmSignalCoolingWaterLeak { get; set; } [Tag("AlarmSignalMachineEMS1")] public IoAlarmSignal AlarmSignalMachineEMS1 { get; set; } [Tag("AlarmSignalMachineEMS2")] public IoAlarmSignal AlarmSignalMachineEMS2 { get; set; } [Tag("AlarmSignalFBLightCurtainFault")] public IoAlarmSignal AlarmSignalFBLightCurtainFault { get; set; } [Tag("AlarmSignalFBLightCurtainOSSD1")] public IoAlarmSignal AlarmSignalFBLightCurtainOSSD1 { get; set; } [Tag("AlarmSignalFBLightCurtainOSSD2")] public IoAlarmSignal AlarmSignalFBLightCurtainOSSD2 { get; set; } [Tag("AlarmSignalFBEMO1")] public IoAlarmSignal AlarmSignalFBEMO1 { get; set; } [Tag("AlarmSignalFBEMO2")] public IoAlarmSignal AlarmSignalFBEMO2 { get; set; } [Tag("AlarmSignalDoorOverride")] public IoAlarmSignal AlarmSignalDoorOverride { get; set; } [Tag("AlarmSignalFBFrontDoorSwitch")] public IoAlarmSignal AlarmSignalFBFrontDoorSwitch { get; set; } [Tag("AlarmSignalGLBoxPG1CNT1Alarm")] public IoAlarmSignal AlarmSignalGLBoxPG1CNT1Alarm { get; set; } [Tag("AlarmSignalGLBoxPG1CNT2Alarm")] public IoAlarmSignal AlarmSignalGLBoxPG1CNT2Alarm { get; set; } [Tag("AlarmSignalGLBoxPG2CNT1Alarm")] public IoAlarmSignal AlarmSignalGLBoxPG2CNT1Alarm { get; set; } [Tag("AlarmSignalGLBoxPG2CNT2Alarm")] public IoAlarmSignal AlarmSignalGLBoxPG2CNT2Alarm { get; set; } [Tag("AlarmSignalGLBoxPG3CNT1Alarm")] public IoAlarmSignal AlarmSignalGLBoxPG3CNT1Alarm { get; set; } [Tag("AlarmSignalGLBoxPG3CNT2Alarm")] public IoAlarmSignal AlarmSignalGLBoxPG3CNT2Alarm { get; set; } [Tag("AlarmSignalGLBoxPG4CNT1Alarm")] public IoAlarmSignal AlarmSignalGLBoxPG4CNT1Alarm { get; set; } [Tag("AlarmSignalGLBoxPG4CNT2Alarm")] public IoAlarmSignal AlarmSignalGLBoxPG4CNT2Alarm { get; set; } [Tag("AlarmSignalGLBoxPG5CNT1Alarm")] public IoAlarmSignal AlarmSignalGLBoxPG5CNT1Alarm { get; set; } [Tag("AlarmSignalGLBoxPG5CNT2Alarm")] public IoAlarmSignal AlarmSignalGLBoxPG5CNT2Alarm { get; set; } [Tag("AlarmSignalGLBoxPG6CNT1Alarm")] public IoAlarmSignal AlarmSignalGLBoxPG6CNT1Alarm { get; set; } [Tag("AlarmSignalGLBoxPG6CNT2Alarm")] public IoAlarmSignal AlarmSignalGLBoxPG6CNT2Alarm { get; set; } [Tag("AlarmSignalGLBoxVG21Status")] public IoAlarmSignal AlarmSignalGLBoxVG21Output1 { get; set; } [Tag("AlarmSignalGLBoxVG21Output2")] public IoAlarmSignal AlarmSignalGLBoxVG21Output2 { get; set; } [Tag("AlarmSignalGLBoxVG22Output1")] public IoAlarmSignal AlarmSignalGLBoxVG22Output1 { get; set; } [Tag("AlarmSignalGLBoxVG22Output2")] public IoAlarmSignal AlarmSignalGLBoxVG22Output2 { get; set; } [Tag("AlarmSignalGLBoxVG32Output1")] public IoAlarmSignal AlarmSignalGLBoxVG32Output1 { get; set; } [Tag("AlarmSignalGLBoxVG32Output2")] public IoAlarmSignal AlarmSignalGLBoxVG32Output2 { get; set; } [Tag("AlarmSignalGLBoxVG33Output1")] public IoAlarmSignal AlarmSignalGLBoxVG33Output1 { get; set; } [Tag("AlarmSignalGLBoxVG33Output2")] public IoAlarmSignal AlarmSignalGLBoxVG33Output2 { get; set; } [Tag("AlarmSignalHeatingExhaust1stAlarmMS1")] public IoAlarmSignal AlarmSignalHeatingExhaust1stAlarmMS1 { get; set; } [Tag("AlarmSignalHeatingExhaust2ndAlarmMS1")] public IoAlarmSignal AlarmSignalHeatingExhaust2ndAlarmMS1 { get; set; } [Tag("AlarmSignalScavengeExhaust1stAlarmMS3")] public IoAlarmSignal AlarmSignalScavengeExhaust1stAlarmMS3 { get; set; } [Tag("AlarmSignalScavengeExhaust2ndAlarmMS3")] public IoAlarmSignal AlarmSignalScavengeExhaust2ndAlarmMS3 { get; set; } [Tag("AlarmSignalValveBoxExhaust1stAlarmMS4")] public IoAlarmSignal AlarmSignalValveBoxExhaust1stAlarmMS4 { get; set; } [Tag("AlarmSignalValveBoxExhaust2ndAlarmMS4")] public IoAlarmSignal AlarmSignalValveBoxExhaust2ndAlarmMS4 { get; set; } [Tag("AlarmSignalLoadingAreaExhaust1stAlarmMS5")] public IoAlarmSignal AlarmSignalLoadingAreaExhaust1stAlarmMS5 { get; set; } [Tag("AlarmSignalLoadingAreaExhaust2ndAlarmMS5")] public IoAlarmSignal AlarmSignalLoadingAreaExhaust2ndAlarmMS5 { get; set; } [Tag("AlarmSignalFrontBodyExhaust1stAlarmMS6")] public IoAlarmSignal AlarmSignalFrontBodyExhaust1stAlarmMS6 { get; set; } [Tag("AlarmSignalFrontBodyExhaust2ndAlarmMS6")] public IoAlarmSignal AlarmSignalFrontBodyExhaust2ndAlarmMS6 { get; set; } [Tag("AlarmSignalLAExhaust1stAlarmMS7")] public IoAlarmSignal AlarmSignalLAExhaust1stAlarmMS7 { get; set; } [Tag("AlarmSignalLAExhaust2ndAlarmMS7")] public IoAlarmSignal AlarmSignalLAExhaust2ndAlarmMS7 { get; set; } [Tag("AlarmSignalRHC1stAlarmMS8")] public IoAlarmSignal AlarmSignalRHC1stAlarmMS8 { get; set; } [Tag("AlarmSignalRHC2ndAlarmMS8")] public IoAlarmSignal AlarmSignalRHC2ndAlarmMS8 { get; set; } [Tag("AlarmSignalREV1stAlarmMS9")] public IoAlarmSignal AlarmSignalREV1stAlarmMS9 { get; set; } [Tag("AlarmSignalREV2ndAlarmMS9")] public IoAlarmSignal AlarmSignalREV2ndAlarmMS9 { get; set; } [Tag("AlarmSignalREV1stAlarmMS10")] public IoAlarmSignal AlarmSignalREV1stAlarmMS10 { get; set; } [Tag("AlarmSignalREV2ndAlarmMS10")] public IoAlarmSignal AlarmSignalREV2ndAlarmMS10 { get; set; } [Tag("AlarmSignalOPBoxPS11Out1")] public IoAlarmSignal AlarmSignalOPBoxPS11Out1 { get; set; } [Tag("AlarmSignalOPBoxPS11Out2")] public IoAlarmSignal AlarmSignalOPBoxPS11Out2 { get; set; } [Tag("AlarmSignalRHCFlowAlarmFL901")] public IoAlarmSignal AlarmSignalRHCFlowAlarmFL901 { get; set; } [Tag("AlarmSignalCoolingWaterFlowAlarmOfFurnaceFL902")] public IoAlarmSignal AlarmSignalCoolingWaterFlowAlarmOfFurnaceFL902 { get; set; } [Tag("AlarmSignalCoolingWaterFlowAlarmOfShuttleFL903")] public IoAlarmSignal AlarmSignalCoolingWaterFlowAlarmOfShuttleFL903 { get; set; } [Tag("AlarmSignalCoolingWaterFlowAlarmOfBoatRotationFL904")] public IoAlarmSignal AlarmSignalCoolingWaterFlowAlarmOfBoatRotationFL904 { get; set; } [Tag("AlarmSignalCoolingWaterFlowAlarmOfFlangeFL905")] public IoAlarmSignal AlarmSignalCoolingWaterFlowAlarmOfFlangeFL905 { get; set; } [Tag("AlarmSignalCoolingWaterFlowAlarmOfLoadingAreaFL906")] public IoAlarmSignal AlarmSignalCoolingWaterFlowAlarmOfLoadingAreaFL906 { get; set; } [Tag("AlarmSignalVG11LowAlarm")] public IoAlarmSignal AlarmSignalVG11LowAlarm { get; set; } [Tag("AlarmSignalVG11HighAlarm")] public IoAlarmSignal AlarmSignalVG11HighAlarm { get; set; } [Tag("AlarmSignalVG12LowAlarm")] public IoAlarmSignal AlarmSignalVG12LowAlarm { get; set; } [Tag("AlarmSignalVG12HighAlarm")] public IoAlarmSignal AlarmSignalVG12HighAlarm { get; set; } [Tag("AlarmSignalVG13LowAlarm")] public IoAlarmSignal AlarmSignalVG13LowAlarm { get; set; } [Tag("AlarmSignalVG13HighAlarm")] public IoAlarmSignal AlarmSignalVG13HighAlarm { get; set; } [Tag("AlarmSignalPG12OUT1")] public IoAlarmSignal AlarmSignalPG12OUT1 { get; set; } [Tag("AlarmSignalPG12OUT2")] public IoAlarmSignal AlarmSignalPG12OUT2 { get; set; } [Tag("AlarmSignalPG13OUT1")] public IoAlarmSignal AlarmSignalPG13OUT1 { get; set; } [Tag("AlarmSignalPG13OUT2")] public IoAlarmSignal AlarmSignalPG13OUT2 { get; set; } [Tag("AlarmSignalPS14OUT1")] public IoAlarmSignal AlarmSignalPS14OUT1 { get; set; } [Tag("AlarmSignalPS14OUT2")] public IoAlarmSignal AlarmSignalPS14OUT2 { get; set; } [Tag("AlarmSignalCoolingWaterPressureOut1")] public IoAlarmSignal AlarmSignalCoolingWaterPressureOut1 { get; set; } [Tag("AlarmSignalCoolingWaterPressureOut2")] public IoAlarmSignal AlarmSignalCoolingWaterPressureOut2 { get; set; } [Tag("AlarmSignalAirFlowFL70")] public IoAlarmSignal AlarmSignalAirFlowFL70 { get; set; } [Tag("AlarmSignalAirFlowFL71")] public IoAlarmSignal AlarmSignalAirFlowFL71 { get; set; } [Tag("AlarmSignalAirFlowFL72")] public IoAlarmSignal AlarmSignalAirFlowFL72 { get; set; } [Tag("AlarmSignalWaterFlowFL62")] public IoAlarmSignal AlarmSignalWaterFlowFL62 { get; set; } [Tag("AlarmSignalUPSFault")] public IoAlarmSignal AlarmSignalUPSFault { get; set; } [Tag("AlarmSignalUPSAlarm")] public IoAlarmSignal AlarmSignalUPSAlarm { get; set; } [Tag("AlarmSignalK141UPSAlarm")] public IoAlarmSignal AlarmSignalK141UPSAlarm { get; set; } [Tag("AlarmSignalK169UPSAlarm")] public IoAlarmSignal AlarmSignalK169UPSAlarm { get; set; } [Tag("AlarmSignalN2PurgeBOXPG14CNT1")] public IoAlarmSignal AlarmSignalN2PurgeBOXPG14CNT1 { get; set; } [Tag("AlarmSignalN2PurgeBOXPG14CNT2")] public IoAlarmSignal AlarmSignalN2PurgeBOXPG14CNT2 { get; set; } [Tag("AlarmSignalN2PurgeBOXPG15CNT1")] public IoAlarmSignal AlarmSignalN2PurgeBOXPG15CNT1 { get; set; } [Tag("AlarmSignalN2PurgeBOXPG15CNT2")] public IoAlarmSignal AlarmSignalN2PurgeBOXPG15CNT2 { get; set; } [Tag("AlarmSignalN2PurgeBOXPG16CNT1")] public IoAlarmSignal AlarmSignalN2PurgeBOXPG16CNT1 { get; set; } [Tag("AlarmSignalN2PurgeBOXPG16CNT2")] public IoAlarmSignal AlarmSignalN2PurgeBOXPG16CNT2 { get; set; } [Tag("AlarmSignalN2PurgeBOXPG70CNT1")] public IoAlarmSignal AlarmSignalN2PurgeBOXPG70CNT1 { get; set; } [Tag("AlarmSignalN2PurgeBOXPG70CNT2")] public IoAlarmSignal AlarmSignalN2PurgeBOXPG70CNT2 { get; set; } [Tag("AlarmSignalPS17ValueLowLimitAlarm")] public IoAlarmSignal AlarmSignalPS17ValueLowLimitAlarm { get; set; } [Tag("AlarmSignalVaccumPumpWarning")] public IoAlarmSignal AlarmSignalVaccumPumpWarning { get; set; } [Tag("AlarmSignalVaccumPumpAlarm")] public IoAlarmSignal AlarmSignalVaccumPumpAlarm { get; set; } [Tag("AlarmSignalFilterBox1Fan1Alarm")] public IoAlarmSignal AlarmSignalFilterBox1Fan1Alarm { get; set; } [Tag("AlarmSignalFilterBox1Fan2Alarm")] public IoAlarmSignal AlarmSignalFilterBox1Fan2Alarm { get; set; } [Tag("AlarmSignalStepperMotorAlarm")] public IoAlarmSignal AlarmSignalStepperMotorAlarm { get; set; } [Tag("AlarmSignalRFAlarm")] public IoAlarmSignal AlarmSignalRFAlarm { get; set; } [Tag("AlarmSignalForelineHeaterJacketLightAlarm")] public IoAlarmSignal AlarmSignalForelineHeaterJacketLightAlarm { get; set; } [Tag("AlarmSignalForelineHeaterJacketHeavyAlarm")] public IoAlarmSignal AlarmSignalForelineHeaterJacketHeavyAlarm { get; set; } [Tag("AlarmSignalScrubberWarning")] public IoAlarmSignal AlarmSignalScrubberWarning { get; set; } [Tag("AlarmSignalScrubberAlarm")] public IoAlarmSignal AlarmSignalScrubberAlarm { get; set; } [Tag("AlarmSignalNegLmtPosBoatZAxis")] public IoAlarmSignal AlarmSignalNegLmtPosBoatZAxis { get; set; } [Tag("AlarmSignalPotLmtPosBoatZAxis")] public IoAlarmSignal AlarmSignalPotLmtPosBoatZAxis { get; set; } [Tag("AlarmSignalLAFFUCommAlarm")] public IoAlarmSignal AlarmSignalLAFFUCommAlarm { get; set; } [Tag("AlarmSignaAPCCommAlarm")] public IoAlarmSignal AlarmSignaAPCCommAlarm { get; set; } [Tag("AlarmSignalMINI8CommAlarm")] public IoAlarmSignal AlarmSignalMINI8CommAlarm { get; set; } [Tag("AlarmSignaMainWaterFlowAlarm")] public IoAlarmSignal AlarmSignaMainWaterFlowAlarm { get; set; } [Tag("AlarmSignalFurnaceMainCircuitBreakerStatusMonitor")] public IoAlarmSignal AlarmSignalFurnaceMainCircuitBreakerStatusMonitor { get; set; } [Tag("AlarmSignalPumpDown")] public IoAlarmSignal AlarmSignalPumpDown { get; set; } [Tag("AlarmSignalPS13HStatus")] public IoAlarmSignal AlarmSignalPS13HStatus { get; set; } [Tag("AlarmSignalPS13LStatus")] public IoAlarmSignal AlarmSignalPS13LStatus { get; set; } [Tag("AlarmSignalFFU1DataWriteError")] public IoAlarmSignal AlarmSignalFFU1DataWriteError { get; set; } [Tag("AlarmSignalFFU2DataWriteError")] public IoAlarmSignal AlarmSignalFFU2DataWriteError { get; set; } [Tag("AlarmSignalFFU3DataWriteError")] public IoAlarmSignal AlarmSignalFFU3DataWriteError { get; set; } [Tag("AlarmSignalFFU4DataWriteError")] public IoAlarmSignal AlarmSignalFFU4DataWriteError { get; set; } [Tag("AlarmSignalFFU5DataWriteError")] public IoAlarmSignal AlarmSignalFFU5DataWriteError { get; set; } [Tag("AlarmSignalFFU6DataWriteError")] public IoAlarmSignal AlarmSignalFFU6DataWriteError { get; set; } [Tag("AlarmSignalFFU7DataWriteError")] public IoAlarmSignal AlarmSignalFFU7DataWriteError { get; set; } [Tag("AlarmSignalFFU8DataWriteError")] public IoAlarmSignal AlarmSignalFFU8DataWriteError { get; set; } [Tag("AlarmSignalFFU9DataWriteError")] public IoAlarmSignal AlarmSignalFFU9DataWriteError { get; set; } [Tag("AlarmSignalDG1Output1")] public IoAlarmSignal AlarmSignalDG1Output1 { get; set; } [Tag("AlarmSignalDG1Output2")] public IoAlarmSignal AlarmSignalDG1Output2 { get; set; } [Tag("AlarmSignalAV91_1RHCAirInOpened")] public IoAlarmSignal AlarmSignalAV91_1RHCAirInOpened { get; set; } [Tag("AlarmSignalAV91_2RHCAirInOpened")] public IoAlarmSignal AlarmSignalAV91_2RHCAirInOpened { get; set; } [Tag("AlarmSignalAV91_3RHCAirInOpened")] public IoAlarmSignal AlarmSignalAV91_3RHCAirInOpened { get; set; } [Tag("AlarmSignalAV91_4RHCAirInOpened")] public IoAlarmSignal AlarmSignalAV91_4RHCAirInOpened { get; set; } [Tag("AlarmSignalBlowerPower")] public IoAlarmSignal AlarmSignalBlowerPower { get; set; } [Tag("AlarmSignalRFSetPowerReached")] public IoAlarmSignal AlarmSignalRFSetPowerReached { get; set; } [Tag("AlarmSignalN2FlowInFOUPAbnormal")] public IoAlarmSignal AlarmSignalN2FlowInFOUPAbnormal { get; set; } [Tag("AlarmSignalCapHeaterAbnormal")] public IoAlarmSignal AlarmSignalCapHeaterAbnormal { get; set; } [Tag("AlarmSignalHeaterUOverTemp")] public IoAlarmSignal AlarmSignalHeaterUOverTemp { get; set; } [Tag("AlarmSignalHeaterCUOverTemp")] public IoAlarmSignal AlarmSignalHeaterCUOverTemp { get; set; } [Tag("AlarmSignalHeaterCOverTemp")] public IoAlarmSignal AlarmSignalHeaterCOverTemp { get; set; } [Tag("AlarmSignalHeaterCLOverTemp")] public IoAlarmSignal AlarmSignalHeaterCLOverTemp { get; set; } [Tag("AlarmSignalHeaterLOverTemp")] public IoAlarmSignal AlarmSignalHeaterLOverTemp { get; set; } [Tag("AlarmSignaBoatRAxisAlarm")] public IoAlarmSignal AlarmSignaBoatRAxisAlarm { get; set; } [Tag("AlarmSignaBoatRAxisWarning")] public IoAlarmSignal AlarmSignaBoatRAxisWarning { get; set; } [Tag("AlarmSignaBoatZAxisWarning")] public IoAlarmSignal AlarmSignaBoatZAxisWarning { get; set; } [Tag("AlarmSignaBoatZAxisAlarm")] public IoAlarmSignal AlarmSignaBoatZAxisAlarm { get; set; } [Tag("AlarmSignaGasHeaterSensorBreakOutAlarm")] public IoAlarmSignal AlarmSignaGasHeaterSensorBreakOutAlarm { get; set; } [Tag("AlarmSignaTempLimitAlarm")] public IoAlarmSignal AlarmSignaTempLimitAlarm { get; set; } [Tag("AlarmSignalLAO2CheckOTWarning")] public IoAlarmSignal AlarmSignalLAO2CheckOTWarning { get; set; } [Tag("AlarmSignalFIMS1O2CheckOTWarning")] public IoAlarmSignal AlarmSignalFIMS1O2CheckOTWarning { get; set; } [Tag("AlarmSignalFIMS2O2CheckOTWarning")] public IoAlarmSignal AlarmSignalFIMS2O2CheckOTWarning { get; set; } [Tag("AlarmSignalHeaterUCascadePVSBrk")] public IoAlarmSignal AlarmSignalHeaterUCascadePVSBrk { get; set; } [Tag("AlarmSignalHeaterUHeaterPVSBrk")] public IoAlarmSignal AlarmSignalHeaterUHeaterPVSBrk { get; set; } [Tag("AlarmSignalHeaterCUCascadePVSBrk")] public IoAlarmSignal AlarmSignalHeaterCUCascadePVSBrk { get; set; } [Tag("AlarmSignalHeaterCUHeaterPVSBrk")] public IoAlarmSignal AlarmSignalHeaterCUHeaterPVSBrk { get; set; } [Tag("AlarmSignalHeaterCCascadePVSBrk")] public IoAlarmSignal AlarmSignalHeaterCCascadePVSBrk { get; set; } [Tag("AlarmSignalHeaterCHeaterPVSBrk")] public IoAlarmSignal AlarmSignalHeaterCHeaterPVSBrk { get; set; } [Tag("AlarmSignalHeaterCLCascadePVSBrk")] public IoAlarmSignal AlarmSignalHeaterCLCascadePVSBrk { get; set; } [Tag("AlarmSignalHeaterCLHeaterPVSBrk")] public IoAlarmSignal AlarmSignalHeaterCLHeaterPVSBrk { get; set; } [Tag("AlarmSignalHeaterLCascadePVSBrk")] public IoAlarmSignal AlarmSignalHeaterLCascadePVSBrk { get; set; } [Tag("AlarmSignalHeaterLHeaterPVSBrk")] public IoAlarmSignal AlarmSignalHeaterLHeaterPVSBrk { get; set; } [Tag("GasLine1AlarmSignalTempOutRange")] public IoAlarmSignal GasLine1AlarmSignalTempOutRange { get; set; } [Tag("GasLine2AlarmSignalTempOutRange")] public IoAlarmSignal GasLine2AlarmSignalTempOutRange { get; set; } [Tag("GasLine3AlarmSignalTempOutRange")] public IoAlarmSignal GasLine3AlarmSignalTempOutRange { get; set; } [Tag("GasLine4AlarmSignalTempOutRange")] public IoAlarmSignal GasLine4AlarmSignalTempOutRange { get; set; } [Tag("GasLine6AlarmSignalTempOutRange")] public IoAlarmSignal GasLine6AlarmSignalTempOutRange { get; set; } [Tag("GasLine7AlarmSignalTempOutRange")] public IoAlarmSignal GasLine7AlarmSignalTempOutRange { get; set; } [Tag("GasLine1AlarmSignalCLN")] public IoAlarmSignal GasLine1AlarmSignalCLN { get; set; } [Tag("GasLine2AlarmSignalCLN")] public IoAlarmSignal GasLine2AlarmSignalCLN { get; set; } [Tag("GasLine3AlarmSignalCLN")] public IoAlarmSignal GasLine3AlarmSignalCLN { get; set; } [Tag("GasLine4AlarmSignalCLN")] public IoAlarmSignal GasLine4AlarmSignalCLN { get; set; } [Tag("GasLine6AlarmSignalCLN")] public IoAlarmSignal GasLine6AlarmSignalCLN { get; set; } [Tag("GasLine7AlarmSignalCLN")] public IoAlarmSignal GasLine7AlarmSignalCLN { get; set; } [Tag("AlarmSignalHCL1GasLeak1stAlarm")] public IoAlarmSignal AlarmSignalHCL1GasLeak1stAlarm { get; set; } [Tag("AlarmSignalHCL1GasLeak2ndAlarm")] public IoAlarmSignal AlarmSignalHCL1GasLeak2ndAlarm { get; set; } [Tag("AlarmSignalHCL2GasLeak1stAlarm")] public IoAlarmSignal AlarmSignalHCL2GasLeak1stAlarm { get; set; } [Tag("AlarmSignalHCL2GasLeak2ndAlarm")] public IoAlarmSignal AlarmSignalHCL2GasLeak2ndAlarm { get; set; } [Tag("AlarmSignalNH31GasLeak1stAlarm")] public IoAlarmSignal AlarmSignalNH31GasLeak1stAlarm { get; set; } [Tag("AlarmSignalNH31GasLeak2ndAlarm")] public IoAlarmSignal AlarmSignalNH31GasLeak2ndAlarm { get; set; } [Tag("AlarmSignalNH32GasLeak1stAlarm")] public IoAlarmSignal AlarmSignalNH32GasLeak1stAlarm { get; set; } [Tag("AlarmSignalNH32GasLeak2ndAlarm")] public IoAlarmSignal AlarmSignalNH32GasLeak2ndAlarm { get; set; } [Tag("AlarmSignalF21GasLeak1stAlarm")] public IoAlarmSignal AlarmSignalF21GasLeak1stAlarm { get; set; } [Tag("AlarmSignalF21GasLeak2ndAlarm")] public IoAlarmSignal AlarmSignalF21GasLeak2ndAlarm { get; set; } [Tag("AlarmSignalF22GasLeak1stAlarm")] public IoAlarmSignal AlarmSignalF22GasLeak1stAlarm { get; set; } [Tag("AlarmSignalF22GasLeak2ndAlarm")] public IoAlarmSignal AlarmSignalF22GasLeak2ndAlarm { get; set; } [Tag("AlarmSignalNO1GasLeak1stAlarm")] public IoAlarmSignal AlarmSignalNO1GasLeak1stAlarm { get; set; } [Tag("AlarmSignalNO1GasLeak2ndAlarm")] public IoAlarmSignal AlarmSignalNO1GasLeak2ndAlarm { get; set; } [Tag("AlarmSignalNO2GasLeak1stAlarm")] public IoAlarmSignal AlarmSignalNO2GasLeak1stAlarm { get; set; } [Tag("AlarmSignalNO2GasLeak2ndAlarm")] public IoAlarmSignal AlarmSignalNO2GasLeak2ndAlarm { get; set; } [Tag("AlarmSignalC3H61GasLeak1stAlarm")] public IoAlarmSignal AlarmSignalC3H61GasLeak1stAlarm { get; set; } [Tag("AlarmSignalC3H61GasLeak2ndAlarm")] public IoAlarmSignal AlarmSignalC3H61GasLeak2ndAlarm { get; set; } [Tag("AlarmSignalC3H62GasLeak1stAlarm")] public IoAlarmSignal AlarmSignalC3H62GasLeak1stAlarm { get; set; } [Tag("AlarmSignalC3H62GasLeak2ndAlarm")] public IoAlarmSignal AlarmSignalC3H62GasLeak2ndAlarm { get; set; } [Tag("AlarmSignalDMA1GasLeak1stAlarm")] public IoAlarmSignal AlarmSignalDMA1GasLeak1stAlarm { get; set; } [Tag("AlarmSignalDMA1GasLeak2ndAlarm")] public IoAlarmSignal AlarmSignalDMA1GasLeak2ndAlarm { get; set; } [Tag("AlarmSignalDMA2GasLeak1stAlarm")] public IoAlarmSignal AlarmSignalDMA2GasLeak1stAlarm { get; set; } [Tag("AlarmSignalDMA2GasLeak2ndAlarm")] public IoAlarmSignal AlarmSignalDMA2GasLeak2ndAlarm { get; set; } [Tag("AlarmSignalGLBoxPG7CNT1Alarm")] public IoAlarmSignal AlarmSignalGLBoxPG7CNT1Alarm { get; set; } [Tag("AlarmSignalGLBoxPG7CNT2Alarm")] public IoAlarmSignal AlarmSignalGLBoxPG7CNT2Alarm { get; set; } [Tag("AlarmSignalGLBoxPG8CNT2Alarm")] public IoAlarmSignal AlarmSignalGLBoxPG8CNT2Alarm { get; set; } [Tag("AlarmSignalGLBoxPG9CNT2Alarm")] public IoAlarmSignal AlarmSignalGLBoxPG9CNT2Alarm { get; set; } [Tag("AlarmSignalHEXOverTemperatureAlarm")] public IoAlarmSignal AlarmSignalHEXOverTemperatureAlarm { get; set; } [Tag("AlarmSignalGLBoxPG21CNT1Alarm")] public IoAlarmSignal AlarmSignalGLBoxPG21CNT1Alarm { get; set; } [Tag("AlarmSignalGLBoxPG21CNT2Alarm")] public IoAlarmSignal AlarmSignalGLBoxPG21CNT2Alarm { get; set; } [Tag("AlarmSignalGLBoxPG22CNT1Alarm")] public IoAlarmSignal AlarmSignalGLBoxPG22CNT1Alarm { get; set; } [Tag("AlarmSignalGLBoxPG22CNT2Alarm")] public IoAlarmSignal AlarmSignalGLBoxPG22CNT2Alarm { get; set; } [Tag("AlarmSignalGLBoxPG23CNT1Alarm")] public IoAlarmSignal AlarmSignalGLBoxPG23CNT1Alarm { get; set; } [Tag("AlarmSignalGLBoxPG23CNT2Alarm")] public IoAlarmSignal AlarmSignalGLBoxPG23CNT2Alarm { get; set; } [Tag("AlarmSignalGLBoxPG24CNT1Alarm")] public IoAlarmSignal AlarmSignalGLBoxPG24CNT1Alarm { get; set; } [Tag("AlarmSignalGLBoxPG24CNT2Alarm")] public IoAlarmSignal AlarmSignalGLBoxPG24CNT2Alarm { get; set; } [Tag("AlarmSignalGLBoxPG25CNT1Alarm")] public IoAlarmSignal AlarmSignalGLBoxPG25CNT1Alarm { get; set; } [Tag("AlarmSignalGLBoxPG25CNT2Alarm")] public IoAlarmSignal AlarmSignalGLBoxPG25CNT2Alarm { get; set; } [Tag("AlarmSignalGLBoxPG31CNT1Alarm")] public IoAlarmSignal AlarmSignalGLBoxPG31CNT1Alarm { get; set; } [Tag("AlarmSignalGLBoxPG31CNT2Alarm")] public IoAlarmSignal AlarmSignalGLBoxPG31CNT2Alarm { get; set; } [Tag("AlarmSignalGLBoxPG32CNT1Alarm")] public IoAlarmSignal AlarmSignalGLBoxPG32CNT1Alarm { get; set; } [Tag("AlarmSignalGLBoxPG32CNT2Alarm")] public IoAlarmSignal AlarmSignalGLBoxPG32CNT2Alarm { get; set; } [Tag("AlarmSignalPG12CNT1Alarm")] public IoAlarmSignal AlarmSignalPG12CNT1Alarm { get; set; } [Tag("AlarmSignalPG12CNT2Alarm")] public IoAlarmSignal AlarmSignalPG12CNT2Alarm { get; set; } [Tag("AlarmSignalPG13CNT1Alarm")] public IoAlarmSignal AlarmSignalPG13CNT1Alarm { get; set; } [Tag("AlarmSignalPG13CNT2Alarm")] public IoAlarmSignal AlarmSignalPG13CNT2Alarm { get; set; } [Tag("AlarmSignalVaccum1PumpWarning")] public IoAlarmSignal AlarmSignalVaccum1PumpWarning { get; set; } [Tag("AlarmSignalVaccum1PumpAlarm")] public IoAlarmSignal AlarmSignalVaccum1PumpAlarm { get; set; } [Tag("AlarmSignalVaccum2PumpWarning")] public IoAlarmSignal AlarmSignalVaccum2PumpWarning { get; set; } [Tag("AlarmSignalVaccum2PumpAlarm")] public IoAlarmSignal AlarmSignalVaccum2PumpAlarm { get; set; } [Tag("AlarmSignalHotN2Alarm")] public IoAlarmSignal AlarmSignalHotN2Alarm { get; set; } [Tag("AlarmSignalLDS1MajorAlarm")] public IoAlarmSignal AlarmSignalLDS1MajorAlarm { get; set; } [Tag("AlarmSignalLDS1MinorWarning")] public IoAlarmSignal AlarmSignalLDS1MinorWarning { get; set; } [Tag("AlarmSignalLDS1liquidLowWarning")] public IoAlarmSignal AlarmSignalLDS1liquidLowWarning { get; set; } [Tag("AlarmSignalLDS1TankBlankAlarm")] public IoAlarmSignal AlarmSignalLDS1TankBlankAlarm { get; set; } [Tag("AlarmSignalLDS2MajorAlarm")] public IoAlarmSignal AlarmSignalLDS2MajorAlarm { get; set; } [Tag("AlarmSignalLDS2MinorWarning")] public IoAlarmSignal AlarmSignalLDS2MinorWarning { get; set; } [Tag("AlarmSignalLDS2LiquidLowWarning")] public IoAlarmSignal AlarmSignalLDS2LiquidLowWarning { get; set; } [Tag("AlarmSignalLDS2TankBlankAlarm")] public IoAlarmSignal AlarmSignalLDS2TankBlankAlarm { get; set; } [Tag("AlarmSignalPOD1FOUPVacuumSuckingAlarm")] public IoAlarmSignal AlarmSignalPOD1FOUPVacuumSuckingAlarm { get; set; } [Tag("AlarmSignalPOD2FOUPVacuumSuckingAlarm")] public IoAlarmSignal AlarmSignalPOD2FOUPVacuumSuckingAlarm { get; set; } [Tag("AlarmTS34RRotationTempSwAlarm")] public IoAlarmSignal AlarmTS34RRotationTempSwAlarm { get; set; } [Tag("AlarmTS30CapInsideTempSwAlarm")] public IoAlarmSignal AlarmTS30CapInsideTempSwAlarm { get; set; } [Tag("AlarmTS31capoutsidetemSwAlarm")] public IoAlarmSignal AlarmTS31capoutsidetemSwAlarm { get; set; } [Tag("AlarmGasboxlowerdoorSwAlarm")] public IoAlarmSignal AlarmGasboxlowerdoorSwAlarm { get; set; } [Tag("AlarmGasboxupperdoorSwAlarm")] public IoAlarmSignal AlarmGasboxupperdoorSwAlarm { get; set; } [Tag("AlarmEXHboxwaterleakAlarm")] public IoAlarmSignal AlarmEXHboxwaterleakAlarm { get; set; } [Tag("AlarmOPpanelEMO1Alarm")] public IoAlarmSignal AlarmOPpanelEMO1Alarm { get; set; } [Tag("AlarmOPpanelEMO2Alarm")] public IoAlarmSignal AlarmOPpanelEMO2Alarm { get; set; } [Tag("AlarmMainFurnaceTS306Alarm")] public IoAlarmSignal AlarmMainFurnaceTS306Alarm { get; set; } [Tag("AlarmHeaterRoomSWS11S12Alarm")] public IoAlarmSignal AlarmHeaterRoomSWS11S12Alarm { get; set; } [Tag("AlarmHeaterBbacksidePanelSWS112Alarm")] public IoAlarmSignal AlarmHeaterBbacksidePanelSWS112Alarm { get; set; } [Tag("AlarmRHCTS305Alarm")] public IoAlarmSignal AlarmRHCTS305Alarm { get; set; } [Tag("AlarmGasLeakFaultAlarm")] public IoAlarmSignal AlarmGasLeakFaultAlarm { get; set; } [Tag("AlarmMagneticFluidLeakAlarm")] public IoAlarmSignal AlarmMagneticFluidLeakAlarm { get; set; } [Tag("AlarmCoolingWaterLeakAlarm")] public IoAlarmSignal AlarmCoolingWaterLeakAlarm { get; set; } [Tag("AlarmLSCWaterLeakAlarm")] public IoAlarmSignal AlarmLSCWaterLeakAlarm { get; set; } [Tag("AlarmLABacksideDoorSwitchAlarm")] public IoAlarmSignal AlarmLABacksideDoorSwitchAlarm { get; set; } [Tag("AlarmSiSourceTANKHeater1INHIBITHIAlarm")] public IoAlarmSignal AlarmSiSourceTANKHeater1INHIBITHIAlarm { get; set; } [Tag("AlarmSiSourceTANKHeater1INHIBITLOWAlarm")] public IoAlarmSignal AlarmSiSourceTANKHeater1INHIBITLOWAlarm { get; set; } [Tag("AlarmSiSourceTANKHeater2INHIBITHIAlarm")] public IoAlarmSignal AlarmSiSourceTANKHeater2INHIBITHIAlarm { get; set; } [Tag("AlarmSiSourceTANKHeater2INHIBITLOWAlarm")] public IoAlarmSignal AlarmSiSourceTANKHeater2INHIBITLOWAlarm { get; set; } [Tag("AlarmSiSourceTANKHeater3INHIBITHIAlarm")] public IoAlarmSignal AlarmSiSourceTANKHeater3INHIBITHIAlarm { get; set; } [Tag("AlarmSiSourceTANKHeater3INHIBITLOWAlarm")] public IoAlarmSignal AlarmSiSourceTANKHeater3INHIBITLOWAlarm { get; set; } [Tag("AlarmSiSourceAVMFCHeaterINHIBITHIAlarm")] public IoAlarmSignal AlarmSiSourceAVMFCHeaterINHIBITHIAlarm { get; set; } [Tag("AlarmSiSourceAVMFCHeaterINHIBITLOWAlarm")] public IoAlarmSignal AlarmSiSourceAVMFCHeaterINHIBITLOWAlarm { get; set; } [Tag("AlarmCSourceTANKHeater1INHIBITHIAlarm")] public IoAlarmSignal AlarmCSourceTANKHeater1INHIBITHIAlarm { get; set; } [Tag("AlarmCSourceTANKHeater1INHIBITLOWAlarm")] public IoAlarmSignal AlarmCSourceTANKHeater1INHIBITLOWAlarm { get; set; } [Tag("AlarmCSourceTANKHeater2INHIBITHIAlarm")] public IoAlarmSignal AlarmCSourceTANKHeater2INHIBITHIAlarm { get; set; } [Tag("AlarmCSourceTANKHeater2INHIBITLOWAlarm")] public IoAlarmSignal AlarmCSourceTANKHeater2INHIBITLOWAlarm { get; set; } [Tag("AlarmCSourceTANKHeater3INHIBITHIAlarm")] public IoAlarmSignal AlarmCSourceTANKHeater3INHIBITHIAlarm { get; set; } [Tag("AlarmCSourceTANKHeater3INHIBITLOWAlarm")] public IoAlarmSignal AlarmCSourceTANKHeater3INHIBITLOWAlarm { get; set; } [Tag("AlarmCSourceAVMFCHeaterINHIBITHIAlarm")] public IoAlarmSignal AlarmCSourceAVMFCHeaterINHIBITHIAlarm { get; set; } [Tag("AlarmCSourceAVMFCHeaterINHIBITLOWAlarm")] public IoAlarmSignal AlarmCSourceAVMFCHeaterINHIBITLOWAlarm { get; set; } #endregion public AITSensorData SensorRecipeOK { get; set; } public AITSensorData SensorPROCManualOK { get; set; } [Tag("SensorVG11Status")] public IoSensor SensorVG11Status { get; set; } [Tag("SensorVG12Status")] public IoSensor SensorVG12Status { get; set; } [Tag("SensorVG13Status")] public IoSensor SensorVG13Status { get; set; } [Tag("SensorVACDEPOOK")] public IoSensor SensorVACDEPOOK { get; set; } [Tag("SensorVACHFOK")] public IoSensor SensorVACHFOK { get; set; } [Tag("SensorVACF2OK")] public IoSensor SensorVACF2OK { get; set; } //[Tag("SensorNH3PressureOK")] //public IoAlarmSignal SignalLeak { get; set; } //[Tag("SignalExhaustAlarm")] //public IoAlarmSignal SignalExhaustAlarm { get; set; } //[Tag("SignalLeakBroken")] //public IoAlarmSignal SignalLeakBroken { get; set; } //[Tag("EmoAlarm")] //public IoAlarmSignal EmoAlarm { get; set; } // ------------------------------------------------------------------------- //[Tag("ChamberLiftPin")] //public IoLift2 ChamberLiftPin { get; set; } // ------------------------------------------------------------------------- //[Tag("ChamberDoor")] //public IoDoor2 ChamberDoor { get; set; } //[Tag("MFM61")] //public IoMFM MFM61 { get; set; } //[Tag("MfmNB")] //public IoMFM MfmNB { get; set; } [Tag("ValveAV1")] public IoValve ValveAV1 { get; set; } [Tag("ValveAV2")] public IoValve ValveAV2 { get; set; } [Tag("ValveAV3")] public IoValve ValveAV3 { get; set; } [Tag("ValveAV4")] public IoValve ValveAV4 { get; set; } [Tag("ValveAV5")] public IoValve ValveAV5 { get; set; } [Tag("ValveAV6")] public IoValve ValveAV6 { get; set; } [Tag("ValveAV7")] public IoValve ValveAV7 { get; set; } [Tag("ValveAV8")] public IoValve ValveAV8 { get; set; } [Tag("ValveAV9")] public IoValve ValveAV9 { get; set; } [Tag("ValveAV10")] public IoValve ValveAV10 { get; set; } [Tag("ValveAV11")] public IoValve ValveAV11 { get; set; } [Tag("ValveAV12")] public IoValve ValveAV12 { get; set; } [Tag("ValveAV13")] public IoValve ValveAV13 { get; set; } [Tag("ValveAV14")] public IoValve ValveAV14 { get; set; } [Tag("ValveAV15")] public IoValve ValveAV15 { get; set; } [Tag("ValveAV16")] public IoValve ValveAV16 { get; set; } [Tag("ValveAV17")] public IoValve ValveAV17 { get; set; } [Tag("ValveAV18")] public IoValve ValveAV18 { get; set; } [Tag("ValveAV19")] public IoValve ValveAV19 { get; set; } [Tag("ValveAV20")] public IoValve ValveAV20 { get; set; } [Tag("ValveAV21")] public IoValve ValveAV21 { get; set; } [Tag("ValveAV22")] public IoValve ValveAV22 { get; set; } [Tag("ValveAV23")] public IoValve ValveAV23 { get; set; } [Tag("ValveAV24")] public IoValve ValveAV24 { get; set; } [Tag("ValveAV25")] public IoValve ValveAV25 { get; set; } [Tag("ValveAV26")] public IoValve ValveAV26 { get; set; } [Tag("ValveAV27")] public IoValve ValveAV27 { get; set; } [Tag("ValveAV28")] public IoValve ValveAV28 { get; set; } [Tag("ValveAV29")] public IoValve ValveAV29 { get; set; } [Tag("ValveAV30")] public IoValve ValveAV30 { get; set; } [Tag("ValveAV31")] public IoValve ValveAV31 { get; set; } [Tag("ValveAV32")] public IoValve ValveAV32 { get; set; } [Tag("ValveAV33")] public IoValve ValveAV33 { get; set; } [Tag("ValveAV34")] public IoValve ValveAV34 { get; set; } [Tag("ValveAV35")] public IoValve ValveAV35 { get; set; } [Tag("ValveAV36")] public IoValve ValveAV36 { get; set; } [Tag("ValveAV37")] public IoValve ValveAV37 { get; set; } [Tag("ValveAV38")] public IoValve ValveAV38 { get; set; } [Tag("ValveAV39")] public IoValve ValveAV39 { get; set; } [Tag("ValveAV40")] public IoValve ValveAV40 { get; set; } [Tag("ValveAV41")] public IoValve ValveAV41 { get; set; } [Tag("ValveAV42")] public IoValve ValveAV42 { get; set; } [Tag("ValveAV43")] public IoValve ValveAV43 { get; set; } [Tag("ValveAV44")] public IoValve ValveAV44 { get; set; } [Tag("ValveAV45")] public IoValve ValveAV45 { get; set; } [Tag("ValveAV46")] public IoValve ValveAV46 { get; set; } [Tag("ValveAV47")] public IoValve ValveAV47 { get; set; } [Tag("ValveAV48")] public IoValve ValveAV48 { get; set; } [Tag("ValveAV49")] public IoValve ValveAV49 { get; set; } [Tag("ValveAV50")] public IoValve ValveAV50 { get; set; } [Tag("ValveAV51")] public IoValve ValveAV51 { get; set; } [Tag("ValveAV52")] public IoValve ValveAV52 { get; set; } [Tag("ValveAV53")] public IoValve ValveAV53 { get; set; } [Tag("ValveAV54")] public IoValve ValveAV54 { get; set; } [Tag("ValveAV55")] public IoValve ValveAV55 { get; set; } [Tag("ValveAV56")] public IoValve ValveAV56 { get; set; } [Tag("ValveAV57")] public IoValve ValveAV57 { get; set; } [Tag("ValveAV58")] public IoValve ValveAV58 { get; set; } [Tag("ValveAV59")] public IoValve ValveAV59 { get; set; } [Tag("ValveAV60")] public IoValve ValveAV60 { get; set; } [Tag("ValveAV61")] public IoValve ValveAV61 { get; set; } [Tag("ValveAV62")] public IoValve ValveAV62 { get; set; } [Tag("ValveAV63")] public IoValve ValveAV63 { get; set; } [Tag("ValveAV64")] public IoValve ValveAV64 { get; set; } [Tag("ValveAV65")] public IoValve ValveAV65 { get; set; } [Tag("ValveAV202LADoor")] public IoValve ValveAV202LADoor { get; set; } [Tag("ValveAV66")] public IoValve ValveAV66 { get; set; } [Tag("ValveAV67")] public IoValve ValveAV67 { get; set; } [Tag("ValveAV68")] public IoValve ValveAV68 { get; set; } [Tag("ValveAV69")] public IoValve ValveAV69 { get; set; } [Tag("ValveAV70")] public IoValve ValveAV70 { get; set; } [Tag("ValveAV71")] public IoValve ValveAV71 { get; set; } [Tag("ValveAV72")] public IoValve ValveAV72 { get; set; } [Tag("ValveAV73")] public IoValve ValveAV73 { get; set; } [Tag("ValveAV74")] public IoValve ValveAV74 { get; set; } [Tag("ValveAV75")] public IoValve ValveAV75 { get; set; } [Tag("ValveAV76")] public IoValve ValveAV76 { get; set; } [Tag("ValveAV77")] public IoValve ValveAV77 { get; set; } [Tag("ValveAV78")] public IoValve ValveAV78 { get; set; } [Tag("ValveAV79")] public IoValve ValveAV79 { get; set; } [Tag("ValveAV80")] public IoValve ValveAV80 { get; set; } [Tag("ValveAV81")] public IoValve ValveAV81 { get; set; } [Tag("ValveAV82")] public IoValve ValveAV82 { get; set; } [Tag("ValveAV83")] public IoValve ValveAV83 { get; set; } [Tag("ValveAV84")] public IoValve ValveAV84 { get; set; } [Tag("ValveAV85")] public IoValve ValveAV85 { get; set; } [Tag("ValveAV86")] public IoValve ValveAV86 { get; set; } [Tag("ValveAV87")] public IoValve ValveAV87 { get; set; } [Tag("ValveAV88")] public IoValve ValveAV88 { get; set; } [Tag("ValveAV89")] public IoValve ValveAV89 { get; set; } [Tag("ValveAV90")] public IoValve ValveAV90 { get; set; } [Tag("ValveAV91")] public IoValve ValveAV91 { get; set; } [Tag("ValveAV92")] public IoValve ValveAV92 { get; set; } [Tag("ValveAV93")] public IoValve ValveAV93 { get; set; } [Tag("ValveAV94")] public IoValve ValveAV94 { get; set; } [Tag("ValveAV95")] public IoValve ValveAV95 { get; set; } [Tag("ValveAV96")] public IoValve ValveAV96 { get; set; } [Tag("ValveAV97")] public IoValve ValveAV97 { get; set; } [Tag("ValveAV98")] public IoValve ValveAV98 { get; set; } [Tag("ValveAV99")] public IoValve ValveAV99 { get; set; } [Tag("ValveAV100")] public IoValve ValveAV100 { get; set; } [Tag("ValveAV101")] public IoValve ValveAV101 { get; set; } [Tag("ValveAV102")] public IoValve ValveAV102 { get; set; } [Tag("ValveAV103")] public IoValve ValveAV103 { get; set; } [Tag("ValveAV104")] public IoValve ValveAV104 { get; set; } [Tag("ValveAV105")] public IoValve ValveAV105 { get; set; } [Tag("ValveAV106")] public IoValve ValveAV106 { get; set; } [Tag("ValveAV107")] public IoValve ValveAV107 { get; set; } [Tag("ValveAV108")] public IoValve ValveAV108 { get; set; } [Tag("ValveAV109")] public IoValve ValveAV109 { get; set; } [Tag("ValveAV110")] public IoValve ValveAV110 { get; set; } [Tag("ValveAV111")] public IoValve ValveAV111 { get; set; } [Tag("ValveAV112")] public IoValve ValveAV112 { get; set; } [Tag("ValveAV113")] public IoValve ValveAV113 { get; set; } [Tag("ValveAV114")] public IoValve ValveAV114 { get; set; } [Tag("ValveAV115")] public IoValve ValveAV115 { get; set; } [Tag("ValveAV116")] public IoValve ValveAV116 { get; set; } [Tag("ValveAV117")] public IoValve ValveAV117 { get; set; } [Tag("ValveAV118")] public IoValve ValveAV118 { get; set; } [Tag("ValveAV119")] public IoValve ValveAV119 { get; set; } [Tag("ValveAV120")] public IoValve ValveAV120 { get; set; } [Tag("ValveAV121")] public IoValve ValveAV121 { get; set; } [Tag("ValveAV122")] public IoValve ValveAV122 { get; set; } [Tag("ValveAV123")] public IoValve ValveAV123 { get; set; } [Tag("ValveAV124")] public IoValve ValveAV124 { get; set; } [Tag("ValveAV125")] public IoValve ValveAV125 { get; set; } [Tag("ValveAV126")] public IoValve ValveAV126 { get; set; } [Tag("ValveAV127")] public IoValve ValveAV127 { get; set; } [Tag("ValveAV128")] public IoValve ValveAV128 { get; set; } [Tag("ValveAV129")] public IoValve ValveAV129 { get; set; } [Tag("ValveAV130")] public IoValve ValveAV130 { get; set; } [Tag("ValveAV131")] public IoValve ValveAV131 { get; set; } [Tag("ValveAV132")] public IoValve ValveAV132 { get; set; } [Tag("ValveAV133")] public IoValve ValveAV133 { get; set; } [Tag("ValveAV134")] public IoValve ValveAV134 { get; set; } [Tag("ValveAV135")] public IoValve ValveAV135 { get; set; } [Tag("ValveAV136")] public IoValve ValveAV136 { get; set; } [Tag("ValveAV230")] public IoValve ValveAV230 { get; set; } [Tag("ValveCommonBoxPressureRegulatingCylinder")] public IoValve ValveCommonBoxPressureRegulatingCylinder { get; set; } [Tag("ValveLABacksideDoorCylinderControl")] public IoValve ValveLABacksideDoorCylinderControl { get; set; } [Tag("ValveLAExhaustDamper")] public IoValve ValveLAExhaustDamper { get; set; } [Tag("ValveLADamper")] public IoValve ValveLADamper { get; set; } [Tag("ValveFIMS1N2Purge")] public IoValve ValveFIMS1N2Purge { get; set; } [Tag("ValveFIMS2N2Purge")] public IoValve ValveFIMS2N2Purge { get; set; } [Tag("ValveSV61")] public IoValve ValveSV61 { get; set; } [Tag("ValveSV62")] public IoValve ValveSV62 { get; set; } [Tag("ValveSV63")] public IoValve ValveSV63 { get; set; } [Tag("ValveSV64")] public IoValve ValveSV64 { get; set; } [Tag("AGVPump")] public IoValve AGVPump { get; set; } [Tag("AGV2Pump")] public IoValve AGV2Pump { get; set; } [Tag("BothPump")] public IoValve BothPump { get; set; } [Tag("BothPump1")] public IoValve BothPump1 { get; set; } [Tag("BothPump2")] public IoValve BothPump2 { get; set; } [Tag("ValveBlowerPowerOn")] public IoValve ValveBlowerPowerOn { get; set; } [Tag("HMNT")] public IoValve HMNT { get; set; } [Tag("CMNT")] public IoValve CMNT { get; set; } [Tag("HREF")] public IoValve HREF { get; set; } [Tag("CREF")] public IoValve CREF { get; set; } [Tag("HZERO")] public IoValve HZERO { get; set; } [Tag("CZERO")] public IoValve CZERO { get; set; } // ------------------------------------------------------------------------- [Tag("PressureGLBoxPG1")] public IoPressureMeter PressureGLBoxPG1 { get; set; } [Tag("PressureGLBoxPG2")] public IoPressureMeter PressureGLBoxPG2 { get; set; } [Tag("PressureGLBoxPG3")] public IoPressureMeter PressureGLBoxPG3 { get; set; } [Tag("PressureGLBoxPG4")] public IoPressureMeter PressureGLBoxPG4 { get; set; } [Tag("PressureGLBoxPG5")] public IoPressureMeter PressureGLBoxPG5 { get; set; } [Tag("PressureGLBoxPG6")] public IoPressureMeter PressureGLBoxPG6 { get; set; } [Tag("PressureGasBoxUpperVG21")] public IoPressureMeter PressureGasBoxUpperVG21 { get; set; } [Tag("PressureGasBoxUpperVG22")] public IoPressureMeter PressureGasBoxUpperVG22 { get; set; } [Tag("ConcentrationO2")] public IoPressureMeter ConcentrationO2 { get; set; } [Tag("GasBoxExhaustMS2")] public IoPressureMeter GasBoxExhaustMS2 { get; set; } [Tag("ScavengerExhaustMS3")] public IoPressureMeter ScavengerExhaustMS3 { get; set; } [Tag("ExhaustBoxExhaustMS4")] public IoPressureMeter ExhaustBoxExhaustMS4 { get; set; } [Tag("LoadingAreaExhaustMS5")] public IoPressureMeter LoadingAreaExhaustMS5 { get; set; } [Tag("FrontBodyExhaustMS6")] public IoPressureMeter FrontBodyExhaustMS6 { get; set; } [Tag("LAExhaustMS7")] public IoPressureMeter LAExhaustMS7 { get; set; } [Tag("RHCExhaustMS8")] public IoPressureMeter RHCExhaustMS8 { get; set; } [Tag("RHCFlowFL901")] public IoPressureMeter RHCFlowFL901 { get; set; } [Tag("CoolingWaterFlowOfFurnaceFL902")] public IoPressureMeter CoolingWaterFlowOfFurnaceFL902 { get; set; } [Tag("CoolingWateFlowOfShuttleFL903")] public IoPressureMeter CoolingWateFlowOfShuttleFL903 { get; set; } [Tag("CoolingWaterFlowOfBoatRotationFL904")] public IoPressureMeter CoolingWaterFlowOfBoatRotationFL904 { get; set; } [Tag("CoolingWaterFlowOfFlangeFL905")] public IoPressureMeter CoolingWaterFlowOfFlangeFL905 { get; set; } [Tag("CoolingWaterFlowOfLoadingAreaFL906")] public IoPressureMeter CoolingWaterFlowOfLoadingAreaFL906 { get; set; } [Tag("VG11")] public IoPressureMeter VG11 { get; set; } [Tag("VG12")] public IoPressureMeter VG12 { get; set; } [Tag("VG13")] public IoPressureMeter VG13 { get; set; } [Tag("VG21")] public IoPressureMeter VG21 { get; set; } [Tag("VG22")] public IoPressureMeter VG22 { get; set; } [Tag("PG12")] public IoPressureMeter PG12 { get; set; } [Tag("PG13")] public IoPressureMeter PG13 { get; set; } [Tag("PS13")] public IoPressureMeter PS13 { get; set; } [Tag("N24PurgePressure")] public IoPressureMeter N24PurgePressure { get; set; } [Tag("N25PurgePressure")] public IoPressureMeter N25PurgePressure { get; set; } [Tag("N26PurgePressure")] public IoPressureMeter N26PurgePressure { get; set; } [Tag("N27PurgePressure")] public IoPressureMeter N27PurgePressure { get; set; } [Tag("PS11")] public IoPressureMeter PS11 { get; set; } [Tag("PS17")] public IoPressureMeter PS17 { get; set; } // ------------------------------------------------------------------------- [Tag("FIMS1")] public IoFIMS FIMS1 { get; set; } [Tag("FIMS2")] public IoFIMS FIMS2 { get; set; } //[Tag("ValvePV12")] //public IoValve ValvePV12 { get; set; } //[Tag("ValvePV13")] //public IoValve ValvePV13 { get; set; } //[Tag("ValvePV14")] //public IoValve ValvePV14 { get; set; } //[Tag("ValvePV15")] //public IoValve ValvePV15 { get; set; } //[Tag("ValvePV16")] //public IoValve ValvePV16 { get; set; } //[Tag("ValvePV17")] //public IoValve ValvePV17 { get; set; } [Tag("MFC1")] public IoMFC MFC1 { get; set; } [Tag("MFC2")] public IoMFC MFC2 { get; set; } [Tag("MFC3")] public IoMFC MFC3 { get; set; } [Tag("MFC4")] public IoMFC MFC4 { get; set; } [Tag("MFC5")] public IoMFC MFC5 { get; set; } [Tag("MFC6")] public IoMFC MFC6 { get; set; } [Tag("MFC7")] public IoMFC MFC7 { get; set; } [Tag("MFC8")] public IoMFC MFC8 { get; set; } [Tag("MFC9")] public IoMFC MFC9 { get; set; } [Tag("MFC10")] public IoMFC MFC10 { get; set; } [Tag("MFC11")] public IoMFC MFC11 { get; set; } [Tag("MFC12")] public IoMFC MFC12 { get; set; } [Tag("MFC13")] public IoMFC MFC13 { get; set; } [Tag("MFC14")] public IoMFC MFC14 { get; set; } [Tag("MFC15")] public IoMFC MFC15 { get; set; } [Tag("MFC16")] public IoMFC MFC16 { get; set; } [Tag("MFC17")] public IoMFC MFC17 { get; set; } [Tag("MFC31")] public IoMFC MFC31 { get; set; } [Tag("MFC32")] public IoMFC MFC32 { get; set; } [Tag("MFC51")] public IoMFC MFC51 { get; set; } [Tag("MFC57")] public IoMFC MFC57 { get; set; } //[Tag("GasLineA")] //public IoGasStick2 GasLineA { get; set; } //[Tag("GasLineB")] //public IoGasStick2 GasLineB { get; set; } //[Tag("GasLineC")] //public IoGasStick2 GasLineC { get; set; } //[Tag("GasLineNX")] //public IoGasStick2 GasLineNX { get; set; } //[Tag("GasLineNY")] //public IoGasStick2 GasLineNY { get; set; } //[Tag("GasLineN1")] //public IoGasStick2 GasLineN1 { get; set; } //[Tag("GasLineN2")] //public IoGasStick2 GasLineN2 { get; set; } //[Tag("GasLineN3")] //public IoGasStick2 GasLineN3 { get; set; } //[Tag("GasLineM1")] //public IoGasStick2 GasLineM1 { get; set; } //[Tag("GasLineM2")] //public IoGasStick2 GasLineM2 { get; set; } //[Tag("GasLineD1")] //public IoGasStick2 GasLineD1 { get; set; } //[Tag("GasLineJ1")] //public IoGasStick2 GasLineJ1 { get; set; } // ------------------------------------------------------------------------- [Tag("Shutter")] public IoShutter Shutter { get; set; } [Tag("FFU1")] public IoFFU FFU1 { get; set; } [Tag("FFU2")] public IoFFU FFU2 { get; set; } [Tag("FFU3")] public IoFFU FFU3 { get; set; } [Tag("FFU4")] public IoFFU FFU4 { get; set; } [Tag("FFU5")] public IoFFU FFU5 { get; set; } [Tag("FFU6")] public IoFFU FFU6 { get; set; } [Tag("FFU7")] public IoFFU FFU7 { get; set; } [Tag("FFU8")] public IoFFU FFU8 { get; set; } [Tag("FFU9")] public IoFFU FFU9 { get; set; } // ------------------------------------------------------------------------- [Tag("APC")] public IoAPC APC { get; set; } // ------------------------------------------------------------------------- //[Tag("MainPump")] //public IoPump MainPump { get; set; } //[Tag("IoPump")] //public IoPump IoPump { get; set; } // ------------------------------------------------------------------------- //[Tag("VG2Pressure")] //public IoPressureMeter VG2Pressure { get; set; } //[Tag("PT52")] //public IoPressureMeter PT52 { get; set; } //[Tag("PT53")] //public IoPressureMeter PT53 { get; set; } //[Tag("PT10")] //public IoPressureMeter PT10 { get; set; } //[Tag("PT20")] //public IoPressureMeter PT20 { get; set; } //[Tag("PT30")] //public IoPressureMeter PT30 { get; set; } //[Tag("O2Detector1")] //public IoPressureMeter O2Detector1 { get; set; } //[Tag("O2Detector2")] //public IoPressureMeter O2Detector2 { get; set; } // ------------------------------------------------------------------------- [Tag("TrigFurnaceLZoneHeatingEnable")] public IoTrigger TrigFurnaceLZoneHeatingEnable { get; set; } [Tag("TrigFurnaceCLZoneHeatingEnable")] public IoTrigger TrigFurnaceCLZoneHeatingEnable { get; set; } [Tag("TrigFurnaceCZoneHeatingEnable")] public IoTrigger TrigFurnaceCZoneHeatingEnable { get; set; } [Tag("TrigFurnaceCUZoneHeatingEnable")] public IoTrigger TrigFurnaceCUZoneHeatingEnable { get; set; } [Tag("TrigFurnaceUZoneHeatingEnable")] public IoTrigger TrigFurnaceUZoneHeatingEnable { get; set; } [Tag("TrigVGUnitConversion")] public IoTrigger TrigVGUnitConversion { get; set; } [Tag("TrigForlineHeaterOn")] public IoTrigger TrigForlineHeaterOn { get; set; } [Tag("TrigHTR1SWON")] public IoTrigger TrigHTR1SWON { get; set; } [Tag("TrigHTR2SWON")] public IoTrigger TrigHTR2SWON { get; set; } [Tag("TrigHTR3SWON")] public IoTrigger TrigHTR3SWON { get; set; } [Tag("TrigDEPOSW")] public IoTrigger TrigDEPOSW { get; set; } [Tag("TrigCREFON")] public IoTrigger TrigCREFON { get; set; } [Tag("TrigSIREFON")] public IoTrigger TrigSIREFON { get; set; } [Tag("TrigHFCleanSwitchB")] public IoTrigger TrigHFCleanSwitchB { get; set; } [Tag("TrigF2CleanSwitchB")] public IoTrigger TrigF2CleanSwitchB { get; set; } public IoHeater HeaterU { get; set; } public IoHeater HeaterCU { get; set; } public IoHeater HeaterC { get; set; } public IoHeater HeaterCL { get; set; } public IoHeater HeaterL { get; set; } //private Dictionary _gasMFCs; //public Dictionary GasMFCs => _gasMFCs; [Tag("TrigAV71ExternalHeater")] public IoTrigger TrigAV71ExternalHeater { get; set; } [Tag("TrigAV71RingHeater")] public IoTrigger TrigAV71RingHeater { get; set; } [Tag("TrigHeaterAllEnable")] public IoTrigger TrigHeaterAllEnable { get; set; } [Tag("TrigGasLineHeaterMemoryChange")] public IoTrigger TrigGasLineHeaterMemoryChange { get; set; } #region N2Purge [Tag("TrigN2PurgeLAO2CheckFirstEnable")] public IoTrigger TrigN2PurgeLAO2CheckFirstEnable { get; set; } [Tag("TrigN2PurgeFIMS1O2CheckEnable")] public IoTrigger TrigN2PurgeFIMS1O2CheckEnable { get; set; } [Tag("TrigN2PurgeFIMS2O2CheckEnable")] public IoTrigger TrigN2PurgeFIMS2O2CheckEnable { get; set; } [Tag("TrigN2PurgeProcess")] public IoTrigger TrigN2PurgeProcess { get; set; } [Tag("TrigN2PurgeLAO2OverTime")] public IoTrigger TrigN2PurgeLAO2OverTime { get; set; } [Tag("TrigN2PurgeLAO2CheckTime")] public IoTrigger TrigN2PurgeLAO2CheckTime { get; set; } [Tag("TrigN2PurgeFOUPO2OverTime")] public IoTrigger TrigN2PurgeFOUPO2OverTime { get; set; } [Tag("TrigN2PurgeFOUPO2CheckTime")] public IoTrigger TrigN2PurgeFOUPO2CheckTime { get; set; } [Tag("TrigN2PurgeExchangeLATOFOUPWaitTime")] public IoTrigger TrigN2PurgeExchangeLATOFOUPWaitTime { get; set; } [Tag("TrigN2PurgeExchangeFOUPTOLAWaitTime")] public IoTrigger TrigN2PurgeExchangeFOUPTOLAWaitTime { get; set; } [Tag("TrigN2PurgeExchangeFOUPTOFOUPWaitTime")] public IoTrigger TrigN2PurgeExchangeFOUPTOFOUPWaitTime { get; set; } [Tag("TrigN2PurgeLAO2CheckSV")] public IoTrigger TrigN2PurgeLAO2CheckSV { get; set; } [Tag("TrigN2PurgeFOUPO2CheckSV")] public IoTrigger TrigN2PurgeFOUPO2CheckSV { get; set; } #endregion #region IoHeaterBand [Tag("CapHeater")] public IoHeaterBand CapHeater { get; set; } [Tag("APCExternalHeater")] public IoHeaterBand APCExternalHeater { get; set; } [Tag("APCRingHeater")] public IoHeaterBand APCRingHeater { get; set; } #endregion // ------------------------------------------------------------------------- [Tag("BoatElevatorServo")] public IoFurnaceMotor ZAxisDevice { get; set; } [Tag("BoatRotationServo")] public IoFurnaceMotor RAxisDevice { get; set; } [Tag("APC")] public IoAPC APCDevice { get; set; } [Tag("TrigGasLineHeaterUnit1PowerOn")] public IoTrigger2 TrigGasLine1PowerOn { get; set; } [Tag("TrigGasLineHeaterUnit2PowerOn")] public IoTrigger2 TrigGasLine2PowerOn { get; set; } [Tag("TrigGasLineHeaterUnit3PowerOn")] public IoTrigger2 TrigGasLine3PowerOn { get; set; } [Tag("TrigGasLineHeaterUnit4PowerOn")] public IoTrigger2 TrigGasLine4PowerOn { get; set; } [Tag("TrigGasLineHeaterUnit6PowerOn")] public IoTrigger2 TrigGasLine6PowerOn { get; set; } [Tag("TrigGasLineHeaterUnit7PowerOn")] public IoTrigger2 TrigGasLine7PowerOn { get; set; } [Tag("TrigGasLineHeaterUnit1RecipeChange")] public IoTrigger2 TrigGasLine1RecipeChange { get; set; } [Tag("TrigGasLineHeaterUnit2RecipeChange")] public IoTrigger2 TrigGasLine2RecipeChange { get; set; } [Tag("TrigGasLineHeaterUnit3RecipeChange")] public IoTrigger2 TrigGasLine3RecipeChange { get; set; } [Tag("TrigGasLineHeaterUnit4RecipeChange")] public IoTrigger2 TrigGasLine4RecipeChange { get; set; } [Tag("TrigGasLineHeaterUnit6RecipeChange")] public IoTrigger2 TrigGasLine6RecipeChange { get; set; } [Tag("TrigGasLineHeaterUnit7RecipeChange")] public IoTrigger2 TrigGasLine7RecipeChange { get; set; } [Tag("MINI8AlarmReset")] public IoReset MINI8AlarmReset { get; set; } [Tag("PLCCPUReset")] public IoReset PLCCPUReset { get; set; } Func _hasTagAttribute; Func _isTagAttribute; public override double ChamberPressure { get { return 0; } } //public IAdsPlc Plc { get; set; } private List _allModuleDevice = new List(); private List _processMFCs = new List(); private List _heaters = new List(); private List _valves = new List(); private List _fFUs = new List(); private List _gasSticks; public List GasSticks => _gasSticks; private List _triggeredAlarmList = new List(); private List _alarmSignals = new List(); private FurnaceSignalTower _signalTowerDevice; private int _alarmNumber; private List _inCommandLst; private Dictionary _inCommandTirgs = new Dictionary(); private IoTrigger _trigTHPowerEN; private IoTrigger _trigHECPowerONLamp; private List _HTR1Group = new List(); private List _HTR2Group = new List(); private List _HTR3Group = new List(); public void InitDevice() { InitAllWaferTypeNode(); _isTagAttribute = attribute => attribute is TagAttribute; _hasTagAttribute = mi => mi.GetCustomAttributes(false).Any(_isTagAttribute); var properties = this.GetType().GetProperties().Where(_hasTagAttribute); foreach (var field in properties) { TagAttribute tag = field.GetCustomAttributes(false).First(_isTagAttribute) as TagAttribute; IDevice device = DEVICE.GetDevice($"{Module}.{tag.Tag}"); if (device == null) device = DEVICE.GetDevice($"PM1.{tag.Tag}"); if (device == null) device = DEVICE.GetDevice($"System.{tag.Tag}"); if (device != null) { _allModuleDevice.Add(device); PropertyInfo pi = (PropertyInfo)field; var convertedValue = Convert.ChangeType(device, pi.PropertyType); System.Diagnostics.Debug.Assert(convertedValue != null); pi.SetValue(this, convertedValue); if (device is IoAlarmSignal) { _alarmSignals.Add(device as IoAlarmSignal); } device.OnDeviceAlarmStateChanged += OnModuleDeviceAlarmStateChanged; if (device is IoMFC && device.Name != "MFC57") _processMFCs.Add(device as IoMFC); if (device is IoHeater) _heaters.Add(device as IoHeater); else if (device is IoValve) _valves.Add(device as IoValve); else if (device is HeaterBase) _HTR2Group.Add(device as HeaterBase); else if (device is IoFFU) _fFUs.Add(device as IoFFU); } else { } } for (int i = 1; i < 10; i++) { for (int ch = 1; ch < 40; ch++) { var device = DEVICE.GetDevice($"PM1.GaslineHeaterUnit{i}CH{ch}"); if (device != null) { if ((i == 4 && ch == 1) || (i == 4 && ch == 2) || (i == 4 && ch == 3) || (i == 4 && ch == 4)) { //这几个从_HTR2Group中删除 //_HTR2Group.Add(device); continue; } else _HTR1Group.Add(device); } } } for (int i = 1; i < 20; i++) { var device = DEVICE.GetDevice($"PM1.ForelineHeater{i}"); if (device != null) { _HTR2Group.Add(device); } } //Singleton.Instance.Start(Singleton.Instance); //FlowmeterLists = DEVICE.GetDevice().Where(o => o.Module == Module).ToList(); HeaterU = DEVICE.GetDevice($"System.HeaterU"); HeaterCU = DEVICE.GetDevice($"System.HeaterCU"); HeaterC = DEVICE.GetDevice($"System.HeaterC"); HeaterCL = DEVICE.GetDevice($"System.HeaterCL"); HeaterL = DEVICE.GetDevice($"System.HeaterL"); _heaters = new List() { HeaterU, HeaterCU, HeaterC, HeaterCL, HeaterL, }; foreach (var heater in _heaters) { if (heater != null) { heater.OnDeviceAlarmStateChanged += OnModuleDeviceAlarmStateChanged; } } Singleton.Instance.OnDeviceAlarmStateChanged += OnModuleDeviceAlarmStateChanged; this.OnDeviceAlarmStateChanged += OnModuleDeviceAlarmStateChanged; foreach (var pv in Singleton.Instance.Providers) { if ((pv as IoProvider) != null) (pv as IoProvider).OnDeviceAlarmStateChanged += OnModuleDeviceAlarmStateChanged; } _gasSticks = new List() { //GasLineA, //GasLineB, //GasLineC, //GasLineNX, //GasLineNY, //GasLineN1, //GasLineN2, //GasLineN3, //GasLineM1, //GasLineM2, //GasLineD1, //GasLineJ1, }; _signalTowerDevice = DEVICE.GetDevice($"{ModuleName.System}.{ModuleName.SignalTower}"); _trigTHPowerEN = DEVICE.GetDevice($"PM1.TrigTHPowerEN"); _trigHECPowerONLamp = DEVICE.GetDevice($"{Module}.TrigHECPowerONLamp"); _inCommandLst = new List() { //SensorHECPowerONSW, // SensorTHBreakOK, }; //SensorLidClosed.OnSignalChanged += SensorLidClosed_OnSignalChanged; _n2PurgeSequenceAction = new Dictionary>>>() { {"N2PurgeAIRTo20PPM",Tuple.Create(new R_TRIG(), new List>() { Tuple.Create(ValveAV56,true), //AV56 Tuple.Create(ValveAV57,true),//AV57 Tuple.Create(ValveAV65,false), //AV65 Tuple.Create(ValveAV66,false),//AV66 Tuple.Create(ValveLADamper,true), //AV227 Tuple.Create(ValveAV58,false),//AV58 Tuple.Create(ValveAV59,false),//AV59 Tuple.Create(ValveFIMS1N2Purge,false), //AV63 Tuple.Create(ValveFIMS2N2Purge,false), //AV64 Tuple.Create(ValveSV61,false),//SV61 Tuple.Create(ValveSV62,false),//SV62 //Tuple.Create(ValveCommonBoxPressureRegulatingCylinder,false), //AV201 Tuple.Create(ValveLABacksideDoorCylinderControl,false),//V202 }) }, {"N2PurgeUnder20PPM",Tuple.Create(new R_TRIG(), new List>() { Tuple.Create(ValveAV56,true),//AV56 Tuple.Create(ValveAV57,false),//AV57 Tuple.Create(ValveAV65,false), //AV65 Tuple.Create(ValveAV66,false),//AV66 Tuple.Create(ValveLADamper,true), //AV227 Tuple.Create(ValveAV58,false),//AV58 Tuple.Create(ValveAV59,false),//AV59 Tuple.Create(ValveFIMS1N2Purge,false), //AV63 Tuple.Create(ValveFIMS2N2Purge,false), //AV64 Tuple.Create(ValveSV61,false),//SV61 Tuple.Create(ValveSV62,false),//SV62 //Tuple.Create(ValveCommonBoxPressureRegulatingCylinder,false), //AV201 Tuple.Create(ValveLABacksideDoorCylinderControl,false),//V202 }) }, {"AIR",Tuple.Create(new R_TRIG(), new List>() { Tuple.Create(ValveAV56,false), Tuple.Create(ValveAV57,false), Tuple.Create(ValveAV65,true), //AV65 Tuple.Create(ValveAV66,true), Tuple.Create(ValveLADamper,true), //AV227 Tuple.Create(ValveAV58,false), Tuple.Create(ValveAV59,false), Tuple.Create(ValveFIMS1N2Purge,false), //AV63 Tuple.Create(ValveFIMS2N2Purge,false), //AV64 Tuple.Create(ValveSV61,false), Tuple.Create(ValveSV62,false), //Tuple.Create(ValveCommonBoxPressureRegulatingCylinder,true), //AV201 Tuple.Create(ValveLABacksideDoorCylinderControl,true),//V202 }) }, {"DoorOpen",Tuple.Create(new R_TRIG(), new List>() { Tuple.Create(ValveAV56,false), Tuple.Create(ValveAV57,false), Tuple.Create(ValveAV65,true), //AV65 Tuple.Create(ValveAV66,true), Tuple.Create(ValveLADamper,false), //AV227 Tuple.Create(ValveAV58,false), Tuple.Create(ValveAV59,false), Tuple.Create(ValveFIMS1N2Purge,false), //AV63 Tuple.Create(ValveFIMS2N2Purge,false), //AV64 Tuple.Create(ValveSV61,false), Tuple.Create(ValveSV62,false), //Tuple.Create(ValveCommonBoxPressureRegulatingCylinder,true), //AV201 Tuple.Create(ValveLABacksideDoorCylinderControl,true),//V202 }) }, {"Foup1",Tuple.Create(new R_TRIG(), new List>() { Tuple.Create(ValveAV56,true), Tuple.Create(ValveAV57,false), Tuple.Create(ValveAV65,false), //AV65 Tuple.Create(ValveAV66,false), Tuple.Create(ValveLADamper,true), //AV227 Tuple.Create(ValveAV58,true), Tuple.Create(ValveAV59,false), Tuple.Create(ValveFIMS1N2Purge,true), //AV63 Tuple.Create(ValveFIMS2N2Purge,false), //AV64 Tuple.Create(ValveSV61,true), Tuple.Create(ValveSV62,false), //Tuple.Create(ValveCommonBoxPressureRegulatingCylinder,false), //AV201 Tuple.Create(ValveLABacksideDoorCylinderControl,false),//V202 }) }, {"Foup2",Tuple.Create(new R_TRIG(), new List>() { Tuple.Create(ValveAV56,true), Tuple.Create(ValveAV57,false), Tuple.Create(ValveAV65,false), //AV65 Tuple.Create(ValveAV66,false), Tuple.Create(ValveLADamper,true), //AV227 Tuple.Create(ValveAV58,false), Tuple.Create(ValveAV59,true), Tuple.Create(ValveFIMS1N2Purge,false), //AV63 Tuple.Create(ValveFIMS2N2Purge,true), //AV64 Tuple.Create(ValveSV61,true), Tuple.Create(ValveSV62,true), //Tuple.Create(ValveCommonBoxPressureRegulatingCylinder,false), //AV201 Tuple.Create(ValveLABacksideDoorCylinderControl,false),//V202 }) }, }; _n2PurgeSequenceStatus = new Dictionary>() { {"N2PurgeAIRTo20PPM",()=> GetN2PurgeAIRTo20PPMStatus()}, {"N2PurgeUnder20PPM",()=> GetN2PurgeUnder20PPMStatus()}, {"AIR",()=> GetN2PurgeAIRStatus()}, {"DoorOpen",()=> GetN2PurgeDoorOpenStatus()}, {"Foup1",()=> GetN2PurgeFoup1Status()}, {"Foup2",()=> GetN2PurgeFoup2Status()}, }; TrigFurnaceUZoneHeatingEnable.SetTrigger(true, out _); TrigFurnaceCUZoneHeatingEnable.SetTrigger(true, out _); TrigFurnaceCZoneHeatingEnable.SetTrigger(true, out _); TrigFurnaceCLZoneHeatingEnable.SetTrigger(true, out _); TrigFurnaceLZoneHeatingEnable.SetTrigger(true, out _); MINI8AlarmReset?.Reset(); PLCCPUReset?.Reset(); } private void SensorLidClosed_OnSignalChanged(IoSensor sender, bool isTriggered) { if (!isTriggered) { EV.PostWarningLog(Module, $"Lid Open."); } } private void PlcDisconnected() { CheckToPostMessage(MSG.Disconnected); } private void PlcConnected() { if (IsInit) return; if (FsmState.Equals((int)STATE.NotConnected)) CheckToPostMessage(MSG.Connected); } public void OnModuleDeviceAlarmStateChanged(string deviceId, AlarmEventItem alarmItem) { if (alarmItem.IsTriggered) { EventLevel level = alarmItem.Level; string description = alarmItem.AdditionalDescription; //description += $" {(!string.IsNullOrEmpty(_recipeRunningInfo.RecipeName) ? $"Recipe:{_recipeRunningInfo.RecipeName}," : "")}Step:{(IsProcessing ? _recipeRunningInfo.StepName : "Standby")}"; //alarmItem.AdditionalDescription += $" {(!string.IsNullOrEmpty(_recipeRunningInfo.RecipeName) ? $"Recipe:{_recipeRunningInfo.RecipeName}," : "")}Step:{(IsProcessing ? _recipeRunningInfo.StepName : "Standby")}"; alarmItem.AdditionalDescription = description; alarmItem.OccuringTime = DateTime.Now; _triggeredAlarmList.Add(alarmItem); if (IsProcessing) { if (level == EventLevel.Alarm) { EV.PostAlarmLog(Module, alarmItem); } else { EV.PostWarningLog(Module, alarmItem); } } else { if (level == EventLevel.Alarm) { try { //if (!(bool)Aitex.Core.RT.DataCenter.DATA.Poll($"{alarmItem.EventEnum}.ignoreSaveDB")) { EV.PostAlarmLog(Module, alarmItem); //} } catch (Exception ex) { EV.WriteEvent(ex.Message.ToString()); } } else { EV.PostWarningLog(Module, alarmItem); } } } else { } } public override bool CheckAcked(int entityTaskToken) { return true; } #region pump device operation public override bool TurnOnPump(out string reason) { reason = string.Empty; return true /*MainPump.SetPump(out reason, 0, true)*/; } public override bool CheckPumpIsOn() { return true/*MainPump.IsRunning*/; } #endregion public bool CheckIsConnected() { return true; } public bool CheckHasAlarm() { foreach (var device in _allModuleDevice) { if (device != null && device.HasAlarm) return true; } return false; } public override bool CheckSlitValveClose() { return true; } public override bool CheckLidClosed() { return true; } public override bool CheckPrepareProcess() { return _isPrepareProcess; } public override bool CheckProcessFinished() { bool isFinished = true; var wafers = WaferManager.Instance.GetWafers(_module); if (wafers == null) { return false; } foreach (var wafer in wafers) { if (wafer.IsEmpty) continue; if (wafer.ProcessState != EnumWaferProcessStatus.Completed && wafer.ProcessState != EnumWaferProcessStatus.Failed) isFinished = false; } return isFinished; } public override bool CheckStandbyCondition() { return true; return CheckExternalSensorCondition() && CheckTempStabilizeCondition() && CheckReachTempCondition() && CheckPressureStablilizeCondition() && CheckReachPressureCondition() && CheckFinishAutoProfileCondition(); } #region conditionCheck private bool SeBypassStandbyFactor(out string reason, int time, object[] param) { reason = string.Empty; if (param != null && param.Length > 0) { var condition = param[0].ToString(); if (_conditionCheckDic.ContainsKey(condition)) { _conditionCheckDic[condition] = true; } } return true; } private bool SetConditionCheck(out string reason, int time, object[] param) { reason = string.Empty; _conditionCheckDic.Clear(); _conditionCheckItemDic.Clear(); _isExternalSensorConditionBypass = false; _isTempStabilizeConditionBypass = false; _isPressureStabilizeConditionBypass = false; _isReachTempConditionBypass = false; _isReachPressureConditionBypass = false; _isFinishAutoProfileConditionBypass = false; if (param.Length > 0) { var conditions = param[0].ToString().Split(';').ToList(); foreach (var condition in conditions) { var arry = condition.Split(':'); if (arry.Length > 1) { switch (arry[0]) { case "ExternalSensor": SetExternalSensorCondition("Wait For External Sensor", arry[1]); break; case "TempStabilize": SetTempStabilizeCondition("Wait For Temperature Stablilize", arry[1]); break; case "ReachTemp": SetReachTempCondition("Wait For Reach Temperature", arry[1]); break; case "ReachPressure": SetReachPressureCondition("Wait For Reach Pressure", arry[1]); break; case "PressureStabilize": SetPressureStabilizeCondition("Wait For Pressure Stablilize", arry[1]); break; case "FinishAutoProfile": SetFinishAutoProfileCondition("Wait For Finish Auto Profile", arry[1]); break; case "None": case "none": break; } } } } return true; } private void SetExternalSensorCondition(string title, string para) { var conditions = para.ToLower().Split(',').ToList(); if (conditions.Any(x => !x.Contains("none"))) { _conditionCheckDic.Add(title, false); _conditionCheckItemDic.Add(title, para); } } private void SetTempStabilizeCondition(string title, string para) { if (para.ToLower() != "none") { _conditionCheckDic.Add(title, false); _conditionCheckItemDic.Add(title, para); foreach (var heater in _heaters) { //heater.SetStableParameters(para); } } } private void SetReachTempCondition(string title, string para) { if (para.ToLower() != "none") { _conditionCheckDic.Add(title, false); _conditionCheckItemDic.Add(title, para); } } private void SetReachPressureCondition(string title, string para) { if (para.ToLower() != "none") { _conditionCheckDic.Add(title, false); _conditionCheckItemDic.Add(title, para); } } private void SetFinishAutoProfileCondition(string title, string para) { if (para.ToLower() != "none") { _conditionCheckDic.Add(title, false); _conditionCheckItemDic.Add(title, para); } } private void SetPressureStabilizeCondition(string title, string para) { if (para.ToLower() != "none") { _conditionCheckDic.Add(title, false); _conditionCheckItemDic.Add(title, para); //APC.SetStableParameters(para); } } public bool CheckExternalSensorCondition() { var key = "Wait For External Sensor"; if (_conditionCheckDic.ContainsKey(key)) { if (_conditionCheckItemDic.ContainsKey(key)) { var items = _conditionCheckItemDic[key].Split(',').ToList(); bool isMatch = true; foreach (var item in items) { var sensorAndResult = item.Split('.'); if (sensorAndResult.Length > 1 && sensorAndResult[1].ToLower() != "none") { var sensorDevice = DEVICE.GetDevice($"{Module}.{sensorAndResult[0]}"); if (sensorDevice == null) sensorDevice = DEVICE.GetDevice($"System.{sensorAndResult[0]}"); if (sensorDevice != null) { isMatch = sensorAndResult[1].ToLower() == "on" ? sensorDevice.Value : !sensorDevice.Value; } if (!isMatch) break; } } _conditionCheckDic[key] = isMatch; } if (_isExternalSensorConditionBypass) _conditionCheckDic[key] = true; return _conditionCheckDic[key]; } else { return true; } } public bool CheckTempStabilizeCondition() { var key = "Wait For Temperature Stablilize"; return true; } public bool CheckReachTempCondition() { var key = "Wait For Reach Temperature"; return true; } public bool CheckPressureStablilizeCondition() { var key = "Wait For Pressure Stablilize"; if (_conditionCheckDic.ContainsKey(key)) { //_conditionCheckDic[key] = APC.IsStable; if (_isPressureStabilizeConditionBypass) _conditionCheckDic[key] = true; return _conditionCheckDic[key]; } else { return true; } } public bool CheckReachPressureCondition() { var key = "Wait For Reach Pressure"; if (_conditionCheckDic.ContainsKey(key)) { if (_conditionCheckItemDic.ContainsKey(key)) { var itemArry = _conditionCheckItemDic[key].Split(','); if (itemArry != null && itemArry.Length > 1) { float.TryParse(itemArry[1], out float pressure); if (itemArry[0] == "WaitMoreThan") { //_conditionCheckDic[key] = APC.PressureFeedback > pressure; } else if (itemArry[0] == "WaitLessThan") { //_conditionCheckDic[key] = APC.PressureFeedback < pressure; } } } if (_isReachPressureConditionBypass) _conditionCheckDic[key] = true; return _conditionCheckDic[key]; } else { return true; } } public bool CheckFinishAutoProfileCondition() { var key = "Wait For Finish Auto Profile"; if (_conditionCheckDic.ContainsKey(key)) { if (_isFinishAutoProfileConditionBypass) _conditionCheckDic[key] = true; return _conditionCheckDic[key]; } else { return true; } } #endregion private bool SetBoatZAxisMotion(out string reason, int time, object[] param) { reason = string.Empty; //if (AutoDoor.UpDownStatus != ASUpDownStatus.Down || AutoDoor.OpenCloseStatus != ASOpenCloseStatus.Open) //{ // (Singleton.Instance.Modules[ModuleName.Boat] as BoatModule).BoatZAxisMoveFailedForInterlock.Set(); // return false; //} return true; //return BoatDevice.ZAxisMoveTo(param[0].ToString(), out reason); } private bool SetBoatRAxisMotion(out string reason, int time, object[] param) { reason = string.Empty; return true; } private bool SetAutoShutterUp(out string reason, int time, object[] param) { reason = string.Empty; bool.TryParse(param[0].ToString(), out bool isUp); //if (BoatDevice.BoatCurrentPosition != BoatPosition.HomePosition && BoatDevice.BoatCurrentPosition != BoatPosition.ProcessPosition) //{ // AutoShutter.AutoShutterMoveFailedForInterlock.Set(); // return false; //} //return AutoDoor.SetUp(isUp, out reason); return true; } private bool SetAutoShutterOpen(out string reason, int time, object[] param) { reason = string.Empty; bool.TryParse(param[0].ToString(), out bool isOpen); var ZAxisDevice = DEVICE.GetDevice($"PM1.BoatElevatorServo"); if (!ZAxisDevice.CheckServoAtPosition(BoatPosition.HomePosition.ToString())) { ShutterMoveFailedForInterlock.Set(); return true; } return Shutter.SetOpen(isOpen, out reason); } private bool SetAutoShutterRotateOpen(out string reason, int time, object[] param) { reason = string.Empty; bool.TryParse(param[0].ToString(), out bool isOpen); //if (BoatDevice.BoatCurrentPosition != BoatPosition.HomePosition && BoatDevice.BoatCurrentPosition != BoatPosition.ProcessPosition) //{ // AutoShutter.AutoShutterMoveFailedForInterlock.Set(); // return false; //} //return AutoDoor.SetShutterRotateOpen(isOpen, out reason); return true; } private bool SetCommand(out string reason, int time, object[] param) { reason = string.Empty; var command = param[0].ToString(); switch (command) { case "Hold": _processRoutine.PauseRecipe(); break; case "Hold + Buzzer": _processRoutine.PauseRecipe(); BuzzerOn(); break; case "Buzzer": BuzzerOn(); break; case "Leak Check1": case "Leak Check2": case "Leak Check3": int.TryParse(command.Replace("Leak Check", ""), out int index); SetLeakCheckTableIndex(index); break; } return true; } public bool SetSensorRecipeOK(out string reason, int time, object[] param) { reason = string.Empty; SensorRecipeOK.Value = true; //SensorPROCManualOK.Value = false; return true; } public bool SetSensorPROCManualOK(out string reason, int time, object[] param) { reason = string.Empty; SensorRecipeOK.Value = false; //SensorPROCManualOK.Value = true; return true; } public bool SetEditRecipeName(out string reason, int time, object[] param) { reason = string.Empty; EditRecipeName = param[0].ToString(); return true; } public bool SetEditRecipeStepName(out string reason, int time, object[] param) { reason = string.Empty; EditRecipeStepName = param[0].ToString(); return true; } private void BuzzerOn() { _signalTowerDevice.IsAutoSetLight = false; _signalTowerDevice.SetLight(LightType.Buzzer1, TowerLightStatus.On); } public bool CheckBoatState() { return (Singleton.Instance.Modules[ModuleName.Boat] as BoatModule).IsReady; } //#region Temperature/Pressure Tolerance //#region Heater Tolerance Alarm //public bool CheckHeaterBottomToleranceAlaram() //{ // return Heater2.DeviceData.IsLspModeFeedBack ? Heater2.CheckToleranceAlarm() : Heater1.CheckToleranceAlarm(); //} //public bool CheckHeaterCenterBottomToleranceAlaram() //{ // return Heater4.DeviceData.IsLspModeFeedBack ? Heater4.CheckToleranceAlarm() : Heater3.CheckToleranceAlarm(); //} //public bool CheckHeaterCenterToleranceAlaram() //{ // return Heater6.DeviceData.IsLspModeFeedBack ? Heater6.CheckToleranceAlarm() : Heater5.CheckToleranceAlarm(); //} //public bool CheckHeaterCenterTopToleranceAlaram() //{ // return Heater8.DeviceData.IsLspModeFeedBack ? Heater8.CheckToleranceAlarm() : Heater7.CheckToleranceAlarm(); //} //public bool CheckHeaterTopToleranceAlaram() //{ // return Heater10.DeviceData.IsLspModeFeedBack ? Heater10.CheckToleranceAlarm() : Heater9.CheckToleranceAlarm(); //} //public void SetHeaterBottomToleranceAlaram() //{ // if (Heater2.DeviceData.IsLspModeFeedBack) // Heater2.SetToleranceAlarm(); // else // Heater1.SetToleranceAlarm(); //} //public void SetHeaterCenterBottomToleranceAlaram() //{ // if (Heater4.DeviceData.IsLspModeFeedBack) // Heater4.SetToleranceAlarm(); // else // Heater3.SetToleranceAlarm(); //} //public void SetHeaterCenterToleranceAlaram() //{ // if (Heater6.DeviceData.IsLspModeFeedBack) // Heater6.SetToleranceAlarm(); // else // Heater5.SetToleranceAlarm(); //} //public void SetHeaterCenterTopToleranceAlaram() //{ // if (Heater8.DeviceData.IsLspModeFeedBack) // Heater8.SetToleranceAlarm(); // else // Heater7.SetToleranceAlarm(); //} //public void SetHeaterTopToleranceAlaram() //{ // if (Heater10.DeviceData.IsLspModeFeedBack) // Heater10.SetToleranceAlarm(); // else // Heater9.SetToleranceAlarm(); //} //#endregion //#region Heater Tolerance Warning //public bool CheckHeaterBottomToleranceWarning() //{ // return Heater2.DeviceData.IsLspModeFeedBack ? Heater2.CheckToleranceWarning() : Heater1.CheckToleranceWarning(); //} //public bool CheckHeaterCenterBottomToleranceWarning() //{ // return Heater4.DeviceData.IsLspModeFeedBack ? Heater4.CheckToleranceWarning() : Heater3.CheckToleranceWarning(); //} //public bool CheckHeaterCenterToleranceWarning() //{ // return Heater6.DeviceData.IsLspModeFeedBack ? Heater6.CheckToleranceWarning() : Heater5.CheckToleranceWarning(); //} //public bool CheckHeaterCenterTopToleranceWarning() //{ // return Heater8.DeviceData.IsLspModeFeedBack ? Heater8.CheckToleranceWarning() : Heater7.CheckToleranceWarning(); //} //public bool CheckHeaterTopToleranceWarning() //{ // return Heater10.DeviceData.IsLspModeFeedBack ? Heater10.CheckToleranceWarning() : Heater9.CheckToleranceWarning(); //} //public void SetHeaterBottomToleranceWarning() //{ // if (Heater2.DeviceData.IsLspModeFeedBack) // Heater2.SetToleranceWarning(); // else // Heater1.SetToleranceWarning(); //} //public void SetHeaterCenterBottomToleranceWarning() //{ // if (Heater4.DeviceData.IsLspModeFeedBack) // Heater4.SetToleranceWarning(); // else // Heater3.SetToleranceWarning(); //} //public void SetHeaterCenterToleranceWarning() //{ // if (Heater6.DeviceData.IsLspModeFeedBack) // Heater6.SetToleranceWarning(); // else // Heater5.SetToleranceWarning(); //} //public void SetHeaterCenterTopToleranceWarning() //{ // if (Heater8.DeviceData.IsLspModeFeedBack) // Heater8.SetToleranceWarning(); // else // Heater7.SetToleranceWarning(); //} //public void SetHeaterTopToleranceWarning() //{ // if (Heater10.DeviceData.IsLspModeFeedBack) // Heater10.SetToleranceWarning(); // else // Heater9.SetToleranceWarning(); //} //#endregion //#region Pressure Tolerance Alarm ////public bool CheckPressureToleranceAlaram() ////{ //// return APC.CheckToleranceAlarm(); ////} ////public void SetPressureToleranceAlaram() ////{ //// APC.SetToleranceAlarm(); ////} //#endregion //#region Pressure Tolerance Warning ////public bool CheckPressureToleranceWarning() ////{ //// return APC.CheckToleranceWarning(); ////} ////public void SetPressureToleranceWarning() ////{ //// APC.SetToleranceWarning(); ////} //#endregion //#region Reset Tolerance //public void ResetToleranceAlarm() //{ // foreach (var heater in _heaters) // { // heater.Reset(); // } // foreach (var key in _gasMFCs.Keys) // { // _gasMFCs[key].Reset(); // } // //APC.Reset(); //} //public void ResetToleranceAlarmChecker() //{ // foreach (var heater in _heaters) // { // heater.ResetAlarmChecker(); // heater.ResetWarningChecker(); // } // foreach (var key in _gasMFCs.Keys) // { // _gasMFCs[key].ResetAlarmChecker(); // _gasMFCs[key].ResetWarningChecker(); // } // //APC.ResetAlarmChecker(); // //APC.ResetWarningChecker(); //} //#endregion //#endregion private bool SetN2PurgeMode(out string reason, int time, object[] param) { reason = string.Empty; var mode = param[0].ToString(); switch (mode) { case "Auto": { _N2PurgeMode = N2PurgeMode.Auto; break; } case "Manual_N2Purge": { _N2PurgeMode = N2PurgeMode.Manual_N2Purge; break; } case "Manual_ATM": { _N2PurgeMode = N2PurgeMode.Manual_ATM; break; } case "Manual_Maintenance": { _N2PurgeMode = N2PurgeMode.Manual_Maintenance; break; } case "Auto_Check": { _N2PurgeMode = N2PurgeMode.Auto_Check; break; } } return true; } private void SetHeaterControlParameters(object[] param) { //Mode参数;Correct Table;PID Table //"Heater;Parameter\\TempCorrection\\tempCorrect,2,Name2;Parameter\\TempPID\\tempPID,3,Name3" if (param == null || param.Length == 0) { EV.PostWarningLog(Module, $"Invalid heater parameter"); return; } var paras = param[0].ToString().Split(';'); if (paras == null || paras.Length < 3) { EV.PostWarningLog(Module, $"Invalid heater parameter"); return; } var controlMode = paras[0]; var correct = paras[1]; var pid = paras[2]; HeaterU.SetControlMode(controlMode); HeaterCU.SetControlMode(controlMode); HeaterC.SetControlMode(controlMode); HeaterCL.SetControlMode(controlMode); HeaterL.SetControlMode(controlMode); SetHeaterCorrectParameters(correct); SetHeaterPIDParameters(pid); } private void SetHeaterCorrectParameters(string correct) { HeaterU.SetCorrectParameters(correct); HeaterCU.SetCorrectParameters(correct); HeaterC.SetCorrectParameters(correct); HeaterCL.SetCorrectParameters(correct); HeaterL.SetCorrectParameters(correct); } private void SetHeaterPIDParameters(string pid) { HeaterU.SetPIDParameters(pid); HeaterCU.SetPIDParameters(pid); HeaterC.SetPIDParameters(pid); HeaterCL.SetPIDParameters(pid); HeaterL.SetPIDParameters(pid); } private bool SetCEXHEnable(object[] param) { if (param != null && param.Length > 0) { bool.TryParse(param[0].ToString(), out bool isEnable); _fFUs.ForEach(a => a.SetSwitch(isEnable)); } return true; } private bool SetHTR1Enable(object[] param) { if (param != null && param.Length > 0) { bool.TryParse(param[0].ToString(), out bool isEnable); SC.SetItemValue($"PM1.IsHTR1Enable", isEnable); TrigHeaterAllEnable?.SetTrigger(isEnable, out _); } return true; } private bool SetHTR2Enable(object[] param) { if (param != null && param.Length > 0) { bool.TryParse(param[0].ToString(), out bool isEnable); SC.SetItemValue($"PM1.IsHTR2Enable", isEnable); } return true; } private bool SetHTR3Enable(object[] param) { if (param != null && param.Length > 0) { bool.TryParse(param[0].ToString(), out bool isEnable); SC.SetItemValue($"PM1.IsHTR3Enable", isEnable); } return true; } } }