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@@ -695,7 +695,7 @@
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<IoPressureMeter id="PS14AnalogValue" display="PS14AnalogValue" schematicId="PS14AnalogValue" unit="kPa" aiFeedback="AI_PS14AnalogValue" physical="1500,7500" scale="-99.9,99.9" aioType="float"/>
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<IoPressureMeter id="VG11" display="VG11" schematicId="VG11" unit="Torr" aiFeedback="AI_VG11Pressure" physical="0,15000" scale="0,1000" aioType="float" unSigned="True"/>
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- <IoPressureMeter id="VG12" display="VG12" schematicId="VG12" unit="Torr" aiFeedback="AI_VG12Pressure" physical="0,15000" scale="0,1000" aioType="float"/>
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+ <!--<IoPressureMeter id="VG12" display="VG12" schematicId="VG12" unit="Torr" aiFeedback="AI_VG12Pressure" physical="0,15000" scale="0,1000" aioType="float"/>-->
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<IoPressureMeter id="VG13" display="VG13" schematicId="VG13" unit="Torr" aiFeedback="AI_VG13Pressure" physical="0,15000" scale="0,1000" aioType="float" unSigned="True"/>
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<IoPressureMeter id="VG21" display="VG21" schematicId="VG21" unit="Torr" aiFeedback="AI_VG21Pressure" physical="0,15000" scale="0,1000" aioType="float"/>
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<IoPressureMeter id="VG22" display="VG22" schematicId="VG22" unit="Torr" aiFeedback="AI_VG22Pressure" physical="0,15000" scale="0,1000" aioType="float"/>
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@@ -1107,8 +1107,6 @@
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<IoTrigger id="TrigFFULSPEED" display="" schematicId="" unit="" aoTrigger="AO_FFU_LSPEED" />
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<IoTrigger id="TrigFFUHSPEED" display="" schematicId="" unit="" aoTrigger="AO_FFU_HSPEED" />
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<IoTrigger id="TrigHPMValve" display="" schematicId="" unit="" doTrigger="DO_HPMValveOnOff"/>
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- <IoTrigger id="TrigT101PowerOn" display="" schematicId="" unit="" doTrigger="DO_MainPowerOn"/>
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- <IoTrigger id="TrigT101PowerOff" display="" schematicId="" unit="" doTrigger="DO_MainPowerOff"/>
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<IoTrigger id="TrigGaslineHeaterPowerOn" display="" schematicId="" unit="" doTrigger="DO_GaslineHeaterPowerOn"/>
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<IoTrigger id="TrigExhaustHeaterPowerOn" display="" schematicId="" unit="" doTrigger="DO_ExhaustHeaterPowerOn"/>
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<IoTrigger id="TrigFrontBodyPowerOn" display="" schematicId="" unit="" doTrigger="DO_FrontBodyPowerOn"/>
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@@ -1122,12 +1120,6 @@
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<IoTrigger id="TrigBoatLiftMotorHardwareInterlockOk2" display="" schematicId="" unit="" doTrigger="DO_BoatLiftMotorHardwareInterlockOk2"/>
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<IoTrigger id="TrigWaferRobotEnable" display="" schematicId="" unit="" doTrigger="DO_WaferRobotEnable"/>
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<IoTrigger id="TrigFOUPRobotEnable" display="" schematicId="" unit="" doTrigger="DO_FOUPRobotEnable"/>
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- <IoTrigger id="TrigLightCurtainIdle" display="" schematicId="" unit="" doTrigger="DO_LightCurtainIdle"/>
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- <IoTrigger id="TrigGaslineHeatingEN1K5201" display="" schematicId="" unit="" doTrigger="DO_GaslineHeatingEN1K5201"/>
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- <IoTrigger id="TrigGaslineHeatingEN1K5202" display="" schematicId="" unit="" doTrigger="DO_GaslineHeatingEN1K5202"/>
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- <IoTrigger id="TrigGaslineHeatingEN1K5203" display="" schematicId="" unit="" doTrigger="DO_GaslineHeatingEN1K5203"/>
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- <IoTrigger id="TrigGaslineHeatingEN1K5204" display="" schematicId="" unit="" doTrigger="DO_GaslineHeatingEN1K5204"/>
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- <IoTrigger id="TrigGaslineHeatingEN1K5205" display="" schematicId="" unit="" doTrigger="DO_GaslineHeatingEN1K5205"/>
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<IoTrigger id="TrigStartButton" display="" schematicId="" unit="" doTrigger="DO_StartButton"/>
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<IoTrigger id="TrigStopButton" display="" schematicId="" unit="" doTrigger="DO_StopButton"/>
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@@ -1136,8 +1128,6 @@
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<IoTrigger id="TrigAutoOrManualKnob" display="" schematicId="" unit="" doTrigger="DO_AutoOrManualKnob"/>
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<IoTrigger id="TrigNormalOrMaintainKnob" display="" schematicId="" unit="" doTrigger="DO_NormalOrMaintainKnob"/>
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<IoTrigger id="TrigHeaterPowerOnOffKnob" display="" schematicId="" unit="" doTrigger="DO_HeaterPowerOnOffKnob"/>
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- <IoTrigger id="TrigREVReset" display="" schematicId="" unit="" doTrigger="DO_REVReset"/>
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- <IoTrigger id="TrigEV101CoolingWaterShift" display="" schematicId="" unit="" doTrigger="DO_EV101CoolingWaterShift"/>
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<IoTrigger id="TrigVaccumPumpBothOn" display="" schematicId="" unit="" doTrigger="DO_VaccumPumpBothOn"/>
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<IoTrigger id="TrigVaccumPumpAGVOpen" display="" schematicId="" unit="" doTrigger="DO_VaccumPumpAGVOpen"/>
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<IoTrigger id="TrigVaccum2PumpAGVOpen" display="" schematicId="" unit="" doTrigger="DO_Vaccum2PumpAGVOpen"/>
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@@ -1175,22 +1165,22 @@
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<IoTrigger id="TrigVGUnitConversion" display="" schematicId="" unit="" doTrigger="DO_VGUnitConversion"/>
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<IoTrigger id="TrigHeaterAllEnable" display="" schematicId="" unit="" aoTrigger="AO_HeaterAllEnable"/>
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- <IoTrigger id="TrigStockerPurgeStocker16" display="" schematicId="" unit="" doTrigger="DO_SV816ON"/>
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- <IoTrigger id="TrigStockerPurgeStocker15" display="" schematicId="" unit="" doTrigger="DO_SV817ON"/>
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- <IoTrigger id="TrigStockerPurgeStocker14" display="" schematicId="" unit="" doTrigger="DO_SV818ON"/>
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- <IoTrigger id="TrigStockerPurgeStocker13" display="" schematicId="" unit="" doTrigger="DO_SV819ON"/>
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- <IoTrigger id="TrigStockerPurgeStocker12" display="" schematicId="" unit="" doTrigger="DO_SV820ON"/>
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- <IoTrigger id="TrigStockerPurgeStocker11" display="" schematicId="" unit="" doTrigger="DO_SV821ON"/>
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- <IoTrigger id="TrigStockerPurgeStocker10" display="" schematicId="" unit="" doTrigger="DO_SV822ON"/>
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- <IoTrigger id="TrigStockerPurgeStocker9" display="" schematicId="" unit="" doTrigger="DO_SV823ON"/>
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- <IoTrigger id="TrigStockerPurgeStocker8" display="" schematicId="" unit="" doTrigger="DO_SV824ON"/>
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- <IoTrigger id="TrigStockerPurgeStocker7" display="" schematicId="" unit="" doTrigger="DO_SV825ON"/>
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- <IoTrigger id="TrigStockerPurgeStocker6" display="" schematicId="" unit="" doTrigger="DO_SV826ON"/>
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- <IoTrigger id="TrigStockerPurgeStocker5" display="" schematicId="" unit="" doTrigger="DO_SV827ON"/>
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- <IoTrigger id="TrigStockerPurgeStocker4" display="" schematicId="" unit="" doTrigger="DO_SV828ON"/>
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- <IoTrigger id="TrigStockerPurgeStocker3" display="" schematicId="" unit="" doTrigger="DO_SV829ON"/>
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- <IoTrigger id="TrigStockerPurgeStocker2" display="" schematicId="" unit="" doTrigger="DO_SV830ON"/>
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- <IoTrigger id="TrigStockerPurgeStocker1" display="" schematicId="" unit="" doTrigger="DO_SV831ON"/>
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+ <IoTrigger id="TrigStockerPurgeStocker13" display="" schematicId="" unit="" doTrigger="DO_BufferN2Purage4AOpen"/>
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+ <IoTrigger id="TrigStockerPurgeStocker14" display="" schematicId="" unit="" doTrigger="DO_BufferN2Purage4BOpen"/>
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+ <IoTrigger id="TrigStockerPurgeStocker15" display="" schematicId="" unit="" doTrigger="DO_BufferN2Purage4COpen"/>
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+ <IoTrigger id="TrigStockerPurgeStocker16" display="" schematicId="" unit="" doTrigger="DO_BufferN2Purage4DOpen"/>
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+ <IoTrigger id="TrigStockerPurgeStocker9" display="" schematicId="" unit="" doTrigger="DO_BufferN2Purage3AOpen"/>
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+ <IoTrigger id="TrigStockerPurgeStocker10" display="" schematicId="" unit="" doTrigger="DO_BufferN2Purage3BOpen"/>
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+ <IoTrigger id="TrigStockerPurgeStocker11" display="" schematicId="" unit="" doTrigger="DO_BufferN2Purage3COpen"/>
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+ <IoTrigger id="TrigStockerPurgeStocker12" display="" schematicId="" unit="" doTrigger="DO_BufferN2Purage3DOpen"/>
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+ <IoTrigger id="TrigStockerPurgeStocker5" display="" schematicId="" unit="" doTrigger="DO_BufferN2Purage2AOpen"/>
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+ <IoTrigger id="TrigStockerPurgeStocker6" display="" schematicId="" unit="" doTrigger="DO_BufferN2Purage2BOpen"/>
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+ <IoTrigger id="TrigStockerPurgeStocker7" display="" schematicId="" unit="" doTrigger="DO_BufferN2Purage2COpen"/>
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+ <IoTrigger id="TrigStockerPurgeStocker8" display="" schematicId="" unit="" doTrigger="DO_BufferN2Purage2DOpen"/>
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+ <IoTrigger id="TrigStockerPurgeStocker1" display="" schematicId="" unit="" doTrigger="DO_BufferN2Purage1AOpen"/>
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+ <IoTrigger id="TrigStockerPurgeStocker2" display="" schematicId="" unit="" doTrigger="DO_BufferN2Purage1BOpen"/>
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+ <IoTrigger id="TrigStockerPurgeStocker3" display="" schematicId="" unit="" doTrigger="DO_BufferN2Purage1COpen"/>
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+ <IoTrigger id="TrigStockerPurgeStocker4" display="" schematicId="" unit="" doTrigger="DO_BufferN2Purage1DOpen"/>
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<IoTrigger id="TrigCREFON" display="" schematicId="" unit="" doTrigger="DO_ALTOREFILL2REQUESTOrVALVEOPEN"/>
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<IoTrigger id="TrigSIREFON" display="" schematicId="" unit="" doTrigger="DO_AUTOREFILL1REQUESTOrVALVEOPEN"/>
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<IoTrigger id="TrigHTR1SWON" display="" schematicId="" unit="" doTrigger="DO_HTR1"/>
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@@ -1205,6 +1195,20 @@
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<IoTrigger id="TrigMS521" display="" schematicId="" unit="" doTrigger="DO_MS521"/>
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<IoTrigger id="TrigMS522" display="" schematicId="" unit="" doTrigger="DO_MS522"/>
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+ <IoTrigger id="TrigN2PurgeLAO2CheckFirstEnable" display="" schematicId="" unit="" doTrigger="DO_LAO2CheckFirstEN"/>
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+ <IoTrigger id="TrigN2PurgeFIMS1O2CheckEnable" display="" schematicId="" unit="" doTrigger="DO_FIMS1O2CheckEN"/>
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+ <IoTrigger id="TrigN2PurgeFIMS2O2CheckEnable" display="" schematicId="" unit="" doTrigger="DO_FIMS2O2CheckEN"/>
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+ <IoTrigger id="TrigN2PurgeProcess" display="" schematicId="" unit="" doTrigger="DO_N2PURGEPROCESS"/>
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+ <IoTrigger id="TrigN2PurgeLAO2OverTime" display="" schematicId="" unit="" aoTrigger="AO_LAO2OverTime"/>
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+ <IoTrigger id="TrigN2PurgeLAO2CheckTime" display="" schematicId="" unit="" aoTrigger="AO_LAO2CheckTime"/>
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+ <IoTrigger id="TrigN2PurgeFOUPO2OverTime" display="" schematicId="" unit="" aoTrigger="AO_FOUPO2OverTime"/>
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+ <IoTrigger id="TrigN2PurgeFOUPO2CheckTime" display="" schematicId="" unit="" aoTrigger="AO_FOUPO2CheckTime"/>
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+ <IoTrigger id="TrigN2PurgeExchangeLATOFOUPWaitTime" display="" schematicId="" unit="" aoTrigger="AO_ExchangeLATOFOUPWaitTime"/>
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+ <IoTrigger id="TrigN2PurgeExchangeFOUPTOLAWaitTime" display="" schematicId="" unit="" aoTrigger="AO_ExchangeFOUPTOLAWaitTime"/>
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+ <IoTrigger id="TrigN2PurgeExchangeFOUPTOFOUPWaitTime" display="" schematicId="" unit="" aoTrigger="AO_ExchangeFOUPTOFOUPWaitTime"/>
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+ <IoTrigger id="TrigN2PurgeLAO2CheckSV" display="" schematicId="" unit="" aoTrigger="AO_LAO2CheckSV"/>
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+ <IoTrigger id="TrigN2PurgeFOUPO2CheckSV" display="" schematicId="" unit="" aoTrigger="AO_FOUPO2CheckSV"/>
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+
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</IoTriggers>
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<IoTriggers classType="FurnaceRT.Devices.IoTrigger3" assembly="FurnaceRT">
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<IoTrigger3 id="GASTempOutRangeAlarm" display="GASTempOutRangeAlarm" diFeedback1="DI_TempOutRangeAlarm" diFeedback2="DI_TempOutRangeAlarm" diFeedback3="DI_TempOutRangeAlarm" diFeedback4="DI_TempOutRangeAlarm" schematicId="" unit="" doTrigger="DO_GASTempOutRangeAlarm"/>
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