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update io

jiangjy 1 month ago
parent
32f6ce554d
commit
feb1b27b50
2 changed files with 214 additions and 214 deletions
Split View Show Diff Stats
  1. 105 105
      Furnace/FurnaceRT/Config/IO/ELK/DeviceModelPM.xml
  2. 109 109
      Furnace/FurnaceRT/Config/IO/ELK/_ioDefinePM.xml

+ 105 - 105
Furnace/FurnaceRT/Config/IO/ELK/DeviceModelPM.xml
View File 

@@ -802,112 +802,112 @@
 
 

 

 	<IoAlarmSignals classType="Aitex.Core.RT.Device.Unit.IoAlarmSignal" assembly="MECF.Framework.RT.EquipmentLibrary">

-		<IoAlarmSignal id="AlarmSignalEMO01001powerboxEMO" diSignalsplay="EMO01001 power box EMO" diSignal="DI_EMO01001powerboxEMO" alarmTrigValue="true" />

-		<IoAlarmSignal id="AlarmSignalPowerboxfiredetector" diSignalsplay="Power box fire detector" diSignal="DI_Powerboxfiredetector" alarmTrigValue="true" />

-		<IoAlarmSignal id="AlarmSignalSMK01001detectoroperator" diSignalsplay="SMK01001 detector operator" diSignal="DI_SMK01001detectoroperator" alarmTrigValue="true" />

-		<IoAlarmSignal id="AlarmSignalSMK01001detectorfault" diSignalsplay="SMK01001 detector fault" diSignal="DI_SMK01001detectorfault" alarmTrigValue="true" />

-		<IoAlarmSignal id="AlarmSignalEMO02001gasboxEMO" diSignalsplay="EMO02001 gas box EMO" diSignal="DI_EMO02001gasboxEMO" alarmTrigValue="true" />

-		<IoAlarmSignal id="AlarmSignalEMO04001frontbodyEMO" diSignalsplay="EMO04001 frontbody EMO" diSignal="DI_EMO04001frontbodyEMO" alarmTrigValue="true" />

-		<IoAlarmSignal id="AlarmSignalLD02001LSCleakalarm" diSignalsplay="LD02001 LSC leak alarm" diSignal="DI_LD02001LSCleakalarm" alarmTrigValue="true" />

-		<IoAlarmSignal id="AlarmSignalLD05001Magneticfluidleak" diSignalsplay="LD05001 Magnetic fluid leak" diSignal="DI_LD05001Magneticfluidleak" alarmTrigValue="true" />

-		<IoAlarmSignal id="AlarmSignalLD05002Coolingwaterleak" diSignalsplay="LD05002 Cooling water leak" diSignal="DI_LD05002Coolingwaterleak" alarmTrigValue="true" />

-		<IoAlarmSignal id="AlarmSignalLD05003RHCleak" diSignalsplay="LD05003 RHC leak" diSignal="DI_LD05003RHCleak" alarmTrigValue="true" />

-		<IoAlarmSignal id="AlarmSignalLD03001exhaustboxwaterleakupside" diSignalsplay="LD03001 exhaust box water leak (up-side)" diSignal="DI_LD03001exhaustboxwaterleakupside" alarmTrigValue="true" />

-		<IoAlarmSignal id="AlarmSignalLD03002waterleakdownside" diSignalsplay="LD03002 water leak (down-side)" diSignal="DI_LD03002waterleakdownside" alarmTrigValue="true" />

-		<IoAlarmSignal id="AlarmSignalExternalEMO" diSignalsplay="External EMO" diSignal="DI_ExternalEMO" alarmTrigValue="true" />

-		<IoAlarmSignal id="AlarmSignalFurnacetransformertempsw" diSignalsplay="Furnace transformer temp sw" diSignal="DI_Furnacetransformertempsw" alarmTrigValue="true" />

-		<IoAlarmSignal id="AlarmSignalAC100Vtransformertempsw" diSignalsplay="AC100V transformer temp sw" diSignal="DI_AC100Vtransformertempsw" alarmTrigValue="true" />

-		<IoAlarmSignal id="AlarmSignalFurnacepoweronswitch" diSignalsplay="Furnace power on switch" diSignal="DI_Furnacepoweronswitch" alarmTrigValue="true" />

-		<IoAlarmSignal id="AlarmSignalAC100Vtransformerpowerswitch" diSignalsplay="AC100V transformer power switch" diSignal="DI_AC100Vtransformerpowerswitch" alarmTrigValue="true" />

-		<IoAlarmSignal id="AlarmSignalPowerboxinterlockresetbutton" diSignalsplay="Power box interlock reset button" diSignal="DI_Powerboxinterlockresetbutton" alarmTrigValue="true" />

-		<IoAlarmSignal id="AlarmSignalVFD01001EDM" diSignalsplay="VFD01001 EDM" diSignal="DI_VFD01001EDM" alarmTrigValue="true" />

-		<IoAlarmSignal id="AlarmSignalGasboxinterlockresetbutton" diSignalsplay="Gas box interlock reset button" diSignal="DI_Gasboxinterlockresetbutton" alarmTrigValue="true" />

-		<IoAlarmSignal id="AlarmSignalSCRONOFFSWITCH" diSignalsplay="SCR ON/OFF SWITCH" diSignal="DI_SCRONOFFSWITCH" alarmTrigValue="true" />

-		<IoAlarmSignal id="AlarmSignalGasboxexhaustpressurealarm1st" diSignalsplay="Gas box exhaust pressure alarm 1st" diSignal="DI_Gasboxexhaustpressurealarm1st" alarmTrigValue="true" />

-		<IoAlarmSignal id="AlarmSignalGasboxexhaustpressurealarm2nd" diSignalsplay="Gas box exhaust pressure alarm 2nd" diSignal="DI_Gasboxexhaustpressurealarm2nd" alarmTrigValue="true" />

-		<IoAlarmSignal id="AlarmSignalFS101waterflowalarm" diSignalsplay="FS101 water flow alarm" diSignal="DI_FS101waterflowalarm" alarmTrigValue="true" />

-		<IoAlarmSignal id="AlarmSignalFrontbodyinterlockresetbutton" diSignalsplay="Front body interlock reset button" diSignal="DI_Frontbodyinterlockresetbutton" alarmTrigValue="true" />

-		<IoAlarmSignal id="AlarmSignalLightcurtainOSSD1" diSignalsplay="Light curtain OSSD1" diSignal="DI_LightcurtainOSSD1" alarmTrigValue="true" />

-		<IoAlarmSignal id="AlarmSignalLightcurtainOSSD2" diSignalsplay="Light curtain OSSD2" diSignal="DI_LightcurtainOSSD2" alarmTrigValue="true" />

-		<IoAlarmSignal id="AlarmSignalLightcurtainfault" diSignalsplay="Light curtain fault" diSignal="DI_Lightcurtainfault" alarmTrigValue="true" />

-		<IoAlarmSignal id="AlarmSignalFrontbodydoorswitch" diSignalsplay="Front body door switch" diSignal="DI_Frontbodydoorswitch" alarmTrigValue="true" />

-		<IoAlarmSignal id="AlarmSignalFrontbodyIOshuttersw" diSignalsplay="Front body I/O shutter sw" diSignal="DI_FrontbodyIOshuttersw" alarmTrigValue="true" />

-		<IoAlarmSignal id="AlarmSignalFouprobotEMS" diSignalsplay="Foup robot EMS" diSignal="DI_FouprobotEMS" alarmTrigValue="true" />

-		<IoAlarmSignal id="AlarmSignalWaferrobotEMS" diSignalsplay="Wafer robot EMS" diSignal="DI_WaferrobotEMS" alarmTrigValue="true" />

-		<IoAlarmSignal id="AlarmSignalAxisCRmotorEDM" diSignalsplay="Axis-CR motor EDM" diSignal="DI_AxisCRmotorEDM" alarmTrigValue="true" />

-		<IoAlarmSignal id="AlarmSignalAxisEmotorEDM" diSignalsplay="Axis-E motor EDM" diSignal="DI_AxisEmotorEDM" alarmTrigValue="true" />

-		<IoAlarmSignal id="AlarmSignalTS05001FFUtempsw" diSignalsplay="TS05001 FFU temp sw" diSignal="DI_TS05001FFUtempsw" alarmTrigValue="true" />

-		<IoAlarmSignal id="AlarmSignalTS05002Capinsidetempsw" diSignalsplay="TS05002 Cap inside temp sw" diSignal="DI_TS05002Capinsidetempsw" alarmTrigValue="true" />

-		<IoAlarmSignal id="AlarmSignalTS05003Capoutsidetempsw" diSignalsplay="TS05003 Cap outside temp sw" diSignal="DI_TS05003Capoutsidetempsw" alarmTrigValue="true" />

-		<IoAlarmSignal id="AlarmSignalTS05004Raxisrotationtempsw" diSignalsplay="TS05004 R axis rotation temp sw" diSignal="DI_TS05004Raxisrotationtempsw" alarmTrigValue="true" />

-		<IoAlarmSignal id="AlarmSignalTS05005RHCtempsw" diSignalsplay="TS05005 RHC temp sw" diSignal="DI_TS05005RHCtempsw" alarmTrigValue="true" />

-		<IoAlarmSignal id="AlarmSignalTS05006furnacetempsw" diSignalsplay="TS05006 furnace temp sw" diSignal="DI_TS05006furnacetempsw" alarmTrigValue="true" />

-		<IoAlarmSignal id="AlarmSignalLoadingareaEMS" diSignalsplay="Loading area EMS" diSignal="DI_LoadingareaEMS" alarmTrigValue="true" />

-		<IoAlarmSignal id="AlarmSignalGD02001HCL1gasleak1stalarm" diSignalsplay="GD02001 HCL-1 gas leak 1st alarm" diSignal="DI_GD02001HCL1gasleak1stalarm" alarmTrigValue="true" />

-		<IoAlarmSignal id="AlarmSignalGD02001HCL1gasleak2ndalarm" diSignalsplay="GD02001 HCL-1 gas leak 2nd alarm" diSignal="DI_GD02001HCL1gasleak2ndalarm" alarmTrigValue="true" />

-		<IoAlarmSignal id="AlarmSignalGD02001fault" diSignalsplay="GD02001 fault" diSignal="DI_GD02001fault" alarmTrigValue="true" />

-		<IoAlarmSignal id="AlarmSignalGD02002HCL2gasleak1stalarm" diSignalsplay="GD02002 HCL-2 gas leak 1st alarm" diSignal="DI_GD02002HCL2gasleak1stalarm" alarmTrigValue="true" />

-		<IoAlarmSignal id="AlarmSignalGD02002HCL2gasleak2ndalarm" diSignalsplay="GD02002 HCL-2 gas leak 2nd alarm" diSignal="DI_GD02002HCL2gasleak2ndalarm" alarmTrigValue="true" />

-		<IoAlarmSignal id="AlarmSignalGD02002fault" diSignalsplay="GD02002 fault" diSignal="DI_GD02002fault" alarmTrigValue="true" />

-		<IoAlarmSignal id="AlarmSignalGD02003NH31gasleak1stalarm" diSignalsplay="GD02003 NH3-1 gas leak 1st alarm" diSignal="DI_GD02003NH31gasleak1stalarm" alarmTrigValue="true" />

-		<IoAlarmSignal id="AlarmSignalGD02003NH31gasleak2ndalarm" diSignalsplay="GD02003 NH3-1 gas leak 2nd alarm" diSignal="DI_GD02003NH31gasleak2ndalarm" alarmTrigValue="true" />

-		<IoAlarmSignal id="AlarmSignalGD02003fault" diSignalsplay="GD02003 fault" diSignal="DI_GD02003fault" alarmTrigValue="true" />

-		<IoAlarmSignal id="AlarmSignalGD02004NH32gasleak1stalarm" diSignalsplay="GD02004 NH3-2 gas leak 1st alarm" diSignal="DI_GD02004NH32gasleak1stalarm" alarmTrigValue="true" />

-		<IoAlarmSignal id="AlarmSignalGD02004NH32gasleak2ndalarm" diSignalsplay="GD02004 NH3-2 gas leak 2nd alarm" diSignal="DI_GD02004NH32gasleak2ndalarm" alarmTrigValue="true" />

-		<IoAlarmSignal id="AlarmSignalGD02004fault" diSignalsplay="GD02004 fault" diSignal="DI_GD02004fault" alarmTrigValue="true" />

-		<IoAlarmSignal id="AlarmSignalGD02005F21gasleak1stalarm" diSignalsplay="GD02005 F2-1 gas leak 1st alarm" diSignal="DI_GD02005F21gasleak1stalarm" alarmTrigValue="true" />

-		<IoAlarmSignal id="AlarmSignalGD02005F21gasleak2ndalarm" diSignalsplay="GD02005 F2-1 gas leak 2nd alarm" diSignal="DI_GD02005F21gasleak2ndalarm" alarmTrigValue="true" />

-		<IoAlarmSignal id="AlarmSignalGD02005fault" diSignalsplay="GD02005 fault" diSignal="DI_GD02005fault" alarmTrigValue="true" />

-		<IoAlarmSignal id="AlarmSignalGD02006F22gasleak1stalarm" diSignalsplay="GD02006 F2-2 gas leak 1st alarm" diSignal="DI_GD02006F22gasleak1stalarm" alarmTrigValue="true" />

-		<IoAlarmSignal id="AlarmSignalGD02006F22gasleak2ndalarm" diSignalsplay="GD02006 F2-2 gas leak 2nd alarm" diSignal="DI_GD02006F22gasleak2ndalarm" alarmTrigValue="true" />

-		<IoAlarmSignal id="AlarmSignalGD02006fault" diSignalsplay="GD02006 fault" diSignal="DI_GD02006fault" alarmTrigValue="true" />

-		<IoAlarmSignal id="AlarmSignalGD02007NO1gasleak1stalarm" diSignalsplay="GD02007 NO-1 gas leak 1st alarm" diSignal="DI_GD02007NO1gasleak1stalarm" alarmTrigValue="true" />

-		<IoAlarmSignal id="AlarmSignalGD02007NO1gasleak2ndalarm" diSignalsplay="GD02007 NO-1 gas leak 2nd alarm" diSignal="DI_GD02007NO1gasleak2ndalarm" alarmTrigValue="true" />

-		<IoAlarmSignal id="AlarmSignalGD02007fault" diSignalsplay="GD02007 fault" diSignal="DI_GD02007fault" alarmTrigValue="true" />

-		<IoAlarmSignal id="AlarmSignalGD02008NO2gasleak1stalarm" diSignalsplay="GD02008 NO-2 gas leak 1st alarm" diSignal="DI_GD02008NO2gasleak1stalarm" alarmTrigValue="true" />

-		<IoAlarmSignal id="AlarmSignalGD02008NO2gasleak2ndalarm" diSignalsplay="GD02008 NO-2 gas leak 2nd alarm" diSignal="DI_GD02008NO2gasleak2ndalarm" alarmTrigValue="true" />

-		<IoAlarmSignal id="AlarmSignalGD02008fault" diSignalsplay="GD02008 fault" diSignal="DI_GD02008fault" alarmTrigValue="true" />

-		<IoAlarmSignal id="AlarmSignalGD02009C3H61gasleak1stalarm" diSignalsplay="GD02009 C3H6-1 gas leak 1st alarm" diSignal="DI_GD02009C3H61gasleak1stalarm" alarmTrigValue="true" />

-		<IoAlarmSignal id="AlarmSignalGD02009C3H61gasleak2ndalarm" diSignalsplay="GD02009 C3H6-1 gas leak 2nd alarm" diSignal="DI_GD02009C3H61gasleak2ndalarm" alarmTrigValue="true" />

-		<IoAlarmSignal id="AlarmSignalGD02009fault" diSignalsplay="GD02009 fault" diSignal="DI_GD02009fault" alarmTrigValue="true" />

-		<IoAlarmSignal id="AlarmSignalGD02010C3H62gasleak1stalarm" diSignalsplay="GD02010 C3H6-2 gas leak 1st alarm" diSignal="DI_GD02010C3H62gasleak1stalarm" alarmTrigValue="true" />

-		<IoAlarmSignal id="AlarmSignalGD02010C3H62gasleak2ndalarm" diSignalsplay="GD02010 C3H6-2 gas leak 2nd alarm" diSignal="DI_GD02010C3H62gasleak2ndalarm" alarmTrigValue="true" />

-		<IoAlarmSignal id="AlarmSignalGD02010fault" diSignalsplay="GD02010 fault" diSignal="DI_GD02010fault" alarmTrigValue="true" />

-		<IoAlarmSignal id="AlarmSignalGD02011DMA1gasleak1stalarm" diSignalsplay="GD02011 DMA-1 gas leak 1st alarm" diSignal="DI_GD02011DMA1gasleak1stalarm" alarmTrigValue="true" />

-		<IoAlarmSignal id="AlarmSignalGD02011DMA1gasleak2ndalarm" diSignalsplay="GD02011 DMA-1 gas leak 2nd alarm" diSignal="DI_GD02011DMA1gasleak2ndalarm" alarmTrigValue="true" />

-		<IoAlarmSignal id="AlarmSignalGD02011fault" diSignalsplay="GD02011 fault" diSignal="DI_GD02011fault" alarmTrigValue="true" />

-		<IoAlarmSignal id="AlarmSignalGD02012DMA2gasleak1stalarm" diSignalsplay="GD02012 DMA-2 gas leak 1st alarm" diSignal="DI_GD02012DMA2gasleak1stalarm" alarmTrigValue="true" />

-		<IoAlarmSignal id="AlarmSignalGD02012DMA2gasleak2ndalarm" diSignalsplay="GD02012 DMA-2 gas leak 2nd alarm" diSignal="DI_GD02012DMA2gasleak2ndalarm" alarmTrigValue="true" />

-		<IoAlarmSignal id="AlarmSignalGD02012fault" diSignalsplay="GD02012 fault" diSignal="DI_GD02012fault" alarmTrigValue="true" />

-		<IoAlarmSignal id="AlarmSignalSL02001gasboxdoorsw11" diSignalsplay="SL02001 gas box door sw1-1" diSignal="DI_SL02001gasboxdoorsw11" alarmTrigValue="true" />

-		<IoAlarmSignal id="AlarmSignalSL02001gasboxdoorsw12" diSignalsplay="SL02001 gas box door sw1-2" diSignal="DI_SL02001gasboxdoorsw12" alarmTrigValue="true" />

-		<IoAlarmSignal id="AlarmSignalSL02002gasboxdoorsw11" diSignalsplay="SL02002 gas box door sw1-1" diSignal="DI_SL02002gasboxdoorsw11" alarmTrigValue="true" />

-		<IoAlarmSignal id="AlarmSignalSL02002gasboxdoorsw12" diSignalsplay="SL02002 gas box door sw1-2" diSignal="DI_SL02002gasboxdoorsw12" alarmTrigValue="true" />

-		<IoAlarmSignal id="AlarmSignalSL05001LAdoorsw1" diSignalsplay="SL05001 LA door sw1" diSignal="DI_SL05001LAdoorsw1" alarmTrigValue="true" />

-		<IoAlarmSignal id="AlarmSignalSL05002LAdoorsw2" diSignalsplay="SL05002 LA door sw2" diSignal="DI_SL05002LAdoorsw2" alarmTrigValue="true" />

-		<IoAlarmSignal id="AlarmSignalSL05004LAfurnacedoorsw" diSignalsplay="SL05004 LA furnace door sw" diSignal="DI_SL05004LAfurnacedoorsw" alarmTrigValue="true" />

-		<IoAlarmSignal id="AlarmSignalFurnacepoweronoff" diSignalsplay="Furnace power on/off" diSignal="DI_Furnacepoweronoff" alarmTrigValue="true" />

-		<IoAlarmSignal id="AlarmSignalBlowerpoweronoff" diSignalsplay="Blower power on/off" diSignal="DI_Blowerpoweronoff" alarmTrigValue="true" />

-		<IoAlarmSignal id="AlarmSignal100Vtransformerpoweron" diSignalsplay="100V transformer power on" diSignal="DI_100Vtransformerpoweron" alarmTrigValue="true" />

-		<IoAlarmSignal id="AlarmSignalVFDenable" diSignalsplay="VFD enable" diSignal="DI_VFDenable" alarmTrigValue="true" />

-		<IoAlarmSignal id="AlarmSignalHPMvalvepoweronoff" diSignalsplay="HPM valve power on/off" diSignal="DI_HPMvalvepoweronoff" alarmTrigValue="true" />

-		<IoAlarmSignal id="AlarmSignalAxisCRmotorenable1" diSignalsplay="Axis-CR motor enable1" diSignal="DI_AxisCRmotorenable1" alarmTrigValue="true" />

-		<IoAlarmSignal id="AlarmSignalAxisCRmotorenable2" diSignalsplay="Axis-CR motor enable2" diSignal="DI_AxisCRmotorenable2" alarmTrigValue="true" />

-		<IoAlarmSignal id="AlarmSignalAxisEmotorenable1" diSignalsplay="Axis-E motor enable1" diSignal="DI_AxisEmotorenable1" alarmTrigValue="true" />

-		<IoAlarmSignal id="AlarmSignalAxisEmotorenable2" diSignalsplay="Axis-E motor enable2" diSignal="DI_AxisEmotorenable2" alarmTrigValue="true" />

-		<IoAlarmSignal id="AlarmSignalFTRenable1" diSignalsplay="FTR enable1" diSignal="DI_FTRenable1" alarmTrigValue="true" />

-		<IoAlarmSignal id="AlarmSignalFTRenable2" diSignalsplay="FTR enable2" diSignal="DI_FTRenable2" alarmTrigValue="true" />

-		<IoAlarmSignal id="AlarmSignalFTRinterlockreset" diSignalsplay="FTR interlock reset" diSignal="DI_FTRinterlockreset" alarmTrigValue="true" />

-		<IoAlarmSignal id="AlarmSignalWTRenable1" diSignalsplay="WTR enable1" diSignal="DI_WTRenable1" alarmTrigValue="true" />

-		<IoAlarmSignal id="AlarmSignalWTRenable2" diSignalsplay="WTR enable2" diSignal="DI_WTRenable2" alarmTrigValue="true" />

-		<IoAlarmSignal id="AlarmSignalWTRinterlockreset" diSignalsplay="WTR interlock reset" diSignal="DI_WTRinterlockreset" alarmTrigValue="true" />

-		<IoAlarmSignal id="AlarmSignalCapheaterenable" diSignalsplay="Cap heater enable" diSignal="DI_Capheaterenable" alarmTrigValue="true" />

-		<IoAlarmSignal id="AlarmSignalLightcurtainidel" diSignalsplay="Light curtain idel" diSignal="DI_Lightcurtainidel" alarmTrigValue="true" />

-		<IoAlarmSignal id="AlarmSignalPowerboxinterlockbuttonled" diSignalsplay="Power box interlock button led" diSignal="DI_Powerboxinterlockbuttonled" alarmTrigValue="true" />

-		<IoAlarmSignal id="AlarmSignalGasboxinterlockbuttonled" diSignalsplay="Gas box interlock button led" diSignal="DI_Gasboxinterlockbuttonled" alarmTrigValue="true" />

-		<IoAlarmSignal id="AlarmSignalFrontbodyinterlockbuttonled" diSignalsplay="Frontbody interlock button led" diSignal="DI_Frontbodyinterlockbuttonled" alarmTrigValue="true" />

+		<IoAlarmSignal id="AlarmSignalEMO01001powerboxEMO" diSignalsplay="safe module:EMO01001 power box EMO" diSignal="DI_EMO01001powerboxEMO" alarmTrigValue="true" />

+		<IoAlarmSignal id="AlarmSignalPowerboxfiredetector" diSignalsplay="safe module:Power box fire detector" diSignal="DI_Powerboxfiredetector" alarmTrigValue="true" />

+		<IoAlarmSignal id="AlarmSignalSMK01001detectoroperator" diSignalsplay="safe module:SMK01001 detector operator" diSignal="DI_SMK01001detectoroperator" alarmTrigValue="true" />

+		<IoAlarmSignal id="AlarmSignalSMK01001detectorfault" diSignalsplay="safe module:SMK01001 detector fault" diSignal="DI_SMK01001detectorfault" alarmTrigValue="true" />

+		<IoAlarmSignal id="AlarmSignalEMO02001gasboxEMO" diSignalsplay="safe module:EMO02001 gas box EMO" diSignal="DI_EMO02001gasboxEMO" alarmTrigValue="true" />

+		<IoAlarmSignal id="AlarmSignalEMO04001frontbodyEMO" diSignalsplay="safe module:EMO04001 frontbody EMO" diSignal="DI_EMO04001frontbodyEMO" alarmTrigValue="true" />

+		<IoAlarmSignal id="AlarmSignalLD02001LSCleakalarm" diSignalsplay="safe module:LD02001 LSC leak alarm" diSignal="DI_LD02001LSCleakalarm" alarmTrigValue="true" />

+		<IoAlarmSignal id="AlarmSignalLD05001Magneticfluidleak" diSignalsplay="safe module:LD05001 Magnetic fluid leak" diSignal="DI_LD05001Magneticfluidleak" alarmTrigValue="true" />

+		<IoAlarmSignal id="AlarmSignalLD05002Coolingwaterleak" diSignalsplay="safe module:LD05002 Cooling water leak" diSignal="DI_LD05002Coolingwaterleak" alarmTrigValue="true" />

+		<IoAlarmSignal id="AlarmSignalLD05003RHCleak" diSignalsplay="safe module:LD05003 RHC leak" diSignal="DI_LD05003RHCleak" alarmTrigValue="true" />

+		<IoAlarmSignal id="AlarmSignalLD03001exhaustboxwaterleakupside" diSignalsplay="safe module:LD03001 exhaust box water leak (up-side)" diSignal="DI_LD03001exhaustboxwaterleakupside" alarmTrigValue="true" />

+		<IoAlarmSignal id="AlarmSignalLD03002waterleakdownside" diSignalsplay="safe module:LD03002 water leak (down-side)" diSignal="DI_LD03002waterleakdownside" alarmTrigValue="true" />

+		<IoAlarmSignal id="AlarmSignalExternalEMO" diSignalsplay="safe module:External EMO" diSignal="DI_ExternalEMO" alarmTrigValue="true" />

+		<IoAlarmSignal id="AlarmSignalFurnacetransformertempsw" diSignalsplay="safe module:Furnace transformer temp sw" diSignal="DI_Furnacetransformertempsw" alarmTrigValue="true" />

+		<IoAlarmSignal id="AlarmSignalAC100Vtransformertempsw" diSignalsplay="safe module:AC100V transformer temp sw" diSignal="DI_AC100Vtransformertempsw" alarmTrigValue="true" />

+		<IoAlarmSignal id="AlarmSignalFurnacepoweronswitch" diSignalsplay="safe module:Furnace power on switch" diSignal="DI_Furnacepoweronswitch" alarmTrigValue="true" />

+		<IoAlarmSignal id="AlarmSignalAC100Vtransformerpowerswitch" diSignalsplay="safe module:AC100V transformer power switch" diSignal="DI_AC100Vtransformerpowerswitch" alarmTrigValue="true" />

+		<IoAlarmSignal id="AlarmSignalPowerboxinterlockresetbutton" diSignalsplay="safe module:Power box interlock reset button" diSignal="DI_Powerboxinterlockresetbutton" alarmTrigValue="true" />

+		<IoAlarmSignal id="AlarmSignalVFD01001EDM" diSignalsplay="safe module:VFD01001 EDM" diSignal="DI_VFD01001EDM" alarmTrigValue="true" />

+		<IoAlarmSignal id="AlarmSignalGasboxinterlockresetbutton" diSignalsplay="safe module:Gas box interlock reset button" diSignal="DI_Gasboxinterlockresetbutton" alarmTrigValue="true" />

+		<IoAlarmSignal id="AlarmSignalSCRONOFFSWITCH" diSignalsplay="safe module:SCR ON/OFF SWITCH" diSignal="DI_SCRONOFFSWITCH" alarmTrigValue="true" />

+		<IoAlarmSignal id="AlarmSignalGasboxexhaustpressurealarm1st" diSignalsplay="safe module:Gas box exhaust pressure alarm 1st" diSignal="DI_Gasboxexhaustpressurealarm1st" alarmTrigValue="true" />

+		<IoAlarmSignal id="AlarmSignalGasboxexhaustpressurealarm2nd" diSignalsplay="safe module:Gas box exhaust pressure alarm 2nd" diSignal="DI_Gasboxexhaustpressurealarm2nd" alarmTrigValue="true" />

+		<IoAlarmSignal id="AlarmSignalFS101waterflowalarm" diSignalsplay="safe module:FS101 water flow alarm" diSignal="DI_FS101waterflowalarm" alarmTrigValue="true" />

+		<IoAlarmSignal id="AlarmSignalFrontbodyinterlockresetbutton" diSignalsplay="safe module:Front body interlock reset button" diSignal="DI_Frontbodyinterlockresetbutton" alarmTrigValue="true" />

+		<IoAlarmSignal id="AlarmSignalLightcurtainOSSD1" diSignalsplay="safe module:Light curtain OSSD1" diSignal="DI_LightcurtainOSSD1" alarmTrigValue="true" />

+		<IoAlarmSignal id="AlarmSignalLightcurtainOSSD2" diSignalsplay="safe module:Light curtain OSSD2" diSignal="DI_LightcurtainOSSD2" alarmTrigValue="true" />

+		<IoAlarmSignal id="AlarmSignalLightcurtainfault" diSignalsplay="safe module:Light curtain fault" diSignal="DI_Lightcurtainfault" alarmTrigValue="true" />

+		<IoAlarmSignal id="AlarmSignalFrontbodydoorswitch" diSignalsplay="safe module:Front body door switch" diSignal="DI_Frontbodydoorswitch" alarmTrigValue="true" />

+		<IoAlarmSignal id="AlarmSignalFrontbodyIOshuttersw" diSignalsplay="safe module:Front body I/O shutter sw" diSignal="DI_FrontbodyIOshuttersw" alarmTrigValue="true" />

+		<IoAlarmSignal id="AlarmSignalFouprobotEMS" diSignalsplay="safe module:Foup robot EMS" diSignal="DI_FouprobotEMS" alarmTrigValue="true" />

+		<IoAlarmSignal id="AlarmSignalWaferrobotEMS" diSignalsplay="safe module:Wafer robot EMS" diSignal="DI_WaferrobotEMS" alarmTrigValue="true" />

+		<IoAlarmSignal id="AlarmSignalAxisCRmotorEDM" diSignalsplay="safe module:Axis-CR motor EDM" diSignal="DI_AxisCRmotorEDM" alarmTrigValue="true" />

+		<IoAlarmSignal id="AlarmSignalAxisEmotorEDM" diSignalsplay="safe module:Axis-E motor EDM" diSignal="DI_AxisEmotorEDM" alarmTrigValue="true" />

+		<IoAlarmSignal id="AlarmSignalTS05001FFUtempsw" diSignalsplay="safe module:TS05001 FFU temp sw" diSignal="DI_TS05001FFUtempsw" alarmTrigValue="true" />

+		<IoAlarmSignal id="AlarmSignalTS05002Capinsidetempsw" diSignalsplay="safe module:TS05002 Cap inside temp sw" diSignal="DI_TS05002Capinsidetempsw" alarmTrigValue="true" />

+		<IoAlarmSignal id="AlarmSignalTS05003Capoutsidetempsw" diSignalsplay="safe module:TS05003 Cap outside temp sw" diSignal="DI_TS05003Capoutsidetempsw" alarmTrigValue="true" />

+		<IoAlarmSignal id="AlarmSignalTS05004Raxisrotationtempsw" diSignalsplay="safe module:TS05004 R axis rotation temp sw" diSignal="DI_TS05004Raxisrotationtempsw" alarmTrigValue="true" />

+		<IoAlarmSignal id="AlarmSignalTS05005RHCtempsw" diSignalsplay="safe module:TS05005 RHC temp sw" diSignal="DI_TS05005RHCtempsw" alarmTrigValue="true" />

+		<IoAlarmSignal id="AlarmSignalTS05006furnacetempsw" diSignalsplay="safe module:TS05006 furnace temp sw" diSignal="DI_TS05006furnacetempsw" alarmTrigValue="true" />

+		<IoAlarmSignal id="AlarmSignalLoadingareaEMS" diSignalsplay="safe module:Loading area EMS" diSignal="DI_LoadingareaEMS" alarmTrigValue="true" />

+		<IoAlarmSignal id="AlarmSignalGD02001HCL1gasleak1stalarm" diSignalsplay="safe module:GD02001 HCL-1 gas leak 1st alarm" diSignal="DI_GD02001HCL1gasleak1stalarm" alarmTrigValue="true" />

+		<IoAlarmSignal id="AlarmSignalGD02001HCL1gasleak2ndalarm" diSignalsplay="safe module:GD02001 HCL-1 gas leak 2nd alarm" diSignal="DI_GD02001HCL1gasleak2ndalarm" alarmTrigValue="true" />

+		<IoAlarmSignal id="AlarmSignalGD02001fault" diSignalsplay="safe module:GD02001 fault" diSignal="DI_GD02001fault" alarmTrigValue="true" />

+		<IoAlarmSignal id="AlarmSignalGD02002HCL2gasleak1stalarm" diSignalsplay="safe module:GD02002 HCL-2 gas leak 1st alarm" diSignal="DI_GD02002HCL2gasleak1stalarm" alarmTrigValue="true" />

+		<IoAlarmSignal id="AlarmSignalGD02002HCL2gasleak2ndalarm" diSignalsplay="safe module:GD02002 HCL-2 gas leak 2nd alarm" diSignal="DI_GD02002HCL2gasleak2ndalarm" alarmTrigValue="true" />

+		<IoAlarmSignal id="AlarmSignalGD02002fault" diSignalsplay="safe module:GD02002 fault" diSignal="DI_GD02002fault" alarmTrigValue="true" />

+		<IoAlarmSignal id="AlarmSignalGD02003NH31gasleak1stalarm" diSignalsplay="safe module:GD02003 NH3-1 gas leak 1st alarm" diSignal="DI_GD02003NH31gasleak1stalarm" alarmTrigValue="true" />

+		<IoAlarmSignal id="AlarmSignalGD02003NH31gasleak2ndalarm" diSignalsplay="safe module:GD02003 NH3-1 gas leak 2nd alarm" diSignal="DI_GD02003NH31gasleak2ndalarm" alarmTrigValue="true" />

+		<IoAlarmSignal id="AlarmSignalGD02003fault" diSignalsplay="safe module:GD02003 fault" diSignal="DI_GD02003fault" alarmTrigValue="true" />

+		<IoAlarmSignal id="AlarmSignalGD02004NH32gasleak1stalarm" diSignalsplay="safe module:GD02004 NH3-2 gas leak 1st alarm" diSignal="DI_GD02004NH32gasleak1stalarm" alarmTrigValue="true" />

+		<IoAlarmSignal id="AlarmSignalGD02004NH32gasleak2ndalarm" diSignalsplay="safe module:GD02004 NH3-2 gas leak 2nd alarm" diSignal="DI_GD02004NH32gasleak2ndalarm" alarmTrigValue="true" />

+		<IoAlarmSignal id="AlarmSignalGD02004fault" diSignalsplay="safe module:GD02004 fault" diSignal="DI_GD02004fault" alarmTrigValue="true" />

+		<IoAlarmSignal id="AlarmSignalGD02005F21gasleak1stalarm" diSignalsplay="safe module:GD02005 F2-1 gas leak 1st alarm" diSignal="DI_GD02005F21gasleak1stalarm" alarmTrigValue="true" />

+		<IoAlarmSignal id="AlarmSignalGD02005F21gasleak2ndalarm" diSignalsplay="safe module:GD02005 F2-1 gas leak 2nd alarm" diSignal="DI_GD02005F21gasleak2ndalarm" alarmTrigValue="true" />

+		<IoAlarmSignal id="AlarmSignalGD02005fault" diSignalsplay="safe module:GD02005 fault" diSignal="DI_GD02005fault" alarmTrigValue="true" />

+		<IoAlarmSignal id="AlarmSignalGD02006F22gasleak1stalarm" diSignalsplay="safe module:GD02006 F2-2 gas leak 1st alarm" diSignal="DI_GD02006F22gasleak1stalarm" alarmTrigValue="true" />

+		<IoAlarmSignal id="AlarmSignalGD02006F22gasleak2ndalarm" diSignalsplay="safe module:GD02006 F2-2 gas leak 2nd alarm" diSignal="DI_GD02006F22gasleak2ndalarm" alarmTrigValue="true" />

+		<IoAlarmSignal id="AlarmSignalGD02006fault" diSignalsplay="safe module:GD02006 fault" diSignal="DI_GD02006fault" alarmTrigValue="true" />

+		<IoAlarmSignal id="AlarmSignalGD02007NO1gasleak1stalarm" diSignalsplay="safe module:GD02007 NO-1 gas leak 1st alarm" diSignal="DI_GD02007NO1gasleak1stalarm" alarmTrigValue="true" />

+		<IoAlarmSignal id="AlarmSignalGD02007NO1gasleak2ndalarm" diSignalsplay="safe module:GD02007 NO-1 gas leak 2nd alarm" diSignal="DI_GD02007NO1gasleak2ndalarm" alarmTrigValue="true" />

+		<IoAlarmSignal id="AlarmSignalGD02007fault" diSignalsplay="safe module:GD02007 fault" diSignal="DI_GD02007fault" alarmTrigValue="true" />

+		<IoAlarmSignal id="AlarmSignalGD02008NO2gasleak1stalarm" diSignalsplay="safe module:GD02008 NO-2 gas leak 1st alarm" diSignal="DI_GD02008NO2gasleak1stalarm" alarmTrigValue="true" />

+		<IoAlarmSignal id="AlarmSignalGD02008NO2gasleak2ndalarm" diSignalsplay="safe module:GD02008 NO-2 gas leak 2nd alarm" diSignal="DI_GD02008NO2gasleak2ndalarm" alarmTrigValue="true" />

+		<IoAlarmSignal id="AlarmSignalGD02008fault" diSignalsplay="safe module:GD02008 fault" diSignal="DI_GD02008fault" alarmTrigValue="true" />

+		<IoAlarmSignal id="AlarmSignalGD02009C3H61gasleak1stalarm" diSignalsplay="safe module:GD02009 C3H6-1 gas leak 1st alarm" diSignal="DI_GD02009C3H61gasleak1stalarm" alarmTrigValue="true" />

+		<IoAlarmSignal id="AlarmSignalGD02009C3H61gasleak2ndalarm" diSignalsplay="safe module:GD02009 C3H6-1 gas leak 2nd alarm" diSignal="DI_GD02009C3H61gasleak2ndalarm" alarmTrigValue="true" />

+		<IoAlarmSignal id="AlarmSignalGD02009fault" diSignalsplay="safe module:GD02009 fault" diSignal="DI_GD02009fault" alarmTrigValue="true" />

+		<IoAlarmSignal id="AlarmSignalGD02010C3H62gasleak1stalarm" diSignalsplay="safe module:GD02010 C3H6-2 gas leak 1st alarm" diSignal="DI_GD02010C3H62gasleak1stalarm" alarmTrigValue="true" />

+		<IoAlarmSignal id="AlarmSignalGD02010C3H62gasleak2ndalarm" diSignalsplay="safe module:GD02010 C3H6-2 gas leak 2nd alarm" diSignal="DI_GD02010C3H62gasleak2ndalarm" alarmTrigValue="true" />

+		<IoAlarmSignal id="AlarmSignalGD02010fault" diSignalsplay="safe module:GD02010 fault" diSignal="DI_GD02010fault" alarmTrigValue="true" />

+		<IoAlarmSignal id="AlarmSignalGD02011DMA1gasleak1stalarm" diSignalsplay="safe module:GD02011 DMA-1 gas leak 1st alarm" diSignal="DI_GD02011DMA1gasleak1stalarm" alarmTrigValue="true" />

+		<IoAlarmSignal id="AlarmSignalGD02011DMA1gasleak2ndalarm" diSignalsplay="safe module:GD02011 DMA-1 gas leak 2nd alarm" diSignal="DI_GD02011DMA1gasleak2ndalarm" alarmTrigValue="true" />

+		<IoAlarmSignal id="AlarmSignalGD02011fault" diSignalsplay="safe module:GD02011 fault" diSignal="DI_GD02011fault" alarmTrigValue="true" />

+		<IoAlarmSignal id="AlarmSignalGD02012DMA2gasleak1stalarm" diSignalsplay="safe module:GD02012 DMA-2 gas leak 1st alarm" diSignal="DI_GD02012DMA2gasleak1stalarm" alarmTrigValue="true" />

+		<IoAlarmSignal id="AlarmSignalGD02012DMA2gasleak2ndalarm" diSignalsplay="safe module:GD02012 DMA-2 gas leak 2nd alarm" diSignal="DI_GD02012DMA2gasleak2ndalarm" alarmTrigValue="true" />

+		<IoAlarmSignal id="AlarmSignalGD02012fault" diSignalsplay="safe module:GD02012 fault" diSignal="DI_GD02012fault" alarmTrigValue="true" />

+		<IoAlarmSignal id="AlarmSignalSL02001gasboxdoorsw11" diSignalsplay="safe module:SL02001 gas box door sw1-1" diSignal="DI_SL02001gasboxdoorsw11" alarmTrigValue="true" />

+		<IoAlarmSignal id="AlarmSignalSL02001gasboxdoorsw12" diSignalsplay="safe module:SL02001 gas box door sw1-2" diSignal="DI_SL02001gasboxdoorsw12" alarmTrigValue="true" />

+		<IoAlarmSignal id="AlarmSignalSL02002gasboxdoorsw11" diSignalsplay="safe module:SL02002 gas box door sw1-1" diSignal="DI_SL02002gasboxdoorsw11" alarmTrigValue="true" />

+		<IoAlarmSignal id="AlarmSignalSL02002gasboxdoorsw12" diSignalsplay="safe module:SL02002 gas box door sw1-2" diSignal="DI_SL02002gasboxdoorsw12" alarmTrigValue="true" />

+		<IoAlarmSignal id="AlarmSignalSL05001LAdoorsw1" diSignalsplay="safe module:SL05001 LA door sw1" diSignal="DI_SL05001LAdoorsw1" alarmTrigValue="true" />

+		<IoAlarmSignal id="AlarmSignalSL05002LAdoorsw2" diSignalsplay="safe module:SL05002 LA door sw2" diSignal="DI_SL05002LAdoorsw2" alarmTrigValue="true" />

+		<IoAlarmSignal id="AlarmSignalSL05004LAfurnacedoorsw" diSignalsplay="safe module:SL05004 LA furnace door sw" diSignal="DI_SL05004LAfurnacedoorsw" alarmTrigValue="true" />

+		<IoAlarmSignal id="AlarmSignalFurnacepoweronoff" diSignalsplay="safe module:Furnace power on/off" diSignal="DI_Furnacepoweronoff" alarmTrigValue="true" />

+		<IoAlarmSignal id="AlarmSignalBlowerpoweronoff" diSignalsplay="safe module:Blower power on/off" diSignal="DI_Blowerpoweronoff" alarmTrigValue="true" />

+		<IoAlarmSignal id="AlarmSignal100Vtransformerpoweron" diSignalsplay="safe module:100V transformer power on" diSignal="DI_100Vtransformerpoweron" alarmTrigValue="true" />

+		<IoAlarmSignal id="AlarmSignalVFDenable" diSignalsplay="safe module:VFD enable" diSignal="DI_VFDenable" alarmTrigValue="true" />

+		<IoAlarmSignal id="AlarmSignalHPMvalvepoweronoff" diSignalsplay="safe module:HPM valve power on/off" diSignal="DI_HPMvalvepoweronoff" alarmTrigValue="true" />

+		<IoAlarmSignal id="AlarmSignalAxisCRmotorenable1" diSignalsplay="safe module:Axis-CR motor enable1" diSignal="DI_AxisCRmotorenable1" alarmTrigValue="true" />

+		<IoAlarmSignal id="AlarmSignalAxisCRmotorenable2" diSignalsplay="safe module:Axis-CR motor enable2" diSignal="DI_AxisCRmotorenable2" alarmTrigValue="true" />

+		<IoAlarmSignal id="AlarmSignalAxisEmotorenable1" diSignalsplay="safe module:Axis-E motor enable1" diSignal="DI_AxisEmotorenable1" alarmTrigValue="true" />

+		<IoAlarmSignal id="AlarmSignalAxisEmotorenable2" diSignalsplay="safe module:Axis-E motor enable2" diSignal="DI_AxisEmotorenable2" alarmTrigValue="true" />

+		<IoAlarmSignal id="AlarmSignalFTRenable1" diSignalsplay="safe module:FTR enable1" diSignal="DI_FTRenable1" alarmTrigValue="true" />

+		<IoAlarmSignal id="AlarmSignalFTRenable2" diSignalsplay="safe module:FTR enable2" diSignal="DI_FTRenable2" alarmTrigValue="true" />

+		<IoAlarmSignal id="AlarmSignalFTRinterlockreset" diSignalsplay="safe module:FTR interlock reset" diSignal="DI_FTRinterlockreset" alarmTrigValue="true" />

+		<IoAlarmSignal id="AlarmSignalWTRenable1" diSignalsplay="safe module:WTR enable1" diSignal="DI_WTRenable1" alarmTrigValue="true" />

+		<IoAlarmSignal id="AlarmSignalWTRenable2" diSignalsplay="safe module:WTR enable2" diSignal="DI_WTRenable2" alarmTrigValue="true" />

+		<IoAlarmSignal id="AlarmSignalWTRinterlockreset" diSignalsplay="safe module:WTR interlock reset" diSignal="DI_WTRinterlockreset" alarmTrigValue="true" />

+		<IoAlarmSignal id="AlarmSignalCapheaterenable" diSignalsplay="safe module:Cap heater enable" diSignal="DI_Capheaterenable" alarmTrigValue="true" />

+		<IoAlarmSignal id="AlarmSignalLightcurtainidel" diSignalsplay="safe module:Light curtain idel" diSignal="DI_Lightcurtainidel" alarmTrigValue="true" />

+		<IoAlarmSignal id="AlarmSignalPowerboxinterlockbuttonled" diSignalsplay="safe module:Power box interlock button led" diSignal="DI_Powerboxinterlockbuttonled" alarmTrigValue="true" />

+		<IoAlarmSignal id="AlarmSignalGasboxinterlockbuttonled" diSignalsplay="safe module:Gas box interlock button led" diSignal="DI_Gasboxinterlockbuttonled" alarmTrigValue="true" />

+		<IoAlarmSignal id="AlarmSignalFrontbodyinterlockbuttonled" diSignalsplay="safe module:Frontbody interlock button led" diSignal="DI_Frontbodyinterlockbuttonled" alarmTrigValue="true" />

+

 

-		

 

 		<IoAlarmSignal id="AlarmSignalFBFrontDoorSwitch"		diSignalsplay="FBFrontDoorSwitch"			diSignal="DI_FBFrontDoorSwitch"		alarmTrigValue="true"/>

 		<IoAlarmSignal id="AlarmSignalGLBoxPG1CNT1Alarm"		diSignalsplay="GLBoxPG1CNT1Alarm"			diSignal="DI_GLBoxPG1CNT1Alarm"		alarmTrigValue="true"/>

+ 109 - 109
Furnace/FurnaceRT/Config/IO/ELK/_ioDefinePM.xml
View File 

@@ -1,115 +1,115 @@
 
 <?xml version='1.0'?>

 <IO_DEFINE xmlns:xsi='http://www.w3.org/2001/XMLSchema-instance' xmlns:xsd='http://www.w3.org/2001/XMLSchema'>

 	<Dig_In>

-		<DI_ITEM Index="48" Name="DI_EMO01001powerboxEMO" BufferOffset="48" Addr="D3.0" Description="EMO01001 power box EMO"/>

-		<DI_ITEM Index="49" Name="DI_Powerboxfiredetector" BufferOffset="49" Addr="D3.1" Description="Power box fire detector"/>

-		<DI_ITEM Index="50" Name="DI_SMK01001detectoroperator" BufferOffset="50" Addr="D3.2" Description="SMK01001 detector operator"/>

-		<DI_ITEM Index="51" Name="DI_SMK01001detectorfault" BufferOffset="51" Addr="D3.3" Description="SMK01001 detector fault"/>

-		<DI_ITEM Index="52" Name="DI_EMO02001gasboxEMO" BufferOffset="52" Addr="D3.4" Description="EMO02001 gas box EMO"/>

-		<DI_ITEM Index="54" Name="DI_EMO04001frontbodyEMO" BufferOffset="54" Addr="D3.6" Description="EMO04001 frontbody EMO"/>

-		<DI_ITEM Index="55" Name="DI_LD02001LSCleakalarm" BufferOffset="55" Addr="D3.7" Description="LD02001 LSC leak alarm"/>

-		<DI_ITEM Index="56" Name="DI_LD05001Magneticfluidleak" BufferOffset="56" Addr="D3.8" Description="LD05001 Magnetic fluid leak"/>

-		<DI_ITEM Index="57" Name="DI_LD05002Coolingwaterleak" BufferOffset="57" Addr="D3.9" Description="LD05002 Cooling water leak"/>

-		<DI_ITEM Index="58" Name="DI_LD05003RHCleak" BufferOffset="58" Addr="D3.10" Description="LD05003 RHC leak"/>

-		<DI_ITEM Index="59" Name="DI_LD03001exhaustboxwaterleakupside" BufferOffset="59" Addr="D3.11" Description="LD03001 exhaust box water leak (up-side)"/>

-		<DI_ITEM Index="60" Name="DI_LD03002waterleakdownside" BufferOffset="60" Addr="D3.12" Description="LD03002 water leak (down-side)"/>

-		<DI_ITEM Index="61" Name="DI_ExternalEMO" BufferOffset="61" Addr="D3.13" Description="External EMO"/>

-		<DI_ITEM Index="64" Name="DI_Furnacetransformertempsw" BufferOffset="64" Addr="D4.0" Description="Furnace transformer temp sw"/>

-		<DI_ITEM Index="65" Name="DI_AC100Vtransformertempsw" BufferOffset="65" Addr="D4.1" Description="AC100V transformer temp sw"/>

-		<DI_ITEM Index="66" Name="DI_Furnacepoweronswitch" BufferOffset="66" Addr="D4.2" Description="Furnace power on switch"/>

-		<DI_ITEM Index="67" Name="DI_AC100Vtransformerpowerswitch" BufferOffset="67" Addr="D4.3" Description="AC100V transformer power switch"/>

-		<DI_ITEM Index="68" Name="DI_Powerboxinterlockresetbutton" BufferOffset="68" Addr="D4.4" Description="Power box interlock reset button"/>

-		<DI_ITEM Index="69" Name="DI_VFD01001EDM" BufferOffset="69" Addr="D4.5" Description="VFD01001 EDM"/>

-

-		<DI_ITEM Index="74" Name="DI_Gasboxinterlockresetbutton" BufferOffset="74" Addr="D4.10" Description="Gas box interlock reset button"/>

-		<DI_ITEM Index="75" Name="DI_SCRONOFFSWITCH" BufferOffset="75" Addr="D4.11" Description="SCR ON/OFF SWITCH"/>

-		<DI_ITEM Index="76" Name="DI_Gasboxexhaustpressurealarm1st" BufferOffset="76" Addr="D4.12" Description="Gas box exhaust pressure alarm 1st"/>

-		<DI_ITEM Index="77" Name="DI_Gasboxexhaustpressurealarm2nd" BufferOffset="77" Addr="D4.13" Description="Gas box exhaust pressure alarm 2nd"/>

-		<DI_ITEM Index="78" Name="DI_FS101waterflowalarm" BufferOffset="78" Addr="D4.14" Description="FS101 water flow alarm"/>

-		<DI_ITEM Index="79" Name="DI_Frontbodyinterlockresetbutton" BufferOffset="79" Addr="D4.15" Description="Front body interlock reset button"/>

-		<DI_ITEM Index="80" Name="DI_LightcurtainOSSD1" BufferOffset="80" Addr="D5.0" Description="Light curtain OSSD1"/>

-		<DI_ITEM Index="81" Name="DI_LightcurtainOSSD2" BufferOffset="81" Addr="D5.1" Description="Light curtain OSSD2"/>

-		<DI_ITEM Index="82" Name="DI_Lightcurtainfault" BufferOffset="82" Addr="D5.2" Description="Light curtain fault"/>

-		<DI_ITEM Index="83" Name="DI_Frontbodydoorswitch" BufferOffset="83" Addr="D5.3" Description="Front body door switch"/>

-		<DI_ITEM Index="84" Name="DI_FrontbodyIOshuttersw" BufferOffset="84" Addr="D5.4" Description="Front body I/O shutter sw"/>

-		<DI_ITEM Index="85" Name="DI_FouprobotEMS" BufferOffset="85" Addr="D5.5" Description="Foup robot EMS"/>

-		<DI_ITEM Index="86" Name="DI_WaferrobotEMS" BufferOffset="86" Addr="D5.6" Description="Wafer robot EMS"/>

-		<DI_ITEM Index="87" Name="DI_AxisCRmotorEDM" BufferOffset="87" Addr="D5.7" Description="Axis-CR motor EDM"/>

-		<DI_ITEM Index="89" Name="DI_AxisEmotorEDM" BufferOffset="89" Addr="D5.9" Description="Axis-E motor EDM"/>

-		<DI_ITEM Index="90" Name="DI_TS05001FFUtempsw" BufferOffset="90" Addr="D5.10" Description="TS05001 FFU temp sw"/>

-		<DI_ITEM Index="91" Name="DI_TS05002Capinsidetempsw" BufferOffset="91" Addr="D5.11" Description="TS05002 Cap inside temp sw"/>

-		<DI_ITEM Index="92" Name="DI_TS05003Capoutsidetempsw" BufferOffset="92" Addr="D5.12" Description="TS05003 Cap outside temp sw"/>

-		<DI_ITEM Index="93" Name="DI_TS05004Raxisrotationtempsw" BufferOffset="93" Addr="D5.13" Description="TS05004 R axis rotation temp sw"/>

-		<DI_ITEM Index="94" Name="DI_TS05005RHCtempsw" BufferOffset="94" Addr="D5.14" Description="TS05005 RHC temp sw"/>

-		<DI_ITEM Index="95" Name="DI_TS05006furnacetempsw" BufferOffset="95" Addr="D5.15" Description="TS05006 furnace temp sw"/>

-		<DI_ITEM Index="96" Name="DI_LoadingareaEMS" BufferOffset="96" Addr="D6.0" Description="Loading area EMS"/>

-		<DI_ITEM Index="97" Name="DI_GD02001HCL1gasleak1stalarm" BufferOffset="97" Addr="D6.1" Description="GD02001 HCL-1 gas leak 1st alarm"/>

-		<DI_ITEM Index="98" Name="DI_GD02001HCL1gasleak2ndalarm" BufferOffset="98" Addr="D6.2" Description="GD02001 HCL-1 gas leak 2nd alarm"/>

-		<DI_ITEM Index="99" Name="DI_GD02001fault" BufferOffset="99" Addr="D6.3" Description="GD02001 fault"/>

-		<DI_ITEM Index="100" Name="DI_GD02002HCL2gasleak1stalarm" BufferOffset="100" Addr="D6.4" Description="GD02002 HCL-2 gas leak 1st alarm"/>

-		<DI_ITEM Index="101" Name="DI_GD02002HCL2gasleak2ndalarm" BufferOffset="101" Addr="D6.5" Description="GD02002 HCL-2 gas leak 2nd alarm"/>

-		<DI_ITEM Index="102" Name="DI_GD02002fault" BufferOffset="102" Addr="D6.6" Description="GD02002 fault"/>

-		<DI_ITEM Index="103" Name="DI_GD02003NH31gasleak1stalarm" BufferOffset="103" Addr="D6.7" Description="GD02003 NH3-1 gas leak 1st alarm"/>

-		<DI_ITEM Index="104" Name="DI_GD02003NH31gasleak2ndalarm" BufferOffset="104" Addr="D6.8" Description="GD02003 NH3-1 gas leak 2nd alarm"/>

-		<DI_ITEM Index="105" Name="DI_GD02003fault" BufferOffset="105" Addr="D6.9" Description="GD02003 fault"/>

-		<DI_ITEM Index="106" Name="DI_GD02004NH32gasleak1stalarm" BufferOffset="106" Addr="D6.10" Description="GD02004 NH3-2 gas leak 1st alarm"/>

-		<DI_ITEM Index="107" Name="DI_GD02004NH32gasleak2ndalarm" BufferOffset="107" Addr="D6.11" Description="GD02004 NH3-2 gas leak 2nd alarm"/>

-		<DI_ITEM Index="108" Name="DI_GD02004fault" BufferOffset="108" Addr="D6.12" Description="GD02004 fault"/>

-		<DI_ITEM Index="109" Name="DI_GD02005F21gasleak1stalarm" BufferOffset="109" Addr="D6.13" Description="GD02005 F2-1 gas leak 1st alarm"/>

-		<DI_ITEM Index="110" Name="DI_GD02005F21gasleak2ndalarm" BufferOffset="110" Addr="D6.14" Description="GD02005 F2-1 gas leak 2nd alarm"/>

-		<DI_ITEM Index="111" Name="DI_GD02005fault" BufferOffset="111" Addr="D6.15" Description="GD02005 fault"/>

-		<DI_ITEM Index="112" Name="DI_GD02006F22gasleak1stalarm" BufferOffset="112" Addr="D6.16" Description="GD02006 F2-2 gas leak 1st alarm"/>

-		<DI_ITEM Index="113" Name="DI_GD02006F22gasleak2ndalarm" BufferOffset="113" Addr="D7.0" Description="GD02006 F2-2 gas leak 2nd alarm"/>

-		<DI_ITEM Index="114" Name="DI_GD02006fault" BufferOffset="114" Addr="D7.1" Description="GD02006 fault"/>

-		<DI_ITEM Index="115" Name="DI_GD02007NO1gasleak1stalarm" BufferOffset="115" Addr="D7.2" Description="GD02007 NO-1 gas leak 1st alarm"/>

-		<DI_ITEM Index="116" Name="DI_GD02007NO1gasleak2ndalarm" BufferOffset="116" Addr="D7.3" Description="GD02007 NO-1 gas leak 2nd alarm"/>

-		<DI_ITEM Index="117" Name="DI_GD02007fault" BufferOffset="117" Addr="D7.4" Description="GD02007 fault"/>

-		<DI_ITEM Index="118" Name="DI_GD02008NO2gasleak1stalarm" BufferOffset="118" Addr="D7.5" Description="GD02008 NO-2 gas leak 1st alarm"/>

-		<DI_ITEM Index="119" Name="DI_GD02008NO2gasleak2ndalarm" BufferOffset="119" Addr="D7.6" Description="GD02008 NO-2 gas leak 2nd alarm"/>

-		<DI_ITEM Index="120" Name="DI_GD02008fault" BufferOffset="120" Addr="D7.7" Description="GD02008 fault"/>

-		<DI_ITEM Index="121" Name="DI_GD02009C3H61gasleak1stalarm" BufferOffset="121" Addr="D7.8" Description="GD02009 C3H6-1 gas leak 1st alarm"/>

-		<DI_ITEM Index="122" Name="DI_GD02009C3H61gasleak2ndalarm" BufferOffset="122" Addr="D7.9" Description="GD02009 C3H6-1 gas leak 2nd alarm"/>

-		<DI_ITEM Index="123" Name="DI_GD02009fault" BufferOffset="123" Addr="D7.10" Description="GD02009 fault"/>

-		<DI_ITEM Index="124" Name="DI_GD02010C3H62gasleak1stalarm" BufferOffset="124" Addr="D7.11" Description="GD02010 C3H6-2 gas leak 1st alarm"/>

-		<DI_ITEM Index="125" Name="DI_GD02010C3H62gasleak2ndalarm" BufferOffset="125" Addr="D7.12" Description="GD02010 C3H6-2 gas leak 2nd alarm"/>

-		<DI_ITEM Index="126" Name="DI_GD02010fault" BufferOffset="126" Addr="D7.13" Description="GD02010 fault"/>

-		<DI_ITEM Index="127" Name="DI_GD02011DMA1gasleak1stalarm" BufferOffset="127" Addr="D7.14" Description="GD02011 DMA-1 gas leak 1st alarm"/>

-		<DI_ITEM Index="128" Name="DI_GD02011DMA1gasleak2ndalarm" BufferOffset="128" Addr="D7.15" Description="GD02011 DMA-1 gas leak 2nd alarm"/>

-		<DI_ITEM Index="129" Name="DI_GD02011fault" BufferOffset="129" Addr="D8.0" Description="GD02011 fault"/>

-		<DI_ITEM Index="130" Name="DI_GD02012DMA2gasleak1stalarm" BufferOffset="130" Addr="D8.1" Description="GD02012 DMA-2 gas leak 1st alarm"/>

-		<DI_ITEM Index="131" Name="DI_GD02012DMA2gasleak2ndalarm" BufferOffset="131" Addr="D8.2" Description="GD02012 DMA-2 gas leak 2nd alarm"/>

-		<DI_ITEM Index="132" Name="DI_GD02012fault" BufferOffset="132" Addr="D8.3" Description="GD02012 fault"/>

-		<DI_ITEM Index="133" Name="DI_SL02001gasboxdoorsw11" BufferOffset="133" Addr="D8.4" Description="SL02001 gas box door sw1-1"/>

-		<DI_ITEM Index="134" Name="DI_SL02001gasboxdoorsw12" BufferOffset="134" Addr="D8.5" Description="SL02001 gas box door sw1-2"/>

-		<DI_ITEM Index="135" Name="DI_SL02002gasboxdoorsw11" BufferOffset="135" Addr="D8.6" Description="SL02002 gas box door sw1-1"/>

-		<DI_ITEM Index="136" Name="DI_SL02002gasboxdoorsw12" BufferOffset="136" Addr="D8.7" Description="SL02002 gas box door sw1-2"/>

-		<DI_ITEM Index="137" Name="DI_SL05001LAdoorsw1" BufferOffset="137" Addr="D8.8" Description="SL05001 LA door sw1"/>

-		<DI_ITEM Index="138" Name="DI_SL05002LAdoorsw2" BufferOffset="138" Addr="D8.9" Description="SL05002 LA door sw2"/>

-		<DI_ITEM Index="139" Name="DI_SL05004LAfurnacedoorsw" BufferOffset="139" Addr="D8.10" Description="SL05004 LA furnace door sw"/>

-

-		<DI_ITEM Index="144" Name="DI_Furnacepoweronoff" BufferOffset="144" Addr="D9.0" Description="Furnace power on/off"/>

-		<DI_ITEM Index="145" Name="DI_Blowerpoweronoff" BufferOffset="145" Addr="D9.1" Description="Blower power on/off"/>

-		<DI_ITEM Index="146" Name="DI_100Vtransformerpoweron" BufferOffset="146" Addr="D9.2" Description="100V transformer power on"/>

-		<DI_ITEM Index="147" Name="DI_VFDenable" BufferOffset="147" Addr="D9.3" Description="VFD enable"/>

-

-		<DI_ITEM Index="149" Name="DI_HPMvalvepoweronoff" BufferOffset="149" Addr="D9.5" Description="HPM valve power on/off"/>

-		<DI_ITEM Index="150" Name="DI_AxisCRmotorenable1" BufferOffset="150" Addr="D9.6" Description="Axis-CR motor enable1"/>

-		<DI_ITEM Index="151" Name="DI_AxisCRmotorenable2" BufferOffset="151" Addr="D9.7" Description="Axis-CR motor enable2"/>

-		<DI_ITEM Index="152" Name="DI_AxisEmotorenable1" BufferOffset="152" Addr="D9.8" Description="Axis-E motor enable1"/>

-		<DI_ITEM Index="153" Name="DI_AxisEmotorenable2" BufferOffset="153" Addr="D9.9" Description="Axis-E motor enable2"/>

-

-		<DI_ITEM Index="156" Name="DI_FTRenable1" BufferOffset="156" Addr="D9.12" Description="FTR enable1"/>

-		<DI_ITEM Index="157" Name="DI_FTRenable2" BufferOffset="157" Addr="D9.13" Description="FTR enable2"/>

-		<DI_ITEM Index="158" Name="DI_FTRinterlockreset" BufferOffset="158" Addr="D9.14" Description="FTR interlock reset"/>

-		<DI_ITEM Index="159" Name="DI_WTRenable1" BufferOffset="159" Addr="D9.15" Description="WTR enable1"/>

-		<DI_ITEM Index="160" Name="DI_WTRenable2" BufferOffset="160" Addr="D10.0" Description="WTR enable2"/>

-		<DI_ITEM Index="161" Name="DI_WTRinterlockreset" BufferOffset="161" Addr="D10.1" Description="WTR interlock reset"/>

-		<DI_ITEM Index="162" Name="DI_Capheaterenable" BufferOffset="162" Addr="D10.2" Description="Cap heater enable"/>

-

-		<DI_ITEM Index="164" Name="DI_Lightcurtainidel" BufferOffset="164" Addr="D10.4" Description="Light curtain idel"/>

-		<DI_ITEM Index="165" Name="DI_Powerboxinterlockbuttonled" BufferOffset="165" Addr="D10.5" Description="Power box interlock button led"/>

-		<DI_ITEM Index="166" Name="DI_Gasboxinterlockbuttonled" BufferOffset="166" Addr="D10.6" Description="Gas box interlock button led"/>

-		<DI_ITEM Index="167" Name="DI_Frontbodyinterlockbuttonled" BufferOffset="167" Addr="D10.7" Description="Frontbody interlock button led"/>

+		<DI_ITEM Index="48" Name="DI_EMO01001powerboxEMO" BufferOffset="48" Addr="D3.0" Description="safe module:EMO01001 power box EMO"/>

+		<DI_ITEM Index="49" Name="DI_Powerboxfiredetector" BufferOffset="49" Addr="D3.1" Description="safe module:Power box fire detector"/>

+		<DI_ITEM Index="50" Name="DI_SMK01001detectoroperator" BufferOffset="50" Addr="D3.2" Description="safe module:SMK01001 detector operator"/>

+		<DI_ITEM Index="51" Name="DI_SMK01001detectorfault" BufferOffset="51" Addr="D3.3" Description="safe module:SMK01001 detector fault"/>

+		<DI_ITEM Index="52" Name="DI_EMO02001gasboxEMO" BufferOffset="52" Addr="D3.4" Description="safe module:EMO02001 gas box EMO"/>

+		<DI_ITEM Index="54" Name="DI_EMO04001frontbodyEMO" BufferOffset="54" Addr="D3.6" Description="safe module:EMO04001 frontbody EMO"/>

+		<DI_ITEM Index="55" Name="DI_LD02001LSCleakalarm" BufferOffset="55" Addr="D3.7" Description="safe module:LD02001 LSC leak alarm"/>

+		<DI_ITEM Index="56" Name="DI_LD05001Magneticfluidleak" BufferOffset="56" Addr="D3.8" Description="safe module:LD05001 Magnetic fluid leak"/>

+		<DI_ITEM Index="57" Name="DI_LD05002Coolingwaterleak" BufferOffset="57" Addr="D3.9" Description="safe module:LD05002 Cooling water leak"/>

+		<DI_ITEM Index="58" Name="DI_LD05003RHCleak" BufferOffset="58" Addr="D3.10" Description="safe module:LD05003 RHC leak"/>

+		<DI_ITEM Index="59" Name="DI_LD03001exhaustboxwaterleakupside" BufferOffset="59" Addr="D3.11" Description="safe module:LD03001 exhaust box water leak (up-side)"/>

+		<DI_ITEM Index="60" Name="DI_LD03002waterleakdownside" BufferOffset="60" Addr="D3.12" Description="safe module:LD03002 water leak (down-side)"/>

+		<DI_ITEM Index="61" Name="DI_ExternalEMO" BufferOffset="61" Addr="D3.13" Description="safe module:External EMO"/>

+		<DI_ITEM Index="64" Name="DI_Furnacetransformertempsw" BufferOffset="64" Addr="D4.0" Description="safe module:Furnace transformer temp sw"/>

+		<DI_ITEM Index="65" Name="DI_AC100Vtransformertempsw" BufferOffset="65" Addr="D4.1" Description="safe module:AC100V transformer temp sw"/>

+		<DI_ITEM Index="66" Name="DI_Furnacepoweronswitch" BufferOffset="66" Addr="D4.2" Description="safe module:Furnace power on switch"/>

+		<DI_ITEM Index="67" Name="DI_AC100Vtransformerpowerswitch" BufferOffset="67" Addr="D4.3" Description="safe module:AC100V transformer power switch"/>

+		<DI_ITEM Index="68" Name="DI_Powerboxinterlockresetbutton" BufferOffset="68" Addr="D4.4" Description="safe module:Power box interlock reset button"/>

+		<DI_ITEM Index="69" Name="DI_VFD01001EDM" BufferOffset="69" Addr="D4.5" Description="safe module:VFD01001 EDM"/>

+

+		<DI_ITEM Index="74" Name="DI_Gasboxinterlockresetbutton" BufferOffset="74" Addr="D4.10" Description="safe module:Gas box interlock reset button"/>

+		<DI_ITEM Index="75" Name="DI_SCRONOFFSWITCH" BufferOffset="75" Addr="D4.11" Description="safe module:SCR ON/OFF SWITCH"/>

+		<DI_ITEM Index="76" Name="DI_Gasboxexhaustpressurealarm1st" BufferOffset="76" Addr="D4.12" Description="safe module:Gas box exhaust pressure alarm 1st"/>

+		<DI_ITEM Index="77" Name="DI_Gasboxexhaustpressurealarm2nd" BufferOffset="77" Addr="D4.13" Description="safe module:Gas box exhaust pressure alarm 2nd"/>

+		<DI_ITEM Index="78" Name="DI_FS101waterflowalarm" BufferOffset="78" Addr="D4.14" Description="safe module:FS101 water flow alarm"/>

+		<DI_ITEM Index="79" Name="DI_Frontbodyinterlockresetbutton" BufferOffset="79" Addr="D4.15" Description="safe module:Front body interlock reset button"/>

+		<DI_ITEM Index="80" Name="DI_LightcurtainOSSD1" BufferOffset="80" Addr="D5.0" Description="safe module:Light curtain OSSD1"/>

+		<DI_ITEM Index="81" Name="DI_LightcurtainOSSD2" BufferOffset="81" Addr="D5.1" Description="safe module:Light curtain OSSD2"/>

+		<DI_ITEM Index="82" Name="DI_Lightcurtainfault" BufferOffset="82" Addr="D5.2" Description="safe module:Light curtain fault"/>

+		<DI_ITEM Index="83" Name="DI_Frontbodydoorswitch" BufferOffset="83" Addr="D5.3" Description="safe module:Front body door switch"/>

+		<DI_ITEM Index="84" Name="DI_FrontbodyIOshuttersw" BufferOffset="84" Addr="D5.4" Description="safe module:Front body I/O shutter sw"/>

+		<DI_ITEM Index="85" Name="DI_FouprobotEMS" BufferOffset="85" Addr="D5.5" Description="safe module:Foup robot EMS"/>

+		<DI_ITEM Index="86" Name="DI_WaferrobotEMS" BufferOffset="86" Addr="D5.6" Description="safe module:Wafer robot EMS"/>

+		<DI_ITEM Index="87" Name="DI_AxisCRmotorEDM" BufferOffset="87" Addr="D5.7" Description="safe module:Axis-CR motor EDM"/>

+		<DI_ITEM Index="89" Name="DI_AxisEmotorEDM" BufferOffset="89" Addr="D5.9" Description="safe module:Axis-E motor EDM"/>

+		<DI_ITEM Index="90" Name="DI_TS05001FFUtempsw" BufferOffset="90" Addr="D5.10" Description="safe module:TS05001 FFU temp sw"/>

+		<DI_ITEM Index="91" Name="DI_TS05002Capinsidetempsw" BufferOffset="91" Addr="D5.11" Description="safe module:TS05002 Cap inside temp sw"/>

+		<DI_ITEM Index="92" Name="DI_TS05003Capoutsidetempsw" BufferOffset="92" Addr="D5.12" Description="safe module:TS05003 Cap outside temp sw"/>

+		<DI_ITEM Index="93" Name="DI_TS05004Raxisrotationtempsw" BufferOffset="93" Addr="D5.13" Description="safe module:TS05004 R axis rotation temp sw"/>

+		<DI_ITEM Index="94" Name="DI_TS05005RHCtempsw" BufferOffset="94" Addr="D5.14" Description="safe module:TS05005 RHC temp sw"/>

+		<DI_ITEM Index="95" Name="DI_TS05006furnacetempsw" BufferOffset="95" Addr="D5.15" Description="safe module:TS05006 furnace temp sw"/>

+		<DI_ITEM Index="96" Name="DI_LoadingareaEMS" BufferOffset="96" Addr="D6.0" Description="safe module:Loading area EMS"/>

+		<DI_ITEM Index="97" Name="DI_GD02001HCL1gasleak1stalarm" BufferOffset="97" Addr="D6.1" Description="safe module:GD02001 HCL-1 gas leak 1st alarm"/>

+		<DI_ITEM Index="98" Name="DI_GD02001HCL1gasleak2ndalarm" BufferOffset="98" Addr="D6.2" Description="safe module:GD02001 HCL-1 gas leak 2nd alarm"/>

+		<DI_ITEM Index="99" Name="DI_GD02001fault" BufferOffset="99" Addr="D6.3" Description="safe module:GD02001 fault"/>

+		<DI_ITEM Index="100" Name="DI_GD02002HCL2gasleak1stalarm" BufferOffset="100" Addr="D6.4" Description="safe module:GD02002 HCL-2 gas leak 1st alarm"/>

+		<DI_ITEM Index="101" Name="DI_GD02002HCL2gasleak2ndalarm" BufferOffset="101" Addr="D6.5" Description="safe module:GD02002 HCL-2 gas leak 2nd alarm"/>

+		<DI_ITEM Index="102" Name="DI_GD02002fault" BufferOffset="102" Addr="D6.6" Description="safe module:GD02002 fault"/>

+		<DI_ITEM Index="103" Name="DI_GD02003NH31gasleak1stalarm" BufferOffset="103" Addr="D6.7" Description="safe module:GD02003 NH3-1 gas leak 1st alarm"/>

+		<DI_ITEM Index="104" Name="DI_GD02003NH31gasleak2ndalarm" BufferOffset="104" Addr="D6.8" Description="safe module:GD02003 NH3-1 gas leak 2nd alarm"/>

+		<DI_ITEM Index="105" Name="DI_GD02003fault" BufferOffset="105" Addr="D6.9" Description="safe module:GD02003 fault"/>

+		<DI_ITEM Index="106" Name="DI_GD02004NH32gasleak1stalarm" BufferOffset="106" Addr="D6.10" Description="safe module:GD02004 NH3-2 gas leak 1st alarm"/>

+		<DI_ITEM Index="107" Name="DI_GD02004NH32gasleak2ndalarm" BufferOffset="107" Addr="D6.11" Description="safe module:GD02004 NH3-2 gas leak 2nd alarm"/>

+		<DI_ITEM Index="108" Name="DI_GD02004fault" BufferOffset="108" Addr="D6.12" Description="safe module:GD02004 fault"/>

+		<DI_ITEM Index="109" Name="DI_GD02005F21gasleak1stalarm" BufferOffset="109" Addr="D6.13" Description="safe module:GD02005 F2-1 gas leak 1st alarm"/>

+		<DI_ITEM Index="110" Name="DI_GD02005F21gasleak2ndalarm" BufferOffset="110" Addr="D6.14" Description="safe module:GD02005 F2-1 gas leak 2nd alarm"/>

+		<DI_ITEM Index="111" Name="DI_GD02005fault" BufferOffset="111" Addr="D6.15" Description="safe module:GD02005 fault"/>

+		<DI_ITEM Index="112" Name="DI_GD02006F22gasleak1stalarm" BufferOffset="112" Addr="D6.16" Description="safe module:GD02006 F2-2 gas leak 1st alarm"/>

+		<DI_ITEM Index="113" Name="DI_GD02006F22gasleak2ndalarm" BufferOffset="113" Addr="D7.0" Description="safe module:GD02006 F2-2 gas leak 2nd alarm"/>

+		<DI_ITEM Index="114" Name="DI_GD02006fault" BufferOffset="114" Addr="D7.1" Description="safe module:GD02006 fault"/>

+		<DI_ITEM Index="115" Name="DI_GD02007NO1gasleak1stalarm" BufferOffset="115" Addr="D7.2" Description="safe module:GD02007 NO-1 gas leak 1st alarm"/>

+		<DI_ITEM Index="116" Name="DI_GD02007NO1gasleak2ndalarm" BufferOffset="116" Addr="D7.3" Description="safe module:GD02007 NO-1 gas leak 2nd alarm"/>

+		<DI_ITEM Index="117" Name="DI_GD02007fault" BufferOffset="117" Addr="D7.4" Description="safe module:GD02007 fault"/>

+		<DI_ITEM Index="118" Name="DI_GD02008NO2gasleak1stalarm" BufferOffset="118" Addr="D7.5" Description="safe module:GD02008 NO-2 gas leak 1st alarm"/>

+		<DI_ITEM Index="119" Name="DI_GD02008NO2gasleak2ndalarm" BufferOffset="119" Addr="D7.6" Description="safe module:GD02008 NO-2 gas leak 2nd alarm"/>

+		<DI_ITEM Index="120" Name="DI_GD02008fault" BufferOffset="120" Addr="D7.7" Description="safe module:GD02008 fault"/>

+		<DI_ITEM Index="121" Name="DI_GD02009C3H61gasleak1stalarm" BufferOffset="121" Addr="D7.8" Description="safe module:GD02009 C3H6-1 gas leak 1st alarm"/>

+		<DI_ITEM Index="122" Name="DI_GD02009C3H61gasleak2ndalarm" BufferOffset="122" Addr="D7.9" Description="safe module:GD02009 C3H6-1 gas leak 2nd alarm"/>

+		<DI_ITEM Index="123" Name="DI_GD02009fault" BufferOffset="123" Addr="D7.10" Description="safe module:GD02009 fault"/>

+		<DI_ITEM Index="124" Name="DI_GD02010C3H62gasleak1stalarm" BufferOffset="124" Addr="D7.11" Description="safe module:GD02010 C3H6-2 gas leak 1st alarm"/>

+		<DI_ITEM Index="125" Name="DI_GD02010C3H62gasleak2ndalarm" BufferOffset="125" Addr="D7.12" Description="safe module:GD02010 C3H6-2 gas leak 2nd alarm"/>

+		<DI_ITEM Index="126" Name="DI_GD02010fault" BufferOffset="126" Addr="D7.13" Description="safe module:GD02010 fault"/>

+		<DI_ITEM Index="127" Name="DI_GD02011DMA1gasleak1stalarm" BufferOffset="127" Addr="D7.14" Description="safe module:GD02011 DMA-1 gas leak 1st alarm"/>

+		<DI_ITEM Index="128" Name="DI_GD02011DMA1gasleak2ndalarm" BufferOffset="128" Addr="D7.15" Description="safe module:GD02011 DMA-1 gas leak 2nd alarm"/>

+		<DI_ITEM Index="129" Name="DI_GD02011fault" BufferOffset="129" Addr="D8.0" Description="safe module:GD02011 fault"/>

+		<DI_ITEM Index="130" Name="DI_GD02012DMA2gasleak1stalarm" BufferOffset="130" Addr="D8.1" Description="safe module:GD02012 DMA-2 gas leak 1st alarm"/>

+		<DI_ITEM Index="131" Name="DI_GD02012DMA2gasleak2ndalarm" BufferOffset="131" Addr="D8.2" Description="safe module:GD02012 DMA-2 gas leak 2nd alarm"/>

+		<DI_ITEM Index="132" Name="DI_GD02012fault" BufferOffset="132" Addr="D8.3" Description="safe module:GD02012 fault"/>

+		<DI_ITEM Index="133" Name="DI_SL02001gasboxdoorsw11" BufferOffset="133" Addr="D8.4" Description="safe module:SL02001 gas box door sw1-1"/>

+		<DI_ITEM Index="134" Name="DI_SL02001gasboxdoorsw12" BufferOffset="134" Addr="D8.5" Description="safe module:SL02001 gas box door sw1-2"/>

+		<DI_ITEM Index="135" Name="DI_SL02002gasboxdoorsw11" BufferOffset="135" Addr="D8.6" Description="safe module:SL02002 gas box door sw1-1"/>

+		<DI_ITEM Index="136" Name="DI_SL02002gasboxdoorsw12" BufferOffset="136" Addr="D8.7" Description="safe module:SL02002 gas box door sw1-2"/>

+		<DI_ITEM Index="137" Name="DI_SL05001LAdoorsw1" BufferOffset="137" Addr="D8.8" Description="safe module:SL05001 LA door sw1"/>

+		<DI_ITEM Index="138" Name="DI_SL05002LAdoorsw2" BufferOffset="138" Addr="D8.9" Description="safe module:SL05002 LA door sw2"/>

+		<DI_ITEM Index="139" Name="DI_SL05004LAfurnacedoorsw" BufferOffset="139" Addr="D8.10" Description="safe module:SL05004 LA furnace door sw"/>

+

+		<DI_ITEM Index="144" Name="DI_Furnacepoweronoff" BufferOffset="144" Addr="D9.0" Description="safe module:Furnace power on/off"/>

+		<DI_ITEM Index="145" Name="DI_Blowerpoweronoff" BufferOffset="145" Addr="D9.1" Description="safe module:Blower power on/off"/>

+		<DI_ITEM Index="146" Name="DI_100Vtransformerpoweron" BufferOffset="146" Addr="D9.2" Description="safe module:100V transformer power on"/>

+		<DI_ITEM Index="147" Name="DI_VFDenable" BufferOffset="147" Addr="D9.3" Description="safe module:VFD enable"/>

+

+		<DI_ITEM Index="149" Name="DI_HPMvalvepoweronoff" BufferOffset="149" Addr="D9.5" Description="safe module:HPM valve power on/off"/>

+		<DI_ITEM Index="150" Name="DI_AxisCRmotorenable1" BufferOffset="150" Addr="D9.6" Description="safe module:Axis-CR motor enable1"/>

+		<DI_ITEM Index="151" Name="DI_AxisCRmotorenable2" BufferOffset="151" Addr="D9.7" Description="safe module:Axis-CR motor enable2"/>

+		<DI_ITEM Index="152" Name="DI_AxisEmotorenable1" BufferOffset="152" Addr="D9.8" Description="safe module:Axis-E motor enable1"/>

+		<DI_ITEM Index="153" Name="DI_AxisEmotorenable2" BufferOffset="153" Addr="D9.9" Description="safe module:Axis-E motor enable2"/>

+

+		<DI_ITEM Index="156" Name="DI_FTRenable1" BufferOffset="156" Addr="D9.12" Description="safe module:FTR enable1"/>

+		<DI_ITEM Index="157" Name="DI_FTRenable2" BufferOffset="157" Addr="D9.13" Description="safe module:FTR enable2"/>

+		<DI_ITEM Index="158" Name="DI_FTRinterlockreset" BufferOffset="158" Addr="D9.14" Description="safe module:FTR interlock reset"/>

+		<DI_ITEM Index="159" Name="DI_WTRenable1" BufferOffset="159" Addr="D9.15" Description="safe module:WTR enable1"/>

+		<DI_ITEM Index="160" Name="DI_WTRenable2" BufferOffset="160" Addr="D10.0" Description="safe module:WTR enable2"/>

+		<DI_ITEM Index="161" Name="DI_WTRinterlockreset" BufferOffset="161" Addr="D10.1" Description="safe module:WTR interlock reset"/>

+		<DI_ITEM Index="162" Name="DI_Capheaterenable" BufferOffset="162" Addr="D10.2" Description="safe module:Cap heater enable"/>

+

+		<DI_ITEM Index="164" Name="DI_Lightcurtainidel" BufferOffset="164" Addr="D10.4" Description="safe module:Light curtain idel"/>

+		<DI_ITEM Index="165" Name="DI_Powerboxinterlockbuttonled" BufferOffset="165" Addr="D10.5" Description="safe module:Power box interlock button led"/>

+		<DI_ITEM Index="166" Name="DI_Gasboxinterlockbuttonled" BufferOffset="166" Addr="D10.6" Description="safe module:Gas box interlock button led"/>

+		<DI_ITEM Index="167" Name="DI_Frontbodyinterlockbuttonled" BufferOffset="167" Addr="D10.7" Description="safe module:Frontbody interlock button led"/>

 

 		<DI_ITEM Index="960" Name="DI_GLBoxPG1CNT1Alarm" BufferOffset="960" Addr="D60.0"  Description="Gas box PG1 CNT1 alarm" />

 		<DI_ITEM Index="961" Name="DI_GLBoxPG1CNT2Alarm" BufferOffset="961" Addr="D60.1"  Description="Gas box PG1 CNT2 alarm" />