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+<?xml version="1.0" encoding="utf-8"?>
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+<Aitex>
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+ <TableRecipeFormat RecipeChamberType="Furnace" RecipeVersion="1.0">
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+
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+ <!--###########################################-->
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+ <Catalog DisplayName="StepInfo">
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+ <Group DisplayName="Step Information">
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+ <Step ModuleName="" DeviceType="" DisplayName="No." ControlName="StepNo" InputType="ReadOnly" />
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+ <Step ModuleName="" DeviceType="" DisplayName="Name" ControlName="Name" InputType="TextInput" />
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+
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+ <Step ModuleName="" DeviceType="" DisplayName="Step Mode" ControlName="EndBy" InputType="ReadOnlySelection" Description="End by step time or RF time">
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+ <Item DisplayName="Step Time Mode" ControlName="EndByStepTime" />
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+ <Item DisplayName="Temperature Stable" ControlName="EndByTemperature" />
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+ <Item DisplayName="Pressure Stable" ControlName="EndByPressure" />
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+ <Item DisplayName="Gas Flow Stable" ControlName="EndByGasFlow" />
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+ </Step>
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+ <Step ModuleName="" DeviceType="" DisplayName="Step Time(s)" ControlName="Time" InputType="NumInput" InputMode="" Min="0" Max="1000" />
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+ </Group>
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+ </Catalog>
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+
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+ <!--###########################################-->
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+ <Catalog DisplayName="Command">
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+ <Group DisplayName="Command">
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+ <Step ModuleName="" DeviceType="" DisplayName="Command" ControlName="Command" InputType="ReadOnlySelection" Description="">
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+ <Item DisplayName="No Control" ControlName="NoControl" />
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+ <Item DisplayName="Hold + Buzzer" ControlName="HoldAndBuzzer" />
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+ <Item DisplayName="Hold" ControlName="Hold" />
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+ <Item DisplayName="Buzzer" ControlName="Buzzer" />
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+ <Item DisplayName="End" ControlName="End" />
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+ <Item DisplayName="Call Sub Recipe" ControlName="CallSubRecipe" />
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+ <Item DisplayName="Jump" ControlName="Jump" />
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+ <Item DisplayName="Loop" ControlName="Loop" />
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+ </Step>
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+ </Group>
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+ </Catalog>
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+
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+ <!--###########################################-->
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+ <Catalog DisplayName="BoatElevator">
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+ <Group DisplayName="BoatElevator">
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+ <Step ModuleName="" DeviceType="" DisplayName="ZAxisPosition" ControlName="ZAxisPosition" InputType="ReadOnlySelection" Description="">
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+ <Item DisplayName="Process Position" ControlName="ProcessPosition" />
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+ <Item DisplayName="Position 1" ControlName="Position1" />
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+ <Item DisplayName="Position 2" ControlName="Position2" />
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+ <Item DisplayName="Home Position" ControlName="HomePosition" />
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+ </Step>
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+ <Step ModuleName="" DeviceType="" DisplayName="Z Axis Speed(rpm)" ControlName="ZAxisSpeed" InputType="NumInput" InputMode="" Min="0" Max="1000" />
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+ <Step ModuleName="" DeviceType="" DisplayName="RotatePosition" ControlName="RotatePosition" InputType="ReadOnlySelection" Description="">
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+ <Item DisplayName="Continuous" ControlName="Continuous" />
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+ <Item DisplayName="Interval" ControlName="Interval" />
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+ <Item DisplayName="Stop" ControlName="Stop" />
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+ </Step>
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+ <Step ModuleName="" DeviceType="" DisplayName="Rotate Speed(rpm)" ControlName="RotateSpeed" InputType="NumInput" InputMode="" Min="0" Max="1000" />
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+ <Step ModuleName="" DeviceType="" DisplayName="Rotate Direction" ControlName="RotateDirection" InputType="ReadOnlySelection" Description="">
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+ <Item DisplayName="CW" ControlName="CW" />
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+ <Item DisplayName="CCW" ControlName="CCW" />
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+ </Step>
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+ </Group>
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+ </Catalog>
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+
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+ <!--###########################################-->
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+ <Catalog DisplayName="Pressure">
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+ <Group DisplayName="APC">
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+ <Step ModuleName="" DeviceType="Pressure" DisplayName="Pressure(Torr)" ControlName="APC.SetPressure" InputType="DoubleInput" InputMode="" Min="0" Max="1000" Description="TV Pressure" />
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+ </Group>
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+ </Catalog>
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+
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+ <!--###########################################-->
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+ <Catalog DisplayName="MFCFlow">
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+ <Group DisplayName="MFC">
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+ <Step ModuleName="MFC1" DeviceType="MFC" DisplayName="MFC1(sccm)" ControlName="MFC1.Flow" InputType="NumInput" InputMode="" Min="0" Max="10000" Description="" />
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+ <Step ModuleName="MFC2" DeviceType="MFC" DisplayName="MFC2(sccm)" ControlName="MFC2.Flow" InputType="NumInput" InputMode="" Min="0" Max="10000" Description="" />
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+ <Step ModuleName="MFC3" DeviceType="MFC" DisplayName="MFC3(sccm)" ControlName="MFC3.Flow" InputType="NumInput" InputMode="" Min="0" Max="10000" Description="" />
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+ <Step ModuleName="MFC4" DeviceType="MFC" DisplayName="MFC4(sccm)" ControlName="MFC4.Flow" InputType="NumInput" InputMode="" Min="0" Max="5000" Description="" />
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+ <Step ModuleName="MFC5" DeviceType="MFC" DisplayName="MFC5(sccm)" ControlName="MFC5.Flow" InputType="NumInput" InputMode="" Min="0" Max="5000" Description="" />
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+ <Step ModuleName="MFC6" DeviceType="MFC" DisplayName="MFC6(sccm)" ControlName="MFC6.Flow" InputType="NumInput" InputMode="" Min="0" Max="10000" Description="" />
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+ <Step ModuleName="MFC7" DeviceType="MFC" DisplayName="MFC7(sccm)" ControlName="MFC7.Flow" InputType="NumInput" InputMode="" Min="0" Max="10000" Description="" />
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+ <Step ModuleName="MFC8" DeviceType="MFC" DisplayName="MFC8(sccm)" ControlName="MFC8.Flow" InputType="NumInput" InputMode="" Min="0" Max="10000" Description="" />
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+ <Step ModuleName="MFC9" DeviceType="MFC" DisplayName="MFC9(sccm)" ControlName="MFC9.Flow" InputType="NumInput" InputMode="" Min="0" Max="10000" Description="" />
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+ <Step ModuleName="MFC10" DeviceType="MFC" DisplayName="MFC10(sccm)" ControlName="MFC10.Flow" InputType="NumInput" InputMode="" Min="0" Max="10000" Description="" />
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+ <Step ModuleName="MFC11" DeviceType="MFC" DisplayName="MFC11(sccm)" ControlName="MFC11.Flow" InputType="NumInput" InputMode="" Min="0" Max="10000" Description="" />
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+ <Step ModuleName="MFC12" DeviceType="MFC" DisplayName="MFC12(sccm)" ControlName="MFC12.Flow" InputType="NumInput" InputMode="" Min="0" Max="10000" Description="" />
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+ <Step ModuleName="MFC13" DeviceType="MFC" DisplayName="MFC13(sccm)" ControlName="MFC13.Flow" InputType="NumInput" InputMode="" Min="0" Max="10000" Description="" />
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+ <Step ModuleName="MFC14" DeviceType="MFC" DisplayName="MFC14(sccm)" ControlName="MFC14.Flow" InputType="NumInput" InputMode="" Min="0" Max="10000" Description="" />
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+ <Step ModuleName="MFC15" DeviceType="MFC" DisplayName="MFC15(sccm)" ControlName="MFC15.Flow" InputType="NumInput" InputMode="" Min="0" Max="10000" Description="" />
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+ <Step ModuleName="MFC16" DeviceType="MFC" DisplayName="MFC16(sccm)" ControlName="MFC16.Flow" InputType="NumInput" InputMode="" Min="0" Max="10000" Description="" />
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+
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+
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+ </Group>
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+ </Catalog>
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+
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+ <Catalog DisplayName="MFCRampng">
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+ <Group DisplayName="MFCRampng">
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+ <Step ModuleName="" DeviceType="MFCRampng" DisplayName="MFC N1(sccm)" ControlName="N1.Flow" InputType="NumInput" InputMode="" Min="0" Max="10000" Description="" />
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+ <Step ModuleName="" DeviceType="MFCRampng" DisplayName="MFC N2(sccm)" ControlName="N2.Flow" InputType="NumInput" InputMode="" Min="0" Max="10000" Description="" />
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+ <Step ModuleName="" DeviceType="MFCRampng" DisplayName="MFC N3(sccm)" ControlName="N3.Flow" InputType="NumInput" InputMode="" Min="0" Max="10000" Description="" />
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+ <Step ModuleName="" DeviceType="MFCRampng" DisplayName="MFC H1(sccm)" ControlName="H1.Flow" InputType="NumInput" InputMode="" Min="0" Max="5000" Description="" />
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+ <Step ModuleName="" DeviceType="MFCRampng" DisplayName="MFC J1(sccm)" ControlName="J1.Flow" InputType="NumInput" InputMode="" Min="0" Max="5000" Description="" />
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+ <Step ModuleName="" DeviceType="MFCRampng" DisplayName="MFC XN1(sccm)" ControlName="XN1.Flow" InputType="NumInput" InputMode="" Min="0" Max="10000" Description="" />
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+ </Group>
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+ </Catalog>
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+
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+ <Catalog DisplayName="MFCAlarm">
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+ <Group DisplayName="MFCAlarm">
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+ <Step ModuleName="" DeviceType="MFCAlarm" DisplayName="MFC N1(sccm)" ControlName="GasLineN1.Flow" InputType="NumInput" InputMode="" Min="0" Max="10000" Description="" />
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+ <Step ModuleName="" DeviceType="MFCAlarm" DisplayName="MFC N2(sccm)" ControlName="GasLineN2.Flow" InputType="NumInput" InputMode="" Min="0" Max="10000" Description="" />
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+ <Step ModuleName="" DeviceType="MFCAlarm" DisplayName="MFC N3(sccm)" ControlName="GasLineN3.Flow" InputType="NumInput" InputMode="" Min="0" Max="10000" Description="" />
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+ <Step ModuleName="" DeviceType="MFCAlarm" DisplayName="MFC H1(sccm)" ControlName="GasLineH1.Flow" InputType="NumInput" InputMode="" Min="0" Max="100" Description="" />
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+ <Step ModuleName="" DeviceType="MFCAlarm" DisplayName="MFC J1(sccm)" ControlName="GasLineJ1.Flow" InputType="NumInput" InputMode="" Min="0" Max="5000" Description="" />
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+ <Step ModuleName="" DeviceType="MFCAlarm" DisplayName="MFC XN1(sccm)" ControlName="GasLineXN1.Flow" InputType="NumInput" InputMode="" Min="0" Max="10000" Description="" />
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+ </Group>
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+ </Catalog>
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+
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+ <!--###########################################-->
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+ <Catalog DisplayName="MFMFlow">
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+ <Group DisplayName="MFM">
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+ <Step ModuleName="MFM57" DeviceType="MFM" DisplayName="MFM(sccm)" ControlName="MFM57Flow" InputType="NumInput" InputMode="" Min="0" Max="5000" Description="" />
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+ </Group>
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+ </Catalog>
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+
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+ <Catalog DisplayName="MFMAlarm">
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+ <Group DisplayName="MFMAlarm">
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+ <Step ModuleName="" DeviceType="MFMAlarm" DisplayName="MFC H2(sccm)" ControlName="MfmH2Flow" InputType="NumInput" InputMode="" Min="0" Max="10000" Description="" />
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+ <Step ModuleName="" DeviceType="MFMAlarm" DisplayName="MFC O2(sccm)" ControlName="MfmO2Flow" InputType="NumInput" InputMode="" Min="0" Max="10000" Description="" />
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+ </Group>
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+ </Catalog>
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+
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+ <!--###########################################-->
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+ <Catalog DisplayName="Temperature">
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+ <Group DisplayName="Temperature">
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+ <Step ModuleName="" DeviceType="Heater" DisplayName="Heater Top (°C)" ControlName="HeaterU" InputType="NumInput" InputMode="" Min="0" Max="5000" Description="" />
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+ <Step ModuleName="" DeviceType="Heater" DisplayName="Heater T/C (°C)" ControlName="HeaterCU" InputType="NumInput" InputMode="" Min="0" Max="5000" Description="" />
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+ <Step ModuleName="" DeviceType="Heater" DisplayName="Heater CNTR (°C)" ControlName="HeaterC" InputType="NumInput" InputMode="" Min="0" Max="5000" Description="" />
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+ <Step ModuleName="" DeviceType="Heater" DisplayName="Heater B/C (°C)" ControlName="HeaterCL" InputType="NumInput" InputMode="" Min="0" Max="5000" Description="" />
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+ <Step ModuleName="" DeviceType="Heater" DisplayName="Heater BTM (°C)" ControlName="HeaterL" InputType="NumInput" InputMode="" Min="0" Max="5000" Description="" />
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+ </Group>
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+ </Catalog>
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+
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+ <!--###########################################-->
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+ <Catalog DisplayName="Valve">
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+ <Group DisplayName="Valve">
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+ <Step ModuleName="" DeviceType="Valve" DisplayName="AV1" ControlName="ValveAV1" InputType="ReadOnlySelection" Description="">
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+ <Item DisplayName="Close" ControlName="Close" />
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+ <Item DisplayName="Open" ControlName="Open"/>
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+ </Step>
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+ <Step ModuleName="" DeviceType="Valve" DisplayName="AV2" ControlName="ValveAV2" InputType="ReadOnlySelection" Description="">
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+ <Item DisplayName="Close" ControlName="Close" />
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+ <Item DisplayName="Open" ControlName="Open"/>
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+ </Step>
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+ <Step ModuleName="" DeviceType="Valve" DisplayName="AV3" ControlName="ValveAV3" InputType="ReadOnlySelection" Description="">
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+ <Item DisplayName="Close" ControlName="Close" />
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+ <Item DisplayName="Open" ControlName="Open"/>
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+ </Step>
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+ <Step ModuleName="" DeviceType="Valve" DisplayName="AV4" ControlName="ValveAV4" InputType="ReadOnlySelection" Description="">
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+ <Item DisplayName="Close" ControlName="Close" />
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+ <Item DisplayName="Open" ControlName="Open"/>
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+ </Step>
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+ <Step ModuleName="" DeviceType="Valve" DisplayName="AV5" ControlName="ValveAV5" InputType="ReadOnlySelection" Description="">
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+ <Item DisplayName="Close" ControlName="Close" />
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+ <Item DisplayName="Open" ControlName="Open"/>
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+ </Step>
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+ <Step ModuleName="" DeviceType="Valve" DisplayName="AV6" ControlName="ValveAV6" InputType="ReadOnlySelection" Description="">
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+ <Item DisplayName="Close" ControlName="Close" />
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+ <Item DisplayName="Open" ControlName="Open"/>
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+ </Step>
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+ <Step ModuleName="" DeviceType="Valve" DisplayName="AV7" ControlName="ValveAV7" InputType="ReadOnlySelection" Description="">
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+ <Item DisplayName="Close" ControlName="Close" />
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+ <Item DisplayName="Open" ControlName="Open"/>
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+ </Step>
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+ <Step ModuleName="" DeviceType="Valve" DisplayName="AV8" ControlName="ValveAV8" InputType="ReadOnlySelection" Description="">
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+ <Item DisplayName="Close" ControlName="Close" />
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+ <Item DisplayName="Open" ControlName="Open"/>
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+ </Step>
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+ <Step ModuleName="" DeviceType="Valve" DisplayName="AV9" ControlName="ValveAV9" InputType="ReadOnlySelection" Description="">
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+ <Item DisplayName="Close" ControlName="Close" />
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+ <Item DisplayName="Open" ControlName="Open"/>
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+ </Step>
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+ <Step ModuleName="" DeviceType="Valve" DisplayName="AV10" ControlName="ValveAV10" InputType="ReadOnlySelection" Description="">
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+ <Item DisplayName="Close" ControlName="Close" />
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+ <Item DisplayName="Open" ControlName="Open"/>
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+ </Step>
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+ <Step ModuleName="" DeviceType="Valve" DisplayName="AV11" ControlName="ValveAV11" InputType="ReadOnlySelection" Description="">
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+ <Item DisplayName="Close" ControlName="Close" />
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+ <Item DisplayName="Open" ControlName="Open"/>
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+ </Step>
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+ <Step ModuleName="" DeviceType="Valve" DisplayName="AV12" ControlName="ValveAV12" InputType="ReadOnlySelection" Description="">
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+ <Item DisplayName="Close" ControlName="Close" />
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+ <Item DisplayName="Open" ControlName="Open"/>
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+ </Step>
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+ <Step ModuleName="" DeviceType="Valve" DisplayName="AV13" ControlName="ValveAV13" InputType="ReadOnlySelection" Description="">
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+ <Item DisplayName="Close" ControlName="Close" />
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+ <Item DisplayName="Open" ControlName="Open"/>
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+ </Step>
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+ <Step ModuleName="" DeviceType="Valve" DisplayName="AV14" ControlName="ValveAV14" InputType="ReadOnlySelection" Description="">
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+ <Item DisplayName="Close" ControlName="Close" />
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+ <Item DisplayName="Open" ControlName="Open"/>
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+ </Step>
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+ <Step ModuleName="" DeviceType="Valve" DisplayName="AV15" ControlName="ValveAV15" InputType="ReadOnlySelection" Description="">
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+ <Item DisplayName="Close" ControlName="Close" />
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+ <Item DisplayName="Open" ControlName="Open"/>
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+ </Step>
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+ <Step ModuleName="" DeviceType="Valve" DisplayName="AV16" ControlName="ValveAV16" InputType="ReadOnlySelection" Description="">
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+ <Item DisplayName="Close" ControlName="Close" />
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+ <Item DisplayName="Open" ControlName="Open"/>
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+ </Step>
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+ <Step ModuleName="" DeviceType="Valve" DisplayName="AV17" ControlName="ValveAV17" InputType="ReadOnlySelection" Description="">
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+ <Item DisplayName="Close" ControlName="Close" />
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+ <Item DisplayName="Open" ControlName="Open"/>
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+ </Step>
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+ <Step ModuleName="" DeviceType="Valve" DisplayName="AV18" ControlName="ValveAV18" InputType="ReadOnlySelection" Description="">
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+ <Item DisplayName="Close" ControlName="Close" />
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+ <Item DisplayName="Open" ControlName="Open"/>
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+ </Step>
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+ <Step ModuleName="" DeviceType="Valve" DisplayName="AV19" ControlName="ValveAV19" InputType="ReadOnlySelection" Description="">
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+ <Item DisplayName="Close" ControlName="Close" />
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+ <Item DisplayName="Open" ControlName="Open"/>
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+ </Step>
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+ <Step ModuleName="" DeviceType="Valve" DisplayName="AV20" ControlName="ValveAV20" InputType="ReadOnlySelection" Description="">
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+ <Item DisplayName="Close" ControlName="Close" />
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+ <Item DisplayName="Open" ControlName="Open"/>
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+ </Step>
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+ <Step ModuleName="" DeviceType="Valve" DisplayName="AV21" ControlName="ValveAV21" InputType="ReadOnlySelection" Description="">
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+ <Item DisplayName="Close" ControlName="Close" />
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+ <Item DisplayName="Open" ControlName="Open"/>
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+ </Step>
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+ <Step ModuleName="" DeviceType="Valve" DisplayName="AV22" ControlName="ValveAV22" InputType="ReadOnlySelection" Description="">
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+ <Item DisplayName="Close" ControlName="Close" />
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+ <Item DisplayName="Open" ControlName="Open"/>
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+ </Step>
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+ <Step ModuleName="" DeviceType="Valve" DisplayName="AV23" ControlName="ValveAV23" InputType="ReadOnlySelection" Description="">
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+ <Item DisplayName="Close" ControlName="Close" />
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+ <Item DisplayName="Open" ControlName="Open"/>
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+ </Step>
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+ <Step ModuleName="" DeviceType="Valve" DisplayName="AV24" ControlName="ValveAV24" InputType="ReadOnlySelection" Description="">
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+ <Item DisplayName="Close" ControlName="Close" />
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+ <Item DisplayName="Open" ControlName="Open"/>
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+ </Step>
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+ <Step ModuleName="" DeviceType="Valve" DisplayName="AV25" ControlName="ValveAV25" InputType="ReadOnlySelection" Description="">
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+ <Item DisplayName="Close" ControlName="Close" />
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+ <Item DisplayName="Open" ControlName="Open"/>
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+ </Step>
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+ <Step ModuleName="" DeviceType="Valve" DisplayName="AV26" ControlName="ValveAV26" InputType="ReadOnlySelection" Description="">
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+ <Item DisplayName="Close" ControlName="Close" />
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+ <Item DisplayName="Open" ControlName="Open"/>
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+ </Step>
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+ <Step ModuleName="" DeviceType="Valve" DisplayName="AV27" ControlName="ValveAV27" InputType="ReadOnlySelection" Description="">
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+ <Item DisplayName="Close" ControlName="Close" />
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+ <Item DisplayName="Open" ControlName="Open"/>
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+ </Step>
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+ <Step ModuleName="" DeviceType="Valve" DisplayName="AV28" ControlName="ValveAV28" InputType="ReadOnlySelection" Description="">
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+ <Item DisplayName="Close" ControlName="Close" />
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+ <Item DisplayName="Open" ControlName="Open"/>
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+ </Step>
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+ <Step ModuleName="" DeviceType="Valve" DisplayName="AV29" ControlName="ValveAV29" InputType="ReadOnlySelection" Description="">
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+ <Item DisplayName="Close" ControlName="Close" />
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+ <Item DisplayName="Open" ControlName="Open"/>
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+ </Step>
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+ <Step ModuleName="" DeviceType="Valve" DisplayName="AV30" ControlName="ValveAV30" InputType="ReadOnlySelection" Description="">
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+ <Item DisplayName="Close" ControlName="Close" />
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+ <Item DisplayName="Open" ControlName="Open"/>
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+ </Step>
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+ <Step ModuleName="" DeviceType="Valve" DisplayName="AV31" ControlName="ValveAV31" InputType="ReadOnlySelection" Description="">
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+ <Item DisplayName="Close" ControlName="Close" />
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+ <Item DisplayName="Open" ControlName="Open"/>
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+ </Step>
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+ <Step ModuleName="" DeviceType="Valve" DisplayName="AV32" ControlName="ValveAV32" InputType="ReadOnlySelection" Description="">
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+ <Item DisplayName="Close" ControlName="Close" />
|
|
|
+ <Item DisplayName="Open" ControlName="Open"/>
|
|
|
+ </Step>
|
|
|
+ <Step ModuleName="" DeviceType="Valve" DisplayName="AV33" ControlName="ValveAV33" InputType="ReadOnlySelection" Description="">
|
|
|
+ <Item DisplayName="Close" ControlName="Close" />
|
|
|
+ <Item DisplayName="Open" ControlName="Open"/>
|
|
|
+ </Step>
|
|
|
+ <Step ModuleName="" DeviceType="Valve" DisplayName="AV34" ControlName="ValveAV34" InputType="ReadOnlySelection" Description="">
|
|
|
+ <Item DisplayName="Close" ControlName="Close" />
|
|
|
+ <Item DisplayName="Open" ControlName="Open"/>
|
|
|
+ </Step>
|
|
|
+ <Step ModuleName="" DeviceType="Valve" DisplayName="AV35" ControlName="ValveAV35" InputType="ReadOnlySelection" Description="">
|
|
|
+ <Item DisplayName="Close" ControlName="Close" />
|
|
|
+ <Item DisplayName="Open" ControlName="Open"/>
|
|
|
+ </Step>
|
|
|
+ <Step ModuleName="" DeviceType="Valve" DisplayName="AV36" ControlName="ValveAV36" InputType="ReadOnlySelection" Description="">
|
|
|
+ <Item DisplayName="Close" ControlName="Close" />
|
|
|
+ <Item DisplayName="Open" ControlName="Open"/>
|
|
|
+ </Step>
|
|
|
+ <Step ModuleName="" DeviceType="Valve" DisplayName="AV37" ControlName="ValveAV37" InputType="ReadOnlySelection" Description="">
|
|
|
+ <Item DisplayName="Close" ControlName="Close" />
|
|
|
+ <Item DisplayName="Open" ControlName="Open"/>
|
|
|
+ </Step>
|
|
|
+ <Step ModuleName="" DeviceType="Valve" DisplayName="AV38" ControlName="ValveAV38" InputType="ReadOnlySelection" Description="">
|
|
|
+ <Item DisplayName="Close" ControlName="Close" />
|
|
|
+ <Item DisplayName="Open" ControlName="Open"/>
|
|
|
+ </Step>
|
|
|
+ <Step ModuleName="" DeviceType="Valve" DisplayName="AV39" ControlName="ValveAV39" InputType="ReadOnlySelection" Description="">
|
|
|
+ <Item DisplayName="Close" ControlName="Close" />
|
|
|
+ <Item DisplayName="Open" ControlName="Open"/>
|
|
|
+ </Step>
|
|
|
+ <Step ModuleName="" DeviceType="Valve" DisplayName="AV40" ControlName="ValveAV40" InputType="ReadOnlySelection" Description="">
|
|
|
+ <Item DisplayName="Close" ControlName="Close" />
|
|
|
+ <Item DisplayName="Open" ControlName="Open"/>
|
|
|
+ </Step>
|
|
|
+ <Step ModuleName="" DeviceType="Valve" DisplayName="AV41" ControlName="ValveAV41" InputType="ReadOnlySelection" Description="">
|
|
|
+ <Item DisplayName="Close" ControlName="Close" />
|
|
|
+ <Item DisplayName="Open" ControlName="Open"/>
|
|
|
+ </Step>
|
|
|
+ <Step ModuleName="" DeviceType="Valve" DisplayName="AV42" ControlName="ValveAV42" InputType="ReadOnlySelection" Description="">
|
|
|
+ <Item DisplayName="Close" ControlName="Close" />
|
|
|
+ <Item DisplayName="Open" ControlName="Open"/>
|
|
|
+ </Step>
|
|
|
+ <Step ModuleName="" DeviceType="Valve" DisplayName="AV43" ControlName="ValveAV43" InputType="ReadOnlySelection" Description="">
|
|
|
+ <Item DisplayName="Close" ControlName="Close" />
|
|
|
+ <Item DisplayName="Open" ControlName="Open"/>
|
|
|
+ </Step>
|
|
|
+ <Step ModuleName="" DeviceType="Valve" DisplayName="AV44" ControlName="ValveAV44" InputType="ReadOnlySelection" Description="">
|
|
|
+ <Item DisplayName="Close" ControlName="Close" />
|
|
|
+ <Item DisplayName="Open" ControlName="Open"/>
|
|
|
+ </Step>
|
|
|
+ <Step ModuleName="" DeviceType="Valve" DisplayName="AV45" ControlName="ValveAV45" InputType="ReadOnlySelection" Description="">
|
|
|
+ <Item DisplayName="Close" ControlName="Close" />
|
|
|
+ <Item DisplayName="Open" ControlName="Open"/>
|
|
|
+ </Step>
|
|
|
+ <Step ModuleName="" DeviceType="Valve" DisplayName="AV46" ControlName="ValveAV46" InputType="ReadOnlySelection" Description="">
|
|
|
+ <Item DisplayName="Close" ControlName="Close" />
|
|
|
+ <Item DisplayName="Open" ControlName="Open"/>
|
|
|
+ </Step>
|
|
|
+ <Step ModuleName="" DeviceType="Valve" DisplayName="AV47" ControlName="ValveAV47" InputType="ReadOnlySelection" Description="">
|
|
|
+ <Item DisplayName="Close" ControlName="Close" />
|
|
|
+ <Item DisplayName="Open" ControlName="Open"/>
|
|
|
+ </Step>
|
|
|
+ <Step ModuleName="" DeviceType="Valve" DisplayName="AV48" ControlName="ValveAV48" InputType="ReadOnlySelection" Description="">
|
|
|
+ <Item DisplayName="Close" ControlName="Close" />
|
|
|
+ <Item DisplayName="Open" ControlName="Open"/>
|
|
|
+ </Step>
|
|
|
+ <Step ModuleName="" DeviceType="Valve" DisplayName="AV49" ControlName="ValveAV49" InputType="ReadOnlySelection" Description="">
|
|
|
+ <Item DisplayName="Close" ControlName="Close" />
|
|
|
+ <Item DisplayName="Open" ControlName="Open"/>
|
|
|
+ </Step>
|
|
|
+ <Step ModuleName="" DeviceType="Valve" DisplayName="AV50" ControlName="ValveAV50" InputType="ReadOnlySelection" Description="">
|
|
|
+ <Item DisplayName="Close" ControlName="Close" />
|
|
|
+ <Item DisplayName="Open" ControlName="Open"/>
|
|
|
+ </Step>
|
|
|
+ <Step ModuleName="" DeviceType="Valve" DisplayName="AV51" ControlName="ValveAV51" InputType="ReadOnlySelection" Description="">
|
|
|
+ <Item DisplayName="Close" ControlName="Close" />
|
|
|
+ <Item DisplayName="Open" ControlName="Open"/>
|
|
|
+ </Step>
|
|
|
+ <Step ModuleName="" DeviceType="Valve" DisplayName="AV52" ControlName="ValveAV52" InputType="ReadOnlySelection" Description="">
|
|
|
+ <Item DisplayName="Close" ControlName="Close" />
|
|
|
+ <Item DisplayName="Open" ControlName="Open"/>
|
|
|
+ </Step>
|
|
|
+ <Step ModuleName="" DeviceType="Valve" DisplayName="AV53" ControlName="ValveAV53" InputType="ReadOnlySelection" Description="">
|
|
|
+ <Item DisplayName="Close" ControlName="Close" />
|
|
|
+ <Item DisplayName="Open" ControlName="Open"/>
|
|
|
+ </Step>
|
|
|
+ <Step ModuleName="" DeviceType="Valve" DisplayName="AV55" ControlName="ValveAV55" InputType="ReadOnlySelection" Description="">
|
|
|
+ <Item DisplayName="Close" ControlName="Close" />
|
|
|
+ <Item DisplayName="Open" ControlName="Open"/>
|
|
|
+ </Step>
|
|
|
+ <Step ModuleName="" DeviceType="Valve" DisplayName="AV60" ControlName="ValveAV60" InputType="ReadOnlySelection" Description="">
|
|
|
+ <Item DisplayName="Close" ControlName="Close" />
|
|
|
+ <Item DisplayName="Open" ControlName="Open"/>
|
|
|
+ </Step>
|
|
|
+ <Step ModuleName="" DeviceType="Valve" DisplayName="AV68" ControlName="ValveAV68" InputType="ReadOnlySelection" Description="">
|
|
|
+ <Item DisplayName="Close" ControlName="Close" />
|
|
|
+ <Item DisplayName="Open" ControlName="Open"/>
|
|
|
+ </Step>
|
|
|
+ <Step ModuleName="" DeviceType="Valve" DisplayName="AV71" ControlName="ValveAV71" InputType="ReadOnlySelection" Description="">
|
|
|
+ <Item DisplayName="Close" ControlName="Close" />
|
|
|
+ <Item DisplayName="Open" ControlName="Open"/>
|
|
|
+ </Step>
|
|
|
+ <Step ModuleName="" DeviceType="Valve" DisplayName="AV72" ControlName="ValveAV72" InputType="ReadOnlySelection" Description="">
|
|
|
+ <Item DisplayName="Close" ControlName="Close" />
|
|
|
+ <Item DisplayName="Open" ControlName="Open"/>
|
|
|
+ </Step>
|
|
|
+ <Step ModuleName="" DeviceType="Valve" DisplayName="AV73" ControlName="ValveAV73" InputType="ReadOnlySelection" Description="">
|
|
|
+ <Item DisplayName="Close" ControlName="Close" />
|
|
|
+ <Item DisplayName="Open" ControlName="Open"/>
|
|
|
+ </Step>
|
|
|
+ <Step ModuleName="" DeviceType="Valve" DisplayName="AV74" ControlName="ValveAV74" InputType="ReadOnlySelection" Description="">
|
|
|
+ <Item DisplayName="Close" ControlName="Close" />
|
|
|
+ <Item DisplayName="Open" ControlName="Open"/>
|
|
|
+ </Step>
|
|
|
+ <Step ModuleName="" DeviceType="Valve" DisplayName="AV75" ControlName="ValveAV75" InputType="ReadOnlySelection" Description="">
|
|
|
+ <Item DisplayName="Close" ControlName="Close" />
|
|
|
+ <Item DisplayName="Open" ControlName="Open"/>
|
|
|
+ </Step>
|
|
|
+ <Step ModuleName="" DeviceType="Valve" DisplayName="AV77" ControlName="ValveAV77" InputType="ReadOnlySelection" Description="">
|
|
|
+ <Item DisplayName="Close" ControlName="Close" />
|
|
|
+ <Item DisplayName="Open" ControlName="Open"/>
|
|
|
+ </Step>
|
|
|
+ <Step ModuleName="" DeviceType="Valve" DisplayName="AV81" ControlName="ValveAV81" InputType="ReadOnlySelection" Description="">
|
|
|
+ <Item DisplayName="Close" ControlName="Close" />
|
|
|
+ <Item DisplayName="Open" ControlName="Open"/>
|
|
|
+ </Step>
|
|
|
+ <Step ModuleName="" DeviceType="Valve" DisplayName="AV82" ControlName="ValveAV82" InputType="ReadOnlySelection" Description="">
|
|
|
+ <Item DisplayName="Close" ControlName="Close" />
|
|
|
+ <Item DisplayName="Open" ControlName="Open"/>
|
|
|
+ </Step>
|
|
|
+ <Step ModuleName="" DeviceType="Valve" DisplayName="AV83" ControlName="ValveAV83" InputType="ReadOnlySelection" Description="">
|
|
|
+ <Item DisplayName="Close" ControlName="Close" />
|
|
|
+ <Item DisplayName="Open" ControlName="Open"/>
|
|
|
+ </Step>
|
|
|
+ <Step ModuleName="" DeviceType="Valve" DisplayName="DPR" ControlName="ValveAV91" InputType="ReadOnlySelection" Description="">
|
|
|
+ <Item DisplayName="Close" ControlName="Close" />
|
|
|
+ <Item DisplayName="Open" ControlName="Open" />
|
|
|
+ </Step>
|
|
|
+ <!--<Step ModuleName="" DeviceType="Valve" DisplayName="AGV" ControlName="AGVPump" InputType="ReadOnlySelection" Description="">
|
|
|
+ <Item DisplayName="Close" ControlName="Close" />
|
|
|
+ <Item DisplayName="Open" ControlName="Open" />
|
|
|
+ </Step>
|
|
|
+ <Step ModuleName="" DeviceType="Valve" DisplayName="MBP" ControlName="BothPump" InputType="ReadOnlySelection" Description="">
|
|
|
+ <Item DisplayName="Close" ControlName="Close" />
|
|
|
+ <Item DisplayName="Open" ControlName="Open" />
|
|
|
+ </Step>
|
|
|
+ <Step ModuleName="" DeviceType="Valve" DisplayName="DP" ControlName="AUCPump" InputType="ReadOnlySelection" Description="">
|
|
|
+ <Item DisplayName="Close" ControlName="Close" />
|
|
|
+ <Item DisplayName="Open" ControlName="Open" />
|
|
|
+ </Step>
|
|
|
+ <Step ModuleName="" DeviceType="Valve" DisplayName="BWR" ControlName="ValveBlowerPowerOn" InputType="ReadOnlySelection" Description="">
|
|
|
+ <Item DisplayName="Close" ControlName="Close" />
|
|
|
+ <Item DisplayName="Open" ControlName="Open" />
|
|
|
+ </Step>
|
|
|
+ <Step ModuleName="" DeviceType="Valve" DisplayName="F2" ControlName="F2Cln" InputType="ReadOnlySelection" Description="">
|
|
|
+ <Item DisplayName="Close" ControlName="Close" />
|
|
|
+ <Item DisplayName="Open" ControlName="Open" />
|
|
|
+ </Step>
|
|
|
+ <Step ModuleName="" DeviceType="Valve" DisplayName="HF" ControlName="HFCln" InputType="ReadOnlySelection" Description="">
|
|
|
+ <Item DisplayName="Close" ControlName="Close" />
|
|
|
+ <Item DisplayName="Open" ControlName="Open" />
|
|
|
+ </Step>
|
|
|
+ <Step ModuleName="" DeviceType="Valve" DisplayName="HTR1" ControlName="HTR1" InputType="ReadOnlySelection" Description="">
|
|
|
+ <Item DisplayName="Close" ControlName="Close" />
|
|
|
+ <Item DisplayName="Open" ControlName="Open" />
|
|
|
+ </Step>
|
|
|
+ <Step ModuleName="" DeviceType="Valve" DisplayName="HTR2" ControlName="HTR2" InputType="ReadOnlySelection" Description="">
|
|
|
+ <Item DisplayName="Close" ControlName="Close" />
|
|
|
+ <Item DisplayName="Open" ControlName="Open" />
|
|
|
+ </Step>-->
|
|
|
+
|
|
|
+
|
|
|
+ <Step ModuleName="" DeviceType="Valve" DisplayName="AGVPump" ControlName="AGV" InputType="ReadOnlySelection" Description="">
|
|
|
+ <Item DisplayName="Close" ControlName="Close" />
|
|
|
+ <Item DisplayName="Open" ControlName="Open" />
|
|
|
+ </Step>
|
|
|
+ <Step ModuleName="" DeviceType="Valve" DisplayName="BothPump" ControlName="MBP" InputType="ReadOnlySelection" Description="">
|
|
|
+ <Item DisplayName="Close" ControlName="Close" />
|
|
|
+ <Item DisplayName="Open" ControlName="Open" />
|
|
|
+ </Step>
|
|
|
+ <Step ModuleName="" DeviceType="Valve" DisplayName="AUCPump" ControlName="DP" InputType="ReadOnlySelection" Description="">
|
|
|
+ <Item DisplayName="Close" ControlName="Close" />
|
|
|
+ <Item DisplayName="Open" ControlName="Open" />
|
|
|
+ </Step>
|
|
|
+ <Step ModuleName="" DeviceType="Valve" DisplayName="ValveBWR" ControlName="BWR" InputType="ReadOnlySelection" Description="">
|
|
|
+ <Item DisplayName="Close" ControlName="Close" />
|
|
|
+ <Item DisplayName="Open" ControlName="Open" />
|
|
|
+ </Step>
|
|
|
+ <Step ModuleName="" DeviceType="Valve" DisplayName="ValveCEXH" ControlName="CEXH" InputType="ReadOnlySelection" Description="">
|
|
|
+ <Item DisplayName="Close" ControlName="Close" />
|
|
|
+ <Item DisplayName="Open" ControlName="Open" />
|
|
|
+ </Step>
|
|
|
+ <Step ModuleName="" DeviceType="Valve" DisplayName="DEPO" ControlName="DEPO" InputType="ReadOnlySelection" Description="">
|
|
|
+ <Item DisplayName="Close" ControlName="Close" />
|
|
|
+ <Item DisplayName="Open" ControlName="Open" />
|
|
|
+ </Step>
|
|
|
+ <Step ModuleName="" DeviceType="Valve" DisplayName="F2Cln" ControlName="F2Cln" InputType="ReadOnlySelection" Description="">
|
|
|
+ <Item DisplayName="Close" ControlName="Close" />
|
|
|
+ <Item DisplayName="Open" ControlName="Open" />
|
|
|
+ </Step>
|
|
|
+ <Step ModuleName="" DeviceType="Valve" DisplayName="HFCln" ControlName="HFCln" InputType="ReadOnlySelection" Description="">
|
|
|
+ <Item DisplayName="Close" ControlName="Close" />
|
|
|
+ <Item DisplayName="Open" ControlName="Open" />
|
|
|
+ </Step>
|
|
|
+ <Step ModuleName="" DeviceType="Valve" DisplayName="HTR1" ControlName="HTR1" InputType="ReadOnlySelection" Description="">
|
|
|
+ <Item DisplayName="Close" ControlName="Close" />
|
|
|
+ <Item DisplayName="Open" ControlName="Open" />
|
|
|
+ </Step>
|
|
|
+ <Step ModuleName="" DeviceType="Valve" DisplayName="HTR2" ControlName="HTR2" InputType="ReadOnlySelection" Description="">
|
|
|
+ <Item DisplayName="Close" ControlName="Close" />
|
|
|
+ <Item DisplayName="Open" ControlName="Open" />
|
|
|
+ </Step>
|
|
|
+ <Step ModuleName="" DeviceType="Valve" DisplayName="HTR3" ControlName="HTR3" InputType="ReadOnlySelection" Description="">
|
|
|
+ <Item DisplayName="Close" ControlName="Close" />
|
|
|
+ <Item DisplayName="Open" ControlName="Open" />
|
|
|
+ </Step>
|
|
|
+ </Group>
|
|
|
+ </Catalog>
|
|
|
+
|
|
|
+ <!--*************************************************************-->
|
|
|
+
|
|
|
+ <Catalog DisplayName="AUX">
|
|
|
+ <Group DisplayName="AUX">
|
|
|
+ <Step ModuleName="" ControlName="1" DeviceType="AUX" DisplayName="" InputType="DoubleInput" InputMode="" Min="0" Max="5000" Description="" />
|
|
|
+ <Step ModuleName="" ControlName="2" DeviceType="AUX" DisplayName="" InputType="DoubleInput" InputMode="" Min="0" Max="5000" Description="" />
|
|
|
+ <Step ModuleName="" ControlName="3" DeviceType="AUX" DisplayName="" InputType="DoubleInput" InputMode="" Min="0" Max="5000" Description="" />
|
|
|
+ <Step ModuleName="" ControlName="4" DeviceType="AUX" DisplayName="" InputType="DoubleInput" InputMode="" Min="0" Max="5000" Description="" />
|
|
|
+ <Step ModuleName="" ControlName="5" DeviceType="AUX" DisplayName="" InputType="DoubleInput" InputMode="" Min="0" Max="5000" Description="" />
|
|
|
+ <Step ModuleName="" ControlName="6" DeviceType="AUX" DisplayName="" InputType="DoubleInput" InputMode="" Min="0" Max="5000" Description="" />
|
|
|
+ <Step ModuleName="" ControlName="7" DeviceType="AUX" DisplayName="" InputType="DoubleInput" InputMode="" Min="0" Max="5000" Description="" />
|
|
|
+ <Step ModuleName="" ControlName="8" DeviceType="AUX" DisplayName="" InputType="DoubleInput" InputMode="" Min="0" Max="5000" Description="" />
|
|
|
+ <Step ModuleName="" ControlName="9" DeviceType="AUX" DisplayName="" InputType="DoubleInput" InputMode="" Min="0" Max="5000" Description="" />
|
|
|
+ <Step ModuleName="" ControlName="10" DeviceType="AUX" DisplayName="" InputType="DoubleInput" InputMode="" Min="0" Max="5000" Description="" />
|
|
|
+ <Step ModuleName="" ControlName="11" DeviceType="AUX" DisplayName="" InputType="DoubleInput" InputMode="" Min="0" Max="5000" Description="" />
|
|
|
+ <Step ModuleName="" ControlName="12" DeviceType="AUX" DisplayName="" InputType="DoubleInput" InputMode="" Min="0" Max="5000" Description="" />
|
|
|
+ <Step ModuleName="" ControlName="13" DeviceType="AUX" DisplayName="" InputType="DoubleInput" InputMode="" Min="0" Max="5000" Description="" />
|
|
|
+ <Step ModuleName="" ControlName="14" DeviceType="AUX" DisplayName="" InputType="DoubleInput" InputMode="" Min="0" Max="5000" Description="" />
|
|
|
+ <Step ModuleName="" ControlName="15" DeviceType="AUX" DisplayName="" InputType="DoubleInput" InputMode="" Min="0" Max="5000" Description="" />
|
|
|
+ <Step ModuleName="" ControlName="16" DeviceType="AUX" DisplayName="" InputType="DoubleInput" InputMode="" Min="0" Max="5000" Description="" />
|
|
|
+ <Step ModuleName="" ControlName="17" DeviceType="AUX" DisplayName="" InputType="DoubleInput" InputMode="" Min="0" Max="5000" Description="" />
|
|
|
+ <Step ModuleName="" ControlName="18" DeviceType="AUX" DisplayName="" InputType="DoubleInput" InputMode="" Min="0" Max="5000" Description="" />
|
|
|
+ <Step ModuleName="" ControlName="19" DeviceType="AUX" DisplayName="" InputType="DoubleInput" InputMode="" Min="0" Max="5000" Description="" />
|
|
|
+ <Step ModuleName="" ControlName="20" DeviceType="AUX" DisplayName="" InputType="DoubleInput" InputMode="" Min="0" Max="5000" Description="" />
|
|
|
+ <Step ModuleName="" ControlName="21" DeviceType="AUX" DisplayName="" InputType="DoubleInput" InputMode="" Min="0" Max="5000" Description="" />
|
|
|
+ <Step ModuleName="" ControlName="22" DeviceType="AUX" DisplayName="" InputType="DoubleInput" InputMode="" Min="0" Max="5000" Description="" />
|
|
|
+ <Step ModuleName="" ControlName="23" DeviceType="AUX" DisplayName="" InputType="DoubleInput" InputMode="" Min="0" Max="5000" Description="" />
|
|
|
+ <Step ModuleName="" ControlName="24" DeviceType="AUX" DisplayName="" InputType="DoubleInput" InputMode="" Min="0" Max="5000" Description="" />
|
|
|
+ <Step ModuleName="" ControlName="25" DeviceType="AUX" DisplayName="" InputType="DoubleInput" InputMode="" Min="0" Max="5000" Description="" />
|
|
|
+ <Step ModuleName="" ControlName="26" DeviceType="AUX" DisplayName="" InputType="DoubleInput" InputMode="" Min="0" Max="5000" Description="" />
|
|
|
+ <Step ModuleName="" ControlName="27" DeviceType="AUX" DisplayName="" InputType="DoubleInput" InputMode="" Min="0" Max="5000" Description="" />
|
|
|
+ <Step ModuleName="" ControlName="28" DeviceType="AUX" DisplayName="" InputType="DoubleInput" InputMode="" Min="0" Max="5000" Description="" />
|
|
|
+ <Step ModuleName="" ControlName="29" DeviceType="AUX" DisplayName="" InputType="DoubleInput" InputMode="" Min="0" Max="5000" Description="" />
|
|
|
+ <Step ModuleName="" ControlName="30" DeviceType="AUX" DisplayName="" InputType="DoubleInput" InputMode="" Min="0" Max="5000" Description="" />
|
|
|
+ <Step ModuleName="" ControlName="31" DeviceType="AUX" DisplayName="" InputType="DoubleInput" InputMode="" Min="0" Max="5000" Description="" />
|
|
|
+ <Step ModuleName="" ControlName="32" DeviceType="AUX" DisplayName="" InputType="DoubleInput" InputMode="" Min="0" Max="5000" Description="" />
|
|
|
+ <Step ModuleName="" ControlName="33" DeviceType="AUX" DisplayName="" InputType="DoubleInput" InputMode="" Min="0" Max="5000" Description="" />
|
|
|
+ <Step ModuleName="" ControlName="34" DeviceType="AUX" DisplayName="" InputType="DoubleInput" InputMode="" Min="0" Max="5000" Description="" />
|
|
|
+ <Step ModuleName="" ControlName="35" DeviceType="AUX" DisplayName="" InputType="DoubleInput" InputMode="" Min="0" Max="5000" Description="" />
|
|
|
+ <Step ModuleName="" ControlName="36" DeviceType="AUX" DisplayName="" InputType="DoubleInput" InputMode="" Min="0" Max="5000" Description="" />
|
|
|
+ <Step ModuleName="" ControlName="37" DeviceType="AUX" DisplayName="" InputType="DoubleInput" InputMode="" Min="0" Max="5000" Description="" />
|
|
|
+ <Step ModuleName="" ControlName="38" DeviceType="AUX" DisplayName="" InputType="DoubleInput" InputMode="" Min="0" Max="5000" Description="" />
|
|
|
+ <Step ModuleName="" ControlName="39" DeviceType="AUX" DisplayName="" InputType="DoubleInput" InputMode="" Min="0" Max="5000" Description="" />
|
|
|
+ <Step ModuleName="" ControlName="40" DeviceType="AUX" DisplayName="" InputType="DoubleInput" InputMode="" Min="0" Max="5000" Description="" />
|
|
|
+ <Step ModuleName="" ControlName="41" DeviceType="AUX" DisplayName="" InputType="DoubleInput" InputMode="" Min="0" Max="5000" Description="" />
|
|
|
+ <Step ModuleName="" ControlName="42" DeviceType="AUX" DisplayName="" InputType="DoubleInput" InputMode="" Min="0" Max="5000" Description="" />
|
|
|
+ <Step ModuleName="" ControlName="43" DeviceType="AUX" DisplayName="" InputType="DoubleInput" InputMode="" Min="0" Max="5000" Description="" />
|
|
|
+ <Step ModuleName="" ControlName="44" DeviceType="AUX" DisplayName="" InputType="DoubleInput" InputMode="" Min="0" Max="5000" Description="" />
|
|
|
+ <Step ModuleName="" ControlName="45" DeviceType="AUX" DisplayName="" InputType="DoubleInput" InputMode="" Min="0" Max="5000" Description="" />
|
|
|
+ <Step ModuleName="" ControlName="46" DeviceType="AUX" DisplayName="" InputType="DoubleInput" InputMode="" Min="0" Max="5000" Description="" />
|
|
|
+ <Step ModuleName="" ControlName="47" DeviceType="AUX" DisplayName="" InputType="DoubleInput" InputMode="" Min="0" Max="5000" Description="" />
|
|
|
+ <Step ModuleName="" ControlName="48" DeviceType="AUX" DisplayName="" InputType="DoubleInput" InputMode="" Min="0" Max="5000" Description="" />
|
|
|
+ <Step ModuleName="" ControlName="49" DeviceType="AUX" DisplayName="" InputType="DoubleInput" InputMode="" Min="0" Max="5000" Description="" />
|
|
|
+ <Step ModuleName="" ControlName="50" DeviceType="AUX" DisplayName="" InputType="DoubleInput" InputMode="" Min="0" Max="5000" Description="" />
|
|
|
+ <Step ModuleName="" ControlName="51" DeviceType="AUX" DisplayName="" InputType="DoubleInput" InputMode="" Min="0" Max="5000" Description="" />
|
|
|
+ <Step ModuleName="" ControlName="52" DeviceType="AUX" DisplayName="" InputType="DoubleInput" InputMode="" Min="0" Max="5000" Description="" />
|
|
|
+ <Step ModuleName="" ControlName="53" DeviceType="AUX" DisplayName="" InputType="DoubleInput" InputMode="" Min="0" Max="5000" Description="" />
|
|
|
+ <Step ModuleName="" ControlName="54" DeviceType="AUX" DisplayName="" InputType="DoubleInput" InputMode="" Min="0" Max="5000" Description="" />
|
|
|
+ <Step ModuleName="" ControlName="55" DeviceType="AUX" DisplayName="" InputType="DoubleInput" InputMode="" Min="0" Max="5000" Description="" />
|
|
|
+ <Step ModuleName="" ControlName="56" DeviceType="AUX" DisplayName="" InputType="DoubleInput" InputMode="" Min="0" Max="5000" Description="" />
|
|
|
+ <Step ModuleName="" ControlName="57" DeviceType="AUX" DisplayName="" InputType="DoubleInput" InputMode="" Min="0" Max="5000" Description="" />
|
|
|
+ <Step ModuleName="" ControlName="58" DeviceType="AUX" DisplayName="" InputType="DoubleInput" InputMode="" Min="0" Max="5000" Description="" />
|
|
|
+ <Step ModuleName="" ControlName="59" DeviceType="AUX" DisplayName="" InputType="DoubleInput" InputMode="" Min="0" Max="5000" Description="" />
|
|
|
+ <Step ModuleName="" ControlName="60" DeviceType="AUX" DisplayName="" InputType="DoubleInput" InputMode="" Min="0" Max="5000" Description="" />
|
|
|
+ <Step ModuleName="" ControlName="61" DeviceType="AUX" DisplayName="" InputType="DoubleInput" InputMode="" Min="0" Max="5000" Description="" />
|
|
|
+ <Step ModuleName="" ControlName="62" DeviceType="AUX" DisplayName="" InputType="DoubleInput" InputMode="" Min="0" Max="5000" Description="" />
|
|
|
+ <Step ModuleName="" ControlName="63" DeviceType="AUX" DisplayName="" InputType="DoubleInput" InputMode="" Min="0" Max="5000" Description="" />
|
|
|
+ <Step ModuleName="" ControlName="64" DeviceType="AUX" DisplayName="" InputType="DoubleInput" InputMode="" Min="0" Max="5000" Description="" />
|
|
|
+ <Step ModuleName="" ControlName="65" DeviceType="AUX" DisplayName="" InputType="DoubleInput" InputMode="" Min="0" Max="5000" Description="" />
|
|
|
+ <Step ModuleName="" ControlName="66" DeviceType="AUX" DisplayName="" InputType="DoubleInput" InputMode="" Min="0" Max="5000" Description="" />
|
|
|
+ <Step ModuleName="" ControlName="67" DeviceType="AUX" DisplayName="" InputType="DoubleInput" InputMode="" Min="0" Max="5000" Description="" />
|
|
|
+ <Step ModuleName="" ControlName="68" DeviceType="AUX" DisplayName="" InputType="DoubleInput" InputMode="" Min="0" Max="5000" Description="" />
|
|
|
+ <Step ModuleName="" ControlName="69" DeviceType="AUX" DisplayName="" InputType="DoubleInput" InputMode="" Min="0" Max="5000" Description="" />
|
|
|
+ <Step ModuleName="" ControlName="70" DeviceType="AUX" DisplayName="" InputType="DoubleInput" InputMode="" Min="0" Max="5000" Description="" />
|
|
|
+ <Step ModuleName="" ControlName="71" DeviceType="AUX" DisplayName="" InputType="DoubleInput" InputMode="" Min="0" Max="5000" Description="" />
|
|
|
+ <Step ModuleName="" ControlName="72" DeviceType="AUX" DisplayName="" InputType="DoubleInput" InputMode="" Min="0" Max="5000" Description="" />
|
|
|
+ <Step ModuleName="" ControlName="73" DeviceType="AUX" DisplayName="" InputType="DoubleInput" InputMode="" Min="0" Max="5000" Description="" />
|
|
|
+ <Step ModuleName="" ControlName="74" DeviceType="AUX" DisplayName="" InputType="DoubleInput" InputMode="" Min="0" Max="5000" Description="" />
|
|
|
+ <Step ModuleName="" ControlName="75" DeviceType="AUX" DisplayName="" InputType="DoubleInput" InputMode="" Min="0" Max="5000" Description="" />
|
|
|
+ <Step ModuleName="" ControlName="76" DeviceType="AUX" DisplayName="" InputType="DoubleInput" InputMode="" Min="0" Max="5000" Description="" />
|
|
|
+ <Step ModuleName="" ControlName="77" DeviceType="AUX" DisplayName="" InputType="DoubleInput" InputMode="" Min="0" Max="5000" Description="" />
|
|
|
+ </Group>
|
|
|
+ </Catalog>
|
|
|
+
|
|
|
+ <!--*************************************************************-->
|
|
|
+ <ProcessConfig DisplayName="ProcessConfig">
|
|
|
+ <Configs DisplayName="Process Config">
|
|
|
+ <Config Default="0" ControlName="RecipeTime" DisplayName="Recipe Time(s)" InputType="DoubleInput" EnableConfig="true" EnableTolerance="false" />
|
|
|
+ <Config Default="0" ControlName="ProcessPurgeCount" DisplayName="Purge Count" Max="100" Min="0" InputType="DoubleInput" />
|
|
|
+ </Configs>
|
|
|
+ </ProcessConfig>
|
|
|
+
|
|
|
+ <VariableParameterConfig DisplayName="VariableParameterConfig">
|
|
|
+ <Configs DisplayName="Variable Parameter">
|
|
|
+ <Config Default="" ControlName="StepTime" DisplayName="Step Time" InputType="TextInput" />
|
|
|
+ <Config Default="" ControlName="Temperature" DisplayName="Temperature" InputType="TextInput" />
|
|
|
+ <Config Default="" ControlName="LoopFrequency" DisplayName="Loop Frequency" InputType="TextInput" />
|
|
|
+ <Config Default="" ControlName="SubRecipeLoopFrequency" DisplayName="SubRecipe Loop Frequency" InputType="TextInput" />
|
|
|
+ <Config Default="" ControlName="Thickness" DisplayName="Thickness" InputType="TextInput" />
|
|
|
+ <Config Default="" ControlName="MFC" DisplayName="MFC" InputType="TextInput" />
|
|
|
+ <Config Default="" ControlName="BoatElevator" DisplayName="Boat Elevator" InputType="TextInput" />
|
|
|
+ <Config Default="" ControlName="BoatRotation" DisplayName="Boat Rotation" InputType="TextInput" />
|
|
|
+ <Config Default="" ControlName="PressureValveAngle" DisplayName="Pressure Valve Angle" InputType="TextInput" />
|
|
|
+ <Config Default="" ControlName="PressureControl1" DisplayName="Pressure Control1" InputType="TextInput" />
|
|
|
+ <Config Default="" ControlName="PressureControl2" DisplayName="Pressure Control2" InputType="TextInput" />
|
|
|
+ <Config Default="" ControlName="SlowVAC" DisplayName="Slow VAC" InputType="TextInput" />
|
|
|
+ <Config Default="" ControlName="BurnTemperature" DisplayName="Burn temperature" InputType="TextInput" />
|
|
|
+ </Configs>
|
|
|
+ </VariableParameterConfig>
|
|
|
+
|
|
|
+ </TableRecipeFormat>
|
|
|
+
|
|
|
+ <TableRecipeSchema>
|
|
|
+ <xs:schema attributeFormDefault="unqualified" elementFormDefault="qualified" xmlns:xs="http://www.w3.org/2001/XMLSchema">
|
|
|
+ <xs:simpleType name="processType">
|
|
|
+ <xs:restriction base="xs:string">
|
|
|
+ <xs:enumeration value="Process" />
|
|
|
+ <xs:enumeration value="Clean" />
|
|
|
+ </xs:restriction>
|
|
|
+ </xs:simpleType>
|
|
|
+ <xs:simpleType name="booleanType">
|
|
|
+ <xs:restriction base="xs:string">
|
|
|
+ <xs:enumeration value="0" />
|
|
|
+ <xs:enumeration value="1" />
|
|
|
+ <xs:enumeration value="False" />
|
|
|
+ <xs:enumeration value="True" />
|
|
|
+ <xs:enumeration value="false" />
|
|
|
+ <xs:enumeration value="true" />
|
|
|
+ </xs:restriction>
|
|
|
+ </xs:simpleType>
|
|
|
+ <xs:element name="TableRecipeData">
|
|
|
+ <xs:complexType>
|
|
|
+ <xs:sequence>
|
|
|
+ <xs:element maxOccurs="unbounded" name="Step">
|
|
|
+ <xs:complexType>
|
|
|
+ <xs:sequence>
|
|
|
+
|
|
|
+ <xs:element name="Mfc">
|
|
|
+ <xs:complexType>
|
|
|
+ <xs:attribute name="Flow.Gas1" type="xs:double" use="optional" />
|
|
|
+ <xs:attribute name="Flow.Gas2" type="xs:double" use="optional" />
|
|
|
+ <xs:attribute name="Flow.Gas3" type="xs:double" use="optional" />
|
|
|
+ <xs:attribute name="Flow.Gas4" type="xs:double" use="optional" />
|
|
|
+ </xs:complexType>
|
|
|
+ </xs:element>
|
|
|
+
|
|
|
+ </xs:sequence>
|
|
|
+ <xs:attribute name="StepNo" type="xs:string" use="required" />
|
|
|
+ <xs:attribute name="Name" type="xs:string" use="required" />
|
|
|
+ <xs:attribute name="Loop" type="xs:string" use="required" />
|
|
|
+ <xs:attribute name="Type" type="xs:string" use="required" />
|
|
|
+ <xs:attribute name="StepTime" type="xs:time" use="optional" />
|
|
|
+ </xs:complexType>
|
|
|
+ </xs:element>
|
|
|
+ </xs:sequence>
|
|
|
+ <xs:attribute name="RecipeChamberType" type="xs:string" fixed="Furnace" use="required" />
|
|
|
+ <xs:attribute name="RecipeProcessType" type="xs:string" use="required" />
|
|
|
+ <xs:attribute name="RecipeVersion" type="xs:string" fixed="1.0" use="required" />
|
|
|
+ <xs:attribute name="CreatedBy" type="xs:string" use="required" />
|
|
|
+ <xs:attribute name="CreationTime" type="xs:dateTime" use="required" />
|
|
|
+ <xs:attribute name="LastRevisedBy" type="xs:string" use="required" />
|
|
|
+ <xs:attribute name="LastRevisionTime" type="xs:dateTime" use="required" />
|
|
|
+ <xs:attribute name="Description" type="xs:string" use="required" />
|
|
|
+ </xs:complexType>
|
|
|
+ </xs:element>
|
|
|
+ </xs:schema>
|
|
|
+ </TableRecipeSchema>
|
|
|
+</Aitex>
|