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@@ -443,15 +443,15 @@
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diInStockerLayer4="DI_FOUPRobotWithinBufferLayer4Area"
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diTPEmo="DI_FOUPRobotTPEMOButton"
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diServoOn="DI_FOUPRobotTPServoOn"
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- diTPStatus="DI_FOUPRobotPedantMode"
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- diRobotPowerOn="DI_FOUPRobotFoupOnRobotCheck"
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- diAlarm="DI_FOUPRobotAlarmSignal"
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- diBlade1WaferPresent="DI_FOUPRobotEachHandWaferStatus"
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+ diTPStatus="DI_FOUPRobotTPStatus"
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+ diRobotPowerOn="DI_FOUPRobotFoupOnRobotCheck"
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+ diAlarm="DI_FOUPRobotAlarmSignal"
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+ diBlade1WaferPresent="DI_FOUPRobotEachHandWaferStatus"
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- diZAxisHomePosition="DI_FOUPRobotAxisZHomePosition"
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- diYAxisHomePosition="DI_FOUPRobotAxisYHomePosition"
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- diRAxisHomePosition="DI_FOUPRobotAxisRHomePosition"
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- diRunning="DI_FOUPRobotRunning"
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+ diZAxisHomePosition="DI_FOUPRobotAxisZHomePosition"
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+ diYAxisHomePosition="DI_FOUPRobotAxisYHomePosition"
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+ diRAxisHomePosition="DI_FOUPRobotAxisRHomePosition"
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+ diRunning="DI_FOUPRobotRunning"
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doAlarmReset="DO_FOUPRobotAlarmReset"
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doActionHold="DO_FOUPRobotActionHold"
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@@ -992,8 +992,8 @@
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<IoAlarmSignal id="AlarmSignaWaferRobotAlarm" diSignalsplay="WaferRobotAlarm" diSignal="DI_WaferRobotAlarm" alarmTrigValue="true"/>
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<IoAlarmSignal id="AlarmSignaFOUPRobotAlarm" diSignalsplay="FOUP RobotAlarm" diSignal="DI_FOUPRobotAlarmSignal" alarmTrigValue="true"/>
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- <IoAlarmSignal id="AlarmSignaFOUPRobotTPStatusWarning" diSignalsplay="FOUPRobotTPStatusWarning" diSignal="DI_FOUPRobotTPStatus" alarmTrigValue="false"/>
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- <IoAlarmSignal id="AlarmSignaWaferRobotTPStatusWarning" diSignalsplay="WaferRobotTPStatusWarning" diSignal="DI_WaferRobotTPStatus" alarmTrigValue="false"/>
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+ <IoAlarmSignal id="AlarmSignaFOUPRobotTPStatusWarning" diSignalsplay="FOUPRobotTPStatusWarning" diSignal="DI_FOUPRobotTPStatus" alarmTrigValue="true"/>
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+ <IoAlarmSignal id="AlarmSignaWaferRobotTPStatusWarning" diSignalsplay="WaferRobotTPStatusWarning" diSignal="DI_WaferRobotTPStatus" alarmTrigValue="true"/>
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<IoAlarmSignal id="AlarmSignalGLBoxPG7CNT1Alarm" diSignalsplay="Gas box PG7 CNT1 alarm" diSignal="DI_GLBoxPG7CNT1Alarm" alarmTrigValue="true"/>
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<IoAlarmSignal id="AlarmSignalGLBoxPG7CNT2Alarm" diSignalsplay="Gas box PG7 CNT2 alarm" diSignal="DI_GLBoxPG7CNT2Alarm" alarmTrigValue="true"/>
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