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git-svn-id: http://10.4.3.168:50001/svn/Furnace@27 dbcde07d-dcf5-c148-8a84-ac3097b7778e

Xiongbing 6 months ago
parent
commit
ee8be39543

+ 2 - 2
Branch/NTP02/Furnace/FurnaceRT/Config/IO/DeviceModelHeater.xml

@@ -1,7 +1,7 @@
 <?xml version="1.0" encoding="utf-8"?>
 <DeviceModelDefine type="Furnace" xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance"  >
 
-	<IoHeaters classType="FurnaceRT.Devices.IoHeater" assembly="FurnaceRT">
+	<!--<IoHeaters classType="FurnaceRT.Devices.IoHeater" assembly="FurnaceRT">
 
 		<IoHeater id="HeaterU" display="U" schematicId="HeaterU" unit="" installzone="Zone1"
 			diCascadePVSBrk="DI_HeaterUCascadePVSBrk"
@@ -160,6 +160,6 @@
 		<IoAlarmSignal id="AlarmSignalHeaterCOverTemp"		diSignalsplay="HeaterC OverTemp" aiSignal="AI_HeaterCOverTemp"	alarmTrigValue="true" condition="H" limitValue="850"/>
 		<IoAlarmSignal id="AlarmSignalHeaterCLOverTemp"		diSignalsplay="HeaterCL OverTemp" aiSignal="AI_HeaterCLOverTemp"	alarmTrigValue="true" condition="H" limitValue="850"/>
 		<IoAlarmSignal id="AlarmSignalHeaterLOverTemp"		diSignalsplay="HeaterL OverTemp" aiSignal="AI_HeaterLOverTemp"	alarmTrigValue="true" condition="H" limitValue="850"/>
-	</IoAlarmSignals>
+	</IoAlarmSignals>-->
 
 </DeviceModelDefine>

+ 653 - 0
Branch/NTP02/Furnace/FurnaceRT/Config/Recipe/Furnace/Process/NTP02/RecipeFormat.xml

@@ -0,0 +1,653 @@
+<?xml version="1.0" encoding="utf-8"?>
+<Aitex>
+	<TableRecipeFormat RecipeChamberType="Furnace" RecipeVersion="1.0">
+
+		<!--###########################################-->
+		<Catalog DisplayName="StepInfo">
+			<Group DisplayName="Step Information">
+				<Step ModuleName="" DeviceType="" DisplayName="No." ControlName="StepNo" InputType="ReadOnly" />
+				<Step ModuleName="" DeviceType="" DisplayName="Name" ControlName="Name" InputType="TextInput" />
+
+				<Step ModuleName="" DeviceType="" DisplayName="Step Mode" ControlName="EndBy" InputType="ReadOnlySelection" Description="End by step time or RF time">
+					<Item DisplayName="Step Time Mode" ControlName="EndByStepTime" />
+					<Item DisplayName="Temperature Stable" ControlName="EndByTemperature" />
+					<Item DisplayName="Pressure Stable" ControlName="EndByPressure" />
+					<Item DisplayName="Gas Flow Stable" ControlName="EndByGasFlow" />
+				</Step>
+				<Step ModuleName="" DeviceType="" DisplayName="Step Time(s)" ControlName="Time" InputType="NumInput" InputMode="" Min="0" Max="1000"  />
+			</Group>
+		</Catalog>
+
+		<!--###########################################-->
+		<Catalog DisplayName="Command">
+			<Group DisplayName="Command">
+				<Step ModuleName="" DeviceType="" DisplayName="Command" ControlName="Command" InputType="ReadOnlySelection" Description="">
+					<Item DisplayName="No Control" ControlName="NoControl" />
+					<Item DisplayName="Hold + Buzzer" ControlName="HoldAndBuzzer" />
+					<Item DisplayName="Hold" ControlName="Hold" />
+					<Item DisplayName="Buzzer" ControlName="Buzzer" />
+					<Item DisplayName="End" ControlName="End" />
+					<Item DisplayName="Call Sub Recipe" ControlName="CallSubRecipe" />
+					<Item DisplayName="Jump" ControlName="Jump" />
+					<Item DisplayName="Loop" ControlName="Loop" />
+				</Step>
+			</Group>
+		</Catalog>
+
+		<!--###########################################-->
+		<Catalog DisplayName="BoatElevator">
+			<Group DisplayName="BoatElevator">
+				<Step ModuleName="" DeviceType="" DisplayName="ZAxisPosition" ControlName="ZAxisPosition" InputType="ReadOnlySelection" Description="">
+					<Item DisplayName="Process Position" ControlName="ProcessPosition" />
+					<Item DisplayName="Position 1" ControlName="Position1" />
+					<Item DisplayName="Position 2" ControlName="Position2" />
+					<Item DisplayName="Home Position" ControlName="HomePosition" />
+				</Step>
+				<Step ModuleName="" DeviceType="" DisplayName="Z Axis Speed(rpm)" ControlName="ZAxisSpeed" InputType="NumInput" InputMode="" Min="0" Max="1000"  />
+				<Step ModuleName="" DeviceType="" DisplayName="RotatePosition" ControlName="RotatePosition" InputType="ReadOnlySelection" Description="">
+					<Item DisplayName="Continuous" ControlName="Continuous" />
+					<Item DisplayName="Interval" ControlName="Interval" />
+					<Item DisplayName="Stop" ControlName="Stop" />
+				</Step>
+				<Step ModuleName="" DeviceType="" DisplayName="Rotate Speed(rpm)" ControlName="RotateSpeed" InputType="NumInput" InputMode="" Min="0" Max="1000"  />
+				<Step ModuleName="" DeviceType="" DisplayName="Rotate Direction" ControlName="RotateDirection" InputType="ReadOnlySelection" Description="">
+					<Item DisplayName="CW" ControlName="CW" />
+					<Item DisplayName="CCW" ControlName="CCW" />
+				</Step>
+			</Group>
+		</Catalog>
+
+		<!--###########################################-->
+		<Catalog DisplayName="Pressure">
+			<Group DisplayName="APC">
+				<Step ModuleName="" DeviceType="Pressure" DisplayName="Pressure(Torr)"  ControlName="APC.SetPressure" InputType="DoubleInput" InputMode="" Min="0" Max="1000" Description="TV Pressure" />
+			</Group>
+		</Catalog>
+
+		<!--###########################################-->
+		<Catalog DisplayName="MFCFlow">
+			<Group DisplayName="MFC">
+				<Step ModuleName="MFC1" DeviceType="MFC" DisplayName="MFC1(sccm)" ControlName="MFC1.Flow" InputType="NumInput" InputMode="" Min="0" Max="10000" Description="" />
+				<Step ModuleName="MFC2" DeviceType="MFC" DisplayName="MFC2(sccm)" ControlName="MFC2.Flow" InputType="NumInput" InputMode="" Min="0" Max="10000" Description="" />
+				<Step ModuleName="MFC3" DeviceType="MFC" DisplayName="MFC3(sccm)" ControlName="MFC3.Flow" InputType="NumInput" InputMode="" Min="0" Max="10000" Description="" />
+				<Step ModuleName="MFC4" DeviceType="MFC" DisplayName="MFC4(sccm)" ControlName="MFC4.Flow" InputType="NumInput" InputMode="" Min="0" Max="5000"  Description="" />
+				<Step ModuleName="MFC5" DeviceType="MFC" DisplayName="MFC5(sccm)" ControlName="MFC5.Flow" InputType="NumInput" InputMode="" Min="0" Max="5000"  Description="" />
+				<Step ModuleName="MFC6" DeviceType="MFC" DisplayName="MFC6(sccm)" ControlName="MFC6.Flow" InputType="NumInput" InputMode="" Min="0" Max="10000" Description="" />
+				<Step ModuleName="MFC7" DeviceType="MFC" DisplayName="MFC7(sccm)" ControlName="MFC7.Flow" InputType="NumInput" InputMode="" Min="0" Max="10000" Description="" />
+				<Step ModuleName="MFC8" DeviceType="MFC" DisplayName="MFC8(sccm)" ControlName="MFC8.Flow" InputType="NumInput" InputMode="" Min="0" Max="10000" Description="" />
+				<Step ModuleName="MFC9" DeviceType="MFC" DisplayName="MFC9(sccm)" ControlName="MFC9.Flow" InputType="NumInput" InputMode="" Min="0" Max="10000" Description="" />
+				<Step ModuleName="MFC10" DeviceType="MFC" DisplayName="MFC10(sccm)" ControlName="MFC10.Flow" InputType="NumInput" InputMode="" Min="0" Max="10000" Description="" />
+				<Step ModuleName="MFC11" DeviceType="MFC" DisplayName="MFC11(sccm)" ControlName="MFC11.Flow" InputType="NumInput" InputMode="" Min="0" Max="10000" Description="" />
+				<Step ModuleName="MFC12" DeviceType="MFC" DisplayName="MFC12(sccm)" ControlName="MFC12.Flow" InputType="NumInput" InputMode="" Min="0" Max="10000" Description="" />
+				<Step ModuleName="MFC13" DeviceType="MFC" DisplayName="MFC13(sccm)" ControlName="MFC13.Flow" InputType="NumInput" InputMode="" Min="0" Max="10000" Description="" />
+				<Step ModuleName="MFC14" DeviceType="MFC" DisplayName="MFC14(sccm)" ControlName="MFC14.Flow" InputType="NumInput" InputMode="" Min="0" Max="10000" Description="" />
+				<Step ModuleName="MFC15" DeviceType="MFC" DisplayName="MFC15(sccm)" ControlName="MFC15.Flow" InputType="NumInput" InputMode="" Min="0" Max="10000" Description="" />
+				<Step ModuleName="MFC16" DeviceType="MFC" DisplayName="MFC16(sccm)" ControlName="MFC16.Flow" InputType="NumInput" InputMode="" Min="0" Max="10000" Description="" />
+
+
+			</Group>
+		</Catalog>
+
+		<Catalog DisplayName="MFCRampng">
+			<Group DisplayName="MFCRampng">
+				<Step ModuleName="" DeviceType="MFCRampng" DisplayName="MFC N1(sccm)" ControlName="N1.Flow" InputType="NumInput" InputMode="" Min="0" Max="10000" Description="" />
+				<Step ModuleName="" DeviceType="MFCRampng" DisplayName="MFC N2(sccm)" ControlName="N2.Flow" InputType="NumInput" InputMode="" Min="0" Max="10000" Description="" />
+				<Step ModuleName="" DeviceType="MFCRampng" DisplayName="MFC N3(sccm)" ControlName="N3.Flow" InputType="NumInput" InputMode="" Min="0" Max="10000" Description="" />
+				<Step ModuleName="" DeviceType="MFCRampng" DisplayName="MFC H1(sccm)" ControlName="H1.Flow" InputType="NumInput" InputMode=""  Min="0" Max="5000" Description="" />
+				<Step ModuleName="" DeviceType="MFCRampng" DisplayName="MFC J1(sccm)" ControlName="J1.Flow" InputType="NumInput" InputMode="" Min="0" Max="5000" Description="" />
+				<Step ModuleName="" DeviceType="MFCRampng" DisplayName="MFC XN1(sccm)" ControlName="XN1.Flow" InputType="NumInput" InputMode="" Min="0" Max="10000" Description="" />
+			</Group>
+		</Catalog>
+
+		<Catalog DisplayName="MFCAlarm">
+			<Group DisplayName="MFCAlarm">
+				<Step ModuleName="" DeviceType="MFCAlarm" DisplayName="MFC N1(sccm)" ControlName="GasLineN1.Flow" InputType="NumInput" InputMode="" Min="0" Max="10000" Description="" />
+				<Step ModuleName="" DeviceType="MFCAlarm" DisplayName="MFC N2(sccm)" ControlName="GasLineN2.Flow" InputType="NumInput" InputMode="" Min="0" Max="10000" Description="" />
+				<Step ModuleName="" DeviceType="MFCAlarm" DisplayName="MFC N3(sccm)" ControlName="GasLineN3.Flow" InputType="NumInput" InputMode="" Min="0" Max="10000" Description="" />
+				<Step ModuleName="" DeviceType="MFCAlarm" DisplayName="MFC H1(sccm)" ControlName="GasLineH1.Flow" InputType="NumInput" InputMode="" Min="0" Max="100" Description="" />
+				<Step ModuleName="" DeviceType="MFCAlarm" DisplayName="MFC J1(sccm)" ControlName="GasLineJ1.Flow" InputType="NumInput" InputMode="" Min="0" Max="5000" Description="" />
+				<Step ModuleName="" DeviceType="MFCAlarm" DisplayName="MFC XN1(sccm)" ControlName="GasLineXN1.Flow" InputType="NumInput" InputMode="" Min="0" Max="10000" Description="" />
+			</Group>
+		</Catalog>
+
+		<!--###########################################-->
+		<Catalog DisplayName="MFMFlow">
+			<Group DisplayName="MFM">
+				<Step ModuleName="MFM57" DeviceType="MFM" DisplayName="MFM(sccm)" ControlName="MFM57Flow" InputType="NumInput" InputMode=""  Min="0" Max="5000" Description="" />
+			</Group>
+		</Catalog>
+
+		<Catalog DisplayName="MFMAlarm">
+			<Group DisplayName="MFMAlarm">
+				<Step ModuleName="" DeviceType="MFMAlarm" DisplayName="MFC H2(sccm)" ControlName="MfmH2Flow" InputType="NumInput" InputMode="" Min="0" Max="10000" Description="" />
+				<Step ModuleName="" DeviceType="MFMAlarm" DisplayName="MFC O2(sccm)" ControlName="MfmO2Flow" InputType="NumInput" InputMode="" Min="0" Max="10000" Description="" />
+			</Group>
+		</Catalog>
+
+		<!--###########################################-->
+		<Catalog DisplayName="Temperature">
+			<Group DisplayName="Temperature">
+				<Step ModuleName="" DeviceType="Heater" DisplayName="Heater Top (°C)" ControlName="HeaterU" InputType="NumInput" InputMode=""  Min="0" Max="5000" Description="" />
+				<Step ModuleName="" DeviceType="Heater" DisplayName="Heater T/C (°C)" ControlName="HeaterCU" InputType="NumInput" InputMode=""  Min="0" Max="5000" Description="" />
+				<Step ModuleName="" DeviceType="Heater" DisplayName="Heater CNTR (°C)" ControlName="HeaterC" InputType="NumInput" InputMode=""  Min="0" Max="5000" Description="" />
+				<Step ModuleName="" DeviceType="Heater" DisplayName="Heater B/C (°C)" ControlName="HeaterCL" InputType="NumInput" InputMode=""  Min="0" Max="5000" Description="" />
+				<Step ModuleName="" DeviceType="Heater" DisplayName="Heater BTM (°C)" ControlName="HeaterL" InputType="NumInput" InputMode=""  Min="0" Max="5000" Description="" />
+			</Group>
+		</Catalog>
+
+		<!--###########################################-->
+		<Catalog DisplayName="Valve">
+			<Group DisplayName="Valve">
+				<Step ModuleName="" DeviceType="Valve" DisplayName="AV1" ControlName="ValveAV1" InputType="ReadOnlySelection" Description="">
+					<Item DisplayName="Close" ControlName="Close" />
+					<Item DisplayName="Open" ControlName="Open"/>
+				</Step>
+				<Step ModuleName="" DeviceType="Valve" DisplayName="AV2" ControlName="ValveAV2" InputType="ReadOnlySelection" Description="">
+					<Item DisplayName="Close" ControlName="Close" />
+					<Item DisplayName="Open" ControlName="Open"/>
+				</Step>
+				<Step ModuleName="" DeviceType="Valve" DisplayName="AV3" ControlName="ValveAV3" InputType="ReadOnlySelection" Description="">
+					<Item DisplayName="Close" ControlName="Close" />
+					<Item DisplayName="Open" ControlName="Open"/>
+				</Step>
+				<Step ModuleName="" DeviceType="Valve" DisplayName="AV4" ControlName="ValveAV4" InputType="ReadOnlySelection" Description="">
+					<Item DisplayName="Close" ControlName="Close" />
+					<Item DisplayName="Open" ControlName="Open"/>
+				</Step>
+				<Step ModuleName="" DeviceType="Valve" DisplayName="AV5" ControlName="ValveAV5" InputType="ReadOnlySelection" Description="">
+					<Item DisplayName="Close" ControlName="Close" />
+					<Item DisplayName="Open" ControlName="Open"/>
+				</Step>
+				<Step ModuleName="" DeviceType="Valve" DisplayName="AV6" ControlName="ValveAV6" InputType="ReadOnlySelection" Description="">
+					<Item DisplayName="Close" ControlName="Close" />
+					<Item DisplayName="Open" ControlName="Open"/>
+				</Step>
+				<Step ModuleName="" DeviceType="Valve" DisplayName="AV7" ControlName="ValveAV7" InputType="ReadOnlySelection" Description="">
+					<Item DisplayName="Close" ControlName="Close" />
+					<Item DisplayName="Open" ControlName="Open"/>
+				</Step>
+				<Step ModuleName="" DeviceType="Valve" DisplayName="AV8" ControlName="ValveAV8" InputType="ReadOnlySelection" Description="">
+					<Item DisplayName="Close" ControlName="Close" />
+					<Item DisplayName="Open" ControlName="Open"/>
+				</Step>
+				<Step ModuleName="" DeviceType="Valve" DisplayName="AV9" ControlName="ValveAV9" InputType="ReadOnlySelection" Description="">
+					<Item DisplayName="Close" ControlName="Close" />
+					<Item DisplayName="Open" ControlName="Open"/>
+				</Step>
+				<Step ModuleName="" DeviceType="Valve" DisplayName="AV10" ControlName="ValveAV10" InputType="ReadOnlySelection" Description="">
+					<Item DisplayName="Close" ControlName="Close" />
+					<Item DisplayName="Open" ControlName="Open"/>
+				</Step>
+				<Step ModuleName="" DeviceType="Valve" DisplayName="AV11" ControlName="ValveAV11" InputType="ReadOnlySelection" Description="">
+					<Item DisplayName="Close" ControlName="Close" />
+					<Item DisplayName="Open" ControlName="Open"/>
+				</Step>
+				<Step ModuleName="" DeviceType="Valve" DisplayName="AV12" ControlName="ValveAV12" InputType="ReadOnlySelection" Description="">
+					<Item DisplayName="Close" ControlName="Close" />
+					<Item DisplayName="Open" ControlName="Open"/>
+				</Step>
+				<Step ModuleName="" DeviceType="Valve" DisplayName="AV13" ControlName="ValveAV13" InputType="ReadOnlySelection" Description="">
+					<Item DisplayName="Close" ControlName="Close" />
+					<Item DisplayName="Open" ControlName="Open"/>
+				</Step>
+				<Step ModuleName="" DeviceType="Valve" DisplayName="AV14" ControlName="ValveAV14" InputType="ReadOnlySelection" Description="">
+					<Item DisplayName="Close" ControlName="Close" />
+					<Item DisplayName="Open" ControlName="Open"/>
+				</Step>
+				<Step ModuleName="" DeviceType="Valve" DisplayName="AV15" ControlName="ValveAV15" InputType="ReadOnlySelection" Description="">
+					<Item DisplayName="Close" ControlName="Close" />
+					<Item DisplayName="Open" ControlName="Open"/>
+				</Step>
+				<Step ModuleName="" DeviceType="Valve" DisplayName="AV16" ControlName="ValveAV16" InputType="ReadOnlySelection" Description="">
+					<Item DisplayName="Close" ControlName="Close" />
+					<Item DisplayName="Open" ControlName="Open"/>
+				</Step>
+				<Step ModuleName="" DeviceType="Valve" DisplayName="AV17" ControlName="ValveAV17" InputType="ReadOnlySelection" Description="">
+					<Item DisplayName="Close" ControlName="Close" />
+					<Item DisplayName="Open" ControlName="Open"/>
+				</Step>
+				<Step ModuleName="" DeviceType="Valve" DisplayName="AV18" ControlName="ValveAV18" InputType="ReadOnlySelection" Description="">
+					<Item DisplayName="Close" ControlName="Close" />
+					<Item DisplayName="Open" ControlName="Open"/>
+				</Step>
+				<Step ModuleName="" DeviceType="Valve" DisplayName="AV19" ControlName="ValveAV19" InputType="ReadOnlySelection" Description="">
+					<Item DisplayName="Close" ControlName="Close" />
+					<Item DisplayName="Open" ControlName="Open"/>
+				</Step>
+				<Step ModuleName="" DeviceType="Valve" DisplayName="AV20" ControlName="ValveAV20" InputType="ReadOnlySelection" Description="">
+					<Item DisplayName="Close" ControlName="Close" />
+					<Item DisplayName="Open" ControlName="Open"/>
+				</Step>
+				<Step ModuleName="" DeviceType="Valve" DisplayName="AV21" ControlName="ValveAV21" InputType="ReadOnlySelection" Description="">
+					<Item DisplayName="Close" ControlName="Close" />
+					<Item DisplayName="Open" ControlName="Open"/>
+				</Step>
+				<Step ModuleName="" DeviceType="Valve" DisplayName="AV22" ControlName="ValveAV22" InputType="ReadOnlySelection" Description="">
+					<Item DisplayName="Close" ControlName="Close" />
+					<Item DisplayName="Open" ControlName="Open"/>
+				</Step>
+				<Step ModuleName="" DeviceType="Valve" DisplayName="AV23" ControlName="ValveAV23" InputType="ReadOnlySelection" Description="">
+					<Item DisplayName="Close" ControlName="Close" />
+					<Item DisplayName="Open" ControlName="Open"/>
+				</Step>
+				<Step ModuleName="" DeviceType="Valve" DisplayName="AV24" ControlName="ValveAV24" InputType="ReadOnlySelection" Description="">
+					<Item DisplayName="Close" ControlName="Close" />
+					<Item DisplayName="Open" ControlName="Open"/>
+				</Step>
+				<Step ModuleName="" DeviceType="Valve" DisplayName="AV25" ControlName="ValveAV25" InputType="ReadOnlySelection" Description="">
+					<Item DisplayName="Close" ControlName="Close" />
+					<Item DisplayName="Open" ControlName="Open"/>
+				</Step>
+				<Step ModuleName="" DeviceType="Valve" DisplayName="AV26" ControlName="ValveAV26" InputType="ReadOnlySelection" Description="">
+					<Item DisplayName="Close" ControlName="Close" />
+					<Item DisplayName="Open" ControlName="Open"/>
+				</Step>
+				<Step ModuleName="" DeviceType="Valve" DisplayName="AV27" ControlName="ValveAV27" InputType="ReadOnlySelection" Description="">
+					<Item DisplayName="Close" ControlName="Close" />
+					<Item DisplayName="Open" ControlName="Open"/>
+				</Step>
+				<Step ModuleName="" DeviceType="Valve" DisplayName="AV28" ControlName="ValveAV28" InputType="ReadOnlySelection" Description="">
+					<Item DisplayName="Close" ControlName="Close" />
+					<Item DisplayName="Open" ControlName="Open"/>
+				</Step>
+				<Step ModuleName="" DeviceType="Valve" DisplayName="AV29" ControlName="ValveAV29" InputType="ReadOnlySelection" Description="">
+					<Item DisplayName="Close" ControlName="Close" />
+					<Item DisplayName="Open" ControlName="Open"/>
+				</Step>
+				<Step ModuleName="" DeviceType="Valve" DisplayName="AV30" ControlName="ValveAV30" InputType="ReadOnlySelection" Description="">
+					<Item DisplayName="Close" ControlName="Close" />
+					<Item DisplayName="Open" ControlName="Open"/>
+				</Step>
+				<Step ModuleName="" DeviceType="Valve" DisplayName="AV31" ControlName="ValveAV31" InputType="ReadOnlySelection" Description="">
+					<Item DisplayName="Close" ControlName="Close" />
+					<Item DisplayName="Open" ControlName="Open"/>
+				</Step>
+				<Step ModuleName="" DeviceType="Valve" DisplayName="AV32" ControlName="ValveAV32" InputType="ReadOnlySelection" Description="">
+					<Item DisplayName="Close" ControlName="Close" />
+					<Item DisplayName="Open" ControlName="Open"/>
+				</Step>
+				<Step ModuleName="" DeviceType="Valve" DisplayName="AV33" ControlName="ValveAV33" InputType="ReadOnlySelection" Description="">
+					<Item DisplayName="Close" ControlName="Close" />
+					<Item DisplayName="Open" ControlName="Open"/>
+				</Step>
+				<Step ModuleName="" DeviceType="Valve" DisplayName="AV34" ControlName="ValveAV34" InputType="ReadOnlySelection" Description="">
+					<Item DisplayName="Close" ControlName="Close" />
+					<Item DisplayName="Open" ControlName="Open"/>
+				</Step>
+				<Step ModuleName="" DeviceType="Valve" DisplayName="AV35" ControlName="ValveAV35" InputType="ReadOnlySelection" Description="">
+					<Item DisplayName="Close" ControlName="Close" />
+					<Item DisplayName="Open" ControlName="Open"/>
+				</Step>
+				<Step ModuleName="" DeviceType="Valve" DisplayName="AV36" ControlName="ValveAV36" InputType="ReadOnlySelection" Description="">
+					<Item DisplayName="Close" ControlName="Close" />
+					<Item DisplayName="Open" ControlName="Open"/>
+				</Step>
+				<Step ModuleName="" DeviceType="Valve" DisplayName="AV37" ControlName="ValveAV37" InputType="ReadOnlySelection" Description="">
+					<Item DisplayName="Close" ControlName="Close" />
+					<Item DisplayName="Open" ControlName="Open"/>
+				</Step>
+				<Step ModuleName="" DeviceType="Valve" DisplayName="AV38" ControlName="ValveAV38" InputType="ReadOnlySelection" Description="">
+					<Item DisplayName="Close" ControlName="Close" />
+					<Item DisplayName="Open" ControlName="Open"/>
+				</Step>
+				<Step ModuleName="" DeviceType="Valve" DisplayName="AV39" ControlName="ValveAV39" InputType="ReadOnlySelection" Description="">
+					<Item DisplayName="Close" ControlName="Close" />
+					<Item DisplayName="Open" ControlName="Open"/>
+				</Step>
+				<Step ModuleName="" DeviceType="Valve" DisplayName="AV40" ControlName="ValveAV40" InputType="ReadOnlySelection" Description="">
+					<Item DisplayName="Close" ControlName="Close" />
+					<Item DisplayName="Open" ControlName="Open"/>
+				</Step>
+				<Step ModuleName="" DeviceType="Valve" DisplayName="AV41" ControlName="ValveAV41" InputType="ReadOnlySelection" Description="">
+					<Item DisplayName="Close" ControlName="Close" />
+					<Item DisplayName="Open" ControlName="Open"/>
+				</Step>
+				<Step ModuleName="" DeviceType="Valve" DisplayName="AV42" ControlName="ValveAV42" InputType="ReadOnlySelection" Description="">
+					<Item DisplayName="Close" ControlName="Close" />
+					<Item DisplayName="Open" ControlName="Open"/>
+				</Step>
+				<Step ModuleName="" DeviceType="Valve" DisplayName="AV43" ControlName="ValveAV43" InputType="ReadOnlySelection" Description="">
+					<Item DisplayName="Close" ControlName="Close" />
+					<Item DisplayName="Open" ControlName="Open"/>
+				</Step>
+				<Step ModuleName="" DeviceType="Valve" DisplayName="AV44" ControlName="ValveAV44" InputType="ReadOnlySelection" Description="">
+					<Item DisplayName="Close" ControlName="Close" />
+					<Item DisplayName="Open" ControlName="Open"/>
+				</Step>
+				<Step ModuleName="" DeviceType="Valve" DisplayName="AV45" ControlName="ValveAV45" InputType="ReadOnlySelection" Description="">
+					<Item DisplayName="Close" ControlName="Close" />
+					<Item DisplayName="Open" ControlName="Open"/>
+				</Step>
+				<Step ModuleName="" DeviceType="Valve" DisplayName="AV46" ControlName="ValveAV46" InputType="ReadOnlySelection" Description="">
+					<Item DisplayName="Close" ControlName="Close" />
+					<Item DisplayName="Open" ControlName="Open"/>
+				</Step>
+				<Step ModuleName="" DeviceType="Valve" DisplayName="AV47" ControlName="ValveAV47" InputType="ReadOnlySelection" Description="">
+					<Item DisplayName="Close" ControlName="Close" />
+					<Item DisplayName="Open" ControlName="Open"/>
+				</Step>
+				<Step ModuleName="" DeviceType="Valve" DisplayName="AV48" ControlName="ValveAV48" InputType="ReadOnlySelection" Description="">
+					<Item DisplayName="Close" ControlName="Close" />
+					<Item DisplayName="Open" ControlName="Open"/>
+				</Step>
+				<Step ModuleName="" DeviceType="Valve" DisplayName="AV49" ControlName="ValveAV49" InputType="ReadOnlySelection" Description="">
+					<Item DisplayName="Close" ControlName="Close" />
+					<Item DisplayName="Open" ControlName="Open"/>
+				</Step>
+				<Step ModuleName="" DeviceType="Valve" DisplayName="AV50" ControlName="ValveAV50" InputType="ReadOnlySelection" Description="">
+					<Item DisplayName="Close" ControlName="Close" />
+					<Item DisplayName="Open" ControlName="Open"/>
+				</Step>
+				<Step ModuleName="" DeviceType="Valve" DisplayName="AV51" ControlName="ValveAV51" InputType="ReadOnlySelection" Description="">
+					<Item DisplayName="Close" ControlName="Close" />
+					<Item DisplayName="Open" ControlName="Open"/>
+				</Step>
+				<Step ModuleName="" DeviceType="Valve" DisplayName="AV52" ControlName="ValveAV52" InputType="ReadOnlySelection" Description="">
+					<Item DisplayName="Close" ControlName="Close" />
+					<Item DisplayName="Open" ControlName="Open"/>
+				</Step>
+				<Step ModuleName="" DeviceType="Valve" DisplayName="AV53" ControlName="ValveAV53" InputType="ReadOnlySelection" Description="">
+					<Item DisplayName="Close" ControlName="Close" />
+					<Item DisplayName="Open" ControlName="Open"/>
+				</Step>
+				<Step ModuleName="" DeviceType="Valve" DisplayName="AV55" ControlName="ValveAV55" InputType="ReadOnlySelection" Description="">
+					<Item DisplayName="Close" ControlName="Close" />
+					<Item DisplayName="Open" ControlName="Open"/>
+				</Step>
+				<Step ModuleName="" DeviceType="Valve" DisplayName="AV60" ControlName="ValveAV60" InputType="ReadOnlySelection" Description="">
+					<Item DisplayName="Close" ControlName="Close" />
+					<Item DisplayName="Open" ControlName="Open"/>
+				</Step>
+				<Step ModuleName="" DeviceType="Valve" DisplayName="AV68" ControlName="ValveAV68" InputType="ReadOnlySelection" Description="">
+					<Item DisplayName="Close" ControlName="Close" />
+					<Item DisplayName="Open" ControlName="Open"/>
+				</Step>
+				<Step ModuleName="" DeviceType="Valve" DisplayName="AV71" ControlName="ValveAV71" InputType="ReadOnlySelection" Description="">
+					<Item DisplayName="Close" ControlName="Close" />
+					<Item DisplayName="Open" ControlName="Open"/>
+				</Step>
+				<Step ModuleName="" DeviceType="Valve" DisplayName="AV72" ControlName="ValveAV72" InputType="ReadOnlySelection" Description="">
+					<Item DisplayName="Close" ControlName="Close" />
+					<Item DisplayName="Open" ControlName="Open"/>
+				</Step>
+				<Step ModuleName="" DeviceType="Valve" DisplayName="AV73" ControlName="ValveAV73" InputType="ReadOnlySelection" Description="">
+					<Item DisplayName="Close" ControlName="Close" />
+					<Item DisplayName="Open" ControlName="Open"/>
+				</Step>
+				<Step ModuleName="" DeviceType="Valve" DisplayName="AV74" ControlName="ValveAV74" InputType="ReadOnlySelection" Description="">
+					<Item DisplayName="Close" ControlName="Close" />
+					<Item DisplayName="Open" ControlName="Open"/>
+				</Step>
+				<Step ModuleName="" DeviceType="Valve" DisplayName="AV75" ControlName="ValveAV75" InputType="ReadOnlySelection" Description="">
+					<Item DisplayName="Close" ControlName="Close" />
+					<Item DisplayName="Open" ControlName="Open"/>
+				</Step>
+				<Step ModuleName="" DeviceType="Valve" DisplayName="AV77" ControlName="ValveAV77" InputType="ReadOnlySelection" Description="">
+					<Item DisplayName="Close" ControlName="Close" />
+					<Item DisplayName="Open" ControlName="Open"/>
+				</Step>
+				<Step ModuleName="" DeviceType="Valve" DisplayName="AV81" ControlName="ValveAV81" InputType="ReadOnlySelection" Description="">
+					<Item DisplayName="Close" ControlName="Close" />
+					<Item DisplayName="Open" ControlName="Open"/>
+				</Step>
+				<Step ModuleName="" DeviceType="Valve" DisplayName="AV82" ControlName="ValveAV82" InputType="ReadOnlySelection" Description="">
+					<Item DisplayName="Close" ControlName="Close" />
+					<Item DisplayName="Open" ControlName="Open"/>
+				</Step>
+				<Step ModuleName="" DeviceType="Valve" DisplayName="AV83" ControlName="ValveAV83" InputType="ReadOnlySelection" Description="">
+					<Item DisplayName="Close" ControlName="Close" />
+					<Item DisplayName="Open" ControlName="Open"/>
+				</Step>
+				<Step ModuleName="" DeviceType="Valve" DisplayName="DPR" ControlName="ValveAV91" InputType="ReadOnlySelection" Description="">
+					<Item DisplayName="Close" ControlName="Close" />
+					<Item DisplayName="Open" ControlName="Open" />
+				</Step>
+				<!--<Step ModuleName="" DeviceType="Valve" DisplayName="AGV" ControlName="AGVPump" InputType="ReadOnlySelection" Description="">
+					<Item DisplayName="Close" ControlName="Close" />
+					<Item DisplayName="Open" ControlName="Open" />
+				</Step>
+				<Step ModuleName="" DeviceType="Valve" DisplayName="MBP" ControlName="BothPump" InputType="ReadOnlySelection" Description="">
+					<Item DisplayName="Close" ControlName="Close" />
+					<Item DisplayName="Open" ControlName="Open" />
+				</Step>
+				<Step ModuleName="" DeviceType="Valve" DisplayName="DP" ControlName="AUCPump" InputType="ReadOnlySelection" Description="">
+					<Item DisplayName="Close" ControlName="Close" />
+					<Item DisplayName="Open" ControlName="Open" />
+				</Step>
+				<Step ModuleName="" DeviceType="Valve" DisplayName="BWR" ControlName="ValveBlowerPowerOn" InputType="ReadOnlySelection" Description="">
+					<Item DisplayName="Close" ControlName="Close" />
+					<Item DisplayName="Open" ControlName="Open" />
+				</Step>
+				<Step ModuleName="" DeviceType="Valve" DisplayName="F2" ControlName="F2Cln" InputType="ReadOnlySelection" Description="">
+					<Item DisplayName="Close" ControlName="Close" />
+					<Item DisplayName="Open" ControlName="Open" />
+				</Step>
+				<Step ModuleName="" DeviceType="Valve" DisplayName="HF" ControlName="HFCln" InputType="ReadOnlySelection" Description="">
+					<Item DisplayName="Close" ControlName="Close" />
+					<Item DisplayName="Open" ControlName="Open" />
+				</Step>
+				<Step ModuleName="" DeviceType="Valve" DisplayName="HTR1" ControlName="HTR1" InputType="ReadOnlySelection" Description="">
+					<Item DisplayName="Close" ControlName="Close" />
+					<Item DisplayName="Open" ControlName="Open" />
+				</Step>
+				<Step ModuleName="" DeviceType="Valve" DisplayName="HTR2" ControlName="HTR2" InputType="ReadOnlySelection" Description="">
+					<Item DisplayName="Close" ControlName="Close" />
+					<Item DisplayName="Open" ControlName="Open" />
+				</Step>-->
+
+
+				<Step ModuleName="" DeviceType="Valve" DisplayName="AGVPump" ControlName="AGV" InputType="ReadOnlySelection" Description="">
+					<Item DisplayName="Close" ControlName="Close" />
+					<Item DisplayName="Open" ControlName="Open" />
+				</Step>
+				<Step ModuleName="" DeviceType="Valve" DisplayName="BothPump" ControlName="MBP" InputType="ReadOnlySelection" Description="">
+					<Item DisplayName="Close" ControlName="Close" />
+					<Item DisplayName="Open" ControlName="Open" />
+				</Step>
+				<Step ModuleName="" DeviceType="Valve" DisplayName="AUCPump" ControlName="DP" InputType="ReadOnlySelection" Description="">
+					<Item DisplayName="Close" ControlName="Close" />
+					<Item DisplayName="Open" ControlName="Open" />
+				</Step>
+				<Step ModuleName="" DeviceType="Valve" DisplayName="ValveBWR" ControlName="BWR" InputType="ReadOnlySelection" Description="">
+					<Item DisplayName="Close" ControlName="Close" />
+					<Item DisplayName="Open" ControlName="Open" />
+				</Step>
+				<Step ModuleName="" DeviceType="Valve" DisplayName="ValveCEXH" ControlName="CEXH" InputType="ReadOnlySelection" Description="">
+					<Item DisplayName="Close" ControlName="Close" />
+					<Item DisplayName="Open" ControlName="Open" />
+				</Step>
+				<Step ModuleName="" DeviceType="Valve" DisplayName="DEPO" ControlName="DEPO" InputType="ReadOnlySelection" Description="">
+					<Item DisplayName="Close" ControlName="Close" />
+					<Item DisplayName="Open" ControlName="Open" />
+				</Step>
+				<Step ModuleName="" DeviceType="Valve" DisplayName="F2Cln" ControlName="F2Cln" InputType="ReadOnlySelection" Description="">
+					<Item DisplayName="Close" ControlName="Close" />
+					<Item DisplayName="Open" ControlName="Open" />
+				</Step>
+				<Step ModuleName="" DeviceType="Valve" DisplayName="HFCln" ControlName="HFCln" InputType="ReadOnlySelection" Description="">
+					<Item DisplayName="Close" ControlName="Close" />
+					<Item DisplayName="Open" ControlName="Open" />
+				</Step>
+				<Step ModuleName="" DeviceType="Valve" DisplayName="HTR1" ControlName="HTR1" InputType="ReadOnlySelection" Description="">
+					<Item DisplayName="Close" ControlName="Close" />
+					<Item DisplayName="Open" ControlName="Open" />
+				</Step>
+				<Step ModuleName="" DeviceType="Valve" DisplayName="HTR2" ControlName="HTR2" InputType="ReadOnlySelection" Description="">
+					<Item DisplayName="Close" ControlName="Close" />
+					<Item DisplayName="Open" ControlName="Open" />
+				</Step>
+				<Step ModuleName="" DeviceType="Valve" DisplayName="HTR3" ControlName="HTR3" InputType="ReadOnlySelection" Description="">
+					<Item DisplayName="Close" ControlName="Close" />
+					<Item DisplayName="Open" ControlName="Open" />
+				</Step>
+			</Group>
+		</Catalog>
+
+		<!--*************************************************************-->
+
+		<Catalog DisplayName="AUX">
+			<Group DisplayName="AUX">
+				<Step ModuleName="" ControlName="1" DeviceType="AUX" DisplayName="" InputType="DoubleInput" InputMode=""  Min="0" Max="5000" Description="" />
+				<Step ModuleName="" ControlName="2" DeviceType="AUX" DisplayName="" InputType="DoubleInput" InputMode=""  Min="0" Max="5000" Description="" />
+				<Step ModuleName="" ControlName="3" DeviceType="AUX" DisplayName="" InputType="DoubleInput" InputMode=""  Min="0" Max="5000" Description="" />
+				<Step ModuleName="" ControlName="4" DeviceType="AUX" DisplayName="" InputType="DoubleInput" InputMode=""  Min="0" Max="5000" Description="" />
+				<Step ModuleName="" ControlName="5" DeviceType="AUX" DisplayName="" InputType="DoubleInput" InputMode=""  Min="0" Max="5000" Description="" />
+				<Step ModuleName="" ControlName="6" DeviceType="AUX" DisplayName="" InputType="DoubleInput" InputMode=""  Min="0" Max="5000" Description="" />
+				<Step ModuleName="" ControlName="7" DeviceType="AUX" DisplayName="" InputType="DoubleInput" InputMode=""  Min="0" Max="5000" Description="" />
+				<Step ModuleName="" ControlName="8" DeviceType="AUX" DisplayName="" InputType="DoubleInput" InputMode=""  Min="0" Max="5000" Description="" />
+				<Step ModuleName="" ControlName="9" DeviceType="AUX" DisplayName="" InputType="DoubleInput" InputMode=""  Min="0" Max="5000" Description="" />
+				<Step ModuleName="" ControlName="10" DeviceType="AUX" DisplayName="" InputType="DoubleInput" InputMode=""  Min="0" Max="5000" Description="" />
+				<Step ModuleName="" ControlName="11" DeviceType="AUX" DisplayName="" InputType="DoubleInput" InputMode=""  Min="0" Max="5000" Description="" />
+				<Step ModuleName="" ControlName="12" DeviceType="AUX" DisplayName="" InputType="DoubleInput" InputMode=""  Min="0" Max="5000" Description="" />
+				<Step ModuleName="" ControlName="13" DeviceType="AUX" DisplayName="" InputType="DoubleInput" InputMode=""  Min="0" Max="5000" Description="" />
+				<Step ModuleName="" ControlName="14" DeviceType="AUX" DisplayName="" InputType="DoubleInput" InputMode=""  Min="0" Max="5000" Description="" />
+				<Step ModuleName="" ControlName="15" DeviceType="AUX" DisplayName="" InputType="DoubleInput" InputMode=""  Min="0" Max="5000" Description="" />
+				<Step ModuleName="" ControlName="16" DeviceType="AUX" DisplayName="" InputType="DoubleInput" InputMode=""  Min="0" Max="5000" Description="" />
+				<Step ModuleName="" ControlName="17" DeviceType="AUX" DisplayName="" InputType="DoubleInput" InputMode=""  Min="0" Max="5000" Description="" />
+				<Step ModuleName="" ControlName="18" DeviceType="AUX" DisplayName="" InputType="DoubleInput" InputMode=""  Min="0" Max="5000" Description="" />
+				<Step ModuleName="" ControlName="19" DeviceType="AUX" DisplayName="" InputType="DoubleInput" InputMode=""  Min="0" Max="5000" Description="" />
+				<Step ModuleName="" ControlName="20" DeviceType="AUX" DisplayName="" InputType="DoubleInput" InputMode=""  Min="0" Max="5000" Description="" />
+				<Step ModuleName="" ControlName="21" DeviceType="AUX" DisplayName="" InputType="DoubleInput" InputMode=""  Min="0" Max="5000" Description="" />
+				<Step ModuleName="" ControlName="22" DeviceType="AUX" DisplayName="" InputType="DoubleInput" InputMode=""  Min="0" Max="5000" Description="" />
+				<Step ModuleName="" ControlName="23" DeviceType="AUX" DisplayName="" InputType="DoubleInput" InputMode=""  Min="0" Max="5000" Description="" />
+				<Step ModuleName="" ControlName="24" DeviceType="AUX" DisplayName="" InputType="DoubleInput" InputMode=""  Min="0" Max="5000" Description="" />
+				<Step ModuleName="" ControlName="25" DeviceType="AUX" DisplayName="" InputType="DoubleInput" InputMode=""  Min="0" Max="5000" Description="" />
+				<Step ModuleName="" ControlName="26" DeviceType="AUX" DisplayName="" InputType="DoubleInput" InputMode=""  Min="0" Max="5000" Description="" />
+				<Step ModuleName="" ControlName="27" DeviceType="AUX" DisplayName="" InputType="DoubleInput" InputMode=""  Min="0" Max="5000" Description="" />
+				<Step ModuleName="" ControlName="28" DeviceType="AUX" DisplayName="" InputType="DoubleInput" InputMode=""  Min="0" Max="5000" Description="" />
+				<Step ModuleName="" ControlName="29" DeviceType="AUX" DisplayName="" InputType="DoubleInput" InputMode=""  Min="0" Max="5000" Description="" />
+				<Step ModuleName="" ControlName="30" DeviceType="AUX" DisplayName="" InputType="DoubleInput" InputMode=""  Min="0" Max="5000" Description="" />
+				<Step ModuleName="" ControlName="31" DeviceType="AUX" DisplayName="" InputType="DoubleInput" InputMode=""  Min="0" Max="5000" Description="" />
+				<Step ModuleName="" ControlName="32" DeviceType="AUX" DisplayName="" InputType="DoubleInput" InputMode=""  Min="0" Max="5000" Description="" />
+				<Step ModuleName="" ControlName="33" DeviceType="AUX" DisplayName="" InputType="DoubleInput" InputMode=""  Min="0" Max="5000" Description="" />
+				<Step ModuleName="" ControlName="34" DeviceType="AUX" DisplayName="" InputType="DoubleInput" InputMode=""  Min="0" Max="5000" Description="" />
+				<Step ModuleName="" ControlName="35" DeviceType="AUX" DisplayName="" InputType="DoubleInput" InputMode=""  Min="0" Max="5000" Description="" />
+				<Step ModuleName="" ControlName="36" DeviceType="AUX" DisplayName="" InputType="DoubleInput" InputMode=""  Min="0" Max="5000" Description="" />
+				<Step ModuleName="" ControlName="37" DeviceType="AUX" DisplayName="" InputType="DoubleInput" InputMode=""  Min="0" Max="5000" Description="" />
+				<Step ModuleName="" ControlName="38" DeviceType="AUX" DisplayName="" InputType="DoubleInput" InputMode=""  Min="0" Max="5000" Description="" />
+				<Step ModuleName="" ControlName="39" DeviceType="AUX" DisplayName="" InputType="DoubleInput" InputMode=""  Min="0" Max="5000" Description="" />
+				<Step ModuleName="" ControlName="40" DeviceType="AUX" DisplayName="" InputType="DoubleInput" InputMode=""  Min="0" Max="5000" Description="" />
+				<Step ModuleName="" ControlName="41" DeviceType="AUX" DisplayName="" InputType="DoubleInput" InputMode=""  Min="0" Max="5000" Description="" />
+				<Step ModuleName="" ControlName="42" DeviceType="AUX" DisplayName="" InputType="DoubleInput" InputMode=""  Min="0" Max="5000" Description="" />
+				<Step ModuleName="" ControlName="43" DeviceType="AUX" DisplayName="" InputType="DoubleInput" InputMode=""  Min="0" Max="5000" Description="" />
+				<Step ModuleName="" ControlName="44" DeviceType="AUX" DisplayName="" InputType="DoubleInput" InputMode=""  Min="0" Max="5000" Description="" />
+				<Step ModuleName="" ControlName="45" DeviceType="AUX" DisplayName="" InputType="DoubleInput" InputMode=""  Min="0" Max="5000" Description="" />
+				<Step ModuleName="" ControlName="46" DeviceType="AUX" DisplayName="" InputType="DoubleInput" InputMode=""  Min="0" Max="5000" Description="" />
+				<Step ModuleName="" ControlName="47" DeviceType="AUX" DisplayName="" InputType="DoubleInput" InputMode=""  Min="0" Max="5000" Description="" />
+				<Step ModuleName="" ControlName="48" DeviceType="AUX" DisplayName="" InputType="DoubleInput" InputMode=""  Min="0" Max="5000" Description="" />
+				<Step ModuleName="" ControlName="49" DeviceType="AUX" DisplayName="" InputType="DoubleInput" InputMode=""  Min="0" Max="5000" Description="" />
+				<Step ModuleName="" ControlName="50" DeviceType="AUX" DisplayName="" InputType="DoubleInput" InputMode=""  Min="0" Max="5000" Description="" />
+				<Step ModuleName="" ControlName="51" DeviceType="AUX" DisplayName="" InputType="DoubleInput" InputMode=""  Min="0" Max="5000" Description="" />
+				<Step ModuleName="" ControlName="52" DeviceType="AUX" DisplayName="" InputType="DoubleInput" InputMode=""  Min="0" Max="5000" Description="" />
+				<Step ModuleName="" ControlName="53" DeviceType="AUX" DisplayName="" InputType="DoubleInput" InputMode=""  Min="0" Max="5000" Description="" />
+				<Step ModuleName="" ControlName="54" DeviceType="AUX" DisplayName="" InputType="DoubleInput" InputMode=""  Min="0" Max="5000" Description="" />
+				<Step ModuleName="" ControlName="55" DeviceType="AUX" DisplayName="" InputType="DoubleInput" InputMode=""  Min="0" Max="5000" Description="" />
+				<Step ModuleName="" ControlName="56" DeviceType="AUX" DisplayName="" InputType="DoubleInput" InputMode=""  Min="0" Max="5000" Description="" />
+				<Step ModuleName="" ControlName="57" DeviceType="AUX" DisplayName="" InputType="DoubleInput" InputMode=""  Min="0" Max="5000" Description="" />
+				<Step ModuleName="" ControlName="58" DeviceType="AUX" DisplayName="" InputType="DoubleInput" InputMode=""  Min="0" Max="5000" Description="" />
+				<Step ModuleName="" ControlName="59" DeviceType="AUX" DisplayName="" InputType="DoubleInput" InputMode=""  Min="0" Max="5000" Description="" />
+				<Step ModuleName="" ControlName="60" DeviceType="AUX" DisplayName="" InputType="DoubleInput" InputMode=""  Min="0" Max="5000" Description="" />
+				<Step ModuleName="" ControlName="61" DeviceType="AUX" DisplayName="" InputType="DoubleInput" InputMode=""  Min="0" Max="5000" Description="" />
+				<Step ModuleName="" ControlName="62" DeviceType="AUX" DisplayName="" InputType="DoubleInput" InputMode=""  Min="0" Max="5000" Description="" />
+				<Step ModuleName="" ControlName="63" DeviceType="AUX" DisplayName="" InputType="DoubleInput" InputMode=""  Min="0" Max="5000" Description="" />
+				<Step ModuleName="" ControlName="64" DeviceType="AUX" DisplayName="" InputType="DoubleInput" InputMode=""  Min="0" Max="5000" Description="" />
+				<Step ModuleName="" ControlName="65" DeviceType="AUX" DisplayName="" InputType="DoubleInput" InputMode=""  Min="0" Max="5000" Description="" />
+				<Step ModuleName="" ControlName="66" DeviceType="AUX" DisplayName="" InputType="DoubleInput" InputMode=""  Min="0" Max="5000" Description="" />
+				<Step ModuleName="" ControlName="67" DeviceType="AUX" DisplayName="" InputType="DoubleInput" InputMode=""  Min="0" Max="5000" Description="" />
+				<Step ModuleName="" ControlName="68" DeviceType="AUX" DisplayName="" InputType="DoubleInput" InputMode=""  Min="0" Max="5000" Description="" />
+				<Step ModuleName="" ControlName="69" DeviceType="AUX" DisplayName="" InputType="DoubleInput" InputMode=""  Min="0" Max="5000" Description="" />
+				<Step ModuleName="" ControlName="70" DeviceType="AUX" DisplayName="" InputType="DoubleInput" InputMode=""  Min="0" Max="5000" Description="" />
+				<Step ModuleName="" ControlName="71" DeviceType="AUX" DisplayName="" InputType="DoubleInput" InputMode=""  Min="0" Max="5000" Description="" />
+				<Step ModuleName="" ControlName="72" DeviceType="AUX" DisplayName="" InputType="DoubleInput" InputMode=""  Min="0" Max="5000" Description="" />
+				<Step ModuleName="" ControlName="73" DeviceType="AUX" DisplayName="" InputType="DoubleInput" InputMode=""  Min="0" Max="5000" Description="" />
+				<Step ModuleName="" ControlName="74" DeviceType="AUX" DisplayName="" InputType="DoubleInput" InputMode=""  Min="0" Max="5000" Description="" />
+				<Step ModuleName="" ControlName="75" DeviceType="AUX" DisplayName="" InputType="DoubleInput" InputMode=""  Min="0" Max="5000" Description="" />
+				<Step ModuleName="" ControlName="76" DeviceType="AUX" DisplayName="" InputType="DoubleInput" InputMode=""  Min="0" Max="5000" Description="" />
+				<Step ModuleName="" ControlName="77" DeviceType="AUX" DisplayName="" InputType="DoubleInput" InputMode=""  Min="0" Max="5000" Description="" />
+			</Group>
+		</Catalog>
+
+		<!--*************************************************************-->
+		<ProcessConfig DisplayName="ProcessConfig">
+			<Configs DisplayName="Process Config">
+				<Config Default="0" ControlName="RecipeTime" DisplayName="Recipe Time(s)" InputType="DoubleInput"  EnableConfig="true" EnableTolerance="false" />
+				<Config Default="0" ControlName="ProcessPurgeCount" DisplayName="Purge Count" Max="100" Min="0" InputType="DoubleInput" />
+			</Configs>
+		</ProcessConfig>
+
+		<VariableParameterConfig DisplayName="VariableParameterConfig">
+			<Configs DisplayName="Variable Parameter">
+				<Config Default="" ControlName="StepTime" DisplayName="Step Time" InputType="TextInput" />
+				<Config Default="" ControlName="Temperature" DisplayName="Temperature" InputType="TextInput" />
+				<Config Default="" ControlName="LoopFrequency" DisplayName="Loop Frequency" InputType="TextInput" />
+				<Config Default="" ControlName="SubRecipeLoopFrequency" DisplayName="SubRecipe Loop Frequency" InputType="TextInput" />
+				<Config Default="" ControlName="Thickness" DisplayName="Thickness" InputType="TextInput" />
+				<Config Default="" ControlName="MFC" DisplayName="MFC" InputType="TextInput" />
+				<Config Default="" ControlName="BoatElevator" DisplayName="Boat Elevator" InputType="TextInput" />
+				<Config Default="" ControlName="BoatRotation" DisplayName="Boat Rotation" InputType="TextInput" />
+				<Config Default="" ControlName="PressureValveAngle" DisplayName="Pressure Valve Angle" InputType="TextInput" />
+				<Config Default="" ControlName="PressureControl1" DisplayName="Pressure Control1" InputType="TextInput" />
+				<Config Default="" ControlName="PressureControl2" DisplayName="Pressure Control2" InputType="TextInput" />
+				<Config Default="" ControlName="SlowVAC" DisplayName="Slow VAC" InputType="TextInput" />
+				<Config Default="" ControlName="BurnTemperature" DisplayName="Burn temperature" InputType="TextInput" />
+			</Configs>
+		</VariableParameterConfig>
+
+	</TableRecipeFormat>
+
+	<TableRecipeSchema>
+		<xs:schema attributeFormDefault="unqualified" elementFormDefault="qualified" xmlns:xs="http://www.w3.org/2001/XMLSchema">
+			<xs:simpleType name="processType">
+				<xs:restriction base="xs:string">
+					<xs:enumeration value="Process" />
+					<xs:enumeration value="Clean" />
+				</xs:restriction>
+			</xs:simpleType>
+			<xs:simpleType name="booleanType">
+				<xs:restriction base="xs:string">
+					<xs:enumeration value="0" />
+					<xs:enumeration value="1" />
+					<xs:enumeration value="False" />
+					<xs:enumeration value="True" />
+					<xs:enumeration value="false" />
+					<xs:enumeration value="true" />
+				</xs:restriction>
+			</xs:simpleType>
+			<xs:element name="TableRecipeData">
+				<xs:complexType>
+					<xs:sequence>
+						<xs:element maxOccurs="unbounded" name="Step">
+							<xs:complexType>
+								<xs:sequence>
+
+									<xs:element name="Mfc">
+										<xs:complexType>
+											<xs:attribute name="Flow.Gas1" type="xs:double" use="optional" />
+											<xs:attribute name="Flow.Gas2" type="xs:double" use="optional" />
+											<xs:attribute name="Flow.Gas3" type="xs:double" use="optional" />
+											<xs:attribute name="Flow.Gas4" type="xs:double" use="optional" />
+										</xs:complexType>
+									</xs:element>
+
+								</xs:sequence>
+								<xs:attribute name="StepNo" type="xs:string" use="required" />
+								<xs:attribute name="Name" type="xs:string" use="required" />
+								<xs:attribute name="Loop" type="xs:string" use="required" />
+								<xs:attribute name="Type" type="xs:string" use="required" />
+								<xs:attribute name="StepTime" type="xs:time" use="optional" />
+							</xs:complexType>
+						</xs:element>
+					</xs:sequence>
+					<xs:attribute name="RecipeChamberType" type="xs:string" fixed="Furnace" use="required" />
+					<xs:attribute name="RecipeProcessType" type="xs:string" use="required" />
+					<xs:attribute name="RecipeVersion" type="xs:string" fixed="1.0" use="required" />
+					<xs:attribute name="CreatedBy" type="xs:string" use="required" />
+					<xs:attribute name="CreationTime" type="xs:dateTime" use="required" />
+					<xs:attribute name="LastRevisedBy" type="xs:string" use="required" />
+					<xs:attribute name="LastRevisionTime" type="xs:dateTime" use="required" />
+					<xs:attribute name="Description" type="xs:string" use="required" />
+				</xs:complexType>
+			</xs:element>
+		</xs:schema>
+	</TableRecipeSchema>
+</Aitex>

+ 1 - 1
Branch/NTP02/Furnace/FurnaceRT/Devices/IoHeater.cs

@@ -451,7 +451,7 @@ namespace FurnaceRT.Devices
                 return true;
             });
 
-            _doEnableIn.SetValue(true, out _);
+            _doEnableIn?.SetValue(true, out _);
             SetCorrectParameters(SC.GetStringValue("PM1.TempCorrection"));
 
             return base.Initialize();

+ 120 - 120
Branch/NTP02/Furnace/FurnaceRT/Equipments/PMs/PMModuleAlarmDefine.cs

@@ -265,135 +265,135 @@ namespace FurnaceRT.Equipments.PMs
                 Category = "TubeAlarm",
             }, () => { ResetRecipeExecutionError(); return true; });
 
-            HeaterUToleranceWarning = SubscribeAlarm(new AlarmEventItem()
-            {
-                EventEnum = $"{Name}.HeaterUToleranceWarning",
-                Description = $"{Name} heaterU tolerance warning ",
-                Solution = "No information available. Press[Clear] to delete alarm message.",
-                Explaination = "No information available.",
-                AutoRecovery = false,
-                Level = EventLevel.Warning,
-                Action = EventAction.Clear,
-                Category = "TubeAlarm",
-            }, () => {return true; });
-            HeaterU.AlarmToleranceWarning = HeaterUToleranceWarning;
+            //HeaterUToleranceWarning = SubscribeAlarm(new AlarmEventItem()
+            //{
+            //    EventEnum = $"{Name}.HeaterUToleranceWarning",
+            //    Description = $"{Name} heaterU tolerance warning ",
+            //    Solution = "No information available. Press[Clear] to delete alarm message.",
+            //    Explaination = "No information available.",
+            //    AutoRecovery = false,
+            //    Level = EventLevel.Warning,
+            //    Action = EventAction.Clear,
+            //    Category = "TubeAlarm",
+            //}, () => {return true; });
+            //HeaterU.AlarmToleranceWarning = HeaterUToleranceWarning;
 
-            HeaterUToleranceAlarm = SubscribeAlarm(new AlarmEventItem()
-            {
-                EventEnum = $"{Name}.HeaterUToleranceAlarm",
-                Description = $"{Name} heaterU tolerance alarm ",
-                Solution = "No information available. Press[Clear] to delete alarm message.",
-                Explaination = "No information available.",
-                AutoRecovery = false,
-                Level = EventLevel.Alarm,
-                Action = EventAction.Clear,
-                Category = "TubeAlarm",
-            }, () => {return true; });
-            HeaterU.AlarmToleranceAlarm = HeaterUToleranceAlarm;
+            //HeaterUToleranceAlarm = SubscribeAlarm(new AlarmEventItem()
+            //{
+            //    EventEnum = $"{Name}.HeaterUToleranceAlarm",
+            //    Description = $"{Name} heaterU tolerance alarm ",
+            //    Solution = "No information available. Press[Clear] to delete alarm message.",
+            //    Explaination = "No information available.",
+            //    AutoRecovery = false,
+            //    Level = EventLevel.Alarm,
+            //    Action = EventAction.Clear,
+            //    Category = "TubeAlarm",
+            //}, () => {return true; });
+            //HeaterU.AlarmToleranceAlarm = HeaterUToleranceAlarm;
 
-            HeaterCUToleranceWarning = SubscribeAlarm(new AlarmEventItem()
-            {
-                EventEnum = $"{Name}.HeaterCUToleranceWarning",
-                Description = $"{Name} heaterCU tolerance warning ",
-                Solution = "No information available. Press[Clear] to delete alarm message.",
-                Explaination = "No information available.",
-                AutoRecovery = false,
-                Level = EventLevel.Warning,
-                Action = EventAction.Clear,
-                Category = "TubeAlarm",
-            }, () => {return true; });
-            HeaterCU.AlarmToleranceWarning = HeaterCUToleranceWarning;
+            //HeaterCUToleranceWarning = SubscribeAlarm(new AlarmEventItem()
+            //{
+            //    EventEnum = $"{Name}.HeaterCUToleranceWarning",
+            //    Description = $"{Name} heaterCU tolerance warning ",
+            //    Solution = "No information available. Press[Clear] to delete alarm message.",
+            //    Explaination = "No information available.",
+            //    AutoRecovery = false,
+            //    Level = EventLevel.Warning,
+            //    Action = EventAction.Clear,
+            //    Category = "TubeAlarm",
+            //}, () => {return true; });
+            //HeaterCU.AlarmToleranceWarning = HeaterCUToleranceWarning;
 
-            HeaterCUToleranceAlarm = SubscribeAlarm(new AlarmEventItem()
-            {
-                EventEnum = $"{Name}.HeaterCUToleranceAlarm",
-                Description = $"{Name} heaterCU tolerance alarm ",
-                Solution = "No information available. Press[Clear] to delete alarm message.",
-                Explaination = "No information available.",
-                AutoRecovery = false,
-                Level = EventLevel.Alarm,
-                Action = EventAction.Clear,
-                Category = "TubeAlarm",
-            }, () => {return true; });
-            HeaterCU.AlarmToleranceAlarm = HeaterCUToleranceAlarm;
+            //HeaterCUToleranceAlarm = SubscribeAlarm(new AlarmEventItem()
+            //{
+            //    EventEnum = $"{Name}.HeaterCUToleranceAlarm",
+            //    Description = $"{Name} heaterCU tolerance alarm ",
+            //    Solution = "No information available. Press[Clear] to delete alarm message.",
+            //    Explaination = "No information available.",
+            //    AutoRecovery = false,
+            //    Level = EventLevel.Alarm,
+            //    Action = EventAction.Clear,
+            //    Category = "TubeAlarm",
+            //}, () => {return true; });
+            //HeaterCU.AlarmToleranceAlarm = HeaterCUToleranceAlarm;
 
-            HeaterCToleranceWarning = SubscribeAlarm(new AlarmEventItem()
-            {
-                EventEnum = $"{Name}.HeaterCToleranceWarning",
-                Description = $"{Name} heaterC tolerance warning ",
-                Solution = "No information available. Press[Clear] to delete alarm message.",
-                Explaination = "No information available.",
-                AutoRecovery = false,
-                Level = EventLevel.Warning,
-                Action = EventAction.Clear,
-                Category = "TubeAlarm",
-            }, () => {return true; });
-            HeaterC.AlarmToleranceWarning = HeaterCToleranceWarning;
+            //HeaterCToleranceWarning = SubscribeAlarm(new AlarmEventItem()
+            //{
+            //    EventEnum = $"{Name}.HeaterCToleranceWarning",
+            //    Description = $"{Name} heaterC tolerance warning ",
+            //    Solution = "No information available. Press[Clear] to delete alarm message.",
+            //    Explaination = "No information available.",
+            //    AutoRecovery = false,
+            //    Level = EventLevel.Warning,
+            //    Action = EventAction.Clear,
+            //    Category = "TubeAlarm",
+            //}, () => {return true; });
+            //HeaterC.AlarmToleranceWarning = HeaterCToleranceWarning;
 
-            HeaterCToleranceAlarm = SubscribeAlarm(new AlarmEventItem()
-            {
-                EventEnum = $"{Name}.HeaterCToleranceAlarm",
-                Description = $"{Name} heaterC tolerance alarm ",
-                Solution = "No information available. Press[Clear] to delete alarm message.",
-                Explaination = "No information available.",
-                AutoRecovery = false,
-                Level = EventLevel.Alarm,
-                Action = EventAction.Clear,
-                Category = "TubeAlarm",
-            }, () => {return true; });
-            HeaterC.AlarmToleranceAlarm = HeaterCToleranceAlarm;
+            //HeaterCToleranceAlarm = SubscribeAlarm(new AlarmEventItem()
+            //{
+            //    EventEnum = $"{Name}.HeaterCToleranceAlarm",
+            //    Description = $"{Name} heaterC tolerance alarm ",
+            //    Solution = "No information available. Press[Clear] to delete alarm message.",
+            //    Explaination = "No information available.",
+            //    AutoRecovery = false,
+            //    Level = EventLevel.Alarm,
+            //    Action = EventAction.Clear,
+            //    Category = "TubeAlarm",
+            //}, () => {return true; });
+            //HeaterC.AlarmToleranceAlarm = HeaterCToleranceAlarm;
 
-            HeaterCLToleranceWarning = SubscribeAlarm(new AlarmEventItem()
-            {
-                EventEnum = $"{Name}.HeaterCLToleranceWarning",
-                Description = $"{Name} heaterCL tolerance warning ",
-                Solution = "No information available. Press[Clear] to delete alarm message.",
-                Explaination = "No information available.",
-                AutoRecovery = false,
-                Level = EventLevel.Warning,
-                Action = EventAction.Clear,
-                Category = "TubeAlarm",
-            }, () => {return true; });
-            HeaterCL.AlarmToleranceWarning = HeaterCLToleranceWarning;
+            //HeaterCLToleranceWarning = SubscribeAlarm(new AlarmEventItem()
+            //{
+            //    EventEnum = $"{Name}.HeaterCLToleranceWarning",
+            //    Description = $"{Name} heaterCL tolerance warning ",
+            //    Solution = "No information available. Press[Clear] to delete alarm message.",
+            //    Explaination = "No information available.",
+            //    AutoRecovery = false,
+            //    Level = EventLevel.Warning,
+            //    Action = EventAction.Clear,
+            //    Category = "TubeAlarm",
+            //}, () => {return true; });
+            //HeaterCL.AlarmToleranceWarning = HeaterCLToleranceWarning;
 
-            HeaterCLToleranceAlarm = SubscribeAlarm(new AlarmEventItem()
-            {
-                EventEnum = $"{Name}.HeaterCLToleranceAlarm",
-                Description = $"{Name} heaterCL tolerance alarm ",
-                Solution = "No information available. Press[Clear] to delete alarm message.",
-                Explaination = "No information available.",
-                AutoRecovery = false,
-                Level = EventLevel.Alarm,
-                Action = EventAction.Clear,
-                Category = "TubeAlarm",
-            }, () => {return true; });
-            HeaterCL.AlarmToleranceAlarm = HeaterCLToleranceAlarm;
+            //HeaterCLToleranceAlarm = SubscribeAlarm(new AlarmEventItem()
+            //{
+            //    EventEnum = $"{Name}.HeaterCLToleranceAlarm",
+            //    Description = $"{Name} heaterCL tolerance alarm ",
+            //    Solution = "No information available. Press[Clear] to delete alarm message.",
+            //    Explaination = "No information available.",
+            //    AutoRecovery = false,
+            //    Level = EventLevel.Alarm,
+            //    Action = EventAction.Clear,
+            //    Category = "TubeAlarm",
+            //}, () => {return true; });
+            //HeaterCL.AlarmToleranceAlarm = HeaterCLToleranceAlarm;
 
-            HeaterLToleranceWarning = SubscribeAlarm(new AlarmEventItem()
-            {
-                EventEnum = $"{Name}.HeaterLToleranceWarning",
-                Description = $"{Name} heaterL tolerance warning ",
-                Solution = "No information available. Press[Clear] to delete alarm message.",
-                Explaination = "No information available.",
-                AutoRecovery = false,
-                Level = EventLevel.Warning,
-                Action = EventAction.Clear,
-                Category = "TubeAlarm",
-            }, () => {return true; });
-            HeaterL.AlarmToleranceWarning = HeaterLToleranceWarning;
+            //HeaterLToleranceWarning = SubscribeAlarm(new AlarmEventItem()
+            //{
+            //    EventEnum = $"{Name}.HeaterLToleranceWarning",
+            //    Description = $"{Name} heaterL tolerance warning ",
+            //    Solution = "No information available. Press[Clear] to delete alarm message.",
+            //    Explaination = "No information available.",
+            //    AutoRecovery = false,
+            //    Level = EventLevel.Warning,
+            //    Action = EventAction.Clear,
+            //    Category = "TubeAlarm",
+            //}, () => {return true; });
+            //HeaterL.AlarmToleranceWarning = HeaterLToleranceWarning;
 
-            HeaterLToleranceAlarm = SubscribeAlarm(new AlarmEventItem()
-            {
-                EventEnum = $"{Name}.HeaterLToleranceAlarm",
-                Description = $"{Name} heaterL tolerance alarm ",
-                Solution = "No information available. Press[Clear] to delete alarm message.",
-                Explaination = "No information available.",
-                AutoRecovery = false,
-                Level = EventLevel.Alarm,
-                Action = EventAction.Clear,
-                Category = "TubeAlarm",
-            }, () => {return true; });
-            HeaterL.AlarmToleranceAlarm = HeaterLToleranceAlarm;
+            //HeaterLToleranceAlarm = SubscribeAlarm(new AlarmEventItem()
+            //{
+            //    EventEnum = $"{Name}.HeaterLToleranceAlarm",
+            //    Description = $"{Name} heaterL tolerance alarm ",
+            //    Solution = "No information available. Press[Clear] to delete alarm message.",
+            //    Explaination = "No information available.",
+            //    AutoRecovery = false,
+            //    Level = EventLevel.Alarm,
+            //    Action = EventAction.Clear,
+            //    Category = "TubeAlarm",
+            //}, () => {return true; });
+            //HeaterL.AlarmToleranceAlarm = HeaterLToleranceAlarm;
 
 
             //MfmD1ToleranceWarning = SubscribeAlarm(new AlarmEventItem()

+ 4 - 0
Branch/NTP02/Furnace/FurnaceRT/FurnaceRT.csproj

@@ -331,6 +331,10 @@
     </None>
   </ItemGroup>
   <ItemGroup>
+    <None Include="Config\Recipe\Furnace\Process\NTP02\RecipeFormat.xml">
+      <SubType>Designer</SubType>
+      <CopyToOutputDirectory>Always</CopyToOutputDirectory>
+    </None>
     <None Include="Config\Recipe\Furnace\Process\TiN\RecipeFormat.xml">
       <SubType>Designer</SubType>
       <CopyToOutputDirectory>Always</CopyToOutputDirectory>